baber/WOPTO huggingface dataset:
Patent KR-101448114-B1 (KR)
Inventor: JANG JIN HO
IPC: F16D23/12
Filed: 2013-07-31
Granted: 2014-10-13
Abstract: Disclosed is a split type actuator housing which newly configures assembling and fastening structures of a plurality of actuator housings installed at a gearbox housing to absorb processing error occurring when fabricating a single housing and an assembling error occurring when assembling the single housing, in order to secure an accurate mounting position of the actuator housings at the gearbox housing. The actuator housing includes a pair of main housings (120, 220); a pair of sub-housings (140, 240) individually assembled to the main housings (120, 220), respectively; first mounting portions (122-142, 222-242) formed at portions facing each other between the pair of main housings (120, 220) and the pair of sub-housings (140, 240), respectively; second mounting portions (160, 260) formed to share a single reference axis line (X) for axial alignment with respect to the pair of main housings (120, 220); third mounting portions (180, 280) setting a coupling axis line (Y) to mutually assemble with respect to the pair of main housings (120, 220) to restrain relative motions toward the axial direction and the axial orbiting direction; and fourth mounting portions (144, 224, 244) formed at one or more portions among the pair of main housings (120, 220) and the pair of sub-housings (140, 240).
Patent KR-101336634-B1 (KR)
Title: Safety fence for riverside sports facilities with improved water-passing property and structural stability, and capable of mechanical open and close
Inventor: JEONG GWANG HUI
IPC: E04H17/02
Filed: 2013-08-09
Granted: 2013-12-03
Abstract: The present invention relates to a safety fence capable of performing mechanical opening and closing processes for riverside sports facilities with improved water-passing property and structural stability, and more particularly, to a safety fence for riverside sports facilities with a water-passing function which does not resist the flow of water so as to protect safety fence for sports facilities when river or waterfront of streams are flooded by environmental reasons such as heavy rain or hurricane. The safety fence for riverside sports facilities according to the present invention enables the safety fence to be open using only a mechanical device without using an electric device such as a driving motor so as to deal with an emergency situation such as flooding river, free of electric shock accident. In addition, a maintenance cost does not occur due to damage in the driving motor, and damage in the safe fence due to floats can be minimized without resisting the flow of water by opening the upper part of the fence. Furthermore, a mesh body is open along the natural flow of river so as to maximize a water-passing effect and minimize the damage in the safety fence.
Patent KR-101463224-B1 (KR)
Inventor: LEE JUNG HUI
IPC: F23D14/62
Filed: 2013-08-28
Granted: 2014-12-16
Abstract: A multi-stage air mixing type gas burner apparatus includes: a base plate having a gas injection pipe coupling hole on the center, and a plurality of first combustion air inlets adjacent to the gas injection pipe coupling hole; a gas injection pipe coupled to the gas injection pipe coupling hole on a lower portion of the base plate; a first mixing pipe provided on an upper portion of the base plate to primarily mix gas introduced through the gas injection pipe with air introduced through the first combustion air inlets having a third-first combustion air inlet formed on a lower circumferential surface; a connecting rod provided on an outer circumferential surface on an upper portion of the first mixing pipe; a second mixing pipe mounted on the connecting rod having a second combustion air inlet formed to secondarily mix air introduced through the second combustion air inlet with the mixed gas in the first mixing pipe; and a burner head mounted on an upper portion of the second mixing pipe having a plurality of burner ports formed, wherein a second-first combustion air inlet and a second-first air amount control coupling portion with a first serration formed on an inner circumferential surface are formed on a lower portion of the second mixing pipe, a second-second combustion air inlet and a second-second air amount control coupling portion with a second serration coupled to the first serration formed on an outer circumferential surface are formed on an outer upper portion of the connecting rod, the second combustion air inlet is formed by overlapping the second-first combustion air inlet and the second-second combustion air inlet, and the overlapping of the second-first combustion air inlet and the second-second combustion air inlet is controlled in accordance with the coupling position of the first serration and the second serration.
Patent KR-101370532-B1 (KR)
Title: Polishing apparatus of discharge valve for reciprocating compressor
Inventor: YU SEUNG YEOL
IPC: B24B37/04
Filed: 2013-09-04
Granted: 2014-03-06
Abstract: The present invention relates to a polishing apparatus of discharge valves for a compressor capable of conveniently and quickly collecting and ejecting discharge valves by polishing discharge valves and allowing the discharging valves to be attached to a polishing plate equipped under a pressing polishing rotator. The polishing apparatus of discharge valves for a compressor comprises a rotary shaft vertically established within a main body, rotating by a motor and having an external gear in the external circumference of the upper part; a circular loading plate in a disk shape disposed to be horizontally fixed to the external periphery of the lower part of the external gear of the rotary shaft; a peripheral rotator disposed to be rotatable in the outer periphery of the upper part of the circular loading plate, and having an internal gear in the inner periphery; multiple rotary plates arranged in multiple in the periphery of the upper surface of the circular loading plate, having a gear formed in the outer periphery, which is interlocked with the internal gear and the external gear, and multiple shaft insertion holes, where the shaft part of a discharge valve is inserted so that the opening/closing adherence surface is positioned in the upper part, formed in the periphery of the center; a vertical elevator arranged to be projected in the upper part of the main body, and having a horizontal bar, which has a projected end positioned in the upper part of the rotary shaft, equipped in the upper part, and a vertical cylinder, in which a rod vertically passes through the horizontal bar, equipped in the upper part of the projected end of the horizontal bar; and a pressing polishing rotator equipped to be rotatable via a rotary connector in the lower part of the rod of the vertical cylinder, and having a polishing plate which polishes the opening/closing adherence surface of the discharge valve.
Patent KR-101471532-B1 (KR)
Inventor: LEE KIL YONG
IPC: G01F22/00
Filed: 2013-09-06
Granted: 2014-12-11
Abstract: The present invention relates to an apparatus and a method to measure an internal route volume of a gas component detector to measure the concentration of a predetermined gaseous material required to calculate, for example, a gas-liquid equilibrium partition coefficient and/or a solubility of the predetermined gaseous material with respect to various liquid materials, and effective porosity of a predetermined medium. The apparatus to measure an internal route volume of a gas component detector in accordance to the present invention to measure the concentration of the gaseous material flowing in and out through two ports includes: a gas container which has two ports and accommodates the predetermined gaseous material; an empty container which has two ports; a pipe line which connects the ports of the gas component detector; the gas container; the empty container; and a valve disposed on the pipe line. The pipe line and the valve are disposed and arranged to constitute a first loop to disconnect the gas component detector from the gas container and the empty container; a second loop to connect between the gas component detector and the gas container and disconnect between the gas component detector and the empty container; and a third loop to disconnect between the gas component detector and the gas container and connect between the gas component detector and the empty container such that the valve switches among the loops.
Patent KR-101397078-B1 (KR)
IPC: H01B5/14
Filed: 2013-09-10
Granted: 2014-05-19
Abstract: 졸-겔법의 화학적 방법에 의하여 제조되고, 산화구리(CuO)와, 알루미늄이 도핑된 산화아연(AZO)으로 구성되고, 상기 CuO의 몰비가 0.5 내지 2.0 몰%인 투명 복합체 전도성 산화막을 개시한다. 본 발명에 따른 복합 투명 전도성 산화막은 제조가 간편하면서도 비용이 적게 소요되는 졸-겔법을 이용하여 성막이 가능하다는 장점이 있고, 광학적 및 전기적 특성이 우수하여 각종 액정 디스플레이(Liquid Crystal Display; LCD), 플라즈마 디스플레이 패널(Plasma Display Panel), 유기발광소자(Organic Light Emitting Device; OLED), 태양전지 등의 디스플레이 장치 분야의 전극으로 유용하게 응용될 수 있다.
Patent KR-101571931-B1 (KR)
IPC: F23N5/08
Filed: 2013-09-30
Granted: 2015-11-25
Abstract: 본 발명은 화염감지장치용 시뮬레이션 장치에 관한 것으로, 보일러 내부에서 발생하는 화염과 소정의 오차 범위 내에서 동일한 밝기와 주파수로 발광하는 발광부; 상기 발광부를 지정된 주파수로 구동시키기 위한 주파수 발생부와, 상기 발광부를 지정된 밝기로 구동시키기 위한 밝기 설정부와, 시험대상인 화염감지장치를 이용해 상기 발광부로부터 발광되는 광원의 밝기와 주파수의 측정값을 상기 발광부에 설정된 밝기와 주파수의 설정값과 비교하여 그 차이 정도에 의해 상기 화염감지장치나 그에 연결된 광케이블의 감도와 노후화 정도 판별 및 잔여수명 추정 중 적어도 어느 한 가지 이상을 수행하는 제어부 및 상기 판별된 감도, 노후화 정도 및 상기 추정된 잔여수명 중 적어도 어느 한 가지 이상을 표시하는 디스플레이부를 포함한다.
Patent KR-101536421-B1 (KR)
Title: Lte 시스템에서의 ddn 제어를 위한 장치, 방법, 및 기록 매체
IPC: H04W68/00
Filed: 2013-10-02
Granted: 2015-07-14
Abstract: 본 발명의 실시 예는 단말이 아이들(idle)인 네트워크 보존(Preservation) 상태에서 최적화된 DDN 제어를 통해 불필요한 페이징(Paging)을 줄이고 중요도가 높은 패킷은 우선 처리할 수 있도록 하는 LTE(Long Term Evolution) 시스템에서의 DDN(Downlink Data Notification) 제어 기술에 관한 것으로, 본 발명의 일 측면에 따른 LTE 시스템에서의 DDN 제어를 위한 방법은, 보존(Preservation) 상태에서의 DDN(Downlink Data Notification) 제어를 위하여 S-GW에서 수행하는 방법으로서, (a) 서버로부터 수신된 패킷을 정상 처리할 제1 패킷과 폐기 처리할 제2 패킷으로 구분하기 위한 단계; 및 (b) 상기 제2 패킷은 폐기 처리하고 상기 제1 패킷에 대해서는 정상 처리를 위한 DDN(Downlink Data Notification) 메시지를 MME로 전송하는 단계를 포함할 수 있다.
Patent KR-101458519-B1 (KR)
Inventor: CHUNG SANG CHUL
IPC: F16L55/00
Filed: 2013-10-04
Granted: 2014-11-12
Abstract: The present invention relates to a device for connecting a double drainpipe embedded in a slab, which is formed by including a hard outer pipe embedded in a floor slab by having both ends inserted into a drainpipe connecting part of a first floor drainage trap embedded in the floor slab of a first faucet use space installed closely to a standing drainpipe and connected through the standing drainpipe to be connectable and a second floor drainage trap embedded in the floor slab of a second faucet use space separated from the standing drainpipe; a soft wrinkled pipe inserted into the hard outer pipe to connect the first floor drainage trap to the second floor drainage trap; and a packing block combined with both ends of the soft wrinkled pipe by screws in the first and second floor drainage traps and sealing and fixing the soft wrinkled pipe by being inserted into the drainpipe connecting part of the first and second floor drainage traps while horizontally extending the soft wrinkled pipe in the hard outer pipe. Thus, the performance of draining domestic sewage is improved and a stagnating phenomenon causing bad smell is prevented.
Patent KR-101513687-B1 (KR)
Inventor: CHOI IN SANG
IPC: A61B5/151
Filed: 2013-10-18
Granted: 2015-04-22
Abstract: Disclosed is a multi lancet cartridge. The multi lancet cartridge according to the present invention includes a lancet which includes a blood collection needle and a body which is combined with the rear side of the blood collection needle to expose the front side of the blood collection needle and two or more drums which have lancet coupling grooves to receive the lancet in a circumferential direction. The lancet is detachably attached to the lancet coupling groove. According to the present invention, a plurality of lancets are combined with the drum and the lancet is inputted to and outputted from the drum. Manufactured is a blood collection device without replacing the lancet by automatically using the lancet. An operation mechanism for successively using the lancet is easily performed by repetitively rotating the cartridge to receive the lancets by the backward and forward operations of a cam plate connected to an index lever when the cartridge is combined with a multi lancet driving device and is used.
Patent KR-101982025-B1 (KR)
Title: 댐핑 부재를 구비하는 압축기
IPC: F04C18/02
Filed: 2013-11-05
Granted: 2019-05-24
Abstract: 본 발명은 압축기에 관한 것으로, 보다 상세하게는 리어 헤드의 유출입 포트에 댐핑 부재를 장착하여 소음 및 진동이 차량 탑승객에게 전달되지 않도록 상쇄할 수 있는 댐핑 부재를 구비하는 압축기에 대한 것이다.
Patent KR-101384470-B1 (KR)
Title: Methods of preparation of plant-growth-promoter by using solid fermenation of chitosan
Inventor: KIM YOUNG GIL
IPC: A01N63/04
Filed: 2013-11-11
Granted: 2014-04-10
Abstract: The present invention relates to a method for preparing a plant growth promoter by solid fermentation of chitosan and a method of promoting plant growth using the method. The plant growth promoter according to the present invention is prepared by solid fermentation of chitin using Rhizopus oligosporus strain and has good preservation and plant growth promoting effect. The chitosan useful to a human body may be absorbed into plants.
Patent KR-101520548-B1 (KR)
Inventor: HONG HYE JUNG
IPC: F24C3/12
Filed: 2013-11-15
Granted: 2015-05-14
Abstract: According to an embodiment of the present invention, a gas range comprises: a body unit; a first burner installed in the body unit and heating a lower surface of a cooking vessel seated in a vessel support; a wall surface unit protruding toward the upper side of the body unit; a second burner installed in the wall surface unit and heating food received in the seated cooking vessel in the upper side by grilling; a first mixing valve controlling operation of the first burner; and a second mixing valve having an air control unit controlling an air amount supplied to the second burner and having a gas control unit controlling the gas amount supplied to the second burner and controlling operation of the second burner. The first mixing valve and the second mixing valve continuously discharge the air toward the first burner and the second burner when a gas supplied to the first burner and the second burner is blocked off.
Patent KR-101570801-B1 (KR)
IPC: A01G25/00
Filed: 2013-11-18
Granted: 2015-11-23
Abstract: 무인 병충해 방제 및 관수 장치를 개시한다. 본 발명은 인삼밭 지주목에  방제 및 관수 호스를 부착한 후 고압 펌프를 이용하여 식물보호제 및 물을 공급하여 살포하는 무인 병충해 방제 및 관수 장치로서, 더욱 상세히는 살포 약제의 인체 접촉이 없고, 신속하고 정밀한 살포로 재배 안전성을 확보하는 무인 병충해 방제 및 관수 장치에 관한 것이다. 상기한 목적을 달성하기 위한 구체적인 수단으로서 본 발명은, 살포액을 공급하는 펌프; 상기 펌프에 일단이 연결되어 상기 살포액을 이송하는 메인호스; 상기 메인호스의 타단에 설치되어 일정압력 이상이면 폐쇄되고 이하이면 개방되는 밸브; 및 상기 메인호스로부터 분기된 분기관과 분기관의 끝단에 구비되어 상기 살포액이 분무되는 노즐; 을 포함한다.
Patent KR-101518293-B1 (KR)
Inventor: CHO GA HYE
IPC: B63B23/40
Filed: 2013-11-22
Granted: 2015-05-07
Abstract: The present invention relates to a ship having a lifeboat on board, and a launching unit to launch the lifeboat at sea. The ship has a lifeboat setting space on a left and a right side viewed from a front of the ship to keep the lifeboat on board, and a corridor between a lifeboat setting space used as a place to comfort passengers, and an evacuation point on which passengers get into a lifeboat in case there is a maritime accident. As such, the present invention prevents negligent accidents, for example passengers falling from the deck, and allows passengers to get into the lifeboat from a point closest to the stateroom such that passengers can quickly and safely escape using the lifeboat in the shortest time possible.
Patent KR-101362855-B1 (KR)
Title: Method and mechanism for moderate ejection of aerial observation sub munition
Inventor: LEE YOUNG KI
IPC: F42B15/08
Filed: 2013-11-22
Granted: 2014-02-14
Abstract: Disclosed are a deceleration unfolding structure of a shell launching type observation submunition and a method thereof, comprising a first stage deceleration structure which ejects a submunition container (22) with a welding force of an ignition pressure transfer plate (15) by ignition of charge (14) of a complete munition (10) and spreads a drag chute (27) while a spin reduces the speed with a reduced rotary speed wing (23), and a second stage deceleration structure which operates a container separation unit (24) by explosive powder and separates the submunition container (22) and a drag chute connection plate (25). The present invention is able to realize a much bigger deceleration unfolding process in the initial ejection step compared to the conventional simple falling separation type or a first stage charge ignition separation structure, by additionally performing a second deceleration step when the rotary speed of the submunition container (22) is reduced to 200 rotations per minute or less by a reduced rotary step. The deceleration unfolding structure of the present invention has the effect of improving the flight capacity and reducing the unfolding failure of a parafoil as the parafoil (130) and a pararope (131) mounted in the observation submunition (100) are able to be designed to be lighter and thinner. [Reference numerals] (AA) Ignition of charge
Patent KR-102217594-B1 (KR)
IPC: F21S41/00
Filed: 2013-11-26
Granted: 2021-02-19
Abstract: 본 발명은 광원 및 리플렉터의 전방에 상하 방향으로 회전 가능하게 마련되어 하이빔과 로우빔 패턴을 구현하는 쉴드; 및 쉴드의 회전 시 쉴드와 접촉되어 쉴드의 회전을 제한하는 스토퍼를 포함하며, 쉴드 및 스토퍼가 접촉되는 부분에는 동일 극성의 자성체가 마련되는 것을 특징으로 하는 바이펑션 헤드램프를 제공하여, 회전에 의하여 하이빔 및 로우빔을 구현시키는 쉴드가 스토퍼에 접촉 시 발생하는 소음을 효과적으로 감소시킬 수 있는 효과가 있다.
Patent KR-101472528-B1 (KR)
Inventor: PARK KYU WON
IPC: C02F1/50
Filed: 2013-11-28
Granted: 2014-12-16
Abstract: The present invention relates to an apparatus for treating ballast water using sodium dichloroisocyanurate that separates and sterilizes part of ballast water flowing through a ballast pipe and injects the treated ballast water into the ballast pipe. The apparatus for treating ballast water using sodium dichloroisocyanurate comprises: a hopper for supplying sodium dichloroisocyanurate; a transfer feeder installed on the hopper to transfer a fixed quantity of sodium dichloroisocyanurate out of the hopper; a primary mixing tank for being provided with sodium dichloroisocyanurate through the transfer feeder by the hopper; a fresh water supplier for supplying a fixed quantity of fresh water to the primary mixing tank; a homogenizer for dissolving sodium dichloroisocyanurate by mixing the sodium dichloroisocyanurate and the fresh water in the primary mixing tank; and a secondary mixing tank receiving the mixture of the sodium dichloroisocyanurate and the fresh water in the primary mixing tank and including a stirrer inside to dissolve additional sodium dichloroisocyanurate and inject the treated water into the ballast pipe.
Patent KR-101539368-B1 (KR)
Title: 납땜용 전선피복 제거장치
IPC: H02G1/12
Filed: 2013-12-10
Granted: 2015-07-27
Abstract: 본 발명에 따른 납땜용 전선피복 제거장치는 납땜용 전선이 관통될 수 있도록 길이방향으로 관통공이 형성되는 몸체부; 몸체부의 일단에 분리가능하게 결합되며, 전선이 인입하는 인입관; 관통공의 일측에 구비되며, 전선의 피복을 절삭함으로써 전선의 심선을 축출하는 절삭부; 관통공과 연통되며, 절삭된 피복이 외부로 배출될 수 있도록 몸체부 일측에 형성되는 피복 배출부; 및 축출된 심선이 길이방향을 따라 외부로 인출될 수 있도록 몸체부의 타단에 분리가능하게 결합되는 심선 인출부;를 포함한다. 
따라서, 납땜작업을 하는 과정 자체만으로 절삭부에 의해 전선에서 심선을 연속해서 축출할 수 있고, 몸체부를 파지하여 인출구로 인출된 심선을 땜납에 밀착시켜 납땜작업을 함으로써 손에 화상 등을 입는 경우를 방지할 수 있다.
Patent KR-102200353-B1 (KR)
Title: 제습기
IPC: F25B41/30
Filed: 2013-12-10
Granted: 2021-01-08
Abstract: 본 발명은 제습기에 관한 것이다. 일 측면에 따른 제습기는, 공기가 흡입되는 흡입구와 공기가 토출되는 토출구를 가지는 본체; 상기 본체 내에 구비되며, 냉매를 압축시키는 압축기; 상기 압축기로부터 압축된 냉매를 응축하는 응축기; 상기 응축기에서 응축된 냉매를 팽창시키는 팽창기; 상기 팽창기에서 팽창된 냉매를 증발시키며, 공기의 유동 방향을 기준으로 상기 응축기의 상류에 위치되는 증발기; 상기 증발기에서 응축된 응축수가 저장되는 응축수 탱크; 및 상기 응축수 탱크에 연결되어, 상기 압축기에서 압축된 냉매와의 열교환을 위한 응축수가 유동하는 응축수 배관을 포함한다.
Patent KR-101584513-B1 (KR)
Title: 뇌신경세포 보호 기능이 있는 모시잎 발효물과 그를 이용한 모시잎 발효차
IPC: A23F3/00
Filed: 2013-12-13
Granted: 2016-01-21
Abstract: 본 발명은 뇌신경세포 보호 기능이 있는 모시잎 발효물과 그를 이용한 모시잎 발효차에 관한 것으로, 더욱 상세하게는 마우스 해마 세포인 HT22 세포주에서 글루타메이트 (glutamate)에 의해 유도된 산화적 스트레스를 억제하는 항산화 효능과, 마우스 미세아교세포인 BV2 세포주에서 LPS로 활성화되어 분비되는 염증매개물질을 억제하는 항염증 효능이 있는 모시잎 발효물과 그를 이용한 모시잎 발효차에 관한 것이다.
Patent KR-101571936-B1 (KR)
IPC: H02K5/20
Filed: 2013-12-19
Granted: 2015-11-25
Abstract: 내부를 충분하게 냉각하는 것이 가능한 회전 전자 기기를 제공한다.  이 발전기(1)(회전 전자 기기)는, 축 방향으로 관통하는 구멍부(23)를 갖는 로터(20)와, 로터(20)의 외주부에 대향하도록 배치되는 스테이터(30)와, 로터(20) 및 스테이터(30)를 내부에 수납하는 하우징(40)과, 하우징(40)의 외면에 설치되고, 하우징(40) 내를 순환하는 공기를 냉각하기 위한 복수의 열 교환기(50)와, 하우징(40)의 내부에 마련되어, 하우징(40) 내를 구획하여, 기체의 순환영역을 규정하기 위한 분할벽부(44)를 구비한다.
Patent KR-101489888-B1 (KR)
IPC: E05B1/00
Filed: 2013-12-31
Granted: 2015-02-05
Abstract: Provided is a door knob manufactured not to protrude, and capable of preventing children from being hurt. According to the present invention, the door knob comprises: i) a pair of knobs connected by a plurality of pressing parts extended in a first direction and separated from each other, and facing each other; ii) a first rotary part including a first rotation center, and a plurality of first rotor blades radially extended from the first rotation center and separated from each other; iii) a second rotary part coaxially connected with the first rotary part, and including a second rotation center, and a plurality of second rotor blades radially extended from the second rotation center and separated from each other; iv) a bracket fixed by one blade between a plurality of first rotor blades and one blade between a plurality of second rotor blades, and applied to move in a second direction crossing the first direction; and v) a latch connected with the bracket.
Patent KR-101427996-B1 (KR)
Title: Non-Power water pump wave forces
Inventor: PARK GYEONG HWA
IPC: F04C18/16
Filed: 2013-12-31
Granted: 2014-08-07
Abstract: The present invention relates to a non-powered water pump using wave force. A rotation part and hinged wings are connected upon a screw shaft formed to be vertically extended, so that the rotation part and the hinged wings uniformly rotate. Due to the structure of the hinged wings, the rotation part and the hinged wings rotate in one direction regardless of a flowing direction of wave force, and a direction in which the screw shaft pumps water is set as the rotating direction of the rotation part and the hinged wings. The upper part and the lower part of the screw shaft is fixed to a ground to reduce variations in rotation and to set a static rotation range. A pipe is connected to the rotation part to protect pumped water, and fixed plates are connected to the pipe to prevent the pipe from rotating together with the screw shaft. The fixed plates connected to the upper part and the lower part of the pipe includes an inlet, supplies pumped water through the inlet, and the upper fixed plate is connected to a discharge pipe. Regardless of the flowing direction of wave force, wave force flowing from multiple directions is utilized as kinetic energy to supply the pumped water supplied from the lower fixed plate to the upper part through a helical flow passage of the screw shaft, to pass through the pipe and the upper fixed plate passage, so as to store the pumped water in a water tank through the discharge pipe.
Patent KR-101369016-B1 (KR)
IPC: G03F7/20
Filed: 2004-03-29
Granted: 2014-02-28
Abstract: 광학 어셈블리 (16) 와 디바이스 (30) 사이의 갭 (246) 내의 환경을 제어하는 환경 시스템 (26) 은 유체 배리어 (254) 및 액침유체 시스템 (252) 을 포함한다.     유체 배리어 (254) 는 디바이스 (30) 부근에 위치결정된다.     액침유체 시스템 (252) 은 그 갭 (246) 을 채우는 액침유체 (248) 를 전달한다.     액침유체 시스템 (252) 은 직접적으로 유체 배리어 (254) 와 디바이스 (30) 사이에 있는 액침유체 (248) 를 수집한다.     유체 배리어 (254) 는 디바이스 (30) 부근에 위치결정되는 배출 입구 (scavenge inlet) (286) 를 포함할 수 있고, 액침유체 시스템 (252) 은 배출 입구 (286) 와 유체 소통하는 저압 소스 (392A) 를 포함할 수 있다.     유체 배리어 (254) 는 액침유체 (248) 의 임의의 증기 (249) 를 제한하며, 이 증기 (249) 가 측정 시스템 (22) 을 교란시키는 것을 방지한다.     부가적으로, 환경 시스템 (26) 은 디바이스 (30) 에 대하여 유체 배리어 (254) 를 지지하도록 유체 배리어 (254) 와 디바이스 (30) 사이에 베어링 유체 (290C) 를 제공하는 베어링 유체 소스 (290B) 를 포함할 수 있다.