baber/WOPTO huggingface dataset:
Patent KR-20180102606-A (KR)
Title: 유전체 장벽 플라즈마로 표면을 치료하는 디바이스
Inventor: TRUTWIG LEONHARD
IPC: H05H1/24
Filed: 2016-12-16
Abstract: 유전체 장벽 플라즈마로 표면을 치료하는 디바이스에서, 표면은 상대 전극으로 기능하고, 상기 디바이스는 하우징 바디 (4) 및 하우징 헤드 (17)로 형성되는 전기 절연 하우징 (1)을 가지고, 상기 전기 절연 하우징에는 고-전압 공급 라인 (10) 및 전극 (18)용 지지부가 위치되고, 상기 전극은 상기 고-전압 공급 라인 (10)에 연결되고, 상기 전극 (18)을 상기 표면으로부터 차폐시키는 유전체 (19)를 가지고, 상기 전극 (18)은 하우징 헤드 (17)에서 회전 가능하게 장착되고, 상기 유전체 (19)에 의해 덮여진 표면 섹션을 걸쳐 하우징 헤드 (17) 외부로 돌출되어, 간단한 구성으로 치료될 표면 위에서 전극의 본질적으로 제한되지 않은 이동을 허용하고, 상기 전극은 중심 축에 배치된 회전 베어링 요소 (28)를 가지고 상기 회전 베어링 요소와 함께 하우징 헤드 (17)에서 회전 베어링 요소 (29)와 상호 작용하여 중심 축을 중심으로 회전 가능하게 장착되고 고-전압 공급 라인 (10)에 연결되며, 그리고 상기 하우징 헤드 (17)는 중심 축에 대해 기울어진 회전 축을 중심으로 회전될 수 있도록 하우징 바디 (4)에 연결되고, 상기 하우징 헤드에는 회전 움직임 동안에 전기 연결을 유지하는 접촉 장치 (11, 21)가 구비된다.
Patent KR-20180100273-A (KR)
Title: 양면 점착 테이프 또는 시트, 및 피착체의 가공 방법
Inventor: ARIMITSU YUKIO
IPC: B32B27/00
Filed: 2012-01-17
Abstract: 본 발명은 피착체에 휨이 있어도, 받침대에 고정된 상태를 유효하게 유지할 수 있어, 가압 공정이 있어도, 가압에 의한 가로 어긋남을 방지할 수 있으며, 가열에 의해 가공품을 박리할 수 있는 양면 점착 테이프 또는 시트를 제공하는 것을 목적으로 한다.  기재의 한쪽 면 측에 열 팽창성 미소구를 함유하는 열 박리형 점착층을 갖고, 기재의 다른 쪽 면 측에 임시 고정용 점착층을 갖는 양면 점착 테이프 또는 시트로서, 임시 고정용 점착층의 인장 점착력이 2.0 내지 20N/20㎜ 폭이고, 어긋남량이 0.3㎜/20㎜ 폭 이하이며, 임시 고정용 점착층이 이소시아네이트계 또는 에폭시계 가교제로 가교되어 있는 양면 점착 테이프 또는 시트를 제공한다.
Patent KR-20180122383-A (KR)
Title: 보호될 기다란 부재를 중심으로 직물 슬리브를 고정하기 위한 툴 및 기다란 부재를 중심으로 보호용 직물 슬리브를 고정하는 방법
Inventor: FUKUYAMA SHOZO
IPC: H02G1/14
Filed: 2017-03-14
Abstract: 그 안에 포함되어 있는 기다란 부재를 중심으로 보호용 직물 슬리브를 고정하기 위한 툴, 및 그 사용 방법이 제공되어 있다. 툴은 마주하는 클램프 부재들을 가지는 클램프 어셈블리를 포함한다. 각각의 클램프 부재들은 직물 슬리브를 닿게 하기 위한 클램프 표면을 가진다. 각각의 클램프 표면들은 전원에 조작가능하게 연결되어 있는 복수의 가열 부재를 포함한다. 각각의 클램핑 표면 내부의 가열 부재들은, 클램프 표면들이 그 사이에 클램핑되어 있는 기다란 부재와 슬리브의 아치형 형상에 자동적으로 들어맞는 것을 허용하기 위해서 직물 슬리브의 외측 표면과의 맞물림에 응답하여 서로에 대한 독립적인 반경방향 움직임을 위하여 지지되어 있다.
Patent KR-20180133865-A (KR)
Title: 혈전성 혈소판감소성 자반 치료 약물 제조에 사용하는 항혈소판 트롬볼리신의 응용
Inventor: LI XIAOYI
IPC: A61K38/48
Filed: 2016-04-22
Abstract: 본 발명은 혈전성 혈소판감소성 자반(Thrombotic Thrombocytopenic Purpura, TTP) 치료 약물 제조에 사용하는 항혈소판 트롬볼리신(thrombolysin)의 응용에 관한 것이다. TTP의 주요 발병기전은 폰 빌레브란트 인자 분해효소(von Willebrand factor-cleaving protease)이다. 즉, ADAMTS13의 선천성 발현 결함 또는 자가항체에 억제되어 폰 빌레브란트 인자(vWF)가 체내에 대량으로 응집되어 복수개의 초극대 다합체를 만들고, 이는 병리학적 혈소판 응집을 유도해 혈전을 형성하며 최종적으로 TTP를 초래한다. 상기 항혈소판 트롬볼리신은 혈소판의 유착과 응집을 억제하여 혈소판, 적혈구, 헤모글로빈의 레벨을 회복시키는 동시에 젖산탈수소 효소(lactate dehydrogenase) 레벨을 떨어뜨려 효과적으로 혈소판 감소증과 분열세포성 용혈성 빈혈을 감소시켜 TTP 치료 목적을 달성한다.
Patent KR-20180125607-A (KR)
Title: 신장가능한 전기-광학 디스플레이들
Inventor: HARRIS GEORGE G
IPC: G02F1/1676
Filed: 2017-04-28
Abstract: 신장가능한 전기-광학 디스플레이는 전도성 재료의 층 및 전도성 재료의 층에 라미네이트된 전기영동 매체를 포함한다.     전도성 재료의 층은 또한, 복수의 노드들 및 복수의 노드들 중의 제 1 노드와 제 2 노드를 연결하는 신장가능한 인터커넥트를 포함한다.     복수의 노드들 및 복수의 노드들 중의 제 1 노드와 제 2 노드를 연결하는 신장가능한 인터커넥트를 정의하기 위해 전도성 재료의 층을 패터닝하는 단계 및 전도성 재료의 층에 전기영동 매체의 층을 라미네이트하는 단계를 포함하는 신장가능한 전기-광학 디스플레이를 제조하는 방법이 또한 제공된다.
Patent KR-20190008218-A (KR)
Title: 면역 치료를 위한 단백질 또는 단백질 단편의 유용성 예측 방법
Inventor: VORMEHR MATHIAS
IPC: G01N33/569
Filed: 2017-05-10
Abstract: 본 발명은 백신 접종과 같은 면역 치료에 유용한 T 세포 에피토프 등의 펩티드 또는 폴리펩티드를 예측하는 방법에 관한 것이다. 특히, 본 발명은 종양-관련 항원 또는 에피토프, 특히 종양-관련 신생 항원 또는 네오에피토프와 같은 펩티드 또는 폴리펩티드가 면역원성인지, 특히, 백신 접종과 같은 면역 치료에 유용할지를 예측하는 방법에 관한 것이다. 본 발명의 방법은 특히 환자의 종양에 특이적인 백신을 제공하는 데 사용될 수 있으며, 따라서 맞춤형 암 백신을 제공하는 데 사용될 수 있다.
Patent KR-20190005969-A (KR)
Title: 자동차의 조절 부재를 위한 스핀들 드라이브
Inventor: WOLF MAXIMILIAN
IPC: E05D5/06
Filed: 2017-05-12
Abstract: 본 발명은 자동차의 조절 부재(1)를 위한 스핀들 드라이브에 관한 것으로, 균일한 재료로 형성된 드라이브 유닛 하우징(4)을 가진 드라이브 유닛(3)이 제공되고, 이 경우 스핀들 드라이브(1)는 서로에 대해 이동하는 드라이브 섹션(9, 10)을 포함하고, 스핀들 측의 드라이브 섹션(11)은 결합 섹션(16a)을 가진 균일한 재료로 형성된 토션 튜브(16)를 포함하고, 이 경우 스핀들 너트(14)는 토크 지지부의 형성을 위해 결합 섹션(16a)에 회전 불가능하게, 그러나 축방향으로 이동 가능하게 결합한다.  토션 튜브(16)는 고정 섹션(16b)을 포함하고, 상기 고정 섹션은 회전 불가능하게 그리고 축방향으로 고정되어 드라이브 유닛 하우징(4)에 고정되는 것이 제안된다.
Patent KR-20190005988-A (KR)
Title: 다운링크 송신들의 구성
Inventor: SAHLIN HENRIK
IPC: H04W72/04
Filed: 2017-05-12
Abstract: 무선 디바이스(300a)로의 다운링크 송신을 위한 구성을 제공하기 위한 방법이 제시된다.  방법은 네트워크 노드(200)에 의해 수행되고, 숏 송신 시간 인터벌(sTTI)에서의 다운링크 송신을 위한 구성을 포함하는 다운링크 제어 정보(DCI) 메시지를 송신하는 단계(S102)를 포함한다.  그 네트워크 노드들, 무선 단말기들, 컴퓨터 프로그램들 및 컴퓨터 프로그램 제품들도 제시된다.
Patent KR-20190008889-A (KR)
Title: 차동 장치
Inventor: FLAXMAN ROBERT JOHN BONNER
IPC: B60K23/04
Filed: 2017-03-16
Abstract: 차동 장치(10)는: 구동원(20)으로부터 회전 구동 입력을 수용하도록 구성된 태양 기어(16 L ), 전기 모터(26)와 토크 연결되는 링 기어(22 L ) 및 좌측 차량 구동 부재(30 L )와 토크 연결 상태로 작동 가능하게 결합되도록 구성된 캐리어 기어(14 L )를 갖는 좌측 유성 기어 세트(12 L ); 및 상기 구동원(20)으로부터 회전 구동 입력을 수용하도록 구성된 태양 기어(16 R ), 상기 전기 모터(26)와 토크 연결되는 링 기어(22 R ) 및 우측 차량 구동 부재(30 R )와 토크 연결 상태로 작동 가능하게 결합되도록 구성된 캐리어 기어(14 R )를 갖는 우측 유성 기어 세트(12 R )를 포함하고, 상기 좌측 및 우측 유성 기어 세트(12 L , 12 R )의 태양 기어들(16 L , 16 R )은 서로에 대해 회전 고정되며, 사용시, 상기 구동원(20)과 상기 각각의 구동 부재(30 L , 30 R ) 각각 사이에 전달되는 동력의 양은 반대 방향으로 상기 링 기어들(22 L , 22 R )에 토크를 구동하거나 또는 인가하기 위하여 상기 전기 모터(26)를 작동시킴으로써 선택적으로 제어될 수 있다.
Patent KR-20190004807-A (KR)
Title: 지폐 관리 방법 및 시스템
Inventor: LIU YONGQUAN
IPC: G07D7/00
Filed: 2016-12-26
Abstract: 본 발명은 지폐 관리 방법을 제공하며, 상기 지폐 관리 방법은, 지폐 정보 처리 장치를 채용하여 지폐의 특징에 대해을 수집, 인식 및 처리를 진행하여, 지폐 특징 정보를 얻는 단계와; 상기 지폐 특징 정보, 업무 정보 및 상기 지폐 정보 처리 장치의 정보를 함께 마스터 서버로 전송하는 단계; 및; 상기 마스터 서버가 수신된 상기 지폐 특징 정보, 상기 업무 정보, 상기 지폐 정보 처리 장치의 정보에 대해 통합 가공 처리를 진행하고, 지폐에 대해 분류 처리를 진행하는 단계를 포함한다. 본 발명은 대응하는 지폐 관리 시스템을 더 제공한다. 본 발명의 상술한 방법에 따르면, 연산 속도를 확보함과 동시에 인식의 로버스트성을 향상할 수 있으며, 실제 응용에서의 정확성 및 실용성을 확보하였다.
Patent KR-20200085577-A (KR)
Inventor: PARK SEUL KI
IPC: G02F1/13357
Filed: 2019-01-07
Abstract: The present invention relates to: a cured resin composition which comprises cardo-based urethane acrylate, thereby having excellent hardness to suppress scratches that may occur during a process, and thereby reduces a defect rate in the process; and a scattering layer and an image display device manufactured using the same.
Patent KR-20200086398-A (KR)
Inventor: JONGSEOK CHOI
IPC: G06Q10/06
Filed: 2019-01-08
Abstract: The present disclosure provides a blockchain-based portfolio management method for career management and recruitment of various professions as well as art professions. The method comprises the following steps of: generating, by a first node, a block including information on at least one of the career, education, work ability, and work performance of a first user; performing, by a second node, verification on the information by a second user associated with the information; and recording the block as a portfolio of the first user when the verification of the information is completed.
Patent KR-20190009814-A (KR)
Inventor: YANG HYUN KEE
IPC: A41D13/11
Filed: 2019-01-09
Abstract: The present invention relates to a mask which has an antifogging function for eyeglasses by blocking gas flow to an upper part of the mask, and prevents a dry eye syndrome by blocking effluence of gas to eyes. Accordingly, the mask of the present invention comprises an existing mask and an adhesive tape formed on the upper part of a mask body to make the upper part of the mask body adhere to a nose and a cheekbone part of a face.
Patent KR-20200091992-A (KR)
Title: Insulation Structure at Corner of Liauefied Natural Gas Storage Tank
Inventor: PARK KWANG JUN
IPC: F17C3/02
Filed: 2019-01-23
Abstract: The present invention provides a structure for insulating a corner part of a liquefied natural gas storage tank, wherein the liquefied natural gas storage tank includes a chamfer part formed to be inclined between upper and lower walls and a side wall. The liquefied natural gas storage tank includes: sealing walls made of a metal membrane; and a composite beam installed along the chamfer part and onto which edges of the sealing walls installed on the upper and lower walls and the side wall of the storage tank are fixed and supported, wherein the composite beam includes: a plywood member; an invar corner which comprises a metal plate made of an invar material cut at an angle formed by the chamfer part to be installed on an upper portion of the plywood member and to which the edges of the sealing walls are fixed by welding; and at least one stiffener attached to a lower surface of the invar corner to increase stiffness of the composite beam. Therefore, the structure for insulating a corner part of a liquefied natural gas storage tank has excellent insulation performance.
Patent KR-20200101500-A (KR)
Title: Smart order system based on determination of customer entry in store
Inventor: IM JAE WON
IPC: G06K9/00
Filed: 2019-01-29
Abstract: The present invention relates to a smart order system based on store entry determination. The present invention includes: a beacon device installed in each store and periodically sending a beacon signal including a unique address; a user terminal activating a smart order app on the background and measuring and transmitting the RSSI value of the beacon signal and a motion sensing value depending on time in a case where the beacon signal is received with the user terminal within the reach of the signal of the beacon device; and a management server determining whether a customer has entered the store by using a customer behavior pattern analyzed through the motion sensing value and the RSSI value of the beacon signal and determining whether to automatically execute the smart order app through the screen of the user terminal. The management server performs control such that the smart order app is not executed until it is determined that the customer has entered the store and the smart order app is automatically executed on the screen of the user terminal and a product order page of the store is displayed once the entry is determined. According to the present invention, it is possible to automatically execute on the screen the smart order app supporting product order in the store for the customer who has entered the store based on the motion sensing-based customer behavior pattern and the intensity of the beacon signal received at the user terminal. Accordingly, it is possible to provide more convenient and reliable smart order service linked to store entry.
Patent KR-20190099121-A (KR)
Title: Polarizing plate and image display device
Inventor: KENICHI FUKUDA
IPC: G02B5/30
Filed: 2019-01-30
Abstract: The present invention relates to a liquid crystal display device equipped with a general-purpose PET film which is used as a polarizing plate protection film. More specifically, provided is a polarizing plate capable of preventing a problem such as a diagonal rainbow stain and having proper visuality even when a surface film having a low-haze antiglare layer or clear hard coating layer is used on a visualization side in order to prevent white light shown on a black sign; and being manufactured at a low cost. Moreover, provided is a thin film polarizing plate suitable for making a liquid crystal display device thinner. As a solution, a polarizing plate is laminated by including a polarizing element (P), made by adsorbing and orienting iodine on a polyvinyl alcohol-based resin layer, and interposing an adhesive layer (AL1) with a light diffusion film layer (DF) into one side of the polarizing element (P). The light diffusion film layer (DF) uses a polyester resin-based oriented film as a base material, and includes a light diffusion layer (DL) beside the polarizing element (P). In the case of the light diffusion layer (DL), 1) an internal haze is 50-95%, and 2) arithmetic mean roughness Ra for a surface unevenness shape is 0-0.30 μm in accordance with JIS B0601.
Patent KR-20200098967-A (KR)
Title: Kingsize Quail Feed Compositions
Inventor: RYU BAE HYUN
IPC: A23K40/10
Filed: 2019-02-13
Abstract: The present invention relates to a quail feed composition including: 98.5 to 99.9 parts by weight of a basic feed composition; 0.01 to 0.05 parts by weight of garlic dry powder; and 0.05 to 0.15 parts by weight of a probiotic mixture. When feeding such a feed, quail eggs having a low cholesterol content can be produced while increasing the content of tocopherol and selenium.
Patent KR-20200102065-A (KR)
Title: System and method for providing target commercial service using customized commercial contents and feedback based realtime changing advertisment platform
Inventor: KIM MYUNG SIK
IPC: G09F23/10
Filed: 2019-02-21
Abstract: Provided is a target advertisement service providing system using a real-time advertisement changing platform based on customized advertisement content and feedback. The system includes: a pharmacy terminal receiving prescription data, transmitting at least one piece of patient data included in the prescription data, and receiving target advertisement content selected in real time based on the at least one piece of patient data to print the target advertisement content on a preset area of the front or rear side of medicine packets; a target advertisement service providing server including an extraction part extracting age and gender from the at least one piece of patient data transmitted from the pharmacy terminal, an advertisement part extracting at least one piece of pre-stored advertisement content based on the at least one piece of patient data and region, day, time and demographic parameters into which the prescription data is inputted, and a transmission part transmitting the at least one piece of advertisement content to the pharmacy terminal as target advertisement content; and at least one advertisement server transmitting the advertisement content and target data in which the advertisement data is going to be exposed to the target advertisement service providing server, and changing the advertisement content and the target data in real time when receiving feedback data about the target advertisement content. Therefore, the system is capable of providing more accurate advertisement data to advertisers.
Patent KR-20200102256-A (KR)
Title: Electronic device including logic circuit for determining connecting state of connector
Inventor: KIM SEUNGHUN
IPC: H04M1/725
Filed: 2019-02-21
Abstract: According to various embodiments of the present invention, an electronic device including a logic circuit for determining a connection state of a connector comprises: a housing; a battery disposed in the housing; a first printed circuit board (PCB) disposed in the housing; a second PCB disposed in the housing and spaced apart from the first PCB; and an electric path electrically connecting a first connector and a second connector. The first PCB comprises: the first connector including a first pin and a second pin; a power management circuit electrically connected to the battery; a load switch including a first input terminal electrically connected to the power management circuit, a first output terminal electrically connected to the first connector, and an enable input terminal; a first pull-up resistor including a first terminal electrically connected to the battery and a second terminal electrically connected to the first pin; a second pull-up resistor including a third terminal electrically connected to the power management circuit and a fourth terminal electrically connected to the second pin; and a logic circuit including a second input terminal electrically connected to the second terminal, a third input terminal electrically connected to the fourth terminal, and a second output terminal electrically connected to the enable input terminal. The second PCB comprises: a second connector including a third pin and a fourth pin; and a ground layer electrically connecting the third pin and the fourth pin. Accordingly, the electronic device removes a risk element occurring by contact between a power pin and adjacent pins, thereby preventing damage to an electronic part. Other various embodiments are possible.
Patent KR-20190105504-A (KR)
Title: Method for relocating devices
Inventor: KOYANAGI TASUKU
IPC: H01L21/78
Filed: 2019-02-26
Abstract: The present invention is to provide a device transferring method capable of efficiently transferring a device from a wafer to a mounting substrate. The device transferring method for transferring a plurality of devices to a mounting substrate provided with a plurality of electrodes comprises the steps of: adhering an expandable tape to the plurality of devices formed on a surface side of a substrate through a buffer layer; applying a laser beam to the buffer layer from a back surface side of the substrate so as to break the buffer layer, wherein the laser beam has permeability with respect to the substrate and absorbency with respect to the buffer layer; moving the tape in the direction for spacing away from the substrate to separate the substrate and the plurality of devices from each other, thereby transferring the plurality of devices formed on the substrate to the tape; expanding the tape so that the layout of the plurality of devices adhered to the tape corresponds to the layout of the plurality of electrodes; and bonding the plurality of devices adhered to the expanded tape to the plurality of electrodes at once.
Patent KR-20200106759-A (KR)
Title: moxibustion device
Inventor: GO HYUN JOO
IPC: A61H39/06
Filed: 2019-03-05
Abstract: The present invention relates to a moxibustion device, comprising: a body (100) which forms a hollow tube shape and surrounds a moxibustion area; and at least one protrusion (200) which protrudes from an end of the body (100) and is formed to have a sharp tip to poke the skin around the moxibustion area. Therefore, the body wraps around a combusting moxibustion to limit an amount of oxygen supplied to the moxibustion, and thus the combustion is done slowly to reduce the feeling of heat. Also, the projection provides stimulation around a moxibustion area so as to disperse pain.
Patent KR-20190106758-A (KR)
Title: flexible endoscope lens cleanliness maintenance device capable of maintaining cleanliness of an endoscope lens through vortex supply of a cleaning agent
Inventor: LEE JANG WOO
IPC: A61B1/12
Filed: 2019-03-06
Abstract: The present invention relates to a flexible endoscope lens cleanliness maintenance device comprising: a housing to which a cleaning agent is supplied from the outside; a bushing unit extended to one side of the housing with a predetermined length, allowing an endoscope to be slidably inserted therein, and having a moving path through which the cleaning agent inflowing from the housing can flow; and a vortex generation unit having one end unit thereof connected to a front end of the bushing unit and provided in an obliquely inclined form on an inner side surface to form a vortex in the cleaning agent inflowing from the moving path so as to have a ramp for discharging the cleaning agent to the other end thereof.
Patent KR-20190028678-A (KR)
Inventor: SASAKI TOSHINARI
IPC: H01L29/45
Filed: 2019-03-08
Abstract: The object of the present invention is to provide a highly reliable semiconductor device including a thin film transistor having stable electric characteristics. In addition, another object is to manufacture a highly reliable semiconductor device at low costs with high productivity. In a manufacturing method of a semiconductor device including a thin film transistor using an oxide semiconductor layer as a channel formation region, the oxide semiconductor layer is heated under a nitrogen atmosphere to lower resistance, thereby forming a low-resistance oxide semiconductor layer. Further, resistance of a region of the low-resistance oxide semiconductor layer, which is overlapped with a gate electrode layer, is selectively increased, thereby forming a high-resistance oxide semiconductor layer. Resistance of the oxide semiconductor layer is increased by forming a silicon oxide film in contact with the oxide semiconductor layer by a sputtering method.
Patent KR-20200108613-A (KR)
Title: Video signal encoding method and apparatus and video decoding method and apparatus
Inventor: LEE BAE KEUN
IPC: H04N19/119
Filed: 2019-03-11
Abstract: The present invention provides a method and an apparatus for predictive encoding using tiles and sub-tiles. According to the present invention, a video signal processing method and an apparatus may improve the efficiency of video signal coding through an affine inter prediction coding.
Patent KR-20200110953-A (KR)
Inventor: SUNG HYUK KIM
IPC: H01R13/58
Filed: 2019-03-18
Abstract: The present invention relates to a receptacle terminal which prevents deformation of a coupling portion even when a tab terminal is inserted slightly out of position or an external force is applied using a rework tool. The receptacle terminal includes the coupling portion into which the tab terminal is inserted and a barrel portion to which a wire is connected. The coupling portion is bent in a box shape so that both ends of the coupling portion are in close contact with each other and a coupling piece and a coupling groove are formed at both ends of the coupling portion, respectively. At this time, the coupling piece is inserted into the coupling groove when the coupling portion is bent so that both ends of the coupling portion in close contact are prevented from being opened by the external force.
Patent KR-20200113805-A (KR)
Title: Height and angle adjustable reading book
Inventor: KWON SEONG TAE
IPC: A47B23/04
Filed: 2019-03-26
Abstract: The present invention relates to a bookstand capable of height and angle adjustment and, more specifically, to a bookstand capable of adjustment to a height desired by a user and angle adjustment at the same time. To this end, the bookstand capable of height and angle adjustment comprises: a bottom member having a prescribed thickness, and having a shape of which a set portion of the upper surface is cut in a prescribed depth; a first fixing member to move from one side to the other side and from the other side to the first side in the cut shape of the bottom member; a first auxiliary support member wherein the other side thereof is hinge-coupled to the other side of the first fixing member, and one side thereof is hinge-coupled at a point separated from one side of a support member by a prescribed distance; a support member wherein one side thereof is hinge-coupled to the other side of the bottom member, and the other side thereof is hinge-coupled to one side of a book support plate; a second auxiliary support member of which the other side is hinge-coupled at a point separated from the other side of the support member by a prescribed distance; a book support plate having a prescribed thickness, and having a shape of which a set portion of the lower surface is cut in a prescribed depth; and a second fixing member to move from one side to the other side and from the other side to the one side in the cut shape of the book support plate, wherein one side thereof is hinge-coupled to one side of the second auxiliary support member.
Patent KR-20190116088-A (KR)
Title: Cleaning method
Inventor: MITSUMORI AKIYOSHI
IPC: H01L21/02
Filed: 2019-04-02
Abstract: According to an aspect, a cleaning method is a cleaning method for a loading table of a plasma processing apparatus and includes a step of removing a reaction product formed on the loading table. The step of removing the reaction product includes a step of loading a dummy wafer on the loading table, a step of increasing the temperature of the loading table, and a step of removing the reaction product after increasing the temperature of the loading table. In the step of increasing the temperature of the loading table, the temperature of the loading table is increased by opening an expansion valve between an output terminal of a condenser and an input terminal of a heat exchange unit, wherein the condenser condenses a refrigerant discharged from the heat exchange unit and compressed and supplies the refrigerant to the heat exchange unit, inputting heat to the loading table, opening a flow dividing valve between an output terminal of a compressor and the input terminal of the heat exchange unit, wherein the compressor compresses the refrigerant discharged from the heat exchange unit and supplies the refrigerant to the condenser, and adjusting an opening degree of the flow dividing valve.