Patent SG-11201804420U-A (SG)
Title: Pre-coated shield for use in vhf-rf pvd chambers
Inventor: LIU ZHENDONG
IPC: C23C14/56
Filed: 2016-11-03
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau res., 00) (43) International Publication Date .... ....r .„,„1 1 June 2017 (01.06.2017) WIPO I PCT ID Hit (10) WO International 2017/091334 111111111111111111IIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIIMIIIIIIIIIIIIIII Publication Al Number (51) International Patent Classification: 215 Quinault Way, Fremont, California 94539 (US). C23C 14/56 (2006.01) C23C 14/50 (2006.01) YOUNG, Donny; 10134 Bret Ave., Cupertino, California C23C 14/34 (2006.01) 94014 (US). LU, William M.; 753 Carmel Ave., Sunnyvale, California 94085 (US). (21) International Application Number: PCT/US2016/060231 (74) Agents: PATTERSON, B. Todd et al.; Patterson & Sheridan, L.L.P., 24 Greenway Plaza, Suite 1600, Houston, (22) International Filing Date: Texas 77046 (US). 3 November 2016 (03.11.2016) (25) Filing Language: English (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (26) Publication Language: English AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (30) Priority Data: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, 62/259,544 24 November 2015 (24.11.2015) US HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, (71) Applicant: APPLIED MATERIALS, INC. [US/US]; KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 3050 Bowers Avenue, Santa Clara, California 95054 (US). MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (72) Inventors: LIU, Zhendong; 2247 Mits Way, Tracy, Cali- SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, fornia 95376 (US). HOU, Wenting; 233 Red Oak Dr. E, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, Apt. K, Sunnyvale, California 94086 (US). LEI, Jianxin; ZW. [Continued on next page] (54) Title: PRE-COATED SHIELD FOR USE IN VHF-RF PVD CHAMBERS (57) : Implementations of the dis- present closure relate to an improved shield for use in a pro - In implementation, cessing chamber. one the shield \"--- 210 includes a hollow body having a cylindrical shape 160 that is substantially symmetric about a central axis of the body, and a coating layer formed on an inner sur- face of the body. The coating layer is formed the same material as a sputtering target used in the processing chamber. The shield advantageously reduces particle -• contamination in films deposited using RF-PVD by .. reducing arcing between the shield and the sputtering target. Arcing is reduced by the presence of a coating Ne.. on the surfaces of the shield. layer interior 204 .:- 208 209 — .„ 163 ----- - 1 - : - . 202 164 207 1-1 .4t i t M en - O\ . N . ei 211 284 F G. O WO 2017/091334 Al MIDEDIMOMOIDEIRMEMOMMHOIIIIIIMMEHOM (84) Designated States (unless otherwise indicated, for every SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, kind of regional protection available): ARIPO (BW, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, GH, SZ, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, Published: RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, CZ, IT, RS, DE, — LT, SE, with international search report (Art. 21(3))