Mechanically clamping robot wrist

Abstract: The disclosure relates to a robot that can transfer a workpiece, such as a silicon wafer, at increased speeds and accelerations/decelerations. A robot wrist (100) mechanically clamps a workpiece (35) to a workpiece handling member (86) of an extendable robot arm. The wafer clamp selectively applies sufficient force to center the workpiece and prevent slippage and damage to the workpiece during rapid rotation and radial movement of the handling member. In one embodiment, a clamp for securing silicon wafers uses two independent clamp fingers (102, 104) to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except during full extension of the wafer handling member to deliver or pickup a wafer.

Description: The present invention relates to a clamping mechanism that secures a workpiece to a mechanical arm. More particularly, the present invention relates to a clamp that gently secures and centers a semiconductor wafer to a robot blade when the robot arms are at least partially retracted for rotation within a transfer chamber. Modern semiconductor processing systems include cluster tools that integrate a number of process chambers together in order to perform several sequential processing steps without removing the substrate from the highly controlled processing environment. These chambers may include, for example, degas chambers, substrate pre-conditioning chambers, cooldown chambers, transfer chambers, chemical vapor deposition chambers, physical vapor deposition chambers, and etch chambers. The combination of chambers in a cluster tool, as well as the operating conditions and parameters under which those chambers are run, are selected to fabricate specific structures using a specific process recipe and process flow. Once the cluster tool has been set up with a desired set of chambers and auxiliary equipment for performing certain process steps, the cluster tool will typically process a large number of substrates by continuously passing them, one by one, through a series of chambers or process steps. The process recipes and sequences will typically be programmed into a microprocessor controller that will direct, control and monitor the processing of each substrate through the cluster tool. Once an entire cassette of wafers has been successfully processed through the cluster tool, the cassette may be passed to yet another cluster tool or stand alone tool, such as a chemical mechanical polisher, for further processing. The amount of time required by each process and handling step has a direct impact on the throughput of substrates per unit of time. Processes that require greater amounts of time to achieve the desired result may necessitate that multiple chambers or tools be operated in parallel. On the other hand, processes that are completed in a short amount of time may be allowed to sit idle for brief periods, depending upon the economic considerations of cost of ownership and cost of operation. However, while the exact design of an integrated circuit fabrication system may be complex, it is almost always beneficial to perform each step as quickly as possible to maximize overall throughput without detrimentally effecting product quality, operating costs or the life of the equipment. One exemplary fabrication system is the cluster tool, shown in Figure 1, disclosed in United States Patent No 5,186,718, entitled "Staged-Vacuum Wafer Processing System and Method." Tepman et al., issued on February 16, 1993, which is hereby incorporated by reference. The substrate throughput in a cluster tool can be improved by increasing the speed of the wafer handling robot positioned in each transfer chamber. The robot of Figure 1 is shown in greater detail in Figure 2 and is the subject of U.S. Patent No. 5,469,035 entitled "Two-axis Magnetically Coupled Robot," issued on Nov. 21, 1995. Referring to Figure 2, the magnetically coupled robot comprises a frog-leg type connection or arms between the magnetic clamps and the wafer blade to provide both radial and rotational movement of the robot blade within a fixed plane. Radial and rotational movements can be coordinated or combined in order to pickup, transfer and deliver substrates from one location within the cluster tool to another, such as from one chamber to an adjacent chamber. As the robot speed and acceleration increase, the amount of time spent handling each substrate and delivering each substrate to its next destination is decreased. However, the desire for speed must be balanced against the possibility of damaging the substrate or the films formed thereon. If a robot moves the wafer blade too abruptly, or rotates the wafer blade too fast, then the wafer may slide off the blade, potentially damaging both the wafer and the chamber or robot. The robot blade is typically made with a wafer bridge on the distal end of the wafer blade that extends upward to restrain the wafer from slipping over the end. However, the wafer bridge does not extend around the sides of the blade and does very little to prevent the wafer from slipping laterally i.e. side to side on the blade. Furthermore, the wafers are not always perfectly positioned against the bridge. Sudden movement or high rotational speeds may throw the wafer against the bridge and cause damage to the wafer or cause the wafer to slip over the bridge and/or off of the blade. There is a certain amount of friction that exists between the bottom surface of a wafer and the top surface of the wafer blade to resist slippage of the wafer. However, the bottom surface of a silicon wafer is very smooth and has a low coefficient of friction with the wafer blade, which is typically made of stainless steel or ceramic. Furthermore, a typical wafer is so lightweight that the total resistance due to friction is easily exceeded by the centrifugal forces applied during rapid rotation of the robot, even when the blade is in the fully retracted position. However, this low coefficient of friction is typically relied upon when determining the speed at which the robot rotates. EP-0423608 discloses a two-axis magnetically coupled robot for transferring wafers between processing chambers of similar construction to that of US-5469035 referred to above and suffers from the same disadvantages identified above. US-A-74147 discloses a robot device for transferring a LCD substrate in a silicon processing apparatus under a reduced pressure. The device comprises a first stage on which the LCD substrate is mounted such that the surface of the LCD substrate is substantially horizontal, a multi-joint arm mechanism for mounting the LCD substrate on a second stage of a delivery position after moving the first stage in substantially horizontal plane, a mechanism for pushing the LCD substrate on the first and second stages, and for positioning the LCD substrate at a home position. Another object of this invention is to provide a wafer handling device which clamps the wafer to the device except during full extension of the wafer blade when the clamp is released to allow the blade to deliver or pick up a wafer. This invention provides a clamp wrist for a pair of robot arms, comprising a base plate supporting a workpiece handling blade, a pair of struts for connection to the respective robot arms for extension and retraction of the handling blade by the robot arms, the struts having cams at their distal ends which are pivotally mounted on the base plate and have intermeshing gear portions; wherein the base plate has a pair of clamp fingers having contact pads for engaging the workpiece and biassing members are coupled to the base plate for urging the clamp fingers against a workpiece on the handling blade to hold the workpiece on the blade; and wherein the cams have cogs and the clamp fingers have retraction lips engageable with the cogs to withdraw the clamp fingers from the workpiece when the robot arms reach a given degree of extension to release the workpiece on the blade. Said biassing members may be springs, and preferably are box springs. Preferably the retraction lips are adjustably coupled to the clamp fingers whereby the lips may be moved relative to the cogs of the cams for changing the robot arm degree of extension at which the clamp fingers are retracted from the workpiece. According to a further feature of the member each retraction lip may include a roller, and the cog of the respective cam may be engageable with the roller. The invention also provides a robot arm assembly comprising a clamp wrist as set out above, wherein the pair of type struts are pivotably connected to the distal ends of a pair of arms to provide a "frog-like" type arrangement for supporting the workpiece handling blade. The invention further provides a robot comprising a clamp wrist according to the latter arrangement wherein said first and second arms are coupled to first and second members coaxially rotatable about a first axis, a first magnetic drive being provided for driving the first member disposed on a first side of a wall so as to be rotatable without contact with the wall and comprising a first drive portion disposed on a second side of the wall to rotate the first member, a second magnetic drive being provided for driving the second member disposed on the first side of a wall so as to be rotatable without contact with the wall and comprises a second drive portion disposed on the second side of the wall to rotate the second member; rotation of the first and second members to rotate the first and second arms causing two independent motions of the robot including rotation of the wrist about said axis and linear, radial extension of the wrist from said axis. In one arrangement according to the latter construction rotations of the first and second arms in a same direction are converted into rotation of the wrist and rotations of the first and second arms in opposite directions are converted into linear radial movement of the wrist. In a preferred arrangement straps may be engaged between the cams to assure equal and opposite rotation. By way of example the workpiece may be a wafer and the handling member may be a wafer blade. So that the manner in which the above recited features, advantages and objects of the present invention are attained can be understood in detail, a more particular description of the invention, briefly summarised above, may be had by reference to the embodiments thereof which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical embodiments of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective embodiments. Figure 1 is a schematic view of a cluster tool having a robot for wafer handling. Figure 2 is a schematic view of the robot arm assembly of Figure 1 illustrating the retracted and extended positions. Figure 3 is a perspective view of the wrist assembly of the present invention shown clamping a wafer on the blade. Figure 4 is a bottom perspective view of the wrist assembly with the bottom cover plate removed. Figures 5-7 are bottom views of the wrist assembly with the bottom cover plate removed showing how the clamp mechanism releases the wafer near full extension. Figures 8 and 9 are top and cross-sectional views of a wafer blade having a plurality of wafer support members. Figure 10A is a magnified partial cross-sectional view of the wafer blade and a wafer support member as indicated in Figure 9. Figures 10B and 10C are partial cross-sectional views of alternative wafer support members that may be used instead of, or in combination with, the wafer support member of figure 10A. Figures 11 and 12 are top and cross-sectional views of a wafer blade having a sloped pocket that supports the wafer. Figures 13 and 14 are partial cross-sectional views of the distal and proximate ends of a wafer blade and sloped pocket as indicated in Figure 12. The present invention generally provides a robot that can transfer wafers at increased speeds and accelerations/decelerations. More particularly, the present invention provides a robot wrist for mechanically clamping a workpiece to a workpiece handling member of an extendable robot arm. The wafer clamp selectively applies sufficient force to prevent wafer slippage and wafer damage during rapid rotation and radial movement of the blade while allowing transfer of the wafer to be accomplished. The wafer clamp also serves to center the wafer on the blade. In one embodiment, the clamp uses two independent clamp fingers to position and hold the wafer with minimal particle generation and wafer damage. The clamp is designed so that wafers are normally clamped except during full extension of the wafer blade when the blade is delivering or picking up a wafer. The clamp of the present invention is useful in cooperation with robots in integrated circuit fabrication processes. In particular, the clamp can be incorporated into a wafer handling robot of a cluster tool to allow more rapid transfer of wafers from one location to another. An exemplary "frog-leg" type robot (as shown in Figure 2) comprises two concentric rings magnetically coupled to computer-controlled drive motors for rotating the rings about a common axis. Each ring has a first strut rigidly extending therefrom. The ends farthest from the rings are provided with pivoting joints for coupling with second struts. The ends of the second struts, farthest from the first struts, i.e. the distal ends, are pivotally coupled to a common rigid member, such as a robot blade. The wrist clamp of the present invention is positioned at the distal end of the robot arm(s), as defined above, and includes a pair of independent clamp fingers that are biased to engage, center and secure a wafer by contacting only the perimeter edge of the wafer. A wafer is released from the clamp fingers only when the robot arm has been extended to a predetermined radial distance as required to allow the wafer to be removed from the blade. The clamp fingers are preferably biased toward the wafer by a spring, such as a parallelogram spring. As the robot arm is extended, pivots or cams at the distal ends of the frog leg-like arm struts rotate in opposite directions. This rotation of each cam allows a cog extending therefrom to engage a lip on the clamp finger and forcibly retract the finger from its normally extended position. It is preferred that the lip include a roller for facing engagement with the cog to prevent friction between the lip and cog that could generate particles. When the robot arm is retracted, the cogs disengage the clamp finger allowing the finger to return to the extended position. In this manner, the clamp provides an automatic mechanical clamping of the wafer with a force determinable by the selection of the spring. The radial distance at which the wafer is released is adjustable by repositioning the lip of the clamp finger so that it is engaged by the cog at the desired degree of robot arm extension. Referring now to Figure 1, a schematic diagram of an exemplary integrated cluster tool 10 is shown. Substrates are introduced into and withdrawn from the cluster tool 10 through a cassette loadlock 12. A robot 14 having a blade 17 is located within the cluster tool 10 to transfer the substrates from one process chamber to another, for example cassette loadlock 12, degas wafer orientation chamber 20, preclean chamber 24, PVD TiN chamber 22 and cooldown chamber 26. The robot blade 17 is illustrated in the retracted position for rotating freely within the chamber 18. A second robot 28 is located in transfer chamber 30 to transfer substrates between various chambers, such as the cooldown chamber 26, preclean chamber 24, CVD Al chamber 84 and a PVD AlCu processing chamber 88. The specific configuration of the chambers in Figure 1 is merely illustrative and comprises an integrated processing system capable of both CVD and PVD processes in a single cluster tool. In a preferred aspect of the invention, a microprocessor controller 29 is provided to control the fabricating process sequence, conditions within the cluster tool and operation of the robots 14,28 Now referring to Figure 2, a schematic view of the magnetically coupled robot 14 of Figure 1 is shown in both the retracted and extended positions. The robot includes a first strut 81 rigidly attached to a first magnet clamp 80 and a second strut 82 rigidly attached to a second magnet clamp 80'. A third strut 83 is attached by a pivot 84 to strut 81 and by a pivot 85 to a wafer blade 86. A fourth strut 87 is attached by a pivot 88 to strut 82 and by a pivot 89 to wafer blade 86. The structure of struts 81-83, 87 and pivots 84, 85, 88, 89 form a "frog leg" type connection of wafer blade 86 to magnet clamps 80,80'. When magnet clamps 80,80' rotate in the same direction with the same angular velocity, then robot 14 also rotates about axis x in this same direction with the same velocity. When magnet clamps 80,80' rotate in opposite directions with the same absolute angular velocity, then there is no rotation of assembly 14, but instead there is linear radial movement of wafer blade 86 to a position illustrated by dashed elements 81'- 89'. A wafer 35 is shown being loaded on wafer blade 86 to illustrate that the wafer blade can be extended through a wafer transfer slot 90 in a wall 91 of a chamber 32 to transfer such a wafer into or out of the chamber 32. This robot provides the advantage of being free of particulate generation via a rotary vacuum seal. The mode in which both motors rotate in the same direction at the same speed can be used to rotate the robot from a position suitable for wafer exchange with one of the adjacent chambers 12,20,22,24,26 (see Figure 1) to a position suitable for wafer exchange with another of these chambers. The mode in which both motors rotate with the same speed in opposite directions is then used to extend the wafer blade into one of these chambers and then extract it from that chamber. Some other combination of motor rotation can be used to extend or retract the wafer blade as the robot is being rotated about axis x . To keep wafer blade 86 directed radially away from the rotation axes x , an interlocking mechanism is used between the pivots or cams 85,89 to assure an equal and opposite angular rotation of each pivot. The interlocking mechanism may take on many designs, including intermeshed gears or straps pulled around the pivots in a figure-8 pattern or the equivalent. One preferred interlocking mechanism is a pair of intermeshed gears 92 and 93 formed on the pivots 85 and 89. These gears are loosely meshed to minimize particulate generation by these gears. To eliminate play between these two gears because of this loose mesh, a weak spring 94 may be extended between a point 95 on one gear to a point 96 on the other gear such that the spring tension lightly rotates these two gears in opposite directions until light contact between these gears is produced. Now referring to Figure 3, a perspective view of the wrist assembly 100 of the present invention is shown clamping a wafer 35 on the blade 86. Clamp fingers 102,104 are shown extended from the housing defined by the top cover plate 107 and bottom cover plate 105 of wrist 100 to engage the perimeter of the wafer 35. The wafer 35 is held securely between the fingers 102,104 and the blade bridge 106 under forces applied by a pair of springs 110,112 (see Figure 4). Now referring to Figure 4, a bottom perspective view of the wrist assembly 100 is shown with the bottom cover plate removed. In addition to the standard wrist components of Figures 1 and 2, the wrist 100 includes two clamp fingers 102,104 extending beyond the top cover plate 108. The fingers 102,104 are coupled to springs 110,112, illustrated here as parallelogram springs, to bias the fingers outward to a position engaging the wafer edge. Lip members 114,116 are adjustably coupled to the side of the fingers 102,104 adjacent the pivots 85,89, respectively. It is preferred that the lip members each have a roller 115,117 facing the cog to prevent friction between the cog and lip that could generate particles. The pivots 85,89 are equipped with cogs 118,120 fixably attached to pivots 85,89, respectively, so that the cogs move with rotation of the struts 83,87. During extension of the robot 14, the struts 83,87 come closer together. A corresponding rotation is imparted on the pivots 85,89 and cogs 118,120. At some point as the robot extends, the rotation of the cogs 118,120 is sufficient to engage the lips 114,116 and retract the clamp fingers 102,104 away from the wafer 35. The exact point at which the cog engages the lip and begins to release the wafer is adjusted by positioning and securing the lips 114,116 at a point along the length of the finger 102,104. This adjustment can be made so that the wafer is released at any desired degree of radial extension. For example, the lip may be adjusted according to the following steps. First, the fastener used to couple the lip to the clamp finger is loosened. Second, a wafer is positioned on the robot blade with one edge against the retaining bridge 106 (See Figure 3), such that the clamp finger engages the opposite edge of the wafer and clamps the wafer. Third, the blade is extended to the radial distance at which it is desired for the wafer to be released. The lip is then pushed up against the cog and securely fastened to the clamp finger. With the clamp wrist so adjusted, the clamp finger is normally in the clamped position so that only radial extension of the blade beyond this point will cause the wafer to be released. The biasing member is preferably a parallelogram spring, but may also be any type of spring, elastic member, pneumatic device, electromagnetic device or the like. To facilitate and anchor the biasing member, a base plate is pivotally coupled to the cams and provides a stable working surface. The base plate may be given any convenient shape, but will preferably be no larger than necessary to accommodate the biasing member. Now referring to Figures 5-7, bottom views of the blade 86 and wrist assembly with the bottom cover plate 105 (see Figure 3) removed are shown at increasing radially extended positions. The sequence of Figures 5-7 are useful to illustrate how the clamp mechanism releases the wafer near full extension. Figure 5 shows the wrist 100 of Figure 4 in a fully retracted position as when the assembly is rotated. Note that the clamp fingers 102,104 are engaged against the perimeter of wafer 35 and that the springs 110,112 are slightly flexed to apply a predetermined force to the fingers in the direction of the wafer. The engagement of the two clamp fingers 102,104 not only clamps the wafer, but centers the wafer on the blade 86. Because the wafer will always be centered, there are fewer handling errors and there is no need to used sophisticated center finding equipment, although it could still be used. Also note that when the wrist 100 is fully retracted, the proximal distance between the cogs 118,120 and the lips 114,116 is at a maximum. Figure 6 shows the blade 86 and wrist assembly 100 half way between the fully retracted and fully extended position. Consequently, the pivots 85,89 have been rotated so that cogs 118,120 are approaching the lips 114,116. However, the clamp fingers 102,104 have not yet been retracted and continue to engage and secure the wafer 35. Figure 7 then shows the blade 86 and wrist assembly 100 extended to a point where the clamp will be released, just short of the fully extended position. The wafer is released on continued rotation of the pivots 85,89 as the cogs 118,120 engage the lips 114,116 and pull the clamp fingers 102,104 away from the wafer edge. Note the gaps 128,130 between the clamp fingers and the wafer edge that allow the wafer to be lifted from the blade by another apparatus, such as the lift pins of a processing chamber (not shown). It is also instructive to note that the springs 110,112 are now further displaced than in either Figures 5 or 6. Figures 8 and 9 are top and cross-sectional views of a wafer blade 86 having a plurality of wafer support members 140. The wafer support members 140 are coupled to, or integrally formed in, the wafer blade 86 and have a wafer contacting surface 142 that extends upward a sufficient distance above the top surface 142 of the wafer blade 86 to prevent the bottom surface of the wafer 35 from making contact with the top surface 144 of the wafer blade 86. In this manner, the wafer support members 140 reduce the degree to which the bottom surface of the wafer 35 is contacted and rubbed, thereby reducing the likelihood or degree of particle generation or wafer damage. While it is generally preferred to minimize particle generation or wafer damage, the importance of this objective may be heightened in applications where the bottom surface of the wafer is coated, such as with gold. Although a wafer could be supported on as few as three wafer support members 140, it is preffered that the wafer blade 86 include at least four wafer support members 140. It is also generally preferred that the wafer support members 140 be spread out as great a distance as is practical in order to provide stability to the wafer 35 received thereon, even though additional stability will be provided when the wafer is clamped. When the clamp fingers 102, 104 engage the wafer, the wafer is secured between the fingers and the blade bridge 106. If the wafer was originally positioned on the robot blade 86 with a small gap between the wafer edge and the blade bridge 106, then the engagement of the clamp fingers 102, 104 will push the wafer until it moves against the blade bridge 106. It is during this movement of the wafer relative to the robot blade 86 that the bottom surface of the wafer encounters frictional forces with the top surface 142 of the support members 140. However, unlike the support members of conventional blades which contact the wafer over a large surface area, the support members of the present invention reduce or minimize the degree of contact and friction therebetween and, thereby, reduces or eliminates wafer damage or particle generation. Consequently, the support members of the present invention would not have been useful with conventional, non-clamping robot blades which rely on friction to keep the wafer on the blade during movement of the blade. The support members 140 of the present invention are not relied upon to provide friction, but rather to reduce friction and damage to the bottom of the wafer. It is the clamping action of the present invention that holds the wafer in place on the blade during movement of the blade. While the support members 140 may be made from any material, it is generally desirable to select a material that does not corrode in the process environment, erode or generate particles from contact with the wafer, and does not damage the wafer surface. Materials preferred for use as support members include alumina, blue saphire, zirconia, silicon nitride and silicon carbide. The support member may also be made from a machined metal component having a ceramic coating thereon. Figures 10A is a magnified partial cross-sectional view of the wafer blade 86 and a wafer support member 140 as indicated in Figure 9. The support member in Figure 10A is shown as a ball bearing than can rotate within bearing surfaces 146. Because the bearings are free to rotate or roll, the degree of friction between the member 140 and the wafer 35 may be further reduced or eliminated. Figures 10B and 10C are partial cross-sectional views of alternative wafer support members 150, 152 that may be used instead of, or in combination with, the wafer support member 140 of Figure 10A. The support member 150 of Figure 10B comprises a post that is rigidly received within a hole in the blade 86 and a semi-spherical button 154 which forms the top surface 142 that contacts the wafer 35. The support member 152 of Figure 10C is a ball or sphere that is rigidly secured with a hole in the blade 86 so that the top surface 142 extends slightly above the top surface 144 of the blade 86. Each of the designs in Figures 10A, 10B, and 10C, and their equivalents, may be used alone or in combination to provide support for the wafer 35. Figures 11 and 12 are top and cross-sectional views of a wafer blade having a sloped pocket that supports the wafer. The sloped pocket comprises a pair of opposing, inwardly slanting surfaces 160, 162 that support the wafer 35 along the bottom perimeter edge of the wafer. Figures 13 and 14 are partial cross-sectional views of the distal end and proximate ends of a wafer blade and sloped pocket as indicated in Figure 12. While the slanting surfaces 160, 162 may be slanted or sloped at various angles, it is preferred that the surfaces 160, 162 form an angle α that is between about 5 and about 30 degrees with the horizontal plane of the blade 86. The most preferred angle α is substantial equal to the beveled angle forming a surface 166 along the lower edge of the wafer 35. The exact angle of the surface 166, typically specified to be between about 7 and about 10 degrees, is effected by the size of the exclustion zone, which typically is between about 3 and about 6 millimeters. By providing such preferred angles, the degree of friction between the wafer edge and the surfaces 160, 162 is low and the horizontal force applied to the wafer 35 by the clamp finger 104 can easily push the wafer edges in the direction of arrows 164 until the wafer rests against the blade bridge 106. It should also be recognized the the slanted surfaces 160 and/or 162 may be used in combination with the other types of support members disclosed herein. For example it is possible to combine the slanted surface 160 near the blade bridge 106 with a pair of buttons 150 near the clamp fingers 102, 104. While the foregoing is directed to the preferred embodiment of the present invention, other and further embodiments of the invention may be devised without departing from the scope of the invention as defined by the claims which follow.

Claims: A clamp wrist for a pair of robot arms, comprising a base plate (105, 107) supporting a workpiece handling blade (86), a pair of struts (83, 87) for connection to the respective robot arms (81, 82) for extension and retraction of the handling blade by the robot arms, the struts having cams (85, 89) at their distal ends which are pivotally mounted on the base plate and have intermeshing gear portions (92, 93); characterised in that the base plate has a pair of clamp fingers (102, 104) having contact pads for engaging the workpiece and biassing members (110, 112) are coupled to the base plate for urging the clamp fingers against a workpiece on the handling blade to hold the workpiece on the blade; and in that the cams have cogs (118, 120) and the clamp fingers have retraction lips (114, 116) engageable with the cogs to withdraw the clamp fingers from the workpiece when the robot arms reach a given degree of extension to release the workpiece on the blade. A clamp wrist as claimed in claim 1, characterised in that said biassing members (110, 112) are springs. A clamp wrist as claimed in claim 1, characterised in that said biassing members are box springs (110, 112). A clamp wrist as claimed in claim 1, characterised in that the retraction lips (114, 116) are adjustably coupled to the clamp fingers and may be moved relative to the cogs of the cams for changing the robot arm degree of extension at which the clamp fingers are retracted from the workpiece. A clamp wrist as claimed in claim 1, characterised in that each retraction lip (114, 116) includes a roller (115, 117), and wherein the cog of the respective cam is engageable with the roller. A robot arm assembly comprising a clamp wrist as claimed in claim 1, characterised in that the pair of type struts are pivotably connected (84, 85) to the distal ends of a pair of arms (81, 82) to provide a "frog-leg" type arrangement for supporting the workpiece handling blade. A robot comprising a robot arm assembly as claimed in claim 6, characterised in that said first and second arms are coupled to first and second members (80, 80') coaxially rotatable about a first axis, a first magnetic drive being provided for driving the first member disposed on a first side of a wall so as to be rotatable without contact with the wall and comprising a first drive portion disposed on a second side of the wall to rotate the first member, a second magnetic drive being provided for driving the second member disposed on the first side of a wall so as to be rotatable without contact with the wall and comprises a second drive portion disposed on the second side of the wall to rotate the second member; rotation of the first and second members to rotate the first and second arms causing two independent motions of the robot including rotation of the robot about said axis and linear, radial extension of the robot arm assemblies from said axis. A robot as claimed in claim 7, characterised in that rotations of the first and second arms in a same direction are converted into one of the two independent motions and rotations of the first and second arms in opposite directions are converted into another of the two independent motions. A robot as claimed in claim 7, further comprising straps engaged between the cams to assure equal and opposite rotation. A robot as claimed in claim 7, characterised in that the workpiece is a wafer and the handling member is a wafer blade.

Inventors: HUDGENS JEFFREY C, KROEKER TONY, HUDGENS, JEFFREY C., KROEKER, TONY
Applicants: APPLIED MATERIALS INC, APPLIED MATERIALS, INC.
Application year: 1998
Main classification: B25J9
IPC codes: H01L21, B25J18, B25J9