baber/WOPTO huggingface dataset:
Patent KR-20120077720-A (KR)
Title: Servo press apparatus for curvature forming of metal member
Inventor: LEE KWANG HO
IPC: B30B1/18
Filed: 2010-12-31
Abstract: PURPOSE: A servo press apparatus for machining a curved surface of a metal member is provided to maintain enough strength over 10 tons in a lateral direction by applying surface pressure to four sides. CONSTITUTION: A servo press apparatus for machining a curved surface of a metal member comprises a tube(110), a motor(120), a speed reducer(130), a screw shaft(140), a motion switching unit(150), a ram(160), and guides(170). The motor is installed in one side of the tube. The speed reducer reduces rotation speed of the motor. The screw shaft is connected to the speed reducer and is installed in the tube along a longitudinal direction. The motion switching unit is thread coupled to the screw shaft and converts a rotational motion of the screw shaft to a linear motion. The ram is inserted between the screw shaft and the tube. The guides are installed along the outer circumference of the tube at a predetermined interval.
Patent KR-20100044794-A (KR)
Title: Image guided plaque ablation
Inventor: KNIGHT DONALD J
IPC: A61N7/02
Filed: 2008-06-24
Abstract: A method and system for reducing vascular plaque non-invasively comprising the steps of imaging at least a portion of a mammalian body to produce an image; determining the location of at least one vascular plaque in said image; ascertaining the location of the base of said vascular plaque, said locaiton of base being the target location; precisely determining the relative position of said target location with respect to the cardiac rhythm in the body; delivering a beam of ultrasound energy waves from a source to the relative position to elevate temperature of said target location in a pre-determined manner; monitoring the temperature of the target location; and discontinuing delivery of ultrasound energy waves when said target location achieves a predetermined set temperature.
Patent KR-20100049563-A (KR)
Title: A nitrogen oxideluminescent material, producing method and application of the same
Inventor: ZHANG XIAOLING
IPC: H01L33/50
Filed: 2008-04-09
Abstract: The present invention provides a nitrogen oxide luminescent material, a producing method and application of the same, which relating to the semiconductor field. The nitrogen oxide luminescent material has the following chemical formula: ABON: R, in which A is one or more of the substances: Be, Mg, Ca, Sr, Ba, Zn, B is one or more of Si, Ge, Zr, Ti, B, Al, Ga, In, Li, Na and contains at least Si. The luminescent material has chemical stability and excellent luminescent performance. The nitrogen oxide luminescent material can emit light in the region from blue green to red and be usedin white light LED, which can be excited by the ultraviolet or blue LED. The excited wave of the material is in the range of 300-500nm, while the emitting wave of the material is in the range of 470-700nm. The luminescent material can be used to manufacture a illuminating or displaying light source of white light LED by cooperating with blue LED or ultraviolet LED or near ultraviolet LED.
Patent KR-20100050508-A (KR)
Title: Imprint mode
Inventor: SANO HISATAKE
IPC: H01L21/027
Filed: 2008-06-30
Abstract: An imprint mold (1) for transferring a pattern by pressing a pattern region to a transferred film and curing the transferred film by irradiating light comprises a substrate (10) having a first major surface provided with a pattern region (12) and a second major surface opposing the first major surface, a first shading film (20) provided on the first major surface along the outer circumference of the pattern region (12), and a second shading film (22) provided on the second major surface while partially opposing the first shading film (20) and having an opening (24) including a region opposing the pattern region (12). On the cross-section perpendicular to the substrate (10), the maximum incident angle of the light for curing the transferred film to the second major surface is smaller than the angle made for the normal to the second major surface by a line connecting one end of the second shading film (22) on the side touching the opening (24) and one end of the first shading film (20) on the side farthest from the pattern region (12).
Patent KR-20100051696-A (KR)
Title: Oxidized avidin with high residency time in the treated tissues
Inventor: DE SANTIS RITA
IPC: A61P35/00
Filed: 2008-07-16
Abstract: The present invention describes chemically modified avidins that have higher permanence in treated tissues compared to wild type avidin. Avidin oxidation is performed by periodate incubation in the presence of the low affinity ligand HABA which, occupying the biotin binding sites, prevents protein denaturation during the oxidation step. Periodate oxidation generates CHO groups from avidin mannose ring opening that, once injected, react with tissue NHresidues to form stable Schiff's bases. The anchored avidins maintain the ability to bind biotinylated agents endowed of therapeutic activity, like radiolabeled biotins, stem cells and somatic cells, useful for brachytherapies like Intraoperative Avidination Radionuclide Therapy (IART®) or degenerative or genetic diseases.
Patent KR-20100040754-A (KR)
Title: Use of media storage structure with multiple pieces of content in a content-distribution system
Inventor: FARRUGIA AUGUSTIN J
IPC: G06F21/24
Filed: 2006-10-10
Abstract: Some embodiments of the invention provide a method for distributing content over a network. The method distributes a single media storage structure to a device (e.g., a computer, portable player, etc.) that connects to the network. The media storage structure includes first and second pieces of encrypted content. Based on whether the device is allowed to access the first piece of content, the second piece of content, or both, the method provides the device with a set of keys for decrypting the pieces of the content that the device is able to access. The provided set of keys might include one or more keys for decrypting only one of the two encrypted pieces of content. Alternatively, it might include one or more keys for decrypting both encrypted pieces of content. For instance, the selected set of keys might include a first key for decrypting the first encrypted piece and a second key for decrypting the second encrypted piece. Based on the provided set of keys, the device can then decrypt and access either one of the two pieces of content in the media storage structure or both pieces of encrypted content in the media storage structure.
Patent KR-20100033444-A (KR)
Title: Seamless switching between random access units multiplexed in a multi angle view multimedia stream
Inventor: TOMA TADAMASA
IPC: H04N7/58
Filed: 2005-06-01
Abstract: The multiplexing apparatus which does not make a user who watches a moving picture feel uncomfortable, the moving picture including: (i) a coding unit (42) for generating one or more coded streams so that no gap occurs at the connection of predetermined two access units in a process of decoding, in sequence, the two access units in all of the access units included in the coded streams; and (ii) a multiplexing unit (18) for multiplexing, with other information, the coded streams generated in the coding unit (42).
Patent KR-20100095522-A (KR)
Inventor: EVSTATIEVA ELITSA
IPC: C08L53/02
Filed: 2008-10-06
Abstract: 평균 입자 크기가 80 nm 내지 150 nm인, 비닐 방향족 및 공액 지방족 디엔으로부터 형성된 공중합체를 기재로 하는 수성 중합체 분산액은, (a) 1종 이상의 비닐 방향족 화합물 19.9 중량부 내지 80 중량부, (b) 1종 이상의 공액 지방족 디엔 19.9 중량부 내지 80 중량부, (c) 1종 이상의 에틸렌계 불포화 산 0.1 중량부 내지 10 중량부, 및 (d) 1종 이상의 다른 모노에틸렌계 불포화 단량체 0 중량부 내지 20 중량부 (상기 단량체 (a), (b), (c) 및 (d)의 중량부의 합계는 항상 100임)를, 사용되는 모든 단량체를 기준으로 0.9 중량％ 이상의, 퍼옥소디술페이트, 퍼옥소술페이트, 아조 개시제, 유기 퍼옥사이드, 유기 히드로퍼옥사이드 및 과산화수소로부터 선택되는 개시제를 사용하여 고유 점도 η가 0.07 dl/g 미만인 1종 이상의 분해 전분의 존재하에 수성 매질 중에서 자유 라디칼 개시 유화 공중합함으로써 수득가능하며, 개시제 중 적어도 30 중량％는 최초에 수성 매질에 분해 전분과 함께 충전되고, 단량체 및 나머지 개시제는 중합 조건 하에서 상기 최초 충전물에 계량 투입된다.  개시제 중 일부는 최초에 분해 전분의 수용액과 함께 반응기에 충전되고, 나머지 개시제 및 단량체는 중합 조건 하에서 계량 투입되는, 고유 점도 η가 0.07 dl/g 미만인 분해 전분의 존재하에 상기 단량체 (a), (b), (c) 및 임의로는 (d)를 유화 중합함으로써 상기 분산액을 제조하는 방법, 및 결합제, 접착제 및 섬유용 사이징제(size)로서의 또는 코팅의 제조를 위한 상기 수성 중합체 분산액의 용도를 개시한다.
Patent KR-20100095430-A (KR)
Inventor: MALLAIS TAMMY
IPC: C07D333/38
Filed: 2008-11-03
Abstract: 본 발명은 HDAC 효소 활성의 저해를 위한 화합물 및 방법에 관계한다. 더욱 구체적으로, 본 발명에서는 화학식 (I)의 화합물, N-산화물, 수화물, 용매화합물, 제약학적으로 허용되는 염, 이들의 프로드러그 및 복합체, 그리고 이들의 라세미와 스칼레믹(scalemic) 혼합물, 부분입체이성질체 및 거울상이성질체를 제시한다: 
   (I) 
여기서 L, M, n, R, W, X와 Y는 본 명세서에서 정의된 바와 동일하다.
Patent KR-20100087037-A (KR)
Inventor: UEDA NOBUYUKI
IPC: B65B55/04
Filed: 2008-12-02
Abstract: 슈트식의 캡 세정 살균 장치에 있어서 슈트 내에서의 합성수지 캡에 작용하는 적압을 완화해서 캡의 변형을 방지하고, 또한 상류측에서 분사된 온수나 무균수가 하류측의 온수나 무균수에 미치는 영향을 적게 해서 효율 좋게 살균 세정할 수 있도록 한다. 슈트(5)는 상승 구배 슈트부(7,9)를 갖고, 이 상승 구배 슈트부를 따라 살균 세정 매체로서의 온수를 분사하는 복수개의 분사 노즐을 갖는 온수 파이프를 배치하고, 상기 상승 구배 슈트부에 공급된 캡에 온수를 분사하고, 이 온수의 분사 압력에 의해 상기 캡(35)에 상기 상승 구배 슈트부를 상승하는 추력을 부여해서 상기 살균 세정 매체에 의해 캡을 살균 세정함과 아울러 반송을 행한다.
Patent KR-20100099213-A (KR)
Inventor: ONSOYEN EDVAR
IPC: A01N63/50
Filed: 2008-10-24
Abstract: 본 발명은 바이오필름에 알기네이트 올리고머를 접촉시키는 단계를 포함하는 바이오필름의 퇴치 방법을 제공한다.  상기 바이오필름은 생물 또는 무생물 표면일 수 있으며, 의학적 및 비-의학적 용도와 방법을 모두 제공한다.  본 발명은 일 측면으로 개체에서 바이오필름 감염의 치료 또는 예방하기 위한 알기네이트 올리고머를 제공한다.  상기 방법은 다른 측면에서 바이오필름을 무생물 표면에서 퇴치, 예컨대 소독 및 청결하게 하는 목적으로 사용할 수 있다.
Patent KR-20120013179-A (KR)
Title: Method and system for progressive rate adaptation for uncompressed video communication in wireless systems
Inventor: SHAO HUAIRONG
IPC: H04B7/26
Filed: 2010-04-12
Abstract: PURPOSE: A progressive rate controlling method and a system thereof through a non-compact image communication in a wireless system are provided to receive non-compact image pixel information and to control transmission data rate. CONSTITUTION: A wireless transmission device(11) obtains pixel information of non-compression video pixels. The wireless transmission device controls transfer rate of data in order to obtain rate-reduced pixel information. The wireless transmission device transmits rate-reduced pixel information through wireless communication medium.
Patent KR-20100114055-A (KR)
Inventor: FUKUMINE MAYUMI
IPC: H01M50/443
Filed: 2009-01-30
Abstract: 본 발명은 2차 전지 등에 사용되는 전극의 표면에 형성되는 다공막에 있어서, 막 균일성이 우수하고 전지의 사이클 특성, 레이트 특성의 개선에 기여할 수 있는 다공막을 제공하는 것을 목적으로 한다.     본 발명의 다공막은, 평균 중합도가 500 ~ 2500 인 수용성 고분자와, 무기 필러와, 비수용성의 입자 형상 고분자를 함유하여 이루어지는 것을 특징으로 한다.     특히 본 발명에서는, 상기 수용성 고분자가 증점 다당류인 것이 바람직하고, 나아가 셀룰로오스계 반합성계 고분자, 그 나트륨염 및 암모늄염으로 이루어지는 군에서 선택되는 것이 바람직하다.
Patent KR-20100126391-A (KR)
Inventor: SAINT LAURENT MARTIN
IPC: H03K19/00
Filed: 2009-02-03
Abstract: 슬립 상태 전류 누설을 감소시키기 위한 회로(100)가 설명된다.  이 회로(100)는 래치, 플립플롭, 비교기, 멀티플렉서 또는 덧셈기 중 적어도 하나로부터 선택되는 하드웨어 유닛(102)을 포함한다.  하드웨어 유닛(102)은 제 1 노드(110)를 포함한다.  하드웨어 유닛은 또한 제 1 노드에 연결되는 슬립 인에이블 조합 로직(104)을 포함하며, 슬립 상태 동안 제 1 노드의 값이 유지된다.
Patent KR-20100133384-A (KR)
Inventor: DE LA PUENTE EDMUNDO
IPC: G01R31/28
Filed: 2009-02-23
Abstract: 발명의 일 실시예에 따르면, 시스템이 동작 중에 입력 테스팅 신호(input testing signal)를 수신하기 위한 제1 단자; 및 상기 제1 단자와 결합된 복수의 입력/출력 단자를 포함하고, 상기 입력/출력 단자들은 평행 출력 동작(parallel output operation) 중에 출력 테스팅 신호들(output testing signals) 각각에 대해 출력을 평행(parallel)하게 하도록 구성되고, 상기 입력/출력 단자들은 테스트 중인 장치들로부터 평행 입력 동작(parallel input operation) 중에 입력 테스팅 응답 신호들(input testing response signals)을 평행하게 하도록 구성되고, 각각의 상기 입력/출력 단자들은 동작 중에 상기 복수의 입력/출력 단자 중 남아있는 것들로부터 전기적으로 격리되는(electrically isolated) 시스템이 제공된다.
Patent KR-20110020856-A (KR)
Inventor: KWAK BYUNG SUNG
IPC: H01M10/36
Filed: 2009-05-20
Abstract: 박막 전지의 층을 제조하는 방법은 스퍼터링 타겟을 제공하는 단계 및 플라즈마 공정의 결합으로 인해 향상된 물리 기상 증착 공정을 이용하여 기판 상에 층을 증착하는 단계를 포함한다.  증착 공정은, (1) 타겟과 기판 사이에 플라즈마를 발생시키는 단계; (2) 타겟을 스퍼터링하는 단계; (3) 플라즈마에 마이크로웨이브 에너지를 공급하는 단계; 및 (4) 기판에 라디오 주파수 전력을 인가하는 단계를 포함한다.  박막 전지 캐소드층의 스퍼터링 타겟은, LiM a N b Z c 의 평균 조성을 가지며, a 내지 c는 0.20 > {b/(a+b)} > 0의 관계를 만족하고, a 대 c의 비율은 상기 캐소드층의 바람직한 결정 구조의 화학 양론비(stoichiometric ratio)와 거의 동일하며, N은 알칼리 토류 원소(alkaline earth element)이고, M은 Co, Mn, Al, Ni 및 V로 구성되는 그룹으로부터 선택되며, Z는 (PO 4 ), O, F 및 N으로 구성되는 그룹으로부터 선택된다.
Patent KR-20120078933-A (KR)
Title: Solar cell and method for manufacturing the same
Inventor: MUN JIN SOO
IPC: H01L31/042
Filed: 2011-01-03
Abstract: PURPOSE: A solar cell and a manufacturing method thereof are provided to improve the rate of light absorption by broadening a surface area of accepting light through surface systematization of the frond side of a semiconductor substrate. CONSTITUTION: A plurality of concave parts(50) is formed on the front side of a semiconductor substrate(110). An emitter layer(130) is formed on the concave part of the semiconductor substrate. A first doping area(112) and a second doping area(114) which are doped by different impurities are formed on the flat part of the semiconductor substrate. An insulating film(115) is formed on the one surface of the semiconductor substrate with surface systematization. An electrode(120,140) is formed on the flat part of the semiconductor substrate.
Patent KR-20120080055-A (KR)
Title: Led device
Inventor: LIM HO KYOUNG
IPC: H05B37/02
Filed: 2011-01-06
Abstract: PURPOSE: An LED device is provided to control the lighting device of an LED unit by connecting the LED unit with an AMI network through optical wireless communication network. CONSTITUTION: An LED unit(400) includes LEDs(417,417') and light receiving units(418,418'). An AMI(Advanced Metering Infrastructure) network is formed as a PLC(Power Line Communication) network. The AMI network inputs or outputs power source and control signal to the LED unit. A PLC(Power Line Communication) modem connects the LED unit and the AMI network through the PLC network. According to the light amount of the light receiving unit, security/environment sensing units(611~613) senses the security state, or the environment variable.
Patent KR-20120080269-A (KR)
Title: Vacuum cleaner for cutting fluid
Inventor: KIM JAE HONG
IPC: B23Q11/00
Filed: 2011-01-07
Abstract: PURPOSE: A cutting oil suction and cleaning apparatus is provided to improve efficiency of a user by injecting separated cutting oil from the air to a storage tank by using blowing performance of a power unit. CONSTITUTION: A cutting oil suction and cleaning apparatus comprises a main body(1), a filter unit(2), an inflow line(3), a gas separating unit(4), and a power unit. The main body has an empty space(A). The filter is installed separately from the bottom of the empty space. The inflow line is connected to the main body and sucks waste cutting oil. The gas separating unit separates the air and waste cutting oil. The power unit is connected to the main body and sucks and exhausts the air.
Patent KR-20120081892-A (KR)
Title: Cart including sliding shelf
Inventor: CHOI DUK MO
IPC: B62B3/12
Filed: 2011-01-12
Abstract: PURPOSE: A transporting cart with a sliding shelf is provided to easily move heavy goods and to facilitate repair and replacement of the heavy goods without assembly and disassembly of an upper shelf. CONSTITUTION: A transporting cart with a sliding shelf comprises a base frame(100), a vertical frame(200), an upper shelf(300), rail frames(400), an auxiliary base frame(500), and an intermediate shelf(700). At least one wheel is coupled at the bottom edges of the base frame. The vertical frame is vertically coupled to each edge of the base frame at a predetermined length. The upper shelf is coupled to upper one end of the vertical frame. The rail frames are coupled in parallel at the top of the base frame. The auxiliary base frame slides along an opening of the rail frames. One side of the intermediate shelf is coupled to the top of the auxiliary base frame.
Patent KR-20120083095-A (KR)
Title: Duct unit with micro tube for optical fiber and product method thereof
Inventor: SEO SEONG NAM
IPC: G02B6/46
Filed: 2011-01-17
Abstract: PURPOSE: A duct unit including a micro tube for an optical fiber and a producing method thereof are provided to prevent foreign materials from being inputted to the micro tube by improving the airtightness of the micro tube using an external pipe and fillers. CONSTITUTION: A micro tube assembly comprises a plurality of micro tubes(10). An optical fiber or an optical cable is built in the micro tube. An external pipe(20) surrounds the micro tube assembly. Fillers(30) filled between the micro tube assembly and the external pipe.
Patent KR-20120085594-A (KR)
Title: Gridiron
Inventor: JUNG MU SUNG
IPC: A47J27/00
Filed: 2011-01-24
Abstract: PURPOSE: A grill is provided to improve the thermal efficiency of a burner by allowing flames to touch the whole outer surface of a container. CONSTITUTION: A grill comprises a main body(10) and a flame guide module(20). The main body comprises multiple air vent holes(12). The flame guide module comprises a guide wall(21), a flange part(22), support protrusions(24), and flame guide parts(23). The flange part is protruded outward from the top of the guide wall. The support protrusions are protruded inward from the bottom of the guide wall and support a container. The flame guide parts are formed on the inner surface of the guide wall in a spiral shape and guide flames.
Patent KR-20110089098-A (KR)
Title: Back light and liquid crystal display device
Inventor: IZUTANI SEIJI
IPC: G02F1/13357
Filed: 2011-01-31
Abstract: PURPOSE: A backlight unit of a liquid crystal display device is provided to efficiently emit heat which is generated from a light generating unit. CONSTITUTION: A backlight unit(3) of a liquid crystal display device comprises a light emitting unit(4) which emits light to a liquid crystal panel(2) and a heat radiation member(5) which is contacted to the light emitting unit. The heat radiation member is made of a heat conduction sheet including a plate shape boron nitride particle. The thermal conductivity of the orthogonal direction about the thickness direction is 4W/m·K or greater.
Patent KR-20120090437-A (KR)
Title: Frame cutting machine
Inventor: LEE DAE WOON
IPC: B23D45/10
Filed: 2011-02-08
Abstract: PURPOSE: A machine for cutting a frame is provided to make upper and lower parts of the frame stepped without resetting the frame by driving first and second horizontal saws. CONSTITUTION: A machine(100) for cutting a frame comprises a table(10), a first horizontal saw(30), a second horizontal saw(40), and a vertical saw(50). The frame is set on the table. The first and second horizontal saws horizontally cut the frame at different positions. The vertical saw vertically cut the frame. The inclination of the vertical saw is controlled at a predetermined angle. The first and second horizontal saws are placed across each other. The second horizontal saw is thicker than the first horizontal saw.
Patent KR-20120102178-A (KR)
Title: System for training of cpr and defibrillator with including educational program
Inventor: YANG SEUNG JIN
IPC: G09B23/28
Filed: 2011-02-16
Abstract: PURPOSE: A system for training a defibrillator and cardio pulmonary resuscitation including an education program is provided to enable a practicer to feel tension and reality such as a real situation. CONSTITUTION: A training system is composed of a simulator and a terminal. The simulator forms a human body shape for training cardio pulmonary resuscitation and a defibrillator. The terminal includes a display unit(210), an operation unit(220), a communication unit(230), a sound output unit(240), and a control unit(260). The display unit outputs a video related to the cardio pulmonary resuscitation and the defibrillator training operation The operation unit inputs information from a user. The communication unit outputs sensing information from the simulator by processing a wire or a local area wireless transmitting/receiving. The sound output unit outputs by generating training process information as an audible type. The control unit operates the simulator through the communication unit according to a cardio pulmonary resuscitation training request from the user. The control unit outputs a practical screen using the simulator for the cardio pulmonary resuscitation training in the display unit. [Reference numerals] (210) Display unit; (220) Operation unit; (230) Communication unit; (240) Sound output unit; (250) Memory; (260) Control unit; (270) Interface unit
Patent KR-20110098650-A (KR)
Inventor: MING TIEN LIN
IPC: A61M5/34
Filed: 2011-02-23
Abstract: 주사 바늘 안전캡은 몸체 및 하나 이상의 홀딩 부분을 갖는다. 상기 몸체는 관 형상이며, 외면, 폐구부, 개구부, 챔버 및 직경을 갖는다. 상기 챔버는 주사 바늘을 포함하도록 상기 몸체 내에서 폐구부와 개구부 사이에 한정된다. 하나 이상의 홀딩 부분은 상기 몸체 상에 형성되며, 상기 하나 이상의 홀딩 부분은 확장 스템을 갖는다. 상기 확장 스템은 상기 몸체 상에 형성되며, 상기 몸체의 반대편에 유리 말단을 갖는다. 사용 시, 상기 확장 스템은 주사 바늘이 주사 바늘 안전캡의 몸체로부터 제거되거나 교체될 때 상기 주사 바늘의 팁으로부터 손이 상처를 입는 것을 방지할 수 있다.
Patent KR-20120097783-A (KR)
Title: Device for walking assistance
Inventor: SONG WON KYUNG
IPC: A61H3/00
Filed: 2011-02-25
Abstract: PURPOSE: A walking aid device is provided to selectively or simultaneously support a user from the front and rear of the user. CONSTITUTION: A walking aid device comprises a user frame(100) and a supporting frame(300). The user frame supports the upper body of a user. The supporting is combined with a user frame and supports the user frame. The user frame can be detachable from the supporting frame. The supporting frame comprises a wheel unit including a plurality of wheels, a pair of wheel connection units, a lower support unit, and a pair of connection support units in which one end thereof is connected to the wheel connection unit and the other end thereof is connected to the user frame.
Patent KR-20120097861-A (KR)
Title: Novel phenylurea or phenylthiourea derivatives, pharmaceutically acceptable salts thereof, preparation method thereof and pharmaceutical composition for prevention or treatment of diseases induced by influenza virus containing the same as an active ingredient
Inventor: HAN CHEOL KYU
IPC: A61P31/16
Filed: 2011-02-25
Abstract: PURPOSE: A phenylurea or phenylthiourea derivative is provided to be used for treating and preventing diseases caused by influenza virus by having excellent effect restraining increase of influenza virus. CONSTITUTION: A phenylurea or phenylthiourea derivative or a pharmaceutically acceptable salt is in chemical formula 1. In chemical formula 1, R^ is C6-8 aryl, or C6-8 aryl C1-2 alkyl, R^2 is -(CH2)n-R^7, or -CH-R^6R^7, R^3 is C1-10 linear or branched alkyl, R^4 is C3-6 cycloalkyl, R^5 is C1-10 linear, or branched alkyl or -NH2, R^6 is C1-4 linear or branched alkyl, C6-8 aryl, or -CH2-OR^3, R^7 is C6-8 aryl, 5-8membered heteroaryl, 5-8membered heterocycloalkyl, 5-8 membered heterocycloalkyl, C6-8 aryl, -COOR^3, or -N(R^3)2, and X is oxygen, nitrogen, or sulfur.
Patent KR-20120098046-A (KR)
Title: 반도체장치의 소자분리 방법
Inventor: KIM MYUNG OK
IPC: H01L21/76
Filed: 2011-02-28
Abstract: 본 발명은 HEIP를 억제하며, 활성영역의 손실을 방지할 수 있는 반도체장치의 소자분리 방법을 제공하기 위한 것으로, 본 발명의 반도체장치의 소자 분리 방법은 셀영역과 주변회로영역이 정의된 반도체기판을 준비하는 단계; 상기 주변회로영역의 반도체기판을 식각하여 제1트렌치를 형성하는 단계; 1차 산화공정을 통해 상기 제1트렌치의 표면을 산화시키는 단계; 상기 표면이 산화된 제1트렌치를 덮는 라이너질화막을 형성하는 단계; 상기 셀영역의 반도체기판을 식각하여 제2트렌치를 형성하는 단계; 2차 산화공정을 실시하여 상기 제2트렌치의 표면과 상기 라이너질화막을 산화시키는 단계; 및 상기 제1,2트렌치를 갭필하는 소자분리막을 형성하는 단계를 포함하며, 상술한 본 발명은 주변회로영역에 형성되는 측벽산화막의 두께를 선택적으로 두껍게 형성하므로 HEIP를 개선할 수 있는 효과가 있고, 또한, 본 발명은 셀영역과 주변회로영역에서 트렌치를 각각 개별적으로 형성하므로써 활성영역의 임계치수 및 트렌치의 깊이를 독립적으로 제어할 수 있다.