baber/WOPTO huggingface dataset:
Patent KR-20040056065-A (KR)
Title: Process for dry cooling of Blast furnace slag to obtain crystalline particle
Inventor: BAE U HYEON
IPC: C04B5/00
Filed: 2002-12-23
Abstract: PURPOSE: A dry quenching method of molten blast furnace slag is provided, to obtain hydraulic crystalline slag particles. CONSTITUTION: The method comprises the steps of dropping a molten blast furnace slag to a cooling rotator through a nozzle, to allow the red heat slag particles left by the collision with the cooing rotator to collide secondly with a cooling wall; and blowing a hot wind (air) to the dropping slag particles to obtain crystalline slag particles. Preferably the temperature of a molten blast furnace slag is higher than the melting point of a blast furnace slag by 30-40 deg.C. Preferably the nozzle has a diameter of 5-7 mm; the cooling rotator has a rotation velocity of 5-10 rpm; and the hot wind has a temperature of 50-100 deg.C.
Patent KR-20040056177-A (KR)
Title: A polishing device of silicon wafer
Inventor: JUNG EUN DO
IPC: H01L21/304
Filed: 2002-12-23
Abstract: PURPOSE: An apparatus for polishing a silicon wafer is provided to stably planarize the surface of a silicon wafer have by improving an edge-roll-off effect occurring in the polishing surface of the silicon wafer. CONSTITUTION: A polishing block(10) is so installed to rotate in the lower part of the inside of the polishing apparatus. An elastic pad(110) is adhesively installed in the upper part of the polishing block by using double-sided adhesive pad(111). A polishing pad(20) is installed on the elastic pad. A polishing head(30) is installed in the upper space of a polishing chamber so as to rotate and move up/down in a space above the polishing pad. A wafer attaching plate(40) mounts the silicon wafer(W), installed under the polishing head.
Patent KR-20040056736-A (KR)
Inventor: CHOI BONG JUN
IPC: F25D17/06
Filed: 2002-12-24
Abstract: PURPOSE: A refrigerator is provided to reduce power consumption by cooling a freezer compartment and a refrigerating compartment respectively, to increase cooling speed by forcibly blowing cold air to the refrigerating compartment with a blower fan, and to defrost easily by forming the fin pitch of the refrigerating compartment area larger than the fin pitch of the freezer compartment area. CONSTITUTION: A refrigerator comprises a freezer compartment(1); a refrigerating compartment(2) installed near the freezer compartment; a barrier(3) separating the freezer compartment from the refrigerating compartment; an evaporator installed in the freezer compartment with the refrigerating cycle; a partition plate(9) dividing the heat exchange area of the evaporator into two parts; a freezer compartment cool air passage supplying cool air heat-exchanged by the evaporator in one divided part to the freezer compartment; a refrigerating compartment cool air passage supplying cool air heat-exchanged by the evaporator in the other divided part of the evaporator to the refrigerating compartment; and blower fans(105,205) installed in the freezer compartment and refrigerating compartment cool air passages to forcibly blow cool air to the compartments.
Patent KR-20020050221-A (KR)
IPC: H05K13/00
Filed: 1999-11-24
Abstract: 프린트 배선판(60) 등의 판재를 다수 적재하여, 앞 공정으로부터 다음 공정으로 반송하기 위한 반송 랙(100)으로서, 이동 트랙 또는 반송로 상에 장착되는 베이스(10)와, 이 베이스에 기울어짐 운동 가능하게 조립되어 프린트 배선판 등을 앞면에서 받치는 지탱판(20)과, 이 지탱판의 뒷쪽에서 이 지탱판에 평행하게 기울어질 수 있도록 베이스에 조립된 지지부재(30)와, 후단부에서 이 지지부재에 상하로 움직일 수 있게 조립되고, 전단부에서는 지탱판의 뒷면 측에 연결된 연결 암(40)과, 지지부재에 대한 연결 암의 후단부의 조립 위치를 조정 가능하게 규제하도록 지지부재 측에 설치한 스토퍼(50)를 구비하도록 한 것으로, 이상의 구성에 의해, 프린트 배선판 등의 크기나 두께에 대응하여 프린트 배선판의 기대어 세우는 각도의 조정을 자유롭게 행할 수 있을 뿐 아니라, 기대어 세우는 각도의 조정을 행하여도 베이스에 얹어놓을 수 있는 프린크 배선판 등의 두께의 총량이 변화하지 않는다.
Patent KR-20020012309-A (KR)
IPC: A61K31/05
Filed: 2000-07-14
Abstract: 하기 화학식 Ⅰ 로 표현되는 화합물, 또는 그의 프로드러그, 그의 약학적 허용가능 염 또는 그의 용매화물을 함유하는 Th2 분화 억제제: 
     [화학식 Ⅰ] 
     
       
     
     [식 중, 고리 A, B 및 C 는 각각 방향족 탄소 고리, 복소환 고리등이고; 
     X 는 단일 결합, -O-, -CH 2 -, -NH-, -SO- 등을 나타내고; 
     Y 는 수소, 임의 치환된 저급 알킬, 임의 치환된 저급 알케닐 등을 나타내고; 
     V 1 및 V 2 는 각각 단일 결합, -O-, -NH-, -OCH 2 - 등을 나타냄].
Patent KR-20020015076-A (KR)
Title: Method of producing melamine
IPC: C07D251/60
Filed: 2000-07-25
Abstract: The invention relates to a method of producing melamine. According to the inventive method, the NH3 containing melamine melt that is discharged from a melamine high-pressure reactor is expanded in a fluidized bed reactor that is substantially operated with NH3 as the process gas, optionally after separation of the off gases, aging and cooling the melt. The melt is cooled with solid melamine or solid inert substances and solidified. Cold NH3, preferably liquid NH3 is added to the process gas that is optionally pre-treated by means of cyclones and/or filters to purify it, thereby allowing the precipitation of solid melamine.
Patent KR-20020062966-A (KR)
Title: Endotracheal catheter and manifold assembly with valve
IPC: A61M16/04
Filed: 2000-12-04
Abstract: The present invention relates to an improved flap valve or other internal component for use with respiratory suction catheter and manifold assemblies. This flap valve or other internal component provides the assembly with an improved mechanism for cleaning the tip of the catheter without drawing an excessive amount of air from the respiration circuit to which the endotracheal catheter is attached. More specifically, the present invention relates principally to a closed suction endotracheal catheter system which provides improved cleaning of the catheter while minimizing air drawn from the patient's ventilation circuit by providing at least one protrusion on at least one surface of the flap valve or other internal component. By using a flap valve or other internal component with at least one protrusion, the flap valve or other internal component is strengthened and designed to prevent the flap from scraping mucus or other secretions from the catheter onto the distal surface of the flap during retraction.
Patent KR-20020084166-A (KR)
IPC: D02G1/12
Filed: 2001-02-22
Abstract: A method and an apparatus for stuffer box crimping a multifilament yarn, wherein the yarn is conveyed into a crimping device in two steps. In the first step, the yarn is taken in by a conveying fluid stream of a first feed nozzle at a yarn intake speed. In the second step the yarn is advanced by a conveying fluid stream of a second feed nozzle at a second yarn conveying speed into the crimping device. In this process, the second yarn conveying speed is at least the same as or greater than the intake speed.
Patent KR-20020092981-A (KR)
IPC: C07D233/74
Filed: 2001-03-13
Abstract: 본 발명은, 입자 크기가 80 내지 200메쉬인 할로겐화 하이단토인(a) 70 내지 100%, 입자 크기가 80메쉬 초과인 할로겐화 하이단토인(b) 0 내지 20% 및 입자 크기가 200메쉬 미만인 할로겐화 하이단토인(c) 0 내지 10%의 크기 분포를 갖는 분말상 할로겐화 하이단토인 생성물에 관한 것이다.  분말상 생성물은 용해 및 유동 특성이 우수하며, 당해 생성물이 사용되는 경우에 분진화를 피할 수 있다.  바람직한 할로겐화 하이단토인은 브로모클로로디메틸하이단토인이다.
Patent KR-20020091160-A (KR)
Title: 건설기계의 관리시스템 및 건설기계
IPC: E02F9/20
Filed: 2001-03-30
Abstract: 건설기계는 건설기계의 위치정보를 검지하는 위치검지장치와, 위치정보를 송신할 것인지의 여부를 판단하여 송신해야 한다고 판단하였을 때에 송신신호를 출력하는 판정장치와, 송신신호에 응답하여 그때 검지된 위치정보를 기지국에 통지하도록 송신하는 송신장치를 가진다.
Patent KR-20030001397-A (KR)
IPC: G06F17/30
Filed: 2002-01-31
Abstract: 네트워크(106)를 통해 접속된 클라이언트(103)에 대하여 배신된, 화상 정보와 적어도 고유의 처리를 규정하는 관련 정보를 하나의 취급 단위로 한 정보 화상을 휴대 전화기(113)에 재배신하는 정보 제공 장치이고, 클라이언트(103)에 배신되어 등록된 정보 화상을 화상 정보와 관련 정보로 분리하는 정보 화상 분리부(110)와, 정보 화상 분리부(110)에 의해 분리된 화상 정보와 관련 정보를 휴대 전화기(113)에 배신하는 재배신부(111)를 갖는다.
Patent KR-20030031892-A (KR)
IPC: F02M51/06
Filed: 2001-04-05
Abstract: 특히 내연기관의 연료 분사 밸브에 있는 용량성 작동기는 다양한 충전 시간에 의해 충전된다.  상기 충전 시간을 단축시키기 위해서 충전 발진 회로가 프리휠링 회로로 스위칭 오버되며, 그리고 상기 충전 시간을 연장시키기 위해서 상기 프리휠링 회로가 상기 충전 회로로 다시 스위칭 오버된다.  상기 프리휠링 회로와 충전 회로간 및 그 역으로의 스위칭 오버는 여러차레 실행될 수 있다.
Patent KR-20030011294-A (KR)
IPC: H04M1/03
Filed: 2001-03-28
Abstract: 방사가 없는 음성 시스템을 구비한 셀 폰(6)은 변환기(7)와의 접속을 위한 전기 인터페이스(9)를 사용하고, 이 변환기(7)가 폰으로부터의 전기 신호를 음향관(11, 13)을 통해 전송하기 위한 음향 음파로 변환함으로써, 유저가 전자기 방사의 위험에 노출되는 것을 감소시킬 수 있다.
Patent KR-20030004409-A (KR)
IPC: D01D5/092
Filed: 2001-05-17
Abstract: 피니쉬를 필라멘트 번들 내부를 향한 공기를 갖는 담금질 시스템 내에서 확장된 필라멘트 배열에 적용시키기 위한 장치 및 공정이다.  어플리케이터는  반경 방향식, 공기식, 횡유동식 담금질 시스템의 내부 또는 인접부에서 사용될 수도 있다.  장치는 방사구(20), 상기 방사구 아래에 위치된 담금질 영역(80)을 포함하고, 냉각 가스는 상기 담금질 영역(80) 내부의 확장된 필라멘트 배열(50) 및 담금질 영역(80) 내부 또는 아래의 어플리케이터의 내부를 향하게 되고, 상기 어플리케이터(60)는 필라멘트와 접촉하고 피니쉬를 확장된 필라멘트 배열(50)로 이송한다.
Patent KR-20030014407-A (KR)
IPC: A61P5/42
Filed: 2001-06-20
Abstract: 융합 고리형 화합물, 상기 화합물을 암 및 면역 질환과 같은 핵 호르몬 수용체 관련 질환의 치료에 사용하는 방법, 및 상기 화합물을 함유하는 제약 조성물.
Patent KR-20040062249-A (KR)
Inventor: KIM DAE WON
IPC: A23L3/00
Filed: 2003-01-02
Abstract: PURPOSE: A food oxidation system having effects of storing foods stored at a cooling chamber of a refrigerator at low temperature and retarding or preventing the progress of oxidation of frying oil and foods contained in a frying oil by allowing a negative electron to reduce the frying oil and foods is provided. It allows the frying oil to maintain freshness for a long period of time without acidification, thereby to protect a frying oil-containing food from oxidation. CONSTITUTION: The food oxidation system comprises a refrigerator(14) with a cooling system(10) and a cooling chamber(12) and a frying vessel(22) disposed on an induction heater(18) having an induction coil(16) and attached with an aluminum plate(20) at the bottom face. In the system, a module set(26) for generating high-voltage static electricity is disposed on the top face of the refrigerator and composed of a booster transformer(30) having an inlet(28) of AC220V. A primary coil(L1) of the booster transformer is connected to the inlet, each of a current regulator R1 and a feedback resistance R2 is connected to each output line(32,34) of a secondary coil(L2). The output line(32) is connected to a static electricity supply plate(40,42) disposed at the upper and lower of the cooling chamber and a static electricity supply lot(44) placed in frying oil.
Patent KR-20040065426-A (KR)
Inventor: KIM TAE DEOK
IPC: H02P6/17
Filed: 2003-01-14
Abstract: PURPOSE: An apparatus and a method for controlling BLDC motor are provided to minimize torque ripple generated in a phase commutation section of the BLDC motor. CONSTITUTION: A BLDC motor(110) comprises a power converter(104), a current sensor(112), and a controller(114). The power converter converts AC power(102) to polyphase AC power and supplies the polyphase AC power to the BLDC motor. The current sensor detects a phase current of the BLDC motor. The controller calculates an ideal phase converting time of the BLDC motor and a real phase converting time of the phase current and controls the BLDC motor in such a manner that the real phase converting time follows the ideal phase converting time.
Patent KR-20040023475-A (KR)
Inventor: KIM KYUNG MOK
IPC: C02F1/32
Filed: 2003-01-27
Abstract: PURPOSE: Provided is a water purifier using a UV-C germicidal lamp, which has a first and a second quartz tubes with filters therein, respectively, around a UV-C lamp and removes germs in water in short time while the water is passing through the quartz tubes by irradiating UV-C rays to the quartz tubes. CONSTITUTION: The water purifier comprises a water tank(101) for storing influent water from a tap(10); a main body with a housing(100), a plurality of UV-C lamps(200) installed in the housing(100), filters(30) wrapping the UV-C lamps(200), and a pollutant detection sensor(65) installed above the filters(30); a cover assembly(60) with a power supply unit(50) for supplying power to the UV-C lamps(200), a control unit(61) operating by being controlled in response to a signal detected by the sensor(65), a lamp(63), and a display unit(62) for displaying the signal from the sensor(65); and a packing unit(300) for packing the main body and the cover assembly(60) to be sealed.
Patent KR-20040070416-A (KR)
Inventor: CHUN JIN SEONG
IPC: B21F27/06
Filed: 2003-02-03
Abstract: PURPOSE: An apparatus for manufacturing gabion continuously and automatically is provided to automatically manufacture hexagonally twisted wire net by continuously supplying scores of strands of wire net and alternately twisting two strands of wire net at a time in a zigzag shape. CONSTITUTION: The apparatus a plural steel wire supply parts comprising first bobbin(101), second bobbin(102) arranged in rear of the first bobbin, and a bobbin housing(201) in which the first bobbin is received, and on the outer circumference of which transfer nozzle pipes(204) penetrated by the steel wire supplied from the second bobbin, rotation rails, chains(203) and rotation pins(202) for rotating the bobbin housing and transfer hooks for transferring the transfer nozzle pipes are installed; and a plural twist gear parts comprising a twist gear(405) through which steel wires supplied from the first bobbin and the second bobbin pass, and which is divided into upper and lower parts in a semicircular shape, wherein a plurality of first grooves for binding the rotation pins and second groove to which the transfer nozzle pipes are removably attached are formed on the side surface of the chains installed on the outer circumference of the bobbin housing, wherein the transfer nozzle pipes of the steel wire supply parts and the twist gear are rotated at the same speed and in the same direction, and wherein the transfer nozzle pipes of the steel wire supply parts and the twist gear are alternated side to side in the same direction and distance.
Patent KR-20030029091-A (KR)
Inventor: CHO HWA GEON
Filed: 2003-03-18
Abstract: PURPOSE: A method for managing a call electronic bond business is provided to register and issue a call electronic bond having contents for treating a call money institution as a debtor and treating a call loan institution as a creditor in an electronic bond registration ledger of a financial telecommunications and clearings institute through a transaction bank Internet banking and to deposit money in an account of the call loan institution in an expiration date of the call electronic bond. CONSTITUTION: A call money institution(10) performs a log-in process to an Internet banking of a transaction bank through an Internet network. The call money institution(10) selects a call electronic bond menu and inputs a kind of a call electronic bond, money, expiration date, a call loan institution, a transaction bank(20) of the call loan institution, a receipt account number, and so on. The call money institution(10) confirms the inputted contents, executes an electronic signature based on a certificate of authentication, and requests an issue of the call electronic bond. The transaction bank(20) endows a call electronic bond number. The transaction bank(20) requests registration of issued request details to a call electronic bond ledger(31) of a financial telecommunications and clearings institute(30) which checks whether a transaction account of the call money institution(10) exists in the transaction bank(20). If the transaction account exists, the financial telecommunications and clearings institute(30) registers an issue in the call electronic bond ledger(31). The financial telecommunications and clearings institute(30) transmits data with respect to the registered result to the transaction bank(20). The transaction bank(20) responds to the issue of the call electronic bond to the call money institution(10).
Patent KR-20030078709-A (KR)
Title: 자기 기억 장치
IPC: G11B5/39
Filed: 2003-03-27
Abstract: 자기 기억 장치는 통형의 자기 고정층과, 상기 자기 고정층의 외부 표면을 덮는 절연막과, 상기 절연막을 사이에 두고 상기 자기 고정층과 대향하여 상기 절연막의 표면을 덮는 자기 자유층을 포함하고, 또한 상기 자기 고정층의 자화 방향이 상기 통형의 중심축 방향에 대하여 평행한 자기 저항 소자를 구비하고 있다.
Patent KR-20030036405-A (KR)
Inventor: CHO CHAE RYONG
IPC: H01L29/78
Filed: 2003-03-28
Abstract: PURPOSE: A method for fabricating a heterogeneous junction structure composed of ferroelectric and a gallium nitride semiconductor layer is provided to form a stable heterogeneous junction structure having a ferroelectric Bi-La-Ti(BLT) thin film of a layered structure type on a GaN substrate capable of adapting to a next-generation electro-optic device and an electronic device by using large polarization caused by ferroelectricity and a high dielectric constant of a ferroelectric gate. CONSTITUTION: A GaN thin film(100) is deposited on a sapphire substrate. The GaN thin film is separated from the sapphire substrate. The separated GaN thin film is bonded to the upper surface of either one of a silicon substrate or a GaAs substrate. A BLT oxide-based ferroelectric thin film of a layered structure type is formed on the GaN thin film through one of a pulsed laser deposition(PLD) method or a sol-gel method.
Patent KR-20040084470-A (KR)
Inventor: KO UK HYEON
IPC: H01L21/28
Filed: 2003-03-28
Abstract: PURPOSE: A method for forming a contact of a semiconductor device is provided to restrain the damage of a gate electrode by forming a passivation layer on the gate electrode. CONSTITUTION: Gate electrodes(45) with a hard mask(47) and a spacer are formed on a substrate(41). Landing plugs(53) are formed between the gate electrodes. A passivation layer(54) made of a nitride layer is formed on the gate electrode. Bit lines(59) are formed to connect the landing plug through the first interlayer dielectric(55). A storage node contact hole(63) is then formed to expose the landing plug through the second interlayer dielectric(61).
Patent KR-20040088210-A (KR)
Inventor: CHOI JAE SEOK
IPC: B60G7/02
Filed: 2003-04-09
Abstract: PURPOSE: A Macpherson suspension for a vehicle is provided to improve riding comfort of passengers and the quality of the vehicle by varying the buffering property of the suspension with an elastic unit according to each displacement range in large or small displacement during traveling. CONSTITUTION: A Macpherson suspension is composed of a lower arm(100) hinge-combined with the end of a knuckle(400) connected to a strut(500); a vehicle body mounting bracket fixing the other end of the lower arm to a vehicle body(600) by a hinge; and an elastic unit(300) fastened to the vehicle body mounting bracket and contacted to the lower arm in large displacement. The elastic unit is composed of a leaf spring, and a buffering member(310) is formed in the other free end of the elastic unit. The lower arm is contacted to the free end of the elastic unit by turning the lower arm hinge-combined with the vehicle body.
Patent KR-20030082480-A (KR)
IPC: A44B11/00
Filed: 2003-04-17
Abstract: A two-part buckle (10) is provided with springing structure (44,62) associated with strap securing structures (40,50) of the buckle parts (12,14). The springing structure (44,62) allowing deflection within the buckle part (12,14) to at least partly absorb tensile forces applied to the buckle (10) by the strap. <IMAGE>
Patent KR-20040091813-A (KR)
Inventor: CHO YEONG JU
IPC: B25B27/073
Filed: 2003-04-22
Abstract: PURPOSE: A screw disjointing apparatus is provided to easily detach a screw from a part without the breakage of the part when the head of the screw is broken partially. CONSTITUTION: A screw disjointing apparatus is composed of a main rod(100), a fixing mount(200) installed at one end of the main rod and fixed to one side of a part, a push rod(300) installed at the other end of the main rod, a bit, a bit holder(440) for holding the bit, and a rotary handle. The bit is installed between the fixing mount and the push rod of the main rod, and is engaged with a screw mounted to the part. The bit holder penetrates through the main rod vertically, and is coupled to the main rod. The rotary handle is coupled to the top of the bit holder and rotates the bit. A sliding groove(110) is formed longitudinally on the main rod. The bit holder is fit into the sliding groove by a bit holder supporter, and slides along the main rod longitudinally.
Patent KR-20040094220-A (KR)
Inventor: SO CHI JAE
IPC: F23K5/00
Filed: 2003-05-02
Abstract: PURPOSE: A combustion system using a gas generator is provided to efficiently burn oxygen gas and hydrogen gas by injecting steam into the upper part of a burner. CONSTITUTION: In a combustion system using a gas generator, a shortwave generator(5) is installed at the bottom of a case, and has an N-pole electromagnet(6), an S-pole electromagnet(7), and a steel plate(8) disposed between the electromagnets. Oxygen gas and hydrogen gas are supplied to the case through a gas supply pipe(23) having an electronic valve, and pass through ceramic balls(21,22) in the case. An auxiliary water tank(26) is coupled to one side of a water circulation pipe(25) for circulating water in the case, and has a float type valve. A nozzle is connected to the gas supply pipe, and has a bolt unit at the outer surface. A space is formed at the wall of a combustion chamber in a burner. A hot water pipe is connected to the water circulation pipe by an electronic valve.
Patent KR-20040096221-A (KR)
Inventor: CHOI YEON MO
IPC: A23B7/04
Filed: 2003-05-07
Abstract: PURPOSE: An apparatus for drying agricultural and fishery products is provided, thereby improving drying efficiency of agricultural and fishery products, equally drying the upper and lower parts, reducing the energy amount used, and carrying out the drying process in the rainy season. CONSTITUTION: The apparatus for drying agricultural and fishery products comprises drying chambers(1, 2) which are separated by partition(2p) for air circulation, has a heating device, and drys the agricultural and fishery products; cooling chambers(3, 4) which are positioned in both sides of the drying chambers(1, 2), separated by partitions(3a, 4a) and has a cooling device; and ventilating openings(3b, 3c, 4b, 4c) which are equally installed in both partitions(3a, 4a), have a plurality of ventilation fans and circulates air from cooling chambers to drying chambers.
Patent KR-20040097613-A (KR)
Inventor: KIM GYEONG HWAN
IPC: B01D46/12
Filed: 2003-05-12
Abstract: PURPOSE: To purify indoor air and ventilate the indoor air without consuming energy by directly allowing outdoor air to be flown in or allowing filtered outdoor air to be flown in with an air purifier having ventilating function. CONSTITUTION: The air purifier comprises a main body (10), an outdoor air louver (20) equipped at the main body to allow the outdoor air to be flown in or cut off, an inlet (10a) inhaling indoor air, a filter part (30) consisting of many filters and filtering inhaled indoor air or flown in outdoor air, a cross-flow fan (40) inhaling the filtered indoor air or outdoor air and compulsorily ventilating it, a by-pass (50) allowing the outdoor air flown in through the outdoor louver to directly be flown in to the fan without passing through the filter part, a damper (60) controlling a flow path of the outdoor air flown in through the outdoor air louver and an exit (10b) discharging the air ventilated by the fan to the indoor.
Patent KR-20030089508-A (KR)
Title: 화학적 기계 연마 방법 및 화학적 기계 연마 장치
IPC: H01L21/304
Filed: 2003-05-16
Abstract: 본 발명은 연마중에 웨이퍼 표면이 산화되어서 전기 전도율이 변화하고, 그것이 연마율의 변화에 이어지는 것을 방지하는 전해 연마를 부가한 화학적 기계 연마방법 및 그 장치를 제공하는 것을 목적으로 한다. 
     본 발명은 연마수단(연마부)(16)을 대기와는 다른 조성의 분위기의 챔버(13)내에 밀폐수용하고, 연마수단(연마부)(16)의 분위기를 대기와는 서로 다른 조성의분위기로 함과 동시에, 웨이퍼(W)와 연마패드(34a) 사이에 전압을 인가해서 전해작용을 행하면서 상기 웨이퍼(W)를 연마하도록 구성하였다. 이에 따라 연마수단(연마부)(16)은 산소가 극도로 적은 분위기가 되어 웨이퍼(W)의 표면이 산화되지 않아 연마율을 안정하게 하였다.
Patent KR-20040100462-A (KR)
Inventor: KIM DAE JUNG
IPC: C02F5/00
Filed: 2003-05-23
Abstract: PURPOSE: To provide a method for calculating required capacities of pump and tank in a dosing system of chemical for removing dissolved oxygen from feed water, wherein capacities of the pump and the tank required when dosing chemical for preventing corrosion and scale generated in pipes due to dissolved oxygen are easily calculated. CONSTITUTION: The method comprises a step (S101) of calculating an amount of dissolved oxygen contained in feed water supplied per a unit time; a step (S102) of calculating quantity of required chemical; a step (S103) of calculating quantity of diluted water; and a step (S104) of calculating capacity of pump, wherein the chemical is any one selected from hydrazine, phosphate and ammonia, wherein dilution ratio of the diluted water is 0.5%, and wherein the method further comprises a step of calculating capacity of the tank by multiplying the pump capacity by the minimum operation time of chemical tank.