CONNECTING STRUCTURE AND METHOD FOR CONNECTING A SEMICONDUCTOR DEVICE ONTO A SUBSTRATE

Abstract: A semiconductor device connecting structure for connecting a semiconductor lC (7) onto a substrate (13). A bonding layer (31) is placed between the substrate (13) and the semiconductor lC (7) to accomplish adhesion therein. This bonding layer includes an ACF (32) as a bonding material for joining said semiconductor lC (7) to said substrate (13) and a space (33) formed within the ACF (32). Even if the lC (7) deforms due to heat or the like, the deformation is absorbed by the space (33), whereupon the connecting conditions of bumps (28, 29) can not be unstable.

Description: [TECHNICAL FIELD] The present invention relates to a semiconductor device connecting structure and a method for connecting a semiconductor device onto a substrate (or board). [BACKGROUND ART] In recent years, liquid crystal display units for displaying visible information have come into widespread use for electronic equipment such as navigation systems, televisions, palm-top computers, electronic organizers and portable telephones. In general, these liquid crystal display units are constructed such that a liquid crystal driving lC, i.e., a semiconductor device, is connected to a liquid crystal panel and incidental parts such as a back light and a casing are mounted on the liquid crystal panel. This liquid crystal panel is commonly made in a manner that a liquid crystal is put in between at least two substrates, and a polarizing plate, a color filter and others are mounted when necessary. Many ways of connecting the liquid crystal driving lC to the liquid crystal panel have been considered, for example, connecting methods based upon a COB (Chip On Board) method, a COG (Chip On Glass) method or the like. According to the COB method, the liquid crystal driving lC is joined through the use of an ACF (Anisotropic Conductive Film) or other joining materials to an insulating substrate having a wiring pattern thereon, and that insulating substrate is connected through a heat seal or the like to the liquid crystal panel. On the other hand, according to the COG method, the liquid crystal driving lC is directly joined through the use of the ACF or the like to a glass substrate having electrode terminals. In both the COB method and the COG method, a semiconductor device such as the liquid crystal driving lC is disposed on and connected to the substrate such as the insulating substrate and the liquid crystal glass substrate. In the above-mentioned prior art connecting methods, the ACF or other joining materials are uniformly and continuously provided between the substrate and the liquid crystal driving lC without leaving any cavity or empty space between them. For this reason, when the liquid crystal driving lC is joined thereto under pressure, the lC itself may warp, or when the liquid crystal driving lC and/or the substrate deform due to a change of temperature, excessive stress occurs at the bump portions of the liquid crystal driving lC in direct contact with the electrodes on the substrate. As a result, the condition of electrical connection can become unstable. In addition, for avoiding such problems, the pressure-joining conditions for the liquid crystal driving lC are required to be severely managed within a small tolerance. As a result, a complicated process management is demanded. Moreover, in the Japanese Unexamined Patent Publication No. 2-42738, there has been disclosed a connecting structure in which, in a COB based packaged printed-circuit board, a flexible bonding layer is placed as a cushioning material between an lC chip and a substrate to improve the reliability of the join in between. However, in the case of this prior connecting structure, it is required to provide the flexible bonding layer exclusively for the purpose of the cushioning action, which leads to higher component cost and manufacturing cost. A semiconductor device connecting structure according to the pre-characterizing portion of claim 1, and a method according to the pre-characterizing portion of claim 8 are known from EP-A-0 517 071. A similar prior art is disclosed in US-A-5,187,123. Both documents aim at avoiding bubbles or voids within the bonding layer. The documents IEEE Transactions on Components, Hybrids and Manufacturing Technology, Vol. 13, No.1, March 1990,pp. 229-234 and IEEE Transactions on Components, Hybrids and Manufacturing Technology, Vol, 16, No.8, December 1993, pp. 972-977 disclose anisotropically conductive polymer films for use as bonding layers. US 4,604,644 A discloses a solder interconnection for forming I/O connections between an integrated semiconductor device and a support substrate having a plurality of solder connections arranged in an area array joining a set of I/O's on a flat surface of the semiconductor device to a corresponding set of solder wettable pads on a substrate. A band of dielectric organic material is disposed between and bonded to the device and substrate embedding at least an outer row of solder connections leaving the center inner solder connections and the adjacent top and bottom surfaces free of dielectric material. The object of this invention is to maintain steadily the connecting condition of a semiconductor device to a substrate only by adding an extremely simple construction. [DESCRIPTION OF THE INVENTION] This object is achieved by a semiconductor device connecting structure as claimed in claim 1, and a method as claimed in claim 8. According to this connecting structure, the spaces are specially made in the bonding material when conducting the adhesion between the semiconductor device and the substrate, so that the spaces absorb a deformation of the semiconductor device and others, and change freely in shape in response to the deformation of the substrate or the semiconductor device. In consequence, even in the case of a deformation of the semiconductor device or the substrate, it is possible to prevent excessive loads from being applied to the electrode portions of the semiconductor device, so that the electrical connecting condition of the semiconductor device can be maintained steadily in good condition. The spaces are formed in the bonding material by pressurizing an IC with a pressurizing head and by heating at the same time as described below. When the temperature of the pressurizing head is given to the bonding material, the viscosity of the bonding material rapidly decreases to flow out to the external. In this way the spaces can be formed. Thus, by forming the spaces in the bonding material, it is possible to relieve the deformation of the semiconductor device or the substrate. In the structure described above, as the semiconductor device, an lC chip and an LSI chip can be considered. Further, in case of a liquid crystal display unit, a liquid crystal driving lC can be considered as the semiconductor device. As the substrate, an insulating substrate in the COB method, a transparent substrate in the COG method, and various substrates corresponding to other connecting methods can be considered. As the bonding material, an ACF (Anisotropic Conductive Film) is considered. The ACF is produced by dispersing conductive particles into a thermoplastic film or a thermosetting resin film, and is a bonding material showing conductivity in a single direction if used for thermocompression bonding. Using the ACF, the terminals on the substrate and the bumps of the semiconductor device are electrically coupled through the conductive particles to each other. Considering the liquid crystal driving lC as the semiconductor device to be used for a liquid crystal display unit, a plurality of bumps are arranged in rows on an active surface of the liquid crystal driving lC. Various ways can be considered for that in-row arrangement. For instance, as shown in Figs. 2 and 7, a pair of bump strings 28, 29 arranged in rows (two rows in the illustrations) in the longitudinal directions and a pair of bump strings 28, 28 arranged in rows (two rows in the illustrations) in the transverse directions are arranged in ring-shape. Further, as shown in Fig. 8, a pair of bump strings 28, 29 may be located only in the longitudinal directions or in the transverse directions. For the connection of the semiconductor device with the foregoing bump arrangement onto the substrate, as shown in Fig. 2, spaces 33 are formed in an adhesive (bonding material) within an area surrounded by the ring-shaped arrangement of bumps, or as shown in Fig. 7, spaces 33 are formed between the respective bumps 28, 29 or outside the bump strings. The spaces to be formed within the adhesive can be made by disposing a plurality of spaces with small volumes in mutually close conditions; each space extending through the entire thickness of the ACF. Preferably, the space ratio, i.e., the ratio of the spaces to the adhesive assumes a percentage value between 5% and 70%, more preferably between 10% and 30%. This is because, in the case that the space ratio is below 5%, it is impossible to absorb the deformation (or stress) of the semiconductor device or the substrate, On the contrary, when it assumes more than 70%, the reliability on the connection between the semiconductor device and the substrate (particularly, the terminals formed on the substrate) goes down. Accordingly, if the spaces are formed at the space ratio of 5% to 70%, a reliable connection can be obtained. More preferably, if the space ratio is set to between 10% and 30%, a structure with improved connection reliability can be formed. The bonding layer is made of an epoxy-based adhesive. Further, this bonding layer absorbs the deformation of the semiconductor device or the substrate. Furthermore, in accordance with the present invention, a feature of a connecting method of joining a semiconductor device onto a substrate is that a bonding layer is placed in between the substrate and the semiconductor device to join them to each other, and a pressurizing head heated up to a high temperature is pressed against the semiconductor device to pressurize and heat the mentioned bonding layer for joining the substrate to the semiconductor device, and spaces are formed in the mentioned bonding layer. With this construction, the deformation of the semiconductor device or the substrate can be reduced by the spaces, and a connecting structure with a higher reliability can be obtained. In addition, the bonding layer is made from an epoxy-based adhesive. A liquid crystal display unit with the above-described semiconductor device connecting structure is composed of a pair of substrates disposed opposite to each other with a liquid crystal interposed between the substrates. As mentioned above, it is preferable that the space ratio is set to reach 5% to 70%, more preferably 10% to 30%, so that the semiconductor device and the electrode terminals formed on the substrate can be connected with a high reliability. Moreover, concrete examples of an electronic apparatus using a liquid crystal display unit according to this invention are various kinds of equipment such as a navigation system, a television, a palm-top computer, an electronic organizer and a portable telephone. More specifically, one of the examples is an electronic apparatus with a plurality of output terminals for driving semiconductor devices, a liquid crystal display unit connected to these output terminals, and an input unit. The liquid crystal display unit includes a pair of substrates disposed opposite to each other with a liquid crystal interposed between the substrates. [BRIEF DESCRIPTION OF THE DRAWINGS] Fig. 1 is a cross-sectional view showing an embodiment of a semiconductor device connecting structure according to the present invention; Fig. 2 is a plan view showing a joining portion of a semiconductor device according to an arrow A in Fig. 1; Fig. 3 is a side elevational cross-sectional view showing an embodiment of a liquid crystal display unit according to this invention; Fig. 4 is an exploded perspective view of a liquid crystal display unit shown in the Fig. 3; Fig. 5 is a perspective view showing one example of elastic connectors for electrically connecting a liquid crystal display unit to another circuit inside of an electronic apparatus; Fig. 6 is an exploded perspective view showing a portable telephone which is an example of an electronic apparatus according to an embodiment of this invention; Fig. 7 is a plan view showing a modification of a way of forming spaces in an adhesive; and Fig. 8 is a plan view showing a modification of a bump arrangement on a semiconductor device. [DESCRIPTION OF THE BEST MODE OF CARRYING OUT THE INVENTION] Fig. 6 shows a portable telephone as one example of an electronic apparatus using a liquid crystal display unit according to an embodiment of the present invention. This portable telephone is equipped with an upper housing 1 and a lower housing 2. The upper housing 1 includes a PCB (Printed Circuit Board) defining a keyboard 10. In addition, the lower housing 2 includes a control circuit board 3 mounting a control LSI and a body board 4 mounting the circuit board 3. A liquid crystal display unit 5 according to this invention is mounted on the body board 4. A plurality of semiconductor driving output terminals 6 are formed as a wiring pattern on the surface of the body board 4. The liquid crystal display unit 5 has a liquid crystal driving lC 7, i.e., a semiconductor device, therein. The liquid crystal driving lC 7 is electrically connected to the semiconductor driving output terminals 6 when the liquid crystal display unit 5 is mounted on the body board 4. The liquid crystal display unit 5 and other necessary units are placed within the lower housing 2 and subsequently the upper housing 1 is placed thereon from above. In this way a portable telephone is completed. Incidentally, numeral 20 designates a speaker. For instance, as shown in Fig. 4, the liquid crystal display unit 5 includes a liquid crystal panel 8, a back light unit 9, a shield case 11 and an elastic connector 12. The liquid crystal panel 8 includes, as shown in Fig. 3, a first liquid crystal holding substrate 13 made of transparent glass and a second liquid crystal holding substrate 14 made of transparent glass. Transparent electrodes 18 are formed on the inner surface of the first substrate 13, whereas transparent electrodes 19 are formed on the inner surface of the second substrate 14. These electrodes are made of ITO (Indium Thin Oxide) or another transparent conductive material. Furthermore, polarizing plates 16a, 16b, serving as polarizing means, are adhered to outer surfaces of the first and second substrates 13, 14, respectively. The first substrate 13 and the second substrate 14 are joined in a liquid-proof condition to each other by a sealing compound 17 arranged in a ring-like pattern with a certain gap, the so-called cell gap between the two substrates. Further, a liquid crystal is sealed in the cell gap. Semiconductor input terminals 21 are formed at a right-hand end portion on the inner surface of a section 13a of the first substrate 13 protruding beyond the edge (the right side in Fig. 3) of the second substrate 14. The liquid crystal driving lC 7 as a semiconductor device is directly adhered by a bonding layer 31 to the first substrate 13, whereby output bumps 28 of the lC 7 are connected to the transparent electrodes 18 while input bumps 29 of the lC 7 are connected to the semiconductor input terminals 21. Thus, this embodiment employs a liquid crystal display unit, that is, a COG (Chip On Glass) type liquid crystal display unit, where the liquid crystal driving lC 7 is directly joined to the substrate 13 forming part of the liquid crystal panel 8. In Fig. 3, the back light unit 9 comprises a light guiding member 22 and a plurality of (for example 4) LEDs (Light Emitting Diodes) 23 fixed to a left-hand end portion of the light guiding member 22. Also, as shown in Fig. 4, a rectangular-parallelepiped-like guide hole 24 serving as a guide for the elastic connector 12 is made in a right-hand end portion of the light guiding member 22. As shown in Fig. 3, this guide hole 24 is made to have a dimension to accommodate the elastic connector 12 with no or no substantial play or gap. The elastic connector 12 is, as shown in Fig. 5, equipped with an electrically insulating elastic material, for example, an elastic proximal section 25 made of a silicone rubber and having a column-like configuration with a semi-circular cross-section, and a large number of conductive sections 26 provided in parallel to each other on the semi-circular outer circumferential surface of the elastic proximal section 25. An elastic material is placed between each pair of adjacent conductive sections to form a non-conductive section. The width of the non-conductive section is kept to be 15 µm to 25 µm. In the illustration, reference mark W represents the separation between adjacent conductive sections 26, the so-called pitch of conductive-sections, which is commonly set to W = 30 µm to 50 µm. For mounting the liquid crystal display unit according to this embodiment on the body board 4 of the portable telephone (Fig. 6), in Fig. 4, the elastic connector 12 is inserted into the guide hole 24 in the light guiding member 22, the back light unit 9 is placed at a given position on the body board 4, the liquid crystal panel 8 is placed at a given position on the back light unit 9, and the shield case 11 is put on the liquid crystal panel 8 and the back light unit 9 with a pressurizing member 30 made of a silicone rubber or another elastic material being interposed. And further, as shown in Fig. 3, the body board 4 and the shield case 11 are tightened and fixed to each other by deforming a caulking stopper 27. At this time, the elastic connector 12 is compressed and deformed elastically in the vertical direction due to the effect of the pressurizing member 30, whereupon the conductive sections 26 (see Fig. 5) firmly come into contact with both the semiconductor input terminals 21 on the liquid crystal panel 8 side and the semiconductor driving output terminals 6 on the body board 4 side owing to the elastic restoring force of the elastic proximal section 25. Incidentally, in terms of the way of compressing the elastic connector 12, it is also possible that, in place of preparing a dedicated component such as the pressurizing member 30, the corresponding portion of the shield case 11 is deformed to protrude inwardly to form a rib at that portion of the shield case 11 so that the rib compresses the elastic connector 12. When the liquid crystal display unit is attached as described above, an electric signal and a liquid crystal driving power are supplied from the control circuit board 3 (Fig. 6), through the semiconductor driving output terminals 6, the elastic connector 12 (Fig. 3) and the semiconductor input terminals 21, to the liquid crystal driving lC 7. According to that, the liquid crystal driving lC 7 controls the voltages applied to the electrodes 18, 19. Owing this voltage control, a visible image appears in an effective display region of the liquid crystal panel 8. In this embodiment, since by only disposing the elastic connector 12 between the semiconductor input terminals 21 on the liquid crystal panel 8 side and the semiconductor driving output terminals 6 on the portable telephone side, both of them can be electrically connected to each other, the assembling work becomes extremely easy. In addition, since the elastic connector 12 is put within the guide hole 24, when a force works on the elastic connector 12, the elastic connector 12 is compressed but not warped or buckled. Therefore, the electrical connecting condition between the semiconductor input terminals 21 and the semiconductor driving output terminals 6 can always be maintained steadily. In this embodiment, as shown in Fig. 1, the liquid crystal driving lC 7 is adhered onto the first substrate 13 by the bonding layer 31. The bonding layer 31 is composed of an ACF (Anisotropic Conductive Film) 32 serving as an adhesive and a plurality of cavities or spaces 33 formed inside of the ACF 32. The ACF 32 is formed by dispersing a large number of conductive particles 34 into an resin film having adhesive property, and the output bumps 28 of the lC 7 are electrically connected through the conductive particles 34 to the transparent electrodes 18, whereas the input bumps 29 are electrically connected through the conductive particles 34 to the semiconductor input terminals 21. Further, the bumps 28, the bumps 29 and the portions between the terminals are held in a insulated condition by an adhesive-property resin. Fig. 2 shows the joining portion of the liquid crystal driving lC 7 viewed from the direction indicated by an arrow A in Fig. 1. As to be seen in the illustration, the plurality of spaces 33 are positioned to be close to each other within an area surrounded by the bumps 28, 29 arranged in two rows in the longitudinal directions and the bumps 28, 28 arranged in two rows in the transverse directions, that is, within an area surrounded by the plurality of bumps 28, 29 arranged in a ring-like configuration. Incidentally, although Fig. 2 is illustrated with the bumps 28 and 29 omitted, bumps are formed at the circumferential end portions of the substrates as well as illustrated. In general, for joining the liquid crystal driving lC 7 to the substrate 13, the liquid crystal driving lC 7 is heated and pressed against the substrate 13 under a given pressure with the ACF 32 interposed between the lC 7 and the substrate 13. In this case, preferably, the ACF 32 is made of an epoxy-based adhesive. Particularly, if it is formed with molecules including an epoxy radical at a relatively small molecular weight, an excellent adhesive property can be obtained. At this heating and pressurizing process, the liquid crystal driving lC 7 may warp, and when it warps, an excessive stress may occur in the connecting portions of the bumps 28 and 29, causing the condition of electrical connection to be unstable. Further, when the temperature varies in the liquid crystal driving lC 7, the lC 7 and/or the substrate 13 may deform, causing the connecting conditions of the bumps 28 and 29 to be unstable. On the other hand, if the spaces 33 are provided within the ACF 32 like in this embodiment, when the liquid crystal driving lC 7 deforms, the spaces 33 can freely deform in accordance with the deformation of lC 7 and can absorb the deformation of the lC 7. As a result, the excessive stress on the connecting portions of the bumps 28, 29 can be prevented. The way of forming the spaces 33 within the ACF 32 is not limited to a specific method. For example, if the pressure bonding condition for joining the liquid crystal driving lC 7 onto the substrate 13 is set to an appropriate condition for the liquid crystal driving lC to be used, the spaces 33 can be produced. The following conditions are listed as one example of the pressure-bonding condition. (1) Liquid crystal driving lC 7 : SED1220 (manufactured by Seiko Epson Co., Ltd.) In Fig. 2, this lC has a dimension of L × W = 7.7 mm × 2.8 mm, and the number of bumps is approximately 200 and the bump size is 80 µm × 120 µm. (2) ACF 32 : CP8530 (manufactured by Sony Chemical Co., Ltd.) (3) Heating temperature of ACF : 180 to 230°C (central temperature = 200 to 210°C) In the case that the ACF is pressurized and heated by pressing the lC 7 with the pressurizing head heated up to a high temperature, if the temperature of the pressurizing head is set to 260 to 360°C (central temperature = approximately 300°C), the aforesaid ACF temperature can be obtained. (4) Pressurizing force of pressurizing head : 12 kgf to 20 kgf (1 kgf = 9,81 N) (5) Pressurizing time of pressurizing head : 10 seconds When the liquid crystal driving lC 7 was joined to the substrate 13 under the aforesaid (1) to (5) requirements, a plurality of spaces 33 as schematically shown in Fig. 2 were formed within the ACF 32. These spaces are formed in the ACF when, in the heating and pressurizing process, the viscosity of the adhesive rapidly decreases at the initial-process heating (process for approximately 0.1 to 0.5 second) so that a portion of the bonding layer flows out toward the exterior of the semiconductor device. The space ratio (ratio of space to the ACF) is preferable in a range of 5% to 70%. This is because, in the case that the space ratio is below 5%, the stress on the ACF can not be absorbed. On contrary, when the space ratio exceeds 70%, the space ratio is too high to connect the terminals (or the electrodes) to each other with a high reliability. Accordingly, the space ratio is preferable set within this range. However, in order to connect with a particularly high reliability, it is preferable that the space ratio is set in a range of 10% to 30%. When the space ratio is set to be in this range, the internal stress can be reduced without losing the adhesion strength, connecting with a high reliability. Fig. 7 shows a modification of the method of making the spaces 33. The difference of this modification from the above-described embodiment shown in Fig. 2 is that, in addition to providing the spaces 33 between the bump strings 28, 29 in the longitudinal directions and between the bump strings 28, 28 in the transverse directions, the spaces 33 are formed between the respective bumps and outside the pair of bump strings. Even in the case of disposing the spaces 33 in this way, the connection of the semiconductor devices to the substrate can be maintained steadily. Incidentally, although Fig. 7 is illustrated with the bumps 28 and 29 omitted, bumps are formed around the end portions of the substrate as well as the illustrated bumps 28 and 29. Alternate long and short dash lines indicates the bumps. Likewise, Fig. 8 or 2 are illustrated with the bumps omitted, but the same bumps as the illustrated bumps 28, 29 are formed around the substrate end portions. Fig. 8 shows a modification of the bump arrangement. The difference of this modification from the above-described embodiment shown in Fig. 2 is that, instead of arranging the plurality of bumps 28, 29 to make a ring-like configuration, the bumps are disposed in rows only in the longitudinal directions. In this modification, a plurality of spaces 33 are provided between the bump strings 28, 29. However, instead of or in addition to these spaces, the spaces 33 can also be provided between the respective bumps and/or outside the bump strings. The present invention has been described with some preferred embodiments, but this invention is not limited to those embodiments, and covers various changes within the technical ranges described in the claims. For instance, the semiconductor connecting structure and the liquid crystal display unit according to this invention are applicable to various electronic apparatus other than a portable telephone, such as a navigation system, a television, a palm-top computer and an electronic organizer, which require a visible information display. Figs. 3 to 5 indicate embodiments in which this invention is applied to the COG (Chip On Glass) type liquid crystal display unit. However, this invention is also applicable to the other types of liquid crystal display units, for example, a COB (Chip On Board) type liquid crystal display unit. Furthermore, in the embodiments shown in Figs. 3 to 5, the output terminal 6 on the portable telephone side as an electronic apparatus and the input terminal 21 on the liquid crystal panel 8 side are electrically connected to each other by the elastic connector 12. However, the connecting method for connecting both of them is not limited to this. For example, this invention includes a case of connecting both terminals by using an FPC (Flexible Printed Circuit).

Claims: A semiconductor device connecting structure for bonding a semiconductor device (7) onto a substrate (13) and for electrically connecting bumps (28, 29) of the semiconductor device (7) to terminals (18, 21) on the substrate (13), wherein a bonding layer (31) is interposed between said semiconductor device (7) and said substrate (13), said bonding layer (31) including a bonding material for adhering said semiconductor device (7) to said substrate (13), and a plurality of spaces (33) formed within said bonding material, characterized in that each space (33) extends through the entire thickness of the bonding layer (31), and said bonding material is an anisotropic conductive film having conductive particles (34) dispersed in a resin film. A connecting structure as defined in claim 1, characterized in that said bumps (28, 29) are arranged in rows, and that said spaces (33) are formed between said bump rows and/or outside said bump rows and/or between said bumps (28, 29). A connecting structure as defined in claim 1 or 2, characterized in that said spaces (33) are disposed closely to each other. A connecting structure as defined in claim 1, characterized in that the ratio of said spaces (33) to said bonding material is 5% to 70%. A connecting structure as defined in claim 4, characterized in that the ratio of said spaces (33) to said bonding material is 10% to 30%. A connecting structure as defined in claim 1, characterized in that said bonding layer (31) is made of an epoxy-based bonding material. A connecting structure as defined in any one of the preceding claims, wherein said substrate (13) is at least one of a pair of liquid crystal holding substrates of a liquid crystal display unit that are disposed in an opposed relation to each other with liquid crystal in between. A method of bonding a semiconductor device (7) to a substrate (13) and electrically connecting bumps (28, 29) of the semiconductor device (7) to terminals (18, 21) on the substrate (13), comprising the steps of: interposing a bonding layer (31) between said semiconductor device (7) and said substrate (13) to accomplish adhesion therein; and joining said substrate (13) and said semiconductor device (7) to each other by pressing a pressurizing head, heated up to a high temperature, against said semiconductor device (7) to pressurize and heat said bonding layer (31) thereby forming a plurality of spaces (33) within said bonding layer (31); characterized in that each space (33) is formed so as to extend through the entire thickness of the bonding layer (31), and said bonding layer is formed by dispersing conductive particles (34) in a resin film to obtain an anisotropic conductive film. A method as defined in claim 8, characterized in that said bonding material is made of an epoxy-based bonding material. An electronic apparatus having a plurality of semiconductor driving output terminals and a connecting structure as defined in claim 7.

Inventors: UCHIYAMA KENJI, UCHIYAMA, KENJI, UCHIYAMA, KENJI, SEIKO EPSON CORPORATION
Applicants: SEIKO EPSON CORP, SEIKO EPSON CORPORATION
Application year: 1997
Main classification: H01L21
IPC codes: H01L21, G02F1