Patent SG-11201408606T-A (SG)
Title: Process for transferring a layer
Inventor: BRUEL MICHEL
IPC: H01L21/762
Filed: 2013-06-14
Abstract: (12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization International Bureau (43) International Publication Date 3 January 2014 (03.01.2014) WIPOIPCT (10) International Publication Number WO 2014/001869 A1 (51) International Patent Classification: H01L 21/762 (2006.01) (21) International Application Number: (22) International Filing Date: (25) Filing Language: (26) Publication Language: PCT/IB2013/001252 14 June 2013 (14.06.2013) English English (30) Priority Data: 1201802 26 June 2012 (26.06.2012) FR (71) Applicant: SOITEC [FR/FR]; Chemin des Franques, Pare Teehnologique des Fontaines, F-38190 Bernin (FR). (72) Inventor: BRUEL, Michel; VEUREY VOROIZE (FR). Presvert n°9, F-38113 (81) Designated States (unless otherwise indicated, for every kind of national protection available)'. AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IS, JP, KE, KG, KN, KP, KR, KZ, LA, LC, LK, LR, LS, LT, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (84) Designated States (unless otherwise indicated, for every kind of regional protection available)'. ARIPO (BW, GH, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, SZ, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG). Declarations under Rule 4.17: — as to applicant's entitlement to apply for and be granted a patent (Rule 4.17(H)) — as to the applicant's entitlement to claim the priority of the earlier application (Rule 4.17(iii)) — of inventorship (Rule 4.17(iv)) Published: — with international search report (Art. 21(3)) (54) Title: PROCESS FOR TRANSFERRING A LAYER 5-M 1-N 20 6 6-v J* - ' > ' > i k E ' > ' 50 (57) Abstract: This transfer process comprises the following steps: (a) providing a donor substrate (2) and a support sub - strate (3); (b) forming a embrittlement region (4) in the donor substrate (2); (c) forming what is called a bonding layer (5) between the first part (1) of the donor substrate (2) and the support substrate (3); and (d) assembling the donor substrate (2) to the support substrate (3), and noteworthy is in that comprises it the following step: (e) exposing, in suc­ cession, portions (40) of the embrittlement region (4) to electromagnetic irradiations (6) for an exposure time at a given power density, the exposure time being chosen de­ pending on the thickness (E) of the bonding layer so that the support substrate (3) is thermally decoupled from the first part (1) of the donor substrate (2), the exposure time being chosen depending on the power density in order to activate kinetics that weaken the embrittlement region (4). 0\ 00 i-H o o Fig 1 o CJ O £