Achromatic quarter wave plate for air turbulence compensating interferometer

Abstract: An improved interferometric system with reduced air turbulence error. The system includes an optical retarder that functions as a quarter wave plate for two harmonically related frequencies. The retarder may be formed by a pair of quartz disks cut so that the C axis lie in the plane of the disk and are oriented orthogonally relative to each other.

Description: FIELD OF USE The invention relates to laser interferometers, in particular to distance measuring interferometers. BACKGROUND Lasers are used in measurement systems for the precise measuring associated with manufacturing processes. Precision distance measuring is critical to processes such as integrated circuit (IC) fabrication. With increased laser accuracy and precision, finer IC line widths can be used, resulting in higher circuit density for greater performance. Additionally, laser system precision increases accuracy in aligning multiple layers on ICs, resulting in higher yield. A laser system has the benefit of repeatability, that is to say, the ability to repeat a precise measurement exactly. This benefit has been extremely important to the disk drive industry. Lasers allow for higher track density for greater data storage capacity, and also provide higher yields and greater throughput. Machine tools and other precision cutting machines use laser transducers to produce more accurate parts with smoother surface finishes. Typically in a laser measurement system, a quarter-wave plate is used to change the polarization of the measurement beam in order that the beam makes two passes at the measurement mirror. During the passes, error may be introduced by air turbulence. Air turbulence affects the performance of distance measuring interferometers such as He-Ne lasers in applications such as IC steppers or scan lithography systems. Typical length measurement errors range between ten and thirty (10-30) nanometers over a twenty (20) centimeter path. This measurement error results in stage positioning errors which affect the achievable overlay accuracy. By using the dispersive characteristics of air, measurements of the optical path length at multiple wavelengths can provide the information required to remove the effects of air turbulence on the measured path length. The small optical path length difference at the two wavelengths is directly proportional to the integrated air density measurement path. Air turbulence correction via two independent distance measurements (using DC interferometry) has been described by Matsumoto, et. al. (Appli. Optics, v.31 pp 4522-26, 1992) using a single frequency HeNe laser and a Nd:YAG laser. However, accuracy in this method is hampered by fringe counting error; and the requirement for and attendant expense of two lasers makes this solution prohibitively expensive. To implement this method, the ratio of the two measurement wavelengths must be known exactly. The use of a fundamental wave and its second harmonic satisfies this requirement. What is wanted is a single laser source generating two overlapping beams at two harmonically-related wavelengths, both beams characterized with a high degree of accuracy. Further needed is air turbulence error correction. Ideally, such air turbulence error correction would be without the addition of bulk to the system or expense to the manufacture of the interferometer. What is needed is a interferometer system that reduces error from air turbulence without significant additional bulk or cost. US-A-5677768 describes an interferometric apparatus win which two coincident orthogonally polarized laser beams of different respective frequencies are incident on a quarter-wave plate. US-A-5404222 describes a heterodyne laser interferometric system which comprises a doubles detection beam and an un-doubled detection which are both coupled into an optical wave retarder consisting in a quarter wavelength rhomb. Such quarter wavelength rhombs are stated to provide achromatic wave retardation. US-A-4961634 describes a quarter-wave plate in the form of two birefringent disks, each of which has its fast axis in the plane of the disk and wherein the two respective fast axes are oriented mutually orthogonally. BRIEF SUMMARY OF THE INVENTION In accordance with the present invention there is provided a heterodyne laser interferometer as defined in claim 1. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 illustrates a conventional interferometer. Figure 2 depicts an example of an optical retarder suitable for use in an interferometer as depicted in Fig 1. DETAILED DESCRIPTION OF THE DRAWINGS Referring to Fig 2 The retarder 10 is made by cementing or otherwise closely coupling two quartz disks. Each disk is cut so that a C axis lies in the plane of the disk. The relative orientation is made such that the two C axes are orthogonal as represented in Fig 2. The optical retarder depicted in Fig 2 creates an interferometer system that reduces error from air turbulence in distance measurement without significant addition of bulk or manufacturing cost. The resulting inventive system provides for measurement beams at two widely separated optical frequencies, f and 2f, along the same measurement path. The inventive system further provides for an optical retarder that is a quarter-wave plate at both f and 2f. In the preferred embodiment, the optical retarder is formed by two quartz disks cut so that the C axes lie in the planes of the disks, and are oriented orthogonally relative to each other. The optical retarder is positioned at a location as indicated by the wording "quarter-wave plate" in Fig 1. Normally a quarter-wave plate at wavelength lambda would be expected to function as a half-wave plate at wavelength lambda/2. This is evident when considering the fundamental characteristics of birefringence. To be effective, the air-turbulence error correction algorithm requires that the difference between the index of refraction for the frequencies is as large as possible. It is also required that the ratio of the wavelengths be known with a high degree of accuracy. To this end, it is desirable to use the second harmonic of a wavelength, thereby ensuring that the ratio between the two wavelengths is known with a high degree of precision. Index of refraction varies with the wavelength of the light, a well-known effect called dispersion. An interferometer system measures optical path length, which is the product of the distance and the index of refraction. By using two different wavelengths related in a precisely known ratio, with a certain minimum difference in the index of refraction, n 1 different than n 2, the two equations may be solved for two unknowns. Therefore, attention must be paid to the proper selection of the light wavelengths used, as well as the waveplate used to ensure that it functions as a quarter wave retarder for both beams. If the retardation of the waveplate differs from a quarter wave, it will introduce undesirable nonlinearity errors into the distance measurement. The retardation of this device may be described as the difference between the phase shifts for light polarized parallel to x and and y and Δ =  x -  y = [n e l 1 + n o l 2 - n o l 1 - n e l 2 ] • 2π λ where n e and n o are, respectively, the extraordinary and the ordinary indices of refraction for the retarder material, typically quartz, and l 1 and l 2 respectively, for the thicknesses of disk 1 and disk 2. Thus, we have Δ = Δn • Δl • 2π λ where Δn = n e - n o Δl = l 1 - l 2 For the retarder to function as a quarter-wave plate, Δ must satisfy the condition Δ = M • π 2 for some odd integer M. Further requiring that the retarder function as a quarter-wave plate at two different wavelengths λ a and λ b there must exist two odd integers M a and M b such that: Δn(λ a ) • Δl • 2π λ a = M a • π 2 Δn(λ b ) • Δl • 2π λ b = M b • π 2 For air turbulence compensation, we are interested in wavelengths that are typically generated by diode pumped YAG lasers and for which the refractive indices of quartz are precisely known. In the preferred embodiment, the wavelengths are as follows: λnm n e n o 532 1.555996 1.546799 1064 1.54260 1.53387 Solving the division of [Eq. 5] by [Eq. 4], we obtain M b M a = 2 • 1.0535 = 2.1070 Two odd integers that closely approximate a solution to equation 6 are Since these integer values do not satisfy Eq 5 exactly, to minimize retardation error at both wavelengths, compute Δl from Equation 4 at wavelenghts λ a and λ b and take the average Δl a = M a Δn(λ a ) λ a 4 = 9 .00873 • 1064 10 -9 m 4 = .2742mm Δl b = M b Δn(λ b ) λ b 4 = 19 .009197 • 532 10 -9 m 4 =.2748mm Δl avg = .2746mm For the He Ne interferometer, the industry-standard Hewlett-Packard interferometer system the retardation specification for the quarter-wave plate is Δ • λ 2π = λ 4 ± λ 200 (i.e. 90° ± 1.8°). Δ a λ a 2π = 9 • 1064x10 -9 4 -.00873•.2746 × 10 -3 = 3.258 × 10 -9 λa 200 = 5.32 × 10 -9 Δ b λ b 2π = 19 • 532 × 10 -9 4 -.009197•.2746 × 10 -3 = 1.504 × 10 -9 λb 200 = 2.66 × 10 -9 Thus, it can be seen that the retarder satisfies the specification at both wavelengths for the nominal disk thickness difference of 0.2746 nm. The temperature stability of the optical retarder must also be considered. It is important that the optical retarder remains within performance specifications when accounting for thermal expansion of the retarder material, typically quartz. Consider operation at 532 nm. The refractive index temperature coefficients are: dn e dT = -0,65 × 10 -5 °C and dn o dT = -0.55 × 10 -5 °C (at 640 nm) Therefore dΔn / dT = -0.05 × 10 -5 / °C Thermal expansion coefficient in the thickness direction, perpendicular to the C axis, is *13.37 × 10 -6 °C = C T Letting T o be the center of the range and T u being the upper limit, T L the lower limit, Δn(T o )Δl(T o ) + Δl(T o ) dΔ n dT (T u - T o ) + Δn(T o ) dΔ l dT (T u - T o ) = 19 • λ 4 - λ 200 Δn(T o )Δl(T o )+Δl(T o ) dΔ n dT (T L - T o ) + Δn(T o ) dΔ l dT (T L -T o ) = 19 • λ 4 - λ 200 Subtracting Eq 12 from Eg 11 to get range: ΔT = λ 100 1 Δl dΔ n dT + Δn•Δl•C T = 532 × 10 -9 100 1 .2746 × 10 -3 • (-5 × 10 -7 ) + (.009197) • (2746 × 10 -6 ) • 13.37 × 10 -6 °C The temperature range computed from Eq.12 is ΔT = 25.7°C The temperature coefficient of the birefringence of quartz is known to be wavelength dependent. It may be assumed for the sake of this application that the temperature range from 1064 nm retardation will be approximately equal to that for 532 nm. ALTERNATE EMBODIMENTS It is worth noting that the optical retarder need not be made from two disks or plates closely coupled. It is theoretically possible to use a single plate of thickness equal to Δ l. However, for the orders of M a =9 and M b = 19, the single plate which would satisfy the conditions would be only 1/4 mm thick, too thin to be conveniently handled or manufactured. By choosing higher order numbers, say M a =27 and M b =57, we compute the thickness as follows: However, it is also necessary that the single disk meet the retardation specification at λ / 4 + λ / 200 the preferred wavelengths. Where the wavelengths are 532 and 1064 nm, the equations yield: Δ 1064 • 1064 × 10 -9 2π = 27 • 1064 × 10 -9 4 - (.00873) • (.8235) × 10 -3 = 7.16×10 -9 〉 1064 × 10 -9 200 = 5.32 × 10 -9 Δ 532 • 532 × 10 -9 2π = 57 • 532 × 10 -9 4 - (.009197) • (.8235) × 10 -3 = 7.27×10 -9 〉 532 × 10 -9 200 = 2.66 × 10 -9 Therefore, a single disk or plate retarder which is easy to handle or manufacture does not necessarily meet the specification. Conversely, one that meets the specification may be too thin to handle. These and other considerations are to be considered by the person of average skill in the art when designing an interferometric system according to the invention taught herein.

Claims: A heterodyne laser interferometric system including a pair of optical waves at a frequency f and a frequency 2f, the frequency 2f being substantially twice the frequency of the frequency f, said system comprising an optical wave retarder (10) including a pair of optical disks, each disk having a C axis in the plane of the disk, the pair of disks being closely coupled and oriented so that the C axis of one disk is orthogonal to the C axis of the other disk, wherein the thickness of each of the disks is such that the optical wave retarder is operable to retard each of the pair of waves by approximately a quarter-wave with an error in the retarding of substantially not more than 1.8 degrees. A system as claimed in claim 1, wherein the difference in the thickness between the two disks included in the wave retarder (10) is preselected so that the phase shifts for the optical beams may be described: Δϕ = ϕ x - ϕ y = [n e l 1 + n o l 2 - n 0 l 1 - n e l 2 ] . 2π / λ where: ne is the extraordinary index of refraction; no is the ordinary index of refraction; l 1 is the thickness of disk 1; and l 2 is the thickness of disk 2. A system as claimed in claim 2, wherein the optical retarder (10) satisfies the condition: Δϕ = M.π/2, where M is some odd integer. A system as claimed in claim 3, wherein the optical retarder (10) operates as a quarter-wave retarder on both optical waves by preselecting the ratio of the disk thicknesses to be a whole number.

Inventors: ZORABEDIAN PAUL, ZORABEDIAN, PAUL
Applicants: AGILENT TECHNOLOGIES INC, AGILENT TECHNOLOGIES, INC. (A DELAWARE CORPORATION)
Application year: 1999
Main classification: G01B9
IPC codes: G01B9