Method for measuring nitrogen oxide

Abstract: A method for measuring nitrogen oxide (NOx) in a gas by decomposing NOx in the gas and measuring an amount of oxygen generated by the decomposition includes: introducing the gas to a first inner space (2) via a first diffusion resistance (1) connected with an external space, setting the oxygen partial pressure in the first inner space to a predetermined low value at which NO is not decomposed substantially by a main pump means (60), introducing the controlled atmosphere of the first inner space into a second inner space (9) connected with the first inner space via a second diffusion resistance (8), and measuring an electric signal corresponding to the quantity of oxygen generated by decomposition or reduction of NOx contained in the atmosphere. A first oxygen concentration detecting means (12) for detecting the oxygen partial pressure is disposed in the second inner space, and the control voltage applied to the main pump means is adjusted on the basis of the output of the first oxygen concentration detecting means. This has the advantage that the system is much less sensitive to interferrents such as oxygen and steam.

Description: Background of the Invention and Related Art Statement The present invention relates to a method and a sensor for measuring nitrogen oxide. Particularly, the present invention provides a method for measuring a very small amount of nitrogen oxide in a gas containing a great amount of interfering gas with high precision. As a method for obtaining NOx amount in a gas to be measured by measuring an amount of oxygen generated by decomposing NOx in the gas, for example, a method is disclosed in EP-A-678740. Fig. 11 of the present application is a modified version of a sensor of EP-A-678740, shown here for comparison with the present invention. In Fig. 11, 80 is a NOx sensor having a main pump means 60 and an electric signal conversion means 70. The main pump means 60 includes an electrochemical pump cell 6 comprising a substrate 3 comprising an oxygen ion conductive solid electrolyte and an inner pump electrode 5 and an outer pump electrode 4 formed on the inner surface and outer surface of the substrate, respectively. The main pump means 60 treats oxygen contained in the measuring gas introduced from an external space by pumping processing on the basis of a control voltage applied between the inner pump electrode 5 and the outer pump electrode 4 by a power source 7. The electric signal conversion means 70 includes a pair of detection electrodes 11 and 14 formed on the side where the measuring gas that was treated by pumping processing by the main pump means is introduced. The electric signal conversion means 70 generates an electric signal corresponding to the quantity of oxygen generated by decomposition or reduction of NOx contained in the measuring gas after treated by the pumping processing by the main pump means 60. There has been used the NOx sensor 80 for measuring an amount of nitrogen oxide in a gas by introducing the gas to a first inner space 2 connected with the external space by means of a first diffusion resistance 1, controlling an oxygen partial pressure in an atmosphere in the first inner space 2 to be a predetermined low value at which NO is not decomposed substantially by the main pump means 60, introducing a controlled atmosphere of the first inner space 2 into a second inner space 9 connected with the first inner space 2 by means of a second diffusion resistance 8, and converting the atmosphere into an electric signal corresponding to the quantity of oxygen generated by decomposition or reduction of NOx contained in the atmosphere by the electric signal conversion means 70. Incidentally, in Fig. 11, a potential difference detection means 40 measures an electromotive force V1 corresponding to a difference in oxygen partial pressure between an electrode 10 exposed in the first inner space 2 and an electrode 11 exposed in a space 15 where a standard gas is present. A voltage applied to the main pump means 60 is adjusted so that the electromotive force V1 is controlled to have a predetermined value. However, it is difficult by this method to completely remove an influence of an interfering gas, for example, oxygen gas, carbonic acid gas (CO 2 ), steam, or the like, in an exhaust gas of an internal engine. Because of a difference between a gas concentration in the side facing the first inner space 2 of an inner pump electrode 5 of the electrochemical pump cell 6 and that in the side of the outer pump electrode 4 , a disorder of an atmosphere in the first inner space 2 by pulsation of a gas to be measured, an error caused by decomposition of water, a change of electrode activity or diffusivity of each gas component with a change of a temperature of a sensor element, a change of standing of electrodes and electrolyte, a discordance between an average value of an electrode potential of the electrochemical pump cell 6 and an average of a gas concentration, etc., it was difficult to maintain an oxygen partial pressure of a gas introduced into the second inner space 9 to be a certain value. When NOx in a gas having a high oxygen partial pressure is measured, an oxygen partial pressure of a gas introduced into the second inner space 9 is changed to be higher. According to the change, a base line of an electric signal (a pump current value Ip in Fig. 13) by an electric signal conversion means 70 corresponding to NOx amount is also changed. Particularly, it causes a large error when a very small amount of NOx is measured. On the contrary, when a steam amount of a gas to be measured increases, a hydrogen amount in the first inner space 2 in an equilibrium condition, a balance between hydrogen and oxygen in the second inner space 9 is lost by the difference in diffusion coefficients, a part of oxygen generated by decomposition of NOx is consumed by combining with hydrogen, thereby causing an error in measuring NOx. EP-A-517366 shows measurement of NOx by means of a device in which gas to be measured is introduced into a first internal space in which oxygen partial pressure is adjusted by a pump cell which pumps oxygen into the measurement gas. The gas then passes through an oxidation catalyst in which CO, H 2 and hydrocarbons are oxidized completely. NO 2 and NO in the gas are subsequently sensed by a non-selective oxide of nitrogen sensor in a second internal space. It is suggested that an oxygen sensing cell may be employed to measure oxygen concentration in the second internal space, and the pumping current of the pump cell adjusted to keep the emf of the sensing cell constant. EP-A-127964 discloses an air-to-fuel ratio sensor having oxygen pump and concentration cells. An integrating operational amplifier circuit employs the emf (e) generated in the concentration cell to regulate the voltage applied across the pump cell so that e is constant. EP-A-351960 teaches that oxygen concentration detectors based on electrochemical pumping cells offer higher sensitivity and only weak temperature dependence in comparison to other types of oxygen sensors. Summary of the Invention The present invention solves the problems of a known measuring method and aims to provide a highly precise method for measuring an nitrogen oxide in a gas, the method being little influenced by concentration of oxygen or steam in the gas and showing little fluctuation on temperature change. According to the present invention, there is provided a method for measuring nitrogen oxide (NOx) in a gas as set out in claim 1. There is further provided a NOx sensor as set out in claim 8. In a sensor having the aforementioned structure, it is not necessary to keep the atmosphere of the first inner space constant, since atmosphere of the first inner space is controlled to keep constant the atmosphere at the vicinity of the inlet of the second inner space. Accordingly, a change of a composition of a gas to be measured is roughly dealt with by controlling the voltage of the main pump means by feedback control (a proportional control and/or a differential control) using the oxygen concentration detecting means arranged in the second (or third) inner space. This with a small variance for a relatively long period of time, the voltage applied to the main pump means is controlled using an output of a means for detecting an atmosphere for example in the vicinity of the inlet of the second inner space. The oxygen partial pressure of the second inner space is a value which relates to a substantially integrated value of the atmosphere of the first space for a predetermined period of time due to the diffusion resistance of the entrance of the second inner space and a capacity of the second inner space. When an integrated value, for a longer period of time, is required, as in the invention, it is necessary to integrate the output of the oxygen concentration detecting means by an electric circuit. All influences of factors of various changes can be compensated by controlling an atmosphere in the vicinity of the inlet of the second inner space, which makes a very stable measurement with a high precision possible. Incidentally, the electric signal conversion means may be an electrochemical pump cell or an electrochemical sensor cell in the present invention. Brief Description of the Drawings Fig. 1 is an explanatory view showing an embodiment of the sensor of the present invention. Fig. 2 is an explanatory view showing another embodiment of the sensor of the present invention. Fig. 3 is an explanatory view of a principal part of one form of the embodiment shown in Fig. 2. Fig. 4 is an explanatory view showing yet another embodiment of the sensor of the present invention. Fig. 5 is an explanatory view showing yet another embodiment of the sensor of the present invention. Fig. 6 is a cross-sectional view and a circuit showing an embodiment of the sensor of the present invention. Fig. 7 is a graph showing a comparison of a change of pump current values of an electrochemical pump cell corresponding to an oxygen partial pressure in an exhaust gas by a method of the present invention and a conventional method. Fig. 8 is a graph showing a comparison of a change of pump current values of an electrochemical pump cell corresponding to an oxygen partial pressure in an exhaust gas by a method of the present invention and a conventional method. Fig. 9 is a graph showing a comparison of a change of pump current values of an electrochemical pump cell corresponding to a steam concentration in an exhaust gas by a method of the present invention and a conventional method. Fig. 10 is a graph showing a comparison of a change of electromotive force of an electrochemical sensor cell corresponding to an oxygen partial pressure in an exhaust gas by a method of the present invention and a conventional method. Fig. 11 is an explanatory view showing the constitution of a conventional sensor. Detailed Description of the Preferred Embodiments Embodiments of the method and a sensor of the present invention will now be described, by may of example. In Fig. 1, a gas containing a nitrogen oxide and oxygen which interferes the nitrogen oxide is introduced into a first inner space 2 through a first diffusion resistance 1. A main pump means 60 includes an electrochemical cell 6 having a first oxygen ion conductive solid electrolyte 3 such as zirconia and a pair of inner and outer pump electrodes 5 and 4, respectively. The inner electrode 5 of the electrochemical cell 6 is exposed in the first inner space 2. A control voltage is applied to the electrochemical cell 6 from a power source 7, thereby controlling an atmosphere in the first inner space 2 so as to contain little oxygen. Almost all oxygen (interfering component) is removed from a gas to be measured in such a manner. The gas is introduced into a second inner space 9 through a second diffusion resistance 8. An electrochemical pump cell 12 is an oxygen concentration detecting means having a second oxygen ion conductive solid electrolyte 19 such as zirconia and a pair of electrodes 10 and 11. The electrode 10 is exposed in the second inner space 9. The diffusion current of the electrochemical cell 12 is fed back to a power source 7 which applies the integrated output of the electrochemical cell 12 to the electrochemical pump cell 6 so that the value of the diffusion current of the electrochemical cell 12 coincides with a predetermined value. Accordingly, an oxygen partial pressure in the second inner space 9 is less influenced by a composition of a gas to be measured in comparison with the case in which the output is controlled only by signals in the first inner space 2. Thus obtained gas to be measured in the second inner space 9, for example, nitrogen monoxide, is decomposed as shown by the following formula by a catalytic action or a reducing action by electrification on a detection electrode 14 of the electrochemical pump cell 13 which is an electric signal conversion means 70, the detection electrode 14 being exposed in the second inner space 9. As a result, a generated oxygen is sent to a space 15 where a standard gas is present through the detection electrode 14 and a reference electrode 11. An amount of NOx is obtained by a value of a current generated by the transference of the oxygen. Formula 1: 2NO → N 2 + O 2 In Fig. 1, therefore, the oxygen partial pressure in the second inner space 9 is detected as a limited diffusion current by a predetermined voltage applied to the electrolyte portion between the electrode 10 and the electrode 11. The integrated output is fed back to the power source 7 which applies the output to the first electrochemical cell 6 so that as mentioned the value of the limited diffusion current coincides with a predetermined value. Fig. 2 shows a construction in which the second inner space is connected to the first inner space by means of a third inner space. A gas to be measured is introduced in the third inner space 17 through the third diffusion resistance 16. Almost all oxygen in the gas is removed from the gas here. The gas is introduced into the third inner space 17 through the third diffusion resistance 16. An atmosphere in the third inner space 17 is controlled to be close to a predetermined atmosphere by an electrochemical cell 52 which is an oxygen concentration detecting means. Simultaneously, the integrated output is fed back to a power source 7 which applies a control voltage to the electrochemical pump cell 6 so that an oxygen content in the third inner space 17 is controlled more precisely. Thus, an oxygen partial pressure of the gas to be measured is precisely controlled. The gas enters the second inner space 9 through the second diffusion resistance 8. Oxygen is generated by a catalytic action or a reducing action by electrification on a detection electrode 14 of the electrochemical pump cell 13 which is an electric signal conversion means 70, the detection electrode 14 being exposed in the second inner space 9. As a result, the oxygen is sent to a space 15 where a standard gas is present through the detection electrode 14 and a reference electrode 11. An amount of NOx is obtained by a value of a current generated by transference of the oxygen. Fig. 3 is an embodiment of the constitution shown in Fig. 2. The first diffusion resistance 1, the first inner space 2, the third diffusion resistance 16, the third inner space 17, the second diffusion resistance 8, and the second inner space 9 are arranged in a line as a flat and narrow opening. Since the constitution enables the inner spaces formed in a sensor to have a small capacity, the constitution can give a high response speed. Incidentally, a space 15 where a standard gas is present is filled with a porous ceramics, and a strength of a sensor element is improved there. A heater 18 is embedded in the sensor element, and the sensor element is heated at a predetermined temperature. Fig. 4 shows an embodiment in which the electrochemical pump cell 13 of a constitution shown in Fig. 1 is substituted by an electrochemical sensor cell 55 as an electric signal conversion means 70. The other parts are the same as in Fig. 1. Accordingly, when a sensor having a structure shown in Fig. 4 is used, a gas to be measured in a second inner space 9 is generated by a catalytic action on a detection electrode 14 of the electrochemical sensor cell 55 which is an electric signal conversion means 70, the detection electrode 14 being exposed in the second inner space 9. As a result, an amount of NOx is obtained from an electromotive force generated between a detection electrode 14 and a reference electrode 11. Fig. 5 shows an embodiment in which a porous protective layer 57 was disposed on a detection electrode 14 in a constitution shown in Fig. 1. In this embodiment, a second inner space 9 and a second diffusion resistance 8 are formed with using a porous body. The other parts are the same as in Fig. 1. In such a sensor element, the second inner space 9 and the second diffusion resistance 8 may be unitarily formed with using a porous ceramic and disposed in a third inner space 17. Further, the second inner space 9 and the second diffusion resistance 8 may be substituted by adjustment of porosity (rate of pores, diameter of pores, etc.) of an electrode 14 of signal conversion means 70 which is exposed in a gas to be measured. Fig. 6 shows an embodiment of a measuring circuit of the present invention. A gas to be measured is introduced into a first inner space 2 through a first diffusion resistance 1. There, almost all oxygen in the gas is removed by an electrochemical pump cell 6 (main pump means 60). As a control voltage applied between an outer pump electrode 4 and an inner pump electrode 5 of the electrochemical pump cell 6, an output compared with a predetermined voltage of a power source 23 by a comparator 22 is used with an electromotive force between the inner pump electrode 5 and a reference electrode 11 being subjected to an impedance conversion by an amplifier 21. The gas to be measured obtains an oxygen partial pressure almost same as a predetermined one by this. The gas enters a second inner space 9 through a second diffusion resistance 8. A predetermined voltage is applied to a electrochemical cell 12 which is an oxygen concentration detection means disposed in the second inner space 9 from a power source 24. A pump current flowing at that time is detected by a resistance 25 and an amplifier 26, made to pass an integrating circuit of a resistance 27 and a condenser 28, and compared with a predetermined voltage of a power source 29 by a comparator 30. A voltage to be applied to the electrochemical pump cell 6 is adjusted by the output. An atmosphere in the second inner space 9 is stabilized by this. NOx is decomposed by an electrode 14 having a catalytic activity, and an amount of generated oxygen is detected as a pump current of an electrochemical pump cell 13. Incidentally, an oscillation of the aforementioned integrating circuit can be avoided by setting a time constant for an adequate value. The inner pump electrode 5 in the first inner space 2 and the electrode 10 in the second inner space 9 are preferably made of a material having a low catalytic activity to NOx, for example, Au or Au-Pt alloy. The electrode 14 which detects NOx is preferably made of a material having a high catalytic activity to NOx such as Rh. Examples In each of (a) the sensor and circuit shown in Fig. 6, in which a zirconia porcelain was used as a solid electrolyte, and (b) the comparative sensor and circuit shown in Fig. 11, an exhaust gas of a gasoline-combustion engine was measured for NOx amount therein. A change of pump current values of the electric signal conversion means 70 (electrochemical pump cell 13) according to a concentration of an interfering gas component in the exhaust gas was compared to each other. A voltage V1 between the inner pump electrode 5 and the reference electrode 11, a terminal voltage V2 at the electrochemical cell 12, and a terminal voltage V3 at the electrochemical pump cell 13 were adjusted as in Table 1. The results are shown in Figs. 7 - 9. Incidentally, Fig. 11 shows a sensor in which an oxygen partial pressure in the first inner space 2 is controlled only by a potential difference detection means 40. One of the electrodes of the potential difference detection means 40 is exposed in the first inner space 2. Example 1 (Fig. 7) Example 2 (Fig. 8) Example 3 (Fig. 9) V1 300 mV 300 mV 300 mV V2 400 mV 400 mV 400 mV V3 450 mV 430 mV 430 mV As Fig. 7 shows, when oxygen partial pressure increases in a gas to be measured, a pump current flowing in the electric signal conversion means (electrochemical pump cell) 70 was increased as a curved line B in a measuring method having the constitution shown in Fig. 11, thereby increasing error. On the other hand, a straight line A was obtained in a method of the present invention shown in Fig. 8, in which an oxygen partial pressure dispersed in the second inner space 9 is detected and negatively fed back to the electrochemical pump cell 6. Accordingly, a pump current flowing in the electric signal conversion means 70 (electrochemical pump cell 13) is not changed even if an oxygen partial pressure in a gas to be measured changes. Thus, measuring precision (a change of an offset current) is sharply improved. However, since there is a large difference between an electromotive force and an applied voltage V3 of the electric signal conversion means in this embodiment, an offset value of the pump current is not zero. In Fig. 8, when oxygen partial pressure increases in a gas to be measured in the construction shown in Fig. 11, a pump current flowing in the electric signal conversion means (electrochemical pump cell) 70 was increased as shown by a curved line D, thereby increasing an error. On the other hand, in the method of the present invention shown in Fig. 6, a pump current flowing in the electric signal conversion means 70 (electrochemical pump cell 13) is not changed as shown by a straight line C even if an oxygen partial pressure in a gas to be measured changes. Further, an electromotive force of the electric signal conversion means was equalized with an applied voltage V3 when an oxygen partial pressure in the gas to be measured was zero. As a result, an offset value of a pump current of the electric signal conversion means was zero at that time. As Fig. 9 shows, when steam concentration increases in a gas to be measured in the construction shown in Fig. 11, a pump current flowing in the electric signal conversion means (electrochemical pump cell) 70 was decreased as a curved line F, thereby increasing error. The reason seems to be that because a diffusion coefficient of hydrogen generated by dissociation of water in the first inner space 2 is larger than that of oxygen, hydrogen enters the second inner space 9 more than the oxygen. Accordingly, an equilibrium oxygen partial pressure in the second inner space is lowered, and a pump current required for maintaining a predetermined oxygen partial pressure in the second inner space 9 is decreased. On the other hand, in a method of the present invention shown in Fig. 6, since the electrochemical cell 12 plays a part of adjustment including a difference in diffusion coefficients based on a difference in kinds of gases or a temperature change in the second diffusion resistance 8, a pump current flowing in the electric signal conversion means 70 (electrochemical pump cell 13) gives as a straight line E and is not changed even if an oxygen partial pressure in a gas to be measured changes. Then, in the sensor and circuit shown in Fig. 6 (present invention), in which a zirconia porcelain was used as a solid electrolyte, and the case of the sensor and circuit shown in Fig. 11, an exhaust gas of a gasoline-combustion engine was measured for NOx amount therein in the same manner as described above. A change of electromotive force of the electric signal conversion means 70 (electrochemical sensor cell 55) according to a oxygen partial pressure in the exhaust gas was compared. Incidentally, in the sensor shown in Fig. 11, the electrochemical pump cell was substituted by an electrochemical sensor cell as the electric signal conversion means 70. Incidentally, in Fig. 6 (present invention), V1 and V2 were set to be 300 mV and 400 mV, respectively. In Fig. 11 V1 was set to be 300 mV. The results are shown in Fig. 10. As Fig. 10 shows, when an oxygen partial pressure increased in a gas to be measured in the construction shown in Fig. 11, an electromotive force in the electric signal conversion means (electrochemical sensor cell) 70 was decreased as shown by a curved line H, thereby increasing error. On the other hand, in the method of the present invention shown in Fig. 6, an electromotive force in the electric signal conversion means 70 (electrochemical sensor cell 55) is not changed as shown by a straight line G even if an oxygen partial pressure in a gas to be measured changes. Accordingly, NOx can be measured very precisely. As obvious from the above description, the present invention gives a very precise method for measuring NOx, having little influence of oxygen or steam concentration in a gas to be measured and little fluctuation due to temperature change, and is very useful as a means for improving an air environment, or the like.

Claims: A method of measuring nitrogen oxide (NOx) in gas by means of a sensor, comprising the steps of: introducing gas whose NOx concentration is to be measured from an exterior space into a first inner space (2) of said sensor through a first diffusion resistance (1) and controlling oxygen partial pressure in said first inner space to a level at which NO is not decomposed by means of a main electrochemical pump cell (6), a control voltage being applied to said main pump cell in order to effect oxygen pumping by said main pump cell, and passing gas from said first inner space (2) through a second diffusion resistance (8) into a second inner space (9) of said sensor, effecting decomposition or reduction of nitrogen oxide in the gas in said second inner space and measuring the amount of oxygen produced by said decomposition or reduction by means of electrical signal conversion means (13,55) which gives an electrical output corresponding to said amount of oxygen produced, characterised by: detecting oxygen concentration in gas which has passed through said first inner space (2) by means of a second electrochemical pump cell (12,52) which adjusts oxygen concentration of gas in one of (a) said second inner space (9), and (b) a third inner space (17) of said sensor arranged in series connection between said first and second inner spaces and connected to said first inner space (2) by a third diffusion resistance (16), and, adjusting said control voltage applied in said main pump cell (9) on the basis of an integral value of oxygen partial pressure detected by said second pump cell (12,52) for a predetermined period of time. A method according to claim 1, wherein said second pump cell (12) has an electrode (10) which contacts gas in said second inner space (9). A method according to claim 1, wherein said second inner space is at a surface of an electrode (14) of said electrical signal conversion means, which electrode is covered by a porous protective layer (57) constituting said second diffusion resistance, said second pump cell (12) having an electrode (10) in said third space which is adjacent said porous protective layer (57). A method according to claim 1, wherein the sensor has said third space (17) and said second pump cell (52) has an electrode (50) which contacts gas in said third inner space (17). A method according to claim 4, wherein said first, second and third inner spaces (2,9,17) and said first, second and third diffusion resistances (1,8,16) are provided by a flat and narrow slot in said sensor. A method according to any one of claims 1 to 5 wherein said electric signal conversion means is an electrochemical pumping cell, and the determination of NOx is carried out on the basis of a current for pumping of said electrochemical pumping cell. A method according to any one of claims 1 to 5, wherein said electric signal conversion means is an electrochemical sensing cell, and the determination of NOx is carried out on the basis of an EMF thereof. A NOx sensor for measuring nitrogen oxide (NOx) in gas, having a first inner space (2) and a first diffusion resistance (1) for introducing gas to be measured from outside the sensor to said first inner space (2), a main electrochemical pump cell (6) for controlling oxygen partial pressure in said first inner space, means for applying a control voltage to said main electrochemical pump cell (6) in order to effect oxygen pumping thereby, a second inner space (9) connected to said first inner space via a second diffusion resistance (8), and electrical signal conversion means (13, 55) for effecting decomposition or reduction of nitrogen oxide in said second inner space and measuring the amount of oxygen produced by the decomposition or reduction by producing an electrical output corresponding to the amount of oxygen produced, characterised by: a second electrochemical pump cell (12, 52) arranged for adjusting oxygen concentration in gas which has passed through said first inner space in one of (a) said second inner space (9), and (b) a third inner space (17) of said sensor arranged in series connection between said first and second inner spaces and connected to said first inner space by a third diffusion resistance (16), means for applying electrical power to effect pumping of oxygen by said second electrochemical pump cell and for obtaining thereby an electrical measurement output dependent on the oxygen concentration at an electrode (10, 40, 50) thereof, and means for adjusting said control voltage applied to said main electrochemical pump cell (6) on the basis of an integral value of oxygen partial pressure detected by said second electrochemical pump cell (12,52) for a predetermined period of time. A sensor according to claim 8, wherein said second electrochemical pump cell is arranged to adjust oxygen concentration of gas in second inner space (9). A sensor according to claim 8, wherein a porous protective layer (57) is disposed on an electrode (14) of said electrical signal conversion means to constitute said second diffusion resistance, thereby forming said second inner space at the surface of said electrode (14), and said second electrochemical pump cell is arranged to adjust oxygen concentration of gas in said second inner space adjacent said protective layer (57). A sensor according to claim 8, wherein said third inner space (17) is provided, and said second electrochemical pump cell contacts gas in said third inner space (17). A sensor according to claim 11, wherein said first, second and third inner spaces (2, 9, 17) and said first, second and third diffusion resistances (1, 8, 16) are provided by a flat and narrow slot in said sensor..

Inventors: INA NORIYUKI, KATO NOBUHIDE, INA, NORIYUKI, KATO, NOBUHIDE
Applicants: NGK INSULATORS LTD, NGK INSULATORS, LTD.
Application year: 1997
Main classification: G01N27
IPC codes: G01N27