Patent SG-11201805471Q-A (SG)
Title: Field curvature correction for multi-beam inspection systems
Inventor: BRODIE ALAN D
IPC: H01L21/67
Filed: 2017-02-01
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 111111110111101110101011111 HO 11111 0111011100110011111011011111011110111111 International Bureau ... ..... ..Yi j (10) International Publication Number (43) International Publication Date ..... ...r .....1 WO 2017/136465 Al 10 August 2017(10.08.2017) WIPO I PCT (51) International Patent Classification: Mitcham CR4 2HS (GB). CHEN, Grace H.; 220 Cerro HO1L 21/66 (2006.01) H01L 21/02 (2006.01) Chico, Los Gatos, California 95030 (US). HO1L 21/67 (2006.01) (74) Agents: MCANDREWS, Kevin et al.; KLA-TENCOR (21) International Application Number: CORPORATION, Legal Department, One Technology PCT/US2017/016082 Drive, Milpitas, California 95035 (US). (22) International Filing Date: (81) Designated States (unless otherwise indicated, for every 1 February 2017 (01.02.2017) kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (25) Filing Language: English BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (26) Publication Language: English DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, (30) Priority Data: KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, 62/291,120 4 February 2016 (04.02.2016) US MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, 15/173,144 3 June 2016 (03.06.2016) US NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, (71) Applicant: KLA-TENCOR CORPORATION [US/US]; RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, Legal Department, One Technology Drive, Milpitas, Cali- TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, fornia 95035 (US). ZA, ZM, ZW. (72) Inventors: BRODIE, Alan D.; 998 Van Auken Circle, (84) Designated States (unless otherwise indicated, for every Palo Alto, California 94303 (US). KNIPPELMEYER, kind of regional protection available): ARIPO (BW, GH, Rainer; 131 Hayden Road, Groton, Massachusetts 01450 GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (US). SEARS, Christopher; 1958 Wave Place, San Jose, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, California 95133 (US). ROUSE, John; 27 Hill Road, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, [Continued on next page] (54) Title: FIELD CURVATURE CORRECTION FOR MULTI-BEAM INSPECTION SYSTEMS (57) : Multi-beam e-beam loo-- \ columns and inspection systems that use such multi-beam e-beam columns are ELECTRON SOURCE MULTI- LENS ARRAY TRANSFER LENS OBJECTIVE LENS (COMBINED MAGNETIC AND ELECTROSTATIC) ___... disclosed. A multi-beam e-beam column ' configured in accordance with the present disclosure may include an elec - j tron source and a multi-lens array con- SUBJECT OF figured to produce a plurality of beam- INSPECTION lets utilizing electrons provided by the electron source. The multi-lens array may be further configured to shift a fo- cus of at least one particular beamlet of the plurality of beamlets such that the 102 106 108 AA focus of the at least one particular beam- let is different from a focus of at least one other beamlet of the plurality of beamlets. FIG.1 ,-1 .4 ir) iv cr) 1-1 IN 1-1 0 N O WO 2017/136465 Al MIDEDIM01101 DIVIIMOID13011111011110111111111111111111111111111111111 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, Published: LU, LV, MC, MK, MT, SI, SK, SM, TR), OAPI GN, GQ, GW, KM, ML, NL, (BF, MR, NE, NO, BJ, PL, PT, RO, RS, CF, CG, CI, CM, SN, TD, TG). SE, GA, with international search 21(3)) report (Art.