baber/WOPTO huggingface dataset:
Patent KR-20160021107-A (KR)
Title: 무전해 금속 도금의 브릿지 방지액 및 이를 이용한 프린트 배선판의 제조방법
Inventor: TANIMOTO JUICHI
IPC: C07C321/04
Filed: 2014-05-12
Abstract: 회로 패턴 형성 후에 실시하는 무전해 금속 도금이, 배선 기판의 수지 위에 석출하는 브릿지를 방지하는 폴리티올 화합물을 함유하는 것을 특징으로 하는 무전해 금속 도금의 브릿지 방지액 및 이것을 이용한 프린트 배선판의 제조방법.
Patent KR-20170083725-A (KR)
Title: 진공 센서 검출 장치 및 그 검출 방법
Inventor: KIM JOO YOUNG
IPC: B60T8/88
Filed: 2016-01-11
Abstract: 진공 센서 검출 장치 및 그 검출 방법이 개시된다. 본 발명의 실시 예에 따른 진공 센서 검출 장치 및 그 검출 방법은 브레이크 페달 센서에서 감지한 브레이크 페달 동작신호 및 브레이크 페달 압력의 변화값을 입력받고, 진공 센서에서 감지한 엔진 진공압력값 및 부스터 진공압력값을 입력받는 입력부; 입력되는 브레이크 페달 동작신호에 따라 브레이크 페달이 정상적으로 동작하는지를 판단하고, 정상적으로 동작하면 변화값중 최대 변화값 및 최소 변화값간의 차이값을 설정된 목표 변화값과 비교하여 브레이크 페달이 안정한 상태인지를 판단하는 판단부; 및 안정한 상태이면, 브레이크 페달 압력에 따라 생성되는 엔진 진공압력값이 부스터 진공압력값보다 큰 상태일때의 부스터 진공압력값중 최대 부스터 진공압력값 및 최소 부스터 진공압력값간의 차이값을 설정된 목표 부스터 진공압력값과 비교하여 진공 센서의 고장 상태를 검출하는 검출부를 포함한다.
Patent KR-20170086917-A (KR)
Inventor: BAIK SEUNG YONG
IPC: B65D65/38
Filed: 2016-01-19
Abstract: 본 발명은, 편백원액 8~10%, 편백증류수 87~89%, 허브원액 3%의 원료를 혼합시키는 단계와; 상기 혼합 원료에 이산화염소제가 함유된 0.5~1㎜미만 입자상의 세피올라이트 항균성 물질을 10~14시간 동안 함침시키는 단계와; 상기 함침된 항균성 물질을 음지 18~23℃에서 5시간 이상 건조시키는 단계와; 상기 건조된 항균성 물질을 밀봉하도록 포장하는 단계로 제조되고, 그 항균성 물질이 신용카드 크기의 평면적을 형성하는 타이벡재질의 포장팩으로 밀봉 포장되어 있으므로 이산화염소 성분의 방출을 높이면서도 이산화염소 성분의 특유 냄새를 중화시켜 어린이이나 노인 등의 사용자에게 속쓰림과 구역증세 등의 위화감과 거부감을 없앨 수 있으며, 또한 휴대폰 케이스나 지갑 등의 소지품에 직접 휴대할 수 있게 하면서 신용카드 크기의 평면적을 통해 이산화염소 성분이 넓게 방출되어 주변 살균력 향상은 물론 제균 및 항균화 영역을 높여줄 수 있는 것임.
Patent KR-20160094284-A (KR)
Title: Semiconductor device
Inventor: TANAKA YOSHIHIRO
IPC: H01L21/768
Filed: 2016-01-22
Abstract: When a semiconductor element is fixed by using a first metal such as solder or the like in order to manufacture a semiconductor device, a direction in which molten solder flows and a spreading mode are controlled to prevent errors from being generated. According to an embodiment of the present invention, provided is a semiconductor device which has a semiconductor element, and an island fixing the semiconductor element to a surface by using the first metal. The island is formed on part of the surface which has a pattern formed by a second metal. The wetting property of the second metal is larger than that of surface when the first metal is molten.
Patent KR-20170089712-A (KR)
Title: System for detecting malicious code and method thereof
Inventor: HWANG TONG WOOK
IPC: G06F21/52
Filed: 2016-01-27
Abstract: Disclosed are a system for detecting malicious codes and a method thereof. The system for detecting malicious codes comprises: an analysis agent server executing an input suspicious malicious execution file and extracting API call information and kernel behavior information from the executed suspicious malicious execution file; a vaccine diagnosis server extracting vaccine diagnosis information on the input suspicious malicious execution file; and a management server determining whether the suspicious malicious execution file is a malicious code by using the extracted API call information, kernel behavior information, and vaccine diagnosis information.
Patent KR-20170093569-A (KR)
Title: Method and apparatus for providing combined monitoring system
Inventor: KIM JAE JOON
IPC: A61B5/145
Filed: 2016-02-05
Abstract: Disclosed is a combined monitoring technology. A combined monitoring device includes: a biosensor for detecting a bio-signal of a driver getting into a vehicle; an air quality sensor for detecting internal air quality of a vehicle; and a controller for, in case detection data on the bio-signal detected by the biosensor is greater than a reference value, determining whether the detection data on the air quality detected by the air quality sensor is greater than a reference value, and generating an air quality alert if the detection data on the air quality is greater than the reference value. Accordingly, the present invention is able to complexly monitor drivers biometric data and air quality data.
Patent KR-20160022851-A (KR)
Title: System and method for providing advertisement
Inventor: CHOI BYUNG CHUL
IPC: G06F17/30
Filed: 2016-02-16
Abstract: The present invention relates to a system and a method for providing advertisement. According to one aspect of the present invention, a method for an advertisement providing system including a user terminal to provide advertisement on a search window may comprise: monitoring whether the search window is selected by a user, displaying advertisement at one exterior side of the selected search window, when the displayed search window is selected, and ceasing display of the displayed advertisement, when search request for the search keyword inputted to the selected search window is inputted from a user. Thus, the present invention may improve the efficiency of advertisement, and avoid causing inconvenience to a user to use the terminal, by displaying advertisements only when the user selects the search window.
Patent KR-20170098437-A (KR)
Inventor: GONG SUK TAE
IPC: H04M1/725
Filed: 2016-02-22
Abstract: Currently, billions of mobile phones with camera functions are sold, and thus everyone uses a mobile phone. As smartphones are being replaced, mobile phones that are not being used are geometrically increasing. Making use of this opportunity, in order to use the existing unused mobile phones to control remote objects, it is not economical to use the existing unused mobile phones because of the expensive costs of constituting an exclusive interface. To this end, according to a switch control method using phone flash of the present invention, a remote software application is installed on a mobile phone to turn on/off flash remotely. When a light receiving unit (5) installed in front of a flash (3) recognizes the light of the flash, a circuit (6) turns on a relay (7), and when the light of the flash (3) is turned off, the circuit (6) turns off the relay (7), and controls a remote switch (4) remotely. Desired electronic devices, home appliances, and the like are used by being connected to a relay contact point terminal. When a socket is connected to the contact point terminal as occasion demands, it is possible to make a remotely controlling switch by simply plugging an electronic device to the socket. For convenience of explanation, the relay is referred to as a relay, but the relay includes a mechanical relay operated by a coil and an electronic relay operated by an IC circuit. The present invention has an effect of recycling resources by making it possible to use the existing unused mobile phones for Internet-of-Things (IoT).
Patent KR-20170104044-A (KR)
Title: Laser Beam Adjusting Module for ELA Process
Inventor: CHOI DONG GYU
IPC: H01L21/66
Filed: 2016-03-03
Abstract: The present invention relates to a laser beam adjusting module for an excimer laser annealing (ELA) process which adjusts the length of a laser beam irradiated onto a substrate, comprises: a laser beam cutter vertically disposed with respect to the traveling direction of a laser beam, and including a cooling means including a refrigerant therein; a refrigerant supply unit formed at one side of the laser beam cutter, and circulating and supplying the refrigerant into the cooling means; a detection unit for detecting the temperature of the cooling means; and a control unit for controlling the temperature and flow rate of the refrigerant. Accordingly, in the ELA process, the uniformity of the length of the laser beam is ensured by suppressing heat of the laser beam cutter generated when the length of the laser beam is adjusted, thereby improving a phenomenon of occurring a mura defect on the substrate. Also, the temperature of the laser beam cutter can be effectively adjusted through the refrigerant supply unit, the detection unit, and the control unit. Furthermore, costs can be reduced by locally adjusting the temperature of a portion where the length of the laser beam is adjusted by the laser beam cutter.
Patent KR-20170105812-A (KR)
Title: Multipurpose lighting stand
Inventor: LEE JIN SEOP
IPC: F21V21/34
Filed: 2016-03-10
Abstract: According to an aspect of the present invention, a multipurpose lighting stand is provided. The multipurpose lighting stand includes a support part; and a light source unit coupled to the support part. The light source part includes a housing having one side and forming an inner space; a half mirror provided on one side of the housing and functioning as a mirror or an image display as light is emitted; an image film disposed on the back surface of the half mirror at one side of the inside of the housing; a first light source disposed on one side of the housing and emitting light to the outside; and a second light source disposed to face the back surface of the image film and emitting light to the image film. The multipurpose lighting stand can function as a mirror and a frame for image display.
Patent KR-20170105839-A (KR)
Title: 하이브리드 차량의 모터 제어 장치 및 방법
Inventor: KIM JI YEON
IPC: G08B3/10
Filed: 2016-03-10
Abstract: 본 발명은 하이브리드 차량의 모터 제어 장치에 관한 것으로, 구체적으로 모터에 고장이 발생한 경우에 경고 정보를 출력하고, 모터에 전류 공급을 중지할 수 있는 하이브리드 차량의 모터 제어 장치 및 방법에 관한 것이다. 
이를 위해, 본 발명의 일 실시 예에 따른 하이브리드 차량의 모터 제어 장치는 동력원인 모터, 상기 모터에 전류를 공급하는 인버터, 상기 모터에서 발생하는 진동에 따른 전류를 발생하는 압전 소자, 및 상기 압전 소자에서 발생하는 전류를 통해 코깅 토크의 주파수를 추출하고, 상기 코깅 토크의 주파수를 기반으로 상기 모터의 고장을 확인하는 제어기를 포함한다.
Patent KR-20170105893-A (KR)
Inventor: JEONG CHEON SOO
IPC: G09F13/04
Filed: 2016-03-10
Abstract: The present invention relates to a wearable platform system. The platform system comprises: a light emitting display panel (3) mounted on an object (1) and displaying a picture or a character; an optical fiber (13) having one end connected to the light emitting display panel (3) to emit light to the outside through the light emitting display panel (3); a light emitting source (15) connected to the other end of the optical fiber (13) to emit light and to transmit the light to the optical fiber (13); a speaker (5) and a microphone (31) mounted at a predetermined position of the object (1); and a platform (7) controlling the light emitting source (15) and maintaining a pairing with a mobile communication device (9) to transmit and receive a telephone communication and a voice signal. The platform (7) includes: a case (33) forming an external appearance; a fiber optical LED (FOLED) control module (17) disposed inside the case (33) and controlling a pattern of light displayed through the light emitting display panel (3) by transmitting a signal to the light emitting source (15); a Bluetooth control module (19) integrally provided with the FOLED control module (17) and paired with the mobile communication device (9) to transmit and receive the telephone communication and the voice signal through the speaker (5) and the microphone (31); and an auxiliary battery (43). According to the present invention, the wearable platform system includes a module for controlling an FOLED, a Bluetooth control module for performing communication, and a battery in one platform to be easily mounted on a safety vest or a bag, thereby improving portability.
Patent KR-20170111466-A (KR)
Inventor: PARK KI DONG
IPC: E04H17/14
Filed: 2016-03-28
Abstract: 본 발명은 이동용 펜스에 관한 것으로, 프레임(100)과 상기 프레임(100) 하부에 설치되는 지지대(200)로 이루어지는 것을 포함하는 것으로, 
본 발명은 펜스를 설치할 시는 지지편이 하부막대와 직각이 되게 설치하며, 돌기는 지지편이 좌우로 흔들리지 않게 지지편 좌우에 위치하여 안정적으로 설치되며, 펜스를 이동이나 보관을 위해 펜스를 철거할 시는 지지편은 하부막대와 같은 방향이 되게 하고, 돌기는 돌기홈안에 위치하여 간편하게 이동, 보관할 수 있는 현저한 효과가 있다.
Patent KR-20170111854-A (KR)
Inventor: PARK DOO SOON
IPC: G08B21/02
Filed: 2016-03-30
Abstract: 본 발명은 블루투스 신호를 이용하는 비콘(Beacon)을 활용하여 실종된 아동을 인식하게 하고, 주변의 GPS 정보를 활용하여 아동의 위치를 알 수 있는  비콘을 이용한 미아찾기 시스템에 관한 것이다. 
본 발명은 미아찾기서버(100), 클라이언트(200)를 포함하며, 미아찾기서버(100)는 비콘정보와 아동정보가 매칭되어 저장하고, 미아의 근처에 위치하는 클라이언트(200)로부터 비콘정보가 수신되면 제공받아 미아의 비콘인지 확인하고, 일치하면 비콘정보를 제공한 클라이언트의 위치정보를 보호자의 클라이언트(200)로 제공하며, 클라이언트(200)는 아동에게 제공된 비콘정보와 아동정보가 저장되고, 미아가 발생된 경우 미아인 아동의 비콘을 활성화시키고 활성화된 비콘정보를 미아찾기서버(100)로 제공하며, 미아가 소지하는 비콘으로부터 비콘정보가 수신되면 미아찾기서버(100)로 제공하고, 미아찾기서버(100)로부터 비콘정보를 제공한 클라이언트(200)의 위치정보를 제공받는 것을 특징으로 한다.
Patent KR-20170112005-A (KR)
Inventor: KWON CHANG BEOM
IPC: G01R33/038
Filed: 2016-03-30
Abstract: 본 발명은 초소형 무인 비행체의 개발시 비행체의 동적 공력 특성을 의미하는 동안정 미계수를 추출하되, 동적 풍동 실험 수행시 풍동에 설치된 전자석의 제어를 통해 실험대상 비행체와의 물리적 접촉없이 자기력을 이용하여 가진시킴으로써 지지부 간섭 현상에 따른 오차 발생요인을 근본적으로 제거하여 신뢰도 높은 동적 공력 특성 파악이 가능하게 한, 자기력을 활용한 비행체의 동안정 미계수 추출방법에 관한 것으로서, 
내부에 소형 영구자석(11)이 구비된 실험대상 비행체(10)를 자기부상장치가 구비된 풍동의 내부에 위치시키는 준비 단계와; 자기부상장치의 자기력 제어장치를 가동하여 상기 실험대상 비행체의 위치 및 자세를 설정하는 실험조건 설정 단계와; 윈드 오프 조건에서 상기 실험대상 비행체(10)를 가진시키고 복수 개의 위치감지센서를 이용하여 상기 실험대상 비행체(10)에 대한 6 자유도의 데이터를 측정하는 윈드 오프 풍동 실험단계와; 원드 온 조건에서 상기 실험대상 비행체(10)를 가진시키고 상기 위치감지센서를 이용하여 상기 실험대상 비행체에 대한 6 자유도의 데이터를 측정하는 윈드 온 풍동 실험단계와; 윈드 오프 풍동 실험단계에서의 측정 데이터와 윈드 온 풍동 실험단계에서의 측정 데이터를 비교하여 상기 실험대상 비행체(10)의 동안정 미계수를 추출하되, 강제 진동 기법의 동적 풍동 실험에 적용되는 실험 대상체의 운동 방정식으로부터 유도된 무차원의 동안정 미계수 산출 공식에 측정 데이터를 적용하여 동안정 미계수를 계산하는 동안정 미계수 추출단계;를 포함하는 것을 특징으로 한다.
Patent KR-20170116304-A (KR)
Title: 액정 조성물
Inventor: LEE SEUL GEE
IPC: C09K19/30
Filed: 2016-04-08
Abstract: 액정 조성물은 제1 액정 화합물을 포함하고, 상기 제1 액정 화합물은 하기 화학식 1-1로 표현되는 화합물들 중 적어도 하나의 제1-1 액정 화합물과 하기 화학식 1-2로 표현되는 화합물들 중 적어도 하나의 제1-2 액정 화합물 중 적어도 하나를 포함한다: 
(화학식 1-1)  
   
(화학식 1-2)  
   
(X 1 -, X 2 -, -L 11 -, -L 12 -, -L 13 -, R 11 -,  ,  , n1, n2 는 각각 명세서에 정의된 바와 같다.)
Patent KR-20170119123-A (KR)
Title: 슬라이딩 모드 외란 관측기와 제어기를 이용한 외란 분리 보상 제어 시스템 및 방법
Inventor: SON YOUNG IK
IPC: G05B19/02
Filed: 2016-04-18
Abstract: 채터링 현상을 완화하면서 강인한 성능을 확보하는 제어 시스템 및 방법이 개시된다. 상기 제어 시스템은 슬라이딩 모드 제어기 및 오프셋 외란을 보상하는 슬라이딩 모드 외란 관측기를 포함한다. 여기서, 상기 슬라이딩 모드 제어기는 외란 중 상기 오프셋 외란을 제외한 나머지 외란을 보상한다.
Patent KR-20170121949-A (KR)
Inventor: BAE EUNG SUP
IPC: E04C5/16
Filed: 2016-04-26
Abstract: The present invention relates to a connecting apparatus capable of stably connecting a rod type member without being easily deformed, wherein due to a simple structure, the production cost per unit is low and working hours are reduced, which is economical. In addition, the connecting apparatus is able to connect various kinds of rod type members such as a reinforcing rod, a pipe, and the like. Therefore, usability of the connecting apparatus is excellent. Moreover, an extension frame is used to arrange the assembly of rod type members in multiple steps in a longitudinal direction, which increases the usability. The connecting apparatus comprises: a body formed in the shape of a pipe, wherein an end portion is partially cut to form a pair of cut grooves and a rod type member is inserted into each of the cut grooves; and a cap coupled to the body to pressurize a circumferential surface of the rod type member.
Patent KR-20160127690-A (KR)
Inventor: BAE WOONG
IPC: H04N13/02
Filed: 2016-04-27
Abstract: The present disclosure relates to an apparatus and method for producing a panoramic radiograph of a target object using a three-dimensional (3D) radiograph of the target object. The apparatus may comprise a communication circuit and a processor. The communication circuit may be configured to receive the 3D radiograph digital data of a 3D radiographic image. The processor is configured to generate the X-ray projection images of the target object by performing a forward-projection on voxels associated with the target object, and to combine the generated X-ray projection images to generate a panoramic radiograph of the target object.
Patent KR-20160135653-A (KR)
Title: Pole to pole variation in shape of injection molded magnets of internal permanent magnet machines
Inventor: SINISA JURKOVIC
IPC: H02K1/27
Filed: 2016-05-04
Abstract: An interior permanent magnet machine comprises a wound stator and a rotor core. The rotor core comprises a plurality of first pole cavities and a plurality of second pole cavities. One of a plurality of magnets is arranged in each of the pole cavities, and is injection molded into the respective cavity. The first pole cavities and the second pole cavities are arranged in pre-designated configurations. Each pole cavity among the first pole cavities is identically positioned with one pole cavity among the second pole cavities in the respective pre-designated configurations to define a corresponding pair of pole cavities. The pole cavity of the first pole cavities and the pole cavity of the second pole cavities of at least one of the corresponding pair of pole cavities define different shapes relative to each other.
Patent KR-20170125643-A (KR)
Inventor: KANG MIN HO
IPC: H02J7/02
Filed: 2016-05-04
Abstract: The present invention provides a wireless power transmitter, a wireless power receiver, and an operating method thereof, capable of identifying counterpart manufacturer information. The wireless power receiver wirelessly receiving power from a wireless power transmitter comprises: a resonator wirelessly receiving the power from the wireless power transmitter; a communication module performing communication with the wireless power transmitter; and a controller. The controller transmits the manufacturer information of the wireless power receiver to the wireless power transmitter through the communication module, receives authority including whether each of at least one function of the wireless power receiver permits through the communication module, and can be set, based on the received authority, to perform a function allowed in the wireless power receiver.
Patent KR-20170128818-A (KR)
Inventor: HAN YANG HEE
IPC: B65H29/32
Filed: 2016-05-16
Abstract: Disclosed is a line-up apparatus for blister package, capable of quickly picking up and loading the blister package. According to the present invention, the apparatus comprises: a robot moving guide unit disposed on blister supply and loading lines, and disposed in an interval between the blister supply and loading lines, wherein a longitudinal direction thereof is in parallel to a longitudinal direction of the blister supply and loading lines; and a blister transfer robot mounted on the robot moving guide unit to be placed on the blister supply and loading lines, and picking up blister package from the blister supply line to load the same on the blister loading line.
Patent KR-20170135009-A (KR)
Inventor: KIM JE DO
IPC: G10K11/16
Filed: 2016-05-30
Abstract: According to one embodiment of the present invention, a Helmholtz resonator has an area where a spatially compressed acoustic metamaterial is filled in a predetermined position, and the down-sized Helmholtz resonator in accordance with arrangement of a filling area inside the Helmholtz resonator and a physical property of the filling area can have an adjustable resonant frequency based on the arrangement and the physical property.
Patent KR-20170139332-A (KR)
Inventor: LEE KYUNG EUN
IPC: H04L12/58
Filed: 2016-06-09
Abstract: Disclosed are a method and a system for processing payment which can increase safety in payment since an order is made without providing payment information of a user to a vendor side by preliminarily authenticating before ordering. The method for processing payment in a payment server comprises the steps of: receiving a password from an electronic device before connection for ordering between the electronic device and a vendor; preliminarily authenticating payment on a product or a service to order through the vendor by the user using the password before actually processing the payment; and transmitting order information due to the preliminary authentication to a device in the vendor side.
Patent KR-20170140578-A (KR)
Inventor: JUNG SOON KI
IPC: F24F13/06
Filed: 2016-06-13
Abstract: An embodiment of the present invention relates to an air cleaner. According to the embodiment of the present invention, the air cleaner comprises: a first blowing device having a first blowing fan; a second blowing device having a second blowing fan; and a division device blocking introduction of air discharged from the first blowing device to the second blowing device.
Patent KR-20170143212-A (KR)
Inventor: LEE JU DONG
IPC: F21K99/00
Filed: 2016-06-21
Abstract: The present invention relates to a light emitting diode (LED) fish attracting lamp device configured to allow heat generated in an LED fish attracting lamp to be transferred to a fish attracting lamp installation stand within a short time by closely attaching the LED fish attracting lamp to the outer circumferential surface of a hollow fish attracting lamp installation stand, to efficiently cool high heat generated by a high output of an LED when an LED fish attracting lamp using an LED as a light source is used. The LED fish attracting lamp device comprises: an LED module (120) including a printed circuit board (122) and a plurality of LEDs (121) arranged in a matrix form on the printed circuit board (122), and configured to emit light forward when power is supplied; a fish attracting lamp case (110) having the LED module (120) therein, having a heat radiation function, and including an installation stand coupling groove (111), which is an outer shape of a fish attracting lamp installation stand (31), on the rear side thereof; and an attachment hole (300) supporting the LED fish attracting lamp (100) from the rear side thereof to allow the fish attracting lamp installation stand (31) to be closely attached to the installation stand coupling groove (111) formed on the rear side of the fish attracting lamp case (110), wherein a heat conductive member is formed between the fish attracting lamp installation stand (31) and the attachment hole (300) and/or the installation stand coupling groove (111) between the LED fish attracting lamp (100) and the fish attracting lamp installation stand (31). In addition, the LED fish attracting lamp of the present invention further comprises a lens (200) and/or a reflection device (500) configured to emit an asymmetric light beam, thereby concentrating light on the sea surface near the sides of a fishing boat.
Patent KR-20180000106-A (KR)
Inventor: KIM KYUNG JOONG
IPC: G06Q50/12
Filed: 2016-06-22
Abstract: Provided are a method and apparatus for processing an interactive real-time translation service for a hotel reservation and a method and apparatus for providing the service. The method for processing the service by an information processing apparatus according to an embodiment of the present invention may comprise: translating an original text input by a host terminal in accordance with language setting information of a guest and transmitting the translated text to a guest terminal in a first case that language setting information of a host and the language setting information of the guest are different and the original text is input by the host terminal; translating an original text input by the guest terminal in accordance with the language setting information of the host and transmitting the translated text to the host terminal in a second case that the language setting information of the host and the language setting information of the guest are different from each other and the original text is input by the guest terminal. In the first case, the translated text transmitted to the guest terminal may be displayed in a predetermined chat room via a screen of the guest terminal, and in the second case, the translated text transmitted to the host terminal may be displayed in the predetermined chat room via a screen of the host terminal.
Patent KR-20170000360-A (KR)
Inventor: TOMURA MAJU
IPC: H01L21/02
Filed: 2016-06-23
Abstract: The purpose of the present invention is to promote etching by temperature control at very low temperatures. To this end, provided is an etching processing method in which a first process and a second process are repeated several times. The first process comprises controlling the surface temperature of a substrate below -35C, generating plasma from a hydrogen containing gas and a fluorine containing gas by using a first high frequency power outputted from a first high frequency power source and a second high frequency power outputted from a second high frequency power source, and etching a silicon oxide film by plasma. The second process comprises stopping the output of the second high frequency power source and etching the silicon oxide film by plasma.