Patent SG-11201909631R-A (SG)
Title: Pulsed, bidirectional radio frequency source/load
Inventor: RADOMSKI AARON T
IPC: H01J37/32
Filed: 2018-05-10
Abstract: MasterRF Generator L St, Pulse Synch Digital Comm RF ut ky-38 -113 Auxiliary RF Generator In • • Digital Comm 1 . _/ -46 • Pulse Synch In Auxiliary Vsense J -62 \ i^60 Auxiliary Match Netwo Master Match Netwo J -64 Master Vsense UV. Sense ain Sense - .pang Network GC O O N 00 O N O (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 15 November 2018 (15.11.2018) iiiionolioloionlion 010110110M IMO 011 (10) International Publication Number WO 2018/209085 Al WIPO I PCT (51) International Patent Classification: HOLI 37/32 (2006.01) (21) International Application Number: PCT/US2018/032067 (22) International Filing Date: 10 May 2018 (10.05.2018) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/504,197 10 May 2017 (10.05.2017) US 15/974,947 09 May 2018 (09.05.2018) US (71) Applicant: MKS INSTRUMENTS, INC. [US/US]; 2 Tech Drive, Suite 201, Andover, Massachusetts 01810 (US). (72) Inventors: RADOMSKI, Aaron T.; 6275 Marrowback Road, Conesus, New York 14435 (US). LUU, Ky; 544 Yale Court, Victor, New York 14564 (US). FISK, II, Larry J.; 17 Mill Road, Fairport, New York 14450 (US). REIN- HARDT, Ross; 63 Woodmont Rd., Rochester, New York 14620 (US). HARRINGTON, Matthew G.; 94 Westmin- ster Road, Rochester, New York 14607 (US). RUGHOO- NUNDON, Amish; 136 Oakshire Way, Pittsford, New York 14534-2567 (US). KLEIN, Jesse N.; 156 Covered Wagon Trail, West Henrietta, New York 14586 (US). BUR- RY, Aaron M.; 687 Clevenger Road, Ontario, New York 14519 (US). (74) Agent: LAFATA, Joseph M. et al.; HARNESS, DICKEY & PIERCE, P.L.C., P.O. Box 828, Bloomfield Hills, Michi- gan, Michigan 48303 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (54) Title: PULSED, BIDIRECTIONAL RADIO FREQUENCY SOURCE/LOAD (57) : A radio frequency power system includes a master RF generator and an auxiliary RF generator, wherein each generator outputs a respective RF signal. The master RF generator also outputs a RF control signal to the auxiliary RF generator, and the RF signal output by the auxiliary RF generator varies in accordance with the RF control signal. The auxiliary RF generator receives sense signals indicative of an electrical characteristic of the respective RF signals output by the master RF generator and the auxiliary RF generator. The auxiliary RF generator determines a phase difference between the RF signals. The sensed electrical characteristics and the phase are used independently or cooperatively to control the phase and amplitude of the RF signal output by the auxiliary RF generator. The auxiliary generator includes an inductive clamp circuit that returns energy reflected energy back from a coupling network to a variable resistive load. [Continued on next page] WO 2018/209085 Al MIDEDIMOMMIDIIMERIHNONIMOIRMODEVOIMIE AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: with international search report (Art. 21(3)) before the expiration of the time limit for amending the claims and to be republished in the event of receipt of amendments (Rule 48.2(h))