Patent SG-11201805135U-A (SG)
Title: Anticontamination membrane
Inventor: HO WEE SIANG
IPC: C23C14/34
Filed: 2017-12-28
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 1#11101111 0 11101 HOE 3E1 0 I 010 111011 01111101111110 1111 OEN Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\" WO 2018/106196 Al 14 June 2018 (14.06.2018) W I PO I PCT (51) International Patent Classification: Road, HuKou Shiang, Hsinchu County 303, Tainan, 70968 C23C 14/34 (2006.01) C23C 14/56 (2006.01) (TW). C23C 14/54 (2006.01) (74) Agent: SYNERGY IP PTE. LTD.; 150 Cecil Street (21) International Application Number: #07-02, Singapore 069543 (SG). PCT/SG2017/050652 (81) Designated States (unless otherwise indicated, for every (22) International Filing Date: kind of national protection available): AE, AG, AL, AM, 28 December 2017 (28.12.2017) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (25) Filing Language: English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (26) Publication Language: English HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, (30) Priority Data: KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 10201700127P 06 January 2017 (06.01.2017) SG MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (71) Applicants: SEIWA TECHNOLOGIES ASIA PTE. SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, LTD. [SG/SG]; WOODLANDS SPECTRUM 1, 2 WOOD- TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. LANDS SECTOR 1, #03-17, Singapore 738068 (SG). HTC (84) Designated States (unless otherwise indicated, for every & SOLAR TECH SERVICE LIMITED [CN/CN]; No. kind of regional protection available): ARIPO (BW, GH, 56, Guangfu South Road Hukou Township Hsinchu County GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, 303, Tainan, 70968 (TW). UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, (72) Inventors: HO, Wee Siang; 2 WOODLANDS SPEC- TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, = TRUM 1, WOODLANDS SECTOR 1, #03-17, Singapore EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, 738068 (SG). HO, Keng-Wei; No. 55 GuangFu South MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, = (54) Title: ANTICONTAMINATION MEMBRANE = = = 100 = = 112 110 = 108 = ....... .. ... 114 = -- -- --1111• 116 = = = = = ME MENNII 111111 -.411111?7, , 111111-111111k ,.i p ik 118 120 106 = 104 ,,,,, 112 I 114 102 106 11 CZ Fig. 1 CZ --.... 1-1 (57) : An anticontamination membrane for application in a machine for prolonging the operational life of the machine which N comprises a substrate and a target material deposited thereon. The substrate can be produced by sputtering, electrolysis, evaporating and laser. C [Continued on next page] WO 2018/106196 Al MIDEDIM011010EIREEM0M0101101IIM11111111111111111110111111111111 TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — as to the identity of the inventor (Rule 4. 1 7(i) — of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3)) — upon request of the applicant, before the expiration time limit referred to in Article 21(2)(a) of the