Patent UA-97893-C2 (UA)
Title: Method of redundant measurements of linear dimensions of nano-objects
Inventor: KONDRATOV VLADYSLAV TYMOFIIOVYCH
IPC: G01B11/02
Filed: 2010-10-15
Abstract: The invention relates to measuring means for development of high-accuracy digital measuring devices for linear dimensions of nano-objects. The method of excess measurements of linear dimensions of nano-objects is in illumination of the image of the nano-object with flux of radiation with given powerand wavelengthwith narrow spectral band, formation of primary spatial optical image of nano-object, its optical amplificationtimes, optical-electronic appropriate conversion of spatial primary optical image to spatial discrete-analog signal. Its integration during a given time interval, amplificationtimes and analog-digital conversion of spatial discrete-analog signal to data massif, ordered remembering, reverse conversion of those data to increased in dimensions secondary optical image, additional formation on the screen of display and bringing into coincidence with the secondary optical image obtained of images of two linear normal to each other scales with respective numerical marks and determination of the value of length by numerical marks of scales or by coordinate grid with a priori normalized dimensions of square sides. First one sets the first normalized valueof coefficient of conversion of image, with lighting the length nano-measure, image of primary optical image of the length nano-measure as vertical strips with same thicknesses is amplifiedtimes with conversion to secondary image with normalized by value separation, in electronic way one changes the scale of the main marks of two linear normal to each other scales till the value of distancebetween adjacent marks of scales becomes equal to amplifiedtimes value of distancebetween parallel vertical strips of length nano-measure, i.e. to, with bringing into coincidence the origin with one of vertical strips of the secondary image of the length nano-measure, with dividing dimensions of squares of the coordinate grid obtained to ten partsand with artificial formation of an additional fine grid with normalized by values separation, one remembers the graphical image of scales with the main and additional coordinate grids obtained at the screen of the display, with replacement of the length nano-measure with another nano-measure with linear dimension with length, that is chosen from the condition that, in same way one transforms the primary optical image of the second nano-measure to secondary one at coefficient of conversion of image equal to, with determination of lengthof the secondary optical image of the second nano-measure, the value obtained for lengthoris remembered, one replaces the second length nano-measure by the nano-object under investigation with unknown length, in same way one determines the lengthof the secondary optical image of the object under investigation, the value of lengthorobtained is remembered, with determination of the second normalized valueof coefficient of amplification of the image, with determination of lengthof the secondary optical image of the nano-object under investigation, one replaces the nano-object under investigation with unknown lengthwith the second nano-measure, at new value of coefficient of conversionone determines the lengthof the secondary optical image of the nano-measure, on the real value of length of the nano-object under investigation one makes conclusion by an equation in numeric values given. The invention provides exclusion of systematic errors of measurement.