Patent SG-11201810379T-A (SG)
Title: Wafer processor door interface
Inventor: HANSON KYLE MORAN
IPC: H01L21/677
Filed: 2017-05-24
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 111111110111101110101011111010111110 0101110111111110111110101111111011110111111 Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\"\" WO 2017/218152 Al 21 December 2017 (21.12.2017) WIP0 I PCT (51) International Patent Classification: MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, HO1L 21/67 (2006.01) HO1L 21/677 (2006.01) PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, (21) International Application Number: SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, PCT/US2017/034281 TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (22) International Filing Date: (84) Designated States (unless otherwise indicated, for every 24 May 2017 (24.05.2017) kind of regional protection available): ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, (25) Filing Language: English UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, (26) Publication Language: English TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, (30) Priority Data: MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, 62/350,809 16 June 2016 (16.06.2016) US TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). (71) Applicant: APPLIED MATERIALS, INC. [US/US]; 3050 Bowers Avenue, Santa Clara, California 95054 (US). Published: (72) Inventors: HANSON, Kyle Moran; 110 Greenbriar Drive, — with international search report (Art. 21(3)) Kalispell, Montana 59901 (US). MCHUGH, Paul, R.; 127 Sherry Lane, Kalispell, Montana 59901 (US). (74) Agent: OHRINER, Kenneth H. et al.; Perkins Coie LLP, P.O.Box 1247, Seattle, Washington 98111-1247 (US). Designated States (unless otherwise indicated, for every kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, = (81) =_ = = Title: WAFER PROCESSOR DOOR INTERFACE = (54) = = = 158 — = - - - - - - - - - -4 _ _ _ 150 = 174 154 -- ----6.------ = 152 = = = — 176 = ;- ,..., 1111 ) 156 - -- -IIL ....... 170 1-1 il 164 160 kin r ,, FIG. 6 1-1 co (57) : A processing system includes at least one processor having a tank for holding a process liquid. A clean assembly above 1-1 N the tank is provided with an upper housing having at least one upper housing spray nozzle, and a lower housing having at least one lower housing spray nozzle, with the lower housing below the upper housing. A door between the upper housing and the lower housing Il is movable via an actuator from an open position wherein a load port through the clean assembly is open, to a closed position wherein the load port is closed off. The door largely prevents liquids used in the upper housing from moving down into the process liquid in ei the tank, and may also improve gas flow in the system.