baber/WOPTO huggingface dataset:
Patent KR-20020084175-A (KR)
IPC: B23K20/02
Filed: 2001-03-08
Abstract: The invention includes an aluminum-comprising physical vapor deposition target bonded to an aluminum-comprising backing plate to a bond strength of greater than 10,000 pounds/in 2 . The invention also includes a method of bonding a first aluminum-comprising mass to a second aluminum-comprising mass. The first aluminum-comprising mass has a first surface, and the second aluminum-comprising mass has a second surface. At least one of the first and second surfaces is exposed to a mixture comprising HF and HNO 3 , and the first surface is then contacted with the second surface. The first and second masses are pressed together to bond the first mass to the second mass. Additionally, the invention includes a method of bonding a physical vapor deposition target material to a backing plate material. The target material and backing plate material are joined in physical contact with one another. The target material and backing plate material are then compressed under a load that progresses sequentially as follows: (1) the load is maintained at a first pressure of at least about 4 ksi for a time of at least about 20 seconds; (2) the load is increased by at least about 0.5 ksi to a new pressure; and (3) the load is maintained at the new pressure for at least about 20 seconds.
Patent KR-20020092465-A (KR)
Title: 커패시터 스택 구조 및 그 제조방법
IPC: H01L27/108
Filed: 2001-05-02
Abstract: 전극의 측벽 위에 절연체를 갖는 상부 백금 전극과 하부 전극을 포함하고, 하부 전극은 그 측벽상의 절연체에 비하여 오목하게 되는 제 1 전극 부분을 증착하고 제 2 절연체 부분을 증착하여 얻어지는 커패시터 구조가 제공된다.
Patent KR-20030005370-A (KR)
IPC: D21H15/12
Filed: 2002-03-07
Abstract: 유리 페이퍼용 촙 스트랜드는, 그 표면에 계면활성제 및 수용성 고분자 중 적어도 하나를 갖는 집속제와 피롤린산염이 부착되어 있다.  피롤린산염의 부착량은 바람직하게는 0.001∼0.3 질량%이다.  피롤린산염은, 피롤린산칼륨 및/또는 피롤린산나트륨이어도 무방하다.  유리 페이퍼용 촙 스트랜드의 표면에는 또한, 실란 커플링제가 0.0001∼0.1 질량%로 부착되어 있어도 무방하다.
Patent KR-20030043797-A (KR)
IPC: A61K31/57
Filed: 2002-04-23
Abstract: 본 발명은 치료 화학 분야에 관한 것으로서, 더욱 상세하게는 호르몬 약제 기법 특히, 불활성인 약제학적으로 허용되는 1 또는 수개의 비독성 부형제와 복합된, 에스트로겐 화합물 및 게스토겐성 화합물로 구성된 에스트로-게스토겐성 복합제로서 형성된 신규한 호르몬성 약제 조성물에 관한 것이다.  본 발명은 또한, 에스트로-게스타겐성 복합제의 용도에 관한 것이며, 여기서 에스트로겐성 성분과 게스타겐성 성분은 복합된 방식으로 투여된다.  복합된 복합제은 에스트로겐 결핍을 치료하고, 폐경기 여성에서 골다공증 및 심장혈관 질환을 예방하는데 사용되는 있는 조성물을 제공하기 위해 연속적 또는 간헐적인 방식으로 처방될 수 있다.  또한, 본 발명은 상기 에스트로-게스타겐성 조성물의 생성 방법에 관한 것이다.
Patent KR-20040064904-A (KR)
Title: Complex long wardrobe
Inventor: SON YOUNG SUK
IPC: A47B67/00
Filed: 2003-01-10
Abstract: PURPOSE: Provided is a complex long wardrobe to enable a housewife to enjoy an easier and better home life by setting a rice keeping box as a necessity in the home in a long wardrobe provided at home. CONSTITUTION: The complex long wardrobe comprises a door(3), a refrigerator(7), a roller(4), a rail(10), and a multipurpose drawer(8). The door(3) is equipped at each of a left lower end and a right lower end of a stationery chest(1). The refrigerator(7) for Kimchi and a rice keeping box(2) is equipped inside each door(3), respectively. The roller(4) is placed to move on a rail at one side of each of refrigerator(7) and the rice keeping box(2). The rail(10) rolls the roller to easily move forward and backward by supporting the roller(4). The multipurpose drawer(8) is placed at one side of the up or down of the front side of the complex long wardrobe.
Patent KR-20040065447-A (KR)
Inventor: CHO JAE WAN
IPC: G21C17/02
Filed: 2003-01-14
Abstract: PURPOSE: A method and an apparatus are provided to check a heavy water leakage and abnormalities of nuclear fuel replacement equipment during replacement of nuclear fuel. CONSTITUTION: A method comprises a step of displaying thermal images obtained by an inspection head constituted by a CCD and a thermal image camera arranged in parallel with each other; a step of reading the images acquired by the inspection head through the use of a digitizer and a computer; a step of extracting regions having different emissivities through the images of CCD camera and thermal images; a step of searching the corresponding thermal images through the matching of the regions having different emissivities and front view angle extracted from thermal images; a step of correcting emissivity data of the corresponding thermal image, re-constructing thermal images, and displaying the images on a computer monitor; and a step of judging abnormality of equipment from the corrected image which shows the corrected cross section profile with respect to the vertical axis of an object.
Patent KR-20040066678-A (KR)
Title: A capacitor fabrication method of a semiconductor device
Inventor: KWON HYEOK JE
IPC: H01L21/8242
Filed: 2003-01-20
Abstract: PURPOSE: A method for fabricating a capacitor of a semiconductor device is provided to make uniform the area of a lower electrode formed in or between semiconductor substrates and maximize the area of the lower electrode by preventing a molding layer from being lost in forming the lower electrode. CONSTITUTION: A molding layer and an etch stop layer are sequentially formed on a semiconductor substrate(100). The etch stop layer and the molding layer are continuously patterned to form storage node holes(135) exposing predetermined regions of the semiconductor substrate. A lower electrode layer(140a) is conformally formed on the semiconductor substrate with the storage node holes. A sacrificial layer is formed on the lower electrode layer to fill the storage node holes. The sacrificial layer and the lower electrode layer are continuously planarized until the etch stop layer is exposed so that cylindrical storage nodes are formed in the storage node holes while sacrificial layer patterns are left in the storage nodes. At least the sacrificial layer patterns are eliminated to expose the inner walls of the storage nodes.
Patent KR-20040069036-A (KR)
Inventor: CHOI PIL GON
IPC: D04H3/16
Filed: 2003-01-28
Abstract: PURPOSE: Provided is a raising seeding polyester spunbond nonwoven fabric which has a tissue structure so dense that the roots of the seeding do not pass through the seedbed formed with the nonwoven fabric while fluently passing water and nutrients therethrough, and easily separates the seeding from the nonwoven fabric. CONSTITUTION: A method of manufacturing the raising seeding polyester spunbond nonwoven fabric comprises the steps of: making filaments of 2-7 denier with low melting point polyester having an intrinsic viscosity of 0.50-0.68 and a melting point of 200-250 deg.C, and polyester having an intrinsic viscosity of 0.50-0.68 and a melting point of 260 deg.C; uniformly conjugating the low melting point polyester filaments with the usual polyester filaments to form a web; and fusing the web with an embossing roll having a bonding rate of 5-45%. The basic weight of the nonwoven fabric is 30-70g/m2, and the embossing pattern is shaped with a diamond, a square, a star, a circle, a rectangle, or an oval.
Patent KR-20030064653-A (KR)
Title: 칩 카드 판독기
IPC: G06K19/077
Filed: 2003-01-28
Abstract: 칩 카드 판독기는 PCMCIA 형식에 따르는 하우징을 포함한다. 이 하우징은 플러그 인 소켓(32)과 칩 카드(38)용 삽입 슬롯 사이에 연장된 기초판(12)과 덮개판(14)을 포함한다. 기초판(12)과 덮개판(14)은 각각 플라스틱부(20)와 금속부로 제조되고 양쪽 판(12, 14)의 금속부를 서로 접속함으로써 조립된다.
Patent KR-20030064655-A (KR)
Title: 반도체 장치 및 그 제조방법
IPC: H01L29/786
Filed: 2003-01-28
Abstract: TFT의 채널형성영역에 결정립계가 형성되는 것을 막고, 결정립계에 의해서 TFT의 이동도가 현저히 저하하거나, ON 전류가 감소하거나, OFF전류가 증가하거나 하는 것을 막을 수 있는 레이저결정화법을 사용한, 반도체장치의 제조방법 및 그 제조방법을 사용하여 제조된 반도체장치의 제공을 과제로 한다. 띠형 또는 직사각형의 요철을 형성한다. 그리고, 절연막상에 형성된 반도체막에, 절연막의 띠형 요철에 따르거나 직사각형의 장축이나 단축의 방향을 따라서, 연속발진 레이저광을 조사한다. 이때, 연속발진의 레이저광을 사용하는 것이 가장 바람직하지만, 펄스발진 레이저광을 사용해도 좋다.
Patent KR-20030065388-A (KR)
Title: 기판처리장치 및 기판처리방법
IPC: H01L21/00
Filed: 2003-01-29
Abstract: 본 발명은, 기판처리장치 및 기판처리방법에 관한 것으로, 기판(W)에 처리유체를 공급하여 처리하는 기판처리장치에 있어서, 기판(W)을 유지하는 유지부재(60)와, 유지부재(60)를 지지하는 척 부재(61)와, 기판(W)에 근접하여 표면을 덮는 상면부재(62)를 구비하고, 상면부재(62)를 상기 척 부재(61)로 지지하므로써, 유지부재(60)와 상면부재(62)를 일체로 회전시키는 구성으로 했다. 따라서, 기판에 대한 파티클의 영향을 억제하고, 또한 스페이스와 비용의 절약을 실현할 수 있다.
Patent KR-20040024429-A (KR)
Inventor: YUSA MASAYUKI
IPC: H01F41/06
Filed: 2003-01-30
Abstract: PURPOSE: To provide a tension device and a tension impressing method prepared for a winding machine and capable of setting wide tension values by inexpensive constitution. CONSTITUTION: The tension device is constituted of a non-magnetic plate allowed to be rotated by a rotation means by alternately arranging the N and S poles of permanent magnets in the circumferential direction and a conductor plate rotatably arranged with a prescribed interval from the non-magnetic plate and integrated with an arm arranging a wire material guide on its tip part. The non-magnetic plate is rotated by the rotating means to generate a magnetic field in the conductor plate by electromagnetic induction and the conductor plate and the arm are rotated by torque generated between the magnetic field and the permanent magnets to impress tension to a wire material.
Patent KR-20040069665-A (KR)
Inventor: KIM DO U
IPC: H01L27/11
Filed: 2003-01-30
Abstract: PURPOSE: An SRAM cell and a method for manufacturing the same are provided to increase cell capacitance and to effectively reduce soft error rate by forming a metal plate to each cell. CONSTITUTION: An SRAM cell includes a pair of access devices, a pair of pull-down device and a pair of pull-up device. The SRAM cell further include a metal plate(14). The metal plate(14) together with a metal interconnection(12b) of node bar is used as a capacitor. The metal plate contacts with a metal interconnection(12a) of node.
Patent KR-20040010051-A (KR)
Inventor: OH KYU MIN
IPC: B60D1/00
Filed: 2003-02-04
Abstract: PURPOSE: A simple towing device for a vehicle is provided to prevent the secondary accident by adjusting the length of a towing rope between a tow car and a pulled vehicle, to reduce impact by mounting self buffer units in pulling momentarily, and to improve convenience by towing the vehicle simply. CONSTITUTION: A simple towing device is composed of a first body(100) having a spool restoring with a windup spring, a towing rope adjusting unit interlocking with a gear by the spool and adjusting the length of the towing rope, and a frame part supporting and combining the spool with the towing rope adjusting unit; a second body(200) relieving impact from the first body and preventing mutual displacement with a frame, key bolts, penetration grooves, support rods and compression springs; and a third body(300) including a frame, penetration grooves, support rods, tension springs, a lower substrate and a body restoring spring, relieving impact from the second body, and having rotation restoring force in turning right and left.
Patent KR-20030093924-A (KR)
Title: 토너 입자의 제조 방법 및 토너
IPC: G03G7/00
Filed: 2003-02-17
Abstract: 본 발명은 단량체의 잔류량이 적고 유기 휘발 성분이 적은 토너 입자의 효율 적인 제조 방법에 관한 것이다. 
     또한, 본 발명은 적어도 중합성 단량체를 포함하는 중합성 단량체 조성물을 수계 매체를 보유한 용기 중에서 중합하는 중합 공정을 갖는 토너 입자의 제조 방법에 있어서, 중합후반 또는 중합 종료 후, 상기 용기내의 수계 매체에 100 ℃보다 고온의 포화 스팀을 도입하여 적어도 결합제 수지 및 착색제를 갖는 토너 입자로부터 적어도 유기 휘발 성분을 제거하는 것을 특징으로 하는 토너 입자의 제조 방법에 관한 것이다.
Patent KR-20040074820-A (KR)
Inventor: PARK YONG DEUK
IPC: B07B1/00
Filed: 2003-02-19
Abstract: PURPOSE: Processes for pulverizing, processing and recycling macadam aggregates are provided to enable ready-mixed concrete to be enhanced in quality while reducing the cost and overcoming the shortage problem of construction materials. CONSTITUTION: The processes for pulverizing, processing and recycling macadam aggregates comprises: preparing raw ore containing surface soil; separating the surface soil and mixed stone according to particle diameter by screening; washing the screened raw ore, and subjecting the same to primarily pulverizing, secondarily pulverizing and thirdly pulverizing; processing pulverized particles according to particle size; and storing the aggregates according to the type to be used as materials for artificial aggregates, soil bricks, ceramics, tillage soil, green soil, styled viewing stone and so on.
Patent KR-20040075249-A (KR)
Inventor: JEONG HYUN WOO
IPC: G06F17/00
Filed: 2003-02-20
Abstract: PURPOSE: A method and a system for offering Web-3D(Dimensional) contents based on the network are provided to reduce the burden of members by selling no Web-3D solution directly, and make a user receive a Web-3D screen freely without installing a plug-in program or registering as the member. CONSTITUTION: The system(300) includes a web server(320), a Web-3D engine(340), and a database server(360). The database server includes a member database(364), a Web-3D contents information database(362), and a Web-3D storage(366). A user terminal(100) and a member terminal(200) are connected to the web server. The web-3D engine realizes the Web-3D screen, and includes a display module, a simulation module simulating the Web-3D solution, a license module certifying a license of the Web-3D contents of the member, an analysis module analyzing/interpreting the Web-3D data for an object realized to the Web-3D screen, a processing module compressing/storing the Web-3D contents information to the Web-3D storage and storing the information to the Web-3D contents information database, and an effect module adding an event effect or various 3D effects.
Patent KR-20030036306-A (KR)
Inventor: KIM HYEOK YU
IPC: G08G1/0968
Filed: 2003-02-28
Abstract: PURPOSE: A method for processing/supplying specific traffic information is provided to supply specific traffic information by considering traffic information such as a travel distance, a travel time, a stop time, a stop frequency, etc. collected by a traffic information system besides a travel speed and a travel time, thereby calculating a cruising time, a delay time, a stop time, an RSC(Required Signal Cycle to go through intersection) a fuel consumption, and a discharging amount of air pollution material. CONSTITUTION: Quantitative traffic information such as a travel distance(Td), a travel time(Tt), a stop time(St), and a stop frequency(Sf) is collected by a traffic information system such as an ATIS(Advanced Traffic Information System)(S110). A cruising time(Ct) is calculated(S114). A delay time(Dt) is calculated(S116). A stop time is calculated(S118). An RSC is calculated(S120). A fuel consumption of a vehicle, an operation cost, and a discharging amount of air pollution material are estimated and calculated based on the calculated data(S122,S124). The calculated data are stored in an information backup DB and supplied for a user who requests corresponding information through various networks(S128).
Patent KR-20040078234-A (KR)
Inventor: JUN GYU DONG
IPC: D06F33/02
Filed: 2003-03-03
Abstract: PURPOSE: A method for removing the eccentricity of the laundry is provided to easily check the eccentricity of the laundry without an additional device and to perform a dewatering step with less eccentricity by controlling the distribution of the laundry again through additional agitation motions. CONSTITUTION: A method for removing the eccentricity of the laundry is composed of steps for starting to drain the water after completing a washing step and draining the water to the predetermined correction level(P1,P2); performing washing agitation to remove the eccentricity of the laundry; deciding if the total number of the washing agitations reaches the predetermined times(P6); restarting to drain the water and dewatering the laundry after performing the predetermined number of agitating water currents if the total number of the washing agitations reaches the predetermined times, and rotating a washing tub for the predetermined times if not reaching the predetermined times(P7-1,P7-2); deciding the degree for the eccentricity of the laundry through a safety switch during the rotation of the washing tub; repeating the washing agitation step if detecting the safety switch during the rotation of the washing tub and turning off a motor and stopping rotating the washing tub if not detecting the safety switch(P5,P10); completely draining the water by starting to drain again(P11,P12); and starting to dewater the laundry after completing the drain step(P13).
Patent KR-20040079125-A (KR)
Inventor: NOH SANG HO
IPC: H01L21/205
Filed: 2003-03-06
Abstract: PURPOSE: CVD(chemical vapor deposition) equipment is provided to increase a mixing rate of source gases and improve uniformity of a material layer deposited on a wafer by installing at least one turbulent air generating bar in a mixture gas injecting pipe. CONSTITUTION: At least two source gases are induced to a mixture gas box(100). A shower head(110) has an inner space. A plurality of injecting holes(111) are installed in the lower surface of the shower head at regular intervals. The mixture gas box is connected to the shower head by the mixture gas injecting pipe(120). At least one turbulent air generating bar(130) crosses the mixture gas injecting pipe.
Patent KR-20040082780-A (KR)
Inventor: JI JEONG HWAN
IPC: D01G13/00
Filed: 2003-03-20
Abstract: PURPOSE: A manufacturing method of mixed yarn of long fiber and short fiber is characterized by opening and blowing the long and the short fibers respectively, manufacturing the scattered fibers into each sheet and doubling each sheet before manufacturing sliver. The yarn has the soft surface. CONSTITUTION: A manufacturing method of mixed yarn of long fiber and short fiber is as follows: opening and blowing the short fiber and the long fiber to scatter them; manufacturing the fibers into sheets respectively; and then doubling the long fiber sheet and the short fiber sheet before manufacturing sliver.
Patent KR-20040087168-A (KR)
Inventor: CHO JAE YEON
IPC: H04B1/40
Filed: 2003-04-04
Abstract: PURPOSE: A method for changing a mobile terminal mode according to a usage is provided to allow a user to change a function of a mobile terminal according to a situation by simply changing a mode. CONSTITUTION: A user outputs every currently set mode on a screen by using a menu or each abbreviation key for setting each mode of a mobile terminal. If the user does not want to register a new mode, he/she can select a desired mode by pressing a direction key or a number key to correctively re-set functions of the mobile terminal according to set content of the selected mode. If the user wants to register a new mode, he/she can generate a new mode by pressing a menu or a pertinent key for mode registration. In this case, the user selects a name of the mode to be generated, whether to reject an incoming call to a mobile terminal, and a background image, and then registers them to generate and add the new mode.
Patent KR-20040088160-A (KR)
Inventor: PARK GEON U
IPC: H01Q1/27
Filed: 2003-04-09
Abstract: PURPOSE: An antenna circuit is provided to enhance sensibility and improve IMD(Inter-Modulation Distortion) specification by controlling or bypassing each gain of plural LNAs(Low Noise Amplifiers). CONSTITUTION: An antenna circuit includes a duplexer, a selective amplifier, a controller, and a variable LNA. The duplexer(110) is used for transmitting a signal of an antenna. The selective amplifier(120) is used for amplifying or bypassing an output signal of the duplexer by a switching operation. The controller(130) is used for generating a gain selection signal for controlling an amplifying gain. The variable LNA(140) is used for controlling a gain according to the gain selection signal and amplifying an output signal of the selective amplifier.
Patent KR-20040088729-A (KR)
Inventor: CHO WI DEOK
IPC: G06F17/00
Filed: 2003-04-10
Abstract: PURPOSE: A method for storing/playing the PES(Packetized Elementary Stream) and the contents data is provided to enable a user to play/view data broadcasting by storing the contents data together with the event information manipulated from the user. CONSTITUTION: The PES included in a transport stream is selected by receiving the transport stream of a predetermined channel and it is checked that the user selects storage of the PES(604). In case of the storage, the corresponding PES is extracted, the extracted PES is converted into an A/V(Audio/Video) signal while the extracted PES is stored to the PVR(Personal Video Recorder), and the A/V signal is displayed to video plane(610). In the case of the storage, execution of the data broadcasting is judged. In the case of the execution, the contents data corresponding to the PES is extracted/executed/displayed to the graphic plane(624). The video plane and the graphic plane are overlaid and it is judged that an event for the contents data is generated(626). If the event is generated, the information according to event generation is extracted/stored to the PVR(628).
Patent KR-20040092507-A (KR)
Inventor: LIM JUN HUI
IPC: H04B1/38
Filed: 2003-04-24
Abstract: PURPOSE: A hinge device of a mobile communication terminal is provided to prevent distortion of a main body part and a folder part due to a gap by assembling hinges at both sides. CONSTITUTION: A main body part(200) and a folder part(100) are connected with each other by a flexible printed circuit board. Hinge structures(300,300') connect the main body part(200) with the folder part(100) rotatively. A hinge fixing member(110) is installed at the main body part(200) or the folder part(100) for fixing one side of each hinge structure(300,300'). Hinge receiving members(210,210') are installed at the main body part(200) or the folder part(100) not having the hinge fixing member(110) to support the other side of each hinge structure(300,300'). A maintaining element is formed between the hinge structures(300,300') and the hinge receiving member(210) for maintaining positions of folded and unfolded states of the folder part(100) and the main body part(200).
Patent KR-20030086238-A (KR)
Title: 무선 주파수 튜너용 회로 스테이지 및 무선 주파수 튜너
IPC: H03G3/30
Filed: 2003-04-29
Abstract: 입력 스테이지와 같은 회로 스테이지에는 일반적으로 많은 채널들을 포함하는 광대역 신호를 수신하는 입력을 갖는 무선 주파수 튜너가 제공된다.  입력 스테이지는 롱 테일 쌍(long tail pair)의 트랜지스터들과 제어가능한 잔여 전류 소스의 형태의 저잡음 증폭기를 포함한다.  레벨 검출기는 증폭기의 입력에서의 신호 레벨을 검출하고 신호 진폭이 임계 레벨 위로 상승하면 잔여 전류를 증가시키고 신호 진폭이 임계값 아래인 경우에는 잔여 전류를 고정시키도록 잔여 전류 소스를 제어한다.
Patent KR-20030087987-A (KR)
Title: 발포체
IPC: C08G18/10
Filed: 2003-05-10
Abstract: 밀도가 0.1 g/㎤ 이상이고, 유리전이점을 1개 갖고, 또한 그 유리전이점이 -20∼60 ℃의 온도 범위내에 존재하여 이루어지고, 진동수 10 ㎐ 및 온도 25 ℃에서의 동적 점탄성으로부터 얻어지는 저장 탄성률(E')이 0.5∼2 ㎫이고, 또한 tanδ가 0.16∼0.5인 발포체.     이 발포체는 구두창용 부재(部材), 구두창 등에 사용된다.
Patent KR-20040071040-A (KR)
Title: Butterfly valve disk
Inventor: KAMESAWA JIRO
IPC: F16K1/22
Filed: 2003-05-16
Abstract: PURPOSE: A valve body of a butterfly valve is provided to extremely thin the thickness of a base disc of the valve body and to be lightweight by reducing the weight of the whole valve body. CONSTITUTION: Boss units(13,14) of a hole(11) for a valve rod are projected outward and mounted at upper and lower sides of a Y-axis of a disc-shaped valve body(10). Plural horizontal ribs(16a,16b,16c) with the predetermined height are extended in the direction of an X-axis and formed on the surface of a nozzle of the valve body and a rear side of an orifice. The upper and lower boss units for the hole of the valve rod are connected by a vertical rib(15). One of the horizontal ribs positioned in the center is installed with parallel to the X-axis. The horizontal ribs positioned on and under the center horizontal rib are inclined at the predetermined angle toward the center horizontal rib.
Patent KR-20040103560-A (KR)
Inventor: HUH SEONG TAE
IPC: H01L21/205
Filed: 2003-05-29
Abstract: PURPOSE: A semiconductor fabrication apparatus having a lift device for loading a wafer susceptor within a process chamber is provided to reduce processing accidents by preventing deflection of a lift pin due to looseness of a fixing screw. CONSTITUTION: An electrostatic chuck(220) is installed on an upper surface of a base(210). A plurality of lift pin holes and a plurality of insertion holes are formed in the electrostatic chuck. A plurality of lift pins(241) are inserted into the lift pin holes in order to support a wafer. A lift pin supporter(240) is used for fixing the lift pins and includes a through-hole connected to the insertion hole. A transfer shaft(250) is coupled to the lift pin supporter. A fixing pin(300) is used for preventing misalignment of the lift pins and the lift pins holes.