baber/WOPTO huggingface dataset:
Patent KR-20160140029-A (KR)
Inventor: CHO JEONG HO
IPC: H01C17/065
Filed: 2015-05-29
Abstract: The present invention relates to a flexible thin film thermistor manufacturing method which comprises the following processes of: providing a flexible substrate into a plating chamber wherein the flexible substrate is made of an organic material; preparing a reaction material solution by dissolving chloride including metal in deionization water; preparing an oxidation solution which oxidizes the metal; supplying the reaction material solution and the oxidation solution into the plating chamber; and plating an oxide thin film of the metal on the flexible substrate, thereby improving a deposition feature and an electrical feature of the oxide thin film.
Patent KR-20150144700-A (KR)
Title: Gas flow flange for a rotating disk reactor for chemical vapor deposition
Inventor: LUSE TODD A
IPC: C23C16/448
Filed: 2015-06-10
Abstract: A gas flow flange includes a first and a second section. The first section includes a plurality of first gas channels positioned inside and parallel to a top surface. A plurality of second gas input channels are positioned perpendicular to the top surface and extending from the top surface to the bottom surface. Each of the first gas input channels are aligned with an output of a corresponding one of the first gas input channels. The second section includes a plurality of second gas input channels that are positioned perpendicular to and extending from the top surface to the bottom surface of the second section. Each of the second gas input channels are aligned with a corresponding one of the second gas input channels. Fluid cooling conduits are positioned perpendicular to the top surface of the second section.
Patent KR-20160148838-A (KR)
Inventor: JANG SU IM
IPC: H02J7/02
Filed: 2015-06-17
Abstract: 본 발명은 기존의 무선 충전기기가 가지고 있던 충전가능 거리의 짧음으로 인한 충전중의 단말기기 사용 불가능의 불편함을 해결 하기 위해서 충전 기기에서 일정 거리 떨어져 있더라도 단말기의 충전이 가능한 무선 충전기기의 발명에 그 목적이 있다. 본 발명을 통해 무선 충전기기로도 충전 중의 단말기 사용이 가능해져 단말기 사용가능 시간을 대폭 향상시키는 효과를 기대할 수 있다.
Patent KR-20160008107-A (KR)
Title: Modular uv led lamp reflector assembly
Inventor: SPRANKLE DAVID ALLEN
IPC: F21V7/00
Filed: 2015-06-25
Abstract: A reflector assembly comprises a frame assembly including a first support frame having a first curved portion and a second support frame having a second curved portion facing the first curved portion. The reflector assembly further comprises a first reflector sheet of a material. The first reflector sheet is removably fixed to the first support frame. The first support frame flexes the first reflector sheet to have the first curved portion. The reflector assembly further comprises a second reflector sheet of a material. The second reflector sheet is removably fixed to the second support frame. The second support frame flexes the second reflector sheet to have the second curved portion.
Patent KR-20170005321-A (KR)
Inventor: HONG SEONG JONG
IPC: B60W50/02
Filed: 2015-07-03
Abstract: The present invention relates to a motor for motor driven power steering (MDPS). According to the present invention, a motor is connected to a worm shaft engaged with a worm wheel and rotated in an MDPS housing, protrudes toward the worm shaft to transfer power when a power supply unit is turned on, and is separated from the worm shaft to cut off the power when the power supply unit is turned off. The motor comprises a driving blocking unit transferring rotary power when the power occurs and blocking the power when failure occurs. According to one embodiment of the present invention, the motor transfers the power to the worm shaft through the driving blocking unit installed in the motor, is separated from the worm shaft to block the power when the failure occurs in the motor, and it is also prevented that steering power is rapidly increased in a steering wheel.
Patent KR-20170006534-A (KR)
Title: Lgiht emitting device
Inventor: MOON JI WOOK
IPC: H01L33/50
Filed: 2015-07-08
Abstract: The present invention relates to a light emitting device, including: a light emitting device which emits excitation light; a first wavelength converting body which absorbs part of the excitation light to emit the light at a first light emitting wavelength; a second wavelength converting body which absorbs part of the excitation light to emit the light at a second light emitting wavelength; and a third light emitting converting body which absorbs part of the excitation light to emit the light at a third light emitting wavelength. The first light emitting wavelength has a first light emitting peak in a range of 530 to 540 nm, the second light emitting wavelength has a second light emitting peak in a range of 550 to 560 nm, and the third light emitting peak has a third light emitting peak in a range of 620 to 650 nm.
Patent KR-20170008350-A (KR)
Title: Method for Diagnosing Arthritis
Inventor: RYU JE HWANG
IPC: C12Q1/68
Filed: 2015-07-13
Abstract: The present invention relates to a method for diagnosing arthritis and a kit for diagnosing arthritis. Provided is a novel biomarker for diagnosing rheumarthritis. The method for diagnosing arthritis comprises the steps of: (a) detecting expression degrees of genes or proteins of serotonin in a biological sample; and (c) comparing expression of mRNA or proteins of serotonin with a control group, and determining arthritis in the case of up-regulation.
Patent KR-20170009240-A (KR)
Title: Non-fluorinated type etching composition for silicon nitride layer
Inventor: CHOI CHEOL MIN
IPC: C23C16/34
Filed: 2015-07-16
Abstract: The present invention relates to an etching composition for a non-fluorinated silicon nitride film. More particularly, the etching composition suppresses damage of a lower metal layer and the like and etching of a silicon oxide film by comprising phosphoric acid, silicon-based compound, and water, and can selectively etch a silicon nitride film.
Patent KR-20170011313-A (KR)
Inventor: HYUN KYU HWAN
IPC: A61K36/896
Filed: 2015-07-22
Abstract: 본 발명은 울금, 유자, 오가피, 블루베리 및 둥굴레의 복합 추출물을 유효성분으로 포함하는 숙취해소용 약학적 조성물 및 식품 조성물에 관한 것으로, 본 발명에 따른 조성물은 천연물질을 이용하여 안전성이 보장될 뿐만 아니라 장기간 저장시에도 유용성분의 함량이 크게 변화하지 않으며 숙취해소 효능이 우수하여 장기적으로 복용할 경우 간 기능 개선에 효과가 있을 것으로 기대된다. 또한, 울금, 유자, 오가피, 블루베리 및 둥굴레의 기능성 효능이 부여되면서 기호도가 향상되어 남녀노소 누구나 즐겨 식용할 수 있을 것으로 기대된다.
Patent KR-20160014562-A (KR)
Inventor: LEE JEONG MIN
IPC: A61Q19/00
Filed: 2015-07-29
Abstract: The present invention relates to a wheat extract having an effect of alleviating skin wrinkles, a method for preparing the wheat extract, and a functional cosmetic product for alleviating skin wrinkles containing the wheat extract. More specifically, the wheat extract is prepared by performing the steps of: (a) adding a Triticum sp. raw material to an aqueous acidic solution, and heating and extracting the mixture at a temperature of 80-100°C; (b) adding an aqueous basic solution to a filtrate from the filtration of the extract in step (a) to adjust the filtrate to have pH 3.5-7.0 and inducing the formation of precipitates; and (c) obtaining a filtrate from the filtration of the precipitates formed in step (b). The prepared wheat extract secures a constant quantity of an active ingredient by selecting Ferulic acid as an index material, and confirms the elastase inhibitory efficacy and collagenesis promoting efficacy thereof, thereby providing a use as an active ingredient of a functional cosmetic product for alleviating skin wrinkles.
Patent KR-20170019952-A (KR)
Inventor: LIM TAEK GI
IPC: A43B7/32
Filed: 2015-08-13
Abstract: The present invention relates to shoes having shock-absorbing and acupressure functions, and to a production method thereof. More specifically, a plurality of groove parts are formed on a bottom side of a last for molding a midsole after being inserted into an outer skin, so as to mold the midsole, and a plurality of elastic bodies for absorbing shock are formed while having a regular interval from an upper surface of the midsole. Accordingly, the shoes of the present invention effectively absorb or reduce shock inflicted to the body as feet touch the ground while providing acupressure effects when a user walks along.
Patent KR-20170020162-A (KR)
Inventor: CHO EUN KYUNG
IPC: H01M12/08
Filed: 2015-08-14
Abstract: The present invention relates to a lithium air battery and a method for manufacturing the same, wherein the lithium air battery uses oxygen as an anode active material. Carbon black secondary particles composed of carbon black primary particles are stacked and formed. The present invention comprises: a positive electrode including pores having pores greater than 100 nm formed between the carbon black secondary particles; a negative electrode facing the positive electrode; and a separation membrane disposed between the positive electrode and the negative electrode. The lithium air battery increases discharge capacity during a charge-discharge test, and increases the capacity retention rate, thereby improving a cycle lifespan.
Patent KR-20170023477-A (KR)
Title: 소음 저감 댐퍼
Inventor: KIM KYUNG SOO
IPC: B63J2/02
Filed: 2015-08-24
Abstract: 본 발명은 덕트 내부를 흐르는 유체의 흐름을 부드럽게 만들어 종래에 문제되었던 와류현상을 억제하여 소음을 저감시키는 소음 저감 덕트에 관한 것이다. 
특히, 본 발명에 따른 소음 저감 덕트는, 덕트 내면에 서로 마주보는 형태로 장착되고, 상기 덕트 내부를 흐르는 유체의 저항이 감소되도록 상기 유체와의 접촉면이 유선형으로 팽창 가능하게 마련되는 팽창부재를 포함할 수 있다.
Patent KR-20150105275-A (KR)
Title: Ways of evaluating food additives, analyzing food and providing personalized food information as well as better alternatives based on analyzing supplement and ingredient facts on food.
Inventor: JUNG YOON JI
IPC: G01N33/02
Filed: 2015-08-27
Abstract: The present invention relates to an integrated system of a method for recommending and providing personalized food (A3) by using a method for evaluating grades of food additives (A1) and a method for analyzing food (A2). The present invention includes: a step of collecting food additive database; a step of analyzing the collected data; a step of evaluating the grades; a step of calculating stability; a step of analyzing the food using the grades of food additives and information indicated on the back side of the individual food; a step of collecting user personal information; a step of outputting harmful components for each user or hazardous components; and a step of recommending and analyzing the personalized food. According to the present invention, the integrated system provides information about actual usage state and permission for food additives for each country and therefore can improve expertise and objectivity to analyze the food. Moreover, the integrated system induces a proper diet by recommending and analyzing the personalized food. Therefore, the integrated system can prevent diseases and reduce personal medical expenses as a result.
Patent KR-20170025458-A (KR)
Title: 노즐 조절 기계식 비데
Inventor: KIM YONG WON
IPC: A61H23/04
Filed: 2015-08-28
Abstract: 본 발명은 기계식 비데로서, 세척수의 분사 각도를 조절할 수 있는 노즐 조절 기계식 비데를 제공함에 목적이 있다. 
본 발명에 따른 노즐 조절 기계식 비데는, 변기에 결합되는 몸체; 상기 몸체의 일측에 회전 가능하도록 결합되는 노즐부; 상기 몸체에 구비되고, 상수도로부터 온수관 및 냉수관이 각각 연결되는 온도 밸브; 상기 온도 밸브와 유체 역학적으로 통하는 노즐 세척 밸브; 및 상기 노즐 세척 밸브와 유체 역학적으로 통하고, 상기 노즐부와 연결되는 세정 밸브를 포함할 수 있다.
Patent KR-20170027414-A (KR)
Title: Regulator circuit and power system including the same
Inventor: IHM JEONG DON
IPC: G11C5/14
Filed: 2015-09-02
Abstract: A regulator circuit includes a power transistor, a current mirror, a first transistor, a second transistor, and a current source. The power transistor includes a source applied thereto with an external power voltage, a gate connected to a first node having a first voltage, and a drain connected to a second node for outputting internal power voltage. The current mirror outputs a first current to a third node having a second voltage, and outputs a second current having a size the same with the first current. The first transistor includes a drain connected to the first node, a gate applied thereto with a reference voltage, and a source connected to a fourth node. The second transistor includes a drain connected to the third node, a gate connected to the second node, and a source connected to the fourth node. The current source pulls a third current from the fourth node, generates a radiation current having a size the same with the first current based on the second voltage, and changes a size of the third current based on a difference between the radiation current and the reference current.
Patent KR-20170028125-A (KR)
Title: Driver assistance apparatus for vehicle and Vehicle
Inventor: LEE JEI HUN
IPC: B60W10/22
Filed: 2015-09-03
Abstract: The present invention relates to a vehicle driving assistance device, comprising: a camera obtaining a front image of a vehicle or a peripheral image of a vehicle; and a processor providing a suspension height control signal adjusting an expected impact portion of the vehicle generated by a collision between the vehicle and an object detected from the front image of the vehicle or the peripheral image of the vehicle.
Patent KR-20170031983-A (KR)
Inventor: LEE KIL BOM
IPC: H04B7/06
Filed: 2015-09-14
Abstract: In the present invention, a method of transmitting a signal to a receiving terminal in a multi-antenna-based wireless communication system is proposed. In particular, the method according to the present invention includes a step of generating the bit string of a specific bit size by channel-coding data; a step of dividing the bit string into a first bit string of a first bit size and a second bit string of a second bit size; and a step of allocating the second bit string of a second bit size to an antenna sequence codeword based on a signal transmission time point; and a step of transmitting the first bit string of a first bit size to the receiving terminal according to the order of antenna pairs indicated by the allocated antenna sequence codeword. So, an effective wireless data transmission/reception technique can be provided.
Patent KR-20170047000-A (KR)
Inventor: JUNG SEUNG HO
IPC: B63B35/32
Filed: 2015-10-22
Abstract: 도1
Patent KR-20160144292-A (KR)
Title: Method for testing water permeability of concrete
Inventor: LEE SANG CHUL
IPC: G01F1/00
Filed: 2015-10-29
Abstract: The present invention uses an apparatus for testing water permeability of concrete, the apparatus comprising: a water permeation measurement unit formed in a cylinder shape, storing water provided to measure the water permeability of concrete, and having scales marked to measure the amount of water permeating through a concrete specimen; a specimen displacement unit which is connected to a lower portion of the water permeation measurement unit and in which the concrete specimen is disposed; a downward discharge unit which is connected to a lower portion of the specimen displacement unit and through which the water permeating through the concrete specimen is discharged downward; an O-ring which is disposed between the specimen displacement unit and the downward discharge unit and prevents the downward sliding of the bottom surface of the concrete specimen; a lateral discharge unit which is connected to a lateral portion of the downward discharge unit and through which the water discharged through the downward discharge unit is discharged laterally; a valve which is disposed in the middle of the lateral discharge unit and controls the inflow or outflow of water discharged through the lateral discharge unit; an upward discharge unit connected to an upper portion of the downward discharge unit and through which the water discharged through the lateral discharge unit is discharged upward; and a flow meter which is disposed between the valve and the upward discharge unit and measures the flux of the water discharged through the lateral discharge unit toward the upward discharge unit. The present invention provides a method for testing water permeability of concrete, the method comprising the steps of: preparing a concrete specimen; disposing the concrete specimen in the specimen displacement unit; allowing water to permeate through the concrete specimen; and measuring the time of water permeation.
Patent KR-20170015056-A (KR)
Title: 잉크 충전기
Inventor: JEON MIN SEONG
IPC: B41J2/18
Filed: 2015-11-03
Abstract: 본 발명은 잉크젯 프린터 등에 사용하는 잉크 카트리지에 잉크 보충이나 혹은 충전하는 데 사용하는 잉크 충전기이다. 특히 잉크 충전에 제공되는 밸브 구조의 개량으로 잉크 주입기에 잉크 잔량을 없게 하고, 또한 카트리지에대한 잉크 주입 및 착탈구조 개선으로 잉크 주입시 잉크 충전 상태의 확인과 아울러 잉크 카트리지의 분리 작업을 쉽게 할 수 있게 하였고, 또한 잉크용기에는 잉크카트리지의 공기제거와 아울러 압력조절을 위한 잉크 회수공을 설치한 것이다.
Patent KR-20170052960-A (KR)
Title: Eliminating Inside Pressure Oil Pouring Influence type Automatic Transmission and Oil Level Checking and Oil Exchange Method thereof
Inventor: KWON HYUK JUN
IPC: F16H61/4165
Filed: 2015-11-05
Abstract: The present invention relates to an automatic transmitter eliminated with oil pressure resistance and methods of oil level check and oil exchange. According to the present invention, the automatic transmitter comprises: an oil pan (10) mounted on an oil pan mounting body (3) formed at one side of a housing to receive an internal pressure of an automatic transmitter; and an internal pressure plug (20) for blocking an inner space of the oil pan from the outside during installation on the oil pan (10), while forming the inner space of the oil pan at atmospheric pressure at the time of detaching, thereby capable of forming the inner space at atmospheric pressure before injecting oil for oil level check or oil exchange of the automatic transmitter (1). In particular, oil injection operation can be easily implemented without oil injection resistance due to an internal pressure of a transmitter when adding a small amount of oil for oil level check or injecting a large amount of oil for oil exchange.
Patent KR-20170024515-A (KR)
Inventor: KANG SHIN KU
IPC: G01N1/30
Filed: 2015-11-10
Abstract: The present invention relates to a method for counting cells in blood and, more specifically, to a method for counting red blood cells infected with a specific pathogen by processing an image taken from a blood sample. When using the method of the present invention, infection by pathogens can be diagnosed using a relatively quick and simple manner.
Patent KR-20160130695-A (KR)
Inventor: JUNG DONG HA
IPC: D06F37/20
Filed: 2015-11-11
Abstract: Disclosed is a washing machine having a damping apparatus which can be operated by vibration displacement. In the washing machine having a damping apparatus provided to reduce vibration transmitted from a washing tub, the damping apparatus comprises: a suspension member; a damping unit provided to be moved in accordance with the suspension member; and a friction unit provided in the damping unit, and installed to form a frictional force with the suspension member. The friction unit is arranged to be spaced from an internal surface of the damping unit to be selectively moved in accordance with vibration size of the washing tub.
Patent KR-20160056305-A (KR)
Inventor: MASUYAMA TATSURO
IPC: G03F7/004
Filed: 2015-11-11
Abstract: The present invention is to provide a resist composition capable of manufacturing a resist pattern with excellent line edge roughness. The resist composition comprises a resin having an acid-labile group (A1), a resin having a structural unit represented by formula (I) (A2), and an acid generator. In the formula: R^1 represents a hydrogen atom or a hydrocarbon group having 1-18 carbon atoms; A^1 represents a single bond, an alkanediyl group having 1-6 carbon atoms, or *-A^2-X^1-(A^3-X^2)_a-(A^4)_b-; * represents a binding site to an oxygen atom; each of A^2, A^3, and A^4 independently represents the alkanediyl group having 1-6 carbon atoms; each of X^1 and X^2 independently represents -O-, -CO-O-, or -O-CO-; a represents 0 or 1; b represents 0 or 1; and R^2 represents a fluorinated saturated hydrocarbon group having 1-13 carbon atoms.
Patent KR-20170056287-A (KR)
Title: 자동차용 스티어링 샤프트의 소음 및 진동 차단구조
Inventor: KIM SUNG SOOL
IPC: B62D1/16
Filed: 2015-11-13
Abstract: 본 발명의 자동차용 스티어링 샤프트의 소음 및 진동 차단구조에 따르면, 엔진룸과 운전석 사이에 구비되어 차량핸들과 연결되는 샤프트가 통과되며, 상기 엔진룸에서 발생되는 소음과 물의 유입을 차단시키는 차단구조에 있어서, 상부가 상기 운전석의 대쉬패널에 결합되고, 하부가 상기 엔진룸의 기어커버에 결합되고, 상기 샤프트가 상하부를 관통하는 관통홀이 형성된 아우터씰; 및 상기 아우터씰의 상측면 외측 모서리와 상기 관통홀 사이에 내입형성된 내입홈에 구비되는 충진부재;를 포함하고, 상기 엔진룸에서 발생되는 소음은, 상기 아우터씰과 충진부재에 의해서 차단된다.
Patent KR-20170057730-A (KR)
Inventor: CHOI YOUNG SOO
IPC: E04H15/34
Filed: 2015-11-17
Abstract: The present invention provides a tent fastener comprising a body portion (100) having slits (140) on both sides through which end portions (31) of a tent (30) are inserted, and a protrusion (200) for covering both side surfaces of a support table (20) at a lower portion of the body portion (100) to enhance fixing force of the support table (20) and the tent (30). The tent fastener (10) of the present invention comprises: a body portion (100) mounted on a support table (20) and into which an end portion (31) of a tent (30) is inserted, and a protrusion (200) protruding to cover both sides of the support table (20) at a lower portion of the body portion (100).
Patent KR-20170058030-A (KR)
Inventor: KO DO WON
IPC: G03B7/08
Filed: 2015-11-18
Abstract: An illumination sensing system and a surveillance camera employing the same are disclosed. The illuminance sensing system according to an embodiment of the present invention includes an illuminance sensor for sensing the amount of light, a circuit board including a mounting region on which the illuminance sensor is mounted, and a line connected to the illuminance sensor on the circuit board. The mounting region includes a mounting part on which the illuminance sensor is mounted and a peripheral part around the mounting part. The peripheral part comprises at least one through hole through which air flows. So, it is possible to provide an illumination sensing system which does not malfunction due to ambient temperature.
Patent KR-20170058759-A (KR)
Inventor: HAN MI HEE
IPC: G02B5/30
Filed: 2015-11-19
Abstract: A polarizing plate including an optical compensation film and an LCD apparatus including the same according to the present invention, improves the contrast ratio of a diagonal direction in dark state with application of a positive C plate (+C plate) and a negative 2-axis film (-B film). In addition, the LCD apparatus of the present invention improves asymmetry caused by a liquid crystal pretilt angle with application of photo alignment and improves transmissivity using liquid crystal which has negative dielectric constant of anisotropy. In addition, the LCD apparatus, which includes the liquid crystal having negative dielectric constant of anisotropy and color pigments for high color reproduction, of the present invention improves the contrast ratio of a diagonal direction by optimizing phase-lag values of the +C plate and the -B film and improves color shift and a color sense.
Patent KR-20170061365-A (KR)
Inventor: KIM HYUN KYUNG
IPC: H01L21/67
Filed: 2015-11-26
Abstract: 본 발명은 약액 공급 장치 및 이를 포함하는 기판 처리 장치 관한 것이다. 본 발명의 일 실시 예에 따른 약액 공급 장치에 있어서, 내부에 수용 공간을 가지는 용기와; 상기 수용 공간 내에 설치되며 상기 수용 공간을 액이 수용되는 상부의 액 수용 공간과 하부의 가스 도입공간으로 구획하고, 상기 가스 내 버블을 분쇄하는 미공이 상하 방향으로 형성된 분쇄 플레이트와; 상기 가스 도입공간으로 상기 가스를 공급하는 가스 공급관과; 상기 액 수용 공간과 연결되어 상기 가스에 의해 기화된 상기 약액을 외부로 공급하는 증기 배출관을 포함한다.
Patent KR-20170062802-A (KR)
Inventor: JOO GO EUN
IPC: A45D33/00
Filed: 2015-11-30
Abstract: 본 발명의 정량 토출용 펌프는 내부에 형성시킨 압력공간에서 왕복 이동하는 피스톤을 갖는 측면버튼을 설치하여 압력공간 내부에 압력을 발생시키는 펌핑수단과, 상기 압력공간과 화장품 용기의 내부공간과 연통되는 유입관로를 갖고 상기 내부공간과 연통되는 유입관로의 제1통로 입구 단부에 일방향으로 유체를 흐름시키는 제1체크밸브를 설치한 유입부와, 상기 압력공간과 연통되는 배출관로를 갖고 상기 내부공간과 연통되는 배출관로의 제2통로 입구 단부에 일방향으로 유체를 흐름시키는 제2체크밸브를 설치한 배출부로 구성하여 상기 피스톤의 이동에 의해 압력공간의 압력을 가변시켜 제1체크밸브와 제2체크밸브를 상호 역방향으로 동작시켜 유입관로와 배출관로를 반대로 개방시키거나 폐쇄시켜 내부공간의 유체를 외부로 배출하도록 이루어진다.
Patent KR-20170067246-A (KR)
Title: 인라인 증착장치용 리니어 소스
Inventor: PARK KEUN NO
IPC: C23C16/50
Filed: 2015-12-08
Abstract: 본 발명은 고밀도의 플라즈마를 라인 형태로 발생시켜 인라인 PECVD, ALD 등의 인라인 타입(In-Line type) 증착장치 내에서 대면적 기판에 대하여 증착 균일도를 우수하게 유지하면서 박막을 증착할 수 있는 인라인 증착 장치용 리니어 소스에 관한 것으로서, 본 발명에 따른 인라인 증착장치용 리니어 소소는, 중앙에 배치되며, 프리커서를 하측으로 분사하는 접지부; 상기 접지부의 좌측에 상기 접지부 방향으로 기울어져서 설치되며, 외부에서 공급되는 전원을 이용하여 공정 가스를 플라즈마화하여 하측으로 분사하는 제1 플라즈마 노즐부; 상기 접지부의 우측에 상기 접지부 방향으로 기울어져서 설치되며, 외부에서 공급되는 전원을 이용하여 공정 가스를 플라즈마화하여 하측으로 분사하는 제2 플라즈마 노즐부;를 포함한다.