Patent SG-11201804636Y-A (SG)
Title: Composition for post chemical-mechanical-polishing cleaning
Inventor: DÄSCHLEIN CHRISTIAN
IPC: C11D3/00
Filed: 2016-12-20
Abstract: WIPOI PCT () Title: COMPOSITION FOR POST CHEMICAL-MECHANICAL-POLISHING CLEANING (57) : Described is a post chemical-mechanical-polishing (post-CMP) cleaning composition comprising or consisting of: (A) one or more nonionic polymers selected from the group consisting of poly- acrylamides, polyhydroxyethyl(meth)acrylates (PHE(M)A), polyvinylpyrrolidone (PVP), polyvinyl alcohol (PVA), polymers of foimula (I), and mixtures thereof, wherein R1 is hydrogen, methyl, ethyl, n-propyl, /so-propyl, n-butyl, iso-butyl, or sec-butyl, R2 is hy- drogen or methyl, and n is an integer, (B) poly(acrylic acid) (PAA) or acrylic acid-maleic acid copolymer with a mass average molar mass formula (I) (Mw) of up to 10,000 g/mol, and (C) water, wherein the pH of the composition is in the range of from 7.0 to 10.5. (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) Ho Ho !Ho (19) World Intellectual Property Organization International Bureau (10) International Publication Number WO 2017/108748 A3 (43) International Publication Date 29 June 2017 (29.06.2017) (51) International Patent Classification: HO1L 21/321 (2006.01) C11D 3/37 (2006.01) CHD 3/00 (2006.01) C11D 11/00 (2006.01) (21) International Application Number: PCT/EP2016/081856 KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) (88) Date of publication of the international search report: 02 November 2017 (02.11.2017) (22) International Filing Date: 20 December 2016 (20.12.2016) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15201935.2 22 December 2015 (22.12.2015) EP (71) Applicant: BASF SE [DE/DE]; Carl-Bosch-StraBe 38, 67056 Ludwigshafen am Rhein (DE). (72) Inventors: DASCHLEIN, Christian; Markgrafenstr. 4, 44791 Bochum (DE). SIEBERT, Max; Voelklinger Strasse 20, 67063 Ludwigshafen (DE). LAUTER, Michael; GontardstraBe 6, 68163 Mannheim (DE). PRZY- BYLSKI, Peter; LenaustraBe 8, 67063 Ludwigshafen (DE). PROELSS, Julian; Bennigsenstr. 40, 67549 Woiins (DE). KLIPP, Andreas; Viktoriaring 15, 67245 Lamb- sheim (DE). GUEVENC, Haci Osman; Langer Anger 109, 69115 Heidelberg (DE). LEUNISSEN, Leonardus; Buerg- eiineister-Fries-Strasse 13a, 67069 Ludwigshafen (DE). BAUMANN, Roelf-Peter; L8, 1, 68161 Mannheim (DE). WEI, Te Yu; 6F.-23, No.111, Wenhua 7th Rd., Taoyuan City, 333 (TW). (74) Agent: EISENFUHR SPEISER PATENTANWALTE RECHTSANWALTE PARTGMBB; Postfach 10 60 78, 28060 Bremen (DE). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, W O 20 17 / 1087 48 A3