Patent SG-11201900014Y-A (SG)
Title: Vacuum assisted sealing processes & systems for increasing air cavity package manufacturing rates
Inventor: ROSS RICHARD
IPC: H01L23/36
Filed: 2017-06-26
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD HIM 011101011M 01 1101001110V 11111011110EVIO III OEN Organization (10) International Publication Number International Bureau (43) International Publication Date .....0\"\"\"1 WO 2018/007897 Al 11 January 2018 (11.01.2018) W I PO I PCT (51) International Patent Classification: ter Drive, Oakland, California 94621 (US). BREGANTE, HO1L 21/52 (2006.01) HO1L 23/36 (2006.01) Raymond; 7875 Edgewater Drive, Oakland, California 94621 (US). FU, Biao; 7875 Edgewater Drive, Oak- (21) International Application Number: PCT/IB2017/053809 land, California 94621 (US). BREGANTE, Michael; 7875 Edgewater Drive, Oakland, California 94621 (US). AM- (22) International Filing Date: PARO, Cresencio; 7875 Edgewater Drive, Oakland, Cali- 26 June 2017 (26.06.2017) fornia 94621 (US). (25) Filing Language: English (74) Agent: BOYD, Damon L.; 5727 N. 7th St., Ste. 400, Phoenix, Arizona 85014 (US). (26) Publication Language: English (81) Designated States (unless otherwise indicated, for every (30) Priority Data: kind of national protection available): AE, AG, AL, AM, 15/203,732 06 July 2016 (06.07.2016) US AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (71) Applicant: RJR TECHNOLOGIES, INC. [US/US]; 7875 CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, Edgewater Drive, Oakland, California 94621 (US). DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, (72) Inventors: ROSS, Richard; 7875 Edgewater Drive, Oak-KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, land, California 94621 (US). NI, John; 7875 Edgewa- MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (54) Title: VACUUM ASSISTED SEALING PROCESSES & SYSTEMS FOR INCREASING AIR CAVITY PACKAGE MANU- FACTURING RATES = — 450a 670 677 = 600 672 I 662 ---- ----- ----- ----- ....---- 668 = = 674a 677 680 684 = _ ---- 674b _ = .-- — '1 3 - 0 0 0 = 666 - - N-666 = _ = ---- ----- ---- ---- ---- -------- = 664 1 676 678 678 676 682 684 FIG.8 ,-, IN (57) : The present disclosure describes a sealing processes and structure for sealing air cavity electronic packages using 01 a thermosetting, thermal plastic, other known or as yet unknown adhesives, or hybrid combinations of such adhesive(s). Processes ot IN disclosed comprise steps of providing a base and a lid, with at least one of the base and the lid having a mating surface coated with the © adhesive. Initially, an air gap is maintained between the base, the lid, and the adhesive and a vacuum is generated around the base, the 0 ---- lid, and the adhesive. Once the vacuum has been generated, the base and the lid are mated to create a mated package assembly with WD a vacuum therein. After the mating, the mated package assembly is heated to a curing temperature to cure the adhesive, and pressure 1-1 © may be applied as well. Because the air within the mated package assembly has been evacuated prior to heating, there is no air pressure f'1 build-up therein, reducing or eliminating the presence of blowouts and pin holes. o [Continued on next page] WO 2018/007897 Al MIDEDIMOMOIDEIREIDIONIMMEIMOHMEMOIMIE OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))