baber/WOPTO huggingface dataset:
Patent KR-20000052003-A (KR)
Inventor: SEO KWANG JOO
IPC: B27N3/08
Filed: 1999-01-28
Abstract: PURPOSE: A producing method of a nutrient for bean sprouts is provided to enable a long-term storage and have a high effectiveness and harmless to men. CONSTITUTION: A nutrient for bean sprouts is prepared by adding a potassium hydroxide to a phosphoric acid solution and regulating to pH 6 and then mixing 0.3wt% of 6-benzylaminoprin. As a preparing example adding 200kg of phosphoric acid and 138kg of potassium hydroxide to 1000kg of water to make a solution maintained pH 6 and solving 3.2kg of 6-benzylaminoprin(purity 99%), when 6-benzylaminoprin solving step adding 90g of sodium hydroxide to 19kg of water or 600g of citric acid and 3.2kg of 6-benzylaminoprin to 0.3wt.% solution.
Patent KR-19990082706-A (KR)
Title: 팽창밸브
IPC: F25B41/06
Filed: 1999-02-22
Abstract: 팽창 밸브(10')는, 밸브 본체(30)에 리시버(6)로부터 고압 냉매가 유입되는 제1 통로(32')가 절삭 가공에 의해 형성되어 있고, 밸브 본체(30)의 하부에는 밸브 본체(30)의 저부에서 축방향을 따라 밸브실(35')을 구성하는 공간(35a)을 통로(33)에 의해 형성한다. 공간(35a)을 형성하는 통로(33)와 제1 통로(32')는 그들 통로의 형성시에 상호 간섭하여 형성되고, 그 간섭 영역에서 스로틀부(323)를 구성하고 있다. 즉, 제1 통로(32')는 그 통로의 단면적의 크기가 밸브실(35')의 방향으로 순차적으로 작아질 수 있도록 직경이 형성되어 있고, 그 직경의 단면적의 제1 통로(32')에 밸브실(35')을 형성하는 통로(33)를 간섭시켜서, 스로틀부(323)를 구성한다. 이 스로틀부(323)는 직경이 3 mm 정도인 단면적으로 형성된다. 이러한 구성에 의해 액상 냉매 안에 혼입되는 기포는 미세화되고, 냉매 통과음은 저감된다.
Patent KR-19990077473-A (KR)
Title: Ｍｐｅｇ시스템에서다수의시스템타임클록을선택적독립적으로또는동시에갱신하는방법및시스템
IPC: H04N7/32
Filed: 1999-02-25
Abstract: 본 발명은 다수의 시스템 타임 클록(system time clock: STC)을 선택으로 개별 갱신하거나 다수의 시스템 타임 클록을 동시에 갱신하는 방법, 시스템 및 컴퓨터 프로그램 제품에 관한 것이다.  시스템 타임 클록의 개별적인 갱신이나 동시 갱신은 어드레스를 갱신 가능한 어드레스 레지스터 필드 내의 시스템 타임 클록으로 선택적으로 조정함으로써 수행된다.  제1 어드레스 값은 제1 STC 레지스터와 관련된 제1 어드레스 레지스터로 공급되고, 제2 어드레스 값은 제2 STC 레지스터와 관련된 제2 어드레스 레지스터로 공급된다.  제1 어드레스 값과 제2 어드레스 값이 다른 경우에 제1 STC 레지스터와 제2 STC 레지스터가 독립적으로 갱신되고, 반면에 제1 어드레스 값과 제2 어드레스 값이 공통 어드레스 값을 포함하는 경우에 동시에 갱신된다.  이 기술은 갱신될 임의의 클록 수에 대해서도 외삽법으로 추정될 수 있다.
Patent KR-19990082900-A (KR)
Title: 네거티브형 레지스트조성물 및 레지스트패턴의 형성방법
IPC: H01L21/027
Filed: 1999-04-02
Abstract: 본 발명은 알칼리가용성기를 갖는, 피막형성성의, 염기성수용액에 가용인 중합체와, 알릴알콜구조를 가진 화합물과, 결상용방사선을 흡수하여 분해되어 상기 알릴알콜구조를 가진 화합물이  상기 알칼리가용성기의 보호기로 되도록 작용하는 광산발생제를 포함하고, 염기성수용액에 가용인 것을 특징으로 하는, 염기성수용액으로 현상가능한 네거티브형 레지스트조성물, 및 이것을 채용한 레지스트패턴 형성방법에 관한 것이다. 상기 현상액으로 염기성수용액을 사용할 수 있고, 실용가능한 감도를 갖고, 팽윤이 없는 복잡한 패턴을 형성할 수 있다.
Patent KR-19990087928-A (KR)
Title: 작업종료통지를제공하기위한방법및장치
IPC: G06F9/46
Filed: 1999-04-15
Abstract: 본 발명은 실패한(failing) 프로세스와 대화하는 프로세스가 해당 프로세스의 실패를 확실히 통지 받도록하기 위한 방법과 장치에 관한 것이다.  각 프로세스는 자신과 관련 있는 고유한 프로세스 식별자(PID)를 갖는다.  각 프로세스는 선택 사양으로 하나 이상의 엔트리를 갖는 유연성 목록(affinity list)을 갖는데, 각 엔트리는 프로세스가 실패할 경우 통지를 받을 프로세스의 식별자를 포함한다.  운영체제(OS) 커널의 유연성 서비스 호출에 의해 프로세스는, 동작 형태(추가 또는 삭제), 타겟 프로세스의 식별자, 통지 받을 프로세스의 식별자, 통지 받을 프로세스를 위해 생성될 이벤트 형태를 지정하는 타겟 프로세스(자신 또는 다른 프로세스 중 어느 하나)의 유연성 목록을 갱신한다.  프로세스가 실패할 경우, OS 커널의 프로세스 종료 서비스는 실패 프로세스의 유연성 목록을 검사하고, 그 목록에 있는 각 엔트리에 통지하기 위해서 통지 받을 것으로 지정된 프로세스에 대한 지정된 종류의 이벤트을 생성한다.
Patent KR-19990083278-A (KR)
IPC: G02F1/133
Filed: 1999-04-17
Abstract: (1) 차동증폭회로의 2개의 입력 트랜지스터를 선택적으로 사용하고, (2) 출력단측에 제공된 2개의 스위치를 통해 양 입력 트랜지스터에서의 출력신호를 절환함에 의해 재료 및 기술상의 불일치 등에 기인하는 우발적인 옵셋전압이 평균화된다.  결과적으로, 회로규모를 작게 하고, 회로의 소비전력을 감소시키며, 재료 및 기술상의 불일치 등에 의한 우발적인 옵셋전압의 영향을 받지 않는 신뢰성이 높은 차동증폭회로가 제공된다.  또한, 이러한 차동증폭회로를 사용함에 의해, 저소비전력과 신뢰성이 높은 연산증폭기회로 및 더욱 고품위의 표시가 가능한 액정구동회로가 실현될 수 있다.
Patent KR-20000066696-A (KR)
Inventor: AHN BYEONG JIN
IPC: H01L27/102
Filed: 1999-04-20
Abstract: PURPOSE: A bipolar transistor forming method is provided to reduce a base narrow effect owing to a lightly doped n-well and a collector resistance owing to a triple n-well, by forming a collector region with an n-well and a triple n-well. CONSTITUTION: A bipolar transistor forming method comprises implanting impurities in a semiconductor substrate(10) by using a first photoresist pattern as a mask, so as to form a triple n-well(11) in the semiconductor substrate(10). Impurities are implanted in the semiconductor substrate(10) by using a second photoresistor pattern as a mask, so as to form n-wells(13A,13B) in the substrate(10) and at both sides of the triple n-well(11). A p-well(12) is formed in the semiconductor substrate(10) between the n-wells(13A,13B).
Patent KR-20000073410-A (KR)
Inventor: KIM JONG KYU
IPC: B42D25/324
Filed: 1999-05-10
Abstract: PURPOSE: A plastic card substrate for preventing counterfeit is provided, which can be easily identified with the naked eye and prevent the counterfeit by the hidden letters and patterns and the function like a watermark on paper imparted to the plastic sheet as the substrate in the preparation of a film. CONSTITUTION: A plastic card substrate for preventing counterfeit is characterized by the inserted hidden letters and patterns which appear as a special shape at the special position by forming the shape on the opaque, white or colored substrate of a common card according to the uneven figure transferred to a transfer cooling roll by using carving, etching or discharging methods to identify the counterfeit of the identification card and the credit card with the naked eye easily. The card can be made of polyethylene, polypropylene or soft vinyl chloride resin films.
Patent KR-20000074088-A (KR)
Inventor: KIM MU YEONG
IPC: G10L15/02
Filed: 1999-05-18
Abstract: PURPOSE: A device and a method for coding/decoding a voice are provided to regenerate an improved sound quality. CONSTITUTION: A voice coding device is prepared with a voice characteristic extraction unit(1) and a coding unit(2). The coding unit(2) is composed of PCW(pitch cycle waveform) alignment unit(204), dimension conversion unit(206), PCW encoding unit(208), PCW decoding unit(210), delay unit(212) and bit packet unit(220). Herein, a PCW extraction unit(202) extracts a pitch cycle waveform by inputting a signal and a pitch(T). Then, the PCW alignment unit aligns the pitch cycle waveform extracted by the PCW extraction unit with a past pitch cycle waveform.
Patent KR-20000074763-A (KR)
Inventor: YOO BYEONG GWON
IPC: H05K7/20
Filed: 1999-05-25
Abstract: PURPOSE: A method for controlling the temperature of a rack for a telecommunication appliance by using a phase change material is provided to protect the electronic appliance installed on the rack by allowing the rack to maintain a constant temperature without a separate temperature controller. CONSTITUTION: A method for controlling the temperature of a rack for a telecommunication appliance comprises a step of forming a space portion(4) in a rack body(1). The rack body(1) includes a plurality of supports(2) which are installed at edge portions of the rack body(1) and a plurality of plate members(3). Then, one side of the rack body(1) is closed. A phase change material(5) mixed with an additive is contained in the space portion(4) of the rack body(1). A lower end of the rack body(1) is fixed by a fixing plate.
Patent KR-20010001399-A (KR)
Inventor: LEE JAI SIK
IPC: B28D1/00
Filed: 1999-06-04
Abstract: PURPOSE: A stone material cutter is provided to smoothly cut a stone material by cutting with regular pressure. CONSTITUTION: A guide rod(12) is installed in the upper edge of a base(10), and an upper plate(11) is installed in the upper end of each guide rod. A fixing stand(13) is installed in the base, and plural lower cutting blades(71) are arranged on the fixing stand in a line. Along the edge of the fixing stand, several return cylinders(30) are arranged. A return spring and a return rod(31) are inserted into the return cylinder and a return rod(31). A stage(20) is placed on the upper end of the return rod to expose the lower cutting blades at an opening(21). A hydraulic cylinder(40) is mounted on the center of the upper plate, and an oil pump is connected to the hydraulic cylinder through an oil line. A lifting block(50) is installed in the rod of the hydraulic cylinder, and the guide rod supports the lifting block. An arrangement cylinder(51) is formed inside the lifting block, and a piston is movably inserted into the arrangement cylinder. With more than regular pressure, oil is automatically drained to keep the pressure regular in the each piston with a relief valve(62). An upper cutting blade is lifted in a guiding groove and connected to the lower end of the piston.
Patent KR-20010001843-A (KR)
Inventor: OH JAE GEUN
IPC: B60Q1/04
Filed: 1999-06-09
Abstract: PURPOSE: An automatic headlight turning on/off system is provided to light on a headlight with vehicle start after automatic lighting off during flag stop. CONSTITUTION: During vehicle flag stop, a navigation CPU(central processing unit(40) applies a headlight off signal to a headlight control unit(50) and the headlight control unit outputs an automatic off signal to automatically turn off a headlight. If a vehicle moves again, the navigation CPU applies a headlight on signal to the headlight control unit with the decision of vehicle speed as zero. With the headlight on signal, the headlight control unit outputs a headlight automatic on signal to automatically turn on the headlight.
Patent KR-20010002741-A (KR)
Inventor: PARK CHAN JONG
IPC: G11C5/14
Filed: 1999-06-17
Abstract: PURPOSE: A semiconductor memory device having an input/output line architecture to reduce an electric power consumption is provided to activate an I/O line only for a data of a bit line sensing and amplifying apparatus to reduce current consumption and simultaneously chip size. CONSTITUTION: A semiconductor memory device having an input/output line architecture to reduce an electric power consumption includes a memory array(110) and a first selector(108). The memory array transmits a p(p>m) bit data generating in one block among n memory blocks to a local data input/output bus in response to a first column selecting signal and a memory block selecting signal. The first selector is connected to the outside of the memory array, selects m bit data in response to a second column selecting signal from the p bit data being transmitted from a local data input/output bus, and transmits to a global input/output line of the m bit.
Patent KR-20010000011-A (KR)
Inventor: KIM SI HONG
IPC: B29C45/26
Filed: 1999-07-08
Abstract: PURPOSE: A metal mold for injection is provided to improve the adherence of upper and lower cores by reducing the area where the upper and lower cores are in contact with each other. CONSTITUTION: For molding, a metal mold body moves on a first partitioning face(PL1) and a resin(2) hardened in a runner(12) and a gate(13) are restrained in the lower of a fixing pin. Thus, a mold(1) hardened in a cavity(11) is separated by centering on the gate. An upper support plate(60) moves downwardly along a second partitioning face(PL2) to be spaced apart from an upper fixing plate. The resin in the runner and the gate restrained in the upper support is removed and taken out from the metal mold via a robot. The mold in the metal mold body is separated from an upper core(10) by moving a lower core(20) downwardly on a third partitioning face(PL3). The mold is separated from the cavity and is sustained to be attached on the cavity molding. Finally, the mold is removed from the cavity molding by an eject pin.
Patent KR-20000011977-A (KR)
Inventor: SAITOYOKO
IPC: A01N25/18
Filed: 1999-07-26
Abstract: PURPOSE: A liquid pesticide for heat transpiration capable of transpiring stably maintaining an insecticidal effect for a long term is provided, which comprises a compound having at least two carboxyl group and a solubility of at least 1 wt.% in water at 25°C and a disinfestating component. CONSTITUTION: The liquid pesticide for heat transpiration contains a compound having at least two carboxyl group and a solubility of at least 1 wt% in water at 25°C such as a citric acid and a tartaric acid in the content of 0.001-10 wt.%, a disinfestating component like a pyretroid compound in the content of 0.1-15 wt.%. An aqueous auxiliary solvent such as water, alcohol, and glycol in the content of 75-99.8999% is added. By depositing some of a porous liquid absorption core and heat transpirating the rest at 80-180°C, an insecticidal effect comes out.
Patent KR-20010011155-A (KR)
Inventor: EO YONG SEON
IPC: C01B39/02
Filed: 1999-07-26
Abstract: PURPOSE: A preparation method of aluminogermanate molecular sieve with a gismondine structure in K2O-Al2O3-GeO2-H2O system is provided to control the molar ratio of structure components freely by substituting Ge and K for Si and Na of zeolite, respectively. The aluminogermanate molecular sieve is applicable to catalysts, adsorbents and ion exchangers. CONSTITUTION: The aluminogermanate molecular sieve is prepared by the following steps: mixing H2O, KOH, and a source of Al such as aluminum hydroxide, sodium aluminate, or aluminum isopropoxide; adding a source of Ge such as GeO2 and stirring for 4-24hrs., resulting in a gel represented as xK2O : 1.0Al2O3 : yGeO2 : zH2O (x=2.0-8.0, y=2.0-10.0, z=50-200); heating at 80-150deg.C for 1-10days; washing with H2O and drying.
Patent KR-20010016966-A (KR)
Inventor: PARK MAN SU
IPC: B60R22/00
Filed: 1999-08-06
Abstract: PURPOSE: A method for examining the breakdown of a seat belt locker is provided to eliminate a wrong decision by confirming a normal action state after turning off a line through a switch transistor and confirming a leakage current. CONSTITUTION: A device for examining the breakdown of a seat belt locker recognizes a locking state of the seat belt and a fixing state of an examination circuit. The locking state and the fixing state are decided by calculating a synthetic resistance value of a detector. A switch transistor is added up on a ground line. To decide an abnormal state, the switch transistor is turned off(S10). A normal circuit is cut off and a power short circuit breakdown is decided(S16) by reading a constant voltage value(VA)(S12). When the breakdown is not the power short circuit breakdown, an earthing short circuit breakdown is decided(S20). In case that the breakdown is not the earthing short circuit breakdown, the switch transistor is turned on(S22). A seat belt release normal state is decided by reading the constant voltage value(S28). Otherwise, a seat belt locking normal state is decided(S32). When the locking state of the seat belt is not in a normal state, the breakdown of a device is decided(S34). Thus, a wrong decision is eliminated by confirming a normal action state after firstly confirming a leakage current.
Patent KR-20000017169-A (KR)
Inventor: ISHIKAWA SHIGEKATSU
IPC: H01R13/05
Filed: 1999-08-07
Abstract: PURPOSE: An extending type whip antenna assembly is provided to improve a frictional control between the flexible contact member and the whip antenna which extends to the extending position. CONSTITUTION: An antenna assembly(37) comprises: a helical antenna(39) protruded outward from an outer housing of a mobile radio equipment; a whip antenna(37) coupled to one end of the helical antenna; and a dummy antenna(43) coupled to the other end of the helical antenna. The whip antenna are movable between the retraction position in the housing and the extending position out the housing by use of a stopper(45) having a slit(49) formed along the axis direction. A holder(47) is coupled to the one end of the helical antenna and is coupled to the stopper of the whip antenna where the whip antenna extends to a maximum position. During the extending of the whip antenna, the stopper contacts with the inner surface of the holder with an elastic force due to the existence of the slit. Thus, the antenna equipment can be miniaturized through the decrease in a number of elements.
Patent KR-20010018129-A (KR)
Inventor: AHN HYEOK SEONG
IPC: B04C3/04
Filed: 1999-08-17
Abstract: PURPOSE: A cyclone collector is provided, which is characterized in that venting air current is formed by separated air in the body of cyclone because the diameter of a venting duct(4) is bigger than a body of cyclone, therefore micro-dust is not vented through the venting duct(4). CONSTITUTION: The cyclone collector consists of a cyclone body(1) being a type of cylinder for separating air and dust, an air suction duct(2) for sucking air and dust thereinto, a venting duct(4) for venting micro-dust, an air venting duct(3) for venting air, a collecting tank for collecting micro-dust.
Patent KR-19990078944-A (KR)
Title: 훈제가 가능한 냄비
Filed: 1999-08-23
Abstract: 냄비의 바닥과 본체벽을 내외바닥(1)(1')과 내외벽(2)(2')으로 형성하고 외바닥 중심에는 다수개의 열기진입공(3)을 형성하고, 상기 내벽(2) 상부에는 다수개의 배출공(4)을 형성하여 열기가 열기진입공(3)을 거쳐 바닥과 본체벽의 중공부(5)(5')을 지나 배출공(4)으로 배출되도록 구성되어 있어서 냄비내에 열이 골고루 퍼져서 가열되므로 음식물을 찌거나, 덮히거나, 훈재로하거나, 삶거나, 굽거나 어느 방법으로도 조리를 할 수 있고 국물이 넘지않고, 눋지않으며, 타지도않게 음식물을 조리할 수 가 있는 것이다.
Patent KR-20000017575-A (KR)
Inventor: PATELSABA
IPC: H04L9/08
Filed: 1999-08-27
Abstract: PURPOSE: A method for establishing session key in a wireless system is provided to improve security of a mobile center through executing a mutual authentication between a network and a mobile center CONSTITUTION: The method for establishing session key comprises the steps of: receiving a first code of a global challenge from a network; generating a second and a third code; transmitting the second and the third code to the network; receiving a fifth code from the network; authenticating the network basing on the fifth code; and establishing the session key basing on the first and the second code if the network is authenticated. Preferably the fifth code for authentication is induced from the message transmitted with the codes for forming a part of intended session.
Patent KR-20010027514-A (KR)
Inventor: CHO HYEON SEONG
IPC: H02J7/04
Filed: 1999-09-14
Abstract: PURPOSE: An apparatus and a method for charging minute current of a battery are provided which detects a voltage across the battery and battery current and repeats a procedure of charging minute current until full charging is accomplished whenever time set by a self-timer lapses, to enable stable charging. CONSTITUTION: An apparatus for charging minute current of a battery(12) provides an external charging voltage to both end of the battery through a switch(11). A voltage detector(13) having divided resistors(R1,R2) is connected across the battery in parallel. A current detector(14) having a resistor(R3) is serially connected to one side of the battery. A state analyzing and charging controller(15) to which status information is transmitted through the voltage detector and the current detector controls the charged state of the battery while turning on/off the switch. A timer(17) detects if a predetermined time has lapsed from the point of time at which charging has been finished by the controller. A minute current charging controller(16) receives the counted result from the timer and sends a signal indicating if the minute current is charged or not to the controller.
Patent KR-20010027937-A (KR)
Inventor: KIM HAE GWANG
IPC: G06F17/30
Filed: 1999-09-16
Abstract: PURPOSE: An apparatus and a method for searching texture are provided to search a texture at high speed by estimating a scale in Radon plane and extracting a texture image character in Radon plane through a matching pursuing and searching a texture using the texture image character. CONSTITUTION: A texture input unit(110) receives a texture image. A power spectrum estimating unit(120) estimates a power spectrum from an inputted texture image. A scale estimating unit(130) estimates a scale in the power spectrum obtained from the power spectrum estimating unit(120). A Radon converting unit(140) converts the inputted texture image. A matching pursuing unit(150) performs a matching pursuing and extracting a character value of an image in accordance with the estimated scale in Radon plane obtained from the Radon converting unit(140). A texture searching unit(160) compares the character value of an image obtained from the matching pursuing unit(150) with a character value of an image in a pre-database, and searches a texture.
Patent KR-20010028718-A (KR)
Inventor: YEO NAM SU
IPC: H04Q1/20
Filed: 1999-09-22
Abstract: PURPOSE: A method for automatically testing a switch network of a switching system and for recovering failures is provided to identify testing periods between an SSDC(Switch Network Device Controller) and an SNDC(Switch Network Device Controller) in a processor initializing of the T-S-T(Time-Space-Time)-structured switching system. CONSTITUTION: An SNDC(Switch Network Device Controller)(200) of an SNP(Switch Network Processor)(100) registers a period for test progressing and a signal for IPC(Inter Processor Communication) in an initializing process, and transmits a signal for informing an SSDC(Switch Network Device Controller)(500) of an SSP(Switching Subsystem Processor)(400) of a test starting. The SNDC(200) detects an acknowledgement relating to a next test starting. If an acknowledgement signal is detected, the SNDC(200) inputs a specific data pattern by the set period, and progresses a test, then simultaneously requests an activating to the SSDC(500). The SNDC(200) reads a result of the specific data pattern which rotates a transmission path according to the progressed test, and decides whether a failure is detected in the transmission path. If so, the SNDC(200) transmits a failure recovery request to the SNP(100), and informs an operator of failure recovery details and next failure details.
Patent KR-20010045056-A (KR)
Inventor: EUN YEONG CHAN
IPC: H01M10/48
Filed: 1999-11-02
Abstract: PURPOSE: Provided is a stable lithium secondary cell for radiating inner heat easily, which has an anode terminal formed by bring an anode plate into contact with a case of the cell directly. CONSTITUTION: The lithium secondary cell comprises: the case(13); a core assembly(11) comprising the anode plate(11a)/a separator(11b)/a cathode plate(11c)/the separator(11b) which are laminated and wound; an electrolyte injected to the core assembly(11); the anode terminal transmitted electrically with the anode plate; a cathode terminal transmitted electrically with the cathode plate. The anode terminal is formed by bring an anode collecting body of the anode plate(11a) into contact with the cell case(13) directly and the cathode terminal is formed by insulating the anode terminal and connecting a cap(23a) with the cathode plate(11c).
Patent KR-20010047855-A (KR)
Inventor: KANG UK
IPC: H01S5/06
Filed: 1999-11-23
Abstract: PURPOSE: A device for controlling a power source and a pulse type of laser power supply using the same are provided to achieve high repetition and high output property using a charging device for a common frequency having a low price and a switching device having low price. CONSTITUTION: In a device for controlling a power source and a pulse type of laser power supply using the same, a charging and discharging device(130) is consisted of a plurality of charging devices. An interrupting device(140) interrupts the charging and discharging paths of the respective charging device. A control device(150) controls the interrupting operation of the interrupting device as to charge and discharge the plurality of charging devices subsequentially.
Patent KR-20000047790-A (KR)
Inventor: USIDATEHITO
IPC: H01L21/768
Filed: 1999-11-30
Abstract: PURPOSE: A method and apparatus for judging an etching terminal point are provided which can detect the etching terminal point of a semiconductor wafer stably, only with a semiconductor wafer with a low aspect ratio. CONSTITUTION: A method for judging an etching terminal point in a dry etching includes the steps of: reducing noise of an input signal waveform by a first digital filter(18); calculating differential coefficients(first or second order) of the signal waveform by differential calculus by an operational circuit(19); calculating a smoothing differential coefficient value by reducing the noise component of the time-series differential coefficient waveform by a second digital filter(20); and judging the etching terminal point by comparing the smoothing differential coefficient with the established value by a discrimination part(22).