Patent SG-11201900508U-A (SG)
Title: Adjusting an amount of coherence of a light beam
Inventor: BIBBY THOMAS
IPC: H01S3/00
Filed: 2017-08-17
Abstract: sssOptk n 1 Pith CUM toap Optical Path El al Signal Path FIG: . 5A , ------- • ---------- 443 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 08 March 2018 (08.03.2018) WIP0 I PCT omit °nolo olo Ho mil Em mil °nom oimIE (10) International Publication Number WO 2018/044583 Al (51) International Patent Classification: G01J 3/02 (2006.01) GO1J 3/12 (2006.01) G01J 3/10 (2006.01) HOlS 3/00 (2006.01) (21) International Application Number: PCT/US2017/047449 (22) International Filing Date: 17 August 2017 (17.08.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15/256,196 02 September 2016 (02.09.2016) US (71) Applicant: CYMER, LLC [US/US]; 17075 Thornmint Court M/S 4-2C, San Diego, CA 92127-2413 (US). (72) Inventors: BIBBY, Thomas, Frederick, Allen; 17075 Thornmint Court, San Diego, CA 92127-2413 (US). THORNES, Joshua, Jon; 17075 Thornmint Court, San Diego, CA 92127-2413 (US). ROKITSKI, Rostislav; 17075 Thornmint Court, San Diego, CA 92127-2413 (US). DUFFEY, Thomas, Patrick; 17075 Thornmint Court, San Diego, CA 92127-2413 (US). (74) Agent: NGUYEN, Joseph; Cymer, LLC, Corporate I.P. Dept, M/S 4-2C, 17075 Thornmint Court, San Diego, CA 92127-2413 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. = (54) Title: ADJUSTING AN AMOUNT OF COHERENCE OF A LIGHT BEAM 00 O 00 O O (57) : Techniques for controlling an optical system include accessing a measured value of a property of a particular pulse of a pulsed light beam emitted from the optical system, the property being related to an amount of coherence of the light beam; comparing the measured value of the property of the light beam to a target value of the property; determining whether to generate a control signal based on the comparison; and if a control signal is generated based on the comparison, adjusting the amount of coherence in the light beam by modifying an aspect of the optical system based on the control signal to reduce an amount of coherence of a pulse that is subsequent to the particular pulse. [Continued on next page] WO 2018/044583 Al MIDEDIMOMOIDEIREEMOMMOIVIIIIII111111110111111111111 (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))