baber/WOPTO huggingface dataset:
Patent KR-20030010682-A (KR)
IPC: G02B27/18
Filed: 2002-04-05
Abstract: 프리즘은 모터 인덱스(motor index)에 관계 있는 이의 회전 각도에 상관없이 모터상에 장착된다. 이의 위치는 광 경로의 구성이후 나중에 전자적으로 설정된다. 모터 제어기는 프리즘의 회전을 제어하기 위해 사용된다. 이 모터 제어기는 프리즘이 일정한 속도에서 스핀하도록 유지하며 프리즘 위상(회전 각도 대 시간)의 위치를 정한다(position). 가변 오프셋은 시간의 함수로서 절대 프리즘 회전의 위치를 정하기 위해 사용된다. 위상은 셋업 도중 오퍼레이터(operator)에 의해 앞당겨질 수 있거나(advanced) 지연될 수 있다. 각 프리즘은 자기 자신의 위상을 가진다. 시스템의 각 프리즘의 위상은 조명(illumination) 패턴이 패널의 비디오 어드레싱과 정확하게 정합하도록(match) 설정된다. 이는 구성되는 동안 한번 설정된다. 정확한 위치가 설정되며, 영원히 비-휘발성 메모리에 저장된다.
Patent KR-20030009551-A (KR)
IPC: F01N3/28
Filed: 2002-04-30
Abstract: 자동차 내연 기관용 배기 가스 정화 장치는, 엔진의 배기 가스 통로의 일 부분을 형성하는 케이싱을 포함한다.  케이싱에 배치된 기판은 배기 가스를 정화시키기 위해 물질을 운반한다.  지지 매트가 기판 및 케이싱 사이에 위치됨으로써 케이싱 내의 기판을 지지하기 위해 마련된다.  지지 매트는 지지 매트의 상류측 단부에서 이물질들을 포획하기 위해 오목부를 가지며, 상류측 단부는 배기 가스 통로의 배기 가스 유동의 상류측과 대면한다.
Patent KR-20040063522-A (KR)
Inventor: NA HYEONG DON
IPC: G02F1/1339
Filed: 2003-01-08
Abstract: PURPOSE: An LCD(Liquid Crystal Display) and a fabricating method thereof are provided to uniformly perform rubbing by forming a slant at one end or both ends of a column spacer formed in a color filter panel. CONSTITUTION: A pixel electrode(190) is formed on a lower substrate(110). An upper substrate(210) is separated in a certain interval from the pixel electrode(190), and is located in an upper portion. A black matrix(220), a color filter(230) and a common electrode(270) are formed under the upper substrate(210). A column spacer(57) is formed under the common electrode(270). At least a part of the column spacer(57) is formed by a slant surface of 46 degrees to 85 degrees. A liquid crystal layer(3) is formed between the pixel electrode(190) and the common electrode(270).
Patent KR-20040063656-A (KR)
Inventor: HWANG GYU YEONG
IPC: H04N17/00
Filed: 2003-01-08
Abstract: PURPOSE: An image warping correction device based on a 3D virtual screen is provided to secure a high quality image by correcting image warping without using a convergence yoke. CONSTITUTION: A reference image generating unit(62) generates a reference image for correcting image warping. A displacement measurer(61) measures RGB coordinates of pixels from the reference image. A warping information extracting unit(63) receives the measured RGB coordinate values and RGB coordinate values of an original image, and extracts warping information on the basis of a 3D virtual screen method. A warping correcting unit(56) generates a warping image using extracted warping information, and corrects the warping of the original image.
Patent KR-20030063145-A (KR)
Title: 공기조화기
IPC: F24F13/22
Filed: 2003-01-15
Abstract: 살균을 행하기 위한 자외선램프의 발광을 이용하여, 자외선램프 자체의 운전표시 및 본체케이스 외관의 디자인 향상을 행한다. 
     기계본체의 본체케이스의 내면 부근에, 한 면에서부터 가시광을 발광하고, 다른 면에서부터 자외선을 발광하는 평판모양 자외선램프를, 전면(前面)측이 가시광 발광면이 되도록 배치하고, 그 전면에 전면커버를 설치하고, 이 전면커버를 빛나게 한다.  전면커버를, 광휘성 안료를 배합한 반투명성 또는 투명성 재료로 만든다.
Patent KR-20040067218-A (KR)
Inventor: KIM BEOM TAE
IPC: A01N31/14
Filed: 2003-01-22
Abstract: PURPOSE: Propenoic ester and amide derivatives having a fluorostyrene substituent, a process for preparing the same compounds and an antifungal composition comprising the same compounds are provided, which compounds have improved antifungal activity at a low concentration, wide range of antifungal activity, low toxicity and improved duration of medicine efficacy. CONSTITUTION: The propenoic ester and amide derivatives represented by formula (1) are provided, wherein Z is F or WR; W is O or S; R is C1-C4 alkyl, halogen substituted C1-C4 alkyl, or aryl or heteroaryl substituted with halogen, acyl, amino, nitro, cyano, hydroxy or acyloxy; and X is CH or N and Y is O when Z is F or X is CH or N and Y is O or NH when Z is WR. The process for preparing the propenoic ester and amide derivatives of formula (1) comprises the steps of: reacting bromide of formula (2) with 3-hydroxybenzaldehyde in the presence of base to prepare a compound of formula (3); and Wittig reacting the compound of formula (3) to prepare propenoic ester of formula (1a).
Patent KR-20040069713-A (KR)
Inventor: CHA SEUNG SIK
IPC: F24F1/00
Filed: 2003-01-30
Abstract: PURPOSE: A ceiling type water-cooled air conditioner is provided to keep a pleasant residence environment of buildings with single or plural floors by low noise, to secure easy installation and carry, and to increase space utilization and cooling efficiency. CONSTITUTION: A ceiling type water-cooled air conditioner having a compressor(25), a condenser(30), and an evaporator(26) on a refrigerant circulating path and heat-exchanging the downward cooling water and upward cooling air is composed of a receiving unit for receiving a main part of the refrigerant circulating path in an independent space and dividing intake and discharge paths for the freezing and cooling air; a heat exchanging unit having cooling water and air circulating paths at the condenser; and a condensate container(27) installed to the lower end of the evaporator to collect condensate and connected to join with the cooling water of the condenser. The heat exchanger is connected to the outside through a water supply pipe(21) and an exhaust pipe(18).
Patent KR-20040070647-A (KR)
Inventor: KO GWAN JU
IPC: H01L21/76
Filed: 2003-02-04
Abstract: PURPOSE: A method for fabricating a reverse trench of a semiconductor device is provided to prevent a dipping phenomenon, a dent phenomenon, and a thinning phenomenon by improving a process for forming a trench. CONSTITUTION: A TEOS(Tetra Ethyl Ortho Silicate) layer(12) and a nitride layer(14) are laminated on an upper surface of a substrate(10). A trench is formed by removing the TEOS layer and the nitride layer from an active region of the substrate. An epitaxial growth layer(16) is formed within the trench. The substrate is formed with a silicon substrate. The thickness of the TEOS layer is 4000 to 5000 angstrom. The thickness of the nitride layer is 100 angstrom. The height of the epitaxial growth layer corresponds to the intermediate height of the nitride layer.
Patent KR-20040071336-A (KR)
Inventor: BAEK NAM IN
IPC: C07H17/04
Filed: 2003-02-05
Abstract: PURPOSE: Sesquiterpene lactone compounds extracted from Ixeria dentata forma albiflora and a composition for treating cardiovascular disease and cancer containing the same compounds are provided, which compounds have no toxicity, and have improved ACAT(Acyl-Coa: Cholesterol Acyltransferase) and FPT(Farnesyl Protein Transferase) inhibiting effects. CONSTITUTION: The sesquiterpene lactone compounds, 3β-O-(6'-p-hydroxyphenylacetyl-β-D-glucopyranosyl)-8β-hydroxyguaian-4(15), 10(14), 11(13)-triene-6,12-olide, represented by formula (1), and extracted from Ixeria dentata forma albiflora by using alcohol solvent, preferably methanol are provided. The composition for treating cardiovascular disease and cancer contains the sesquiterpene lactone compounds of formula (1), wherein the cardiovascular disease is arteriosclerosis, hypertension, angina pectoris, hyperlipidemia, myocardial infarction or cardiac failure; and the cancer is pancreatic cancer, bladder cancer, lung cancer or skin cancer.
Patent KR-20030068421-A (KR)
Title: 전기 광학 장치 및 전자 기기
IPC: G02F1/1368
Filed: 2003-02-11
Abstract: 전기 광학 장치는, TFT 어레이 기판(10)상에, 화소 전극(9a), 이것에 접속된 TFT(30), 해당 TFT에 접속된 주사선(3a) 및 데이터선(6a), 상기 화소 전극에 접속되어 있고 축적 용량(70)을 구성하는 화소 전위측 용량 전극, 해당 화소 전위측 용량 전극에 유전체막을 거쳐서 대향 배치되어 있고 상기 축적 용량을 구성하는 고정 전위측 용량 전극을 포함하는 용량선(300)을 구비하고, 해당 용량선에 있어서의 상기 데이터선을 따라 돌출한 부분의 폭 W1은, 당해 데이터선의 폭 W2와 동일 또는 보다 넓게 형성되어 있다. 
     이것에 의해, 용량선의 저저항화, 또는 TFT에 있어서의 광 리크 전류의 발생 방지를 실현하면서, 개구율 향상 등의 일반적 요구에 부응한다.
Patent KR-20040076018-A (KR)
Inventor: AHN HWANG JAE
IPC: F28F9/18
Filed: 2003-02-24
Abstract: PURPOSE: A condenser for an air conditioner of a vehicle is provided to reduce the cost and the length of the work process by directly joining connector pipes to a receiver tank without brazing. CONSTITUTION: A condenser(100) for an air conditioner of a vehicle comprises a first header pipe(110); a second header pipe(120) spaced apart from the first header part; a receiver drier tank(130) mounted on one of the first and second header pipes; plural tubes(160); and pleated fins(150) disposed between the tubes. The ends of the tube are fixed to the first header pipe and the second header pipe. A refrigerant flow path is formed in the tube. The condenser has connector pipes(140) made of a brazing material to connect the receiver driver tank mounted on one of the first and second header pipes.
Patent KR-20030074161-A (KR)
Title: 데이터 스트림-분배 시스템 및 그 방법
IPC: G10L19/02
Filed: 2003-02-25
Abstract: 단계 S1에서 상호인식처리가 행해진다. 단계 S2에서 곡명리스트의 송신요구를 받았다고 판단된 경우, 단계 S3에서 곡명리스트가 송신된다. 단계 S4에서 음성데이터의 송신요구를 받은 경우, 단계 S5에서 전송속도 측정처리가 실행된다. 단계 S6에서 전송속도에 따라서 음성데이터의 송신이 가능하다고 판단된 경우, 단계 S7에서 대응한 압축음성데이터가 추출되고, 단계 S8에서 압축음성데이터가 전송속도에 알맞은 데이터로 디코드되어, 선형 PCM 데이터가 생성되어, 단계 S9에서 송신된다. 음성데이터의 송신이 가능하지 않은 경우, 단계 S10에서, 에러 메시지가 송신된다. 본 발명은, 예를 들면 음성데이터를 분배하는 서버와, 분배된 음성데이터를 재생하는 음성재생단말에 적용할 수 있다.
Patent KR-20040076710-A (KR)
Inventor: CHOI HUN SUN
IPC: H04L27/00
Filed: 2003-02-26
Abstract: PURPOSE: A physical layer apparatus for transmitting and receiving signals of various standards, a wireless LAN system having the same, and a method for wireless LAN are provided to transmit and receive stably a DSSS/CCK signal and an OFDM signal by discriminating between a DSSS/CCK standard and an OFDM standard. CONSTITUTION: A PLCP(Physical Layer Convergence Procedure) processor(421) is used for receiving a DSSS/CCK demodulation signal, an OFDM demodulation signal, and a packet signal of a MAC layer, dividing the received signals into an OFDM standard and a DSSS/CCK standard, outputting the divided signals to corresponding layers, and performing control operations. A transmission processor(423) is used for receiving the packet signal from the PLCP processor, performing an OFDM modulation process and a DSSS/CCK modulation process, and outputting an OFDM analog signal and a DSSS/CCK analog signal. A reception processor(425) is used for converting the OFDM analog signal and the DSSS/CCK analog signal to the digital signals, interpolating the converted digital signals, and outputting the DSSS/CCK demodulation signal and the OFDM demodulation signal to the PLCP processor.
Patent KR-20040077009-A (KR)
Inventor: JUN DONG GEUN
IPC: H01L21/304
Filed: 2003-02-27
Abstract: PURPOSE: A pad conditioner for CMP equipment is provided to perform stably a conditioning process by lengthening a lifetime and widening a pressure transmission range. CONSTITUTION: A disk holder includes a polishing disk and is tangent to a surface of a polishing pad. A conditioner head includes a driver. The disk holder is coupled to the driver. The driver is used for driving the disk holder. The disk holder includes a driving sleeve part and a disk-shaped flexure(164). The driving sleeve part is coupled to the conditioner head in order to receive the driving force and the pressure. The disk-shaped flexure is coupled to the driving sleeve part in order to receive the uniform pressure.
Patent KR-20040078289-A (KR)
Inventor: BAE SUK DONG
Filed: 2003-03-03
Abstract: PURPOSE: A method for circulating construction materials using the Internet is provided to timely supply/demand various kinds of construction materials depending on a construction progress by making a supplier and a demander exchange circulation information through a web site, and making the supplier and the demander registered as a verified member perform the EC(Electronic Commerce) safely. CONSTITUTION: The collected member is classified into an examined registered member and a non-examined registered member. The examined registered member is classified into a supplier group and a demander group, and the group is classified into the large supplier and an integrated demander. It is judged that the classified members are fit to a selection standard. The member logging in to a web server searches a standard article classification index. If stock is present by searching the searched article index from a database, it is checked that the member has a purchase intention. If the examined registered member is the demander, a purchase article code input window is provided.
Patent KR-20040078362-A (KR)
Inventor: JUNG MYEONG JIN
IPC: H01L21/304
Filed: 2003-03-04
Abstract: PURPOSE: A CMP apparatus is provided to maintain constantly a surface state of a polishing pad by using a conditioner for conditioning the polishing pad during a polishing process. CONSTITUTION: A platen(41) is used for loading a wafer. A polishing pad(42) is adhered on a surface of the platen. A polishing head(43) is used for pushing and supporting the wafer. A diameter of the polishing head is smaller than the diameter of the platen. A slurry supply nozzle is installed on a bottom of the platen in order to supply slurries(47) to the polishing pad. A diamond ring, a diamond ring holder, the first and the second driving sources are used for regenerating a surface of the polishing pad in a polishing process.
Patent KR-20040078799-A (KR)
Inventor: LIM HAN YEOL
IPC: A01F25/00
Filed: 2003-03-05
Abstract: PURPOSE: Facilities for storing and drying grains are provided to make the set up in a cramped space, and the collective carrying-out of dry and storage process, to reduce the fatigue of grains by minimizing a transfer distance thereof, to prevent the quality deterioration and loss thereof, and to remarkably drop installation cost of the facilities. CONSTITUTION: The facilities for storing and drying grains include; a tower(20) with plural floors; an input hopper(30) receiving the fed grains at a bottom of the tower(20); a first elevator(50) feeding them from the input hopper(30) to a top of the tower(20); a sorting device(35) sorting them at the top of the tower(20); a storage tank(40); a gauge metering the dropped grains at a middle of the tower(20); a second elevator(55) feeding the metered grains to the upward again; an input conveyor(65) feeding the grains from the second elevator(55) to a silo, so that they can be stored in the latter; and an output conveyor(70) extended to a lower part of the second elevator(55), so that the grains inside the silo can be output and fed through the second elevator(55).
Patent KR-20040084478-A (KR)
Inventor: KIM JONG SUNG
IPC: H03H3/08
Filed: 2003-03-28
Abstract: PURPOSE: An RF FBAR(Film Bulk Acoustic wave Resonator) device and a fabricating method thereof are provided to reinforce a structure by forming a membrane support layer and a sidewall part surrounding an air gap on the same layer as the air gap. CONSTITUTION: A sacrificial layer is formed on an upper surface of a substrate. A photoresist pattern is formed on the sacrificial layer in order to pattern an air gap region. The sacrificial layer is etched by using the photoresist pattern as a mask. The photoresist pattern is removed and a membrane support layer(6) is laminated thereon. The membrane support layer is partially exposed by forming a pattern. The exposed part of the membrane support layer is etched. The mask pattern is removed and a plurality of membrane layers(7,8) are formed on the patterned sacrificial layer and the membrane support layer. A bottom electrode(9) is formed on the membrane layers. A piezoelectric layer(10) is formed on the bottom electrode. A top electrode(11) is formed on the piezoelectric layer. An air gap is formed by removing the patterned sacrificial layer.
Patent KR-20030036488-A (KR)
Title: Screen for blocking entrance of animal into flue of gas boiler
Inventor: KIM GOUNG JOON
IPC: F23J13/00
Filed: 2003-04-07
Abstract: PURPOSE: A screen for blocking the entrance of an animal into a flue of a gas boiler is provided to prevent the death from suffocation due to asphyxiating gas and to protect human being from animals. CONSTITUTION: A screen for blocking the entrance of an animal into a flue of a gas boiler is made of iron for resisting against the high-temperature heat generated from the gas boiler. If the flue is blocked with the animal, exhaust gas is not discharged. Then, the human being in a room is lack of oxygen. Such asphyxiating gas as carbon dioxide harms the health of the human being. The screen blocks the entrance of the animal and discharges asphyxiating gases.
Patent KR-20040089931-A (KR)
Inventor: JUNG SEONG MAN
IPC: C09J7/35
Filed: 2003-04-15
Abstract: PURPOSE: Provided is a functional adhesive sheet, which has improved strength and a wide range of use, and is adhered or attached to other objects with ease. A method for manufacturing the same sheet is also provided. CONSTITUTION: The high-strength functional adhesive sheet comprises a polyethylene layer(10), a non-woven fabric layer(20) to which the polyethylene layer is attached on one side; and a functional polyethylene layer(30) attached on the other side of the non-woven fabric layer. The non-woven fabric has a unit weight of 25-70 g/m2. The functional polyethylene layer(30) includes a polyethylene blend obtained by grafting polyethylene with a functional group and mixing the resultant polyolefin resin with a polyolefin resin and other additives.
Patent KR-20040091395-A (KR)
Inventor: JUNG HAE JIN
IPC: C02F1/52
Filed: 2003-04-21
Abstract: PURPOSE: Provided are a red tide removing agent, which is able to get rid of the red tide by being sprayed on the waters at small amount and prevent the secondary contamination of the waters, a method for preparing thereof and a method for removing red tide by using the same. CONSTITUTION: The red tide removing agent consists of red mud which comprises at least 90% of particles having a particle size of 0.1-1.0 micrometers and has a pH of 7-9. The method comprises steps of (a) pulverizing bauxite with a wet pulverizer into a size of not more than 200 mesh; and (b) after extracting sodium aluminate, controlling a pH of cake shaped red mud to 7-9. The red tide is removed by spraying the red tide removing agent at a concentration of 50-500 ppm on red tide generating waters.
Patent KR-20030089443-A (KR)
Title: 휴대단말장치 및 그 제어방법
IPC: H04B1/38
Filed: 2003-05-12
Abstract: 본 발명에 관한 휴대단말장치에서는 착신시에 유저의 소재위치에 따라서 자동적으로 악곡데이터를 스위칭함으로써 다른 착신멜로디(착신음)가 재생되는 것을 특징으로 하고 있다. 여기서, 유저는 재생영역을 원하는 착신멜로디의 악곡데이터와 대응시켜서 미리 휴대단말장치에 기억시킨다. 재생영역을 지정할 때, 휴대단말장치에서는 지도 또는 랜드마크(유원지, 공원 등의 특정장소나 시설) 리스트를 화면 상에 표시한다. 재생영역 설정처리종료 후, 휴대단말장치에 착신이 발생하면 위치특정수단(GPS모듈)에 의해 현재위치가 특정됨과 아울러 대응하는 재생영역이 선택됨으로써 대응하는 착신멜로디의 악곡데이터가 판독되어 재생된다.
Patent KR-20040099510-A (KR)
Inventor: LEE KYUNG OK
IPC: E02B3/00
Filed: 2003-05-19
Abstract: PURPOSE: A method of construction for the lost bank recovery using a free-falling pile is provided to minimize the loss of lives and properties by restoring the lost bank in the first stage and constructing a pile structure composed of a free falling pile or many piles deeply to the ground of a bank not to be carried away by the speedy current. CONSTITUTION: The method of construction for the lost bank recovery using a free-falling pile(20) comprises: a weight pile(20) formed in the shape of a column whose length for preventing the lost of a bank(11) is twice as long as the height of a bank and the lower diameter is shorter than the upper diameter; and a helicopter(30) lifting up the pile(20) above the appointed height and piling to the ground by free-falling the pile(20) from the appointed height using potential energy.
Patent KR-20040100327-A (KR)
Inventor: HWANG DU SEON
IPC: C01G23/053
Filed: 2003-05-22
Abstract: PURPOSE: Provided is a method for preparing TiO2 powder with large surface area by neutralizing acidic precipitates, obtained from the homogeneous precipitation process at low temperature, with urea instead of conventional NH4OH or NaOH. CONSTITUTION: The large surface area TiO2 powder is prepared by the following steps of: (i) preparing 0.2-1.2M of titanyl chloride solution(TiOCl2) and urea solution whose concentration is 2-3times thicker than TiCl4 concentration, where the TiOCl2 solution is obtained by adding distilled water to TiCl4 for the high concentration(1.5M) TiOCl2, and then adding distilled water to TiOCl2 solution for the low concentration(0.2-1.2M) TiOCl2 solution; (ii) keeping diluted TiOCl2 solution at 15-150deg.C to get precipitates and solution, which is expressed by the formula, TiOCl2 + 2HCl + 2H2O -> TiO(OH)2 + 4HCl -> TiO2xH2O + 4HCl; (iii) mixing Ti-precipitates or Ti-solution with urea solution, wherein NH3 formed from decomposition of urea neutralizes Cl- ions to produce neutral TiO2, which is expressed by the formula, TiO2xH2O + 4HCl + 2H2NCONH2 + 2H2O -> TiO2xH2O + 4NH4Cl + 2CO2(g); (iv) filtering, washing precipitates, and drying at a temperature lower than 150deg.C over 12hrs. In the step (ii) or step (iii), rutile TiO2 powder is formed in case that the precipitation is processed at 15-70deg.C. Rutile TiO2 is formed in case that the precipitation is processed at 70-155deg.C in a sealed vessel and precipitates are neutralized. Mixtures of rutile and anatase TiO2 are formed in case that the precipitation is processed at 70-155deg.C in a sealed vessel, and precipitates and solution are neutralized in an unsealed vessel. Anatase TiO2 is formed in case that the precipitation is processed at 70-155deg.C in an unsealed vessel.
Patent KR-20040101739-A (KR)
Inventor: LEE YANG HO
Filed: 2003-05-26
Abstract: PURPOSE: A one-touch typed goods selling/advertising method using a hot number matched with the goods worn/held by a famous entertainer or sportsman and a system thereof are provided to enable a customer to obtain detail information for the goods and buy the goods by advertising the goods with the hot number through media, and connecting the customer to a web page if the customer inputs the hot number. CONSTITUTION: A goods sale/AD(ADvertisement) server(210) provides the hot number as articles. AD contents are provided with a photo/moving image and a sound through the media. The server also provides the detail information for the goods corresponding to the hot number, and sells the goods if the hot number is received from a mobile communication network(120) or the Internet(130). A goods information database(220) stores the detail information and sales status of the goods. A communication terminal(110) transmits the hot number to the goods sale/AD server through the mobile communication network or the Internet.
Patent KR-20040104108-A (KR)
Inventor: BAEK IN SEOP
IPC: A23G4/00
Filed: 2003-06-03
Abstract: PURPOSE: A tooth whitening chewing gum containing hydrogen peroxide having tooth whitening effect together with a conventional chewing gum having effects of removing bad breath and preventing tooth decay is provided. It has excellent stability and tooth whitening effect while avoiding inconveniences in formulations and use. CONSTITUTION: The tooth whitening chewing gum comprises 0.1 to 90% by weight of hydrogen peroxide, 0.1 to 10% by weight of a hydrogen peroxide stabilizer, 0.01 to 20% by weight of an active component for removal of bad breath, 0.01 to 10% by weight of antibacterial components, 1 to 30% by weight of a gum base, 0.1 to 1% by weight of a softening agent, 30 to 90% by weight of a taste enhancer, 0.1 to 5% by weight of a flavoring agent, 0.001 to 1% by weight of a sweetening agent and 0.01 to 3% by weight of a coloring agent.
Patent KR-20030096003-A (KR)
Title: 노즐장치 및 기판 처리장치
IPC: B05B7/04
Filed: 2003-06-10
Abstract: 본 발명은 혼합탱크를 이용하지 않고 첨가 유체를 희석용 유체로 희석한 처리액을 기판에 공급할 수 있도록 한 노즐장치를 제공하는 데 있다. 
     기판을 향하여 처리액을 분사하는 노즐장치에 있어서, 
     노즐본체와, 
     이 노즐본체(61)에 설치된 혼합실(68)과, 
     상기 노즐본체에 설치되어 상기 혼합실에 연통한 분사부(69)와, 
     상기 노즐본체에 설치되어 상기 혼합실에 희석용 유체를 공급하기 위한 제1 접속구멍(65)과, 
     상기 노즐본체에 설치되어 상기 희석용 유체에 의해 희석되는 첨가 유체를 공급하기 위한 제2 접속구멍(66)과, 
     상기 노즐본체에 설치되어 상기 혼합실에서 상기 첨가 유체를 상기 희석용 유체로 희석하여 만들어진 상기 처리액을 가압하여 상기 분사부에서 분사시키는 가압기체를 공급하기 위한 제3 접속구멍(67)을 구비한다.