Liquid dispensing apparatus and method

Abstract: Apparatus for dispensing a liquid to at least one point of use, the apparatus comprising a plurality of chambers, each having dispense, return and fill modes of operation in which liquid is driven therefrom, unused liquid is returned, and new liquid is introduced, respectively; a liquid distribution system having a flow circuit connected to the at least one point of use to feed the liquid from the pressure vessels and to return the unused liquid from the at least one point of use, the liquid distribution system also having a valve network communicating between the chambers and the flow circuit; the valve network configured such that two of the chambers can be brought into communication with one another, thereby to allow one of the two of the chambers to function in the dispense mode of operation and the other of the two chambers to function in the return mode of operation, receiving the unused liquid from the at least one point of use; and means for driving the liquid from each of the chambers into the liquid distribution system during the dispense mode of operation.

Description: This invention relates to an apparatus and method for dispensing a liquid to one or more points of use. More particularly, the invention relates to such an apparatus and method involving subjecting each of a plurality of chambers to a cycle in which during a fill mode the chambers are filled with the liquid, during a dispense mode the liquid is driven from the chambers to the one or more points of use, and during a return mode unused liquid from the point or points of use is returned to the chambers. Even more particularly, the invention relates to such an apparatus and method in which the cycle is conducted such that when one chamber is in the dispense mode, another chamber is in the return mode, thereby to allow for the continued circulation of the liquid. The prior art has proved a number of systems for liquid dispensing that have particular application to the industrial dispensing of process chemicals. One major application of such apparatus is the semiconductor fabrication industry in which chemicals such as photoresist, slurries, and etc. are distributed to one or more points of use such as tools used in such fabrication. In the case of a slurry, the point of use can be a pump employed to feed a polishing tool used in chemical mechanical polishing or planarization. Although pumps are used for liquid dispensing, it can be important, particularly in the case of semiconductor fabrication, that the chemical be distributed to the points of use without the type of pulsation in flow that can be caused by reciprocating pumping equipment. Such non-pulsating flow can be produced by using pressure vessels to conduct the dispensing. The pressure vessels used for such purpose are pressurised with a chemically non-reactive gas (with respect to the process being conducted) such as ultra-high purity nitrogen. For example, US 5,417,346, discloses liquid being dispensed from three pressure vessels that are first evacuated to draw in liquid. Thereafter, the pressure vessels are pressurised with nitrogen to dispense the liquid. In any dispensing system, problems can arise that are associated with the actual usage of the liquid to be dispensed, to wit: not all of the liquid to be dispensed will necessarily be used at the point of use. In order to solve this problem, as set forth in both patents mentioned above, recirculation pathways are provided to recirculate liquid back to a bulk source. The problem can be particularly troublesome in case of slurries because the particles that suspended particles will tend to settle out of the slurry if left stagnant. Additional usage related problems occur where several tools or point of use are fed by one dispensing system. When one or more are taken off-line or brought back on-line, the flow rate of liquid at each of the points of use will change. To this end, in US 5,417,346, the flow rates at points of delivery are sensed to automatically trigger needle valves to assure constant flow conditions. Although not mentioned in this US patent, it is common to regulate the entire response of the dispensing system to changes in demand by way of regulating the pressure within the return lines that recirculate liquid back to the bulk sources through pressure regulation valves that regulate liquid pressure. The problem with using valves to assure constant flow conditions is that chemicals to be dispensed can be very corrosive and/or abrasive and as such, valves can act as points of potential wear and maintenance in the dispensing apparatus. WO-A-9602319 discloses an apparatus and method for mixing, storing and delivering slurry chemicals for use in manufacturing operations. The invention is concerned with an apparatus and method for dispensing liquids that incorporates a cyclic operation that inherently allows for continued circulation of the liquid and also, is particularly amenable to controlling flow conditions at the point or points of use without that use of valves that are in contact with the liquid to be dispensed. In accordance with the invention, there is provided apparatus for dispensing liquid under impetus of gas pressure to at least one point of use according to claim 1. To this end, a plurality of chambers are provided, each having dispense, return and fill modes of operation in which liquid is driven therefrom, unused liquid is returned, and new liquid is introduced, respectively. A liquid distribution system is provided having a flow circuit connected to the at least one point of use to feed said liquid from the pressure vessels and to return said unused liquid from the at least one point of use. The liquid distribution system also has a valve network communicating between the chambers and said flow circuit. The valve network is configured such that two of the chambers can be brought into communication with one another, thereby to allow one of the two of said chambers to function in the dispense mode of operation and the other of the two chambers to function in the return mode of operation, receiving said unused liquid from the at least one point of use. Additionally, a means is provided for driving the liquid from each of said chambers into the liquid distribution system during the dispense mode of operation. In another aspect, the invention provides a method of dispensing liquid to at least one point of use as defined in claim 11. In accordance with the method, each of a plurality of chambers is subjected to dispense, return and fill modes of operation in a cycle so that when a one of the chambers is in the dispense mode of operation, a further of the chambers is in the return modes of operation. Liquid is driven from each of the chambers during the dispense mode of operation to the at least one point of use and unused liquid is returned back to the further pressure vessel undergoing said return mode of operation. Each of the pressure vessels is filled with new liquid to be dispensed during the fill mode of operation. Preferably, the apparatus and method of the invention is conducted with three chambers so that the process is continuous. However, the invention could be practised with two chambers. In such case there might be a slight discontinuity of operation between the end of the return mode and the end of the fill mode or alternatively, there might be some overlap of the return and fill modes to allow for continuous operation. Furthermore, the invention can be practised in connection with any device having a chamber. For instance, although the invention is described with reference to pressure vessels which function as chambers, it would have equal applicability to pumps having pumping chambers or cylinders to function as chambers. All of such possibilities are intended to be covered in the appended claims. As is apparent from the above description, the invention in a basic sense relates to an apparatus and method in which the dispensed liquid is circulated to the points of use and unused liquid is returned back to a chamber undergoing the return mode of operation. In such manner, liquid is subject to movement during the dispensing operation.. As will become apparent, the invention in other aspects relates to the fact that its basic cyclic operation of dispense, return, and fill modes of operation is particularly amenable to assuring constant flow conditions at the point or points of use by assuring a constant liquid pressure at the points of use. In case of pressure vessels this can be accomplished by regulating gas pressure in the pressure vessel subjected to the dispense mode and internal pressure of the pressure vessel subjected to the return mode. Other advantages and aspects of the invention will of course become apparent from the drawings and detailed description. To illustrate the invention, reference will now be made, by way of exemplification only, to the accompanying drawing which shows apparatus for carrying out a method in accordance with the invention. With reference to the drawing, an apparatus 1 is shown which is designed to dispense chemical liquids such as slurries to points of use to 2 and 3 which in case of slurries could be a peristaltic pump to feed the liquid to a chemical mechanical polishing tool. The apparatus 1 is provided with pressure vessels 10, 12 and 14 each of pressure vessels 10, 12 and 14 is subjected to dispense, return and fill modes of operation. In the dispense mode, each of the pressure vessels 10, 12 and 14 is pressurised to feed liquid to points of use 2 and 3. The liquid is distributed from each of pressure vessels 10, 12 and 14 through a liquid distribution system 16 having a flow circuit 18 connected to points of use 2 and 3 to feed liquid from pressure vessels 10, 12 and 14 to points of use 2 and 3 and to return unused liquid therefrom back to the pressure vessels 10, 12 and 14. The unused liquid is then routed to a pressure vessel (10, 12, and 14) undergoing the return mode. Liquid distribution system 16 also has valve network 20 to control the flow of liquid to and from bottom regions 22, 24 and 26 of the pressure vessels 10, 12 and 14, respectively. Although not illustrated, all liquid piping should incorporate smooth radius bends so as to prevent shearing of liquids such as slurries. Pressure piping system 28 provides communication between a pressure source (not illustrated but as could be appreciated by those skilled in the art, vaporised liquid nitrogen) and the top regions 30, 32 and 34 of the pressure vessels 10, 12 and 14, respectively. Liquid pressure within the flow circuit 18 is sensed and the pressure within the pressure vessels as they undergo dispense and return modes is adjusted to control liquid pressure so that it remains substantially constant. This pressure control will ensure that the flow rate of liquid to each of the points of use 2 and 3 remains constant. The flow circuit 18 has dispense legs 18A and return legs 18B to send liquid to the points of use 2 and 3 and to return liquid from the points of use 2 and 3 back to valve network 20. It is to be noted that although only two points of use 2 and 3 are illustrated, the present invention has applicability to any number of points of use and would even have applicability to a single point of use and would be particularly advantageous where the single point of use was used intermittently. The valve network 20 is designed such that when each of the pressure vessels is in the dispense mode, at least a further of the pressure vessels is in a return mode receiving the unused liquid from the points of use 2 and 3. To this end, the valve network 20 includes a distribution manifold 36 from which liquid is distributed to dispense leg 18A and a return manifold 38 to which unused liquid returns from the return leg 18B. A supply manifold 40 is provided having an inlet 42 which can be connected to a bulk source of liquid to be dispensed. Although not illustrated, any means can be used for transfer from a bulk source to the inlet 42. For instance, a pump, gravity, or vacuum could be used with no particular means being preferred. The valve network 20 is provided with groups of cut-off and check valves to control flow of liquid during the various modes of operation of the pressure vessels 10, 12, and 14. The cut-off valves have open and closed positions to allow and to cut-off the flow of liquid, respectively. The check valves allow flow in only one direction. Specifically, first and second cut-off valves 44 and 46 and a set of two check valves 48 and 50 are associated with the operation of the pressure vessel 10, first and second cut-off valves 52 and 54 and check valves 56 and 58 are associated with the operation of the pressure vessel 12 and first and second cut-off valves 60 and 62 and two check valves 64 and 66 are associated with the operation of the pressure vessel 14.. Note that the two check valves (48, 50, 56, 58, 61, 66) are oriented to permit liquid only flow from the return manifold 38 or to the distribution manifold 36. Thus, assuming the pressure vessel 10 is in a dispense mode, the first cut-off valve 44 will be set in the closed position and the second cut-off valve 46 will be set in the open position. This will allow liquid to be driven from pressure vessel 10 to the distribution manifold 36 and then to the dispense leg 18A of the flow circuit 18. When the pressure vessel 12 is in the dispense mode, the first cut-off valve 52 will be set in the closed position and the second cut-off valve 54 will be set in the open position. Similarly, when the pressure vessel 14 is in the dispense mode, the first cut-off valve 60 will be set in the closed position and the second cut-off valve will be set in the open position. At the time the pressure vessel 10 is functioning in the dispense mode, the pressure vessel 12 will be functioning in the return mode. To this end, its first cut-off valve 52 is set in the closed position and the second cut-off valve 54 is open position. Unused liquid will flow back through the return leg 18B of the flow circuit 18 to the return manifold 38 and then through the check valve 56 and the second cut-off valve 54 back into the bottom region 24 of the pressure vessel 12. Thus, the cut-off valve setting for the pressure vessel 12 in the return mode will be the same as in the dispense mode. The same valve settings will hold true for the first and second cut-off valves 44 and 46 when the pressure vessel 10 is in the return mode and for the first and second cut-off valves when the pressure vessel 14 is in the return mode. The flow direction is established through venting of the pressure vessel (10, 12, or 14) undergoing the return mode at a lower pressure then the pressurisation pressure of the pressure vessel (10, 12, or 14) undergoing the dispense mode. The check valve pairs 48,50, 56,58 and 64,66 prevent back flow of pressurised liquid flowing from the distribution manifold 36 to the return manifold 38. When the pressure vessel 10 is in the dispense mode and the pressure vessel 12 is in the return mode, the pressure vessel 14 will be in the fill mode. To this end, the first cut-off valve 60 is set in the open position and the second cut-off valve 62 is set in the closed position. Liquid enters the inlet 42 from the bulk source, flows into the supply manifold 40, and then into the bottom region 26 of the pressure vessel 14. When the pressure vessel 10 is in the fill mode, the first cut-off valve 44 will be set in the open position and the second cut-off valve 46 will be set in the closed position and when the pressure vessel 12 is in the fill mode the first cut-off valve 52 will be set in the open position and the second cut-off valve 54 will be set in the closed position. After a pressure vessel (10, 12, or 14) is in the dispense mode, it will function in the return mode and then the fill mode. However, it is preferable that the switching between modes not be instantaneous and as such, at any one time, two of pressure vessels 10, 12, or 14 will function in the dispense mode for a short interval. These two pressure vessels will be those that have respectively completed the fill mode and that have been acting in the dispense mode. After such simultaneous dispense mode operation, the pressure vessel, of the two pressure vessels that has most recently completed the fill mode, will continue to function in the dispense mode and the other pressure vessel will next function in the return mode. During this time, a third of the pressure vessels 10, 12, or 14 that had been functioning in the return mode will also simultaneously so function and then switch into the fill mode. These blending of modes acts to prevent pressure pulsations from occurring within flow circuit 18. As will be discussed, the triggering of the modes is controlled by liquid level detection. The valve network 20 is also provided with a cut-off valve 68 to cut-off the flow from a bulk supply. Also, a cut-off valve 70 is provided. During normal operation, the cut-off valve 70 is set in the closed position. When set in the open position, liquid is allowed to recirculate back to the bulk supply. Cut-off valves 72 and 74 permit draining of the distribution manifold 36 and the return manifold 38. During such draining, the cut-off valves 76 and 78 isolate the flow circuit 18. A cut-off valve 80 is provided to allow liquid to return from the flow circuit 18 back to drain. Pressure is supplied from a source of pressurised gas which is non-reactive with the chemical to be dispensed. In the semiconductor processing industry pressurised ultra-high purity nitrogen is commonly used for such purpose. The pressure vessel piping system 28 includes a pressure manifold 82 having an inlet 84 for connection to the source of gas pressure and a vent outlet 86 which is normally vented to drain in case corrosive chemicals are present in the vent gas. Pressurisation of the pressure vessels 10, 12 and 14 during the dispense mode is controlled by first three-way valves 88, 90 and 92 which are connected between pressure manifold 82 and the pressure vessels 10, 12 and 14, respectively. Second three-way valves 94, 96 and 98 are connected to first three-way valves 88, 90, and 92, respectively, to control venting during return and fill modes of operation. Each of the aforementioned three-way valves (88-98 inclusive) have two positions so that flow may be established between two valve ports. When each of the first three-way valves 88, 90 or 92, is set in a first of the two positions, flow communication is established between the pressure manifold 82 and the respective connected the pressure vessel 10, 12 or 14 to establish the dispense mode. Thus, when the first three-way valve 88 is set in the first of the two positions, high pressure nitrogen flows into the pressure vessel 10 which is thus, in the dispense mode of operation. When each of the first three-way valves 88, 90, or 92 is set in the second of their two positions, communication is established between the top regions 30, 32 and 34 of the pressure vessels 10, 12 and 14 and the second three-way valves 94, 96 and 98. This second setting of the first three-way valves 88, 90, or 92 occurs during fill and return modes of operation. When the three-way valves 94, 96 and 98 are set in their first and second of two positions (first three-way valves 88, 90, or 92 having been set in the second of their two positions,) flow communication is established between the top regions 30, 32, and 34 of the pressure vessels 10, 12, and 14 and either flow path 100 or flow path 102. When the second three-way valves are set in the position the involving flow path 100, the pressure vessels 10, 12 and 14 simply vent to drain which is at atmospheric pressure. This allows filling of a pressure vessel (10, 12, or 14) during the fill mode. For example if the pressure vessel 14 is in the fill mode, the first three-way valve 92 would be set in the second of its positions and the second three-way valve 98 would be set in its position to allow flow communication with flow path 100. It is understood that in such case the pressure vessel 12 would be undergoing the return mode and as such, the second three-way valve 96 would be set in the opposite of positions to allow flow communication with the flow path 102. The flow path 102 has a pressure regulation valve 104 through which gas vents through the return mode. The pressure regulation valve 104 is a control valve controlled to operate at a lower pressure than the gas pressure so that liquid is driven through the flow circuit 18 and also to regulate pressure within the pressure vessel undergoing the return mode of operation. Pressure is regulated in each pressure vessel 10, 12 and 14 (during the dispense mode of operation ) by means of a pilot regulator 106 another control valve that controls the pressure of slaved pressure regulators 108, 110 and 112 located downstream of the pilot regulator 106. This prevents pressure fluctuations that would otherwise occur within the pressure vessels 10, 12, or 14 during switching pressure vessels between dispense, return, and fill modes of operation. Although less advantageous, a single pressure regulator 106 could be employed without the slaved pressure regulators 108, 110 and 112. Further, it is to be noted that a pressure relief valve 114 is provided as a safety device to prevent failure of the pressure vessel piping system 28 should a malfunction occur. The above means for delivering gas pressure to the pressure vessels, although preferred, is one of many different valve arrangements which could be used. For instance, two position valves with separates lines leading to and from the pressure vessels could be provided for delivery of gas pressure to the vessels and subsequent venting of the vessels. Although not illustrated, but as would be known to those skilled in the art, all of the aforementioned valves which operate as cut-off valves and three-way valves can be controlled by a programmable logic controller or perhaps an analogue device. Such circuit or device and the electrical connections would be known to those skilled in the art and are thus, not illustrated. However, the activation of such circuits or devices would be controlled by high liquid level detectors 116, 118 and 120 and first and second lower level liquid detectors 122, 124, 126 and 128, 130, 132, respectively. Each of level detectors 116-132, inclusive, could be either ultrasonic, point level detectors, or mechanical devices. By way of example, assuming the pressure vessel 10 is in a dispense mode of operation, when the level of the liquid is detected by first lower level sensor 122, the pressure vessel 14 (which has just been filled with liquid) is triggered to pressurise and thus the first three-way valve 92 is set in a position to establish flow communication between the pressure manifold 82 and the top region 34 of the pressure vessel 14. After a slight delay, the cut-off valve 62 opens and both pressure vessels 10 and 14 now function in the dispense mode. The pressure vessel 12 is functioning in the return mode. When the liquid level in the pressure vessel 10 drops and is sensed by the second lower level detector 128, the first and second three-way valves 88 and 94 are set so that the pressure vessel 10 now vents through the flow path 102. As such, the pressure vessel 10 functions in the return mode of operation with the pressure vessel 12. During this time, unused liquid backfills the pressure vessel 10 and 12. When the level of liquid sensed within the pressure vessel 10 rises and is sensed by the first lower level detector 122, the valve 52 is triggered into its open position and the cut-off valve 54 re-sets into its closed position so that the pressure vessel 12 undergoes the fill mode of operation and fills with liquid until the liquid level is sensed by the high level detector 118. At the same time the first and second three-way valves 90 and 96 are set to allow atmospheric pressure venting through the flow path 100. When the high level is sensed by the level detector 118, the valve 52 is reset into its closed position. During the next cycle of operation, the pressure vessel 12 will act in the dispense mode while the pressure vessel 10 transitions from return to fill mode and the pressure vessel 14 transitions between dispense and return mode. As mentioned above, such blending of modes is preferable to instantaneous switching that can cause some degree of pressure pulsation within the flow circuit 18. In order to control pressure and therefore liquid flow at the points of use, liquid pressure is sensed within the flow circuit 18 by a pressure transducer 134. Its central placement will thus ensure constant pressure (which can result in constant flow) at both the points of use 2 and 3. The output of the pressure transducer 134 is fed as an input to a controller 136 which in turn acts to adjust the pilot regulator 106 and the pressure regulation valve 104, which are remotely activated control valves to control gas pressure in the pressure vessel undergoing the dispense mode and the internal pressure vessel undergoing the return mode so that the liquid pressure as sensed by the pressure transducer 134 remains substantially constant within the limits of system response. The controller 136 is programmed so that as liquid pressure drops, the pilot regulator 106 opens to increase pressure and vice-versa. Additionally, the pressure regulation valve 104 is then adjusted to maintain a lower pressure within the pressure vessel undergoing the return mode and also a liquid pressure as sensed by the pressure transducer 134 is constant. This is accomplished by programming the controller 136 to maintain the liquid pressure constant and to appropriately adjust the pilot regulator 106 and the pressure regulation valve 104 in accordance with their flow characteristics. An alternative, but less preferred, means to regulate gas pressure and internal pressure and thereby to control the liquid flow at the points of use is to employ mechanically adjusted valves for the pilot regulator 106 and the pressure regulation valve 104. Such mechanically adjusted valves are provided with settings to maintain constant gas pressure and constant internal pressure. The disadvantage of such means is that it will not maintain liquid pressure and therefore flow as precisely as an electronic system responding to liquid pressure at the points of use. The pressure regulation valve 104 could be a mechanical device designed to maintain a constant pressure in the vessel undergoing the return mode. In such case only the pilot regulator 106 would be adjusted by the controller 136 in response to liquid pressure variation. Similarly, the pilot regulator 106 could be the mechanical device which only the pressure regulation valve 104 were operated by controller 136 in response to liquid pressure change. In any embodiment, however, the pressure regulation valve 104 must operate to maintain a pressure difference between the gas pressure and the gas being vented during return mode operation to drive the liquid through flow circuit 18. In such manner as outlined above, potentially corrosive and/or abrasive liquid never comes in contact with control valves operating to maintain constant liquid pressure. Although only three pressure vessels are illustrated by the drawing, more than three pressure vessels could be used in an embodiment of the invention. For instance, a fourth pressure vessel might always be filled and pressurised in case of a system breakdown. As indicated above, a minimum of two chambers or pressure vessels are necessary to carry out the present invention.

Claims: Apparatus for dispensing a liquid to at least one point of use, the apparatus comprising: a plurality of chambers (10, 12, 14), each having dispense, return and fill modes of operation in which liquid is driven therefrom, unused liquid is returned, and new liquid is introduced, respectively; a liquid distribution system (16) having a flow circuit (18) connected to the at least one point of use (2, 3) to feed the liquid from the chambers (10, 12, 14) and to return the unused liquid from the at least one point of use, the liquid distribution system (16) also having a valve network (20) communicating between the chambers and the flow circuit (18); the valve network (20) configured such that two of the chambers can be brought into communication with one another, thereby to allow one of the two of the chambers to function in the dispense mode of operation and the other of the two chambers to function in the return mode of operation, receiving the unused liquid from the at least one point of use; and means for driving the liquid from each of the chambers into the liquid distribution system during the dispense mode of operation. Apparatus according to Claim 1, in which: the chambers comprise pressure vessels (10, 12, 14) ; and the liquid driving means includes pressurisation means (28) for selectively providing communication between a pressure source and each of the vessels to pressurise said vessels with gas pressure during said dispense mode. Apparatus according to Claim 1 or Claim 2, further comprising regulation means for regulating gas pressure and internal pressure within each of the pressure vessels when functioning in the dispense and return mode of operations so that liquid pressure at the at least one point of use remains substantially constant. Apparatus according to Claim 3, in which the regulation means comprises: remotely operated control valves positioned to control the gas pressure and the internal pressure within the pressure vessels during the dispense and return modes of operation; a pressure transducer (134) located within the flow circuit (18) to sense the liquid pressure; and a controller (136) response to the pressure transducer (134) and configured to operate the control valves so that liquid pressure remains substantially constant. Apparatus according to Claim 3 or Claim 4 in which the pressure means is also configured to vent the vessels during the fill and return modes of operation and has two flow paths, one of the two flow paths activated during the fill mode of operation and venting to atmospheric pressure and the other of the two flow paths activated during the return mode of operation and associated with the regulation means so that the internal pressure of each of the pressure vessels functioning in the return mode is regulated through the other of the two flow paths. Apparatus according to any preceding claim in which the liquid distribution system (16) also has an inlet and the valve network is also configured selectively to provide communication between the pressure vessels and the inlet during the fill mode of operation. Apparatus according to Claim 4 in which the pressure means includes: a pressure manifold (82) having an inlet (84) for connection to the source of the gas pressure, one of the control valves to regulate the gas pressure and a vent outlet (86); two flow paths (100, 102) to the vent outlet (86), one of the two flow paths venting to atmospheric pressure and the other of the two flow paths having another of the control valves to regulate the internal pressure; and first three-way valves (88, 90, 92) connected to the pressure manifold (82) and the pressure vessels and second three-way valves (94, 96, 98) connected to the first three-way valves and the two flow paths; each of the first and second three-way valves configured with two positions such that when the first three-way valves are set in a first of the two positions communication is established between the pressure manifold (82) and the pressure vessels and when set in a second of the two positions communication is established between the pressure vessels and the second three-way valves and such that when the second three-way valves are set in the first and the second of the two positions, communication is established between the one and the other of the two flow paths, respectively, to vent to atmospheric pressure and through the regulation means. Apparatus according to any preceding claim in which the valve network (20) comprises: a distribution manifold (36); a return manifold (38); an inlet manifold (40) having the inlet (42); and for each of the pressure vessels, first and second cut-off valves connected thereto and a set of two check valves connecting the second cut-off valve to the distribution and return manifolds, the first cut-off valve connected to the inlet manifold so that liquid fills each of the pressure vessels when set in an open position, the second cut-off valve interposed between the pressure vessels and the set of two check valves and the two check valves oriented to permit the liquid flow from the return manifold to the second cut-off valve and from the second cut-off valve to the distribution manifold (36) so that when the second cut-off valve is set in its open position, liquid can either flow from each of the pressure vessels to the distribution manifold during the dispense mode or flow from the return manifold (38) back to the pressure vessels during the return mode. Apparatus according to any preceding claim, further comprising liquid level sensors connected to the pressure vessels to trigger the dispense, return, and fill modes of operation. Apparatus according to any preceding claim in which the plurality of pressure vessels consists of three pressure vessels. A method of dispensing liquid to at least one point of use comprising: subjecting each of a plurality of chambers to dispense, return and fill modes of operation in a cycle so that when a one of chambers is in the dispense mode of operation, a further of the chambers is in the return modes of operation; driving the liquid from each of the chambers during the dispense mode of operation to the at least one point of use; returning unused liquid back to the further chamber undergoing the return mode of operation; and filling each of the chamber with new liquid to be dispensed during the fill mode of operation. A method according to Claim 11 in which each of the chambers are pressure vessels and the pressure vessels are pressurised with gas pressure during the dispense mode to drive the liquid from each of the pressure vessels. A method according to Claim 11 or Claim 12 comprising regulating the gas pressure and internal pressure within each of the pressure vessels during the return mode of operation so that liquid pressure at the at least one point of use remains substantially constant. A method according to any one of Claims 11 to 13, further comprising: sensing the liquid pressure within the flow circuit; and regulating the gas and internal pressures in response to the sensing of the liquid pressure. A method according to any one of Claims 11 to 14 in which: high, first and second lower levels of the liquid are sensed within each of the chambers, the second lower level being located below the first lower level; when the first lower level of the liquid is sensed within the one chamber, a yet further chamber that has completed the fill mode of operation is also subjected to the dispense mode of operation so that the one and the yet further chamber are simultaneously subjected to the dispense mode of operation; when the second lower level of the liquid is sensed within the one chamber, the one and the further chambers are simultaneously subjected to the return mode of operation; when the first lower level of the liquid is again sensed within the one chamber, due to the one pressure vessel being subjected to the return mode of operation and unused liquid being returned thereto, the further chamber is subjected to the fill mode of operation and is filled with liquid until the high level of the liquid is sensed therein. A method according to any one of Claims 11 to 15 in which the liquid is a slurry and the point of use includes a tool used in chemical mechanical polishing.

Inventors: POZNIAK PETER M, ROBERTS BENJAMIN R, POZNIAK, PETER M, ROBERTS, BENJAMIN R
Applicants: BOC GROUP INC, THE BOC GROUP, INC.
Application year: 1998
Main classification: B24B37
IPC codes: B24B57, H01L21, B24B37, F17D1, B67D7