baber/WOPTO huggingface dataset:
Patent KR-20000072661-A (KR)
Inventor: CHUN SANG WOOK
Filed: 2000-09-18
Abstract: PURPOSE: A method for utilizing cyber money(direct transaction method joint purchase, agent joint purchase, custom made joint purchase) is provided to directly link the consumers with the purchasers, to enable joint purchases by allowing professionals or interested individuals to facilitate joint purchases, to satisfy each purchaser's individuality by providing custom made services, and to capacitate the users to use cyber money for transactions. CONSTITUTION: A purchaser requests for a custom made service(K300) and the joint purchase site examine's the selected products' price and quality of the manufacturer(K301). If the examination results do not satisfy the requirements, the selected products are reexamined(C300). After the examination, the joint purchase site receives purchase requests from the purchasers(K302). If there aren't any purchase requests, the joint purchase is nullified(C301). The purchase requesters are informed of the quantity and price of the products in response to the number of requesters(K303) and receives payments(K304). Once the payment is completed, the production is initiated(K305) and the completed products are delivered to the purchaser(K306).
Patent KR-20010050712-A (KR)
Inventor: ZOISS EDWARD
IPC: H01R13/719
Filed: 2000-09-28
Abstract: PURPOSE: A line bridging POTS/DSL filter/splitter is provided to reduce the inevitable destruction of data traffic accompanying conventional line bridging conducted by the test set of a dealer. CONSTITUTION: A portable and independent POTS/data filter and a splitter device bridge/connect a line without interrupting data between a pair of a test set and a copper wire(chip and ring) of a dealer. A data/audio filter inhibits the destruction of a data signal and supplies POTS access to the dealer with respect to the copper wire. A POTS/data device has a Y-shaped housing and a port part corresponding to it. The terminal of the port part has a line jack, an audio/sound jack and a data jack. A printed circuit board having a sound/data separation filter is installed in the housing and is mutually connected to the group of the line/sound/data jacks and the line connection lead of the line jack. The POTS/data filter and the splitter device can make a telephone call from the test set by POTS without interrupting the transmission of the digital data signal on the copper wire.
Patent KR-20020031963-A (KR)
Inventor: KIM SU GWAN
IPC: A61C7/02
Filed: 2000-10-25
Abstract: PURPOSE: Provided is a dental screw which uses a screw to adjust the height of a circular projection part for making ease of eliminating extraneous matters around damaged parts so that it improves efficiency in cure. CONSTITUTION: In the dental screw which fixes alveolar bone by an attachment for supporting teeth that forms a suspension part for rubber strings between the circular projection part and a head part(10), the dental screw comprises the parts of: a spiral part(40) which is placed between the head part and the screw part(20) to form more compact screw mountain than the screw part; and the circular projection part(50) which includes a spiral part(51) in the spiral part(40).
Patent KR-20020032185-A (KR)
Inventor: YANG IN YONG
IPC: H01L21/203
Filed: 2000-10-26
Abstract: PURPOSE: A cathode for sputtering is provided to reduce errors of a sputtering deposition process by preventing corrosion of a permanent magnet and improving cooling efficiency of a target. CONSTITUTION: A case(1) is installed in an inside of a reaction chamber. An opening of the case(1) is covered by a cover(2). A target(10) is adhered to a bottom side of an outside of the case(1). The target(10) is formed with a material deposited on a wafer. A permanent magnet(5) is installed in an inside of the case(1). The permanent magnet(5) is connected with a rotary shaft(6) in order to form a magnetic field on a surface of the target(10) in a sputtering deposition process. A cooling portion is formed at a junction face between the target(10) and the case. The cooling portion is formed with a cooling water supply path(11), a cooling water supply line(3), and a cooling water discharge line(4). The cooling water supply path(11) is installed between the target(10) and the case(1). The cooling water supply line(3) and the cooling water discharge line(4) are connected with the cooling water supply path(11).
Patent KR-20020033296-A (KR)
Title: Igniter for use in a motor of a model rocket
Inventor: SEO KI YOUL
IPC: F42C1/09
Filed: 2000-10-30
Abstract: PURPOSE: An igniter for a motor of a model rocket is provided to prevent the accident and to reduce the dangerous explosion caused by an abnormal combustion by improving the ignition function of the motor. CONSTITUTION: An igniter includes a pair of lead wires(22,23) which are passing through a plug(21). A heating wire(24) is fixed to ends of the lead wires(22,23) by means of spot welding. A gunpowder(25) is coated on a surface of the heating wire(24). An outer surface of the plug(21) makes a surface-contact with an inner surface of a nozzle neck(12a) and a nozzle expanding section(12b). A flange(21a) making a surface-contact with an outer sectional area of the nozzle(12) is formed at an end of the plug(21). The plug(21) is press-fitted into the nozzle neck(12a) and the nozzle expanding section(12b) of the nozzle(12).
Patent KR-20010000942-A (KR)
Title: Flat fluorescent lamp
Inventor: CHO SUN CHEON
IPC: H01J61/78
Filed: 2000-10-30
Abstract: PURPOSE: A flat fluorescent lamp is provided to improve optical efficiency through forming a dielectric layer on surface of a fluorescent layer. CONSTITUTION: A flat fluorescent lamp(40) includes a front and a rear substrate(41,42) and a sealing material(43) sprayed along edges of the substrates. Plural discharge electrodes(45) are formed on the rear substrate. Herein, the electrodes are buried by fluorescent layer(44) having a first dielectric layer(46). Spacers(47) are distributed between the substrates to maintain distance between cells. Discharge gas(48) having mercury and inactive gas are injected to the sealed space. Herein, dielectric particles are mixed to the fluorescent layer to prevent deterioration of optical efficiency. A reflecting plate is attached to the lower surface of the rear substrate to minimize optical loss.
Patent KR-20020040133-A (KR)
Title: The method for growing carbonnanotube for field emitter of Field Emission Display
Inventor: PARK HYEON GI
IPC: C01B31/02
Filed: 2000-11-23
Abstract: PURPOSE: Provided is a method for growing carbon nanotubes for a filed emitter of a filed emission display, by which it is possible to control the density of carbon nanotubes by controlling the growth of the carbon nanotubes and thereby, to produce carbon nanotubes which has an excellent adhesion to express stable and high efficient emission and can be grown at a low temperature. CONSTITUTION: The method for growing carbon nanotubes includes (i) placing a Fe-Ni or Ni-Fe alloy layer(3) on a substrate(8), (ii) depositing a catalyst metal layer(4) on the alloy layer and (iii) crystallizing carbon nanotubes on the catalyst metal layer of the substrate. The substrate is selected from a group consisting of glass, Si, SiO2/Ni or Fe, and glass/Ni or Fe. The metal of the catalyst metal layer is Fe when the substrate is Fe-Ni and Ni when the substrate is Ni-Co. The rate of the thickness of the catalyst metal layer to the thickness of the alloy layer is 0.2 to 0.4.
Patent KR-20020041626-A (KR)
Title: Manufacturing method for mos transister
Inventor: KIM NAM SIK
IPC: H01L21/334
Filed: 2000-11-28
Abstract: PURPOSE: A fabrication method of MOS(Metal Oxide Semiconductor) transistor is provided to improve a reliance due to a decrease of a parasitic resistance by forming a silicide having double thickness on a diffusion layer without a patterning. CONSTITUTION: A gate(22) is formed by patterning a gate oxide and a poly-crystalline silicon on a silicon on insulator substrate(21). After depositing a nitride on the entire surface of the resultant structure, first sidewalls(23) are formed on both sides of the gate(22) by a wet etching. Similarly, an oxide is deposited on the entire surface of the resultant structure and second sidewalls(24) are then formed on both sides of the first sidewalls(23). After depositing a cobalt, silicide high density source and drain(25) are formed by a diffusion of the cobalt into the substrate(21) using a thermal treatment at the temperature of 400 - 750 deg.C. After removing the second sidewalls(24), silicide low density source and drain(26) are formed by sequentially depositing a titanium and performing another thermal treatment. At this point, double silicide are completed.
Patent KR-20020042128-A (KR)
Title: Chassis assembly method of prototype car
Inventor: LEE GI HAENG
IPC: B62D65/00
Filed: 2000-11-30
Abstract: PURPOSE: A vehicle body assembling method for a prototype car is provided to assemble or disassembled part panels with a rivet and additionally made examination jigs, thereby improving the quality of the part assembling equipment and reducing the new car developing period. CONSTITUTION: A vehicle body assembling method for a prototype car includes the steps of testing part panels in processed hole positions and molded states(S10), testing assembled state of part panels by interference on an assembly examination jig(S20), correcting the panels manually and overlapping and rivetting the panels on the assembly examination jig to assemble(S30), machining examination holes at a plurality of positions of the overlapped part of the assembled panels(S40), disassembling the assembled panels of which overlapped part is machined with the examination holes(S50), and setting the disassembled panels on a welding jig for checking an eccentricity of the examination holes, thereby checking the precision of the welding jig(S60,S61).
Patent KR-20020044737-A (KR)
Title: Chemical mechanical polisher with conditioning cleaner
Inventor: HWANG HONG GYU
IPC: B24B53/017
Filed: 2000-12-06
Abstract: PURPOSE: A CMP(Chemical Mechanical Polishing) equipment including a conditioning cleaner is provided to minimize micro-scratches of a polishing pad by removing various polishing residues remaining between diamond pellets on the surface of a conditioning disc by using a brush on a cleaner. CONSTITUTION: A CMP equipment comprises a polishing pad(44), a conditioner(50) including a conditioning disc(52) for conditioning the polishing pad(44), and a conditioning parking bath(54) having a conditioning cleaner(80) for cleansing the conditioning disc(52). The conditioning cleaner(80) further includes a brush part made of a multiple of brushes for removing various polishing residues from the conditioning disc(52) by contacting and pressurizing the brush part to the surface of the conditioning disc(52), thereby reducing micro-scratches of the polishing pad(44).
Patent KR-20020044830-A (KR)
Title: Easily separating multi-slip
Inventor: CHOI HYO SEUNG
IPC: B42D11/00
Filed: 2000-12-07
Abstract: PURPOSE: A slip composed of plural pieces easy to separate is provided to help a user to easily and rapidly separate each piece of the slip in more sanitary condition. CONSTITUTION: In the slip(8) composed of plural pieces(9,10,11,12) such as a credit card sales slip or a receipt and so on, one side edge of one piece to be separated is projected over one side edge of adjacent piece so as to increase an area contacting with fingers of a user. Therefore, by virtue of frictional force between the fingers and the piece of the slip, the user can easily separate the piece from the slip.
Patent KR-20020047944-A (KR)
Title: Apparatus for fixing spare tire for automobiles
Inventor: LIM BYEONG CHEOL
IPC: B62D43/00
Filed: 2000-12-14
Abstract: PURPOSE: A device for fixing a spare tire of a vehicle is provided to prevent a spare tire from moving by changing a fixed bracket and to improve durability by reducing loss generated in a carrier. CONSTITUTION: A device for fixing a spare tire in a vehicle comprises a carrier(300) combined to a lower frame(400) of a chassis; a spare tire(200) connected to the carrier; rotational end(310) formed on the carrier; a fixed bracket(100) mounted on the lower frame by contacting to an upper portion of the spare tire; and an elastic material(110) installed in the middle of the fixed bracket. The carrier is actuated by rotating the rotational end to drop the spare tire mounted on a lower end portion of the carrier. The elastic material fixes the spare tire by preventing generation of clearance between the fixed bracket and the spare tire. Thereby, the device for fixing the spare in the vehicle prevents the spare tire from moving in travelling by changing the fixed bracket.
Patent KR-20010062584-A (KR)
Inventor: INOKUCHI TAKAHIRO
IPC: H05B41/392
Filed: 2000-12-21
Abstract: PURPOSE: To prevent a high voltage necessary for lighting start from being extracted and prevent generation of an abnormal voltage. CONSTITUTION: A high voltage is generated repeatedly until lighting start by an output of a restart circuit. A circuit is installed which interrupts a PWM driving signal in order to prevent PWM luminance control pulse driving while the high voltage is generated repeatedly.
Patent KR-20020050588-A (KR)
Title: Shunt-intergrated bus bar
Inventor: BYUN YOUNG HO
IPC: H02J7/00
Filed: 2000-12-21
Abstract: PURPOSE: A bus bar integrated shunt is provided to simplify manufacturing procedures and reduce assembly cost, while preventing connection failure and improve reliability for product. CONSTITUTION: A charger for accumulator comprises a heat sink(2) formed of a plurality of layers; a rectifier circuit element(4) coupled onto the heat sink; and a bus bar integrated shunt(20) coupled onto the rectifier circuit element. The bus bar integrated shunt includes a bus bar section(21) having module connection holes(21a) corresponding to coupling holes(4a) of the rectifier circuit element; and a shunt section(25) formed by bending an end of the bus bar section, wherein the bus bar section and the shunt section are formed integrally with each other. The shunt section has shunt lines(25a) formed at the center of the shunt section through two holes(25b). The shunt line has current detection terminals(25c) formed at both ends of the shunt line. The shunt section has an output terminal coupling hole(25d) formed at an end of the shunt section.
Patent KR-20020051137-A (KR)
Title: Chatting lie display method over the mobile communication network
Inventor: AHN YONG HYEON
IPC: G06F17/00
Filed: 2000-12-22
Abstract: PURPOSE: A method for displaying a lie during chatting in a wireless communication network is provided to transmit and receive true contents by detecting the lie among the contents transmitted and received during chatting and displaying the detected contents. CONSTITUTION: Users connect to a chatting room of a chatting management server through a wireless communication network(S10). The users input desired words using special keys(S12). The chatting management server detects a lie component among the chatting data inputted by the users and determines a lie level(S14). If the users tell a lie, the chatting management server outputs text information corresponding to the lie(S16).
Patent KR-20010022464-A (KR)
Title: 반도체 웨이퍼 연마장치
IPC: B24B21/04
Filed: 1998-07-21
Abstract: 벨트형 연마기용 시임없는 연마표면을 갖는 집적된 무한 벨트는 지지 직물과 연마 표면으로 작용하는 폴리머층을 포함한다.  폴리머층은 대체로 다공성이며 기계 방향으로 존재하는 배출홈을 가지도록 형성된다.  지지 직물은 배향된 보강얀을 갖는 직물 또는 부직포 재료 또는 막을 포함한다.  또다른 구체예는 폴리머층을 갖는 직물 또는 부직포층을 지탱하는 나선형-링크 직물을 포함한다.  벨트는 다중 폴리머층 및 직물층을 가질 수 있으며 각각은 동일 또는 상이한 조성, 구조 및 배향을 가질 수 있다.
Patent KR-20010030833-A (KR)
Title: 폴리에스테르로부터 2,6-나프탈렌 디카르복실산의 회수
IPC: C07C63/38
Filed: 1998-09-30
Abstract: 본 발명은 카르복실산의 존재하에 2,6-나프탈렌 디카르복실산으로부터 유도된 반복 단위를 함유하는 폴리에스테르를 가수분해시키는 것을 포함하는, 단량체로 사용하기에 적합한 순수한 2,6-나프탈렌 디카르복실산을 제공하는 폴리에스테르의 재순환 방법에 관한 것이다.
Patent KR-20010031040-A (KR)
IPC: G11C7/22
Filed: 1998-10-09
Abstract: An electronic device with device timing constraints includes a set of connections coupled to an interconnect structure that carries row and column commands. A memory core stores data. A memory interface is connect to the set of connections and the memory core. The memory interface includes circuitry for generating memory core timing signals in accordance with the row commands and the column commands. The memory core timing signals have timing constraints to insure correct memory core operation. The memory interface circuitry includes individual delay components for adjusting the timing of selected timing signals of the memory core timing signals.
Patent KR-20010015800-A (KR)
Title: 비트-맵화된 온-스크린 디스플레이 메뉴를 사용하는상호운용기능 장치
IPC: H04N5/775
Filed: 1998-11-20
Abstract: 공통 가전(CE: Consumer Electronics) 장치 사이에서 온-스크린 디스플레이 메뉴 및 관련된 제어 기능을 교환하기 위한 상호운용기능이 제공된다. 상기 상호운용기능은 물리적 및 링크 레이어를 위해 IEEE 1394 시리얼 버스에 기초하며 제어 언어로 AV/C 또는 CAL을 사용한다. 본 발명은 타겟 장치(즉, 디지털 VCR)에 의해 구성된 비트맵화된 온-스크린 메뉴를 디스플레이 장치(즉, 디지털 TV)에 전송하기 위해 제공된다.
Patent KR-20010024773-A (KR)
Title: 컨버팅이 용이한 초경량 부직포
IPC: A61F5/44
Filed: 1998-12-18
Abstract: 본 발명은 기본 중량이 13.56 g/m 2 (0.40 osy) 미만이고 개별 섬유 또는 필라멘트의 섬유 구조를 갖는 부직웹을 포함하는, 다양한 개인 위생 제품을 형성하기 위한 외장 직물로서 유용한 초경량 부직물에 관한 것이다.  접합 영역의 패턴이 웹의 표면 상에 형성되어, 웹은 10% 종방향 신장률에서의 부직웹의 포이즌 비에 부직웹의 기본 중량을 곱함으로써 계산되는, 40.69 g/m 2 (1.20 osy)·PR 이하인 계수로 특징지어지는 치수 안정성을 가진다.  접합 영역은 연속적일 수 있거나 또는 불연속적일 수 있다.
Patent KR-20010041241-A (KR)
Title: 연속적인 상부 전극을 사용하는 정합 커패시터 어레이를 위한 개선된 레이아웃 기술
IPC: H01L27/08
Filed: 1999-12-20
Abstract: 정합 커패시터 어레이는 단일 반도체 집적회로로 구현된다. 상기 배열은 하부 전극 매트릭스 및 다수의 연속적인 상부 전극 스트립을 가지는 특징이 있다. 여기에서 각 연속적인 상부 전극 스트립은 다수의 하부 전극에 걸친다. 각 연속적인 상부 전극 스트립을 위한 전도성 콘택은 각 연속적인 상부 전극 스트립의 단자 끝에서 상기 커패시터 인터페이스로부터 제거된다. 본 발명은 기생 및 프린지 정전용량을 제거 또는 최소화하기보다는 오히려 기생 및 프린지 정전용량을 정합 또는 제어하는 것을 추구한다. 정합된 배열을 만듦으로, 각 정합 커패시터 단위 셀의 기생 및 프린지 정전용량은 상기 단위 셀의 전체 정전용량으로 통합된다.
Patent KR-20010042177-A (KR)
Title: 브레이크 레버용 제어 장치
IPC: F16D65/60
Filed: 1999-03-29
Abstract: 브레이크 레버는 자동차 드럼 브레이크의 스플라인 처리된 S-캠축에 부착되고 브레이크 실린더 푸쉬 로드에 연결된다. 이 레버는 기준점(12′)의 제어 디스크(12)로부터의 제어 운동을 브레이크 레버의 각운동에 따라 베러 기구의 클러치 휠(6)에 전달하기 위한 제어 장치(11-23)를 갖는다. 제어 디스크는 피니언(14)과 기어 결합관계이고, 피니언과 동축인 조정 나사(21)는 클러치 휠(6)과 결합관계이다. 원통형 드라이버(17)는 피니언과 동축인 관계에서 축방향으로는 이동할 수 있지만 회전할 수는 없고 조정 나사(21)를 포함하는 유닛과 함께 단방향 클러치(20)를 형성하며, 조정 나사는 브레이크 레버에 대해 요구되는 제어 거리 또는 A 량(23)에 상응하는 거리를 축방향으로 이동가능하며, 단방향 클러치는 스프링에 의해 바이어스되어 결합된다.
Patent KR-20010042370-A (KR)
Title: 다중 대역 부재
IPC: A61F13/534
Filed: 1998-04-02
Abstract: 본 발명은 제 1 대역(300) 및 제 2 대역(302)를 갖는 다중 대역 부재(29)이고; 부재는 배킹재(120), (122) 및 섬유 시이트(126)를 포함하고; 제 1 대역의 섬유 시이트는 이격된 결합 위치(128)로 배킹재의 앵커부(127)를 갖고 결합 위치 사이에서 배킹재로부터 돌출된 시이트의 아치부(130)를 갖고; 제 1 대역의 아치부는 배킹재로부터 높이(301)를 갖고; 제 2 대역의 섬유 시이트는 이격된 결합 위치로 배킹재의 앵커부를 갖고 결합 위치 사이에서 배킹재로부터 돌출된 시이트의 아치부를 갖고; 제 2 대역의 아치부는 제 1 대역의 배킹재로부터 아치부의 높이보다 낮은 배킹재로부터 높이(304)를 갖는다.
Patent KR-20010078742-A (KR)
Title: 차량 휠 제조 방법
IPC: B23P15/00
Filed: 1999-06-24
Abstract: 차량 휠을 제조하려면 금속 성형방법이 사용된다.  본 발명은 중앙부 및 초기성형된 림을 포함하는 휠 블럭을 제조하는 단계와, 최종 휠과 유사한 휠 형태를 얻기 위하여 고온 롤링처리로 림을 드로잉하는 단계와, 최종 휠 처리를 포함한다.  롤링 단계는 입자형 미세구조를 포함하는 휠 블럭의 양측에서 실행된다.  롤링처리의 온도-스트레인 비율 조건은 휠 블럭의 입자 미세구조에 대응한다.  거친 입자의 미세구조에 대해, 림은 최종 휠 보다 두꺼운 두께를 갖는 숄더를 포함하며, 두께 편차는 상기 미세구조를 재결정 및/또는 다각형 미세구조로 변환시킨다.  미세 입자의 미세구조에 대해, 림은 숄더를 포함하며, 최종 휠의 두께와 유사한 두께를 갖는다.
Patent KR-20010034922-A (KR)
IPC: C08L101/00
Filed: 1999-06-25
Abstract: There is provided a method which reduces fines while maintaining the bulk handling advantages of granular or particulate elastomers such as those produced in gas phase processes and which affords continuous bulk handling of synthetic rubbers or elastomers such as those produced in solution and/or suspension processes. The method comprises (1) feeding an crumb form elastomer or a granular elastomer which contains fines along with optionally one or more filler materials to a mixer/extruder where it is masticated and melted into a compound; (2) pumping the compound through an orifice of the mixer/extruder, and (3) cutting and forming the compound into shaped pellets ranging in size from about 0.5 to 30 mm.
Patent KR-20020057629-A (KR)
Inventor: AN JEONG MAN
IPC: G06Q50/10
Filed: 2001-01-03
Abstract: PURPOSE: A Tamagotchi for checking the attainment of personal goal through the process of the growth of the Tamagochi is provided to manage a Tamagotchi, to assess the performance of a user, and to make the user manage the schedule by embedding the function for displaying the attainment of a goal via the Tamagotchi. CONSTITUTION: The Tamagotchi for an adult comprises a display unit(204) for displaying the various shapes of a Tamagotchi of a Tamagotchi, an input unit(208) for inputting the general functions related with the growth of the Tamagotchi, a connecting unit(202) for setting up communication lines between the computers connected with the Tamagotchi and the Internet, and a memory unit(212) for storing a basic program and a connecting program. A control unit(210) displays the contents of a test on the browser and transmits a value distributed depending on the growth of the Tamagotchi. The basic program consists of general data related with the growth of the Tamagotchi. The connecting program consists of data related with the growth of the well-managed Tamagotchi.
Patent KR-20020057649-A (KR)
Inventor: HONG SA MUN
IPC: C07F17/00
Filed: 2001-01-03
Abstract: PURPOSE: Provided metallocene compounds for olefin polymerization and catalyst-compositions comprising the same. The metallocene compound has excellent catalyst activities and used for the polymerization of polyolefin having a high molecular weight. CONSTITUTION: The metallocene compound is represented by the formula: (Ind)(CpR)MX2, wherein Ind is cycloalkyl substituted indenyl radical, Cp is a radical having a cyclopentadienyl nucleus, R is a substituent substituted with Cp including hydrogen, phosphine, amino, C1-20 alkyl, alkoxy, alkyl amino, dialkyl amino, alkoxy-alkyl, aryl, aryloxy-alkyl, alkenyl, alkylaryl, or arylalkyl radical, M is a transition metal of 4B, 5B or 6B group on the periodic table, and X is at least one selected from the group consisting of halogen, C1-20 alkyl, aryl, alkenyl, alkylaryl, alkoxy and aryloxy radicals.
Patent KR-20020060910-A (KR)
Title: Method for forming a trench isolation of semiconductor devices
Inventor: BAEK JAE CHEOL
IPC: H01L21/76
Filed: 2001-01-13
Abstract: PURPOSE: A method for forming a trench isolation film of a semiconductor device is provided to prevent a void forming within the trench isolation film and to prevent the semiconductor device from being deteriorated by the stress due to the volume expansion of the trench thermal oxide film. CONSTITUTION: A pad oxide film(102) and a hard mask layer(104) are successively formed on the semiconductor substrate(100). A pad oxide pattern and a hard mask pattern(104) exposing a device isolation area of the semiconductor substrate are formed by a photolithography process and an etching process. A trench(106) is formed by dry-etching. A thin thermal oxide film is formed at the inner wall of the trench and the oxide film is removed by the wet etching. An oxide film is formed on the results by following to the step. A silicon nitride liner(112) is formed on the oxide film by following to the step. The trench is filled by filling the trench filling insulation film(114) having an excellent gap-fill characteristic on the results having the silicon nitride liner. The result is annealed at a fixed temperature in order to prevent the recess of the trench filling insulation film. The trench filling insulation film is flattened by the CMP process.