baber/WOPTO huggingface dataset:
Patent KR-20050000610-A (KR)
Inventor: KIM SUNG YOUN
IPC: H01J29/07
Filed: 2003-06-24
Abstract: PURPOSE: A cathode ray tube is provided to improve an elastic modulus and strength of a shadow mask by improving the shape of the cross section of the electron beam passing hole of the shadow mask. CONSTITUTION: A cathode ray tube comprises a funnel serving as a rear glass; a panel coupled to the funnel, wherein the panel has an inner surface on which a phosphor screen is formed; an electron gun for emitting electron beams; a deflection yoke for deflecting electron beams in a vertical or horizontal direction; a shadow mask(5) for selecting colors of electron beams; and a mask frame where the shadow mask is coupled. The shadow mask has a plurality of electron beam passing holes. Each of the electron beam passing holes has a larger opening part(51) and a smaller opening part(52). A formula 0.23<=t/T<=0.5 is satisfied, wherein T is the total thickness of the shadow mask, and t is the thickness measured from the smaller opening part side to the portion where the smaller opening part and the larger opening part contact with each other.
Patent KR-20050000996-A (KR)
Inventor: OH KUM MI
IPC: G02F1/136
Filed: 2003-06-25
Abstract: PURPOSE: An LCD panel and a method for fabricating the same are provided to improve crystallization efficiency and prevent short from occurring between a gate electrode and source and drain regions of an active layer by oxidizing the source region of the active layer and a gate electrode overlapped with the drain region. CONSTITUTION: An LCD panel includes a gate electrode(106) partially oxidized, an active layer with a width smaller than that of the gate electrode, having source and drain regions overlapped with each other in a state that they are insulated from each other between the oxidized area of the gate electrode and a gate insulating layer, and a source electrode(108) formed in contact with the source region of the active layer, and a drain electrode(110) formed in contact with the drain region of the active layer. The gate electrode includes an oxide layer(128) overlapped with the source and drain regions of the active layer in a state that it is insulated from the regions and a gate layer(126) overlapped with a channel region of the active layer in a state that it is insulated from the channel region.
Patent KR-20050001981-A (KR)
Inventor: CHUNG SOO HYUN
IPC: C12N1/21
Filed: 2003-06-28
Abstract: PURPOSE: A microorganism Bifidobacterium breve LMC520 containing a plasmid pBC520, a method for preparation of conjugated fatty acids and fermented milks containing the same fatty acids using the same microorganism, and use of plasmid pBC520 are provided, which microorganism has improved conjugated linoleic acid(CLA) producing activity, and produces fermented milk products having high concentration of CLA within a short period together with Lactobacillus acidophilus and Streptococcus thermophilus. CONSTITUTION: The microorganism Bifidobacterium breve LMC520(KCTC 10455BP) contains a plasmid pBC520 which converts fatty acids having an unconjugated double bond structure within a chain or acylglycerol containing the same fatty acids as a substrate into fatty acids having a conjugated double bond structure or acylglycerol containing the same fatty acids, wherein the substrate has the unconjugated double bond structure in at least cis-9 and cis-12 positions; and the fatty acids having a conjugated double bond structure is conjugated linoleic acid(CLA). The method for producing the fatty acids having a conjugated double bond structure or acylglycerol containing the same fatty acids comprises transforming a microorganism having no conversion activity of fatty acids having an unconjugated double bond structure within a chain with the plasmid pBC520.
Patent KR-20050002458-A (KR)
Inventor: NOH JAE YOUNG
IPC: G06F12/00
Filed: 2003-06-30
Abstract: PURPOSE: A file storage system implementing a mass file storage service using a PC and a method thereof are provided to offer the file storage system of the same or better than the NAS(Network Attached Storage) or the SAN(Storage Area Network), and remarkably improve file stability and a file access speed while reducing the expense needed for system resource/management/maintenance. CONSTITUTION: An FSM(File Service Management) server(10) performs a preparative work for data up/download of a client(30). File servers(20a-20e) are connected to the file service management device. After judging that the uploaded file is present in the system by using a CRC(Cyclic Redundancy Check) value of the file requested from the client, the FSM server uploads only the changed part to the file by comparing upload data with the stored file.
Patent KR-20030061776-A (KR)
Inventor: HONG NYUNG KEE
IPC: B60R1/12
Filed: 2003-07-02
Abstract: PURPOSE: A device for detecting the damage of a vehicle is provided to safely protect the vehicle by detecting and recording the motion of an object approaching the vehicle. CONSTITUTION: Motion sensors(40,42,44) are mounted on the front, rear and both sides of a vehicle. Recording cameras(12,30,34) are mounted on the front, rear and both sides of the vehicle, and automatically operates when an object is detected by the motion sensors. A recording body(50) records the conditions of the vehicle. A power sensor(52) starts the vehicle and charges a battery with electricity according to the operation of the recording camera and the recording body. A room mirror screen(20) is mounted on a room mirror, and displays the distance between a rear object and the vehicle.
Patent KR-20050005875-A (KR)
Inventor: CHIN SIM WON
IPC: F25B47/02
Filed: 2003-07-07
Abstract: PURPOSE: A method for controlling defrosting of a heat pump is provided to prevent waste of power consumption and improve the heating capability by executing defrosting operation only when an actual outdoor pipe temperature becomes lower than an outdoor pipe temperature maximizing the average heating capability. CONSTITUTION: An outdoor temperature is measured after predetermined time passes from heating operation start. A defrost inrush pipe temperature is decided by the measured outdoor temperature. An actual outdoor pipe temperature is measured. The actual outdoor pipe temperature is compared with the defrost inrush pipe temperature. Defrosting operation is executed according to a result of the comparison.
Patent KR-20050007883-A (KR)
Inventor: LEE BYOUNG RAE
IPC: A61K8/97
Filed: 2003-07-12
Abstract: PURPOSE: Provided is a composition containing polyphenol purified from green tea, ascorbic acid or its derivatives. The composition has anti-photoxic effect on the skin. Therefore, the composition is used for cosmetics, foods and pharmaceuticals for inhibition of ultraviolet injury. CONSTITUTION: The composition having anti-photoxic effect on the skin is characterized by containing 50-95 parts by weight of green tea polyphenols, and 5-50 parts by weight of ascorbic acid or its derivatives. The polyphenol is selected from epigallocatechin gallate, epicatechin gallate, and epigallocatechin. And ascorbic acid or its derivative is selected from ascorbic acid, ascorbyl palmitate, calcium ascorbate, magnesium ascorbate and zinc ascorbate.
Patent KR-20050011357-A (KR)
Inventor: HAN GUAN XUAN
IPC: A61P39/02
Filed: 2003-07-23
Abstract: PURPOSE: Provided are the liquid phase extract separated from Ledumpalustre which has excellent detoxification effect on drug addiction and a preparation thereof. The extract is easily separated from the natural plant and has less adverse side effect. CONSTITUTION: The liquid phase extract separated from Ledumpalustre is characterized by containing, as a main ingredient, at least one selected from alpha-pinene, camphene, sabinene, myrcene, p-cymene, limonene, sabinol, pinocarvone, myrtenal, terpen-4-01, cuminaldehyde, caryophyllene, allo-aromadendrene, carvone, ledol and beta-eudesmol.
Patent KR-20050013470-A (KR)
Title: Method for preparing squid pastes by preventing contraction of squids
Inventor: LEE SANG BAEK
IPC: A23L17/00
Filed: 2003-07-28
Abstract: PURPOSE: A method for preparing squid pastes is provided, thereby preventing contraction of squids due to heating by fine cutting the squids, and whitening the squids and reducing stickiness of squids by heating, so that high quality of squid pastes can be prepared. CONSTITUTION: The method for preparing squid pastes comprises the steps of: finely cutting or slicing the squids having the inner skin, and heating the finely cut or sliced squids to reduce the water content of squid about 20% or more; cooling the heated squids in cool water and collecting them; adding seasoning into the squids and pulverizing the squids; and packing the pulverized squids and freezing the package.
Patent KR-20050014243-A (KR)
Inventor: JUNG JI YOUN
IPC: H04B1/40
Filed: 2003-07-30
Abstract: PURPOSE: A device and a method for reproducing audio data by using a mobile communication terminal are provided to use a mobile communication terminal as an external speaker capable of reproducing audio data, thereby realizing various functions of the terminal without comprising another external speaker. CONSTITUTION: A cable connects an audio output terminal of a sound apparatus(100) with an earphone jack microphone terminal of a mobile communication terminal(130). A speaker amplifier(120) amplifies audio data, and outputs the amplified audio data to a speaker. A switch(122) immediately outputs the audio data to the speaker amplifier(120) without passing through a CODEC if a speaker control signal is inputted. A controller outputs the speaker control signal if an operational mode of the terminal(130) is set to a speaker mode and the sound apparatus(100) is connected through the cable, and connects the switch(122) with the speaker amplifier(120).
Patent KR-20050017198-A (KR)
Inventor: GWAK BO HWAN
IPC: B60J5/06
Filed: 2003-08-11
Abstract: PURPOSE: An opening and closing structure of a bus lid is provided to restrict the lid from being opened by a blade rotated in the same direction of a hinge of an arm to compress the air in a cylinder and to prohibit strong shock of the lid from being applied on a bus body. CONSTITUTION: An opening and closing structure of a bus lid is composed of a bracket(200) fixed and installed to a bus body(300); an arm of which one end is combined to the bracket by a hinge(110) and the other end is fixed and mounted to the lid; a gas spring(400) of which left and right ends are joined to the arm and the bus body; a cylinder(500) disposed on the outside of the bracket hinge-combined with the arm to exchange the internal air with the external air; a blade(600) installed in the cylinder and rotated together with the hinge of the arm; and a one-way partition(700) for cutting off the flow of the internal air of the cylinder and compressing the air as the blade rotates.
Patent KR-20050017985-A (KR)
Inventor: AHN CHEOL
IPC: A61L9/22
Filed: 2003-08-12
Abstract: PURPOSE: Provided is a discharge tube to reduce generating amount of an ozone harmful for human body, to generate ion cluster, and to remove and disinfect odors and volatile organic compounds. CONSTITUTION: The discharge tube(10) includes a high voltage electrode(12) in form of a cylinder to which a voltage generated from a high voltage generator(11) is applied and which is coated with a silver, nickel, copper or aluminum for increasing generating amount of an ion, a ground electrode(13) formed from a stainless steel, copper or aluminum screen for increasing generating amount of an ion, a dielectric case(14), and an insulator(15) sealing an interior space of the dielectric case for completely insulating the high voltage electrode and the ground electrode. The ground electrode is spaced from the high voltage electrode and surrounds the high voltage electrode. The dielectric case is disposed between the both electrodes, and is made thin so as to lower applied voltage, thus to reduce the generating amount of the ion. Polarization charges generate at a surface of the dielectric case contacting the both electrodes.
Patent KR-20050018418-A (KR)
Inventor: PARK KYUNG HWAN
IPC: B60Q9/00
Filed: 2003-08-13
Abstract: PURPOSE: A door-open warning device of a vehicle is provided to prevent drivers from driving the vehicle while a shift lever is in D or R position and a door is opened. CONSTITUTION: A door-open warning device of a vehicle is composed of a warning unit(20) coupled to a battery(10) of the vehicle; a first switch(30) connected to the warning unit in series to release the connection when a shift level of an automatic transmission is in a parking position or a neutral position; and a second switch(40) connected to the first switch in series and linked when a vehicle door is opened. The warning unit has a buzzer for alarming a driver by generating a warning sound and warns the driver with a lamp or a light emitting device.
Patent KR-20030072314-A (KR)
Inventor: PARK CHUN SIK
IPC: A47C19/22
Filed: 2003-08-27
Abstract: PURPOSE: Provided are a folding system of top plate with a simple structure and a convenient operational property and a bed having the desk equipped with the folding system to utilize the top plate as the desk. CONSTITUTION: The folding system comprises a top plate(10) pivotally moving up/down on a vertical frame(4); a fastening component(20) having a hook groove(22) formed at bottom side and opened downward; a supporting link(30) to retain level of the top plate(10); a spring(40) between the frame(4) and the link(30); and a release lever(50) hinged at bottom side of the top plate(10) and to allow front end of the link(30) to be released out of the hook groove(22). The supporting link(30) has a lower part hinged to the frame(4) and a front end inserted into the groove(22).
Patent KR-20040010416-A (KR)
Inventor: YANG KI HAE
IPC: A01K63/00
Filed: 2003-08-28
Abstract: PURPOSE: A natural-cleaning artificial waterfall is provided for use in an aquarium and other places like lakes and ponds, to ease and simplify cleaning work of the aquarium, and giving less stresses to inhabitants therein. CONSTITUTION: An aquarium(7) equipped with the natural-cleaning artificial waterfall includes a bio-film reaction tub(9) composed of a bio-film(3), a natural waterway(6) for cleaning the water inside the aquarium(7) using the bio-film(3) and discharging the water out of the aquarium(7) via sand and gravel; and a circulator(8) for circulating the water inside the aquarium(7) to the bio-film reaction tub(9) through first and second circulating pipes(5,2) by using a circulating pump(4). The bio-film reaction tub(9) is made of ceramic materials for improving a biological function.
Patent KR-20050026156-A (KR)
Title: Map surfing system through the internet and method thereof
Inventor: RYU DAE YEOL
IPC: G06F17/00
Filed: 2003-09-09
Abstract: A system and a method for using a real shop or enjoying a game through a map on the Internet are provided to closely enjoy items of online community contents such as a game and chatting site in a regional unit, and offer online order transaction for goods and general home delivery items. A member database(620) stores information of members. A shop database(630) stores the information of the shops. A street map database(640) stores the map corresponding to each street. A web server(400) displays a web page and performs a member certification procedure if a computer(100) is connected. If the member is certified by the web server, a map surfer reads the map corresponding to the street of the member from the street map database, displays the shops that a shop computer(200) is connected to the web server, and enables the member to use the shop according to selection of the computer.
Patent KR-20050027390-A (KR)
Title: Semicoductor apparatus having load lock chamber
Inventor: AHN YO HAN
IPC: H01L21/02
Filed: 2003-09-15
Abstract: A bit of semiconductor equipment with a loadlock chamber is provided to restrain a native oxide layer from being formed on an uppermost wafer in a wafer cassette by using a vacuum port with a higher position than that of the uppermost wafer. A plurality of wafers are stored in a cassette(150). A loadlock chamber(120) includes an inner space for loading the cassette enough and at least one vacuum port. A bit of process equipment(100) is connected through the inner space of the loadlock chamber by using an opening/closing part. The vacuum port is arranged at a higher position than that of an uppermost wafer of the cassette.
Patent KR-20050027628-A (KR)
Title: Apparatus for casting off the skin of agricultural products
Inventor: NAM SIK
IPC: A23N15/02
Filed: 2003-09-16
Abstract: An apparatus for casting off the skin of agricultural products is provided, which apparatus sprays the compressed air to the agricultural products through a nozzle tip which is rotated at high speed, so that the agricultural products can be turned over, thus the skin of them can be cast off effectively without quality loss of the agricultural products. The apparatus for casting off the skin of agricultural products comprises the parts of: a body(110); a conveyer(120) with a circulation belt installed in the body(110) to transport agricultural products, and a circulation belt operating means(124); and an compressed air spraying means(140) with a compressed air spraying nozzle portion(130) installed in the body(110) which sprays the compressed air to the agricultural products on the circulation belt, a nozzle rotating means(142) which rotates the compressed air spraying nozzle portion(130), and a compressor(146) which compresses the air.
Patent KR-20050029479-A (KR)
Title: A corn assembly for flat-bar of a sheeting
Inventor: HAN MAN SIK
IPC: E04G17/06
Filed: 2003-09-23
Abstract: A cone assembly for a gap keeping/combining tool of a mold is provided to reduce the working time and a term of works by facilitating separation of the concrete by contacting the concrete with a cone cover having a small friction coefficient and adhesive force and to improve quality of products by removing the residual materials after removing the cone assembly. A cone assembly(100) for a gap keeping/combining tool, which is inserted into a flat tie is composed of a cone cover(110) made of a material with a small surface friction coefficient and composed of an insertion hole bored in a front side of a conical body having an inner space to fit the flat tie and a plurality of support projections(114) protruded on the inner surface and a soft cone(120) fitted and installed between the support projections of the cone cover and formed with a through-hole(122) communicating with the insertion hole.
Patent KR-20050029814-A (KR)
Title: Method for manufacturing ru layer and method for manufacturing mim capacitor using the same
Inventor: CHUNG SUK JIN
IPC: H01L27/108
Filed: 2003-09-23
Abstract: A method of fabricating Ru layer and a method of fabricating an MIM capacitor using the same are provided to minimize oxygen content within the ruthenium layer by forming the ruthenium layer by a PECVD(Plasma Enhanced Chemical Vapor Deposition) method or a PEALD(Plasma Enhanced Atomic Layer Deposition) method. A ruthenium layer(110) is formed on an upper surface of a semiconductor(100) by using a specific oxygen ruthenium source or plasma including hydrogen as a decomposer of a ruthenium source. The specific oxygen ruthenium source is formed with one of cyclopentadienyle type ruthenium sources such as Ru(EtCp)2 and Ru(BuCp)2. The plasma is formed with H2 plasma or NH3 plasma.
Patent KR-20030086492-A (KR)
Inventor: CHOI JAE SEUNG
IPC: A21D13/00
Filed: 2003-09-26
Abstract: PURPOSE: Provided is a fish meat bread made of fish meat dipped into a spiced liquid and flours of rice and wheat. The bread prevents obesity and adult diseases because the inside content is fish meat. CONSTITUTION: The method of preparing the bread comprises the steps of: mixing fine white rice powder and highly viscous flour with ratio of 50:50 and preparing dough by adding extracts of green tea; dipping fish meat into a spice solution consisting of 75wt.% of liquid extract of Houttuynia cordata, 5wt.% of sodium L-glutamate, 5wt.% of finely pulverized garlic, 5wt.% of finely pulverized ginger, 10wt.% of bean paste and some natural salt; and baking the bread by wrapping the fish meat with the bread dough.
Patent KR-20050033257-A (KR)
Title: Gate protecting device of semiconductor memory device
Inventor: AHN KYONG JUN
IPC: H01L29/78
Filed: 2003-10-06
Abstract: A semiconductor memory device for protecting a gate is provided to prevent the break down of a gate oxide film due to a static electricity by providing a discharge path to an active junction relative to unnecessary ion charges generated from floating nodes. A semiconductor memory device for protecting a gate includes an active pick up region and an active junction path. The active pick up region(10) is formed on the top of a well area of a semiconductor substrate. The active junction path(40) formed between a floating node and the active pickup region discharges charges generating from the floating node. The well area is P-well and N-well, and the active pickup region is n+ region and p+ region. The active pickup region is composed of a capacitor.
Patent KR-20050034439-A (KR)
Inventor: YU JAE WOOK
IPC: H04W52/40
Filed: 2003-10-09
Abstract: 본 발명은 트리플 모드 기능을 구비한 이동통신단말기에 관한 것으로, 트리플 모드를 지원하는 이동통신단말기의 모뎀을, 각 모드의 공통 계층 프로토콜은 하나의 단일칩으로 이루어진 하드웨어 모뎀과  통신모드에 따라 각 모드의 비 공통 계층 포르토콜이, 외부에서 다운로드되어 저장되는 소프트웨어 모뎀으로 구현함으로써, 표준과 관련된 프로토콜등의 개선이나 하드웨어의 변경없이 트리플 모드를 지원할수 있도록 한 것이다. 이를 위하여 본 발명은 디지털 베이스밴드 프로세서(모뎀)에서, 각 모드별로 포로토콜을 구분하여 구현하는 트리플 모드 기능을 구비한 이동통신단말기에 있어서, 상기 디지탈 베이스 밴드 프로세서는, 트리플 모드의 공통 계층 프로토콜을 지원하는 하드웨어모뎀과; 비 공통 계층 프로토콜을 소프트웨어적으로 구현하여 저장한 소프트웨어 모뎀과; 통신 모드에 따라, 상기 소프트웨어 모뎀에 저장된 해당 비공통 계층 프로토콜을 하드웨어 모뎀에 인터페이스하는 API를 포함하여 구성한다.
Patent KR-20050036041-A (KR)
Inventor: KEUM JI EUN
IPC: H04L12/44
Filed: 2003-10-14
Abstract: 1. 청구범위에 기재된 발명이 속하는 기술분야 
     본 발명은  CSMA/CD(Carrier Sense Multiple Access/Collision Detect)로 동작하고 있는 이더넷(Ethernet) 망에서 실시간 멀티미디어 데이터(Real time Multimedia Data)의 전송을 효과적으로 구현하는 방법에 관한 것임. 
     2. 발명이 해결하려고 하는 기술적 과제 
     본 발명은 실시간 데이터에 대해 일반 데이터에 비해 우선권을 부여하고 동시에 실시간 데이터간에는 IEEE 802.3ah EPON의 MPCP을 적용하여 실시간 데이터의 전송에 있어서의 충돌의 발생을 억제하고, 지연 시간의 변화가 생기는 문제점을 해결하기 위한 이더넷 망에서의 실시간 멀티미디어 데이터 전송 방법을 제공하는데 그 목적이 있음. 
     3. 발명의 해결 방법의 요지 
     본 발명은, 이더넷 네트워크에서의 실시간 데이터 전송에 있어서, 실시간 데이터에 대해서, IFG에 비해 짧은 RT-IFG를 정의하여 통상의 이더넷 데이터에 비해 우선권을 부여하는 제 1 단계와, 상기 실시간 데이터간의 충돌없는 데이터 전송을 위한 MPCP 프로토콜을 적용하는 제 2 단계를 포함함. 
     4. 발명의 중요한 용도 
     본 발명은 이더넷 네트워크 등에 이용됨.
Patent KR-20050047892-A (KR)
Inventor: PARK IN SEOK
IPC: F24H1/14
Filed: 2003-11-18
Abstract: 본 발명은, 가정용 진공식 가스보일러에 관한 것이다. 
     이는 특히, 상부에 보일러 관체 내부를 진공상태로 유지시키며 사용 중에 발생하는 불응축 가스를 외부로 배출하는 추기 펌프(7)가 구비되며, 상기 보일러 내부의 하부에는 버너를 통해 온도가 상승되고 내부에 수직방향의 핀형 열 교환기(11)가 구비되며 주위에 열매수가 채워지는 연소부(10)가 구비되고, 열매수의 상부에는 감압 증기실(20)이 구비되어 그 내부에 난방수 및 급탕수가 순환되도록 난방 및 급탕용 열 교환기(21)가 구비되는 본체(1)와; 
     상기 핀형 열 교환기(11)를 통해 배출되는 배기가스를 외부로 배출하도록 본체(1)의 일측에 구비되는 연도(3)를 포함하는 구성으로 이루어 진다. 
     이에 따라서, 적은 연료로 고효율을 얻으며 가정에서 사용할 수 있도록 하고,  에너지 사용 효율을 극대화할 수 있을 뿐만 아니라 저공기비 운전이 가능하도록 하는 것이다.
Patent KR-20050047947-A (KR)
Inventor: KIM SUNG DAE
IPC: B60G7/04
Filed: 2003-11-18
Abstract: 본 발명은 비독립 후륜현가장치에 사용되는 트레일링암 부시에 관한 것으로, 원통형으로 형성되면서 트레일링아암(1)의 선단에 구비된 부시파이프(1a)의 내부로 압입 설치되는 외측파이프부재(21)와, 이 외측파이프부재(21)의 양측 중앙부를 관통하여 돌출되도록 설치되는 내측파이프부재(23)와, 상기 외측파이프부재(21)와 내측파이프부재(23)사이에 압입되어 이들을 일체로 연결하도록 구비되면서 전달되어 오는 외력을 감소시켜 차체쪽으로의 전달을 최소화시키는 외력감소수단(25)으로 구성됨과 더불어; 상기 외측파이프부재(21)로부터 돌출된 내측파이프부재(23)의 양단은 볼트(27)를 통해 차체프레임(30)에 직접 결합되도록 설치되어져, 선회 주행중인 차량의 주행안정성과 제동중인 차량의 제동안정성이 확보되는 효과가 있을 뿐만 아니라, 내구성의 증대를 통해 사용수명이 연장되면서 작동소음도 크게 감소되도록 된 것이다.
Patent KR-20050049903-A (KR)
Inventor: BAN SANG HYUN
IPC: H01L21/3065
Filed: 2003-11-24
Abstract: 본 발명은 웨이퍼 에지 식각 장치에 관한 것으로, 챔버; 상기 챔버 내에 수용되는 소정의 패턴이 형성된 웨이퍼면의 중심부로 비반응 가스가 분사되도록 유도하는 개구와 상기 소정의 패턴이 형성된 웨이퍼면의 에지부로 라디칼이 분사되도록 유도하는 복수개의 개구가 있는 제1샤워헤드와, 상기 라디칼을 생성하여 상기 제1샤워헤드로 공급하는 제1 원격 플라즈마 제네레이터를 포함하는 제1분사부; 및 상기 제1분사부와는 대향되어 소정의 패턴이 형성되지 아니한 웨이퍼면으로 상기 라디칼이 분사되도록 유도하는 복수개의 개구가 있는 제2샤워헤드와, 상기 라디칼을 생성하여 상기 제2샤워헤드로 공급하는 제2 원격 플라즈마 제네레이터와, 웨이퍼를 지지하는 지지부재를 포함하는 제2분사부를 포함하는 것을 특징으로 한다. 이에 따르면, 원격 플라즈마를 이용하여 라디칼을 링 형태의 샤워헤드를 통해 웨이퍼 에지로 플로우시킴으로써 웨이퍼 에지에 머무르는 파티클을 효과적으로 제거할 수 있다. 또한, 라디칼이 일정한 각도로 웨이퍼에 도달하므로 저글링되는 문제점이 방지되고, 웨이퍼 배면의 파티클도 제거된다. 이에 따라, 반도체 소자의 제조 수율이 향상되는 효과가 있다.