Method of manufacturing reflector

Abstract: A copper film layer (11) and a resin film (12) are sequentially layered on a skin material (10), the resin film (12) is irradiated with a laser beam so as to be removed, a mask is formed on the copper film layer (11) by use of the residual of the resin film (12), thereafter, an etching process is provided thereto, so that a copper film layer pattern is formed on the reflective surface of the skin material (10).

Description: The present invention relates to a method of manufacturing a reflector, preferably a reflector to be mounted on a space flying object such as an artificial satellite, etc, as disclosed in EP-A-0 575 848 Conventionally, there is a dual grid reflector system. Specifically, a front reflector and a rear reflector are mounted on an antenna system to be overlapped with each other. By these reflectors, the so-called V-polarized wave or H-polarized wave is selectively reflected so as to radiate into a free space. In the dual grid reflector system, a metal film layer pattern (grid line) is formed to be perpendicular to each of reflective surfaces of the front and rear reflectors. Feeding sections are formed to be opposite to the front and rear reflectors, respectively. Each of the feeding sections radiates the V-polarized wave, which is parallel to the grid line, or H-polarized wave to be selectively reflected to be emitted to the free space. The V-polarized wave has a field component, which is substantially parallel to the metal film layer pattern of the front reflector. If the V-polarized wave is radiated from one feeding section, the V-polarized wave is reflected at the metal film layer pattern of the front reflector. The H-polarized wave has a field component, which is substantially parallel to the metal film layer pattern of the rear reflector. If the H-polarized wave is radiated from the other feeding section, the H-polarized wave is transmitted through the front reflector so as to be reflected at the metal film layer pattern of the rear reflector. For example, in Japanese Patent Application KOKOKU Publication Nos. 5-57762 and 5-577641, and Japanese Patent Application KOKAI Publication No. 6-260739, the method of manufacturing such a reflector is disclosed. The manufacturing method disclosed in these publications is as follows. An electrically conductive film is formed on a skin material, which is made of an insulation substrate constituting a reflector body. The conductive film is coated with liquid photosensitive resist. Then, the photosensitive resist on the conductive film is exposed with a laser beam. Then, the photosensitive resist is developed to remove a portion where no irradiation of the laser beam is provided. The exposed conductive film is etched so as to form a predetermined metal film layer pattern. However, in the above-mentioned method, after the photosensitive resist is applied on the skin material, exposing and developing treatments must be provided. Then, large-sized facilities for development, resist removal, a darkroom, etc. are needed in manufacturing the reflectors. Due to this, the reflectors are subjected to limitations in enlarging their diameters. Also, in the developing process, an image distortion occurs. Due to this, the accuracy of the manufactures is degraded by a size error due to the image distortion in enlarging the diameters of the reflectors. Japanese Patent Application KOKAI Publication No. 6-226477 discloses the following manufacturing method. A metallized layer of a base layer is coated with a resistive coat. The resistive coat is covered with a photomask, which is called reticle plate. The resistive coat is irradiated with a laser beam through the photomask so that the resistive coat is removed in accordance with a pattern shape. Then, an etching process is provided so as to remove a metallized layer of a base layer where the resistive coat is removed. Thereafter, the resistive coat formed on the metallized layer is removed so as to form a metallized layer pattern. However, in the above-mentioned manufacturing method, since the photomask is used to remove the resistive coat, the photomask must be replaced in accordance with the pattern shape. Also, the optical width of the laser beam is limited, and the resistive coat is removed in accordance with the large pattern shape by use of the photomask. Due to this, the processing pattern shape is limited. Moreover, there is difficulty in transforming the coordinates, which are necessary for processing the pattern on a curved surface. In other words, it is difficult to process a graph in which a basic pattern is projected on a projection surface. Therefore, it is difficult to obtain the accurate pattern shape, which is required in the dual grid reflector, and a frequency selective reflector. Particularly, the above-mentioned problem is one of the important problems in enlarging the diameter of the reflector, which is required in the field of the space development. EP-A-0 575 848 discloses an ablative process for fabricating a printed circuit board on a contoured substrate in which the desired patterns to be formed on the substrate are formed by directing a laser beam through a photomask or a reticle to thereby create the full image of the photomask on the layer of a photoresist material. The so illuminated areas of the photosresist are removed using well-known photochemistry etching techniques. The method of EP-A-0 575 848 comprises : a first step of forming the skin material of said reflector body of an insulation substrate, and a metal film layer on the reflective surface of the skin material ; a second step of coating the metal film layer on said reflective surface with a resin to form a resin film ; a third step of irradiating the resin film on said reflective surface with a laser beam and three-dimensionally controlling a laser irradiation section of said laser beam to thereby remove a portion of the resin film to form a mask of said resin film on the metal film layer pattern; a fourth step of removing the metal film layer exposed on the reflective surface and masked with said resin film by etching; and a fifth step of stripping off said resin film covering the metal film layer pattern on the reflective surface to which said etching has been performed, so that the metal film layer pattern is exposed. US-A-5 364 493 discloses a process for producing fine line metal traces on a substrate in that the substrate coated with metal film and with an etched barrier is irradiated with a laser by passing the laser light through a phase reticle or phase mask. Accordingly, by means of the laser beam exactly all those portions are removed which are to be removed in a succeeding wet etching step. FR-A-2 598 339 finally discloses a process similar to that of US-A-5 364 493. This process employs a mask for defining the regions which are to be removed by irradiation with the laser beam. It is the object of the present invention to provide a method for manufacturing a reflector which is improved with respect to manucturing time and accuracy. In order to attain the above object a method is provided for manufacturing a reflector as defined in claim 1 or in claim 3. Preferred embodiments of the method of the present invention are defined in the subclaims. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: FIG. 1 is a side view showing the concept of an antenna system, to which is applied the present invention; FIG. 2 is a plane view showing a reflector of the antenna system of FIG. 1; FIG. 3 is a flow chart showing the steps of the manufacturing method of the reflector of the embodiment of the present invention; FIG. 4 is a cross sectional view showing a part of a skin material manufactured in FIG. 3; FIG. 5 is a block plan showing a pattern forming device used in FIG. 3; FIG. 6 is a perspective view showing a pattern forming state of FIG. 3; FIG. 7 is a characteristic view showing the spectral characteristics of strippable paint; FIG. 8 is a characteristic view showing the spectral characteristics of strippable paint; FIG. 9 is a perspective view showing a part being manufactured according to the other embodiment of the present invention; FIG. 10 is a perspective view showing a stripping work of a resin layer of FIG. 9; FIG. 11 is a plane view showing a processing state in a mask forming process in which a resin film is removed in a slit form to have a predetermined distance so as to strip a portion between the slits; FIG. 12 is a plane view showing a mask forming process in the wide range of the resin film is directly removed with a laser beam; FIG. 13 is a partially perspective view showing a manufacturing step when a copper film layer is formed of copper foil; FIG. 14 is a partially perspective view showing a manufacturing step sequentially from FIG. 13; FIG. 15 is a partially perspective view showing a manufacturing step sequentially from FIG. 14; FIG. 16 is a partially perspective view showing a manufacturing step sequentially from FIG. 15; FIG. 17 is a plane view showing a frequency selective reflector to which the present invention is applied; FIG. 18 is a partially enlarged plane view of a copper film pattern of FIG. 17; FIG. 19 is a block plan showing a converging optical system for radiating a laser beam onto a resin film; and FIG. 20 is a flow chart showing the manufacturing method of the reflector of the other embodiment of the present invention. The embodiments of the present invention will be explained with reference to the drawings. Prior to the explanation of the manufacturing method of the reflector of the first embodiment, the following will explain an antenna system of a polarized wave selective type to which the present invention can be applied with reference to FIGS. 1 and 2. First and second reflectors 1 and 2 are curved and overlapped with each other along directivity, thereby forming front and rear reflectors as shown in FIG. 1. First and second feeding sections 3 and 4 are arranged to be opposite to the reflective surfaces of the reflectors 1 and 2, respectively. Metal film layer patterns (grid lines) 1a and 2a are formed on the reflective surfaces of the reflectors 1 and 2 to be perpendicular to each other. Each of the feeding sections 3 and 4 radiates a V-polarized wave, which is parallel to the grid line, or an H-polarized wave to be selectively reflected at the patterns 1a and 2a and to be emitted to a free space. The V-polarized wave has a field component, which is substantially parallel to the metal film layer pattern 1a of the first reflector 1. If the V-polarized wave is radiated from the first feeding section 3, the V-polarized wave is reflected at the metal film layer pattern 1a of the reflector 1. The H-polarized wave has a field component, which is substantially perpendicular to the metal film layer pattern 1a of the reflector 1 (field component, which is substantially parallel to the metal film layer pattern 2a of the second reflector 2). If the H-polarized wave is radiated from the second feeding section 4, the H-polarized wave is transmitted through the reflector 1 so as to be reflected at the metal film layer pattern 2a of the reflector 2. The manufacturing method of the reflector of one embodiment of the present invention will be explained with reference to FIG. 3. In a first step, a skin material 10 constituting the reflector is formed to have a reflector shape having a predetermined curved surface (see FIG. 4). The reflector shape is formed of an insulation substrate, for example, a complex of aramid fiber/ epoxy resin. A metal film layer, e.g., copper foil is adhered onto the entire reflective surface so as to form a copper film layer 11 on the skin material 10. In a second step, the copper film layer 11 is coated with the so-called strippable resin having a good stripping property, which is called strippable paint, so that a resin film 12 is layered thereon. For example, in this case, a strippable resin, which contains vinyl copolymer resin, made by Daikyo Kagaku, as a main component, is used as a resin film 12. For example, dye such as red is mixed with the strippable resin so as to set a predetermined color. Then, the strippable resin is applied onto the copper film layer 11 so as to form the resin film 12. In this case, since the coating state can be judged by watching the color, an easy coating work can be realized. The strippable resin can be easily stripped manually without using solvent. Then, in an etching mask forming step, the skin material 10 is attached to an X-Y table 20 constituting an etching mask forming device as shown in FIG. 5. In this case, the resin film 12, serving as an upper surface, is formed on the skin material 10. The resin film 12 is irradiated with a laser beam such as a KrF excimer laser beam from a laser beam source 21 through a laser beam irradiation section 22. Thereby, a predetermined portion of the resin film 12 is removed, and the so-called patterning is performed (see FIG. 6). An unremoved portion of the resin film 12 is left on the copper film layer 11. The residual is used as an etching mask for blocking, e.g., the copper film pattern, which is called grid line. By providing the predetermined color to the resin film 12, the etching mask forming state can be easily confirmed, and the accuracy of the etching mask forming and the yield can be improved. The X-Y table 20 is connected to a table drive section 24 so as to be two-dimensionally driven in X and Y axial directions by the table drive section 24. The laser beam irradiation section 22 is provided to be opposite to the X-Y table 20. The laser beam irradiation section 22 is provided to be opposite to the X-Y table 20 to be movable in directions of arrows A and B through an optical drive section 25. The laser beam source 21 is optically connected to an input side of the section 22. The laser beam irradiation section 22 is formed of, for example, a well-known telecentric optical system. The laser beam irradiation section 22 is irradiated with the laser beam sent from the laser beam source 21 onto the resin film 12 of the skin material 10 of the table 20 with high accuracy. In this case, the laser spot is little misconverged. The resin film 12 of the copper film layer 11 of the skin material 10 is irradiated with the laser beam, so that the predetermined portion of the resin film 12 is removed. The unremoved resin film 12 on the copper film layer 11 exists as an etching mask for blocking the copper film layer pattern. In this case, if the thickness of the resin film 12 is 20 µm, the resin film 12 is irradiated with 40 laser beam shots at energy density 1 j/cm 2 to remove the resin film 12. A control section 26 is connected to the table drive section 24 and the optical drive section 25. The control section 26 controls the table drive section 24 and the optical drive section 25. The control section 26 three-dimensionally drives the laser irradiation positions of the section 22 and the resin film 12 of the skin material 10 of the table 20 in accordance with the shape of the curved surface. Then, a portion of the resin film 12 excepting a predetermined pattern is irradiated with the laser beam sent from the section 22 so as to be removed. The residual resin film 12 is left on the copper film layer 11 of the skin material 10 in accordance with the copper film layer pattern. The copper film layer pattern is masked by the resin film 12. Therefore, the predetermined portion of the resin film 12 is removed with high accuracy, and the residual resin film 12 is formed on the copper film layer 11 to be used as an etching mask for the copper film layer pattern. The laser beam source 21 is connected to the control section 26. The laser beam source 21 outputs the laser beam to the laser irradiation section 22 in cooperation with the table drive section 24 and the optical drive section 25. As mentioned above, the etching mask using the resin film 12 is formed on the copper film layer 11. Then, the exposed copper film layer 11 is irradiated with 10 or more laser beam shots. Thereby, the oxide film on the exposed copper film layer 11 and the re-adhesion material of the resin film 12 are removed so as to clean the copper film layer 11. By the cleaning process after removing the resin film 12, the copper film layer 11 can be etched with high accuracy at stable etching velocity in a next etching process. The skin material 10 is etched with well-known etchant e.g., ferric chloride, so that the exposed copper film layer 11 is etched to be removed. In this case, the copper film layer 11 is stably etched by the copper film layer cleaning process, which is executed after removing the resin film 12. Thereafter, the resin film 12 constituting the etching mask is stripped from the copper film layer 11 so as to be removed, and a copper film layer pattern is formed on the skin material 10. Then, the skin material 10 is adhered to one surface of a honeycome core (not shown), formed of, e.g., a composite of aramid fiber/epoxy resin, with an adhesive film. Also, skin material having the same material as the skin material 10 is adhered to the other surface of the honeycomb core with the film adhesive. Thereby, a reflector body, which is called dual reflector is manufactured. In this case, a reflective surface including the copper film layer pattern of the skin film 10 of the reflector body is coated with a protection film (not shown) so as to protect the reflective surface. The reflective surface including the copper film layer pattern may be coated with the protection film before assembling the reflector body. In removing the resin film 12 and/or cleaning the copper film layer 11 with the direct radiation of the laser beam, the pulse width of the laser beam is extremely short, e.g., 10 nm. Due to this, the stable removal can be realized without exerting heat damage upon the skin material 10. Then, it is confirmed that the radio transmission characteristic of the reflector is maintained in its initial characteristic state. According to the above-mentioned reflector manufacturing method, the copper film layer 11 and the resin film 12 are sequentially formed on the skin material. Then, the part of the resin film 12 is irradiated with the laser beam to be removed. Then, the etching mask is formed on the copper film layer 11 by the residual part of the resin film 12, and the copper film layer pattern is formed on the reflective surface of the skin material 10 by the etching process. According to the present invention, there are provided the etching mask forming process in which the part of the resin film 12 removed with the laser beam so as to form the etching mask and the etching process. By providing only the etching mask forming facilities and the etching facilities, the copper film layer pattern can be easily and accurately formed. Therefore, as compared with the conventional method, the manufacture of the reflector can be simplified, and the diameter of the reflector body can be easily enlarged. Moreover, the etching mask using the resin film 12 can be formed on the copper film layer 11 without using the reticle plate (photomask). Thereby, the pattern forming work can be simply and easily realized. In the above-explained embodiment, the resin film 12 on the copper film layer 11 was directly irradiated with the laser beam, and the etching mask using the resin film 12 was formed on the copper film layer 11 so as to provide the etching process. However, the present invention is not limited to the above etching mask forming method. For example, the etching mask may be formed on the copper film layer 11 as shown in FIGS. 9 and 10. Specifically, the resin film 12 formed on the copper film layer 11 is irradiated with the laser beam in a slit form. The resin film 12 is removed in the slit form so as to form a pair of slits 12b and 12b (FIG. 9). Then, the resin film 12 between the slits 12b and 12b is stripped to be removed. Thereby, the etching mask using the resin film 12 is formed on the copper film layer 11 (FIG. 10) so as to provide the etching process. Substantially similar to the above-mentioned embodiment, by providing only the etching mask forming facilities and the etching facilities, the copper film layer pattern can be easily and accurately formed. Also, the diameter of the reflector body can be easily enlarged. Moreover, since the laser beam irradiation area is minimized and the removing area of the resin film 12 can be largely set, the resin film 12 removed with the laser beam can be prevented from being adhered to the etching processing surface again, so that more effective advantages can be expected. Regarding the adhesion of the resin film 12 again at the time of forming the etching mask, the following point is experimentally confirmed. Specifically, as shown in FIG. 11, the resin film 12 is removed in the slit form with the laser beam. Then, the resin film 12 between the slits 12b is stripped so as to be removed. Thereby, the etching mask is formed on the copper film layer 11 so as to provide the etching process to form the pattern. On the other hand, as shown in FIG. 12, the removing portion of the resin film 12 is directly irradiated with the laser beam so as to be removed. Thereby, the etching mask is formed so as to provide the etching process to form the pattern. As compared with the latter case, in the former case, the etching residual portion of the copper film layer 11 due to the re-adhesion portion 12a of the removed resin film 12 is little left. If the copper foil is used as the copper film layer 11, the width of the copper foil put on the market is limited to about 600 mm. Then, if the diameter of the reflector is enlarged, a seam is often generated. To avoid this problem, the copper film layer 11 is formed on the skin material 10. Then, the resin film 12 is formed on the copper film layer 11 so as to be etched in accordance with a predetermined pattern shape, thereby forming the copper film layer pattern. Under this state, there is formed an auxiliary resin film 40, which is formed by coating the skin material including the resin film 12 with the strippable resin (FIG. 13). Then, as shown in FIG. 14, the resin film 12 on the copper film layer 11 is removed with the auxiliary resin film 40. Thereafter, a seam 11a formed at the copper film layer 11 is coated with, e.g., conductive paint, so as to form an auxiliary copper film 41 (FIG. 15). Thereafter, as shown in FIG. 16, the auxiliary resin film 40 on the skin material 10 is removed, so that the copper film layers 11 are continuously formed through the auxiliary copper film 41. The above-mentioned embodiment explained the case in which the present invention was applied to the dual grid reflector having the linear copper film layer pattern. However, the present invention is not limited to the above embodiment. For example, as shown in FIGS. 17 and 18, the present invention can be applied to a frequency selective reflector (FSR). The FSR is formed of a large number of ring-shaped copper film layer patterns to have a predetermined distance. Each of the patterns is formed of the copper layer 31 of the skin material 30 of the reflector body. The copper film layer patterns are not limited to the ring-shape. The shape can be appropriately set in accordance with a frequency to be used, etc. Similar to the dual grid reflector, the etching mask forming process using the laser beam, and the etching process are executed so as to form the FSR. In the above-mentioned embodiment, the copper film layer 11 was formed of copper foil as a metal film layer. However, in the present invention, for example, the copper film layer 11 can be replaced by a layer made of other metal such as aluminum, or the like, is formed on the skin material 10 by plating, spattering, vapor-deposition, or the like. Then, the resin film 12 is formed on the metal film layer. Thereafter, the resin film 12 is removed with the laser beam, forming an etching mask on the metal film layer. Thereby, the metal film layer pattern can be formed. Also, the auxiliary copper film 41 can be replaced by a film made by other metal such as aluminum. The above-mentioned embodiment explained the case in which the copper film layer pattern was formed on the skin material 10 and the skin material 10 was adhered to the honeycomb core so as to form the reflector body. However, in the present invention, for example, the skin material 10 is adhered to the honeycomb core so as to form the reflector body. Thereafter, the resin films 12 are sequentially formed. Then, the resin films 12 are removed with the laser beam, and the etching process is provided so that the copper film layer pattern can be formed. The above-mentioned embodiment explained the case in which a an ultraviolet laser beam was used to remove the resin film 12. However, in the present invention, various kinds of laser beams such as a visible laser beam, and an infrared laser beam, etc., can be used. In the case of using the visible laser beam, the infrared laser beam, it is necessary to consider the importance of the optical characteristic of the resin film 12. Specifically, the resin film 12 having a high absorptance to the wavelength of the using laser beam must be utilized. As an example of the optical characteristic of the resin film 12, FIG. 7 shows the characteristic of Plasticoat MR made by Daikyo Kagaku, and FIG. 8 shows the characteristic of Plasticoat #100 made by the same. It is assumed that a SHG-YAG laser beam (wavelength of 532 nm) having high practical use is utilized as a laser beam source. It is difficult to process Plasticoat #100 to be removed since the absorptance of plasticoat #100 to the wavelength of 532 nm is only about 20%. On the other hand, the absorptance of plasticoat MR to the wavelength of 532 nm is 90% or more. Therefore, the laser beam can be efficiently absorbed into Plasticoat MR, serving as the resin film 12, so that Plasticoat MR can be processed well to be removed. In the case of the ultraviolet laser beam having the wavelength of 280 nm or less, all kinds of resin films 12 can absorb the ultraviolet laser beam of substantially 100%. However, in the case of the visible or infrared laser beam, the resin film 12 having a high absorptance to the wavelength of the using laser beam must be utilized. In the explanation of the above-mentioned embodiment, the laser beam irradiation section 22 was formed of the telecentric optical system. Then, the laser beams sent from the laser beam source 21 were converted to laser beams which are substantially parallel to each other. However, the present invention is not limited to the above embodiment. As shown in FIG. 19, the laser beam irradiation section 34 may be formed of a converging optical system 33 in place of the telecentric optical system. The laser beams sent from the laser beam source 21 are converged by the laser beam irradiation section 34. Then, the resin film 12 on the skin material 10 may be irradiated with the converged laser beam. In this case, the optical system drive section 32 of the laser beam irradiation section 34 is moved in the direction of an optical axis by the control section 26, so that the laser beam sent from the laser beam source 21 is converged on the resin film 12. Moreover, the present invention may be manufactured by the steps shown in FIG. 20. Specifically, in the first step, the reflector body is formed of an insulation substrate so as to be shaped like a reflector surface. Then, the metal film layer such as a copper film layer is formed on its reflective surface. In the second step, the metal film layer of the reflector body is directly irradiated with the ultraviolet laser beam such as KrF excimer laser so as to be removed. Thereby, a predetermined metal film layer pattern is formed. Accordingly, the metal film layer pattern can be formed without providing the masking process and the etching process. Thereby, the reflector can be rapidly manufactured. In forming the metal film layer pattern with the direct irradiation of the ultraviolet laser beam, the metal film area may be irradiated with the ultraviolet laser beam to have a predetermined space. Then, the metal film between the portions irradiated with the ultraviolet laser beam is removed so as to minimize the laser beam irradiation area. Thereby, the large area of the metal film layer can be removed. In forming the copper film layer pattern with the direct irradiation of the ultraviolet laser beam, the laser beam irradiation section and the reflector body are three-dimensionally controlled, so that the copper film layer pattern can be formed.

Claims: A method for manufacturing a reflector by forming a metal film layer pattern (1a,2a) on a reflective surface of a skin material (10) of a reflector body formed of an insulation substrate and having a curved surface, comprising: a first step of forming the skin material (10) of said reflector body of an insulation substrate, and a metal film layer (11) on the reflective surface of the skin material (10); a second step of coating the metal film layer (11) on said reflective surface with a strippable resin to form a resin film (12); a third step of irradiating the resin film (12) on said reflective surface with a laser beam and three-dimensionally controlling a laser irradiation section of said laser beam to thereby remove a portion of the resin film (12) in a slit shape along the shape of the metal film layer pattern (1a,2a) of said metal film layer (11), and stripping off said resin film (12) between slits and outside a metal film layer pattern region of said metal film layer (11) to form a mask of said resin film (12) on the metal film layer pattern; a fourth step of removing the metal film layer (11) exposed on the reflective surface and masked with said resin film (12) by etching; and a fifth step of stripping off said resin film (12) covering the metal film layer pattern (1a,2a) on the reflective surface to which said etching has been performed, so that the metal film layer pattern (1a,2a) is exposed. The method for manufacturing a reflector according to claim 1, wherein in said fifth step, an auxiliary resin mask (40) is formed on the reflective surface containing the resin film (12) which covers said metal film layer pattern (1a,2a), the resin film (12) on said metal film layer pattern (1a,2a) is stripped off together with said auxiliary resin film (40) to expose the metal film layer (11), a portion (lla) of the metal film layer pattern (1a,2a) where the metal film is lacking is coated with an auxiliary metal film (41), and said auxiliary resin film (40) on said reflective surface is stripped off. A method for manufacturing a reflector by forming a metal film layer pattern (1a,2a) on a reflective surface of a skin material (10) of a reflector body formed of an insulation substrate and having a curved surface, comprising: a first step of forming the skin material (10) of said reflector body of an insulation substrate, and a metal film layer (11) on the reflective surface of the skin material (10); a second step of irradiating the metal film layer (11) on said reflective surface with a laser beam and three-dimensionally controlling a laser irradiation section of said laser beam to thereby remove a portion of the metal film layer (11) in a slit shape in accordance with the shape of the metal film layer pattern (1a,2a) of said metal film layer (11), and stripping off said metal film layer (11) between slits and outside a metal film layer pattern region to form the metal film layer pattern (1a,2a) on the reflective surface. The method according to claim 1, 2 or 3, wherein said laser beam is a visible laser beam or an ultraviolet laser beam.

Inventors: FURUKAWA KOICHI, GOTO NORIAKI, KAWADA YOSHITAKA, MATSUNAKA SHIGEKI, ORIKASA TERUAKI, YAMASHITA AKIRA, FURUKAWA, KOICHI, GOTO, NORIAKI, KAWADA, YOSHITAKA, MATSUNAKA, SHIGEKI, ORIKASA, TERUAKI, YAMASHITA, AKIRA, FURUKAWA, KOICHI, C/O KABUSHIKI KAISHA TOSHIBA, GOTO, NORIAKI, C/O KABUSHIKI KAISHA TOSHIBA, KAWADA, YOSHITAKA, C/O KABUSHIKI KAISHA TOSHIBA, MATSUNAKA, SHIGEKI, C/O KABUSHIKI KAISHA TOSHIBA, ORIKASA, TERUAKI, C/O KABUSHIKI KAISHA TOSHIBA, YAMASHITA, AKIRA, C/O KABUSHIKI KAISHA TOSHIBA
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1996
Main classification: B23K26
IPC codes: B23K26, C23F1, H01Q15