Patent SG-11201804810Q-A (SG)
Title: Process for obtaining thick ordered films with increased periods comprising a block copolymer
Inventor: NAVARRO CHRISTOPHE
IPC: C08L53/00
Filed: 2016-12-16
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau res., 00) (43) International Publication Date .... .....r ,„„01 22 June 2017(22.06.2017) WIPO I PCT ID Hit (10) WO 1111111111111111111111111111 International III 2017/103082 III III Publication IIIIIIIIIIIIIIIIIII Number Al RIIIIIIIIIIIIIII (51) International Patent Classification: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, GO3F 7/00 (2006.01) C08L 53/00 (2006.01) BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (21) International Application Number: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, PCT/EP2016/081395 KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (22) International Filing Date: MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, 16 December 2016 (16.12.2016) NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, (25) Filing Language: English TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, (26) Publication Language: English ZA, ZM, ZW. (30) Priority Data: (84) Designated States (unless otherwise indicated, for every 15.62781 18 December 2015 (18.12.2015) FR kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (71) Applicant: ARKEMA FRANCE [FR/FR]; 420 rue d'Es- TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, tienne d'Orves, 92700 Colombes (FR). TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, (72) Inventors: NAVARRO, Christophe; 15 allee de Segure, 64100 Bayonne (FR). NICOLET, Celia; 4, Chemin du LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, Petit Pre, 64230 Sauvagnon (FR) CHEVALIER, Xavier; SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, 1, Boulevard Joseph Vallier, 38100 Grenoble (FR). GW, KM, ML, MR, NE, SN, TD, TG). (74) Agent: LE CROM, Christophe; 420, me d'Estienne Published: d'Orves, 92705 Colombes Cedex (FR). — with international search report (Art 21(3)) (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, 1-1 .4t ei cc O o en (54) Title: PROCESS FOR OBTAINING THICK ORDERED FILMS WITH INCREASED PERIODS COMPRISING A BLOCK - COPOLYMER L .-- (57) : Process for obtaining thick ordered films with increased periods comprising a block copolymer The present invention ::::, relates to a process for obtaining thick ordered films (typically > 20nm) with increased periods (typically > 1 Onm) on a nanometric ei scale of a composition comprising a block copolymer (BCP) deposited on a surface without degradation of the other critical structur- 0 ing parameters (kinetics, structuring defects, critical dimension uniformity), this being whatever the orientation (perpendicular to the ,1 . substrate, parallel to the substrate, etc.); this composition having a product x effective*N (with x effective = Flory-Huggins parameter between two blocks under consideration, and N the total degree of polymerization of these two blocks)of between 0.5 and 40.