Patent SG-11201903426Y-A (SG)
Title: A method for improving wafer performance for photovoltaic devices
Inventor: CIESLA ALISON
IPC: H01L21/324
Filed: 2017-11-22
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property .,.., Organization i 111111111111111111111111111111111111111111111111111111111111 01111111011110111111 International Bureau (10) International Publication Number (43) International Publication Date .....'\"' WO 2018/094461 Al 31 May 2018 (31.05.2018) WIPO I PCT (51) (21) (22) (25) Filing Language: (26) (30) International Patent Classification: 2016904788 22 November 2016 (22.11.2016) AU H01L 21/22 (2006.01) H01L 21/324 (2006.01) 2016904789 22 November 2016 (22.11.2016) AU H01L 21/30 (2006.01) H01L 31/18 (2006.01) 2016905364 23 December 2016 (23.12.2016) AU H01L 21/322 (2006.01) 2017902441 23 June 2017 (23.06.2017) AU International Application Number: (71) Applicant: NEWSOUTH INNOVATIONS PTY PCT/AU2017/051289 LIMITED [AU/AU]; Rupert Myers Building, Gate 14, International Filing Date: Barker Street, UNSW, Sydney, New South Wales 2052 22 November 2017 (22.11.2017) (AU). (72) Inventors: CIESLA, Alison; 19 Sturt Road, Cronulla, English New South Wales 2230 (AU). HALLAM, Brett Jason; Publication Language: English 36A Washington Street, Bexley, New South Wales 2207 (AU). CHAN, Catherine Emily; 1 Darling St, Kensing- Priority Data: 2016904784 22 November 2016 (22.11.2016) AU ton, New South Wales 2033 (AU). CHONG, Chee Mun; 2016904785 22 November 2016 (22.11.2016) AU 1/1-3 Cooper Park, Bellevue HillL New South Wales 2023 2016904786 22 November 2016 (22.11.2016) AU (AU). CHEN, Daniel; 13/6 Myrtle Rd, Bankstown, New South Wales 2200 (AU). BAGNALL, Darren; 1 Gar- 2016904787 22 November 2016 (22.11.2016) AU net St, Coogee, New South Wales 2034 (AU). PAYNE, (54) Title: A METHOD FOR IMPROVING WAFER 2C0 : The present disclosure is directed the properties of crystallographic imperfections. The method comprises the imperfections in the proximity of a surface of the silicon; exposing at least a portion that hydrogen atoms migrate towards the region with crystallographic imperfections and controlling the charge state of are in a p-type region of the wafer; and negative when the imperfections the silicon while exposing the silicon to an illumination intensity of less than (57) - exploiting C7\ imperfections; --..... imperfections PERFORMANCE FOR PHOTOVOLTAIC FIGURE 2 DEVICES wafer that allows improving performance by steps of: forming a silicon layer with crystallo- of the device to hydrogen atoms in a manner and into the silicon along the crystallographic imperfections to be positive when the are at an n-type region of the wafer by thermally 10 mW/cm 2 . 202 - A boron doped silicon ingot is solidified using directional casting lethniqueg rmsg11'ng in small gr,irs of crystalLine silicon ,-, , O , - - he multi-crystalline lugot 's cut into bricks and than sliced into wafers t., 206 - A multi-crystalline wafer is cid etched for damage remoyal and textu rinq 1 2U8- An 80-100 Elii emitter is formed on the textured wafer by FCCl diffusion, followed by e HF glass removal and rear etch U , 210 - The front side is coated with 7E nm PECVD SiNx,11 II 212 - Aluminium ant Silver contacts are r_ printed onto the rear and from- surfaces respectiveby, prior to co-faring at -800 ° tie form the me,a1 conduc,ors and to diffuse hydrogen into the silicon. ,.. , 2I4 - Ccli is - o alcd at 400' C with <1 mW/cm: illuminaricm for 16 minutes -.., 216 - Cell is annealed at \" .00' C while illuminated with 1 W/,11' illumination for 1 minl=e Il tD ii . graphic ii• such 0 GC , 1 treating © ei C to a method for processing a silicon hydrogen atoms located at the crystallographic [Continued on next page] WO 2018/094461 Al MIDEDIMODOMMOHIONEHOHOEHH111111110111111111111 David Neil; 1/81 Doncaster Avenue, Kensington, New South Wales 2033 (AU). MAI, Ly; 27 Burbank Avenue, East Hills, New South Wales 2213 (AU). ABBOTT, Mal- colm David; 36 Dalleys Road, Naremburn, New South Wales 2065 (AU). KIM, Moonyong; 1/32-34 Grosvenor St, Kensington, New South Wales 2033 (AU). CHEN, Ran; 2214/43 Wilson Street, Botany, New South Wales 2019 (AU). WENHAM, Stuart Ross; 19 Sturt Road, Cronulla, New South Wales 2230 (AU). FUNG, Tsun Hang; 349/17 High Street, Kensington, New South Wales 2033 (AU). SHI, Zhengrong; 701/1 Kirribilli Avenue, Kirribilli, New South Wales 2061 (AU). (74) Agent: GRIFFITH HACK; Level 22, Allendale Square, 77 St Georges Terrace, Perth, Western Australia 6000 (AU). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))