Patent SG-11201810163V-A (SG)
Title: Hydrogenated isotopically enriched boron trifluoride dopant source gas composition
Inventor: BISHOP STEVEN
IPC: H01J37/08
Filed: 2017-03-27
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 11111111011110111010101111101011111011101011111011110110111101111101111011111 International Bureau ... .... ..Yjd (10) International Publication Number (43) International Publication Date ..... ...r .....1 WO 2017/172618 Al 5 October 2017 (05.10.2017) WIP0 I PCT (51) International Patent Classification: (74) Agent: GATES, Catherine D.; Entegris, Inc., 129 Con- CO1B 35/06 (2006.01) H01J 37/317 (2006.01) cord Road, Building 2, Billerica, MA 01821 (US). H01J 37/08 (2006.01) (81) Designated States (unless otherwise indicated, for every (21) International Application Number: kind of national protection available): AE, AG, AL, AM, PCT/US2017/024312 AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (22) International Filing Date: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, 27 March 2017 (27.03.2017) HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, (25) Filing Language: English KP, MD, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, (26) Publication Language: English NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, (30) Priority Data: RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, 62/314,241 28 March 2016 (28.03.2016) US TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: ENTEGRIS, INC. [US/US]; 129 Concord Road, Building 2, Billerica, MA 01821 (US). (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (72) Inventors: BISHOP, Steven; 7 Commerce Drive, Dan- GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, bury, CT 06810 (US). YEDAVE, Sharad N.; 7 Commerce TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Drive, Danbury, CT 06810 (US). BLY, Oleg; 7 Commerce TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, Drive, Danbury, CT 06810 (US). SWEENEY, Joseph; 7 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Commerce Drive, Danbury, CT 06810 (US). TANG, Ying; LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, = 7 Commerce Drive, Danbury, CT 06810 (US). SM, GW, KM, ML, MR, NE, SN, TD, TG). TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, [Continued on next page] = (54) Title: HYDROGENATED ISOTOPICALLY ENRICHED BORONT TRIFLUORIDE DOPANT SOURCE GAS COMPOSI- TION = (57) : A hydrogenated isotopically enriched boron trifluoride (BF3) dopant source gas composition. The composition contains (i) boron trifluor- ide isotopically enriched above natural abundance in boron of atomic mass 11 (UB), and (ii) hydrogen in an amount of from 2 to 6.99 vol.%, based on total volume of boron trifluoride and hydrogen in the composition. Also de- scribed are methods of use of such dopant source gas composition, and asso - = = = sw dated apparatus therefor. = = = = = = _ 1-1 GC 11 ei IN ,-1 FIG. 1 IN ,-1 ei O WO 2017/172618 Al MIDEDIMOMOIDERMEMOMOINIHOHEM111111111111110110111111 Published: — with international search report (Art. 21(3))