baber/WOPTO huggingface dataset:
Patent KR-20020043383-A (KR)
Inventor: KIM HONG IL
IPC: H01L21/336
Filed: 2000-12-04
Abstract: PURPOSE: A method for forming a gate pattern of a semiconductor device is provided to form a gate pattern with a prominent sidewall profile by using a dry etch apparatus. CONSTITUTION: A gate oxide layer is formed on a semiconductor substrate(100). A poly-silicon layer is formed on the gate oxide layer. An anti-reflective layer such as a silicon oxy-nitride layer is formed on the poly-silicon layer. A photo-resist layer is formed on the anti-reflective layer. A photo-resist pattern is formed by patterning the photo-resist layer. The anti-reflective layer, the poly-silicon layer, and the gate oxide layer are etched by using the photo-resist pattern as an etch mask. The photo-resist pattern is removed by performing an oxygen plasma ashing process. A gate pattern(110) including a gate oxide layer pattern(102a), a gate electrode(103a), and an anti-reflective layer pattern(104a) is formed by performing a wet cleaning process.
Patent KR-20020045790-A (KR)
Title: Hinge Assembly for Engine Hood panel of Car
Inventor: PARK WON PO
IPC: B62D25/12
Filed: 2000-12-11
Abstract: PURPOSE: An engine hood panel hinge assembly of a vehicle is provided to absorb impact force and to reduce injury of a pedestrian to the minimum when a pedestrian is run into the engine hood panel of a vehicle. CONSTITUTION: In an engine hood panel hinge assembly of a vehicle installed between engine hood panel and vehicle body panel to opening and shutting of engine hood panel, a housing(32) of a tube type is installed on the top of a bracket(31) fixed to the body panel. A moving member(33) ascending and descending is inserted in the housing. A holder(41), hinged to a hood hinge(23) coupled to the engine hood panel, supporting the hood hinge, is installed on the top of the moving member. A supporting piece(37) for fixing the moving member is installed to the housing by a spring(42). A rotating lever(39) hinged is installed at an end of the supporting piece. An impact-transmitting rod(40) rotating the rotating lever is installed in the engine hood panel. The impact force operates the impact-transmitting rod and removes coupling power of the rotating lever while the supporting piece is separated from the housing by the restoring force of the spring. Therefore the hood hinge is come down with the hood panel and the collision force is absorbed.
Patent KR-20020046440-A (KR)
Title: An universal serial bus protocol generating device
Inventor: HONG CHANG YU
IPC: G06F13/42
Filed: 2000-12-14
Abstract: PURPOSE: A device for creating a universal serial bus protocol is provided to embody a high transmission speed at a low hardware constitution cost by dividing jobs into a job in hardware and a job in software when data are read or written from a multimedia card for decreasing the processing number of the universal serial bus. CONSTITUTION: A 9-byte buffer(21) outputs a start_command. A command transmission unit(22) is provided for transmitting a start_trans and a start_receive in accordance with a start_command being inputted from the 9-byte buffer(21). A clock control unit(23) is provided for controlling a clock. A 7-byte buffer(24) is provided for storing a status. A status receiving unit(25) is provided for receiving a status. A 32-byte buffer(26) is provided for storing data. If a start_trans is inputted from the command transmission unit(22), a data transmission unit(27) outputs data with a CRC start_crc. A CRC(cyclic redundancy checking) unit(28) checks a CRC being inputted a CRC start_crc from the data transmission unit(27) and outputs a start_busy. If a start_busy is inputted from the CRC unit(28), a busy check unit(29) performs a busy check. A 32-byte buffer(30) is provided for storing data. If a start_receive is inputted from the command transmission unit(22), a data receiving unit(31) receives data being inputted from the data transmission unit(27).
Patent KR-20020046492-A (KR)
Title: Manufacturing apparatus for aluminium composite pannel
Inventor: KIM GO SIN
IPC: B32B15/08
Filed: 2000-12-14
Abstract: PURPOSE: Provided is a production system of an aluminium complex panel which is possible to omit separate UV coating process so that it contributes to reduce production cost. CONSTITUTION: The production system of the aluminium complex panel comprises the parts of: a printing part(100) which prints patterns after heating and before cooling; and a UV coating part(200) which coats on the printed surface by ultraviolet hardening. The printing part includes an adhesive application part for adhering a transfer film(110) which coats on the surface of a preparatory complex panel, a drying part(120) to keep certain humidity and an adhesion part for the transfer film(130) to transfer patterns on the surface of the preparatory complex panel. The UV coating part includes a UV application part(210) to coat UV paint through a roll coater and a UV hardening part(220) to harden UV paint through the UV application part.
Patent KR-20020047997-A (KR)
Title: Locking system of shift lever
Inventor: KIM YEONG ROK
IPC: B60K20/06
Filed: 2000-12-15
Abstract: PURPOSE: A device for locking a shift lever is provided to prevent a vehicle from moving by locking a shift lever through pushing a push rod and to prevent an accident. CONSTITUTION: A locking device of a shift lever comprises a locking unit fixing a shift lever(2); a hinge connecting unit formed between the shift lever and a shift lever bracket(4); an actuator(10) moving a push rod(8) while receiving power; a control unit operating the actuator by deciding a parking state of a vehicle; a locking groove(20) mounted on a side portion of a hinge unit(6); a through hole(24) penetrating a side portion of the shift lever bracket; a vehicle speed sensor detecting speed of the vehicle; an ignition key switch supplying a controlling position of an ignition key; and an ECU(Electronic Control Unit) turning off the actuator while starting the vehicle. The ECU supplies power into the actuator while deciding a stopping state of the vehicle according to signal from the ignition key switch and the speed sensor.
Patent KR-20010035106-A (KR)
Title: The artificial fishing plants utilizing the boxes including stones
Inventor: CHUN MAN BOK
IPC: A01K61/00
Filed: 2000-12-26
Abstract: PURPOSE: An artificial fish reef using a metal net bag containing stone is provided to minimize the danger of breakage and burying during construction, and to prevent it from moving caused by an ocean current. CONSTITUTION: An artificial fish reef(10) is fabricated by using a metal net(11) having rectangular parallelepiped appearance. Stones of specific size is filled in the metal net bag to a desired height. A porous three-directional pipe(13) is installed on the top side of the stones. The stones serves to facilitate the sinking of the artificial fish reef when it is thrown toward the bottom of the sea, and serves to prevent it from moving caused by an ocean current. The porous three-directional pipe devises the smooth flow of the ocean current by preventing the ocean current from being congested. Therefore, the aggravation of the water quality is prevented. Also, the stones is constituted by using waste stones and the porous three-directional pipe is fabricated by using wastes, thereby the reuse of waste-materials is facilitated.
Patent KR-20020052310-A (KR)
Title: door hinge combined with door check for automobile
Inventor: YOON GI DEUK
IPC: E05D11/06
Filed: 2000-12-26
Abstract: PURPOSE: A door hinge using both as vehicle door check needs not mounting separate door check on door panel and is provided to reduce spares, cost and weight and to improve spatial degrees of design freedom. CONSTITUTION: The door hinge using both as vehicle door check comprises a hinge bracket(22a,22b) mounted on both a door panel and a vehicle body panel and fastened to rotate each other through the medium of a hinge axis(23) and a rotatory amount controller mounted on hinge bracket(22a,22b) to control a relative rotatory amount of a hinge bracket. The hinge has door check members(24) with many concave grooves, a door check bearing mounting bowl keeping door open on the hinge bracket of the door panel and a spring device(26) with elastic strength of stability after relative rotational motions of each other.
Patent KR-20020052394-A (KR)
Title: Method and apparatus for repairing tap hole in hot
Inventor: CHO BONG RAE
IPC: C21B7/06
Filed: 2000-12-26
Abstract: PURPOSE: An apparatus and a method for repairing a tap hole are provided to block minute gas passages of set bricks surrounding the tap hole, thereby preserve length of the tap hole by injecting heavy oil with superior fluidity onto cracked bricks during operation without stopping hot blast. CONSTITUTION: The apparatus for repairing a tap hole without stopping hot blast comprises eight first pipes on one side of which heavy oil injection nipples(30) are formed so that the heavy oil injection nipples(30) are positioned at a blast furnace tap hole(10), and the other side of which are respectively connected to a distribution valve(33) by passing through valves(31) to which manometers(32) are attached; a heavy oil storage tank(36) which is connected to the distribution valve(33) by a second pipe, to which a generator(37) is attached, and on which a level gauge is mounted; and a manometer automatic valve(35) which is connected to the generator(37) of the heavy oil storage tank(36), and to which a manometer counter(34) is attached.
Patent KR-20020055149-A (KR)
Title: Method for manufacturing semiconductor device
Inventor: KWON HO YEOP
IPC: H01L21/336
Filed: 2000-12-28
Abstract: PURPOSE: A method for fabricating a semiconductor device is provided to reduce the size of a transistor while a short channel margin and a refresh characteristic of a dynamic random access memory(DRAM) are guaranteed, by forming the first and second sidewall insulation layers on both sidewalls of a gate. CONSTITUTION: A gate insulation layer(12), a conductive layer(13) for the gate and a capping insulation layer(14) are sequentially deposited on a semiconductor substrate(10). The capping insulation layer, the conductive layer for the gate and the gate insulation layer are sequentially patterned to form the gate. A low density ion region is formed in the semiconductor substrate at both sides of the gate. The first sidewall insulation layer(17) is formed on both sidewalls of the gate. The second sidewall insulation layer(18) is formed on the sidewall of the first sidewall insulation layer. A high density ion region is formed in the semiconductor substrate at both sides of the second sidewall insulation layer.
Patent KR-20020056111-A (KR)
Title: array panel of liquid crystal display and manufacturing method thereof
Inventor: CHOI SEUNG GYU
IPC: G02F1/136
Filed: 2000-12-29
Abstract: PURPOSE: An array substrate of a liquid crystal display and a method of fabricating the array substrate are provided to reduce the number of fabrication process steps and to prevent light leakage. CONSTITUTION: An array substrate of a liquid crystal display includes a substrate, a plurality of gate lines(121) formed on the substrate in one direction, a gate electrode(122) connected to each gate line, and a gate insulating layer formed on the gate lines and the gate electrode. The array substrate further includes a semiconductor layer(141) formed on the gate insulating layer, an ohmic contact layer formed on the semiconductor layer, data lines(161) intersecting the gate lines, a source electrode(162) extended from a data line, and a drain electrode(163) placed opposite to the source electrode. The array substrate also has a light-shielding pattern(164) formed of the same material as the material of the data lines and extended in parallel with the gate lines, a passivation layer that is formed on the data lines, source and drain electrodes and light-shielding pattern and has a contact hole(171) exposing a part of the drain electrode, and a pixel electrode(181) formed on the passivation layer, connected to the drain electrode and partially superposed on the light-shielding pattern.
Patent KR-20010024112-A (KR)
Title: 필수적으로연속적인접착제망상구조및그위에병치된요철가공부를갖는연결된요철가공라미네이트
IPC: D21H27/34
Filed: 1998-09-17
Abstract: 라미네이트(10)는 2개 이상의 겹(12)을 갖는다.  겹(12)은 요철가공되고, 함께 접착 연결된다.  접착제(30)는 필수적으로 연속적인 망상구조를 형성한다.  필수적으로 연속적인 망상구조는 접착제의 강도를 증가시키고, 라미네이트(10)의 강도를 증가시키고, 요철가공부(60)와 일치하는 라미네이트의 X-Y 평면 내에 배치된다.
Patent KR-20010015681-A (KR)
Title: 내연기관의 과급압 제어 장치
IPC: F02B37/18
Filed: 1998-09-10
Abstract: 본발명의 장치는 오류인식장치가 엔진운전중에 오류를 발견하지 못할 경우, 배기가스 터보챠져(3, 4)를 위한 엑츄에이터(14)를 작동시키는 제 1 제어기(21)를 포함하고 있다. 이와는 달리 오류인식장치(15)가 임계오류를 인식하게 되면, 제 1 제어기(21)에서 제 2 제어기(24)로 변환접속된다. 이와동시에 제 2 제어기(24)는 입력신호로서 제 1 제어기(21)의 또다른 제어편차를 구비하게 된다. 따라서, 오류가 발생할 경우 배기가스 터보챠져는 배기가스 터보챠져가 자신의 임계회전수영역 이상으로 과제어될 위험없이 매우 유연하게 조정되도록 되어 있다.
Patent KR-20010030980-A (KR)
Title: 접촉부를 가지거나 가지지 않고 동작할 수 있는스마트카드 제조 방법
IPC: H05K3/34
Filed: 1998-10-08
Abstract: 본 발명은 혼합형 카드 또는 무접촉부형 카드라 불리는 접촉부를 가지거나 가지지 않고 동작할 수 있는 스마트 카드를 만들기 위한 방법에 관한 것이다.  안테나의 열화를 피하기 위해, 본 발명의 방법은 접속 패드 바깥에 위치한 적어도 2개의 권선을 갖는 안테나를 지지판 상에 생성하는 단계, 및 안테나의 각각의 끝을 접속 패드에 접속하기 위해 절연 브리지를 제공하는 단계로 구성된다.
Patent KR-20010024492-A (KR)
IPC: F01C1/36
Filed: 1998-10-05
Abstract: 본 발명은 여러 종류의 기화된 또는 분사된 연료로 작동되는 4행정 내연기관에 관한 것이다. 본 발명은 회전 운동에 의해 밀폐된 챔버들에서의 가스 체적을 변화시키며, 특히 4행정 열기관에 대하여 흡입, 압축, 팽창, 배기 동작을 수행함으로써 유용한 구동 추진력을 얻는 기계적 부품들로 구성된 장치에 관한 것이다. 본 발명은 엔진 추력을 발생하도록 된 것이다.
Patent KR-20010033213-A (KR)
IPC: C11C5/00
Filed: 1998-12-17
Abstract: This invention provides a wick composition which is comprised of a polymeric strand such as polyethylene, which has a content of particulate cellulosic filler ingredient. The cellulosic ingredient contains chemically-bound air-freshener constituent. The wick is adapted for incorporation in a candle body. When the wick is ignited, it combusts with a controlled release of the air freshener constituent into the atmosphere.
Patent KR-20010034023-A (KR)
Title: 임피던스 변조 시그널링 방법
IPC: H04L25/49
Filed: 1999-01-11
Abstract: 전송수단 및 수신수단 사이의 시그널링 방법에 있어서, 전송수단의 신호는 수신수단에 의해 계획반사되고 그 결과로 나온 신호가 전송수단에 대해 의미있는 형태로 귀환전송되며, 다른 계획반사가 상기 전송수단에서 다른 의미를 갖는 상기 결과신호에 영향을 미치는 것을 특징으로하는 시그널링 방법에 관계한다. 
     양방향 시그널링은 확실한 계획반사의 신호를 송신하고 그 결과로 나온, 계획반사의 속성에 따라 송신된 신호에 관련된, 귀환신호에 의해 얻은 한방향의 제1 시그널링 및 계획반사의 속성을 변화시켜 얻은 다른 방향의 제2 시그널링을 포함하는 것이다.
Patent KR-20010040570-A (KR)
Title: 영상 압축 및 압축 해제 방법 및 그 시스템
IPC: H04N19/593
Filed: 1999-11-18
Abstract: 픽셀 블록 변환 압축 시스템은 소정의 저차 또는 저주파수("LF") 변환 계수를 예상하는 부수적인 단계를 엔코더 내에 포함한다.   그 다음, 예상된 LF 계수는 초기 LF 변환 계수 대신에 양자화되어 디코더로 송신되는 LF 차 계수를 형성하기 위해 실제 LF 변환 계수에서 감산된다.   디코더에 있어서, 이러한 단계는 반전된다.   즉, LF 계수가 다시 예상되고, 예상된 계수는 양자화 에러까지 초기 LF 계수를 도달시키기 위해 송신되어 양자화된 LF 차계수에 가산된다.
Patent KR-20010041571-A (KR)
Title: 판금 부재의 설계 방법 및 장치
IPC: G06T19/00
Filed: 1999-02-26
Abstract: 본 발명에 따라 3차원 모델에 의해 표현되는 판금 부재의 제1 면과 제2 면 사이의 충돌을 해결하기 위한 장치가 제공된다.  CAD 시스템에서 설계된 2차원 모델의 편평한 판금 부재를 CAD 시스템에서 표시되는 3차원 모델로 절곡할 때에는 면들이 서로 충돌한다.  상기 장치는 검출 수단, 분석 수단, 및 제거 수단을 포함한다.  상기 검출 수단은 2차원 모델을 3차원 모델로 절곡할 때에 인접하게 되는 면들 사이의 각 충돌을 검출한다.  상기 제거 수단은 충돌이 발생하지 않고 절곡될 수 있는 2차원의 수정된 편평한 판금 부재를 설계함으로써 상기 충돌을 제거한다.
Patent KR-20010041985-A (KR)
IPC: H04W4/90
Filed: 1999-03-17
Abstract: A remote monitoring system comprising a signal emitter (10) providing a signal, means (12) for detecting the signal, means (16) for transmitting the signal via a global specification for mobile telephones (GSM) network, and remote means (18) for receiving the transmitted signal, the remote monitoring system being characterised in that the signal is transmitted via a short message server (SMS) of the GSM network. <IMAGE>
Patent KR-20010042378-A (KR)
Title: Ｎｄｉｒ 계기
IPC: G01N21/61
Filed: 1999-03-19
Abstract: 기체 샘플의 이산화탄소 함량을 측정하는데 사용되는 NDIR 계기는 분석할 기체를 담기 위한 샘플 셀의 하나의 단부에 배치된 전기적 피변조 백열등과, 상기 셀의 다른 단부에 있는 제1 초전형 검출기를 포함한다.  상기 계기는 분석할 샘플을 통하여 상기 램프에 의해 발산된 광대역 적외선 복사의 "누설"에도 불구하고 이산화탄소의 농도를 정확하게 결정한다.  상기 제1 초전형 검출기의 온도는 조절될 수 있다.  상기 램프에 의해 발산된 복사 세기는 귀환 루프에 의해 제어될 수 있다.
Patent KR-20010042622-A (KR)
Title: 액체 금속 이온원 및 액체 금속 이온원의 플로우 임피던스측정방법
IPC: H01J27/26
Filed: 2000-02-22
Abstract: 본 발명은, 이미션 전류를 변화시키지 않고 플로우 임피던스를 측정함으로써, 관찰이나 에칭 등의 통상조작과 플로우 임피던스의 측정을 병행하여 행하도록 하는 것으로서, 장치의 가동중에 인출전압(V ext)을 고정한 상태에서, 이미션 전류 변화량(△Ie)과 억제전압 변화량(△V sup)과의 관계를, 함수△Ie=f(△V sup)로서, 기억부(113)에 저장하여 둔다. 플로우 임피던스의 측정시에는 이미터 전류(Ie)를 고정한 상태로 인출 전압(△V ext)을 △V ext만큼 변화시킨 때, 억제전압 변화량(△V sup)을 검출한다. 그리고, 전압 변화량(△V ext, △V sup)과 기억부로부터 들어온 함수를 이용하여 플로우 임피던스(△V ext/△Ie)를 연산한다.
Patent KR-20010072586-A (KR)
IPC: G11B7/26
Filed: 1999-05-29
Abstract: The invention relates to a digital data carrier (1) with a carrier body (2) whose profile deviates from the standard outer diameter. The inventive digital data carrier is for playing in a standard CD-drive (6) which has a retractable tray (5) with a first receiving element (15) for data carriers with a larger standard diameter and a second receiving element (13) for data carriers with a smaller standard diameter. The digital data carrier has a centring aid on the side of the carrier body facing towards the tray, for centring in the second receiving element (13). Said centring aid consists of two ring pieces located opposite each other and adapted to the second receiving element (13).
Patent KR-20020063012-A (KR)
Title: Bowl washing machine
Inventor: KIM OK SUN
IPC: A47L15/00
Filed: 2001-01-26
Abstract: PURPOSE: A dish washer is provided to effectively wash vessels by transferring a driving power of a motor to the dish washer through a supporting arm. CONSTITUTION: A dish washer includes a housing(9) and a motor section(8). A rotary washing member and a power transmission for supplying power to the rotary washing member are accommodated in the housing(9). The rotary washing member includes a washing brush(1) installed at a front portion thereof and a washing plate(2) formed at a rear portion thereof with a draining hole(201). The housing(9) includes chain pulleys(6,6a) formed with a locking plate(601). Rotating members(4,4') are installed at upper and lower portions of the housing(9). A transmission shaft(7) is coupled to the upper rotating member(4') and an insertion hole(401) having a permanent magnet(403) therein is formed in the lower rotating member(4). An insertion part of a coupling member(3), in which is formed at an inner peripheral portion thereof with a plurality of locking protrusions, is coupled to a coupling part of the rotating member(4), which is formed at an outer peripheral portion thereof with a plurality of locking protrusions.
Patent KR-20010044252-A (KR)
Title: Automatic music lamp system
Inventor: KIM CHU DONG
IPC: G11B33/02
Filed: 2001-01-27
Abstract: PURPOSE: An automatic music lamp system is provided to process a brightness change of a lamp automatically by comparing and analyzing a sound signal to be input regardless of microphone location or volume of sound equipment. CONSTITUTION: A microprocessor(15) generates a control signal by program stored in the inside. A memory(14) stores the program. A microphone(10) converts a sound into an electric signal. An amplifier(11) amplifies a micro output signal of the microphone. A filter(12) divides output signal of the amplifier(11) into low sound, middle sound, and high sound. A peak detector(13) maintains a peak voltage in an instant against output signal of the filter(12). A key pad(14) receives a designated input from a user. A zero voltage detector(19) detects zero voltage of a common use alternative current voltage. A TRIAC driver(20) receives a signal to be output from the microprocessor(15) and supplies the signal to a gate of TRIAC(21). The TRIAC(21) makes a phase control of the common use alternative current voltage using the gate signal received from the TRIAC driver(20). A brightness of a lamp(22) is controlled by switching the TRIAC(21). An LED indicator(23) is lighted in a proportional number to magnitude of sound. An LCD indicator(24) displays the state and function of apparatus operation. A power source(17) supplies a direct current voltage to each circuit.
Patent KR-20020064002-A (KR)
Title: Multipurpos sauna device
Inventor: CHO NAM MOON
IPC: A61H33/06
Filed: 2001-01-31
Abstract: PURPOSE: A multi purpose sauna apparatus using visual sense, hearing sense, olfactory sense and touch feeling is provided to allow a user to feel as if the user enjoys sauna in the nature, thus causing the rapid banishment of fatigue and maximizing the effect of sauna. CONSTITUTION: In a sauna room(1), a monitor or a projection appliance(2) is installed on the whole surface of the room except the inner wall surface around an entrance and exit, a blowing fan(6) capable of supplying various perfume and wind and a speaker(8) are installed on an appropriate position of the inner wall surface around the entrance and exit and the ceiling, and a steam piping is embedded under the bottom surface of the sauna room.
Patent KR-20010078292-A (KR)
Title: Molecular beam source and molecular beam epitaxy apparatus
Inventor: MAKINO SUJI
IPC: C30B23/06
Filed: 2001-02-02
Abstract: PURPOSE: To provide a molecular source and a molecular beam epitaxial device, enabling a large quantity of a molecular beam material to be packed in a crucible and affording uniform film thickness distribution even for a large-size substrate. CONSTITUTION: This molecular beam source has a crucible with an opening and a heater which is mounted on the crucible and intended to emit molecular beams via the opening by heating and evaporating a molecular beam material packed in the crucible; wherein the crucible has a bent portion between the opening and packing portion so that the molecular beam material packed does not directly face on the opening, and there is a narrow portion between the bent portion and the opening.
Patent KR-20020067170-A (KR)
Title: A nonstick gridiron
Inventor: CHOI JIN SOON
IPC: A47J37/06
Filed: 2001-02-15
Abstract: PURPOSE: A grill is provided to effectively roast a meat with preventing the meat from being scorched to the grill by downward bending a lower portion of a grill pipe such that the meat is positioned adjacent to fire. CONSTITUTION: A cooking section is formed at a center of a table. Charcoal fire or gas fire is arranged at both sides of the cooking section. A grill(3) is placed on the cooking section. The grill(3) has a plurality of pipes(4), which are downward bent corresponding to the position of fire. A water reservoir(5) is connected to the plurality of pipes(4). The water reservoir(5) and the pipes(4) are filled with water through a perforation hole(6) formed on an upper surface of the water reservoir(5). An exhaust valve member(7) is screw-coupled with the perforation hole(6). A heating plate is replaced with a center pipe.
Patent KR-20010083217-A (KR)
Title: Alignment mark set and method of measuring alignment accuracy
Inventor: YOKOTA KAZUKI
IPC: H01L21/027
Filed: 2001-02-21
Abstract: PURPOSE: To accurately measure the positions of measuring marks without breaking edges, the objects to be measured, of the measuring marks on account of development and etching after exposure, in alignment precision measuring marks having measuring marks 1, 2, 3 and 4 of alignment precision which are formed on an exposure region 7 of a semiconductor wafer. CONSTITUTION: The plurality of alignment precision measuring marks 1, 2, 3 and 4 in one exposure region are arranged at positions which are not adjacent with each other in the adjacent exposure region 7. As a result the break of adjacent edges of the measuring marks 1, 2, 3 and 4 turning to measuring references which break is to be caused by development, etching, etc., is prevented.