baber/WOPTO huggingface dataset:
Patent JP-2011116847-A (JP)
Title: Tread rubber composition and pneumatic tire
Inventor: TAGUCHI TAKAFUMI
IPC: C08K5/31
Filed: 2009-12-02
Abstract: <P>PROBLEM TO BE SOLVED: To provide a tread rubber composition capable of improving weather resistance and durability on bad roads of a tire without deteriorating its appearance, and a pneumatic tire having a tread manufactured using the same.  <P>SOLUTION: The tread rubber composition comprises: a rubber component; a paraffin wax containing an iso component and a normal component; a sulfenamide vulcanization accelerator; a guanidine vulcanization accelerator; and sulfur. In the paraffin wax, the distribution of the number of carbon atoms is 20 to 50, the mass ratio of (iso content/normal content) is 5/95 to 20/80, the ratio of (standard deviation/average number) of carbon atoms of the iso content is ≥1.0, and the ratio of (standard deviation/average number) of carbon atoms of the normal content is ≥1.0. Based on 100 pts.wt of the rubber component, the amount of the paraffin wax contained is 1.0-2.0 pts.mass, the total amount of the sulfenamide vulcanization accelerator and the guanidine vulcanization accelerator contained is ≤1.2 pts.mass., and the amount of the sulfur contained is ≤1.8 pts.mass.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2010053686-A (JP)
Title: Partition wall storage shelf
Inventor: YAMAMOTO TAKUMA
IPC: E04B2/74
Filed: 2009-12-07
Abstract: <P>PROBLEM TO BE SOLVED: To provide a partition wall storage shelf which allows the use of accessories in both a bathroom and a landing, and preventing the accessories from becoming dirty.  <P>SOLUTION: An opening is provided penetrating a wall W between the bathroom A and the landing B adjoining the bathroom, and the opening is provided with a storage shelf 1b for storing the accessories. The storage shelf 1b is provided with an openable/closable door part 4 on at least the bathroom A side; and since the same storage shelf 1b can be used from the bathroom A and the landing B, the accessories can be put in and out from both sides, not only can the accessories stored in the storage shelf 1b be shared and also waste is reduced and the inside can be kept clean because moisture in the bathroom, since the moisture of the bathroom A is less apt to enter the landing B, by having the bathroom A and landing B shut of by a door part 4, except when it is being used.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2011124248-A (JP)
Title: Method of manufacturing light-emitting device
Inventor: KOSEKI KENJI
IPC: H01L23/31
Filed: 2009-12-08
Abstract: <P>PROBLEM TO BE SOLVED: To enable coating between a light-emitting element subjected to flip-chip packaging and a support to prevent a sealing member covering the light-emitting element from entering more than necessary by a simpler method.  <P>SOLUTION: The method of manufacturing a light-emitting device includes a first process of applying the sealing member along a side face of the light-emitting element while including the rectangular light-emitting element subjected to flip-chip packaging to the support and the sealing member covering the light-emitting element and a second process of applying the sealing member from an upper surface of the light-emitting element.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011121436-A (JP)
Title: Device and method for assembling vehicle body of automobile
Inventor: UCHIYAMA KAZUNAO
IPC: B62D65/00
Filed: 2009-12-09
Abstract: <P>PROBLEM TO BE SOLVED: To provide a device and a method for assembling a vehicle body of an automobile allowing reduction of a space required for assembling the vehicle body of the automobile and shortening of a cycle time.  <P>SOLUTION: This device 10 includes a conveying device 12 for conveying a side panel W1, a positioning tool 14 for positioning the side panel W1 at a welding position, and a robot 16 for receiving the side panel W1 from the conveying device 12 and setting the side panel W1 to the positioning tool 14. The conveying device 12, the positioning tool 14 and the robot 16 are installed in an assembling station.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011122351-A (JP)
Title: Pavement material
Inventor: KAJITANI AKIHIRO
IPC: E01C15/00
Filed: 2009-12-10
Abstract: <P>PROBLEM TO BE SOLVED: To provide a pavement material which maintains sufficient water permeability and proper elasticity over a long period of time and which is paved as the surface layer of a pavement suitable for walking.  <P>SOLUTION: The aggregate of this pavement material 1 which is formed of the mixture of aggregate and a solidification material and paved as the surface layer of a pavement is configured by the mixture of a natural soil 12 and small pieces of fiber chips 11.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011123346-A (JP)
Title: Toner, and image forming method and process cartridge using the same
Inventor: YAMASHITA YUJI
IPC: G03G9/087
Filed: 2009-12-11
Abstract: <P>PROBLEM TO BE SOLVED: To provide toner excellent in charging property, durability and environmental stability and achieving high image quality, and to provide a method for producing the toner, a method for forming a full-color image, and a process cartridge.  <P>SOLUTION: The toner is produced through: a step A of preparing a solution or dispersion liquid of a toner material containing at least a binder resin by dissolving or dispersing the toner material in an organic solvent; a step B of preparing an emulsion or dispersion liquid by adding the solution or dispersion liquid of the toner material in an aqueous medium to emulsify or disperse; and a step C of removing the organic solvent from the emulsion or dispersion liquid. In the step A, the solution or dispersion liquid of the toner material contains a compound A expressed by formula (I), wherein the compound A is locally present on the surface of the toner particle. In formula (I), n and m each represent an integer, with n+m ranging from 4 to 8.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011123416-A (JP)
Title: Image forming apparatus
Inventor: AGATA SHINICHI
IPC: G03G21/10
Filed: 2009-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide an image forming apparatus capable of keeping excellent cleaning performance by preventing the turning up of the blade of a cleaning member through durability.  <P>SOLUTION: In the image forming apparatus in which particles forming irregularities on the surface of a developing roller 4a are embedded in the surface layer of the developing roller 4a, in at least the part coming into contact with a nonimage forming area of a contact part 10a1, Rzjis(μm)<Rt(μm) or Sm(μm)<Rt(μm), Rd(μm)<Rzjis(μm), and Rd(μm)<Sm(μm) are satisfied, wherein Rzjis(μm) is the ten-point average surface roughness of the contact part 10a1 of the cleaning blade 10a with the surface of the photoreceptor drum 1, Sm(μm) is the average interval of the irregularities, Rt(μm) is the weight average particle diameter of toner, and Rd(μm) is the weight average particle diameter of the particles.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011121344-A (JP)
Title: Inkjet printer
Inventor: TATEISHI TOMOTAKA
IPC: B41J2/18
Filed: 2009-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide an inkjet printer capable of fixedly holding the concentration of ink while maintaining shielding property and other ink characteristics.  <P>SOLUTION: The inkjet printer includes: an inkjet head of ejecting ink to a recording medium; a sub tank of supplying the ink to the inkjet head; a main tank of retaining the ink to be supplied to the sub tank; an ink supply means of sending the ink from the main tank to the sub tank; and an ink recovery means of sending the ink from the sub tank to the main tank.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011129168-A (JP)
Title: Anodic oxidation device and method for manufacturing magnetic disk medium using the same
Inventor: UCHIDA SHINJI
IPC: G11B5/855
Filed: 2009-12-15
Abstract: <P>PROBLEM TO BE SOLVED: To provide a manufacturing device and manufacturing method for forming magnetic dots the fluctuation of which is suppressed in a pattern medium, using an alumina nanohole.  <P>SOLUTION: A plurality of substrate electrodes to be connected to an outer circumference of a substrate of a magnetic disk medium are used in an anodic oxidation treatment step for forming alumina the nanohole; and when a center of the substrate is used as a vertex of an angle and a line connecting an outer circumferential-direction end part of the substrate electrode to the center of the substrate is used as a side of the angle, an angles formed facing two sides of adjacent substrate electrodes is specified as being smaller than 180°. The substrate electrode is, preferably, formed of two semi-circular electrodes.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011126306-A (JP)
Title: Body frame folding and fixing structure of bicycle
Inventor: WU DIN HWA
IPC: B62K15/00
Filed: 2009-12-15
Abstract: <P>PROBLEM TO BE SOLVED: To provide a body frame folding and fixing structure of a bicycle which is easily manufactured, has a body frame with a high overall strength, and is excellent in convenience and versatility.  <P>SOLUTION: The body frame folding and fixing structure of a bicycle includes a first body frame 1 and a second body frame 2. The first body frame 1 and the second body frame 2 are integrally formed including their front ends and rear ends and pivotally rotatable through a pivot 112. A first pivotally joint part 11, a first fitting part 12, and a first engaging part 13 are provided at the rear end of the first body frame 1. A second pivotally joint part 21, a second fitting part 22, and a second engaging part 23 are provided at the front end of the second body frame 2. The second engaging part 23 pivotally joins a quick attaching/detaching tool 231. The quick attaching/detaching tool 231 pivotally joins an engaging lever 232 having an engaging ring 233 and fits into an opening 131 of the first engaging part 13. The engaging lever 232 rotates the engaging ring 233 and presses the first engaging part 13 to join the first body frame 1 and the second body frame 2 to each other.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2010168269-A (JP)
Title: Chabazite-type zeolite and method for producing the same
Inventor: ARIGA KO
IPC: C01B39/48
Filed: 2009-12-16
Abstract: <P>PROBLEM TO BE SOLVED: To provide an economically rational chabazite-type zeolite which is expected to exert practical characteristics for use as a carrier for catalysts or a support for adsorbents and to exhibit high durability and heat resistance.  <P>SOLUTION: The chabazite-type zeolite having an SiO<SB>2</SB>/Al<SB>2</SB>O<SB>3</SB>molar ratio of 15 to 50 and a mean particle diameter of 1.5 μm or larger exhibits high durability and heat resistance. Such a chabazite-type zeolite can be produced by subjecting a raw material composition having molar ratios of a structure-directing agent and water to SiO<SB>2</SB>which satisfy respectively the relationships: 0.05≤structure-directing agent/SiO<SB>2</SB><0.13 and 5≤H<SB>2</SB>O/SiO<SB>2</SB><30 to crystallization in the presence of ions of at least one kind of alkali metal selected from a group consisting of K, Rb and Cs. It is preferable that the structure-directing agent is an N,N,N-trimethyladamanylammonium salt.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2011125460-A (JP)
Title: Game device and game program
Inventor: UCHIDA TSUTOMU
IPC: A63F9/00
Filed: 2009-12-16
Abstract: <P>PROBLEM TO BE SOLVED: To appropriately adjust the number of second game media (e.g., balls) existing in a game space without directly detecting the number of the second game media different from first game media (e.g., tokens) existing in the game space.  <P>SOLUTION: The exclusion number of the second game media coming out of the game space in response to the supply of the first game media to the game space is detected. Then, the number of supply of the second game media to the game space is controlled, based on a rate (CBR) of the number of supply of the first game media to the game space to the detected exclusion number.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2010167264-A (JP)
Title: Mounting member and lidded container
Inventor: ITO TADANAO
IPC: A47F7/28
Filed: 2009-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide mounting members and lidded containers allowing the containers to be displayed with marks on them facing a predetermined direction even if they are placed with the marks facing random directions, when they are displayed so as to stand upright on a display device.  <P>SOLUTION: The mounting member 40 is a molded component formed into a cap, and is to be mounted on the container 20. The mounting member 40 includes a circular body part 41, a flange-shaped outer circumferential part 42 extending from an edge of the body part 41 in one direction, and a rising part 43 formed at a central part of the body part 41 so as to rise in an opposite direction to the extending direction of the outer circumferential part 42. The rising part 43 is formed by a long-shaped part including a central part and extending in a direction of a diameter.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2011133601-A (JP)
Title: Optical unit and imaging apparatus
Inventor: BABA TOMOHIKO
IPC: G03B17/12
Filed: 2009-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide an optical unit that has optical characteristics equal to or larger than those of a current unit, is comparatively bright, and can be reduced in size, and to provide an imaging apparatus.  <P>SOLUTION: The imaging lens 100 includes, in order from an object side, OBJS, toward an image plane side, a first lens 111, which is a positive meniscus lens with a convex shape oriented toward the object side, a diaphragm 112, a second lens 113 of positive power, a third lens 114 of negative power, a fourth lens 115 of positive power, and a fifth lens 116 of negative power.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011133315-A (JP)
Title: Cooling structure of reactor containment vessel
Inventor: SAKAI NORIO
IPC: G21C9/004
Filed: 2009-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To reduce a size of a nuclear plant and to reduce its cost, and to provide reliable cooling structure of a reactor containment vessel utilizing passive drive force by reducing or omitting volume of an upper cooling water storage tank installed at an upper portion of the reactor containment vessel.  <P>SOLUTION: The cooling structure of a reactor containment vessel includes: an annular air passage 4 surrounding an outer peripheral surface of the reactor containment vessel 2; a side face cooling water storage tank 8 disposed at an outer periphery of the air passage 4; an annular gutter 10 provided on an outer peripheral surface of the containment vessel 3; a flow-down hole 12 provided at the bottom of the gutter 10; and a plurality of water supply ducts 9 for supplying cooling water of the side face cooling water storage tank 8 to the gutter 10.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011132060-A (JP)
Title: Liquid fertilizer
Inventor: TAKAO YOSHI
IPC: C05G3/00
Filed: 2009-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a liquid fertilizer containing 2,2'-iminodipropanoic acid and/or its salt.  <P>SOLUTION: The liquid fertilizer includes 2,2'-iminodipropanoic acid and/or its salt as a stabilizer, further contains magnesium phosphite and has favorably a pH of 3.5 or below. The coordinate bond of calcium is favorably performed to 2,2'-iminodipropanoic acid and/or its salt. 2,2'-Iminodipropanoic acid and/or its salt, calcium and magnesium phosphite are dissolved in an aqueous medium and the liquid fertilizer is favorably clear. The content of 2,2'-iminodipropanoic acid and/or its salt is favorably 0.1 mass% or more and 30 mass% or less. A by-product produced in an alanine producing step is favorably used as 2,2'-iminodipropanoic acid and/or its salt.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011135362-A (JP)
Title: Device, and method for processing signal, and program
Inventor: MIZUNO RYOSUKE
IPC: H04N5/20
Filed: 2009-12-24
Abstract: <P>PROBLEM TO BE SOLVED: To provide a signal processing device, a signal processing method and a program by which highly accurate conversion result is obtained even while reducing memory capacity.  <P>SOLUTION: A first output bit determination part 103 reads a threshold from a threshold storage part 100, and determines an output signal of x bit (x is an integer of ≥1, and further satisfies m>x) according to an input signal and the threshold. A second output bit determination part 102 determines an output signal of (m-x) bits according to the input signal. A bit connection part 104 couples the output signal of x bits determined by the first output bit determination part 103 and the output signal of (m-x) bits determined by the second output bit determination part 102.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2011098330-A (JP)
Title: Method for treating biomass material and method for using heat energy
Inventor: TANIGURO KATSUMORI
IPC: C02F11/06
Filed: 2009-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide a treatment method capable of decreasing or carbonizing a biomass material at an extremely low cost.  <P>SOLUTION: A method for decreasing or carbonizing one or more kinds of biomass materials, which are selected from among domestic animal wastes, agricultural wastes, fishery wastes and forestry wastes, in a container that can be heated and pressurized, includes: putting the biomass material into the container; controlling the initial environment in the container in such a manner as to satisfy all of the following requirements, (a) an oxygen-containing atmosphere, (b) a temperature of 55-80°C, (c) a pressure from the atmospheric pressure to 15 atm, and (d) a carbon monoxide concentration equal to or higher than 100 ppm, to rise the temperature of the biomass material to higher than 80°C; and, after a raise of temperature is started, controlling the continuous environment in the container in such a manner as to satisfy all of the following requirements: (A) an oxygen-containing atmosphere, (B) a pressure from the atmospheric pressure to 15 atm, and (C) a carbon monoxide concentration equal to or higher than 100 ppm, to allow the temperature of the biomass material to spontaneously rise to at least higher than 150°C, thereby decreasing or carbonizing the biomass material.  <P>COPYRIGHT: (C)2011,JPO&INPIT
Patent JP-2010116627-A (JP)
Title: Semiconductor manufacturing equipment, valve device, cvd treatment method using the semiconductor manufacturing equipment, and method of manufacturing semiconductor
Inventor: TOMEZUKA KOJI
IPC: C23C16/44
Filed: 2009-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide semiconductor manufacturing equipment where formation of a solid film on a flow passage wall face is prevented, and a load on cleaning is remarkably reduced so as to improve an operation rate.  <P>SOLUTION: In the semiconductor manufacturing equipment where a valve device having a fixing part such as a valve box 2 and a movable part such as a valve body 9 is provided between a reaction chamber and an exhaust pump, a heater for the fixing part is provided to the fixing part of the valve device. In this way, the formation of the solid film on a flow passage wall face is prevented, and the operation rate of the semiconductor manufacturing equipment is improved.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2010104232-A (JP)
Title: Method of manufacturing stator
Inventor: ENDO YASUHIRO
IPC: H02K15/04
Filed: 2009-12-29
Abstract: <P>PROBLEM TO BE SOLVED: To form a coil to fit to a tooth having a stator core, thereby improving the quality in insulation.  <P>SOLUTION: The method of manufacturing the stator of a rotating electrical machine composed of a rotor and a stator includes: a step (S1100) of forming a coil to fit to a tooth, a step (S1000) of manufacturing the stator core, a step (S1200) of winding the coil on the tooth, and a step (S1400) of insulating the coil wound on the stator core.  <P>COPYRIGHT: (C)2010,JPO&INPIT
Patent JP-2009529963-A (JP)
Title: 足撮像装置
IPC: A61B5/00
Filed: 2007-03-12
Abstract: 足撮像装置の近くに座っている者、当該装置の近くに立っている者、当該装置の上に立っている者が自身の足裏の像を取得する幾つかの方法を提供する。ある実施例においては、床上の像は、床に対し調節可能な角度を有する反射面を有する。別の実施例においては、体重計を搭載した足撮像装置の表面下にミラーが配置される。また、装置表面は、紙ヤスリ面、先の滑らかなプローブ又は熱刺激装置などの、足裏の感覚の喪失をユーザーが検出する手段を搭載可能である。更なる実施例においては、装置は像取り込み装置を搭載し、それは足の像をローカルディスプレイに送信するか、格納、表示及び印字機能を備えたパーソナルコンピューターなどのローカルコンピューターに送信するか、又は、医療又は保険提供者のコンピューターなどの遠隔装置に送信することができ、そこでそれが診断目的で閲覧されるか又は患者が撮像動作を実行したことを証明するために単に保持される。
Patent JP-2009531122-A (JP)
Title: 浮遊する胃腸アンカ
IPC: A61B17/00
Filed: 2007-03-28
Abstract: 機器９０は、患者の胃の中で使用するために提供される。機器は、胃の中に配置するのに適したバルーン９２と、バルーンに連結されるアンカ１０２とを有する。アンカは、バルーンが患者の十二指腸内に入ることを防止するように構成される。機器は、バルーンが膨脹可能にバルーンに連結されると共にバルーンの膨脹を促進するために患者の胃から口まで伸びるように構成された膨脹チューブ９６を更に有する。他の実施形態も記載されている。
Patent JP-2009533171-A (JP)
Title: レゼクトスコープ装置および方法
IPC: A61B17/32
Filed: 2007-04-05
Abstract: 外科用器具は、観察器具を受け入れるように、さらに観察器具がシャフトの鈍頭包囲遠位端の光学的に透明な一部分の近くの位置を出入りして移動することができるようにして、遠位端を介する遮られない観察を提供し、囲み作業領域の近位側の方にある位置を出入りして移動することができるようにして、囲み作業領域の観察を提供するよう寸歩取りされたチャネルを備える。外科用器具は、その上または代替的に、流体注入チャネルを少なくとも流体排出細孔または戻りチャネルの一方に選択的に接続可能な流体経路指定スイッチをシャフト内部に備える。方法は、観察器具を、鈍頭包囲遠位シャフト端の光学的に透明な一部分に近い位置と囲み作業領域の近位側とを出入りして移動するステップを備える。方法は、その上または代替的に、シャフト内部の流体経路指定スイッチの位置を変更するステップを備える。
Patent JP-2009535735-A (JP)
Title: コンテンツ・マネージメント・システムおよび方法
IPC: G06Q30/00
Filed: 2007-05-02
Abstract: コンテンツのランタイム・ステートの外部的な保存を伴うコンテンツ・マネージメントのための技術。この技術にしたがって形成されるシステムは、プレイバック・デバイスからコンテンツのランタイム・ステートを受信するサーバを備え、リクエストに応じてそれにあるいは別のプレイバック・デバイスにランタイム・ステートを提供する。この技術にしたがって構成されたプレイバック・デバイスは、プレイバック・デバイスに対して外部的に以前保存されたランタイム・ステートを復活させるためのコンテンツ・ステート・リカバリー・エンジンを備えるかもしれない。この技術にしたがった方法は、ランタイム・ステートをローカルに生成し、ランタイム・ステートを外部的に保存し、ランタイム・ステートを再取得する。
Patent JP-2009538512-A (JP)
Title: 側面に実装した光源を備えるバックライトウェッジ
IPC: F21Y101/02
Filed: 2007-05-03
Abstract: バックライトは導光体及び光入力部を備え得る。導光体は、光反射面と光放射面とを備え得る。光入力部は、狭端部とこの狭端部まで伸びている対向側面とを有する発散ウェッジを備え得る。光源は、対向側面の１つに隣接させて配置してよく、光入力部の中に光を放出し得る。多層ポリマーミラーフィルムは、対向側面に隣接させる一方で対向側面と密接させずに配置してよく、多層ポリマーミラーフィルムに入射する可視光の９５％超を反射させ得る。
Patent JP-2009542057-A (JP)
IPC: H04R1/40
Filed: 2007-06-25
Abstract: A hearing instrument includes a signal processor, and at least two microphones for reception of sound and conversion of the received sound into corresponding electrical sound signals that are input to the signal processor, wherein the signal processor is configured to process the electrical sound signals into a combined signal with a directivity pattern with at least one adaptive null direction θ, and wherein the signal processor is further configured to prevent the at least one null direction θ from entering a prohibited range of directions, wherein the prohibited range is a function of a parameter of the electrical sound signals.
Patent JP-2009543438-A (JP)
Title: マルチキャスト・データを信頼できる形で送達するための方法および装置
IPC: H04L12/18
Filed: 2006-06-27
Abstract: 無線ネットワークを通じてマルチキャスト・アドレス指定されたデータ・パケットを送達する方法および装置は、マルチキャスト接続をユニキャストの一様リソース識別子にマッピングし、マルチキャストからユニキャストへの変換のために状態を確立し、ポートを割り当て、マルチキャスト・アドレス指定されたデータ・パケットを受信し、マルチキャスト・アドレス指定されたデータ・パケットをユニキャスト・アドレス指定されたデータ・パケットに変換し、変換されたデータ・パケットを送信することを含む。
Patent JP-2009544146-A (JP)
Title: マイクロリソグラフィ投影露光装置の照明システム
IPC: H01L21/027
Filed: 2007-07-05
Abstract: 【課題】マイクロリソグラフィ投影露光装置の照明システム、特に、マスク上に入射する投影光の照明角度依存偏光状態を設定することができる照明システムを提供する。 【解決手段】マイクロリソグラフィ投影露光装置（１０）の照明システム（１２）は、光束を発生させるための第１の光学的配置（２６、３２；１３２）を有する。光束の光は、光束の断面の少なくとも一部にわたって異なる偏光状態を有し、空間的に少なくとも部分的にコヒーレントである。更に、照明システム（１２）は、第１の光学的配置（２６、３２；１３２）と瞳平面（４２）との間に配置された第２の光学的配置（３６、３８）を有する。第２の光学的配置（３６、３８）は、瞳平面（４２）内の少なくとも２つの異なる位置（Ｐ x Ｐ -x Ｐ Y Ｐ -Y ）間に光束を分割し、この場合に、第１の光学的配置によって発生された偏光状態を重ね合わせて、少なくとも２つの位置（Ｐ x Ｐ -X Ｐ Y Ｐ -Y ）で異なっている瞳偏光状態を形成する。 【選択図】図７