baber/WOPTO huggingface dataset:
Patent KR-20170136622-A (KR)
Title: 센서를 사용하지 않고 압력 검출 정확도를 증가시키는 방법
Inventor: BEHRENDT GERALD
IPC: F04D15/00
Filed: 2016-04-25
Abstract: 본 발명은, 작동 가능한 전기 모터 및 상기 전기 모터에 의해 구동될 수 있는 유체 공급 펌프를 포함하는, 자동차의 유체 전달 시스템 내의 압력값을 결정하는 방법으로서, - 상기 전기 모터의 회전 속력을 결정하는 단계; - 상기 전기 모터의 작동 전류를 결정하는 단계; - 상기 전기 모터의 상기 회전 속력 및 상기 작동 전류의 함수로서 압력값을 획득하는 단계; - 상기 획득된 압력값을 제어 유닛에서 적어도 하나의 외부 상태 변수로 처리하는 단계; 및 - 상기 획득된 압력값을 보정하는 단계를 포함하는, 상기 유체 전달 시스템 내의 압력값을 결정하는 방법에 관한 것이다.
Patent KR-20170130615-A (KR)
Title: (r)- 및 (s)-1-(3-(3-n,n-다이메틸아미노카보닐)페녹시-4-나이트로페닐)-1-에틸-n,n'-비스(에틸렌)포스포르아미데이트, 조성물 및 이의 사용 방법 및 제조
Inventor: DUAN JIAN XIN
IPC: C07F9/22
Filed: 2016-11-15
Abstract: 화학식 
   
(II); 및  
   
(III) 
의 광학적으로 활성인 화합물 및 이의 약학적으로 조성물이 본 발명에 제공된다. 또한 이런 화합물을 제조하고 라세미 혼합물을 이의 거울상 이성질체의 하나로 분할 또는 농축하여 (R)- 및 (S)-1-(3-(3-N,N-다이메틸아미노카보닐)페녹시-4-나이트로페닐)-1-에틸-N,N'-비스(에틸렌)포스포르아미데이트를 제공하는 방법 및 이런 화합물을 투여하는 단계를 포함하는 암 치료 방법이 본 발명에 제공된다.
Patent KR-20180043201-A (KR)
Title: 조성물 및 이의 용도
Inventor: DAVIDSON VICTOR PATRICK
IPC: A61K36/886
Filed: 2015-07-14
Abstract: 본 발명은  피누스       피너스터  줄기 껍질 추출물, 파파인 및  알로에 베라  추출물을 포함하는 조성물, 및 이의 제조 방법에 관한 것이다. 또한, 유효량의 본 발명에 따른 조성물을 이를 필요로 하는 대상체에게 투여하는 것을 포함하는, 상승된 혈당, 전-당뇨병, 2형 당뇨병, 자가면역 질환의 치료 또는 예방, 염증의 감소 또는 강하, 증가된 염증 수준을 특징으로 하는 질환의 치료 또는 예방, 및 혈중 콜레스테롤의 저하를 포함하는 다양한 상태를 치료 또는 예방하는 방법이 제공된다. 다양한 상태를 치료 또는 예방하기 위한 약제의 제조를 위한 본 발명의 조성물의 용도가 또한 기재된다.
Patent KR-20180043756-A (KR)
Title: 구동 장치에서 롤 스탠드 내의 압연롤로 토크 전달을 위한 토크 전달 장치
Inventor: MERZ JUERGEN
IPC: B21B35/14
Filed: 2016-06-07
Abstract: 본 발명은 구동 장치(200)에서 롤 스탠드 내의 압연롤로 토크를 전달하기 위한 토크 전달 장치에 관한 것이다.  상기 유형의 공지된 토크 전달 장치들은, 구동 측 피벗 베어링(120)을 통해 구동 장치(200)와 회전 연결되고 압연롤 측 피벗 베어링(130)을 통해서는 압연롤의 넥(300)과 회전 연결되는 스핀들(110)을 포함한다.  종래 기술에서, 피벗 베어링들의 윤활은 그리스에 의해, 또는 액체 윤활제에 의해 수행되며, 이런 경우 그리스 또는 액체 윤활제는 펌프 장치(140)에 의해 외부로부터 베어링들로 연속해서 공급되어야만 한다.  토크 전달 장치가 윤활제의 연속적인 외부 공급으로부터 독립적으로 작동하도록 하기 위해, 본 발명의 제안에 따라서, 두 피벗 베어링 내 윤활제 챔버들은 스핀들의 영역에서 윤활제를 위한 공급 채널 및 회수 채널을 통해 유체 안내 방식으로 서로 연결됨으로써 윤활제를 위한 폐쇄된 회로가 형성되며, 그리고 적어도 하나의 펌프 장치(140)는, 회로 내에서 윤활제의 순환을 유지하기 위해, 회로 내에 통합된다.
Patent KR-20180029972-A (KR)
Title: 작업 대상물을 연마하는 방법 및 연삭기
Inventor: MARTY JEAN CHARLES
IPC: B24B5/16
Filed: 2015-07-13
Abstract: 본 발명은 연삭기에 의해 작업 대상물(1)을 연마하는 방법에 관한 것으로, 이는 제1 연마휠을 향해 제1 축(4)을 따라 작업 대상물을 회전 및 이동시키는 단계; 연마 휠(6)을 제2 축(61) 둘레로 회전시키고 제3 축(62)을 따라 이동시켜, 연마 휠이 작업 대상물의 주변부(103)를 연마하는 단계; 를 포함하며, 연마 휠은 제3 축을 따르는 위치에 위치되고, 이동 위치는 제1 축을 따라 이동하고 제1 축 둘레로 회전하는 작업 대상물의 위치의 함수로 결정된다. 본 발명은 또한 상기 방법을 수행하기 위한 연삭기에 관한 발명이다.
Patent KR-20180015177-A (KR)
Title: 트러스트 롤러 베어링 및 베어링 장치
Inventor: SHIMPO YUKI
IPC: F16C19/30
Filed: 2016-06-03
Abstract: 트러스트 롤러 베어링은, 방사상으로 배치되는 복수의 롤러와, 전체를 원륜상으로 형성되어 복수의 롤러를 자유롭게 전동할 수 있도록 유지하는 포켓을 갖는 유지기와, 복수의 롤러가 전동하는 레이스면을 구비한 적어도 1 개의 궤도륜을 구비한다.     궤도륜은, 철제 궤도륜과, 절연성을 갖는 수지제 궤도륜을 갖고, 철제 궤도륜 및 수지제 궤도륜은, 서로 걸어 맞춤하여 일체로 조합된다.     또한, 궤도륜은, 절연성을 갖는 수지제 궤도륜과, 수지제 궤도륜의 표리 양면에 배치되는 1 쌍의 철제 궤도륜을 구비하고, 수지제 궤도륜 및 1 쌍의 철제 궤도륜은, 서로 일체로 걸어 맞춤하는 구성으로 해도 된다.
Patent KR-20190046589-A (KR)
Title: 페이스 시일
Inventor: AGRINSKIY ANDREI NIKOLAEVICH
IPC: F04D29/16
Filed: 2016-06-20
Abstract: 본 장비는 매체분리 또는 차압을 위한 펌프장비 로터기에 접목되는 페이스 시일로 분류된다.  
본 장비는 원자력 발전소 메인 순환 펌프 등에 사용된다. 장비는 내부 구조에 신뢰성 향상 및 부품의 기술력 향상, 시일 조립을 단순화시키는 것을 목적으로 한다. 고정자와 구동부로 이루어져 있고, 각 단계는 로터기의 축에 위치하며, 고정자의 스프링 축에 위치하고 있다. 압축된 고정자는 압축링을 통해 본체에 고정되어 있고, 작동 단계에서 발생하는 고압 및 저압으로 인해 발생한 간극은 감압밸브 간극을 통해 고정자에 연결되어 있다. 본체는 외부 실린더로 이루어져 있고, 외부 실린더는 각각 스테이지와 트러스트 링으로 구성되어 있다. 트러스트 링은 스프링과 고정자 사이에 간격을 두는 역할을 한다. 고정자와 스테이지는 고정자가 구동 실린더가 축 방향으로 작동하기 위한 역할을 한다. 실린더의 지름이 작은 부분은 고압을 위해 압축부 전면에 위치하며, 반대 부분인 지름이 큰 부분은 저압 부분 혹은 압축부 후면에 위치한다. 고정자의 지름이 작은 부분에서 큰 부분으로 넘어가는 부분은 더 작은 부분에서 이루어진다. 고정자의 스테이지는 실린더 직경 변경에 대한 과정은 고정자의 오리피스를 통해 진행되게 하는 기술적인 문제를 해결하기 위해서는 다음과 같은 사항이 요구된다. 
고정자의 플런저 외부 직경은    , 여기서 D2- 큰 실린더의 플런저 직경, D1 - 작은 실린더의 플런저 직경의 관계를 적용해야 한다. 해당 식을 통해 고정자에 대한 추가 변경 사항 없이 플런저에 작동하는 유압을 이용하여 시일이 닫힌 상태를 유지할 수 있다.
Patent KR-20190083039-A (KR)
Inventor: YU SEUNGBO
IPC: H02M1/00
Filed: 2018-01-03
Abstract: The present invention relates to a motor driving apparatus and a home appliance having the same. According to an embodiment of the present invention, the motor driving apparatus comprises: an inverter having a plurality of upper arm switching devices and lower arm switching elements, converting, by a switching operation, direct current (DC) power of a DC terminal capacitor connected to a DC terminal into alternating current (AC) power, and outputting the converted AC power to the motor; a DC terminal resistor device disposed between the DC terminal capacitor and the inverter; a current detecting unit detecting a current flowing through the DC terminal resistor device; and a control unit controlling the inverter based on the detected current. The current detecting unit performs low-pass filtering on the detected current. The control unit estimates a part of a three-phase current flowing through the motor based on the filtered detected current. Accordingly, a phase current flowing through the motor can be accurately calculated by using the DC-link resistor element.
Patent KR-20190022269-A (KR)
Inventor: LINDBERG PER LENNART
IPC: A61K31/513
Filed: 2018-01-09
Abstract: The present invention relates to treatment of human solid tumors, such as cancer, particularly colorectal cancer (CRC), which comprises an administration of multiple boluses of diastereomerically pure folate adjuvant, [6R]-5,10-methylene tetrahydrofolate ([6R]-MTHF), in 5-fluorouracil (5-FU) based chemotherapy.
Patent KR-20190085238-A (KR)
Title: Liquid bands excellent in moisture resistance and stretchability and method for manufacturing the same
Inventor: CHOI CHEOL KYUN
IPC: A61L26/00
Filed: 2018-01-10
Abstract: The present invention relates to a liquid band excellent in moisturizing ability and elasticity, with a viscosity of 2,000 to 5,000 cps at 25°C, including a water-soluble synthetic or semi-synthetic polymer in water-dispersed polyurethane, as an active ingredient, to form a film when applied, wherein the water-dispersed polyurethane is neutralized after 10-50 parts by weight of an isocyanate compound is added to 100 parts by weight of a mixed solution, including a compound having a potential ionic group, a polyol and a polymer matrix-forming material, the product of which is water-dispersed in 120-300 parts by weight of deionized water (DIW) to obtain a polyurethane prepolymer water dispersion having NCO end groups, and then induced to react with an amine chain extender in aqueous solution to extend the polyurethane chain.
Patent KR-20190088616-A (KR)
Title: Pharmacy operating system based on pharmacy exclusive service
Inventor: YANG MYUNG HOON
IPC: A61B5/0408
Filed: 2018-01-19
Abstract: The present invention relates to a pharmacy operating system which is to build an online pharmacy operating system using a network, uses a display board installed in a front window of a pharmacy, and provides a specialized pharmacy exclusive service that can be performed only in the pharmacy. Therefore, the pharmacy operating system let a customer visiting the pharmacy to receive systematic health care based on a specialized professional medical service (a pharmacy exclusive service), let pharmacy vendors to increase sales while advertising their products through billboards of local pharmacies, and let the pharmacy to attract a large number of customers through the pharmacy operating system and receive medicine at a discounted cost from pharmacy vendors, thereby, on the whole, creating resurgence in sales of pharmacy products.
Patent KR-20180115611-A (KR)
Inventor: CHOI GI EUN
IPC: A45C11/00
Filed: 2018-01-19
Abstract: According to the present disclosure, the present invention solves the conventional problems by enlarging the size (capacity) of power and the size of a screen. A curvature is given to a screen and a display according to a curved surface of a human body to be worn. In order to solve the above problem, a battery is inserted into a battery mounting case in which unit power is electrically formed outside a device by drawing out the battery from the inside of a display, and a plurality of battery mounting cases are mechanically and electrically connected to each other in parallel to be connected to a connection link formed on the outside of the display to be worn on a wearing part of a human body. An expansion screen can be automatically expanded by connecting the expansion screen to a saw-toothed wheel-type connection link and an L-shaped iron clip on a basic screen of the display. A display device circuit unit formed is connected in parallel in a horizontal or vertical manner, and thus an execution speed and processing capability are doubled. The memory capacity is greatly increased so that the screen and the camera are separated from the display. A wearable smart phone, which may be used as a heterogeneous device such as a photographing device, an unmanned camera, a black box, or the like, using a camera or the like, which switches a high magnification camera lens to a display side, has a parallel connection battery system.
Patent KR-20200067232-A (KR)
Inventor: ONO KOKI
IPC: A01C11/02
Filed: 2018-01-24
Abstract: The present invention provides a working vehicle capable of preventing a datum line from being applied to other farm lands, thereby improving the workability and achieving an effort-saving performance. The working vehicle includes: a steering member; a position information acquisition device; an automatic straight moving device configured to enable a driving vehicle body to move straight; a position coordinate acquisition member configured to acquire the position coordinate for producing the datum line for straight movement; and a control device. In the working vehicle, a detection member configured to detect the moving direction of the driving vehicle body is installed and a work detection member configured to detect the work status of a working device is also installed. The control device determines a deviation of the driving vehicle body deviating from the straight moving direction according to an angle formed by the datum line and the moving direction of the driving vehicle body, and detects the work status of the working device. When the deviation of the driving vehicle body which is moving within a predetermined range deviating from the straight moving direction exceeds a predetermined value while the work status is continuously detected, a status of the driving vehicle body is set to be unable to move straight according to the datum line. The status of the driving vehicle body unable to move straight according to the datum line lasts until the next position coordinate is acquired.
Patent KR-20190093820-A (KR)
Title: Circular Blade Cutting Apparatus
Inventor: CHA DONG SUNG
IPC: B26D3/00
Filed: 2018-02-01
Abstract: A circular blade cutting apparatus is disclosed. The circular blade cutting apparatus comprises: a mounting unit transferring an extruded material to be cut to a cutting position; a pair of body units installed to move by facing each other to cut both ends of the extruded material transferred to the cutting position by the mounting unit; an extruded material fixing unit fixed in an exposed state by inserting both ends of the extruded material transferred to the cutting position by movement of the body units; a blade cutting both ends of the extruded material exposed and fixed by the extruded material fixing unit; and a blade operating unit operating the blade. Various embodiments can be implemented.
Patent KR-20190095673-A (KR)
Title: Veneer panel and method of manufacturing thereof
Inventor: EUNG MOON SHIM
IPC: B32B3/30
Filed: 2018-02-07
Abstract: The present invention relates to a sliced veneer panel and a manufacturing method thereof. The sliced veneer panel of the present invention comprises: a kraft paper impregnated with a thermosetting resin; a sliced veneer laminated on an upper surface of the kraft paper, and having protrusions on the upper surface; and a cushion layer laminated on the upper surface of the sliced veneer, and covering the upper surface of the sliced veneer along the protrusions so that the protrusions are exposed to the outside.
Patent KR-20190096230-A (KR)
Title: A method of synthesis of conjugated linoleic acid using fraction of linoleic acid from by-product of pork
Inventor: SUN JIN HUR
IPC: C07C51/42
Filed: 2018-02-08
Abstract: The present invention relates to a method for synthesizing conjugated linoleic acid (CLA) using a linoleic acid fraction derived from pork by-products. A purpose of the present invention is to utilize the pork by-products in a situation where a large amount of pork by-products are surplus and discarded to synthesize CLA, a high value-added useful substance. The method for synthesizing CLA according to the present invention is simpler than a method for synthesizing CLA using enzymes, and has a great advantage in terms of time, mass production, and stability problems. In addition, the method is much more economical and can increase a yield of CLA. Furthermore, the method uses pork by-products, which are discarded by-products, so that it is possible to provide the high value-added CLA that is effective in reducing body fat, increasing anticancer action and immune function, and thus treating and preventing atherosclerosis, diabetes, and hypertension, thereby being economically advantageous.
Patent KR-20190099367-A (KR)
Title: A generator using rotation of brush holder and slip ring
Inventor: SUN SANG KYU
IPC: H02K13/00
Filed: 2018-02-17
Abstract: The present invention relates to a power generator which comprises: a power generation housing (220) including an armature (250) and a magnetic field system (240) independently installed in an inner space; and a power distribution housing (230) including a first commutator (210a) and a second commutator (210b) or the first commutator (210a) and a brush-type slip ring (205a) or a hollow type slip ring (205b), provided separately from the armature (250) and the magnetic field system (240). When a field coil (242) receives a DC current (221), a brush holder (212) is rotated by a DC motor shaft (202), and an N pole (+) and an S pole (-) are repetitively alternating in an armature core (251) so that induced electromotive force is sequentially generated in an armature coil (252). Electromotive force is derived through an output line (260) by using, as an intermediate medium, the first commutator (210a) and the second commutator (210b) or the first commutator (210a) and the brush-type slip ring (205a) or the hollow-type slip ring (205a), connected to the armature coil (252), thereby saving external power, and thus, the present invention is very useful.
Patent KR-20190100716-A (KR)
Inventor: HYUN SEUNG YEOL
IPC: G06F21/32
Filed: 2018-02-21
Abstract: Disclosed are an electronic apparatus and a control method thereof. According to the present invention, the control method of the electronic apparatus comprises the steps of: photographing a face of a user; analyzing the photographed face image to obtain a face angle; obtaining a rotation angle of the electronic apparatus; correcting the photographed face image based on a difference value between a face angle and the rotation angle; and authenticating the user based on the corrected face image. Accordingly, the electronic apparatus may perform iris recognition of the user through the photographed face image of the user even when the face of the user is photographed in various forms.
Patent KR-20190101098-A (KR)
Inventor: LIM MAN SU
IPC: F16K27/02
Filed: 2018-02-22
Abstract: The present invention relates to a pilot operation type safety valve system capable of urgently discharging the internal pressure of a dome chamber in an emergency that the pressure is rapidly increased or when a user wants to decrease pressure. According to the present invention, the pilot operation type safety valve system comprises: a pilot valve detecting the pressure in a main valve to discharge excessive pressure; an emergency discharge device urgently discharging the internal pressure of a dome chamber; a manifold providing an installation space for the emergency discharge device; a port unit disposed in the manifold; a pressure chamber providing pressure to a piston; and a packing selectively realizing communication between first and second ports or between the second and third ports in accordance with a moving position of a piston rod.
Patent KR-20190105416-A (KR)
Title: Rack bar supporting device of steering apparatus for vehicle
Inventor: LEE JONG KIL
IPC: F16H55/28
Filed: 2018-03-05
Abstract: The present invention provides a rack bar supporting device of a steering apparatus for a vehicle. According to an embodiment of the present invention, the rack bar supporting device of a steering apparatus for a vehicle comprises: a support yoke; a ring coupled to a side surface of the support yoke; and leaf springs supporting the ring. Therefore, the rack bar supporting device of a steering apparatus for a vehicle reduces rattle noise, changes only an elastic modulus of the leaf springs to prevent rattle noise from being generated for each vehicle model, and optimizes friction performance to improve a steering feeling.
Patent KR-20180029997-A (KR)
Inventor: KIM KYEONG SU
IPC: F04D29/22
Filed: 2018-03-09
Abstract: The present invention relates to a shrouded impeller. According to the present invention, the shrouded impeller comprises: a first main frame which comprises: a first hub; and a plurality of first wings placed on the outer circumferential surface of the first hub; a second main frame which comprises: a second hub; and a plurality of second wings placed on the outer circumferential surface of the second hub; a first shroud placed to wrap around the plurality of first wings; and a second shroud placed to wrap around the plurality of second wings. The second shroud is formed as one body with the second wings. The first shroud is detachably combined with an end unit of the plurality of first wings and combined with the first main frame to prevent rotation around a central shaft. The first main frame and second main frame are fixated within a pre-determined distance from each other along the central shaft. The first main frame and second main frame are detachably combined. The first shroud is fixated by being constrained by the second shroud and the first wings. According to the present invention, the present invention is able to provide the prefabricated shrouded impeller, which is able to respectively form the first main frame, second main frame, and first shroud by mechanical processing without using welding or brazing, thereby reducing manufacturing costs and making it more convenient to assemble and maintain.
Patent KR-20190056272-A (KR)
Title: Apparatus for measuring steering angle of vehicle
Inventor: YOON SANG WON
IPC: B62D15/02
Filed: 2018-03-13
Abstract: Disclosed is an apparatus for measuring a steering angle of a vehicle to measure a steering angle of a vehicle by being arranged on the same axis as a shaft. The apparatus for measuring a steering angle comprises: a magnet placed in one end of the shaft; a plurality of hole sensors arranged to be spaced at a predetermined distance from the magnet; and a data processing unit calculating a steering angle by using a sensing value of the hole sensors.
Patent KR-20180111534-A (KR)
Title: Semiconductor device and method of manufacturing the same
Inventor: HATAKENAKA MASAHIRO
IPC: H01L29/732
Filed: 2018-03-16
Abstract: The present invention provides a semiconductor device capable of reducing a chip area by forming a trench of a cell outer peripheral region of a part for drawing out a gate electrode and a trench of a cell region composing a vertical transistor as the same width, and a manufacturing method thereof. A gate contact hole is formed in a self-aligning manner right above the trench of the cell outer peripheral region to connect a gate wiring electrode.
Patent KR-20190110683-A (KR)
Title: Composition for preventing, treating or improving obesity comprising Eupatilin
Inventor: NAM JU OCK
IPC: A61K31/352
Filed: 2018-03-21
Abstract: The present invention relates to a composition for preventing, treating, or alleviating obesity, comprising eupatilin, wherein the eupatilin has an effect of inhibiting the differentiation of adipocytes and reducing lipid accumulation in cells. In addition, by inhibiting the expression of peroxysome proliferative activator receptor gamma (PPARγ) and CCAAT-enhancer binding protein alpha (C/EBPα) and adiponectin, which are transcription factors involved in adipocyte formation and differentiation to inhibit fat production, it is possible to exhibit an excellent antiobesity effect. Therefore, eupatilin of the present invention can be usefully used as a pharmacetucial composition and health functional food for preventing, treating or alleviating obesity.
Patent KR-20180108489-A (KR)
Inventor: WICH HARALD
IPC: H01M6/38
Filed: 2018-03-22
Abstract: The present invention provides a device which is improved compared to a conventional device. A battery activation device for an electronic ignition mechanism comprises an ampoule (3) filled with an electrolyte (2) and a device (4) for breaking the ampoule (3). The breaking device (4) includes a catch spring element (5). The catch spring element (5) is changed from a first shape (I) into a second shape (IV) when a force due to acceleration is applied.
Patent KR-20190111285-A (KR)
Inventor: JONG CHUL KIM
IPC: A23L33/10
Filed: 2018-03-22
Abstract: The present invention relates to a composition for improving fertility, which comprises: a rice bran extract; inositol; coenzyme Q-10; selenium; and vitamin C. The composition for improving fertility according to the present invention uses nature-derived components to improve irregular menstrual cycles and ovulation, thereby improving menstrual irregularities and irregular ovulation cycles.
Patent KR-20190115622-A (KR)
Title: Cost-effectiveness and optimized test design method and apparatus of mass production weapon system Environmental stress screening
Inventor: KIM JANG EUN
IPC: G06F17/50
Filed: 2018-04-03
Abstract: The present invention relates to a cost-effectiveness and optimized design method and apparatus of a mass production weapon system environmental stress screening test. According to one aspect of the invention, provided is a cost-effectiveness and optimized design method of a mass production weapon system environmental stress screening test which includes a step of calculating an allowable temperature range to minimize the total required time (t_Total) of the environmental stress screening test based on a target residual defect density (D_Remain(Goal)), the temperature maintenance interval (t_constant) of an environmental stress screening test profile, a temperature change rate (ΔR), and a vibration magnitude (ΔG).
Patent KR-20190118087-A (KR)
Inventor: CHANG SU CHANG
IPC: H01L21/67
Filed: 2018-04-09
Abstract: The present invention relates to a deposition system. The purpose thereof is to solve an increase in tact time caused by a delay in a de-chuck chamber in general while making a large difference in tact time between the de-chuck chamber and a pass chamber, to lower the damage rate of a substrate during a de-chuck process, and to take a defective substrate out without process suspension. To achieve the purpose, according to the present invention, testing equipment which has been placed in a de-chuck chamber is placed in a space between a pass chamber and the de-chuck chamber. A de-chuck pin is installed in the pass chamber to preliminarily lift a substrate with the de-chuck pin to enable the substrate to be easily separated from a chuck, so a main de-chuck operation in the de-chuck chamber can be quickly performed. A substrate determined as a defective one is moved to a chuck collection line while being attached on the chuck without a de-chuck process in the de-chuck chamber, and then, the substrate is taken out of the chuck collection line, so the vacuum of the de-chuck chamber does not need to be broken and the entire process can be continuously conducted without a stoppage.