num_pages: 368
description: This book provides fundamental and practical information on all aspects of GaAs processing. The book also gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography, and dry etching.
language: English
title: Fabrication of GaAs Devices
titlecomplete: Fabrication of GaAs Devices
ratings_count: 2
publisher: The Institution of Engineering and Technology