num_pages: 294
language: English
title: IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems 1993 : Proceedings : Fort Laud
titlecomplete: IEEE Micro Electro Mechanical Systems: An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems 1993 : Proceedings : Fort Laud
ratings_count: 1
publisher: IEEE