AN APPARATUS FOR DETERMINING THE POSITION OF THE FOCAL POINT IN A LASER MACHINING SYSTEM

Abstract: The invention relates to an apparatus for determining the position of the focal point of a laser beam in a laser machining system in which the laser beam is transmitted via an optical fibre (9) to the workpiece (3) to be machined by the laser beam. The z coordinate position of the focal point is determined by means of a mirror (6, 16), for reflecting some of the laser radiation back towards the end surface (1) of the optical fibre, and a detector (11) arranged between the laser (8) and the outgoing fibre (9) for measuring the radiation reflected back through the fibre.

Description: An apparatus for determining the position of the focal point in a laser machining system The present invention relates to an apparatus for determining the position of the focal point in a laser machining system in which a laser beam is transmitted via an optical fibre to a workpiece to be machined by the laser beam. In laser material processing systems the laser beam is focused on a small area (spot) so that the high energy intensity can be used' to machine (vaporize) the workpiece material . Laser machining systems are frequently used for cutting, welding and marking operations in the manufacturing industry- Thanks to the recent development of optical fibre technique such laser machining stations are designed with flexible transmission of the laser beam to the work- piece by means of optical fibres. In many cases a machining head is mounted in the arm of an articulated robot for manipulating the laser beam relative to the workpiece. In a system in which the laser beam is fixed and the work- piece is moved, it is usually no problem to determine the position of the focus point of the laser beam. However, in case of a 7-axes robot manipulating the beam the determination is more difficult. For instance by collisions, exchange of optical components or robot maintenance the fo- cal point might be displaced and the position has to be adjusted. Such adjustments, however, are usually troublesome and time-consuming. The z coordinate position of the focal point is often dis- placed in high power machining systems if the optical system is not the best. Such displacement has usually not been considered in prior adjustment systems, due to the fact that the adjustments in such cases must be carried out at full laser power conditions. It is an object of this invention to provide an improved apparatus for determining the position of the focal point in z as well as in the x and y coordinates. It is a further object of this invention to provide an apparatus for determining the position of the focal point in the z coordinate also at full laser power condition. In the following a preferred embodiment of the invention will be described more in detail with reference to the accompanying drawings in which figure 1 illustrates an optical fibre machining head, figure 2 illustrates the shape of an focused laser beam, figure 3 illustrates a detector for determining the waist of the laser beam in x, y and z coordinates, figure 4 illustrates three different cases (A, B and C) for the image of the end surface of the fibre on a mirror, figure 5A is a first example of the detection of back-reflected radiation according to the invention, figure 5B is another example of the detection of back-reflected radiation according to the invention, figure 6A illustrates an embodiment with a so-called beam dump for determining the position of the focal point at full laser power condition, and figure 6B is another example with a direct liquid cooling for determining the position of the focal point at full laser power condition. Figure 1 illustrates schematically an optical fibre machining head. A laser beam is transmitted from a laser source, not illustrated here, via an optical fibre to the workpiece to be machined. The end surface 1 of the optical fibre, i e the end surface of the fibre faced to the work- piece, is imaged on the workpiece 3 by means of optics 2. The shape of the focused laser beam is illustrated in figure 2. The beam converges to a minimal sectional area and then diverges with the same angle. The object of the invention is to determine this waist 4 in the z coordinate as well as in the x and y cordinates. Figure 3 illustrates a detector for determining the x, y and z coordinates. The main part is a position sensitive detector plate 5 covered by a mirror 6 and possibly a damping filter 7 therebetween. The mirror has a specific transmission for the wave-length in question. The x and y coordinates are then determined by means of the position sensitive detector plate 5, which for instance could be of the type lateral photo diode or a CCD-array. In order to obtain a suitable signal level in some cases it is necessary to insert a damping filter 7 between the mirror 6 and the detector plate 5. The z coordinate (i e perpendicular to the plane of the detector plate) can be determined by adjusting either the detector or the focusing optics along the z axis and then take into account that part of the radiation which is reflected back through the fibre to the laser. Figure 4A illustrates a case in which the image of the end surface of the fibre is located below the surface of the mirror. The back-reflected image is then located behind (above in the figure) the end position of the fibre, and there is only a small part of the reflected laser radiation which is transmitted back through the fibre. Figure 4C illustrates a corresponding situation in which the image of the end surface of the optical fibre is located above the surface of the mirror. The back-reflected image is then located iri front of (below in the figure) the end surface of the fibre and, again, there is only a small part of the reflected radiation that is transmitted back through the fibre. Figure 4B illustrates a case in which the image of the end surface of the optical fibre is located on the surface of the mirror. This means that the back-reflected image will be located on the end surface of the optical fibre and substantially all of the back-re- fleeted radiation (beam power) will then also be transmitted back through the fibre. By looking for the maximum of the back-reflected radiation, i e the radiation that emerges from the end surface of the optical fibre on the laser side, the z coordinate position of the focus point could be determined. The detection itself of the back-reflected radiation can be carried out in different ways, for instance: Detection of back-reflected radiation, alternative 1. The principle is illustrated in figure 5A. An angular, anti-reflex coated plate 10 is arranged in the beam path between the laser 8 and the outgoing fibre 9. Back-reflected radiation is detected through the residual reflection on the plate by means of a detector 11. Detection of back-reflected radiation, alternative 2: The principle is illustrated in figure 5B. In order to avoid a too high power density a damping unit 12 in the form of one or more partial transmissive mirror plates are arranged in the beam path between the laser 8 and the outgoing fibre 9. The damping unit 12 is angulated as in figure 5A and the back-reflected radiation will be reflected by the damping unit 12 and detected by detector 11. Detection of back-reflected radiation, alternative 3: The principle is illustrated in figure 5C. The laser beam is deviated by means of a mirror 13 towards the optical fibre 9. The mirror has a small amount of optical leakage which means that back-reflected radiation can be detected behind the mirror by means of a detector 11. The detector 11 which detects the residual radiation can be of the photo diode type or a thermal sensor. Such detectors are known per se and will not be described in any detail here. When determining the z coordinate position of the focal point for a laser operating at full power it is preferred to use a detecting mirror 16 having a low reflection only. The reflecting surface of the mirror must withstand high power densities, which means that the type of material is critical. In case of Nd-YAG laser radiation, uncoated quartz is recommended as it has a reflection of 3,5 % only. If also the back side of the mirror is cooled by means of a suitable liquid, the reflection on the rear surface will not disturb the measuring operation. In figure 6A there is one embodiment illustrated in which a so-called beam dump 14 is arranged below the measuring mirror, and in figure 6B an alternative embodiment with a direct liquid coolant 15 is illustrated. The invention is not limited to the illustrated examples but can be varied within the scope of the accompanying claims .

Claims: CLAIMS 1. An apparatus for determining the position of the focal point of a laser beam in a laser machining system in which the laser beam is transmitted via an optical fibre ( 9) to a workpiece (3) to be machined by the laser beam c h a r a c t e r i s e d i n that the z coordinate position of the focal point is determined by means of a mir- ror (6,16), arranged to reflect some of the radiation back towards the end surface (1) of the optical fibre, and a detector (11) arranged between the laser (8) and the outgoing fibre (9 ) for measuring the radiation reflected back through the fibre. 2. An apparatus according to claim 1 c h a r a c t e r i s e d i n that the mirror (6,16) has a certain transmission for the wavelength of the laser beam radiation. 3. An apparatus according to claim 2 c h a r ac te r i s e d i n that the x and y coordinate position of the focal point is determined by a position sensitive detector (5) arranged behind the mirror (6,16). 4. An apparatus according to claim 3 c h a r a c t e r i s e d by a damping filter (7) arranged between the mirror (6,16) and the position sensitive detector (5) in order to obtain a suitable signal level for the detector. 5. An apparatus according to claim 4 c h a r a c t e r i s e d i n that the mirror (6,16), the position sensitive detector (5) and the damping filter (7) are included in a detector housing and that either the detector housing or the focusing optics is movable along the z axis so that the z coordinate position of the focal point is determined by looking for the maximum of the laser radiation received back through the optical fibre (9 ) . 6. An apparatus according to claim 1 c h a r a c t e r i s e d i that the radiation which is reflected back is detected by means of an angulated, anti-reflex coated mirror plate (10) arranged in the beam path between the laser (8) and the outgoing fibre (9) for deviating radiation to said detector (11). 7. An apparatus according to claim 1 c h a r a c t e r i s e d i n that the radiation which is reflected back is detected by means of an angulated damping member ( 12 ) having one or more partial transmissive mirror plates for deviating radiation to said detector (11). 8. An apparatus according to claim 1 c h a r a c t e r - i s e d i n that the radiation which is reflected back is detected via optical leakage through a deviating mirror (13). 9. An apparatus according to claim 1 c h a r a c t e r - i s e d i n that the mirror (16) is made of a relatively low-reflective material, such as uncoated quartz, in order to resist high power densities so that the position of the focal point can be determined at full laser power operation. 10. An apparatus according to claim 8 c h a r a c t e r i s e d i n that the rear side of the mirror (16) is directly cooled by means of a suitable coolant, preferably a cooling liquid (15). 11. An apparatus according to claim 8 c h a r a c t e r i s e d by a so-called beam-dump (14) arranged below the back side of the mirror.

Inventors: ROOS SVEN-OLOV, TORSTENSSON PER-ARNE, ROOS, SVEN-OLOV, TORSTENSSON, PER-ARNE
Applicants: PERMANOVA LASERSYSTEM AB, ROOS SVEN OLOV, TORSTENSSON PER ARNE, ROOS, SVEN-OLOV, TORSTENSSON, PER-ARNE
Application year: 1999
Main classification: B23K26
IPC codes: B23K26, H01S3