num_pages: 188
language: English
title: Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado
titlecomplete: Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8-9 August 1996, Denver, Colorado (SPIE proceedings series)
publisher: SPIE-The International Society for Optical Engineering