Patent SG-11201805467T-A (SG)
Title: Method and system for optical three-dimensional topography measurement
Inventor: ZHAO GUOHENG
IPC: G02B27/22
Filed: 2016-11-04
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization M1111101110101011111 HO 11111 01110111001100 11111 301 1111110111011 11 International Bureau .. .... ..Yejd .... ...,,, (10) International Publication Number (43) International Publication Date WO 2017/136011 A2 10 August 2017(10.08.2017) WIPO I PCT (51) International Patent Classification: Andy; 2112 Los Angeles Avenue, Berkeley, California GO1N 21/956 (2006.01) GO2B 27/22 (2006.01) 94707 (US). DE GREEVE, Johan; Latstraat 4/Lovenjoel, GO1N 21/39 (2006.01) 3360 Brabant (BE). VAN GILS, Karel; Anemonenlaan 12, 3052 Blanden (BE). (21) International Application Number: PCT/US2016/060599 (74) Agents: MCANDREWS, Kevin et al.; KLA-TENCOR CORP., Legal Department, One Technology Drive, Mil- (22) International Filing Date: pitas, California 95035 (US). 4 November 2016 (04.11.2016) (25) Filing Language: English (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (26) Publication Language: English AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (30) Priority Data: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, 62/289,889 1 February 2016 (01.02.2016) US HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, (71) Applicant: KLA-TENCOR CORPORATION [US/US]; KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, Legal Department, One Technology Drive, Milpitas, Cali- MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, fornia 95035 (US). OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, (72) Inventors: ZHAO, Guoheng; 408 Pratt Lane, Palo Alto, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, California 94306 (US). VAN DER BURGT, Maarten; ZW. Ploegstaart 12, B-3010 Leuven (BE). LIU, Sheng; 1648 Sedona Terrace, San Jose, California 95035 (US). HILL, = [Continued on next page] (54) Title: METHOD = = = = - = IL = — AND SYSTEM FOR OPTICAL THREE-DIMENSIONAL TOPOGRAPHY MEASUREMENT (57) : For three-dimensional topography measurement of a surface of an object patterned illumination is projected on the surface through an objective. A relative move- ment between the object and the objective is carried out, and plural images of the surface 32 are recorded through the objective by a detector. The direction of the relative movement in- dudes an oblique angle with an optical axis of the objective. Height information for a given position on the surface is derived from a variation of the intensity recorded from the re- spective position. Also, patterned illumination and uniform illumination may be projected alternatingly on the surface, while images of the surface are recorded during a relative movement of the object and the objective along an optical axis of the objective. Uniform il - lumination is used for obtaining height information for specular structures on the surface, patterned illumination is used for obtaining height information on other parts of the surface. = = = = = = / Fr ' 28 ei .4 111111 1-1 - 331 © cr) 1-1 IN 1-1 0 ei Fig. N! 11 51 8 0 WO 2017/136011 A2 111110B01101010igHOH130111001100111110H0II111111 11101 IIII (84) Designated States (unless otherwise indicated, for every SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, kind of regional protection available): ARIPO (BW, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, GH, SZ, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, RU, KZ, Published: TJ, TM), European (AL, AT, BE, BG, CH, CY, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, CZ, IT, RS, DE, — LT, SE, without international search report and to upon receipt of that report (Rule 48.2(g)) be republished