num_pages: 338
description: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
language: English
title: Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276
titlecomplete: Smart Materials Fabrication and Materials for Micro-Electro-Mechanical Systems: Volume 276 (MRS Proceedings)
publisher: Cambridge University Press