baber/WOPTO huggingface dataset:
Patent KR-20020053359-A (KR)
Title: Method for corresponding a battery voltage while car is idle
Inventor: SA GONG HEON
IPC: H02J7/14
Filed: 2000-12-27
Abstract: PURPOSE: A method of compensating a battery voltage during engine idle is provided to improve an idle stability of a car by controlling an idle RPM in connection with a degree of voltage decreasing rate when the battery voltage is decreased by an electric load of the car. CONSTITUTION: The method of compensating a battery voltage includes the first step of determining whether an idle switch is switched on(S110). In the second step, it is determined whether a predetermined time period is passed since the idle switch is switched on(S120). In the third step, it is determined whether a current battery voltage is less than a reference voltage(S130). In the fourth step, a battery working data is calculated when the current battery voltage is less than the reference voltage(S140). In the fifth step, a compensation RPM is calculated based on the battery working data(S150). And, in the sixth step, a voltage compensation RPM is calculated by adding a purpose RPM to the compensation RPM(S160).
Patent KR-20010022250-A (KR)
Title: 중질유의 수소화 처리 방법
IPC: C10G45/04
Filed: 1999-05-25
Abstract: 본 발명은 중질유의 수소화 처리 방법, 상세하게는 촉매의 일부에 재생촉매를 이용한 중질유의 수소화 처리방법, 구체적으로는, 탈질소 방법 또한 탈황 방법에 관한 것이다.  재생촉매로 이루어진 층 또는 재생촉매를 함유한 층에 중질유를 통과시키는 것을 특징으로 하며, 촉매층의 특정한 배치를 취함으로써 통상의 신 촉매를 사용한 수소화 처리 방법과 동일한 조건에서 양호한 수소화 처리반응을 수행할 수 있고, 사용완료 촉매의 유효한 이용방법으로서 우수한 효과를 갖고 있다.
Patent KR-20010023457-A (KR)
IPC: H01S5/022
Filed: 1998-08-21
Abstract: A substrate having an optical element on an input surface thereof receives a light beam not having a desired beam shape and shapes the light beam into a predetermined intensity distribution. The substrate may further include a second optical element for providing a predetermined phase pattern to the light beam provided by the first optical element. The first optical element may, for example, circularize an elliptical light beam using a soft aperture for differential power attenuation or by altering the divergence of the light beam along the different axes of the light beam. When the divergence angles are altered and the collimating optical element is provided on the output surface, the thickness of the transparent substrate is determined in accordance with a resultant difference in the divergence and/or with the initial difference in beam size along each axis and with a required circularity. A light source is mounted close to the first optical element in order to minimize the amount of differing divergence present along the different axes of the light beam. The optical elements may be diffractive, refractive, or hybrids thereof and are preferably prepared photolithographically on the substrate itself. The light source may be mounted using fiducial marks and the photolithographic processes for forming the optical elements may also use fiducial marks. All elements of the integrated beam shaper may be formed on a planar, wafer level.
Patent KR-20010023922-A (KR)
IPC: A61F13/15
Filed: 1998-09-11
Abstract: 기저귀, 생리대, 실금자용 가먼트 등과 같은 다양한 흡수성 물품상의 배면쉬이트로서 사용하기 위한 통기성, 액체-불투과성 천공된 필름/부직포 적층물 (10)이 제공된다.  적층물은 통기성 중합체 필름층 (20), 천공된 필름층 (30) 및 부직웹층 (12)로 형성된다.  층들은 통기성 중합체 필름층이 부직웹층과 천공된 필름층 사이에 끼워져 있거나, 천공된 필름층이 부직웹층과 통기성 필름층사이에 끼워져 있는 배열로 부착될 수 있다.  적층물의 제조 방법 또한 제공된다.
Patent KR-20010024057-A (KR)
Title: 용접 열 영향부의 연화가 감소된 고강도 강판
IPC: C22C38/14
Filed: 1999-07-15
Abstract: 용접 후 열 영향부의 연화에 대한 저항성, 우수한 성형성 및 우수한 피로 특성을 가진 고강도 강판은, 중량 %로, C : 0.01 내지 0.15%, Si : 0.005 내지 1.0%, Mn : 0.1 내지 2.2%, P : 0.001 내지 0.06%, S : 0.001 내지 0.01%, N : 0.0005 내지 0.01%, Al :  0.001 내지 0.1%, Nb : 0.005 내지 0.05%, Mo : 0.05 내지 0.5%, Fe : 주 성분을 구성하고, 여기에서 상기 구성 성분은 다음 식(A)을 만족한다. 
     0.22 ≥ C(%) + (Si/30)(%) + (Mn/20)(%) + (Mo/15)(%) ..... (A)
Patent KR-20010024580-A (KR)
Title: 프로그램에 의해 자동으로 제어되는 가정용 기기
IPC: G05B19/10
Filed: 1998-11-04
Abstract: 제어 스크린(1)의 제어 장치(3-9, 17)가 개별 작동 프로그램 흐름의 개별 기능의 입력을 위해 제공된다. 작동 프로그램 흐름은 한 개의 이름으로 시작될 수 있고, 마이크로프로세서가 안내하는 순서에 따라 작동될 수 있다. 제어 장치는 정해진 작동 프로그램 순서나 정해진 프로그램 기능의 패러미터 값을 조절하는 역할도 할 수 있다. 또한, 기능 유닛의 한 개 이상의 정해진 순서로 업데이트 기능을 위한 코드로 작용할 수도 있다.
Patent KR-20010032115-A (KR)
IPC: A61M5/158
Filed: 1998-11-13
Abstract: A securement device (8) includes a simply-structured retention mechanism that permits a portion of a catheter hub or a similar medical article to be easily anchored to a patient, without the use of tape or needles and suturing. A unitary retainer (30) desirably includes a base (34) defining a locator mechanism (28). The locator mechanism interacts with a fitting (12) of the medical device so as to position the medical device relative to the retainer. The locator mechanism also desirably guides the medical device fitting into contact with an adhesive member (24) mounted on an outer surface of the retainer. The locator mechanism may include one or more posts (28) that engage mating holes (20) defined in the medical device fitting (12). The locator mechanism includes a cradle defining an arcuate channel to receive a convex surface of the medical device, or a recess shaped to matingly receive the fitting. The retainer is attached to a flexible anchor pad (32) that includes an adhesive bottom surface, which can be attached to the patient's skin. In use, a health care provider positions the medical device fitting on the retainer in a position established and guided by the locator mechanism, and attaches the fitting to the retainer via the adhesive member.
Patent KR-20010032177-A (KR)
Title: 파형 파이프를 위한 결합 및 연결 부재
IPC: F16L41/10
Filed: 1999-09-27
Abstract: 이 연결 부재(1)는 결합 부재(5)의 영역에서 패킹(7)을 가지고 있으며, 이것은 연결 부재(1)의 하우징(3)과 고정 연결되어 있다.  지지 부재들(9)은 허용되지 않은 압착력으로부터 상기 패킹(7)을 보호한다.  이 하우징(3)과 파형 파이프(2)의 단부 사이에도 패킹(12)이 배열되며, 이것은 상기 연결 부재(1)의 하우징(3)의 내부 재킷(14)과 연결되어 풀을 수 없다.
Patent KR-20010033060-A (KR)
Title: 개구가 구비된 금속박
IPC: B01J35/04
Filed: 1998-12-08
Abstract: 본 발명의 목적은 편평체(flat entity), 특히 기준면으로부터 일정 거리 떨어져 위치하며 일부가 중첩되는 2개 이상의 스트럭쳐(structure; 10, 11, 14)를 가지는 편평체(flat entity)에 관한 것이다.  스트럭쳐(10, 11, 14)가 겹치는 영역(5)에 개구(16)가 형성된다.
Patent KR-20010034087-A (KR)
Title: 포토레지스트막 제거방법 및 장치
IPC: H01L21/306
Filed: 1999-11-12
Abstract: 본 발명은, 환기설비를 위한 코스트나 원료의 코스트를 저감할 수 있고 환경오염도 방지할 수 있는 포토레지스트막의 제거방법 및 그를 위한 장치에 관한것이다. 
     구체적으로는 본 발명은 밀폐된 계내에 있어서, 기판표면상에 도포된 포토레지스트막에 이 포토레지스트막과 대향하여 배치된 포토레지스트막 제거제 공급판으로부터, 오존화가스 및 포토레지스트막 제거용액을 함유하는 포토레지스트막 제거제를 균등하게 또한 연속적 또는 단속적으로 공급하여 이 포토레지스트막을 제거하는 방법 및 그 방법에 사용하기 위한 포토레지스트막 제거장치를 제공한다.
Patent KR-20010034165-A (KR)
Title: 전혈용 크로마토그래피 장치에서의 다가양이온의 중화
IPC: G01N33/48
Filed: 1998-12-29
Abstract: 본원 발명은 적혈구를 응집시키고 모세관 작용에 의해 혈장 또는 혈청을 유동시키기 위한 적혈구 분리제, 및 적혈구 분리제가 당해 장치 및 방법에 대해 가질 수 있는 효과를 중화시키기 위한 중화제를 사용하는 전혈 샘플에 사용하기 위한 크로마토그래피 분석 장치 및 방법에 관한 것이다.
Patent KR-20010034211-A (KR)
Title: 올레핀-중합-촉매로서 비스(테트라히드로-인데닐)메탈로센
IPC: C07C13/465
Filed: 1999-11-10
Abstract: 화학식 (I) 의 신규한 브릿지된 비스(테트라히드로-인데닐) 메탈로센 (식중, M 은 Hf 또는 Zr 이고 ; X 는 모노음이온성 시그마 리간드이고 ; (ZR l   i ) j 는 두개의 테트라히드로-인데닐 잔기를 브릿지하는 이가기이고 ; R 2 및 R 3 는 알킬, 시클로알킬, 아릴, 알킬아릴 또는 아릴알킬 라디칼이고 ; 
     p 는 0 내지 3 이고 ; i 는 1 또는 2 이고 ; j 는 1 내지 4 이고 ; m 은 0 내지 2 이고 ; n 은 0 내지 8 이다).     또한 상기 및 해당 리간드를 함유하는 올레핀 중합용 촉매를 기재한다.
Patent KR-20010041098-A (KR)
IPC: D21H17/70
Filed: 1999-02-18
Abstract: The invention relates to a process for obtaining fibers integral with calcium carbonate particles, in which the fibers to be treated are contacted with carbon dioxide generator means and at least one composition comprising Ca++ ions capable of reacting with the carbon dioxide so as to give "in fine" a precipitation of calcium carbonate "in situ" on the fibers. Preferably, the carbon dioxide generator used is calcium bicarbonate.
Patent KR-20010042497-A (KR)
IPC: G10L19/008
Filed: 1999-04-05
Abstract: A spatial audio coding system, including an encoder and a decoder, operates at very low bit-rates and is useful for audio via the Internet. The listener or listeners preferably are located within a predictable listening area, for example, users of a personal computer or television viewers. An encoder produces a composite audio-information signal representing the soundfield to be reproduced and a directional vector or "steering control signal." The composite audio-information signal has its frequency spectrum broken into a number of subbands, preferably commensurate with the critical bands of the human ear. The steering control signal has a component relating to the dominant direction of the soundfield in each of the subbands. Because the system is based on the premise that only sound from a single direction is heard at any instant, the decoder need not apply a signal to more than two sound transducers at any instant.
Patent KR-20010071186-A (KR)
Title: 금속 부품의 방사능 레벨을 감소시키기 위한 방법
IPC: C02F1/78
Filed: 1999-04-21
Abstract: 본 발명은 금속 부품의 방사능 레벨을 감소시키기 위한 방법에 관한 것이다.  이 경우 산화물 층은 우선 제염 용액에 의해 금속 부품으로부터 제거된다.  그후에 여전히 존재하는 산화 작용제는 제염 용액으로부터 제거된다.  따라서 금속 층이 제거된다.  방사선 핵종이 표면과 인접한 금속 부품 층에만 존재하기 때문에, 남아있는 금속은 통상적인 스크랩 야드로 전달될 수 있다.
Patent KR-20010071204-A (KR)
Title: 유압회로장치
IPC: F15B11/04
Filed: 2000-03-03
Abstract: 분류밸브(5-1)의 출구통로(5b)와 홀드체크밸브(6-1) 사이의 유로(30-1)에서는 부하압력 검출유로(7-1)가 분기하고, 상기 부하검출유로(7-1)는 신호검출유로(9)에 접속되며, 신호검출유로(9)는 유로(12) 및 유로(12)에 설치된 스로틀(14)(면적 at)을 거쳐 탱크(T)로 접속되어 있다.  또한, 부하압력 검출유로(7-1)에서는 제어유로(10-1)가 분기하여 제어실(70)로 접속되어 있다.  부하압력 검출유로(7-1)의 유로(30-1)와 제어유로(10-1)의 분기점 사이의 유로부분(7a)에는 유로(30-1)로부터 신호검출유로(9)로 향하는 압유의 유동만을 허용하는 체크밸브(8-1)가 설치되고, 부하압력 검출유로(7-1)의 제어유로(10-1) 분기점과 신호검출유로(9) 사이의 유로부분(7b)에 본 발명의 특징인 스로틀(11)(면적 ac)이 설치되어 있다.  이로 인해, 부하검출시스템을 갖춘 유압회로장치에서, 구동하는 관성체의 크기에 관계없이 부드러운 기동 특성을 얻으면서, 구성이 간단하여, 스풀타입의 컨트롤밸브로서도 용이하게 적용될 수 있다.
Patent KR-20010053175-A (KR)
Title: 내화성 폴리카르보네이트/ａｂｓ 가소성 성형 재료
IPC: C08L51/04
Filed: 1999-06-12
Abstract: 본 발명은 포스파젠 및 무기 나노입자를 함유하며, 탁월한 내화성 및 매우 우수한 기계적 특성을 나타내는 폴리카르보네이트/ABS 성형 조성물에 관한 것이다.
Patent KR-20010076240-A (KR)
Inventor: LEE SUNG HO
IPC: A24D3/16
Filed: 2001-01-02
Abstract: PURPOSE: Provided is a cigarette filter including charcoal capable of absorbing fine toxic substances, which can reduce toxic ingredients such as nicotine harmful to health effectively with maintaining the unique taste and flavor of the cigarette. CONSTITUTION: The cigarette(1) comprises a first and a second filter parts(2,3), a charcoal insertion part(4) placed between the first and the second filter parts and composed of a plurality of particles of charcoal, filter mixed with charcoal particles or processed charcoal.
Patent KR-20020059868-A (KR)
Title: Automatic gain control apparatus of radar transceiver amplifier and method thereof
Inventor: PARK JUN EUN
IPC: H03G3/20
Filed: 2001-01-08
Abstract: PURPOSE: An automatic gain controller of a transceiver amplifier in a RADAR and a method for controlling the same are provided to obtain stable video signals by controlling automatically gains of reflected signals. CONSTITUTION: An automatic gain controller(100) is formed with a transceiver(110) and a digital signal processing portion(120). The transceiver(110) has an automatic gain control amplifier(111) controls gains of video signals to automatic gain control data of an automatic gain control data output portion(121). The digital signal processing portion(120) has the automatic gain control data output portion(121), an A/D converter(122), an automatic gain control level detection portion(123), an automatic gain control data generation portion(124), a detection portion(125), and a distance calculation portion(126). The A/D converter(122) converts video signals of the automatic gain control amplifier(111) to digital signals. The automatic gain control level detection portion(123) analyzes the video signals of the A/D converter(122). The automatic gain control data generation portion(124) outputs automatic gain control data corresponding to an attenuation level. The detection portion(125) detects a target signal by using the video signals. The distance calculation portion(126) calculates the distance from a target by using the target signal.
Patent KR-20020064605-A (KR)
Title: To manufacture light guide panel having prismatic function in LCD device
Inventor: LEE JONG SIN
IPC: G02F1/1335
Filed: 2001-02-02
Abstract: PURPOSE: A method for manufacturing a light guide panel having a prism function in an LCD(Liquid Crystal Display) is provided to form concave and convex prism surface over the entire light guide panel for improving the average luminance of the entire surface. CONSTITUTION: A method for manufacturing a light guide panel having a prism function in an LCD includes a jig and clamping step of guiding and fixing respective thin plates by a predetermined inclination angle when stacking and aligning by a predetermined quantity, a mirror facet processing step of cutting and polishing a stacked sectional surface of the inclined thin plates into a plane surface and making a prism surface into a mirror surface, a core assembling step of removing any processing attachments while standing the inclined thin plates right, drying the thin plates, and sequentially stacking the thin plates to make end portions of the thin plates to be a slant surface of the prism for forming concave and convex prism over the entire surface of the light guide panel, and an injection molding step of assembling the assembled core mold into molds.
Patent KR-20010067561-A (KR)
Title: system and method for restoring computer and storing data using communication network
Inventor: PARK KYUNG SOO
IPC: G06F11/00
Filed: 2001-02-10
Abstract: PURPOSE: A computer system recovery and a data storage management system and method are provided to easily recover a failed computer program over the network, and store important files at a relatively safe server having a large sized capacity. CONSTITUTION: The method comprises steps of a user accessing a recovery program via a main server, browsing an explanation on the recovery to be displayed on a monitor, and downloading a recovery program and a disposable recovery module at a user computer in the case that the user wants a computer system recovery (S14,S15,S16), the user accessing a data storage program, browsing the related explanation on a monitor, setting a user account, sending a data file list to the server, and storing the data at the server in the case that the user wants a data storage management(S19,S20,S21,S22,S23), and the user accessing a system management program, browsing related explanation on a monitor, and downloading the system management program from the server in the case that the user wants a system management(S30,S31,S32). The user can select an automatic data storage function, at this time, the user designates a year, a month, a date, and a time for storing data at a server, browsing related explanation and checking it(S24,S25.S27,S28).
Patent KR-20010102832-A (KR)
Title: 메모리 셀에서 강유전성 트랜지스터로부터 상태를판독하고 강유전성 트랜지스터에 상태를 저장하는 방법 및메모리 매트릭스
IPC: G11C11/22
Filed: 2001-02-14
Abstract: 메모리 셀의 강유전성 트랜지스터의 상태는 판독 또는 저장되며, 메모리 매트릭스내의 다른 메모리 셀의 다른 강유전성 트랜지스터의 임계 전압은 판독 또는 저장 중에 또는 영구적으로 증가된다.
Patent KR-20010091011-A (KR)
Inventor: HAGIWARA TSUTOMU
IPC: G02C1/06
Filed: 2001-02-23
Abstract: PURPOSE: A spectacles is provided, which uses a new front structure that is different from the conventional front structure, in which lenses easily are fitted, in which there is no need for the broach as in the conventional spectacles, and in which legs to which nose pads are to be attached are not provided by brazing, and a new temple joint structure in which the temple is stably attached without loosening. CONSTITUTION: Spectacles comprising a front part for holding lenses, and temples foldably attached to both outsides of the front part, wherein: the front part structure includes an upper frame having upper rim pieces on both sides of a connecting part, and a lower frame having lower rim pieces on both sides of a connecting part, wherein the upper and lower frames are retained to each other at the center thereof, wherein wraparound endpieces provided on the outside of the upper and lower rim pieces are connected to each other so as to assemble the upper and lower frames, and wherein legs to which nose pads are to be attached are continuously formed between the rim pieces and the connecting part(5) of the upper frame or the lower frame; and the temple joint structure has rings at the upper wraparound endpiece and the lower wraparound endpiece, the rings being formed by bending the upper and lower frames on the outside of the front part, and which has also rings formed by bending ends of the temples, wherein the rings are assembled, a shaft is fitted in shaft holes without loosening, and which is tightened with a screw.
Patent KR-20020069035-A (KR)
Title: Method for maintaining contraction force of textile goods and its product
Inventor: LEE U GEUN
IPC: D06C7/02
Filed: 2001-02-23
Abstract: PURPOSE: A method for maintaining flexibility of a garment is provided by forcibly compressing fibers weaved with woolen fabric or wool as a main material at high temperature without causing plastic deformation. Whereby, a garment made by this method has increased durability in wearing feeling when used for a long period time. CONSTITUTION: Fibers weaved with woolen fabric or wool as a main material are compressed forcibly at a temperature of 130 to 230deg.C with a compressor(1) with a heating means under the pressure of 300 to 650kg. The compressor comprises: a drive motor(15) on one side of a body(10); a rotational shaft of the drive motor connected to the rotational shaft of a conveying roller(14) for driving a conveyor belt(12); a supporting plate(11) at the lower part of the conveyor belt; a heating compressing plate(2) for maintaining a specified temperature by a heater(2a); and a controller(20) at the front of the body.
Patent KR-20020069553-A (KR)
Title: Clippers for hairdressing
Inventor: KAIZUKA KAZUTOSHI
IPC: B26B13/24
Filed: 2001-02-26
Abstract: PURPOSE: Haircutting scissors are provided to promote the circulation of blood from the fingers to the wrist of a user grabbing handle parts of the scissors, thereby reducing the fatigue of the fingers. CONSTITUTION: Haircutting scissors include a pair of scissor halves(1) coupled by a screw pin(2) in boundary portions between blade parts(10) and handle parts(11), wherein the handles contain multi-element mineral components in balance in addition to main components of silicon such as granite, pearlstone, pitchstone and tourmaline, thereby emitting anions of 4-14μm.
Patent KR-20020071257-A (KR)
Title: Taping apparatus for the terminal insulation of battery pole
Inventor: OH KWAN JUN
IPC: H01M4/00
Filed: 2001-03-05
Abstract: PURPOSE: Provided is an insulating-tape bonding device for insulating a terminal of an electrode plate of a battery, which bonds the insulating-tape to the terminal of the electrode plate to prevent the short of an anode and a cathode. CONSTITUTION: The insulating-tape bonding device(1) contains: a rotary body(3) having at least one receiving member on which the electrode plate(2) is laid; a placing means(4) for placing the terminal of the electrode plate(2) on a fixed position, which is located inside the rotary body(3); an actuator(5) clipping or releasing the placed electrode plate(2), which is opposite to the receiving member of the rotary body(3); a motor rotating the rotary body(3); an insulating-tape supply means(8) supplying the insulating tape(7) to the terminal of the electrode plate(2) clipped on the rotary body(3), which is mounted on the upper part of the rotary body(3) and can go up and down; an insulating-tape bonding means(9) bonding the supplied insulating-tape to the both sides of the terminal of the electrode plate(2), which is mounted on the outside of the rotary body(3) and can reciprocate in straight line.
Patent KR-20010093737-A (KR)
Title: Active matrix type liquid crystal display device
Inventor: KOGA MASAYUKI
IPC: G09G3/36
Filed: 2001-03-28
Abstract: PURPOSE: To provide a liquid crystal display device whose drop voltage is small even if parasitic capacitance is large; when a gate voltage is inputted in a rectangular pulse form, voltage variation, what is called a drop voltage, in a pixel electrode is caused by being pulled by the fall of the gate voltage due to the parasitic capacitance between the gate line and the pixel electrode. CONSTITUTION: Since the drop voltage depends on a time constant of the variation in the gate voltage, the drop voltage is reduced by making the fall of the gate voltage dull, to make the drop voltage to be of a waveform shown in Fig. 3 (b). The waveform in Fig. 3 (b) can be realized, for example, by narrowing a channel width of n-channel transistor of a gate driver 8 and thereby setting the maximum current to a low level.
Patent KR-20010098527-A (KR)
Title: 액체, 반죽 및 가스 형태의 매체용 파이프라인을 만들기위한 압출, 사출 또는 블로 몰딩 공정으로 성형된플라스틱제 파이프, 피팅재 또는 성형재
IPC: B32B27/20
Filed: 2001-04-12
Abstract: 파이프라인을 만들기 위한, 최소한 3가지 층의 파이프 바디(1)로 구성되고 압출, 사출 또는 블로 몰딩 공정으로 성형된 플라스틱제 파이프에 있어서, 내층(2)과 중간층(4)은 중합체 재료로 구성되고, 공급 매체와 접촉하는 내층(2) 그리고/또는 중간층(4)의 부분 결정화된 중합체 재료의 무정형 부위에 첨가제는 공격적인 매체, 특히 산화성 및 환원성 매체에 대응하기 위하여 사용되고, 중간층(4)의 중합체 재료의 무정형 부위에서는 충진제 그리고/또는 첨가제가 파이프의 내층(2)으로부터 외층(3)으로 이동하는 것을 줄이기 위한 장벽 재료의 역할을 하게된다.
Patent KR-20020080892-A (KR)
Title: Method for forming capacitor of semiconductor device
Inventor: CHOI HYEONG BOK
IPC: H01L27/08
Filed: 2001-04-18
Abstract: PURPOSE: A method for fabricating a capacitor of a semiconductor device is provided to increase capacitance of a cell, by controlling loss of a storage node in an isolation process of the storage node, and to make capacitance between cells constant by guaranteeing a uniform height of the storage node. CONSTITUTION: An insulation layer(31) having a contact hole is formed on a substrate. A conductive layer is formed in the contact hole. A seed metal layer is formed on the entire surface including the conductive layer. A dummy insulation layer is formed on the seed metal layer and is selectively etched to form a lower electrode formation region. A material layer for forming a lower electrode(41) is formed in the lower electrode formation region by using the seed metal layer, lower than height of the surface of the dummy insulation layer. A passivation layer(40) is formed on the material layer for forming the lower electrode. The dummy insulation layer and the exposed seed metal layer are eliminated by using the passivation layer.
Patent KR-20020084477-A (KR)
Title: Apparatus for baking in semiconductor process
Inventor: SHIN HYEONG SEOK
IPC: H01L21/027
Filed: 2001-05-02
Abstract: PURPOSE: A baking device for fabricating photoresist pattern on a silicon wafer is provided to minimize the damage of the wafer and difference of line width by adopting a guide to support the cover of the device. CONSTITUTION: A baking apparatus is composed of a hot plate(22) under which a silicon wafer(W) is placed, a panel which room for the hot plate installed in, a cover(24) that is apart from the plate by the predetermined distance and the side of which is approached so closely that it prevent an influx of outer air, a driving device(26) connected to the cover and moving it up and down, and a guide(28) made up of compression springs and supporting the cover flexibly. The guide makes the cover keep level by expanding and contracting itself when the cover is moving up and down.