baber/WOPTO huggingface dataset:
Patent TW-202140941-A (TW)
Inventor: FOITZIK MARTIN
IPC: F16B45/00
Filed: 2021-04-23
Abstract: An anchor point part includes a lower part 2 having a connection element 4 for connecting the anchor point part 1 to an object, and an upper part 3 rotatable relative to the upper part 2 about the longitudinal axis of the connection element 4 and having a connection element 8 for connecting anchors or lashing pieces. The upper part 3 can be displaced in the axial direction relative to the lower part 2 and in the opposite direction of the reset force of the return spring 10. The upper part 3 can freely rotate relative to the lower part 2 in the first position. In the second position, the upper part 3 acts on the connection element 4 in a torque-fitting manner. The connection element 4 has a radially protruding support disc 6, and the upper part 3 has a support disc supporting member 9 for supporting the support disc 6 on the radial side surface of the support disc 6. The connection element 4 has a rotating synchronous profile 13 and the upper part 3 has a rotating synchronous profile 19 adapted thereto and capable of being engaged with the rotating synchronous profile of the connection element 4 by the axial displacement of the upper part 3 from the first position to the second position. The rotating synchronous profile of the upper part, adapted to the rotating synchronous profile of the connection element, is provided by the inner wall of a disc-shaped ring body that retracts inwardly with respect to the radial end of the support disc supporting member. The lower part has a groove that surrounds and opens toward the upper part in the axial direction and the return spring is installed in the groove. A wave spring or a wave spring set is designed as the return spring.
Patent TW-202238546-A (TW)
Title: 顯示幕及顯示裝置
Inventor: CHANG HSI-CHE
IPC: G09G3/22
Filed: 2021-04-29
Abstract: 本發明公開了一種顯示幕及顯示裝置，所述顯示幕包括基板、若干個LED晶片及若干個承載板，基板的一表面形成有若干個焊盤結構，每個焊盤結構包括一正極焊盤及三個負極焊盤，三個負極焊盤設置於正極焊盤的一側；每個LED晶片包括紅光晶片、綠光晶片與藍光晶片；每個承載板具有正極連接端與負極連接端，正極連接端電連接正極焊盤，負極連接端電連接相對應的紅光晶片、綠光晶片或藍光晶片。本發明有利於提高顯示幕的解析度及顯示幕的良率。
Patent TW-202243927-A (TW)
Title: Motorcycle with electronic parking and braking control function including a brake disc, an electronic parking and braking device, and at least one brake lever switch
Inventor: Liao wei-xiang
IPC: B60K28/16
Filed: 2021-05-12
Abstract: A motorcycle with electronic parking and braking control function includes a brake disc; an electronic parking and braking device including a motor and a brake caliper, wherein the motor can be controlled to enter a locked state to drive the brake caliper to brake the brake disc, and the motor can also be controlled to enter an unlocked state to drive the brake caliper to release the brake disc; at least one brake lever switch; and a controller electrically connected to the motor of the electronic parking and braking device and the brake lever switch, and operable to execute an automatic parking mode while an engine is in a non-standstill state, wherein when executing the automatic parking mode, the controller determines whether to control the motor to enter the locked state according to an engine rotational speed, a duration for which the brake lever switch is turned on, a vehicle speed, and an accelerator opening degree.
Patent TW-202246870-A (TW)
Inventor: LIN CHUAN-YUAN
IPC: G03B11/00
Filed: 2021-05-18
Abstract: 一種具鏡頭防窺結構之電子裝置，包括主體、鏡頭以及防窺結構。防窺結構包括安裝件、滑動件以及防窺片。安裝件設置於主體，滑動件滑設於安裝件之凹槽內，且可移動於第一位置及第二位置，並包括第一磁鐵。防窺片包含相反的第一端部和第二端部及設置在第一端部的第二磁鐵。第二端部可基於第一端部為軸心樞轉以覆蓋或露出鏡頭。當滑動件移動至第一位置時，第一磁鐵及第二磁鐵相吸，使防窺片之第二端部朝向滑動件樞轉以露出鏡頭，當滑動件移動至第二位置時，第一磁鐵及第二磁鐵相斥，使防窺片的第二端部遠離滑動件樞轉以覆蓋鏡頭。
Patent TW-202247591-A (TW)
Inventor: Chu Chien-Lun
IPC: H02P6/182
Filed: 2021-05-25
Abstract: 一種馬達控制器具有一開關電路、一控制單元、以及一脈寬調變信號，其中該脈寬調變信號具有一工作週期。該馬達控制器用以驅動一馬達，其中該馬達具有一線圈。該開關電路用以提供一線圈電流至該線圈。該控制單元用以產生複數個控制信號以控制該開關電路。當該馬達控制器進入一定位初期狀態時，該馬達控制器使得該線圈電流於一電氣週期內達到一預定值。當該線圈電流達到該預定值時，該控制單元記錄該工作週期。該馬達控制器用以提高啟動該馬達之一成功率。
Patent TW-202248885-A (TW)
Title: Sub-sense amplifier and semiconductor memory device
Inventor: NAGAMINE HISAYUKI
IPC: G11C7/06
Filed: 2021-06-09
Abstract: A sub-sense amplifier includes a semiconductor substrate, a first pair of complementary transistors, a second pair of complementary transistors, and at least one ground transistor. The first pair and second pair of complementary transistors and the ground transistor are formed on the semiconductor substrate. The first pair of complementary transistors are disposed in line symmetry with a center line of the sub-sense amplifier as a symmetry axis, and gates of the first pair of complementary transistors are coupled to a node. The second pair of complementary transistors are also disposed in line symmetry with the center line, wherein the current directions of the second pair of complementary transistors are the same. Sources and drains of the first pair of complementary transistors are coupled to gates and sources of the second pair of complementary transistors, respectively. The ground transistor connects in series with the second pair of complementary transistors.
Patent TW-202301100-A (TW)
Inventor: WU LI-HSIN
IPC: G06F3/147
Filed: 2021-06-18
Abstract: 一種模式切換方法，應用於具有一第一情境模式與一第二情境模式之一顯示設備。該第一情境模式提供一第一快捷選單，該第二情境模式提供不同於該第一快捷選單之一第二快捷選單。該模式切換方法包含有接收一第一外部裝置之一第一訊號源，分析該第一訊號源以判定該第一外部裝置匹配於該第一情境模式或該第二情境模式，以及若該第一外部裝置匹配該第一情境模式，於該顯示設備之一顯示介面顯示該第一快捷選單並且不顯示該第二快捷選單。
Patent TW-202300122-A (TW)
Title: Penis stretcher and method for exercising penis
Inventor: LI HUI
IPC: A61H19/00
Filed: 2021-06-25
Abstract: The present invention relates to a device used to stretch the male penis and a method for exercising penis. The device used to stretch the male penis comprises a penis end part, an elastic part and a variable forcing part. The penis can be exercised by exerting a cyclically changing pulling force on the penis. Men can achieve the purpose of penis enlargement by exercising with the device of the present invention. It can be used to solve the problem of short and small male reproductive organ. The present invention also provides a penis stretcher for stretching and exercising the penis to enlarge the penis. The penis stretcher comprises a penis end part for placing the penis, an elastic part, and a forcing part. One end of the elastic part is connected to the penis end part, and the other end of the elastic part is connected to the forcing part. The forcing part includes a variable forcing part or a constant forcing part. While using, the variable forcing part can exert a variable pulling force on the penis. The force exerted by the variable forcing part is cyclically changed. The forcing part or the variable forcing part respectively includes an electromagnet. The elastic part can be a spring, a rubber band or an item made of more elastic material. The penis stretcher further comprises a constant forcing part. The weight of the constant forcing part is at least 500 grams. The method for exercising penis is to exert a variable force on the penis so as to exercise the penis.
Patent TW-202214663-A (TW)
Title: Novel perchlorinated disilenes and germasilenes and also neopentatetrelanes, a method for the preparation thereof and use thereof
Inventor: WAGNER MATTHIAS
IPC: C07F7/30
Filed: 2021-06-28
Abstract: The invention provides disilenes, germasilenes and neopentatetrelanes, a method for the preparation thereof and use thereof.
Patent TW-202216851-A (TW)
Title: 聚醯亞胺樹脂、聚醯胺酸、清漆及聚醯亞胺薄膜
Inventor: ABIKO YOHEI
IPC: C08G73/10
Filed: 2021-07-30
Abstract: 本發明為一種聚醯亞胺樹脂，具有來自四羧酸二酐之構成單元A及來自二胺之構成單元B；構成單元A含有來自下式(a1)表示之化合物之構成單元(A1)，構成單元B含有來自下式(b1)表示之化合物之構成單元(B1)。
         式中，R各自獨立地為甲基、或三氟甲基，n為1~4之整數。
Patent TW-202142516-A (TW)
Title: Glass substrate and laminated substrate
Inventor: HANAWA YU
IPC: B32B17/06
Filed: 2016-05-27
Abstract: The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 [mu]m to 300 [mu]m, and an inclination angle due to the warpage of 0.0004 DEG to 0.12 DEG.
Patent TW-202219113-A (TW)
Title: Aqueous resin crosslinking agent, aqueous resin crosslinking agent-containing liquid, and aqueous resin composition
Inventor: TSUKAMOTO NAMI
IPC: C08G18/79
Filed: 2021-08-24
Abstract: Provided are: a carbodiimide-based aqueous resin crosslinking agent which exhibits excellent storage stability in an aqueous medium, exhibits excellent storage stability when an aqueous resin is also present, and can improve the flexibility and solvent resistance of a cured product of an aqueous resin; and an aqueous resin crosslinking agent-containing liquid and an aqueous resin composition containing same. This aqueous resin crosslinking agent contains polycarbodiimide compounds (A) and (B). The polycarbodiimide compound (A) is a structure in which isocyanate groups at both terminals are capped with a prescribed hydrophilic organic compound. The polycarbodiimide compound (B) contains a linear diisocyanate compound as a structural unit and is a structure in which isocyanate groups at both terminals are capped with a prescribed organic compound. The amount of the polycarbodiimide compound (A) is 5-90 parts by mass relative to a total of 100 parts by mass of the polycarbodiimide compounds (A) and (B).
Patent TW-202227088-A (TW)
Inventor: VASEVA ANGELINA
IPC: A61K31/519
Filed: 2021-08-30
Abstract: 本發明關於一種藥物組合，其包含 (a) 如本文定義的Raf抑制劑或其藥學上可接受的鹽，和 (b) MEK抑制劑，特別是曲美替尼，特別地用於在治療增生性疾病中使用。本發明還關於這種組合用於製備用於治療增生性疾病的藥物之用途；關於在有需要的患者中治療增生性疾病之方法，該方法包括向所述患者投與聯合治療有效量的所述組合；關於這種組合用於治療增生性疾病之用途；關於包含這種組合及其商業包裝的藥物組成物。
Patent TW-202228620-A (TW)
Title: Individual absorbent article package and method for producing individual absorbent article package
Inventor: MORISAWA TAKASHI
IPC: A61F13/496
Filed: 2021-09-16
Abstract: Provided is an individual absorbent article package (100) comprising a tape-type or pants-type absorbent article (1), and a container material (101) that contains the absorbent article (1) in a folded state, characterized by having a temporary affixing part (T) that temporarily affixes the absorbent article (1) and the container material (101) to each other in a separable manner.
Patent TW-202214421-A (TW)
Title: Biaxially oriented polyester film and layered product
Inventor: TAMARI Noboru
IPC: B29C55/12
Filed: 2021-10-06
Abstract: To provide a biaxially oriented polyester film having good adhesion to metal layers and the like and excellent deep drawing moldability for isotopic shapes such as a square. A biaxially oriented polyester film comprising: a base layer containing at least polyester as a main component; and an adhesive layer, wherein the biaxially oriented polyester film satisfies requirements (1) to (3). (1) The difference ([Delta]Cp) in reversible heat capacity between the adhesive layer and the base layer at or near the respective glass transition temperatures thereof being 0.10-0.45. (2) The molecular orientation ratio as measured using a molecular orientation analyzer being greater than 1.2. (3) The 10%-elongation stress (F10) in the longitudinal direction and in the transverse direction being 90-160 MPa.
Patent TW-202227271-A (TW)
Title: Method for producing film
Inventor: ITONAGA KAREN
IPC: B29D7/01
Filed: 2021-10-15
Abstract: A method for producing a film F comprises a coating step for coating a coating liquid on a substrate S using a bar 11, and a drying step for drying the coating liquid that has been coated on the substrate S. The coating liquid comprises a resin component, fine particles, and a dispersion medium that disperses the resin component and fine particles. The surface free energy of the bar 11 is higher than the surface tension of the coating liquid.
Patent TW-202215134-A (TW)
Inventor: ZANG HONGMEI
IPC: H01L41/083
Filed: 2019-05-17
Abstract: Provided herein is an electro-optic display having a layer of electrophoretic material, a first conductive layer, and a piezoelectric material positioned between the layer of electrophoretic material and the first conductive layer, the piezoelectric material overlaps with a portion of the layer of electrophoretic material, and a portion of the first conductive layer overlaps with the rest of the electrophoretic material.
Patent TW-202233313-A (TW)
Inventor: JUNG YUN-HO
IPC: B08B1/02
Filed: 2021-11-03
Abstract: A glass cleaning apparatus including a brush head rotatable about an axis of rotation, the brush head having a drive portion slidably coupled to a drive shaft and a brush portion tiltably coupled to the drive portion.
Patent TW-202322474-A (TW)
Title: Electrical receptacle connector
Inventor: WANG SHU-FEN
IPC: H01R12/70
Filed: 2021-11-19
Abstract: An electrical receptacle connector includes an insulated housing, a plurality of receptacle terminals, and a metallic shell. A hollow portion is between a first main body and a second main body of the base portion of the insulated housing, and body portions of the receptacle terminals penetrate the first main body and the second main body and are exposed out of the hollow portion. The metallic shell covers the insulated housing and covers the hollow portion to form an enclosed space in the hollow portion. The metallic shell has a potting hole corresponding to the enclosed space. When a sealing body is poured into the potting hole, the sealing body is provided between the insulated housing and the receptacle terminals and is also provided between the metallic shell and the insulated housing. Hence, waterproof function of the connector can be achieved.
Patent TW-202228287-A (TW)
Title: Nitride semiconductor device and manufacturing method therefor
Inventor: OTAKE HIROTAKA
IPC: H01L29/778
Filed: 2021-11-26
Abstract: This nitride semiconductor device comprises: a source electrode which is in contact with a second nitride semiconductor layer via a first opening and has a part formed above a passivation film; and a drain electrode which is in contact with the second nitride semiconductor layer via a second opening and has a part formed above a passivation film so as to face the source electrode with a ridge part sandwiched therebetween, wherein a third nitride semiconductor layer has an extension part which is provided between a ridge part-side end of the first opening and a first opening end of the ridge part and/or between a ridge part-side end of the drain electrode and a second opening end of the ridge part and extends outward from the lower portion, at an intermediate position in the thickness direction, of at least one side surface of the ridge part.
Patent TW-202324170-A (TW)
Inventor: LIU CHIH-HSING
IPC: G06F30/17
Filed: 2021-12-08
Abstract: 本發明提供一種多材料條件設計之自適性撓性手指設計方法，其設計方法是以SIMP法為基礎之拓樸最佳化方法，並加入多重材料條件設計，以提升自適性。
Patent TW-202325620-A (TW)
Title: Waterproof paper bottle with sprayed film inside, and manufacturing method thereof with excellent structural strength to better withstand the radial/transverse pressure
Inventor: HSU YU-TING
IPC: B65D23/02
Filed: 2021-12-27
Abstract: A waterproof paper bottle with sprayed film inside comprises: a bottle cap, an upper bottle body, and a lower bottle body; the bottle cap and the upper bottle body are made of a mixture mainly composed of plant fibers and made by injection molding technology; The invention proposes a type of post-coating method, which uses vegetable glue to spray the inner wall of the lower bottle body to form a covering layer on the inner wall of the lower bottle body, which can provide the completely airtight and waterproof function inside the lower bottle body. Then the upper bottle body and the lower bottle body are glued together with biodegradable glue to form a waterproof paper bottle with a sprayed film on the inside. The waterproof paper bottle with sprayed film inside of the present invention has excellent structural strength, can better withstand the radial/transverse pressure, and can be used to contain the beverages or liquids with pressure, acidity, alkalinity or penetration.
Patent TW-202326345-A (TW)
Inventor: Su dong-xu
IPC: G06F1/16
Filed: 2021-12-27
Abstract: 提供一種遊戲控制器，此遊戲控制器可以讓使用者調整操作模組的垂直高度。操作模組設置於一第一滑塊以及一第二滑塊之間。第一滑塊具有一第一螺孔，第二滑塊具有一第二螺孔。一支架用以安裝第一滑塊、第二滑塊以及操作模組。支架包括一底部、一第一側部、一第二側部、一第一頂部以及一第二頂部，第一側部連接第一頂部以及底部，第二側部連接第二頂部以及底部，底部具有一第一貫孔以及一第二貫孔，第一頂部具有一第一樞接孔，第二頂部具有一第二樞接孔。一第一螺桿穿過第一貫孔以及第一螺孔後，架設於第一樞接孔上。一第二螺桿穿過第二貫孔以及第二螺孔後，架設於第二樞接孔上。藉由第一螺桿以及第二螺桿的轉動，第一滑塊、操作模組以及第二滑塊，可在第一頂部與底部之間，或是第二頂部與底部之間上下移動。
Patent TW-202325628-A (TW)
Title: Powder feeding device
Inventor: WANG KO-CHIN
IPC: B65D88/54
Filed: 2021-12-30
Abstract: A powder feeding device having a drive unit, a powder supply unit and a guide mechanism is provided. The drive unit has a drive shaft. The powder supply unit is a storage tank for storing the powder and provides a powder outlet connected to an inside of the storage tank. A feeding member is arranged in the storage tank and extends to the powder outlet. The guide mechanism has a guide channel, a guide outlet located on one end of the guide channel and a link-up outlet located on the other end of the guide channel. The guide mechanism slides on the powder supply unit to make the link-up outlet to be positioned opposite to the powder outlet to achieve precise feeding.
Patent TW-202313531-A (TW)
Title: Method for preparing synthesis gas and aromatic hydrocarbon
Inventor: HWANG SUNG-JUNE
IPC: C07C7/04
Filed: 2022-01-17
Abstract: Provided is a method for preparing synthesis gas and aromatic hydrocarbons, and more particularly, a method for preparing synthesis gas and aromatic hydrocarbons including: supplying a pyrolysis fuel oil (PFO) stream containing PFO and a pyrolysis gas oil (PGO) stream containing PGO to a distillation tower as a feed stream (S10), the PFO stream and the PGO stream being discharged in a naphtha cracking center (NCC) process; and supplying a lower discharge stream from the distillation tower to a combustion chamber for a gasification process and supplying an upper discharge stream from the distillation tower to a BTX preparation process (S20).
Patent TW-202310412-A (TW)
Title: Transistor, manufacturing method of semiconductor device, and manufacturing method of hbnc layer
Inventor: CHUU CHIH-PIAO
IPC: H01L29/12
Filed: 2022-01-21
Abstract: A transistor includes a channel layer, a gate stack, and source/drain regions. The channel layer includes a graphene layer and hexagonal boron nitride (hBN) flakes dispersed in the graphene layer. Orientations of the hBN flakes are substantially aligned. The gate stack is over the channel layer. The source/drain regions are aside the gate stack.
Patent TW-202335421-A (TW)
Title: Asymmetric half-bridge converter
Inventor: CHIU CHAO-CHANG
IPC: H02M7/162
Filed: 2022-02-16
Abstract: An asymmetric half-bridge converter is provided. The asymmetric half-bridge converter includes a switching circuit, a resonant tank, a current sensor, and a controller. The current sensor senses a waveform of a resonant current flowing through the resonant tank to generate a sensing result. The controller judges the sensing result. When the sensing result characterizes that an ending current value of a primary resonance waveform of the resonant current is greater than a default value, the controller performs a first switching operation on the switch circuit. When the sensing result characterizes that the ending current value of the primary resonance waveform is less than or equal to the default value, the controller performs a second switching operation on the switch circuit.
Patent TW-202334846-A (TW)
Inventor: LEE HSIN-CHIA
IPC: G06F21/60
Filed: 2022-02-16
Abstract: A system for actively detecting risk of database and an operating method thereof are provided. The system provides a big data platform which includes a data learning module and an artificial intelligence training module. The data learning module is used for processing database logs with different formats, creating logical data, learning data features and classifying the data. The artificial intelligence training module is used to perform machine learning for creating a detection model used to detect abnormal database events. The system also provides an engine that can be installed on database servers; the engine has an audit log collecting module and an anomaly detecting module. The audit log collecting module is used to collect database audit trail, and the anomaly detecting module is used to deploy the detection model so as to detect abnormal database events in real time and provide quick and automated incident responses.
Patent TW-202239610-A (TW)
Title: Composite coating, preparation method, and device
Inventor: ZONG JIAN
IPC: B32B27/16
Filed: 2022-03-01
Abstract: According to the specific embodiments of the present invention, a composite coating is provided, wherein a coating formed by plasma of fluorinated acrylate is used as the outer layer and a coating formed by plasma of an unsaturated ester monomer with an aromatic ring and an ester coupling agent is used as the inner layer. The composite coating formed together with a substrate has both an excellent protective performance and a good transparency.
Patent TW-202242644-A (TW)
Inventor: LEE SANG-WOON
IPC: G06F115/12
Filed: 2022-03-02
Abstract: 提供一種對入射粒子引起的對晶體的損害進行建模的系統及方法以及一種製造積體電路的方法。所述方法包括：獲得粒子資訊及晶體資訊；基於粒子資訊及晶體資訊來估計入射粒子的能量損失；基於能量損失來估計空位的體積；基於晶體資訊及空位的體積來估計空位反應；以及基於空位反應來產生輸出資料，所述輸出資料包括所述損害的量化資料。
Patent TW-202239747-A (TW)
Inventor: TAKAYAMA TAKUMI
IPC: C07C39/21
Filed: 2022-03-02
Abstract: The present invention provides a preparing method of a polymer to have lower toxicity, be friendly to environment, have better controllability for polymerization, obtain higher molecular weight and have lower cost. The preparing method includes: a polymerization process which includes that when an organic compound (A) having a formula described as formula (I) and a radical initiator (B) exist, a polymer can be obtained by controlling radical polymerization of a monomer (Y), wherein a molar ratio (B/A) of (B) to (A) ranges in 0.5 to 25.
         In formula (I), R
         1 is a hydrogen atom, an alkyl group, an aryl group or a hydroxyl group, in which the alkyl group can be included with a substituent or a substituent of an alkyl group, and the aryl group can be included with a substituent or a substituent of an aryl group.
Patent TW-202328811-A (TW)
Title: 疊置誤差的校正方法
Inventor: MA SHIH-YUAN
IPC: G03F1/70
Filed: 2022-03-28
Abstract: 本揭露提供一種疊置誤差的校正方法。該校正方法包括：根據一晶圓的一下層圖案和一上層圖案得到一疊置誤差，其中該下層圖案由該晶圓經過的一第一製造設備獲得，而該上層圖案由一曝光設備獲得；根據該疊置誤差和在該第一製造設備之後、該曝光設備之前對該晶圓執行的一製程，產生一校正疊置誤差；以及根據該校正疊置誤差調整該曝光設備。
Patent TW-202303479-A (TW)
Inventor: CEDARLEAF-PAVY JORDAN
IPC: B25J13/08
Filed: 2022-03-29
Abstract: 本發明揭示一種機器人系統。該系統包含一通信介面，及一或多個處理器，該一或多個處理器耦合至該通信介面且經組態以：經由該通信介面接收與一工作區內之複數個物品相關聯之資料；至少部分基於與該工作區內之該複數個物品相關聯之該資料來判定控制一滑槽上之一物流；及回應於判定控制該物流，至少藉由控制一流阻斷器以引起該物流改變之一方式移動來實施控制該物流，其中當該流阻斷器未經部署以阻礙該物流時，該流阻斷器與該滑槽齊平。
Patent TW-202305314-A (TW)
Title: Apparatuses for measuring gap between substrate support and gas distribution device
Inventor: VINTILA ADRIANA
IPC: G01B11/14
Filed: 2022-04-25
Abstract: Some embodiments provide apparatuses capable of enabling the measurement of various characteristics of a showerhead-substrate gap in a processing chamber, including at high temperatures and at low-light conditions, using an imaging system external to the processing chamber.
Patent TW-202305162-A (TW)
Title: Methods of forming molybdenum contacts
Inventor: GANGULI SESHADRI
IPC: C23C16/06
Filed: 2022-05-06
Abstract: Methods for forming a semiconductor structure are described. The method includes cleaning a substrate to form a substrate surface substantially free of oxide, exposing the substrate surface to a first molybdenum precursor, and exposing the substrate surface to a reactant to selectively deposit a first molybdenum film on the substrate surface. The method may be performed in a processing chamber without breaking vacuum. The method may also include forming one or more of a cap layer and a liner and annealing the substrate. The method may also include depositing a second molybdenum film on the substrate surface.