baber/WOPTO huggingface dataset:
Patent KR-19990044644-A (KR)
IPC: B32B27/36
Filed: 1996-09-13
Abstract: The invention relates to a method for producing a laminated glass pane free of optical obstruction, caused by warping, in reflected and transmitted light. The laminated glass pane comprises a first pane of glass, a second pane of glass and a multilayer spacer layer comprising a first composite film, a biaxially-stretched, thermoplastic carrier film provided with a thin layer system, and a second composite film. A carrier film provided with the thin layer system is mounted on the first composite film and has a thickness of from 30 to 70 mum and a degree of heat shringage of from 0.3 to 0.8%, measured after a heat treatment of 20 seconds at 120° C., in both directions. The second composite film is mounted on the carrier film. The packet of films is arranged between the two panes of glass so as to be wrinkle-free, pressed using pressure and heat and made into a composite with the panes of glass. A suitable carrier film and the use thereof for producing the laminated pane of glass are also disclosed.
Patent KR-19990063665-A (KR)
Title: 자동 반도체 부품 조종 장치
IPC: H05K13/02
Filed: 1997-07-16
Abstract: 본 발명은 자동 반도체 부품 조종 장치에 관한 것이다.  첫째, 조종 장치는 부품의 소오스와 상기 소오스로부터 벨트 조립체까지 부품을 이송하기 위한 이송 메커니즘을 포함한다.  상기 벨트 조립체는 벨트, 벨트 변위 제어기와, 원하는 엔드 포인트에 대해 부품의 영상을 형성하기 위한 영상 형성 장치를 포함한다.  상기 벨트 변위 제어기는 원하는 엔드 포인트에 대한 부품의 영상을 토대로 벨트를 움직이기 위해서 벨트에 결합되므로, 입력 벨트의 운동 방향에 대해 정확하게 부품을 배치한다.
Patent KR-19990067431-A (KR)
Title: 기계식 결합 기구
IPC: H01R13/514
Filed: 1996-11-11
Abstract: 제 1 및 제 2 전기 커넥터(40, 70)를 결합시키기 위한 기구(20)는, 다수의 개구들(32)이 관통연장되고, 개구들(32)의 제 1 부분(34)이 제 1 커넥터(40)에 고정된 터미널(60)의 대응하는 노출된 몸체부분(68)을 파지하도록 되어져 있고, 그리고 개구들(32)의 제 2 부분(36)은 제 2 커넥터(70)에 고정된 터미널(90)의 대응하는 노출된 몸체부분(98)을 파지하도록 되어져 있는 절연부재를 포함한다. 제 1 및 제 2 커넥터(40, 70)를 서로 인접하여 배치시키고 그리고 제 1 및 제 2 커넥터(40, 60)의 터미널(60, 90)의 각각의 몸체부분(68, 98)과 파지되는 관계로 개구들(32)을 위치시켰을 때, 기구(20)는 제 1 및 제 2 커넥터(40, 70)를 서로 인접하게 기계적으로 고정시킨다.
Patent KR-19990071708-A (KR)
IPC: G10L/
Filed: 1996-11-21
Abstract: A subband audio coder employs perfect/non-perfect reconstruction filters, predictive/non-predictive subband encoding, transient analysis, and psycho-acoustic/minimum mean-square-error (mmse) bit allocation over time, frequency and the multiple audio channels to encode/decode a data stream to generate high fidelity reconstructed audio. The audio coder windows the multi-channel audio signal such that the frame size, i.e. number of bytes, is constrained to lie in a desired range, and formats the encoded data so that the individual subframes can be played back as they are received thereby reducing latency. Furthermore, the audio coder processes the baseband portion (0-24 kHz) of the audio bandwidth for sampling frequencies of 48 kHz and higher with the same encoding/decoding algorithm so that audio coder architecture is future compatible.
Patent KR-19990082635-A (KR)
Title: 전기 전도성 재료로 된 코팅 두께를 결정하기 위한 방법
IPC: G01N27/72
Filed: 1997-11-08
Abstract: 전기 전도성의 재료로 된 코팅두께를 결정하기 위한 방법에 있어서, 측정오류는 규격화 방법을 사용해 무차원 규격값으로 변환된다. 이 변환에서, 예를 들어, 온도 드리프트 (temperature drift) 및 지지체의 기본원소의 전기적, 자기적 특성의 상이에 의한 측정오류가, 광범위하게 제거될 수 있다. 검정곡선을 사용해 이 규격값은 코팅두께 값으로 변환된다.
Patent KR-19990087818-A (KR)
IPC: B65D71/40
Filed: 1997-03-13
Abstract: An article carrier of the top gripping type includes a main panel (20, 116) having a pair of opposed end edges (70, 72, 170, 172), a first fold line (32, 134) extending between said end edges (70, 72, 170, 172), and at least one aperture (44, 144) for receiving an article (A). The aperture (44, 144) is disposed astride the first fold line (32, 134) to interrupt it. A first tab (40, 140) is struck from the main panel (20, 116) and defining at least a part of the aperture (44, 144). The tab (40, 140) is hingeably connected to the main panel (20, 116) so that the tab (40, 140) is displaceable out of the plane of the main panel (20, 116) to operatively engage a part of the article (A) when the article (A) is in the aperture (44, 144). The tab (40, 140) is connected to the main panel (20, 116) by means of a pair of second and third spaced fold lines (60, 62, 160, 162) extending divergently from each other toward one of the end edges (70, 72, 170, 172) so that displacement of the tab (40, 140) out of the plane of the main panel (20, 116) causes the main panel to be folded about the first fold line (32, 134). A stress relieving cut line (64, 164) is provided to extend between the second and third fold lines (60, 62 160, 162) to partially separate the tab (40, 140) from the main panel (20, 116). The cut (64, 164) line is disposed transversely of the first fold line (32, 134) such that the first fold line (32, 134) is interrupted at the cut line (64, 164). <IMAGE>
Patent KR-20000005018-A (KR)
Title: Aromatics and/or heavies removal from a methanechlsased feed by condensationand stripping
Inventor: YAO JAME
IPC: F25J3/02
Filed: 1997-03-19
Abstract: PURPOSE: A method is provided to remove of benzene other aromatics and/or other heavier hydrocarbon components from a methane based gas streamby condensation and stripping. CONSTITUTION: The cooled feed stream (118) is fed to a column (60) and separated into methane rich vapor stream (120) and benzene/aromatics/heavies liquid (114). The liquid (114) is sent to a heat exchanger (62) to recover refrigeration. Warm dry gas (108) is cooled in the heat exchanger (62) and delivered as stripping gas (109) to the column (60).
Patent KR-20000016504-A (KR)
Title: Disposable hemodiafiltration set
Inventor: SANDBERG LARS-OLOF
IPC: B01D61/30
Filed: 1997-06-13
Abstract: PURPOSE: A disposable hemodiafiltration set with a dialyzer including a dialysis liquid supply line and extra corporeal blood path is disclosed. CONSTITUTION: The sterile disposable hemodiafiltration set to be connected to a dialysis machine comprising a dialyzer (14) with an extra corporeal blood path (19) and a supplying dialysis liquid supply line (10) which can be connected to the dialyzer. The hemodiafiltration set comprises a sterilized unit consisting of a hose connection (28) with a sterile filter (27) therein, said hose connection being arranged for connection at one end thereof to the extra corporeal path (19) via a separate pump (29; 30) and being provided with a three-way joint (22) at the other end thereof for connection of said latter end between the dialysis liquid supply line (10) and the dialyzer (14).
Patent KR-20000016746-A (KR)
Title: LiPF6 PRODUCTION PROCESS
Inventor: WIETELMANN ULRICH
IPC: H01M10/0568
Filed: 1997-08-11
Abstract: PURPOSE: A manufacturing method for LiF6 is provided to use an inexpensive raw material, to supply a product of high purity, and to be operated under a simple processing condition. CONSTITUTION: The invention relates to a LiPF6 production process, wherein LiF is reacted with PCl5 or PCl3 at a temperature of -20 to 300°C for a reaction time of 0.1 to 10 hours to give LiPF6, and LiPF6 is isolated as a solution from the reaction mixture, using ether, nitrile, sulfur, carbonate, halogenated hydrocarbon and/or tertiary amines as the solubilizing agent.
Patent KR-20000050955-A (KR)
Inventor: JANG MIN SEON
IPC: C07C251/32
Filed: 1999-01-15
Abstract: PURPOSE: Stereoselective methods for preparing pure d,l-hexamethyl propyleneamine oxime named as(3R,9R) or (3S,9S)-4,8-diaza-3,6,6,9-tetramethylundecane-2,10-dion bisoxime derivative without contamination of other meso isomer are provided. CONSTITUTION: A compound of the following formula 15 having optical activity is prepared by reacting the compound of the following formula 14 with appropriate solvent and appropriate deprotecting agent, where R is selected from the group consisting of linear or branched low alkyl having 1-6 carbon atoms, the ring represented by -(CH2)n- or the ring represented by -(CH2)a-X-(CH2)b-, where X is selected from the group consisting of N, O and S, and n, a and are independently 1-10; R1 is linear or branched low alkyl having 1-6 carbon atoms; R2 is selected from the group consisting of linear or branched low alkyl, low alkene or low alkyne having 1-10 carbon atoms; R3 is selected from the group consisting of H, linear or branched low alkyl having 1-6 carbon atoms and benzyl; and P is an acyl halide derivative which is able to form amide group by binding with secondary amine.
Patent KR-20000051561-A (KR)
Inventor: LEE KUM HEE
IPC: H01S3/0941
Filed: 1999-01-23
Abstract: PURPOSE: A device and manufacturing method for Vertical Cavity Surface Emitting Laser(VCSEL) array is provided to successfully eliminate a space removal process by forming a trench near a post of a vertical cavity surface emitting laser. CONSTITUTION: A device and manufacturing method for Vertical Cavity Surface Emitting Laser(VCSEL) array includes the following steps. Forming lower reflective layer(110), revitalization layer(120), oxidation layer, and upper reflective layer(140) by setting the layers one by one on a substrate(100, 100'). Separating a post(200) array and the areas near a post(200). Forming a high-voltage unit(135) by oxidation of oxidation layer. Revealing parts of the upper reflective layer(140) on the post(200) by detecting parts of an insulator film(150). Forming a upper electrode(160) on the revealed part of the upper reflective layer(140) and the upper part of the insulator film(150) so as to independently submit electricity to each posts(200). Forming a lower electrode(170) on a rapping part after rapping the substrate(100, 100').
Patent KR-20000055836-A (KR)
Inventor: LEE MUN HUI
IPC: H01L21/28
Filed: 1999-02-10
Abstract: PURPOSE: A method of forming a platinum pattern is to provide the platinum pattern of a semiconductor device having a height not less than a prescribed height, when a platinum film is utilized for an electrode of a high-dielectric film. CONSTITUTION: A method of forming a platinum pattern comprises the steps of: forming a first platinum film with a first thickness on a semiconductor substrate(1); forming a substance film pattern(13) with a second thickness on the platinum film, the second thickness being greater than the first one; etching the first platinum film using the substance film pattern as an etching mask to form a first platinum film pattern(11a); forming a second platinum film on the whole surface of the substrate to cover the first platinum film pattern and the substance film pattern; and etching-back the second platinum film to form a second platinum film pattern(15a) surrounding the first platinum film pattern and the substance film pattern and being separated from neighboring patterns.
Patent KR-19990045941-A (KR)
Title: 유체제어용밸브조립체
IPC: F16K17/00
Filed: 1999-02-24
Abstract: 누수를 효과적으로 차단할 수 있으며, 작동이 용이하고, 무게가 가벼운 유체 제어용 밸브 조립체가 개시되었다. 상기 밸브 조립체는 그 내부에 유로가 형성되어 있는 프레임을 구비한다. 상기 프레임의 양 측부에는 상기 유로의 입구 및 출구 역할을 하는 한 쌍의 플랜지 바퀴가 일체로 형성되어 있다. 상기 플랜지 바퀴의 전면부에는 누수 방지용 밀봉링이 고정적으로 안착되는 환형 그루부가 형성되어 있다. 상기 프레임의 상부에는 커버가 결합되어 그 내부에 공간을 형성한다. 상기 커버의 상단에는 캡이 회전가능하게 장착된다. 상기 캡 내에는 상기 공간부를 따라 하방향으로 연장하는 스크류 샤프트가 고정적으로 삽입된다. 상기 공간부 내에는 상기 공간부를 따라 수직 방향으로 상하 왕복 이동하여 상기 유로를 개방/폐쇄하는 유체 차단 부재 및 상기 유체 차단 부재의 상부에 설치되며, 상기 스크류 샤프트에 나사 결합되고, 상기 스크류 샤프트의 회전방향에 따라 상기 스크류 샤프트를 따라 상하 이동하므로써 상기 유체 차단 부재를 상하로 이동시키는 너트가 장착된다. 상기 밸브 조립체는 무게가 가벼우므로 조작 및 운송이 용이하고, 누수를 효율적으로 방지시킨다.
Patent KR-19990037938-A (KR)
Title: 산소발생기용 산소혼합장치
IPC: B01F5/02
Filed: 1999-02-25
Abstract: 본 발명은 오염공기를 정화시킨 청정공기와 거기에서 얻어진 순산소(純酸素)를 혼합하는 장치이다. 일정한 농도로 혼합시키기 위한 것이다. 유로 A로부터 일정압으로 가해지는 순산소를 흡입원(59)의 흡입력에 따라 개방되면서 동파이프(6)로 유입되는 정화공기와 혼합시키는 혼합밸브(8)와, 유로 A가 일정압 이상일 때 유로 A와 연결된 유로 B를 통하여 유로 C와 유로 D로 초과 압력만을 역류시키는 오리피스(25)를 구비한다. 흡입원이 가동중일 때에는 스로틀(11)과 회전스풀(53)이 회전되어 순산소가 헤더(52)의 포트를 통해 빠져나가 정화공기와 혼합된다. 그러나 흡입원이 가동을 중지하면 혼합밸브가 닫혀서 유로 A와 유로 B에 일정압 이상이 걸리므로 다이어프램(62)과 포페트(61)를 작동시키고, 역류포트(58)를 통해 유로 C와 유로 D로 역류시킨다. 순도 83±2%, 농도 23∼25%의 산소가 혼합된다.
Patent KR-19990077722-A (KR)
Title: 반도체 디바이스 제조 방법
IPC: H01L21/8234
Filed: 1999-03-09
Abstract: MOSFET와 저도 저항성 소자의 혼합물을 갖는 반도체 디바이스를 제조하는 방법에 있어서, 저항성 소자로서 제공되는 텅스텐 실리사이드막을 소정 형상이 되도록 에칭한 후, 열처리를 행하여 MOSFET의 확산층을 활성화시킴으로써, 저도 저항성 텅스텐 실리사이드막이 달성된다.
Patent KR-20000061472-A (KR)
Inventor: MIN JUN GYU
IPC: H03M1/12
Filed: 1999-03-26
Abstract: PURPOSE: An analog to digital converter is provided to be capable of realizing a high-speed operation by determining plural binary digits at the same time. CONSTITUTION: In an analog to digital converter, a first digital to analog converter(8) receives a first digital signal to output a first analog signal. A second digital to analog converter(9) receives a second digital signal to output a second analog signal Each comparator(5-7) compares a corresponding reference voltage and an input analog signal. A controller(12) fixes an expected bit value of the first digital signal to a decided bit value, and outputs the decided bit value of the first digital signal to the second digital to analog converter, as the second digital signal. A successive approximation register(11) outputs a final digital signal when all bits of the first digital signal are fixed to a decided bit value, and outputs a first digital signal containing an expected bit value and a decided bit value when a part of the bits are fixed to a decided bit value.
Patent KR-20000047378-A (KR)
Inventor: GISIDAGATZHIKO
IPC: H01L21/603
Filed: 1999-03-29
Abstract: PURPOSE: A matrix display device and a method for manufacturing the same, and a heat pressing connection head are provided to make frame of a display narrower. CONSTITUTION: A matrix display device includes a first substrate, a plurality of driving ICs, a second substrate, and connection terminals. The first substrate is aligned with the second substrate. The plurality of driving ICs are implemented in one row or nearly one row along with the long side. The second substrate includes the region for the IC implementation. The connection terminal are provided to be connected to a third substrate and are arranged in the direction of the ICs.
Patent KR-20000065372-A (KR)
Inventor: PARK JI SU
IPC: H01L21/285
Filed: 1999-04-02
Abstract: PURPOSE: A method for manufacturing a semiconductor device is provided to improve a PN junction characteristic by preventing dopants injected into a cobalt silicide layer from being exhausted during an annealing process. CONSTITUTION: A gate insulating layer(12) is formed in a predetermined region on a semiconductor substrate(10). A gate electrode(13) is formed on the gate insulating layer. A sidewall spacer(14) is formed on each sidewall of the gate electrode and gate insulating layer. A silicide layer is formed on the substrate adjacent to the gate electrode and sidewall spacer. First impurity ions are firstly injected into the silicide layer. Second impurity ions are secondly injected into the silicide layer. The silicide layer is annealed to diffuse the first and second impurity ions in the silicide layer into the substrate.
Patent KR-20000065510-A (KR)
Inventor: KIM BO HYEON
IPC: G01M1/32
Filed: 1999-04-06
Abstract: PURPOSE: Eccentricity measuring device of a rotation body is provided to measure a position of eccentricity and a size of the eccentricity by using a principle of automatic equilibrium device of automatically correcting an eccentricity of the rotation body. CONSTITUTION: Apparatus for measuring eccentricity of a rotation body includes a circular transparent lace(3), two automatic equilibrium cylinders(1), and a weight plumb(6). The circular transparent lace is mounted to a rotation body(2), and has a square hollow(4). The cylinder is inserted in the hollow part of the transparent lace. Upper part of the cylinder is opened, and an insertion bar(5) is projected upward in the center part of the cylinder. The weight plumb is inserted into the insertion bar.
Patent KR-20000066528-A (KR)
Inventor: CHOI JIN SUP
IPC: F25B39/00
Filed: 1999-04-17
Abstract: PURPOSE: A heat exchanger is provided to reduce cost and volume of heat exchanger by improving heat exchange performance of a compressor. CONSTITUTION: A heat exchanger wherein a refrigerant flows along a pipe(3), a fin(4) for extending thermal exchange area is arranged outside the pipe, and heat dissipation is performed by an air flow, a rod(6) is inserted into the pipe where a refrigerant flows, so as to thereby reduce sectional area within the pipe where the refrigerant flows. The fin is made up of an aluminum alloy sheet. Thus, a pipe having a large diameter is used for an air cooled heat exchanger for a condenser in a small sized refrigerator or hot/cold water purifier.
Patent KR-20000067686-A (KR)
Inventor: KIM GI JIN
IPC: H04N7/015
Filed: 1999-04-30
Abstract: PURPOSE: A video outputting apparatus for a HDTV(high definition television) encoder is to convert a 4:2:0 or 4:2:2 format video data input in a macro block order into a 4:2:2 format video data and then output the data in a raster order. CONSTITUTION: The video outputting apparatus for a HDTV encoder comprises an address controlling portion(10) for calculating an address for writing and reading a video signal input with a synchronizing signal on/from a video signal memory(20), a speed converting portion(30) for converting the speed of an input video data into a data speed for a video output, a multiplexing/inverse multiplexing portion(40) for receiving a converted data from the speed converting portion and then multiplexing and inverse multiplexing the data to write and read the data on/from the video signal memory at a real time, a low band-pass filter(50) for filtering a color difference signal read in a raster order and thus outputting an interpolated image.
Patent KR-20000067705-A (KR)
Inventor: MUN SEONG HAK
IPC: H01J17/02
Filed: 1999-04-30
Abstract: PURPOSE: A high efficiency plasma display and its operating method are provided to enhance the light efficiency and the contrast. CONSTITUTION: A high efficiency plasma display comprises a priming discharger(40), the holding electrode pair(24), a partition(28), a top substrate(36) and a fluorescent material(26). The priming discharger(40) generates a priming particle and supplies to a discharge cell. The holding electrode pair(24) is formed on the priming discharger(40) and performs the holding discharge. The partition(28) is formed on the priming discharger(40) and divides the respective discharge cell. The top substrate(36) includes an address electrode(22). The fluorescent material(26) is spreaded on the top substrate(36) with the prescribed thickness and is emitted by the light caused by plasma discharge. Also, a priming discharge space is formed between a bottom substrate(38) and an assistance substrate(32).
Patent KR-19990088607-A (KR)
Title: 다단신축붐의길이를측정하는방법및장치
IPC: B66C23/68
Filed: 1999-05-27
Abstract: 붐 길이 측정 장치는 다단 신축 붐(10)의 상승단(20)상에 장착된 송신부(22)와 다단 신축 붐(10)의 기초단(12)상에 장착된 수신부(24)를 포함한다. 송신부(22)는 각각 제 1 및 제 2 발신 속도를 갖는 제 1 및 제 2 신호를 송신한다. 제 2 발신 속도는 제 1 발신 속도보다 느리다. 
     수신부(24)에 의해 수신되는 제 1 및 제 2 신호의 주행 시간에서의 차이에 기초하여, 길이 결정기(42)는 다단 신축 붐(10)의 길이를 결정한다. 표시 장치(46)는 측정된 길이를 표시한다.
Patent KR-20010001079-A (KR)
Inventor: CHOI MAN SU
IPC: C03C17/28
Filed: 1999-06-01
Abstract: PURPOSE: Provided is an apparatus for depositing an optical fiber preform on a target rod uniformly by keeping at a constant distance between a burner and an outer circumference of optical fiber preform. CONSTITUTION: The apparatus comprises the parts of: a vertical moving base(30) against a horizontal base(20), a burner(50) is fixed on a base(30); a vertical moving part(40) fixed on the base for raising the vertical base(30) up and down; a control part for controlling a vertical moving part(40) to keep at a constant distance between the burner and outer circumference of optical fiber preform deposited on a target rod(70).
Patent KR-20010002065-A (KR)
Inventor: KIM JIN HUN
IPC: G02F1/015
Filed: 1999-06-11
Abstract: PURPOSE: A method of making a thin film micromirror array-actuated is provided to increase a reflection factor by making a post formation portion perform a light reflecting function. CONSTITUTION: The method of making a thin film micromirror array-actuated comprises forming a sacrifice layer(70) of a polysilicon or amorphous silicon material on an entire surface of an actuator(65) patterned by a pixel unit. An upper part on one end of the actuator(65), in which a post(75) is to be formed, is etched to expose one end of the actuator(65). A post formation material is deposited on the sacrifice layer(70) where the post formation portion is removed. An SiO2 layer is planarized until the surface of the sacrifice layer is exposed. A driving mirror(60) is formed by depositing and etching a driving mirror formation material on the post and the sacrifice layer.
Patent KR-20010002596-A (KR)
Inventor: LEE GEON HEON
IPC: A47B61/00
Filed: 1999-06-16
Abstract: PURPOSE: Furniture supplying the effect of jade is provided to recover and improve the health, and prevent the inhabitation of mildew or bacteria while the jade or jade powder radiates infrared rays and anions. CONSTITUTION: In furniture supplying the effect of jade, a groove(12) is formed in a board(10) composing the furniture, and the groove(12) is formed in round or rectangular shape. In the groove(12), jade(20) is placed, and the groove(12) is covered with a ventilating cover(30). In addition, jade powder(22) is also placed in the groove(12), and the jade powder(22) is kept in the ventilating pocket(24) which is made from fabric or pulp. The jade(20) or jade powder(22) of the groove(12) radiates about 3.7*102 - 3.74*102(W/m<SP POS="POST">2</SP>μg) of infrared rays at the temperature of 40 deg.C, and radiates about 93-95% of infrared rays at normal temperature, and radiates about 100% of infrared rays during being heated.
Patent KR-20010003511-A (KR)
Inventor: CHOI TAE HUI
IPC: H01L21/3205
Filed: 1999-06-23
Abstract: PURPOSE: A semiconductor device having a material film with an anisotropic facet and a method for fabricating the same are provided to improve the yield rate of the semiconductor device by preventing defects like seam in an interlayer insulating film. CONSTITUTION: A semiconductor device having a material film with an anisotropic facet comprises a semiconductor substrate(40). A gate stack portion is formed on the semiconductor substrate(40). A gate spacer is positioned at a side wall of the gate stack portion. A conductive material is provided between the gate stack portions. The conductive material has a width which becomes narrower in the upper direction of the conductive material and an opening which becomes larger in the upper direction of the conductive material.
Patent KR-20010003757-A (KR)
Inventor: JUNG YU CHAN
IPC: G02F1/136
Filed: 1999-06-25
Abstract: PURPOSE: An ohmic contact layer and a manufacturing method thereof are provided to achieve improved characteristics of thin film transistor by reducing contact resistance between an electrode and a channel layer. CONSTITUTION: An ohmic contact layer(21) with a portion(21a) adjacent to a channel layer(20) and a portion(21b) adjacent to a source electrode(22), is interposed between the channel layer made up of a silicon, and the source electrode(22) or a drain electrode made up of a metal, so as to reduce a barrier between the channel layer and the source-drain. The ohmic contact layer has impurities doping concentration increasing as it goes from the channel layer toward the source or the drain electrode. A method is characterized in that the ohmic contact layer is deposited by an RF plasma method, and an RF power density and an ion acceleration voltage are gradually increasing during the deposition process.