baber/WOPTO huggingface dataset:
Patent KR-840001624-B1 (KR)
Title: A method of spinning fibers
Inventor: STERN LEIF EINAR
IPC: D01D5/00
Filed: 1981-02-19
Granted: 1984-10-12
Abstract: To prevent the fusion of thermoplastic fibers during spinning, the stream of a cooling medium is introduced to the solidifying fibers through at least one openning. The cooling stream is of such speed and direction that it separates the fibers. The cooling stream pref. flows radially out towards the fibers and may be assisted by a fan. Thje cooling medium is pref. air at room temp. The fibers are pref. of paraffin and polyethylene and are useful in the absorption of hydrophodic liquids, esp. petrochemical liquids.
Patent KR-840002465-B1 (KR)
Title: Intake system of engine
Inventor: MASSUO NORIDAKA
IPC: F02B25/16
Filed: 1981-06-11
Granted: 1984-12-29
Abstract: The induction system is for delivering intake charge to a variable volume chamber of an IC engine having an induction passage for supplying the total of the intake charge to the chamber. It has a throttle valve for controlling the flow through the induction passage, a plenum chamber, and a duct connecting the plenum chamber only with the induction passage connecting between the throttle valve and chamber. This provides for flow of a portion of the intake charge from the induction passage into the plenum chamber during a portion of the engine operating cycle.
Patent KR-860000118-B1 (KR)
Title: Digital signal processing unit
Inventor: KOJIMA TADASHI
IPC: G11B20/12
Filed: 1981-08-22
Granted: 1986-02-19
Abstract: A PCM signal processor extracts control words from a serial PCM data stream, also containing error detection and correction codes. An error detector is connected to the serial-to-parallel converter, which converts the serial PCM data stream into signal processor control words in a parallel format. The detector produces an error signal, indicating the presence or absence of an error in the control words. Registers store the signal processor control words in the absence of an error signal and prevent the storage of the signal processor control words in the presence of an error signal.
Patent KR-900003451-B1 (KR)
Title: Stabilizazion method of azulene derivatives
Inventor: GAWAMATA MASANOBU
IPC: A61P29/00
Filed: 1983-03-09
Granted: 1990-05-19
Abstract: Stabilizing method for a thermo-stable sodium 1,4- dimethylisopropylazulene-3-sulphonate (GASN) comprises removing or separating solvent from GASN soln. by spray drying or freeze drying. The solvent is water and or (m)ethanol. GASN has an antiinflammatory or anti-cancer effect. The method gives the stable GASN suitable for a long term storage.
Patent KR-920006851-B1 (KR)
Inventor: OKATA TAISUKE
IPC: H01L21/31
Filed: 1984-10-10
Granted: 1992-08-20
Abstract: 내용 없음.
Patent KR-930008246-B1 (KR)
Inventor: MALLORY CHARLES W
IPC: G21F9/00
Filed: 1985-07-05
Granted: 1993-08-27
Abstract: 내용 없음.
Patent KR-900007078-B1 (KR)
Title: Liding member of high strenght and high abrasion resistance
Inventor: GOMEYA GAZDOSI
IPC: F16J15/34
Filed: 1985-08-01
Granted: 1990-09-28
Abstract: The high strength sliding members are formed from beta phase silicon nitride (1) contained in not more than 15% supporting matrix material (2). The particles have major dia. not less than 5. The whole body having a density of at least 98% of the theoretical value. The member is formed by mixing and sintering up to 10% of rare earth mateial, up to 10% Al oxide, up to 5% of Ti oxide or Zr oxide or Mg oxide (excluding the case where the sum of rare earth oxide and alumina is zero), balance Si nitride. The compsn. is such that the ratios of rare earth element to aluminium oxide is in the range 0.5-10.
Patent KR-900005216-B1 (KR)
Title: Spring sealed drain fitting
Inventor: CUSCHERA CASPER
IPC: A47K1/14
Filed: 1985-09-24
Granted: 1990-07-21
Abstract: The drain fitting has an annular body and a closure which may be seated against the inlet end of a drain passage through the body. A stem extends from the closure through a guide within the drain passage. A spring acts between the stem and guide to apply sealing pressure to the seated closure. The closure may be manually pulled outwardly from the body against the force of the spring and turned angularly to latch at an open position when the fluid is to be drained.
Patent KR-890004464-B1 (KR)
Title: Semiconductor device
Inventor: OKAMODO DATSUO
IPC: H01L21/28
Filed: 1985-11-04
Granted: 1989-11-04
Abstract: The manufacturing method for MOSFET for VLSI icludes the steps that: (a) source and drain region made by foreign atom diffusion layers (9a,b) are formed on a silicon substrate (1); (b) a gate electrode (40) with polycrystalline silicon is deposited on a gate insulating film (30); (c) side walls (5a,b) are formed at the gate electrode sides and contact the same as well as the diffusion layer for insulation of electrode from the diffusion layer; (d) metal silicide films (7a,b,c) are deposited on the diffusion layer and the gate electrode; (e) metal oxide films (10a,b,c) are formed on the silicide films and side walls.
Patent KR-890003098-B1 (KR)
Title: Method of making welded can body
Inventor: KIDAMURA YOOICHI
IPC: B23K11/30
Filed: 1985-11-13
Granted: 1989-08-22
Abstract: A method for making a welded can body wherein the opposite marginal edge portions (11a) of a metallic blank are overlapped to form a can body preform (11) with an overlapped portion, and then the overlapped portion is electric-resistance mash-seam welded by a pair of wire electrodes (35,36) abutting on both the surface of the overlapped portion, characterized in employing at least one wire electrode (15;35), and feeding the overlapped portion of the can body preform in between the pair of wire electrodes (15,16; 35,36) such that the edge face (11a1) of one of the marginal edge portions (11a) may be positioned on an area of the flat main surface portion (18a) in the vicinity of the slope.
Patent KR-900006968-B1 (KR)
Title: Communication controller in a home bus system
Inventor: KUBO SEIICHI
IPC: H04L12/28
Filed: 1986-03-18
Granted: 1990-09-25
Abstract: The bus system comprises a pulse transformer including a primary winding and several secondary windings being wound on a common core, the secondary windings being wound bifilarly for obtaining good coupling. Several kinds of information transmission medium are connected, respectively, to the secondary windings of the pulse transformer, the information transmission medium including a coaxial cable and a pair of wires. Communication apparatus is connected to the information transmission medium, and electric domestic deivces are respectively connected to different communication apparatus. A control device is connected to a primary winding of the pulse transformer for monitoring severl kinds of information transmission medium.
Patent KR-890000562-B1 (KR)
Title: Weaving machines control system
Inventor: SAINEN TSUDOMU
IPC: G05B19/042
Filed: 1986-03-25
Granted: 1989-03-21
Abstract: This system includes a central CPU and local CPUs on each loom to control loom operation, and communication control CPUs each on a data bus interconnecting the central and local CPUs to exchange data with both.  The central CPU emits target values for controlling the looms, and there is bidirectional data transmission between the central and communication control CPUs using light communication links.  There may be relay CPUs on data buses and interconnecting the central and communication control CPUs.
Patent KR-890003150-B1 (KR)
Title: Inserting device of connector pin
Inventor: MUN SANG-KI
IPC: H01R43/00
Filed: 1986-06-24
Granted: 1989-08-23
Abstract: A plate strip (8) rolled at a pin roll (54), is directely inserted into a connector base (53) by cutting of each pin.  A reel feeder mounts a pin roll (54) wound with the pin strip (8). The pin stripe (8), released from pin roll (54), is protected by a pin guide (20) and guided to the transfer part by the pin guide. The transformation equipment moves the pin strip (8) from guide part to head in the form of worm and worm-gear by producing a rotation screw lead to be 0.1 inch.
Patent KR-950007997-B1 (KR)
Inventor: BRINDOEPKE GERHARD
IPC: C08G59/14
Filed: 1986-11-19
Granted: 1995-07-24
Abstract: 내용 없음.
Patent KR-900004030-B1 (KR)
Title: Multi access network device
Inventor: BAEK SEUNG-RYONG
IPC: H04M9/04
Filed: 1986-12-24
Granted: 1990-06-09
Abstract: The system for communicating with multiple users simultaneously connects from station to station through a number of communication controller (C/C). The left side receiving (R2) and transmitting (T2) lines of the controller are connected to the transmitting (T1) and receiving (R1) lines of the left neighboring controller. The right sides are connected in the same manner so that the free lines are utilised to communicate with a number of users as many as possible.
Patent KR-940001911-B1 (KR)
Inventor: HINTON HARVARD S
IPC: G02F1/35
Filed: 1985-12-11
Granted: 1994-03-11
Abstract: 내용 없음.
Patent KR-940004076-B1 (KR)
Inventor: YANO JUNICHI
IPC: C07H21/02
Filed: 1987-01-06
Granted: 1994-05-11
Abstract: 내용 없음.
Patent KR-900003124-B1 (KR)
Title: Numerical controller
Inventor: NIWA DOMOMIGI
IPC: G05B19/4061
Filed: 1987-02-23
Granted: 1990-05-08
Abstract: The numerical control apparatus comprises a display device capable of displaying not only the configuration of a workpiece to be machined and the machining paths of machining tools relative to the workpiece but also the movement of the workpiece as a machining path of relative movement of the machining tool with respect to a stationary workpiece. The machining path of the relative movement of the machining tool is obtained based on data representing the movement of the workpiece per se.
Patent KR-890003710-B1 (KR)
Title: Process for preparing l-glutamicacid by fermentation
Inventor: SONG SOK-WON
IPC: C12P13/14
Filed: 1987-04-14
Granted: 1989-09-30
Abstract: Cane molasses (CM), beet molasses (BM) and raw sugar (RS) of 1:1:3- 1:1:6 are used as a carbon source of culture media for prepg. high yields of L-glutamic acid.  At the beginning of multiplication of L- glutamic acid-producing bacteria, CM and RS of culture media are controlled to be 1:1-4:1 ratio; BM and RS in feed sucrose (used after the last stage of major multiplication) are controlled to be 1:4-3:7 ratio .
Patent KR-940010178-B1 (KR)
Inventor: OHTAKA HIROSHI
IPC: C07D295/14
Filed: 1987-07-01
Granted: 1994-10-22
Abstract: 내용 없음.
Patent KR-900003335-B1 (KR)
Title: The method of potential crimping polyester conjugated yarn
Inventor: KIM HAK-MOOK
IPC: D01F6/62
Filed: 1987-10-12
Granted: 1990-05-14
Abstract: Polyester composite fiber having potential crimping properties is prepd. by side-by-side type conjugated spinning of polyethylene terephthalate having 0.65 intrinsic viscosity and 50-80% high shrinkable polyester copolmer of the same kind having 0.73 intrinsic viscosity; stretching to 3.8-3.9 times at 80-100≰C; and relaxation heat-treatment to 20-28% at 175-220≰C; and again, strain heat- treatment to 5-9% at below 65≰C. In figure, A is low shrinkable polymer, B is high-shrinkable polymer.
Patent KR-900006563-B1 (KR)
Title: Gas valve auto control device
Inventor: BAE YOUNG-DON
IPC: F23N1/00
Filed: 1987-11-11
Granted: 1990-09-13
Abstract: The device contros gas volume flowing in to bunner for gas as sange or gas boiler. The device includes: pulley (2) fixed at shaft (1') of DC motor (1) controled by microcomputer; central screw portion (4) of movable working rod (3) movably bitted with the pulley and engaged with guide negative screw (5); working wheel (7) fitted to one end of working rod and engaging actuator (9) of variable resistor (8); needle valve (10) inserted to gas pathway of cock body having (13) inlet (11) and outlet (12) to control opening or closing of outlet.
Patent KR-900008652-B1 (KR)
Inventor: NISIKUCHI MASANORI
IPC: G01L9/04
Filed: 1987-12-07
Granted: 1990-11-26
Abstract: 내용 없음.
Patent KR-900008306-B1 (KR)
Title: Method for filling polygon using masking pattern
Inventor: CHUNG JUNG-OH
IPC: G06K15/12
Filed: 1987-12-07
Granted: 1990-11-12
Abstract: A method for filling a polygon comprises the steps of : storing a masking pattern in a ROM of a laser beam printer controller; reading an X starting point of a reference line, and the starting and ending points of a line; deciding Y area for exclusive-OR filling, calculating an address and an offset corresponding to the starting and ending points of X; comparing the addresses of the starting and ending points of X; if the address of the starting point is equal to the address of the ending point, getting a masking pattern by multiplying a starting offset masking pattern and an ending offset masking pattern; and adding one to the value of Y after exclusive-ORing the masking pattern and the data corresponding to the address.
Patent KR-920000424-B1 (KR)
Inventor: SATTO ISAO
IPC: G11B7/125
Filed: 1988-02-27
Granted: 1992-01-13
Abstract: 내용 없음.
Patent KR-970006972-B1 (KR)
Inventor: SASHO HIDEHIKO
IPC: G11B27/02
Filed: 1988-03-24
Granted: 1997-05-01
Abstract: 내용없음
Patent KR-910007040-B1 (KR)
Inventor: YOKO KIYOTAKA
IPC: H01H51/22
Filed: 1988-05-27
Granted: 1991-09-16
Abstract: 내용 없음.
Patent KR-910004806-B1 (KR)
Title: Method for routing and assigning signal link of common signal transfer repeater
Inventor: CHOI YANG-HUI
IPC: H04Q3/00
Filed: 1988-06-17
Granted: 1991-07-13
Abstract: The method  is  for  relating  the  level  functions  of  the signalling transfer point and for assigning  the  signalling  link selection (SLS) value to the level 2 signal link  to  improve  the efficiency  of  teh  signal  network  signal  networks  (L3)   are connected to  communicate  mutually  and  signal  links  (L2)  are connected to the signal neworks (L3)  respectively.  clusters  (C) are formed by connecting signal data links  to  the  signal  links (L2) one by one and the clusters are grouped by maximum F numbers. SLS values are assigned to the signal links differently  according to the clusters and the F numbers of signal links are assigned  by same SLS value.
Patent KR-930002817-B1 (KR)
Inventor: CAPASSO FEDERICO
IPC: H03B19/16
Filed: 1988-11-02
Granted: 1993-04-10
Abstract: 내용 없음.
Patent KR-910007345-B1 (KR)
Title: Flame regulation structure of gas range
Inventor: KIM KYONG-HUI
IPC: F24C3/12
Filed: 1988-12-31
Granted: 1991-09-25
Abstract: The gas range  controller  generates  an  alarm  signal  when cooking  is  finished  or  requlates  flame   when   the   cooking temperature  has  to  be  lowered.  The  controller  comprises   a temperature sensing rod  (6)  directly  inserted  into  the  food, temperature sensing elements (7,10) within the rod  (6)  switching according to the food temperature, a control knob (9),  positioned at one end of the rod (6), for setting a reference temperature,  a thermostat (1) connected in  series  to  the  temperature  sensing elements (7,10), and a magnetic power unit (MG) coil for actuating a gas valve (3) corresponding to the reference temperature set  at the control knob (9).
Patent KR-910008124-B1 (KR)
Title: Method of fabricating semiconductor memory device having stacked capacitor
Inventor: KIM JAE-KAP
IPC: G11C11/34
Filed: 1989-04-17
Granted: 1991-10-10
Abstract: The  semiconductor  memory  device  with  stacked  capacitor structure, which is formed by; forming a mask layer on  conducting material (12) for charge storage electrode and spacer at  sidewall of mask layer; forming charge storage electrode (12')  by  etching the conducting material followed by  forming  a  dielectric  layer (17) and cell plate electrode (18)  on  charge  storage  electrode (12'), has advantage  for  minimization  the  distance  of  charge storage electrode space  and  maximization  the  surface  area  of charge storage electrode.
Patent KR-930005654-B1 (KR)
Inventor: DABIDA YOSHIKAZU
IPC: A01M13/00
Filed: 1989-04-26
Granted: 1993-06-24
Abstract: 내용 없음.
Patent KR-960000811-B1 (KR)
Inventor: YOSHIKAWA OSAMU
IPC: B65B1/10
Filed: 1989-10-21
Granted: 1996-01-13
Abstract: 내용 없음.
Patent KR-920000687-B1 (KR)
Inventor: KOMRI TOMAS P
IPC: F04C18/32
Filed: 1989-12-07
Granted: 1992-01-20
Abstract: 내용 없음.
Patent KR-950013518-B1 (KR)
Inventor: PARSONS DAVID
IPC: F16H59/02
Filed: 1988-05-16
Granted: 1995-11-08
Abstract: 내용 없음.
Patent KR-950000026-B1 (KR)
Inventor: HOSHITA TETSUSHI
IPC: G11C11/407
Filed: 1990-03-15
Granted: 1995-01-07
Abstract: 내용 없음.
Patent KR-920008116-B1 (KR)
Inventor: NAGARA HISAO
IPC: H01G9/02
Filed: 1990-04-04
Granted: 1992-09-22
Abstract: 내용 없음.
Patent KR-930010785-B1 (KR)
Inventor: NAKANO MICHIO
IPC: C08K5/3415
Filed: 1990-06-02
Granted: 1993-11-11
Abstract: 내용 없음.
Patent KR-950005502-B1 (KR)
Inventor: SUYAMA SYOKO
IPC: F16C33/04
Filed: 1990-07-27
Granted: 1995-05-24
Abstract: 내용 없음.
Patent KR-920009042-B1 (KR)
Title: Process for the preparation of methyl 2-formyl butyrate
Inventor: WEBER JURGEN
IPC: C07C69/66
Filed: 1990-08-24
Granted: 1992-10-13
Abstract: The invention relates to a method for the production of methyl 2-formylbutyrate by hydroformylation of methyl crotonate in the presence of catalysts which contain rhodium and organic phosphines.
Patent KR-970006418-B1 (KR)
Inventor: IZAWA YUJI
IPC: G07D9/00
Filed: 1990-09-05
Granted: 1997-04-28
Abstract: 내용없음.
Patent KR-930007509-B1 (KR)
Title: Polyester film
Inventor: SONG KWANG-JIN
IPC: C08J5/18
Filed: 1990-12-05
Granted: 1993-08-12
Abstract: This is a biaxially oriented polyester  film  which  improves the crystal structure and surface resistance of film by  adding  a new composition of anionic antistatic agents. The film has 0.4-1.0 dl/g of critical  viscosity;  20-80  angstroms  of  crystal  size; 1.370- 1.410  of  specific  gravity  and  below  1016Ω   of  surface resistance. The polyester film comprises a) 80 wt.%  PET;  and  b) 0.05-10.0 wt.% anionic  antistatic  agent  of  formula  (I)  whose acidic value is 0.01-0.6 mgKOH/g. In formula, R is C8-25 alkyl and M is alkali earth metal as Li, Na, and  K.  The  pref.  antistatic agents   are   4-oltyl-di(potassium   benzenesulfonate)     ether, 4- nonyl-di       (potassium       benzenesulfonate)         ehter, 4- undecyl-di(potassium          benzenesulfonate)           ether, 4- eicosyl-di(lithium  benzenesulfonate)  ether,  4-nonyl-di(sodium benzenesulfonate)   ether,   4-decyl-di(sodium   benzenesulfonate) ether,     4-heptadecyl-di(sodium     benzenesulfonate)     ether, 4- nonadecyl-di(sodium benzenesulfonate) ehter, etc.
Patent KR-940003807-B1 (KR)
Inventor: SEKI TERUO
IPC: H03K19/018
Filed: 1991-01-25
Granted: 1994-05-03
Abstract: 내용 없음.
Patent KR-930007702-B1 (KR)
Title: Ozone washing machine control device and method
Inventor: KIM HONG-SONG
IPC: D06F17/12
Filed: 1991-01-26
Granted: 1993-08-18
Abstract: This device minimizes energy  waste  from  unnecessary  ozone production and to prevent excess  load  on  the  ozone  production device  which  contributed  to  the  improvement  of  the  washing machine's credibility, by stopping  the  ozone  production  device whenever hot water is used, to distinguish and limit the  quantity of cold water when it is used and to produce  minimum  ozone,  and when no water is used, to stop the  ozone  producing  device  from functioning. The device comprising a 1st sensor which  senses  the water used in the washing machine during the last rinsing process; a 2nd sensor which senses the quantity of the  water  used  during this process; and  an  ozone  producing  device  controller  which controls the off switch of the ozone producing device by receiving control signals (perception signals coming from both sensors) from the micom which controls  the  washing,  rinsing,  evacuating  and drying processes.
Patent KR-950000789-B1 (KR)
Inventor: HASEGAWA NAOYA
IPC: C22C38/10
Filed: 1991-02-27
Granted: 1995-02-02
Abstract: 내용 없음.
Patent KR-940002121-B1 (KR)
Title: Driving apparatus of a paper-feeding table in a copier
Inventor: LEE HYONG-SOK
IPC: G03G15/00
Filed: 1991-04-30
Granted: 1994-03-17
Abstract: The apparatus provides power transmission without addition of another drive to save power. The apparatus comprises the following; a power transmission set with a hinge pin (5') for controlling the driving transmission power; a spring (7), a fixed plate (1) and a driving gear (11) each fixed with another hinge pin (5) and rotating the idle gear; a pin (13) and a paper loader gear for driving the paper loader table.
Patent KR-930006004-B1 (KR)
Title: Autocleaner for shoes
Inventor: NAM JONG-KI
IPC: A47L23/22
Filed: 1991-05-10
Granted: 1993-07-01
Abstract: The duster is installed at the entrance  to  a  house  or  an office to dust the outsoles of shoes and absorb the dusted matters while a person steps on it. The duster comprises a frame having  a number of legs and holes, a stepping means having  actuators  each moving up and down through respective holes to  dust  and  receive foreign matters off the outsole and also having springs to provide elasticity for moving the actuators up and down, a  control  means having a detector, an amplifier, a band pass filter, a  comparator and a motor drive. The duster keeps clean the entrance.
Patent KR-930011128-B1 (KR)
Title: Capacitor structure of semiconductor memory device and method of manufacturing therefor
Inventor: LEE KYU-PIL
IPC: H01L27/108
Filed: 1991-06-12
Granted: 1993-11-24
Abstract: The  capacitor  structure  of  semiconductor  memory  device comprises a 1st storage electrode of a shape at an  interval  with an intermediate isolating layer formed on the lower  part,  a  2nd storage electrode covering the remaining part except  the  contact part of  1st  storage  electrode  and  the  part  of  intermediate isolating layer, a dielectric film coating  1st  and  2nd  storage electrodes, a plate electrode completely covering  the  dielectric film. The capacitor has an available capacitor area at  the  upper and lower and side faces of storage electrodes.
Patent KR-0171599-B1 (KR)
Inventor: KIM CHONG-KOOK
IPC: G01N33/535
Filed: 1991-06-21
Granted: 1999-05-01
Abstract: 본 발명은 시료중 특정 항원 또는 항체를 정량적으로 또는 정성적으로 측정하기 위한 면역학적 분석법에 사용되는 진단시약을 제공하기 위한 면역리포좀의 제조 방법에 관한 것이다.
Patent KR-940005665-B1 (KR)
Title: Refrigerator
Inventor: KIM HYO-SANG
IPC: F25B43/00
Filed: 1991-07-16
Granted: 1994-06-22
Abstract: The apparatus is arranged in which a surface active agent separating device is connected in series between a condenser and evaporator so that the surface active agent flows to a low temperature generator through an overflow pipes, thereby preventing the performance from being decreased.
Patent KR-100230512-B1 (KR)
Inventor: MOLLY NICOLAS J
IPC: H03L7/197
Filed: 1991-08-07
Granted: 1999-11-15
Abstract: 출력 클럭 신호 주파수의 정수배가 아닌 주파수를 갖는 기준 신호로부터 출력 클럭 신호를 실현시키도록 디지탈 위상 고정 루프가 사용된다.  이것은 제어가능하게 변동하는 기본 제수에 의해 동적으로 제어되는 기준 신호를 분할하는 프로그램가능한 분할기를 사용함으로서 실현된다.  기본 제수 제어는 기준 신호 및 위상 에러 신호에 응답한다.  기본 제수는 기준 신호 주파수의 소정의 분수 분할을 얻기 위해, 그리고, 루프로부터의 출력 클럭 신호에서 임의의 "고" 주파수 지터의 진폭을 최소화하도록 하는 방식으로 발생된다.
Patent KR-0161894-B1 (KR)
Inventor: LEE BYUNG-CHUL
IPC: F04C18/02
Filed: 1991-11-08
Granted: 1999-01-15
Abstract: 본 발명은 스크롤 압축기에 관한 것으로서, 한쌍의 압축실에서 압축된 가스가 토출공으로 균등하게 토출될 수 있도록 하여 상기 각 압축실의 압력 불균형에 따른 기기의 이상진동과 스크롤 랩의 손상을 방지할 수 있도록 한 것으로 이를 위해 본 발명은 선회스크롤(1)이 고정스크롤(2)과 맞물려서 회전할때 한쌍의 압축실(3)(3a)에서 압축된 가스가 토출공(4)을 통해 토출될 수 있도록 한것에 있어서, 토출공(4)의 위치를 간극체적(6)내에 위치시키고, 그 크기는 선회스크롤(1)과 고정스크롤(2)의 랩 내접면(7)(7a)에 일치되는 최대의 원으로 형성한 것이다.
Patent KR-100239389-B1 (KR)
Inventor: NOJAWA DOSHIHISHA
IPC: H01L21/302
Filed: 1991-11-28
Granted: 2000-01-15
Abstract: 플라즈마 에칭장치는, 피처리체를 재치 고정하는 서셉터(12, 14)와, 서셉터(2, 14)를 저온역까지 신속하게 냉각하는 고냉각 능력의 냉매(21)를 가지는 냉각쟈켓과, 서셉터 및 냉각쟈켓(20)을 둘러싸는 프로세스 챔버(10a)와, 프로세스 챔버(10a)내를 진공배기하는 배기기구(34, 36)와, 서셉터(12, 24)와 냉각자켓(20)과의 사이에 개재하는 절연부재(16)와, 서셉터(12, 14)와 절연부재(16)와 냉각쟈켓(20)과의 상호 접촉면부에 형성된 O링용 홈(51, 53, 55)에 헬륨가스를 공급하는 가스공급기구(71, 80)와, 헬륨가스의 공급압력을 제어하는 압력제어기구(70)를 가진다.