baber/WOPTO huggingface dataset:
Patent KR-19990067627-A (KR)
IPC: A61K31/4523
Filed: 1996-11-15
Abstract: Compounds of formula I wherein Q1, Q2, Q3, and Q4 have any of the meanings given in the specification, their N-oxides, and their pharmaceutically acceptable salts are nonpeptide antagonists Substance P and NKA, useful for the treatment of asthma, etc. Also disclosed are pharmaceutical compositions, processes for preparing the compounds of formula I and intermediates.
Patent KR-19990071508-A (KR)
Title: 기판 상에 있는 표시부를 식별하기 위한 광학식 문자 인식용 조명 시스템
IPC: G06K9/20
Filed: 1996-11-19
Abstract: 반도체 웨이퍼(18)와 같은 기판 상의 표식을 조명하여, 기판에 평행하게 정렬되는 또는 기판에 어떤 각도에서 카메라로 보기 위한 하나 이상의 광원(24,26), 투명한 배플(30,32) 및 거울(50,64,66)을 갖는 조명 시스템(10,40,74,100)이 제공된다. 광원(24,26)은 소프트 마크를 조명하기 위한 발광 다이오드 및 하드 마크를 조명하기 위한 넓은 스펙트럼 백열 전구를 포함한다. 어두운 영역 및 밝은 영역 조명기는 각각의 어두운 배경 상의 밝은 표식 및 밝은 배경 상의 어두운 표식의 판독을 개선하기 위해 제공된다. 광 제어 유닛(158)은 광원의 선택 및 세기를 수동 또는 자동적으로 제어하는 것을 허용한다. 광원의 광학 경로를 따라 펼쳐 있는 대향하는 거울은 광원으로부터 방출되는 빛을 반사시켜 카메라의 시야에 들어가서, 그 결과 조명 효율을 증가시키고, 아주 적은 광원을 사용하게 한다.
Patent KR-19990082038-A (KR)
IPC: H04N7/173
Filed: 1996-01-26
Abstract: PCT No. PCT/DK96/00044 Sec. 371 Date May 7, 1997 Sec. 102(e) Date May 7, 1997 PCT Filed Jan. 26, 1996 PCT Pub. No. WO97/27683 PCT Pub. Date Jul. 31, 1997A control information message is communicated from a control information generator and encoder (3) in a server installation (1) to one or more computer installations (2) by encoding the message into a single sequence of a relatively short duration, which is incorporated into an overall audio or video information carrying signal and transmitted to the user computer installation through a wired or wireless transmission media. In the user computer installations the received signal sequence is retrieved from the overall signal and decoded into the original message which is then used to initiate an action controlled by a prestored program in the user computer installation (2).
Patent KR-20000005095-A (KR)
Title: Synthesis of solid, powdery rare earth carboxylates by a precipitation method
Inventor: YUNLU KENAN
IPC: C08F4/52
Filed: 1997-03-24
Abstract: PURPOSE: Solid, powdery rare earth carboxylates are easy to process, treat, transport and gives versatility to make compositions CONSTITUTION: In producing of solid, powdery carboxylates of Rare Earth elements, Nd, La, Pr, and Ce, where the ligands coordinated to the metal are preferably long chain, branched carboxylic acids, most preferably 2-ethylhexanoic, neodecanoic(versatic) and naphthenic acids. The process involves batch precipitation of the product by utilizing Rare Earth nitrates, and salts of the carboxylic acid and washing the product with water, alcohol, water and alcohol mixtures or combinations of them.
Patent KR-20000010814-A (KR)
Title: Control of junction depth and channel length using generated interstitial gradients to oppose dopant diffusion
Inventor: BUYNOSKI MATHEW S
IPC: H01L21/265
Filed: 1997-04-11
Abstract: PURPOSE: An ion-implantation method is provided to control a junction depth and a channel length by using interstitial gradients generated to oppose dopants diffusion. CONSTITUTION: The improved manufacturing process and an improved device made by the process for retarding diffusion of implanted dopants during subsequent high temperature processing. A layer of an electrically inactive species (62) is implanted well below the active dopant layers (52, 70), and the excess interstitial due to damage from the electrically inactive species layer form a retarding gradient which opposes dopant diffusion. Using this process, shallow source-drain junctions (76) can be achieved, and lateral encroachment of LDD implants (52) under the gate (55) can be minimized.
Patent KR-20000016611-A (KR)
Title: Lossless line compression
Inventor: BLOOMFIELD MARC A
IPC: G06T9/20
Filed: 1997-05-28
Abstract: PURPOSE: A method for loss less compression of a graphical line having attributes thereof by using a low bandwidth transport mechanism is disclosed. CONSTITUTION: In a distributed computer system, a method for compression of a graphical line within an application server without loss allows the compressed line data to be transmitted over a low bandwidth transport mechanism to a graphical user interface for display on a workstation (20). The application server determines, from graphical line data representative of the graphical line, coordinate locations for the endpoints of each sub-path of the graphical line and attributes of each sub-path (22 and 24). The application server generates a compressed line data packet of variable length which includes the coordinate location data and attribute data for each sub-path of the graphical line (28).
Patent KR-19990068103-A (KR)
Title: 칼라필터의 높은 얼라인먼트 정확도를 확보할 수 있는 칼라필터의 제조방법 및 그의 얼라인먼트 마크
IPC: G03F9/00
Filed: 1999-01-25
Abstract: 하부 얼라인먼트 마크(22)를 사용하여 노광용 포토마스크의 얼라인먼트를 행하고, 적색필터(24)와 적색 얼라인먼트 마크(25)를 동시에 형성한다. 청색필터의 형성시에는, 적색 얼라인먼트 마크(25)를 사용한 적색 얼라인먼트 광(28)에 의한 포토마스크의 얼라인먼트를 행하여, 청색레지스트(26)로부터 청색필터패턴을 형성한다. 이와 같이 하여, 청색필터의 형성시에는, 적색의 얼라인먼트 광(28)을 흡수하지 않는 적색 얼라인먼트 마크(25)를 사용함으로써, 적색 얼라인먼트 마크(25)에 관한 반사광의 광량이 커진다. 그 결과, 높은 콘트라스트의 적색 얼라인먼트 마크(25)가 얻어진다.
Patent KR-20000051651-A (KR)
Inventor: SEO GEON SIK
IPC: H01L21/304
Filed: 1999-01-25
Abstract: PURPOSE: An apparatus for cleaning a dresser is provided to perform a dressing operation regarding a polishing pad by eliminating slurry adhered to a diamond disc. CONSTITUTION: An apparatus for cleaning a dresser(16) comprises a dresser receiving cup(20), at least one spraying element(22), an exhaust element(26). The dresser receiving cup receives a predetermined depth of a receiving space for receiving the dresser dressing a polishing pad(12) to polish a surface of a wafer, adhered to a surface of a polishing table(10). The at least one spraying element is installed in the receiving space of the dresser receiving cup and sprays cleaning solution toward the dresser positioned in the receiving space. The exhaust element exhausts the cleaning solution sprayed from the spraying element to the dresser, installed in the receiving space of the dresser receiving cup.
Patent KR-20000056654-A (KR)
Title: Plasma display panel
Inventor: JEONG JAE HEON
IPC: H01J11/24
Filed: 1999-02-24
Abstract: PURPOSE: A plasma display panel is provided to reduce a resistance of a bus electrode and to prevent a reaction of a dielectric and the bus electrode, thereby preventing a generating of bubble at the dielectric. CONSTITUTION: A plasma display panel comprises a pair of transparent electrodes formed in series on a substrate(100), a first metal electrode(210) on a portion of each transparent electrode, a second metal electrode(220) formed on the first metal electrode to have a lower resistance than and the same shape as the first metal electrode, and a dielectric layer(300) formed on the substrate to be coated on the transparent electrode and the second metal electrode. In the panel, the first metal electrode is made of chrome having a thickness of 2000 to 3000 angstrom or chrome oxide having a thickness of 100 to 300 angstrom. The second metal electrode is made of silver having a thickness of 4 to 8 micro-meter.
Patent KR-20000061377-A (KR)
Inventor: JUNG SANG HWA
IPC: G01M7/06
Filed: 1999-03-25
Abstract: PURPOSE: A method for simultaneously driving three shafts of three dimensional vibration testing machine is provided to simplify designing and manufacturing a very precise actuator and an active suspension by testing and measuring durability of an object under a complex condition when driving the actuator simultaneously in traverse, longitudinal and axial directions. CONSTITUTION: A method for simultaneously driving three shafts of three dimensional vibration testing machine includes the steps of initializing an output board for outputting driving signals and control signals to shaft driving parts and an input board for inputting measured data after the shaft driving(S2), initializing frequency of the driving signal to output to the shaft driving parts and driving force, outputting channel driving signals and a driving signal for a servo motor of a hydraulic pressure supplier, controlling the shaft driving parts(S8), controlling a road cell for sensing a load amount of an actuator and a linear displacement converter for sensing a displacement amount of the actuator at respective three shaft driving parts(S10), storing the sensed road amount and displacement amount in forms of database after the driving test of the three shafts(S12), and measuring a durability and fatigue limit of an examined machine by analyzing the input road amount and the displacement amount(S14,S16).
Patent KR-20000061913-A (KR)
Inventor: NAM JEONG GIL
IPC: F02B37/00
Filed: 1999-03-31
Abstract: PURPOSE: An apparatus is provided to reduce nitrogen oxide and particulate matter from among exhaust gas by lowering a compression ratio of an engine through by-passing and recirculating supercharged air supplied from a diesel engine to a combustion chamber. CONSTITUTION: In a suction/exhaust system of au automotive vehicle having a turbine(7) installed in an exhaust pipe(3) and which is driven by an exhaust pressure and a compressor(8) shaft-connected to the turbine and which supercharges an air flowing through a suction pipe(6) and compressively feeds the air into a combustion chamber(2) of an engine(1), an exhaust gas reduction apparatus is configured in that a by-pass pipe(9) is connected between the suction pipe(6) or suction manifold arranged in the rear of the compressor and a suction pipe(6') arranged in front of the compressor, a sucked air recirculating valve(10) is installed in the by-pass pipe, and the valve is opened/closed by a driving member operating by an electronic control unit.
Patent KR-19990088049-A (KR)
Title: 안전한발사식표적
IPC: F41J1/01
Filed: 1999-05-04
Abstract: 본 발명은 사격 활동 및 이러한 사격 활동에 사용하기 위한, 피치 없이 형성될 수 있는 점토 표적(10)을 제공한다.  사격 활동은 표적(10)에 탄환(50)을 사격하는 것과, 탄환(50)으로 표적(10)을 명중시켜 파열시키는 것으로 이루어진다.  표적(10)은 바인더와 충전제로 형성될 수 있으며 강하면서도 부서지기 쉬운 상태로 주조된다.  본 발명에 따른 표적(10)에는 실질적으로 피치가 없으며, 독성 레벨 LD 50이 높을 뿐만 아니라 파쇄성도 높다.  이것은 예컨대 표적을 불안정한 결정 상태로 형성하여 생성되는 내응력이 높은 표적을 형성하는 본 발명에 따라 달성될 수 있다.
Patent KR-20000073780-A (KR)
Title: 개선된 화학적 건조 및 세정 시스템
Filed: 1999-05-14
Abstract: 본 발명은, 예컨대 전자 부품, 반도체 웨이퍼, 인쇄 회로 기판 등과 같은 작업편(17A, 41)을 건조 및/또는 세정하는 시스템에 관한 것이다. 작업편이 처리액 또는 헹굼액(13)으로부터 빠져 나올 때, 매우 작은 표면 장력을 갖고, 휘발성이고, 처리액의 밀도 보다 훨씬 큰 밀도를 갖는, 히드로플루오르에테르(HFE), 에틸화 히드로플루오르에테르 또는 히드로플루오르에테르 또는 에틸화 히드로플루오르에테르의 아조트로프(azeotrope)와 같은 선택된 건조 및/또는 세정액(50)은 그 작업편의 노출된 표면에 분사되거나, 적하되거나, 그렇지 않으면 그 표면으로 전달된다. 그 작업편은 본 발명의 방법을 사용하여 대부분의 경우에 있어서 7 초 내지 45 초, 또는 그 미만으로 건조되고 세정될 수 있다. 건조 및/또는 세정은 단일 작업편 공정, 단일 작업편의 연속된 공정 또는 일괄 공정으로 수행될 수 있다.
Patent KR-20000073819-A (KR)
Inventor: KIM CHEOL DONG
IPC: H03G9/00
Filed: 1999-05-14
Abstract: PURPOSE: An apparatus is provided to effectively control an amplitude and a phase of RF signal at the same time by minimizing a phase variation. CONSTITUTION: An apparatus for controlling amplitude and phase of RF signal comprises a vector attenuator consisted of a 90 deg hybrid(310), a 0/180 deg phase converter(320,320-1), a low phase variation attenuator(330,330-1), and an in-phase synthesizer(340). The hybrid divides the input RF signal between in-phase(X-axis) signal component and quadrature-phase(Y-axis) signal component. The phase converter attains a phase conversion of in-phase signal component and the quadrature-phase signal component. The low phase variation attenuator attenuates the signal level of the converted signal components. The in-phase synthesizer vector synthesizes the attenuated signal components, and outputs its result. Thereby, the amplitude and the phase of the input RF signal are adjusted as a users demand to output.
Patent KR-19990088640-A (KR)
Title: 이동통신단말및송신비트레이트판별방법
IPC: H04L25/02
Filed: 1999-05-28
Abstract: 본 발명은 회로 규모의 감소에 따른 소형화 및 저소비 전력화를 실현할 수 있게 하는 이동 통신 단말을 제공하는 것을 목적으로 한다. 
     통화 채널의 정보 비트를 중첩 부호화함으로써 생성되는 기지국으로부터의 전송 데이터를 수신하고, 추가로 상기 전송 데이터를 복호화함으로써 기지국에서 설정된 송신 비트 레이트를 판별할 수 있는 이동 통신 단말에 있어서, 상기  기지국에서 설정되는 송신 비트 레이트를 추정하는 레이트 추정 수단과, 상기 레이트 추정 수단에서 추정된 송신 비트 레이트에 기초해서 중첩 부호화된 전송 데이터를 복호하여 복호 데이터와 함께 소정의 복호 결과를 출력하는 복호 수단과, 상기 복호 데이터를 다시 중첩 부호화하여 재부호화 데이터를 출력하는 재중첩 부호화 수단과, 상기 재부호화 데이터 및 상기 소정의 복호 결과에 기초하여 추정된 송신 비트 레이트의 정오(正誤)를 판별하는 레이트 판별 수단을 구비하는 구성이다.
Patent KR-19990073140-A (KR)
Title: 탄성체가장착된롤러스케이트등
Filed: 1999-05-31
Abstract: 본 발명은 스포츠와 레크레이션으로 애용되는 롤러스케이트(도 1)나 인라인롤러스케이트(도2)의 경기자가 목적한 추진방향으로 나아가기 위하여 체중으로 마찰력을 얻는 것에 구두(1)와 바퀴(3) 사이에 탄성체(9)를 장착하여 마찰력 생성시 야기되는 체중의 압력(1차압)을 탄성체에 다시 가압(2차압) 함으로서 그 반동력을 얻게되며 그로 인한 제2의 추진력을 더하게되어 같은 힘으로 속도를 더 낼 수 있는 롤러스케이트 및 인라인롤러스케어트를 만드는 방법과 그 장치에 관한 것이다.
Patent KR-20010001067-A (KR)
Inventor: KIM DO NYEON
IPC: H01J29/86
Filed: 1999-06-01
Abstract: PURPOSE: A cathode ray tube is provided not to generate a BSN(Beam Strike Neck) and to effectively reduce deflected electricity. CONSTITUTION: A cathode ray tube comprises panels(3,5) and a vacuum tube. The panel(3) has a fluorescent screen(1). The funneled panel(5) is connected with the panel(3) and has a deflecting yoke. The vacuum tube is connected with the panel(5) and contains a cylindrical neck(9) having an electronic gun(7). The panel(5) contains a corn portion(50b) and a body(50c) to effectively deflect an electronic beam from the electronic gun(7). The cone portion(50b) have a neck seal face(50a) connecting with the neck(9) and is arranged toward the neck(9). The body(50c) is connected with the panel(3) by rapidly extending from the end of the cone portion(50b).
Patent KR-20010001945-A (KR)
Inventor: KIM GI JUNG
IPC: E01D19/00
Filed: 1999-06-09
Abstract: PURPOSE: A guide bearing for preventing the fall of a bridge and an installation method thereof are provided to prevent the fall of a bridge even under displacement of big load, to save construction costs of a bridge bearing, to improve durability and to apply to any bridges. CONSTITUTION: In a guide bearing(3), one pair of support angles(31) are installed, facing each other at a certain interval to be integrated on a lower end of an upper plate. An inserting/supporting shaft(32) is buried protrudingly between the support angles. A rubber pad(33) embeds a steel core inserted between the support angles and inserting/supporting shaft. Herein, a plate is attached to both ends of each rubber pad so that the plate, support angle and inserting/supporting shaft are connected by a bolt(34).
Patent KR-20010002760-A (KR)
Inventor: AHN SEUNG HO
IPC: G02B6/38
Filed: 1999-06-17
Abstract: PURPOSE: A method for producing a multi-channel optical fiber array by using silicon substrate and galvanoformung plating is provided to simplify producing processes for reducing producing cost while precisely processing. CONSTITUTION: V-grooves are formed and etched on silicon substrates by a semiconductor process. Two silicon substrates are attached for the etched surfaces to face each other. Thus, the first metal mold is formed. Metal is filled in space of the metal mold to produce a fine pin metal structure(20). A V-groove structure(30) is processed to fix a fine pin(21) of the metal structure. The fine pin is fixed in the V-groove to form an inner core. High molecular resin is injected to an external mold(40) to injection mold.
Patent KR-20000006563-A (KR)
Inventor: TOOJI YUTAKA
IPC: F15B11/00
Filed: 1999-06-30
Abstract: PURPOSE: A hydraulic excavator is provided to prevent the interruption of the pressure even if the operation pressure of a shift motor or a working machine actuator increases when the shifting and the work machine operation are executed at the same time. CONSTITUTION: A hydraulic excavator has; a left and right shift motors(31dR); a work machine actuator to operate the work machine; a control valve(6) to provide a communication passage between two hydraulic pumps through a pump communication passage; a drive signal detection piece to detect the drive signal to the two hydraulic pumps; and a controller(5) to control the control valve to throttle or to close the pump communication passage according to the drive signal detected by the drive signal detection piece.
Patent KR-20010009544-A (KR)
Inventor: KIM YEONG GI
IPC: D06F39/02
Filed: 1999-07-12
Abstract: PURPOSE: A device for injecting a liquid detergent of a washing machine is provided to supply the liquid detergent introduced in a detergent tub after the liquid detergent is completely diluted. CONSTITUTION: A liquid detergent(A) introduced into a storing space(622) of a detergent tub(62) is discharged to a rotating tub(20) by raising a buoyancy valve(63) when the water is supplied. The liquid detergent is diluted by the water. The washing efficiency is improved by accomplishing the washing through the diluted liquid detergent. The liquid detergent is discharged after the washing is completely finished. A discharging opening(624) is formed on the bottom surface of the storing space(622) so that the liquid detergent(A) introduced into the storing space(622). A buoyancy valve(63) is provided to open and close the discharging opening(624) by the buoyancy force.
Patent KR-20010011211-A (KR)
Inventor: AHN SEONG YONG
IPC: H01J11/38
Filed: 1999-07-26
Abstract: PURPOSE: A PDP(plasma display panel) is provided to improve luminous intensity and luminous efficiency through a thick dielectric layer and wide sustain electrode width. CONSTITUTION: In a PDP, over 80% of a pixel pitch is filmed by sustain electrodes. By widening width of sustain electrode, luminous intensity is improved while increasing discharge current. Thus, a thicker dielectric layer(110) is included in the PDP. Herein, a protecting film(120) formed by magnesia is installed to prevent deterioration of dielectric layer while improving discharge efficiency. The dielectric layer is formed for over 25 micrometers while spraying first/second sustain electrodes(132,131). Moreover, by widening width of the sustain electrode, discharge current is increased. By thickening dielectric layer, the discharge current is repressed.
Patent KR-20000017062-A (KR)
Inventor: GRIL ALFRED
IPC: H01L23/532
Filed: 1999-08-04
Abstract: PURPOSE: A mutual connection structure and a manufacturing method thereof is provided to prevent fluorine compounds for damaging a mutual connection and a mechanical functions by using a metal and an insulator having capping and liner matters. CONSTITUTION: The mutual connection structure and a manufacturing method thereof comprises: one more layers of a fluorinated dielectric insulator(250); one more layers of a conductive wiring pattern connected electrically by a conductive via; the conductive wiring pattern and the conductive via being isolated from the fluorinated dielectric insulator(250) by one more selected fluorine-resistant capping materials(274) of groups comprising Ag, AL, AL-Ti, Co, Cr, Cu, In, Ir, Mg, Mn, Pd, Pt, Sn, oxides of the elements, fluoride, nitride, silicide, mixtures of the compounds, DLC containing Si, and DLC containing Si-O.
Patent KR-20010018545-A (KR)
Inventor: LIM DONG MIN
IPC: C08K13/02
Filed: 1999-08-20
Abstract: PURPOSE: Provided is a rubber composition for belt cushion, which has enhanced modulus, tear resistance of mixed rubber of belt cushion injected between belts for dispersing of internal stress of belt terminal at the still radial tire and enhanced refining, rolling and extruding processing. CONSTITUTION: The rubber composition is characterized by comprising of independently adding 1-5phr of activator-73, premix of 4tear as vulcanization activator, 50-70phr of carbon black, and 3-9phr of sulfur.
Patent KR-20010018942-A (KR)
Inventor: MUN HYANG JU
IPC: G06F3/12
Filed: 1999-08-24
Abstract: PURPOSE: A method for converting a document form of a computer is provided to easily convert an original document into a form of an object document through a printer drive by using a conversion function value of all forms of document even though a predetermined application program doesn't support a form of an object document. CONSTITUTION: A user writes an original document using an application program of a computer(S1). If the user selects a print function(S2), original document data are transmitted to a printer driver through a GDI. A setting unit of the printer driver generates a print conversational window, and indicates the window on a screen(S3). The unit judges whether a document form conversion function is selected(S4). The unit transmits original document data to a data processing unit, and simultaneously controls the unit(S5). A user designates a form of a document which the user wants to convert(S6). The unit extracts a conversion function corresponded to a form of an object document(S7). The unit converts the original document using the conversion function(S8). The unit transmits data of the form of the object document(S9).
Patent KR-20010019341-A (KR)
Inventor: LEE JIN SU
IPC: G06F17/30
Filed: 1999-08-26
Abstract: PURPOSE: A data structure of motion picture for searching and browsing contents-based motion picture is provided so that a user can search and understand the contents of the motion picture more conveniently by showing the primary characters and the relations between the characters. CONSTITUTION: A visual DS(201), as a visual description scheme, includes a data structure of a syntactic structure DS(202) and a semantic structure DS(203). The syntactic structure DS(202) describes information meaning a period of real motion picture and the semantic structure DS(203) describes information of motion picture in meaning. The syntactic structure DS(202) comprises segment DSs(204), as a period of real motion picture and denotes a position through a time DS(205). The semantic structure DS(203) has an event DS(206) meaning an event, an object OS(207) for representing object information such as characters or places, and an event/object relation graph DS(208).
Patent KR-20010019981-A (KR)
Inventor: LEE HAE JIN
IPC: G02B15/02
Filed: 1999-08-31
Abstract: PURPOSE: A triplet photographic objective lens is provided which has small telescopic ratio and large thickness, to be capable of being set in a lens shutter camera using an advanced photo system film. CONSTITUTION: A triplet photographic objective lens has the first lens(1) with positive refractivity, the second lens(2) with negative refractivity and the third lens(3) having positive refractivity. The first lens is meniscus lens whose one side(r1) facing an object is convex. Both sides(r3,r4) of the second lens are concave, and both sides(r5,r6) of the third lens are convex. The first, second and third lenses are sequentially located, facing the object. An iris is placed above the third lens. Where the entire focal distance of the lens system is f, the optical-axial distance ranging from an optical-axial apex of the refractive surface of the first lens which faces the object to an apex of the refractive surface of the top surface of the third lens is D, and the optical-axial distance ranging from an optical-axial apex of the refractive surface of the first lens which faces the object to the top point of the lens system is L, 1.05<L/f<1.11 and 0.27<D/L<0.31.
Patent KR-20010025923-A (KR)
Inventor: LEE SEUNG JAE
IPC: H01L21/76
Filed: 1999-09-01
Abstract: PURPOSE: A shallow trench isolation method is provided to prevent a nitride layer liner from being clipped and to embody a good gap filling of a high density plasma oxide layer, by making an upper corner portion of a trench not broken and have a good profile. CONSTITUTION: A pad oxide layer(102) and a nitride layer(104) are sequentially formed on a semiconductor substrate(100). The nitride layer, the pad oxide layer and the semiconductor substrate are etched to form a trench(108). A nitride layer liner(112) is deposited on the resultant structure. A high density plasma oxide layer(114) is firstly deposited on the resultant structure to bury a part of the trench. A high density plasma oxide layer is secondly deposited to completely bury the trench. A D/S ratio is not less than 5.9 in the first deposition step of the high density plasma oxide layer(DS ratio is (deposition rate+sputtering etch rate)/(sputtering etch rate)).