baber/WOPTO huggingface dataset:
Patent JP-2009139888-A (JP)
Title: Surface light-diffusing polyester film
Inventor: HAMAMOTO SHIRO
IPC: G02B5/02
Filed: 2007-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide a surface light-diffusing polyester film having excellent heat resistance, mechanical strength, thickness accuracy and the like, achieving both total light transmittance and light diffusivity, suppressing curling due to heat originating from a bimetal structure, suppressing the occurrence of moire or scintillation when used for a liquid crystal display, and showing excellent post-processing property.  <P>SOLUTION: The surface light-diffusing polyester film has a Δn<SB>ab</SB>(relating to the refractive index) of 0.015 to 0.060 and is characterized in that: (1) the film has a light-diffusing layer comprising a blended composition of 50 to 99 parts by mass of a crystalline polyester and 1 to 50 parts by mass of an additive incompatible with the polyester; (2) the film has a plane orientation coefficient ΔP of 0.08 to 0.16; (3) the film has a surface haze of ≥15%; (4) the film has an internal haze less than the surface haze; (5) the film has a tensile strength of ≥100 MPa; (6) the film has an S(3) factor, which represents diffusivity, of ≥30% and <50%; and moreover, the film shows heat shrinkage percentages HS150 close to both ends in the width direction of the film ranging from 0.7% to 2.0%, the difference in the HS150 close to both ends being ≤0.1%, and the amount of variation along the longitudinal direction in the HS150 close to both ends being ≤0.25%.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009148026-A (JP)
Title: Concentrated power distributing member for dynamo-electric machine
Inventor: SASAKI KEI
IPC: H02K3/38
Filed: 2007-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To regulate the position between each bus bar and a bus bar insulator, in a concentrated power distributing member.  <P>SOLUTION: It includes a connecting bus bar 11 for connection of each phase, which connects the fellow inphase coils out of individual phase coils wound on the stator of a dynamo-electric machine, a connecting bus bar 11 for a neutral point, which connects individual phase coils wound on the stator of the dynamo-electric machine, a bus bar insulator 12, which has a retaining groove 108 shaped like a ring wherein each connecting bus bar 11 can be inserted for mutual insulation and is constituted of an insulating material, a positioning part on the bus bar side, which is provided in each connecting bus bar 11, and a positioning part on the insulation side, which is provided in the bus bar insulator 12 and performs positioning between each connecting bus bar 11 and the bus bar insulator 12 in cooperation with the positioning part on the bus bar side.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009049355-A (JP)
Title: Piezoelectric thin film element
Inventor: SHIBATA KENJI
IPC: C23C14/06
Filed: 2007-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a piozoelectric thin film element containing a potassium sodium niobate thin film having excellent piezoelectric characteristics.  <P>SOLUTION: The piozoelectric thin film element includes: on a substrate 1; a lower electrode 2; a KNbO<SB>3</SB>thin film 3; a piezoelectric thin film 4 formed of potassium sodium niobate of perovskite structure (expressed by (K<SB>x</SB>Na<SB>1-x</SB>)NbO<SB>3</SB>(0<x<1)), which has a film thickness of 0.2 μm to 10 μm and a specific inductive capacity in the range of 50 or more and 200 or less; and an upper electrode 5.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009146495-A (JP)
Title: Nand type flash memory
Inventor: OTAKE HIROYUKI
IPC: G11C29/56
Filed: 2007-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a NAND type flash memory in which a test time can be shortened by reducing largely a time for inputting data for test.  <P>SOLUTION: A test control circuit 10 has a first switching circuit 11, a test latch circuit 12, a second switching circuit 13, and a test control signal generating circuit 14. The test latch circuit 12 holds temporarily a data pattern for test inputted through a data input/output buffer 9. By this invention, when the same data pattern for test is latched to a different data latch circuit 4, since a latch is performed by only transfer to the data latch circuit 4 from the test latch circuit 12 without inputting data from the outside whenever, a time required for latching the data pattern for test to the data latch circuit 4 can be shortened largely, and a test time also can be shortened.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009144081-A (JP)
Title: Prepreg, method for producing the same and frp
Inventor: KIUCHI KOJI
IPC: C08G61/06
Filed: 2007-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide a prepreg capable of using a reinforcing fiber treated with a sizing agent and obtaining an FRP having a high strength and excellent in tenacity, a method for producing the prepreg and the FRP obtained by using the prepreg.  <P>SOLUTION: This prepreg obtained by impregnating a polymerizable composition containing a cycloolefin monomer and a ruthenium catalyst having a compound of a heterocyclic structure as a ligand in reinforcing fibers treated with the sizing agent and polymerizing the composition, and the FRP obtained by curing the prepreg are provided. The prepreg can also be used as an FRP laminate obtained by laminating with the same prepreg or with another material and curing. The prepreg can also be produced by impregnating the polymerizable composition containing the cycloolefin monomer and the ruthenium catalyst having the compound containing the heterocyclic structure as the ligand in the reinforcing fibers treated with the sizing agent and then polymerizing the composition.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009148845-A (JP)
Title: Small-size production equipment
Inventor: NAKADE TOSHIHIKO
IPC: B25J15/04
Filed: 2007-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To perform work after accurately recognizing a position and attitude with respect to a working object.  <P>SOLUTION: This small-size production equipment 1 for performing work such as gripping a workpiece W is provided with a stage 3 for retaining the workpiece W in a predetermined state, a first manipulator 4 gripping the workpiece W or the like, a first end effector 6 attached to the first manipulator 4, a first camera 7 attached to the first end effector 6, a recognition means for recognizing the attitude and the like of the workpiece W based on an image of the first camera 7, and a control means for controlling the attitude and the like of the workpiece W based on the recognition result, wherein the first camera 7 is so set as to include the width-directional end portions of the gripped workpiece W as an imaging visual field and include a predetermined range of the width-directional end portions and the front of the workpiece W as a depth of field, the recognition means recognizes the attitude and the like of the workpiece W and a working object workpiece, and the control means determines an adjustment amount of the workpiece W based on the recognition result.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008085373-A (JP)
Title: Printed circuit board and its manufacturing method
Inventor: KAWAGUCHI KATSUO
IPC: H05K3/46
Filed: 2007-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide a printed circuit board which improves pattern in precision especially in an upper layer, and connectability with high density large scale integrated circuit, and to provide its manufacturing method.  <P>SOLUTION: The manufacturing method comprises the steps of: laminating an upper layer portion 6 using a technique of semiconductor technology on a base substrate 1 manufactured by a general process; forming an upper layer insulating layer 2 by a spin coating method on the base substrate 1, and processing in pattern; forming upper layer conductive layer by PVD and wet plating; forming a pattern 4 and a through hole 3 simultaneously by this; and separating the pattern 4 by removing an excess portion of the upper layer conductive layer by precision polishing.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009150267-A (JP)
Title: Controller of internal combustion engine having turbocharger
Inventor: ISOGAI NOBUMASA
IPC: F02B37/22
Filed: 2007-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide an internal combustion engine having a turbocharger with a variable blade adjusting mechanism providing the supercharged pressure of an intake air with a good response to a desired supercharged pressure without being affected by an individual difference and a deterioration with time of the turbocharger.  <P>SOLUTION: This controller controls a supercharged pressure by controlling a variable blade adjusting mechanism installed on a turbine of a turbocharger for adjusting the opening of the blades of the turbine. The controller has a model for calculating the opening of the blades of the turbine by using the thermodynamic model and the turbine characteristics of the turbocharger. The instructed blade opening of the turbine calculated by using these models and an exhaust gas pressure at the turbine inlet of the turbocharger (hereafter, referred to as a turbine inlet pressure) are measured, and the difference of the positions of the blades of the turbine guided by comparing these positions with the actual positions of the blades of the turbine calculated from the turbine characteristics is corrected. The accuracies of the models are thereby improved, and the controllability is enhanced.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009152420-A (JP)
Title: Lateral mosfet
Inventor: SAKAI EISHIRO
IPC: H01L29/786
Filed: 2007-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To solve the problem that the conventional lateral MOSFET 20 has a deficiency that Vt fluctuates because of hot carrier generation in a high electric field concentrated on the drain side edge, as a result of its inability reaching the drain side edge of the gate electrode 39, which is caused by the fact that a depletion layer a is not easily extended near an N type impurity region 44 with comparatively high impurity concentration, which is disposed for the purpose of reducing on-resistance.  <P>SOLUTION: The lateral MOSFET 1 includes an N<SP>+</SP>type high concentration region 5 having higher impurity concentration than that of an N<SP>-</SP>type semiconductor layer 33 on the front surface layer of the N<SP>-</SP>type semiconductor layer 33 that lies between a P<SP>+</SP>type base region 35 and an N<SP>++</SP>type drain region 36; and a plurality of N<SP>-</SP>type low concentration regions 6 having lower impurity concentration than that of the N<SP>+</SP>type high concentration region 5 on the front surface layer of the N<SP>-</SP>type semiconductor layer 33 that extend towards the N<SP>++</SP>type drain region 36, while each one edge of the N<SP>-</SP>type low concentration regions touches the P<SP>+</SP>type base region 35.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009151198-A (JP)
Title: Monosaccharide structural formula learning material or program
Inventor: IKUMORI TAKESHI
IPC: G09B23/26
Filed: 2007-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a monosaccharide structural formula learning material or a program enabling the acquisition of an isomeric structural formula.  <P>SOLUTION: The monosaccharide structural formula learning material or the program includes a fixed display part in which, with respect to 59 monosaccharides in total, the skeleton of each structural formula is vertically or horizontally displayed, and at least a structure having a chain type carbon-carbon bond is not changed; and a movable display part in which, with respect to an asymmetrical carbon constituting the skeleton, OH groups and hydrogen bonded to the asymmetrical carbon are laterally or vertically replaced and arranged, the movable display part having, for each asymmetrical carbon, a first position in which the OH groups are arranged on the left or an upper part, and hydrogen is arranged on the right or a lower part, and a second position in which the OH groups are arranged in the right or the lower part, and hydrogen is arranged in the left or the lower part, so that the structural formula of one compound is displayed as the whole. The material or the program further includes a third display part in which, for each asymmetrical carbon, a specific symbol or an identification mark L is displayed in the first position, and the other specific symbol or an identification mark D discriminative from the above is displayed in the second position.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009148864-A (JP)
Title: Tool holder
Inventor: SUZUKI SHIGERU
IPC: B23B31/117
Filed: 2007-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a press-fit-type tool holder with a small number of components and high fluctuation accuracy and flexural rigidity.  <P>SOLUTION: A tapered hole of a tightening sleeve has a press-fit margin (tightening margin) for engaging with a tapered circumference of a tool holding tube, elastically deforming the tapered circumference in a radial direction as further pushed in a longitudinal direction and fixing a shank of a cutware carried in an inner diameter of the tapered circumference. A large diameter tube of the tightening sleeve has a press-fit margin (tightening margin) for elastically deforming the large diameter tube outward in the radial direction for fixedly sticking a shaft of a holder body of a tool holder body with the large diameter part by pushing the shaft into an inner diameter part. A first press-fit-fixed part is constituted of a tapered hole of the tightening sleeve engaging with the tapered circumference of the tool holding tube of the holder body and a tightening part having the tapered hole of the tightening sleeve. A second press-fit-fixed part is constituted of a cylindrical part of the shaft of the holder body and a hole formed on the large diameter tube of the tightening sleeve.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009156631-A (JP)
Title: X-ray inspection device
Inventor: TAKAHASHI ATSUSHI
IPC: G01N23/04
Filed: 2007-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To accurately inspect defects of articles by preventing the blurs of X-ray images.  <P>SOLUTION: This X-ray inspection device 1 inspecting conveyed articles based on X-ray images I comprises a detecting part 171 and a control part 172. The detecting part 171 detects data D on article conveying speed from the X-ray images I. The control part 172 controls the conveying speed based on the data D detected by the detecting part 171. Specifically, the detecting part 171 detects the length L of the article in the X-ray image I as the data D. The control part 172 makes the length L detected by the detecting part 171, asymptotic to the actual value L0 of the article length.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2009159678-A (JP)
Title: Power distribution system
Inventor: HASHIMOTO NAONORI
IPC: H02J9/06
Filed: 2007-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a power distribution system operating a load for long time, using a battery as a backup power source when power of a commercial power source is interrupted.  <P>SOLUTION: The system is provided with a DC power supply part 101, having a first power source formed of an AC/DC converter 112 with the commercial power source AC as a supply source; a second power source with a solar battery 161; a secondary battery 162 and a fuel battery 163 as the supply source, and a cooperation control part 113 controlling the distribution of each power that the first and second power sources supply; a DC device 102 to which power is supplied through a DC-supply line Wdc and which operates, based on a signal received through the DC supply line Wdc and a power failure detecting part 118 for transmitting a power failure detection signal, when it detects power failure of the commercial power source AC. When the power failure detecting part 118 detects power failure, the cooperation control part 113 supplies power to the DC device 102 only from the second power source, and the DC device 102 for receiving the power failure detection signal moves in a direction of reduction of power consumption.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2008086822-A (JP)
Title: Disposable diaper cover
Inventor: NAKAOKA KENJI
IPC: A61F13/496
Filed: 2007-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a diaper cover which can be worn easily without requiring fixing, has an improved comfort and ensures widely to prevent a leakage from the waist when the user is lying on his/her side.  <P>SOLUTION: A holding member which holds a separate crotch absorption member removably is located on the crotch between the front part and back part. The widths of the front part and back part are almost the same and both the sides of the back part are wider to form side parts. These wider side parts of the back part come round to the front part so that both the ends of the side parts are attached to the ends of the front part respectively to form leg holes at both the sides of the crotch. The front part and the back part are attached at the area other than the right and left waist parts extending from the front part to the back part. On the both waist parts, absorption members for waist are fixed respectively.  <P>COPYRIGHT: (C)2008,JPO&INPIT
Patent JP-2009138726-A (JP)
Title: Stream ejector, and evacuation device
Inventor: FUKUMOTO YASUFUMI
IPC: F04F5/46
Filed: 2007-12-06
Abstract: <P>PROBLEM TO BE SOLVED: To restrict noise such as stream sound or explosion sound of drive water at an output piece of a stream ejector.  <P>SOLUTION: A plurality of through-holes 4 are provided on a cylindrical pipe tubular wall to function as a gas suction port, so that the evacuation function is not deteriorated. A sector-shaped conical pipe is connected to a terminal end of a main pipe throat 6 behind a suction pipe, and the output piece 7 comprising a pipe of a slightly larger diameter is connected to its end. Due to above simple structure, its manufacture is easy. The output piece of the stream ejector is covered with a pipe of metal or resin in cylindrical form that is larger than its diameter. The covered part is immersed under the water surface in a water storage tank. The noise of the stream ejector is thus reduced, and its smell is eliminated. Noise is restricted.  <P>COPYRIGHT: (C)2009,JPO&INPIT
Patent JP-2007523924-A (JP)
Title: シャワーオイルジェル
IPC: A61Q19/00
Filed: 2005-02-02
Abstract: １種以上の油溶性界面活性剤７０質量％まで、１種以上のオイル成分５〜７０質量％、１種以上の熱分解法シリカ０．１〜２５質量％及び場合により更なる化粧品及び／又は医薬品の、助剤物質、添加剤及び／又は有効化合物を有するシャワーオイルジェル。
Patent JP-2007527583-A (JP)
Title: 金融市場環境で賭けを行うオッズを決定するシステム及び方法
IPC: G06Q50/00
Filed: 2005-03-04
Abstract: 金融市場環境で賭けを行う方法が提供され、金融市場に関連する移動性市場ラインに基づく賭けを行う機会を提供することを有する。エンドユーザは、金融市場価値が指定の時間に移動性市場ラインより上にあるか下にあるかについて、賭けを行う機会を与えられる。賭けはエンドユーザから受領されてもよい。金融市場価値が指定の時間に移動性市場ラインより上にあるか下にあるかを決定するために、賭けは監視されてもよい。
Patent JP-2007529896-A (JP)
Title: 有機発光ダイオード
IPC: H01L51/30
Filed: 2005-01-18
Abstract: 第一の対向面と第二の対向面とを有する基材；第一の対向面の上に重ねられている第一の電極層；第一の電極層の上に重ねられている発光エレメント（発光エレメントには正孔輸送層及び発光／電子輸送層が含まれ、正孔輸送層及び発光／電子輸送層は互いの上に直接重ねられ、かつ正孔輸送層には硬化ポリシロキサンが含まれ、硬化ポリシロキサンは、フィルムを形成するためにオルガノシリコン組成物を適用する工程、及び前記フィルムを湿気に暴露する工程により製造され、前記オルガノシリコン組成物には、カルバゾリル基、フルオロアルキル基、及びペンタフルオロフェニルアルキル基から選択される基を有する少なくとも１種のシランが含まれる）；及び発光エレメントの上に重ねられている第二の電極層、を含む有機発光ダイオード。
Patent JP-2007530644-A (JP)
Title: 新規ベンゾチアゾール及びその医薬としての使用
IPC: A61K31/454
Filed: 2005-03-30
Abstract: 本発明は、新規化学的化合物、特に新規ベンゾチアゾール誘導体に関し、該化合物を含有する組成物に関し、及び医薬としてのこれらの使用に関する。
Patent JP-2007533820-A (JP)
IPC: C08G8/00
Filed: 2004-07-28
Abstract: The invention herein disclosed comprises the use of oxazolidines, nitroalcohols, nitroamines, aminonitroalcohols, imines, hexahydropyrimidines, nitrones, hydroxylamines, nitro-olefins and nitroacetals to serve as hardeners and/or as catalysts for curing phenolic resins. The hardeners and catalysts described in the invention can be applied in any application where phenolic resins are used, including but not limited to adhesives, molding, coatings, pultrusion, prepregs, electronics, composites, fire resistant, and flame-retardant end uses.
Patent JP-2008501261-A (JP)
Title: 高速高品質画像処理のための画像圧縮方法
IPC: H04N7/26
Filed: 2005-05-31
Abstract: 本発明はロスレスの、近ロスレスの、及び損失のあるデジタル画像データの圧縮と伸張に関する。画像データが圧縮・伸張されるときに、一時的データ蓄積のための外部RAMリソースが必要のなく、画像データがon-the-flyで圧縮・伸張される。アルゴリズムを実装するために、必要なシリコン量は極めて少なく、高いパフォーマンスと低い電力消費が得られる。前記実装は、Bayerフィルタパターンを持つ画像センサからの生の画像データのために最適化されるが、どのカラーフィルタの画像センサからのデータについても使用できる。圧縮アルゴリズムはライン インデキシング フォーマットを含み、圧縮済み画像の高速サブサンプリングを可能にする。又、画像の特定部分を伸張する可能性を持つ。これは、パフォーマンスを改善し、ズーミングと後処理時における、一時的RAM記憶に対するニーズを大きく低減させる。 【選択図】図３
Patent JP-2008503910-A (JP)
IPC: H04W60/00
Filed: 2005-07-07
Abstract: A method of informing a network of a change of user equipment capability includes: stopping a registration timer on the user side set currently when the user equipment capability changes; sending a register request message carrying information of new user equipment capability to the network; analyzing, by the network, the register request message, and storing the information of new user equipment capability for reference by subsequent establishment of a session; stopping a current registration timer on the server side set for the user equipment; initiating a new registration timer on the server side for the user equipment; sending a response message carrying information of the new registration timer on the server side to the user equipment; resetting the registration timer on the user side based on information of the new registration timer on the server side in the response message. The capability change is informed to the network in time.
Patent JP-2008502627-A (JP)
Title: ヒドロキサム酸塩、その製造、および薬剤としての使用
IPC: A61P35/00
Filed: 2005-06-13
Abstract: 本発明の目的は、式(I)の化合物、その薬剤学的に許容される塩、エナンチオマー型、ジアステレオ異性体およびラセミ体、上記化合物の調製、これらを含有する薬剤とその製造法、ならびに癌のような疾患の抑制または予防における上記化合物の使用である。
Patent JP-2007538393-A (JP)
Title: 固形化合物の蒸気を一定供給するためのバブラー
IPC: H01L21/205
Filed: 2005-05-17
Abstract: すべてのチャンバーが実質的に垂直の向きにある、１のチャンバーまたは直列に接続された２以上のチャンバーを含んでいるバブラーチャンバーアッセンブリ。化合物の固形または液状源が、該１または２以上のチャンバーに内蔵される。該１または２以上のチャンバーを通るキャリアーガスの流れの方向に関する、該１のチャンバーの長さまたは直列に接続された２以上のチャンバーの合計長さと、該１または２以上のチャンバーを通るキャリアーガスの流れの方向に関する、該１または２以上のチャンバーの断面の平均等価直径との比は、約６：１以上である。 【選択図】なし
Patent JP-2008505526-A (JP)
IPC: G06F/
Filed: 2005-06-29
Abstract: The present invention allows administrators of conference equipment, remotely localized from the ordinary managing interface, to execute simple commands for solving a problem that may have occurred during a conference or at conference set up. This is provided by a parser translating user terminal commands transmitted from the user terminal (e.g. a cellular phone) of the system administrator to Conference Management System codes, which are executed on the conference equipment in question from the Conference Management System. The present invention also allows system administrators to be alerted by a message (e.g. SMS) at any errors occurring during a conference or conference set up, and to correct the errors by responding to the alert without the need of addressing the equipment in which the errors occur.
Patent JP-2008505078-A (JP)
Title: （３ｒ）−１−（２−メチルアラニル−ｄ−トリプトフィル）−３−（フェニルメチル）−３−ピペリジンカルボン酸１，２，２−トリメチルヒドラジドの結晶形
IPC: C07K1/30
Filed: 2005-06-22
Abstract: 医薬品として有用な（３Ｒ）−１−（２−メチルアラニル−Ｄ−トリプトフィル）−３−（フェニルメチル）−３−ピペリジンカルボン酸１，２，２−トリメチルヒドラジドの結晶多形体を開示する。また、これらの結晶形及びこれらの結晶形を含む医薬組成物の製造方法及び単離方法並びに治療方法も開示する。本発明の結晶多形体は、成長ホルモンを放出させるように下垂体細胞に直接作用するので有用である。
Patent JP-2008508618-A (JP)
Title: 電子メディア露出測定システムの精度および到達率を向上させるための方法および装置
IPC: G01S19/34
Filed: 2005-07-29
Abstract: メディア露出をクレジットするための方法および装置が開示されている。例示的な方法は、複数の回答者のそれぞれの者によって通り抜けられた複数の移動経路を導出すること、複数の回答者のそれぞれの者の複数のメディア・サイトに対する露出を、導出した複数の移動経路を基礎として決定すること、および決定した複数のメディア・サイトに対する露出を修正し、修正した決定した露出の統計的精度を向上させることを含む。
Patent JP-2008502806-A (JP)
Title: バリア金属上への直接の銅メッキを可能にするバリア層表面処理方法
IPC: H01L23/532
Filed: 2005-06-07
Abstract: 銅のシード層を用いずに、直接銅メッキを可能にするバリア層表面処理の方法の実施形態が記載されている。一実施形態において、上部に第VIII族金属層を備えた基板上に銅をメッキする方法は、第VIII族金属表面酸化層及び／又は表面汚染物を取り除くことにより基板表面を前処理し、前処理された第VIII族金属表面上に銅をメッキすることとを含む。基板を前処理することは、水素含有ガス環境及び／又は第VIII族と反応しないガスを伴う環境内で基板をアニール処理することにより、酸含有槽内の陰極処理により又は酸含有槽内に基板を浸すことにより、実行可能である。