baber/WOPTO huggingface dataset:
Patent KR-20040106939-A (KR)
Inventor: YANG WON DONG
IPC: C02F1/72
Filed: 2003-06-05
Abstract: PURPOSE: To provide a water saving type supplying system of cleaning water containing ozone and free-radical, wherein after heating purified and sterilized cleaning water to a proper temperature, the heated cleaning water is supplied to obtain amenity and cleanliness of cleaning water, and cleanliness performance of the cleaning water is further improved by adopting free-radical, thereby reinforcing sterilizing power. CONSTITUTION: The water saving type supplying system of cleaning water containing ozone and free-radical comprises a water purifier(110) for purifying tap water supplied from a water input pipe(60); a storage tank(120) for temporarily storing purified water discharged from the water purifier; an ozonizer(131) for generating ozone for sterilizing water stored in the storage tank; a free-radical generator(132) for generating free-radical for sterilizing water stored in the storage tank; an air pump(130) for making cleaning water by supplying ozone and free-radical into the purified water in the storage tank in an air type; a first infrared sensor(160) for sensing that the hand approaches near a water supply part(20) to actuate a relay for opening or closing a water supply valve and operating a heat at the same time; a relay part(170) for supplying a power source for opening the water supply valve and operating the heater when the relay part receives a signal that sensed approach of the hand from the first infrared sensor; an opening and closing valve(140) for supplying or cutting off cleaning water when the power source is supplied or shut off according to action of the relay; an electric heating part(150) for heating supplied water to a proper temperature by operating the heater; a water supply part for supplying cleaning water passing through the electric heating part to the side of wash basin; a power supply part(180) for supplying an AC 220V commercial power source as an operating power source, or supplying the DC power source after transforming and rectifying the commercial power source into a DC power source; a soap supply part(191) for supplying water soap; and an external housing(190) for fixing and supporting the system.
Patent KR-20040106163-A (KR)
Inventor: YOO DONG HO
IPC: B62D21/00
Filed: 2003-06-11
Abstract: PURPOSE: A connecting structure of a sub-frame and a lower arm of a vehicle is provided to improve the forcible fitting efficiency of a rubber bush by reducing the number of rubber bushes and to conveniently manage parts. CONSTITUTION: A connecting structure of a sub-frame and a lower arm of a vehicle comprises a sub-frame(50) installed parallel to a chassis, a lower arm(52) of which one end is combined with the sub-frame and the other end is combined with a cross member installed horizontally between a wheel hub and left and right wheel hubs to control a wheel, and a bush(54) installed between the sub-frame and the lower arm and having connecting holes(50a,50b,54a,54b,52a) and a connecting protrusion(52b).
Patent KR-20040110283-A (KR)
Inventor: KIM GWANG HYEON
IPC: G11C5/14
Filed: 2003-06-18
Abstract: PURPOSE: An internal reference voltage generator having a temperature compensation means is provided, which operates stably by having fuse tuning means which is able to control the characteristics of a temperature compensation means. CONSTITUTION: An internal reference voltage generator comprises a temperature compensation means for compensating for changes of a reference voltage caused by temperature changes of a reference voltage output, wherein the temperature compensation means has the first resistance component(300) having a negative temperature coefficient, and the second resistance component(310) having a positive temperature coefficient; a fuse tuning part for controlling the value of the first and the second resistance component.
Patent KR-20050000120-A (KR)
Inventor: LEE JUN HEE
IPC: G11B15/02
Filed: 2003-06-23
Abstract: PURPOSE: A reel pulse error recovering method is provided to discharge a tape cassette from a mechanism, to reload the cassette, and to continue recording data when a reel pulse error is caused by a lift of the tape cassette while a slow record is performed in a time lapse VCR. CONSTITUTION: The method comprises several steps. A microcomputer checks an operation state of a capstan motor and a drum motor, and displays the error if any error occurs at the capstan motor or a drum motor(S300-S312). The microcomputer checks whether a reel pulse is normally generated, namely the tape cassette is lifted(S314). In a case that the reel pulse is not normally generated, the microcomputer stops a recording operation(S315), unloads the tape cassette from a mechanism(S316), loads the tape cassette into the mechanism(S320), and records data on the tape cassette(S322).
Patent KR-20050002349-A (KR)
Inventor: LEE JAE KYUNG
IPC: A01K93/00
Filed: 2003-06-30
Abstract: PURPOSE: Provided is a float for fishing with a replaceable body to allow user to replace a float with a new float at a desired time, and to give optimized fishing condition by selecting the float suitable for certain fishing condition. CONSTITUTION: The float for fishing with a replaceable body includes a connecting portion(130) which is connected to a float top(110) formed in a predetermined size on an upper side thereof and is connected to a float lower end portion(120) on a lower side thereof, a body(140) having a through hole(141) in central portion corresponding to the inner diameter of the connecting portion, and a close member(150) fixed between the inner diameter portion of the body and the connecting portion to close the through hole of the body. The outer diameter portion of the connecting portion is provided with an external thread(131) and the inner diameter portion of the body is provided with an internal thread, so that the connecting portion and the body are engaged to be fixed to each other.
Patent KR-20050004507-A (KR)
Inventor: KANG IL KWON
IPC: G03G15/00
Filed: 2003-07-02
Abstract: PURPOSE: An automatic tension applying apparatus of a transfer belt in an image forming apparatus is provided to increase the life span of the transfer belt or a middle transfer unit by applying tension only when the transfer unit or the middle transfer unit performs a transfer operation. CONSTITUTION: A tension driving member having a swing shaft(125) is mounted to a transfer belt(109) and provides the transfer belt with tension in order to contact the transfer belt with a photosensitive member with a constant pressure. A tension driving canceling member is mounted to the tension driving member in order to cancel the tension to the transfer belt. A tension driving operation member(128) is mounted to a driving member for driving the transfer belt and the tension driving canceling member. The tension driving operation member operates and applies the tension to the transfer belt only when the driving member is driven.
Patent KR-20040010129-A (KR)
Inventor: MAYUMI EIJI
IPC: H02K15/02
Filed: 2003-07-03
Abstract: PURPOSE: A stepping motor and a manufacturing method therefor are provided to prevent troubles such as disconnection or short-circuit of a coil winding even if a coil bobbin is not used. CONSTITUTION: A stepping motor comprises a ring-shaped stator core, a coil winding, and a terminal pin part. The ring-shaped stator core(6) includes a plurality of pole teeth erected from an inner circumferential edge portion. The coil winding(3) wound around the pole teeth. The terminal pin part(71) to which a terminal end of the coil winding is wound around. The terminal pin part is integrally formed and extended from the stator core. An entire surface of at least the terminal pin part of the stator core is covered with an insulating layer.
Patent KR-20050006648-A (KR)
Inventor: YOON WON HO
IPC: G06Q30/06
Filed: 2003-07-09
Abstract: PURPOSE: An electric cable trading system to search/estimate/buy desired goods on a network environment and a method thereof are provided to enable a user to efficiently perform purchase by simultaneously comparing various goods for diverse electric cable goods through a real-time service for the search/estimation/purchase request. CONSTITUTION: A seller client PC(3) registers goods information by connecting to a central server(2). A buyer client PC(1) receives presentation for the electric cable goods registered in a hierarchical classification data structure by connecting to the central server. The central server includes a communication part(22), a database part(23), a web server(24), and a controller(21). The communication part processes data communication with the buyer/seller client PC. The database part stores the registered electric cable goods in the hierarchical classification data structure. The web server interfaces the buyer/seller client PC through a web page.
Patent KR-20050006720-A (KR)
Inventor: CHO KYOO CHUL
IPC: H01L21/68
Filed: 2003-07-10
Abstract: PURPOSE: An apparatus for gripping a wafer is provided to reduce contamination of a wafer by reducing wafer damage caused by separation of the wafer through a more stable grip and by decreasing the number of grip pins. CONSTITUTION: A notch grip pin(204c) has a width smaller than the entrance of the notch(202) of a wafer(200), including a notch contact part for coming in contact with the inner surface of the notch. At least one edge grip pin(206a) comes in contact with the edge of the wafer. The notch grip pin and the edge grip pin are attached to a distance control unit that controls the distance between the notch grip pin and the edge grip pin.
Patent KR-20050006990-A (KR)
Inventor: YUN SEOK HO
IPC: H04N5/46
Filed: 2003-07-10
Abstract: PURPOSE: A multi-television for controlling scene conversion according to a broadcast type of a selected channel and a method of controlling the same are provided to enable conversion into a video mute time mode for showing a black picture to be controlled, by storing broadcast types of selectable channels in advance. CONSTITUTION: A tuner(110) selects the first channel of a plurality of channels through which a broadcast signal is received. A storage part(160) stores broadcast types which correspond to the channels. A signal process part(130) processes a video signal by technique that corresponds to a broadcast type of the first channel selected. A display part(140) displays the video signal processed. A channel selection part(150a) selects the second channel of the channels. A control part(170) controls output of the video signal to the display part by comparing the broadcast types of the first and second channels with each other.
Patent KR-20050008209-A (KR)
Inventor: KIM DAE JOONG
IPC: G06Q50/08
Filed: 2003-07-14
Abstract: PURPOSE: A method for operating an IPC(Industrial PC) on a plant collecting/transmitting work information of each equipment to an upper system in real-time is provided to reduce a paper work, accumulate standard data, and enhance accuracy of basic data by collecting/transmitting the work information of each equipment to the upper system in the real-time. CONSTITUTION: When work management for each equipment of the plant is performed, a results input screen is displayed(S2). A personnel change is confirmed/displayed/informed to a results collecting/analyzing server of an upper level(S2). Work performance is ordered depending on presence of personnel by confirming input of work start(S5). Operation status data of the equipment is received/displayed on the result input screen(S6). The operation status data is collected by the result collecting/analyzing server(S7).
Patent KR-20050011932-A (KR)
Inventor: CHI YONG SEOK
IPC: H01J9/42
Filed: 2003-07-24
Abstract: PURPOSE: An apparatus and a method for detecting a discharge defective of a plasma display panel are provided to improve detection accuracy by comparing a measured current flowing on an electrode with a reference current. CONSTITUTION: A current detector(411) is connected to an Y-electrode to detect a current flowing on the Y electrode and convert a value of the detected current into a digital signal. A temperature detector(413) detects an environmental temperature of a panel to convert the detected environmental temperature into a digital signal. A discharge defective determining unit(412) determines a discharge defective based on the digital signals transmitted from the current detector and the temperature detector. The discharge defective determining unit compares a current value contained in the digital signal from the current detector with a reference current value in a normal discharge to determine the discharge defective.
Patent KR-20050014432-A (KR)
Inventor: SONG MEONG GUN
IPC: A61F2/24
Filed: 2003-07-31
Abstract: PURPOSE: A plastic operation equipment set is provided to reconstruct a subvalvular structure of atrioventricular valve by inserting an artificial musculi papillares to be substituted for the subvalvular structure and by forming an artificial chordae tendineae so as to connect the existing surgical suture to the artificial musculi papillares. CONSTITUTION: The plastic operation equipment set includes: a cylindrical body(4), having a size proper to be inserted into the inside of a cardiac ventricle; a first hole(6), arranged on an one-sided end in the longitudinal direction of the cylindrical body(4); a second hole(8), arranged on the other sided end, opposite to the first hole(6). One of the first or second hole(6,8) is bigger than the other hole(8,6).
Patent KR-20050015197-A (KR)
Inventor: CHOI HYUK SUN
IPC: A01G1/00
Filed: 2003-08-04
Abstract: PURPOSE: A method of making bean sprouts by spraying a functional solution containing an aqueous solution containing germanium components and a binding agent on beans is provided. It can attach a functional material capable of being absorbed into the body to the surface of beans while increasing the content of germanium in bean sprouts. CONSTITUTION: A solution containing an aqueous solution containing germanium components and a binding agent is supplied periodically to beans to give bean sprouts. The binding agent contains at least one selected from the group consisting of sugar liquid, honey, taffy, glucose, gelatin, Arabic gum, methyl cellulose, spray dried lactose, anhydrous lactose, crystalline cellulose, calcium hydrogen phosphate and sodium carboxymethyl cellulose. The bean sprouts contain sprouts of beans, mung beans and kidney beans and can be ground.
Patent KR-20050015557-A (KR)
Inventor: KIM JUNG HUN
IPC: G09G3/296
Filed: 2003-08-06
Abstract: PURPOSE: A method and an apparatus for driving a plasma display panel are provided to make the sustain driving margin wide by stably and rapidly generating the sustain discharge. CONSTITUTION: A method for driving a plasma display panel includes the steps of: supplying the first rising ramp waveform to the first electrode, wherein the first rising ramp waveform rises to the first voltage during the first period of the reset period; supplying the second rising ramp waveform to the second electrode as well as supplying the first falling ramp waveform to the first electrode, wherein the second rising ramp waveform rises to the second voltage during the second period of the reset period and the first falling ramp waveform falls down to the third voltage lower than the first voltage; and supplying the second falling ramp waveform to the second electrode, wherein the second falling ramp waveform falls down from the second voltage during the third period of the reset period.
Patent KR-20030072282-A (KR)
Inventor: JUNG SOON TECK
IPC: A23L21/10
Filed: 2003-08-04
Abstract: PURPOSE: Provided is a preparation method of sea tangle jelly added with a sea tangle extract by addition of a sea tangle extract containing rich alginate, agar, citric acid and sucrose. CONSTITUTION: A preparation method of sea tangle jelly added with a sea tangle extract is characterized by addition a sea tangle extract, pectin, glucose and acid, wherein the sea tangle extract is obtained by extracting sea tangle with 13 times of water at 50 deg.C for 2 hours, followed by centrifugation and concentration under reduced pressure.
Patent KR-20040017784-A (KR)
Inventor: KOJIMA YOSHINORI
IPC: B41J2/175
Filed: 2003-08-20
Abstract: PURPOSE: To analogically detect an amount of liquid(ink) in a liquid storage part. CONSTITUTION: In the liquid storage container, a reflector 30 is set at a face formed in a height direction from a bottom part inside a liquid storage chamber 45 of an ink tank 7. The reflector 30 is formed by a light transmissive member in which a plurality of roof-shaped mirrors 34 each with two reflecting faces set by predetermined angles are arranged in one direction. A detector(not shown in Fig.) comprising a set of a point light source(light emitting element) 31 and a light receiving element 32 is fixed to a point opposite to a side part of the ink tank 7 where the reflector 30 is disposed.
Patent KR-20050023959-A (KR)
Inventor: JIN SHIN HEUM
IPC: A23K1/00
Filed: 2003-09-04
Abstract: PURPOSE: A method of breeding beef cattle by feeding feed containing no calcium additives to finishing beef cattle is provided. Feeding of the feed shows an increase in the synthesis of 1,25-(OH)2-D3 in cattle blood and marbling, thereby increasing meat quality of beef cattle while promoting the growth rate. CONSTITUTION: The breeding method for beef cattle contains an increase in beef marbling through feeding feed containing no calcium additives to finishing beef cattle. The finishing beef cattle are 20 to 24 months old. In conventional methods, 1 to 2.5% by weight of calcium additive such as limestone is added. But the breeding method does use the calcium additive.
Patent KR-20050029905-A (KR)
Title: A film for reducing and removing mouth odor and composition for manufacturing the same
Inventor: KIM HOO DEOK
IPC: A61K8/97
Filed: 2003-09-24
Abstract: A film for reducing and removing mouth odor and a composition for manufacturing the same film are provided, which film has safety to human, convenient usage and portability, and is slowly dissolved in a mouth to continuously remove mouth odor such as mercaptane and garlic odor. The film for reducing and removing mouth odor comprises an extract selected from green tea extract, Chaenomeles sinensis extract, citron extract and a mixture thereof as an effective component which is uniformly dispersed in the aqueous film substrate, wherein the amount of the extract added is 0.01 to 20.0 wt.%; and the aqueous film substrate is water-soluble polymer selected from pullulan, pectin, chitin, carrageenan, xanthan gum, alginate, cellulose, dextrin and a mixture thereof. The composition for manufacturing the same film comprises 0.01 to 20.0 wt.% of the extract selected from green tea extract, Chaenomeles sinensis extract, citron extract and a mixture thereof, 0.5 to 35 wt.% of water-soluble polymer; and 0.05 to 5.0 wt.% of emulsifying agent.
Patent KR-20040028532-A (KR)
Inventor: NAGANO KAZUHIKO
IPC: H01S5/022
Filed: 2003-09-26
Abstract: PURPOSE: A laser apparatus having a protection member installed at a light-emission end of a multi-mode optical fiber is provided to protect a light emission end of a multi-mode optical fiber from particles and contaminants by installing a protection member having a light emission window. CONSTITUTION: A laser apparatus includes a plurality of semiconductor laser elements, a multi-mode optical fiber, and an optical condensing system. The semiconductor laser elements(LD1-LD8) are used for emitting laser beams. The multi-mode optical fiber(13) has a light entrance end and a light emission end. The optical condensing system(12) collects the laser beams emitted from the semiconductor laser elements, and couples the collected laser beams to the light entrance end of the multi-mode optical fiber. The laser apparatus further includes a protection member which is arranged at the light emission end of the multi-mode optical fiber in order to protect the light emission end from atmosphere. The protection member has a light emission window located at a predetermined distance from the light emission end.
Patent KR-20050033331-A (KR)
Title: Radar and laser detector without communication line
Inventor: HWANG SEONG HO
IPC: G08G1/052
Filed: 2003-10-06
Abstract: A radar and laser detector is provided to improve convenience of maintenance by using a power line communication between a detection signal processor and a recognition information provider. A detection signal processor(110) receives a specific frequency signal from a speed gun(140) to transmit a predetermined detection signal to a recognition information provider(120). The recognition information provider outputs data corresponding to the detection signal received from the detection signal processor through a display(160) or a voice signal output unit. The recognition information provider transmits a function control signal inputted from a driver through an input(150) to the detection signal processor. The detection signal processor and the recognition information provider receive power from a battery on a vehicle.
Patent KR-20050035457-A (KR)
Inventor: CHANG JAE WON
IPC: G06F17/00
Filed: 2003-10-13
Abstract: 본 발명은 무선 네트워크망을 통해 데이터를 송수신하는 하나 이상의 클라이언트 기기와, 상기 하나 이상의 클라이언트 기기의 상태 모니터링 또는 제어를 수행하는 서버기기를 포함하는 무선 네트워크망을 통해 통신하는 서버 시스템에 관한 것으로서, 상기 서버기기는 전송하고자 하는 데이터의 압축 인코딩을 수행하며, 인코딩되는 데이터가 저장되는 이중버퍼가 구비된 인코더와, 상기 인코더에서 인코딩된 데이터를 무선 네트워크망을 통해 해당 클라이언트 기기로 전송하는 네트워크 렌더부와, 상기 인코더에서 인코딩된 데이터가 저장되는 버퍼영역을 관리함으로써 버퍼 오버플로우를 감지하고, 오버플로우 방지를 위해 인코딩 동작을 정지시키는 제어신호를 발령하는 버퍼관리부를 포함하여 구성됨에 따라, 무선 네트워크망에서의 전송 지연으로 인해 서버기기의 버퍼가 오버플로우되거나 시스템이 다운되는 것을 방지하여 무선 네트워크망을 통해 통신하는 서버 시스템의 안정성을 확보할 수 있는 효과가 있다.
Patent KR-20050039227-A (KR)
Inventor: KIM JUNG SEOK
IPC: H01J17/16
Filed: 2003-10-24
Abstract: 본 발명은 PDP 구동시 필름 콘덴서에서 발생하는 진동을 억제하여 PDP 구동시 소음을 효과적으로 줄일 수 있는 플라즈마 디스플레이 장치에 관한 것이다. 
     본 발명에 따른 필름 콘덴서를 채용한 플라즈마 디스플레이 장치는, 플라즈마 디스플레이 패널; 상기 플라즈마 디스플레이 패널에 연결 설치되어 이를 지지하는 샤시 베이스; 상기 샤시 베이스에 다수로 장착되어 상기 플라즈마 디스플레이 패널의 구동에 필요한 전기적 신호를 인가하는 구동회로부; 및 소정의 정전 용량을 얻기 위해 상기 구동회로부에 설치되는 필름 콘덴서를 포함하며, 상기 필름 콘덴서가 유전체 필름과 금속 증착막이 번갈아 가며 적층되고 롤 형태로 감긴 상태에서, 상기 유전체 필름과 금속 증착막 사이의 공간에 소정의 충전물이 충전된 것을 특징으로 한다.
Patent KR-20050040174-A (KR)
Inventor: KIM YONG SIK
IPC: H04B1/40
Filed: 2003-10-27
Abstract: 본 발명은 휴대폰에서 사용자가 경조사 날자를 음력으로 입력하면 매년 양력으로 환산하여 알려주는 기술에 관한 것이다. 이러한 본 발명은, 일정관리 입력모드에서 경조사 날자를 음력으로 입력받고, 알림 방법에 대한 옵션 정보를 입력받는 제1과정과; 상기 입력받은 경조사 날자를 양력으로 환산하여 저장한 후 그 날자에 임박할 때 기 설정된 옵션 내용에 따라 알림기능 수행하는 제2과정과; 상기 제2과정을 매년 반복 수행하는 제3과정에 의해 달성된다.
Patent KR-20050040246-A (KR)
Inventor: SONG KYU SEOG
IPC: H04L12/66
Filed: 2003-10-28
Abstract: 본 발명은 공중전화망인 PSTN과 인터넷 프로토콜을 기반으로 데이터를 전송하는 IP망의 응용서버간의 연동방법을 개선하고,  망의 복합 장애 발생시에도 PSTN과 IP망의 응용서버간의 연동이 가능하도록 우회 라우팅시킬 수 있는 기술에 관한 것이다. 
     이를 위해 본 발명은,  PSTN과 연동하는 IP망에 적용되는 시스템에 있어서, SIGTRAN 프로토콜 스택과 SIP 프로토콜 스택이 구비되고,  신호처리 게이트웨이(SG)에 대한 1·2차 루트와 소프트스위치에 대한 1·2차 루트가 설정된 응용서버; SS7 프로토콜을 기반으로 상기 PSTN과 통신하여 상기 PSTN을 IP망에 접속시키고, 상기 응용서버와 상기 SIGTRAN 프로토콜을 기반으로 통신하며, 상기 응용서버에 대한 1·2차 루트가 설정된 SG; 및 상기 SIGTRAN 프로토콜을 기반으로 상기 SG와 통신하고,  상기 SIP 프로토콜을 기반으로 상기 응용서버와 통신하며,  상기 응용서버에 대한 1·2차 루트가 설정된 소프트스위치를 포함하여 구성된 것을 특징으로 한다.
Patent KR-20050041340-A (KR)
Inventor: KIM UI SIK
IPC: H01L21/336
Filed: 2003-10-30
Abstract: 본 발명은 반도체 소자의 게이트 형성 방법에 관한 것으로, 게이트가 형성될 영역이 개구 형태로 정의된 절연막 패턴의 개구 영역에 게이트를 형성하되 절연막 패턴과 게이트 사이에 질화막을 형성하여 실리사이드 공정 시 질화막에 의해 게이트의 측벽이 질화처리 되도록 함으로써, 핫 캐리어 이펙트(Hot Carrier Effect)를 감소시키고 게이트 절연막으로의 보론 침투를 방지하여 소자의 전기적 특성 및 공정의 신뢰성을 향상시킬 수 있다.
Patent KR-20050043015-A (KR)
Inventor: CHOI SEUNG WOO
IPC: F16C9/02
Filed: 2003-11-04
Abstract: 기계가공된 모서리의 응력집중 방지구조가 개시된다.  개시된 기계가공된 모서리의 응력집중 방지구조는, 기계가공되는 가공품의 모서리의 응력집중 방지구조에 있어서, 상기 모서리의 일 지점에 응력집중부가 형성되고, 상기 응력집중부의 좌우에는 적어도 하나의 다중라운드가 형성된 것을 그 특징으로 한다. 
     본 발명에 따르면, 응력이 집중되는 모서리의 면적을 크게 형성되도록 하여 크랙을 방지할 수 있어 기계가공되는 가공품의 내구성을 향상시킬 수 있는 이점이 있다.
Patent KR-20050046332-A (KR)
Inventor: CHOI JUN YOUNG
IPC: H01L21/3065
Filed: 2003-11-14
Abstract: 본 발명은 평판표시소자 제조장치의 공정챔버에 관한 것으로서, 더욱 상세하게는 공정챔버의 내부 구조를 변경하여 균일한 플라즈마가 형성되도록 하는 평판표시소자 제조장치의 공정챔버에 관한 것이다.  
     본 발명의 공정챔버는, 상부전극과 하부전극이 설치되는 공정챔버에 있어서, 상기 공정챔버와 반송챔버 사이의 통로에 셔터가 구비되는 것을 특징으로 한다.  
     또한, 본 발명에 따른 공정챔버는, 상부전극과 하부전극이 설치되는 공정챔버에 있어서, 상기 상부전극과 공정챔버의 벽면 사이에 배플(baffle)이 구비되는 것을 특징으로 한다.