baber/WOPTO huggingface dataset:
Patent KR-20010065173-A (KR)
Inventor: JANG SANG HWAN
IPC: H01L27/115
Filed: 1999-12-29
Abstract: PURPOSE: A method for manufacturing a flash memory device is provided to reduce the area of a source contact area and prevent the bridge phenomenon between gates and the short between the source contact and the gate. CONSTITUTION: The method includes seven steps. In the first step, a semiconductor substrate in which an active area and a field area are defined is prepared. In the second step, a tunnel oxide film(52) and a poly-silicon layer for a floating gate(53) are formed on the entire structure of the semiconductor substrate. In the third step, the poly-silicon layer and the tunnel oxide film are patterned, but the poly-silicon layer formed on the active area of an area on which a source contact is to be formed is all removed. In the fourth step, a diffusion junction area(54) is formed in the area in which the source contact is to be formed by an ion implanting process. In the fifth step, a dielectric film(55), a conductive material for a control gate(56) and an anti-reflective film(57) are sequentially formed on the entire structure of the fourth step and patterned, and a gate is formed by a self-aligned etch. In the sixth step, a source line(62) and a drain line(63) are formed by an ion implanting process for forming a source and a drain. In the seventh step, a spacer insulating film(58) is formed to the side wall of the gate, and an inter-layer insulating film(59) is formed on the entire structure in which the spacer insulating film is formed, and then source and drain contacts(60) are formed.
Patent KR-20010058522-A (KR)
Title: Adaptive filter
Inventor: LEE DEOK MYEONG
IPC: H03H21/00
Filed: 1999-12-30
Abstract: PURPOSE: An adaptive filter is provided to improve the capacity even in a multi-channel environment by selecting the optimal factor position. CONSTITUTION: The adaptive filter includes a feed-forward filter(30), a feedback filter(40), a feed-forward filter factor calculator(50), a feedback filter factor calculator(60), a multiplexer(75), a slicer(76), an adder(77), an error calculator(78) and a control signal generator. The feed-forward filter(30) filters the first factors corresponding to the sample delays of first input data. The feedback filter(40) filters the second factors corresponding to the sample delays of second input data. The feed-forward factor calculator(50) calculates the first factors and includes the number of calculators corresponding to the number of the first factors. The feedback factor calculator(60) calculates the second factors and includes the number of claculators corresponding to the number of the second factors.
Patent KR-20010058930-A (KR)
Inventor: CHO SAM JAE
IPC: B60N2/30
Filed: 1999-12-30
Abstract: PURPOSE: A seat accommodating structure secures enough space to store goods when the third row seat is not used. CONSTITUTION: A front link(40) and a rear link(50) are installed between a car body and a cushion. The front link(40) has a car body side front hinge point(40a) and a cushion side front hinge point(40b) placed higher than the car body side front hinge point(40a) on the front and the rear thereof. The rear link(50) has a car body side rear hinge point(50a) and a cushion side rear hinge point(50b) placed higher than the car body side rear hinge point(50a) on the front and the rear thereof. A seat back(10) is folded and accommodated in an accommodating room(60) behind as a whole.
Patent KR-20000067876-A (KR)
Title: 혈관 형성을 억제하는 화합물
IPC: A61K31/74
Filed: 1997-07-17
Abstract: 본 발명은 하기 (i)와 (ii)로부터 선택된 화합물 유효량을 환자에게 투여하는 단계를 포함하는 인간 또는 인간을 제외한 동물에 있어서 예방 또는 치료를 위해 혈관 형성을 억제하는 방법에 관한 것이다: 
     (i) 다수개의 측쇄기를 함유하는 선형의 비탄화수소 중합체(상기 측쇄기들 중 하나 이상은 그들에 결합 또는 연결되어 있는 하나의 음이온 또는 양이온 함유 부분을 가짐); 및 
     (ii) 다수개의 말단기를 함유하는 덴드리머(상기 말단기들 중 하나 이상은 그들에 결합 또는 연결되어 있는 하나의 음이온 또는 양이온 함유 부분을 가짐).
Patent KR-20000030017-A (KR)
Title: Spring biased deformable intraocular lens injecting apparatus
Inventor: CHAMBERS THOMAS J
IPC: A61F2/16
Filed: 1997-07-31
Abstract: PURPOSE: A lens injecting apparatus having a spring biased plunger is provided which is used for the implantation of a deformable intraocular lens. CONSTITUTION: A lens injecting apparatus has a spring biased plunger(16). The apparatus (10) includes a separate lens injecting device(12) having a lens cartridge receiver, and a separate one-piece lens cartridge(14) having a lens holding portion connected to a nozzle portion. The lens cartridge(14) is preferably connected into the lens cartridge receiver by a bayonet type connection.
Patent KR-20000068419-A (KR)
IPC: G06F1/32
Filed: 1998-06-30
Abstract: 본 발명의 반도체 집적 회로는 적어도 하나의 제1의 클록 신호(20)에 의거하여 동작하는 적어도 하나의 제1의 반도체 회로(10)를 갖는다.  또한, 제1의 클록 신호(20)와 독립한 적어도 하나의 제2의 클록 신호(92)와, 제1의 반도체 회로(10)로부터의 요구에 의거하여 동작하며, 제1의 반도체 회로(10)를 보조하는 적어도 하나의 제2의 반도체 회로(50)를 갖는다.  제2의 반도체 회로(50)는 필요에 따라서 제2의 클록 신호(92)를 정지시키는 정지 수단(51)을 갖는다.  이로 인하여, 제2의 클록 신호(92)를 정지하고 제2의 반도체 회로(50)의 동작을 정지시킬 수 있다.
Patent KR-20000075631-A (KR)
IPC: H01L23/495
Filed: 1999-01-11
Abstract: 본 발명은 리드(20)가 형성됨과 동시에 리드(20)에 반도체 칩(16)이 실장되고, 양품으로 선별된 조각 절연 필름(12)을 준비하는 공정과, 다수의 부착부(46)를 갖는 플레이트(40)의 각 부착부(46)에 조각 절연 필름(12)을 붙이는 공정과, 조각 절연 필름(12)이 붙여진 부착부(46)에 대응하여 플레이트(40)를 절단하는 공정을 포함한다.
Patent KR-20000076173-A (KR)
IPC: A61B17/00
Filed: 1999-01-22
Abstract: An electrode template apparatus, includes a three dimensional support member having opposite surfaces, a plurality of bores extending through the support member and through the opposite surfaces, a plurality of conductors on the member separately connected to the plurality of bores, a plurality of needle electrodes selectively extendable through the plurality of bores and into tissue to be electroporated so that each electrode is comcected to at least one conductor for connecting the electrodes to a power supply.
Patent KR-20010020133-A (KR)
IPC: B01J19/24
Filed: 1998-04-24
Abstract: 프로펜을 주입 노즐(3)을 통하여 관형 루프 반응기(2)로 도입하고; 기체 할로겐을 방사 배치된 주입 개구(4)의 축방향으로 이격된 수 개의 그룹(6)을 통하여 관형 루프 반응기로 도입하며; 프로펜과 할로겐이 반응하도록 한 다음; 관형 루프 반응기(2)로부터의 반응 유출물을 배출 개구(9)를 통하여 제거함을 포함하는 (여기에서, 반응기 용적-요소 중의 할로겐의 농도는 총 기체 혼합물을 기준으로 3 질량% 이하로 유지되고 주입 노즐에 존재하는 프로펜의 기체 선속도는 적어도 관형 루프 반응기(2) 내에서 연속 순환을 유지하기에 충분하다.) 기체 프로펜과 기체 할로겐으로부터의 알릴할라이드 제조방법 및 이 방법에 사용되는 장치.
Patent KR-20010012105-A (KR)
Inventor: TIEDEMANN EDWARD G JR
IPC: H04B7/26
Filed: 1998-04-16
Abstract: A forward link power control mechanism in a remote station (6) measures reverse link power control bits which are transmitted by one or more base stations (4a, 4b, 4n) on a forward traffic channel (10a). At the remote station (6) the reverse link power control bits from multiple base stations (4a, 4b, 4n) or multiple signal paths are measured, combined, and filtered to yield an improved measurement of the forward link signal quality. The reverse link (12a, 12b) power control bits which are deemed unreliable are omitted from use in the power control loop. The remote station (6) generates a set of forward link power control bits in accordance with the measurements and transmits these bits to all base stations (4a, 4b, 4n) in communication with the remote station (6). Each base station (4a, 4b, 4n) adjusts its gain of the forward traffic channel (10a) in accordance to its measurement of the forward link power control bit. The gains of the forward traffic channels (10a) of the base stations (4a, 4b, 4n) are corrected periodically so that erroneous reception of the forward link power control bits by the base stations do not accumulate.
Patent KR-20010012536-A (KR)
Title: 관능화된 폴리올레핀으로 개질된 폴리에테르아민을함유하는 폴리올레핀
IPC: C08G65/333
Filed: 1998-05-12
Abstract: 본 발명은 통상적인 혼합 장치에서 폴리에테르아민이 관능화된 폴리올레핀으로 그라프트시켜 관능화된 폴리올레핀과 폴리에테르아민의 반응과 폴리올레핀의 혼합물로 이루어진 조성물에 관한 것이다. 폴리프로필렌을 통상의 혼합 장치에서 용융시켜, 관능화된 폴리프로필렌과 폴리에테르아민의 반응 생성물을 제조하는 공정을 제공한다. 본 발명의 혼합물은 도색성 자동차 몸체 부품을 제조하는데 유용하다는 이점이 있다. 그 외에 본 발명은 관능화된 폴리올레핀 및 폴리에테르아민의 반응 생성물을 함유하는 착색성 폴리올레핀 조성물을 함유한다. 폴리프로필렌 섬유를 포함하는, 착색성 폴리올레핀 섬유로, 용융 방사로 제조되고, 직물, 및 부직 섬유를 제조하는데 사용되는 착색성 폴리올레핀 섬유인 것이다. 본 발명의 실시예에서 사용된 폴리올레핀은 가요성 폴리올레핀이다.
Patent KR-20010013102-A (KR)
Inventor: YU M S
IPC: B29C65/70
Filed: 1998-05-29
Abstract: Compounds of structure (1) are obtained by reduction of compounds of the structures (2a), (2b), (4a), (4b). Compounds of structure (1), especially where Z is a hydrogen atom or a 3,4-methylenedioxyphenyl group, are important intermediates for inter alia paroxetine.
Patent KR-20010068878-A (KR)
Title: beef casserole automatic vending machine.
Inventor: SON YOUNG SUK
IPC: G07F11/00
Filed: 2000-01-10
Abstract: PURPOSE: A casserole vending machine is provided so that a user conveniently buys various kinds of casseroles to meet his needs at nearby his residence. CONSTITUTION: When a user pushes a selection button, a withdrawing means (18) is rotated so that a plate (22) installed movably at the lower part of an article receiving chamber (26) for preventing discharge of an article is opened. Right after discharging the article corresponding to cash input, a solenoid valve (21) regulates an interrupter (24) to exactly control the number of article to be vented. In the case that the bottom side of a casing (25) is closed with upwardly drawing the plate (22), the solenoid valve operated by electric force draws the interrupter so that an article is placed between the interrupter (24) and the plate (22) for the next vending.
Patent KR-20010075746-A (KR)
Title: A Mesh for Preventing Cracks on Concrete Slab
Inventor: YANG NAE MOON
IPC: E04C5/00
Filed: 2000-01-17
Abstract: PURPOSE: A reinforcing screen is provided to have the excellent workability by being easily installed in a slab mold and to faithfully perform an original reinforcing function by exactly burying in a fixed position inside a slab section. CONSTITUTION: At least one spacer(15) is arranged in each dividing sections of an upper left face(10a), an upper right face(10b), a lower left face(10c) and a lower right face(10d) by sticking under widthwise reinforcing rods(11,12) or lengthwise reinforcing rods(13,14). In loading an electric box on a slab mold, the electric box is separated from the slab mold at a regular height by the spacers(15). Thereby, a worker installs a protecting screen(10) quickly. Moreover, the reinforcing screen(10) performs a reinforcing function faithfully by exactly burying inside a slab without separating from a fixed position. By supporting lower reinforcing rods with the reinforcing screen(10), the lower reinforcing rods are buried inside the slab at a coated thickness without additionally supporting the reinforcing rod.
Patent KR-20000018230-A (KR)
Inventor: YANG DUK HEE
IPC: C04B38/02
Filed: 2000-01-24
Abstract: PURPOSE: A porous potter which can change food, water, drink, or alcohol in the potter into alkaline, helpful for human being, by emitting metal ion or mineral substance of metal oxide is provided. CONSTITUTION: Manufacturing composition of potter is usually containing any of clay, limestone, loose part of rock, mineral stone, diatomite and kaoline as main material. 40-70 weight % of one of alkaline bentonite, dolomite containing a lot of carbonate, shell, coral, pearl and fish bone containing carbonate as main component or the mixture of the above components is mixed with the main material and calcined at over 1300°C then crushed into fine powder. Contacting surface with food or drink of potter needs not to be put glaze on the surface because of diffusion of alkaline metal ion.
Patent KR-20010076905-A (KR)
Title: On-line coating method for retarding coke on the internal wall of hydrocarbon pyrolysis reactor tube
Inventor: CHO DONG HYEON
IPC: B01J19/00
Filed: 2000-01-28
Abstract: PURPOSE: Provided is an on-line method for coating the inner wall of a hydrocarbon pyrolysis reactor tube with an inorganic film for preventing generation and accumulation of coke and precipitation of metals. CONSTITUTION: The on-line coating method comprises the steps of: moving carrier gas in the inner wall of the hydrocarbon pyrolysis reactor tube at a temperature of 600-900deg.C and a flow rate of 1-5000kg/hr/coil under a pressure of 0-3kg/cm¬2·g on-line and simultaneously depositing a mixture solution of a metal alkoxide and a chromium compound to form a metal oxide buffer layer; depositing the metal alkoxide sequentially on the buffer layer. The carrier gas is nitrogen, helium, argon, carbon dioxide, air, oxygen, or steam.
Patent KR-20010077653-A (KR)
Title: A cement admixture for concrete-making
Inventor: SON YUN JA
IPC: C04B7/153
Filed: 2000-02-07
Abstract: PURPOSE: A cement admixture for concrete preparation composed of blast furnace slag, anhydrous gypsum and limestone is provided, which improves long-term strength and durability of concrete, and lowers manufacturing cost of concrete by mixing with portland cement. CONSTITUTION: The cement admixture comprises 80-90wt.% of blast furnace slag, 0.5-10wt.% of anhydrous gypsum and 0.5-10wt.% of limestone. The composition of blast furnace is as follows: 34.51% of SiO2, 15.87% of Al2O3, 0.3% of Fe2O3, 42.65% of CaO, 5.87% of MgO and 0.006% of SO3. The admixture in the range of 10-50wt.% is mixed with portland cement, resulting in increase of long-term strength.
Patent KR-20010082959-A (KR)
Title: The Storage Tank Made by Hot-dip Zincked Steel Plate for Hot Water/Hot Water Heating System and Manufacturing Method Thereof
Inventor: KIM SEOK JONG
IPC: F24H9/00
Filed: 2000-02-22
Abstract: PURPOSE: A hot water reservoir tank for a galvanized heating/boiling system and a control method thereof are provided to have a molten galvanized layer including a brittleness welding portion having high corrosion resistance against hot water and excellent resistance against contraction and expansion of a hot water reservoir tank. CONSTITUTION: Plate material is sheared in a specific size and width, punched, rolled and pressed. The plate material is molten and galvanized in a melting furnace. For melting and galvanizing of the plate material, the plate material is dipped in the melting furnace filled with high purity Zn of 450-500deg.C for 5-10min. The molten Zn is coated over the plate material. The plate material is pickled for easy Zn coating before the plate material is dipped into the melting furnace. In a process of coating the molten Zn to the plate material, diffusion coating occurs at a boundary layer between the Zn layer and the plate material. Thereby, the plate material obtains high corrosion resistance and abrasion resistance. The plate material has a Zn-coated layer of 50-150 micrometers in thickness preferably by 1-3 times dipping into the melting furnace. To prevent a welding portion of the plate material from being coated by Zn, a wash primer is coated over the welding portion. Then, the plate material is dipped into the melting furnace. Therefore, the plate material is welded easily through the welding portion not coated by Zn.
Patent KR-20010084158-A (KR)
Title: Fixing Device of the door
Inventor: LEE YONG SU
IPC: H02B1/38
Filed: 2000-02-24
Abstract: PURPOSE: A door attachment apparatus is provided to allow doors to be readily attached/detached to/from the main body of a rack or container by arranging door hinges to be slidable in a vertical direction. CONSTITUTION: A door attachment apparatus comprises a bracket(10) fixed to the door, and which has a sliding groove(11) formed inside of the bracket in such a manner that the upper surface of the sliding groove is open; a spring(40) arranged at the bottom surface of the sliding groove of the bracket; a hinge(20) an upper end of which has a coupling unit(21) to be inserted and coupled to the main body of a rack or container, and a lower end of which is arranged to be slidable along the sliding groove formed at the bracket in a free manner; a leaf spring(30) coupled to the lower surface of the hinge, and which has both ends bent upward so as to selectively get caught at a cut-out groove(13) formed at the side surface of the bracket; and a screw(50) coupled to the side surface of the hinge through a cut-out groove(12) formed at the side surface of the bracket.
Patent KR-20010091606-A (KR)
Title: The amplifier for car audio
Inventor: KIM SU BOK
IPC: H03F3/20
Filed: 2000-03-16
Abstract: PURPOSE: An amplifier for use in a car audio is provided to enable a user to easily control a car audio by separating an indicator from an amplifier and installing it on the driver seat. CONSTITUTION: A temperature detecting unit(12) detects heat generated from an amplifier and outputs an analog signal. A voltage detecting unit(14) detects a voltage inputted from a battery of a car and outputs an analog signal. An output detecting unit(16) detects the output state of the amplifier and outputs an analog signal. A converting unit(18) converts the signals output from the detecting units into digital signals and outputs them. An indicating unit(8) is installed on the making panel of the amplifier so as to easily distinguish it from the outside. A control unit(20) processes the various signals inputted from the converting unit(18) with various way according to a built-in program.
Patent KR-20010092857-A (KR)
Inventor: JUNG DAE HYEON
IPC: H02K7/08
Filed: 2000-03-27
Abstract: PURPOSE: A scanner motor is provided to minimize noise and vibration by completely eliminating bearing friction, while reducing power consumption and improving durability. CONSTITUTION: A scanner motor comprises a circuit board(10); a cylindrical sleeve(20) having a lower end coupled to the circuit board, and a stator assembly(30) coupled to the outer periphery of the sleeve; a sintered bearing(70) having a dynamic pressure generating groove formed at upper and lower portions of an inner surface of the sintered bearing, respectively, and which is compulsorily inserted into the sleeve; a fixed magnet coupled to the inner top portion of the sleeve, and which is shaped as a ring having upper and lower polarizations; a shaft(40) inserted into the sintered bearing, and which has a lower end spaced apart, into a predetermined height, from a cap(21) covering the lower end of the sleeve; a rotating magnet coupled to the outer periphery of the shaft, and which has upper and lower polarizations formed to generate an attractive force between the fixed magnet and rotating magnet; and a rotor case(50) coupled to the upper portion of the shaft, and which has a lower end extended downward, a yoke(52) arranged at the inner periphery of the rotor case opposed to the stator assembly so as to allow a driving magnet(51) to be attached to the yoke, and a polygon mirror(60) mounted at the upper portion of the rotor case.
Patent KR-20010093354-A (KR)
Title: Lithium ion secondary battery and manufacturing method thereof
Inventor: KIM SEONG HUN
IPC: H01M10/058
Filed: 2000-03-28
Abstract: PURPOSE: A lithium ion secondary battery and its preparation method are provided, to vary the shape of a battery and to improve the assembling by using a current collector in the shape of a wire. CONSTITUTION: The lithium ion secondary battery comprises a cationic wire and an anionic wire which are formed by coating a cationic active material and an anionic active materials on a current collector in the shape of a wire; a separator which is coated on the cationic wire and the anionic wire to isolate the two wires electrically, and that an electrolyte is infiltrated into whose porous parts; optionally a cationic lead and an anionic lead which are connected with the terminals of the wires and extended to the exterior of a case; and a case. The cationic wire and the anionic wire are preferably in the shape of a coil or a curved and bent one.
Patent KR-20010091829-A (KR)
Title: Nailclipper with side blades
Inventor: CHOI HO IL
IPC: A45D29/02
Filed: 2000-04-19
Abstract: PURPOSE: Nail clippers having a side blade is provided to smartly cut a nail, and to prevent the cut nail from being scattered on all sides. CONSTITUTION: The nail clippers comprises a pair of front blade(2) facing each other on the front surface of a body(1) made of an elastic plate material. When a lever(4) fixed by a shaft(3) penetrating the front end portion of the body is pushed, the front blades are engaged with each other to cut a nail by using the pressure applied to the lever. In addition, a pair of side blade(2a,2b) are integrally formed on the left and the right sides of the front blade.
Patent KR-20000037427-A (KR)
Inventor: KIM DOO HWAN
Filed: 2000-04-24
Abstract: PURPOSE: An internet shopping mall is proposed to provide a chance of convenient purchase to consumers and to essentially prevent monetary accidents by connecting a store near the place of a consumer to a consumer after constructing a trade intermediation site linking stores in a certain region to consumers in internet. This method is for providing an electronic commercial chance to small scale stores neglected in up-to-date service business. CONSTITUTION: An internet shopping mall based on regional stores includes consumers(1), shopping mall(2), cooperative companies(3) which can deliver merchandise by themselves, stores(4) which can not deliver merchandise, shipping and handling companies(5), and service providing companies(6). Consumers search or order merchandise after contacting internet. The shopping mall displays and sells merchandise of cooperative companies based on region to which delivery is possible. The shipping and handling companies is for delivering merchandise of the stores unable to deliver the merchandise by themselves, such as a pharmacy and a stationery shop. The service providing company has the business type which do not need delivery.
Patent KR-20010014897-A (KR)
Inventor: MURAKAMI ICHIRO
IPC: H04N5/335
Filed: 2000-05-12
Abstract: PURPOSE: To provide a solid-state image sensor which can improve accuracy and reliability. CONSTITUTION: This method for manufacturing a solid-state image sensor includes a step for forming a light receiving part 3 and a CCD channel 4 on an N-type substrate 1, a step for forming a light transmission material layer 12a on the surface of the N-type substrate 1, a step for transferring a pattern by pressing down a mold 14 having a specified pattern on the light transmission material layer 12a and forming a microlens pattern 12b, and a step for forming a microlens 12 curing the microlens pattern 12b by heating.
Patent KR-20010107175-A (KR)
Inventor: LEE HYUNG KEUN
IPC: D06C27/00
Filed: 2000-05-25
Abstract: 본 발명은 식물성 섬유 미세분말이 코팅된 직물의 제조방법에 관한 것으로써, 녹차, 솔잎, 쑥, 허브, 라일락, 인삼, 은행잎 및 장미 등과 같은 인체에 유익한 각종 식물성 섬유의 미세분말을 이용하여 직물에 코팅함으로써 직물과의 접착성이 우수하면서도 인체에 유익한 각종성분이 지니는 고유한 기능을 충분히 발휘할 수 있도록 하여, 습도조절, 통풍효과 및 실내의 공기정화, 살균 및 악취제거를 유도하며, 자연적인 식물성 향기를 발산함에 의해 쾌적한 실내환경 및 건강증진에 유용한 직물을 제조할 수 있도록 한 식물성 섬유 미세분말이 코팅된 직물의 제조방법을 제공하는 데 그 목적이 있으며, 상기한 목적을 달성하기 위한 본 발명은, 건조된 250메쉬 내지 300메쉬의 식물성 섬유 미세분말 60중량부 내지 70중량부, 항균세라믹 3중량부 내지 5중량부, 식물성에서 추출한 천연 엑기스 오일 2중량부 내지 5중량부 및 천연접착제 또는 우레탄계 접착성 수지 10중량부 내지 30중량부를 혼합하여 교반한 다음 밀봉하여 12시간 내지 24시간에 걸쳐 숙성하고, 숙성한 배합물을 상온에서 1kg/㎠ 내지 5kg/㎠의 압력으로 면사 또는 원사에 압착하여 코팅한 후, 상기 코팅면 상부 표면에 망사, 면, 부직포, 마 또는 모시 등을 접착하여 1차 40℃ 내지 60℃, 2차 60℃ 내지 90℃의 온도에서 30분 내지 60분 동안 적외선 열풍건조시키는 것에 의한 식물성 섬유 미세분말이 코팅된 직물의 제조방법을 제공함으로써 달성할 수 있다.
Patent KR-20010029772-A (KR)
Title: Semiconductor processing method and apparatus for the same
Inventor: NULMAN JAIM
IPC: G05B19/418
Filed: 2000-06-01
Abstract: PURPOSE: A method of scheduling or controlling spare part for IC fabrication is provided to achieve a manufacturing environment for a wafer manufacturing process and an SPC environment for setting control limits and obtaining the measurement data of production runs. CONSTITUTION: The method comprising the steps of identifying a spare part required for at least one of the plurality of processing tools; determining a first date on which the spare part is needed for use in the at least one of the plurality of processing tools; determining a supplier of the part; and automatically ordering the part for delivery on a second date which precedes the first date by a predetermined number of days. Here, an arithmetic environment(114) processes SPC data and the data are then analyzed in an analysis environment(116). An MES environment(118) evaluates the result of analysis and automatically executes intervention when the process is outside the control limits.