baber/WOPTO huggingface dataset:
Patent JP-2022179469-A (JP)
Title: Provision device, provision method, and provision program
IPC: G06Q30/02
Filed: 2022-07-07
Abstract: PROBLEM TO BE SOLVED: To provide useful information relating to users to become targets. 
     SOLUTION: A provision device includes a receiving part, a generation part, a classification part, a grouping part, and a provision part. The receiving part receives, from a first proprietor, attribute information on users belonging to a prescribed category. The generation part uses user information prestored by a second proprietor to generate a model for classifying the users included in the user information, being the classification model for classifying the users having the attribute information received by the receiving part, into the same category. The classification part uses the classification model generated by the generation part to classify the users belonging to a prescribed category from among the users included in the user information. The grouping part groups the users classified by the classification part. The provision part provides the first proprietor with statistical information relating to the users grouped into the same group by the grouping part. 
     SELECTED DRAWING: Figure 5 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023174430-A (JP)
Title: 送風装置
IPC: F04F5/16
Filed: 2022-07-08
Abstract: 【課題】個人が滞在可能な居室空間において還流経路を確保し、吹出方向に沿った直進性の高い気流を送風可能な送風装置を提供する。【解決手段】フロアボード４と、サイドパネル５と、トップボード６とから形成される居室空間３に設置される送風装置１は、トップボード６側からフロアボード４側に向かって流れる空気を吹き出す４本のトップノズル１４と、トップノズル１４に送風する送風機２０とを備える。４本のトップノズル１４は、それぞれ吹出口１５が同一面上に位置するように間隙を有して並設され、サイドパネル５に隣接するトップノズル１４を第１トップノズル１４ａとし、第１トップノズル１４ａに隣接するトップノズル１４を第２トップノズル１４ｂとする場合、少なくとも第２トップノズル１４ｂから吹き出す空気の風量が、第１トップノズル１４ａから吹き出す空気の風量よりも大きくなるように制御する。【選択図】図３
Patent JP-2024008580-A (JP)
Title: 液体吐出ヘッド
IPC: B41J2/14
Filed: 2022-07-08
Abstract: 【課題】印字品質の低下を抑制できる液体吐出ヘッドを提供すること。 
【解決手段】実施形態の液体吐出ヘッドは、基板と、アクチュエータと、マニフォールドと、共通電極と、個別電極と、コーティング層と、を備える。基板は、液体が通る開口が形成される。アクチュエータは、前記基板の一方側の主面に設けられるとともに、複数の圧力室と、複数の圧力室の間に形成される複数の空気室と、を有する。マニフォールドは前記基板の他方側に配される。共通電極は、前記アクチュエータの表面と、前記基板の一方側の主面と、前記基板の他方側の主面と、前記開口の内面と、前記基板の側面と、に形成される電極部を有する。個別電極は、前記アクチュエータの表面と、前記基板の一方側の主面と、に形成される電極部を有する。コーティング層は、前記基板の一方側の主面上の少なくとも一部を覆う。 
【選択図】      図８
Patent JP-2024009587-A (JP)
Title: レンズ鏡筒
IPC: G02B7/04
Filed: 2022-07-11
Abstract: 【課題】部品点数が少なく、かつ、小型な固定レンズの保持構造を備えたレンズ鏡筒を提供する。【解決手段】レンズ鏡筒において、移動レンズと、前記移動レンズを保持するレンズ移動枠と、固定レンズと、前記固定レンズを保持する固定レンズ枠と、前記レンズ移動枠を光軸に平行な方向に移動させるためのガイドバーと、前記ガイドバーを保持する筐体を備え、前記固定レンズ枠は第１の穴を設けたスリーブ部を備え、前記第１の穴に前記ガイドバーを挿通させることで、前記固定レンズ枠を前記光軸に垂直な方向に関して位置決めさせ、かつ、前記固定レンズ枠に設けた第１の係合部を、前記筐体に設けた第２の係合部と係合させることで、前記固定レンズ枠を、前記光軸に平行な方向に関して位置決めさせる。【選択図】 図４
Patent JP-2023035943-A (JP)
Title: Electromagnetic interference shielding film and preparing method thereof
Inventor: LEE WEI-CHIH
IPC: B32B15/08
Filed: 2022-08-25
Abstract: To provide a low-cost electromagnetic interference shielding film excellent in surface insulation, chemical resistance, surface hardness, heat resistance, shielding performance, adhesive strength, operability, transmission loss, transmission quality, and product reliability, having a low gloss (matte) appearance and a preparing method thereof.SOLUTION: An electromagnetic interference shielding film 1 is provided, including a carrier layer 10, an insulation layer 11, a first adhesive layer 12, a porous metal layer 13, a conductive adhesive layer 14 having a plurality of conductive particles 141, and a release layer 15. The first adhesive layer is located between the insulation layer and the porous metal layer. The porous metal layer is formed on the first adhesive layer so that the first adhesive layer is located between the porous metal layer and the insulation layer. The conducting adhesive layer is located on the porous metal layer so that the porous metal layer is located between the first adhesive layer and the conductive adhesive layer.SELECTED DRAWING: Figure 1
Patent JP-2023049013-A (JP)
Title: Optical path control device, display device and optical path control method
Inventor: TAKADA HIROYUKI
IPC: G03B21/14
Filed: 2022-09-20
Abstract: To provide an optical path control device, a display device and an optical path control method, in which the power consumption of an actuator is reduced and the control of the actuator is simplified.SOLUTION: The optical path control device comprises: a swing unit that includes an optical unit which light enters, a first swing unit for supporting the optical unit, and a second swing unit for swingably supporting the first swing unit; a first actuator for causing the swing unit to swing around a first swing shaft; a second actuator for swinging the swing unit around a second swing shaft that intersects the first swing shaft; and a drive unit for applying a drive signal of current value to the first and second actuators. When applying a drive signal consisting of a prescribed current value the current value of which is preliminarily set to one of the first and second actuators and maintaining the first or second swing unit at a tilt position inclined with respect to a reference position, the drive unit applies a drive signal consisting a zero current value to the other of the first and second actuators so as to maintain the first or second swing unit at the reference position.SELECTED DRAWING: Figure 3
Patent JP-2023056490-A (JP)
Title: Route recognition system of automatic operation vehicle
Inventor: BANBA KENICHI
IPC: G08G1/16
Filed: 2022-09-29
Abstract: To provide a route recognition system which performs automatic operation following a stable travel route by grasping route lines provided on a road surface with a camera provided on a vehicle body.SOLUTION: In a route recognition system of automatic operation traveling on route lines provided on a road surface, a camera is mounted at such a position that the route lines are visible without exposed to disturbance of natural environment such as influences of sunlight in the vehicle body and shades and a relative position with the center of gravity of a vehicle body can be recognized, a lateral deviation (e2) between the route lines and the center of gravity of the vehicle body, and angle deviation (e3) of a body shaft to the route lines are detected while referring to the position of the camera, and steering is controlled so that the detected lateral deviation (e2) and the angle deviation (e3) are eliminated, and the center of gravity of the vehicle body coincides with the route lines.SELECTED DRAWING: Figure 2
Patent JP-2023011600-A (JP)
Title: Medicine delivery device equipped with electronic equipment
IPC: A61M15/00
Filed: 2022-10-06
Abstract: PROBLEM TO BE SOLVED: To provide a device, a system, and a method for sensing, tracking, and/or processing a use state and a parameter related to a medicine delivery device. 
     SOLUTION: A device for delivering a medicine to a user includes a body 104, an electronic module 102, and a slider. The body 104 includes a mouthpiece 106, a medicine reservoir, and a mouthpiece cover 108 which can be coupled to the body 104 with a hinge. The electronic module 102 can include a communication circuit, a pressure sensor, and a switch. When the mouthpiece 106 moves from a closed position to an open position, the slider engages with the switch. The switch is configured so as to switch the electronic module from an OFF state or a sleep state to an active state. 
     SELECTED DRAWING: Figure 2 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023011715-A (JP)
Title: Transparent display device and laminated glass with transparent display device
IPC: G09F9/30
Filed: 2022-10-25
Abstract: PROBLEM TO BE SOLVED: To provide a transparent display device comprising light-emitting diodes, which ensures appropriate display capability and offers improved transparency. 
     SOLUTION: A transparent display device is provided, comprising a first transparent substrate, a light-emitting unit arranged to correspond to each pixel on the first transparent substrate, and a wiring unit connected to each light-emitting unit, where each light-emitting unit comprises at least one light-emitting diode having area of 10,000 μm 2  or less. In a display region, area of a region with transmittance of 20% or less is 30% or less. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023133095-A (JP)
Title: Model toy and movable structure
Inventor: YAMAGAMI ATSUSHI
IPC: A63H3/36
Filed: 2022-10-25
Abstract: To provide a setup for realizing multiple movable mechanisms with less parts, for example, in a model toy, and also to provide a setup for realizing a movable mechanism that performs operation with a natural impression.SOLUTION: A doll type toy (100) includes: a first part (201) that becomes a base part of multiple movable shafts having a first connection part (312) having a reception part and a second connection part (313) formed in one end; a second part (202) having first connection parts (321a, 321b) that are rotatably connected to the reception part of the first connection part; and third parts (203a, 203b) having second connection parts (331a, 331b) rotatably connected to the second connection part in one end.SELECTED DRAWING: Figure 2
Patent JP-2023095773-A (JP)
Title: Method of manufacturing resonant circuit, inductor, and capacitor
Inventor: IZUMI KONAMI
IPC: G01N24/00
Filed: 2022-11-02
Abstract: To provide a technique for easily balancing weight of a resonance circuit.SOLUTION: A resonance circuit includes an inductor formed along a surface of a first cylindrical shape having a central axis, and a capacitor formed along a surface of a second cylindrical shape having a central axis, where the inductor and the capacitor are electrically connected to each other to form a closed loop.SELECTED DRAWING: Figure 2
Patent JP-2023016853-A (JP)
Title: flame detector
IPC: G01J1/42
Filed: 2022-11-21
Abstract: PROBLEM TO BE SOLVED: To allow exact fire determination by performing contamination correction for each light reception element even when there is unevenness in contamination of a translucent window. 
     SOLUTION: In a flame detector 10, flame detection units 12a, 12b output a flame light reception signal obtained by receiving infrared energy radiated from combustion flame by flame detection sensors 16a, 16b via a translucent window 18 to observe a flame wavelength range, and a non-flame detection unit 12c outputs a non-flame light reception signal obtained by receiving infrared energy radiated from other than the combustion flame by a non-flame detection sensor 16c via the translucent window to observe a non-flame wavelength range. A test control unit 38 radiates test light via the translucent window 18 from a test light source 60-1 to calculate attenuation rate due to contamination of the translucent window 18 for each detection unit. A fire determination unit 36 performs contamination correction of the flame light reception signal and the non-flame light reception signal on the basis of the attenuation rate, performs failure processing when either of the light reception signals reaches a correction limit, and detects presence/absence of the combustion flame by the flame light reception signal and the non-flame light reception signal to which the contamination correction is performed to determine a fire. 
     SELECTED DRAWING: Figure 1 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023143674-A (JP)
Title: Resin composition and molded body
Inventor: TSUBOUCHI KYOKO
IPC: C08L51/08
Filed: 2022-11-30
Abstract: To provide a molded body having excellent impact resistance while maintaining good color development and to provide a resin composition for producing the molded body.SOLUTION: There is provided a resin composition comprising a graft copolymer (G) obtained by graft polymerization of a composite polymer (A) having a polyorganosiloxane (A1) and a first vinyl polymer (A2) with a vinyl monomer (b) and a thermoplastic resin component (H), wherein the ratio of composite polymer in the 100 pts.mass of the graft copolymer (G) is larger than 70 pts.mass, the polymer of the vinyl polymer (A2) has a glass transition temperature of 0°C or more and Charpy impact strength with notch at 23°C of the thermoplastic resin component (H) is 20 kJ/m2 or less.SELECTED DRAWING: None
Patent JP-2023014274-A (JP)
Title: game machine
IPC: A63F7/02
Filed: 2022-12-01
Abstract: PROBLEM TO BE SOLVED: To enhance interest of a game. 
     SOLUTION: A game machine includes storage means for storing prescribed information. The storage means is provided with means which stores every game round information that associates whether or not specific performance is executed in a game round with a circulation number of game balls which circulate at a specific position of a game area during a period that the game round is executed. 
     SELECTED DRAWING: Figure745 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023039970-A (JP)
Title: Display device
IPC: G02F1/1675
Filed: 2022-12-07
Abstract: PROBLEM TO BE SOLVED: To provide a display device that reduces breakage of connection of a drive circuit or a connecting part between circuits when a flexible panel is handled. 
     SOLUTION: An element substrate constituting a display device includes: a first area having a display unit; a second area having an external connection electrode; a fourth area having a scan line side drive circuit; a first side along a first direction; and a second side along a second direction. The display unit includes a transistor and a light emitting element. The element substrate has a structure that a third area between the first area and the second area is bent, so that the second area overlaps the other part of the substrate except the second area. 
     SELECTED DRAWING: Figure 3 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023088306-A (JP)
Title: Medical apparatus with galvanic isolator
Inventor: BERND NEUROHR
IPC: A61B1/00
Filed: 2022-12-12
Abstract: To provide a medical apparatus which enables galvanic isolation, is low in cost and can easily perform an inspection.SOLUTION: There is provided a medical apparatus having an application device which can be brought into contact with a patient to be treated, and a galvanic isolator which can be connected to the application device, the isolator having an application connector for connection to the application device and a supply connector for connection to a device. The isolator is configured to galvanically isolate the application connector from the supply connector. The isolator has a first radio unit connected to the application connector and including a first antenna, and a second radio unit connected to the supply connector and including a second antenna. The first antenna and second antenna are fixed on a carrier so as to be apart from each other in a manner of being recognizable by the naked eyes and to face each other. The first radio unit and the second radio unit are configured to transmit signals or data between the application connector and the supply connector.SELECTED DRAWING: Figure 1
Patent JP-2023021299-A (JP)
Title: Semiconductor device
IPC: H01L21/3205
Filed: 2022-12-14
Abstract: PROBLEM TO BE SOLVED: To enhance reliability of a semiconductor device. 
     SOLUTION: A pad PD is formed on an interlayer insulation film IL 8. An insulation film PV is formed on the interlayer insulation film IL 8 while covering the pad PD. An opening OP is formed in the insulation film PV for exposing a part of the pad PD. A metal film ME which is electrically connected to the pad PD is formed on the pad PD exposed from the opening OP and the insulation film PV. The metal film ME integrally includes a first part MEa located on the pad PD exposed from the opening OP and a second part MEb located on the insulation film PV. An upper surface of the metal film ME has a wire junction area WA for connecting a wire, and a probe contact area PA for allowing a probe to contact therewith. The wire junction area WA is located on the first part MEa of the metal film ME, and the probe contact area PA is located on the second part MEb of the metal film ME. 
     SELECTED DRAWING: Figure 7 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023036729-A (JP)
Title: Light-emitting device
IPC: H01L33/54
Filed: 2022-12-15
Abstract: PROBLEM TO BE SOLVED: To provide a light-emitting device that is low in an insect trap effect and has sufficient color rendering properties in a visual environment of a human being. 
     SOLUTION: A light-emitting device includes: a light-emitting element having an emission peak wavelength in a range of 430 nm or longer and 470 nm or shorter; and a fluorescent member including a fluorescent material that emits light by the excitation with light from the light-emitting element. A correlation color temperature of mixed color light, which conforms to JIS Z 8725, is in the range of 1,500 K or higher and 11,000 K or lower. A color deviation d uv  that is a deviation of mixed color light from a black body radiation trajectory on a CIE1931 chromaticity diagram and conforms to JIS Z 8725 is greater than 0 and less than or equal to 0.02. When an integrated value a represents a value obtained by integrating, in the wavelength range of a visible range of the human being, the products of the spectral distributions of mixed color light and the relative intensities of the standard spectral luminous efficiency of the human being, and an integrated value b represents a value obtained by integrating, in a wavelength range where an insect indicates positive light travel, the products of the spectral distributions of mixed color light and relative intensities of the spectral luminous efficiency of an insect, an insect trap index I defined by b/a is 50% or more and 99% or less of an insect trap index I 0  when the color deviation d uv  is 0. 
     SELECTED DRAWING: Figure 3 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023106309-A (JP)
Title: Method for recovering valuable material
Inventor: NISHIKAWA CHIHIRO
IPC: C22B7/00
Filed: 2022-12-21
Abstract: To provide a method for recovering a valuable material which can recover lithium carbonate of high quality from a lithium ion secondary battery with a high recovery rate.SOLUTION: A method for recovering a valuable material for recovering lithium carbonate having a boron content of less than 1 ppm and a calcium content of 100 ppm or less from a lithium ion secondary battery includes: a heat treatment step of heat treating the lithium ion secondary battery; a crushing/classification step of classifying a crushed product obtained by crushing a heat-treated object; a slurrying step of making a fine particle product into a slurry; a wet magnetic separation step; an acid leaching step of adding a sulfuric acid to a non-magnetic slurry and/or a non-magnetic material obtained by solid-liquid separation of the non-magnetic slurry, and leaching a non-magnetic material; a neutralization step of neutralizing an acid leachate; a solid-liquid separation step of solid-liquid separating the liquid obtained in the neutralization step; a calcium carbonate crystallization step of adding CO2 to a liquid obtained in a neutralization cake solid-liquid separation step; a step of solid-liquid separating the obtained liquid; and a calcium adsorption removal step of adsorbing and removing calcium by a chelate resin.SELECTED DRAWING: None
Patent JP-2023033323-A (JP)
Title: Drug delivery devices with drug-permeable component and methods
IPC: A61M37/00
Filed: 2022-12-22
Abstract: PROBLEM TO BE SOLVED: To provide implantable devices that can deliver drugs to different various drugs by an effective release rate. 
     SOLUTION: Implantable drug delivery devices include a housing having a closed drug reservoir lumen bounded by a first wall structure and a hydrophilic second wall structure, and a drug contained in the drug reservoir lumen, wherein the first wall structure is impermeable to the drug and the second wall structure is permeable to the drug. Methods of providing controlled release of drug to a patient include deploying a drug delivery device in the patient releasing a drug from the drug reservoir lumen via diffusion through the second wall structure. 
     SELECTED DRAWING: Figure 8A 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2023024708-A (JP)
Title: Method for producing activated carbon
IPC: C01B32/348
Filed: 2022-12-23
Abstract: PROBLEM TO BE SOLVED: To provide a method for efficiently producing activated carbon having an increased proportion of extremely small-sized micropores of 1 nm or less in diameter, even among micropores of 2 nm or less in diameter. 
     SOLUTION: This method for producing activated carbon includes an activation step that activates an activated carbon precursor containing a metal component with a carbon dioxide gas as an introduction gas and obtains activated carbon having a ratio (pore volume B/total pore volume A) of the pore volume B of 1.0 nm or less in diameter to the total pore volume A of 0.5 or higher, and a metal element that constitutes the metal component is selected from the group consisting of group 2 elements, group 3 elements, group 4 elements, group 5 elements, group 6 elements, group 7 elements, group 9 elements, and rare earth elements. 
     SELECTED DRAWING: None 
     COPYRIGHT: (C)2023,JPO&INPIT
Patent JP-2022540200-A (JP)
Title: Ｌｒｒｋ２阻害剤としてのインダゾールおよびアザインダゾール
IPC: C07D417/14
Filed: 2020-07-10
Abstract: 本発明は、ＬＲＲＫ２の阻害剤であり、かつＣＮＳ障害の治療に有用である、インダゾール化合物およびアザインダゾール化合物を対象とする。【化１】JPEG2022540200000996.jpg2862
Patent JP-2022542152-A (JP)
Title: 薄いハイカットシームレス手袋
IPC: D02G3/44
Filed: 2020-07-28
Abstract: 【解決手段】薄いコーティングされた支持手袋及びその手袋を作製する方法は、複数の指コンポーネントと親指コンポーネントと手の甲コンポーネントと手のひらコンポーネントとを含む薄い編まれたライナーと、薄い編まれたライナーに接着された薄いポリマーコーティングと、を含み、薄い編まれたライナーは、約２５～３５ミクロンの直径を有するタングステンコアと、タングステンコア上に配置されたポリアミドラッピング糸と、ポリアミドラッピング糸上に配置された高性能ポリエチレンラッピング糸と、を含む約（３５０）デニール以下の被覆糸と、（１１５）デニール以下の混繊糸である第２の糸と、を備える。【選択図】図５
Patent JP-2022544816-A (JP)
Title: プラズマエッチングにおける終点検出のための合成波長
IPC: H01L21/3065
Filed: 2020-08-18
Abstract: 発光分光分析（ＯＥＳ）データを入力として使用してエッチング処理の終点を判定する方法が記載される。ＯＥＳデータは、プラズマエッチング処理チャンバ内の分光計によって取得される。取得された時間発展スペクトルデータは、最初にフィルタリング及び平均除去され、且つその後、以前に計算された主成分重みが使用されて変換を実現する主成分分析等の多変量解析を使用して、変換されたスペクトルデータ又はトレンドに変換される。主成分重みを、正及び負の自然波長に対応する２つの別々のグループに分類することは、別々の符号付きトレンド（合成波長）を生成する。
Patent JP-2022545209-A (JP)
Title: 電子体重計を備えた室内腰回し器具
IPC: G01G19/52
Filed: 2020-08-19
Abstract: 電子体重計を備えた室内腰運動器具が開示される。一実施例によれば、前記電子体重計を備えた室内腰運動器具は、電子体重計と、前記電子体重計の下側に設けられ、一端に設けられた回転軸、及び前記回転軸の下端に設けられた回転球を備えた回転部と、前記回転部の下側に離隔して設けられ、噛合凹部を備えた支持台と、前記電子体重計によって感知される重さが予め設定された臨界値を超える場合、前記回転球と前記噛合凹部が噛み合うように前記回転部が下降するように制御する制御部とを含むことができる。【選択図】 図１
Patent JP-2022547408-A (JP)
Title: 歯車加工装置における自動プロセス制御
IPC: G05B19/4155
Filed: 2020-09-04
Abstract: 本発明は、前もって加工された歯付きワークピース２３の歯面が精密機械加工装置１を用いて機械加工される機械加工プロセスを監視する方法に関する。本方法では、精密機械加工工具１６がワークピースと機械加工係合している間に、複数の測定された値が収集される。これらの測定された値は、ワークピースの歯面の機械加工中の工具スピンドルの電流パワー消費を示すパワーインジケーターの値を含む。正規化処理が、測定された値のうちの少なくともいくつか又は測定された値から導出される変数の値に適用され、正規化値が得られる。正規化処理は、次のパラメーター、すなわち、精密機械加工工具の幾何学的パラメーター、特にその外径と、ワークピースの幾何学的パラメーターと、精密機械加工装置の設定パラメーター、特にラジアルインフィード及びアキシャルフィードとのうちの少なくとも１つに依存する。【選択図】図１
Patent JP-2022545277-A (JP)
Title: 発光標識及び二次発光信号の光信号速度論に基づくポリヌクレオチドの配列決定方法
IPC: C12Q1/6869
Filed: 2019-08-20
Abstract: 発光標識および二次発光シグナルの光シグナル動態に基づいてポリヌクレオチドを配列決定する方法であって、異なる発光形態および発光タイミングを適用して、異なるヌクレオチドの逐次的な取り込みを区別し、ポリヌクレオチドの配列決定を実現する方法を提供する。【選択図】なし
Patent JP-2022547489-A (JP)
Title: 半導体装置用の収着チャンバ壁
IPC: H01L21/3065
Filed: 2020-08-06
Abstract: 【課題】 
【解決手段】プラズマプロセスチャンバ内に画定された収着構造が、収着構造を加熱するための１つ以上の加熱要素を有する内層と、冷却剤フロー供給ネットワークを有する中間セクションであって、冷却剤フロー供給ネットワークを通って冷却剤が循環して、収着構造を、プロセスチャンバで放出された副生成物の選択的吸着を可能にする温度に冷却する、中間セクションと、真空ラインに接続されて、低圧真空を形成し、収着構造から放出された副生成物を除去するための、真空フローネットワークと、を含む。格子構造が中間セクションにわたって画定され、格子構造は、副生成物の吸着を改善するように表面積を増加させるために、複数の層内に画定された開口部のネットワークを含む。内側セクションは中間セクションに隣接して配置されている。格子構造の外層は、チャンバの内部領域に面している。格子構造の層における開口部は、外層が副生成物を吸着するためのより大きな表面積を提供するように、内層から外層に向かってサイズが漸進的に大きくなっている。真空ラインは吸着ステップ中に作動されて、副生成物を吸着するように、チャンバ内の圧力に対して格子構造内に低圧領域を形成する。脱着ステップが、ＷＡＣ／ＣＷＡＣと共に実行されて、蓄積された副生成物を収着壁から確実に除去する。 
【選択図】図１
Patent JP-2022552631-A (JP)
Title: 走査モードおよび静止モードにおける高感度の光学計測
IPC: H01L21/66
Filed: 2020-09-22
Abstract: 計測システム１００は、試料上の１つまたは複数の計測ターゲットが測定中に動かない静止モード、または１つまたは複数の計測ターゲットが測定中に動いている走査モードにおいて計測測定を選択的に行うための計測ツールと、並進ステージ１１８、および１つまたは複数の検出器１０４のうちの少なくとも１つに通信可能に結合されたコントローラ１３０とを備えることができる。コントローラ１３０は、調査される試料１０２上の計測ターゲットの場所を受信し、静止モードまたは走査モードでの調査のための計測ターゲットを指定し、指定に基づいて、計測ツールに、静止モードまたは走査モードにおいて計測ターゲットに対する計測測定を実行するように指示し、複数の計測ターゲットに対する計測測定に基づいて試料の計測データを生成することができる。