num_pages: 455
description: Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation modeling from first principles and a detailed look at commercialized MEMS devices in addition to microfluidics. Multiple field-tested laboratory exercises are included designed to facilitate student learning about the fundamentals of microfabrication processes. References suggested reading review questions and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
language: English
title: Introductory MEMS: Fabrication and Applications
publisher: Springer