baber/WOPTO huggingface dataset:
Patent KR-20090014480-A (KR)
Title: Construction method for waterproofing and root penetration resistance
Inventor: YOO BYUNG DO
IPC: E04B1/64
Filed: 2007-08-06
Abstract: A waterproof and root-proof construction method is provided to promote the convenience of construction and the reliability on the installation of a waterproof layer by attaching a perforated felt to install a root-proof layer easily on a waterproof layer, thereby to apply to various repair or replacement works and waterproof and root-proof construction works for an external press layer of a newly-established structure. A waterproof and root-proof construction method comprises the steps of removing impurities on a concrete floor surface and arranging, applying primer(10) evenly on the concrete floor surface, and after checking the dryness of the primer, applying an asphalt waterproof material or a urethane waterproof material(20) evenly on the primer and attaching an adhesive sheet on the applied asphalt waterproof material or urethane waterproof material, attaching a roof-proof sheet(40) on the top of a perforated felt(30) or the adhesive sheet and attaching a joint tape of PET material on the overlapped part of the roof-proof sheet and the roof-proof sheet, and constructing a press concrete layer on the roof-proof sheet.
Patent KR-20090016103-A (KR)
Title: Phase-change memory device and fabrication method thereof
Inventor: CHAE SU JIN
IPC: H01L27/115
Filed: 2007-08-10
Abstract: A phase change memory device and a manufacturing method thereof are provided to reduce the total driving power of a device by reducing a reset current by increasing an interface resistance of the bottom electrode contact while minimizing a contact area between the bottom electrode contact and the phase-change material layer. A bottom electrode contact hole to expose a bottom electrode(102) is formed on a semiconductor substrate with the bottom electrode. A conductive material layer is formed in the side and the bottom surface of the bottom electrode contact hole and a dielectric material layer is reclaimed in the conductive material layer. A bottom electrode contact(112) is formed by changing the upper interface of the conductive material layer to a high resistance interface layer(110-2). The conductive material layer is deposited by a CVD(Chemical Vapor Deposition) mode or an ALD(Atomic Layer Deposition) mode by using a TiCl4 source and NH3.
Patent KR-20090018359-A (KR)
Title: Telescope steering apparatus
Inventor: OH JAE MOON
IPC: B62D1/18
Filed: 2007-08-17
Abstract: A telescope steering system is applied to the vehicle in which the adjusting bolt passes through the outer tube. A telescope steering system comprises an outer tube in which the inner tube is inserted, a ring bolt(310), and a distance housing(410) in which a first penetration hole and a second penetration hole are built up respectively at the either side. A slot(220) is formed at the outer circumference of the outer tube. The ring bolt includes a body portion covering the outer tube, first connecting part and second connecting part formed at both sides of the body portion, and one or more protrusion formed in the inner circumference of the body portion.
Patent KR-20070090874-A (KR)
Title: Fan bag
Inventor: HWANG JIN KUK
IPC: A45C13/00
Filed: 2007-08-19
Abstract: A fan bag for preventing a user's back from being soaked with sweat is provided to discharge heat and sweat generated on a user's back easily by mounting an air pipe and a cooling fan on a backplate of the bag. A fan bag is formed by forming an air pipe, a cooling fan(3) and an air discharge recess(2) on a backplate of a bag to discharge easily sweat and heat generated when the bag and a user's back are adhered to each other. Wind goes in through an air inlet, passes through an air pipe and is discharged from a front part of the fan. A radial air discharge recess(2) is formed on the periphery of the front surface of the fan(3) to make the wind go out through the space between a user's back and a backplate of the bag. The speed of the fan is controlled by a micro processor.
Patent KR-20090019098-A (KR)
Title: Method for communication using push to talk protocol and system thereof
Inventor: KIM BO SUNG
IPC: H04W4/10
Filed: 2007-08-20
Abstract: A communication method using a push to talk protocol and a system thereof are provided to remove a person compulsorily who is not matched with a purpose of communication during a PTT conversation room communication mode, thereby improving user's convenience. A controller sets up a compulsory removing method(S201). The controller performs a PTT conversation room communication mode(S203). The controller inputs a specific key for compulsorily removing a specific person during the PTT conversation room communication mode and recognizes that the specific person is designated(S205). The controller compulsorily removes the specific person from the PTT conversation room according to a set method(S207). The controller rejects a PTT conversation room communication request of the specific person(S209).
Patent KR-20090019364-A (KR)
Title: 반지위에 시계를 부착하여 귀금속을 부친 시계 반지
Inventor: KIM JONG LYL
IPC: A44C9/00
Filed: 2007-08-21
Abstract: 본 발명은 사람들이 손가락에 끼고 다니는 반지에 시계을 부착하여 시계에 보석을 부착하거나 크기가 다른 시계을 부착하여 보석과 시계을 한번에 볼수 있게 한다 
       
     시계 반지 보석
Patent KR-20080018843-A (KR)
Title: System and method for determining that a maximum number of ip sessions have been established
Inventor: WIRTANEN JEFF
IPC: H04L12/70
Filed: 2007-08-24
Abstract: A system and a method for determining whether a maximum number of IP(Internet Protocol) sessions are set are provided to obtain the maximum number of the IP session supported for the mobile device and manage the IP sessions based on the maximum number of IP sessions supported for the mobile device. A method for determining whether a maximum number of IP sessions comprises the following steps of: transmitting at least one pre-defined type request; receiving an indication that the request can not be performed because a maximum number of IP sessions are preset to a mobile device; obtaining the maximum number of the IP session supported for the mobile device in a given network area based on the indication(5-1); and managing the IP sessions based on the maximum number of IP session supported for the mobile device(5-2).
Patent KR-20090023920-A (KR)
Title: Ring type laser diode
Inventor: RYU SANG WAN
IPC: H01S3/0941
Filed: 2007-09-03
Abstract: A ring type laser diode is provided to improve light extraction efficiency by extracting the light rotating along an active layer repetitively. A ring type laser diode has a structure of a ring type waveguide. A cladding layer, an active layer(110) and an electrode(160) are formed on a substrate. An active layer forms a ring type closed curved surface. A grating unit(130) is formed in a part of the active layer. The cladding layer is positioned in the upper part of the active layer. The electrode is formed in the upper part of the cladding layer. The electrode has the opened ring type. The laser light rotates along the structure of the ring type waveguide. The laser light is discharged to the upper part or lower part of the substrate through the grating unit.
Patent KR-20090029556-A (KR)
Title: Digital hemadynamometer of wristwatch type
Inventor: LEE SANG GOO
IPC: A61B5/022
Filed: 2007-09-18
Abstract: A digital hemadynamometer of wristwatch type is provided to prevent the hand numbedness and detect exactly the blood pressure by using the piezoelectric sensor contacting with the aorta radialis of wrist. The blood pressure measurement part(200) measures the blood pressure by rising the location of the piezoelectric sensor(230) contacting with aorta radialis of wrist in the blood pressure measurement of the human body. The main body(100) of digital hemadynamometer indicates and stores the information about the blood pressure measured from the blood pressure measurement part. The manchette(210) is connected to the main body of digital hemadynamometer and presses the wrist. The piezoelectric sensor(230) is arranged at the upper part of airbag. The band lower plate(212) supports the airbag.
Patent KR-20090030597-A (KR)
Title: Torque converter for vehicle
Inventor: HONG SOON SEOK
IPC: F16H41/24
Filed: 2007-09-20
Abstract: A torque converter for vehicles is provided to prevent the gap between the impeller blade and the impeller shell from being wide. An impeller is joined to a front cover and rotated. An impeller shell(61) and a plurality of impeller blades(63) are included in the impeller. A turbine is arranged in the location which is in opposite directions to the impeller, and rotates according to the rotation of impeller. A reactor is arranged between the impeller and the turbine, and alters the oil flow coming from the turbine into the impeller side. The lock-up clutch directly connects the front cover and the turbine. The distortional damper is combined with the lock-up clutch. The impeller blade comprises an extension part(63b).
Patent KR-20090036196-A (KR)
Title: A solvent type polyurethane composition for seam sealing tape, a method of preparing a polyurethane film by using the same, and seam sealing tape comprising the polyurethane film
Inventor: KIM JU HEA
IPC: C08L75/04
Filed: 2007-10-09
Abstract: A solvent type polyurethane composition for seam sealing tape is provided to realize various color expression through the addition of pigment and to show the property equal to conventional thermoplastic polyurethane. A solvent type polyurethane composition for seam sealing tape comprises low-viscosity polyurethanes with viscosity of 5000-8000 cps, high-viscosity polyurethanes with viscosity of 80000-100000 cps, cross-linking agent and solvent. A method for manufacturing a polyurethane film comprises the steps of: coating the solvent type polyurethane composition in the form of a film; and proceeding the crosslinking reaction by curing the coated film.
Patent KR-20090039344-A (KR)
Title: The method and system of offering stock information through measurement securities analyst performance and rating of analysts
Inventor: PARK IN TAE
IPC: G06Q40/06
Filed: 2007-10-18
Abstract: A method and a system of offering stock information through evaluation and rating of analysts are provided to evaluate an analyst through actual result measurement per an item of analysts and assign weight to the latest opinions, thereby enabling an investor to distinguish a reliable new report. Data about prediction of stock price of each analyst is extracted and stored from an open report(S10). Stored target stock price and stock price per each period are compared and evaluation about at least one selected detailed item is performed and stored(S20). An arithmetic mean value is obtained and stored from a value stored in a stored detailed item evaluation field(S30). A user terminal receives a filtering criteria from a user and transmits the criteria to a management server. The management server filters an analyst database by an analyst unit. Filtering result data is transmitted to the user terminal(S50). The user terminal displays the transmitted filtering result data to the user(S60).
Patent KR-20090039956-A (KR)
Title: Method for producing probe card
Inventor: KIM YOUNG JIN
IPC: H01L21/66
Filed: 2007-10-19
Abstract: A method for manufacturing probe card can form the bump of the probe of enough height without the photoresist layer formation process, and the repetition of polishing and etching removal process. The substrate(100) is prepared. The substrate comprises a plurality of wire portions and a plurality of upper surface terminals. A plurality of upper surface terminals is electrically connected to one end of a plurality of wire portions. The sacrificial substrate(300) is prepared. A plurality of concave grooves is formed on the sacrificial substrate. At this time, a plurality of recesses is formed in the location corresponding to a plurality of upper surface terminals. The conductive metal is filled with a plurality of concave grooves. Therefore, a plurality of bump(340) is formed The sacrificial substrate is adhered on the top of substrate. At this time, a plurality of bump corresponds to a plurality of upper surface terminals.
Patent KR-20090041847-A (KR)
Title: The method of detecting laser pattern in laser vision system
Inventor: HONG JIN IL
IPC: B23K26/346
Filed: 2007-10-25
Abstract: A laser pattern extraction method of a laser vision is provided to contribute to industrial automation by extracting stably the laser pattern and processing good image in the difficult working condition. A laser pattern extraction method of a laser vision comprises steps of: selecting an arbitrary pixel to the first pixel in an input image of a camera part(S200); measuring the first pixel brightness of the first pixel, the second pixel brightness of the second pixel and the third pixel brightness of the third pixel(S210); determining that the first pixel brightness is bigger than the second brightness and the third pixel brightness(S220); calculating difference between the first pixel and the second pixel and difference between the first pixel and the third pixel in case that the first pixel brightness is bigger than the second brightness and the third pixel brightness(S230); determining that the difference between the first pixel and the second pixel and the difference between the first pixel and the third pixel are bigger than brightness difference of standard pixel between pixels(S240); and determining that a laser pattern exists in the first pixel in case that the difference between the first pixel and the third pixel are bigger than the brightness difference of standard pixel between pixels and extracting it(S250).
Patent KR-20090046051-A (KR)
Inventor: LEE SE HEE
IPC: H05B33/14
Filed: 2007-11-05
Abstract: 본 발명은 기판, 상기 기판 상에 위치하는 제 1 전극, 상기 제 1 전극 상에 위치하며, 인광 물질을 포함하는 발광층, 상기 발광층 상에 위치하는 제 2 전극 및 상기 제 1 전극 하부 또는 상기 제 2 전극 상부에 위치하는 컬러필터층을 포함하는 유기전계발광소자를 제공한다. 
       
       
     컬러필터, 인광
Patent KR-20090046053-A (KR)
Inventor: SHIN HONG JAE
IPC: H05B33/12
Filed: 2007-11-05
Abstract: 본 발명은, 제1신호에 응답하여 구동하는 스위칭 트랜지스터와, 스위칭 트랜지스터가 구동함에 따라 데이터 신호를 공급받아 데이터 신호를 데이터 전압으로 저장하는 제1커패시터와, 제1커패시터에 저장된 데이터 전압에 대응하여 구동하는 구동 트랜지스터와, 구동 트랜지스터가 구동함에 따라 전원을 공급받아 발광하는 유기 발광다이오드와, 제2신호에 응답하여 유기 발광다이오드에 전원을 공급하도록 구동하는 제1서브 트랜지스터와, 제3신호에 응답하여 구동 트랜지스터의 게이트와 일단을 단락하도록 구동하는 제2서브 트랜지스터와, 유기 발광다이오드의 제1전극의 전압을 구동 트랜지스터의 게이트로 피드백하는 제2커패시터를 포함하는 서브 픽셀이 다수 배치된 표시부; 제1신호, 제2신호, 제3신호를 공급하는 스캔 구동부; 및 데이터 신호를 공급하는 데이터 구동부를 포함하는 유기전계발광표시장치를 제공한다. 
       
     유기전계발광표시장치, 문턱전압, 보상
Patent KR-20090047101-A (KR)
Inventor: LEE CHEON KOO
IPC: B23K11/11
Filed: 2007-11-07
Abstract: 본 발명은 전기점용접 장치에 관한 것으로서, 더욱 상세하게는 자동차용 냉각팬 콘트롤러의 구성부품인 바디에 형성된 터미널에 리드타입(lead type)부품소자를 전기점용접하여 접합하는 데에 있어, 그 웰딩 폭의 변화를 자동으로 감지하여 전기점용접 상태의 양호 및 불량을 곧바로 확인할 수 있도록 한 웰딩 폭 자동감지가 가능한 전기점용접 장치에 관한 것이다.  
     본 발명의 특징적인 구성은 리드타입 부품소자의 리드선단이 안착되는 터미널을 내부에 형성한 바디를 이송하는 이송컨베이어의 일측에 구비된 지지프레임과 상기 지지프레임의 상면에 안착되는 Y축바와, 상기 Y축바상에 T자형으로 안착되어 직선유동하는 X축바로 이루어진 로봇부(R)와 상기 X축바상에 안착되어 직선유동하는 이송베이스판과, 상기 이송베이스판상에 구비되어 제1피스톤이 상/하방향으로 유동되도록 구비한 제1유압실린더와, 상기 제1피스톤에 고정되어 동유동하는 용접베이스판과, 상기 용접베이스판상에 구비되어 좌/우 유동하여 접하고 그 상단에는 센서단자가 돌출되어 구비된 좌/우 유동판과, 상기 좌/우 유동판을 좌/우 유동시키기 위해 상기 좌/우 유동판상에 구비된 제2피스톤을 구비한 제2유압실린더와, 상기 좌/우 유동판의 하단에 구비되어 동유동하며 외부로부터 전류를 인가받아 상기 바디의 터미널을 상기 리드타입 부품소자의 리드선단과 함께 전기점용접하는 좌/우 용접팁으로 이루어진 용접부(W)부와 상기 용접베이스판의 상단에 구비되어 상기 좌/우 유동판의 좌/우 유동시 접촉된 상기 센서단자의 유동 변위량을감지하는 변위량  감지센서와 상기 변위량 감지센서에 의해 감지되는 좌/우 유동판의 변위량을 수신받아 상기 좌/우 용접팁에 인가되는 전류가 온/오프되도록 제어신호를 발생하고, 이를 미리 입력된 기준 변위폭의 공차내에 있는지 판별하는 제어부를 포함하여 이루어지는 것을 특징으로 한다. 
       
     냉각팬, 콘트롤러, 터미널, 리드타입 부품소자, 전기점용접
Patent KR-20090047929-A (KR)
Inventor: KIM HAK JUN
IPC: G11B7/08
Filed: 2007-11-09
Abstract: 본 발명은 차량용 디브이디 체인저(DVD CHANGER)에 구비되는 디스크 데이터 픽업장치에 관한 것으로서, 디스크에 기록된 데이터를 감지하는 렌즈가 구비된 데이터감지부와 상기 데이터감지부를 상기 디스크의 반경 방향으로 이송시키는 이송수단 및 상기 이송수단에 결합되는 구동부로 구성하되, 상기 이송수단에는 데이터감지부를 슬라이딩시킬 수 있게 설치된 가이드바의 위치를 상,하로 조정하는 조정부를 구비함으로써, 상기 데이터감지부의 렌즈가 디스크의 데이터기록면과 최적의 이격 거리를 유지하며 반경 방향으로 이동될 수 있게 하여 디스크가 수평상태로 세팅되지 않거나 또는 디스크가 변형된 경우에도 데이터감지부가 데이터기록면 전체 영역에서 데이터를 정확하게 감지할 수 있게 한 디스크 데이터 픽업장치에 관한 것이다. 
       
     DVD CHANGER, 디스크, 픽업, 렌즈, 이송수단
Patent KR-20090048932-A (KR)
Title: 음성자동응답을 이용한 의료광고 시스템 및 그 방법
Inventor: PARK YU GEUN
IPC: G06Q30/02
Filed: 2007-11-12
Abstract: 음성자동응답(IVR)을 통해 보다 구체적으로 의료광고를 전달할 수 있고, 음성자동응답을 이용하는 고객 착신전화 데이터베이스를 제공함으로써 고객 마케팅을 향상시킬 수 있는 음성자동응답을 이용한 의료광고 시스템 및 그 방법이 제공된다.  음성자동응답을 이용한 의료광고 시스템은, 공중 전화망 또는 이동통신망을 통해 의료광고 상에 함께 기재된 광고주 고유 전화번호로 전화를 걸어 음성자동응답(IVR) 안내에 대응하는 항목을 선택하거나 광고주 전화단말과 전화 연결을 요청하는 고객 전화단말; 의료광고에 대해 개별적인 광고주 고유 전화번호를 배정하고, 고객 전화단말로부터 광고주 고유 전화번호로 걸려온 전화를 수신하여 음성자동응답 절차를 수행하거나 광고주 전화단말과 전화를 연결해주며, 광고주가 설정한 음성자동응답을 관리하고, 음성자동응답의 청취 횟수와 전화 연결 횟수의 통계를 생성하여 제공하는 의료광고 관리자; 및 고객 전화단말의 전화 연결 요청에 대응하여 전화를 연결하는 광고주 전화단말을 포함한다. 
       
     의료광고, 음성자동응답(IVR), ARS, PBX, 직접 내선 호출(DID)
Patent KR-20090049669-A (KR)
Inventor: CHOI SUNG UK
IPC: B60Q1/04
Filed: 2007-11-14
Abstract: 본 발명은 차량용 엘이디(LED) 헤드램프 드라이버의 온도보상 회로에 관한 것으로서, 더욱 상세하게는 간단한 회로 구성에 의해 LED 헤드램프의 자체 발열에 의한 온도 상승을 보상하여 온도 상승에 따른 광도의 급격한 감소를 방지하며 LED 헤드램프의 성능 저하를 방지할 수 있는 온도보상 회로에 관한 것이다. 
     본 발명에 따른 차량용 LED 헤드램프 드라이버의 온도보상 회로는, 배터리 전원을 DC-DC 컨버터를 포함하는 제어부를 이용해 승압하여 다수의 LED가 직렬연결되어 구성된 LED 헤드램프에 공급하여 LED 헤드램프를 구동하는 회로에 있어서, 
     상기 LED 헤드램프와 연결되는 DC-DC 컨버터의 피드백핀에 제1저항이 연결되되, 상기 제1저항에 서미스터 또는 열센서가 병렬연결되어 LED 헤드램프의 온도 승강에 따른 제1저항의 전압을 감지하고 상기 제어부에서 그 감지전압을 피드백핀의 기준전압과 비교하여 출력전압 또는 전류를 상승 또는 하강하는 것을 특징으로 한다. 
     
     LED 헤드램프, 서미스터, LED 페일 감지
Patent KR-20090060007-A (KR)
Title: System and method for conrtolling of intelligent queuing apparatus
Inventor: KIM WON YOUNG
IPC: H04L12/26
Filed: 2007-12-07
Abstract: An intelligent waiting order issuer management system and a method thereof for managing intelligent sequence number issuing machines are provided to manage the intelligent sequence number issuing machines and supply an optimized session management and transmission mode. A control system(100) receives present condition of business information and manages intelligent sequence number issuing machines. The control system transmits the control system from the intelligent sequence number and monitors the error. A monitoring terminal(150) is connected to the control system. The device condition of the intelligent sequence number issuing machine is monitored in on a real time basis by the monitoring terminal, or the various information stored in a database server(120) is inquired.
Patent KR-20090060030-A (KR)
Title: Apparatus and method for multicasting control signal of a mible telecommunication system
Inventor: DO MI SUN
IPC: H04B7/26
Filed: 2007-12-07
Abstract: A multicasting device and a method thereof which a control of a mobile communication system is as a multicast control group are provided to use wireless resource between a base station and a mobile terminal efficiently by transmitting control signal to the terminal performing control operation. A controller(610) comprises user terminals performing the same control operation with a multicast control group among user terminals connected to the base station device. An allocation unit(620) assigns the multicast control channel to the group. A transmit unit(630) transmits the same control signal related to the control operation with user terminals belonging to the multicast control group by using the multicast control channel.
Patent KR-20090063890-A (KR)
Title: Solenoid for preventing frost
Inventor: LEE HYUN CHAE
IPC: F02D41/20
Filed: 2007-12-14
Abstract: A freeze preventive solenoid is provided to prevent moisture from being condensed in the battery terminal head and starter terminal head. A freeze preventive solenoid comprises a terminal housing(100) in which one side is opened, and a plunger housing(200) in which one side is opened. In the terminal housing, a part of a starter terminal(120) and a battery terminal(110) is inserted. A plunger(210) is inserted inside the plunger housing. The opened site of the plunger housing and terminal housing touches. The internal space in which the terminal housing and plunger housing are comprised is the vacuum condition.
Patent KR-20090065302-A (KR)
Title: Thermostat for engine of vehicle
Inventor: BYUN JIN SAM
IPC: F01P11/00
Filed: 2007-12-17
Abstract: A thermostat for a vehicular engine is provided to improve an engine output because in the engine, the flow rate of the cooling water supplied to radiator increases. A thermostat(201) for a vehicular engine comprises a thermostat main body, a cylinder(20), and a spring(40). The thermostat main body comprises the circular supporter(11), the fixture(15), and the down support stand. The circular supporter is fixed on the coolant flow way between radiator and the engine. As to the circular supporter, a plurality of cooling water supplemental holes(12) is formed in the plate side into the constant interval. The down support stand is connected to the bottom side of the circular supporter. In the cylinder, the contraction or the expanded wax is stored in inside according to the coolant temperature. The spring is installed between the down support stand and fixture. In the spring, cylinder pressurizes upward the cooling water through-hole to the closed direction.
Patent KR-20080061291-A (KR)
Title: Semiconductor device and electronic device
Inventor: HIROSE ATSUSHI
IPC: H01L31/04
Filed: 2007-12-24
Abstract: A semiconductor device is provided to avoid electrostatic breakdown of a semiconductor device with a photoelectric conversion device by using a simple structure of a conductive layer. A circuit is electrically connected to a photoelectric conversion device. A first terminal(111) is electrically connected to the photoelectric conversion device. A second terminal(112) is electrically connected to the circuit. A conductive layer adjoins the first and second terminals. The conductive layer is not electrically connected to the photoelectric conversion device and the circuit. The area of the upper surface of the conductive layer is greater than those of the upper surfaces of the first and second terminals. The photoelectric conversion device can include a photoelectric conversion layer. The conductive layer can be a layer for reflecting light, overlapping the photoelectric conversion layer.
Patent KR-20090070773-A (KR)
Title: Semiconductor chip test apparatus
Inventor: YIM SANG YOON
IPC: G01R31/28
Filed: 2007-12-27
Abstract: An apparatus for testing a semiconductor chip is provided to recognize an electric current easily by separating ground connection of each power supply terminal to prepare overplus electric current. A plurality of power supply stages(102/1,102/2) supplies power to a semiconductor chip including an electric source input. A tester(104) measures an output current of the power supply stages. The tester generates a switching control signal from the tester. A plurality of relaie(108/a,108/b,108/c) are formed is formed between a common ground of the tester and a plurality of power supply stages, and performs close or open operation. A tester bit setting part sets up a data bit to perform close operation according to switching control signals.
Patent KR-20090072045-A (KR)
Title: Method for fabricating semiconductor device
Inventor: KIM SANG CHUL
IPC: H01L21/28
Filed: 2007-12-28
Abstract: A manufacturing method of a semiconductor device is provided to effectively form a metal line by plating copper after removing a copper oxide film. A copper(20) is plated on a wafer by an electro chemical plating method. A copper oxide film is removed in case the copper oxide film is formed on the copper. A copper is again plated on the copper in which the copper oxide film is removed. In a process for removing the copper oxide film, the wafer is prepared inside a bath in which a sulfuric acid solution of 5~30% concentration is stored for 1~15 second. In a process for removing the copper oxide film, a current is applied into an opposite direction of a current direction applied in a step for plating the copper. In the copper plating, a current of 0.5~22A is applied from a copper electrode inside the bath to the wafer.