baber/WOPTO huggingface dataset:
Patent KR-20000009440-A (KR)
Title: Liquid crystal display device
Inventor: YU BONG HYUN
IPC: G02F1/136
Filed: 1998-07-24
Abstract: PURPOSE: The existing panel for liquid-crystal display which forms the repair wiring between the insulation screen around the board active area to repair the short circuit between the gate line (300) and the data line (500) has a long repair wiring route, which delays the signal. Because of the black matrix surrounding the upper board, the board should be detached before repair. CONSTITUTION: The repair wiring (110) is around the lower board and the second hole (401, 402) is on the black matrix of the upper board, the upper part of the repair area (B) with the repair wiring (110) to ease the laser work after the sealing of boards. The double repair wiring (110) with low resistance metal can prevent the signal delay.
Patent KR-20000009446-A (KR)
Title: Method for etching copper thin film
Inventor: LEE SI U
IPC: H01L21/306
Filed: 1998-07-24
Abstract: PURPOSE: The method is to modulate efficiently etching rate by oxidizing and etching more simply and economically a copper thin film used when metal interconnecting of semiconductor device is made. CONSTITUTION: This etching method comprises a step of oxidizing copper thin film for etching and a step of reacting the etched copper with etching reactive gas to remove the oxidized metal. To this end, it uses oxygen radical having strong oxidizing force to oxidize the copper. In the etching method, the copper thin film is oxidized by use of O3, O2 or ozone plasma. Then, beta-diketone family etching reactive gas is introduced to and reacted with the oxidized copper to make the copper thin film oxide and simultaneously react with etching reactive gas. Thus, etching rate can be effectively adjusted under the temperature lower than in the prior art by using small amount of oxidizing agent and etching reactive gas.
Patent KR-20000009982-A (KR)
Title: Method for crystallization of alpha-l-aspartyll-l-phenylalanine methylester by step-by-step reduction of pressure
Inventor: SHIN WAN YONG
IPC: C07K5/075
Filed: 1998-07-29
Abstract: PURPOSE: A method for crystallizing alpha-L-aspartyl-L-phenylalanine methylester (alpha-aspartame; APM) is provided, which prevents the crystal from growing on the heat transfer surface, and is improved in the efficiency of separation and the yield. CONSTITUTION: APM is crystallized from its saturated aqueous solution by reducing the pressure step-by-step to promote the crystal growth from the surface of solution. A crystal nucleus formed on the surface grows into the entire solution, and the crystal growth is promoted by the heat transfer due to convection and the temperature gradient. The pressure inside of a crystal tube is step-by-step reduced from 350 to 100 mbar. The temperature of the solution is maintained at 30-80°C. The temperature gradient (the difference of an upper layer and a lower layer of the solution) is controlled to be 1-10°C.
Patent KR-20000010395-A (KR)
Title: Molten pigiron production furnace equipped with sticking material remover
Inventor: LEE JOON HYOK
IPC: C21B13/02
Filed: 1998-07-31
Abstract: PURPOSE: A device is provided to remove sticking materials off the hot gas out put tube and the cooling gas input tube against blocking of tubes without interruption of furnace operation. CONSTITUTION: The sticking material remover(20) is constructed in a size to be movable and rotatable in the cooling gas input tube(4) for removing sticking materials off the inner wall of the tubes. The remover(2) includes a removing member(21) rotating to break sticking objects off the tube wall, a motor(22) connecting to one end of a rotary shaft(23) whose other end mounting the removing member(21), and a drive power transmission shaft(24) having a cylinder(241) for receiving the shaft(23) to reciprocate it back and forth for operation.
Patent KR-20000015024-A (KR)
Title: Media processor
Inventor: KWON GI-YOUNG
IPC: G06F13/00
Filed: 1998-08-26
Abstract: PURPOSE: A media processor is provided to improve a control efficiency by outputting a plurality of output signals receiving a plurality of input data. CONSTITUTION: The media processor processes various inputted data, stores the data in a storage part, and outputs the data to various peripherals according to a necessity in order to control the peripheral devices. The storage part comprises a multi-port first in first out memory(30) which assigns input and output ports to different peripheral devices at a specific operation cycle. The data stored in the first in first out memory(30) is processed by a data processing part(60), and the data thus processed is decoded by a decoder(DCDR).
Patent KR-20000015148-A (KR)
Title: Thin film transistor and fabrication method thereof
Inventor: LEE JONG HOON
IPC: H01L21/205
Filed: 1998-08-27
Abstract: PURPOSE: The method decreases the impurity and the mismatch of an interface trapping charge in the interface between a gate silicon oxide film and a polysilicon of a thin film transistor. CONSTITUTION: The method includes the steps of: depositing an amorphous silicon film(50) and a silicon oxide film(58, 62) continuously in sequence on a glass substrate(1); crystallizing the amorphous silicon film into a polysilicon film(53), and implanting and heating a semiconductor material between the amorphous silicon film and the silicon oxide film, to form an amorphous oxide film(52) including a semiconductor material between the amorphous silicon film and the silicon oxide film; and etching the silicon oxide film on the amorphous oxide film. The density of trap energy states is reduced by preventing the surface contamination by depositing continuously the silicon oxide film during the amorphous silicon film deposition.
Patent KR-20000015464-A (KR)
Title: Method for forming a self-aligned contact of a semiconductor device
Inventor: CHO CHANG-HYUN
IPC: H01L21/60
Filed: 1998-08-29
Abstract: PURPOSE: A method for forming a self-aligned contact of a semiconductor device is provided, which prevents an etching stopping phenomenon according to the improvement of an aspect ratio of a contact hole. CONSTITUTION: The method for forming a self-aligned contact of a semiconductor device comprises the steps of: etching a conductive layer, a first poly layer insulating film, and a second poly layer insulating film to form a gate electrode; forming a spacer (116) on both sides wall of the gate electrode; forming a third insulating film on a front surface of a semiconductor substrate (100a); forming a layer insulating film (120) on the front surface of a semiconductor substrate (100a); etching the layer insulating film (120) to form an opening; etching the third insulating film exposed in the opening; forming a conductive film on the layer insulating film (120); and performing a planarization of the conductive film to form a pad (122). Thereby, it is possible to greatly secure a misalign margin with a buried contact.
Patent KR-20000037908-A (KR)
Title: Spot killer circuit
Inventor: KIM JIN GAP
IPC: H04N3/20
Filed: 1998-12-03
Abstract: PURPOSE: A spot killer circuit is provided to control a blanking input of an image amplifier and remove a white spot generated in the center of the screen of the CRT when a power supply is turned on/off. CONSTITUTION: A spot killer circuit includes a spot killer removing part(10) and an image amplifier(20). The spot killer removing part charges voltage when a set is turned on and discharges the charged voltage into an inputting terminal of the image amplifier and removes a white spot generating when power supply is turned on/off. The image amplifier amplifies the voltage outputted from spot killer removing part without a distortion and outputs R, G, and B composite signals to a CRT.
Patent KR-20000040412-A (KR)
Title: Electrical power device in which a charging section are integrally formed with an inverter section
Inventor: LEE SEONG HEE
IPC: H02J9/00
Filed: 1998-12-18
Abstract: PURPOSE: An electrical power device in which a charging section are integrally formed with an inverter section is provided to reduce the manufacturing cost of the product by reducing the parts of a circuit. CONSTITUTION: A DC filter capacitor(C1) is connected in parallel to a charging battery(BT) to form a battery(3). A charging and inverter section(11) is connected to the battery(3). The charging and inverter section(11) is connected to an electrical appliance. An electrical power source is connected to the electrical appliance through thyristor switches(S1,S2)
Patent KR-20000041624-A (KR)
Title: Method for producing reflective plate for cpc and device for removing foreign matters of reflective plate
Inventor: JEONG DAE SIK
IPC: B21B37/00
Filed: 1998-12-23
Abstract: PURPOSE: A method for producing a reflective plate for CPC is provided to increase the durability and reflecting ability of the reflective plate. CONSTITUTION: A slurry is produced by putting 0 to 5wt % of binder, 0 to 10wt % of a dispersing agent and water in a ball mill case and mixing together with a synthetic or natural silica calcium material having 1 to 20 micro meter as a beginning material. The produced slurry is coated on alumina silicate board used as an insulation product so that calcium silicate coating layer having less than 0.5mm thickness is produced. After the alumina silicate board is dried, calcium silicate reflective plate is produced by calcining at 1000 to 1200°C.
Patent KR-19990063377-A (KR)
Title: 반도체 장치 제조 방법
IPC: H01L21/311
Filed: 1998-12-23
Abstract: 반도체 장치 제조 방법에 있어서, 게이트 절연막이 실리콘 기판 상에 형성된다.  도전성 물질로 만들어진 도전성막은 절연막 상에 형성된다.  유기 재료로 만들어진 반사 방지 코팅은 도전성막 상에 형성된다.  감광 레지스트막은 반사 방지 코팅 상에 형성된다.  레지스트막 상의 소정의 광학 이미지는 레지스트 패턴을 형성하도록 노출에 의해 현상된다.  레지스트 막을 마스크로 사용하면서, 반사 방지 코팅은 산소 가스, 반응성 가스, 및 불활성 가스를 포함하는 혼합 가스의 플라즈마를 이용한 드라이 에칭에 의해 선택적으로 제거되어, 패턴을 형성한다.  도전성 막은 레지스트 막을 마스크로 사용하여 에칭되어, 전극을 형성한다.
Patent KR-20000042125-A (KR)
Title: Apparatus for displaying power consumption of refrigerator
Inventor: JUNG HAK JAE
IPC: F25D23/00
Filed: 1998-12-24
Abstract: PURPOSE: An apparatus for displaying a power consumption of a refrigerator is provided to inform power consumption of a user by displaying a power supply of the refrigerator stored in a control part on a power supply display part mounted on a door of a freezing chamber, thereby promoting saving of power supply. CONSTITUTION: An apparatus for displaying a power consumption of a refrigerator includes a power supply part(30) for supplying a driving power supply to a refrigerator by receiving a commercial voltage, a watt meter(32) for counting a power supply output from the power supply part, a control part(34) for storing a signal output from the watt meter by counting the power supply, and a power display part(38) for displaying an amount of power supply stored in the control part according to a manipulation of a start key(36) installed in a door of a freezing chamber of the refrigerator.
Patent KR-20000042315-A (KR)
Title: Window shutter of air conditioner
Inventor: GU JA YUNG
IPC: F24F13/00
Filed: 1998-12-24
Abstract: PURPOSE: A window shutter of an air conditioner is provided to illuminate the difference of color by producing a plane member and a hinge part with the identical material and to produce one time of an extrusion process. CONSTITUTION: In producing a shutter(350), a plane member(352) is produced through an extrusion process. After producing the plane member, a hinge part(355) having smaller thickness than the one of the plane member and having a first and second notch unit(353,354) is produced by extrusion. Then the plane member having the same thickness as the plane member(352) is produced by extrusion. In spreading the shutter, a user holds and pulls one end of the shutter out of a main body. The shutter is spread by the pulling force and is fixed on a window frame. Thus, the shutter blocks a space between an air conditioner and a window frame and is easily spread since the hinge part is formed.
Patent KR-20000042976-A (KR)
Title: Electrode group of a secondary cell
Inventor: HWANG TAE SEOB
IPC: H01M10/14
Filed: 1998-12-28
Abstract: PURPOSE: An electrode group of a secondary cell is provided to ensure the stability of the cell with the detachment of ; active materials prevented by improving the adherence of the active material between the separator and the electrodes. CONSTITUTION: A binder(36) is coated on the surface of a separator(34) for separating the two electrodes of a positive electrode(26) and a negative electrode(32) in order for the positive electrode(26) and the negative electrode(32) to be closely attached to the separator(34) while electrolyte solution is easily received with minute gaps(38) maintained. The separator(34) is manufactured with a sheet of a thickness of 25-30 micrometers. The minute gaps(38) is saturated with the electrolyte solution to uniformly distribute the electrolyte solution inside the cell.
Patent KR-20000043261-A (KR)
Title: Method for indicating melting weight in melting mode of microwave oven
Inventor: MUN YUN SUK
IPC: F24C7/08
Filed: 1998-12-28
Abstract: PURPOSE: A method is provided to increase convenience by indicating both weight units and a pound according to the switching state of a toggle switch. CONSTITUTION: A melting key is set in putting food in a microwave oven. The food weight is measured and the microwave oven decides if a toggle switch is turned on and a high signal is input. If so, the measured weight is indicated by a kilometer. If not, the measured weight is indicated by a pound. Then the microwave oven decides if a melting start key is set. If so, the melting step starts during a set time depending on the measured weight and then a loop is finished. If not, the loop is repeated by returning to the decision step of an indicating mode.
Patent KR-20000043413-A (KR)
Title: Method for controlling detection of unbalance of laundry article
Inventor: KIM SEUNG HWAN
IPC: D06F33/02
Filed: 1998-12-29
Abstract: PURPOSE: A method for controlling the detection of the unbalance of laundry article during the dehydrating operation in washing machine is provided, to reduce the washing time and to save the consumption electrical power. CONSTITUTION: A method comprises the steps of determining whether the mode is at the dehydration mode (step 1); reading each sensing data from the first to fourth infrared sensors which are set on four inner walls of the case of washing machine and generate the information about the approaching distance to a water-storage bucket if the mode is determined to be the dehydration mode (step 2); comparing the distance sensing values detected by the infrared sensors each other (step 3); and performing the dehydrating operation if the error is within the tolerance interval, and performing the balancing washing and draining operation and performing the dehydration mode again if the error is not within the tolerance interval (step 4).
Patent KR-20000044869-A (KR)
Title: Method for processing surface of insulating layer of semiconductor device
Inventor: KIM SEO MIN
IPC: H01L21/311
Filed: 1998-12-30
Abstract: PURPOSE: A method for processing a surface of an insulating layer of a semiconductor device is provided to flatten a surface of an insulating layer by using a chemical mechanical polishing process and a plasma process. CONSTITUTION: A method for processing a surface of an insulating layer of a semiconductor device comprises the following steps. An insulating layer is formed on a wafer(1) formed with a conductive pattern(2) formed according to predetermined manufacturing processes. A chemical mechanical polishing process is performed to polish the insulating layer for polishing only a portion formed with a hard step. A plasma process is performed to process a surface of the insulating layer.
Patent KR-20000045897-A (KR)
Title: Method for forming anti-fuse using metal oxide layer
Inventor: CHOI YEONG HO
IPC: H01L27/04
Filed: 1998-12-30
Abstract: PURPOSE: A method for forming an anti-fuse is to easily perform a fuse repair by applying a bias to a metal oxide film in repairing a device. CONSTITUTION: An anti-fuse forming method comprises the steps of: depositing an insulating layer(20) on a first metal layer(10); depositing and etching a photosensitive film on the resultant material; forming a contact hole to expose the first metal layer; forming a metal oxide film(40) by oxidizing the first metal layer under an oxygen gas atmosphere within a chamber; and depositing a second metal layer(50) in the contact hole by pumping and exhausting an oxygen gas within the chamber. The second metal layer is an aluminum or a copper. The metal oxide film is formed by reacting a copper with an oxygen at an interface between the first metal layer and the second metal layer.
Patent KR-20000004895-A (KR)
Title: Production method of bar having ventilating hole
Inventor: KIM YOUN YOUNG
IPC: A23P1/00
Filed: 1998-12-31
Abstract: PURPOSE: A production method of a bar having a ventilation hole is provided to improve the yield rate of a process by preventing the generation of a defect even though the size of the ventilating hole is large or small, and to reduce costs of a production. CONSTITUTION: The production method comprises steps of: forming a dough by mixing the starch and water; forming a bar having a ventilating hole by pressing the dough in an extruding machine having an exhaust nozzle, and preventing to limit the ventilating hole of the bar by spouting air to the ventilating hole of the bar by an air nozzle installed inside the exhaust nozzle; processing the pressed bar having the ventilating hole by cooling.
Patent KR-19990036342-A (KR)
IPC: G01F23/02
Filed: 1996-08-09
Abstract: A sealed observation element for viewing the flow of molten liquid during the operation of a sulfur recovery unit comprises at least one sight glass that is heated and which may be swept with a purge gas supplied through one or more bleed rings to prevent condensation or deposition of materials on the side of the sight glass exposed to the process stream. <IMAGE>
Patent KR-19990036369-A (KR)
Title: 플루오로부텐산 히드라지드
IPC: C07D307/68
Filed: 1996-08-05
Abstract: 본 발명은 하기 일반식 (I)의 신규한 플루오로부텐산 히드라지드, 그의 제조방법 및 동물 해충을 구제하기 위한 그의 용도에 관한 것이다: 
     
       
     
     상기 식에서, 
     Y 는 C=O, C=S 또는 SO 2 를 나타내고, 
     R 1 은 수소 또는 할로겐을 나타내며, 
     R 2 는 알킬, 할로게노알킬, 알콕시알킬, 알킬티오알킬, 사이클로알킬, 알케닐, 알케닐옥시, 알콕시, 사이클로알킬옥시, 알킬티오, 또는 각각 임의로 치환된 아릴, 아르알킬, 아르알킬옥시 또는 헤트아릴을 나타낸다.
Patent KR-19990037680-A (KR)
Title: 냉벽 화학 기상 증착용 방법 및 장치
IPC: C23C16/48
Filed: 1996-08-14
Abstract: CVD 반응기(30)은 진공 챔버(32)를 포함하고, 진공 챔버(32)는 그 안에 위치하는 제 1 및 제 2 열판(54, 94)과, 그 외곽부 주위에 위치하는 두 개의 독립적으로 제어되는 다중-죤 열원(44, 64)을 가진다. 상기 제 1 열원(44)은 세 개의 죤(44a-44c)를 가지고, 상기 제 2 열원(64)은 두 개의 죤(64a-64b)를 가진다. 웨이퍼(12)는 상기 제 1 열판(54) 아래이면서 상기 제 2 열판 직상에 놓임으로써, 상기 제 1 열원(44)에 의해 제 1 열판(54)를 통해 간접적으로 가열되고 상기 제 2 열원(64)의 제 1 죤(64b)에 의해 상기 제 2 열판(94)를 통해 아래로부터 간접적으로 가열된다. 상기 웨이퍼(12)의 단부를 측면으로 둘러싸는 열 고리판(78)은 제 2 열원(64)의 제 2 죤(64a)로부터 발산되는 열에너지를 흡수하고 웨이퍼(12)의 외곽 단부를 가열한다. 끼워 넣어진 센서(60, 86)는, 일정 온도를 유지할 수 있도록, 온도를 측정하여 열원(44, 64)에 공급되는 동력을 조정하는 컴퓨터(190)에 제공한다.
Patent KR-19990044252-A (KR)
Title: 잉크 젯 프린터용 잉크 및 솔벤트 콘테이너
IPC: B41J2/175
Filed: 1996-08-19
Abstract: 잉크와 솔벤트 공급기는 이중 챔버로된 콘테이너(22)로 구성되는 것이다.   하부 챔버(24)에는 보급(補給) 솔벤트가 제공되고, 반면에 상부 챔버(26)에는 잉크 농축물이 제공된다.   솔벤트 필요시, 콘테이너는 하부 챔버(24)로부터 바로 제거된다.   신규 잉크가 필요하면, 솔벤트가 하부 챔버(24)로부터 도관(40)을 경유하여 상부 챔버(26)로 지나가도록 상부 챔버(26)에는 진공이 적용되어, 프린팅 시스템에 제공되는 신규 잉크를 형성하도록 잉크 농축물을 희석시킨다.
Patent KR-19990044480-A (KR)
Title: 알데히드를 결합한 가수분해형 수지 및 자기연마형 방오도료
IPC: C09D5/16
Filed: 1996-09-06
Abstract: 자기연마형 방오도료의 비히클 수지로서 분자내에 복수의 시프염기형의 1차 아미노기를 갖는 비닐 중합체가 사용된다. 비히클 수지로서 이 비닐 중합체를 함유하는 방오도료의 도막은, 해수중의 가수분해에 의해 시프염기로서 1차 아미노기에 결합된 방오성의 알데히드를 서서히 방출하고, 동시에 도막표면으로부터 서서히 용해한다.
Patent KR-19990064193-A (KR)
Title: 비탄성 사 및 베어 엘라스토머 사로 직물을 편성하는 방법 및 장치와 스웨터 편성물 구성
IPC: D04B15/46
Filed: 1996-10-09
Abstract: 베어 엘라스토머 사(18)와 함께 플레이팅된 강성 사(15)를 포함하는 스웨터 편성물이 마련된다.  엘라스토머 사는 편성물의 각 코스를 따라서 실질적으로 균일한 드래프트를 갖는다.  편성물은, 편성물이 편성됨에 따라 사 수요가 변동하게 되는 편성기로 베어 엘라스토머 사(18)를 실질적으로 균일한 장력 조건하에서 공급하는 공정에 의해 제조된다.  스웨터 편성물은 스웨터, 조끼, 드레스, 팬츠, 셔츠 및 모자와 같은 가먼트를 제조하는 데 있어 유용하다.
Patent KR-19990072222-A (KR)
Title: 전압 제어 수정 발진기 및 루프 필터
IPC: H04L7/033
Filed: 1996-12-11
Abstract: 원하는 주파수로 클록 신호를 생성하는 제어 가능 수정 발진기는 원하는 주파수의 저조파로 신호를 생성하는 전압 제어 수정 발진기를 포함한다.  전압 제어 수정 발진기는 제1 듀티 사이클 보정기에 결합되어 실질적으로 원하는 듀티 사이클을 갖는 신호를 생성한다.  제1 듀티 사이클 보정기는 주파수 승산기에 결합되어 실질적으로 원하는 주파수로 신호를 생성한다.  주파수 승산기는 차례로 제2 듀티 사이클 보정기에 결합된다.  제2 듀티 사이클 보정기는 원하는 듀티 사이클을 갖고 원하는 주파수로 클록 신호를 생성한다.
Patent KR-19990076915-A (KR)
IPC: H04B1/707
Filed: 1997-01-10
Abstract: The invention relates to a data transmission method and equipment for encoding and decoding a signal, comprising on the encoding side at least two parallel encoders (600, 602) and on the decoding side at least two parallel decoders (700, 702). In order to provide efficient coding, on the encoding side of the equipment each parallel encoder (600, 602) comprises a number of registers (612a-618a) connected in tandem, and a number or adding means (622a-626a) that add the outputs of the registers (612a-618a) to the data, and a mapping means (628a) the input of which consists of the outputs of the registers (612a-618a) and the output (608) of which comprises a Walsh symbol selected on the basis of inputs of a converter means (628a), and on the decoding side of the equipment the input (704, 706) of each parallel decoder (700, 702) is the received Walsh symbol and the reliability information (718, 720) about the symbol decision, received from the other parallel decoders.
Patent KR-20000010689-A (KR)
Title: Method and device for installing overspeed governor of elevator
Inventor: PETERSON HECAN
IPC: B66B5/00
Filed: 1998-03-06
Abstract: PURPOSE: A device for installing an overspeed governor is provided to use the overspeed governor while installing the elevator and to easily install. CONSTITUTION: A method and a device for installing an elevator for installing an overspeed governor(28) while installing the elevator comprises: fixing a suspension element(17) to the upper unit of an elevator shaft(2); inserting for fixing an element(30) for supporting the overspeed governor to the suspension element; adjusting the location of the overspeed governor for corresponding to the final arrangement of the overspeed governor vertically; installing an elevator guide rail(56); and removing the overspeed governor from the suspension element for being fixed to the guide rail.
Patent KR-20000022279-A (KR)
Title: Reader for optical detection and storage of visually marked and projected alphanumerical characters, graphics and photographic images.
Inventor: TEUFEL THOMAS
IPC: H04N1/107
Filed: 1997-06-17
Abstract: PURPOSE: A device is provided for the reader which can collect, store, and transmit photographic images, the graphics having size and shape, and the alphanumerical characters. CONSTITUTION: A reader comprising a projection device for projecting of light emitted from a radiation source (117) to a section of a marked surface (20) and an optical unit (4) for receiving and visualizing the reflected light on an image sensor (114) which transforms the reflected light into a sequence of electronic signals. The reader also has a motion detector (2) for generating synchronization signals during movement parallel to the marked surface, and also a signal processing unit which converts the signals of the image sensor into information packets containing independently of the character code the alphanumerical, graphic or pictorial information of a freely selectable part of the marked surface, and stores said signalsin a memory unit from which they can be retrieved.
Patent KR-20000022280-A (KR)
Title: Dry etching of transparent electrodes in a low pressure plasma reactor
Inventor: HOLLAND JOHN P
IPC: H01L31/18
Filed: 1997-06-27
Abstract: PURPOSE: Dry etching of transparent electrodes is provided to uniformly etch an indium tin oxide layer disposed above a substrate in a low pressure plasma reactor. CONSTITUTION: A method for dry etching an indium tin oxide (ITO) layer includes a step of; placing a substrate having the ITO layer into the low pressure plasma reactor; introducing an etchant gas into the low pressure plasma reactor; striking a plasma from the etchant gas in the low pressure plasma reactor; etching the ITO layer with the plasma.