baber/WOPTO huggingface dataset:
Patent KR-20230006168-A (KR)
Title: Method of operating selector device, method of operating nonvolatile memory apparatus applying the same, electronic circuit device including selector device, and nonvolatile memory apparatus
Inventor: TAE JUNG HA
IPC: G11C13/00
Filed: 2021-07-02
Abstract: Disclosed are an operation method for a selection device, an operation method for a nonvolatile memory device applied with the same, an electronic circuit device including the selection device, and a nonvolatile memory device. The operation method for a selection device can easily control a threshold voltage of the selection device without change in a substance or composition of the selection device. The operation method for a selection device controls an approach of a signal to a memory element. The operation method for a selection device includes: a step of providing the selection device including a switching layer including an insulator and an additional metallic element and a first electrode and a second electrode arranged on both sides of the switching layer; and a step of applying a multi-stage voltage pulse including a threshold voltage control pulse and a follow-up operation voltage pulse to the switching layer through the first electrode and the second electrode. The operation voltage pulse has intensity of turning on the selection device, and the threshold voltage control pulse has the intensity lower than that of the operation voltage pulse. The step of applying the multi-stage voltage pulse is formed to control threshold voltage (Vth) of the selection device by applying the threshold voltage control pulse.
Patent KR-20210091074-A (KR)
Title: Traffic monitoring method, apparatus, device and storage medium
Inventor: WANG YUAN
IPC: G06Q50/30
Filed: 2021-07-02
Abstract: The present application discloses a traffic monitoring method, a device, equipment, and a storage medium. The present invention relates to autonomous driving, smart traffic, and big data fields. A specific implementation method is to obtain road condition information and/or vehicle condition information collected by a terminal, wherein the terminal is at least one of an unmanned vehicle and a drone. A traffic event is recognized by performing data analysis on the road condition information and/or the vehicle condition information. Through the above-described process, the monitoring efficiency of the traffic condition is improved.
Patent KR-20210100044-A (KR)
Title: Construction material, equipmemt, method
Inventor: CHUNG HA IK
IPC: F16B7/18
Filed: 2021-07-12
Abstract: The present invention relates to a) a material, equipment, a drone, a coupler, a reinforcing rod, and concrete using, having, generating, spraying, and containing a1) magnetization, vibration, excitation, an ozone, an anion, a magnetizer, a vibrator, an exciter, an ozonizer, an anionizer, a magnetized material, a vibrating material, an exciting material, an ozone material, and an anion material, and a2) complexing, a complex group, and a complex of two or more among the same; b) a material, equipment, a drone, a coupler, a reinforcing rod, and concrete, which are magnetized, vibrated, excited, cleaned, purified, sterilized, disinfected, and the like by the magnetization, compounds, or the like; and c) a construction, a concrete construction, a reinforced construction, a construction methods, and the like using the material, the equipment, the drone, the coupler, the reinforcing rod, and the concrete.
Patent KR-20230014264-A (KR)
Title: Artificial intelligence model transformation method, artificial intelligence model transformation apparatus, artificial intelligence model driving method and artificial intelligence model driving apparatus
Inventor: KIM SUNG MIN
IPC: G06N20/00
Filed: 2021-07-21
Abstract: According to one embodiment of the present invention, provided is an artificial intelligence model transformation method for converting an artificial intelligence model with an architecture and parameters into an artificial intelligence model optimized for a driving device of the artificial intelligence model, wherein the artificial intelligence model transformation method comprises: an artificial intelligence model analysis step of loading the architecture and parameters of the artificial intelligence model on a memory and interpreting the loaded artificial intelligence model; a model optimization step of performing optimization independent of the driving device for the interpreted artificial intelligence model; a device optimization step of performing optimization dependent on the driving device for the interpreted artificial intelligence model; and a device format conversion step of converting the artificial intelligence model with the optimization independent of the driving device and the optimization dependent on the driving device performed into a format that can be interpreted by the driving device. Accordingly, an artificial intelligence system operates in a limited hardware environment by simplifying the artificial intelligence model to fit a low-power target and optimizing an operation definition to match a computational performance.
Patent KR-20220011596-A (KR)
Title: Monofilament for cutting vegetation
Inventor: BELJEAN YANN
IPC: A01D34/416
Filed: 2021-07-21
Abstract: The present invention relates to a monofilament for cutting vegetation, comprising: a matrix (1) made of a first polyamide material; and at least two channels (2, 2a-2d) separately embedded in the matrix (1) and made of a polyolefin material or a second polyamide material different from the first polyamide material. The monofilament for cutting vegetation of the present invention has an improved structure which can optimize various properties of the monofilament.
Patent KR-20230014964-A (KR)
Inventor: KWON HYESHIN
IPC: C07D473/34
Filed: 2021-07-22
Abstract: The present application relates to a novel quinazolinone derivative. In addition, the present application relates to a pharmaceutical composition comprising the novel quinazolinone derivative for treating metabolic diseases. According to the present application, a compound represented by chemical formula 1 or a pharmaceutically acceptable salt thereof is provided.
Patent KR-20230015160-A (KR)
Inventor: OH YUNG TAK
IPC: B01D24/22
Filed: 2021-07-22
Abstract: The present invention relates to a non-point pollutant filtering device for a pavement, which is installed in a side ditch and the like on a road side to purify rainwater to get sewage treatment and collect garbage such as cigarette butts without being emitted through a collection well, and a construction method thereof. The non-point pollutant filtering device for a pavement comprises: a body unit which has a rectangular box shape, having an open upper part to form an accommodation space therein, and is installed to be connected to a perforated drainpipe laid in a pavement and the collection well laid in a forward and backward gap between the pavement and a sidewalk; a filtering unit which is a rectangular water-permeable bag filled with filter media therein so that at least one filtering unit is put into the accommodation space of the body unit; and a cover unit which has a rectangular box shape, having an open upper part to form an accommodation space therein, is inserted into the accommodation space of the body unit to cover the filtering unit, forms a plurality of first inflow holes, into which rainwater is introduced from the perforated drainpipe, on a forward and backward rear surface of the cover unit, forms a plurality of first outlet holes on a bottom of the cover unit to allow the rainwater introduced from the first inlet holes to be emitted to the filtering unit, and is provided with a first partition plate partitioning the accommodation space in a widthwise direction so that a first accommodation space on one side of the widthwise direction is filled with biopolymer concrete to form a paved layer having a porous drainage hole, and a second accommodation space on another side of the widthwise direction accommodates garbage including cigarette butts.
Patent KR-20230015214-A (KR)
Title: Apparatus and method for generating data-driven documents
Inventor: KIM CHOONG HAN
IPC: G06N20/00
Filed: 2021-07-22
Abstract: The present invention provides an apparatus and a method for generating a data-based document, which can generate documents with high accuracy by performing document generation in stages. According to the present invention, the method for generating a data-based document comprises: a data-based data generation step in which a sentence generation data module stores input data consisting of at least one pair; a preprocessing step in which a preprocessing module performs preprocessing of masking a token other than a portion overlapped with the input data in document data by receiving the input data from the sentence generation data module; a document data generation step in which a table content generation module outputs only the portion overlapped with the input data in the document data and outputs the remainder as a mask; and an infilling task step in which an infilling task module replaces a mask token with a learned recommendation relevant word to add the learned recommendation relevant word to generate a final document.
Patent KR-20230015562-A (KR)
Title: Eco-friendly antibacterial mask that can be used semi-permanently and can be changed to transparent
Inventor: SUH MIN SEUNG
IPC: A41D13/11
Filed: 2021-07-23
Abstract: The present invention relates to an eco-friendly antibacterial mask which can be used semi-permanently and can be converted to transparency. The mask of the present invention may be worn by a wearer by easily changing whether the mask is transparent or not according to circumstances and needs through the configuration of an inner main unit, a coupling unit, and an outer cover unit. In addition, the mask improves language recognition ability, facilitates smooth communication with others, and satisfies the various needs of people who do not want to show the shape of their mouth and nose or may feel awkward. According to the present invention, contaminants can be easily removed by using a transparent material on the inner main unit and the outer cover unit is made of a highly elastic functional fabric material to be used continuously through washing such that the environmental pollution of used disposable masks can be reduced. Accordingly, user convenience is increased, environmental problems are reduced, and the various patterns and fashions of consumers can be changed through an outer cover while the face of the wearer is shown through a transparent space. Therefore, both conflicting elements can be satisfied.
Patent KR-20230019604-A (KR)
Inventor: CHOUNG YEN HO
IPC: G01B11/24
Filed: 2021-08-02
Abstract: The disclosed device for measuring the bending of a secondary battery separator comprises: a separator stage made of transparent polycarbonate, and having a flat settlement surface on an upper side so that separator samples to be measured can be attached; beam emission units arranged on an upper outer side of the settlement surface, and arranged to be apart in a longitudinal direction of the separator samples settled on the settlement surface, and vertically irradiating a beam toward the settlement surface; a beam reception unit paired with each beam emission unit, and storing the beam of each beam emission unit paired, which is reflected from the separator samples, and generating data information; a guider having the beam emission units and the beam reception units installed, and moving the beam emission units and the beam reception units in the widthwise direction of the separator samples, and allowing the beam reception units to generate data information; and a bending measuring means measuring the bending degree of the separator samples based on the data information outputted from the beam reception units, and outputting the bending information. Therefore, the separator inspection reliability can be improved.
Patent KR-20230020853-A (KR)
Title: Object detection method and electronic device performing the method
Inventor: SONG HO HYON
IPC: G06T7/11
Filed: 2021-08-04
Abstract: According to an example, to detect an object, a method includes: calculating a first distance to a first area and a second distance to a second area of a target object in a first image captured at a first time point; calculating a third distance to a first area and a fourth distance to a second area of a target object in a second image captured at a second time point; calculating a first difference between the first distance and the third distance; calculating a second difference between the second distance and the fourth distance; and determining whether the target object is a 3D object based on the first difference and the second difference.
Patent KR-20230023194-A (KR)
Inventor: JUNG HYEON SEONG
IPC: A41D13/11
Filed: 2021-08-10
Abstract: The present invention relates to a portable mask storing box capable of solving a problem of having a big volume by storing a mask due to the mask storing box; and a problem of being not folded and being not easy to carry by being formed in a plastic form. That is, the present invention relates to a sanitary mask storing body comprising: a mask storing box which is formed in a half-wallet shape having an antibacterial film (102) to store the mask; and the antibacterial film which is formed in a form of a dehumidifying agent to sterilize the mask. Therefore, since the present invention stores the mask by the mask storing box and solves the problems of having a big volume, being not folded, and being not easy to carry by being formed in the plastic form, the conventional problems of having a big volume, being not folded, and being not easy to carry by being formed in the plastic form can be solved.
Patent KR-20230023258-A (KR)
Inventor: JOO BO HOON
IPC: G06T7/00
Filed: 2021-08-10
Abstract: The present invention relates to a system for providing orthodontic treatment evaluation information based on a patient's tooth alignment, which is implemented by a computing device including one or more processors and one or more memories storing instructions executable by the processors, comprising: a target value acquisition unit which, when receiving first tooth scan data that is 3D scan data obtained by photographing a patient from a medical practitioner account, acquires a first tooth image that is a malocclusion image of the patient's teeth based on the received first tooth scan data, obtains treatment solution information based on the acquired first tooth image, and obtains a correction target value for correcting the patient's malocclusion based on the obtained treatment solution information; a second tooth image acquisition unit which, in a state where acquisition of the correction target value is completed, when receiving second tooth scan data that is new 3D scan data obtained by photographing the patient who has completed orthodontic treatment with a transparent correction device, obtains a second tooth image that is an image of a corrected tooth alignment based on the second tooth scan data; and an evaluation information provision unit which, when obtaining a correction achievement value for each corrected tooth based on the obtained second tooth image and obtaining error information by comparing the correction achievement value and the correction target value, creates orthodontic treatment evaluation information that is evaluation information for orthodontic treatment based on the obtained error information, and provides the same to the medical practitioner account. Therefore, whether orthodontic treatment has been corrected based on treatment solution information can be determined. In addition, various embodiments identified through the present document are possible.
Patent KR-20230023436-A (KR)
Title: Electronic device including antenna
Inventor: CHO YONGWON
IPC: H01Q1/24
Filed: 2021-08-10
Abstract: An electronic device according to various embodiments of the present disclosure includes: a housing; a battery disposed within the housing; and an antenna structure disposed within the housing and facing at least a portion of the battery. The antenna structure includes: a flexible printed circuit board; a first resin member disposed in a first region of the flexible printed circuit board; a buffer member disposed in a first region of the first resin member; a support plate disposed in a second region of the first resin member; and a second resin member disposed in a third region of the first resin member. The buffer member and the support plate are connected, and the second resin member is configured to be surrounded by the support plate. The damage can be prevented.
Patent KR-20230026225-A (KR)
Inventor: PARK JIHOON
IPC: H04R5/02
Filed: 2021-08-17
Abstract: 본 개시의 다양한 실시예에 따른 전자 장치는, 제1 하우징, 상기 제1 하우징에 대해 지정된 각도만큼 펼쳐지고, 폴딩 축을 중심으로 회동하도록 구성된 제2 하우징;  폴딩 축을 제공하며, 상기 제1 하우징과 상기 제2 하우징 사이에 배치되어 상기 제1 하우징과 상기 제2 하우징을 회동 가능하게 결합시키는 적어도 하나의 힌지 구조, 상기 힌지 구조를 내측으로 수용하고, 상기 제2 하우징이 회동함에 따라 선택적으로 노출되는 힌지 커버, 상기 제1 하우징에 수용된 제1 스피커 모듈, 및 상기 제2 하우징에 수용된 제2 스피커 모듈을 포함하고, 상기 제1 상태에서 상기 제1 스피커 모듈은, 상기 제1 하우징 내부에 형성된 제1 영역, 상기 힌지 구조 내부에 형성되고, 상기 제1 영역과 접하는 제2 영역, 및 상기 힌지 커버를 관통하게 형성되고, 상기 제1 상태에서 외부로 노출되고, 상기 제2 하우징의 회동에 따라 선택적으로 폐쇄되는 제1 관통홀을 통해 음향을 상기 전자 장치의 외부로 배출하는 전자 장치.
Patent KR-20230028626-A (KR)
Title: 양자 컴퓨터상 이진 필드 몽고메리 곱셈 장치 및 곱셈 방법
Inventor: JANG KYOUNGBAE
IPC: B82Y10/00
Filed: 2021-08-19
Abstract: 본 발명은 양자 컴퓨터상 이진 필드 몽고메리 곱셈 장치 및 곱셈 방법에 관한 것이다. 
본 발명에서는 i=0 부터 n-2까지 C i+1  = Toffoli(c 0 , n i+1 , c i+1 )를 반복 수행하여 (c n-1 , c n , c n-1 , ..., c 1 , c 0 ) 큐비트로 구성되는 C를 업데이트하는 Modulus 곱셈기를 포함하는 양자 컴퓨터상 이진 필드 몽고메리 곱셈 장치 및 곱셈 방법이 개시된다.  
본 발명에서는 우측으로 회전시키는 연산을 고려함으로써 일부 모듈러스 곱셈을 생략할 수 있었으며, 특히 최상위 큐비트에 이전 최하위 큐비트 값을 입력하여 모듈러스 곱셈을 단순화시킨 이점이 있다.
Patent KR-20230033239-A (KR)
Inventor: KIM JOO YEON
IPC: G06N3/04
Filed: 2021-08-31
Abstract: 본 발명의 일 실시예에 따른 사용자와 수거자 간에 수거 관리 앱을 통하여 수거 관리 서비스를 제공하는 관리서버를 포함하며, 상기 수거 관리 서비스는 사용자가 생활 폐기물을 지정된 장소에 배출시, 상기 수거 관리 앱을 통한 수거 예약, 수거 대행할 수거자 지정, 수거자의 수거 후 수거 완료, 보상 및 결제에 대한 서비스를 포함하며, 상기 관리서버는 수거 후 촬영되는 생활 폐기물에 대한 수거 이미지가 업로드되면, 해당 수거 이미지에 대한 미리 학습된 이미지를 토대로 이미지 비교에 의해 배출 기준에 부합하는지 여부를 판단하고, 배출 기준에 부합하는 경우, 해당 생활 폐기물을 배출한 사용자가 소지한 사용자 단말기에 보상을 제공하는 것을 특징으로 한다.
Patent KR-20210120931-A (KR)
Inventor: KWON CHIL JUN
IPC: B29C39/42
Filed: 2021-09-03
Abstract: The present invention relates to a go stone barrel made by mixing crystal resin (epoxy) with various dyes (wood, sawdust, flowers, beans, paper, cloth), etc. to make a mold transparent or translucent to make the go stone barrel. The present invention is designed to make people who are new to Go get interested in a game and also to make people who like Go get interested in Go.
Patent KR-20230035793-A (KR)
Inventor: SANGJO YOO
IPC: G06F30/13
Filed: 2021-09-06
Abstract: 실내 재난환경에서 건물 기본구조요소 별 기계학습 모델을 이용한 재난확산 영역의 앙상블 예측 방법 및 장치가 제시된다. 본 발명에서 제안하는 실내 재난환경에서 건물 기본구조요소 별 기계학습 모델을 이용한 재난확산 영역의 앙상블 예측 방법은 건물의 구조 및 구성에 따른 건물 기본구조요소를 구분하는 단계, 실내 재난 상황을 검출하고 모니터링 하기 위해 건물 내에 설치되는 센서 노드를 통해 수집된 재난 데이터를 이용하여 상기 구분된 건물 기본구조요소 별 재난확산 회귀모델을 통한 기계학습을 수행하는 단계, 재난 발생 시 재난확산 예측영역의 정확도를 높이기 위해 재난 발생의 발화점을 기준으로 복수의 공간적 섹터(sector)를 구분하고, 상기 구분된 각 공간적 섹터 별 센서 노드의 재난검출 결과를 이용하여 재난영역 및 재난영역 평균반경을 정의하는 단계 및 건물 기본구조요소 별 재난확산 회귀모델을 통한 기계학습 결과 및 앙상블 모델 추정기법을 이용하여 재난확산 예측영역 및 재난확산 예측영역 평균반경을 추정하는 단계를 포함한다.
Patent KR-20230036878-A (KR)
Title: 수전 연결구 고정 방법 및 분리 방법
Inventor: YOO SAE ROM
IPC: E03C1/042
Filed: 2021-09-08
Abstract: 본 발명은 수전 연결구 고정 방법 및 분리 방법을 제공한다.  본 발명의 실시예에 의한 수전 연결구 고정 방법의 일 양태는, 내부 공간이 정의되는 케이스, 상기 내부 공간을 차폐하기 위하여 상기 케이스에 결합되는 이너 커버, 및 상기 이너 커버의 외측에 위치되도록 상기 케이스에 결합되는 아웃터 커버를 포함하는 수전함; 바디부, 상기 바디부의 외주면에서 연장되는 플랜지부를 포함하는 수전 연결구; 및 상기 수전 연결구를 상기 이너 커버에 고정시키는 체결구; 를 포함하는 수전 장치에서 상기 수전 연결구가 상기 이너 커버에 고정되는 수전 연결구 고정 방법으로서: 상기 바디부의 일부 및 상기 플랜지부가, 상기 이너 커버에 형성되는 관통 개구를 관통하는 관통 단계; 상기 플랜지부에 형성되는 관통공이, 상기 이너 커버에 형성되는 체결공과 연통되는 위치로 정렬되는 정렬 단계; 및 상기 체결구가, 상기 수전 연결구를 상기 이너 커버에 고정시키기 위하여 상기 관통공을 관통하여 상기 체결공에 체결되는 체결 단계; 를 포함한다.
Patent KR-20220160453-A (KR)
Inventor: PARK JUN YOUNG
IPC: H03K17/693
Filed: 2021-09-09
Abstract: A transmitter circuit comprises: a clock generator configured to generate a plurality of clock signals having phases different from each other based on the reference clock signal; and a plurality of selection circuits each configured to receive one of a plurality of parallel signals and to drive an output node based on the received parallel signal in response to the plurality of clock signals. Each of the plurality of selection circuits comprises: a data multiplexer configured to generate a plurality of data selection signals based on a logical operation between the received parallel signal and the plurality of clock signals; a control signal generating unit configured to generate first and second control signals based on a logical operation between the plurality of data selection signals; and an output driver configured to precharge the output node based on the first control signal or discharge the output node based on the second control signal. According to an exemplary embodiment of the present disclosure, a selection circuit that performs a low-power serialization operation using partially toggled data selection signals, an operation method of the selection circuit, and a transmitter circuit including the selection circuit may be provided.
Patent KR-20230037984-A (KR)
Title: 건조기 및 그 동작 방법
Inventor: SONG HYUNG SEON
IPC: D06F34/05
Filed: 2021-09-10
Abstract: 하나 이상의 센서들을 이용하여 건조기에 투입되는 제1 세탁물을 감지하는 단계; 제1 세탁물이 건조기에 투입되기 전에 세탁기에 투입되었던 제2 세탁물의 세탁 과정에 관련된 데이터를 획득하는 단계; 제2 세탁물의 세탁 과정에 관련된 데이터에 기초하여, 제1 세탁물이 제2 세탁물에 대응되는지 여부를 결정하는 단계; 제1 세탁물이 제2 세탁물에 대응되는 경우, 세탁 전의 제2 세탁물의 무게를 제1 타겟 건조 무게로 결정하는 단계; 및 건조기에 설정된 건조 시간 및 제1 세탁물의 무게가 제1 타겟 건조 무게에 도달하는지 여부 중 적어도 하나에 기초하여, 제1 세탁물의 건조 상태에 관한 정보를 출력하는 단계를 포함하는, 건조기의 동작 방법 및 상기 방법을 수행하는 건조기가 제공된다.
Patent KR-20220088293-A (KR)
Title: 섬유강화 열경화성 플라스틱 복합재 및 그의 제조방법
Inventor: SEO HA JEONG
IPC: C08J5/04
Filed: 2021-09-15
Abstract: 본 발명은 섬유강화 열경화성 플라스틱 복합재 및 그의 제조방법에 관한 것으로, 더욱 상세하게는 보강섬유와, 상기 보강섬유 사이를 연결 및 고정시키는 저수축제를 포함하는 보강매트; 및 상기 보강매트의 적어도 일면 및 상기 보강매트에 형성된 기공 중 1종 이상의 영역에 형성되어 있으며, 열경화성 수지를 포함하는 열경화성 수지층을 구비하는 섬유강화 열경화성 플라스틱 복합재 및 그의 제조방법에 관한 것이다.
Patent KR-20230043308-A (KR)
Title: 감국 추출물을 포함하는 대사증후군의 예방, 개선 또는 치료용 조성물
Inventor: CHOI BEOM RAK
IPC: A61K31/216
Filed: 2021-09-23
Abstract: 본 발명은 천연 추출물로서 감국 추출물을 유효성분으로 포함하는, 비만, 당뇨, 고지혈증 및 지방간과 같은 대사증후군의 예방, 개선 또는 치료용 조성물에 관한 것이다.
Patent KR-20230046547-A (KR)
Inventor: LEE SANG SUB
IPC: C09K19/54
Filed: 2021-09-30
Abstract: 본 발명은 액정 조성물, 이를 포함하는 고분자 분산형 액정 조성물 및 광고 시스템에 관한 것으로, 본 발명에 따른 액정 조성물은 사이클로 헥실 구조를 갖는 액정 화합물을 특정 비율로 포함하여 이를 고분자 분산형 액정 조성물 및 광고 시스템에 적용시 낮은 복굴절률을 나타냄과 동시에 전압이 인가되지 않았을 때(off state) 투과율과 측면 투과율을 현저하게 향상시킬 수 있다.
Patent KR-20230046667-A (KR)
Inventor: JANG CHI YOUNG
IPC: B25J5/00
Filed: 2021-09-30
Abstract: 본 발명은 배관 주행 장치용 케이블 가이드에 관한 것이다. 본 발명의 일 실시예에 따른 배관 주행 장치용 케이블 가이드는, 배관의 내부를 주행하는 배관 주행 장치에 연결된 케이블의 길이 방향을 따라 미리 정해진 간격으로 배치되는 복수의 가이드 몸체; 및 복수의 가이드 몸체 각각의 외측면에 구비되며, 전체 또는 일부가 배관의 내부면에 접촉한 상태로 배관의 내부면을 따라 주행하는 복수의 가이드 휠을 포함하는 것을 특징으로 한다. 
본 발명의 일 실시예에 따른 배관 주행 장치용 케이블 가이드에 따르면, 배관 주행 장치에 연결된 케이블의 길이 방향을 따라 배치된 복수의 가이드 몸체 각각의 외측면에 복수의 가이드 휠을 구비함으로써, 보다 간단한 구조로 배관의 내부를 주행하는 배관 주행 장치의 케이블이 배관의 내부면과 접촉할 때에 발생하는 마찰력을 최소화하여 케이블의 꼬임을 방지하고 케이블의 이동을 안정적으로 안내할 수 있으므로 배관 주행 장치의 주행을 보다 정확하고 안정적으로 구현할 수 있다.
Patent KR-20220047516-A (KR)
Inventor: SAKURAI HIROKI
IPC: G03F7/42
Filed: 2021-10-05
Abstract: Provided is a technique capable of suppressing contamination of a substrate in liquid processing. According to an aspect of the present invention, a substrate processing method includes a processing liquid discharging process and a mixed fluid discharging process. In the processing liquid discharging process, processing liquid produced by mixing sulfuric acid and a hydrogen peroxide solution is discharged to a substrate. In the mixed fluid discharging process, the processing liquid, produced by mixing the processing liquid and pure water in a vapor or mist form, is discharged to the substrate to which the processing liquid is discharged.