baber/WOPTO huggingface dataset:
Patent TW-202143280-A (TW)
Title: 掃描電子顯微鏡
Inventor: SAITOH NAOYA
IPC: H01J37/26
Filed: 2021-03-25
Abstract: 本發明關於一種掃描電子顯微鏡，其係以電子射束掃描晶圓、光罩、面板、基板等工件而生成該工件的圖像。掃描電子顯微鏡係具備：偏向器(17、18)，係使電子射束偏向而以電子射束掃描工件(W)上的目標區域(T)；以及偏向控制部(22)，係將使電子射束掃描目標區域(T)的掃描電壓以及使電子射束從光軸中心(O)偏移到目標區域(T)的偏移電壓施加於偏向器(17、18)。
Patent TW-202205716-A (TW)
Title: Negative-electrode material, battery, method for producing negative-electrode material, and method for producing battery
Inventor: RIKITA NAOKI
IPC: H01M4/133
Filed: 2021-04-07
Abstract: This negative-electrode material for batteries comprises carbon, tungsten trioxide disposed on the surface of the carbon, and silicon disposed on the surface of the carbon.
Patent TW-202202649-A (TW)
Title: Substrate processing method
Inventor: LEE SEUNG-HYUN
IPC: B08B7/00
Filed: 2021-04-15
Abstract: A substrate processing method of preventing damage to a lower patterned structure includes: forming a first thin film having a certain thickness by performing a first cycle a plurality of times, the first cycle including supplying a first reactant on a structure and purging a residue, and forming a second thin film by changing a chemical composition of the first thin film having the certain thickness.
Patent TW-202206111-A (TW)
Title: Methods of using anti-cd79b immunoconjugates
Inventor: HIRATA JAMIE HARUE
IPC: C07K16/28
Filed: 2021-04-23
Abstract: Provided herein are methods of treating B-cell proliferative disorders (such as Follicular Lymphoma and diffuse large B cell lymphoma) using immunoconjugates comprising anti-CD79b antibodies in combination with a Bcl-2 inhibitor (such as venetoclax) and an anti-CD20 antibody (such as obinutuzumab or rituximab).
Patent TW-202242104-A (TW)
Inventor: LIN WEI-CHI
IPC: C12N15/86
Filed: 2021-04-28
Abstract: 本發明提供一種慢病毒包裝系統，其包含：一轉移質體，其包含一TAR嵌合 5’ LTR的核苷酸序列；至少一包裝質體，包含：一編碼TAR RNA結合蛋白之基因的核苷酸序列、一
         rev 基因的核苷酸序列、一
         gag 基因的核苷酸序列及一
         pol 基因的核苷酸序列；及一包膜質體。本發明因包含上開質體而可表現TAR RNA結合蛋白之基因，使所生產之慢病毒有較高之病毒效價，且將所生產之慢病毒用於細胞轉導時亦能提升轉導率及基因傳遞效率。本發明另提供一種提高宿主細胞之慢病毒產量的方法，其包含使用前述之慢病毒包裝系統轉染所述宿主細胞，並能進一步降低製造基因改造細胞之成本。
Patent TW-202144148-A (TW)
Title: Joint structure for robot
Inventor: IJIRI YOSHIHISA
IPC: B25J17/02
Filed: 2021-04-29
Abstract: Provided is a joint structure connecting a first element and a second element of a manipulator of a robot, the joint structure comprising a lock mechanism that switches between a free state in which the second element can freely move independent from the first element and a locked state in which the second element is fixed to the first element. The lock mechanism comprises a first member which joins to the first element, a second member which joins to the second element, and a flexible linear member of which one end is attached to the second member and the other end is passed through a through hole provided in the first member and pulled to the outside of the joint structure. The locked state is reached by pulling the linear member and causing the second member to contact the first member, and the free state is reached by stretching the linear member and causing the second member to separate from the first member.
Patent TW-202210514-A (TW)
Inventor: GAUTHIER KELSY SIVICK
IPC: A61K39/395
Filed: 2021-06-01
Abstract: 本發明提供特異性結合於TIGIT之抗體。該等抗體具有藉由抑制TIGIT與CD155之結合而實質活化T細胞及自然殺手細胞之能力。該等抗體除其他應用外可用於治療癌症及傳染病。
Patent TW-202249374-A (TW)
Title: Motor protecting circuit having a mechanism of synchronously turning on high-side transistor and low-side transistor
Inventor: CHEN KUN-MIN
IPC: H02H7/09
Filed: 2021-06-03
Abstract: A motor protecting circuit having a mechanism of synchronously turning on a high-side transistor and a low-side transistor is provided. A first terminal of each of the high-side transistors is coupled to a power voltage. A second terminal of each of the low-side transistors is grounded. Second terminals of the high-side transistors are respectively connected to first terminals of the low-side transistors. When an overvoltage detector determines that the power voltage of an output circuit is higher than a voltage threshold, the overvoltage detector outputs an overvoltage detected signal to a controller circuit. The controller circuit controls a driving circuit to synchronously turn on at least one of the high-side transistors and at least one of the low-side transistors according to the overvoltage detected signal.
Patent TW-202248610-A (TW)
Title: Signal transmitting and receiving angle positioning method of tire pressure monitoring system based on the angle of arrival positioning method or the angle of departure positioning method
Inventor: CHEN JI-LIANG
IPC: G01L17/00
Filed: 2021-06-08
Abstract: The present invention provides a signal transmitting and receiving angle positioning method of a tire pressure monitoring system. The angle positioning in the method is calculated based on the AOA (angle of arrival) positioning method or the AOD (angle of departure) positioning method to obtain the final location information. Thereby, a method of positioning tires and tire pressure detectors can be realized based on an existing wireless signal transceiver in the monitoring system, so as to shorten the time for pairing and inputting between individual tire pressure detectors and the wireless signal transceiver.
Patent TW-202209634-A (TW)
Inventor: LEE KYUNG-HWAN
IPC: H01L21/76
Filed: 2021-06-23
Abstract: A semiconductor memory device includes a word line extending in a vertical direction on a substrate, a channel layer surrounding the word line to configure a cell transistor and having a horizontal ring shape with a predetermined horizontal width, a bit line disposed at one end of the channel layer in a first horizontal direction and extending in a second horizontal direction perpendicular to the first horizontal direction, and a cell capacitor disposed at other end of the channel layer in the first horizontal direction, the cell capacitor including an upper electrode layer extending in the vertical direction, a lower electrode layer surrounding the upper electrode layer, and a capacitor dielectric layer disposed between the upper electrode layer and the lower electrode layer.
Patent TW-202215705-A (TW)
Inventor: FLAHERTY IV THOMAS EDMOND
IPC: H01P1/12
Filed: 2021-09-28
Abstract: 一種同軸切換器，包含導電殼體，殼體界定中心孔及橫向於中心孔定向的前平面、包含固定觸點的切換器組裝件，固定觸點包含固定接合端部、與固定接合端部相對的固定耦合端部、包含可動接合端部的可動觸點、與可動接合端部相對的可動耦合端部、及被定位在毗鄰可動接合端部的平面導體接合區，其中將可動接合端部定位在接合定位及脫離定位，及定位在導電殼體與可動觸點之間的介電前墊片，其中介電前墊片界定中心孔徑，平面導體接合區通過該中心孔徑與導電殼體的前平面具有無阻礙的視線。
Patent TW-202230621-A (TW)
Inventor: TAN ELLIOT N
IPC: H01L21/768
Filed: 2016-11-23
Abstract: 描述了用於圖案化後端(BEOL)互連的金屬線端的方法，以及所得結構。在範例中，一種用於半導體晶粒的互連結構的金屬化層包含設置在層間介電質(ILD)材料層的溝槽中的金屬線。該ILD材料層係第一介電材料組成。導電通孔係設置在該ILD材料層中、在該金屬線下方且電連接到該金屬線。介電插塞係直接相鄰於該金屬線和該導電通孔。該介電插塞係由與該第一介電材料不同的第二介電材料組成。
Patent TW-202315823-A (TW)
Title: Automatic micro warehousing facility that includes a main frame unit, an elevation unit, a moving frame unit, and a control unit
Inventor: LO KUANG-CHEN
IPC: B65G1/04
Filed: 2021-10-05
Abstract: An automatic micro warehousing facility is applicable to storage of at least one storage box. The storage box has two flanges. The automatic micro warehousing facility includes a main frame unit, an elevation unit, a moving frame unit, and a control unit. The main frame unit comprises an elevated top frame. The top frame has a plurality of cargo positions and a transportation channel. The moving frame unit is movable relative to the cargo positions and is suitable for withdrawing or depositing the storage box in one of the cargo positions. The moving frame unit comprises a suspending rack and a carrying frame. The suspending rack is movable in an X-direction relative to the main frame unit. The carrying frame is movable in a Y-direction relative to the suspending rack. The carrying frame has at least two hooking and pushing members for hooking and pushing the storage box. Each of the hooking and pushing members includes a hook portion for hooking on one of the flanges of the storage box.
Patent TW-202317972-A (TW)
Inventor: CHANG WEI-CHENG
IPC: G01N21/65
Filed: 2021-10-21
Abstract: 本發明公開一種配合拉曼光譜儀於檢體中尋找取樣點的方法和系統，方法包括如下步驟。通過拍攝裝置來取得檢體的一區域的影像，並且將影像分為多個區塊。每一區塊在檢體上對應的面積能被拉曼光譜儀的雷射光束照射面積所覆蓋。針對這些區塊的每一者，計算第n個區塊內影像特徵強度高於、低於、及/或介於一預定範圍的像素之分布型態，並且當分布型態符合一允收條件時，決定檢體中對應第n個區塊的位置能夠作為取樣點。n為變數，預定範圍為依據多個可分析拉曼光譜所對應的多個微生物體的影像特徵來決定，且每一可分析拉曼光譜內含一微生物體特徵型態。
Patent TW-202232255-A (TW)
Title: Drum unit, cartridge
Inventor: UESUGI TETSUO
IPC: G03G21/18
Filed: 2016-02-26
Abstract: To develop a conventional coupling for transmitting a driving force. A coupling member is provided with a supporting portion for movable supporting a driving force receiving portion for receiving a driving force.
Patent TW-202319025-A (TW)
Title: Bipolar probe in which the angle of operation can be adjusted freely
Inventor: XIE GUO-ZHANG
IPC: A61B18/14
Filed: 2021-11-02
Abstract: A bipolar probe includes a first member, a second member, an electrode element and a tube. One end of the electrode element is connected to the first member, and the other end includes a probe end, wherein the probe end is formed with a first bending angle. The second member is movably coupled to the first member and is at an initial position relative to the first member. The tube is extended along a straight line and includes a first end and a second end. The first end is connected to the second member, and the second end is formed with a second bending angle relative to the straight line. The electrode element penetrates the first end of the tube. The probe end is adjacent to the second end of the tube. When the second member is moved toward the first member from the initial position, the probe end of the electrode element is away from the second end of the tube at a variable angle. The variable angle is the sum of at least a part of the first bending angle and the second bending angle.
Patent TW-202208441-A (TW)
Title: 抗-ror2抗體、抗體片段、其免疫結合物及其用途
Inventor: SHORT JAY M
IPC: A61K47/68
Filed: 2017-05-12
Abstract: 本發明係關於一種特異性結合於Ror2蛋白質之具有重鏈可變區及/或輕鏈可變區之多肽，以及結合於Ror2蛋白質之含有該重鏈可變區及/或該輕鏈可變區之抗體及抗體片段。亦提供包含該多肽或含有該多肽之抗體及抗體片段的醫藥組合物及套組。
Patent TW-202333463-A (TW)
Title: Signal transmission apparatus and method having re-sampling mechanism
Inventor: ZENG CHIH-HSIU
IPC: H04B1/40
Filed: 2022-02-08
Abstract: A signal transmission method having re-sampling mechanism is provided that includes steps outlined below. Sampled data of a data signal is obtained. A time difference between an actual sampling time spot and an ideal sampling time spot corresponding to target sampled data is calculated. One of predetermined time spots closest to the ideal sampling time spot within a sampling time interval is selected as a closest predetermined time spot according to the time difference. A plurality of operation sampled data within a predetermined range before and after the target sampled data is selected from the sampled data. A group of response terms are retrieved from a pre-stored lookup table according to the closest predetermined time spot to substitute the response terms and the time difference into a parameter calculation equation to perform calculation and generate a group of re-sampling response parameters. A calculation is performed based on the operation sampled data and the re-sampling response parameters to generate a re-sampled value of the target sampled data.
Patent TW-202236437-A (TW)
Title: 半導體裝置的形成方法
Inventor: CHENG JUNG-CHIEN
IPC: H01L21/336
Filed: 2022-02-22
Abstract: 揭露半導體結構與其製造方法。例示性的製造方法包括提供工件，其包括基板、第一通道組件與第二通道組件位於基板上、第一閘極結構接合第一通道組件、第二閘極結構接合第二通道組件、介電鰭狀物位於第一閘極結構與第二閘極結構之間、隔離結構位於介電鰭狀物之下。方法更包括形成金屬蓋層於工件的前側，並沉積介電結構於介電鰭狀物上。介電結構將金屬蓋層分成第一部分與第二部分。方法亦包括蝕刻隔離結構，以形成溝槽於基板的背側；沉積間隔物層於溝槽的側壁上；自溝槽蝕刻介電鰭狀物；以及沉積密封層於溝槽中。
Patent TW-202245040-A (TW)
Title: Substrate processing method, substrate processing device, and polymer-containing liquid
Inventor: YOSHIDA YUKIFUMI
IPC: H01L21/304
Filed: 2022-03-16
Abstract: A substrate processing method includes: a polymer-containing liquid supply step for supplying a polymer-containing liquid containing an acidic polymer and a solvent for dissolving the acidic polymer to a main surface of a substrate; a polymer film formation step for forming a polymer film containing the acidic polymer on the main surface of the substrate by rotating the substrate, to the main surface of which the polymer-containing liquid is adhered, and thereby spreading the polymer-containing liquid; and, a rinse step for supplying to the main surface of the substrate a rinsing liquid for cleaning the main surface of the substrate with the polymer film formed on the main surface thereof.
Patent TW-202303274-A (TW)
Inventor: WU BANQIU
IPC: H01L21/687
Filed: 2022-04-08
Abstract: 此處提供用於烘烤基板的烘烤腔室之實施例及使用其之方法。在某些實施例中，一種用於處理基板的多重腔室處理工具，包括：濕式清潔腔室，用於清潔基板；及烘烤腔室，配置成加熱基板以移除在濕式清潔腔室中實行的濕式清潔處理之後剩餘的殘留物或霧霾，烘烤腔室包含：腔室主體，包覆內部空間；加熱器，佈置於內部空間中，其中加熱器配置成在使用期間具有攝氏約100度至約400度的表面溫度；基板支撐件，配置成支撐佈置於內部空間中的基板，其中基板支撐件與加熱器具有直接視線，使得加熱器透過對流加熱基板支撐件；及氣體入口及氣體出口，耦合至內部空間。
Patent TW-202304908-A (TW)
Title: Tetrahydropyridopyrimidine compound
Inventor: INOUE SATOSHI
IPC: A61P35/00
Filed: 2022-04-12
Abstract: Provided is a tetrahydropyridopyrimidine compound which has Axl inhibitory activity and selectively inhibits Axl over Mer.
Patent TW-202241335-A (TW)
Title: Child lock control method and related device, robot, storage medium and electronic equipment
Inventor: Cong yi-ming
IPC: A47L11/24
Filed: 2022-04-15
Abstract: The invention provides a child lock control method, a child lock control device, a computer readable storage medium and electronic equipment, and relates to the technical field of robot control. The child lock control method is applied to a robot, the robot comprises at least one key, and the child lock control method comprises the steps that under the condition that the robot is in a charging state, a child lock starting instruction is received; and according to the child lock starting instruction, a key response corresponding to the key is closed. The use safety of the robot can be improved.
Patent TW-202247158-A (TW)
Title: 具有用於改良字元線訊號時序的字元線電路的記憶體陣列電路及相關的方法
Inventor: GE SHAOPING
IPC: G11C16/32
Filed: 2022-04-25
Abstract: 本文揭露包括提供字元線信號穩定性的字元線電路的記憶體陣列電路。在記憶體存取操作中，記憶體陣列的記憶體列中的字元線上的字元線信號的狀態可基於閂鎖時鐘信號的第一時鐘狀態期間的字元線閂鎖的狀態。字元線閂鎖接收從解碼的記憶體位址產生的位址解碼信號。反相延遲時鐘電路從閂鎖時鐘信號產生時鐘脈衝。字元線閂鎖在時鐘脈衝期間存儲位址解碼信號，並根據所存儲的位址解碼信號產生字元線信號。從位址匯流排接收記憶體位址。直通位址捕捉閂鎖使解碼器可用於解碼記憶體位址的時間最大化，而字元線閂鎖減少傳播到字元線信號的位址信號的波動。
Patent TW-202311258-A (TW)
Inventor: FISCHER RUEDIGER
IPC: A01P7/00
Filed: 2022-05-10
Abstract: 本發明係有關一種新穎之式(I)化合物
         其中 A
         1 、A
         3 、X、R
         1 、R
         3 、R
         4 、R
         6 、R
         7 、R
         8 及n具有如本文定義，
        及其作為殺蜱蟎劑及/或殺昆蟲劑於防治動物害蟲上之用途、及其製備之方法及中間物。
Patent TW-202234137-A (TW)
Title: 轉接器裝置、安裝座設備、成像設備及配件
Inventor: SHIGEMATSU MASAYASU
IPC: G03B17/56
Filed: 2018-05-29
Abstract: 一種轉接器裝置，其包括位於一側的第一安裝座和位於另一側的第二安裝座。第一安裝座可拆卸地安裝到成像設備，且第二安裝座可拆卸地安裝到配件。第一安裝座具有沿著周向佈置的第一安裝座凹部至第三安裝座凹部和第一安裝座爪至第三安裝座爪。第二安裝座具有沿著周向佈置的第四安裝座凹部至第六安裝座凹部和第四安裝座爪至第六安裝座爪。第一安裝座爪至第三安裝座爪能夠插入另一個成像設備上的安裝座凹部。第四安裝座爪至第六安裝座爪能夠插入另一個配件上的安裝座凹部。第一安裝座凹部至第三安裝座凹部之周向上的角度範圍中的最小角度範圍等於或小於第四安裝座爪至第六安裝座爪之周向上的角度範圍中的最小角度範圍。
Patent TW-202302923-A (TW)
Title: Pre-wet module, deaerated liquid circulation system, and pre-wet method
Inventor: SEKI MASAYA
IPC: H01L21/683
Filed: 2022-05-27
Abstract: Provided are a pre-wetting module, a degassing liquid circulation system, and a pre-wetting method for efficiently pre-treating a substrate. The pre-wetting module (200) is provided with: a degassing tank (210) that accommodates a degassing liquid; a processing device (258) that includes a nozzle (268) that supplies a cleaning liquid to a surface to be processed of the substrate with the surface to be processed facing upward; a substrate holder (220) having a first holding member (222) for holding the first substrate and a second holding member (224) for holding the second substrate, the first holding member (222) being disposed between the degassing tank and the processing device; and a drive mechanism (230) that rotates and lifts the substrate holder, the drive mechanism (230) including: a rotation mechanism (240) that rotates the substrate holder between a first state in which the surface to be processed of the first substrate faces the degassing liquid in the degassing tank and a second state in which the surface to be processed of the second substrate faces the degassing liquid in the degassing tank; and a lifting mechanism (248) that lifts and lowers the substrate holder.
Patent TW-202306158-A (TW)
Title: Semiconductor device structure and methods of forming the same
Inventor: WANG HUNG-CHIH
IPC: H01L21/302
Filed: 2022-06-30
Abstract: Methods of forming a semiconductor device structure are described. The method includes forming a first conductive feature including a conductive fill material over a substrate, forming an etch stop layer on the conductive fill material, forming an intermetallization dielectric on the etch stop layer, forming an opening in the etch stop layer and the intermetallization dielectric to expose a portion of the conductive fill material, forming a recess in the exposed portion of the conductive fill material, and the opening and the recess together form a rivet-shaped space. The method further includes forming a second conductive feature in the rivet-shaped space and forming a metal nitride layer over the intermetallization dielectric and the second conductive feature. The forming the metal nitride layer includes depositing the metal nitride layer and treating the metal nitride layer with a plasma treatment process.
Patent TW-202305588-A (TW)
Title: A processing apparatus, method and computer program for a vector combining instruction
Inventor: MANSELL DAVID HENNAH
IPC: G06F9/30
Filed: 2022-07-05
Abstract: There is provided a processing apparatus, method and computer program. The apparatus comprising: decode circuitry to decode instructions; and processing circuitry to apply vector processing operations specified by the instructions. The decode circuitry is configured to, in response to a vector combining instruction specifying a plurality of source vector registers each comprising source data elements in a plurality of data element positions, one or more further source vector registers, and one or more destination registers, cause the processing circuitry to, for each data element position: extract first source data elements from the data element position of each source vector register; extract second source data elements from the one or more further source vector registers; generate a result data element by combining each element of the first source data elements and the second source data elements; and store the result data element to the data element position of the one or more destination registers.
Patent TW-202311837-A (TW)
Title: Lens hood
Inventor: SAKAZUME NAOKI
IPC: G03B11/04
Filed: 2022-07-15
Abstract: Provided is a lens hood 1 which is effective for blocking unnecessary light from entering an imaging lens of a camera, and which comprises an antireflection film 4 that has excellent design. (A) is a resin component, (B) is texture formation particles, (B1) is inorganic small particles having a particle diameter of 0.05-0.4 [mu]m, (B2) is inorganic large particles having a particle diameter of 2-6 [mu]m, and (C) is a dilution solvent. A lens hood 1, which is to be mounted at the subject side of an imaging lens to block unnecessary light from entering the imaging lens, comprises an antireflection film 4 on an inner-wall surface 2a of a hood body 2. The antireflection film 4 is constituted by a film that has been formed from a solution composition by spray coating and that has a thickness of 2-40 [mu]m. The solution composition contains (A), (B), and (C). (B) is contained in the amount of 20-60 mass% relative to the total amount of 100 mass% of the total solid content in the composition. (B) contains (B1) and (B2) in the amount of 90 mass% or more, and when (B1) is 1, the mass ratio of (B2) with respect thereto is 1.8-3.3.
Patent TW-202309387-A (TW)
Title: Electromechanical lock
Inventor: THIS INVENTOR HAS AGREED TO WAIVE THE ENTITLEMENT TO DESIGNATION
IPC: E05B47/02
Filed: 2022-08-02
Abstract: An electromechanical lock comprises an electromechanical locking mechanism and a control circuit, wherein an associated counter-piece can be locked by means of the locking mechanism. The locking mechanism has a latch, an entrainer that is rotatable about an axis of rotation for driving the latch, and an electric motor for driving the entrainer, wherein the latch can be moved between a locking position and an unlocking position, wherein the latch is preloaded in the direction of the locking position. The entrainer can be rotated into a release position, a standby position, and a blocking position and the latch can be driven to perform a movement into the unlocking position by rotating the entrainer into the release position. In the standby position, the latch is released to be urged back against the preload. In the blocking position, the entrainer blocks the latch against a movement in the direction of the unlocking position.
Patent TW-202316858-A (TW)
Title: Method and apparatus for hardware-friendly template matching in video coding system
Inventor: CHEN CHUN-CHIA
IPC: H04N19/176
Filed: 2022-08-19
Abstract: Method and apparatus for template matching with a determined area are disclosed. According to this method, a current template comprising current neighbouring pixels on an above side of the current block, on a left side of the current block, or a combination thereof for a current block is received. An area in a reference picture is then determined, where the reference picture corresponds to a previously coded picture. A matching result between a restricted reference template of a reference block and the current template is then determined, wherein the restricted reference template is generating by using only neighbouring reference pixels of a reference template inside the determined area, the reference template has a same shape as the current template, and a location of the reference template is determined according to a target motion vector (MV) from the current template.
Patent TW-202320535-A (TW)
Title: Imaging device
Inventor: YAMASHITA TOMONORI
IPC: H04N5/30
Filed: 2022-09-02
Abstract: An imaging device of the present disclosure includes: photoelectric conversion elements that generate electrical charges corresponding to received light; pixel circuits that read the electrical charges from the photoelectric conversion elements and convert the electrical charges into analog pixel signals; and conversion circuits that convert the pixel signals into digital pixel data on the basis of a reference signal. Each of the conversion circuits includes a first circuit that is connected to the pixel circuit and a second circuit that is connected to an output of the first circuit. The photoelectric conversion elements are arranged in a matrix and are disposed in a first layer of a first substrate, and the pixel circuits and the first circuits, provided in a one-to-one relationship with the photoelectric conversion elements, are disposed in a second layer of the first substrate.
Patent TW-202313909-A (TW)
Inventor: ITO KEN
IPC: C09J133/08
Filed: 2022-09-13
Abstract: The objective is to provide a pellicle which less likely generates outgas. A pellicle (10) of the present disclosure comprises a pellicle frame (14), a pellicle film (12) supported on one end face of the pellicle frame (14), and an adhesive layer (15) provided on the other end face of the pellicle frame (14). A degree of swelling of the adhesive layer (15) expressed in the following formula (A) is not more than 200%. Formula A: [(Mass after immersion of a 10 mg test piece collected from the adhesive layer) / 10 mg] * 100 In formula (A), the mass after immersion denotes the mass of the test piece after immersing the test piece for 6 hours in 10 ml of decane solution with a capillary column GC concentration of at least 99.0%.