Patent EA-003148-B1 (EA)
Title: Vacuum module (variants thereof) and a system of modules for applying coatings to a substrate
IPC: C23C14/34
Filed: 2000-07-05
Abstract: 1. A vacuum module for applying coatings to a substrate comprising a vacuum chamber provided with an opening designed for positioning a substrate; a sealing member and a processing device designed for applying coatings; a valve gate disposed in the plane parallel to the plane of the opening of the vacuum chamber and designed for separating a part of a space of the chamber having the processing device disposed therein from the opening; and a processing device-transporting mechanism, characterized in that said processing device-transporting mechanism is mounted so that it can move reciprocally parallel to the substrate surface. 2. A vacuum module for applying coatings to a substrate comprising a vacuum chamber provided with an opening designed for positioning a substrate; a sealing member and a processing device designed for applying coatings; a valve gate disposed in the plane parallel to the plane of the opening of the vacuum chamber and designed for separating a part of a space of the chamber having the processing device disposed therein from the opening; and a processing device-transporting mechanism, characterized in that the vacuum chamber is provided with at least two openings for positioning substrates, with the processing device being mounted to move reciprocally parallel to the substrate surface. 3. A vacuum module for applying coatings for a substrate comprising a vacuum chamber provided with an opening designed for positioning a substrate; a sealing member and a processing device designed for applying coatings; a valve gate disposed in the plane parallel to the plane of the opening of the vacuum chamber and designed for separating a part of a space of the chamber having the processing device disposed therein from the opening; and a processing device-transporting mechanism, characterized in that the vacuum chamber is further provided with a cover designed for positioning the substrate, and the processing device-transporting mechanism is mounted so that it can move reciprocally parallel to the substrate surface. 4. A vacuum module for applying coatings to a substrate according to any of claims 1-3, characterized in that the perimeter of the vacuum chamber opening matches the contour of the surface to be coated. 5. A vacuum module for applying coatings to a substrate according to any of claims 1, 2, 3, characterized in that the module is provided with a substrate carrier disposed within the zone of the vacuum chamber opening. 6. A vacuum module for applying coatings to a substrate according to claim 5, characterized in that wherein said substrate carrier of the module is made removable. 7. A vacuum module for applying coatings to a substrate according to any of claims 5, 6, characterized in that said substrate carrier of the module is provided with at least one opening designed for positioning of the substrate. 8. A vacuum module for applying coatings to a substrate according to any of claims 5, 7, characterized in that said substrate carrier of the module is disposed parallel to the motion plane of the processing device. 9. A vacuum module for applying coatings to a substrate according to claim 7, characterized in that the opening of the substrate carrier is provided with a sealing member mounted along the perimeter of said opening and designed for fixing the substrate. 10. A vacuum module for applying coatings to a substrate according to any of claims 7, 9, characterized in that the perimeter of the substrate carrier opening matches the contour of the surface to be coated. 11. A vacuum module for applying coatings to a substrate according to claim 3, characterized in that the cover of the vacuum chamber is made removable. 12. A vacuum module for applying coatings to a substrate according to any of claims 3, 11, characterized in that said cover of the vacuum chamber is provided with an opening. 13. A vacuum module for applying coatings to a substrate according to any of claims 3, 11, characterized in that said cover of the vacuum chamber is provided with at least two openings designed for positioning substrates. 14. A vacuum module for applying coatings to a substrate according to any of claims 3, 12, 13, characterized in that said cover of the vacuum chamber is used as a substrate carrier. 15. A vacuum module for applying coatings to a substrate according to any of claims 12, 13, characterized in that the cover opening is provided with a sealing member mounted along the perimeter of said opening and designed for securing the vacuum chamber cover. 16. A vacuum module for applying coatings to a substrate according to any of claims 3, 12, 13, 14, 15, characterized in that said vacuum chamber cover is disposed parallel to the motion plane of the processing device mounted so that it can move reciprocally parallel to the surface of substrates positioned in openings made in the vacuum chamber cover. 17. A vacuum module for applying coatings to a substrate according to any of claims 2, 7, 12, 13, characterized in that said vacuum chamber is provided with an additional gate individual for each opening that is mounted in the plane parallel to the plane of the substrate positioning. 18. A vacuum module for applying coatings to a substrate according to any of claims 1-3, characterized in that a carriage is used as a processing device-transporting mechanism. 19. A vacuum module for applying coatings to a substrate according to any of claims 1-3, 18, characterized in that the processing device comprises processing components, the configuration of which on the carriage is selected from the group comprising evaporators, magnetron cathodes, cathode-deposition targets, ionic cleaning system and ion-sputtering system having a rotary prism, with the rotary prism being disposed parallel to the plane of the vacuum chamber opening and at least one operating face thereof being provided with a material to be sputtered. 20. A vacuum module for applying coatings to a substrate according to claim 19, characterized in that said processing components are made replaceable. 21. A system of modules for applying coatings to a substrate comprising at least two vacuum modules with a common evacuation system according to any of claims 1-20, characterized in that said modules are provided with a common evacuation control system, a common handling device-control system designed for an automatic positioning and removing substrates and having process sensors, with at least two modules being disposed within the operation zone of the common manipulator.