baber/WOPTO huggingface dataset:
Patent WO-2013021633-A1 (WO)
Title: 水性インク用顔料、それを含有する水性インク組成物、およびその画像または印刷物
Inventor: EGAMI YUKIKO
IPC: C09C1/00
Filed: 2012-08-08
Abstract: 本発明の水性インク用白色顔料は、下記の（Ａ）、（Ｂ）および（Ｃ）の条件を満たす金属化合物（１）を含有している。 （Ａ）上記金属化合物（１）は、二酸化チタンと、波長５５０ｎｍにおける屈折率が１．６０以上２．４５以下である金属化合物（２）と、を含み、　上記二酸化チタンと上記金属化合物（２）の合計を１００重量％としたとき、上記二酸化チタンの含有率が５０重量％以上９９重量％以下であり、上記金属化合物（２）の含有率が１重量％以上５０重量％以下である。 （Ｂ）上記金属化合物（１）の動的光散乱法により測定される体積粒度分布のピーク値が１００～７００ｎｍの範囲にある。 （Ｃ）上記金属化合物（１）のＢＪＨ（Ｂａｒｒｅｔｔ－Ｊｏｙｎｅｒ－Ｈａｌｅｎｄａ）法により算出される細孔容積が０．１ｍｌ／ｇ以上０．６５ｍｌ／ｇ以下である。
Patent WO-2013121474-A1 (WO)
Title: Resin coating device, and resin coating method
Inventor: ABE SEIKOU
IPC: H01L33/50
Filed: 2012-09-11
Abstract: In the present invention, a translucent member (41), on which a resin (8) has been trial applied as a means to measure light emitting characteristics, is mounted on a translucent member mounting portion (53). Excitation light that will excite a fluorescent body is emitted from a light source (42) disposed above the mounting portion (53), and the excitation light is irradiated from above onto the resin (8) coated on the translucent member (41). Thereby, the variation between the measurement result obtained by the light emitting characteristic measurement unit that measures the light emitting characteristics of light emitted by the resin (8) and the predefined light emitting characteristics is obtained, and the suitable resin coating amount for a resin to be coated on an LED element for actual production is derived on the basis of this variation.
Patent WO-2013065269-A1 (WO)
Title: Manufacturing method of main metal fitting for spark plug and manufacturing method of spark plug
Inventor: KAWANO HAJIME
IPC: H01T21/02
Filed: 2012-10-26
Abstract: The present invention effectively reduces decentering between the central axis of a first cylindrical section and the central axis of a second cylindrical section without causing an increase in the manufacturing cost. A main metal fitting (3) extends in an axial direction (CL1) and has a threaded section (15) on the outer peripheral surface so as to be screwed to a mounting hole of a combustion device. Manufacturing process of the main metal fitting (3) includes: a step in which a cylindrical main metal fitting intermediate body (M12) comprising a first cylindrical section (CY1) and a second cylindrical section (CY2) is formed; and a rolling step in which the threaded section (15) is formed on the cylindrical main metal fitting intermediate body (M12). In the rolling step, after a receiving member (RC), which is to be inserted into the cylindrical main metal fitting intermediate body (M12) so as to sandwich the cylindrical main metal fitting intermediate body (M12) between the receiving member and the machining surface of rolling dices (D1, D2), is inserted into the cylindrical main metal fitting intermediate body (M12), the rolling is applied at least to the first cylindrical section (CY1) and the second cylindrical section (CY2) simultaneously.
Patent WO-2012132490-A1 (WO)
Title: 先端偏向操作可能カテーテル
Inventor: NIIYA WATARU
IPC: A61M25/01
Filed: 2012-01-11
Abstract: 先端可撓部分１５を有するカテーテルチューブ１０と、カテーテルチューブ１０の先端に固定された先端電極２０と、カテーテルチューブ１０の先端可撓部分１５を撓ませるために、カテーテルチューブ１０の内部に延在し、その後端を引張操作できる操作用ワイヤ３１，３２と、カテーテルチューブ１０の軸方向に沿って先端可撓部分の内部に配置され、操作用ワイヤ３１，３２の各々を軸方向に移動自在に挿通するための空間を有する操作用チューブ４１，４２とを備え、操作用チューブ４１および操作用チューブ４２の各々が、先端側部分チューブと、後端側部分チューブとに分割されている先端偏向操作可能カテーテルである。　本発明の先端偏向操作可能カテーテルによれば、操作用ワイヤの引張操作によって、カテーテルの先端部分を途中で折れ曲がりのない滑らかなカーブ形状に変形することができる。
Patent WO-2012108509-A1 (WO)
Inventor: IWASAKI YUKI
IPC: C23C14/34
Filed: 2012-02-09
Abstract: Cette invention concerne un corps fritté d'oxyde approprié pour la production d'un film semi-conducteur d'oxyde pour dispositif d'affichage, ledit corps fritté d'oxyde présentant une forte conductivité et densité relative, et est capable de déposer un film semi-conducteur d'oxyde d'une grande mobilité de porteur de charge. Le corps fritté d'oxyde est obtenu en mélangeant et en frittant des poudres d'oxyde de zinc, d'oxyde d'étain et d'oxyde d'indium et, lorsqu'une cartographie des compositions par microsonde électronique (EMPA) est effectuée sur le corps fritté d'oxyde, la proportion de la surface où la concentration en Sn vaut 10 à 50 % en masse dans la zone mesurée vaut au moins 70 pour cent.
Patent WO-2012111717-A1 (WO)
Title: Method for producing rutile-type titanium oxide sol
Inventor: MURAKAMI NATSUMI
IPC: C01G23/053
Filed: 2012-02-15
Abstract: [Problem] To provide a method for the efficient production of a rutile-type titanium oxide sol having excellent dispersibility wherein grain size as measured by dynamic light scattering is 5 to 100 nm. [Solution] A method for producing a rutile-type titanium oxide sol having a grain size as measured by dynamic light scattering of 5 to 100 nm comprises the following steps (a) and (b): Step (a): a step for preparing a titanium-containing aqueous solution having a concentration of 0.1 to 15 mass% in terms of TiO 2  whereby an aqueous solution is prepared by mixing an aqueous tin oxalate solution, a titanium alkoxide, oxalic acid, a quaternary ammonium hydroxide, and water such that, per mole of titanium atoms, the ratio of tin atoms is 0.1 to 0.8 mol, the ratio of oxalic acid is 0.01 to 5 mol, and the ratio of quaternary ammonium hydroxide is 0.1 to 3.5 mol; and Step (b): a step for hydrothermal treatment, at 100 to 200ºC, of the titanium-containing aqueous solution obtained by step (A).
Patent WO-2012115025-A1 (WO)
Inventor: DATE MASAYOSHI
IPC: C22C38/00
Filed: 2012-02-20
Abstract: A manufacturing method for a cold-working die in which steel ingots of a cold-work tool steel are hot worked and made into a base material, the base material is quenched and tempered to a hardness of 58-62 HRC, and then machined into a die shape. The cold-work tool steel comprises, in mass%: 0.6 - 1.2% of C; 0.8 - 2.5% of Si; 0.4 - 2.0% of Mn; 0.03 - 0.1% of S; 5.0 - 9.0% of Cr; 0.5 - 2.0% of Mo and W independently or as a complex (Mo+1/2W); 0.04 - less than 0.3% of Al; and iron and unavoidable impurities as the remainder. The hardness after tempering is preferably at least 60 HRC. The cold-work tool steel may further contain: 1.0% or less of Ni; 1.0% or less of Cu; 1.0% or less of V; and 0.5% or less of Nb.
Patent WO-2012121146-A1 (WO)
Title: Electrode active material, electrode, and secondary battery
Inventor: SATO MASAHARU
IPC: H01M4/60
Filed: 2012-03-02
Abstract: Electrode active material has an organic compound as a principal constituent thereof that contains a pyracene structure represented by the general formula as a constitutional unit thereof. This pyracene structure contains a plurality of substituents=X that are bonded by double bonds. =O is preferable for the substituents=X. As a result, it is possible to achieve a material that exhibits high energy density and high output, has a long life, and exhibits favorable cycling properties in that there is little capacity decline even after repeated charging/discharging.
Patent WO-2013140550-A1 (WO)
Inventor: YOSHIMINE YUKIHIRO
IPC: H01L31/042
Filed: 2012-03-21
Abstract: La présente invention se rapporte à un module de cellule solaire qui présente une durabilité améliorée. Un module de cellule solaire (1) est pourvu d'un corps principal de module (20), d'un corps de cadre (11) et d'une boîte à bornes (30). Le corps principal de module (20) comprend une cellule solaire (10). Le corps principal de module (20) est fixé au corps de cadre (11). La boîte à bornes (30) est agencée sur le côté arrière de la surface principale du corps principal de module (20). La cellule solaire (10) est électriquement connectée à la boîte à bornes (30). La boîte à bornes (30) est agencée à l'extérieur d'une région (20A) qui est entourée par le corps de cadre(11).
Patent WO-2012147871-A1 (WO)
Title: 熱可塑性ポリエステル樹脂組成物、およびこれを用いた光反射体
Inventor: YASUI JUNICHI
IPC: C08K5/103
Filed: 2012-04-26
Abstract: 本発明は、（Ａ）ポリブチレンテレフタレート樹脂１００～５０質量部に対して（Ｂ）ポリエチレンテレフタレート樹脂０～５０質量部を含有するポリエステル樹脂１００質量部に対して、（Ｃ）ポリグリセリンの全ての水酸基に、脂肪酸が結合してなるポリグリセリン脂肪酸エステル０．０５～５質量部、（Ｄ）脂肪族または脂環族のポリカルボジイミド化合物０．０５～５質量部および（Ｅ）平均粒子径３．０μm以下の無機フィラー０～２０質量部を含有する熱可塑性ポリエステル樹脂組成物であり、直接金属蒸着性、離型性、表面平滑性、耐熱性、フォギング性および耐ブリードアウト性に優れた樹脂成形品が得られる熱可塑性ポリエステル樹脂組成物、および当該樹脂成形品にダイレクト法により直接金属蒸着された高輝度感の光反射体を提供することができる。
Patent WO-2012147889-A1 (WO)
Title: Optical communication device, optical path switching device, and network
Inventor: JINNO MASAHIKO
IPC: H04B10/572
Filed: 2012-04-26
Abstract: An optical communication device, in the transmission side, sorts client signals according to the address and the communication capacity for each address, performs an electrical-optical conversion to convert the sorted signals into optical signals having different center frequencies, and multiplexes and outputs the optical signal; and in the receiving side, branches wavelength-multiplexed signals by wavelength (i.e., by transmission source), performs an optical-electrical conversion to convert the branched optical signals into electric signals, and multiplexes and outputs the electric signal. An inserting/branching port of the optical path switching device is equipped with an input/output port for the optical communication device. The optical frequency bandwidth is variable in accordance with the optical spectral width of the optical signal. A network in which the optical communication device and the optical path switching device are used is built.
Patent WO-2012153674-A1 (WO)
Title: Method for producing transparent electrically conductive film laminates and transparent electrically conductive film laminate
Inventor: ISHIHARA MASATOU
IPC: C01B31/02
Filed: 2012-05-01
Abstract: The invention addresses the problem of prior methods, which formed a binder layer on a graphene film, that the shape of the substrate surface was transferred to the graphene layer. The purpose is to provide a technique for forming less cloudy, highly transparent electrically conductive film laminates. The invention solves the problem, in methods that produce transparent electrically conductive carbon films by forming a transparent electrically conductive carbon film on a film-forming substrate using the CVD method and then removing said film-forming substrate from said transparent electrically conductive carbon film, by preparing a film having an adhesive surface and providing a process of gluing the adhesive surface of said film to a portion and/or all of the surface of the transparent electrically conductive carbon film prior to removal of the film-forming substrate.
Patent WO-2013168264-A1 (WO)
Title: Drive device
Inventor: SUZUKI JUN
IPC: H02K33/18
Filed: 2012-05-10
Abstract: A drive device (101) is provided with: a base (110); a rotatable driven part (130); elastic parts (120a, 120b) that connect the base and the driven part, and have elasticity so as to allow the driven part to rotate by acting as the axis of rotation in one direction (the Y-axis); a coil (140) that is disposed on the base, with the driven part being disposed on the outside of the windings of the coil; and magnetic field applying parts (151, 152) that each apply a magnetic field to the coil.
Patent WO-2013002374-A1 (WO)
Title: Swallowing simulation device and method
Inventor: KAMIYA TETSU
IPC: G16B5/00
Filed: 2012-06-29
Abstract: Provided is a swallowing simulation device with which the approximate reproduction of the actual phenomena associated with swallowing is easy. The present invention is provided with: an oral cavity modeling unit (10) that forms an oral cavity model (11) comprising oral organs; an organ characteristic setting unit (20) that sets the organ characteristics of each oral organ in the oral cavity model (11); an organ movement setting unit (30) that sets the movement of each oral organ in the oral cavity model (11); a food product physical property setting unit (40) that sets the food product that is the subject of analysis and the physical properties thereof; an input unit (81) that inputs a mock food product that models the food product into the oral cavity; a motion analysis unit (50) that uses a particle method to analyze the motion of each oral organ and the behavior of the mock food product (41) when swallowed in the oral cavity model (11); and a display unit (82) that displays, on a video screen, the result of the analysis of the motion of each oral organ and the behavior of the mock food product (41) when swallowed as analyzed by the motion analysis unit (50).
Patent WO-2014002285-A1 (WO)
Title: Piezoelectric ceramic composition
Inventor: NAGAREDA KENJI
IPC: C04B35/00
Filed: 2012-06-26
Abstract: [Problem] To provide a piezoelectric ceramic composition that exhibits good piezoelectric properties, and that is an alkali niobate composition that can be composed without including lead. [Solution] A piezoelectric ceramic composition (10) expressed by the composition formula {Lix(K1–yNay)1-x}(Nb1-zSbz)O3, and including Bi and Fe as added metal elements. The piezoelectric ceramic composition (10) produced is a composition that, if the quantity of Bi added (molar ratio) is defined as v, and the quantity of Fe added (molar ratio) is defined as v, satisfies the ranges of 0.03<̳x<̳0.045, 0.5<̳y<̳0.58, 0.03<̳z<̳0.045, 0.006<̳v<̳w<̳0.010.
Patent WO-2013046856-A1 (WO)
Title: Method for producing lithographic printing plate
Inventor: MORI TAKANORI
IPC: G03F7/38
Filed: 2012-07-10
Abstract: A method for producing a lithographic printing plate characterized in comprising the steps of: (a) supplying a negative-type lithographic printing plate precursor having, on a supporting body, an image-recording layer comprising a polymerizable compound, an infrared absorption agent, and an initiator represented by general formula (I) Ar 1 -I + -Ar 2 Z - , where Ar 1  and Ar 2  are benzene rings which may have a substituent group and which represent structures different from each other, and Z -  represents a counter anion, the image-recording layer being removable by ink and/or dampening water, (b) subjecting the negative-type lithographic printing plate precursor to image exposure with an infrared laser, (c) exposing the plate for five minutes or more to white light each having an light emission peak at 400-500 nm and 500-600 nm but not emitting light at 380 nm or less, and (d) remove an unexposed portion by ink and/or dampening water to produce the lithographic printing plate.
Patent WO-2013047050-A1 (WO)
Title: Color imaging apparatus
Inventor: OKIGAWA MITSURU
IPC: H01L27/14
Filed: 2012-08-27
Abstract: There is provided a color imaging apparatus that suppresses the generation of false color and does not complicate computation. The color imaging apparatus (10) is provided with four groups of pixels (21-24) from a first group through a fourth group. The first group of pixels (21) is nine individual pixels (11) configured 3 x 3, each pixel being provided with an individual Bayer-pattern color filter (15R), (15G), and (15B). The second pixel group (22) is contiguous at the bottom of the first pixel group (21), the third pixel group (23) is contiguous to the right of the second pixel group (22), and the fourth pixel group (24) is contiguous above the third pixel group (23). The color filter alignment patterns of the second (22), third (23), and fourth (24) pixel groups are aligned at rotations of 90°, 180°, and 270°, respectively, counterclockwise from the color filter alignment of the first pixel group (21). An imaging screen (16) is composed of a region of 6 x 6 pixels (11) comprising all of the pixel groups (21-24) as a standard unit.
Patent WO-2013042719-A1 (WO)
Inventor: KAMADA KOU
IPC: B32B15/08
Filed: 2012-09-20
Abstract: 少なくとも１種の金属粒子を含有する金属粒子含有層と粘着層とを有し、前記金属粒子が、六角形状乃至円形状の平板状金属粒子を６０個数％以上有し、前記六角形状乃至円形状の平板状金属粒子の主平面が、前記金属粒子含有層の一方の表面に対して平均０°～±３０°の範囲で面配向し、前記粘着層が自己粘着性と再剥離性を有する熱線遮蔽材は、遮熱性能（日照反射率）が高く、ガラスに貼り合わせた場合の遮熱耐久性に優れ、粘着層の再剥離性および剥離強度も良好である。
Patent WO-2013069382-A1 (WO)
Inventor: YOSHINO MASAHIRO
IPC: A61B1/00
Filed: 2012-09-24
Abstract: 内視鏡２は、生体内に挿通される挿入部１１と、挿入部１１の先端に配置され、生体に照明光を照射する照明ファイバ１４と、生体からの戻り光を検出する検出ファイバ１６と、照明ファイバ１４の自由端を揺動させるアクチュエータ１５と、照明ファイバ１４の径に基づく貫通孔を有し、照明ファイバ１４とアクチュエータ１５との間に配置されたフェルール４１とを有する。アクチュエータ１５は、フェルール４１の第１の側面４２ａに配置されたアクチュエータ１５ａと、照明ファイバ１４の軸方向に対して、第１の側面４２ａの点対称である面とは異なるフェルール４１の第２の側面４２ｂに配置されたアクチュエータ１５ｂとを有する。
Patent WO-2013114666-A1 (WO)
Title: Sputtering target assembly
Inventor: OSADA KOZO
IPC: C23C14/34
Filed: 2012-09-25
Abstract: A sputtering target assembly in which a cylindrical target having a diameter of at least 100mm and a length of at least 1000mm is divided into at least three target pieces (A) such that the lines of division are in the circumferential direction and the divided target pieces (A) configure a sputtering target-backing bonded body (B) by laminating to or installing on a cylindrical or columnar backing body, and at least two bonded bodies (B) are aligned in the width direction, the sputtering target assembly being characterized in that, when each bonded body (B) is arranged as a sputtering target assembly, the dividing lines between the three target pieces present on the bonded body (B) are installed so that the dividing lines between adjacent divided target pieces are not in the same position. This invention addresses the problem of providing a sputtering target assembly capable of reducing failure from particle generation attributable to the piece-affixing part.
Patent WO-2013047775-A1 (WO)
Title: 中空糸膜モジュールの親水化方法
Inventor: KANAI HIROAKI
IPC: B01D67/00
Filed: 2012-09-28
Abstract: 本発明は、ケーシング下方の接着固定部付近においても効率的に中空糸膜を親水化する外圧式中空糸膜モジュールの親水化方法を提供する。本発明の親水化方法によれば、ケーシング下部の中空糸膜外表面に膜モジュール高さ分の水頭圧がかかることなく、下部接着固定部近傍の中空糸膜を効率的に親水化処理することが可能となる。
Patent WO-2013065836-A1 (WO)
Title: Process for producing fused-ring aromatic compound, and conjugated polymer
Inventor: FUJITA RIEKO
IPC: C07F7/22
Filed: 2012-11-02
Abstract: The present invention addresses the problem of purifying a precursor monomer by a simpler and milder method so that a polymer having a higher molecular weight is obtained therefrom. The invention relates to a process for producing a fused-ring aromatic compound that has n active group(s) (wherein n is an integer of 1-4), the process including the step of bringing a composition comprising both the fused-ring aromatic compound and a solvent into contact with a zeolite.
Patent WO-2014083641-A1 (WO)
Title: Mechanism for preventing coin from being mistakenly inserted in banknote processing machine
Inventor: YANAGIDA HIROSHI
IPC: G07D9/00
Filed: 2012-11-28
Abstract: Provided is a mechanism for preventing a user from mistakenly inserting a coin (or token) into a banknote insertion port of a banknote processing machine. When a coin (28) is mistakenly inserted into a banknote insertion port (17), a mistaken-coin-insertion-prevention mechanism (20) holds a coin (28), which is a rigid body, at three points, the three points being a front end contact part (29) and a rear lower surface contact part (31) formed on a horizontal surface (26) of a conveyance path lower surface part (27), and an upper surface intermediate contact part (32) formed on the lower curvature part of a downwardly sloped surface (22) of a conveyance path upper surface part (24), and blocks the coin (28) from entering the device interior from the banknote insertion port (17). A gap (L) for allowing a set of a predetermined number of banknotes (33), which has a thickness greater than the thickness of the coin (28) yet has flexibility, is provided between the conveyance path upper surface part (24) and the conveyance path lower surface part (27).
Patent WO-2013108501-A1 (WO)
Title: Traveling vehicle system
Inventor: HARASAKI KAZUMI
IPC: G05D1/02
Filed: 2012-12-05
Abstract: This traveling vehicle system is provided with a traveling path network including traveling paths (R5, R6, R23), a plurality of traveling vehicles (3), and a traveling vehicle controller. The traveling vehicle controller has: an abnormality ascertainment unit for ascertaining an abnormality on the downstream side traveling path of a branching section (S2) at least comprising the traveling path (R6); and an entrance determination unit which, if a traveling vehicle (3B) passing through the branching section (S2) immediately before enters onto the traveling path (R6), and a traveling vehicle (3A) passing through the branching section (S2) immediately after is about to enter in succession onto the traveling path (R6), omits a determination as to whether or not the traveling vehicle (3A) has entered onto the traveling path (R6) when an abnormality has not yet been ascertained by the abnormality ascertainment unit and makes a determination as to whether or not the traveling vehicle (3A) has entered onto the traveling path (R6) when an abnormality is ascertained by the abnormality ascertainment unit.
Patent WO-2013089032-A1 (WO)
Title: Semiconductor laser element and method for manufacturing semiconductor laser element
Inventor: FUTAGAWA NORIYUKI
IPC: H01S5/22
Filed: 2012-12-07
Abstract: A semiconductor laser element includes: a semiconductor substrate having a semi-polar surface formed of a hexagonal crystal system group III nitride semiconductor; an epitaxial layer (2) which is formed on the semi-polar surface of the semiconductor substrate and includes a light-emitting layer, the epitaxial layer having a ridge portion (18); a first electrode (14) formed on the top of the ridge portion; an insulating layer (12) which covers the epitaxial layer on the periphery of the ridge portion (18a) and the lateral face of the ridge portion (18b) while covering at least a part of the lateral face of the first electrode continuously from the epitaxial layer side; a pad electrode (13) which is formed to cover the top of the first electrode and the insulating layer and is electrically connected to the first electrode; and a second electrode (15) which is formed on the surface of the semiconductor substrate opposite the surface where the epitaxial layer is formed.
Patent WO-2014091613-A1 (WO)
Title: Parking assistance device
Inventor: SATONAKA HISASHI
IPC: B60R21/00
Filed: 2012-12-13
Abstract: This parking assistance device comprises: an obstacle detection unit that detects obstacles in the periphery of a vehicle; a parking point detection unit that detects a parking target point in which the vehicle can be parked on the basis of the obstacle detection result; and a parking assistance control unit that guides the vehicle from a parking start point to the parking target point in accordance with a guidance path on the basis of the obstacle detection result and the parking target point detection result. The parking assistance control unit does not execute the guidance of the vehicle if vehicle traveling is detected within a period from when the vehicle arrived at the parking start point until the shift range is changed.
Patent WO-2013105408-A1 (WO)
Title: ドアロック装置
Inventor: TADA TAKESHI
IPC: E05B65/20
Filed: 2012-12-20
Abstract: 【課題】側突によるドアのラッチ解除を防ぐことが可能なドアロック装置を提供する。 【解決手段】本発明のドアロック装置では、車両が側突されてオープンレバーがドアの内装面側に押されても、オープンレバーの係合部が、金属プレートに設けられた規制部に当接してオープンレバーの前方への移動を規制することができる。これにより、従来のドアロック装置で問題になり得た車両の側突によるドアのラッチ解除を防ぐことが可能となる。
Patent WO-2013099894-A1 (WO)
Title: Substrate processing device and substrate processing method using same
Inventor: YOSHIDA HIDENARI
IPC: H01L21/324
Filed: 2012-12-26
Abstract: [Problem] To increase the substrate heating efficiency and to reduce the time needed for the substrate to acquire a higher temperature. [Solution] A substrate treatment device, provided with: an airtight processing chamber (30) comprising a cylindrical reaction tube (100) and a seal cap (110); a furnace body heating unit (200), which is a heater provided around the reaction tube (100); a cassette (410) arranged in the processing chamber (30), a plurality of glass substrates (20) being housed in the cassette (410); an electric fan (500) provided to a sealed-off lateral part inside the reaction tube (100); and a cylindrically shaped straightening vane (430) for covering the surface of the glass substrate (20) arranged at the outermost position, the glass substrate (20) being one of the glass substrates (20) arranged by being placed on the cassette (410) in the processing chamber (30), and for controlling an airflow (Q) heading toward the blade part (510) of the electric fan (500) so as to flow along the inner circumferential surface (100a) of the reaction tube (100).