baber/WOPTO huggingface dataset:
Patent KR-20030047863-A (KR)
Title: Fishing Line Guide and Rod having the same
Inventor: MATSUMOTO KIYOHIKO
IPC: A01K87/04
Filed: 2002-12-11
Abstract: PURPOSE: To provide a line guide enabling smooth reeling of a fishing line without deteriorating the flexibility of the rod and provide a fishing rod furnished with the line guide. CONSTITUTION: The fishing rod is provided with a line guide 10 composed of a metallic wire 11 having a coiled part 11a wound plural turns in spiral form in the middle of the length and winding strings 12 to fix both ends of the metallic wire 11 on the circumference of the rod. The metallic wire 11 has a diameter of 0.15-0.7 mm and is spirally wound 3-6 turns at the coiled part 11a.
Patent KR-20040051007-A (KR)
Title: Apparatus and method for dynamic resource allocation in interactive satellite multimedia system
Inventor: CHO YONG HUN
IPC: H04B7/185
Filed: 2002-12-11
Abstract: PURPOSE: A device for assigning dynamic resources in an interactive satellite multimedia system is provided to maximize a throughput for different resource requests, and to quickly make an assignment planning problem for assigning resources. CONSTITUTION: A dynamic resource assigning device located in a hub comprises as follows. A resource request collector(21) is comprised. A resource request processor(22) divides collected resource requests into the number of frame pairs, and obtains an allotment by rounding off the number. A resource assignment determiner(24) and a resource assignment planning establisher(25) are used for the first frame pair within a super frame. A resource assignment planning copier(26) is used for other frame pair within the same super frame.
Patent KR-20040051014-A (KR)
Inventor: HWANG GWANG HUI
IPC: G02F1/1345
Filed: 2002-12-11
Abstract: PURPOSE: An LCD(Liquid Crystal Display) is provided to improve the ground of an LCD module and a system and prevent electromagnetic interference. CONSTITUTION: An LCD includes a system, an LCD module, a cable, and a grounding member. The LCD module displays images in response to a driving signal transmitted from the system. The cable provides the driving signal from the system to the LCD module. The grounding member grounds the cable to the LCD module. The LCD module includes an LCD panel in which liquid crystal cells are arranged in a matrix form, a support main(56) for supporting the LCD panel, a substrate on which a drive integrated circuit for supplying a driving signal to the LCD panel is mounted, a connector(64) formed at one side of the substrate and connected to the cable, and a bottom cover(70) for covering the substrate. The substrate is folded to the back side of the support main. The bottom cover includes an extension part(72) extended to oppose to the cable. The grounding member is a conductive tape that is attached to the extension part of the bottom cover to connect the cable to the bottom cover.
Patent KR-20040052438-A (KR)
Title: operation method of card game
Inventor: PARK HUNG SOO
IPC: A63F1/00
Filed: 2002-12-17
Abstract: PURPOSE: A card game progress method is provided to simplify and clarify the rules of the game so that everyone is able to try, to give much more pay to clients to rouse their interest, and to reduce required time for each game to maximize a casino house(dealer)'s profits. CONSTITUTION: The card game progress method comprises a first step of betting chips in a predetermined amount of money on a hand on the table divided in blue if the sum of two cards corresponds to 1, 4, 7, yellow if 2, 5, 8,, red if 3, 6, 9 and white if 0; a second step of squeezing the two cards by a corresponding client; a third step of ascertaining a winning color and a losing color in the game by calling the total of the two cards and the corresponding card after opening the two cards returned from the client on the table; and a fourth step for making the pay two times the betting amount to the client betting for blue, yellow, red and the pay four times the betting amount to the client betting for white. "A" in the card is set for the card value "1", the number 2-9 are used as they are, "10, J, Q, K" are for "0". If the sum of two cards is under 9, it is used as it is, and if 10 or more, the remaining value after subtracting 10 from the sum is used.
Patent KR-20030007344-A (KR)
Title: For this animation the audience can make a choice regarding a case or the storyline in real time with ARS system as they are watching television.
Inventor: JEONG YOUN KWAN
IPC: H04N21/8541
Filed: 2002-12-18
Abstract: PURPOSE: A cartoon film which viewers selects and changes events or contents through an automatic response system in real time is provided to bring interests in the cartoon film and provide various entertainments by leading the viewers to telecast the cartoon film. CONSTITUTION: A method for telecasting a cartoon film which viewers watch selecting and changing events or contents through an automatic response system in real time includes the steps of manufacturing each event in a basic scenario so that the viewers select any event in the cartoon film, asking the viewers to select the event through a television screen(301), receiving the opinions of the viewers through the automatic response system(302), displaying the opinions of the viewers on the television screen in real time(303), selecting the event selected by the viewers(304), and telecasting the event selected by the viewers(305).
Patent KR-20040056473-A (KR)
Title: Scrambling system of MC-CDMA and method thereof, its program storing recording medium
Inventor: CHOI GWON HYU
IPC: H04L9/32
Filed: 2002-12-23
Abstract: PURPOSE: A scrambling system and method in a multi-carrier CDMA and a recording medium storing its program are provided to reduce a PARR(Peak-to-Average Power Ratio) by changing a scrambling code according to user's combination of orthogonal codes. CONSTITUTION: A symbol modulator modulates a bit sequence of the kth user into symbols(S1), and a multiplier multiplies each modulated symbols to an orthogonal code to spread it to a chip sequence(S2). An adder adds the spread chip sequences in synchronization with a symbol timing, and an interleaver performs interleaving on chip sequences of M number of symbols to be transmitted and aligns chips making the same symbols at M-chip intervals(S3). A serial/parallel converter converts the aligned chip sequences into a parallel chip signal having the number of sub-carriers(S4), and a scrambling chip vector generator and a multiplier multiply the parallel chip signal to a scrambling code and transmit it to an inverse Fourier converter(S5). The inverse Fourier converter, the parallel/serial converter and a guard time inserting unit modulate one chip of each sub-carrier to generate a multi-carrier signal, and output it(S6).
Patent KR-20040057417-A (KR)
Title: Negative active material for lithium secondary battery
Inventor: KIM JUN SEOP
IPC: H01M4/36
Filed: 2002-12-26
Abstract: PURPOSE: Provided is an anode active material for a lithium secondary battery excellent in a cycle lifetime property and a low temperature property, which contains a first active component containing a crystalline carbon core and a quasi-crystalline carbon shell and a second active component containing a crystalline carbon. CONSTITUTION: The anode active material contains: the first active component containing the crystalline carbon core having Ra(I(1360)/I(1580)) of 0.01-0.45, wherein Ra is a Raman spectrum strength ratio of the I(1360) face and the I(1580) face, and the quasi-crystalline carbon shell which coats the core and has a turbostratic or semi-onion ring structure and Ra(I(1360)/I(1580)) of 0.46-1.5 and contains a plate state crystalline carbon fine powder having an average particle diameter(D50) of 0.1-15 micrometer; the second active component containing the crystalline carbon comprising a second particle of 15-25 micrometer formed by assembling a first particle of 1-10 micrometer. The ratio of the first active component and the second active component is 90-50:10-50wt%.
Patent KR-20040060073-A (KR)
Title: The slit forming method for weight anchor bolt
Inventor: KIM SUN GIL
IPC: B21K1/74
Filed: 2002-12-30
Abstract: PURPOSE: A slit forming method for weight anchor bolt is provided to improve operation efficiency and productivity by integrally forming cutting blade parts for forming slits and a taper forming part for forming taper of the anchor member on a mold, thereby simultaneously forming slits and taper on an anchor member by the mold. CONSTITUTION: In a weight anchor bolt having an anchor member on which a plurality of slits are formed, the slit forming method for the weight anchor bolt comprises a step of preparing a mold body(31) having diameter and length corresponding to inner diameter of matrix(100) of a pipe shaped anchor member; and a step of pressing an upper die(3) integrally comprising a plurality of cutting blade parts(32) having a projection length corresponding to outer diameter of the matrix formed at an outer side of the mold body with being spaced apart from each other in a certain distance along a longitudinal direction of the mold body and a taper forming part(33) slantly formed at an upper side of the cutting blade parts on the matrix set in a die hole(10) of lower die(1) having diameter corresponding to the matrix so that a plurality of slits and taper are simultaneously formed, wherein a cushion(2) a lower part of which is supported by an elastic supporting spring(20) is installed in the die hole of the lower die so that a lower part of the set matrix is supported by the cushion.
Patent KR-20040061119-A (KR)
Title: Flat panel display apparatus
Inventor: LEE SANG DEOK
IPC: G02F1/13
Filed: 2002-12-30
Abstract: PURPOSE: An FPD(Flat Panel Display) device is provided to dispose a conductive ground member, in order to easily ground a control PCB if horizontal/vertical lengths of the control PCB disposed on a rear side of an FPD module are smaller than the FPD module, thereby reducing fabrication costs. CONSTITUTION: A control PCB(30) is disposed on a rear side of a mold frame(28) for forming a rear side of an FPD module(10). The control PCB(30) is connected to a driving IC by an FPC(Flexible Printed Circuit)(14), and controls an image signal. A conductive ground portion is disposed on the control PCB(30). The ground portion is disposed on a rear side of the control PCB(30), in order to be contacted with a plane contact portion(52) of a ground member(50) disposed on the rear side of the control PCB(30). The ground member(50) of the control PCB(30) consists of the plane contact portion(52) contacted with the ground portion, and a side contact portion(54) contacted with a chassis for forming a side of an upper part of the FPD module(10) by being curved from the plane contact portion(52).
Patent KR-20020013959-A (KR)
IPC: A61K8/97
Filed: 2000-07-11
Abstract: 본 발명은 하기 화학식 I의 티타늄으로부터 유도된 화합물에 관한 것이다.  본 발명은 또한 치아우식증 예방용 경구 조성물중의 상기 화합물의 용도에 관한 것이다. 
     <화학식 I> 
     [TiF x L y ] z-   
     상기 식에서, L은 하기 화학식 II의 화합물을 나타내고, 
     x는 2, 4 또는 5를 나타내고, 
     y는 1 또는 2를 나타내고, 
     z는 0, 1 또는 2를 나타낸다. 
     <화학식 II> 
     
       
     
     상기 식에서, m은 0 또는 1이고, 
     n은 0, 1 또는 2이다.
Patent KR-20020059596-A (KR)
Filed: 2000-09-25
Abstract: HPRR 방법은 각 개별 패킷이 흐름을 위한 트래픽 사양에 부합하는지 아닌지를로서 표시하기 위해 토큰 버킷 레이트 분류기들을 사용한다. 흐름들은 단일 서비스 클래스내에 존재하는 것으로 간주된다. 일 이런 클래스는 디폴트 "최선형" 서비스 클래스로서 구분된다. 각 서비스 클래스는 모든 클래스들이 활동중일 때 클래스에 보증된 대역폭의 그 부분에 대응하는 가중이 할당된다. HPRR 방법은 흐름으로부터의 패킷이 두가지 방식 중 하나, 즉, 그 클래스의 할당된 대역폭의 부분이나 최선형 대역폭의 부분 중 어느 한쪽으로서 포워딩되는 것을 허용한다. 그 패킷들을 전송하기 위해 흐름에 대하여 항상 두 개의 경로들을 제공함으로써, 흐름은 두가지 상이한 클래스들, 즉, 그 일차 또는 구축 클래스와, 최선형 클래스의 그 공정한 몫이 항상 주어진다.
Patent KR-20020062933-A (KR)
Title: 비활성 양극을 이용한 순수 알루미늄의 전해질 제조
IPC: C25C/
Filed: 2000-10-27
Abstract: 비활성 양극을 포함하는 전기 환원 전지에서 판매용 순도의 알루미늄을 생산하는 방법이 개시된다. 이러한 방법은 수용 가능한 수준의 철, 구리, 니켈 불순물을 포함하는 알루미늄을 생산한다. 이러한 공정에서 사용되는 비활성 양극은 바람직하게는 세라믹 산화물 상과 금속 상을 포함하는 서멧 물질을 포함한다.
Patent KR-20020054356-A (KR)
Title: Flat support with at least one semiconductor chip
IPC: G06K19/07
Filed: 2000-11-23
Abstract: The flat mount assembly, or transponder, has at least one semiconductor chip that is connected to an antenna for interchanging data and power with an electronic apparatus. The antenna is formed of two electrical conductors. A conductive layer is formed on the mount in overlapping relationship with the electrical conductors of the antenna. The overlapping conductive layer results in greater capacitive coupling between the electronic apparatus and the flat mount assembly.
Patent KR-20020060251-A (KR)
IPC: C12N15/86
Filed: 2000-11-30
Abstract: 본 발명은 (a) 게놈 ran(gRNA) 또는 RNA 바이러스의 완전한 길이 카피를 포함하는 DNA; 또는 (b) 하나 이상의 구조 또는 비구조 단밸질 및 RNA 의존적 RNA 폴리머라아제를 암호하는, RNA 바이러스 gRNA의 하나 또는 여러개의 단편을 포함하는 DNA; 또는 (c) (a) 또는 (b)의 서열과 60% 이상의 상동성을 가진 DNA를 세균 인공 염색체(BAC)내로 클로닝시키는 단계를 포함하는 DNA의 제조 방법에 관한 것이다. 또한, RNA 의존적 RNA 폴리머라아제 및 하나 이상의 구조 또는 비구조 단백질을 암호하는 바이러스의 천연 서열과 60% 이상의 서열 상동성을 가진 코로나바이러스의 게놈 RNA(gRNA)에서 유래된 서열을 포함하는 DNA가 제공되는데, 이 DNA의 단편은 비리온내로 어셈블될 수 있는 RNA 의존적 RNA 폴리머라아제로 전사될 수 있다. 또한, RNA 또는 비리온의 제조에 있어서 이들 핵산의 사용 및 이들 DNA, 바이러스 RNA 또는 비리온을 포함하는 약제들이 개시되어 있다.
Patent KR-20020065550-A (KR)
IPC: F25B43/02
Filed: 2000-11-17
Abstract: 이 다공질 부품의 제조방법에서는, 소결부품으로서의 압축기 내부의 헤드부품(11A),(11B)을 적어도 진공치환 또는 가열블로우 세정을 하는 것으로서, 압축기 내부의 헤드부품(11A),(11B) 중의 방청유등의 오염나 슬러지의 원인으로 되는 기름을 압축기 내부의 헤드부품(11A),(11B)으로부터 배출시키고 나서, 이 압축기 내부의 헤드부품(11A),(11B)을 냉동기유로서의 알킬벤젠계유에 침지시킨다. 이것에 의하여, 압축기 내부의 헤드부품(11A),(11B)중의 열화유인물질을 냉동기유로 치환가능하여, 냉동기의 구성부품으로서 장기간 사용하더라도 오염이나 슬러지를 초래하지 않는 냉동장치용 다공질 부품을 제조할 수 있다.
Patent KR-20020062330-A (KR)
Title: 케이블 ｔｖ 시스템의 일부를 형성하는 로컬 네트워크
IPC: H04N7/173
Filed: 2000-12-14
Abstract: 케이블 TV 시스템의 부분을 형성하는 로컬 네트워크(10)는 가입자 아웃렛(21)을 포함하는데, 신호들은 미리 결정된 반송 주파수 대역 내에서 상기 가입자 아웃렛으로부터 상기 시스템의 전파 중계소(11)로 복귀 방향으로 전송될 수 있다.  상기 네트워크(10)는 상기 가입자 아웃렛(21)에 연결된 입력(24), 상기 전파 중계소(11)에 연결된 출력(27), 상기 입력(24)에 연결되고 상기 반송 주파수 대역들 내의 서로 다른 통과 대역을 갖는 다수의 대역 통과 필터들(28-31) 그리고 적어도 하나의 미리 결정된 기준 레벨을 갖는 상기 필터들(28-31) 중의 하나로부터의 출력 신호의 에너지 레벨을 비교하고 상기 비교의 결과에 의존하는 논리 신호를 논리 제어 유닛(36)에 전달하기 위해 각각 배열된 대응하는 다수의 검출기(32-35)를 포함하는 노이즈 감소 유닛(23)을 갖는데, 상기 논리 제어 유닛(36)은 이러한 신호들이 상기 논리 제어 유닛(36) 내에 저장된 어떤 조건들을 만족시키는지를 결정하고 이에 따라 제어 신호를 제어 가능한 봉쇄 회로(26)에 전달하기 위해 배열되며, 상기 제어 가능한 봉쇄 회로(26)는 상기 입력(24)으로부터 상기 출력(27)으로의 신호를 전송하는 역할을 하는 분리된 선(25)에 연결되고 상기 제어 유닛(36)에 의해 수신된 논리 신호들이 상기 유닛에 저장된 조건들을 만족시키는 것을 지시하는 상기 제어 유닛(36)으로부터의 제어 신호를 수신할 때에만 신호들의 통과를 허용하도록 배열된다.
Patent KR-20020064971-A (KR)
IPC: H04L12/70
Filed: 2001-11-02
Abstract: 데이터 량에 따라 과금이 행해지는 통신망의 이용에 의한 데이터 통신의 수행에서, 송수신될 일련의 대상 데이터의 송수신의 개시 및 종료를 인식하고, 송수신될 상기 일련의 대상 데이터의 송수신의 상기 개시로부터 종료까지 송수신된 패킷의 양이 측정되고, 따라서 통신 요금이 산출되며, 상기 산출된 통신 요금이 사용자에 의해 특정된 경고 금액에 도달하였는지 여부를 판단하여 상기 산출된 통신 요금이 상기 경고 금액에 도달한 경우 사용자에게 그 효과를 경고한다.
Patent KR-20030009371-A (KR)
Title: Placebo-type compression orthesis
IPC: D04B1/26
Filed: 2001-02-27
Abstract: The surgical stocking made by knitting a knitting yarn together with an extensible weft yarn is a placebo type stocking suitable for exerting compressive pressure at the ankle of less than 8 mmHg, and preferably less than 5 mmHg. It is intended for double blind tests versus placebo using a product having the same structure, the same visual appearance, and the same feel as an active stocking but compression that is negligible and thigh/ankle degressivity that is close to unity. The weft yarn presents mass per unit length lying in the range 250 dtex to 600 dtex, preferably in the range 350 dtex to 500 dtex, with the proportion of elastic material being less than 25% and preferably less than 20% of the total weight of the thread. Its elongation capacity lies in the range 200% to 350%, preferably in the range 200% to 300%, but its springiness (II) is very different from that of an elastic stocking (I).
Patent KR-20020092985-A (KR)
IPC: C23C30/00
Filed: 2000-03-15
Abstract: The inventive coating for diamond and diamond-containing materials represents a coupling of an internal layer, made of tungsten carbide, with an external tungsten layer, both layers being fluorine alloyed. The inventive coating makes it possible to ensure a good adhesion of diamonds and diamond-containing materials to a backing. Methods of applying said coatings are also disclosed.
Patent KR-20020089404-A (KR)
Title: 면역요법에서 ｍｉａ의 용도
IPC: A61K38/095
Filed: 2001-03-15
Abstract: 본 발명은 염증성 질환을 예방하기 위한 MIA의 용도, 구체적으로 관절 연골의 만성적인 파괴를 치료하기 위한 이들의 MIA의 용도에 관한 것이다. 보다 구체적으로, MIA는 류마티스성 관절염을 앓고 있는 환자의 MIA 항원에 대한 특이적인 T-세포 관용을 유도하기 위해 사용할 수 있다.
Patent KR-20040063693-A (KR)
Title: Functional milk product
Inventor: SON YOUNG SUK
IPC: A23C9/00
Filed: 2003-01-08
Abstract: PURPOSE: A functional milk product prepared by fermenting a functional material and conventional milk product material is provided. The fermented functional material is prepared by fermenting nutraceuticals, cereals, vegetables, fruits, tourmarine, loess, charcoal and the like. It has characteristic taste and flavor of milk products and can be effectively used as a nutritious food for consumption. CONSTITUTION: Cereals such as rice, barley, foxtail millet, oat, Vigna sinensis, buckwheat, sorghum, red-beans, mung beans and the like are fermented with nutraceuticals, fruits, tourmarine, loess, charcoal or the like to produce a functional material. In the process for making milk product, the functional material is added. The nutraceuticals contain ginseng extract, mushroom extract and powder, fermented organic material of animals and plants, physiologically active materials of plants, animals, birds, bacteria and carbohydrates or the like. The fruits contain plums, ginger, grapes, bananas, pears, pineapples, jujubes, chestnuts, apples, melons, water melons, persimmons, apricots, peaches, cherries, grapefruits, tomatoes, cucumbers, carrots, garlic, onion, leeks, lettuce, broccoli, cactus, Angelica archangelica, aloe and the like.
Patent KR-20040067048-A (KR)
Inventor: OH TAE SUNG
IPC: H01L21/60
Filed: 2003-01-21
Abstract: PURPOSE: A method and an apparatus for bonding a flip chip using an inductive heater for applying AC magnetic field are provided to mount an IC chip on a PCB by using the inductive heater. CONSTITUTION: A plurality of solder bumps(14) are formed according to a predetermined interval between a PCB(15) and an IC chip(11). The IC chip and the PCB are adhered each other by heating the solder bumps. An inductive heater(12) is installed nearly to the IC chip in order to heat selectively the IC chip. An inductive coil(13) is installed around the inductive heater. The inductive coil is used for applying the AC magnetic field to the inductive heater. The inductive heater includes a conductive metal plate, a graphite plate, and a metal layer or a conductive ceramic coating layer.
Patent KR-20040067097-A (KR)
Title: Color flat panel display
Inventor: LIM JONG HO
IPC: H01J31/12
Filed: 2003-01-21
Abstract: PURPOSE: A color flat panel display is provided to prevent damages of ambient metal electrode and simplify the structure of the display by evaporating a getter through the use of laser beam. CONSTITUTION: A color flat panel display comprises a rear glass(1) serving as a base plate; a rear electrode(2) deposited on the inner surface of the rear glass so as to form a conductive plate; an electron source(3) disposed on the rear electrode so as to emit electrons; a front glass having an extraction electrode(4), a signal electrode(5), a focus electrode(6), a horizontal deflection electrode(7), and a vertical deflection electrode(8), wherein the front glass is deposited with a phosphor for emitting light by the electron beam; and a getter(13) interposed between the electron source and the rear electrode constituted by a graphite layer formed on the inner surface of the rear glass so as to increase the vacuum level of the display. The graphite layer is not formed in the area of the rear electrode where the getter is disposed.
Patent KR-20040068787-A (KR)
Inventor: PARK SE HUN
IPC: H04B5/00
Filed: 2003-01-27
Abstract: PURPOSE: A window structure for infrared communication is provided to attain reliability and security by minimizing an error in communication between a banking automation device and a mobile terminal. CONSTITUTION: An infrared signal transmitted from a mobile terminal(4) passes through a window(3) to reach a transmitting/receiving module(5). In this case, if the infrared signal is transmitted to the front surface of the window(3) from the mobile terminal, the infrared signal reaches the transmitting/receiving module(5) after passing through the window(3) or after passing through a through hole(6). Meanwhile, if the infrared signal is transmitted from the mobile terminal(4) to the up/down/left/right side of the window(3), a portion of the infrared signal is refracted at the window(3) while passing through the window(3) to reach the transmitting/receiving module(5) and a portion of the infrared signal is reflected from an inner wall of the through hole(6) while passing through the through hole(6) to reach the transmitting/receiving module(5).
Patent KR-20040069793-A (KR)
Inventor: KIM JEONG TAE
IPC: G01Q60/46
Filed: 2003-01-30
Abstract: PURPOSE: A scanning capacitance microscope and a measurement method thereof are provided to reduce a sample manufacturing time and prevent damage of a wafer by installing a cantilever and by measuring a doping profile of a wafer end part through an ion-beam. CONSTITUTION: A scanning capacitance microscope includes an actuator(4), a cantilever(5), and a scanning capacitance microscope. The cantilever(5) includes a bending section(5a). A measurement method of the scanning capacitance microscope exposes an end part(3) of a wafer by using the scanning capacitance microscope having the cantilever(5). The bending section(5a) of the cantilever(5) is adjusted to have a predetermined angle such that a probe(6) is positioned at the end part of the wafer. The probe(6) is positioned at a predetermined part by adjusting the bending section(5a).
Patent KR-20040070553-A (KR)
Inventor: LEE JUN HUI
IPC: H05K1/02
Filed: 2003-02-04
Abstract: PURPOSE: A PCB is provided to achieve improved electrostatic characteristics by separating a ground plane on a circuit in the area with a low resistance against a static electricity. CONSTITUTION: A PCB comprises a signal plane, a power plane, and a ground plane(200) which is stacked into a layer. The ground plane has a plurality of small planes(221,222) formed by the portion of a main plane(210) having a low resistance against a static electricity and which is separated from the main plane. The main plane and the small planes are connected at one or more points. The ground plane has a plurality of connectors(321,323,233,234) for connecting the main plane and the small planes.
Patent KR-20040070755-A (KR)
Inventor: KIM TAE HUN
IPC: H01L21/265
Filed: 2003-02-04
Abstract: PURPOSE: An exhaust pipe of a cryo pump is provided to exhaust nitrogen gas when the nitrogen gas is sufficiently diluted with process gas after a desired uniform pressure of gas is maintained. CONSTITUTION: A piston(110) moves backward/forward, installed in the exhaust pipe of the cryo pump. A pressure detecting unit(120) detects the pressure of gas induced from the exhaust pipe, installed in the piston. A signal detected by the pressure detecting unit is delivered to the first valve(132) to introduce air to the first air line(130) that is perpendicularly installed in the exhaust pipe so as to make the piston move forward due to the introduced air. A release signal form the pressure detecting unit is delivered to the second valve(142) to introduce air to the second air line(140) that is installed in the end surface of the exhaust pipe so as to make the piston move backward due to the introduced air. A plurality of piston guides(160) support and seal the piston, installed in the piston and the exhaust pipe. A stopper(170) controls movement of the piston, installed in the exhaust pipe corresponding to the rear end of the piston. A gas exhausting pipe(150) is perpendicularly installed in the exhaust pipe. Process gas is exhausted through the gas exhausting pipe according to the forward movement of the piston.