num_pages: 944
description: This is the first textbook to provide a comprehensive overview of the field, beginning with micromachining approaches and then covering all major categories of transduction. The book takes a practical approach to the subject and studies key design issues by examining the fabrication of different devices.
language: English
title: Micromachined Transducers Sourcebook
titlecomplete: Micromachined Transducers Sourcebook
ratings_count: 7
publisher: McGraw-Hill Science/Engineering/Math