num_pages: 1192
language: English
title: Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France
titlecomplete: Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France (Proceedings of Spie--The International Society for Optical Engineering, V. 3680.)
publisher: Society of Photo Optical