REPAIR OF FILM HAVING AN Si-O BACKBONE

Abstract: Damaged low-density silicon oxide-based films having an Si-O backbone are repaired using a method for driving a self-limiting healing process. According to an example embodiment of the present invention, a deposition precursor and an oxidizer are introduced to a damaged side wall region of a low-density silicon oxide-based film. The unstable damaged portion of the film reacts with the deposition precursor and a thin repair film is grown within the interfacial layer of the damaged film. The repair film provides a strengthened interface, protects the underlying sensitive material from further chemical damage, and can improve the ability to integrate the film.

Description: REPAIR OF FILM HAVING AN Si-O BACKBONE Technical Field The present invention relates generally to semiconductor wafers and their fabrication and, more particularly, to semiconductor wafers and their manufacture involving techniques for repairing damaged silicon oxide Background Art The semiconductor industry has recently experienced technological advances that have permitted dramatic increases in circuit density and complexity, and equally dramatic decreases in power consumption and package sizes Present semiconductor technology now permits single-chip microprocessors with many millions of transistors, operating at speeds of hundreds of millions of instructions per second to be packaged in relatively small, air-cooled semiconductor device packages Such technological advances are coupled with heightened complexity of the manufacturing process and increasingly higher standards of reliability, performance, and consistency of semiconductor wafers As the manufacturing processes for semiconductor wafets become more complex, and as product standards fot such wafers increase, methods for manufacturing and repairing these wafers become increasingly important Not only is it important to ensure that individual chips are functional, it is also important to ensure that batches of chips perform consistently and meet performance standards In addition, as technology advances, the cost of manufacturing the high tech wafers increases The increased cost of wafers results in greater losses when the wafers are defective and must be thrown out A particular problem typically found in the manufacture of semiconductor devices and wafers is the damaging of low-density films during processing, such as during etch, photoresist removal, and ashing processes Low-density films susceptible to such damage include, for example, materials having a low dielectric constant such as those based on an Sι-0 backbone and having other substituents of composition StOxRyHz, where 1 <= x <= 2, R is an organic group such as a methyl or ethyl, 0 <= y <^ 2 and 0 <= z <= 2 During these processes, bonds in the low-density matenal can be broken chemical species are sometimes selectively removed, and the material can become susceptible to further damage during additional processing These and other problems result in semiconductor wafers and devices having performance, reliability, and other problems Disclosure of the Invention The present invention is directed to the repair of a semiconductor wafer during its manufacture, and is exemplified in a number of implementations and applications some of which are summarized below According to an example embodiment of the present invention, a semiconductor having damaged low-density film based on an St-O backbone is repaired in a manner that addresses the problems described in the Background of the Invention hereinabove An SiO, deposition precursor, such as silane, and an oxidizer, such as 0 2 or N 2 0, are introduced to a damaged portion of a film having a silicon oxide backbone in the wafer The deposition precursor reacts with the damaged film, and a thin silicon dioxide layer is grown within the damaged film The thin silicon dioxide leads to the repair of wafer damage in manners including inducing the passivation of the reactive species or the densification of the mterfacial area The above summary of the present invention is not intended to describe each illustrated embodiment or every implementation of the present invention The figures and detailed description which follow more particularly exemplify these embodiments Brief Description of Drawings The invention may be more completely understood in consideration of the following detailed description of various embodiments of the invention in connection with the accompanying drawings, in which FIG 1 is a damaged semiconductor wafer for use in connection with the present invention, FIG 2 is the semiconductor wafer of FIG 1 undergoing a process step, according to an example embodiment of the present invention, and FIG 3 is a system for repairing damaged substrate in a semiconductor chip, according to another example embodiment of the present invention While the invention is amenable to various modifications and alternative forms, specifics thereof have been shown by way of example in the drawings and will be described in detail It should be understood, however, that the intention is not to limit the invention to the particular embodiments described On the contrary, the intention is to cover all modifications, equivalents, and alternatives falling within the spirit and scope of the invention as defined by the appended claims Modes for Carrying Out the Invention The present invention is believed to be applicable to a variety of different types of semiconductor wafers, and the invention has been found to be particularly suited for wafers having low-density Si-O backbone-based films that are susceptible to damage While the present invention is not necessarily limited to such wafers, various aspects of the invention may be appreciated through a discussion of various examples using this context In connection with an example embodiment of the present invention, it has been discovered that damaged low-density silicon oxide films in a semiconductor wafer can be repaired and/or improved by introducing a deposition precursor for silicon dioxide, such as silane, and an oxidizer to the damaged wafer For example, damage can occur to the mterfacial layer of a side wall of a trench or via during processes such as etching, ashmg, or photoresist removal Typical damage includes broken bonds such as Si-C and Si-H bonds, the selective removal of chemical species, and the general degradation of the properties of the mterfacial layer Immediately after such damage occurs, the film is in a reactive state By introducing a deposition precursor for silicon dioxide and an oxidizer to the damaged portion of the film, a reaction occurs and a thin silicon dioxide skin is grown inside the damaged mterfacial layer The silicon dioxide skin acts to repair the film and has added benefits, such as the strengthening and denstfication of trench walls before or after processing, and can achieve these benefits without the unwanted effect of collapsed profiles This is useful for various types of low dielectric films having an Si-O based backbone For example, typical films that can be repaired using the method and system described herein include those having substituents of the composition SiOxRyHz in combination with the Si-O backbone, wherein R is an organic group such as a methyl or ethyl, 1 x 2, 0 y 2, and 0 z 2 These films may be deposited using, for example, spin on techniques or plasma-enhanced chemical- vapor-deposition (PECVD) Examples of spin on materials are Silsesquioxanes including Hydrogen Silsesquioxane (HSQ) such as FOX available from Dow-Corning, Methyl Silsesquioxane (MSQ), Sol gel materials including xerogels such as Nanogalss by Allied Signal and XLK from Dow Corning, templated or otherwise self-organized materials, inorganic-organic hybrids, or inorganic materials having sacrificial porogen components Examples of films deposited using PECVD include films based on various methyl silane precursors such as mono, dt, tπ or tetra methyl silane. Black Diamond available from Applied Materials, Coral film available from Novellus, or other materials based on more complex Si containing precursors FIG 1 shows a portion 100 of a semiconductor wafer at a stage in a manufacturing process, according to an example embodiment of the present invention A low-density sihcon oxide-based film 120 having a dense silicon dioxide cap 130 is formed over a substrate 1 10 Typical low-density silicon oxide-based films include those described hereinabove that are deposited using techniques such as PECVD and spin on techniques A trench 140 having side wall portions 150 and 151 is formed in the film 120 During processing, such as etching, ashing, or plasma-assisted photoresist removal, the side wall portions 150 and 151 are damaged In FIG 2, a gas 210 containing a deposition precursor and an oxidizer are introduced to the trench region 140 immediately after the damage occurs and while the side wall portions 150 and 151 are in a reactive state The gas 210 reacts with the damaged regions, passiv ates some or all of the reactive side walls, and forms reconstructed regions 250 and 251 within the side wall portions 150 and 151 The teconstructed regions act to repair the damaged regions and provide benefits including protecting the underlymg low density silicon from further damage, improving the ability to integrate the region for further processing, strengthening the wall, densifying the wall, passivatmg the reactive species, and preventing diffusion Several types of deposition precursors and oxidizers can be used to achieve desired results For example, typical silicon dioxide-based precursors, such as Silane or Tetra Ethyl Ortho Silicate (TEOS), with an appropriate oxidizer, such as N 2 0 or 0 2 , can be used under conditions that produce a very low deposition rate that is marginal for bulk deposition, such as with low or no RF power on, or with conditions otherwise selected to minimize the deposition rate Minimizing the deposition rate is useful because the trenches have already been etched, and any deposition on the bottom of the trench will have to be removed before the barrier metal is deposited to ensure good electrical contact In addition, the repair film generally has a higher dielectric constant than the material in the trench wall, and keeping the film thin minimizes the resulting increase in dielectric constant Maintaining a low dielectric constant is desirable because it helps to limit line to line capacitance Other gases, such as nitrogen or silicon carbide deposition precursors, can also be used to achieve particular results For instance, a silicon carbide layer can be formed on the trench wall to create a copper diffusion barrier The silicon carbide layer is formed by PECVD deposition of trimethyl silane and helium According to another example embodiment of the present invention, a controlled thickness of the mterfacial layer is further damaged after being repaired, and the further damaged region is then subsequently repaired In one implementation, the mterfacial layer is damaged using a separate damage process, wherein a controlled thickness between about 10 and 500 Angstroms is damaged In another implementation, the mterfacial layer is damaged using a damage process that is part of another manufacturing procedure, such as photoresist removal, etching, or ashing In either case, a passivation gas such as a silicon dioxide deposition precursor is delivered to the damaged region, reacts with the damaged region, and forms a repaired area having improved strength and resistance to further processing damage The additional damage step, whether performed as a separate step or as part of another manufacturing step, may be performed at one or several points in the manufacturing process For example, the additional damage step can be performed during or after the etch, ash, or photoresist removal processes The damage can be effected in the etch chamber, in the ash reactor, in an additional chamber on the same mainframe (which allows the additional damage to be performed without breaking vacuum), or in a different tool altogether In another example embodiment, the damage and repair steps are performed at several points in the manufacturing process, resulting in the repair being performed in stages In another example embodiment of the present invention, a system is adapted for repairing a semiconductor chip having damaged silicon film, using methods such as described herein above The system includes a deposition arrangement adapted to introduce a deposition precursor and an oxidizei to damaged silicon film in a chip The deposition precursoi is reacted with the damaged silicon film and a thm repair film is grown In one example implementation, the system includes a commonly available chamber, such as an etch or an ash chamber, adapted to deliver the gasses relevant to silicon oxide repair FIG 3 shows a system 300 arranged for repairing a semiconductor wafer, according to another example embodiment of the present invention The system includes a repair chamber 310 coupled to a gas supply 320 adapted to supply a gas including a deposition precursor and an oxidizer to a wafer 350 located on a wafer holder 330 Optionally, a plasma generator 360 is used to generate plasma from the deposition precursor in the chamber The gas reacts with the damaged film and a thm repair film is grown within the damaged silicon film The repair may be accomplished using various combinations of chambers and at various stages in manufacturing process For example, in one implementation, the repair chamber 310 of FIG 3 further includes an etching arrangement adapted to etch the wafer, and in another example implementation, the chamber 310 includes an ashing arrangement adapted to ash the wafer In each of the etch and ashing example implementations, the gas supply 320 can be used to supply a gas during or after an etch or ash process In still another example implementation, the repair chamber is coupled to a mainframe having an etch chamber adapted to etch the wafer The system is further adapted to draw a vacuum on the etch and repair chambers and to transfer the wafer from the etch chamber to the repair chamber without breaking the vacuum While the present invention has been described with reference to several particular example embodiments, those skilled in the art will recognize that many changes may be made thereto without departing from the spirit and scope of the present invention, which is set forth in the following claims

Claims: What is claimed is 1 A method for repairing damaged low-density silicon oxide film (120) in a semiconductor wafer ( 100), the method comprising introducing a gas (210) comprising deposition precursor and an oxidizer to the damaged film ( 150, 151 ), and growing a thm repair film (250, 251) within the damaged film, wherein the damaged silicon reacts with the deposition precursor to grow the film 2 The method of claim 1, further comprising damaging an interface layei (150, 151 ) of a controlled thickness, and treating the damaged layer with a passivatmg gas and rendering the layer strengthened and inert to further process damage 3 The method of claim 2, wherein treating the damaged layer with a passive gas includes using a silicon dioxide deposition precursor 4 A method according to claim 1 , wherein the steps of introducing and growing are performed after the low-density silicon oxide film (120) is damaged, and wherein the low-density silicon oxide film (120) is in a reactive state 5 A method for manufacturing a semiconductor wafer ( 106), the method comprising forming a low density silicon oxide film ( 120) on the semiconductor wafer, forming a silicon dioxide cap layer (130) over the low density silicon oxide film, forming a photoresist layer over the silicon dioxide cap layer, etching a trench ( 140) having a wall ( 150, 151) in the low density silicon oxide film ( 120), using a plasma and removing the photoresist layer; and introducing a gas (210) comprising a SiO, deposition precursor and an oxidizer to the trench wall (150, 151), wherein the trench wall reacts with the Sι0 2 deposition precursor to form a thin silicon oxide repair region (250, 251 ) within the trench wall 6 The method of claim 5, further comprising damaging the film near the wall prior to introducing the gas (210) 7 A method according to claim 5, wherein introducing the gas (210) includes introducing the gas (210) after the low-density silicon-oxide film ( 120) is damaged, and wherein the steps of introducing and growing are performed after the low-density silicon oxide film (120) is damaged, and wherein the low-density silicon oxide film (120) is m a reactive state 8 A system (300) for manufacturing a semiconductor chip (350), the system characterized in that a repair chamber (310) is adapted to hold the chip on a stage (330), a deposition arrangement (320) is adapted to introduce a deposition precursor and an oxidizer to damaged silicon film in the chip, a plasma generator (360) is adapted to generate plasma from the deposition precursor, and to grow a thin repair film within the damaged film by reacting the deposition precursor with the damaged film 9 The system of claim 8, wherein the system includes an etch chamber, wherein the repair chamber is adapted to introduce the deposition precursor while the chip is being etched 10 The system of claim 8, wherein the system includes an ash chamber, wherein the repair chamber is adapted to introduce the deposition precursor while the chip is being ashed

Inventors: MARTIN JEREMY ISAAC, MARTIN, JEREMY, ISAAC
Applicants: ADVANCED MICRO DEVICES INC, ADVANCED MICRO DEVICES, INC.
Application year: 2001
Main classification: H01L21
IPC codes: H01L21