baber/WOPTO huggingface dataset:
Patent KR-20020039426-A (KR)
Title: Simulator for verifying Radio Protocol in a CDMA Mobile Communication System
Inventor: KANG CHANG SUN
IPC: H04B17/00
Filed: 2000-11-21
Abstract: PURPOSE: A simulator for verifying a wireless protocol in a CDMA mobile communication system is provided to verify a wireless protocol between a terminal and a base station effectively. CONSTITUTION: An after-edge system(200) generally manages with respect to a wireless protocol verification test and operation between a terminal and a base station. A front-end system(210) is connected to the after-edge system(200) through an Ethernet and performs an encoding and decoding with respect to a function necessary for connecting to the base station physically and an inputted signal. If a voice signal including a voice call setting and a command of a test operator is inputted in a simulator through the terminal, a CPU(260) instructs a process command with respect to the inputted voice signal. A vocoder processor(270) creates a voice frame using the voice signal inputted from the terminal in accordance with a command of the CPU(260). A physical layer processor(290) converts the voice frame into a format adapted to an ATM transmission after a medium connection function is performed by transmitting the voice frame to the CPU(260).
Patent KR-20010051936-A (KR)
Inventor: HAYASHI MASAKI
IPC: B65D65/02
Filed: 2000-11-24
Abstract: PURPOSE: To provide an electronic instrument, an outer cover and a cloth for the cover designed excellently and also to provide a production method of such electronic instrument. CONSTITUTION: A color image data photographed by a digital camera 20 is transmitted to a personal computer 23 to be stored in an inside memory. The computer 23 is programmed with an application software for controlling an inkjet instrument 26, and the data stored is printed on the cloth of a cloth roll 28 to be printed. The printed cloth is cut 31 according to the size of the speaker net of an electronic instrument to be used. The cut cloth is applied 33 to the speaker net 13 and with this, a cover 12 is assembled 34. The cover 12 is mounted at a position covering the speaker of an instrument main body 2, and this is sold to a user as a product 35, i.e., a radio cassette recorder.
Patent KR-20020041177-A (KR)
Title: A Method of management for a home-page of an office of dong
Inventor: MIN GUEN SIK
IPC: G06F17/00
Filed: 2000-11-27
Abstract: PURPOSE: A method for managing a homepage of a village office is provided to efficiently manage a homepage allocated from a local server distributed and arranged to each area by enabling each local server to manage a plurality of village office, by enabling clients to click an HTML document, thereby enabling the clients to automatically be connected to civil servants in charge. CONSTITUTION: Each local server constructs a plurality of homepage(S1). Each local server stores URL information of the homepages and data information in each database and transmits the information to a main server(S2). In case that an arbitrary client connects to the main server, the main server transmits main page information to each client computer(S3). Clients input searching information using input devices connected to the client computers(S4). The main server extracts information on a village office to be connected(S5). The information is read from the database(S6). The information read from the database is transmitted to the client computers(S7). In case that the clients input information through the input devices, the information is received and analyzed(S8). Command execution results are transmitted to the client computers(S9).
Patent KR-20020044355-A (KR)
Title: Sealing structure of hook button for telephone
Inventor: JUN HUI HO
IPC: H04M1/06
Filed: 2000-12-05
Abstract: PURPOSE: A sealing structure for a hook button in a telephone is provided to eliminate the connection inferiority between components and to stabilize call quality by prevent water from percolating through the crack between a main body and a hook button. CONSTITUTION: A hook button(130) is installed so as to ascend and descend on the upper surface of a main body(100) forming a mounting part(101). The hook button(130) comprises a body located at the inner side of the main body(100) and a head part located at the external side of the main body(100). The head part comprises the first head part, the second head part, and the third head part. Therefore, if a receiver is mounted on the mounting part(101), the receiver pushes the head so that the hook button(130) can descend. A hook switch(140) is fixed to a PCB(110) located right under the hook button(130). Accordingly, if the hook button(130) descends, the hook switch(140) is disconnected from the PCB(110) so that a call impossible state can be made. If the hook button(130) ascends, the hook switch(140) is connected with the PCB(110), so a call possible state is made.
Patent KR-20020044824-A (KR)
Title: Method of Fabricating Semiconductor Device Employing Copper Interconnect Structure Having Diffusion Barrier Stuffed with Metal Oxide
Inventor: KIM KI BUM
IPC: H01L21/285
Filed: 2000-12-06
Abstract: PURPOSE: A method for fabricating a semiconductor device having a structure of a copper wire by filling a metal oxide into a grain boundary of a diffusion barrier is provided to form the semiconductor device having the copper wire for commercial use by using a structure for filling the grain boundary. CONSTITUTION: A dielectric film(20) is formed on each upper portion of substrates(10,20). A via pattern is formed on the dielectric film(20). A TiN thin film(32) as a diffusion barrier is formed on the dielectric film(20) including the via pattern. Oxygen is filled into a grain boundary of the TiN thin film(32). An aluminium thin film(34) as an intermediate metal layer(32) is deposited by using a CVD(Chemical Vapor Deposition) method. A copper layer is deposited thereon by using a PVD(Physical Vapor Deposition) method or an electroplating method or an MOCVD(Metal Organic Chemical Vapor Deposition) method. A copper wire pattern(50) is formed by performing a planarization process.
Patent KR-20020048005-A (KR)
Title: Heater assemble of drawer type washing machine
Inventor: JUN SI MUN
IPC: D06F39/04
Filed: 2000-12-15
Abstract: PURPOSE: A heater assembly of a drawer type washing machine is provided to prevent the sealing problems or the leakage of water of an outer tub by attaching the heater assembly to an outer surface of the outer tub by a heater mounting element, wherein the electric leakage or the corrosion of the heater is prevented. CONSTITUTION: A heater assembly(16) of a drawer type washing machine includes a heater mounting element(20) attached to a lower outer peripheral surface of a washing tub for heating the water stored in the washing tub, a plane heater(24) inserted into the water mounting element and generating heat as power is applied, and heater terminals(22) mounted at both ends of the plane heater for applying the power to the heater.
Patent KR-20020051317-A (KR)
Title: Method For Producing Molten Pig Iron In Blast Furnace
Inventor: JUNG SEOK GWANG
IPC: C21B5/00
Filed: 2000-12-22
Abstract: PURPOSE: A method for operating a blast furnace is provided to increase recovery ratio of sintered ore by reinforcing reduction degradation index in qualities of the sintered ore used as a principal raw material in the blast furnace operation. CONSTITUTION: In a method for operating a blast furnace in which hot metal is manufactured by charging sintered ore into the blast furnace as a principal raw material, the method comprises the process of charging into the blast furnace sintered ore in which small grain sintered ore having a reduction degradation index of 27 to 34 and a grain size of 3 to 5 mm is mixed to a maximum mixed amount for radically increasing air-permeability resistance in the relation of the mixed amount of the small grain sintered ore with the air-permeability resistance index, wherein an average grain size of the sintered ore mixed with the small grain sintered ore having a grain size of 3 to 5 mm is from 18 to 20 mm, and a mixing ratio of the small grain sintered ore having a grain size of 3 to 5 mm is 6 wt.% or less.
Patent KR-20020052661-A (KR)
Title: A triodic rectifier switch device
Inventor: LEE CHUNG HUN
IPC: H01L27/04
Filed: 2000-12-26
Abstract: PURPOSE: A TRS(Triodic Rectifier Switch) device is provided to fabricate the TRS device by using a diode formed with a semiconductor layer arranged between two different layers. CONSTITUTION: A TRS device used as a negative switch is formed with two schottky diodes, one resistance, and wiring. The schottky diode is formed with a lower electrode(3), a semiconductor layer(5), and an upper electrode(1). The lower electrode(3) as the first layer is shared by two diodes. A schottky contact is formed by separating the upper electrode(1) as the second layer of two diodes. The lower electrode(3) as the first layer is formed by a material having a work function of 4.5eV and less. The upper electrode(1) as the second layer is formed by the material having 4.5eV or more work function. The schottky diode is formed by a semiconductor layer arranged between the first layer(3) and the second layer(1).
Patent KR-20010091878-A (KR)
Title: Ferulic acid derivative, and liquid crystal material, cation detecting element, anion detecting element, ion conducting material and electrolyte, each using the ferulic acid derivative
Inventor: MONOBE HIROSATO
IPC: C07C255/55
Filed: 2000-12-27
Abstract: PURPOSE: Provided are a ferulic acid derivative produced from ferulic acid as a raw material and exhibiting characteristic properties expected to find extensive utility and generate a great demand therefor, and a liquid crystal derivative, a cation detecting element, an anion detecting element, an ion conducting material and an electrolyte, using the ferulic acid derivative. CONSTITUTION: The ferulic acid derivative is represented by the formula 1. In the formula 1, R represents a polyethylene glycol group, a crown ether group or an azacrown ether group. The liquid crystal liquid derivative is represented by the formula 1. The liquid crystal has at least member selected from the group consisting of alkali metal ions, alkali earth metal ions and transition metal ions coordinated with the ferulic acid derivative represented by the formula 1. The detecting element is formed by the ferulic acid derivative and intended for detecting at least one species of cation selected from group consisting of alkali metal ions, alkali earth metal ions and transition metal ions.
Patent KR-20010022550-A (KR)
Title: 유압시스템과 브레이크 제어시스템의 모델링을 위한 장치와 방법
IPC: F15B19/00
Filed: 1999-02-06
Abstract: 유압시스템에서 압력과 체적변경을 위한 방법과 장치의 반응속도를 중앙체적저장소와 연결된 두개의 주변체적저장소로 증가시키기 위해서, 평가는 최소한 시간적인 모델에 근거하고 있으며, 동일한 시간에 주변체적저장소(1,2)가 직접 서로 연결되거나 아니면 연결되어 있지 않은지에 무관하게 상기 모델에 주변장치의 직접연결관(14)이 고려된다.
Patent KR-20010023144-A (KR)
IPC: C12Q1/60
Filed: 1998-08-25
Abstract: Quantitating high density lipoprotein (HDL) cholesterol comprises: (a) adding to serum: (i) a polyoxyethylene alkylene phenyl ether, or polyoxyethylene alkylenetribenzyl phenyl ether surfactant; (ii) an enzyme reagent for assaying cholesterol; and (iii) optionally a substance capable of inhibiting the reaction of cholesterol in the lipoproteins with (ii); and (b) determining the amount of cholesterol reacted within a period of time. - Quantitating high density lipoprotein (HDL) cholesterol comprises: (a) adding to serum: (i) a polyoxyethylene alkylene phenyl ether, or polyoxyethylene alkylenetribenzyl phenyl ether surfactant; (ii) an enzyme reagent for assaying cholesterol; and (iii) optionally a substance capable of inhibiting the reaction of cholesterol in the lipoproteins with (ii); and (b) determining the amount of cholesterol reacted within a period of time. An independent claim is included for a kit for quantitating high density lipoprotein (HDL) cholesterol comprising (i)-(iii) above.
Patent KR-20010023968-A (KR)
Title: 고압방전램프 및 조명장치
IPC: H01J61/88
Filed: 1999-07-14
Abstract: 본 발명의 고압방전램프는, 투광성 세라믹 방전용기(1)와, 급전도체(2)와, 1쌍의 전극(3)과, 세라믹 봉지용 복합제의 시일(4)와, 방전매체를 구비하고 있다.  방전용기는, 내용적이 0.1cc 이하이고, 전극은 그 선단과, 투광성방전용기의 축선에 대해 직각이고 선단을 포함하는 면내에 있어서의 투광성 방전용기의 내면과의 사이의 거리 d1이 1.0mm 이상이다.
Patent KR-20010040252-A (KR)
IPC: H04W72/12
Filed: 1998-08-21
Abstract: 본 발명은 상기 데이터 패킷이 고정 수의 타임 슬롯들로 이루어진 타임 프레임 안에 있는 상기 데이터 패킷이 전송되며 상기 이동국(5)이 다수의 연속적인 타임 슬롯들 안에 있는 데이터 패킷을 전송할 수 있으며, 상기 이동국(5)이 실 기지국과 연결되어 있는 반면, 상기 실 기지국(1)의 전송 유니트(3)가 설정된 타임 프레임 동안 상기 이동국(5)에 제어 데이터 패킷을 전송하거나 또는 어떠한 데이터 패킷도 전송하지 않으며, 적어도 하나의 기지국(1)과 이동 무선 전화 시스템의 적어도 하나의 이동국(5) 사이의 데이터 패킷의 전송을 위한 방법 및 시스템에 있어서, 설정된 타임 프레임보다 긴 타임 인터벌이 상기 이동국이 타이밍 데이터 패킷의 수신을 위해 및/또는 이웃 기지국들(9)의 신호 레벨의 측정을 위해 상기 이동국의 수신 유니트(6)에 이용되는 것을 특징으로 하는 데이터 패킷의 전송을 위한 방법과 시스템에 관한 것이다.
Patent KR-20010015723-A (KR)
Title: 인성이 개선된 폴리아세탈 조성물
IPC: C08L59/00
Filed: 1998-10-08
Abstract: 개선된 인성, 내마모성 및 유동성을 갖는 폴리아세탈 조성물이 개시된다.  폴리아세탈 조성물은 100 중량%의 폴리아세탈, 및 실온에서 탄성 영역을 형성하는 무정형 중합체로 이루어진 중심부를 가지며, 2개의 말단에 분자량 2000 이상의 폴리에틸렌 글리콜 사슬을 갖는 블록 공중합체 약 0.5 내지 5 중량%를 함유한다.
Patent KR-20010031536-A (KR)
IPC: A23L29/20
Filed: 1998-10-16
Abstract: The invention concerns the use, in dry form, of a combination of substantially amorphous microfibrils with a crystallinity index not more than 50%, with at least a polyhydroxylated compound, as additive for food formulations, the content of this combination being more than 0% and less than 20% by weight relative to the total weight of the food formulation.
Patent KR-20010086215-A (KR)
Title: 부드러움이 탁월한 신체 세정 와이프 물품
IPC: A61Q1/02
Filed: 1998-11-13
Abstract: 본 발명은 부드러움, 감촉 및 세정성이 탁월한 신체 세정 와이프 물품에 관한 것이다.  본 발명의 와이프는 기재, 및 상기 기재 상에 기재의 약 100 내지 약 400 중량%  정도로 코팅되거나 함침된 수성 액체 세정 조성물을 포함한다.  기재는 습식엉킴 섬유로부터 형성되는 단층의 부직 기재이다.  기재를 포함하는 베이스 표면의 상당 부분에 복수의 별개의 융기된 섬유 영역을 포함하는 삼차원 패턴이 존재한다.  융기된 섬유 영역은 베이스 표면의 밀도와 실질적으로 동일한 밀도를 가진다.  융기된 섬유 영역은 섬유 전이 영역에 의해 베이스 표면에 결합되어 있다.  수성 액체 세정 조성물은 유효량의 세정 계면활성제를 함유한다.
Patent KR-20010034164-A (KR)
Title: Ｃｄｍａ 통신시스템에서의 이동국 지원 타이밍 동기 방법
IPC: H04B1/7075
Filed: 1999-01-15
Abstract: 본 발명에서, 종속 기지국(64)은 기준 기지국(62) 및 종속 기지국(64)사이의 소프트 핸드오프 영역에서 이동국(60)으로부터 그리고 이동국(60)에 의해 수신된 메시지를 통해 기준 기지국(62)과의 동기를 달성한다.  첫째, 이동국(60) 및 기준 기지국(62)사이의 라운드 트립 지연은 기준 기지국(62)에 의해 측정된다.  일단 이동국(60)이 종속 기지국(64)으로부터의 신호와 동기를 획득하면, 이동국(60)은 기준 기지국(62)으로부터 이동국으로 전송되는 신호의 시간량과 종속 기지국(64)으로부터 이동국으로 전송되는 신호의 시간량사이의 차이를 측정 및 보고한다.  마지막 측정은 이동국(60)으로부터 역방향 링크 신호가 수신되는 시간과 이동국(60)으로 신호가 전송되는 시간사이의 시간차이를 종속 기지국(64)에 의해 행해진다. 여기서 더 상세히 기술되는 일련의 계산은 종속 기지국(64)사이의 시간차이를 결정하기 위하여 측정된 시간값을 이용하여 행해지며, 종속 기지국(64) 타이밍의 조절은 측정된 시간값에 따라 실행된다.
Patent KR-20010042035-A (KR)
IPC: D21F11/14
Filed: 1999-03-12
Abstract: A paper machine for manufacturing soft paper comprises a press section (3) with a shoe press nip, through which a substantially impermeable belt (16) and a felt (15) run with the fibrous web (1) enclosed between them, a drying cylinder (5) and a transfer roll (17) forming a nip for transfer of the web to the drying cylinder. According to the invention the belt (16) comprises a carrier with a compressible polymer coating having a hardness of 50 to 97 Shore A, which polymer coating has a web-contacting surface with a degree of roughness in unloaded state of Rz=2-80 m, measured in accordance with ISO 4287, and a lower degree of roughness of Rz=0-20 m when the polymer coating is compressed by linear load of 20-220 kN/m on the belt as measured in a non-extended press nip, the belt and the web-carrying felt being arranged to run together not until they enter the press section, the belt running directly to the press section. Further, the belt runs from the shoe press to the drying cylinder to carry the web to the transfer nip, the felt running away from the belt before a water film formed in the nip on the belt breaks up. A device (31) is also provided for applying adhesive on the drying cylinder.
Patent KR-20010071545-A (KR)
Title: 탄화수소-페놀수지 및 에폭시수지의 제조방법
IPC: C08G61/02
Filed: 2000-04-28
Abstract: 산촉매의 존재하에 페놀류와 탄소-탄소 이중결합을 2개 이상 갖는 불포화 환상탄화수소를 반응시키는 것에 대해서 (1) 전체 반응생성물에 대한 에테르형 생성체의 몰분율을 0.1 이상으로 하는 공정 및 (2) 상기 반응을 진행시키고, 생성된 에테르형 생성체를 실질적으로 소멸시키는 공정을 포함하는 방법으로 행하므로써 색상이 양호한 탄화수소-페놀수지를 효율 좋게 제조할 수 있다. 또한 상기 탄화수소-페놀수지에 염기촉매의 존재하에서 에피할로히드린을 반응시키는 것에 의해 색상이 우수한 에폭시수지가 얻어진다.
Patent KR-20020057407-A (KR)
Title: Liquid crystal display device with a function of brightness control and driving method and apparatus for therefor
Inventor: KWON O JONG
IPC: G02F1/133
Filed: 2001-01-04
Abstract: PURPOSE: A liquid crystal display having a luminance level control function, a method and an apparatus for driving the liquid crystal display are provided to control the luminance of a back light according to the brightest data among R, G and B video data items to obtain clear pictures. CONSTITUTION: A liquid crystal display having a luminance level control function includes a timing controller(100), a back light driver(200), a back light unit(300), a gate driver(600), a data driver(400), and an LCD panel(700). The timing controller stores RGB video data items for a m frames, selects the maximum value from the three video data items to store the maximum value for n frames, and averages the maximum data value to generate a luminance level control signal according to the averaged data. The back light driver outputs a back light driving voltage according to the luminance level control signal. The back light unit outputs lights according to the driving voltage. The gate driver outputs a scan signal, and the date driver outputs a video signal. The LCD panel displays the video signal according to the lights emitted from the back light unit.
Patent KR-20020059882-A (KR)
Title: Pump for Cement Mortar
Inventor: CHOE KWANG SOO
IPC: F04B15/02
Filed: 2001-01-08
Abstract: PURPOSE: A pumping device for cement mortar is provided to stably supply cement mortar to workings. CONSTITUTION: A two-way cylinder(10) is made of material permeable for magnetic force and has a first sensor(S1) and a second sensor(S2) movably installed on brackets(17,18) coupled to a fixing support(16) lengthily installed on an outer surface thereof to detect pumping work of one side piston(12) and the other side piston(13) installed in the two-way cylinder to integrally reciprocate with magnetic force induced by a magnet(14) installed on a central head(11) placed between the one side piston and the other side piston.
Patent KR-20020060442-A (KR)
Title: Organic electroluminescent device comprising crosslinked polyimide layer as inter organic layer
Inventor: HAN GI JONG
IPC: C09K11/06
Filed: 2001-01-11
Abstract: PURPOSE: Provided is an organic electroluminescent device containing a crosslinked polyimide layer as an organic middle layer, which is excellent in heat resistance and stability. CONSTITUTION: The organic electroluminescent device contains the organic middle layer containing the crosslinked polyimide thin film represented by the formula 1, wherein the crosslinked polyimide thin film is formed by using a crosslinking agent, dianhydride, and diamine in the ratio of 0.02:1:0.98-0.3:1:0.7. In the formula, A, B, and X are selected from the group consisting of alkyl, aryl, alkylaryl, heterocyclic, alkoxy, aryloxy, carbon, hydrogen, nitrogen, sulfur, and phosphorus, y is an integer of 3-8, and n and m are integers of more than 1, wherein m is less than nym.
Patent KR-20010076247-A (KR)
Title: Semiconductor device and manufacturing of semiconductor
Inventor: IWASAKI TOMIO
IPC: H01L27/105
Filed: 2001-01-12
Abstract: PURPOSE: To solve problems such as discontinued tungsten wiring and decrease in reliability and yields. CONSTITUTION: This semiconductor device has a capacitor. In the capacitor, a first electrode 15, an oxide film 16 that comes into contact with the first electrode and has high permitivity or ferroelectricity, and a second electrode 17 that comes into contact with the oxide film are formed in this order at one main surface side of a silicon substrate 1, where a metal wiring layer is formed. In this case, the material of the metal wiring layer is tungsten, in which molybdenum is added.
Patent KR-20020062453-A (KR)
Title: Power interception apparatus of liquid crystal display for laptop computer and its method
Inventor: CHA SUN CHEOL
IPC: G06F1/32
Filed: 2001-01-20
Abstract: PURPOSE: A method and apparatus for the power cut-off of the LCD(Liquid Crystal Display) for a notebook PC is provided to save the battery of the notebook PC, when a user closes a screen of the LCD at a specified angle, by embedding a magnetic switch in the LCD for the notebook PC. CONSTITUTION: The regular-arranged magnets(12) surround a hinge axis of a display unit and work for the displacement measurement. The other magnet adjacent to the magnets works for the rotation sensing. The magnetic switch(14) corresponding to the magnets detects the change of a magnetic field and converts the change into a signal as a magnetic ring of the hinge axis is rotated. The other magnetic switch(16) corresponding to the other magnet works for the rotation sensing.
Patent KR-20020066075-A (KR)
Title: A method of high cell-density culture of Escherichia coli by overproducing Mlc protein
Inventor: CHO SANG HUI
IPC: C12N15/09
Filed: 2001-02-08
Abstract: PURPOSE: A method for high cell-density culture of Escherichia coli by over producing Mlc protein is provided, thereby the mutant strain capable of over expressing Mlc protein can be used for increasing the amount of a recombinant protein produced. CONSTITUTION: The method for over-expressing Mlc protein comprises inducing mutation of a 10 region in the transcription-controlling regions and the Shine-Dalgarno(SD) sequence, which is a ribosome-binding site, of the making large colonies(mlc) gene in E. coli, in which the method may further comprise mutation of a transcription-initiating codon of the mlc gene from GTG to ATG; the 10 region is a region from 13 to 8 of the mlc gene sequence and is substituted with a nucleotide sequence of TATAAT; the SD sequence is a sequence from +24 to +31 of the mlc gene sequence and is substituted with a nucleotide sequence of TAAGGAGGA; and the mlc gene sequence has the nucleotide sequence represented by SEQ ID NO: 1. A mutant SR754 (KFCC 11244) contains the mlc gene having mutated transcription-controlling region.
Patent KR-20020067373-A (KR)
Title: Smokestack have a tower
Inventor: JOO BYUNG JO
IPC: E04H12/28
Filed: 2001-02-16
Abstract: PURPOSE: Provided is a stack with observatory to improve images of incinerator so that building a separate tower is not necessary to install observatory as well. CONSTITUTION: The stack with observatory comprises: a chimney pot(2) for emitting smoke of incinerator(19); elevator shaft outside; a multistory resting room(4) and observatory connected with elevator(6) on top of the tower(1); a turntable for sightseeing landscape.
Patent KR-20020068679-A (KR)
Title: A method of forming resist patterns in a semiconductor device
Inventor: HYON MAN SOK
IPC: H01L21/027
Filed: 2001-02-22
Abstract: PURPOSE: A method for forming a resist pattern of a semiconductor device and a cleaning solution used for the same are provided to prevent a breakdown phenomenon of a resist pattern in a lithography process. CONSTITUTION: A photoresist(52) is applied on a wafer(51). The thickness of the photoresist(52) is 500 to 12000 angstrom. A soft bake process is performed under temperature of 80 to 120 degrees centigrade during 10 to 30 seconds in order to vapor a solvent. A mask is deposited thereon and an exposure process is performed. A post exposure bake process is performed under the temperature of 130 degrees centigrade during 90 seconds. A resist pattern is formed by developing the photoresist(52). A cleaning process is performed by using a pattern breakdown prevention solution(55). The pattern breakdown prevention solution(55) is formed by pentadecafluorooctanoic acid. The wafer(51) is dried by performing a drying process.