Patent SG-11201804756R-A (SG)
Title: Heat-spreadable blanking system for high throughput electron beam apparatus
Inventor: JIANG XINRONG
IPC: H01L21/66
Filed: 2017-01-05
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau ires.. 00) (43) International Publication Date .... ...../ 13 July 2017 (13.07.2017) WI P0 I P CT (10) WO International 111111111111311111111111111111111111111111111111111111111111111111111311111111111111111 2017/120373 Publication Number Al (51) International Patent Classification: (74) Agents: MCANDREWS, Kevin et al.; KLA-Tencor HO1L 21/66 (2006.01) G03F 7/20 (2006.01) Corp., Legal Department, One Technology Drive, Milpitas, GO3F 1/86 (2012.01) California 95035 (US). (21) International Application Number: (81) Designated States (unless otherwise indicated, for every PCT/US2017/012386 kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (22) International Filing Date: BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, 5 January 2017 (05.01.2017) DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (25) Filing Language: English HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (26) Publication Language: English MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, (30) Priority Data: NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, 62/276,824 9 January 2016 (09.01.2016) US RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, 15/255,314 2 September 2016 (02.09.2016) US TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali- (84) Designated States (unless otherwise indicated, for every fornia 95035 (US). kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (72) Inventors: JIANG, Xinrong; 2651 South Court, Palo TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Alto, California 94306 (US). SEARS, Christopher; 1958 TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, Wave Place, San Jose, California 95133 (US). LARSON, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Doug; 1055 Escalon Ave. #416, Sunnyvale, California LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, 94085 (US). [Continued on next page] (54) Title: HEAT-SPREADABLE BLANKING SYSTEM FOR HIGH THROUGHPUT ELECTRON BEAM APPARATUS : An beam apparatus addresses blanking issues (57) electron result- lt 1 100 ing from sinking high-power heat onto an aperture diaphragm by evenly 1 03 spreading heat on the aperture diaphragm. The apparatus can include an aper - -102 tune diaphragm and a deflector that deflects the electron beam on the aperture ti 1 diaphragm. The beam is directed at the aperture diaphragm in a electron pat- tern around the aperture. The pattern may be a circle, square, or polygon. The iiii iL ii2 _, pattern also may include a variable locus relative to the aperture. L 11-4 j 1 Z a 109 1 a 110 7 r'.6 104 Iff---------7 [107 1 \ I'l en !h ' . en 0 ei FIG. 1-1 t--- 1-1 o ei 106 2 O WO 2017/120373 Al MIDEDIMOM0101011101010MOHMIMIONIIIIDOM0VOIMIE SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, Published: GW, KM, ML, MR, NE, SN, TD, TG). — with international search report (Art. 21(3))