Patent SG-11201900804W-A (SG)
Title: System and method for generating multi-channel tunable illumination from a broadband source
Inventor: HILL ANDY (ANDREW)
IPC: G02B27/28
Filed: 2017-08-09
Abstract: FIGA 1_1() INTENSITY MODULATOR 114 CONTROLLER 110 INTENSITY MODULATOR 112 TUNABLE FILTER 7 -108 ..k .--116 118 101- 119 106 120-1 02 1 2 TUNABLE FILTER / ,-108 116 (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 22 February 2018 (22.02.2018) WIP0 I PCT ~~ll~~~~~~~~ 011101110VIIIOH olo oui oum Imo En ow (10) International Publication Number WO 2018/034908 Al (51) International Patent Classification: GO1N 21/31 (2006.01) GO2B 27/28 (2006.01) (21) International Application Number: PCT/US2017/046084 (22) International Filing Date: 09 August 2017 (09.08.2017) (25) Filing Language: English (26) Publication Language: English (30) Priority Data: 62/375,996 17 August 2016 (17.08.2016) US 15/387,180 21 December 2016 (21.12.2016) US (71) Applicant: KLA-TENCOR CORPORATION [US/US]; Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (72) Inventors: HILL, Andy (Andrew); 2112 Los Angeles Av- enue, Berkeley, California 94707 (US). MANASSEN, Am- non; 10 Golda Meir, 34892 Haifa (IL). BACHAR, Ohad; 29 He'elah Street, 36576 Timrat (IL). (74) Agent: MCANDREWS, Kevin et al.; KLA-Tencor Corp., Legal Department, One Technology Drive, Milpitas, Cali- fornia 95035 (US). (81) Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JO, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, — (54) Title: SYSTEM AND METHOD FOR GENERATING MULTI-CHANNEL TUNABLE ILLUMINATION FROM A BROAD- BAND SOURCE 100 (57) : A metrology system includes an illumination source to generate an illumination beam, a multi-channel spectral filter, a focusing element to direct illumination from the single optical column to a sample, and at least one detector to capture the illumination collected from the sample. The multi-channel spectral filter includes two or more filtering channels having two or more channel beam paths. The two or more filtering channels filter illumination propagating along the two or more channel beam paths based on two or more spectral transmissivity distributions. The multi-channel spectral filter further includes a channel selector to direct at least a portion of the illumination beam into at least one selected filtering channel to filter the illumination beam. The multi-channel spectral filter further includes at least one beam combiner to combine illumination from the two or more filtering channels to a single optical column. [Continued on next page] WO 2018/034908 Al MIDEDIMOMOIDEIREEMOOMMONEDIIMIDEVOIMIE GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Published: — with international search report (Art. 21(3))