Patent SG-11201806925P-A (SG)
Title: System and method for compensation of illumination beam misalignment
Inventor: XU ZHIWEI STEVE
IPC: H01L21/67
Filed: 2017-04-28
Abstract: International Patent Classification: HOlL 21/66 (2006.01) HOlL 21/67 (2006.01) (21) International Application Number: PCT/US2017/030258 (22) International Filing Date: 28 April 2017 (28.04.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/330,756 02 May 2016 (02.05.2016) US 15/477,885 03 April 2017 (03.04.2017) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (72) Inventors: XU, Zhiwei Steve; 1780 Laurentian Way, Sun- nyvale, California 94087 (US). YUDITSKY, Yury; 49 Showers Drive, Apt. N272, Mountain View, California 94040 (US). LI, Frank; 3039 Griffon Street East, Danville, California 94506 (US). SWISHER, Timothy; 3488 Sky- line Drive, Hayward, California 94542 (US). AUYEUNG, Kwan; 5069 Ridgewood Drive, Fremont, California 94555 (US). (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). (54) Title: SYSTEM AND METHOD FOR COMPENSATION OF ILLUMINATION BEAM MISALIGNMENT (57) : A system includes a beam steering assembly configured to ad- just an incident beam to form a corrected beam; a beam monitoring assembly %, - 200 configured to generate monitoring data for the corrected beam including one or more offset parameters of the corrected beam; and a controller configured to store one or more zero parameters of the corrected beam, calculate at least 240 Th one difference between the one or more zero parameters and the one or more 203 offset parameters of the corrected beam, determine one or more beam position 250- \ adjustments of the incident beam based on the at least one difference between the one or more zero parameters and the one or more offset parameters of the corrected beam, and direct the beam steering assembly via one or more motor drivers to actuate one or more motors to adjust the incident beam to form the corrected beam. BEAM MONITORING ASSEMBLY BEAM STEERING ASSEMBLY ILLUMINATION SOURCE 222 MOTOR DRIVER FIG.2 205 BEAM MODULATOR W O 20 17 / 19 2403 Al (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 09 November 2017 (09.11.2017) WIP0 I PCT omit VIII Hot 0 VIII Elm moiminiflom (10) International Publication Number WO 2017/192403 Al [Continued on next page] WO 2017/192403 Al MIDEDIMOMMIDIRMEM300101010HOMMOVOIMIE Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))