baber/WOPTO huggingface dataset:
Patent WO-2020145526-A1 (WO)
Inventor: LEE MINGYU
IPC: G01S13/08
Filed: 2019-12-11
Abstract: Presented is a method capable of stably and flexibly performing ranging with a plurality of devices. A method for operating a first device for performing ranging through an ultra-wide band (UWB), according to one embodiment, comprises the steps of: transmitting a first ranging control (RC) frame to a second device; performing ranging with the second device during the number of ranging rounds determined on the basis of the first ranging control frame; changing at least one ranging parameter on the basis of a change request received from the second device; and transmitting a second ranging control frame including at least one changed ranging parameter.
Patent WO-2020130670-A1 (WO)
Inventor: KWAK YOUNG-JIN
IPC: C23C14/24
Filed: 2019-12-19
Abstract: La présente invention concerne une tôle d'acier plaquée qui peut être utilisée dans des véhicules, des appareils ménagers, des matériaux de construction et similaires, et plus spécifiquement, une tôle d'acier plaquée hétérogène ayant une couche galvanisée formée sur une surface de celle-ci et une couche plaquée de zinc-magnésium formée sur l'autre surface de celle-ci.
Patent WO-2020149572-A1 (WO)
Inventor: LEE DO HOON
IPC: A45D40/14
Filed: 2020-01-09
Abstract: 본 발명은 편리한 리필 구조를 갖는 립스틱 용기에 관한 것으로, 더욱 상세하게는 회전체에 리필버튼을 형성하고 상기 리필버튼의 작동을 통해 립스틱과 안내관 및 리드링이 회전체로부터 용이하게 분리되도록 하여 립스틱을 위생적이면서 간편하게 리필 할 수 있도록 한 편리한 리필 구조를 갖는 립스틱 용기에 관한 것이다. 본 발명의 일 실시 예에 따른 립스틱 용기는 버튼삽입홀이 형성된 회전체; 상기 회전체의 일측에 탈착 가능하게 결합되며, 안내슬릿이 형성된 안내관; 상기 안내관의 내측에 결합되며, 승강돌기가 형성되고 립스틱이 부착된 립스틱 홀더; 상기 안내관의 외측에 결합되며, 나선홈이 형성된 리드링 및 상기 회전체의 버튼삽입홀에 일정구간 이동 가능하게 결합되며, 눌림 작동에 의해 안내관을 밀어내면서 상기 안내관과 함께 립스틱 홀더와 리드링을 회전체로부터 분리하는 리필버튼을 포함하여 구성될 수 있다.
Patent WO-2020145674-A1 (WO)
Inventor: LEE TAE SEOB
IPC: C08F2/50
Filed: 2020-01-09
Abstract: La présente invention concerne un copolymère séquencé de poly(amide-imide), et une composition et un film polymère comprenant chacun celui-ci, le copolymère séquencé de poly(amide-imide) ayant un groupe fonctionnel présentant une structure particulière substituée dans au moins une unité telle qu'une unité de répétition imide et une unité de répétition amide.
Patent WO-2020175793-A1 (WO)
Title: 광학 디바이스
Inventor: PARK JI HOON
IPC: G02B1/00
Filed: 2020-01-14
Abstract: 본 출원은 광학 디바이스에 대한 것이다. 본 출원은, 캡슐화된 구조에서 외부 전원이 연결되었을 때도 단락 등의 불량을 예방할 수 있는 광학 디바이스를 제공한다.
Patent WO-2021107265-A1 (WO)
Title: Procédé et appareil permettant de mesurer des interférences dans un système de communication sans fil
Inventor: CHOI SEUNGHOON
IPC: H04W56/00
Filed: 2020-01-21
Abstract: La présente invention concerne un procédé de fonctionnement et un appareil permettant de mesurer une interférence d'un équipement utilisateur dans un système de communication sans fil. Le procédé de fonctionnement consiste à recevoir des informations de configuration pour une mesure d'interférence, à partir d'une station de base d'une cellule de desserte, à détecter une synchronisation de réception de liaison descendante sur la base d'un signal de liaison descendante reçu en provenance de la station de base, à déterminer une synchronisation de mesure d'interférence sur la base de la synchronisation de réception de liaison descendante et d'un décalage d'avance temporelle (TA) de la cellule de desserte, et à effectuer une mesure d'interférence selon les informations de configuration au moment de la synchronisation de mesure d'interférence déterminée.
Patent WO-2021125476-A1 (WO)
Title: 복수의 단위 모듈과 bms 어셈블리를 포함하는 서브 팩 및 이를 포함하는 배터리 팩
Inventor: LEE JUNG-HOON
IPC: H01M10/42
Filed: 2020-07-06
Abstract: 본 발명의 일 실시예에 따른 서브 팩은, 복수의 단위 모듈을 포함하는 배터리 모듈 어셈블리; 및 상기 배터리 모듈 어셈블리의 길이 방향 일 측에 결합되는 BMS 어셈블리;를 포함하는 서브 팩에 있어서, 상기 배터리 모듈 어셈블리는, 길이 방향을 따라 연결되는 복수의 단위 모듈을 포함하는 제1 서브 모듈; 및 복수의 단위 모듈을 포함하며, 상기 단위 모듈의 폭 방향을 따라 제1 서브 모듈과 연결되는 제2 서브 모듈; 을 포함하고, 상기 BMS 어셈블리는, 상기 제1 서브 모듈의 충/방전을 제어하는 제1 BMS; 상기 제2 서브 모듈의 충/방전을 제어하는 제2 BMS; 및 상기 제1 BMS와 제2 BMS의 둘레를 감싸며 상기 배터리 모듈 어셈블리의 길이 방향 일 측에 체결되는 BMS 프레임; 을 포함한다.
Patent WO-2021010751-A1 (WO)
Inventor: ONGGOSANUSI EKO
IPC: H04B7/06
Filed: 2020-07-15
Abstract: Methods and apparatuses for beam reporting. A method for operating a user equipment (UE) includes receiving, from a base station, configuration information on a beam reporting and a set of uplink (UL) reporting resources; receiving at least one reference signal (RS) resource; measuring the at least one RS resource for calculating the beam reporting; and transmitting the beam reporting on at least one UL reporting resource from the set of UL reporting resources after an event occurs.
Patent WO-2021251545-A1 (WO)
Title: Projected dimension measurement device
Inventor: KOH BOK KYU
IPC: G01B9/08
Filed: 2020-07-28
Abstract: The present invention relates to a projected dimension measurement device wherein the dimensions of an object to be measured are automatically measured through a projection image of the object and corrected by comparison with the designed dimensions of the object. Since the dimensions of an object to be measured are automatically measured, there is little error and thus the accuracy of dimension measurement can be increased, and the dimension measurement is rapidly performed and thus dimension correction can be simply and efficiently achieved.
Patent WO-2021040374-A1 (WO)
Title: Clothes treatment apparatus
Inventor: KIM WOORE
IPC: D06F58/26
Filed: 2020-08-25
Abstract: According to embodiments of the present invention, provided is a clothes treatment apparatus comprising: a tub; a drum, which accommodates clothes, is made from a metal material, and is rotatably provided in the tub; and an induction module provided on the outer surface of the tub so as to generate an electromagnetic field, thereby heating the circumferential surface of the drum, wherein the induction module includes: a coil around which a wire is wound so that an electric field is generated by the application of an electric current thereto; a base housing mounted on the outer peripheral surface of the tub so as to accommodate the coil; and a blocking part disposed between the base housing and the tub so as to block the electric current when being heated to or above a preset temperature by the amount of heat transmitted from the coil and/or the amount of heat transmitted from the drum. Embodiments of the present invention provide the clothes treatment apparatus, which detects overheating of each of the drum and the coil through one blocking part so as to block the electric current before the clothes treatment apparatus is heated up to a dangerous temperature, thereby ensuring safety.
Patent WO-2021045577-A1 (WO)
Title: Multi-sensor-based unmanned aerial vehicle and method for controlling same
Inventor: KWON WOONG
IPC: B64D47/00
Filed: 2020-09-04
Abstract: A multi-sensor based unmanned aerial vehicle and a method for controlling the same. The unmanned aerial vehicle may include: a sensor part configured to acquire inertia information or position information of the unmanned aerial vehicle; and a controller. The controller is configured to estimate the position of the unmanned aerial vehicle by applying the information acquired by the sensor part to an extended Kalman filter and control movement of the unmanned aerial vehicle, based on the estimated position of the unmanned aerial vehicle. The sensor part includes: an inertia sensor configured to acquire the inertia information of the unmanned aerial vehicle; a tag recognition sensor configured to recognize a tag attached to a rack and acquire absolute position information of the unmanned aerial vehicle; and an image sensor attached to the unmanned aerial vehicle so as to acquire an image of the movement environment of the unmanned aerial vehicle.
Patent WO-2021066509-A1 (WO)
Inventor: OH JUNHWA
IPC: G06K9/00
Filed: 2020-09-29
Abstract: An electronic device is provided. The electronic device may comprise: a display; a sensing panel; and a processor operatively connected to the display and the sensing panel, wherein the processor: displays content on the display; on the basis of a handwriting input sensed by the sensing panel, displays an object corresponding to the handwriting input on the content; when a first keyword is recognized on the basis of at least a part of the handwriting input, performs character recognition for an additional handwriting input that is input after the input of the first keyword; and when a character recognition termination event is identified while the character recognition is being performed, provides a text obtained through the character recognition as a hashtag for the displayed content.
Patent WO-2021085984-A1 (WO)
Inventor: LEE DONG JIN
IPC: H04L12/24
Filed: 2020-10-27
Abstract: According to one embodiment of the present invention, a method by which a user plane function (UPF) node including a plurality of UPF instances performs quality-of-service (QoS) monitoring comprises: a step of performing QoS monitoring with respect to each of the plurality of UPF instances; and a step of storing results of the QoS monitoring, wherein each of the plurality of UPF instances may process at least one from among a packet detection rule (PDR), a forwarding action rule (FAR), a QoS enforcement rule (QER), and a usage reporting rule (URR).
Patent WO-2021177546-A1 (WO)
Inventor: MUKHTAROV FARID
IPC: F21V8/00
Filed: 2020-11-13
Abstract: A backlight unit preventing light leakage between local dimming areas and including a plurality of light-emitting elements arranged in a matrix form comprises: a first light-emitting element group including a plurality of first light-emitting elements for emitting light on the basis of a first control signal; and a second light-emitting element group including a plurality of second light-emitting elements for emitting light on the basis of a second control signal, wherein four light-emitting elements, which are most adjacent to some of the first light-emitting elements, respectively, from among the plurality of first light-emitting elements, include at least two second light-emitting elements belonging to the second light-emitting element group.
Patent WO-2022158627-A1 (WO)
Title: Method for preparing bipv color glass
Inventor: CHOI YOON SEUK
IPC: C03C17/32
Filed: 2021-01-27
Abstract: A method for preparing a BIPV color glass according to the present invention comprises: a first step of mixing an epoxy prepolymer and a pearl pigment to prepare a mixture for coating; a second step of introducing the mixture for coating on a substrate through spin coating to prepare an uncured coating layer; and a third step of curing the uncured coating layer.
Patent WO-2021230550-A1 (WO)
Title: Seat board for posture correction
Inventor: YIM DONG KYOON
IPC: A47C9/00
Filed: 2021-05-03
Abstract: The present invention relates to a seat board for posture correction, capable of correcting, when sitting on the seat board placed on a driver's seat, a chair and the like, the sitting posture of a seated person by supporting the thighs and buttocks of the seated person so as to guide the seated person to straighten the back and the waist, and capable of improving convenient storage and portability.
Patent WO-2022014855-A1 (WO)
Title: Method for producing bone graft material, and bone graft material composition
Inventor: PARK JUNG BOK
IPC: A61F2/28
Filed: 2021-05-28
Abstract: The present invention relates to a bone graft material composition, more specifically to a bone graft material composition comprising bone graft material, an adhesiveness-increasing agent having an adhesive property, and hydroxypropyl methylcellulose as a cross-linking agent binding to the bone graft material and adhesiveness-increasing agent.
Patent WO-2022191367-A1 (WO)
Title: Method, server, and computer program for classifying patients with severe cognitive impairment by analyzing brainwave data
Inventor: KANG SEUNGWAN
IPC: G06N3/04
Filed: 2021-08-06
Abstract: Provided are a method, a server, and a computer program for classifying patients with severe cognitive impairment by analyzing brainwave data. A method according to various embodiments of the present invention for classifying patients with severe cognitive impairment by analyzing brainwave data is a method performed by a computing device, which may comprise: a brainwave collection step for collecting brainwave data of a plurality of patients; a first classification step for classifying the plurality of patients, by analyzing the collected brainwave data, into a group with severe cognitive impairment and a group without severe cognitive impairment; a second classification step for classifying the patients in the group without severe cognitive impairment into a normal group and a group with amnestic mild cognitive impairment (aMCI); and a third classification step for classifying the patients in the normal group into a group within normal limits and a group with latent cognitive impairment and classifying the patients in the group with aMCI into a group with non-Alzheimer's disease mild cognitive impairment and a group with pre-dementia mild cognitive impairment.
Patent WO-2022045831-A1 (WO)
Title: Method, msgin 5g server, and non-msgin 5g gateway for providing messaging service in 5g system
Inventor: PATTAN BASAVARAJ JAYAWANT
IPC: H04W4/12
Filed: 2021-08-27
Abstract: The present disclosure relates to a pre-5th generation (5G) or 5G communication system to be provided for supporting higher data rates beyond 4th generation (4G) communication system such as long term evolution (LTE). Embodiments herein provide a method, an MSGin5G server, and non-MSGin5G gateway for providing messaging service in 5 th  generation system. The provided method provides a TRF which can assist the MSGin5G server to determine a transport service(s), a GWSF which can assist the MSGin5G server to determine appropriate gateway for the determined transport service(s). Further, the provided method includes a TF to translate the MSGin5G message to a legacy 3GPP message format or a non-3GPP message format.
Patent WO-2022092530-A1 (WO)
Inventor: BOK CHANSIK
IPC: G10L17/20
Filed: 2021-08-31
Abstract: An electronic device according to one embodiment of the present disclosure comprises: an interface unit connectible to an external device; and a processor which, on the basis of a first user voice containing a start command received by the electronic device, identifies a first noise level corresponding to the first user voice received by the electronic device, identifies any one first recognition device with a high first noise level corresponding to the first user voice from among a plurality of recognition devices including the external device and respective electronic devices that identified the first user voice as the start command, and on the basis of a second recognition device with a high second noise level corresponding to a second user voice from among the plurality of recognition devices, performs a control operation to perform a function corresponding to the second user voice received subsequent to the first user voice.
Patent WO-2022050780-A1 (WO)
Inventor: JEON BO-RA
IPC: H01M10/6556
Filed: 2021-09-03
Abstract: A battery pack of the present invention comprises: a plurality of battery modules; a base plate having the plurality of battery modules positioned thereon; a front frame, which comprises a front cover portion covering the front of the base plate, and a front plate portion extending rearward from one side of the front cover portion, and in which the front cover portion and the front plate portion are integrally formed; a back frame, which comprises a back cover portion covering the back of the base plate, and a back plate portion extending forward from one side of the back cover portion, and in which the back cover portion and a back plate are integrally formed; and a first side frame covering the left side of the base plate, and a second side frame covering the right side of the base plate.
Patent WO-2023054793-A1 (WO)
Inventor: YEOM JI WOON
IPC: G02B5/32
Filed: 2021-11-03
Abstract: L'invention concerne une structure optique dans laquelle une région autorisée par pupille qui est observable à l'aide d'une lentille d'hologramme multiplexé par angle, qui est un élément optique holographique, peut être étendu, et un appareil de fabrication de l'élément optique holographique. L'appareil de fabrication d'un élément optique holographique, selon un mode de réalisation de la présente invention, comprend : une source de lumière émettant une ou plusieurs lumières de pixel ; une unité de division divisant chacune de la ou des lumières de pixel émises en un faisceau de référence et un faisceau de signal à émettre dans différentes directions ; une première unité de réglage de direction qui règle la direction du faisceau de signal divisé par l'unité de division et émise, et qui est prévue pour être mise en rotation vers le haut, vers le bas, vers la gauche et vers la droite ; un premier élément optique monté dans la première unité de réglage de direction de façon à générer une lumière divergente du faisceau de signal de telle sorte qu'une lumière parallèle du faisceau de signal incident peut correspondre à la lumière diffusée d'un pixel ; une seconde unité de réglage de direction qui règle la direction du faisceau de référence divisé par l'unité de division et émise, et est conçue pour être mise en rotation vers le haut, vers le bas, vers la gauche et vers la droite ; un second élément optique monté dans la seconde unité de réglage de direction de façon à générer une lumière divergente du faisceau de référence de telle sorte qu'une lumière parallèle du faisceau de référence incident peut correspondre à la lumière diffusée du pixel ; et un support holographique dans lequel des motifs d'interférence de la lumière divergente du faisceau de signal et de la lumière divergente du faisceau de référence sont enregistrés, le motif d'interférence du faisceau de signal ayant une direction d'incidence ajustée et le motif d'interférence du faisceau de référence ayant une position focale ajustée étant à nouveau enregistrés, et la direction d'incidence du faisceau de signal et la position focale du faisceau de référence étant ajustées par rapport à la même région. Par conséquent, la région oculaire à travers laquelle un contenu de réalité augmentée peut être observé peut être étendue, ce qui permet à un utilisateur d'observer un contenu dans une plage plus large.
Patent WO-2022119303-A1 (WO)
Title: 매핑 함수를 이용하는 포인트 클라우드 코딩 장치 및 방법
Inventor: AHN YONG JO
IPC: G06T9/00
Filed: 2021-12-01
Abstract: 매핑 함수를 이용하는 포인트 클라우드 코딩 장치 및 방법에 관한 개시로서, 본 실시예는, 포인트 클라우드의 속성 값을 압축하기 위해, 속성 값의 분포에 기초하여 비선형 매핑 함수인 구간별 선형 함수를 생성하고, 이러한 비선형 매핑 함수를 이용하여 속성 값을 제한된 범위 내의 값으로 매핑하는 포인트 클라우드 코딩 장치 및 방법을 제공한다.
Patent WO-2022169162-A1 (WO)
Inventor: JANG KILJAE
IPC: H01Q1/24
Filed: 2022-01-24
Abstract: 차폐 시트의 전체 영역 중에서 안테나 시트에 실장된 자석과 중첩되는 일부 영역을 타발하여 자석에 의해 차폐 시트가 자기포화(자화)되는 것을 방지하도록 한 안테나 모듈을 제시한다. 제시된 안테나 모듈은 방사 패턴이 형성되고, 방사 패턴의 외주를 따라 형성된 자석 어레이가 삽입된 안테나 시트 및 안테나 시트에 적층되고, 자석 어레이와 중첩된 영역에 중첩 방지 홀이 형성된 차폐 시트를 포함한다.
Patent WO-2022182195-A1 (WO)
Title: 무선 전력 전송 시스템에서 데이터 전송 충돌 방지 방법 및 장치
Inventor: KIM JAEYEOL
IPC: H04L9/40
Filed: 2022-02-25
Abstract: 본 명세서(present disclosure) 는 무선 전력 전송 시스템에서 무선 전력 전송기에 의해 수행되는 데이터 패킷 정보를 전송하는 방법에 있어서, 전력 전달 페이즈(power transfer phase)에 진입하고, 상기 전력 전달 페이즈 동안 무선 전력 수신기로부터 복수의 CE(control error) 패킷들을 수신하고, 상기 복수의 CE 패킷들 간의 인터벌을 결정하고 및 상기 인터벌에 기반하여 상기 전력 전달 페이즈 동안 상기 무선 전력 수신기에게 상기 데이터 패킷 정보를 전송하되, 상기 데이터 패킷 정보의 길이는 상기 인터벌의 길이에 기반하여 결정되는 것을 특징으로 하는 방법 및 장치를 제공한다.
Patent WO-2022191660-A1 (WO)
Inventor: KOO YEONG MIN
IPC: H02K3/34
Filed: 2022-03-11
Abstract: 실시예는 샤프트; 상기 샤프트에 결합된 로터; 상기 로터에 대응되게 배치되는 스테이터를 포함하고, 상기 스테이터는 스테이터 코어, 상기 스테이터 코어에 결합된 인슐레이터 및 상기 인슐레이터 상에 배치되는 코일을 포함하고, 상기 코일은 상기 인슐레이터에 권선되는 제1 코일 및 제2 코일을 포함하고, 상기 제1 코일의 직경과 상기 제2 코일의 직경은 서로 상이한 모터를 제공한다.
Patent WO-2022260261-A1 (WO)
Title: Electronic device and control method therefor
Inventor: KIM GYONYUN
IPC: H05B45/33
Filed: 2022-04-12
Abstract: An electronic device is disclosed. The electronic device comprises: a memory in which an input image is stored; a backlight unit including a plurality of backlights; a driving unit for driving the backlight unit; and a processor for identifying, on the basis of luminance information about each of the plurality of backlights, the number of time intervals in which each of the plurality of backlights is to be turned on from among a plurality of time intervals included in a backlight dimming interval, and controlling the driving unit so that the plurality of backlights are turned on during the identified number of time intervals by variously changing the times at which the plurality of backlights are turned on.
Patent WO-2022250328-A1 (WO)
Title: 전자 장치 및 전자 장치의 제어 방법
Inventor: KIM MUNSEOK
IPC: H04N21/45
Filed: 2022-05-06
Abstract: 전자 장치가 개시된다. 본 전자 장치는 디스플레이, 영상 컨텐츠에 대한 시청 시간에 기초하여 결정된 사용자의 선호도 정보가 저장된 메모리 및 추천 채널을 표시하기 위한 사용자 명령이 입력되면, 사용자 명령이 입력된 시점에 선호도 정보에 대응되는 영상 컨텐츠를 제공하는 채널을 식별하고, 식별된 채널에 대한 정보를 표시하도록 디스플레이를 제어하는 프로세서를 포함하며, 프로세서는, 사용자 명령이 입력된 시점에 선호도 정보에 대응되는 영상 컨텐츠를 제공하는 채널이 복수 개인 경우, 식별된 복수의 채널 각각에서 제공되는 영상 컨텐츠의 시작 시간 및 종료 시간 중 적어도 하나에 기초하여 식별된 복수의 채널 중 하나의 채널을 식별한다.
Patent WO-2022245093-A1 (WO)
Title: Procédé pour des améliorations apportées et se rapportant à des services de proximité
Inventor: Shariat Mehrdad
IPC: H04W88/04
Filed: 2022-05-17
Abstract: La divulgation concerne un système de communication 5G ou 6G destiné à prendre en charge un débit supérieur de transmission de données. La présente divulgation concerne un procédé de commande d'un réseau 5G réalisé par une entité de réseau dans une communication sans fil, le procédé consistant à définir un service de proximité (ProSe), le comportement d'au moins un premier UE ou d'un deuxième UE par rapport à une zone de service restreinte.
Patent WO-2023075063-A1 (WO)
Inventor: AN DEOK-WOO
IPC: A61B17/80
Filed: 2022-06-10
Abstract: 본 발명은 연골 손상 시 연골을 봉합하는 봉합사를 고정플레이트에 직접 봉합할 수 있는 구조를 가지는 연골 봉합사용 고정플레이트(100)로, 상기 고정플레이트(100)는 바닥면에 근육과 뼈를 함께 봉합할 수 있도록 일측에 개구된 개구홈(111)이 형성되며, 상기 개구홈(111)에 적어도 하나 이상의 봉합홀(112)이 관통 형성된 구조를 같는다.
Patent WO-2022260467-A1 (WO)
Title: Method and system for weighted knowledge distillation between neural network models
Inventor: HSU YENCHANG
IPC: G06N3/04
Filed: 2022-06-10
Abstract: A method of training a student model includes providing an input to a teacher model that is larger than the student model, where a layer of the teacher model outputs a first output vector, providing the input to the student model, where a layer of the student model outputs a second output vector, determining an importance value associated with each dimension of the first output vector based on gradients from the teacher model and updating at least one parameter of the student model to minimize a difference between the second output vector and the first output vector based on the importance values.
Patent WO-2022260473-A1 (WO)
Title: Method for forming barrier layer
Inventor: CHO IL HYONG
IPC: C23C16/56
Filed: 2022-06-10
Abstract: A method for forming a barrier layer, according to an embodiment of the present invention, comprises: a step of spraying a gas containing NH 3  such that the gas is adsorbed on a substrate; a primary purge step of spraying a purge gas toward the substrate after stopping spraying the gas containing NH 3 ; a step of generating plasma by using a H 2  gas; a step of spraying a gas containing Ti toward the substrate so as to form a TiN thin film on the substrate; and a secondary purge step of spraying the purge gas toward the substrate after stopping spraying the gas containing Ti. Therefore, according to embodiments of the present invention, it is possible to form a barrier layer made of a TiN thin film by means of an atomic layer deposition method at a low temperature. Accordingly, it is possible to prevent a substrate or a thin film formed on the substrate from being damaged by high-temperature heat, and it is possible to prevent the occurrence of defects of a device including a barrier layer or improve the performance thereof.