baber/WOPTO huggingface dataset:
Patent KR-20120056927-A (KR)
Title: Modulr socket capable of protecting module and socket pin
Inventor: JUN JIN GUK
IPC: H01R12/51
Filed: 2010-09-16
Abstract: PURPOSE: A module socket capable of protecting a module and a socket pin is provided to open a pin in advance in loading the module and contact the pin after the module is loaded. CONSTITUTION: A pin is installed in a socket(20). A first connection unit(21a) of the socket is electrically connected to a circuit board. A second connection unit(21b) of the socket includes a module contact portion and a protrusion portion. The second connection unit is electrically connected with a module. An upper cover member(10) is downwardly combined with the socket. An accommodating groove(11) of the upper cover member opens the protrusion portion while accommodating the protrusion portion. A slope portion(11a) is formed on the accommodating groove.
Patent KR-20120029916-A (KR)
Inventor: HONG SUNG MIN
IPC: H01R13/11
Filed: 2010-09-17
Abstract: PURPOSE: A connector for charging in an electric vehicle is provided to increase the number of effective contact points which are contacted to a charging terminal of the electric vehicle. CONSTITUTION: A main body(110) is formed as a cylindrical shape. The main body covers the outer circumference of a charging terminal. One end of the main body is inserted into the charging terminal. A contact point unit(120) is installed on the internal circumference of the main body. The contact point unit is touched with the outer circumference of the charging terminal.
Patent KR-20120032086-A (KR)
Inventor: LEE KYOU HO
IPC: H01L21/68
Filed: 2010-09-28
Abstract: 본 발명은 자동화 공정장비에서 자재를 정렬하는 장치를 개시한다. 본 발명의 자재정렬장치는, 자재가 놓여지는 자재안착부; 상기 자재안착부와 대향하는 면에 자재가 각각 삽입되는 다수의 정렬홈을 구비하는 정렬부재; 상기 정렬부재를 상기 자재안착부에 안착된 자재에 대해 평행한 제1방향으로 이동시키는 제1구동수단; 상기 정렬부재 또는 상기 자재안착부를 상기 제1방향과 직교하는 제2방향으로 이동시키는 제2구동수단을 포함하며, 상기 정렬홈에 자재의 적어도 일부가 삽입된 상태에서 상기 정렬부재를 이동시켜 자재를 정렬한다. 
본 발명에 따른 자재정렬장치는 기구적 구성이 매우 단순하므로 제작비용이 절감되는 이점이 있다. 또한 자재의 크기가 매우 작은 경우에도 별다른 어려움 없이 정렬부재의 정렬홈을 그에 맞게 가공할 수 있으므로 다양한 크기의 자재에 대한 범용성이 매우 뛰어난 장점이 있다.
Patent KR-20120032297-A (KR)
Title: Bottom frame of net fixation for cultivation of underwater organism
Inventor: SIM KI HYUNG
IPC: A01K61/00
Filed: 2010-09-28
Abstract: PURPOSE: A bottom frame for fixing a net for cultivation of underwater living creatures is provided to match the outline of the bottom frame with the rope orbit of a net. CONSTITUTION: A bottom frame for fixing a net for cultivation of underwater living creatures comprises an elbow tube(110), a T-joint pipe(130), and a connecting pipe(150). The elbow tube is formed of a first combining hole and a second combining hole in order to form a bottom edge region by being combined with the lower part of the net. The T-joint pipe is formed of a third combining hole, a fourth combining hole, and a fifth combining hole. The connecting pipe is connected between the elbow tube and T-joint pipe.
Patent KR-20120035629-A (KR)
Title: Crystallization reaction apparatus capable of micro scale mixing process and crystalline separation processing system
Inventor: BANG SANG GU
IPC: B01J19/18
Filed: 2010-10-06
Abstract: PURPOSE: A micro mixable crystallization reactor and a system for separating crystals including the same are provided to prevent the pulverization of crystals in a reacting space due to the hypertrophic growth of crystals. CONSTITUTION: A micro mixable crystallization reactor includes a reacting bath(11) and an internal cylinder(12). An inlet(13) and an outlet(14) for raw reacting materials are installed at the reacting bath. The internal cylinder is arranged in the internal space of the reacting bath. The surface of the internal cylinder is concave and convex. The internal cylinder rotates in the reacting bath and generates micro Taylor vortex flow with respect to reacting liquid.
Patent KR-20120035670-A (KR)
Title: Tube vessel with a one-touch cap
Inventor: SON SU JIN
IPC: B65D41/34
Filed: 2010-10-06
Abstract: PURPOSE: A tube container including a one-touch cap is provided to rotate the one-touch cap for breaking a sealing member on a tube neck using a pressurizing rod for removing a process of opening and closing a cap. CONSTITUTION: A tube container including a one-touch cap includes a tube body(100), a tube neck, the one-touch cap(300), and a cap fastening band(400). The tube neck includes a first screw thread formed on the outer peripheral surface of the tube neck, a discharging hole for discharging contents from the tube body, and a sealing member for preventing the excessive discharge of the contents from the tube body. The one-touch cap surrounds the tube neck, and includes a cap body(310) and a cover unit(320). The cap body includes an outlet hole, a second screw thread, and a pressurizing rod for pressurizing the sealing member for breaking.
Patent KR-20120038150-A (KR)
Inventor: LEE JUNG HYUN
IPC: G06F17/30
Filed: 2010-10-13
Abstract: 본 발명은 3단계로 가족호칭을 찾을 수 있도록 구성되었다. 1단계는 시댁가족호칭, 처가댁가족호칭 으로 구분하여 여자의 경우는 시댁 남자의 경우는 처가를 선택하면된다. 선택하고 들어가면 2단계의 선택 사항이 있는 하나는 친가/외가를 선택하는 것이고 둘째는 배우자와의 관계를 선택하면 거기에 맞는 가족호칭 방법이 나타난다.
Patent KR-20120039862-A (KR)
Title: Manufacturing method for oxide dispersion strengthened alloys
Inventor: KIM TAE KYU
IPC: C22C1/05
Filed: 2010-10-18
Abstract: PURPOSE: A method for manufacturing oxidant dispersion reinforcing alloy is provided to adjust the content and the size of oxide precipitates in oxide dispersion reinforcing alloy by determining the oxygen concentration of mechanical-alloyed alloy powder according to various reduction conditions. CONSTITUTION: A method for manufacturing oxidant dispersion reinforcing alloy includes the following: alloy composition powder is mechanical-alloyed(MA) to be pre-treated into MA alloy powder(10); the MA alloy powder is introduced into a container(20); the oxygen concentration of the MA alloy powder is adjusted(30); and the MA alloy powder of the adjusted oxygen concentration is post-treated(40). In the oxygen concentration adjusting process, at least part of oxygen contained in the MA alloy powder is reduced by introducing at least one of hydrogen gas, hydrogen mixed gas, or reducing gas.
Patent KR-20120043984-A (KR)
Title: Stabilized zirconia with black color and manufacturing method of the same
Inventor: PARK JOO SEOK
IPC: C01G25/02
Filed: 2010-10-27
Abstract: PURPOSE: A black stabilized zirconia and a manufacturing method thereof are provided to improve mechanical property and lower brightness. CONSTITUTION: A manufacturing method of a black stabilized zirconia comprises next steps: preparing of oxide stabilized zirconia powder containing 1-12 mole% of oxide; molding the oxide stabilized zirconia powder into desired shape; sintering the molded product at target sintering temperature which is lower than melting temperature of the zirconia (ZrO2); placing the sintered body and carbon based powder into a crucible and charging the crucible into a furnace; exhausting impure gas which is existed within the furnace; increasing the temperature of the furnace to target temperature by heat-treating and heat-treating to cover with black color; and obtaining the black stabilized zirconia by cooling the furnace.
Patent KR-20120045892-A (KR)
Title: Semiconductor package module
Inventor: YOO JIN O
IPC: H01L23/60
Filed: 2010-11-01
Abstract: PURPOSE: A semiconductor package module is provided to improve electromagnetic wave shielding performance using a shield part formed on the outer surface of a mold part. CONSTITUTION: A groove type storage part(17) is arranged on the lower surface of a semiconductor package(10). A large device and the semiconductor package are mounted on one side of a main substrate. The large device is mounted on the main substrate by being stored inside of a storage part of the semiconductor package. The semiconductor package comprises a substrate, an electronic component, and a shield(30). The shield combined with the substrate stores the electronic component.
Patent KR-20120049611-A (KR)
Title: Cable anchoring system in bridge
Inventor: CHOI YOUNG GU
IPC: E01D19/16
Filed: 2010-11-09
Abstract: PURPOSE: A device for supporting a cable for a bridge is provided to avoid an generation of unnecessary stress for a cable when construction errors are occurred while constructing a bridge. CONSTITUTION: A device for supporting a cable for a bridge comprises a rotating member(10), a grip member(20), a support member(30), a second through-hole(40), a reinforcement member(41), and an nut(50). The rotating member comprises a globular outer circumference(11) and a through-hole. The grip member comprises one end part penetrated through the through-hole and fixed to the rotating member and the other end part fixed to the cable(1). The support member fixed to a lug joint(2) comprises a concave part(31), a through-hole(32), and a projection(34).
Patent KR-20120050811-A (KR)
Title: Method for manufacturing hot-rolled steel having excellent anti-aging and the hot-rolled steel by the same method
Inventor: KIM JAE IK
IPC: C21D8/02
Filed: 2010-11-11
Abstract: PURPOSE: A hot-rolled steel sheet and a method for manufacturing the same are provided to improve the aging resistance, formability, and platability of a hot-rolled steel sheet by optimizing steel components, hot rolling processes, and shot blasting conditions. CONSTITUTION: A method for manufacturing a hot-rolled steel sheet comprises a step of shot-blasting shot balls of 0.10-0.40mm at injection speed of 40-60m/sec to the surface of a hot-rolled steel sheet made from steel which comprises C(Carbon) of 0.001-0.006wt.%, Mn(Manganese) of 0.05-0.5wt.%, P(Phosphorus) of 0.003wt.% or less(except 0%), S(Sulfur) of 0.020wt.% or less(except 0%), Al(Aluminum) of 0.03-0.10wt.%, N(Nitrogen) of 0.001-0.004wt.%, and Fe(Iron) and inevitable impurities of the remaining amount.
Patent KR-20120053663-A (KR)
Title: Dough, broth containing paper mulberry and noodle using the dough and broth
Inventor: CHOI MAN DEUK
IPC: A23L33/00
Filed: 2010-11-18
Abstract: PURPOSE: Dough and stock containing cudrania tricuspidata, and a producing method of knife-cut noodles using thereof are provided to offer the prevention and treatment effect on adult diseases to users. CONSTITUTION: A producing method of knife-cut noodles comprises the following steps: mixing 10kg of flour, 20-50g of cudrania tricuspidata leaf powder, 150-200g of eggs, and 20-40g of salt to obtain a dough mixture; adding kneading water obtained by extracting roots or stems of cudrania tricuspidata to the dough mixture for kneading; molding noodles from the obtained dough into the thickness of 0.5-1.5mm and the width of 3-6mm; and aging the noodles for 6-10 hours, and boiling the aged noodle strips with stock. The dough mixture additionally contains 20-40g of salicornia herbacea powder, and 10-30g of dandelion root powder. The stock is obtained by adding seasonings to a cudrania tricuspidata extract, boiling the mixture for 4-5 hours, and infusing the mixture for 2-3 hours at 70-80 deg C.
Patent KR-20120075527-A (KR)
Title: Apparatus and method for game services based on agents
Inventor: KIM SUNG SOO
IPC: G06Q50/10
Filed: 2010-11-22
Abstract: PURPOSE: An agent based game service apparatus and method thereof are provided to enable an agent to execute a game instead of a user by creating the agent of an NPC(Non Player Character) type based on data inputted by a terminal apparatus of the user. CONSTITUTION: An input data management unit(101) collects data inputted from a terminal apparatus of a user. A data mining unit(102) creates mining data by analyzing a pattern of the inputted data. A game agent processing unit(103) creates a game agent for playing game instead of the user by using the mining data. An agent based game service apparatus updates the state information of the game agent according to the progress of the game.
Patent KR-20120075537-A (KR)
Title: System and method for diagnosis of business competitiveness of company
Inventor: KIM EUN SUN
IPC: G06Q10/06
Filed: 2010-11-23
Abstract: PURPOSE: A competitiveness diagnosis system and method thereof are provided to recommend suitable business support task according to diagnosis results. CONSTITUTION: A database(200) stores plural diagnosis item data and support business data. A diagnostic data collecting module(110) creates a web page constituted by diagnosis item data. The diagnosis data collecting module collects diagnosis data inputted to a web page. A competitiveness diagnosis module(120) extracts diagnosis results by diagnosing business competitiveness according to diagnosis items by using the diagnosis data.
Patent KR-20120055878-A (KR)
Title: transmission control box of bus
Inventor: KIM KOOK JIN
IPC: B60K20/02
Filed: 2010-11-24
Abstract: PURPOSE: A transmission control box for a bus is provided to transfer a select cable and a shift cable, which is respectively connected to a select lever and a shift lever, to a transmission without any errors by connecting the select lever and the shift lever by using a ball joint. CONSTITUTION: A main body(200) is included at the lower side of a trans lever(100). The operating force of a selection and shifting of the trans lever is delivered to a select cable(300) and a shift cable(400). A select lever is combined to the main body which can be rotated upward and downward. One side of the select lever is connected to a trans bracket(500) by using a ball joint and the other side of the select lever is connected to the select cable. The trans bracket is attached to the lower side of the trans lever. A shift lever is connected to the main body and can be rotated upward and downward. One side of the shift lever is connected to the trans bracket by using the ball joint and the other side of the shift lever is connected to the shift cable.
Patent KR-20110058720-A (KR)
Title: Adaptive filter apparatus and method for motion estimation/compensation, and recording medium therefor
Inventor: KIM SU NYEON
IPC: H04N19/117
Filed: 2010-11-25
Abstract: PURPOSE: An adaptive filter creation apparatus for compensating and estimating a motion is provided to improve the motion estimation performance by adding simple information. CONSTITUTION: An optimal filter generator(110) creates an optimum filter of a unit block. A representative filter generator(130) concentrates the created optimal filter based on the special location of optimal filter coefficients. The representative filter generator creates representative filter in each concentrated filter coefficient space. A unit for selecting the number of representative filters(150) selects the number of the representative filters based on the encoding error of a decoding image and the total bit number which is generated in a specific encoding unit.
Patent KR-20110115948-A (KR)
Inventor: KIM YOUNG SANG
IPC: E04G3/20
Filed: 2010-11-29
Abstract: 본 발명은 건물 외벽 타설용 갱폼 탈착 장치와 이를 이용한 시스템에 관한 것으로, 건물의 외벽(W)으로 연결 부착되는 마운팅 플레이트(2)의 측방으로 연결되는 아암(4)의 자유 단으로 힌지판(8)이 고정 축(6)에 의해 축 지지되어서 상기 아암(4)의 상방으로 선회 가능하도록 연결됨과 아울러, 상기 힌지판(8)의 자유 단에는 요동판(12)이 가동 축(10)을 개재하여 회동 가능하게 축 지지되어서 갱폼(G)을 들어올리는 것으로 해체되게 한 구조와, 상기 마운팅 플레이트(2)와 아암(4) 사이로 피벗 축(16)에 의해 축 연결되는 축수 브래킷(14)과 축 지지부(15)가 개재되어서 상기 아암(8)을 마운팅 플레이트(2)에 대하여 임의 각도 꺾인 자세로 배치할 수 있게 한 구조, 그리고 상기 아암(4)과 힌지판(8) 사이에서 래칫돌기(74)와 래칫기어(68)가 맞물려 나타나는 래칫작용으로 상기 힌지판(8)을 끌어 올려진 위치로 보전하는 래칫판(62)이 설치된 구조의 갱폼 탈착 장치, 그리고 건물의 외벽(W)에 설치되는 가이드박스(B)를 타고 상하 안내되는 가이드레일(R)에 부착된 갱폼 탈착 장치에 의해 상하 이동되는 갱폼(G)의 상변에 상측이 연결 고정되고 하측은 상기 갱폼 탈착 장치의 주변에서 일정거리를 두고 배치되는 안전 케이지(SC)와, 상기 가이드레일(R)에 고정 설치되어서 건물 외벽의 마감작업용 공간을 제공하는 케이지(C)를 갖춘 갱폼 탈착 시스템을 제공한다.
Patent KR-20120058228-A (KR)
Title: Carbon Composite for Capacitive Deionization Electrode and Its Manufacturing Method Thereof
Inventor: MOON SEUNG HYEON
IPC: C25B11/12
Filed: 2010-11-29
Abstract: PURPOSE: A carbon composite for a capacitive deionization electrode and a manufacturing method thereof are provided to maximize the contact surface between a carbon composite and ion in an aqueous solution by using porous activated charcoal having a wide surface area. CONSTITUTION: A method for manufacturing a carbon composite for a capacitive deionization electrode comprises the steps of: putting a binder into solvent to obtain a mixture, adding an electrode active material into the mixture to obtain slurry, and casting the electrode active material slurry on the section of a supporter or dipping the supporter in the electrode active material slurry and drying to obtain a carbon composite.
Patent KR-20120058314-A (KR)
Title: Method for preparing statin compound and intermediate compound used therefor
Inventor: SHIN YOUNG GYUN
IPC: C07F9/50
Filed: 2010-11-29
Abstract: PURPOSE: A method for preparing statin compounds and an intermediate compound are provided to ensure working stability and to easily remove reaction by-production. CONSTITUTION: A method for preparing statin compounds comprises: a step of reacting a starting material and sulfonyl compounds to prepare a first intermediate compound; a step of reacting the first intermediate compounds with phosphine compounds to prepare a second intermediate compound; and a step of reacting the second intermediate compounds with carbonyl compounds under the presence of base.
Patent KR-20120060308-A (KR)
Title: Independent suspended steering system
Inventor: PARK IN KEUN
IPC: B62D7/20
Filed: 2010-12-02
Abstract: PURPOSE: An independent suspension steering device is provided to reduce the error of steering geometry through forming the shapes and positions of relay arm and tie rod symmetrically. CONSTITUTION: An independent suspension steering device comprises a bevel gear(10), a ball and nut gear box(30), a relay arm(40), and a pair of tie rods(50). The bevel gear is connected to the steering wheel of a vehicle and changes the rotation angle of a wheel. The ball and nut gear box is connected to the bevel gear through an intermediate shaft(20) and converts the rotation movement of bevel gear into linear movement. The relay arm is coupled with the ball and nut gear box and moved from side to side. The pair of tie rods is coupled with the relay arm and steers vehicle wheels.
Patent KR-20120062085-A (KR)
Title: 운동보조기구
Inventor: PARK KYUNG BOK
IPC: A63B23/08
Filed: 2010-12-06
Abstract: 본 발명은 구조가 간단하면서도 가정에서 누구나 간편하게 활용할 수 있음은 물론 다이어트에 보다 효과적인 운동보조기구에 관한 것이다.  
본 발명에 따르면, 상면에 사용자의 발뒤꿈치(3)가 접지되는 발뒤꿈치접지부(11)가 형성된 제1몸체(10)와, 이 제1몸체(10)에 결합되어 사용자의 발등(2)이 다리 중 정강이(1)와 일직선이 되도록 상기 발등(2)을 가압하는 제2몸체(20)를 포함하여 구성된 것을 특징으로 하는 운동보조기구가 제공된다.
Patent KR-20120062951-A (KR)
Title: System and method for monitering patient chest compression depth during cardiopulmonary resuscitation
Inventor: CHEE YOUNG JOON
IPC: A61B5/22
Filed: 2010-12-07
Abstract: PURPOSE: A patient chest compression depth monitoring system in cardiopulmonary resuscitation and a method thereof are provided to add a single acceleration sensor between a mattress and a back of a patient, thereby effectively measuring a chest compression depth using two acceleration sensors. CONSTITUTION: An upper sensor(110) is attached on the upper part of a chest of a patient. The upper sensor measures compression acceleration of the upper part of the chest of the patient. A lower sensor(120) is attached on the lower part of the chest of the patient. The lower sensor measures compression acceleration of the lower part of the chest of the patient. A calculation device(130) measures a compression depth of the chest of the patient during cardiopulmonary resuscitation.
Patent KR-20120069066-A (KR)
Title: 초음파 진단장치
Inventor: HYEON YONG CHEOL
IPC: A61B8/14
Filed: 2010-12-20
Abstract: 본 발명은 초음파 신호를 송수신하는 프로브와, 상기 프로브에 송신신호를 제공하고 상기 프로브로부터 제공되는 수신신호를 집속하여 수신 데이터를 형성하는 빔포머부를 포함하는 초음파 진단장치에 있어서, 상기 프로브의 변환소자 어레이는 복수의 변환소자를 구비하고, 상기 빔포머부는 복수의 신호 채널을 각각 구비한 제 1 빔포머와 제 2 빔포머를 포함하며, 상기 프로브의 변환소자 어레이 중 신호 송신용 변환소자는 상기 제 1 빔포머와 제 2 빔포머 중 어느 하나와만 핀 맵핑되고, 상기 프로브의 변환소자 어레이 중 신호 수신용 변환소자는 상기 제 1 빔포머와 제 2 빔포머 중 나머지 다른 하나와만 핀 맵핑되는 것을 특징으로 하는, 초음파 진단장치에 관한 것이다.
Patent KR-20120069444-A (KR)
Title: 육류를 이용한 묵의 제조방법
Inventor: PARK YONG GIL
IPC: A23L13/00
Filed: 2010-12-20
Abstract: 육류를 이용한 묵의 제조방법은, 육류를 분쇄하는 단계, 분쇄된 육류 100 중량부 기준으로 쌀가루 50 내지 200 중량부, 물 10 내지 80 중량부를 반죽하여 반죽물을 제조하는 단계, 반죽물을 찌는 단계, 쪄진 반죽물을 상온에서 10분 내지 15분간 숙성시키는 단계, 숙성된 반죽물을 이용하여 일체의 1차 성형물을 성형하는 단계, 1차 성형물을 10℃ 내지 20℃의 물로 수냉시키는 단계, 및 수냉된 1차 성형물을 이용하여 최종 형태의 2차 성형물을 성형하는 단계를 포함할 수 있다.
Patent KR-20110079519-A (KR)
Title: Techniques for aligning frame data
Inventor: VASQUEZ MAXIMINO
IPC: G09G3/36
Filed: 2010-12-23
Abstract: PURPOSE: A frame data arranging method and system and a display device thereof are provided to realize a uniform light emitting state. CONSTITUTION: At least one frame is received from a first frame source. The interval includes the first vertical blanking interval between two frames of the first frame source. At least one frame is read from a second frame source. The interval includes the second vertical blanking interval between two frames of the second frame source. A frame is provided from the first frame source.
Patent KR-20120074667-A (KR)
Title: Device for printing micro pattern and print method using it
Inventor: YOO HAN SOL
IPC: B41F31/08
Filed: 2010-12-28
Abstract: PURPOSE: A fusion precise printing device and a printing method using the same are provided to prevent a blockage of a nozzle of a printer and to multiply the precision and a printing speed of a screen print. CONSTITUTION: A fusion precise printing device comprises an ink spraying device(100), a printer(200), a convey device(170), and a firing device(180). An ink inlet(110) is installed in the inside of the ink spraying device. The printer is joined in the ink spraying device into a body and comprises a ink spraying nozzle(130) spraying ink, an ink recovery member(!20), and a head unit(150). The ink recovery member recoveries the ink remained on a screen print plate(140) after being sprayed through the ink spraying nozzle. The convey device transfers an object(160) to be printed to the printer. The firing device dries and fires the object to be printed being printed by the printer. Magnetic materials are formed into a body in both sides of a head unit.
Patent KR-20120074735-A (KR)
Title: Rf connector connection device
Inventor: RO HAENG SOOK
IPC: H01R13/621
Filed: 2010-12-28
Abstract: PURPOSE: A wireless frequency connector coupling device is provided to easily couple a jack with a plug type connector without a separate tool. CONSTITUTION: A second connector unit(140) includes a second RF(Radio Frequency) connector and a second connector housing. The second RF connector is fixed to the second connector housing. A portion or all of the first and second connector housings are inserted to each rotative coupling unit(150). Either one of the first RF connector or the second RF connector is inserted into a groove formed on the center of the rotative coupling unit. The rotative coupling unit can rotate to couple the first and second RF connectors.
Patent KR-20120076862-A (KR)
Title: Wafer cutting system using laser beam
Inventor: PARK IL HONG
IPC: B23K26/14
Filed: 2010-12-30
Abstract: PURPOSE: A wafer cutting system using a laser beam is provided to prevent physical damage to a wafer by arranging a buffer member between the wafer and a stage. CONSTITUTION: A wafer cutting system using a laser beam comprises a stage(100), a laser beam generating unit(200), a moving unit, and a frozen nitrogen gas injection unit(300). A wafer(1) is loaded on the stage. The laser beam generating unit is located above the stage and projects a laser beam to the wafer. The moving unit moves the stage or the laser beam generating unit. The frozen nitrogen gas injection unit is formed in the shape of a nozzle(301) and injects frozen nitrogen gas to the position of the wafer irradiated with the laser beam.