baber/WOPTO huggingface dataset:
Patent KR-20030025476-A (KR)
Title: Real-Time I/O Simulator
Inventor: CHOI JONG UK
IPC: G06F13/00
Filed: 2001-09-21
Abstract: PURPOSE: A data input/output facsimile device is provided to verify a circuit related to an input/output of a computer processor and an input/output operation although an actual hardware corresponded to the input/output does not exist. CONSTITUTION: A PCI(Peripheral Component Interconnect) interface(1) is provided for connecting to a computer having a facsimile device. An EEPROM(Electronically Erasable Programmable Read-Only Memory)(2) limits an input/output address adapted to a computer processor(8). A look-up memory(3) stores each channel data with respect to an analogue and serial input/output of the computer processor(8). An EPLD(Electrically Programmable Logic Device)(5) controls operations of a FIFO(4), the look-up memory(3), and a dual-port memory(6), and connects the PCI interface(1). A FIFO(First-in First-out)(4) stores a used signal status whenever a read/write control signal with respect to an input/output is generated. The dual-port memory(6) stores data with respect to an input/output of a digital pattern. A MUX interface(7) is provided for connecting to the computer processor(8) necessary for a facsimile with respect to the input/output.
Patent KR-20030027414-A (KR)
Title: Rework method for removing plating layer on lead frame
Inventor: HAN JANG WON
IPC: H01L23/50
Filed: 2001-09-28
Abstract: PURPOSE: A method for eliminating a plating layer on a leadframe is provided to recycle the leadframe while using a conventional rework apparatus by eliminating a plating layer composed of a material like a tin-bismuth alloy whose critical point between over-etching and non-etching is difficult to determine. CONSTITUTION: A leadframe having the plating layer is dipped into chemical liquid including acid and additive(120). The leadframe from which the plating layer is removed is rinsed(130). The rinsed leadframe is dried(140). The leadframe is cleaned with ultrasonic(150). The leadframe is dried(160). The leadframe from which the plating layer is eliminated is inspected(170).
Patent KR-20030030548-A (KR)
Title: Implement to gather bone
Inventor: JUNG SEONG MIN
IPC: A61B17/16
Filed: 2001-10-11
Abstract: PURPOSE: Provided is a bone collector in which a grip is held like holding a pencil to locate a blade near patients' bone, compress and rake the bones so that it contributes to make ease of collecting the bones. CONSTITUTION: The bone collector comprises the parts of: the blade(1) which is inserted into the grip(2) and slid inwardly by 70-90deg; a semicircular projection(3) which is formed at front side of the grip; a bone passage hole(4) which is formed between the projection and the blade; a step(5) which is formed at upper side of a combination part between the blade and the grip; a partition wall(6) which is formed at both sides of the step; a storage(7) which collects the raked bones; a guide groove(9) which includes a locking projection(8) at outer side of the partition wall; a guide projection(10) which is matched to the guide groove; and a cover(12) which includes a locking groove(11) matched to the locking projection at the guide projection to be inserted into the guide groove for covering the blade and the storage.
Patent KR-20030032376-A (KR)
Title: Fuse connector of an automobile
Inventor: PARK MIN HA
IPC: H01R13/68
Filed: 2001-10-17
Abstract: PURPOSE: A fuze connector for an automobile is provided to be wired in a card, and mount a detachable fuze or a poly-switch thereon, thereby installing a plurality of fuze connectors regardless of narrow places. CONSTITUTION: A fuze connector(3) is wired between electric wires. A socket(5) is formed on electric wires(4) of one side. An insertion unit(6) is formed between an upper side of the socket(5) and an inner side thereof, to mount a detachable fuze(1) or a poly-switch thereon. A terminal is wired on the electric wires(4) inside of the socket(5), and is contacted with the fuze(1) or the poly-switch inserted from outside to flow a current. A plug(7) detachable from the socket(5) is formed on the other electric wires, and built in the fuze(1) or the poly-switch, then contacted with the electric wires(4') and other wired terminal to flow a current.
Patent KR-20020031302-A (KR)
Inventor: YOSHIMI KAZUYORI
IPC: C08F8/12
Filed: 2001-10-18
Abstract: PURPOSE: A method for producing an ethylene-vinyl acetate copolymer(EVA) is provided to achieve at least one of the following properties: (i) improved melt-extrusion stability, (ii) improved melt-moldability, (iii) reduced discoloration, and (iv) reduced gelation, in comparison with EVOH that is obtained by saponifying EVA produced in accordance with conventional methods. CONSTITUTION: The method for producing an ethylene-vinyl acetate copolymer comprises steps of adding a vinyl acetate-containing material, ethylene, a polymerization initiator, a polymerization solvent comprising an aliphatic alcohol having not more than four carbon atoms and a saturated acetic ester to a polymerization vessel and copolymerizing the vinyl acetate and the ethylene at a temperature of from 30 deg.C to 150 deg.C. The vinyl acetate-containing material introduced to the polymerization vessel has a content of acetaldehyde with respect to vinyl acetate preferably not more than 200 ppm and a content of saturated acetic ester with respect to vinyl acetate is 10 ppm to 1500 ppm.
Patent KR-20020032313-A (KR)
Inventor: KOTAKE NARIYOSHI
IPC: G02F1/1339
Filed: 2001-10-19
Abstract: PURPOSE: To provide a method for producing a liquid crystal cell by which a liquid crystal cell utilizing a high molecular dispersive liquid crystal can be produced without adding a step for curing a UV curable liquid crystal. CONSTITUTION: A UV curable sealant 11 and a high molecular dispersive liquid crystal containing a UV curable liquid crystal are disposed on the inner face of a first substrate 10. A second substrate 20 is stuck to the substrate 10 and the gap between the substrates is filled with the high molecular dispersive liquid crystal. The sealant 11 and the high molecular dispersive liquid crystal 12 are irradiated with UV through the stuck substrates 10, 20 to simultaneously cure the sealant 11 and the UV curable liquid crystal contained in the high molecular dispersive liquid crystal 12.
Patent KR-20020032376-A (KR)
Inventor: KOJIMA MASAKIYO
IPC: B60L50/16
Filed: 2001-10-25
Abstract: PURPOSE: To reduce the wasteful consumption of fuel or generation of exhaust gas until the connection of a power interrupting mechanism when starting an engine during traveling in an engine stopped state and connecting the power interrupting mechanism. CONSTITUTION: When a starting is requested to use the engine as a drive source during traveling in the engine stopped state (S1 is YES), the engine is cranked by a starter without supplying fuel to the engine in steps S2-S5, and the torque of the starter is controlled so that engine rotating speed Ne matches to an input shaft rotating state Nin that is a synchronous rotating speed. After the engagement of a clutch C2 is completed in Ne=Nin, in other words, after the engine is connected to drive wheels through the power interrupting mechanism, the fuel injection control to the engine is started in step S7 to make the engine perform the self-actuated rotation by explosion.
Patent KR-20030039045-A (KR)
Title: Massage transmission method for instant messanger
Inventor: JUNG JUN GU
Filed: 2001-11-09
Abstract: PURPOSE: A method for transmitting a message of an instant messenger is provided to transmit instant message even though the client is not logged-on the messenger program by transmitting a log-on guide message to a log-off client in real time. CONSTITUTION: A user registers a PC as an instant messenger client(SP1). The user judges the log-on state of a counter instant messenger client to transmit the message(SP2). If the counter instant messenger client is logged on, the message is transmitted. If not, the guide message requesting the log-on is transmitted to an instant messenger server(SP5). The instant messenger server transmits the guide message as an SMS to a cellular phone registered by the counter instant messenger client(SP6).
Patent KR-20030043282-A (KR)
Inventor: KIM PYEONG RAE
IPC: G11B17/028
Filed: 2001-11-27
Abstract: PURPOSE: A disk player including a disk clamping device is provided to stably mount a disk on the disk player and reduce the manufacturing cost of the disk player. CONSTITUTION: A disk player includes a turn-table(100) on which a disk is mounted, and a disk clamping device for pushing the disk mounted on the turn-table to fix the disk. The disk player further includes a plurality of arms(110) radially formed at the flange of the turn-table, and a rubber ring(120) inserted into each of the arms to be fixed. A plurality of recesses(130) are radially formed at the flange of the turn-table, and the plurality of arms are formed in the recesses.
Patent KR-20030045497-A (KR)
Title: Gas valve opening and shutting device
Inventor: LEE KI WON
IPC: F16K31/04
Filed: 2001-12-04
Abstract: PURPOSE: An opening and closing device of a gas valve is provided to maximize the confidence in using as well as the assembly productivity of the device by performing the opening and closing of the valve of a simple structure. CONSTITUTION: A gas valve is opened and closed by the operation of an actuating member of a rotation shaft(5) by receiving driving force of forward and reverse rotations from a motor(M). A driving gear(12) is journaled on a driving shaft(10) of a feed screw(20) and an interlocking gear(22) on the feed screw. The driving gear is engaged with the interlocking gear. The feed screw is screw-connected to a moving unit(30) moving right and left according to forward and reverse rotation of the feed screw. The moving unit and the rotation shaft are connected to an interlocking unit(40) converting the rectilineal motion to the rotation motion to rotate the rotation shaft forwardly and reversely.
Patent KR-20030049774-A (KR)
Title: Elasticity grommet of Automobile
Inventor: SEO GYEONG DEOK
IPC: B60R16/00
Filed: 2001-12-17
Abstract: PURPOSE: An elastic grommet is provided to exclude noise generated from an engine room by tightly coupling a dash panel with the grommet. CONSTITUTION: In an elastic grommet installed at the center of a dash panel and excluding noise, a rib(128) is formed at the lower side of a panel mounting unit(120) coupled with the outer circumference of a through hole(112), and supports a flange unit(124). A protrusion unit(152) is formed at the outer circumference of a second cylindrical hollow unit(150), and supports an inclination support unit(126).
Patent KR-20030055534-A (KR)
Title: A Method of Manufacturing Weather-Resistance Steel for Sheltered seaside Atmosphere
Inventor: YOO JANG YONG
IPC: C22C38/08
Filed: 2001-12-27
Abstract: PURPOSE: A method for manufacturing weather-resistance steel with a tensile strength of 50 kgf/mm¬2 for sheltered seaside atmosphere is provided. The weather-resistance steel has corrosion resistance under corrosive atmospheric condition of the amount of fly salt as much as 1.0 mdd(mg/dm¬3/day). CONSTITUTION: The method includes the steps of simultaneously feeding a wire type Ca-Si and Al into a molten steel comprising 0.15 wt.% or less of C, Si 0.2 to 0.7 wt.%, 1.6 wt.% or less of Mn, Ni 0.5 to 2.0 wt.%, Cu 0.2 to 0.6 wt.%, 0.05 wt.% or less of P, S 0.003 to 0.035 wt.%, a balance of Fe and incidental impurities; keeping the molten steel in inert atmosphere of Ar and N until right before casting in order to prevent flotation of CaO and CaS, thereby controlling Ca content and Al content in the molten steel at 0.004 to 0.01 wt.% and 0.01 to 0.06 wt.%, respectively; casting the molten steel into a steel slab; reheating the steel slab at 900 to 1300°C; hot rolling the steel slab at higher than Ar3 transformation temperature; and cooling the steel sheet to room temperature.
Patent KR-20030056351-A (KR)
Title: Apparatus and method of driving electro luminescence panel
Inventor: LEE DAE YUN
IPC: G09G3/30
Filed: 2001-12-28
Abstract: PURPOSE: An apparatus and a method for driving an electro-luminescence display panel are provided to control the brightness of a screen by changing a value of a digital data signal. CONSTITUTION: An apparatus for driving an electro-luminescence panel includes an electro-luminescence display panel(20), a data driver(24), a gate driver(22), a controller(28), and a brightness control portion(26). The electro-luminescence display panel includes pixel elements of mxn number formed at intersection portions of gate lines of m number and data lines of n number. The data driver is used for driving the data lines. The gate driver is used for driving the gate lines. The controller is used for supplying data signals and data control signals to the data driver or gate control signals including start pulses and clock signals and select signals to the data driver. The brightness control portion controls the data signals of the controller according to the data control signals in order to modulate the brightness of an image.
Patent KR-20030057753-A (KR)
Title: Method for cleaning flicker of lcd
Inventor: KIM GI HONG
IPC: G02F1/133
Filed: 2001-12-29
Abstract: PURPOSE: A method for removing the flicker of an LCD(Liquid Crystal Display) device is provided to remove the flicker by applying a voltage level of one polarity to a dot electrode and adjusting the common voltage. CONSTITUTION: In an (m+1)th frame, the polarity of a POL signal is the same. The same polarity with that of a voltage level applied to the dot electrode of an mth frame is applied to the (m+1)th frame. Signals of different polarities are applied to four dot electrodes around one dot electrode. Thus, the flicker due to the difference of brightness of the dot electrodes is detected easily.
Patent KR-20030058504-A (KR)
Title: High-interruptive composition and coating film manufactured therewith
Inventor: BANG GEUM SEOK
IPC: C09D129/04
Filed: 2001-12-31
Abstract: PURPOSE: A coating solution and a coating film using the solution are provided, wherein the solution has an excellent oxygen/steam blocking property and is environmental-friendly and is free from the deterioration of the blocking property according to the humidity. CONSTITUTION: The coating solution comprises 100 parts by weight of a solid part comprising 70-99.9 wt% of poly(vinyl alcohol) having a degree of saponification of 50-99 mol% and a degree of polymerization of 100-5,000, and 0.1-30 wt% of clay having a diameter of 10¬-2 to 10¬4 nm; and 100-1,900 parts by weight of a solvent. Preferably the clay is at least one selected from the group consisting of kaolinite, illite (clay-mica), smectite and chlorite; and the solvent is at least one selected from the group consisting of water, ethyl alcohol, o-chlorophenol, ethylene glycol, dimethyl sulfoxide and phenol.
Patent KR-20010072332-A (KR)
Title: 3차원 택틸 시임 추적 장치
IPC: G05B19/423
Filed: 1999-08-02
Abstract: 본 발명의 3차원 프로브 장치는 글로벌 좌표계에서 적어도 5개의 축방향 자유도를 통하여 움직일 수 있는 완전히 자동화되고 관절로 구성된 로봇 아암의 작업 단부에 설치된다. 상기 3차원 프로브 장치는 베이스, 캐리지, 프로브, Z축 측정장치 및 경사도 측정장치를 포함한다. 상기 프로브 끝은 캐리지 및 프로브의 운동을 일으키는 공작물 시임 또는 경로의 편향으로 추적되는 공작물 표면과 접촉한다. 상기 프로브는 캐리지의 볼 소켓부에서 선회할 수 있는 볼 및 판을 포함한다. 베이스와 관련된 캐리지의 운동은 공작물 경로 또는 시임의 회전 방향 변화에 대한 측정 데이터를 제공한다. 프로브의 경사도는 공작물 경로 또는 시임의 이동 방향 변화에 대한 측정 데이터를 제공한다.
Patent KR-20010080230-A (KR)
Title: 액체 제어 밸브
IPC: F02M59/46
Filed: 2000-08-01
Abstract: 본 발명은 액체 제어 밸브에 관한 것이다.  본 발명에 따른 밸브에는 압전식 액츄에이터(5)와 이 압전식 액츄에이터(5)의 행정을 전달하는 유압식 변환기가 제공된다.  상기 유압식 변환기는 변환면(12)을 구비한 압력 챔버(7)와 피스톤 부품(10)을 포함한다.  또한, 상기 유압식 변환기는 피스톤 부품(10)에 연결된 밸브 부품(18)을 작동시킬 수 있다.  이 밸브 부품(18)과 유압식 변환기 사이에는 기계식 변환기가 배치된다.
Patent KR-20010075662-A (KR)
IPC: G05B19/401
Filed: 1999-10-26
Abstract: 기준위치에 대하여 유지부(48)의 위치맞춤을 하는 반송시스템의 반송위치맞춤 방법이다.  제어부(72)에, 회전기준대(60)상의 소정위치인 오리엔터티칭 기준위치 및 용기재치대에 얹어 놓이는 카세트용기내의 소정위치인 용기티칭 기준위치에 대한 각각의 임시의 위치좌표를 미리 입력한다.  유지부(48)에 정확히 위치맞춤하여 유지시킨 피반송체(W)를 오리엔터티칭 기준위치의 임시의 위치좌표에 근거하는 제어에 의해서 회전기준대(60)까지 반송하여 이재한다.  회전기준대(60)에 재치된 피반송체(W)의 편심량과 편심방향을 위치자세검출부(62)에 의해서 검출한다.  검출된 편심량과 편심방향과 따라서 오리엔터티칭 기준위치에 대한 임시의 위치좌표를 보정하여 적정위치좌표로 한다.  다음에, 용기티칭 기준위치에 정확히 위치맞춤한 피반송체(W)를 용기티칭 기준위치의 임시의 위치좌표에 근거하는 제어에 의해서 회전기준대(60)까지 반송하여 이재한다.  회전기준대(60)에 재치된 피반송체(W)의 편심량과 편심방향을 위치자세검출부(62)에 의해서 검출한다.  검출된 편심량과 편심방향과 따라서 용기티칭 기준위치에 대한 임시의 위치좌표를 보정하여 적정위치좌표로 한다.
Patent KR-20010113650-A (KR)
Title: 광 부품 고정용 수동 플랫폼
IPC: G02B7/00
Filed: 1999-12-15
Abstract: 광 부품을 고정하기 위한 수동 플랫폼(34)은 돌출된 장착 영역을 포함하고, 상기 돌출된 장착 영역은 플랫폼의 내부 바닥(38)을 따라 배열된 일련의 핑거부재(42)를 포함하고, 상기 핑거부재(42)는 서로 접해있고, 그들 사이에 광 부품을 적소에 고정하기 위한 터널을 형성한다. 코일 가이드(58)는 상기 돌출된 장착 영역에 인접하여 바닥에서 위쪽으로 돌출되어 있고, 상기 코일 가이드(58)의 외측 벽과 상기 돌출된 장착 영역의 외측 벽은 레이스트랙 영역(56)을 형성하는데, 상기 외측 벽에 놓여져 있는 광 부품에서 연장된 광섬유 리드를 권선하기 위해 상기 바닥에 형성되고, 상기 광섬유는 상기 핑거부재(42)와 상기 레이스트랙(56) 사이를 통과한다.
Patent KR-20010108140-A (KR)
Title: Use of a laser to fusion-splice optical components of substantially different cross-sectional areas
IPC: G02B6/42
Filed: 2000-11-27
Abstract: A method is provided for fusion-splicing with a laser beam at least two optical components to a different optical component, the different optical component (e.g., an optical element such as a lens) having a surface that has a comparatively larger cross-sectional area than a surface of the other optical components (e.g., at least two optical fibers). The method comprises: (a) aligning the optical components along an axis; (b) turning on a directional laser heat source to form the laser beam; (c) directing the laser beam to be collinear with those optical components having a smaller cross-sectional area; (d) ensuring that the laser beam strikes the surface of the optical component having the larger cross-sectional area at normal or near normal incidence so that absorption of the laser beam is much more efficient on the surface; (e) adjusting the power level of the laser beam to reach a temperature equal to or higher than the softening temperature of the surface of the optical component having the larger cross-sectional area to form a softening region thereon, thereby achieving the fusion-splicing; and (f) turning off the laser.
Patent KR-20010101916-A (KR)
Title: 픽쳐 영역 변환을 위한 방법 및 장치
IPC: H03M7/30
Filed: 2000-02-01
Abstract: 픽쳐 영역 변환 방법이 제공되고, 결정 유닛에 의해 우선 픽쳐 영역의 수직 변환이 이루어지고 그리고 나서 픽쳐 영역의 수평 변환이 이루어지거나, 이와는 반대로 우선 픽쳐 영역의 수평 영역의 변환이 이루어지고 그리고 나서 픽쳐 영역의 수직 변환이 이루어진다.
Patent KR-20010102090-A (KR)
Title: Operator training system
IPC: G09B9/042
Filed: 2000-01-12
Abstract: A system for operator training and evaluation may detect and record information about various actions taken by an operator. For example, the system may record what the operator looks at in the course of operating the vehicle to determine whether the operator is looking at the things which the operator should appropriately be checking. In addition the system may provide other information about other aspects of the operator's performance including speed and use of controls and indicators. This information may be correlated and provided in the form of an evaluation. Alternatively, the operator may be prompted in the course of operating the vehicle to correct the operator's performance to improve the operator's skill.
Patent KR-20010108237-A (KR)
IPC: C08K5/36
Filed: 1999-02-18
Abstract: 폴리비닐리덴 플루오라이드 수지를 금속 기재에 접착할 때, (a)비닐리덴 플루오라이드 수지, (b)금속에 관해 결합 성질 또는 친화력을 나타내는 관능기를 갖는 아크릴계 및 메타크릴계 중합체로부터 선택된 한 종류 이상의 중합체, 및 (c)메르캅토기, 티오에테르기, 카르복실산기 및 카르복실산 무수물기로부터 선택되는 하나 이상의 관능기를 갖는 유기 화합물이, 비닐리덴 플루오라이드 수지에 첨가되고 혼합되는 것을 특징으로 하는 금속 기재에 대한 비닐리덴 플루오라이드 수지의 접착 방법; 전극 활성 물질 및 결합제를 함유하는 전극 구성 물질층이 집전 장치의 하나 이상의 표면에 형성되는 전지 전극을 위한 상기 방법을 사용하여 만들어진 전극; 및 상기 전극을 이용하는 비수계 전지.
Patent KR-20020007393-A (KR)
IPC: G09G5/00
Filed: 2000-04-05
Abstract: 전자 장치 및 원격 장치가 협동하여 상기 전자 장치 및 원격 장치 사이의 거리가 전송 범위 이하일때 전자 장치의 디스플레이를 가능하게 하도록 하며 상기 거리가 전송 범위 이상일때 상기 디스플레이를 불가능하게 하도록 한다. 전자 장치의 디스플레이를 불가능하게 하는 것은 디스플레이 상에서 데이터의 보안성을 개선시킬 수 있다. 더구나, 디스플레이를 불가능하게 하는 것 및 가능하게 하는 것은 자동적으로 수행될 수 있고, 이로써 인증받은 사용자가 디스플레이의 보안을 위하여 전자 장치를 끄거나 전력을 끄는 것이 경감될 수 있다. 인증받은 사용자가 원격 장치를 휴대할때, 디스플레이는 사용자가 전자 장치에 대해 이동함에 따라 가능하게 될 수 있으며 불가능하게 될 수 있다. 전자 장치의 디스플레이는 상기 전자 장치 및 원격 장치가 제 1 거리 내에 위치될때 가능하게 될 수 있으며 상기 디스플레이는 상기 원격 장치가 상기 원격 장치로부터 제 2 거리에 위치될때 불가능하게 되며, 여기서 상기 제 2 거리는 상기 제 1 거리보다 크다. 가령, 사용자가 원격 장치를 휴대할때, 디스플레이는 사용자가 전자 장치로부터 제 1 거리 내에 존재하는 경우, 가능하게 된다. 사용자가 전자 장치로부터 제 2의 보다 큰 거리의 원격 장치를 휴대할때, 디스플레이는 가능하게 된다.
Patent KR-20020011413-A (KR)
Title: Electrical Heating Devices And Resettable Fuses
IPC: H05B1/02
Filed: 2000-05-12
Abstract: A heating element (10) having a first bus wire (12) and a second bus wire (14) and a plurality of flexible heating wires (16) which are connected between the first and second bus wires (12, 14), the flexible heating wires (16) which are connected between the within parallel zones (30), to make up modules (31), which may be attached together or cut to length so that the overall length of the heating element (10) may be varied thereby. The heating element may be self-regulating. Also a self- regulating regulating heating element (60) having a plurality of PTC heating elements (62) and at least one conductive pathway (68) which is interposed between two of the PTC heating elements, and forming a series circuit between said first and second bus wires (12, 14). Also a self-regulating heating device (100) having first and second layers (104, 106) of material, at least one of which is PTC material interposed between a first electrode (102) and a second electrode (108). Also a resettable fuse (120), which provides voltage spike protection for an element to be protected, having an element of Voltage Sensitive Material (124) which is in parallel with the element to be protected.
Patent KR-20030069465-A (KR)
Title: Apparatus and method for lower power of automobile information terminal
Inventor: YOO HYEON BEOM
IPC: B60R11/02
Filed: 2002-02-20
Abstract: PURPOSE: A device and method for reducing the power consumption of a data terminal for a vehicle is provided to improve the efficiency of the data terminal by carrying out partial function of the data terminal even when the vehicle is not started. CONSTITUTION: A device for reducing the power consumption of a data terminal is composed of a high-performance processor(4) for controlling high-power consumption units(1,2,3), a high-capacity memory(5) for storing the data of the high-performance processor, a low-performance processor(10), and a low-capacity memory(11) for storing the data of the low-performance processor or important data stored in the high-capacity memory. The low-performance processor supplies power to the high-performance processor when the vehicle is started, and controls low-power consumption units(7,8) when the vehicle is not started.
Patent KR-20030069705-A (KR)
Title: An edp, cvd and arcing detection system for wafer or process chamber using the impedance
Inventor: LEE KI WON
IPC: H01L21/66
Filed: 2002-02-22
Abstract: PURPOSE: An apparatus for detecting an end of point detection(EPD) of a wafer by using impedance, chemical vapor deposition of a process chamber and arcing is provided to improve precision and reliability in detecting an etch process, chemical vapor deposition and physical vapor deposition by measuring the variation of impedance according to a reaction degree of process gas. CONSTITUTION: Ground contacts are made by at least two ground switches in at least two different positions in the chamber. An impedance sensor measures the impedance inside the chamber, connected to a specific position except the at least two different positions. An analysis system selects one of the at least two ground switches and detects the EPD or arcing in a plasma-enhanced chemical vapor deposition process, a low pressure chemical vapor deposition process, a physical vapor deposition process and an etch process based upon the measured variation of the impedance between the selected ground switch and the impedance sensor.