Patent KR-20190092128-A (KR)
Title: Photomask Cleaning Apparatus with Photomask moving Device
Inventor: LEE HEE JOON
IPC: G03F1/82
Filed: 2018-01-30
Abstract: Disclosed is a photomask cleaning device. A photomask cleaning device according to an embodiment of the present invention comprises: a photomask transfer portion to which a photomask vertically stands and is fixed, and which includes a driving means to be moved forward and backward; and a main body which has an inlet and an outlet formed on both sides to allow the photomask transfer portion to pass therethrough. The photomask cleaning device further comprises a cleaning portion consisting of a pair of rods which are formed inside the main body, vertically formed adjacent to the inlet, and spaced apart from each other at predetermined intervals, and a cleaning member which is formed on an outer surface of each of the rods and is in contact with the surface of the photomask. The photomask transfer portion includes a mounting portion having an upper portion formed with a plurality of fixing members and operated by moving forward and backward, a driving portion for generating forward and backward moving power of the mounting portion, and a plurality of supports selectively coupled to the fixing members and spaced apart from each other at predetermined intervals, wherein a photomask is vertically fixed and transferred by having both sides coupled to the supports. According to the present invention, both surfaces can be cleaned while moving a photomask in a vertical state, and an interval between supports at both sides can be controlled according to an area of a photomask, thereby reducing costs for purchasing equipment. Disclosed is a photomask cleaning device. A photomask cleaning device according to an embodiment of the present invention comprises: a photomask transfer portion to which a photomask vertically stands and is fixed, and which includes a driving means to be moved forward and backward; and a main body which has an inlet and an outlet formed on both sides to allow the photomask transfer portion to pass therethrough. The photomask cleaning device further comprises a cleaning portion consisting of a pair of rods which are formed inside the main body, vertically formed adjacent to the inlet, and spaced apart from each other at predetermined intervals, and a cleaning member which is formed on an outer surface of each of the rods and is in contact with the surface of the photomask. The photomask transfer portion includes a mounting portion having an upper portion formed with a plurality of fixing members and operated by moving forward and backward, a driving portion for generating forward and backward moving power of the mounting portion, and a plurality of supports selectively coupled to the fixing members and spaced apart from each other at predetermined intervals, wherein a photomask is vertically fixed and transferred by having both sides coupled to the supports. According to the present invention, both surfaces can be cleaned while moving a photomask in a vertical state, and an interval between supports at both sides can be controlled according to an area of a photomask, thereby reducing costs for purchasing equipment.