Patent SG-11201804208V-A (SG)
Title: Apparatus of plural charged-particle beams
Inventor: REN WEIMING
IPC: H01J37/153
Filed: 2016-11-30
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property -' Organization International Bureau res., 00) (43) International Publication Date .... ..sr ,„„..) 8 June 2017 (08.06.2017) W I P0 1 PCT ID Hit (10) WO International 2017/095908 1111111111111111ME1111111111111111111111111111111111RIIIIIIIIIIIIIII Publication Al Number (51) International Patent Classification: (81) Designated States (unless otherwise indicated, for every G01N 23/225 (2006.01) H01.137/153 (2006.01) kind of national protection available): AE, AG, AL, AM, H01.1 37/10 (2006.01) AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, (21) International Application Number: DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, PCT/US2016/064195 HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KN, KP, KR, (22) International Filing Date: KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, 30 November 2016 (30.11.2016) MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, (25) Filing Language: English SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, (26) Publication Language: English TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (30) Priority Data: 62/260,822 30 November 2015 (30.11.2015) US (84) Designated States (unless otherwise indicated, for every kind of regional protection available): ARIPO (BW, GH, (71) Applicant: HERMES MICROVISION INC.; 7F, No.18, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, Puding Road, East Dist., Hsinchu City, 300 (TW). TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, (72) Inventors; and TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, (71) Applicants : WEIMING, Ren [CN/US]; 2069 Kiwi DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, Walkway, San Jose, CA 95133 (US). XUEDONG, Liu LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, S [CN/US]; 5458 Ora Street, San Jose, CA 95129 (US). M, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, XUERANG, Hu [CN/US]; 1363 Danby Avenue, San Jose, GW, KM, ML, MR, NE, SN, TD, TG). CA 95132 (US) ZHONGWEI, Chen [US/US]; 1561 Published: Blaney Avenue, San Jose, CA 95129 (US). 21(3)) — with international search report (Art (74) Agent: JUSTIN, King; WPAT, P.C., 8230 Boone Blvd, Suite 405, Vienna, VA 22182 (US). (54) Title: APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS : A imaging system in (57) secondary projection a multi-beam ap- 100-2D is detection high paratus proposed, which makes the secondary electron with collection efficiency and low cross— talk. The system employs one zoom lens, lens deflection unit. The one projection and one anti-scanning zoom . lens and the projection lens respectively perform the zoom function and the function to the total imaging the total anti-rotating remain magnification and 1 14 0_2 140_1 140 ' SI Ion L HO ly.el. 102 3,w1 image rotation with respect to the landing energies and/or the currents of the beamlets. The anti- scanning deflection unit the anti- plural primary performs ''\" ' • 1 110 ^ function to the dynamic image displacement due to the scanning eliminate \1/ deflection scanning of the plural primary beamlets. AL @ i it? @ i . ,,, SP2 11 r A& _ __ - FAIR -- _' _______ \\ y ,,\" 1--I , 6, ue Mi .4t //1... lit GC nettaiiiii. 102_35 10 , 2S 102_ C i n C t Figure 3B (Invention) 0 IN 11 0 ei O