baber/WOPTO huggingface dataset:
Patent JP-2013109926-A (JP)
Title: Led lighting device
Inventor: SHIMAMI MASARU
IPC: F21S8/02
Filed: 2011-11-18
Abstract: PROBLEM TO BE SOLVED: To provide an LED lighting device of low cost and power consumption saving, capable of setting luminance and accurate irradiation direction sufficiently meeting with usage as a downlight.SOLUTION: The LED lighting device 1 of a bulb type using an LED light emitting element 3 as a light source is provided with an LED element 3, a convex lens 5 which is arranged frontward in an emitting direction A of light L of the LED light emitting element 3 and is used for protecting a front face of the LED light emitting element 3 and is used as a light translucent and transparent material, and a concave reflection mirror 7 which reflects the emitted light L from the LED light emitting element 3 having transmitted through the convex lens 5 and directs it toward a prescribed irradiation direction B.
Patent JP-2012110708-A (JP)
Title: Method for producing salt dust and salt dust generator
Inventor: KARI VIHERLAHTI
IPC: A61K9/72
Filed: 2011-11-21
Abstract: PROBLEM TO BE SOLVED: To provide a method for producing salt dust that is used in salt therapy, and to provide a salt dust generator used in the method.SOLUTION: The salt dust is generated when the salt particles that are moved in an air flow collide with each other and with parts of the salt dust generator by regulating the speed of the air flow 7a-7d and thus changing its capability to carry the salt particles. It is possible to increase the amount of the collisions of the salt particles and thus make the formation of the salt dust 9f more efficient by using obstacles, such as nets 8 that are placed into the salt dust generator vessel 1.
Patent JP-2013108020-A (JP)
Title: Liquid detergent composition
Inventor: WAKITA KAZUAKI
IPC: C11D17/08
Filed: 2011-11-22
Abstract: PROBLEM TO BE SOLVED: To provide a liquid detergent composition for foamer vessel filling, which holds fine bubbles and is excellent in cleansing power as well as low temperature stability.SOLUTION: The liquid detergent composition for foamer vessel filling contains the following components (a), (b), (c) and (d): (a) a polyoxyethylene sorbitan monolaurate having an average addition mole number of ethylene oxide of 60-100; (b) a 8-12C fatty acid glyceride in which the content of monoglyceride is ≥85 mass% based on the whole glyceride; (c) an acylamino acid type anionic surfactant having a 8-14C acyl group; and (d) water. Based on the total amount of the composition, the contents of the component (a), (b) and (c) are 0.5-20, 0.2-8 and 0.1-4 mass%, respectively. The sum [a+b+c] of the components (a), (b) and (c) is 1-30 mass%, and a mass ratio [a/c] of the component (a) and (c) is 2/1 to 20/1.
Patent JP-2013114505-A (JP)
Title: Stereo image generating apparatus, stereo image generating method, and computer program for stereo image generation
Inventor: KAKUKO NORIHIRO
IPC: G06T1/00
Filed: 2011-11-29
Abstract: PROBLEM TO BE SOLVED: To provide a stereo image generating apparatus that can, when feature points are unevenly distributed on an image photographed by each camera, determine whether or not calculated correction parameters are appropriate.SOLUTION: A stereo image generating apparatus comprises: a correction parameter calculator 12 that calculates correction parameters on the basis of multiple sets of feature points corresponding to the same point on a subject, extracted from first and second images photographed of the subject; a corrected error calculator 13 that calculates the quantities of corrected errors by correcting positions of the feature points using the correction parameters with respect of each set of feature points on at least one of the images and thereby finds out the corrected distance between the feature points; an unevenness degree calculator 14 that calculates the unevenness degrees of the feature points; a threshold determiner 15 that so determines a threshold for corrected errors that the threshold becomes smaller with an increase in unevenness degree; and a corrector 17 that, when the corrected error is not above the threshold, corrects the position of the subject in at least one of the first and second images by using correction parameters.
Patent JP-2012071897-A (JP)
Title: Packaging container
Inventor: MIYAMOTO JUN
IPC: B65D77/20
Filed: 2011-12-05
Abstract: PROBLEM TO BE SOLVED: To provide a packing container which is better in resealability and openability by reinforcing the strength of a container body and a cover and can surely prevent the shift and deviation of the content that arises during its carriage, etc. and besides is easy of takeout of the content.SOLUTION: The packing container includes the container body 1 and the cover 2. A projecting flange 10 shaped like a rectangular ring is formed at the peripheral edge 11 of the flank 8 of the container body 1 having a bottom 3, and each of drop-in steps 12 is formed at the inner circumference of the projecting flange 10. A receiving flange 14 to engage with the projecting flange 10 is formed at the peripheral edge 13 of the lid 4 of the cover 2, and each of drop-in projections 15 to engage with each of the drop-in steps 12 is formed at the inner circumference of this receiving flange 14. In the container, drop-in ramps 16a and 16b and 17a and 17b, which incline outward and are arranged with roughly horizontal parts 16c and 17c between to engage with each other, are formed severally at the four corners, the drop-in steps 12, of the container body 1 and the four corners, the drop-in projections 15, of the cover 2.
Patent JP-2013118915-A (JP)
Title: Urethra catheter
Inventor: KAKIZOE TADAO
IPC: A61M25/10
Filed: 2011-12-07
Abstract: PROBLEM TO BE SOLVED: To provide a urethra catheter capable of reducing an odd feeling when the catheter is left indwelled in vivo, and appropriately securing a urination function.SOLUTION: The urethra catheter 10 includes: a distal end part 14 with a urine intake 12; a base part 18 capable of communicating with a urine container; an intermediate tube 16 connecting the distal end part 14 and the base part 18; and a balloon 22 disposed on the outer surface of the distal end part 14. When the urethra catheter 10 is used, the urine intake 12 is retained within the urinary bladder, and the intermediate tube 16 is retained in the urethra. While at least the urethra catheter 10 is retained in the living body, the cross-sectional area of occupation of the intermediate tube 16 is smaller than the cross-sectional area of occupation of the distal end part. A liquid-permeable member 29 with flexibility is disposed in a first lumen functioning as a urinary tract in the intermediate tube 16 is disposed along the direction of extension of the first lumen 24b.
Patent JP-2013120500-A (JP)
Title: Information processing apparatus, and information processing method
Inventor: SHIMONO MASAKI
IPC: G06F21/62
Filed: 2011-12-07
Abstract: PROBLEM TO BE SOLVED: To provide a technique to maintain consistency in synchronization of contents stored in a portable memory medium by an external device.SOLUTION: When a portable memory medium, which records content data stored by an external device and a directory configuration where the content data are stored, is mounted to an information processing apparatus, the directory configuration in the portable memory medium is configured in the memory of the apparatus. The content data recorded in the portable memory medium are read from the portable memory medium and the read content data are registered in the memory.
Patent JP-2013122496-A (JP)
Title: Image presentation device and image presentation method
Inventor: NITTA KEIICHI
IPC: G09G5/00
Filed: 2011-12-09
Abstract: PROBLEM TO BE SOLVED: To present an image to an observer comfortably.SOLUTION: A projector 10 includes an image projection part 15 for sequentially presenting prescribed images from a plurality of images, a control circuit 16 for determining the next image to be presented, and the control circuit 16 for controlling the moving amount of an attention point region between images based on a conspicuity map calculated for each of a plurality of images so as for the moving amount to be less than an allowable moving amount of line of sight movement between two consecutively presented frame images.
Patent JP-2013121424-A (JP)
Title: Ptp sheet for medicine packaging
Inventor: UETAKE Kazuaki
IPC: B65D83/04
Filed: 2011-12-09
Abstract: PROBLEM TO BE SOLVED: To provide a PTP sheet making it possible to protect a pocket from pressure force caused by external force in a tied-in state.SOLUTION: The PTP sheet 10 is provided with a first sheet 14 where a pocket 16 which is able to accommodate a medicine and a projecting protrusion 18 each protrude from the upper surface, and a second sheet 15 pasted onto a lower surface of the first sheet 14 for blocking off an opening of the pocket 16. The distance L1 from the upper surface of the first sheet 14 to a protruding end of the protrusion 18 is longer than the distance L2 from the upper surface of the first sheet 14 to a protruding end of the pocket 16.
Patent JP-2013125478-A (JP)
Title: Relay device, relay program and relay method
Inventor: TANAKA MASAHIRO
IPC: G06F11/34
Filed: 2011-12-15
Abstract: PROBLEM TO BE SOLVED: To provide a relay device which performs reproduction at a high speed when reproducing an operation.SOLUTION: A relay device 1 comprises: a communication record table 111 which stores a communication history in which a request from a web browser to a web server is correlated with a response from the web server for an operation performed by the web browser; an authentication state extraction unit 131 which extracts the communication history correlated with a response in which information used in session management exists on the basis of the communication history stored in the communication record table 111; screen transition extraction unit 132 which extracts a series of communication histories obtained by tracking back information which is included in the request and is used to manage transition of a screen outputted on the web browser, on the basis of the communication history stored in the communication record table 111; and a communication reproduction unit 14 which reproduces the operation using a union of the communication history extracted by the authentication state extraction unit 131 and the communication history extracted by the screen transition extraction unit 132.
Patent JP-2013124346-A (JP)
Title: Rubber composition
Inventor: ABE KAYOKO
IPC: B60C1/00
Filed: 2011-12-16
Abstract: PROBLEM TO BE SOLVED: To provide a rubber composition for improving the anti-oxidizing effect sustainability of a vulcanized rubber composition.SOLUTION: The rubber composition includes an antioxidant for rubbers having an antioxidizing substance for rubbers and mesoporous carbon having a hydroxyl group, and a rubber component. The antioxidant for rubbers is preferably obtained by supporting the antioxidizing substance for rubbers on the mesoporous carbon having a hydroxyl group. The antioxidizing substance for rubbers is preferably a compound represented by formula (I), wherein Ris H or 1-13C alkyl.
Patent JP-2013132092-A (JP)
Title: Charger for vehicle
Inventor: SAKAYORI YOSHITOMO
IPC: H02J7/00
Filed: 2011-12-20
Abstract: PROBLEM TO BE SOLVED: To obtain a charger for vehicle capable of improving the operation efficiency by providing a shock absorber, a collision detection function and a monitor camera in the charger for vehicle, so that the charger for vehicle can be installed even in a narrow parking space.SOLUTION: In the charger for vehicle that supplies power to a vehicle parking in a parking space partitioned by frame lines, the vehicle enters toward the charger for vehicle when parking in the parking space. The charger for vehicle includes a body on which a vehicle charging facility is mounted, and a shock absorber provided in front of the body in the entering direction of vehicle.
Patent JP-2013131867-A (JP)
Title: Individual information generation device and individual information generation method
Inventor: YAMAMOTO MASARU
IPC: G06F21/44
Filed: 2011-12-20
Abstract: PROBLEM TO BE SOLVED: To generate individual information having excellent reproducibility and uniqueness in a small circuit scale.SOLUTION: A plurality of output value generation circuits 110, each of which consists of the same circuit configuration, output a prescribed definite output value or an indefinite output value individually, without being univocally determined against a specific input. Numeric value output units 120 each output a prescribed numeric value on the basis of the respective output values of the output value generation circuits 110. Here, if the output values are definite output values, the numeric value output units 120 each select any numeric value among a first group of numeric values differing from each other according to the output values, and output the selected numeric value. Also, if the output values are indefinite output values, the numeric value output units 120 each select any numeric value among a second group of numeric values differing from any one of the first group of numeric values and also differing from each other themselves according to a frequency at which the output values become a prescribed value, and output the selected numeric value. An individual information generation unit 130 generates individual information on the basis of the numeric values output from the numeric value output units 120.
Patent JP-2012150796-A (JP)
Title: Information processing apparatus and method
Inventor: WATANABE DAISUKE
IPC: G01B11/00
Filed: 2011-12-21
Abstract: PROBLEM TO BE SOLVED: To implement robust and high-precision position/attitude measurement even for an object in which a feature uniquely determining a parameter with a specific degree of freedom, among degrees of freedom for a position/attitude with a model coordinate system as a criterion is lacked.SOLUTION: An information processing apparatus includes model holding means which holds a three-dimensional shape model for acquiring a position/attitude of a measurement target object by position/attitude matching with the measurement target object, image capturing means which captures an image of the measurement target object, first position/attitude acquiring means which acquires a first position/attitude of the three-dimensional shape model in a first coordinate system on the basis of a first geometrical feature of the three-dimensional shape model and a first geometrical feature in the image, and second position/attitude acquiring means which acquires a second position/attitude of the three-dimensional shape model in a second coordinate system different from the first coordinate system on the basis of a second geometrical feature of the three-dimensional shape model, a second geometrical feature in the image and the first position/attitude.
Patent JP-2013129366-A (JP)
Title: Saddle riding type electric vehicle
Inventor: IGARASHI TAKESHI
IPC: B62J11/00
Filed: 2011-12-22
Abstract: PROBLEM TO BE SOLVED: To allow a battery module to be efficiently and firmly assembled and fixed to a vehicle body while coping with a demand for weight reduction for the battery module for a saddle riding type electric vehicle.SOLUTION: A battery module 50 includes a casing which is at least partially made of resin. A pedestal 71 supports a first side surface of the casing. A clamp member 72 is disposed opposite a second side surface 50d positioned at the opposite side of the first side surface in the casing. A plurality of springs 73 are suspended between the pedestal 71 and the clamp member 72, and the battery module 50 is fixed to the pedestal 71 by pressing the clamp member 72 against the second side surface 50d of the casing.
Patent JP-2013131194-A (JP)
Title: Model learning device, related information extraction device, related information prediction device, method for learning model, method for extracting related information, method for predicting related information, and program
Inventor: IWATA TOMOHARU
IPC: G06N5/04
Filed: 2011-12-22
Abstract: PROBLEM TO BE SOLVED: To provide a model learning device capable of acquiring related data from each of a plurality of data sets with different dimensions (the number of data items), and to provide a related information extraction device, a related information prediction device, a method for learning models, a method for extracting related information, a method for predicting related information, and a program.SOLUTION: A learning unit 20 estimates three types of parameters, a probability set that is a set of probabilities corresponding to data in each data set, a latent vector set, and a transformation matrix set that is a set of multiple transformation matrices corresponding to each of each data set such that a model is optimized to the plurality of input data sets. The model is defined that data in each data set in the plurality of data sets are generated at a predetermined probability depending on one latent vector in a predetermined latent vector set and a transformation matrix corresponding thereto.
Patent JP-2013135046-A (JP)
Title: Double side mounting substrate manufacturing device
Inventor: TSUKAMOTO MITSUHAYA
IPC: H05K13/04
Filed: 2011-12-26
Abstract: PROBLEM TO BE SOLVED: To reduce an elevation time of a backup table in a double side mounting substrate manufacturing device.SOLUTION: In a double side mounting substrate manufacturing device, a printed circuit board on both upper and lower faces of which electronic components are mounted is conveyed to a mounting position A1, and the electronic components are mounted on the upper face of the printed circuit board. After mounting the electronic components, the printed circuit board is conveyed out. A servo motor 2 is provided as an elevation actuator for elevating a backup table 1. The servo motor 2 moves the backup table downward from a reference face of the mounting position A1 during conveying the printed circuit board with a position obtained by adding a total of a maximum height of the electronic components already mounted on the lower face of the printed circuit board conveyed to the mounting position A1 and thickness of the printed circuit board to a predetermined clearance as a lower limit position.
Patent JP-2013138387-A (JP)
Title: Moving image decoder, moving image decoding method and moving image decoding program
Inventor: FUKUSHIMA SHIGERU
IPC: H04N19/137
Filed: 2011-12-28
Abstract: PROBLEM TO BE SOLVED: To solve the problem that it is necessary to compress encoding information and to reduce a whole code amount in a conventional image encoding system using motion compensation prediction.SOLUTION: A first encoding bit string decoding section 202 decodes information showing a prediction motion vector to be selected. A prediction motion vector candidate generation section 221 performs prediction from a motion vector of one of decoded adjacent blocks which are spatially or temporally adjacent to a decoding object block, generates candidates of a plurality of prediction motion vectors and registers them in a prediction motion vector candidate list. A prediction motion vector redundant candidate deletion section 223 deletes the candidates of the prediction motion vectors having identity among the candidates of the prediction motion vectors predicted from the decoded adjacent blocks which are spatially adjacent by leaving at least one candidate from the prediction motion vector candidate list. A prediction motion vector selection section 225 selects the prediction motion vector from the prediction motion vector candidate list in response to the information showing the prediction motion vector to be selected.
Patent JP-2011519198-A (JP)
Title: 動的ホームネットワーク割当
IPC: H04W80/04
Filed: 2009-03-24
Abstract: 無線通信のための方法を提供する。この方法は、無線ネットワーク内のゲートウェイ装置と接続を確立することを含む。この方法は、ホームモビリティオプションを特定する設定パケットをゲートウェイ装置から受信することを含む。この方法は、ホームモビリティオプションの少なくとも１つのホームネットワークアドレスを処理する。この方法は、ホームモビリティオプションのホームネットワークプレフィックスを受け取り、または処理することも含む。 【選択図】図１
Patent JP-2011519797-A (JP)
Title: 小売店の在庫データを収集して処理するための方法およびシステム
IPC: B65G61/00
Filed: 2008-04-25
Abstract: 本発明により、小売店からの在庫データを収集して処理するための改良された方法およびシステムが可能になる。在庫データは、移動端末を使用して収集されて、GPS情報とともに中央サーバシステムに伝送される。中央サーバシステムは、小売店データを有するデータベースを保持、GPSデータと一致する対象小売店データを有する在庫データを格納する。統計および主要業績指標データは、サーバシステムによって生成されて、クライアントシステムの要求に応じてクライアントシステムに伝送される。
Patent JP-2011521784-A (JP)
Title: エルボを含む螺旋形導管製造装置及び方法
IPC: B21D11/06
Filed: 2008-05-22
Abstract: 本発明は、エルボを含む螺旋形導管を製造する方法が提供される。上記の製造方法は、ボールキャスタを用いて金属プレート部材の突出した波動部分を上方にベンディングするベンディングステップであって、直線ライン及び波動を形成する方式により上記金属プレート部材が切断されるベンディングステップと、エルボを含む螺旋形導管の製造装置に設けられる第１モータによって回転される一対の移送ローラーを用いて上記金属プレート部材を移送する移送ステップと、移送された金属プレート部材がジョイントジグによって円形状にローリングされる間に上部及び下部プレッシングローラーを用いて上記金属プレート部材の単一折畳部分及び二重折畳部分をプレッシングするステップと、上部及び下部カッタを用いて上記製造装置によって形成されたエルボを切断するステップと、を含む。   本発明により、緩やかな角度に曲面をなすエルボが形成されることができ、そして金属プレート部材の突出した波動部分がベンディングされてエルボを形成する。それによって、流体がエルボの曲面性部分に沿って円滑に流動できる。また、エルボが連続的なプロセスによって形成されるため、生産性を高めることができる。  【選択図】  図４Ａ
Patent JP-2011523892-A (JP)
Title: 噴射ノズル
IPC: B08B3/02
Filed: 2009-06-04
Abstract: 本発明は、多様な用途として使用されうる噴射ノズルに係り、さらに詳細には、洗浄またはデバリングのために気体または液体を高圧で対象物の表面に噴射させるが、直線運動だけでも効率的に洗浄などを行うことができる噴射ノズルのための技術に関する。噴射ノズルには主な構成として、内部に空洞部が設けられて、供給される物質を複数の噴射孔を介して排出させる噴射ノズルにおいて、前記噴射孔は、噴射ノズルの先端部または外周面に形成されるが、曲率を有して空洞部から外部に向かって次第に断面積が広くなり、かつ曲がりつつ形成される。 【選択図】図７
Patent JP-2011522585-A (JP)
Title: マルチストリーム画像復号化装置及び方法
IPC: A61B1/04
Filed: 2009-03-30
Abstract: 【課題】複数のビデオデータストリームを複数の受信装置に提供して記憶させるカプセルカメラを提供する。 【解決手段】カプセルカメラは、データを伝送する無線送信器と、複数のデータストリームを同時に記憶することができるように複数の受信装置を有する受信システムとを含む。複数の記憶されたデータストリームは、後になって、各データパケット受信時のネットワーク状態に基づいて、解析のための最良のデータストリームを取り出すために用いられ得る。最良のデータストリームは、後になって、復号化過程中、複数の記憶されたデータストリームから取り出され得る。 【選択図】図３
Patent JP-2011527708-A (JP)
Title: 減少した抗菌活性および神経保護作用の利点を有するテトラサイクリン誘導体
IPC: A61P25/28
Filed: 2009-07-10
Abstract: 本開示は、テトラサイクリン骨格、好ましくはミノサイクリンの骨格を利用し、著しく抗菌活性を欠損している組成物および方法に関するものである。この化合物は、血液脳関門を浸透する薬物の性質を妨げることなく神経防護作用特性を有する。これらの化合物は、神経細胞周期進行のそれらの阻害のため、神経保護的活性を有する。この化合物は、位置９および１０を結合する５つの環によって部分的に特徴付ける。
Patent JP-2011528480-A (JP)
Title: 無線システムにおけるジオフェンスの動的創出の方法
IPC: H04W4/021
Filed: 2009-07-16
Abstract: ジオフェンスデバイスによって受け取られた疑似距離測定値の第１の集合を使用して即時参照点を決定すること、即時参照点へ参照される動的ジオフェンス区域を規定すること、疑似距離測定値の第２の集合を使用して測位を決定すること、及び測位を動的ジオフェンス区域と比較することによって、動的ジオフェンス区域を創出する方法及び装置。１つの態様において、比較結果に基づく警報メッセージがユーザへ提示される。
Patent JP-2011529927-A (JP)
Title: Ｐｂｏおよびｄｍを含む殺虫剤ポリマーマトリックス
IPC: A01N25/10
Filed: 2009-07-23
Abstract: ＰＢＯおよびＤＭを含む殺虫剤ポリマーマトリックス。ピペロニルブトキシド（ＰＢＯ）およびデルタメトリン（ＤＭ）を含む殺虫剤ポリマーマトリックス、ここで、ＰＢＯの含有量のＤＭの含有量に対する重量比は、３.５超である。
Patent JP-2012500492-A (JP)
Title: 荷電粒子ビームリソグラフィシステム及びターゲット位置決め装置
IPC: G03F7/20
Filed: 2009-08-18
Abstract: 本発明は、ターゲット上に荷電粒子ビームを投影するための真空チャンバに配置され、荷電粒子ビームを偏向方向に偏向させるための偏向手段を有する荷電粒子光学カラムと、ターゲットを保持するためのキャリア及び偏向方向とは異なる第１の方向に沿ってキャリアを保持し移動させるためのステージを有するターゲット位置決め装置と、を具備し、このターゲット位置決め装置は、荷電粒子光学カラムに対する第１の方向にステージを移動させるための第１のアクチュエータを有し、キャリアは、ステージに移動可能に配置されており、ターゲット位置決め装置は、第１の相対位置にステージに対してキャリアを保持するための保持手段を有する荷電粒子ビームリソグラフィシステムに関する。
Patent JP-2012504072-A (JP)
Title: ノズル流過速度の制御
IPC: B41J2/055
Filed: 2009-09-22
Abstract: プリント液がポンピングチャンバからノズルを通して射出されるノズル速度に影響を与える１つ以上のパラメータが測定される方法が説明される。プリント液は圧電層の撓みによって作動されるポンピングチャンバに入れられる。１つ以上のパラメータの測定値に少なくともある程度は基づいて、圧電層作動電極の表面積が減じられる。電極表面積を減じることで圧電層の作動面積が減じる。
Patent JP-2012506327-A (JP)
Title: 難燃性ポリエステル複合フィルム
IPC: B32B27/18
Filed: 2009-10-20
Abstract: 本発明は、難燃性を有する多層複合フィルムに関する。ある実施態様では、複合フィルムは揮発分解性難燃剤を含有する中間層を含む。中間層は他の２つのフィルム層の間に配置される。外層も難燃剤を含有する。外層に含有される難燃剤は、中間層に含有される揮発分解性難燃剤をとは異なる。複合フィルムは、窓処理部材、ラベル、剥離ライナー、電子工学における包装部材などの多くの異なる物品を製造するために使用できる。ある実施態様では、複合フィルムの片側にメタル化層を接着してもよい。 【選択図】図１
Patent JP-2012507588-A (JP)
Title: 表面官能化ナノ粒子
IPC: C08K9/04
Filed: 2009-11-03
Abstract: 【解決手段】  本発明は表面官能化ナノ粒子の製造方法に関し、例えば、表面結合官能基を含有する半導体の量子ドットナノ粒子の製造方法に関する。前記半導体の量子ドットナノ粒子は、シリコンポリマー内へのドットの組込みに適しているため、ＬＥＤなどの電子機器の製造に用いられることができる。 【選択図】  図１
Patent JP-2012507865-A (JP)
Title: 複数のトランジスタゲートの形成方法、および少なくとも二つの異なる仕事関数を有する複数のトランジスタゲートの形成方法
IPC: H01L21/8234
Filed: 2009-10-23
Abstract: 少なくとも二つの異なる仕事関数を有する複数のトランジスタゲートを形成する方法は、異なる幅を有する基板上に第一および第二のトランジスタゲートを形成するステップを含み、第一の幅は第二の幅よりも狭い。材料は、第一および第二のゲート上を含む基板上に堆積される。エッチングチャンバー内で、材料は、第一および第二のゲートの双方の上からエッチングされ、第一のゲートの導電性材料を露出し、第二のゲート上に支持された材料の厚さを減少させ、材料によって被覆された第二のゲートをそのまま残す。エッチング後に、エッチングチャンバー内のそのままの位置で、基板は少なくとも３００℃の基板温度で金属を含むプラズマに対して暴露され、第二のゲートの仕事関数と比較して、第一のゲートの仕事関数を改変するために、第一のゲートへと金属を拡散させる。