Patent SG-11201809477W-A (SG)
Title: Fluorinated compositions for ion source performance improvement in nitrogen ion implantation
Inventor: CHAMBERS BARRY LEWIS
IPC: H01J37/317
Filed: 2017-05-10
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property 1111111111111111111111111111111111111111111111111111111111111111111111111111111 Organization International Bureau (10) International Publication Number (43) International Publication Date .....0\"\" WO 2017/196934 Al 16 November 2017 (16.11.2017) WIPO I PCT (51) International Patent Classification: 01821 (US). YEDAVE, Sharad N.; Entegris, Inc., 129 H01.137/02 (2006.01) H01J 37/317 (2006.01) Concord Road, Billerica, Massachusetts 01821 (US). (21) International Application Number: (74) Agent: KISSOON, Nidhi G.; Entegris, Inc., 129 Concord PCT/US2017/031894 Road, Billerica, Massachusetts 01821 (US). (22) International Filing Date: (81) Designated States (unless otherwise indicated, for every 10 May 2017 (10.05.2017) kind of national protection available): AE, AG, AL, AM, AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, (25) Filing Language: English CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, (26) Publication Language: English DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, (30) Priority Data: KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, 62/336,550 13 May 2016 (13.05.2016) US MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, (71) Applicant: ENTEGRIS, INC. [US/US]; 129 Concord PA, PE, PG, PH, PL, PT, QA, RO, RS, RU, RW, SA, SC, Road, Billerica, Massachusetts 01821 (US). SD, SE, SG, SK, SL, SM, ST, SV, SY, TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. (72) Inventors: CHAMBERS, Barry Lewis; Entegris, Inc., 129 Concord Road, Billerica, Massachusetts 01821 (US). (84) Designated States (unless otherwise indicated, for every TAOYUAN, Bling-Tsair Tien; Entegris, Inc., 129 kind of regional protection available): ARIPO (BW, GH, Concord Road, Billerica, Massachusetts 01821 (US). GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, SZ, TZ, - SWEENEY, Joseph D.; Entegris, Inc., 129 Concord Road, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, RU, TJ, Billerica, Massachusetts 01821 (US). TANG, Ying; En- TM), European (AL, AT, BE, BG, CH, CY, CZ, DE, DK, = tegris, Inc., 129 Concord Road, Billerica, Massachusetts EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LT, LU, LV, 01821 (US). BYL, Oleg; Entegris, Inc., 129 Concord Road, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, Billerica, Massachusetts 01821 (US). BISHOP, Steven E.; TR), OAPI (BF, BJ, CF, CG, CI, CM, GA, GN, GQ, GW, = _ - Entegris, Inc., 129 Concord Road, Billerica, Massachusetts KM, ML, MR, NE, SN, TD, TG). - (54) Title: FLUORINATED COMPOSITIONS FOR ION SOURCE PERFORMANCE IMPROVEMENT IN NITROGEN ION IM- = PLANTATION = (57) : Compositions, methods, and apparatus are described for car- =_ ion implantation, incidence lying out nitrogen which avoid the of severe _ glitching when the nitrogen ion implantation is followed by another ion im- = = 33 - plantation operation susceptible to glitching, e.g., implantation of arsenic 74 and/or phosphorus ionic species. The nitrogen ion implantation operation J =s = 44 s 75 is ion implantation advantageously conducted with a nitrogen composition introduced to or formed in the ion source chamber of the ion implantation = - system, wherein the nitrogen ion implantation composition includes nitro- (N2) do ant and a including one or more gen gas glitching-suppressing gas = = = _ _ 12 selected from the group consisting of NF3, N2F4, F2, SiF4, WF6, PF3, PF 5 , AsF3, AsF5, CF4 and other fluorinated hydrocarbons of C x y F (x?1, y>1) formula, SF6, HF, COF2, OF2, BF3, B2F4, GeF4, XeF2, 02, N20, general = 1, 1-1 42 71' 34 52 64 36 NO, NO2, N204, and 0 3 , and optionally hydrogen-containing gas, e.g., hy- drogen-containing gas including one or more selected from the group con- sisting of H2, NH3, N2H4, B2H6, AsH3, PH3, SiH4, Si2H6, H25, H2Se, CH4 and other hydrocarbons of C x y H (x>1, y>1) general formula and Gel - 14. en C:r 18 1-1 IN ,-1 © ei FIG. I O [Continued on next page] WO 2017/196934 Al MIDEDIMOMMIDIRMEMEEMIMINIEDOHMEDIMIE Published: — with international search report (Art. 21(3))