baber/WOPTO huggingface dataset:
Patent KR-20160134056-A (KR)
Title: Communication security method in door lock system
Inventor: PARK EUN MIN
IPC: H04W12/04
Filed: 2015-05-14
Abstract: The present invention relates to a method of securing communication and, more specifically, to a method of securing communication of a door lock in a door lock system for tightening a security level of communication between a portable terminal and the door lock. In order to accomplish this, the method of securing communication of a door lock according to the present invention comprises: a step of performing an initial pairing between the door lock and the portable terminal; a step in which the door lock transmits an internal unique security key to the portable terminal; a step in which the portable terminal combines the unique security key with a currently allocated communication channel number to generate a first security key; and a step in which a data communication channel is established between the door lock and the portable terminal according to the currently allocated communication channel number.
Patent KR-20160139574-A (KR)
Inventor: KIM EUN CHUL
IPC: B23B35/00
Filed: 2015-05-28
Abstract: 본 발명은 인쇄회로기판의 제조공정 중 인쇄회로기판에 구멍을 천공하는 천공공정에 있어서 천공 드릴의 천공성을 향상하고, 천공시의 수지층 말림현상을 방지하며, 천공 드릴의 파손을 예방하는 인쇄회로기판 천공용 엔트리 시트 및 그 제조방법에 관한 것으로서,  
금속박막과; 이소프로필알콜, 메틸아크릴레이트, 아크릴산, 아조비스이소부티로니트릴 등을 혼합 교반하여 조성되어 제조되는 수용해성 아크릴 중합체와, 증류수, 폴리에틸렌글리콜, 폴리에틸렌옥사이드, 폴리실록산 등을 혼합 용해하여 혼합물을 조성하고 이 혼합물에 상기 수용해성 아크릴 중합체를 혼합 교반하여 윤활성 수지를; 제조하고, 상기 윤활성 수지를 상기 금속박막상에 윤활성 수지층으로 형성하고, 이를 건조하는 처리공정이 수행되어 제조되는 본 발명에 따른 인쇄회로기판 천공용 엔트리 시트 및 그 제조방법이다.
Patent KR-20160148348-A (KR)
Title: Apparatus and method for hotplug control based on load property of multi-core system
Inventor: ON JIN HO
IPC: G06F9/50
Filed: 2015-06-16
Abstract: A hotplug control apparatus based on the load property of a multi-core system includes a load measuring part for measuring the load of two or more cores constituting a multicore and determining a type of the loads measured in an individual core, and a hot plug processing part for calculating an average load from the measured loads of the individual cores, comparing the calculated average load and a control table which stores the number of operations of the cores for the type of the loads according to the judgment result, and determines the optimum number of cores. The hotplug control apparatus further includes a table generation part which generates a reference load divided according to the type of the loads in the individual core constituting a multi-core and applying it, and generates a control table by measuring the operation throughput of the individual core to which the maximum load is applied.
Patent KR-20160148992-A (KR)
Inventor: YANG SUNG JIN
IPC: F25C5/08
Filed: 2015-06-17
Abstract: The present invention relates to an ice making assembly of a refrigerator, and a method for assembling the same. According to one aspect of the present invention, the ice making assembly comprises: an ice tray generating ice; and a heater heating to separate the ice from the ice tray. The ice tray comprises: a mounting unit enabling the heater to be disposed; and a heater fixing unit protruding from a portion of the ice tray to the outside.
Patent KR-20160149725-A (KR)
Inventor: LEE JU
IPC: H02K11/00
Filed: 2015-06-19
Abstract: 회전자 오버행 구조를 가지는 고속구동용 영구자석 전동기 및 이에 사용되는 차폐부가 개시된다.  개시된 영구자석 전동기는 상기 고정자의 내부에서 회전하며, 상기 고정자보다 높이가 높게 형성된 오버행 구조를 가지는 회전자; 및 상기 고정자보다 높이가 높은 부분의 회전자인 오버행된 회전자의 적어도 일부를 덮는 차폐부;를 포함한다.
Patent KR-20160149943-A (KR)
Inventor: LIM BYUNG KWON
IPC: B22F9/24
Filed: 2015-06-19
Abstract: A method for synthesizing copper nanowires and a copper nanowire synthesized thereby are provided. A method for synthesizing copper nanowires comprises the steps of: adding a copper precursor and a stabilizer to an organic solvent to form a copper precursor solution; and synthesizing a copper nanowire by heating the copper precursor solution.
Patent KR-20170001780-A (KR)
Inventor: LEE BO RAM
IPC: G01T1/20
Filed: 2015-06-25
Abstract: The present invention relates to a readout circuit of an X-ray detector comprising: a data line capacitor to store an electrical signal output from a pixel; an amplifier to amplify the electrical signal from the pixel; and a variable current load connected to an output terminal of the pixel. An objective of the present invention is to provide the readout circuit of the X-ray detector which is able to improve a detection speed of the X-ray detector while ensuring a proper operation of the X-ray detector.
Patent KR-20160067020-A (KR)
Inventor: JEON JONG PIL
IPC: H05B33/14
Filed: 2015-06-30
Abstract: Provided are a white light emitting device and a display device using the same, which can improve color uniformity. The white light emitting device includes: a plurality of light sources mounted on a circuit board to emit blue light; a light conversion unit spaced apart from the circuit board to convert the blue light incident from the light sources to white light; a reflection sheet stacked on the circuit board to reflect the blue light toward the direction of a light converting layer; and a compensation unit provided between the circuit board and the reflection sheet to convert the blue light to the white light.
Patent KR-20160007412-A (KR)
Inventor: HORIIKE YOSHITERU
IPC: G06F3/12
Filed: 2015-07-09
Abstract: An information processing device including a touch panel display includes: a first detection unit which detects an object coming in contact with the touch panel display; and a second detection unit which detects the object moving to the outside of a display item area while being in contact with the touch panel display, after detecting the object coming in contact with the touch panel display in the display item area. When the display item is in a flick or drag operation detection area, the information processing device executes a control operation which does not execute a process related to the display item, in response to the detection executed by the second detection unit.
Patent KR-20170014539-A (KR)
Title: 줄기세포 성분 추출물을 포함한 의료용 밴드
Inventor: KIM YOUNG SIL
IPC: A61K35/50
Filed: 2015-07-30
Abstract: 본 발명은 줄기세포 성분 추출물을 포함한 의료용 밴드에 관한 것이다. 
본 발명에 따른 줄기세포 성분 추출물을 포함한 의료용 밴드는 줄기세포의 유효성분을 추출한 줄기세포 성분 추출물; 상기 줄기세포 성분 추출물이 도포된 부직포; 상기 부직포 내의 성분을 보호하기 위하여 부착된 보호필름; 상기 보호필름을 포함하며, 일측면이 피부에 부착되기 위한 접착면을 가지는 접착시트; 및 상기 접착시트의 접착면을 보호하며, 박리가 가능하게 접착된 박리지;를 포함하여 구성되는 것을 특징으로 한다.
Patent KR-20170016235-A (KR)
Title: 버섯배지용 화염 살균장치
Inventor: KIM DONG YEOL
IPC: A01G1/04
Filed: 2015-08-03
Abstract: 본 발명은 버섯 등과 같은 작물을 재배하는데 사용되는 배지의 표면을 화염을 이용하여 살균하는 화염 살균장치에 관한 것으로서, 좀 더 상세하게는, 버섯배지를 이용하여 버섯을 재배 및 수확을 반복함에 따라 주로 버섯배지의 표면층 부분에서 점차적으로 번식하는 푸른 곰팡이와 같은 다량의 유해 곰팡이들, 애벌레 및 각종 세균들을 화염 연소을 이용하여 살균작업을 신속하고 효율적으로 실시할 수 있고, 장시간 버섯 재배 및 수확을 통해 발생된 유해 곰팡이류들로 인해 종래 폐기처분되는 버섯배지를 재활용할 수 있도록 하는 친환경적인 버섯배지용 화염 살균장치에 관한 것으로, 
본 발명에 따른 버섯배지용 화염 살균장치(1)는, 상측면에 놓인 버섯배지(60)를 전방에서 후방으로 이송하는 전방 이송부(10); 상기 전방 이송부(10)로부터 후방으로 소정거리 이격된 위치에 구비되며, 상기 전방 이송부(10)로부터 이송된 버섯배지(60)를 전방에서 후방으로 이송하는 후방 이송부(20); 상기 전방 이송부(10) 및 후방 이송부(20) 사이 공간에 구비되며, 상기 전방 이송부(10)를 통해 이송된 버섯배지(60)의 표면을 소정온도의 화염으로 살균하는 화염 살균부(32); 및, 상기 전방 이송부(10), 후방 이송부(20) 및, 화염 살균부(32)의 작동을 제어하는 제어부(40)를; 포함하여 형성되는 것을 특징으로 한다.
Patent KR-20170019280-A (KR)
Inventor: JUNG MIN SHY
IPC: B63C7/10
Filed: 2015-08-11
Abstract: 본 발명은 상기와 같은 문제점을 해결하기 위해 창작된 것으로, 부력을 이용한 침몰된 선체의 인양장치에 있어서, 상기 침몰된 선체를 부력에 의해 부상시키는 부력체와, 상기 부력체에 형성된 관통구와, 상기 관통구를 통과하는 연결부재가 구비되되 상기 연결부재에 상기 부력체가 다수개 부착되며, 상기 연결부재 말단에 결합되어 상기 선체의 소정의 위치에 부착되는 부착부를 포함하여 이루어지는 것을 특징으로 하는 부력을 이용한 침몰된 선체의 인양장치가 제공된다. 
이와 같은 본 발명에 의해 침몰된 선체를 부력을 이용하여 인양하는 장치를 제공할 수 있으며, 부력체를 사용함으로써 유속의 변화에 자연스럽게 대응할 수 있다.  
또한, 다수개의 부력체가 선체에 설치됨으로써 힘이 분산되므로 안전하며, 인양 과정에서 균형을 잡기가 용이하다.  
또한, 인양줄로 선체를 감지 않은 상태에서 침몰된 선체를 부상시키기 때문에 선체의 절단 및 부분적인 파손을 방지할 수 있다.
Patent KR-20160105269-A (KR)
Inventor: JUNG IK SU
IPC: H04B1/3883
Filed: 2015-08-12
Abstract: According to an embodiment of the present invention, an electronic device includes: an outer housing which includes a first surface and a second surface on the opposite side of the first surface; a printed circuit board which is arranged in a space formed between the first and second surfaces and forms a plane substantially in parallel with the first surface; a display which is arranged between the first surface and the printed circuit board; an antenna pattern which is arranged between the display and the second surface; and one or more communication circuits electrically connected to the antenna pattern. The present invention is not limited to the above-described configuration of the embodiment. Other embodiments of the present invention can also be realized.
Patent KR-20170022093-A (KR)
Title: Mobile survey system apparatus and Method for controlling thereof
Inventor: CHOO SHIM GYOO
IPC: G06Q30/02
Filed: 2015-08-19
Abstract: The present invention relates to a mobile survey system and a method for controlling the same which are capable of generating a unique disposable short URL, which is transferred to a respondent when a mobile survey is performed, and mutually mapped to a phone number of the respondent by using the phone number as a key value. When the survey is conducted by using the disposable shortcut URL, a response is provided once with the disposable shortcut URL, and the response is discarded immediately after submitting the response so that overlapping submission is unavailable, thereby increasing reliability of survey. Also, the mobile survey system and the method of controlling the same can prevent a survey from being leaked by selectively performing a user authentication process when the survey is conducted and can increase a participation rate of the survey by automatically transferring the same shortcut URL to a non-response target at least once. The mobile survey system comprises a storing unit, a shortcut URL generation unit, a URL transmission unit, and an analysis processing unit.
Patent KR-20170022177-A (KR)
Title: Stacked image sensor and method of manufacturing the same
Inventor: ROH SOOK YOUNG
IPC: H01L27/146
Filed: 2015-08-19
Abstract: Disclosed are a laminated image sensor, which can improve energy efficiency of incident light and color purity, and a manufacturing method thereof. The disclosed laminated image sensor has a structure of coupling different types of photoelectric conversion layers or different types of photoelectric conversion elements in a vertical direction in pixel units. The different types of photoelectric conversion layers can include, for example, an organic photo diode layer and a silicone photo diode layer. Unit pixels can include at least two photoelectric conversion layers such as a photo diode layer, wherein one of the two photoelectric conversion layers is an organic photoelectric conversion layer and the other is a silicone photoelectric conversion layer. A micro lens can be included between the different types of photoelectric conversion layers. Also, an organic dye color filter can be included in the structure of the different types of photoelectric conversion layers.
Patent KR-20170022474-A (KR)
Title: Method and apparatus for transmitting and receiving buffer status information in wireless communication system
Inventor: SON YOUNG WOOK
IPC: H04W28/02
Filed: 2015-08-20
Abstract: The present disclosure relates to a 5G or a pre-5G communication system which may be provided to support a higher data transmission rate than a 4G communication system such as long term evolution (LTE). The present invention provides a method through which an access point receives buffer status information in a wireless communication system. The method comprises the steps of: determining a contention sub slot and a dedicated sub slot for each of terminals connected to the access point; creating a data trigger action frame on the basis of a first element including allocation information about the dedicated sub slot to be used by a corresponding terminal in a buffer status report (BSR) phase in which the each terminal transmits the buffer status information to the access point and broadcasting the created data trigger action frame to the terminals; and receiving the BSR frame, which is transmitted on the basis of the data trigger action frame, from the each terminal.
Patent KR-20170022607-A (KR)
Title: Integrated management system of disaster safety
Inventor: SHIM JAE HYUN
IPC: G08B25/14
Filed: 2015-08-21
Abstract: The present invention relates to a system for integrally managing disaster safety on the basis of spatial information data based on a 2-dimensional or 3-dimensional map. An integrated management system for disaster safety comprises: a smart mobile device (1) in which a disaster information collection application is installed to collect and transmit disaster information such as picture and movie; a smart big board server (2) in which the disaster information transmitted from the smart mobile device (1) is stored; and a smart big board screen (3) on which the disaster information stored in the big board server (2) is displayed on a map together with time and position information, wherein in addition to the disaster information transmitted from the smart mobile device (1), weather information collected from an automatic weather system of a meteorological office and general weather systems, image information transmitted from field CCTVs of a disaster dangerous area, and big data such as SNS in which interest field of the general public is contained are transmitted and stored together in the smart big board server (2). In the smart big board screen (3), a geographic information system (GIS) is provided, the disaster information transmitted from the smart mobile device (1), that is, contents including picture, field streaming image, real-time weather information, CCTV image, and big data such as SNS are simultaneously displayed and performed in a layer of the spatial information data based on the 2-dimensional or 3-dimensional map (31).
Patent KR-20170025986-A (KR)
Inventor: KIM KYUNG RAE
IPC: A47L15/44
Filed: 2015-08-31
Abstract: 본 발명의 식기세척기는, 캐비닛; 상기 캐비닛에 장착되어 내부에 세척공간을 제공하는 터브; 상기 터브의 전방에 마련된 수평의 회동축에 회동가능하게 장착되는 도어; 및 상기 도어의 후면에 장착되어 상기 세척공간에 세제를 공급하는 세제디스펜서를 포함하고, 상기 세제디스펜서는, 상기 도어 내부에 배치된 회동축에 회동가능하게 장착되고 오목하게 형성되어 세제를 수용하는 챔버; 상기 챔버를 회동시키는 액추에이터; 및 상기 챔버를 원위치로 복귀시키는 탄성부재를 포함하는 것을 특징으로 한다. 
본 발명의 식기세척기에 의하면, 세제 공급 챔버가 정제 또는 파우더 타입의 세제뿐만 아니라 액상 세제도 수용할 수 있고, 세제 투입시에 세제 공급 챔버를 형성하는 케이스가 움직여서 그 바닥면이 거의 수직으로 배치될 수 있으므로, 세제가 저항을 받지 않고 챔버 내에 세제가 남지 않으며 세척조 내로 잘 투입될 수 있다.
Patent KR-20170028479-A (KR)
Inventor: SEO JI MYOUNG
IPC: G09G3/20
Filed: 2015-09-03
Abstract: A display device comprises: a display panel including a plurality of data lines and a plurality of gate lines crossing the data lines; a frequency detection unit for receiving an input synchronization signal whose input frequency is freely changed within a set free frequency range, and counting the number of clocks corresponding to a frame of the input synchronization signal; a synchronization signal generation unit for inserting an insertion frame corresponding to a maximum frequency within the free frequency range to a vertical blanking interval of the frame based on the number of clocks of the frame so as to generate an output synchronization signal; a frame output unit for outputting insertion frame data to the insertion frame of the output synchronization signal; an inverted signal generation unit for generating an inverted control signal whose phase is inverted on a frame-by-frame basis, based on the output synchronization signal; and a data driving unit for controlling polarity of a data voltage based on the inverted control signal, and outputting the data voltage to a data line.
Patent KR-20170028659-A (KR)
Inventor: KIM YOUNG SHIK
IPC: G01L5/13
Filed: 2015-09-04
Abstract: The present invention relates to an azimuth thruster capable of generating thrust in all directions. To solve a problem of an azimuth thruster of an existing technology not suggesting an apparatus or method of correctly measuring and estimating performance of the azimuth thruster; the apparatus comprises a torque sensor to measure an X-directional moment and a torque sensor to measure a Y-directional moment with respect to a power transfer shaft of the azimuth thruster such that the thrust generated in the azimuth thruster is able to correctly be measured with a simple configuration. Moreover, using a measurement apparatus capable of measuring the thrust with the simple configuration; the azimuth thruster capable of measuring the thrust generated in the azimuth thruster is provided, and a vessel using such azimuth thruster is provided.
Patent KR-20170029180-A (KR)
Title: Vehicle, and control method for the same
Inventor: JOO SI HYUN
IPC: G06F3/041
Filed: 2015-09-07
Abstract: The present invention provides a vehicle in which a user interface (UI) displayed in accordance with a touch location is controlled when pressure is applied, and a control method thereof. According to an exemplary embodiment of the present invention, the vehicle includes: a display displaying a user interface (UI); a touch input device having a concave area detecting touching, and dividing the concave area into a plurality of sub-areas in accordance with the UI; a pressure sensor sensing pressure; and a controller controlling the display such that the UI is manipulated in accordance with the sub-areas sensing the touching among the plurality of sub-areas when the pressure is sensed by the pressure sensor.
Patent KR-20170034181-A (KR)
Inventor: SUNG JIN WOO
IPC: H01L33/04
Filed: 2015-09-18
Abstract: According to an embodiment, a light conversion complex comprises: at least one light conversion particle; and a protection film configured to surround the light conversion particle. The present invention can improve the reliability of the light conversion complex.
Patent KR-20170034983-A (KR)
Inventor: AHN HYO JIN
IPC: B01J37/00
Filed: 2015-09-21
Abstract: The present invention relates to a method for producing a catalyst for reforming hydrocarbon fuel using an electrospray, and is a method for producing a catalyst for reforming hydrocarbon fuel which causes hydrogen to be produced by a chemical reaction of hydrocarbon fuel and steam, comprising: a step of coating a solution comprising a catalyst material precursor and a solvent on a porous heat-resistant alloy base by an electrospray method to form a catalyst material precursor film; and a step of heat treating the porous heat-resistant alloy base having the catalyst material precursor film to convert the catalyst material precursor into a catalytic material.
Patent KR-20170036159-A (KR)
Inventor: HWANG MUN SEB
IPC: D02G1/16
Filed: 2015-09-23
Abstract: 본 발명은 고수축 폴리에스테르사를 심사로, 폴리에스테르 중공형 반연신사를 효과사로 공급하는 사공급단계; 상기 효과사를 히트롤러를 통해 연신 및 열처리하는 접촉 열처리단계; 상기 접촉 열처리단계에서 열처리된 효과사를 히트플레이트에서 열처리하는 비접촉 열처리단계; 상기 열처리된 효과사와 심사를 공기 교락을 통해 합사하는 교락단계 및 교락된 복합사를 권취하는 권취단계를 포함하는 볼륨감과 보온성이 우수한 폴리에스테르 복합사 제조방법에 관한 것이다.
Patent KR-20170042118-A (KR)
Inventor: LEE DONG HWA
IPC: A61B5/00
Filed: 2015-10-08
Abstract: The present invention relates to a wrist blood pressure gauge which is wearable on a wrist and can be automatically tightened. The wrist blood pressure gauge according to the present invention comprises: a wrist strap for wearing on the wrist; a sensor which is provided in the wrist strap for measuring blood pressure; and a strap tightener which selectively tightens the wrist strap to reduce the circumferential length of the wrist blood pressure gauge. Additionally, the strap tightener may loosen the wrist strap to increase the circumferential length of the wrist blood pressure gauge. According to the present invention, it is possible to conveniently measure blood pressure whenever a user needs to measure blood pressure; wrist adhesiveness is excellent; accuracy in measurement of blood pressure can be raised; a pumping device for filling an airbag may be omitted; an exhaust valve is not required; and it is possible to very easily and conveniently measure blood pressure.
Patent KR-20170043683-A (KR)
Inventor: KIM JIN WOONG
IPC: H01L29/66
Filed: 2015-10-13
Abstract: The present invention provides a semiconductor device manufacturing method capable of preventing bending and a threshold value of an active area. According to the technology, the method includes: a step of forming a device separation layer defining an active area on a semiconductor substrate; a step of forming a hard mask including a linear opening which traverses a part of the active area and a part of the device separation layer at the same time; a step of forming a trench by etching the active area and the device separation layer through the opening of the hard mask; a step of forming a silicon nitride layer covering the side walls and upper surface of the hard mask and the sides and floor surface of the trench; a step of forming a protecting layer covering the hard mask and a gate oxide layer covering the sides and floor surface of the trench by oxidizing the silicon nitride layer; a step of forming a gate layer, which fills the trench, on the protecting layer and the gate oxide layer; and a step of recessing the gate layer in order to a gate electrode, of which lever is lower than the upper surface of the semiconductor substrate, in the trench.
Patent KR-20160046728-A (KR)
Inventor: HONDA MITSUHIRO
IPC: F24F11/00
Filed: 2015-10-14
Abstract: Provided are a temperature distribution display device and a method for the same. An objective of the present invention is to provide a temperature distribution display technology enabling an easy confirmation of a sphere or a person, and a correct comparison of a temperature distribution among a plurality of thermal images. A target temperature range calculation unit (15A) calculates a temperature range from a maximum heating start sphere temperature Tmh on which an air-conditioning equipment (20) automatically starts heating operation to a maximum capacity to a maximum cooling start sphere temperature Tmc on which the air-conditioning equipment (20) automatically starts a cooling operation to the maximum capacity among sphere temperatures which a sphere (21) forming an inner surface of an air-conditioning space (A) may take, and on the basis of spatial data associated with the air-conditioning space (A) and operation capacity data for the operation capacity of the air-conditioning equipment (20) as a target temperature range Tw to be classified and identified by colors. A display color assignment unit (15B) assigns display color to each temperature included in the target temperature range Tw. The temperature distribution display device includes: the target temperature range calculation unit; the display color assignment unit; and a temperature distribution display unit.
Patent KR-20170047097-A (KR)
Title: 스마트 약상자를 활용한 약복용 관리 시스템
Inventor: SHIN SANG WOOK
IPC: A61J7/04
Filed: 2015-10-22
Abstract: 스마트 약상자를 활용한 약복용 관리 시스템이 개시된다. 본 발명의 실시예에 따른 스마트 약상자를 활용한 약복용 관리시스템은, 복용할 약이 수납된 용기와, 상기 용기에 설치된 무게감지센서와, 복용스케줄에 따른 복용시간을 알람(alarm) 하는 복용시간 알람부와, 상기 복용 스케줄에 따른 복용시간 경과 후 상기 무게감지센서를 이용하여 상기 용기의 무게 변화의 감지를 통해 사용자의 복용 여부를 확인하는 외부로 출력하는 확인부를 포함한 스마트 약상자; 와 상기 복용스케줄에 따른 복용시간을 알람 하고, 상기 사용자의 복용 여부를 출력하는 사용자 단말기를 포함한다.
Patent KR-20170048813-A (KR)
Title: 배기가스 오염물질 저감장치
Inventor: PARK HEE JUN
IPC: B01D47/06
Filed: 2015-10-27
Abstract: 본 발명의 일 실시예에 의해 배기가스 오염물질 저감장치가 제공된다. 
본 발명의 일 실시예에 따른 배기가스 오염물질 저감장치는, 배기가스가 유동하는 유동라인과, 라디칼을 생성하여 유동라인으로 공급하는 라디칼발생부와, 유동라인을 통해 공급되는 배기가스와 라디칼의 반응물질에 세정수를 분무하여 오염물질을 제거하는 스크러버, 및 라디칼발생부 및 스크러버 중 적어도 하나에 자화수를 공급하는 자화수생성부를 포함할 수 있다.
Patent KR-20170049138-A (KR)
Title: Method of fabricating a reflective-type photomask
Inventor: RYU CHOONG HAN
IPC: H01L21/306
Filed: 2015-10-28
Abstract: A method of manufacturing a reflective-type photomask includes a step of forming a multi-reflection layer, an absorption layer, and an antireflection layer on a substrate; a step of forming an antireflection layer pattern that partially exposes the surface of the absorption layer by etching a part of the antireflection layer through direct irradiation of an ion beam; and a step of forming an absorption layer pattern exposing a part of the surface of the multi-reflection layer by removing an exposed portion of the absorption layer by using the antireflection layer pattern as an etching mask. So, the limitations of a photolithography process can be overcome.