Patent SG-11202000270S-A (SG)
Title: An ionization chamber chip for a nano-aperture ion source, method of fabrication thereof, and a proton beam writing system
Inventor: VAN KAN JEROEN ANTON
IPC: H01J37/08
Filed: 2018-07-27
Abstract: WIPOI PCT () INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau HIE VIII HIV lo mum Hi oimIE (10) International Publication Number WO 2019/022672 Al (43) International Publication Date 31 January 2019 (31.01.2019) Physics, 21 Lower Kent Ridge Road, Singapore 119077 (SG). XU, Xinxin; c/o National University of Singapore, Faculty of Science/Department of Physics, 21 Lower Kent Ridge Road, Singapore 119077 (SG). PATTABIRAMAN, Santhana Raman; c/o National University of Singapore, Faculty of Science/Department of Physics, 21 Lower Kent Ridge Road, Singapore 119077 (SG). PANG, Rudy; c/o National University of Singapore, Faculty of Science/De- partment of Physics, 21 Lower Kent Ridge Road, Singapore 119077 (SG). (74) Agent: VIERING, JENTSCHURA & PARTNER LLP; P.O. Box 1088, Rochor Post Office, Rochor Road, Singa- pore 911833 (SG). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, (51) International Patent Classification: HOM 27/20 (2006.01) H01.14 9 / 1 4 (2006.01) H01J 37/317 (2006.01) H01.137/08 (2006.01) (21) International Application Number: PCT/SG2018/050378 (22) International Filing Date: 27 July 2018 (27.07.2018) English English (25) Filing Language: (26) Publication Language: (30) Priority Data: 10201706169T 28 July 2017 (28.07.2017) SG (71) Applicant: NATIONAL UNIVERSITY OF SINGA- PORE [SG/SG]; 21 Lower Kent Ridge Road, Singapore 119077 (SG). (72) Inventors: VAN KAN, Jeroen Anton; c/o National Uni- versity of Singapore, Faculty of Science/Department of (54) Title: AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD OF FABRICATION THEREOF, AND A PROTON BEAM WRITING SYSTEM 1600 1602 providing a first substrate comprising a first depression formed in a back surface thereof 1604 providing a backing element attached at the back surface of the first substrate such that a chamber is formed comprising at least the first depression 1606 forming a gas inlet in the first substrate in fluid communication with the chamber 1608 forming a first aperture structure in the first substrate in fluid communication with the chamber W O 20 19/0 2267 2 Al Figure 16 (57) : An ionization chamber chip, a nano-aperture ion source, a proton beam writing system, and a method of fabricating an ionization chamber chip. The method comprises the step of providing a first substrate comprising a first depression foiined in a back surface thereof; providing a backing element attached at the back surface of the first substrate such that a chamber is formed comprising at least the first depression; fonning a gas inlet in the first substrate in fluid communication with the chamber; and forming a first aperture structure in the first substrate in fluid communication with the chamber. [Continued on next page] WO 2019/022672 Al IMEDIMOM0101011M0M0101011010Efinlini11011 KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) in black and white; the international application as filed contained color or greyscale and is available for download from PATENTSCOPE