baber/WOPTO huggingface dataset:
Patent KR-20080019562-A (KR)
Title: Load port device
Inventor: NATSUME MITSUO
IPC: H01L21/68
Filed: 2007-08-27
Abstract: A load port apparatus is provided to increase the operation rate of a manufacturing apparatus and to improve the efficiency of a wafer treatment process and productivity of wafers by forming a buffer stage just under a table. A wafer carrier(30) for receiving a wafer is temporarily stored in a stock yard. A mounting plate(1) is fixed on a wall arranged between the stock yard and a process treatment apparatus for processing the wafer. A wafer transfer window(2) is installed on the wall. A carrier stage(C) includes a table and a carrier plate(11). The table is horizontally extended from an edge of a lower end of the wafer transfer window. The carrier plate is arranged on the table to support the wafer carrier. The carrier plate is operated to transfer the wafer carrier for the process treatment apparatus. A buffer stage(B) includes a buffer plate(21). The buffer plate is horizontally arranged beneath the table to temporarily store the wafer carrier.
Patent KR-20090021970-A (KR)
Title: Coating apparatus
Inventor: KO YOUNG MIN
IPC: H01L21/027
Filed: 2007-08-29
Abstract: A coating apparatus is provided to reduce a processing time and to improve productivity by performing a coating process by using other coating unit when one coating unit is bead-treated or replaced. A coating apparatus includes a support member(100), a first coating unit(200), and a second coating unit(300). The support member supports a substrate(10) to be coated with the photoresist solution. The first and second coating units are detachably adhered to a support plate. The first coating unit includes a first nozzle unit(210) and a first cleaning unit(220). The second coating unit includes a second nozzle unit(310) and a second cleaning unit(320). The first nozzle unit includes a slit nozzle(211) discharging the photoresist solution, first and second driving units(212,213) to move the slit nozzle horizontally, and a feed line(214) to provide the photoresist solution to the silt nozzle. The first and second driving units move along first and second guide rails(120,130) and moves the slit nozzle in the upper part of the substrate horizontally. The slit nozzle sprays the photoresist solution to the upper part of the substrate uniformly.
Patent KR-20090022412-A (KR)
Title: A obstacle sensing system for train and a derailment sensing system for train and a system having theire
Inventor: KIM BONG TAEK
IPC: B61L23/04
Filed: 2007-08-30
Abstract: An obstacle sensing system for train capable of sensing obstacle adjacent to rail, a derailment sensing system for train, and a system including the same are provided to prevent accidents of a train by sensing obstacle and derailment of the train on a real time. An obstacle and derailment sensing system for a train comprises an obstacle sensing unit(100), a derailment sensing unit(200), and a control unit. The obstacle sensing unit is installed in a power car of a train(900), senses an obstacle adjacent to rails(801, 802), and includes a rotating bar(150) and at least one obstacle sensor(110, 120, 130, 140). The rotating bar is installed in a front side of the train into a width direction, and is rotated by the obstacle. The obstacle sensor senses a rotation state of the rotating bar. The derailment sensing unit senses derailment of the train. The control unit determines the obstacle and the derailment of the train by analyzing signals of the obstacle sensing unit and the derailment sensing unit.
Patent KR-20090025518-A (KR)
Title: Method of etching a wafer
Inventor: GU JA BUNG
IPC: H01L21/3065
Filed: 2007-09-06
Abstract: A method for etching a wafer is provided to prevent a footing phenomenon and an etching stop phenomenon by repeating a deposition process, a cleaning process, and an etching process. A mask pattern(200) to expose a part of a wafer is formed on an upper surface of a wafer(100). The polymer is deposited on the wafer and the mask pattern. The polymer and the wafer are etched. The remaining gas and the etching by-product are cleaned on the wafer. The polymer deposition, the etching, the cleaning are repeated.
Patent KR-20080025009-A (KR)
Title: Ultrasonic transducer driving circuit and ultrasonic diagnostic apparatus
Inventor: AMEMIYA SHINICHI
IPC: A61B8/00
Filed: 2007-09-13
Abstract: An ultrasonic transducer driving circuit and an ultrasonic diagnostic apparatus are provided to reduce the size of a driver circuit in comparison with an active ground clamp circuit since the driver circuit is a logic circuit in which little current flows. An ultrasonic transducer driving circuit(10) includes a positive FET(Field Effect Transistor)(11P), a negative FET(11N), a positive driver circuit(12P), and a negative driver circuit(12N). The positive FET outputs positive voltage to an output line(W) of an ultrasonic transducer(E) in an on state. The negative FET outputs negative voltage to the output line of the ultrasonic transducer in an on state. The positive driver circuit drives the positive FET on the basis of a positive pulse signal(PP), a negative pulse signal(PN), and a positive threshold(THP) transmitted from a pulser unit, and return voltage(Vo) returned from the output line. The negative driver circuit drives the negative FET on the basis of the positive pulse signal, the negative pulse signal, a negative threshold(THN), and the return voltage.
Patent KR-20090028881-A (KR)
Title: Calm capable of searching agent service through web, agent system using the same and operation method of agent system
Inventor: SHIN DONG RYEOL
IPC: G06F17/30
Filed: 2007-09-17
Abstract: A calm which the search of the agent service is possible through the web, an agent system using the calm and an operation method of the agent system are provided to contact a client to the CALM-based DF(Directory Facilitator) through the web server. A communication module(121) attempts connection with the web client and the application of web-based DF(120). A registry(125) stores the agent service. A service search module(123) searches the service required by the web client from the registry. If the service required by the web client does not exist, the service search module searches the agent service required by the web client among agent services stored in a knowledge base(119), and stores the searched agent service in the registry. The web-based DB has a calling module(124). The calling module provides the agent service searched by the service search module to the web client through the communication module.
Patent KR-20090028960-A (KR)
Title: Preparation method of salted mackerel treated by using unripe peach extracts and chitosan
Inventor: KIM IL DOO
IPC: A23L17/00
Filed: 2007-09-17
Abstract: A preparation method of salted mackerel treated by using unripe peach extracts is provided to improve the quality of mackerels, to remove fishy smell, and to extend available period. A preparation method of salted mackerel treated by using unripe peach extracts comprises the steps of (i) processing mackerels; (ii) washing the mackerels in micro type microbubble processing water; (iii) naturally dehydrating and drying the surface; (iv) dipping the mackerels in salty unripe peach extracts; (v) dipping the mackerels in chitosan solution having chitosan concentration of 1% for 5-30 minutes, and preserving the mackerels with salt; (vi) removing the moisture of the mackerels artificially, drying them in a natural state and aging them naturally; and (vi) rapidly freezing, vacuum packaging and storing the mackerels.
Patent KR-20090030899-A (KR)
Title: Laundry machine
Inventor: CHOI CHUL JIN
IPC: D06F39/08
Filed: 2007-09-21
Abstract: A washing machine is provided to prevent an inflow of water into a drum although the water is overly supplied to a steam generator or water-supply error is generated. A washing machine includes a drum, a steam generator(200), a water-supply flow path, a steam flow path, a valve(282), and a sensor(283). The drum loads clothes. The steam generator generates steam. The water-supply flow path is connected to the steam generator. The steam flow path is connected to the steam generator. The valve is installed in the steam path, and blocks water overflowed from the steam generator. The sensor senses amount of water supplied through the water-supply flow path. The valve is controlled according to amount of water supplied to the steam generator. The sensor includes an impeller and a sensing unit. The impeller is rotated according to a flow of water. The sensing unit senses the number of rotations of the impeller.
Patent KR-20080067560-A (KR)
Title: A cloth doll head and a method for making the same
Inventor: KIM KAP YEON
IPC: A63H3/44
Filed: 2007-10-02
Abstract: A method for manufacturing the head of a cloth-filled doll is provided to create natural-looking scalp coverage with sewn or embroidered facial features and hair sewn onto a soft cloth scalp. To manufacture the head of a cloth-filled doll, synthetic hair is prepared by cutting hair fibers to an appropriate length. Next, the hair is separated into hair bundles which are then sewn and glued into a linear hair portion. The linear hair portion is arranged on a cylindrical roller and curled by heating. At the same time or thereafter, fabric scalp portions are cut and sewn forming side pieces, a top piece, a back piece, and a crown. Then, the linear hair portion is sewn in concentric rings onto the scalp portion. At the same time or thereafter, a fabric face plate is cut and embroidered to create colorful and distinctive facial features. Cloth head portions on both sides are then cut according to a given pattern and an assembled face portion is formed by sewing the head portions to the face plate to give form and smoothness to the side and chin portions of the face plate. The assembled face portion is sewn to the scalp portion and turned right-side-out to form the fully assembled head of the cloth doll.
Patent KR-20090038624-A (KR)
Title: Method for fabricating a barrier metal layer
Inventor: PARK KYUNG MIN
IPC: H01L21/28
Filed: 2007-10-16
Abstract: A method for forming a barrier metal film is provided to form a copper seed film and a barrier metal film by performing a thermal process about a magnetic forming film formed by a copper mixture including metal material. An etching stop film(204) and a second interlayer insulation film(206) are successively deposited on a top of a first interlayer insulation film(200) including a bottom copper wiring(202). A magnetic forming film is formed with a copper compound including metal material on a surface of a contact hole by selectively removing the etching stop film and the second interlayer insulation film. The magnetic forming film is removed from a bottom surface of the contact hole by performing an etching and cleaning process. A barrier metal film(212) and a copper seed film(214) are formed by performing a thermal process about the magnetic forming film. The contact hole is completely filled by using the copper seed film. A top copper wiring is formed by removing the barrier metal film and a copper layer formed on a top of the second interlayer insulation film.
Patent KR-20090040134-A (KR)
Inventor: JO KI SANG
IPC: B60Q1/24
Filed: 2007-10-19
Abstract: 차량의 보조등 장치가 제공된다. 본 발명은 소정의 LED로 이루어지고, 사이드 미러의 저면에 위치하여 빛을 발광시키기 위한 발광부, 상기 발광부의 음극단에 연결되어 있으며, 도어의 개폐에 따라 상기 발광부를 구동시키기 위한 제1구동부, 상기 발광부의 음극단에 연결되어 있으며, 방향지시등의 점멸에 따라 상기 발광부를 구동시키기 위한 제2구동부를 포함한다. 본 발명에 의하면 사이드 미러의 저면에 보조등 장치에서 발광부의 음극단을 두 개의 경로로 분리함으로써, 2가지 기능과 연계하여 구동되도록 하는 효과가 있다. 
       
     보조등, 사이드 미러, 백 미러, 도어, LED, 점멸, 방향, 램프.
Patent KR-20090041626-A (KR)
Title: Automatic insuring system using electronic card and method thereof
Inventor: KANG WOL JU
IPC: G06Q40/08
Filed: 2007-10-24
Abstract: An insurance starting system and a method thereof using an electronic card for developing an insurance gift certificate capable of distributing and managing insurance initiation and cancellation are provided to initiate or terminate the insurance when a holder of an insurance electronic card is seceded from a specific region. An insurance electronic card(10) stores insurance information in a magnetic stripe or an IC chip. An insurance electronic card recognizer reads the information of the insurance electronic card. An insurance electronic card identification unit transmits the information that the insurance electronic card holder is out of the specific region to wire/wireless communications network. An insurance electronic card management server(30) receives information that the insurance electronic card holder is out of the specific region. An insurance electronic card management server manages settlement the insurance bill through a settlement management part(36).
Patent KR-20090042002-A (KR)
Title: Portable analyzing apparatus based on pcr
Inventor: KIM SUNG WOO
IPC: G01N33/48
Filed: 2007-10-25
Abstract: A portable analyzing apparatus based on PCR is provided to remarkably improve the PCR speed, to be portable and to be focused efficiently without the loss of fluorescence. A portable analyzing apparatus based on PCR comprises a sample treatment unit which performs the biochemical reaction by using the injected sample; thin film type thermoelement(404) including terminals provided with the variable power, which is thermally arranged with the sample treatment unit; and a controller providing the necessary temperature for the biochemical reaction to the sample treatment unit by precisely controlling the temperature of a sample treatment unit.
Patent KR-20090048035-A (KR)
Inventor: KIM SANG CHEOL
IPC: H01L29/78
Filed: 2007-11-09
Abstract: 본 발명에 따른 탄화규소 수직접합형 전계효과 트랜지스터 장치는, 불순물의 농도가 1E18 ~ 1E19cm -3  범위의 제1도전형 탄화규소 기판과; 상기 제1도전형 탄화규소 기판의 상면에 형성되는 5E15 ~ 5E16cm -3  범위의 제2도전형 탄화규소 제1에피박막층과; 상기 제1도전형 탄화규소 제1에피박막층의 표면에 이온주입을 통해 형성되고, 불순물의 농도가 5E17 ~ 5E18cm -3  범위이며 이온주입깊이가 0.2 ~ 0.5㎛ 범위의 제2도전형 게이트 및 제2도전형 매몰 게이트와; 상기 제1도전형 탄화규소 제1에피박막층 상부에 형성되는 제1도전형 탄화규소 제2에피박막층과; 상기 제1도전형 탄화규소 제2에피박막층 상면에 불순물의 농도가 1E19 ~ 1E20cm -3  범위로 이온주입되어 표면부터 0.15 ~ 0.25㎛ 깊이로 형성되는 제1도전형 소오스와; 상기 게이트와 소오스가 전기적으로 절연되도록 형성된 절연산화막과; 상기 게이트 및 소오스 상면에 상기 절연산화막과 절연되며, 니켈과 금이 순차적으로 증착되어 형성된 게이트 및 소오스 전극과; 상기 제1도전형 탄화규소 기판 하면에 형성되며, 니켈과 금이 순차적으로 증착되어 형성된 드레인 전극;을 포함하여 구성되는 것을 특징으로 하는 탄화규소 수직접합형 전계효과 트랜지스터 장치를 기술적 요지로 한다. 이에 따라 게이트와 매몰게이트 사이에 형성된 채널 폭을 게이트 전압의 변화로 제어할 수 있어 노말리-오프(normally-off) 특성을 얻을 수 있으며, 노말리-오 프(normally-off) 특성을 얻기 위해 게이트 사이의 간격을 미세 패턴시킬 필요가 없어 공정이 편리하며, alignment 공정시 단차가 없으므로 단차로 인한 alignment 오차를 줄일 수 있는 효과가 있다. 
       
     반도체 탄화규소 수직접합형 전계효과트랜지스터 SiC VJFET Normally-off
Patent KR-20090048902-A (KR)
Inventor: OH SE WOOK
IPC: A01C1/08
Filed: 2007-11-12
Abstract: 본 발명은 새싹채소 씨앗 불림액에 관한 것으로 보다 상세하게는 새싹채소 씨앗 불림액에 있어서, 천연살균제 또는 천연항균제가 포함되는 새싹채소 씨앗 불림액에 관한 것이다. 
     본 발명은 미생물적으로 안전한 새싹 채소를 재배하기 위한 씨앗 불림액 제공을 목적으로 한다. 
     새싹채소, 씨앗, 불림액
Patent KR-20090051301-A (KR)
Title: 자동차 정지 에너지 제동 방법
Inventor: JEONG JONG SEONG
IPC: B60T1/00
Filed: 2007-11-19
Abstract: 본 발명은 자동차가 운행 중 급제동 했을 때 제동거리를 짧게 하기 위한 제동 방법에 관한 것으로 "정지된 물체를 힘을 가하면 힘의 방향으로 가속 하지만, 동시에 동일한 힘을 역 방향으로 가하면, 힘은 축적 되고 물체는 정지한다."는 운동 법칙에 근거를 두고 있다. 물체가 가속을 했다면 가속 에너지는 운동 에너지고, 축적 에너지는 위치 에너지다. 물체의 운동 방향이 상공이면 중력 위치 에너지로, 스프링을 밀게 되면, 스프링 위치 에너지로 축적되고 평면상 을 이동하면 마찰력으로 운동 에너지는 소멸한다. 이와 같이 에너지를 축적 하거나 소멸하기 위해서는 이동 거리가 필요하다. 이것을 공식으로 표기하면, 
        이다. 
     운행 중 자동차의 제동 거리는 사고 위험과 비례 한다. 
     자동차 ABS 는 제동시 바퀴의 슬립률 20％ 를 유지 하므로 약 20％ 제동 성능의 개선 효과가 있다. 그러나 제동거리( x )를 속도( v )와 시간( t )으로 변환하면, 제동거리 대신 자동차의 속도에 따라, 제동력을 가해주기 때문에 거의 정지한 채로 운동 에너지가 소멸 한다. 이것이 자동차 정지 에너지 제동 방법이고 , 정지거리가 짧기 때문에 사고 위험이 낮아진다. 이 방법을 공식으로 표기 하면, 
        이다. 
     정지 에너지란 운동하는 물체가 정지함으로 발생되는 에너지를 말한다. 
     
     ①자동차 ②정지에너지 ③운동 에너지 ④위치 에너지 ⑤제동력 ⑥중력 ⑦스프링 장력 ⑧거리(x) ⑨시간(t) ⑩속도(v)
Patent KR-20090066548-A (KR)
Title: An internal electrode structure and photocapacitor containing the internal electrode
Inventor: SHIN KYOUNG HEE
IPC: H01G9/20
Filed: 2007-12-20
Abstract: An internal electrode structure for optical capacitor and an optical capacitor including an internal electrode thereof are provided to reduce a resistance of an internal electrode for transmitting electrons of an electrical storage unit by coating noble metal particles on both sides of a comparatively inexpensive metal film having high electric conductivity. Noble metal coating layers(51, 52) are coated on both sides of a metal film of an internal electrode(3). The metal film of the internal electrode is formed with one selected from stainless steel, titanium, aluminum, and copper. An optical electrode(1) and a counter electrode(2) are positioned at a left side and a right side of the internal electrode, respectively. A gap between the optical electrode and the internal electrode is filled with an oxidation-reduction electrolyte. The gap between the optical electrode and the internal electrode is filled with a capacitor electrolyte.
Patent KR-20090070411-A (KR)
Title: A contact plug of cmos image sensor and method for fabricating the same
Inventor: LEE SANG GI
IPC: H01L27/146
Filed: 2007-12-27
Abstract: A contact plug o a CMOS image sensor and a fabricating method thereof are provided to prevent over etch by forming a liner insulating layer and a PE-TEOS layer in a pixel region. A semiconductor substrate(200) includes a pixel region and a peripheral region. A gate electrode pattern(208) is formed on an active region of the pixel region and the peripheral region. A buffer oxide layer(210) and a spacer(214) are successively formed in a sidewall of the gate electrode pattern. A source/drain region(216) is formed on the active region exposed by the spacer. A protective layer protects the gate electrode pattern and the spacer of the pixel region. The silicide(224) is formed in the source/drain region and the gate electrode pattern of the peripheral region.
Patent KR-20070035031-A (KR)
IPC: E02F3/627
Filed: 2005-06-06
Abstract: A device for couplng a loader to a tractor, wherein the hitching frame (1) of the loader is provided with two coupling projections (11, 12) or sockets (21, 22) and a latch (14) biased by a spring (15), the coupling head (2) of the tractor is provided with two complementary coupling members and locking means (25, 25'), and said latch (14) engages said locking means (25, 25') to lock the load onto the tractor. Said device is characterised in that the coupling head (2) includes pre-locking means (24, 24') engageable by said latch (14) in a pre-locking position in which said projections (11, 12) and sockets (21, 22) are not fully coupled, and the spring (15) continually urges said latch (14) into the locking or pre-locking position.
Patent KR-20070031447-A (KR)
IPC: B01J35/02
Filed: 2005-08-11
Abstract: 미립자 분체에서 질량변동의 큰 요인인 흡착수분의 변동이 감소된 고순도 초미세 이산화티탄을 제공한다. 10~ 200m 2 /g의 BET 비표면적을 갖는 미립자 이산화티탄에 있어서, 2~ 5g의 이산화티탄 분말을 지름 10cm의 유리제 페트리디쉬에 균일한 두께로 스프레드하고, 20℃, 상대습도 80%의 환경에서 5시간 동안 정치하는 경우, 정치 후 질량변화율은 -5질량%~5질량%이다. 미립자 이산화티탄의 제조방법은 사염화티탄 함유 가스를 산화성 가스로 고온산화시켜 이산화티탄 분말을 제조하는 제1단계와, 가열로에서 분말을 롤링하면서 이산화티탄 분말을 수증기와 접촉시킴으로써 탈염소화를 행하고 동시에 흡착수를 증가시키는 제2단계를 포함한다.
Patent KR-20070043868-A (KR)
Inventor: FOLKMAN JUDAH M
IPC: C12Q1/00
Filed: 2005-04-22
Abstract: 본 발명은 면역학 및 생화학 분야에 관한 것이다.  구체적으로, 본 발명은 전신 혈관형성 활성에서 관련된 변화를 갖는 임상적 병태, 구체적으로 암, 염증 병태, 감염 및 임신과 유산과 관련된 병태의 조기 검출을 위한 방법, 장치 및 키트를 기술한다.
Patent KR-20070120083-A (KR)
Title: Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holder
Inventor: WEBER JUERGEN
IPC: C03C3/062
Filed: 2006-03-30
Abstract: An ideal quartz glass for a wafer holder for application in an etching environment is characterised both by high purity and also a high dry etching resistance. According to the invention, such a quartz glass may be achieved, whereby the quartz glass is doped with nitrogen, at least in a region near the surface, has an average content of metastable hydroxy groups of less than 30 wt. ppm, the fictive temperature is less than 1250 °C and the viscosity at a temperature of 1200 °C is at least 1013 dPas. A commercial method for production of such a quartz glass comprises the following method steps: fusion of a SiO2 raw material to give a quartz glass blank, whereby the SiO2 raw material or the quartz glass blank is subjected to a dehydration process, heating of the SiO2 raw material or the quartz glass blank to a nitriding temperature in the range between 1050 °C and 1850 °C under an atmosphere containing ammonia, a temperature treatment, by means of which the quartz glass of the quartz glass blank is brought to a fictive temperature of 1250 °C or less and a surface treatment of the quartz glass blank to give the quartz glass holder.
Patent KR-20070055578-A (KR)
Inventor: OGURA HIROSHI
IPC: B81B7/00
Filed: 2005-08-15
Abstract: 마이크로머신 디바이스는, 불순물을 도핑한 폴리실리콘으로 이루어지는 패드(107a) 및 패드(107b)를 구비한다. 
       
     마이크로머신 디바이스, 박막가공, 전극구조, 불순물 도핑 폴리실리콘, 기생용량의 억제
Patent KR-20070057908-A (KR)
Title: Stretch mark treatment with botulinum toxin
Inventor: FIRST ERIC R
IPC: A61P17/02
Filed: 2005-08-24
Abstract: Methods for treating stretch marks by local administration of a Clostridial toxin, such as a botulinum toxin, to a patient with a stretch mark.
Patent KR-20070062990-A (KR)
Title: Method for production of formed aluminium metal parts with decorative surface
Inventor: HOTZ WALTER
IPC: B05D7/14
Filed: 2004-09-08
Abstract: The invention relates to a method for producing weather- and corrosion-resistant shaped sheets consisting of aluminium or an aluminium alloy with a decorative finish in a coil coating process that comprises the following sequential steps: an aluminium strip or aluminium alloy strip is provided; optional continuous degreasing of the strip; optional electrochemical, chemical or mechanical burnishing of the optionally degreased strip; the optionally degreased and/or burnished strip is continuously pre-treated to create a pre-treated layer that is suitable for use as an adhesive base for a paint layer; the optionally degreased strip is continuously pre-treated to create a strip surface that is suitable for use as an adhesive base for a paint layer; the pre-treated strip is continuously painted with a sol-gel paint consisting of a polysiloxane to create a first protective layer; the first protective layer is continuously dried and cured in a continuous furnace; the sheets are produced by shaping the strip that comprises the first protective layer and cutting the sheets that are optionally to be further shaped, or by cutting the sheets out of the strip that comprises the first protective layer and shaping the cut sheets; the shaped sheets are painted with a sol-gel paint consisting of a polysiloxane to create a second protective layer and said second protective layer is dried and cured in a furnace. The shaped parts that are produced by said method are characterised by excellent weather-, corrosion- and abrasion resistance.
Patent KR-20070058602-A (KR)
Title: Hcv inhibiting bi-cyclic pyrimidines
Inventor: SIMMEN KENNETH ALAN
IPC: C07D487/04
Filed: 2005-09-29
Abstract: The present invention relates to the use of bi-cyclic pyrimidines as inhibitors of HCV replication as well as their use in pharmaceutical compositions aimed to treat or combat HCV infections. In addition, the present invention relates to processes for preparation of such pharmaceutical compositions. The present invention also concerns combinat ions of the present bi-cyclic pyrimidines with other anti-HCV agents.
Patent KR-20070063042-A (KR)
Title: Organometallic compounds and processes for preparation thereof
Inventor: MEIERE SCOTT HOUSTON
IPC: C07F17/00
Filed: 2005-10-13
Abstract: This invention relates to organometallic compounds represented by the formula LML' wherein M is a metal or metalloid, L is a substituted or unsubstituted cyclopentadienyl group or cyclopentadienyl-like group, a substituted or unsubstituted pentadienyl group or pentadienyl-like group, or a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, and L' is a substituted or unsubstituted pyrrolyl group or pyrrolyl-like group, a process for producing the organometallic compounds, and a method for producing a film or coating from the organometallic compounds. The organometallic compounds are useful in semiconductor applications as chemical vapor or atomic layer deposition precursors for film depositions.