Patent SG-11201900762Q-A (SG)
Title: Use of an electric field for detaching a piezoelectric layer from a donor substrate
Inventor: CHARLES-ALFRED CÉDRIC
IPC: H01L41/312
Filed: 2017-08-01
Abstract: ornma'AteVAV:ri 1 .1EMEIM + -+-+-+-+-+- 31 11 FIG. 2 33 it (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 08 February 2018 (08.02.2018) W I PO I PCT ~~ll~~~~~~~~ 011101010VIIIOH olo olio! olo Ho mo mil °nom ow (10) International Publication Number WO 2018/024743 Al (51) International Patent Classification: HO1L 41/312 (2013.01) (21) International Application Number: PCT/EP2017/069470 (22) International Filing Date: 01 August 2017 (01.08.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 1657494 02 August 2016 (02.08.2016) FR (71) Applicant: SOITEC [FR/FR]; Parc Technologique des Fontaines, Chemin Des Franques, 38190 Bernin (FR). (72) Inventor: CHARLES-ALFRED, Cedric; 1 Place Notre- Dame, 38000 Grenoble (FR). (74) Agent: GRUNECKER PATENT- UND RECHTSAN- WALTE PARTG MBB; Leopoldstrasse 4, 80802 Miinchen (DE). = (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h)) (54) Title: USE OF AN ELECTRIC FIELD FOR DETACHING A PIEZOELECTRIC LAYER FROM A DONOR SUBSTRATE N O cc O O 37 37 37 37 37 37 35 35 35 (57) : The invention relates to a method for transferring a piezoelectric layer onto a support substrate. It also relates to a detaching chamber for carrying out at least a part of the method. The inventive method to detach the piezoelectric layer from a donor substrate onto the support substrate comprises the steps of: a) providing a predetermined splitting area in a piezoelectric donor substrate, b) attaching the piezoelectric donor substrate to a support substrate to form a compound, and c) detaching the piezoelectric layer from the piezoelectric donor substrate comprising applying an electric field. By using the electric field, the detachment step can be carried out at lower temperature compared to the prior art.