Patent DE-102009031768-A1 (DE)
Title: Deposition of thin layers such as multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, comprises dividing the target into segments with materials
Inventor: SERBEZOV VALERY
IPC: C23C14/28
Filed: 2009-06-30
Abstract: The method for the deposition of thin layers such as multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, comprises dividing the target (5) into segments (17, 18) with materials having differing physical and/or chemical properties, and irradiating the individual segments of the target with a respective different radiation intensity by a controlled energetic distribution (29) of the focused laser energy via the laser beam cross-section (28), so that each target segment absorbs the quantity of laser energy. The method for the deposition of thin layers such as multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface, comprises dividing the target (5) into segments (17, 18) with materials having differing physical and/or chemical properties, and irradiating the individual segments of the target with a respective different radiation intensity by a controlled energetic distribution (29) of the focused laser energy via the laser beam cross-section (28), so that each target segment absorbs the quantity of laser energy during the irradiation, where the laser energy is required to evaporate or desorb the target material present in the respective segment. The target is displaced in a smooth, gradual and variable rotation during the coating process. The target or individual segments are displaced in a translational motion. During the rotation of the target, the target and/or each segment is displaced in the translational motion. The substrate is displaced in rotation and/or in translational motion during the coating process. The target is divided into a segment made of organic material and a segment made of inorganic material, is divided in a combination of segments made of organic material, metal and ceramic, and is divided into segments made of alloy or composite. The energetic distribution of the focused laser energy is determined by several factors influencing at the area of the target, where the factors are laser beam energy density, wavelength, pulse duration, the number of laser pulses, laser pulse repetition rate, substrate-target distance and target orientation. During the coating process, inert gases, reactive gases or gas mixture are supplied. An injection material is injected continuously or in pulsed field synchronization of the repetition rate of the laser to the target during the coating process, is made of helium/argon gas and is used for the production of ceramic-metal nanocomposites. The segments are arranged inside the target, so that they vary their position synchronization of the laser pulses. The energy density of the laser beam is adjusted by a polarization filter before entering to the segmented target for regulating the fluency depending on the position of the filter to the axis of the laser beam by 0-100%. The polarization filter and/or the target carry out a translational, rotational and/or synchronized motion. The optical filter is divided into different segments adapted to the segments of the target. Independent claims are included for: (1) a device for the deposition of thin layers such as multi-layer coatings, nanolayers, nanostructures and nanocomposites by laser deposition from target materials on a substrate surface; and (2) a substrate with a coating composition of organic-inorganic hybrid nanocomposites for the medical and pharmaceutical use.