baber/WOPTO huggingface dataset:
Patent KR-20010048436-A (KR)
Inventor: LEE MYEONG GU
IPC: H01L27/04
Filed: 1999-11-26
Abstract: PURPOSE: An electrostatic discharge(ESD) protection circuit and a fabrication method thereof are provided to suppress degradation of ESD characteristics and to prevent erroneous operation of a device. CONSTITUTION: A second conductivity type well(24) is formed in a portion of a first conductivity type semiconductor substrate(21). A first gate electrode(26) is formed on the well(24), a second gate electrode(27) is formed on the substrate(21) and spaced apart from the first gate electrode(26). A sidewall spacer(29) is formed on sides of the first and second gate electrodes(26,27). A source/drain impurity region(30) is formed inside the substrate(21) at edges of the first and second gate electrodes(26,27). A metal silicide layer(31) is formed on the first and second gate electrode(26,27) and on the source/drain impurity region(30), and a ground line(32) is connected to the first gate electrode(26).
Patent KR-20010048627-A (KR)
Title: Apparatus for cooling of refrigerator
Inventor: YOON HUI JONG
IPC: F25B39/00
Filed: 1999-11-29
Abstract: PURPOSE: A cooling device of a refrigerator is provided to reduce manufacturing costs by adopting a cheap heat exchanger having excellent thermal conductivity. CONSTITUTION: A compressor(10) is mounted in a machine room of a kimchi refrigerator cabinet, and an evaporator pipe(5) is coiled around outside of a kimchi storage case(2). The evaporator pipe has a side connected to a connecting pipe(11) of the compressor and the other side coupled with a capillary tube(20) and a condenser pipe(30). The condenser pipe is connected with the compressor to form a refrigerating cycle. The connecting pipe of the compressor, the capillary tube and the condenser pipe are made by copper while the evaporator pipe is made by aluminium. To connect the evaporator pipe with the connecting pipe of the compressor as well as with the capillary tube, flash butt welding is used. Therefore, manufacturing costs are reduced as the evaporator pipe is made by cheap aluminium having excellent thermal conductivity.
Patent KR-20010053807-A (KR)
Inventor: CHOI BYEONG GIL
IPC: C04B18/14
Filed: 1999-12-01
Abstract: PURPOSE: A cement concrete composition of high strength, high fluid and low heat is provided, which improves durability and reduces heat of hydration. And a method for preparing the same is also provided. CONSTITUTION: The cement composition of high strength, high fluid and low heat contains 10-40 wt.% of a high strength mixed material based on 100 wt.% of cement, where the high strength mixed material consists of 40-80% of blast furnace water granulation slag, 30-60% of anhydrite and 0-20% of limestone. The method comprises steps of: (i) mixing 40-80% of blast furnace water granulating slag, 30-60% of anhydrite and 0-20% of limestone and pulverizing the mixture to prepare a high strength mixed material; (ii) preparing a high strength, high fluid and low heat cement by substitution mixing 10-40 wt.% of the high strength mixed material based on 100 wt.% of cement; (iii) adding 50-70% of kneading water and 50% of super air entrance plasticizer to the cement of high strength, high fluid and low heat and fine aggregates and stirring them for 30-90 seconds; (iv) adding the remaining kneading water and super air entrance plasticizer to the mixture of the step (iii) and stirring them for 30-90 seconds; and (v) putting thick aggregate in the mixture of the step (iv) and stirring them.
Patent KR-20010054159-A (KR)
Inventor: PARK EUN JEONG
IPC: H01L27/115
Filed: 1999-12-03
Abstract: PURPOSE: A flash memory and its manufacturing method are provided to increase coupling ratio and to improve step coverage by making a floating gate with using a cell isolation layer. CONSTITUTION: An oxide layer and an isolation layer are built by forming an HLP(High temperature Low-Pressure Dielectric) layer thickly on a semiconductor substrate(41). A thin tunneling oxide layer(43a) and the first patterned floating gate are made. After doping an inter-poly oxide layer(45) and a control gate material layer, a control gate(46a) is produced by etching the control gate material layer, and the inter-poly layer, the first patterned floating gate, and the tunneling oxide layer(43a) are patterned. Through the patterning step, a floating gate(44b), a dielectric layer(45a), and the control gate(46) are piled up on the tunneling oxide layer(43a). After forming a photoresist pattern, a low density of ion injection step is executed, and the photoresist pattern is removed. The injected impurities are diffused and low-density impurity regions(48a,48b) are formed. A side wall(50) is constructed, and high-density impurity regions(49a,49b,49c) are made by inserting high-density impurities. By etching selectively an inter-level isolation layer, a source/drain contact hole and a source/drain contact hole(51) are made.
Patent KR-20010054757-A (KR)
Inventor: KIM SI EUN
IPC: D01F6/62
Filed: 1999-12-08
Abstract: PURPOSE: A process for producing polyester fiber for reinforcing rubber products by controlling the amount of epoxy compounds and basic salts of fibers to a specified level is provided. Whereby, the polyester fiber can maintain excellent adhesion even in high temperature for a long period of time in a state where it is used as a reinforcing agent. CONSTITUTION: In polyester fiber for reinforcing rubber products comprising ethylene terephthalate of 95% or more of a repeating unit, the polyester fiber is characterized in that 0.1 to 2.0% by weight of an epoxy compound having two or more epoxy groups of fibers, a molecular weight of 100 or more and an epoxy equivalent of 100 or more exists based on the weight of fibers and 0.01 to 5.0% by weight of basic salts exist based on the epoxy compound.
Patent KR-20010055595-A (KR)
Inventor: KIM JAE HAK
IPC: F28F9/00
Filed: 1999-12-11
Abstract: PURPOSE: A heater pipe fixing device of a vehicle heat exchanger is provided to assemble various type heater pipes with a heat exchanger conveniently and simply without fixing process as welding. CONSTITUTION: Two heater pipes(2) are mounted in a heat exchanger(1) to flow coolant of an engine. A fitting protrusion(21) is integrally formed in the lower part of the heater pipe, and a coupler(3) having an open part(31) inserting the lower part of the heater pipe and the fitting protrusion is installed in the upper part of the heat exchanger to combine the heater pipe. Sills(32,33) of the fitting protrusion and a closed O-ring(4) are formed in the lower part of the open part, and a rectangular through-hole(34) is formed around the open part. The lower end of the heater pipe is inserted to the open part of the coupler, and the upper part of the through-hole is bent for the heater pipe to fit a hook(35) in the upper part of the fitting protrusion. Various heater pipes are assembled with the heat exchanger conveniently and simply without additional fixing process.
Patent KR-20010055617-A (KR)
Inventor: PARK YONG NAM
IPC: B62D25/08
Filed: 1999-12-11
Abstract: PURPOSE: A wheel house removes folds on a border occurring on the press process to improve appearance thereof and prevents cracks from occurring. CONSTITUTION: A wheel house(100) comprises a curved wheel house main body(110). A caving part(120) is formed on the middle of the wheel house main body(110) for a shock absorber, a suspension spring and so on to be installed. Beads(131) are inserted on borders(130) between the caving part(120) and the wheel house main body(110). The beads(131) are inserted during a press process of a panel of which the wheel house(100) is made to absorb folds on the border(130) inevitably generated by the difference of shapes.
Patent KR-20000017802-A (KR)
Inventor: KIM BONG YEON
IPC: F02B75/16
Filed: 1999-12-14
Abstract: PURPOSE: An engine is provided to minimize the amount of energy lost in a combustion chamber by installing two pistons in a cylinder and to simultaneously perform two different works. CONSTITUTION: An engine(10) is installed with the steps of forming a combustion chamber installed with an ignition plug in the center and a cylinder(11) of which both sides are opened and inserting a first and a second pistons(14,17) in the opened part of the cylinder. Herein, the first and second pistons are connected on a first and second crank shafts(16,19) by a first and a second connecting rods(15,18). And a first and a second crank gears(20,21) are formed on the front end on a ring side of the first and second crank shafts for forming the first and second crank gears as to combine with the gear from on the outer circumference of a fly wheel(22).
Patent KR-20000012721-A (KR)
Inventor: KIM GYEONG SU
IPC: G06Q30/06
Filed: 1999-12-21
Abstract: PURPOSE: A client product evaluation system and evaluation method on network is provided to promote a motive of purchasing and increase reliability of evaluation and increase purchasing of product. CONSTITUTION: The client product evaluation system and evaluation method on network comprises an evaluator, and a storing device. In the client product evaluation system and evaluation method, the evaluator evaluates information of product for usage or purchasing through a client computer. The storing device accumulatively stores result of evaluation for product information by the evaluator. If the client computer generates a request signal, information of product and the evaluator and the result of evaluation for product are displayed on screen of client computer.
Patent KR-20010064477-A (KR)
Inventor: CHO GYEONG HO
IPC: E05D5/06
Filed: 1999-12-29
Abstract: PURPOSE: A door hinge reinforce maximizes rigidity to the direction of the gravity. CONSTITUTION: A door hinge reinforce comprises a base board portion(3), the two first wing portions(5) and the second wing portion(6). The base board portion(3) has multiple bolt holes(1) for bolts to penetrate and is stuck on the inner surface of an inner panel of a door. The two first wing portions(5) faces with each other and are extended from a part of the base board portion(3), separated at a bending portion(2) by a cutting portion(4) and vertically folded. The second wing portion(6) extended from the base board portion(3) is perpendicular with the first wing portions(5), extended from the base board portion(3) to be vertically folded and is welded to the first wing portions(5).
Patent KR-20010065161-A (KR)
Inventor: JANG SE EOK
IPC: H01L21/28
Filed: 1999-12-29
Abstract: PURPOSE: A method for manufacturing a semiconductor device having a gate dielectric layer is to provide a high-speed high-density device having an excellent leakage current characteristic in making a next-generation gate, by using an Al2O3 gate dielectric layer of high permittivity in the device. CONSTITUTION: An Al2O3 thin film(13) is deposited on a semiconductor substrate(11). A Si plasma doping process is performed regarding the Al2O2 thin film. An annealing process is performed regarding the doped Al2O3 thin film to form an Al2O3 gate dielectric layer(130). A gate electrode(14) is formed on the Al2O3 gate dielectric layer.
Patent KR-20010066552-A (KR)
Inventor: SEO EUN SEOK
IPC: B62D17/00
Filed: 1999-12-31
Abstract: PURPOSE: A tow-in control device is provided to prevent tow-out occurring on sudden acceleration or brake to improve driving stability and to prevent abnormal abrasion of a tire. CONSTITUTION: A tow-in control device comprises a pair of tow adjusting axes(21, 25), electromagnets(23, 27), a connecting rod(30), a strain gauge(35) and a controller(40). The tow adjusting axes are installed parallel to a driving shaft connecting wheels and fixed to each of the wheels and have protrusive parts(22, 26) on the front ends thereof. The electromagnets are installed on the front ends of the tow adjusting axes facing each other. The connecting rod has expanded parts(31, 32) inserted into the protrusive parts of the tow adjusting axes and supported on both ends thereof. The strain gauge is installed on the connecting rod to measure strain acting on the connecting rod. The controller controls current applied to the electromagnets installed on the tow adjusting axes by the signal of the strain gauge to pull the tow adjusting axes inward.
Patent KR-20000029686-A (KR)
Inventor: PLEVA RAYMOND M
IPC: A23L13/40
Filed: 1997-06-11
Abstract: PURPOSE: A cherry containing meat product is provided for enhanced lipid oxidation resistance, enhanced flavor, better natural color retention, and a reduction of undesirable elements such as fats or sodium. CONSTITUTION: A meat product can be a comminuted meat mixture in which ground or chopped cherries are included in the mixture. Alternatively, cherry juice, or a slurry of cherry juice and cherry tissue, could be mixed with the meat to create a comminuted meat mixture. Cherry products could be used in preparing a meat product for curing. All of the meat products include a small but effective amount of konjac flour.
Patent KR-20000068421-A (KR)
IPC: A61K31/00
Filed: 1997-08-25
Abstract: (여기서, R, R 1 및 R 2 는 상기 정의된 바와 같음) 
     본 발명은 화학식 I의 화합물 및 제약학적으로 허용 가능한 그의 염이다.  또한, 본 발명은 포유동물에서 포스포디에스터라제 (PDE) 유형 IV 또는 종양 괴사 인자 (TNF) 생산의 억제를 위한, 화학식 I의 화합물 또는 제약학적으로 허용 가능한 그의 염을 포함하는 조성물, 및 그의 사용 방법에 관한 것이다.  또한, 본 발명은 화학식 I의 화합물의 제조에 유용한 중간체에 관한 것이다.
Patent KR-20000068540-A (KR)
Title: 화상 압축·신장 방법 및 화상 압축·신장 장치
Filed: 1997-07-30
Abstract: 화상 압축 측에서는 화상에 손실 없는 웨이브레트 변환를 실시한 손실 없는 웨이브레트 변환 계수를, 먼저, 거친 스텝 사이즈로 양자화, 엔트로피 부호화하고, 그 후 순차, 양자화 오차 신호에 대하여, 세밀한 스텝 사이즈로 양자화, 엔트로피 복호화하여, 프로그레시브 부호화 비트 스트림을 생성하며, 화상 신장 측에서는 화상의 프로그레시브 재생·표시의 각 스테이지를 담당하는 각 부호화 비트 스트림마다 엔트로피 복합화, 역양자화하여 얻어진 손실 없는 웨이브레트 변환 계수에 대하여, 손실 없는 웨이브레트 역변환을 실시하고, 역변환하여 얻어진 데이터를 이미 재생되어 있는 화상  데이터에 화상의 갱신 보조 정보와 함께 가산함으로써 화상을 프로그레시브에 재생·표시한다.  여기서, 화상을 갱신하는 데 필요하게 되는 갱신 보조 정보를, 화질을 한단계 갱신할 때 필요하게 되는 손실 없는 웨이브레트 변환 계수의 정보의 일부와, 이미 표시되어 있는 화상을 생성하는 데 필요한 손실 없는 웨이브레트 변환 계수의 일부로부터 생성함으로써, 갱신전 화상을 생성하는 데 필요한 손실 없는 웨이브레트 변환 계수의 정보를 모두 유지해 둘 필요가 없어, 메모리 용량을 저감할 수 있다.
Patent KR-20000068772-A (KR)
Title: Bi-aromatic compounds linked via a heteroethynylene radical, and pharmaceutical and cosmetic compositions containing them
IPC: A61P17/06
Filed: 1998-08-21
Abstract: Bi-aromatic compounds linked via a heteroethynylene radical are provided along with pharmaceutical and cosmetic compositions containing these compounds and methods for their use.
Patent KR-20000052913-A (KR)
Title: Gas panel
Inventor: REDEMANN ERIC J
IPC: H01L21/00
Filed: 1997-10-29
Abstract: PURPOSE: A gas panel is provided for use with a tool for manufacturing a semiconductor including one-piece manifold body having an inlet for receiving a process gas. CONSTITUTION: A manifold body has at least one lateral wall extending in the general direction of gas flow. The lateral wall includes at least one active device site having an active device thereon. The active device is in gas communication with a gas carrying path formed within the one-piece manifold. The active device may be a manual valve, a pneumatic valve, a pressure regulator, a pressure transducer, a purifier, a filter or a flow controller. The gas is received from the active device at a continuation of the gas flow path in the manifold body and is conveyed to a manifold outlet for ultimate to the tool.
Patent KR-20000070384-A (KR)
Title: 비동기 전송 방식에 따라 설계된 통신망에 에뮬레이트된 링 네트워크 구조를 구현하기 위한 방법
IPC: H04L12/46
Filed: 1998-01-09
Abstract: 본 발명의 방법에 따라 ATM에 따라 설계된 통신망의 ATM 통신 단말 장치(KE1...4)가 링 네트워크 구조에 할당되고, 상기 ATM 통신 단말 장치(KE1...4)에는 각각 하나의 링 네트워크 어드레스(EA, GA)가 할당되며, 링 네트워크 액세스 및 링 네트워크 통신이 링 네트워크에 따라 특수하게 제어된다.  하나 또는 다수의 ATM 통신 단말 장치(KE1...4)를 식별하는 링 네트워크 어드레스(EA, GA)를 ATM 셀의 가상 채널 식별자(VCI)내로 매핑함으로써, 에뮬레이트된 링 네트워크 구조(랜 에뮬레이션)가 간단히 구현된다.
Patent KR-20000075481-A (KR)
IPC: C09J151/00
Filed: 1998-11-25
Abstract: 점착부여제 함량이 상이한 둘 이상의 아크릴 단량체 분산액을 제조한다. 아크릴 단량체 분산액 가운데 하나를 중합한 후, 다른 쪽을 여기에 첨가하여 중합시켜 아크릴계 에멀션을 수득한다. 점착부여제 함량이 낮은 아크릴 단량체 분산액을 중합할 때, 고분자량 아크릴 중합체가 수득된다. 점착부여제 함량이 높은 아크릴 단량체 분산액을 중합할 때, 점착부여제가 아크릴 중합체에 부여된다. 따라서, 아크릴계 에멀션의 유지력과 접착성이 향상된다.
Patent KR-20010005572-A (KR)
IPC: G02F1/1335
Filed: 1999-02-01
Abstract: 자외선 경화형의 밀봉재를 사용하는 액정장치등의 전기 광학 장치에 있어서, 밀봉재에 미경화 부분이 남는 것을 방지한다. 
     대향측 기판(3b) 상의 오버코트(14), 소자측 기판(3a) 상의 틀형상 차광부재(8) 등의 자외선 차폐부재 또는 막부재가 밀봉재(2)에 근접한 상태로 액정장치의 외측 틀부분내에 배치되는 구조의 액정장치이다.  오버코트(14) 및 틀형상 차광부재(8)의 외측 둘레 테두리중 밀봉재(2)의 코너부(2a)에 대응하는 부분을 만곡형상이나 둔각을 갖는 형상, 예를 들면 원호형상으로 형성한다.  밀봉재(2)와 오버코트(14)와의 사이 및 밀봉재(2)와 틀형상 차광부재(8)와의 사이 간격이 코너부(A)인 곳에서 넓어지기 때문에, 밀봉재(2)로 향하는 자외선이 오버코트(14)또는 틀형상 차광부재(8)에 의해서 차폐되는 것을 방지하여, 밀봉재(2)에 미경화 부분이 발생하는 것을 방지한다.
Patent KR-20010012885-A (KR)
IPC: C08K5/5425
Filed: 1999-03-15
Abstract: 폴리올레핀계 수지 100중량부, 수산화알루미늄 및/또는 수산화마그네슘 50 내지 300중량부, 및 올레핀계 단량체 단위 50 내지 100mol%를 포함하는 중합체 블록 하나 이상과 카복실 그룹, 에폭시 그룹, 하이드록실 그룹, 카복실산 무수물 그룹 및 화학식 1의 그룹으로부터 선택된 하나 이상의 관능성 그룹을 갖는 비닐계 단량체 단위 0.1 내지 100mol%를 포함하는 중합체 블록 하나 이상으로 이루어진 블록 공중합체 0.1 내지 100중량부를 포함하는 난연성 수지 조성물이 기재되어 있다. 
     화학식 1 
     
       
     
     위의 화학식 1에서, 
     R 1 , R 2 및 R 3 은 각각 할로겐 원자, 비닐 그룹, 알킬 그룹 또는 알콕실 그룹이다. 
     당해 조성물은 용융 성형성, 난연성 및 기계적 특성이 모두 우수하다.  당해 난연성 수지 조성물을 용융 성형시켜 수득된 난연성 재료는 전선 피복재, 전기 절연재, 건축용 가스킷, 건축용 칸막이벽재, 바닥재, 벽재 및 자동차 부품과 같은 난연성이 요구되는 각종 용도에 적합하게 사용된다.
Patent KR-20010076456-A (KR)
Title: A delay controlable clock buffer
Inventor: AHN YEONG JUN
IPC: H03K19/096
Filed: 2000-01-26
Abstract: PURPOSE: A clock buffer capable of delay adjustment is provided to realize the delay adjustment of clock by having delay compensating parts which compensate for the delay of clock in buffer row. CONSTITUTION: The clock buffer capable of delay adjustment has the buffer row(200), the delay compensating parts(300), the control pin(400). The delay compensating parts(300) compensate the delay of the clock in the buffer rows(200). The control pin(400) is for supplying reference voltage to the delay compensating parts(300). The delay compensating parts(300) has nMOS transistor for resistance and nMOS transistor for capacitance to compensates the delay of input clock depending on the delay due to RC time constant formed by capacitance and resistance.
Patent KR-20010077090-A (KR)
Title: Method for bartering in telecommunication transaction using computer network system
Inventor: LEE SANG BAEK
Filed: 2000-01-31
Abstract: PURPOSE: A method for exchanging commodities at a communication transaction using a computer network system is provided to enhance an achievement possibility of a transaction. CONSTITUTION: Transaction participators suggest commodities to be sold and commodities to be bought through one's computers and transmits the suggested transaction list to a server computer(21). It is detected whether the commodities to be bought suggested by each transaction participator are included in commodities to be sold suggested by other transaction participators(23). Commodities being not included in the condition are excluded(27). It is detected whether the commodities to be sold suggested by each transaction participator are included in commodities to be bought suggested by other transaction participators(25). Commodities being not included in the condition are excluded(27). A list group having commodities being included in the condition is selected(29).
Patent KR-20010078622-A (KR)
Title: The quality of water puritication equipment for dam and reservoir
Inventor: SEO YOUNG WOOK
IPC: C02F1/74
Filed: 2000-02-09
Abstract: PURPOSE: A water quality purifying equipment for dam and reservoir is provided, which can supply air to many water quality purifying equipments by operating only one oxygen generator mounted on one water quality purifying equipment and so can purify water quality of a wide area. The buoyant force generating member of semi-cylinder type connected to a first chain is rotated by oxygen fed to the member. CONSTITUTION: The system comprises the followings: (i) a main body (2) of hexahedron of rectangular frames, which includes a buoyant force generating member (23) and upper and lower rotating members (24) engaged with a first chain (22), wherein a first sprocket (27) is fixed to a shaft (26) of upper rotating member (24), the first sprocket (27) being engaged with a second chain (28) and driven by a second sprocket (48) fixed on a slave shaft (47) that is driven by a third sprocket (48a); (ii) an oxygen generating device (3) that is fixed to the main body (2) for feeding oxygen to the inside of the main body (2) through an oxygen inducing pipe (31); (iii) a power transmitting device (4) that is mounted on buoy (8) for transfer power to a first cylinder (5); and (iv) a second cylinder (5) that is connected to a piston rod (52) for compressing air and for supplying air to another water purifying equipment through an air inducing pipe.
Patent KR-20000024490-A (KR)
Inventor: SUH MOON HOON
IPC: G06Q40/02
Filed: 2000-02-16
Abstract: PURPOSE: A method for issuing and circulating a virtual currency by a proper number in a computer network system and a reading device for recording the same are provided to retrench cost according to an issue of currency by using a cyber currency or a cyber bill. CONSTITUTION: A method for issuing and circulating a virtual currency by a proper number in a computer network system and a reading device for recording the same comprises the steps of: storing member information received from a plurality of virtual currency user to a database; issuing the virtual currency according to a request of user connected to a server computer through a network and storing the issued content to the database; and circulating the virtual currency through computers of each member and storing the circulating state to the database.
Patent KR-20000076722-A (KR)
Title: 병렬 구조를 이용하는 고속 디지털 타이밍 및 이득 변화율회로
IPC: G11B20/10
Filed: 2000-02-24
Abstract: 신호의 다른 부분을 처리하는 병렬 경로(105, 106)를 채용하는 것에 의해 피드백 제어 신호를 구현하는 시스템 및 방법이다.  이 방법은 2개의 처리 경로(102, 103)를 마련하는 것에 의해, 피드백 회로의 동작 속도를 효과적으로 두배로 한다.  이들 두 개의 경로가 사용될 때, 각각은 입력 데이터 신호(516)의 데이터 레이트의 대략 절반으로 동작한다.  이 방법은 또 하나이상의 모드가 사용되는 애플리케이션에서의 처리에 자신을 제공한다.  예를 들면, 디스크 드리이브(500)의 판독 채널(513)에 사용될 때, 3개의 모드, 즉, FIR-바이패스(201), 획득(202) 및 데이터-트래킹(203)가 바람직하다.  디스크 드라이브(500)의 판독 채널에 마련된 시스템(200)의 3가지 모드를 용이하게 전환할 수 있는 것은 높은 스루풋 레이트를 채용하는 시스템에 사용되는 넓은 등급의 피드백 회로에 대한 지원 구조 및 방법의 적응성을 설명한다.
Patent KR-20010087895-A (KR)
Title: Gas flow nozzle structure for generating nitride in semiconductor fabrication equipment
Inventor: LEE JONG HO
IPC: H01L21/318
Filed: 2000-03-09
Abstract: PURPOSE: A structure of a gas spray nozzle for forming a nitride layer is provided to minimize generation of power caused by unreacted residue gas in a process for forming the nitride layer, by simultaneously spraying two kinds of gas through the same spraying hole to make reaction regions coincide with each other. CONSTITUTION: The first gas nozzle sprays the first source gas. The second gas nozzle sprays the second source gas. Spraying holes(105) of the first and second spray nozzles for a reaction for forming a nitride layer coincide with each other so that the first and second source gas is sprayed on a reaction tube through the same spraying hole.
Patent KR-20010090376-A (KR)
Inventor: LEE GI HO
IPC: H01L21/027
Filed: 2000-03-25
Abstract: PURPOSE: Semiconductor fabrication equipment is provided to improve workability and to prevent a contamination of the line by using improved spinner equipment. CONSTITUTION: The spinner equipment comprises a spinner main body(10) for coating a photoresist on a wafer, and a spinner chemical box(18) for supplying the photoresist. The spinner main body(10) includes at least one coating unit(12). The spinner chemical box(18) is supplied the photoresist by using the coating unit(12) via photoresist supplying lines(16). The spinner chemical box(18) further comprises a thinner supplying line(24) connected to a thinner bottle(26) and a valve(28) for selectively connecting the photoresist supplying lines(16).