Patent CA-3091869-C (CA)
Title: Apparatus and method for molecular beam epitaxy
Inventor: NAJAFI-YAZDI ALIREZA
IPC: C30B23/08
Filed: 2019-02-21
Granted: 2021-04-20
Abstract: CA 03091869 2020-08-20 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 1 11111 1111111 11 111111 111 11111 11111111 1 1 111 1111 1111 111 1111111111 1111 11111111111 111 1111 Organization International Bureau (10) International Publication Number (43) International Publication Date WO 2019/161498 Al 29 August 2019 (29.08.2019) WIPO I PCT (51) International Patent Classification: DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, C30B 23/08 (2006.01) HR, HU, ED, EL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, (21) International Application Number: MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, PCT/CA2019/050212 OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (22) International Filing Date: SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, 21 February 2019 (21.02.2019) TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (25) Filing Language: English (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (26) Publication Language: English GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, (30) Priority Data: UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, 62/633,549 21 February 2018 (21.02.2018) US TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, EE, IS, IT, LT, LU, LV, (71) Applicant: ANYON SYSTEMS INC. [CA/CA]; 1985, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, 55th Avenue Unit 100, Dorval, Québec H9P 1G9 (CA). TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, (72) Inventors: NAJAFI-YAZDI, Alireza; 139 rue Bach, KM, ML, MR, NE, SN, TD, TG). Vaudreuil-Dorion, Québec J7V 0M7 (CA). GEORGES, William; 170 rue du Monarque, La Prairie, Québec J5R 0P2 Published: (CA). ¨ with international search report (Art. 21(3)) (74) Agent: NORTON ROSE FULBRIGHT CANADA LLP S.E.N.C.R.L., S.R.L.; Suite 2500, 1 Place Ville-Marie, Montréal, Québec H3B 1R1 (CA). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (54) Title: APPARATUS AND METHOD FOR MOLECULAR BEAM EPITAXY (57) Abstract: An apparatus and method for molecular beam epitaxy are described herein. The apparatus comprises an enclosure defining 1 A a vacuum chamber. A substrate holder is mounted within the vacuum chamber. At least one molecular beam source is in fluid communication 210 ¨22 with the vacuum chamber. A cooling shroud having at least one surface 224 is mounted within the vacuum chamber spaced from the substrate hold-. 213 = 211 209 er. A cryocooler having at least a portion extending into the vacuum 208 - - chamber is operatively coupled to the cooling shroud for extracting heat 209--= ----214 therefrom, and cooling the at least one surface of the cooling shroud to L cryogenic temperatures. B 204 L1 Pr¨ 1¨ \ --. 2088 ---" 208 222 --205 02 202 208b 07 208 010 Nre 207 6/0 ri\= 203 FIGURE 2