Patent SG-11201907123P-A (SG)
Title: Improved probe card for high-frequency applications
Inventor: VETTORI RICCARDO
IPC: G01R31/28
Filed: 2018-02-13
Abstract: H26 20 25r 24A 22b Fl F2 26 25B 30 32 25A FIG. 2A 33 25B 25 1-1 co co 00 O C (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 23 August 2018 (23.08.2018) WIP0 I PCT omit IIl °nolo Immo oimIE (10) International Publication Number WO 2018/149838 Al (51) International Patent Classification: G01R 1/073 (2006.01) G01R 31/28 (2006.01) G01R 1/067 (2006.01) (21) International Application Number: PCT/EP2018/053593 (22) International Filing Date: 13 February 2018 (13.02.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 102017000017061 15 February 2017 (15.02.2017) IT (71) Applicant: TECHNOPROBE S.P.A. [IT/IT]; Via Cava- lieri di Vittorio Veneto, 2, 23870 Cernusco Lombardone (Lecco) (IT). (72) Inventors: VETTORI, Riccardo; c/o TECHNOPROBE S.p.A., Via Cavalieri di Vittorio Veneto, 2, 23870 Cer- nusco Lombardone (Lecco) (IT). FELICI, Stefano; c/o TECHNOPROBE S.p.A., Via Cavalieri di Vittorio Veneto, 2, 23870 Cernusco Lombardone (Lecco) (IT). (74) Agent: FERRARI, Barbara; BOTTI & FERRARI S.r.l., Via Cappellini, 11, 20124 Milano (IT). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (54) Title: IMPROVED PROBE CARD FOR HIGH-FREQUENCY APPLICATIONS (57) : A probe card (20) for a testing apparatus of electronic devices comprises a testing head (21), which houses a plurality of contact elements (22) extending along a longitudinal axis (H-H) between a first end portion (24A) and a second end portion (24B), a support plate (23), onto which the first end portion (24A) is adapted to abut, and a flexible membrane (25) which comprises a first face (F1) and a second and opposite face (F2). Conveniently, the first portion (25A) of the flexible membrane (25) is arranged on at least one support (28) and comprises a plurality of strips (27) extending between a proximal end (27A) and a distal end (27B), the probe card (20) further including a plurality of micro contact probes (30) comprising a body (30C) extending along the longitudinal axis (H-H) between a first end portion (30A) and a second end portion (30B), the second end portion (24B) of each contact element (22) abutting onto the first face (F1) of the flexible membrane (25) at the distal end (27B) of a respective strip (27), and the first end portion (30A) [Continued on next page] WO 2018/149838 Al MIDEDIMOMOIDEIREEMOMMIEHMIIOMMOVOIMIE SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3)) of each micro contact probe (30) abutting onto the second face (F2) of the flexible membrane (25) at a respective contact element (22), the flexible membrane (25) being electrically connected to the support plate (23) through a second portion thereof (25B), the second end portion (30B) of the micro contact probes (30) being apt to contact the contact pads (32) of a device to be tested, wherein the at least one support (28) is provided with a plurality of guide holes (28h) for the housing of the plurality of micro contact probes (30).