baber/WOPTO huggingface dataset:
Patent KR-20010023325-A (KR)
Title: Adipocyte-specific protein homologs
IPC: C12N15/09
Filed: 1998-08-26
Abstract: The present invention relates to polynucleotide and polypeptide molecules for zsig39, a novel member of the family of proteins bearing a collagen-like domain and a globular domain. The polypeptides, and polynucleotides encoding them, are involved in dimerization or oligomerization and may be used in the study thereof. The present invention also includes antibodies to the zsig39 polypeptides.
Patent KR-20010030720-A (KR)
Title: 마이크로 구조화된 필터
IPC: A61M15/00
Filed: 1998-08-28
Abstract: 본 발명은 상호 병치 관계의 적어도 2개의 열(3)로 배열되고 베이스 플레이트(1) 밖으로 돌출하고 베이스 플레이트(1)의 통합 부품인 복수개의 돌출부(7), 돌출부(7) 사이의 복수개의 통로(8), 및 돌출부(7) 및 통로(8)를 커버하도록 베이스 플레이트(1)에 고정될 수 있는 커버 플레이트를 포함하고, 여기서, 통로는 입구로부터 출구에 이르는 복수개의 직통 경로를 형성하고, 상기 입구는 실질적으로 전체 필터 폭 이상으로 확장하고, 필터의 입구 측 상의 베이스 플레이트 밖으로 돌출하는 돌출부(7) 만큼 실질적으로 높은 여과되지 않은 유체를 위한 신장 입구 슬롯(5)을 포함하고, 상기 출구는 실질적으로 전체 필터 폭 이상으로 확장하고, 필터의 출구 측 상의 베이스 플레이트 밖으로 돌출하는 돌출부(7) 만큼 실질적으로 높은 여과된 유체를 위한 신장 출구 슬롯(5)을 포함하는, 여과되지 않은 유체를 위한 입구 및 여과된 유체를 위한 출구를 갖는 유체용의 마이크로 구조화된 필터에 관한 것이다.  본 발명에 따른 필터는 그 필터 영역의 일부가 차단되는 경우조차 작동 유지된다.  이 필터는 예를 들면 에어로졸이 의약을 함유하는 유체로부터 생성되는 분무기에 사용된다.
Patent KR-20010031381-A (KR)
IPC: H04N19/89
Filed: 1998-10-23
Abstract: A system and method for source coding and decoding a signal to provide for a robust error recovery is disclosed. The signal comprises a plurality of signal elements (SEs) with each SE having a plurality of components. The signal is divided into a plurality of data sets, each data set having a set of SEs. SEs of a data set are allocated to a plurality of segments. Components of the allocated SEs are distributed across the plurality of segments. In one embodiment, this is used in the transmission of video signals over a potentially lossy communications channel.
Patent KR-20010033072-A (KR)
IPC: A61K31/325
Filed: 1999-01-08
Abstract: Pharmaceutical composition comprising (S)-N-ethyl-3-[1-dimethylamino)ethyl]-N-methyl-phenyl-carbamate in free base or acid addition salt form and an anti-oxidant. Said pharmaceutical compositions may be delivered to a patient using a transdermal delivery device.
Patent KR-20010081928-A (KR)
Title: 리튬 ２차 전지 및 그의 제조방법
IPC: H01M4/58
Filed: 1999-12-02
Abstract: 본 발명은 음극 및 음극을 갖고, 각각의 전극은 리튬이온을 포함 및 방출할 수 있는 활성 물질을 함유하는 리튬 2차 전지에 관한 것이다. 상기 음극은 50 내지 99 중량%의 규소 및 1 내지 50 중량%의 탄소질 물질을 함유하는 소결체를 포함하고, 1 S/cm 이상의 전도율을 갖는다. 음극 활성 물질로서 규소 및 탄소 재료를 함유하는 소결체를 포함하는 음극을 사용함으로써, 활성물질의 충전 밀도 및 체적당 부피가 증가될 수 있다. 또한, 1 S/cm 이상의 음극 전도율은 고 용량 및 향상된 사이클 특성을 제공할 수 있다.
Patent KR-20010042239-A (KR)
Title: Ｅｕｖ- 리소그래피용 조명장치
IPC: G21K5/00
Filed: 1999-05-04
Abstract: 본 발명은, 예정된 표면에 조명장치(A)를 갖는 적어도 하나의 광원, 2차 광원을 형성하기 위한 적어도 하나의 장치, 래스터 소자로 나누어지는 적어도 하나의 미러 또는 렌즈를 갖는 적어도 하나의 미러 장치 또는 렌즈 장치, 래스터 소자로 나누어지는 적어도 하나의 미러 또는 렌즈를 갖는 상기 미러 장치 또는 렌즈 장치와 레티클 평면 사이에 배치된 하나 이상의 광학 소자를 포함하며, 상기 광학 소자들이 조명장치의 사출동 내부로 2차 광원을 투영하도록 구성되고, 파장이 ≤ 193nm인, EUV-리소그래피용 조명장치에 관한 것이다.  본 발명에 따른 조명장치는, 광원이 파장 스펙트럼을 갖는 특이한 평면 내부로 방사되는, 파장이 ≤ 193nm인 빔을 형성하기 위한 광원이며, 특히 리소그래피용으로 사용되는 파장 범위는 5mrad보다 더 작은 상기 평면에 대해 수직으로 빔을 발산시키는 것을 특징으로 한다.
Patent KR-20010034879-A (KR)
Title: 전송함수에서 지연된 데이터 프레임을 검출하기 위한 방법
IPC: H04L1/18
Filed: 1999-05-19
Abstract: 전송함수에서 지연된 데이터 프레임을 검출하기 위한 본 발명의 방법은 프레임 시퀀스 카운터를 미리 결정된 임계값(304)과 비교하는 단계와, 상기 시퀀스 카운터가 상기 임계값을 초과하는 경우 지연된 프레임을 검출하는 단계와, 상기 검출된 지연 프레임(306)을 처리하는 단계를 포함한다.  RLP 데이터 전송 프로토콜에서, 지연된 프레임은 재전송된 프레임으로써 처리될 수 있다.  임계값은 주어진 번들로 전송된 최대 수의 프레임과 공중을 통해 동일한 프레임 간격으로 동시에 전송된 프레임간의 최대 지연의 곱에 비례할 수 있다.
Patent KR-20010035169-A (KR)
Inventor: LEE SUN KOON
IPC: B01D53/34
Filed: 2001-01-09
Abstract: PURPOSE: A filter media for removing organic material, odor and non-biodegradable material by nitrification and denitrification and for removing volatile organic chemical by adsorption, decomposing and oxidation is provided, which can remove nitrogen of high concentration only by filtration through filter media of bead type and ring type made of germanium, illite, bio-ceramic, activated carbon, zeolite and TiO2 (only for ring type) by charging in a settling tank and an aeration tank for optimizing the generating condition of microorganism and for shortening the reaction cycle. CONSTITUTION: The system comprises the followings: (i) a body (10) consisting of two half bodies (11,11a) that has a fixing bar of catalyzing filter media set at the center of frames (13,13a), flat and long frames (13,13a) of half sphere formed on round hoops (12,12a) that has connecting grooves and projections; (ii) bead type filter media (20) set inside of the ring type grooves (15) formed by combining round hoops (12,12a) of the body (10), the bead type medium being made of germanium (21), illite (22), bio-ceramic (23), activated carbon (24) and zeolite (25); and (iii) ring type filter media (30) inserted into the vertical filter media fixing bar at the center of the body (10), the ring type media being made of germanium, illite, bio-ceramic, activated carbon, zeolite and TiO2.
Patent KR-20010076244-A (KR)
Title: Peripheral exposure apparatus
Inventor: NARAKI TSUYOSHI
IPC: H01L21/027
Filed: 2001-01-11
Abstract: PURPOSE: To improve the throughput and the working rate of a peripheral aligner. CONSTITUTION: A light source unit 14A and a light source unit 14B are respectively movable in ±X directions along a support member 12A and a support member 12B. The support members 12A and 12B are made to travel in ±Y directions, while emitting light beams from both light source units 14A and 14B, so that the photoresist of the peripheral part of a glass substrate G is exposed. In the state where either the light source units 14A or 14B is turned off, peripheral exposure operation is continued by the other light source unit. This, the continuation of the peripheral exposure operation by only the other light source unit is attained during the cool-down and the warm-up periods of a lamp needed at exchanging of the lamp of the other light source unit. Also, at exposing of an exposure object area along one line, both light source units 14A and 14B are moved in tandem along one line.
Patent KR-20020061027-A (KR)
Title: Emitting light apparatus of hula hoop
Inventor: JUN DONG IN
IPC: A63B19/00
Filed: 2001-01-12
Abstract: PURPOSE: A hula hoop containing a plurality of light emitting elements illuminated by an electrical power source inside tubular body of a hula hoop is provided. It gives visual pleasing to a user during play by illumination of the light emitting elements. CONSTITUTION: This light emitting device of a hula hoop comprises a plurality of luminous elements(112) disposed in a hollow tubular body(101) and a light emitting means for illuminating the light emitting element, wherein the light emitting means comprises a battery(111) mounted inside of the tubular body for supplying an electrical power source with the light emitting element and an electric wire(113).
Patent KR-20020066572-A (KR)
Title: Semiconductor device with anti-fuze and method of fabricating the same
Inventor: BANG GWANG GYU
IPC: H01L27/02
Filed: 2001-02-12
Abstract: PURPOSE: A semiconductor device having an anti-fuse and a method for fabricating the same are provided to replace a bad cell and a bad circuit with a spare cell and a spare circuit by a wire connection method using laser. CONSTITUTION: A lower insulating layer(100) is formed on a substrate. The first conductive layer pattern(101) is formed on the lower insulating layer(100). The first conductive layer pattern(101) is formed by aluminium or cooper. An interlayer dielectric(102) is formed on the lower insulating layer(100) and the first conductive layer pattern(101). The second conductive layer pattern(103) is formed on the interlayer dielectric(102). The second conductive layer pattern(103) is formed by a silicon oxide layer or a silicon nitride layer. The second conductive layer pattern(103) is covered by an upper insulating layer(104).
Patent KR-20020066626-A (KR)
Title: Wafer edgy exposure method
Inventor: BANG JUN SEUNG
IPC: H01L21/027
Filed: 2001-02-13
Abstract: PURPOSE: A wafer edge exposure method is provided to prevent photoresist residues at a wafer edge portion by continuously exposing the wafer edge portion without stopping at meeting points between a wafer flat zone and a wafer curve. CONSTITUTION: A photoresist deposited at an edge portion of a wafer(100) is entirely exposed by circulating the wafer(100) to a defined direction without stopping as the first exposure. At this time, the first exposure is started at a flat zone(110) by a light supplier. Then, the flat zone(110) is repeatedly exposed after the first exposure, because the photoresist deposited on the flat zone(110) is thicker than the photoresist deposited on the other zone of the wafer(100). Then, the photoresist deposited at the edge portion of the wafer(100) is removed by dipping the wafer(100) into a developing solution.
Patent KR-20010098389-A (KR)
Title: 동물사육용 깔개
IPC: A01K1/015
Filed: 2001-02-22
Abstract: 본 발명은 동물사육용 깔개로서, 종래부터 동물사육용 깔개로서 사용되고 있던 볏짚, 보릿짚, 천연모래, 인공모래 등의 대용품으로 못 쓰게 된 종이를 주원료로 하여 못 쓰게 된 종이의 유효한 재이용방법을 꾀한 동물사육용 깔개이며, 이 깔개는 입자형상이나 또는 재단된 못 쓰게 된 종이에 광촉매물질을 부착시키고 있는 것을 특징으로 한다.
Patent KR-20010085522-A (KR)
Title: Negative potential detection circuit, and semiconductor memory device having the negative potential detection circuit
Inventor: KURIYAMA MASAO
IPC: G11C16/30
Filed: 2001-02-23
Abstract: PURPOSE: To provide a negative potential detecting circuit which is superior in detection sensitivity and current consumption while simplifying circuit design and pressure-resistant design, and a semiconductor memory provided with the negative potential detecting circuit. CONSTITUTION: This circuit is provided with an output terminal of a constant current source 10 receiving an external power source Vcc and outputting a constant current I, resistors R10, R11 connected in series between a negative potential power source generating a negative potential VBBO and the constant current source 10, a connection node V1 of these resistors R10 and R11, a resistor 12 connected between the reference power source generating a constant potential Vx and the V1 and an operation amplifier OP10 detecting a level of the negative potential VBBO by comparing potential of the constant current source 10 and the resistor 10 with the reference potential Vref.
Patent KR-20020069318-A (KR)
Title: The pretreatment agent containing cationic agent for cotton fiber in ink-jet printing and its treating method
Inventor: KIM TAE GYEONG
IPC: D06P5/22
Filed: 2001-02-24
Abstract: PURPOSE: A method for treating cotton fibers by cationizing cotton fibers using a pretreating agent containing a cationizing agent during pretreatment of cotton fibers is provided. Whereby, the treated cotton fibers are increased in similarity between a printed cotton fiber color and a ground pattern color and high in wash fastness and dye fastness. CONSTITUTION: The pretreating agent for ink jet printing of cotton fibers and cotton fiber blended yarn or a mixture fabric is prepared by mixing 0.01 to 30% by weight of a cationizing agent as a cotton fiber pretreating agent, 1 to 5% by weight of an aqueous polymer, 1 to 20% by weight of urea, 1 to 5% by weight of alkaline material, 1 to 10% by weight of a neutral salt and 50 to 90% by weight of water. Cotton fibers are soaked in the pretreating agent and dried at 120deg.C for 3min, and the pretreated cotton fibers are printed with a reactive dye, heated at 100deg.C for 30min, washed with an anionic surfactant at 90deg.C for 20min and then dried.
Patent KR-20020067959-A (KR)
Inventor: LEE YUN HAN
IPC: A61P31/12
Filed: 2001-03-08
Abstract: PURPOSE: Provided is a novel high-throughput system for functional genomics using unidirectional and subtracted antisense cDNA library, thereby analyzing novel genomics. CONSTITUTION: The method for constructing unidirectional antisense cDNA library comprises the steps of: separating RNA from a specific or disease related cell line or tissue; performing reverse transcription using the RNA as a template to synthesize cDNA strands therefrom; linking a restriction enzyme adaptor to ends of the synthesized cDNA; cloning cDNA fragment into a phagemid vector treated with the same restriction enzyme above to obtain a recombinant phagemid; manufacturing a transformant using the recombinant phagemid; and producing single stranded antisense DNA by coinfecting the transformant and a helper phage to construct unidirectional antisense cDNA library.
Patent KR-20020072828-A (KR)
Inventor: KIM SAM JONG
IPC: H04B1/38
Filed: 2001-03-13
Abstract: PURPOSE: A hinge device is provided to maintain an open state of the second body combined with a fixed cam and fix the second body at various positions for which a user wishes by composing a bridge portion on a slope surface which forms a cam surface of a moved cam. CONSTITUTION: A bridge portion is formed on the second slope surface(57) between a mountain(54) and a valley which form a cam surface of a moved cam(50) for limiting the slide of a fixed asperity as to the second slope surface(57). The bridge portion is formed so that the second body maintains various open states as to the first body and is fixed to the first body. The bridge portion is a bridge asperity(90) protruded from the second slope surface(57). When performing a relative motion of the cam surface and the fixed asperity, the fixed asperity is bridged to the bridge asperity(90) for preventing that the fixed asperity is slid from the second slope surface(57), and the fixed asperity is fixed to the second slope surface(57).
Patent KR-20020074579-A (KR)
Title: Powdery humidity self control material and its preparation method
Inventor: KIM HYO JUNG
IPC: C01B33/14
Filed: 2001-03-20
Abstract: PURPOSE: A powdery self humidity control material is provided to control indoor humidity between 40 % to 70 % automatically irrespective of outdoor humidity changes. CONSTITUTION: The method comprises the steps of forming porous gel by reverse titration where sodium silicate solution is added to acid solution; aging the porous gel at pH 4.0 to 6.0, followed by washing, drying and calcination. Above reverse titration is not subject to redissolution process and carried out at 0 to 10 deg.C. The obtained powdery self humidity control material has porosity of 3.0 to 6.0 nm and porous volume of 0.7 to 1.0 cc/g.
Patent KR-20020080065-A (KR)
Inventor: CHOI JANG HYEON
IPC: C25D1/04
Filed: 2001-04-11
Abstract: PURPOSE: Electrolytes for Fe-Ni alloy electroforming is provided to produce continuously a large quantity of high quality Fe-Ni alloy. CONSTITUTION: In the electrolytes for Fe-36% Ni alloy electroforming (invar alloy) comprising Fe compounds and Ni compounds, the electrolytes are characterized in that the mole ratio of Fe to Ni is 1:2.5 to 1:2.8. In the electrolytes for Fe-42% Ni alloy electroforming comprising Fe compounds and Ni compounds, the electrolytes are characterized in that the mole ratio of Fe to Ni is 1:4.2 to 1:4.4. In the electrolytes for Fe-78% Ni alloy electroforming (permalloy) comprising Fe compounds and Ni compounds, the electrolytes are characterized in that the mole ratio of Fe to Ni is 1:22.0 to 1:22.3. The Fe compounds are iron(II) sulfate or iron(II) chloride, and the Ni compounds are nickel(II) chloride or nickel(II) sulfate. The electrolytes further comprise boric acid 25g/L, sodium lauryl sulfate 0.2g/L, sodium saccharine 2.4g/L, sodium chloride 30g/L, and sodium citrate 5g/L.
Patent KR-20020084552-A (KR)
Title: Fuel pipe of diesel engine
Inventor: SHIN MIN GYU
IPC: F02M37/00
Filed: 2001-05-03
Abstract: PURPOSE: A sealing of rubber material is formed in outer circumference of a fuel pipe for closing with an inner circumference of a nut which connects a fuel pump with a fuel distributor and a fuel distributor with an injector. CONSTITUTION: An expansion portion is formed at both end of metal pipe for conveying fuel. The expansion portion is received in a connector to connect a fuel pump, a fuel distributor, and an injector. A sealing(14) of a rubber material is formed between seat portion(22) of the connector and a slanting surface(12) in outer circumference of the expansion portion. When connecting the connector to the fuel pump, fuel distributor, and injector, even though the center of the fuel pipe is put out of the center of the connector, the sealing of the rubber material absorbs the difference. Therefore, leakage of oil is prevented.
Patent KR-20010109080-A (KR)
Title: 정상 상태에서 토폴로지 메시지 트래픽 없는 분산형컴퓨팅 환경에서의 토폴로지 전파
IPC: G06F9/06
Filed: 2001-05-07
Abstract: 분산형 컴퓨팅 환경에서의 서로 다른 노드에 공통의 네트워크 토폴로지 데이터베이스를 유지시키기 위하여 토폴로지 전파 기능이 제공된다.  이 기능은 상기 분산형 컴퓨팅 환경이 정상 상태에 있는 경우 메시지 트래픽을 발생시키지 않는다.  이것은 상기 분산형 환경에서 토폴로지 변화가 없는 시간 주기 동안 그룹 접속 메시지의 송신을 중단함으로써 달성된다.  그룹 접속 메시지의 송신은 상기 분산형 컴퓨팅 환경에서 상기 그룹 리더에 의한 적어도 하나의 토폴로지 변화 확인시 적어도 하나의 그룹 리더로부터 재개된다.  그룹 접속 메시지는, 양 노드 그룹에 대해 공통인 노드를 사용하여 제1 네트워크 상의 하나의 노드 그룹으로부터 제2 네트워크 상의 또다른 노드 그룹으로 전송된다.  분산형 컴퓨팅 환경의 네트워크는, 상기 토폴로지 전파기능이 네트워크의 상호 동작 성능을 조성할 수 있도록 이질의 네트워크들(heterogenous networks)을 포함할 수 있다.
Patent KR-20020087194-A (KR)
Inventor: YOON BEOM DEOK
IPC: A01G1/04
Filed: 2001-05-14
Abstract: PURPOSE: Provided is a solid cultivation method of Cordyceps sinensis, thereby mass-producing pharmaceutical materials which has similar pharmaceutical efficacies to Cordyceps sinensis. CONSTITUTION: The solid cultivation method of Cordyceps sinensis is characterized by inoculating Cordyceps sinensis seed to a solid medium selected from the group consisting of rice flour, soybean powder, yeast extract-peptone, and soybean dregs; culturing it at 5-25 deg.C for 15-25 days to grow mycelia massively; and drying and powdering them.
Patent KR-20020088009-A (KR)
Title: Clock timing recovery circuit and Method for DMT system
Inventor: LEE JUN SEONG
IPC: H04L7/02
Filed: 2001-05-15
Abstract: PURPOSE: A clock timing recovery circuit for an individual multi-tone system and a clock timing recovery method are provided, which can minimize a hardware size without using the adding/subtraction of samples and can induce a rapid convergence to an error, and can increase a frequency efficiency. CONSTITUTION: An A/D(Analog/Digital) converter(20) converts an analog signal into a digital signal, and an FFT(Fast Fourier Transform) part(21) converts an input signal in a time domain into a signal in a frequency domain. An initial timing detector(24) calculates an initial timing error as a slope from a transposition sign of the frequency domain received through the FFT part. A hard decision unit(23) detects a signal transmitted on the basis of an output value of a phase rotator(22), and a timing error tracker(25) obtains a remained error from signals after the hard decision of the hard decision unit. An adder obtains an error by adding an output value from the initial timing detector and the remained error obtained in the timing error tracker. And the phase rotator corrects a phase using the obtained error.
Patent KR-20020087696-A (KR)
Inventor: YOO YEONG GWAN
IPC: B62D1/19
Filed: 2001-05-16
Abstract: PURPOSE: A steering column for a vehicle is provided to easily manufacture and install a steering column by compacting the structure of a shock absorbing device between an outer pipe and an inner pipe. CONSTITUTION: A steering column has an outer pipe(10) and an inner pipe(20). An upper bracket(11) is formed outside the outer pipe. A lower bracket(21) is prepared outside the inner pipe. A ring bush for absorbing shock is installed in between the inner pipe and the outer pipe. An annular dividing ring(41) is installed in the ring bush. If a shock is transmitted from the outside, the dividing ring slides. The inner pipe slides in the outer pipe. With the frictional force generated by the sliding of the inner pipe, the shock is absorbed.
Patent KR-20020093547-A (KR)
Title: Wireless positioning method for in-building using the delay
Inventor: KIM DONG YEONG
IPC: H04B7/14
Filed: 2001-06-09
Abstract: PURPOSE: A method for measuring a position of a motion body for an in-building service using a delay element is provided to embody a function for tracing the position of a subscriber in the in-building service by installing the time delay element between a remote unit and an antenna, differently setting a delay time per the antenna, and discriminating a servicing antenna using the delay time in a BTS(Base station Transceiver Subsystem). CONSTITUTION: Delay elements(15a-15n) are installed at antenna sides installed in a servicing area in a building, and delay times of the delay elements(15a-15n) are differently set according to antennas. A BTS(12) calculates an RTD(Round Trip Delay) in which a BTS signal is transmitted to an MS(Mobile Station) and is fed back gain. The BTS compares a predetermined delay time value of an antenna with the RTD, discriminates an antenna which services the MS, and grasps a position of the MS. The delay elements(15a-15n) are installed between remote units(14a-14n) and the antennas so that the degree of the delay times is differently set according to the antennas and the delay time values are set in a maximum long interval according to the antennas in consideration of an error of the RTD value received from the MS.
Patent KR-20020095605-A (KR)
Title: Container with separate storage spaces
Inventor: HSU LILY
IPC: B65D25/08
Filed: 2001-06-15
Abstract: PURPOSE: Provided is a container having separated storage spaces which mixes the contents by push-down operation or pull-up operation and conveniently separate a first material from a second material without a sealing member. CONSTITUTION: The container includes a main body, an outer binding member, an inner binding member, cutting member and a covering member. The main body has storage spaces defined by walls to receive a first material and an opening part to connect the storage spaces. The outer binding member is firmly fixed in the opening part and has a hole to connect to the opening part of the main body. The inner binding member is firmly joined to the outer binding member to prevent the first material from escaping from the opening part of the main body. The cutting member does not contact with a sealed package when it is in a first position but is opened when it is in a second position so that the first material is mixed with a second material.
Patent KR-20030001167-A (KR)
Inventor: JANG YUN YEONG
IPC: C07D231/56
Filed: 2001-06-28
Abstract: PURPOSE: Provided are novel 2,4-difluorobenzamide derivatives which are excellent in inhibition of the growth of both HBV and HCV, and thus used as prevention and treatment agents for HBV hepatitis and HCV hepatitis. also, provided are their pharmaceutically acceptable salts and their manufacturing method. CONSTITUTION: The 2,4-difluorobenzamide derivative is represented by the formula(1), wherein R1 is C1-C4 linear or branched alkyl group, hydroxy group, a C2-C6 alkylamino group, a 4-sulfamoylphenyl group, or a saturated or unsaturated 5 or 6 membered hetero cycle having 1-2 of hetero atoms selected from N, O and S; R2 is H or a C1-C3 linear or branched alkyl group; or R1 and R2 are bound together with 1-2 of hetero atoms selected from N, O and S to form a saturated or unsaturated 5, 6 or 7 membered hetero cycle, wherein the hetero cycle is a C1-C4 linear or branched alkyl group, or substituted or unsubstituted with a C1-C3 hydroxyalkyl group; and R3 is a 5-indazolyl group; and n is an integer of 0-4.
Patent KR-20030004547-A (KR)
Title: Flange seal for heater line of asher
Inventor: JANG DONG JUN
IPC: H01L21/00
Filed: 2001-07-05
Abstract: PURPOSE: A sealing part of a heater line flange in an ashing apparatus is provided to prevent a lowering phenomenon of quality in a wafer and reduce an operating time of the ashing apparatus by improving a sealing function of the ashing apparatus. CONSTITUTION: The first flange(130a) has a hole(H1) into which a heater line(110) is inserted. The first flange(130a) is formed with a male screw. The second flange(130b) has a hole(H2) into which the heater line(110) is inserted. The second flange(130b) is formed with a female screw. The second flange(130b) is combined with the first flange(130a). A sealing member(130c) is inserted into a combination portion between the first flange(130a) and the second flange(130b). An O-ring is used as the sealing member. The sealing member is closely contacted with the heater line(110) by pushing the sealing member.