Patent SG-11201808788P-A (SG)
Title: Liquid delivery system
Inventor: MELCER CHRIS
IPC: H01L21/67
Filed: 2017-04-04
Abstract: INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization -, MD IIIII01101010 11111 010111110111010111111111111101101111111111110111111 International Bureau .. .... ..Yejd (10) International Publication Number (43) International Publication Date ..... .....1 WO 2017/176815 Al 12 October 2017(12.10.2017) WIPO I PCT (51) International Patent Classification: (72) Inventors: MELCER, Chris; 3185 Laurelview Ct, Fre- HO1L 21/67 (2006.01) mont, California 94538 (US). BARROS, Philip Ryan; 3185 Laurelview Ct, Fremont, California 94538 (US). (21) International Application Number: KUBOTA, Haruyuki; 3185 Laurelview Ct, Fremont, Cali- PCT/US2017/026022 fornia 94538 (US). TREUR, Randolph; 3185 Laurelview (22) International Filing Date: Ct, Fremont, California 94538 (US). CUSHMAN, Todd; 4 April 2017 (04.04.2017) 3185 Laurelview Ct, Fremont, California 94538 (US). MULLIGAN, Greg Patrick; 3185 Laurelview Ct, Fre- (25) Filing Language: English mont, California 94538 (US). (26) Publication Language: English (74) Agent: GRINER, David; 651 N. US Hwy 183, Suite 335- (30) Priority Data: 118, Leander, Texas 78641 (US). 62/318,202 4 April 2016 (04.04.2016) US (81) Designated States (unless otherwise indicated, for every (71) Applicant: ICHOR SYSTEMS, INC. [US/US]; 200-C kind of national protection available): AE, AG, AL, AM, Parker Drive, Suite 600, Austin, Texas 78728 (US). AO, AT, AU, AZ, BA, BB, BG, BH, BN, BR, BW, BY, BZ, CA, CH, CL, CN, CO, CR, CU, CZ, DE, DJ, DK, DM, DO, DZ, EC, EE, EG, ES, FI, GB, GD, GE, GH, GM, GT, HN, HR, HU, ID, IL, IN, IR, IS, JP, KE, KG, KH, KN, KP, KR, KW, KZ, LA, LC, LK, LR, LS, LU, LY, MA, MD, ME, MG, MK, MN, MW, MX, MY, MZ, NA, NG, NI, NO, NZ, OM, PA, PE, PG, PH, PL, PT, QA, RO, RS, — RU, RW, SA, SC, SD, SE, SG, SK, SL, SM, ST, SV, SY, = TH, TJ, TM, TN, TR, TT, TZ, UA, UG, US, UZ, VC, VN, ZA, ZM, ZW. [Continued on next page] (54) Title: LIQUID DELIVERY SYSTEM = 210 216 (57) : A modular system for enabling a distribution of liquid chemicals comprising a substrate block that includes at least two ports formed in a first major surface of the block and a fluid passageway extending between the two ports. The fluid pathway is preferably a smooth, seamless path where the entire volume of the flu- = 200-Th l 21, 215 . 4 215 id pathway is directly in line with the desired flu- id flow so that fluid flow completely sweeps the entire flow passageway and there are no dead — r _ 213 21 I = 21 4,, volumes or areas of entrapment in said fluid pas- 6 sageway. A substrate block can be formed from a fluoropolymer using a novel composition and manufacturing process. A sealing assembly is = 21 _ 212 . 211 provided that uses a combination of a replaceable insert-type seal with a tongue and groove seal formed into the modular components. — . 215 216 21 216 .-1 16 21. 17 as 14 ir) 15 .-1 GC ,tD IN FIG. 2 .-1 IN .-1 0 ei O WO 2017/176815 Al MIDEDIM111101111111111111111111111111111111111111111111111111111111111110111111111111 (84) Designated States (unless otherwise indicated, for every Published: kind of regional protection available): ARIPO (BW, GM, KE, LR, LS, MW, MZ, NA, RW, SD, SL, ST, TZ, UG, ZM, ZW), Eurasian (AM, AZ, BY, KG, KZ, GH, SZ, RU, — with international search report (Art. 21(3)) before the expiration of the time limit for amending the TJ, TM), European (AL, AT, BE, BG, CH, CY, CZ, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SI, SK, SM, TR), OAPI (BF, BJ, CF, CG, CI, CM, DE, LT, SE, GA, claims and to be republished in the event amendments (Rule 48.2(h)) of receipt of GN, GQ, GW, KM, ML, MR, NE, SN, TD, TG).