baber/WOPTO huggingface dataset:
Patent KR-20000021234-A (KR)
Title: Power cutoff for metal film deposition equipment
Inventor: KIM JIN GUK
IPC: C23C14/34
Filed: 1998-09-28
Abstract: PURPOSE: A power cutoff for metal film deposition equipment is provided which could prevent the execution of sputtering with hardware when loading error of wafer is occurred or process time and power exceed. CONSTITUTION: In executing sputtering by permitting direct-current voltage to target(6)placed in the opposite side of wafer(4) loaded inside of vacuum chamber(2), the power cutoff comprises of regular-shutting switch(14) having push button in the middle of line(12), which connects the target(6) and direct-current power supply(10).
Patent KR-20000021271-A (KR)
Title: Method for disposing waste water by processing an aerobium and an anaerobe
Inventor: PARK HYO JEONG
IPC: C02F3/30
Filed: 1998-09-28
Abstract: PURPOSE: A method for disposing waste water is provided to simultaneously process an aerobic processing and an anaerobic processing. CONSTITUTION: A method for disposing an aerobic processing and an anaerobic processing comprises the steps of: simultaneously performing the aerobic processing by a flow phase(20) of microorganism and an anaerobic processing by a stationary phase(30) of microorganism in an aerated tank(10); performing by using a bag(32) filled with a filter function(34) by the anaerobic processing; a seaweed type is utilized by being attached onto a supporting board(40) with a club type in a 50 centimeter gap, by the bag(32).
Patent KR-19990030256-A (KR)
Title: 플라즈마 처리 장치
IPC: H01L21/205
Filed: 1998-09-29
Abstract: 유도 결합형 에칭 장치(100)는 처리실(102)의 천정부인 유전체 벽(108)상에 배치된 RF 안테나(110)를 갖는다.  처리실(102)은 중간 전극(128)의 경계부(154)에 의해 플라즈마 생성 공간(132)과 처리 공간(134)으로 분할된다.  처리 공간(134)내에 반도체 웨이퍼(W)를 탑재하는 서셉터(116)가 배치된다.  경계부(154)는 플라즈마 생성 공간(132)과 처리 공간(134)을 연통시키기 위한 개구(130)를 갖는다.  경계부(154)는 방사상으로 배치된 복수의 도전 빔(156)으로 이루어진다.  도전 빔(156)은 RF 안테나(110)에 의해 형성되는 전계 방향에 대하여 대략 직각으로 연재하고, 또한 열 응력을 완충시키는 굴곡을 갖는다.
Patent KR-20000026094-A (KR)
Title: Device for transmitting/receiving data using analog mobile phone
Inventor: PARK HEI SOO
IPC: H04B7/26
Filed: 1998-10-17
Abstract: PURPOSE: A device for transmitting/receiving data using an analog mobile phone is provided to transmit/receive wirelessly data and a public switched telephone network(PSTN) by using a hand unit for wirelessly connecting and a fixture in an analog mobile phone. CONSTITUTION: A device for transmitting/receiving data using an analog mobile phone includes a modulation/demodulation portion(24), a hand unit(28) and a fixture(32). The modulation/demodulation portion provides the hand unit with a modulated data by modulating the modulated data provided from the hand unit and demodulating data to be transferred. The hand unit includes a key input portion(42), a voice transmittance/receipt portion(46), a signal transmittance/receipt portion(50), a switching portion(52) and a micro-computer(44). The key input portion selects one out of a data transmitting mode and calling mode. The voice transmitter/receiver performs a voice transmittance/receipt function. The signal transmittance/receipt portion wirelessly connects with the fixture. The switching portion provides each path. The micro-computer provides a path between the signal transmittance/receipt portion and the modulator/demodulator in the data transfer mode by controlling the path of the switching portion according to the selection of the key input portion, and provides a path between the voice transmittance/receipt portion and the signal transmittance/receipt portion in the calling mode.
Patent KR-20000026209-A (KR)
Title: High efficient air conditioner
Inventor: YUN HONG YEOL
IPC: F24F7/00
Filed: 1998-10-19
Abstract: PURPOSE: A high efficient air conditioner is provided to improve the efficiency and to reduce noise by removing the flow loss through the change in a shape of an air inlet unit for an outdoor unit. CONSTITUTION: A compressor(51) is driven to circulate a refrigerant and the refrigerant is condensed in a condenser(52) if an air conditioner is worked. Therefore, the efficiency of the condenser is improved by exhausting the heated air in the condenser outside a cabinet(50) through the continuous feed of new air to the condenser. Also, a shroud(55) induces the air flow so the air introduced through an air inlet unit(50') as to be flowed in the cabinet without resistance. Therefore, the flow energy is not lost in the cabinet and the air is smoothly flowed to improve the efficiency.
Patent KR-20000026518-A (KR)
Title: Preparation method of polypropylene sheet for transparent case
Inventor: KIM MOON SUN
IPC: C08J5/18
Filed: 1998-10-21
Abstract: PURPOSE: A preparation method of a polypropylene sheet for a transparent case is provided which prevents a blocking phenomenon between sheets and gives print ability to sheets by coating-treating one side of a sheet with a fine particles-containing polymeric aqueous solution. CONSTITUTION: A preparation method of a polypropylene sheet for a transparent case comprises (a)melt-extruding a resin composition added from 1 to 10 by weight of an alpha-olefin copolymer to a polyolefin resin having a melt index of from 1 to 20(g/10min) and a melting point of from 140 to 180°C and forming to give a sheet, (b)corona discharge treating the sheet to give a surface tension of 38 dyn/cm, and (c)coating a polymeric aqueous solution containing from 0.1 to 1% by weight of fine particles having a particle diameter of from 0.1 to 0.5 micrometer and from 10 to 50% by weight of an acrylic resin on one side of the sheet. The thus obtained product has a transparency of from 1.5 to 5% haze within a range of from 100 to 500 micrometer in thickness and is excellent in print ability and adhesive property.
Patent KR-20000026810-A (KR)
Title: Method for forming micro pattern of semiconductor element
Inventor: LEE JEONG SEOK
IPC: H01L21/027
Filed: 1998-10-23
Abstract: PURPOSE: A method for forming a micro pattern of a semiconductor element is provided to use TLR(Tri-Level Resist) process, in order to prevent a bridge problem of a pattern in a photo process of the semiconductor element. CONSTITUTION: A method for forming a micro pattern of a semiconductor element comprises the steps of: forming a BCB(benzocyclobutaene) layer(13) on an etching target layer, supplied on a predetermined bottom layer; forming a bottom photosensitive layer, an oxide layer between layers, and an upper photosensitive layer; patterning the bottom photosensitive layer, the oxide layer between layers, and the upper photosensitive layer sequentially; selectively etching the etching target layer by using the patterned bottom photosensitive layer with an etching mask; and selectively etching the etching target layer by using the BCB layer with the etching mask.
Patent KR-20000026823-A (KR)
Title: System and method for automatically determining broadcasting mode
Inventor: JEON YONG JIN
IPC: H04N9/79
Filed: 1998-10-23
Abstract: PURPOSE: A system and method are provided to automatically detect a broadcasting mode by interfacing mutual data between a TV and a VCR using a next view link system. CONSTITUTION: A system for automatically determining a broadcasting mode includes a TV signal receiving part(201) for receiving signals from an outer antenna and an input terminal and a Y/C signal processor(202) for separating a brightness signal and a color signal with respect to an input signal of a TV signal receiving part(201). A TV controlling part(203) controls an operation of a TV(200) according to signals from the Y/C signal processor(102). A VCR controlling part(103) controls input/output image/audio signals, and a Y/C signal processor(102) processes image signals according a control of the VCR controlling part(103). A record/play signal converting part(104) converts record/play signals according to signals form the Y/C signal processor(102). An interface part(300) receives data on each channel from the TV(200) and conducts an interface processor to a VCR(100) using a next view link system.
Patent KR-20000026970-A (KR)
Title: Plastic support member as substitution for wood for civil work
Inventor: BAE EUN MI
IPC: E02D17/04
Filed: 1998-10-24
Abstract: PURPOSE: A plastic support member is provided to have high shear rigidity for enduring a soil pressure as enabling to reuse. CONSTITUTION: A support member(10) is a long bar by forming a hollow part(11) having a rectangular section. Polyethylene, polypropylene, PET, PVC, PS, and so on are used as the plastic materials for the support member. The support member contains a slot(12) separately formed, and the slots forms a drainage hole between support members according to retaining wall installed by accumulating plural support members. Therefore, the slots drain underground water to prevent ground or soil from falling caused by gathering the underground water leaked from the ground facing the outside of a retaining wall.
Patent KR-20000032869-A (KR)
Title: Radiation device for hard disc drive
Inventor: BAE BYONG YONG
IPC: G11B33/14
Filed: 1998-11-18
Abstract: PURPOSE: A radiation device for a hard disc drive is provided so that the heat of the cover unit(22) is transmitted to the air space, and radiated to the outside air. CONSTITUTION: A radiation device for a hard disc drive comprises a base(21); a spindle motor disposed at the base(21); a hard disc(25) rotatable provided on the spindle motor; a cover unit(22) disposed at an upper portion of the base(21); a plate unit(40) being provided at the outer surface of the cover unit(22), and having a through hole(44); and an air space disposed between the cover unit(22) and the plate unit(40) to be engaged with the outside air through the through hole(44).
Patent KR-20000034246-A (KR)
Title: Meter reading method in hand terminal
Inventor: YOON SEOK MO
IPC: G08C17/02
Filed: 1998-11-28
Abstract: PURPOSE: A meter reading method in a hand terminal is provided to read the used data (electricity) detected by each meter of the wireless communicating method and also to inform the total using amount by reading the previous data and the current used data together. CONSTITUTION: A meter reading method comprises the steps of: inputting identified data (ID) of the meter wanted to read; storing and displaying the controlled number key corresponded to ID; checking the existence of the stored ID up after controlling the transmission key by the user; transmitting the stored ID by the wireless; displaying the ID of the meter wanted to read by the response to the transmitted data, and the received current and previous data; and setting the power-down mode of the hand terminal when the transmission or cancel key is not controlled after some times.
Patent KR-20000039799-A (KR)
Title: Lithographic process
Inventor: PAK GYU DONG
IPC: H01L21/027
Filed: 1998-12-16
Abstract: PURPOSE: A lithographic process is provided to control the size of a contact hole and form a fine contact hole. CONSTITUTION: A lithographic process comprises treating a silicon substrate with hexamethyl disilazane, coating photoresist on the silicon substrate, soft baking the photoresist, exposing the photoresist using a reticle, heat treating the photoresist for a certain period, and developing the photoresist with a certain chemical. The heat treatment is accomplished at 80 through 100°C for 80 through 200 seconds. It is preferable that the heat treatment is accomplished at a low pressure.
Patent KR-20000042743-A (KR)
Title: Method and device for heat-addition-compressing anisotropic conductive film and method for automatically operating
Inventor: KONG YEONG JUN
IPC: B29C55/00
Filed: 1998-12-26
Abstract: PURPOSE: A method and a device for heat-additive-compressing an anisotropic conductive film and a method for automatically operating are provided to temporarily compress the anisotropic conductive film from an anisotropic conductive film tape on a TMA(thin film micromirror array actuated) for connecting the lead portion of a TCP(tape carrier package) to the lead portion of each TMA. CONSTITUTION: A TMA(1) disk is inputted to a correct location of an Xy theta table(35) for being fixed by using a vacuum adsorbing instrument(35'). An anisotropic conductive film(18) is attached on the X11 location of the TMA from the compressing location of a compressing head(22). Then, an upper protecting film(19') is peeled off from the anisotropic conductive film for moving the X12 location of the TMA to a compressing location by using the table. Moreover, the attachment and the peeling off are operated at the X12 location of the TMA. The Y1 location of the TMA is moved to the compressing location by using the table for operating the attachment and the peeling off again. Thus, the X21, the X22, and the Y2 locations of the TMA are moved to the compressing location for operating the attachment and the peeling off.
Patent KR-20000043244-A (KR)
Title: Overlay measuring method of semiconductor device
Inventor: KIM SEO MIN
IPC: H01L21/66
Filed: 1998-12-28
Abstract: PURPOSE: An overlay measuring method of a semiconductor device is to decrease an alignment error with a real pattern using a line and space pattern depending on the integrity of device. CONSTITUTION: An overlay measuring method of a semiconductor device comprises the steps of: forming on a first layer a first overlay vernier pattern in which a plurality of lines and spaces are repeated and the width of the space is three times than that of the line pattern; depositing a second layer on the first overlay vernier pattern; forming on the second layer a second overlay vernier pattern having the same shape and size with the first overlay vernier pattern and disposed within the space of the first overlay vernier pattern; projecting an incident light into the first and second overlay vernier pattern; receiving a light beam reflected from the first and second overlay vernier patterns and converting the received light beam into an electrical signal(11); and measuring an overlay degree by measuring distance between the electrical signals.
Patent KR-20000044978-A (KR)
Title: Enhancer composition for stratum cornea exfoliation
Inventor: PARK SEON GYU
IPC: A61K31/19
Filed: 1998-12-30
Abstract: PURPOSE: An enhancer composition for stratum cornea exfoliation has intensive exfoliation effect, consequently reduces hyperkeratinization and relieves side effect like sting by comprising isoserine. CONSTITUTION: 0.01-10 wt.% of isoserine(3-amino-2-hydroxypropionic acid) having molecular weight of 105, desirably 0.1-5 wt.% is added in the enhancer composition for stratum cornea exfoliation based on the total dried weight of the composition at room temperature. The isoserine is propionic acid derivative having hydroxy group at carbon number 2 and amine group at carbon number 3 and it is not known if it is available from nature.
Patent KR-20000046802-A (KR)
Title: Apparatus for picking up semiconductor chip
Inventor: SIM DONG GI
IPC: H01L21/68
Filed: 1998-12-31
Abstract: PURPOSE: An apparatus for picking up a semiconductor chip is provided to easily pick up large sized semiconductor chip as well as to simplify the horizontal position management. CONSTITUTION: An apparatus for picking up a semiconductor chip includes an air ejection pin(21), an air ejection hole(20), a pepper port(10), and an ejection base(30). The air ejection pin(21) dispatches the semiconductor chip from the tape by applying a pressure on the rear side of the chip which is attached on the tape. The air ejection hole(20) includes a plurality of air ejection pins. The pepper port(10) includes a hole in which the air ejection holder is to be inserted and a vacuum line around the hole. The ejection base(30) is implemented on the lower portion of the pepper port so as to apply a pressure on the air ejection pin.
Patent KR-19990024287-A (KR)
Title: 외면에 디스플레이가 장착된 덮개가 슬라이딩개폐되는 폴더형휴대폰
IPC: H04B1/38
Filed: 1998-12-29
Abstract: 본 발명은 전면의 하부에 송화부(24)가 구비되고 상부에 복수개의 버튼(22)이 설치된 본체(20)와, 상기 본체(20)와 연결되고 닫힌 상태의 외부면에 문자 및 숫자를 나타내는 디스플레이(34)와 수화부(32)가 설치되는 덮개(30)와, 상기 덮개(30)가 본체(20)에 대하여 슬라이딩으로 개폐되도록 하는 슬라이딩 개폐수단과, 상기 덮개(30)와 본체(20)상의 일측면에 설치되는 통화/종료버튼(26) 그리고 상기 본체의 상면 일측에 설치되는 안테나(40)로 구성되어, 덮개(30)가 닫힌 상태에서 상기 통화/종료버튼(26)을 작동하여 통화수신 및 메시지 수신이 이루어지고 슬라이딩으로 본체(20)의 하방향에서 상방향으로 개폐가 이루어지는 폴더형휴대폰에 관한 것이다.  그리고, 상기 슬라이딩 개폐수단은, 본체(20)의 전면 양측에서 내부로 홈이져 형성되고 전면의 상단부분이 상방향으로 경사된 가이드홈부(28)와, 상기 덮개(30)의 내면 양측 단부에 형성되어 상기 가이드홈부(28) 내부를 따라 슬라이딩되는 슬라이딩돌기(36)로 구성되도록 한다.  따라서 본체 외면에 설치된 통화/종료버튼을 이용하여 디스플레이에 나타나는 문자 및 숫자가 덮개가 닫혀진 상태에서도 확인 가능하므로 편리하게 사용할 수 있는 잇점이 있다.
Patent KR-19990030464-A (KR)
Title: 액체충전용기용 배출대의 구조
Filed: 1998-12-28
Abstract: 본 발명은 액체상태의 내용물을 용이하게 충전함은 물론 그 충전된 용기의 내용물을 용이하게 음용하도록 설계된 특징이 있는 액체충전용기용 배출대의 구조에 관한 것으로, 용기본체(C)의 임의 일 부위에는 내용물을 충전하고 배출시키는 용도의 배출구(100)가 용기본체(C)의 상방개구부 등을 봉착할때에 일체로 결합 고착되어지는 특징이 있는 것으로서, 상기 내용물을 충전하고 유출시키는 용도의 배출대(100)는; 본체(110)의 중심부에 형성된 작동부삽입구에 유출구가 있는 작동부(120)를 조립시키는 것이며, 상기 본체(110)에 작동부(120)가 조립되어된 상방의 구부를 중심으로는 마개(130)를 끼어 조립시킨 특징의 것에 있어서, 상기의 본체(110)는 적어도 1개 이상의 나사산(112)이나 환형의 걸림턱을 갖는 등의 구부(111)로 두고, 그 하방에는 접착면(113)을 두며, 상기 본체(110)의 내부에는 작동부삽입구(114)를 두되, 그 작동부삽입구(114)가 있는 임의 내벽면에는 환돌기(115)와 환홈(116)을 각각 형성한 것임과, 상기의 작동부(120)는 그 내측으로 유출구(121)가 있고, 그 유출구(121)의 임의 유출공(122)을 두며, 그 유출공(122)의 하측 외환부에는 환돌기(123)를 둠과, 상기 작동부(120)의 상측에는 환홈(124)을 형성한 것임과, 상기 마개(130)는 측면부(131)와 그 하측에 절취선(133)으로 구획된 스커트(132)가 있고, 상기 측면부(131)의 임의 상단 내벽면에는 환홈(135)을 포함한 환돌기(134)를 형성한 것이며, 상기 측면부(131)의 내벽면에는 나사산(136)을 형성한 것이다.
Patent KR-19990044424-A (KR)
Title: 살진균제 및 살진균 방법
IPC: A01N43/40
Filed: 1996-09-03
Abstract: 본 발명은 활성 성분으로서 페나자퀸 및 1종 이상의 화학식 I, A-CO-NR 1 R 2 (A, R 1 및 R 2 는 명세서에 정의된 바와 같음)의 아미드 화합물을 함유하는 살진균제에 관한 것이다.  본 발명에 따른 시약은 보트리티스에 대해 특히 사용될 수 있다.
Patent KR-19990044614-A (KR)
Title: 항암제로서의 2-[2-[(2-하이드록시에틸)아미노]에틸]-5-[(2-메틸아미노)에틸]아미노]인다졸로[4,3-ｇｈ]이소퀴놀린-6(2Ｈ)-온
IPC: C07D211/08
Filed: 1996-09-09
Abstract: 본 발명은 구조식(I)과 같은 2-[2-[(2-하이드록시에틸)아미노]에틸]-5-[[2-메틸아미노)에틸]아미노]인다졸로[4,3-gh]이소퀴놀린-6(2H)-온 및 이들의 약학적으로 허용가능한 산부가염에 관한 것이다. 본 발명의 화합물은 높은 항암 활성을 갖고 있다.
Patent KR-19990063678-A (KR)
IPC: G01S5/06
Filed: 1995-09-20
Abstract: PCT No. PCT/GB95/02211 Sec. 371 Date Mar. 20, 1998 Sec. 102(e) Date Mar. 20, 1998 PCT Filed Sep. 20, 1995 PCT Pub. No. WO97/11383 PCT Pub. Date Mar. 27, 1997A method of determining the location of an unknown source (10) transmitting an unknown signal to satellite relays (14 and 16) comprises receiving the signal from the relays at respective receivers (18). The receivers (18) receive reference signals via respective relays from a common source (22). The unknown signal and reference signal received by each receiver (18) are processed coherently to preserve their timing and phase information relative to one another independently of signals received elsewhere. The signals are frequency downconverted and digitised, and transferred to a common processing computer (150). The computer (150) performs cross ambiguity function processing of the reference signals to determine their relative Differential Time Offset (DTO) and Differential Frequency Offset (DFO). It performs the like for the received unknown signals to determine relative DTO and DFO, relative time and frequency shifts being introduced between the unknown signals by incorporation of the reference signal DTO and DFO in order to enable the unknown signal DFO to be determined relative to the reference signal DFO. The reference signals are also employed to counteract phase noise and frequency drift effects in the unknown signals. From the unknown signal DTO and DFO the position of the unknown source (10) is calculated.
Patent KR-19990066969-A (KR)
Title: 자동차 차륜 브레이크를 작동하기 위한 장치
IPC: F16D65/14
Filed: 1996-09-24
Abstract: 본 발명은 전기 구동모터(12)와 나사롤러 드라이브(14)를 구비한, 차륜 브레이크(18,19)의 작동을 위한 장치(10)에 관한 것이다. 본 발명은 소형의 구동모터(12)를 작동하기 위해, 너트(20)내에서, 또한, 나사롤러 드라이브(14)의 축(22)상에서 회전하는 유성롤러(24)를 나선각 없이 면이 거친 윤곽부(30,32)에 의해 축방향으로너트(20)내에 고정하고, 면이 매끄러운 윤곽부(26)로 유성롤러(24)가 맞물리는 미세 피치 나사(28; fine pitch thread)를 통하여 축(22)을 구동시키는 것을 제안하고있다. 본 발명의 추가적인 형태에서는 너트(20)를 동시에 전기 구동모터(12)의 회전자로 구성하고 있다.
Patent KR-20000005286-A (KR)
Title: Enzymatic process for stereoselective preparation of therapeutic amides
Inventor: CROSBY JOHN
IPC: C07C255/14
Filed: 1997-04-07
Abstract: PURPOSE: An enzymatic process for stereo selective preparation of N-aryl or -pyridyl propanamides having a tertiary alcohol stereogenic center is provided. The N-aryl or -pyridyl propanamides are cellular potassium channel opener and are thus useful in the treatment of urinary incontinence, hypertension, asthma, peripheral vascular disease and angina. Also, provided is a process for stereo selective synthesis of enantiomer intermediates useful in the synthesis of such compound. CONSTITUTION: The first process comprises preparing an optically active compound, N-aryl or -pyridyl propanamide of formula I by treating a racemic compound of formula II with a hydrolase and the second process comprises treating a racemic compound, an ester of 3,3,3-trifluro-2-hydroxy-2-methylpropanoic acid of formula V with a hydrolase.
Patent KR-20000010556-A (KR)
Title: Inductive charge control device
Inventor: GUERMEUR YVES
IPC: H01F7/18
Filed: 1997-04-24
Abstract: PURPOSE: A device for controlling an inductive charge is provided, which enables a quick open transistor to be controlled over a wide range of supply voltage at a voltage floating for the voltage of coil terminal. CONSTITUTION: The device for controlling an inductive charge, particularly, of an electromagnetic coil, comprises a chopper switch in series with the coil and governed by a pulse width modulator, and an opening switch which is also mounted in series with the coil. A transformer converter (20) has two secondary windings, of which one is connected to a modulator (11) and the other one is connected to the grid of the opening transistor (T2) via a switch (25) biased by the opening signal.
Patent KR-20000065182-A (KR)
Title: 주입관통식피처장착형물필터
IPC: C02F1/50
Filed: 1997-05-02
Abstract: 중력에 의해 공급되어 흐르는 물을 여과하는 장치(10)는 살균 재료 및 환상 보유 챔버를 구비하는 스파이럴 필터(30, 80)와 챔버 하우징(11)을 포함한다.  몇몇 다공성 분리 디스크, 소정 체적의 여과 매체(64) 및 시스트 막(70)이 스파이럴 필터 및 보유 챔버 아래에 위치된다.  장치(10)는 여과된 물에 존재하는 박테리아, 바이러스 및 시스트의 개수를 상당히 감소시키는 데 있어서 효과적이다.  여과 장치는 도시의 유동 및 다른 시스템에서의 사용을 위하여 크기가 완전히 조절 가능한 설계로 된다.  유동 경로의 구성은 유동에 대한 최소한의 저항을 유지하면서 여과 및 처리 공정의 효율성을 향상시키도록 과립형 활성 재료로 덧대어진 최소 폭의 얇은 채널일 수 있다.  스파이럴 또는 헬리컬의 기하학적 형상은 공간이 제한되는 경우에 집약적인 배열을 제공한다.  과립형 재료로 덧대어진 유체 채널은 층류 유동을 붕괴시키고, 치과용 물 처리 라인에서 통상적으로 발견되고 설명되는 바이오필름 등의 박테리아성 오염물의 성장에 열악한 환경을 생성한다.
Patent KR-20000016589-A (KR)
Title: Method of growing nitride semiconductors, nitride semiconductor substrate and nitride semiconductor device
Inventor: KIYOKU HIROYUKI
IPC: H01L33/16
Filed: 1998-04-09
Abstract: PURPOSE: A method of growing a nitride semiconductor crystal having very few crystal defects and capable of being used as a substrate is provided. CONSTITUTION: The method comprises the step of forming a first selective growth mask equipped with a plurality of first windows for selectively exposing the surface of a support on the support having a main plane and including different kinds of substrates made of materials different from those of a nitride semiconductor, and the step of growing the nitride semiconductor, by using a gaseous Group III element source and a gaseous nitrogen source, until portions of the nitride semiconductor crystal growing in adjacent windows from the surface of the support exposed from the window join with one another on the upper surface of the selective growth mask.