Patent DE-102010009794-A1 (DE)
Title: Coating heated substrates in a continuous vacuum coating systems, comprises moving substrate in transport direction continuously through functional process chamber, in which coating particle stream is produced by using the coating sources
Inventor: KOSSEV IORDAN DR
IPC: C23C14/54
Filed: 2010-03-01
Abstract: The method comprises moving a substrate (9) in a transport direction (11) continuously through a functional process chamber (8), in which a coating particle stream is produced by using the coating sources (22) in the process chamber, coating the substrate in the process chamber by using the coating particle stream, past guiding the substrate inside the process chamber to two heaters (10), where the temperature of the substrates is controlled in the transport direction after the heater using a cascade control, which consists of a guidance control and a sequence control. The method comprises moving a substrate (9) in a transport direction (11) continuously through a functional process chamber (8), in which a coating particle stream is produced by using the coating sources (22) in the process chamber, coating the substrate in the process chamber by using the coating particle stream, past guiding the substrate inside the process chamber to two heaters (10), where the temperature of the substrates is controlled in the transport direction after the heater using a cascade control, which consists of a guidance control and a sequence control, where the substrate is controlled as a controlled system of the guidance control and the heater is controlled as a controlled system of sequence control. The temperature of the heater over the sequence control is controlled with the temperature of the respective heater as a control parameter, an respective energy supply to the respective heater as regulating variable, a respective target temperature as respective guidance parameter and a respective control deviation as difference of the respective guidance parameter of the sequence control and the respective control parameter of the sequence control. The substrate temperature over the guidance control is controlled with the substrate temperature as control parameter, a target substrate temperature as guidance parameter, a regulating variable controlling the respective control deviation of the sequence control and a control deviation as difference of guidance parameter of the guidance control and the control parameter of the guidance control. The respective target temperature is determined from the respective guidance parameter weighted with the regulating variable of the sequence control, as guidance parameter of the sequence control, where the respective guidance parameter corresponds to the respective basic adjustment of the heater temperature without guidance control. The weighting takes place by multiplication. The control deviation of the guidance control is compared with an adjustable maximum value and so long the control deviation of the guidance control exceeds the maximum value, which is weighted with a fixed value independent of the regulating variable of the sequence control. The respective guidance parameter is neutrally weighted i.e. is selected equal to the respective target temperature. The selection of the weighting takes place in dependent of an adjustable release signal. An independent claim is included for an arrangement for coating heated substrates in a continuous vacuum coating systems.