num_pages: 850
description: This volume examines the design, test, integration and packaging of MEMS/MOEMS 2002.
language: English
title: Design, Test, Integration, and Packaging of Mems/ Moems 2002
titlecomplete: Design, Test, Integration, and Packaging of Mems/ Moems 2002 (Proceedings of Spie)
publisher: Society of Photo Optical