Patent SG-11201901045U-A (SG)
Title: Optical measurement of bump height
Inventor: SOETARMAN RONNY
IPC: G06T7/60
Filed: 2017-08-08
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) CORRECTED VERSION ---_. (19) World Intellectual Property 11111111111111011010101111101101011111111111011001111111111110111101111 Organization International Bureau (10) International Publication Number l i (43) International Publication Date ...../ WO 2018/031574 A9 15 February 2018 (15.02.2018) W 1 PO I P CT (51) International Patent Classification: (72) Inventors: SOETARMAN, Ronny; 48353 Avalon GO1B 11/02 (2006.01) GO6T 1/00 (2006.01) Heights Terrace, Fremont, CA 94539 (US). XU, James, GO1B 9/04 (2006.01) G06T 7/60 (2006.01) Jianguo; 1029 Olmo Court, San Jose, CA 95129 (US). G01B 11/24 (2006.01) (74) Agent: MCANDREWS, Kevin et al.; Kla-Tencor Corpo- (21) International Application Number: ration, Legal Department, One Technology Drive, Milpitas, PCT/US2017/045950 CA 95035 (US). (22) International Filing Date: (81) Designated States (unless otherwise indicated, for every 08 August 2017 (08.08.2017) kind of national protection available): AE, AG, AL, AM, (25) Filing Language: English AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (26) Publication Language: English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, (30) Priority Data: HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, 15/233,812 10 August 2016 (10.08.2016) US KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 15/338,838 31 October 2016 (31.10.2016) US MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, 15/346,607 08 November 2016 (08.11.2016) US OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, 15/346,594 08 November 2016 (08.11.2016) US SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: KLA-TENCOR CORPORATION [US/US]; (84) Designated States (unless otherwise indicated, for every Legal Department, One Technology Drive, Milpitas, CA kind of regional protection available): ARIPO (BW, GH, 95035 (US). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, = (54) Title: OPTICAL I 7 7' ON III C:r . .4 7r IN ir) Il en 0 SEMI-AUTOMATED ---.... ,-1 © N IIIIIIIIIIIIIIIIIIIIIIIIM 5 METROLOGY zero 7 2Ar XTAGE ara i rlat rnin0111 , \" OFF COMPUTER 4 3-D FIG. MEASUREMENT SEMI-AUTOMATED 1 I . 1 wsraunnENrs METROLOGY SYSTEM SYSTEM SI OF 3-D BUMP HEIGHT (57) : A method of generating 3D information including: varying the distance between the sample and an objective lens of the optical microscope at pre-determined steps; capturing an image at each pre-determined step; de- termining a characteristic value of each pixel in each captured image; deter- mining, for each captured image, the greatest characteristic value across a first portion of pixels in the captured image; comparing the greatest characteristic value for each captured image to determine if a surface of the sample is present at each pre-determined step; determining a first captured image that is focused on an apex of a bump of the sample; determining a second captured image that is focused on a first surface of the sample based on the characteristic value of each pixel in each captured image; and determining a first distance between the apex of the bump and the first surface. C [Continued on next page] WO 2018/031574 A9 IMEDIM0110101011M0H100111111111111111111101111111111111101110# EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3)) (48) Date of publication of this corrected version: 05 April 2018 (05.04.2018) (15) Information about Correction: see Notice of 05 April 2018 (05.04.2018)