num_pages: 186
language: English
title: Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II: 29-30 January 1998 San Jose, California
titlecomplete: Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays II: 29-30 January 1998 San Jose, California (Spie Proceedings Series Volume 3275)
publisher: Society of Photo Optical