baber/WOPTO huggingface dataset:
Patent KR-20000069316-A (KR)
Title: 연쇄상구균성 독소 ａ의 돌연변이체 및 사용 방법
IPC: A61K39/09
Filed: 1997-12-05
Abstract: 본 발명은 돌연변이 SPE-A 독소 또는 이의 단편, 백신 및 약제학적 조성물과, 백신 및 약제학적 조성물의 사용 방법에 관한 것이다.  바람직한 SPE-A 독소는 야생형 SPE-A 독소에 비하여 하나 이상의 아미노산 변화를 가지며, 실질적으로 비치사성이다.  돌연변이 SPE-A 독소는 야생형 SPE-A 독소의 생물학적 활성에 대하여 동물을 보호하는데 유용한 백신 조성물을 형성할 수 있다.
Patent KR-20000062309-A (KR)
Title: 평면장치 및 그의 제조 방법
IPC: G02F1/13
Filed: 1997-12-22
Abstract: 본 발명은 평면장치, 특히 음극선관("CRT") 형태의 평면표시장치와 같은 평면장치를 제조하는 방법에 관한 것으로서, 평면장치는 한 쌍의 플레이트 구조체(40, 42)가 컴파트먼트를 형성하기 위해 외벽의 대향하는 모서리(44A, 44B)에 내부 표면(40A, 42B)을 따라 밀봉되는 공정에 의해 제조되고, 이어서 컴파트먼트의 굽힘 내성을 현저하게 증가시키기 위해 외부 지지 구조체(64)가 한 플레이트 구조체(40)의 외부 표면에 부착되고, 마찬가지로 외부 지지 구조체(66)도 밀봉 처리 후에 다른 플레이트 구조체(42)의 외부 표면에 부착되고, 다음에 이 컴파트먼트는 통상 적당한 배출 포트(46)를 통해 고진공으로 펌프다운되어 폐쇄되며, 제조 공정 중 비교적 말미 단계에서 외부 지지 구조체를 제공함으로써, 밀봉 처리 이전에 외부 지지 구조체를 부착하는 경우에 발생하는 심각한 제조상의 어려움을 피하면서 외부 힘에 대해 장치를 지지하기 위해 스페이서를 사용해야 하는 필요성이 제거되거나 실질적으로 감소되는 것을 특징으로 한다.
Patent KR-20000070196-A (KR)
IPC: C09K3/14
Filed: 1998-01-14
Abstract: Porous ceramic particles can be fragmented by generating a gas inside the pores at a sufficient pressure to cause the particles to be fragmented. The preferred way of generating the pressure is by immersing the particles in a liquid that at ambient temperatures and pressures is a gas until the liquid is absorbed into the pores and thereafter rapidly changing the conditions such that the liquid becomes a gas resulting in explosive fragmentation of the ceramic particles.
Patent KR-20000070875-A (KR)
IPC: A41B11/14
Filed: 1998-02-02
Abstract: A knit garment (10) with a generally cylindrical shape has a closed end having two portions (34, 36) attached to each other. The two portions oppose each other. The garment also includes, one being affixed at a first site near the closed end of the garment and the other being affixed at a second site disposed near the closed end of the garment. The first handle (124) is disposed between the first and second lip portions (144, 146) and the second handle (126) is disposed between the second and first lip portions. The handle material may be the same as the garment material, or a wire or plastic cord. The two handles extend outwardly from the garment near an open end (116) thereof.
Patent KR-20010005510-A (KR)
IPC: A61K47/36
Filed: 1998-03-26
Abstract: Oral drug compositions or oral medicines wherein the unpleasant tastes inherent in drugs are masked, specifically, granules, powders and syrups decreased in unpleasant tastes by masking and each containing a basic drug tasting unpleasant and an anionic high-molecular substance such as carrageenan.
Patent KR-20010012086-A (KR)
Title: 중합 가능한 액정 화합물의 제조 방법
IPC: C07C69/92
Filed: 1998-04-17
Abstract: 본 발명은 하기 화학식 I의 액정 화합물 또는 화학식 I의 액정 화합물의 혼합물을 제조하는 방법에 관한 것이다: 
     P 1 - Y 1 - A 1 - O - M - O - A 2 - Y 2 - P 2 (I) 
     상기 식에서, P 1 및 P 2 는 수소, C 1 -C 4 알킬 또는 중합을 일으킬 수 있는 반응성 라디칼이고, Y 1 및 Y 2 는 단일 화학 결합, 산소, 황, -O-CO-, -CO-O-, -O-CO-O-, -CO-NR-, -NR-CO-, -O-CO-NR-, -NR-CO-O-, 또는 -NR-CO-NR-이며, R은 수소 또는 C 1 -C 4 알킬이고, A 1 및 A 2 는 에테르 작용기 중의 산소, 티오에테르 작용기 중의 황, 또는 비인접 이미노 또는 C 1 -C 4 알킬이미노 기에 의해 차단될 수 있는, 사슬 길이가 1 내지 30 탄소인 스페이서이며, M은 메소겐(mesogenic) 기이고, Y 31 및 Y 41 은 -OH 또는 -O - 이며, Y 32 및 Y 42 는 각기 이탈기이다. 또한, 본 발명은 화학식 I의 화합물을 함유하는 조성물과, 본 발명의 방법을 사용하여 얻을 수 있는 조성물에 관한 것이다.  더욱더, 본 발명은 화학식 I의 화합물을 함유하는 조성물 또는 본 발명의 방법을 사용하여 얻을 수 있는 조성물로 물품을 인쇄 및 코팅하는 방법 또는 이와 같이 인쇄 또는 코팅된 물품에 관한 것이다.  또한, 본 발명은 광학 부품 또는 액정 착색제를 제조함에 있어 상기 화합물 또는 조성물을 사용하는 방법, 뿐만 아니라 상기 화합물 또는 조성물을 함유하는 액정 착색제 및 수성 에멀션 또는 분산제, 그리고 상기 화합물 또는 조성물로부터 얻을 수 있는 안료에 관한 것이다.
Patent KR-20010012208-A (KR)
Inventor: CUCCHI PIETRO
IPC: B23B13/12
Filed: 1999-03-05
Abstract: A device for guiding a bar between a collet (15) of a magazine (11) and a mandrel (18) of a lathe (13) comprises a guiding insert (20, 120) which slides with a minimum of side clearance within a duct (16) constituting the mandrel drawrod (18). The insert (20, 120) has an axial passage (24) for the bar with at least one section (26) designed to be traversed by the bar with a minimum of side clearance. The insert (20, 120) is impelled by the collet (15) along the duct (16) towards the mandrel. Return means (28, 30, 31) are provided to control return of the insert (20, 120) to a starting position close to an inlet end of the duct upon re-extraction of the collet from the duct.
Patent KR-20010013067-A (KR)
Inventor: SCHEMEIT HANS JUERGEN
IPC: B22D41/52
Filed: 1998-05-20
Abstract: The invention relates to a submerged nozzle of a metallurgic vessel, said vessel being situated upstream of a continuous casting mould. Said submerged nozzle is configured as a single-piece unit and has a slit- shaped discharge opening in the mouth area, the length of said opening being several times longer than it is wide. The submerged nozzle (21) has a cylindrical form with a circular (R), oval (r or c) or bone-shaped (p or q) cross-section, and the slit-shaped discharge opening (22) is configured as a through slit (23) which extends in the base (28) and into the side wall (29) of the cylindrical part of the submerged nozzle (21). The invention also relates to a method for producing a submerged nozzle of this type.
Patent KR-20010073334-A (KR)
Title: A controller for controlling fuel supply of LPG automobile and the method of controlling the same
Inventor: LEE YOON HYUNG
IPC: F02D41/30
Filed: 2000-01-14
Abstract: PURPOSE: Controlling device and method for fuel of an LPG(Liquefied Petroleum Gas) vehicle are provided to precisely control amount of LPG according to oxygen state such as vehicle speed, supplied amount of oxygen, and discharged amount of hazardous gas. CONSTITUTION: A fuel supplying device is formed by a stepping motor power jack(601) for driving a stepping motor(600); a fuel supplying passage inlet(603) for inputting LPG; a fuel supplying passage outlet(605) for supplying a specific amount of fuel to a mixer; and a fuel adjusting piston(602) vertically moved by rotation of the stepping motor for adjusting inlet of fuel to a fuel passage(604). The fuel supplied through the fuel supplying passage inlet is controlled according to state of a vehicle for being inputted to the mixer. Herein, the fuel adjusting piston is vertically moved according to a driving signal of a driving driver in the stepping motor. Therefore, a controlled amount of fuel is passed through the fuel passage according to state of the vehicle. Moreover, the signals from a throttle location sensor and an oxygen sensor are digitized for being processed in a CPU(Central Process Unit). Therefore, the stepping motor is precisely controlled in response to the vehicle state and oxygen state.
Patent KR-20000018214-A (KR)
Inventor: GU JONG SUN
IPC: A22C25/17
Filed: 2000-01-21
Abstract: PURPOSE: A device is provided to peel a squid in large quantity and automatically. CONSTITUTION: A cutter(25) is supported under the proper pressure by the conveyor(5) of carrier unit(1) to peel the skin of squids alone. The prominence of a main roller prevents squids shaking and simultaneously push squids toward the cutter(25) at a uniform rate. The carrier unit(1) pressing by a tension spring under the uniform pressure comprises many roller and the unit's bottom has a roller which consists of a prominence in the direction of assembly and length. The cutter(25) is fixed on the horizontal line between the roller and conveyor, which connected to driving gear on the motor-shaft, automatically peeling squids transferred to them.
Patent KR-20010076986-A (KR)
Title: manufacture and working clothes for remove of Triboelectrification
Inventor: BYUN JONG GEUN
IPC: A41D13/00
Filed: 2000-01-29
Abstract: PURPOSE: Provided is a working uniform for removing anti-static charge which controls anti-static charge below 10 volt at initial time so that it prevents damages such as element destruction, fire or destruction by anti-static charge. CONSTITUTION: The working uniform for removing anti-static charge comprises the parts of: yarn in which polyester yarn and carbon conductive yarn are weaved in a certain ratio; conductive sewing thread in which long yarn and carbon is mixed in a certain ratio to join for making the weaved yarn formed in a regular form; a conductive sleeve(103) which is placed at the edge of both arms to minimize anti-static charge; working shoes(104) for preventing static electricity in which polyurethane and conductive polymer are mixed; a conductive connection magnet(301) which induces complete connection to a joined part between the working uniform part and the conductive sleeve; and a ground connection magnet which connects the conductive connection magnet to ground.
Patent KR-20000058017-A (KR)
Inventor: VEREL ANDREW
IPC: G10L19/00
Filed: 2000-02-11
Abstract: PURPOSE: A low-power system and method for playing compressed audio data is provided to minimize a stand-by time for turning on a system and receiving an audio output by storing a great amount of audio data in a portable audio player. CONSTITUTION: A a main non-volatile storage unit(104) has a disc controller(106). A user interface(116) has a display(118) and one button(120) or more. A switch(124) transmits a power from the a power device(122) and turns off the power when the power of a system is down. An audio output jack(130) transmits an analog audio data to a pair of headphone or other audio output devices. A jack(132) connects the system to a computer for downloading a compressed audio data to a hard disc(104). A portable audio player(10) has one inner bus(134) or more for interconnecting devices of the system.
Patent KR-20010086858-A (KR)
Title: Method to optimize P-channel MOS transistor for impeding boron penetration
Inventor: LEE JUN HA
IPC: H01L21/66
Filed: 2000-03-03
Abstract: PURPOSE: An optimizing method of a P-channel MOS(metal oxide semiconductor) transistor is to prevent boron of a gate electrode from being permeated into a channel region through a gate insulating film. CONSTITUTION: It determines a variation of a threshold voltage of a P-channel MOS transistor. If the variation of the threshold voltage is above a predetermined value, parameters related to boron permeation is analyzed through the first simulation. According to the analyzed result, a process optimizing condition for restraining the boron permeation is set. It determines whether phenomenon of boron permeation is happened by executing the second simulation applied with the process optimizing condition. As the result of the second simulation, if the phenomenon of boron permeation is not restrained, the first simulation is again executed. The parameter includes a dispersion coefficient of boron depending upon a grain size of material of a gate electrode, a dispersion coefficient of boron depending upon a thickness a gate insulating film, and a dispersion coefficient of boron depending upon a hydrogen concentration.
Patent KR-20010091183-A (KR)
Title: flux-mixed Al welding element and Fabrication of it and continuous welding method using it
Inventor: KIM HONG MOULE
IPC: B23K35/00
Filed: 2000-03-13
Abstract: PURPOSE: An aluminum welding wire being combined with flux is provided to enable continuous welding operations without applying additional flux on aluminum welding wires. CONSTITUTION: The aluminum welding wire is manufactured by (i) mixing Al-Si alloy powder having a particle size distribution 26 to 700 μm, 2.2 to 41.0 wt.% of a flux and 0.01 to 3.0 wt.% of LiF; (ii) after molding the mixture, degassing it in the temperature range 300 to 430deg.C; (iii) extruding it at ambient temperature or drawing it in the temperature range 150 to 430deg.C so as to fabricate into a wire with a diameter of 0.5 to 10mm or various shapes such as welding rings, plates and rods.
Patent KR-20010091184-A (KR)
Inventor: KIM CHANG EUI
IPC: H04N5/445
Filed: 2000-03-13
Abstract: PURPOSE: An apparatus for controlling reservation in a video recorder and a television is provided to perform easily a reservation operation of program recording and a retractation operation of the program reservation by using a speech recognition switch or a remote controller. CONSTITUTION: Channel number information of a corresponding broadcasting station and time information including year, date, and day of a starting point and an ending point of a corresponding program are transmitted together with the corresponding program by using a video signal or an audio signal or ancillary data or proprietary control data defined by ATSC(Advanced Television system Committee), DVB(digital Video Broadcasting), NTSC(National Television System Committee), PAL(Phase Alternation by Line), and SECAM(SEquential Couleur A Memorie) standards when a program guide process, a program notice process, and a program broadcasting process are performed in a television broadcasting, a radio broadcasting, a cable television broadcasting, and a program guide broadcasting. A device for receiving and controlling the transmitted signal is mounted in a main body of the television or a main body of a video recorder or a remote controller.
Patent KR-20010090267-A (KR)
Title: The Control system for head skin massage instruments
Inventor: KIM JONG CHEOL
IPC: A61H23/02
Filed: 2000-03-24
Abstract: PURPOSE: A control device of a scalp massage machine is provided to prevent falling-off of hair by making the hair root heathy through the scalp massage and to maintain the health of the scalp by promoting growing-out of hair. CONSTITUTION: The control device of the scalp massage machine includes a power portion(10), a motor strength and weakness controlling portion(20), a micom(M), a drive array(D) and oscillating motors(MT). The power portion(10) inputs the alternating current power and converts it into the direct current voltage and forms the regular direct current voltage, so a regulator is included therefor. The motor strength and weakness controlling portion(20) is composed of a variable residence and a regulator for outputting the direct current power variably. A program for controlling many motors is contained in the micom(M). The drive array(D) drives the oscillating motor(M) to the control output step of the micom(M). The oscillating motors(M) are connected to the output step of the drive array(D).
Patent KR-20010093393-A (KR)
Title: Polymer based cement superplasticizer
Inventor: KOO JAE PIL
IPC: C04B24/24
Filed: 2000-03-28
Abstract: PURPOSE: A fluidizing agent for concrete composition is provided to improve fluidity of concrete slurry in lower w/c ratio without causing slump loss. CONSTITUTION: The fluidizing agent for concrete(formula III) is prepared by blending 10-70wt.% of unsaturated carboxyl monomer(formula I) such as acrylic acid, anhydrous maleic acid monomer with 30-90wt.% of polyhydric alcohol/saccharide· polyalkylene glycol mono(meta) aryl ether monomer(formula II) such as polymetharyl ether added with glycerine·ethylene oxide, polyaryl ether monomer added with glucose ethylene oxides. In the formulae, X and Y are hydrogen, methyl, -COOM¬3, -COOH¬2 or cyclic anhydrides respectively, Z is hydrogen, methyl or CH2COOM¬3, M¬2 represents one among hydrogen, alkali metal, ammonium or organic amines, R1 and R2 are hydrogen or methyl respectively, R3 is alkylene group having a carbon number of 2 to 4, A is alcohol or saccharide having a carbon number of 3 to 6, m is an integer of 1 to 100, n is an integer of 0 or 1, k is an integer of 1 to 6, a and b are an integer of 1 to 20 respectively.
Patent KR-20010093542-A (KR)
Title: Refrigerator for car
Inventor: HWANG U MAN
IPC: B60H1/00
Filed: 2000-03-29
Abstract: PURPOSE: A vehicle refrigerator is provided to operate refrigerator in a normal manner without installing an additional heat exchanger to the refrigerator by feeding condensate water and cooling air generated from a vehicle heat exchanger to the vehicle refrigerator and allowing the condensate water and cooling air to circulated through the circulation coil installed to the vehicle refrigerator. CONSTITUTION: A vehicle refrigerator(1) has a circulation coil(3) for circulation of refrigerant, and the circulation coil has a drain valve(4) formed at an end of the circulation coil. An evaporator(2) of a heat exchanger has a drain pan(5) arranged in the lower portion of the evaporator so as to collect the condensate water generated from the evaporator. The drain pan is connected to the circulation coil through a connection pipe(6), and a pump(8) is installed to the connection pipe. A bypass pipe is arranged between the evaporator and pump so as to allow the refrigerant circulating through the evaporator to be by-passed and applied to the circulation coil. Thus, the cooling air generated from the evaporator is fed to the circulation coil, to thereby lower the temperature of refrigerator without installing an additional heat exchanger to the refrigerator.
Patent KR-20010094202-A (KR)
Title: Gas supplier for making micro foamed plastic
Inventor: CHA SEONG UN
IPC: B29C45/57
Filed: 2000-04-04
Abstract: PURPOSE: A gas supply apparatus for producing hyperfine foam plastic is provided to form fine bubbles in plastics by supplying gas to a cylinder of a plastic forming machine to mix with molten plastic. CONSTITUTION: A gas supply device is composed of a gas bombe(20) storing inert gas for forming hyperfine bubbles in plastics; a gas booster(11) compressing the inert gas from the gas bombe; a main receiver(12) storing the compressed high-pressure gas from the gas booster, and keeping the constant pressure; a sub receiver(14) supplying gas stably by receiving the compressed gas from the main receiver through a regulator valve(13) regulating gas flow; a gas storage tank(15) storing gas from the sub receiver temporarily, and supplying the gas to a plastic forming machine(30) for manufacturing hyperfine foam plastics; the regulator valve controlling the pressure of the compressed gas; a shutoff valve(16) cutting off the gas supply; and a control unit(17) controlling the gas booster and the shutoff valve. The hyperfine foam plastic having high strength is manufactured with supplying gas to the plastic forming machine continuously or intermittently and mixing with the molten plastic.
Patent KR-20010095864-A (KR)
Title: An application system via virtual character and a memory device storing the program to embody the application
Inventor: JO SUNG HYUN
IPC: G06F9/44
Filed: 2000-04-12
Abstract: PURPOSE: An application system of a virtual character and a recording medium storing a program for embodying an application is provided to supply an application system using a virtual character and to supply an application system having a game element capable of growing up a character. CONSTITUTION: A log-in process is performed(S1). A service providing server reads user information from a client database being connected to a server(S2). Status information of a client's inherent character read from the client database is provided to a storing device in a client computer through a communication unit(S3). A character image is displayed on a monitor being connected to the client computer in accordance with the character status information(S4). The client may display a control signal, and the control signal is transmitted to the service providing server(S5). The server analyzes client information included in the control signal and reads status information of the corresponding client's inherent character(S6). The status information is converted and the converted status information is stored in the client database(S7). The converted status information is transmitted to the corresponding client computer(S8). The converted character image is displayed on an image information display device being connected to the client computer(S9). If the user displays an intention of using the Internet application program(S10), the service providing server performs the corresponding application program(S11). The service providing server provides result information of the Internet application program to the client computer(S12).
Patent KR-20000071731-A (KR)
IPC: C07D231/56
Filed: 2000-04-19
Abstract: pK a     수치가 약 17 내지 약 30 범위 내에 있되, 상응하는 화학식 3aa의 2급 니트릴과의 pK a 수치의 차이가 약 6 이하인 염기의 존재하에, 유전 상수(ε)가 약 20 미만인 비양성자성 용매 중, 약 0 내지 약 120 ℃ 범위의 반응 온도에서 하기 화학식 2aa의 치환된 방향족 화합물을 하기 화학식 3aa의 2급 니트릴로 처리하여 하기 화학식 1aa의 3급 니트릴-치환된 방향족 화합물인 최종 생성물을 형성시키는 것을 포함하는, 화학식 1aa의 3급 니트릴로 치환된 방향족 화합물의 제조 방법이 기재된다. 
     <화학식 1aa> 
     
       
     
     <화학식 2aa> 
     
       
     
     <화학식 3aa> 
     
       
     
     식 중, 구성부 W 1 , W 2 , W 3 , W 4 및 W 5 , 및 치환 잔기 R 1 , R 2 , R 3 , R 4 , R 5 , R 6 및 R 7 은 알려져 있는 유기기 및 본 명세서에서 더 상세히 설명되는 기 중에서 선택된다.
Patent KR-20010015944-A (KR)
Title: method for epidermal dosaging of ascorbic acid
Inventor: CHO HUI YUN
IPC: A61N1/30
Filed: 2000-04-21
Abstract: PURPOSE: A method for transdermal administration of ascorbic acid is provided, thereby the ascorbic acid can be stably and transdermal administered and be used for removing pimples and wrinkles, inhibiting aging of the skin, and whitening the skin. CONSTITUTION: The ascorbic acid is transdermally administered together phosphate metal salt by electrophoresis, in which electrophoresis is performed by the application of a composition of a water soluble solution containing the ascorbic acid phosphate metal salt, to the skin; placing one electrode on the ascorbic acid-applied skin; and providing the current of 0.1 to 1.0mA by co-producing 60Hz pulse of 3 to 20v cationic voltage and 500Hz pulse of 3 to 20v anionic voltage, wherein the composition of a water soluble solution contains 20 to 99 wt.% of ascorbic acid phosphate metal salt, 1 to 10 wt.% of mixture mixed with 1 to 80 wt.% of additives, and 90 to 99 wt.% of water, in which the additives contains 1 to 25 wt.% of alpha-G-rutin, 1 to 50 wt.% of trehalose, 1 to 50 wt.% of aloeveragel, and 1 to 50 wt.% of alantoin, and the ascorbic acid phosphate metal salt is preferably ascorbic acid phosphate magnesium salt.
Patent KR-20010097707-A (KR)
Inventor: LEE BYEONG IL
Filed: 2000-04-25
Abstract: 개시된 인터넷 전자 상거래 또는 인터넷상으로 제공되는 각종 사이트에서 사용자가 소정의 상품을 구매했을 경우 또는 접속해서 소정의 행위를 수행했을 경우 지급하는 적립금 또는 포인트를 입금, 인출 또는 적립금 및 포인트를 이용하여 대출할 수 있는 은행 서비스를 수행하고자 하는 네트워크 기반의 전자 은행 서비스 시스템 및 그 운영방법에 관한 것이다. 
     본 발명의 전자 은행 시스템은 인터넷을 통해 형성된 각 사이트들을 회원 사이트로 연계시키고, 또한, 각 회원으로 등록하는 사용자에게는 전자 계좌를 만들어 주고, 이 전자 계좌에 회원 사이트에서 사용자에게 지급하고 있는 적립금이나 포인트가 입금될 수 있도록 하며, 이 적립금이나 포인트가 지속적으로 입금되며, 사용자들이 이 입금된 적립금이나 포인트를 이용하여 회원 사이트에서 판매하고 있는 물건을 구매할 수 있을 뿐만 아니라 구매할 경우 구매시 이용된 적립금이나 포인트는 전자 계좌로부터 인출되며, 이때 이 전자 계좌는 사용자가 알 수 있도록 입금, 인출, 잔금 정보를 표시하는 웹 페이지를 제공하며, 사용자들은 이 적립금이나 포인트를 이용하여 소정 금액을 대출 받아 물건을 구매할 수 있게 되어 전자 상거래 사이트의 활성화를 이룰 수 있다.
Patent KR-20000071866-A (KR)
Title: 시트저항 측정기
IPC: G01R27/02
Filed: 2000-04-28
Abstract: 시트저항측정기는, 자계를 발생하는 센서 헤드; 상기 센서 헤드에 대한 측정대상물인 반도체웨이퍼가 소정의 거리로 배치되었을 때, 상기 센서 헤드(1)에 의해 발생한 자계의 변화량을, 상기 반도체 웨이퍼상에 형성된 박막의 시트저항으로서 검출하는 증폭기를 포함하고, 상기 센서 헤드는, 반도체 웨이퍼의 한쪽의 면에만 대향하도록 제공되어 있다. 따라서, 기존의 제조라인에 간단히 조합될 수 있어서,  인라인에서 박막의 시트저항을 측정할 수 있는 동시에, 박막의 막질 관리를 적절하게 행할 수 있는 시트저항 측정기를 제공한다.
Patent KR-20010020801-A (KR)
Title: Method of manufacturing a semiconductor device
Inventor: TANAKA MIKIHIRO
IPC: G03F7/095
Filed: 2000-04-29
Abstract: PURPOSE: A production of a semiconductor device and the semiconductor device are provided to form a fine separate resist pattern, in which the fine separate resist pattern is formed so that the pattern can be formed over a limit of the wavelength in fining a separate pattern and a hole pattern. CONSTITUTION: A resist pattern(1a) capable of generating an acid(1b) is formed by development in a shortened time, and the top of the resist pattern(1a) is coated with a resist(2) which is crosslinked in the presence of the acid. The acid is then generated in the resist pattern by heating or exposure, and a crosslinked layer produced on the interface is formed as a coating layer of the resist pattern to thicken the resist pattern. The hole diameter or the separation width of the resist is thus reduced.