Patent DE-102011005707-A1 (DE)
Title: Coating substrates in a coating plant, comprises subjecting a material to be evaporated in an evaporation device in a first position of a first evaporation, and separating the material on a movable intermediate carrier
Inventor: GROSS HARALD
IPC: C23C14/24
Filed: 2011-03-17
Abstract: The method comprises subjecting a material to be evaporated in an evaporation device in a first position of a first evaporation, separating the material on a movable intermediate carrier, carrying the intermediate carrier in a second position (10) in spatial vicinity to a substrate (1) to be coated, subjecting the material deposited on the intermediate carrier by an energy input through a radiation of a second evaporation and separating the evaporated material on the substrate, performing a third evaporation of the evaporation material on the intermediate carrier and a deposition. The method comprises subjecting a material to be evaporated in an evaporation device in a first position of a first evaporation, separating the material on a movable intermediate carrier, carrying the intermediate carrier in a second position (10) in spatial vicinity to a substrate (1) to be coated, subjecting the material deposited on the intermediate carrier by an energy input through a radiation of a second evaporation and separating the evaporated material on the substrate, performing a third evaporation of the evaporation material on the intermediate carrier and a deposition, separating the material over the third evaporation in a fourth position on a disposal carrier, introducing the evaporation in the type of the first evaporation of a first material on the intermediate carrier and introducing the evaporation in the type of the first evaporation of a second material disposed on the first material, and mixing the first and second materials by the third evaporation. The third evaporation is carried out in a third position (12) by the energy input via the radiation, where the evaporated material is separated in the fourth position on another carrier than the substrate. The third evaporation takes place: with the evaporation material remained on the intermediate carrier after the second evaporation of the material from the intermediate carrier on the substrate; and before the second evaporation. The evaporation material is homogeneously separated on the intermediate carrier, and is supplied together with third evaporation of the intermediate carrier. The first and second materials are homogeneously separated on the intermediate carrier. The first evaporation material of a first time in the first position is evaporated by the first evaporation device and is separated on the intermediate carrier, which is movably arranged in the spatial vicinity to the evaporation device. The second evaporation material is evaporated by another evaporation device in the type of first evaporation, and is separated on the first separated evaporation material on the intermediate carrier, where a coating system consists of the first and second evaporation materials. The evaporation materials are evaporated in the second position and mixed on the substrate. The third position of the evaporation material is evaporated by the energy input via the radiation in a direction of movement of the intermediate carrier and is mixed and separated in a gas phase. The homogeneous separation of the evaporated material takes place in the fourth position. The intermediate carrier in the third position is heated by a radiation source on a side of the intermediate carrier lying opposite to the evaporated material. A mixture of the evaporated materials in the fourth position is separated on the intermediate carrier. The mixture is separated in constant stoichiometric composition on the substrate during the second evaporation in the second position. The evaporation material is evaporated during the third evaporation by the energy input via the radiation, is distributed over a duct (14) to the fourth position, and is separated in the fourth position on the intermediate carrier. An independent claim is included for a device for coating substrates in a coating plant.