Patent EA-002682-B1 (EA)
Title: Method for depositing wear-resistant coatings and for increasing lifespan of parts
Inventor: PADEROV ANATOLY NOKOLAEVICH
IPC: C23C14/22
Filed: 1999-09-14
Abstract: 1. A method for depositing wear-resistant coatings on metal parts and articles, said method comprising: 1.1. using a chamber for ion-plasmous deposition; 1.2. accommodating parts or articles to be treated inside said chamber as an anode; 1.3. arranging cathodes in said chamber made of metals of 1UA-U1A groups and/or alloys thereof; 1.4. preparing a gas mixture in said chamber, selected from a group of neutral and reactionary gases and a mixture thereof; 1.5. performing, if needed, an ion cleaning of parts/articles surfaces; 1.6. selective ion-plasmous depositing a plurality of coating layers, wherein at least one layer (a) comprises said metals, mixtures thereof or substituting alloys, a second layer (b) comprises solutions of non-metal nitrogen, boron, carbon atoms in said metals and a third layer (c) comprises chemical compounds of said metals with non-metals in the form of nitrides, carbides, borides and a mixture thereof; 1.7. treating one or more said layer by implanting high-energy non-metal ions therein; 1.8. cooling and discharging said parts or articles from said chamber. 2. The method according to claim 1, characterized in that after step 1.8 said parts and articles are subjected to an additional strengthening processing by means of microballs and/or by ion implantation with non-metal atoms. 3. The method according to claim 1, characterized in that said parts or articles are made of  titanium, steels or nickel-based alloys. 4. The method according to claim 1, characterized in that said cathodes are selected from titanium alloys, steels or nickel-based alloys. 5. The method according to claim 1, characterized in that a plurality of layers numbers from 3 to 500, wherein said (a), (b), (c) layers are alternate. 6. The method according to claim 4, characterized in that thickness of said (a), (b), (c) layers are in ratio 1.0:2.0:2.5. 7. The method according to claim 1, comprising a preliminary deposition a microlayer of scandium, yttrium or a rare-earth metal 0.02-0.08 μm thick prior to step (1.6) of the selective deposition. 8. The method according to claim 1, characterized in that said reactionary gases are nitrogen, acetylene, methane or dibonrane. 9. The method according to claim 1, characterized in that argon, carbon or boron ions are used for the ion implantation with an accelerating voltage 10-50 kV, radiation doses 10<14>-10<18> ion/cm<2> and ion energy 5.10<3>-1.10<5> eV. 10. The method according to claim 1, characterized in that said step (1.6) of the ion-plasmous deposition comprises: (a) depositing a scandium layer in the argon atmosphere, (b) depositing a titanium layer in the argon atmosphere, (c) depositing and implanting a layer of nitrogen solid solution with nitrogen in titanium in a gaseous mixture of nitrogen and argon, (d) depositing and implanting a layer of titanium nitride with nitrogen in the nitrogen atmosphere, (e) depositing a zirconium layer in argon, (f) depositing and implanting a layer of nitrogen solid solution with nitrogen in zirconium in a gaseous mixture of nitrogen and argon, (g) depositing and implanting zirconium nitride with nitrogen in the nitrogen atmosphere, (h) repeating said steps (b)-(g) for obtaining said plurality of layers. 11. The method according to claim 1, characterized in that said step (1.6) comprises: (a) depositing the first layer of titanium and zirconium alloy in an inert gas, (b) depositing and implanting titanium and zirconium alloy  (c) repeating said steps (a)-(b) for obtaining said plurality of layers, (d) ion implantation of the deposited coating with argon. 12. The method according to claim 1, characterized in that said step (1.6) comprises: (a) depositing zirconium and titanium alloys in inert gad, (b) depositing zirconium and titanium alloys with boron in a mixture of inert gas with dibonran, (c) depositing and implanting titanium and zirconium borides with boron, (d) repeating said steps (a)-(b) for obtaining said plurality of layers, (e) ion implantation of the deposited multilayer coating with argon. 13. The method according to claim 1, characterized in that said parts are compressor blades of gas turbines or parts thereof. 14. A wear-resistant coating of metal surfaces, comprising depositing at least one layer of metals 1UA-U1A groups, mixtures thereof and/or substituting alloys by an ion-plasmous deposition, at least one layer of solutions of non-metal nitrogen, boron, carbon atoms in said metals in the form of nitrides, carbides, borides and a mixture thereof, implanting high-energy non-metal ions comprising argon, nitrogen, carbon or boron atoms in at least one said layer. 15. Parts and articles having coatings deposited by the method according to any of claims 1 to 12. 16. Parts and articles having coatings according to claim 14.