baber/WOPTO huggingface dataset:
Patent KR-20150004939-A (KR)
Title: 엔진 배기가스 정화 장치
Inventor: MURATA SATORU
IPC: F02B41/10
Filed: 2011-11-02
Abstract: 배기가스 재순환 (EGR) 용으로서 배기 터빈 과급기의 상류로부터 추출한 EGR 가스에 대해, 배기가스 세정 장치에 의한 세정 처리 후의 승압에 필요로 하는 전력을 저감시키거나 또는 불필요하게 한 엔진 배기가스 정화 장치를 제공한다.     배기 터빈 과급기 (20) 를 구비한 메인 엔진 (10) 으로부터 배출되는 배기가스 중의 대기 오염 물질을 저감 또는 제거하는 엔진 배기가스 정화 장치 (1) 가, 배기 터빈 과급기 (20) 의 터빈부 (21) 로부터 상류측의 배기 계통 (L1) 에서 EGR 가스로서 도입한 배기가스의 일부를 세정 처리하는 배기가스 세정 장치 (70) 와, 배기가스 세정 장치 (70) 의 상류측에 배치 형성되어 EGR 가스를 사용하여 구동되는 재순환용 터빈부 (61) 와 동축의 재순환용 압축기부 (62) 에 의해 배기가스 세정 장치 (70) 를 통과한 EGR 가스를 승압시키는 재순환용 배기 터빈 과급기 (60) 를 구비하고 있다.
Patent KR-20150027120-A (KR)
Title: 미네랄 나노입자를 포함하는 액체 중합성 조성물 및 광학 물품을 제조하기 위한 이의 용도
Inventor: FEUILLADE MATHIEU
IPC: C08F130/02
Filed: 2013-06-26
Abstract: 본 발명은 포스핀 옥사이드 또는 포스핀 설파이드 모노머 조성물을 이 안에 균일하게 분산된 미네랄 나노입자와 함께 포함하는 액체 중합성 조성물뿐만 아니라, 굴절률이 높은 투명 중합체 물질의 제조를 위한 이의 용도 및 광학 분야에서 이의 용도에 관한 것이다.
Patent KR-20160084521-A (KR)
Inventor: JOUNG YOUN GEUN
IPC: A01M1/14
Filed: 2015-01-05
Abstract: 본 발명은 축산 농가에서 처리하기 어려운 파리를 효과적으로 제거할 뿐만 아니라 기존에 사용되는 사료의 포대에 끈끈이를 적용하여 제품의 재활용이 가능하도록 구성되는 포대에 구비되는 끈끈이 스티커에 관한 것이며, 사료 또는 첨가제 포장지(1) 일측에 고정되고, 일측면에 접착부(12)가 형성되어 포장지(1)에 부착되며, 타측면에 끈끈이 접착제(11)가 도포된 접착지(10); 접착지(10)의 타측면에 부착되어 끈끈이 접착제(11)가 노출되지 않게 하고, 외측면에 사료 또는 첨가제의 성분이나 유효기간등의 정보가 인쇄된 표기사항 스티커(20); 로 이루어져 사료 또는 첨가제를 다 사용하고 난 포장지(1)에서 표기사항 스티커(20)를 제거하여 끈끈이로 사용하고, 끈끈이로 사용된 접착지(10)는 제거하여 포장지가 재활용되도록 구성된 것을 특징으로 한다.
Patent KR-20160084105-A (KR)
Inventor: HEO SEON IL
IPC: D06F58/20
Filed: 2015-01-05
Abstract: The present invention relates to a laundry dryer. The laundry dryer comprises: a cabinet including an upper cover; a drying drum installed inside the cabinet; an air supplying device collecting and supplying air from and to the drying drum; and a storage unit forming an upper surface of the cabinet with the upper cover and creating a storage space.
Patent KR-20160086101-A (KR)
Title: Bumper bracket
Inventor: KIM SE HWAN
IPC: B60R19/24
Filed: 2015-01-09
Abstract: According to an embodiment of the present invention, a bumper bracket is symmetrically formed based on the center of a mold parting surface or a matching surface of a bumper cover, thereby minimizing deformation in injection molding to improve exterior appearance quality between a bumper and a related component.
Patent KR-20160093792-A (KR)
Title: Rotary Type Advertizing Apparatus
Inventor: KIM GI YONG
IPC: G08B7/06
Filed: 2015-01-29
Abstract: The present invention relates to an apparatus for rotating a pole-type indoor/outdoor advertising board, which can prevent an accident. An apparatus for rotating a pole-type indoor/outdoor advertising board, which is mounted on the ground and rotates an advertising board body normally and reversely at a predetermined angle to a central axis, includes: the advertising board body having a plurality of advertising panels electrically connected to each other and formed in a rectangular panel shape to display advertising contents on a front surface; a rotational pillar extending from a middle of a low surface of the advertising board body; and a rotation driving unit placed on a low end of the advertising board body and fixedly attached to the ground, wherein a rotation pillar of the advertising board body is rotatably and vertically installed in a central portion of the rotation driving unit, warning lights having lightening devices are attached to a low end of the advertising board body, and a plurality of object sensing sensors is sequentially attached to a low surface of the advertising board body.
Patent KR-20160094523-A (KR)
Title: Circulation type deep flow technique apparatus for producing seed potatoes and cultivation method using the same
Inventor: CHANG DONG CHIL
IPC: A01G31/00
Filed: 2015-01-30
Abstract: Provided are a circulating deep flow hydroponic apparatus for producing seed potatoes and a cultivation method using the same. The circulating deep flow hydroponic apparatus comprises: a transplantation panel having at least one seed potato plantlet transplanting hole therein; a bed having a space where the transplantation panel is placed and storing a culture solution necessary for growth of the seed potato plantlet transplanted in the transplantation panel; a supply tube connected to a circulating pump for circulating the culture solution into the bed to supply the culture solution to the bed; and a discharge tube collecting the culture solution circulating through the bed and then discharged, wherein the discharge tube includes water discharge holes separated by a predetermined distance from a bottom part of the bed so that the level of the culture solution in the bed can be kept at a constant level, so a predetermined portion of the transplanted seed potato plantlet is immersed in the culture solution.
Patent KR-20160094709-A (KR)
Inventor: LEE WON HYO
IPC: G06Q50/10
Filed: 2015-02-02
Abstract: The present invention relates to a system and a method for drawing an item. The present invention relates to a system including an online game server providing an online game to a terminal via wired and wireless communication networks. The online game server includes: a game providing server enabling a user to play the online game by using the terminal by providing the online game to the terminal; and a jackpot item drawing server providing a jackpot item which can be used in an online game without cost by determining winning in accordance with a predetermined jackpot item winning probability when obtaining selection information including a kind of use item which can be used in the online game. The jackpot item drawing server includes a jackpot item ability setting unit differently setting kinds of the jackpot items which can be won in accordance with the kind of the use item included in the selection information of the obtained use item, wherein the jackpot item ability setting unit also sets the jackpot item so that the higher a selling price of the use item included in the obtained selection information of the use item is, the more expensive jackpot item is won. According to the present invention, the higher the selling price of the selected use item is, the more expensive jackpot item is provided in accordance with the predetermined winning probability when the selection information on the use item which can be used on the online game is obtained. The system for drawing an item improves loyalty on the game and enables the user to be interested in an item purchase by having not only an item purchase effect due to simple necessity but also a betting effect by providing the wining probability of the jackpot item for the user in real time.
Patent KR-20160095787-A (KR)
Title: 해양 쓰레기 파쇄장치
Inventor: LEE JAI HONG
IPC: B02C18/18
Filed: 2015-02-04
Abstract: 본 발명의 해양쓰레기 파쇄장치는   파쇄장치는는 내부상부에 호퍼가 설치되며 하우징과, 상기 호퍼를 통하여유입되는 해양쓰레기를 파쇄하는 컷터유닛이 설치된 하우징과,  상기 하우징의 하부에 설치되어 컷터유닛으로부터 분쇄쓰레기가 저장되는 저장함을 구비한 본체부를 구비하며, 
상기 컷터유닛은 상호 나란하게 설치되는 제 1,2구동축과,  상기 제 1구동축에 설치되는 것으로,  판상의 컷팅날본체부의 외주면 양측에 해양쓰레기를 파쇄하기 위한 제1컷팅날부가 형성되고, 상기 제1컷팅날본체부의 외주면으로부터 돌출되어 해양쓰레기를 절단부위에 견인함과 아울러 컷팅하는 제1견인컷팅부를 구비한 제 1컷터들과,  상기 제 2구동축에 제 1컷터들의 사이 사이에 제 1컷터들과 밀착될 수 있도록 설치되는 것으로,  제2컷팅날본체부의 외주면 양측에 제 1컷팅날부와 교차하면서해양쓰레기를 파쇄하기 위한 제2컷팅날부가 형성되고, 상기 컷팅날본체부의 외주면으로부터 돌출되어 해양쓰레기를 절단부위에 견인함과 아울러 컷팅하는 제2견인컷팅부를 구비한 제 2컷터들을 구비하며, 상기 제 1구동축과 연결되어 제 1구동축을 구동시키기 위한  구동부와, 상기 제 1,2구동축에 설치되는 제 1구동축의 회전력과 제 2구동축의 회전력이 서로 다르게 회전될 수 있도록 동력을 전달하는 동력전달부를 구비한다. 본 발명의  해양 쓰레기 파쇄장치는  해양쓰레기의 양륙에 따른 비용을 대폭 절감할 수 있다.
Patent KR-20160096321-A (KR)
Title: Method and Apparatus for Effective Traffic Control in Mobile Communication System
Inventor: CHOI SUNG GU
IPC: H04L12/801
Filed: 2015-02-05
Abstract: The present invention relates to a method and an apparatus for efficient traffic control which redirect user traffic based on a specific rule or condition in advance before overload occurs using a traffic offloading technique in an environment of a next generation mobile communication system to optimize overload control to prevent overload of a base station or an evolved packet core (EPC) on a network to maximize resource usage efficiency and guarantee service continuity to improve quality of service (QoS) and system performance.
Patent KR-20160098707-A (KR)
Title: Cooling Module for Motor Vehicle
Inventor: PARK SUNG WOOK
IPC: B60K11/06
Filed: 2015-02-11
Abstract: The present invention relates to a cooling module for a vehicle, comprising a condenser, a radiator, and a fan shroud. More specifically, the cooling module for a vehicle enables the position of a side mounting formed on both sides of the cooling module to be positioned on a straight line while being perpendicular to the center of gravity of the cooling module and the ground surface to stably fixate the cooling module on a carrier.
Patent KR-20160098740-A (KR)
Title: Massage chair with rollers for back and thigh
Inventor: LEE GUE DAE
IPC: A47C9/00
Filed: 2015-02-11
Abstract: A massage chair provided by the present invention includes a bottom plate, a back support, and a first massage unit. The bottom plate supports the thigh of a user. The back support supports the back of a user by being connected with the bottom plate and is able to rotate against the bottom plate. The first massage unit is formed in the back support and the bottom plate and performs massage from neck to thigh while moving the inside of the back support and the bottom plate. The first massage unit is able to massage by moving from neck to thigh from all angles where the back support is positioned against the bottom plate.
Patent KR-20160101824-A (KR)
Inventor: JEONG JIN TAE
IPC: G09G3/32
Filed: 2015-02-17
Abstract: Each of stages includes a shift resister which applies a first driving voltage to a first node according to a control signal and applies the first driving voltage to a second node according to a reset signal; and clock switches which receive scan signals and control switching operation according to the voltage of the first node, and a scan signal output part which includes switches which control switching operation according to the voltage of the second node. The clock switches successively output clock signals with the scan signals, and output a second driving voltage with the scan signals. So, the generation of a vertical striped pattern due to luminance deference can be prevented.
Patent KR-20160103210-A (KR)
Inventor: HEO HEE SEUNG
IPC: B63B25/16
Filed: 2015-02-23
Abstract: A liquefied gas processing system in accordance with one embodiment of the present invention, comprises: a first line which supplies liquefied gas to a high pressure liquefied gas demander; a second line which supplies liquefied gas to a low pressure liquefied gas demander; a third line which supplies evaporation gas to an evaporation gas demander; a liquefied gas heat exchanger arranged on the first line to heat liquefied gas; a liquefied gas processor arranged on the second line to heat liquefied gas; and an evaporation gas compressor arranged on the third line to compress evaporation gas. In order to separately control the liquefied gas heat exchanger the liquefied gas processor, and the evaporation gas compressor without mutual interference, fluid, which flows in the first line, the second line, and the third line, is separately supplied to the high pressure demander, the low pressure demander, and the evaporation gas demander, respectively, from each upper stream of the liquefied gas heat exchanger, the liquefied gas processor, and the evaporation gas compressor. According to the liquefied gas processing system of the present invention, lines and devices for supplying fuel to each liquefied gas demander that consumes low and high pressure liquefied gas and evaporation gas can be controlled without mutual interference by separately arranging and operating the lines and devices, thereby improving stability of the system.
Patent KR-20160107423-A (KR)
Inventor: KO AM
IPC: E05B5/00
Filed: 2015-03-04
Abstract: The present invention relates to an insert type handle and, more specifically, relates to wherein a function of the handle is able to be realized in an accommodating space of a handle body detachably and fixedly inserted into a front side of a drawer or a door to enable a size to be slim, and to easily be assembled and installed. Moreover, with a slim structure, a wood base process of a door is easy for additional finishing to be unnecessary. According to the present invention, an insert type handle comprises: a handle body; a plurality of fixing shafts; a handle portion; an interlocking means; and a noise prevention means.
Patent KR-20160109580-A (KR)
Title: 주문 누적량에 기반하여 할인 가격을 제공하는 식자재 유통 시스템 및 방법
Inventor: KIM SANG DEOK
IPC: G06Q30/02
Filed: 2015-03-12
Abstract: 주문 누적량에 기반하여 할인 가격을 제공하는 식자재 유통 시스템 및 방법이 개시된다.  식자재의 원가격, 판매 기간 및 누적 주문 수량에 따른 가격 할인폭을 각각 설정하여 판매 등록하는 식자재 제조사 단말; 상기 판매 등록된 식자재에 대한 구매 주문을 송신하는 다수의 소비자 주문 단말; 상기 식자재 제조사 단말로부터 식자재의 원가격, 판매 기간 및 누적 주문 수량에 따른 가격 할인폭을 판매 등록받아 게시하고, 게시된 판매 기간 내에 상기 다수의 소비자 주문 단말로부터 구매 주문을 수신하여 상기 판매 기간 종료시까지의 누적 주문량을 산출하고, 산출된 누적 주문량에 따른 가격 할인폭을 산정하여 해당 판매 기간의 구매 주문에 대하여 해당 가격 할인폭이 적용된 가격으로 결제 및 정산을 수행하는 식자재 유통 서버를 구성한다.  상술한 주문 누적량에 기반하여 할인 가격을 제공하는 식자재 유통 시스템 및 방법에 의하면, 식자재 제조사가 식자재 유통 서버에 판매 기간과 누적 주문 요구량을 등록하면, 식당의 소비자들이 주문을 하여 해당 판매 기간에 누적 주문 요구량을 채우면, 미리 정해진 할인폭을 적용하여 식자재를 공급하도록 구성됨으로써, 유통사의 외상 거래가 없어 현금 유동성 확보를 유리하게 하고 비교적 대량의 주문 배송을 통해 배송의 곤란함을 방지할 수 있는 효과가 있다.
Patent KR-20160002330-A (KR)
Inventor: KATO HIROYUKI
IPC: H04N5/225
Filed: 2015-03-19
Abstract: A camera apparatus on an imaging terminal side detects an installation state (imaging state) of own camera based on sensor information obtained by an imaging state sensor of the own camera, and specifies the state as an imaging condition thereof. Then, the camera apparatus refers a task table, and thereby specifies a camera task associated with the installation state (imaging state) which is the imaging condition as a task of own camera.
Patent KR-20150118052-A (KR)
Title: Circuits and methods related to radio-frequency receivers having carrier aggregation
Inventor: WLOCZYSIAK STEPHANE RICHARD MARIE
IPC: H03H7/18
Filed: 2015-04-13
Abstract: Circuits and methods relate to radio-frequency (RF) receivers having carrier aggregation. According to some embodiments, a carrier aggregation (CA) circuit may include a first filter to permit an operation in a first frequency band and a second filter to permit an operation in a second frequency band. The CA circuit may further include a first route realized between the first filter and a common node and the first route is to provide substantially matched impedance for the first frequency band and substantially opened-circuit impedance for the second frequency band. The CA circuit may further include a second route realized between the second filter and the common node and the second route is to provide matched impedance for the second frequency band and opened-circuit impedance for the first frequency band.
Patent KR-20160122346-A (KR)
Inventor: KIM DO HYUNG
IPC: G06F19/00
Filed: 2015-04-13
Abstract: Disclosed is an apparatus for providing behavior adjustment information suitable for a user, such that the user adjusts his/her behaviors. The apparatus for providing the behavior adjustment information includes: a user information reception unit for receiving user health information measured at a wearable device worn by a user and transmitted to a user terminal, user environment information measured at a sensor mounted in the user terminal, and user behavior information extracted from an application installed in the user terminal; a user state estimation unit for estimating a health state and an environment state of the user on a basis of the received health information, environment information, and behavior information; and a user behavior information supply unit for generating behavior adjustment information recommended to the user under the estimated health state and environment state to transmit the generated behavior adjustment information to the user terminal.
Patent KR-20160124452-A (KR)
Inventor: YANG JUNG WON
IPC: B05B13/02
Filed: 2015-04-20
Abstract: The present invention relates to a rotary plate for an automatic painting device, and more specifically, to a rotary plate for an automatic painting device, wherein the rotary plate can automatically provide a paint target for a provider, a sprayer and a dispenser when the paint target is painted. The rotary plate (100) rotating to a paint sprayer (20) side to allow the paint target provided by a providing apparatus (10) to be painted and rotating to a dispenser (30) side to allow the painted target to be dispensed; multiple paint target fixing units (110) which are provided on the rotary plate and to which the paint target provided by the providing apparatus (10) is inserted and fixed; a main shaft (120) provided in a lower part of the rotary plate to support the rotary plate and coupled to be able to rotate on a table; a rotary plate rotating motor (130), provided in the lower part of the rotary plate, for rotating the rotary plate; multiple support members (140), provided in the lower part of the rotary plate, for supporting the rotary plate; and a fixing unit rotating air cylinder (150), provided in the lower part of the rotary plate, for rotating the paint target fixing units (110).
Patent KR-20160126153-A (KR)
Inventor: SONG JUNG HO
IPC: G02B6/02
Filed: 2015-04-22
Abstract: 본 발명은 적어도 하나의 광원, 상기 적어도 하나의 광원에서 도달한 빔을 스캔 대상을 향해 반사시키는 반사체, 상기 적어도 하나의 광원과 상기 반사체 사이에서 상기 빔의 경로를 따라 차례로 배치되는 하나 또는 복수의 렌즈로 구성되는 광학 렌즈계 및 상기 적어도 하나의 광원의 움직임 및 상기 반사체의 움직임 중 적어도 하나를 제어하는 컨트롤러를 포함하고, 상기 광학 렌즈계는 초점면이 상기 적어도 하나의 광원 쪽에 위치하고 어퍼쳐가 상기 반사체 쪽에 위치하도록 구성되는 것을 특징으로 하는 스캐너를 구현하여 소형으로 빠른 스캔속도를 얻을 수 있다.
Patent KR-20160128041-A (KR)
Title: Transmission of agriculture vehicle
Inventor: LEE YOUNG GYU
IPC: B60K17/10
Filed: 2015-04-28
Abstract: A transmission of an agricultural working vehicle is disclosed. According to an embodiment of the present invention, the transmission of an agricultural working vehicle comprises: a first shifting unit for forward or backward gear shifting and primary shifting of multiple gears; and a second shifting unit performing secondary shifting to increase and decrease the speed of forward or backward power which is primarily shifted and output by the first shifting unit. Therefore, the present invention allows multiple shifting gears and widely shifts the gear from the low-speed gear to the high-speed gear without increasing the horizontal length of the transmission.
Patent KR-20150125617-A (KR)
Title: Organic solar cell and method for manufacturing the same
Inventor: LEE HANG KEN
IPC: H01L51/42
Filed: 2015-04-30
Abstract: The present invention relates to an organic solar cell, and a method to manufacture the same. The organic solar cell comprises: a first electrode; a second electrode prepared to face the first electrode; a photoactive layer prepared between the first electrode and the second electrode; a charge transporting layer prepared between the photoactive layer and the first electrode or the second electrode; and a fullerene derivative having a crown type substituent prepared between the charge transporting layer and the photoactive layer.
Patent KR-20160132546-A (KR)
Title: 탄소사를 이용한 발열형 골프 가방
Inventor: SONG SEOL HWA
IPC: A63B55/00
Filed: 2015-05-11
Abstract: 탄소사를 이용한 발열형 골프 가방이 제공된다. 본 발명의 일 실시예에 따른 탄소사를 이용한 발열형 골프 가방은, 내피와 외피 사이에 설치되는 탄소사로 구성된 발열부를 포함하는 몸체, 상기 몸체 내부에 설치되어 상기 몸체 내부의 온도 또는 습도 중 적어도 하나를 측정하는 센서부, 상기 발열부에 연결되는 전원 스위칭부, 상기 전원 스위칭부에 연결되어 상기 발열부에 직류 전원을 공급하는 전원 장치 및 상기 전원 스위칭부와 상기 센서부에 연결되는 전원 제어부를 포함한다.
Patent KR-20150135122-A (KR)
Inventor: WATAYA KAZUHIRO
IPC: H01L33/60
Filed: 2015-05-21
Abstract: The present invention relates to a wavelength conversion member which comprises a light emitting part made of a mixture which includes a transparent or semi-transparent polymer material and phosphor, and a reflecting layer which is stacked on part of the surface of the light emitting part. The wavelength conversion member which converts light from a light source by using the phosphor, and emits converted light to a desired direction, can use effectively light emitted to an undesired direction without loss among light emitted from the phosphor of the wavelength conversion member.
Patent KR-20150143307-A (KR)
Inventor: MIHARA TAKUYA
IPC: H01L21/304
Filed: 2015-05-27
Abstract: The present invention is to provide a grinding device capable of measuring the thickness of a workpiece by having a measurement needle stably contact an upper plane of the workpiece even in performing grinding a plurality of workpieces while maintaining the workpieces at the same time. The grinding device comprises: a maintaining unit having a maintaining plane for maintaining the workpiece (W); a grinding unit for grinding a rear plane (WR) of the workpiece maintained by the maintaining unit; and a height measurement unit (40) for measuring height of the rear plane (WR) of the workpiece (W) ground by the grinding unit. The height measurement unit (40) comprises two measurement needles (43) whose contact points contacting the rear plane (WR) of the workpiece are arranged at the same height. The two measurement needles (43) are arranged separately at an interval (W1) larger than an interval (W2) of a circumferential direction among parallel or adjacent workpieces (W) along a circumference (C) around a rotation axis (A) of the maintaining unit.
Patent KR-20160142997-A (KR)
Title: 강제순환식 해동보드
Inventor: KIM JIN SE
IPC: A23L3/16
Filed: 2015-06-04
Abstract: 본 발명은 강제순환식 해동보드가 개시된다. 내부에 유체순환로를 갖고, 외부에 유체의 투입구와 배출구를 갖는 금속판; 상기 유체를 저장하고, 유체의 공급구와 회수구를 갖는 저장탱크; 상기 유체의 공급구와 상기 금속판의 투입구 사이에 연결되어 상기 금속판의 내부로 유체를 강제순환시키는 순환펌프; 및 상기 저장탱크에 담긴 상기 유체가 상기 순환펌프에 의해 상기 금속판으로 강제순환될 수 있도록 폐루프를 형성하는 연결관을 포함한다. 이와 같은 강제순환식 해동보드에 의하면, 냉동식품의 해동 시간을 줄일 수 있고, 복수의 금속판을 수직 또는 수평으로 연장하여 해동면적을 넓혀 사용함으로써 많은 양의 냉동식품을 동시에 해동시킬 수 있어 해동 작업효율을 향상시킬 수 있다.
Patent KR-20160000436-A (KR)
Inventor: RYU STEPHEN BEUNG TAE
IPC: C07F9/10
Filed: 2015-06-23
Abstract: The present invention relates to a method for producing lysophosphatidylethanolamine 18 : 1 by treating phospholipid extracted from microorganisms with phospholipase A2, and to lysophosphatidylethanolamine 18 : 1 produced by the method. The lysophosphatidylethanolamine 18 : 1 of the present invention can be used as a vaccine material for increasing an immune reaction of plants without side effects such as inhibition of plant growth and as a composition for enhancing fruit storage. Additionally, the lysophosphatidylethanolamine 18 : 1 can be used for a food, medicine, cosmetics, and agricultural uses, and is useful for related industries.
Patent KR-20160012910-A (KR)
Title: 데이터 보정 장치, 묘화 장치, 검사 장치, 데이터 보정 방법, 묘화 방법, 검사 방법 및 프로그램을 기록한 기록 매체
Inventor: YAMADA RYO
IPC: G03F1/80
Filed: 2015-07-03
Abstract: 데이터 보정부(21)는, 기판 상에 에칭에 의해 형성되는 패턴의 설계 데이터를 기억하는 설계 데이터 기억부(211)와, 기판의 복수의 기준 위치에 각각 대응하는 복수의 에칭 특성을 기억하는 에칭 특성 기억부(212)와, 기판 상의 각 분할 영역과 복수의 기준 위치의 각각의 위치 관계에 의거해 각 분할 영역의 영역 에칭 특성을 구하는 영역 에칭 특성 취득부(213)와, 설계 데이터를 복수의 분할 영역에 대응하는 복수의 분할 데이터로 분할하고, 각 분할 데이터를 각 분할 영역의 영역 에칭 특성에 의거해 보정하는 분할 데이터 보정부(214)를 구비한다.  이에 의해, 각 분할 영역의 기판 상의 위치의 차이에 따른 에칭 특성의 차이를 고려하여, 각 분할 데이터에 대한 에칭 보정을 정밀하게 행할 수 있다.