description: This collection of papers examines education in microelectronics and microelectromechanical systems (MEMS).
language: English
title: Education in Microelectronics and Mems: 28-29 October 1999 Royal Pines Resort, Queensland, Australia
titlecomplete: Education in Microelectronics and Mems: 28-29 October 1999 Royal Pines Resort, Queensland, Australia (Proceedings of Spie)
publisher: Society of Photo Optical