baber/WOPTO huggingface dataset:
Patent JP-2005180559-A (JP)
Title: Power transmission device
Inventor: SAKAMOTO HIROYASU
IPC: F16F15/12
Filed: 2003-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a power transmission device, securing durability of an elastic member.  <P>SOLUTION: This power transmission device includes: a drive side rotating member rotated on receiving the rotary driving force from a driving source; a driven side rotating member connected to a rotating shaft of a driven side device; and a power transmitting member for transmitting the rotation of the drive side rotating member to the driven side rotating member. The power transmitting part is composed of a cylindrical spring member, one end of which is connected to the driven side rotating member, the other end being connected to the drive side rotating member, and which is deformed in the radial direction by the rotary driving force of the drive side rotating member, and the elastic member disposed in the deforming direction of the spring member.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005178834-A (JP)
Title: Cushioning material for packaging
Inventor: INOUE HIROSHI
IPC: B65D81/07
Filed: 2003-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide a cushioning material for packaging which protects even a fragile product, prevents a product from being fouled, or chips of an internal cushioning material or dust from adhering, and can be recycled when becoming unnecessary, and is friendly to the environment.  <P>SOLUTION: For this cushioning material 1 for packaging, in a bag 2 made of a polyethylene film, a corrugated board is placed from the upper opening section 2a as the internal cushioning material 3. In this case, the corrugated board has a size of an approximate fullness of the bag 2, and with fine cuts running over the total surface in the longitudinal direction under an integrally connected state, and are alternately corrugated. Then, the upper opening section 2a is heat-sealed with air filling the bag 2 at a degree by which the bag 2 is slightly expanded to seal the cushioning material 1 for packaging.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005178209-A (JP)
Title: Thermal transfer sheet
Inventor: FUKUI DAISUKE
IPC: B41M5/382
Filed: 2003-12-19
Abstract: <P>PROBLEM TO BE SOLVED: To provide a thermal transfer sheet which uses a one-pack type coating liquid using an ordinary solvent without using a special solvent having a problem on manufacturing and on working environment, has no need for heat treatment such as aging, has excellent heat resistance and slipping properties, prevents defects on printing caused by wrinkles, tailing or the like on printing from being generated, and provides a back face layer.  <P>SOLUTION: The thermal transfer sheet has a constitution wherein the back face layer can be coated with a one-pack state coating using the ordinary solvent, and a transfer ink layer to be melted or sublimated by heating is provided on one face of a base film, and the back face layer is provided on the other face of the base film. The back face layer uses a mixture of a polyamideimide resin with a Tg of ≥200°C measured by a differential thermal analysis and a polyamideimide silicone resin with a Tg of ≥200°C measured by the same method as a binder, and furthermore comprises a mixture of a polyvalent metal salt of an alkyl phosphoric acid and a metal salt of an alkyl carboxylic acid, a silicone or fluorine-containing resin particle and an inorganic filler.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005178893-A (JP)
Title: Binding tape
Inventor: KATAHIRA MITSUHIKO
IPC: B65D63/10
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a binding tape whose base material is cut easily in a widthwise direction with one finger of one hand.  <P>SOLUTION: This relates to a binding tape having an adhesive layer on one face of a synthetic resin tape base material. Slits 2 in a predetermined length are arranged intermittently at predetermined intervals along the longitudinal direction at the center in the width direction of the base material 1. When the tape receives stretching force in the longitudinal direction, the slits 2 do not break, however when the slits receive force trying to open the slits toward both sides of the tape, the tape is easily torn from both ends of the slits.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005190671-A (JP)
Title: Dc breaker
Inventor: NIWA YOSHIMITSU
IPC: H01H33/59
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To easily check a DC circuit breaker even when a DC circuit is supplied with electric power.  <P>SOLUTION: The two DC circuit breakers 3 and 22 each composed by serially connecting a main circuit breaker 12 and an auxiliary circuit breaker 13 to a DC circuit and by connecting a commutation circuit 18 in parallel with each main circuit breaker 12 are connected in parallel with each other between a power line 1 of a feeder circuit for an electric railroad and a feeder wire 5; the other-side DC circuit breaker 22 is closed with one-side DC circuit breaker 3 closed to shunt a carried current of the power line 1 to the two DC circuit breakers 3 and 22; thereafter the main circuit breaker 12 of the DC circuit breaker 3 is opened to attenuate the shunted current; and when the shunted current reaches a zero point, the auxiliary circuit breaker 13 is opened.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005191615-A (JP)
Title: Receiver
Inventor: MASAKI OSAMU
IPC: H04N5/46
Filed: 2003-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a receiver capable of receiving a broadcast signal adopting a different broadcast system and quickly displaying a video image of a channel after switching.  <P>SOLUTION: When a viewer instructs channel switching, a microcomputer 3 instructs a channel selection circuit 5 receptible of a broadcast channel adopting a different broadcast system to switch a reception channel, increases the AGC sensitivity of an AGC circuit 10, reads a vertical frequency with respect to the switching reception channel from a memory 4, and switches the vertical frequency of a vertical drive circuit 7 to the read vertical frequency. The microcomputer 3 decreases the AGC sensitivity of the AGC circuit 10 after a lapse of a prescribed time set depending on the presence of a difference between the vertical frequency of the channel having been received before switching of the reception channel and the vertical frequency of the reception channel after the switching.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005185182-A (JP)
Title: METHOD FOR PRODUCING alpha-1,3-GLUCOOLIGOSACCHARIDE, THE RESULTING alpha-1,3-GLUCOOLIGOSACCHARIDE, AND PREPARATION COMPOSITION CONTAINING THE SAME
Inventor: KIKAWA HIROMITSU
IPC: C07H3/06
Filed: 2003-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for efficiently producing an α-1,3-glucooligosaccharide composed entirely of α-1,3-glucoside linkages, as a kind of oligosaccharides with 3-O-α-D-glucopyranosyl-D-glucose as the constituent unit and that are being given attention as immunopotentiating substances or QOL(quality of life)-improving agents, to obtain the α-1,3-glucooligosaccharide by this method, and to obtain a preparation composition containing the same.  <P>SOLUTION: The α-1,3-glucooligosaccharide composed entirely of α-1,3-glucoside linkages each with a polymerization degree of 2-4 is obtained by subjecting a mutanase having hydrolytic activity of endo-type on α-1,3-glucan to hydrolyze mutan to act on the mutan, i.e. α-1,3-glucan as a substrate.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004536817-A (JP)
Title: ４′−置換ヌクレオシド
IPC: A61K31/7076
Filed: 2002-06-07
Abstract: 本発明は、式（Ｉ）〔式中、Ｂは、式（Ｂ１）の９−プリニル残基（Ｂ１）又は式（Ｂ２）の１−ピリミジル残基（Ｂ２）（式中、記号は、明細書中と同義である）を意味する〕のヌクレオシド誘導体、及び薬学的に許容しうるその塩の、Ｃ型肝炎ウイルス（ＨＣＶ）が介在する疾患の治療のための使用、このような治療用の医薬の製造のための使用、並びにこのような化合物を含む医薬組成物に関する。
Patent JP-2004535672-A (JP)
Title: プラズマ処理におけるマイクロジェットによる低エネルギーイオン発生および輸送のための方法および装置
IPC: H01J37/32
Filed: 2002-07-12
Abstract: 【課題】半導体ウエハのプラズマ処理で使用する低エネルギーイオンの発生および輸送方法および装置を提供すること。 【解決手段】ガス種からプラズマを発生させてプラズマ排出流を生成し、処理室16に導入する。プラズマ排出流中のイオン含量は、補助イオン源74を作動させることによって増大され、それによってプラズマ排出流中に一次プラズマ放電が形成される。次いで、一次プラズマ放電はバッフル板アセンブリー54に送出され、プラズマがバッフル板アセンブリー54から流出する時に二次プラズマ放電が形成される。一次プラズマ放電により発生しかつ二次プラズマ放電中に含まれるイオンに作用する電界の強度は低減され、それによってイオンは、ウエハ18上に形成された半導体デバイスに損傷を与えない低エネルギーでウエハ18に衝突する。 【選択図】図１
Patent JP-2004536341-A (JP)
Title: 画像キャプチャデバイスに光学的に結合されたレンズシステム
IPC: G02B13/00
Filed: 2002-07-22
Abstract: 【課題】簡単、安価で耐久性のあるマルチエレメントレンズシステムを提供する。 【解決手段】本発明のレンズシステムは、ガラス半球（２０５）の平らな面に接着されたガラス微小球（１０５）を含む。好ましいレンズシステムにおいて、ガラス半球（２０５）の厚さは、微小球（１０５）の表面に対して接線方向である透過された光について画像面を形成するように選択される。したがってこのようなレンズシステムで製造されたディジタルカメラにおいて、ガラス微小球（１０５）はディジタル画像キャプチャデバイス（１１０）に直接に取り付けられえる。これら好ましいレンズシステムはフォーカス調整を必要とせず、広い視野を必要とする応用例に適する。 【選択図】図３
Patent JP-2005521274-A (JP)
Title: ブロック誤差拡散ハーフトーン化を使用した印刷画像への情報埋め込みシステム
IPC: H04N1/387
Filed: 2002-08-13
Abstract: 入力画像（１０４）に情報（１２０）を埋め込むシステムおよび方法は、入力画像の特定のタイプのピクセルブロックを利用して、入力画像に情報を選択的に埋め込む。この情報は、特定のタイプのピクセルブロックを、事前に定義されたドット形状ブロック（２００、２０２、２０４、２０６、２０８、２１０、２１２、２１４）と取り替えることにより、入力画像に埋め込まれる。この事前に定義されたドット形状ブロックは、埋め込まれる情報を表す。一実施の形態では、特定のタイプのピクセルブロックは、少数派のピクセルブロックである。この少数派のピクセルブロックは、画像の背景と対照をなすピクセルを過半数含む。少数派のピクセルブロックを使用することにより、埋め込み情報は、最終画像（１０６）で認識されにくくなる。一実施の形態では、誤差拡散が、ピクセルブロック単位で実行され、それによって埋め込み情報を有する最終画像は高品質となり、レーザプリンタでの印刷により適したものとなる。
Patent JP-2005506898-A (JP)
IPC: B01J20/28
Filed: 2002-06-07
Abstract: An adsorbent article having a base body or matrix onto which is applied an adsorptive coating. The body or matrix can be a honeycomb matrix or structure having a plurality of cells defining a plurality of passages extending through the body. The adsorptive coating comprises an adsorptive media, such as activated carbon or ion exchange resin, that is bound by a polymeric adhesive or resin. The adsorbent article has a minimal pressure loss therethrough.
Patent JP-2005519141-A (JP)
IPC: B01J19/18
Filed: 2002-11-11
Abstract: The invention relates to a method for producing high-molecular weight polyesters, such as e.g. polyethylene terephthalate (PET), polybutylene terephthalate (PBT), polynaphthalene terephthalate (PEN), polytrimethylene terephthalate (PTT) and/or polyesters of other dicarboxylic acids and diols including copolymers thereof. The invention relates likewise to a device for implementing this method. The latter concerns a single-stage tower reactor with which a method, comprising only two reactors, is made available for the total process.
Patent JP-2005510530-A (JP)
Title: サッカライド及び疎水性シリカを含有する組成物
IPC: A01N65/12
Filed: 2002-11-20
Abstract: 粒状組成物は、水可溶性サッカライド：４０〜８０重量％、８０〜３００ｍ ２ ／ｇの範囲の表面積を有する微細粒状アモルファス疎水性シリカ：１．５〜１０重量％、及び水を含む。前記組成物は、水可溶性サッカライドの水溶液の微細粒子の形態であり、前記水溶液の微細粒子の表面は、微細粒状アモルファス疎水性シリカのコーティングで被覆されている。前記組成物は、１以上の殺菌性活性物質をさらに含有してもよく、害虫の処理のために従来のダストアプリケーター装置を通して適用され得る。
Patent JP-2005511932-A (JP)
IPC: E05B1/00
Filed: 2002-12-11
Abstract: The presence sensor (1) is designed to detect the presence of a user at the level of an interface equipment (7), in particular that of the door handle of an automobile vehicle. The sensor (1) is of capacitive type and comprises a control module (2), a measuring electrode (3) and a reference electrode (4), designed for electromagnetic coupling. <??>At least one of the electrodes (3,4) is in the form of a flexible metallic wire so to allow a direct positioning at the level of the interface equipment (7) whatever its profile. The metallic wire is in an electrical insulator sheathing. The handle comprises a gripping part which is mobile with respect to the door and designed so to be actuated by the user, and a fixed part (7b) positioned on the door; at least one of the electrodes (3,4) of the sensor (1) is laid out on the fixed part (7b). The handle also comprises the means for maintaining and guiding (8) the metallic wires forming the electrodes (3,4), in the form of grooves with insulator sheathing which are implemented by molding in the manufacturing of handle. The control module (2) comprises electronic components (2a) and printed circuit board (2b), and is positioned on the fixed part (7b) of the handle.
Patent JP-2005512759-A (JP)
Title: 屈折性レーザー外科手術用装置及び工程
IPC: A61F9/007
Filed: 2003-01-09
Abstract: 本発明には標的対象物についての屈折性レーザー外科手術にふさわしい装置及び工程が含まれる。レーザー・ビーム源（３）を利用して、ｆｓ−インパルス・レーザー・ビームを発生させる。第二レーザー・ビーム源（４）からＵＶレーザー・ビームを発生させる。共通走査装置（１３）では該標的対象物を走査するために該ｆｓ−インパルス・レーザー・ビーム及びＵＶレーザー・ビームを利用する。
Patent JP-2005518869-A (JP)
Title: 女性患者の骨盤器官脱出症処置のための方法および装置
IPC: A61F2/04
Filed: 2003-02-28
Abstract: 女性患者内にある膀胱瘤の処置のために適用される前移植組織（１０）はその移植組織を患者の膀胱と膣の間に患者の弓形腱帯骨盤と独立して支持するために横方向に突出した安定化用ストラップ（４２、４４）を備えている。直腸瘤および子宮瘤の補修は単一の後移植組織（５０）を使用して遂行可能であり、この後移植組織は、前移植組織と同様に、移植組織を患者の直腸と膣の間に支持するための横方向に突出した安定化用ストラップ（６８、７０）を備えている。
Patent JP-2005527708-A (JP)
Title: 水性布用および織物用塗料または処理
IPC: D06M13/513
Filed: 2003-03-06
Abstract: 布用塗料として有用な新規の水性ビニルコポリマー分散体、または織物製品の性能特性を向上する処理が開示されている。上記組成物は、内部可塑化および架橋性を特徴とする骨格構造中に少なくとも１つの二重結合を有する、ビニルモノマー、ビニルシランおよびヒドロキシ脂肪酸エステル化合物を含有する。
Patent JP-2005521313-A (JP)
Title: 有機電界効果トランジスタを含む論理構成要素
IPC: H03K3/03
Filed: 2003-03-14
Abstract: 【課題】有機電界効果トランジスタからなる論理構成要素の提供 【解決手段】本発明は、従来のｐ型ＭＯＳ技術を用いながら、有機電界効果トランジスタをベースとする高速論理ゲートを製造することを初めて可能にするものである。これは主に、極薄の半導体層を有するＯＦＥＴにおける早期飽和効果、ならびに有機論理構成要素として特定の性質を有するＯＦＥＴを用いたこと、およびこれらの論理構成要素を含む回路の新規の構成によるものである。
Patent JP-2005522176-A (JP)
IPC: H02K41/035
Filed: 2003-04-02
Abstract: Disclosed is a linear actuator, controllable as a spring, having a field assembly and a coil assembly positioned for interaction with and movement relative to the field assembly. The field assembly has a soft magnetic housing having an axis, axially magnetized cylindrical magnets and soft magnetic pole pieces which form a stack of alternating cylindrical magnets and pole pieces positioned along the axis. The coil assembly includes a coil base having coil cavities, coils supported in the coil cavity, and an axially magnetized permanent magnet positioned on the coil base so that the axially magnetized permanent magnet is positioned to travel along the axis of the soft magnetic housing. A repulsion force is generated between the coil assembly and the field assembly when the coil assembly is de-energized, and the repulsion force is modified when the coil assembly is energized.
Patent JP-2005192703-A (JP)
Title: Quilt
Inventor: ONO YOSHIHIKO
IPC: A47G9/02
Filed: 2004-01-05
Abstract: <P>PROBLEM TO BE SOLVED: To solve the problem that a conventional quilt made of wadded-down or wadded-cotton is sewn by a material covered with a very fine cloth and damaged in permeability and keeps a wadded-down cloth basically down-proofed or the like, resulting in closing and not exhibiting the touch inherent in the wad.  <P>SOLUTION: The quilt has a bag cloth consisting of a surface cloth and a back cloth and packed with the wad comprising wadded-cotton, down, cotton, animal hair, a not-specified fiber and a synthetic fiber. The cloth of the quilt is formed by a knitted material made of a material excellent in permeability, rich in stretchability and fine in the touch and handling.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005192791-A (JP)
Title: Endoscopic apparatus
Inventor: KANEKO KUNIKIYO
IPC: H04N5/225
Filed: 2004-01-07
Abstract: <P>PROBLEM TO BE SOLVED: To provide an apparatus for intensively emitting light in photographing a static image without reducing the life of a discharge lamp .  <P>SOLUTION: The endoscopic apparatus comprises a light source device for irradiating an observation surface with light, and a control device for driving the light source device. In a first period for photographing the static image, the light source device is driven by the control device so that the light source device is in an intensified light emitting state in which observation surface is irradiated with stronger luminous energy than in a normal light emitting state. In a second period just after the first period, the light source device is driven so that the light source device is in a feeble light emitting state in which the observation surface is irradiated with weaker luminous energy than in the normal light emitting state. A first quantity of energy necessary as comparing the intensified light emitting state and the normal light emitting state is not more than a second quantity of energy unnecessary as comparing the feeble light emitting state and the normal light emitting state.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005195933-A (JP)
Title: Magenta toner and two-component developer for magenta
Inventor: IIDA HAGUMU
IPC: G03G9/087
Filed: 2004-01-08
Abstract: <P>PROBLEM TO BE SOLVED: To provide a toner superior in fixability, also having proper coloring power, color mixing properties, development performance, durability and environmental stability, and which is capable of stably forming images superior in transfer efficiency and gradation, and satisfying high definition.  <P>SOLUTION: In a magenta toner containing at least a binder resin, a colorant comprising a quinacridone pigment and a wax, the wax concentration of an extract, obtained by dispersing the toner at 23°C in n-hexane at a density of 15 mg/cm<SP>3</SP>and carrying out extraction for 1 min is within a range of 0.08-0.50 mg/cm<SP>3</SP>.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005203918-A (JP)
Title: Apparatus for displaying after-image simulation by pixel response delay
Inventor: NOMURA MAKOTO
IPC: H04N17/00
Filed: 2004-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To simulate reproduction of an after-image due to pixel response delay, in a display apparatus adopting a liquid crystal system and a plasma system or the like, which has pixel response delays.  <P>SOLUTION: The after-image is generated by applying weighted averaging to luminance / color difference signals of adjacent frame or field images.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005202189-A (JP)
Title: Electronic musical instrument
Inventor: FURUHASHI TOMOHIRO
IPC: G10H3/00
Filed: 2004-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To provide an electronic musical instrument which is constituted into a thin type in the horizontal direction, and has stability and superior acoustic characteristics.  <P>SOLUTION: In the electronic musical instrument, front legs 2 and 2 are attached, in the neighborhood of a side plate 13 of a musical instrument body 1; speaker boxes 3 and 3 holding a speaker for generating a musical sound are arranged on the rear lower part of the musical instrument body 1; the lower ends of the speaker boxes 3 and 3 are extended down to a floor face GL; and made as the speaker boxes 3 and 3 rear legs. The musical instrument body 1 is supported with the speaker boxes 3 and 3 and the front legs 2 and 2 and is provided with a pedal 8 in the lower inside of a front plate 41 between the speaker boxes 3 and 3, provided with an electric circuit 10 in the inside of the front plate 41 and mounts a transformer 102 on a horizontal plate bridging member 42.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005208787-A (JP)
Title: Semiconductor device
Inventor: TASE TAKASHI
IPC: G06K19/07
Filed: 2004-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To manufacture a wireless IC tag having excellent mechanical reliability at low cost.  <P>SOLUTION: This wireless IC tag has a wire connected to an electrode provided on the surface of a semiconductor chip, and is inserted into a cylindrical and flexible covering tube, and is heated and sealed.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005204550-A (JP)
Title: Method for screening substance for ameliorating sebum metabolism
Inventor: NISHIJIMA SATOMI
IPC: A61P3/06
Filed: 2004-01-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for screening a sebum metabolism ameliorant and/or insulin-resistant ameliorant having no adverse effect such as TG (triglyceride) synthesis sthenia and/or effect different from that of existing synthetic LXR (liver X receptor) agonist by controlling the action of LXR transcription coupling factor.  <P>SOLUTION: LXR transcription coupling factors clone6, LXRM and EAR-2 are identified by a yeast two hybrid system and it is found that these factors control transcription of ABCA1 and/or SREBP1c playing an important role in lipid metabolism and sugar metabolism. A lipid metabolism and/or a sugar metabolism ameliorant having no adverse effect such as TG synthetic sthenia and/or effect different from that of existing synthetic LXR agonist is screened by controlling activity and expression of clone6, LXRM or EAR-2 or interaction with LXR.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005208436-A (JP)
Title: Vehicle indicator device and its drive method
Inventor: UMEZAWA SACHIRO
IPC: G02B27/01
Filed: 2004-01-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a vehicle indicator which can be made visible in a short time, even if its reflector means is closed, and to provide its drive method.  <P>SOLUTION: This vehicle indicator device and its drive method, using a reflector means 10 to reflect the light which is emitted by the indicator supported closably. The device automatically tilts the reflector means 10 at a 1st speed, or tilts at a 2nd speed which is slower than the 1st speed, based on the adjuster switch K2 made to operate by the user.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2005216500-A (JP)
Title: Hydrogen generator
Inventor: KONAKAWA KATSUZO
IPC: C01B3/38
Filed: 2004-01-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a hydrogen generator in which temperature elevation of a CO conversion part and a CO removing part is prevented and deterioration of a catalyst is prevented when stopping operation, and in which temperature of a reforming part is reduced in a short time and operational response is made better to make the system efficient.  <P>SOLUTION: By the constitution in which the reforming part 1, the CO conversion part 6, the CO removing part 7, and a fuel cell 8 are sequentially connected, and in which a transportation means 13 and a heat-exchanger 14 are installed in a bypass tube 12 to connect the exit of the CO removing part 7 and the reforming part 1, and because a reforming gas of which temperature is made lower is made to flow in the bypass tube 12 by the transportation means 13 and circulated in the reforming part 1 in a purge when the operation is stopped, temperature of the reforming part 1 can be reduced in a short time, the system is made better in operational response, and it can be made more efficient.  <P>COPYRIGHT: (C)2005,JPO&NCIPI
Patent JP-2004140408-A (JP)
Title: Plasma treatment equipment and plasma treatment method
Inventor: KANAI SABURO
IPC: H01L21/3065
Filed: 2004-01-29
Abstract: <P>PROBLEM TO BE SOLVED: To provide a plasma treatment method which prevents the inner surface of a treatment room from deteriorating or becoming a source of heavy-metal contamination and stabilizes properties of plasma treatment with time.  <P>SOLUTION: This plasma treatment equipment has a plasma generator of an external-energy-supplied electric discharge system, a treatment room, a device which supplies a material gas to the treatment room, a sample stage which holds a sample in the treatment room, and a device which evacuates the treatment room of air. The treatment room is equipped with an external cylinder which withstands depressurization, an internal cylinder which is made of a nonmagnetic material and is positioned inside the external cylinder with a clearance from it, and a temperature control/keeping means which keeps the internal cylinder at a desired temperature via the external cylinder.  <P>COPYRIGHT: (C)2004,JPO