baber/WOPTO huggingface dataset:
Patent JP-H03263815-A (JP)
Title: Formation method of resist pattern
Inventor: ABE NAOMICHI
IPC: H01L21/027
Filed: 1990-03-14
Abstract: PURPOSE:To form a submicron pattern by a method wherein a chemically sensitized resist whose film has been formed on a semiconductor substrate is exposed selectively to light, the rear of the substrate is brought into close contact with and fixed to a flat electrode, the face of the resist film on the substrate is brought into contact with another electrode, this assembly is heated while a voltage is being applied across both electrodes and a develop ing operation is executed. CONSTITUTION:A chemically sensitized resist 1 whose film has been formed on a semiconductor substrate 2 is exposed selectively to light; the rear of the substrate 2 is brought into close contact with and fixed to a flat electrode 3; and the face of the resist film on the substrate 2 is brought into contact with another electrode 6. This assembly is heated while a voltage is being applied across both electrodes 3, 6; and after that, a developing operation is executed. For example, an Si wafer 2 is coated with a chemically sensitized resist 1 in a thickness of 1mum; it is exposed to an excimer laser whose oscillation wavelength is 249nm; after that, the Si wafer is fitted to a metal electrode 3; and the resist face is brought into contact with mercury 6 in a mercury reservoir 7. A power supply 4 is adjusted so as to apply a voltage of 1V at 50Hz to the resist 1; and at this stage, a heater 5 is turned on. The wafer 2 is heated at 120 deg.C for five minutes. After that, it is developed by using an alkaline developer.
Patent JP-S6290563-A (JP)
Title: Apparatus for measuring impulse voltage
Inventor: TAKEDA KATSUYA
IPC: G01R19/155
Filed: 1985-03-29
Abstract: PURPOSE:To measure impulse voltage with high accuracy, by converting voltage divided by a potential divider to an optical signal and transmitting said optical signal to a measuring apparatus by the use of an optical fiber while electrically separating an impulse voltage generating circuit and an impulse voltage measuring circuit. CONSTITUTION:The impulse voltage generated from an impulse voltage generating apparatus 1 is applied to a discharge resistor Ro and the voltage of the discharge resistor Ro is applied to a high resistance film 4 being load through a control resistor Rs. At this time, a part of the voltage of the resistor Ro is divided by a potential divider 2 to be inputted to a light emitter 5. The voltage inputted to the light emitter 5 is converted to an optical signal which is, in turn, inputted to a light receiver 7 through an optical fiber 6 to be outputted as impulse voltage. This impulse voltage is measured by a voltage measuring device 3. By this method, an impulse voltage generating circuit and an impulse voltage measuring circuit can be electrically separated and noise is prevented from entering the measuring device from the potential divider and impulse measurement excellent in an insulating property, non-inductivity and a wide band-pass property can be performed with high accuracy.
Patent JP-H03262961-A (JP)
Title: Gate pulse generating circuit of ultrasonic measuring instrument
Inventor: NISHIZUKA KEN
IPC: G01N29/38
Filed: 1990-03-14
Abstract: PURPOSE:To generate a gate pulse at accurate timing by providing two counters, operating those counters and a clock generating circuit simultaneously according to surface echo detection, and controlling so as to count the time. CONSTITUTION:This instrument is provided with counters 4, 5, and 6 which count the period from the surface echo detection to the gate pulse generation and a status counter 9 which counts a period corresponding to the pulse width of the generated gate pulse. Then the counter 9 and a status decoder 10 control the counters 4, 5, and 6 and clock generating circuit 11 according to the surface echo detection to operate simultaneously and count the time, so that the time up to the gate pulse generation begins to be counted according to the surface echo detection. Further, the counters 4, 5, and 6 and circuit 11 are put in operation again for the gate width at the end of the counting of the gate pulse generation. Consequently, the operation is not limited to clock pulses used for the reference of the time counting.
Patent JP-H09257368-A (JP)
Title: Drying and humidifying device and method for using the same
Inventor: TAKAHASHI SEIJI
IPC: F26B5/16
Filed: 1996-03-19
Abstract: PROBLEM TO BE SOLVED: To properly dry and humidify woods, rice, unhulled rice, fish, etc., by connecting a drying source room able to receive drying, humidifying agents to a drying room able to receive materials to be dried and drying, humidifying agents, and providing a microwave generating part for regenerating drying, humidifying agents in the drying sourse room and an exhaust gas treating part. SOLUTION: A drying room 5, in which materials K to be dried and silica gel S being a drying, humidifying agent are stored, is provided in a box 3 of a drying, humidifying device 1, and a drying source room 7 for receiving silica gel S is disposed below the room 5. And a microwave generating part 9 for generating microwaves to dry and regenerate the silica gel S in the room 7 is disposed above the room 7 and an exhaust gas treating part 11 is provided to destroy the bad odor produced at the time of regeneration of silica gel S to exhaust it. And a dry air introducing passage 19 is provided beside the room 5 and room 7 to interconnect both the rooms, so that dry air is introduced from the room 7 into the room 5, and a fan 23 driven by a motor 21 is provided.
Patent JP-H04298030-A (JP)
Title: Method of forming metal plug
Inventor: SATO JUNICHI
IPC: H01L21/768
Filed: 1991-03-27
Abstract: PURPOSE:To contrive to make minute and high density by a method wherein a metal is formed on an insulating film containing a connecting hole through a close-adhered layer and a metal plug is formed by removing the metal and close-adhered layer so that the metal plug may be left wider than the connecting hole. CONSTITUTION:A resist mask 20 wider than a connecting hole 14 is formed on a branket tungsten layer 16 and the branket tungsten layer 16 and a close- adhered layer 15 are etch-removed to form a metal plug 16A. Next, a metal 21 forming an upper layer wiring is adhered and formed onto the entire surface. For instance, an Al-Si film as the metal 21 is adhered and formed by a sputtering. Thereafter, the surface is made flat by a resist film and then the entire surface is etched back to form an upper layer wiring 21A comprising, for instance, the Al-Si film so that the entire surface may coincide with an upper surface of the metal plug 16A.
Patent JP-S60207362-A (JP)
Title: Cmos type semiconductor device and manufacture thereof
Inventor: SHIRAI KOUJI
IPC: H01L27/092
Filed: 1984-03-31
Abstract: PURPOSE:To eliminate impurity diffusion, and to reduce the damage of an silicon crystal by forming first and second projecting sections onto a silicon substrate while constituting P and N channel MOS transistors to these projecting sections. CONSTITUTION:P type semiconductor layers 171, 172 are formed on two projecting sections 141, 142 through epitaxial growth while two mutually isolated P type semiconductor layers 171a, 171b are shaped to the projecting section 141. Two mutually isolated N type semiconductor layers 22a, 22b are formed at the position of the projecting section 142. Consequently, a P channel MOS transistor 30 is constituted at the position of the projecting section 141 while an N channel MOS transistor 35 is constituted at the position of another projecting section 142. Accordingly, an silicon crystal is not damaged due to heat treatment because there is no process for impurity diffusion in the method.
Patent JP-S61218704-A (JP)
Title: Gland steam pipe device for steam turbine
Inventor: YAMAMOTO TAKAO
IPC: F01D11/04
Filed: 1986-03-20
Abstract: PURPOSE:To prevent reduction of the strength of an axle by communicating an intermediate chamber formed in a portion of a labyrinth packing adjacent to the casing and an intermediate stage of an array of turbine blades on the higher pressure side than the bleeding stage. CONSTITUTION:An intermediate chamber 13 is formed in a portion of a labyrinth packing 5 adjacent to the casing 4. The intermediate chamber 13 is communicated through a connecting pipe 17 with an intermediate stage E of an array of turbine blades on the higher pressure side than the bleeding stage D. This causes the bleed from the intermediate stage E to be leaked through the intermediate chamber 13 and mixed with steam, so that the temperature of gland steam is lowered, preventing reduction of the strength of the axle 1 due to heating thereof.
Patent JP-S60223718-A (JP)
Title: Conveying apparatus
Inventor: SUMIYA TADAAKI
IPC: B65G51/26
Filed: 1985-03-29
Abstract: PURPOSE:To obtain facilitated and unmanned conveying in a cartridge conveying apparatus such as for semiconductor wafer by providing at a part of a conveying pipe a detachable tube member having one end closed and the other end open and holes on the tube wall adjacent to the other end. CONSTITUTION:A shaft 20 is rotated to place an one-end closed tube 5 in a line of conveying pipes 2, and when a cartridge from the preceding step is supplied thereto through compressed air, the cartridge is received in the one-end closed tube 5 and air goes away through holes 9. At this time, the cartridge can be buffered by air in the portion 12 of the tube 5 to be stopped without shock. When the shaft 20 is rotated to place another tube 6 in a line of the conveying pipes 2, cartridges pass therethrough, and a further tube 5' is used to receive a cartridge from the other direction. Such a construction allows unmanned conveying.
Patent JP-H02244178-A (JP)
Title: Fixing device
Inventor: WATABE HIDEAKI
IPC: G03G21/10
Filed: 1989-03-17
Abstract: PURPOSE:To allow the easy and sure exchange of a cleaning pad by pressing the cleaning pad to a fixing roller by the closing action of an opening/closing door and moving a process cartridge to a working space side for exchange and releasing the pressing force of the cleaning pad on the fixing roller by the opening action thereof. CONSTITUTION:The cleaning pad 50 is held pressed to the fixing roller 40 when the opening/closing door is closed and, therefore, the cleaning of the fixing roller 40 is sufficiently executed. The cleaning pad 50 is attachably and detachably exposed to the fixing roller 40 and is mounted to a fixing device body 44; in addition, the cleaning pad 50 moves together with the opening/closing door toward the working space side for exchanging the process cartridge when the opening/closing door is opened. The pressing force of the cleaning pad 50 onto the fixing roller 40 is thereby released. The sure exchange of the cleaning pad 50 is executed in this way and since the exchange operation of the cleaning pad 50 is directly executed from the working space side for exchanging the process cartridge, the exchange operation is facilitated.
Patent JP-S54155030-A (JP)
Title: Method of manufacturing speaker box installing base
Inventor: NAKAGAWA AKIRA
IPC: H04R1/00
Filed: 1978-05-26
Abstract: PURPOSE:To improve the productivity of a speaker box installing base and to readily enhance the low frequency sound characteristics of the speaker box by extruding or drawing a resin cylinder of suitable thickness and cutting the cylinder in predetermined length. CONSTITUTION:A resin cylinder 5' of suitable thickness is extruded or drawn and then cut along the cutting lines a, b and c into predetermined size to thereby obtain a base 5. When the cylinder 5' is extruded or drawn, material having high specific weight such as gypsum or the like is mixed with extruding or drawing material to thereby obtain a base corresponding to a concrete block to thus enhance readily the low frequency sound characteristics of a speaker box for less number of steps and low cost.
Patent JP-H03269166-A (JP)
Title: Insect proof acrylic synthetic fiber
Inventor: ONO MASAHITO
IPC: D06M101/16
Filed: 1990-03-14
Abstract: PURPOSE:To obtain the subject fiber useful for blanket, suit, mat, carpet or curtain, etc., having excellent resistances to washing, dry cleaning and wet heat with below a specific value of extracted fraction containing a specific amount of a specific insert proof component in acrylic synthetic fiber. CONSTITUTION:The aimed fiber is obtained by containing 0.1-3.0wt.% in total of isobornylthiocyanoacetate expressed by formula I and N,N-diethyl-m-tolamide in acrylic synthetic fiber and setting extracted fraction of said two compounds by dipping in a alcohol-benzene mixed solution (volume ratio is 1:2) at 30 deg.C for 60 min so as to be below 40wt.% of initial content. Besides, a mutual weight ratio of the isobornylthiocyanoacetate and N-diethyl-m-tolamide is preferably 1:0.5-2.0.
Patent JP-S63230832-A (JP)
Title: Deposition substrate for thermal decomposition of iodide
Inventor: KIKUCHI AKIRA
IPC: C22B9/05
Filed: 1987-03-20
Abstract: PURPOSE:To obtain a substrate for deposition having superior peeling characteristic of deposited refined metal, practically free from breaking, and capable of repeated use, by constituting a substrate, which is used in the recovery of a refined metal by subjecting metallic iodide to thermal decomposition and depositing the resulting refined metal, of high-purity Ta. CONSTITUTION:Metallic iodide formed by allowing a metallic material such as Cr, Ti, V, Zr, Nb, Hf, etc., to react with I2 vapor at high temp. is brought into contact with a high-temp. substrate to undergo thermal decomposition, so that high-purity metal is deposited on the substrate. In the above-mentioned high-purity metal manufacturing device, by incorporating >=90wt.% Ta to the above substrate, the deposited refined metal can be peeled off by being pressurized to undergo deformation to a slight extent. It is preferable that, in the above-mentioned substrate, the formation of the diffusion alloy layer of the deposited metal is prevented by providing an oxidation or nitriding layer of about 3-5mum to the surface or by coating the surface with a stable compound, that is, an oxide or nitride in which free energy of formation at 1,200 deg.K is regulated to <=-150kcal/mol. or <=-80kcal/mol., respectively, to 30-80mum thickness.
Patent JP-H05264521-A (JP)
Title: Ae sensor and sensor cable protection device in ae measurement
IPC: G01H17/00
Filed: 1992-03-19
Abstract: PURPOSE:To obtain a protection device of an AE sensor and a sensor cable in AE measurement enabling measurement to continue without causing the sensor cable to be cut and damaged even if the ground slides in AE measure ment using a wave guide. CONSTITUTION:An AE sensor 1 is mounted to a wave guide 2, at the same time a metal holder 3 is fitted to the outer periphery of the AE sensor part, and then a sensor cable 5 of the AE sensor 1 is connected into a flexible hose 4 which is adhered to the holder 3. The wave guide 2 is inserted into a stake hole 7 of the ground 6 and at the same time a mortar 8 is loaded into a spacing between the stake hole 7 and the wave guide 2.
Patent JP-H02245579-A (JP)
Title: Gasket
Inventor: FURUSE MUNEO
IPC: F16J15/08
Filed: 1989-03-17
Abstract: PURPOSE:To prevent corrosion due to gallium and indium in a molecular beam epitaxy apparatus by coating a surface of a copper gasket with tantalum, titanium, tungsten, molybdenum or niobium. CONSTITUTION:A coating film 2 of tantalum, titanium, tungsten, molybdenum or niobium is formed on a surface of a gasket 1 made of copper or silver or gold or aluminum. In applying the gasket 1 to a molecular beam epitaxy apparatus, any leak due to corrosion does not occur. Consequently, any equipment for replacing the gasket 1 is not necessary and a position for attaching a flange can be freely selected.
Patent JP-H08261655-A (JP)
Title: Cooling zone of continuous furnace, and its cooling method
Inventor: KANESHIGE MITSUO
IPC: F27D7/00
Filed: 1995-03-23
Abstract: PURPOSE: To provide a cooling zone of a continuous furnace and a method for cooling the same in which the entire furnace chamber can be uniformly cooled. CONSTITUTION: A partition wall 6 is provided inside the furnace wall 1 of a cooling zone and a ceiling wall 2 to form a gas circulating space 7. A suction unit 8 is provided at the ceiling of the space 7, the gas in the furnace is sucked from a furnace chamber 10, and discharged into the space 7. The gas in the furnace circulated in the space 7 is mixed with the atmosphere introduced from external gas introducing means 11, and blown from the circulating gas outlet 12 of the lower part of the furnace into the chamber 10.
Patent JP-H03264587-A (JP)
Title: Fluorane compound
Inventor: ARAKI KATSUMI
IPC: B41M5/327
Filed: 1990-03-14
Abstract: NEW MATERIAL:A 2-anilino-3-methyl-6-N-ethyl-N-[3-(substituted phenoxy) propyl]aminoflurane. EXAMPLE:2-Anilino-3-methyl-6-ethyl-N-[3-(2-ethylphenoxy)propyl]aminofl uorane. USE:An electron-donating colorless dyestuff. PREPARATION:2-Anilino-3-methyl-6-N-ethyl-(3-bromopropyl)aminofluorane is heated and reacted with o-ethylphenol or 3,5-difluorophenol in the presence of a base.
Patent JP-H11245330-A (JP)
Title: Manufacture of polyamide resin-coated metal plate with excellent processing adhesion, polyamide resin-coated metal plate and container using it
Inventor: SAKAMOTO YOSHIKI
IPC: B29L9/00
Filed: 1998-03-02
Abstract: PROBLEM TO BE SOLVED: To prevent a ply separation or a crack and to further prevent a film release by controlling to become a count/sec of a specific value in the case of measuring an analytical strength of a polyamide resin after laminating under specific X-ray analytical condition. SOLUTION: At least one side surface of a metal plate is covered with a polyamide resin having an analytical strength in the case of measuring under specific X-ray analytical conditions of 500 to 7,500 counts/sec (SPS). As the conditions, a target (an X ray tube) is a Cu-Ka, an analytical angle (2θ) is 23.7 deg., a tube voltage is 50 kV, a tube current is 190 mA, and a counting time is 1 sec. As the plate, a steel sheet, a lamina plated steel sheet of nickel, tin, zinc, copper or the like, a multilayer plated steel sheet, an alloy-plated steel sheet, various type surface treated steel sheets, a stainless steel sheet, an aluminum plate, an aluminum alloy plate or the other is used. The plate is covered with the polyamide by an extrusion method, or a film laminating method.
Patent JP-H11249618-A (JP)
Title: Display controller and control method for display device
Inventor: KAMIO TOMOMI
IPC: G09G3/36
Filed: 1998-03-02
Abstract: PROBLEM TO BE SOLVED: To provide a display device capable of displaying a picture having a pixel ratio roughly equal to the pixel ratio of the horizontal direction and the vertical direction of a supplied picture on a display device. SOLUTION: An internal clock generating part 12 generates an internal clock signal from an inputted reference clock signal CK to supply it to a horizontal counter 14 and a dot clock generating part 15, which generates a dot clock signal DCK in which the internal clock signal is thinned every fixed interval according to a dot clock thinning clock DRES. A horizontal decoder 13 generates a horizontal control signal and a vertical control signal according to internal clock signals counted by the horizontal counter 14. An LCD(liquid crystal display) controller supplies the generated horizontal control signal and vertical control signal to an LCD driving part to display a picture on the LCD.
Patent JP-H06274634-A (JP)
Title: Teacher signal generating device and image recognizing device
Inventor: TADA YOSHINORI
IPC: G06F15/18
Filed: 1993-03-23
Abstract: PURPOSE:To recognize the image data to be recognized with high accuracy even for reference sample image data including vagueness by superposing con tour image data corrected by a correction input means, classifying them into types and generating a teacher signal by obtaining an ideal line. CONSTITUTION:Correction is performed with manual inputting by using a correction input means 4 for contour image data, etc., even when the contour image data obtained by mechanical image processing in an image preprocessing part 3 inclue any defective part, thereby appropriate contour image data can be prepared. Further, a teacher signal generating means 5 superposes a lot of contour image data corrected by the means 4, thereby the contour image data are classified into types based on the contour image data in a collected group, and the teacher signal is prepared by calculating the ideal line for each type. Thus, the high-reliability teacher signal can be prepared from the sample image data for reference including vagueness.
Patent JP-2000259696-A (JP)
Title: Verification device
Inventor: IMAI HIROSHI
IPC: G01R31/28
Filed: 1999-03-10
Abstract: PROBLEM TO BE SOLVED: To prevent the generation of misverification in the case of verifying a logical circuit by forming a part of the circuit as a black box. SOLUTION: When a circuit part obtained by dividing a logical circuit to be verified by a circuit division part 1 is formed as a block box, a condition between output signals from the black box is found out by a condition setting part 2 and a verification part 3 for verifying a circuit to be divided into a black box and the condition is stored in a conditional expression storage part 4. A circuit verification part 6 for verifying the operation of the circuit whose black box is to be verified executes the verification while considering of the condition between the outputs of the black box which is stored in the storage part 4. Consequently misverification to be generated due to no consideration of the condition between the outputs of the black box can be evaded.
Patent JP-S62220840-A (JP)
Title: Inspecting instrument
Inventor: TANABE YOSHIKAZU
IPC: H01L21/66
Filed: 1986-03-24
Abstract: PURPOSE:To easily search for a defect in the pattern of a body to be inspected, etc., while referring to an image by recording images of individual inspection positions of the body to be inspected along with position information on the specific inspection positions. CONSTITUTION:A sample table 1 is moved continuously to detect foreign matter by an inspection part 5a and when the foreign matter is detected, the coordinates of the sticking position of the foreign matter on a body to be 2 inspected are stored successively in a position information holding part 6 through a control part 4 and the image of individual foreign matter is recorded in an image recording part 8 so that it can be retrieved and reproduced. Then the image corresponding to the sticking position of the foreign matter is reproduced and referred to properly on the basis of information on the sticking position of the foreign matter after pattern formation processing for the body to be inspected 2 and the inspected body 2 is observed by a visual observation part 5b at the same time to search for a pattern defect, etc.
Patent JP-H05267429-A (JP)
Title: Method for evaluating atmosphere
IPC: H01L21/66
Filed: 1992-03-19
Abstract: PURPOSE:To discriminate presence of a fine particle or a small amount of components easily. CONSTITUTION:A silicon wafer for evaluation is created by exposing a silicon wafer 1 to a liquid 2 containing hydrogen fluoride or a gas 3 containing hydrogen fluoride and then performing surface treatment, the silicon wafer for evaluation is left within an atmosphere to be evaluated, and then the number of substances which are adhered to the surface of the silicon wafer for evaluation is measured after a preset amount of time. Also, after the silicon wafer 1 is treated within oxidized medical liquid the silicon wafer for evaluation is created by performing surface treatment by exposing the silicon wafer 1 to the liquid 2 containing hydrogen fluoride or the gas 3 containing hydrogen fluoride and then the number of substances which are adhered to the surface of the silicon wafer for evaluation is measured after a preset amount of time by leaving the silicon wafer for evaluation within an atmosphere to be evaluated.