baber/WOPTO huggingface dataset:
Patent JP-2003174927-A (JP)
Title: Cosmetics case
Inventor: TAKAHASHI KEN
IPC: A45D33/00
Filed: 2001-12-12
Abstract: <P>PROBLEM TO BE SOLVED: To provide a cosmetics case, capable of simply removing a mirror plate from a cover without a special tool.  <P>SOLUTION: This cosmetics case is provided with a hinge block 15 formed on the side edge of the lid 5 to which the mirror plate 7 is fitted by raising from the side edge and rotatably connected to the case body 4, a slide piece 19 forming a continuous outline contour with the hinge block 15, movably locked, and freely removably engaged with the mirror plate 7, an inclined surface 15a formed on the hinge block 15 to guide the movement of the slide piece 19 and increased in horizontal distance from the mirror plate 7 toward the tip side in the rising direction of the hinge block 15, and a stopper 28 for positioning the slide piece on the rising side of the hinge block 15 as a locking position of the mirror plate 7.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003188930-A (JP)
Title: Digital modulator, and digital modulation method
Inventor: SUZUKI HIROYUKI
IPC: H04L27/20
Filed: 2001-12-13
Abstract: <P>PROBLEM TO BE SOLVED: To provide a digital modulator, which can exhibit high modulation accuracy in a simple constitution, and a digital modulation method.  <P>SOLUTION: This digital modulator converts input data into digital data which indicates the quantity of phase variation, separately for each processing unit of a specified number of bits, and processes the digital data accumulatively thereby computing the phase in every processing unit, and selectively outputs the carrier wave of a corresponding phase from among a plurality phases of carrier wave being generated according to the kind of digital data while switching it for every processing unit, based on the processing result of an operation means.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003186462-A (JP)
Title: Image display device
Inventor: KIMATA AKINORI
IPC: G06F3/0484
Filed: 2001-12-14
Abstract: <P>PROBLEM TO BE SOLVED: To provide an image display device which can display an image with good visibility according to the posture and position of a user.  <P>SOLUTION: The image display device comprises a display part 8 which displays an image, a user recognition part 1 which recognizes the face of the user, a face direction decision part 4 which decides the face direction or position of the user to the display part 8 according to information obtained by the user recognition part 1, a display direction determination part 5 which determines the display direction of a specified image according to the face direction of the user decided by the decision part 4, and a main control part 6 which generates the specified image with the display direction θ determined by the display determination part 5 and displays the generated specified image at the display part 8.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181637-A (JP)
Title: Underwater automatic gas cutting device
Inventor: YAMASHITA YASUO
IPC: B23K7/00
Filed: 2001-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To obtain an underwater automatic gas cutting device, with which a steel plate can accurately be cut underwater so that the cut part can be reused as a weld joint, and which enables efficient underwater cutting due to its automatization.  <P>SOLUTION: In the underwater automatic gas cutting device, a rail 4 is laid on the surface of water along a cutting line. On the rail 4, a travelling driving device 6 and an automatic cutting machine 5, which conducts cutting operation provided with a gas hose connecting part and a cutting nozzle holding part, are mounted. The cutting nozzle holding part holds a slide bar 10, which can vertically be slid and is sunk underwater. An air curtain nozzle is mounted on the tip end of the slide bar 10. The air curtain nozzle is connected with a gas hose through the gas hose connecting part, so that preheating oxygen, ethylene, cutting oxygen, and compressed air are fed.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003181518-A (JP)
Title: Method and device for cooling metal plate
Inventor: YUASA TAKENORI
IPC: B21B45/02
Filed: 2001-12-18
Abstract: <P>PROBLEM TO BE SOLVED: To prevent the generation of strain by restraining the super-cooling of a metal plate width direction end portion by a cooling device.  <P>SOLUTION: On the upper surface 5a and bottom surface 5b of an immersion bath 5 composing a part of a cooling device body 4, slit nozzles 31a, 31b, 32a and 32b in the width direction that spray cooling water and the like capable of preventing the movement of the cooling water in the width direction end portion direction of the metal plate 1 along the longitudinal direction of the metal plate 1 are provided. At this time, the width direction slit nozzles 31a-32b are provided so that spraying hydraulic pressure is applied to the position of a prescribed non-cooling width Δ from the width direction of the metal plate 1 and the width capable of preventing the super-cooling of the width direction end portion of the metal plate 1 is arranged as the non-cooling width Δ. The metal plate 1 introduced into the cooling device 2 is cooled by passing the immersion bath 5 but the cooling water movement to the width direction end portion is restricted by the spraying fluid of the width direction slit nozzles 31a-32b and cooling water does not act to cool from the width direction end portion of the metal plate 1 to the region of the non-cooling width Δ. As a result, the super-cooling of the end portion is restrained.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003185186-A (JP)
Title: Ventilating direction controller and building equipped therewith
Inventor: KAWAZOE YUJI
IPC: E06B7/10
Filed: 2001-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide a ventilating direction controller and a building equipped therewith, enabling a hollow layer between double window sashes such as double glazing sashes or between double walls to be used in ventilation and air- conditioning as necessary, while enabling outside air to be admitted into the building or air inside the building to be discharged to the outside air, and achieving energy savings.  <P>SOLUTION: The ventilating direction controller 1 includes a casing 24 with openings 21, 22 and 23; a flap 26 disposed in a space 25 inside the casing 24 in such a manner as to be rotatable in A and B directions so that it can close the openings 21, 22 and 23 by rotating in the A and B directions; and a rotating means 27 for rotating the flap 26 in the A and B directions.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003188403-A (JP)
Title: Photovoltaic device
Inventor: SHIOZUKA HIDENORI
IPC: H01L31/042
Filed: 2001-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide a photovoltaic element excellent in weather resistance.  <P>SOLUTION: The photovoltaic element has a back reflection layer (102), a semiconductor layer (103) and a transparent electrode layer (104) which are laminated on a conductive substrate (101), and also has a light reception surface. In the photovoltaic element, at least one side of an end of the photovoltaic element has a protrusion toward the light reception surface, and a resin layer (107) is provided on the light reception surface side of the photovoltaic element so as to cover at least a part of the protrusion on the light reception surface side.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003180478-A (JP)
Title: Seat back angle adjusting system
Inventor: KOJIMA YASUTAKA
IPC: A47C1/025
Filed: 2001-12-20
Abstract: <P>PROBLEM TO BE SOLVED: To provide a seat back angle adjusting system which prevents generating sound and improved in an operating feeling.  <P>SOLUTION: This seat back angle adjusting system is composed of inserting an elastic body 43 into a gap between a connection shaft 4 and a cam 32.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003191161-A (JP)
Title: Aggregate polishing device
Inventor: TANAKA SHINSUKE
IPC: B02C17/10
Filed: 2001-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide an aggregate polishing device suited for polishing a crushed material such as crushed sand to be an aggregate material for concrete.  <P>SOLUTION: This aggregate polishing device 1 is provided with a rotating plate 6 provided with a plate surface 6a having a conical-shape part enlarging downward, having a longitudinal cross section of the plate surface curved into a recess shape from the central part to the outer circumference part, and freely rotating around a rotation axis core, and an outer circumferential annulus 7 provided with an inner wall surface 7a having a part reducing upward and having the longitudinal cross section of the inner wall surface 7a curved into recess shape. The rotation axis core is inclined in the range of 10-30° relative to the vertical direction, a product take-out hole 40C is provided in the inclined direction of the rotation axis core in the upper part of the outer circumferential annulus 7, and a polishing/crushing bowl is disposed in a crush chamber 27 formed with the plate surface 6a and the inner wall surface 7a.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003184792-A (JP)
Title: Blower
Inventor: EGUCHI AKIHIRO
IPC: F04D29/66
Filed: 2001-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To improve silent performance at the time of the incorporation of an outdoor machine unit for an air-conditioner by suppressing the occurrence of blade end vortex to the utmost.  <P>SOLUTION: This blower comprises a hub 14 as a rotation center and a plurality of blades 13, 13 and 13 of which the outer peripheral ends of a leading edge 13a and a trailing edge 13b arranged on outer peripheral surface of the hub 14 are positioned at a front part in the rotational direction. The respective blades 13, 13 and 13 are formed such that the respective outer peripheral end parts 13c are warped to a suction side and the radial width W of the warped part is formed so as to gradually increase from the leading edge 13a toward the trailing edge 13b. Accordingly, the flowing around of the blade end vortex from the pressure surface 13d side of the blade 13 to the negative pressure surface 13e side is smoothed for preventing the enlarging and turbulence of the blade end vortex.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003184184-A (JP)
Title: Building unit connecting structure and building unit connecting method
Inventor: OMOE MUNEO
IPC: E04B1/48
Filed: 2001-12-21
Abstract: <P>PROBLEM TO BE SOLVED: To provide a joint structure which facilitates connection of columns of respective upper- and lower-story building units, and to provide a connecting method using the connecting structure.  <P>SOLUTION: According to the connecting structure, a lower-story column 11 has a horizontal joint surface 13 on an upper bed thereof, which surface has a through hole 14 formed at the center thereof. The column 11 has a notch 16 formed by cutting away a surface of the column, at a location near the horizontal joint surface, which notch is then reinforced by reinforcing plates 27, 28 stuck onto both sides thereof. An upper-story column 21 has a horizontal joint surface 23 on a lower bed thereof, which surface has a through hole 24 formed at the center thereof. The column 21 has a notch 26 formed by cutting away a surface of the column, at a location near the horizontal joint surface, which notch is then reinforced by the reinforcing plates 27, 28 stuck onto both sides thereof. In implementation of the connecting method, a bolt 15 is inserted into the through holes 14, 24, and a bolt fastening tool is inserted into the interior of the columns 11, 21 from the notches 16, 26, to thereby fasten the columns to each other by bolts 15 and nuts 25.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003199302-A (JP)
Title: Split motor core and manufacturing method therefor
Inventor: SAKUGI KENJI
IPC: H02K15/02
Filed: 2001-12-26
Abstract: <P>PROBLEM TO BE SOLVED: To provide a split motor core which is easy to assemble and is superior in productivity, and to provide its manufacturing method.  <P>SOLUTION: In the method of manufacturing the split motor core 1, which is constituted by combining a plurality of dividing pieces 10 into a circular form, one of dividing pieces 10 of adjacent divisional pieces 10 is provided with a projecting region which has a projection where an electromagnetic plate in each layer projects toward the other at the end of division in the circumferential direction, and the other dividing piece 10 is provided with a cut region consisting of a cut made by cutting the electromagnetic plate in every layer at the end in circumferential direction, and the top made outward of the divisional piece 10 among the top of the projecting region is inserted to one side of the cut region in facing manner, thereby assembling the adjacent dividing pieces 10.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003155097-A (JP)
Title: Opener cover
Inventor: IRIE SHIGEO
IPC: B43K29/00
Filed: 2001-11-19
Abstract: PROBLEM TO BE SOLVED: To provide an opener cover which safely covers a tip when an opposite side to a clip of a writing implement or the like is to be used for opening a lid or a removing a staple, and to prevent a cap from rotating to make a staple remover easy to use. SOLUTION: A hinged lid 3 is provided at a tip of an opener or a staple remover 1 provided on an opposite side to a clip of a writing implement 2 or the like. Alternately, a joint 4 for filling a gap between the opener 1 and a writing implement body is mounted. The joint 4 comprises a folded elastic object. A fitting type lid 3 for allowing a knock pin of the implement to pass through is put over. The lid 3 and the body 2 are equipped with detents which are fitted with each other, or a sliding lid 3 is provided. Thus, a tip of the opener or the staple remover is not exposed.
Patent JP-2003193960-A (JP)
Title: Reciprocating piston pump
Inventor: TERAJIMA MASAO
IPC: F04B15/02
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To surely notify a predetermined wear of a valve before a carrying function is much deteriorated.  <P>SOLUTION: In this reciprocating piston pump 1, pressures P<SB>1</SB>and P<SB>2</SB>of carried fluids respectively pushed by two carrying cylinders 3 and 4 are measured by a pressure gauge 113, and measured signals are fed to a monitoring device 114. When a pressure difference ΔP between the both pressures P<SB>1</SB>and P<SB>2</SB>becomes larger than a set value P<SB>0</SB>, the monitoring device 114 gives an alarm. By means of this alarm, the predetermined wear of the first and second discharge valves 11 and 12 is surely noticed before the carrying function is much deteriorated, whereby an accurate replacement timing of a worn part of the first and second discharge valves 11 and 12 is grasped. Further, since the replacement timing of the abrasion part of the valve is grasped, an operation plan and a repairing plan of the pump are capable of being surely set beforehand.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003197883-A (JP)
Title: Solid-state imaging device
Inventor: WATANABE EIJI
IPC: H01L27/14
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an imaging device which can reduce the size of a package without decreasing the number of pins of the package.  <P>SOLUTION: The solid-state imaging device has a solid-state imaging element which has bonding pads on two opposite sides, an inner lead layer which is a rectangular package sectioning a space for storing the solid-state imaging element inside with a bottom plate part and a frame part and has inner leads connecting bonding parts of the solid-state imaging element on two sides facing the bonding pads, electrolytic plating wires which are connected to the inner leads and distribute the connected inner leads to the four sides of the bottom plate, and the package which has outer leads formed by extending the electrolytic plating wires up to the flanks of the bottom plate.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003163982-A (JP)
Title: Windshield unit for microphone
Inventor: YAMAUCHI GORO
IPC: H04R1/00
Filed: 2001-11-22
Abstract: <P>PROBLEM TO BE SOLVED: To provide a windshield unit for a microphone whose robustness, acoustic characteristics, waterproof property are made excellent.  <P>SOLUTION: The windshield for a microphone is manufactured by molding a hollow metallic sphere, a metallic piece, or porous metal such as forming metal. The internal wall face, front face or both faces of the opening are coated with water repellent materials constituted by mixing PTFE (polytetraphloroethylene) powder whose contact angle with water is 100°C or more, and whose molecular weight is about 8000 by a weight rate which is 80±10%, vynylidenum fluoride by 18±5%, and perfluoroether by 2±1%, and diluting it by butyle acetate, and stirring it by ball mill, or by mixing the PTFE (polytetraphloroethylene) powder by the weight rate which is 79±10%, vynylidenum fluoride by 18±5%, perfluoroether by 2±1%, and photocatalyst titanium dioxide fine particles by 0.5±1%, and diluting it by butyle, and stirring it by the ball mill. Thus, it is possible to provide a windshield unit for a microphone where windshields in a mono-layer or multi-layers are formed. In this case, the mean radius of opening of sound transmitting materials is set so as to be not more than 5 mm.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003194408-A (JP)
Title: Negative pressure break device
Inventor: FUJIWARA KATSUHIRO
IPC: F16K31/06
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To surely prevent reverse inflow from a storage tank side even in an abnormal operation.  <P>SOLUTION: A hot water filling solenoid valve 53, an edge cutting valve set 7 and check valves 54, 55 are mounted in a hot water filling channel 50 branching from a hot water supply circuit for filling hot water in bathtub. The hot water filling solenoid valve is opened during filling the hot water to thrust a subsidiary selector valve 71 with water supply pressure and move down the subsidiary selector valve and an air charge valve 72 integrated with a valve shaft 711 against a spring 715. The lower movement causes the opening of the subsidiary selector valve, the closing of the air charge valve and the opening of the check valves to fill the hot water. Upon completing the filling of the hot water, the check valves are closed by closing the hot water filling solenoid valve and then remaining water supply pressure in a valve chamber 741 is opened by opening a pressure release valve 73, whereby the subsidiary solenoid valve is closed and the air charge valve is opened to be reset to a steady state. In a steady state, even when the hot water filling solenoid valve fails in closing operation, air is momentarily sucked therein to avoid negative pressure because of the air charge valve being always opened, if negative pressure is produced in the hot water supply circuit, resulting in no occurrence of a counter flow.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003200397-A (JP)
Title: Electrostatic force micromanipulator
Inventor: TAKAHASHI KUNIO
IPC: B25J7/00
Filed: 2001-12-27
Abstract: <P>PROBLEM TO BE SOLVED: To provide an electrostatic force micromanipulator moving an object between a substrate and a probe by imparting electric charge to the object.  <P>SOLUTION: In the electrostatic force micromanipulator for moving the electrifiable target object 4 between the conductive probe 1 and the substrate 3, the probe 1 or the substrate 3 which imparts electric charge to the target object 4 and has conductivity, and a power source 2 for applying a voltage between the substrate 3 and the probe 1 are provided. The electrostatic force micromanipulator applies the voltage between the substrate 3 and the probe 1, imparts electric charge to the target object 4 and moves the target object 4 between the probe 1 and the substrate 3.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003194512-A (JP)
Title: Interferometer
Inventor: KATO SHIGEKI
IPC: G01B9/02
Filed: 2001-12-28
Abstract: <P>PROBLEM TO BE SOLVED: To obtain a small-sized interferometer that is low in noise, is hardly affected by drop-outs, and can be assembled easily.  <P>SOLUTION: In the interferometer, such a constitution is adopted that a low-coherency light source is used as a light source, and a luminous flux is divided into two luminous fluxes in a light transmitting member. Then one (measuring luminous flux) of the divided luminous fluxes is projected by means of a reference mirror fixed to an optical head, and the other luminous flux is projected upon a moving or displacing object to be measured. In addition, an interference luminous flux is obtained by synthesizing the reflected luminous fluxes, and light having a specific wavelength is extracted by means of a wavelength selecting filter which only transmits the light having the specific wavelength and detected by means of a photodetector. Since this constitution is adopted, the interferometer can use a multimode semiconductor laser as a light source and, consequently, a light source means which is not affected by noise caused by the so called mode hopping. In addition, an interferometer that can output an accurate position when signals are restored even when a drop-out occurs due a scratch, etc., formed on a measuring surface can be realized.  <P>COPYRIGHT: (C)2003,JPO
Patent JP-2003502835-A (JP)
Title: 半導体デバイスの製造方法
IPC: H01L29/43
Filed: 2000-05-31
Abstract: (57)【要約】
ゲート誘電層（１７）によりチャンネル（１３）から絶縁されたゲート（２２）を有するトランジスタを含み、チャンネル（１３）が半導体本体（１）の表面（２）に設けられた第２導電型のアクティブ領域（４）に設けられており、第２導電型のソースゾーン（１１，９）とドレインゾーン（１２，９）との間で長さＬにわたって延びている半導体デバイスの製造方法において、半導体本体（１）内に第１導電型のアクティブ領域（４）を構成し、後の工程で設けるようになっているゲート（２２）の領域に凹部が設けられた誘電層（１４）を形成し、凹部内に絶縁層を形成してトランジスタのゲート誘電層（１７）を形成する。次に、第１導電層および第２導電層を形成する。第１導電層は凹部の幅と比較して比較的薄く、第１導電層および第２導電層は共にトランジスタのゲート（２２）を形成し、誘電層（１４）内の凹部を満たす。ゲートは中心部分（２１）と、この中心部分（２１）の両側に沿って位置する側端部分（１９）とを含み、これら中心部分（２１）および側端部分（１９）はゲート誘電層（１７）に接触し、チャンネル（１３）の長さＬにわたって変化するゲート（２２）の仕事関数を共に決定する。
Patent JP-2003505986-A (JP)
Title: 画面中の要素の個別化追跡装置及びこのような追跡を実施する方法
IPC: G06T7/20
Filed: 2000-07-21
Abstract: (57)【要約】
【解決手段】  要素を選び出し、空間座標と時間を割り当てることによってその移動を表示するための送信機によって、全追跡領域につき所定の時間間隔で表示を行う。再送信機が使用され、所定回数は時間基準の関数である。この方法は、移動した情報のみがあるフィルタとして用いられる画像の時間平均を行う過程、前記画像の時間平均を所定の時間間隔で更新する過程、人間の眼によって感知される異なるタイプの要素を分離する可視フィルタを備えたカメラによって得られる情報を使用する過程、各タイプの要素を分離する赤外線フィルタを備えたカメラによって最初に得られた情報を使用する過程を含む。
Patent JP-2003506247-A (JP)
Title: ブレーキシステムの制御装置
IPC: B60T8/40
Filed: 2000-08-01
Abstract: (57)【要約】
第１のボア（44）及び第２のボア（48）内に設けられた第１の円筒形部材（42）及び第２の円筒形部材（46）を備えたハウジングを有するブレーキシステム（10）の制御装置（12）。第１の円筒形部材（42）及び第２の円筒形部材（46）と第１の弁座部材（50）及び第２の弁座部材（54）は、加圧流体源に連結された第１のボア（44）及び第２のボア（46）を備えた第１の室（52）及び第２の室（54）をそれぞれ構成する。第１の弁手段（68）が第１の室（52）内に設けられ、第２の弁手段（70）が第２の室（56）内に設けられている。第１のボア（40）内の第１のプランジャ手段（72）と第１の弁座部材（50）が、車両の車輪ブレーキの第１の組（16）に連結された第１のブレーキ室（74）を構成し、第２のボア（48）内の第２のプランジャ手段（76）と第２の弁座部材（54）が、車両の車輪ブレーキの第２の組（16' ）に連結された第２のブレーキ室（78）を構成している。第１のプランジャ手段（72）の第１のステム（82）及び第２のプランジャ手段（76）の第１のステム（88）が、入力ロッド（18）に連結されたバランスレバー（100 ）に連結されている。入力ロッド（18）に加えられた入力としての力は、ステム（82,88 ）を同時に動かして先ず最初に室（74,78 ）とリザーバ（84）との間の連通を遮断する。しかる後、ステム（82,88 ）をさらに移動させるとボール（67,67'）が弁座部材（50,54 ）から離れ、計量された加圧流体が車輪ブレーキの第１の組（16）及び第２の組（16' ）に送られて主又はプライマリブレーキ作用を発揮させることができる。ＣＰＵ（17）により検出された動的条件に応答して、ソレノイド弁（21,25 ）は作動されて加圧流体が第１の弁座部材（50）及び第２の弁座部材（54）を移動させてこれらが対応関係にある第１のプランジャ手段（72）及び第２のプランジャ手段（76）に係合し、それにより先ず最初に室（74,78 ）とリザーバ（84）との間の連通を遮断する。しかる後、第１の弁座部材（50）及び第２の弁座部材（54）をさらに移動させると、計量された加圧流体が車輪ブレーキの第１の組（16）及び第２の組（16' ）に送られて副又はセカンダリブレーキ作用を発揮させると共に車両の受ける動的条件を減衰させることができる。
Patent JP-2003515244-A (JP)
Title: 半導体ウェーハから汚染物を減らす方法と装置
IPC: H01L21/00
Filed: 2000-08-03
Abstract: (57)【要約】
半導体ウェーハを集積回路（ＩＣ）に処理するためのラインを入出力（Ｉ−Ｏ）チャンバに提供し、処理ラインへ転送される前に、ウェーハから残余の汚染を除去することを促進する。半導体ウェーハを含むカセットがチャンバに置かれたあと、該カセットはライン及び空気からシールされる。次に、窒素等のドライ不活性ガスが、チャンバの先端に分散され、ウェーハのまわりでカバーブランケットを形成し、空気で運ばれる粒子、湿気及び有機気化物質等の汚染物質を置換して一掃する。パージガスが流れると、残余の湿気と気化物質からの液滴の圧力はもはや凝縮することができない中間圧力レベルが達されるまで、ガスと残余の汚染は比較的遅い速度でチャンバのボトムから排出される。その後、パージガスの流れは止められ、チャンバ中の圧力は、ベース操作バルブ（例えば１トルの数分の１）に比較的急速に低減し、ウェーハは、その後、ラインに転送され、ＩＣへの処理される。