Method for testing a CMOS integrated circuit

Abstract: A CMOS integrated circuit is tested with the following steps: establishing a current threshold value (Ith), power the integrated circuit in static and idle conditions, measuring the current absorbed (IDDQ) by the integrated circuit and comparing this with the threshold value (Ith) and accepting or rejecting the integrated circuit if the comparison shows that the current absorbed measured (IDDQ) is respectively lower or higher than the threshold value (Ith). To improve discrimination between sound and faulty devices, the threshold value (Ith) is obtained from the following steps: forming two measurement transistors (Mn, Mp) in the integrated circuit, one n channel and the other p channel, biasing these in the cut-off zone and measuring their sub-threshold currents (Isubn, Isubp), calculating the sub-threshold currents by channel unit of area of the transistors of the integrated circuit using the sub-threshold currents measured (Isubn, Isubp) and the channel areas of the measurement transistors (Mn, Mp), obtaining the sum of the channel areas of the transistors that are cut off when the integrated circuit is idle in static conditions, calculating the current absorbed by the integrated circuit when idle in static conditions (IDDQ) using the result of the two operations described above and adding a pre-established current increase ΔI to the current absorbed (IDDQ) in order to obtain the threshold value (Ith).

Description: This invention refers to a method for testing a CMOS integrated circuit as defined in the preamble of claim 1. At the end of the manufacturing process of a plurality of basically identical printed circuits formed on a wafer of semi-conductor material, a final wafer test is carried out on each device using suitable automatic equipment even before they are separated from each other. Testing includes various electrical measurements intended to ascertain that each device complies with certain functional requirements defined in the design phase. Devices that do not comply with all these requirements are identified so that they can be rejected once the wafer has been divided, whereas the devices that have passed the test are forwarded to the subsequent assembly and encapsulation phases. When testing large size CMOS digital integrated circuits or mixed digital/analog integrated circuits, one of the parameters on which one of the most significant electrical measurements is made is the idle current in static conditions, i.e. the current that the integrated circuit absorbs when it is connected to the power source but is inactive from a functional point of view and in stand-by or power-down mode. This parameter is usually indicated as IDDQ where I indicates the current, DD indicates the D.C. power supply and Q "quiescent" or idle status. The IDDQ current measured consists basically of the sum of the so-called sub-threshold currents of the MOS transistors, including those that form the memory cells, and of the leakage currents due to manufacturing defects or faulty materials. Further junction leakage currents are at least two orders of size lower and are therefore negligible. If the test specimen is faulty, as will be explained in more detail below, the current measured also includes a contribution provided directly by the fault. For each integrated circuit under test, the current IDDQ measured is compared in a comparator with a threshold value Ith established previously by examining test specimens of the same device and taking into account suitable margins of tolerance. If the comparison reveals that IDDQ is equal to or higher than Ith, the device tested is identified for subsequent rejection. The IDDQ test method, i.e. the method based on measurement and comparison of the IDDQ current, is acknowledged as highly significant in CMOS integrated circuit test schedules but is becoming ever more difficult to apply as integrated circuits become increasingly complex, i.e. as integration density and the number of logic gates, which usually indicate the level of complexity of a digital integrated circuit, increase. This is easier to understand considering that, as integration techniques have gradually improved, IDDQ currents have risen in just a short time from the 1 µA to 10 µA of integrated circuits containing 1,000-10,000 logic gates based on 1.5-1.0 µm technology to IDDQ currents of between 100 and 10,000 µA of integrated circuits containing 100,000-10 million logic gates in 0.5-0.2 µm technology. It is known that the contribution of the sub-threshold currents to the IDDQ current increases in proportion to the number of transistors. On the other hand, the threshold current Ith must be established so as to permit identification of a faulty device. That is to say, it must be equal to the sum of the IDDQ current measured for a sound device and of a current below the If current due to the presence of even just one electrical defect such as a short-circuit or a floating node in the integrated circuit. As this If current depends basically on the complexity of the integrated circuit, the difference between the IDDQ current measured for a sound device and the Ith current is percentagewise lower the higher the number of transistors of the integrated circuit. For example, if the IDDQ current for a device without electrical defects is 10 µA and if the If current due to a defect is at least 50 µA, the threshold current Ith can be set to 60 µA, i.e. six times the IDDQ of a sound device. If, on the other hand, the IDDQ of a sound device is 1 mA, the threshold voltage Ith must be set to 1.05 mA, i.e. to a value that differs from the IDDQ of a sound device only for a fraction of this (1/20th in this example) in order to avoid the risk of accepting devices with even only one defect that contributes with 50 µA to the measurement of the IDDQ. In conclusion, in the first case, the difference between IDDQ and Ith is 50 µA which is 500% of the IDDQ current to be compared and, in the second case, the difference is still 50 µA, which is however only 5% of the IDDQ current to be compared. Therefore, to ensure that the measurements are reliable also for devices with high integration density, ever more sensitive and therefore complex comparators and increasingly critical measurement procedures must be used. The inevitable differences between different samples of the same device belonging to different manufacturing lots due to variations in the manufacturing parameters represent a further complication. In particular, the sub-threshold currents of the MOS transistors which, as already mentioned, represent the highest contribution to the IDDQ current, vary considerably in devices of different lots and also in devices belonging to wafers of the same lot. For example, the IDDQ current measurement in sound devices (which will be indicated below as IDDQN) belonging to different lots may be between 5 and 35 µA. When the minimum current increase ΔIf due to a defect is within the variability range of the IDDQN current, it is difficult to establish a threshold value Ith that allows the comparator to distinguish between acceptable and non-acceptable devices. In the example given above, the variability range is 30 µA. If a defect involves an increase ΔIf, for example, of 20 µA, it is impossible to establish a threshold value Ith that makes it possible to reject all the devices with this defect only. The devices with IDDQN = 5 µA, may inclucle one that, with a defect ΔIf=20 µA, returns an IDDQ measurement of IDDQ = 30 µA, so that a threshold Ith even only slightly above the maximum limit of IDDQN current for sound devices (35 µA), would not permit identification of the faulty device. The purpose of this invention is to establish a high component density CMOS integrated circuit test method that improves discrimination between sound devices and faulty devices and thus guarantees higher production throughput. This purpose is achieved applying the method defined according to claim 1. The invention will be more readily understood reading the following detailed description of an embodiment of the invention provided purely by way of an illustrative, non-restrictive example referring to the accompanying drawing in which the only figure is a schematic representation of certain elements of an integrated circuit and certain elements of a test appliance which uses the method of the invention. According to the invention, a pair of MOS transistors, one n channel and one p channel indicated as Mn and Mp in the figure, with the same manufacturing process as the n channel and p channel MOS transistors of the integrated circuit are formed in each specimen integrated circuit on which the IDDQ test is to be carried out. Both transistors have their respective gate electrodes connected to the respective source electrodes and are therefore biased in the cut-off zone. Their drain and source electrodes are connected to their respective pairs of metal pads VDn VSn and VDp VSp that are used to connect the two transistors to the test appliance with the usual contact points identified by arrows in the drawing. The test appliance consists simply of a D.C. voltage source Vo in series with an ammeter nA. With this test arrangement, the sub-threshold currents Isubn, Isubp of the transistors Mn and Mp are measured in the same temperature and power supply conditions that will be used for subsequent measurement of the IDDQ current of the device in which the Mn and Mp transistors are formed. The values measured Isubn, Isubp are stored in the test appliance together with the channel widths WMn and WMp of transistors Mn and Mp. Considering that all the MOS transistors of the device, including transistors Mn and Mp, have the same channel length, the Isubn/WMn and Isubp/WMp relationships indicate the sub-threshold currents by unit of area for the n channel and p channel MOS transistors of the device. The current IDDQ for a device without faults is therefore given by the following expression: IDDQ= Isubn WMn •∑(Wnoff)+ Isubp Wmp •∑(Wpoff) where Isubn and Isubp indicate the sub-threshold currents measured for the transistors, respectively Mn and Mp, WMn and WMp indicate the channel widths of the same transistors Mn and Mp and Σ(Wnoff) and Σ(Wpoff) indicate the sums of the channel widths of all the MOS transistors, of the channel n and channel p type respectively which in the measurement conditions of the current IDDQ are cut off and are biased so that a sub-threshold current flows through them. The sums Σ(Wnoff) and Σ(Wpoff) can be obtained from the design data of the integrated circuit from which the channel widths of the n channel and p channel transistors are obtained and through computer simulation of the functioning of the integrated circuit in IDDQ current measurement conditions, i.e. on stand-by and in static conditions, in order to count the number of n channel transistors and p channel transistors that are cut off in these conditions. All the transistors that, although cut off, do not contribute to the current IDDQ because they are not biased in such a way as to conduct a sub-threshold current, such as the so-called "pass transistors" that perform only interconnection functions, must be excluded from the count. The sums Σ(Wnoff) and Σ(Wpoff) are stored on the test appliance as characteristic data of the integrated circuit to be tested, to be used when calculating the current IDDQ of each integrated circuit according to the expression given above. The channel widths Wn and Wp are determined so that the sub-threshold currents in the measurement conditions are higher than the sensitivity of the IDDQ current measurement instrument. To do this, the channel length that can be obtained with the manufacturing process used must be taken into account. For example, with a 0.5 µm process, the sub-threshold currents measured at ambient temperature are Isubn ≅ 10pA per µm of channel width Isubp ≅ 9pA per µm of channel width, respectively for an n channel MOS transistor and for a p channel MOS transistor biased with a voltage between drain and source |VDSp|= VDSn = 2.5V, with a voltage between gate and source |VGSp|= VGSn = 0V and with a voltage between body and source VBSp|VBSn|= 0V. Considering a test appliance with an ammeter able to measure currents not below some tens of nA, it is possible to obtain measurable sub-threshold values constructing measurement transistors Mn and Mp with a channel width W≅10,000µm. In this case the sub-threshold current for the two transistors is around 10pA/µm•10,000µ m=100nA. If the measurement is made above ambient temperature, the measurement transistors may have a lower channel width in view of the dependence (exponential) of the current Isub on temperature. For example, at a temperature of 70°C, channel width can be reduced to 100 µm, resulting in a saving of area of the integrated circuit. The threshold current Ith to be applied at the comparator is calculated by adding, to the IDDQ current calculated, a value ΔI of current large enough to take into account a single fault present in the smallest of the MOS transistors, i.e. in a p channel MOS transistor (which, as is known, has a conduction current per µm of channel width lower than that of an n channel transistor)conducting during the measurement of IDDQ. The following relationship must apply for ΔI ε ≤ ΔI ≤ Ion (minW) where ε indicates the error of the measurement instrument of the test appliance in the variation range of the IDDQN currents calculated and Ion(minW)is the current absorbed by the smallest transistor (p channel)of the integrated circuit that conducts during measurement of the IDDQ current. The Ion(minW) current is established according to the minimum defect that is to be detected. More precisely, it is equal to the short-circuit current if only effective short-circuits are to be detected or it is a fraction higher or lower than the short-circuit current if defects due to more or less strong resistance losses are also to be detected. Also, the value of ΔI must be as close as possible to ε. The test appliance then measures the current IDDQ absorbed by each of the integrated circuits to be tested powered in static and stand-by conditions, compares the current absorbed measured for each integrated circuit with the threshold value Ith established and indicates the integrated circuit as acceptable or non-acceptable if the comparison shows that the current absorbed measured is, respectively, lower or higher than the threshold value. The same operations as described above are carried out for each integrated circuit under test starting from measurement of the sub-threshold currents of the measurement transistors associated to the integrated circuit. The method according to the invention makes it possible to modify the measurement parameters specifically for each specimen of integrated circuit under test. Therefore, test operations are not affected by differences between different specimens of the same integrated circuit due to variability in the manufacturing parameters between different lots but also inside the same lot and inside each wafer. The test is therefore much more precise than that using the known method with a drastic reduction in the number of sound devices rejected and with evident benefits for manufacturing throughput. Also, even more important, it is no longer possible for faulty devices to pass the test and to be sold as good.

Claims: Method for testing an integrated circuit of a multitude of basically identical integrated circuits including n channel MOS transistors and p channel MOS transistors, method including the following steps: establishing a current threshold value (Ith), powering of the integrated circuit in static and idle conditions, measuring the current absorbed (IDDQ) by the integrated circuit, comparing the current absorbed measured (IDDQ) with the threshold value (Ith), accepting or rejecting the integrated circuit if the comparing step shows that the current absorbed measured (IDDQ) is respectively lower or higher than the threshold value (Ith) in which the following steps are performed in order to establish a current threshold value (Ith) : forming, in each integrated circuit, a first (Mn) and second (Mp) measurement transistor, one n channel and the other p channel, biasing the first (Mn) and the second (Mp) measurement transistor in the cut-off zone, measuring the sub-threshold currents (Isubn, Isubp) of the first (Mn) and second (Mp) measurement transistor, calculating the sub-threshold currents by unit of channel area for the n channel transistors and the p channel transistors from the sub-threshold currents (Isubn, Isubp) measured and from the channel areas (WMn, WMp) of the first (Mn) and of the second (Mp) transistor, obtaining the sums (Σwnoff, ΣWpoff) of the channel areas of the n channel transistors and of the p channel transistors that, with the integrated circuit idle in static conditions, are in a condition of cut-off, calculating the products of the sub-threshold currents by unit of channel area calculated for the sums of the areas obtained, calculating the current absorbed by the integrated circuit idle in static conditions (IDDQ) adding together the above products and adding a predefined current increase (ΔI) to the current absorbed calculated (IDDQ)in order to obtain the aforesaid current threshold value (Ith). Method according to claim 1 in which the channel areas of the n channel and p channel transistors that, with the integrated circuit idle and in static conditions, are in cut-off conditions, are obtained from dimensional design data of the n channel and p channel transistors and by counting the n channel transistors and p channel transistors in cut-off conditions through computer simulation of the functioning of the integrated circuit when idle in static conditions. Method according to claim 1 or 2 in which the predefined current increase (ΔI) is selected as less than the current (Ion(minW)) absorbed by the smallest MOS transistor of the integrated circuit that conducts during measurement of the current absorbed (IDDQ) and higher than the error (ε) of the measurement instrument of the test appliance. Method according to any of the previous claims in which the size of the two measurement transistors (Mn, Mp) is such that the sub-threshold currents (Isubn, Isubp) in the measurement conditions are greater than the sensitivity of the measurement instrument of the current absorbed (IDDQ) by the integrated circuit. Method according to any of the previous claims in which the current absorbed (IDDQ) by the integrated circuit is measured at a predefined temperature higher than ambient temperature.

Inventors: DALLAVALLE CARLO, DALLAVALLE, CARLO
Applicants: ST MICROELECTRONICS SRL, STMICROELECTRONICS S.R.L.
Application year: 2000
Main classification: G01R31
IPC codes: H01L21, G01R31, H01L27