Patent SG-11201900509Y-A (SG)
Title: Simultaneous capturing of overlay signals from multiple targets
Inventor: HILL ANDY (ANDREW)
IPC: G02B27/42
Filed: 2017-07-28
Abstract: 103 104 119 100 104 1158 FIG. 4 -102 111111111111111111111111111111 110 65 103-. 64 113 101 105A 62 11 111111111111 115A 1-1 GC N O Cr) O GC O 1-1 C (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 01 February 2018 (01.02.2018) WIP0 I PCT omit VIII °nolo III oloilino IIV X10111110 oimIE (10) International Publication Number WO 2018/023078 Al (51) International Patent Classification: GO1N 21/47(2006.01) GO2B 27/28 (2006.01) GO1N 21/95 (2006.01) GO2B 27/42 (2006.01) GO1B 11/00 (2006.01) (21) International Application Number: PCT/US2017/044528 (22) International Filing Date: 28 July 2017 (28.07.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 15/222,503 28 July 2016 (28.07.2016) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (72) Inventors: HILL, Andy (Andrew); 2112 Los Angeles Av- enue, Berkeley, California 94707 (US). MANASSEN, Am- non; 10 Golda Meir, 34892 Haifa (IL). PASKOVER, Yuri; 10 Schoham Str., 38900 Caesarea (IL). LUBASHEVSKY, Yuval; 22 Smolenskin St., 3436606 Haifa (IL). (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (54) Title: SIMULTANEOUS CAPTURING OF OVERLAY SIGNALS FROM MULTIPLE TARGETS (57) : Metrology methods and systems are provided, in which the detected image is split at a field plane of the collection path of the metrology system's optical system into at least two pupil plane images. Optical elements such as prisms may be used to split the field plane images, and multiple targets or target cells may be measured simultaneously by spatially splitting the field plane and/or the illumination sources and/or by using two polarization types. The simultaneous capturing of multiple targets or target cells increases the throughput of the disclosed metrology systems. [Continued on next page] WO 2018/023078 Al MIDEDIMOMOIDEIREIO I 0 10 1101 0111 INEEHMEHOM GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))