Segmented oxygen blowing lance capable of being used in an electric arc furnace

Abstract: An oxygen blowing lance capable of directing oxygen jet streams onto a molten metal in an electric furnace (1), the lance (11,12a,12b) being insertable into the electric furnace (1) through a sidewall working port (10), the lance (11,12a,12b) being positionable above the molten metal (9) in the electric furnace (1). The lance (11,12a,12b) includes a horizontal segment (15) and an angled segment (14), the angled segment (16) being positioned on the distal portion of the horizontal segment (15) and being inclined relative to the horizontal segment (15). The lance also includes a tip (14), the tip (14) being positioned on the distal portion of the angled segment (16), with the distal portion of the tip (14) being directed toward the molten metal (9). The horizontal segment (15), the angled segment (16) and the tip (14) define an oxygen flow channel (19) and a cooling water flow channel (20). The oxygen flow channel (19) extends substantially the length of the lance, and the cooling water flow channel (20) surrounds the oxygen flow channel (19). The lance also includes a plurality of nozzles (21), each having a throat portion (22). The throat portions of the nozzles (21) being positioned on the distal portion of the tip (14). The nozzles (21) are operatively engaged with the oxygen flow channel, and at least one of the nozzles (21) is positioned nearer the molten metal (9) than the other nozzles.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a lance for blowing oxygen and, in particular, to a lance for blowing oxygen capable of being used in an electric furnace containing molten iron. Description of the Related Art Electric furnaces for the melting of metals, the refining of molten metals, and like processes, are well known in the art. Direct current electric furnaces melt metals and/or refine molten metals using an electric arc generated between an upper electrode disposed above the metal material and a lower electrode disposed on the bottom section, sidewall or a similar location in the furnace. In contrast, alternating current electric furnaces utilize an electric arc generated by conducting a current between three electrodes disposed above the metal material. In both types of furnaces, however, the melting of the metal material, the refining of the molten metal, and like processes are accelerated by blowing oxygen or powder into the molten metal using a lance. An example of a conventional lance is disclosed in Japanese Utility Model Application Laid-Open No. 2-38457 and is shown in FIG. 8 of the accompanying drawings. Lance 31, having a linear shape, is inserted into an electric furnace having an upper electrode 36 through a sidewall 33 by a self-propelled cart 32. A single oxygen blowing nozzle 34 is formed at the extreme end of the lance 31. A small diameter (about 40 mm) pipe usually constitutes the lance 31. Therefore, if the back pressure in the interior of the oxygen blowing nozzle 34 (i.e., gas pressure on the nozzle outlet side) is to be maintained at a critical pressure (nozzle inside pressure/atmospheric pressure > 1.89), oxygen flow through the pipe must be increased to impractical levels. Thus, the back pressure in the interior of the nozzle is set at or below the critical pressure, that is, the velocity of oxygen ejected from nozzle 34 is at sonic velocity or less. Since the oxygen ejection velocity is equal to or less than sonic velocity, and the oxygen is fed through just one nozzle 34 as described above, oxygen is directly introduced into the molten metal to ensure a sufficient supply by dipping the extreme end of the lance 31 into molten metal 35. However, when the extreme end of lance 31 is dipped into the molten metal 35 as described above, lance 31 is gradually consumed by the heat of molten metal 35. Consequently, replacement lances must be supplied to the self-propelled cart 32, which is troublesome and expensive. In addition, the extreme end of lance 31 can be bent by heat so that oxygen is ejected upward, which can damage the furnace wall to the extent that the furnace cannot be operated. To address these problems, a water-cooled type lance has been disclosed in Japanese Patent Application Laid-Open No. 6-192718. As shown in FIG. 9 of the accompanying drawings, a water-cooled and linearly-shaped lance 37 is inserted into the electric furnace and disposed above the surface of molten metal 35 through working port 39 in the sidewall 33 of the electric furnace. Further, a Laval type nozzle 38 having a slightly broadened end is used at the distal end of lance 37 to eject an oxygen jet stream on to the surface of the molten metal 35. Since the Laval type nozzle 38 slightly broadens toward the end as seen in cross section and shown in FIG. 10 of the accompanying drawings, nozzle 38 can eject an oxygen jet stream at an ultrasonic velocity unlike ordinary straight nozzles and abruptly expanding nozzles (as seen in cross section). As described above, the water-cooled lance 37 increases the amount of oxygen supplied to the molten metal 35 by ejecting an oxygen jet stream at ultrasonic velocity using the Laval type nozzle 38. In other words, the above-described lance-degradation problems are solved by ejecting oxygen at ultrasonic velocity from a position above the molten metal 35, thereby increasing oxygen utilizing efficiency without having to introduce the extreme end of the lance 37 into the molten metal 35. For molten metal refining in a converter, the water-cooled lance is inserted through an upper furnace port of the converter and ejects an oxygen jet stream on to the molten metal through the Laval type nozzle at an ultrasonic velocity of 500 m/s or higher. The distance from the surface of the molten metal to the nozzle (hereinafter referred to as the "lance height") is set between 2 to 4 m so that the velocity of the oxygen jet stream reaching the molten metal surface is 50 m/s or slower. Thus, scattered molten metal and slag generated when the oxygen jet stream collides against the surface of the molten metal is suppressed by limiting the stream velocity to 50 m/s or less. However, when the water-cooled lance 37 is inserted through working port 39 of the sidewall 33 of said electric furnace, the lance height of the lance 37 is limited by the size of the working port 39. Thus, the lance height range in the electric furnace is greatly limited as compared with the converter described above. Contemplated solutions to this problem include insertion of the lance 37 through the upper portion of the electric furnace as in the case of the converter, or increasing the lance height by tilting lance 37 upward as a whole as shown by a two-dot-and-dash-line in FIG. 9. However, since the height of the electric furnace is about one half that of the converter, a lance height similar to that in the converter cannot be obtained. It is also difficult to insert the lance 37 through the upper portion of the electric furnace because the electrode 36 is disposed in the upper portion. Moreover, tilting the lance 37 upward reduces the angle at which the oxygen jet stream strikes molten metal 35, thereby increasing the amount of slag and/or molten metal scattered on to the sidewall of the furnace. Since the lance height is greatly limited when the linear lance 37 is used with the electric furnace, the velocity of the oxygen stream at the molten metal surface becomes 100 m/s or higher. Consequently, the impact energy of the oxygen jet stream on the surface of the molten metal 35 is increased greatly as compared with the case of the converter. As a result, the impact energy disadvantageously acts on the molten metal and slag as a stirring force and a shearing force, thereby causing a large amount of the molten metal and particulate slag to be scattered. When scattered molten metal and slag are deposited on the wall or other components of the electric furnace, the electrodes are often short-circuited through the furnace lid which can result in fire damage to the furnace lid. Water-cooled boxes, which typically cover the sidewall of the furnace, can also be damaged by scattering, whereby water leaks occur. Further, scatter-deposited metal falling from the furnace lid into the molten metal causes a temperature drop in the molten metal, decarbonization and other potential problems. Damage to electrodes caused by scattering can shorten electrode life. Additionally, deposition of scattered molten metal on the furnace lid increases the weight of the furnace lid, thereby inhibiting movement of the furnace lid upward and downward. The deposition of scattered molten metal on the water-cooled lance melts and damages the lance. Also, the yield of iron is lowered when a large quantity of molten metal is scattered. It is clear that there is a strong need in the art for an oxygen blowing lance which can avoid these problems. US-A-4986847 describes a metallurgical vessel including a first lance for supplying oxygen or other gas and a second lance for supplying fine grain solid material. The first lance includes a downwardly inclined tip. FR-A-2489841 describes a metallurgical vessel including a lance for introducing gas and solid material into molten metal. The lance terminates in a plurality of downwardly inclined tips. US-A-4653730 discloses a pivotally mounted injector lance having a water cooled arcuate body. OBJECT OF THE INVENTION An object of the invention is to provide a durable oxygen blowing lance which limits the scattering of molten metal and slag when oxygen is blown through the lance onto molten metal in a furnace. Other objects of the invention will become apparent from the description provided below. SUMMARY OF THE INVENTION According to one aspect of the present invention there is provided a water cooled oxygen blowing lance capable of directing an oxygen jet stream onto molten metal in an electric furnace having a sidewall and a working port positioned in said sidewall, said lance having an inclined tip and being insertable into said electric furnace through said working port to a position above said molten metal in said electric furnace so that the tip is directed towards said molten metal characterised in that said lance comprises: a first segment having a distal portion and a longitudinal axis; and a second segment having a proximal portion and a distal portion, said proximal portion of said second segment being adjacent said distal portion of said first segment and said second segment being inclined in a direction away from said axis so as to be angled relative to said first segment; wherein the tip has a proximal portion and a distal portion, said proximal portion of said tip being adjacent said distal portion of said second segment and said distal portion of said tip being inclined in a direction towards said axis so as to be directed toward said molten metal; and said first segment, said second segment and said tip define an oxygen flow channel and a cooling water flow channel, said oxygen flow channel extending substantially the length of said lance and said cooling water flow channel surrounding said oxygen flow channel; said lance also including a plurality of nozzles each having a throat portion having a throat diameter and an outlet portion having an outlet diameter, said throat portion of each of said nozzles being positioned at said distal portion of said tip, said nozzles being operatively engaged with said oxygen flow channel, and at least one of said nozzles being positioned closer to said axis than other of said nozzles. According to another aspect of the present invention there is provided a method of blowing an oxygen jet stream onto molten metal in an electric furnace, said electric furnace being of the type having a sidewall, a working port positioned in said sidewall and an upper electrode, which method comprises:- inserting an oxygen blowing lance having a tip as hereinbefore defined into said furnace through said working port; feeding oxygen through said lance such that an oxygen jet stream is ejected from said tip of said oxygen blowing lance; and positioning said lance to direct said oxygen jet stream onto said molten metal and between said sidewall and said upper electrode. Since the second segment of the lance is inclined, the distal end of the lance is higher than the working port through which it is inserted. As a result, the lance height is increased without decreasing the angle at which the oxygen jet stream strikes the molten metal, as is the case in a conventional lance. An embodiment of the invention utilizes straight nozzles, i.e., nozzles having a substantially uniform diameter. Straight nozzles limit the maximum ejection velocity to sonic velocity. Thus, even if the back pressure in the interior of the nozzle is higher than the critical pressure, the oxygen jet stream velocity at the molten metal surface is slowed, thereby reducing the impact energy imparted to the molten metal by the oxygen stream. The same is true of an abruptly expanding nozzle, i.e., a nozzle having an increasing diameter from throat to outlet, which can likewise be used in the invention. Ejection velocity can be set to any selected velocity equal to or less than sonic velocity by adjusting the ratio of the small diameter portion (throat diameter) thereof to the large diameter portion (outlet diameter) thereof, and the back pressure in the interior of the nozzle. The invention also promotes effective oxygen/molten metal reaction by compensating for the potential shortage of oxygen supplied to the molten metal caused by setting the oxygen ejection velocity to sonic velocity or less. This is accomplished by utilizing a plurality of nozzles. The invention also enables a plurality of nozzles to direct a broad oxygen jet stream onto a large area of the molten metal surface, thereby lowering the impact energy per unit area, which in turn reduces molten metal scattering. This is accomplished by adjusting nozzle dimensions and/or lance height. Specifically, in an embodiment of the invention where a plurality of nozzles are positioned on the distal portion of the lance and some of the nozzles are close enough to the surface of the molten metal to potentially cause scattering, the oxygen jet stream ejection velocities from the respective nozzles are controlled by increasing the outlet diameters of nozzles nearer to the surface of the molten metal relative to the outlet diameters of more distant nozzles, so that the ejection velocity of the nearer nozzles is slowed relative to the more distant nozzles. In an embodiment of the invention where a plurality of the nozzles of the straight and abruptly expanding type are positioned on the distal portion of the lance, and where some of the nozzles are close enough to the surface of the molten metal to potentially cause scattering, the diameters of the abruptly expanding nozzles, which can be varied to produce any oxygen ejection velocity up to sonic velocity, are adjusted so that the oxygen ejection velocity of the abruptly expanding nozzles is slowed relative to the oxygen ejection velocity of the straight nozzles. This is typically accomplished by increasing the outlet diameter relative to the throat diameter. Other embodiments of the present invention will become apparent to those of ordinary skill in the art from the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic side cross-sectional view showing an oxygen blowing lance in accordance with the invention disposed in an electric furnace; FIG. 2 is an enlarged view of a portion of FIG. 1 showing the oxygen blowing lance in more detail; FIG. 3 is a plan view of FIG. 2; FIG. 4 is a cross-sectional view of an oxygen blowing lance in accordance with the invention; FIG. 5 is a view of the oxygen blowing lance of FIG. 4, without cross section, observed from the direction of arrow Y in FIG. 4; FIG. 6 is a cross-sectional view of another embodiment of an oxygen blowing lance in accordance with the invention; FIG. 7 is a cross-sectional view of a further embodiment of an oxygen blowing lance in accordance with the invention; FIG. 8 is a schematic depiction of a conventional oxygen blowing lance; FIG. 9 is a schematic depiction of another conventional oxygen blowing lance; and FIG. 10 is a cross-sectional view of the distal end of the conventional oxygen blowing lance shown in FIG. 9. DESCRIPTION OF THE INVENTION The invention will now be described with reference to FIGS. 1-7. The description and figures are illustrative of the invention and are not intended to limit the scope of the invention defined in the appended claims. Referring to FIG. 1, a direct current furnace 1 (hereinafter simply referred to as electric furnace 1) includes a furnace body 2 composed of a refractory material, a water-cooled box 3 covering a sidewall 4 of furnace body 2, furnace lid 5 positioned on the upper portion of furnace body 2, and an upper electrode 6 which is vertically and movably inserted into electric furnace 1 through a small ceiling portion 7 at the center of furnace lid 5. An electric arc is generated at upper electrode 6 by conducting a direct current between upper electrode 6 and a lower electrode (not shown) mounted on or near bottom section 8 of furnace body 2. Heat generated by the electric arc is used to melt scraps charged into electric furnace 1, refine molten metal 9, increase the temperature of the molten iron, or the like. Then, a powder blowing lance 11 and two water-cooled oxygen blowing lances 12a and 12b (shown in FIG. 3) are inserted into electric furnace 1 through a working port 10 located in sidewall 4 of furnace body 2 to facilitate the heating of the molten metal 9. Lances 11, 12a and 12b can be positionally adjusted relative to each other as well as advanced into and retracted from electric furnace 1 by a drive unit (not shown). Water-cooled oxygen blowing lances 12a and 12b will now be described with reference to FIGS. 2-5. As lances 12a and 12b are identical and are disposed symmetrically to each other in a horizontal direction as shown in FIG. 3, it is understood that the following description of lance 12a also applies to lance 12b. As shown in FIGS. 2 and 3, oxygen blowing lance 12a includes a body 13 inserted into electric furnace 1 through working port 10. Body 13 includes a substantially horizontal first segment 15 having a longitudinal axis X 1 and a second segment 16 and is inserted into electric furnace 1 substantially in a horizontal direction through working port 10. Second segment 16 has a proximal portion adjacent to the distal portion of first segment 15 and inclined in an upwards direction away from the longitudinal axis X 1 so that the second segment 16 is angled with respect to the first segment 15. As shown in FIG. 4, an oxygen flow channel 17 is provided in body 13 and is surrounded by a cooling water channel 18. Lance tip 14 is connected to the distal portion of angled second segment 16. As shown in FIGS. 2 and 4, lance tip 14 is inclined downwardly, towards the longitudinal axis X 1 , from the distal portion of angled segment 16, and extends therefrom so that the distal end of lance tip 14 faces the surface of the molten metal 9 located between the sidewall 4 and the upper electrode 6 (refer to FIG. 3). Lance tip 14 includes an oxygen flow channel 19 and a cooling water channel 20 in operative engagement with oxygen flow channel 17 and cooling water channel 18, respectively, of body 13. As shown in FIG. 2, the distal end of the lance tip 14 is positioned above the longitudinal axis X 1 of the first segment 15 (which axis extends in the lance insertion direction), and can be moved vertically over a wide range without rendering the collision angle of oxygen jet stream 25 against molten metal 9 disadvantageously small. As shown in FIG. 5, lance tip 14 has four nozzles 21 formed at the distal end surface thereof. As shown in FIG. 4, the nozzles 21 are of the abruptly expanding type. Each nozzle 21 has a small throat diameter portion 22 and a large outlet diameter portion 23. The oxygen jet stream 25 ejection velocity can be set to any value up to and including sonic velocity by adjusting the ratio of throat diameter portion 22 to the outlet diameter portion 23, and the back pressure in the nozzle. As shown in FIG. 5, two of the four nozzles 21 are positioned at the lower portion of the distal end surface of lance tip 14 that is, nearer to the axis X 1 and the surface of the molten metal 9, while the other two nozzles are positioned at the upper portion on the distal end surface of lance tip 14 that is, farther from the axis X 1 and the surface of the molten metal 9 relative to the first pair. The individual nozzles of each nozzle pair described above are spaced laterally from each other, also shown in FIG. 5. Further, the two nozzles 21 positioned nearer to the surface of the molten metal 9 have an outlet diameter larger than that of the two nozzles 21 positioned farther from the molten metal surface. With this arrangement, the ejection velocity of oxygen jet streams 25 from the nearer pair of nozzles 21 is slowed relative to the ejection velocity of oxygen jet streams 25 from the farther pair of nozzles 21 to substantially balance the velocities of the oxygen jet streams 25 at the molten metal 9. As shown in FIG. 3, lances 12a and 12b are positioned to direct oxygen jet streams 25 toward the surface of molten metal 9 between sidewall 4 and upper electrode 6. Thus, the oxygen jet streams 25 ejected from nozzle 21 do not directly strike upper electrode 6. Straight nozzles of various diameters may be used at the distal end of lance tip 14 in place of the aforesaid abruptly expanding nozzles 21. An example of a straight nozzle 24 is shown in FIG. 6. Since straight nozzles 24 have a uniform cross-sectional shape, i.e., the throat diameter is substantially the same as the outlet diameter, the ejection velocity can be no greater than sonic velocity even if the back pressure in the nozzle is greater than the critical pressure. Further, the nozzles 24 positioned nearer to the surface of the molten metal 9 have an outlet diameter larger than the nozzles 24 positioned farther from the molten metal surface. As shown in FIG. 7, both abruptly expanding nozzles 21 and straight nozzles 24 may be used at the distal portion of the lance tip. Abruptly expanding nozzle 21 is disposed on the lower side of the distal end surface of the lance tip, that is, nearer to the surface of the molten metal. Nozzle 24 is farther from the surface of the molten metal than abruptly expanding nozzle 21. A test was carried out using an oxygen blowing lance in accordance with the invention much as described above with reference to FIGS. 1-5. When the oxygen blowing lances were at a lance height of 300 - 1250 mm and contained an amount of oxygen equal to 60 m 3 -norm/min per lance, the velocity of the oxygen jet stream at the molten metal surface was controlled to 50 m/s or lower by adjusting the ejection velocity from a plurality of abruptly expanding nozzles to 150 m/s. A method of blowing oxygen through oxygen blowing lances in accordance with the invention will now be described in conjunction with an operational procedure involving an electric furnace. Scraps of steel making material were charged into a direct current electric furnace, and then partially melted by an electric arc generated from an upper electrode. Molten iron was charged into the direct current electric furnace, oxygen blowing lances were introduced into the electric furnace through a sidewall working port, and then an oxygen jet stream was directed through abruptly expanding nozzles of the oxygen blowing lances onto the molten iron/scraps mixture in the vicinity of the working port so that scrap melting was accelerated. This procedure is known as a cutting operation. When the scraps in the vicinity of the working port had been melted, the oxygen blowing lances were advanced into the inner portion of the electric furnace to thereby successively melt the scraps from the vicinity of the working port to the inner portion of the electric furnace. When the melting of the scraps was complete or substantially complete, the oxygen blowing lances were lifted (as shown by a two-dot-and-dash line in FIG. 2) to increase the lance height, and a temperature elevation and/or refining of the molten metal was carried out by directing an oxygen jet stream to the surface of the molten metal from the abruptly expanding nozzles of the oxygen blowing lances. The velocity of the oxygen jet stream at the molten metal surface was controlled to about 50 m/s or less, which is no more than one-half of the conventional velocity, by directing the oxygen jet stream at the molten metal surface from an elevated position without significantly reducing the striking angle of the oxygen jet stream against the molten metal. The velocity of the oxygen jet stream at the molten metal surface was also controlled by limiting the ejection velocities of the oxygen jet streams from the abruptly expanding nozzles to sonic velocity or less as described above. As a result, the impact energy applied to the surface of the molten metal could be greatly reduced. Even with ejection velocities limited to sonic velocity, sufficient oxygen for reaction was supplied because of the plurality of abruptly expanding nozzles feeding oxygen from the lance tip. Further, the oxygen jet stream could cover a large percentage of the surface area of the molten metal due to the increased lance height and plurality of nozzles, thereby increasing the surface area of molten metal impacted by the oxygen jet stream. Consequently, the impact energy per unit area of molten metal could be reduced and, as a result, the problematic scattering of molten metal and slag was greatly reduced as compared with processes involving conventional lances. The degradation of the upper electrode was also reduced by the oxygen blowing lances of the invention because the oxygen jet stream ejected from the nozzles was directed to the surface of the molten metal between the sidewall and the upper electrode. Thus, the potentially damaging oxygen jet stream did not directly strike the upper electrode. Further, since the oxygen blowing lances were disposed above the surface of the molten metal, the lances were not consumed by the heat of the molten metal as in the case of conventional lances. Although this invention has been described with reference to specific forms of apparatus and method steps, it is understood that many equivalent forms and steps may be substituted without departing from the scope of the invention as defined in the appended claims.

Claims: A water cooled oxygen blowing lance (12a)(12b) capable of directing an oxygen jet stream (25) onto molten metal (9) in an electric furnace (1) having a sidewall (4) and a working port (10) positioned in said sidewall, said lance having an inclined tip (14) and being insertable into said electric furnace through said working port to a position above said molten metal in said electric furnace so that the tip is directed towards said molten metal characterised in that said lance comprises: a first segment (15) having a distal portion and a longitudinal axis (X 1 ) ; and a second segment (16) having a proximal portion and a distal portion, said proximal portion of said second segment being adjacent said distal portion of said first segment and said second segment being inclined in a direction away from said axis so as to be angled relative to said first segment; wherein the tip (14) has a proximal portion and a distal portion, said proximal portion of said tip being adjacent said distal portion of said second segment and said distal portion of said tip being inclined in a direction towards said axis so as to be directed toward said molten metal; and said first segment, said second segment and said tip define an oxygen flow channel (17) and a cooling water flow channel (18), said oxygen flow channel extending substantially the length of said lance and said cooling water flow channel surrounding said oxygen flow channel; said lance also including a plurality of nozzles (21) each having a throat portion having a throat diameter (22) and an outlet portion having an outlet diameter (23), said throat portion of each of said nozzles being positioned at said distal portion of said tip, said nozzles being operatively engaged with said oxygen flow channel, and at least one of said nozzles being positioned closer to said axis than other of said nozzles. The oxygen blowing lance according to claim 1, wherein said throat diameter of said nozzles is smaller than said outlet diameter of said nozzles such that said nozzles have an abruptly expanding cross section. The oxygen blowing lance according to claim 1, wherein said throat diameter of said nozzles is substantially equal to said outlet diameter of said nozzles such that said nozzles are straight nozzles. The oxygen blowing lance according to claim 1, wherein at least one of said nozzles has said throat diameter smaller than said outlet diameter to form an abruptly expanding nozzle, and at least one of said nozzles has said throat diameter and said outlet diameter substantially equal to form a straight nozzle, said abruptly expanding nozzle being positioned closer to said axis than said straight nozzle. The oxygen blowing lance according to claim 1, 2 or 3, wherein said at least one of said nozzles positioned closer to said axis has an outlet diameter larger than other of said nozzles. An electric furnace having a sidewall (4), a working port (10) positioned in said sidewall, and an oxygen blowing lance (12a)(12b) as claimed in any one of claims 1 to 5 inserted into the furnace through said port such that said longitudinal axis (X 1 ) of said first segment (15) is substantially horizontal. A method of blowing an oxygen jet stream onto molten metal in an electric furnace (1), said electric furnace being of the type having a sidewall (4), a working port (10) positioned in said sidewall and an upper electrode (6), which method comprises:- inserting an oxygen blowing lance (12a)(12b) having a tip (14) as claimed in any one of claims 1 to 5 into said furnace through said working port; feeding oxygen through said lance such that an oxygen jet stream (25) is ejected from said tip of said oxygen blowing lance; and positioning said lance to direct said oxygen jet stream onto said molten metal and between said sidewall and said upper electrode.

Inventors: OKAMOTO HIROSHI, TAKASHIBA NOBUYOSHI, OKAMOTO, HIROSHI, TAKASHIBA, NOBUYOSHI, Okamoto, Hiroshi, Tech. Planning Dept., c/o Mizush, Takashiba, Nobuyoshi, Technical Planning Dept., c/
Applicants: KAWASAKI STEEL CO, KAWASAKI STEEL CORPORATION
Application year: 1996
Main classification: C21C5
IPC codes: F27B3, C21C5