Patent SG-11201807248U-A (SG)
Title: Method and system for charge control for imaging floating metal structures on non-conducting substrates
Inventor: HEGDE ARJUN
IPC: H01J37/147
Filed: 2017-03-31
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 1111111101111011101010111110101111101110101111110111101111111101111101111011111 International Bureau ... .... ..Yjd ..... ...,/ (10) International Publication Number (43) International Publication Date WO 2017/176595 Al 12 October 2017(12.10.2017) WIPO I PCT (51) International Patent Classification: (74) Agents: MCANDREWS, Kevin et al.; KLA-TENCOR HOLI 37/147 (2006.01) HOLI 37/28 (2006.01) CORPORATION, Legal Department, One Technology Drive, Milpitas, California 95035 (US). (21) International Application Number: PCT/US2017/025595 (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (22) International Filing Date: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, 31 March 2017 (31.03.2017) BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (25) Filing Language: English DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, (26) Publication Language: English KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (30) Priority Data: MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, 62/318,078 4 April 2016 (04.04.2016) US NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, 15/387,388 21 December 2016 (21.12.2016) US RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, (71) Applicant: KLA-TENCOR CORPORATION [US/US]; ZA, ZM, ZW. Legal Department One Technology Drive, Milpitas, Cali- fornia 95035 (US). (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (72) Inventors: HEGDE, Arjun; 440 Dixon Landing Road GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, #G303, Milpitas, California 95035 (US). GRELLA, Luca; TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, 1170 Olympic Court, Gilroy, California 95020 (US). TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, SEARS, Christopher; 1958 Wave Place, San Jose, Cali- DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, = fornia 95133 (US). LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, = SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, — GW, KM, ML, MR, NE, SN, TD, TG). — [Continued on next page] = (54) Title: METHOD NON-CONDUCTING SUBSTRATES _— = t00 _ = - = = iii--.1 = = = 02 101 AND SYSTEM FOR CHARGE CONTROL FOR IMAGING FLOATING METAL STRUCTURES ON (57) : A scanning electron microscopy system is disclosed. The system includes a sample stage configured to secure a sample having con- ducting structures disposed on an insulating substrate. The system includes an electron-optical column including an electron source configured to gen- crate a primary electron beam and a set of electron-optical elements con- figured to direct at least a portion of the primary electron beam onto a por- Boa tion of the sample. The system includes a detector assembly configured to detect electrons emanating from the surface of the sample. The system in- dudes a controller communicatively coupled to the detector assembly. The controller is configured to direct the electron-optical column and stage to 106 perform, with the primary electron beam, an alternating series of image flood the the the =104 — = 105 108 nc , scans and scans of portion of sample, wherein each of flood scans are performed sequential to one or more of the imaging scans. — 110.,, ---- OA , ' z: — ..&Z.ZZCZA 112 11 .4 kin tz. kin ,tD IN 1-1 IN FIG.1 1-1 0 ei O WO 2017/176595 Al MIDEDIM011111 111111110101301011111111111111111111111111111111111111111 Published: — with international search report (Art. 21(3))