baber/WOPTO huggingface dataset:
Patent KR-20160139448-A (KR)
Inventor: HWANG SOON DONG
IPC: D01F6/76
Filed: 2015-05-27
Abstract: The present invention relates to a polyketone fiber and a polyketone protection shoes including the same. To this end, a polyketone solution is produced using carbon monoxide, ethylene, and propylene copolymer, and exhibits outstanding strength.
Patent KR-20160140174-A (KR)
Title: Electrical apparatus having electrical pattern capable of preventing solder bridge
Inventor: SHI HONGBIN
IPC: H01L23/488
Filed: 2015-05-29
Abstract: The present invention relates to an electrical device having an electrical pattern capable of preventing a solder bridge. The electrical device includes a plurality of electrical patterns arranged on a substrate. The electrical pattern may include a pad to which a solder ball is connected; an electrical trace which is extended from one side of the pad to transmit an electrical signal to the pad, a first dummy trace which is extended from the other side of the pad, and a first connecting line which connects the first dummy trace to the electrical trace. The first dummy trace does not face the electrical trace in a straight line across the pad.
Patent KR-20160051541-A (KR)
Inventor: AHN JIN MO
IPC: H01F17/02
Filed: 2015-06-02
Abstract: The present invention provides an inductor and a manufacturing method thereof capable of stably installing a coil by pressing a magnetic material-polymer composite molded around a cable. The inductor comprises: a support member; a coil arranged in at least a partially processed space of the support member; and a body unit filling a space around the support member and the coil.
Patent KR-20160144050-A (KR)
Inventor: KIM DEUK SUN
IPC: G06F3/00
Filed: 2015-06-08
Abstract: The present invention relates to a hardware widget module. Disclosed is a technology which develops a widget by hardware, not software. Five communication methods are developed by a communication gateway to develop a service product that a user can select and easily attach to use.
Patent KR-20160144525-A (KR)
Inventor: KIM DONG CHUL
IPC: A61K36/076
Filed: 2015-06-08
Abstract: The present invention provides a medicinal herb mixture composition for relieving and treating prostatitis and benign prostatic hyperplasia and a method for manufacturing the same, capable of relieving or treating prostatitis and benign prostatic hyperplasia and lowering recurrence after treatment by mixing ingredient contained in the medicinal herb mixture composition in a certain ratio.
Patent KR-20160145371-A (KR)
Title: Camera Module
Inventor: AHN HYUN TAEK
IPC: G03B3/10
Filed: 2015-06-10
Abstract: A camera module according to an embodiment of the present invention includes a driving magnet and a sensing magnet on different surfaces of a barrel holder and senses a position of the barrel holder with the sensing magnet and, moreover, by integrally injection molding a sensor for sensing the position of the barrel holder and a magnetic body, the camera module can precisely sense a position of a lens module at the time of auto-focus adjustment.
Patent KR-20160150322-A (KR)
Inventor: KIM SEONG MIN
IPC: G03F7/42
Filed: 2015-06-22
Abstract: The present invention relates to a resist stripper composition comprising a tetraalkylammonium hydroxide compound, an amine compound, a nonionic surfactant, and water, and to a method for stripping resist using the same. According to the present invention, the composition can remove modified resist and particulate impurities, and does not damage a resist lower film.
Patent KR-20170001483-A (KR)
Title: Mobile phone with firegas detection and alarm feature
Inventor: YOO GEON CHEOL
IPC: G08B17/117
Filed: 2015-06-26
Abstract: The present invention relates to a mobile phone with a firegas detection and alarm function, comprising: a carbon monoxide (CO) sensor (100), a heat sensor (200), a smoke sensor (300), a gas sensor (400), a mobile universal subscriber identity module (USIM) (500), a central processing unit (CPU) (600), a speaker (700) and a display part (800). The CO sensor (100) measures density of CO. The heat sensor (200) measures temperature. The smoke sensor (300) measures an amount of smoke. The gas sensor (400) measures gas density. The mobile USIM (500) stores a set density of CO, set temperature and set gas density value. The CPU (600) compares each measurement value measured by the CO sensor (100), the heat sensor (200), the smoke sensor (300) and the gas sensor (400) with a set value stored in the corresponding mobile USIM (500) to determine if a fire or leakage of gas occurs. The speaker (700) is driven by a determination result of the CPU (600). The display part (800) displays the reason for the alarm of the speaker (700). The first sensor is subdivided into the CO sensor, the heat sensor and the smoke sensor to allow accurate detection of fire and detect leaking gas such that a dangerous state alarm is activated through voice announcement and a siren, thereby allowing rapid evacuation when a fire occurs and preventing an accident. Even in a place with no alarm facility such as a fire alarm or the like, a fire or leakage of gas is effectively monitored to allow rapid response to an accident. Moreover, the present invention is useful and has an advantage that it has a simple structure to save manufacturing costs and can be stably used for a long period without failure, thereby achieving economic feasibility and securing a long service period.
Patent KR-20170006670-A (KR)
Title: 간판용 프레임
Inventor: CHOI HWA JUN
IPC: G09F13/04
Filed: 2015-07-09
Abstract: 본 발명은 간판용 프레임에 관한 것으로, 더욱 상세하게는 광고를 하기 위한 한 쌍의 광고프레임;, 각 광고프레임 사이에 설치되는 중간프레임을 포함하고, 벽체에 고정 설치되는 간판용 프레임에 있어서, 광고프레임은 길이 방향으로 길게 형성하고 미리 정해진 간격을 가진 한 쌍의 메인프레임;, 각 메인프레임의 일측에 길이 방향을 따라 적어도 두 개 이상 설치되는 제1지지프레임;과, 각 메인프레임의 마주보는 내면을 각각 지지하며 제1지지프레임에 설치되는 적어도 두 개 이상의 지지대;, 각 메인프레임의 외면에 설치되는 한 쌍의 테두리 프레임을 포함하되, 각 메인프레임은 제1지지프레임이 삽입되어 체결부재로 체결되는 제1삽입단을 형성하고, 내부가 분할된 제1,2분할공간을 가지며, 지지대의 일단이 끼움 결합되는 경사홈과 경사홈에서 미리 정해진 간격으로 위치한 제2삽입단을 제1분할공간에 각각 형성하고, 테두리 프레임을 안내하는 레일단을 외면에 형성하며, 테두리 프레임에 밀착 지지 되도록 제1분할공간의 한쪽 모서리를 바깥쪽 방향으로 돌출 형성하고, 
중간프레임은 광고프레임의 각 메인프레임과 동일한 간격과 길이를 가진 한 쌍의 연결프레임;, 각 연결프레임의 일측에 길이 방향을 따라 설치되는 적어도 두 개 이상의 제2지지프레임을 포함하되, 각 연결프레임은 내부에 공간을 가지고, 광고프레임의 제1삽입단과 체결부재로 체결되는 제1체결단을 타측에 형성하며, 제2지지프레임이 삽입되고 체결부재로 체결되는 제3삽입단을 형성하고, 또 다른 광고프레임의 제1삽입단과 체결부재로 체결되는 제2체결단을 제3삽입단에 형성한 것을 특징으로 한다.
Patent KR-20170009432-A (KR)
Inventor: KIM JONG GI
IPC: C09D7/12
Filed: 2015-07-17
Abstract: Disclosed is an inorganic coating composition. The inorganic coating composition of the present invention does not contain chrome and has excellent slip properties and corrosion resistance, has improved non-peeling and processing properties of a resin coating layer by applying slip properties during a press operation, and realizes non-peeling effects of a resin coating layer during a slitting process by maintaining wear resistance after adding a lubricant. To this end, the inorganic coating composition comprises nanosilica, silane, an acidity modifier, first and second anti-rust additives, a lubricant, an aqueous solvent and water.
Patent KR-20160018357-A (KR)
Title: A red coloring agent composition for a color filter
Inventor: HAYASHI AKIRA
IPC: C09B57/00
Filed: 2015-07-23
Abstract: The present invention provides a red coloring agent composition for a color filter, which has high brightness capable of being used in a color filter of a display device such as a TV monitor or the like, and also has small change in brightness by a post-bake process. The red coloring agent composition for a color filter of the present invention comprises a pigment, a pigment dispersing auxiliary agent having an acid group, a dye, a pigment dispersing agent, a resin, a compound having a phosphoric acid group or a salt thereof, and an organic solvent. The dye is one or more selected from the group consisting of C.I. acid red 52, C.I. acid red 87, C.I. acid red 92, C.I. acid red 289 and C.I. acid red 388.
Patent KR-20170014255-A (KR)
Title: An antifungal composition containing Magnoloside A and its pharmaceutically acceptable salts thereof
Inventor: KIM SUNG UK
IPC: A01N43/16
Filed: 2015-07-29
Abstract: The present invention relates to an antifungal composition comprising magnoloside A or a pharmaceutically acceptable salt thereof as an active ingredient. According to the present invention, an antifungal substance, magnoloside A, is isolated from an ethyl acetate fraction of Magnolia obovata Thunb., and the magnoloside A compound isolated from extracts and fractions of Magnolia obovata Thunb. was confirmed to show antifungal effects against various strains of fungi. Accordingly, the magnoloside A compound or a pharmaceutically acceptable salt thereof may be beneficially used as an antifungal composition.
Patent KR-20160020354-A (KR)
Inventor: KITANO SHOTA
IPC: H01G2/06
Filed: 2015-07-30
Abstract: The present invention relates to a multilayer ceramic capacitor, a multilayer ceramic capacitor series including the same, and a multilayer ceramic capacitor mount body including the same. The capacitor suppresses cracks due to internal stress generated by the difference of thermal shrinkage rates of a dielectric layer and conductive layers. A multilayer body (11) comprises an internal part (11m) including a region from a conductive layer located closest to a first main surface (111) to a conductive layer located closest to a second main surface (112) in a multilayer direction. The internal part (11m) is installed between a first external layer part (12b_1) and a second external layer part (12b_2).
Patent KR-20170014693-A (KR)
Title: 영상의 배경을 이용한 증강현실 이미징 포토 시스템
Inventor: KO KYOUNG HWAN
IPC: G06Q50/14
Filed: 2015-07-31
Abstract: 본 발명인 증강현실을 이용한 여행 컨텐츠 이미징 포토 시스템에 관한 것으로, 휴대용 단말기를 이용하여, 무선망 및 포토 서비스 서버로 구성된 것이어서 가상의 객체를 전송 할 수 있는 포토 서비스 서버를 이용하며 촬영된 영상에 가상 객체를 삽입 후 저장하는 단계를 포함하고 있다. 
또한, 여행컨텐츠의 한 부분으로서 관광지에 배경을 인식하여 특색에 맞는 케릭터 등을 증강현실을 이용하여 이미징 합성이 가능한 포토 시스템이다.
Patent KR-20170017388-A (KR)
Title: 오미자 줄기 추출물을 함유하는 신경계 질환의 예방 또는 치료용 조성물
Inventor: CHO IK HYUN
IPC: A61K36/79
Filed: 2015-08-06
Abstract: 본 발명은 오미자 줄기 추출물을 포함하는 신경계 질환의 예방 또는 치료용 약학적 조성물 및 건강기능식품에 관한 것이다.  
본 발명의 오미자 줄기 추출물은 신경세포 사멸을 억제하고, 숙신산 탈수소 효소의 활성을 증가시키며, 미세아교세포의 활성을 억제하며, 도파민성 신경세포를 증가시키며, 염증에 의한 신경손상 회복 효과를 보이는 등 뇌신경세포 보호 효과가 뛰어나므로 신경계 질환의 예방 또는 치료용 약학적 조성물 내지 건강기능식품으로 유용하게 이용할 수 있다.
Patent KR-20160035971-A (KR)
Inventor: KIM JIN JOO
IPC: C07C211/54
Filed: 2015-08-11
Abstract: 본 명세서는 아민계 화합물 및 이를 포함하는 유기 발광 소자를 제공한다.
Patent KR-20170019782-A (KR)
Title: 와치 타입의 이동 단말기
Inventor: CHAE SU BONG
IPC: G06F3/0488
Filed: 2015-08-12
Abstract: 와치 타입의 이동 단말기는 적어도 하나 이상의 제1 타입 카드 아이템 및 적어도 하나 이상의 제2타입 카드 아이템 각각을 상기 제1 및 제2 영역 상에 디스플레이시키고, 적어도 하나 이상의 제1 타입 카드 아이템 중 하나 및 적어도 하나 이상의 제2 타입 카드 아이템 중 하나를 각각 결제용 카드 아이템으로 설정하고, 설정된 결제용 카드 아이템 각각과 관련된 제1 오브젝트 및 제2 오브젝트를 디스플레이시키며, 제1 및 제2 오브젝트를 이용하여 결제를 동시에 수행한다.
Patent KR-20170021700-A (KR)
Title: 스팸 차단 앱에서의 리워드 방법
Inventor: AHN BUM JOO
IPC: G06Q50/32
Filed: 2015-08-18
Abstract: 후스콜과 같은 스팸 차단 웹에서 수신되는 전화번호에 대해서 사용자가 해당 전화 번호의 정체를 보고할 때에 리워드하는 방식으로서, 리워드할 시에 전화번호의 종류에 따라서 리워드를 상이하게 하는 것을 특징으로 한다
Patent KR-20170026738-A (KR)
Title: Tension Leg Platform
Inventor: CHUNG BO YOUNG
IPC: B63B21/50
Filed: 2015-08-27
Abstract: According to one embodiment of the present invention, a tension leg platform comprises: a plurality of vertical columns having a tendon coupling unit; a pontoon connecting the vertical columns and providing buoyancy to the vertical column; and a tendon having a buoyancy unit coupled to the tendon coupling unit and a pipe-shaped member extended from the buoyancy unit to be fixated to and installed in the sea bottom.
Patent KR-20170025352-A (KR)
Title: 피부 개선용 조성물
Inventor: YEO HYE RIN
IPC: A61K36/07
Filed: 2015-08-28
Abstract: 본 발명은 피부 개선용 조성물에 관한 것이다. 본 발명에 따른 잔나비걸상버섯 추출물은 피부줄기세포 증식 촉진 효과, 피부 섬유아세포의 콜라겐 합성 촉진 효과, PPAR 알파의 활성 우수 효과, 피부 밝기 개선 효과를 통해, 피부 재생, 주름 개선, 탄력 증진, 아토피 개선 및 피부결 개선용 의약, 화장료 또는 식품 제조에 사용할 수 있다. 또한, 피부줄기세포의 증식을 촉진하고, 줄기세포성 유지 효과를 나타내고 있어 줄기세포 활성 촉진용 화장료 제조에 사용할 수 있다.
Patent KR-20170027067-A (KR)
Title: One type anti-corrosion coating composition and Coating method using the same
Inventor: CHOI HYE KANG
IPC: C09D5/10
Filed: 2015-09-01
Abstract: The present invention relates to a one component anti-corrosion coating composition and a coating method using the same. An anti-corrosion coating agent for a sacrificial positive electrode comprises: (A) 30 to 50 wt% of zinc and aluminum powder; (B) 28 to 36 wt% of a mixture of glycol ether and xylene as a solvent; (C) 20 to 30 wt% of a silicone compound as a binder compound; (D) 1 to 2 wt% of a dispersant; and (E) 1 to 2 wt% of a thickening agent. The present invention forms a sacrificial positive electrode type zinc-aluminum composite film on fastening parts for building materials such as bridges and steel structures and the vehicle parts as bolts (M10, 20 and others), thereby having an effect of securing eco-friendly properties and corrosion resistance.
Patent KR-20170031811-A (KR)
Title: Liquid crystal display device
Inventor: NAMGUNG WAN
IPC: G09G3/36
Filed: 2015-09-11
Abstract: Provided is a liquid crystal display device having a pixel electrode structure for improving transmittance. The liquid crystal display device includes: first and second substrates facing each other and including a plurality of pixels; a liquid crystal layer interposed between the first and second substrates; and a pixel electrode disposed in each pixel on the first substrate. The pixel electrode includes: a first stem extending in a first direction; a second stem extending in a second direction intersecting with the first direction, and intersecting with the first stem in a + shape; a plurality of branches extending from the first and second stem such that the branches are inclined with respect to the first and second directions; a first edge bar extending in the first direction and connected to one end of the second stem; and a second edge bar extending in the second direction and connected to one end of the first stem, wherein a part of the first edge bar is disposed on an extension line of the second edge bar in the second direction.
Patent KR-20170031546-A (KR)
Inventor: KIM JEONG CHEOL
IPC: A23L5/10
Filed: 2015-09-11
Abstract: The present invention relate to a method for producing fermented and dried anchovies. More specifically, the present invention relates to a method for producing fermented and dried anchovies having more excellent quality through fermentation and fumigation processes by using an oak chip and anchovies including kelp powder. The method according to the present invention comprises: a second step of compressing a tray in which a raw material is added; a third step of inserting the compressed tray in a fermentation fumigator; a fourth step of inserting an oak chip in the fermentation fumigator, and firstly fumigating the oak chip; a fifth step of firstly drying the firstly fumigated tray, and obtaining a raw material block by removing the tray; a sixth step of firstly milling the raw material block; a seventh step of inserting and secondly fumigating the firstly milled raw material block in the fermentation fumigator; an eighth step of secondly milling the secondly fumigated raw material block; and a ninth step of secondly drying the secondly milled raw material block.
Patent KR-20170031895-A (KR)
Title: Virtual bridge system and control method thereof
Inventor: LEE JAE BEOM
IPC: G06T17/00
Filed: 2015-09-14
Abstract: The present invention relates to a virtual bridge system and a control method thereof, the system comprising: a data communication module provided on the ground to communicate with an information collecting, processing, and storing system provided on a ship; an image information matching processing module which matches ship periphery images individually shot by a plurality of cameras to visualize the images on a 360-degree screen; an obstacle detection module which detects, through image processing, an obstacle from the ship periphery image information; and a navigation information image visualization module which visualizes real-time navigation information on the basis of the matching-processed images. This configuration brings about the effect of visualizing navigation information and ship periphery image information including bridge vision information in real time on the ground by using the virtual bridge system provided on the ground.
Patent KR-20170038245-A (KR)
Title: 화분의 거치가 가능한 용기
Inventor: MUN EUNG SIK
IPC: A01G9/04
Filed: 2015-09-30
Abstract: 본 발명은 더욱 상세하게는 용기 내부에 화분을 거치할 수 있는 거치부를 용기 내부와 일체 또는 분리되도록 형성하여 식물이 식재된 화분이 용기 내부의 거치부에 거치되도록 함으로써, 화분의 물 관리가 용이하도록 하여 식물의 성장을 도모할 수 있도록 함은 물론 용기 내부의 물을 통해 공중 습도를 높여 착생란 재배가 특히 용이하도록 한 화분의 거치가 가능한 용기에 관한 것이다. 
상기 목적을 달성하기 위한 본 발명은 식물을 식재하기 위한 화분(花盆) 또는 농장에서 재배하는 재배분(栽培盆) 중 어느 하나로 되는 화분(20)과; 내부에 상기 화분(20)을 거치할 수 있는 용기(10);로 이루어지되, 상기 용기(10)는 화분(20)을 거치하기 위한 거치부(11)가 용기(10) 내부와 분리 또는 일체로 형성되는 것 중 어느 하나의 방식으로 형성되어 이루어진다.
Patent KR-20170038980-A (KR)
Inventor: PARK TAE YONG
IPC: F27B9/40
Filed: 2015-09-30
Abstract: Disclosed is a heating furnace. According to an embodiment of the present invention, the heating furnace comprises: a furnace body having a heating chamber heated by at least one heating element; a heating element connector board placed in an external wall of the furnace body to supply power to the heating element; and a cooling device having a cooling casing installed in an external wall of the furnace body to surround the heating element connector board and at least one air blowing fan installed in the cooling casing, forming air circulation between the inside and outside of the cooling casing. According to an embodiment of the present invention, provided is the heating furnace, capable of preventing deformation of a connection portion of a heating element in an external wall of the furnace body.
Patent KR-20170040507-A (KR)
Inventor: KWON TAE HOON
IPC: G06Q30/02
Filed: 2015-10-05
Abstract: 본 발명에 따른 쇼 케이스는 제품이 다단으로 진열되는 본체; 상기 본체에 구비되어 상기 제품을 투시할 수 있고, 영상 표시가 가능한 투명 디스플레이 패널; 상기 본체에 근접하여 주시하는 사용자의 동공 각도를 측정하는 적어도 하나 이상의 센서; 상기 센서에 의해 감지된 상기 사용자의 동공이 주시하는 상기 투명 디스플레이 패널 부분과 그 이외의 부분을 상이한 상태로 표시하게 하는 제어부를 포함할 수 있다.
Patent KR-20170043221-A (KR)
Inventor: JANG KWANG DONG
IPC: B60M1/24
Filed: 2015-10-13
Abstract: Disclosed is a support clamp for a rigid bar electric car line. A support clamp for a rigid bar electric car line according to the present invention can prevent arc from occurring by eliminating non-uniform voltage between a rigid bar electric car line and the support clamp, secure stability and reliability of a structure by eliminating a durability deterioration factor of the rigid electric car line support structure, and secure convenience and increase productivity when constructing the rigid electric wire. The support clamp for the rigid bar electric car line comprises: a body; a main shaft; a support part; and a conductive member.
Patent KR-20170043766-A (KR)
Inventor: JEON DAE U
IPC: E04F21/20
Filed: 2015-10-14
Abstract: The present invention relates to an auxiliary product enabling horizontal and slanted surfaces to flatly be installed to solve problems such as a ponding phenomenon on a slanted surface and increased difficulty of a skilled craftsman in constructing a flat door of a building using mixed mortar. The present invention comprises: a horizontal bar; a horizontal bar fixing unit fitted and coupled to the horizontal bar having a nut formed thereon; a pedestal portion having a bolt to be bolt-engaged with the horizontal bar fixing unit; a measuring rod having gradations thereon, and vertically coupled to the horizontal bar; and a laser leveler to emit a laser. The present invention helps maintain flatness during construction of a floor.
Patent KR-20170044444-A (KR)
Inventor: LEE DONG WON
IPC: A61K49/06
Filed: 2015-10-15
Abstract: 본 발명은 과산화수소 감응성 나노입자를 포함하는 초음파 조영제에 관한 것이다. 본 발명에 따른 PVAX 또는 HPOX 나노입자는 과산화수소에 의해 CO 2  버블을 생성하여 초음파 주파수와 공명을 이룸으로써 초음파 신호를 증폭시키는 효과가 있어 초음파 조영제로서 유용하게 사용될 수 있다.
Patent KR-20170045045-A (KR)
Inventor: JUN JIN KOOK
IPC: G01R1/04
Filed: 2015-10-16
Abstract: The present invention relates to a manufacturing method of a conductive wire bonding structure, comprising: a step of bonding a conductive wire on a PCB; a step of installing a coil spring on the conductive wire; a step of installing a conductive ball on an upper part of the conductive wire and the coil spring; and a step of reflowing the conductive ball to integrally combine the conductive wire and the coil spring. According to the configuration of the present invention, the present invention can manufacture a test socket suitable for a fine pitch and correspond to a high speed signal.
Patent KR-20170046322-A (KR)
Inventor: JUNG DONG HYUN
IPC: H01M10/48
Filed: 2015-10-21
Abstract: The present invention relates to maintenance-type index glass, which facilitates water level adjustment of an electrolyte when supplementing electrolyte of a maintenance-type storage battery, and determines whether a problem occurs to the storage battery through specific gravity of the electrolyte, comprising: an indication part, in which a sphere body having specific gravity is contained in a cylindrical pipe; and a mounting part connected to enable the indication part to be fixed inside an immersion portion of the storage battery. The sphere body in the indication part flows up and down in the cylindrical pipe, depending on water levels of the electrolyte, so as to facilitate water level adjustment of the electrolyte by a user. Moreover, the present invention determines whether a problem occurs in the specific gravity of the electrolyte, and detects cells having low specific gravity, without separate measurement equipment, so as to facilitate maintenance and management of the storage battery.
Patent KR-20170047574-A (KR)
IPC: H01R25/00
Filed: 2015-10-23
Abstract: The present invention is to provide a portable electrical current converter comprising: a socket (110) capable of connecting a plug disposed at the top end of a body; four battery holders (121) capable of connecting a 1.5V (AA size) battery disposed on the bottom surface of the body; a battery holder (122) capable of connecting a 9V (FC-1 size) battery disposed on the bottom surface of the body; and a cover (130) for covering the top of the body, and capable of being opened and closed. According to the present invention, compared to a direct current which is an electrical current flowing in a battery, an alternating current which is an electrical current flowing in a socket can change a voltage and thus can be more variously used. By referring to such a fact, a battery which can be easily found in a supermarket or a convenience store is made to have an electrical current changed into an alternating current to be used. Thus, not only electronic products using batteries but also electronic products which require sockets to be used can be used in an outdoor place. Accordingly, conventional usage inconvenience can be relieved.
Patent KR-20160052337-A (KR)
Inventor: MINAMIDA JUNYA
IPC: H01L21/677
Filed: 2015-10-26
Abstract: The present invention is to further prevent particles from being attached to a substrate. A substrate processing apparatus according to an embodiment includes a taking-in/out room, a transport room, and a transfer room. In the taking-in/out room, a substrate is taken in and out from a carrier. In the transport room, a transport path of the substrate is formed to a substrate processing room where a predetermined process is performed. The transfer room is disposed between the taking-in/out room and the transport room, and is used for transfer of the substrate between the taking-in/out room and the transport room. In addition, the internal pressure of the transfer room is higher than the internal pressure of the taking-in/out room and the internal pressure of the transport room.