baber/WOPTO huggingface dataset:
Patent KR-20010073666-A (KR)
Title: Method of svc message generation and parameters management in svc proxy function for interworking between frame relay svc and pvc
Inventor: KIM JEONG SIK
IPC: H04L12/50
Filed: 2000-01-19
Abstract: PURPOSE: A method for generating a message in an SVC(Switched Virtual Channel) proxy for the interworking of PVC(Permanent Virtual Channel) and the SVC, and a method for managing message parameter information, are provided to implement a management table for mutually mapping related information for the interworking of a PVC function and an SVC function. CONSTITUTION: The first management table is configured, for managing a PVC(Permanent Virtual Channel) state and information related to a subscriber managed by an SVC(Switched Virtual Channel) proxy by the unit of subscriber. The second management table is configured, for managing a call connection state and parameter information related to an SVC message managed by the proxy by the unit of call number. A message of PVC is received and analyzed in the SVC proxy, to change information of the corresponding subscriber of the first management table and process response according to the kind of the received message. A signaling message inputted from the SVC proxy is received, to store/change information loaded on the message and call state information in the second management table. A signaling message from the SVC proxy is generated and transmitted referring to the second management table, and a call state is managed in the second management table.
Patent KR-20010076597-A (KR)
Inventor: KO YEON PYO
IPC: A01G13/00
Filed: 2000-01-26
Abstract: PURPOSE: Disclosed is a protective cover of trees using small gravel to prevent various bad influence in accordance with disturbing breath by hardening surface of the earth with tread pressure of walker, to have excellent external appearance decorative character. CONSTITUTION: The protective cover of trees using small gravel comprises main body to be filled with small gravel which is mixed with epoxy based resin in the protective cover frame of tree having drainage hole; imitation stone prop frame(4) to regulate height in constructing.
Patent KR-20010078662-A (KR)
Title: A nail clippers which has multi-shaped sections
Inventor: YOU DONG KYOUN
IPC: A45D29/02
Filed: 2000-02-09
Abstract: PURPOSE: Nail clippers are provided, which have a plurality of cutters having various shapes of cutting blades to allow the cutters to be selected and used according to the shape of fingernail or toenail. CONSTITUTION: The nail clippers comprises an upper elastic board(20), a lower elastic board(30), and a pushing board(10) which is combined to the head part of the two elastic boards(20, 30) by a fixing pin(40), wherein a ring(91) which is put into the fixing pin(40), is provided with at least two cutters with the different shape, and the cutters are combined to the head part between the two elastic boards(20, 30) and can be rotated for allowing them to be used selectively. Preferably the cutters comprises the first cutter(60) having a concave cutting blade(64a); the second cutter(70) having a straight cutting blade(64b); and optionally the third cutter having a cutting blade whose terminal part is narrow.
Patent KR-20010081665-A (KR)
Title: Oilless linear actuator
Inventor: KIM SEONG TAE
IPC: F15B5/00
Filed: 2000-02-17
Abstract: PURPOSE: A non-lubrication linear actuator is provided to improve reliability by making easy the processing and assembling of a piston and a drive shaft and by maintaining concentricity and linearity. CONSTITUTION: A non-lubrication linear actuator comprises a casing(11) having a linear cylinder(C), a linear drive motor(12) installed in the casing, a drive shaft(13) combined to the drive motor to linearly reciprocated with a mover, a piston(14) connected to the drive shaft to linearly reciprocate with the drive shaft in the cylinder, and upper and lower leaf springs(16) respectively combined to the upper and lower ends of the drive shaft. By precisely processing an upper flange(13A) of the drive shaft, the lower end face of the piston, and the outer face of the piston, the concentricity of the piston is maintained. Therefore, processing and assembling of respective members are easy. By interposing the upper leaf spring between the drive shaft and the piston and fastening the upper leaf spring, the upper leaf spring is firmly assembled with the drive shaft. Further, the reliability of an actuator is improved.
Patent KR-20010084656-A (KR)
Title: Method for using cis having different qualities in common in a scanner
Inventor: LEE MYEONG SEOK
IPC: H04N1/028
Filed: 2000-02-28
Abstract: PURPOSE: A method is provided to common use contact image sensors having different features in a scanner. CONSTITUTION: When a scanning operation is requested, a controller controls a CIS to perform a shading operation(200). The controller test a dummy bit output among output signals of the CIS and discriminates a type of the CIS(202). When an output of a special bit is a logic "high", the controller stores a shading ProFile shaded in step 200 in a memory(204), the controller performs a shading compensation and a gamma compensation(206) using a software table of an A type CIS. When an output of a special bit is a logic "low" in step 202, the controller stores a shading ProFile shaded in step 200 in a memory(208), the controller performs a shading compensation and a gamma compensation using a software table of a B type CIS(210).
Patent KR-20010084808-A (KR)
Title: An equipment for remaking used aggregates and a paving method for pervious concrete with the remade aggregates
Inventor: HWANG IK HYUN
IPC: B07B1/00
Filed: 2000-02-29
Abstract: PURPOSE: An apparatus for recycling aggregate of waste concrete is provided which can manufacture homogeneous aggregate by completely crushing foreign materials such as tender aggregate, aged mortar, bricks and blocks mixed in the crushed recycled aggregate so that they can be separated and removed, and a method is provided which packages permeable concrete using recycled aggregate produced by the apparatus for recycling aggregate. CONSTITUTION: The apparatus for recycling aggregate of waste concrete comprises a high frequency vibrator (20) to one side surface of which a high frequency motor is mounted, wherein resisting protrusions (23) are projected from the upper surface of a wide and long vibration plate (21) and perpendicular to the length direction of the vibration plate (21); a body (10) on the inside of which there is a space for carrying the vibration plate of the high frequency vibrator (20), wherein a hopper (12) is formed on the upper part of one side of the vibration plate, and a discharging hole (13a) is formed at the end part of one side of the vibration plate; and a screen (15), a mesh network, which is installed on the inclined surface of the discharging hole (13a) of the body (10), and which is transferred as only small particles from recycled aggregate are being filtered by passing through the lower part of the screen.
Patent KR-20000030452-A (KR)
Inventor: JEONG SEOK CHAN
IPC: H04N1/42
Filed: 2000-03-02
Abstract: PURPOSE: An apparatus and method for transmitting attached information for the use with a fax machine are provided to attach advertising information with fax information by compressing the fax information from the fax machine or a personal computer and then prepare a blank space where the attached information is inserted. CONSTITUTION: An information data base(32) is comprised of data, designating information contents, and reference codes related to the data. An information extractor(34) extracts the data having a desired condition from the information data base(32). An information editor(36) prepares the blank space by compressing the original fax information inputted and inserts the information extracted from the information extractor(34) into the blank space and then outputs modified fax information. A control unit(40) controls each operation of the information data base(32), information extractor(34) and information editor(36).
Patent KR-20000030470-A (KR)
Inventor: CHOI NAM IL
IPC: F16H3/44
Filed: 2000-03-02
Abstract: PURPOSE: A continuously variable transmission is provided to improve the efficiency as well as to smoothly shift a gear without generating a shift shock. CONSTITUTION: A continuously variable transmission is made up of: a differential gear(3) installed on an input axis(2) directly accepting power from an engine; a reduction gear(4); an air controller(5) mounted to control the flow amount of air to increase or decrease the rotation number of the gear and to variably shifting the gear with the opposite output gear. Therefore, the continuously variable transmission reduces fuel consumption by continuously shifting the gear as well as controlling the flow amount of air without shifting with other gears.
Patent KR-20010089914-A (KR)
Title: Uncontractible and high strength loess mortar radiating far infrared rays
Inventor: BAE WON TAE
IPC: C04B14/10
Filed: 2000-03-13
Abstract: PURPOSE: A yellow soil mortar is provided, which is environment-friendly, good to human and has high compression strength, so it is used as construction basic material. CONSTITUTION: The yellow soil mortar is comprised of: dried yellow soil 28-38%, calcium aluminate bulking solidification agent 7-13%, plaster 5-9%, and aggregate 50%. The calcium aluminate bulking solidification agent and plaster produce ettringite, and therefor compression strength is improved and swelling is possible without contraction.
Patent KR-20010014625-A (KR)
Inventor: FUNAYA KAZUHIRO
IPC: A44B19/42
Filed: 2000-03-24
Abstract: PURPOSE: To provide a device for assembling a pull tab for a slider which has a simple structure, enables the pull tab to be incorporated into a slider body accurately, securely, and moreover acceleratively. CONSTITUTION: A device for assembling a pull tab for automatically assembling the pull tab 3 into a slider body 2 of a slide fastener comprises rectangular notch parts 32a' as slider carrying means, for mounting and receiving the slider body 2 at intervals of dispositions of a plurality of assembling parts along an upper end edge, and a slider body carrying board 32 operated by following a rectangular track in a vertical surface in a slider carrying route 30a. Then, an upper limit operation position of the upper end of the rectangular notch parts 32a' is set at an upper position of a slider body mounting surface of the slider carrying route 30a, and a lower limit operation position of the upper end of the notch parts 32a' is set at a lower refuge position of the slider body mounting surface.
Patent KR-20010095387-A (KR)
Title: Defect managing method for a rewritable optical disc
Inventor: CHOI GWANG SU
IPC: G11B7/28
Filed: 2000-03-30
Abstract: PURPOSE: A method for managing defects of a rewritable optical disc is provided to improve utility of a rewritable optical disc by managing efficiently defects of the rewritable optical disc. CONSTITUTION: A total zone is used as a data area without dividing a user area into the data area and a spare area. In the case of a recording method of sector units, the sector is replaced from the last part of a corresponding zone of the sector 1 when the sector 1 is a defect sector. Namely, data of the sector 1 are recorded in the last part of the corresponding zone. An address of the corresponding defect sector and an address of the replaced last sector are recorded in the second defect list. The data of the defect sector are recorded in the last sector of the next zone of the corresponding zone when the spare area of the corresponding zone is insufficient in the replacement recording process.
Patent KR-20010095701-A (KR)
Title: method for Karaoke service using internet
Inventor: JU YEON SIK
IPC: G06F17/00
Filed: 2000-04-11
Abstract: PURPOSE: A karaoke service method using the Internet is provided to offer a karaoke service and function of a member without an extra order by converting karaoke music data corresponding to the taste and function of the member through a membership system and providing it to the member. CONSTITUTION: A user(100) is comprised of a receive unit(120) for receiving data related to titles, a background image, a music, and personal specificity information, a synchronization unit(130) for timely synchronizing among the data related to the titles, the background image, and the music received through the receive unit(120), a replay information control unit(140) for reflecting the personal specificity information received through the receive unit(120) to a replay of a music data, a replay unit(150) for replaying the synchronized data outputted from the synchronization unit(130) by using a replay program, an image output unit(160) for outputting an image signal among the signals replayed from the replay unit(150), a voice output unit(170) for outputting a voice signal among the signals replayed from the replay unit(150), and a control unit(110) managing and controlling the whole system. A service provider(200) is comprised of personal specificity information stored in a member DB(database)(220) in order to response a request of a user, a sending unit(240) for transferring karaoke data stored in a store unit(230) to the user, the store unit(230) for storing a plurality of data related to the titles, the background image, and the music, the member DB(220) for storing general register information of the member and the personal specificity information for the karaoke service, and a control unit(210) managing and controlling the whole system.
Patent KR-20010097733-A (KR)
Title: 선물용 캔 포장 박스
Inventor: KIM MAN SEONG
IPC: B65D5/00
Filed: 2000-04-25
Abstract: 본 발명은 캔을 옆으로 뉘어서 포장 보관하게 되는 종이재질의 선물용 캔 포장박스에 관한 것으로서 이와 같은 기존의 박스는 주로 박스의 내부에 캔을 다단계층으로 뉘어서 포장 보관하게 되며 따라서 캔의 옆 둘레 면이 박스의 내부 측면에 꽉 밀착되게되어 손가락을 집어넣을 공간이 없게 되므로 캔의 인출개시마다 매우 불편함을 겪게 되는 바, 
     이에 본 발명은 소정의 접지선을 따라 접혀 양측에 세로의 캔 받침부를 갖는 종이 재질의 지지편을 박스의 내부 일측면부에 설치 형성하여 박스의 내부에 캔을 옆으로 뉘어서 포장 보관시 캔의 양측부가 지지편의 캔 받침부에 받쳐짐과 동시에 양측 캔 받침부 사이에 손가락을 집어넣을 수 있는 세로의 캔 인출 공간부가 형성되도록 하므로서 캔의 인출개시 과정에 있어 편리함을 갖도록 한 것이다.
Patent KR-20000077173-A (KR)
Title: 자이로스코프 및 이를 사용한 입력장치
IPC: G01C19/56
Filed: 2000-05-06
Abstract: 디바이스의 소형화, 검출감도의 향상, 구동전압의 저감 등을 꾀할 수 있는 자이로스코프를 제공하는 것을 과제로 한다. 
     상기 과제를 해결하기 위하여, 본 발명의 자이로스코프 (1) 는, 도전성재료로 이루어지는 복수의 다리 (7) 와 지지부 (8) 을 갖는 음차 (2) 와, 음차 (2) 를 끼워두는 상측 유리기판 (5), 하측 유리기판 (6) 과, 각 다리 (7) 와 서로 용량결합되어 복수의 다리 (7) 를 구동하는 복수의 구동용 전극 (3) 과, 각 다리 (7) 가 신장하고 있는 방향의 선단면 (7a) 과 대향하도록 각 다리 (7) 에 대응하여 형성된 1 개씩의 검출용 전극 (4) 을 갖고 있다.
Patent KR-20010103209-A (KR)
Title: 인터넷 전자 상거래에서 이웃돕기를 위해 공동모금회 또는사회복지단체에 기부금의 기탁을 위한 꽃(꽃바구니,꽃다발, 동서양란, 관엽, 화환, 분제 등과 함께 배달하는선물용품) 판매 방법
Inventor: HWANG HYO YOUNG
Filed: 2000-05-06
Abstract: 본 발명은 인터넷 전자 상거래에서 이웃돕기를 위해 공동모금회 또는 사회복지단체에 기부금의 기탁을 위한 꽃(꽃바구니, 꽃다발, 동서양란, 관엽, 화환, 분제 등과 함께 배달하는 선물용품) 판매 방법에 관한 것으로 구매자가 인터넷을 통해 전자상거래용 서버를 접속하여 상품(꽃)을 구매하고자 할 때, 판매자는 구매자의 요구유무에 관계없이 판매자의 이익에서 판매가의 일정 비율(3∼50%)을 구매자의 이름으로 이웃돕기 공동모금 기부금으로 기탁하는 전자 상거래 방법에 관한 것이다.
Patent KR-20010103960-A (KR)
Inventor: KIM SUN JA
Filed: 2000-05-12
Abstract: 본 발명은 돌산갓김치볶음의 제조방법에 대한 것으로, 좀 더 구체적으로는 돌산갓김치를 볶음의 형태로 이용해 돌산갓 특유의 쓴맛을 줄이고, 김치로 제조시 나오는 강한 매운맛을 줄이며, 장기보존이 가능하게 만들고, 볶음의 형태로 더 훌륭한 풍미가 나도록 만들어 돌산갓김치의 세계화와 대중화를 이룰 수 있도록 하는 돌산갓김치볶음 제조방법에 관한 것이다. 
     이는 산도 PH 4.7의 상태로 익은 돌산갓김치 71.5중량부를 10℃물에 3시간 정도 담구어 놓고 이후 물에 2회 헹구어 30분간 탈수 시키며, 대파 3중량부를 깨끗이 씻은 후에 2cm간격으로 썰어 놓고, 양파 3중량부와 마늘 1.5중량부와 생강 0.5중량부를 다져 놓은 후, 탈수시킨 돌산갓김치를 상기 대파 썬 것과 양파, 마늘, 생강을 다진 재료와 새우젖 1중량부, 참기름 2중량부, 설탕 1중량부를 넣고 양념이 배도록 무치며, 대두유 5중량부를 넓은 그릇에 넣고 100℃로 달구어지면 상기 준비한 것들은 넣고 저어가면서 10분간 볶아서 돌산갓김치볶음을 제조함으로서 이룰 수 있는 발명이다.
Patent KR-20010105740-A (KR)
Title: Structure for protecting leak of water for wiper motor
Inventor: KIM IL SU
IPC: B60S1/08
Filed: 2000-05-17
Abstract: The present invention comprises methods and compositions for a human with ovarian cancer. More specifically, the method comprises administration of a taxane composition over a 96 hour infusion schedule. Importantly, the method of administration allows for reduction of side effects and reduces the chances of multidrug resistance to taxanes.
Patent KR-20010106702-A (KR)
Inventor: SUN YOUNG MIN
IPC: B31B39/00
Filed: 2000-05-23
Abstract: 본 발명은 내용물이 담겨질수 있도록 하기 위해 일체형의 두겹으로 직조된 마대원단의 양면에 한번의 공정으로 종이원단을 견고하게 접착시켜 줄수 있도록 함과 아울러, 종이원단이 접착된 양면에 미세한 통공을 형성시켜 주므로서 내부와의 원활한 통기성에 의해 보관및 유통과장에서 내부에 담겨져 있는 내용물에 변질이 이루어지지 않도록 한 포대의 제조방법및 그 장치에 관한 것으로, 이는 폴리프로필렌(P.P)을 재질로 하여 두겹으로 직조된 상태에서 롤에 감겨진 마대원단부(100)으로 부터 풀려나오는 마대원단(110) 일면(상면)에 종이원단부(210)로 부터 풀려 나오는 종이원단(211)을 접착시켜 주는 1차접착수단(200)과; 상기 1차접착수단을 거친 피가공원단의 방향으로 180°로 전환시켜 주는 방향전환수단(300)과; 상기 방향전환수단을 거치면서 피가공원단의 상면에 별도의 종이원단(411)을 접착시켜 주는 2차접착수단(400)과; 상기 2차접착수단을 거친 피가공원단 상,하면에 각각 일정한 간격을 갖는 미세한 통공을 뚫어주는 펀칭수단(500)과; 상기 펀칭수단을 거친 가공원단을 롤상으로 감아주게 되는 권취수단(600)으로 갖추어진 것을 특징한다.
Patent KR-20010020883-A (KR)
Title: Oxidation processing unit
Inventor: HASEI MASAAKI
IPC: H01L21/00
Filed: 2000-05-23
Abstract: PURPOSE: An oxidizing apparatus is provided to reduce an ozone exhausted from a lamp house to a heat exhaust system. CONSTITUTION: This apparatus comprises a treatment container receiving a body to be treated, treated gas-supplying means (a gas-supplying pipe) for supplying the treatment gas containing ozone to the treatment container, and a lamp house(20) provided on the treatment container via a ultraviolet-ray transmitting window in which a ultraviolet-ray lamp is received, and the ozone in the treatment container is irradiated with the ultraviolet-rays from the ultraviolet-ray lamp to be decomposed so as to oxidize the body to be treated. An inlet port(22) and an exhaust port(23) for circulating cooling air are provided on the lamp house(20), and ozone decomposing means is provided in a thermal exhaust system(50) connected to the exhaust port(23).
Patent KR-20010108733-A (KR)
Title: 질화갈륨계 화합물 반도체의 무정형 및 다결정성 성장 방법
Filed: 2000-05-31
Abstract: GaN계 반도체의 무정형 및 다결정성 구조체는 구조식 In x Al y Ga (1-x-y) N(0≤(x,y)≤1.0000 및(x+y)≤1.0000)으로 나타낸 화합물 반도체 층의 표면에서 성장된다. 그 중에서도 특히, InAlGaN계 화합물 반도체의 표면에 성장된 InAlGaN계 화합물 반도체의 상이한 형태의 무정형 및 다결정성 구조체는 기능적으로 매우 중요할 수 있고, 상이한 화합물 반도체의 상이한 밴드-갭 디자인에 병용되거나 개별적으로 적용될 수 있다.
Patent KR-20010110010-A (KR)
Inventor: BAE SEONG HYEOK
Filed: 2000-06-05
Abstract: 이 발명은 인터넷을 통한 고객 맞춤형 광고 시스템 및 방법에 관한 것이다. 사용자가 인터넷에 접속하여 원하는 컨텐츠를 선택한다.  사용자의 신상정보와 광고선택 성향 정보를 파악하여 이에 적합한 광고를 사용자가 선택한 컨텐츠와 결합하여 제공한다.  사용자가 광고를 선택하여 광고가 노출되는 경향을 분석 및 관리한다.  이렇게 함으로써, 광고의 효과를 높이며, 광고 결과를 광고 계약 갱신 등에 이용할 수 있다.
Patent KR-20010111115-A (KR)
Inventor: YANG TAE JONG
Filed: 2000-06-07
Abstract: 본 발명은 편향코일 권선기에 관한 것으로, 암 원판부재(221)의 후면에 실린더(225)를 장착하고 이 실린더(225)의 로드는 암 원판부재(221)를 관통시키며 암 원판부재(221)의 전면에는 상기 로드의 운동에 연동하는 커터(226)를 설치하여 성형 완료한 편향코일을 커팅함으로써, 커팅 작업시 2차 핀홀의 발생이 방지되어 권형조건의 관리가 용이하여지며 작업성이 향상되는 이점이 있다.
Patent KR-20010112733-A (KR)
Title: A polypropylene resin composition having excellent flowability, stiffness, and size stability
Inventor: LEE YEONG JUN
IPC: C08L23/12
Filed: 2000-06-12
Abstract: A method for the production of a food acid includes the steps of combining fumaric acid with an organic acidic material in an aqueous medium to produce a mixture and drying the mixture to produce a food acid comprising a particulate material containing fumaric acid and the organic acidic material, the quantity of fumaric acid and the quantity of the organic acidic material being selected so that the fumaric acid makes up between about 5 % and 95 % of the particulate material.
Patent KR-20010112977-A (KR)
Title: CRT Grid pole and manufacturing method of it using a cold negative electrode
Inventor: LEE SEONG RYUL
IPC: H01J9/02
Filed: 2000-06-15
Abstract: A semiconductor device whose external electrodes do not crack, a method for manufacturing the same, circuit substrate, and an electronic device are disclosed. The semiconductor device comprises an insulating film (14) through which through holes (14a) are made, a semiconductor chip (12) having electrodes (13), a wiring pattern (18) attached to an area of one of the sides of the insulating film (14), including the portions over the through holes (14a), with adhesive (17) and electrically connected to the electrodes (13), and external electrodes (16) provided to the wiring pattern (18) through the through holes (14a) and projecting from the side opposite to the side where the wiring pattern (18) is provided, the applied adhesive (17) being partly drawn and interposed between the through holes (14a) and the external electrodes (16).
Patent KR-20010114043-A (KR)
Inventor: LEE CHANG HO
Filed: 2000-06-20
Abstract: 본 발명은 인터넷 온라인상에서 자동차 중개(경매 포함) 서비스를 제공하되, 텍스트 중심의 정보제공을 함으로써 그래픽 전송에 따른 시간 소요를 줄이고 이메일뿐만 아니라 무선문자전송서비스를 이용하여 신속히 중고 자동차의 정보를 입찰 희망자에게 제공함으로써 실시간 중개 서비스를 제공하기 위한 것이다. 사용자가 인터넷 온라인 접속을 하여 중개 사이트에 로그온하고 상기 사용자가 팔고자 하는 자동차(매물)의 정보를 텍스트 정보로써 입력하는 단계, 상기 중개 사이트는 상기 입력된 정보를 가공하여 입찰 참가자에게 전송하는 단계, 상기 입찰 희망자는 상기 수신된 정보에 따라 입찰의사에 따른 입찰내역을 상기 중개 사이트로 전송하는 단계, 상기 중개 사이트는 상기 입찰내역을 비교/분석하여 입찰결과를 입찰자와 매각자에게 통지하는 단계를 특징으로 구성하여 자동차 중개상이나 중고 자동차 매입을 희망하는 사람은 실시간 정보 제공을 받을 수 있고, 팔고자 하는 사람은 짧은 시간 내에 중고 자동차를 팔 수 있어 신속하고 정확한 거래가 성립될 수 있다.
Patent KR-20020002084-A (KR)
Title: Method of forming copper wiring in a semiconductor device
Inventor: KIM HEON DO
IPC: H01L21/768
Filed: 2000-06-29
Abstract: PURPOSE: A method for manufacturing a copper interconnection of a semiconductor device is provided to eliminate an additional heat treatment process for forming a fine structure of a copper layer, by using conventional equipment to form all kinds of copper layers and by forming the copper layer at a high temperature instead of an electrical chemical method. CONSTITUTION: An insulation layer(22) is formed on a semiconductor substrate(21) having a predetermined structure like a lower conductive layer, and is patterned to form a trench exposing the lower conductive layer of the semiconductor substrate by a dual damascene process. After a metal oxide layer remaining on the exposed lower conductive layer is removed, a diffusion barrier layer(23) is formed. After the first and second copper layers(24,25) are sequentially formed on the resultant structure, a heat treatment process is repeatedly performed to form a copper oxide layer on the second copper layer. The copper oxide layer is removed, and the third copper layer(27) is formed on the resultant structure. The third, second and first copper layers and a diffusion barrier layer are polished to form the copper interconnection by a chemical mechanical polishing process.
Patent KR-20020002625-A (KR)
Title: A machine for coating a organic film
Inventor: YOO TAE JUN
IPC: H01L21/312
Filed: 2000-06-30
Abstract: PURPOSE: An apparatus for applying an organic thin film is provided to form an application layer of a uniform thickness along the surface step of a wafer by decreasing the pressure of liquid source, and to prevent a critical dimension from being modified by a thickness difference of a photoresist layer by eliminating a variation of a reflection rate caused by a thickness difference of an anti-reflective coating(ARC). CONSTITUTION: A wafer(33) is fixed on a spin chuck(31) in a closed vacuum chamber(35). An absorption part(47) is in contact with a gas line(45). An exhaustion part(49) is in contact with the vacuum chamber. A groove(48) in the center part is in contact with a chemical line(41). A venturi tube(37) has the absorption part, the exhaustion part and the groove. The gas line is in contact with the absorption part. The chemical line is in contact with the groove. A mass flow controller(MFC)(43) controls the flow of the liquid source flowing through the chemical line.