baber/WOPTO huggingface dataset:
Patent KR-20010024832-A (KR)
Title: 직접-시퀀스 ｃｄｍａ 스펙트럼 확산 통신 시스템에서높은 비트 밀도를 실현하기 위해 코드북 인덱싱을이용하는 방법
IPC: H04B1/707
Filed: 1998-12-22
Abstract: 직접-시퀀스 CDMA 스펙트럼 확산 통신 시스템에서 높은 비트 밀도를 실현하는 방법이 제공된다. 직교 의사-잡음 코드의 테이블이 저장되며, 이 테이블은 복수의 코드북(311,312,313)으로 분할된다. 다음에, 코드북(311)이 사용자에게 할당된다. 코드북 내에 포함된 의사-잡음 코드는 정보 신호(401)를 확산시키기 위해 사용된다. 제1 사용자에 대한 정보 신호(401)는 그 제1 사용자에게 할당된 코드북(311) 내에 포함된 의사-잡음 코드에 의해 확산된다. 정보 신호(401)의 값이 코드북(311) 내의 의사-잡음 코드의 위치에 대응하도록 코드북(311) 내의 의사-잡음 코드의 위치를 이용하여 한번에 복수 비트의 정보 신호가 전송될 수 있다. 다음에, 정보 신호(401)는 동일한 의사-잡음 코드를 이용하여 확산해제된다.
Patent KR-20010034061-A (KR)
Title: 역반사 이색 반사기
IPC: G02B5/28
Filed: 1998-12-08
Abstract: 역반사 시이트 및 다층 중합체 반사 필름의 다양한 조합이 기술되어 있다.  반사 필름은 적어도 제1 및 제2 중합체의 교대층을 포함하는데, 교대층은 제1 스펙트럼 범위내에서 광에 대해 높은 반사와 제2 스펙트럼 범위내에서 광에 대해 낮은 반사율을 나타내는 형태이다.  둘 이상의 교대층은 최대 평면내 굴절율 차이가 단지 50% 만큼 차이가 나는 평면밖 굴절율을 가질 수 있다.  중합체층은 날카로운 스펙트럼 변이를 제공하도록 설계된 특정 두께 프로파일을 갖는 순서로 배열된 광학 반복 단위를 한정할 수 있다.  역반사층은 모든 입사 평면에서 역반사를 나타내는 것이 바람직하나, 대안으로 하나 이상의 입사 평면에서는 역반사될 수 있으나 하나 이상의 다른 입사 평면에서는 역반사되지 않을 수 있다.
Patent KR-20010041269-A (KR)
Title: 스위치 캐비닛용 프레임
IPC: H02B1/30
Filed: 1999-03-13
Abstract: 본 발명은 수직의 프레임 부분들, 바닥 프레임 및 뚜껑 프레임으로 구성된, 스위치 캐비닛용 프레임에 관한 것이다. 바닥 프레임 및 뚜껑 프레임은 시트 강 블랭크로 이루어진, 구멍이 뚫려있고, 구부려진 부분들의 외형을 하며 스위치 캐비닛의 내부로 향해있으며 수직의 프레임 부분들은 고정되어진 수평바닥으로 구성된다. 바닥은 스위치 캐비닛의 내부로부터 굴곡져 있는 보강된 에지를 가진다. 이런 형태의 프레임을 간단하고 빠르게 조립할 수 있기 위해서 본 발명은 각각이 적어도 한 개의 나사식 리세스(recess)를 가지며 하부프레임과 상부프레임의 하부에 고정이 되는 네 개의 결합 식의 돌출부들을 제공한다.  수직의 프레임 부분들은 결합 식의 돌출부들에 삽입되어지는 수단으로 결합 식의 리세스들을 가진다. 수직의 프레임 부분들은 또한 나사구멍을 가지며 이 구멍은 결합식 돌출부들의 나사식 리세스에 중심이 맞춰지도록 배열되며 고정나사는 나사구멍에 나사산을 내며 나사식 리세스로 조여진다.
Patent KR-20010025046-A (KR)
Title: 가교된 오일을 함유하는 미세다공성 재료
IPC: C08J9/26
Filed: 1999-04-21
Abstract: 본 발명은 공유 결합 및 오일 희석제의 고정화를 제공하는 열적 유도 상 전이에 의해, 열가소성 중합체와 조합된 가교가능한 오일로부터 형성되는 미세다공성 재료에 관한 것이다.  이러한 재료는 그래픽 영상화 기판 및 발수성 기저귀 및 의류에서 유용하다.
Patent KR-20010052723-A (KR)
Title: 인공 신경관
IPC: A61L27/58
Filed: 1999-06-07
Abstract: 본 발명은 신경이 재생될 때까지 생체내에서 잔존시킬 수 있도록 생체내 분해 속도를 조절할 수 있고, 신경 재생 후 재생된 신경을 압박하지 않고, 절단된 신경 절단부에서 재생되는 축색이 올바른 방향으로 신장하도록 유도하고, 생체로부터의 모세혈관의 침입을 촉진함으로써 조기의 혈류 회복을 가져와, 신경 조직의 재생을 촉진하는 인공 신경관에 관한 것이며, 이 인공 신경관은 생체내 분해 흡수성 재료로 이루어지는 튜브 (11),(21)의 적어도 외면에 젤라틴 또는 콜라겐으로 이루어지는 피복층(13),(23)을 갖는 튜브 (10),(20)과, 그 내강에 상기 튜브의 축선에 삽입된 미리 열 탈수 가교 처리가 실시된 콜라겐의 섬유 다발 (콜라겐으로 이루어지는 섬유 (31)의 다발을 의미)로 이루어지며, 상기 콜라겐으로 이루어지는 섬유가 라미닌으로 피복되는 것을 특징으로 하는 것이다.
Patent KR-20010053226-A (KR)
Title: 규소를 플라즈마 에칭하는 방법
IPC: H01L21/3065
Filed: 2000-03-16
Abstract: 처리 가스를 이용한 가운데 규소 기판 내 횡으로 한정된 구조물을 처리 가스로 플라즈마 에칭하는, 특히 이방성 에칭하는 방법이 추천되어 있다. 그 때, 에칭 전 및/또는 에칭 중에 횡으로 한정되어 있는 구조물의 측벽들 위에 적어도 일시적으로 하나의 불활성 물질이 분리된다. 첫째 방법에서는, 처리 가스에, 플루오르 제공 에칭 가스로서, ClF 3 , BrF 3 또는 IF 5 군 중에서 선택된 적어도 하나의 화합물을 첨가한다. 둘째 방법에서는, 처리 가스에는 적어도 일시적으로, 불활성 물질을 소모시키는 첨가제 NF 3 를첨가한다. 마지막으로 셋째 방법에서는, 처리 가스에 적어도 일시적으로, 가볍고 용이하게 이온화할 가스, 특히 H 2 , He 또는 Ne를 첨가한다. 추천된 세 방법은 또한 조합될 수도 있다.
Patent KR-20020059919-A (KR)
Title: The apparatus and method of the image extraction using dual look-up table
Inventor: KONG YEONG JUN
IPC: H04N5/225
Filed: 2001-01-09
Abstract: PURPOSE: A device and a method for extracting an image using a dual LUT(Look-Up Table) are provided to adjust a threshold of the dual LUT after image signals of a target are captured in a CCD(Charge Coupled Device) camera and an infrared camera, to pass only an image signal area, and to drive a motor of pan/tilt for tracking to make the target appears in a center of a monitor. CONSTITUTION: A CCD camera(200) and an IR(Infrared) camera(210) capture video images of visible rays and infrared rays. A video digitizer(220) converts images of the cameras into digital data. A dual LUT(230) having a CCD LUT(231) and an IR LUT(232) digitize the digital image data to eliminate unnecessary image information. A frame memory(240) stores the digital image data passing the dual LUT. A timing controller(260) selectively switches the CCD camera and IR camera, to selectively switches the CCD LUT and IR LUT. A pan/tilt(270) is driven to track an image of a target to be captured in the CDD camera and IR camera. A monitor(280) displays the image of the target captured in the CCD camera and IR camera by the movement of the pan/tilt according to the movement of the target. And a CPU(250) controls the frame memory, dual LUT, timing controller and the pan/tilt and processes image signals.
Patent KR-20020060799-A (KR)
Title: Digital item define model
Inventor: JANG DO IM
IPC: H04N7/173
Filed: 2001-01-12
Abstract: PURPOSE: A method for creating a digital item for an electronic commerce is provided to suggest a clear, adaptable, consistent, and interactively compatible digital item definition model necessary for an electronic commerce on an electronic commerce environment as various users, a network, and a terminal. CONSTITUTION: A digital item(100) is expressed as contents(100a) and meta data(100b). The lowest digital item which does not resolved is defined as an atomic digital item(101). The atomic digital item(101) is expressed as an atomic content(101a) and meta data(101b). The contents(100a) are corresponded to a multimedia resource, and the meta data(100b) are provided for defining and describing the multimedia resource as the least unit capable of being treated in an action for an electronic commerce. A component(102) is used as the least unit data for electronic commerce, which is the lowest layer on a recursive layer structure.
Patent KR-20010091880-A (KR)
Title: Discharge plasma generating method, discharge plasma generating apparatus, semiconductor device fabrication method, and semiconductor device fabrication apparatus
Inventor: AOI TATSUFUMI
IPC: H01J37/32
Filed: 2001-01-18
Abstract: PURPOSE: A discharge plasma generating method, a discharge plasma generating apparatus, a semiconductor device fabrication method, and a semiconductor device fabrication apparatus are provided to generate a uniform discharge plasma in a large area by using a VHF and uniformly process a large substrate. CONSTITUTION: A discharge plasma generating method comprises the steps of opposing a discharge electrode having a substantially plane discharge portion to a substrate to be processed in a vacuum reaction vessel such that the discharge electrode and the substrate are substantially parallel to each other; evacuating the vacuum reaction vessel and supplying a process gas to a space between the discharge electrode and the substrate; and applying HF power to the discharge electrode such that an envelope representing the spatial distribution of an HF voltage phi on the discharge electrode in a split second changes in accordance with a function including time as a parameter, thereby generating a discharge plasma of the process gas between the discharge electrode and the substrate, with substantially no standing wave of the HF voltage phi generated on the discharge electrode.
Patent KR-20010078364-A (KR)
Title: control device of variable capacity type compressor
Inventor: ATANIYA TAKU
IPC: F04B49/06
Filed: 2001-02-07
Abstract: PURPOSE: To provide a controller for variable displacement compressor, capable of improving the controllability and responsiveness of delivery capacity. CONSTITUTION: A control valve 46 comprises an operating rod 53 responding to a differential pressure (PdH-PdL) between two pressure monitoring points P1, P2 predetermined at the refrigerating cycle of a refrigerant circulating circuit, wherein the openings of ventilating passages 42, 44 are adjusted internally autonomously by a valve 56 in the operating rod 53 so as to maintain the target value of the differential pressure (PdH-PdL) between the two pressure monitoring points determined by electromagnetic force F from a solenoid part 52.
Patent KR-20020065973-A (KR)
Title: Key input device capable of health diagnosis and health diagnosing system using the same
Inventor: PARK SEUNG HUN
IPC: G06F3/02
Filed: 2001-02-08
Abstract: PURPOSE: A health diagnosis system is provided to extract health data and to communicate the extracted health data over a network by installing health diagnosis devices at a keyboard so that it can diagnose a health state of a computer user without other special terminal. CONSTITUTION: The system includes a keyboard(100). The keyboard(100) comprises a key matrix controller(110), a health data reader(120), a clock generator(109), a key matrix(105) and a transceiver(112). The transceiver(112) communicates data between a computer communication module(190) and the key matrix controller(110). The key matrix(105) operates original functions of a conventional keyboard, for example, flows an electrical current if a switch is pushed or stops the flow of the electrical current if a switch is not pushed. The key matrix controller(110) receives signals from the key matrix(105), determines which key or key combination is pushed, and converts it into a computer readable signal. The health data reader(120) reads health data of a computer user, and offers the read data to the key matrix controller(110). The key matrix controller(110) converts the read health data into a computer readable signal. So one key matrix controller(110) controls the health data from the health data reader as well as the key matrix signal from the key matrix(105).
Patent KR-20010083234-A (KR)
Title: High-temperature high-pressure processing method for semiconductor wafers, and an anti-oxidizing body used for the method
Inventor: KADOGUCHI MAKOTO
IPC: H01L21/223
Filed: 2001-02-22
Abstract: PURPOSE: To prevent a surface oxidation of a semiconductor wafer from being generated. CONSTITUTION: In the high-temperature and high-pressure treating method of a semiconductor wafer, the wafer is charged in a pressure container to treat the wafer under the atmosphere of high-temperature and high-pressure gas. The wafer and an oxidation preventive material are mixedly provided on a wafer support tool to make the wafer and the oxidation preventive material support by the wafer support tool, and the wafer and the oxidation preventive material are subjected to high-temperature and high-pressure treatment. The oxidation preventive material is formed of a material of a nature to facilitate to diffuse oxygen in the interior of the material and is formed in a plate form of the same form as that of the wafer in a plane view.
Patent KR-20020074746-A (KR)
Title: Anticancer agents containing antigenotoxic and immunostimulation peptides produced from the hydrolyate of silkworm cocoon
Inventor: HYUN CHANG KEE
IPC: A23L1/305
Filed: 2001-03-21
Abstract: PURPOSE: Provided are anticancer agents having peptides produced by hydrolysis of fibroin which is obtained by extracting silk thread or waste silk thread of silkworm cocoon as a main component. These peptides can be applied to medicine and functional food having anticancer activity, so that it can contribute to the development of medicines useful for prevention and treatment of cancer. CONSTITUTION: These anticancer agents contain peptides produced from silkworm cocoon, wherein the peptides are prepared by the following process consisting of: treating silk thread or waste silk thread of silkworm cocoon with 1 to 10% sodium carbonate or sodium bicarbonate to remove sericin, and treating the obtained fibroin with acid such as hydrochloric acid or oxalic acid or protease.
Patent KR-20020078607-A (KR)
Title: Mobile communication device having extractive and bendable microphone
Inventor: KANG JEONG MIN
IPC: H04B1/38
Filed: 2001-04-06
Abstract: PURPOSE: A mobile communication terminal having a bending-type or an antenna-type microphone is provided to pull out a microphone from a body as an antenna, and to bend the pulled microphone, thereby enabling a user to easily control a position of the microphone. CONSTITUTION: A speaker(210) outputs a voice. A liquid crystal display device(220) outputs characters. A keypad(230) has various number keys and functional keys. A microphone(240a) outputs a voice. When the microphone(240a) is bent, the microphone(240a) tends to be bent to a right side or a left side. When a microphone(240b) is pulled out, a connector for connecting a body of a mobile communication terminal with the microphone(240b) pulls out the microphone(240b) from the body as an antenna. The connector is freely bent.
Patent KR-20020083305-A (KR)
Inventor: WON IN HO
IPC: F03D3/00
Filed: 2001-04-26
Abstract: PURPOSE: A rotating shaft is formed as a parallel shaft, and two globe shape rotation device are manufactured to connect the rotation shaft, thereby obtaining strong rotation performance. CONSTITUTION: Supports(1,3) are installed in both side of a middle support(2). Shaft supporting pipes(5,5') are formed at the heads of the supports. Parallel shafts(4,4') are installed to rotate together in a connecting pipe formed on the middle support(2). Wing supporting plates(8,8') are installed in the parallel shaft, and symmetrical wings(6) are installed.
Patent KR-20010103648-A (KR)
IPC: H01M50/105
Filed: 2001-05-07
Abstract: 리튬이온2차전지에 필적하는 충방전싸이클특성을 갖고, 신뢰성이 높은 리튬폴리머2차전지를 얻을 수 있도록, 양극, 음극 및 세퍼레이터가 적층되어 형성된 전극군의 총공극체적의 70∼90%를 비수(非水)전해액으로 채운다.
Patent KR-20020085249-A (KR)
Title: Methods for preparing regeneration materials of plastic inhalation manifold
Inventor: CHOI CHI HUN
IPC: B29B17/00
Filed: 2001-05-07
Abstract: PURPOSE: A method for manufacturing regenerated materials of a plastic inhalation manifold is provided to improve a shock strength of the regenerated material and to compensate the thermal decomposition of plastic resins. CONSTITUTION: The method for manufacturing regenerated materials of a plastic inhalation manifold comprises the steps of; crushing waste plastic inhalation manifold into a particle size of 5-20 mm with a low speed crusher after removing different kinds of materials from it; repeatedly crushing the manifold pieces into a size of 1-4 mm with a high speed crusher; adding diglycidyl ether of bisphenol A or 1,4-phenylene bis(2-oxazoline) into the crushed materials itself or resin mixed materials to obtain a mixture; and performing an extrusion and injection molding to complete pellet shaped regenerated materials.
Patent KR-20020086988-A (KR)
Title: An apparatus for producing a nanopodwer
Inventor: JUNG YONG HUN
IPC: B22F9/00
Filed: 2001-05-12
Abstract: PURPOSE: An apparatus for manufacturing nanopowder is provided which not only maintains physical properties of metal nanopowder and ceramic nanopowder that are conventionally manufactured, but also maximizes productivity of the nanopowder. CONSTITUTION: The apparatus for manufacturing nanopowder comprises an electrode part for exploding the metal wire by impressing high density current inputted to a metal wire(18) inside a chamber(28); a metal wire supply part for supplying the metal wire into the chamber in such a way that a plurality of metal wires are alternately supplied into the chamber; a transformation part(30) for lowering stiffness of the plurality of metal wires that are supplied into the chamber; and a damping part(50) for suppressing transmission of a shock wave to the surrounding other metal wires generated during explosion of each of the metal wires, wherein the electrode part comprises gap electrodes(10,12), a flat plate type electrode(14), and grounding electrodes(16,17,19), and the transformation part(30) is installed in such a way that the metal wire(18) is supported to a part which is supplied into the chamber by an insulator(40), wherein the same number of transformation parts as the metal wires supplied into the chamber(28) are respectively installed on the same line as a transfer direction of the metal wires transferred by the metal wire supply part.
Patent KR-20020067878-A (KR)
Inventor: SONG MEEN KYU
IPC: A47C27/00
Filed: 2001-05-14
Abstract: PURPOSE: Provided is a heating cushion for a chair in a school room or an office using a battery, thereby heating easily. It is normally used like a conventional cushion, then when the weather is cold, it is heated by a battery and an electric wire. CONSTITUTION: The heating cushion(2) is characterized by comprising an electric wire(4) and a room(8) for the insertion of a battery thereinside, wherein the electric wire is characteristically coated. It is heated easily and simply by inserting a battery into the battery insertion room(8), when the weather is cold.
Patent KR-20020091399-A (KR)
Title: Metabolites of essential unsaturated fatty acids exerting anti-proliferative effect on human breast cancer cells
Inventor: CHO YUN HI
IPC: A61K31/20
Filed: 2001-05-30
Abstract: PURPOSE: Metabolites having breast cancer cell proliferation inhibiting activity, metabolized by 15-lipoxygenase from essential unsaturated fatty acid are provided which can be used as a therapeutic agent for treatment of breast cancer with low toxicity by inhibition of proliferation of a breast cancer cell line. CONSTITUTION: These metabolites are metabolized by 15-lipoxygenase from essential unsaturated fatty acid such as linolenic acid or linoleic acid and contain 15-HETrE(15-hydroxy-8,11,14-eicosa-tetra-enoic acid) as a linolenic acid metabolite which inhibits proliferation of a hormone-dependent breast cancer cell line and 13-HODE(13-hydroxy-9,11-octadeca-di-enoic acid) as a linoleic acid metabolite which inhibits proliferation of a hormone-dependent and non-hormone-dependent breast cancer cell line.
Patent KR-20020091868-A (KR)
Title: Measuring system for solenoid valve
Inventor: SONG MIN HO
IPC: G01M13/00
Filed: 2001-06-01
Abstract: PURPOSE: A solenoid valve testing system is provided to achieve improved stability of motor vehicle by controlling solenoid valve in a stable and smooth manner. CONSTITUTION: A solenoid valve testing system comprises a solenoid valve(20) which opens/shuts so as to control flow of hydraulic pressure; a solenoid valve driving unit(30) for driving the solenoid valve in accordance with a control signal output from a control unit(10); an operation detection unit(40) for detecting data signals which are output in accordance with the operating state of the solenoid valve; and the control unit for outputting control signals for controlling operation of the solenoid valve, to the solenoid valve driving unit, and judging abnormality of the solenoid valve by the data signals detected by the operation detection unit. The control unit includes a display(15) for displaying the data signals detected by the operation detection unit so as to allow a user to monitor operating state of the solenoid valve.
Patent KR-20020093396-A (KR)
Title: Deionizer water manufacturing apparatus and its processing
Inventor: KIM GYEONG BAE
IPC: C02F1/469
Filed: 2001-06-08
Abstract: PURPOSE: An ultra pure water generating apparatus which improves deionization efficiency of second deionization equipment by supplying the mixed water of returned deionized water from supply part and deionized water from the first deionization equipment to second deionization equipment is provided. CONSTITUTION: The apparatus comprises a filter(110) which removes the adulteration of raw water; a first deionization equipment(120) which deionizes raw water with a first resistivity; a second deionization equipment(130) which deionizes ultra pure water from the first deionization equipment with the second resistivity of which resistivity is higher than the first resistivity; a supply part(160) which supplies ultra pure water from the second deionization equipment to usage part; the last deionization equipment(150) which is installed between the second deionization equipment and supply part and deionizes ultra pure water from the second deionization equipment with the third resistivity of which resistivity is higher than the second resistivity; a return pipe(170) which returns residual ultra pure water from supply part between the first and the second deionization equipments for supplying mixed ultra pure water from supply part and deionized water from the first deionization equipment to the second deionization equipment.
Patent KR-20020095656-A (KR)
Title: Vehicle identification number displaying device and controled method thereof
Inventor: OK CHI GYU
IPC: B62D65/00
Filed: 2001-06-15
Abstract: PURPOSE: A vehicle identification number display unit and the control method are provided to facilitate detection of vehicle identification numbers carved inferiorly by photographing the carved state of the vehicle identification number through the vehicle type and displaying the analyzed result. CONSTITUTION: A vehicle identification number display unit comprises an image-photographing unit(30) of photographing the carved vehicle identification number; an image control unit(40) of having image data corresponding to the vehicle identification number preset by the vehicle type, comparing the carved position and state of each letter corresponding to the preset vehicle identification number with the image data photographed by the image-photographing unit, and generating an indication drive control signal; an image display unit(50) of indicating the image data relevant to the vehicle identification number driven and compared according to the input of the indication drive control signal supplied to the image-processing control unit. Therefore, inferiority of the carved state of the vehicle identification number is easily defected.
Patent KR-20020016500-A (KR)
Title: A method for sealing a flat panel display in vacuum atmosphere
Inventor: PARK JAE HONG
IPC: H01J9/26
Filed: 2001-06-18
Abstract: PURPOSE: A method for sealing panels in a vacuum furnace is provided to improve jointing power at a joint of glasses. CONSTITUTION: A method for sealing two panels includes pre-processing by heating a frit coated glass within a vacuum chamber under a first condition to remove binder and gas from the frit coated glass, and sealing by heating the pre-processed frit coated glass and its counterpart second glass within the vacuum chamber under a second condition. Before pre-processing, a glass is cleaned by plasma cleaning or thermal cleaning. During the pre-processing, a frit is coated on some part of the cleaned glass with dispensing or screen printing, and the frit coated glass is heated in the vacuum chamber at a temperature over 300°C for about 10 minutes. The pre-processed glass and the second glass are fixed to each other with a clip and heated in the vacuum chamber at a temperature over 260°C for about 10 minutes.
Patent KR-20030000197-A (KR)
Title: A Timber Manufacturing Device
Inventor: JI YONG HO
IPC: B27L5/06
Filed: 2001-06-22
Abstract: PURPOSE: A timber processing apparatus is provided to easily and precisely cut timber in a desired size by using an engine saw without requiring additional device. CONSTITUTION: A timber processing apparatus(100) includes an engine saw mounting table(50) for mounting an engine saw(51), a supporting plate(40) coupled to the engine saw mounting table(50), a fuel container(61) positioned on the supporting plate(40), a lubricant container(62) positioned adjacent to the fuel container(61), and a base(30) hinged to a lower portion of the supporting plate(40). A blade of the engine saw(51) is installed downward in the engine saw mounting table(50) towards ground so as to cut timber lengthwise. The base(30) moves from one side of a main frame to the other side of the main frame by means of a conveying bolt. A pair of guide rods are provided to guide the movement of the base(30).
Patent KR-20030002845-A (KR)
Title: A method for forming photoresist pattern
Inventor: KIL MYEONG GUN
IPC: H01L21/027
Filed: 2001-06-29
Abstract: PURPOSE: A method forming a photoresist pattern is provided to prevent lifting or collapse of patterns by easily removing a photoresist layer coated at edge portions of a wafer. CONSTITUTION: After coating a photoresist layer on a wafer, a photoresist pattern is formed by sequentially performing soft baking, exposing, hard baking and developing. At this time, EBR(Edge Bead Rinse) processing is performed between the soft baking and the exposing. Also, WEE(Wafer Edge Exposure) processing is carried out between the exposing and the hard baking.