baber/WOPTO huggingface dataset:
Patent JP-2021512992-A (JP)
Title: 低融点樹脂を含む発泡体およびこれを含む成形体
IPC: C08J9/16
Filed: 2019-12-12
Abstract: 本発明は、低融点樹脂を含む発泡体に関し、本発明による発泡体は、コア部および前記コア部を取り囲むシース部を含み、特に、前記シース部は、低融点ポリエステル樹脂から形成されているので、強度および耐久性などの物性が低下することなく、優れた加工性を具現することができるという利点がある。
Patent JP-2021515985-A (JP)
Title: 半導電性単層カーボンナノチューブ及び有機半導電性材料を含む有機電界効果トランジスタ
IPC: H01L51/05
Filed: 2019-03-06
Abstract: 本発明は、ｉ）半導電性単層カーボンナノチューブの含量が９５重量％以上である単層カーボンナノチューブの浸透ネットワークからなる第１層と、ii）有機半導電性材料からなる第２層とで構成された二重層を含む有機電界効果トランジスタ、及び該有機電界効果トランジスタの製造方法を提供する。【選択図】図１
Patent JP-2021516369-A (JP)
Title: 混合音声の認識方法、装置及びコンピュータ可読記憶媒体
IPC: G10L25/30
Filed: 2019-04-17
Abstract: 本願の実施例は、混合音声の認識方法、混合音声の認識装置及びコンピュータ可読記憶媒体を提供する。該混合音声の認識方法は、適応音声と混合音声の入力をモニタリングしたとき、前記適応音声に基づいてターゲットオブジェクトの音声特徴を取得するステップと、前記ターゲットオブジェクトの音声特徴に基づいて、前記混合音声のうち前記ターゲットオブジェクトに属する音声を特定するステップとを含み、ここで、前記適応音声は、予め設定された音声情報を含む音声であり、前記混合音声は、前記適応音声の後に入力された非適応音声である。【選択図】図２
Patent JP-2021518816-A (JP)
Title: フレーミング用釘打機のための改善されたリフト機構
IPC: B25C1/06
Filed: 2019-04-10
Abstract: ドライバを駆動位置から準備位置に移動させるためのリフタサブアセンブリを含む締結具駆動ツール。一実施形態では、リフタは、移動可能な回動アームに取り付けられ、ドライバが持ち上げ段階の開始時に誤って位置付けられている場合、リフタは、リフタがドライバの突出部にわたって移動することを可能にするために短距離だけ変位することができ、それによって持ち上げ段階がジャムを引き起こすことなく継続することを可能にする。保持具（又は「カム従動子」）は、持ち上げ段階の後の部分の間、又は移行段階の間にリフタが変位するのを防ぐために、少なくとも１つのリフタディスクの丸みを帯びたカム外形表面に沿って位置付けられる。リフタは、ドライバ突出部に係合するために、延在するピンを有する少なくとも２つの回転ディスクを含む。リフタディスクのうちの１つは、カム外形表面の代わりに、その外周上にギア歯を有することができる。
Patent JP-2021522768-A (JP)
Title: ステータ
IPC: H02K1/18
Filed: 2019-04-25
Abstract: ステータ（１）は複数のセグメント（２０）がそれぞれの折り畳みジョイント（３０）の手段によって互いに連結される積層スタック（１０）を備え、少なくとも１つの折り畳みジョイント（３０）は積層スタック（１０）の最大半径（Ｒ２）に対応する仮想円周（２７）の半径方向内側に配置される。ステータ（１）は複数の絶縁体（４０）をさらに備え、少なくとも１つの絶縁体（４０）は積層スタック（１０）から軸方向に外側に延びる端部（４８、４９）を備え、端部（４８、４９）の外周と積層スタック（１０）の外周との間に半径方向の空間が設けられる。 【選択図】図１
Patent JP-2021523569-A (JP)
Title: 磁気トンネル接合構造及びその製造方法
IPC: H01L27/105
Filed: 2019-04-05
Abstract: 本明細書で説明される磁気トンネル接合（MTJ）構造の実施形態が、クロム（Cr）、NiCr、NiFeCr、RuCr、IrCr、若しくはCoCr、又はそれらの組み合わせのうちの１以上の層であるシード層を採用する。これらのシード層は、１以上のピンニング層と組み合わせて使用され、シード層と接触している第１のピンニング層は、コバルトの単一層を含んでよく、又はコバルトとプラチナ（Pt）、イリジウム（Ir）、ニッケル（Ni）、又はパラジウム（Pd）との二重層に組み合わされたコバルトを含んでよい。第２のピンニング層は、第１のピンニング層と同じ組成及び構成であってよく、又は異なる組成若しくは構成であってよい。本明細書で説明されるMTJ積層体は、高温アニーリングの後で所望の磁気的特性を維持する。 【選択図】図２Ａ
Patent JP-2021531417-A (JP)
Title: 植物材料の有機酸前処理から生成物を回収するための効率的な方法および組成物
IPC: D21C3/04
Filed: 2018-05-28
Abstract: 植物材料の有機酸前処理に由来する生成物の効率的な下流処理に関する、組成物およびプロセスが提供される。本発明は、（ｉ）植物材料の有機酸前処理に由来するセルロースパルプからの有機酸の回収、（ｉｉ）グルコースへの変換前の、植物材料の有機酸前処理に由来するセルロースパルプから回収されたセルロースの処理、（ｉｉｉ）植物材料の有機酸前処理に由来するリグニン懸濁液からのリグニンの分離および清浄、（ｉｖ）植物材料の有機酸前処理の水相からの有機酸の回収、（ｖ）植物材料の有機酸前処理に由来するヘミセルロース含有画分からの残留有機酸の回収、ならびに（ｖｉ）植物材料の有機酸前処理に由来するセルロースおよびヘミセルロースジュースから生成された有機肥料、に関する組成物およびプロセスに関する。【選択図】なし
Patent JP-2021519408-A (JP)
Title: 相変化を用いた機械的変形冷却装置
IPC: F28D20/02
Filed: 2019-03-15
Abstract: 熱源から熱が伝達されるように設置されるベースと、前記ベースから熱が伝達されるように固定設置され、前記ベースによって開口が閉鎖されるように設置される中空筒形状の固定シリンダーと、前記固定シリンダーから熱が伝達されるように前記固定シリンダーに固定設置される固定フィン（ｆｉｎ）と、前記固定シリンダーの内部を軸方向に垂直な方向に水密または気密に塞いで軸方向にスライディングできるように挟まれて相変化物質を収容する収容室を形成するピストンと、前記ピストンに対して前記ベース方向に弾性復元力を加える弾性部材と、を含み、熱源からの熱が低温の時は、相変化物質が体積減少方向に相変化し、前記弾性部材の弾性復元力によって前記ピストンが前記ベース側の後退位置に復帰され、熱源からの熱が高温の時は、相変化物質が体積増加方向に相変化し、前記ピストンが前記後退位置から前記弾性部材の弾性復元力に抗して前記ベースの反対方向の前進位置に移動されるように作動すること、を特徴とする。
Patent JP-2021526532-A (JP)
Title: 炭入り二重カプセルおよびその製造方法
IPC: A61K8/37
Filed: 2018-08-31
Abstract: 本発明は、第１溶媒で第１バインダーを溶解させるステップと、第１バインダーが溶解された溶液に分散剤を溶解させるステップと、炭粉末を添加し、均質に混合して第１バインダーに炭粉末が結合した１次カプセル分散液を生成するステップと、１次カプセル分散液を噴霧乾燥して第１溶媒が除去された１次カプセル粉末を生成するステップと、１次カプセル分散液を噴霧乾燥して第１溶媒が除去された１次カプセル粉末を生成するステップと、第２溶媒で第２バインダーと柔軟剤を溶解させるステップと、第２バインダーと柔軟剤が溶解された溶液に着色剤、分散剤を均質に混合するステップと、１次カプセルを混合して第２バインダーに１次カプセルが結合した二重カプセル分散液を生成するステップと、二重カプセル分散液を噴霧乾燥して第２溶媒が除去された二重カプセルを生成するステップとを含む。【選択図】図３
Patent JP-2021063999-A (JP)
Title: Colored photosensitive resin composition
Inventor: MATSUURA RYUICHI
IPC: G03F7/032
Filed: 2021-01-04
Abstract: To provide a colored photosensitive resin composition capable of providing a high-definition color filter having good brightness while maintaining a high yield.SOLUTION: The colored photosensitive resin composition contains colorants (A), a resin (B), a polymerizable compound (C), and a polymerization initiator (D). The colored photosensitive resin composition contains, as the colorants (A), a polyhalogenated zinc phthalocyanine (a1) having less than 13 bromine atoms on average in one molecule and exhibiting a wavelength of 500-520 nm at which transmittance of a spectral transmittance spectrum in 380-780 nm is maximum, and C.I. Pigment Yellow 138 and/or C.I. Pigment Yellow 185.SELECTED DRAWING: None
Patent JP-2021073330-A (JP)
Title: Composition comprising polymer and switch initiator
Inventor: PETER KWOK HING LAM
IPC: C09J133/00
Filed: 2021-01-06
Abstract: To disclose a composition including a polymer and a switch initiator.SOLUTION: The composition can be switched from a first liquid state to a second adhesive state by activation of the switch initiator. The composition has in the first liquid state a complex viscosity |η*| below 0.4 MPa s; and the composition has in the second adhesive state a second repeated peel force above 1 N/25 mm.SELECTED DRAWING: None
Patent JP-2021080566-A (JP)
Title: Method for manufacturing plated component
Inventor: USUKI NAOKI
IPC: C23C18/30
Filed: 2021-01-20
Abstract: To provide a method for manufacturing a plated component, capable of suppressing the formation of a plating film in patterns except a predetermined pattern by a simple manufacturing process to form the plating film only in the predetermined pattern.SOLUTION: The method for manufacturing a plated component comprises: forming a catalytic activity interference layer including a polymer having at least one of an amide group and an amino group on the surface of a base material; forming an interference layer removal portion formed by removing the catalytic activity interference layer and an interference layer residual portion formed by leaving the catalytic activity interference layer on the surface of the base material having the catalytic activity interference layer; applying an electroless plating catalyst to the surface of the base material having the interference layer removal portion and the interference layer residual portion; and contacting an electroless plating liquid to the surface of the base material having the applied electroless plating catalyst to form an electroless plating film in the interference layer removal portion. The polymer is a branch polymer having a side chain.SELECTED DRAWING: Figure 1
Patent JP-2022112132-A (JP)
Title: Hygienic mask and hygienic mask package body
Inventor: SATO TADAYASU
IPC: B65D85/07
Filed: 2021-01-21
Abstract: To provide a hygienic mask and a hygienic mask package body, which can prevent damage or deformation of a fabric or ear hook strings even if the hygienic masks are stacked.SOLUTION: In a hygienic mask 100, ear hook adjusters 104 are provided in ear hook strings 102 extending from right and left sides of a mask body part 101. The ear hook adjusters 104 are formed in cylindrical shapes through which the two ear hook strings 102 pass. The ear hook adjusters 104 are formed in cylindrical shapes with inner diameters smaller than the total value of thicknesses (outer diameter) of the two ear hook strings 102 extending from an upper side and a lower side of sides of the mask body part 101. The ear hook adjusters 104 are formed in tube shapes which are elastically deformable in a radial direction and bendable in a direction orthogonal to an axial direction. In the ear hook adjusters 104, an inner peripheral face and both end faces are constituted of smooth faces.SELECTED DRAWING: Figure 1
Patent JP-2022113045-A (JP)
Title: spinach plant
Inventor: KANDA TAKUYA
IPC: A01C1/00
Filed: 2021-01-22
Abstract: To provide a spinach variety that shows resistance to downy mildew.SOLUTION: The inventive spinach plants include a spinach plant identified with accession number FERM ABP-22406, accession number FERM ABP-22407, accession number FERM ABP-22408, accession number FERM ABP-22409, accession number FERM ABP-22410, accession number FERM ABP-22411, or accession number FERM ABP-22412 or a progeny line thereof.SELECTED DRAWING: None
Patent JP-2022114162-A (JP)
Title: Device for vehicle
Inventor: INOUE YOSHIAKI
IPC: B60R16/02
Filed: 2021-01-26
Abstract: To provide a device for a vehicle whose performance can be improved even after shipping.SOLUTION: A device for a vehicle 1 comprises: a control unit 101 that can access a peripheral device 3 and execute functions provided in using a vehicle; a connection unit 5 that can communicate with the control unit 101 and is connected with an external device 2 that can execute the functions provided in using the vehicle; and a determination unit 12 that determines whether the external device 2 is connected with the connection unit 5 so that it can execute the functions. When it is determined that the external device 2 is connected so that it can execute the functions, the control unit 101 enables the external device 2 to allow execution of the functions, and stops at least one function of functions that can be executed by the control unit.SELECTED DRAWING: Figure 6
Patent JP-2021137557-A (JP)
Title: Information processing apparatus, information processing method and program
Inventor: AOYAMA SATOSHI
IPC: A63F13/79
Filed: 2021-01-26
Abstract: To provide a technique capable enhancing a player's motivation relating to browsing of a content.SOLUTION: An information processing apparatus includes a reception unit of receiving a selection of a quest from a player, an execution unit of executing the quest received from the player, a display control unit of, during an interval from when receiving the selection of the quest from the player to termination of the quest and when a player permits a display of a prescribed content, causing a terminal used by the player to display the prescribed content, and assignment unit of, after the prescribed content is displayed until a prescribed condition is satisfied, assigning a reward relating to the quest to the player.SELECTED DRAWING: Figure 5
Patent JP-2022117019-A (JP)
Title: Information analysis program, information analysis method, and information analysis device
Inventor: ISO TOMOHIRO
IPC: G06F40/216
Filed: 2021-01-29
Abstract: To analyze the correspondence of keywords corresponding to technical words or the like by analyzing a causal relation of sentences after extracting unique expressions.SOLUTION: An information analysis program is a program that causes a processor to execute: a text information acquisition step of acquiring text information; a unique expression extraction step of extracting unique expressions from the text information and giving tags; a dependency extracting step of analyzing dependencies from the text information and extracting dependencies in which one or both of a dependency source or a dependency destination are unique expressions; a co-occurrence degree calculation step of calculating degree of co-occurrence for combinations of dependencies in the dependencies extracted from the text information in the dependency extraction step; and a co-occurrence extraction step of extracting a combination of dependencies based on the degree of co-occurrence.SELECTED DRAWING: Figure 2
Patent JP-2022119334-A (JP)
Title: Aluminum alloy material
Inventor: TAKAYA MAI
IPC: C22C21/10
Filed: 2021-02-04
Abstract: To provide an aluminum alloy material enabling increase of strength of any of Al-Zn-Mg-Cu based alloy and Al-Zn-Mg based alloy.SOLUTION: An aluminum alloy material 1 is composed of a 7000 based aluminum alloy having a chemical component including 0.05 mass% or more and 0.20 mass% or less of Sc and 0.05 mass% or more and 0.20 mass% or less of Zr. The aluminum alloy material has metallographic structure in which an Al-Sc-Zr based deposit 3 including Sc and Zr exists in an Al parent l phase 2 and the number of Al-Sc-Zr based deposit 3 having a major axis of 2 nm or more and 20 nm or less, out of the Al-Sc-Zr based deposit, per unit volume 3 is 3.0×1021 pieces/m3 or more.SELECTED DRAWING: Figure 1
Patent JP-2022119421-A (JP)
Title: Reading device
Inventor: MIKAMI AKIRA
IPC: H04N1/401
Filed: 2021-02-04
Abstract: To solve the problem in which: it is not possible to read pattern images formed on a recording material together with a user image and acquire highly accurate read data of the pattern images.SOLUTION: A reading device has: a line sensor 301a (or 301c) that is provided on a conveyance path 313 on which a recording material is conveyed, and reads a user image and density patches formed on the recording material; and a CPU 114 that corrects read data of the density patches. The CPU 114 corrects the read data of the density patches based on a coefficient Kj corresponding to the distance from the density patches and read data of the user image read by the line sensor 301a (or 301c).SELECTED DRAWING: Figure 18
Patent JP-2022119553-A (JP)
Title: Method of producing aromatic amide compounds
Inventor: ISHIDA TSUTOMU
IPC: C12P13/02
Filed: 2021-02-04
Abstract: To provide a method of producing aromatic amide compounds that enables efficient obtaining of aromatic amide compounds from aromatic nitrile compounds.SOLUTION: Provided is a method of producing aromatic amide compounds that comprises applying, in a Pseudonocardia thermophila-derived nitrile hydratase having an α subunit having 90% or more sequence identity with the amino acid sequence represented by SEQ ID NO: 1 and a β subunit having 90% or more sequence identity with the amino acid sequence represented by SEQ ID NO: 2, a bacterial cell containing mutant nitrile hydratase substituted with another amino acid residue at at least one position selected from the group consisting of amino acid substitution positions (1L) to (37L) and/or processed products thereof to an aromatic nitrile compound in an aqueous medium. Details of the amino acid substitution positions (1L) to (37L) are given in the specification.SELECTED DRAWING: None
Patent JP-2022119666-A (JP)
Title: School refusal support program, school refusal support method and school refusal support system
Inventor: YAMADA TATSUTO
IPC: G06Q50/20
Filed: 2021-02-04
Abstract: To provide a school refusal support program, a school refusal support method and a school refusal support system capable of providing support considering mental health care of those who surround students with school refusal.SOLUTION: A school refusal support system comprises: content display means 152 for displaying teaching material content related to school refusal on display means; state information receiving means 153 for receiving input of state information representing the state of a student with school refusal and state information representing the state of a consulter; state information recording means 154 for accumulating and storing each state information received by the state information receiving means 153 in storage means 11; state information transmission means 154 capable of transmitting accumulated data D2 of each state information stored in the storage means 11 to a computer 2 of a consultation respondent; and consultation information transmission means 156 for receiving input of consultation information representing contents of consultation for the consultation respondent and capable of transmitting the consultation information to the computer 2 of the consultation respondent.SELECTED DRAWING: Figure 2
Patent JP-2022122372-A (JP)
Title: Resin composition and biaxial oriented film based on the same
Inventor: SUZUKI KEN
IPC: C08L25/18
Filed: 2021-02-10
Abstract: To provide a polyester resin with low birefringence and good transparency, and a resin composition comprising the polystyrene resin.SOLUTION: A resin composition comprises a resin A whose basic skeleton is polystyrene, and a resin B being polyester. In the resin composition, the resin A has an average degree of sulfonate group substitution in the range of 1 mol% to 80 mol% based on the number of moles of styrene repeating units.SELECTED DRAWING: None
Patent JP-2022122483-A (JP)
Title: Hot rolled steel sheet and method for producing the same
Inventor: MIYAMOTO YUKA
IPC: C21D9/46
Filed: 2021-02-10
Abstract: To provide a high-carbon hot rolled steel sheet that is excellent in cold workability and wear resistance after heat treatment such as induction hardening and normal hardening, and a method for producing the same.SOLUTION: A hot rolled steel sheet has a predetermined composition. A microstructure has ferrite and cementite. In the cementite, the ratio of the number of cementite particles with a circle-equivalent diameter of 0.1 μm or less to the total number of cementite particles is 20% or less, the average cementite diameter is 0.15 μm or more, and the proportion of the cementite in the total microstructure is 4.5% or more and less than 20.0% in area ratio. In the range from the steel sheet surface to 100 μm, the mass ratio of X contained in XC (X=Ti, Mo, Nb) of 1 μm or more to the amount of X (X=Ti, Mo, Nb) in the steel is 5% or less, and the total elongation (EI) is 20% or more.SELECTED DRAWING: None
Patent JP-2021140768-A (JP)
Title: Data processing method, server and program
Inventor: MOTOGAITO Hiroki
IPC: G16Y10/40
Filed: 2021-02-12
Abstract: To execute action according to a situation of a moving body.SOLUTION: A data processing method includes: storing action information at least including trigger information relating to a trigger of action to be executed, execution subject information relating to an execution subject of the action and action content information relating to a content of the action; acquiring moving body information relating to at least one of movement and a state of the moving body; determining whether a trigger corresponding to the trigger information is established on the basis of the moving body information; identifying the execution subject at least on the basis of the execution subject information corresponding to the trigger information of the trigger determined to be established; identifying the action content to be executed on the basis of the action content information corresponding to the trigger information of the trigger determined to be established; and transmitting an execution instruction of the identified action content to the identified execution subject.SELECTED DRAWING: Figure 3
Patent JP-2022127496-A (JP)
Title: Building member
Inventor: OKAMOTO YOSHITAKA
IPC: E04F13/08
Filed: 2021-02-19
Abstract: To provide a building member capable of suppressing stripe-shaped marks on the surface of a protruding portion.SOLUTION: A building member 1 has a protruding portion 2 formed on the surface of the building member 1. The protruding portion 2 has a plurality of minute projections 20 formed on the surface of the protruding portion 2 and irregularly arranged vertically and horizontally.SELECTED DRAWING: Figure 1
Patent JP-2022131635-A (JP)
Title: vehicle air conditioning system
Inventor: YANAKA KATSUTOSHI
IPC: F25B27/02
Filed: 2021-02-26
Abstract: To provide a vehicle air conditioning system which enables a condenser to realize high heat exchange efficiency in a heat pipe system while improving heating capacity using the heat pipe system mounted on the vehicle air conditioning system.SOLUTION: A vehicle air conditioning system comprises a heat pipe system 100. Gas piping 20 of the heat pipe system 100 is a passage to send a work medium gasified with an evaporator 16 to a condenser 174. Liquid piping 21 is a passage to return the liquefied work medium with the condenser 174 to the evaporator 16. The gas piping 20 is connected to an upper section of the condenser 174 and the liquid piping 21 is connected to a lower section of the condenser 174. Bypass piping 35 bypasses the condenser 174 in a manner that connects a close section 20a close to a connection section between the gas piping 20 and the condenser 174 and a close section 21a close to a connection section between the liquid piping 21 and the condenser 174.SELECTED DRAWING: Figure 5
Patent JP-2021178312-A (JP)
Title: Fluid discharge system
Inventor: UEDA TAKANORI
IPC: F04B23/02
Filed: 2021-02-26
Abstract: To provide a fluid discharge system which can supply a fluid to a discharge device stably while inhibiting increase of an installation space and costs.SOLUTION: A fluid discharge system 10 includes: a discharge device 30 which discharges a fluid; a pump 20 which may supply the fluid stored in a storage part 22 to the discharge device 30; a supply passage 40 which connects the discharge device 30 with the pump 20 so that the fluid can pass therebetween; and a buffer tank 50 which is disposed in the middle of the supply passage 40 and may suction and discharge the fluid. The fluid discharge system 10 can continue supply of the fluid to the discharge device 30 by discharging the fluid from the buffer tank 50 to the supply passage 40 when the supply of the fluid from the pump 20 to the discharge device 30 is limited. Further, the fluid discharge system 10 can achieve a pressure acting state in which the buffer tank 50 exerts pressure on the fluid, and a holding state in which the buffer tank 50 does not exert pressure on the fluid.SELECTED DRAWING: Figure 1
Patent JP-2022132719-A (JP)
Title: Sold machine component
Inventor: MORI MITSUHO
IPC: B21K21/00
Filed: 2021-03-01
Abstract: To improve a situation where quantities of materials forming an outer part and filling amounts of materials in a core cannot be uniformized in a fragmented part, in a solid component, an outer part and an inner part of which are constituted of different materials.SOLUTION: A solid machine component is configured to have a formed product made of metal having an internal shape following a shape of an external part and a core made of materials which are different from materials of the formed product with which the inside of the formed product are filled.EFFECT: This can reduce deviations in thickness in a portion from an outer part to the inner part in the shape of the external part made of metal forming the inside of a hollow, so that the materials filled as the core are internally distributed excellently, which can suppress variation in quality in a fragmented part.SELECTED DRAWING: None
Patent JP-2022134602-A (JP)
Title: Control system, learning system, apparatus control method, and program
Inventor: SEKI KOJI
IPC: G06F3/01
Filed: 2021-03-03
Abstract: To provide a control system, a learning system, an apparatus control method, and a program that can appropriately control an apparatus by a gesture operation.SOLUTION: An NN update unit 216 updates a neural network that is selected by a selection unit 212, on the basis of gesture image information and operation identification information corresponding to a determination value calculated from the gesture image information, every time when an image acquisition unit 211 acquires the gesture image information. Every time when a preset NN update period arrives, the NN update unit 216 specifies a neural network that has a least calculation amount among the neural networks each corresponding to each of air conditioners 1A and 1B which are stored by an NN storage unit 231, and updates all of weight coefficient information on the neural network corresponding to each of the air conditioners 1A and 1B to weight coefficient information on the specified neural network.SELECTED DRAWING: Figure 5
Patent JP-2022136847-A (JP)
Title: Substrate processing apparatus and abnormality detection method
Inventor: CHIHAYA HIROAKI
IPC: H01L21/31
Filed: 2021-03-08
Abstract: To provide a technique for monitoring whether the processed substrate is being adsorbed to the mounting table by means of an electrostatic chuck.SOLUTION: In a semiconductor manufacturing equipment, the substrate processing system 5 comprises a mounting table 60 having an electrostatic chuck 65 that adsorbs substrates, a measurement unit such as a temperature sensor 64 that measures the temperature of the mounting table, and a control unit 4 that is a detection unit that detects abnormalities caused by the adsorption of substrates by the electrostatic chuck based on an integral value that integrates the difference between the variation of the temperature of the mounting table, for example, a reference standard temperature value and a temperature value of the mounting table during a step of processing a substrate.SELECTED DRAWING: Figure 3