baber/WOPTO huggingface dataset:
Patent KR-20000045688-A (KR)
Title: Oblique flow fan for refrigerator
Inventor: CHOI MU YONG
IPC: F04D29/38
Filed: 1998-12-30
Abstract: PURPOSE: An oblique flow fan for a refrigerator is provided to generate an oblique flow which is an intermediate state between a axial flow and a vortex flow for overcome a system resistance of the refrigerator with a lower rotation number, thereby realizing satisfying flow and low noise. CONSTITUTION: An oblique flow fan for a refrigerator includes a hub(51) connected to a motor shaft and a plurality of blades(55) mounted on the hub, wherein the number of the blades is four and a ratio of an inner diameter(ID) to an outer diameter(OD) is 0.2-0.3. In the blades, the outer diameter is 135±1mm, inner diameter is 30±1mm, an inclination angle(HA) of the hub is 20±0.5degree, a distance advanced forward is (26.0 to 26.5)±1mm, and a distance withdrawn backward is (23.0 to 23.5)±1mm. A maximum camber position of the blades is 0.68-0.73 uniformly from a blade hub to a blade tip, wherein a maximum camber is 7.5-8.0% at the blade hub and 13.5-14.0% at the blade tip in a linear distribution from the blade hub to the blade tip.
Patent KR-19990066918-A (KR)
Title: 기계적 강도가 감소된 소결가능한 열가소성 지방족 폴리우레탄성형 조성물
IPC: B29K75/00
Filed: 1998-12-30
Abstract: 본 발명은 분말-슬러쉬 공정에 의하여 제조될 수 있는, 기계적 강도가 감소되고 광에 안정하며 소결할 수 있는 열가소성 폴리우레탄 성형 조성물에 관한 것이다.  본 발명에 따른 성형 조성물은 운송 수단의 내장용, 특히, 자동차의 에어백용 커버로서 열리된 소결 필름의 생산에 특히 적절하다.
Patent KR-19990082397-A (KR)
IPC: B01D7/02
Filed: 1997-02-07
Abstract: The liquid cooled trap for effectively and efficiently collecting condensable vapor in a chemical vapor reaction system includes two stages. The first stage includes an entrance area to the trap that is purposely designed to be large in space and a very poor heat exchanger in order to avoid condensation and resulting solid deposits that could clog the entrance port to the trap. The second stage comprises a better heat exchanger to spread the condensation and deposits efficiently over a larger surface area and a longer flow path. The second stage is a very efficient heat exchanger to clean up and remove whatever small amount of condensable vapor remains after the first stage of the trap. The second stage includes cooling coil tubes and cooling cones or fins to increase the overall efficiency of the trap by increasing the interior surfaces upon which the flowing condensable vapor can condense, while not significantly reducing the flow conductance of the trap.
Patent KR-19990082608-A (KR)
Title: 게르마늄 도핑 실리카 제조용 원료 및 제조방법
IPC: C03C3/06
Filed: 1997-12-04
Abstract: 본 발명은 실리카 제조용 원료, 및 광도파관 및 광도파관 예형의 제조방법에 관한 것이다.    게르마늄 도핑 실리카 유리 제품의 제조에 사용되는 원료는 실록산 및 게르마늄 알콕사이드와 같은 게르마늄 도핑제 성분을 포함한다.    본 발명은 또한 실론산 및 게르마늄 도핑제 성분, 바람직하게는 게르마늄 알콕사이드를 포함하는 원료 용액을 사용하여 광도파관 및 광도파관 예형을 제조하는 방법에 관한 것이다.
Patent KR-20000016253-A (KR)
Title: Process for purifying sterically hindered 4-amino piperidines
Inventor: JULIUS MANFRED
IPC: C07D211/56
Filed: 1997-05-30
Abstract: PURPOSE: A process for purifying sterically hindered 4-amino piperidines is provided which can maintain the low degree of intrinsic coloration and manufacture a product which is coupled with a low content of a by-product such as a stabilizing agent. CONSTITUTION: A process for purifying raw piperidines of formula (I), where R1 to R4 are C1 to C6 alkyl, R1 and R2 and/or R3 and R4 together are a CH2 chain with 2 to 5 C atoms is described. The process is characterized in that in an initial step high boiling point substances and possible water are eliminated by distillation from the raw piperidines, in a second step 0.01 to 5 wt %, in relation to the product of the first step, of a reducing agent are added and in a third step the piperidines are isolated by distillation.
Patent KR-20000022515-A (KR)
Title: Use of l-acetylcarnitine, l-isovalerylcarnitine, l-propionylcarnitine for increasing the levels of igf-1
Inventor: DE SIMONE CLAUDIO
IPC: A61P5/06
Filed: 1997-05-15
Abstract: PURPOSE: Use of L-acetylcarnitine, L-isovalerylcarnitine, L-propionylcarnitine or pharmacologically acceptable salts thereof is provided, which is useful for increasing the levels of IGF-1 for the therapeutic treatment or prophylaxis of cytological disorders or diseases related to IGF-1. CONSTITUTION: The production of IGF-1 is induced by administrating L-acetylcarnitine,L-isovalerylcarnitine, L-propionylcarnitine or pharmacologically acceptable salts thereof in man, instead of the administration of exogenous IGF-1 being capable of causing undesired effects. The materials can treat or prevent pathogenesis of a particular disease or cytological disorders related to IGF-1, such as neuropathies of an optic nerve and of an olfactory nerve, diabetes, and the formation of dentine.
Patent KR-20000052233-A (KR)
Inventor: PARK WOO JONG
IPC: G11B7/09
Filed: 1999-01-30
Abstract: PURPOSE: An apparatus and method for buffering data recorded in a packet form of an optical recording medium is provided to quickly read a data by skipping link blocks and buffering only user data blocks. CONSTITUTION: Parameters are transmitted to a decoder so that the decoder recognize whether the data blocks supplied to the decoder is link blocks(S81). A skip mode is turned on(S82). The decoder reads out a physical block address of the data block(S83). It is discriminated whether the currently accessed track is a track recorded in a fixed packet form(S84). If it is not a track recorded in a fixed packet form, that the track has ended is informed to microcomputer(S86). It is discriminated whether the currently inputted data blocks are link blocks(S85). In case that the input data block are judged to be link blocks, a signal transmission path between a data input line and a buffer RAM is switched to cut off buffering(S87). In case that the input data blocks are user data blocks, the buffering control unit connects the signal transmission path between the data input line and the buffer RAM, thereby performing buffering.
Patent KR-20000056873-A (KR)
Inventor: BAE JAE HO
IPC: C02F1/58
Filed: 1999-02-27
Abstract: PURPOSE: An elimination method of nitrogen in wastewater that uses sulfur as carbon resources is provided. The method economically removes high conc. of nitrogen in wastewater through denitrification process. CONSTITUTION: An elimination method of nitrogen in wastewater is followed by the steps of: (i) flowing wastewater including high. conc of nitrogen and return water in an anoxic zone to denitrify and remove organic matters; (ii) flowing diluted nitrogen by return water and discharged water from the anoxic zone including organic matters in an aeration zone to nitrify, oxidize residual organic matters and return part of discharged water to a denitrification zone; (iii) adding organic matters when basicity is not enough; (iv) flowing in a sulfur-packing reaction zone to denitrify and remove residual organic matters; (v) cohering and precipitating when COD in discharged water from (iv) step excesses the set level; and (vi) discharging water wherein nitrogen and organic matters are eliminated.
Patent KR-20000056894-A (KR)
Inventor: PARK CHANG BAE
IPC: H01J11/38
Filed: 1999-02-27
Abstract: PURPOSE: A plasma display panel and a manufacturing method thereof are provided to guide light generated from a discharge space to a front face substrate of the panel as much as possible, thereby increasing a luminance of an image. CONSTITUTION: A plasma display panel comprises a front face substrate(1) and a rear face substrate(2) which is apart from each other at a distance, a scanning electrode(12) and a common electrode(13) formed on the front face substrate in a first direction to be alternately arranged to be parallel to each other, a first dielectric layer(11) formed on the scanning electrode and the common electrode, an addressing electrode arranged in a second direction which is orthogonal to the first direction, a second dielectric layer(22) formed on the addressing electrode, a partition(3) formed on the second dielectric layer in the second direction, a fluorescent layer(23) coated on the partition and the second dielectric layer which is exposed between the partitions, and a reflecting layer(4) disposed at a lower portion of the fluorescent layer.
Patent KR-20000059575-A (KR)
Inventor: KWAK JIN GYU
IPC: H04B1/40
Filed: 1999-03-05
Abstract: PURPOSE: A system for supporting multimedia services in an international mobile telecommunication-2000 system is provided to maximumly support 2Mbps data, voices, and image services. CONSTITUTION: A system for supporting multimedia services in an international mobile telecommunication-2000 system comprises an image input/output circuit(100), an image coder-decoder(CODEC)(101), a voice input/output circuit(102), a vocoder(103), a receiving path delayer(104), a data input/output circuit(105), a data interface(106), a multiplexer/demultiplexer(107), and a baseband/radio frequency(RF) processor(108). The image input/output circuit applies a pulse code modulation(PCM) to analog image signals to convert the signals into 64Kbps image data, or converts 64Kbps image data into analog signals. The image CODEC compresses the 64Kbps image data to add a 16-bit frame quality cyclic redundancy check2(CRC2), or extends the image compressed data to correct errors, then converts the image data into analog signals. The voice input/output circuit converts analog voice signals into 64Kbps digital voice data. The vocoder compresses the 64Kbps digital voice data to add a CRC1, or extends voice signals to correct errors, then supplies the signals to voice input/output circuit. The receiving path delayer delays voice data to supply the data to the vocoder. The data interface interfaces data of the data input/output circuit, or delays demultiplexed data. The multiplexer/demultiplexer adds the image data of the image CODEC to the voice data to form a bit stream, and adds a CRC3 and an 8-bit encoder tail bit, or adds the 16-bit frame quality CRC2/the encoder tail bit, and demultiplexes the data of the data interface, the voice data, and general data to supply the data to the image CODEC, the receiving path delayer, and the data interface. The baseband/RF processor modulates the data of the multiplexer/demultiplexer to transmit the data to a base station, or demodulates data of the base station to supply the data to the multiplexer/demultiplexer.
Patent KR-20000059673-A (KR)
Title: Method for improving resistance of load poly
Inventor: JUNG DONG SU
IPC: H01L21/334
Filed: 1999-03-06
Abstract: PURPOSE: A method for improving a resistance of a load poly is to provide an oxide film deposited on an upper portion and a lower portion of the load poly to contain a comparative small amount of impurity, thereby preventing a change in the resistance. CONSTITUTION: A method for improving a resistance of a load poly(106) comprises steps of depositing a first interlayer insulating film(104) to cover a semiconductor substrate(100) and a structure formed on the semiconductor substrate, and forming the load poly on the first interlayer insulating film, forming a second interlayer insulating film(108) on the first interlayer insulating film including the load poly. In the method, the first and second interlayer insulating film comprises an insulating film in which a comparative small amount of impurity is contained. The insulating film is a LTO(low temperature oxide) film or a plasma oxide layer.
Patent KR-19990077744-A (KR)
Title: 광 방출 분광기를 사용해서 플라즈마 구성물을 조절하는 이온 주입시스템 및 그 방법
IPC: C23C14/48
Filed: 1999-03-10
Abstract: 이온으로 하여금 공작물 주입 표면에 부딧히게 함으로써 공작물 주입 표면을 처리할 때 사용하는 방법 및 시스템. 주입 체임버(12, 112, 212)는 하나 이상의 공작물이 삽입될 수 있는 체임버 내부를 형성한다. 지지부(30, 216)는 주입 체임버의 내부영역내에서 하나 이상의 공작물을 위치시켜서 공작물의 주입표면이 내부영역에 직면한다. 가스형태의 도펀트 재료는 주입 체임버로 주입되어 가스로 하여금 하나 이상의 공작물에 매우 근접해서 주입 체임버의 영역을 점유하도록 한다. 주입재료의 플라즈마는 주입 체임버의 내부영역내에서 생성된다. 이온 플라즈마의 특징은 광 분광기를 사용하는 플라즈마의 광분석으로부터 결정된다. 광 분광기로부터 데이터(185)를 컴퓨터(190)상에서 실행하는 데이터베이스 분석 툴(tool)에 공급함으로써, 플라즈마의 구성물 성분의 상대적 농도는 결정된다.
Patent KR-20000060067-A (KR)
Inventor: KIM GWAN HO
IPC: H04Q3/54
Filed: 1999-03-11
Abstract: PURPOSE: An apparatus for transmitting and receiving data using a CPU peripheral bus for a switch is provided for integrating a plurality of buffers and resistors which form a CPU peripheral bus into one chip. CONSTITUTION: There are provided a CPU(100), a PLD(Programmable Logic Device)(110), a switching unit(120), a controller(130) and a memory unit(140). The CPU supplies data to the controller or supplies the data to the memory unit through the switching units. The PKD(20) generates a control signal in accordance with a corresponding address based on the address transmitted from the CPU through an address bus(IA) for thereby controlling the switching unit(120). The controller receives an address and data transmitted from the CPU through the address bus(MA) and data bus(MD) and the switching unit(120).
Patent KR-19990078157-A (KR)
Title: 파열 방지형 음극선관용 글라스 패널
IPC: H01J29/86
Filed: 1999-03-23
Abstract: 파열 방지형 음극선관용 글라스 패널에는 7MPa - 30MPa 의 압축 응력이 페이스부의 외부면에 제공되고 글라스 패널의 대각부에 있는 블렌드 R 부 (9) 의 외부면의 곡률 반경 (R b ) 과 글라스 패널의 최대 외경 (D) 사이의 관계가  R b ≥0.017 D + 4.0 이다.     또한,  페이스부가 실질적으로 평평한 경우에,  T r ≤0.014 D + 11.0   의 관계가 성립하며,   여기서 T r 은 블렌드 R 부의 최대 벽 두께이다.
Patent KR-20000066016-A (KR)
Inventor: KIM HYO TAEK
IPC: H04B7/14
Filed: 1999-04-12
Abstract: PURPOSE: A taxi system using public radio communication networks is provided to confirm, analyze and process the present location and operation status of a taxi periodically by transmitting and receiving the data to the server of a control center through public radio communication networks. CONSTITUTION: A transmitting/receiving module connected with a taxi meter installed in a taxi(10), a radio communication module(40) connected with a communication port in the transmitting/receiving module and a control center server(50) are connected through a radio communication network. The transmitting/receiving module is comprised of the communication port for communication with the radio communication module(40), a satellite receiver module connected with a satellite receiving antenna for radio communication with the server(50), a central processing unit to process each data of the taxi meter, the satellite receiver module and the radio communication module(40).
Patent KR-19990083197-A (KR)
Title: 열가소성 폴리우레탄의 제법
IPC: C08G18/66
Filed: 1999-04-15
Abstract: (a) 이소시아네이트를 (b) 이소시아네이트와 반응성이고 분자량이 451 내지 8000인 화합물과, (c) 쇄 연장제 및 필요한 경우 (d) 가교결합제, (e) 촉매 및(또는) 통상적인 보조제 및(또는) 첨가제의 존재하에 반응시키므로써 폴리이소시아네이트 중부가 생성물을 제조하는 방법에서, (c) 쇄 연장제로서 1,3- 및(또는) 1,2-프로판디올을 사용하고, 지수 104 이상에서 반응을 수행하는 방법이 개시되어 있다.
Patent KR-19990083241-A (KR)
Title: 동기식 파이프라인 버스트 메모리 및 그 동작 방법
IPC: G11C7/10
Filed: 1999-04-16
Abstract: 동기식 파이프라인 버스트 메모리(20)는 종래의 파이프라이닝 규칙을 변경함으로써 고속으로 동작할 수 있다.  메모리(20)는 주기적인 클록 신호의 제 1사이클동안 버스트 어드레스를 래치하는 어드레스 레지스터(24)를 포함한다.  버스트 어드레스는 비동기식 메모리 코어(40)의 입력으로 드라이브되지만, 비동기식 메모리(40)로부터 출력된 데이터는 제 1사이클 바로 다음의 주기적인 클록 신호의 제 2사이클후에 발생하는 주기적인 클록 신호의 제 3사이클까지 래치되지 않는다.  메모리(20)는 버스트 사이클을 완료하도록 주기적인 클록신호의 연속적인 사이클동안 버스트의 연속적인 데이터 요소를 출력한다.
Patent KR-20000066500-A (KR)
Inventor: SONG YU JIN
IPC: G06Q50/10
Filed: 1999-04-17
Abstract: PURPOSE: A program for internet advertisement that uses typing practice game is provided to maximize the advertisement effects with the netizens' participations by developing the internet game, the plug-in that connects the web and the game, and the internet game server and to supply joy and profit to the netizens and the maximized advertisement effects to the advertisers. CONSTITUTION: A user connects to the web server(S1), proceeds with the log-in(S2), checks the user identification(S3), and when approved, the user information and the renewed data are downloaded from the web server(S4). If not approved, the user registers as a user, takes the typing test(S5), outputs the homepage, and selects the internet game from the internet game server(S6). The selected game is checked whether it is of standard form(S7) and if standard form, the game is checked whether it is a simple game(S8). If it is not a simple game, a lengthy game is executed(S9). If it is a simple game, then the simple game is executed(S10) and the game is initiated(S11). If the end of the paragraphed is approached(S13) during the game(S12), the research is conducted periodically(S14), and the continuance of the game is checked(S15). If the user wishes to continue with the game, above game process is executed, but the game is concluded if the user wishes not to continue. If the selected internet game is not of the standard form, it is checked to determine whether it is of the invader form(S16). If the game is of the invader form, the regular game level is started(S17) and the game is checked to determine whether the appropriate game level has been completed(S18). If completed, a periodic research is conducted(S19) and the user continues with the next level(S20). If the level hasn't been completed, the game proceeds to the previous game level, the typing practice game is executed(S21), and when the conclusion of the game is confirmed, the game is completed(S22). If the selected game is not of the invader form, then it is checked to determine if it is an interactive game(S23). If it is an interactive game, the game room is selected(S24), the game is executed(S25), and the score(S27) and the winner(S28) are confirmed when the game is completed(S26). The intent to continue with the game is checked(S29) and if the user wishes to continue, the steps from the game room selection are repeated. If the user desires to end the game, the game is concluded.
Patent KR-19990088397-A (KR)
Title: 플라즈마제한쳄버의이온소오스및그이온소오스를이용한플라즈마전극
IPC: H01J37/08
Filed: 1999-05-19
Abstract: 플라즈마 제한 쳄버(49) 및 이 플라즈마 제한 쳄버(49)의 평판 벽부(52)를 형성하는 플라즈마 전극(70)을 포함하는 이온 소오스(26). 상기 플라즈마 전극(70)은 이온빔(88)이 상기 제한 쳄버(49)를 빠져나가는 적어도 한개의 구멍(84)을 가지고, 상기 플라즈마 전극의 구멍을 가로질러 자기장(94)을 발생시키는 자석 세트(78, 80)를 구비한다. 상기 플라즈마 전극(70)의 구멍은 축을 따라 정렬된 연장구멍 또는 원형구멍과 같이 만들수 있다. 또한, 상기 이온 소오스(26)는 상기 플라즈마 제한 쳄버(49)에 관하여 플라즈마 전극(70)을 음으로 바이어스 하는 전원공급기(72) 및 상기 플라즈마 전극을 전기적으로 절연하는 절연체(74)를 구비한다. 또한, 냉각튜브(122)는 상기 플라즈마 전극(70)의 자석으로부터 빠져나가는 열을 전달하는데 제공된다.
Patent KR-19990088486-A (KR)
Title: 큰래치마진을확보할수있는반도체메모리장치
IPC: G11C7/22
Filed: 1999-05-21
Abstract: 더블 데이터 레이트형 싱크로너스 다이나믹 랜덤 액세스 메모리 (DDR-SDRAM) 장치에 있어서, 입력 데이터의 큰 래치 마진이 확보된다.    DDR-SDRAM 장치는, 데이터 스트로브 신호의 상승 에지와 하강 에지중의 적어도 하나를 검출하여 하나이상의 제 1 원샷 펄스 신호를 발생하는 데이터 스트로브 신호 처리 회로, 클록 신호의 상승 에지를 검출하여 제 2 원샷 펄스 신호를 발생하는 클록 신호 처리 회로, 및 상기 데이터 스트로브 신호로부터 발생된 제 1 원샷 펄스 신호를 사용하여 입력 데이터를 래치하고 클록 신호로부터 발생된 제 2 원샷 펄스 신호를 사용하여 래치된 입력 데이터를 래치하고 래치된 데이터를 병렬로 메모리 셀에 동시에 기입하는 데이터인 처리 회로를 구비한다.    데이터인 처리 회로는 제 1 원샷 펄스 신호의 지연량과 제 2 원샷 펄스 신호의 또다른 지연량을 제어하여 입력 데이터의 래치 마진을 확보한다.
Patent KR-19990068601-A (KR)
Title: 펀치력측정방법및그장치
Filed: 1999-06-01
Abstract: 본 발명은 펀치력 측정방법 및 그 장치에 관한 것으로서, 내부에 중공의 압력실을 갖춘 피가격체의 외부로부터 가해지는 외력에 의해 변화되는 압력실의 압력변동을 감지하는 단계와, 압력변동의 횟수를 카운트하는 단계와, 각각의 압력변동의 크기를 절대값으로 환산하는 단계와, 카운트값 및 압력변동의 최대값에 대한 상대값을 기초로 출력값을 산출하는 단계와, 카운트값 및 압력변동의 최대값에 대한 상대값 그리고 이들을 기초로 분석한 출력값을 출력하는 단계로 이루어진 편치력 측정방법을 제공한다. 또한, 내부에 중공의 압력실을 갖춘 피가격체와, 압력실내의 압력을 감지하는 압력감지수단과, 압력감지수단의 감지신호에 의해 압력변동횟수를 카운트하고, 설정압력에 대한 압력변동크기를 절대값으로 변환하며, 압력변동횟수 및 변동크기의 최대치를 기초로 상대값을 산출하여 제어신호를 출력하는 제어부와, 제어부의 제어신호에 의해 압력실내의 압력이 설정압력 이하로 떨어지지 않도록 유지시켜주는 압력유지수단과, 제어부의 제어신호에 의해 단위시간동안의 압력변동횟수 및 설정압력에 대한 압력변동의 최대값에 대한 상대값과, 이들을 종합 분석한 출력값을 출력하는 표시수단으로 이루어진 펀치력 측정장치를 제공한다.
Patent KR-20010003391-A (KR)
Inventor: LEE DAE UK
IPC: H03J7/18
Filed: 1999-06-23
Abstract: PURPOSE: A method is provided to rapidly search local broadcasting channel through a simple key operation. CONSTITUTION: A method comprises a menu key searching step(42) for searching, through a micro computer, whether an initial menu key of an operation unit is input or not, an area selecting step(44) for selecting an objective area when the menu key is input, a broadcasting station selecting step(46) for checking whether the broadcasting station is searched or not and selecting each broadcasting station of the objective area, a tuning step(48) for transmitting PLL data of the objective broadcasting station to a tuner device, tuning the frequency, and displaying the objective broadcasting station and channel number, and an ending step(50) for removing screen display when there is no new data input for 5 seconds.
Patent KR-20010003950-A (KR)
Inventor: HA SANG ROK
IPC: H01L21/304
Filed: 1999-06-26
Abstract: PURPOSE: A method for minimizing erosion of an insulating layer is provided to prevent a wiring from being cut and resistance from increasing, by cooling a polishing pad, and by minimizing erosion of an insulating layer generated in planarizing a metal layer. CONSTITUTION: Cool air is supplied to a pad to minimize a thermal transformation of the pad so that the pad is not transformed by heat generated in a planarization process. An insulating layer located in a lower portion of a metal layer is less eroded. The pad is a relatively hard pad and slurry as a polishing agent has a high selectivity.
Patent KR-20010004068-A (KR)
Inventor: KIM DONG GI
IPC: C21B7/22
Filed: 1999-06-28
Abstract: PURPOSE: A dust collection method at blowing down in blast furnace is proposed to remove dust from water treatment installation by recovering a great quantity of dust in upward pipe and downward pipe near furnace top bleeder without exhausting them outward. CONSTITUTION: A dust collection method at blowing down in blast furnace is accomplished by attaching dust recover lines shortly below bleeder valve at top of furnace and reducing blowing work at repairing furnace apparatus. Furthermore, at reached to blow pressure of 1000g/cm2, a first dust collector is blown with nitrogen at its top part together with vapor. The blast furnace line is equipped with a water sealing part. When the water seal level reaches 5m it proceeds further steps to open an internal valve for recovering dust, complete water sealing, open the bleeder valve and close the recover valve.
Patent KR-20010004295-A (KR)
Inventor: SUN HO JEONG
IPC: H01L27/108
Filed: 1999-06-28
Abstract: PURPOSE: A method of forming a diffusion prevention layer of a capacitor is to deposit a thin film at a low temperature and deposit a relative thick film in a high temperature, thereby preventing an increased roughness of an upper electrode and the generation of a hillock. CONSTITUTION: A method of forming a diffusion prevention layer of a capacitor in a ferroelectric memory element comprises the steps of; forming a capacitor having an under electrode(20A), a ferroelectric film and an upper electrode(22A) on a semiconductor substrate(10); forming the first diffusion prevention layer(24) on the resultant created by forming the capacitor with a predetermined temperature; and forming the second diffusion prevention layer(26) thicker than the first diffusion prevention layer. The temperature for forming the second diffusion prevention layer is higher than the predetermined temperature. The thickness of the first diffusion prevention layer is within the range of about 100 to 200 angstrom, and the thickness of the second diffusion prevention layer is within the range of about 300 to 900 angstrom.
Patent KR-20000047425-A (KR)
Inventor: OSUDAHIROSI
IPC: B01D61/14
Filed: 1999-07-02
Abstract: PURPOSE: A method for recycling polishing used water in manufacturing a semiconductor device and an apparatus for doing the same are provided to recycle the used water in order to reduce cost. CONSTITUTION: A method for recycling polishing used water in manufacturing a semiconductor device includes following steps. The method includes a breaking step in which particles of the polishing factors in the slurry after polishing process are destroyed. The breaking step adopts at least one of the steps of pressing, microwave vibrating, and pressure cycling. The slurry used water is manipulated to be interchanged so as to disperse the destroyed particles into the liquid. The method further includes the step of accumulating the slurry used water.