baber/WOPTO huggingface dataset:
Patent KR-19980081252-A (KR)
IPC: C23C4/10
Filed: 1998-04-09
Abstract: The present invention concerns a press roll, in particular a centre roll, for a paper/board machine, a method for manufacture of the roll, and a composition of the coating of the roll for difficult corrosion conditions. Onto the frame part (1) of the roll, an adhesion/corrosion-protection layer (2) of a thickness of 150...300 mu m has been applied out of a nickel-chromium alloy by means of the high-velocity flame spraying technique (HVOF), onto the adhesion layer (2) a tight-ceramic layer (3) of a thickness of 50...150  mu m has been applied by means of the high-velocity flame spraying technique, which layer (3) consists of 50...100 % of Al2O3 and of 0... 50 % of TiO2, or, alternatively, of 0...100 % of Al2TiO5, and onto the tight ceramic layer (3) a porous ceramic layer (4) has been applied. <IMAGE>
Patent KR-19990080532-A (KR)
Title: 웨이퍼 상에 형성시킨 패턴의 선폭측정방법
IPC: H01L21/66
Filed: 1998-04-17
Abstract: 본  발명은  주사전자현미경(SEM)을  이용한  패턴의  선폭의  측정의  수행시  발생하는  전하축적현상을  최소화시킨  웨이퍼  상에  형성시킨  패턴의  선폭측정방법에  관한  것이다. 
     본  발명은,  주사전자현미경(SEM)을  이용하여  웨이퍼  상에  형성시킨  패턴의  선폭을  측정하는  웨이퍼  상에  형성시킨  패턴의  선폭측정방법에  있어서,  상기  선폭을  측정할  수  있는  패턴이  형성된  측정영역에  인접하는  인접영역의  이미지를  설정된  조건으로  포커싱한  후,  상기  포커싱이  이루어진  설정된  조건으로  상기  측정영역의  이미지를  포커싱하는  것을  특징으로  한다. 
     따라서,  주사전자현미경을  이용한  패턴의  선폭의  측정을  용이하게  수행할  수  있음으로  인해  반도체소자의  신뢰도가  향상되는  효과가  있다.
Patent KR-19990013355-A (KR)
Title: 반도체 집적 회로 장치의 입력 초단 회로 구동 방법, 반도체집적 회로 장치 및 반도체 기억 장치의 제어 장치
IPC: G11C11/409
Filed: 1998-04-21
Abstract: 본 발명은 입력 초단 회로의 소비 전력의 저감을 꾀할 수 있는 반도체 집적 회로 장치를 제공한다.  내부 펄스 발생 회로(24)는 외부 클록(CLK)을 입력하여 내부 클록(CLK2)을 생성하고 래치 회로(22)와 구동 신호 발생 회로(25)로 출력한다.  래치 회로(22)는 내부 클록(CLK2)의 주기로 입력 초단 회로(21)로부터의 데이터를 수신한다.  구동 신호 발생 회로(25)는 내부 클록(CLK2)과 칩 선택 신호(XCS)로 구동 신호를 생성하여 입력 초단 회로(21)에 출력한다.  입력 초단 회로(21)는 구동 신호(S1)에 따라서 주기적으로 동작 상태와 비동작 상태로 제어된다.
Patent KR-19980033626-A (KR)
Title: 무선호출기와 시티폰을 이용한 도난차량 위치 확인장치.
Filed: 1998-04-24
Abstract: 본 발명은 무선호출기의 수신기능과 시티폰의 송신기능을 이용하여 이미 도난 된 차량의 위치를 확인하거나 추적하는 도난차량 위치 확인장치에 관한 것으로,  수신율이 뛰어나고 고유의 식별번호를 갖는 무선호출기(pagers)와, 차량번호 및 경보코드 데이터가 기억된 메모리부와, 무선호출에 응하여 상기 데이터를 시티폰 기지국으로 전송하는 시티폰(CT-2 PHONE)을 유기적으로 결합하여 소형의 위치확인 장치를 구성한 다음 차량의 은밀한 곳에 설치하여 차량이 도난 된 경우 일반전화기(무선전화기를 포함)를 이용하여 무선으로 호출하면 위치확인 장치가 대기 상태로 있는 시티폰을 동작(SWITCH OVER)시켜 인근의 시티폰 기지국과 무선링크를 설정하게 되며, 무선 링크가 설정되면 위치확인 장치의 메모리부에 기억된 차량번호와 경보코드가 시티폰 기지국으로 전송된 다음 무선링크가 단절되며, 무선링크 단절과 동시에 시티폰 기지국은 시티폰 관리장치와 접속을 시도하여 접속이 이루어지면 상기 차량번호와 경보코드 이외에 시티폰 기지국 자신이 갖고 있는 IㆍD를 같이 전송하게 되며, 시티폰 기지국 관리장치는 차량번호와 경보코드 및 시티폰 기지국 IㆍD에 따른 위치 정보를 관리서버(SEVER)로 전송하게 되며, 따라서 관리서버에서는 차량의 현재위치(이동위치 및 정지위치)를 신속히 확인할 수 있어서 도난차량을 조기에 회수할 수 있어서 범죄 등의 목적으로 이용되는 것을 조기에 차단할 수 있다.
Patent KR-20000001305-A (KR)
Title: Distortion compensation device due to voltage shift and method thereof
Inventor: JU SEONG CHEOL
IPC: H02M1/44
Filed: 1998-06-10
Abstract: PURPOSE: A distortion compensation device due to voltage shift and method thereof is provided to perform stable operation and improve reliability though great voltage shift is generated in the transmitter using cartesian feedback loop. CONSTITUTION: The distortion compensation device due to power shift comprises: a voltage recognition unit(100) lowering input voltage within the operation voltage of an A/D converter(200); an A/D converter(200) generating digital signals corresponding to the voltage; a controller(300) controlling a attenuation/amplification unit(420) if input voltage is out of allowable range; a demodulator(410) restoring signals inputted from the attenuation/amplification unit(420) and a phase controller(700) into I/Q signals; a down converter(400) consisted of the attenuation/amplification unit(420) controlling level according to the signal inputted from the controller(300); a loop filter(500) filtering the I/Q signals and feed back signals; au up converter(600) consisted of a modulator(610), an attenuator(620) and an amplifier(630); and a phase controller(700) controlling the pulse phase generated from a local oscillator and inputting it to the demodulator(410).
Patent KR-20000001368-A (KR)
Title: Measuring method for horizontal average speed of current of rivers
Inventor: JANG HAK SU
IPC: G01F1/00
Filed: 1998-06-10
Abstract: PURPOSE: A method is provided to measure the horizontal average speed when measuring the current of a river. CONSTITUTION: The measuring method for the horizontal average speed V of the current of a river comprises: a selection S of current measurement selected in a right angle to the direction of a river flow; a firing conversion device installed in the selected depth of water, to fire supersonic waves toward the selection S in one edge of the river; two receiving conversion devices separated in an L interval in the line of being a right angle to the election S in the other edge of the river; a propensity interval of supersonic waves measured.
Patent KR-20000001708-A (KR)
Title: Fan filter device of clean room
Inventor: JI JUNG HAE
IPC: B01D46/00
Filed: 1998-06-12
Abstract: PURPOSE: A fan filter device of a clean room is provided to improve the reliability according to the production of a semiconductor device by minimizing defects according to the effective operation of airflow of the clean room. CONSTITUTION: A fan filter device of a clean room comprises: a fan(22) to operate due to the drive of a motor(20) and the motor(20); an airflow conductive plate(24) that the center of the airflow conductive plate(24) is opened to prevent the vibration of the fan filter device(2) at the lower part of the fan(22), also to conduct the air flow; a filter(26) for filtrating the particles existing inside air, at the lower side of the fan filter device(1), an entrance end where the air enters the clean room; a branching plate(28) so the flowed air into the filter(26) as to have a steady flow on the upper part of the filter(26).
Patent KR-20000002680-A (KR)
Title: Flow passage structure of dish washer with integral typed pump equipped
Inventor: KIM SHIN YONG
IPC: A47L15/00
Filed: 1998-06-22
Abstract: PURPOSE: A flow passage structure of a dish washer with an integral typed pump equipped is provided to discharge dregs automatically and easily. CONSTITUTION: The dish washer comprises; upper and lower baskets(43)(45) to contain dishes(P); upper middle and lower ejecting nozzles(47)(49)(51) to eject washing water on the dishes; an ejecting pipe(53) to guide washing water ejected inward washer tub(41); a collection tank(55) to collect washing water; a common filter(57) to strain out rough residue and a fine filter(59) to filter fine residue.
Patent KR-20000003954-A (KR)
Title: Method for forming silicide conductive line of semiconductor devices
Inventor: KIM HYUN SOO
IPC: H01L21/265
Filed: 1998-06-30
Abstract: PURPOSE: A forming method of silicide conductive lines is provided to prevent an impurity diffusion and reduce a resistivity of the conductive line by making amorphous the silicide layer. CONSTITUTION: The method comprises the steps of: sequentially depositing a gate polysilicon layer(12) doped phosphorous and a tungsten silicide layer(13) on a silicon substrate(10); making amorphous the silicide layer(13) by ion-implanting to the silicide layer; patterning the tungsten silicide layer(13) and the gate polysilicon layer(12) using en etching mask for forming a gate electrode; and recrystallizing the amorphous silicide layer by performing an annealing process.
Patent KR-20000004582-A (KR)
Title: Doctor blade of a picture forming device
Inventor: LEE YUN SEOK
IPC: G03G15/08
Filed: 1998-06-30
Abstract: PURPOSE: A doctor blade of a picture forming device is provided to always control a developing layer of a developing roller with a constant height. CONSTITUTION: The doctor blade of a picture forming device comprises: a first step(20) of processing the basic material of a metallic characteristic which is capable of contacting on a development roller; a second step(30) of performing a grit blaster processing for a plane contacted with the development roller of the basic material; a third step(40) of coating the contact plane; a fourth step of polishing the contact plane; and a fifth step(60) of again performing the grit blaster processing after the fifth step.
Patent KR-20000009925-A (KR)
Title: Channel encoding method of reverse wireless link for two-way wireless paging system
Inventor: KIM SHIN JAE
IPC: H04B5/04
Filed: 1998-07-29
Abstract: PURPOSE: A channel encoding method of a reverse wireless link for a two-way wireless paging system is provided to maximize a transfer efficiency and increase an available channel volume. CONSTITUTION: A message is formatted by using RS(Reed-solomon) parity bit and data during transmitting, and the received data is inputted in a RS decoder. After an error correction by the RS decoder, both information data portions(220, 240) and parity portions(230, 250) are stored, the stored data is re-inputted in the RS decoder. sequentially, an error of the re-inputted data is detected by a syndrome test. The error correction and error detection processes are performed at the same time by using only parity bit of the RS coding. Therefore, the total transfer efficiency is increased by reducing the number of bits for channel coding of a reverse transfer data, and an error detecting ability is enhanced by a syndrome test.
Patent KR-19980081985-A (KR)
Title: 상하 이중 캔
Filed: 1998-08-11
Abstract: 캔 내부를 수평격벽에 의해 상하로 분리하고 캔 상하면에 따개를 별도로 형성하여 캔 상하 내면에 동일 음료를 소량씩 나누어 넣거나 다른 종류의 음료를 넣어서 소량씩 또는 취향에 따라서 선택적으로 음용할 수 있게 하고 상하 한쪽면을 따서 음료수를 마시다가 남은 것이 있거나 다른면을 따서 마실때에 마신쪽면을 플라스틱 보조마개로 덮었다가 마실수 있도록 된것이다.
Patent KR-20000014787-A (KR)
Title: Broadcasting channel setting control method
Inventor: KIM CHANG JIN
IPC: H04N5/50
Filed: 1998-08-25
Abstract: PURPOSE: A broadcasting channel setting control method is provided to improve a set productivity by automatically memorizing all of broadcasting channels of a corresponding area when a user pushes a channel memory button. CONSTITUTION: The broadcasting channel setting control method comprises the steps of: reading a corresponding area address recorded in an option part when a power is supplied to a television receiver or a system of a video cassette recorder; comparing data of a channel receiving method of each area in order to check whether or not whether the read address is an address of an any type from a broadcasting fashion table, when a control part reads an address of a corresponding area; and extracting channel data corresponding to the corresponding area to perform an automatic channel recording operation.
Patent KR-19990029912-A (KR)
Title: 데이타 구조 식별 방법 및 기록 매체
IPC: G06F9/46
Filed: 1998-09-18
Abstract: 데이타 구조 식별 방법에 있어서, 오브젝트들 및/또는 데이타 구조들은 식별자에 의해 구별된다. 그 식별자는 어드레스의 장소에 인덱스를 이용하여 형성되어, 어드레스를 나타내는 필요한 비트 수를 감소시킨다. 인덱스와 어드레스 사이의 관계를 나타내기 위해 테이블이 이용된다. 식별자가 시간축 상에 유일하게 존재하도록 보정하기 위하여, 인덱스는 시간 스탬프 또는 카운터와 조합된다. 식별자는 오브젝트 식별자 OID 포맷 비트 및/또는 예약된 비트와 같은 포맷 결정부를 더 포함하는데, 이는 네트워크 어드레스의 존재 또는 부재를 검출하는데 이용된다. 따라서, 그 식별자는 확장 가능한 시스템에 응용될 수 있다. 결과적으로, 단지 적은 수의 비트들이 요구되고, 고레벨의 시스템 성능이 보유될 수 있는 데이타 구조 식별 방법을 제공할 수 있다. 또한, 상술한 식별 방법을 구현하는 프로그램이 기록된 기록 매체가 제공된다.
Patent KR-20000021192-A (KR)
Title: Portable phone having user's incoming call and alarm call designating functions and control method thereof
Inventor: AWE WON
IPC: H04B7/26
Filed: 1998-09-26
Abstract: PURPOSE: A Portable phone having user's incoming call and alarm call designating functions and control method thereof are to provide user with arbitrarily recordable functions of incoming call and alarm call. CONSTITUTION: As a signal is input through an input part(70) to a control part(80), the control part determines whether the input signal is for the user to designate an incoming call or alarming call. When it is determined that the input signal is for the user to designate the incoming call or alarming call, the control part controls a display part(110) to display the start of the recording of the incoming call or alarming call and prepares the recording. A ready count is displayed on the display part and simultaneously an alarming sound informing the start of the recording is output through a speaker(22). A music or voice is input through a microphone(21) and is transmitted into a signal processing part(30). The signal processing part converts the input analog signal of music or voice into a digital signal and outputs the converted digital signal to a first memory(40). The first memory stores the digital signal by the control of the control part. The control part controls the first memory to output the stored digital signal for the incoming call or the alarming call when a call is received.
Patent KR-20000021587-A (KR)
Title: Car monitoring system
Inventor: BAE BANG HUI
IPC: G08G1/02
Filed: 1998-09-30
Abstract: PURPOSE: A car monitoring system is provided to remove a conventional inaccurate erroneous sense by accurately sensing a kind of all cars based upon a wheel position. CONSTITUTION: A passage sensing unit(110) and a wheel position sensing unit(120) is installed on a road on which a car is being moved. The passage sensing unit(110) has a luminescent unit(111) for emitting a light by a power, and a light-interception unit(112) for transmitting a car pass signal to a car monitoring system. The wheel position sensing unit(120) has a light source(121) for emitting a light having a uniform wave and a plurality of optical fibers(122) for passing the light and sensing a change of the wave by a pressure of a car wheel. The light source(121) is connected to one side of a plurality of optical fibers(122). A car detecting means is connected to a CCD(Closed Circuit Display)(300) for monitoring a lane or a speed of a car.
Patent KR-20000026947-A (KR)
Title: Rom table device of numerically controlled oscillator
Inventor: IM KWANG WU
IPC: H03L7/08
Filed: 1998-10-24
Abstract: PURPOSE: A ROM(Read Only Memory) table device of an NCO(Numerically Controlled Oscillator) is provided to reduce the size of the ROM table, by extracting a compensation value using a cycle of sine and cosine ROM tables. CONSTITUTION: A ROM(Read Only Memory) table device of an NCO(Numerically Controlled Oscillator) comprises a selection signal generator, a selection signal delaying unit, an address controller, sine/cosine ROMs, a compensatory measure delaying unit, and a phase compensatory measure output. The selection signal generator generates an address selection signal and sine/cosine output selection signals among addresses outputted from a phase accumulator. The selection signal delaying unit outputs a selection signal outputted from the selection signal generator by delaying the selection signal in regular time. The address controller subtracts a lower predetermined bit among the addresses with an arbitrary standard value, and selects/outputs one of the addresses according to the address selection signal. The sine/cosine ROMs outputs the pre stored sine/cosine phase compensatory measures. The compensatory delaying section delays the sine/cosine phase compensatory measures. The output selects the outputted sine/cosine compensatory measures according to a sine/cosine output selection signal, and outputs to the sine/cosine phase compensatory measures.
Patent KR-20000031921-A (KR)
Title: Controller for shift locking of transmission lever of automatic transmission
Inventor: YU KWANG SEOK
IPC: F16H63/34
Filed: 1998-11-11
Abstract: PURPOSE: A shift locking device of a transmission lever of an automatic transmission is provided to promote the sensing of speed change and to prevent the misoperation of a transmission lever in advance due to the mistake of a user in a vehicle equipped with an automatic transmission. CONSTITUTION: A controller reads the output of a sensor for detecting angle of a crank and detects the rotation state of an engine if a shift locking device of a transmission lever of a vehicle with an automatic transmission is operated(101). If the engine is determined to be rotating, the controller reads the output of a speed sensor and senses the traveling state of a vehicle(102). If the vehicle is not traveling, the controller detects if a brake switch is turned on(103). If the brake switch is turned on, the controller detects the position of a transmission lever by being input with the signals supplied from a sensor for detecting the position of the transmission lever(104). The controller transmits a predetermined shift locking canceling signal CTL to a shift locking canceling actuator(105) if the position of the transmission lever is corresponding to any of 'P','N','R'.
Patent KR-20000031927-A (KR)
Title: Structure of preventing backward flow of oil for linear compressor
Inventor: CHOI GI CHEOL
IPC: F04B17/04
Filed: 1998-11-11
Abstract: PURPOSE: A preventing structure of backward flow of oil of a linear compressor is provided to prevent the abrasion of a cylinder by remaining oil at the sliding part between the cylinder and a piston when a compressor restarts after suspension. CONSTITUTION: An oil filled in the bottom of a closed vessel by an oil feeder vibrating horizontally with a compressing unit, and flows into an oil inflow path(11) of a frame(10) if a compressor is started. The inflow oil is filled in a first oil pocket(12) between the frame and a cylinder(20), flows to a second oil pocket(31) via an oil passage hole(21) of the cylinder by the continuous operation of the compressor, and lubricates the sliding part between the cylinder and a piston(30). Thereafter, the oil is taken out to the first oil pocket via the oil passage hole, circulates while cooling a venting cover along an oil circulating path with the oil filled in the first oil pocket, and then returns to the closed vessel.
Patent KR-20000032673-A (KR)
Title: Liquid crystal display projector
Inventor: NOH JEONG HO
IPC: G03B21/00
Filed: 1998-11-17
Abstract: PURPOSE: A liquid crystal display projector is provided to decrease the occupation region inside projector device by providing a lens unit to deflect an angle of an axis of light. CONSTITUTION: A liquid crystal display projector includes a light source(210), a picture source, and a projection unit(230). The picture source generates a picture light by way of the projection lens unit(230). The projection lens unit(230) includes a first lens group(L-I), an optical path converter, and a second optical light group(L-II) to focus the picture light. The optical path converter is to deflect the axis of light passing the first projection lens unit(230). The second optical lens unit(L-II) focuses the optical light by way of an optical converter. The focused optical light is to be magnified and projected on the screen(200).
Patent KR-20000032698-A (KR)
Title: Method of igniting gas boiler in hot-water mode to boil water rapidly
Inventor: PARK JAE KYEONG
IPC: F24H1/00
Filed: 1998-11-17
Abstract: PURPOSE: A method of igniting a gas boiler in a hot-water mode is provided to feed hot water rapidly by shortening the ignition time of a boiler. CONSTITUTION: A boiler is started in a hot-water mode. A pre-purge process that an exhaust fan starts to rotate and the residual gas in a burner is exhausted is performed. Gas is fed to the boiler by turning on a gas valve, and an ignition plug is turned on for 12 seconds. Then, water is boiled by igniting the gas through the continuous detection of ignition. If a flame has not been ignited to the gas for 12 seconds, the post-purge process is performed for 3 seconds. The gas is supplied again and the ignition plug is turned on to ignite the gas. The entire ignition time is reduced if the post-purge process is shortened so that hot water is supplied rapidly.
Patent KR-20000033000-A (KR)
Title: Free information service using telephone communication network
Inventor: CHOI HAE JIN
IPC: H04M15/00
Filed: 1998-11-16
Abstract: PURPOSE: A free information service using the telephone communication network is provided to improve the method to transmit information through the existing information newspaper and the method to collect service charges between an information provider and an information user. CONSTITUTION: An information provider informs an information transmitter of his information and telephone number, and receives an intrinsic code from the information transmitter. If the information provider contacts an information user on phone call, and the result is satisfactory, the information provider contacts an information transmitter to interrupt the telephone circuit of collect call. The information provider pays the information transmitter for basic charges + collect call service charges. The information user uses information, after calling to the information provider.
Patent KR-19990045503-A (KR)
IPC: C07D213/803
Filed: 1998-11-23
Abstract: A method for the production of nicotinic acid (I) involves spray-drying an aqueous solution of ammonium nicotinate to form (I) followed by thermal treatment in a fluidized bed at 100-200 (preferably 130-170) degrees C or under reduced pressure (preferably at below 50 mbar) at 70-150 (preferably 80-120) degrees C.
Patent KR-20000034168-A (KR)
Title: Washing machine
Inventor: SHIN SEONG JAE
IPC: D06F39/12
Filed: 1998-11-27
Abstract: PURPOSE: A washing machine is provided to reduce a vibration or a balance by maximizing the centrifugal force in the middle part of a dehydrating container at a washing and a dehydrating, and without raising the laundry upward the dehydrating container. CONSTITUTION: After a user inputs the washing into a dehydrating container(1), a washing operation is started. A rotating current is formed by rotating a pulsator(54). The laundry is raised via a wall of the dehydrating container(1) during rotating according to the rotating current. The rising of the laundry is formed until a 'C' point as a middle part of the dehydrating container(1). When the washing is not risen over the 'C' point as the middle part of the dehydrating container(1), a weight is concentrated in the middle lower part of the dehydrating container(1) and the balanced maintenance of the dehydrating container(1) is easy. Because a balancer(2) is installed in the 'C' point as the middle part of the dehydrating container(1) and a distance 'D' between the balancer(2) and the pulsator(54) as a center of the rotation is shorter than an existing washer, the shaking by the self weight of the balancer(2) is small.
Patent KR-19990024127-A (KR)
Title: 취사용 전기압력솥의 증기배출장치
IPC: A47J27/09
Filed: 1998-12-09
Abstract: 본 발명은 취사용 전기압력솥의 증기배출용으로 발명된 상시열림식 안전밸브 내장형 솔레노이드 밸브로서 정상적인 취사시에는 솔레노이드를 이용하여 증기통로인 오리피스를 개폐작용을 하게 되고 취사중 압력솥 내부의 전기적인이상 또는 다른 외적인 요인에 의해 필요이상의 압력이 발생되면 안전밸브가 기구적으로 작동하게 되어 증기를 외부로 배출시켜주는 장치이다. 
     그 구성은 대략 코일부, 작동부, 몸체부, 안전밸브로 이루어지고 몸체부는 압력솥의 증기 배출용으로 증기압력의 유체흐름통로에는 입구측과 출구측을 설치하고 그 중앙에 전기적인 신호에 의해 다이아푸렘시트가 일치선상에 안전밸브용 오리피스를 상반되게 설치하여 별도로 형성된 다이아푸렘시트가 스프링의 기구적인 힘에 의해 안전밸브 오리피스를 개폐하게되는 상시열림식 안전밸브내장 솔레노이드 밸브를 제공하고자 한다.
Patent KR-20000039842-A (KR)
Title: Circuit for sensing misalignment of focus in stepper
Inventor: KWON O HEON
IPC: G03F7/20
Filed: 1998-12-16
Abstract: PURPOSE: A circuit is provided to sense a misalignment of focus in a stepper and thereby to prevent inferiority of a semiconductor device. CONSTITUTION: A stepper which is a kind of an exposure equipment is for transcribing an image of a reticle into circuit pattern of a wafer placed on a wafer stage. In a sensing circuit(10), a first input terminal(11) receives a shutter driving pulse signal, and a second input terminal(12) receives a stage driving pulse signal. When the wafer is subjected to an exposure process, the shutter driving pulse signal is high and the stage driving pulse signal is low. Further, when the wafer stage is moved to align the wafer, the shutter signal is low and the stage signal is high. Accordingly, such normal pulse signals become a low signal via an AND gate(15). However, if the wafer stage is vibrated while the shutter is opened, a certain high signal is generated in the low stage driving pulse signal. Therefore, two pulse signals are all in high level, and an output signal of the AND gate(15) is also in high level, so that a display part(16) indicates a poor operation.