baber/WOPTO huggingface dataset:
Patent TW-202206114-A (TW)
Title: Systems and methods for electromagnetic virus inactivation
Inventor: PERLMAN STEPHEN G
IPC: A61L2/10
Filed: 2021-04-06
Abstract: A system and method to reduce the number of active targeted viruses, bacteria or other microbes or microorganisms within an indoor or outdoor space using an array of radio frequency antennas, lasers or acoustic emitters is presented. The system sweeps through a series of beam patterns. The radio, laser or acoustic frequency and dwell time depend on the targeted viruses and bacteria. By sweeping through a wide range of transmit beamforming vectors, it is possible to kill or render harmless microbes or microorganisms at many locations throughout the coverage area while avoiding exposing humans to harmful levels of radio frequency or laser power. The proposed system and method can be flexibly applied to many array geometries including those with large spacing and non-isotropic antennas or acoustic emitters, as well to a variety of type of lasers.
Patent TW-202244896-A (TW)
Title: Method of detecting bass drum sound in music for display through display module capable of using a display module for display with light or image while playing music so as to have multiple enjoyments of enjoying music and visual appreciation at the same time
Inventor: LIU YOU-CHI
IPC: G10K15/00
Filed: 2021-05-11
Abstract: The present invention relates to a method of detecting a bass drum sound in music for display through a display module. When playing music and using an electronic device to detect the sound signal of the bass drum falling point in the music rhythm, the electronic device obtains the signal of the rhythm strength of the bass drum sound through the Fourier series transformation. Then, the electronic device transmits the signal of the rhythm strength to the display module, so that the display module performs corresponding light display, light color change display or image display, etc. according to the received signal of the rhythm strength. In addition, based on one or more of the display results, the invention can achieve the purpose of playing music in cooperation with the display module for displaying with lights or images, so as to have multiple enjoyments of enjoying music and visual appreciation at the same time.
Patent TW-202224055-A (TW)
Inventor: DESAI DIXIT
IPC: H01L21/324
Filed: 2021-05-20
Abstract: 本公開提出了一種用於組合工件的電漿處理和熱處理的裝置。該裝置包括處理室、與處理室分開且設置在處理室的第一側的電漿室、以及配置為在電漿室中產生電漿的電漿源。石英工件支撐體設置在處理室內，該工件支撐體配置為支撐工件。一個或多個配置為加熱工件的輻射熱源設置在處理室的第二側且與第一側相對的側上。在工件支撐體與一個或多個熱源之間設置真空介電窗。此外，該裝置包括配置為獲得指示工件溫度的溫度測量值的溫度測量系統。
Patent TW-202249368-A (TW)
Title: Butt-buckling structure of connector capable of achieving replaceability, fast assembly and stable buckling
Inventor: LAI BING-YUAN
IPC: H01R24/38
Filed: 2021-06-07
Abstract: A butt-buckling structure of connector includes a first joint. One end of the first joint is in the shape of a round tube and provided with a butting portion, and the other end is provided with a joint bottom, wherein the joint bottom is formed with an annular surface facing the butting portion. Furthermore, the first joint is protruded with two stoppers between the butting portion and the annular surface, wherein and two dodging notches are symmetrically disposed between the two stoppers at an interval. The inner edge of a buckling ring is protruded with two positioning blocks and the outer edge is formed with at least one hook. The buckling ring is fitted onto the butting portion of the first joint, and the positioning block is aligned with the dodging notch to enable the buckling ring crossing the stopper. Moreover, by rotating the buckling ring, the positioning block may be sandwiched between the stopper and the annular surface. Thus, the present invention provides the function capable of replacing the buckling ring in different specification, and may select the hook in different style or length to be matched with the second joint to be butted.
Patent TW-202204170-A (TW)
Title: Isolated Print Medium Dispense
Inventor: EDELSTEIN JASON MARK
IPC: B41F15/08
Filed: 2021-06-16
Abstract: A printing machine includes a sliding carriage to provide isolation between internal volumes, to enable a print medium container to be exchanged without disrupting a print operation. Convective air flow between the volumes is maintained during normal operation.
Patent TW-202300093-A (TW)
Inventor: WANG CHING-FU
IPC: A61B5/024
Filed: 2021-06-25
Abstract: 本發明提供一種血壓監控系統，包括：一血壓計及一光感測器；當測量對象使用該血壓監控系統量測血壓時，係以所定的校準時間間隔來利用該血壓計量測的校準參數對於該光感測器量測出的血壓資料進行校準，從而可隨時量測出符合測量對象生理身體年齡的優化血壓趨勢。
Patent TW-202300310-A (TW)
Inventor: TSAI TUNG-YANG
IPC: B26D7/08
Filed: 2021-06-28
Abstract: 一種用於一試紙半成品之後處理設備，其包含有一致冷裝置、一試紙切割裝置以及一試紙移載裝置，該致冷裝置係用以提供一低溫環境，以降低一試紙半成品之一黏著劑之一黏彈性（viscoelasticity），該試紙切割裝置係用以於該低溫環境將該試紙半成品切割成複數個試紙片，該試紙移載裝置係用以運送複數個試紙片，該試紙移載裝置包含有一第一移載組件以及一第二移載組件，該第一移載組件與該第二移載組件係分別用以於不同時間點運送該複數個試紙片之相鄰兩試紙片的其中一者與另一者。
Patent TW-202220454-A (TW)
Inventor: CLYATT III CLARENCE L
IPC: H04Q1/14
Filed: 2021-07-14
Abstract: A data communication system includes a rack and one or more modules pluggable into the rack along a longitudinal direction. The rack can include one or more of an electrical connector, an RF cable connector, and an optical connector. One or both of the RF cable connector and the optical connector can float in one or more directions perpendicular to the longitudinal direction to align with respective connectors of the rack when the modules plug into the rack.
Patent TW-202303488-A (TW)
Title: Activity behavior-based credit scoring device including a facility database, a customer behavior database, a data collection module, a processing module, and a transmission module
Inventor: Liu hong-ming
IPC: G06Q30/02
Filed: 2021-07-14
Abstract: A credit scoring device based on activity behavior includes a facility database, a customer behavior database, a data collection module, a processing module, and a transmission module. The processing module scores the credit on the service items of the living facilities in the first interactive message sent by the customer code, calculates the customer credit rating relative to the customer code based on the weight distribution ratio of these living facilities, and sends it to the client device through the transmission module.
Patent TW-202212586-A (TW)
Title: Aluminum member and manufacturing method thereof
Inventor: ITO KAZUHIRO
IPC: C22C21/00
Filed: 2021-07-28
Abstract: An aluminum member which includes a fine crystal grain region having a crystal grain size of less than 20 [mu]m, and which has a purity of 99.999% by mass or higher.
Patent TW-202208328-A (TW)
Inventor: SATTA YUSUKE
IPC: C09K3/00
Filed: 2021-07-29
Abstract: To provide: a viscosity adjusting agent which ameliorates the deterioration in handling properties and coating properties associated with the activation of a viscosity adjusting agent when used in a curable composition manufactured under low temperature conditions, and which makes it possible to reduce energy consumption; and a curable composition which contains the viscosity adjusting agent. Provided is a viscosity adjusting agent for a curable composition, said viscosity adjusting agent containing: a diamide compound (A) obtained by subjecting a diamine component (A1) and a monocarboxylic acid component (A2) to a condensation reaction and/or a hardened castor oil (A'); and a polyamide compound (B) obtained by subjecting an amine component (B1) and a carboxylic acid component (B2) to a polycondensation reaction. The diamine component (A1) is selected from the group consisting of C2-12 diamines. The monocarboxylic acid component (A2) is selected from the group consisting of hydrogenated castor oil fatty acids and straight-chain saturated fatty acids. The polyamide compound (B) has a weight average molecular weight of 2,000-21,000. The cured product of the curable composition is used as a sealant or an adhesive.
Patent TW-202145296-A (TW)
Title: 包括具有多個嵌入式電極的基板支撐件的基板支撐組件、處理腔室及基板處理系統
Inventor: KRAUS PHILIP ALLAN
IPC: H01L21/3065
Filed: 2018-07-25
Abstract: 提供了一種用於在電漿輔助處理腔室中偏壓基板的區域的方法和設備。偏壓基板（或基板的區域）增加了在基板與處理腔室中形成的電漿之間的電位差，從而將來自電漿的離子加速到基板區域的有效表面。於此的複數個偏壓電極以有利於管理跨越基板的處理結果的均勻性的圖案的方式跨越基板支撐件而空間地佈置。
Patent TW-202212579-A (TW)
Inventor: KITAHASHI KUNIHIRO
IPC: C21D9/52
Filed: 2021-08-06
Abstract: The invention provides a wire coil cooling apparatus being capable that a wire member suspending a cover covering an upper end of a wire coil through a pully from above of the wire coil is difficult of being off from the pully no matter of the stacking number of the wire coils.
        A wire coil cooling apparatus includes a cover 9 which contacts an upper end 2c in a penetrating direction of the wire coil 2 and covers the wire coil, a blower hole 10c which located at a lower end side in the penetrating direction of the wire coil and blows an air into an inner side of the wire coil toward the cover side, and a suspended support member 8 which is suspended by a wire member 11 through a pully 14 from above the wire coil and can support the cover, wherein the suspended support member has a rod 13 as a guide part guiding movements in up and down directions of the cover, and the wire coil is transported on a plural of roller 4b arranged with spaced apart in the predetermined direction.
Patent TW-202312652-A (TW)
Inventor: HUANG SHIH-HSIUNG
IPC: H03F3/45
Filed: 2021-09-07
Abstract: 本發明揭露了一種放大器電路，透過一第一輸出端及一第二輸出端輸出一對差動輸出訊號，包含：一第一放大級，電連接一第一節點及一第二節點，用來放大一對差動輸入訊號；一第二放大級，電連接該第一節點及該第二節點，並且耦接該第一輸出端及該第二輸出端；一第一開關，耦接於該第一輸出端與一第一參考電壓之間；一第二開關，耦接於該第二輸出端與該第一參考電壓之間；一第三開關，耦接於該第一節點與該第一參考電壓之間；一第四開關，耦接於該第二節點與該第一參考電壓之間；以及一第五開關，耦接於一第二參考電壓與該第一放大級之間。
Patent TW-202310728-A (TW)
Inventor: LEE PEI-HSUAN
IPC: A01G27/02
Filed: 2021-09-10
Abstract: 一種植栽盆結構，包含：一第一殼體；一第二殼體，可拆卸地結合於該第一殼體，以形成一主管體及至少一側管，該主管體具有沿著一軸向相對設置的一注水口及一出水口，該側管連通該主管體，並朝該主管體之頂緣的傾斜方向往外延伸，該側管具有一插入口及一儲水區，該插入口連通該注水口及該出水口，該儲水區用以儲放水體，該側管與該主管體之間具有一上連接點及一下連接點，該上連接點與該軸向具有一第一徑向距離，該下連接點與該軸向具有一第二徑向距離，該第二徑向距離短於該第一徑向距離。
Patent TW-202312149-A (TW)
Title: Hard disk bearing structure
Inventor: YING YANG
IPC: G11B33/02
Filed: 2021-09-13
Abstract: A hard disk bearing structure includes: a hard disk rack for placing at least one hard disk; a retractable connecting rod, one end of which is used to connect the rear end of the hard disk rack; a motor connected to the retractable connecting rod through a transmission mechanism The other end; the motor drives the telescopic link through the transmission mechanism to expand or contract to drive the hard disk rack to move back and forth. The invention automatically pushes and pulls the hard disk rack to move back and forth through a structure with an automatic telescopic function, which greatly saves manpower consumption and helps to improve work efficiency.
Patent TW-202316681-A (TW)
Inventor: SU YU-CHAO
IPC: H01L33/02
Filed: 2021-10-01
Abstract: 一種發光元件，包含基板，包含一上表面；一半導體疊層，位於上表面，包含一第一半導體層與一第二半導體層 ，第二半導體層位於第一半導體層上；一第一溝槽，位於半導體疊層中，包含一第一底部，第一底部包含部分的上表面，部分的上表面沒有被半導體疊層覆蓋；一第一電極 ，包含一第一電極墊及複數第一延伸電極，位於第一半導體層上並與其電性連接；以及一第二電極 ，包含一第二電極墊及複數第二延伸電極，位於第二半導體層上並與其電性連接；其中，所述複數第一延伸電極分別位在第一溝槽與所述複數第二延伸電極之間。
Patent TW-202223003-A (TW)
Title: Fast drying inkjet inks with extended decap
Inventor: MATSUMOTO YUTA
IPC: B41M5/00
Filed: 2021-10-08
Abstract: An inkjet ink that includes (A) a terpene phenol resin having a hydroxyl value of 10 to 80 mgKOH/g and (B) a carbonate ester whose boiling point is less than 150℃. A printed article including the inkjet ink in dried form, and a method of forming a printed image with a thermal inkjet printhead are also provided.
Patent TW-202318617-A (TW)
Title: Electrostatic discharge protection circuit
Inventor: SYU JHIH-CHUN
IPC: H01L23/60
Filed: 2021-10-18
Abstract: An electrostatic discharge protection circuit includes a discharge switch, a discharge switch, a first transistor, an inverter and a feedback circuit. The discharge switch is coupled between a first power rail and a second power rail, and be turned-on or cut-off according to a control voltage. The first transistor has a first end coupled to the first power rail. A control end of the first transistor receives the control voltage. The inverter is coupled between a second end of the first transistor and a control end of the discharge switch. The feedback circuit is coupled between an input end and an output end of the inverter, and is configured to determine whether provide a tuned-on path between the input end of the inverter and the second power rail.
Patent TW-202237760-A (TW)
Title: Inkjet ink composition, cured product thereof, light conversion layer, color filter, and light-emitting element
Inventor: ENDO KOICHI
IPC: G02B5/20
Filed: 2021-11-05
Abstract: To provide an inkjet ink composition excellent in curability, a cured product thereof, a light conversion layer, a color filter, and a light-emitting element. There is provided an inkjet ink composition containing: luminescent particles including semiconductor nanocrystal particles composed of a metal halide; a photopolymerizable compound; a photosensitizer represented by the following general formula (1) or (2); and a photopolymerization initiator. [R1 represents a C2-3 alkyl group or the like, and m represents an integer of 1-4.] [R2 and R3 each independently represent an alkyl group or the like, and n and o each independently represent an integer of 0-5.].
Patent TW-202232787-A (TW)
Inventor: MATSUI HARUNOBU
IPC: B23K3/06
Filed: 2021-11-10
Abstract: 本發明提供一種密封用接合材，其特徵係以焊料粉末、經被覆材被覆之銀奈米粒子、溶劑作為必須成分，進而含有選自金屬硒、氧化膜防止劑、氧化膜去除劑中之1種以上。
        本發明可提供可以穩定條件簡便地形成具有於密封如UV-LED之發出短波長光之元件時所要求之良好氣密密封性及耐UV性之金屬接合層，且可長期安定使用之密封用接合材。
Patent TW-202226194-A (TW)
Inventor: JUN YOUNG-JUN
IPC: G09G5/02
Filed: 2021-12-20
Abstract: 公開了一種能夠減小晶片面積並且調整白色色座標的數位伽瑪電路及包括數位伽瑪電路的源極驅動器。數位伽瑪電路可以包括用於為每個R、G或B設置伽瑪曲線的數位伽瑪演算法。藉由數位伽瑪演算法，可以設置伽瑪曲線的X軸點的值，可以設置伽瑪曲線的與X軸點的值對應的Y軸點的值，並且Y軸點的值中的指示白色的至少一個Y軸點的值可以藉由向其添加偏移值被調整。
Patent TW-202325403-A (TW)
Title: Tubular adsorption material module capable of achieving better adsorption efficiency by means of the adsorption layer
Inventor: Zheng shi-zhi
IPC: B01J41/09
Filed: 2021-12-24
Abstract: This invention relates to a tubular adsorption material module including a plurality of tubular adsorption materials, wherein each of the tubular adsorption materials includes at least one pore and at least one adsorption layer, and the at least one adsorption layer surrounds the at least one pore. The adsorption layer further includes an amino-modified anion exchange resin material and a polymer material so as to achieve better adsorption efficiency by means of the adsorption layer.
Patent TW-202314786-A (TW)
Title: Multi-layered structure and manufacturing method thereof
Inventor: CHEN LIANG-LU
IPC: H01L21/02
Filed: 2022-01-05
Abstract: A multi-layered structure on a supporting entity and a manufacturing method thereof are provided. The manufacturing method of the multi-layered structure includes forming a first layer and a first test mark on the supporting entity, wherein the first test mark has a first predetermined length. The first projected length of the first test mark is measured in a top view. The first warpage degree of the first test mark is calculated according to the first predetermined length and the first projected length.
Patent TW-202238184-A (TW)
Title: Polarizing plate production method and polarizing plate
Inventor: MATSUYAMA HIRONORI
IPC: G02B5/30
Filed: 2022-01-13
Abstract: Provided is a method that enables efficient production of a polarizing plate in which the occurrence of cracking is suppressed, even in harsh environments such as that of a heat shock test. A polarizing plate production method according to an embodiment of the present invention comprises: stacking a plurality of polarizing plates to form a workpiece; and using a twist file to process the outer peripheral surface of the workpiece such that a polarizer end surface of the polarizing plates has a surface roughness Sdr of not less than 11% as found according to ISO 25178.
Patent TW-202330930-A (TW)
Inventor: HUANG SHENG-TUNG
IPC: C12Q1/34
Filed: 2022-01-28
Abstract: A molecular probe has a structure represented by a formula I, and is adapted to detect an alanine amino peptidase. In an electrochemical detection method for detecting alanine amine peptidase by using the molecular probe, the molecular probe in a electroanalytical device reacts with an analyte, which is in a solution containing a buffer and an organic solvent, and a measurement is executed through a voltammetry method, to obtain a current-voltage diagram. In the current-voltage diagram, when a current contributed by a ferrocene derivative represented by a formula II is shown at a negative potential, the alanine amine peptidase exists in the analyte. In the formulas I and II, R1 represents H or -(CH2CH2O)2CH3, and R2 represents H or -CH2OH.
Patent TW-202246887-A (TW)
Title: Pellicle, and method for manufacturing pellicle
Inventor: OKU HIDEHIKO
IPC: C23C16/42
Filed: 2022-02-16
Abstract: To provide: a pellicle capable of suppressing cracking of a pellicle film; and a method for manufacturing the pellicle. A pellicle comprises: a silicon (Si) border including a boron (B)-containing Si layer; and a pellicle film formed on a surface side of the Si layer. Preferably, the Si border includes a through-hole, and the pellicle film is exposed on the bottom surface of the through-hole.
Patent TW-202239366-A (TW)
Title: Cleaner
Inventor: JANG JAE-WON
IPC: A47L11/40
Filed: 2022-02-25
Abstract: The present disclosure relates to a wet mop module for a cleaner, the wet mop module including a water supply nozzle configured to discharge water from a water tank to a mop, in which the water supply nozzle includes a nozzle body having a water discharge port formed at one end thereof, the water discharge port being configured to discharge water to the mop, and the water discharge port is formed to be inclined, thereby preventing a water droplet from clogging the discharge port, and preventing debris contained in a water droplet from clogging the discharge port as the formed water droplet is dried.
Patent TW-202306054-A (TW)
Title: Semiconductor devices having supporter structures
Inventor: LEE HO-IN
IPC: H01L23/525
Filed: 2022-03-31
Abstract: A semiconductor device includes lower electrodes, a first supporter structure including first supporter patterns interconnecting the lower electrodes, wherein side surfaces of the first supporter patterns and side surfaces of the lower electrodes that are exposed by the first supporter patterns at least partially define a first open region, the first supporter patterns being spaced apart from one another, the first open region extending among the first supporter patterns in a horizontal direction, a dielectric layer covering the first supporter structure and the lower electrodes, and an upper electrode on the dielectric layer. A distance between adjacent ones of the first supporter patterns is smaller than or equal to a pitch of the lower electrodes.
Patent TW-202230107-A (TW)
Inventor: KIM WOONG
IPC: G06K19/06
Filed: 2020-07-22
Abstract: 本發明揭露一種用於驗證包裹的內容物及顯示封裝指令的電腦實行系統。系統可包含使用者介面，使用者介面經組態以用於：自第一資料庫檢索第一訂單資訊；顯示包含於第一訂單資訊中的一或多個產品標識符；接收第二未知標識符集；顯示來自對應於匹配第二未知標識符集的產品標識符集的第二資料庫的一或多個產品相片；顯示用於將一或多個產品封裝至第一包裹中的封裝指令；接收第三未知標識符；將第三未知標識符與第一訂單資訊的第一包裹標識符匹配；接收第四未知標識符；將第四未知標識符與第一訂單資訊匹配；以及將信號傳輸至第一資料庫以更新第一訂單資訊的第一狀態資訊。
Patent TW-202322408-A (TW)
Inventor: CHERN CHAN-HONG
IPC: H01L29/94
Filed: 2022-04-11
Abstract: 一種方法包括將III-V族晶粒直接地接合到互補式金屬氧化物半導體(CMOS)晶粒，以形成晶粒堆疊。III-V族晶粒包括(111)半導體基板和第一電路，第一電路包括形成在(111)半導體基板的表面處的基於III-V族的n型電晶體。CMOS晶粒包括(100)半導體基板，以及在(100)半導體基板上包括n型電晶體和p型電晶體的第二電路。第一電路電性連接到第二電路。
Patent TW-202245043-A (TW)
Title: Wafer processing method
Inventor: ZHAO JINYAN
IPC: C09J7/20
Filed: 2022-04-21
Abstract: A wafer processing method includes an affixing step of affixing a wafer to a sheet via a die attach layer having a diameter larger than a diameter of the wafer, to thereby form a protruding portion of the die attach layer on a periphery of the wafer, and a protruding portion removing step of removing the protruding portion from the sheet by bringing a removing member into contact with the protruding portion.
Patent TW-202240472-A (TW)
Title: Fingerprint identification circuit, display panel and control method thereof
Inventor: LI DONG-SHENG
IPC: G06F3/041
Filed: 2022-05-03
Abstract: The present application provides a fingerprint identification circuit, a display panel and a control method thereof, where a light sensing circuit in the fingerprint identification circuit is configured to generate a first electrical signal according to a detected light signal reflected by the finger, information of the first electrical signal is stored in a holding circuit, a scanning circuit outputs a second electrical signal for fingerprint identification according to the information of the first electrical signal stored in the holding circuit, so that a fingerprint identification device can complete a collection of electrical signals outputted by all fingerprint identification circuits disposed therein in a case where a user's finger stays for a short time, and thus a fingerprint identification circuit design with a larger area and a higher density in the optical fingerprint identification device can be supported.
Patent TW-202313638-A (TW)
Title: Method for producing oxadisilacyclopentane compound
Inventor: TONOMURA YOICHI
IPC: C07F7/08
Filed: 2022-05-25
Abstract: Provided is a method for efficiently producing, at a high yield, an oxadisilacyclopentane compound represented by general formula (3) (in the formula, R1-R4 each independently represent an unsubstituted monovalent hydrocarbon group having 1-4 carbon atoms), the method comprising causing a reaction between water and an azadisilacyclopentane compound represented by general formula (1) [in the formula, R1-R4 each represent the same as described above, R5 represents a hydrogen atom, a substituted or unsubstituted monovalent hydrocarbon group having 1-20 carbon atoms, or a group represented by general formula (2)(in the formula, R1-R4 each represent the same as described above, m represents an integer of 0-5, n represents an integer of 1-5, and a dashed line represents a binding hand)].
Patent TW-202313545-A (TW)
Title: Salt, acid generator, resist composition, and method for producing resist pattern
Inventor: KOMURO KATSUHIRO
IPC: C07C43/225
Filed: 2022-05-25
Abstract: To provide a salt which allows a resist pattern having good CD uniformity (CDU) to be produced, and a resist composition containing the same. There are provided a salt represented by a formula (I), an acid generator, and a resist composition containing the same. [In the formula, R4, R5, R7 and R8 each represent a halogen atom, a haloalkyl group or a hydrocarbon group and A1 and A2 each represent a hydrocarbon group, provided that the hydrocarbon groups may have a substituent and -CH2- contained in the hydrocarbon groups may be substituted with -O-, -CO-, -S- or -SO2-; m1 represents an integer of 1-5, m2, m4, m5 and m8 represent integers of 0-5, and m7 represents an integer of 0-4, provided that 1 ≤ m1+m7 ≤ 5 and 0 ≤ m2+m8 ≤ 5; and AI- represents an organic anion.].
Patent TW-202247471-A (TW)
Title: Method to fabricate thermally stable low k-finfet spacer
Inventor: BALSEANU MIHAELA
IPC: H01L29/772
Filed: 2019-04-01
Abstract: A method for forming a thermally stable spacer layer is disclosed. The method includes first disposing a substrate in an internal volume of a processing chamber. The substrate has a film formed thereon, the film including silicon, carbon, nitrogen, and hydrogen. Next, high pressure steam is introduced into the processing chamber. The film is exposed to the high pressure steam to convert the film to reacted film, the reacted film including silicon, carbon, oxygen, and hydrogen.