Patent SG-11201907759Q-A (SG)
Title: Microwave applicator with solid-state generator power source
Inventor: KAMAREHI MOHAMMAD
IPC: H05B6/80
Filed: 2018-01-16
Abstract: Load (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 20 September 2018 (20.09.2018) HEIR INNEN 011 (10) International Publication Number WO 2018/169600 Al WIPO I PCT (51) International Patent Classification: H05B 6/64 (2006.01) H05B 6/80 (2006.01) H05B 6/68 (2006.01) H01L 21/02 (2006.01) H05B 6/70 (2006.01) (21) International Application Number: PCT/US2018/013845 (22) International Filing Date: 16 January 2018 (16.01.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15/460,611 16 March 2017 (16.03.2017) US (71) Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive, Suite 201, Andover, Massachusetts 01810 (US). (72) Inventors: KAMAREHI, Mohammad; 504 Katadin Dri- ve, Lexington, Massachusetts 02421 (US). TRENHOM, Ken; 191 Porcupine Circle, Salem, New Hampshire 03079 (US). SANFORD, Colin; 5 Hayden Drive, Atkinson, New Hampshire 03811 (US). WENZEL, Kevin; 11 Glenn Road, Belmont, Massachusetts 02478 (US). KELLER, Olivia; 14 Boxford Road, Topsfield, Massachusetts 01983 (US). (74) Agent: MILLS, Steven M. et al.; Burns & Levinson LLP, 125 Summer Street, Boston, Massachusetts 02110 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, = (54) Title: MICROWAVE APPLICATOR WITH SOLID-STATE GENERATOR POWER SOURCE 200 r 220 236 201 Th 202 216- 2 218 —204 • 212 214 Coax-to-Waveguide Transition 224 Power Meter • Forward • Reflected 226 22 8 Power .II Detection SSG 2,450 MHz Spectrum Analyzer 222 Frequency Detection 1-1 O 1-1 00 1-1 O O 206 2 210 -230 Fig. 2 (57) : A microwave system has a solid-state generator which generates microwave energy and includes at least one control input for receiving a control signal to vary electrically a parameter of the microwave energy. A microwave load receives the microwave energy and produces an effect in response to the microwave energy. A microwave conducting element couples the microwave energy to the microwave load. An impedance match adjusting device is coupled to the microwave conducting element to vary at least one of the parameters of the microwave energy. The effect produced in response to the microwave energy is altered by both electrical variation of the parameter of the microwave energy via the control signal and adjustment of the impedance match adjusting device to vary the parameter of the microwave energy. [Continued on next page] WO 2018/169600 Al MIDEDIMOMOIDEIREEMOMOHIMIIIMMIONVOIMIE SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(11)) Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))