baber/WOPTO huggingface dataset:
Patent KR-20120070194-A (KR)
Title: Touch screen input method and touch screen for a person who is visually handicapped
Inventor: SONG O YONG
IPC: G06F3/03
Filed: 2010-12-21
Abstract: PURPOSE: A touch screen inputting method for visually handicapped people and a touch screen are provided to minimize the generation of typographical errors and to improve the convenience of the visually handicapped people. CONSTITUTION: A touch screen is vertically horizontally divided into four regions(11 to 14). Characters, numbers, and symbols are arranged in the regions. The characters, numbers, and symbols are input by touching the regions. The input mode of the touch screen is changed between the characters, the numbers, and the symbols by shortly touching the touch screen with two fingers or two touch pens. The touching interval is shorter than or equal to a pre-set touching interval in a memory. The pre-set touching interval is 500ms.
Patent KR-20120072539-A (KR)
Title: System for measuring an object and method for measuring an object using the same
Inventor: PARK YOUNG JUN
IPC: G01B11/00
Filed: 2010-12-24
Abstract: PURPOSE: A measuring system and a measuring method using the same are provided to preciously extract a 3D pointer by using a camera of low resolution and a camera of high resolution. CONSTITUTION: A measuring system comprises a camera unit(100), a camera angle adjusting module, a camera transferring module(800), a measuring server(500), and a control unit(600). The camera unit comprises a first camera and a second camera for photographing a measurement object. The camera angle adjusting module is installed in the camera unit, thereby adjusting a left-right angle and a up-down angle of the camera unit. The camera transferring module transfers the camera angle adjusting module where the camera unit is installed to a vertical direction and horizontal direction. The measuring server extracts 3D pointer information of the measurement object from second camera images of the measurement object photographed by the second camera. The control unit controls the camera unit, the camera angle adjusting module, and the camera transferring module.
Patent KR-20120074092-A (KR)
Title: Preparation method of slag absorbent by treatment of waste chemicals
Inventor: KIM BYOUNG EOG
IPC: B01J20/30
Filed: 2010-12-27
Abstract: PURPOSE: A method for manufacturing a blast furnace slag absorbent for eliminating acidic gas is provided to improve the absorption of acidic gas by increasing the specific surface area of blast furnace slag. CONSTITUTION: A method for manufacturing a blast furnace slag absorbent for eliminating acidic gas includes the following: quenched blast slag generated from an iron manufacturing process is pulverized(S102); the pulverized slag is treated with an acidic waste solution; the treated slag is stirred at the room temperature for 4 to 5 hours(S104); slurry is generated, and a basic waste solution is added into the slurry such that the pH value of the slurry is in a range between 9 and 11(S106); solid is generated and filtered, and the filtered solid is dried at an oven(S108); and the dried precipitate is pulverized(S110). The acidic waste solution is waste hydrochloric acid generated from a steel manufacturing process as a byproduct. The basic waste solution is a waste caustic soda solution or a waste sodium carbonate solution generated from a steel manufacturing process as a byproduct.
Patent KR-20110004834-A (KR)
Title: Luminescent material
Inventor: GUNDULA ROTH
IPC: C09K11/66
Filed: 2010-12-28
Abstract: PURPOSE: A light emitting material containing copper and/or lead is provided to ensure high efficiency and to allow a light emitting peak to transfer to a long wavelength or short wavelength region and to ensure wide color temperature and excellent color rendering. CONSTITUTION: A light emitting material comprises a host lattice and a compound including activator ions. The host lattice comprises copper(Cu) ions and oxygen. The compound includes at least one selected from the group consisting of yttrium(Y), gadolinium(Gd) and lutetium(Lu). The host lattice comprises lead ions. The activator ion includes europium(Eu) or cerium(Ce).
Patent KR-20120076751-A (KR)
Title: Integrated optical type laser transmitter and align method thereof
Inventor: LEE SANG SIN
IPC: H01S3/10
Filed: 2010-12-30
Abstract: PURPOSE: An integrated optic type laser beam emitter and an alignment method thereof are provided to precisely and rapidly align a laser launcher in a gun barrel by integrating visible ray lasers identifiable with the naked eye using a laser beam emitter. CONSTITUTION: A light source(110) is composed of an infrared ray laser diode(111) and a visible ray laser diode(113). An integrated optic type laser beam alignment unit includes a wave guide(121) which guides laser beams to the inside thereof in order to match the traveling direction of infrared ray laser beams with the traveling direction of visible ray laser beams. A lens(130) advances the visible ray laser beams to a distance identifiable with the naked eye. The lens extends a sensing width of the infrared ray laser beams to the casualty radius of a gun. The infrared ray laser diode and the visible ray laser diode respectively have an infrared laser diode chip(111a) and a visible ray laser diode chip(113a).
Patent KR-20100034006-A (KR)
Title: Device for fastening railway rails
Inventor: COUVREUR THIERRY
IPC: E01B9/32
Filed: 2008-07-18
Abstract: The present invention relates to a fastening device (100) for fastening a railwayrail (10) onto a support (4), comprising a primary element (101) and a secondary element (102). The secondary element (102) corresponds to nut and bolt fasteners comprising at least one nut and one screw (9) with a screw body (82) and a screw head. The primary element (101) comprises at least one part (1,2) with an upper surface and lower surface, said part being crossed in its thickness by at least one aperture (80) able to receive said screw (9). Said aperture (80) is formed by a first recess (8) located on the upper surface of said part and intended for receiving the screw body and a second recess (8) located on the lower surface of said part and intended for receiving the screw head. According to the invention, the upper surface of the lower part is inclined according to a first slope (12) and the lower surface of the upper part is inclined according to a second slope (14), the first slope and the second slope being complementary. According to the invention, the upper part comprises means (81) for tilting the screw, said means located onthe edges of the firstrecess.
Patent KR-20100037605-A (KR)
Title: Detection of signals containing sine-wave components through measurement of the power spectral density(psd) and cyclic spectrum
Inventor: GAO WEN
IPC: H04W84/02
Filed: 2007-12-05
Abstract: A Wireless Regional Area Network (WRAN) receiver comprises a transceiver for communicating with a wireless network over one of a number of channels, and a signal detector for use in forming a supported channel list comprising those ones of the number of channels upon which an Advanced Television Systems Committee (ATSC) DTV (digital television) broadcast signal was not detected. The signal detector performs spectrum sensing as a function of power spectral density (PSD) and cyclic spectrum.
Patent KR-20100094970-A (KR)
Inventor: REID LOLA M
IPC: C12N5/02
Filed: 2008-06-13
Abstract: 특정 타입의 중간엽 공급자 세포 또는 이러한 공급자에 의해 생성된 하나 이상의 파라크린 시그널을 사용하여 간 전구세포의 생존, 증식 및/또는 분화를 시험관내에서 조절하는 방법이 제공된다.
Patent KR-20100044787-A (KR)
Title: Method for generating aptamers with improved off-rates
Inventor: ZICHI DOMINIC
IPC: C07H21/00
Filed: 2008-07-17
Abstract: The present disclosure describes improved SELEX methods for producing aptamers that are capable of binding to target molecules and improved photoSELEX methods for producing photoreactive aptamers that are capable of both binding and covalently cross linking to target molecules. Specifically, the present disclosure describes methods for producing aptamers and photoaptamers having slower dissociation rate constants than are obtained using prior SELEX and photoSELEX methods. The disclosure further describes aptamers and photoaptamers having slower dissociation rate constants than those obtained using prior methods. In addition, the disclosure describes aptamer constructs that include a variety of functionalities, including a cleavable element, a detection element, and a capture or immobilization element.
Patent KR-20100056461-A (KR)
Title: Method of patterning a substrate
Inventor: HUYNH KHANH T
IPC: H05K3/02
Filed: 2008-06-25
Abstract: A method of forming a metallic material on a receptor that includes the steps of: placing a donor element proximate a receptor, wherein the donor element includes a donor substrate and a thermal transfer layer, wherein the thermal transfer layer includes a catalytic material, and wherein the thermal transfer layer of the donor element is placed proximate the surface of the receptor; thermally transferring at least a portion of the thermal transfer layer from the donor element to the receptor; and electrolessly depositing a metallic material on the receptor by growth of the metallic material on the catalytic material.
Patent KR-20100043080-A (KR)
Title: Method for preventing yarn breakage
Inventor: SOBEL SIETZE JAN
IPC: D01F6/60
Filed: 2008-08-14
Abstract: The invention pertains to the use of a multifilament yarn spinning process comprising individually washing each filament of a multifilament yarn and, if neutralized, individually neutralizing each filament of the multifilament yarn, for preventing yarn breakage during the spinning process, the spinning process comprising spinning of a polymer through a spinneret to obtain the multifilament yarn, washing the yarn, and optionally neutralizing and/or drying the yarn and winding the yarn onto a bobbin Preferably the yarn is washed with jet washers.
Patent KR-20100075525-A (KR)
Title: Sterilised dialysis solutions containing pyrophosphates
Inventor: RISER BRUCE L
IPC: A61L2/10
Filed: 2008-10-07
Abstract: Dialysis solutions comprising pyrophosphates and methods of making and using the dialysis solutions are provided. In an embodiment, the present disclosure provides a dialysis solution comprising a stable and therapeutically effective amount of pyrophosphate. The dialysis solution can be sterilized, for example, using a technique such as autoclave, steam, high pressure, ultra-violet, filtration or combination thereof. The dialysis solution can be in the form of a concentrate.
Patent KR-20100076025-A (KR)
Title: Optical interconnect system providing communication between computer system components
Inventor: TAN MICHAEL RENNE TY
IPC: H04B10/2581
Filed: 2008-10-15
Abstract: An optical interconnect system for communication between computer system components is described. The system includes an optical data communication path (112) and a plurality of optical taps, each optical tap optically coupling a respective computer system component to the optical data communication path (112). Each optical tap splits power from an optical signal received from the data communication path (112) or from a light source generating a data signal from its associated computer component resulting in another optical signal. Each optical tap splits light in accordance with a respective power ratio relationship between reflectivity and transmissivity. The ratio relationships of the optical taps together provide a predetermined communication reliability metric for signals traversing the optical interconnect system (112) between computer system components.
Patent KR-20100084694-A (KR)
Title: A method and apparatus for directing the use of a coriolis flow meter
Inventor: MCANALLY CRAIG B
IPC: G01F25/00
Filed: 2004-12-30
Abstract: A method and apparatus is disclosed that guides a user through a sequence of steps that will allow the user to complete a predefined task using the flow meter. The steps include: selecting a predefined task, displaying a sequence of steps that directs the user through a process for using the Coriolis flow meter to complete the predefined task, and operating the Coriolis flow meter in response to the sequence of steps to complete the predefined task.
Patent KR-20100106453-A (KR)
Inventor: MERROW BRIAN S
IPC: G06F1/16
Filed: 2008-12-10
Abstract: 디스크 드라이브(600)를 운반하고 디스크 드라이브를 테스트 슬롯(500, 500b) 내에 장착하기 위한 디스크 드라이브 운반장치(400, 400b, 400c)는 디스크 드라이브를 수용 및 지지하도록 구성된 프레임(410, 410b, 410c)을 구비한다.  상기 프레임은, 그 사이에 디스크 드라이브를 수용하도록 구성되고 디스크 드라이브와 함께 테스트 슬롯에 삽입되도록 크기를 갖는 측벽(418, 425a, 425b, 429a, 429b)을 구비한다.  상기 프레임은 또한, 상기 측벽 중 적어도 하나와 작동적으로 연관되는 클램핑 기구(450)를 구비한다.  상기 클램핑 기구는 제1 결합 요소(476, 700, 750), 및 상기 제1 결합 요소의 이동을 개시하도록 작동가능한 제1 액추에이터(454, 710, 760)를 구비한다.  상기 제1 액추에이터는 프레임에 의해 지지되는 디스크 드라이브가 테스트 슬롯 내의 테스트 위치에 배치된 후에 제1 결합 요소를 이동시켜 테스트 슬롯과 결합시키도록 작동가능하다.
Patent KR-20100126671-A (KR)
Inventor: THOMAS PIERRE ARMAND
IPC: B63B35/34
Filed: 2009-02-09
Abstract: 중간에 배치되는 연결부(15)에 의하여 연결되는 두개의 대향된 단일체의 측부부재(10)로 구성되는 초대형 부유바지선(1)의 조립과 설치방법이 각 측부부재(10)와 각 연결부(15)를 별도로 제작하는 단계, 각 측부부재(10)를 해상에 배치하는 단계, 연결부(15)를 두개의 측부부재(10) 사이로 이동하는 단계, 연결부(15)를 수직으로 이동시키는 단계, 연결부(15)를 측부부재(10)에 고정하는 단계와, 바지선(1)을 작업장소로 이동시키는 단계로 구성된다.
Patent KR-20100124743-A (KR)
Inventor: KOSHIO KAIHEI
IPC: A01N31/02
Filed: 2009-02-06
Abstract: 올레산 유도체 또는 리놀레산 유도체를 유효 성분으로 포함하는 화분 비산 억제용 제제로서, 상기 화분 비산 억제용 제제는 나무의 몸통과 더불어 가지 및 잎에도 영향을 미치지 않고, 수기관에 민감한 작용을 나타내며, 물로 희석시킴으로써 용액 안정성을 가지는 용액 또는 에멀션의 형태를 띤다.
Patent KR-20100132962-A (KR)
Inventor: ZHANG DANLU
IPC: H04L27/26
Filed: 2009-02-27
Abstract: 무선 통신 시스템에서 다수의 캐리어들을 통한 데이터 전송을 지원하기 위한 기술들이 제시된다.  사용자 장비(UE)는 다수의 캐리어들을 통한 데이터 전송을 위하여 이용가능한 전송 전력을 결정할 수 있다.  UE는 각각의 캐리어에 대한 데이터에 대한 할당된 전송 전력을 획득하기 위하여 (예컨대, 균일 전력 분배, 그리디 필링(greedy filling), 워터 필링(water filling) 등을 사용하여) 다수의 캐리어들에 이용가능한 전송 전력을 분배할 수 있다.  UE는 다수의 캐리어들 각각에 대한 할당된 전송 전력을 나타내는 정보를 가진 적어도 하나의 자원 요청을 노드 B에 전송할 수 있다.  UE는 다수의 캐리어들의 모두 또는 서브세트일 수 있는 적어도 하나의 캐리어 각각에 대한 승인된 전송 전력을 나타내는 정보를 가진 적어도 하나의 자원 승인을 수신할 수 있다.  UE는 적어도 하나의 캐리어를 통해 데이터를 전송할 수 있으며, 각각의 캐리어에 대한 승인된 전송 전력까지 각각의 캐리어에 대한 전송 전력을 제한할 수 있다.
Patent KR-20110002473-A (KR)
Inventor: TAKAHASHI MASAO
IPC: G01R19/165
Filed: 2009-05-27
Abstract: 광원(12)으로부터 입사하는 광의 광축에 수직함과 동시에, 광축(12)을 중심축으로 하여 배치되고, 입사하는 광을 미리 정해지는 기준의 상태로 편광하는 편광 광학계(15, 16)와, 광축에 수직함과 동시에, 광축을 중심축으로 하여 배치되고, 측정 대상의 전압이 인가되면, 편광 광학계(15, 16)에 의해 편광된 광을 인가된 전압에 따라 편광하는 전기 광학 소자(17)와, 광축에 수직함과 동시에, 광축을 중심축으로 하여 배치되고, 전기 광학 소자(17)에 의해 편광된 광을 검출하여, 입사되는 광 신호를 전기 신호로 변환하는 검출기(21)에 광을 조사하는 검광자(18)를 구비한다.
Patent KR-20110020280-A (KR)
Inventor: CARSON CHRIS
IPC: A01N43/56
Filed: 2009-05-29
Abstract: Qo 억제제에 내성인 병원체로 인해 질병에 걸릴 위험에 있는 식물에서 병원체 유발 질병을 방제하는 데 적합한 방법 및 조성물이 발견되었다.  이러한 방법 및 조성물은 상기 식물(들)을 유효량의 Qi 억제제를 포함하는 조성물에 접촉시키는 것을 포함한다.
Patent KR-20110028311-A (KR)
Inventor: SAGAN ZBIGNIEW
IPC: G06T7/60
Filed: 2009-05-26
Abstract: - 인쇄 플레이트로 하나 이상의 서류를 인쇄하는 단계,  
- 고 해상도로 상기 서류의 한 부분 이상의 한 영상 이상을 캡쳐하는 단계,  
- 하나 이상의 캡쳐된 영상 기하학적 특징을 추출하는 단계,  
- 상기 인쇄 플레이트가 프린트하기 위해 사용 되었는지를 결정하고자 하는 후보 서류에 대해, 기하학적 특징이 저장되어 있는 서류의 부분에 해당하는 상기 후보 서류 부분 영상을 고 해상도로 캡쳐하는 단계,  
상기 저장된 기하학적 특징에 해당하는 후보 서류 영상의 기하학적 특징을 추출하는 단계, 그리고 
- 상기 후보 서류에 대한 기하학적 특징과 상기 저장된 기하학적 특징의 상관관계 측정이 예정된 한계 값 보다 큰가를 결정하는 단계를 포함함을 특징으로 하는 서류의 인쇄 플레이트를 식별하기 위한 방법.
Patent KR-20120084140-A (KR)
Title: Bearing assembly and motor including the same
Inventor: NOH JEE AE
IPC: H02K17/10
Filed: 2011-01-19
Abstract: PURPOSE: A bearing assembly and the motor including the same are provided to improve vibration resistance and impact resistance of a motor by improving bonding force of a base cover and a sleeve or separation force of the base cover. CONSTITUTION: A bearing assembly(1) comprises a shaft(10), a sleeve(20), a thrust plate(30), and a base cover(40). The bearing assembly is composed of a bearing assembly using fluid dynamic pressure. The sleeve includes a joint part(21) having a bottom portion projected along a circumferential surface. The thrust plate is located at a lower portion of an axial direction of the sleeve. The thrust plate forms a gap between the sleeve and the base cover which is arranged consecutively with the gap the shaft and the sleeve. The thrust plate has a diameter larger than that of the shaft. The base cover has a shape corresponding to the thrust plate.
Patent KR-20120087443-A (KR)
Title: A light emitting Device and a light emitting device package
Inventor: HWANG SUNG MIN
IPC: H01L33/44
Filed: 2011-01-28
Abstract: PURPOSE: A light emitting device and a light emitting device package are provided to form various structures of a plurality of semiconductor layers included in a light emitting structure by regularly or irregularly forming doping concentration of a conductivity type dopant within a first conductivity type semiconductor layer and a second conductivity type semiconductor layer. CONSTITUTION: A light emitting structure(120) is formed on a substrate(110). The light emitting structure comprises a first conductivity type semiconductor layer(122), an active layer(124), and a second conductivity type semiconductor layer(126). A first electrode(150) including a first electrode pad(152) is formed on the light emitting structure. A semiconductor oxide layer(130) is formed on the first electrode. A conductive layer(170) is formed on the second conductivity type semiconductor layer. A passivation layer(140) is formed between the semiconductor oxide layer and an exposed light emitting structure.
Patent KR-20120087602-A (KR)
Title: Anemometer and measuring method of wind velocity using ultrasonic
Inventor: PARK SE KWANG
IPC: G01P5/24
Filed: 2011-01-28
Abstract: PURPOSE: A wind speed measuring apparatus and method using ultrasonic waves are provided to extend the measurable range of wind speed by correcting ultrasonic signals. CONSTITUTION: A plurality of filters(131) filters ultrasonic signals to remove noises. A plurality of amplifiers(132) amplify ultrasonic signals. A phase delay unit(133) removes an offset phase difference between ultrasonic signals. A plurality of comparators(134) change ultrasonic signals into the square waves. A divider(135) divides the square waves to a predetermined size. A correcting unit(136) compares the current phase difference of ultrasonic signals with the previous phase difference and corrects the current phase difference. A measuring unit(137) measures the speed of wind.
Patent KR-20120089089-A (KR)
Title: Method for manufacturing Complex fiber comprising Shear Thickening Fluid
Inventor: KIM JU HEA
IPC: D04H3/16
Filed: 2011-02-01
Abstract: PURPOSE: A method for fabricating a conjugated fiber containing STF(shear thickening fluid) is provided to ensure bulletproof, shock absorption, and air permeability. CONSTITUTION: A method for fabricating a conjugated fiber containing STF comprises: a step of preparing the STF as a core ingredient and polymer resin as a sheath ingredient; a step of passing through a spinning nozzle and performing melt-blown of a conjugated fiber of a sheath-core structure(S1) of curing the conjugated fiber at 5-25 Deg. C.(S2); and a step of collecting the conjugated fibers by a collector to form a web(S3). The polymer resin is selected from polyethylene, polypropylene, polyamide, polyester, polylactic acid, acryl, polyoxy methylene, polycarprolactone, polyvinylidene chloride, and polyurethane resin.
Patent KR-20120090197-A (KR)
Title: Customer equipment providing financial information and service method using the same
Inventor: YIM CHI HUN
IPC: G06Q40/02
Filed: 2011-02-07
Abstract: PURPOSE: A customer terminal for providing financial information and a service method thereof are provided to increase understanding about a financial instrument of a user by obtaining advance information about an interest product if a user waits time for consultation. CONSTITUTION: A client terminal(100) provides a financial information search a consultation start call with a consultant to a client. A financial service device(300) provides customized financial information to the client terminal according to a search of the client terminal. A consultation service device(400) designates the consultant based on search information of the client terminal. The client terminal has a form of a table PC. The client terminal has a form of a touch pad. The client terminal communicates through at least one of 3G, 4G, WiBro, WIFI, and ZigBee communication networks.
Patent KR-20120094386-A (KR)
Title: Stake
Inventor: LEE DONG KI
IPC: E02D17/20
Filed: 2011-02-16
Abstract: PURPOSE: A pile for fixing a net, a shade, and a straw mat is provided to stably maintain the state of a net for protecting the ground, a shade for the growth of crops, and a straw mat. CONSTITUTION: A pile(100) for fixing a net, a shade, and a straw mat comprises a main pile(110), a press plate(120), and sub piles(130). The main pile has a ring-shaped latching jaw(114). The press plate has an assembling hole and a latching protrusion. The assembling hole is formed on the center of the press plate to be assembled in the main pile. The latching protrusion is formed on the inner circumference of the assembling hole in a shape corresponding to the latching jaw. The sub piles are arranged on both ends of the press plate to be parallel to the main pile and have a lower height than the main pile.
Patent KR-20120096699-A (KR)
Inventor: LEE SANG CHUL
IPC: B23K26/073
Filed: 2011-02-23
Abstract: PURPOSE: A drilling method using an ultraviolet laser for forming via holes on a FMCL(Flexible Metal Clad Laminate) is provided to form via holes in a FMCL by irradiating an ultraviolet laser without a pretreatment work for removing or blackening a metal layer. CONSTITUTION: A drilling method using an ultraviolet laser provides a FMCL(20) having a thickness under 40 micron meters. The FMCL has a first metal layer(25) welded on a polymer layer(22). An ultraviolet laser(12) having the output of 700-900mW and the frequency of 60-100kHz is generated. The ultraviolet laser is focused on the surface of the first metal layer to form via holes(30) penetrating through the FMCL. The diameter of the via holes is under 25 micron meters.
Patent KR-20120103993-A (KR)
Title: Method for safe space decision of tool and tool holer and apparatus thereof
Inventor: KIM DU JIN
IPC: B23Q15/22
Filed: 2011-03-11
Abstract: PURPOSE: A method for judging a safety zone of a pre-set tool and a judgment apparatus are provided to improve the reliability by automatically determining whether or not the shapes of tools and holders belong to the safety zone. CONSTITUTION: A method for judging a safety zone of a pre-set tool is as follows. A measurement sensor measures the shapes of tools and holders(S120). The configuration data for the tools and holders is compared with the configuration data for a collision boundary(S130). Whether or not the configuration data belongs to the safety zone of the collision boundary is determined(S140). A warning message is displayed if the measured shapes do not belong to the safety zone(S160). [Reference numerals] (S110, S150) Setting a tool and holder; (S120) Measuring sensor measures the shapes of the tool and holder; (S130) Measuring sensor compares the shapes of the tool and holder with a collision boundary; (S140) Safe space?; (S160) Outputting an warning message; (S170) Action?
Patent KR-20120110280-A (KR)
Title: Glass deposition apparatus
Inventor: SHIN SANG HO
IPC: C23C14/02
Filed: 2011-03-29
Abstract: PURPOSE: A substrate deposition apparatus is provided to improve the deposition efficiency by regulating the distance between a target and magnets to change the intensity of a magnetic field. CONSTITUTION: A substrate deposition apparatus comprises a view port(170) and an optical sensor(180). The view port is coupled to one side of a chamber body(110) to allow for observation on the inside of the chamber body. The optical sensor comprises a light emitting unit(181) which emits light toward the view port to sense the existence of a substrate and a light receiving unit(182) which receives light reflected off a substrate, and the optical sensor is arranged on the other side of the chamber body opposite to the view port. The view port is formed with an irregular reflection pattern(172) for irregularly reflecting the light emitted from the light emitting unit so that the light is reflected off the view port, not delivered to the light receiving unit.