Patent SG-11201903365S-A (SG)
Title: Elastic wave device with sub-wavelength thick piezoelectric layer
Inventor: GOTO REI
IPC: H01L41/107
Filed: 2017-10-18
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 111111110111101110101011111011111011111101111111011011110101111111011110111111 Organization (10) International Publication Number International Bureau (43) International Publication Date .....0\"\"\" WO 2018/075682 Al 26 April 2018 (26.04.2018) WIP0 I PCT _ (51) (21) (22) (25) Filing Language: (26) (30) (71) Applicant: SKYWORKS SOLUTIONS, INC. [US/US]; (72) International Patent Classification: (JP). LAM, Chun, Sing; 20 Sylvan Road, Woburn, MA H01L 41/107 (2006.01) HO1L 41/083 (2006.01) 01801 (US). HOlL 41/187 (2006.01) HO1L 41/047 (2006.01) (74) Agent: JUANG, Agnes; Knobbe Martens, 2040 Main International Application Number: Street, 14th Floor, Irvine, CA 92614 (US). PCT/US2017/057256 (81) Designated States (unless otherwise indicated, for every International Filing Date: kind of national protection available): AE, AG, AL, AM, 18 October 2017 (18.10.2017) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, Publication Language: English HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, Priority Data: KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 62/410,804 20 October 2016 (20.10.2016) US MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, 62/423,705 17 November 2016 (17.11.2016) US OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. 20 Sylvan Road, Woburn, MA 01801 (US). (84) Designated States (unless otherwise indicated, for every Inventors: GOTO, Rei; 1006, Oaza Kadoma Kadoma-shi, kind of regional protection available): ARIPO (BW, GH, Osaka-fu, Osaka, 571 0050 (JP). ZOE, Jie; 20 Sylvan Road, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, Woburn, MA 01801 (US). NAKAMURA, Hiroyuki; 1006, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, Oaza Kadama Kadoma-shi, Osaka-fu, Osaka, 571 0050 TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, = _ _ = Title: ELASTIC WAVE DEVICE 10- \ 1 / 4 : Aspects of this disclosure layer, an interdigital transducer electrode on the piezoelectric layer, and a high velocity the velocity of an elastic wave. The high velocity layer can inhibit an elastic wave from -resonance. piezoelectric WITH SUB-WAVELENGTH THICK PIEZOELECTRIC 14 . is u 1 h l LAYER = (54) = = = \ maa — ma 60 asea Rsaa seaa mar man- , device leaking H includes a sub-wavelength thick layer with a higher bulk velocity from the piezoelectric layer at = = 16 = = = 1-1 co ei kin IN © -- -- GO (57) 0 than N anti F1.1 relate to an elastic wave device. The elastic wave C [Continued on next page] WO 2018/075682 Al MIDEDIMOMOIDEIREIDIONONIMEIHIMEMOIMIE TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(H)) — as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) Published: — with international search report (Art. 21(3))