Electrode substrate for liquid crystal device and process for producing the same

Abstract: An electrode substrate is produced through at least the following steps of: forming a plurality of first electrodes on a light-transmissive substrate while leaving a spacing between the first electrodes, filling a resin in the spacing, curing the filled resin, and forming a plurality of second electrodes on the first electrodes and the resin so as to be in contact with the associated first electrodes, respectively. In the electrode substrate, the first electrodes have a thickness h (nm) and an average surface roughness d (nm) and the resin has a curing shrinkage ratio α (%). The thickness h, the average surface roughness d and the curing shrinkage ratio α satisfies the following relationship: d ≥ α·h/1000. A liquid crystal device is produced by using the electrode substrate satisfying the above relationship, whereby a ripple-shaped shrinkage due to a shrinkage of the resin can be prevented in an effective optical modulation region to minimize a cell gap unevenness and provide a uniform alignment state to liquid crystal molecules, thus suppressing occurrences of an ununiform optical state, crosstalk and an irregularity in drive characteristics to improve display qualities.

Description: The present invention relates to an electrode substrate including at least two types of electrodes and a process for producing the electrode substrate. The present invention also relates to a process of producing an electrode substrate, a liquid crystal device using electrode substrates, and a process of producing a liquid crystal device. Heretofore, a liquid crystal device (e.g. a liquid crystal panel) wherein a liquid crystal material is utilized for displaying information has been used in various fields in the art. Figure 1A shows an embodiment of a structure of such a liquid crystal panel. Referring to Figure 1A, a liquid crystal panel P1 includes a pair of electrode substrates 1 applied to each other with a sealing agent 2 so as to leave a spacing therebetween, and a liquid crystal 3 filling the spacing. In this embodiment, the liquid crystal 3 comprises a ferroelectric liquid crystal, thus constituting a ferroelectric liquid crystal panel. Each of the electrode plates 1 is provided with a glass substrate 5 the surface of which is provided with a plurality of transparent electrodes 6 of indium-tin oxide (ITO). The transparent electrodes 6 generally have a thickness of 50 - 150 nm and are formed into a stripe pattern by patterning treatment as shown in Figure 1B. On the surface of these transparent electrodes 6, a ca. 50-300nm (500-3000 Å-thick insulating film 7 comprising, e.g., silicon oxide or titanium oxide for preventing an occurrence of short-circuit is formed, and further thereon, an alignment control film 9 comprising, e.g., polyimide is formed. The ferroelectric liquid crystal 3 generally comprises a chiral smectic liquid crystal assuming, e.g., chiral smectic C (SmC*) phase or chiral smectic H (SmH*) phase. Accordingly, the ferroelectric liquid crystal 3 shows a helical alignment (orientation) wherein liquid crystal molecules are twisted in their (average) long axis direction in case where the influence of the pair of electrode substrates 1 thereon is small (e.g., the case of too distant electrode plates 1 with a spacing therebetween of above 100 µm) but the helical alignment of the ferroelectric liquid crystal 3 in the long axis direction is suppressed (or unwounded) by providing the liquid crystal panel P1 with a small cell thickness of, e.g., 1 - 3 µm, as described by N.A. Clark et al. "MCLC", vol. 94, pp. 213 - 234 (1983). The liquid crystal panel P1 is driven by applying a voltage to oppositely disposed transparent electrodes 6 and accordingly the liquid crystal 3 disposed between the oppositely disposed transparent electrodes 6 constitutes a capacitive load in an electric circuit. However, the transparent electrodes 6 has a sheet resistance of 20 - 400 ohm and a volume resistivity of 200x10 -8 - 4000x10 -8 ohm.m, thus being liable to cause propagation delay of a voltage waveform therein. As a result, it has been difficult to provide a resultant liquid crystal panel with a high resolution and a large picture area. This problem has been more noticeable in the case of the ferroelectric liquid crystal panel having a small liquid crystal layer thickness of 1- 2 µm when compared with a twisted nematic (TN)-type liquid crystal device. In order to remedy such a problem of the propagation delay of a voltage waveform, a method providing a larger thickness to the transparent electrode 6 may be adopted but is accompanied with a longer film formation time and a lowering in adhesiveness to the glass substrate 1. In addition, a resultant liquid crystal panel shows a lower transmittance and therefore the transparent electrodes 6 per se are visually recognized, thus deteriorating display qualities of the liquid crystal panel. As another method for solving the problem of the voltage waveform propagation delay, a method wherein low-resistive metal electrodes of Cr (15x10 -8 ohm.m) or Mo (6x10 -8 ohm.m) are formed on the surface of the transparent electrodes 6 (facing to the liquid crystal 3) may be used. However, in this method, the metal electrodes cannot be made thick due to the following factors (i) and (ii), thus resulting in a limit to improvement in propagation delay of a voltage waveform. (i) Metal electrodes are oppositely disposed so as to sandwich therebetween a liquid crystal but the thickness of the metal electrodes is restricted depending on a spacing between a pair of electrode substrates. Specifically, if the spacing between the electrode substrates is 1.1 µm, the metal electrodes cannot have a thickness of above 550 nm and, in an actual liquid crystal panel, have a considerably small thickness because it is necessary to form, e.g., an insulating layer on the metal electrodes. (ii) Even in case where such metal electrodes are formed, similarly as in the liquid crystal panel shown in Figure 1A, it is necessary to coat the metal electrodes and the transparent electrode with an alignment control film 9 and to align liquid crystal molecules at a certain order by the alignment control film 9 at the same time. However, in this case, the alignment control film 9 has an unevenness resulting from the metal electrodes and has a large unevenness when thick metal electrodes are used, thus resulting in an optical difference between recesses (pits) and projections to lower display qualities of the liquid crystal panel. Further, the liquid crystal panel is liable to cause a change in responsiveness of the liquid crystal to an applied electric field between at the recesses and projections, thus resulting in an occurrence of crosstalk. Moreover, due to the unevenness of the alignment control film 9 resulting from the metal electrodes, it becomes difficult to uniformly effect a rubbing treatment of the alignment control film 9, thus likewise resulting in the optical difference and the occurrence of crosstalk. These problems are more noticeable in a liquid-crystal panel having a small pixel size for providing a high resolution. Accordingly, in order to remedy such problems, it is necessary to provide the metal electrodes with a thickness of at most a prescribed value (actually at most 250 nm). In view of the above factors (i) and (ii), there has been proposed a method for obviating the voltage waveform propagation delay wherein metal electrodes consisting of a low-resistive metal, such as Cr or Mo are formed on a back surface of the transparent electrodes 6 (facing to the glass substrate 1), not on the (front) surface of the transparent electrodes 6 (facing to the liquid crystal 3), as described in Japanese Laid-Open Patent Applications JP-A-6347810 and JP-A-2063019 (cf. U.S. Patent US-A-5212575). Figures 2A and 2B are schematic views of an embodiment of a structure of a liquid crystal panel employing such a method. Referring to Figures 2A and 2B, a liquid crystal panel P2 includes a pair of substantially oppositely disposed electrode substrates 10 each provided with a transparent or transmissive substrate (glass substrate) 11 on which a plurality of ca. 1 µm-thick metal electrodes (first electrodes) 12 in a stripe shape are disposed with a certain spacing. As specifically shown in Figure 2B, the spacing is filled with a ultraviolet light-curable resin (hereinafter referred to as "UV curing resin") 13S. Herein, with respect to the UV curing resin, the reference numeral 13S is used for describing a UV curing resin in a solid state after curing, a reference numeral 13L is used for describing it in a liquid state before curing, and a reference numeral 13 is used for describing the UV curing resin in case where a state thereof need not be particularly differentiated. The UV curing resin 13S (13 in Figure 2A) and the metal electrodes 12 together constitute one surface on which a plurality of transparent electrodes (second electrodes) 6 in a stripe shape are formed and further thereon, an insulating film 7 and an alignment control film 9 are successively formed to prepare an electrode substrate 10. The transparent electrodes 6 are disposed along the metal electrodes 12 so that they are in contact with associated metal electrodes, respectively. A pair of the electrode substrates 10 are applied to each other with a sealing agent 2 so as to leave a gap filled with a liquid crystal 3 as described above to prepare a liquid crystal panel P2. Hereinbelow, a process for producing the liquid crystal panel P2 will be specifically described with reference to Figures 3A - 3F. (First electrode-forming step) First of all, a thick metal layer 14 is formed on the surface of a glass substrate 11 by, e.g., a sputtering process (Figure 3A). The metal layer 14 is subjected to patterning through a photolithographic process to form a multiplicity of stripe-shaped metal electrodes (first electrodes) 12 to constitute a wiring substrate 15 having a wiring face 15a where the metal electrodes 12 are disposed (Figure 3B). The wiring face 15a of the wiring substrate 15 is subjected to a surface treatment with a silane coupling agent to ensure an adhesiveness between the glass substrate 11 and a UV curing resin 13 applied onto the glass substrate 11 in a subsequent step. (Resin-supplying step) An appropriate amount of a UV curing resin 13L (before curing) is added dropwise to a smooth surface of a mold glass (smooth plate member) 16. The wiring face 15a of the wiring substrate 15 is superposed on the surface (supplied with the UV curable resin 13L) of the mold glass 16 so as to sandwich therebetween the UV curing resin 13L to provide a pressure-receiving member (a member subjected to pressure application) 17 (Figure 3C). As a result, the UV curing resin 13L is filled in a spacing between the metal electrodes 12 at the wiring face 15a of the wiring substrate 15. (Resin-curing step) The pressure-receiving member 17 is pressed by a pressing machine (not shown). In such a state under pressure, the surface of the metal electrodes 12 and the UV curing resin 13L supplied to the spacing between the metal electrodes 12 are caused to come in contact with the smooth surface of the mold glass 16, so that the UV curing resin 13L (in a liquid state) and the metal electrodes having the spacing filled with the UV curing resin 13L together form a smooth surface. After the above pressure application (under 10 pressure application), the UV curing resin 13L is exposed to a ultraviolet (UV) light (or rays) L from the glass substrate 1 side by UV light irradiation providing a light energy hv, thus curing the UV curing resin 13L (Figure 3D). (Peeling step) Then, the pressure-receiving member 17 is taken out from the pressing machine and the mold glass 16 is removed by peeling with a peeling device (not shown) (Figure 3E). (Second electrode-forming step) A multiplicity of transparent electrodes (second electrodes) 6 are formed on the surface of the metal electrodes 12 so that respective transparent electrodes 6 are caused to come in contact with associated metal electrodes 12, respectively (Figure 3F). (Other steps) On the transparent electrodes 6, an insulating film 7 (not shown) and an alignment control film 9 (not shown) are successively formed to provide an electrode substrate 10. A pair of such electrode substrates 10 are applied to each other with a sealing agent 2 to form a blank cell having a certain cell gap, which is then filled with a liquid crystal 3 to prepare a liquid crystal panel P2. Incidentally, in the above process, the surface treatment with a silane coupling agent for enhancing an adhesiveness of the glass substrate 11 to the UV curable resin 13 is effected to the surface of the glass substrate 11 but is not effected to the surface of the mold glass 16 in view of peeling thereof, whereby an adhesiveness between the UV curing resin 13L and the mold glass 16 becomes smaller than an adhesiveness between the UV curing resin 13L and the glass substrate 11 but still leaves somewhat an adhesive power. On the other hand, the UV curing resin 13L generally has a shrink property at the time of curing by UV light irradiation. Accordingly, the UV curing resin 13 is partially peeled from the surface of the mold glass 16 due to the shrink property (i.e., a local adhesion of the UV curing resin 13 to the mold glass 16 is caused), so that the shrinkage of the UV curing resin 13 is partially promoted because there is no constraint thereon at the peeled portion, thus resulting in a sinkage 19 showing a remarkable unevenness in a ripple (wave) or wrinkle shape when viewed from the direction perpendicular to the metal electrode extension direction (hereinafter, referred to as "ripple-shaped sinkage") due to such a shrinkage. Figures 4A - 4C are schematic views for illustrating a sinkage phenomenon (an occurrence of a ripple-shaped sinkage 19). Referring to Figure 4A, the metal electrodes 12 and the UV curing resin 13L filling the spacing between the metal electrodes 12 are sandwiched between the glass substrate 11 and the mold glass 16, followed by application of a pressure F (as shown in Figure 4B) to show a state before curing the UV curing resin 13L. Then, the UV curing resin 13L is exposed to UV light L under no pressure application, thus changing in a shrinkage state 13S after curing of the UV curing resin 13L (Figure 4B). The shrunken UV curing resin 13S consequently has a ripple-shaped sinkage after the mold glass is removed by peeling operation (Figure 4C). Accordingly, in case where a liquid crystal panel is produced by using such a pair of electrode substrates 10, not only the surface of the transparent electrode 6 but also the surface of the alignment control film 9 are roughened or become uneven at least in an effective optical modulation region (e.g., a display region of a display device), thus resulting in a non-uniform alignment state of the liquid crystal 3 or causing a local cell gap decrease leading to an electric field concentration thereat. As a result, the liquid crystal panel is accompanied with problems of occurrences of an optical state, crosstalk and an irregularity in drive characteristics, thus resulting in a lowering in image qualities. The metal electrodes 12 as described above per se have a permissible unevenness (with respect to adjacent resin portions) of about at most 250 nm. However, in an effective optical modulation region, even the liquid crystal panel having an unevenness of at most 250 nm is accompanied with the above-mentioned problems because the effective optical modulation region which is not light-interrupted is directly adversely affected by such an unevenness although the metal electrode portion is light-interrupted. In the above-mentioned process described with reference to Figures 3A - 3F, it is necessary to remove the UV curing resin 13L from the surface of the metal electrodes 12 in order to ensure an electroconductive property between the metal electrodes 12 and associated transparent electrodes 6. However, the removal of the UV curing resin 13L becomes insufficient in many cases by only pressing the surface of the metal electrode 12 against the mold glass 16 as described above. If the UV curing resin 13L remains at the metal electrode surface, a contact resistance between the metal electrodes 12 and the transparent electrodes 6 becomes large, thus causing the propagation delay of a voltage waveform and a display failure at a high resolution level. SUMMARY OF THE INVENTION An object of the present invention is to provide an electrode substrate free from ripple-shaped sinkage of a UV curing resin and having a substantially smooth surface with respect to second electrodes in at least an effective optical modulation region and a process for producing the electrode substrate. Another object of the present invention is to provide an electrode substrate capable of suppressing irregularity in optical states and the occurrence of crosstalk when used in a liquid crystal device, and a process for producing the electrode substrate. Another object of the present invention is to provide an electrode substrate capable of reducing the propagation delay of a voltage waveform by providing a good contact state between first electrodes and second electrodes when used in a liquid crystal device, and a process for producing the electrode substrate. As embodied the present invention can provide a liquid crystal (panel) device having a large picture area and a high resolution. A further object of the present invention is to provide a liquid crystal device excellent in display qualities and a process for producing the liquid crystal device. The electrode substrate of the present invention has, in common with electrode substrates described in United States Patent US-A-5212575, the following features: a light transmissive substrate; a plurality of first electrodes, with respective spacings therebetween, disposed on said light transmissive substrate; a resin filling the respective spacings; and a plurality of second electrodes disposed so as to be in contact with the associated first electrodes, respectively; wherein said first electrodes have an average surface roughness d [nm], defined as the average value of the difference between the highest portions and lowest portions of said plurality of first electrodes. In accordance with the present invention this electrode substrate is characterised in that: the constraint : d ≤ 250 nm; and the further constraint: d ≥ α.h/1000, where 'h' [nm] is the thickness of said first electrodes and 'α' is the curing shrinkage ratio [%] of said resin, are satisfied. Preferably, the first electrodes may be metal electrodes and the second electrodes may be transparent electrodes, e.g. ITO (indium-tin oxide) electrodes. The first and second electrodes may be connected to a common signal device and thus supplied with an identical signal. The spacing between the first electrodes may be provided with a colour filter layer in addition to the resin. With regard to the last mentioned feature, it is acknowledged that the use of colour filters per se is already known. There is disclosed in European Patent Application EP-A-0448139 an electrode substrate in which the colour filters are arranged between electrodes and are coated with an UV cured resin - e.g. an acrylic polymer resin. According to the present invention, there is also provided a process for producing an electrode substrate, comprising the steps of: forming a plurality of first electrodes on a light-transmissive substrate with respective spacings between the first electrodes; filling a resin in the respective spacings, curing the filled resin; and forming a plurality of second electrodes on the first electrodes and the cured resin so as to be in contact with the associate first electrodes, respectively; wherein said first electrodes have an average surface roughness d [nm], defined as the average value of the difference between the highest portions and lowest portions of said plurality of first electrodes, characterised in that: the constraint : d ≤ 250 nm; the following further constraint: d ≥ α.h/1000, where 'h' [nm] is the thickness of said first electrodes and 'α' is the curing shrinkage ratio [%] of said resin, are satisfied. In the above process, in the resin curing step, the resin may preferably be cured after the first electrodes and the resin have been pressed with a smooth plate member. The resin curing step may preferably be performed by irradiating an ultraviolet (UV) curable resin with ultraviolet light. The process may preferably further comprise a step of forming a colour filter layer having a portion in each of the spacings, which step is performed between performing the step of forming the first electrodes and performing the step of filling with resin. The step of forming the first electrodes may preferably be performed through a sputtering process during which the temperature of the transmissive substrate is controlled so as to provide the first electrodes with an average surface roughness d satisfying the above relationship. These and other objects, features and advantages of the present invention will become more apparent upon a consideration of the following description of the preferred embodiments of the present invention taken in conjunction with the accompanying drawings wherein: Figure 1A is a schematic sectional view of an embodiment of a structure of a conventional liquid crystal panel and Figure 1B is a plan view for illustrating a shape of transparent electrodes used in the liquid crystal panel shown in Figure 1A. Figure 2A is a schematic sectional view of another embodiment of a structure of a conventional liquid crystal panel and Figure 2B is a partially enlarged sectional view of the liquid crystal panel of Figure 2A. Figures 3A - 3F are schematic sectional views for illustrating a conventional process for producing an electrode substrate. Figures 4A - 4C are schematic sectional views for illustrating a ripple-shaped sinkage of a UV curable resin occurring in a conventional electrode substrate. Figure 5A is a schematic sectional view of an embodiment of a structure of a liquid crystal panel according to the present invention using an electrode substrate and Figure 5B is a partially enlarged view of the electrode substrate shown in Figure 5A. Figures 6A - 6F are schematic sectional views for illustrating a process for producing an electrode plate according to the present invention. Figure 7 is a schematic sectional view of another embodiment of a structure of an electrode substrate according to the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinbelow, preferred embodiments of the present invention will be specifically described with reference to Figures 5 - 7. In the following embodiments, structural members identical to those shown in Figure 2 are indicated by the identical reference numerals, respectively and the above-described explanation therefor is omitted. First Embodiment A first embodiment of the present invention will be described with reference to Figures 5A and 5B and Figures 6A - 6F. Figure 5A is a schematic sectional view showing a cell structure of a liquid crystal panel P3 according to the present invention. Referring to Figure 5A (also Figure 5B), the liquid crystal panel P3 includes a pair of substantially oppositely disposed electrode substrates 20 each provided with a transparent or transmissive substrate (glass substrate) 11 on which a plurality of metal electrodes (first electrodes) 22 in a stripe shape are disposed with a certain spacing. As specifically shown in Figure 5B, the spacing is filled with a ultraviolet light-curable (curing) resin 13S. The UV curing resin 13S (13 in Figure 5A) and the metal electrodes 22 together constitute a substantially smooth one surface on which a plurality of transparent electrodes (second electrodes) 6 in a stripe shape are formed and further thereon, an insulating film 7 and an alignment control film 9 are successively formed to prepare an electrode substrate 20. The transparent electrodes 6 are disposed along the metal electrodes 22 so that they are in contact with associated metal electrodes, respectively. A pair of the electrode substrates 20 are applied to each other with a sealing agent 2 so as to leave a gap to be filled with a liquid crystal 3 as described above to prepare a liquid crystal panel P3. In this embodiments, the transparent electrodes comprised an ITO film and the glass substrate 11 had a size of 300x340 mm 2 . Further, as the UV curing resin 13, an acrylic monomer-based UV curable resin having a curing shrinkage ratio α of 10 % (manufactured by Nippon Kayaku K.K.) was used. The known UV curing resins generally exhibit a curing shrinkage ratio α of 6 - 10 % (for acrylic monomer-type) and of 2 - 5 % (for epoxy resin-type). The metal electrodes 22 were made of aluminium (Al) and had a thickness h of 2000 nm and an average surface roughness d of 20 nm. Accordingly, in this embodiment, α.h/1000 = 10x2000/1000 = 20 = d, thus satisfying the above-described relationship: d ≧ α·h/1000. In the present invention, the average surface roughness d may preferably be at most 200 nm in view of uniform cell gap. Then, a more specific production process of the liquid crystal panel P3 will be described with reference to Figures 6A to 6F. (First electrode-forming step) An aluminum (Al) layer 23 (thickness h = 2000 nm, average surface roughness d = 20 nm) was formed on a glass substrate 11 through a sputtering process (Figure 6A). The sputtering conditions were as follows. Sputtering apparatus: RF (radio-frequency) sputtering apparatus ("705", manufactured by Nichiden Anelva K.K.) Substrate temperature Ts: 140 °C, Sputtering time t: 680 sec, Ar flow: 200 sccm, RF power density: 6 W/cm 2 . Herein, the average surface roughness d is determined based on values measured by using a surface roughness meter ("Alpha-Step 500", manufactured by TENCOR INSTRUMENTS Co.) in the following manner. With respect to a region having a reference length for measurement of 500 µm, a sample metal layer (Al layer in this embodiment) is subjected to measurement of height (or depth) by using the above surface roughness meter to determine a difference in height between the highest portion and the lowest portion of the sample metal layer, thus obtaining a surface roughness. In a similar manner, the measurement is performed with respect to other 8 regions, thus obtaining 9 surface roughnesses in total. An average surface roughness is determined as an average value of the 9 surface roughnesses measured above. The Al layer 23 was then subjected to etching with an etchant comprising a mixed acid through a photolithographic process to form a plurality of metal electrodes (first electrode) 22 in a stripe shape (e.g., width = 16 µm, pitch (spacing) = 90 µm) on the glass substrate 11, thus providing a wiring substrate 25 having a wiring face 25a where the metal electrodes 22 are disposed (Figure 6B). A 50 %-solution of an adhesiveness-reinforcing agent (silane coupling agent) ("A-174", mfd. by Nippon Unicar Company Ltd.) (not shown) in isopropyl alcohol was added dropwise onto the wiring face 25a by using a spin coating while rotating the wiring substrate 25 at 2000 rpm, followed by hot curing at 100 °C. (Resin-supplying step) Onto the wiring face 25a of the wiring substrate 25, a liquid UV curing resin 13L was added dropwise while causing the wiring face 25a and a mold glass 16 having a smooth or flat surface to slowly come into contact with each other so as not to draw air (or cause air bubble formation) therein and was left standing, thus sandwiching the UV curing resin 13L between the mold glass 16 and the wiring substrate 25 to provide a pressure-receiving member 27 (Figure 6C). In the pressure-receiving member 27, the UV curing resin 13L was filled in a spacing between the metal electrodes 22 and had a thickness identical to a thickness h of the metal electrodes 22. (Resin-curing step) The pressure-receiving member 27 was then pressed by a pressing machine (not shown) with a force F, whereby a certain pressure was exerted on the surfaces of the metal electrodes 22 and the supplied UV curing resin 13L via the smooth mold glass 16. As a result of such a pressure application via the mold glass 16, an excessive portion of the UV curing resin 13L was removed from at least projection portions (contact portions) of the surfaces of the metal electrodes 22. After the above pressure application was performed, the UV curing resin 13L was irradiated with a UV light L to effect curing thereof while causing shrinkage thereof under no pressure application (Figure 6D). In this step, the above pressure application may be effected at the time of UV light irradiation and the curing thereof. (Peeling step) After the curing step of the UV curing resin 13 is completed, the mold glass 16 was removed by peeling (Figure 6E). (Second electrode-forming step) A multiplicity (plurality) of transparent electrodes (second electrodes) 6 were formed on the surface of the metal electrodes 22 so that respective transparent electrodes 6 were caused to come in contact with associated metal electrodes 22, respectively (Figure 6F). (Other steps) On the transparent electrodes 6, an insulating film 7 (not shown) and an alignment control film 9 (not shown) were successively formed to provide an electrode substrate 20 (Figure 6E). A pair of such electrode substrates 20 were applied to each other with a sealing agent 2 to form a blank cell having a certain cell gap, which was then filled with a liquid crystal 3 to prepare a liquid crystal panel P3. According to this embodiment, in the resin-curing step, the UV curing resin 13 to be cured and shrunken was not partially peeled from the mold glass 16 and was uniformly sunk by curing to suppress an occurrence of a ripple-shaped sinkage, so that the resultant (cured) UV curing resin 13S providing an effective optical modulation region was allowed to have a substantially smooth (flat) surface and the upper layers formed thereon (e.g., the transparent electrodes 6 and the alignment control layer 9) also had a substantially smooth surface, respectively. Consequently, the resultant liquid crystal panel P3 provides advantageous effects including a uniform alignment state of the liquid crystal 3; freedom from an uneven optical state, an occurrence of crosstalk and an irregularity in drive characteristics; and good image qualities, in the effective optical modulation region. Incidentally, as shown in Figures 5B and 6F, the metal electrodes 22 have a certain unvenness due to its surface roughness (d = 20 nm) but the unevenness does not adversely affect resultant image qualities since the metal electrode portion is not subjected to display (or image formation), i.e., the metal electrodes 22 do not transmit light. In this embodiment, the metal electrodes 22 have the surface roughness d of 20 nm, so that at least a projection portion of the metal electrode surface is not covered with the UV curing resin 13L even when the resin 13L is not completely removed from the surface portion of the metal electrodes 22 by pressure application with the mold glass 16. As a result, a contact state of the metal electrodes 22 with the associated transparent electrodes 6 is uniformly ensured over the entire surface of the electrode substrate 20 by the projection portion, thus allowing a lowering in resistance of the transparent electrodes 6 and the associated metal electrodes 22. Specifically, when a resistance per length of 60 mm of the transparent electrodes 6 and the associated metal electrodes was measured, a uniform and low resistance of 50 ohm was attained over the entire region of the electrode substrate 20. By using such a low-resistance electrode substrate 20 in the liquid crystal panel P3, it is possible to solve a problem of the voltage waveform propagation delay during the drive of the liquid crystal panel P3 and to obviate problems of the uneven optical state and crosstalk, thus resulting in the liquid crystal panel P3 of a large picture area and a high resolution. Further, in this embodiment, it is not necessary to provide the transparent electrodes 6 with a large thickness in order to remedy the problem of the voltage waveform propagation delay, so that the resultant liquid crystal panel P3 is improved in display quality because the transparent electrodes 6 are not lowered in transmittance, thus being not visually recognized. In addition, a film forming time of the transparent electrodes 6 is shortened and an adhesiveness of the transparent electrodes 6 to, e.g., the metal electrodes 22 is also ensured. According to this embodiment, the metal electrodes 22 are formed under the transparent electrodes 6 (i.e., formed on the glass substrate side, not on the liquid crystal side) in contrast with those of the conventional liquid crystal panels and provide a substantially smooth face together with the UV curing resin 13 despite the unevenness resulting from the surface roughness d of the metal electrodes 22 and shrinkage of the UV curing resin 13. Consequently, even if the metal electrodes 22 are made thick, the resultant alignment control film 9 has little surface unevenness. Such thick metal electrodes 22 are further effective in suppressing an occurrence of the propagation delay of a voltage waveform, and the substantially smooth surface of the alignment control film 9 is effective in preventing occurrences of the difference in optical state and crosstalk as in the case of the conventional liquid crystal panels and also effective in allowing uniform rubbing to provide a uniform alignment state of liquid crystal molecules. Second Embodiment In this embodiment, a liquid crystal panel including a colour filter layer comprising colour filter segments of red (R), green (G) and blue (B) was prepared in the same manner as in First Embodiment except that a colour filter-forming step was effected between a first electrode-forming step and a resin-supplying step. More specifically, Figure 7 shows a schematic sectional view of an electrode substrate 30 used for the above liquid crystal panel. Referring to Figure 7, the electrode substrate 30 has a similar structure as in that of the First Embodiment except for closely disposing a colour filter layer 31 comprising colour filter segments of R, G and B between a glass substrate 11 and a UV curing resin 13 and so as to fill a spacing between a plurality of metal electrodes 22. Other structural members, such as the plurality of transparent electrodes 6, the insulating film (not shown) and the alignment control film (not shown) are identical to those used in the First Embodiment. The electrode substrate 30 was produced through the steps of a first electrode-forming step, a color-filter forming step, a resin-supplying step, a resin-curing step, a peeling step, a second electrode-forming step and other steps, respectively, in a similar manner as in the First Embodiment except for the colour filter-forming step. In the colour filter-forming step, a solution (dispersion) of a pigment (pigment particles) in a photosensitive resin was applied onto the surface of the glass substrate (i.e., at a spacing between the metal electrodes 22) by using a roll coater, followed by selective exposure to light for development and a subsequent etching to form the colour filter layer 31. Further, in the resin-supply step, a recess portion formed by the metal electrodes 22 and the colour filter layer 31 was filled with a UV curing resin 13L. According to this embodiment, similar advantageous effects as described in the First Embodiment can also be attained. In addition, the liquid crystal panel prepared in this embodiment is excellent in color display qualities. Incidentally, in the above-described embodiments (First and Second Embodiments) of the present invention, the sputtering process is used as a method for forming a metal layer having a prescribed average surface roughness. In the present invention, however, other processes including those using resistance heating and electron beam may also be adopted. In the present invention, the sputtering process may be performed by appropriately setting a sputtering temperature of 80 - 300 °C, preferably 100 - 250 °C (140 °C in the above two embodiments), in view of the desired surface roughness of resultant metal electrodes. Further, the metal layer for forming the plurality of metal electrodes may have a multi-layer structure consisting of at least two layers wherein the top layer is selectively subjected to etching. In order to evaluate the effect of preventing the occurrence of ripple-shaped sinkage of the UV curing resin (curing shrinkage ratio α = 10 %), various metal electrodes having different average surface roughness d and different thicknesses h shown in Table 1 shown below were formed by using associated sputtering conditions shown in Table 2 shown below, respectively. By using the thus-prepared metal electrodes, a surface state of each of their associated UV curing resins after curing was observed to evaluate a degree of the ripple-shaped sinkage according to the following standards. o: No ripple-shaped sinkage was observed. x: At least one clear ripple-shaped sinkage was observed. In this case, the observation was performed with respect to the entire effective optical modulation region by using a defect-testing apparatus (available from Admon Science Co.) wherein an enlarged image portion (50 - 200 magnifications) was subjected to image processing with a charge coupled device (CCD) image sensor to detect a ripple-shaped sinkage portion, as a shade portion, having a depth (height) of at least 50 nm based on a reference image portion free from a ripple-shaded sinkage. The ripple-shaped portion (shade portion) includes at least one (generally plural) elongated recess portion(s) extending in the widthwise direction of the metal electrodes. Surface roughness d (nm) Thickness h of metal electrode 500 (nm) 1000 (nm) 2000 (nm) 2.5 x x x 5 o x x 10 o o x 20 o o o 30 o o o 40 o o o 50 o o o Surface roughness d (nm) Thickness h of metal electrode 500 (nm) (Ts/t) 1000 (nm) (Ts/t) 2000 (nm) (Ts/t) 2.5 50/170 50/340 50/680 5 80/170 80/340 80/680 10 110/170 110/340 110/680 20 140/170 140/340 140/680 30 160/170 160/340 160/680 40 180/170 180/340 180/680 50 200/170 200/340 200/680 As described hereinabove, according to the process for producing the electrode substrate of the present invention, a UV curing resin having a curing shrinkage ratio α (%) is filled in a spacing between plural first (metal) electrodes having an average surface roughness d (nm) in an amount corresponding to that providing a thickness h (nm) of the first electrodes and pressed together with the first electrodes via a smooth plate member, followed by curing under no pressure application. At this time, by setting the above-mentioned three factors, α, d and h so as to satisfying the following relationship of: d ≧ α·h/1000, a partial peeling of the UV curing resin due to shrinkage by curing is not caused, thus suppressing the occurrence of a ripple-shaped sinkage. As a result, the surface of plural second (transparent) electrodes in an effective optical modulation region becomes substantially smooth. Accordingly, in case where such an electrode substrate is used in a liquid crystal device, an alignment state of a liquid crystal becomes uniform and good image qualities can be obtained without causing an uneven . optical state and a crosstalk phenomenon. The surface roughness d (nm) of the first electrodes is set to have a prescribed value or above (i.e., satisfying d ≧ α.h/1000), whereby a projection portion of the first electrode surface is projected from at least the UV curing resin surface toward the second electrodes even if the UV curing resin is not completely removed from the first electrode surface by pressure application with the smooth plate member as described above. As a result, the first electrodes and the associated second electrodes are respectively caused to come in contact with each other uniformly over the entire electrode substrate surface. In case where the electrode substrate is used in a liquid crystal device, it becomes possible to solve the problem of voltage waveform propagation delay during the drive of the device and also to obviate an occurrence of crosstalk and an irregularity in optical state, thus providing a liquid crystal device with a large picture area and a high resolution or definition. Further, in the case of using low-resistive metal electrodes as the first electrodes of an electrode substrate, a resistance of the first electrodes and the second electrodes is lowered as a whole to remedy the problem of propagation delay of a prescribed voltage waveform applied to these (first and second) electrodes. Accordingly, when such an electrode substrate is used for producing a liquid crystal device, an uneven optical state and an occurrence of crosstalk can be suppressed to realize a liquid crystal device of a large picture area and a high definition. In addition, by using the low-resistive metal electrodes as the first electrodes of an electrode substrate, it is unnecessary to provide high-resistive second electrode with a large thickness. Accordingly, when the electrode substrate is used as an element of a transmission-type liquid crystal display device, a problem such that the second electrodes are visually recognized due to a lowering in transmittance thereof cannot be caused, thus enhancing display qualities of the display device together with improvements in a film-forming time of the second electrodes and in an adhesiveness of the second electrodes to the corresponding first electrodes, respectively. According to the present invention, the first electrodes and the UV curing resin together form a substantially smooth surface by forming the first electrodes on the substrate while leaving a spacing and filling the UV curing resin in the spacing, whereby a remarkable unevenness is not generated on the second electrode surface even if the thickness of the first electrode is made large in order to lower a resistance of the first and second electrodes as a whole. The thick first electrodes are effective in solving the problem of voltage waveform propagation delay. Further, in case where the resultant electrode substrate is used in a liquid crystal device, there is no concern about a difference in optical state and an occurrence of crosstalk and a liquid crystal alignment state can be made uniform. The above-described effects can also be brought about by using plural second electrodes consisting of transparent electrodes, e.g., ITO electrodes. According to the liquid crystal device and the production process thereof of the present invention using the above-described electrode substrate, it is possible to realize a practically advantageous liquid crystal device exhibiting excellent performances, such as a uniform alignment state of liquid crystal molecules, prevention of an occurrence of a local electric field concentration, a good optical state, freedom of crosstalk and uneven drive characteristics, and good image qualities based on the fulfillment of the above-mentioned relationship: d ≧ α·h/1000.

Claims: An electrode substrate (20;30) comprising: a light transmissive substrate (11); a plurality of first electrodes (22), with respective spacings therebetween, disposed on said light transmissive substrate; a cured resin (13S) filling the respective spacings; and a plurality of second electrodes (6) disposed so as to be in contact with the associated first electrodes (22), respectively; wherein said first electrodes (22) have an average surface roughness d in nm, defined as the average value of the difference between the highest portions and lowest portions of said plurality of first electrodes (22); characterised in that : the constraint : d ≤ 250 nm, and the further constraint: d ≥ α.h/1000, where 'h' in nm is the thickness of said first electrodes (22) and 'α' is the curing shrinkage ratio in % of said resin (13), are satisfied. A substrate according to claim 1, wherein the first electrodes (22) are metal electrodes. A substrate according to either preceding claim, wherein the first electrodes (22) and the second electrodes (6) are connected to a common signal source. A substrate according to any preceding claim, wherein said second electrodes (6) are transparent electrodes. A substrate according to claim 4, wherein said second electrodes (6) are comprised of indium-tin oxide. A substrate according to any preceding claim, wherein the resin (13;S) comprises an ultraviolet cured resin. A substrate according to any preceding claim having an insulating film (7) on said plurality of second electrodes (6). A substrate according to claim 7 having an alignment control film (9) on said insulating film (7). A substrate according to any preceding claim, which further comprises a colour filter layer (31: R,G,B) partially filling the respective spacings. A process of producing an electrode substrate (20,30), comprising the steps of: forming a plurality of first electrodes (22) on a light-transmissive substrate (11) with respective spacings between the first electrodes; filling a resin (13L) in the respective spacings, curing the filled resin; and forming a plurality of second electrodes (6) on the first electrodes (22) and the cured resin (13S) so as to be in contact with the associate first electrodes (22), respectively; wherein said first electrodes (22) have an average surface roughness d in nm, defined as the average value of the difference between the highest portions and lowest portions of said plurality of first electrodes (22); characterised in that : the constraint : d ≤ 250 nm; and the further constraint: d ≥ α.h/1000 , where 'h' in nm is the thickness of said first electrodes (22) and 'α' is the curing shrinkage ratio in % of said resin (13), are satisfied. A process according to claim 10, wherein in the step of curing the resin (13L), the resin is cured after the first electrodes (22) and the resin (13L) have been pressed with a smooth plate member (16). A process according to either of claims 10 and 11, wherein the curing step of the resin (13G) is performed by irradiating the resin (13L) with ultraviolet light. A process according to any of claims 10-12, wherein the step of forming the first electrodes (22) is performed by a sputtering process which is conducted while controlling the temperature of the transmissive substrate (11) so as to provide the first electrodes (22) with said average surface roughness d satisfying the above constraints. A process according to any of claims 10-13 including a step of forming an insulating film (7) on said plurality of second electrodes (6). A process according to claim 14 including a step of forming an alignment control film (9) on said insulating film (7). A process according to any of claims 10-15, further comprising a step of forming a colour filter layer (31) partially filling the respective spacings between the step of forming the first electrodes (22) and the step of filling with said resin (13L). A liquid crystal device (P3), comprising: a pair of electrode substrates (20,20; 20,30) and a liquid crystal (3) disposed between the electrode substrates, wherein each of the pair of electrode substrates is an electrode substrate according to any of claims 1-8. A liquid crystal device (P3) according to claim 17 wherein one of said pair of electrode substrates (20;30) is an electrode substrate (30) according to claim 9. A liquid crystal device according to either of claims 17 or 18, wherein the liquid crystal (3) is a chiral smectic liquid crystal. A liquid crystal device according to any of claims 17-19, wherein the liquid crystal (3) is a ferroelectric liquid crystal. A process of producing a liquid crystal device (P3) comprising steps of: producing first and second electrode substrates (20,20; 20;30) each by a process according to any of claims 10-15; sealing said first and second electrode substrates (20,20; 20,30) together with the respective pluralities of second electrodes (6) arranged spaced apart and facing each other, by means of a sealing member (2); and filling the space between said first and second electrode substrates (20,20; 20,30) with a liquid crystal (3). A process according to claim 21 wherein one (30) of said first and second electrode substrates (20,30) is produced by a process according to claim 16.

Inventors: KAMIO MASARU, MATSUO YUJI, TOKUNAGA HIROYUKI, TOMONO HARUO, KAMIO, MASARU, MATSUO, YUJI, TOKUNAGA, HIROYUKI, TOMONO, HARUO, KAMIO, MASARU, C/O CANON K.K., MATSUO, YUJI, C/O CANON K.K., TOKUNAGA, HIROYUKI, C/O CANON K.K., TOMONO, HARUO, C/O CANON K.K.
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1997
Main classification: G02F1
IPC codes: G02F1