num_pages: 570
description: Proceedings of the symposium held May 22-26, 1995 in Strasbourg, France.
language: English
title: C, H, N and O in Si and Characterization and Simulation of Materials and Processes
titlecomplete: C, H, N and O in Si and Characterization and Simulation of Materials and Processes (European Materials Research Society Symposia Proceedings)
publisher: North-Holland