A SEMICONDUCTOR DEVICE OF SiC AND A TRANSISTOR OF SiC HAVING AN INSULATED GATE

Abstract: A semiconductor device of SiC is adapted to hold high voltages in the blocking state thereof. The device comprises two parts (1, 2) each comprising one or more semiconductor layers of SiC and connected in series between two opposite terminals of the device, namely a sub-semiconductor device (1) able to withstand only low voltages in the blocking state thereof and a voltage-limiting part (2) able to withstand high voltages in the blocking state of the device and adapted to protect said sub-semiconductor device by taking a major part of the voltage over the device in the blocking state thereof.

Description: A SEMICONDUCTOR DEVICE OF SiC AND A TRANSISTOR OF SiC HAVING AN INSULATED GATE TECHNICAL FIELD OF THE INVENTION AND PRIOR ART The present invention relates to a semiconductor device of SiC comprising three terminals such that a high voltage can be maintained between two of said terminals in a blocking state of the device, said third terminal being used as a controlling electrode such that the device has a transistor action and being of the insulated gate type as well as a transistor of SiC having an insulated gate according to the preamble of the appended independent claim directed thereto. It is well known that semiconductor devices fabricated from SiC are in principle able to withstand high voltages in the blocking state of the device due to the fact that SiC has a very high breakdown field being approximately ten times higher than for Si. However, the devices have to be pas- sivated by an insulating layer, which may be for instance Si0 2 , and devices having an insulated gate have also an insulating layer, which may also be for instance Si0 2 . In devices known until now the presence of such insulating layers places significant restrictions on making use of the high breakdown field strength that would be possible for SiC-devices considering the properties of SiC itself. For instance in the case of insulating layers of Si0 2 , the dielectric constant in Si0 2 is lower than in SiC, which means that the electric field will be higher in Si0 2 accord- ing to the inverse ratio of the dielectric constant. A low field in the Si0 2 layer is, however, beneficial to the long term stability and reliability of the insulating layer. At the maximum field strength of SiC (2MV/cm) the corresponding field in Si0 2 would be >5MV/cm which is generally accepted as too high for stable device operation. Accordingly, it is necessary for protecting the insulating layer to restrict the maximum electric field in the SiC layers close to the insulating layers to a much lower level than SiC allows according to the dielectric strength of the oxide. Accordingly, it is a wish to construct semiconductor devices of SiC in which said insulating layers are protected so that it will be possible as much as possible to utilise the property of a high breakdown field of SiC for obtaining devices being able to hold high voltages in the blocking state thereof. It will then be particularly important to protect an insulating layer of a gate, since this will be much thinner than a passivation layer and the electric field will therefore be higher. SUMMARY OF THE INVENTION The object of the present invention is to provide a semiconductor device of SiC and a transistor of SiC having an insulated gate defined in the introduction, which make it possi- ble to better benefit from the superior property of SiC with respect to Si to withstand high electric fields in a blocking state of the device than such devices already known. This object is according to the present invention obtained by providing a semiconductor device of SiC comprising two parts each comprising one or more semiconductor layers of SiC and connected in series between said connections, namely a sub-semiconductor device able to withstand only low voltages in the blocking state thereof and a voltage-limiting part able to withstand high voltages in the blocking state of the device and adapted to protect said sub-semiconductor device by taking a major part of the voltage over the device in the blocking state thereof . A semiconductor device being able to withstand high voltages in the blocking state thereof is in this way obtained, but the electric field is in the blocking state of the device kept at a low level in said sub-semiconductor device, so that insulating layers for passivation and especially possibly such ones for insulating a gate are protected. According to a preferred embodiment of the invention said voltage-limiting part of the device comprises at least one region of a first conductivity type buried in a layer of an opposite second conductivity type at a distance below said sub-semiconductor device. Such a buried region will result in a reduced electric field in said sub-semiconductor device, which means that insulating layers located therein may be better protected and that also channel region layers, when such exist, which normally will see the maximum field may now be given a lower doping concentration and/or be made thinner for reducing the on-state resistance of such a device . According to another preferred embodiment of the invention the device comprises more than one said buried region laterally spaced and forming a grid adapted to form a continuous layer of said first conductivity type in the blocking state of the device and by that a pn-junction at a distance from said sub-semiconductor device taking a major part of the voltage over the device in a blocking state thereof. Such a buried grid structure will act as a potential divider and thereby allows the field in the region above the grid to be controlled. Accordingly, the major voltage over such a device in the blocking state thereof and by that the high electric field will be taken away from said sub-semiconduc- tor device and insulating layers thereof will by that be protected. The object of the present invention is also obtained by pro- viding a transistor of SiC having an insulated gate defined in the introduction with at least one p-type additional region buried in the drift layer at a distance below said p- type channel region layer and adapted to reduce the electric field to be taken by the channel region layer in the block- ing state of the transistor. Thanks to the fact that such a buried region will reduce the electric field to be taken by the channel region layer this may be given a lower doping concentration and/or be made thinner, which will result in a higher mobility due to a lower threshold voltage for forming said inversion channel and a lower on-state resistance of a channel region layer. The reduced electric field at the channel region layer will also result in a lower electric field in the gate insulating layer, so that a higher total voltage may be held by the device before this insulating layer is destroyed. According to another preferred embodiment of the invention said transistor comprises more than one said buried regions laterally spaced and forming a grid adapted to form a con- tinuous p-type layer in the blocking state of the transistor and by that a pn-junction at a distance below said p-type channel region layer taking a major part of the voltage drop over the transistor in a blocking state thereof. This means that the highest electric field of the device in the block- ing state thereof will be at said pn-junction deep in the drift layer and the electric field will be much lower close to the channel region layer, which in a conventional design of a MISFET or and IGBT would see the maximum field. Accordingly, the gate insulating layer will only experience a low electric field in spite of a high voltage drop over the entire device. This also means that less charge will be needed in the channel region layer for holding a voltage applied thereon, which results in a lower threshold voltage and a higher mobility in the inversion channel. According to another very preferred embodiment of the invention the transistor comprises more than one said active region laterally spaced with respect to each other and arranged with a fixed pitch, and said pitch and the spacing between said additional regions of the buried grid are se- lected for obtaining a desired on-state resistance and breakdown voltage, respectively, of the transistor. This design of a transistor makes it possible to obtain a device having exactly the properties desired in a particular case with respect to on-state resistance and breakdown voltage. Thus, it will be possible to vary said spacing for controlling the breakdown voltage of the transistor. By changing the pitch the on-state resistance and the saturation current density of the device will be varied. Thus, the dimension of the grid will be optimized so as to form a trade-off between voltage blocking capability and parasitic contribution of a grid to on-state losses. According to a preferred embodiment of the invention the transistor has the insulating layer arranged on top of the channel region layer and the gate electrode on top thereof for forming a lateral conducting inversion channel between the source region layer and the drift layer. A transistor having such an active region has turned out to be very advantageous and the channel region layer may especially be made as thin as possible thanks to the low electric field there in the blocking state of the device resulting in a low on-state resistance of the transistor. .According to another preferred embodiment of the invention said buried region is highly doped. This will result in a concentration of the electric field in the blocking state of the device to this buried region, and especially in the case of a buried grid this means that the pn-junction formed thereby in the blocking state of the device will take the major part of the voltage over the device. According to another preferred embodiment of the invention the channel region layer is low doped, and it has preferably a doping concentration between 10 16 and 5 x 10 17 cm -3 , which means a comparatively low threshold voltage for forming a conducting inversion channel therein and by that a high mobility in said channel and a reduction of the electric field over the gate dielectric. According to another preferred embodiment of the invention the channel region layer is thin as seen in the direction of said channel resulting in a short inversion channel therein, and the length of said channel is preferably less than lμm. Such a short channel is made possible by the reduction of the electric field in this part of the transistor in the blocking state thereof, which means a reduction of the on- state resistance of the transistor. Further advantages and advantageous features of the device and transistor according to the present invention appear from the following description and the other dependent claims . BRIEF DESCRIPTION OF THE DRAWINGS With reference to the appended drawings, below follows a specific description of preferred embodiments of the invention cited as examples. In the drawings : Fig 1 is a simplified cross-section view of a semiconductor device according to a first preferred embodiment of the invention, 5 Fig 2 and 3 are simplified section views illustrating the most important steps of a method for producing the voltage limiting part of the semiconductor device according to Fig. 1, 10 Fig 4-6 are simplified section views illustrating the most important steps of another method for producing the voltage limiting part of the semiconductor device according to Fig. 1, 15 Fig 7-10 are simplified sectioned views illustrating the most important steps of a method for producing the active region, i.e. the real transistor part, of a semiconductor device accord- 20 ing to Fig 1, Fig 11 is a graph of the current density versus the voltage applied over a device of the type shown in Fig 1 in the forward blocking direc- 25 tion thereof for two different pitches, but with the same spacing between adjacent regions of the buried grid and with positive voltage applied to the gate. 30 Fig 12 is a graph corresponding to that of Fig 11 for two different spacings, but with the same pitch, Fig 13 is a simplified sectioned view of a transistor 35 according to a second preferred embodiment of the invention, and Fig 14 is a view corresponding to that of Fig 13 of a transistor according to a third preferred embodiment of the invention being slightly modi- fied with respect to that shown in Fig 13. DETAILED DESCRIPTION OF PREFERRED EMBODIMENTS OF THE INVENTION A MISFET made of SiC according to a first preferred embodiment of the invention is illustrated in Fig 1. However, it should be noted that the relative dimensions of the layers and regions in this device shown in this figure have only been chosen for the sake of clearness of the drawing. This device comprises an upper sub-semiconductor device in the form of a MISFET structure 1 (Metal-Insulating layer Semiconductor Field Effect Transistor) and a lower voltage- limiting part 2 having a JFET-like structure (JFET = Junction Field Effect Transistor) . The lower part 2 may be produced by utilizing a method described in the US patent application 08/636 969, and the upper part is subsequently produced on top of the lower part by utilizing a method described in the US patent application 08/678 548 of the assignee of the present application. The present invention de- scribes how here two concepts may be combined in a new device that can be optimised using the independent parameters defined by the aforementioned applications. How the production of the preferred device illustrated in Fig 1 will be accomplished will now be explained while referring to Fig 2-10. It is emphasized that the method for producing the transistor shown in Fig 1 also comprises several masking and demasking steps as well as annealing steps after implantation, which, however, have nothing to do with the invention, and they will not be further described here. First of all a highly doped n-type substrate 3 is taken and a low-doped n-type drift layer 4 of SiC is epitaxially grown thereon, preferably by Chemical Vapour Deposition. Any suitable donor, such as nitrogen or phosphorus, may be used for obtaining the doping of these layers . Typical doping concentrations may be 10 15 - 10 16 cπr 3 and 10 18 - 10 20 cm' 3 for the drift layer and the substrate layer, respectively. After masking and patterning the mask impurity dopants of p-type are implanted into the drift layer 4 by using a high accel- eration energy, so that a grid 5 formed by a number of laterally spaced regions 6 is produced. These p-type regions 6 have a high doping concentration, typically 10 19 - 10 20 cπr 3 . The dopants of the regions 6 are then made electrically active by annealing these regions at a high temperature. After a demasking step a n-type low doped layer 7 of SiC is epitaxially grown on top of the layer 4 by Chemical Vapour Deposition. The layers 4 and 7 form in practice together a drift layer of a transistor being manufactured in this way, and a grid 5 buried deep into the drift layer may in this way easily be achieved by this regrowth technique. Fig 4-6 illustrates another way of obtaining the structure shown in Fig. 3. In this method a low doped n-type drift layer part 4 is epitaxially grown on the substrate 3, and a highly doped p-type layer 6' is after that epitaxially grown onto the layer 4. The layer 6' is after that patterned, for instance by reactive ion etching, for forming n-type regions 6 with a certain spacing therebetween. A regrowth of a low doped n-type drift layer 7 on top of the patterned structure is after that carried out. After forming the voltage limiting part according to fig 2 and 3 or fig 4-6, the MOSFET- or MISFET-part of the device is produced according to Fig 7-10. First of all a layer 8 of silicon being polycrystalline or amorphous is applied on top of the drift layer part 7. On top of the layer 8 a further layer 9 of a masking material, such as a metal, is applied. After etching an aperture 10 n-dopants are implanted into a surface-near layer 11, so that this will get a high doping concentration. After that p-dopants are also implanted, but while using higher acceleration energies, so as to form a deep base layer 12 with a high concentration of acceptors. A surface layer 13 of a certain thickness of the silicon layer 8 is then oxidized at high temperature, so that a layer 13 of oxide (Si0 2 ) is formed. The oxidized surface layer 13 is then removed by wet etching, and after that dopants of p- type are implanted into an area of the SiC layer defined by the aperture 14 formed by the removal of the oxidized layer 13 to such a degree that the doping type of said surface- near layer 11 previously created is maintained but the dop- ing type of a second surface-near layer 15 exposed through said removal is changed for forming a p-doped channel region layer with a lateral extension determined by the thickness of the oxidized silicon layer 13. A channel region layer with a very short channel, well in the sub-micron region, may in this way be exactly produced in a very simple and reliable manner. This channel region layer 15 has preferably a low doping concentration of 10 16 - 5 x 10 17 cm -3 , which will be possible but still obtain a transistor being able to block comparatively high voltages when reversed biased thanks to the potential dividing property of the buried grid structure 5 described more in detail below. It is illustrated in Fig 10 how after that in a conventional way a source contact 16 is applied on top of the source re- gion layer 11. An insulating layer 17, for example of Si0 2 , is applied on top of the device for passivation thereof and for insulating a gate contact 18 applied on top thereof and extending laterally at least over the entire lateral extension of each channel region layer 15. It is noticed that Fig 7 as well as Fig 1 has been simplified in the sense that no gate contact has been shown for the outermost channel region layers 15 ' , although a gate electrode will in practice also be arranged there. The device may also be provided with a much thicker insulating passivation layer on top of the structure shown in Fig 10. It is important for the function of the transistor that the buried regions 6 have a fixed potential, which is normally obtained by shorting them to for instance the source. The function of the grid will namely be as follows. In the for- ward conducting state of the transistor the regions 19 of the drift layer located between adjacent grid regions 6 will be of n-type and enable an electron transport therethrough and by that between the drain 20 and the source 16 of the transistor through a conducting inversion channel formed in the channel region layer by applying a positive voltage on the gate contact 18 between the drift layer and the source region layer 11. However, when the transistor is in the forward blocking state the positive voltage applied on the drain and by that on the substrate will expand the depletion regions surrounding each region 6 of the buried grid, so that the regions 19 between adjacent buried grid regions 6 will be totally depleted and by that a pn-junction will be formed deep in the drift layer. This pn-junction will act as a potential divider and take a major part of the voltage drop over the transistor, so that the electric field in the vicinity of the channel 21 in the channel region layer and by that at the insulating layer 17 will be dramatically limited, and this region will not as in conventional MOSFETs see the maximum field. The advantages of this fact have been thoroughly discussed above. The spacing s of the grid is defined as the distance between two adjacent buried regions 6 as shown in Fig 1, and this spacing as well as the doping concentration of the buried regions 6 may be optimized so as to form a trade-off between voltage blocking capability and parasitic contribution of the grid to on-state losses. This will be further discussed with reference to Fig 11 and 12. The transistor has several active regions being arranged with a certain pitch p, and this pitch is defined as the centre-to-centre distance between two adjacent active region structures as shown in Fig 1. The pitch is increasing with the density at which such active regions are arranged. It is illustrated in Fig 11 how the current density J d of a transistor according to Fig 1 is varying by the voltage V DS between the drain and the source of the transistor for two different pitches, namely a small pitch a and a large pitch b. The gate voltage and the spacing s are the same for both cases. The horizontally dashed lines 22, 23 correspond to the respective saturation current density, and the vertically dashed line 24 indicates a breakdown voltage of the transistor. It is noticed that the saturation current density may be varied by changing the pitch without influencing the value of the breakdown voltage of the transistor. The smaller pitch the higher saturation current density. A smaller pitch also results in a lower on-state resistance of the device defined through the lower part 25 of the curves. Fig 12 is a graph similar to that of Fig 11, but here the pitch and the gate voltage are constant, and the relationship between J d and V DS is shown for a small spacing c and a larger spacing d. The pitch is in this case the same as for the curve b in Fig 11, i.e. large. It is shown that the level of the breakdown voltage may be changed by changing the spacing between the buried regions of the grid without changing the saturation current density of the transistor. It also appears from Fig 12 that the on-state resistance of the transistor will be influenced by the spacing and be higher at smaller spacings (c) . Accordingly, in a transistor of this type it will be possi- ble to independently determine the saturation current density by varying the pitch p and the breakdown voltage by varying the spacing of the grid. These properties may of course also be influenced by the doping concentration and the thickness of the different layers of the device, but when these are constant the saturation current density and the breakdown voltage are depending on the pitch and the spacing as shown in Fig 11 and 12. It is emphasized that it is not always a wish to have a saturation current density being as high as possible, since one may want to limit the current in case of a failure, such as a short-circuit, and it is important to stay within the SOA (Safe Operation Area) of the device. Typical dimensions for the pitch and spacing are 10-100 μm and 1-10 μm, respectively. A device in the form of a MOSFET according to a second preferred embodiment of the invention is shown in Fig 13. Layers corresponding to layers present in the device according to Fig 1 are given the same reference numerals and will not be discussed further here. The gate electrode 18 is here ar- ranged in a trench and the insulating layer 17 separating it from the channel region layer 15 is arranged on the trench wall, so that a substantially vertical conducting inversion channel may be formed in the channel region layer at the interface between the insulating layer 17 and the channel re- gion layer 15. Furthermore, a further trench 26 is provided laterally to the trench having the gate 18, and a highly doped p-type region 27 is buried in the drift layer below this trench and connected to the source contact 16. This buried layer 27 will in the blocking state of the device bend the electric field lines to this and by that away from the insulating layer 17 and the channel region layer 15, so that this insulating layer 17 will be protected and the channel region layer may have a lower doping concentration and still not be totally depleted in said blocking state, so that the on-state resistance of the inversion channel will be lower. In the embodiment according to Fig 13 the buried layer 27 is connected to a highly doped p-type region 28 located in the bottom and the walls of the trench and obtained by ion im- plantation. The buried region 27 is preferably obtained in the same way as the buried regions 6 in the structure according to Fig 1 by a combination of implantation and regrowth . The embodiment according to Fig 14 differs from that according to Fig 13 by the fact that the buried region 27 extends all the way to the trench 26, so that no implantation into the bottom of the trench was necessary for making a contact to the buried region. Accordingly, the comparatively deep location of the lower limit of the buried region is here obtained by implantation, regrowth and then implantation again and then regrowth for forming the layer out of which the channel region layer and source region layer may be formed. The invention is of course not in any way restricted to the preferred embodiments described above, but many possibilities to modifications thereof would be apparent to a man with ordinary skill in the art without departing from the basic idea of the invention as defined in the appended claims. The base layer in a transistor according to Fig 1 has not to be highly doped, but it may be moderately doped, for instance having a doping concentration of 10 18 - 10 19 cm -3 . It will of course be possible to make the substrate layer of p-type for obtaining a bipolar device, such as an IGBT. It will then be preferred to have a highly doped n-type buffer layer between the substrate layer and the drift layer. The number of layers mentioned in the claims is a minimum number, and it is within the scope of the invention to arrange further layers in the devices or dividing any layer into several layers by selective doping of different regions thereof. "Substrate layer" is in this disclosure to be interpreted as the layer closest to the drain of the layers mentioned and it has not to be a substrate layer in the strict sense of the word within this field, i.e. the layer from which the growth is started. The real substrate layer may be any of the layers and is mostly the thickest one, which may be the drift layer. "Device of SiC" or "transistor of SiC" do not exclude that some parts of the device or transistor are made of another material, such as contacts and insulating layers. "Transistor" as defined in the claims refers actually to the entire semiconductor device, which in the case of the invention comprises a low voltage transistor part and a high voltage grid (JFET) .

Claims: Claims 1. A semiconductor device of SiC comprising three terminals such that a high voltage can be maintained between two of said terminals in a blocking state of the device, said third terminal being used as a controlling electrode such that the device has a transistor action and being of the insulated gate type, characterized in that the device comprises two parts each comprising one or more semiconductor layers of SiC and connected in series between said two terminals, namely a sub-semiconductor device (1) able to withstand only low voltages in the blocking state thereof and a voltage- limiting part (2) able to withstand high voltages in the blocking state of the device and adapted to protect said sub-semiconductor device by taking a major part of the voltage over the device in the blocking state thereof. 2. A device according to claim 1, characterized in that said voltage-limiting part (2) of the device comprises at least one region (6) of a first conductivity type buried in a layer (4) of an opposite second conductivity type at a distance below said sub-semiconductor device. 3. A device according to claim 2, characterized in that it comprises more than one said buried regions (6) laterally spaced and forming a grid (5) adapted to form a continuous layer of said first conductivity type in the blocking state of the device and by that a pn-junction at a distance from said sub-semiconductor device taking a major part of the voltage drop over the device in a blocking state thereof . 4. A device according to claim 2 or 3, characterized in that said first conductivity type is p. 5. A device according to any of claims 1-4, characterized in that said sub-semiconductor device (1) is a gate-controlled device with an insulating layer (17) between a gate (18) and a channel region layer (15) . 6. A device according to any of claims 1-5, characterized in that said sub-semiconductor device (1) is a MISFET or and IGBT, and said voltage-limiting part (2) has a JFET-like structure. 7. A transistor of SiC having an insulated gate and being one of a) a MISFET and b) an IGBT, said transistor comprising superimposed in the order mentioned a drain (20) , a highly doped substrate layer (3) being for a) of n-type and for b) of p-type, for b) on top thereof one of c) a highly doped n-type buffer layer and d) no such layer, and a low- doped n-type drift layer (4, 7), said transistor further comprising an active region having a highly doped n-type source region layer (11) arranged at the top of the drift layer, a source (16) arranged on top of the source region layer, a p-type channel region layer (15) separating the source region layer from the drift layer, an insulating layer (17) located next to the channel region layer and extending at least from the source region layer to the drift layer and a gate electrode (18) arranged on the insulating layer and adapted to form a conducting inversion channel (21) extending in the channel region layer at the interface to the insulating layer for electron transport from the source to the drain upon applying a voltage thereto, charac- terized in that it further comprises at least one p-type additional region (6) buried in the drift layer (4, 7) at a distance below said p-type channel region layer (15) and adapted to reduce the electric field to be taken by the channel region layer in the blocking state of the transis- tor. 8. A transistor according to claim 7, characterized in that it comprises more than one said buried regions (6) laterally spaced and forming a grid (5) adapted to form a continuous p-type layer in the blocking state of the transistor and by that a pn-junction at a distance below said p-type channel region layer taking a major part of the voltage drop over the transistor in a blocking state thereof . 9. A transistor according to claim 8, characterized in that it comprises more than one said active region laterally spaced with respect to each other and arranged with a fixed pitch (p) , and that said pitch and the spacing (s) between said additional regions (6) of the bur- ied grid (5) are selected for obtaining a desired on-state resistance and breakdown voltage, respectively, of the transistor. 10. A transistor according to any of claims 7-9, characterized in that the insulating layer (17) is arranged on top of the channel region layer (15) and the gate electrode (18) on top thereof for forming a lateral conducting inversion channel (21) between the source region layer (11) and the drift layer (4, 7) . 11. A transistor according to claim 10, characterized in that it comprises a p-type base layer (12) located above the additional buried region (6) and below the source region layer (11) , and that the base layer is ar- ranged to separate the source region layer from the drift layer (4, 7) . 12. A transistor according to any of claims 7-11, characterized in that said buried region (6) is highly doped. 13. A transistor according to any of claims 7-12, characterized in that the channel region layer (15) is low doped. 14. A transistor according to claim 13, characterized in that the doping concentration of the channel region layer (15) is between 10 and 5-10 cm "3 . 15. A transistor according to any of claims 7-14, characterized in that the channel region layer (15) is thin as seen in the direction of said channel resulting in a short inversion channel (21) therein. 16. A transistor according to claim 15, characterized in that the length of said channel (21) is less than 2 μm.

Inventors: BAKOWSKI MIETEK, BIJLENGA BO, GUSTAFSSON ULF, HARRIS CHRISTOPHER, KONSTANTINOV ANDREY, ZDANSKY LENNART, BAKOWSKI, MIETEK, BIJLENGA, BO, GUSTAFSSON, ULF, HARRIS, CHRISTOPHER, KONSTANTINOV, ANDREY, ZDANSKY, LENNART
Applicants: ABB RESEARCH LTD, BAKOWSKI MIETEK, BIJLENGA BO, GUSTAFSSON ULF, HARRIS CHRISTOPHER, KONSTANTINOV ANDREY, ZDANSKY LENNART, ABB RESEARCH LTD., BAKOWSKI, MIETEK, BIJLENGA, BO, GUSTAFSSON, ULF, HARRIS, CHRISTOPHER, KONSTANTINOV, ANDREY, ZDANSKY, LENNART
Application year: 1998
Main classification: H01L29
IPC codes: H01L21, H01L29