ARC tube for discharge lamp device

Abstract: An arc tube for a discharge lamp device comprises: a cylindrical glass tube made of glass, having linear extension portions, each having an opening portion at an end, and a spherically swollen portion formed between the linear extension portions; and electrode assemblies inserted in the respective linear extension portions, wherein neck portions are formed in boundaries between the spherically swollen portion and the linear extension portions so that the glass in each of the linear extension portions side is prevented from flowing into the inside of the spherically swollen portion when the linear extension portions are pinch-sealed.

Description: BACKGROUND OF THE INVENTION The present invention relates to an arc tube for a discharge lamp device having the features of the preamble of claim 1 and a manufacturing method for an arc tube. An arc tube having the features of the preamble of claim 1 is known from JP 61 024125 A. Moreover, GB-A-1 061 127 discloses a cylindrical glass tube of a small incandescent tubular lamp made of glass having linear extensions, each having an opening portion at an end, and electrode assemblies inserted in the respective linear extension portions, wherein the linear portions are pinch sealed. It is taught that the glass flow in an axial direction away from the center at the end of the lamp has to be stopped to enable the glass tube to have completely plane end surfaces to reduce the variations in axial length of electric lamps with the help of a stamp press. EP-A-0 408 981 teaches that the inner diameter of a quartz fiber tube may, at the most, be 0.5 mm larger than the outer diameter of an electrode rod. US 5 286 227 teaches the provision of electrode rods having spherical portions, each having a diameter larger than the diameter of each of the electrode rods. Fig. 8 shows a conventional discharge lamp device. The discharge lamp device has a structure in which front and rear end portions of an arc tube 5 are supported by a pair of lead supports 3 and 4 projecting forward from an electrically insulating base 2. The arc tube 5 has a structure in which a closed glass bulb 5a is formed between a pair of pinch seal portions 5b, 5b such that a pair of electrode rods 6, 6 are disposed so as to be opposite to each other in the glass bulb 5a by the pinch seal portions 5b, 5b respectively and luminous materials are enclosed in the glass bulb 5a. A piece of molybdenum foil 7 integrally connected to the electrode rod 6 and a lead wire 8 is enclosed in each of the pinch seal portions 5b. A circular arc generated between the electrode rods 6, 6 in the closed glass bulb 5a emits light to thereby provide a turned-on state. A method for producing the arc tube 5 is disclosed, for example, in Japanese Patent Application Laid-open No. Hei. 6-231729. As shown in Fig. 9(a), first, an electrode assembly A constituted by an electrode rod 6, a piece of molybdenum foil 7 and a lead wire 8 to which the rod 6 and the foil 7 are integrally connected is inserted into a cylindrical glass tube W from one opening end side of the glass tube W. The glass tube W has a spherically swollen portion w 2 formed in the middle of the glass tube W, that is, between linear extension portions w 1 . A position P 1 near the spherically swollen portion w 2 is primarily pinch-sealed. Then, as shown in Fig. 9(b), luminous materials P, etc., introduced into the spherically swollen portion w 2 from the other opening end side of the glass tube W. Then, as shown in Fig. 9(c), another electrode assembly A is inserted and, at the same time, a position P 2 near the spherically swollen portion w 2 is heated and secondarily pinch-sealed while the spherically swollen portion w 2 is cooled by liquid nitrogen so that the luminous materials are not vaporized. In this manner, the spherically swollen portion w 2 is sealed hermetically, so that an arc tube 5 having a tipless closed glass bulb 5a is finished. Another method for producing the arc tube is disclosed, for example, in Japanese Patent Application Laid-open No. Hei. 5-174785. As shown in Fig. 10(a), first, an exhaust tube w 3 is integrally connected to a spherically swollen portion w 2 of a cylindrical glass tube W to produce a T-shaped glass tube. Then, as shown in Fig. 10(b), a pair of electrode assemblies A are inserted from the respective opening end sides of linear extension portions w 1 . As shown in Fig. 10(c), portions of the respective linear extension portions w 1 near the spherically swollen portion w 2 are pinch-sealed (as indicated by arrows). Incidentally, Fig. 10(c) is a bottom view of the T-shaped glass tube shown in Fig. 10(b). Then, as shown in Fig. 10(d), luminous materials P, etc., are introduced through the exhaust tube w 3 . Then, as shown in Fig. 10(e), the exhaust tube w 3 is tipped off, so that an arc tube having a tipped and closed glass bulb is finished. In the aforementioned conventional arc tubes, however, luminous flux, light color, etc., vary largely in accordance with the produced arc tubes and the proportion defections are increased correspondingly. The present inventor has examined the cause of the high percentage of defections. As a result, it has been found that the cause is in that, in the step of pinch-sealing the linear extension portions w 1 of the glass tube W, a glass material in the pinched linear extension portion w 1 side flows into the spherically swollen portion w 2 side to thereby make the internal shape of the closed glass bulb 5a distorted or make the electrodes (electrode rods 6, 6) eccentric from each other with an amount of eccentricity L as shown in an enlarged view in Fig. 11. That is, as shown in Figs. 12(a) and 12(b), a heated region of a linear glass tube is shaped up spherically by blow molding to thereby obtain the cylindrical glass tube W used in the production of an arc tube. Accordingly, neck portions 9 as shown in enlargement in Fig. 13 are formed in the boundaries between the linear extension portions w 1 and the spherically swollen portion w 2 . The inner diameter d 9 of the neck portions 9 is, however, formed to be several times as large as the diameter of spherical portions 6a at the ends of the electrode rods 6 so that the spherical portions 6a can be inserted into the spherically swollen portion w 2 smoothly. Accordingly, the clearance between the electrode rods 6 and the neck portions 9 is so large that when the glass material is pinched in the pinch-sealing step, the heated and softened glass material in the linear extension portion side flows into the spherically swollen portion w 2 side (see the arrow in Fig. 11) to make the internal shape of the closed glass bulb 5a distorted or make the counter electrodes eccentric from each other. Particularly, in order to produce an arc tube 10 having a tipless closed glass bulb 12, the glass tube W must be secondarily pinch-sealed while the spherically swollen portion w 2 is cooled so that the introduced luminous materials, etc., are not vaporized. Accordingly, the inner pressure of the spherically swollen portion w 2 becomes negative at the time of pinch-sealing. As a result, the pinched glass material is apt to be sucked into the spherically swollen portion w 2 correspondingly. The problem that the internal shape of the closed glass bulb 5a becomes distorted or the counter electrodes become eccentric arises remarkably in the arc tube 10 having such a tipless closed glass bulb. SUMMARY OF THE INVENTION The present invention is based on the aforementioned problems and the findings of the present inventor. An object of the present invention is to provide an arc tube for a discharge lamp device in which not only the internal shape of a closed glass bulb is prevented from becoming distorted but also counter electrodes are prevented from becoming eccentric at the time of pinch-sealing, an a manufacturing method thereof. In order to achieve the foregoing object, according to the present invention, provided is an arc tube for a discharge lamp device having the features of claim 1 and a method of claim 3. Preferred embodiments are disclosed in the dependent claims. Accordingly, Accordingly, the small-inner-diameter neck portions formed between the linear extension portions and the spherically swollen portion in the glass tube serve as guides for keeping the electrode rods in predetermined positions, and the neck portions prevent the pinched and softened glass material in the linear extension portion side from flowing into the inside of the spherically swollen portion side. As for the specific size of the neck portions, in the case where the electrode rods constituting counter electrodes are formed to have a diameter d 1 , the radial clearance between the neck portions and the electrode rods is selected to be not smaller than 0.05 mm in order to smoothly insert the electrode rods into the spherically swollen portion. Furthermore, in order to keep the electrode rods straight and prevent the pinched and softened glass material in the linear extension portions from flowing into the inside of the spherically swollen portion at the time of pinch-sealing, the radial clearance between the neck portions and the electrode rods is selected to be not larger than 0.5 mm. That is, the inner diameter d of the neck portions is selected to be in the following range: d 1 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm. Further, in the case where spherical portions having an outer diameter d 2 larger than the diameter d 1 of the electrode rods are formed at ends of the electrode rods respectively, the radial clearance between the neck portions and the spherical portion is preferably selected to be not smaller than 0.05 mm in order to smoothly insert the electrode rods into the spherically swollen portion. Furthermore, in order to keep the electrode rods straight and prevent the pinched and softened glass material from flowing into the inside of the spherically swollen portion at the time of pinch-sealing, the radial clearance between the neck portions and the electrode rods is preferably selected to be not larger than 0.5 mm. That is, the inner diameter d of the neck portions is preferably selected to be in the following range: d 2 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a vertical sectional view of an arc tube as an embodiment of the present invention; Fig. 2 is an enlarged sectional view of a glass tube for the arc tube; Figs. 3(a) to 3(e) are views for explaining a process for producing the glass tube: Fig. 3(a) is a view for schematically explaining the step of forming the spherically swollen portion; Fig. 3(b) is a view for explaining the step of forming the spherically swollen portion; Fig. 3(c) is a view for explaining the step of forming the spherically swollen portion; Fig. 3(d) is a view for explaining the step of forming the neck portions; and Fig. 3(e) is a view for explaining the step of forming the neck portions; Fig. 4 is a view showing, as a table, the relation between the inner diameter of the neck portions of the glass tube and the variation in the amount of eccentricity of the electrodes; Fig. 5 is a graph showing the relation between the inner diameter of the neck portions of the glass tube and the variation in the amount of eccentricity of the electrodes; Fig. 6 is a view showing, as a table, the relations between the inner diameter of the neck portions of the glass tube and the variations in luminous flux, color temperature and chromaticity; Fig. 7 is a graph showing the relation between the inner diameter of the neck portions of the glass tube and the variation in luminous flux; Fig. 8 is a sectional view of a conventional discharge lamp device; Figs. 9(a) to 9(c) are views for explaining a process for producing the conventional arc tube: Fig. 9(a) is a view for explaining the primary pinch-sealing step; Fig. 9(b) is a view for explaining the luminous material introducing step; and Fig. 9(c) is a view for explaining the secondary pinch-sealing step; Figs. 10(a) to 10(e) are views for explaining another process of producing the conventional arc tube; Fig. 11 is a view for explaining problems in the conventional arc tube; Figs. 12(a) and 12(b) are views for explaining a process of producing a glass tube for the conventional arc tube; and Fig. 13 is a view for explaining problems in the glass tube for the conventional arc tube. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments of the present invention will be described below on the basis. Figs. 1 to 3(e) show an embodiment of the present invention. Fig. 1 is a vertical sectional view of an arc tube as an embodiment of the present invention. Fig. 2 is an enlarged sectional view of a glass tube for the arc tube. Figs. 3(a) to 3(e) are views for explaining a process for producing the glass tube. In these drawings, a discharge lamp device to which an arc tube 10 is attached has the same structure as the conventional structure shown in Fig. 8, and the description thereof will be therefore omitted here. The arc tube 10 has a structure in which a round-pipe-like quartz glass tube W having a spherically swollen portion w 2 formed in the longitudinal middle of a linear extension portion w 1 is pinch-sealed at portions near the spherically swollen portion w 2 so that pinch seal portions 13, 13 rectangularly shaped in cross section are formed in opposite end portions of an ellipsoidal tipless closed glass bulb 12 forming a discharge space. Starting rare gas, mercury and metal halide (hereinafter referred to as "luminous materials, etc.") are enclosed in the closed glass bulb 12. A pair of tungsten electrode rods 6, 6 constituting discharge electrodes are disposed in the closed glass bulb 12 so as to be opposite to each other. The electrode rods 6, 6 are connected to pieces of molybdenum foil 7 enclosed in the pinch seal portions 13, respectively. Molybdenum lead wires 8 connected to the pieces of molybdenum foil 7 are led out from the end portions of the pinch seal portions 13, respectively. The rear end side lead wire 8 passes through a round-pipe-like portion 14, which is a pinchless seal portion, and extends to the outside. The external appearance of the arc tube 10 shown in Fig. 1 does not seem different apparently from that of the conventional arc tube 5 shown in Fig. 8. As shown in Fig. 2, however, neck portions wn 1 , wn 2 each having a predetermined inner diameter are, however, preliminarily formed in boundaries between the spherically swollen portion w 2 and the respective linear extension portions w 1 of the glass tube W used in a pinch seal step in a process for producing the arc tube. The glass tube W in which the neck portions wn 1 , wn 2 each having a predetermined inner diameter are formed is pinch-sealed so as to constitute an arc tube. Further, the inner diameter of each of the neck portions wn 1 , wn 2 is formed so as to be large enough so that an electrode assembly A including integrally connected an electrode rod 6, a piece of molybdenum foil 7 and a lead wire 8 can be smoothly inserted up to a predetermined position in the glass tube W. Further, when the linear extension portions w 1 are pinched in a state in which the piece of electrode assemblies A are inserted respectively, not only the electrode rods 6 are kept straight by the presence of the neck portions wn 1 , wn 2 , respectively, but also a softened glass material in each of the pinched linear extension portions w 1 is prevented from flowing into the spherically swollen portion w 2 . As a result, there is obtained a structure in which the internal shape of the tipless closed glass bulb 12 is proper so that counter discharge electrodes are formed with less amount of eccentricity. That is, if the inner diameter d of each of the neck portions wn 1 , wn 2 between the spherically swollen portion w 2 and the linear extension portions w 1 of the glass tube W used in the pinch seal step is selected to satisfy the condition of d 2 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm. in which d 1 is the thickness of each of the electrode rods 6 constituting the counter electrodes, and d 2 is the outer diameter of a spherical portion 6a formed at an end of each of the electrode rods 6, the electrode rods 6 can be smoothly inserted into the spherically swollen portion w 2 as well as the internal shape of the sealed spherically swollen portion w 2 (closed glass bulb 12) is prevented from becoming distorted so that the counter electrodes (electrode rods 6, 6) can be made slight in eccentricity. Incidentally, the glass tube W shown in this embodiment is designed so that the linear extension portion w 1 has an external diameter of 4.0 mm and an inner diameter of 2.0 mm, each of the electrode rods 6 constituting the electrodes has a diameter d 1 of 0.2 mm and the spherical portion 6a at an end of each of the electrode rods 6 has an outer diameter d 2 of 0.4 mm whereas each of the neck portions wn 1 , wn 2 has an inner diameter d in a range of from 0.45 mm to 0.7 mm, inclusively. A process for producing a glass tube W for the arc tube having such a tipless closed glass bulb 12 as shown in Fig. 1 will be described below with reference to Fig. 3. As shown in Fig. 3(a), first, a predetermined lengthwise position of a uniform-diameter cylindrical glass tube W is heated by a burner 20 so as to be softened while the glass tube W is rotated. At the same time, while an inert gas (such as Ar gas, or the like) is supplied into the glass tube to keep the inside of the tube pressurized, the glass tube is dammed axially by using a glass lathe not shown. Thus, a spherically swollen portion w 2 is formed in the middle of the linear extension portion w 1 . Further, as shown in Figs. 3(b) and 3(c), while the inside of the glass tube W is kept pressurized, the contour of the spherically swollen portion w 2 is shaped up by a molding revolving roller 22. Incidentally, Fig. 3(c) is a sectional view in the position of the spherically swollen portion w 2 in Fig. 3(b). Then, as shown in Figs. 3(d) and 3(e), the neck portions wn 1 , wn 2 between the spherically swollen portion w 2 and the linear extension portions w 1 are heated successively by the burner 20, while the inside of the glass tube W is kept pressurized. Portions softened by heating are shaped up successively by means of a neck portion molding revolving roller 24 so that the inner diameter d of each of the neck portions wn 1 , wn 2 is selected to be in a predetermined range (of from 0.45 mm to 0.7 mm, inclusively). In this manner, a glass tube W for the arc tube having the neck portions wn 1 , wn 2 formed between the spherically swollen portion w 2 and the linear extension portions w 1 is produced. After electrode assemblies A are inserted into the glass tube W and luminous materials, etc., are introduced into the glass tube W, the linear extension portions w 1 are pinch-sealed. As a result, an arc tube having a tipless closed glass bulb 12 containing the electrode rods 6, 6 disposed so as to be opposite to each other, and the luminous materials, etc., enclosed therein can be produced. This method is the same as the conventional method shown in Fig. 9. That is, as shown in Fig. 9(a), first, an electrode assembly A is inserted into the glass tube W from the lower opening end and held in a predetermined position while the glass tube W is held vertically. A position P 1 of the linear extension portion w 1 near the spherically swollen portion w 2 is heated and primarily pinch-sealed. Then, as shown in Fig. 9(b), luminous materials P, etc., are introduced into the spherically swollen portion w 2 from the upper opening end. Then, as shown in Fig. 9(c), the another electrode assembly A is inserted and, at the same time, a position P 2 of the linear extension portion w 1 near the spherically swollen portion w 2 is heated and secondarily pinch-sealed while the spherically swollen portion w 2 is cooled by liquid nitrogen so that the luminous materials P, etc., are not vaporized. Thus, the spherically swollen portion w 2 is sealed hermetically, so that the arc tube 10 having the tipless closed glass bulb 12 is finished. In the primary pinch-sealing step shown in Fig. 9(a), an axially pressing force acts on the glass material in the linear extension portion w 1 side because the glass material is pinched. The small-diameter neck portion wn 1 formed in the boundary between the spherically swollen portion w 2 and the linear extension portion w 1 , however, approaches the outer circumference of the electrode rod 6 so that the linear extension portion w 1 serves as a guide for keeping the electrode rod 6 straight at the time of the pinching of the linear extension portion w 1 and also as a barrier for preventing the pinched glass material from moving to the spherically swollen portion w 2 side. Accordingly, there is no defect that the internal shape of the molded closed glass bulb 12 becomes distorted or the electrode rod 6 is inclined. In the primary pinch-sealing step shown in Fig. 9(c), an axially pressing force acts on the glass material in the linear extension portion w 1 side because the glass material is pinched, and a negative pressure generated in the spherically swollen portion w 2 acts on the glass material because the spherically swollen portion w 2 is cooled. The small-diameter neck portion wn 2 formed in the boundary between the spherically swollen portion w 2 and the linear extension portion w 1 , however, approaches the outer circumference of the electrode rod 6 so that the neck portion serves as a guide for keeping the electrode rod 6 straight at the time of the pinching of the linear extension portion w 1 and also as a barrier for preventing the pinched glass material from moving to the spherically swollen portion w 2 side. Accordingly, there is no defect that the internal shape of the molded closed glass bulb 12 becomes distorted or the electrode rod 6 is inclined, that is, the counter electrodes (electrode rods 6, 6) become eccentric. Figs. 4 to 7 show data concerning variations in the amount of eccentricity between counter electrodes, the value of luminous flux, etc., in tipless closed glass bulbs which are obtained when arc tubes are produced by using glass tubes W having the inner diameters d of the neck portions wn 1 , wn 2 selected to be 0.6 mm, 0.7 mm, 1.0 mm and 1.5 mm, respectively. Fig. 4 is a view showing, as a table, the relation between the inner diameter of the neck portions and the variation of the amount of electrode eccentricity in the glass tube. Fig. 5 is a graph showing the relation between the inner diameter of the neck portions and the variation of the amount of electrode eccentricity in the glass tube. Fig. 6 is a view showing, as a table, the relations between the inner diameter of the neck portions and the variations of luminous flux, color temperature and chromaticity (x, y) in the glass tube. Fig. 7 is a graph showing the correlation between the inner diameter of the neck portions and the variation of the value of luminous flux in the glass tube. Also the relation between the inner diameter of the neck portions and the variation of color temperature and the relation between the inner diameter of the neck portions and the variation of chromaticity (x, y) exhibit substantially the same tendency as the correlation between the inner diameter of the neck portions and the variation of the value of luminous flux shown in Fig. 7. Incidentally, in Fig. 4, n shows the number of samples, x shows the average of the amount of eccentricity, and σ n-1 shows a standard deviation (the quantity of variation) in each case. As is obvious from these drawings, the amount of electrode eccentricity changes suddenly and the quantity of variation of luminous flux changes suddenly with the sudden change of the amount of electrode eccentricity when the inner diameter of the neck portions wn 1 , wn 2 of the glass tube W for the arc tube exceeds 0.7 mm (the radial clearance between the inner circumferential surface of the neck portions wn 1 , wn 2 and the electrode rods 6 exceeds 0.5 mm). When the inner diameter of the neck portions wn 1 , wn 2 of the glass tube W is not larger than 0.7 mm (the radial clearance between the inner circumferential surface of the neck portions wn 1 , wn 2 and the electrode rods 6 is not larger than 0.5 mm), the variations in the amount of eccentricity of the electrodes and the value of luminous flux are very small so that the variations in color temperature and chromaticity (x, y) are also very small. That is, in the arc tube using the glass tube having the inner diameter of the neck portions wn 1 , wn 2 selected to be not larger than 0.7 mm, the variations in luminous flux, color temperature and chromaticity (x, y) are small so that predetermined accuracy is guaranteed. Although the aforementioned embodiment has been explained about the arc tube having counter electrodes constituted by electrode rods 6 having spherical portions 6a of outer diameter d 2 integrally formed at their ends respectively, the invention can be also applied to an arc tube having counter electrodes constituted only by electrode rods of diameter d 1 . In this case, the inner diameter d of the neck portions is preferably selected to be in the following range: d 1 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm. Although the aforementioned embodiment has been explained about the arc tube 10 having a tipless closed glass bulb 12, the invention can be also applied to an arc tube having a tipped and closed glass bulb as shown in Figs. 10(a) to 10(e). As is obvious from the above description, in the arc tube for the discharge lamp device according to the present invention, there is no defect that the internal shape of the glass bulb becomes distorted or the electrodes become eccentric when the closed glass bulb is pinch-sealed. Accordingly, there is provided an arc tube which always has an appropriate volume and in which eccentricity between counter electrodes is avoided so that predetermined stable luminous flux is obtained.

Claims: An arc tube (10) for a discharge lamp device comprising: a cylindrical glass tube (W) made of glass, having linear extension portions (W 1 ) and a spherically swollen portion (W 2 ) formed between the linear extension portions (W 1 ); and electrode assemblies (A) inserted in the respective linear extension portions (W 1 ). wherein neck portions (Wn 1 ,Wn 2 ) are formed in boundaries between the spherically swollen portion (W 2 ) and the linear extension portions (W 1 ), characterized in that each linear extension portion (W 1 ) has an opening portion at an end, and in that the electrode assemblies (A) have a pair of electrode rods (6) each having a predetermined diameter d 1 to constitute counter electrodes; and an inner diameter d of each of the neck portions (Wn 1 ,Wn 2 ) has the following range: d 1 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm, so that the glass in each of the linear extension portions side is prevented from flowing into the inside of the spherically swollen portion (W 2 ) when the linear extension portions (W 1 ) are pinch-sealed. The arc tube (10) according to claim 1, wherein spherical portions (6a) each having an outer diameter d 2 larger than the diameter of each of the electrode rods (6) are formed at ends of the electrode rods (6) respectively; and the inner diameter d of each of the neck portions (Wn 1 ,Wn 2 ) has the following range: d 2 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm. A method of making an arc tube (10) for a discharge lamp device comprising the steps of: providing electrode assemblies (A), each having an electrode rod (6) having a predetermined diameter d 1 to constitute counter electrodes; making neck portions (Wn 1 ,Wn 2 ) in boundaries between a spherically swollen portion (W 2 ) and linear extension portions (W 1 ) of a cylindrical glass tube (W), wherein an inner diameter d of each of the neck portions (Wn 1 ,Wn 2 ) has the following range, d 1 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm; inserting the electrode assemblies (A) in the respective linear extension portions (W 1 ) of the cylindrical glass tube (W); and pinch-sealing the linear extension portions (W 1 ) of the cylindrical glass tube (W). The method of claim 3, wherein a spherical portion (6a) having an outer diameter d 2 larger than the diameter of each of the electrode rods (6) are formed at ends of the electrode rods (6) respectively; and wherein an inner diameter d of each of the neck portions (Wn 1 ,Wn 2 ) has the following range, d 2 + 0.05 mm ≤ d ≤ d 1 + 0.5 mm.

Inventors: IRISAWA SHINICHI, NAGATA AKIHIRO, IRISAWA, SHINICHI, NAGATA, AKIHIRO
Applicants: KOITO MFG CO LTD, KOITO MANUFACTURING CO., LTD
Application year: 1997
Main classification: H01J61
IPC codes: H01J61, H01J9