baber/WOPTO huggingface dataset:
Patent KR-20100096764-A (KR)
Title: Manufacturing apparatus of seamless pipe
Inventor: LEE JAE SEON
IPC: B21C29/00
Filed: 2009-02-25
Abstract: PURPOSE: A manufacturing apparatus for a seamless pipe is provided to obtain a uniform product size by maintaining uniform temperature over the parts of a heated solid rod. CONSTITUTION: A manufacturing apparatus for a seamless pipe comprises a heating unit(100), an insulating unit(200), a pressure roller(300), a feeding unit(400), and a mandrel(500). The heating unit heats a solid rod. The insulating unit comprises an internal space to keep the solid rod warm. The rotary shaft of the pressure roller is arranged to cross the length of the solid rod and transfers the solid rod in the longitudinal direction. The feeding unit supplies the solid rod to the pressure roller. The mandrel passes through the central axis of the solid rod.
Patent KR-20090092243-A (KR)
Title: Cosmetic composition comprising a particular silicone copolymer, a volatile solvent and a particular silicone resin
Inventor: BRUN GAELLE
IPC: A61K8/89
Filed: 2009-02-25
Abstract: A composition for treating a keratin fiber, which contains copolymer of silicon resin and silicon substrate is provided to form coating on the keratin fiber and maintain color on the keratin fiber. A composition for treating keratin fiber comprises a copolymer of silicon resin and fluid silicon substrate and a silicon resin having three funcational unit of the chemical formula (CH3)SiO3/2. The copolymer comprises 45%~75% of silicon resin and 25%~55% of fluid silicon. The silicon resin is a silsesquioxane of the chemical formula ((CH3)SiO3/2)x. The composition comprises ferric oxide, chromium oxide, manganese violet, ultramarine blue, or titanium dioxide pigment. The keratin fiber is applied using the composition and washed during the regular time.
Patent KR-20100099859-A (KR)
Title: Electromotive compressor having inverter
Inventor: HAN YOUNG CHANG
IPC: F04B53/00
Filed: 2009-03-04
Abstract: PURPOSE: An electric compressor with an inverter is provided to reduce the size of a mainboard using the bus bar assembly formed separately from the mainboard. CONSTITUTION: An electric compressor comprises an inverter. The inverter is installed in an inverter housing formed on one side of a compressor housing and changeably controls the rotation speed of a compressor drive motor. The inverter comprises a mainboard(110), bus bar assembly(120), a low power element, and a high power element. The mainboard supplies the power to the drive motor. The bus bar assembly comprises a bus bar(121) electrically connected to the mainboard and an insulator(122) covering the bus bar. The low power element is mounted on the mainboard. The high power element is mounted on the insulator and is connected to the bus bar.
Patent KR-20100061269-A (KR)
Title: Broadcasting terminal and method for providing broadcasting service by cooperation with other terminals based on overlay multicast environment
Inventor: KIM KYUNG HUN
IPC: H04L12/28
Filed: 2009-03-05
Abstract: PURPOSE: A broadcasting terminal and a method for providing broadcasting service by cooperation with other terminals based on overlay multicast environment are provided to supply real time broadcasting service through a broadcasting channel by setting the broadcasting channel through inter-terminal collaboration. CONSTITUTION: A broadcasting terminal(1) comprises a channel generation unit(10) and a channel decision unit(20). The channel generating unit generates a virtual channel according to the contents. The class of the contents is differentiated. The channel decision unit sets the virtual channel for the contents providing through the collaboration with other broadcasting terminal. The channel decision unit provides the contents to the set virtual channel. The channel decision unit sets one virtual channel through the merge of the generated virtual channel.
Patent KR-20100100331-A (KR)
Title: Porous water-collecter for drain of revetment
Inventor: YOU DON UP
IPC: E02D17/20
Filed: 2009-03-06
Abstract: PURPOSE: A porous water-collector of a retaining wall, which collects the subsurface water of the rear side of a retaining wall, is provided to prevent deposit inside a retaining wall by preventing the inflow of sand and soil. CONSTITUTION: A porous water-collector of a retaining wall is as follows. A separate exclusive filtering film is covered on the porous water-collector. The separate exclusive filtering film is connected to the drain pipe of a retaining wall.
Patent KR-20100102989-A (KR)
Title: Potable apparatus
Inventor: HA JUNG WOO
IPC: H02J7/04
Filed: 2009-03-12
Abstract: PURPOSE: A portable apparatus is provided to efficiently manage power supplied from the outside by supplying stable power to a system and a rechargeable battery. CONSTITUTION: A portable apparatus(1) includes a power managing circuit(100), a system(200), a rechargeable battery(300). The power managing circuit includes a system power supplying unit(110), a rechargeable power supplying unit(120), and a switching unit(130). The rechargeable battery is charged by a rechargeable battery current. The rechargeable battery supplies power to the system. The system power supplying unit supplies a system current to the system. The system power supplying unit outputs a proportional current with respect to the system current. The rechargeable power supplying unit directly receives power from the outside. The rechargeable power supplying unit supplies the rechargeable battery current, which is inversely proportional to the proportional current, to the rechargeable battery.
Patent KR-20100103126-A (KR)
Inventor: KIM JEOM GOO
IPC: G06F21/00
Filed: 2009-03-13
Abstract: 본 발명은 네트워크 통합보안관리스템의 효과적인 부하분산 처리에 관한 것으로, 슈퍼컴퓨팅 기술에서 사용되는 클러스터링 부하분산 기법을 통합보안관리시스템에 적용한 것이다. 클러스터링은 물리적인 여러 동일 및 다른 시스템을 하나의 논리적 시스템으로 구성하는 것이며, 여러 물리적 시스템이 논리적으로 하나의 작업에 대해 처리하기 때문에 부하분산 및 처리속도에서 효과적이다는 장점이 있다. 따라서, 본 발명은 침입차단시스템, 침입탐지시스템, 보안관제시스템(Enterprise Security Management) 등의 물리적 시스템을 클러스터링 기법을 이용하여 하나의 논리적 시스템으로 UTM(Unified Threat Management)을 구성하며, 각 시스템에서 발생되는 보안 이벤트를 보안관제시스템의 이벤트 처리 프로세스와 이벤트 스케줄러를 통하여 처리 이벤트를 생성한다. 생성된 처리 이벤트는 침입차단시스템, 침입탐지시스템에 전송되어 각 시스템이 처리 이벤트를 적절하게 처리한다. 
       
     통합보안관리세시스템, ESM, UTM, 보안관제시스템, 침입차단시스템, 침입탐지시스템
Patent KR-20100105162-A (KR)
Title: Apoptotic effect of ar-turmerone in human histiocytic lymphoma u 937 cells
Inventor: LEE YONG KYU
IPC: A61K31/12
Filed: 2009-03-20
Abstract: PURPOSE: A composition containing ar-turmerone for preventing and treating human malignant lymphoma cells is provided to suppress cancer cell proliferation and to treat malignant lymphnoma. CONSTITUTION: A composition for treating or preventing human malignant lymphoma contains ar-turmerone. The ar-turmerone is derived from turmeric or Curcuma zedoaria. ar-turmerone has apoptosis efficiency to human malignant lymphoma cells(U937).
Patent KR-20100105934-A (KR)
Title: Home-use power pulverizer
Inventor: LEE JAE BOO
IPC: A47J43/04
Filed: 2009-03-23
Abstract: PURPOSE: A domestic grinder is intended to provided fine powder since the grinding operation is repetitively performed by the rotation of a motor and then a filtering net filters again. CONSTITUTION: A motor(2) is connected to a main body(1) and a motor cover(3) is mounted on the motor. A rotating blade connected to a rotating shaft(6) by tow belt pulleys(4) and a belt receives and rotates the power with the operation of a motor. A shaft fixing rod(5) makes the two belt pulleys exist on the same line so that a number of objects can smoothly rotate. A grinding case comprises a filtering net(9), a rotating blade(10) is arranged in the filtering net and the rotating blade comprises male/female grooves, which have a shape twisted with a shaft. A safety switch(7) is installed on the upper part of the grinding case(8) and operates only when the grinding case and a case cover(19) are safely assembled. The lower part of the grinding case comprises a square shape opening, which is communicated with the upper part of a powder bin cover to enable the powder to be added to a powder bin(18).
Patent KR-20100107807-A (KR)
Title: 크레인 제어 장치
Inventor: LEE CHANG KUN
IPC: B66C13/18
Filed: 2009-03-26
Abstract: 본 발명은 크레인 후크에 의한 제품의 권상과 권하를 감지하는 감지부; 및 상기 제품의 권상과 권하 감지에 의해 제품이송 완료를 판단하고, 제품이송 완료시 해당 제품에 대한 실적처리 신호를 제품관리 서버로 전송하는 크레인 제어부를 포함하는 것을 특징으로 하는 크레인 제어 장치에 관한 것이다. 
       
     크레인, 후크, 코일, 이송
Patent KR-20100026958-A (KR)
Title: Wrench
Inventor: NAM DUCK HYUN
IPC: B25B13/10
Filed: 2009-04-08
Abstract: PURPOSE: A wrench is provided to easily insert a bolt or a nut by minimizing an unnecessary space in a first jaw or a second jaw. CONSTITUTION: A wrench is composed of a handle(100) and a head(110). The head comprises a base part, a first jaw(110a), and a second jaw(110b). The base part is connected to one end of the handle. The first and second jaws are extended from both sides of the base part. A through hole is formed in one of the first and second jaws, and comprises a latch member(120) and an elastic press member(130). The latch member is retracted toward the base part. The elastic press member elastically pressurizes the latch member toward the base part.
Patent KR-20100112265-A (KR)
Title: Driving film and editing method for driving film
Inventor: AHN JAE HYUN
IPC: H05K3/46
Filed: 2009-04-09
Abstract: PURPOSE: The drive film and drive film method for editing minimize the size of the defect interval generating according to the junction going the drive film. CONSTITUTION: Both ends of the defect interval existing in the drive film cutes. The drive film of the good section in which the defect interval cuts is arranged in the location canning be adhered to the reciprocity. Circuits(a2, a3) are formed in the front of the drive film. The adhesive film(100) is attached to the lower-part of the drive film of the good section.
Patent KR-20100113721-A (KR)
Inventor: CHO HEUNG JAE
IPC: H01L29/78
Filed: 2009-04-14
Abstract: PURPOSE: A vertical channel transistor and the manufacturing method thereof having the double gate electrode are that the pillar the film for pillar is in filled is formed in the trench in which the sacrificing layer is etched and which is formed for pillar. CONSTITUTION: The sacrificing layer(21) is formed on the substrate(20). A plurality of trench for pillars in which the sacrificing layer is etched and exposing substrate is formed. The film for pillar is in filled within the trench for pillar and a plurality of pillars(22) projected from substrate is formed. The sacrificing layer is eliminated and the sidewall of pillar exposes.
Patent KR-20100094302-A (KR)
Title: System and method for intermediating on-line advertisement
Inventor: PARK KWANG SOON
IPC: G06Q30/02
Filed: 2009-04-23
Abstract: PURPOSE: A system and a method for intermediating an online advertisement are provided to reduce user interface which registering method and posting method is simplified, thereby increasing the convenience of a user. CONSTITUTION: A DB stores a plurality of online advertisements. A web server(110) provides an advertisement repository providing list of the online advertisements to a user terminal. If a request for posting about one selected among the online advertisement lists is received, a management server displays the selected online advertisement to a certain area of web page of relevant user space. The management server pays an advertisement rate by calculating the rate.
Patent KR-20090114329-A (KR)
Title: Pharmaceutical formulation
Inventor: KIM SUNG WUK
IPC: A61K9/52
Filed: 2009-04-29
Abstract: PURPOSE: A pharmaceutical formulation containing immediate release atorvastatin and sustained release olmesartan is provided to treat coronary artery disease and maximize body absorption of drug. CONSTITUTION: A pharmaceutical formulation contains immediate release compartment of atorvastatin and sustained release compartment of olmesartan. The olmesartan is its isomer, its pharmaceutically acceptable salt, or its prodrug. An olmesartan prodrug is olmesartan medoxomil.
Patent KR-20100118703-A (KR)
Title: Sensor piece assemble equipment for assemble type cam shaft
Inventor: LEE CHUNG HWAN
IPC: B23Q7/14
Filed: 2009-04-29
Abstract: PURPOSE: A sensor piece assembling apparatus for an assembly type camshaft is provided to streamline manufacturing processes, since a sensor piece is coupled with a cam shaft by a forcible press-fitting process. CONSTITUTION: A sensor piece assembling apparatus for an assembly type camshaft comprises a cam shaft loading unit(10), a feed port(20), a model sorting unit(30), a location selector(40), a sensor piece loading unit(60), a sensor piece measuring unit(70), an assembly unit(50), and an product inspecting unit(80). The cam shaft is successively placed and transferred to the feed port. The model sorting unit senses the identifying band of the cam shaft and distinguishes the kind of the cam shaft. The location selector rotates cam shaft and the selects the assembly angle of the sensor piece. The sensor piece measuring unit measures the inner diameter of the sensor piece and sorts the sensor piece. The assembly unit provides the sensor piece to the same side of the cam shaft to assemble the sensor piece and the cam shaft.
Patent KR-20100121091-A (KR)
Title: Vertical blind
Inventor: HA YANG SOO
IPC: H02S99/00
Filed: 2009-05-08
Abstract: PURPOSE: A vertical blind is provided to effectively prevent a solar cell plate from being contaminated by installing the solar cell plate on the side surface of a window in which the blind is located. CONSTITUTION: A vertical blind comprises a horizontal guide rail(10), multiple carriers(20), multiple shielding blinds(30), storage battery units(40), a horizontal transferring unit(50), and an angle controller(60). The horizontal guide rail is installed in order to guide the blind in a horizontal direction. The carriers are slidably fixed to the horizontal guide rail. The shielding blinds are fixed to the carriers. The storage battery units are fixed to the bottom of the shielding blinds. The horizontal transferring unit horizontally transfers the shielding blinds.
Patent KR-20100121570-A (KR)
Title: Sports training method, toy
Inventor: JEONG JEOM YOUNG
IPC: A63H13/04
Filed: 2009-05-10
Abstract: PURPOSE: A toy for sports training method is provided, which enables sports beginners to perform an image training more effectively. CONSTITUTION: A toy for sports training method is constituted as follows. The toy for sports training method is formed so that joint and backbone of the human body can be rotated and bent like golfer's swing operation. A shaft of the golf club combined with the hand of a doll has elasticity, twisting and bending. A doll is provided to allow a user to learn property of a baseball bat without twisting and bending.
Patent KR-20100121958-A (KR)
Inventor: CHO CHUNG IL
IPC: G06Q30/02
Filed: 2009-05-11
Abstract: 본 발명은 콘텐츠 접속정보 제공 시스템에 관한 것으로, 특히 무선 인터넷 접속이 용이하도록 유도하는 액티브 광고 패널장치와 그를 이용한 콘텐츠 접속정보 제공 시스템에 관한 것이다. 본 발명의 액티브 광고 패널장치는 광고지상의 임의의 영역에 가해지는 조작정보와 RF카드와 같은 매체로부터 획득된 고객정보를 이동통신망을 통해 콘텐츠 접속정보 제공 시스템으로 전송한다. 이에 콘텐츠 접속정보 제공 시스템은 패널 조작정보에 대응하는 콘텐츠 접속정보를 독출하여 패널 조작한 고객의 이동통신 단말기로 전송함으로써, 광고패널 조작자는 결과적으로 자신이 희망하는 콘텐츠 제공 사이트에 보다 편리하게 접속하게 되는 효과를 얻을 수 있다. 
     
     광고, 패널, 고객정보.
Patent KR-20090129333-A (KR)
Title: Filter and display device having the same
Inventor: SHIN DONG KEUN
IPC: G02B5/20
Filed: 2009-06-03
Abstract: PURPOSE: A filter for a display device and the display device having the filter are provided to form a near-infrared shielding layer on one side of a transparent supporting body, and to form an electromagnetic shielding layer on the other side thereof, thereby bonding one sheet of a shielding film with a base substrate. CONSTITUTION: A shielding film(320) is composed of a single film receiving support of a single transparent supporting body. The shielding film comprises an electromagnetic shielding layer(326) on one side of the transparent supporting body heading toward a base substrate(310). A grounding bar(340) for grounding the electromagnetic shielding layer is formed on one side of the base substrate. A shielding film is adhered to a front side of the base substrate. The grounding bar is extended to a rear side along with a side from the front side of the base substrate.
Patent KR-20090127226-A (KR)
Title: Image processing apparatus and image processing method
Inventor: KIDO HIDEYUKI
IPC: H04N1/387
Filed: 2009-06-04
Abstract: PURPOSE: An image processing apparatus and an image processing method are provided to accurately extract an image of an area corresponding to a shape image from a handwriting sheet without respect to a shape image. CONSTITUTION: A data converting unit(9) converts document image data stored in a read buffer memory(8) into printing data. A CPU(Central Processing Unit)(2) reads the printing data stored in a print buffer memory(10). The CPU transmits the printing data to a printing device(12). The data converting unit converts image data stored in an image memory(13) into printing data.
Patent KR-20100134859-A (KR)
Title: A foundation pile reinforcement structure and excution method
Inventor: JUN KYU NAM
IPC: E02D5/30
Filed: 2009-06-16
Abstract: PURPOSE: A base pile head reinforcing unit, capable of the maximization of construction efficiency, and convenience and a construction method thereof are provided to maintain the stable construction state by integrating a reinforcing unit and concrete. CONSTITUTION: A base pile head reinforcing unit comprises a lower plate(10), an upper plate(20), a tightening screw(30) and a pressure nut(35). A screw hole(11) is formed on the center of the lower plate. The tightening screw is inserted and jointed in order to pass through each screw hole. The pressure unit is combined with the end of the tightening screw and presses the upper plate in order to control the gap between the upper plate and the lower plate.
Patent KR-20100135402-A (KR)
Inventor: PARK KWANG DONG
IPC: G02C5/22
Filed: 2009-06-17
Abstract: PURPOSE: Glasses are provided to be prevented from breakage by separating the magnet parts of eyeglasses frame and legs when an external impact is occurred. CONSTITUTION: Magnets(11, 21) are attached by magnetic force in order to maintain a fixed state. The magnets firmly fix an eyeglasses frame(10) and legs(20). When an external impact is occurred to the eyeglasses frame and legs, the magnets are separated from each other in order to prevent the breakage of the eyeglasses frame and the legs.
Patent KR-20110009902-A (KR)
Title: Separation connector unit for key code
Inventor: JUN HAN SIK
IPC: H01R13/629
Filed: 2009-07-23
Abstract: PURPOSE: A key code releasable connector apparatus for differently applying the key code is provided to increase the convenience of a product by inserting a key code unit into an insertion unit according to the product. CONSTITUTION: One or more key code insertion part(110) is formed in a connector body part into a predetermined groove. A key code part(120) is inserted into the key code insertion part. The key code part is projected to the connector body part. The inside of one or more key code insertion part has the different color.
Patent KR-20110010967-A (KR)
Title: Steel strip casting apparatus with horizontal twin roll
Inventor: PARK CHEOL MIN
IPC: B22D11/10
Filed: 2009-07-27
Abstract: PURPOSE: A horizontal twin roll strip casting device is provided to improve the quality of a thin film by supplying the inert gas to prevent the oxidation of molten steel. CONSTITUTION: A horizontal twin roll strip casting device comprises nozzles(3a,3b), a gas supply inlet(9), a plurality of gas exhaust ports(10), gab maintenance frames(11a,11b). The nozzle injects molten metal between two casting rolls(1) revolving in opposite directions. The nozzle is securely supported with a hydraulic cylinder.
Patent KR-20110011034-A (KR)
Title: Dual band transmission line circuit using capacitor using series capacitor only
Inventor: LEE YONG SHIK
IPC: H01P3/06
Filed: 2009-07-27
Abstract: PURPOSE: A dual band transmission line circuit using a serial capacitor is provided to vary capacitances and frequencies using a varactor diode. CONSTITUTION: A first capacitor(302) is serially connected to a first transmission line(301). A second transmission line(303) is serially connected to the first capacitor. A second capacitor(304) is serially connected to the second transmission line. A third transmission line(305) is serially connected to the second capacitor. A third capacitor(306) is serially connected to the third transmission line. The capacitances of the first capacitor and the third capacitor are identical. A fourth transmission line(307) is serially connected to the third capacitor. The characteristic impedances and the electrical lengths of the second transmission line and the third transmission line are identical. The characteristic impedances and the electrical lengths of the first transmission line and the fourth transmission line are identical.
Patent KR-20110012587-A (KR)
Title: Automatic inspecting method of pump dispenser
Inventor: JEON JIN MO
IPC: B65D47/34
Filed: 2009-07-31
Abstract: PURPOSE: An automation inspection method for a pump dispenser is provided to sort a large amount of pump dispensers, put in through a feeder and a conveyor, into good and inferior products through automatic cleaning and exterior inspection. CONSTITUTION: An automation inspection method for a pump dispenser is as follows. Produced pump dispensers are provided and transferred(S10). Air is sprayed to the pump dispensers in order to remove the cleaning liquid remaining in the pump dispensers(S20). Foreign materials attached to the pump dispensers are washed off and the pump dispensers are dried(S30). The good and inferior products of the pump dispensers are determined(S50).
Patent KR-20110013051-A (KR)
Title: Method for fabricating metal line of semiconductor device
Inventor: KIM IN HOE
IPC: H01L21/28
Filed: 2009-07-31
Abstract: PURPOSE: A metal wiring forming method of a semiconductor device is provided to prevent the loss of side wall of a trench by processing the etching process in the anisotropic manner. CONSTITUTION: An interlayer insulating film(32) is formed on the top of a semiconductor substrate(30). A trench is formed on the interlayer insulating film by using the photosensitive pattern. A photosensitive pattern is removed by implementing the anisotropic etching. A diffusion barrier(35) is formed on the interlayer insulating film in order to cover up the side of the trench.
Patent KR-20110014757-A (KR)
Inventor: CHOI JAE KYO
IPC: B65B1/32
Filed: 2009-08-06
Abstract: 본 발명은, 고추가루가 공급되는 트인 상부를 가지고 있고 전면과 배면이 안쪽으로 경사져 있으며 하부면이 트여 있는 고추가루 공급통과; 상기 고추가루 공급통의 하부에 그 상면이 상기 고추가루 공급통과 트인 상태로 연결되어 있고 좌측면이 트여 있으며 밑면과 우측면, 배면 및 전면이 막혀 있는 스크류 공간과; 상기 스크류 공간(23)의 트인 좌측면과 연통된 고추가루 경유통과; 상기 스크류 공간에 회동가능하게 수평하게 설치된 제1스크류와;  상기 고추가루 공급통에 회동가능하게 설치되어 공급된 고추가루를 섞어주는 회전날개와;  상기 고추가루 공급통의 우측 상부에 설치된 제1모터와;  상기 제1모터의 모터 샤프트에 고정된 제1구동기어와;  상기 회전날개의 회전축에 결합된 제1종동기어와; 상기 제1구동기어와 제1종동기어사이에 연결되어 상기 제1구동기어의 회전력을 상기 제1종동기어로 전달하기 위한 제1체인과; 상기 회전날개의 회전축에서 상기 제1종동기어의 내측에 결합된 제2종동기어와; 상기 제1스크류의 회전축에 결합된 제3종동기어와; 상기 제2구동기어의 회전력을 상기 제3종동기어로 전달하기 위한 제2체인과; 일측 단부가 고추가루 경유통의 내부 하부면에서 일정 간격 떨어져서 상측으로 수직하게 위쪽으로 뻗어서 외측으로 노출되어 있으며 타측 단부가 외부에 설치된 저울에서 일정 거리 떨어진 부분까지 연장되어 있는 "∩"형상으로 되어 있는 배출관과; 상기 배출관에서 상기 고추가루 경유통에서 수직하게 위로 향하는 부분의 내측에 설치되어 있는 제2스크류와; 상기 고추가루 경유통의 하부 외측에 설치된 제2모터와; 상기 제2모터의 모 터 샤프트에 고정결합된 제2구동기어와; 상기 제2스크류의 회전축과 결합된 제4종동기어와; 상기 제2구동기어와 상기 제4종동기어사이에서 상기 제2구동기어의 회전력을 상기 제4종동기어로 전달하기 위한 제3체인과; 상기 제1모터와 제2모터의 동작을 제어하기 위한 컨트롤 박스를 구비하여 구성된 고추가루 적재 장치를 제공한다.
Patent KR-20110019820-A (KR)
Title: Plasma processing apparatus
Inventor: KIM NAM JIN
IPC: H01L21/02
Filed: 2009-08-21
Abstract: PURPOSE: A plasma processing apparatus is provided to simplify an assembly process of a substrate tray for inputting a plurality of substrates into the substrate tray, thereby shortening tact time of the entire processes. CONSTITUTION: A reaction chamber(110) provides a plasma generating space. A substrate tray(10) inputs a plurality of substrates(W). A chuck(120) can move vertically in the reaction chamber. A cover plate(140) fixes the substrates inputted to the substrate tray. An elevating unit(130) vertically moves the chuck between an upward location and a downward location of the substrate tray.