Patent EP-2708308-A1 (EP)
Inventor: ZIOLEK CARSTEN
IPC: B23K26/08
Filed: 2012-09-14
Abstract: The laser processing device (1) comprises a laser beam source (22) and a device (4) deflecting a laser beam from the source. The deflecting device has a mounting structure (3), a structural element comprising a specular surface, a flexible element by which the structural element is connected so that the element is deflected at a deflection angle about a spatial axis, and first and second force-exerting components. One of the force-exerting components is controlled such that the two force-exerting components attract or repel to each other depending on the control process. The laser processing device (1) comprises a laser beam source (22) and a device (4) deflecting a laser beam from the source. The deflecting device has a mounting structure (3), a structural element comprising a specular surface, a flexible element by which the structural element is connected so that the element is deflected at a deflection angle about a spatial axis, and first and second force-exerting components. One of the force-exerting components is controlled such that the two force-exerting components attract or repel to each other depending on the control process, and is coupled to the structural element. The force-exerting components are arranged and interact with each other. The first force exerting component includes a magnet or a first electrostatically chargeable component. The second force exerting component includes a current-carrying element with an electromagnetic force field, or a second electrostatically chargeable component. The device further comprises an angle detecting unit for detecting an actual deflection angle by which the structural element is deflected, and a deflection correction control apparatus for controlling an articulating of the structural element in dependence on the predetermined angle of deflection and the actual deflection angle so that the actual angle of deflection corresponds to the predetermined angle of deflection. The first force exerting component is laterally arranged on the structural element facing away from a reflective surface, and is disposed on a connecting element of the structural element. The second force exerting component is laterally arranged on the structural element facing away from the reflective surface, is disposed below the reflecting surface. The current carrying elements and second electrostatically chargeable components are rotated perpendicular to each other. The flexible element is arranged below the specular surface and laterally arranged on the reflecting surface. A deflection angle of the reflecting surface is +- 10[deg] . The laser processing device further comprises an optical unit for focusing the laser beam onto a workpiece, microelectromechanical system components, and a control device for controlling a turn-on and -off of the laser beam and for driving the articulation about the predetermined angle of deflection so that a predetermined path portion of the laser beam is be traversed on the workpiece. The incident laser beam forms, on the specular surface, a laser spot having a predetermined shape and the maximum predetermined dimensions. The structural element is attached to a laser resonator. An independent claim is included for a method for applying a laser marking on a workpiece with a laser processing device.