baber/WOPTO huggingface dataset:
Patent KR-20020051971-A (KR)
Title: A method and equipment for controlling weld quality in flash butt welding
Inventor: KANG MUN JIN
IPC: B23K11/24
Filed: 2000-12-21
Abstract: PURPOSE: A method and an equipment are provided to control weld quality by appropriately controlling preset welding current and welding transfer speed in flash butt welding consisted of pre-flash, flash and upset processes. CONSTITUTION: The method for controlling weld quality in flash butt welding comprises the steps of respectively setting welding heat input per standard unit hour and fusion heat input per standard unit volume for each of pre-flash, flash and upset processes; measuring welding current, welding voltage and welding transfer speed in the present welding; calculating present welding heat input per unit hour and present fusion heat input per unit volume using the measured welding current, welding voltage and welding transfer speed; selecting welding heat input per standard unit hour and fusion heat input per standard unit volume according to each processes by receiving control signals dividing each of the processes, and calculating errors by comparing the selected welding heat input per standard unit hour and fusion heat input per standard unit volume with the calculated present welding heat input per unit hour and present fusion heat input per unit volume; calculating compensation values for welding current and welding transfer speed from the calculated errors; and resetting welding current and welding transfer speed of the present process according to the calculated compensation values.
Patent KR-20020051042-A (KR)
Title: A method of executing a building using an iron reinforcing rod
Inventor: SO KWANG MIN
IPC: E04B2/84
Filed: 2000-12-22
Abstract: PURPOSE: Provided are a reinforcing bar arrangement apparatus for building and a process for constructing the building by simultaneously accomplishing both processes of constructing wall body and interior/exterior materials to remarkably reduce production time and cost. CONSTITUTION: The arrangement process with the apparatus comprises assembling a spacer element(120) with anti-flowing part(122) between brackets(110) inserted and welding secured outside both reinforcing bars(101a,101b); assembling heat-insulation fixture(130) at middle of the spacer element(120); placing a plane bracket(150) with a number of lattice coupling holes(152) outside the brackets(110) to form an assembly unit(100); continuously arranging several assembly units(100) by cross-iron rods(170) provided with clamps(171) at equal intervals; mounting flat panels as interior/exterior materials and a mould to the plane bracket(150); then introducing concrete into the mould and curing the concrete.
Patent KR-20020052118-A (KR)
Title: apparatus for managing the sealing surface on strip
Inventor: CHOI YANG GI
IPC: C25D5/48
Filed: 2000-12-23
Abstract: PURPOSE: An apparatus for sealing treating the surface of a strip is provided to manufacture the strip of superior quality by spraying a solution having a low conductivity onto both edges of the strip and jetting hot and cold air onto the solution in the state that the solution is diluted. CONSTITUTION: The apparatus for sealing treating the surface of a strip comprises a body part(20) comprising a first treatment vat in which a pair of upper and lower first nozzle bars are arranged in the rear of a sealing vat so as to spray a solution of low conductivity onto upper and lower surfaces of both edge parts of the strip, and a second treatment vat in which pairs of upper and lower second and third nozzle bars(32a,32b,33a,33b) are arranged in the rear of the first treatment vat so as to jet hot and cold air onto both edge parts of the strip; and an operation part(40) in which upper guide rolls(42a,42b) and lower driving gears(43a,43b) are assembled into first, second and nozzle zones(40a,40b,40c) fixed onto left and right sides of the first and second treatment vats so as to guide horizontal movements of the first, second and third nozzle bars, the lower driving gears(43a,43b) are respectively mounted on first and second rotation shafts(45a,45b) rotationally driven in forward and reverse directions by driving force of a driving motor(49), and which comprises a sensor member(48) controlling supplying of the solution, and hot and cold air to the first, second and third nozzle bars during sensing of the edge part of the strip.
Patent KR-20020053354-A (KR)
Title: Apparatus for measuring a tire mobility
Inventor: PARK CHEOL
IPC: G01M17/02
Filed: 2000-12-27
Abstract: PURPOSE: A tire mobility measurement apparatus is provided to shorten development period and tire manufacturing cost by determining, in a short time period, optimum condition for tire mobility, while allowing test to be easily performed. CONSTITUTION: A tire mobility measurement apparatus comprises a tire mount jig(20) where a tire(10) is mounted; one or more gas storage tanks(31,32,33) connected to the tire such that the tire is injected with a gas; a gas pipe(34) connected to the tire and the gas storage tanks, and which delivers gas to the tire; a pump(35) installed to the gas pipe so as to deliver gas from the gas storage tanks to the tire; a force transducer(36) installed to an end of the tire; a vibration exciter(37) connected to the force transducer, and which periodically generates vibration; an accelerometer(38) installed to the other end of the tire; and a frequency analyzer(39) connected to the accelerometer and the vibration exciter, and which detects signals from the accelerometer and the vibration exciter and measures tire mobility.
Patent KR-20020058678-A (KR)
Title: Device of reducing noxious substances adopting muffler
Inventor: KIM YEON SEUNG
IPC: F01N1/12
Filed: 2000-12-30
Abstract: PURPOSE: A device for reducing noxious materials with a muffler is provided to reduce the emission and the noise of an engine by possessing both functions of the muffler and a plasma reactor. CONSTITUTION: A device for reducing noxious materials with a muffler(100) comprises a housing(10) a plurality of chambers(11,12,13) are formed in, the muffler installed at the housing and having pipes(21,22,23,24) making an exhaust gas discharged from an engine to circulate through the chambers, and a plasma reactor(200) installed at the housing to be communicated with the pipe and reducing the noxious materials contained in the circulated exhaust gas. The chambers are composed of a first, second and third chamber(11,12,13). A plurality of holes(21a,22a) are formed at the pipes(21,22) installed at the second chamber(12) for the exhaust gas to be flowed through.
Patent KR-20020057079-A (KR)
Title: Method for supporting general ip telephone system in nat based private network
Inventor: CHOI GI MU
IPC: H04L29/06
Filed: 2000-12-30
Abstract: PURPOSE: A method for supporting a generalized IP telephony system in an NAT-based private network is provided to enable an H.323 IP telephony service regardless of whether a caller H.323 terminal exists in the private network or a public network. CONSTITUTION: A specific channel is set up between a gatekeeper and an NAT type router to exchange information for address conversion(S101). If the gatekeeper receives a signaling message forwarding to a public IP(Internet Protocol) terminal existing in a public network, a private IP address is transmitted to the NAT router through the specific channel(S102). The NAT router received the private IP address, assigns the unique dynamic public IP address and transmits the assigned dynamic public IP address to the gatekeeper through the specific channel(S103). A signaling message forwarding to the public IP terminal, is regenerated by reflecting the received dynamic public IP address(S104). When a call is terminated, the gatekeeper returns the public IP address assigned from the NAT router(S105).
Patent KR-20010031093-A (KR)
Title: 신속한 전압 상승에 의한 플라즈마 점화용 시스템
IPC: H05H1/46
Filed: 1998-10-13
Abstract: 플라즈마(3)를 점화하는 개선된 시스템은 신속한 전압 상승(voltage rise)을 이용하여 동작할 수 있으며 이에 따라 미리 존재하는 이온들을 2차 전자 방사 등을 생성하도록 한다. 1 실시예에서, 전압 상승은 플라즈마를 가로질러 전자들의 천이 시간에 비교될 수 있도록 된다. 또한, 100 마이크로초이하로 전압 상승을 달성하도록 구성하여, 2차 전자 방사를 최대화하도록 천이 시간의 100배 이하로 하거나 또는 5-500 eV 범위의 충돌 에너지를 생성하도록 한다. 천이 시간은 프로그램가능하고, 출력 기억 장치를 수반하거나, 또는 저장 요소가 완전히 챠지된 후 증가된 전압을 플라즈마로 공급하도록 스위칭을 지연시킨 점화 제어부(9)를 통해 제어될 수 있다.
Patent KR-20010033816-A (KR)
Title: 디에틸렌 글리콜(알릴 카보네이트) 화합물의 부분 중합된혼합물
IPC: C08L31/00
Filed: 1998-12-16
Abstract: 본 발명은 에틸렌계 불포화 화합물의 부분 중합된 혼합물을 포함하는 실질적으로 겔이 없는 중합성 액체 조성물에 관한 것으로, 여기서 (a) 에틸렌계 불포화 화합물의 부분 중합된 혼합물이 하기 화학식 I 또는 화학식 II의 디에틸렌 글리콜(알릴 카보네이트)의 혼합물로 구성되고, 이 때 n이 1인 화학식 I의 디에틸렌 글리콜(알릴 카보네이트) 화합물이 디에틸렌 글리콜(알릴 카보네이트) 화합물의 혼합물의 25 내지 75 면적%를 차지하고; (b) 실질적으로 겔이 없는 중합성 액체 조성물의 에틸렌계 이중 결합 사용도가 3% 이상이다: 
     화학식 I 
     
       
     
     화학식 II 
     
       
     
     상기 식에서, 
     m 및 n은 양의 정수이다. 
     실질적으로 겔이 없는 중합성 액체 조성물은 중합되는 경우 주형에서 낮은 수축율을 나타낸다.
Patent KR-20010041299-A (KR)
Title: 광학 리던던시를 위한 연결 시스템
IPC: G02B6/122
Filed: 1999-02-01
Abstract: 이후의 단계에서 광 연결이 이루어질 수 있게 하기 위한 리던던트 광 연결 시스템이 특별히 준비된 형태로 제조된다. 광원들이 기능적인 지를 규정하는 정보에 응답하여, 광 에너지를 단지 기능적인 소스들로부터의 광 출력으로 가이드하는 다른 구조가 활성화되거나 결합 시스템 내로 유입될 수도 있다. 본 발명의 제 1 양상에서, 예비 형태는 다수의 주요 광원들 각각을 개별적인 적용 구조로 결합하는 주요 가이딩 구조, 및 부차 광원에 결합되어 어떠한 적용 구조와도 여전히 결합되지 않으면서 종료되는 부차 가이딩 구조를 포함한다. 만일 정보가 주요 광원들중 하나가 비기능적임을 나타내면, 광 에너지를 부차 가이딩 구조로부터 비기능적인 소스에 해당하는 주요 가이딩 구조로 전달하는 구조가 부가되거나, 또는 활성화될 수 있다. 본 발명의 다른 양상에서, 예비 형태는 N개의 광원들 및 N개의 출력 가이딩 구조들을 갖는 물질을 포함한다. 광원들의 출력들과 출력 가이딩 구조들의 입력들 간의 물질 내에 갭 영역이 제공된다. 부가적인 가이딩 구조들이 정보에 응답하여 형성 또는 활성화되어, 광 에너지를 광원들 중 단지 기능적인 것들로부터 출력 가이딩 구조들의 입력들로 가이드한다.
Patent KR-20010072569-A (KR)
Title: 자동화 화학공정 제어 시스템
IPC: B24B57/02
Filed: 1999-04-09
Abstract: 예정된 화학 구성을 갖는 액체 화학물질용 화학 전달 시스템은 전달될 액체 화학물질내 예정된 화학 성분 중 하나의 비율을 측정하기 위한 분석기를 사용한다. 자동화 샘플 시린지 형태의 정밀 분석기 샘플 전달 배치에 의해 분석기로 정확한 양의 액체 화학물질 샘플이 전달된다. 전달될 액체 화학물질내 적어도 하나 또는 예정된 화학 성분의 비율의 분석기에 의한 측정에 대한 정보는 마이크로컴퓨터에 설치될 수 있는 제어기에 저장된다. 이어서, 제어기는 액체 화학물질원에 대한 예정된 화학물질 성분의 정확히 제어된 양을 발하는 리플레니셔를 제어한다. 분석을 반복하고 결과가 정확하고, 합당하며 반복 가능함을 보장하기 위하여 값과 경향에 대해 체크한다. 적정 분석 중에, 다중상의 작동이 실행되어 정확성을 보장하도록 특히 종점 부근에서 적정을 제어한다. 각각의 분석 후에, 소제 절차를 공기와 같은 퍼지 가스, 및 세정 용매를 사용하여 실행하여, 선행 샘플을 강제로 일소시킨다. 선행 샘플을 일소할 때까지 샘플 시린지를 반복적으로 순환시킨다.
Patent KR-20010042609-A (KR)
IPC: F01K23/10
Filed: 2000-01-06
Abstract: A power generating method that includes the steps of burning a reformed fuel in the presence of air in a combustor of a gas turbine to generate a hot exhaust gas is disclosed. The hot exhaust gas is then passed through a turbine section of the gas turbine to generate power and, thereafter, the hot exhaust gas is passed through a heat recovery system where the hot exhaust gas is successively cooled as it passes through a series of heat exchangers. Heat exchangers comprising the heat recovery system include combustion air pre-heater(s); a thermochemical recuperator (or reformer), wherein hot exhaust gas provides the endothermic heat of reaction necessary to reform a raw fuel/steam mixture to the combustible, reformed fuel that is eventually burned in the combustor; and one or more water/steam heaters which supply steam to a low-pressure, condensing steam turbine of a bottoming Rankine cycle to generate additional power. A cooled exhaust gas exits the heat recovery system and, optionally, may be sent to scrubbers and/or other unit operations for further processing, such as removal of harmful toxins, before being vented to the atmosphere.
Patent KR-20010071316-A (KR)
Title: 자체 철수형 아이브이 카테테르 도입기
IPC: A61M25/08
Filed: 1999-05-20
Abstract: 본 발명의 자체 철수형 IV 카테테르 도입기(10)는 캐뉼러가 환자내로 삽입된 이후에 캐뉼러(22)에 부착된 커넥터(24)가 하우징으로부터 분리될 때 상기 카테테르 바늘(60)을 하우징내로 안전하게 자동으로 철수시킨다. 일 실시예에서, 상기 하우징은 그 내부에 장착된 후방부(72)를 구비하고 있는 철수체(56)를 수납하고 있는 철수 튜브(14)와, 상기 철수체의 전방의 개구를 통해 연장되고 바늘(60)을 수반하고 있는 전방부(58)를 구비한다. 철수체의 노출된 전방부상의 접속면(66)은 커넥터상의 대응 접속면(34)과 마찰식으로 결합된다. 커넥터와 철수 튜브 사이의 접촉면(84, 86)은 정지부로서 기능한다. 상기 접속면의 해제가능한 마찰식 결합은 철수를 방지한다. 제 2 실시예에서, 철수 튜브 전방부는 전방부를 연장하는 철수체의 외면에 있는 오목부(10)와 결합하는 돌출부(100)를 구비한 스프링 아암(96)으로서 구성되어 전방 방향으로 연장되고 있다.
Patent KR-20020061095-A (KR)
Title: A porous filter made of rock wool and a method for manufacturing same
Inventor: LEE WOO WON
IPC: B01D39/06
Filed: 2001-01-13
Abstract: PURPOSE: Method for manufacturing porous filter using rock wool is provided, which is characterized in that the porous filter is strong against corrosion by microorganism. Also minute particles are filtered by the porous filter. CONSTITUTION: According to the method, SiO2 of 35-47 wt.%, Al2O3 of 10-20 wt.%, CaO of 14-40 wt.%, MgO of 3-10 wt.%, Fe2O3 of 1-12 wt.%, and (Na2O+K2O) of 1-3 wt.% are dissolved in a cupola(3), using coke as heat source, at 1550-1650 deg.C. And fiber, being thickness of 3-10 micrometer and length of 10-20 cm, is made of dissolved mixture in a spinner(6). Air, soluble phenol resin of 3-10 wt.%, and surfactant of 1-10 wt.% are sprayed to the fiber at the spinner(6) for coating the fiber. And above mixture is molded into plate-type filter at 200-250 deg.C in a pressing-heating molder(12). Consequently plate-type porous filter being density of 50-120 kg/m¬3 and porosity of 80-97 vol.% is made.
Patent KR-20020066248-A (KR)
Title: Bake apparatus used to manufacture a semiconductor device
Inventor: BAE YONG GUK
IPC: H01L21/027
Filed: 2001-02-09
Abstract: PURPOSE: A bake apparatus for fabricating a semiconductor is provided to minimize contamination of a wafer in baking photoresist, by preventing the fume generated in the photoresist from being used as particles regarding the wafer while a net is used. CONSTITUTION: A bake oven(110) has a closed space of a box type. A heat plate(120) is installed inside the bake oven. A supporting member(125) upwardly protrudes from the upper surface of the heat plate to settle the wafer(50). The heat plate heats the wafer. The net(140) is higher than the heat plate, installed inside the bake oven. The net prevents the particles from dropping to the wafer. A temperature control unit(145) for controlling the temperature of the net is installed in a part of the net.
Patent KR-20010044403-A (KR)
Inventor: LEE HONG JAI
IPC: G02B15/00
Filed: 2001-02-17
Abstract: PURPOSE: A method is provided to manufacture a screen as a compact size and enlarge the screen using various lenses such as a convex lens and a concave lens. CONSTITUTION: A method is provided to allow to see an enlarged clear moving image with placing a small screen(4) within a near point, see an enlarged moving image brilliantly or see the moving image as a distant enlarged large screen using a lens(5). A method is provided to see the moving images with stereo-vision by wearing the lenses to both eyes(2) respectively. Two screens having an eyeglass shape are provided within a near distance. A lens is placed between the screen and the eye respectively. A screen within the near distance is seen as a distant enlarged moving image using the lens.
Patent KR-20020068762-A (KR)
Inventor: YOON JI HYEON
IPC: G02B6/02
Filed: 2001-02-22
Abstract: PURPOSE: An optical amplifier is provided to improve an optical characteristic by using a micro type wavelength division multiplexer having a high isolation. CONSTITUTION: A pump laser diode(12) is used for generating a pump light. A wavelength division multiplexer(100) is used for multiplexing an inputted optical signal and a pump light. The wavelength division multiplexer(100) has a line width of a±10nm at least. The wavelength division multiplexer(100) has an isolation of a constant characteristic over a wavelength band of a line width region. An EDF(10) receives the multiplexed optical signal and the multiplexed pump light and amplifies the optical signal according to an amplification mechanism. An isolator(18) is located between an input terminal of an optical amplifier and the wavelength division multiplexer(100) in order to prevent the back-reflected light.
Patent KR-20020072904-A (KR)
Title: Pickled sea foods composite appended with traditional oriental medicine extracts and manufacturing method thereof
Inventor: KIM BAEK SU
IPC: A23L17/00
Filed: 2001-03-13
Abstract: PURPOSE: Provided are a salted seafood composition added with medicinal herb extracts and its manufacturing method. Therefore, the salted seafood composition satisfies one's taste and contributes to maintain one' health. CONSTITUTION: The salted seafood composition added with medicinal herb extracts characteristically comprises 5 wt.% of medicinal herbs matured at low temperature by adding brown sugar, 60 wt.% of salted seafood solids, and 35 wt.% of the fermentation liquid solution of salted seafood.
Patent KR-20010092699-A (KR)
Title: Processing apparatus and processing method
Inventor: MOTODA KIMIO
IPC: H01L29/786
Filed: 2001-03-20
Abstract: PURPOSE: To provide a processing device used for processing a resist film formed on a substrate such as a liquid crystal display(LCD) glass substrate or a semiconductor wafer and its use. CONSTITUTION: A device 23A which processes a substrate G coated with a resist film has such a structure that it is capable of vacuum-drying the substrate G and removing off the resist film formed on the peripheral edge of the substrate G held at a prescribed position.
Patent KR-20020074870-A (KR)
Title: Slide type mobile phone using slide module
Inventor: SHIN JI SEOP
IPC: H04M1/02
Filed: 2001-03-22
Abstract: PURPOSE: A slide type portable phone using a slide module is provided to remarkably reduce the length of the main body of a portable phone by making an upper housing and a lower housing be able to slide. CONSTITUTION: A slide type portable phone(300) using a slide module(312) consists of an upper housing(310) and a lower housing(320). The upper housing(310) comprises electronic elements such as a speaker, function keys, an LCD(311), etc., and the slide module(312). The lower housing(320) contains electronic elements such as a microphone, an antenna and a keypad(321). Also the slide type portable phone(300) includes an FPCB(Flexible Printed Circuit Board)(330) to electrically connect the substrate to drive the electronic elements installed in the upper housing(310) with the substrate to drive the electronic elements installed in the lower housing(320).
Patent KR-20010100845-A (KR)
Title: 아연계 도금강판용 표면처리제 및 아연계 도금강판
IPC: B32B15/18
Filed: 2001-03-26
Abstract: 내식성(耐蝕性), 도막(塗膜) 밀착성이 뛰어나며, 또한 찰상부(擦傷部)의 내식성이 양호한 아연계 도금강판을 제공하는 것이다. 
     또한, 이를 위하여 비스페놀A형 골격을 가지며, 또한 유리전이온도(glass transition temperature)가 -40∼0℃인 우레탄수지(A)와, 에폭시기를 1분자 중에 3개 이상 가지는 수용성 에폭시수지(B)를 함유하여 이루어지며, 상기 우레탄수지(A)와 수용성 에폭시수지(B)의 비율이 우레탄수지(A)/수용성 에폭시수지(B)는 5/95∼95/5인 아연계 도금강판용 표면처리제를 제공한다.
Patent KR-20020078606-A (KR)
Title: Channel switching method in video reproducing device and video reproducing device thereof
Inventor: JIN YEONG GYU
IPC: H04N21/482
Filed: 2001-04-06
Abstract: PURPOSE: A method of changing a channel of an image reproducing system and the image reproducing system are provided to allow a user to easily remember the positions of channels and to effectively search the channels. CONSTITUTION: A plurality of channels are constructed in a channel map of two-dimensional, and a channel is changed with another channel on the channel map. A direction key input is received through a channel change instruction input unit to which multiple direction keys for moving channels on the channel map are inputted(220). According to the received direction key input, a channel is moved to a corresponding direction on the channel map(230). The moved channel is tuned, images being broadcasted through the channel are reproduced(240).
Patent KR-20020081864-A (KR)
Title: Sun roof of vehicle
Inventor: YOON YEONG GYU
IPC: B60J7/043
Filed: 2001-04-20
Abstract: PURPOSE: A sunroof of a vehicle is provided to drain water promptly without overflowing in washing or heavy rain by increasing the displacement per unit with keeping the capacity of the sunroof channel. CONSTITUTION: A drain system of a sunroof for a vehicle is provided to a frame(11) installed between a roof panel(R) and a head lining(H); a sun shade(14) guided by a guide rail(13) to open and close a slot of the head lining; a glass(15) connected to the frame to open and close a slot of the roof panel; a channel(12) installed in the frame to collect water between the roof panel and the glass; and plural drain hoses(19) connected to the channel to drain water through front, rear and center pillars. Water is drained promptly without overflowing in collecting the large amount of water in the roof.
Patent KR-20020082517-A (KR)
Title: A process for collaborative creation of print designs on computer communications network
Inventor: KIM CHANG WAN
IPC: G06F17/00
Filed: 2001-04-24
Abstract: PURPOSE: A method for a cooperated creation of a print design using a computer communication network is provided to enable main operation bodies such as a print designer, an apparel merchandiser, a trader, and a drawer who participate in a print design manufacture of a textile directly to develop a print design cooperatively. CONSTITUTION: A print designer(110) prepares an initial design and registers the design in a central system(200). An apparel merchandiser(120) searches the central system(200) directly, obtains the design, and orders the design to a trader. In the case that the apparel merchandiser(120) possesses the design, the apparel merchandiser(120) scans the design and transmits the design to the trader. The apparel merchandiser(120) examines the design and requests a strike-off manufacture as it is or after changing the design to be commercialized. When the trader requests a color separation and a drawing plate making to a drawer, the drawer transmits an electronic sample which is processed by a CDA work to the central system(200). The apparel merchandiser(120) examines the electronic sample and decides a design.
Patent KR-20020082545-A (KR)
Title: Method of manufacturing dram device to improve refresh property
Inventor: LEE YONG HUI
IPC: H01L21/8242
Filed: 2001-04-24
Abstract: PURPOSE: A fabrication method of DRAM(Dynamic Random Access Memory) devices is provided to enhance a refresh time by performing a slope ion-implantation after forming source and drain regions. CONSTITUTION: A stack gate electrode(10) is formed on a silicon substrate(1) by sequentially forming a gate oxide(2), a polysilicon layer(3), a tungsten silicide(4) and a hard mask(5). A spacer(11) is formed at both sidewalls of the stack gate electrode(10). Source and drain regions(12) are formed in the silicon substrate(1) by implanting heavily doped impurity ions. A buffer layer(20) is formed on the resultant structure so as to minimize a damage of the silicon substrate due to ion-implantation. An HTLPD(High Temperature Low Pressure Dielectric) is used as the buffer layer(20). Then, impurity ions are repetitively implanted into the source drain regions(12) by a slope ion-implantation. Since the electric field is relaxed globally, the refresh time is shorten.
Patent KR-20020083035-A (KR)
Title: Fabricating method of devise isolation structure
Inventor: MUN CHANG SUN
IPC: H01L21/762
Filed: 2001-04-25
Abstract: PURPOSE: A trench isolation layer formation method of semiconductor devices is provided to prevent the damage of a semiconductor substrate by rounding corner portions of a trench. CONSTITUTION: After forming a pad oxide(12) and a pad nitride(14) on a semiconductor substrate(10), a trench having the first depth(h1) is formed by sequentially etching the pad nitride(14), the pad oxide(12) and the substrate(10) formed on an isolation region. By coating a photoresist layer on the resultant structure including the trench, and exposing and developing the photoresist layer using a mask(52), the first photoresist pattern(24) having a wide-width opening pattern compared to the trench is formed on the pad nitride(14) and the second photoresist pattern(25) having the second depth(h2) is simultaneously formed to fill in the trench. The pad nitride(14), the pad oxide(12) and the substrate(10) are sloped etched by using the first and second photoresist patterns(24,25) as a mask, thereby rounding the corner portions of the trench. After removing the first and second photoresist patterns(24,25), an isolation layer is filled into the trench.