baber/WOPTO huggingface dataset:
Patent KR-19990064214-A (KR)
Title: 증기 혼합물을 이용한 반도체 처리
IPC: H01L21/306
Filed: 1996-10-10
Abstract: 액상원(22)(222)(206)과 공급 또는 희석 가스로부터 형성된 증기상 처리 유출물을 이용한 처리 방법 및 시스템(10)(116)(200). 어떤 시스템은 다중 액체원(140)(240)(307)(317)과 각각이 혼합된 증기를 발생하는 다중 증기 발생기(120)(220)(295)를 사용한다. 증기 발생기의 일부는 액체의 일정 흐름을 공급 가스의 일정 흐름에 주입시키기 위하여 계량 펌프(303)를 사용한다. 어떤 실시예에서, 증기는 건조되어 처리실 증기 혼합물로서 처리실(12)로 유입되기 전에 포화도를 감소시킨다. 반도체는 처리실 내에서 회전되어 일괄적으로 처리되는 것이 바람직하다.
Patent KR-19990064220-A (KR)
Title: 로우 프로파일의 무삽입력 소켓
IPC: H01R12/58
Filed: 1996-10-10
Abstract: 로우 프로파일의 무삽입력 소켓은 머더 보드(202)에 직접 장착된 복수의 탄성 접점(236)을 포함하고 있다.  그 소켓은 머더 보드(202)에 슬라이드하게 부착되어 있고 그리고 마이크로프로세서 패키지(266)의 핀(268)을 수납하도록 형성된 복수의 관통 개구(212)를 포함하고 있는 지지판(200)을 가지고 있다.  머더 보드(202)에 회전가능하게 결합된 로우 프로파일 편심 캠 액츄레이터(216)는 마이크로프로세서(266)를 내장하고 있는 지지판(200)을 마이크로프로세서 핀(268)이 탄성 접점(236)을 맞물고 있는 위치에서 그리고 그 위치로부터 이동하도록 제공되어 있다.
Patent KR-19990067482-A (KR)
IPC: A61K8/89
Filed: 1996-10-25
Abstract: PCT No. PCT/US96/17124 Sec. 371 Date Oct. 2, 1998 Sec. 102(e) Date Oct. 2, 1998 PCT Filed Oct. 25, 1996 PCT Pub. No. WO97/17939 PCT Pub. Date May 22, 1997A spray-dried, granular powder comprising: (i) from about 50% to about 99% of a water-soluble carrier, (ii) from about 1% to about 50% of a hydrophobic silicone oil dispersed within the carrier, wherein the spray-dried powder has a volume average particle size in the range from about 20  mu m to about 500  mu m, the powder being prepared by spray-drying an aqueous dispersion of the silicone oil and the water-soluble carrier, characterized in that the silicone oil is present in the dispersion in the form of discrete droplets having a volume average droplet size in the range from about 0.5  mu m to about 20  mu m and that the ratio of the average spray-dried particle size to the average droplet size is at least about 2.5:1. The powder is dry, free-flowing and processable into a punched tablet or other compressed forms, yet efficiently delivers the silicone oil on subsequent dissolution in water.
Patent KR-19990067623-A (KR)
Title: 반도체장치와 그 제조방법 및 실장기판
IPC: H01L23/16
Filed: 1996-09-27
Abstract: 열팽창계수가 반도체칩(1)에 가까운 재료로 구성된 히트싱크(4)의 한쪽면에 반도체칩(1)이 금속접합(2)에 의해 접착되어 있다.    히트싱크(4)는 탄성율이 10㎫ 이하의 실리콘계 접착제(5)에 의해서 프레임체(3)에 접착되어 있다.    또, 프레임체(3)에는 에폭시계 접착제(6)을 거쳐서 TAB테이프(9)가 접착되어 있다.    반도체칩(1)은 외부로부터의 보호를 목적으로 탄성율이 10㎬ 이상의 에폭시계 봉지수지(8)로 봉지되어 있다.
Patent KR-19990071932-A (KR)
Title: 순수한 멜라민의 제조 방법
IPC: C07D251/60
Filed: 1996-12-04
Abstract: 본 발명은 액체, 암모니아-함유 멜라민을, 각각의 경우에 우세한 암모니아 분압에 따르는 멜라민의 응고점 이상인 0 내지 60℃의 온도에서 400 내지 50바의 암모니아 분압 p 1 으로부터 200 내지 대기압의 암모니아 분압 p 2 로 신속하게 팽창시켜 순수한 멜라민을 제조하는 방법에 관한 것이다.  이 결과, 순수한 멜라민은 고체 형태로 침전된다.  또한, 멜라민의 대기압으로의 팽창, 경우에 따라 실온으로의 냉각을 어떤 순서로든 수행하여 순수한 멜라민을 분리한다.
Patent KR-19990076964-A (KR)
Title: 항헤르페스 바이러스 특성을 갖는 페닐 티아졸 유도체
IPC: A61K31/4427
Filed: 1996-12-04
Abstract: 본 발명은 헤르페스 헬리카제-프라이머제 효소 복합체를 억제함에 의한 포유동물에서의 헤르페스 감염 치료 방법 및 헤르페스 복제 억제 방법에 관한 것이다.  또한 본 발명은 헤르페스 헬리카제-프라이머제를 억제하는 화학식 (G)의 티아졸릴페닐 유도체, 티아졸릴페닐 유도체를 포함하는 약제학적 조성물 및 티아졸릴페닐 유도체의 사용과 제조 방법에 관한 것이다. 
     화학식 G 
     
       
     
     상기식에서, 
     R 및 Z는 본원에 정의된 바와 같으며, 
     Z는 특징적인 요소이다.
Patent KR-19990077109-A (KR)
Title: 전자(電磁)접속 및 정전방전(靜電放電)에 대한 보호장치
IPC: H01R13/648
Filed: 1997-01-17
Abstract: 양호한 EMC 특성 즉 전자기적 양립성(電磁氣的 兩立性)을 가지고 있는, 예를 들어 어느 관련 장비라도 그 특성을 악화시킴이 없이, 정전방전에 대하여 보호되는 두 개의 전자장비(19, 20)를 전기적으로 연결하는 장치. 본 장치는 EMC 특성이 악화된 한 장비에 전기적으로 연결된 다른 장비의 특성을 악화시킴이 없이, 다른 장비가 작동이 될 수 있도록 한다. 본 장치는 첫 번째 케이지(16)를 두 번째 케이지(17)에 연결하는 튜브형 소자(4b, 5b, 12, 13)를 포함하고 있다. 튜브형 소자는 두 개의 케이지 간에, 또한 케이지들 사이로 인출된 케이블의 차폐물과 전기적으로 연결되어 있고, 케이블 주위로 덮혀져 봉합된다. 케이블이 통과하도록 케이지의 측면들에 낸 구멍들의 개구면적은, 위치를 바꿀 수 있는 금속판을 사용하여 케이블의 직경에 맞추어 조절된다.
Patent KR-20000016686-A (KR)
Title: Connecting element for liquid-conducting plug-in connections
Inventor: HENSEL MATHIAS
IPC: F16L33/18
Filed: 1997-11-06
Abstract: PURPOSE: Connecting element which have multiple truncated spherical extensions and taper be inserted into connecting end of a hose or tube bypassing by sealing ring unless loading at extension, taper and damaging by sharp the edge of front part. CONSTITUTION: Connecting element for liquid-conducting plug-in connections comprise a flexible hose connecting piece (2) which is formed by a connecting piece (1) inserted into the connecting end of a flexible plastic hose (3). Connecting element has a conically extending plug-in chamfer (4) on its open end and cylindrical shank (5) connected thereto with multiple truncated spherical extensions (6) and (7), in addition to ring-shaped stop flange on end of plug-in area (E), wherein conical taper (9) is connected on rear side of a first truncated spherical extension (6). Peripheral groove (10) is provided in-between extensions (6) and taper (9). Sealing ring (11) with a round cross section is embedded in the groove. In order to facilitate placement of end of the flexible hose or tube on the connecting piece, jacket surface (M1) of a first truncated spherical extension(6) has angle of aperture(α) of approximately 45 degree in relation to jacket surface of shank (5), bypassing by a small margin (a)external jacket (14) of sealing ring (11), while jacket surface (M2) of following taper (9) has a considerably flatter angle of inclination(Beta) of 20 degree to 30 degree in relation to jacket surface of shank (5), being tangent to outer surface (14) in respect to its rear extension.
Patent KR-20000051445-A (KR)
Inventor: PAEK YEONG JIN
IPC: H01M4/00
Filed: 1999-01-22
Abstract: PURPOSE: A cell roller is provided to automatically control the pressure of a roller and to raise the measurement precision of the polar thickness. CONSTITUTION: A cell roller includes following steps. The thickness and density of a taken-up electrode(20) is measured while passing through a sensor(22), which data is inputted into a controller(24) to calculate an appropriate pressure for a driving roller(10a). The controller(24) operates an oil pressure pump(26) based upon the pressure to form oil pressure in the oil pressure pump(26). The oil pressure is transmitted to an oil pressure cylinder(28) and operated according to the pressure inputted in the controller(26) to press a bearing(14). Accordingly, the driving roller(10a) is pressed and the electrode(20) passing through a pair of rollers(10) is pressed meeting the set thickness by way of sensor(22).
Patent KR-19990072380-A (KR)
IPC: B21B35/10
Filed: 1999-02-02
Abstract: Successive roll stands (10, 12) in a rolling mill are driven at selectively different drive speed ratios by a transmission system having a pair of drive shafts (22) and at least one idle shaft (24) journalled for rotation about parallel axes. First and second gear trains each include intermeshed drive gears (G1, G2, G4, G5) freely rotatable on the drive shafts, and a pair of idler gears (G3, G6) on the idler shaft; each being in meshed engagement with at least one of the drive gears of each drive train. Clutches (34) operated to selectively couple the drive gears of the first and second drive trains with their respective drive shafts. <IMAGE>
Patent KR-20000055220-A (KR)
Inventor: YE JIN GU
IPC: F02B75/12
Filed: 1999-02-04
Abstract: PURPOSE: A directly spraying type gasoline engine is provided to effectively realize the gasoline engine characteristic of a directly spraying type. CONSTITUTION: An engine operation condition of high speed and load is applied in an output mode. Absorbed air is let in a combustion chamber(100) during an intake process. A swirl control valve installed in a tumble port(120a) is perfectly opened to absorb much air. The absorbed air through the tumble and swirl ports forms a flow of a tumble/swirl mixed type according to each port characteristic and has a strong warm current element. Fuel is sprayed through a fuel injector(130) during the intake process and mixed with the flow of the absorbed air. An equal air/fuel mixing period is generated until a compression process.
Patent KR-20000055393-A (KR)
Inventor: JEONG GYO YEONG
IPC: H04L12/58
Filed: 1999-02-05
Abstract: PURPOSE: A system for expanding a communication network is provided to efficiently use a signaling point by using a frontal switch as the signaling point to connect many intelligent peripheral devices with a public network. CONSTITUTION: A system for expanding a communication network comprises a public network(30), intelligent peripheral devices(32a,32n), and a frontal switch(31). The public network transmits information such as voices or data. The intelligent peripheral devices accumulate and manage the information. The frontal switch connected to the public network signals an optional call inputted from the public network. The frontal switch decides an intelligent peripheral device for servicing the call, and distributes the call to the corresponding intelligent peripheral device. The frontal switch and the intelligent peripheral devices are connected to a local area network(LAN).
Patent KR-20000055828-A (KR)
Inventor: GANG WAN SUN
IPC: H01L21/027
Filed: 1999-02-10
Abstract: PURPOSE: An apparatus and method for calculating an error amount of an exposure equipment is to define and correct a distortion aberration when a pattern on a mask is exposed to light on a corresponding substrate. CONSTITUTION: An apparatus for calculating an error amount of an exposure equipment comprises: a coordinate value measuring part(1) for calculating coordinate values corresponding to a directed position of a pattern formed on a mask and a directed position of an exposed pattern on a substrate and outputting the calculated coordinate values; and an error occurrence amount calculating part(2) for reading the coordinate values output from the coordinate value measuring part, calculating respective error amounts of a non-linear conversion function and a linear function using the least square method and performing an error correction for the calculated non-linear conversion function and the linear function.
Patent KR-20000055829-A (KR)
Inventor: KIM IL HWAN
IPC: D06M11/46
Filed: 1999-02-10
Abstract: PURPOSE: A spun yarn prepared by controlling luster, a section and a fineness of a polyester filament yarn and bending is provided which is highly similar to high quality cotton in appearance and excellent in dyeing fastness. CONSTITUTION: A spun yarn is prepared by spinning a polyester filament having a titanium oxide content of 0.5 to 5% by weight, a circular or modified cross section, an apparent fineness of a filament of 0.1 to 5 denier, a filament number of 6 to 2,000, and a total fineness of 30 to 1,000 with a spun fiber having a length of 2 to 8 cm, or spinning a staple fiber in the same range. The spun yarn can manufacture cotton-like textile or knit having excellent touchness and which is easy to handle.
Patent KR-19990072578-A (KR)
IPC: H01L21/822
Filed: 1999-02-11
Abstract: 본 발명은 보호 동작 범위가 넓고, 사이리스터 회로를 사용하지 않고서, 출력 트랜지스터의 단락이 해제될 때까지 보호 동작을 유지할 수 있는 부하 단락 보호 회로를 제공하는 것을 목적으로 한다. 
     본 발명에 따른 부하 단락 보호 회로는 출력 전력 증폭 회로의 출력 전압 신호를 발생시키는 2개의 출력 트랜지스터와, 2개의 출력 트랜지스터의 콜렉터 전류를 각각 검출하는 출력 트랜지스터 전류 검출 회로와, 2개의 출력 트랜지스터의 콜렉터 전압을 각각 검출하는 출력 전압 검출 회로를 구비하고, 2개의 출력 트랜지스터의 콜렉터가 소정의 저임피던스 노드에 단락된 상태하에서 2개의 출력 트랜지스터중 한쪽의 콜렉터 전류의 값이 소정의 설정 기준 전류치에 도달하며, 2개의 출력 트랜지스터중 다른쪽의 콜렉터 전압의 값이 소정의 설정 기준 범위내의 값이 되었을 때, 출력 트랜지스터의 보호 동작을 행하는 것이다.
Patent KR-20000055910-A (KR)
Inventor: KIM SUNG KWANG
IPC: H05K7/20
Filed: 1999-02-11
Abstract: PURPOSE: A device and method for attaching heatproof plate is provided to enable users to prevent any conversion of lid frame and minimize the heat change of lid frame so as to maximize productivity by attaching lid frame of strip status to the heatproof plate. CONSTITUTION: A device and method for attaching heatproof plate(21) includes the following components. A heatproof plate moving unit(22) is attached with a series of heatproof plates. A lower part heater block(24) is established with heat supply method which supplies heat to the heatproof plate(21). An upper part heater block(23) is established with a certain heat supply method and is attached to the heatproof plate moving unit(22). The device and method enables users to maximize productivity by attaching lid frame of strip status to the heatproof plate.
Patent KR-20000056487-A (KR)
Inventor: LEE GEUN HO
IPC: G01S15/42
Filed: 1999-02-22
Abstract: PURPOSE: A device for sensing object and its method is provided to sense even an object which is at no great distance or which is at a great distance. CONSTITUTION: A device for sensing object is composed of a modulation amplifier(3), an ultrasonic sensor(5), a receive amplifier(7), a first integrator(11), a second integrator(12), a third integrator(13) and a controller(10). The ultrasonic sensor(5) has a transmitter and a receiver. The transmitter generates an ultrasonic and the receiver receives a reflection wave which is reflected by object and reverberation by aftershock of the transmitter. The receive amplifier(7) amplifies the inputted reflection wave and reverberation from the receiver. The first integrator(11) integrates the received reflection wave and reverberation from the receiver, based on 2.5V to 3.5V threshold voltage. The second integrator(12) integrates the received reflection wave and reverberation, based on 1.5V to 2.3V threshold voltage. The third integrator(13) integrates the received reflection wave and reverberation, based on 0.4V to 1.0V threshold voltage. The first integrator(11), second integrator(12) and the third integrator(13) are parallel connection. The controller(10) compares the integrated reflection wave in the integrator(8) with the rectified reflection wave in the rectifier(9) and then distinguishes the position of object.
Patent KR-19990077539-A (KR)
Title: 브래킷
IPC: H01Q1/12
Filed: 1999-03-03
Abstract: 본 발명은 일 물체를 다른 물체상에 장착하기 위한 브래킷에 관한 것이다. 상기 브래킷은 두 개의 선회가능하게 결합된 링크를 포함하고, 그중 하나는 상기 일 물체를 수용한다. 각 링크는 각 고정 부재에 선회가능하게 결합되어 상기 다른 물체에 고정된다. 상기 선회가능한 결합부는 상기 다른 물체에 고정되었을 때 고정 부재가 이격되는 거리가 상기 다른 물체에 대한 상기 일 물체의 각도 방위(angular orientation)를 결정하도록 평행한 선회축을 갖는다.
Patent KR-20000060381-A (KR)
Inventor: SON WI MU
IPC: F23G5/00
Filed: 1999-03-15
Abstract: PURPOSE: An apparatus for incinerating inflammable waste is provided to achieve complete combustion by repeating diffusion and collection of combustion flames and discharge combustion flames of a complete unpolluted state by collecting smoke, carbon and harmful gas by an underwater dust collector. CONSTITUTION: An apparatus for incinerating inflammable waste includes an incineration furnace(1), a combustion substance and flame diffusing plate(7) mounted at an upper part of the incineration furnace and formed in the shape of a square corn with a plurality of air injection holes(5a), combustion substance and flame inducing holes(9) around the combustion substance and flame diffusing plate, a traverse air introducing pipe(4) mounted traversely above the plate and formed with a plurality of air injection holes, a plurality of short air introducing pipes(4a) formed with a plurality of air injection holes, an air introducing channel(6) formed in the peripheral parts of the incineration furnace below the plate in communication with the traverse and short air introducing pipes, and an ignition element formed at one side of the incineration furnace.
Patent KR-20000060421-A (KR)
Inventor: BAEK RAK JUN
IPC: H01Q1/08
Filed: 1999-03-15
Abstract: PURPOSE: An automatic stretching device of a terminal antenna by detecting line status is provided to improve antenna device in order to have a superior instrumental reliability and more convenient and stable electrical feature. CONSTITUTION: In an automatic stretching device of a terminal antenna by detecting a line status, a helical spring(218) is connected a lower part of a 1/4 wavelength whip antenna(212) for giving an elasticity to the whip antenna(212). A trigger device(219) is inserted within an antenna tube in order to stretch the 1/4 wave length whip antenna(212) automatically. When a terminal control device detects a service signal, the terminal control device approves a control signal to the trigger device(219), so to stretch the antenna.
Patent KR-19990046051-A (KR)
Title: 양란심비디움신품종원더랜드식물
Filed: 1999-03-17
Abstract: 본 발명은 오렌지색을 가지는 복륜화로서 분화용의 우수한 양란 심비디움 신품종에 속하는 식물 "원더랜드"를 제공하는 뛰어난 효과가 있다.
Patent KR-20000066820-A (KR)
Inventor: SHIN DONG HO
IPC: G11B7/08
Filed: 1999-04-21
Abstract: PURPOSE: A concentration optical system for generating a near field is to minimize a size of a light spot to facilely to increase a recording density without changing a shape and the quality of a concentration optical system. CONSTITUTION: A concentration optical system for generating a near field comprises a first surface having an inner portion(301) for refracting an incident light beam and an outer portion(303) for re-reflecting the reflected light beam, and a second surface having a curved portion(305) for reflecting the light beam refracted in the inner portion of the first surface to the outer portion, and a concentrating portion(307) for concentrating the light beam reflected on the outer portion to from the near field, wherein a concentration angle of the light concentrated on the concentrating portion is increased according to a curvature of the curved portion. In the system, the curved portion of the second surface is formed into a convex lens type. A light spot by the system has a size of 0.15 micron meter.
Patent KR-20000067485-A (KR)
Inventor: KIM GWANG WON
IPC: F01M11/00
Filed: 1999-04-29
Abstract: PURPOSE: An oil pan for motor vehicles is provided to lengthen lifespan of an engine and achieve an improved cooling efficiency for a heated engine oil by using layer-built baffle plates. CONSTITUTION: An oil pan(3) comprises a plurality of baffle plates(32',32'') made of a thin flat metal and which are stacked in vertical direction of the oil fan, a path(37) formed by arranging one ends of the baffle plates to be separated zigzag from an outer wall(36) of the oil pan. The baffle plate has at a surface thereof a fixing hole(35) and an oil strainer(38) penetrates the fixing hole. Since the baffle plates are stacked to have a predetermined tilt, contact time between an oil and an outer wall of oil pan is delayed.
Patent KR-20000073609-A (KR)
Inventor: KIM JEONG SIK
IPC: H04N5/655
Filed: 1999-05-12
Abstract: PURPOSE: An LCD monitor including an adjustable mechanism for height or angle is provided for an optimum angle of view according to an external condition such as external light condition and the location of light source. CONSTITUTION: The height adjusting unit(30) includes a rack(21) with an upper end being coupled to an engaging part(11), a pinion(22) meshed with the rack, an adjusting gear(23) meshed with the pinion, a gear housing fixing the pinion and the adjusting gear rotatably, and a knob. The rack is provided with a guide rib(12c) to position within a guide portion(12b) of a stand(12). The gear housing has a number of bearings to receive a first and second pivot shaft, and is engaged to a bottom portion(12a) of the stand. The first pivot shaft is inserted into the bearing of the gear housing, with the pinion being inserted into the first pivot shaft. The second pivot shaft is inserted into the bearing of the gear housing, with the adjusting gear being inserted into the second pivot shaft. The adjusting gear has a number of teeth more than that of the pinion.
Patent KR-19990088263-A (KR)
IPC: G02B6/42
Filed: 1999-05-13
Abstract: 본 발명은 하우징(8)내의 홀더(9)내에 배치된 세개의 발광부(1a, 1b, 1c), 투사렌즈(3) 및 두 개의 다이크로익 미러(5a, 5b)과 홀더(9) 아래에 배치된 검출 수광부(2a)를 갖는 광전 스위치에 관한 것이다. 발광부(1c)의 광축(Lc)이 투사렌즈(3)의 광축(Lx)과 같아지고, 발광부(1b)의 광축(Lb)이 투사렌즈(3)의 광축(Lx)과 직각으로 교차하고, 발광부(1a)의 광축(La)이 투사렌즈(3)의 광축(Lx)와 예각의 경사를 가지면서 교차하도록, 발광부(1a, 1b, 1c) 및 투사렌즈(3)가 배치된다. 광섬유(6a)는 투사렌즈(3)를 통하여 집속되는 빛을 검출위치로 전송하고, 광섬유(6b)는 검출위치에서 빛을 검출 수광부(2a)로 전송한다.
Patent KR-20000074775-A (KR)
Inventor: CHO HYOUNG DAE
IPC: G04G9/12
Filed: 1999-05-25
Abstract: PURPOSE: A watch is provided to report time with variations of an analog liquid crystal display(LCD) without digital numbers for displaying hours/minutes/seconds on watches, so that a watch owner can easily recognize time streams. CONSTITUTION: A watch controller(11) counts time. A time display driver(12) drives a liquid crystal time display(13) by being connected to a time output of the watch controller(11). A minute displaying driver(14) drives a liquid crystal minute display(15) overlapped-arranged by considering a starting point of the liquid crystal time display(13) as a concentric circle, by being connected to a minute output of the watch controller(11). The liquid crystal time display(13) is integrated with many liquid crystal units with a circle shape. The liquid crystal minute display(15) is overlapped-arranged on a watch surface with the liquid crystal time display(13) with a concentric circle shape, and is composed of many liquid crystal units.
Patent KR-20010001731-A (KR)
Inventor: KIM IN GI
IPC: H04N7/14
Filed: 1999-06-08
Abstract: PURPOSE: A television for controlling multimedia device is provided to control the multimedia device using the television and monitor the control result using a screen, thereby easily controlling the multimedia device. CONSTITUTION: A television for controlling multimedia device comprises a television(10), a multimedia device(11) and a control device(12). The television(10) is connected to the multimedia device(11) through a data bus to perform a data communication and performs the program of the multimedia device(11) to display the results on a screen. The control device(12) generates predetermined events on a screen of the multimedia device. The television(10) consists of a data transceiver(10-1), a memory(10-2), a signal processor(10-3), a display(10-4) and a controller(10-5).
Patent KR-20010008579-A (KR)
Inventor: HONG BYEONG SEOP
IPC: H01L21/76
Filed: 1999-07-02
Abstract: PURPOSE: A method for manufacturing a shallow-trench-isolation(STI) type isolation layer of a semiconductor device is provided to round upper corners of a trench, by increasing a thickness of a pad oxide layer for a buffering operation regarding a nitride layer while adding an annealing process to processes for a sacrificial oxide layer and a sidewall oxide layer after the trench is formed. CONSTITUTION: A pad oxide layer(102) and a pad nitride layer(104) are sequentially stacked on a semiconductor substrate(100) wherein the pad oxide layer and the pad nitride layer have a thickness ratio of 1:3 or 1:5. After the nitride layer and the oxide layer are patterned by a photolithography process using an isolation mask, a trench is formed to a predetermined depth. A wet cleaning process is performed regarding the substrate having the trench to etch a sidewall portion of the pad oxide layer of the pad nitride layer by a predetermined size. After a sacrificial oxide layer is formed inside the trench, a high temperature annealing process is performed to round upper corners of the trench and the oxide layer is removed. A sidewall oxide layer is formed inside the trench and a high temperature annealing process is carried out. A liner oxide layer is formed on the entire substrate having the sidewall oxide layer. After a gap fill oxide layer is filled in the trench of the substrate having the liner oxide layer and planarized, the nitride layer is eliminated to form an isolation layer on the substrate.
Patent KR-20010011574-A (KR)
Inventor: PARK GWANG HYEON
IPC: H01J29/07
Filed: 1999-07-29
Abstract: PURPOSE: A shadow mask is provided to prevent a deformation of the shadow mask by reinforcing the shock resistance through reinforcing the weakest and concentrated portion of deformation. CONSTITUTION: The shock is spread by centering each welded portion(20). The shock wave is overlapped in a center portion(22) so that the shock intensity is maximized. A shadow mask is mainly transformed in this portion. An interval between a hole of the shadow mask(12) and a starting portion of the hole is wider from the center to the peripheral of a screen. The interval of the center portion(22) is maximized.