num_pages: 642
description: In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.
language: English
title: The Physics of Micro/Nano-Fabrication
titlecomplete: The Physics of Micro/Nano-Fabrication (Microdevices)
publisher: Springer