baber/WOPTO huggingface dataset:
Patent KR-20110076729-A (KR)
Title: Multi-step exposed image acquisition method by electronic shutter and apparatus using the same
Inventor: KIM IL DO
IPC: H04N5/335
Filed: 2010-04-16
Abstract: PURPOSE: A photographing device using a multi phase exposure image acquiring method using an electronic shutter are provided to enable a user to recognize an optimal exposure value in a preview image. CONSTITUTION: An image is currently inputted through a current lens. The image is displayed through a display unit in a preview mode(S600-Y,S620). An area in which a multi step exposure is applied is established(S640). An exposure is corrected based on the established area(S650). The corrected exposure value is applied(S670).
Patent KR-20110115844-A (KR)
Inventor: OH SONG TAEK
IPC: H01M10/0525
Filed: 2010-04-16
Abstract: 본 발명은 하기 [화학식 1]로 표시되는 층상 구조의 리튬 화합물을 양극활물질로 포함하는 리튬이차전지의 사이클 성능 개선 방법에 있어서, 포메이션 단계에서 평탄준위 이상의 고전압 활성화 단계를 거친 이후, 상기 셀이 평탄준위 이하에서 작동할 경우, 주기적으로 상기 평탄준위 이상의 고전압 사이클을 삽입함으로써, 사이클 퇴화를 효과적으로 재생할 수 있는 리튬이차전지의 사이클 성능 개선 방법에 관한 것이다.   
[화학식 1] Li(Li x M y   -   y' M' y' )O 2-   z A z 	 
(상기 식에서, 0<x<0.5,	0.6<y<1.1,	0≤y'<0.2,	0≤z<0.2이고;  
M은 Mn과, Ni, Co, Fe, Cr, V, Cu, Zn 및 Ti으로 이루어진 군에서 선택되는 1종 이상을 포함하는 것이며; 
M'는 Al, Mg 및 B로 이루어진 군에서 선택되는 1종 이상이고, 
A는 F, S 및 N로 이루어진 군에서 선택되는 1종 이상이다.) 
본 발명에 의하면, 고전압 과충전에 의한 셀의 활성화 이후, 전해액 부반응을 회피하기 위하여 저전압에서 작동시킬 경우 발생할 수 있는 지속적인 용량 감소 문제를 해결하여, 사이클 증가에 불구 꾸준하게 고용량 유지가 가능한 리튬이차전지를 제공할 수 있다.
Patent KR-20110116772-A (KR)
Inventor: LEE JI SOOK
IPC: G06F15/16
Filed: 2010-04-20
Abstract: 본 발명은 로컬 호스트에서 파일 입출력 및 네트웍 입출력이 집중되는 부담을 줄임으로써 분산 빌드시 발생하는 IO 처리 지연시간을 줄이고, 결과적으로 분산 빌드 시스템의 성능을 개선할 수 있는 방안으로 버전관리 시스템에 연동되는 분산 빌드 시스템 구성 및 해당 시스템을 구현하기 위한 시스템의 동작 방법, 상기 방법을 실현시키기 위한 프로그램을 기록한 컴퓨터로 읽을 수 있는 기록매체를 제공하기 위한 것으로서, 네트웍으로 연결 가능한 다수의 호스트 정보를 관리하고 해당 정보에 따라 빌드를 요청하는 호스트에 빌드 작업을 수행할 수 있는 호스트 목록을 분배하는 분산빌드 서버와, 빌드 가능한 임의의 프로젝트에 대한 모든 파일을 저장하고, 각 파일에 대한 버전 및 변경내역 정보를 포함하는 버전관리 리파지터리와, 사용자로부터 분산 빌드 요청받은 빌드에서 처리해야할 작업 목록을 수집하고, 각 작업 빌드에 필요한 파일 목록을 수집하여 분산빌드 서버에서 할당받은 호스트에 작업을 분산하고, 각 작업 분산 시 해당 작업에 필요한 파일 중 변경한 파일목록과 변경하지 않은 파일목록을 전송하는 로컬 호스트와, 상기 로컬 호스트로부터 받은 작업정보 및 작업파일들, 그리고 리파지터리로부터 내려받은 변경되지 않은 파일들을 사용하여 로컬 호스트로부터 요청받은 작업을 수행하고 그 결과물을 로컬 호스트로 전송하는 적어도 하나 이상의 원격 호스트를 포함하여 구성되는데 있다.
Patent KR-20100054121-A (KR)
Title: Mobile phone
Inventor: TAMURA YASUHIRO
IPC: G01C17/28
Filed: 2010-04-23
Abstract: PURPOSE: A mobile phone is provided to accurately measure a geomagnetic direction by removing the effect due to the inclination. CONSTITUTION: A mobile phone comprises an omni-directional magnetic sensor. The omni-directional magnetic sensor detects the geomagnetic azimuth. The omni-directional magnetic sensor comprises a 3-axis magnetic sensor, an inclination sensor(22) and a signal processing unit. The 3-axis magnetic sensor is formed on the substrate. The 3-axis magnetic sensor detects a magnetic vector of 3D. The inclination sensor detects the inclination angle of the substrate. The signal processing unit processes the output signals of the inclination sensor and the 3-axis magnetic sensor.
Patent KR-20110120786-A (KR)
Title: The internet access method which uses ap systems of portable internet medium
Inventor: CHOI WON YOUNG
IPC: H04W48/20
Filed: 2010-04-29
Abstract: PURPOSE: An internet access method which uses AP systems of a portable internet medium is provided to perform internet connection between media by embedding an AP function to the portable internet medium. CONSTITUTION: An AP function is embedded in a portable internet connection medium(110). The portable internet connection medium performs an AP function. The portable internet connection medium is connected to a device which has a high transmission rate by searching a proper signal. The portable internet connection medium is connected to the internet without being blocked while moving. The portable internet connection medium provides a call service and an additional service by using an AP.
Patent KR-20110122920-A (KR)
Title: A methode of high quality brass tableware
Inventor: ROH IN HO
IPC: C23F13/12
Filed: 2010-05-06
Abstract: PURPOSE: A brass tableware coated with fluorine oxide film and a manufacturing method thereof are provided to be applied to various types of daily supplies. CONSTITUTION: A brass tableware is constituted as follows. In the surface of the brass tableware, an oxide film(2) is formed through an electrolysis process. The oxide film is composed of a fluorine compound plated layer. A circular molding is processed by using high quality brass. The surface of the molding is polished to remove foreign materials. A brightener remaining in the surface of the molding is removed. The molding is inserted into a vacuum chamber. A fluorine oxide film is formed on the surface through electrolysis. A product is discharged from the vacuum chamber.
Patent KR-20110127519-A (KR)
Inventor: CHOI WOO YOUNG
IPC: H04B10/60
Filed: 2010-05-19
Abstract: 본 발명은 애벌런치 광 검출기(avalanche photodetector: APD)를 갖는 광 수신기 및 그것의 동작 방법에 관한 것이다. 본 발명의 실시 예에 따른 광 수신기는 애벌런치 광 검출기; 상기 애벌런치 광 검출기에서 출력되는 전류신호를 전압신호로 변환하는 전치증폭기; 상기 전압신호에 대한 등화신호를 출력하는 등화기; 및 상기 등화신호의 진폭 및 너비 정보 중 적어도 하나를 참조하여 제어 계수를 결정하는 모니터링부를 포함한다. 여기서, 상기 등화기는 상기 제어 계수를 등화 계수로서 선택한다. 
본 발명의 실시 예에 따른 광 수신기 및 그것의 동작 방법에 의하면, 신호 모니터링을 기반으로 하여 애벌런치 광 검출기(avalanche photodetector: APD)의 바이어스를 조절하기 위해 온도 및 전류 감지 장치가 요구되지 않는다. 따라서, 광 수신기의 설계상 복잡도가 감소하고, 고속 데이터 전송 시에 APD의 온도 및 전류 감지로 인한 주파수 특성 저하가 방지될 수 있다. 
또한, 본 발명의 실시 예에 따른 광 수신기는 신호 모니터링 결과에 따라 애벌런치 광 검출기의 바이어스 및 적응형 등화기의 등화 계수를 함께 조절한다. 따라서, 광 수신기의 성능이 더욱 안정화될 수 있다.
Patent KR-20110129631-A (KR)
Title: Movable surveillance robot system
Inventor: JUN BUM YONG
IPC: B25J5/00
Filed: 2010-05-26
Abstract: PURPOSE: A mobile robot monitoring system is provided to improve visual performance and to flexibly deal with the environment. CONSTITUTION: A mobile monitoring robot system comprises a vehicle body(200), a first drive part(300), and a second drive part(400). A robot device(100) is loaded in the vehicle body. The first and second drive parts are installed in the vehicle body. The first drive part moves the vehicle body along a rail(310). The second drive part moves the vehicle body.
Patent KR-20110135115-A (KR)
Title: Solid state drive
Inventor: SON JONG MYOUNG
IPC: G11C16/00
Filed: 2010-06-10
Abstract: PURPOSE: An SSD(Solid State Disk) is provided to enable high speed data communication by wirelessly transceiving data through the substrate of the SSD and a memory chip. CONSTITUTION: A wireless communication unit(70) includes a first and a second wireless transceiving units(74,78). The first wireless transceiving unit receives data which is read from a memory chip(80) and receives data which will be recorded to the memory chip. The second wireless transceiving unit performs data transceiving between the memory chip and a control chip(21). The control chip controls the wireless communication unit and the memory chip and relays the data between the memory chip and the wireless communication unit.
Patent KR-20110139454-A (KR)
Title: The horizontal die forging device for the thrust shaft of the marine diesel engine
Inventor: KWON IL KEUN
IPC: B21J13/02
Filed: 2010-06-23
Abstract: PURPOSE: A device for forging horizontal of thrust shaft for ship is provided to fore two flange in one step by pressing both ends of a billet of horizontal state. CONSTITUTION: A device for forging horizontal of thrust shaft for ship comprises a ring mold(10), right and left slide molds(21,22), and vertical pressure frame(30) and a power transmission member(40). A billet passes through a charging hole which is formed in a ring mold. The right and left slide molds moves toward the ring mold. The right and left slide mold forms the charging hole and flange corresponding to the facing surface of the right and left slide mold. The vertical pressure frame transfers right and left slide mold. The power transmission member converts the perpendicular pressure of vertical pressure frame into the horizontal movement of the right and left slide mold.
Patent KR-20110139885-A (KR)
Title: Artificial marble containing big size marble chip and the method thereof
Inventor: CHO KWANG HEE
IPC: C04B111/54
Filed: 2010-06-24
Abstract: PURPOSE: Artificial marble including large size marble chips and a method for manufacturing the same are provided to secure the aesthetic characteristic of the artificial marble similar to natural rocks by using large size marble chips of 3mm or more diameters. CONSTITUTION: Artificial marble includes 10-30 weight% of a chip mixture, 20-50 weight% of a first polymer resin containing an acrylic resin, 30-60 weight% of filler, and 0.1-5 weight% of an additive. The chip mixture includes 20-60 parts by weight a small chip group, 20-60 parts by weight of a large chip group, 5-15 parts by weight of a natural chip group, and 10-30 parts by weight of a transparent chip group based on 100 parts by weight of the mixture. A method for manufacturing the artificial marble includes the following: A base compound layer(3) is formed by injecting a compound containing one or more polymers and the additive into a mold. Large chips are arranged on the base compound layer to form a large chip layer(2). A cover compound layer(1) is formed on the large chip layer.
Patent KR-20120000276-A (KR)
Title: Dehumidification apparatus for vacuum freezing drier and dehumidification method using the same
Inventor: SON SUNG GYUNG
IPC: F26B5/06
Filed: 2010-06-25
Abstract: PURPOSE: A dehumidification apparatus for a vacuum freezing drier and a dehumidification method using the same are provided to reduce the time for dehumidification because two dehumidification units alternately implement dehumidification. CONSTITUTION: A dehumidification apparatus for a vacuum freezing drier comprises a vacuum chamber(100) in which a material is placed to be frozen and dried and a pair of dehumidification units(200) which are connected to the vacuum chamber, receive the vapor discharged from the vacuum chamber, and are equipped with cooling units. The vapor discharged from the vacuum chamber alternatively flows into the dehumidification units.
Patent KR-20120000415-A (KR)
Inventor: LEE SEOK JOO
IPC: B60G11/18
Filed: 2010-06-25
Abstract: PURPOSE: A torsion beam type suspension of a vehicle is provided to improve stability in turning by leading wheels to toe-in positions against bump and lateral forces. CONSTITUTION: A torsion beam type suspension of a vehicle comprises trailing arms(6,8) and mount brackets(26,28). The trailing arms are arranged in the longitudinal direction of a vehicle body, fixed to both ends of a torsion beam(4) arranged in the width direction of the vehicle body, and mounted on the vehicle body via mounting parts(10,12) formed on the leading end thereof. Wheels(18,20) are arranged at a certain interval on the rear side of the mounting parts. The mount brackets are arranged with the torsion beam on the rear side of the wheel center of the wheels to extend the rear length of the trailing arms.
Patent KR-20120003091-A (KR)
Title: Surgery tools with rolling of end effector for minimally invasive surgery
Inventor: LEE JUNG JU
IPC: A61B17/30
Filed: 2010-07-02
Abstract: PURPOSE: A surgical device for minimally invasive surgery is provided to improve freedom of degree in a rolling and pitching direction of a surgical instrument by using a wire rope for the rolling movement of the end of the surgical instrument. CONSTITUTION: A wire rope fixing hole coupled with a first rolling driving wire rope and a second rolling driving wire rope is formed in an end fixing member. A bearing member is connected to one side of the end fixing member. The bearing fixing member has a wire hole coupled with a first pitching driving wire rope and a second pitching driving wire rope. A guiding unit(200) guides the first and second pitching driving wire ropes to the bearing fixing member of a surgical instrument(100). A wire rope driving unit(300) drives the first and second rolling driving wire rope and the first and second driving wire rope.
Patent KR-20120003143-A (KR)
Inventor: JO MIN GUN
IPC: A23L27/50
Filed: 2010-07-02
Abstract: PURPOSE: Fermented ginseng comprising soy sauce, and a producing method thereof are provided to minimize the loss of saponin by extracting ginseng at the temperature lower than 100 deg C. CONSTITUTION: A producing method of fermented ginseng comprising soy sauce comprises the following steps: steaming raw ginseng at 60-70 deg C for 12-22 hours; naturally drying the steamed ginseng for 12-22 hours; repeating the naturally drying steps for 4-9 times; secondly steaming the obtained red ginseng at 70-90 deg C for 160-170 hours; naturally drying the fermented red ginseng for 72-82 hours; mixing the dried red ginseng with purified water mixed with alcohol, and settling the mixture at 70-90 deg C for 24-34 hours; boiling down the mixture at 60-80 deg C for 6-9 hours after removing residues; and mixing the boiled down fermented black ginseng extract with soy sauce before aging the mixture at 0-4 deg C for 40-50 hours.
Patent KR-20120004856-A (KR)
Title: A novel bacillus amyloliquefaciens eml-bs2 having biocontrol efficacy against plant diseases and plant growth promoting activities
Inventor: LEE HYANG BURM
IPC: A01N63/02
Filed: 2010-07-07
Abstract: PURPOSE: A Bacillus amyloliquefaciens EML-BS2 strain and an agent for preventing plant disease containing the same are provided to ensure wide antibacterial activity. CONSTITUTION: A novel Bacillus amyloliquefaciens EML-BS2 strain(deposit number: KCTC 11692BP) has activity of preventing plant diseases and promoting plant growth. An agent for preventing plant diseases contains the strain, culture liquid thereof, or mixture thereof. An agent for promoting plant growth contains the strain, culture liquid thereof, or mixture thereof. The plant is pumpkin or Capsicum annuum.
Patent KR-20130019040-A (KR)
Inventor: DO HYUN OK
IPC: F16K11/04
Filed: 2010-07-16
Abstract: PURPOSE: A three-way valve is provided to selectively supply water to one of a toilet bowl and a bidet when one of the toilet bowl and the bidet is repaired. CONSTITUTION: A three-way valve(100) comprises a valve body(110), a first supply control part(120), and a second supply control part(130). The valve body is mounted on a water tap and has an inlet(111) and first and second outlets(112'). The first supply control part opens and shuts off the first outlet to control the supply of water to the water tank of a toilet bowl. The second supply control part opens and shuts off the second outlet to control the supply of the water to the water tank of a bidet.
Patent KR-20120008156-A (KR)
Title: Mobile terminal and control method for mobile terminal
Inventor: KIM YOUNG JIN
IPC: G06F3/048
Filed: 2010-07-16
Abstract: PURPOSE: A mobile terminal and control method thereof are provided to increase the convenience of a user and to increase the convenience of operation when an item is arranged on a home screen. CONSTITUTION: A sensing unit obtains the movement of a mobile terminal. A controller(180) displays one background image on a touch screen. The controller switches the background image on the touch screen according to the request of the arrangement of the item. The controller arranges the item on the selected background image.
Patent KR-20110021646-A (KR)
Title: Exposure device, exposure method, and method for manufacturing semiconductor device
Inventor: TSUBATA KYOICHI
IPC: H01L21/027
Filed: 2010-07-19
Abstract: PURPOSE: An exposure device, an exposing method, and a semiconductor device manufacturing method are provided to correct the transcription pattern during the exposure with enough accuracy by offering the proximity information of the particular transcription pattern and the particular value information of the relative position between particular transcription patterns to the exposure device. CONSTITUTION: A light intensity distribution detecting unit(21) detects the distribution of light intensity of the light projected through the photomask. A specific transcript pattern determining unit(22) decides specific transcription patterns for more than two unit patterns. An error calculation unit(23) calculates the error between the specific transcription pattern and the transcription pattern.
Patent KR-20120008785-A (KR)
Title: Advertising apparatus
Inventor: KIM JI EUN
IPC: G09F7/08
Filed: 2010-07-20
Abstract: PURPOSE: An advertisement device is provided to maximize advertising effects through visual effects, which arouse curiosity. CONSTITUTION: A plurality of guide frames(130) is installed in the longitudinal direction and guides an advertisement signboard(110) through a guide groove(120). A plurality of guide drive devices(150) couples multiple advertisement signboards with multiple guide grooves and guides the advertisement signboards along the corresponding guide groove through a guide block. Multiple sensor groups(160) are placed on the multiple guide frames at intervals corresponding to the longitudinal direction for advertising and determine the position of the advertisement signboard. A control device(170) is electrically connected to the guide drive device and the sensor group and guides the advertisement signboard in the guide frame.
Patent KR-20120009871-A (KR)
Title: Optical plate, method of manufacturing the optical plate. display device and method of manufacturing the display device
Inventor: DO HEE WOOK
IPC: G02B30/25
Filed: 2010-07-22
Abstract: PURPOSE: An optical plate, a manufacturing method thereof, and a display device, and a manufacturing method thereof are provided to reduce the whole thickness of a display device. CONSTITUTION: A second pattern(P2) comprises a phase delay portion(323a) and an isotropic optical portion(323b). The phase delay portion has optical anisotropy. The isotropic optical portion is placed on the phase delay portion and has anisotropy. The phase delay portion materially phase-delays second polarized light as lamda/4. The isotropic optical portion optically transmits the light passing through the phase delay portion without the change.
Patent KR-20120010328-A (KR)
Title: Optical sheet and liquid crystal display device having the same
Inventor: JUNG YOUNG JIN
IPC: G02F1/1335
Filed: 2010-07-26
Abstract: PURPOSE: An optical sheet and a liquid crystal display device having the same are provided to minimize optical loss which is generated from a privacy protecting film by correcting an optical path. CONSTITUTION: A liquid crystal display comprises a lamp(6), a light guide plate(4), an optical sheet(14), a liquid crystal panel(20), and a privacy protecting film(22). The light guide plate irradiates the light from the lamp to a surface light source. The optical sheet comprises a plurality of patterns of a saw tooth so that the optical sheet has a cross section of inclined square to one side. The optical sheet collects the light from the light guide plate. The liquid crystal panel receives the light from the optical sheet and displays an image. The privacy protecting film is attached on the liquid crystal panel and restricts a light viewing angle.
Patent KR-20120012270-A (KR)
Title: Multi-layered laminates package and method for manufacturing the same
Inventor: LEE BAIK WOO
IPC: H05K3/46
Filed: 2010-07-30
Abstract: PURPOSE: A multi-layer laminate package and a manufacturing method thereof are provided to electrically connect a cavity layer and a non-cavity layer through a metal blind via, thereby improving electrical characteristics. CONSTITUTION: A cavity layer(110) comprises two or more first wiring layers laminated on both surfaces of a first adhesive layer. One or more first opening parts pass through inside of the cavity layer. A second adhesive layer is arranged between the cavity layer and a first non-cavity layer(120). The first non-cavity layer is welded on the lower surface of the cavity layer in order to block the lower surface of the first opening part. A first electronic component(130) is electrically connected to a second wiring layer of the first non-cavity layer exposed to the first opening part of the cavity layer. The first electronic component is installed on the first non-cavity layer within the first opening part. A first metal blind via(140) is arranged in order to electrically connect the second wiring layer of the first non-cavity layer and the first wiring layer of the lowermost cavity layer.
Patent KR-20120013676-A (KR)
Title: Cosmetic Composition for Skin Moisturizing
Inventor: JEON HYANG HWA
IPC: A61K8/97
Filed: 2010-08-06
Abstract: PURPOSE: A cosmetic composition for skin moisturizing is provided to ensure long-term moisturizing effect. CONSTITUTION: A cosmetic composition contains moisturizing complex containing 30-40% of glycerin; 1-5 wt% of serine, glycine, glutamic acid, or sodium salt thereof; pyrrolidone carboxylic acid(PCA), or salt thereof; 1-10 wt% of gryceryl polymethacrylate; 30-40 wt% of brown algae extract; and 10-20 wt% of beta-glucan. The salt of pyrrolidone carboxylic acid is sodium pyrrolidone carboxylic acid(sodium PCA), potassium PCA, copper PCA, calcium PCA, aluminum PCA, or zinc PCA. The composition is manufactured in the form of a skin softener, massage cream, pack, gel, essence, lip stick, foundation, lotion, ointment, gel, cream, patch, or spray.
Patent KR-20110016405-A (KR)
Title: Composite polarizing plate and tn mode liquid crystal panel
Inventor: INOKUCHI YUUHEI
IPC: B32B27/32
Filed: 2010-08-09
Abstract: PURPOSE: A complex polarizer and an TN mode liquid panel are provided to suppress the leakage of light after light is leaked under high temperature. CONSTITUTION: In a complex polarizer(2) and an T N mode liquid crystal panel(1), a biaxial phase difference film(5) is comprised of a transparent protection layer(4), a polarizer(3), and an olefin-based resin. Adhesive layers are laminated successively. The biaxial phase difference film has R0 of 40-150 nm in in-plane phase, a Rth of 50-250 nm in thickness direction, and a Nz constant within 1-7. The adhesive layer has 0.15-10 MPa under 23-80 °C.
Patent KR-20110063275-A (KR)
Title: Apparatuses, device, and methods for cleaning tester interface contact elements and support hardware
Inventor: BROZ JERRY J
IPC: G01R31/26
Filed: 2010-08-18
Abstract: PURPOSE: A unit, an apparatus, a method for cleaning tester interface contact elements and supporting structure are provided to implement a cleaning operation with respect to probe cars and test sockets. CONSTITUTION: Tester interface contact elements and supporting structure are cleaned using a test probe cleaning material(224). The cleaning material includes a cleaning pad layer and one or more intermediate layers. The intermediate layers support the cleaning pad layer. The intermediate layers optimize cleaning materials for specific tester interface contact elements and supporting structure. The elastic modulus of the intermediate layers is between 40 and 600Mpa.
Patent KR-20120017711-A (KR)
Inventor: KIM HYOUNG WOO
IPC: A44C17/04
Filed: 2010-08-19
Abstract: 본 발명은 장식효과가 있는 구조물에 관한 것으로서, 그 구성은, 전면과 배면에 각각 보석 형상이 새겨져 있는 투명 사출판; 상기 투명 사출판의 전면에 부착되는 글래스;를 포함하며, 상기의 구성에 따르면, 보석을 사용하지 않고도 아름다운 장식효과를 낼 수 있어 생산비를 절감할 수 있는 효과가 있다.
Patent KR-20120019942-A (KR)
Title: Dual stage system and method for processing frit using the same
Inventor: PARK HONG JIN
IPC: H01L51/56
Filed: 2010-08-27
Abstract: PURPOSE: A dual stage system and a frit processing method using the same are provided to improve production efficiency by consecutively processing frit without waste of time for mask and substrate arrangements. CONSTITUTION: A first substrate table(110) is linearly transferred with a substrate(20). A first mask table(120) is arranged on the upper side of the first substrate table. A first lower part imaging part(130) is comprised of a pair of cameras and a pair of lens parts. A second substrate table(140) is linearly transferred by receiving driving force of a substrate stage. A second mask table(150) supports the edge of a mask(10).