baber/WOPTO huggingface dataset:
Patent KR-20100023980-A (KR)
Title: Name toothbrush
Inventor: KIM WOO JIN
IPC: A46B15/00
Filed: 2008-08-23
Abstract: PURPOSE: A name-marked toothbrush is provided to prevent users from mixing a toothbrush with other users due to personal hygiene by easily recognizing their toothbrush. CONSTITUTION: A name-marked toothbrush comprises a rubber unit formed on a PP body of the handle of a toothbrush to write down a name of a user. The rubber unit can be formed during the process of injecting rubber on the PP body. A protrusion is formed along the outer edge of the rubber unit to write words in between the protrusion using a ballpoint pen. Various words or simple drawings can be marked to the rubber unit by securing a part in which a palm of a user does not contact with the rubber unit.
Patent KR-20100032121-A (KR)
Title: Stack package and method of manufacturing the same
Inventor: KANG IL MOK
IPC: H01L23/12
Filed: 2008-09-17
Abstract: PURPOSE: A stack package is provided to reduce a size by minimizing the thickness of an adhesive film for attaching a second semiconductor chip to a first semiconductor chip. CONSTITUTION: A stack package(400) includes a mount substrate(110), a first semiconductor chip(200), a second semiconductor chip, conductive wires, and a molding unit(170). The first semiconductor chip includes a plurality of first pads and first rewiring pads(142). A second semiconductor chip includes a plurality of second pads and a plurality of second rewiring pads(144). The second rewiring pads cross the first rewiring pads. The conductive wires connect the first and second semiconductor chips to the mount substrate. The molding unit covers the first and second semiconductor chips and the conductive wires.
Patent KR-20100033026-A (KR)
Title: Method of manufacturing a semiconductor device
Inventor: HAN SE JIN
IPC: H01L21/28
Filed: 2008-09-19
Abstract: PURPOSE: A formation process is provided so that a manufacturing method of a semiconductor device can prevent a sidewall attack of a contact hole by forming a double diffusion barrier. The burying defect of the contact hole is prevented. CONSTITUTION: A contact hole(108) is formed on an inter-layer insulating film(106). A first diffusion barrier layer(110) is formed on the contact hole and inter-layer insulating film and a part of the contact hole is filled. The top of the first diffusion barrier layer is etched and an overhang(A) of the first diffusion barrier layer is eliminated. The second diffusion barrier is formed on the first diffusion barrier layer left behind as described above and inter-layer insulating film left behind. The metal layer is formed on the second diffusion barrier and the contact hole is filled. The metal layer and the second diffusion barrier are etched and the inter-layer insulating film is exposed.
Patent KR-20100034909-A (KR)
Title: Image forming apparatus and printing processing method thereof
Inventor: JIN SONG BAIK
IPC: G06F3/12
Filed: 2008-09-25
Abstract: PURPOSE: An image forming apparatus and a printing processing method thereof are provided to convert a plurality of printing jobs into a single printing job. CONSTITUTION: One or more interfaces(1~n) receive a plurality of jobs. A controller(120) performs a control operation to convert the jobs into a single printing job using connection information. A user interface unit(130) offers an user interface for setting a job attribute commonly applied to the jobs. The jobs in which a job attribute which is commonly applied is set are integrated to generate the single printing job.
Patent KR-20100035287-A (KR)
Title: 양방향 데이터 서비스 지원 가능한 교통정보제공 시스템 및방법과 교통정보제공 단말기
Inventor: PARK JAE IL
IPC: H04W4/04
Filed: 2008-09-26
Abstract: 본 발명은 교통정보제공 시스템에서 도로 교통상황을 반영한 최적의 경로 탐색이 가능한 BIFS 양방향 데이터 서비스를 지원하기 위한 교통정보제공 시스템 및 방법과 교통정보제공 단말기에 관한 것이다. 
     본 발명에 따른 교통정보제공 단말기에는 DMB(Digital Multimedia Broadcasting: DMB) 모듈이 BIFS (Binary Format for Scene, 이하 'BIFS'로 기재함) 서버에서 생성하는 교통정보를 포함하는 BIFS 데이터를 수신하여 네비게이션 모듈로 전달하고, 네비게이션 모듈에서 취득하는 운송관련 정보를 전달받아 BIFS 서버로 전송함으로써, BIFS 양방향 데이터 서비스를 지원할 수 있도록 한다.  
       
     도로 교통 정보, 양방향 데이터 서비스, TPEG, Navigation, DMB, BIFS
Patent KR-20090021252-A (KR)
Title: Method of preparing an anti-static piling support for display glass
Inventor: BAIK WOON PHIL
IPC: B32B38/00
Filed: 2008-09-30
Abstract: A manufacturing method of antistatic laminate supporter for display glass is provided to have antistatic function, to change little product property when loaded in a horizontal direction, to generate little failure rate and prevent generation nap of edge of a laminate supporter. A manufacturing method of antistatic laminate supporter for display glass comprises steps of: coating one side of a polyolefin film(120) with a conductivity polymer coating liquid, cross-linking it by thermal curing or photocure and forming antistatic coating layer(130); laminating anti-static film at one side of the polyolefin foam or poly-urethane foam sheet; and welding or sealing the laminate supporter by using heat.
Patent KR-20090034290-A (KR)
Title: Power generating apparatus using fluid
Inventor: PARK JONG WON
IPC: F03B13/12
Filed: 2008-10-02
Abstract: A power generator using the fluid is provided to produce the high power as the linear motion of a bucket is converted with the power of the rotational motion of an exercise conversion axis. A power generator using the fluid comprises: a buckets(10,40) receive the load by putting in the fluid; an butterfly valve(20) installed at the back-end of the bucket in order to control the flow of the fluid; a switching operating apparatus connected to the butterfly valve in order to open and close the butterfly valve; an crank shaft(30) in which the bucket is connected in order to change the linear motion of the bucket to the rotational motion; and connecting members(15,45) connecting the bucket to the crank shaft.
Patent KR-20100039923-A (KR)
Title: 친환경 교육을 위한 과학 기자재
Inventor: LEE JIN HO
IPC: G09B23/38
Filed: 2008-10-09
Abstract: 본 발명은 친환경 교육을 위한 과학 기자재에 관한 것으로, 보다 상세하게는 효모를 이용하여 음식물 쓰레기를 발효시켜 에탄올, 효모함유 사료, 퇴비를 생산할 수 있는 친환경 교육을 위한 과학 기자재에 관한 것이다. 
     본 발명에 따른 친환경 교육을 위한 과학 기자재는, 내부에 공간이 마련되고 하부에 복수개의 바퀴가 설치된 본체와, 상기 본체의 상부에 설치되며 내부에 투입된 음식물 쓰레기에 효모를 혼합하여 발효시키는 생물반응기와, 상기 생물반응기의 일측에 연결되어 생물반응기에 의해 생성된 에탄올을 분리 및 정제하는 증류기와, 상기 생물반응기에 연결되어 순환펌프에 의해 유입된 물을 가열시키는 히터와, 상기 증류기에 연결되어 상기 히터의 가열에 의해 증발된 기체상태의 에탄올을 냉각시키는 냉각기와, 상기 장치들의 작동을 제어하는 제어부를 포함하는 것을 특징으로 한다. 
       
     음식물 쓰레기, 에탄올, 사료, 퇴비
Patent KR-20100040488-A (KR)
Title: A composition comprising 5'-nitro-indirubinoxime, an indirubine derivative, for treating and preventing inflammatory diseases
Inventor: Kim soo a
IPC: A61K31/404
Filed: 2008-10-10
Abstract: PURPOSE: A composition containing 5'-nitro-indirubinoxime is provided to prevent and treat inflammatory such as artery scleroma. CONSTITUTION: A pharmaceutical composition for preventing and treating inflammatory diseases contains 0.1-50 weight% of 5'-nitro-indirubinoxime as an active ingredient. Inflammatory diseases are artery scleroma, arthritis, hypertension, diabetes or cancer. A health food for preventing and treating inflammatory diseases contains 5'-nitro-indirubinoxime as an active ingredient. The health food is used in the form of powder, granule, tablet, capsule, or beverage.
Patent KR-20100041468-A (KR)
Title: Gas scrubber for removing nox and the method removing nox
Inventor: LEE HOO KUN
IPC: B01D53/54
Filed: 2008-10-14
Abstract: PURPOSE: A gas scrubber for removing nitrogen compound and a method for removing the nitrogen compound among exhaust gas using the gas scrubber are provided to completely eliminate the nitrogen compound, to eliminate 99.75% of hydrochloric acid, and to remove 98% of acetic acid. CONSTITUTION: A gas scrubber(100) for removing nitrogen compound comprises: a hollow main body(110) in which a gas inlet(111) is formed on one side and an gas outlet(113) is formed on the other side; a mixing part(171) in which the exhaust gas flowing from the gas inlet and ozone supplied from an ozone supply part(173); a removing part(179) in which the nitrogen compound among the exhaust gas is removed; and the ozone supply part supplying the ozone to the main body. The removing part is composed of a copper structure. The nitrogen compound which is mixed in the mixing part is removed while contacting the copper structure.
Patent KR-20100041901-A (KR)
Title: The gutter of the eaves and the installation method thereof
Inventor: KIM SONG KUN
IPC: E04D13/04
Filed: 2008-10-15
Abstract: PURPOSE: A drain pan structure and an installation method of roof eaves are provided to improve exterior by preventing a space between a drain-pan and a cover. CONSTITUTION: A gutter fixing frame is fixed on the end upper of roof eaves. A cover settling frame(B) is fixed on the backward flange bottom of a drain-pan settling frame. The wing of a gutter(C) is fixed on the center of the backward flange of the drain-pan settling frame. A balance adjusting frame is established in the inner surface of drain-pan. The upper of front part of a cover(F) is fixed on the back side bottom of the cover settling frame. The wing of cover is fixed on the eaves bottom plane.
Patent KR-20100044015-A (KR)
Title: Torque control system for 4 wheel drive vehicle and method thereof
Inventor: WON YOUNG DEOK
IPC: F02D45/00
Filed: 2008-10-21
Abstract: PURPOSE: A device and a method for controlling torque of a four wheel driving vehicle are provided to offer stable response by returning the torque quantity into the following target torque quantity after the target torque quantity is controlled to the maximum or minimum allowable torque. CONSTITUTION: It is determined whether the torque variation is detected by detecting operation information(S102). If the torque variation is detected, the power distribution and a target torque quantity are determined(S104). The output is controlled to the allowable torque of hardware according to torque variation and then is controlled to the following target torque(S110).
Patent KR-20100045184-A (KR)
Title: Composite-material flat panel for radar cross section reducing using shaped reflector
Inventor: PARK CHEOL SOO
IPC: F41H13/00
Filed: 2008-10-23
Abstract: PURPOSE: A composite-material flat panel for reducing a radar cross section using shaped reflector is provided to prevent the influence to the location of a vessel and mounting equipment. CONSTITUTION: A composite-material flat panel for reducing a radar cross section using shaped reflector comprises a center reflection plate(100), a FRP(Fiberglass Reinforced Plastic) flat board(200) and a filler(300). The center reflection plate is provided to be formed by arranging triangular flat plates(110) side to side. The center reflection plate prevents the single reflection and the strong multiple reflection by controlling the direction of reflected wave of the radar signal. The FRP flat board prevents the flotation of the rise of tide circle by the sharp center reflector as coverage. The filler protects the FRP flat board by absorbing external shock.
Patent KR-20100046472-A (KR)
Title: Optical-electro wiring borad interconnection device using electro-optic hybrid connector
Inventor: HWANG SUNG HWAN
IPC: H01R12/79
Filed: 2008-10-27
Abstract: PURPOSE: A photoelectric wiring board connection device using a photoelectric hybrid connector is provided to improve degree of freedom in a design by removing a 45 degree mirror and an optical element from a connection board. CONSTITUTION: A connection board(240) electrically or mechanically connects photoelectric wiring boards(210,220). A connection board includes an electric wiring, an optical fiber, or an optical waveguide. A photoelectric hybrid connector(230) is combined with both sides of the connection board and transmits and receives the electric signal and the optical signal from the photoelectric wiring board and the wiring board. The photoelectric hybrid connector includes a board input unit, a mirror, and a first fixing arrangement unit. One end of the connection board is inserted into one end of the board input unit. The mirror changes the flow of the optical signal. A first stator arrangement unit fixes the connection board.
Patent KR-20100046665-A (KR)
Title: 여행 상품 판매 시스템 및 그 방법
Inventor: PARK JUNE WOO
IPC: G06Q50/14
Filed: 2008-10-28
Abstract: 본 발명은 여행 상품을 판매하는 시스템 및 그 방법에 대한 것으로, 판매되는 여행 상품 중 동일한 여행 상품을 구매하는 다수의 여행자들인 경우에도 게임을 통해 다음 여행지를 선택하므로, 각기 출발 및 도착 여행지가 달라지게됨에 따라 각기 고유한 관광을 경험할 수 있도록 하여 여행자들의 관광 흥미를 유발시킬 수 있고, 여행자가 여행 상품의 전체 일정 중 실제 관광한 여행지에 대한 여행 경비만 지급하고 또는 여행일정과 관련하여 소정의 과제를 제공하고 여행자가 이 과제를 여행 중 수행하게되면, 수행하는 과제의 수와 내용에 따라 사전 설정된 기준에 의해 경비의 일부를 여행이 종료되는 시점에서 여행자에게 되돌려줄 수 있고, 차액을 반환받음과 동시에 여행자 개인 정보에 따른 금액을 지급 받음으로, 금전적 혜택뿐만 아니라 추가적으로 이벤트 및 미션 내용에 따른 이익을 창출할 수 있음은 물론, 여행자가 여행지에서 생성한 여행자 개인 정보에 상응하는 금액을 지급받아 판매하고, 다음 여행자는 이전 여행자의 여행자 개인 정보를 제공받아 여행자들이 금전적인 수익을 가지면서 다음 여행자가 보다 풍부하고 유익한 여행지 정보를 획득할 수 있도록 하는 것이다.
Patent KR-20100046836-A (KR)
Title: Apparatus for and method of supplying chemical
Inventor: KANG BYUNG CHUL
IPC: H01L21/302
Filed: 2008-10-28
Abstract: PURPOSE: An apparatus and a method for supplying a chemical solution are provided to maximally suppress the density variation of the chemical solution by including a gas exhaust line on one side of a gas supply line. CONSTITUTION: A chemical solution supply device includes a chemical supply line, a chemical solution storage tank(120), a chemical solution exhaust line, a chemical solution level indication tube(121), a level sensor(122), and a gas supply line. The chemical solution supply line supplies a chemical solution. The chemical solution storage tank receives the chemical solution through the chemical supply line and stores the chemical solution. The chemical exhaust line transfers the chemical solution stored in the chemical solution storage tank to an exhaust position. The chemical solution level indication tube is connected to the chemical solution storage tank. The level sensor is positioned on one side of the chemical solution level indication tube and measures the level of the chemical solution. The gas supply line provides purge gas for purging the chemical solution storage tank to the chemical solution storage tank. The gas supply line includes the gas exhaust line for exhausting the purge gas.
Patent KR-20100047725-A (KR)
Title: Method for measuring the concentration of radioactive carbon in nuclear reactor and apparatus
Inventor: KANG DU KWON
IPC: G21C17/022
Filed: 2008-10-29
Abstract: PURPOSE: A method for measuring the concentration of the radioactive carbon and an apparatus thereof are provided to prevent the contamination spread to the living environment area by efficiently watching the radioactive carbon. CONSTITUTION: A reaction switching the radioactive carbon within a radioactive sample into the radioactive carbon dioxide is generated in a reactor(40). A first NaOH storing container(60) collects the radioactive carbon dioxide generated in the reactor. A catalytic reactor(70) switches the organic type radiocarbon which is not reacted in the reactor into the radioactive carbon dioxide. A second NaOH storing container(80) collects the radioactive carbon dioxide which is generated in the catalytic reactor. A carrier gas container(10) supplies the deactivation carrier gas transferring the radioactive sample. A pipet(20) for injecting the sample injects the radioactive sample into the reactor.
Patent KR-20090046696-A (KR)
Inventor: KIM KI HWAN
IPC: H04L27/26
Filed: 2008-10-31
Abstract: 무선 이동 통신 시스템에서 데이터 정보 스트림과 2가지 종류의 제어정보 스트림을 다중화하는 방법이 제공된다. 본 발명에 의한 다중화 방법은, 자원 블록에 매핑되는 입력 정보를 생성하기 위한 행렬 상에 제1 제어정보를 자원 요소 단위로 매핑하는 단계, 및 위의 자원 블록 중 기준 신호가 매핑되는 자원 요소(RE; resource element)로부터 시간 축에서 인접한 자원 요소에 제2 제어정보가 매핑되도록, 위의 행렬 상에 위의 제2 제어정보를 매핑하는 단계를 포함한다.  위의 제1 제어정보는, 위의 행렬을 첫 번째 행(row)에서 시작하여 아래쪽 방향으로 매핑되며, 위의 기준 신호가 매핑되는 자원 요소를 덮어쓰지 않도록 매핑된다. 
       
     다중화, 매핑, 제어정보, RS(reference signal)
Patent KR-20100048776-A (KR)
Title: Movement type extinguisher apparatus
Inventor: GWON YEONG GYU
IPC: A62C25/00
Filed: 2008-10-31
Abstract: PURPOSE: A transportable fire extinguisher system is provided, which makes fire suppressed rapidly at the remote place without approaching to the fire scene. CONSTITUTION: A transportable fire extinguisher system comprises: a vehicle(100) in which a wheel is installed in the bottom surface; a supporting tube(120) installed at the upper side of the vehicle; a valve(130) installed at the bottom of the supporting tube; a valve opening and closing member(140) which selectively opens and closes the valve; a rotating pipe(150) which is installed to be rotated in the upper end of the supporting tube in the horizontal direction; a horizontal worm wheel(151) formed in the external circumference of the rotating pipe; a horizontal rotation member(160) rotating the horizontal worm; a nozzle(170) which is installed to be rotated in the vertical direction; a vertical revolving member(180) rotating the nozzle in the vertical direction; a camera(200) installed at the front side of the rotating pipe; and a controller(190) controlling the overall operation of the element.
Patent KR-20100049209-A (KR)
Title: A method for extracting and concentrating polyphenol from grape branch
Inventor: CHO YONG JIN
IPC: A61K36/87
Filed: 2008-11-03
Abstract: PURPOSE: A method for extracting polyphenol from grape branch is provided to isolated polyhenol containing a large amount of resveratrol having anti-aging, anti-inflammation, and lengthened lifetime, and to use in a functional food, cosmetic product, and medicinal product. CONSTITUTION: A method for extracting polyphenol from grape branch comprises: a step of cutting grape branches at 2-3cm; a step of adding 3-5L of organic solvent per 1kg of cut grape branch; a step of stirring at 20-100 rpm to extract polyphenol; and a step of filtering polyphenol and evaporating organic solvent to obtain polyphenol. The organic solvent is ethanol, methanol, or acetone. The organic solvent is 70-95% of ethanol. The concentration is performed by evaporating volatile solvent at 285mmHg of air pressure range and 40-55°C of temperature range.
Patent KR-20100049333-A (KR)
Title: 포토레지스트용 오버코팅 조성물 및 이를 이용한 포토레지스트 패턴 형성방법
Inventor: LEE SUNG KOO
IPC: G03F7/004
Filed: 2008-11-03
Abstract: 본 발명은 포토레지스트용 오버코팅 조성물 및 이를 이용한 포토레지스트 패턴의 선폭 (line-width)을 축소하는 패턴 형성 방법에 관한 것으로, 보다 상세하게는 일반적인 리소그라피 공정에 의하여 형성된 포토레지스트 패턴 전면에 열산발생제를 함유한 오버코팅 조성물을 도포하고, 열처리하여 포토레지스트 패턴 내부로 산을 확산시킨 다음, 산이 확산된 제1 포토레지스트 패턴 영역을 알칼리 용액으로 식각하여 포토레지스트 패턴의 선폭을 축소하는 패턴 형성 방법에 관한 것이다.
Patent KR-20100054298-A (KR)
Title: Apparatus and method protecting battery by comparing full charge capacity between real and reference value
Inventor: LEE SEOK HUN
IPC: H01M50/583
Filed: 2008-11-14
Abstract: PURPOSE: An apparatus and a method for protecting a battery are provided to prevent a firing and heat generation from occurring in advance by controlling an unusual condition of the battery. CONSTITUTION: A method for protecting a battery by comparing a fully charged capacity of the battery comprises the following steps: computing a real value of the fully charged capacity of the battery(S1); computing a reference value of the fully charged capacity of the battery(S2); comparing the real value and the reference value(S3); and secluding the flow of a current of the battery by the result of the comparison(S4).
Patent KR-20100055005-A (KR)
Title: Gear alteration device of turret for cnc lathe
Inventor: LEE SANG MIN
IPC: B23B29/24
Filed: 2008-11-17
Abstract: PURPOSE: A gear shift device of a turret for a computer numerical control is provided to reduce the impact and noise by gently stopping a shaft by discharging working fluid. CONSTITUTION: A gear shift device of a turret for a computer numerical control comprises a piston(120), a housing(130), and a stopper(140). The piston is installed on the circumference of a shaft(110) through a bearing. The piston has a bumper part(122) of a tapered shape and flange(121). The bumper part is formed into the height lower than flange. The housing is installed in the circumference of piston. The housing comprises the path for supplying the fluid pressure of the working fluid to inside. The stopper is inserted in the circumference of piston and is installed in one side of the housing.
Patent KR-20100056009-A (KR)
Title: Temperature sensitive tissue adhesion prevention composition and method for preparing thereof
Inventor: CHOI JIN SUK
IPC: A61K47/30
Filed: 2008-11-19
Abstract: PURPOSE: A composition for preventing thermosensitive tissue adhesion and a method for manufacturing the same are provided to prevent suspension of fiber and to evenly apply on lesion. CONSTITUTION: A composition for preventing thermosensitive tissue adhesion is manufactured by adding cross-linking agent to an aqueous solution and performing chemical reaction. The aqueous solution contains 1,000-500,000g/mol of block copolymer having polyethylene oxide block and 10,000-1,000,000g/mol of polymer which is able to be mixed with the block copolymer. The composition has 10% or less of viscosity difference between supernatant and lower liquid in centrifuging at 25°C and 3,000rpm for three minutes. The content of the copolymer is 1-50 weight%. The content of the copolymer is 0.1-4 weight%.
Patent KR-20100059134-A (KR)
Title: Non-oriented electrical steel sheets having excellent magnetic property and method for manufacturing the same
Inventor: KIM JAE SONG
IPC: C21D8/02
Filed: 2008-11-26
Abstract: PURPOSE: A non-oriented electrical steel sheets having excellent magnetic property and a method for manufacturing the same are provided to reduce energy loss in use as a motor iron core by controlling the input amount of the Sn according to Al content and controlling the amount of nitride and oxide. CONSTITUTION: A non-oriented electrical steel sheets having excellent magnetic property is composed of C 0.005 weight%, Si 4.0 weight% or less, P 0.1 weight% or less, S 0.001 weight% or less, Mn 0.1~1.0 weight%, Al 0.45~1.5 weight%, Cu 0.01~0.3 weight%, N 0.003weight% or less, and Ti 0.005 weight% or less. When the steel sheet is observed through GDS, the maximum value of superficial layer nitrogen is 5% or less.
Patent KR-20100059147-A (KR)
Title: Portable checker for fire detecting system
Inventor: PARK YUN SUNG
IPC: G01R31/02
Filed: 2008-11-26
Abstract: PURPOSE: A portable checker for a fire detecting system is provided to check wrong connection, disconnection, the failure of base or frame, and a reverse voltage. CONSTITUTION: A circuit check lower cover(101) is unloaded from the base(21) of a fire sensor(20). A first lamp(103) is wired in L 1(+) and L(-) of the circuit check lower cover. A second lamp(104) is wired in L 1(+) and L 2(secondary) of the circuit check lower cover. A buzzer(105) sounds a bell. The circuit check upper cover(102) is combined on the top of the circuit check lower cover. The buzzer is accepted inside the lower cover.
Patent KR-20100060660-A (KR)
Title: Substrate polishing apparatus
Inventor: KWON OH JIN
IPC: H01L21/302
Filed: 2008-11-28
Abstract: PURPOSE: A substrate polishing device is provided to remove a substrate transfer process between polishing and cleaning processes by polishing and cleaning a substrate inside one container unit. CONSTITUTION: A substrate is received on the upper side of a substrate support member(100). The substrate support member rotates the substrate. A container unit(200) comprises a plurality of process containers which surrounds a plurality of substrate support members and is arranged with a fold structure. The space for differently processing the substrate is formed by stacking the process containers. A polishing unit(300) is formed on one side of the container unit and polishes the substrate. A fluid supply unit(400) is formed on one side of the container unit and sprays the fluid used for a polishing process or cleaning process. A brush unit(600) cleans the substrate received in the substrate support member.