num_pages: 176
description: A selection of scientific papers on the reliability of microelectromechanical systems (MEMS) for critical and space applications.
language: English
title: MEMS Reliability for Critical and Space Applications: 21-22 September, 1999, Santa Clara, California
titlecomplete: MEMS Reliability for Critical and Space Applications: 21-22 September, 1999, Santa Clara, California
publisher: Society of Photo Optical