baber/WOPTO huggingface dataset:
Patent KR-20000032378-A (KR)
Title: Prevention device for dropping of pcb in refrigerator
Inventor: JUNG IL SIK
IPC: F25D23/00
Filed: 1998-11-13
Abstract: PURPOSE: A prevention device for dropping of PCB(Printed Circuit Board) in a refrigerator is provided to prevent misoperation and breakdown of the refrigerator from occurring due to dropping by detecting the dropping in the inside of PCB and removing the detected dropping by driving a heater as much as detected. CONSTITUTION: A prevention device for dropping of PCB in a refrigerator includes a bridge circuit (10) having a first thermistor(R1) sensing the open air humidity of the refrigerator and a second thermistor(R2) sensing the humidity of inside of the refrigerator to maintain the balance, an inverting amplifier(20) outputting a high signal if a voltage output corresponding to the humidity detected in the second thermistor is under a predetermined reference voltage, a microcomputer(70) outputting a predetermined control signal to correspond to the volume of applied voltage if the voltage output from the inverting amplifier is applied, and a heater driving part operating a heater to correspond to the volume of the voltage by operating a relay(90) when the control signal is output from the microcomputer(70).
Patent KR-19990014541-A (KR)
Title: 만능 리모콘장치
Filed: 1998-11-21
Abstract: 본 발명은 만능 리모콘(Universal Remote Controller)의 제품 코드 입력 방법 및 장치에 관한 것으로 제품을 나타내는 고유번호를 입력하는 종래의 방법과는 달리 제품 제조자를 나타내는 영문 글자를 직접 입력하도록 하여 사용자가 쉽게 제품의 코드를 선택 할 수 있게 한 것으로 특히 만능 리모콘 사용자가 제품 설명서(Users Manual)를 분실하여 제품의 고유번호를 입력할 수 없을 때에도 쉽게 제품의 코드를 입력 및 선택 할 수 있도록 한 것이다.
Patent KR-20000033577-A (KR)
Title: Apparatus for separating the saccharified liquid automatically
Inventor: KIM JONG SUB
IPC: A23L1/09
Filed: 1998-11-24
Abstract: PURPOSE: An apparatus for separating the saccharified liquid automatically is provided, CONSTITUTION: The apparatus comprises a pressing bottle (38) containing a plurality of concave holes which is arranged perpendicular to the inner circumference; at least one filtering cloth which is constructed inside of the bottle and can be separated; a hydraulic press (40) which separates a saccharine liquid from sludge by pressing the saccharified liquid charged in the pressing bottle (38); a plurality of hydraulic casters which separates and lifts the pressing bottle (38) from the ground for allowing the pressing bottle (38) to be moved easily; and a moving apparatus which moves the pressing bottle (38) from the hydraulic press (40) to the direction of an axis when the separated sludge is removed and the new saccharified liquid is charged in the pressing bottle (38).
Patent KR-19990062897-A (KR)
Title: 박막 자기헤드 및 그 제조방법
IPC: G11B5/39
Filed: 1998-12-08
Abstract: 먼저 자기저항효과 소자층 (3) 의 높이방향의 길이 치수를 결정한 후,  트랙 폭방향의 폭 치수를 결정하고,  마지막으로 바이어스층 (4) 과 전극층 (5) 의 성막 (成膜) 을 수행한다.     특히, 본 발명에서는 높이 방향의 길이를 결정한 후, 중간 갭층 (6) 을 성막하기 때문에, 다음 공정에서 이용되는 레지스트층을  평탄화된 표면에  형성할 수 있다.     또, 본 발명에서 이용되는 레지스트층은 모두 리프트 오프용이다.     본 발명의 제조방법을 이용하면, 종래와 같은 문제가 발생하지 않아, 자기저항효과 소자층 (3) 을 소정의 형상으로 고정밀도로 형성할 수 있다.
Patent KR-20000039695-A (KR)
Title: Memory device having redundant memory block
Inventor: SAI SI JUNG
IPC: G11C29/00
Filed: 1998-12-15
Abstract: PURPOSE: A memory device is provided to replace memory cells having defects inside a MMB(main memory block) to reserve memory cells of a RMB(redundant memory block) in a byte unit by performing the byte unit. CONSTITUTION: A capacity of a MMB(313) and RMB(413) are each (1kX8) bit and (32X8) bit. Each address is able to be stored 8-bit data and is needed ten address lines(IA0-IA9) for transmitting an internal address signal(IA). Five address lines(IA0-IA4) are electrically connected with a decoder(311) to decide addresses of 32 rows of memory cell and the rest five address lines(IA5-IA9) are electrically connected with a decoder(312) to decide addresses of 32 columns of memory cell. Therefore, the address inside the MMB(313) is selected through decoders(311,312). A block selecting signal(SA) is transmitted to the decoder through an address line(IA10) to select one of the MMB(313) and the RMB(314). When the address line(IA10) is a logical level of '0', the decoder(312) selects memory cell of one row inside the MMB(313). When the address line is the logical level of '1', the decoder(312) selects the RMB(314) to select a corresponding storing address connected with the decoder(311).
Patent KR-20000040223-A (KR)
Title: Apparatus for testing open-air storage of circular tubes
Inventor: KANG HO GYUNG
IPC: G01L7/00
Filed: 1998-12-17
Abstract: PURPOSE: An apparatus for testing an open-air storage of a circular tubes is provided to effectively manage the circular tubes by testing dynamic behavior of the circular tubes under an identical condition of an actual open-air storage state. CONSTITUTION: An apparatus for testing an open-air storage of a circular tubes includes a pressure tester(10) with a pair a pressures(12). A pair of test devices(20) having two support circular tubes(24) having a size same as that of a test member(14) is disposed facing the pressures(12) to prepare an identical condition to the actual open-air storage state. The support circular tubes(24) apply pressure on upper and lower sides of the test member(14).
Patent KR-20000028537-A (KR)
Title: Screw having ribs
Inventor: FARGANT HEAN PAUL
IPC: F16B25/00
Filed: 1998-12-28
Abstract: PURPOSE: A screw having ribs is provided to completely cover itself to a component to drive a screw and to shorten the time required to drive the screw. CONSTITUTION: A screw includes a screw part(1) and a head(2) having a dish-shaped hole. The two parts are connected to an intermediate conical part(3). The intermediate conical part reduces the danger, distributes the force to drive a screw into the end of an object as well as reinforces the connection. Also, the head is arranged on a surface(20) of the conical part, connected between an upper edge(22) and a base(23) of the head and includes a rib(21) inclined toward the direction to drive the screw. The rib has a triangular section so the screw as to be completely covered.
Patent KR-20000043969-A (KR)
Title: Non-volatile fram
Inventor: KANG HEE BOK
IPC: G11C11/22
Filed: 1998-12-29
Abstract: PURPOSE: A non-volatile FRAM(ferroelectric random access memory) is provided to improve an operating characteristic and to lengthen a life by uniformly maintaining a bit line inducing voltage by a reference cell and a bit line inducing voltage by a main cell with equalizing an accessed number of the main cell and the reference cell. CONSTITUTION: A voltage of node N3 is used as a gate input of a fourth NMOS transistor(MN4). A voltage of output terminal is used as the gate input of a fifth NMOS transistor(MN5). If the voltage of node N3 is larger than the voltage of output terminal, a voltage of node N4 is lessened and a voltage of N5 is enlarged. The lessened voltage of node N4 enlarges an on resistance of ninth NMOS transistor(MN9) by feeding back to the ninth NMOS transistor(MN9). A level of the output terminal is raised by decreasing an amount of current discharged to the output terminal. If the voltage of node N3 is smaller than the voltage of output terminal, the voltage of node N5 is lessened and the voltage of node N4 is enlarged. The enlarged voltage of node N4 lessens the on resistance of the ninth NMOS transistor(MN9) by feeding back to the ninth NMOS transistor(MN9). The level of the output terminal is decreased by increasing the amount of current discharged to the output terminal.
Patent KR-19990067648-A (KR)
IPC: A61B7/04
Filed: 1996-11-14
Abstract: The pick-up head (1) with an acousto-electrical transducer (4) for converting sound vibrations to electrical signals, comprises as characterizing features a sound influencing bell (2) arranged around a slender peg (3) bonded directly to the transducer (4), and the sound influencing bell (2) delimits a listening area on a body surface and influences to a predetermined degree and in a predetermined manner, by means of internal reflection and/or absorption, the direct sound picked up by the slender center peg (3). The bell (2) is acoustically decoupled from the center peg (3).
Patent KR-19990077352-A (KR)
Title: 혼합 헤드 추출기
IPC: B67D7/34
Filed: 1997-01-17
Abstract: 추출기 장치(20)는 유체가 에어 갭(32)으로부터 추출기(42)로 흐르도록 향하는 유체 인입 포트(30)를 포함한다. 리브(38)는 추출기(42)에서 튀어오르는 유체를 편향시켜서, 유체가 에어 갭 포트(34)로부터 유출되는 것을 방지한다. 추출기(42)는 유체 귀속을 보장하기 위해 특별히 설계된 외표면(116)과 인입 포트(44)를 갖는 단일 구조물로서, 외표면(116)에서 튀어올라 에어 갭 포트(34)측으로 역류하는 유체의 양을 저감시킨다.
Patent KR-19990087731-A (KR)
Title: 수동식 오동작 안전기를 가진 전자 브레이크 관리 시스템
IPC: B60T7/04
Filed: 1997-03-07
Abstract: 본 발명은 시스템의 페달 느낌을 향상시키는 잇점을 가지면서, 시스템의 임의 성분의 제조가 경제적이도록 양호한 설계로 이루어진 개량된 전자-유압식 브레이크 시스템을 제공하는 것이다.  시스템은 압축 유압성 브레이크 유체의 전기 파워 노말 소스(42)와, 그리고 노말 소스의 고장 발생 시, 차량 브레이크에 압축 유압성 브레이크 유체의 수동식 파워 백업 소스(12)를 제공하는 것이다.  정상적 제동 중에, 백업 소스로부터의 유체는 차량 브레이크로부터 페달 시뮤레이터로 새롭게 방향지게 된다.  양호하게, 페달 시뮤레이터(26)에는, 차량 제동 중에 향상된 페달 감을 제공하는 페달 시뮤레이터로 그로부터 유체의 흐름을 선택적으로 제어하는 밸브와 함께 하는, 댐핑 오리피스 및 확장 체적, 그리고 스프링 부하 피스톤이 정렬 배치된 설비가 포함된다.  본 발명의 브레이크 시스템은 부가로 백업 소스와 노말 소스와의 사이에 압축 유체간의 상호 혼합을 방지하는데 제공되는 상당히 저가의 유체 분리기를 구비한다.  유체 분리기는 차량 브레이크를 동작시키는데 노말 소스가 백업 소스의 유압성 브레이크 유체에 동작하도록 허용하도록 작동한다.  유체 분리기는 양호하게 각각이 동일한 직경인 2개 작업 면을 가진 피스톤으로 실시되는 것이다.
Patent KR-20000015828-A (KR)
Title: Two-side coated label facestock
Inventor: JENSEN TERRY OTTO
IPC: G09F3/02
Filed: 1997-03-28
Abstract: PURPOSE: A label face stock is provided to improve the adhesion of a pressure releasing glue or a pressure releasing adhesive to the label face stock. CONSTITUTION: A label face stock structure is described which comprises a polymeric film substrate having on a first surface thereof (A) an adhesive anchor layer and on a second surface thereof (B) an ink base layer, the (A) and (B) layers are selected from the group consisting of:(i) a prime coating having on an external surface a functional coating of an interpolymer of (a) an alpha, beta-monoethylenically unsaturated carboxylic acid; and (b) a neutral monomer ester comprising an alkyl acrylate ester and an alkyl methacrylate ester; and (ii) an iminated polymer; or the (A) adhesive anchor layer is selected from the group consisting of:(iii) a mixture of the functional coating of (i) and the iminated polymer of (ii); (iv) a linear water dissipatable polyester condensation product; and (v) a polyester or the (B) ink base layer is selected from the group consisting of:(vi) a prime coating having on an external surface a functional coating of an acrylic copolymer; and (vii)a prime coating having on an external surface a functional coating of a styrene copolymer provided that each of the (A) adhesive anchor layer and the(B) ink base layer is different.
Patent KR-20000022351-A (KR)
Title: Method and device for detecting voice section, and speech velocity conversion method device utilizing the method and the device
Inventor: IMAI ATSESHI
IPC: G10L25/78
Filed: 1998-04-30
Abstract: PURPOSE: A speech speed converting method and a device converting a speech speed on real time by processing the speech made by the human being, and carrying out a series of processes without omission of information is provided. CONSTITUTION: A connection order generator(8) decides connection order not to cause inconsistency between a data length of input speech and output speech, and speech data and connection data are connected without omission of speech information by controlling a speech data connector(9). When power of an input signal data is calculated to discriminate a speech interval and a non-speech interval, a threshold value for power is decided according to a maximum value of the power and difference between the maximum value and a minimum value.
Patent KR-20000055163-A (KR)
Title: Motion picturing system using residual image effect
Inventor: JIN YONG OK
IPC: G09F19/22
Filed: 1999-02-03
Abstract: PURPOSE: A motion picturing system using residual image effect is provided, which installs for passengers to enjoy the images on the wall of a subway tunnel from a subway window and improves the usefulness of an underground space. CONSTITUTION: A motion picturing system using residual image effect comprises; an image screen (18), which is installed on the wall of a tunnel at fixed intervals and at fixed height and is placed in line and has bulbs operated separately; a speedometer (17), which is installed on the wall of a tunnel at fixed intervals and outputs the current speed of a moving vehicle; a sectional controller (11), which inputs from signals of a speedometer (17) and outputs the signals for blinking bulbs of an image screen (18) and is installed on each section having proper intervals to recognize images by residual image effect from a moving vehicle; a central controller (10), which inputs and stores each image data from outer to express on many image screens (18) and transmits to a sectional controller (11) in proper order.
Patent KR-20000055336-A (KR)
Inventor: LIM JAE HUN
IPC: F25D29/00
Filed: 1999-02-05
Abstract: PURPOSE: A device and a method for controlling a compressor of a refrigerator are provided to shorten the period of vibration and noise due to the operation of a compressor. CONSTITUTION: A performance variable operation corresponding to a cooling load is performed. When the torques are varied, a vibration value is detected during the performance variable operation. The detected vibration value is compared with a reference vibration value to decide an excessive vibration band. If the detected vibration value is larger than the reference vibration value, the previously determined excessive vibration band is deleted and a new excessive vibration band is determined. If the detected vibration value is smaller than the reference vibration value, a compressor(51) is operated in the torques corresponding to the cooling load to perform a general cooling operation. Herein, noise and vibration are attenuated by continuously detecting an excessive vibration band during operation even if an excessive vibration band is varied due to the change of such operation conditions as an applied electricity and the of performance of electronic components.
Patent KR-20000055727-A (KR)
Inventor: KIM YONG WOOK
IPC: C07C69/84
Filed: 1999-02-09
Abstract: PURPOSE: A process of separating tannin and polyphenol components from a plant, structurally analyzing and preparing tannin derivatives therefrom is provided which is industrially useful. CONSTITUTION: A process comprises (1) extracting the skin of a chestnut, a persimmon, a pine needle and hops with acetone, filtering and removing acetone to give coarse extracts, (2) removing water from the coarse extracts and separating a tannin component in a low polar organic solvent petroleum ether, ether, ethylacetate and butanol in which the tannin component is gallic acid derivatives, ellagic acid and catechin.
Patent KR-20000055797-A (KR)
Inventor: LEE SU WOONG
IPC: H04N3/19
Filed: 1999-02-10
Abstract: PURPOSE: A brown tube protection circuit preventing poor mounting of a focus pack of an image display device is provided to prevent a spot phenomenon at the center of the brown tube so as to increase the fidelity of the brown tube. CONSTITUTION: A brown tube protection circuit preventing poor mounting of a focus pack of an image display device includes a FBT(Flyback Transformer) and a focus pack mount checker. FBT applies high voltage to actuate the brown tube due the vertical/horizontal deflector, horizontal actuator, a horizontal output transistor, and a horizontal actuating pulse, decreases the applied high voltage to output the result to each node(anode, focus, screen) of the brown tube. The focus pack mount checker is coupled with the lower mounting position of the focus pack of the FBT, detects the poor mounting of the FBT at the mounting point, feeds back the DC actuating voltage to the horizontal/vertical deflection actuator so as to control the operation of the FBT according to the oscillation of the horizontal/vertical deflection actuator.
Patent KR-19990045935-A (KR)
Filed: 1999-02-20
Abstract: 개시된 외장형 고속/고정도 가공 제어시스템은 수치제어 가공기에 고속/고정도 가공 제어시스템을 외장형으로 부착함으로써, 고속/고정도 가공을 수행할 수 있도록 한 외장형 고속/고정도 가공 제어시스템에 관한 것이다. 
     본 발명은 사용자에 의해 CAD/CAM 등으로부터 생성된 가공 프로그램 및 사용자 가공조건이 입력되는 데이터 입력부와; 데이터 입력부를 통해 입력된 가공 프로그램 및 사용자 가공조건에 따라 가공 데이터를 연산하고, 통신 프로토콜에 따라 데이터 송수신이 가능하도록 하며, 수치제어 가공기의 외부단자에 장착하거나 휴대가 가능하도록 구성된 고속/고정도가공 제어용 콘트롤러부와; 고속/고정도가공 제어용 콘트롤러부와 송수신이 가능하도록 하는 통신용 버퍼와, 통신용 버퍼를 통한 상호 통신 프로토콜에 따라 정보를 송수신하여 입력된 정보를 연산한 후 절삭공구를 구동하기 위한 제어신호를 출력하는 제어부와, 제어부에서 출력된 제어신호에 따라 절삭공구를 구동시키는 모터구동부로 구성된 수치제어 가공기와; 고속/고정도가공 제어용 콘트롤러부와 수치제어 가공기의 상태를 작업자가 손쉽게 확인할 수 있도록 표시하는 상태 표시부로 구성된다. 
     따라서, 본 발명은 수치제어 가공기를 고정밀, 고속형으로 가공이 되도록 하여 원가를 절감시키게 되었고, 수치제어 가공기의 제어 능력, 절삭공구 조건, 가공소재 특성, 평면 구간, 모서리 구간, 예리한 구간, 경사 구간, 공구 진입/퇴각 구간, 절삭량 및 부하량에 따라 속도제어가 가능하여 공구의 떨림 및 공구 파손을 방지하여 장비 및 공구의 수명을 연장시켜 품질이 상승되었으며, 자동속도 제어를 통해 무인 가공 및 야간 작업에서도 업무능률이 향상되고 생산성 향상, 납기단축, 사상 시간단축 등의 효과를 제공한다.
Patent KR-19990046396-A (KR)
Title: 범퍼수리용접착몰드조성물
Filed: 1999-03-06
Abstract: 본 발명은 범퍼수리용접착몰드조성물에 관한 발명으로서,특히 자동차 범퍼의 파손이나 흠집등에 유효하며,범퍼외에 자동차 바디 표면의 흠집에도 유효한 접착몰드조성물에 관한 발명이다. 
     통상에는 가벼운 차량 접촉사고나 경미한 외부충격으로 범퍼가 부분적으로 파손되거나 찢어지는 경우 전기인두로 녹여 접착보수하였다.부위가 첨공되거나,떨어져나간 부분은 이식판을 덧붙여 전기인두 또는 강력접착제로 부착해 표면연마,도색과정을 거쳐 범퍼를 수리하곤 하였지만,접착강도가 불량해 경미한 외부충격에 다시 파손되는 경우가 허다함에 따라 이중으로 손실을 입게 피해가 많았다. 
     이에 본 발명은 여름철에는 펠레트타입의 열가소성수지(FRTP)를  겨울철에는 규조토에 붕사,분말유리섬유의 적정 조성물에 열경화 반응제로 시안화아크릴레이트를 사용하여,수분내에 범퍼 보수부위에 강화플라스틱을 적층 형성시킨후 표면연마후 도색 완료 되도록 한것이다.본 발명에 따른 범퍼 수리작업이 매우 간단하면서도 보수부위의 접착강도와 경도가 좋아 일반 차체부위의 흠집이나 파손부위도 접착몰드로 적층보수할수 있어 그 효과가 다양한 유용한 발명인 것이다.
Patent KR-20000059868-A (KR)
Inventor: KANG HYEONG SIK
IPC: C08L23/00
Filed: 1999-03-09
Abstract: PURPOSE: A cable insulator composition is provided, that has an excellent resistance to the growth of water tree as well as great dielectric characteristics and processability, when using as an insulator of an electric power cable. CONSTITUTION: The cable insulator composition comprises 95.0 to 98.9 wt% of base resin, 0.01 to 1.0 wt% of crosslinking coagent, 1.0 to 3.0 wt% of crosslinking agent, and 0.1 to 1.0 wt% of antioxidant. The base resin is the blended polymer of at least two selected from the group consisting of an ethylene homopolymer polymerized from an α-olefin polymer being not less than C3, having a density of 0.87 to 0.965 g/cm¬2 and a melting index of 0.1 to 50 g/10min; a metallocene polyethylene; and an ethylene copolymer.
Patent KR-19990077861-A (KR)
Title: 중합성 조성물
IPC: C08G65/22
Filed: 1999-03-13
Abstract: 적어도 1개의 분자내디술피드결합을 지닌 (티오)에폭시화합물을 함유한 중합성 조성물은 양호한 광학특성 및 높은 압베수를 유지하면서 상당히 높은 굴절률을 나타낸다.   또, 황변억제제로서의 1차 및/또는 2차 아민을, 적어도 1개의 분자내디술피드결합을 지닌 (티오)에폭시화합물중의 티오에폭시기 및 에폭시기의 총몰수에 대한 상기 아민중의 NH 2 기 및 NH기의 총몰수비가 0.001 내지 0.5가 되도록 첨가시킨 상기 중합성 조성물은, 높은 굴절률을 유지하면서 황변 및 이와 관련된 내열성의 저감이 적절하게 방지된 투명한 수지를 제공할 수 있다.
Patent KR-20000060918-A (KR)
Inventor: BAE YUNG GUE
IPC: A45C13/18
Filed: 1999-03-22
Abstract: PURPOSE: An apparatus for preventing bag robbery is provided, by generating warning sound. CONSTITUTION: The apparatus comprises: a vibration sensor (104) which senses the external vibration; a contact sensor (106) which senses the external contact; a vibration sensor display (110) which displays the on/off state of the vibration sensor (104); a contact sensor display (112) which displays the on/off state of the contact sensor (106); a control part which drives the vibration and contact sensors (104, 106), and the vibration and contact sensor displays (110, 112) when vibration and contact sensor switches (12, 14) are in on-state to set the robbery prevention mode and to output sound data, and drives the contact sensor (106) and the contact sensor display (112) when the contact sensor switch (14) is in on-state to set the robbery prevention mode and to output sound data; and a speaker (114) which outputs the sound according to the sound data.
Patent KR-20000067452-A (KR)
Inventor: KIM YEONG SEOK
IPC: B01D46/00
Filed: 1999-04-28
Abstract: PURPOSE: A unit purifies lead-containing smoke generated in the process of soldering parts onto the printed circuit board(PCB) and is constructed in a simple structure to be easy for installation and movable for adaptation to the change of work line. The unit further eliminates harmful lead thoroughly from the smoke against air pollution before discharging into atmosphere. CONSTITUTION: The unit structure comprises: a casing(100) having a suction chamber(S) and a filter chamber(F) communicating with each other; a suction force generator(300) installed in the suction chamber(S); a suction guide tube(400) installed on the casing and communicating with the suction chamber(S) for collecting the harmful gas generated in the process of brazing; first filter for filtering off harmful lead components from the collected gas, a 2second filter(200) for removing the remnant of harmful lead components from the gas before discharging into the outer air.
Patent KR-20000006305-A (KR)
Inventor: KIM TAE HUN
IPC: A61F13/02
Filed: 1999-06-19
Abstract: PURPOSE: A casting tape for orthopedic surgery is provided to maintain the crushing strength and to reduce the event that the coated resin is badly distributed. CONSTITUTION: The casting tape is formed by:manufacturing a supporting substance by contracting the warp knitting made up of the polyester fiber laid in to the chain stitch and the filling yarn direction, the elongating fiber for connecting the chain stitch, and the elastic fiber at a temperature of 60 to 140°C for one to five minutes; and painting 45 to 65% of polyurethane pre-polymer on the supporting substance.
Patent KR-20010008581-A (KR)
Inventor: KIM JEONG TAE
IPC: H01L29/78
Filed: 1999-07-02
Abstract: PURPOSE: A method for forming a contact of a semiconductor device is provided to prevent a loss of a field oxide layer raising a rapid increase in a leakage current caused by misalignment of a contact. CONSTITUTION: After a field oxide layer(20) for isolation is formed in a semiconductor substrate(10), a gate oxide layer(30) and a polysilicon layer(40) are deposited thereon to form a gate electrode. Then, a spacer(50) and a diffusion layer(60) are formed respectively, and a metal layer is deposited on the resultant structure. A metal silicide layer(70) is formed through the subsequent thermal treatment for the metal layer, and a non-reacted portion of the metal layer is then removed. The resultant structure is then subjected to a lower temperature plasma nitrification and thermal treatment, so that an oxide nitride layer(80) is formed on the field oxide layer(20). Thereafter, an interlayer dielectric layer(90) is deposited and patterned to form a contact hole(100). Particularly, the oxide nitride layer(80) acts as an etch stopper while the contact hole(100) is formed.
Patent KR-20010009037-A (KR)
Inventor: KIM JAE HONG
IPC: H01L27/10
Filed: 1999-07-07
Abstract: PURPOSE: A method for manufacturing a capacitor of a semiconductor device is provided to increase capacitance by forming a dielectric layer with a material of a high permittivity, and to improve a step coverage by forming a capacitor electrode buried in an interlayer dielectric. CONSTITUTION: The first insulating layer(22) having a contact hole exposing a predetermined portion of a semiconductor substrate(20) is formed on the semiconductor substrate. The first plug(23) composed of a conductive material filling the contact hole by a predetermined height is formed. The second plug(24) is formed wherein the contact hole is completely filled with a barrier material, contacting the first plug. The second insulating layer(25) having window exposing the surface of the second plug is formed on the first insulating layer. A sub adhesion layer(26) thin covers an inner surface of the window, contacting the surface of the exposed second plug. A storage electrode incompletely filling the window and contacting the surface of the sub adhesion layer, is formed in the window. A dielectric layer(28) covering the storage electrode is formed. An annealing process composed of two steps is performed regarding the dielectric layer. A plate electrode(29) covering the dielectric layer is formed.