Patent SG-11201811394U-A (SG)
Title: Cleaning solution mixing system with ultra-dilute cleaning solution and method of operation thereof
Inventor: RASTEGAR ABBAS
IPC: G03F7/20
Filed: 2017-07-19
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 111111H1110111111111111111111111111111111111111111111111111111111111111111111111110111111 Organization International Bureau (10) International Publication Number 0 (43) International Publication Date ......0\"\" WO 2018/022370 Al 01 February 2018 (01.02.2018) WIP0 I PCT (51) International Patent Classification: (74) Agent: SERVILLA, Scott S.; Servilla Whitney LLC, 33 GO3F 7/20 (2006.01) Wood Avenue South, Suite 830, Iselin, New Jersey 08830 (21) International Application Number: (US). PCT/US2017/042745 (81) Designated States (unless otherwise indicated, for every (22) International Filing Date: kind of national protection available): AE, AG, AL, AM, 19 July 2017 (19.07.2017) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (25) Filing Language: English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (26) Publication Language: English HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, (30) Priority Data: MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, 62/366,231 25 July 2016 (25.07.2016) US OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, 15/652,497 18 July 2017 (18.07.2017) US SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (72) Inventor: RASTEGAR, Abbas; 3018 Patrick Road, Sch-GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, enectady, New York 12303 (US). UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, = (54) Title: CLEANING SOLUTION MIXING SYSTEM WITH ULTRA-DILUTE CLEANING SOLUTION AND METHOD OF OPERATION THEREOF = = = = — BULK CHEMICAL DELIVERY SYSTEM 112 = = EXHAUST ULTRAPURE WATER SOURCE ► 106 = 110 = — ► CLEANING TOOL 100 CLEANING CHAMBER 102 = = = — CLEANING SOLUTION DRAIN = MIXING SYSTEM 108 — — = 104 4 I CONTROL SIGNAL _. 11 FIG. 1 0 IN cr) N (57) : Disclosed are a cleaning solution mixing system, a tool and a method N source for providing ultrapure water; an ammonia filter for filtering ammonia 0 ---. hydrogen peroxide in gas form; an ammonia re-gas membrane for dissolving the GC ammoniated water; a hydrogen peroxide re-gas membrane for dissolving the 1-1 © ultra-dilute hydrogenated water; and a mixer for forming an ultra-dilute cleaning N and the ultra-dilute hydrogenated water. of operation thereof, including an ultrapure water in gas form; a hydrogen peroxide filter for filtering ammonia in the ultrapure water and forming ultra-dilute hydrogen peroxide in the ultrapure water and forming solution by mixing the ultra-dilute ammoniated water O [Continued on next page] WO 2018/022370 Al MIDEDIM01101 DIDIREIH0 110101111111111111111111111111111111111111111 EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, SK, SM, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))