Patent SG-11201805171Y-A (SG)
Title: Hollow cathode ion source and method of extracting and accelerating ions
Inventor: CHAMBERS JOHN
IPC: H01J37/063
Filed: 2016-11-08
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -, Organization 111111110111101110101011111010111110111010111111101111111001111101111011111 International Bureau ... .... ..Yjd ..... ...,/ (10) International Publication Number (43) International Publication Date WO 2017/105673 Al 22 June 2017 (22.06.2017) WI PO I PCT (51) International Patent Classification: (72) Inventors: CHAMBERS, John; c/o AGC Glass Company C23C 16/513 (2006.01) H05H 1/02 (2006.01) North America, Petaluma R&D, 1311 Clegg Street, Suite C23C 4/134 (2016.01) H05H 1/24 (2006.01) B, Petaluma, California 94954 (US). MASCHWITZ, HO1J 37/063 (2006.01) HO5H 1/54 (2006.01) Peter; 6601 Hutchins Avenue, Sebastopol, California 95472 (US). (21) International Application Number: PCT/US2016/060979 (74) Agent: ZOLTICK, Martin M.; 607 14th Street, N.W., Suite 800, Washington, District of Columbia 20005 (US). (22) International Filing Date: 8 November 2016 (08.11.2016) (81) Designated States (unless otherwise indicated, for every (25) Filing Language: English kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, (26) Publication Language: English BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, (30) Priority Data: HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, 14/975,286 18 December 2015 (18.12.2015) US KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 14/975,415 18 December 2015 (18.12.2015) US MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, (71) Applicants: AGC FLAT GLASS NORTH AMERICA, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, INC. [US/US]; 11175 Cicero Drive, Suite 400, Alpharetta, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, Georgia 30022 (US). ASAHI GLASS CO., LTD. [JP/JP]; TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, Shin-Marunouchi Building, 1-5-1 Marunouchi, Chiyo- ZW. da-ku, Tokyo, 100-8405 (JP). AGC GLASS EUROPE (84) Designated States (unless otherwise indicated, for every — S.A. [BE/BE]; Technovation Centre, Rue Louis Bleriot, kind of regional protection available): ARIPO (BW, GH, 12, 6041 Gosselies (BE). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, [Continued on next page] = = (54) Title: HOLLOW CATHODE ION SOURCE AND METHOD OF EXTRACTING AND ACCELERATING IONS (57) : An ion source and a method of extracting and 200A accelerating ions are provided. The ion source includes a chamber. The ion source further includes a first hollow cath- = 210 \-- k ode having a first hollow cathode cavity and a first plasma .--. exit orifice and a second hollow cathode having a second hol- _ — 202 204 low cathode cavity and a second plasma exit orifice. The first and second hollow cathodes are disposed adjacently in the chamber. The ion source further includes a first ion accelerat- - = 220 1 220 or between and in communication with the first plasma exit orifice and the chamber. The first ion accelerator forms a first ion acceleration cavity. The ion source further includes a ion between in second accelerator and communication with _ = — ( -I- 110A 112 11 4 114 h ' \ ,v _.-- ‘ U . 110A 112 1 ----, the second plasma orifice and the chamber. The second ion accelerator forms a second ion acceleration cavity. The first hollow cathode and the second hollow cathode are configured to alternatively function as electrode and counterelectrode to generate a plasma. — = I I 212 212 Il AC power supply 116—'\"-- M IN ,tD ir) © FIG. 2A ,-1 IN ,-1 © N O WO 2017/105673 Al MIDEDIMOHNIIMMEOMMIIMEREIMMOVOIMIE TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, Published: TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, DE, LT, SE, GA, with international search 21(3)) report (Art. GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).