Semiconductor device with circuit for preventing latch-up

Abstract: Semiconductor device has a substrate bias generating circuit for generating a substrate bias to be applied to a p-type semiconductor substrate, a CMOS circuit formed on the semiconductor substrate and a latch-up protection circuit. The latch-up protection circuit has an n-type first region, a highly doped n-type second region, a p-type third region apart from the second region in the first region and a n-type fourth region surrounding said first region formed apart from the first region on the surface of the substrate. The second region is coupled with a power supply Vcc, the third region is coupled with an input line, the fourth region is coupled with a ground Vss, and the substrate is coupled with the substrate bias generating circuit.

Description: Background of the invention This invention relates to a semiconductor device having a latch-up protection circuit formed on the semiconductor substrate for preventing a latch-up. Generally, in a semiconductor device having an internal Complementary Metal Oxide Semiconductor (CMOS) circuit and an electrostatic breakdown protection circuit formed in an input circuit through which an input signal is input to the CMOS circuit, when an excessive voltage such as electrostatic surge etc. is input from an input line to the CMOS circuit through the electrostatic breakdown protection circuit, the excessive voltage sometimes triggers off a latch-up. Therefore a latch-up protection circuit is formed on the semiconductor substrate for preventing a latch-up from occurring in the CMOS circuit. The latch-up protection circuit typically has an impurity diffusion region which surrounds the electrostatic breakdown protection circuit on a surface of a semiconductor substrate (called surrounding diffusion region hereinafter). The surrounding diffusion region and the electrostatic breakdown protection circuit form a multicollector type of parasitic bipolar transistor, then, as shown in the following first comparative example, a part of the surge as a collector current can be discharged from the input line to the surrounding diffusion region. Consequently, the latch-up protection circuit, which reduces a ratio of the surge flowing into the CMOS circuit, prevents the latch-up from occurring in the CMOS circuit. Now, in a semiconductor device having a CMOS circuit, for example, in a semiconductor memory device represented by a dynamic random access memory (DRAM), a substrate bias is applied to a semiconductor substrate of the semiconductor device in order to ensure the optimum working of the CMOS circuit. The semiconductor device usually has a built-in substrate bias generating circuit for generating a substrate bias to be applied to the semiconductor substrate, because the substrate bias is indispensable to function as a semiconductor device and the built-in substrate bias generating circuit makes it easy to use. And the substrate bias generated by the built-in substrate bias generating circuit is applied to a semiconductor substrate through a diffusion region for applying the substrate bias. However, if the diffusion region and a surrounding diffusion region have the same conductive type and are coupled with each other, following problems occur. The substrate bias generating circuit is generally applied a little current and has much internal impedance as a power source. So the substrate bias will be changed easily when surge flows from an input line into the substrate bias generating circuit through the surrounding diffusion region. Then, as shown in the following comparative case 2, latch-up in the CMOS circuit occurs more often. Consequently, it gets more difficult to prevent latch-up from occurring if a latch-up protection circuit which works as a prior multicollector type of parasitic bipolar transistor is formed in the semiconductor device with the built-in substrate bias generating circuit. Namely, latch-up tolerance of the semiconductor device deteriorates. While a protection resistor may be formed between an input line and a CMOS circuit in order to delay the surge to flow into the CMOS circuit, instead of forming an electrostatic breakdown protection circuit, so as not to form a multicollector type of parasitic bipolar transistor. The protection resistor needs enough large resistance. However, the larger the resistance of the protection resistor, the more transmission of an input signal delays. So the protection resistor with enough large resistance can not be formed in the semiconductor device required high-speed operation. Consequently, the conventional semiconductor device with the protection resistor is difficult to obtain enough electrostatic breakdown tolerance. A semiconductor device with a substrate bias generating circuit is desired not to reduce operation speed and to keep the latch-up tolerance and the electrostatic breakdown tolerance. US patent 4,476,476 discloses protective circuits for CMOS integrated circuits, which prevent damage to the gate oxide of the CMOS transistors and which raise the magnitude of the input signal that will trigger the inherent SCR structure contained within CMOS integrated circuits to prevent SCR (silicon controlled rectifier) latchup. Herein a CMOS gate protection diode clamping the input terminal to substrate potential is prevented from injecting carriers into the substrate and causing SCR latchup by forming the diode as well to substrate junction, surrounded by another, reverse-biased well, to reduce injection and collect parasitic injected carriers before they can diffuse to cause latchup. US patent 4,647,956 relates to an improved complementary semiconductor device, a CMOS semiconductor device which avoids latchup in the powerup mode as well as in the normal operating mode. This device is provided with an onchip back bias generator which reduces the possibility of forward biasing parasitic NPNP transistors in normal operation. In another modified form a junction field effect transistor is provided to prevent forward biasing of the parasitic transistors in a somewhat different manner. Summary of the invention It is a primary object of this invention as claimed in claim 1 to provide a semiconductor device with a substrate bias generating circuit, which has sufficient latch-up tolerance and sufficient electrostatic breakdown tolerance without reducing operation speed. It is another object of this invention to reduce an area occupied by a latch-up protection circuit in the semiconductor device. It is a further object of this invention to reduce an area occupied by a latch-up protection circuit and an electrostatic breakdown protection circuit in the semiconductor device. These and other objects are accomplished by a semiconductor device, including a substrate bias generating circuit for generating a substrate bias to be applied to a semiconductor substrate of a first conductive type, a CMOS circuit formed on the semiconductor substrate and a first protection circuit formed on the semiconductor substrate for preventing a latch-up from occurring in the CMOS circuit, the first protection circuit comprising, a first diffusion region of a second conductive type formed on the substrate, a second diffusion region of the second conductive type doped more heavily than the first diffusion region formed in the first diffusion region, a third diffusion region of the first conductive type formed apart from the second diffusion region in the first diffusion region, and a fourth diffusion region of the second conductive type surrounding said first diffusion region formed apart from the first diffusion region on the surface of the substrate, wherein the second diffusion region is electrically coupled with a first power supply, the third diffusion region is electrically coupled with an input line, the fourth diffusion region is electrically coupled with a second power supply having different potential from the first power supply, and the substrate is electrically coupled with the substrate bias generating circuit at the outside of the first protection circuit. The first protection circuit preferably comprises a control gate electrode formed on said first diffusion region between said second diffusion region and said third diffusion region for controlling an MOS FET. The first protection circuit preferably comprises an bipolar transistor and said fourth diffusion region is operable as a collector of said bipolar transistor. The semiconductor device further comprises a second protection circuit for preventing electrostatic breakdown from occurring in the CMOS circuit, and said second protection circuit having a resistor including said third diffusion region as a part of the resistor. The resistor preferably comprises a first electrode on said third diffusion region and electrically coupled with a control gate electrode in the CMOS circuit and a second electrode on said third diffusion region coupled with the input line, and a part of said third diffusion region between the first electrode and the second electrode is operable as the register of said second protection circuit. These and other objects are accomplished by a semiconductor device, including a semiconductor substrate of a first conductive type, a substrate bias generating circuit for generating a substrate bias to be applied to the semiconductor substrate, a CMOS circuit formed on the semiconductor substrate, a semiconductor controlled rectifier device for preventing a latch-up from occurring in the CMOS circuit, and a second protection circuit for preventing electrostatic breakdown from occurring in the CMOS circuit, the semiconductor controlled rectifier device comprising: a first diffusion region of a second conductive type formed on the substrate and electrically coupled with a first power supply; a second diffusion region of the first conductive type formed in said first diffusion region and electrically coupled with an input line; a third diffusion region of the second conductive type surrounding said first diffusion region formed apart from said first diffusion region on the surface of the substrate and electrically coupled with a second power supply having different potential from the first power supply; and an electrode on the substrate except said first to third diffusion regions electrically coupled with the substrate bias generating circuit. The semiconductor controlled rectifier device preferably comprises an bipolar transistor and said third diffusion region is operable as a collector of said bipolar transistor. The semiconductor controlled rectifier device preferably comprises a resistor and a part of said second diffusion region is operable as the register of said second protection circuit. The resistor preferably comprises a first electrode on said second diffusion region and electrically coupled with a control gate electrode in the CMOS circuit and a second electrode on said second diffusion region coupled with the input line, and a part of said second diffusion region between the first electrode and the second electrode is operable as the register of said second protection circuit. Brief description of drawing The objects and features of the invention may be understood with reference to the following detailed description of an illustrative embodiment of the invention, taken together with the accompanying drawings in which : Fig. 1 is a cross-sectional view showing a semiconductor device according to a first embodiment of the present invention; Fig. 2 shows a schematic pattern layout of the semiconductor device according to the first embodiment of the present invention; Fig. 3 is a cross-sectional view showing a semiconductor device according to a second embodiment of the present invention; Fig. 4 shows a schematic pattern layout of the semiconductor device according to the second embodiment of the present invention; Fig. 5 is a cross-sectional view showing a semiconductor device according to a third embodiment of the present invention; Fig. 6 shows a schematic pattern layout of the semiconductor device according to the third embodiment of the present invention; Fig. 7 is a cross-sectional view showing a semiconductor device according to a fourth embodiment of the present invention; Fig. 8 shows a schematic pattern layout of the semiconductor device according to the fourth embodiment of the present invention; Fig. 9 is a cross-sectional view showing a semiconductor device according to a fifth embodiment of the present invention; Fig. 10 shows a schematic pattern layout of the semiconductor device according to the fifth embodiment of the present invention; Fig. 11 is a cross-sectional view showing a semiconductor device according to a sixth embodiment of the present invention; Fig. 12 shows a schematic pattern layout of the semiconductor device according to the sixth embodiment of the present invention; Fig. 13 shows a schematic pattern layout of a semiconductor device according to a seventh embodiment of the present invention; Fig. 14 is a sectional view showing the semiconductor device according to the seventh embodiment of the present invention, respectively showing a vertical section and a schematic vertical section along the direction A - A in Fig. 13; Fig. 15 is a sectional view showing the semiconductor device according to the seventh embodiment sectioned along the direction B - B in Fig. 13; Fig. 16 shows a schematic pattern layout of a semiconductor device according to a eighth embodiment of the present invention; Fig. 17 is a sectional view showing the semiconductor device according to the eighth embodiment of the present invention, respectively showing a vertical section and a schematic vertical section along the direction A - A in Fig. 16; Fig. 18 is a sectional view showing the semiconductor device according to the eighth embodiment sectioned along the direction B - B in Fig. 16; Fig. 19 is a cross-sectional view showing a semiconductor device according to a first comparative example; Fig. 20 is a circuit diagram showing a semiconductor device according to a first comparative example; Fig. 21 is a cross-sectional view showing a semiconductor device according to a second comparative example; Fig. 22 is a circuit diagram showing a semiconductor device according to a second comparative example; Fig. 23 is a cross-sectional view showing a semiconductor device according to a third comparative example; and Fig. 24 is a circuit diagram showing a semiconductor device according to a third comparative example; Description of the preferred embodiments Referring to the drawings, preferred embodiments of the semiconductor devices according to the present invention is shown. Each drawing roughly shows the shape or the arrangement of parts of the semiconductor device, and hatching is partly omitted from sectional views, in order to understand the present invention. A first comparative example, a second comparative example and third comparative example are briefly shown to understand the present invention easily before describing the preferred embodiments, (First comparative example) Fig. 19 is a cross-sectional view showing a semiconductor device including diffusion regions, electrodes and parasitic circuit, according to a first comparative example. Fig. 20 is a circuit diagram showing a semiconductor device according to a first comparative example. Referring to Fig. 19 and Fig. 20 of the drawings, a first comparative example of a semiconductor device having a latch-up protection circuit which is a conventional multi-collector type parasitic bipolar transistor without a substrate bias generating circuit is shown. (Structure) The semiconductor device of the first comparative example, as shown in Fig. 19, has an internal CMOS circuit 12 and an input circuit 14 on a p-type substrate 10. The input circuit 14 comprises an electrostatic breakdown protection circuit 36 and a latch-up protection circuit 38. There are a plurality of internal CMOS circuits on the p-type substrate besides the internal CMOS circuit 12 shown in Fig. 9. A p-type MOS transistor (PMOSTr) 16 comprising the internal circuit 12 is formed in an n-type well (Nwell) 18 on the p-type substrate 10. A supply voltage Vcc of 3.0 V is applied to a source (p +) 20 and the Nwell 18 in the PMOSTr 16 through a highly doped impurity region (n +) 24 doped n-type impurities more than the Nwell 18. A n-type MOS transistor (NMOSTr) 26 comprising the internal circuit 12 is formed on the p-type substrate 10. A ground voltage Vss of 0 V is applied to a drain (n +) 32 and the p-type substrate 10 in the NMOSTr 26 through a highly doped impurity region (p +) 34 doped p-type impurities more than the p-type substrate 10. A first pn junction diode (p-type diode) 40 comprising the electrostatic breakdown protection circuit 36 is formed in an Nwell 44 on the p-type substrate 10. A supply voltage Vcc of 3.0 V is applied to the Nwell 44 through a highly doped impurity region (n +) 46 doped n-type impurities more than the Nwell 44. The p-type diode 40 has a p-type impurity diffusion region (p +) 48 in the Nwell 44. The p + 48 is coupled with an input terminal 62 through an input line. The pn junction of the p-type diode 40 is formed at the surface between the p + 48 and the Nwell 44 and forms a forward voltage junction against a terminal applied the supply voltage Vcc. A second pn junction diode (n-type diode) 42 comprising the electrostatic breakdown protection circuit 36 is formed on the p-type substrate 10 A ground voltage Vss of 0 V is applied to the p-type substrate 10 through a highly doped impurity region (p +) 50 doped p-type impurities more than the p-type substrate 10. The n-type diode has an n-type impurity region (n +) 52 on the p-type substrate 10. The n + 52 is coupled with the input terminal 62 through an input line. The pn junction of the n-type diode 42 is formed at the surface between the n + 52 and the p-type substrate 10, and forms a backward voltage junction against a terminal applied the ground voltage Vss. In the first comparative example, the semiconductor device has a p-type impurity diffusion region (p +) 54 and an n-type impurity diffusion region (n +) 56 as a latch-up protection circuit. The p-type diode 40 is surrounded by the p-type region (p +) 54 applied the ground voltage Vss of 0V. The n-type diode 42 is surrounded by the n-type region (n +) 56 applied the supply voltage Vcc of 3.0 V. The input line is coupled with an unspecified gate electrode (shown as "G" in Fig. 19) in the internal CMOS circuit through a protection resistor Rp. The unspecified gate electrode is not limited to the only gate electrode 28 in the internal CMOS circuit shown in Fig. 19. A capacitor C in Fig. 20 is mainly made by a junction between the source 32 of the NMOSTr 26 and the Nwell 18 in the internal CMOS circuit shown in Fig. 19. (Parasitic circuit) A parasitic circuit of a semiconductor device in the first comparative example will be described. In the semiconductor device of the first comparative example, a parasitic circuit is formed by combining a p-type substrate, a p-type impurity diffusion region, an Nwell and a n-type impurity diffusion region which comprise a semiconductor device. For example, the source (p +) 20 of the PMOSTr 16 in the internal circuit 12, the Nwell 18 and the p-type substrate 10 respectively perform an emitter, a base and a collector, and form a pnp type first parasitic transistor (first parasitic Tr) 64. The base of the first parasitic Tr 64 is coupled with a supply voltage through the n + region 24 of the Nwell 18 in the internal circuit. A well-resistor (R1) 66 is parasitically formed between the base and the n + 24. The drain n + 32 of the NMOSTr 26 in the internal circuit 12, the p-type substrate 10 and the Nwell 18 respectively perform an emitter, a base and a collector, and form a npn type second parasitic transistor (second parasitic Tr) 68. A substrate resistor (R2) 70 is parasitically formed between the p + region 34 of the p-type substrate 10 in the internal circuit 12 and the p-type substrate 10. The p + region 48 of the p-type diode 40 in the electrostatic breakdown protection circuit 36, the n + region 46 and the p-type substrate 10 respectively perform a emitter, a base and a collector, and form a pnp type third parasitic transistor (third parasitic Tr) 58. The collector of the third parasitic Tr 58 is coupled with the p + region 54 of the latch-up protection circuit and the p + region 34 of the internal circuit 12 respectively, through the p-type substrate 10. The third parasitic Tr 58 performs a multi-collector type transistor. The n + region 52 of the n-type diode 42 in the electrostatic breakdown protection circuit 36, the p-type substrate 10 and the n + region 56 in the latch-up protection circuit respectively perform an emitter, a base and a collector, and form a pnp type fourth parasitic transistor (fourth parasitic Tr) 60. The Nwell 18 in the internal CMOS circuit performs a collector of the fourth parasitic Tr 60, so that the fourth parasitic Tr 60 performs multi-collector type transistor. (Latch-up phenomenon and operation of the latch-up protection circuit) A latch-up phenomenon and the operation of the latch-up protection circuit will be described with reference to the semiconductor device of the first comparative example in the case where surge voltage occurs to the input terminal 62. A surge current flowed from the input terminal 62 flows into the semiconductor device through the p + region 48 of the emitter in the third parasitic Tr 58. The surge current flows into the p-type substrate 10 as a collector current of the third parasitic Tr 58 as well as into the supply voltage Vcc through the n + region 46 as a base current of the third parasitic Tr 58. A part of the surge current flowing into p-type substrate 10 flows into the ground voltage ( shown as "Vss" in Fig. 19 and 20 ) through the p + region 54 of the latch-up protection circuit 38. The rest of the surge current flows into the ground voltage through the p + 34 of the internal circuit 34. When the surge current i1 flowing into the p + region 54 of the latch-up protection circuit is enough much and the surge current i2 flowing into the p + region 34 in internal circuit 12 is sufficiently a little, the latch-up can be prevented from occurring in the internal circuit 12. However, if the surge current i2 flowing into the p + region 34 in internal circuit 12 gets more, the surge current i2 generates a latch-up to the internal circuit 12 as follows. When the surge current i2 gets more, a potential difference between both ends of the substrate resistor R2 gets larger and reaches a level biasing forward between the base and the emitter in the second parasitic Tr 68, so that a base current flows in the second parasitic Tr 68. The second parasitic Tr 68 turns on and is supplied with a collector current from the supply voltage Vcc through the well-resistor R1. The potential difference between both ends of the well-resistor R1 gets larger because of the collector current. When the potential difference between both ends of the well-resistor R1 reaches a level biasing forward between the base and the emitter in the second parasitic Tr 64, so that a base current flows in the first parasitic Tr 64. The first parasitic Tr 64 turns on. Then the base current and the collector current of the first parasitic Tr 64 and the second parasitic Tr 68 generate a positive feedback each other and a latch-up. In this view, the semiconductor device described as the first comparative example prevents a latch-up from occurring by forming the latch-up protection circuit 38 and decreasing the surge current i2 flowing into the internal circuit 12. In the first comparative example, any parasitic bipolar transistor formed in the input circuit 14 performs a multi-collector type transistor. When a negative surge voltage is applied to the input terminal, a surge current flows from n + region 52 of an emitter in the fourth parasitic Tr 60 into the semiconductor device. In this case, the surge current flowing into the internal circuit 12 can be decreased because a part of the surge current flows into the n + region 56 of the latch-up protection circuit, so that the latch-up can be prevented from occurring in the internal circuit 12. (Second comparative example) Fig. 21 is a cross-sectional view showing a semiconductor device including diffusion regions, electrodes and parasitic circuit, according to a second comparative example. Fig. 22 is a circuit diagram showing a semiconductor device according to a second comparative example. The same reference characters in Figs. 21 and 22 as shown in Figs. 19 and 20 designate the same parts. Referring to Fig. 21 and Fig. 22 of the drawings, a second comparative example of a semiconductor device further having a substrate bias generating circuit is shown. The semiconductor according to the second comparative example has a substrate bias generating circuit 80. The substrate bias Vbb generated by the substrate bias generating circuit 80 is applied, through a internal potential line, to the highly doped impurity p-type diffusion region (p +) 34 in the internal circuit 12 and to the highly doped impurity p-type diffusion region (p +) 54 in the latch-up circuit respectively. The substrate bias Vbb applied by the substrate bias generating circuit 80 into the p-type substrate 10 is lower than the potential of the ground Vss. A capacitor C1 shown in Fig. 22 is mainly a junction capacitor between the source 32 of the NMOSTr 26 and the p-type substrate 10 shown in Fig. 19. The junction capacitor is necessarily formed because the ground voltage Vss is applied to the source 32. A capacitor C2 shown in Fig. 22 is mainly a junction capacitor between the Nwell 18 having the PMOSTr 16 in the internal CMOS circuit and the p-type substrate 10 shown in Fig. 19. The junction capacitor is necessarily formed because the supply voltage Vcc is applied to the Nwell 18 through the n + region 24. The semiconductor according to the second comparative example having the substrate bias generating circuit 80, unlike the first comparative example, can not be prevented from occurring a latch-up by making a parasitic bipolar transistor of a multi-collector type. Reasons are as follows. The operation in case of a surge voltage being applied to the semiconductor through the input terminal will be described with reference to Fig. 21. A surge current flowed from the input terminal 62 flows into the semiconductor device through the p + region 48 of the emitter in the third parasitic Tr 58. The surge current flows into the p-type substrate 10 as a collector current of the third parasitic Tr 58 as well as into the supply voltage source (shown as "Vcc" in Figs. 21 and 22) through the n + region 46 as a base current of the third parasitic Tr 58. A part of the surge current flowing into p-type substrate 10 flows into the substrate bias generating circuit 80 through the p + region 54. However, in the substrate bias generating circuit 80, the capacity to supply current is originally small and the internal impedance as a power source is large. When the surge voltage is applied to the substrate bias generating circuit 80 through the p + region 54, the substrate bias Vbb itself is easily raised to a high potential. Then, the substrate bias Vbb gets forward voltage (Vf) in a pn junction higher than the ground potential and the pn junction between the p-type substrate 10 and the drain 32 of the NMOSTr 26 in the internal circuit 12 is biased forward. Consequently, as described in the first comparative example, a base current flows in the second parasitic Tr 68 and the second parasitic Tr 68 turns on, so that a collector current of the second parasitic Tr 68 is applied from the supply voltage Vcc through the well-resistor R1. The potential difference between both ends of the well-resistor R1 gets larger because of the collector current. When the potential difference between both ends of the well-resistor R1 reaches a level biasing forward between the base and the emitter in the second parasitic Tr 64, so that a base current flows in the first parasitic Tr 64. The first parasitic Tr 64 turns on. Then the base current and the collector current of the first parasitic Tr 64 and the second parasitic Tr 68 generate a positive feedback each other and a latch-up. In this view, in the semiconductor having the substrate bias generating circuit 80, the substrate bias Vbb is easily raised because of the surge current. In case of having the substrate bias generating circuit 80, it gets difficult to prevent a latch-up generating in spite of a latch-up protection circuit. A metal line (internal potential line), supplying a substrate bias Vbb to the whole chip having a semiconductor device, is formed around other internal CMOS circuits as well as the internal circuit 12. In any internal CMOS circuit, PMOSTrs and NMOSTrs are arranged at closer (minimum) space, so that a base width of an npn type parasitic bipolar transistor (a second parasitic transistor in the second comparative example) is also minimum. Therefore, the current amplification factor (hFE) of the parasitic bipolar transistor gets larger than that of peripheral circuits, so that a latch-up in internal CMOS circuit is easier to occur than in peripheral CMOS circuits. It means there is a possibility that, in a semiconductor device having a substrate bias generating circuit, once the substrate bias Vbb is raised, the latch-up occurs in unspecified internal CMOS circuits. Adding a multi-collector type latch-up protection circuit, which is formed on a semiconductor device having no substrate bias generating circuit, to a semiconductor device having a substrate bias generating circuit causes a raise of substrate bias Vbb because of a positive surge. The raised substrate bias Vbb affects an inner internal CMOS circuit through a metal line, so that a latch-up occurs in an inner internal CMOS circuit. Then a latch-up tolerance more decrease compared with a case that a latch-up occurs in peripheral CMOS circuits. On the other hand, in a semiconductor device having a substrate bias generating circuit but not a latch-up protection circuit, a surge current is easy to flow into an internal CMOS circuit and a latch-up is easy to occur in peripheral internal CMOS circuits near input circuits. It is necessary to enlarge widths of all bases of parasitic npn type transistors in an internal CMOS circuit so as to prevent a latch-up occurring because a latch-up tolerance in the whole semiconductor device depends on a minimum space between a PMOSTr and an NMOSTr. To prevent a latch-up by enlarging the widths of the bases causes increasing of a chip size and cost. Therefore, an input circuit without the p-type diode described in the first comparative example is used in a semiconductor device having a substrate bias generating circuit. Because forming of a parasitic bipolar transistor is inevitable by using a p-type diode. Such an input circuit substantially comprises only n-type diodes. It is difficult, however, for a protection circuit having only n-type diodes to have sufficient tolerance. Reasons are as follows. (Third comparative example) Fig. 23 is a cross-sectional view showing a semiconductor device including diffusion regions, electrodes and parasitic circuit, according to a third comparative example. Fig. 24 is a circuit diagram showing a semiconductor device according to a third comparative example. The same reference characters in Figs. 23 and 24 as shown in Figs. 19, 20, 21 and 22 designate the same parts of which explanations are omitted. Referring to Fig. 23 and Fig. 24 of the drawings, a third comparative example of a semiconductor device having a first input protection circuit 72 and a second protection circuit 74 respectively comprised of n-type diodes as an electrostatic breakdown protection circuit is shown. (Structure) The semiconductor device of the third comparative example, as shown in Fig. 23, has a first input protection circuit 72 and a second protection circuit 74 in addition to an internal CMOS circuit 12. The first input protection circuit 72 comprises a first highly doped n-type diffusion region (n +) 76 and a second highly doped n-type diffusion region (n +) 78 on the p-type substrate 10. The first n + region 76 coupled with an input terminal through an input line. The second n + region 78 is applied a supply voltage Vcc. The first n + region 76, the p-type substrate 10 and the second n + region 78 are respectively equivalent to an emitter, a base and a collector, of a first npn type bipolar transistor (first protection Tr). The second input protection circuit 74 comprises the first n + region 76 and a third highly doped n-type diffusion region (n +) 82 on the p-type substrate 10. The first n + region 76 coupled with an input terminal through an input line. The third n + region 82 is applied a ground voltage Vss. The first n + region 76, the p-type substrate 10 and the third n + region 82 are respectively equivalent to an emitter, a base and a collector of a second npn type bipolar transistor (second protection Tr). (Operation) An operation of the semiconductor device of the third comparative example will be described in the case where an electrostatic negative surge (negative surge) occurs to the input terminal 62. The negative surge flowed from the input terminal 62 flows into the semiconductor device through the first n + region 76 of the first protection circuit 72 and the second protection circuit 74. The direction of the negative surge is forward for both base-emitter junctions of the first protection Tr 84 and the second protection Tr 86. The base current of the first protection Tr 84 and the second protection Tr 86 flows when the potential of the first n + region 76 decrease a forward voltage Vf (approximately 0.6 V in case of a silicon semiconductor) lower than that of the p-type substrate 10 because of the negative surge. The first and second protection Trs 84, 86 turn on, so that the negative surge can be discharged to a supply voltage terminal ("Vcc" shown in Fig. 24) as a collector current of the first protection Tr 84 and to a ground voltage terminal ("Vss" shown in Fig. 24) as a collector current of the second protection Tr 86. In this view, the semiconductor device according to the third comparative example can quickly let the negative surge flow into both source lines because both npn Trs 84 and 86 are decreased the forward voltage Vf by the negative surge and turn on. An operation of the semiconductor device of the third comparative example will be described in the case where an electrostatic positive surge (positive surge) occurs to the input terminal 62. The positive surge flowed from the input terminal 62 flows into the semiconductor device through the first n + region 76 of both protection circuit 72 and 74. The direction of the positive surge is backward for both base-emitter junctions of the first protection Tr 84 and the second protection Tr 86. It is necessary that the potential of the first n + region 76 increase by a breakdown voltage of a pn junction (approximately 10-odd V in case of a general semiconductor device) higher than the voltage of the p-type substrate 10 and the base-emitter junction is broken down, so that the first protection Tr 84 and the second protection Tr 86 to be turned on by the positive surge. The response of the first and second protection Trs 84, 86 is delayed until the potential of the first n + region 76 increase by the breakdown voltage. A surge voltage is applied to gates of the internal CMOS circuit while the response is delaying. Consequently, in the worst case, a gate oxide film could be broken down because of the surge voltage. Generally, a protection resistor Rp is formed between an input terminal and a gate of an internal CMOS circuit so as to delay the surge voltage to be applied to the gate of the internal CMOS circuit while the response is delaying. When the resistance of the resistor Rp gets larger, it delays an input signal transferring in spite of normal operation. Therefore, it is not appropriate for a semiconductor device required a high-speed operation to form such a protection resistor with large resistance. Instead of making the resistor Rp larger, there is a way of forming a pnp-type bipolar transistor as an input protection circuit by using a p-type diode. The pnp-type bipolar transistor can respond to a positive surge by a forward voltage. This semiconductor device having such a pnp-type transistor can keep tolerance of an electrostatic breakdown against a positive surge. This pnp-type bipolar transistor, however, is the p-type diode inevitably forming the third parasitic Tr 58 above mentioned in comparative example 2. Therefore, forming the pnp-type bipolar transistor makes it difficult to keep a latch-up tolerance because of increase in the substrate voltage Vbb. In this view, though an electrostatic breakdown tolerance against surge voltage can be kept, a latch-up tolerance can not be kept by using a p-type diode in a p-type substrate as an input protection circuit in a semiconductor device having a substrate voltage generating circuit therein. On the other hand, though the latch-up tolerance can be kept by no using the p-type diode, the electrostatic breakdown tolerance can not be kept with a high-speed operation. Further, though an electrostatic breakdown tolerance against surge voltage can be kept, a latch-up tolerance can not be kept by using an n-type diode in an n-type substrate. On the other hand, though the latch-up tolerance can be kept by no using the n-type diode, the electrostatic breakdown tolerance can not be kept with a high-speed operation. (First preferred embodiment) Referring to the Fig. 1 and the Fig. 2, a first preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 1 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a first embodiment of the present invention. Fig. 2 shows a schematic pattern layout of the semiconductor device according to the first embodiment of the present invention. The sectional view of the electrostatic breakdown protection device 74 and the latch-up protection device 88 in Fig. 1 is sectioned at the X - X line shown in Fig. 2. In Fig. 2, hatching is partly used in spite of the plane pattern, so as to understand the present invention easily. The same parts in the first embodiment as the first, second and third comparative examples are shown with the same reference character and are partly omitted those explanation. (Structure of the first preferred embodiment) The semiconductor device according to the first embodiment, as shown in Fig. 1, has a substrate voltage generating circuit 80 for generating a substrate bias to be applied to a p-type substrate 10, a CMOS internal circuit 12, an electrostatic breakdown protection device (tolerance device) 74 for preventing the CMOS internal circuit 12 from being electrostatically broken down and a latch-up protection device (protection device) 88 for preventing a latch-up from occurring in the CMOS internal circuit 12. The detail of the CMOS circuit 12 is omitted as it is the same as that in the first comparative example. The tolerance device 74 is the same as the second input protection circuit 74 in the third comparative example, of which the second protection Tr 86 as the parasitic circuit is also the same as that of the third comparative example. The protection device 88 has an n-type first diffusion region (Nwell) 90 on the p-type substrate, which has a highly doped n-type second diffusion region (n +) 92 doped n-type impurities more than the Nwell 90 and a p-type third diffusion region 94 separated from the second diffusion region 92. An n-type fourth diffusion region (Nwell) 96 is formed at region substantially surrounding but separated from the first diffusion region 90 on a surface of the p-type substrate 10. The plane pattern in Fig. 2 of the fourth diffusion region 96 looks quadrilateral shape surrounding the first diffusion region (Nwell) 90. The third diffusion region 94 is coupled with a input line. The second diffusion region (n +) 92 is coupled with a first supply line applied a supply voltage Vcc of 3.0 V. The fourth diffusion region (Nwell) 96 is coupled with a second supply line applied a ground voltage Vss of 0V which is applied through a highly doped diffusion region (n +) 98 doped n-type impurities more than the fourth diffusion region 96. In the first embodiment, a internal bias generating line applied a substrate bias Vbb generated by the substrate bias generating circuit 80 is coupled with the p-type substrate 10 through a highly doped p-type diffusion region (p +) 34 on the outside of the protection device 88. The substrate bias Vbb of the p-type substrate 10 is pulled down to a lower potential than the ground voltage Vss. (Parasitic circuit in the first embodiment) A parasitic circuit in the first embodiment will be described as follows. The parasitic circuits formed in the internal circuit 12 and the tolerance device 74 are the same as those of the first and second comparative examples, of which explanation is omitted. With regard to the protection device 88, the third diffusion region (p +) 94, the first diffusion region (Nwell) 90 and the p-type substrate 10 respectively correspond to an emitter, a base and a collector and form an npn-type third parasitic transistor (third parasitic Tr) 100. The fourth diffusion region (Nwell) 96, the p-type substrate 10 and the first diffusion region (Nwell) 90 respectively correspond to an emitter, a base and a collector and form an npn-type fourth parasitic transistor (fourth parasitic Tr) 102 which is shown at two places in Fig. 1. The n-type diffusion region 90 including the p-type third diffusion region 94 and the second diffusion region 92, the p-type substrate 10 and the fourth diffusion region 96 form a Semiconductor Controlled Rectifier (SCR) device. Namely, the third parasitic Tr 100 and the fourth parasitic Tr 102 form the parasitic SCR. (Operation of the first embodiment) A latch-up phenomenon and the operation of the protection device 88 will be described with reference the case where a positive surge voltage occurs to the input terminal 62 according to the first embodiment. A surge current flowing from the input terminal 62 flows into the semiconductor device through the third diffusion region (p +) 94 of the protection device 88. The pn junction between the third diffusion region (p +) 94 and the first diffusion region (Nwell) 90 is corresponding to a forward bias for the positive surge. The pn junction responds at the time when the potential of the third diffusion region (p +) 94 increases a forward voltage Vf higher than that of the first diffusion region (Nwell) 90. Then the surge current can be discharged quickly to the supply voltage Vcc as base current of the third parasitic Tr 100. Consequently, the semiconductor device according to the first embodiment can prevent a transient voltage from being applied to a gate and has a sufficient electrostatic break down tolerance without a protection resistor having large resistance. The transient voltage occurring by the break down is described in the third comparative example. A part of of the surge current flows into the p-type substrate 10 as a collector current of the third parasitic Tr 100. When the potential of the p-type substrate 10 increases a forward voltage Vf higher than that of the fourth diffusion region 96 because of the collector current, a base-emitter junction of the fourth parasitic Tr is biased forward and the base current flows into the fourth parasitic Tr. Namely, the surge current flowing into the p-type substrate is discharged to the ground voltage Vss as the base current of the fourth parasitic Tr through the highly doped diffusion region (n +) 98. The fourth diffusion region 96 is formed with surrounding the first diffusion region (Nwell) 90 having the third diffusion region (p +) 94, so that the surge current flowing into the p-type substrate 10 is almost discharged from the fourth diffusion region 96 (the current is corresponding to the current i1 in the first comparative example). Therefore the region where the substrate potential Vbb is pulled up by the surge current is substantially limited within the region surrounded by the fourth diffusion region 96. Consequently, the semiconductor device according to the first embodiment can prevent the substrate potential of the highly doped p-type diffusion region (p +) 34 from increasing, which is coupled with the substrate bias generating circuit 80 on the outside of the protection device 88. As mentioned above, the positive surge flowing from the input terminal 62 can almost be discharged as the current i1 within the protection device 88, so that the current i2 flowing into the internal circuit 12 can be reduced and the latch-up can be prevented from occurring in the internal circuit 12. On the other hand, in case a negative surge voltage is applied from a input terminal, as mentioned in the third comparative example, the negative surge current can quickly be discharged by the tolerance device 74. The tolerance device is formed with a conventional multicollector type latch-up protection circuit so that the latch-up can be prevented from generating. Consequently, the semiconductor device according to the first embodiment has a tolerance of the electrostatic break down and the latch-up against both positive and negative surges. (Second preferred embodiment) Referring to the Fig. 3 and the Fig. 4, a second preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 3 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a second embodiment of the present invention. Fig. 4 shows a schematic pattern layout of the semiconductor device according to the second embodiment of the present invention. The sectional view of the electrostatic breakdown protection device 124 and the latch-up protection device 126 in Fig. 3 is sectioned at the X - X line shown in Fig. 4. In Fig. 4, field oxide films 106, electrodes and so on are omitted and the hatching is partly used in spite of the plane pattern not sectional view, so as to understand the present invention easily. (Structure of the second embodiment) The semiconductor device according to the second embodiment has reversed conductivity type and reversed coupling relation between the supply voltage Vcc and the ground voltage Vss to those of the first embodiment. The semiconductor device according to the second embodiment, as shown in Fig. 3, has a substrate voltage generating circuit 80 for generating a substrate bias to be applied to an n-type substrate 120, a CMOS internal circuit 122, an electrostatic breakdown protection device (tolerance device) 124 for preventing the CMOS internal circuit 122 from being electrostatically broken down and a latch-up protection device (protection device) 126 for preventing a latch-up from occurring in the CMOS internal circuit 122. Generally there are a plurality of internal circuits (not shown in Fig. 3) on the n-type substrate 120. An n-type MOS transistor (NMOS Tr) 128 constituting the CMOS internal circuit 122 is formed in a p-type well region (Pwell) 130 on the n-type substrate 120. The ground voltage Vss of 0 V is applied to the drain (n +) 132 of the NMOS Tr 128 and the Pwell 130. The ground voltage Vss is applied to the Pwell 130 through a highly doped p-type diffusion region (p +) 136 doped p-type impurities more than those of the Pwell 130. An p-type MOS transistor (PMOS Tr) 138 constituting the CMOS internal circuit 122 is formed on the n-type substrate 120. The ground voltage Vss of 0 V is applied to the source (p +) 144 of the PMOS Tr 138 and the n-type substrate 120. And the supply voltage Vbb is applied to the n-type substrate 120 through a highly doped n-type diffusion region (n +) 150 doped n-type impurities more than those of the n-type substrate 120. The tolerance device 124 has a first p-type diffusion region (p +) 146 and a second p-type diffusion region (p +) 148 on the n-type substrate 120. The first p-type diffusion region 148 is coupled with an input terminal through an input line. The supply voltage Vcc of 3.0 V is applied to the p-type diffusion region 148. The protection device 126 has a p-type first diffusion region (Pwell) on the n-type substrate 120. The first diffusion region 158 has a highly doped p-type second diffusion region (p +) 160 doped impurities more than those of the first diffusion region 160 and an n-type third diffusion region (n +) 162 separated from the second diffusion region 160. A p-type fourth diffusion region (Pwell) 164 is formed at region substantially surrounding but separated from the first diffusion region 158 on a surface of the n-type substrate 120. The third diffusion region 162 is coupled with an input line. The second diffusion region (p +) 160 is coupled with a ground line as a first supply line applied the ground voltage Vss of 0 V. The fourth diffusion region (Pwell) 164 is coupled with a supply line as a second supply line applied the supply voltage Vcc of 3.0 V through a highly doped p-type diffusion region (p +) 166 doped more than those of the fourth diffusion region 164. In the second embodiment, an internal potential line applied a substrate bias Vbb generated by the substrate bias generating circuit 80 is coupled with the n-type substrate 120 through a highly doped n-type diffusion region (n +) 150 on the outside of the protection device 126. The substrate bias Vbb of the n-type substrate 120 is pulled up higher than the supply voltage Vcc. (Parasitic circuit of the second embodiment) A parasitic circuit of the second embodiment will be described as follows. An npn and pnp conductivity type in the parasitic circuit according to the second embodiment is reversed the conductivity type in the first embodiment. In the second embodiment, the drain (n +) 132 of the NMOS Tr in the internal circuit 122, the Pwell 130 and the n-type substrate 120 respectively correspond to an emitter, a base and a collector and constitute an npn-type first parasitic Tr 168. The base of the first parasitic Tr 168 is coupled with aground voltage through the highly doped p-type diffusion region (p +) 136 in the Pwell 130 of the internal circuit 122. A parasitic well resistor R1, 170 is formed between the base and the p-type highly doped diffusion region (p +) 136. The source (n +) 146 of the PMOS Tr 138 in the internal circuit 122, the n-type substrate 120 and the Pwell 130 respectively correspond to an emitter, a base and a collector and constitute a pnp-type second parasitic Tr 172. The p-type first diffusion region (p +) 146 in the tolerance device 124, the n-type substrate 120 and the p-type second diffusion region (p +) 148 respectively correspond to an emitter, a base and a collector and constitute a fifth parasitic bipolar Tr 152. The third diffusion region (n +) 162 in the protection device 126, the first diffusion region (Pwell) 158 and the n-type substrate 120 respectively correspond to an emitter, a base and a collector and constitute an npn-type third parasitic Tr 154. The fourth diffusion region (Pwell) 164, the n-type substrate 120 and the first diffusion region (Pwell) 158 correspond to a emitter, abase and a collector and constitute a pnp-type fourth parasitic Tr 156. The n-type third diffusion region (n +) 162, the p-type first diffusion region (Pwell) 158 including the second diffusion region (p +) 160, the n-type substrate 120 and the p-type fourth diffusion region (Pwell) 164 form a SCR device. Namely, the third parasitic Tr 154 and the fourth parasitic Tr 156 form a parasitic SCR (Semiconductor Controlled Rectifier). (Operation of the second embodiment) (In the case negative surge occurs) An operation of a latch-up phenomenon and the protection device 126 will be described with reference to the case a negative surge voltage occurs to the input terminal 62 in the semiconductor device according to the second embodiment. The direction of the surge current i1 and i2 when the negative surge voltage occurs is in reverse to that of the surge current i1 and i2 shown in Fig. 1. The negative surge flowing from the input terminal 62 flows into the semiconductor device through the third diffusion region (n +) 162 of the protection device 126. In this case, the pn junction between the third diffusion region (n +) 162 and the first diffusion region (Pwell) 158 corresponds to forward bias for the negative surge. The pn junction responds at the time when the potential of the third diffusion region (n +) 162 decreases a forward voltage Vf lower than that of the first diffusion region (Pwell) 158. Then the surge current can be discharged quickly to the ground voltage Vss as base current of the third parasitic Tr 154. Consequently, the semiconductor device according to the second embodiment can prevent a transient voltage from being applied to a gate and has a sufficient electrostatic break down tolerance without a protection resistor having large resistance. The transient voltage occurring by the break down is described in the third comparative example. A part of of the surge current flows into the n-type substrate 120 as a collector current of the third parasitic Tr 154. When the potential of the n-type substrate 120 decreases a forward voltage Vf lower than that of the fourth diffusion region 164, a base-emitter junction of the fourth parasitic Tr is biased forward and the base current flows into the fourth parasitic Tr. Namely, the surge current flowing into the n-type substrate 120 is discharged to the supply voltage source Vcc as the base current of the fourth parasitic Tr through the highly doped diffusion region (p +) 166. The fourth diffusion region 164 is formed with surrounding the first diffusion region (Pwell) 158 having the third diffusion region (n +) 162, so that the surge current flowing into the n-type substrate 120 is almost discharged from the fourth diffusion region 164 (the current is corresponding to the current i1 in the first comparative example). Therefore the region where the substrate potential Vbb is pulled down by the surge current is substantially limited within the region surrounded by the fourth diffusion region 164. Consequently, the semiconductor device according to the second embodiment can prevent the substrate potential of the highly doped n-type diffusion region (n +) 150 from decreasing, which is coupled with the substrate bias generating circuit 80 on the outside of the protection device 126. As mentioned above, the negative surge flowing from the input terminal 62 can almost be discharged as the current i1 within the protection device 126, so that the current i2 flowing into the internal circuit 122 can be reduced and the latch-up can be prevented from occurring in the internal circuit 122. (In the case positive surge occurs) An operation of the semiconductor device according to the second embodiment will be described with reference to the case a positive surge voltage is applied from a input terminal 62. The positive surge flowing from the input terminal 62 flows into the semiconductor device through the p-type first diffusion region (p +) 146 of the tolerance device 124. The direction of the positive surge corresponds to a forward bias for the base-emitter junction of the fifth parasitic Tr 152. The fifth parasitic Tr 152 is turned on by the positive surge at the time when the potential of the p-type first diffusion region (p +) 146 increases a forward voltage Vf higher than that of the n-type substrate 120. Then the surge current can be discharged quickly to a supply voltage source Vcc in Fig. 3 as collector current of the fifth parasitic Tr 152. Consequently, the semiconductor device according to the second embodiment can achieve sufficient tolerance. Further the tolerance device is formed with a conventional multicollector type latch-up protection circuit so that the latch-up can be prevented from generating in case the positive surge occurs. Consequently, the semiconductor device according to the second embodiment has a tolerance of the electrostatic break down and the latch-up against both positive and negative surges. (Third preferred embodiment) Referring to the Fig. 5 and the Fig. 6, a third preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 5 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a third embodiment of the present invention. Fig. 6 shows a schematic pattern layout of the semiconductor device according to the third embodiment of the present invention. The sectional view of the electrostatic breakdown protection device 74 and the latch-up protection device 88 in Fig. 5 is sectioned at the X - X line shown in Fig. 6. In Fig. 6, field oxide films 106, electrodes and so on are omitted and the hatching is partly used in spite of the plane pattern not sectional view, so as to understand the present invention easily. The semiconductor device according to the third embodiment has the same structure as the semiconductor device according to the first embodiment except for a gate electrode 174 of an MOS Tr on a gate oxide film (not shown in Fig. 5) on a first diffusion region 90 between a second diffusion region 92 and a third diffusion region 94 in the protection device 88. The same parts in the third embodiment as the first embodiment are shown with the same reference character and are partly omitted those explanation. An explanation of an operation of the third embodiment in case a surge voltage occurs is omitted because it is the same as that of the first embodiment. In the semiconductor device according to the third embodiment, the second diffusion region 92 and the third diffusion region 94 respectively perform like a source and a drain of an MOS Tr. A supply voltage Vcc of 3.0 V is applied to the gate electrode 174. The channel under the gate electrode 174 is kept closed (off). Consequently, the second diffusion region 92 and the third diffusion region 94 are separated by the gate electrode 174 each other. The distance between the second diffusion region 92 and the third diffusion region 94 so as to separate each other can be shorter than that in case the field oxide film 106 is formed according to the first embodiment, by forming the gate electrode 174. Consequently, the area occupied by a latch-up protection device can be reduced. (Fourth preferred embodiment) Referring to the Fig. 7 and the Fig. 8, a fourth preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 7 is a cross-sectional view typically showing 8 semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a fourth embodiment of the present invention. Fig. 8 shows a schematic pattern layout of the semiconductor device according to the fourth embodiment of the present invention. The sectional view of the electrostatic breakdown protection device 124 and the latch-up protection device 126 in Fig. 7 is sectioned at the X - X line shown in Fig. 8. In Fig. 8, field oxide films 106, electrodes and so on are omitted and the hatching is partly used in spite of the plane pattern not sectional view, so as to understand the present invention easily. The semiconductor device according to the fourth embodiment has the same structure as the semiconductor device according to the second embodiment except for a gate electrode 174 of an MOS Tr on a gate oxide film 188 on a first diffusion region 158 between a second diffusion region 160 and a third diffusion region 162 in the protection device 126. The same parts in the fourth embodiment as the second embodiment are shown with the same reference character and are partly omitted those explanation. An explanation of an operation of the fourth embodiment in case a surge voltage occurs is omitted because it is the same as that of the second embodiment. In the semiconductor device according to the fourth embodiment, the second diffusion region 160 and the third diffusion region 162 respectively have similar structure to a source and a drain of an MOS Tr. A ground voltage Vss of 0 V is applied to the gate electrode 174. The channel under the gate electrode 174 is kept closed (off), so that the second diffusion region 160 and the third diffusion region 162 are separated by the gate electrode 174 each other. The distance between the second diffusion region 160 and the third diffusion region 162 so as to separate each other can be shorter than that in case the field oxide film 106 is formed according to the first embodiment, by forming the gate electrode 174. Consequently, the area occupied by a latch-up protection device can be reduced. (Fifth preferred embodiment) Referring to the Fig. 9 and the Fig. 10, a fifth preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 9 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a fifth embodiment of the present invention. Fig. 10 shows a schematic pattern layout of the semiconductor device according to the fifth embodiment of the present invention. The sectional view of the tolerance device 74 and the protection device 88 in Fig. 9 is sectioned at the X - X line shown in Fig. 10. In Fig. 10, field oxide films 106, electrodes and so on are omitted and the hatching is partly used in spite of the plane pattern not sectional view, so as to understand the present invention easily. The semiconductor device according to the fifth embodiment has the same structure as the semiconductor device according to the first embodiment except for the fourth diffusion region 96 in the protection device 88 performing a collector in npn-type parasitic bipolar Tr. The same parts in the fifth embodiment as the first embodiment are shown with the same reference character and are omitted those explanation. An explanation of an operation of the fifth embodiment in case a surge voltage occurs is omitted because it is the same as that of the first embodiment. In the semiconductor device according to the fifth embodiment, the fourth diffusion region 96 in the protection device 88, which is coupled with a ground voltage source Vss through the highly doped diffusion region 98, also performs as the second n-type diffusion region 82 in the tolerance device 74 according to the first embodiment shown in Fig. 1. The first n-type diffusion region 76, the p-type substrate 10 and the fourth diffusion region 96 respectively correspond to an emitter, a base and a collector and form an npn-type parasitic bipolar Tr 86a. A negative surge flowing from an input terminal corresponds to a forward bias for the parasitic bipolar Tr 86a. Consequently, the parasitic bipolar Tr 86a serves the same as the tolerance device 74. In the fifth embodiment, the fourth diffusion region 96 serves both as that of protection device 88 and the second n-type diffusion region 82 of the tolerance device 74 in the first embodiment. Consequently, the area occupied by the protection device and the tolerance device can be reduced smaller than that of the semiconductor device according to the first embodiment, with keeping the latch-up tolerance and the electrostatic break down tolerance. (Sixth preferred embodiment) Referring to the Fig. 11 and the Fig. 12, a sixth preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 11 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a sixth embodiment of the present invention. Fig. 12 shows a schematic pattern layout of the semiconductor device according to the sixth embodiment of the present invention. The sectional view of the electrostatic breakdown protection device 124 and the latch-up protection device 126 in Fig. 10 is sectioned at the X - X line shown in Fig. 12. In Fig. 12, field oxide films 106, electrodes and so on are omitted and the hatching is partly used in spite of the plane pattern not sectional view, so as to understand the present invention easily. The semiconductor device according to the sixth embodiment has the same structure as the semiconductor device according to the second embodiment except for the fourth diffusion region 164 in the protection device 126 performing a collector in pnp-type parasitic bipolar Tr. The same parts in the sixth embodiment as the second embodiment are shown with the same reference character and are omitted those explanation. An explanation of an operation of the sixth embodiment in case a surge voltage occurs is omitted because it is the same as that of the second embodiment. In the semiconductor device according to the sixth embodiment, the fourth diffusion region 164 in the protection device 126, which is coupled with a supply voltage source Vcc through the highly doped diffusion region 166, also performs as the second p-type diffusion region 148 in the tolerance device 124 according to the second embodiment shown in Fig. 3. The first p-type diffusion region 146, the n-type substrate 120 and the fourth diffusion region 164 respectively correspond to an emitter, a base and a collector and form an pnp-type parasitic bipolar Tr 152a. A positive surge flowing from an input terminal corresponds to a forward bias for the parasitic bipolar Tr 152a. Consequently, the parasitic bipolar Tr 152a serves the same as the tolerance device 124. In the sixth embodiment, the fourth diffusion region 164 serves both as that of protection device 126 and the second n-type diffusion region 82 of the tolerance device 124 in the second embodiment. Consequently, the area occupied by the protection device and the tolerance device can be reduced smaller than that of the semiconductor device according to the second embodiment, with keeping the latch-up tolerance and the electrostatic break down tolerance. (Seventh preferred embodiment) Referring to the Fig. 13, the Fig 14 and the Fig. 15, a seventh preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 13 shows a schematic pattern layout of the semiconductor device according to the seventh embodiment of the present invention. In Fig. 13, field oxide films 106 and so on are omitted so as to understand the present invention easily. Fig. 14 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a seventh embodiment of the present invention, sectioned at the A - A line shown in Fig. 13. Fig. 15 is a cross-sectional view typically showing a semiconductor device including diffusion regions and electrodes according to a seventh embodiment of the present invention, sectioned at the B - B line shown in Fig. 13. The semiconductor device according to the seventh embodiment has the same structure as the semiconductor device according to the first embodiment except for a resistor for preventing an electrostatic break down which is formed with a part of the third diffusion region in the protection device 88 (See Fig. 1). The same parts in the seventh embodiment as the first embodiment are shown with the same reference character and are omitted those explanation. An explanation of an operation of the seventh embodiment in case a surge voltage occurs is omitted because it is the same as that of the first embodiment. In the semiconductor device according to the seventh embodiment, a control line 180 electrically coupled with a gate electrode in a CMOS internal circuit is electrically coupled with the third diffusion region 94 in the protection device 88. The control line (metallic line for coupling gates) 180 is coupled with the third diffusion region 94 through a first coupling hole 182. The third diffusion region 94 is electrically coupled with an input line 184 coupled with an input terminal through a second coupling hole 186. A part of the third diffusion region 94 between the first coupling hole 182 and the second coupling hole 186 is used as the resistor for preventing an electrostatic break down (input protection resistor) 188 as shown in Fig. 15. The semiconductor device according to the seventh embodiment has the input protection resistor 188 of the most simple structure as a resistor for preventing the electrostatic break down. The input protection resistor 188 delays to apply a positive surge to a gate oxide film in a CMOS internal circuit. The delay time of the input protection resistor 188 can be adjusted by changing the size of the input protection resistor 188 so as not to affect a normal signal transmission of a semiconductor device. In the Fig. 13, the Fig. 14 and the Fig. 15, 190 and 192 respectively show metal lines for coupling with a ground voltage source Vss and a supply voltage source Vcc. The metal line 190 for coupling with the Vss is coupled with the fourth diffusion region 98 through a coupling hole 196 holed through a insulating layer 194. The metal line 192 for coupling with the Vcc is coupled with the second diffusion region 92 through a coupling hole 196 holed through a insulating layer 194. A surface protection layer 198 is formed on the surface. The semiconductor device according to the seventh embodiment shown in Fig. 14 has a third parasitic Tr 100 and a fourth parasitic Tr 102. The semiconductor device according to the seventh embodiment has a device for preventing the electrostatic break down in the protection device 88 so that the input protection resistor 188 prevents itself from being a new source of a latch-up trigger current. In the seventh embodiment, both third diffusion region 94 in the protection device 88 and input protection resistor 188 of the most simple structure as tolerance device are formed in a diffusion region so that this semiconductor device has an electrostatic break down tolerance without reducing a latch-up tolerance. (Eighth preferred embodiment) Referring to the Fig. 16, the Fig. 17 and the Fig. 18, a eighth preferred embodiment of the semiconductor devices according to the present invention is shown. Fig. 16 shows a schematic pattern layout of the semiconductor device according to the eighth embodiment of the present invention. In Fig. 16, field oxide films 106 and so on are omitted so as to understand the present invention easily. Fig. 17 is a cross-sectional view typically showing a semiconductor device including diffusion regions, electrodes and a parasitic circuit, according to a eighth embodiment of the present invention, sectioned at the A - A line shown in Fig. 16. Fig. 18 is a cross-sectional view typically showing a semiconductor device including diffusion regions and electrodes according to a seventh embodiment of the present invention, sectioned at the B - B line shown in Fig. 16. The semiconductor device according to the eighth embodiment has the same structure as the semiconductor device according to the second embodiment except for a resistor for preventing an electrostatic break down which is formed with a part of the third diffusion region in the protection device 126 (See Fig. 3). The same parts in the eighth embodiment as the second embodiment are shown with the same reference character and are omitted those explanation. An explanation of an operation of the eighth embodiment in case a surge voltage occurs is omitted because it is the same as that of the second embodiment. In the semiconductor device according to the eighth embodiment, a control line 180 electrically coupled with a gate electrode in a CMOS internal circuit is electrically coupled with the third diffusion region 162 in the protection device 126. The control line (metallic line for coupling gates) 180 is coupled with the third diffusion region 162 through a first coupling hole 182. The third diffusion region 162 is electrically coupled with an input line 184 coupled with an input terminal through a second coupling hole 186. A part of the third diffusion region 162 between the first coupling hole 182 and the second coupling hole 186 is used as the resistor for preventing an electrostatic break down (input protection resistor) 188 as shown in Fig. 18. The semiconductor device according to the eighth embodiment has the input protection resistor 188 of the most simple structure as a resistor for preventing the electrostatic break down. The input protection resistor 188 delays to apply a positive surge to a gate oxide film in a CMOS internal circuit. The delay time of the input protection resistor 188 is adjustable by changing the size of the input protection resistor 188 so as not to affect a normal signal transmission of a semiconductor device. In the Fig. 16, the Fig. 17 and the Fig. 18, 190 and 192 respectively show metal lines for coupling with a ground voltage source Vss and a supply voltage source Vcc. The metal line 190 for coupling with the Vss is coupled with the second diffusion region 160 through a coupling hole 196 holed through a insulating layer 194. The metal line 192 for coupling with the Vcc is coupled with the fourth diffusion region 166 through a coupling hole 196 holed through a insulating layer 194. A surface protection layer 198 is formed on the surface. The semiconductor device according to the eighth embodiment shown in Fig. 17 has a third parasitic Tr 154 and a fourth parasitic Tr 156. The semiconductor device according to the eighth embodiment has a device for preventing the electrostatic break down in the protection device 126 so that the input protection resistor 188 prevents itself from being a new source of a latch-up trigger current. In the eighth embodiment, both third diffusion region 162 in the protection device 126 and input protection resistor 188 of the most simple structure as a tolerance device are formed in a diffusion region so that this semiconductor device has an electrostatic break down tolerance without reducing a latch-up tolerance. While the present invention has been described with reference to the particular illustrative embodiments, it is not to be restricted by those embodiments but only by the appended claims. For example, the fourth diffusion region, which is formed with surrounding the whole first diffusion region on the surface of the substrate, does not need to be formed with surrounding the whole diffusion region but may be formed with a plane pattern of "U" shape. In summary, it will be seen that the present invention provides a semiconductor device which allows to flow surge from an input line to a first or second supply voltage source line through the SCR which is the parasitic bipolar Tr in the protection device. Consequently, the semiconductor device reduces the surge flowing into a CMOS internal circuit and has a latch-up tolerance and an electrostatic break down tolerance without delaying operation speed. Moreover, the area occupied by the protection device can be reduced because the distance between the second and third diffusion regions which is separated by a gate electrode can be shorter than the distance separated by a field oxide film.

Claims: Semiconductor device circuit including a substrate bias generating circuit (80) for generating a substrate bias to be applied to a semiconductor substrate (10, 120) of a first conductive type, a CMOS circuit (12, 122) formed on the semiconductor substrate (10, 120) and a first protection circuit (88.126) formed on the semiconductor substrate (10, 120) for preventing a latch-up from occurring in the CMOS circuit (12, 122), the first protection circuit (88.126) comprising: a first diffusion region of a second conductive type (90, 158) formed on the substrate (10, 120); a second diffusion region of the second conductive type (92, 160) doped more than said first diffusion region (90, 158), formed in said first diffusion region (90, 158); a third diffusion region of the first conductive (94, 162) type formed apart from said second diffusion region (92, 160) in said first diffusion region (90, 158); and a fourth diffusion region of the second conductive type (96, 164) surrounding said first diffusion region (90, 158) formed apart from said first diffusion region on the surface of the substrate (10, 120); wherein said second diffusion region (92, 160) is electrically coupleable with a first power supply, V CC , said third diffusion region (94, 162) is electrically coupled with an input line (input), said fourth diffusion region is electrically coupleable with a second power supply, V SS , having different potential from the first power supply, V CC , and the substrate (10, 120) is electrically coupled with the substrate bias generating circuit (80) at the outside of the first protection circuit (88, 126). Semiconductor device circuit according to claim 1, wherein the first protection circuit (88.126) further comprises a control gate electrode formed on said first diffusion region ( 90, 158) between said second diffusion region (92, 160) and said third diffusion region (94, 162). Semiconductor device circuit according to claim 1, further comprising a second protection circuit which is an bipolar transistor, and wherein said fourth diffusion region (96, 164) is operable as a collector of said bipolar transistor. Semiconductor device circuit according to claim 1, further comprising a protection resistor as a second protection circuit for preventing electrostatic breakdown from occurring in the CMOS circuit, said protection resistor is formed by using a part of said third diffusion region (94, 162). Semiconductor device circuit according to claim 4, wherein the protection resistor comprises a first electrode on said third diffusion region (94, 162) and electrically coupled with a control gate electrode in the CMOS circuit and a second electrode on said third diffusion region (94, 162) coupled with the input line, and a part of said third diffusion region (94, 162) between the first electrode and the second electrode is operable as the protection resistor of said second protection circuit. Semiconductor device circuit according to claim 1 including a semiconductor controlled rectifier device (154, 156) for preventing a latch-up from occurring in the CMOS circuit, and a second protection circuit (74, 124) for preventing electrostatic breakdown from occurring in the CMOS circuit (12, 122). Semiconductor device circuit according to claim 6,wherein the semiconductor controlled rectifier device further comprises an bipolar transistor and said third diffusion region is operable as a collector of said bipolar transistor. Semiconductor device circuit according to claim 6, wherein the semiconductor controlled rectifier device comprises a resistor and a part of said second diffusion region is operable as the resistor. Semiconductor device circuit according to claim 8, wherein the resistor comprises a first electrode on said second diffusion region and electrically coupled with a control gate electrode in the CMOS circuit and a second electrode on said second diffusion region coupled with the input line, and a part of said second diffusion region between the first electrode and the second electrode is operable as the register. resistor.

Inventors: KATO KATSUHIRO, KIKUCHI HIDEKAZU, KATO, KATSUHIRO, KIKUCHI, HIDEKAZU, Kato, Katsuhiro, c/o OKI ELECTRIC IND. CO., LTD., Kikuchi, Hidekazu, c/o Oki Electric Ind. Co., Ltd.
Applicants: OKI ELECTRIC IND CO LTD, OKI ELECTRIC INDUSTRY CO., LTD.
Application year: 1997
Main classification: H01L27
IPC codes: H01L27, H01L21, G11C11