baber/WOPTO huggingface dataset:
Patent TW-I284571-B (TW)
Title: Water-cooling type cleaning device for cooling/shape-formation
Inventor: TSAI JIN-JU
IPC: B08B3/04
Filed: 2006-03-10
Granted: 2007-08-01
Abstract: The present invention provides a water-cooling type cleaning device for cooling/shape-formation. Mainly, by using a reciprocating waterjet device, plural cooling/shape-formation systems drench/spray overall in the way of gradually reducing the temperature onto the workpiece passed through, which is transported by a transporting system, so as to gradually reduce the temperature and form the shape beforehand. Then, the workpiece passes through the main cleaning-system, and is drenched/sprayed more powerfully with a much lower temperature by a reciprocating waterjet device. The main shape-formation system forms the shape correctly with a further lower temperature. The cleaning system blows with a certain air-flow pressure, and dries off the moisture on the surface of the workpiece. After the continuous action of each of the aforementioned system, the effect of complete cleaning/correct shape-formation/clean output of the workpiece is achieved.
Patent TW-I405980-B (TW)
Title: Apparatus, system and method for testing electronic elements
Inventor: LEE K R
IPC: G01R31/02
Filed: 2006-03-22
Granted: 2013-08-21
Abstract: An electronic element testing apparatus for use with a number of probes. Each probe has a lower pole and an upper pole. The apparatus includes: a first plate having a first side and a second side, the first side having an array of lower pole regions disposed thereabout, each lower pole region configured to receive a lower pole of a probe; and a plurality of signal conductor regions disposed proximate the array of lower pole regions, each signal conductor region arranged to provide a non-cable electrical path between a lower pole region and a switching circuit. The switching circuits are operable to sequentially connect each electronic element to a testing circuit via the upper and lower poles.
Patent TW-I416663-B (TW)
Inventor: MORIYA SATOSHI
IPC: H01L21/768
Filed: 2006-08-25
Granted: 2013-11-21
Abstract: A structure obtaining a desired integrated circuit by sticking together a plurality of semiconductor substrates and electrically connecting integrated circuits formed on semiconductor chips of the respective semiconductor substrates is provided, and a penetrating electrode penetrating between a main surface and a rear surface of each of the semiconductor substrates and a penetrating separation portion separating the penetrating electrode are separately arranged. Thereby, after forming an insulation trench portion for formation of the penetrating separation portion on the semiconductor substrate, a MIS•FET is formed, and then, a conductive trench portion for formation of the penetrating electrode can be formed. Therefore, element characteristics of a semiconductor device having a three-dimensional structure can be improved.
Patent TW-I341979-B (TW)
Title: Method and system for predicting shrinkable yield for business assessment of integrated circuit design shrink and related cost benefits predicting method
Inventor: FU CHUNG MIN
IPC: G06F17/50
Filed: 2007-05-02
Granted: 2011-05-11
Abstract: A method and a system for predicting shrinkable yield for business assessment of integrated circuit design shrink are provided. An assessment system is provided to determine cost benefits of a design shrink of an integrated circuit chip. A cost benefit analysis across different design shrink technologies is provided early in the process, so that business decisions regarding employment of design shrinks can be made as early as possible.
Patent TW-I409888-B (TW)
Title: Bonding tool with improved finish
Inventor: ITZHAKY HAREL
IPC: H01L21/60
Filed: 2007-06-29
Granted: 2013-09-21
Abstract: A bonding tool includes a body portion terminating at a tip portion. The tip portion is formed from a material, wherein a grain structure of the material is exposed for at least a portion of the tip portion.
Patent TW-I354102-B (TW)
Title: Method and arrangement for determining rotational
Inventor: HEIKKI JOENSUU
IPC: G01P3/00
Filed: 2007-12-18
Granted: 2011-12-11
Abstract: A method and arrangement for detecting rotational movement. The method comprises the steps of arranging a sensor (2) at the end of a rotation axle of a rotating object (1) and at a distance from the rotation axle, arranging a detector (3) external to the end of the rotation axle of the rotating object in such a manner that the distance between the sensor and detector changes as the object turns around its rotation axle, transmitting an poll to from the detector (3) to the sensor (2), receiving the poll at the sensor (2), and in response to receiving the poll, transmitting a reply from the sensor (2) to the detector (3), determining the power used in signalling, and detecting rotational movement on the basis of the change in signalling power.
Patent TW-I410024-B (TW)
Title: Voice coil motor
Inventor: CHOU TAI HSU
IPC: H02K41/02
Filed: 2008-05-02
Granted: 2013-09-21
Abstract: The invention relates to a voice coil motor. The voice coil motor includes a movable unit with coils and a fixed unit receiving the movable unit. The fixed unit is cylindraceous, and is formed of magnetic material in round wall thereof. The voice coil motor can increase the efficiency of the magnetic field by accommodating the coils into the cylindraceous fixed unit with magnetic wall there of.
Patent TW-I355767-B (TW)
Title: Miniaturized power divider
Inventor: TSENG CHEN TUNG
IPC: H01P5/16
Filed: 2008-05-09
Granted: 2012-01-01
Abstract: The present invention relates to a miniaturized power divider, which can be applied in the ultra-wideband (UWB) and conform to all of frequency bands of the worldwide interoperability for microwave access (WiMax). Particularly, it proposes a proper design of a minified Wilson power divider, which makes use of the open-stub capacitance compensation method to minify efficiently the Wilson power divider with a center frequency of 4.5GHz into a conventional circuit of 46%, and the bandwidth thereof is increased to 23.86. Accordingly, not only can the integral volume of the power divider be substantially minified, but also used in the products relevant to wireless communication systems of UWB and WiMax. It can be used in a more convenient way and the value of practical usage thereof will be increased as a whole.
Patent TW-I499560-B (TW)
Title: Verfahren zur herstellung von titandioxid
Inventor: GRUBER RAINER
IPC: C01G23/07
Filed: 2008-10-01
Granted: 2015-09-11
Abstract: The manufacture of titanium dioxide by oxidation of titanium tetrachloride in a plug flow reactor, wherein the titanium tetrachloride is introduced into the reactor in at least two stages and is used exclusively in liquid form. The total quantity of liquid TiCl4 used is split up in several stages. A small quantity is added in the first stage in order to start combustion despite using the liquid phase. In the first phase, the activation energy required is provided solely via the preheated oxygen. In all other stages, the activation energy is provided by the preheated oxygen and the reaction enthalpy of TiCl4 oxidation released in the upstream stages.
Patent TW-I354662-B (TW)
Title: Method of producing n-propyl acetate and allyl ace
Inventor: HATANAKA SHIGERU
IPC: C07C67/283
Filed: 2008-11-04
Granted: 2011-12-21
Abstract: The present invention provides a method of producing n-propyl acetate comprising producing allyl acetate by using propylene, oxygen and acetic acid as raw materials, and subsequently carrying out a hydrogenation reaction by using the allyl acetate as raw material that is an intermediate of a process for producing allyl alcohol by hydrolyzing the allyl acetate; wherein, the method comprises a photoirradiation treatment step and/or ozone treatment step, hi addition, the present invention provides a method of producing allyl acetate comprising producing allyl acetate by using propylene, oxygen and acetic acid as raw materials, and subsequently carrying out photoirradiation treatment on allyl acetate that is an intermediate of a process for producing allyl alcohol by hydrolyzing the allyl acetate.
Patent TW-I406731-B (TW)
Title: Welding structure of zr-rich bulk amorphous alloy and laser welding method for making the same
Inventor: SOHN KYOUNG-SUN
IPC: B23K26/24
Filed: 2009-08-14
Granted: 2013-09-01
Abstract: A laser welding method for making a welding structure of Zr-rich bulk amorphous alloy includes following steps. Firstly, a base member and a welding member are provided. Both of the base member and the welding member are made of Zr-rich bulk amorphous alloy. The welding member includes a welding portion. A thickness of the welding portion is in the range from about 0.46 millimeters to about 1.66 millimeters. Secondly, the welding member is welded to the base member by laser pulse in a cool shielding gas. The power of the laser pulse is not less than 3.5 kilowatts, and the welding speed is greater than 2 millimeter per second.
Patent TW-I440856-B (TW)
Title: Electronic circuit with a capacitive sensor for measuring a physical parameter and method of activating the electronic circuit
Inventor: DESCHILDRE ALEXANDRE
IPC: G01P3/483
Filed: 2010-02-25
Granted: 2014-06-11
Abstract: The circuit (1) has an integrator unit (5) for integrating charges supplied by a charge transfer amplifier unit and for supplying output voltage (Vm). An excitation unit (3) is arranged between an output of the integrator unit and a capacitive sensor (2). A circuit interface includes a dynamic comparator (30) for comparing the output voltage with comparison voltage (Vc) to control disconnection of a compensation capacitor (Cc) at an input of the integrator unit when deviation between the output voltage and the comparison voltage is above a determined voltage threshold. An independent claim is also included for a method for activating an electronic circuit.
Patent TW-I409204-B (TW)
Inventor: HORINO HIROMITSU
IPC: G01R31/26
Filed: 2010-04-27
Granted: 2013-09-21
Abstract: Disclosed is an electronic parts transfer system (30) for transferring a plurality of electronic parts (DUT) all together between one customer tray (100) and a plurality of contact plates (110).
Patent TW-I411079-B (TW)
Title: Semiconductor die and method for forming a conductive feature
Inventor: HWANG CHIEN LING
IPC: H01L21/60
Filed: 2010-10-12
Granted: 2013-10-01
Abstract: An embodiment of the disclosure includes a conductive feature on a semiconductor die. A substrate is provided. A bond pad is formed over the substrate. The bond pad has a first width. A polyimide layer is formed over the substrate and the bond pad. The polyimide layer has a first opening over the bond pad with a second width. A silicon-based protection layer overlies the polyimide layer. The silicon-based protection layer has a second opening over the bond pad with a third width. The first opening and the second opening form a combined opening having sidewalls to expose a portion of the bond pad. A UBM layer is formed over the sidewalls of combined opening to contact the exposed portion of the bond pad. A conductive feature overlies the UBM layer.
Patent GB-2483450-B (GB)
Title: Apparatus for marking a triangular aperture to be cut in a roof rafter
Inventor: COX DANIEL JAMES
IPC: B25H7/04
Filed: 2010-09-07
Granted: 2014-01-08
Abstract: An apparatus 24 for marking a triangular aperture 26 to be cut in a bottom edge 28 of a lower part 30 of a beam 8 of wood that is to form a roof rafter (6, figure 1) comprises: a first member 32 which in use rests on a top edge 34 of the lower part and extends downwards at least to the bottom edge 28 of the lower part; a second member 36 which in use extends vertically between the top and bottom edges; a third member 38 at right angles to the second member, which extends toward the bottom edge; and a first locking means 40 for locking the third member in a position such that it extends at least to the bottom edge. A first edge 42 of the second member is used to mark one side of the aperture and a first edge 44 of the third member is used to mark another side of the aperture. A fourth member 46 with a scale 48 of angles may extend between the first and second members, and a second locking means 52 may lock the first and fourth members together at a chosen angle from the scale.
Patent GB-2494484-B (GB)
Title: Method of manufacturing plastic article
Inventor: KUTLUOGLU OMER
IPC: B29C44/04
Filed: 2012-03-02
Granted: 2013-09-04
Abstract: A process for forming plastic into a predetermined shape from a plastic particulate, a heat-activated expandable foam plastic filler, and first and second outer skin, comprises: (i) providing first and second complementary mould parts (lower, upper); (ii) heating the first and second mould parts at least on their faces to a temperature of 100-500 degrees centigrade to make the plastic particulate material and the outer skin materials molten or sinterable; (iii) contacting the first and second mould parts with outer skin materials; (iv) contacting at least one of the outer skin materials with plastic particulate (lower inner skin); (v) contacting the heat-activated expandable foam plastic filler (core) to the plastic particulate or an outer skin; (vi) melting or sintering at least a portion of the outer skin and the plastic particulate on each mould part into a moulded skin; (vii) bringing together the complementary face portions of the heated first and second mould parts to form a composite sandwich. Fibres may be incorporated into or between the layers and may comprise a mat. The outer skin layers may comprise particulate material. The method may be used to produce automotive components and modular housing panels.
Patent GB-2494485-B (GB)
Title: Apparatus for boosting the pressure at which water is supplied from a mains water supply system to a consumer's water supply system
Inventor: LAMBDEN PETER
IPC: E03B7/07
Filed: 2012-03-14
Granted: 2013-12-04
Abstract: The invention relates to an apparatus 1 for boosting a mains 2 water supply pressure to a consumer's water supply system 3. The apparatus comprises inlet 10 and outlet 16 conduits connectable to a conduit of the mains water supply system; a flow detector 15 to detect a flow of water which indicates that water is being drawn through the outlet conduit by the consumer's water supply system; a main conduit 19 connected between the inlet conduit and the outlet conduit and a pump 12. The pump operates when the flow detector detects the flow of water, to begin pumping water through the main conduit 19; and a bypass conduit 17 connected between the inlet conduit and the outlet conduit. Later embodiments relate to a method and a kit of parts comprising the apparatus.
Patent GR-5874-B (GR)
Title: Τελειοποιησεις εις σχεδιας.
Inventor: GEORGE BUCHANAN BAILEY
Filed: 1936-01-08
Abstract: χεδία περιλαμβάνουσα εν δίκτυον ευκάμπτων σχοινίων, μίαν περιφέρειαν περικλείουσαν τα ρηθέντα εύκαμπτα σχοινία και αποτελούμενην εκ χαλυβδίνων συρμάτων ή παρομοίου τινός, και πλωτά μέλη προσδεδεμένα επί των συμπεπλεγμένων ή διασταυρουμένων σχοινίωντων σχηματιζόντων το σώμα του δικτύου, των ρηθέντωνπλωτών μελών όντων διατεταγμένων εις σειράς δίκηνεσχάρας και φερομένων μόνον υπό των εγκαρσίων σχοινίων της σχεδίας.
Patent GR-19183-B (GR)
Title: Μεθοδοι παρασκευης οργανικων ενωσεων.
Filed: 1954-09-04
Abstract: έθοδος δια την παρασκευήν ενώσεων, εις την οποίανοι τριαλκοξύ-κινναμωμικοί εστέρες της αλκυλο-ρεζερπικής ενώσεως παρασκευάζονται κατά τας συνήθεις μεθόδους εστεροποιήσεως.
Patent GR-20282-B (GR)
Title: Κατεργασια των υγρων των υπονομων.
Filed: 1959-05-07
Abstract: ημική οξείδωσις της υδατικής παχυρεύστου ιλύος ήτις προέρχεται εκ του ρηθέντος σταδίου βιολογικής κατεργασίας μέχρις ενός ποσοστού οξειδώσεως από 60 επί τοις εκατόν έως 85 επί τοις εκατόν και εξάτμισις ενός μείζονος τμήματος του ύδατος αποχωρισμός εκ των απομενουσών, αδιαλύτων εις το υγρόν ύδωρ υλών, ανοργάνου ιδία φύσεως και επαναφοράς εις το στάδιον βιολογικής κατεργασίας, του υπολειμματικού ύδατος το οποίον φέρει εντός αυτού τα απομένοντα οργανικά υλικά, υδατοδιαλυτής ιδία φύσεως, άτινα συνεκεντρώθησαν ούτω εις τα προηγούμενα στάδια.
Patent GR-32930-B (GR)
Title: Συνθεσις απορρυπαντικη.
Inventor: GRIFFITHS ALEXANDER
IPC: C11D1/14
Filed: 1967-05-20
Abstract: πορρυπαντική αφρώδης σύνθεσις - ουχί τύπου σάπωνος, χαρακτηριζομένη εκ του ότι δια της ενσωματώσεωςεντός της απορρυπαντικής συνθέσεως 1 έως 5% κατά βάρος ενός C8-C25 λιπαρού οξέος σάπωνος και 0.5 έως 4% κατά βάρος μιας C8-C25 αλιφατικής αλκοόλης, βελτιούται η ικανότης εκπλύσεως αύτης.
Patent GR-79543-B (GR)
Inventor: JONES G H
IPC: C07D487/04
Filed: 1984-02-15
Abstract: Compounds according to the formulaand the pharmaceutically acceptable acid addition salts thereof wherein:n is an integer of 1 to 6;R, is hydrogen or alkyl of 1 to 4 carbon;R<sub>2</sub> is hydrogen or R, and R<sub>2</sub> are combined to form a carbonyl group;R<sub>3</sub> is hydrogen, alkyl of 1 to 6 carbons, phenyl, benzyl, hydroxy lower alkyl and its acylates, carbamoyl alkyl, carboxyalkyl, alkoxycarbonylalkyl or amino acid side chains;R<sub>4</sub> is hydrogen, alkyl of 1 to 6 carbons, benzyl, or hydroxy lower alkyl;Y is hydrogen, alkyl of 1 to 4 carbon atoms, halo or lower alkoxy;is an amide forming group wherein the nitrogen substituents are: hydrogen; alkyl of 1 to 6 carbon atoms; hydroxyalkyl of 1 to 6 carbon atoms and its aliphatic acylates of 1 to 6 carbon atoms or aryl acylates of 7 to 12 carbon atoms; cycloalkyl of 3 to 8 carbon atoms or cycloalkyl lower alkyl of 4 to 12 carbon atoms wherein the cycloalkyl ring is unsubstituted or substituted with a lower alkyl, lower alkoxy, -OH, -OCOR<sub>5</sub>, halo, -NH<sub>2</sub>, -N(R<sub>5</sub>)<sub>2</sub>, -NHCOR<sub>s</sub>, -COOH, or -COO(R<sub>5</sub>) group wherein R<sub>s</sub> is lower alkyl; phenyl or phenyl lower alkyl wherein phenyl is unsubstituted or substituted with 1 or more lower alkyl, halo or lower alkoxy groups or an -NH<sub>2</sub>, -N(R<sub>5</sub>)<sub>2</sub>, -NHCOR<sub>5</sub>, -COOH, or -COOR<sub>5</sub> group wherein R<sub>5</sub> is lower alkyl; morpholinyl; piperidinyl; perhexylenyl; N-loweralkylpiperazinyl; pyrrolidinyl; tetrahydroquinolinyl; tetrahydroisoquinolinyl; (±)-decahydroquinolinyl or indolinyl. These compounds are cyclic AMP phosphodiesterase inhibitors useful as antithrombotic agents and the like in mammals. The compounds also have inotropic and anti-metastatic activities.
Patent GR-1000697-B (GR)
Inventor: BEELMAN RICHARD
IPC: F23K1/00
Filed: 1988-09-14
Abstract: Δια την καύσιν λιγνιτών με μεγάλη περιεκτικότητα γαιωδών προσμίξεων διακλαδίζεται από το ρεύμα σκόνης άν?ρακος το οποίον εγκαλείπει το μύλον το κλάσμα (ποσοστόν) των υγροποιημένων ατμών (πτητικών ουσιών) και διαχωρίζεται εις ένα φίλτρον υγροποιημένων ατμών. Το εκνέφωμα υγροποιημένων ατμών προσάγεται με την βοή?εια προω?ητικού αέρος εις ένα καυστήρα υγροποιημένων ατμών και εις ένα σωλήνα εισαγωγής υγροποιημένων ατμών ο οποίος είναι ενσωματωμένος (αποτελεί ενιαίον σύνολο) εις ένα κύριο καυστήρα. (Σχ. 1) ω
Patent GR-1001582-B (GR)
Title: Flexible pouch with folded spout
Inventor: DUNTON POWELL DAVID
IPC: B31B19/84
Filed: 1991-02-12
Abstract: A flexible pouch (10) formed from a single sheet of plastic material folded over upon itself along an umbrella like fold assembly (14) to provide the opposed walls of a chamber for storing a product and an optional second sheet to form the bottom of the chamber. The walls and the bottom are sealed along their periphery to form the chamber. The pouch has a self-opening spout (34) formed in part by the fold assembly which expands and springs open when the sealed end of the spout is cut off. The fold assembly (14) not only provides a large spout opening, but also provides a spring force which keeps the spout open so that all the product may be emptied from the chamber. <IMAGE>
Patent IN-172448-B (IN)
Inventor: HANSELMANN DANIEL
IPC: D01G7/10
Filed: 1988-12-22
Abstract: According to the invention, a fibre bale stripper 1.1, which travels in the direction of arrow A with the bale stripper element 30 over a row of bales 4 and, by means of the stripper rolls 6a and 6b, detaches fibre tufts from the surface of the bale rows, is operated with the stripper rolls set at an angle in order either to increase the productivity or, for the same productivity, reduce the tuft size. The stripper rolls 6a and 6b are set at an angle according to the invention in such a way that the penetration depth T.1 corresponds essentially to half the penetration depth T.2. These penetration depths can be achieved on the one hand by adjusting the position of the stripper element 30 in the direction D, specifically to achieve the stripping depth T.1, and on the other through the pivotability of the stripper element 30 about the pivot axis 33. 
<IMAGE>
Patent TW-I403399-B (TW)
Title: Method for cutting prepreg
Inventor: LIU HUA
IPC: B26D3/00
Filed: 2011-02-23
Granted: 2013-08-01
Abstract: The invention discloses a semi-solidified sheet cutting method which comprises the following steps that: a cutting device and a cutting auxiliary plate which is propped against the cutting device are provided; a second auxiliary side of the cutting auxiliary plate is connected with a first auxiliary side and a third auxiliary side and is vertical to the first auxiliary side; and an included angle between the first and the third auxiliary sides is 10 degrees. After a first side to be cut is propped against the third auxiliary side, the cutting device cuts a rectangular semi-solidified sheet along a direction which is in parallel with a preset direction of the first auxiliary side to form a first cut side. After a second side to be cut is propped against the third auxiliary side, the cutting device cuts the rectangular semi-solidified sheet along the preset direction to form a second cut side. The cutting device cuts the rectangular semi-solidified sheet along the direction which is in parallel with the direction of the first cut side. The cutting device cuts the rectangular semi-solidified sheet along the direction which is in parallel with the direction of the second cut side. Consequently, the impedance property of a circuit board which is manufactured from the semi-solidified sheet can be improved and the signal interference can be reduced.
Patent TW-I406944-B (TW)
Title: Glucose dehydrogenase and blood sugar measurement using thereof
Inventor: CHIEN LIANG JUNG
IPC: C12N15/53
Filed: 2011-06-23
Granted: 2013-09-01
Abstract: A novel glucose dehydrogenase is encoded by a nucleotide sequence as set forth in SEQ ID No: 1 or a nucleotide sequence having 95% or more homology to the nucleotide sequence as set forth in SEQ ID No: 1. The glucose dehydrogenase shows excellent thermostability, pH stability and substrate specificity and is useful in blood sugar measurement.
Patent TW-I626342-B (TW)
Inventor: HARMS HAIO
IPC: D01D5/06
Filed: 2012-11-20
Granted: 2018-06-11
Abstract: 本發明係關於具有以下性質之呈實心黏液扁平纖維形式的再生纖維素纖維：
 
     -該纖維係由超過98%之纖維素所構成。
 
     -該纖維之寬度B對厚度D之比率是10：1或更高。
 
     -該纖維表面基本上是平滑的。
 
     -該纖維基本上是透明的。
 
     依照本發明之纖維特別適用於製造紙。
Patent TW-I622547-B (TW)
Inventor: EIDLER WERNER
IPC: B66B23/12
Filed: 2014-08-21
Granted: 2018-05-01
Abstract: 本發明係關於一手扶梯之階梯(4)或一自動走道之板件(14)。此包括一踏板元件(40)及具有一底座(31)之一支撐主體(30)，其中該踏板元件(40)包括至少兩個子元件(41、42、43)，並且每一子元件(41、42、43)係藉由兩個平行端側(45、46)及兩個邊緣側(47、48、147、148)界定邊界在其區域範圍中，該平行端側(45、46)係沿著該階梯(4、304)或板件(14、114)之意欲移動的方向(X)延伸，且該邊緣側(47、48、147、148)係配置為正交該端側(45、46)。該至少兩個子元件(41、42、43)係以一預定序列配置在該支撐主體(30)的該底座(31)之上。配置為彼此鄰接的子元件(41、42、43)分別藉由其端側(45、46)之一彼此緊靠，其中先前配置在該底座(31)上之一子元件(41、42)係藉由接續配置在該底座(31)上之該個別的子元件(42、
43)固定至該支撐主體(30)。
Patent TW-I625599-B (TW)
Title: Substrate with multilayer reflective film, mask base, transfer mask, and method of manufacturing semiconductor device
Inventor: HAMAMOTO KAZUHIRO
IPC: H01L21/027
Filed: 2014-09-26
Granted: 2018-06-01
Abstract: 本發明提供一種附多層反射膜之基板、反射型光罩基底及半導體裝置之製造方法，該附多層反射膜之基板於使用高靈敏度之缺陷檢查裝置之缺陷檢查中，可抑制因基板或膜之表面粗糙度所致之疑似缺陷檢出，且可容易地發現異物及傷痕等致命缺陷。
 
     本發明係一種附多層反射膜之基板，其特徵在於：其係於用於微影之光罩基底用基板之主表面上具有交替地積層高折射率層與低折射率層而成之多層反射膜者，上述附多層反射膜之基板之表面以原子力顯微鏡測定3μm×3μm之區域所得的空間頻率為1μm -1 以上且10μm -1 以下之功率頻譜密度(PSD)之積分值I為180×10 -3 nm 3 以下，且空間頻率為1μm -1 以上且10μm -1 以下之功率頻譜密度(PSD)之最大值為50nm 4 以下。