baber/WOPTO huggingface dataset:
Patent TW-507288-B (TW)
Title: Dry etching device
Inventor: YAMAGUCHI AKIRA
IPC: H01J37/32
Filed: 2001-07-09
Granted: 2002-10-21
Abstract: It is an object of the present invention to provide an upper electrode which is prevented from being contaminated with an impurity, has a sufficient adhesive strength between the pedestal and electrode plate of silicon, secures high-precision parallelism with the lower electrode, and hence improves the etching characteristics and silicon wafer yield. It is another object of the present invention to provide a dry etching device equipped with the upper electrode. The present invention provides an upper electrode for dry etching devices, comprising an electrode plate of silicon which is supported by a pedestal, wherein (a) the pedestal is made of graphite, and (b) the electrode plate of silicon is joined to the pedestal by an organic adhesive containing a filler having a Young's modulus of 6x10<SP>9</SP> to 68x10<SP>9</SP> N/m<SP>2</SP>.
Patent TW-534844-B (TW)
Title: Manufacturing method of elbow joint and structure thereof
Inventor: CHEN JIN-CHANG
IPC: B22D17/08
Filed: 2001-07-20
Granted: 2003-06-01
Abstract: Disclosed is a "" manufacturing method of elbow joint and structure thereof,"" which tightly abuts an upper and a lower mold oppositely and matches the mold slots in the molds with each other. Two ends of the mold cavity are each provided with a sliding block driven by a hydraulic cylinder, and the sliding block can be driven into the mold slot of the molds, so that the elbow can be formed in the mold slot after the casting material is poured. Since the two sliding blocks are withdrawn from the sliding slot at the two ends, large ejecting taper is not needed, so as to make the dimension at opposing ends of the elbow to be the same to allow easy manufacturing. Further, reticles for commonly used cutting angles are provided at an intermediate section of the elbow to allow easy cutting.
Patent TW-497163-B (TW)
Title: Method for producing integrate salicide gate for embedded DRAM devices
Inventor: CHIANG MIN-HSIUNG
IPC: H01L21/28
Filed: 2001-07-23
Granted: 2002-08-01
Abstract: The present invention provides a method for producing an integrated salicide gate for embedded DRAM devices, which is applicable on a semiconductor substrate, and comprises: sequentially forming a gate oxide layer, a first polysilicon layer, a first mask layer and a first hard mask layer on the substrate; defining the gate oxide layer, the first polysilicon layer, the first mask layer and the first hard mask layer to form a gate structure; forming a source/drain on the semiconductor substrate; forming a second mask layer, a pad layer and a first insulative layer on the semiconductor substrate to cover the gate structure and the source/drain; defining the second mask layer, the pad layer and the first insulative layer to form a capacitor contact opening and a bit line contact opening; depositing a hemi-spherical grain (HSG) layer, a dielectric layer and a second polysilicon layer on the capacitor contact opening and the bit line contact opening; defining the second polysilicon layer as an upper electrode plate of the capacitor; removing the first insulative layer, a portion of the pad layer, a portion of the second mask layer, the first hard mask layer, and the first mask layer to expose the surface of the first polysilicon layer; forming a silicide on the surface of the first polysilicon layer and the second polysilicon layer; forming a second hard mask layer and a second insulative layer on the semiconductor substrate; and forming a tungsten contact plug going through the inner dielectric layer and the second hard mask layer and forming an electrical connection with the bit line.
Patent TW-546419-B (TW)
Title: Powered lift for ECP chamber
Inventor: FRANKLIN TIMOTHY J
IPC: C25D17/00
Filed: 2001-08-08
Granted: 2003-08-11
Abstract: An electrochemical deposition system comprising a fixture adapted to selectively grasp and release an electrochemical process cell is provided. The system may include a lift/lower mechanism coupled to the fixture and adapted to automatically stop lowering the fixture at a process cell elevation, a rotation mechanism coupled to the fixture and adapted to automatically stop rotating the fixture when aligned with a process cell location and when aligned with a process cell exchange location. The fixture adapted to selectively grasp and release an object to be lifted may include a cam/follower coupling between a rotatable portion of the fixture and a gripping portion of the fixture. To grasp a process cell with the fixture the rotating portion of the fixture may be rotated so as to retract the gripping portion of the fixture causing the gripping portion to close around the process cell.
Patent TW-494180-B (TW)
Title: Heat transfer head for a Stirling engine
Inventor: CLARK DAVID ANTONY
IPC: F02G1/055
Filed: 2001-08-15
Granted: 2002-07-11
Abstract: A heat transfer head 10 for a Stirling engine is disclosed. The heat transfer head 10 comprises a plurality of external circumferential fins 30 projecting out from the heat transfer head 10. At least two of the adjacent fins 30 are arranged to be substantially parallel and such that some of the radiant heat received by one of the fins is reflected onto the other fin. A second set of fins 40 is provided above the circumferential fins. The second set of fins are arranged to enable combustion gases from a burner to pass upwards therebetween to enable heat to be absorbed from the passing combustion gases.
Patent TW-I226103-B (TW)
Title: Fabrication of semiconductor devices with air gaps for ultra low capacitance interconnections and methods of making same
Inventor: KOHL PAUL ALBERT
IPC: H01L21/768
Filed: 2001-08-30
Granted: 2005-01-01
Abstract: A method of forming an air gap or gaps within solid structures and specifically semiconductor structures to reduce capacitive coupling between electrical elements such as metal lines, wherein a sacrificial material is used to occupy a closed interior volume in a semiconductor structure is disclosed. The sacrificial material is caused to decompose into one or more gaseous decomposition products which are removed, in one embodiment by diffusion, through an overcoat layer. The decomposition of the sacrificial material leaves an air gap or gaps at the closed interior volume previously occupied by the sacrificial material. The air gaps may be disposed between electrical leads to minimize capacitive coupling therebetween. Also disclosed are methods of forming multi-level air gaps and methods or forming over-coated conductive lines or leads wherein a portion of the overcoating is in contact with at least one air gap.
Patent TW-I239339-B (TW)
Title: A method of toughening thermoplastic polymers and thermoplastic compositions produced thereby
Inventor: LAU WILLIE
IPC: B29C48/90
Filed: 2001-09-13
Granted: 2005-09-11
Abstract: A method of forming a toughened article from a blend of a thermoplastic polymer and a comb copolymer is disclosed, along with the toughened article produced thereby. Compositions such as solids blends and melt blends, including a thermoplastic polymer and a comb copolymer, are also disclosed.
Patent TW-I235852-B (TW)
Title: Reflective liquid crystal display device
Inventor: SASAGAWA TOMOHIRO
IPC: G09F9/00
Filed: 2001-10-11
Granted: 2005-07-11
Abstract: A reflective liquid crystal display device having a structure which makes it possible to provide high contrast even if there is undesired light. The structure includes a light-guiding plate for receiving from a light-incident surface thereof light coming from a light source, and for allowing the light to exit from a bottom surface; a reflective liquid crystal display panel disposed so as to oppose the bottom surface of the light-guiding plate; and a prism disposed on the side of a top surface of an upper substrate of the liquid crystal display panel. The prism has a surface that is substantially perpendicular to the top surface of the upper substrate, and a tilted surface which is tilted towards a side opposite to the light source from a crest line of the substantially perpendicular surface at a tilt angle with respect to an imaginary surface which passes through the crest line of the substantially perpendicular surface and which is parallel to the top surface of the upper substrate.
Patent TW-516282-B (TW)
Title: Transmission method with IR transmission head recognizing capability
Inventor: HAN JIA-HUEI
IPC: H04B10/11
Filed: 2001-10-16
Granted: 2003-01-01
Abstract: The present invention relates to a transmission method with IR transmission head recognizing capability. The method sets up the loop test mode of IR controller and program the IR controller in accordance with the corresponding testing transmission mode of testing vendors of IR transmission head to send out some transmitting test data, meanwhile, follows the corresponding testing transmission mode of testing vendors of IR transmission head to receive some receiving test data; when the transmitting test data and the receiving test data are identical, stores the testing brand of the IR transmission head and the corresponding testing transmission mode, and finally operates IR transmission head in accordance with the stored testing brand of the IR transmission head and the corresponding testing transmission mode.
Patent TW-574388-B (TW)
Title: Metallized target for physical vapor deposition
Inventor: CHU CHI-WEN
IPC: C23C14/04
Filed: 2001-12-06
Granted: 2004-02-01
Abstract: A metallized target for physical vapor deposition mainly comprises: a target substrate having an upper surface for receiving ion bombardments and a lower surface for connecting to an electrode, the lower surface of the target substrate having a multi-layered deposited metal film. The multi-layered deposited metal film comprises: a bottom metal layer covered on the lower surface of the target substrate, an intermediate metal layer covered on the bottom metal layer, a surface metal layer covered on the intermediate metal layer, in which the metal on the bottom layer is a pure metal selected from Ni, Cr, Mo, etc. and the metal of the intermediate layer is selected from Ni, Cr, Mo, etc. or is an alloy thereof. The metal of the surface layer is selected from Ag, Au, etc. or an alloy thereof. The present invention also provides a method for connecting a metallized target for physical vapor deposition to an upper electrode.
Patent TW-527633-B (TW)
Title: An integrated system for processing a plurality of wafers and a method of processing at least one wafer having a conductive front surface using an integrated wafer processing system
Inventor: ASHJAEE JALAL
IPC: C25F7/00
Filed: 2002-01-15
Granted: 2003-04-11
Abstract: An integrated system for processing a plurality of wafers, having a conductive front surface, is provided. The system includes a plurality of processing subsystems for depositing on or removing metal from the front surfaces of the wafers. Each processing subsystem includes a process chamber and a cleaning chamber. The system also has a wafer handling subsystem for transporting each of the wafers into or out or the appropriate one of the plurality of processing subsystems. The plurality of processing subsystems and wafer handling subsystem form an integrated system.
Patent TW-571113-B (TW)
Title: Coordinate positioning method for screen measurement
Inventor: CHEN WEN-CHIEH
IPC: G01R5/00
Filed: 2002-01-21
Granted: 2004-01-11
Abstract: The invention provides a coordinate positioning method for to-be-tested points of screen measurement, which comprises, first making a screen generating device generate a full white screen; next moving a sensor to make the sensor align with the left edge of the full white screen; next recording the horizontal coordinate of the sensor at this moment as an initial horizontal coordinate value; next, moving the sensor to make the sensor align with the right edge of the full white screen, and recording the horizontal coordinate of the sensor at this moment as a final horizontal coordinate value; next, moving the sensor to make the sensor align with the lower edge of the full white screen, and recording the vertical coordinate of the sensor at this moment as an initial vertical coordinate value; next, moving the sensor to make the sensor align with the upper edge of the full white screen, and recording the vertical al coordinate of the sensor at this moment as a final vertical coordinate value; and computing the length and width of the full white screen based on the measured horizontal and vertical coordinate values. Accordingly, it is able to perform coordinate positioning on the to-be-tested points based on the horizontal and vertical coordinate values and the initial horizontal and vertical coordinate values. The screen generating device can be a liquid crystal display or a projector.
Patent TW-522037-B (TW)
Title: Differential continuous filtration method and apparatus
Inventor: JANG R-YANG
IPC: B01D35/00
Filed: 2002-02-19
Granted: 2003-03-01
Abstract: This invention relates to a single filtration tank area being divided into a plural number of independent filtration areas, in which each filtration area can be independently injected with original water to produce clarified liquid by filtration; during the filtration process, any filtration area can be selected for reverse washing process, while other filtration areas are still injected with original water for producing clarified liquid, which is used as reverse washing water source for reverse washing process; therefore, the original water filtration process continues without the need to stop process, installation of reverse washing tank is avoided, and the filtration material can remain in a clean condition to maintain filtration flow speed stability.
Patent TW-I225487-B (TW)
Title: New phenylpiperazines
Inventor: FEENSTRA ROELOF W
IPC: A61K31/496
Filed: 2002-02-20
Granted: 2004-12-21
Abstract: The invention relates to novel phenylpiperazine derivatives of the formula (1) wherein: R represents the group (a) or (b) as indicated in the description. These compounds are (partial) D2 receptor agonists and are usefull for treating CNS disorders, in particular Parkinson's disease.
Patent TW-590927-B (TW)
Title: Rail vehicle
Inventor: OKUNO SUMIO
IPC: B61D17/08
Filed: 2002-02-22
Granted: 2004-06-11
Abstract: This invention relates to a rail vehicle. To provide a vehicular body of rolling stock retaining a shock-absorbing structure part inside it within a range outstandingly not-exceeding a size of the structural member without adding particular members to the inside of the vehicular body or a lower part of the floor in the vehicular body constituted of a hollow extrusion material. In the vehicular body of the rolling stock composed of a hollow material 40, a hollow material 51 having a shock-absorbing function is provided on the hollow material 40 at an end part of a base frame 30 having a high possibility receiving a collision load. The hollow material 40 makes its longitudinal direction as the longitudinal direction of the vehicular body. When the collision load is applied thereto, a part of the hollow material 51 is deformed and ruptured to absorb an impact force. An impact force to passengers is relaxed as small as possible at the time of collision of a train only by machining a part of the hollow material without totally varying the present body structure and a safety can be enhanced.
Patent TW-543112-B (TW)
Title: Substrate holding apparatus, substrate processing apparatus and substrate edge cleaning apparatus
Inventor: SATO TAKAYUKI
IPC: H01L21/304
Filed: 2002-04-09
Granted: 2003-07-21
Abstract: The object of this invention is to provide the function so that the large and thin substrate can be moved upwardly and downwardly between the substrate processing height level and the substrate receiving height level. The substrate retaining platform 11 is constructed by mounting four sucking strips 111A, 111B, 111C, 111D smaller than the substrate S having four round corners on the cubic frame 112. A plurality of up-down pins 12 are installed in the substrate retaining platform 11 to facilitate the moving up or down The plurality of up-down pins 12 are used to support the central portion of substrate S form back side, and the substrate S can be moved upwardly and downwardly on the substrate retaining platform 11 by moving the up-down pins 12 upwardly and downwardly. In addition, when cleaning the edge portion of the substrate S, the central portion of the substrate S is supported by the up-down pins 12, and all the portions except central portion and edge portion are sucked and retained on the retaining platform 11.
Patent TW-574606-B (TW)
Title: Thinner composition for rinsing photoresist
Inventor: LI YING-HAU
IPC: G03F7/00
Filed: 2002-04-10
Granted: 2004-02-01
Abstract: A thinner composition for rinsing photoresist is provided, which is consisted of propylene glycol mono methyl ether propionate, compound as shown in formula (I) and water, where in R1 is selected from the groups consist of C1-C4 linear alkyl group, R2 is selected from the groups consist of hydrogen and C1-C4 linear alkyl group. For 100 weight part of the solution of propylene glycol mono methyl ether propionate and compound (I), the content of water is 0.0001 to 100 weight part.
Patent TW-550053-B (TW)
Title: Hood
Inventor: TOJO RYOKO
IPC: A42B1/18
Filed: 2002-06-28
Granted: 2003-09-01
Abstract: The object of the present invention is to provide a hood capable of blocking the infiltration of rainwater flowing down along outer surface of the hood onto the face of a user. The solution of the object is that a hood has a tightening string is threaded along a rim of the face-exposing opening for making the opening firm and a visor projecting forward above the opening rim, and characterized in that a shape-retaining member is continuously provided on at least the visor area of the opening rim so that the visor come up from below by making the tightening string firm with the string-threading position as support.
Patent TW-537916-B (TW)
Title: Weighting member of a golf club head and manufacturing method therefor
Inventor: LIN PING-ZONG
IPC: A63B53/04
Filed: 2002-07-24
Granted: 2003-06-21
Abstract: The invention relates to weighting member of a golf club head and manufacturing method therefor, which mainly comprises steps: melting nickel, iron, ferro-tungsten, recycling residue, ferro-silicon, ferro-manganese, and ferro-niobium in a crucible in turn for making W-Fe-Ni alloys with the desired specific gravity, wherein the weight percentage of nickel, iron, tungsten, silicon, manganese, and niobium is about 30-50% : 30-50% : 20-35% : 1.0% : 1.0% : 0.5%, respectively; casting the melting W-Fe-Ni alloys into a preheating mold with the desired outline and the precision design in order to make the weighting member of a golf club head by the precision casting process; and after demolding the cast and cutting edge thereof, recycling the residue as raw materials for the next precision casting.
Patent TW-573344-B (TW)
Title: Separated gate flash memory and its manufacturing method
Inventor: LIN CHI-HUI
IPC: H01L21/8247
Filed: 2002-08-01
Granted: 2004-01-21
Abstract: The present invention discloses a separated gate flash memory, which includes a substrate, a conducting intermediate pillar, a source/drain doped region, an insulation layer, a conduction spacer, an insulating intermediate pillar, a first conduction layer and a first insulation spacer. The substrate has a trench where the conducting intermediate pillar is disposed at the lower-half portion as the source line. The doped region of source is formed in the substrate adjacent to the conducting intermediate pillar; and the insulation layer is disposed on the conducting intermediate pillar. The conducting spacer for the floating gate is disposed on the inner sidewall of the upper-half of the trench; and the insulation intermediate pillar is disposed on the insulation layer inside the trench. The first conducting layer for the control gate is disposed on the substrate at the outside portion of the conducting spacer; and the first insulation spacer is disposed on the sidewall of the insulating intermediate pillar to cover the first conducting layer. The doped region of drain is formed in the substrate outside the first conducting layer.
Patent TW-I273890-B (TW)
Title: Non-dusting copper pyrithione dispersion
Inventor: WALDRON CRAIG
IPC: A01N59/20
Filed: 2002-09-27
Granted: 2007-02-21
Abstract: The present invention is directed to a non-dusting copper pyrithione dispersion. comprising an admixture of: from about 20 to about 99 wt% of copper pyrithione; from about 0.05 to about 30 wt% of a dust-inhibiting agent selected from the group consisting of surfactants, polymer resins, binders, and combinations thereof; and from about 0.05 wt% to about 80 wt% of a dispersant; wherein all weight percents are based on the total weight of the dispersion.
Patent TW-I223108-B (TW)
Title: Transmission of orthogonal circular polarizations on a fiber
Inventor: NEVIS ELIZABETH A
IPC: H04B10/25
Filed: 2002-10-21
Granted: 2004-11-01
Abstract: A beam source for a heterodyne interferometer generates a beam containing components with different frequencies and respective orthogonal circular polarizations and directs the beam down an isotropic single-mode or few-mode optical fiber. Polarizations of light exiting the optical fiber are converted to orthogonal linear polarizations for use in the interferometer, where the frequency components are separated according to linear polarization. Crosstalk between left-handed and right-handed polarizations in the fiber is low, which permits clean separation of frequency components. A quarter-wave plate or other optical element that converts the polarization in the beam exiting the fiber has a mounting with tilt and roll angle adjustments to adjust to exit polarizations that depend on bends in the fiber. The fiber can have a rigid jacket or fast relaxation time to provide a stable output.
Patent TW-590983-B (TW)
Title: Method of fabricating micro-electromechanical switches on CMOS compatible substrates
Inventor: VOLANT RICHARD P
IPC: H01H59/00
Filed: 2002-10-25
Granted: 2004-06-11
Abstract: A method of fabricating micro-electromechanical switches (MEMS) integrated with conventional semiconductor interconnect levels, using compatible processes and materials is described. The method is based upon fabricating a capacitive switch that is easily modified to produce various configurations for contact switching and any number of metal-dielectric-metal switches. The process starts with a copper damascene interconnect layer, made of metal conductors inlaid in a dielectric. All or portions of the copper interconnects are recessed to a degree sufficient to provide a capacitive air gap when the switch is in the closed state, as well as provide space for a protective layer of, e.g., Ta/TaN. The metal structures defined within the area specified for the switch act as actuator electrodes to pull down the movable beam and provide one or more paths for the switched signal to traverse. The advantage of an air gap is that air is not subject to charge storage or trapping that can cause reliability and voltage drift problems. Instead of recessing the electrodes to provide a gap, one may just add dielectric on or around the electrode. The next layer is another dielectric layer which is deposited to the desired thickness of the gap formed between the lower electrodes and the moveable beam that forms the switching device. Vias are fabricated through this dielectric to provide connections between the metal interconnect layer and the next metal layer which will also contain the switchable beam. The via layer is then patterned and etched to provide a cavity area which contains the lower activation electrodes as well as the signal paths. The cavity is then back-filled with a sacrificial release material. This release material is then planarized with the top of the dielectric, thereby providing a planar surface upon which the beam layer is constructed.