Patent DE-102011005714-A1 (DE)
Title: Coating substrates in coating unit, comprises subjecting material to be vaporized to evaporation device, exposing material to second evaporation by radiation energy input, applying evaporation to first and second material, and depositing
Inventor: GROSS HARALD
IPC: C23C14/24
Filed: 2011-03-17
Abstract: Coating the substrates in a coating unit, comprises: subjecting a material to be vaporized to an evaporation device (8), in a first position (9) of a first evaporation and depositing on a moving intermediate carrier (3), where the intermediate carrier is brought in proximity to a substrate (1) to be coated in a second position (14); exposing material to a second evaporation by a radiation energy input; applying an evaporation at first position to a first material on the intermediate carrier, and subsequently applying an evaporation to at least one second material; and depositing the material. Coating the substrates in a coating unit, comprises: subjecting a material to be vaporized to an evaporation device (8), in a first position (9) of a first evaporation and depositing on a moving intermediate carrier (3), where the intermediate carrier is brought in proximity to a substrate (1) to be coated in a second position (14); exposing the material deposited on the intermediate carrier to a second evaporation by a radiation energy input and depositing the evaporated material on a third position on the substrate; applying an evaporation in the manner of the first evaporation at the first position to a first material on the intermediate carrier, and subsequently applying an evaporation in the manner of the first evaporation to at least one second material, which is on the first material present on the intermediate carrier; and depositing the material with higher evaporation temperature in comparison to the second material as the first material such that the two materials are mixed at the second position of the second evaporation between the second and the third position in the vapor phase, and mixed in the third position, and are homogeneously deposited on the substrate. The layer of first material is evaporated and the second material is evaporated by a radiation such that a vapor portion of the first material and a vapor portion of the second material are present in the region of the deposition at the third position. An independent claim is also included for a device for coating substrates, comprising the moving intermediate carrier, evaporation device at a first position with a first evaporation for vapor deposition of the intermediate carrier with the evaporation material and the evaporation device at the second position with a second evaporation for the deposition of the evaporation material on the substrate. An additional evaporation apparatus is arranged between the evaporation device in the first position and the substrate in the second position for evaporation and deposition of a second evaporation material and a continuous light source is provided at the second position with an output, which is arranged at the third position and realizes a vapor portion of the first material and a vapor portion of the second material.