baber/WOPTO huggingface dataset:
Patent JP-2003173738-A (JP)
Title: Protection film for plasma display panel
Inventor: KATO AKIRA
IPC: H01J11/24
Filed: 2001-12-05
Abstract: <P>PROBLEM TO BE SOLVED: To secure high secondary electron emission characteristics and reduce the discharge voltage in the electrode protection film material used for a plasma display.  <P>SOLUTION: An inorganic compound film which is made of mainly magnesium oxide and contains at least one kind or more selected from a rare earth oxide is formed as an electrode protection film that is used for a plasma display. Since it has a high secondary electron emission efficiency, reduction in discharge voltage of the PDP panel can be expected.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003170640-A (JP)
Title: Printer
Inventor: ITO HIDEKAZU
IPC: B41J29/02
Filed: 2001-12-07
Abstract: <P>PROBLEM TO BE SOLVED: To provide a printer configured to eliminate the need of starting a new control board even when specifications related to a communication port arrangement are changed by setting a plurality of communication port connecting parts on a control board of the printer.  <P>SOLUTION: IrDA fixing parts 80, 81 and 82 constituted of six lands 80a-80f, lands 81a-81f, and lands 82a-82f respectively, are set on the control board 59 of the printer 1. The land 80a is connected to the lands 81a and 82a, and is further connected to a CPU 30 via an IrDA modulating/demodulating circuit 33. Each of the lands 80b-80d is similarly connected as an independent wiring line to the CPU 30. Because of the wiring, even when an IrDA light receiving/ emitting element is fixed to any of the IrDA fixing parts 80-82, the element exerts the same effect in the printer.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002222549-A (JP)
Title: Pickup head structure, and method for accessing signal supplied to pickup head
Inventor: CHANG HUNG-LU
IPC: G11B11/00
Filed: 2001-12-07
Abstract: PROBLEM TO BE SOLVED: To provide a simple pickup head structure on a disk, which is formed by using a ferroelectric material. SOLUTION: Voltages are supplied to wires, and an electric field is generated in the vicinity of the ends of two conductive wires. When the ends of the two wires approach a disk made of a ferroelectric material, the electric field polarizes a data storage surface, and executes a writing function. When reading is necessary, the two wires are induced by the cable way of a separation area on the ferroelectric material to read a data signal stored in the disk. The pickup head structure is capable of generating a simpler and smaller effective electric field, useful for the miniaturization tendency of the pickup head, and capable of increasing a data density on the disk.
Patent JP-2003176440-A (JP)
Title: Powder coating material composition composed of fluorine-containing resin and article having coating film
Inventor: MASUDA SHO
IPC: C09D5/03
Filed: 2001-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To obtain a powder coating material keeping the remarkable weather resistance of a fluororesin while suppressing the deterioration of the fluororesin caused by the photocatalytic reaction of titanium dioxide having photocatalytic activity and to obtain a powder coating material to form a coating film having self-cleanability by the photocatalytic reaction.  <P>SOLUTION: Titanium dioxide having photocatalytic activity and coated with a methylsilicone resin is mixed with particles of a fluororesin powder coating material by a dry-blending method.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003182124-A (JP)
Title: Color thermal transfer type imaging apparatus
Inventor: NISHIO TATSUO
IPC: B41J2/325
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To improve the image quality at the rise time of starting a recording operation with the recording speed with respect to a recording medium made higher without the need of additionally providing a heater dedicated for preliminary heating in a color thermal transfer type imaging apparatus using a multi- time ink ribbon.  <P>SOLUTION: A color recording operation is executed on a card K using a multi-time ink ribbon R having ink surfaces successively changing colors, and a plurality of thermal heads 51Y, 51M, 51C, 51B by simultaneously supplying power to some of the thermal heads 51Y, 51M, 51C, 51B for transferring the ink on the ink surface while conveying the card K. After finishing the first color (Y color) recording operation, a head driving motor is driven such that a preliminary heating operation is executed for all the ink surfaces used for recording on the subsequent card K using the thermal head 51Y disposed on the most upstream side in the ink ribbon R conveyance direction.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003180339-A (JP)
Title: Method for producing aromatic yeast or aromatic composition, aromatic fermented beverage or food and method for producing the same
Inventor: SHOJI HIROSHI
IPC: A23L27/10
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method for producing an aromatic yeast or aromatic composition without using an expensive starting material or a chemical synthetic method and having a safety even by using it as a beverage or food, and a method for producing an aromatic beverage or food, or a distilled liquor by using the produced material.  <P>SOLUTION: This method for producing the aromatic yeast or aromatic composition is characterized by maturing an yeast liquid recovered from a fermentation process or freezing it once and thawing. The method for producing the aromatic beverage or food, or distilled liquor is also provided.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003184556-A (JP)
Title: Cooling system controller for internal combustion engine
Inventor: NISHIYAMA MASATERU
IPC: F02D41/06
Filed: 2001-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To improve an early warm-up performance by enhancing an engine preheating effect by hot water supplied from a heat accumulator to an engine, and also to improve reliability in the detection of the temperature of cooling water at the time of starting.  <P>SOLUTION: When an operator operates an IG switch from an OFF position to an ON position, a bypass valve 19 is closed to shut off a bypass passage 17, a flow control valve 18 is kept in a state in which a passage of a radiator 13 is shut off, and an electric water pump 25 is activated to supply the hot water stored in the heat accumulator 24 into the engine 11 to preheat the engine 11. Then, when the operator starts the engine 11 by operating the IG switch from the ON position to a start position, the electric water pump 25 is turned off and the supply of the hot water into the engine 11 is ended at the time when an engine speed has reached or exceeded a predetermined starting completion speed or at the time when a predetermined time has passed from the start of the supply of the hot water.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2002210949-A (JP)
Title: Method and apparatus for stitching printing swaths in imaging apparatus
Inventor: ELLSON RICHARD N
IPC: B41J2/015
Filed: 2001-12-14
Abstract: PROBLEM TO BE SOLVED: To reduce visually recognizable artifacts between printing swaths by stitching printing swaths. SOLUTION: There are provided a method and an apparatus for stitching printing swaths in an imaging apparatus such as an acoustic ink printer or the like. More specifically, there is provided a method executed in an apparatus for reducing visually recognizable artifacts caused by incorrectly feeding a paper between adjacent swaths of an ink jet printing head. In the method, a 'puzzle cut' or a 'zipper' end is formed between swaths. With regards to this, an image is divided to swaths, and ends of the swaths are dithered, whereby a depth of the cut is changed in accordance with an estimated correctness for feeding the paper, and the other printing characteristics such as noise, a width difference of printing swaths at different printing heads, etc.
Patent JP-2003187451-A (JP)
Title: Optical disk recording/reproducing apparatus and reproducing method
Inventor: MATSUMOTO SHINJI
IPC: G11B7/125
Filed: 2001-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide an optical disk recording/reproducing apparatus and a reproducing method which can shorten the time required for reading out data.  <P>SOLUTION: A CD servo processor 10, calculating a reproducing velocity ratio and a ROM 17 storing a laser power setting table 17a, corresponding to the reproducing velocity ration are provided. When recording at a low velocity is switched to reproduction at a high velocity, or when reproduction at a low velocity is switched to reproduction at a high velocity, a CPU 16 selects the laser power setting table 17a on the basis of a target reproducing velocity, sets the laser power corresponding to the reproducing velocity ration from the laser power setting table 17a, and stepwisely increases the laser power, until it reaches to the target reproducing velocity. Thus, data are read out without interruptions.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181251-A (JP)
Title: Method and apparatus for manufacturing ozone-dissolved water
Inventor: MIZUTANI JUNJI
IPC: C01B13/10
Filed: 2001-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing more stabilized ozone-dissolved water efficiently.  <P>SOLUTION: This method for manufacturing ozone-dissolved water by dissolving ozone in ultrapure water comprises a first step to bring ultrapure water into contact with ozone and a second step to dissolve ozone in the ozone- contacted ultrapure water.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003188889-A (JP)
Title: Automatic configuration method for remote i/o transmission system
Inventor: FUKUDA TSUTOMU
IPC: H04L12/40
Filed: 2001-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To allow a master device to automatically start a remote I/O transmission system through the use of a configuration request by a maintenance monitor device.  <P>SOLUTION: The master device 40 reads the I/O size of each slave device 60 by the configuration request from the maintenance monitor device 10, calculates a transmission period time which is necessary for exchanging I/O data with an I/O address of each slave device based on the I/O size and reports it to the maintenance monitor device 10. A user utilizes a transmission parameter as it is, which is reported from the master device 40 to the maintenance monitor device 10. Thus, the remote I/O transmission system is automatically started.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003195990-A (JP)
Title: Battery-equipped portable electronic equipment
Inventor: AKEDA YOSHIHIRO
IPC: G02F1/133
Filed: 2001-12-25
Abstract: <P>PROBLEM TO BE SOLVED: To provide battery-equipped portable electronic equipment capable of reducing a consumption current by laying stress on operability when a battery residual quantity is much, and laying stress on security of driving time of the portable electronic equipment when the battery residual quantity is little.  <P>SOLUTION: This battery-equipped portable electronic equipment turns on and drives back lights 7 and 8 of an LCD and an operation key 8 by an electric current supplied by a battery 6, and controls so as to illuminate the LCD 7 and the operation key 8 while brightly holding luminance by turning on back lights 4 and 10 of the LCD 7 and the operation key 8 in the portable electronic equipment by laying stress on the operability when the battery residual quantity is much, and controls so as to darken illumination of the LCD 7 and the operation key 8 by turning off the back lights 4 and 10 or reducing the luminance for reducing the electric current supplied from the battery 6 when the battery residual quantity is little.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003198352-A (JP)
Title: Output circuit
Inventor: FUJITA NORIYUKI
IPC: H03F3/26
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To minimize electricity consumption of a driver for an AC plasma display.  <P>SOLUTION: An output transistor on the VDD side is a 1st transistor 1, and an output transistor on the VSS side is a 2nd transistor 2. An output circuit takes out output signals by selectively shielding or conducting the respective transistors 1 and 2 according to input signals applied to gates or bases of the transistors 1 and 2. In the circuit, input signals are applied to gates or based of the transistors 1 and 2, and the transistors 1 and 2 are selectively shielded or conducted even without supplying the power for the output circuit.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003196431-A (JP)
Title: Electronic personal history processor and computer program for it
Inventor: YONE YUTAKA
IPC: G06Q10/06
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an electronic personal history processor, capable of evaluating competent person taking various information into account by obtaining various information in the process of creating an electronic personal history by an applicant.  <P>SOLUTION: A personal history form is displayed on a user terminal used by the applicant, and the applicant inputs necessary matters in each input item contained in the personal history form. The input data is created as personal history input data containing a plurality of input items. When the applicant inputs the input data to the respective input items, the log record information containing the input time information is created to be output with the personal history input data as the output data. Accordingly, the person in charge of employment in a firm refers to the log record information as well as the personal history input data, so that he can know the process in applicant's creation of the electronic personal history to make use of it for evaluation and examination.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003197999-A (JP)
Title: Method of manufacturing piezoelectric vibrator
Inventor: NAKAMAE KAZUO
IPC: H01L41/45
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric vibrator whose performance does not degrade by depolarization of a piezoelectric material.  <P>SOLUTION: The method of manufacturing the piezoelectric vibrator where electrodes and wiring are formed on both the sides of a plate type piezoelectric material, which comprises the steps of: forming the wiring on both the sides of the piezoelectric material; forming the electrodes on both the sides of the piezoelectric material; and depolarizing the piezoelectric material via the electrodes. By adopting the method, a problem that the piezoelectric material depolarizes when the wiring is formed on the electrode by soldering is solved.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003184530-A (JP)
Title: Internal engine provided with oil-level switch
Inventor: SHIMIZU YOSHIAKI
IPC: F01M11/10
Filed: 2001-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide an internal engine provided with an oil-level switch, which can sound an alarm, when an oil level has lowered to a predetermined level or lower.  <P>SOLUTION: In the inside of the internal engine, there is provided an oil-level switch 4 comprising a float 5, electrodes 11, and an outer casing 8 enclosing those parts, etc.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003193459-A (JP)
Title: Jet mixing method and jet mixing device
Inventor: KOIWA YOSHINOBU
IPC: E02D3/12
Filed: 2001-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a jet mixing method and a jet mixing device, which allow soil to be adequately agitated and enable a jet of soil curing material to be emitted to an adequate distance.  <P>SOLUTION: In this jet mixing method, a multiple pipe rod 3 is fed and advanced into the soil, and rotated while being pulled up from inside the soil; a medium for soil improvement is jetted into the soil from a jet nozzle, which is provided in the rod 3, under high pressure, so as to agitate the soil and improve the soil; jet parts 18 and 19, which are provided with the nozzles 20, 21, 22 and 23, respectively, are provided in upper and lower positions at lower ends of the rod 3; and the soil is improved while the upper and lower jet parts 18 and 19 are rotated in mutually reverse directions.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003509337-A (JP)
IPC: C07C235/46
Filed: 2000-06-21
Abstract: Nonpeptide benzamide-containing inhibitors of human rhinovirus (HRV) 3C protease are described.
Patent JP-2003503547-A (JP)
Title: 流動床中で洗剤顆粒を被覆する方法
IPC: B01J2/10
Filed: 2000-06-20
Abstract: (57)【要約】
流動床中で被覆された洗剤顆粒を製造する方法を提供する。流動床は、少なくとも約３．５のフラックス数および／または１．０を超えるストローク数で操作される。乾燥により、得られた洗剤粒子は外観および流動特性が改良されており、包装して洗剤材料として販売するか、または各種の他の洗剤成分と混合して完全処方洗剤組成物を製造することができる。
Patent JP-2003504813-A (JP)
Title: 非水溶液電解質を使用するリチウム二次電池
IPC: H01M4/133
Filed: 2000-06-28
Abstract: (57)【要約】
本発明はリチウム・イオン電池に有用な電解質溶液組成物に関する。これらの電解質は当業界に公知の電解質溶液に比べ揮発性が小さく、同時にグラファイトをベースにした負電極用活性材料を用いると優れた電池性能をもっていることを特徴としている。
Patent JP-2003504363-A (JP)
IPC: B60R19/42
Filed: 2000-06-30
Abstract: Heteroaromatic compounds are described, methods for their preparation, pharmaceutical compositions containing them, methods of use, and their use in medicines. In particular, the invention relates to quinazoline and pyridopyrimidine derivatives which exhibit protein tyrosine kinase inhibition.
Patent JP-2003506232-A (JP)
Title: 多成分相互貫入網目構造樹脂を含む熱収縮性フィルム
IPC: B32B27/32
Filed: 2000-08-07
Abstract: (57)【要約】
延伸熱収縮性フィルムは、メルトインデックスが１．４未満である多成分エチレン／α−オレフィン相互貫入網目構造樹脂を含む層であって、該樹脂はメルトインデックスが１未満であり密度が少なくとも０．９１ｇ／ｃｍ ３ である均一成分と、メルトインデックスが１．５〜２０の間である不均一成分とを含む樹脂である層を含み、該フィルムはヘイズ値（ＡＳＴＭ  Ｄ  １００３−９５）が５以下であり、ピーク荷重／ミル値（ＡＳＴＭ  Ｄ  ３７６３．９５ａ）が少なくとも１５５ニュートン／ミルであり、長手方向および横断方向の一方または両方における温度２００°Ｆでの自由収縮（ＡＳＴＭ  Ｄ  ２７３２−５３）が少なくとも８％である。実質的にバランスのとれた自由収縮を示すフィルムが好ましく、特に自由収縮バランスが３０％以下であるフィルムが好ましい。自由収縮や光学特性などの性質に実質的に悪影響を及ぼさずに、厚さの減少および／または機械的性質に関する利点が得られる。
Patent JP-2003506213-A (JP)
IPC: C02F1/28
Filed: 2000-08-08
Abstract: In one embodiment, the present invention relates to a process for recovering an onium compound from waste solutions or synthetic solutions containing the onium compound and impurities including the steps: contacting the waste solution or synthetic solution with a metal ion scavenger to remove metal ion impurities, wherein the metal ion scavenger comprises at least one of a chelating compound, a nanoporous material, and a magnetically assisted (MACS) material; charging the waste solution or synthetic solution to an electrochemical cell containing at least two compartments, a cathode, an anode and a divider and passing a current through the cell whereby the onium compound is regenerated or produced; and recovering the onium compound from the cell.
Patent JP-2003508626-A (JP)
Title: 金属表面上への直流電源プラズマ重合連続処理装置
IPC: B05D7/14
Filed: 2000-08-14
Abstract: (57)【要約】
本発明は直流電源プラズマ重合処理装置に関し、基材が該基材にパワーを印加することによって電極として用いられ、蒸着チャンバ内の対向電極が、蒸着されるべき基材の両側に設置される。さらに本発明では、電圧が印加される基材から本体を絶縁することによって重合処理中の安全性を確保することができる。
Patent JP-2003508394-A (JP)
Title: 新規な置換インドリノン類、その製造及びその薬剤としての使用
IPC: C07D209/34
Filed: 2000-08-22
Abstract: (57)【要約】
  本発明は下記一般式で表される置換インドリノン化合物、その異性体及び塩、特にその生理学的に許容される塩に関し；
 （式中、R 1 〜R 6 及びXは請求項１に定義されるとおりである）、この化合物は、有用な薬学的性質、特に様々なレセプター−チロンシンキナーゼ、及びサイクリン／CDK複合体、並びに内皮細胞及び様々な腫瘍細胞の増殖における抑制効果を有する。本発明はまた、これらの化合物を含む医薬組成物、その使用及びそれらを調製する方法に関する。
Patent JP-2003508871-A (JP)
IPC: G11C11/401
Filed: 2000-08-31
Abstract: An internal voltage regulator for a synchronous random access memory "SDRAM") uses a regulator circuit to supply power to charge pumps that is separate from a regulator circuit that supplies power to the arrays of the SDRAM. The regulator supplies an output voltage to the charge pumps that is maintained constant as the external supply voltage is increased beyond its normal operating range. In contrast, a regulated circuit that supplies power to the arrays increases as the supply voltage is increase beyond its normal operating range. As a result, the voltage regulator allows the arrays to be stress tested with a relatively high regulated output voltage without applying an excessive and potentially damaging regulated output voltage to the charge pumps.
Patent JP-2003510513-A (JP)
Title: 燃料高圧アキュムレータ
IPC: F02M63/00
Filed: 2000-08-19
Abstract: (57)【要約】
本発明は、内燃機関のコモンレール燃料噴射システムのための高圧アキュムレータであって、基体（１）が設けられており、該基体（１）の内室が、複数の接続部（７）に接続されている形式のものに関する。耐高圧性を向上させるために、内室が、ほぼ円筒状の少なくとも２つの切欠き（２，３）によって形成されており、該切欠き（２，３）の長手方向軸線（４，５）が、互いに平行に配置されており、切欠き（２，３）が、互いに接続されている。さらに、接続部（７）が、ほぼ円筒状の両切欠き（２，３）の接続領域（６）で基体（１）の内室に開口している。
Patent JP-2003511315-A (JP)
IPC: B05C17/10
Filed: 2000-10-10
Abstract: A disposable, semi-enclosed applicator for distributing a substance onto a target surface is disclosed. The applicator has a first side, a second side, and an internal cavity between the first and second sides. The applicator is provided with at least one opening so that the intemnal cavity is externally accessible. Further, the applicator has a ratio of absorbency of the second side to the first side of at about 1.5.
Patent JP-2003512856-A (JP)
Title: ウテログロビン様ポリヌクレオチド、ポリペプチド、および抗体
IPC: A61P25/28
Filed: 2000-11-03
Abstract: (57)【要約】
本発明は、新規なヒトウテログロビン様ポリペプチドおよびそのようなポリペプチドをコードする遺伝子のコード領域を含む単離された核酸に関する。また、ベクター、宿主細胞、抗体およびヒトウテログロビン様ポリペプチドを産生するための組換え方法が提供される。本発明はさらに、これらの新規なヒトウテログロビン様ポリペプチドに関する障害を診断および処置するために有用な診断方法および治療方法に関する。本発明は、被験体における病理学的状態、または病理学的状態に対する感受性を診断する方法を提供する。
Patent JP-2003517400-A (JP)
IPC: B62K25/30
Filed: 2000-11-24
Abstract: The universal folding bicycle according to the invention has the front arm (1) that is attached to the head assembly (2) on the frame (3) where the front swing arm (4) with the front wheel (22) are attached. The freely adjustable handlebars (9) are attached. The freely adjustable handlebars (9) are attached to the head assembly (2) via the rotary joint (5), the telescopic rod (6) and the handlebar axis (8) or via the handlebar attachement (7). The back wheel (13) is attached to the back swing arm (10) connected to the central assembly (11) formed by the pedals and cranks 12) and mounted on the frame (3). The back swing arm (10) can be equipped by the accessory arm (26). The seat (16) on a telescopic stem (15) is attached to the end of the frame (3) or via the pin (14) to the beginning of the frame (3). The seat (16) may be located in the swing arm (23) and may be equipped by the telescopic seat springing (24) or by the arm springing (25). The front arm (1) and the swing front arm (4) are interconnected by the telescopic front wheel springing (18) or by the front wheel springing (19). The back swing arm (10) is connected to the end of the frame (3) via the back wheel telescopic springing (20) or by the back wheel springing (21). The front wheel (22) and the back wheel (13) are attached by the means of unilateral free bearing to the front swing arm (4) and to the back swing (10). The telescopic front wheel springing (18), the front wheel (19), the rotary joint (5), the telescopic back wheel springing (20), the back wheel springing (21), the handlebar axis (8), and the cranks with pedals (12) are all equipped by quick releases (18', 19', 5', 20', 21', 8</
Patent JP-2003517197-A (JP)
Title: 均一なプロセス速度を生成するための方法および装置
IPC: H05H1/46
Filed: 2000-11-14
Abstract: (57)【要約】
【解決手段】  プラズマを用いて基板を処理するためのプラズマ処理装置が開示される。装置は、第１のＲＦ周波数を有するＲＦ電源と、プロセスチャンバとを含む。さらに、装置は、第１のＲＦ電源に動作可能に接続された実質的に円形のアンテナを含む。アンテナは、基板が処理のためにプロセスチャンバ内に配置されるときに、基板によって定義される面の上方に配置される。実質的に円形のアンテナは、第１のＲＦ電源によって生成された第１のＲＦエネルギを用いて、プロセスチャンバ内に電場を誘起するように構成されている。実質的に円形のアンテナは、第１の面に位置する第１の対の同心状の輪と、第２の面に位置する少なくとも第２の同心状の輪とを少なくとも含む。第１の対の同心状の輪および第２の対の同心状の輪は、互いに実質的に同一でありかつ対称に配置されている。実質的に円形のアンテナは、プロセスチャンバ内に方位的に対称なプラズマを形成する。また、装置は、アンテナおよびプロセスチャンバ間に配置された結合窓を含む。結合窓は、アンテナからプロセスチャンバ内部への第１のＲＦエネルギの通過を許容するように構成されている。結合窓は、第１の層および第２の層を有する。第２の層は、実質的に円形のアンテナおよびプラズマ間に形成される容量結合を実質的に抑制するように構成されている。実質的に円形のアンテナおよび結合窓は、協働して基板表面にわたって均一なプロセス速度を生成する。
Patent JP-2003517093-A (JP)
IPC: C10N30/10
Filed: 2000-12-13
Abstract: A long life lubricating oil as evidenced by a reduction in viscosity increase, oxidation and nitration, comprises a major amount of a base oil of lubricating viscosity and a minor amount of a mixture of high TBN, medium TBN and low/neutral TBN detergents wherein metal salicylate detergent is at least one of the medium or low/neutral TBN detergents.