baber/WOPTO huggingface dataset:
Patent KR-20020031444-A (KR)
Title: The method of sawing of circuit film and the equipment thereof
Inventor: KIM YEONG UNG
IPC: H01L21/78
Filed: 2000-10-20
Abstract: PURPOSE: A method and an apparatus for sawing a circuit film are provided to saw the circuit film by using a cutter blade instead of a wheel blade. CONSTITUTION: A frame(70) is installed at both sides of a rack(20). A timing belt(12) is connected with a motor(10). The timing belt(12) is connected with a pulley(22). A transfer body(72) is fixed to the timing belt(12). A transfer plate(16) is installed on an upper portion of the frame(70). A bush(24) is inserted into a guide bar(26). The guide bar(26) is formed at one side of the frame(70). A support bar(18) is installed in an inside of the frame(70). A multitude of push bar(28) is inserted by the support bar(18). A cutter blade is installed elastically in a lower portion of the transfer plate(16). A cutter assembly(14) including the cutter blade is combined by a combination portion.
Patent KR-20020032711-A (KR)
Title: Selection method of sensor position in a rotary machine and Diagnosis method of the rotary machine vibration using self-organized map neural network
Inventor: KIM HEUNG MUK
IPC: G01H11/06
Filed: 2000-10-26
Abstract: PURPOSE: A method for determining position of vibration sensor and diagnosing vibration of rotary machine is provided to prevent breakdown of rotary machine and perform an efficient maintenance by improving ability for determination on abnormality of rotary machine. CONSTITUTION: A method for determining position of vibration sensor comprises the steps of extracting time area data and frequency area data of the vibration signal at a normal state, and time area data and frequency area data of the vibration signal at an abnormal state; and obtaining speed data and acceleration data for time area data and frequency area data for the normal state and abnormal state, respectively, and utilizing the obtained data as input data for a self-organized map neural network.
Patent KR-20010007950-A (KR)
Inventor: KIM GANG HYEONG
IPC: A63B37/00
Filed: 2000-10-28
Abstract: PURPOSE: Provided is a golf ball formed metal core, which improves control sense and flying distance at the same time by a few strain, excellent repulsive power and impact adsorbing function . CONSTITUTION: The golf ball comprising center core and outer cover is characterized by forming metal core(3) mixed metal fiber(4) in resin between center core(1) and outer cover(2), wherein, a thickness of metal core(3) mixed metal fiber(4) is 1-5mm, a length of metal fiber(4) is 1-15mm, and a thickness of metal fiber(4) is 0.05-0.15mm.
Patent KR-20010025240-A (KR)
Title: A fuzzy temperature control system and a control method of a return water for cooling and heating operation
Inventor: KWON MOO SOON
IPC: F24F11/02
Filed: 2000-11-14
Abstract: PURPOSE: An artificial intelligent control system for the temperature of circulating water and a control method thereof are provided to regularly keep indoor temperature by an electronic thermistor and a microcomputer, to directly communicate a circulating water adjusting valve to the microcomputer by a remote control and a central control and to automatically control a heating and a cooling state by a human body sensor. CONSTITUTION: A circulating water temperature control system contains a circulating water adjusting valve(100). The circulating water adjusting valve has a water inlet pipe(135) for heating and returning water and a water drain pipe(125) integrally formed with the water inlet pipe and tilted from the water inlet pipe in a specific angle. A circulating water passage(127) is formed in a joint between the water inlet pipe and the water drain pipe with a bending portion(123). The bending portion is tilted in 45 degrees from the vertical shaft direction of the water inlet pipe. An electronic thermistor(320) is inserted into the water inlet pipe with a sensing portion(323) directly contacted with circulating water. A flow rate adjuster(170) is installed oppositely to the water inlet pipe with a motor(110), a round gear(130) and a flow rate adjusting member(160). The motor contains a position control terminal(112) to control the position of the flow rate adjuster and the round gear is rotated when the motor is driven. Thus, the circulating water adjusting valve adjusts the opening degree depending on the temperature of circulating water. When the water temperature increases, the round gear is rotated counterclockwise to close the circulating water passage. When the water temperature decreases, the round gear is rotated clockwise to open the circulating water passage.
Patent KR-20020038067-A (KR)
Title: Integration type internet access device
Inventor: PARK GYEONG YONG
IPC: H04L12/66
Filed: 2000-11-16
Abstract: PURPOSE: A unified type Internet access apparatus is provided to improve efficiency and extensibility when composing a network of an office by providing a unified network solution such as an Internet connection, a multimedia service, a LAN(Local Access Network) composition using one equipment. CONSTITUTION: A phone interface unit(200) interfaces a voice signal and a ring signal with a plurality of telephones. A codec unit(300) receives an analog voice signal from the phone interface unit(200) and converts the received analog signal into IP(Internet Protocol) packet data, and receives IP packet data, converts the received IP packet data into an analog voice signal, and transmits the converted analog voice signal to the phone interface unit(200). A USB(Universal Serial Bus) transformer(400) performs a data communication with a PC, a peripheral devices of the PC, or an IP phone by a USB interface standard. An Ethernet transformer(500) interfaces data with a plurality of PCs for a LAN interface between a plurality of PCs. A PCMCIA(Personal Computer Memory Card International Association) interface unit(600) interfaces data with a notebook PC for a LAN interface of the notebook PC. A wireless interface unit(700) interfaces wireless data with a plurality of PCs and peripheral devices of the PCs. An xDSL transformer(800) interfaces xDSL data with an external xDSL network. An xDSL transmitting unit(900) receives ATM(Asynchronous Transfer Mode) cell data from the xDSL transformer(800) and performs an ATM interface of the received ATM cell data, and receives ATM cell data, converts the received ATM cell data into an xDSL frame, and transmits the converted xDSL frame to the xDSL transformer(800). A main processor(1000) performs a data communication control with various PCs, peripheral devices of the PCs, and IP phones connected to the xDSL transformer(800), the Ethernet transformer(500), the wireless interface unit(700), and the PCMCIA interface unit(600), and provides a LAN service. The main processor(1000) performs an ATM data communication between the xDSL transmitting unit(900) and the PC connected to each port, and performs an IP communication between the codec unit(300) and the xDSL transmitting unit(900).
Patent KR-20020038876-A (KR)
Title: Caliper sensor tester
Inventor: OH JAE UN
IPC: G01B17/02
Filed: 2000-11-18
Abstract: PURPOSE: A device for testing thickness sensor is provided to check the thickness sensor being to replace. CONSTITUTION: A volt meter(22) and a frequency meter(24) indicate condition of power supply and output by indicating power supplied to an oscillator circuit of an upper sensor and frequency output by the oscillator circuit. A frequency distributor(20) and a continuous recorder(23) control barrels, bellows, blocks, regulators, solenoid valves and manometers of the upper sensor and a lower sensor using a fixed circuit comprising timers and relays and automatically records fluctuation of frequency generated. An F/I converter converts frequency generated in the oscillator circuit into real thickness value and numerically displays to check condition of a ferrite core(17) and a ferrite plate(18).
Patent KR-20010085255-A (KR)
Inventor: FUKUNAGA EIJI
IPC: F24C7/02
Filed: 2000-11-22
Abstract: PURPOSE: To improve convenience of a microwave oven. CONSTITUTION: The microwave oven comprises an infrared sensor 7 to detect a temperature of a food in a heating chamber 10. The sensor 7 has a visual field 70 in the chamber 10. The sensor 7 is constituted so as to move in the field 70. The food is normally frequently placed near its central part in the chamber 10. When heating cooking is started corresponding to this, the scan of the chamber is is started from the vicinity of the central part of the chamber 10 by the field 70 of the sensor 7.
Patent KR-20020042911-A (KR)
Title: Wireless communication control method and system for communicating between a computer system and an external machines using an internal speaker mounted or connected into the computer system
Inventor: KIM SEUNG HYUK
IPC: G06F19/00
Filed: 2000-12-01
Abstract: PURPOSE: A wireless communication control method and a system using a speaker connected to a computer system are provided to control external machines such as lamps, door locks, electronic devices, and so on without light emitting sensor or transmitter. CONSTITUTION: A computer system generates ultrasonic waves. An external machines receives the ultrasonic waves. The external machine(30) consists of a receiving part to receive the ultrasonic waves, a processing part to process the signal, a saving part to store the signal, an operation part to operate the machine, and an input part to input control commands. The computer system(10) consists of a body(12), which has a mother board(6) and a communication modem, a buzzer or a speaker, and display devices. A buzzer(13) generates ultrasonic waves using an intensity modulation method. The user connects the computer using the Internet, generates ultrasonic sound using the speaker or the buzzer in the computer and controls the external electronic devices, which has the receiving device.
Patent KR-20020045387-A (KR)
Title: Washing method for washing machine
Inventor: LEE DEUK HUI
IPC: D06F33/02
Filed: 2000-12-08
Abstract: PURPOSE: A washing method of a washing machine is provided to increase a washing efficiency by sufficiently dissolving detergent by dispersing inserted detergent uniformly before an actual washing process is started, and to increase reliability of the washing machine. CONSTITUTION: A washing method of a washing machine includes the steps of inserting detergent on clothing put in a wash tub, supplying water to a water amount corresponding to an amount of clothing, starting washing after finishing the water supply, sensing opening of a door before the washing step, and dispersing detergent by rotating the wash tub for a predetermined period of time when the door is opened. In the detergent dispersing step, the wash tub is rotated to the setting number of revolution.
Patent KR-20010062452-A (KR)
Title: Elevator hoistway
Inventor: LIEBETRAU CHRISTOPH
IPC: E04F17/00
Filed: 2000-12-15
Abstract: PURPOSE: An elevator hoistway is provided to obtain an elevator hoistway which is formed post-constructionally in an existing multi-storied building by simple and inexpensive elements. CONSTITUTION: An elevator hoistway(1) for multi-story building includes at least one hoistway frame(7) extending through at least one of story floors(2,3) and defining the boundary of hoistway through-openings(4,5) in the story floors for forming the vertical movement path for an elevator to be installed in an existing multi-story building after construction by using a low cost elements without requiring a construction labor. The hoistway through-openings is covered by a load supporting floor structural body(8). By this, particularly in a one family dwelling house, the space of the elevator hoist is used not exclusively for the elevator, and used as a living space. The hoistway frame itself serves as an interface between the buildings and elevator retainers provided for transmission of a force.
Patent KR-20020055897-A (KR)
Inventor: JUNG WON HWA
IPC: G11C16/00
Filed: 2000-12-29
Abstract: PURPOSE: A flash memory device is provided to reduce the amount of cell current and improve a program speed by controlling voltage of a flash memory cell. CONSTITUTION: A flash memory device is formed with an NOR type flash memory cell array(100), a multiplexer(200), and a decoder portion(300). In the decoder portion(300), the first PMOS transistor(P21) receives the first global word line signal(GWL0). The first PMOS transistor(P21) is used as a diode. The first NMOS transistor(N21) is connected between the first node(Q21) and a ground terminal(Vss). The first NMOS transistor(N21) is driven by the first control signal(NGW0). The first inverter(I21) is connected between the first control signal input terminal and the second node(Q22). The first transfer gate(T21) is driven by a sector program signal(SPGM) and an inversion signal(SPGMb). The first transfer gate(T21) supplies electric potential of the second node(Q22) to the first source line(SOURCE0). The second PMOS transistor(P22) is connected between the second local word line signal input terminal and the first word line. The second PMOS transistor(P22) is driven by electric potential of the first node(Q21). The third NMOS transistor(N23) is connected between the second word line(WL1) and the second power terminal(VEEX). The third NMOS transistor(N23) is driven by electric potential of the second node(Q22). The fourth NMOS transistor(N24) is connected between the second word line(WL1) and the second power terminal(VEEX). The fourth NMOS transistor(N24) is driven by the second pre-decoder bar signal(XPRE1b).
Patent KR-20020056257-A (KR)
Title: Refresh period generator in memory device
Inventor: PARK GI HONG
IPC: G11C11/407
Filed: 2000-12-29
Abstract: PURPOSE: A circuit for generating a refresh period of a memory device is provided to generate subdivided refresh periods by using a 1.5-demultiplied oscillating signal generator as well as a 2-demultiplied oscillating signal generator. CONSTITUTION: A 2-demultiplied oscillating signal generation portion(10) receives a refresh enable signal and an iRFSH signal, a reference oscillating signal of one micro second, demultiplies the reference oscillating signal by 2, and outputs 2-demultiplied oscillating signals such as 2 micro seconds, 4 micro seconds, and 8 micro seconds. A 1.5-demultiplied oscillating signal generation portion(20) receives the reference oscillating signal of one micro second from the 2-demultiplied oscillating signal generation portion(10), demultiplies the reference oscillating signal of one micro second by 1.5, and 1.5-demultiplied oscillating signals such as 3 micro second and 6 micro second.
Patent KR-20020056572-A (KR)
Title: A reinforce device of cooling efficiency of engine
Inventor: KIM GYU WAN
IPC: F01P11/08
Filed: 2000-12-29
Abstract: PURPOSE: A device for improving a cooling efficiency of an engine is provided to properly control the flow of a coolant around a combustion chamber of the engine according to the operation speed of the engine. CONSTITUTION: A device for improving a cooling efficiency of an engine comprises a horizontal reciprocating unit installed to a cylinder block to be slid horizontally by the oil pressure for engine lubrication, an eddy increase block(19) slid vertically by the horizontal reciprocating unit and changed the vertical position thereof in a water jacket(21), and a controller(31) controlling the horizontal reciprocating unit according to the operation speed of the engine. The horizontal reciprocating unit is composed of an auxiliary oil passage(9) which an oil is supplied from an oil pump of the engine through, a solenoid valve(11) controlling the flow of the oil supplied through the auxiliary oil passage in response to the signal of the controller, a horizontal reciprocating block(15) installed to the cylinder block to be slid horizontally by the pressure of the oil supplied through the solenoid valve and a spring(13), and a drain passage(29) for draining the oil to an oil pan.
Patent KR-20010021987-A (KR)
Title: 바륨스트론튬티탄산염의 박막의 제조방법
IPC: H01L21/314
Filed: 1998-07-17
Abstract: 바륨, 스트론튬 및 티타늄을 포함한 액체전구체는 바륨스트론튬티탄산염의 박막(30,60)을 형성하기 위하여 제 1전극(28, 55)에 도포되고, 160℃의 제 1온도로 대기에서 건조되고 다음에 400℃의 제 2온도로 건조되고, 질소내에서 800℃의 온도로 어닐된다.   제 2전극(32, 77)은 증착되고, 디바이스(10, 70)는 커패시터(16, 72)를 형성하기 위해 패턴화되고, 제 2어닐은 질소내에서 800℃의 온도로 행해진다.   이런 방식에 의해서 높은 전자적인 품질의 바륨스트론튬티탄산염의 박막(30, 60)은 고온산소어닐없이 제조된다.
Patent KR-20010022683-A (KR)
Title: 디스크 구동부에서 고정 소수점 디지털 신호 처리기상에선형 이산-시간 상태-공간 서보 제어 시스템을 실행하는 방법
IPC: G05B5/01
Filed: 1998-05-15
Abstract: 디스크 구동부[110]에서 디지털 신호 처리기(DSP)의 모델 기반 서보 제어기[170, 174, 190]를 실행하는 방법은 서보 제어기[170, 174, 190]의 이산 시간 상태 공간 실현을 위한 행렬을 얻는 것을 포함한다.  제어기(170, 174, 190]의 제어기 상태는 제어기 상태에 대한 최아그이 경우의 범위를 감소시키기 위하여 스케일링된다.  제어기 상태는 필요한 수학 연산 수를 감소시키는 적정 포맷으로 변환된다.  또한, 행렬은 고정 소수점 포맷으로 전환된다.
Patent KR-20010024755-A (KR)
Title: 개선된 인터페론 중합체 접합체
IPC: A61K47/48
Filed: 1998-12-16
Abstract: 본 발명은 실질적으로 비-항원성인 중합체에 접합된 알파 인터페론을 함유하는 조성물에 관한 것이며, 여기서, 접합체의 약 30% 이상은 히스티딘에서 실질적으로 비-항원성인 중합체에 대한 알파 인터페론의 공유 부착을 포함한다.  또한, 본 발명은 이러한 접합체의 제조 방법에 관한 것이다.  이 방법은 알파 인터페론의 히스티딘상에 중합체를 공유 부착시키기에 충분히 용이한 pH에서 알파 인터페론을 석신이미딜 카보네이트-활성화된 실질적으로 비-항원성인 중합체와 접촉시킴을 포함한다.
Patent KR-20010033533-A (KR)
Title: 자기 저항 효과 소자 및 그것을 이용한 자기 센서
IPC: G01R33/09
Filed: 1998-10-26
Abstract: 본 발명의 자기 저항 효과 소자는, 자성층과 Cu를 주성분으로 하는 비자성층을 교대로 반복하여 적층한 구조로서, 상기 비자성층 두께를 MR 비가 제 2 극대를 나타내는 근방의 막두께로 설정된 것에 있어서, 자성층으로서 Co 1-x Fe x (0.05≤x≤0.5)를 이용하고, 이 자성층은 1층마다 층 두께가 변조되어 있으며, 얇은 쪽의 자성층 두께는 4.5Å 이상, 8Å 이하로 하였다.  또한, 인가하는 자계의 중심 자계가 임의의 방향으로 오프셋한 자계를 인가하여 이용하는 자기 저항 효과 소자에 있어서, 상기 오프셋한 자계 방향으로 미리 초기화를 하였다.  또한, 자기 저항 효과막을 선 형상으로 패터닝하여, 상기 선 형상의 길이 방향과 검지해야 할 자계 변화 방향이 수직으로 되도록 구성하였다.  이에 따라, 자기 센서에 적합한 큰 자기 저항 변화율 및 작은 히스테리시스 자계를 갖고, 또한 고온하에서도 안정성을 갖는 자기 저항 효과 소자가 얻어진다.
Patent KR-20010034109-A (KR)
Title: 분말상 수경성 조성물용 분산제의 제조방법
IPC: C04B28/06
Filed: 1999-11-29
Abstract: 본 발명은 폴리알킬렌 글리콜 사슬을 갖는 폴리카르복실레이트 고분자 화합물을 주성분으로 하는 액에 환원제를 첨가하고, 이어서 건조, 분말화함을 특징으로 하는 분말상 수경성 조성물용 분산제의 제조방법; 수경성 조성물 제조용 분말상 분산제; 이 분산제를 함유하는 수경성 조성물에 관한 것이다. 본 발명에 따르면, 우수한 유동성과 분산성을 갖는 수경성 조성물 제조용 분말상 분산제를 제공한다. 이 분산제는 미리 시멘트에 첨가할 수 있다.
Patent KR-20010041638-A (KR)
Title: 프로그램 가능 디지타이저
IPC: H03M1/12
Filed: 1999-04-20
Abstract: 본 발명에 따른 디지타이저는 아날로그 신호(ANALOG)를 트리거 신호 세트(TRIGIN, TRIGOUT)에 응답하여 결정되는 복합 주파수 패턴으로 디지타이징하기 위해 프로그램될 수 있다.  상기 디지타이저는 한 세트의 데이터 패킷을 저장하는 어드레스 지정 가능 패킷 메모리(18)를 포함하고, 어드레스가 지정될 경우 출력으로 저장된 데이터 패킷 중 하나를 생성한다.  상기 출력 데이터 패킷은 구간(PERIOD)과 모드 데이터(MODE) 필드를 모두 포함한다.  상기 디지타이저는 또한 패킷 메모리의 구간 데이터 출력에 의해 제어되는 주파수에서 아날로그 신호(ANALOG)를 디지타이징하기 위한 아날로그-디지털 변환기(12)를 포함한다.  상기 패킷 메모리의 모드 데이터 출력(MODE)은 트리거 로직 회로(20)에 다음 패킷 메모리 어드레스를 선택하는 방법을 알려주고, 트리거 신호 중 하나를 선택하여 패킷 메모리 어드레스가 변경될 경우 디지타이징 주파수가 대체되도록 한다.
Patent KR-20010042496-A (KR)
Title: 표면 탄성파 소자 패키지 및 방법
IPC: H03H3/08
Filed: 1999-03-11
Abstract: 그의 일면(14)에 배치된 능동 영역(12)을 오염시키지 않고 탄성파 소자(10)를 패키징하는 방법은 기판에 도전성 패드(18)를 갖는 상면(30)을 마련하고, 스터드 범프(20)를 탄성파 소자의 일면(14)의 외주(22)에 본딩하고, 댐(26)을 기판의 상면(30) 상 및 도전성 패드(18)의 위치의 내부에 배치하고, 탄성파 소자(10)와 기판(16)에 전기 전도성 상호접속이 형성되도록 기판의 상면에서 도전성 패드(18)에 스터드 범프(20)를 정렬하여 접속하고, 댐(26)에 의해 규정된 경계에서 언더필 물질(28)이 정지하도록 언더필 물질(28)을 탄성파 소자의 외주(22) 및 상호 접속부 주위에 흘리고(flow), 상호 접속부를 기계적으로 보강하고 보호 봉입하도록 언더필 물질(28)을 경화하는 스텝을 포함한다.
Patent KR-20010025070-A (KR)
Title: 차단밸브
IPC: F16K3/18
Filed: 1999-05-13
Abstract: 본 발명은 제 2 영역으로부터 제 1 영역을 선택적으로 밀봉하는 차단밸브에 관한 것이다.  게이트 밸브(10)는 제 1 영역(202)과 제 2 영역(204) 사이의 채널(28)을 한정하는 하우징(12)을 포함할 수 있다.  상기 밸브는, 게이트(14)에 위치하여 조립 위치와 전개 위치 사이에 이동가능한 게이트를 포함한다.  이러한 게이트가 조립 위치에 있는 경우, 제 1 영역과 제 2 영역 사이에 연통이 가능하다.  게이트가 전개 위치에 있는 경우, 게이트는 채널을 연결하며, 제 1 영역과 제 2 영역을 차단시키도록 제어될 수 있다.  예컨대, 상기 밸브는 커다란 글래스 기판을 처리하는 시스템과 관련하여 이용될 수 있다.  기판 처리 챔버의 개구부와 같이 긴 사각형 개구부를 차단하는데에 특히 이러한 밸브를 이용한다.  차단 처리 챔버 또는 로드 락 챔버는 서로로부터 예컨대, 선형 시스템에서 용이하다.
Patent KR-20010043743-A (KR)
IPC: B21C47/00
Filed: 1999-09-22
Abstract: In order to prevent a preceding strip from being oversupplied on a delivery side of a coiling pinch rolls and to prevent a leading end of the following material from being over supplied on an entrance side of the coiling pinch rolls, to provide a strip coiling method in which a strip sent from a rolling mill is cut to a predetermined length by a strip shear (102), and a cut strip is coiled by a mandrel (107) of a coiler (104) via a coiling pinch rolls (105) disposed on a delivery side of a strip shear (102), characterized in that after a tail end of the strip coiled by the mandrel (107) via the coiling pinch rolls (105) is cut by the strip shear (102), a circumferential speed of the coiling pinch rolls (105) is higher than a transfer speed of the following material immediately after the cutting operation and lower than a coiling speed of the strip coiled by the mandrel (107). <IMAGE>
Patent KR-20010053202-A (KR)
Title: 나사선 및 고온용 나사 조립체
IPC: F01D25/24
Filed: 1999-06-16
Abstract: 본 발명은 축(2)을 따라 연장된 부품의 나사선(1)에 관한 것이며, 상기 나사선(1)은 나사 조립체를 제조하기 위한 역나사선 구조(4)를 갖는 제 2 부품의 역나사선(4) 내로 삽입되기 위한 나사선 구조(3)를 갖는다.  제 1 부품 및 제 2 부품의 탄성 및/또는 열 변형 특성은 서로 상이하며, 상기 나사선 구조(3)는 미리 정해진 열가공 부하에서 탄성 및/또는 열 변형을 보상하기 위해 변형 예측, 그리고 일정한 직경(D)의 실린더형 나사선 영역(7)을 갖는다.  또한 본 발명은 고온용 나사 조립체에 관한 것이다.
Patent KR-20010070483-A (KR)
Title: Stage apparatus, exposure apparatus, and device production method
Inventor: ASANO TOSHIYA
IPC: H01L21/027
Filed: 2001-01-10
Abstract: PURPOSE: To constitute a stage device without applying driving reaction to a floor or the like and to maintain the movable range of a 1st moving body at a prescribed value. CONSTITUTION: A positioning device provided with 1st and 2nd moving bodies 13, 17 supported so as to be optionally moved along a reference surface, a 1st driving mechanism 15, 16 for generating force of a prescribed direction between the 1st and 2nd moving bodies 13, 17 and a 1st moving body control system for controlling the 1st moving body 13 so as to be positioned on a required position is also provided with a 2nd driving mechanism 23-26 for generating force of the same direction as the prescribed direction between the reference surface and the 2nd moving body 17 and a 2nd moving body control system for controlling the position of the 2nd moving body 17 synchronously with the control of the 1st moving body control system. Or the positioning device is provided with a 2nd moving body position fixing mechanism for fixing the 2nd moving body 17 on an optional position in a moving range along the reference surface and a 2nd moving body position measuring system for measuring the position of the 2nd moving body 17 in the prescribed direction.
Patent KR-20020065144-A (KR)
Title: Method for depositing tungsten silicide
Inventor: AHN JAE YEONG
IPC: H01L21/285
Filed: 2001-02-06
Abstract: PURPOSE: A method for forming a tungsten silicide is provided to prevent generation of a void on a polysilicon layer by performing a preprocess for a surface of the polysilicon layer using hydrogen compound gases of the group 3 and the group 5. CONSTITUTION: A wafer is loaded in a reaction chamber. Argon gases are laid on the reaction chamber during 60 seconds under the pressure of the reaction chamber of 9.5 torr and the substrate temperature of 610 degrees centigrade(S30). A PH3 gas of 120 sccm is implanted into the reaction chamber during 60 seconds(S32). A mixed gas including Ar-1 gas of 20 sccm, DCS gas of 300 sccm, and PH3 gas f 60 sccm is injected into the reaction chamber during 10 seconds. A tungsten silicide core is formed on a surface of a polysilicon layer by implanting WF6 gas of 1 sccm(S34). A tungsten silicide layer is deposited and grown on a surface of the wafer by implanting Ar-1 gas of 150 sccm, Ar-2 gas of 200 sccm, WF7 of 7 sccm, and DCS gas of 85 sccm during 40 seconds.
Patent KR-20010112047-A (KR)
Title: 반도체장치
IPC: H01L27/14
Filed: 2001-02-08
Abstract: CMOS 카메라의 소형화와 저코스트화를 도모하는 본 발명의 반도체장치는, 촬상용 개구부(22)가 형성된 배선기판(21), 이 배선기판의 일면에 설치되고, 촬상용 개구부에 대향배치된 렌즈(2)를 갖는 렌즈 유니트(3), 배선기판의 타면에서 촬상용 개구부에 대향대치되고, 배선기판의 접속부에 플립칩 접속된 촬상용 반도체(4), 및 배선기판의 타면에서 다른 접속부에 플립칩 접속되고, 촬상용 반도체로부터의 화상신호를 처리하는 화상처리용 반도체(9)를 구비한다.