Patent GB-1146472-A (GB)
Title: Micromanipulators
IPC: B23Q1/36
Filed: 1966-05-27
Abstract: 1,146,472. Linkwork; conveying rotary motion. PHILIPS ELECTRONIC & ASSOCIATED INDUSTRIES Ltd. 27 May, 1966 [1 June, 1965], No. 23946/66. Headings F2K and F2Q. [Also in Divisions G1 and H1] In a micromanipulator for adjusting the relative position of two bodies, one of the bodies is mounted on a frame and the other body is connected to the frame by a resilient member and is moved by means of a coupling to one end of a second resilient member, the other end of which is secured to an operating member. In a first embodiment, Figs. 1, 2 (not shown), and 3, a manipulator for positioning a semiconductor body relative to a mask comprises a framework supporting a platform 4 within which is mounted a table 6 supported by four resilient rods 7 which ensure that the top of the table remains parallel to the frame plate 1. The lateral position of the table is controlled by two operating members 13, 14 which have resilient rods 11, 12 fixed to their ends which are pivoted to the framework. The free ends of the resilient rods 11, 12 are connected to a boss 8 on the underside of the table 6 by coupling rods 9, 10. Movement of one of the control members rotates the end of the associated resilient rod, and a force is applied, via the coupling rod, to the table which moves a small distance against the restoring force supplied by the four resilient support rods 7. The transmission ratio is determined by the relative sizes and moduli of elasticity of the control and support rods. A similar mechanism is provided for rotating the table about its axis and comprises two resilient rods 24 mounted on discs 25 and connected by coupling rods 23 to rods 24 projecting from the boss 8. Both of the discs 25 are provided with gear rims 26 and are simultaneously rotated in the same direction by a single driving-gear 27 rotated by a control lever 28. The table is moved in a vertical direction by means of a control lever 31 which rotates a threaded bolt 30. Bolt 30 passes through a nut 32 secured to a plate 33 and its end engages a second plate 5 to which the table support rods 7 are secured. Both plate 5 and plate 33 are slightly resilient so that rotation of bolt 30 causes them to flex in opposite directions without distorting frame plate 1. The translational and rotational controls are provided with adjustable frictional couplings to the frame plate 1. The arrangement is also provided with a vacuum "hold-down" system controlled by three valves 36, 39, 42 which supply the vacuum to a groove 34 in the surface of platform 4, to a bore 37 in table 6 and to a resilient seal 40 between the platform 4 and the table 6 respectively. In a second embodiment, Fig. 4 (not shown), an apparatus for scribing a pattern comprises a scribing needle (73) carried above a table (57) by a framework (60) mounted on the end of a rigid rod (50) which is supported by two diaphragms (51) within a cylinder (52) which is itself supported by four resilient rods (53) mounted on a framework (55) to which the table (57) is attached. A resilient rod (62) forms an extension of the rigid rod (50) and carries at its lower end a plunger (65) which slides within a sheath (67). The sheath (67) has a pointer (72) mounted at its end and is slotted lengthwise to allow the movement of a spring (66) attached to the plunger (65). A second spring (66) is attached to the rod (62) above the sheath and two springs (69) are attached to the ends of the sheath (67). The outer ends of the four springs are secured to a common holder (71). In use lateral movements of the pointer (72) cause the resilient rod (62) to be bent against the restoring force of the four resilient supportrods (53) so that the top end of the rod (62), and hence the scribing needle (73), is moved to a smaller extent thus producing the reduced transmission ratio. Longitudinal movements of the pointer cause the sheath (67) to move relative to the rod (62) and the spring system applies a force to the rod (62) which is moved to a reduced extent against the restoring force provided by the diaphragms (51).