baber/WOPTO huggingface dataset:
Patent KR-920004367-B1 (KR)
Title: Semiconductor device protected from static charge breakdown
Inventor: LEE JONG-SOG
IPC: H01L27/04
Filed: 1989-09-23
Granted: 1992-06-04
Abstract: The conductor is deposed between a metal layer  connected  to an input pad and N+ diffusion layer to prevent spark  due  to  the static electricity. The protector includes a N+  diffusion  region (1,1',1") formed between field  dioxide  layers  (9,9",9",9'"),  a polycrystal silicon layer (3,3',3") formed  on  the  N+  diffusion layer, an insulating layer (10) formed on the N+  diffusion  layer and the polycrystal silicon layer, first  metal  layers  (4,4',4") formed by filling matal on openings of the insulating layer  (10), an insulating layer (11) formed on the first metal layer  and  the insulating layer (10), and a second metal layer (7) formed  on  an opening of the insulating layer (11) and connected  to  the  first metal layer (4).
Patent KR-0135752-B1 (KR)
Inventor: OUCHI HIDEO
IPC: G11B5/50
Filed: 1989-11-29
Granted: 1998-04-22
Abstract: 내용 없음
Patent KR-0150450-B1 (KR)
Inventor: WILKINS SUZANNE R
IPC: G11B19/20
Filed: 1990-01-23
Granted: 1998-10-15
Abstract: 내용 없음
Patent KR-0135879-B1 (KR)
Title: Data modulation and demodulation apparatus of cable tv
Inventor: KANG WOO-HYUN
IPC: H04N7/10
Filed: 1990-04-24
Granted: 1998-04-27
Abstract: Disclosed is a data modulation/demodulation device comprising a comparison portion(10), a level test portion(20), a band filtering portion(30), a mixing portion(60), a demodulation portion(80), and a first through third amplification portions(40, 70, 90). The comparison portion(10) receives a frequency shift keying modulation signal in the non-inverting port and receives a reference voltage in the inverting port and then outputs the compared signal. The level test portion(20) tests the level of the compared signal output from the comparison portion(10). The band filtering portion(30) makes a frequency within a predetermined scope among the outputs of the comparison portion(10) pass. The mixing portion(60) mixes the frequency generated in the oscillation portion(50) with the signal passed through the amplification portion(40) from the band filtering portion(30). The demodulation portion(80) demodulates the FSK signal passed through the second amplification portion(70) from the mixing portion(60). The first through third amplification portions(40, 70, 90) amplify the signal transmitted from an output ports of the band filtering portion(30), the mixing portion(60) and the demodulation portion(80) connected each other.
Patent KR-920009367-B1 (KR)
Title: Thin film thermal head and its manufacturing method of protective film
Inventor: HONG SOK-KYONG
IPC: H04N1/032
Filed: 1990-05-11
Granted: 1992-10-15
Abstract: A method for manufacturing the  protecting  film  of  thermal head using the sputtering system comprising a sputter  chamber,  a cathode applying the RF power, a substrate holder,  a  gate  valve and a vacuum pump. The method is executed by the following  steps: installing the target of the wanted  protecting  material  on  the cathode  and  a  substrate  on  the  substrate  holder;  injecting non-reactive gas into the sputter chamber through  the  gas  pipe; applying the RF power on the target side; applying lower RF  power than that of the target side on the substrate side. This method is useful for preventing  micro  cracks  and  projecting  parts  from forming in the protecting film.
Patent KR-930002289-B1 (KR)
Inventor: GUMAGAI JUMPEI
IPC: G11C11/4097
Filed: 1990-05-23
Granted: 1993-03-29
Abstract: 내용 없음.
Patent KR-0125580-B1 (KR)
Title: 조발용 가위
IPC: B26B13/08
Filed: 1990-06-01
Granted: 1998-07-01
Abstract: 내용 없음
Patent KR-930011425-B1 (KR)
Inventor: KNOX WAYNE H
IPC: G01R31/308
Filed: 1990-06-21
Granted: 1993-12-06
Abstract: 내용 없음.
Patent KR-930004912-B1 (KR)
Title: Dialer circuit and control method for melody circuit
Inventor: SHIN YONG-MIN
IPC: H04M1/00
Filed: 1990-08-29
Granted: 1993-06-10
Abstract: The dialer circuit (100) for  controlling  a  melody  circuit (200) has a hold circuit. The hold circuit (20)  receives  on-hook dial input signal, hook-switch input bar  signal  and  hold  input signal, and provides the key inhibit bit signal  to  a  key  input latch section (11). The key input latch section latches  a  number of key input signals into the predetermined pulse signals. A  dial circuit (12)  controls  the   key   input   latch   section   and simultaneously  executes  the  dialing  according  to  the   pulse signals. The hold circuit includes two T flip-flops for  producing hook output control signal and hold output  signal,  and  a  reset circuit for resetting two T  flip-flops  and  producing  the  chip enable signal.
Patent KR-930002972-B1 (KR)
Title: Method and device for injecting ground hardening agent
Inventor: NAKASHINI WATARU
IPC: E02D3/12
Filed: 1990-09-25
Granted: 1993-04-16
Abstract: The apparatus comprises an injection rod  (1),  an  operating mechanism (2) and a complex  injection  nozzle  (3).  The  complex injection nozzle (3) is mounted on the tip of  the  injection  rod (1) having multi structured passages and moving back and forth  or rotating or pivoting 360 deg.. The rod also has openings  (5)  for sucking flime. The nozzle (3) has a core nozzle (31) for injecting compressed ground hardening material and a surrounding nozzle (32) for injecting compressed air. The slime generated on injection  of air is discharged via the suction hole (5)  by  using  accumulated internal pressure energy from  injection  pressure;  at  the  same time,  ground  hardening  material  is  injected  with  rotatingly moveable injection rod (1). The discharged slime is  filtered  for dehydration and disposal. The apparatus is  useful  for  hardening soft ground to prepare the foundation of constructions.
Patent KR-930008905-B1 (KR)
Title: Manufacturing method of multi-layers in cmos tr
Inventor: LEE KYU-PHIL
IPC: H01L27/06
Filed: 1990-09-29
Granted: 1993-09-16
Abstract: The epitaxial single crystal or polycrystal silicon layer  is used as a substrate of P MOS  transistor,  and  the  electrode  is formed on the  above  silicon  layer,  then  the  driving  current characteristic  is  improved  by  keeping  the  potential  of  the substrate constant. The drain region for N MOS  transistor  formed on the single crystal silicon substrate is connected  directly  to the drain region for P MOS  transistor  formed  on  the  epitaxial single crystal or polycrystal silicon  layer  so  that  the  large integrated CMOS transistor with multilayer can be fabricated.
Patent KR-940006735-B1 (KR)
Title: Encoding system of a simulcast high definition television and method thereof
Inventor: YANG TAE-KWON
IPC: H04N21/2383
Filed: 1991-01-22
Granted: 1994-07-27
Abstract: The encoding apparatus and method includes a dynamic adaptive scanning converter, a three-dimensional quadrature mirror filter bank and adaptive selector, a YIQ DC data transmitter, a filter select data transmitter, an adaptive modulator, first and second block adaptive constant transmitters, a transmission gamma processor, an audio signal processor, a transmission rate converter, a data under processor, first and second multiplexor, a pseudo random number data generator, a pseudo random number address generator, a scrambler, first and second channel equalizing filters, and an output modulator, thereby obtaining improved picture quality.
Patent KR-930008867-B1 (KR)
Inventor: YU BYONG-DOK
IPC: H01L23/52
Filed: 1991-04-24
Granted: 1993-09-16
Abstract: 내용 없음.
Patent KR-960005381-B1 (KR)
Inventor: KADOTA MICHIO
IPC: H03H9/25
Filed: 1991-05-17
Granted: 1996-04-24
Abstract: 내용 없음.
Patent KR-950000746-B1 (KR)
Inventor: FURUYA NOBUMASA
IPC: G03G15/01
Filed: 1991-08-02
Granted: 1995-01-28
Abstract: 내용 없음.
Patent KR-940004348-B1 (KR)
Inventor: MORIDA SHIGEKI
IPC: B60R16/023
Filed: 1991-08-22
Granted: 1994-05-23
Abstract: 내용 없음.
Patent KR-940009362-B1 (KR)
Title: Bipolar device with vertical collector and manufacturing method thereof
Inventor: KIM KWI-DONG
IPC: H01L27/082
Filed: 1991-11-25
Granted: 1994-10-07
Abstract: The PSA (polysilicon self aligned) bipolar device for increasing the integration ratio and the switching speed includes a collector electrode (20) having a trench structure (20) and isolated by an oxide layer (10) self-aligning a base (52) and the collector electrodes as well as removing the contact capacitance of the collector. An emitter electrode (50) and the base electrodes are formed by the same polycrystal silicon and isolated by an oxide layer (55).
Patent KR-940009828-B1 (KR)
Title: Pulse input module for controlling automation
Inventor: KIM SANG-CHOL
IPC: G06F13/00
Filed: 1991-12-03
Granted: 1994-10-17
Abstract: The pulse input module provides optimizing control for the whole huge ship . The module comprises: an address decoder unit connected with an I/O card address signal line, a gate signal line and a read/write signal line determining the channel for transferring pulse input signal, channel units connected with the address decoder unit, a pulse input signal line, a frequency select signal line and a mode select signal line counting the number of frequency or pulse, channel initialization units connected with supply voltage & channel unit initializing the pulse input module.
Patent KR-940010172-B1 (KR)
Title: Multi-color super impose circuit using screen division
Inventor: KIM HYONG-KWON
IPC: H04N5/225
Filed: 1991-12-04
Granted: 1994-10-22
Abstract: The multicolored superimpose circuit for a camcorder displays a title part in multicolor by using a screen six division function in performing the superimpose function. The circuit includes a switch connected to a luminance signal input terminal; a low pass filter connected to the switch; an analog-to-digital converter connected with the low pass filter and the switch; a screen divider connected to the analog-to-digital converter; a digital integrator connected to the screen divider; a microcomputer; a superimposing part connected with the digital integrator and the microcomputer; and a memory.
Patent KR-940003518-B1 (KR)
Title: Remote controller
Inventor: SONG KI-DOK
IPC: H04Q9/00
Filed: 1991-12-04
Granted: 1994-04-23
Abstract: The remote controller includes an oscillator, a key input for supplying a key input signal, a logic control circuit for outputting a signal for logic control, modes and data registers for receiving key input from the key input and storing a peculiar number and genuine data, a multiplexer for outputting the data stored in the mode and data registers, a shift register for transmitting the output of the multiplexer, and an output control circuit for outputting the signal output from the shift register, thereby reducing the production cost.
Patent KR-940011745-B1 (KR)
Title: Semiconductor device isolation method
Inventor: KIM YONG-BAE
IPC: H01L21/76
Filed: 1991-12-17
Granted: 1994-12-23
Abstract: The method includes the steps of forming a trench to use an SiOxNy film and an oxide film as mask, forming an oxide film on the side wall of the trench, filling the inner part of the trench with polysilicon materials, oxidizing the partial polysilicon layer, forming an oxide film thereon by thermal oxidation process, and removing the mask to form a final device isolation region. The subthreshold curve characteristic is improved because of easily controlling the trench bird's beak.
Patent KR-100226158-B1 (KR)
Title: Homologous recombination for universal donor cells and chimeric mammalian hosts
Inventor: KUCHERLAPATI RAJU S
IPC: C07K14/74
Filed: 1990-07-25
Granted: 1999-10-15
Abstract: Homologous recombination is employed to inactivate genes, particularly genes associated with MHC antigenes. Particularly, the beta 2-microglobulin gene is inactivated for reducing or eliminating Class I MHC antigenes. The resulting cells may be used as universal donors. In addition, embryonic stem cells may be modified by homologous recombination for use in producing chimeric or transgenic mammalian hosts.
Patent KR-960004126-B1 (KR)
Inventor: NAKAMURA KIMIAKI
IPC: G09F9/35
Filed: 1992-02-01
Granted: 1996-03-26
Abstract: 내용 없음.
Patent KR-950001474-B1 (KR)
Title: Apparatus for controlling air conditioner
Inventor: LEE MYONG-SU
IPC: F24F11/02
Filed: 1992-02-10
Granted: 1995-02-24
Abstract: When control many air conditioners, each can be controlled by an individual control device, or can be controlled by a remote main controller in special cases. To do this, the air conditioning devices should be controlled by the signal from the main controller. The microprocessor unit (10) is connected with a apparatus abnormality sensing circuit (50), a gas leak sensing circuit (60), a temperature sensing circuit (70) and a unique-ID setting device (20) via I/O circuit (40). Each individual air conditioner control device ID is archived in microprocessor unit to be used by main controller to verify which is failing. The communication status are displayed on display unit (110).
Patent KR-950000031-B1 (KR)
Title: Process for preparing bezoar solution
Inventor: HAN YONG-NAM
IPC: A61K9/08
Filed: 1992-02-15
Granted: 1995-01-07
Abstract: The formulation of ox bezoar (I) solution comprises the dispersing ox bezoar powder in 50-90 % ethanol solution at pH 8-9 with in NaOH solution containing EDTA and one of paraoxy benzoate or its ester, butyl hydroxy anisol, tocopherol is used as stabilizer. This process is operated in nitrogen gas to prevent the oxidization of bilirubin to biliverdin.
Patent KR-100186879-B1 (KR)
Inventor: CHIN-SHENCT TIAO
IPC: C08G71/04
Filed: 1992-03-02
Granted: 1999-05-15
Abstract: 승온승안 노출시의 압축 고정성과 유연성 저하 현상에 대한 저항성이 개선되는 저밀도 폴리우레탄 발포물을 1.0 의 이소시아네이트 지수에서 작용도가 2.3 내지 2.7 인 폴리이소시아네이트를 폴리올, 촉매, 취입제 혼합물과 반응시켜 제조하고 이 폴리올은 5,000 이상의 분자량을 가진 폴리에테르 폴리올과 고분자 폴리올의 혼합물이며 촉매는 다량의 아민 촉매와 소량의 금속 촉매의 혼합물이다. 이 발명에서 만든 발포물은 가황처리로 조립하는 운동화 부품용으로 적절하다.
Patent KR-950000318-B1 (KR)
Title: Cassette deck door open/close control circuit
Inventor: CHOE SON-UN
IPC: G11B33/02
Filed: 1992-03-05
Granted: 1995-01-13
Abstract: a door open-close signal generating unit (10) which has transitors (Q1,Q2) that generate signals for a door opening and closing; a cassette door control unit (12) which closes a cassette door by controlling the direction of rotation of the motor (M), after receiving the door close output of the door open-close signal generating unit; a cassette door opening control unit (14) which opens a cassette door by reversing the rotation of the motor after receiving the door open signal from the door open-close signal generating unit; and a switch (SW2) which stops the movement of the motor (M).
Patent KR-940003000-B1 (KR)
Title: Automatic sectionalizing breaking switch
Inventor: KIM JONG-SOK
IPC: H02H3/08
Filed: 1992-03-09
Granted: 1994-04-09
Abstract: a sectionalizer function unit and a overload cutoff unit. The detector which detects the status of no voltage in the power supply even in the case of the light load by setting limiting current lower than 0.5 [A  is disposed between the rectifying circuit and the current suppressing circuit of the sectionalizer function unit.
Patent KR-940011181-B1 (KR)
Title: Humidifier for wallpaper
Inventor: HONG SUN-CHOL
IPC: B44C7/00
Filed: 1992-03-26
Granted: 1994-11-26
Abstract: When any one wants to paper the wall on the spot with the wall paper which is dried after the other side of paper is paste-applied, this humidifying device can conveniently restore moisture to the paste-applied side of paper. The device comprises a wall paper transporting part, a paste-applying roller, a water container, a wall paper feeder, and the supporter which is constructed with several pipes being connected to each other so as to support the device to maintain horizontally.
Patent KR-100256014-B1 (KR)
Inventor: KAWAGUCHI YUKI
IPC: G11B27/36
Filed: 1992-04-13
Granted: 2000-05-01
Abstract: 매스터 VTR 에 의해서 재생된 신호를 복재 VTRs 에 전송하여 복수의 복제 VTRs의 각각의 복제 테이프에 동시에 기록함으로써 복수의 복제 테이프를 생성하는 장치에 있어서, 양방향의 원격 제어 유닛으로부터의 제어 신호는 제1 변조 주파수로 변조되어 양방향의 제어 신호선을 통해 복제 VTRs 에 전송된다. 만약, 상기 복제 VTRs 중 하나로부터 응답이 요구된다면, 그와 같은 복제 VTRs 로부터의 응답 신호는 상기 제1 변조 주파수와 상이한 제2 변조 주파수로 변조되고, 원격 제어 유닛으로부터 신호의 전송이 정지되는 동안, 변조된 응답 신호는 양방향의 제어 신호선을 통해 원격 제어 유닛에 전송된다. 매스터 VTR 에 의해서 재생된 신호 대신에 테스트 신호가 복제 VTRs 에 전송되고, 각각의 복제 VTRs 에 의해서 기록된 테스트 신호의 재생으로부터 복제 VTRs 의 기록 동작에서의 결함이 검출된다.
Patent KR-950005504-B1 (KR)
Title: Novel aromatic diamine monomer and thereof preparation
Inventor: KIM JIN-IL
IPC: C07C233/80
Filed: 1992-05-13
Granted: 1995-05-24
Abstract: The aromatic (amide-ester) diamine compound of formula (II) is prepared by pressure-reacting an aromatic dinitro compound of formula (I) with a hydrogen and a reduction catalyst i.e. platinum oxide, palladium/carbon or raney nickel in the organic solvent i.e. acetic acid, ethanol, methanol, ethyl acetate or dimethyl formamide. The aromatic dinitro compound of formula (I) is prepared by adding a tertiary amime and a p- or m-aminophenol to a tertiary amide or ketone solvent to make an even solution, and reacting the solution with p-and/or m-nitrobenzoyl chloride. The aromatic diamine compound (II) has a good heat resistance and chemical resistance, and is useful as a raw material in the prodn. of an aromatic polyamide-ester resin.
Patent KR-940008520-B1 (KR)
Title: Automatic melting apparatus of a range
Inventor: CHON HYO-SHIK
IPC: F24C7/02
Filed: 1992-05-26
Granted: 1994-09-22
Abstract: The apparatus measures the load capacity of a frozen food by use of a high frequency senser whose resistance value varies in proportion to the heat caused by the microwave absorbed, and melts the frozen food according to the measured load capacity. The apparatus comprises a high frequency sensor (9) positioned within a heating chamber (1); means (10) generating voltage according to the sensed microwave value; mean s(11) measuring the generated voltage; means (12) recording the voltage value as an initial value; means (13) measuring an average voltage for an interval; means (14) recording the difference between the initial and average values; means (15A) calculating the melting load capacity; means (15B) calculating the high frequency generation time and level.
Patent KR-950001771-B1 (KR)
Title: Automatic quality testing machine for injection syringes
Inventor: KIM KI-PYO
IPC: A61M5/32
Filed: 1992-07-10
Granted: 1995-03-02
Abstract: The apparatus for selecting the abnormal injection needle before assembling the syringe includes a cylinder (2) supplying air to the needle, an assembly of air nozzles (6) connecting between the cylinder and a jig (4) inserting and transferring a number of needles, a number of cylinders (8) operating the cylinder (2) to detect the abnormal needles, a cylinder (10) attaching/detaching the assembly to/from the jig, an assembly (12) removing the detected abnormal needles, and a sensor (38) detecting the operation state of the cylinder (8).
Patent KR-0145335-B1 (KR)
Title: 이미지 센서
IPC: H04N1/028
Filed: 1992-10-06
Granted: 1998-07-01
Abstract: 본 발명은 이미지 센서의 수광부로 이용되는 센서 IC의 제조상 이유에 의해 발생하는 감도의 불균일과 해상도 불량을 해소하는 것을 목적으로 하는 이미지 센서에 관한 것으로, 원고에서의 반사광을 수광하는 수광부를 구성하는 센서 IC의 양단에 위치하는 수광소자를 제외하고 다른 수광소자에 있어서 그 수광영역 안측에 설치되어 있는 전극과 그 주변 부분에 수광 감도를 조정하기 위한 차광막을 각각 설치한 것을 특징으로 한다.
Patent KR-970000606-B1 (KR)
Inventor: NAGATA HIDEYUKI
IPC: B43L13/02
Filed: 1992-10-20
Granted: 1997-01-16
Abstract: 내용 없음.
Patent KR-0168776-B1 (KR)
Inventor: LEE CHANG-DUK
IPC: H04Q1/30
Filed: 1992-11-24
Granted: 1999-02-01
Abstract: 전자식 교환기의 종합정보 통신망의 공통 채널 시그널 프로세서의 이중화 방법에 있어서, X-로딩을 하여 상기 X-로딩 값으로부터 신호 링크 고장 초기 링크의 활성화 여부 및 진행 여부를 체킹한다. 
     상기 신호 링크 고장일시 고장 처리하고 활성화가 안되었을 시 활성화시키고 활성화 진행중일 때 플랙을 세팅 활성화 진행을 처리하고 상기 활성화 진행중이 아닐 때 신호 링크의 상태를 체크하여 신호 링크의 활성화를 처리한다.
Patent KR-0171393-B1 (KR)
Title: Method using 5,10,15,20-tetrakis(r-carboxyphenyl)porphine for detecting and treating lung cancer
Inventor: COLE DEAN A
IPC: A61K49/00
Filed: 1991-06-17
Granted: 1999-05-15
Abstract: Method using tetra-aryl porphyrins for and, in particular, 5,10,15,20-tetrakis(4-carboxyphenyl)porphine as a fluorescent tracer for cancers of the lung, and as a radiotracer therefor as a complex with 67Cu. The latter complex also provides a source of beta radiation for selective destruction of lung malignancies as well as gamma radiation useful for image analysis of the situs thereof by single photon emission computed tomography, as an example, both in vivo. Copper-64 may be substituted for the 67Cu if only radiotracer characteristics are of interest. This lighter isotope of copper is a positron emitter, and positron emission tomography techniques can be used to locate the malignant tissue mass.
Patent KR-970006500-B1 (KR)
Title: Activation apparatus for silicic acid in water
Inventor: OHE TAKEO
IPC: C02F5/00
Filed: 1993-02-11
Granted: 1997-04-28
Abstract: An apparatus for activating silicic acid contained in water, in which a helical antenna which generates an oscillating magnetic/electric field by use of a high-frequency power source and has a length 1, 1/2 or 1/4 times as long as the wavelength of the high-frequency wave is disposed in the direction of the central axis of a cylindrical tank; a water inlet pipe provided with a water injection pipe member for introducing water into the tank is disposed at the top or in the upper part of the side wall of the tank; a water drain pipe is disposed at the bottom or in the lower part of the tank; and the angle  theta  formed by the axis of the injection pipe and the straight line connecting a point where the axis of the injection pipe and the circumference of the tank intersect and the axis of the cylinder of the tank satisfies the equation: 0 DEG  <  theta  </= 90 DEG , so that water supplied into the tank forms a whirling flow that crosses the magnetic field at a right angle. Silicic acid or silicate ion contained in water can be activated in an highly effective manner by using the simple apparatus according to the invention. <IMAGE>
Patent KR-100277822-B1 (KR)
IPC: B01J37/20
Filed: 1993-03-31
Granted: 2001-01-15
Abstract: Process for incorporating, in the porosity of a catalyst for processing hydrocarbons, a sulphurising agent chosen from the group consisting of elemental sulphur and organic polysulphides with the aid of a solvent, the process being characterised in that the solvent contains wholly or partially a constituent of the olefin or olefinic cut type, for example of the vegetable oil type, or a similar constituent. The use of such a constituent makes it possible to reduce appreciably the exothermic effect (for example curve 4 of the figure), which is produced during the presulphurising, in comparison with the exothermic effects obtained without the use of such a constituent (for example curve 1). <IMAGE>
Patent KR-0125257-B1 (KR)
Title: Magnesium heat cell and its manufacturing method
Inventor: OH SE-WOONG
IPC: H01M8/00
Filed: 1993-05-21
Granted: 1997-12-15
Abstract: The present invention relates to a magnesium thermal battery and a manufacturing method thereof. The magnesium thermal battery sequentially deposits an ignition layer(3), thermal insulation layer(4), a lower part connection plate(5), a heating layer(6), anode bottom(7), FeS2/Licl-Kcl negative layer(8), electrolytic layer(9), Mg positive layer(10), and an upper part connection plate(11). A blasting fuse(12) is connected to a positive layer(10). A percussion cap(13) is connected to a lower part of the ignition layer(3). The battery is enclosed by the external thermal insulations(14)(15) and an insulation material(17), and is stored as a solid state.
Patent KR-960004777-B1 (KR)
Inventor: NISHIHARA MUNEKAZU
IPC: C23C16/46
Filed: 1993-05-31
Granted: 1996-04-13
Abstract: 내용 없음.
Patent KR-100246116-B1 (KR)
Inventor: SIMIZMA SAHIRO
IPC: H01L21/00
Filed: 1993-06-11
Granted: 2000-03-15
Abstract: 웨이퍼(W)의 플라스마 에칭장치는 전자생성실, 가속실(8), 처리실(3)을 구비한다. 전자생성실에서 생성된 플라스마에서 전자(e - )가 인출되고 가속되어 처리실에 전자빔으로서 도입된다. 처리실(3)에는 반도체 웨이퍼(W)가 전자빔의 도입방향과 평행하게 되도록 수평하게 배치된다. 처리실(3)에는 처리가스가 도입되고, 전자빔에 의해 여기되어 플라스마화되고, 이 플라스마를 사용하여 웨이퍼(W)의 에칭을 할 수 있다. 처리실(3)에는 자장이 형성되고, 이것은 조주에 있어서 전자빔을 수평면내에서는 양측으로 분기함과 동시에, 수직면내에 있어서는 압축하여 편평하게 하도록 형성된다. 또 자장은 웨이퍼(W)가 배치된 위치에 있어서 전자빔을 수평방향으로 반송하도록 형성된다. 따라서, 웨이퍼(W) 전면에 걸쳐 고밀도이며 균일한 분포를 갖는 시트상 플라스마 영역이 형성된다.