Apparatus and method for analyzing crystal structure

Abstract: In a crystal structure analysis using an X-ray diffraction method or the like, using a measured value y 0 i of a sample and an expected crystal structure parameter, a vector F having the logarithmic conversion value of the measured value as a matrix element is determined by f i = k.log(y 1 + δ - b i ) from a value y i of the measured value y 0 i after count missing correction of a detector, a background strength b i and a positive value δ of less than 1, a vector F c having the logarithmic conversion value of the calculated value as a matrix element is obtained by f ci = k.log(y ci ) from the value vector obtained by calculation from the crystal structure parameter, a weighting matrix W is obtained from device function matrix, systematic error, and accidental error, and the calculated value vector F c is determined so that a residual square sum s (= (F-F c ) t W (F- F c )) obtained by multiplying a difference between F and F c by the weighting matrix is minimized and converged to obtain a crystal structure parameter.

Description: FIELD OF THE INVENTION This invention relates to a structural parameter analyzing apparatus and analyzing method, which is useful in research and development of various functional crystalline materials such as ceramics, metal materials, organic materials, and the like, and can be widely applied in crystal structure analyzing for all crystalline materials, whether polycrystal samples or single crystal samples, to obtain favorable effects. The present invention can also be applied to vibration analysis by Raman spectroscopy, surface state analysis by electron diffraction, band state analysis by photoluminescence method, and the like to obtain good effects as well. DESCRIPTION OF THE PRIOR ART As a crystal structure analyzing method for polycrystal materials, Rietveld method has been known, however, in the Rietveld crystal structure analysis by practical X-ray diffraction, since it is difficult to analyze light elements (such as anions) and heavy elements simultaneously because light elements are weak in diffraction strength, information of light elements could not be obtained even if applied to metal oxides or ceramics containing light and heavy elements. Therefore, a neutron source such as a nuclear reactor has been constructed to obtain information of light elements by the Rietveld crystal structure analysis method using a neutron diffraction method, however, construction of the neutron source has required an enormous cost. These are problems in the spectrum strength axis (axis of ordinates or y-axis) direction; on the other hand, regarding the resolution in the angular axis (axis of abscissas or x-axis) direction, since an ordinary counter-cathode type X-ray source is wide in wavelength width and has a doublet, a high-resolution result cannot be obtained unless a synchrotron orbital radiation (hereinafter referred to as SOR) is used, and an enormous cost has been required for construction of an accelerator as in the above-described nuclear reactor. The Rietveld crystal structure analysis method (hereinafter referred to as Rietveld method) will now be briefly described. In the Rietveld method, using equations of s = Σw i (y i - y ci ) 2 and w i = 1/y i , a crystal structure parameter to minimize s is obtained by a nonlinear least square method, wherein y i is a measured value (called an observation value or count value) of diffraction strength, y ci is a calculation value, w i is a statistical weighting, suffix i is a number of measuring point, and s is a residual square sum. The calculation value y ci is obtained by calculation from a crystal structure parameter previously expected for the sample, a crystal structure parameter which minimizes s, obtained by repeating calculation of y ci by successively changing the crystal structure parameter from its initial value so that s becomes a minimum, which is determined to be the crystal structure analytical result of the sample. As can be seen from these formulae, the Rietveld method considers only statistical variations (called accidental errors, white noise, quantum noise, or Poisson distribution), but does not consider systematic errors. Further, to extract all of information included in the data by the least square method, it is considered to be the best that the relation of w ∝ 1/σ i 2 (σ i 2 is a variance at measuring point i) to the measured value and calculated value of weighting factor w i appearing in the normal equation, or more strictly, to be set to W ∝ Σ -1 as a weighting matrix W including a non-diagonal term, however, this principle is not observed in the Rietveld method. In spite of the fact that, normally, a systematic error exceeding the statistical variation is present in the covariation matrix, but omitted in the weighting matrix to be an inverse matrix, which has been a problem. Therefore, these problems become remarkable for longer measuring time or for weaker diffraction lines, which makes it difficult to achieve analysis of light elements or trace ingredients and analysis with high resolution. To obtain information of light elements in heavy elements by a practical X-ray diffraction method, it is necessary to improve the Rietveld crystal structure analysis method for higher precision in order to extract information of light elements contained slightly in the diffraction spectrum as much as possible. Further, to obtain a high resolution by a low-resolution X-ray diffraction method, it is necessary to actually measure a spread of diffraction line due to the measuring device (hereinafter referred to as device function) and make substantial inverse calculation to achieve high resolution. In general, to extract all of information included in the data by the least square method, it is said to be the best that, as shown above, weighting factor w i appearing in the normal equation is set to the following formula (w i is proportional to 1/δ i 2 , and 1/δ i 2 is equal to <1/(y i -y ci ) 2 >, wherein the value in < > shows an expectation value, to the measured value y i and calculated y ci , or more strictly, the weighting matrix W is set to another following formula to the measured value vector F and calculated value vector F c . To correctly set the weighting matrix W, it is the most important to exactly evaluate a difference between the measured value and the calculated value, that is, the cause of the error. w i ∝ 1/σ i 2 = <1/(y i -y ci ) 2 > wherein the value in < > indicates an expectation value. W ∝ Σ -1 = <(F-F c ) t (F-F c )> wherein W is a weighting matrix, Σ is a covariation matrix, F is a vector having f i = k.log(y i + δ - b i ) as a matrix element, F c is a vector having f ci = k.log(y ci ) as a matrix element. Yi is a i'th measured value after count missing correction, and k is an optional constant, i is a number of measuring point, δ is a positive number of less than 1, bi is an l'th background strength, the value in < > is an expectation value, and the right side t indicates a transposition matrix. However, as described above, the Rietveld method is a method for analyzing the crystal structure using a nonlinear least square method, and only considers the statistical variation but cannot analyze the magnitude of error in detail. This is the cause that the prior art Rietveld method cannot provide a sufficient effect for light elements. Further, in spite of the fact that information spread due to the measuring device itself is often included in the spectrum, this information is not utilized, and the resolution cannot be enhanced. In the document: Kisi E.H. "Rietveld analysis of powder diffraction patterns" Materials Forum, volume 18, 1994, pages 135-153, XP00 20566617, the Rietveld Analysis is described in detail. However, the contents of this document does not go beyond the subject-matter of the Rietveld analysis. The cited prior art discloses a structural parameter analyzing apparatus comprising a structural parameter setting unit for previously setting a structural parameter value, a data input unit for inputting a measured value of a sample, calculated value calculation means for determining a calculated value corresponding to the measured value according to the structural parameter value from said structural parameter setting unit, sum total calculation means for obtaining a sum total, a determination unit for determining a minimum out of a plurality of sum totals obtained by said sum total calculation means by varying the structural parameter value, and an output unit for outputting a structural parameter value corresponding to the minimum sum total. Further the cited prior art discloses a structural parameter analyzing method for determining a structure of a sample by using a measured value of the sample and an expected structural parameter value, comprising the steps of: determining a calculated value corresponded to the measured value according to the expected parameter value, changing the structural parameter value until said calculated and measured value converge and determining the structural paramete value at the convertions to be an analytical result. It is an object of the present invention to overcome said problems of the Rietveld method. This problem is solved with respect to the apparatus aspect by means of the features of claim 1. The apparatus comprises: first logarithmic conversion means for making logarithmic conversion of the calculated value, second logarithmic conversion means for logarithmic converting a value which is obtained by subtracting a value corresponding to a background noise strength from the measured value, and that sum total calculation means for squaring a difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion means to obtain said sum total. Preferred embodiments of the apparatus are described in claims 2 to 11. For the case of the method the problem is solved by the features of claim 12. The method comprises the steps of: obtaining a first logarithmic conversion value by logarithmic conversion of the calculated value and obtaining a second logarithmic conversion value by logarithmic conversion of the measured value subtracted by a background noise strength, further that the structure parameter value is changed, in said structural parameter value changing step, until said first and second logarithmic conversion values converge. Preferred embodiments of the method are described in claims 13 to 20. Brief description of the drawings BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a diagram showing flow of an embodiment of the crystal structure parameter analyzing method according to the present invention, Fig. 2 is a diagram showing structure of an embodiment of the crystal structure parameter analyzing apparatus according to the present invention; Fig. 3 is a diagram showing flow of an embodiment of the crystal structure parameter analyzing method according to the present invention; Fig. 4 is a diagram showing structure of an embodiment of the crystal structure parameter analyzing apparatus according to the present invention; Fig. 5 is a diagram showing flow of an embodiment of the crystal structure parameter analyzing method according to the present invention; Fig. 6 is a diagram showing structure of an embodiment of the crystal structure parameter analyzing apparatus according to the present invention; Fig. 7 is a diagram showing an example of measured data and background strength vector in diffraction spectrum processing; Fig. 8 is a graph enlarged in the axis of abscissas of profile fitting when device function is not considered; Fig. 9 is a graph enlarged in the axis of abscissas of profile fitting when device function is considered. DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will now be described with reference to the drawings. One of the embodiments is a crystal structure parameter analyzing apparatus which comprises a crystal structure parameter setting unit for previously storing a crystal structure parameter, a data input unit for inputting a measured value of a sample, calculated value calculation means for obtaining a calculated value corresponding to the measured value according to the crystal structure parameter from the crystal structure parameter setting unit, a first logarithmic conversion means for making logarithmic converting the calculated value, a second logarithmic conversion means for logarithmic converting a value obtained by subtracting a background noise strength from the measured value and adding a positive number of less than 1, a sum total calculation means for multiplying the transposition matrix (F-F c ) t of a difference between two logarithmic conversion value vectors obtained by the first and second logarithmic conversion means by the weighting matrix W obtained by the weighting means and by a difference (F-F c ) between two logarithmic conversion values obtained by the first and second logarithmic conversion means to obtain a sum total s, a determination unit for determining a minimum of a plurality of sum totals s obtained by the sum total calculation means by changing the crystal structure parameter, and an output unit for outputting the crystal structure parameter of the minimum sum total s. Further, another embodiment of the crystal structure parameter analyzing apparatus further comprises weighting calculation means for determining a weighting matrix W from a vector having two logarithmic conversion values obtained by the first and second logarithmic conversion means as a matrix element, wherein the sum total calculation means, multiplies the transposition matrix (F-F c ) t of a difference between two logarithmic conversion value vectors obtained by the first and second logarithmic conversion means by the weight matrix W obtained by the weighting means and by a difference (F-F c ) between two logarithmic conversion values obtained by the first and second logarithmic conversion means to obtain a sum total s, or comprises correction means for correcting a count missing of the detector for obtaining the measured value, wherein the second logarithmic conversion means subtracts the background noise strength from the measured value after correcting for count missing and adding a positive number of less than 1 and makes logarithmic conversion. s = (F-F c ) t W (F-F c ) W= (Σ POI +Σ SYS ) -1 wherein s is a residual square sum, i and j are numbers of measuring points, y i is an i'th measured value after count missing correction, y ci is an i'th calculated value, k is an optional constant, n is a total number of measuring points, m is a number of independent variables, δ is a positive number of less than 1. b i is an i'th background noise strength, W is a weight matrix of n lines and n rows, F is a vector of n lines and 1 row having f i = k.log(y i +δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k.log(y ci ) as a matrix element, Σ POI is a covariation matrix of n lines and n rows having k 2 (y i +δ-b i ) -2 (y i +δ) as a diagonal element due to white noise (Poisson distribution), Σ SYS is a covariation matrix of n lines and n rows due to systematic error, H is a device function matrix (spread function matrix due to measuring device) of n lines and n rows, H t is a transposition matrix of H. Further, one of the embodiments is a crystal structure parameter analyzing method, in which a calculated value corresponding to the measured value is determined according to the expected structural parameter, and the calculated value is logarithmic converted to obtain a vector having a first logarithmic conversion value as a matrix element, the background strength is subtracted from the measured value and a positive number o less than 1 is added and then logarithmic converted to obtain a vector having a second logarithmic conversion value as a matrix element, the structural parameter is changed until the first and second logarithmic conversion values are sufficiently close to each other, and the structural parameter at the close logarithmic conversion values is determined to be an analytical result, or, a calculated value corresponding to a measured value is determined according to an expected crystal structure parameter, the calculated value is logarithmic converted to obtain a vector having a first logarithmic conversion value as a matrix element, the measured value is corrected for count missing of the detector, the background noise strength is subtracted from the corrected measured value and a positive number of less than 1 is added, and the result is logarithmic converted to obtain a vector having a second logarithmic conversion value as a matrix element, a weighting matrix W is obtained by Formula 16 from vectors having the first and second logarithmic conversion values as matrix elements, the transposition matrix (F-F c ) t of a difference between vectors having two logarithmic conversion values obtained by the first and second logarithmic conversion means as matrix elements, the weighting matrix W obtained by the weighting means, and a difference (F-F c ) between the vectors having two logarithmic conversion values obtained by the first and second logarithmic conversion means as matrix elements are multiplied to obtain a sum total s, a minimum of a plurality of sum totals s obtained by changing the crystal structure parameter is determined, and the crystal structure parameter of the minimum sum total is outputted. The principle of the present invention will be described. First, experimentally, magnitudes of errors have been repeatedly measured, and found that errors can be represented almost exactly when it is assumed that there exist the following two kinds of errors, statistical variation and systematic error. (1) Statistical variation: this is an accidental error due to intensity variation theoretically occurring in light sources such as X-ray, and in the prior art methods, errors have been all assumed to be statistical variation. (2) Systematic error: this occurs in the measuring system due to errors such as the sample is not ideal, the shape is not good, or the sample is difficult to be pulverized, diffraction, or and error of the analytical apparatus itself, which in most cases, is several to 10 times greater than statistical variation. Then, where a measured value at a measuring point i is y i and a background noise strength is b i , when b i is subtracted from y i and a positive number δ of less than 1 is added (y i +δ-b i ) and logarithmic converted as log(y i +δ-b i ), it is found that almost constant systematic error is present in the logarithmic conversion value in all measuring points. It is considered that the statistical variation is represented by Poisson distribution, and the magnitude of variance is y i +δ(δ is a positive number of less than 1). When there are a number (r times) of measured data under the same condition, such as when the measured data is integrated. Poisson distribution is not assumed and σ ir-1 2 of each measuring point (point i) is actually measured, (y i +1/2) is replaced with actually measured rδ ir-1 2 , thereby including information of output variation of X-ray source and dark current of the detector and improving the accuracy. Further, in the systematic error, there exists a spread of diffraction line due to the measuring device. In the powder diffraction method, Si or LaB 6 is often mixed and coated as an angle standard sample. Since these are sufficiently good in crystallinity and show a spread (device function matrix H 0 ) of the device and light source, this information is utilized. In the analysis, first, only Si or LaBs mixed and coated as an internal standard is analyzed to determine a profile which depends on 2, and this profile is used as a matrix element in the row direction to obtain a device function matrix H 0 . Where a half width in the row direction of the actually measured device function matrix H 0 is h oi and a half with in the row direction of the device function matrix H used in the calculation is h i , the closer h i is spread to the actually measured h oi , the more the resolution is improved, but since this corresponds to narrowing of slits of the diffraction apparatus, S/N ratio is decreased on the contrary. Therefore, it is effective to continuously change h i according to S/N ratio [(f i -f min )/σ POI . Device function H used in the actual calculation is calculated. The center of mass is adjusted to move on the diagonal of the matrix so that the measuring angle (2 center of mass of diffraction line) is not moved by multiplying with the device function H, and the sum of each row is normalized to 1. h i = h 0i [1-p [σ POIi /( f i -f min ) ] ] σ POIi = [k 2 (y i +δ-b i ) -2 (y i +δ) ] 1/2 or when there are a plurality (r times) of measured data under the same condition, σ POIi = [k 2 (y i + δ - b i ) -2 (r σ ir-1 2 )] 1/2 wherein f min is a minimum value of measured value (after coordinate conversion), p is a constant to maintain S/N ratio at a constant value, r is a number of measurements under the same condition. From these matters, due to the law of propagation of errors, where the residual square sum is s, the weighting matrix is W, and the number of total measuring points is n, it is considered to be the best in the crystal structure analysis that using the Formula (s = (F-F c ) t W (F-F c )) and the Formula (W = (Σ POI +Σ SYS ) -1 , Σ SYS = [(F-F c ) t (F-F c )-(n-m)/Σ j (k 2 (y i +δ-b j ) -2 (y j +δ))]/n.H t H), the convergence calculation is used to minimize the residual square sum of the logarithmic conversion value vectors F and F c to determine the calculated value vector F c . The weighting matrix W of each measuring point may come out from the spectrum norm = 1 to cause it to be strictly 1, a coefficient is multiplied for re-normalization. Determination of the background strength bi is basically optional, however, it is normally drawn as a straight line as shown in Fig. 7 to avoid deformation of the diffraction line profile, and it is set as high as possible within the range satisfying the Formula (k.log(y i +δ-b i ) ≧ (k 2 (y i +δ-b i ) -2 (y i +δ)) at all measuring points. Spectrum Norm ∥W∥ i = 1 k.log(y i +δ-b i ) ≧ (k 2 (y i +δ-b i ) -2 (y i +δ) Further, a certain effect can be obtained even without multiplying the weighting matrix at each measuring point (even with W = E: E is a unit matrix). Still further, the number m of independent variables is subtracted from the number n of total measuring points, which is for strictness. However, in effect, since the number m of independent variables (parameters) such as lattice constant, half width, atomic coordinate, freedom of background setting are small in number and negligible as compared with the number n of total measuring points which is very large, a sufficient effect can be obtained even with m = 0 or omitted from the Formula. In the past, since errors have been all assumed to be statistical errors, high-strength peak errors including much systematic errors are excessively emphasized by the least square method, low-strength peaks are relatively neglected to coincide measured values of high strength with calculated values, however, in the present invention, by introducing the systematic errors and making logarithmic conversion, it is possible to exactly evaluate information of low-strength peaks including much information of light elements and trace ingredients without excessively emphasizing high-strength peak errors. Yet further, as to the resolution, by introducing the non-diagonal term of weighting matrix, although in effect being limited by the crystallinity of the standard sample, in principle, the resolution is improved infinitely as far as the measuring time is allowed. (Embodiments) Embodiments of the present invention will be described with reference to the drawings. In these embodiments, logarithmic conversion (logarithmic coordinate conversion) is applied to the measured value y i and calculated value y ci as shown in Fig. 7 in the Rietveld crystal structure analysis by a generally-used powder X-ray diffraction apparatus. (Embodiment 1) First, an embodiment of crystal structure parameter analyzing method will be described with reference to Fig. 5. As shown in Fig. 5, in step 1, a measured data y 0 i of a sample obtained from a detector by an X-ray diffraction method or a neutron diffraction method, and a crystal structure parameter expected for the sample are prepared. Further, since the detector has a dead time of count missing of the number of photons if a large number of photons are incident, as necessary, to correct for count missing of diffraction line strength by a dead time of the detector, a measured data of different strengths when irradiated X-ray strength or irradiated neutron strength of an optional material is changed is prepared, and in step 2, a dead time τ of the detector is calculated. The measured data y 0 i is inputted, for example, to a computer, as necessary using the dead time obtained in step 2, count missing correction of i'th measured data y 0 i is made in step 3, and the corrected value is determined as an i'th measured value y i . Here, a symbol c in Fig. 5 is a form factor by the detector circuit, and for the correction calculation, for example, the following y i = y 0 i /(1 - y 0 i .τ.c) of Formula 20 y i = y 0 i /(1 - y 0 i .τ.c) Next, in step 4, by the Formula (f i = k.log(y i +δ-b i )), using an i'th background strength b i , the i'th measured value y i is converted into a vector F having an i'th logarithmic conversion value as a matrix element. However, while δ is a positive number of less than 1, since it is generally unknown, it may be processed as δ = 1/2 for simplicity. Except for the case where the measuring time is extremely short, δ can be omitted or δ = 0 can be used. f i = k.log(y i +δ-b i ) In this conversion, so that the program of Rietveld method according to the value vector F after coordinate conversion can be used, as is, on the same order of the measure value y i or y 0 i (for example, normally 5000-6000 counts), an optional constant k (for example, about 600) is used. Further, as the background strength b i , it is set as high as possible to a straight line. Natural logarithm is used with the base of e, and any base of logarithm can be absorbed by setting of the constant k. After that, using initial crystal structure parameters such as lattice constant and space group prepared in step 1 by the prior art Rietveld method, in step 5, an i'th calculated value y ci corresponding to the i'th measured value y i is calculated by the strength formula by the Rietveld method same as the prior art. As step 6, the i'th calculated value y ci is converted by the Formula (f ci = k.log(y ci )) into a vector F c having the i'th logarithmic conversion value as a matrix element. Also in this conversion, for the same reason as step 4, the same constant k is used and natural logarithm is used. f ci = k.log(y ci ) Then in step 7, using the logarithmic conversion value vector F obtained in step 4 and the logarithmic conversion vector F c obtained in step 6, a weight matrix W at each measuring point i is calculated. As to the weighting matrix W, although the value calculated may come out from the spectrum norm = 1, it is renormalized to 1 by multiplying a coefficient. After that, in step 8, to the i'th logarithmic conversion value vector F obtained in step 4 and the i'th logarithmic conversion value vector F c , using the i'th weighting matrix W obtained in step 7, a determination is made as to whether or not the residual square sum s in the Formula (s = (F-F c ) t W (F-F c )) is minimized or converged, for example, in a computer. When it is converged within a predetermined range, step 9 is executed, or when it is not converged, an instruction is made to repeatedly execute the steps (5-8) after step 5. That is, in step 5, the crystal structure parameter is changed according to the residual square sum s to redetermine the calculated value vector F c . By repeating steps 5-8 as above, it is assumed that it will not be further minimized if a crystal structure parameter such as atomic configuration is changed. s = (F-F c ) t W (F-F c ) While solution of the nonlinear least square sum method to determine the structural parameter is optional, since there may be a case where the matrix is not positive definite if a non-diagonal term is introduced intc the weighting matrix W, or high resolution spectrum cannot be displayed if there is a non-diagonal term, it can be solved by decomposition as follows. In the solution to form the observation equation, where the vector having the structure parameter to be determined as a matrix element is X, a differential (Jacobian) matrix in the prior art Rietveld method is A°, a differential matrix in the present invention for converting the observed value into logarithm is A, and the observed value vector after logarithmic conversion given as F by is almost equal to AX, in the differential matrix, A can be approximated the solution X to be determined is given by Σ in the form of band matrix is decomposed by combining revised Cholesky decomposition UDU t with the diagonal matrix G. Wherein U is an upper triangular matrix, D is a diagonal matrix, and G is a matrix to normalize the sum of each line of the upper triangular matrix to 1. Since'the weighting matrix W' becomes a diagonal form when decomposed is solved, and substitution is made, high-resolution observed value F' and calculated value (GU) -1 Fc become spectrum displayable F ≒ AX A = LA 0 wherein L is a diagonal matrix of n lines and n rows having k.log(y i )/y i as a diagonal element. A t WAX=A t WF A t Σ -1 AX=A t Σ -1 F A' ( U t DU) -1 AX=A t ( U t DU) -1 F ((GU)- t A) t GD -1 G((GU) -t A)X =((GU) -t A) t GD -1 G((GU) -t F) ( GU) -t A=A' ( GU) -t F=F' GD -1 G=W' A' t W' A' X=A' t W' F' In step 9, the crystal structure parameter corresponding to the calculated value vector F c (i = 1 to n) when the residual square sum s is minimized and converged is determined to be a final crystal structure parameter, and the finally obtained crystal structure parameter is outputted from the computer. This output is used, for example, for a screen display device or a printer. (Embodiment 2) Next, a crystal structure parameter analyzing apparatus for calculating a crystal structure from a diffraction spectrum using the above-described crystal structure parameter analyzing method will be described with reference to Fig. 6. In Fig. 6, a crystal structure parameter analyzing apparatus 10 comprises a data input unit 11, a crystal structure parameter setting unit 12, a calculation unit 13, a determination unit 14, and an output unit 15. The calculation unit 13 comprises a correction unit 13A, a calculated value calculation unit 13B, a first logarithmic conversion unit 13C, a second logarithmic conversion 13D, and a weighting matrix calculation unit 13E, and a residual square sum s is obtained. Both the data input unit 11 and the crystal structure parameter setting unit 12 are connected to the calculation unit 13, the data input unit 11 is to input a measured data y 0 i of the sample obtained by a detector (not shown) to the calculation unit 13, the crystal structure parameter is to previously store an expected crystal structure parameter (initial value) by the prior art Rietveld method and input it to the calculation unit 13. The crystal structure parameter-comprises the lattice constant, the space group, the half width of peak (this half width parameter is not so important, but an appropriate setting gives faster convergence calculation), and the like, as described above. The calculation unit 13 is set. Specifically, the correction unit 13A, to correct for count missing of diffraction line strength due to a dead time of the detector, calculates a dead time τ of the detector using strong and weak measured data when the irradiation X-ray strength or irradiation neutron strength of an optional material, count missing correction of measured data y 0 i of the sample is made using the obtained dead time τ, and the corrected value is given as the measured value y i to the logarithmic conversion unit 13D. The calculated value calculation unit 13B, using initial crystal structure parameters such as lattice constant and space group, calculates a calculated value y ci corresponding to the measured value y i using the strength formula by the Rietveld method same as the prior art, and the result is given to the logarithmic conversion unit 13C. The logarithmic conversion unit 13C converts the calculated value y ci to a logarithmic coordinate value vector F c . On the other hand, the logarithmic conversion unit 13D converts the measured value y i into a logarithmic coordinate value vector F using the background strength b i and a positive number δ of less than 1. The weighting matrix calculation unit 13E, using the logarithmic conversion value vector F and the logarithmic conversion value vector F c , calculates a weighting matrix W at each measuring point i The weighting matrix W is further normalized to spectrum norm = 1. The calculation unit 13 determines a residual square sum (sum total) s using the thus obtained weighting matrix W and the two logarithmic conversion vectors F and F c . The determination unit 14 determines whether or not the measured value F and the calculated value F c after logarithmic conversion are sufficiently close to each other by whether or not the residual square sum s is minimized and converged. If not sufficiently close, it instructs the calculation unit 13 to make recalculation by changing the crystal structure parameter. If sufficiently close, it instructs to input the crystal structure parameter to the output unit 15. Thus, the determination unit 14 determines a minimum of a plurality of residual square sums obtained by the calculation unit 13. The output unit 15 is to inform the crystal structure parameter of the output result to the operator or the like, for example, comprises a screen display device or a printer. The crystal structure parameter analyzing apparatus 10 of the above construction is not limited to the above arrangement, but can be one which makes logarithmic coordinate conversion of the measured data y i and the calculated value y ci obtained by the Rietveld method from a crystal structure parameter as the initial value to obtain a crystal structure parameter which reproduces the actually measured logarithmic conversion value vector F most exactly. For example, it is possible to construct the data input unit 11 and the crystal structure parameter setting unit 12 in a single input device. Further, it is also possible to incorporate the determination unit 14 in the calculation unit 13. Next, operation of the above crystal structure parameter analyzing apparatus 10 will be described with reference to analysis examples of, for example, α-Al 2 O 3 (NBS strength standard sample NIST1976), Y 2 O 3 -stabilized zirconia (containing 7.36 mole % Y 2 O 3 , sintered at 1400°C, lh, and kept at 1000°C for 5500h) and Ca 0.9 La 0.1 TiO x . First, in the data input unit 11, a step scan measured data y 0 i by a powder X-ray diffraction method is integrated, measured, and set. The measurement uses a powder diffraction wide-angle goniometer, and as an X-ray source, a water-cooled rotary counter cathode type with an input power of 18 KVA is used, and a monochromator is used in the X-ray detection unit. Measurement conditions are: Cu target, diffraction angle 2 range 20-145°, 2 feed width 0.03° per 1 step, measuring time of 1 second per 1 step, the measurement is repeated 10 times and integrated. Optical conditions are: divergence slit and scatter slit are 1°, and light receiving slit is about 0.15 mm. Further, previously expected lattice constant, space group, and the like are set by the crystal structure parameter setting unit 12. Initial values of α-alumina are assumed as: a = 4.763Å, c = 13.003Å, space group R*3C, 12 Al atoms occupying (0,0,0; 1/3,2/3,2/3; 2/3,1/3,1/3) + (0,0,z; 0,0,z*; 0,0,1/2+z; 0,0,1/2-z); z = 0.35, 18 O atoms occupying (0,0,0; 1/3,2/3,2/3; 2/3,1/3,1/3) + (0,x,1/4; x*,x*,1/4; x*,0,3/4; 0,x*,3/4; x,x,3/4); x = 0.31, wherein the symbol * represents the reverse (minus) direction without of it, which is normally used instead of an upperline. The initial values of lattice constant of YSZ (yttria-stabilized zirconia) are in a cubic phase (C phase) and assumed as a = 5.128Å, space group Fm*m, 4 x (1-0.0736) Zr atoms occupying (0,0,0; 0,1/2,1/2; 1/2,0,1/2; 1/2,1/2,0;) + (0,0,0; 0,1/2,1/2; 1/2,0,1/2; 1/2,1/2,0), 4 x 0.0736 Y atoms occupying (0,0,0; 0,1/2,1/2; 1/2,0,1/2; 1/2,1/2,0) + (0,0,0; 0,1/2,1/2; 1/2,0,1/2; 1/2,1/2,0), 8 x (1-0.0736/4) 0 atoms occupying (1/4,1/4,1/4; 1/4,1/4,3/4) + (0,0,0; 0,1/2,1/2; 1/2,0,1/2; 1/2,1/2,0). The symbol * means the same as above. In a metastable tetragonal crystal (t' phase), the values are a = 3.5866Å, c = 5.1791Å, space group P4 2 /nmc, 2·x 0.0736 Zr atoms occupying (0,0,0; 1/2,1/2,1/2), 2 x (1-0.0736) Y atoms occupying (0,0,0; 1/2,1/2,1/2), 4 x (1-0.0736/4) O atoms occupying (0,1/2,z; 0,1/2,z+1/2; 1/2,0,z*+1/2; 1/2,0,z*); z = 0.215. The symbol * means the same as above. In a metastable tetragonal crystal (t'' phase), the values are a = 3.647Å, c = 5.1589Å, space group P4 2 /nmc, 2 x 0.0736 Zr atoms occupying (0,0,0; 1/2,1/2,1/2), 2 x (1-0.0736) Y atoms occupying (0,0,0; 1/2,1/2,1/2), 4 x (1-0.0736/4) O atoms occupying (0,1/2,z; 0,1/2,z+1/2; 1/2,0,z*+1/2; 1/2,0,z*); z = 0.23. The symbol * means as above. The above-set sample measured data y 0 i and the crystal structure parameter are inputted into the calculation unit 13. The calculation unit 13, after making count missing correction, obtains the vector F c having a value of vector F obtained by logarithmic conversion by Formula 25 and the value obtained by logarithmic conversion of the calculated value y ci by the Rietveld method In the determination unit 14, a determination is made as to whether or not the measured value vector F and the calculated value F c are sufficiently close to each other, the calculation procedure from the calculation of the calculated value F c by the Rietveld method in the calculation unit 13 is repeated until sufficiently close values are obtained. When the measured value vector F and the calculated value F c are sufficiently close, the calculation result of analysis is outputted from the output unit 15. When the output unit 15 comprises a printer, the calculation result is printed and outputted. An analytical result of α-Al 2 O 3 will be described below. The in-lattice coordinate x of oxygen has been determined as 0.30623±0.00009. The value by the prior art Rietveld method, according to a literature (Hill, R. J. and Madsen I. C., Diffract., vol.2, 146(1987), is about 0.3068±0.001. From this fact, with the analyzing method and analyzing apparatus according to the present invention, the position determination accuracy of α-Al 2 O 3 is improved by several tens of times than the prior art. Further, a literature (Lewis, J., Schwarzenbach, D., and Flack, H. D., Acta Crystallogr., A38, 733(1982) reports a value by the single crystal structure analyzing method by a 4-axis diffractometer which is considered to be close to the true value as 0.30624±0.00004, which is in very good agreement with the above value by the analysis according to the present invention. Further, as to Y 2 O 3 stabilized zirconia (YSZ), one containing 7.36 mole % of Y 2 O 3 and heated at 1000°C for 5500 hours cannot be analyzed by the prior art method, but can be analyzed as a three-phase mixture by the analyzing method according to the present invention, in which C phase can be analyzed as lattice constant a = 5.14132Å, estimated content of 16%, t' phase is analyzed as a = 3.63130Å, c = 5.15695Å, internal coordinate of oxygen of 0.235, and estimated content of 52%, and t'' phase is analyzed as a = 3.63165Å, c = 5.13593Å, internal coordinate of oxygen of 0.209, and estimated content of 31%. From the above, it is found that the present invention improves the accuracy by a factor of several tens of times for the case of α-Al 2 O 3 , and enables analysis of a difficult-analysis sample for the case of YSZ. Analytical results of Ca 0.9 La 0.1 TiO x by introducing a device function into the non-diagonal term will be described below. The measurement conditions are the same as above. A device function matrix is determined from a profile of diffraction line of an Si(NBS640b standard sample) coated to a small thickness on the sample surface, using which Ca 0.9 La 0.1 TiO x has been analyzed. Fig. 8 is a profile fitting, enlarged in the direction of the axis of abscissas when the device function is not considered, Fig. 9 shows the case of the present invention considering the device function. While in the case of not considering the device function in Fig. 8 the diffraction lines are overlapped with each other, in Fig. 9 of the present invention, the substantial resolution is improved and 8 peaks are clearly separated so that the positions of the diffraction lines can be determined with good accuracy. There is no danger of wrong assignment or convergence to a minimal point rather than a minimum point. In addition, one seen as a single peak in Fig. 7 is separated into 8 lines in Fig. 9 by the improvement of resolution. On the other hand, a resolution of synchrotron orbital radiation using an accelerator requiring a large-scale facility (literature: Haruo Ozawa et al.: Yoshihiko Uno "Proceedings of report on X-ray powder diffractometer by radiation") is reported as a half width of 0.058° (d = 0.00704Å -1 ) when 2 is in the vicinity of 25.4°. Since, in the analytical example according to the present invention, when 2 is in the vicinity of 70.0°, the half width is 0.0036° (d=0.00006Å -1 ), which is 10 to 100 times higher than the resolution of synchrotron radiation. Other embodiments of the present invention will be described with reference to Figs. 1 and 2. (Embodiment 3) In the crystal structure parameter analyzing method shown in Fig. 1, the weighting matrix calculation processing from the analyzing method shown in Fig. 5 by-Formula 16 in step 7 is assumed as only the diagonal term, as H = E (E is a unit matrix). Consequently, in step 8, using the calculation of residual square sum s by the Formula (s = ΣW i (f i - f ci ) 2 ), a determination is made, for example, in a computer as to whether or not the residual square sum s is minimized or converged, to the logarithmic conversion value f i obtained in step 4 and the logarithmic conversion value f ci obtained in step 8. When converged, step 9 is carried out, when not converged, it is instructed to repeatedly carry out steps (5, 6, 7, 8) after step 5. Other steps are the same as in Fig. 5. As in this example, even without using the weight matrix W, by whether or not the residual square sum s is minimized and converged , a determination is made as to whether or not the measured conversion value fi and the calculated conversion value f ci are sufficiently close to each other, the procedure from the calculation by the Rietveld method is repeated until the values are sufficiently close to each other, the crystal structure can be analyzed with higher accuracy then the prior art, even though the resolution is not improved as shown in Fig. 8. The weighting W i is practically no problem even if the sum is not 1, however, strictly, it may be normalized as ΣW i = 1. (Embodiment 4) Next, a crystal structure parameter analyzing apparatus for calculating the crystal structure from a diffraction spectrum using the crystal structure parameter analyzing method of the above-described Fig. 1 will be described with reference to Fig. 2 which shows the structure of the apparatus. In the crystal structure parameter analyzing apparatus shown in Fig. 2, the analyzing apparatus shown in Fig. 9 is changed to one which calculates only the diagonal term by the weighting matrix calculation unit 13E by Formula 11, consequently, by determining in the determination unit 14 whether or not the residual square sum s is minimized and converged, a determination is made as to whether or not the measured value f i and the calculated value f ci after logarithmic conversion obtained by the individual logarithmic conversion units 13D and 13C are sufficiently close to each other, when not sufficiently close, an instruction is made to calculation unit 13 to recalculate by changing the crystal structure parameter, when close to each other, an instruction is made to input the crystal structure parameter into the output unit 15. Other structure is the same as in Fig. 6. Even without using the weighting matrix W as in the present embodiment, the crystal structure can be analyzed with improved accuracy over the prior art by determining whether or not the measured value f i and the calculated value f ci are sufficiently close to each other using weighting whether or not the residual square sums is minimized and converged, and calculation procedure from the Rietveld method is repeated until the values are sufficiently close to each other. Next, still further embodiments of the present invention will be described with reference to Figs. 3 and 4. (Embodiment 5) In the crystal structure parameter analyzing method shown in Fig. 3, the weighting calculation processing by Formula 11 in step 7 is omitted from the analyzing method shown in Fig. 1, consequently, in step 8, using calculation of the residual square sum s by the Formula (s = ΣW i (f i -f ci ) 2 ), to the logarithmic conversion value f i obtained in step 4 and the logarithmic conversion value f ci obtained in step 6, a determination is made as to whether or not the residual square sum s is minimized and converged, for example, in a computer, when converged, step 9 is carried out, when not converged, an instruction is made to repeat the steps (5, 6, 8) after step 5. Other steps are the same as in Fig. 1. Even without using the weighting matrix w i as in the present embodiment, a determination is made as to whether or not the measured conversion value f i and the calculated conversion value f ci are sufficiently close to each other by determining whether or not the residual square sum s is minimized and converged, and calculation procedure from the Rietveld method is repeated until the values are sufficiently close to each other, whereby the crystal structure can be analyzed with higher accuracy than the prior art, even though high resolution is not achieved as shown in Fig. 8. (Embodiment 6) A crystal structure parameter analyzing apparatus for calculating the crystal structure from a diffraction spectrum using the above-described crystal structure parameter analyzing method of Fig. 3 will be described with reference to Fig. 4 which shows the structure of the apparatus. In the crystal structure parameter analyzing apparatus shown in Fig. 4, the weighting calculation unit 13E is omitted from the analyzing apparatus shown in Fig. 2, consequently, in the determination unit 14, by determining whether or not the residual square sum s by Formula 30 is minimized and converged, a determination is made as to whether or not the measured value f i and the calculated value f ci after logarithmic conversion obtained by the logarithmic conversion unit 13D and 13C are sufficiently close to each other, when not sufficiently close to each other, an instruction is made again to the calculation unit 13 to recalculate by changing the crystal structure parameter, and when close to each other, an instruction is made to input the crystal structure parameter into the output unit 15. Other structure is the same as in Fig. 2. Even without using the weighting matrix w i by Formula 11 as in the present embodiment, a determination is made as to whether or not the measured value f i and the calculated value f ci are sufficiently close to each other by determining whether or not the residual square sum s in Formula 30 is minimized and converged, and calculation procedure of the calculated value y ci from the Rietveld method is repeated until the values are sufficiently close to each other, whereby the crystal structure can be analyzed with higher accuracy than the prior art. In the above description, the calculation formula of Rietveld method suited to polycrystal structure analysis is used in the calculation of the calculated value y ci , however, the present invention is not limited to this calculation formula, but various formulae for calculating the calculated value y ci from the crystal structure parameter can also be used such as those used in various single crystal structure analyzing methods and polycrystal structure analyzing methods including 4-axis diffraction method, pattern decomposition method, WPPD method, ab intio method, and the like. That is, the present invention can be applied to both of polycrystal structure analysis and single crystal structure analysis, and the accuracy is improved over the prior art in either case. Further, the present invention is not limited to crystal structure parameter analysis, but can also be applied to vibration analysis by Raman spectroscopy, surface state analysis by electron diffraction method, band state analysis by photoluminescence method and the like, and the accuracy of the structural parameter is improved over the prior art. As described above, the present invention can be applied widely to crystal structure analyzing methods of all types of crystal materials with advantageous effects, whether polycrystal samples or single crystal samples, and whether Rietveld method or 4-axis diffraction method, or the like, and is useful in research and development of various functional and crystal structural materials such as ceramics, metal materials, and organic materials. Further, the present invention can also be applied to vibration analysis by Raman spectroscopy, surface state analysis by electron diffraction method, band state analysis by photoluminescence method and the like, to obtain advantageous effects. Still further, with the present invention, the measure value vector and the calculated value are logarithmic converted, when obtaining the structural parameter of crystals by convergence calculation to determine the calculated value so that the residual square sum of these logarithmic conversion value vectors is minimized, effects of systematic error included in the measured value vectors can be corrected, thereby obtaining analytical results of generally higher accuracy over the prior art Rietveld method which considers only statistical variation. Yet further, when determining the residual square sum of the measured value vector F and logarithmic conversion value vector F c , by multiplying the weighting w i calculated using these logarithmic conversion value vectors, effects of errors due to statistical variation can be corrected, thereby determining structural parameters of crystals of even higher accuracy over the prior art Rietveld method. Yet further, as to the resolution, by introducing the non-diagonal term of the weighting matrix W, the resolution is improved in principle infinitely as far as the measuring time is allowed, and the structural parameters of crystal can be obtained with much higher accuracy over the prior art Rietveld method.

Claims: A structural parameter analyzing apparatus comprising a structural parameter setting unit (12) for previously setting a structural parameter value, a data input unit (11) for inputting a measured value of a sample, calculated value calculation means (13B) for determining a calculated value corresponding to the measured value according to the structural parameter value from said structural parameter setting unit (12), sum total calculation means for obtaining a sum total, a determination unit (14) for determining a minimum out of a plurality of sum totals obtained by said sum total calculation means by varying the structural parameter value, and an output unit (15) for outputting a structural parameter value corresponding to the minimum sum total, characterized in that said apparatus further comprises: first logarithmic conversion means (13C) for making logarithmic conversion of the calculated value, second logarithmic conversion means (13D) for logarithmic converting a value which is obtained by subtracting a value corresponding to a background noise strength from the measured value, and said sum total calculation means for squaring a difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D) to obtain said sum total. The structural parameter analyzing apparatus as claimed in Claim 1, characterized in that said second logarithmic conversion means (13D) is means for subtracting the value of the background noise strength from the measured value, for adding a positive number of less than 1, and further for making logarithmic conversion. The structural parameter analyzing apparatus as claimed in Claim 2, characterized in that said sum total calculation means is means for obtaining a sum total calculated by wherein, s is a sum total, i is a number of measuring point, n is a total number of measuring points, k is an optional constant, y i is a measured value, δ is a positive number of less than 1, b i is a background noise strength, and y ci is a calculated value. The structural parameter analyzing apparatus as claimed in Claim 2, characterized in that said apparatus further comprises weight calculation means (13E) for obtaining a weighting factor, w, by from the two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D), further characterized in that said sum total calculation means is means for squaring the difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D), for multiplying with the weighting factor w, obtained by said weight calculation means (13E), and further for obtaining a sum total calculated by wherein, i and j are numbers of measuring points, n is a total number of measuring points, m is a number of independent variables, k is an optional constant, W i is a weighting factor, y i and y j are measured values, δ is a positive number of less than 1, b i and b j are background noise strengths, and y ci and y c are calculated values. The structural parameter analyzing apparatus as claimed in Claim 2, characterized in that said sum total calculation means is means for obtaining a sum total calculated by s = (F-F c ) t W (F-F c ) , wherein, s is a residual square sum. F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, (F-F c ) ' is a transposition matrix of (F-F c ), W is a unit vector, i is a number of measuring point, y i is an i' th measured value after count missing correction, y ci is an i' th calculated value, k is a constant, n is a number of total measuring points, δ is a positive number of less than 1, and b i is a background noise strength. The structural parameter analyzing apparatus as claimed in Claim 2, characterized in that said apparatus further comprises weight calculation means (13E) for obtaining a weighting matrix W by W= (Σ POI ÷ Σ SYS ) -1 from vectors F and F c having two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D) as matrix elements, further characterized in that said sum total calculation means is means for multiplying a transposition matrix (F- F c ) t of a difference between two logarithmic conversion value vectors obtained by said first and second logarithmic conversion means (13C, 13D), by the weighting matrix W obtained by said weight calculation means (13E), and by a difference (F- F c ) between two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D) to obtain a sum total calculated by s = (F-F c ) t W (F-F c ) , wherein, s is a residual square sum, i and j are numbers of measuring points, y i is an i' th measured value after count missing correction, y ci is an i' th calculated value. k is an optional constant, n is a number of total measuring points. m is a number of independent variables, δ is a positive number of less than 1, b i is an i' th background noise strength, W is a weighting matrix of n lines and n lows, W is a weighting matrix of n lines and n lows, F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, Σ POI is a covariation matrix of n lines and n rows having k 2 ( y i + δ-b i ) -2 (y i + δ) as a diagonal element due to white noise (Poisson distribution), Σ SYS is a covariation matrix of n lines and n rows due to systematic error, H is a device function matrix (spread function matrix due to measuring device) of n lines and n rows. and H t is a transposition matrix of H. The structural parameter analyzing apparatus as claimed in Claim 2, characterized In that said apparatus further comprises weight calculation means (13E) for obtaining a weighting factor W i , using data measured r times under the same condition and a variance σ ir-1 2 obtained by actually measuring at each measuring point (point i) without assuming Poisson distribution (y i +1/2), by from the two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D), said sum total calculation means is means for squaring the difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D), for multiplying with the weighting factor W i obtained by said weight calculation means (13E), and further for obtaining a sum total calculated by wherein, y i (r) is an r' th measured value after count missing correction at point i, y i is a sum of measured values after count missing correction of r times at point i, i and j are numbers of measuring points. n is a total number of measuring points, m is a number of independent variables, k is an optional constant, W i is a weighting factor, δ is a positive number of less than 1, b i and b j are background noise strengths, and y ci and y ci are calculated values. The structural parameter analyzing apparatus as claimed in Claim 2, characterized in that said apparatus further comprises weight calculation means (13E) for obtaining a weighting matrix W, using data measured r times under the same condition and a variance σ ir-1 2 obtained by actually measuring at each measuring point (point i) without assuming Poisson distribution (y i +1/2), by from vectors F and F c having two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D) as matrix elements, said sum total calculation means is means for multiplying a transposition matrix (F- F r ) i of a difference between two logarithmic conversion value vectors obtained by said first and second logarithmic conversion means (13C, 13D), by the weighting matrix W i obtained by said weight calculation means (13E), and by a difference (F-F c ) between two logarithmic conversion values obtained by said first and second logarithmic conversion means (13C, 13D) to obtain a sum total calculated by s = (F-F c ) t W (F-F c ), wherein, y i (r) is an r' th measured value after count missing correction at point i, y i is a sum of measured values after count missing correction of r times at point i, s is a residual square sum, i and j are numbers of measuring points. y ci is an i'th calculated value, k is an optional constant, n is a total number of measuring points, m is a number of independent variables, δ is a positive number of less than 1, b i is an i'th background strength, W is a weighting matrix of n lines and n rows, F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, Σ POI is a covariation matrix of n lines and n rows having k 2 (y i + δ-b i ) -2 (rσ ir-1 2 ) as a diagonal element due to white noise (Poisson distribution). Σ SYS is a covariation matrix of n lines and n rows due to systematic error, H is a device function matrix (spread function matrix due to measuring device) of n lines and n rows. H t is a transposition matrix of H. The structural parameter analyzing apparatus as claimed in Claim 1, characterized in that said apparatus further comprises correction means (13A) for correcting for count missing of a detector for obtaining the measured value, said second logarithmic conversion means (13D) is means for making logarithmic conversion of a value of the measured value after count missing correction subtracted by the background noise strength. The structural parameter analyzing apparatus as claimed in any one of Claim 2 to Claim 8, characterized in that said apparatus further comprises correction means (13A) for correcting for count missing of a detector for obtaining the measured value, said second logarithmic conversion means (13D) is means for subtracting the value of the background noise strength from the measured value, for adding a positive number of less than 1, and further for' making logarithmic conversion. (amended and renumbered from original claim 9) The structural parameter analyzing apparatus as claimed in any one of Claims 4, 6, 7 and 8, wherein the number m of independent variables is set to zero, or omitted from the formulae. A structural parameter analysing method for determining a structure of a sample by using a measured value of the sample and an expected structural parameter value, comprising the steps of; determining a calculated value corresponding to the measured value according to the expected structural parameter value, changing the expected structural parameter value until said calculated and measured values are close to each other so that the residual square sum is minimized and converged, and determining the expected structural parameter value at the convergence to be an analytical result, characterized in that said method further comprises the steps of; obtaining a first logarithmic conversion value by logarithmic conversion of the calculated value, and obtaining a second logarithmic conversion value by logarithmic conversion of the measured value subtracted by a background noise strength, further characterized in that the expected structural parameter value is changed, in said structural parameter value changing step, until said first and second logarithmic conversion values are close to each other so that the residual square sum is minimized and converged. The structural parameter analyzing method as claimed in Claim 12. characterized in that said second logarithmic conversion value is determined, in said second logarithmic conversion value obtaining step, by subtracting the background noise strength from the measured value, adding a positive number of less than 1, and making logarithmic conversion. The structural parameter analyzing method as claimed in Claim 12, characterized in that said method further comprises the steps of; making count missing correction of a detector to the measured value, wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion, and squaring a difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion values to obtain a sum total calculated by further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence, by changing the structural parameter value in said structural parameter value changing step, wherein, i is a number of measuring points, n is a total number of measuring points, k is a constant, y i i-s a measured value, δ is a positive number of less than 1, b i is a background noise strength, and y ci is a calculated value. The structural parameter analysing method as claimed in Claim 12. characterized in that said method further comprises the steps of; making count missing correction of a detector to the measured value, wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion, determining a weighting factor w, by from said first and second logarithmic conversion values: and squaring a difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion values, and multiplying by the weighting factor W i to obtain a sum total calculated by further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence, by changing the structural parameter value in said structural parameter value changing step. wherein, i and j are numbers of measuring points, n is a total number of measuring points, m is a number of independent variables, k is an optional constant, w i is a weighting factor, y i and y j are measured values, δ is a positive number of less than 1, b i and b j are background noise strengths, and y ci and y ci are calculated values. The structural parameter analyzing method as claimed in Claim 12, characterized in that said method further comprises the steps of; making count missing correction of a detector to the measured value. wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion. determining a weighting factor W i , using data measured r times under the same condition and a variance σ ir-1 2 obtained by actually measuring at each measuring point (point i) without assuming Poisson distribution (y i + 1/2), by from said first and second logarithmic conversion values; and squaring a difference between the two logarithmic conversion values obtained by said first and second logarithmic conversion values, and multiplying by the weighting factor W i to obtain a sum total calculated by further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence, by changing the structural parameter value in said structural parameter value changing step, wherein, y i (r) is an r' th measured value after count missing correction at point i, y i is a sum of measured values after count missing correction of r times at point i, i and j are numbers of measuring points, n is a total number of measuring points, m is a number of independent variables, k is an optional constant, W i is a weighting factor, δ is a positive number of less than 1, b i and b j are background noise strengths, and y ci and y cj are calculated values. The structural parameter analyzing method claimed in Claim 12, characterized in that said method further comprises the steps of; obtaining a first vector F c having the first logarithmic conversion value as a matrix element, making count missing correction of a detector to the measured value, wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion, obtaining a second vector F having the second logarithmic conversion value as a matrix element, and multiplying a transposition matrix (F- F c ) t , by the weighting matrix W i and a difference (F- F c ) between said first and second vectors to obtain a sum total calculated by s = (F-F c ) t W (F-F c ) , further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence, by changing the structural parameter value in said structural parameter value changing step, wherein, s is a residual square sum, F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, (F- F c ) t is a transposition matrix of (F-F c ), W is a unit vector, i is a number of measuring points, y i is an i'th measured value after count missing correction, y ci is an i' th calculated value, k is a constant, n is a number of total measuring points, δ is a positive number of less than 1, and b i is an i' th background noise strength. The structural parameter analyzing method claimed in Claim 12, characterized in that said method further comprises the steps of: obtaining a first vector F c having the first logarithmic conversion value as a matrix element, making count missing correction of a detector to the measured value, wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion, obtaining a second vector F having the second logarithmic conversion value as a matrix element, determining a weighting matrix W from said first and second vectors F c and F by and multiplying a transposition matrix (F- F c ) i , by the weighting matrix W, and a difference (F- F c ) between said first and second vectors to obtain a sum total calculated by s= (F - F c ) t W (F - F c ), further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence, by changing the structural parameter value in said structural parameter value changing step, wherein. s is a residual square sum, i and j are numbers of measuring points, y i is an i' th measured value after count missing correction, y ci is an i' th calculated value. k is an optional constant, n is a number of total measuring points. m is a number of independent variables, δ is a positive number of less than 1, b i is an i'th background noise strength, W is a weighting matrix of n lines and n lows, F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, Σ POI is a covariation matrix of n lines and n rows having k 2 ( y i + δ-b i ) -2 (y i + δ) as a diagonal element due to white noise (Poisson distribution), Σ SYS is a covariation matrix of n lines and n rows due to systematic error, H is a device function matrix (spread function matrix due to measuring device) of n lines and n rows, and. H t is a transposition matrix of H. The structural parameter analyzing method as claimed in Claim 12, characterized in that said method further comprises the steps of; obtaining a first vector F c having the first logarithmic conversion value as a matrix element, making count missing correction of a detector to the measured value, wherein said second logarithmic conversion value is determined by subtracting the background noise strength from the measured and corrected value, adding a positive number of less than 1, and making logarithmic conversion, obtaining a second vector F having the second logarithmic conversion value as a matrix element, determining a weighting matrix W, using data measured r times under the same condition and a variance σ ir-1 2 obtained by actually measuring at each measuring point (point i) without assuming Poisson distribution (y i +1/2), by and multiplying a transposition matrix (F- F c ) t , by the welghting matrix W, and a difference (F- F c ) between said first and second vectors to obtain a sum total calculated by s = (F-F c ) t W (F-F c ), further characterized in that a minimum of a plurality of the sum totals is determined, as the convergence. by changing the structural parameter value in said structural parameter value changing step. wherein. y i (r) is an r i th measured value after count missing correction at point i, y i is a sum of measured values after count missing correction of r times at point i, s is a residual square sum. i and j are numbers of measuring points, y ci is an i' th calculated value, k is an optional constant, n is a total number of measuring points, m is a number of independent variables, δ is a positive number of less than 1, b i is an i' th background noise strength, W is a weighting matrix of n lines and n rows, F is a vector of n lines and 1 row having f i = k · log( y i + δ-b i ) as a matrix element, F c is a vector of n lines and 1 row having f ci = k · log( y ci ) as a matrix element, Σ POI is a covariation matrix of n lines and n rows having k 2 (y i + δ-b i ) -2 (rσ ir-1 2 ) as a diagonal element due to white noise (Poisson distribution), Σ SYS is a covariation matrix of n lines and n rows due to systematic error. H is a device function matrix (spread function matrix due to measuring device) of n lines and n rows, and H t is a transposition matrix of H. The structural parameter analyzing method as claimed in any one of Claims 16, 18 and 19, wherein the number m of'independent variables is set to zero, or omitted from the formulae.

Inventors: MURAKAMI YUICHIRO, NAGANO ICHIRO, MURAKAMI, YUICHIRO, NAGANO, ICHIRO, Murakami, Yuichiro, Mitsubishi Heavy Ind., Ltd., Nagano, Ichiro, Mitsubishi Heavy Ind., Ltd.
Applicants: MITSUBISHI HEAVY IND LTD, MITSUBISHI HEAVY INDUSTRIES, LTD.
Application year: 1997
Main classification: G01N23
IPC codes: G01J3, G01N21, G01N23