baber/WOPTO huggingface dataset:
Patent KR-19990037617-A (KR)
Title: 화산암재를 이용한 잔디구장의 관수 및 배수장치
IPC: A01G9/02
Filed: 1998-12-26
Abstract: 본원 발명은 사계절 전천후 잔디구장을 얻을 목적으로 기존구장의 지면을 파서 이에 바닥면이 배수관쪽으로 약간 경사진 배수판을 구성한 뒤 상기 배수판의 상부로 평행 배수유공관과 망사 및 배수층과 식재층을 각각 크기를 달리한 화산암재로 적층시켜 이에 식재된 잔디에 배지의 수분과 공기의 조절 및 균형을 용이하게 하고 장마철에도 잔디에 계속 영양분을 공급하기 위한 지효성 비료의 살포를 가능케함과 동시에 관수와 배수작용이 자동적으로 이루어지는 잔디구장을 얻고저 한 것이다.
Patent KR-20000042999-A (KR)
Title: Fixed armature of an arc extinguishing section
Inventor: CHOI YOUNG GIL
IPC: H01H73/18
Filed: 1998-12-28
Abstract: PURPOSE: A fixed armature of an arc extinguishing section is provided to improve the shielding efficiency of an arc extinguishing section by making the length of a generation arc longer. CONSTITUTION: A fixed armature of an arc extinguishing section comprises a body(30) and an insulation section(40). The body(30) makes contact with an exterior operating contactor(20) by a contactor(10) which is protruded from the upper portion of a bottom contact surface(11). The insulation section(40) insulates the contactors. When an over current is applied to the body, a current is applied through a terminal portion(35) which is formed on the right side of the upper surface of the body(30).
Patent KR-20000044092-A (KR)
Title: Folding-type roof carrier of bus
Inventor: HONG HO SEOK
IPC: B60R9/04
Filed: 1998-12-30
Abstract: PURPOSE: A folded-typed roof carrier of a bus is provided to improve a traveling property and to improve an appearance of the bus with traveling at a normal speed when the bus is passed a low tunnel or an overpass by lowering a garage of the bus. CONSTITUTION: When a loading space of a carrier(10) is divided, the loading space is installed in a combined portion between the other end of a first frame(20) and the other end of a second frame(30) horizontally. In closing a second flange(25) of the first frame(20) and a fourth flange(35) of the second frame(30), a sixth flange(54) of a partition frame(50) is located in an inner face of the fourth flange(35). Bolt slots(25a)(35a)(54a) of the second, the fourth and the sixth flanges(25)(35)(54) are conformed. In fixing a bolt(B) by penetrating with each bolt slots(25a)(35a)(54a), the partition frame(50) is firmly fixed. Cargos are able to store by classifying a volume, a size and a kind of cargo. And a flowing of cargo according to a flowing of a vehicle during traveling a bus is prevented by a preventing end of flowing(16) protruded upside a supporting plate of carrier.
Patent KR-20000044525-A (KR)
Title: Method of loading program loaded data for exchange
Inventor: BOK NAM SU
IPC: G06F9/44
Filed: 1998-12-30
Abstract: PURPOSE: A method of loading program loaded data(PLD) for a mobile exchange is provided to reduce a PLD loading time by excluding a relation which is unnecessary for being loaded, by considering special characteristics of the PLD when a package of the mobile exchange are applied. CONSTITUTION: A method for loading program loaded data(PLD) for an exchange comprises the steps of: composing a file header information region including loading data size information necessary for being loaded in a load-oriented processor and non-loading data size information unnecessary for being loaded, and composing a PLD file structure having a data region which allocates non-loading data regions, respectively; if a loading process of the PLD is necessary in the load-oriented processor, transmitting the file header information to the load-oriented processor, and transmitting loading data necessary for the load-oriented processor to the load-oriented processor; allocating a memory in the load-oriented processor by using the loading data size information, and recording the transmitted loading data in the allocated memory; and executing an application by using the stored loading data.
Patent KR-20000045582-A (KR)
Title: Polypropylene resin composition having good rigidity and high impact property
Inventor: CHEON YONG
IPC: C08K5/09
Filed: 1998-12-30
Abstract: PURPOSE: A polypropylene resin composition having good rigidity, heat-resistance and high impact property which is useful to manufacture automobile components and general packaging injection molded products is provided. CONSTITUTION: A polypropylene resin composition according to the present invention comprises: a) 100 parts by weight of ethylene propylene copolymer; b) 0.05 to 0.3 parts by weight of organic metal based nucleating agent; and c) 0.1 to 0.5 parts by weight of inorganic nucleating agent.
Patent KR-20000046977-A (KR)
Title: Method for controlling speed command signal of built-in spindle motor in machining center
Inventor: SONG HO SEOK
IPC: H02P7/12
Filed: 1998-12-31
Abstract: PURPOSE: A method is provided to reduce unnecessary mechanical and electrical impacts of the switching apparatus, which controls the motor having two winding coils for high and low speed, by applying the desired speed command signal only to the selected winding coil. CONSTITUTION: A motor equips two switching apparatus for controlling the winding coils respectively. The speed command data is stored into an address for speed command when receiving the main power and speed command. The stored one is compared to a reference data. If it is less or equal to the reference data, the turning flag and the switching signal for corresponding coil are turned off to turn on the switching apparatus for high speed so the motor keeps high speed. If the switching apparatus is turned on after receiving the main power, the switching operation is not performed. In next, if the one is greater than the reference data, the flag and the switching signal are turned on to turn on the switching apparatus for low speed so the motor keeps slow speed. The motor keeps the present speed until new speed command signal is received.
Patent KR-19990035909-A (KR)
Title: 교차-커플링 반응용 촉매
IPC: C07C255/50
Filed: 1996-07-24
Abstract: 본 발명은 a) 팔라듐(II) 화합물과 b) 수용성 포스핀 리간드와 c) 설폭사이드 또는 다가 알콜의 반응으로 수득가능한, 특히 교차-커플링 반응을 수행하기 위한 촉매계에 관한 것이다.
Patent KR-19990071875-A (KR)
Title: 무선 패킷 데이터 분배 통신 시스템
IPC: H04J3/24
Filed: 1996-11-29
Abstract: 양방향 위성 통신 시스템은 터미널에 의한 저전력 소모를 용이하게 하는 네트워크 액세스 프로토콜을 이용하는 복수의 원격 터미널과 통신하는 지구국을 포함한다.  지구국은 하나 이상의 위성 채널을 통해 순방향 링크 TDM 패킷 데이터 전송을 발생하며, 하나 이상의 위성 채널을 통해 다중 동시 복귀 링크 슬롯된 CDMA 패킷 전송을 검출하고, 역확산하고, 디코딩한다.  지구국은 궁극적으로 복귀 링크 패킷 데이터를 최종 사용자에게 전달하고 최종 사용자로부터 순방향 링크 패킷 데이터를 수신하는 패킷 처리 센타와 무선 연결을 통해 통신한다.  원격 터미널은 하나 이상의 위성 채널을 통해 순방향 TDM 전송을 수신하고 처리하고 동작시키며, 하나 이상의 채널을 통해 복귀 링크상의 슬롯된 스펙트럼 확산 CDMA 전송을 발생한다.  원격 터미널은 로컬 디지털 데이터 소스 및/또는 싱크와 통신하고, 하나 이상의 로컬 아날로그 센서 신호를 디지털화하고, 터미널의 전력 소모를 최소화하기 위하여 휴지모드로 들어가며, 시스템 네트워크 액세스 프로토콜에 따라서 위성 통신 네트워크로 액세스한다.
Patent KR-19990081916-A (KR)
Title: 유기 이엘 소자의 제조방법, 유기 이엘 소자 및 유기 이엘 표시장치
IPC: H01L27/32
Filed: 1997-11-25
Abstract: 본 발명의 유기 EL 소자의 제조방법은 투명기판(804)상에 화소 전극(801), (802), (803)을 형성하는 공정과, 화소 전극상에 유기 화합물로 이루어진 발광층(806), (807), (808)을 잉크젯 방식으로 패턴형성하는 공정을 포함하는 것을 특징으로 한다. 이에 따라, 간편하게 단시간에 정도(精度)가 높은 패터닝을 행하는 것이 가능하고, 막의 설계 및 발광특성의 최적화를 간단하게 행할 수 있으며, 더욱이, 발광효율의 조정이 용이하다.
Patent KR-19990087145-A (KR)
Title: 선택 호출 수신기에서 이용 가능한 주파수의 결정 방법
IPC: H04W88/02
Filed: 1997-02-11
Abstract: 선택 호출 수신기(106)는 제어 채널이 신호를 수신하도록 결정하기 위해서 복수의 주파수들을 주사하기 위한 주파수 합성 장치(708) 및 지정학적 지역과 관련된 이용 가능한 주파수를 나타내는 상기 신호를 수신하기 위한 수신기를 구비하고 있다.  상기 신호는 채널 식별자(404), 주파수 할당(406) 및 액티브 채널 표시기(408)를 포함한다.  프로세서(712)는 상기 지정학적 지역의 이용 가능한 주파수를 나타내는 상기 액티브 채널 표시기(408)에 응답하여 상기 채널 식별자(404)를 상기 주파수 할당(406)과 관련시키고, 메모리(720)는 이용 가능한 주파수들(408)을 지정하는 주파수 할당들(406)과 관련된 채널 식별자(404)를 기억한다.  상기 수신기(704)는 어드레스(333)와 상기 제어 채널 상의 상기 채널 식별자(404)를 수신하고, 디코더(714)는 메시지가 전송될 상기 이용 가능한 주파수를 결정하도록 상기 주파수 할당(406)과 관련된 상기 채널 식별자(404)를 디코드하고 상기 주파수 합성 장치(708)는 상기 메시지를 수신하기 위한 상기 채널 식별자(404)에 의해 표시된 상기 이용 가능한 주파수로 스위치한다.
Patent KR-19990087749-A (KR)
Title: 류마티스성 관절염에 특이적인 인간 티 세포 클론
IPC: C07K14/47
Filed: 1997-03-12
Abstract: 류마티스성 관절염(RA)환자의 활막세포에서 발현되고 있는 항원을 HLA-DR에 대해 제한적으로 인식하는 인간 T 세포 클론으로서 RA의 발현기구의 해석, 치료 및 예방법의 개발등에 대단히 유용하다.
Patent KR-20000005522-A (KR)
Title: Manufacturing method for toothbrush and toothbrush hair for massaging gums and brushing teeth
Inventor: GEORGE WIHACH
IPC: D02G1/14
Filed: 1997-04-12
Abstract: PURPOSE: A toothbrush is provided to massage gums and to brush teeth for cleaning teeth and for preventing a gingivitis and an alveolar blennorrhea. CONSTITUTION: A toothbrush is composed of:a handle(1); a head unit(2) working as a supporting unit of toothbrush hairs; plural toothbrush hairs(3); a wave top(5) forming an active operating surface of a toothbrush hair; a supplying reel(10) surrounded by a plastic continuous monofilament(11); a collecting reel(12) accepting a wave processed monofilament(13); and three shaping rollers(14), (15), (16) arranged continuously.
Patent KR-20000022464-A (KR)
Title: Method for minimizing hydrogen halide corrosion in a partial oxidation process
Inventor: STEVENSON JOHN SAUNDERS
IPC: C01B9/00
Filed: 1997-07-14
Abstract: PURPOSE: A method for minimizing hydrogen halide corrosion in quench gasifier during the non-catalytic partial oxidation reaction of a halogen-containing hydrocarbonaceous feed, to produce a hydrogen halide-containing synthesis gas, finely divided particulate solids, and a nontoxic slag is provided. CONSTITUTION: A hydrogen halide-containing synthesis gas is contacted with water in the quench zone (14) of the gasifier (10). The quench water contains a neutralizing agent, in excess of the amount necessary to neutralize hydrogen halide acids present therein, to thereby form halide salts. The quench water containing the halide salts is purified to recover the halide salts. The salt-free water is essentially environmentally non-toxic and can either be recycled to the process or discarded in conformity with environmental regulations. Therefore halide corrosion is substantially reduced or eliminated and an environmently clean water is generated.
Patent KR-20000052227-A (KR)
Inventor: JEONG SANG SIK
IPC: H04N5/74
Filed: 1999-01-30
Abstract: PURPOSE: An apparatus for aligning a liquid crystal panel of a liquid crystal display projector automatically is provided to adjust the position of the alignment of the liquid crystal display panel. CONSTITUTION: An apparatus for aligning a liquid crystal panel of a liquid crystal display projector automatically includes a light detector, a light converter(28), a light intensity comparator(42), a micro processor(22), an aligner controller(34) and an aligner mechanism/motor driver(36). The light detector detects the light projected on a screen. The light converter(28) converts the light intensity from the light detector into an electric signal. The light intensity comparator(42) compares the light intensity of the screen with a reference light intensity. The micro processor(22) generates a control signal based on a comparison signal from the light intensity comparator. The aligner controller(34) controls the alignment position of the liquid crystal display panel corresponding to the control of micro processor. The aligner mechanism/motor driver(36) adjusts the position of the liquid crystal display panel responding to the control of the aligner controller.
Patent KR-20000055421-A (KR)
Inventor: YEOM JIN SEOP
IPC: H04L12/28
Filed: 1999-02-05
Abstract: PURPOSE: A method for allocating virtual path identical/virtual circuit identical(VPI/VCI) for interprocess communication in an asynchronous transfer mode(ATM) switching system, is provided to perform interprocess communication free from the size of a message, by mapping with a peculiar logic address for processors in one sub-system to allocate additional VPI/VCI for interprocess communication. CONSTITUTION: A method for allocating virtual path identical/virtual circuit identical(VPI/VCI) for interprocess communication in an asynchronous transfer mode(ATM) switching system, comprises the operations of allocating the VPI/VCI by respective processors, by respectively mapping a processor logic address for a source processor with information on identification for a target processor and cell kinds. The processor logic address has a lower 7-bit for indicating respective processor addressed in a sub-system, an upper 3-bit unrelated to condition, and a 6-bit for indicating respective sub-system addressed between the lower 7-bit and the upper 3-bit. The VPI includes an unrelated condition field of 2-bit from upper, a cell kind field of 1-bit, an identification field for the target processor of 2-bit, and a field indicating upper 3-bit among respective sub-system addressed of 3-bit. And the VCI includes an unrelated condition field of 6-bit from upper, a field indicating lower 3-bit among respective sub-system addressed of 3-bit, an identification field for respective processor addresses of 7-bit.
Patent KR-20000060981-A (KR)
Inventor: LEE CHANG SEOK
IPC: E05B19/00
Filed: 1999-03-22
Abstract: PURPOSE: A lever lock for a front door is provided to reduce the cost for installing extra combinable door lock by enabling double locking, and promptly and easily lock and unlock. CONSTITUTION: In a lever lock for a front door having a box assembly wherein latch bolt and dead bolt are laid, and inner and outer plates wherein levers(6) are laid, an operation tool(22) slidably installed in the upper part of the inner plate(10) for being controlled its position by a spring(24), the upper end part of a protrusion piece(28) rotating at a regular radius on axis of a shaft pin(26) connected in a rear end part of the operation tool, and a protrusion groove(36) formed in a supporting frame opposite to the lower end part of the protrusion piece formed around a thumbturn pipe(30) in the state of locking a thumbturn(18).
Patent KR-20000061532-A (KR)
Inventor: LEE CHANG JIN
IPC: A23F3/00
Filed: 1999-03-23
Abstract: PURPOSE: Tea using the crust of overcooked rice is provided, such that one can completely absorb the taste and nutrition of the crust of overcooked rice. CONSTITUTION: The tea is prepared by freeze-drying the crust of overcooked rice or barley, or the crust of overcooked rice mixed with barley (or pulverizing the crust, mixing other additives, and drying); and seal-packing in a dose or a large quantity. If one takes the tea in water, the taste and nutrition of the crust of overcooked rice are absorbed completely.
Patent KR-19990083090-A (KR)
Title: 자외선 조사장치
IPC: H01J65/04
Filed: 1999-04-09
Abstract: 본 발명은, 자외선에 의한 반응생성물이 창부재에 부착하지 않고 자외선 방사 강도의 저하를 방지하여 이 반응생성물에 의한 먼지의 발생을 방지하기 위한 것으로, 용기(1) 내부에 유전체 배리어 방전 램프(2)가 배치되고 상기 용기(1)에 상기 유전체 방전 램프(2)로부터 방사되는 자외선을 빼내는 창부재(3)가 형성되어 이루어진 자외선 방사장치에 있어서, 상기 창부재(3)를 100。C 이상으로 가열하는 가열수단이 설치되어 있는 것을 특징으로 하는 자외선 조사장치에 관한 것이다.
Patent KR-20000066014-A (KR)
Inventor: JU CHEON GI
IPC: A61F9/007
Filed: 1999-04-12
Abstract: PURPOSE: A phacocyst stabilizing ring is provided to prevent a return of a cataract by restraining the growth of an epithelial cell toward an inside wall of the phacocyst. CONSTITUTION: A phacocyst stabilizing ring has two holes(21, 22) on both end of the bursting area and the diameter of the phacocyst is 0.16-0.25mm. A preventing sill(3) is formed to have an angle toward an inner direction of the phacocyst, an outer circumference side of a main body(1) of a phacocyst stabilizing ring. The curve rate(R) of the angle is from 0.015 to 0.035 and desirably 0.025. To form the preventing sill(3) on the main body(1), two preventing sills(3, 31) are desirably formed to front and back walls of the phacocyst(5) but one preventing sill(3) attached to the back wall having much growth of epithelial cells may be formed for convenient manufacture.
Patent KR-20000073842-A (KR)
Inventor: LEE U CHEOL
IPC: G05B19/05
Filed: 1999-05-14
Abstract: PURPOSE: A system and a method for testing programmable logic controller(PLC) are provided to produce a PLC at lower cost by reducing testing time and operators for PLC and to improve reliability of testing PLC. CONSTITUTION: A system and method for testing programmable logic controller(PLC) include an alternate sub PLC(2) and main PLC(3) connected to communication port of CPU in computer(1). A PLC(4) for test is connected to I/O bus of the sub PLC(2) and mounted on testing apparatus by an alternate jig. A selector switch(S1) for input and selector switch(S2) for output are connected between an I/O ports of the PLC(4) for test. A bar code scanner(5) reads and processes bar code of products. A measuring section(6) displays voltage and current of the PLC(4) of test. An image detector(7) monitors operations status of PLC(4) of test.
Patent KR-20000073857-A (KR)
Inventor: SHIN O SIK
IPC: F25D11/00
Filed: 1999-05-14
Abstract: PURPOSE: A multi-purpose Kimchi refrigerator is provided to maximize the spatial efficiency by placing papers, a vase or a telephone on a case wherein a Kimchi refrigerator is received. CONSTITUTION: A strut(32a) is formed on the lower end of a first support(32) and a combination portion(32c) inserted with a first upper panel(34) is formed on the upper end. Another strut(38a) is formed on the lower end of a second support(38) and another combination portion(38c) inserted with a second upper panel(36) on the upper end. A connecting portion(32b) for fixing the second upper panel is formed in the middle of the first support and fixed in the position corresponding to half the height of the first upper panel. The upper portion of the first support is divided into many pieces to adjust its height. Thereby, the height of the connecting unit is adjusted corresponding to the sitting height of housewives. According to the variation of the second upper panel height, the Kimchi refrigerator is used for a desk or a strut for multiple purposes corresponding to the shape of a user.
Patent KR-19990068525-A (KR)
Title: 광고겸용멀티미디어전화기
Filed: 1999-05-31
Abstract: 본 발명은 일반 전화회선을 이용하여 멀티미디어 데이터와 멀티미디어 광고데이터를 전송함으로써 전화기의 이용부가가치를 높인 광고겸용 멀티미디어전화기를 제공한다.  본 발명은 입출력수단; 상기 입력수단에서 입력된 멀티미디어 데이터를 디지털 변환하며, 전송되어 온 멀티미디어 데이터와 멀티미디어 광고데이터를 상기 출력수단에 출력가능한 신호로 변환하는 데이터 변환수단; 상기 디지털 변환된 멀티미디어 데이터를 압축하여 저장하며, 전송되어 오는 멀티미디어 데이터와 멀티미디어 광고데이터를 저장하고 압축되기 이전의 신호로 복원하는 데이터 압축복원 및 저장수단; 상기 저장된 멀티미디어 데이터를 변조하여 전화라인상으로 전송하고, 전송되어 오는 멀티미디어 데이터 또는 멀티미디어 광고데이터를 복조하여 상기 데이터 압축복원 및 저장수단으로 출력하는 변복조수단; 상기 각 수단을 제어하여 상기 입력된 멀티미디어 데이터가 상대방으로 전송되도록 하고, 전송되어 온 멀티미디어 데이터 또는 멀티미디어 광고데이터가 상기 출력수단에 출력되도록 하며, 상기 멀티미디어 데이터중 필요한 데이터를 검색하여 자동다이얼하는 제어수단을 포함하여 구성되며, 이러한 본 발명은 멀티미디어 데이터를 예약된 시간에 비실시간으로 전송함으로써 기존의 전화회선을 통하여 멀티미디어 데이터의 송수신을 가능하게 한다.
Patent KR-20010001231-A (KR)
Inventor: CHOI JEONG PIL
IPC: G09G3/296
Filed: 1999-06-02
Abstract: PURPOSE: A driving method and driving apparatus is provided to prevent contour noise by displaying gradation with a sequential scanning, and simplify circuit configuration. CONSTITUTION: A method comprises a radio frequency triggering step of simultaneously starting a radio frequency discharge throughout the scanning line of a PDP, and a selective erasing step of sequentially scanning the line where the radio frequency discharge is started and selectively supplying erase pulses to correspond to the luminance level of video signal. The radio frequency discharge is started by the radio frequency voltage supplied to the radio frequency electrode of the PDP, and a reset signal supplied simultaneously to the data electrode of the corresponding line. An apparatus comprises an A/D converter for sampling an analog video signal, a line memory for temporarily storing in scanning line units the sampling video signal output from the A/D converter, a controller for re-arranging the sampling video signal stored in the line memory in accordance with a luminance level and generating driving signals having time difference, and a data driving unit for supplying erase signals to address electrode lines of the PDP according to the driving signals output from the controller.
Patent KR-20010002118-A (KR)
Inventor: OH HYO JIN
IPC: G11C29/00
Filed: 1999-06-11
Abstract: PURPOSE: A mode distinguishing circuit within a semiconductor memory device is provided to confirm a currently set mode via a pin of the semiconductor memory device. CONSTITUTION: A mode distinguishing circuit within a semiconductor memory device includes a control signal generator(100) and a mode distinguishing signal generator(102). The control signal generator(100) generates a first control signal(C1) according to an output control signal(MD_CTRL). Also, the control signal generator(100) shifts the first control signal(C1) according to a system clock signal(SCLK) so that a second through a fifth control signals(C2-C5) are generated. The first through fifth control signals(C1-C5) and the first through a fifth mode signals(MD1-MD5) are inputted to the mode distinguishing signal generator(102). The mode distinguishing signal generator(102) controls output operation for the first through fifth mode signals(MD1-MD5) according to the first through fifth control signals(C1-C5).
Patent KR-20010003386-A (KR)
Inventor: KIM JAE GON
IPC: G11B27/10
Filed: 1999-06-23
Abstract: PURPOSE: An apparatus and a method for searching video using meaning information are provided to search a desired video easily among a large volume of video data by efficiently indexing through meaning information, that is, the number of moving things, color information, moving speed etc. CONSTITUTION: The apparatus for searching video using meaning information includes following units. An analog video acquisition unit(1) is a closed circuit TV(CC-TV) or a CCD camera generally used, produces an analog video signal and transmits the signal to an A/D conversion unit(2). The A/D conversion unit(2) converts the inputted analog signal into a digital signal and transmits the signal to a moving things region division and tracing unit(3). The moving things region division and tracing unit(3) divides the region and traces the moving things and transmits the coordinate of the moving things region to a meaning information extracting unit(4). The meaning information extracting unit(4) calculates the trace of the moving things according to the center of gravity and color information of materials corresponding to the meaning information.
Patent KR-20010005150-A (KR)
Inventor: CHO SEONG YUN
IPC: H01L27/10
Filed: 1999-06-30
Abstract: PURPOSE: A method for forming a capacitor of a semiconductor device is provided to ensure a charge storage capacitance of a large-capacity by using a silylation of a photoresist layer, using a polymer generated in etching the photoresist layer, and forming a cylinder-type charge storage electrode. CONSTITUTION: A conductive layer for forming a charge storage electrode is formed on a semiconductor substrate. The first photoresist layer(3) is deposited on the conductive layer, its surface part is selectively light-exposed according to a predetermined mask pattern, and then a silylation is performed. The second photoresist layer(4) is deposited on the first photoresist layer, its surface part is selectively light-exposed according to a predetermined mask pattern, and then a silylation is performed. The silylation part of the second photoresist layer is used as a mask, and the first and second photoresist layers are etched. A polymer sidewall is formed on a side of the etched photoreisist layer pattern. The conductive layer positioned to a polymer sidewall outer part is partially etched by using the photoresist pattern and the polymer sidewall as a mask. The first and second photoresist layers are etched by using the silylation part of the first photoresist layer as a mask. The polymer sidewall is formed on a side of the etched photoresist pattern. The residual photoresist layer is removed. The conductive layer of a predetermined thickness is etched by using the polymer sidewall as a mask. The residual polymer is removed.