baber/WOPTO huggingface dataset:
Patent KR-19990067727-A (KR)
Title: 전계 효과 트랜지스터 및 그 형성 방법
IPC: H01L21/8238
Filed: 1999-01-05
Abstract: 본 발명은 반도체 기판에 접촉하며 넥 영역을 통해 기판과 전하 캐리어의 교환이 가능한 반도체 재료의 실질적인 절연 영역에 형성된 디바이스 영역을 구비하는 전계 효과 트랜지스터(FET)에 관한 것이다.  상기 트랜지스터의 디바이스 영역은 넥 부분을 제외한 표면에서 상기 기판과의 전기 접촉으로부터 절연이 가능하다. 
     반도체 재료의 기판에 절연 영역을 형성하는 단계와, 반도체 재료의 측벽 스페이서 영역이 절연 영역의 측벽에 상기 FET의 디바이스 영역으로 남아 있도록 상기 기판을 이방성 에칭하는 단계를 포함하는 전계 효과 트랜지스터(FET)의 형성 방법이 개시된다.  상기 절연 영역은 게이트 전도체 증착 이후, 게이트 전도체가 디바이스 영역의 중앙 채널 영역을 둘러쌀 수 있도록 리세스(recess)된다.  디바이스 영역의 중심부 가운데 최소한 한 부분 또는 중심부에 접한 영역 상의 불순물 농도는 변화되어 제 1 불순물 형인 소스 드레인 영역과 제 1 불순물 형과 상반되는 제 2 불순물 형인 채널 영역을 형성하도록 된다.
Patent KR-19990045811-A (KR)
Title: 반대차선을운행하는자동차에서발사되는전조등불빗을저감시켜주는장치
Filed: 1999-01-13
Abstract: 본 발명은 반대차선을 운행하는 자동차에서 발사되는 전조등 불빗을 저감 시켜주는 장치에 관한 것이다. 
     종래의 자동차는 단순히 전방향의  장애물 상태를 판단하는데 필요한 조사의 효과만을 나타내는데 필요한 전조등에 지나지 않았기에 상대차선에서 발사되는 전조등의 불빗이 강하게 조사 되며는 도로를 운행하는 운전자의 시야가 가려져 교통사고의 위험이 상존 하였던 것이다. 
     이러한 결점을 해결하고자 하는 본발명의 구조는 다음과 같다. 
     자동차의 전조등 전면에 일정량의 밝기를 가진 반사등을 설치하면 본 발명의 구조는 간단히 해결되는 것으로서 전조등에서 발사되는 조사각도를 반사경으로 다양하게 조절하여 주므로서 운전자에게 필요한 장애물을 제거 시켜주는 효과가 있는 것이다. 
     즉 전조등 전면에 설치된 반사경의 각도를 전방향으로 45도로 설치하여 주든지 또는 90도로 설치하여 주든지를 미리 조절하여 주게 되면 전방향에서 발사되는 전조등 불빗을 감소 시켜주게 되는 것이다. 
     전방향에서 발사되는 전조등 불빗이 저감되는 이유를 설명하면 다음과같다. 
     통상적으로 시내의 도로변에 설치된 가로등 주변을 운행하여 보면 상대차선에서 발사되는 전조등 불빗에 대한 장애효과를 느끼지 못하고 평상시의 대낯에 운행하는 효과를 느낄수가 있는것과 같이 본발명의 장치를 자동차의 전조등 전면에 설치하여 주게 되면 전방향에서 발사되는 전조등 불빗에 의한 운전 장애를 느끼지 않고서 차량운행을 할 수가 있는 것이다. 
     즉 운행 차량의 범퍼상단에서 상향으로 발사되는 전등 불빗이 운행차량의 가시거리를 넓혀주는 효과에 의하여 안전운행이 가능한 것이다. 
     통상적으로 자동차의 전조등을 전면 하단에 반사경을 설치하여 주게되면 본발명의 효과는 나타나게 되는 것이다.
Patent KR-19990067983-A (KR)
IPC: F03B3/02
Filed: 1999-01-19
Abstract: The paddle wheel for a hydraulic flow machine, especially a water turbine, has a wheel base (1.1), a wheel crown (1.2) and a number of paddles (1.3), each of which has an entry edge (1.3.1) and an outlet edge (1.3.2). Each outlet edge (1.3.2) has deflection at point (C) near the wheel base (1.1) to run (1.3.3) on the base (1.1) to meet a point (B) which is opposite to, and downstream from, the point (A) where the outlet edge (1.3.2) would meet the wheel base without any deflection. The deflection line between points (B,C) is straight, concave or convex.
Patent KR-20000051242-A (KR)
Inventor: AHN BYUNG JO
IPC: H04N5/74
Filed: 1999-01-20
Abstract: PURPOSE: A simple convergence correction method of a projection TV compensation is provided to solve the problem of red and blue signals being scattered through a screen. CONSTITUTION: A projection television includes a red cathode ray tube, a green cathode ray tube, and a blue cathode ray tube. The projection reflects the red signal, green signal, and a blue signal from respective cathode ray tube onto a screen. The respective cathode ray tube includes a deflection yoke(1). The deflection yoke varies right/left deflection force of the electron beam with respect to the color signal for an amount corresponding to the angle at which the color signal is reflected at the reflection mirror. The red cathode ray tube, green cathode ray tube, and the blue cathode ray tube further includes an asymmetrical deflection yoke, a symmetrical deflection yoke, and an asymmetrical deflection yoke, respectively.
Patent KR-20000051293-A (KR)
Inventor: HER JONG
IPC: G02B6/00
Filed: 1999-01-20
Abstract: PURPOSE: An optical fiber for photo amplifier containing Dy¬+3 is provided which improves photo amplified efficiency in wavelength of 1.31 micrometer. The photo amplifier containing Dy¬+3 is minimized interaction between Dy¬+3 and base. CONSTITUTION: An optical fiber is doped Dy¬+3 to Ge-Ga-S glass containing 1-20mol% of alkali metal-halide to the Ge-Ga-S glass, or is doped Dy¬+3 to Ge-Ga-As-S glass containing contained 1-20mol% of alkali metal-halide to the Ge-Ga-As-S glass.
Patent KR-19990072285-A (KR)
Title: 헤드ｉｃ회로및기록장치
IPC: G11B5/012
Filed: 1999-01-21
Abstract: 본 발명은 직렬 전송 시간에 구애되지 않고 서보 기록시의 고속 헤드 전환을 가능하게 하는 것을 목적으로 한다. 
     직렬 인터페이스 유닛(72)에 의해 외부로부터 직렬 전송된 레지스터 어드레스와 제어 데이터를 수신하고, 수신된 헤드 어드레스를 헤드 어드레스 제어 레지스터(78)에 격납하여 헤드 어드레스에 대응한 헤드 선택 신호를 출력한다.  자동 헤드 전환 제어부(70)는 외부로부터 자동 헤드 전환 모드의 설정을 수신했을 때에, 기록 동작을 지시하는 외부로부터의 기록 게이트 신호(WRGT 신호) E4에 동기하여 헤드 어드레스 제어 레지스터(78)의 내용을 자동적으로 전환하여 복수의 헤드에 대한 헤드 선택 신호를 차례로 출력한다.
Patent KR-20000052198-A (KR)
Title: Apparatus for cooling machine room of refrigerator
Inventor: MIN HYUN SUK
IPC: F25D23/00
Filed: 1999-01-30
Abstract: PURPOSE: An apparatus for cooling a machine room of a refrigerator is provided to cool an inside of the machine room by introducing ambient cool air by generating corona wind between two electrodes for reducing noise and increasing reliability of product. CONSTITUTION: An apparatus for cooling a machine room of a refrigerator in which the machine room(M) is formed at one side of a main body and a compressor(20) and a condenser(30) are mounted in the machine room includes a high voltage generating element(70) having an electrode element(60) mounted with a predetermined distance from the condenser and utilizing the electrode element and the condenser as two electrodes for forming corona wind between the condenser and the electrode element.
Patent KR-19990072585-A (KR)
Title: 반도체소자의표면처리방법및장치
IPC: C23F4/00
Filed: 1999-02-11
Abstract: 본 발명은, 플라즈마에칭에 의한 미세패턴의 가공을 행하기 위한 시료의 표면처리장치로서, 진공용기중에 설치되고, 표면처리되는 시료를 올려놓는 시료대와, 플라즈마 생성용 처리가스를 상기 진공용기중에 연속적으로 공급하는 처리가스공급수단과, 상기 진공용기중에 고밀도의 플라즈마를 생성하는 플라즈마생성수단과, 상기 플라즈마생성과는 독립하여 100KHz 이상의 바이어스전압을 상기 시료대에 인가하는 바이어스전원과, 상기 바이어스전원을 100Hz 내지 10KHz의 주파수로 변조하는 펄스주파수제어수단을 구비하며, 상기 시료대에 올려놓여진 시료에 대하여 최소가공치수가 1μm 이하인 표면처리를 행하는 것을 특징으로 한다.
Patent KR-20000060262-A (KR)
Inventor: KIM U HYEON
IPC: G02F1/139
Filed: 1999-03-12
Abstract: PURPOSE: A reflective liquid crystal display device is provided to realize high reflectance and contrast ratio at wide view by constructing a two-sheet one-axis film of an upper layer and a lower layer as a lambda/4 film CONSTITUTION: A reflective liquid crystal display device comprises a lower substrate(100) and an upper substrate which consist of a glass substrate, respectively. After constructing a liquid crystal driving element and an electrode line on the lower glass substrate, a conductive metal acting as a reflective electrode(111) is formed using a pixel electrode. A lower orientation film(113) is formed on the reflective electrode(111). An orientation angle of the lower orientation film(113) is 220, and an orientation angle of an upper orientation film(117) is 130 so as for a twisted angle to become about 90. The lower substrate(100), on which the lower reflective electrode(111) and the lower orientation film(113) are formed, and the upper substrate(121), on which an upper orientation film(117) and an upper transparent electrode(119) are formed, are spaced apart, and a nematic liquid crystal(115) containing left-handed twisted dopant is injected between the lower and upper substrates(100,121). A two-sheet retardation film(123,125) is deposited on the upper substrate(121), and is made so as to have a specific phase difference by extending a high polymer film in one axis.
Patent KR-20000061831-A (KR)
Inventor: MUN MYEONG CHEOL
IPC: B23K9/127
Filed: 1999-03-31
Abstract: PURPOSE: An arc welding torch system using a subsidiary nozzle is provided to enhance productivity and welding quality by stabilizing a welding arc and improving wetting of a fused portion. CONSTITUTION: A discharge position of the mixed gas sprayed via a subsidiary nozzle(28) is controlled. The discharge amount of the mixed gas is controlled by controlling a gas flux controller(25) and a flux supply controller(27). When simply the subsidiary gas or flux is to be sprayed via the subsidiary nozzle, the gas flux controller and the flux supply controller are selectively controlled. Then, protecting gas(CO2) is supplied via an arc welding torch(10) and the selected gas or flux is sprayed via the subsidiary nozzle. An arc(12) is formed and a base material(13) is fused with a consumption welding rod(14) while forming a fused portion(15).
Patent KR-20000066289-A (KR)
Inventor: PARK HEON YONG
IPC: F16K15/00
Filed: 1999-04-15
Abstract: PURPOSE: A mortar pump with a ball shaped check valve is provided to be easily operated with a simple structure and a low cost. CONSTITUTION: On sliding a piston(12) to the right, a lower ball(16) falls down and an upper ball(19) is lifted so a viscous liquid flows into a pump body(10) through a suction pipe(13). On sliding the piston to the left, the lower ball is lifted and the upper ball falls down so the viscous liquid is discharged through a vent pipe(20). For changing the discharge amount of the viscous liquid, a screw bar(23) of an upper ball check(22) is moved down or up to adjust the height of the upper ball.
Patent KR-20000066321-A (KR)
Inventor: LEE CHANG EUN
IPC: H01L21/304
Filed: 1999-04-15
Abstract: PURPOSE: An apparatus for manufacturing a semiconductor device having a chamber equipment is provided to prevent the inside of a loadlock chamber from being contaminated by a migration of remnants including a corrosive gas by having an exhaust unit for exhausting the remnants to the exterior, and to prevent neighboring facilities and other parts from being corroded by controlling an emission of the remnants in carrying the wafer out to the exterior. CONSTITUTION: An apparatus for manufacturing a semiconductor device having a chamber equipment has a process chamber, a loadlock chamber, a transfer chamber and an input/output slit valve. The apparatus comprises an exhaust unit(160) which absorbs a corrosive gas induced from the inside of the transfer chamber into the loadlock chamber through the input/output slit valve, and exhausts the induced corrosive gas to the exterior.
Patent KR-20000074301-A (KR)
Inventor: SON YANG GUK
IPC: D01F6/92
Filed: 1999-05-19
Abstract: PURPOSE: Provided is a process for producing different shrinkage blending polyester filament by using at least two polymer having different shrinking percentages. Different shrinkage blending polyester filament is characterized by having not less than 3.5g/Den. of strength, not less than 15% of dry heat shrinking percentage, not less than 10% of difference between low shrinking part and high shrinking part, and excellent dimensional stability and needed physical property about drawn yarn. CONSTITUTION: Different shrinkage blending polyester filament is obtained by a process containing the steps of: melt-spinning a polymer having large shrinking property and a polymer having small shrinking property through different spinning nozzles in one spinning machine; cooling at not more than 80°C; passing in 100-150°C of a reheating area at not less than 3,500m/min of take-up velocity; and then oiling and air-confounding.
Patent KR-20010002154-A (KR)
Inventor: LEE JONG MIN
IPC: G03B31/06
Filed: 1999-06-11
Abstract: PURPOSE: A camera having a sound output function is provided to allow a desired picture by informing of the time of taking a picture through sound generated from the camera. CONSTITUTION: A camera having a sound output function includes a battery(10), a shutter 2-stage switch(30), a sound output switch(20) connected to the battery and the shutter 2-stage switch and performing an on/off mode of sound output and selecting contents of sound output, a sound playing kit(LSI) for generating and controlling sound when the shutter 2-stage switch is pressed in an on mode of the sound output switch, an amplifier circuit(40) for amplifying the generated sound, and a speaker(SP) for discharging sound amplified by the amplifying circuit. The sound output switch is projected to the outside of the camera.
Patent KR-20010002616-A (KR)
Inventor: DAVE HOGAN
IPC: G03G15/16
Filed: 1999-06-16
Abstract: PURPOSE: A cleaning device of a wet electrophotographic printer and a printer having the same are provided to prevent the degradation and inferiority of print due to pollution of a photosensitive belt and a transfer roller. CONSTITUTION: A cleaning device of a wet electrophotographic printer includes a photosensitive belt pollution removing element(100) installed between a transfer and fixed unit(70) and an electrification unit(30) around a photosensitive belt(10) of the wet electrophotographic printer, and closed to the surface of the photosensitive belt simultaneously with printing operation for removing all kinds of pollution including untransferred toner of the photosensitive belt; a transfer roller pollution removing element(200) installed adjacently to the transfer and fixed unit and closed to a transfer roller(71) simultaneously with printing operating for removing all kinds of pollution including untransferred toner of the transfer roller; and a solvent supplying element(300) constantly supplying each pollution removing element with the solvent enabling each pollution removing element to remove the pollution with dissolving the untransferred toner by containing the solvent.
Patent KR-19990073616-A (KR)
Title: 유아용 턱받이
Filed: 1999-07-30
Abstract: 본 발명은 턱받이에 관한 것으로 더욱 상세하게는, 타액이나 콧물 등의 오물과 음식물을 많이 흘리는 유아들의 가슴 부분에 착용시켜서 유아의 신체나 옷 등을 오물과 흘린 음식물로부터 보호하기 위한 유아용 턱받이에 관한 것이다. 
     이를 위하여 본 발명은, 유아용 턱받이(10)에 있어서, 상기 턱받이(10)의 전면에는 단추(14)나 매직테이프(15) 등의 착탈수단을 이용하여 보조 턱받이(20)를 착탈자유롭게 부착할 수 있도록 구성된 것을 특징으로 한다.
Patent KR-20000017387-A (KR)
Inventor: KYOUDEN SEIJIROU
IPC: H01L21/60
Filed: 1999-08-19
Abstract: PURPOSE: A film carrier tape and method of testing the same are provided to enable a reduction in the number of required measuring terminal by tester used in testing after mounting a semiconductor chip and a detection in short-circuit between lead terminals. CONSTITUTION: The film carrier tape includes a plurality of lead terminals which are respectively disposed on a insulating film(10) and provided with one end thereof connected to a semiconductor chip and another end thereof having electrically selecting pads. The method comprises the steps of: performing a short-circuit test independently for a plurality of lead terminals through the electrically selecting pads of two or more lead terminals which are not adjacent to each other before mounting the semiconductor chip; and simultaneously executing an electrical selection for a plurality of lead terminals through the electrically selecting pads of two or more lead terminals which are not adjacent to each other after mounting the semiconductor chip. Thereby, it is possible to reduce the number of required measuring terminal by tester used in testing after mounting a semiconductor chip and to detect the short-circuit between lead terminals.
Patent KR-20010026497-A (KR)
Title: Charge pump circuit and high voltage generating circuit
Inventor: YOO TAE JIN
IPC: H02M3/07
Filed: 1999-09-07
Abstract: PURPOSE: A charge pump circuit is provided to transfer a voltage by a high voltage gain without voltage drop by controlling a PMOS transistor as a charge pump element using a control voltage swinging from a ground voltage to a drain voltage. CONSTITUTION: A high voltage generating circuit consists of charge pump circuits(20,22,24) connected between an internal voltage terminal(VCC) and a high voltage terminal(VPP). Each of the charge pump circuits(20,22,24) consists of a PMOS transistor(M4), a capacitor(C1/2/3) and a level shifter(LS1/2/3). The level shifter in each charge pump circuit(20,22,24) responds to a control signal(OSC) to generate a control voltage which swings from a ground voltage(VSS) to a voltage of an output terminal. The charge pump circuits(20,24) are supplied with the control signal(OSC), and the charge pump circuit(22) is supplied with an inverted version of the control signal(OSCB)
Patent KR-20010027798-A (KR)
Title: Sign using transparent materials and light-emitting diode.
Inventor: YOON CHANG HAN
IPC: G09F9/33
Filed: 1999-09-11
Abstract: PURPOSE: A display panel using transparent body and luminous diode is provided to exhibit various letters and pictures, and use as materials for an advertising sign, a decoration, or an indirect illuminator etc. CONSTITUTION: A display panel comprises a luminous diode as light source; a frame for containing the luminous diode; a transparent body sculptured with letters and pictures; and a power supply. The luminous diode is installed inside of the frame. When the ray is irradiated toward the transparent body, the letters or pictures sculptured are showed due to a difference of transmissivity to the transparent body. Using the display panel, a sign, a decoration or an indirect illuminator is produced.
Patent KR-20010028996-A (KR)
Inventor: LEE CHANG HO
IPC: H03K17/00
Filed: 1999-09-28
Abstract: PURPOSE: A circuit for dividing a sending clock is provided to prevent the distortion of the oscillating frequency generated in dividing a sending clock and to apply it to a PLL circuit of the exchange system by the simple structure of the circuit. CONSTITUTION: A circuit for dividing a sending clock includes a phase control portion(11), oscillators(22, 33), RF switches(44, 55), a RF connector(66), an amplifier(77). The phase control portion(11) outputs many phase control signals. The oscillators(22, 33) output the radio frequency signal of the appointed band oscillated in the phase according to the phase control signal. The RF switches(44, 55) output the radio frequency signal by switching selectively. The RF connector(66) connects the switching output radio frequency signal. The amplifier(77) amplifies the connected radio frequency signal to the fixed level and outputs it.
Patent KR-20010036126-A (KR)
Inventor: PARK SEONG CHAN
IPC: H04B1/40
Filed: 1999-10-06
Abstract: PURPOSE: An apparatus for blocking electric waves of mobile communication equipment is provided to block automatically the communications service of the mobile communication equipment by mixing an interference signal in the wave signal transmitted and received to/from the mobile communication equipment. CONSTITUTION: A reference frequency generation unit(104) generates a reference frequency to form an RF(Radio Frequency) signal for interference. A noise generation unit(106) generates a predetermined band of noise signal to send to a mixer(108). The mixer(108) generates the mixed signal, which is mixed the reference frequency with the noise signal, to send to a band pass filter(110). The band pass filter(110) extracts a desired band of RF signal from the mixed signal. The extracted RF signal is amplified in an amplifier(114), and transmitted to the air via antenna(116). Then, the range of the extracted RF signal for interference is shorter than that of the mobile communication equipment.
Patent KR-20010036384-A (KR)
Inventor: JUNG HAE YONG
IPC: B23K26/352
Filed: 1999-10-08
Abstract: PURPOSE: A laser welding structure of steel plate is provided to prevent welding defects by the laser welding, increase strength of welding area and decrease reinforcing components by effectively zinc gas, etc. which are generated during the laser welding. CONSTITUTION: The laser welding structure of steel plate is characterized in that a gas exhausting part (14) is formed on a welding area of the steel plate (12) so that gases generated during welding are exhausted in a steel plate which is welded by a laser welding means, wherein the gas exhausting part comprises a joggle surface (14a) formed by pressing altogether the welding area, a wave surface formed by embossing the welding area, a dimple group formed by dimpling the welding area, or a wedge surface formed by crease forming the welding area, and the welded steel plate is galvanized steel iron.
Patent KR-20010036862-A (KR)
Inventor: KIM JAE HYEONG
IPC: F27B21/08
Filed: 1999-10-12
Abstract: PURPOSE: An apparatus and a method are provided to increase sintering productivity by reinforcing quasi-granulation of sintered blending raw materials, and increase productivity and quality by improving air permeability in a bed. CONSTITUTION: The apparatus for reinforcing quasi-granulation of sintered blending raw materials comprises a moisture supplying part supplying moisture of a water line (204) to the first blending mixer (106) through a sprinkle nozzle (207) installed at a first blending mixer (106); a steam supplying part supplying steam of a steam line (215) to the second assembling mixer (107) through a spray nozzle (213) installed at a second assembling mixer (107); and a controlling part (201) controlling operation of the moisture supplying part and the steam supplying part.
Patent KR-20010037045-A (KR)
Inventor: CHOI JU OK
IPC: A47C27/00
Filed: 1999-10-13
Abstract: PURPOSE: A bamboo mat manufacturing method is provided to have a superior aesthetic sense, to simplify the transforming in appearance variously, and to prevent damage to the part attached with an outline member by filling a groove of an outline with silicon. CONSTITUTION: A bamboo mat manufacturing method comprises the steps of; cutting a cylindrical bamboo in width and length as necessary(101); manufacturing cut pieces into rectangular shape, then sterilizing and seasoning(102); adhering many the cut pieces by applying adhesives to be lapped in necessary size(103); cutting the glued pieces in necessary size(104); smoothing one side of the cut-glued pieces to have a manufactured surface(105); adhering several cut-glued pieces temporarily to the un-manufactured surface of the cut-glued pieces using a tack tape(106); coating to form a coating layer on the manufactured surface located by turning over the surface attached with the tape(107); sorting the cut-glued pieces by the color of the coating layer surface and separating the cut-glued pieces from the tack tape(108); arranging the cut-glued pieces by the color of the coating layer surface in bamboo mat shape(109); fastening the coating layer surface with a rap or a tape not to move the arranged cut-glued pieces(110); heating and bonding adhesive fabrics by applying adhesives to the un-manufactured surface by turning over the coating layer surface fastened temporarily with the rap or the tape(111); forming a groove to an outline by removing the rap or the tape fastened to the coating layer surface after turning over the surface attached with the adhesive fabrics(112); and attaching an outline member to the groove(113).
Patent KR-20010038355-A (KR)
Inventor: CHOI DONG GYUN
IPC: H04W76/02
Filed: 1999-10-25
Abstract: PURPOSE: A method for setting up a test call in a mobile system is provided to set up a test call to continue to manage radio environments and system characteristics in a specific base station of a mobile system. CONSTITUTION: A database management part(32), receiving a user's key input signal, stores it in a database of an operator computer or reads data. If data to set up a test call are received, the database management part(32) outputs time/cycle/appointment data to a database management part(22) in a base station controller. A diagnostic interface part(31) checks a resource(33) in the operator computer and sends a signal, depending on a setup request of the resource, to a diagnostic interface part(21) of the base station controller. The database management part(22) of the base station controller, receiving the time/cycle/appointment data from the database management part(32) and announces it to the diagnostic interface part(21). The diagnostic interface part(21) checks each device and the associated resource according to the announcement signal from the database management part(22), generates a setup result and a confirmation signal and informs the diagnostic interface part(31) of them.
Patent KR-20010038367-A (KR)
Inventor: OH SANG GEUN
IPC: H01L21/265
Filed: 1999-10-25
Abstract: PURPOSE: A vacuum apparatus of an ion implanter is provided to prevent a wafer from being contaminated, by controlling serious pressure fluctuation between vacuum lines when a pumping process starts to decrease the pressure of a load lock. CONSTITUTION: An arbitrary process is performed regarding a wafer in a process chamber(10). A load lock is connected to the process chamber. A vacuum pump(40) is connected to the load lock chamber through a vacuum line. A valve is installed in the vacuum line. A valve for low speed pumping is additionally installed in the vacuum line.