CHAMBER FOR UNIFORM SUBSTRATE HEATING

Abstract: Embodiments of the invention generally provide an apparatus and a method for providing a uniform thermal profile to a plurality of substrates during heat processing. In one embodiment, a cassette containing one or more heated substrate supports is moveably disposed within a heating chamber having an about uniform thermal profile therein to more uniformly heat the substrates.

Description: CHAMBER FOR UNIFORM SUSBTRATE HEATING CROSS-REFERENCE TO RELATED APPLICATIONS [0001] This application claims benefit of United States provisional Patent Application Serial Number 60/259,035, filed December 29, 2000, which is herein incorporated by reference. BACKGROUND OF THE INVENTION Field of the Invention [0002] Aspects of the invention generally relate to an apparatus and method for heat processing substrates. Background of the Related Art [0003] In the fabrication of flat panel displays (FPD), thin film transistors (TFT) and liquid crystal cells, metal interconnects and other features are formed by depositing and removing multiple layers of conducting, semiconducting and dielectric materials from a glass substrate. The various features formed are integrated into a system that collectively is used to create, for example, active matrix display screens in which display states are electrically created in individual pixels on the FPD. Processing techniques used to create the FPD include plasma-enhanced chemical vapor deposition (PECVD), physical vapor deposition (PVD), etching, and the like. Plasma processing is particularly well suited for the production of flat panel displays because of the relatively lower processing temperatures required to deposit film and good film quality which results from plasma processes. [0004] During FPD processing, proper heat processing of the film across the entire surface of the substrate is critical for the FPD to function properly. The heating temperature required varies depending on the type of film being processed, and process being performed. For example, one exemplary type of flat panel display film used in the construction of FPDs is low temperature poly silicon (LTPS). Part of the LTPS film processing requires the LTPS film be heated up to about 600°C to remove hydrogen from the film whereas a similar heat treatment for amorphous silicon (α-Si) film requires a substantially lower temperature of up to 450°C. [0005] Generally, the film heating process is highly temperature sensitive as temperature non-uniformity may cause insufficient removal of unwanted contaminates, resulting in peeling and ablation of the film. To compensate for temperature non-uniformity heating process times must be extended. Unfortunately, extending the heating process times increases the production cost and often results in unusable films if the process is not completed. [0006] Conventional heating chambers provide heat processing by heating one or more substrates through a combination of gas conduction and heat radiation. Unfortunately, the chamber walls and other internal chamber components provide heat conduction paths within the chamber resulting in conductive heat losses. The conductive heat losses create a constantly fluctuating substrate-heating environment. As the temperatures are increased, conductive heat losses become more pronounced, exacerbating the heat non-uniformity within the substrate-heating environment. Moreover, conventional heating chambers are often very large to accommodate the substrate perimeter, further exacerbating the heating issues by increasing the area and volume to be heated. For example, as the demand for larger computer displays, monitors, flat-screen televisions, and the like increases a typical substrate may be 620mm x 750mm, or larger. For instance, substrates of 1 meter x 1 meter are contemplated. Typically, to compensate for the larger substrates, larger chamber volumes, and the subsequent increase in heat losses, more heating elements are used, thereby increasing the cost of the equipment, energy usage, and temperature non-uniformity. As temperatures increase, copper heating elements are often employed to offset energy costs and provide efficient heating. Copper heaters are generally more energy efficient than other types of heating elements. Unfortunately, as the temperatures are increased, copper atoms from the copper heaters often escape into the heating chamber and contaminate the film. Thus, traditional heating chambers and heating processes do not provide acceptably uniform and contaminant-free substrate heating for an efficient and cost effective substrate heating process. [0007] Therefore, there is a need for a method and apparatus for uniformly heat processing a plurality of substrates in an efficient contaminate-free heat processing system. Summary Of The Invention [0008] Embodiments of the invention generally provide for the uniform heating of substrates within a heating chamber for use with substrate processing systems. In one aspect of the invention, substrates are uniformly heated within an insulated chamber having a body, a bottom portion, and a lid. The chamber also includes a heat reflector disposed within the chamber, a heater disposed within the chamber adjacent to the heat reflector and a plurality of heated supports movably disposed within the chamber to support at least two substrates within the chamber. [0009] In another aspect of the invention, a method is provided for uniformly heating substrates, comprising supporting a plurality of substrates on a plurality of heated supports within a chamber slightly larger than and shaped to conform to the shape of the substrate support, providing a process temperature between about 450°C and about 600°C, providing a vacuum within the chamber, and uniformly heating the substrates to a uniform temperature. BRIEF DESCRIPTION OF THE DRAWINGS [0010] So that the manner in which the recited embodiments of the invention are attained and can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings. [0011] It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments. [0012] Figure 1 is a plan view of a processing system including the heating chamber of the invention. [0013] Figure 2 is a perspective view of one embodiment of the heating chamber of Figure 1. [0014] Figure 3 is a partial cross-sectional view of the heating chamber of Figure 1 illustrating an upper and lower bell jar configuration. [0015] Figure 4 is a partial cross-sectional view of the heating chamber and transfer chamber of Figure 1. [0016] Figure 5 is a partial cross-sectional view of the heating chamber of Figure 1 illustrating the body, heat reflector, and heater. [0017] Figure 6 is a top cross-sectional view of the heating chamber of Figure 5. [0018] Figure 7 is a side view of a heater used with the heating chamber of Figure 5. [0019] Figure 8 is a partial cross-section of a heater used with the heating chamber of Figure 5. [0020] Figure 9 is a perspective view of a heated substrate support used with the heating chamber of Figure 5. [0021] Figure 10 is a top view of a heated substrate support used with the heating chamber of Figure 5. [0022] Figure 11 is a temperature contour of a substrate undergoing heat treatment within the heating chamber of Figure 5. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT [0023] Embodiments of the invention have particular advantages in a multi- chamber processing system also known as a cluster tool, commonly used in the semiconductor industry and well suited for supporting the substrate-heating chamber described herein. A cluster tool is a modular system comprising multiple chambers that perform various functions including substrate heating, center-finding and orientation, annealing, deposition and/or etching. The multiple chambers are mounted to a central transfer chamber which houses a robot adapted to shuttle substrates between the chambers. The transfer chamber is typically maintained at a vacuum condition and provides an intermediate stage for shuttling substrates from one chamber to another and/or to a load lock chamber positioned at a front end of the cluster tool. [0024] Figure 1 is a plan view of a typical processing system 100 for semiconductor processing wherein the invention may be used to advantage. The processing system 100 generally comprises a plurality of chambers and robots and is preferably equipped with a process system controller 102 programmed to carry out the various processing methods performed in the processing system 100. A front- end environment 104 is shown positioned in selective communication with a pair of load lock chambers 106. Pod loaders 108A-B disposed in the front-end environment 104 are capable of linear, rotational, and vertical movement to shuttle substrates between the load locks 106 and a plurality of pods 105 which are mounted on the front-end environment 104. [0025] The load locks 106 provide a first vacuum interface between the front-end environment 104 and a transfer chamber 110. Two load locks 106 are provided to increase throughput by alternatively communicating with the transfer chamber 110 and the front-end environment 104. Thus, while one load lock 106 communicates with the transfer chamber 110, a second load lock 106 communicates with the front- end environment 104. [0026] A robot 113 is centrally disposed in the transfer chamber 110 to transfer substrates from the load locks 106 to one of the various processing chambers 114 or holding chambers 116. The processing chambers 114 are adapted to perform any number of processes such as film deposition, annealing, etching, and the like while the holding chambers 116 adapted for, orientation, cool down and the like. A heating chamber 140 used to heat substrates during a heat process such as hydrogen removal and annealing is disposed within processing system 100. The heating chamber 140 is located typically disposed within the processing system 100 in the most efficient processing position but may be located anywhere within processing system 100. For example, the heating process step may follow a deposition process step. Therefore, to minimize the movement of the robot 113, the heating chamber 140 may be located adjacent to one of the processing chambers 114 used for a deposition process step. [0027] Figure 2 is a perspective view of the heating chamber 140 comprising an upper section 215 (e.g., upper bell jar) and a lower section 217 (e.g., lower bell jar) where the upper section 215 is separated from the lower section 217 by a connecting body 230 having a loading window 235. The upper and lower sections 215, 217 are sealably attached to and generally symmetrical and coaxial about the connecting body 230. The upper section 215 and lower section 217 may be sealed to connecting body 230 using frictional fit, using sealing materials such as gaskets or putty adapted to withstand high temperatures, or by using adhesives such as pressure sensitive adhesives, ceramic bonding, glue, and the like that are process resistant and free of contaminates such as copper. The upper section 215 and lower section 217 may be connected to connecting body 230 by conventional means such as welding, or by using bolts, clamps or other fasteners as are known in the art. [0028] The heating chamber 140 is mounted on a mounting frame 255 to provide support for the upper section 215 and lower section 217. In one aspect, the mounting frame 255 may comprise rotatably mounted casters 245, 246, and 247 on a lower end for moving the heating chamber 140. The mounting frame 255 may be attached to the heating chamber 140 and connecting body 230 by conventional means such as bolts, clamps or other fasteners as are known in the art. While the heating chamber 140 is preferably mounted on frame 255, the heating chamber 140 may be mounted to and supported by the transfer chamber 110 using fasteners such as screws, bolts, clips, and the like. [0029] A motor 285 used with the transportation of substrates within the heating chamber 140, may be attached to the heating chamber 140 using fasteners such as screws, bolts, clips, and the like. The motor 285 is rotatably coupled to a lead screw 288. The lead screw 288 is rotatably coupled to a platform 287 slidably coupled to the frame 255. When the lead screw 288 is rotated by the motor 285, the platform 287 is vertically raised or lowered. [0030] In one embodiment, a thermal insulating layer (not shown) may be used to enclose, or wrap, the heating chamber 140 to minimize heat loss from the heating chamber 140. The thermal insulating layer may comprise insulators such as fiberglass, ceramic fiber, asbestos, or other materials adapted to provide insulation from heat loss. In one embodiment, the insulating layer comprises a flexible insulating ceramic fiber blanket having a thermal conductivity of less than about 0.035 watt/m°K and stabilizes at a surface temperature of about 30°C. [0031] Figure 3 is a cross-section of one embodiment of a heating chamber 140 of the invention adapted for substrate heat processing. The heating chamber 140 comprises a body 305, a lid 335 and bottom 316 disposed on the body 305 and defining a cavity 307 for heating a plurality of substrates 328 therein. In one aspect, the body 305 is formed of process resistant materials such as aluminum, steel, nickel, and the like, adapted to withstand process temperatures and is generally free of contaminates such as copper. The body 305 may comprise a gas inlet 360 extending into the cavity 307 for connecting the heating chamber 140 to a process gas supply (not shown) for delivery of processing gases therethrough. In another aspect, a vacuum pump 390 may be coupled to the cavity 307 through a vacuum port 392 to maintain a vacuum within the cavity 307. [0032] A substrate cassette 310 is moveably disposed within the cavity 307 and is coupled to an upper end of a movable member 330. The moveable member 330 is comprised of process resistant materials such as aluminum, steel, nickel, and the like, adapted to withstand process temperatures and generally free of contaminates such as copper. The movable member 330 enters the cavity 307 through the bottom 316. The movable member 330 is slidably and sealably disposed through the bottom 316 and is raised and lowered by the platform 287. The platform 287 supports a lower end of the movable member 330 such that the movable member 330 is vertically raised or lowered in conjunction with the raising or lowering of the platform 287. The movable member 330 vertically raises and lowers the cassette 310 within the cavity 307 to move the substrates 328 across a substrate transfer plane 332 extending through the window 235. The substrate transfer plane 332 is defined by the path along which substrates are moved into and out of the cassette 310 by the robot 113. [0033] The cassette 310 comprises a plurality of substrate-heating shelves 336 supported by a frame 325. Although in one aspect, Figure 3 illustrates twelve substrate-heating shelves 336 within cassette 310, it is contemplated that any number of shelves may be used. Each substrate-heating shelf 336 comprises a heated substrate support 340 (e.g., heating plate) connected by brackets 317 to the frame 325. The brackets 317 connect the edges of the heated substrate support 340 to the frame 325 and may be attached to both the frame 325 and heated substrate support 340 using adhesives such as pressure sensitive adhesives, ceramic bonding, glue, and the like, or fasteners such as screws, bolts, clips, and the like that are process resistant and are free of contaminates such as copper. The frame 325 and brackets 317 are comprised of process resistant materials such as ceramics, aluminum, steel, nickel, and the like that are process resistant and are generally free of contaminates such as copper. While the frame 325 and brackets 317 may be separate items, it is contemplated that the brackets 317 may be integral to the frame 325 to form support members for the heated substrate supports 340. While, in one aspect, the heated substrate supports 340 are conformal to and slightly larger than the substrates 328 to maximize heating efficiency by applying a majority of the heat to the substrate 328, it is contemplated that the heated support 340 may be of any shape adapted to provide desired substrate heating. For example, in one embodiment the heated support 340 may be considerably larger than the substrate 328 to ensure that the, substrate 328 is fully exposed to the heat from the support 340. Alternatively, the heated support 340 may be formed to accommodate substrates 328 of various sizes. [0034] The substrate-heating shelves 336 are spaced vertically apart and parallel within the cassette 310 to define a plurality of substrate-heating spaces 322. Each substrate-heating space 322 is adapted to heat at least one substrate 328 therein supported on a plurality of support pins 342. The substrate-heating shelves 336 above and below each substrate 328 establish the upper and lower boundary of the substrate-heating space 322 such that the top and bottom sides of the substrate 328 are exposed to heat. In one embodiment, the upper and lower boundaries are equidistant from the substrate 328 in order to ensure uniform heating of both sides of the substrate 328. To ensure heating of the top substrate 328 in the cassette 310, the upper boundary for the top heating space 322 is established by an empty heated substrate support 340. In another embodiment, the spacing and substrate position may be adjusted to accommodate different heating requirements for different processes such as annealing, hydrogen removal, and the like. The spacing between the upper and lower boundary of the heating space 322 may be adjusted to increase or decrease the rate of heating, and the amount of heat applied to each substrate side. For example, the spacing between the upper and lower boundary of the heating space 322 can be spaced more narrowly to increase the radiant energy from the heated substrate supports 340 to thereby increase the temperature and rate of heating, or spaced further apart to reduce the incident radiant energy, thereby lowering the substrate temperature and slowing the heating of the substrate 328. Moreover, the substrate 328 may be positioned closer to either the upper or the lower boundary to provided differing amounts of heating to either side of the substrate 328. In one aspect, to increase production efficiency, the spacing between the upper and lower boundary of the heating space 322 may be adjusted to heat the substrate 328 at a desired rate and temperature while allowing the cassette 310 to hold as many substrate-heating shelves 336 as possible. In one aspect, the spacing between the upper and lower boundary is about 45mm. The inventors believe that the about 45mm spacing between the upper and lower boundary provides for adequate space to receive a substrate 328, uniform substrate heating, and efficient space utilization within the chamber 307 to maximize the number of substrate-heating shelves 336. [0035] Figure 4 illustrates a cross-sectional view of the heating chamber 140 and transfer chamber 110. The heating chamber 140 is positioned so that the window 235 is registered with an opening 109 formed in the sidewall of transfer chamber 110. In such a position, the transfer chamber opening 109 and the window 235 define a substrate transfer aperture 372 through which substrates 328 may be transferred by robot 113. The substrate transfer aperture 372 is selectively sealed by a sealing apparatus such as a gate valve or slit valve (not shown). During operation, the robot 113 receives a substrate 328 on a blade 118 supported on arms 111 from the processing system 100 via the transfer chamber 110 through the substrate transfer aperture 372. The blade 118 is positioned to deliver the substrate 328 to the heating chamber 140 through the substrate transfer aperture 372. The cassette 310 is moved vertically up or down to position an empty heating space 322 inline with the substrate transfer plane 332 to receive the substrate 328. The arms 111 are extended through the substrate transfer aperture 372 to dispose the substrate 328 within the heating chamber 140 and subsequently dispose the substrate 328 within cassette 310. The arms 111 extend the substrate 328 into the heating space 322 and position the substrate 328 above the pins 342. In one embodiment, the cassette 310 moves vertically until the pins 342 contact the substrate surface, lifting the substrate 328 off the blade 118. Subsequently the arms 111 and blade 118 are retracted back to the transfer chamber 110. In another embodiment, the arms 111 and blade 118 move vertically downwardly until the substrate 328 contacts the pins 342. The arms 111 and blade 118 continue to move downwardly until the substrate 328 is fully supported by the pins 342. [0036] Figure 5 is a cross-section top view of the heating chamber 140 illustrating one embodiment of the invention. Because the cavity 307 holds a plurality of substrates 328, the cavity 307 is typically larger in volume than chambers such as processing chambers 114 and holding chamber 116, which usually hold only one substrate 328. Because of the increased volume of the cavity 307, external atmospheric pressures on the chamber 140 under vacuum may be considerable. To provide structural strength and to minimize the cavity volume, the cavity 307 is preferably semi-round in shape and is conformal with and slightly larger than the cassette 310. In other embodiments, it is contemplated that the shape of the cavity 307 may be round, square, or any shape adapted to accommodate the substrate 328 and to have sufficient structural integrity to withstand the external atmospheric pressures. [0037] Figure 6 is a partial cross-sectional view of the heating chamber 140. A heat reflector 320 is disposed within cavity 307 and spaced adjacent an inner surface 311 of body 305, forming a reflective surface within the cavity 307. The heat reflector 320 is adapted to minimize conductive heat losses through the body 305 by providing radiant heat insulation between the cavity 307 and the inner surface 311. The heat reflector 320 reflects radiated heat within the cavity 307 away from the inner surface 311 and toward the center of the cavity 307. The heat reflector 320 may comprise a single layer. Alternatively, the heat reflector 320 may comprise multiple layers, or several pieces combined to form a unified body. The heat reflector 320 typically comprises heat conductors such as aluminum, nickel, steel, and the like that are process resistant and generally free of contaminates such as copper. When additional insulation is desired between the cavity 307 and the inner surface 311 , the heat reflector 320 comprises insulators such as metal plated ceramics, glass, and the like that are process resistant and generally free of contaminates such as copper. The heat reflector 320 comprises an inner heat reflective surface 327 plated with aluminum, nickel, gold, or other surfaces adapted to reflect heat and that are process resistant and generally free of contaminates such as copper. The heat reflector 320 may be attached to the inner surface 311 using several methods such as bonding to the inner surface 311 using pressure sensitive adhesives, ceramic bonding, glue, and the like, or by fasteners such as screws, bolts, clips, and the like that are process resistant and generally free of contaminates such as copper. Additionally, the heat reflector 320 can be deposited on the inner surface 311 using techniques such as electroplating, sputtering, anodizing, and the like. In one embodiment, the heat reflector 320 is spaced from the inner surface 311 using insulated fasteners such as insulated screws, bolts, clips, and the like, forming a gap therebetween the inner surface 311 and the heat reflector 320. [0038] A heater 315 is disposed within the cavity 307 between the heat reflector 320 and the cassette 310. The heater 315 is adapted to form a heating member conforming to and surrounding the cassette 310. The heater 315 comprises one or more heating elements such as resistive heaters, heating lamps, and the like disposed within a layer, or layers, of heat conducting materials such as nickel, steel, aluminum, and the like that radiate heat. Although, the inside surface 331 of the heater 315 is preferably bead blasted or anodized to provided a higher heat emissivity to improve the transmission of radiated heat within the cavity 307, other types of surface conditioning adapted to provided greater surface emissivity may be used. The outer surface 333 of the heater 315 is polished to provide a low emissivity, thereby minimizing the transmission of radiated heat to the chamber body 305. During substrate heat processing, the heater 315 is activated by a power source (not shown) and heated to a desired temperature. Although, in one aspect, a gap is established between the heater 315 and the heat reflector 320 to minimize heat transference via conduction to the heat reflector 320, the heater 315 may be in direct contact with heat reflector 320. [0039] Figures 7 and 8 illustrate one embodiment of the heater 315 that may be used to advantage. The heater 315 comprises a jacket 319 comprising thermally conducting materials such as aluminum, nickel, steel, and the like adapted to uniformly radiate heat within the cavity 307 and that are process resistant and generally free of contaminates such as copper. A continuous heating element 317 is disposed within slot 314 formed within the jacket 319. The continuous heating element 317 is adapted to radiate heat within the jacket 319. The continuous heating element 317 may be secured within slot 314 by frictional fit, by welding, using fill materials 313 generally free of contaminates such as copper and/or silver, or by using adhesives such as pressure sensitive adhesives, ceramic bonding, glue, and the like, or fasteners such as screws, bolts, clips, and the like that are process resistant and generally free of contaminates such as copper. In one embodiment, to provide a tighter fit between the jacket 319 and the continuous heating element 317, the continuous heating element 317 has a higher coefficient of expansion than that of the jacket 319. Although, in one aspect, the thermal expansion coefficient for the continuous heating element 317 is about α=17, and the thermal expansion coefficient for the jacket 319 is about α=13 other thermal expansion coefficients may be used to advantage. [0040] A pair of couplings 318 are connected to a power source (not shown), such as an external power supply, to provide power to the continuous heating element 317. Although it is preferred that the continuous heating element 317 be formed as a unified and homogenous heating member to provided uniform heating throughout the jacket 319, a plurality of individual heating elements such as restive heaters, lamps and the like, may be coupled together to form the continuous heating element 317. Additionally, the jacket 319 may be heated by a plurality of the individual heaters dispersed and coupled discretely throughout jacket 319. [0041] The heater 315 may be secured within the cavity 307 using any of several methods. For example, the heater 315 may be attached to the inner surface 311 using attachment methods such as bonding using adhesives such as pressure sensitive adhesives, ceramic bonding, glue, and the like, or fasteners such as screws, bolts, clips, and the like that are process resistant and generally free of contaminates such as copper. In a particular embodiment, the heater 315 comprises an upper portion having a mounting flange 312 for mounting the heater 315 to the body 305. Although it is preferred that the mounting flange 312 be integral to the heater 315, the mounting flange 312 may be a separate component. The mounting flange 312 may be attached to the body 305 using adhesives such as pressure sensitive adhesives, ceramic bonding, glue, and the like, or fasteners such as screws, bolts, clips, and the like that are process resistant and generally free of contaminates such as copper. [0042] Figure 9 illustrates one embodiment of the invention where the heated substrate support 340 and the support pins 342 space and support the substrate 328 thereon forming a lower portion of the heating space 322. Although, in one aspect, the number of support pins 342 is at least six, having four support pins 342 spaced substantially uniformly on the substrate outer periphery to fully support the edges and two support pins 342 adjacent the middle of the substrate 328, as illustrated in Figure 5. Alternatively, any number of support pins 342 may be used in any configuration adapted to support the substrate 328. The supporting pins 342 preferably comprises insulators such as polymers, ceramics, and the like with a cross section adapted to minimize contact with the substrate 328 and to prevent conduction between the heated substrate support 340 and the substrate 328. For additional supporting strength the supporting pins 342 may also comprise conductors such as steel, aluminum, nickel, and the like having a sufficiently small surface area to minimize conduction, that are process resistant, and generally free from contaminates such as copper. While in one aspect the support pins 324 comprise a pointed tip to minimize contact with substrate 328, the support pins 328 may have any tip cross section and profile adapted to support the substrate 328 such as rounded tip, square tip, flat tip, and the like adapted to minimize heat conduction to the heated substrate support 340. [0043] Figure 10 is a top view of the heated substrate support 340 comprising a plurality of plate heaters 347 disposed within a layer of thermally and electrically insulating material such as fiberglass, glass, ceramic, asbestos, and the like. The plate heaters 347 may be resistive heaters, radiant lamps, and the like. The plate heaters 347 may be activated by power supplied by a power source (not shown) such as an external power supply coupled through connectors 345. Typically, the temperature across the substrate surfaces varies as a function of the substrate body heat migration due to convection and conduction within the chamber 140, proximity to the heated substrate support 340, the support pins 342, the heater 315, and the overall thermal profile within the cavity 307. In one embodiment, the plate heaters 347 are patterned to provide a radiant heating profile to match and compensate for substrate thermal losses, i.e. the substrate heat loss profile. For example, the plate heaters 347 illustrated in Figure 10 are spaced closer together near the corners than the middle of the heated substrate support 340 to provide more concentrated heat to the corners and edges of the substrate 328 where a substantial amount of conductive and/or radiated heat loss occurs. Although, heat typically tends to radiate from the substrate edges, it is contemplated that the patterned heating profile may be adapted to encompass any variation in the substrate heat loss profile. For example, the plate heaters 347 may be adapted to provide a variable amount of heat output by varying their size, spacing, resistivity, illumination, input power, and the like to more closely fit the substrate heat loss profile. Moreover, the heated substrate support 340 is spaced from the substrate 328 by the support pins 342 as shown in Figures 3, 4, and 6 to allow the radiated heat between the lower surface of the substrate 328 and upper surface of the heated support to intermix. Although, in one aspect the spacing between the heated substrate support 340 and the substrate 328 is about 20mm, other spacings are contemplated. Although it is believed that the radiant heat from the heated substrate support 340 intermixes before heating the substrate 328, thereby minimizing hotspots defined by the plate heater configuration, it is also contemplated that the substrate 328 may be laid directly on a heated substrate support 340 with plate heaters adapted to substantially match the substrate heat loss profile. [0044] In operation, the heating chamber 140 heating process is initiated by the robot 113 placing the substrate 328 via window 235 within cavity 307 on a heated substrate support 340. An inert process gas, such as nitrogen, is flowed into the cavity 307 through the gas inlet 360 and is maintained at a required chamber pressure by the vacuum pump 390. Alternatively, the process gas may be an active process gas, such as fluorine, adapted for a particular process. The cavity 307 is heated with radiant heat by the heater 315 and heated substrate support 340, or heater 315 alone, in cooperation with the heat reflector 320, to a desired ambient level sufficient to provide a uniform substrate heating profile. The individual substrates 328 are uniformly heated to a substrate body temperature between about 350°C to about 600°C. The temperature variation referenced to a temperature on the substrate body (i.e., normalized temperature variation) is about between +/- 5°C and about +/- 10°C. [0045] For example, in one method of operation in accordance with the invention the heating chamber 140 heating process is initiated by the robot 113 placing the substrate 328 via window 235 within cavity 307 on a heated substrate support 340. A vacuum within the cavity 307 is provided by vacuum pump 390 at about 0 to about 0.5 Torr. A process gas such as nitrogen is flowed into the cavity 307 through the gas inlet 360 and is maintained at chamber pressure at about 0.0 Torr to about 0.5 Torr by the vacuum pump 390. Heat is applied to the substrates via heater 315 and heated supports 340 to heat each substrate uniformly to a temperature of about 450°C to about 600°C each. Each substrate maintains a normalized heating profile of about +/- 5 °C at a substrate body temperature of about 450°C to about +/- 10°C at a substrate body temperature of about 600°C. For example, Figure 11 is an illustrative temperature contour map of a substrate 328 illustrating the normalized temperature variation across the body of the substrate 328, using the perimeter temperature as the normalizing value, during heat processing at about 500°C. Region, 350A, is the reference region and therefore has a zero temperature variance. Region, 350B, has about a +/- 1°C normalized temperature variation. Region 350C has about a +/- 2°C normalized temperature variation. Region 350D has about a +/- 3°C normalized temperature variation. Region 350E has about a +/- 5°C normalized temperature variation. Thus, the normalized temperature variation across the substrate 328 is about +/- 5°C. [0046] While foregoing is directed to the embodiments of the invention, other and further embodiments of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims: Claims 1. An apparatus for heating substrates, comprising: an insulated chamber having a body, a bottom portion, and a lid; a heat reflector disposed within the chamber; a heater disposed within the chamber adjacent to the heat reflector; and a plurality of heated supports movably disposed within the chamber to support at least two substrates thereon. 2. The apparatus of claim 1 , wherein the chamber, the heat reflector, and the heated supports comprise nickel. 3. The apparatus of claim 1 , wherein the chamber walls are slightly larger and conformal with the heated supports. 4. The apparatus of claim 1 , wherein the heater substantially surrounds the heated supports. 5. The apparatus of claim 1 , further comprising a pump to maintain a vacuum therein. 6. The apparatus of claim 1 , wherein the heater comprises an inner surface and outer surface wherein the heat emissivity value of the inner surface is greater than the heat emissivity value of the outer surface. 7. The apparatus of claim 1 , further comprising a plurality of heater elements disposed within the heater. 8. The apparatus of claim 7, wherein the heater elements are selected from the group of resistive heaters, radiant lamps, and combinations thereof. 9. The apparatus of claim 1 , wherein the heat reflector comprises a heat reflective surface thereon. 10. The apparatus of claim 9, wherein the heat reflector comprises materials selected from the group of glass, ceramics, and combinations thereof. 11. The apparatus of claim 9, wherein the heat reflector comprises materials selected from the group of aluminum, nickel, steel, and combinations thereof. 12. The apparatus of claim 9, wherein the heat reflective surface is selected from the group of aluminum, nickel, gold, and combinations thereof. 13. The apparatus of claim 1 , comprising at least one insulating layer disposed about the chamber. 14. The apparatus of claim 13, wherein the insulating layer is a flexible ceramic fiber blanket having thermal conductivity of less than about 0.053 watt/m°K. 15. The apparatus of claim 1 , wherein the heated support comprises a plurality of heating elements. 16. The apparatus of claim 15, wherein the heating elements are selected from the group of resistive heaters, radiant lamps, and combinations thereof. 17. A method for uniformly heating substrates, comprising: supporting a plurality of substrates on a plurality of heated supports within a chamber slightly larger than and shaped to conform to the shape of the substrate support; providing a process temperature of about between about 450°C and about 600°C; providing a vacuum within the chamber; and uniformly heating the substrates. 18. The method of claim 17, further comprising providing a nickel surface thereon the heated supports and chamber therein. 19. The method of claim 17, wherein uniformly heating the substrate comprises the step of heating the substrate with a heat pattern matching the substrate's heat loss profile. 20. The method of claim 17, further comprising maintaining a temperature profile within the chamber of about +/- 5°C at the process temperature of greater than about 450°C. 21. The method of claim 17, further comprising maintaining a temperature profile within the chamber of about +/- 10°C at a process temperature of about between about 450°C and about 600°C. 22. The method of claim 17, further comprising providing a radiant heat reflective surface therein to reflect radiant heat within the chamber. 23. The method of claim 17, further comprising providing a heater therein the chamber that substantially surrounds the chamber. 24. The method of claim 17, further comprising providing a normalized substrate temperature contour of less than about +/- 5°C at a substrate process temperature of about greater than 450°C. 25. The method of claim 17, further comprising providing a normalized substrate temperature contour of less than about +/- 10°C at a substrate process temperature of about between about 450°C and about 600°C. 26. The method of claim 17, further comprising providing a process gas within the chamber at a pressure of about between 0 and about 0.5 torr. 27. The method of claim 26, wherein the process gas is nitrogen. 28. An apparatus for heating substrates, comprising: a chamber having a cavity for holding a plurality of the substrates therein; at least one cassette having a plurality of heated supports moveably disposed within the cavity to support the plurality of substrates; a heating layer disposed within the cavity and positioned to provide radiant heat to the at least one cassette; and a heat reflector disposed within the cavity and surrounding at least a portion of the heated supports to form a reflective surface directed into the cavity. 29. The apparatus of claim 28, wherein the heating chamber, heated supports, heat reflector, and heating layer are about free of copper. 30. The apparatus of claim 28, wherein the cavity is about conformal with the heated supports. 31. The apparatus of claim 28, wherein the heating layer substantially surrounds the heated supports. 32. The apparatus of claim 28, wherein the heat reflector comprises a heat reflective surface thereon. 33. The apparatus of claim 28, wherein the heating layer comprises an inner surface and outer surface wherein the heat emissivity value of the inner surface is greater than the heat emissivity value of the outer surface. 34. The apparatus of claim 28, further comprising a pump to maintain a vacuum therein. 35. The apparatus of claim 28, wherein the heated supports are adapted to provide an about uniform heating to the substrates. 36. The apparatus of claim 35, wherein the heated supports comprises a plurality of heating elements arranged thereon to form a heating profile about consistent with a heat loss profile of one or more of the plurality of substrates being heated.

Inventors: HOSOKAWA AKIHIRO, KARDOKUS JANINE, SHANG QUANYUAN, HOSOKAWA, AKIHIRO, KARDOKUS, JANINE, SHANG, QUANYUAN
Applicants: APPLIED MATERIALS INC, APPLIED MATERIALS, INC.
Application year: 2001
Main classification: H01L21
IPC codes: H01L21, H05B3