baber/WOPTO huggingface dataset:
Patent KR-20150030043-A (KR)
Inventor: JEE CHANG YEOL
IPC: H02G1/06
Filed: 2013-09-11
Abstract: A cable laying system is disclosed. The cable laying system according to an embodiment of the present invention comprises; an identification tag formed on a branching point of a cable tray; a cable laying robot which drives a cable tray along a cable laying route and pulls a cable and lays the cable in the cable tray. The cable laying robot deciphers the identification tag if the identification tag is sensed and determines a progress direction at the branching point based on the position of the branching point in which the identification tag is installed, a current position of the cable laying robot, and the cable laying route and drives in the determined direction. According to an embodiment of the present invention, a cable can be laid automatically by moving a cable laying robot among a cable laying route. Moreover, work time cam be reduced and work efficiency can be improved.
Patent KR-20150031747-A (KR)
Inventor: JANG JYONG SIK
IPC: C07K14/705
Filed: 2013-09-16
Abstract: The present invention relates to a nanovesicle including a human dopamine receptor, a dopamine receptor including the same and a dopamine sensor based on a field effect transistor. More specifically, the present invention relates to a nanovesicle, which is manufactured having a dopamine receptor specifically connected to the dopamine and is used in a field effect transistor, thereby measuring the change of conductance caused by connecting the dopamine to the dopamine receptor and detecting abnormal concentration and delivery of the dopamine, leading to the diagnosis of diseases, a dopamine receptor including the nanovesicle and a dopamine sensor based on the field effect transistor wherein the nanovesicle including the dopamine receptor and the dopamine sensor based on the field effect transistor have outstanding sensitivity and selectivity similar to mechanism of delivering signals of dopamine materials and specifically detect dopamine to a pM range on a real time basis.
Patent KR-20150031807-A (KR)
Inventor: KIM KAB YEONG
IPC: G06F3/041
Filed: 2013-09-16
Abstract: The present invention relates to a touch panel. According to an embodiment of the present invention, the touch panel prevents difference between an effective area and an ineffective area. According to an embodiment of the present invention, the touch panel includes: a substrate having the effective area and the ineffective area; a printed patterns which is formed in the ineffective area; and a charging material layer which is formed on the substrate and the printed pattern, wherein the upper side of the charging material layer is the same plane.
Patent KR-20150031852-A (KR)
Inventor: OH JIN SEOK
IPC: H02J7/00
Filed: 2013-09-17
Abstract: At least one embodiment of the present invention stops wireless charging or reduces the level of wireless charging power while a charged terminal performs data communications, thereby suppressing the degradation of reception sensitivity for the data communications due to the noise generated from wireless charging. According to an embodiment of the present invention, a wireless charging method comprises: a step of recognizing a charged terminal; a step of determining the level of wireless charging power based on whether a communications module of the charged terminal is activated or deactivated; and a step of transmitting power at the determined level to the charged terminal.
Patent KR-20150039656-A (KR)
IPC: A61K31/4439
Filed: 2013-10-02
Abstract: The present invention provides a sulfonyl indole derivative represented by chemical formula 1 below, which can be useful in the prevention or treatment of peptic ulcers, gastritis, or reflux esophagitis; a method for preparing the same; and a pharmaceutical composition containing the same, wherein X, X_1, X_2, X_3, R_1, R_2, and R_3 are as defined in the specification.
Patent KR-20150039535-A (KR)
IPC: H01L31/18
Filed: 2013-10-02
Abstract: A solar cell according to an embodiment comprises a supporting substrate; a rear surface electrode layer disposed on the supporting substrate; a light absorption layer disposed on the rear surface electrode layer; a buffer layer disposed on the light absorption layer; and a front surface electrode layer disposed on the buffer layer. First through grooves passing through the rear surface electrode layer and the light absorption layer are formed on the rear surface electrode layer and the light absorption layer. The light absorption layer includes a first light absorption layer disposed on the rear surface electrode layer; and a second light absorption layer disposed while contacting an inner surface of the rear surface electrode layer exposed by the first through grooves. A fabricating method of a solar cell according to an embodiment comprises the following steps: arranging a rear surface electrode layer on a substrate; arranging a light absorption layer on the rear surface electrode layer; forming a first through groove on the light absorption layer; arranging a buffer layer on the light absorption layer; and forming a front surface electrode layer on the buffer layer. The step of forming a first through groove on the light absorption layer includes the steps of forming a first through groove passing through the rear surface electrode layer and the light absorption layer; and melting the inner surface of the light absorption layer and forming the same so that the light absorption layer encloses the rear surface electrode layer exposed by the first through groove.
Patent KR-20150042610-A (KR)
IPC: H01M4/525
Filed: 2013-10-11
Abstract: The present invention relates to a positive electrode active material for a lithium rechargeable battery, comprising: a core including a compound represented by chemical formula 1; and a solid solution which is located on the surface of the core and contains lithium (Li), phosphorus (P), and oxygen (O), to a preparation method thereof, and to the lithium rechargeable battery including the same. Chemical formula 1 is Li_xNi_(1-a-b-c-d)Co_aMn_bM^1_cM^2_dO_2. The definition of the chemical formula 1 is the same as defined in the specification.
Patent KR-20130135796-A (KR)
Title: Reformulated liquid crystal mixtures and lcd device thereof
Inventor: LU CHIEN WEI
IPC: C09K19/00
Filed: 2013-10-15
Abstract: Provided is a method for recycling a liquid crystal, wherein the method includes a step for preparing at least one liquid crystal compound and a step for forming a reformulated liquid crystal compound using at least a part of at least one liquid crystal compound. Provided are a reformulated liquid crystal mixture including at least one recycled liquid crystal mixture and a liquid crystal display with at least one reformulated liquid crystal mixture. [Reference numerals] (102) Recycled LCD panel;(104) LCD waste;(106) Collect liquid crystal mixture (s);(108) Grouping;(110) Randomly establish LCD database by checking the physical properties;(112) Mapping;(114) Re-composition of the liquid crystal;(116) Refining LCD;(118) Reuse
Patent KR-20150048574-A (KR)
Inventor: LEE SANG JO
IPC: H02J17/00
Filed: 2013-10-28
Abstract: The present invention relates to a resonance battery system for wirelessly transferring power to an electric device using a general battery. The resonance battery system of the present invention comprises: a wireless power transfer unit which wirelessly emits inputted power after converting the inputted power into frequency power and using strong coupling magnetic resonance with a coupling inductor and a resonance inductor; and a resonance battery which is installed on an electric device instead of a general battery, receives power emitted from the wireless power transfer device using strong coupling magnetic resonance with the resonance inductor and the coupling inductor, and supplies the received power to the electric device. According to the present invention, by installing the resonance battery on every electric device with a general battery and wirelessly supplying power, users can use the products regardless of battery lifetime, thereby enhancing user convenience.
Patent KR-20150049782-A (KR)
Inventor: KIM JI HOON
IPC: G06F9/06
Filed: 2013-10-31
Abstract: The present invention relates to a device and a method for relaying a module. More specifically, calls between one or more manager modules, one or more application modules, and service modules for performing functions of a battery management system (BMS) are medially delayed, thereby removing performance relationship between one or more modules and ensuring independence.
Patent KR-20150058723-A (KR)
Title: 증발기
Inventor: JEONG JI HWAN
IPC: F28F1/32
Filed: 2013-11-21
Abstract: 본 발명은 증발기에 대한 것으로서, 더욱 상세하게는 성에의 성장이 어느 한 곳에 집중적으로 발생하는 것을 방지할 수 있는 증발기에 대한 것이다. 
본 발명에 따른 증발기는 냉매관과, 복수의 핀플레이트를 포함한다. 상기 냉매관은 공기가 유입되는 전방에 냉매가 공급되는 입구가 위치하도록 배열된다. 상기 핀플레이트는 상기 공기와 상기 냉매의 열교환을 시키기 위하여 상기 공기가 흐르는 방향으로 위치하도록 상기 냉매관에 결합된다. 그리고 상기 공기가 유입되는 전방에서 핀플레이트 간의 간격이 넓게 형성되도록 서로 크기가 다른 핀플레이트들이 상기 냉매관을 따라 교대로 결합된다. 
본 발명에 의하면 공기가 유입되는 부분에 냉매관의 입구를 두므로 인해서 증발기의 전면부에서 공기와 냉매의 온도차를 줄일 수 있다. 그래서 증발기의 전면부에서 성에의 성장을 지연시킬 수 있고, 이로 인해서 제상시 열을 받는 성에의 열전달 명적을 증가시켜 제상효율을 증가시킬 수 있다.
Patent KR-20150059207-A (KR)
Inventor: SEO IN JEONG
IPC: G06Q30/06
Filed: 2013-11-21
Abstract: An objective of the present invention is to provide a system and a method for providing coffee information which provide coffee balance information obtained by converting and analyzing data on processes from a coffee bean purchase process to a final consumption process. When a coffee information management server receives a request for purchasing coffee beans from a terminal connected to a network, the coffee information management server searches for and supplies roasting information of the coffee beans, cupping information of the roasted coffee beans, and taste information to the terminal. When one or more terminals connected to the network request an input of roasting information of the coffee beans, cupping information of the roasted coffee beans, and taste information, the coffee information management server verifies login information, then receives and saves the information requested for inputting, and converts the inputted information into a certain graphic format and supplies the information in the graphic format to the terminals. Accordingly, the present invention converts the processes from the coffee bean purchase process to the final consumption process into data to provide coffee balance information and confirm accurate coffee information by confirming a coffee bean variety, a roasting method for a variety, roasting tools, and environmental variable information such as weather, humidity, an outdoor temperature, and an indoor temperature while roasting.
Patent KR-20140071908-A (KR)
Inventor: PENG CHUBING
IPC: G02B6/42
Filed: 2013-11-28
Abstract: The present invention relates to a polarization rotator. The polarization rotator according to an embodiment of the present invention includes a first waveguide and a second waveguide coupled to an input coupler on a first end unit. The input coupler is configured to couple the light energy from a light source. The first waveguide is offset from the second waveguide, and a second end unit of the first waveguide is coupled to a second end of the second waveguide.
Patent KR-20150062597-A (KR)
Inventor: CHOI CHANG SIC
IPC: B60R9/058
Filed: 2013-11-29
Abstract: The present invention relates to a roof rack assembly for a vehicle which can reduce manufacturing costs and improve product quality by injection molding a pad disposed on a front and a rear portion of the lower surface of a roof rack formed in a three dimensional curved surface and extrusion molding a pad of a middle rail unit having a constant cross section. The roof rack assembly for a vehicle according to the present invention comprises: a roof rack (110) symmetrically installed on both sides of the outer surface of a vehicle roof (1); and a pad (120) formed from a soft material and disposed between the roof rack (110) and the vehicle roof (1). The pad (120) comprises: a front/rear members (121, 123) separately formed and mounted on a front/rear portions of the lower surface of the roof rack (110) formed in different three dimensional shapes, respectively; and a middle member (125) formed in a constant cross section and mounted between the front/rear members (121, 123). According to the present invention, manufacturing costs can be reduced and product quality can be improved by injection molding the pad disposed on the front/rear portions of the lower surface of the roof rack formed in a three dimensional curved surface and extrusion molding the pad of the middle rail unit having a constant cross section. And, a product weight and volume are reduced, which allows easy handling, and simple maintenance and repair.
Patent KR-20150064493-A (KR)
Inventor: LEE JIN TAEK
IPC: B23D33/10
Filed: 2013-12-03
Abstract: The present invention relates to a pipe cutting beveling device and, more specifically, to a pipe cutting beveling device which can smoothly and clearly cut a pipe without a defect of a cutting surface on the pipe when cutting the pipe. To achieve this, the present invention comprises: a body unit; an operation unit installed in the body unit, wherein a pipe is mounted; a power transmission unit transmitting power to the operation unit; a support unit pressurizing and supporting the pipe mounted on the operation unit; and a cutting unit cutting the pipe mounted on the operation unit.
Patent KR-20150066618-A (KR)
Inventor: LEE SE JIN
IPC: C07D495/04
Filed: 2013-12-06
Abstract: The present invention relates to an organic electroluminescent compound applied to a hole transfer material, which is characterized by being represented by chemical formula 1-1 and chemical formula 1-2. The organic electroluminescent compound according to the present invention can manufacture an organic electroluminescent device with improved light emitting efficiency and life properties, when applied to a hole transfer layer of the organic electroluminescent device.
Patent KR-20150066356-A (KR)
Inventor: LEE JONG BOK
IPC: G09F9/00
Filed: 2013-12-06
Abstract: According to an embodiment of the present invention, a curved display device comprises: a curved screen; an infrared light lighting arranged at the rear of the curved screen and irradiating infrared light to the curved screen; an infrared light camera shooting an infrared light image reflected from the curved screen; and a control unit detecting a dew condensed area of the curved screen by using the infrared light image, and displaying the image on a normal area of the curved screen except for the dew condensed area.
Patent KR-20150069133-A (KR)
Inventor: PARK SUNG WOO
IPC: G06F3/048
Filed: 2013-12-13
Abstract: 본 발명은 전자 기기 및 전자 기기의 제어 방법에 관한 것이다. 본 발명은, 통신 상대방과 송수신한 컨텐츠 중 특정 컨텐츠를 선택하여 컨택트 리스트에 저장된 통신 상대방에 대응되도록 표시함으로써, 컨택트 리스트에서 특정 통신 상대방과 관련된 컨텐츠를 용이하게 확인할 수 있는 전자 기기 및 전자 기기의 제어 방법을 제공한다.
Patent KR-20150072916-A (KR)
Inventor: LEE TAE KYUNG
IPC: G09F9/00
Filed: 2013-12-20
Abstract: In the present invention, disclosed is an image display device. More particularly, the present invention relates to an image display device which integrates a liquid crystal display to display an image with an external frame mounting the liquid crystal display. According to the embodiment of the present invention, manufacturing costs are reduced and the quality of the image is improved by forming a light source of a backlight unit on the external frame of the image display device instead of the inside of the liquid crystal display with a reflection structure using the external frame instead of the direct light emission with regard to a liquid crystal panel.
Patent KR-20140146521-A (KR)
Title: 중앙 집중화된 nat 세션 관리 방법
Inventor: AHN TAE JIN
IPC: H04W8/26
Filed: 2013-12-24
Abstract: 중앙 집중화된 NAT 세션 관리 방법이 개시된다. 제어장치에서 수행되는 NAT 세션 관리 방법은 NAT 기능을 수행하는 통신장치로부터 사설 IP 주소 및 포트를 가지는 단말의 식별정보 및 통신장치의 식별정보를 수신하고, 단말의 식별정보 및 통신장치의 식별정보에 기초하여 단말을 구분하기 위한 단말 세션 정보를 생성한 후, 외부 장치로부터 단말의 식별정보를 포함하는 NAT 세션 생성 요청을 수신하면, 단말 세션 정보에 기초하여 단말에 대응되는 통신장치에 NAT 세션 생성 요청을 전송한 후, 통신장치로부터 수신한 NAT 세션 생성 정보를 저장한다. 따라서, 단말의 개입 없이 NAT 세션 정보를 지속적으로 관리할 수 있고, 서비스 연속성을 보장할 수 있다.
Patent KR-20150075640-A (KR)
Inventor: LEE JONG MIN
IPC: G09G3/20
Filed: 2013-12-26
Abstract: The present invention relates to a flat panel display device and a driving method thereof. The flat panel display device includes a display panel where pixels are arranged with a matrix shape; a timing controller which inserts a clock signal and control data into inputted digital video data and transmits the result; and source drive ICs which are connected to the timing controller through data line pairs, restore an internal clock based on the clock signal received through the data line pairs, sample the digital video data, convert the digital video data into a data voltage, and supply the result to the data line of the display panel. The timing controller transmits a first data packet or a second data packet every horizontal period. The first data packet includes a clock training pattern signal or preamble signal, control data, and the digital video data. The second data packet includes the digital video data.
Patent KR-20150075735-A (KR)
Inventor: SON HAN SOO
IPC: G08C23/06
Filed: 2013-12-26
Abstract: The present invention provides a remote water quality management system and a method thereof. The method includes: a step of transmitting data to a central TMS PC from a TMS data logger; a step of converting a communications protocol from RS232 into RS242 using a protocol converter and transmitting data received from the central TMS PC to a PLC LAN herb; a step of receiving the data from the PLC herb using an optical converter, converting the data into an optical signal, and transmitting the signal to a PLC central processing unit (CPU); a step of receiving a control signal from the PLC CPU using the optical converter and transmitting the signal to the PLC LAN herb; and a step of converting the communications protocol from RS242 to RS232 using the protocol converter and transmitting the control signal received from the PLC LAN herb to the central TMS PC. The present invention is intended to realize an automatic process of field facilities according to a change of TMS data by interlocking the water quality TMS and the PLC.
Patent KR-20150076755-A (KR)
Inventor: KANG SEONG CHEOL
IPC: G01S13/48
Filed: 2013-12-27
Abstract: The present invention relates to a method for arranging an array plane of phase array radar. The method for arranging an array plane of phase array radar corrects for an array plane to have identical phase and gain. According to an embodiment of the present invention, the method includes: an inner signal source correcting step of authorizing a correction signal preset in each unit antenna of phase array radar, correcting a difference in authorized paths of signals received in each of the unit antennas, and calculating a first correction value per unit antenna; a far-field beacon correcting step of performing reception for each unit antenna through far-field beacon measurement and calculating a second correction value which makes the phase and the gain identical with the preset reference phase and reference gain respectively per unit antenna; and a phase and gain correcting step of correcting the phase and the gain for the signals received and transmitted in the phase array radar by applying the first correction value and the second correction value per unit antenna.
Patent KR-20150077122-A (KR)
Inventor: SON HYOUNG KYU
IPC: H01L21/677
Filed: 2013-12-27
Abstract: The present invention provides an apparatus for processing a flexible substrate and a method for processing a flexible substrate using the same to allow the flexible substrate to be processed in a roll-to-roll way in an independent space by separating a process area for transmission of the flexible substrate and processing of the flexible substrate. The apparatus for processing a flexible substrate comprises: a chamber having a plurality of process areas formed thereon; a substrate supply roll disposed inside the chamber to supply a flexible substrate to the plurality of process areas; a substrate recovery roll disposed inside the chamber to draw out the flexible substrate from the substrate supply roll and recover the flexible substrate; a rotational stage disposed inside the chamber, and supporting a curved surface of the flexible substrate between the substrate supply roll and the substrate recovery roll to rotate and transmit the flexible substrate; and electrodes disposed on the plurality of process areas, respectively, wherein plasma is generated on the plurality of process areas by RF power applied to the electrodes. Therefore, in accordance with the present invention, the apparatus for processing a flexible substrate and the method for processing a flexible substrate using the same are capable of improving productivity using the roll-to-roll way.
Patent KR-20150077632-A (KR)
Title: 엔진 rpm상태에 따른 변속기 제어 시스템
Inventor: JUNG SUNG WOO
IPC: F16H59/14
Filed: 2013-12-30
Abstract: 본 발명은 트립컴퓨터 시스템과 변속기 제어 시스템이 서로 협조 제어하여 겨울철 차량 엔진 RPM이 높을 시 변속기 시스템이 자동으로 이것을 트립컴퓨터로 부터 인식하고 변속기를 조정 못하도록 Lock 걸어주는 시스템을 제공하는 것이다.본 발명에 따르면, 우선 겨울철 엔진 시동을 걸고 바로 출발할시 차량엔진 RPM의 수직상승으로 급출발 및 급발진이 일어날 수도 있는데 이런 상황을 방지해주고, RPM이 일정 수준으로 떨어져야 지만 변속이 가능하기 때문에 변속기 시스템과 엔진 관련 시스템을 보호 할 수 있고, 또한 제일 중요한 엔진에 무리한 충격이 가지 않기 때문에 기존 대비 더 수명이 길어져 수리해야 하는 정비기간을 늘리 수 있는 장점이 있다.
Patent KR-20130021448-A (KR)
Inventor: BALAKRISHNA AJIT
IPC: H01L21/3065
Filed: 2009-02-19
Abstract: 유동 이퀄라이저 판이 기판 공정 챔버에 이용하기 위해 제공된다.  유동 이퀄라이저 판은 유동을 차단하는 내부 구역 및 공정 가스의 통과를 허용하지만 활성 래디컬 또는 이온과 같은 공정 가스 내의 특정 요소를 보유하는 천공된 외부 구역을 구비한 고리형상을 가진다.  내부 및 외부 구역은 기판의 표면에 걸쳐 공정 가스의 유동을 밸런싱하도록 가변 방사상 폭을 가진다.  소정의 실시예에서, 유동 이퀄라이저 판은 공정 용적과 배기 포트 사이의 기판 지지부의 중앙선에 대해 배기 포트의 측방향 오프셋에 의해 챔버 유동 비대칭을 정정하기 위해 이용될 수 있다.
Patent KR-20130026476-A (KR)
Inventor: STORASTA LIUTAURAS
IPC: H01L29/78
Filed: 2011-06-17
Abstract: 이미터 측 (11) 의 이미터 전극 (2) 과 컬렉터 측 (15) 의 컬렉터 전극 (25) 사이에 다음의 층들을 포함하는 웨이퍼 (10) 를 갖는 전력 반도체 디바이스가 제공된다: (n-) 도핑된 드리프트 층 (3), 드리프트 층 (3) 과 컬렉터 전극 (25) 사이에 배열된 n 도핑된 제 1 영역 (81), 이미터 전극 (2) 과 직접 전기적으로 접촉하고, 드리프트 층 (3) 과 이미터 전극 (2) 사이에 배열된 p 도핑된 베이스 층 (4), 베이스 층 (4) 내에 매립된 이미터 측 (11) 에 배열되고 이미터 전극 (2) 과 접촉하는 n 도핑된 소스 영역 (6), 및 베이스 층 (4), 소스 영역 (6) 및 드리프트 층 (3) 으로부터 전기적으로 절연된 게이트 전극 (7).     이미터 전극 (2) 은 접촉 영역 (22) 내에서 베이스 층 (4) 및 소스 영역 (6) 과 접촉한다.     액티브 반도체 셀 (18) 이 웨이퍼 (10) 내에 형성되고, 이는, 소스 영역이 접촉하는 이미터 전극의 접촉 영역 (22) 의, 이미터 측 (11) 에 대해 직각 투영 방향으로 놓인 레이어들 또는 이러한 레이어들의 일부분들, 상기 소스 영역 (6), 도전 채널이 형성될 수 있는 베이스 층 (4) 의 일부를 포함한다.     디바이스는, 베이스 층 (4) 과 동일 평면에, 하지만 액티브 셀 (18) 외부에 배열된 p 도핑된 웰 (5) 을 더 포함한다.     웰 (5) 은 직접 또는 베이스 층 (4) 을 통해서 중 적어도 일방을 통해 이미터 전극 (2) 에 전기적으로 연결된다.
Patent KR-20130082146-A (KR)
Inventor: MAYER BERND
IPC: H01L33/20
Filed: 2011-06-17
Abstract: 발광 다이오드 칩을 개시한다.  그 발광 다이오드 칩은 - n형 전도성 반도체 층(3), - p형 전도성 반도체 층(4), - n형 전도성 반도체 층(3)과 p형 전도성 반도체 층(4) 사이의 활성 영역(2), - 측방으로 n형 전도성 반도체 층(3), p형 전도성 반도체 층(4), 및 활성 영역(2)과 접경하는 측면(14), - 발광 다이오드 칩의 반도체 재료에 도펀트가 도입된 도핑 영역(1), 및/또는 - 중화 영역(1)을 포함하는데, - 도핑 영역(1) 및/또는 중화 영역(1)은 적어도 활성 영역(2)의 영역에서 측면(14)에 형성되고, - 발광 다이오드칩은 동작 중에 비간섭성 전자기 방사선을 방사하도록 마련된다.
Patent KR-20130101064-A (KR)
Inventor: HIROSE HARUTO
IPC: H04W4/02
Filed: 2011-02-24
Abstract: 인증 시스템들을 위한 기술들이 일반적으로 설명된다.     일 예에서, 인증 시스템은, 피스들로 가상으로 티어링되는 이미지를 공유하는 것에 의해 디바이스들 중에서 구축될 수 있다.     상기 인증 시스템에서 각 참가자는 상기 이미지의 피스를 수신한다.     참가자들은, 피스들이 나중에 접합되어 원래 이미지를 형성할 때 인증된다.
Patent KR-20130097211-A (KR)
Inventor: LAMSON MICHAEL J
IPC: A61K31/485
Filed: 2011-10-25
Abstract: 본 발명은 오피오이드 유발 호흡 저하를 약화시키기 위한 조성물 및 방법에 관한 것이다.  상기 조성물은 오피오이드 및 격리된 (sequestered) 오피오이드 길항제를 다중 미립자 투여 제제 내에 포함한다.
Patent KR-20130097214-A (KR)
Inventor: DING JUNHUA
IPC: G05D7/06
Filed: 2011-09-28
Abstract: 미리 정해진 양의 가스의 순차적 펄스를 프로세스 툴에 전달하는 펄스 가스 전달 시스템으로서, (a) (i) 가스 전달 챔버; (ii) 대응하는 상기 가스 전달 챔버 내로의 컨트롤 가스의 유입을 제어하도록 연결된 유입 밸브; 및 (ⅲ) 대응하는 상기 가스 전달 챔버로부터 유출되는 가스의 양을 제어하도록 연결된 유출 밸브를 각각 포함하는 복수 개의 채널; 및 (b) 상기 각각의 채널의 상기 유입 밸브와 유출 밸브를 제어하여, 펄스 가스 전달 공정에 따라 미리 설정된 순서로 상기 가스의 펄스가 미리 정해진 양으로 상기 프로세스 툴에 제공될 수 있도록 구성된 전용 다중 채널 컨트롤러를 포함하는, 펄스 가스 전달 시스템.