baber/WOPTO huggingface dataset:
Patent KR-20090011429-A (KR)
Title: Marker genes based on amiodarone treatment for screening of drug inducing pulmonary toxicity and screening method using thereof
Inventor: KIM YOUN JUNG
IPC: C12Q1/68
Filed: 2007-07-26
Abstract: A lungs toxicity induction drug searching method is provided to monitor drug or chemical substance having risk of new lungs toxicity or determine risk using a reaction genes selected through DNA microarray chip as marker gene. A lungs toxicity induction drug searching method comprises steps of: 1) processing the object compound in human bronchial epithelial cell; 2) separating RNA in experimental group cell processing the object compound of the step 1) and an antithesis group cell which does not process the object compound; 3) synthesizing RNA of the experimental group and the antithesis group using cDNA noting the experimental group and the antithesis group to other fluorescent material; 4) mixing the cDNA respectively marked by the other fluorescent material of the step 3) with a DNA microarray; 5) analyzing the DNA microarray reacting of the step 4); and 6) comparing and confirming expressed grade of marker gene in data analyzed of the step 5) with the antithesis group.
Patent KR-20080012160-A (KR)
Title: Polarizer and liquid cyristal display using the same
Inventor: PARK JAE HONG
IPC: G02B5/30
Filed: 2007-07-26
Abstract: A polarizing plate and a liquid crystal display using the same are provided to solve problems of a light leakage and an egg-shaped stain, and to prevent a yellowing phenomenon. A liquid crystal display includes a liquid crystal cell and first and second polarizing plates. The first and second polarizing plates are formed on both sides of the liquid crystal cell respectively. The first and second polarizing plates have polyvinyl alcohol polarizing plates and protection films formed on both sides of the polyvinyl alcohol polarizer respectively. The protection films of the first and second polarizing plates, which are formed at opposite sides to the liquid crystal cell, are films with a vapor transmittance below 100 g/m^2Day. The protection films of the first and second polarizing plates, which are formed to face the liquid crystal cell, are films with a vapor transmittance over 1,500 g/m^2Day.
Patent KR-20090011547-A (KR)
Title: Tube jointing device
Inventor: PARK HYUN SOON
IPC: F16L21/06
Filed: 2007-07-26
Abstract: A tube joint device is provided to allow a user to conveniently connect underground conduit by connecting a cable pathway and a buried tube for manhole with a sealing state. A tube joint device comprises a first connection element(2) including a first ground plane(S1), a second connector(4) including a second ground plane(S2) surrounding the rest of two tube joint part boundary surfaces and combining to the first connection element in opposite directions, a sealing installation(6), adhering between the first ground plane and the second ground plane blocking the different tube joint part with a sealing state, a connecting apparatus(8) detachably fixing the first connection element and the second connector in opposite directions.
Patent KR-20080011130-A (KR)
Title: Method and system for navigating in a database of a computer system
Inventor: DELARUE GUILLAUME
IPC: G06F3/0481
Filed: 2007-07-27
Abstract: A system and a method for navigating in a database of a computer system are provided to enable a user to navigate conveniently in the database of a product life cycle management system for storing a complex model object. A method for navigating in a database of a computer system, which includes a graphical user interface(100), comprises the steps of: returning results(110a-g) from a query in a database; displaying in the graphical user interface the results returned using several levels of progressive granularity, each of the results being associated with one of the levels, according to the query; receiving user selection of at least one of the results(110d,110ds) returned; redisplaying the results using the several levels of granularity, wherein the selected result is associated with a level having the finest granularity.
Patent KR-20090014652-A (KR)
Title: Printing apparatus for reducing an early stage printing time and printing control methed thereof
Inventor: CHAE SU KYOUNG
IPC: G03G15/00
Filed: 2007-08-06
Abstract: A printing device and a printing control method are provided to detect the rotation cycle of a transfer belt while performing the printing preparation operation and perform printing simultaneously with the completion of the printing preparation operation, thereby reducing the initial print time. A detection unit(110) detects the rotation cycle of a transfer belt. A printing controller performs the printing preparation operation, detects the rotation cycle if the printing preparation operation starts, and performs printing by the detected rotation cycle if the printing preparation operation is completed. The detection unit comprises the followings. A sensing unit senses an identification mark formed on the transfer belt. A calculating unit calculates a rotation period of the transfer belt by performing a counting process from a point of time when the identification mark is sensed to a point of time when the identification mark is re-sensed.
Patent KR-20090015677-A (KR)
Inventor: LEE KI HAING
IPC: B62D65/06
Filed: 2007-08-09
Abstract: A device for checking door stay locking coupling is provided that the attaching condition and fastening force of the door stay can be rapidly confirmed at the same time. A device for checking door stay locking coupling comprises a main body(40) of the locking status checking device confirming the attaching condition of the door stay, an air cylinder(10) arranged in the rear of the main body, an axis(30) protruded to the front of the main body, a door attaching body(20) which is equipped in the front of the body in order to absorb door, lead sensors(12,14) posted at the air cylinder inside, elastic members(32,34) which are equipped in the inside and outside the main body, a sensing member(50) which is integrally formed with the rear of the elastic member, limit switch(42,44) which is equipped in the main body in order to sense tightening existence and nonexistence and fastening force of the door stay.
Patent KR-20090019341-A (KR)
Title: Contact type detector of tongue rail
Inventor: JUNG HAE CHUL
IPC: B61L7/02
Filed: 2007-08-20
Abstract: A contact type detector of a tongue rail is provided to allow an engineer of a train to confirm whether a tongue rail adheres closely to a stock rail in person and to prevent a safety accident by malfunction of the detector in advance. A contact type detector of a tongue rail comprises: a main body(110) installed in a stock rail corresponding to a tongue rail; a sliding axis(120) in which an end part is contacted with the tongue rail and which is installed in the main body to be sliding back and forth; a micro switch(150) installed in inside the main body; a manipulation part(130) installed in the sliding axis in order to manipulate the micros witch according to displacing the tongue rail; and a first elastic member making the sliding axis elastic bias toward the tongue rail.
Patent KR-20090019643-A (KR)
Inventor: CHOI HAE YONG
IPC: G03B21/00
Filed: 2007-08-27
Abstract: 본 발명은 상, 하부로 구성된 가방케이스와 초점구면과 반사면을   갖는 스크린이 결합하고 소형프로젝터를 구비하는 것을 특징으로 하는 가방형 프리젠테이션 장치에 관한 것으로서   
        가방 상부케이스 내면에 반사스크린을 구성하되 표면 반사율은 4-50%이고 각 반사스크린의 형상은 정 구면 또는 정 곡면 및 후레스넬 반사형 스크린을 결합 구성 하여   초점위치에서 입사한  소형프로젝터의 빛은 직진 반사하게 하여 핫스팟 현상 없이 일반스크린대비 4-50배의 높은 밝기를 시현하게 하고 
       프로젝터는  led와 같은 다이오드를 광원으로 한 것을 특징으로 하는 소형프로젝터로 구성하여 무게와 부피를 종래 프로젝터보다 1/4이하로 축소하여 가방구조가 가능하게 함으로서   사용 시는 반사스크린의 곡률이 갖는 초점위치에   소형프로젝터를 위치하여 사용하고, 휴대 시는 가방 형태로 이동 휴대할 수 있는 것을 특징으로 하는 가방 형 프리젠테이션 장치에 관한 것이다. 
       
     가방, 반사 형 스크린, 정구면스크린. 정곡면스크린. 후레스넬 반사스크린, LED광원, 소형프로젝터
Patent KR-20090024017-A (KR)
Title: 발광다이오드와 투명전극 유리판을 이용한 조명판넬 및 그조명판넬을 제조하는 방법
Inventor: KIM YOUNG YAE
IPC: G09F13/22
Filed: 2007-09-03
Abstract: 본 발명은 투명 전극 유리판(ITO Glass:Indium-Tin Oxide Glass )과 발광다이오드(LED: Light Emitting Diode)의 광원을 이용한 조명판넬에 관한 것으로, 특히 전면 유리판과 배면 유리판 사이에 발광다이오드가 설치된 투명전극 유리판을 내장하여 설치함으로써, 복잡한 배선 없이 투명한 유리판을 통해 깔끔하면서도 미려한 디자인을 가진 조명판넬을 제공하면서 동시에 일정조도 이상의 빛을 조사토록 하여 조명장치 및 광고장치의 효과를 동시에 얻을 수 있는 것을 특징으로 하는 조명판넬이다. 
     일반적으로 조명판넬은 일정 조도 이상의 빛을 조사토록 하여 어둠을 밝혀 주기 위한 도구로서, 통상 일정한 크기의 케이스 내부에 다수개의 발광다이오드나 발광체가 설치된 기판을 안착한 후 불투명한 재질의 덮개를 씌워 고정함으로써, 평상시 내부의 기판이나 발광체가 보이지 않도록 하면서 동시에 인가된 전원에 의해 상기 발광체가 발광하게 되면서 빛을 전면으로 조사하여 주변을 밝혀 주는 장치이다. 
     그리고 이러한 조명판넬은 통상 빛의 시각적인 효과를 이용하여 사람의 시선을 끄는 광고판을 비롯하여, 매트리스 형태로 설치된 다수의 발광체를 통해 기호나 문자 등으로 표출하여 주는 안내판 등에 설치되어 각각의 목적에 맞게 변형되어 사용되고 있다. 
     그러나 여기서 상기 조명판넬은 단순히 그 외관 케이스만을 변형하여 디자인 하거나, 혹은 하나 이상의 발광체를 매트리스 형태로 배열하여 설치함으로써, 각각의 목적에 맞게 그 기능을 변형하여 사용하게 된다.  
     따라서 상기 조명판넬은 전체적으로 그 기능이나 디자인이 서로 비슷비슷하게 되어 큰 차이점이 없게 되고, 특히 빛의 시각적인 효과를 이용한 광고장치의 경우 사람들의 시선을 이끄는 남다른 차이점이 요구되나 전체적으로 그 기능 및 외형의 한계성으로 인해 단순히 표지판의 기능밖에 하지 못한다는 문제점이 발생하게 된다. 
     따라서 본 발명은 상기와 같은 문제점을 해결하기 위하여 일정조도 이상의 조명효과 및 광고효과를 동시에 얻을 수 있으면서 동시에 외관 케이스 내부에 설치되어 있는 발광다이오드와 이 발광다이오드가 설치된 내부의 모습을 외부로 노출시켜 안과 밖이 노출된 누드 타입의 깔끔한 조명판넬을 제공하고자 하는 것이 목적이다. 
       
     투명전극 유리판, 조명판넬
Patent KR-20090025823-A (KR)
Title: A calibration/test apparatus and method for vacuum gauges without movement
Inventor: HONG SEUNG SOO
IPC: G01L21/12
Filed: 2007-09-07
Abstract: A calibration/test device and method of a vacuum gauge are provided to calibrate the vacuum gauge of a vacuum system being in operation with a gauge correction device connected to the vacuum gauge. A calibration/test device of a vacuum gauge includes a vacuum valve(16) opening and closing pipelines(14,18) connecting the vacuum gauge(12) to be corrected and a vacuum system(10), and a gauge correction device(100) connected to the vacuum gauge. The gauge correction device comprises a reference vacuum gauge(110), a vacuum connection valve(170), a vacuum chamber(120), a gate valve(132), and an air escape(134) which are successively equipped in the vacuum gauge to be corrected, a gas source(150) for generating pressure in the vacuum chamber, a leak valve(160) which controls the gas flow within the gas source and supplies it to the vacuum chamber, and a vacuum gauge(140) for vacuum chamber for measuring the vacuum pressure within the vacuum chamber.
Patent KR-20090025830-A (KR)
Title: Method for preparing (r)-1-[(4-chlorophenyl)phenylmethyl]piperazine and salts thereof
Inventor: HA TAE HEE
IPC: C07D295/073
Filed: 2007-09-07
Abstract: A manufacturing method of (R)-1-[(4-chlorophenyl) phenylmethyl piperazine] is provided to have high yield and high optical purity, to be conveniently manufactured and to be usefully used as intermediate. A manufacturing method of (R)-1-[(4-chlorophenyl) phenylmethyl piperazine] indicated as a chemical formula 1 or salts thereof comprises steps of: manufacturing a compound of a chemical formula 4 by reacting (R)-(4-chlorophenyl) phenylmethyl amine indicated as a chemical formula 2 with a compound of a chemical formula 3 under presence of organic base; and hydrolyzing the manufactured compound of the chemical formula 4 using strong acid or strong base. In the chemical formula 3 and the chemical formula 4: R is hydrogen, C1-4 alkyl, C1-4 alkoxy, C3-10 aryl, C3-10 aryloxy or benzyloxy; X is halogen, methanesulfonyl or p-toluenesulfonyl.
Patent KR-20090026696-A (KR)
Title: Method for manufacturing silencer for air conditioner
Inventor: KIM YONG ON
IPC: F24F1/00
Filed: 2007-09-10
Abstract: A manufacturing method of a silencer for air-conditioner is provided to reduce the noise of coolant by dividing the air bubbles included in the coolant. A manufacturing method of a silencer for air-conditioner comprises a step of forming a body(305), in which an upper tube part and a lower tube part are divided by a center partition wall(400), from a base material, a step of perforating a plurality of flow holes(401) in the partition wall so that air bubble included in coolant flowing through the partition is divided, and a step of forming an inlet(302) and an outlet(304) by reducing the upper and lower end of the body.
Patent KR-20090028672-A (KR)
Inventor: LEE JEONG MIN
IPC: B67C3/02
Filed: 2007-09-15
Abstract: A liquid filling apparatus is provided to improve sealing ability by employing an additional sealing unit on a rear part of a valve serving as a switch. A liquid filling apparatus comprises the following units. A filling part is filled by a selected bottle cap passing a predetermined path. A valve sided sealing unit(205) is combined with a second discharging hole(206) of a valve. A valve corresponded sealing unit(207) having a first discharging hole opens or closes the second discharging hole according to an operation of the valve having the second discharging hole. The filling part guides a liquid to be discharged through a discharging groove of a final nozzle.
Patent KR-20090034104-A (KR)
Title: Booting system, image forming apparatus having the system and method thereof
Inventor: JUN JIN HWI
IPC: G06F9/24
Filed: 2007-10-02
Abstract: A booting system, an image forming apparatus with the system and a control method thereof are provided to perform booting by a boot code pre-stored even before all boot codes are stored in an internal memory, thereby reducing the entire booting time. An external memory(300) stores a boot code for booting a system. A CPU core(101) performs booting by receiving the boot code. A memory controller(200) performs interface between a CPU core and an external memory. The memory controller comprises an internal memory(220) and a boot code transmission controller(260). The internal memory stores the boot code received from the external memory. The boot code transmission controller transmits the boot code pre-stored in the internal memory to enable the CPU core to sequentially perform booting operation even though a boot code to be stored in the internal memory remains.
Patent KR-20090036665-A (KR)
Title: Optical module including stress-relief layer
Inventor: CHOI KWANG SEONG
IPC: G02B6/42
Filed: 2007-10-10
Abstract: An optical module including a stress-relief layer is provided to suppress the change of optical fiber position due to thermal transformation by including a stress-relief layer between a multilayer substrate and an optical bench. A ball grid array(101b) is laminated on a ball grid array package of an optical module, and a stress relief layer is formed on a multilayer board ball grid array package. An optical bench(102) is prepared on the stress relief layer, and the optical device(103) is prepared on the optical bench. The optical fiber(105) is prepared on the optical bench while being far from the optical device by a certain interval. An amplifier(104) is electrically connected to the optical device and supplies an electrical signal to the optical device.
Patent KR-20090036869-A (KR)
Inventor: SHIN DONG SU
IPC: G02F1/13
Filed: 2007-10-10
Abstract: An apparatus for manufacturing a liquid crystal display device is provided to measure the electrical characteristic of a deposition film in real time, when forming the deposition film of the liquid crystal display device. A susceptor(120) is equipped at one side within a vacuum chamber(126). A glass substrate(100) which has the test pattern part formed in an corner thereof is loaded in the susceptor. A target(121) is made of the same material as a thin film evaporated on the glass substrate and is equipped at the other side within the vacuum chamber. The target performs the role of a cathode in the plasma discharge. A ground shield(125) is equipped between the susceptor and target to perform the role of an anode in the plasma discharge by acting as the opposite electrode. A measurement device(130) is equipped in an edge region of the susceptor to come in contact with a conductive pattern formed in a test pattern part of the glass substrate.
Patent KR-20090037022-A (KR)
Title: Smart card with flash memory and memory reader of smart card and drm method using that
Inventor: CHO YOUNG SUN
IPC: G06K19/07
Filed: 2007-10-11
Abstract: A smart card with a flash memory, a memory reader of a smart card, and a DRM(Digital Right Management) method thereof are provided to implement a function of a memory card for the DRM and a function of a smart card within a single card by providing a storage for digital information. A flash memory COB(Chip On Board) and smart card COB is separated and equipped in a single card. The smart card COB performs a function as a credit card or a transportation card. The flash memory COB stores digital information. The flash memory COB comprises a bank domain and a user domain. The bank domain stores a certificate, an OTP(One Time Password) generating program, and a digital bankbook, etc. An access of user to the bank domain is impossible. The user domain is comprised of music, movie, photograph, document, address book and other folders. A deletion, addition, and editing are allowed to folders through an exclusive reader or a computer.
Patent KR-20090038337-A (KR)
Title: Biocompatible suspension stabilizer for dispersing inorganic nanoparticles into aqueous solution
Inventor: HYEON TAEG HWAN
IPC: C07F9/50
Filed: 2007-10-15
Abstract: A bio-compatible suspension stabilizer for dispersing inorganic nano-particles in an aqueous medium is provided to modify surfaces of the inorganic nano-particles to have hydrophilic properties and easily allow ligand having in vivo activity to be accepted. A bio-compatible suspension stabilizer for dispersing inorganic nano-particles in an aqueous medium is phosphin oxide represented by the formula 1. A method for producing the phosphin oxide comprises the following steps of: dissolving a bio-compatible polymer in an organic solvent to prepare a bio-compatible polymer organic solvent; adding phosphin oxide having a leaving group into the prepared bio-compatible polymer organic solvent to bond the phosphin oxide with the bio-compatible polymer; reacting a compound having a functional group in order to induce the functional group which can be bonded with the functional ligand at a position of the leaving group of the bio-compatible polymer.
Patent KR-20090039565-A (KR)
Title: Apparatus and method for transmitting/receiving feedback information in a communication system
Inventor: LEE JONG HYEUK
IPC: H04L1/12
Filed: 2007-10-18
Abstract: An apparatus and a method for transmitting/receiving the feedback information in a communication system are provided to simplify the total system and improve the whole communications system. A method for transmitting/receiving the feedback information in a communication system is as follows. The MS(Mobile Station) receives data from the BS(Base Station)(301). The MS inspects the error of the received data. The MS produces the ACK bit or the NACK bit(303). The MS produces the transmission symbol, when the sub carrier bundle 3 of 8x1 of ACK or NACK bit is arranged. If the MS recognizes that data were normally received, the pattern '0' is chosen and the transmission symbol is transmitted to the BS(305).
Patent KR-20090041593-A (KR)
Title: Washing machine
Inventor: LEE JONG MIN
IPC: D06F25/00
Filed: 2007-10-24
Abstract: A laundry treating device is provided to improve the sterilizing effect of laundry as ultraviolet ray is irradiated in the laundry in order to remove the contaminant in a refresh cycle. A laundry treating device comprises: a drum(170) in which the laundry is put; a cabinet(110) having a main body(111), a cover(114) with an opening, a top plate(112) and a base(112); an ultraviolet irradiation part(190) irradiating the ultraviolet ray to the laundry in the drum and a tub(160), selecting various wavelength ranges; and a controller operating the ultraviolet irradiation part.
Patent KR-20090044878-A (KR)
Title: 반도체 소자의 미세패턴 형성방법
Inventor: JUNG JIN KI
IPC: H01L21/027
Filed: 2007-11-01
Abstract: 본 발명은 DEET(Double Exposure Etch Technology) 공정시 두 번에 걸친 마스크(mask) 작업으로 인한 라인(line) 선폭의 임계치수 불균일성을 개선시킬 수 있는 반도체 소자의 미세패턴 형성방법을 제공하기 위한 것으로, 이를 위해 본 발명은 피식각층 상에 식각 저지막을 형성하는 단계와, 상기 식각 저지막 상에 희생막을 피식각층 상에 희생막을 형성하는 단계와, 상기 희생막을 국부적으로 식각하여 희생 패턴을 형성하는 단계와, 상기 희생 패턴을 포함하는 상기 피식각층 상부면을 따라 절연막을 형성하는 단계와, 상기 절연막을 일부 식각하여 상기 희생 패턴의 양측벽에 스페이서를 형성하는 단계와, 상기 희생 패턴을 제거하는 단계와, 상기 스페이서를 식각 장벽층으로 상기 피식각층을 식각하는 단계를 포함하는 반도체 소자의 미세패턴 형성방법을 제공한다. 
       
     반도체 소자, 미세패턴, DEET
Patent KR-20090048040-A (KR)
Inventor: YOON SUNG HWAN
IPC: H01L23/48
Filed: 2007-11-09
Abstract: 반도체 칩 패키지는 리드 프레임, 절연 부재, 칩, 본딩 와이어들 및 밀봉 부재를 포함한다. 리드 프레임은 다수의 제1 리드들과 칩 부착 영역을 갖는 다수의 제2 리드들을 포함한다. 절연 부재는 칩 부착 영역의 제2 리드들 사이 공간을 채운다. 칩은 절연 부재의 적어도 한 면에 구비되며, 한 방향 본딩 패드들을 갖는다. 본딩 와이어들은 리드들과 본딩 패드들을 전기적으로 연결한다. 밀봉 부재는 리드 프레임, 절연 부재, 칩 및 본딩 와이어들을 감싼다. 제2 리드들 사이의 공간이 절연 부재로 채워지므로 보이드 발생을 방지할 수 있다.
Patent KR-20090049155-A (KR)
Inventor: KWON HAN JOON
IPC: G08G1/01
Filed: 2007-11-13
Abstract: 본 발명은 유료도로의 진입로상에 설치된 고무판의 하부측에 설치되어 진입하는 차량의 바퀴에서 가해지는 압력을 통해 윤폭이나 윤거 혹은 축수 등을 검출하는 검출센서부와; 상기 진입로의 설정된 위치에 규정된 간격으로 복수개 설치되어 진입하는 차량의 길이를 검출하는 차장센서부와; 상기 검출센서부와 차장센서부에 의해 검출된 진입차량의 정보 예컨대, 차량의 길이와, 차량의 윤폭이나 윤거 혹은 축수 등을 종합적으로 참고하여 차종을 판별하는 차종분류장치부를 포함하여 구성되는 도로용 차장 감지장치 및 그 제어방법을 제공한다. 
     	상기와 같은 본 발명은 규정된 경차의 차량의 길이만큼의 간격을 갖도록 광센서를 복수개 각기 설치한 다음 기타 센서들의 검출과 함께 진입하는 차량의 길이를 검출하여 경차여부를 판단하므로써, 유료도로상에서 복수개의 광센서수단을 통해 경차를 정확히 식별하여 과금하게 되므로 그에 따라 유료도로의 과금성공률을 극대화시키는 장점을 가지고 있다. 
       
     유료도로, 광센서, 경차, 차량의 길이, 과금
Patent KR-20090050731-A (KR)
Title: 디스플레이장치의 색상을 이용한 데이터 전송 장치 및 방법
Inventor: NA IN SIK
IPC: H04W88/02
Filed: 2007-11-16
Abstract: 본 발명은 디스플레이장치의 색상을 이용한 데이터 전송 장치 및 방법에 관한 것이다. 
     본 발명의 방법은 2 N 가지의 서로 다른 색상과 N비트의 데이터를 일대일로 매칭시켜 변환 테이블을 정의하는 단계와, 전송할 바이너리 비트 스트림을 입력받아 N비트의 크기로 자르는 슬라이싱 단계와, 상기 변환 테이블에 의해 N비트의 데이터를 해당 색상으로 표현하는 색 변조 단계와, 상기 데이터가 변조된 색상을 소정의 전송 프레임 형태에 따라 상기 디스플레이장치로 표출하는 단계와, 상기 표출된 색을 감지하여 전송 프레임을 식별하는 단계와, 상기 전송 프레임에서 데이터가 변조된 색상을 상기 변환 테이블에 의해 4비트의 데이터로 복조하는 단계와, 상기 복조된 4비트의 데이터를 결합하여 바이너리 비트 스트림으로 재생하는 단계로 구성된다. 
       
     디스플레이 장치, 칼러, 데이터 전송, 색 변조, 색 복조, 변환 테이블
Patent KR-20090051641-A (KR)
Inventor: LEE WOO SUN
IPC: H01L21/304
Filed: 2007-11-19
Abstract: 본 발명은 연마작업시 슬러리의 배출을 원활하게 하고, 슬러리 잔류물들과 오염물질의 방출이 용이한 화학적 기계적 연마장치를 제공하기 위한 것이다.  
     본 발명은 웨이퍼를 연마하는 연마패드가 장착된 화학적 기계적 연마장치에 있어서, 상기 연마패드는, 상하방향으로 관통 형성되어 슬러리가 배출되는 관통홀과;  상기 연마패드의 상면에 형성되어 상기 슬러리가 유동하는 유동홈; 을 포함하여 이루어지되, 상기 유동홈은 상기 관통홀과 연통되는 것을 특징으로 한다. 
       
     연마패드, 슬러리, 유동홈
Patent KR-20080090256-A (KR)
Title: Substrate coating apparatus and coating method thereof
Inventor: OGINO TADAHIRO
IPC: B05C11/10
Filed: 2007-11-27
Abstract: A substrate coating apparatus and a coating method thereof are provided to perform coating in transverse and longitudinal directions of a substrate at a fixed thickness. A substrate coating apparatus includes: a coating nozzle(3) which is formed over a substrate(2) installed on a base plate(1) in a transverse direction, and moves along the longitudinal direction of the substrate to coat the substrate; plural nozzle position control units(5c-5e) which are provided along the transverse-direction length of the coating nozzle at regular intervals, and controls the height position of a discharge port(4) formed at the coating nozzle; plural distance sensors(6c-6e) which are provided in the coating nozzle to correspond to an installation position of the each nozzle position control unit, and measure and output gap amounts between the coating nozzle and substrate at plural measurement points in the longitudinal direction of the substrate when the coating nozzle moves, to measure the undulated surface of the substrate in a square pattern of a checkerboard; and a control part which plurally calculates an average gap amount of the each distance sensor in the longitudinal direction of the substrate from plural gap amounts input from the each distance sensor, and controls the each nozzle position control unit by the each average gap amount.