baber/WOPTO huggingface dataset:
Patent KR-20080052289-A (KR)
Title: Silencer
Inventor: TAKEDA SHOICHI
IPC: E01F8/00
Filed: 2007-08-09
Abstract: A noise reduction device is provided to catch noise sound wave and silence it by diffraction having a silencing effect at the upper part of a soundproof wall. A noise reduction device(1) for reducing the sound pressure of noise arriving from a noise source comprises a body casing(2), a noise reduction chamber(9), a plurality of plate members and a plurality of openings(6). The body casing comprises a space of predetermined volume inside. The noise reduction chamber is formed in the inner space of the body casing, and contains sound absorbing material(11). The plate members, extended from the noise reduction chamber toward the front of the body casing, are equipped inside the body casing. The opening formed by opposed plate members connects the noise reduction chamber and the front side of the body casing, wherein the cross section of the opening has a specific angle to cause diffraction of sound wave.
Patent KR-20090016785-A (KR)
Title: Large area substrate etching apparatus having a preventing mean of precipitation and method for preventing precipitation
Inventor: CHOI TAE KYUN
IPC: G02F1/13
Filed: 2007-08-13
Abstract: A large area substrate etching apparatus and a method for preventing precipitates from being generated are provided to prevent the precipitates from occurring in an etching apparatus which wet-etches a substrate. A large area substrate etching apparatus comprises the followings: an etch chamber which has an admission part into which a transferred substrate enters at its one side, and performs the etching for the substrate; an influx unit(410) into which the ultra pure water of the room temperature flows; an evaporator(420) which evaporates the ultra pure water; a fetching unit(430) re-supplying the ultra pure water staying in the evaporator to the influx unit; and a precipitate prevention means(400) which is placed at the admission part to prevent the fume, occurring in the etch chamber, from becoming precipitates.
Patent KR-20090017071-A (KR)
Title: Novel diimine ligand, multinuclear transition metal compounds, and method for polymerization of olefin using the same
Inventor: HAN YONG GYU
IPC: C07D401/12
Filed: 2007-08-14
Abstract: A multinuclear transition metal compounds are provided to be used as catalyst in the olefin polymerization and improve the activity as compared to the conventional transition metal catalyst. The multinuclear transition metal compounds are represented by the chemical formula(1), wherein R^1, R^2, R^3, R^6, R^7, R^8, R^9, R^10 and R^11 are identical or different, and each independently hydrogen atom; C1-C11 alkyl group; substituted or unsubstituted aryl group selected from fluoroalkyl group, nitro group, sulfonate group and halogen group; arylalkyl group; halogen group; nitro group; sulfonate group; -OSiZ3; or -(G^1O)nG^2; R4 and R5 are identical or different, and each independently hydrogen atom; C1-C11 alkyl group; substituted or unsubstituted aryl group selected from fluoroalkyl group, nitro group, sulfonate group and halogen group; or arylalkyl; and B is the linking group for connecting 2 coordinated ligands and 3 coordinated ligands.
Patent KR-20090022852-A (KR)
Title: Air conditioning system
Inventor: PARK JUNG IL
IPC: F24F11/00
Filed: 2007-08-31
Abstract: An air conditioning system is provided to improve the operation quality of an air conditioner by restricting the operation parameter setting of a local control device of a specific indoor space. An air conditioning system(100) comprises an air conditioner, a first local control device(C1), a second local control device(C2) and a remote control device(115). The air conditioner comprises a first indoor unit(ID1) and a second indoor unit(ID2). The first indoor unit corresponds to a first indoor space(R1). The second indoor unit corresponds to a second indoor space. The first local control device communicates with the first indoor unit and set operation parameter of the air conditioner.
Patent KR-20090024440-A (KR)
Inventor: SONG SEONG HWI
IPC: G11C29/00
Filed: 2007-09-04
Abstract: 반도체 집적 회로가 제공된다. 반도체 집적 회로는 본딩 옵션 모드 진입 신호 및 테스트 모드 신호를 수신하여 옵션 모드 신호를 제공함으로써, 입출력 핀 수가 감소된 본딩 옵션 모드로의 진입 여부를 제어하는 옵션 모드 결정부, 옵션 모드 신호 및 글로벌 라인 선택 신호를 수신하여 경로 제어 신호를 제공하되, 상기 경로 제어 신호는 글로벌 입출력 라인 경로를 선택적으로 제어하는 경로 제어 신호 생성부를 포함한다.  
       
     본딩 옵션, 데이터, 병렬 테스트
Patent KR-20090024888-A (KR)
Title: Method and apparatus for controlling of inter system paging in a mobile communication system
Inventor: KIM KWANG SOO
IPC: H04B7/26
Filed: 2007-09-05
Abstract: A paging control method and an apparatus thereof in a mobile communication system for controlling whether to use ISP according to the loading rate of MSC are provided to control ISP function according to the load rate of MSC. A paging control device sets a threshold according to the loading rate of MSC(Mobile Station Controller). In case the threshold in which the loading rate of the MSC is fixed is exceeded, an ISP(Inter System Paging) function is controlled from the MSC. In order that the ISP function in the base station system is selectively controlled, the ISP function of the base station sort is selectively ordered by the paging control device.
Patent KR-20090025662-A (KR)
Title: Pointing apparatus, pointer controlling apparatus, pointing method and pointer controlling method
Inventor: CHOI EUN SEOK
IPC: G06F3/033
Filed: 2007-09-06
Abstract: A pointing device, a pointer control device, a pointing method and a pointer control method are provided to renew the gain between the motion displacement of the pointing device and the motion displacement of the displayed pointer, continuously. An image receiving part(210) senses an image pattern existing in the region of a recognized size among the whole image patterns arranged in a display region. An inertial sensor(220) detects the estimated motion for an actually inputted motion by using at least one of the acceleration and angular velocity which are generated according to the motion actually inputted to a pointing device(200). A coordinate decision part(240) determines the coordinates moved as much as the coordinate displacement sensed by the inertia sensor from the center coordinates of the image pattern.
Patent KR-20090025978-A (KR)
Title: Control system for sewage treatment system
Inventor: YANG HYEON
IPC: C02F3/30
Filed: 2007-09-07
Abstract: A control system for sewage treatment facilities is provided to prevent shutdown of operation cased by overloading of a motor and to control the amount of necessary medicines. A control system for sewage treatment facilities comprises the followings: a flux measuring unit including a grid sensor of first optical fiber; a water level detecting unit including the grid sensor of second optical fiber; a motor temperature measuring unit(400) including the grid sensor of third optical fiber measuring temperature of the motor; a controller controlling operation of sewage treatment facilities according to measured information after measuring a flux of fluid, the water level of a water tub(10) and the temperature of the motor.
Patent KR-20090027478-A (KR)
Title: Feeding apparatus with a water-spray function
Inventor: JUNG HYO HWAN
IPC: A21D6/00
Filed: 2007-09-12
Abstract: A transfer apparatus having a spray function is provided to spray water through a spray nozzle in the transfer procedure of dough. A transfer apparatus having a spray function includes a body(200), mesh belt conveyor, guide panel(400) and blocking member. The body has a drainage chamber(210). The mesh belt conveyor is installed on the drainage chamber so that drainage easily gets accomplished while transferring the dough. The guide panel prevents the sagging of the mesh belt conveyor. The spray device is installed on and under the mesh belt conveyor. The insulating member prevents water from being leaked to the outside.
Patent KR-20090029013-A (KR)
Inventor: KIM BONG GYUN
IPC: E03D9/08
Filed: 2007-09-17
Abstract: A seating sensing method of a hot-water bidet is provided to calculate a reflection distance value from the propagation time of light between the light emitting and receiving units and compare the reflection distance value with the set value, thus preventing an error in determining the seating of user. A seating sensing method of a hot-water bidet comprises a step of transmitting signal from a transmitter combined in the hot-water bidet in response to a command of a controller(S220), a step of receiving the signal, reflected by the user seated on the bidet, in a receiver(S230), a step of producing a reflection distance value by applying the signal sensed by the receiver to the controller(S240), a step of comparing the calculated reflection distance value as described above with the set value set up in the controller(S260), and a step of judging the seating of user(S270).
Patent KR-20080058157-A (KR)
Title: Receiving device with opening structure
Inventor: KIM JU DAE
IPC: H04R1/10
Filed: 2007-09-17
Abstract: A headphone set is provided to enhance user convenience by implementing a hinge unit for adjusting the angle of earphone while the headphone set is set at ears. A headphone set includes a pressed supporting unit(10), a speaker housing(30), a hinge unit(40), and a fixing unit(50). The pressed supporting unit is supported by pressing on a face of users. The speaker housing, which is hinged to the pressed supporting unit, includes a speaker(20) therein. The hinge unit is rotatably formed between the pressed supporting unit and the speaker housing such that the speaker housing is opened or closed on the speaker housing. The fixing unit having the pressed supporting unit at both sides thereof is used for fixing on a head.
Patent KR-20080094537-A (KR)
Title: Manufacturing methods of concrete releaser and concrete releaser thereof
Inventor: KIM KWANG SO N
IPC: C08L91/06
Filed: 2007-09-27
Abstract: A water-soluble concrete releasing agent is provided to maintain a good state of concrete foam without having an influence upon a concrete surface, and to prevent a separation phenomenon even at a low temperature of -4 °C. A method for preparing a water-soluble concrete releasing agent includes the steps of: preparing an oxidized wax having a total acid number of 1.0-30.0 mgKOH/g by oxidizing wax to increase emulsion stability; melting 40-80wt% of the oxidized wax at 100-200 °C, cooling the molten oxidized wax to 100-120 °C, thereto adding 10-30wt% of fatty acid, and mixing and reacting the admixture to prepare a first mixture solution; adding 10-30wt% of amine to the mixture solution, and mixing and reacting the admixture to prepare a final mixture solution; and diluting 1-99wt% of the final mixture solution with 99-1wt% of purified water having a temperature of 80-95 °C.
Patent KR-20080036521-A (KR)
Title: Cleaning device for removing foreign matter deposited on work
Inventor: KAORU ICHIHASHI
IPC: B08B3/02
Filed: 2007-10-17
Abstract: A cleaning device for removing foreign matters deposited on a workpiece is provided to realize a compact structure by separating a convey system and a cleaning system from each other. A cleaning device(A) for removing foreign matters deposited on a workpiece(1) comprises a cleaning compartment(3), a jig(4), a drive unit(5), a cleaning nozzle(6) and a liquid discharge port(7). The cleaning compartment has an opening(2) through which a workpiece is put in. The jig is installed in the cleaning compartment to clamp the workpiece. The drive unit is installed at the outside of the cleaning compartment and rotates the jig using a servo motor. The cleaning nozzle is provided in the cleaning compartment. The liquid discharge port allows cleaning solution remaining in the cleaning compartment to the outside of the cleaning compartment.
Patent KR-20090040165-A (KR)
Title: 차량용 헤드램프
Inventor: LEE TAE WON
IPC: B60Q1/12
Filed: 2007-10-19
Abstract: 차량용 헤드램프에 대한 발명이 개시된다. 본 발명의 차량용 헤드램프는: 광원으로부터 조사되는 빛을 반사시키며 회전될 수 있도록 구비되는 반사면; 반사면의 단부에 구비되며 반사면으로부터 반사되는 빛의 일부를 차단시키는 쉴드; 및 반사면으로부터 반사되는 빛을 직진시키는 렌즈를 지지하는 렌즈홀더를 구비하고, 렌즈홀더는 반사면과 분리되어 구비되는 것을 특징으로 한다. 
     본 발명에 의하면 종래의 발명과 달리, 교차빔을 형성하는 렌즈와 렌즈홀더 및 반사면의 구성 전체를 구동시키지 않아, 구동 엑츄에이터의 구동 토크를 감소시킬 수 있어, 구동 엑츄에이터의 소비전력을 감소시킬 수 있다. 
       
     반사면, 회전축, 교차빔
Patent KR-20090044134-A (KR)
Inventor: LEE YUN HEE
IPC: G01B11/24
Filed: 2007-10-31
Abstract: 본 발명은 X-선 회절용 4점 굽힘장치 및 이를 이용한 박막소재 응력-변형률 거동 측정방법에 관한 것으로, X-선 회절 장치에 장착이 가능하며 인위적으로 박막시험편을 굽혀서 응력과 변형률을 발생시키는 4점 굽힘장치는 굽힘을 위한 상부의 몸체와, 굽힘의 강도를 조절하는 하부의 마이크로미터로 구성하되, 상기 몸체의 상부는 고정된 두 쌍의 박막시험편 지지부와, 승강되는 두 쌍의 박막시험편 지지부로 구성되고, 상기 승강되는 두 쌍의 박막시험편 지지부는 상기 마이크로미터와 연결되어 마이크로미터에 의해 승강되는 것을 특징으로 하는 X-선 회절용 4점 굽힘장치와, 
     소정의 두께로 박막이 증착된 박막시험편을 레이져 변위측정기로 스캔하고 이로부터 증착 잔류응력으로 발생한 박막시험편의 굽힘곡률을 측정하는 단계(S10)와; 상기 박막시험편에 굽힘을 가하지 않은 상태에서 X-선 회절시험으로 회절각도의 변화에 따른 박막시험편의 회절피크 정보를 측정하는 단계(S20)와; 상기 박막시험편을 X-선 회절용 4점 굽힘장치의 마이크로미터의 회전으로 박막표면에 인장/압축응력을 가변하여 굽힘곡률을 레이져 변위측정기로 측정하는 단계(S30)와; 상기 (S30)와 동시에 인장/압축응력이 가해진 박막시험편에 X-선 회절시험으로 회절각도의 변화에 따른 박막시험편의 회절피크 정보를 측정하여 박막시험편의 변형률을 구하는 단계(S40);를 포함하여 이루어지는 것을 특징으로 하는 X-선 회절용 4점 굽힘장치를 이용한 박막소재 응력-변형률 측정 방법을 제공한다. 
       
     X-선 회절, 4점 굽힘변형, 응력-변형률, 박막소재, 마이크로인장시험
Patent KR-20090045730-A (KR)
Inventor: KIM JEONG HO
IPC: B60G7/00
Filed: 2007-11-02
Abstract: 본 발명은 차량의 후방 서스펜션으로 사용되는 멀티링크 서스펜션에 관한 것으로,  
     기존의 멀티링크 서스펜션들은 그 구조가 복잡하고 장착 공간을 많이 차지하며 설계 단가 및 중량 측면에서 불리한 문제가 있었고, 다수의 부품을 사용하는 만큼 설계인자의 다양함으로 서스펜션 상세 튜닝이 어렵게 되는 등의 문제가 있었던 바,  
     너클과; 차폭 방향으로 적절한 각도를 유지하면서 배치되어 너클의 상부와 하부를 차체에 연결하는 어퍼링크 및 로워링크와; 차량 전후 방향으로 너클과 차체를 연결하는 판형 트레일링암과; 그리고 완충장치인 스프링과 쇽업소버;로 구성되는 것과, 스프링과 쇽업소버는 휠 센터의 수직선상의 평면에 위치되도록 설치되며, 어퍼링크와 로워링크는 차폭 방향으로 적절한 각도를 유지하도록 배치되고, 로워링크는 지면에 평행인 어퍼링크를 기준으로 예각이 형성되도록 설치되는 것, 그리고 판형 트레일링암은 탄성 변형이 가능하게 되고, 외력에 반응하여 적절한 휠얼라이먼트를 유지하게 되는 것을 특징으로 하는 본 발명에 의하면 적은 수의 부품으로 간편하게 구성할 수 있게 될 뿐 아니라 장착 공간을 적게 차지하게 되므로 설계 단가 및 중량 측면에서 유리하게 되며, 차량 선회시 과도상태의 차량 운동에 약간의 언더스티어 특성을 부여하여 보다 안정적이고 예측 가능한 조종성능을 보장할 수 있게 되고, 캠버에 의한 횡력 보상으로 선회 접지력 확보하여 선회안정성을 증대시 킬 수 있게 되는 등의 효과를 얻을 수 있게 된다. 
       
     멀티링크 서스펜션, 너클, 어퍼링크, 로워링크, 판형 트레일링암, 스프링, 쇽업소버
Patent KR-20090047636-A (KR)
Inventor: OH YOUNG HAN
IPC: H02S40/38
Filed: 2007-11-08
Abstract: 본 발명은 태양열 발전 장치에 관한 것으로, 태양전지에 의해 생산된 전기를 축전기에 저장하고, 온수 또는 난방이 필요할 때 적정 온도와 사용시간만큼 제어하여 충전된 전기를 사용하며, 여분의 전기는 대형 발전업체 또는 송전업체로 송전하여 판매할 수 있도록 된 태양열 발전 장치에 관한 것이다. 
     본 발명에 따르면, 태양열을 받아 전기를 생산하는 태양전지; 상기 태양전지로부터 생산된 전기를 축전하는 축전기; 상기 축전기의 전기를 이용하는 히터봉이 설치되어 물을 가열하는 가열탱크; 상기 가열탱크에 연결되어 펌프에 의해 난방수가 순환되는 난방배관; 상기 가열탱크에 연결된 방열기; 상기 축전기와 태양전지 및 히터봉에 전기적으로 연결되어 축전전압과 히터봉의 가열전압 및 축전기의 여분의 전기를 다른 곳으로 송전하는 것을 제어하는 제어기;를 포함하여 구성된 태양열 발전 장치가 제공된다. 
       
     태양열 발전기, 축전기, 태양전지, 가열탱크
Patent KR-20090049945-A (KR)
Inventor: KO MOO HYUN
IPC: A47L9/32
Filed: 2007-11-14
Abstract: 본 실시예는 진공 청소기의 흡입 장치에 관한 것이다.  
     본 실시예에 따른 진공 청소기의 흡입 장치는, 흡입된 공기와 이물이 유동하는 제 1 유로; 상기 제 1 유로에서 분지되는 제 2 유로; 및 상기 분지된 제 2 유로가 상기 제 1 유로와 연결되도록 하는 연결 유로가 포함된다.  
       
     흡입 장치
Patent KR-20090050888-A (KR)
Inventor: CHOI SUNG HO
IPC: F24C7/06
Filed: 2007-11-16
Abstract: 본 발명은 전자레인지에 관한 것이다.  본 발명에서는 팬어셈블리에 의하여 형성되는 에어플로가 에어가이드에 의하여 2개의 히터에 균일하게 안내된다.  따라서 본 발명에 의하면, 2개의 히터가 보다 균등하게 냉각되는 이점이 있다. 
       
     전자레인지, 히터, 히터커버, 에어가이드
Patent KR-20090057493-A (KR)
Title: Charge control apparatus for high voltage battery
Inventor: JEONG YONG UK
IPC: B60L7/22
Filed: 2007-12-03
Abstract: A charge control apparatus for a high voltage battery is provided to improve fuel efficiency at low speed by lowering battery voltage through selection combination of a plurality cells. A charge control apparatus for a high voltage battery is composed of a cell controller(10), a BMS (Battery Management System)(11), and a DC/DC converter(12). The high voltage battery is made of a plurality of cell (A-D,H), and a SOC (State Of Charge) of a plurality of cells is monitored by the cell controller. The cell controller transmits SOC of a plurality of cells to the BMS through the CAN (Controller Area Network) communications. The BMS combines and divides a plurality of cells selectively according to the SOC of a plurality of cells. A DC/DC converter applies a current to a plurality of battery cells in charging and discharging.
Patent KR-20090058095-A (KR)
Title: Temperature controller of coolant for fuel cell vehicle
Inventor: NA SUNG WOOK
IPC: F01P11/16
Filed: 2007-12-04
Abstract: A temperature controller of coolant for a fuel cell vehicle is provided to control the cooling water temperature in real time by driving a motor depending on a cooling water temperature signal of a stack entrance and improve efficiency and performance of a stack output. A temperature controller of coolant for a fuel cell vehicle comprises a housing consisting of a first and second intake port(333,334) formed horizontally and a drain port(335); a plunger operation unit(336) having a working plunger(332) proportionally controlling opening amount of a first and second intake port, operating vertically between the intake port and the exhaust port of the housing; a motor(331) mounted on the top of a plunger operation unit; and a motor shaft(337) extended from the motor to the lower end of the plunger operating part. The operation plunger moves vertically by torque transmitted through a motor shaft depending on the motor.
Patent KR-20090059004-A (KR)
Title: A plug assembly and cooker comprising the same
Inventor: KWON JUNG JU
IPC: F24C3/10
Filed: 2007-12-05
Abstract: A plug assembly and a cooker including the same are provided to mount the plug assembly simply by fixing a plug holder of metal material, in which an ignition plug and a plug target are fixed, to a burner assembly. A plug assembly comprises an ignition plug(241) which is installed in a combustion unit in which gas is burnt and is provided with power selectively, a plug target(242) which is installed in the combustion unit apart from the ignition plug and generates spark when power is applied to the ignition plug, and a plug holder(243) which is fixed to the combustion unit at the state where the ignition plug and the plug target are fixed.
Patent KR-20090063701-A (KR)
Title: Preparation method of bath cleanser using gold coating mineral salt
Inventor: YOU JAE HONG
IPC: A61K8/19
Filed: 2007-12-14
Abstract: A method for manufacturing a bath cleanser using gold-coated mineral salt is provided to maximize cleansing effect including fatigue recovery, cleanness of skin, and skin care and satisfy with aroma therapy and flavor. A method for manufacturing a bath cleanser using a gold-coated mineral salt comprises: a step of adding 0.2-1.0 weight part of glycerin, 0.5-1.5 weight part of gold pearl and 0.01-1.0 weight part of pure gold in 100 weight part of crystal mineral salt and drying with infrared ray to produce a first mineral salt(S120); a step of mixing 0.5-3.0 weight part of natural pigment 0.2-1.5 weight part of perfume in 100 weight part of natural mineral salt and vacuum-drying to obtain a second mineral salt(S130); and a step of mixing 10-30 weight% of first mineral salt and 70-90 weight% of second mineral salt(S140). The method further comprises pretreatment step of sterilizing(S110).
Patent KR-20090063753-A (KR)
Title: Communication system and search and rescue terminal device for vessel
Inventor: LEE YONG MIN
IPC: H04L12/28
Filed: 2007-12-14
Abstract: A marine communication apparatus and a search structure terminal device for perceiving the exact location of an accidental point and reducing a time for a distress structure are provided to maximize the utilization of the search structure terminal device. A frequency converter(28) is installed as the channel number of a mobile search rescue terminal device. The frequency converter performs the search structure terminal device and two way wireless communications. A transceiving processor(27) processes the signal which is transmitted and received by connecting the frequency converter. A main controller(26) periodically delivers the location information delivered from the location information receiver(25) to the search structure terminal device through the transceiver process unit.
Patent KR-20090064867-A (KR)
Title: Swing hinge apparatus of swing-type portable terminal
Inventor: CHOI CHUL YOUNG
IPC: H04B1/38
Filed: 2007-12-17
Abstract: A swing hinge apparatus of a swing terminal is provided to form a control groove in a stopper, thereby preventing an upper main body of the swing terminal from easily being opened. A stopper unit(130) is rotated at predetermined angle according to a rotating unit. The stopper unit keeps a rotated state. A limiting protrusion(151) is formed in a rotating angle control unit(150) to limit a rotation range of the stopper unit. When an upper main body is rotated, the stopper unit is hooked in the limiting protrusion of the rotating angle control unit.
Patent KR-20090067622-A (KR)
Title: Communication and improving quality for call using the same
Inventor: DO HYUN GUK
IPC: H04B1/40
Filed: 2007-12-21
Abstract: A communication terminal and a method for improving call quality by using the same are provided to adjust voice volume of a user according to a changed environment if an environment for a call is changed, thereby improving call quality. A wireless communication module(100) performs communication with a callee terminal. If a call with the callee terminal is started, a controller(150) checks an identifier of the callee terminal. If the identifier is an identifier for a wire communication terminal, the controller adjusts output voice volume. A voice output unit(170) outputs the adjusted voice volume. The controller makes the outputted voice volume larger than preset reference volume.
Patent KR-20090069520-A (KR)
Title: Organic-inorganic complex for removing heavy metal, method of preparation thereof, and the use of the same
Inventor: OH SEONG GEUN
IPC: C02F1/62
Filed: 2007-12-26
Abstract: An organic-inorganic complex, a manufacturing method thereof are provided to remove heavy metals efficiently and to offer sues of the organic-inorganic complex such as all kinds of the filters, a coating composition, a mask etc. A manufacturing method of an organic-inorganic complex for removing a heavy metal comprises the following steps of: adding a silane precursor in a solvent; reacting a compound with a basic catalyst; drying the compound. In a chemical formula, R' is one kind selected in a group consisting of a halogen atom, an alkoxy radical and their mixture. R is an alkylene radical of C1~C8, an alkenylene group of C3~C12, a hollow alkenylene group of C3~C12, an alkynylene group of C3~C8, an arylene group of C3~C10, a cyclo alkylen group of C3~C10, -NR1- and their mixture. R1 is an alkyl group of C1~C4, an aryl of C3~C10 and their mixture.
Patent KR-20090070447-A (KR)
Title: Semiconductor device and method for manufacturing the same
Inventor: YANG TAEK SEUNG
IPC: H01L27/108
Filed: 2007-12-27
Abstract: A semiconductor device and a manufacturing method thereof are provided to obtain a capacitor with high capacitance above 6fF/um^2 by forming a dielectric thin film made of the multilayer high dielectric material. A semiconductor device includes a lower metal wiring(100), a multilayer dielectric film(120-140), an upper metal layer(150), and a lower metal layer(110). The multilayer dielectric film is successively stacked on the lower metal wiring. The upper metal layer is positioned on the multilayer dielectric film. The lower metal layer is positioned under the multilayer dielectric film. The multilayer dielectric film is comprised of a first oxide film of the hafnium series, a second oxide film of the aluminum series on the first oxide film, and a third oxide layer of the hafnium series on the second oxide film. The first and third oxide layers made of the hafnium dioxide(HfO2).