num_pages: 540
description: Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major the physics of the lithographic process, organic resist materials, resistprocessing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specificaspects of microlithography.
language: English
title: Introduction to Microlithography
titlecomplete: Introduction to Microlithography (ACS Professional Reference Book)
ratings_count: 1
publisher: American Chemical Society