baber/WOPTO huggingface dataset:
Patent KR-20020064138-A (KR)
Inventor: HATTORI TAKASHI
IPC: G03F1/60
Filed: 2001-11-23
Abstract: PURPOSE: To facilitate photomask identification. CONSTITUTION: Main body circuit patterns 1a, reticle alignment marks 1c, a bar code 1d, and an identification mark 1e formed on a glass substrate GP of the photomask A are constituted of an extinctive material, having a photosensitive composition containing a fine particulate material and a binder. Identification of the photomask A is performed, by irradiating the reticle alignment marks 1c or bar code 1d with a prescribed identifying light. The alignment of the photomask A in an exposure system is performed by irradiating the alignment marks 1c with a prescribed detecting light. At the performing of exposure, in addition, the pattern on the photomask A is transferred onto a semiconductor wafer, by using an exposure light, having a wavelength which is different from those of the identifying light and the detecting light.
Patent KR-20020042470-A (KR)
Title: Television tuner
Inventor: YAMAMOTO AKIRA
IPC: H04N5/44
Filed: 2001-11-28
Abstract: PURPOSE: To eliminate any disturbance due to an adjacent channel at the time of especially receiving a high pass television signal by making the band width of a tuning circuit almost constant from the low pass to high pass of a UHF band, and to improve NF at the time of receiving a low pass television signal, and to eliminate the difference of the NF between channels. CONSTITUTION: A UHF tuner part 10 is provided with a UHF tuning circuit 11 having a varactor diode 11a and first and second serially connected inductance elements 11b and 11c connected in parallel to the varactor diode 11a in which tuning frequencies are changed in the prescribed frequency range of the UHF band by the varactor diode 11a and an impedance means 12 serially interposed between an input terminal 1 and the connection of the two inductance elements 11b and 11c. The impedance of the impedance means 12 is increased in the prescribed frequency range of the UHF band according as the frequencies are increased.
Patent KR-20030045891-A (KR)
Title: Bake apparatus for Spinning equipment
Inventor: LEE GWANG HO
IPC: H01L21/027
Filed: 2001-12-03
Abstract: PURPOSE: A bake apparatus for a spinner equipment is provided to contact closely a wafer with a bake and heat uniformly the wafer by using an elevation portion to shift a wafer guide formed at an outer circumference of the bake. CONSTITUTION: A bake(10) is formed with a flat plate. A plurality of lift pins(20) is formed at a center portion of the bake. The lift pins are elevated on a concentric circle of the bake. A plurality of wafer guides(30) having a shape of cone are installed on a concentric circle of an outer circumference of the bake. An elevation portion(40) is installed at a lower portion of the bake in order to elevate simultaneously the wafer guides. The height of a top portion of the wafer guide is not higher than the height of the surface of the bake when the wafer guide is moved to a lower portion. The elevation portion is formed with an oil pressure cylinder or an air pressure cylinder. The elevation portion includes a step motor.
Patent KR-20020044080-A (KR)
Inventor: FUJIMURA SATOSHI
IPC: C08L33/14
Filed: 2001-12-04
Abstract: PURPOSE: To provide a chemically amplified positive resist composition which exhibits excellent sensitivity and resolution when a light source with < =200 nm wavelength such as an ArF excimer laser is used, which has good dry etching resistance and adhesion with a substrate and which can form a fine resist pattern with a little line slimming. CONSTITUTION: The chemically amplified positive resist composition contains (A) a resin component which increases the solubility with alkali by the effect of acid, (B) an acid producing component which produces acid by irradiation of radiation and (C) an organic solvent component. The resin component (A) is a copolymer consisting of (a1) a structural unit derived from 2-alkyl-2- adamantyl esters of acrylic acid or methacrylic acid, (a2) a structural unit derived from acrylates or methacylates having acid-dissociating 2-oxo-oxapentyl groups and (a3) a structural unit derived from 1-hydroxyadamantyl esters of acrylic acid or methacrylic acid.
Patent KR-20030048962-A (KR)
Title: INTERGRATED ACCESS DEVICE AND CONTROLLING METHOD FOR VoDSL
Inventor: KIM HYEON JUN
IPC: H04M7/00
Filed: 2001-12-13
Abstract: PURPOSE: A VoDSL(Voice over Digital Subscriber Line) IAD(Integrated Access Device) and a control method thereof are provided to perform a telephone call by using a general telephone network when it is difficult to perform a telephone call by using the VoDSL IAD due to power failure or network failure occurrence. CONSTITUTION: A DSL module(10) performs a high speed Internet communication and a plurality of voice communications through a telephone line. A hub device(20) divides the high speed Internet line through the DSL module(10) to be shared with an another client. A CPU(30), a DSP(40) and a CODEC(50) are devices for transmitting the voice with a digital method. An SLIC(60) distributes the voice into a plurality of voice communication lines. A telephone interface unit(70) performs a telephone call by using the distributed respective lines. An SLT(Single Line terminal)(80) enables a user to perform a telephone call through a PSTN(Public Switched Telephone Network).
Patent KR-20030049353-A (KR)
Title: Method of manufacturing a semiconductor device
Inventor: PARK JEONG GU
IPC: H01L21/8224
Filed: 2001-12-14
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to be capable of restraining the deterioration of device characteristics due to the penetration of ions and optimizing a dual gate oxide layer and the characteristic of GOI(Gate Oxide Integrity) by forming a nitride layer between the first and second gate oxide layer. CONSTITUTION: A plurality of isolation layers(102) are formed in a semiconductor substrate(100) for defining a high and low voltage device region. The first gate oxide layer(106) is formed on the semiconductor substrate and the first insulating layer(105) is simultaneously formed between the first gate oxide layer and the semiconductor substrate. The second gate oxide layer(108) is formed on the first gate oxide layer and the first insulating layer is simultaneously removed to the surface between the first and second gate oxide layer. After forming the first polysilicon layer(110) on the second gate oxide layer, the first polysilicon layer and the second gate oxide layer of the low voltage device region are selectively removed by carrying out the first etching process. Preferably, the first and second gate oxide layer are formed by a thermal and wet oxidation, respectively. Preferably, a nitride layer is used as the first insulating layer.
Patent KR-20020055383-A (KR)
Title: Device for carrying article into and from container, method for introducing and discharging article into and from container, and pallet for carrying article
Inventor: AOKI TATSUHIKO
IPC: B60P1/52
Filed: 2001-12-24
Abstract: PURPOSE: A device for carrying article into and from container, method for introducing and discharging article into and from container, and pallet for carrying article is provided to supply a convenient device for carrying pallet loaded with article into and/or from a container. CONSTITUTION: A carrying-in device(3) is composed of a stage(5), first lifting/sliding devices(13a,13b,13c,13d), which support a pallet(11) to be moved horizontally while keeping the pallet lifting up from the floor surface of the stage, and second lifting/sliding devices(29a,29b,29c,29d), which receive the pallet from the first lifting/sliding devices and put the pallet down on the floor surface(4) of a container(2). A carrying-out device being used for discharging operations comprises the stage, second lifting/sliding devices supporting the pallet to be moved horizontally with lifting up from the floor surface of the container, and first lifting/sliding devices receive the pallet from the second lifting/sliding devices.
Patent KR-20010053547-A (KR)
Title: 진동 콘딧 파라미터 센서 및 공간 통합을 이용하여 그것을작동하는 방법
IPC: G01F1/84
Filed: 1999-06-23
Abstract: 물질 프로세싱 시스템용 프로세스 파라미터 센서는 물질 프로세싱 시스템으로부터 물질을 포함하도록 구성된 콘딧(103A-103B)을 포함한다.  복수의 운동 변환기(105A-105D)는 콘딧 상의 다수의 위치에서 운동을 나타내는 복수의 운동 신호를 생성시키도록 작동한다.  초과결정식 프로세스 파라미터 추정기(30)는 상기 복수의 운동 변환기에 응답하며 복수의 운동 신호를 수신하도록 구성된다.  초과결정식 프로세스 파라미터 추정기는 콘딧 운동을 힘의 예비 결정 수의 각각에 기인하는 운동으로 분석하여, 분석된 운동에 따른 콘딧의 물질과 관련한 프로세스 파라미터를 추정하도록 작동하며, 복수의 운동 신호가 콘딧 운동을 힘의 예비 결정된 수에 기인한 운동으로 분석한 것에 대해 초과결정된 정보 세트를 제공할 정도로, 위치의 수가 힘의 수를 초과한다.
Patent KR-20010089146-A (KR)
Title: Lipid-lowering quinazoline derivative
IPC: A61K45/00
Filed: 1999-07-13
Abstract: A novel carbonyl-substituted quinazoline, preferably 4-(3'-bromobenzoyl)-6,7-dimethoxyquinazoline (WHI-P164), and methods for lowering blood cholesterol, including reducing total cholesterol and LDL-cholesterol levels by administration of the carbonyl quinazolines and compositions thereof.
Patent KR-20010075050-A (KR)
Title: 비접촉형 용량성 데이터 전송 시스템 및 방법
IPC: G06K7/08
Filed: 1999-09-10
Abstract: 비접촉형 용량성 데이터 전송 시스템은 갭에 기초한 정보를 정전기적으로 통신하는 비접촉형 용량성 데이터 송신 회로(10)와 그에 대응하는 비접촉형 용량성 데이터 수신 회로(70)를 이용한다.  비접촉형 용량성 데이터 송신 회로(10)는 여기원(12)과, 전송 포맷으로서 전송되는 갭들을 사용하는 정전기적 전송용 데이터로 사용하기 위해 여기원으로부터의 여기 신호를 변조하도록 커플링된 정전기 데이터 발생 회로(14)를 포함한다.  비접촉형 용량성 데이터 송신 회로(10)는 정전기 데이터 발생 회로(14)에 커플링된 제1 및 제2 정전기 안테나 소자들(16a, 16b)을 포함한다.  제1 및 제2 정전기 안테나 소자들(16a, 16b)은, 비접촉형 용량성 데이터 수신 회로(70)를 포함한 근방에 배치된 원격 전력 투입형 정전기 RFID 태그(11)에 상기 변조된 데이터를 정전기적으로 송신하도록 배열된다.
Patent KR-20010099703-A (KR)
Title: Paraffin dispersants with a lubricity effect for distillates of petroleum products
IPC: C10L1/18
Filed: 1999-10-19
Abstract: The mixture contains(a) from 5 to 95% by weight of at least one reaction product of a poly(C2-20-carboxylic acid) having at least one tertiary amino group with secondary amines and(b) from 5 to 95% by weight of at least one reaction product of maleic anhydride and a primary alkylamine.
Patent KR-20010101229-A (KR)
IPC: C08L69/00
Filed: 1999-12-07
Abstract: 본 발명은, 3종의 고무 라텍스의 혼합물을 기초로 하여 유화 중합에 의해 제조되는 특정한 그라프트 중합체 및 용액, 괴상 또는 현탁 중합에 의해 제조되는 ABS 중합체의 조합에 관한 것이다.  극히 높은 인성을 나타내는 생성물이 수득된다.
Patent KR-20010102040-A (KR)
Title: Amide compounds and medicinal use thereof
IPC: C07D491/113
Filed: 2000-02-10
Abstract: The present invention relates to a compound of the formula <CHEM> wherein R<1> is substituted aryl, heteroaryl and the like, R<2> and R<3> are hydrogen, alkyl, halogen, hydroxyl group and the like, Q is N, CH and the like, W is hydrogen, alkyl, hydroxycarbonylalkyl and the like, X is halogen, cyano, nitro, amino and the like, X' is hydrogen, halogen, cyano, nitro, and Y is alkyl, hydroxyl group, alkoxy, mercapto and the like and a salt thereof, and a medicine containing the said compound. The compound of the present invention shows a superior inhibitory effect on activated lymphocytes proliferation and is useful as an agent for the prophylaxis or treatment of various autoimmune diseases.
Patent KR-20020006517-A (KR)
Title: 골프 시계
IPC: G01D13/04
Filed: 2000-03-07
Abstract: 본 발명은 골프 코스의 한 홀에서 볼을 집어넣기까지의 타수와 플레이한 전체 타수를 각각 계산하기 위해 제공되고, 디스플레이 수단(32, 34)과, 이 디스플레이를 구동하기 위한 구동 수단(54, 56, 58, 60)과, 위치를 설정하기 위한 위치 설정 수단(52)을 각각 구비하는 제1 카운터(19) 및 제2 카운터(21)와, 상기 구동 수단(54, 56, 58, 60)에 연결되고, 사용자가 상기 카운터의 숫자를 증가시키고 또 0으로 리셋시키도록 배치된 제어 수단(22, 24, 26, 28)을 포함한다.  상기 제어 수단(22, 24, 26, 28)은 사용자가 적어도 상기 제1 카운터(19)의 숫자를 또한 감소시킬 수 있도록 배치되어 있는 것을 본 발명의 특징이다.
Patent KR-20010112270-A (KR)
Title: 이방성 플래티늄 프로파일을 위한 에칭 방법
IPC: H01L21/8246
Filed: 2000-02-16
Abstract: 다수의 플래티늄 전극을 포함하는 반도체 소자를 제조하도록 기판상에 배치된 플래티늄 전극층을 에칭하는 방법에 관한 것이다. 이 방법은 기판을 약 150℃ 이상의 온도까지 가열하는 단계와 질소와 할로겐(예, 염소), 불활성 가스(예, 아르곤), HBr, BCl 3 SiCl 4 및 이들의 혼합물로 구성된 그룹으로부터 선택된 가스를 포함하는 에칭 가스의 플라즈마를 사용해서 플래티늄 전극층을 에칭하는 단계를 포함한다. 기판은 약 1000Å 이상의 평균 높이값을 가진 피크-대 벨리 조도 높이를 가진 증착-수용면을 포함하는 유전체 윈도우를 포함하는 반응기 챔버내에서 가열될 수 있다.
Patent KR-20010113699-A (KR)
Title: 반도체 장치
IPC: G11C11/4074
Filed: 2000-02-09
Abstract: 메모리 어레이 전압이 저전압화된 경우라도, 메모리 셀에서의 미소 신호를 고속이며, 또한 저소비 전력으로 데이터를 감지하는 감지 증폭기를 개시한다.  오버 드라이브용 구동 스위치를 감지 증폭기 영역 내에 분포 배치하고, 복구용 구동 스위치를 감지 증폭기 열의 일단에 집중하여 설치한다.  오버 드라이브용 전위는 매쉬 형상 전원 배선을 이용하여 공급하도록 구성한다. 
     상기 오버 드라이브용 구동 스위치에 의해 데이터선 쌍을 데이터선 진폭보다 큰 전압으로 초기 감지할 수 있어서 고속 감지를 실현한다.  구동 스위치를 분포적으로 배치함으로써, 감지 시의 전류를 분산할 수 있고 감지 시의 전압의 원근단 차가 억제된다.
Patent KR-20020020740-A (KR)
IPC: F16H45/02
Filed: 2001-04-23
Abstract: 본 발명은 구동 샤프트에 회전식으로 결합되기에 적합한 대체로 반경방향으로 배향된 벽(14)을 구비한 케이싱(12)과, 종동 샤프트에 회전식으로 결합되기에 적합한 허브(54)에 회전식으로 결합된 터빈 휠(104)과, 터빈 휠(104)과 반경방향 벽(14) 사이에 작동식으로 개재되며, 터빈 휠과 반경방향 벽 사이에 축방향으로 개재된 록업 클러치로서, 록업 클러치가 전방으로부터 후방으로 하기와 같은 순서, 즉 ① 축방향으로 이동가능하고 케이싱에 회전식으로 결합된 대체로 반경방향으로 배향된 피스톤(40), ② 대체로 반경방향으로 배향된 환형 마찰 디스크(152)로서, 마찰 디스크(152)는 터빈 휠(104) 및 허브(54)의 조립체에 회전식으로 결합되고, 제 1 환형 마찰 존(Z1)을 규정하기 위해서 피스톤에 고정된 제 1 마찰 면(200)과 협력하는 제 1 반작용 면(210)을 제 1 면상에서 지지하며, 제 2 환형 마찰 존(Z2)을 규정하기 위해 반경방향 벽(14)에 고정된 제 2 마찰 면(220)과 협동하는 제 2 반작용 면(230)을 제 1 면에 대향된 제 2 면상에 지지하는, 마찰 디스크(152)를 구비하는, 록업 클러치를 포함하는 형태의 특히 자동차용 유체 커플링 장치(10)에 관한 것이다.  본 발명은 제 1 및 제 2 마찰 존(Z1, Z2)이 서로 반경방향으로 오프셋되어 있는 것을 특징으로 하고 있다.
Patent KR-20030062148-A (KR)
Title: construction method for an incline plane
Inventor: KONG SU MYEONG
IPC: E02D17/18
Filed: 2002-01-16
Abstract: PURPOSE: The process of constructing normal face structure of a rock-cut slope is provide to simplify the construction and promote solid normal face structure, moreover to cut down on the cost of construction. CONSTITUTION: The process of constructing normal face structure of a rock-cut slope is composed of: leveling the foundation ground; installing non-woven fabrics at the leveled foundation ground(S1); installing a molding frame to the end of the non-woven fabrics(S2); installing a vegetative sheet on to the non-woven fabrics in layers and closing to the molding frame(S3); putting soil between the non-woven fabrics and the vegetative sheet and hardening the soil, then spreading the edge of the vegetative sheet onto the hardened soil(S5); repeating the process; embedding numbers of anchors to the rock-cut slope(S7); placing mortar to the upper area of the vegetative sheet and the non-woven fabrics to make the anchor embedded(S8); putting soil to the mortar layer and the vegetative sheet for hardening(S9); removing the molding frame(S11).
Patent KR-20030064111-A (KR)
Title: Time sharing digital filter and multi-channel codec circuit using the same
Inventor: CHO SAM GU
IPC: H03H17/02
Filed: 2002-01-25
Abstract: PURPOSE: A time divisional digital filter and a multi channel CODEC circuit by using the same are provided to perform a digital filtering the multi-channel digital signal with sharing a plurality of multiplier and a plurality of adders. CONSTITUTION: A time divisional digital filter includes a plurality of delay blocks(500,501,...50m), a multiplier block(510), an adder block(520) and a storage block(530). The plurality of delay blocks(500,501,...50m) is selectively operated in response to a plurality of switching signals and outputs a plurality of signals having a different plurality of delay values by delaying each of the input signals of the multi-channel in response to the each of the clock signals. The multiplier block(510) multiplies a plurality of delay signals outputted from a plurality of delay blocks(500,501,...50m) by a plurality of constants and the adder block(520) and adds the outputs of a plurality of multipliers. And, the storage block(530) divides the output signals of the adder block(520) in response to each of the channel and stores the divided signals.
Patent KR-20030017300-A (KR)
Title: Cosmetic compositions containing extracts of Prunus armeniaca L, Vitis vinifera L. and Perilla frutescens var. japonica Hara
Inventor: CHAE HUI NAM
IPC: A61Q19/00
Filed: 2002-01-31
Abstract: PURPOSE: A cosmetic composition having keratolytic activity and containing purified natural organic acid and unsaturated fatty acid separated from apricot kernel, grape seed and perilla is provided which removes keratin substances excessively accumulated in the skin and proliferates cells, thereby maintaining healthy skin. CONSTITUTION: A mixture of apricot kernel, grape seed and perilla is soaked in a solvent at 0 to 100deg.C for 1 to 30 days and a keratolytic cosmetic composition contains 0.01 to 10%(w/v) of the extract. The solvent is one or two or more selected from the group consisting of distilled water, ethanol, methanol, butanol, acetone, ethyl acetate, hexane, propanol, butylene glycol and propylene glycol. The composition is formulated into a skin lotion, nourishing lotion, nourishing cream, massage cream or nourishing essence.
Patent KR-20030068741-A (KR)
Title: Method for relocating SRNS
Inventor: HAN HYO SANG
IPC: H04W88/14
Filed: 2002-02-16
Abstract: PURPOSE: An SRNS(Serving Radio Network Sub-system) relocation method is provided to support successful SRNS relocation by solving a problem capable of being generated when an SRNS relocation procedure is performed, using ciphered RRC(Radio Resource Control) messages. CONSTITUTION: Resources necessary for SRNS relocation are reserved on a network. A serving RNC(Radio Network Controller) transmits a radio resource control message associated with the SRNC relocation to a UE(User Equipment), for communication with the UE. The UE transmits a response radio resource control message associated with the SRNS relocation to the serving RNC. Before the serving RNC transmits the radio resource control message associated with the SRNC relocation to the UE, the serving RNC sets a corresponding RLC(Radio Link Control) layer, adjusts a frame number necessary for ciphering, and transmits data, so that the UE successfully recovers ciphered data.
Patent KR-20030043561-A (KR)
Title: Manufacture device of barbed-wire entanglements
Inventor: JUNG KI KWAN
IPC: B21F25/00
Filed: 2002-02-18
Abstract: PURPOSE: A barbed wire entanglement, a wire entanglement and an apparatus for manufacturing the same are provided to improve endurance of the barbed wire entanglement against external impact by forming the barbed wire entanglement through twisted warp and weft wires. CONSTITUTION: A barbed wire entanglement manufacturing apparatus includes a feeding section fixedly supported by a fixing die, a twist section(20), a weft wire feeding section, a barbed wire feeding section, and a conveying section(60). The twist section(20) has a driving gear engaged with a rack gear, which is longitudinally driven by means of a first motor, a pressing plate provided at a front of the twist section(20), and a barb forming pin coupled to both sides of the twist section(20). The weft wire feeding section is formed at a front frame thereof with a V-shaped cutter, which is longitudinally driven by means of a first cylinder. A rack is transversely installed on the weft wire feeding section. The barbed wire feeding section is aligned while forming an angle of 45 degrees with respect to the twist section(20). The conveying section(60) conveys a barbed wire pressing member in front and rear directions.
Patent KR-20030069286-A (KR)
Title: A manufacturing method of liquid crystal display
Inventor: KIM GYEONG HYEON
IPC: G02F1/1343
Filed: 2002-02-19
Abstract: PURPOSE: A method for manufacturing a panel of a liquid crystal display is provided to reduce a difference in brightness due to a stitch error generated in the panel through a gradual change in areas of right and left stitch shots. CONSTITUTION: In exposing a photosensitive film to pattern pixel electrodes(82), an active area of the photosensitive film is divided into a plurality of shots including a first shot(A) and a second shot(B) adjacent to each other. A plurality of second shot domain dividing elements(821,822,823) are placed at a first shot area and a plurality of first shot domain dividing elements are placed at a second shot area. The second shot domain dividing elements and the first shot domain dividing elements are gradually decreased in number and area as the second shot domain dividing elements and the first shot domain dividing elements become distant from a center boundary line of the first shot and the second shot.
Patent KR-20030069722-A (KR)
Title: Methode for manufacturing mesh screen of plasma lighting system
Inventor: MIN BYEONG OK
IPC: H01J65/04
Filed: 2002-02-22
Abstract: PURPOSE: A method is provided to achieve improved characteristics of the mesh screen and reinforced strength, while lengthening the useful life of the mesh screen. CONSTITUTION: A method comprises a step(S1 to S3) of forming a mesh screen having a mesh structure; a step(S4) of plating the surface of the mesh screen with a first metal material; a step(S5) of performing a vacuum heat treatment to the mesh screen at a high temperature environment; a step(S6) of plating the surface of the mesh screen with a second metal material; and a step(S7) of coating the surface of the mesh screen with a photocatalytic material. The first metal material is nickel and the second metal material is silver.
Patent KR-20030070399-A (KR)
Title: A mushroom hamburg patty
Inventor: CHAE SU YU
IPC: A23L13/60
Filed: 2002-02-25
Abstract: PURPOSE: A mushroom-containing hamburger patty is provided, thereby improving the taste and nutrition of hamburger patty. CONSTITUTION: A hamburger patty consisting of meats as a main component contains 40 to 80 wt.% of at least two kinds of roasted mushrooms with water, wherein the mushroom is at least two mushrooms selected from Flamm velutipes, Lertinus edodes(pitch pine mushroom), Oyster mushroom, Pine mushroom(Triclroloma matztake) and King oyster mushroom; and the meat is chicken. The mushroom-containing hamburger patty is prepared by cutting 40 to 80 wt.% of at least two kinds of mushrooms; mixing the mushrooms with seasoning materials and water and heating the mixture; and adding meat into the mixture and heating them.
Patent KR-20030073644-A (KR)
Title: Method of Fabricating Field Emission Device
Inventor: LEE YONG HAN
IPC: H01J1/30
Filed: 2002-03-12
Abstract: PURPOSE: A method is provided to prevent the tunnel insulation film from being damaged by an evaporation or etching process, while achieving improved field emission characteristics. CONSTITUTION: A method comprises the steps of forming a lower electrode(74) on a lower substrate(72); forming a photoresist pattern(76) on the center of the lower electrode and forming an insulation layer(82) on both sides of the lower electrode; forming an upper bus electrode(88) in the direction vertical to the lower electrode; forming an overhang insulation layer in such a manner that the overhang insulation layer covers the upper bus electrode; forming a field emission hole in such a manner that the photoresist pattern is exposed; exposing the lower electrode by removing the photoresist pattern; forming a tunnel insulation film on the lower electrode where electrons are to be emitted; and forming an upper electrode in the portion where electrons are to be emitted.
Patent KR-20030073842-A (KR)
Title: Flim bulk acoustic resonator filter and manufacturing method for the same
Inventor: MUN SEON HUI
IPC: H03H9/64
Filed: 2002-03-13
Abstract: PURPOSE: A film bulk acoustic resonator(FBAR) filter and a fabrication method thereof are provided to improve band pass characteristics of the FBAR filter and to realize one chip integration by a MMIC(Monolithic Microwave Integrated Circuit) process without using an external individual device. CONSTITUTION: The first resonant part(61) is formed by connecting a number of film bulk acoustic resonators(FBAR)(61a,61b,61c) having the first resonant frequency serially. The second resonator part(62) is formed with a number of FBARs(62a,62b) connected in parallel with the FBARs of the first resonant part, and has the second resonant frequency. And the third resonant part(63) has the first resonant frequency, and is formed with a number of FBARs(63a,63b) connected in parallel with the FBARs of the first resonant part.