Optical measuring device with wavelength-selective light source

Abstract: A light equipment(202) irradiating a target(200) with light adjusts light from a light source(6) in a light source optical system(216) and introduces the same into an acousto-optic device(4), for separating the same into its spectral components and modulating the same in the acousto-optic device(4). A condensing optical system(20) condenses primary light outgoing from the acousto-optic device(4), so that an irradiation optical system(220) irradiates a target(200) with the same. A photodetector(204) comprises a photoreceiving part(230) and a data processing part(107), so that the photoreceiving part(230) converts a signal responsive to the fluctuation of modulated measuring light to a plurality of signals of different degrees of amplification simultaneously outputting same. The data processing part(107) selects a non-saturated value of an amplifier or an A-D convertor while maintaining the largest degree of amplification from these signals, and lock-in processes same with a modulation frequency modulating the measuring light. A specific substance in a scattering substance can be non-invasively measured with high accuracy.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a photodetection device which can eliminate a drift or a random noise component from a feeble measuring signal and amplify the signal at a high signal-to-noise ratio suitable to be used in a measuring device for optically measuring a specific substance such as glucose or hemoglobin in blood or urine or sugar in a fruit, for example, contained in a scattering substance such as a liquid, food or a human body. Description of the Background Art In recent years, optical measurement has been performed by irradiating a target with light and then employing output light from the target. Throughout the specification, the term "output light" indicates any light entering a light scattering target and outgoing from that target, including so-called transmitted light (outgoing in the direction of the incidence of the light) as well as so-called reflected light (outgoing in the opposite direction to the direction of incidence). In such measurement, the intensity of the output light obtained by irradiating the target is measured for every wavelength in order to obtain information in the target. Therefore, it is necessary to separate the light applied to the target, or the output light, into its spectral components. Various systems are employed as spectroscopic means. A generally-employed system of separating continuous wavelength light into its spectral components by a FTIR (Fourier transform infrared spectrophotometer) or movement of a part such as an optical grating has the problem of lengthening the measuring time and something like a drift of the light quantity is apt to occur, effecting accuracy. Spectral separation at a separated wavelength employing a filter as a spectroscopic element or an LD (laser diode) or an LED (light emitting diode) as a light source takes much time if the wavelength number is increased, not only increasing the cost but also necessitating a change in the hardware used, such as the filter or the light source itself, leading to an increase in the number of necessary parts. On the other hand, an acousto-optic device (acousto-optic tunable filter. AOTF) is employed as a spectroscope in combination with a continuous light source and the spectroscope. The acousto-optic device is obtained by sticking an acoustic wave transducer to an acousto-optic crystal, in order to select a wavelength transmitted through the crystal by an acoustic wave frequency (radio frequency (RF)). The acousto-optic device has no mechanically moving parts, and is capable of wavelength scanning at a high speed. A spectrophotometer employing the acousto-optic device is commercially available. In relation to a measuring method employing the acousto-optic device as a spectroscopic element, there are a method of measuring the difference of absorption of two wavelengths (EP401453A1 ) and a method of measuring the differing spectrum of a tissue of a target in states with different volumes of blood (USP5,372,135), for example. While the relative measuring method such as two-wavelength measurement, can measure a component with high accuracy, in a simple system such as an aqueous solution system containing only a single component, it is extremely difficult to measure respective components accurately in respect to complicated systems, such as food or a human body, which are made up of a number of components. When targets differ, changes in a single component may remain the same but the remaining components change at different ratios, and hence it is difficult to accurately extract change of a noted component merely from the difference between values measured at two wavelengths. Furthermore, it is necessary to extract extremely feeble signals, while errors result from change in conditions such as pressures, surface reflectances, path lengths etc. for the blood volumes of the measured portions, and hence it is also difficult to extract a single signal of a noted component from signals which incorporate such fluctuation errors. When the output light from a sample is measured and the measured light is so extremely feeble that the detection signal and noise intensity are equivalent to one another, an output signal of a high signal-to-noise ratio cannot be obtained through a general amplifier. For example, Fig. 1 illustrates an absorption spectrum of water, and as understood from this spectrum, absorbance varies remarkably with the spectral wavelength. In general, the detection intensity of output light from a sample also varies remarkably with the wavelength. When a measuring signal from a detector changes over a wide range, the measuring signal can be in a feeble wavelength region in an amplifier keeping its amplification degree constant and the signal may not satisfy resolution when retrieved in a computer through an A-D convertor, resulting in a reduction of measuring resolution. In order to improve the purity of a spectral wavelength in an acousto-optic device, the incidence of light upon this acousto-optic device must satisfy constant optical conditions. In a conventional spectrophotometer, however, adjustment of a luminous flux incident upon an acousto-optic device from a light source is insufficient, as the rate of zero-order light contained in positive or negative first order diffractive light is large, and it cannot be said that the purity of the spectral wavelength is sufficiently large. In addition, positive or negative first order diffractive light outgoing from the acousto-optical device is different in direction from the zero-order light but close enough for the zero-order light to be readily mixed into the extracted positive or negative first order diffractive light. In order to measure a measuring signal where intensity changes over a wide range while keeping resolution, the degree of amplification must be switched. In the case of measuring a spectrum with a large dynamic range (as shown in Fig. 1, for example), it is necessary to switch the degree of amplification, increasing it for a signal with low strength and reducing it for a signal with high strength so that the measured value is not saturated through a semiconductor relay circuit such as a multiplexer. In measurement, pulse noise results from such a switching operation and influences the measured value, causing errors. In the case of amplifying an extremely feeble signal such as the measuring signal voltage of a noise level slightly larger than the heat noise of a circuit element, for example, the noise is also simultaneously amplified in an amplification method by a feedback amplifier circuit employing a transistor circuit or a differential amplifier circuit employing an operational amplifier, and hence the measuring signal cannot be distinguished from the noise. Thus, what is required is a circuit structure for suppressing the noise resulting from the circuit itself as well as eliminating influence from disturbance in the exterior of the device below the level of the measuring signal. A value of at least 100,000 is necessary for the signal-to-noise ratio. In a conventional apparatus, however, the signal-to-noise ratio in the FTIR is at a degree not exceeding 10,000. In order to eliminate influence by noise (random noise) whose frequency band is uniformly distributed, it is necessary to average the measured value by repeatedly performing measurement and integration processing in the measuring wavelength band. Even if there is more than one measuring wavelength, influence is exerted by long-period fluctuation (drift) of the measuring signal unless the measurement is performed in a short time. SUMMARY OF THE INVENTION The object of the present invention is to provide a photodetection device which improves measurement accuracy in the case of measuring feeble signals by eliminating the drift component of a measured value. This object is achieved by a photodetection device according to claim 1. The photodetection device according to the present invention is adapted to improve measurement accuracy by manipulating the degree of amplification degree in response to the strength of a signal. The photodetection device simultaneously amplifies signal values from a detection element through an amplifier at a plurality of different amplification degrees, A-D converts its outputs, and selects a signal amplified to the maximum with no saturation among the signals, thereby suppressing the occurrence of pulse noise that may have resulted had a switching device such as a relay circuit or a multiplexer been employed. The photodetection device modulates a measuring signal and performs synchronous signal processing corresponding to lock-in processing at its modulation frequency, thereby accurately extracting only a modulation frequency component for eliminating random noise. To this end, the photodetection device according to the present invention comprises modulation means modulating the measuring light, a detection element outputting a signal responsive to the measuring light, an amplifier inputting the output of the detection element and simultaneously outputting a plurality of signals of different degrees of amplification, an A-D convertor converting the plurality of output signals of different degree of amplification from the amplifier to digital signals, and a data processing part The data processing part comprises channel selection means inputting the plurality of output signals of the A-D convertor and selecting a non-saturated value of the amplifier or the A-D convertor with the largest degree of amplification from these signals, synchronous signal processing means superposing the selected signal with an oscillation signal synchronous with the modulation frequency modulating the measuring light, and integration means obtaining a measured value by integration of the signal subjected to synchronous signal processing. The term "propagation angle" indicates an angle formed by an optical axis of the luminous flux and the propagation direction of the ray in the luminous flux propagated in space. When the optical axis of the luminous flux is perpendicularly introduced into the acousto-optic device, only a ray with a propagation angle smaller than the allowable angle of the acousto-optic device contributes to first order diffractive light Therefore, the intensity of the first order diffractive light is increased as the number of rays with propagation angles smaller than the allowable angle of the acousto-optic device is increased in the luminous flux perpendicularly entering the acousto-optic device. Preferably, the propagation angles of all rays entering the acousto-optic device should be smaller than the allowable angle of the acousto-optic device. While the optical axis of the luminous flux entering the acousto-optic device is preferably perpendicular to an incidence plane of the acousto-optic device, the direction of the optical axis of the luminous flux entering the acousto-optic device may not be strictly perpendicular to the incidence plane of the acousto-optic device if satisfying the condition that an angle formed by the ray included in the luminous flux and the perpendicular direction with respect to the incidence plane of the acousto-optic device is smaller than the allowable range of the acousto-optic device. The light source optical system is adjusted to introduce the light from the light source into the acousto-optic device in the luminous flux which is smaller than the size of the window of the acousto-optic device as the ray with a propagation angle smaller than the allowable angle of the acousto-optic device, whereby the purity of the first order diffractive light is improved and its intensity increased. Furthermore, the mixture of the zero-order light into the first order diffractive light can be suppressed by condensing the zero-order light, the positive first order diffractive light and the negative first order diffractive light respectively on positions spatially different from each other. Consequently, light of a desired wavelength can be accurately extracted from the light source. Wavelength scanning can be performed at a high speed by changing the acoustic wave frequency supplied by the acoustic wave transducer to the acousto-optic crystal to separate the light into its spectral components. Consequently, the measuring time can be shortened, and any drift of the light quantity in the measuring time etc. can be suppressed. The output light from the acousto-optic device can be modulated by strength modulation of the driving signal for the acoustic wave transducer or mechanical chopping of the light entering the acousto-optic device. Modulation synchronous detection (wave detection) enables detection of a light signal by the strength modulation. Therefore, in order to eliminate random noise, the output light from the acousto-optic device is modulated, modulating the measuring signal, and the synchronous signal processing corresponding to lock-in processing is performed at the modulation frequency, where only a modulation frequency component can be accurately extracted. Measurement accuracy can be improved by manipulating the degree of amplification in response to the strength of the signal. At this time, the occurrence of pulse noise, which may have been caused had a switching device such as a relay circuit or a multiplexer been employed, can be suppressed by simultaneously amplifying the signal values from the detection element by the amplifier at a plurality of different degrees of amplification, A-D converting its outputs and selecting a signal amplified to the maximum with no saturation from the signals. In the optical measuring device in which a photodetection device according to the present invention is used, the light source irradiating the target increases the purity of the positive first order diffractive light and the negative first order diffractive light outgoing from the acousto-optic device and performs spectral separation and modulation of the output light. While the detection side detecting the output light from the target performs the synchronous signal processing corresponding to lock-in processing at the modulation frequency of the measuring light for accurately extracting only the modulation frequency component, it simultaneously amplifies the detection signals at a plurality of different degrees of amplification and selects a signal amplified to the maximum with no saturation from these signals, thereby suppressing pulse noise. Thus, a specific substance in a scattering substance can be non-invasively measured with high accuracy. A preferable example of the amplifier simultaneously outputting a plurality of signals of different degrees of amplification is one comprising an input buffer circuit inputting a modulated output of the detection element, a voltage-to-current conversion circuit converting output voltage fluctuation of the input buffer circuit to current fluctuation by a resistive element, a current-to-voltage conversion circuit converting the current fluctuation by the voltage-to-current conversion circuit to voltage fluctuation amplified in a prescribed magnification by means of a resistive element, and an amplifier circuit inputting a voltage fluctuation output of the current-to-voltage conversion circuit through an output buffer circuit and outputting a plurality of signals of different magnifications. The voltage-to-current conversion circuit and the current-to-voltage conversion circuit form a preamplifier, while the amplifier circuit outputting a plurality of signals of different magnifications forms a amplifier. The amplification degrees are decided by a combination of amplifying the signals in voltage-to-current conversion in the preamplifier and further amplifying the signals at the time of current-to-voltage conversion. The signals of the preamplifier can be simultaneously outputted from the amplifier at different degrees of amplification. The data processing part preferably further comprises low-pass filter means eliminating a high-frequency component unnecessary for the synchronous signal processing from the signal selected by the channel selection means and data skip means regarding a value extracted from a signal train passed through the low-pass filter means at a constant interval every unit number as a signal value between the channel selection means and the synchronous signal processing means. Data measured at a high sampling frequency has a large Nyquist bandwidth, and hence characteristics of a low-pass filter for preventing aliasing noise can be loosened. When skip processing is performed to enable processing with a small data quantity, apparent sampling frequency is reduced by the skip processing and hence superposition results in frequency spectra of measured values. Influence by noise can be eliminated by performing processing through the low-pass filter before performing skip processing. Bandpass filter processing with a passband in the vicinity of the modulation frequency is preferably performed before the synchronous signal processing is carried out. The frequency of the signal may be displaced from the modulation frequency before performing the synchronous signal processing, and hence the accuracy of the synchronous signal processing can be improved by correcting such displacement. Thus, the optical measuring device preferably further comprises frequency displacement correction means measuring frequency displacement between the frequency of the signal inputted in the synchronous signal processing means and the modulation frequency generated with reference to a clock signal of a computer and correcting the synchronizing frequency of the synchronous signal processing means on the basis of results obtained. The signal modulated by the synchronous signal processing reaches a constant value (direct current component), and hence a high-frequency component is preferably eliminated by a low-pass filter. Therefore, the optical measuring device preferably further comprises low-pass filter means eliminating the high-frequency component unnecessary for the synchronous signal processing between the synchronous signal processing means and the integration means. Digital integration processing is higher in accuracy as the time constant for integration is increased. Therefore, the calculation speed can be improved by previously converging the calculation at a value close to the true value with a small time constant and then converging the value as an initial value with a large time constant. In the case of generating a plurality of outputs of different degrees of amplification from the amplifier, errors result in magnifications between amplifiers with different degrees of amplification. For example, an output at a x 100 degree of amplification is not necessarily correctly five times that at a × 20 degree of amplification. Instrumental errors between signals with different degrees of amplification can be eliminated by inputting a constant signal and outputting signals of different degrees of amplification, taking ratios to a certain reference output signal, regarding same as correction data and using this to correct errors between the respective degrees of amplification during the performance of digital processing. Thus, the optical measuring device preferably further comprises instrumental error preservation means comparing a plurality of outputs of different degrees of amplification of the amplifier receiving a signal of a constant amplitude and preserving the results as instrumental errors between outputs of different degrees of amplification and amplifier output correction means correcting the outputs of the amplifier with the instrumental errors preserved in the instrumental error preservation means. When the power supply voltage of the amplifier is measured by a measuring instrument for making corrections by taking a ratio to a previously set reference voltage, displacement of the absolute value of the measured value can be corrected. Thus, the optical measuring device preferably further comprises measurement result correction means measuring the power supply voltage of the amplifier and correcting the measurement result by a ratio to a previously set reference voltage. In the case of simultaneously measuring the measuring light and reference light (zero-order light from the acousto-optic device or light source light), the present invention is preferably so structured that the detection element and the amplifier are provided for both measuring light detection and reference light detection, the A-D convertor is adapted to convert both a measuring light detection signal and a reference light detection signal to digital signals, while the data processing part performs similar data processing for the reference light detection signal, dividing and correcting the data processing result of the measuring light detection signal by that of the reference light detection signal. The aforementioned and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description when seen in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 illustrates an absorption spectrum of water by an FTIR; Fig. 2 is a block diagram schematically showing one example of an optical measuring device with a photodetection device according to the present invention; Fig. 3 is a block diagram schematically showing an embodiment of a photodetection device. measuring device; Fig. 4 is a block diagram showing a amplifier in an embodiment of the photodetection device; Fig. 5 is a block diagram showing an exemplary bias circuit of a PbS element in an embodiment of the photodetection device Fig. 6 is a block diagram showing an embodiment of the function of the data processing part; and Fig. 7 is a flow chart showing an embodiment of the operation of the data processing part. DESCRIPTION OF THE PREFERRED EMBODIMENTS Fig. 2 schematically illustrates an optical measuring device comprising a photodetection device according to one embodiment of the present invention, which comprises light equipment 202 irradiating a target 200 with light, a photodetection device 204 receiving and detecting output light (transmitted/scattered light) by the target 200 as measuring light, and a control part 206 controlling the operations of the light equipment 202 and the photodetection device 204. Photodetection device 204 comprises photoreceiving part 230 and data processing part 107. Photoreceiving part 230 comprises a detection element outputting a signal responsive to the modulated measuring light, an amplifier inputting an output of the detection element and simultaneously outputting a plurality of signals of different degrees of amplification, and an A-D convertor converting the plurality of output signals of different degrees of amplification from the amplifier to digital signals. Data processing part 107 comprises channel selection means inputting the plurality of output signals from the A-D convertor and selecting a non-saturated value of the amplifier or the A-D convertor while maintaining the largest degree of amplification from these signals, synchronous signal processing means superposing the selected signal with an oscillation signal synchronous with the modulation frequency modulating the measuring light, and integration means obtaining a measured value by integrating the signal subjected to synchronous signal processing. Numeral 240 denotes a calculation part calculating the concentration of a target object in target 200 from the measured value obtained in data processing part 107, and numeral 242 denotes an output unit such as a printer, a recorder or a CRT outputting the result of measurement. Fig. 3 schematically illustrates an exemplary photodetection device 204. Detection elements 101 and 102 respectively receive measuring light A of first order diffractive light modulated by acousto-optic device 4 and reference light B of zero-order light similarly modulated. Detection elements 101 and 102 are PbS elements. Detection outputs of detection elements 101 and 102 are inputted in and amplified by amplifiers 103 and 104 each outputting a plurality of signals of different degrees of amplification. The plurality of output signals of different degrees of amplification from each of the amplifiers 103 and 104 are retrieved in a computer, data processing part 107, through A-D convertor 106. Numeral 105 denotes the power source for amplifiers 103 and 104. Data processing part 107 comprises channel selection means receiving a plurality of output signals from A-D convertor 106 and selecting non-saturated values of amplifiers 103 and 104 or A-D convertor 106 while maintaining the largest amplification degree from these signals, synchronous signal processing means synchronously signal-processing the selected signal at a modulation frequency modulating the measuring light, and integration means integrating the signal subjected to synchronous signal processing. Fig. 4 illustrates the flow of signal processing for a signal detected by detection elements 101 or 102 shown in Fig. 3 from detection to data processing in data processing part 107. The circuit structure formed by detection element 101, amplifier 103 and power source 105 is identical to that formed by detection element 102, amplifier 104 and power source 105, PbS element 111 shown in Fig. 4 corresponds to detection element 101 or 102 in Fig. 3, while PbS element bias circuit 110 and a structural part from input buffer circuit 112 to operational amplifier 122 in Fig. 4 correspond to amplifiers 3 or 4 in Fig. 3. PbS element bias circuit 110 is provided to supply a constant current to PbS element 111. Output voltage fluctuation of PbS element 111 receiving modulated light is inputted in the input buffer circuit 112. Voltage-to-current conversion circuit 114 converts the output voltage fluctuation of input buffer circuit 112 to current fluctuation by means of a resistive element. Current-to-voltage conversion circuit 118 inputs the current fluctuation from the voltage-to-current conversion circuit 114 through current mirror circuit 116, and converts same to voltage fluctuation amplified in a prescribed magnification by means of a resistive element. Operational amplifier 122 inputs a voltage fluctuation output of current-to-voltage conversion circuit 118 through output buffer circuit 120 and outputs a plurality of signals of different magnifications to A-D convertor 106, while data processing part 107 calculates a measured value. The respective parts of this amplifier willl now be described in more detail. Bias circuit 110 operates as a constant current source, supplying a bias voltage of a maximum of 14 V to PbS element 111. An example of bias circuit 110 is current mirror constant current circuit 132 the current of which is set by current set resistor 130, and supplies a constant bias current to PbS element 111, as shown in Fig. 5. The bias current flowing to PbS element 111 is set by current set resistance Rs as follows, for example: Bias Current = 14.0/Rs [A] where Rs > PbS element dark resistance. Further reference to Fig. 4. When light enters PbS element 111, its resistance value is changed and a voltage drop proportionate to the resistance value of the element takes place across PbS element 111. Input buffer circuit 112 receives the voltage drop of PbS element 111 as an input signal. Input and output parts of input buffer circuit 112 are a source-follower circuit by an N-channel FET and an emitter-follower circuit by a bipolar transistor, which are high input and low output impedance circuits at an amplification degree of 1. Voltage-to-current conversion circuit 114 is formed by only a fixed resistor. Assuming that Vo represents an output voltage of input buffer circuit 112, Rio represents an output resistance of input buffer circuit 112, Rci represents an input resistance of current mirror circuit 116, and Rvi represents the resistance of voltage-to-current conversion circuit 114, the input current for the current mirror circuit 116 is as follows: Current Mirror Circuit Input Current = Vo/(Rio + Rvi + Rci) Current mirror circuit 116 operates as a current buffer of low input impedance and high output impedance at a current amplification degree of 1. Current-to-voltage conversion circuit 118 is formed by only a fixed resistor, and assuming that lo represents an output current of current mirror circuit 116, Roi represents an input resistance of output buffer circuit 120 and Riv represents the resistance of current-to-voltage conversion circuit 118. the input voltage of output buffer circuit 120 is as follows: Output Buffer Input Voltage = lo·Riv·Roi / (Riv+Roi) Output buffer circuit 120 is an emitter-follower circuit by a bipolar transistor, and has high input impedance and low output impedance at an amplification degree of 1. The output from output buffer circuit 120 is branched and inputted in four operational amplifiers 122. Operational amplifiers 122 are employed as non-inverting amplifiers, and form an amplifier circuit generating outputs at four amplification factors of 1, 5, 25 and 100 times. DC servo circuit 124 applies the negative feedback of a DC area, in order to prevent elements forming the circuit from breakage when excessive DC offset or drift is caused in output buffer circuit 120. In the amplifier shown in Fig. 4, output voltages (amplifier output voltages) from operational amplifiers 122 are expressed with respect to resistance Rd of PbS element 111 in the following equation: Amplifier Output Voltage = (Vb•Rd / Rs)[{Riv•Roi / (Riv + Roi)} / (Rio + Rvi + Rci)] × (operational amplifier amplification degree) where Vb represents a bias circuit voltage (voltage across the bias current set resistor), Rd represents PbS element resistance (Ω), Rs represents bias current set resistance (Ω), Rio represents input buffer output resistance (Ω), Rvi represents voltage-to-current conversion resistance (Ω), Rci represents current mirror circuit input resistance (Ω), Riv represents current-to-voltage conversion resistance (Ω), and Roi represents output buffer input resistance (Ω). In general, Rvi〉〉(Rio + Rci) and Riv〈〈Roi, and hence the amplifier output voltage is as follows: Amplifier Output Voltage ≒ (Vb·Rd/Rs)(Riv/Rvi) x (operational amplifier amplification degree) Fig. 6 is a block diagram showing the function of data processing part 107. Data processing part 107 performs synchronous signal processing on PbS element output data stored in a data file, storing the result in the data file. With reference to Fig. 3, similar data processing is performed in the two systems of detection elements 101 and 102. Channel selection means 140 selects data of the maximum analog input channel without saturating the signal from amplifiers 103 or 104 shown in Fig. 3 from a plurality of analog input channels in each system for a measuring signal and a reference signal, converts same to a real number, which it then stores in a specified buffer circuit. In channel selection, A-D data of 16-bit resolution is determined as saturated when it is "8000H" or "7FFFH". Conversion from an integer type to a real number type of A-D data is performed according to the following equation: Real Number Data = (integer data) × (10.0/32768) × (corrected amplification degree) × (calibration data). Assuming that there are four analog input channels from operational amplifiers 122 to A-D convertor 106 shown in Fig. 4 for each system for measuring signals and reference signals, and amplifier amplification degrees in each system are 100,000, 25,000, 5,000 and 1,000 times at channels 0, 1, 2 and 3 respectively, corrected amplification degrees are 0.01, 0.04, 0.2 and 1.0 respectively. Calibration data is adapted to correct errors between the amplification degrees of the respective inputs. Data processing part 107 comprises instrumental error preservation means comparing a plurality of outputs of different degrees of amplification from the amplifier in the case of inputting a signal of a constant amplitude in the amplifier and preserving instrumental errors between the outputs of different degrees of amplification as the calibration data. Data processing part 107 also comprises amplifier output correction means correcting the output of the amplifier by using the instrumental errors preserved in the instrumental error preservation means. The quantity of data measured at a high sampling frequency per unit time is increased due to the high sampling frequency. Therefore, data processing part 107 comprises low-pass filter means 142 eliminating a high-frequency component from the signal selected by channel selection means 140 and data skip means 144 regarding a value extracted from a signal train passed through low-pass filter means 142, every unit number as a signal value. Processing with a smaller data quantity is enabled by skip processing. The apparent sampling frequency is reduced by the skip processing, and hence a spectrum of aliasing noise corresponding to the sampling frequency is superposed on a frequency spectrum of the measured value. The frequency spectrum immediately after A-D conversion is periodically distributed about a frequency of integral times the sampling frequency Fs in the period of the sampling frequency Fs. When 1/2 skip processing, for example, is performed on this signal, a spectrum about the sampling frequency Fs changes to a spectrum about Fs/2. Consequently, aliasing noise about Fs/2 appears in a signal band as a noise component, to reduce the signal-to-noise ratio. Low-pass filter processing is performed before the skip processing in order to prevent this. In order to extract only a modulation frequency component of the signal from the skipped data, synchronous signal processing means 148 performs synchronous signal processing for accurately extracting only the modulation frequency component. A bandpass filter with a passband at the modulation frequency is employed for improving the signal-to-noise ratio of the synchronous signal processing before the synchronous signal processing. The frequency of the signal may be displaced from the modulation frequency before the synchronous signal processing, and hence the accuracy of the synchronous signal processing can be improved by correcting this displacement. Frequency displacement correction means 150 measures the displacement between the frequency of the signal inputted in synchronous signal processing means 148 and the modulation frequency, and corrects the synchronizing frequency of synchronous signal processing means 148 on the basis of the result. In this correction, a point where the input signal changes from positive to negative or negative to positive (zero crosspoint) is obtained and the frequency of the input signal is obtained from the distance of the zero crosspoint. Synchronous signal processing of excellent synchronization accuracy is implemented by deciding this frequency as a local oscillation frequency. A constant value (dc component) is required from the signal modulated by synchronous signal processing, the high-frequency component is eliminated by low-pass filter means 152. The data passed through low-pass filter means 152 is integrated by digital integration means 154. An amplitude value of the measuring signal is obtained by the integration. The accuracy of integration is improved as its time constant is increased. Therefore, calculation is previously converged at a value close to the true value with a small time constant and the value is then converged with a large time constant as an initial value, thereby improving the calculation speed. The integrated data is preserved in memory device 156. When the power supply voltage of the amplifier is actually measured with a measuring device and corrected by taking a ratio to a previously set reference voltage, displacement of the absolute value of the measured value can be corrected. Therefore, data processing part 107 further comprises measurement result correction means measuring the power supply voltage of the amplifier and correcting the result of measurement by a ratio to the previously-set reference voltage. This data processing is performed in respect to the measuring light and the reference light independently of one another. A drift component of the measured value is eliminated by dividing and correcting the data processing result of a measuring light detection signal by that of a reference light detection signal. Fig. 7 is a flow chart showing the operation in data processing part 107. A plurality of outputs of different amplification degrees from the amplifier are A-D converted, for selecting non-saturation of signals while maintaining the maximum degree of amplification. The selected signal is subjected to low-pass filter processing, and thereafter subjected to the data skip processing of regarding a value extracted per unit number as a signal value. In order to eliminate random noise from the skipped data, synchronous signal processing is performed through bandpass filter processing. In the synchronous signal processing, displacement between the frequency of the signal and the modulation frequency is measured for correcting the synchronizing frequency. A high-frequency component is removed from the signal subjected to synchronous signal processing by low-pass filter processing, and thereafter integration processing is performed for preserving data.

Claims: A photodetection device comprising: a modulation means for modulating measuring light; a detection element(101 ,102) for outputting a signal responsive to said measuring light; an amplifier(103, 104) for inputting an output of said detection element(101, 102) and simultaneously outputting a plurality of signals of different degrees of amplification; an A-D convertor(106) for converting said plurality of output signals of different degrees of amplification from said amplifier to digital signals; and a data processing part(107) at least comprising channel selection means(140) for inputting said plurality of output signals from said A-D convertor(106) and selecting a non-saturated value of said amplifier or said A-D convertor(106) while maintaining the largest said degree of amplification from said signals, synchronous signal processing means(148) for superposing the signal which value has been selected with an oscillation signal synchronous with a modulation frequency for modulating said measuring light, and integration means(154) for obtaining a measured value by integration of said signal being subjected to synchronous signal processing. The photodetection device in accordance with claim 1, wherein said amplifier(103, 104) comprises: an input buffer circuit(112) for inputting a modulated output of said detection element(111); a voltage-to-current conversion circuit(114) for converting output voltage fluctuation of said input buffer circuit(112) to current fluctuation by means of a resistive element; a current-to-voltage conversion circuit(118) for converting said current fluctuation by said voltage-to-current conversion circuit(114) to voltage fluctuation amplified in a prescribed magnification by means of a resistive element; and an amplifier circuit(122) for inputting a current fluctuation output of said current-to-voltage conversion circuit(118) through an output buffer circuit(120) and outputting a plurality of signals of different magnifications. The photodetection device in accordance with claim 1, wherein said data processing part(107) further comprises low-pass filter means(142) for eliminating a high-frequency component unnecessary for said synchronous signal processing from said signal selected by said channel selection means(140) and data skip means(144) for regarding a value being extracted from a signal train passed through said low-pass filter means(142) every unit number at a constant interval as a signal value between said channel selection means(140) and said synchronous signal processing means(148). The photodetection device in accordance with claim 1, wherein said synchronous signal processing means(148) further comprises bandpass filter means(146) for passing said modulation frequency therethrough on a front stage thereof. The photodetection device in accordance with claim 1, further comprising frequency displacement correction means(150) for measuring displacement between a frequency of a signal inputted in said synchronous signal processing means(148) and said modulation frequency and correcting the synchronizing frequency of said synchronous signal processing means(148) on the basis of the result The photodetection device in accordance with claim 1, further comprising low-pass filter means(152) for eliminating a high-frequency component unnecessary for said integration processing between said synchronous signal processing(148) means and said integration means(154). The photodetection device in accordance with claim 1, wherein said integration means(154) is adapted to perform integration processing of a proper time with a proper integration time constant for regarding the result as an initial value and performing integration processing again with an integration time constant larger than said integration time constant. The photodetection device in accordance with claim 1, further comprising instrumental error preservation means for comparing a plurality of outputs of said amplifier(122) with different degrees of amplification in the case of inputting a signal of a constant amplitude in said amplifier(122) with each other and preserving the results as instrumental errors between said outputs with different degrees of amplification, and amplifier output correction means for correcting said outputs of said amplifier by said instrumental errors preserved in said instrumental error preservation means. The photodetection device in accordance with claim 1, further comprising measurement result correction means for measuring the power supply voltage of said amplifier(122) and correcting the measurement result by its ratio to a previously set reference voltage. The photodetection device in accordance with claim 1, wherein said detection element(101, 102) and said amplifier(103, 104) are provided for both measuring light detection and reference light detection, said A-D convertor(106) is adapted to convert both a measuring light detection signal and a reference light detection signal to digital signals, and said data processing part(107) is adapted to also perform similar data processing as to said reference light detection signal, for dividing and correcting the data processing result of said measuring light detection signal by that of said reference light detection signal.

Inventors: KEXIN XU, OHTSUKA KAZUSHI, KEXIN, XU, OHTSUKA, KAZUSHI
Applicants: ARKRAY INC, ARKRAY, INC.
Application year: 1997
Main classification: G01J3
IPC codes: G01J3, G01J1