baber/WOPTO huggingface dataset:
Patent KR-20010108988-A (KR)
Inventor: LIM TAE JEONG
Filed: 2000-06-01
Abstract: 본 발명은 하드마스크막을 이용하여 컨트롤 게이트용 텅스텐 실리사이드의 손상을 방지하는 플래쉬 메모리 소자의 제조 방법을 개시한다. 개시된 본 발명은 셀 영역 및 주변 영역을 갖는 반도체 기판을 제공하는 단계; 상기 반도체 기판의 전면 상에 터널 산화막과 플로팅 게이트용 폴리실리콘막을 순차적으로 형성하는 단계; 셀 영역에만 잔류되도록, 상기 폴리실리콘막 및 터널 산화막을 패터닝하는 단계; 상기 결과물의 전면상에 게이트 절연막, 컨트롤 게이트용 텅스텐 실리사이드막, 및 하드 마스크막을 순차적으로 형성하는 단계; 상기 하드마스크막 상에 식각 장벽 패턴을 형성하는 단계; 상기 식각 장벽 패턴을 이용하여 상기 하드 마스크막을 식각하는 단계; 상기 식각 장벽 패턴을 제거하는 단계; 상기 식각된 하드 마스크막을 이용하여 상기 텅스텐 실리사이드막 및 게이트 절연막을 식각하여 컨트롤 게이트를 형성하는 단계; 상기 셀 영역의 폴리실리콘막 및 터널 산화막을 식각하여 플로팅 게이트를 형성하는 단계; 및 상기 하드 마스크막을 제거하는 단계를 포함하여 이루어지는 것을 특징으로 한다.
Patent KR-20010111135-A (KR)
Inventor: HWANG BYEONG U
Filed: 2000-06-08
Abstract: 하이브리드 전기 자동차에서 구동 배터리의 충전시 시스템을 보호하면서 타차량의 전원을 이용할 수 있게 한 하이브리드 전기 자동차에 있어서, 
     구동 배터리와, 
     구동 배터리의 전압을 구동 전압으로 변환하는 디씨-디씨 컨버터와, 
     상기 디씨-디씨 컨버터에 연결 설치되어 점프시 역전류를 차단하는 릴레이와, 
     상기 릴레이에 연결되어 엔진을 시동하게 하는 스타터 모터와, 
     상기 릴레이에 연결되는 제너레이터와 
     상기 릴레이로부터 제1,2라인으로 동시에 연결되는 점프 포트와, 
     상기 제1라인에 점프 포트를 개폐하는 플랩 도어의 열림시 온작동하게 설치한  플랩 도어 스위치를 포함하여 이루어지는 하이브리드 전기 자동차의 충전장치를 제공하는데 있다.
Patent KR-20010111694-A (KR)
Inventor: JEON TAE JOON
Filed: 2000-06-13
Abstract: 본 발명은 누계시스템(SNS)의 생산재고 관리에서 불량품 정보의 처리 방법에 관한 것이다. 누계 시스템의 생산/재고 관리 시스템에 있어서: 부품명, 불량 수량 등의 불량품 정보를 입력하고(S1), 해당 부품에 대한 불량 수량을 입력받은 후 불량 SN을 변경하고, 입고 SN＇= 입고 SN - 불량수량에 의해 입고 SN을 계산하는 단계(S2); 자재 명세서(BOM)의 DB에 부품 구성정보를 참조하여 해당 부품에 대한 하위부품 트리를 검색하고(S3) 하위 부품이 존재하는 지를 체크하는 단계(S4); 및 상기 하위 부품이 존재하는 경우, 부품 구성 정보로부터 해당 부품에 대한 자부품의 소요량을 반영하여 하위 부품의 불량수 및 불량 SN을 계산하고(S5), 하위 부품에 대한 출고 SN＇ 및 입고 SN＇을 계산하고(S6), 진도 및 재고를 계산하는 단계(S7)로 구성된다. 따라서, 제조업의 SNS 생산재고 관리 시스템에 있어 불량품 정보를 처리하는 알고리즘을 생산 및 재고 관리에 반영하여 재고와 진도를 파악할 수 있고, ERP 시스템의 일부 적용될 수 있고 소프트웨어 개발 노력, 시간, 비용을 줄일 수 있는 효과가 있다.
Patent KR-20010111892-A (KR)
Inventor: JUNG GWANG HOE
Filed: 2000-06-14
Abstract: 본 발명은 뱀의 독소로부터 분리된 신규한 피브린 용해효소(fibrinolytic enzyme) 및 그의 제조방법에 관한 것이다.  본 발명의 피브린 용해효소는 한국산 칠점사( Agkistrodon saxatilis emelianov )의 독소를 음이온 교환 크로마토그래피를 수행하고 겔 여과한 후, 음이온 교환 크로마토그래피를 재수행하는 단계를 포함하는 정제방법에 의하여 분리 정제되며, 다음과 같은 특성을 가지는 세린계 단백분해효소인 신규한 피브린 용해효소임이 밝혀졌다: (ⅰ) 한국산 칠점사의 독소로부터 유래되는 당단백질이며; (ⅱ) VIGGDEXNINEHRFLVALYT의 N-말단 아미노산 서열을 포함하고; (ⅲ) SDS-PAGE로 분석시, 분자량이 약 39kD의 당단백질이며; (ⅳ) 펩타이드-N-글리코시다제-F로 아스파라긴 잔기에 연결된 당이 제거된 후의 분자량은 약 28kD이고; (ⅴ) PMSF에 의하여 효소활성이 억제되며; (ⅵ) 트롬빈 특이성 기질인 D-Phe-Pip-Arg- p -nitroanilide 또는 칼리크레인 특이성 기질인 N-Pro-Phe-Arg- p- nitroanilide를 분해하고, 플라스미노겐 활성인자의 기질인 D-Val-Leu-Lys- p -nitroanilide를 급격히 분해하고, 이들에 대한 K m 값은 196 내지 324μM이고; (ⅶ) 효소 활성의 초기 단계에서 피브리노겐 B 사슬을 분해하고, 반응이 연장될 경우 피브리노겐 A 사슬을 분해하며; 및, (ⅷ) 트롬빈 또는 트롬빈 유사효소에 의하여 형성된 피브린 응괴를 용이하게 분해한다.
Patent KR-20010111908-A (KR)
Inventor: NA JONG GAP
Filed: 2000-06-14
Abstract: 본 발명은 스퍼터링 타겟의 제조방법에 관한 것으로서, 소모된 스퍼터링 타겟을 타겟 고정부로부터 분리하는 단계와; 타겟에서 심하게 소모된 부위 근방을 타겟으로부터 절단 분리하는 단계와; 타겟과 동일한 재질로 되어 있으며 상기 분리된 부분의 형상에 맞도록 형성된 조립부재를 끼워 조립하는 단계와; 조립된 타겟을 타겟 고정부에 부착하는 단계를 포함하여 구성되는 스퍼터링 타겟의 제조방법을 제공하여, 아이티오 타겟과 같은 화합물형 타겟 내지 산화물 타겟에 적용하여 불균일하게 마모된 타겟을 저비용으로 재생하여 다시 사용할 수 있도록 함으로써 타겟의 낭비를 방지할 수 있도록 한 것이다.
Patent KR-20010113173-A (KR)
Inventor: HWANG SEUNG JU
IPC: C09D11/50
Filed: 2000-06-16
Abstract: 본 발명은 루미나이트 안료를 주성분으로 하는 루미나이트 잉크 조성물 및 그의 제조 방법과, 상기 잉크를 사용하여 인쇄한 인쇄물 및 그 인쇄물을 디스플레이할 수 있는 장치를 제공하는 것을 그 목적으로 한다.  본 발명의 루미나이트 잉크 조성물은, 종래 수작업으로만 가능하였던 루미나이트 안료의 페인팅 및 실크스크린 인쇄 방법 등을, 기계 장치를 이용한 자동화된 인쇄 방법으로 전환할 수 있게 하며, 이에 따라 단시간에 대량으로 루미나이트 잉크로 인쇄된 인쇄물을 제공하는 것이 가능하다.  본 발명의 루미나이트 잉크 조성물로 인쇄한 인쇄물은, 그 위에 일반 잉크를 사용하여 중복 인쇄하므로써, 적용하는 빛의 종류 및 조광 구동에 따라 다양한 이미지를 연출할 수 있다.  본 발명은 그러한 인쇄물을 디스플레이하기 위한 디스플레이 장치도 제공한다.
Patent KR-20020005340-A (KR)
Title: Absorption Cooling Machine
Inventor: YOON SANG JIN
IPC: F25B15/00
Filed: 2000-07-07
Abstract: PURPOSE: An absorption refrigerating machine is provided to reduce the volume of a condenser and an absorber by condensing or absorbing steam through a steam path having a cap, and to generate steam by absorbing heat from hot or cold water with a solution or refrigerant in a pipe. CONSTITUTION: A condenser(2) has vertical double structure. A branch pipe of a steam distributor(34) is used with an outer pipe(39) having double pipe structure to flow steam between the outer pipe and an inner pipe(38). A cooling water distributor(36) is positioned in the steam distributor, and the branch pipe of the cooling water distributor is used with the inner pipe of the double pipe. An absorber(3) has vertical double pipe structure similar to the condenser. A cooling water collector(37) in a condensate collector(35) has the same shape as a cooling water distributor(36) in the steam distributor of the condenser. An outer pipe is formed slightly higher than the bottom of a steam distributor(44) to overflow a concentrated solution into the pipe. The volume of the condenser and the absorber is reduced to a half as the condenser and the absorber have vertical double pipe structure.
Patent KR-20020008265-A (KR)
Title: Construction method in pour edge and concrete pouring form thereof
Inventor: JUNG JAE GYEONG
IPC: E21D11/10
Filed: 2000-07-20
Abstract: PURPOSE: A concreting method for a tunnel end is provided to improve the strength of concrete toward a device for squaring wooden end pieces, to prevent concrete from coming off on a crack on an end of a concrete joint and to reduce construction costs by decreasing manpower or working hours. CONSTITUTION: The concreting method for a tunnel end comprises the steps of placing raw concrete in a concreting space(3) between a tunnel(1) and a concrete form(2) placed inward, putting a vibrator(6) horizontally from the outside of an installation entrance formed on a device for squaring wooden end plates(4) arranged to the end of the concreting space(3) to the concrete of the concreting space(3), and vibrating, tightening and hardening raw concrete by the vibrator(6).
Patent KR-20020009931-A (KR)
Title: Ventilating structure for ventilation hooded microwave oven
Inventor: KANG DAE YONG
IPC: F24C15/20
Filed: 2000-07-28
Abstract: PURPOSE: An exhausting structure of a hood as microwave oven is provided to exhaust cold air toward the front of the microwave oven by dispersing flowed air of an outlet and flowing air current through a rear outlet. CONSTITUTION: An exhausting structure contains an exhausting motor(44) to exhaust air outside the microwave oven; a housing(42) to exhaust sucked air through the exhausting motor outside the microwave oven by installing the exhausting motor; and an outlet(34) to exhaust cooled air to the front of the microwave oven and the exhausting motor and to be connected with a passage of air current. Thereby, cost is reduced.
Patent KR-20020010815-A (KR)
Title: Vacuum raising apparatus for treatment having function of vacuum selection
Inventor: KIM HYUNG WAN
IPC: A61M1/08
Filed: 2000-07-31
Abstract: PURPOSE: A medical apparatus with a negative pressure selection function is provided to improve the convenience of use by producing a negative pressure on the basis of a specific mode selected by a user among a strong mode, a weak mode, and a middle mode. CONSTITUTION: In the medical apparatus for producing a negative pressure comprised of a cupping set(70) directly contacting with the skin of a user, and a negative pressure producer(80) for making the interior space of the cupping set into a vacuum condition, the medical apparatus comprises a negative pressure selection part(100) for selecting a desired negative pressure producing mode among a strong mode, a weak mode, and a middle mode; a solenoid valve(130) for connecting or intercepting an exhaust tube(A,B) connected between the cupping set and the negative pressure producer by using an input action control signal; a negative pressure detection part(110) for determining whether a constant negative pressure is produced within the cupping set or not; and a negative pressure holding part(120).
Patent KR-20000063877-A (KR)
Inventor: PARK JUNG SOO
Filed: 2000-08-08
Abstract: PURPOSE: A method for implementing an internet advertisement in a web browser client of an independent execution type web browsing software is provided to improve the effect of the internet advertisement without causing inconvenience to a user, by inserting the advertisement in the client region. CONSTITUTION: The internet searching software such as an Internet Search 3.0 is developed. The customizing tool like an Internet Search Administration Kit 3.0 is developed and distributed. It is determined if the internet advertisement can be illustrated in the client region of the web browser. The data of the illustrated internet advertisement is collected, and the statistic thereof is calculated. In order to display the internet advertisement, it is further determined whether the web browser currently displays a web site and an explore folder, or the internet advertisement is already displayed.
Patent KR-20020012942-A (KR)
Title: Method for fabricating a high voltage Schottky diode by using ion implantation
Inventor: CHOI WON GUK
IPC: H01L29/872
Filed: 2000-08-09
Abstract: PURPOSE: A method for forming a high voltage Schottky diode is provided to increase a breakdown voltage, by performing an ion implantation process in a self-aligned method to carry out an edge termination. CONSTITUTION: A metal layer pattern is formed on a silicon substrate(110). Ions are implanted into the silicon substrate by using the meal layer pattern as an ion implantation mask. Boron ions are used in the ion implantation process. The silicon substrate has an N-type conductivity. The metal layer pattern is composed of gold.
Patent KR-20010050036-A (KR)
Inventor: HAMADA MASAHITO
IPC: G03F7/30
Filed: 2000-08-10
Abstract: PURPOSE: A development device is provided to prevent strain caused by temperature difference and improve the uniformity of the process. CONSTITUTION: A current plate(6) is arranged above a wafer holder(2) to hold a wafer W, and the roof(62) and the bottom plate(63) of this plate(6) are set so that each circulation port(62a,63a) may lie over the other in vertical direction, and a developer(D) is heaped upon the surface of the wafer. Then, the bottom plate(63) of the plate(6) is slid laterally so that the the circulation ports(62a,63a) may not lie upon the other in vertical direction, prior to development. By doing it this way, at development, the circulation ports(62a,63a) of the plate(6) are blocked in vertical direction, which intercept the air current to the wafer(W), so the occurrence of the temperature distribution of the developer(D) within the surface of the wafer, which is caused by the flow of the air to the wafer, is suppressed, and the occurrence of the unevenness in development caused by temperature difference is suppressed, and equal development treatment can be performed.
Patent KR-20010021321-A (KR)
Title: A sanitary napkin with improved liquid retention capability
Inventor: LARIVIERE CHRISTIANE
IPC: A61F13/15
Filed: 2000-08-16
Abstract: PURPOSE: A sanitary napkin is provided to exhibit particular rewet characteristics and an excellent flexibility with improved liquid retention capability. CONSTITUTION: A sanitary absorbent article, suck as a feminine protection device, includes a firous, liquid permeable body-facing cover layer, and an absorbent system, which exhibits particular rewet characteristics when subjected to mechanical stress. The sanitary absorbent article has a thickness of less than or equal to 5mm, a capacity of at least 18grams, a rewet potential of less than or equal to 0.8 grams, and a flexural resistance of less than 500g.
Patent KR-20000064194-A (KR)
Inventor: LEE JEONG HUI
IPC: H01L21/56
Filed: 2000-08-29
Abstract: PURPOSE: A cavity bar structure for molding a semiconductor is provided to prevent the damage of a lead frame by automatically aligning the position of a lead frame by a guide pin. CONSTITUTION: A cavity bar structure for molding a semiconductor is fixed to chases(3,4) of the molding parts(1,2) of upper and lower parts. A lead frame(7) is positioned on a lower cavity bar main body(6), and the hole of a lead frame(7) is inserted into a position determining pin(8). A guide pin(10) horizontally pushes the lead frame(7). By supporting the lead frame(7) of the guide pin(10), the lead frame(7) is automatically aligned. After the lead frame(7) is seated on a lower cavity bar main body(6), upper and lower part molding parts(1,2) are driven by a driving part manipulation. After coupling the cavity bar main bodies(5,6), a transfer is operated thereby injecting a molding resin into the cavity bar main bodies(5,6). After elapsing a predetermined time, a resin has the same shape as a cavity shape, and thus a molding operation is completed. After completing the molding operation, the upper and lower part molding parts(1,2) are reproduced as an original state, simultaneously with fixing the lead frame(7). Thereby, the damage of a lead frame can be prevented.
Patent KR-20010030153-A (KR)
Title: Cvd apparatus, purging method thereof, method for determining maintenance time for semiconductor manufacturing apparatus, moisture monitoring apparatus and semiconductor manufacturing apparatus having same
Inventor: HASEGAWA HIROYUKI
IPC: C23C16/44
Filed: 2000-08-30
Abstract: PURPOSE: A moisture sampling device and a semiconductor manufacturing device equipped with a device are provided to measure the moisture content in a corrosive gas even in processing which preventing blocking in a pipe. CONSTITUTION: A moisture monitoring device is provided with the pipe(9) one end of which is connected to a reaction chamber(1) to which the corrosive gas is made to flow, and a moisture meter which is connected to the other end of the pipe(9), and measures the moisture content in the corrosive gas introduced from the reaction chamber(1). This device is also provided with at least a pipe heating mechanism(20) which heats the pipeline(9).
Patent KR-20020017850-A (KR)
Title: Device for controlling of a I2C bus protocol
Inventor: CHOI JAE UK
IPC: G06F13/00
Filed: 2000-08-31
Abstract: PURPOSE: A device for controlling I2C(Inter-Integrated Circuit) bus protocol is provided to make a data receiving terminal discriminate the error occurrence of received data by adding a parity check bit to a data transmission frame format and to inform the transmitting terminal of the error occurrence. CONSTITUTION: In a data transmission frame format, a parity bit is added to the last of the data bits outputted from a transmitting terminal and a parity error bit(PE) capable of informing the transmitting terminal of the error occurrence is added before an operation signal in a receiving terminal. The receiving terminal checks by using the received data bits(d6,d7..d0) and the parity bit(P), and in case of occurring an error is able to inform the transmitting terminal of the error occurrence in a similar way as the operation signal. After receiving the data bits and parity bit, the transmitting terminal confirms the reception of the receiving terminal without an error by confirming the transferred parity signal from the receiving terminal. If the master device is the transmitting terminal, the present transmission is finished by giving a stop signal(P) after the operation signal(Ack) and the data being occurred a parity error is transmitted by transmitting again a new transmission through a restart signal(Sr).
Patent KR-20020019641-A (KR)
Title: An apparatus for remote security and management in base station
Inventor: PARK HEE WON
IPC: H04M11/00
Filed: 2000-09-06
Abstract: PURPOSE: An apparatus for securing and managing radio base stations remotely is provided to promptly restore emergent troubles of the remote radio base stations and easily control entrance and exit of the remote radio base stations by automatically controlling a locking device of the remote radio base station recognizing a password transmitted by a manage of a central host station. CONSTITUTION: A telephone sending/receiving part(20) is connected with a host station telephone(10) to communicate with a manager of a central host station managing a password of each remote base station. A control signal detecting part(30) detects control signals received from the central host station. A key input part(100) calls the manager of the central host station. A call processing part(40) discriminates the call outputted through the key input part(100) for re-sending. A memory managing part(60) manages memory information recording a telephone number of the central host station, the password of each remote base station, voice information corresponding to sensor input signals. A signal processing part(50) classified the control signals into the signals for managing facilities and the signals for memory information, and the control signals according to the sensor input signals. A password reading part(70) determines whether the password is identical. A control part(80) controls gate management of facilities according to a signal of the password reading part(70). A control signal outputting part(90) outputs gate control signals. A sensor input part(110) controls gates according to the control signals and inputs control signals sensing the state of the gates and remote facilities to the signal processing part(50).
Patent KR-20020020056-A (KR)
Inventor: KANG HUI CHUN
IPC: G02B6/125
Filed: 2000-09-07
Abstract: PURPOSE: A reflective optical wavelength multiplexer is provided to improve a loss feature and a cross talk feature in a wavelength division multiplexing system. CONSTITUTION: A waveguide(W) receives or outputs optical signals having different wavelengths. A star coupler(S) separates the optical powers from the waveguide(W). An optical waveguide thermal lattice(AWG) is connected to an output terminal of the star coupler(S). The optical waveguide thermal lattice(AWG) performs a waveguide operation so that input optical signals have different phase differences. A reflective element is connected to an output terminal of the optical waveguide thermal lattice(AWG) and reflects an optical signal. The reflective element includes a mirror(M). A taper waveguide(T) is installed between an output terminal of the star coupler(S) and an input terminal of the optical waveguide thermal lattice(AWG).
Patent KR-20020020369-A (KR)
Title: Apparatus for producing drains with double walls
Inventor: YOO YEONG SIK
IPC: B29C70/00
Filed: 2000-09-08
Abstract: PURPOSE: A device for manufacturing a double wall sewage pipe is provided to reduce an occupation area by making piling possible to a predetermined height and to easily convey. CONSTITUTION: A device for manufacturing a double wall sewage pipe includes an extrusion part(2) having a first extruder(20) and a second extruder(21), a mixing part(3), a cooling part(4), a molding part(5), a coating molding part(6) and a cutting part(7). The mixing part extrudes materials supplied from the first and second extruders in a predetermined shape. The cooling part has a space, a spray device for spraying cooling water, a guide rod for preventing deviation, a vacuum device for making the space into a vacuum condition, and a door. The molding part has a multi-joint links connected with a shaft core on each gear of a gear box, a press roller and a shape maintaining plate mounted on a front end of the shaft core, and a cooling device for jetting cooling water. The coating molding part has a tank for supplying coating material for forming coating layer for adhering wadding threads and a supply pipe for coating the coating material stored in the tank. The cutting part cuts a finished product in a predetermined length.
Patent KR-20020023529-A (KR)
Title: A multi-division indoor unit of air-conditioner
Inventor: SON YANG MO
IPC: F24F1/00
Filed: 2000-09-22
Abstract: PURPOSE: An indoor unit of multi-split air conditioner is provided to increase an intake air volume by arranging a plurality of blower fans, while preventing blower fans from being drooped. CONSTITUTION: An indoor unit comprises a chassis(70) fixed to a wall, and which has a heat exchanger(100) disposed in front of the chassis, and a rotating shaft support portion(120) for supporting a rotating shaft(94) in a rotatable manner, wherein the rotating shaft support portion is formed integrally with the chassis; a plurality of support members(128,130,140) fixed to the front surface of the chassis so as to support the heat exchanger; blower fans(91,92) interposed between the chassis and heat exchanger, and which are connected through the rotating shaft such that blower fans rotate in an integrated manner; a front frame coupled to the front of the chassis so as to cooperate with the chassis to form a space for accommodating the heat exchanger and blower fans; and a suction grill(60) coupled to the front surface of the front frame, and which has an inlet port(62).
Patent KR-20020024832-A (KR)
Title: Circuit for reducing stand-by power in switching power supply
Inventor: PARK YU YEOL
IPC: H02M3/335
Filed: 2000-09-27
Abstract: PURPOSE: A waiting power saving circuit of an SMPS(switching mode power supply) is provided to save the waiting power due to the switching loss proportional to the switching frequency by possibly lowering the switching frequency under waiting status. CONSTITUTION: A transformer(TRANS1) consists of a primary winding(T1), a secondary winding(T2) and an auxiliary winding(T3). A first controller(10) varies the operational frequency of a PWM IC in accordance with the voltage regulation of the auxiliary winding(T3) due to the variance of load current flowing in the secondary winding(T2). A second controller(20) varies the operational frequency of the PWM IC in accordance with the variance of switching current due to the variance of load current flowing in the secondary winding(T2).
Patent KR-20020026073-A (KR)
Title: Apparatus and method for providing medical service using mobile communication system
Inventor: SEEN DONG JUNE
IPC: H04W4/00
Filed: 2000-09-30
Abstract: PURPOSE: A device for supplying a medical service using a mobile communication system is provided to receive patient information and a patient state from a mobile communication terminal, to transmit the information to a medical server, and to transmit a result of the medical server to the mobile communication terminal, so as to supply the medical service in real time at any places. CONSTITUTION: A patient information DB(113) stores patient information, a requested medical service, and information on a physician in charge, and accumulates patient state information to store the accumulated information. A general medical information DB(114) is distinguished by medical service kinds, and stores state information values of each medical service as well as measure data for patient corresponding to the values. An Internet connector(118) supplies an interface for transceiving data by connecting to a predetermined communication network. If the patient information and the patient state information are received, a controller(111) detects the measure data for patient based on the general medical information DB(114), and transmits the detected data through the Internet connector(118).
Patent KR-20020026671-A (KR)
Title: Process apparatus for a semiconductor wafer with a signal cable within a flexible tube
Inventor: LEE YONG SEOK
IPC: H01L21/68
Filed: 2000-10-02
Abstract: PURPOSE: Equipment for fabricating a semiconductor wafer is provided to prevent the signal line from being aged even if a switch vertically transfers by making a signal line built in a flexible tube, and to prevent damage to the semiconductor wafer by smoothly transmitting a signal through the signal line. CONSTITUTION: A loadlock chamber body(12) has a loadlock chamber(13) which temporarily stores the semiconductor wafer. The switch(14) switches the loadlock chamber, positioned on one surface of the loadlock chamber body. A control unit(16) controls the operation of the loadlock chamber body and the switch, positioned on the other surface of the loadlock chamber body. The signal line(18) is connected between the switch and the control unit. The signal line is built in the flexible tube(19).