baber/WOPTO huggingface dataset:
Patent TW-202207715-A (TW)
Inventor: WEI PENG-JIANG
IPC: H04R1/04
Filed: 2021-10-29
Abstract: 本申請關於一種揚聲器，其包括殼體組件、振動板、驅動組件、第一調節單元及第二調節單元。殼體組件具有容置空間以及出聲口通道，容置空間連通於出聲口通道。振動板設置於容置空間中。驅動組件設置於容置空間中，並被配置以驅動振動板振動。第一調節單元設置於出聲口通道中，第一調節單元由聲學超材料組成。第二調節單元設置於振動板的一側，第二調節單元由聲學超材料組成。
Patent TW-202324307-A (TW)
Title: Point cloud rendering method
Inventor: WANG CHIH-WEI
IPC: G06T9/00
Filed: 2021-12-02
Abstract: A point cloud rendering method is disclosed. The method includes the following steps: Setting a frame manuscript, which includes a pixel matrix formed by a plurality of pixels and each pixel includes a predetermined number of sub-pixel data; Accessing the location data and the color data of the point cloud data for calculating a separation distance and a frame coordinate; Obtaining a weight value by converting the frame coordinate; converting the color data, the separation distance and the weight value of the point cloud data to the sub-pixel data of each pixel; Using the point cloud data to complete the update of each pixel in the frame manuscript.
Patent TW-202308548-A (TW)
Inventor: ASAMI JUN
IPC: A47K10/48
Filed: 2021-12-28
Abstract: 本發明提供一種手乾燥裝置，其能夠可靠地防止從手上脫落的水滴的飛沫和包含所述飛沫的氣流到達面部及其周圍。手乾燥裝置1具有負壓/循環構造，其中空氣從出風口63、64吹入乾燥室25施加到手H，然後吸入乾燥室 25下方並返回到送風馬達41。在裝置本體20的背面設有遮蔽手段3。遮蔽手段3具有：具有柔軟性的片狀遮蔽板6，以及使遮蔽板6的驅動機構8等。當裝置不使用時，遮蔽板6縮回到殼體9中，當檢測感測器7檢測到手H已插入插入口5時，遮蔽板6突出並設置在插入口5（乾燥室25）與使用者U的面部F之間，並防止從插入口5飛散的水滴Wd的飛沫和包含飛沫的氣流到達面部F及其周圍。
Patent TW-202232651-A (TW)
Inventor: UENO TAIKI
IPC: C09J7/29
Filed: 2021-12-28
Abstract: Provided is a pressure-sensitive adhesive sheet for protecting a semiconductor element that appropriately protects a semiconductor wafer without reducing a yield. The pressure-sensitive adhesive sheet for protecting a semiconductor element includes: a pressure-sensitive adhesive layer; and a base material. The pressure-sensitive adhesive layer has a surface resistivity of 1.0×10
         11 Ω/□ or less. After the pressure-sensitive adhesive layer of the pressure-sensitive adhesive sheet for protecting a semiconductor element and a silicon wafer have been bonded to each other, and have been left at rest at 50℃ for 24 hours, and the pressure-sensitive adhesive sheet for protecting a semiconductor element has been peeled, a halogen element ratio with respect to a total element content of a surface of the silicon wafer bonded to the pressure-sensitive adhesive layer is 0.3 atomic% or less.
Patent TW-202325192-A (TW)
Title: Pregnant woman pillow having arbitrary combination capable of satisfying usage preference of pregnant woman for sleeping on side or on stomach, breast feeding support, child sitting learning and playing
Inventor: ZHANG GUO-WEI
IPC: A47G9/10
Filed: 2021-12-28
Abstract: The present invention provides a pregnant woman pillow having arbitrary combination, which includes a head pillow, a waist pillow and a front pillow. In which, the head pillow has a first end and a second end located at both sides. The first end and the second end are respectively configured with a first head pillow connecting element and a second head pillow connecting element, wherein the first head pillow connecting element and the second head pillow connecting element are respectively provided with a plurality of buckles that have the same specification, and are in parallel and bilaterally symmetric. The waist pillow has a waist pillow connecting element. The front pillow has a front pillow connecting element. The waist pillow connecting element and the front pillow connecting element are provided with a plurality of buckle belts that have the same specification, and are in parallel and bilaterally symmetric, and may be correspondingly buckled with the buckles. Thus, the waist pillow and the front pillow may be buckled on the head pillow in a freely chosen direction, so as to provide various combination patterns and different combinations and thus satisfy the usage preference of pregnant woman for sleeping on side or on stomach, breast feeding support, child sitting learning and playing.
Patent TW-202238362-A (TW)
Inventor: SU CHUN-HSIEN
IPC: G06F7/38
Filed: 2022-01-12
Abstract: 一種乘積和運算裝置。乘積和運算裝置包括具有編碼器電路以及多個反向器的類比數位轉換電路，多個反向器的臨界電壓依據激活函數的分類閾值設定，多個反向器反應類比乘積和信號而產生多個位元信號，編碼器電路對多個位元信號進行編碼以產生數位信號。
Patent TW-202246772-A (TW)
Title: Method for testing possibility, severity, or progression of inflammatory disease
Inventor: HIGASHI KIYOSHI
IPC: G01N33/53
Filed: 2022-01-28
Abstract: The present invention addresses the problem of providing a feature of testing the possibility, severity, or progression of an inflammatory disease, in particular, a chronic inflammatory disease. The problem is solved by measuring the amount or concentration of a specific N-linked sugar chain in a biological sample collected from a subject.
Patent TW-202303636-A (TW)
Title: Devices, systems, and methods for power generation using irradiators and other gamma ray sources
Inventor: HEIBEL MICHAEL D
IPC: G21H1/10
Filed: 2022-02-24
Abstract: Devices, systems, and methods for power generation using irradiators and other gamma ray sources are disclosed herein. In various aspects, an irradiator-based power generation device is disclosed. The power generation device can include a radiator layer configured to at least partially surround an irradiator, wherein the radiator layer comprises a radiator material configured to emit delta radiation in response to exposure to gamma radiation; an electrical insulation layer configured to surround the radiator layer, wherein the electrical insulation layer comprises an electrical insulation material configured to allow delta radiation to penetrate therethrough; and a collector layer configured to surround the electrical insulation layer, wherein the collector layer comprises a collector material configured to collect delta radiation.
Patent TW-202235334-A (TW)
Title: Lid unit and container with lid
Inventor: ITAGAKI YUSHI
IPC: B65D51/24
Filed: 2022-03-07
Abstract: The invention provides a cover unit which can prevent pressure in a container main body from rising and can easily and safely open a plug. The lid unit is attached to a container body having an upper opening, and is provided with: an outer lid that covers the upper opening of the container body; an inner lid fitted into the inside of the container body from the upper opening of the container body; and a waterproof packing material which is located at the outer peripheral part of the inner cover and seals the space between the inner side of the container main body and the inner cover, the waterproof packing material is composed of an annular elastic sealing member, and the elastic sealing member abuts against an extending part which protrudes from the inner side of the container main body over the whole circumference. And a waterproof filler attached to the inner lid in a state of being fitted to an annular groove provided in the outer peripheral portion of the inner lid, the outer peripheral portion of the inner lid being provided with a pressure release portion that releases the pressure in the container body when the pressure in the container body rises to a predetermined pressure.
Patent TW-202300450-A (TW)
Title: Dispersion and coating composition containing lithium metal phosphate
Inventor: NESS DANIEL
IPC: C09D5/24
Filed: 2022-03-10
Abstract: The invention relates to a dispersion comprising 1 % to 50 % by weight of lithium metal phosphate of a general formula Li1+aM2-bNc(PO4)3+d, wherein M = Ti, Zr or Hf; N = metal other than Li and M; 0 ≤ a ≤ 0.6, 0 ≤ b ≤ 0.6, 0 ≤ c ≤ 0.6, 0 ≤ d ≤ 0.8, and 50% to 99% by weight of trialkyl phosphate. coating composition comprising such a dispersion and the use thereof in lithium ion batteries.
Patent TW-202314007-A (TW)
Title: Physical vapor deposition method
Inventor: WANG CHIA-HSI
IPC: C23C14/04
Filed: 2022-03-23
Abstract: A method is provided. The method includes the following steps: introducing a first physical vapor deposition (PVD) target and a second PVD target in a PVD system, the first PVD target containing a boron-containing cobalt iron alloy (FeCoB) with an initial boron concentration, and the second PVD target containing boron; determining parameters of the PVD system based on a target boron concentration larger than the initial boron concentration; and depositing a FeCoB film on a substrate according to the parameters of the PVD system.
Patent TW-202244643-A (TW)
Title: Numerical control device and numerical control system
Inventor: IMANISHI KAZUTAKA
IPC: G05B19/414
Filed: 2022-04-13
Abstract: Provided is a numerical control device in which a load setting of a robot can be switched from the numerical control device. This numerical control device 2 comprises: an analysis unit 23 that analyzes a robot numerical control instruction in a numerical control program; a robot instruction signal generation unit 25 that generates a robot instruction signal to be transmitted to a robot control device 3 in accordance with the robot numerical control instruction analyzed by the analysis unit 23; a load setting selection unit 24 that selects a load setting to be set for a robot 30 from among a plurality of load information in accordance with the robot numerical control instruction analyzed by the analysis unit 23; and a data transmission/reception unit 26 that transmits the load setting selected by the load setting selection unit 24 to a load setting update control unit 38 of the robot control device 3 via the robot instruction signal generation unit 25 and thereby reflects the load setting in an inverse dynamics calculation for torque to be input into the robot 30.
Patent TW-202320273-A (TW)
Title: Semiconductor structure
Inventor: CHIN SHU-CHENG
IPC: H01L23/522
Filed: 2022-04-19
Abstract: A graphene liner deposited between at least one liner material (e.g., barrier layer, ruthenium liner, and/or cobalt liner) and a copper conductive structure reduces surface scattering at an interface between the at least one liner material and the copper conductive structure. Additionally, or alternatively, the carbon-based liner reduces contact resistance at an interface between the at least one liner material and the copper conductive structure. A carbon-based cap may additionally or alternatively be deposited on a metal cap, over the copper conductive structure, to reduce surface scattering at an interface between the metal cap and an additional copper conductive structure deposited over the metal cap.
Patent TW-202231396-A (TW)
Title: Support glass substrate and laminated substrate using same
Inventor: SUZUKI RYOTA
IPC: C03C23/00
Filed: 2018-07-09
Abstract: The present invention provides a support glass substrate for supporting a pre-singulation substrate, characterized in that the support glass substrate comprises an information identification section having dots as constituent units on the surface of the support glass substrate and in that the mean length of cracks extending from each of the dots in the surface direction is no greater than 350 [mu]m.
Patent TW-202312109-A (TW)
Inventor: BRUZZESE FABIO
IPC: G07F11/02
Filed: 2022-05-09
Abstract: 一種自動飲料販賣機(1)，其具有一櫃體(2)並藉由一門(8)閉合，容納一飲料製備總成(5)以及用於裝有/混合相同飲料的主體的至少一個分配總成(9)； 裝有/混合主體的該分配總成(9)係藉由一快速耦接與鎖合裝置(10)耦接至該門(8)，該快速耦接與鎖合裝置(10)具有至少一對之扣持插銷(18)穩定地連接至該分配總成(9)以及一定型的扣持板(30)穩定地連接至該門(8)並針對每一扣持插銷(18)劃定一導引槽孔(34)，該導引槽孔(34)經配置成由該扣持插銷(18)之一附接頭(28)穿過以及導引該相同扣持插銷(18)的一軸(25)。
Patent TW-202303131-A (TW)
Inventor: INAMASU RENA
IPC: G01N23/04
Filed: 2022-05-09
Abstract: 本發明係提供一種分析裝置及分析方法，該分析裝置及分析方法係可測定在表面(界面)之高分子的運動，並在X射線的全反射狀態下觀測高分子，即可在無標記下獲得觀測對象之表面附近的資訊。該分析裝置係將X射線以臨界角前後之入射角照射於高分子，以取得時分割繞射/散射圖像；該高分子分析方法係具有：將X射線以臨界角前後之入射角照射於高分子試料之步驟；取得時分割繞射/散射圖像，並評定高分子表面/界面之運動性的步驟。
Patent TW-202305145-A (TW)
Inventor: LO YUK MING DENNIS
IPC: C12Q1/6869
Filed: 2013-09-23
Abstract: 本發明係關於可測定並使用各種組織及樣品之甲基化概況的系統、方法及設備。提供實例。可基於血漿甲基化(或具有細胞游離DNA之其他樣品)與母體/患者之甲基化概況之比較來推斷胎兒/腫瘤組織之甲基化概況。當樣品具有DNA混合物時，可使用組織特異性等位基因測定胎兒/腫瘤組織之甲基化概況以鑑別來自胎兒/腫瘤之DNA。甲基化概況可用於確定胎兒/腫瘤之基因組中的複本數目變化。已經由各種技術鑑別胎兒之甲基化標記物。可藉由測定DNA片段之大小分佈之大小參數來測定甲基化概況，其中大小參數之參考值可用於確定甲基化程度。另外，甲基化程度可用於測定癌症程度。
Patent TW-202328987-A (TW)
Inventor: WINTERBOTTOM PHILIP
IPC: G06N3/067
Filed: 2022-06-20
Abstract: 各種實施例提供包含多個電路封裝之運算系統，每一電路封裝包括一電子積體電路，其具有多個處理元件及將該等處理元件連接至一光電網路中之晶片內雙向光子通道，其中晶片間雙向光子通道跨越該多個電路封裝之該等光電網路將該等處理元件連接至一較大光電網路中。
Patent TW-202309473-A (TW)
Title: Encoder system, and method for determining the reading head position in an encoder system
Inventor: SIRAKY JOSEF
IPC: G01B11/00
Filed: 2022-07-06
Abstract: The invention relates to an encoder system having the following features: a reading head (10) having at least one first position sensor (1, 1.1, 1.2) and at least one second position sensor (2, 2.1, 2.2), the position sensors (1, 1.1, 1.2, 2, 2.1, 2.2) being positioned at a fixed distance (a, a1, a2, a3, a4, a5, a6) from one another in a reading direction (12). a material measure (30) having a longitudinal direction (l) and a transverse direction (q), the material measure (30) having a first code segment (32) in the longitudinal direction (l) with a first absolutely coded code track (34), wherein the reading head (10) and the material measure (30) are positioned with respect to one another in such a way that: the reading direction (12) corresponds to the longitudinal direction (l); the reading head (10) and the material measure (30) can be moved relative to one another in the reading direction (12); and the at least one first position sensor (1, 1.1, 1.2) can in each case detect a first sensor position (p1, p1.1, p1.2) on the material measure (30), and simultaneously the at least one second position sensor (2, 2.1, 2.2) can in each case detect a second sensor position (p2, p2.1, p2.2) on the material measure (30). The invention also relates to a method for determining the reading head position (p) in an encoder system (20).
Patent TW-202322449-A (TW)
Title: Nonaqueous electrolyte, and nonaqueous electrolyte secondary battery including the same
Inventor: AOKI SHOTARO
IPC: H01M10/0563
Filed: 2022-07-27
Abstract: To provide a nonaqueous electrolyte capable of achieving improved battery cycle characteristics, and a nonaqueous electrolyte secondary battery including the nonaqueous electrolyte. A nonaqueous electrolyte contains a nonaqueous solvent, an electrolyte salt dissolved in the nonaqueous solvent, and a silane compound represented by the following general formula (1) (where R1 represents a C2 to 20 alkenyl group; R2 represents a C8 to 20 substituted or unsubstituted arylethynyl group; R3 represents a C1 to 20 alkyl group; R4 represents a C2 to 20 alkynyl group; each of l and m independently represents an integer of 1 to 3; n represents an integer of 0 to 2; and l, m, and n are integers satisfying 2 ≤ l+m+n ≤ 4).
Patent TW-202324393-A (TW)
Inventor: HSU FU-CHANG
IPC: G11C7/22
Filed: 2022-07-29
Abstract: Methods and apparatus for a novel memory array are disclosed. In an embodiment, a method is provided for reading a dynamic random-access memory (DRAM) array. The method includes activating the bit line select gates to equalize voltage levels on a plurality of bit lines, deactivating the bit line select gates to maintain the equalized voltage levels on the plurality of bit lines using a bit line capacitance associated with each bit line, and activating a selected word line to access selected memory cells connected to the selected word line. The method also includes activating bit line select gates to pass first data from a first bit line and second data from a second bit line to the sense amplifier. The first data is from a selected memory cell and the second data is reference data. The method also includes determining sensed data from the first and second data.
Patent TW-202316558-A (TW)
Inventor: INOUE SEIYA
IPC: H01L21/683
Filed: 2022-08-08
Abstract: A wafer placement table (10) includes a ceramic base (20), a cooling base (30), and a plurality of holes (for example, a gas hole (44) and a terminal hole (51)). The ceramic base (20) has a wafer placement surface (22a) on its top surface where a wafer is able to be placed and incorporates a wafer attraction electrode (26). The cooling base (30) is bonded to a bottom surface of the ceramic base (20) and has a refrigerant flow channel (32). The gas hole (44) and the terminal hole (51) extend through the cooling base (30) in an up and down direction. A heat exchange promoting portion (for example, a part 32a where a flow channel is narrow) that promotes heat exchange between refrigerant flowing through the refrigerant flow channel (32) and a wafer (W) placed on the wafer placement surface (22a) is provided in an area around each of these holes.
Patent TW-202317996-A (TW)
Title: Electronic component testing device, socket and loading frame wherein the electronic component testing device includes a test head and a processor
Inventor: IMAIZUMI NAOTO
IPC: G01R1/04
Filed: 2022-08-12
Abstract: The invention provides an electronic component testing device capable of accurately aligning the position of a terminal of a DUT with a contact point of a socket. An electronic component testing device 900 which includes a test head 5 having a socket 50 and a processor 1, the socket 50 includes a plurality of contact points 53 provided corresponding to terminals 91 of a DUT 90 and a wall 55 protruding towards an insert part 710 along a pushing direction of the DUT 90, he insert part 710 includes an abutment mechanism 750 configured to abut the DUT 90 on the socket 50 against the wall 55 of the socket 50 and an opening 741 exposing the terminal 91 of the DUT90 relative to the socket 50. The processor 1 is configured to align the terminal 91 of the DUT 90 with the contact points 53 of the socket 50 when the DUT 90 is pressed against the socket 50 and abutted onto the wall 55 through the DUT90 and by the abutment mechanism 750.
Patent TW-202322551-A (TW)
Title: 帶有可組態路徑的扇出多級放大器
Inventor: HOLLAND KYLE DAVID
IPC: H03F3/189
Filed: 2022-09-01
Abstract: 放大器可以包括多個級，其中多個級以扇出組態來進行佈置。扇出組態在多個放大器輸出節點處提供多個放大訊號，該多個放大器輸出節點可以耦合到共用的一組降頻轉換器。共用的降頻轉換器可以支援處理比輸入到放大器的輸入RF訊號之最大可能頻寬更小的頻寬。例如，降頻轉換器可以支援與所支援的RF訊號之最小頻寬相匹配的頻寬。例如，當放大器旨在支援5G毫米波RF訊號及5G sub-6 GHz RF訊號時，降頻轉換器可以各自個別地支援5G sub-6 GHz RF訊號中的載波之頻寬，但是不個別地支援可能的5G毫米波RF訊號之整個頻寬。
Patent TW-202323210-A (TW)
Inventor: JIN YUHUI
IPC: C03C15/00
Filed: 2022-09-13
Abstract: Foldable substrates comprise a first portion, a second portion, and a central portion positioned therebetween. The central portion comprises a first transition region comprising a first transition width and a first transition surface area extending between a first surface area of the first portion and a first central surface area of the central portion with a first average angle. In aspects, the first average angle is from about 167° to about 179°. In aspects, the first transition width is from about 150 micrometers to about 700 micrometers. Methods comprise disposing an etch mask over the first major surface of the foldable substrate before etching the foldable substrate. In aspects, the etch mask comprises a first polymer layer positioned between a first barrier layer and the first major surface. In aspects, the etch mask comprises a positive photoresist.
Patent TW-202315999-A (TW)
Title: A drive chain for stitch formation members of a circular knitting machine and a circular knitting machine comprising such drive chain
Inventor: RIZZI STEFANO
IPC: D04B15/94
Filed: 2022-10-03
Abstract: A drive chain for stitch formation members of a circular knitting machine comprises an element (6) coupled or to be coupled with a stitch formation member, and an oscillating lever (7) connected to said element (6) on a junction area. The oscillating lever (7) is configured for interacting with selecting devices (23) so as to oscillate with respect to said element (6). Said element (6) comprises a first portion (9) carrying a first butt (18) and a second portion (10) configured for slidingly coupling with a bottom of a respective groove (5). The first portion (9) is elastically coupled with the second portion (10) so as to keep the first butt (18) in an operating position in which the first butt (18) protrudes from the groove (5), and to allow the first butt (18) to get back into the groove (5) in case of interference with one of the first actuating cams (25).
Patent TW-202304420-A (TW)
Title: Use of tricyclic spiro compound
Inventor: ASADA MASAKI
IPC: A61P37/00
Filed: 2016-01-08
Abstract: Provided is a medicament comprising a compound having antagonistic activity against EP4 receptor as an active ingredient to prevent and / or treat the diseases caused by activation of EP4 receptor. 
 
     The present invention provides a compound represented by the following formula (I), salt thereof, N-oxide thereof, solvate thereof, prodrug thereof, which have antagonistic activity against EP4 receptor and are useful as a pharmaceutical ingredient to prevent and / or treat the diseases caused by activation of EP4 receptor.
 
           
(Wherein all symbols represent the same meanings as symbols described in the specification).
Patent TW-202329400-A (TW)
Inventor: AGRAWAL ASHISH
IPC: H01L27/105
Filed: 2022-10-14
Abstract: 本發明提供了形成具有空氣間隙脊部的叉形片裝置的技術。空氣間隙可為沒有氣體，或者有氣體。在一個示例中，裝置包括第一半導體本體，從空隙(空氣間隙)的第一側橫向延伸並具有界定空隙的第一側的部分的端面，及第二半導體本體，從空隙的第二側橫向延伸並具有界定空隙的第二側的部分的端面。第一閘極結構位於第一半導體本體上，且第二閘極結構位於第二半導體本體上。在一些情況下，間隔件結構位於源極區或汲極區與對應的閘極結構之間，間隔件結構包括空隙的一個或多個部分。空隙可透過在裝置形成後的背面製程來產生。
Patent TW-202323779-A (TW)
Inventor: LI ANG
IPC: G01J9/02
Filed: 2022-11-28
Abstract: Methods and systems of correcting chromatic focal shift are described. They include measuring a chromatic focal shift in focal points of a lens between first and second wavelengths of light passing through the lens. They also include detecting the first wavelength of light from a sample spaced at a first distance between the sample and the lens that corresponds to a first focal point for the first wavelength of light. They further include adjusting the sample and the lens to a second distance with a piezoelectric actuator. The second distance may be determined using the measurement of the chromatic focal shift between the first and second wavelengths of light passing through the lens. They additionally include detecting a second wavelength of light from the sample spaced at the second distance between the sample and the lens, where the second distance corresponds to a second focal point for the second wavelength of light.
Patent TW-202324252-A (TW)
Title: 伺服器及其提供資訊的方法
Inventor: KIM NAM HEE
IPC: G06Q30/02
Filed: 2022-12-08
Abstract: 本發明提供一種在一伺服器中提供資訊之方法。該提供資訊之方法可包含：基於與一使用者之一服務使用相關之歷史資訊來識別一先前訂單之商店識別資訊及物品識別資訊；識別透過一使用者所使用之一介面顯示之複數個商店當中與該商店識別資訊匹配之一商店；及同與該商店識別資訊匹配之該商店相關地顯示一標籤。
Patent TW-202324713-A (TW)
Title: Semiconductor storage device
Inventor: TAKEKIDA HIDETO
IPC: H01L27/11551
Filed: 2020-12-31
Abstract: To provide a semiconductor storage device in which the crystal defect of a semiconductor substrate can be suppressed. A semiconductor storage device according to the embodiment includes a substrate. A first laminate is formed over the substrate by stacking a plurality of first insulating layers and a plurality of conductive layers alternately. The first laminate is formed stepwise at a side part thereof. A plurality of pillar parts are provided penetrating the first laminate. A second laminate is provided at an outer edge part of the substrate so as to face the side part of the first laminate, and is formed by alternately stacking the first insulating layers and the conductive layers. The second laminate is formed stepwise at a side part thereof facing the first laminate. When viewed from the stacking direction of the first laminate, a plurality of first slits are provided to the first and second laminates in a direction where the first and second laminates are arranged. The first slits penetrate the first and second laminates.
Patent TW-202335168-A (TW)
Title: 用於具有多個嵌入式電極的基板支撐件的方法
Inventor: KRAUS PHILIP ALLAN
IPC: H01L21/683
Filed: 2018-07-25
Abstract: 提供了一種用於在電漿輔助處理腔室中偏壓基板的區域的方法和設備。偏壓基板（或基板的區域）增加了在基板與處理腔室中形成的電漿之間的電位差，從而將來自電漿的離子加速到基板區域的有效表面。於此的複數個偏壓電極以有利於管理跨越基板的處理結果的均勻性的圖案的方式跨越基板支撐件而空間地佈置。