Optical modulator having a reflection plate mounted on a reflection end with an inclined angle against the reflection end

Abstract: In an optical modulator (39) comprising a substrate (7) exhibiting an electro-optical effect and having a first and a second end surfaces (31, 33) opposite to each other, an optical waveguide (9) of a branched interferometer type formed on the substrate (7) and having a first and a second branched waveguide portions (11, 13) with an input end and a reflection side end exposed in said first and second end surfaces (31, 33), respectively, a modulating electrode (15) formed on the substrate (7) in the vicinity of the branched interferometer type optical waveguide (9), and a reflection plate (35) mounted on the second end surface (33), the reflection plate (35) is inclined against the second end surface (33) of the substrate (7) to thereby make it easy to adjust an optical bias point to the optimum point and provide an improved sensitivity and linearity. Preferably, a spacer 41 is held between the second end surface (33) and a side of the reflection plate 35 to form an inclination angle  therebetween.

Description: This invention relates to an optical modulator using a waveguide formed on a substrate exhibiting the electro-optical effect. As shown in U.S. Patent No. 5,278,499 and JP-A-5 273260, the optical modulator of the type described is used in a device such as an modulator or a device for optically measuring an electromagnetic field intensity and utilizes a substrate of an electro-optic crystal such as LiNbO 3 or the like. In detail, a waveguide of a branched interferometer type is formed by the Ti thermal diffusion on the surface of the substrate. The waveguide has an incident end at an end surface of the substrate, extending to the opposite end surface of the substrate with two branched waveguide portions branched at a branched point and exposing their ends at the opposite end surface. Modulating electrodes are formed on the surface of the substrate in the vicinity of the waveguide, and a light reflecting plate is fixedly mounted on the opposite end surface of the substrate by use of an adhering agent of, for example, an ultraviolet curing type. In the optical modulator, a light beam is incident into the incident end of the waveguide at the end surface of the modulator and propagates in the waveguide. The light beam is split at the branched point into split beams which, in turn, propagate through branched waveguide portions and then is reflected as reflected light beams by the reflecting plate. The reflected light beams propagate backward in the branched waveguide portions and are combined at the branched portion, then outgoing as an output light from the incident end. It will be noted that the incident end is also used as a light outgoing end. The intensity of the output light beam is changed by application of a voltage to the modulating electrode. The intensity change is dependent on a trigonometric function of the voltage applied and has the maximum and the minimum. The optical modulator has an optical bias point which is determined as an intensity of the output light when the applied voltage is zero. The optical bias point is present at the maximum point of a trigonometric function curve of the output light intensity change if the optical modulator could be formed in a geometrically symmetric form. The optical modulator is required to have its optical bias point adjusted at a middle point on a linear portion between the maximum and the minimum of the intensity change of the output light. Thus, the light beam is linearly modulated by the voltage applied. On the contrary, when the optical bias point is offset from the middle point towards the maximum or the minimum, the intensity modulation linearity and sensitivity are degraded. It is very difficult to adjust the optical bias point by processes for producing the optical modulator without any high production accuracy which causes low production yield. The JP 05-249419 A discloses an optical modulator comprising a substrate having a first and a second end surface opposite to each other, an optical wave guide of a branched interferometer type formed on the substrate and having a first and a second branched wave guide portion with an input end and a reflection side end exposed in said first and second end surfaces, respectively, a modulating electrode formed on the substrate in the vicinity of the branched interferometer type optical wave guide, wherein the second end surface is inclined against the first end surface. JP 05-273260 A discloses an optical modulator comprising a substrate having a first and a second end surface opposite to each other, an optical wave guide of a branched interferometer type formed on the substrate and having a first and a second branched wave guide portion with an input end and a reflection side end exposed in the first and second end surfaces, respectively, a modulating electrode formed on the substrate in the vicinity of the branched interferometer type optical wave guide, and reflection plates mounted on the second end surface. It is an object of this invention to provide an optical modulator which is easy in adjustment of optical bias point and is, therefore, excellent in the intensity modulation linearity and sensitivity. The object is solved by the optical modulator of claim 1. Further developments of the invention are given in the subclaims. Brief description of the drawings: Fig. 1 is a schematic plane view of a known optical modulator; Fig. 2 is a schematic plan view of an optical modulator according to a first embodiment of this invention; Fig. 3 is a graph showing a modulated intensity curve in the optical modulator of Fig. 2 in comparison with that in the optical modulator of Fig. 1; and Fig. 4 is a schematic plan view of an optical modulator according to a second embodiment of this invention. Description of preferred Embodiments: Prior to description of preferred embodiments of this invention, description will be made as to a known optical modulator illustrated in Fig. 1 in order to support the better understanding of this invention. Referring to Fig. 1, the known optical modulator 5 comprises a lithium niobate (LiNbO 3 ) substrate 7 on which a waveguide 9 of a branched interferometer type is formed by the Ti thermal diffusion. The branched interferometer type waveguide has two first and second branched waveguide portions 11 and 13. On the substrate 7, a modulating electrode 15 is formed in the vicinity of the waveguide 9 and comprises first, second and third longitudinal electrode portions 17, 19 and 21 extending in parallel with the waveguide 9, a first lateral electrode portion 23 extending from one side toward the opposite side of the substrate 7 and in a direction perpendicular to the first and third longitudinal electrode portions 17 and 21 and connected to an end of each of the first and third longitudinal electrode portions 17 and 21, and a second lateral electrode portion 25 extending from the opposite side toward the one side of the substrate and in a direction perpendicular to the longitudinal second electrode portion 19 and connected to an opposite end of the second longitudinal electrode portion 19. Terminal pads 27 and 29 are formed at the terminal ends of the first and the second lateral electrode portions 23 and 25 at opposite sides of the substrate 7, respectively. The substrate 7 has a light incident side end 31 and a reflection side end surface 33 opposite to the light incident side end surface 31. On the reflection side end surface 33, a light reflection plate 35 having a reflecting surface 37 is adhered by, for example, an ultraviolet light curing adhesive agent. The intensity of the output light is measured by a light intensity detector (not shown) connected to an end of the waveguide 9. In the known optical modulator 5, when a light beam or a laser propagates in the waveguide 9, its intensity is changed depending on a trigonometric function by an electric field due to a voltage applied to the modulating electrode 15, as is represented by: Pout = αPin{1+cos(V1 • π /Vπ +)}/2 where Pout is output light intensity, Pin being incident light intensity, Vπ being a voltage corresponding to a half period of the output light intensity change depending on the trigonometric function of the applied voltage (which will be referred to as "1/2 wavelngth voltage"), α being a light loss factor, V1 being the applied voltage, and  being a phase angle of the optical bias point shifted from the maximum point when the applied voltage is zero. The known optical modulator 5 of Fig. 1 was produced by forming a pattern of Ti film with 40-100nm thickness on a lithium niobate substrate 7 which was cut out in a direction perpendicular to the X crystal axis, performing the Ti diffusion at a temperature of 1,000-1,100°C for 4-10 hours to form the waveguide 9, and forming a metallic pattern of the modulating electrode 15 in the vicinity of the branched waveguide portions 11 and 13. Then, the light injection end surface 31 and the reflection side end surface 33 of the substrate 7 were polished into a mirror surface. On the reflection side end surface 33, there was fixedly mounted a reflection plate 35 which comprises a glass plate coated with a metallic coating such as gold. The produced optical modulator of the known type had a width (w) of 6mm, with a distance of 36µm between the branched waveguide portions. The produced optical modulator 5 was measured in a characteristic of the output light responsive to the voltage applied. The measured characteristic is shown at a dotted line 43 in Fig. 3. Referring to Fig. 3, the known optical modulator has the optical bias point 45 at a position close to the maximum of the output light intensity curve 43 and Vπ=5V. The known optical modulator has the problem as described in the preamble. Now, description will be made as to an embodiment of this invention with reference to Figs. 2 and 3. Referring to Fig. 2, the optical modulator 39 shown therein comprises a substrate 7 of the lithium niobate on which a branched interferometer type waveguide 9 is formed by the Ti thermal diffusion, and a modulating electrode 15 disposed in the vicinity of the waveguide 9 in the similar arrangement to the known optical modulator. A light intensity detector (not shown) is also connected to an end of the waveguide 9 so as to measure the intensity of an output light therefrom. The optical modulator 39 is different from the known optical modulator in a point that a reflection plate 35 having a light reflection face 37 is mounted on a light reflection side end 33 of the substrate 7 through a spacer 41 by which the reflection side end surface 33 and the light reflection face 37 make an angle  therebetween. The substrate 7, the reflection plate 23, and the spacer 41 are fixed to each other by an adhesive agent such as an ultraviolet curing adhesive agent. It is preferable that the adhesive agent is filled in a space defined by the substrate 7, the reflection plate 23, and the spacer 41. In detail, the spacer 41 is disposed between a side of the reflection side end surface 33 and a corresponding side of the light reflection face 37 and has a thickness d so as to make the angle . The thickness d is given by the following equation: d = (Va/ Vπ) * (λ/4n) * (w/L) where Va is an applied voltage required to shift the phase angle to the middle point when =0, λ being a wavelength of the light, n being a refractive index of the adhesive agent, L being a distance between the branched waveguide portions, and w being a width of the substrate. The adhesive agent is preferably one having the refractive index similar to the waveguide 9, for example, n=1.48. In the optical modulator 39, the split beams passing through the branched waveguide portions 11 and 13 are emitted from the substrate 7 and reflected as the reflected light beams by the light reflection face 37 into the branched waveguide portions 11 and 13. The reflected light beams propagate backward in the branched waveguide portions 11 and 13 and then combined into a combined light beam at the branched point, which is emitted as the output light. Due to the inclination angle  of the light reflection face 37, there is a difference of (Va/Vπ)*(λ/2n) between optical paths for the split beams passing through the branched waveguide portions to the light reflection face 37. Therefore, the combined light beam has an intensity corresponding to the middle point between the maximum and the minimum when the applied voltage is zero. That is, the optical bias point is adjusted to the middle point. Now, the optical modulator of Fig 2 will be described in connection with its production method and its modulation characteristic. An optical modulator shown in Fig. 2 according to a first embodiment of this invention was produced in the producing manner similar to the known modulator of Fig. 1 as described above. After the reflection side end surface 33 of the substrate 7 was polished, a reflection plate 35 was fixedly mounted on the reflection side end surface 33 with a spacer 41 of a thickness of 15µm being disposed between a side portion of the reflection plate 35 and the reflection side end surface 33 so that the reflection plate 35 is inclined against the reflection side end surface 33. The optical adhesive agent is fulfilled within a space defined by the reflection side end surface 33, the reflection surface 37 and the spacer 41. The thickness of the spacer 41 was selected to adjust the bias point into the optimum point as determined by equation (2) described above. With respect to the optical modulator 39 as produced, a characteristic of the output light responsive to the voltage applied was measured and is shown in Fig. 3. Referring to Fig. 3, the optical modulator 39 of the present invention has a bias point 49 at a middle point between the maximum and the minimum of a light intensity curve 47 responsive to the applied voltage variation. Referring to Fig. 4, an optical modulator 31 according to a second embodiment of this invention shown therein comprises a lithium niobate substrate 7 on which a pair of waveguides 9 and 53 of a branched interferometer type is formed by the Ti thermal diffusion. The waveguide 9 has first and second branched waveguide portions 11 and 55 and the other waveguide 53 has also has first and second branched waveguide portions 13 and 57 which are connected to the branched first and second waveguide portions 11 and 55, respectively, at the reflection side end surface 33. A modulating electrode 59 is formed in the vicinity of the branched waveguide portions 11, 55, 13 and 57. The modulating electrode 59 comprises first through fourth longitudinal electrode portions 61, 63, 65 and 67 extending along and over the branched waveguide portions 11, 55, 13 and 57, respectively. The modulating electrode 59 has a first lateral electrode portion 69 which extends from one side of the substrate toward the other side in a direction perpendicular to the longitudinal electrode portions and is connected to one ends of the first and third electrode portions 61 and 65. The modulating electrode 59 further has a second lateral electrode portion 71 which extends toward the one side of the substrate from the other side in a direction perpendicular to the longitudinal electrode portions and is connected to the opposite ends of the second and fourth electrode portions 63 and 67. Terminal pads 73 and 75 are formed at a terminal end of the first lateral electrode portion 69 at the one side of the substrate 7 and at a terminal end of the second lateral electrode portion 71 at the other side, respectively. A reflection plate 35 having a light reflection face 37 is also fixedly mounted on a reflection side end surface 33 of the substrate 7 by means of an adhesive agent such as an ultraviolet curing adhesive with a spacer 41 held between the light reflection face 37 and the reflection side end surface 33 to thereby form an inclination angle  of the light reflection face 37 against the reflection side end surface 33. The inclination angle  is also determined by d according to equation (2). In the above mentioned embodiments, the substrate 7 has been described to be made of lithium niobate. However, the substrate can be made of other material having the electro-optical effect, such as, lithium tantalate, PLZT, GaAs, and InP. As a method for forming the waveguide, the epitaxial growth method or the proton exchange method can be used in place of the Ti thermal diffusion. The spacer can be made of any material insulatable the thickness d , and is preferably made of alumina.

Claims: An optical modulator (39, 51) comprising: a substrate (7) exhibiting an electro-optical effect and having a first and a second end surface (31, 33) opposite to each other, an optical waveguide (9) of a branched interferometer type formed on the substrate (7) and having a first and a second branched waveguide portion (11, 13) with an input end and a reflection side end exposed in said first and second end surfaces (31, 33), respectively, a modulating electrode (15, 59) formed on the substrate (7) in the vicinity of the branched interferometer type optical waveguide (9), and a reflection plate (35) mounted on the second end surface (33) and having an inclination () against said second end surface (33) of said substrate (7), wherein said optical modulator further comprises a spacer (41) disposed between a side (37) of said reflection plate (35) and said second end surface (33) of said substrate (7) to thereby form said inclination () and a space between said second end surface (33) and said reflection plate (35). The optical modulator (39, 51) as claimed in claim 1, wherein said space is filled with an adhesive agent to adhere said second end surface (33), said reflection plate (35) and said spacer (41) to each other. The optical modulator as claimed in claim 1 or 2, wherein said modulating electrode (15, 59) extends along and partially over said first and second branched waveguide portions (11, 13). The optical modulators (51) claimed in one of claims 1 to 3, said optical waveguide (9) being referred to as a first optical waveguide, said optical modulator further comprising a second optical waveguide (53) of a branched interferometer type formed on the substrate and having another first and another second branched waveguide portions (55,57) with an input end, and another modulating electrode (59) formed on the substrate in the vicinity of the branched interferometer type optical waveguide in a similar manner to said first optical waveguide (9) wherein said first and said second branched interferometer type optical waveguides (9, 53) are formed in parallel with each other, ends of the first branched waveguide portions (11, 13) of respective interferometer type optical waveguides (9, 53) are connected to each other at said second end surface (33), and ends of second branched waveguide portions (55, 57) of respective interferometer type optical waveguides (9, 53) are connected to each other at said second end surface (33). The optical modulator (39, 51) as claimed in one of claims 1 to 4, wherein said substrate (7) is made of one of lithium niobate, lithium tantalate, PLZT, and GaAs. The optical modulator (39, 51) as claimed in one of claims 1 to 5, wherein said branched interferometer type optical waveguide (9; 9, 53) is one formed by a method selected from the metallic thermal diffusion, the epitaxial growth, and the proton exchange. The optical modulator (39, 51) as claimed in claim 6, wherein said substrate (7) is made of lithium niobate. The optical modulator (39, 51) as claimed in one of claims 1 to 7, wherein said branched interferometer type optical waveguide (9; 9, 53) is formed by the Ti thermal diffusion.

Inventors: SATO KEN, TSUCHIYA HARUHIKO, SATO, KEN, TSUCHIYA, HARUHIKO
Applicants: TOKIN CORP, TOKIN CORPORATION
Application year: 1998
Main classification: G02F1
IPC codes: G02B6, G02F1