Orifice plate and method of manufacture, for a liquid discharging apparatus

Abstract: A method for manufacturing an orifice plate used for a liquid discharge provided with discharge port for discharging liquid comprises the steps of preparing a non-conductive plate having recessed portion formed on the circumference of the flat portion corresponding to the discharge port, forming a first conductive material peelable from the non-conductive plate only in the recessed portion of the non-conductive plate, forming a plate member by plating the first conductive material with a second conductive material by electroforming method after the formation of the first conductive material, and obtaining the orifice plate having the discharge port by peeling off the plate member from the non-conductive plate. With the method thus arranged, it is possible to materialize the same precision as in the glass mask used for photolithography, and make the variation of orifice areas smaller for the formation of highly densified orifices.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a method for manufacturing an orifice plate for a liquid discharge head that discharges a desired liquid by the creation of bubbles generated by the application of thermal energy or the like. It also relates to a liquid discharge head provided with such orifice plate, and a method for manufacturing a liquid discharge head. The present invention is applicable to a printer, a copying machine, a facsimile equipment provided with communication system, a word processor provided with a printing unit, and some other apparatuses. It also applicable to an industrial recording system having various processing apparatuses combined comlexly therefor to make it possible to record on a recording medium, such as paper, thread, fiber, cloths, leather, metal, plastic, glass, wood, ceramic, or the like. Here, for the present invention, the term "recording" referred to in the specification hereof means not only the provision of characters, graphics, or some other images that present some meaning when recorded on a recording medium, but also, means the provision of images that do not present any particular meaning, such as patterns recorded on the recording medium. Related Background Art There has been known conventionally a bubble jet recording method whereby to provide ink with heat or some other energy generated to cause its states to be changed with the abrupt voluminal changes in ink (the creation of bubbles) so that ink is discharged from a discharge port on the basis of acting force exerted by such change of states, thus forming images on a recording medium by the adhesion of ink to it. The recording apparatus that use this bubble jet recording method is generally provided with the ink discharge port for discharging ink; the ink flow path communicated with the discharge port, and heat generating devices (electrothermal converting devices) serving as energy generating means for discharging ink distributed in each of the ink flow paths as disclosed in the specifications of Japanese Patent Publication No. 61-59911 and Japanese Patent Publication No. 61-59914, among some others. In accordance with this recording method, it is possible to record high quality images at high speeds in a lesser amount of noises. At the same time, it is possible to arrange the ink discharge port in high density for the liquid discharge head that adopts this recording method. Therefore, images can be recorded in high resolution by use of a smaller apparatus, while making it easier to obtain color images, among many other advantages. As a result, the bubble jet recording method has been widely used for office equipment, such as a printer, a copying machine, or a facsimile equipment in recent years. This method has been utilized also for a textile printing apparatus, and other industrial recording systems as well. Along with the utilization of bubble jet technologies and techniques in the various fields of application, there has been a strong demand on the provision of a recording apparatus which is capable of recording in higher resolution at lower costs. Here, the ink discharge port are formed on an orifice plate. Usually, however, the orifice plate is adhesively bonded to the liquid discharge head main body side by the application of adhesive or the like subsequent to the discharge port having been formed on it. Now, hereunder, the detailed description will be made of the conventional method for manufacturing an orifice plate, this conventional method being disclosed in document US-A-4 184 925, corresponding to document DE-A-28 54 822. A similar method is disclosed in document EP-A-321 075). Figs. 14A to 14C are views which illustrate the steps of manufacture in accordance with the conventional method for manufacturing an orifice plate. At first, using the photolithographing method the resist 307 is formed in a specific position on the substrate 301 (Fig. 14A). Then, on the substrate 301 having the resist 307 formed on it, nickel 308 is formed by use of electroforming (Fig. 14B). After that, the resist 307 and the substrate 301 are peeled off from the nickel 308 one after another in that order in order to form the discharge port 302 (Fig. 14C). Also, there is a method for manufacturing an orifice plate with resin instead of using the electroforming method described above. Of the liquid discharge heads manufactured by use of these methods, there is the one whose printing reliability has been enhanced by trapping ink adhering to the face by a face pattern (the discharge opening surface having the water-repellent pattern on the circumference of the surface of the discharge port and the hydrophilic pattern on the portion away from the circumference thereof). Here, the face pattern of the kind is obtainable by the irradiation of excimer laser on the resin sheet. However, in accordance with the conventional method, the resist is formed in advance on the portion where the discharge port is formed, and then, by use of the electroforming, nickel is formed in order to provide the orifice plate. After that, the discharge port are formed by peeling off the resist from the nickel. As a result, the step 310 is inevitably formed on the discharge port as shown in Fig. 14C. This formation of such step 310 is not desirable for the performance of effective ink discharges. More specifically, if any ink which has increased viscosity should adhere due to the presence of this step, it is made difficult for the discharge energy to act upon the discharge of droplets effectively or if the configuration of each of such steps should vary, the discharge directivity is allowed to vary accordingly. Here, the corner portion 311 formed by the step 310 makes it easier for discharging droplets to reside on that portion to cause the loss of discharge energy accordingly. Also, when the hydrophilic pattern is formed by the application of laser, a problem is encountered that this formation makes it difficult to arrange the position of orifices in a sufficiently high precision. Here, with a view to enhancing the abrasion resistance and durability of the orifice plate described above, it is desirable to use Ni or other metallic material for the orifice plate. However, if the portion on the elemental substrate having the orifice plate, the ceiling plate, and the heaters arranged on it, which is in contact with ink, should be formed by metal or some other conductive material from the viewpoint of its manufacture, the liquid discharge and such portion become electrically conductive through ink (by the direct contact or through the adhesive) to present a cell structure which may in some cases satisfy the condition that allows electrolytic corrosion to occur. If the orifice plate is not left intact under such condition, the orifices on the orifice plate are dissolved to change the area of the orifice surface. Conceivably, therefore, the amount of discharges is made inconstant. With a view to dealing with such condition as described above, the inventors hereof have taken up as one of the new subjects that the reliability of the orifice plate should be made invariable and more stabilized for a longer period. Also, in consideration of each of the materials used for the inner structure of the liquid flow paths of a liquid discharge head provided with the orifice plate, including, of course, its surface to be in contact with liquid as well as the external layer portions thereof, it is assumed that, in some cases, the inner structure may become electrically conductive, not necessarily directly as described above, but depending on the components contained in the liquid. In other words, the condition of electrolytic corrosion may be satisfied depending on some metallic ion or other ion contained in the liquid as the case may be. An ion of the kind may inevitably exist in the liquid flow paths due to the structure of liquid container serving as the supply-source of liquid or due to the unprepared supply of liquid other than the designated one. Therefore, it becomes a second subject to be taken up by the inventors hereof that even in such a case as described above, the reliability of the orifice plate should be made invariable and stabilized for a longer period. SUMMARY OF THE INVENTION Taking these subjects into consideration, the present invention is designed. It is an object of the invention to provide a method for manufacturing an orifice plate the reliability of which is invariable and more stabilized for a longer period. Moreover, it is an object of the present invention to provide a liquid discharge head provided with such an improved orifice plate, and a method for manufacturing a liquid discharge head. As regards the method according to the invention, the above object is achieved by the method according to claim 1. Claims 16 and 22 define the liquid discharge head and the method for manufacturing a liquid discharge head, respectively, according to the invention. Advantageous further developments of the invention are defined in the dependent claims. Since, in the method according to the invention, the discharge port are formed without using resist, there is no possibility that any step is formed with respect to the discharge port. Therefore, it becomes possible to avoid any difficulty that may hinder the effectiveness of discharge energy acting upon discharging liquid droplets or to prevent the discharge directivity from being varied. Furthermore, there is no resist wall present, either, when plating is made. As a result, the sectional configuration of the discharge port shows the slanted form to make it easier to hold meniscus for the implementation of more stabilized liquid discharges and the enhancement of refilling capability as well. Also, there are no sharp edges existing on the surface of the orifice plate, hence making it possible to enhance the durability of blade, and form a structure that makes it easier to trap liquid. In a preferred embodiment of the invention, chromium is electron-beam etched on a glass plate and is used as the mask to pattern the glass grooves. Then, after the glass grooves are nickel plated with silver being buried in them, the nickel can furter be plated with a coating material having a higher resistant to corrosion than the nickel. As a result, even if silicon or metal is used for the elemental substrate provided with heater members on it, and the ceiling plate provided with flow paths formed for it, there is no possibility that the orifice plate is dissolved due to the formation of the cell reaction. BRIEF DESCRIPTION OF THE DRAWINGS Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1J, 1K and 1L are views which illustrate each of the steps of a method for manufacturing an orifice plate in accordance with one embodiment of the present invention; Figs. 1A, 1B, 1C, 1D and 1E are plan views, and Figs. 1F, 1G, 1H, 1I and 1J are cross-sectional views, taken along lines 1F - 1F to 1J - 1J; and Fig. 1K and Fig. 1L are partially enlarged views, respectively. Fig. 2 is a perspective view which shows an apparatus used for the plating step in the method for manufacturing an orifice plate represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1J, 1K and 1L. Fig. 3 is a perspective view which shows the external appearance of configuration of the orifice plate manufactured by the method represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1J, 1K and 1L. Fig. 4 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G 1H, 1I, 1J, 1K and 1L, to form a liquid discharge head. Figs. 5A, 5B, 5C and 5D are views which illustrate the configuration of the liquid discharge head provided with the orifice plate manufactured by the method represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1J, 1K and 1L; Fig. 5A is a perspective view which shows the external appearance thereof; Fig. 5B is a partially enlarged view which shows the portion 5B in Fig. 5A; Fig. 5C is a cross-sectional view, taken along line 5C - 5C in Fig. 5B; Fig. 5D is a partially enlarged view which shows the portion 5D in Fig. 5C. Fig. 6 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G 1H, 1I, 1J, 1K and 1L, to form a liquid discharge head of the side shooter type. Fig. 7 is a views which shows the configuration of the liquid discharge head of the side shooter type provided with the orifice plate manufactured by the method represented in Figs. 1A, 1B, 1C, 1D, 1E, 1F, 1G, 1H, 1I, 1J, 1K and 1L. Figs. 8A, 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, 8J, 8K and 8L are views which illustrate each of the steps of a method for manufacturing an orifice plate in accordance with one embodiment of the present invention; Figs. 8A, 8B, 8C, 8D and 8E are plan views, and Figs. 8F, 8G, 8H, 8I and 8J are cross-sectional views, taken along lines 8F - 8F to 8J - 8J; and Fig. 8K and Fig. 8L are partially enlarged views, respectively. Fig. 9 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 8A, 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, 8J, 8K and 8L, to form a liquid discharge head. Figs. 10A, 10B, 10C and 10D are views which illustrate the configuration of the liquid discharge head provided with the orifice plate manufactured by the method represented in Figs. 8A, 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, 8J, 8K and 8L; Fig. 10A is a perspective view which shows the external appearance thereof; Fig. 10B is a partially enlarged view which shows the portion 10B in Fig. 10A; Fig. 10C is a cross-sectional view, taken along line 10C - 10C in Fig. 10B; Fig. 10D is a partially enlarged view which shows the portion 10D in Fig. 10C. Fig. 11 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 8A, 8B, 8C, 8D, 8E, 8F, 8G, 8H, 8I, 8J, 8K and 8L, to form a liquid discharge head of the side shooter type. Fig. 12 is a view which shows one mode embodying the liquid jet apparatus having on it the liquid discharge head manufactured in accordance with the present embodiment. Fig. 13 is a view which schematically shows the so-called full line liquid discharge head and the apparatus thereof, in which a plurality of discharge ports are arranged over the entire recordable area of a recording medium. Figs. 14A, 14B and 14C are views which illustrate the conventional method for manufacturing an orifice plate. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, with reference to the accompanying drawings, the embodiments will be described in accordance with the present invention. (Embodiment 1) Figs. 1A to 1L are views which illustrate each of the steps of a method for manufacturing an orifice plate in accordance with one embodiment of the present invention; Figs. 1A to 1E are plan views, and Figs. 1F to 1J are cross-sectional views, taken along lines 1F - 1F to 1J - 1J; and Fig. 1K and Fig. 1L are partially enlarged views, respectively. Here, in accordance with the present embodiment, the silver mirror reaction occurs on the glass plate on which the pattern grooves of an orifice plate are patterned in high precision. Then, nickel is plated subsequent to rubbing off silver into the patterned grooved on the glass plate so that silver remains in them, hence manufacturing the orifice plate. By the present embodiment, it is exemplified that the orifice plate thus manufactured is bonded to the liquid discharge head of the edge shooter type. At first, in the same procedures as those required for producing a photomask, chromium is filmed on the glass, and resist is patterned by means of the EB etching. Then, chromium is etched to produce the chrome pattern. With chromium as mask, glass is etched to form the patterned grooves of an orifice plate. In this way, the glass plate 1 is produced (Figs. 1A and 1F). After the glass plate 1 has been produced, the silver mirror reaction is effectuated over the entire surface to film silver 3 (Figs. 1B and 1G). Subsequently, by use of a sponge, silver is rubbed off so that silver remains in the patterned grooves (recessed portion) of the glass plate 1. Here, since the patterned grooves 2 are formed on the glass plate 1, silver 3 is allowed to remain only in the patterned grooves 2 of the orifice plate when silver residing on the surface is rubbed off (Figs. 1C and 1H). Here, the surface of silver 3 is rough as shown in Fig. 1H. Then, by use of the electroforming, nickel 4 is developed in a thickness of 10 µm on the portions where silver 3 remain to make the nickel plating (Figs. 1D and 11). After that, the nickel 4 plated orifice plate 10 is peeled off from the glass plate 1 to complete the orifice plate 10 (Figs. 1E and 1J). Here, at this juncture, the diameter of the discharge port thus formed is 16 µm ± 3%. Now, the detailed description will be made of the method for plating nickel 4 as described above. Fig. 2 is a perspective view which shows an apparatus used for the plating process of the method for manufacturing an orifice plate represented in Figs. 1A to 1L. As the plating solution, nickel sulfamate is used together with an applied reducer, zeol (manufactured by the World Metal K.K.), boric acid, a pit inhibitor, NS-APS (manufactured by the World Metal K.K.), and nickel chloride. For the electrodeposition, the electric field is applied in such a manner that the electrodes are connected on the anode side in the plating solution, while the electrodes having silver 3 formed thereon are connected on the cathode side. The plating temperature is 50°C. The current density is 5A/dm 2 . In this respect, the portion indicated by slanted lines in Fig. 1C is the electrode unit to which the cathode is connected. In accordance with the present embodiment, nickel is plated. Besides, however, it may be possible to plate the silver portion 3 with gold, palladium, platinum, chromium, nickel-cobalt alloy, or nickel-palladium alloy. Fig. 3 is a perspective view which shows the external appearance of the orifice plate manufactured by the method represented in Figs. 1A to 1L. Since no resist is used for the method of manufacture shown in Figs. 1A to 1L, nickel is allowed to be developed isotropically so that its section becomes to represent the rounded form as shown in Fig. 3. Fig. 4 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 1A to 1L, to a liquid discharge head. As shown in Fig. 4, adhesive 6 is coated on the orifice plate 10. Then, the orifice plate 10 having the adhesive 6 coated thereon is bonded to the face surface of the arrangement having the liquid flow paths 104, the elemental substrate 100 provided with the heating member 103, and the ceiling plate 109 of the liquid discharge head. Figs. 5A to 5D are views which illustrate the configuration of the liquid discharge head provided with the orifice plate manufactured by the method represented in Figs. 1A to 1L; Fig. 5A is a perspective view which shows the external appearance thereof; Fig. 5B is a partially enlarged view which shows the portion 5B in Fig. 5A; Fig. 5C is a cross-sectional view, taken along line 5C - 5C in Fig. 5B; Fig. 5D is a partially enlarged view which shows the portion 5D in Fig. 5C. In the processing step shown in Fig. 4, the orifice plate 10 is bonded at the face surface of the liquid discharge head. After that, the assembled body is incorporated in an ink cartridge 120. Here, in accordance with the present embodiment, the edge of the pattern 124, having discharge ports being formed in a specific position on the orifice plate as shown in Fig. 5D, becomes a rounded form as at 125 when the edge near the discharge port is lost at the time of distribution and in the initial stage of use. At the same time, the surface becomes irregular. This formation is made when the face is wiped by the blade for removing dust particles and ink adhering to the face as well. Also, the adhesion of ink may encroach on the face to result in such formation. In this way, it becomes possible to prevent the blade from being cut off by the sharp edged pattern of the face, and to prevent the blade from being deteriorated. Also, with the irregularities formed on the surface, the hydrophilic property of this portion becomes extremely higher than the other portions, thus making it possible to trap ink on them. Further, since the pattern 124, which is provided with the hydrophilic property, is continuously arranged, it becomes possible to provide a wider area serving as the ink trapping region and enhance the ink trapping capability accordingly, while making it difficult for the ink, which adheres to the face surface, to enter the discharge port. (Embodiment 2) For the embodiment described above, the description has been made of the example in which an orifice plate is applied to a liquid discharge head of the edge shooter type. However, it is also possible to apply the orifice plate to a liquid discharge head of the side shooter type. Fig. 6 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 1A to 1L, to a liquid discharge head of the side shooter type. Fig. 7 is a view which shows the configuration of the liquid discharge head of the side shooter type provided with the orifice plate manufactured by the method represented in Figs. 1A to 1L. As shown in Fig. 6, the adhesive 6 is coated on the orifice plate 10. Then, the orifice plate 10 having the discharge ports 5 arranged therefor is bonded to the arrangement having the liquid flow paths 104, the elemental substrate 100, and the ink supply path 119 of the liquid discharge head. After the orifice plate has been bonded to form the liquid discharge head, it is incorporated in an ink cartridge 120 as shown in Fig. 7. Here, in accordance with the embodiment described above, the adhesive is coated on the orifice plate side when it is bonded to other elements of the liquid discharge head. However, it may be possible to coat the adhesive on the face surface side of the other elements of the liquid discharge head shown in Fig. 4 or on the elemental substrate 100 side for the liquid discharge head shown in Fig. 6. As the adhesive, the two-part adhesive which is an epoxy adhesive (CS-2340-5: manufactured by the Cemedain K.K.) or the polyether amide adhesive (HIMAL: manufactured by Hitachi Kasei K.K.) is used. (Embodiment 3) Figs. 8A to 8L are views which illustrate each of the steps of a method for manufacturing an orifice plate in accordance with one embodiment of the present invention; Figs. 8A to 8E are plan views, and Figs. 8F to 8J are cross-sectional views, taken along lines 8F - 8F to 8J - 8J; and Fig. 8K and Fig. 8L are partially enlarged views, respectively. Here, in accordance with the present embodiment, the silver mirror reaction occurs on the glass plate on which the pattern grooves of an orifice plate are patterned in high precision. Then, nickel is plated subsequent to rubbing off silver into the patterned grooved on the glass plate so that silver remains in them, thus manufacturing the orifice plate. By the present embodiment, it is exemplified that the orifice plate thus manufactured is applied to a liquid dischage head of the edge shooter type. At first, in the same procedures as those required for preparing a photomask, chromium is filmed on the glass, and resist is patterned by means of the EB etching. Then, chromium is etched to produce the chrome pattern. With chromium as mask, glass is etched to form the patterned grooves 2 of an orifice plate. In this way, the glass plate 1 is produced (Figs. 8A and 8F). After the glass plate 1 has been produced, the silver mirror reaction is effectuated over the entire surface to film silver 3 (Figs. 8B and 8G). Subsequently, using a sponge silver is rubbed off so that silver remains in the patterned grooves (recessed portion) of the glass plate 1. Here, since the patterned grooves 2 are formed on the glass plate 1, silver 3 is allowed to remain only in the patterned grooves 2 of the orifice plate when silver residing on the surface is rubbed off (Figs. 8C and 8H). In this respect, the surface of silver 3 is rough as shown in Fig. 8K. Then, by use of the electroforming, nickel 4 is developed in a thickness of 10 µm on the portions where silver remain to make the nickel plating, and then, the gold 7 plating is made on the nickel 4 by use of electroforming so as to make it a coating member (Figs. 8D and 8I). After that, the nickel 4 plated orifice plate 10 is peeled off from the glass plate 1 to complete the orifice plate 10 (Figs. 8E and 8J). Here, at this juncture, the diameter of the discharge opening 5 thus formed is 16 µm ± 3%. Now, the detailed description will be made of the method for plating nickel 4 and gold 7 as described above. As the plating solution for nickel, nickel sulfamate is used together with an applied reducer, zeol (manufactured by the World Metal K.K.), boric acid, a pit inhibitor, NS-APS (manufactured by the World Metal K.K.), and nickel chloride. As the one for gold, potassium gold cyanide or potassium cyanide is used. For the electrodeposition of nickel, the electric field is applied in such a manner that the electrodes are connected on the anode side in the plating solution, while the electrodes having silver 3 formed thereon are connected on the cathode side. The plating temperature is 50°C. The current density is 5A/dm 2 . Also, for the electrodeposition of gold, the electrodes are connected on the anode side in the plating solution, while the electrodes having nickel 4 formed on them are connected on the cathode side. The plating temperature is 65°C, and the current density is 4A/dm 2 . In this respect, the portion indicated by slanted lines in Fig. 8C is the electrode unit to which the cathode is connected. Fig. 9 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 8A to 8L, to a liquid discharge. As shown in Fig. 9, bonding agent 6 is coated on the orifice plate 10. Then, the orifice plate 10 having the bonding agent 6 coated thereon is bonded to the face surface of the arrangement provided with the liquid flow paths 104, the elemental substrate 100, and the ceiling plate 109 of the liquid discharge head. Figs. 10A to 10D are views which illustrate the configuration of the liquid discharge head provided with the orifice plate manufactured by the method represented in Figs. 8A to 8L; Fig. 10A is a perspective view shows the external appearance thereof; Fig. 10B is a partially enlarged view which shows the portion 10B in Fig. 10A; Fig. 10C is a cross-sectional view, taken along line 10C - 10C in Fig. 10B; Fig. 10D is a partially enlarged view which shows the portion 10D in Fig. 10C. In the processing step shown in Fig. 9, the orifice plate 10 is bonded at the face surface of the liquid discharge head. After that, the assembled body is incorporated in an ink cartridge 120. Here, in accordance with the present embodiment, the edge of the pattern 124, having discharge ports being formed in a specific position on the orifice plate as shown in Fig. 10D, becomes a rounded form as at 125 when the edge near the discharge port is lost at the time of distribution and in the initial stage of use. At the same time, the surface becomes irregular. This formation is made when the face is wiped by the blade for removing dust particles and ink adhering to the face as well. Also, the adhesion of ink may corrode on the face to result in such formation. In this way, it becomes possible to prevent the blade from being cut off by the sharp edged pattern of the face, and to prevent the blade from being deteriorated. Also, with the irregularities formed on the surface, the hydrophilic property of this portion becomes extremely higher than the other portions, thus making it possible to trap ink on them. Also, the preservation test is carried out by use of ink, with the result that no cell reaction occurs to cause any corrosion on the orifice plate manufactured in accordance with the present embodiment. Also, in accordance with the present embodiment, gold 7 is used as the coating material. However, the present invention is not necessarily limited to it. If only the material to be used has a higher resistance to corrosion than the material used for the orifice plate formation (such as nickel used for the present embodiment). (Embodiment 4) For the embodiment described above, the description has been made of the example in which an orifice plate is applied to a liquid discharge head of the edge shooter type. However, the orifice plate is made applicable to a liquid discharge head of the side shooter type. Fig. 11 is a view which shows one assembling step of the orifice plate, which is manufactured by the method represented in Figs. 8A to 8L, to a liquid discharge head of the side shooter type. As shown in Fig. 11, the adhesive 6 is coated on the orifice plate 10. Then, the orifice plate 10 having the discharge ports 5 arranged therefor is bonded to the arrangement having the liquid flow paths 104, the elemental substrate 100 provided with the heating member 103, and the ink supply path 119. Then, after the orifice plate has been bonded to form the liquid discharge head, it is incorporated in an ink cartridge 120 as shown in Fig. 7. Here, in accordance with the embodiment described above, the adhesive is coated on the orifice plate side when it is bonded to the other element of the liquid discharge head. However, it may be possible to coat the adhesive on the face surface side of the other element of the liquid discharge head shown in Fig. 9 or on the elemental substrate 100 side with respect to the liquid discharge head shown in Fig. 11. As the adhesive, the two-part adhesive which is an epoxy adhesive (CS-2340-5: manufactured by the Cemedain K.K.) or the polyether amide adhesive (HIMAL: manufactured by Hitachi Kasei K.K.) is used. Also, for the material used for the electroforming in the processing steps in Fig. 8D, it is possible to use not only nickel, but also, to use the alloy of nickel and cobalt or the alloy of nickel and palladium. In this case, since the abrasion resistance of the orifice plate is made higher, the durability thereof is enhanced accordingly. Here, the material may be gold, platinum, or chromium. Also, the ink container (not shown) provided for the interior of the ink cartridge shown in Figs. 10A to 10D is arranged to be reusable by refilling ink when ink is consumed. Now, hereunder, the description will be made of the liquid jet apparatus provided with the liquid discharge head described above. Fig. 12 is a view which shows one embodiment of the liquid jet apparatus (IJRA) having the liquid discharge head mounted on it. As shown in Fig. 12, in accordance with the present embodiment, it is arranged to mount on a carriage HC the head cartridge where a liquid tank unit 70 and a liquid discharge head unit 60 are detachably mountable. The carriage HC can reciprocate as indicated by arrows a and b in the width direction of a recording medium 80 which is carried by recording medium carrier means. When driving signals are supplied from driving signal supplying means (not shown) to the liquid discharge means on the carriage HC, ink or other liquid is discharged from the liquid discharge head to the recording medium in accordance with such signals. Also, for the liquid jet apparatus of the present embodiment, there are provided a motor 81 serving as the driving source to drive the recording medium carrier means and the carriage HC as well; the gears 82 and 83 that transmit the driving power from the driving source to the carriage HC; and the carriage shaft 85, among some others. Fig. 13 is a view which schematically shows the full line head and its apparatus where a plurality of discharge ports are arranged over the recordable area of a recording medium. As shown in Fig. 13, the full line liquid discharge head 61 of the present embodiment is arranged in a position shiftable to the recording medium 80. Also, the carrier drum 90 is provided as means for carrying the recording medium. Here, in accordance with the present invention, it is of course possible to make each of the liquid discharge heads and liquid jet apparatuses of the present invention applicable to any one of ink discharge methods, ink jet recording heads, and ink jet recording apparatuses, respectively, by use of recording ink serving as liquid to be discharged, not necessarily limited to the embodiments described above. As described above, in accordance with the present invention, the chromium which is electron-beam etched on the glass plate is used as the mask for patterning glass grooves. The glass grooves are plated with silver buried in them. Thus, the orifice plate is formed. As a result, it becomes possible to materialize the glass mask in the same precision as the one used for the photolithography. In this way, the variation of the orifice areas becomes smaller to make the formation of highly densified orifices possible. Also, since the discharge ports are formed without using resist, there is no possibility that any step is formed with respect to the discharge port. Therefore, it becomes possible to avoid any difficulty that may hinder the effectiveness of discharge energy acting upon discharging liquid droplets or to prevent the discharge directivity from being varied. Also, the photolithographing steps are not adopted in order to manufacture orifice plates at lower costs. At the same time, there is no optical interference that may result in the elliptical configuration of each discharge port. Further, there is no resist wall present when plating is made. As a result, the sectional configuration of the discharge port presents the rounded form to make it easier to hold meniscus for the implementation of more stabilized liquid discharges and the enhancement of refilling capability as well. Also, the chromium electron-beam etched on the glass plate is used as mask to pattern the glass grooves. Then, after the glass grooves are nickel plated with silver being buried in them, the nickel is further plated with a coating material having a higher resistant to corrosion than the nickel. As a result, even if silicon or metal is used for the elemental substrate having heater members formed thereon and the ceiling plate having flow paths formed, there is no possibility that the orifice plate is dissolved due to the formation of the cell structure. In this way, even if the electroforming method is adopted, it is possible to stabilize the droplet discharges and materialize the provision of high quality images.

Claims: A method for manufacturing an orifice plate (10) for a liquid discharge head, the orifice plate (10) being provided with at least one discharge port (5) for discharging liquid, the method comprising the steps of a) preparing a non-conductive plate (1) having a flat portion corresponding to said discharge port (5); b) forming on the circumference of said flat portion a recessed portion (2) having patterned grooves; c) forming a first conductive material (3) on the entire surface of the non-conductive plate (1) having said recessed portion (2) formed thereon; d) after step c), partly peeling off the first conductive material (3) so that it remains only in said recessed portion (2) of the non-conductive plate (1); e) after step d), plating said first conductive material (3) with a second conductive material (4) by the electroforming method, thereby forming a plate member composed of the first conductive material (3) and of the second conductive material (4); and f) obtaining the orifice plate (10) having said discharge port (5) by peeling off said plate member from said non-conductive plate (1). The method according to Claim 1, wherein said non-conductive plate (1) is a glass plate. The method according to one of Claims 1 to 3, wherein said first conductive material (3) is silver. The method according to Claim 3, wherein in step c) said silver is formed on the non-conductive plate (1) by filming the silver on the surface of the non-conductive plate (1), and in step d) the silver is peeled off by rubbing. The method according to Claim 4, wherein said step of filming silver uses the silver mirror reaction. The method according to Claim 4 or 5, wherein said step of rubbing off silver uses a sponge. The method according to one of Claims 1 to 6, wherein said non-conductive plate (1) is used repeatedly. The method according to one of Claims 1 to 7, wherein said second conductive material (4) is either one of the alloy of nickel and cobalt, the alloy of nickel and palladium, gold, palladium, platinum, and chromium. The method according to one of Claims 1 to 7, wherein said second conductive material (4) is nickel. The method according to Claim 9, further comprising the step of: plating a third conductive material (7) having a higher resistance to corrosion than nickel by the electroforming method on said plate member before peeling off said plate member from the non-conductive plate. The method according to Claim 10, wherein said third conductive materiel (7) is either one of the alloy of nickel and cobalt, the alloy of nickel and palladium, gold, palladium, platinum, and chromium. The method according to claim 9, further comprising the step of providing a protection layer (7) having a higher resistance to corrosion than nickel on the surface of said orifice plate (10) on the ink discharge side. The method according to Claim 12, wherein said protection layer (7) is formed by inorganic oxide, metallic oxide, or inorganic nitride. The method according to Claim 12, wherein said protection layer (7) is either one of silicon oxide, tantalum oxide, nickel oxide, aluminum oxide, An orifice plate for a liquid discharge head, the orifice plate (10) being provided with at least one discharge port (5) and being manufactured by the method according to one of claims 10 to 14. silicon nitride. A liquid discharge head comprising: an orifice plate (10) having at least one discharge port (5) for discharging liquid, a liquid flow path (104) in communication with said discharge port (5); and an energy generating element (103) arranged corresponding to said liquid flow path (104) to generate energy to be utilized for discharging the liquid, wherein the orifice plate (10) is manufactured by the method according to one of claims 10 to 14. The liquid discharge head according to Claim 16, wherein said orifice plate (10) is bonded to a main body of the liquid discharge by means of an adhesive. The liquid discharge head according to Claim 17, wherein said adhesive is an epoxy adhesive. The liquid discharge head according to Claim 17, wherein said adhesive is a polyether amide adhesive. The liquid discharge head according to one of Claims 16 to 19, wherein said liquid discharge head is of the edge shooter type. The liquid discharge head according to one of Claims 16 to 19, wherein said liquid discharge head is of the side shooter type. A method for manufacturing a liquid discharge head comprising an orifice plate (10) provided with a plurality of discharge ports (5) for discharging liquid, a plurality of liquid flow paths (104) in communication with said discharge ports (5), a plurality of energy generating elements (103) arranged corresponding to said liquid flow paths to generate energy to be utilized for discharging the liquid, and a substrate (100) provided with said energy generating elements (103), wherein said orifice plate (10) is manufactured by the method according to one of claims 1 to 14. The method according to Claim 22, wherein said liquid discharge head is of the side shooter type.

Inventors: IKEGAME KEN, ISHINAGA HIROYUKI, KASHINO TOSHIO, KOYAMA SHUJI, MASUDA KAZUAKI, MIHARA HIROAKI, IKEGAME, KEN, ISHINAGA, HIROYUKI, KASHINO, TOSHIO, KOYAMA, SHUJI, MASUDA, KAZUAKI, MIHARA, HIROAKI
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1998
Main classification: B41J2
IPC codes: B41J2