num_pages: 566
description: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
language: English
title: Device And Process Technologies For MEMS, Microelectronics, and Photonics III
titlecomplete: Device And Process Technologies For MEMS, Microelectronics, and Photonics III (Proceedings of Spie)
publisher: Society of Photo Optical