OPTICAL WAVEGUIDE GRATING AND METHOD OF MANUFACTURING THE SAME

Abstract: In an optical waveguide grating in an optical fiber 10 having a cladding region 12 around a core region 11, a periodic refractive index distribution is existed in a predetermined area 13 of the core region 11 along the optical axis. The core region 11 has a composition of GeO 2 -P 2 O 5 -SiO 2 based glass, for example, whereas the cladding region 12 is made of SiO 2 , and the co-doping ratio in the core region 11 is adjusted, so as to lower the temperature dependence of characteristics. The doping amount of P 2 O 5 in the core region 11 is preferably 1/15 to 1 times, more preferably 0.6 to 1 times that of GeO 2 .

Description: Technical Field The present invention relates to an optical waveguide grating formed in an optical waveguide such as an optical fiber, and a method of making the same. Background Art Various applications of optical waveguide gratings having a periodic refractive index changing area (grating area) along the optical axis of an optical waveguide to optical filters and the like in optical communication systems have conventionally been studied. Among others, those having a relatively long grating period of several hundreds of micrometers are known as long-period grating (see, for example, A.M. Vengsarkar, et al., J. Lightwave Tech., Vol. 14, No. 1, pp. 58-65, 1996), and their use in gain equalizers, band-stop filters, and the like is expected. Since characteristics of such a long-period optical waveguide grating have been known to vary with changes in temperature, temperature characteristics of optical waveguide gratings have been analyzed (see, for example, J.B. Judkins, et al., OFC '96, PD-1, 1996). That is, in an optical waveguide grating, SiO 2 is used as a main ingredient of the optical waveguide, and GeO 2 is generally added thereto in order to form a core region, which is a light-propagating area of the optical waveguide, and periodically generate a refractive index modulation within the core region, so as to form a grating area. optical waveguides of this type are described in JP-A-8286055. since the change in refractive index with respect to temperature, i.e., the temperature dependence of refractive index, is greater in GeO 2 than in SiO 2 , the temperature dependence of refractive index in the core region and that in its surrounding cladding region differ from each other. As a result, in a long-period optical waveguide grating formed in such an optical waveguide, the temperature dependence of effective refractive index for core-propagating light and that for cladding-mode light differ from each other, whereby peak wavelengths would vary when temperature changes. In order to reduce the temperature sensitivity of long period gratings EP 0767391 A proposes the use of core materials and cladding materials, each having a similar temperature dependence of their refractive indices. Specifically the above document discloses a long period grating device consisting of a composite cladding comprising a first portion adjacent to the core with an index of refraction lower than the core and a second cladding portion adjacent to the first portion with an index of refraction greater than the first portion. As concrete examples, a core consisting of germanium doped silica, a first cladding portion of fluorine doped silica and a second cladding portion of silica are given. The temperature dependence of each of the respective refractive indices of SiO 2 glass, GeO 2 glass, and B 2 O 3 glass has been known (O.V. Mazurin, et al., "Handbook of Glass Data," Elsevier, 1985), and there has been known a technique based thereon in which, when an optical waveguide is a silica type optical fiber, its core region is co-doped with Ge element and B element, so as to lower the temperature dependence of characteristics of the optical waveguide grating (K. Shima, et al., OFC'97, FB2, 1997). Disclosure of the Invention However, since the technique disclosed in the above-mentioned publication of Shima, et al., is based on the result of investigation of temperature dependence of refractive indices in three kinds of oxides (SiO 2 , GeO 2 , and = B 2 O 3 ) disclosed in the above-mentioned publication of O.V. Mazurin, et al., the optimal doping ratio can be adjusted only by combinations of these oxides, whereby the freedom in designing is limited. Also, since the infrared absorption edge of B 2 O 3 is located on the shorter wavelength side from the respective infrared absorption edges of SiO 2 and GeO 2 , the light absorption in the wavelength band of 1.55 µm will increase by one digit or more if an optimal amount of B 2 O 3 is added to the optical waveguide. For example, an optical fiber having a relative refractive index difference of about 1% in which the doping ratio of Ge element and B element have been optimized yields an absorption loss of 24 dB/km, whereby it would not be applicable to practical use. Hence, there has been no development of optical waveguide gratings having a low temperature dependence and low absorption loss in the wavelength band of 1.55 µm, which is used for optical communications. In order to overcome the problems mentioned above, it is an object of the present invention to provide a long-period optical waveguide grating having a low temperature dependence and yielding a low absorption loss in the wavelength band of 1.55 µm, and a method of making the same. Here, the temperature dependence of the peak wavelength λ m of mode coupling in an optical waveguide grating having a grating period of A is represented by the following expression: Here, n 01 is the effective refractive index of core-propagating light, n m is the effective refractive index of the m-th order cladding mode light, and T is the absolute temperature. Namely, dn 01 / dT is the temperature dependence of the core-propagating light, whereas dn m / dT is the temperature dependence of the m-th order cladding mode light. As can be seen from the above-mentioned expression, if the temperature dependence of effective refractive index for core-propagating light and that for cladding mode light can be caused to match each other, the temperature dependence of the peak wavelength λ m in the optical waveguide grating can be lowered. From such a viewpoint, the inventors have studied the temperature dependence of refractive indices of various glass-forming oxides. The glass-forming oxides studied here are constituted by four kinds, i.e., pure SiO 2 , SiO 2 doped with 10% of GeO 2 , SiO 2 doped with 10% of B 2 O 3 , and SiO 2 doped with 10% of P 2 O 5 . For each of the glass-forming oxides, the refractive index difference Δn with reference to pure SiO 2 , and the temperature dependence of refractive index dn/dT were studied. The results are listed in the following Table 1. Refractive Indices of Glass-Forming Oxides and Their Temperature Dependence Δn dn/dT Difference of dn/dT from SiO 2 Pure SiO 2 0 1.380×10 -5 0 90%SiO 2 -10%GeO 2 +0.952% 1.434×10 -5 +0.054×10 -5 90%SiO 2 -10%B 2 O 3 -0.289% 1.051×10 -5 -0.329×10 -5 90%SiO 2 -10%P 2 O 5 +0.780% 1.077×10 -5 -0.303×10 -5 As can be seen from Table 1, as with B 2 O 3 , the difference in temperature dependence dn/dT of P 2 O 5 from pure SiO 2 is negative. Further, since P 2 O 5 has an infrared absorption edge located on the longer wavelength side from that of B 2 O 3 , the absorption loss in the wavelength band of 1.55 µm would not deteriorate when it is added to silica glass. Consequently, the inventors have found it possible to lower the absorption loss in the wavelength band of 1.55 µm while yielding a temperature dependence dn/dT substantially matching that of pure SiO 2 if P 2 O 5 , in place of B 2 O 3 , is added to SiO 2 together with GeO 2 . The long-period optical waveguide grating in accordance with the present invention is based on this finding, and is formed in an optical waveguide, mainly composed of SiO 2 , having a cladding region around a core region, having an area where a refractive index of the core region changes periodically along the optical axis direction; wherein the core region is co-doped with GeO 2 and P 2 O 5 As a consequence of such a configuration, the temperature dependence dn/dT of the optical waveguide grating can substantially match that of pure SiO 2 without adding B 2 O 3 , which may enhance the absorption loss, or while reducing the amount of addition thereof. Hence, while the absorption loss in the wavelength band of 1.55 µm is suppressed, the temperature dependence of characteristics of the optical waveguide grating is lowered. The molar doping amount of P 2 O 5 in the core region is preferably 1/15 to 1 times, more preferably 0.6 to 1 times that of GeO 2 . According to the inventors' findings, the temperature dependence and absorption loss can favorably be lowered if the molar doping ratio is set as such. Also, since the doping amount can be selected from such a range, it increases the design flexibility, and it is easy to manufacture. Alternatively, the core region may further be doped with B 2 O 3 , such that the sum of respective molar doping amounts of P 2 O 5 and B 2 O 3 is 1/15 to 1 times the molar doping amount of GeO 2 , whereas the molar doping amount of B 2 O 3 is smaller than that of P 2 O 5 . According to the inventors' findings, if the molar doping amounts are set as such, then the increase in absorption loss in the wavelength band of 1.55 µm, which is seen when B 2 O 3 and GeO 2 are doped without P 2 O 5 , can be suppressed, whereby the temperature dependence can favorably be lowered. Also, since the doping amount can be selected from such a range, it increases the design flexibility, and it is easy to manufacture. Also, the cladding region may be doped with fluorine, and its refractive index may be adjusted so as to become lower than that of pure silica glass. As a consequence, the viscosity difference in core/cladding is lowered, so that the uniformity in processing improves at the time of processing a preform and drawing, whereby the ellipticity of the core is lowered, and an optical waveguide grating with a low polarization-dependent loss is obtained. In this case, letting Δn - be the ratio of decrease in refractive index of the cladding region with respect to pure silica glass, the molar doping amount of P 2 O 5 in the core region is preferably adjusted within the range of (0.8 - 0.7Δn - ) ± 0.2 time that of GeO 2 . According to the inventors' findings, when an F-doped cladding is employed, it is preferable for the doping amount to be set as such, in order to lower the temperature dependence of characteristics and the absorption loss, while matching the temperature dependence of the core and that on the cladding side. Also, since the doping amount can be selected from such a range, it increases the design flexibility and it is easy to manufacture. On the other hand, the method of making a long-period optical waveguide grating in accordance with the present invention is a method of making an optical waveguide grating of SiO 2 -GeO 2 -P 2 O 5 based glass, in which, without loading the optical waveguide with hydrogen, or after loading the optical waveguide with hydrogen at a pressure of 20 atmospheres or less, said optical waveguide is irradiated with an ultraviolet ray having a wavelength ranging from 150 to 200 nm so as to form the grating. In the conventional optical waveguide grating of SiO 2 -GeO 2 based glass (further including B 2 O 3 ), it has been necessary to load the optical waveguide with a large amount of hydrogen before making the grating; and, if hydrogen occluded in the grating is left as it is after the making, then thus occluded hydrogen may gradually be released to the outside of the optical waveguide, whereby characteristics of the grating may change. Therefore, it necessitates a hydrogen removing process by which the grating wavelength may change. While the long-period optical waveguide grating in accordance with the present invention comprises an SiO 2 -GeO 2 -P 2 O 5 based glass as mentioned above, the inventors have found that a glass co-doped with GeO 2 and P 2 O 5 is also photosensitive to ultraviolet rays having a wavelength of at least 150 nm but not greater than 200 nm, and that the hydrogen loading process is totally or substantially unnecessary when the ultraviolet rays having a wavelength ranging from 150 to 200 nm are employed. Therefore, according to the manufacturing method of the present invention, the long-period optical waveguide grating can favorably be made without being influenced by occluded hydrogen. Alternatively, the method may be such that the optical waveguide is spot-heated periodically along the optical axis direction so as to form the grating. In the glass co-doped with GeO 2 and P 2 O 5 , a stress is applied to the core/cladding interface due to the differences in viscosity and coefficient of thermal expansion in core/cladding. The inventors have found that a grating having desirable characteristics can favorably be made if this stress is periodically alleviated by thermal effects or if thermal diffusion of an additive is utilized. In this case, since the hydrogen loading process is totally unnecessary, there is no effect of such occluded hydrogen. The present invention will be more fully understood from the detailed description given hereinbelow and the accompanying drawings, which are given by way of illustration only and are not to be considered as limiting the present invention. Further scope of applicability of the present invention will become apparent from the detailed description given hereinafter. However, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the invention, are given by way of illustration only. Brief Description of the Drawings Fig. 1 is an explanatory view of the basic structure of the optical waveguide grating in accordance with the present invention; Fig. 2 is a graph showing a correlation between the ratio of P 2 O 5 /GeO 2 molar doping amount in optical waveguide gratings in accordance with a first embodiment and the temperature shift dλ/dT of their loss peaks; Fig. 3 is a graph showing a correlation between the ratio of P 2 O 5 /GeO 2 molar doping amount in optical waveguide gratings in accordance with a second embodiment and the temperature shift dλ/dT of their loss peaks; Fig. 4 is an explanatory view showing a first embodiment of the method of making an optical waveguide grating in accordance with the present invention; Fig. 5 is a graph comparing changes in the peak wavelength of the gratings over time in the optical waveguide grating made by the method of the first embodiment and an optical waveguide grating made by a conventional method after their preparation; Figs. 6 to 8 are charts showing transmission spectra of three kinds of long-period gratings made by the method of the first embodiment, respectively; Fig. 9 is an explanatory view showing a second embodiment of the method of making an optical waveguide grating in accordance with the present invention; and Fig. 10 is a chart showing the transmission spectrum of the long-period grating made by the method of the second embodiment. Best Modes for Carrying Out the Invention In the following, preferred embodiments of the present invention will be explained in detail with reference to the accompanying drawings. To facilitate the comprehension of the explanation, the same reference numerals denote the same parts, where possible, throughout the drawings, and a repeated explanation will be omitted. Fig. 1 is a view for explaining the basic structure of the long-period optical waveguide grating in accordance with the present invention. This drawing is a vertical sectional view obtained when an optical fiber 10, which is an optical waveguide, is cut along a plane including its optical axis. This embodiment is configured such that, in the optical fiber 10 having a cladding region 12 disposed around a core region 11, a periodic refractive index change is generated in a predetermined area 13 of the core region 11 along the optical axis. The core region 11 is made of GeO 2 -P 2 O 5 -SiO 2 type glass, whereas the cladding region 12 is made of SiO 2 . The co-doping ratio of GeO 2 and P 2 O 5 in the core region 11 is adjusted, whereby the temperature dependence of characteristics is lowered. Here, if the doping amount of P 2 O 5 is smaller relative to that of GeO 2 , then the temperature dependence of the refractive index of the core region 11 becomes greater than that of the refractive index of the cladding region 12, whereby the peak wavelength of the optical waveguide grating shifts to the longer wavelength side as temperature rises. If the doping amount of P 2 O 5 is in excess, by contrast, then the temperature dependence of the refractive index of the core region 11 becomes lower than that of the refractive index of the cladding region 12, whereby the peak wavelength of the optical waveguide grating shifts to the shorter wavelength side as temperature rises. Also, even when the composition is the same, the diameter 2a of the core region 11 may be made smaller so as to reduce the amount of confinement of core-propagating light into the core region 11 or, conversely, the diameter 2a of the core region 11 may be made greater so as to enhance the amount of confinement of core-propagating light into the core region 11. In the case where the temperature dependence of the refractive index of the core region 11 and that of the cladding region 12 differ from each other, even when they have the same composition, as the diameter 2a of the core region 11 is smaller, the temperature dependence of the effective refractive index of core-propagating light is closer to the temperature dependence of the refractive index of the cladding region 12, whereby the operating wavelength changes less with temperature. Namely, in the same composition, it is preferred that the diameter 2a of the core region 11 be smaller and the amount of confinement of core-propagating light into the core region 11 be smaller from the viewpoint that the temperature dependence is lower. As mentioned above, the temperature dependence of the peak wavelength in a long-period optical waveguide grating varies depending on its optical waveguide configuration even when the composition is the same. In the optical waveguide grating of this embodiment, as a range in which the temperature dependence becomes lower than that of a P 2 O 5 -undoped optical waveguide grating, the doping amount of P 2 O 5 in the core region 11 is preferably 1/15 to 1 times that of GeO 2 . In order to verify the effects of lowering the temperature dependence of characteristics of optical waveguide gratings by co-doping their core region with P 2 O 5 and GeO 2 , the inventors carried out comparative experiments in which several kinds of the optical waveguide grating in accordance with the first embodiment were prepared with their doping ratio of P 2 O 5 and GeO 2 being mainly changed, and their characteristics were compared with each other. Their results will be reported in the following. (Example 1) In an optical fiber having an outside diameter of 125 µm with a core region having a diameter of 3.3 µm, a grating was formed in the core region. In the core region, the GeO 2 doping amount and the P 2 O 5 doping amount were 9.0 mol% and 1.5 mol%, respectively. Namely, the ratio of doping amount of P 2 O 5 to GeO 2 was 1/6. Evaluation of various characteristics of this optical fiber revealed that the cutoff wavelength λ c was 880 nm, the relative refractive index difference Δn of the core region with respect to the cladding region was 0.98%, and the absorption loss in the wavelength band of 1.55 µm was 1.1 dB/km. After having been subjected to a hydrogen loading process under a pressure of 5 atmospheres at 50 °C for one week, the optical fiber was irradiated with Ar + laser light (having a wavelength of 242 nm), so as to form a long-period optical waveguide grating having a period of 402.5 µm in its core region. When characteristics of optical waveguide grating thus obtained were studied, at a temperature of 25 °C, the peak wavelength was 1537.2 nm, and the transmission loss at the peak wavelength was 4.8 dB. Also, the temperature dependence of peak wavelength was +0.012 nm/°C. (Example 2) In an optical fiber having an outside diameter of 125 µm with a core region having a diameter of 3.1 µm, a grating was formed in the core region. In the core region, the GeO 2 doping amount and the P 2 O 5 doping amount were 8.3 mol% and 3.2 mol%, respectively. In other word, the ratio of doping amount of P 2 O 5 to GeO 2 was 0.386. Evaluation of various characteristics of this optical fiber revealed that the cutoff wavelength λ c was 845 nm, the relative refractive index difference Δn of the core region with respect to the cladding region was 1.04%, and the absorption loss in the wavelength band of 1.55 µm was 1.2 dB/km. After a hydrogen loading under a pressure of 5 atmospheres at 50 °C for one week is processed, the optical fiber was irradiated with Ar + laser light (having a wavelength of 242 nm), so as to form a long-period optical waveguide grating having a period of 405 µm in its core region. When characteristics of optical waveguide grating thus obtained were studied, at a temperature of 25 °C, the peak wavelength was 1536.8 nm, and the transmission loss at the peak wavelength was 4.0 dB. Also, the temperature dependence of peak wavelength was -0.032 nm/°C. (Examples 3 to 9) In each of seven optical fibers having an outside diameter of 125 µm with a core region having a diameter of about 3 µm, a grating was formed in the core region. Table 2 lists the ratio of molar doping amount of P 2 O 5 to GeO 2 , cutoff wavelength λ c , polarization mode dispersion value (PMD), and ellipticity of the core in each fiber. Characteristics of Optical Fibers for Fabricating Gratings in Examples Example Δn Ellipticity λ c P 2 O 5 /GeO 2 PMD@10m 3 1.69% 1.23% 850nm 0.36 0.230ps 4 1.90% 2.69% 870nm 0.47 1.070ps 5 1.06% 0.88% 820nm 0.66 0.070ps 6 1.21% 1.35% 860nm 0.50 0.201ps 7 1.11% 1.19% 890nm 1.40 0.011ps 8 1.19% 1.41% 840nm 1.73 0.060ps 9 1.32% 0.41% 850nm 1.00 0.036ps After a hydrogen loading under a pressure of 5 atmospheres at 50 °C for one week is processed, these optical fibers were irradiated with Ar + laser light (having a wavelength of 242 nm), so as to form a long-period optical waveguide grating having a period of 405 µm in their core region. Table 3 and Fig. 2 collectively indicate the results of studies concerning characteristics of individual optical waveguide gratings thus obtained. Fig. 2 is a graph in which changes in loss peak of optical waveguide gratings thus obtained in the wavelength band of 1.55 µm (1.50 µm to 1.60 µm) with temperature were studied within the temperature range of 0 to 45 °C, and the results were plotted using the abscissa as the molar doping amount ratio of P 2 O 5 /GeO 2 and the ordinate as thus determined temperature shift dλ/dT of loss peak. Characteristics of Optical Waveguide Gratings Obtained Example Peak wavelength dλ/dT at less wavelength Polarization-dep endent loss 3 1552nm +0.0172nm/°C 0.224dB 4 1528nm +0.0077nm/°C 0.525dB 5 1504nm +0.0053nm/°C 0.132dB 6 1541nm +0.0067nm/°C 0.152dB 7 1553nm -0.0223nm/°C 0.082dB 8 1561nm -0.0262nm/°C 0.122dB 9 1550nm -0.0031nm/°C 0.020dB As can be seen from Fig. 2, a correlation was found to exist between the molar doping amount ratio of P 2 O 5 /GeO 2 and the temperature shift dλ/dT of loss peak. Here, it was found particularly preferable for the temperature shift to lie within the range of ±0.006 nm/°C, and that, for making an optical waveguide grating whose temperature was within this range, the range of molar doping amount ratio of P 2 O 5 /GeO 2 was 0.8 ± 0.2, i.e., 0.6 to 1.0. Therefore, the molar doping amount ratio of P 2 O 5 /GeO 2 is most preferably set within this range. A second embodiment of the optical waveguide grating in accordance with the present invention will now be explained. This embodiment is structurally similar to the first embodiment and has the structure shown in Fig. 1, except that the cladding region 12 is made of F-doped SiO 2 . Since the cladding region 12 is doped with F element, the dn/dT of the cladding is lowered. Therefore, as the F element doping concentration in the cladding region is higher, the P 2 O 5 doping amount to the core region is required to be higher as compared with the first embodiment. In order to verify the effects of lowering the temperature dependence of characteristics of optical waveguide gratings having a cladding made of F-doped SiO 2 and a core region co-doped with P 2 O 5 and GeO 2 , the inventors carried out comparative experiments in which several kinds of the optical waveguide gratings in accordance with the second embodiment were prepared with their doping ratio of F in the cladding region and doping ratio of P 2 O 5 and GeO 2 in the core region being changed, and their characteristics were compared with each other. Their results will be reported in the following. (Examples 10 to 13) Using an F-doped silica glass pipe as a starting pipe, several kinds of optical fiber preforms each having a core made of GeO 2 -P 2 O 5 -SiO 2 co-doped glass and a cladding made of SiO 2 -F glass were prepared by MCVD method, and these preforms were used for making four kinds of optical fibers. In each optical fiber, the outside diameter was 125 µm, and the diameter of its core region was about 3 µm. Table 4 lists the amount of decrease of refractive index Δn - of the cladding region with respect to pure silica glass, ratio of molar doping amount of P 2 O 5 to GeO 2 , cutoff wavelength λ c , polarization mode dispersion value (PMD), relative refractive index difference Δn of the core region with respect to the cladding region, and ellipticity of the core in each fiber. Characteristics of Optical Fibers for Fabricating Gratings in Examples Example Δn - Δn Ellipticity λ c P 2 O 5 /GeO 2 PMD@10m 10 0.35% 1.40 0.69% 850nm 1.270 0.0033ps 11 0.35% 1.40 0.73% 870nm 0.846 0.0011ps 12 0.35% 1.54 0.72% 820nm 0.688 0.0039ps 13 0.70% 1.21 0.55% 860nm 1.272 0.0011ps When these optical fibers were made, the glass temperature at the time of collapsing the optical fiber preform was 1390 °C and 1220 °C in the case where Δn - was 0.35% and 0.70%, respectively, thus being much lower than the average of 1580 °C in the case where pure SiO 2 is used as the cladding region. While the ellipticity of the fiber of each example is a better value than those of the optical fibers having pure SiO 2 claddings shown in Table 2, it is because of the fact that the liquefaction the core region is suppressed due to the temperature drop upon the collapsing. After a hydrogen loading process under a pressure of 5 atmospheres at 50 °C for one week is processed, these optical fibers were irradiated with Ar + laser light (having a wavelength of 242 nm), so as to form a long-period optical waveguide grating having a period of 405 µm in their core region. Table 5 and Fig. 3 collectively indicate the results of studies concerning characteristics of individual optical waveguide gratings thus obtained. Fig. 3 is a graph in which changes in loss peak of optical waveguide gratings thus obtained in the wavelength band of 1.55 µm (1.50 µm to 1.60 µm) with temperature were studied within the temperature range of 0 to 45 °C, and the results were plotted using the abscissa as the molar doping amount ratio of P 2 O 5 /GeO 2 and the ordinate as thus determined temperature shift dλ/dT of loss peak. Characteristics of Optical Waveguide Gratings Obtained Example Peak wavelength dλ/dT at loss peak wavelength Polarization-de pendent loss 10 1537nm -0.0083nm/°C 0.032dB 11 1542nm +0.0070nin/°C 0.010dB 12 1555nm +0.0104nm/°C 0.015dB 13 1549nm +0.0019nm/°C 0.008dB As shown in Fig. 3, a correlation was found to exist between the molar doping amount ratio of P 2 O 5 /GeO 2 and the temperature shift dλ/dT of loss peak. Here, it was found particularly preferable for the temperature shift to lie within the range of ±0.006 nm/°C, and that, for making an optical waveguide grating whose temperature shift is within this range, the range of molar doping amount ratio of P 2 O 5 /GeO 2 may be set to 0.85 to 1.25 when Δn - is 0.35%, and 1.1 to 1.5 when Δn - is 0.70%. As a consequence, it was found that, if a preferable range of P 2 O 5 /GeO 2 molar ratio is expressed in terms of a function of Δn - , the ratio thereof can be expressed by "(0.8 - 0.7Δn - ) ±0.2." Also, it was verified that using F-doped SiO 2 in the cladding region can reduce the ellipticity of the core, thus making it possible to realize a long-period optical waveguide grating having a low polarization-dependent loss (PDL). A third embodiment of the optical waveguide grating in accordance with the present invention will now be explained. This embodiment also has the structure shown in Fig. 1 as with the first and second embodiments. It differs from the first embodiment in that the core region 11 is constituted by a GeO 2 -B 2 O 3 -P 2 O 5 -SiO 2 based glass. Arguments similar to those mentioned above in the optical waveguide grating in accordance with the first embodiment also hold true in the optical waveguide grating in accordance with this embodiment. In this embodiment, B 2 O 3 doping and P 2 O 5 doping are on a par with each other in terms of the effect of canceling the increase in refractive index temperature coefficient caused by GeO 2 doping. However, since the infrared absorption loss increases when the B 2 O 3 doping amount is in excess, it is desirable that the B 2 O 3 doping amount be lower than the P 2 O 5 doping amount. Namely, it is preferred that, in the core region 11, the sum of the P 2 O 5 doping amount and B 2 O 3 doping amount be 1/15 to 1 times the GeO 2 doping amount while the B 2 O 3 doping amount is smaller than the P 2 O 5 doping amount. Some embodiments of a method for favorably making an optical waveguide grating in accordance with the present invention, i.e., preferred embodiments of the method of making an optical waveguide grating in accordance with the present invention will now be explained. Fig. 4 shows a first embodiment of the method of making an optical waveguide grating in accordance with the present invention. On an optical fiber 20 having a core region not loaded with hydrogen, a comb-shaped mask 21 prepared in conformity to the grating form of the optical waveguide grating to be made is disposed, and this optical waveguide is irradiated with ArF excimer laser (having a wavelength of 193 nm) in the direction of arrow A, whereby the refractive index of the area irradiated with ultraviolet rays in the core region of the optical fiber 20 is changed upon exposure to the ultraviolet rays, so as to form a grating with a predetermined pitch. In the conventional method of making an optical waveguide grating, the core region is processed by hydrogen loading, so that the photosensitivity of the core region is enhanced by thus loaded hydrogen, whereby a refractive index changing area is formed. The inventors have found that the GeO 2 -P 2 O 5 -SiO 2 type optical fiber, which becomes a material for the optical waveguide grating in accordance with the present invention, has a sufficient photosensitivity in an ultraviolet wavelength region of 150 to 200 nm even without hydrogen loading. The manufacturing method of this embodiment is based on this finding. Fig. 5 shows the result of comparison concerning amounts of change in peak wavelength in the respective optical waveguide gratings made according to this method and the conventional method, in which a grating is made by irradiation with KrF laser (having a wavelength of 248 nm) after the hydrogenation process, after their preparation. Here, black circles indicate the optical waveguide grating made by the conventional method, whereas white circles indicate the optical waveguide grating made by the method of this embodiment. According to the conventional method, as can be seen from this graph, the peak wavelength shifts to the shorter wavelength side as the time passes. This is caused by the fact that occluded hydrogen decreases because of its effusion. In this embodiment, since no hydrogen is added, no occluded hydrogen exists, whereby the peak wavelength would not shift to the shorter wavelength side due to such hydrogen effusion. Though in the conventional method the peak wavelength is set assuming such shift toward the shorter wavelength, such assumption is unnecessary in this embodiment, whereby the peak wavelength can be set more accurately. Using three kinds of optical fibers in Examples 5 to 7 shown in Table 2 as respective materials, long-period gratings were made while employing a comb-shaped mask having a period of 423 µm and a duty cycle of 0.5 in accordance with this embodiment. Their ultraviolet ray irradiation intensities were set to 37, 12, and 7 mJ/cm 2 /pulse, respectively, and the laser oscillation frequency was set to 20 Hz. Figs. 6 to 8 show the respective transmission spectra of thus made long-period gratings. Favorable transmission characteristics were obtained in each of them. Their temperature dependence values of peak wavelength were 0.0062, 0.0102, and -0.0190 nm/°C, respectively, whereby it was verified that favorable characteristics on a par with those of the long-period gratings shown in Table 4 were obtained. Though the case with no hydrogen loading is explained here, a small amount of hydrogen may be loaded as well. In the case where a small amount of hydrogen is to be loaded, it is preferred that the hydrogen loading process be carried out under a low pressure of 20 atmospheres or less. Thus, the shift toward the shorter wavelength can be suppressed. A second embodiment of the method of making a long-period optical waveguide grating in accordance with the present invention will now be explained with reference to Fig. 9. An optical fiber 30 is disposed between discharge electrodes 31, 32 of an arc discharge type fiber fusing splicer, and axial movements of the optical fiber 30 and spot-heating of minute parts of the optical fiber 30 between the discharge electrodes 31, 32 while the optical fiber 30 stands still are repeatedly effected, whereby the stress in the core/cladding interface caused by the differences in viscosity and coefficient of thermal expansion of core/cladding is periodically alleviated. Thus, a grating is formed. Thermal diffusions of Ge and P also contribute to the forming of this grating. Using the optical fiber of Example 5 in Table 2, a grating was made with a discharge interval of 400 µm and a discharge application length of 10 mm. Fig. 10 shows the result of measurement of the transmission spectrum in long-period grating thus obtained. As can be seen from this chart, favorable transmission characteristics were obtained. Also, the temperature dependence value of peak wavelength in this long-period grating was 0.0065 nm, whereby it was verified that favorable characteristics on a par with those of the long-period gratings made in the first embodiment were obtained. Since no hydrogen loading process is unnecessary, spontaneous release of occluded hydrogen would not occur in this embodiment as well, whereby its resultant shift of peak wavelength toward the shorter wavelength would not occur. Without being restricted to the above-mentioned embodiments, the present invention can be implemented in various manners. For example, though the above-mentioned embodiments relate to optical waveguide gratings formed in optical fibers as optical waveguides, they are similarly applicable to optical waveguide gratings formed in a planar optical waveguide on a substrate. Industrial Applicability The long-period optical waveguide grating and method of making the same in accordance with the present invention are favorably applicable to optical filters and the like in optical communication systems.

Claims: A long-period optical waveguide grating which is formed in an optical waveguide mainly composed of SiO 2 (10) and having a core region (11) and a cladding region (12) around said core region, said grating being formed by providing said core region with an area (13) in which a refractive index thereof changes periodically in the direction of its optical axis, characterized in that said core region is co-doped with GeO 2 and P 2 O 5 . An optical waveguide grating according to claim 1, wherein the molar doping amount of P 2 O 5 in said core region is 1/15 to 1 times that of GeO 2 . An optical waveguide grating according to claim 2, wherein the molar doping amount of P 2 O 5 in said core region is 0.6 to 1 times that of GeO 2 . An optical waveguide grating according to claim 1, wherein said core region is further doped with B 2 O 3 , the sum of respective molar doping amounts of P 2 O 5 and B 2 O 3 being 1/15 to 1 times the molar doping amount of GeO 2 , the molar doping amount of B 2 O 3 being smaller than that of P 2 O 5 . An optical waveguide grating according to claim 1, wherein said cladding region is doped with fluorine and has a refractive index adjusted so as to be lower than that of pure silica glass. An optical waveguide grating according to claim 5, wherein, letting Δn - be the ratio of decrease in refractive index of said cladding region with respect to pure silica glass, the molar doping amount of P 2 O 5 in said core region is adjusted within the range of (0.8 - 0.7Δn - )±0.2 times that of GeO 2 . A method of making a long-period optical waveguide grating according to claim 1, wherein, without loading said optical waveguide with hydrogen, or after loading said optical waveguide with hydrogen at a pressure of 20 atmospheres or less, said optical waveguide is irradiated with an ultraviolet ray having a wavelength ranging from 150 to 200 nm so as to form the grating. A method of making a long-period optical waveguide grating according to claim 1, wherein said optical waveguide is spot heated periodically along the optical axis direction so as to form the grating.

Inventors: ENOMOTO TADASHI, HARUMOTO MICHIKO, ISHIKAWA SHINJI, SHIGEHARA MASAKAZU, ENOMOTO, TADASHI, HARUMOTO, MICHIKO, ISHIKAWA, SHINJI, SHIGEHARA, MASAKAZU, Enomoto, Tadashi, Yokohama Works, HARUMOTO, Michiko, Yokohama Works, ISHIKAWA, Shinji, Yokohama Works, SHIGEHARA, Masakazu, Yokohama Works
Applicants: SUMITOMO ELECTRIC INDUSTRIES, SUMITOMO ELECTRIC INDUSTRIES, LTD.
Application year: 1999
Main classification: G02B6
IPC codes: G02B6, G02B5