baber/WOPTO huggingface dataset:
Patent WO-2021149519-A1 (WO)
Inventor: YAMASHIRO Riku
IPC: C03B17/06
Filed: 2021-01-08
Abstract: Dans une étape de découpe de ce procédé de production d'un film de verre, une fissure CR qui est générée dans une partie non-produit Gc1, Gc2 le long de la direction longitudinale d'un film de verre G2, est guidée par un élément de guidage 17a, 17b de façon à s'étendre jusqu'à une partie d'extrémité externe Gd de La partie non-produit Gc1, Gc2 dans la direction de la largeur.
Patent WO-2022153369-A1 (WO)
Inventor: NOMA TSUNETAKE
IPC: B64C37/00
Filed: 2021-01-12
Abstract: 本発明の課題は、目的水域まで速やかに到達可能とし、且つ、目的水域での航行に要するエネルギー量を抑制することである。移動体１００は、空中を飛行可能且つ水上を航行可能である。移動体１００は、船体部１と、船体部１の上側に設けられた帆装部２と、を備えている。帆装部２は、航行時に風を受けるセイル６０と、セイル６０を支持するマスト５０と、を有している。マスト５０は、セイル６０の展開率を変更する展開機構Ｅを有している。
Patent WO-2021149621-A1 (WO)
Title: Light source module
Inventor: KUROSAKA YOSHITAKA
IPC: H01S5/18
Filed: 2021-01-15
Abstract: One embodiment of the present disclosure relates to a light source module that can dynamically control the phase distribution of light. The light source module comprises a semiconductor laminate part. The semiconductor laminate part includes a laminate constituted by an active layer and a photonic crystal layer that generates Γ point oscillation, and has a phase synchronization unit and an intensity modulation unit aligned along the Y direction, which is one of the resonance directions of the photonic crystal layer. The laminate constituting a portion of the intensity modulation unit has M pixels (M is an integer of 2 or greater) aligned along the X direction. Each of the M pixels includes N 1  sub pixels (N 1  is an integer of 2 or greater). The length defined along the X direction of an area comprising N 2  continuous sub pixels (N 2  is an integer of 2 or greater and N 1  or less) among the N 1  sub pixels is smaller than the light-emitting wavelength of the active layer. The light source module outputs laser light along the direction that intersects both the X direction and the Y direction from each of the M pixels included in the intensity modulation unit.
Patent WO-2021149753-A1 (WO)
Title: Magnetic geared dynamo-electric machine, and method for manufacturing stator
Inventor: SASAKI MIKITO
IPC: H02K1/14
Filed: 2021-01-21
Abstract: A magnetic geared dynamo-electric machine comprising: a casing; a stator having a stator core, a coil, and stator magnets provided on the inner side of the stator core; a first rotor having a pole piece provided on the inner side of the stator; and a second rotor having a rotor core provided on the inner side of the first rotor, and a plurality of rotor magnets provided to the rotor core, the stator core having a back yoke and a plurality of teeth that project radially inward from the back yoke and are provided at intervals in the circumferential direction, a plurality of the stator magnets being attached in the circumferential direction to the radially inner ends of the teeth, and the portion of the teeth to which the stator magnets are attached being divided so as to be detachable from the other portion of the stator core.
Patent WO-2021210232-A1 (WO)
Inventor: HARA TAKAFUMI
IPC: B60L9/18
Filed: 2021-01-22
Abstract: 本発明の課題は、過変調時におけるモータ制御を適切に実施することである。　モータ制御装置１において、搬送波周波数調整部１６は、三相電圧指令Ｖｕ＊、Ｖｖ＊、Ｖｗ＊と三角波信号Ｔｒの位相差を表す電圧位相誤差Δθｖを変化させるように、搬送波周波数ｆｃを調整する。電流制御部１４は、高圧バッテリからインバータに供給される直流電力と、インバータからモータに出力される交流電力との電圧振幅比との電圧振幅比に応じた変調率Ｈが所定値、例えば１．１５を超えたときに、三角波信号Ｔｒの位相を表す搬送波位相差Δθｃａｒｒに基づいてｄ軸電圧指令Ｖｄ＊およびｑ軸電圧指令Ｖｑ＊の振幅および位相を補正する。
Patent WO-2022162932-A1 (WO)
Inventor: MARUYAMA TATSUYA
IPC: F24F120/12
Filed: 2021-02-01
Abstract: 空調制御システム（１）は、部屋の空調を行う空調機（４）と、ユーザ別に、ユーザ端末（６）の識別情報と、部屋の空調制御に関する空調制御情報とを少なくとも含むユーザ情報を記憶するサーバ（７）と、部屋の外に設置され、ユーザ端末（６）との通信によってユーザの通過を検知するユーザ検知端末（３）と、ユーザ検知端末（３）によってユーザの通過が検知されると、ユーザに対応する空調制御情報に基づいて部屋を予冷又は予暖するように空調機（４）を制御する制御装置（２）とを備える。
Patent WO-2022070456-A1 (WO)
Title: Environment control system, environment control method, and program
Inventor: OKUNO TATSUYA
IPC: H04Q9/00
Filed: 2021-02-10
Abstract: This environment control system (100) comprises a first acquisition unit (11) and a control unit (13). The first acquisition unit (11) acquires first user information including at least one among vital information and preference information on a user. The control unit (13) controls, on the basis of the first user information acquired by the first acquisition unit (11), one or more environment providing devices (2) respectively allocated to a plurality of groups (G1), and thus controls environments of a plurality of spaces respectively corresponding to the plurality of groups (G1). The one or more environment providing devices (2) include at least a device other than a blower device.
Patent WO-2022153555-A1 (WO)
Inventor: OKUNO TATSUYA
IPC: H05B47/165
Filed: 2021-02-10
Abstract: 取得部（１１）と、制御部（１２）と、を備える。取得部（１１）は、対象空間（４）におけるユーザ（Ｕ１）の滞在領域（４１）を通過する気流（Ａ１）に関する気流情報を取得する。制御部（１２）は、対象空間（４）に割り当てられた１以上の環境提供装置（２）を制御することで、対象空間（４）の環境を制御する。制御部（１２）は、取得部（１１）にて取得した気流情報に基づいて、気流（Ａ１）がユーザ（Ｕ１）に与える影響を打ち消すように１以上の環境提供装置（２）を制御する。
Patent WO-2021166807-A1 (WO)
Title: Light source device and image display device
Inventor: OHKAWA SHINGO
IPC: G02F1/13357
Filed: 2021-02-12
Abstract: This light source device is equipped with one or more light generating units and one or more optical members. The one or more light generating units emit divergent light that includes a plurality of light beams with different emission angles relative to an optical axis. The one or more optical members are disposed on the respective optical axes of the one or more light emitting units, and each comprise an entry surface, an inner side surface, and an exit surface. The divergent light emitted from the light generating units enters the entry surfaces. The inner side surfaces reflect the divergent light, that has entered the entry surfaces, within the interiors of the optical members. The divergent light reflected by the inner side surfaces is emitted by the exit surfaces in the direction of the optical axis. Moreover, the one or more optical members are each configured so that each of the plurality of light beams emitted from the exit surfaces at different emission angles is projected to an illumination range corresponding to an angle of emission based on the position of the optical axis. Furthermore, the one or more optical members are each configured so that the size of the illumination range corresponding to the angle of emission of each of the plurality of light beams has a prescribed distribution.
Patent WO-2021166963-A1 (WO)
Inventor: HARADA TAKESHI
IPC: H01L21/301
Filed: 2021-02-17
Abstract: This singulation method comprises, in order: a step of forming a surface retaining film (50) on a top surface of a wafer (100); a step of thinning a bottom surface of the wafer (100) so that the wafer (100) has a thickness of 30 μm or less; a step of removing the surface retaining film (50) from the top surface of the wafer (100); a step of forming a first metal layer (30A) and a second metal layer (30B) in order on the bottom surface of the wafer (100); a step of affixing a dicing tape (52) on a bottom surface of the second metal layer (30B); a step of subjecting the top surface of the wafer (100) to a process for increasing hydrophilicity of the surface of the wafer (100); a step of forming a water-soluble protective layer (51) on the surface of the wafer (100); a step of cutting the wafer (100), the first metal layer (30A), and the second metal layer (30B) by irradiating a predetermined region of the top surface of the wafer (100) with laser light; and a step of removing the water-soluble protective layer (51) from the surface of the wafer (100) using cleaning water.
Patent WO-2021166995-A1 (WO)
Inventor: TAKAGI KIYOSHI
IPC: A61B1/005
Filed: 2021-02-18
Abstract: 操作者が煩雑な操作を行わずに、湾曲可能部の目標位置への高い位置決め性能を実現できる仕組みを提供する。ワイヤで駆動され、湾曲可能に構成された少なくとも１つの湾曲可能部と、ワイヤを駆動する駆動部とを備える連続体ロボットの制御システム１０において、駆動部によるワイヤの押し引き駆動の目標変位ｒｅｆzと、連続体ロボット１００から得られるワイヤを把持するワイヤ把持機構の変位ｚt2との誤差を補償する制御を行う位置制御部ＫSVと、位置制御部ＫSVから出力されるワイヤの目標張力に相当する目標発生力ｒｅｆFと、連続体ロボット１００から得られるワイヤの張力に対応する発生力Ｆとの誤差を補償する制御を行う力制御部ＫFと、を備え、力制御部ＫFを含む第１のループ制御系と、力制御部ＫF及び位置制御部ＫSVを含む第２のループ制御系とが構成されている。
Patent WO-2021182140-A1 (WO)
Title: Saw blade
Inventor: NAGANO YUJI
IPC: B23D61/12
Filed: 2021-02-26
Abstract: A saw blade (91A) comprising a sawtoothed part (2A) having sawteeth function groups, which are groups of a plurality of sawteeth that cut a workpiece (WP) at each of a plurality of cutting widths (W1, W2, W3) obtained by segmenting the total width (Wa) of a cutting groove (Wm) when forming the cutting groove (Wm) in the workpiece (WP), the sawteeth function groups being provided in a repeated fashion for every plurality of cutting widths (W1, W2, W3).
A plurality of tooth tip function pitches (KPR11-KPR13), which are tooth tip pitches of a plurality of sawteeth (R11-R13) provided to the sawteeth function groups, mutually differ. The size of the tooth tip area of the plurality of sawteeth (R11-R13) corresponds to the size of the tooth tip function pitch (KPR11-KPR13) on the travel direction side.
Patent WO-2021177361-A1 (WO)
Inventor: MOHRI Toshinari
IPC: G05B19/418
Filed: 2021-03-03
Abstract: This bead appearance inspection device is provided with: an acquisition unit which acquires input data pertaining to a weld bead; a storage unit which stores a first determination reference and a second determination reference to be used for inspecting for a failure in the weld bead; a first determination unit which executes a first inspection determination for the weld bead; and k (k is an integer equal to or greater than 1) second determination units which execute a second inspection determination for the weld bead, wherein, an appearance inspection result for the weld bead is created and output by using a determination result of whether a first inspection result acquired by the first inspection determination meets the first determination reference and a determination result of whether a second inspection result meets the second determination reference.
Patent WO-2021193483-A1 (WO)
Title: 識別装置
Inventor: YONETANI YUKI
IPC: B07C5/342
Filed: 2021-03-22
Abstract: 搬送部により所定の搬送速度で搬送される検体の性状を識別する識別装置であって、前記検体が含有する材料を識別し前記検体の搬送方向の長さを取得する識別部と、前記長さに対応する所定の強度で弁別動作を行うように弁別装置を制御する制御信号を生成する指令部と、を有し、前記指令部は、前記長さあたりの前記弁別動作の強度を、前記長さに応じて変化させる。
Patent WO-2021225040-A1 (WO)
Inventor: NAGASAWA TOHRU
IPC: C30B13/32
Filed: 2021-03-22
Abstract: 結晶成長装置１０は、結晶材料１９，２０を加熱する加熱装置１１と、結晶材料１９，２０を所定の方向に移動させる移動装置１２，１３とを具備する。移動装置１２（１３）は、互いに独立して回転数を設定可能な第一モータ３１及び第二モータ３２と、入力された回転運動を結晶材料１９，２０の成長方向に沿った向きの直線運動に変換する方向変換部３３とを有する。第一モータ３１、第二モータ３２、及び方向変換部３３がそれぞれ、遊星歯車機構３４の太陽歯車３８、遊星歯車３９、及び内歯車４０の何れか一つと機械的に接続され、かつ遊星歯車機構３４の全ての歯車３８～４０が回転可能に構成されている。
Patent WO-2021200603-A1 (WO)
Title: Appareil de formation d'image, procédé de commande, et cartouche
Inventor: SUZUKI TAKASHI
IPC: B41J2/01
Filed: 2021-03-25
Abstract: La présente invention concerne un appareil de formation d'image (1) qui comprend un boîtier principal (10), une cartouche (20, 30) et un dispositif de commande (80). La cartouche peut être fixée au boîtier principal. La cartouche comprend une mémoire de cartouche (23, 33) conçue pour stocker des informations d'identification. Le dispositif de commande (80) est conçu pour effectuer un processus de réécriture servant à réécrire les informations d'identification en informations indiquant que la cartouche est la cartouche normale (S11), et dans un cas dans lequel le dispositif de commande reçoit une instruction d'annulation servant à ordonner d'annuler le contrat de service et les informations d'identification, qui sont stockées dans une mémoire de cartouche de la cartouche fixée au boîtier principal, elles indiquent que la cartouche est la cartouche contractuelle.
Patent WO-2021201242-A1 (WO)
Title: 空気調和機、制御方法及びプログラム
Inventor: NAKANISHI MICHIAKI
IPC: F25B49/02
Filed: 2021-04-01
Abstract: 空気調和機は、冷媒を凝縮する凝縮器と、凝縮された前記冷媒を蒸発させる蒸発器と、蒸発させた前記冷媒を圧縮する圧縮機と、圧縮された前記冷媒を回収可能なレシーバと、圧縮された前記冷媒の吐出先を、前記凝縮器から前記レシーバに切り替え可能な切替弁と、を備える。
Patent WO-2021246069-A1 (WO)
Inventor: HOMMA ATSUSHI
IPC: B60R11/02
Filed: 2021-04-20
Abstract: The present invention is provided with a pair of left and right speaker modules that each have a sound output unit and that are arranged in the interior of a backrest. The pair of speaker modules are arranged left and right relative to a headrest located on the front side of the backrest. At least a part of the headrest is located in a range within the nominal directivity angle of the sound output from the sound output units. Thereby, of the sound output from the sound output unit in the left-side speaker module, at least a part of the sound directed toward the right ear is blocked by the headrest, and of the sound output from the sound output unit in the right-side speaker module, at least a part of the sound directed toward the left ear is blocked by the headrest.
Patent WO-2021215483-A1 (WO)
Inventor: KIYOMIYA TOSHIHISA
IPC: A63H18/02
Filed: 2021-04-21
Abstract: The present invention provides a video processing system using an unmanned moving body capable of providing high-quality entertainment during unmanned moving body races.　A video processing device 20 of a video processing system S has: a video data acquisition unit which acquires video data indicating video captured by an unmanned moving body 1; a screen display unit which displays video indicated by the video data; a mark detection unit which detects that an identification mark is present inside the video; and a moving body identification unit which identifies whether the moving body 1 provided with the detected identification mark is the unmanned moving body. When a prescribed identification mark is detected in the video captured by a first unmanned moving body and the unmanned moving body provided with the identification mark is identified as being a second unmanned moving body, the screen display unit displays video captured by the first unmanned moving body and also displays information relating to the second unmanned moving body to a target location on the video.
Patent WO-2021230110-A1 (WO)
Inventor: TAKEGUCHI HIROFUMI
IPC: B05D1/40
Filed: 2021-04-30
Abstract: 液供給機構は、基板に対して処理液を吐出するノズルと、前記ノズルに前記処理液を供給する供給流路と、前記供給流路の流れを調整するバルブと、前記バルブから前記ノズルに向かう途中で前記処理液を一時的に内部空間に溜めるバッファ部と、を有する。
Patent WO-2021241170-A1 (WO)
Title: Punching transfer device
Inventor: NISHIDA TAKANOBU
IPC: A21C11/02
Filed: 2021-05-07
Abstract: Provided is a punching transfer device that can dispose, at predetermined intervals, multiple pieces of dough which have been punched out from a food dough sheet in shapes that leave no gap therebetween, by extruding the pieces of dough from a punch die multiple times after moving.　This punching transfer device is characterized by being provided with a punch die for punching out multiple pieces of dough at one time from a food dough sheet and a plurality of pistons for extruding the multiple punched-out pieces of dough individually from the punch die, and is characterized in that the pieces of dough can be disposed at predetermined intervals by punching out multiple pieces of dough at one time at a first position and extruding the pieces of dough at a second position a plurality of times while changing the timing and/or the position.
Patent WO-2022004151-A1 (WO)
Title: Article manufacturing device and article manufacturing method
Inventor: OKAZAKI RYOTA
IPC: H01L21/67
Filed: 2021-05-14
Abstract: A die bonder (100) is provided with: a supply unit (70) for supplying a workpiece (110); a bonding stage (20) for holding the workpiece (110) supplied from the supply unit (70); a transport lane (50a, 50b) for transporting the workpiece (110) from the supply unit (70) toward the bonding stage (20); and a workpiece support unit (400) disposed between the supply unit (70) and the bonding stage (20). The transport lane (50a, 50b) supports two sides of the workpiece (110), a lowest part of the workpiece (110) is supported by the workpiece support unit (400), and then the workpiece (110) is guided to the bonding stage (20).
Patent WO-2022249243-A1 (WO)
Inventor: KIYONO TSUTOMU
IPC: H01L21/60
Filed: 2021-05-24
Abstract: ワイヤボンディング装置は、対象物にワイヤをボンディングするワイヤボンディング装置であって、ワイヤボンディング装置の動作に関する診断結果の時系列データに基づいて、初期状態の診断結果からの変化の推移を予測する予測部と、予測部により初期状態の診断結果からの変化量が第１閾値に達すると予測された時点を、ワイヤボンディング装置のメンテナンスを行う時点として設定する設定部と、を備える。このようなワイヤボンディング装置は、メンテナンスを好適に行うことができる。
Patent WO-2022249423-A1 (WO)
Inventor: UR SHMUEL
IPC: G06Q10/06
Filed: 2021-05-27
Abstract: ソフトウェア開発を行う複数の作業者の作業情報を収集する情報収集部と、前記複数の作業者の作業情報に基づいて、作業品質の評価のためのベースとなるベースモデルを作成するモデル作成部と、前記ベースモデルと、ある作業者の作業情報に基づくモデルとに基づいて、当該作業者の作業品質を評価する評価部とを備える品質管理装置。
Patent WO-2021246526-A1 (WO)
Inventor: NAMIKI KENSUKE
IPC: B29C45/62
Filed: 2021-06-04
Abstract: Provided are a controlling device for an injection molding machine and a program, capable of improving accuracy of the estimated surface temperature of a heater.　A controlling device for an injection molding machine having a cylinder and a heater disposed around the cylinder and serving to estimate the surface temperature of the heater at a predetermined time, the device comprising: an operation information acquiring unit for acquiring, as operation information, heater output power and heater setting temperature of the heater during a predetermined period immediately before the predetermined time; a surface temperature acquiring unit for acquiring the surface temperature of the heater during the predetermined period included in the acquired operation information; an actual performance information acquiring unit for acquiring, as actual performance information, the actual performance on the transition of the ratio between the surface temperature of the heater and the setting temperature relative to the transition of the heater output power of the heater; and an estimating unit for estimating the surface temperature of the heater at the predetermined time on the basis of the operation information, the actual performance information, and the acquired surface temperature.
Patent WO-2021251363-A1 (WO)
Title: Electric motor, compressor, blower, and freezer device
Inventor: SAKURAGI TAKUYA
IPC: H02K1/27
Filed: 2021-06-08
Abstract: In the present invention, with respect to a rotor, provided is a technique by which it is possible to further increase the magnetic flux of magnetic poles opposing a magnetic stator. An electric motor 1 according to one embodiment comprises: a stator 10; a rotor 20 that opposes the stator 10 in the axial direction (first direction) and is configured so as to be able to freely rotate in the circumferential direction (second direction), which is orthogonal to the axial direction; and shorting mitigation members 25, 26. The rotor 20 includes: primary magnets 22 having first magnetic poles on a surface opposing the stator 10; and supplementary magnets 23, 24 that are disposed adjacent to the primary magnets 22, that have second magnetic poles and third magnetic poles differing in polarity from the second magnetic poles, and that increase the magnetic flux of the first magnet poles. The supplementary magnets 23, 24 are disposed adjacent to the primary magnets 22 in the radial direction (third direction) orthogonal to the axial direction, and are provided in a section which is in the periphery of the supplementary magnets 23, 24 and which faces, in parallel, imaginary lines linking the second magnetic poles and the third magnetic poles. The supplementary magnets mitigate shorting of the magnetic flux between the second magnetic poles and the third magnetic poles.
Patent WO-2022269810-A1 (WO)
Inventor: KANAZAWA SHIGERU
IPC: H04B10/564
Filed: 2021-06-23
Abstract: 出力パワーをモニタする際の隣接チャネル間のクロストークを抑制する。複数の波長チャネルを多重化して出力する多チャネル光モジュールであって、各々が異なる波長の複数の光源と、前記複数の光源の各々の出力に結合された複数のコリメータレンズと、前記複数のコリメータレンズの各々の出力に結合されたビームスプリッタと、前記ビームスプリッタから分岐された光パワーをモニタする複数のモニタＰＤと、前記複数のコリメータレンズの間に設置された遮蔽板とを備えた。
Patent WO-2022014348-A1 (WO)
Title: Module and production method therefor
Inventor: ODA TETSUYA
IPC: H05K9/00
Filed: 2021-07-01
Abstract: A module (101) is provided with: a substrate (1) that has a first surface (1a); a first component (41) that is mounted on the first surface (1a), with at least a part thereof covered by a first conductive film (71); a sealing resin (6) that is disposed so as to cover the first surface (1a) and the first component (41); and a shield film (8) that covers part of the surface of the sealing resin (6) on the far side from the substrate (1). The surface of the sealing resin (6) on the far side from the substrate (1) has a shielded region (51) covered by the shield film (8), and a non-shielded region (52) not covered by the shield film (8) when viewed from a direction perpendicular to the first surface (1a). The non-shielded region (52) overlaps with at least part of the first conductive film (71).
Patent WO-2022024725-A1 (WO)
Inventor: MERA Hirofumi
IPC: E05B83/00
Filed: 2021-07-09
Abstract: The present invention enables size reduction of a cylinder lock for saddle-ride type vehicles that includes a seat opener and that is configured such that a magnet lock, which is for allowing the insertion of a mechanical key into a mechanical key insertion hole, is unlocked in response to the insertion of a magnet key into a magnet key insertion hole. A seat opener (118) has a structure for releasing a locked state of a riding seat (116) in response to a sliding operation of an operator (117). The operator (117), which can be operated to slide, and a magnet key insertion hole (67), which has a rectangular cross section, are disposed on one side with respect to one imaginary plane (IP) including the center axis of a mechanical key insertion hole (37).
Patent WO-2022024735-A1 (WO)
Inventor: Tahara kana
IPC: H01L21/304
Filed: 2021-07-12
Abstract: This substrate processing method comprises: an etching step wherein a semi-solid coating film, which contains a first polymer having an etching function and a second polymer having a solid-forming function, is formed on the surface of a substrate and the surface layer part of the substrate is etched by means of the first polymer on the substrate; and an etching stopping step wherein the etching of the surface layer part of the substrate is stopped by curing the second polymer in the coating film and changing the coating film into a solidified film by means of a solid formation process.
Patent WO-2022044586-A1 (WO)
Title: Infection inhibition device
Inventor: NAKAMA TAKAHIRO
IPC: B60H1/00
Filed: 2021-07-13
Abstract: This infection inhibition device 1 inhibits airborne infection of a seat occupant sitting on a seat 10, the infection inhibition device 1 comprising an air barrier formation unit 2 that has an intake port 21, an air cleaning mechanism 22 for cleaning air taken in through the intake port 21 to produce clean air, and a blowout port 23 for blowing out clean air to the front of the seat 10, the air barrier formation unit 2 being capable of blowing out clean air in a layered form perpendicular to the lateral direction of the seat 10 from the blowout port 21, and the air barrier formation unit 2 being configured so as to be attachable to and detachable from the seat 10.
Patent WO-2022044942-A1 (WO)
Title: Compound semiconductor substrate and compound semiconductor device
Inventor: KAWAMURA KEISUKE
IPC: H01L21/338
Filed: 2021-08-19
Abstract: [Problem] To provide a high-quality compound semiconductor substrate and compound semiconductor device. [Solution] A compound semiconductor substrate comprises: an Si substrate having an O concentration of３×10 17 mol/cm 3  to 3×10 18 mol/cm 3  inclusive; an SiC layer formed on the Si substrate; a first nitride semiconductor layer which is formed on the SiC layer, includes an insulating or semi-insulating layer, and comprises Al x Ga 1-x N (where 0.1≦ｘ≦1); a second nitride semiconductor layer which is formed on the first nitride semiconductor layer and includes a C-GaN layer; and an electron scanning layer which is formed on the second nitride semiconductor layer and comprises Al z Ga 1-z N (0≦z<0.1). The total thickness of the first nitride semiconductor layer, second nitride semiconductor layer, and electron transit layer is 6-10 μｍ inclusive.