Patent SG-11201900281X-A (SG)
Title: Laser ablative dielectric material
Inventor: MATOS-PEREZ CRISTINA R
IPC: H01L21/768
Filed: 2017-07-14
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property MD HIM 01E101011M 3E1 0 01111110111 MEI MIMI HOED Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\"\"1 WO 2018/013976 Al 18 January 2018 (18.01.2018) W I PO I PCT (51) International Patent Classification: (74) Agent: BORNMAN, Tracy L.; Hovey Williams LLP, H01L 21/02 (2006.01) HO1L 21/324 (2006.01) 10801 Mastin Blvd, Suite 1000, 84 Corporate Woods, Over- H01L 21/768 (2006.01) land Park, Kansas 66210 (US). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/US2017/042225 kind of national protection available): AE, AG, AL, AM, (22) International Filing Date: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, 14 July 2017 (14.07.2017) CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (25) Filing Language: English HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, (26) Publication Language: English KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (30) Priority Data: OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, 62/362,674 15 July 2016 (15.07.2016) US SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, 62/404,803 06 October 2016 (06.10.2016) US TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: BREWER SCIENCE INC. [US/US]; 2401 (84) Designated States (unless otherwise indicated, for every Brewer Drive, Rolla, Missouri 65401 (US). kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, (72) Inventors: MATOS-PEREZ, Cristina R.; 309 Dana Re UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, nee Dr., Rolla, Missouri 65401 (US). FLAIM, Tony D.; TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, — 16710 Missouri Highway 68, St. James, Missouri 65559 EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, (US). SOUTHARD, Arthur 0.; 18352 Manes Road 438, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, = St. James, Missouri 65559 (US). KIRCHNER, Lisa M.; TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, 1545 Timber Creek Rd. #2, Rolla, Missouri 65401 (US). KM, ML, MR, NE, SN, TD, TG). = BLUMENSHINE, Deborah; 13 Trevor Lane, St. James, Missouri 65559 (US). — (54) Title: LASER ABLATIVE DIELECTRIC MATERIAL I -12a (57) : Dielectric materials with optimal mechanical properties for use in laser ablation patterning are proposed. These materials include a polymer selected from the 12 = = = _ 10a (A) 12b group consisting of polyureas, polyurethane, and polyacylhydrazones. New methods to prepare suitable polyacylhydrazones are also provided. Those methods involve mild = X10 conditions and result in a soluble polymer that is stable at room temperature and can = be incorporated into formulations that can be coated onto microelectronic substrates. 12a The dielectric materials exhibit high elongation, low CTE, low cure temperature, and 10a 2 14 leave little to no debris post-ablation. = — (B) 2b = 1 10 = = 4----16 ,12a = 12 10a 14 12b — = (C) o 24 22 16 12a — 2 11 iOa 14 (D) 12b o IN 24 C:r M 12 11 10a\" 1 4 0 (E) 12b --.... o 1-1 FIG. 1 0 ei C [Continued on next page] WO 2018/013976 Al MIDEDIMOHNOBEIERIMMINICIHMOVON Published: — with international search report (Art. 21(3))