baber/WOPTO huggingface dataset:
Patent KR-20010058582-A (KR)
Inventor: KIM SEONG JIN
IPC: H01L23/12
Filed: 1999-12-30
Abstract: PURPOSE: A semiconductor package and a method for manufacturing the same are provided to form a semiconductor package by using a ball grid array method and a flip chip package method. CONSTITUTION: A multitude of input and output pad is formed on a semiconductor chip(2). The first circuit substrate(10) is adhered to a lower face of the semiconductor chip(2). A bond finger(14) is formed on an upper face of the first circuit substrate(10). A ball land(12) is formed on a lower face of the first circuit substrate(10). A conductive wire(30) connects the input and output pad with the bond finger(14). The second circuit substrate(20) is located on an upper face of the semiconductor substrate(2). A ball land(22) is formed on an upper face of the second circuit substrate(20). A bump land is formed on a lower face of the second circuit substrate(2). A conductive bump(40) connects the input and output pad with the bump land. An encapsulant(50) is inserted between the first and the second circuit substrates(10,20). A multitude of conductive ball(60) is formed on the ball land(12) of the first circuit substrate.
Patent KR-20010059533-A (KR)
Inventor: JUN BEOM JIN
IPC: H01L21/768
Filed: 1999-12-30
Abstract: PURPOSE: A method for forming a gate in semiconductor devices is provided to significantly increase the etch rate of a TiN layer by adding N2 gas of a constant amount and O2 gas as additive gas using Cl2 gas a main etch gas. CONSTITUTION: A method for forming a W gate in semiconductor devices deposits a TiN layer(5) between a gate oxide film(3) and a W layer(7). The TiN layer(5) is etched. At this time, the etching condition includes using N2 gas in addition to Cl2/O2 gas as an additive gas.
Patent KR-20000052810-A (KR)
Title: Herbicidal composition and use
Inventor: LOJEK JOHN S
IPC: A01N37/02
Filed: 1997-10-23
Abstract: PURPOSE: Herbicidal compositions comprising synergistic mixtures of acetic acid and citric acid are provided. CONSTITUTION: A herbicidal composition, which can be formulated for selective or total kill of vegetation or as a growth regulator, comprises a synergistic combination of acetic acid and citric acid. Such composition consists essentially of acetic acid in an amount of from about 2 to about 10 wt.%, citric acid in an amount of from about 1 to about 6 wt.%, the acetic acid and citric acid being present in a synergistic weight ratio of about 1:0.1 to about 1:0.8, the composition being in fully diluted form ready to apply to post-emergent vegetative growth by spraying onto the vegetative growth.
Patent KR-20010033610-A (KR)
IPC: G06K9/22
Filed: 1997-11-03
Abstract: In a method for recording a selected sequence of characters with the aid of a pen, the latter is passed over the sequence of characters and a plurality of images, whose contents partially overlap, are recorded simultaneously with the aid of a light-sensitive sensor (8) with a two-dimensional sensor surface. The recorded images are put together, horizontally as well as vertically, into an image. Subsequently, the characters in the composite image are identified and stored in the pen with the aid of a predetermined character code formal. The putting-together, the character identification, and the storing are carried out with the aid of a signal processing unit (20-24). By the method and the pen compensation is obtained for different speeds of movement and different angles of rotation of the pen.
Patent KR-20000053249-A (KR)
Title: Process and apparatus for registration control of material printed at machine product length
Inventor: CHAPDELAINE LOUIS MAURICE
IPC: A61F13/15
Filed: 1997-10-31
Abstract: PURPOSE: A process and apparatus is provided for registering a plurality of components on one continuously moving layer with a respective plurality of components on another continuously moving layer. CONSTITUTION: A continuously moving first layer (54) has a plurality of components thereon, and a continuously moving second layer (66) has a plurality of reference marks representing a respective plurality of components thereon. The process and apparatus control the distance between reference marks of the second layer to a selected distance, and controllably registers each reference mark of the second layer to a respective component of the continuously moving first layer.
Patent KR-20000069586-A (KR)
Title: 융합 고리 치환된 인데닐 금속 착체 및 중합 방법
IPC: C08F10/00
Filed: 1997-11-21
Abstract: 융합 고리 인데닐 유도체 리간드를 포함하는 입체적 장애 구조의 4족 금속 착체, 그의 촉매적 유도체, 그의 제조 방법 및 올레핀 중합 촉매의 성분으로서의 용도가 개시되어 있다.
Patent KR-20000075604-A (KR)
Title: 출력 시간축 정정기
IPC: H04N5/12
Filed: 1998-12-07
Abstract: 본 발명의 출력 시간축 정정기는 직교 샘플된 비디오(VS)를 클록 신호(CLK)의 클록 인스턴트(TC)에서 발생하는 비동기 샘플 값에 따라 비동기 샘플된 비디오(VOS)로 변환시킨다.  비동기 샘플된 비디오(VOS)는 디스플레이 장치(DD)의 디스플레이 스크린 상에 디스플레이된다.  시간-이산 페이스-록된 루프(PLL)의 이산 시간 오실레이터(DTO)는 시간축 신호(OS)를 공급한다.  시간-이산 페이스-록된 루프(PLL)는 기준 인스턴트(FB)로 록되는 시간축 신호(OS)를 얻기 위해 디스플레이 장치(DD)의 라인 편향 타이밍을 나타내는 기준 인스턴트(FB)와 시간축 신호(OS) 간의 위상차(PE)를 결정한다.  시간축 신호(OS)는 샘플 속도 변환기(SRC)를 제어함으로써 클록 인스턴트(TC)에서 발생하는 비동기 비디오 값(VOS)이 샘플 속도 변환기(SRC)에 의해 직교 샘플된 비디오(VS)로부터 보간되어 비디오 신호가 디스플레이 스크린 상의 정확한 위치에 디스플레이된다.  본 발명에 따른 출력 시간축 정정기에서, 모든 회로는 하나의 동일한 클록 발생기(OSC)로부터 기원하는 클록 신호(CLK)에 의해 클록된다.
Patent KR-20010006423-A (KR)
IPC: C07D471/04
Filed: 1998-04-15
Abstract: Crystalline salts of swainsonine, and methods using same.
Patent KR-20010006515-A (KR)
IPC: B02C4/28
Filed: 1998-03-25
Abstract: The invention relates to a feed sensor mechanism for a mill cylinder. The purpose of the invention is to provide a structurally simple sensor to detect the product in the entry port of the feed regulator. To this end, a sensor is located in the feed cylinder of the cylinder mill. The sensor is able to detect the force of the incoming product so that a control signal can then be sent to the feed device via a signal converter.
Patent KR-20010020348-A (KR)
IPC: A61F2/82
Filed: 1998-04-29
Abstract: 방사성 스텐트는 스텐트의 표면을 방사성 동위 원소로 코팅시키는 것을 특징으로 한다.  또한, 이의 제조 방법을 기재하고 있다.
Patent KR-20010012755-A (KR)
Title: 요오도프로피닐 화합물 및 포름알데히드 공여체 화합물을주성분으로 하는 방부제 조성물
IPC: A01N43/90
Filed: 1998-05-19
Abstract: 본 발명은 (a) 요오도프로피닐부틸 화합물 및 (b) 1종 이상의 포름알데히드 공여체 화합물을 포함하는 광범위한 살균 및 살진균 효과를 갖는 조성물에 관한 것이다. 또한, 이 조성물은 액체 농축물 형태로서 안정하고 효과적이다. 또한, 본 발명은 상기 조성물을 공산품에 사용하는 방법 및 이들 조성물을 포함하는 공산품에 관한 것이다.
Patent KR-20010013562-A (KR)
Title: 수지성형형 반도체 장치 및 그 제조방법
IPC: H01L23/495
Filed: 1998-06-08
Abstract: 리드 프레임(9)의 다이패드 부분(11) 상에 장착되는 반도체 칩(12)과; 이 반도체 칩(12)의 터미널들을 이 리드 프레임(9)의 내부 리드 부분(13)으로 연결하는 얇은 금속 와이어(14)들로 이루어져 있고, 지지부분(11)이 이 내부 리드 부분(13)보다 높은 장소에 위치하도록 이 리드 프레임(9)은 업세팅 처리를 거친다. 이 업세팅의 스텝 디퍼런스에 관한 실링수지의 두께가 지지부재 아래에 존재하기 때문에, 리드 프레임과 실링수지 사이의 접착력은 향상될 수 있고, 높은 신뢰도와 박형화가 가능하다. 각 내부 리드 부분(13)들 내에 적어도 하나의 홈부분이 위치하였기 때문에, 실링수지(15)로의 앵커링 효과, 제품의 리드 프레임에 작용하는 스트레스 및 얇은 금속와이어(14)로의 스트레스는 완화될 수 있고, 리드들과 얇은 금속 와이어들이 벗겨지는 것이 방지된다.
Patent KR-20010068308-A (KR)
Title: Apparatus for cooling a LCD Projctor
Inventor: BOK GI SO
IPC: G03B21/16
Filed: 2000-01-04
Abstract: PURPOSE: A system for cooling a liquid projection device is provided to increase the cooling efficiency with a fan of a small capacity by cooling heat of a polarization plate locally, thereby reducing the noise due to the use of a large capacity fan and preventing the degradation of the performance of the system due to the thermal degradation of the polarization plate. CONSTITUTION: A system for cooling a liquid projection device includes a polarization plate(41), a metal plate(43) of high heat conductivity, heat pipes(42) attached to the polarization plate by an adhesive agent such as cementite for conveying heat effectively, and heat emission fins(44) connected to the heat pipes for emitting the conveyed heat, wherein the metal plate is interposed between the heat pipes and the polarization plate for transmitting heat.
Patent KR-20010069024-A (KR)
Title: Circular distributer
Inventor: GIOR WON GUK
IPC: E04G21/04
Filed: 2000-01-11
Abstract: PURPOSE: A cross-movable circular concrete placer is provided to effectively pour concrete by easily installing and moving, to form a fine concrete structure by preventing the damage of reinforcing rods, and to easily use in a complex building by traveling crossly. CONSTITUTION: A cross-movable circular concrete placer comprises: a boom assembly(2); a rotating plate(34), an outer rigger(40); a rail(60); and a rail support(62). The boom assembly(2) comprises: a vertical transferring pipe(6); a boom(4); a first horizontal transferring pipe(8); a second horizontal transferring pipe(10); a center shaft(38); and a balance weight(70). The rail support is installed on a mold. The rail is crossly installed thereon. The circular concrete placer is installed on the rail. A wheel assembly(51) is installed on the outer rigger to be rotated at 90degrees. Thereby, the circular concrete placer is moved on the rail easily.
Patent KR-20010075847-A (KR)
Title: Apparatus and method for managing timer and gathering information using management object instance in network management system
Inventor: CHO CHEOL HOE
IPC: H04L12/24
Filed: 2000-01-20
Abstract: PURPOSE: An apparatus and method for collecting information and controlling a timer through a management instance in a network management system is provided to offer network resource information according to a time interval requested through information obtained by managing an object-management object instance by composing a resident management object instance for collecting information on an object-oriented interface. CONSTITUTION: An object-manager control unit requests an object-management object instance(1-K) generation for collecting information of a network resource to a management object processing unit(301). The management object processing unit generates one object-management object instance to one network resource(302) and sets a time at a minimum interval period by an instance(303). The object-management instance identifies whether the set period is reached(304). If the set period is reached, the object-management instance collects information according to a minimum interval in a network resource(305), stores collection information in a storing space(306).
Patent KR-20010077134-A (KR)
Title: Method for forming insulator in semiconductor device
Inventor: CHO IL HYEON
IPC: H01L21/316
Filed: 2000-01-31
Abstract: PURPOSE: A method for forming a dielectric layer of a semiconductor device is provided to enhance the reliability of a semiconductor device by improving a dielectric characteristic of a dielectric layer. CONSTITUTION: A Ta2O5 layer(22) is formed on a semiconductor substrate(21) or a lower electrode of a capacitor under atmosphere of wet H2O gas and a temperature of 350 to 500 degrees centigrade. An SiO2 layer is formed between the semiconductor substrate(21) and the Ta2O5 layer(22). A rapid thermal process is performed under a temperature of 700 to 900 degrees centigrade by using the H2O gas. The growth of the SiO2 layer is restrained between the semiconductor substrate(21) and the Ta2O5 layer(22), and then a capacitance of the Ta2O5 layer(22) is increased since the H2O gas has a slow diffusion speed and a small oxidation potential. The Ta2O5 layer(22) is formed by using a CVD(Chemical Vapor Deposition) method. A gate electrode(23) or an upper electrode of the capacitor are formed on the Ta2O5 layer(22).
Patent KR-20010083643-A (KR)
Title: System and method of selling lottery tickts based on the on-line
Inventor: SONG JAE BIN
IPC: G07B1/00
Filed: 2000-02-17
Abstract: PURPOSE: A system and a method are provided to overcome difficulties of an existing news stand selling type in the sale of the lottery, and widen the width of contact points in the purchase of the lottery for customers by selling lottery using on-line. CONSTITUTION: The method for selling lottery using on-line comprises: a first step in which selling terminals(130a-130n) provide displays to guide the coupon inputting as touch signals of game participation buttons are sensed from the initial screens comprising the game participation buttons; a second step of performing the identity confirming process on the readout data by reading the coupons as coupons are inputted; a third step of transmitting the readout data to a pools game server(140) as the readout data are turned out to be identical, and requesting the covering of amount; a fourth step in which the pools game server databases the readout data, performs selling authentication processing as the amount is covered, and transmits the selling authentication information to the selling terminals; and a fifth step in which the selling terminals issue receipts according to the selling authentication information.
Patent KR-20000036352-A (KR)
Inventor: JEE SU OOK
IPC: A46D1/00
Filed: 2000-02-19
Abstract: PURPOSE: A toothbrush is provided to protect the gum and the mouth against harm from brushing of teeth. CONSTITUTION: A toothbrush of bristles is made of a mixture of natural jade powder, germanium powder, ceramics and PP or PVC to be applied with a glaze and one or more organic materials. When brushing teeth, the brush gives the effect on applying powders of jade and germanium with massage on the gum and muscle of mouth for protection of them.
Patent KR-20000062612-A (KR)
Title: 실린더형 캐패시터의 하부전극 형성방법
IPC: H01L21/027
Filed: 2000-02-23
Abstract: 반도체메모리의 실린더형 캐패시터의 하부전극 형성방법에 있어서, 절연막상에, 절연막내에 형성된 홀의 내면을 덮도록 폴리실리콘막을 형성한다.  폴리실리콘막의 노출면은, 포지티브포토레지스트와 반응하여 현상용액에 대한 포지티브포토레지스트의 용해성을 저하시키는 반응촉진제로 처리된다.   전면에 포지티브포토레지스트를 증착하여 홀을 채운다.   그 결과, 홀내에 채워진 포지티브포토레지스트는 홀내의 반응촉진제와 반응하여, 포지티브포토레지스트가 노광된 후에도, 현상용액에 용해되기 곤란하게 한다.   전체 포지티브포토레지스트가 노광되고 현상액에 의해 현상되어 홀내에만 포지티브포토레지스트가 남게된다.   남아있는 포지티브포토레지스트를 마스크로 사용하여 폴리실리콘막을 에치백하여, 절연막의 상면상의 폴리실리콘막을 제거한다.  또한, 홀내에 남아있는 포지티브포토레지스트를 제거하고 절연막을 제거하여 폴리실시콘막이 실린더형상으로 남게된다.
Patent KR-20000071437-A (KR)
Title: 반도체 장치의 패키지
IPC: H01L23/13
Filed: 2000-03-11
Abstract: 반도체 칩 주위에 위치하는 패키지 본체 상에는 빗살 형상으로 된 제1 배선 패턴이 형성되어 있다.  이 제1 배선 패턴의 주위에는 빗살 형상으로 된 제2 배선 패턴이 배치되어 있다.  제1 및 제2 배선 패턴의 돌출부는 서로 맞물려, 돌출부로부터 반도체 칩의 본딩 패드와의 거리가 대략 같게 설정되어 있다.
Patent KR-20010091823-A (KR)
Inventor: LEE SANG SEOG
IPC: A47K3/10
Filed: 2000-03-18
Abstract: PURPOSE: A health bathtub is provided to take a bath while sitting in a comfortable position and to exercise for arms, legs, the inside muscle of the thigh, etc. at various angles. CONSTITUTION: In a health bathtub, a seat(20) is assembled into a rectangular parallelepiped body(10) by a bolt(18) and a nut(19) and composed in a chair shape suitable for a user to sit comfortably by keeping at an angle of 45 degrees, wherein exercising equipment for the inside muscle of the thigh(90), exercising equipment for arms(100) and exercising equipment for legs(100) are installed into the seat(20) and various equipment is installed on the lower side of the seat(20).
Patent KR-20010094823-A (KR)
Title: Settlement assuring method for dealing accounts on credit and thereof system
Inventor: HUH JANG HYEON
Filed: 2000-04-07
Abstract: PURPOSE: A long distance commercial transaction money amount settling method and system are provided to order a desired commodity from a long distance electronic commerce company and/or communication selling company and pay a dealing charge using a credit card or a banking card. CONSTITUTION: A member account information database(340) stores information of payment means which is requested a new registration. A deal settlement information database(350) stores settle certification information. A certification request process module(310) detects a dealing ID from a customer terminal and a selected payment means and generates a settlement certification message and a goods receiving confirmation password with respect to a corresponding dealing ID. A goods receiving confirmation module(320) confirms a receiving of goods with respect to a dealing ID from a selling server to a customer. A payment module(330) pays a charge with respect to the dealing ID from the payment means.
Patent KR-20010095856-A (KR)
Title: Revegetation mat, fabriction method thereof, and slope revegetation method using the same
Inventor: KIM HYE JU
IPC: A01G1/00
Filed: 2000-04-12
Abstract: PURPOSE: A tree-planting mat is provided to promptly plant trees on slope surface without causing environmental pollution or contamination, soil erosion or loss of seeds by simply attaching the mat to the slope surface. CONSTITUTION: The mat comprises a coconut net(2) made of coconut fibers; a seed binding layer(7) containing various organic materials(3), seeds(4), coconut fibers(5) and natural rubber adhesive(6) together with another interposed adhesive(8). The net(2) is a lattice pattern matrix of coconut materials to provide nutrient to the seeds(4) and secure the seeds until the seeds grow and take roots. The organic materials(3) comprises 15-20wt.% of fallen broadleaves; 15-20wt.% of rice and wheat straw; 15-20wt.% of sawdust; 15-20wt.% of cut lawn and 30-35wt.% seedbed soil to provide nutrient to the seeds during sprouting and growing.
Patent KR-20010020745-A (KR)
Title: Polishing pads for polishing a substrate in the presence of a slurry containing abrasive particles and a dispersive agent, and process of polishing a substrate using the same
Inventor: HSU OSCAR K
IPC: H01L21/302
Filed: 2000-04-14
Abstract: PURPOSE: Provided is a polishing pad capable of heightening the polishing efficiency through movement of abrasive particles, performing a uniform polishing, and suppressing generation of scratches on the surface polished. CONSTITUTION: A polishing pad(10) polishes a board under existence of a slurry containing polishing particles and a dispersing agent. The first layer of the pad has a polishing surface(20) and a backing surface, is formed from a fibriform or fiber component(14) existing in mixture in a polymer matrix component(16), and equipped with fibers to give a void structure to the polishing surface upon dissolution of the fibriform or fiber component in the slurry. The polishing action is made in good performance owing to additives such as a surface active agent and a remover, and the residue generated in the polishing operations can be removed, and these additives are either included in the fibriform component or added optionally upon coating the fibriform component therewith topographically.
Patent KR-20010097158-A (KR)
Inventor: HWANG DONG MOK
IPC: G02F1/1341
Filed: 2000-04-20
Abstract: 본 발명은 기둥 구조를 갖는 액정 물질의 중합을 통하여 얻은 다공성 고분자 및 그 제조방법을 제공한다. 상기 다공성 고분자는 주형 분자와 중합성 모노머간의 비공유결합을 통하여 얻은 기둥 구조(columnar structure)를 갖는 액정 물질로부터 액정 상태에서의 중합을 거치고, 중합 결과물로부터 주형 분자를 제거하여 얻어진 것임을 특징으로 한다. 본 발명의 다공성 고분자는 일정한 크기의 기공이 규칙적으로 배열되어 있으므로 기공내에 금속을 포함시켰을 때 소정 크기의 금속 입자를 균일하게 배열시킬 수 있다. 또한 중합하기 이전의 액정 물질은 유동성을 갖고 있어서 스핀 코팅이 가능하고 이 결과물을 중합하면 고분자 박막을 만들기가 용이하다는 잇점이 있다. 이와 같은 고분자 박막은 공업적으로 가치가 높은 다공성 물질이나 멤브레인으로 사용가능하며, 특히 주형 분자에 따라 특정 물질만을 인지, 분리할 수 있는 기능성 멤브레인으로 응용가능하다. 그리고 본 발명의 다공성 고분자는 다른 물성을 갖는 고분자의 합성에서 주형 분자로서 사용가능할 뿐만 아니라, 다공성 고분자의 기공에 금속을 삽입하여 얻은 화합물은 촉매로도 이용가능하다. 또한, 본 발명의 다공성 고분자는 종래의 다공성 물질의 제조방법과는 달리 고온, 고압의 가혹한 조건을 거치지 않고서도 손쉽게 제조할 수 있다.
Patent KR-20010105657-A (KR)
Title: A marketing system using a star
Inventor: SEUNG KYUNG BAE
Filed: 2000-05-17
Abstract: A delivery device having a first chamber containing an osmotic agent, a membrane forming a wall of the first chamber through which fluid is imbibed by osmosis, a second chamber containing a beneficial agent to be delivered, and a moveable piston separating the two chambers. In fluid communiation with the second chamber is an orifice which comprises a slit valve. In the presence of pressure, the beneficial agent pushes through the slit, opening up a channel for delivery of the beneficial agent and creating flow. Because the slit remains closed in the absence of flow (or when the pressure is below the pressure required to open the slit), back diffusion of external fluids is eliminated when the slit is closed, which prevents contamination of the beneficial agent in the second chamber by external fluids. In addition, forward diffusion of the beneficial agent out of the capsule is prevented when the slit is closed. The slit valve opens only to the minimum dimension required to allow the flow generated by the osmostic pumping rate. The slit valve also allows a flow path to open around any obstruction in the slit valve to prevent clogging.
Patent KR-20010105781-A (KR)
Title: Adapter for communicating on the ground
Inventor: KIM JEONG YEOL
IPC: H04B7/00
Filed: 2000-05-18
Abstract: A method is disclosed for applying to a shaft a magnetoelastic coating having a circumferentially directed magnetic field which distorts to a measurable degree representative of torsional stress in the shaft. The coating is deposited by a spraying process in which particles of magnetostrictive material impact the shaft surface at a temperature above the curie temperature of the material. After cooling, the coating is magnetically polarized in the circumferential direction.
Patent KR-20010066845-A (KR)
Inventor: MURATA AKIHIRO
IPC: G02B6/42
Filed: 2000-06-15
Abstract: PURPOSE: An optical module, production thereof, semiconductor device and light transmission device are provided to package an optical element with a semiconductor chip so as to insert a semiconductor chip to the optical module and to dispense with connection with a semiconductor chip. CONSTITUTION: The optical module having an optical fiber(30) and an optical part(12) includes an optical element(10) whose relative position with the optical fiber(30) is fixed and the semiconductor chip(20) which is electrically connected with the optical element(10). The optical module, further, is a package in which the optical element(10) and a semiconductor chip(20) are packaged. A hole(28) is formed on the semiconductor chip(20), the optical element(10) is mounted on the semiconductor(20) while directing the optical part(12) to the hole(28), and the optical fiber(30) is inserted into the hole(28) and is attached to the semiconductor chip(20).
Patent KR-20010007563-A (KR)
Inventor: JAMES A ARIGURIO
IPC: G01N21/89
Filed: 2000-06-28
Abstract: PURPOSE: An injection apparatus is provided to attenuate the vibration of a glass sheet by supporting the same at a time of inspection without generating the physical contact with the surface thereof and to enable the high speed movement of the glass sheet. CONSTITUTION: An inspection apparatus of a sheet material is equipped with an inclined air table arranged on the plane parallel to the Y-axial line inclined with respect to a perpendicular, a means for moving a glass sheet(14) along the Y-axial line in parallel to the air table(12) to physically support the sheet(14) along the lower edge thereof, an air supply means for supporting the sheet(14) in parallel to the air table(12) so as to separate the same from the air table(12) by a desired distance to avoid the physical contact with the surface of the sheet(14), a scanning means and a means for moving the scanning means along the X-axial line traversing at least one surface of the sheet(14).
Patent KR-20020002918-A (KR)
Title: Method for fabricating transistor of semiconductor memory device
Inventor: SA SEUNG HUN
IPC: H01L21/8239
Filed: 2000-06-30
Abstract: PURPOSE: A method for forming transistor of semiconductor memory device is provided to adjust a threshold voltage of a transistor by increasing well concentration without an additional mask process to inject an ion at a sidewall of a trench. CONSTITUTION: A plurality of a shallow trench is formed on a substrate by etching a portion of the substrate. An oxide layer(23) is deposited into the trench. A well region is formed on an active area of the substrate between the trenches. By forming and selectively etching a gate oxide layer(24) and a polysilicon layer(25) on the well area, a gate electrode is formed. An LLD ion injection layer(26) and a Halo ion injection layer(27) is formed by injecting an ion at the well region. An ion injection area(28) is formed on a sidewall of the trench by injecting the ion to tilt and twist in the direction of a side face of the trench. A buffer oxide layer(29) and a spacer(30) is formed on both of the gate electrode. After ion injecting on a source/drain area, a source/drain junction layer(31) is formed by annealing.