baber/WOPTO huggingface dataset:
Patent KR-20010090387-A (KR)
Title: optical pick up device and method for fabricating the same
Inventor: LEE YEONG JU
IPC: G11B7/22
Filed: 2000-03-25
Abstract: PURPOSE: An optical pickup device and a manufacturing method thereof are provided to optimize a focus of an input beam incident on a solid immersion lens and simplify an assembling process. CONSTITUTION: A pre-focus lens(1) focuses a laser beam necessary for recording/playing optical information on a surface of a solid immersion lens(4) generating a near field beam. A pre-focus lens frame(2) is precisely processed through a micro-machining technology and fixes the pre-focus lens(1). A focusing actuator(3) controls an upward and downward motion of the pre-focus lens. The solid immersion lens(4) generates the near field beam. A solid immersion lens frame(5) fixes the solid immersion lens. A tapered edge and ABS(7) provide a hydrodynamic buoyancy and thus maintains the near field void. If a voltage is applied to the focusing actuator(3), the focusing actuator(3) is upwardly and downwardly moved by piezoelectric effect, so as to drive the pre-focus lens(1). A laser beam passing through the pre-focus lens(1) is optimally focused on the solid immersion lens.
Patent KR-20010100264-A (KR)
Title: 고압 가스 용기 유출구의 밀폐 장치
Filed: 2000-04-04
Abstract: 본 발명은 유출구가 마련된 고압 가스 용기 선단의 내면에 접착되는 내부 테이프와, 상기 용기 선단의 외면에 접착되어 유출구를 밀폐하고 유출구에서 내부 테이프와 접착되는 외부 테이프로 이루어지는 고압 가스 용기 유출구의 밀폐 장치에 관한 것으로서, 상기 고압 가스 용기 선단의 내면에는 통기성 재질로 이루어져 용기 내부의 가스가 배출되며 상기 내부 테이프를 지지하는 지지판이 부착되고, 상기 유출구에서의 상기 내부 테이프와 상기 외부 테이프의 접착에 의해, 상기 외부 테이프의 제거시, 상기 내부 테이프가 상기 유출구의 둘레에서 절개됨으로써 상기 유출구가 개방되는 것을 특징으로 한다.
Patent KR-20000049623-A (KR)
Inventor: KIM SANG KYUN
IPC: A61B3/14
Filed: 2000-04-18
Abstract: PURPOSE: An apparatus for photographing an iris is provided to check a health state of a person by photographing an iris of the person. CONSTITUTION: An apparatus for photographing an iris of a person comprises a chair(1), a section(2) connected to the chair(1), for connecting a face of the person, a section(3) for checking an eye of the person, a computer(5) which is installed on a side of the section(3) for checking the eye of the person. The section(2) for connecting the face of the person comprises a brow regulating device(21), an iris photographing device(2), a jaw regulating device(23), and a light source(61,64). The section(3) for checking the eye of the person comprises a diaphragm(32), and a lens(33) for a microscope.
Patent KR-20000049743-A (KR)
Inventor: MIN KEON DONG
IPC: A63B5/20
Filed: 2000-04-26
Abstract: PURPOSE: A specified rope skipping equipment is provided, which may be broadly used as one of convenient sporting equipment, to give the effects of excellent health care and vigor enhancement, as well as offer the doubling for an exercise effect by imparting various colors and luminosity of rope used to any users. CONSTITUTION: A rope skipping is represented schematically in general view 1. Referring to fig 1, there are many characteristic features in the rope skipping. As indicated above, the rope skipping has various means entraining multiple functions. A counter means for a quantity of motion allows indicating the number of skipping of users on a crystal liquid indicator for the used to be counted. A measurement means for consuming calories shows the indication of the quantity of motion on the indicator calculated in accordance with input data and program.
Patent KR-20010097891-A (KR)
Inventor: NA HO YOUL
IPC: A01K93/00
Filed: 2000-04-26
Abstract: 본 발명은 낚시용찌에 관한것으로 보다 구체적으로는 막대찌의 찌톱에 승하강이 가능케 유동찌를 장치하여 부력의 조절이 쉽고 어신을 예민하게 탐지할수 있게 한 것으로 하단에 몸통이 형성되고 몸통의 상부에 찌톱(2)이 형성되는 낚시용찌에 있어서 중심부에 통공(301)을 가진 유동찌(3)를 형성하여 유동찌(3)를 찌톱(2)에 끼워서 승,하강 작동되게 하고 찌톱(2)의 상부에 멈춤링(5)을 끼워서 형성한 구조로 되며 부력을 조절하기 위하여 찌를 입수시키면 유동찌(3)는 부력에 의하여 찌톱(2)의 상단으로 이동하여 멈춤링(5)에 걸려서 그 위치가 고정되며 찌의 부력을 유동찌(3)의 상단이 수면에 위치하게 부력을 조절하여 고기가 미끼를 물고 상승하게 되면 유동찌(3)는 수면에 위치한 상태로 찌톱(2)만이 상승하게 됨으로 유동찌 (3)의 무게가 찌톱(2)에 가하지 않게 되므로 찌톱의 상승폭이 크고 기밀하며 빠르게 이루어지게 되어 어신을 쉽게 감지할 수 있는 것이다.
Patent KR-20000054012-A (KR)
Inventor: SIM GYU JIN
IPC: B29C69/00
Filed: 2000-05-17
Abstract: PURPOSE: An automobile door belt molding and a method of manufacturing door belt molding are provided to achieve an improved productivity and reduced cost while simplifying a manufacturing process. CONSTITUTION: A method comprises a press finishing steps(111,112) where a panel is cut into a regular length through a blank cutting work and the cut panel is formed into C-shaped clip through a banding work; an insert injection molding step(120) where the frame which is C-shaped through the press finishing steps(111,112) is inserted so as to form a guide chamber(12) having a plurality of ribs, a coating portion(14) for protect a door frame from damage and a rear sealing portion(15) for sealing the rear opening of the frame(11); and a final step(130) where the rib of the guide chamber(12) is sprayed and adhered with a fine fabric so as to form a carpet portion(13) for removing water and dirt upon ascending and descending operation of the window.
Patent KR-20010105097-A (KR)
Inventor: AHN YEONG SIN
IPC: A01K97/10
Filed: 2000-05-19
Abstract: 본 발명은 낚시대 받침목에 관한 것으로, 특히 전,후면케이스 내부에 상하 회전하는 한쌍의 고정클립을 장치한 후, 이 고정클립 사이에 낚시대를 올려 놓으면 낚시대 하중에 의해 고정클립 양단부가 상측으로 회전하면서 낚시대 외주면과 밀착 고정되게 하고, 야간 낚시 때에는 고정클립의 범위내에 낚시대를 올려 놓기만 하면 낚시대가 안쪽으로 안내되어 간편하게 고정되게 하며, 고정된 상태에서는 물고기가 낚시대를 끌고 가는 것을 방지할 수 있도록 한 것이다.
Patent KR-20010106709-A (KR)
Inventor: HWANG GEO YEON
IPC: H04B1/40
Filed: 2000-05-23
Abstract: 본 발명은 현대인들에게 필수품화되어 있는 이동전화기에 교통카드, 신용카드, 직불카드, 선불카드등 소지한 하나 이상의 카드기능을 내장시켜 통합된 지불이 이루어질 수 있도록 하는 이동전화기를 이용한 지불시스템에 관한 것으로, 본 발명은 지불수단인 카드의 정보를 조회하여 비용을 결제처리하기 위한 카드조회및결제수단과, 상기 다수의 카드조회및결제수단으로부터 조회및결제요구를 해당 금융기관에서 처리하도록 하고 그 처리결과를 다시 상기 카드조회및결제수단으로 인가하는 카드관리서버로 이루어진 지불시스템에 있어서, 이동통신망을 통해 음성신호 및 데이타가 실린 무선반송파를 송수신하여 음성신호 및 데이타를 입출력시키는 무선송수신부와, 인터페이스부와, 신용카드, 직불카드, 선불카드등 종류와 관계없이 사용자가 소지한 모든 카드의 정보를 저장하고 필요에 따라 선택된 카드의 정보를 출력하고 상기 인터페이스부를 통해 데이타를 입력받아 카드정보를 갱신하는 카드정보저장부와, 상기 카드정보저장부로/로부터 데이타를 입출력하기 위한 접속부와, 상기 접속부를 통해 연결된 외부기기로부터의 요구신호를 체크하여 카드정보저장부내의 해당 카드정보를 출력시키고 무선송수신부로부터 출력되는 데이타를 인터페이스부를 통해 카드정보저장부에 전달하여 카드정보가 갱신될 수 있도록 제어하는 제어부를 구비한 이동전화기를 포함하여, 상기 이동전화기와 카드조회및지불수단을 소정 케이블을 통해 연결하면 이동전화기의 카드정보가 카드조회및지불수단으로 인가되어 카드조회및지불이 이루어지도록 한다.
Patent KR-20010107063-A (KR)
Inventor: KIM SEOK HUN
IPC: F24F13/00
Filed: 2000-05-25
Abstract: 본 발명은 난방이나 냉방을 위하여 벽체에 부착되어 사용되는 방향각도가변 에어 토출구를 개시한다. 
     본 발명은 한번의 조작으로 공조 공기의 토출 방향과 각도를 임의 조절할수 있도록 함과 아울러 그 구조가 간결하여 고장의 우려가 전무한  공조 공기 토출 방향 및 각도 가변기능을 갖도록 하기 위하여 천정이나 벽체에 설치되는 에어 덕트의 선단에 고정되는 토출구에 있어서, 구상 결합구조로 된 노즐을 활용하여 누구나 쉽게 공조 공기의 토출 방향,각도를 임의 조절하여 편리하게 사용할수 있도록 한 것이다.
Patent KR-20010107286-A (KR)
Title: 냉장고의 워터 디스펜서
Inventor: CHA GANG UK
IPC: F25C1/22
Filed: 2000-05-26
Abstract: 본 발명은 냉장고의 워터 디스펜서에 있어서, 사용자가 상기 워터 디스펜서를 이용하여 편리하게 용기에 물을 급수 받을 수 있도록 작동수단을 개선한 것에 관한 것이다. 
     이를 위해, 본 발명은 소정의 급수공간이 형성된 캐비티(cavity)와, 상기 캐비티 상부에 형성된 급수배출구와, 상기 급수배출구에 연결된 급수저장조와, 상기 캐비티와 상기 급수저장조 사이에 위치하여 급수저장조의 물을 흡입하여 급수배출구로 공급하는 펌프와, 상기 캐비티의 하부 일측에 위치하여 승강 가능한 가동로드와, 상기 가동로드의 승강에 따라 상기 펌프에 공급되는 전원을 선택적으로 온오프 시키는 접점부가 구비된 냉장고의 워터 디스펜서가 제공된다.
Patent KR-20000058512-A (KR)
Inventor: KIM JONG YEOL
Filed: 2000-06-08
Abstract: PURPOSE: An advertising system using a motion picture mail with auto-return function and advertising method using the same are provided to increase advertising effects of a site linked by forming a streaming motion picture and transmitting the motion picture with a mail to allow the motion picture to be automatically delivered to the linked site when a user confirms the mail. CONSTITUTION: In a motion picture mail advertising system, a mail server(100) of a business proprietor selects a user whom an electronic mail is sent and transmits a streaming motion picture mail for advertisement to the user. A user mail server(200) receives the streaming motion picture mail form the mail server of the business proprietor and sends the mail to the computer of a user. A FTP server(500) storing streaming motion pictures for FTP transfers data to allow a computer(300) of a user who uses low-speed Internet to download the streaming motion picture when the user confirms mails. A streaming server(600) storing streaming motion picture files transfers data to allow a computer(400) of a user using high-speed Internet to read the streaming motion picture in real time when the user confirms mails. When an advertising banner is clicked or reproduction of motion picture is finished, the motion picture is transferred to a site linked to maximize advertising effects.
Patent KR-20000054697-A (KR)
Title: Toe pressure implement and its manufacturing method
Inventor: SONG YOUNG JIN
IPC: A61H39/04
Filed: 2000-06-19
Abstract: PURPOSE: A method of manufacturing toe pressure massager and such pressure massager are provided to correct backbone while allowing toes to be pressure-massaged for each step and eliminate offensive odor caused by sweat at a foot while constituting the massage by a material producing far infrared ray. CONSTITUTION: A pressure massager(2) comprises a plurality of toe insertion portions(4a,4b,4c,4d,4e) for insertion of five toes, respectively, a toe supporting portion(6) for supporting the inserted toes, a plurality of separating portions(10a,10b,10c,10d) connected to the supporting portion and which separate each toe not to contact with each other, and a plurality of stoppers(12a,12b,12c,12d) positioned at upper portions of the separating portions so as to prevent the inserted toes from being escaped from the insertion portions. The toe supporting portion has at a bottom surface thereof a plurality of protrusions extended downward from the bottom surface. If a person walks wearing the pressure massager at his/her toes, massage action is produced by a pressing action of the protrusions and movement of the toe supporting portion and separating portions.
Patent KR-20020000405-A (KR)
Title: gas extraction apparatus in transformer insulation oil
Inventor: AHN SE MYEONG
IPC: G01N1/22
Filed: 2000-06-24
Abstract: PURPOSE: A gas extracting apparatus from insulating oil of a transformer is provided to extract gas from insulating oil by forming vacuum evenly with a vacuum pump, and to prevent mercury from flowing into oil by separating a collecting part from an extracting part. CONSTITUTION: A gas extracting device is composed of a vacuum gauge(4) checking a vacuum state; a glass filter(5) mounted in an extracting part to extract the maximum gas by maximizing the surface area of insulating oil; a transparent cylindrical acryl sight pipe(6) inspecting the state of insulating oil in the extracting part; a cylindrical steel pipe(7) protecting the sight pipe; and a vacuum ball valve(8) forming and keeping vacuum. Vacuum is formed with a vacuum pump(3) to improve vacuum in the extracting part and a collecting part(2). Gas is extracted from insulating oil before analyzing gas to check wrong operation of an inlet transformer or an inlet reactor. Reliability is improved with extracting gas in vacuum, and mercury is prevented from flowing into oil by separating the extracting part from the collecting part completely.
Patent KR-20020001171-A (KR)
Title: Method of fabricating sram
Inventor: CHOI GUK SEON
IPC: H01L21/8244
Filed: 2000-06-26
Abstract: PURPOSE: A method for manufacturing a static-random-access-memory(SRAM) is provided to prevent a poly 1 pattern from being exposed by misalignment of an exposure mask, by forming a nitride layer on the poly 1 pattern and by forming a sidewall oxide layer functioning as a spacer on the side part of the poly 1 pattern. CONSTITUTION: A gate oxide layer(12), the first polysilicon layer and a nitride layer(14) are sequentially evaporated on a semiconductor substrate(11). The nitride layer and the first polysilicon layer are patterned to form the poly 1 pattern(13a) functioning as a gate. An oxidation is performed to form a sacrificial oxide layer in the exposed gate oxide layer portion. The sidewall oxide layer(16) functioning as a spacer is formed on the side part of the exposed poly1 pattern. Impurity ions of a predetermined conductivity type are implanted into the substrate between the poly 1 patterns to form a source/drain region(17) of a lightly-doped-drain(LDD) structure. An interlayer dielectric(18) of an oxide layer material is formed. A photoresist layer pattern confining a poly 2 contact formation region is formed on the interlayer dielectric. The interlayer dielectric, the sacrificial layer and the gate oxide layer are etched to form a poly 2 contact by using the photoresist layer pattern. The photoresist layer pattern is removed. A ground voltage line composed of a polysilicon layer(21) and a tungsten silicide layer(22) is formed in the poly 2 contact.
Patent KR-20020001982-A (KR)
Title: Device for sealing the coke oven door
Inventor: PARK HYEONG GI
IPC: C10B41/00
Filed: 2000-06-29
Abstract: PURPOSE: A device for sealing coke oven door is provided to originally block gases generated during dry distillation from being leaked to the outside by increasing sealing efficiency of the door of the coke oven. CONSTITUTION: In a coke manufacturing device of an ordinary coke oven in which red hot coke is manufactured by heating coal loaded in the internal space of the coke oven for a certain period of time after sealing the coke oven by closing an oven door to the insertion space of an oven frame(110) which is mounted on front and rear surfaces of the coke oven, the device for sealing coke oven door is characterized in that a rectangular groove(10) forming the carrying space through the left and right flange parts is formed on the front surface of the oven frame(110), a compression plate(20) the separation of which is prevented by fixed protrusions(23) of the flange parts is mounted onto the carrying space of the rectangular groove(10) in the state that springs(21) are interposed between the rectangular groove(10) and the compression plate(20), and a pressing plate(30) on which a pressing protrusion(31) pressing a sealing member(22) of the compression plate(20) and the left and right contact protrusions(32,33) surface contacted to the flange part are formed is bolt linked to both sides of the outer wall of the oven door.
Patent KR-20020002921-A (KR)
Inventor: LEE SEUNG HYEOK
IPC: H01L27/10
Filed: 2000-06-30
Abstract: PURPOSE: A landing plug formation method of a semiconductor device is provided to improve a process margin and a reliability of a device by forming a landing plug contact in linear type. CONSTITUTION: An active area(31) is defined by locating to have any of distance each other in an ellipse type having a long axis and a short axis. A plurality of gate lines(33) is formed crossing the active area in direction of the short axis. A landing plug contact layer of a linear type is formed in order to cross the gate lines and to locate at an area between the active areas. A bit line(34) stacked between pads is formed in a twisted linear type so that a portion of the bit line is connected to a bit line contact layer(35).
Patent KR-20010112026-A (KR)
Title: 소형 힌지장치
IPC: H04M1/03
Filed: 2000-07-04
Abstract: 본 발명은 축이나 케이스체의 회전시에 소음을 발생시키거나 마모되거나 또는 윤활유를 외부로 누출시키지 아니한 뿐만 아니라, 조작성이 좋고 구조가 간단하며 특히 휴대용 전화기나 노트북 컴퓨터 등의 소형전자기기에 적용하기에 적합한 소형 힌지장치를 제공한다. 
     상대적으로 회전하는 제1부재와 제2부재를 연결하는 것에 있어서, 상기 어느 일방의 부재에 취부되는 회전방지수단부 케이스체와, 그 케이스체 내부에 설치된 고정캠부와, 일단부측을 상기 고정캠부의 축심방향과 상기 케이스체의 축심방향을 관통하여 그 케이스체에 계지시킨 축과, 그 축의 타단부측에 설치된 타방의 부재에 취부되는 계지체와, 그 고정캠부에 대향하여 그 축에 회전을 구속시키면서 그 축의 축방향으로 미끄럼운동가능하게 취부된 캠슬라이더와, 그 캠슬라이더 및 상기 계지체사이에 탄성적으로 설치된 압축스프링과, 상기 축의 케이스체와의 계합부에 설치된 슬라이더 와셔와로 구성된 것을 특징으로 한다.
Patent KR-20010049769-A (KR)
Inventor: KIKUCHI TSUTOMU
IPC: F17D1/04
Filed: 2000-07-12
Abstract: PURPOSE: To substitute the gas in a gas system efficiently in a short time by providing a back pressure control unit and flow control units on a gas feed passage or a gas discharge passage, and operating them in the prescribed procedures in a gas feeding device for selectively feeding a plurality of gases. CONSTITUTION: This gas feeding device selectively feeds a plurality of high- purity gases to an analyzer 10. For gas substitution, a selector valve 15 is switched to feed the gas, e.g. hydrogen, from a gas source 12 in place of the gas, e.g. nitrogen, from a gas source 11, then flow control units 16, 18 are fixed to set values to flow the gas. The set value of a back pressure control unit is fluctuated between a low pressure and a high pressure, and the pressure set value is switched after the pressure in a system reaches the set value. The set value of the back pressure control unit 20 is returned to a standard value after pressure fluctuating actions are finished, then the flow set values of the flow control units 16, 18 are increased and held for the prescribed time, then the gas substitution in the gas system is completed.
Patent KR-20020011615-A (KR)
Title: A display conversion apparatus of automatical adjustment type for preventing eye strain
Inventor: KANG BYOUNG HO
IPC: G06F3/14
Filed: 2000-08-03
Abstract: PURPOSE: A device for converting an adaptive type screen for protecting against an eyeball fatigue is provided to enhance a working productivity and to promote a health and to decrease a medical cost by minimizing a visual stimulus of a user in using an operating system, a game, and Internet information. CONSTITUTION: A user interface unit(1) makes a user input personal ophthalmology related information and display environment information and transmits the information to an operating system converting unit(7), a game converting unit(9), and an Internet converting unit(13), and stores a user's profile as a binary file form. The operating system converting unit(7) transforms a display profile for reducing an eyeball fatigue and modifies the entire screen color of a display. The game converting unit(9) reduces an eyeball fatigue by converting the entire screen color of a game and a color of a specific object in the game using user information being inputted from the user interface unit(1) and a pre-analyzed and stored game color profile. An Internet converting unit(13) obtains Internet information in a main internal memory and calculates a visual fatigue rate for watching the corresponding Internet information based on user information being inputted from the user interface unit(1) and display profile information and corrects the initially inputted Internet information. An electron gun voltage control unit(18) controls a voltage being applied to an electron gun of a display(19) based on the operating system converting unit(7), the game converting unit(9), a converted display profile(15) being inputted from the Internet converting unit(13), and a web browser(17).
Patent KR-20000072133-A (KR)
Inventor: JIN KYUNG SIN
IPC: A63F7/06
Filed: 2000-08-04
Abstract: PURPOSE: A robot playing soccer, kicking a ball with moving, being capable of playing with a variety of technique by changing the shape of a foot variously, and being controlled well by making the shape of a ball polygonal, is provided. CONSTITUTION: A robot playing soccer is characterized by: two wheels moving by a motor(7), controlled separately and a ball bearing(4) for quick and effective rotation; a leg(2) fixed with an axis(6), moving by the motor(7); and a polygonal ball.
Patent KR-20020011717-A (KR)
Title: Hydraulic cylinder for operating a crane grab
Inventor: CHOI HAK BEOM
IPC: B66C3/00
Filed: 2000-08-04
Abstract: PURPOSE: A hydraulic cylinder for operating a gripper of a crane grab is provided to prevent a cylinder rod of a hydraulic cylinder and a connection part of a rod end from being cracked when a plurality of grippers are operated. CONSTITUTION: A hydraulic cylinder for operating grippers of the crane grab includes a rod end(132) having a connection hole(132a) connected to a body of a grapple by a pin, a cylinder rod drawn into or out of a cylinder(131) when the rod end is rotated, a hydraulic hose(134) for providing hydraulic fluid into the cylinder, and a connection part(135) formed round between the rod end and the cylinder rod so as to effectively disperse stress applied to the connection part when the gripper is moved vertically. The rode end having the connection hole is formed integrally at a side end of the cylinder rod.
Patent KR-20020017502-A (KR)
Title: Linkage structure of driving link and dependant link using Bush
Inventor: KIM JEONG HO
IPC: B60S1/06
Filed: 2000-08-30
Abstract: PURPOSE: Connection structure of a driving link and a driven link by using a bush is provided to prevent a bush from being displaced by covering a ball, and to improve endurance of wipers by preventing inflow of dust. CONSTITUTION: Bushes(10a,10b) are combined with a driving link(11), and a fitting sill(21) of the bush is inserted to a recessed groove(22) of a driven link(12). A bush rotation preventive fitting protrusion(25) of the bush is combined with an installation groove(23) of the driven link by turning bushes, and bushes are combined with a ball(13). A grease groove is formed between bushes and the ball, and bushes are manufactured with injection-molding. The ball of the driving link is inserted between bushes, and a convex groove(20) is combined with the recessed groove of the bush. Lubrication is improved with injecting grease to the grease groove, and the driving link is combined with the bushes by surrounding the ball with the bushes. The ball is prevented from being separated from bushes, and inflow of dust is prevented.
Patent KR-20020017684-A (KR)
Title: Method For Conversion of Keyword Address to URL and Access to Wireless Web Sites
Inventor: KANG HUI SEUNG
IPC: G06F17/00
Filed: 2000-08-31
Abstract: PURPOSE: A Hangul keyword address conversion and web site access method is provided to write a Hangul keyword in an input window, to automatically convert the Hangul keyword into a corresponding English URL address, and then to connect to a corresponding web site over the wireless internet. CONSTITUTION: The method comprises steps of inputting a Hangul keyword for accessing a web site via a web browser embedded in a wireless internet terminal, and transmitting the Hangul keyword to an address process and proxy server via a WAP gateway over a wireless network(S10,S11), making the address process and proxy server to seek a real URL corresponding to the Hangul keyword(S12,S13), and making the address process and proxy server access the corresponding wireless web site, download a web page, and transmit the web page to the wireless internet terminal via the WAP gateway(S14-S17). In a case that the web page of the web site, the user wanting to access, is stored at a local cache of the proxy server, the web page is transmitted to the terminal, otherwise the web page is downloaded directly from the web site and then transmitted to the terminal.
Patent KR-20020017768-A (KR)
Title: Overlay testing method
Inventor: HYUN YUN SEOK
IPC: H01L21/66
Filed: 2000-08-31
Abstract: PURPOSE: A method for measuring an overlay is to provide an excellent image state, by capturing images regarding the first and second main scales in X and Y directions and in different focusing, and by capturing an image of a vernier in a focusing different from those of the main scales. CONSTITUTION: A pair of the first main scales(10) and a pair of the second main scales(20) having a step are symmetrically disposed in X and Y directions of a structure of a semiconductor substrate to form an outer box. An upper layer(22) of which the surface is planarized is formed on the structure having the outer box. The vernier(30) of an inner box type for measuring the overlay is formed on the upper layer corresponding to the outer box region. An interlayer overlay is measured by an image focusing process using an overlay mark regarding the vernier and the first and second main scales.