Patent SG-11201805289W-A (SG)
Title: Compositions and methods using same for deposition of silicon-containing film
Inventor: LI JIANHENG
IPC: C23C16/34
Filed: 2016-12-21
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 1111111111011101 010111010 III 0111311111 01011111001 011111111111110111111 International Bureau r..... .Yi j ..... ...,/ (10) International Publication Number (43) International Publication Date WO 2017/112732 Al 29 June 2017(29.06.2017) WIPO I PCT (51) International Patent Classification: (74) Agents: ROSSI, Joseph, D. et al.; STRADLEY RONON C23C 16/40 (2006.01) HO1L 21/02 (2006.01) STEVENS & YOUNG, LLP, 30 Valley Stream Parkway, C23C 16/34 (2006.01) H01L 21/205 (2006.01) Great Valley Corporate Center, Malvern, PA 19355 (US). C23C 16/50 (2006.01) C07F 7/10 (2006.01) C23C 16/52 (2006.01) C07F 7/08 (2006.01) (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, (21) International Application Number: AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, PCT/US2016/067935 BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (22) International Filing Date: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, 21 December 2016 (21.12.2016) KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, (25) Filing Language: English MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, (26) Publication Language: English RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, (30) Priority Data: TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, 62/270,259 21 December 2015 (21.12.2015) US ZA, ZM, ZW. (71) Applicant: VERSUM MATERIALS US, LLC [US/US]; (84) Designated States (unless otherwise indicated, for every 8555 S. River Parkway, Tempe, Arizona 85284 (US). kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, (72) Inventors: LI, Jianheng; 937 Crest Way, Emmaus, PA TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, 18049 (US). LEI, Xinjian; 1928 Cherrywood Street, Vista, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, — CA 92081 (US). RIDGEWAY, Robert, Gordon; 3277 DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, — Dovecote Drive, Quakertown, PA 18951 (US). VRTIS, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, — = Raymond, Nicholas; 1510 Randi Lane, Orefield, PA SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, 18069 (US). XIAO, Manchao; 5534 Caballos Place, San GW, KM, ML, MR, NE, SN, TD, TG). = Diego, CA 92130 (US). HO, Richard; 5815 E. La Alpma Declarations under Rule 4.17: Avenue #313, Anaheim, CA 92807 _ (US). — of inventorship (Rule 4.17(iv)) = = = [Continued on next page] = (54) Title: COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTAINING FILM = ,. = . \\ '*- , , ,..„ \\\ \\.. = Srg V . ,5,Pr442. \ \ \ , \ ., \ \ #604 X ' = = \ = _ . _ . , ,-1 \ en :e s.,,, , , , ,,, , ,,,,• .0 ‹ . : ,.. ;$,. .:„ . ..- tiz ,,, ‘ ,,,,,,,, t ,:-. . 1 / 4 \ \\\ \"\\ \ \! - A„;:\ IN ei 1-1 Figure 1 1-1 IN 1 -1 (57) : Described herein are compositions and methods using same for forming a silicon-containing film such as without N limitation a silicon oxide, silicon nitride, silicon oxynitride, a carbon-doped silicon nitride, or a carbon-doped silicon oxide film on at least a surface of a substrate having a surface feature. In one aspect, the silicon-containing films are deposited using a compound C: having Formula I or II described herein. WO 2017/112732 Al 1#11101M01101DEIRMEOM0101101011111010M11VOIS Published: — with international search report (Art. 21(3))