num_pages: 765
description: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
language: English
title: Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Volume 13
titlecomplete: Advanced Metallization and Interconnect Systems for ULSI Applications in 1997: Volume 13 (MRS Conference Proceedings)
publisher: Materials Research Society