A process for milling the rotor of a turbomolecular pump

Abstract: A process for milling the rotors of turbomolecular pumps comprises the following steps: a monolithic rotor (1) having disks (3, 5) obtained through turning is inserted into a mold into which an amount of resin has been disposed and melted. The mold with the rotor (1) is brought into a furnace to obtain a uniform distribution thereof; then it is cooled, the rotor (1) is extracted from the mold and is milled to create the blades (7). The residual resin is melted and removed by bringing the rotor (1) back to the furnace, and thereafter the blades (7) are deburred.

Description: The present invention refers to a process for milling rotors of turbomolecular pumps in which the rotor portion to be milled is embedded into a resin. The milling process is particularly adapted for milling the monolithic rotors of turbomolecular pumps made of aluminum alloys. As it is well known, a turbomolecular pump schematically comprises an outer casing housing the gas pumping stages which stages comprise stator rings cooperating with rotor disks fastened to a rotatable shaft driven by the pump motor. The rotor disks can be either flat disks or disks provided with tilted and closely spaced blades, usually obtained through milling operations, and with blades that are or can be different for each stage in respect of their number, length, thickness and inclination angle. It is further known that considerable vibrations are imparted to each single blade when these latter are subjected to the final machining through milling and this considerably limit the milling speed. Even when machining the blades at limited speeds, the milling cutter still leaves remarkable burrs on the machined parts that depends on the speed of said milling tool. It is an object of the present invention to eliminate the above mentioned inconveniences through a process that allows: a dramatic reduction of the vibrations imparted to each single blade during the milling, thus improving the surface finish of said blades; an increase of both the cutting speed and the cutting depth, with a consequent appreciable reduction of the contact time with the tools; an appreciable reduction of the noise generated in the working environment. The above scope is accomplished through the process for milling the rotors of a turbomolecular pump comprising the following steps: providing a monolithic rotor with disks obtained by turning; introducing a predetermined amount of resin into a mold substantially formed as a cylindrical container having an inner diameter sligthly larger than the diameter of the disks of the rotor; preheating the container with the resin in a furnace until the resin melts; preheathing the turned rotor to 80-100°C and inserting it into the mold; bringing the assembly again into a furnace and heating it until the resin is uniformely distributed between the disks; removing the mold from the furnace and letting the rotor cool at room temperature until the resin solidifies; removing the rotor from the mold and milling the disks to obtain the blades; eliminating the residual resin between the blades by returning the milled rotor into the furnace at a temperature of 80-100°C; deburring the blades. The resin has a melting point low enough to render easy its application/removal, but high enough to prevent it from melting during the cutting process; moreover the resin has good clinging or ahesion properties to the piece to prevent its detachment from the piece under the most severe conditions. Additionally the resin must not leave residuals on the piece that would be incompatible with the vacuum operating conditions of the pump and must not generate toxic vapours and be easily disposed. The invention will be disclosed with particular reference to the attached drawings that are only exemplary and not limiting. In the drawings: Figure 1 is an elevation view of a longitudinal cross section of the rotor of a turbomolecular pump; Figure 2 is a plane view of the rotor of Fig. 1; Figure 3 is a scrap perspective view of the rotor of a turbomolecular pump; Figure 4 is a block diagram illustrating the sequence of the process steps. Referring to the Figures, for carrying out the process of the invention one starts with a monolithic rotor 1 provided with disks 3 and 5 obtained by turning; as indicated by step 10 in the block diagram of Fig. 4. A predetermined amount of resin is then inserted into a suitable mold, substantially formed as a cylindrical container (not shown in the drawings) having an inner diameter sligthly larger than the diameter of the upper (larger) disks 5 of the rotor 1; step 12. The container with the resin is preheated in a furnace (not shown) until the resin melts (at about 100°C); step 14. The turned rotor 1 is preheathed to 80-100°C and inserted into the mold; step 16. The assembly is brought again into a furnace and heated until the resin is uniformely distributed between the disks; step 18. The mold is removed from the furnace and the rotor is let to cool at room temperature until the resin solidifies; step 20. Then the rotor is removed from the mold and the disks 3 and 5 are finally milled to form the blades 7 thereon; step 22. After the blades have been milled, the residual resin remaining between the blades 7 is removed by introducing again the milled rotor into the furnace at a temperature of 80-100°C, so as to melt and remove the remaining resin; step 24. Then the blades are deburred for the final finish; step 26. A satisfactory type of resin, only mentioned for exemplary purpose, is paraffin with a melting temperature of 55-65°C, a washing temperature of 65°C and a freezing point of about 55°C. Thanks to the process of the invention, the block of the rotor with the disks to be milled becomes a single block with the paraffin solidified over and between the disks, so that when these latter are milled to form the blades in practice no vibration is generated in the disks, which allows for a quicker and more precise milling of the blades

Claims: A process for milling the rotors of a turbomolecular pump comprising the following steps: providing a monolithic rotor (1) having disks (3, 5) obtained by turning; introducing a predetermined amount of resin into a mold substantially formed as a cylindrical container having an inner diameter sligthly larger than the diameter of said disks (3, 5) of the rotor (1); preheating said container with the resin in a furnace until the resin melts; preheathing the turned rotor (1) to 80-100°C and inserting it into the mold; bringing the assembly again into a furnace and heating it until the resin is uniformely distributed between the disks; removing the mold from the furnace and letting the rotor cool at room temperature until the resin solidifies; removing the rotor (1) from the mold and milling the disks (3, 5) to obtain the blades (7); eliminating the residual resin between the blades (7) by returning the milled rotor into the furnace at a temperature of 80-100°C; deburring the blades (7). A process for milling the rotors of a turbomolecular pumps as claimed in claim 1, characterized in that said resin is paraffin with a melting temperature of 55-65°C and a freezing point of about 55°C and, the washing temperature is 65°C.

Inventors: INSERRA DARIO, MARZIO MARCO, PELLIZZARI PAOLO, INSERRA, DARIO, MARZIO, MARCO, PELLIZZARI, PAOLO
Applicants: VARIAN SPA, VARIAN S.P.A.
Application year: 1997
Main classification: B23Q3
IPC codes: F04D29, B23Q3, F04D19