baber/WOPTO huggingface dataset:
Patent JP-2005503274-A (JP)
IPC: B29C45/14
Filed: 2001-10-12
Abstract: The invention relates to the production of composite insulators consisting of a shank in the form of a bar or a tube, which is provided with a covering and which comprises plate-like screens which are distanced from each other. The covering and the screens are made of an elastomer material with high insulating qualities. As a result, the number, distance, form and size of the screens can vary from insulator to insulator. According to the invention, at least one injection mould ( 10 a , 10 b, 11 a , 11 b , 12 a , 12 b , 13 a , 13 b) for injecting a screen ( 2, 3, 4, 5, 19, 20, 21, 22 ) is arranged downstream from a device which is used to provide the shank ( 1 ) with a covering. The injection mould can be advanced in order to inject a screen upon the shank and opened in order to unmould said screen. An advancing device is also provided in order to displace ( 16 ) the shank ( 1 ) or the screen mould. Each time the shank ( 1 ) or the screen mould is displaced, the position of the latter with respect to the shank enables a subsequent screen to be injected.
Patent JP-2004512132-A (JP)
IPC: A61B17/16
Filed: 2001-09-06
Abstract: The surgical saw according to the present invention comprises an arm fixed by mounting the rear end portion thereof in a jaw of a handle; and a double saw blade part connected with the front end portion of the arm and having two saw blades arranged side by side in a certain distance. In case that the surgical saw is used in surgeries for cutting off cheek bones, the surgical saw can precisely cut off portions of the cheek bones in a width set in advance by precisely cutting off two positions of the cheek bones in a precise cutting-off length at the same time so that the portions of cheek bones can be conveniently cut off, the periods of time for surgeries can be reduced, and an occurrence frequency of surgery aftereffects due to different cutting-off widths for the left and right cheek bones can be reduced.
Patent JP-2004513569-A (JP)
Title: ピクチャーの鮮明さ強調のための適応的なクリッピング防止
IPC: H04N5/208
Filed: 2001-10-29
Abstract: コントラスト制御及びクリッピング装置は、ピクチャーの鮮明さ強調のため各画素に適用される強調の最大レンジを決定するように構成される。この最大レンジは、通常の畳込みカーネルモジュール及び利得制御モジュールによって決定される強調を制限するため使用される。好ましくは、最大レンジは、決定された畳込み値とは独立であり、ピクチャーの鮮明さ強調のため使用されるモジュール間での必要帯域幅を最小限に抑える。必要帯域幅が減少することによって、ハードウェアとソフトウェアの間で作業を効率的に分配できるようになり、全システムの設計作業が容易になる。マルチメディア・アプリケーションの場合、プロセッサとサブコンポーネント間で転送されるデータ量は、実質的に減少し、効率的な分配によって並行処理が実現し易くなる。強調の最大レンジは、計算的に簡単なアルゴリズムを使用して現在フィールド内の画素値に基づいて決定され、ピクチャーの鮮明さ強調のため使用されるモジュール間の時間的依存性によって生じる異常性は最小限に抑えられる。さらに、鮮明さ強調は、平均強調レンジ、全体雑音測定量などを含む全体的なピクチャーレベル特性に基づいて動的に調整される。
Patent JP-2004514511-A (JP)
Title: 火災鎮圧用不活性ガスジェネレータ
IPC: A62C5/00
Filed: 2000-11-30
Abstract: 【課題】不活性ガスを短時間に多量生産できるジェネレータを提供する。 【解決手段】ガスジェネレータは始動モータ１２、圧縮機、燃焼器２０及びタービン１８を備えるガスタービン装置と、ガスタービン装置に連結され、１次燃焼されたガスを再燃焼させ、火炎安定器２６を備える後方燃焼器２４と、後方燃焼器２４で燃焼されたガスを冷却させるためのスプレーノズル３４を備えた冷却チャンバ３０と、冷却チャンバ３０及びスプレーノズル３４で冷却されたガスをさらに冷却させるための気化器４２と、気化器４２で冷却され低い酸素濃度を有する不活性ガスを吐出させるための排気ノズル５２と、始動モータ１２、前記燃料ポンプ２２、燃焼器２０を制御するためのコントローラ５４により構成される。そのジェネレータは車輪に搭載され多様な地域で発生される火災を迅速に鎮圧することができる。 【選択図】図１
Patent JP-2004514853-A (JP)
IPC: F16C17/10
Filed: 2001-11-27
Abstract: Revolving actuator for hydraulic revolving a shaft, comprising a bowl rotor (3) arranged axially rotatable in a housing comprising two housing halves (1, 2), where the bowl rotor (3) is adapted to be connected with a shaft and thereby providing an upper spheric bearing for the shaft, passages thereby providing the housing halves (1, 2) with pressurized hydraulic fluid, the inner walls of the two housing parts (1, 2) thereby having a spheric shape and being sealingly abutting against the bowl rotor (3), the bowl rotor (3) comprising a circumferential recess (4) at the equator, the bowl rotor (3) having at least one partition wall (5) closing the recess (4), a cylinder limitation (8) being arranged in each recess (4) and being rigidly connected with the housing halves (1, 2), and hydraulic connections to the cylinder rooms (6, 7) established in the recesses (4) thereby ensuring supply of hydraulic pressure in the cylinder rooms (6, 7) at each side of each partition wall (5).
Patent JP-2004514532-A (JP)
Title: 手押しポンプ用アタッチメントを有する吸引分娩モニタ
IPC: A61B17/42
Filed: 2001-11-27
Abstract: 本発明は、負圧装置内の圧力をモニタし、記録することによって、胎児娩出を補助する要員を支援する。装置は、検出された圧力を記録できるようになっているモニタに取付け可能なケーブル、およびケーブルに結合された圧力検出装置を含む。圧力検出装置は管に結合され、したがって圧力検出装置は管内の圧力を検出する。さらに別の実施形態では、本発明は、負圧装置内の圧力をモニタし、記録するポンプ取付け式装置である。別の実施形態では、本発明は、吸引装置を胎児に取り付ける行為、負圧を検出する行為、および負圧を記録する行為を含む方法として実現される。
Patent JP-2004515445-A (JP)
Title: タングステンカーバイド製造方法
IPC: C01B32/949
Filed: 2001-12-20
Abstract: 本発明は、温度上昇で反応ガスと反応する開始材を含む粉末状タングステン−オキサイドのガス相直接浸炭化によるタングステンカーバイド生産の方法に関する。本発明の方法は、開始材を含んだタングステン−オキサイドが少なくとも６００℃に加熱され、そのあと最高温度である８５０℃まで温度が徐々に上昇する間に反応ガスと反応することに、さらに特徴付けられる。上記反応ガスは、ＣＯまたは２０体積％までのＨ ２ を含んでいるＣＯ／Ｈ ２ を使用した。
Patent JP-2004532510-A (JP)
Title: 銅−酸化物のダマシン構造の化学機械研磨方法
IPC: H01L21/304
Filed: 2002-01-23
Abstract: 【解決手段】ウエハに形成されたトレンチを有するような絶縁層と、絶縁層のトレンチの内部に位置する下側部分と下側部分及び絶縁層の上に重なる上側部分とを有するような金属層とを含んでなる金属のダマシン構造の化学機械研磨方法が提供される。方法は、金属層の上側部分を平坦化する第１の段階と、絶縁層と金属層の下側部分とを研磨する第２の段階とを備える。金属層の上側部分を平坦化する第１の段階においては、ウエハと研磨パッドとの接触モードにおいて、適用圧力ｐと相対速度ｖにて、ウエハと研磨パッドとを動かして、金属の除去速度を向上させる。第２の段階では、定常状態のモードにおいて、絶縁層と金属層の下側部分とを研磨して、最小の金属線のディシング及び絶縁層の過研磨にて、トレンチの内部に個別の金属線を形成する。 【選択図】図１
Patent JP-2004518181-A (JP)
Title: ディスプレイ
IPC: G09F13/00
Filed: 2002-01-29
Abstract: ディスプレイは、ディスプレイ照明装置とその制御手段とを備えている。ディスプレイ照明装置の制御手段は発生した光ビームの光強度を光感応性測定素子によって求め、これに依存してディスプレイ照明装置を制御する。光感応性測定素子はここでは直接にディスプレイ（例えばＣＯＧディスプレイコントローラまたはＣＯＧディスプレイドライバ段）内に組み込まれている。
Patent JP-2004524563-A (JP)
Title: コレステリック液晶光学本体およびその作製方法
IPC: G02F1/1335
Filed: 2001-11-19
Abstract: 光学本体は、コレステリック液晶材料を用いて作製されることができる。コレステリック液晶材料を含む少なくとも２種類の異なるコーティング組成物が、基板上にコーティングされる。各コーティング組成物の少なくとも一部は、光学本体の厚さ寸法に沿ったピッチの変化を形成するために、相互拡散させることができる。例えば、光学ディスプレイにおいて、反射偏光子としてこの光学本体を用いることができる。
Patent JP-2004530616-A (JP)
IPC: A61K49/18
Filed: 2002-03-04
Abstract: The present invention relates to the preparation and use of nanoparticles, in particular paramagnetic nanoparticles, and their use as contrast enhancers for NMR-based methods of examination. A significant increase in contrast (e.g. from 100 to 200%) takes place according to the invention. An aqueous or organic synthesis leads to small nanoparticles which have a narrow size distribution and can also be advantageously used for many other industrial applications.
Patent JP-2004523917-A (JP)
Title: 透明ガラスセラミックのレーザ誘起結晶体
IPC: C03C10/10
Filed: 2002-02-11
Abstract: 導波路構造体（２）は、ガラス体（１２）と、結晶相を育成するのに充分なエネルギーで所定のトラックを該ガラス体に照射することによって該ガラス体に形成された導波路パターン（１０）と、を有する。
Patent JP-2004534743-A (JP)
Title: ヘッジホッグ
IPC: A61P29/00
Filed: 2002-04-09
Abstract: ヘッジホッグシグナル伝達経路の調節因子又はヘッジホッグシグナル伝達経路の標的経路における調節因子を、Ｔ細胞介在型疾患若しくは障害の治療用薬剤の調製に使用する。
Patent JP-2004533239-A (JP)
IPC: C12Q1/68
Filed: 2002-04-11
Abstract: Novel neonatal SCN5A protein and fragments thereof.
Patent JP-2004533317-A (JP)
Title: 液状材料を微粒化する方法および装置
IPC: B05B17/06
Filed: 2002-05-09
Abstract: 【課題】高い操作圧力を必要としたり摩擦損失が大きいことなどの従来の超音波ガス式微粒化技術の問題点を解決する方法と装置を提供する。 【解決手段】液状材料を微粒化する装置であって、プレナムチャンバ（17）を起点とするガス流路（12）を有する超音波ガス式微粒化ノズル（11）を含み、前記流路が直線状であり、さらに、前記流路に複数の共鳴キャビティ（31）が配設された装置が提供されている。 【選択図】図４
Patent JP-2004520764-A (JP)
Title: 対話型アプリケーションの記録
IPC: H04N7/24
Filed: 2002-05-02
Abstract: 送信機と、該送信機から送信される信号を受信するように構成される少なくとも１つの受信機とを有する送信システム。送信されたストリーム中の報知データは、サイクルで送信される、データファイル及びディレクトリオブジェクトにより形成された１つ以上のデータカルーセルにおいて定義された、１つ以上のアプリケーションに付随され、ここで前記ファイル及びディレクトリオブジェクトの所定のグループは送信機においてそれぞれのモジュールへと形成され、各前記モジュールは全体として送信される。データオブジェクトの階層構造のルートを定義する各オブジェクトカルーセルに対して、前記ストリーム中に送信される、アプリケーションに関連する前記データオブジェクトの全体又は一部をそれぞれ定義するコンポーネントデータカルーセルについての識別子のリストがある。 前記受信機は、記録されるべき特定のアプリケーションの識別に際して、該アプリケーションについての前記受信されたファイルデータ及びディレクトリオブジェクトを識別し、次いで保存するために、識別子の前記リストを利用するように構成される。
Patent JP-2004212281-A (JP)
Title: Vehicle collision state detector
Inventor: OZAKI TATSUYA
IPC: B60R21/00
Filed: 2003-01-07
Abstract: <P>PROBLEM TO BE SOLVED: To determine a collision state over a wide range to provide a very effective countermeasure.  <P>SOLUTION: This vehicle collision state detector 10 is provided with side members 11R, 11L having rigidity balance projected to both left and right sides in a vehicle front part to be turned down inwards by a vehicular width-directional load, bumper stays 12R, 12L arranged in tip parts of the side members 11R, 11L, a bumper reinforcement 13 laid vehicular-width-directionally in front end parts of the bumper stays 12R, 12L as a start point and an end point, a wire 15 laid, with a prescribed initial tension, between the side members 11R, 11L along the bumper reinforcement 13, a right tension sensor 14R and a left tension sensor 14L for measuring left and right tensions of the wire 15, and a control unit 22 for conducting processing for determining the collision state, based on the balance of the tensions of the wire 15 measured by the right tension sensor 14R and the left tension sensor 14L.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004219484-A (JP)
Title: Display device
Inventor: TOMIZAWA ISAO
IPC: H04N13/395
Filed: 2003-01-09
Abstract: <P>PROBLEM TO BE SOLVED: To apparently arrange a plurality of display means at desired intervals, for example, when a plurality of display means can not be arranged at the desired intervals in a display device capable of displaying a stereoscopic picture.  <P>SOLUTION: The display device (1) is equipped with a plurality of display means (11 and 12) arranged in order on the observer's line of sight, and an optical distance setting means (21) arranged between two adjacent display means out of a plurality of display means and setting an optical distance between two display means to a specified value different from the optical distance when space between two display means is filled with air.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004220176-A (JP)
Title: Database search system and search method, method for forming data file used for search, and storage medium storing data file
Inventor: TERUI FUMIHIKO
IPC: G06F17/30
Filed: 2003-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To realize a high-speed search processing in retrieval of a document database accumulating a structured document file.  <P>SOLUTION: A search file 31 used for search processing by a search engine 30 and retaining information showing the corresponding relation between a keyword and its position information comprises a key file 32 registering a character string contained in the document file accumulated in the document database 10 and a pointer to the position information related to the character string by document areas in which character strings appear in the document file; and a POS file 33 registering position information including the information for specifying, for each character string registered in the key file 32, a document file in which the character string is present and the information for specifying the position of the character string in the document file.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004216639-A (JP)
Title: Liquid injector
Inventor: KANAI FUMIYUKI
IPC: B41J2/18
Filed: 2003-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a liquid injector in which waste liquid is stored efficiently with a smaller volume and the size can be reduced.  <P>SOLUTION: A waste liquid storage container 18 is a bag body having an inner space sectioned, as a waste liquid storage space section 40, by means of plate members 38 and 39 and a flexible sheet material 37. These plate members 38 and 39 and the sheet material 37 are made of a semipermeable material which blocks permeation of liquid from the inside to the outside of the waste liquid storage space section 40 but allows permeation of gas so that evaporation components of waste liquid stored in the waste liquid storage container 18 are discharged through the sheet material 37 to the outside of the waste liquid storage container.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004215535-A (JP)
Title: Gas heater for agriculture and livestock industry
Inventor: KANESAKA ICHIRO
IPC: A01K1/00
Filed: 2003-01-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a gas heater for agriculture and livestock industry, which generates a minus ion.  <P>SOLUTION: This gas heater for agriculture and livestock industry is equipped with a gas burner 14 arranged inside a reflection umbrella 12 and a radiant heat plate 24 so as to enclose the burner head 14a. The reflection umbrella 12 and the radiant heat plate 24 are coated with a tourmaline layer 30. The minus ion is generated from the tourmaline layer 30 in heating and has a good influence on baby pigs.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004215813-A (JP)
Title: Binding with opening/closing function for snowboard
Inventor: AIZAWA MITSUO
IPC: A63C9/00
Filed: 2003-01-14
Abstract: <P>PROBLEM TO BE SOLVED: To solve the problem that it takes time and labor to put on boots since the work of opening/closing a band and putting it into a ratchet for tightening is manually performed sitting on a snow surface every time for a conventional tightening and binding device by the band.  <P>SOLUTION: For the device, a boot tightening band is molded in the round shape of boots so that a snowboarder can put on the boots in a short time as easily as possible on all occasions. Then, a connecting or fixing hinge is mounted by another band between both bands, and by pushing it with the boots, both bands are quickly engaged inside the ratchet or a buckle and the work before the final tightening work is completed.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004222015-A (JP)
Title: Amplifier circuit
Inventor: MIZOE KIMIYOSHI
IPC: H03F3/30
Filed: 2003-01-16
Abstract: <P>PROBLEM TO BE SOLVED: To make a circuit structure simple, to enable push-pull output, and to realize low power consumption.  <P>SOLUTION: This amplifier circuit has a first transconductance amplifier 2 which inputs the output of a two input differential amplifier 1 and a first bias voltage Vbias 4. The circuit also has a second transconductance amplifier 3 which inputs the output of the amplifier 2 and a second transconductor 3 as the inputs. The gate of a first output transistor Mp of the amplifier circuit inputs the outputs of the amplifier 2 and the amplifier 3. The output of the differential amplifier 1 is connected to the gate of a second output transistor Mn whose polarity is opposite to that of the first output transistor Mp, and the drains of the first and the second output transistors Mp and Mn are connected to each other to form a push-pull output. Thus, it is possible to suppress a bias current of a push-pull output stage low at the time of static operation of no signal, to make a large current flow at the time of heavy loads, and low power consumption of the amplifier circuit is enabled.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004223864-A (JP)
Title: Method for continuously producing laminated plate
Inventor: HASHIDO HIROAKI
IPC: B29L9/00
Filed: 2003-01-23
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for continuously producing a laminated plate excellent in moldability, reduced in the irregurality of warpage or the like and excellent in heat resistance, heat expansibility and flame retardancy.  <P>SOLUTION: A prepreg 2 supplied from a prepreg supply part 1 is transferred vertically by using a feed roll while preheated in a preheating part 7. A metal foil 4 having a pressure-sensitive adhesive resin layer is supplied from a metal foil supply part 3 by using a feed roll. The prepreg 2 and the metal foil 4 are joined together while passed through the nip between rolls 5 whose surfaces are formed from an elastic material. The joined laminated plate is post-heated by a post-heating part 8, cured further by a baking roll 9 and finally passed through a curing furnace 10 under tension by pinch rolls 11 arranged before and behind the curing furnace to be transferred to a winding part 6 by a feed roll. The laminated plate is produced continuously while taken up by the winding part 6.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004228430-A (JP)
Title: Method and device for adjusting electron beam proximity exposure device
Inventor: KAWAMURA YUKISATO
IPC: H01J37/305
Filed: 2003-01-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method and a device for adjusting an electron beam proximity exposure device capable of performing a focus and astigmatic adjustment automatically.  <P>SOLUTION: Adjusting devices (101 and 121) are provided with a shaping means (131) for providing a measuring part by a slit in a specific shape and shaping an electron beam, a length-measuring means (117) for measuring the measuring part, a storage means (119) for storing a measuring result in each focus state and a beam parallelism at that time, and a focus calibrating means (113) for calibrating the focus of the electron beam. Moreover, a storage means (121) for storing the measuring result in each astigmatic state and the astigmatic state at that time, or a comparing means (189 and 191) for comparing the measuring result concerning two orthogonal directions, and an astigmatic correcting means (125 and 127) for correcting the astigmatic of the electron beam.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004228021-A (JP)
Title: F-type connector
Inventor: SUZUKI SHIGETAKA
IPC: H01R103/00
Filed: 2003-01-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an F-type connector of which capacitance generated between an outer conductor and a contact is small and suitable for high-frequency equipment.  <P>SOLUTION: The contact 5 of the F-type connector comprises a supported part 5a supported by a insulation member 2, a terminal part 5b which extends from one end of the supported part 5a and projects toward the outside of the outer conductor 1, a spring part 5c which extends from the other end of the supported part 5a in the insulation member 2 and has contact part 5d at the end. Openings 4e bored into the insulation member 2 between the spring part 5c and the outer conductor 1 reduces the capacitance C of that part via the openings 4e, which results in reduction of capacitance C between the contact 5 and the outer conductor 1 and provides a connector of which return loss is large when it used for high-frequency equipment.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004232324-A (JP)
Title: Vibration control system
Inventor: NAKAYAMA NOBUO
IPC: F16F9/10
Filed: 2003-01-30
Abstract: <P>PROBLEM TO BE SOLVED: To provide a vibration control system having a high response reduction effect in a wide area from a small amplitude to a large amplitude.  <P>SOLUTION: The vibration control system is so constituted that a hysteresis type damper is placed on an upper layer of a building and that a viscosity type damper is placed on a lower layer. The viscosity type damper is placed between a rigid structural body separated from the building at a height across over a plurality of layers of the lower layer of the building and the building, one end of the viscosity type damper is connected to the rigid structural body, the other end is connected to the building, and it is so constituted that relative story deformation in the horizontal direction of the building can be transferred.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004230335-A (JP)
Title: Water purification cartridge, and water purifier
Inventor: YANOU MANABU
IPC: C02F1/50
Filed: 2003-01-31
Abstract: <P>PROBLEM TO BE SOLVED: To provide a water purifier with which filtering can smoothly be performed even when a filtration material having a high filtration resistance is used.  <P>SOLUTION: A water purification cartridge in which the inside of a vessel is filled with an adsorbent (26) and a hollow fiber membrane (27) without interposing a partition member is suitably used for a pitcher type water purifier since the high filtration rate is attained. The water purifier comprises an external vessel (11) having a purified water storage part (1b), an internal vessel (12) having a raw water storage part (1a) and the water purification cartridge (20). The water purifier having the water purification cartridge (20) in which the inside of the vessel is filled with the adsorbent (26) and the hollow fiber membrane (27) without interposing a partition member is comfortably used because the filtration rate is high.  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2003234311-A (JP)
Title: Method for dicing wafer stack for accessing interior structure
Inventor: HARTWELL PETER G
IPC: H01L21/301
Filed: 2003-02-03
Abstract: <P>PROBLEM TO BE SOLVED: To provide a system and method pertaining to a wafer stack that needs the dicing of the wafer stack in order to provide an access to an interior structure and/or component of the wafer stack.  <P>SOLUTION: A method for dicing the wafer stack is provided. In a preferred embodiment, the method includes steps of (1) providing a wafer stack having a first wafer and a second wafer; (2) exposing a portion of the first wafer by removing a portion of the second wafer; and (3) dicing the exposed portion of the first wafer such that a first die assembly is at least partially separated from the wafer stack. The wafer stack and die assembly are also provided.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2004240752-A (JP)
Title: Information distribution method
Inventor: OGAWA KATSUHISA
IPC: G06F3/12
Filed: 2003-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To efficiently acquire required print information to improve user's convenience in an image forming apparatus for acquiring print information through a network.  <P>SOLUTION: Banner advertisement is successively displayed in a display area (A) of the image forming apparatus in prescribed display order at a prescribed display time interval (S151-S156). When a user depresses a data request button (b) (S1511), a message concerned with a catalogue of a product provided from the banner advertiser is displayed (S1512), and when the user depresses a "YES" button (S1513), distributing print contents are acquired by a Web server and distributed to the image forming apparatus. The image forming apparatus prints out the received print contents (S1514).  <P>COPYRIGHT: (C)2004,JPO&NCIPI
Patent JP-2004241635-A (JP)
Title: Semiconductor device and its manufacturing process
Inventor: SUNADA TAKESHI
IPC: H01L21/768
Filed: 2003-02-06
Abstract: <P>PROBLEM TO BE SOLVED: To reduce variation in the parasitic capacitance between wirings by forming a space between the wirings.  <P>SOLUTION: The process for manufacturing a semiconductor device comprises a step for forming a first insulation film 1 on a substrate and then forming a metal layer and a second insulation film 4 sequentially on the first insulation film 1, a step for patterning the metal layer and the second insulation film 4 simultaneously to form a plurality of a wiring 3 from the metal layer, a step for forming a third insulation film 6b between and on the wirings and polishing the surface of the third insulation film 6b until the second insulation film 4 is exposed, a step for forming trenches by etching the third insulation film 6b between the wirings selectively, and a step for forming a fourth insulation film 9 on the third insulation film 6b not to fill the trenches. Since spaces 8b-8d can be formed, a semiconductor device in which variation in the parasitic capacitance is reduced between the wirings can be provided.  <P>COPYRIGHT: (C)2004,JPO&NCIPI