language: English
title: Advanced Characterization Techiniques for Optics, Semiconductors, and Nanotechnologies: 3-5 August 2003 San Diego, California, USA
titlecomplete: Advanced Characterization Techiniques for Optics, Semiconductors, and Nanotechnologies: 3-5 August 2003 San Diego, California, USA (Proceedings of Spie Volume 5188)
publisher: Society of Photo Optical