Method for assessing the effects of plasma treatments on wafers of semicondutor material

Abstract: The method described provides for the following operations: forming cells of EEPROM type on a wafer with source (S), drain (D) and control gate (G) surface terminals (pads), subjecting the cells to UV radiation so as to erase them thereby fixing a reference threshold voltage, applying programming voltages of preset value to one of the cells and measuring the corresponding threshold voltages, subjecting this cell to UV radiation so as to restore its threshold to the reference value, subjecting the wafer to the plasma treatment to be assessed, measuring the threshold voltages of the cells and comparing them with the reference threshold voltage so as to derive from the comparison information on the alterations induced on the dielectrics formed on the wafer and on the distribution of the plasma potential. The method guarantees high sensitivity of measurement, great reliability and reproducibility of the measurements and can be used with advantage both in the design of equipment for plasma treatments and in the fabrication of semiconductor devices in order to increase production yield.

Description: The present invention relates to the fabrication of semiconductor electronic devices and, more particularly, to a method for assessing the alterations in the dielectric properties of insulating layers, induced by the fabrication process. It is known that in standard fabrication processes certain treatments of the wafers of semiconductor material, typically silicon, and in which the electronic devices are formed, can generate electric potentials on the surface of the wafer such as to damage the active dielectrics of the electronic components during fabrication, in particular the gate dielectrics of MOS field-effect transistors and the gate dielectrics of programmable non-volatile memory cells (EEPROMs). This can give rise to electronic components with electrical characteristics which are worse than those theoretically obtainable. The treatments which contribute chiefly to this damaging of the dielectrics are those which require the use of plasmas for dry etching or for certain vapour- phase chemical deposition operations (plasma enhanced CVD). Furthermore, the effect of these treatments can vary from point to point of the surface of the wafer on account of intrinsic nonuniformities in the apparatuses in which they are developed, so that the devices obtained have differing characteristics depending on their position on the wafer, and this can negatively influence the production yield. Therefore, both the constructors and the users of equipment, in particular that for treatments with plasma, feel the need to be able to employ efficient probes and methods to analyse the behaviour of equipment and the alterations induced by the treatment on the dielectric properties of the insulating layers of the wafers treated. A good probe and a good method of assessment should have the following characteristics: speed of analysis of the measurement, sensitivity, capacity to detect alterations of charge both in modulus and in sign, reproducibility of measurements, possibility of directly correlating the measured data with the effects of the treatments on devices obtained using the same treatments, possibility of real-time assessment of geometrical effects, such as for example effects of charging by plasma on two very closely spaced electrical interconnection tracks ("shading effect"). The use is known of programmable non-volatile memory cells, of the type consisting of an MOS transistor having a floating gate electrode and a control gate electrode, as charge sensors for assessing the uniformity of the potential induced on the wafer by a plasma treatment. For example, a technique is known, described in the publication "CHARM wafer characterization" Reedh-olm Technical Note TN-1 June 1996, in which EEPROM cells formed on a wafer according to a preset surface distribution pattern, are programmed up to threshold saturation, i.e. such as to determine the maximum conduction threshold of the respective cells. The cells are programmed partly with the maximum positive threshold and partly with the maximum negative threshold. The wafer is then subjected to the treatment which it is desired to investigate in order to assess its effects on the wafer. The surface terminals (pads) of the cells, in particular those connected to the control gate electrodes, have the function of "antenna" areas, i.e. of collectors of the charge induced by the plasma. In those cells programmed with a positive threshold (electrons stored in the floating gate) any negative potential applied to the control gate during exposure to the plasma may extract electrons from the floating gate and thereby induce a reduction in the threshold voltage. The opposite occurs in those cells programmed to saturation with a negative threshold: a positive plasma potential induces an increase in the threshold voltage. Next, the threshold voltages of the cells are measured and these are compared with the initial maximum threshold voltages. On the basis of the variations in the measured threshold voltage it is possible in this way to get back to the charging potential applied to the control gate during exposure to the plasma. The known method described briefly above has the following drawbacks. The programming of the cells up to the saturation value of the threshold has to be carried out with high voltage values applied between the control gate and the substrate: this engenders a heavy electrical loading of the cell, in particular of the dielectric between floating gate and substrate and of the dielectric between control gate and floating gate, and this may compromise the accuracy and reproducibility of the measurement of the plasma potential. Since different cells are used to detect positive and negative potentials, in order to have a complete map of the changes in the plasma potential over the surface of the wafer, which are determined by the contributions from the charge carriers, both positive and negative, it is necessary to combine the results of two series of measurements. This constitutes a significant complication of the procedures for processing the data from the measurements. During exposure to the plasma an EEPROM cell undergoes, in addition to the effects of the electric potential applied to the control gate, also the effects due to bombardment with UV photons which are generated in the actual plasma. As is known, exposure to UV rays engenders a variation in the electron distribution in the floating gate. Consequently, the threshold attained after exposure to the plasma is in reality a value resulting from the sum of the two effects mentioned. Furthermore, the known method does not allow direct assessment of the effects of exposure to the plasma on actual devices. EP-A-0 678 909 discloses a further prior art using programmable non-volatile memory cells as charge sensors for assessing the uniformity of the potential induced on the wafer by a plasma treatment. The objective of the present invention is to propose a method of the type defined at the outset which does not have the drawbacks of the prior art and thus allows reliable and reproducible measurements, directly delivers the changes in the surface potential in the case of plasma treatments, is able to give accurate results even in the presence of UV radiations during the treatment and enables the measured data to be correlated directly with the effects of the treatment, for example exposure to the plasma, on actual devices. This purpose is achieved with the method defined and characterized in general in Claim 1. The method of the invention and the advantages stemming therefrom will be better understood from reading the following description of a preferred embodiment given in conjunction with the appended drawings, in which: Figures 1 and 2 represent, in plan and in section respectively, an EEPROM memory cell formed on a wafer of semiconductor material usable as a probe in the method of the invention, Figure 3 is a graph which represents the variations in the measured threshold voltages versus the control gate voltages of the memory cells of a wafer in one phase of the method of the invention, Figures 4 and 5 represent two possible shapes of a photoresist mask applied to a wafer according to a preferred application of the method of the invention and Figure 6 is a graph which represents an example of the distribution of the threshold voltages of the memory cells measured along a diameter of a wafer according to the method of the invention. In order to produce a probe usable with the method according to the invention, a multiplicity of EEPROM memory cells of known type is formed on a substrate consisting of a wafer of semiconductor material, for example silicon, according to a preset distribution on the surface of the wafer. The cells can be of the type used for "flash" memories or some other type, provided that they have, as shown in Figures 1 and 2, source and drain regions, 10 and 11 respectively, formed on the substrate 12 and separated by a channel 13, a floating gate electrode 16, of for example polycrystalline silicon, separated from the substrate 12 by a thin gate dielectric layer 17 and a control gate electrode 18 separated from the floating gate by a thicker dielectric layer 19. Source, drain and control gate surface metal terminals (pads), indicated as S, D and G respectively, are formed on the wafer to constitute electrical contact areas for connecting up external measuring instruments with the source and drain regions and with the control gate electrode. Such a cell can be fabricated, for example with a process which allows minimum gate lengths of 0.5 µm and a minimum thickness of gate dielectric of 12 nm, but naturally other types of process characterized by different geometrical values can be used. The memory cells formed on the wafer in this example are all identical. However, the method of the invention is usable also with wafers having different memory cells. According to the method of the invention, the cells are firstly subjected to a treatment such as to define a conduction threshold voltage, in this example identical for all the cells, which constitutes a reference threshold. Preferably this threshold is that which corresponds to a charge balance between floating gate and the substrate, i.e. that which is obtained by subjecting the wafer to UV radiation so as to "erase" the cells. The probe is then calibrated by applying preset programming voltages to the cells and measuring the corresponding threshold voltages. In the case in which the cells are all identical, calibration can be undertaken on a single cell, but it may be appropriate, for greater safety and accuracy of measurement, to undertake it on more than one cell. According to a preferred calibration operation, gradually increasing positive voltages are applied to the control gate electrode of one of the cells, for example in equal steps, up to a maximum value below the saturation value of the positive threshold and the application of negative voltages, likewise increasing, possibly in steps of the same magnitude as the positive steps, up to a maximum negative value below, in absolute value, the saturation value of the negative threshold. Naturally, measurement of the threshold voltage is carried out after each application of a programming voltage. By graphically plotting the programming voltages Vg and the corresponding variations ΔVth in the threshold voltages with respect to the reference threshold, a calibration curve is obtained for the probe, such as that illustrated in Figure 3. The cell is then restored to the reference threshold voltage, i.e., in this example the wafer is exposed to ultraviolet radiation (UV) of intensity and duration which are sufficient to erase the cell. The wafer is now ready to be used as a probe in assessing the effects of a treatment which might alter the dielectric properties of the insulators. It is therefore inserted, for example, into an apparatus for the plasma etching of metal layers. In order to preclude the metal surface electrodes from being etched, the plasma is kept inactive with regard to the metal by using particular known expedients, for example by generating the plasma in an atmosphere of inert gas. For the purposes of the plasma treatment, the threshold voltages of the cells are measured and compared with the reference threshold voltage. Since each cell represents the specific condition of exposure to the plasma of the area of the wafer occupied thereby, or, more precisely, occupied by the control gate electrode terminal which functions as antenna, the data obtained make it possible to draw a map of the distribution of the plasma potential over the wafer. To obtain the greatest possible amount of information on the effects of the plasma on the dielectrics of the wafer, according to a particularly advantageous mode of execution of the method of the invention, before subjecting the wafer to the plasma treatment, a layer of a plasma-impermeable material, for example a layer of standard photosensitive material, or photoresist, used in the customary photolithographic treatments of processes for fabricating semiconductor devices, is applied to the wafer. This masking layer has apertures on only some of the surface metal terminals, for example on only those of the control gate electrodes of the cells. These apertures can be shaped according to structures of similar form to that of structures typical of semiconductor devices to be produced using the same plasma treatment. Two examples of differently shaped apertures of a resist mask are represented in Figures 4 and 5. The structure of Figure 4 enables the whole of the area of the terminal to be exposed to the plasma, whilst that of Figure 5 allows partial exposure suitable for simulating typical geometrical effects in a layout of a semiconductor device. It should be noted that the photoresist mask also has the effect of blocking the UV photons generated in the plasma and, therefore, of allowing effective measurement of the electrical potential generated by the plasma on the surface of the wafer. The photolithographic process for producing the photoresist mask should be carried out with special expedients so as to avoid phenomena of electrostatic charging of the photoresist which could alter the results of the measurement. More particularly, after developing the layer of photoresist applied to the wafer with the standard systems, instead of washing the wafer with the standard centrifuging treatments, washing is carried out by immersion in deionized water followed by manual drying of the wafer. After exposure to the plasma, the photoresist is removed by standard wet chemical etching. An example of the distribution on a wafer of the threshold voltages Vth measured along a diameter of the wafer for various plasma exposure times is represented in the graph of Figure 6. The centre of the wafer is indicated as 0. The unit of distance measurement is arbitrary. The method according to the invention makes it possible to obtain the following advantages with respect to the prior art: greater sensitivity in measuring the charging potential by plasma under operating conditions, greater reliability and reproducibility, given that high programming voltages are not required, possibility of obtaining changes in surface potential (in modulus and sign) over the wafer such as to be able to provide useful information for the design of equipment for plasma treatments and to increase the production yield for semiconductor devices, the use of the photoresist mask on the wafer during exposure to the plasma makes it possible to reproduce the geometrical effects which may be obtained on a device subjected to the same treatment during a normal fabrication process and makes it possible to avoid the effects of the UV photons generated during the plasma treatment.

Claims: Method for assessing the alterations in the dielectric properties of insulating layers on a wafer of semiconductor material, induced by a preset treatment of a fabrication process, comprising the operations of forming on the wafer, according to a preset surface distribution pattern, a multiplicity of programmable non-volatile memory cells each having a source region (10), a drain region (11) separated from the source region by a channel (13), a floating gate electrode (16) and a control gate electrode (18) and forming on the wafer source (S), drain (D) and control gate (G) surface terminals connected, respectively, to the source and drain regions and to the control gate electrodes of the cells, this method being characterized in that it furthermore comprises the following operations: subjecting the cells to a treatment such as to define a reference conduction threshold voltage for each cell, applying programming voltages of preset value to at least one of the cells and measuring the corresponding threshold voltages, subjecting the cells thus programmed to a treatment such as to restore the respective threshold voltages to the reference threshold voltage, subjecting the wafer to the preset treatment which induces the aforesaid alterations, measuring the threshold voltages of the cells and comparing them with the respective reference threshold voltages and deriving information on the effects of the preset treatment from the comparison. Method according to Claim 1, in which the preset treatment is a plasma treatment. Method according to Claim 1 or 2, in which the memory cells are all identical and in which the reference threshold voltage defined for each cell is identical for all the cells. Method according to Claim 1, 2 or 3, in which the operation of applying programming voltages to at least one of the cells provides for applying positive voltages of value gradually increasing up to a preset maximum positive value and negative voltages of value gradually increasing up to a preset maximum negative value successively to the control gate electrode of each cell. Method according to any one of the preceding claims, in which the treatment such as to define a reference conduction threshold voltage and the treatment such as to restore the threshold voltages of the cells to the reference threshold voltage consist in exposing the wafer to ultraviolet radiation of intensity and duration which are sufficient to erase the cells. Method according to any one of the preceding claims, in which, before subjecting the wafer to the preset treatment, there is provision for the application to the wafer of a masking layer of plasma-impermeable material which leaves uncovered, at least partly, at least some of the said surface terminals. Method according to Claim 6, in which the at least partly uncovered surface terminals are control gate terminals of memory cells. Method according to Claim 7, in which the masking layer forms on at least some of the surface terminals structures of similar form to that of structures typical of a semiconductor device to be fabricated using the aforesaid preset treatment. Method according to Claim 7 or 8, in which the application of a masking layer is a photolithographic process which uses photosensitive material. Method according to Claim 9, in which, after development, the photosensitive material is washed by immersion in deionized water and then dried manually and, after the preset treatment which induces alterations, is removed by wet chemical etching.

Inventors: ALBA SIMONE, COLOGNESE ANDREA, GHIO EMILIO, MAUGAIN FRANCOIS, RIVERA GIOVANNI, ALBA, SIMONE, COLOGNESE, ANDREA, GHIO, EMILIO, MAUGAIN, FRANCOIS, RIVERA, GIOVANNI, Maugain, François, Rivera, Giovanni Via V. Alfieri, 8
Applicants: ST MICROELECTRONICS SRL, STMICROELECTRONICS S.R.L.
Application year: 1996
Main classification: H01L29
IPC codes: H01L21