baber/WOPTO huggingface dataset:
Patent TW-202206501-A (TW)
Title: Resin composition, cured material, sheet, laminate, and flexible printed circuit board
Inventor: SATO KITARU
IPC: H05K1/03
Filed: 2021-07-28
Abstract: A resin composition comprises (A) a bismaleimide resin formed by reacting aromatic tetracarboxylic acid (a1), a dimer diamine (a2), and maleic anhydride (a3); and (B) an inorganic filler that has been surface-treated with a silane compound. The content of the inorganic filler (B) is 5-55 mass% with respect to the total amount of the solid fraction in the composition.
Patent TW-202220654-A (TW)
Title: Combinations for the treatment of cancer
Inventor: SCHWAB GISELA
IPC: A61K31/47
Filed: 2021-07-30
Abstract: The present invention relates to combinations comprising a checkpoint inhibitor and a c-Met inhibitor, Compound 1. The invention also relates to crystalline forms of the free base of Compound 1, as well as crystalline forms of salts of Compound 1, in combination with a checkpoint inhibitor. The invention also relates to pharmaceutical compositions comprising these combinations. The invention further relates to methods of treating cancer by administering Compound 1 as a single agent or a combination described herein.
Patent TW-202210410-A (TW)
Title: 用於pld之氮化鋁鈧靶之製造方法
Inventor: HOPMAN WILLEM CORNELIS LAMBERT
IPC: C01B21/06
Filed: 2021-08-25
Abstract: 本發明係關於一種用於脈衝雷射沈積(PLD)之氮化鋁鈧(ScAlN)靶體之製造方法，該方法包括以下步驟：
˗ 提供鈧鋁合金體；
˗ 將該鈧鋁合金體粉碎成鈧鋁粒子；
˗ 將該等鈧鋁粒子氮化成氮化鋁鈧粒子；
˗ 將該等氮化鋁鈧粒子熱壓成氮化鋁鈧靶體。
Patent TW-202310486-A (TW)
Inventor: CHUEH YU-CHIH
IPC: H01P5/12
Filed: 2021-08-26
Abstract: 一種分支線耦合器，包括第一傳輸線，第二傳輸線，第一彎折型傳輸線以及第二彎折型傳輸線。第一傳輸線包括第一長條形傳輸線，第一分支傳輸線以及第二分支傳輸線。第一長條形傳輸線沿著一既定方向延伸，第一分支傳輸線具有第一狹縫，第二分支傳輸線具有第二狹縫。第一分支傳輸線與第二分支傳輸線相對於一第一軸線呈軸對稱關係。第一傳輸線以及第二傳輸線相對於與第一軸線正交的第二軸線呈軸對稱關係。第一彎折型傳輸線電性連接於第一傳輸線與第二傳輸線位於同側的端點，而第二彎折型傳輸線電性連接於第一傳輸線與第二傳輸線位於另一側的端點。
Patent TW-202240337-A (TW)
Inventor: DONOHUE RYAN PATRICK
IPC: G06F11/30
Filed: 2021-09-07
Abstract: An anti-rollback protection device includes a real-time clock, a time stamp memory and a real-time clock logic circuit. The real-time clock is for generating the current time. The time stamp memory is coupled to the real time clock and for storing an original time stamp. The real-time clock logic circuit is coupled to the time stamp memory and the real-time clock, and only when a new time is later than an original time recorded by the original time stamp, the current time generated by the real-time clock is updated to the new time.
Patent TW-202227639-A (TW)
Title: Method for reducing measurement error
Inventor: MACHIDA SATOSHI
IPC: C12Q1/26
Filed: 2021-09-10
Abstract: The present invention addresses the problem of providing a method by which the positive influence of a peroxide originating from a sample can be suppressed in the case of measuring a measurement target in the sample by an enzymatic method. More specifically, the present invention addresses the problem of providing a measurement method, by which an increase in a measured value can be suppressed regardless of the presence or absence of catalase in a sample, and a measurement reagent. Provided is a measurement method that comprises contacting a sample with an enzyme in the presence of one or more compounds selected from the group consisting of a compound represented by general formula (I), a benzimidazole derivative having an electron-donating substituent at the 2-position and histidine. Thus, hydrogen peroxide originating from a measurement target can be correctly quantified without being affected by the sample. In formula (I), R1 and R2 may be either the same or different and represent hydrogen, an optionally substituted linear or branched alkyl group having 1-6 carbon atoms, an optionally substituted aryl group, or an alkyloxy group having 1-6 carbon atoms.
Patent TW-202311393-A (TW)
Inventor: LIAO TE-CHAO
IPC: D06P5/13
Filed: 2021-09-11
Abstract: 本發明提供一種聚酯棉花混紡織物的回收方法，包括以下步驟。將含有染料的聚酯棉花混紡織物放入含有氧化劑的酸性水溶液中進行升溫與浸洗，以裂解聚酯棉花混紡織物中的棉花成粉狀，並同時進行脫色以去除染料。之後，以二道過濾方式取得聚酯織物與棉粉。
Patent TW-202314883-A (TW)
Inventor: NOGUCHI YUICHIRO
IPC: H01L21/66
Filed: 2021-09-16
Abstract: 一種安裝裝置中的平行度檢測方法，包括：第一高度檢測工序，在載台（10）的載置面（12）上載置三角銷（41），使安裝工具（22）下降而檢測保持面（23）接觸至三角銷（41）的前端（42）時的安裝工具（22）的第一高度（HA1、HA2）；第二高度檢測工序，使三角銷（41）保持於安裝工具（22）的保持面（23），使安裝工具（22）下降而檢測三角銷（41）的前端（42）接觸至載置面（12）時的安裝工具（22）的第二高度（HA2、HB2）；以及平行度計算工序，基於第一高度（HA、HB1）與第二高度（HA2、HB2）來算出載台（10）的載置面（12）與安裝工具（22）的保持面（23）的平行度。。
Patent TW-202317038-A (TW)
Inventor: FANG JING-JING
IPC: A61B6/14
Filed: 2021-10-15
Abstract: A computer-aided generating method for orthognathic surgical planning comprises steps of: after establishing a skull image, computing a midface OSP (Optimal Symmetry Plane) and a mandible OSP of the skull image; defining a canonical coordinate according to the midface OSP and Frankford Horizontal plane; performing a simulation of a bone resection to generate a simulated-postoperative image; defining a leveling plane according to a lower gonion from the simulated-postoperative image in the canonical coordinate; defining a contour line of the projected simulated-postoperative image below the leveling plane as a mandible contour line; defining a left contour line and a right contour line from the mandible contour line according to the midface OSP; computing mandible-contour quantified parameters and at least one quantified symmetry assessment index based on the pixels of the left contour line and the right contour line; and generating an orthognathic surgical plan including the quantified symmetry assessment index.
Patent TW-202224088-A (TW)
Inventor: PARIMI VENKATA SHARAT CHANDRA
IPC: H01L21/683
Filed: 2021-10-19
Abstract: 根據本技術的實施例的半導體處理系統可包括具有側壁及基座的腔室主體。腔室主體可界定內部體積。系統可包括基板支撐組件，該基板支撐組件具有軸件及平台，該平台沿其第一表面與軸件耦接。半導體處理系統可包括沿著平台的與第一表面相對的第二表面在基板支撐組件的平台上定位的覆蓋板。覆蓋板可包括繞著覆蓋板的外部區域延伸的凸緣。凸緣可與平台直接接觸。覆蓋板可包括從凸緣垂直偏移的上壁。內部體積可在上壁與基板支撐組件的平台之間界定。
Patent TW-202230428-A (TW)
Title: Charged particle beam apparatus, and systems and methods for operating the apparatus
Inventor: MAASSEN MARTINUS GERARDUS MARIA JOHANNES
IPC: H01J37/244
Filed: 2018-09-18
Abstract: A charged particle beam apparatus includes a beamlet forming unit configured to form and scan an array of beamlets on a sample. A first portion of the array of beamlets is focused onto a focus plane, and a second portion of the array of beamlets has at least one beamlet with a defocusing level with respect to the focus plane. The charged particle beam apparatus also includes a detector configured to detect an image of the sample formed by the array of beamlets, and a processor configured to estimate a level of separation between the focus plane and the sample based on the detected image and then reduce the level of separation based on the estimated level.
Patent TW-202319208-A (TW)
Title: Mold with texture surface and method for manufacturing the mold wherein the method can manufacture a mold having at least one texture surface
Inventor: LIU DING-KUI
IPC: B29C33/38
Filed: 2021-11-08
Abstract: A method of the present invention is to provide a "mold embryo body" and obtain a mold through the steps of "making texture" and " forming holes". If necessary, the method can perform a "surface processing" procedure. The mold includes a forming zone disposed on the mold, wherein the forming zone has at least one bottom surface and at least one side surface is erected on the bottom surface; at least one hole arranged on the mold, wherein the hole is connected from the outer surface of the mold to the bottom surface or the side surface of the forming zone; and a texture surface provided on one of the bottom surface or the side surface of the forming zone. Accordingly, the mold has a texture surface and the inner and outer sides of the transparent finished product also have texture surfaces, which has the positioning function of light detection and can also avoid the use of pigments or dyeing to reduce production costs.
Patent TW-202229278-A (TW)
Inventor: LIU QING-XIN
IPC: A61K31/519
Filed: 2021-11-26
Abstract: 本發明涉及含氮雜環類衍生物的鹽、晶型及其製備方法和應用。特別地，本發明涉及通式( I )化合物鹽及晶型、製備方法和含有治療有效量的該晶型的藥物組合物，及其作為KRAS G12C突變抑制劑，在治療白血病、神經母細胞瘤、黑色素瘤、乳腺癌、肺癌及其結腸癌等疾病或病症的用途，其中通式( I )中的各取代基與說明書中的定義相同。
Patent TW-202231431-A (TW)
Title: Displacement detecting sensor, control device, and control system
Inventor: MURAKAMI KUNIHIKO
IPC: B25J13/08
Filed: 2021-12-28
Abstract: This displacement detecting sensor is provided with two encoders attached to a first link and a second link that are coupled in such a way as to be capable of moving relative to a certain axis, wherein: the two encoders are provided with two scale members at different distances from the axis, and two detectors for detecting scales on the respective two scale members; a positional relationship between the scale members and the detectors changes in accordance with an external force accepted at the distal end of the second link, generating a difference between the two scales detected by the two encoders; and the displacement of the distal end of the second link can be detected on the basis of the two scales.
Patent TW-202248008-A (TW)
Inventor: LEE WEI-CHIH
IPC: B32B27/20
Filed: 2021-12-30
Abstract: 本發明揭露一種啞光型電磁干擾屏蔽膜及其製備方法，包括絕緣層、鍍金屬層和導電膠層，該鍍金屬層係位於該絕緣層及該導電膠層之間。本發明之啞光型電磁干擾屏蔽膜的外觀呈啞光，且具有良好的表面絕緣性、表面硬度高、抗化性佳、屏蔽性能高、接著強度佳、傳輸損失少、傳輸質量高、信賴度佳且無有機矽轉移、操作性佳、耐熱性高等特性。
Patent TW-202245411-A (TW)
Inventor: LEE JUNHYUNG
IPC: H03G3/30
Filed: 2021-12-30
Abstract: 本文中揭示提供複數個增益模式之信號放大器架構。不同增益模式可使用通過放大器架構之不同路徑。用於選擇通過放大器架構之路徑的開關可經組態以亦提供一退化區塊或矩陣中之目標阻抗。選擇增益路徑之開關係提供於放大器架構中，且因此在退化區塊中不需要或不使用，藉此減小放大器架構之封裝的大小、改良雜訊係數(NF)、提高阻抗匹配，及無需與退化區塊或矩陣相關聯的控制邏輯。
Patent TW-202326463-A (TW)
Title: System for data packaging
Inventor: LIAO CHENG-I
IPC: G06F16/20
Filed: 2021-12-30
Abstract: A system for data packaging is adapted for solving the conventional problem of complicated and tedious processes on data screening and debugging whenever utilizing data from databases. The system for data packaging comprises a pre-established database and a computer. The pre-established database includes multiple pre-established messages. The computer includes an information selecting module, an information capturing module and an information packaging module. The information selecting module is used to obtain multiple target messages. The information capturing module has an associative relationship. The multiple pre-established messages are transformed into the multiple target messages so as to obtain an output data set. The information packaging module is used to transform the output data set into an information package.
Patent TW-202306485-A (TW)
Inventor: HO CHIA-HANG
IPC: H05K13/04
Filed: 2022-01-07
Abstract: 本發明提供了一種智慧供料系統及其方法，所述系統包括：料盤模組，用於放置並夾持料件；電控鎖模組，用於上鎖或解鎖所述料盤模組；處理模組，用於獲知所述料件使用情況並控制所述電控鎖模組進行上鎖或解鎖；鄰近感測模組，用於偵測所述料件移除或放置於所述料盤模組的狀態，並向所述處理模組發送信號。本發明在原有的用於電路板焊接的表面黏著技術基礎上，免除作業員的手眼疲勞，降低了出錯概率，實現找料上料的加速，提升換料正確率，解決接錯料浪費成本問題，並可適用於不同尺寸的料件，增加實務上的應用靈活性。
Patent TW-202243572-A (TW)
Title: Assembly sheet and method for producing assembly sheet
Inventor: TSUNEKAWA MAKOTO
IPC: H05K3/10
Filed: 2022-02-08
Abstract: This assembly sheet 1 is provided with a plurality of circuit boards 2, a frame 2, and a reinforcing part 4. The circuit board 2 has a support layer 11, a base insulating layer 12 arranged on one surface S1 of the support layer 11 in the thickness direction, and a conductor pattern 13 arranged on one surface S11 of the base insulating layer 12 in the thickness direction. The frame 3 supports the circuit board 2. The reinforcing part 4 reinforces the frame 3. The reinforcing part 4 is arranged on another surface S22 of the frame 3 in the thickness direction.
Patent TW-202329849-A (TW)
Title: 健身鏡
Inventor: LIN JING-AN
IPC: A47G1/02
Filed: 2022-02-21
Abstract: 一種健身鏡包含收納櫃以及鏡體。收納櫃包含背板以及複數個結構板。結構板彼此分離並分別連接背板，背板與結構板共同定義第一容置空間，第一容置空間配置以容置複數個健身器材。鏡體可滑動地連接結構板，鏡體包含鏡面，鏡面背對收納櫃。鏡體可相對收納櫃朝第一方向或第二方向滑動，以至少部分覆蓋第一容置空間，或至少部分暴露第一容置空間，第二方向相反於第一方向。
Patent TW-202301153-A (TW)
Title: Method and device for controlling a transport system
Inventor: HE DONG-HAN
IPC: G06F17/18
Filed: 2022-02-25
Abstract: Aspects concern a method for controlling a transport system comprising determining historical data of a multiplicity of transport trips performed by the transport system, training a neural network to perform an invertible mapping of transport trips to latent representations to fulfil, by the distribution of the latent representations of the multiplicity of transport trips, a predetermined fitting criterion with respect to a predetermined latent representation base distribution, sampling a multiplicity of latent representations from the base distribution, mapping each of the sampled latent representations to a respective transport trip by using the trained neural network to perform the inverse of the invertible mapping to generate a multiplicity of synthetic transport trips, determining a control scheme for the transport system using the multiplicity of synthetic transport trips and controlling the transport system using the determined control scheme.
Patent TW-202335814-A (TW)
Inventor: CHEN CHIEN-TUNG
IPC: B25J19/00
Filed: 2022-03-03
Abstract: A method of robot avoiding obstacle is implemented by a robot, The robot includes a case body, a camera unit, a drive unit, and a processing unit, The method includes: (A) controlling the drive unit to drive the case body to move along a moving path by the processing unit, (B) controlling the camera unit to shoot an image by the processing unit, and determining whether the another recognition image installed on another robot has been recognized from this image, (C) when the processing unit determines that the another recognition image has been recognized from this image, controlling the drive unit to stop driving the case body, (D) controlling the camera unit to shoot the another image by the processing unit, and determining whether a another recognition image has been recognized from the other image, (E) when the processing unit determines that the another recognition image has not been recognized from the other image, it returns to step (A).
Patent TW-202336778-A (TW)
Title: 超聲波裝置及其最佳影像參數之預測方法
Inventor: TUNG YU-TENG
IPC: G16H50/20
Filed: 2022-03-03
Abstract: 超聲波裝置包括資料庫、預測神經網路、超聲波探頭及顯示裝置。資料庫可儲存歷史影像參數。預測神經網路用以依據歷史影像參數，產生預測最佳影像參數。超聲波探頭用以提供一電子訊號。顯示裝置耦接超聲波探頭且用以依據電子訊號顯示一超音波影像，並於使用者調整超音波影像之參數時顯示預測最佳影像參數。
Patent TW-202245460-A (TW)
Title: Pixelated programmable neutral density filter array
Inventor: CUI NAN
IPC: H04N5/357
Filed: 2022-03-09
Abstract: In some aspects, a device may receive, from a pixel array of a camera, a first image. The device may configure, based at least in part on the first image, a setting of a filter. The filter may be included within a filter array that is arranged within the camera in association with the pixel array. The device may cause the pixel array to capture a second image. Numerous other aspects are described.
Patent TW-202307163-A (TW)
Title: Protective tape, semiconductor protective tape, and method for producing semiconductor device
Inventor: OKAMOTO MASAKO
IPC: C09J7/38
Filed: 2022-03-14
Abstract: The purpose of the present invention is to provide: a protective tape that has exceptional heat resistance, and that can reliably generate a gas and easily be detached from an adherend such as a semiconductor device even when light has been radiated through a base material; a semiconductor protective tape composed of the aforementioned protective tape; and a method for producing a semiconductor device using the aforementioned semiconductor protective tape. The present invention is a protective tape having a base material, an adhesive layer A that has an adhesive layer containing a gas-generating agent on one surface of the base material, and an adhesive layer B on the other surface of the base material, the protective tape being such that: the adhesive layer containing the gas-generating agent contains a photocurable adhesive; the gas-generating agent has a molar extinction coefficient, at any wavelength at which the light transmittance of the base material reaches 50% or greater, of 10 L/(mol.cm) or greater; and the gas-generating agent also has a 5% weight loss temperature (Td5), as measured at a heating rate of 5 DEG C/min using simultaneous thermal analysis (TGA/DSC), of 200 DEG C or greater.
Patent TW-202245907-A (TW)
Title: Application of mobile stirring bar drying device which can be conveniently assembled to satisfy the production capacity and space requirement of the production line
Inventor: Huang xi-quan
IPC: A01K1/01
Filed: 2021-05-20
Abstract: An application of a mobile stirring bar drying device comprises at least two drying devices for forming a stacked or cascaded space structure. Each drying device at least includes a base, a conveying part and a stirring unit. The base has a first side surface, a second side surface corresponding to the first side surface, and a peripheral side surface disposed between the first side surface and the second side surface. The conveying part is disposed on the first side surface of the base, and includes a first end and a second end for placing a work substance on one side of the conveying part so as to convey the work substance from the first end to the second end, wherein the direction from the first end to the second end is defined as a conveying direction. The stirring unit is disposed on one side of the conveying part, and at least includes a stirring bar, a first driving part and a second driving part. The stirring bar is set across the conveying direction, and a middle part thereof is provided with a plurality of stirring plates arranged at intervals. The first driving part is disposed on one side of the stirring bar to drive the stirring bar to rotate relative to a rotation axis. The second driving part is disposed on one side of the stirring bar to drive the stirring bar to make a linear displacement between the first end and the second end relative to the conveying part.
Patent TW-202324503-A (TW)
Title: 積體晶片結構及其製造方法
Inventor: CHEN KAO-CHAO
IPC: H01L21/20
Filed: 2022-04-14
Abstract: 本揭露涉及一種製造積體晶片結構的方法。該方法在基板之上形成中間第一材料層以及在中間第一材料層上形成中間第二材料層。中間第二材料層係圖案化以形成一絕緣層。中間第一材料層係圖案化以形成第一材料層，該第一材料層具有最外側壁，其從絕緣層的最外側壁向內縮進。執行離子轟擊製程在絕緣層上，以使一或多個原子從絕緣層移出。執行再沉積製程，再沉積一或多個原子在第一材料層的最外側壁上，以及在絕緣層下方形成一自填充間隔件。
Patent TW-202308374-A (TW)
Title: Image sensor module and method of operating the same
Inventor: KIM KYOUNG-YOUNG
IPC: G06T1/20
Filed: 2022-04-22
Abstract: An image sensor module includes an image sensor configured to generate image data; a memory including a processor in memory (PIM) circuit, of the PIM circuit including Banks configured to store the image data and a plurality of processing elements; and a signal processor, wherein the memory is configured to read the image data from the Banks, perform a first image processing operation on the image data by using the processing elements corresponding to the Banks, and store image-processed image data on which the first image processing operation is performed in the Banks or output the image-processed image data.
Patent TW-202307558-A (TW)
Inventor: LEE GEON-GON
IPC: G03F1/38
Filed: 2022-04-28
Abstract: 實例涉及光掩膜坯、光掩膜、半導體器件的製造方法等，提供光掩膜坯等，上述光掩膜坯包括：透光基板；以及多層的遮光膜，配置於上述透光基板上，上述遮光膜包括：第一遮光層，具有第一硬度；以及第二遮光層，具有第二硬度，上述第一遮光層配置成比上述第二遮光層更接近上述透光基板，上述第一硬度為大於上述第二硬度的值。實例的光掩膜坯、光掩膜等具有提高的耐缺陷性能，在半導體器件的製造方法中，以高的精密度更加減少缺陷的產生。
Patent TW-202300061-A (TW)
Title: bag
Inventor: MATSUMOTO HIROAKI
IPC: A45C3/00
Filed: 2022-05-13
Abstract: The present invention provides a bag that allows usage modes thereof to be changed. A bag 1 comprises: a second bag body 3 which has a storage capacity greater than a first bag body 2, has a lower part thereof connected to a surface constituting a storage space of the first bag body 2, and can be housed within the first bag body 2; and a strap 5 that passes through through-holes 21, 22 provided to the first bag body 2 from outside of the first bag body 2 and that is connected to a given portion in the upper half of the second bag body 3. In a deployed state in which the second bag body 3 is deployed outside the storage space of the first bag body 2, when the strap 5 coming out of the through-holes 21, 22 is pulled, the second bag body 3 is guided into the storage space of the first bag body 2. In a stored state in which the second bag body 3 is stored inside the first bag body 2, the first bag body 2 can be slung from the shoulder using the strap 5. When the second bag body 3 in the stored state is pulled out to the deployed state, the strap 5 coming out of the through-holes 21, 22 gets pulled into the interior of the first bag body 2.
Patent TW-202306970-A (TW)
Inventor: SCOTTI CELESTE
IPC: C07K14/435
Filed: 2022-05-20
Abstract: 本文提供了用於治療骨關節炎（例如，膝骨關節炎）之方法和劑量方案。該等方法和劑量方案包括化合物1之關節內注射。
Patent TW-202329562-A (TW)
Title: Rotary joint and optical measurement device using same
Inventor: MINEGISHI MASAYOSHI
IPC: H01R13/6461
Filed: 2022-08-11
Abstract: Provided is a rotary joint (40) that includes: a body-side fiber holding section (25) in which end faces of respective light-receiving fibers are disposed in a first circular region, and end faces of respective light-emitting fibers are disposed in a first annular region further to the outside; a probe-side fiber holding section (33) in which end faces of respective light-receiving fibers are disposed in a second circular region and light-emitting fibers are disposed in a second annular region further to the outside; a rotation support section (41) that supports the body-side fiber holding section (25) and the probe-side fiber holding section (33) so as to be rotatable relative to each other; and a light-separation tube (42) provided between the body-side fiber holding section (25) and the probe-side fiber holding section (33).
Patent TW-202246397-A (TW)
Title: Thermoplastic resin film and glass plate-containing laminate
Inventor: YOSHIDA SHOUGO
IPC: C08J5/18
Filed: 2018-03-31
Abstract: Provided is a thermoplastic resin film capable of controlling the occurrence of color irregularity after irradiation with light. The thermoplastic resin film according to the present invention contains a thermoplastic resin, a pigment, and a hindered amine light stabilizer.
Patent TW-202312000-A (TW)
Title: Integrated circuit and electronic apparatus
Inventor: TRICHTER URI
IPC: G06F21/87
Filed: 2022-09-08
Abstract: An integrated circuit (IC) is provided. The IC includes a molding compound, a plurality of pins, an exposed pad, a die surrounded by the molding compound, an adhesive material, and a plurality of bonding wires. The pins are disposed on at least one edge of the molding compound and separated from each other. The adhesive material is disposed between the die and the exposed pad and surrounded by the molding compound. The exposed pad is electrically connected to the die through one of the bonding wires, and the pins are electrically connected to the die through the remaining bonding wires. The die is configured to detect whether a chassis intrusion event is present in response to a signal from the exposed pad.
Patent TW-202316202-A (TW)
Title: Exposure apparatus, exposure method and article manufacturing method improving the exposure accuracy in scanning exposure by the FLEX method
Inventor: ITO SHU
IPC: G03F7/20
Filed: 2022-09-12
Abstract: This invention provides an advantageous technique for improving the exposure accuracy in scanning exposure by the FLEX method. An exposure apparatus that projects a pattern of an original onto a substrate and performs scanning exposure of the substrate includes: a plurality of changing units for changing a relative inclination amount between a surface of the substrate and an imaging surface of the pattern of the original; a control portion for controlling the scanning exposure under a state in which the relative inclination amount is set as a target inclination amount through the plurality of changing units, wherein the control portion, with respect to each of the plurality of changing units, allocates the target inclination amount in the way of enabling the relative inclination amount becoming the target inclination amount, and, based upon the inclination amount distributed to each of the plurality of changing units, the relative inclination amount is changed by the plurality of change units.