Fluid control system and valve to be used therein

Abstract: A fluid control system, and its valve assemblies, are used to control the feeding of fluids accurately (by operating (opening and closing) valves promptly and accurately), for the manufacture of semiconductors, magnetic thin films, biotechnical products, and other products. The fluid control system comprises a principal control line (L) and plural branch control lines (L 1 , L 2 , ...) for feeding plural types of fluid (G 1 , G 2 ,...) into a processing device (C) coupled to the principal control line, and plural valve assemblies (V) incorporated in the branch control lines (L 1 , L 2 ,...) for switching the fluids (G 1 , G 2 ,...) supplied into the processing device (C). Each of the valve assemblies (V) comprises a fluid drive valve (V') having a fluid pressure actuator (1), and an electromagnetic valve (V") integrally attached, in single housing, substantially without hoses, to the fluid drive valve (V') to feed a working fluid (A) into the fluid pressure actuator (1).

Description: BACKGROUND OF THE INVENTION The present invention relates to a fluid control system for feeding various fluids into a processing device and to a type of valve used therein, the fluid control system being used for manufacturing semiconductors, magnetic thin films, biotechnical products, pharmaceuticals, and other products; and more particularly the invention relates to such a fluid-control-system valve capable of accurately controlling the flow of various fluids into the processing device by operating many such valves promptly and accurately with electrical signals. Fig. 4 shows an example of a conventional prior art fluid control system used in the manufacture of semiconductors. This fluid control system includes a principal control line L and branch control lines L 1 to L 5 for feeding several types of fluid G 1 , G 2 , G 3 , G 4 , G 5 into a processing device (process chamber for processing the wafers) C, and plural valve assemblies V''' incorporated in the branch control lines L 1 to L 5 for switching the fluids G 1 , G 2 , G 3 , G 4 , G 5 supplied to the process chamber C. In Fig. 4, L 6 denotes a vacuum exhaust line connected to the process chamber C, P 1 is a vacuum pump connected to the vacuum exhaust line L 6 , L 7 is a vent line connected to the principal control line L, P 2 is a vacuum pump connected to the vent line L 7 , and V 1 , V 2 , V 3 are valves. The valve assemblies V''' are blocks of valves, in structures of integrally combined plural metal diaphragm valves (that is, metal diaphragm valves in a single body structure), or other types of valves, and they are designed to be worked by fluid pressure actuators (fluid pressure cylinders and pistons). That is, the valve assemblies V''' include fluid driven valves. Each valve of each valve assembly V"' is connected, via a tube T to a valve of an electromagnetic valve assembly EV for feeding working fluid to it, and it is designed to operate when its electromagnetic valve is opened for feeding a working fluid A into a fluid pressure actuator through the respective tube T. The valves of the electromagnetic valve assembly EV are assembled at a single place in a block structure, having one inlet and plural outlets, and each outlet is connected to a fluid pressure actuator of a valve of a valve assembly V''' through a respective tube T. Therefore, in this fluid control system, the working fluid A is supplied to each valve of a valve assembly V''' from its electromagnetic valve through its tube T, and each valve assembly V"' is thereby properly controlled to open or close, so that an individual one, or a mixture of some, of the fluids G 1 , G 2 , G 3 , G 4 , G 5 is/are supplied to the process chamber C through the valve assemblies V'''. In such fluid control systems, an action response time of each valve assembly V"' to an operation signal depends upon an action response time of each valve of the valve assembly V"' itself, and a time for feeding the working fluid A. That is, the action response time of each valve assembly V''' is the sum of time elapsing from before a respective valve of the electromagnetic valve assembly EV is opened by an operation signal, the working fluid is supplied to a respective valve of the valve assembly V"' from the electromagnetic valve through the tube T, and the valve itself is opened (or closed). In this fluid control system, however, since an air actuator of each valve of each valve assembly V"', and its respective valve of the electromagnetic valve assembly EV, are connected through a tube T, it takes an undue amount of time before the working fluid is supplied; thus operation (opening or closing) of the valves of the valve assembly V''' cannot be done promptly. Further, lengths of the tubes T for connecting the valves of the valve assemblies V''' with their electromagnetic valves EV vary with the result that differences in action response times of the valve assemblies occur. As a result, when a mixture of several different types of fluids is supplied, for example by using normally closed valves, the plural valves of the valve assemblies V"' cannot be opened promptly and simultaneously, and it takes a considerably long time before the mixing ratio of these fluids is stabilized. This period is "lost time", and the fluids used are wasted. Similarly, when a feeding of mixed gasses uses normally open valves, the valves of the valve assemblies V"' cannot be closed promptly and simultaneously, and the fluids used are wasted. The fluids for manufacturing semiconductors are very expensive, and this is, therefore, a serious economic problem. Furthermore, if the working fluid A is discharged simultaneously from plural outlets of the electromagnetic valve EV, the working fluid A may be insufficient, and a pressure drop may occur. As a result, differences in action response times due to pressure decline of the working fluid A may occur. Thus, in this conventional fluid control system, since the plural valves of the valve assemblies V''' cannot be promptly, accurately and simultaneously operated (opened and closed), it is hard to accurately control the feeding of fluids G 1 , G 2 , G 3 , G 4 , G 5 into the process chamber C. It is an object of this invention to provide a fluid control system, for operating (opening and closing) valves accurately and promptly, and thereby controlling the feeding of fluids accurately, for use in manufacturing semiconductors, magnetic thin films, biotechnical products, pharmaceuticals, and other products. It is a further object of the invention to provide a valve assembly, suitable for use in such a fluid control system. Solenoid-controlled valve assemblies are known in the art and are described, for example, in US 4986299, JP 6087135, and DE 3800654. Each of these documents discloses a valve assembly comprising a fluid drive valve which includes a movable stem extending into the valve chamber for closing the valve, and which is opened on solenoid actuation, which causes the stem to be thrust further into the valve chamber so as to open up a passageway through the chamber. Thus, in the open valve configuration, fluid passing through the valve chamber must pass over and around the stem, with a consequent risk of fluid contamination, stem corrosion, and disruption and deceleration of flow rates DE 1953850 meanwhile discloses a valve assembly having a fluid drive valve which includes a movable stem extending into the valve chamber for closing the valve, which stem is movable out of the valve chamber for opening the valve. The movement of the stem is regulated by a spring, which usually urges the stem into the closed position, and a pressure fluid which can be selectively pumped under the control of an actuating solenoid through a duct provided in a peripheral wall of the spring housing into a space under a piston head provided on the stem, such as to urge the stem away from the chamber and thereby open the valve. Owing to the length of the pressure fluid duct, the response time of the valve is however disadvantageously long. Moreover, the construction of the valve assembly and in particular its component parts such as the spring housing is complex and therefore both time-consuming and expensive. According to one aspect of the present invention, therefore, there is provided a valve assembly comprising a fluid drive valve V' which comprises a first body having an inflow passage, an outflow passage, a first valve chamber and a first valve seat; a stem movably supported by the first body; a disk engaged with the stem and adapted to be moved towards or away from the first valve seat by corresponding motion of the stem towards or away from said first valve chamber for respectively closing and opening said fluid drive valve; and a valve closing spring adapted to bias the stem towards said first valve chamber so that the fluid drive valve is normally closed; a fluid pressure actuator adjacent said body and adapted to cause sliding movement of said stem; said fluid pressure actuator comprising a cylinder defining a chamber therein, which cylinder comprises a first feed port and a second feed port; a piston slidably disposed in said cylinder chamber, which piston is fixed to said stem such that sliding movement of said piston causes corresponding sliding movement of said stem towards or away from said first valve chamber for closing or opening said fluid drive valve; and a piston cap fixed to said piston; and an electromagnetic valve V" integrally attached to said fluid pressure actuator for selectively applying fluid pressure to said fluid pressure actuator; said electromagnetic valve comprising a second body having an inlet, an outlet, a second valve chamber and a second valve seat; a plunger slidably disposed in said second body; a disk attached to the plunger, such that sliding movement of the plunger causes said disk to move towards or away from the second valve seat for respectively closing or opening said electromagnetic valve; a spring adapted to bias said plunger in a valve closing direction in which said disk contacts said second valve seat such that the valve is closed; a magnetic core and an excitation coil surrounding said core, which coil can be energised to cause the plunger to move in a valve opening direction such that the disk is separated from said second valve seat such that the electromagnetic valve is opened; said inlet being adapted to allow the inlet of a working fluid, and said outlet being arranged to communicate with said second feed port for allowing the outlet of said working fluid into said second feed port when said electromagnetic valve is open; characterised in that said piston has a communicating hole that extends therethrough and opens into said cylinder chamber on a side towards the fluid drive valve V'; and said piston cap has a penetration hole for communicating between said second feed port and said communicating hole; the arrangement being such that working fluid supplied from said outlet into the second feed port will flow through said penetration hole and said communicating hole into said cylinder chamber, thereby causing said piston to slide within said chamber away from said fluid drive valve V', such that said stem is caused to slide away from said first valve chamber for opening said fluid drive valve V'. According to another aspect of the present invention, there is provided a fluid control system comprising a principal control line (L) and plural branch control lines (L 1 , L 2 ...) for feeding plural types of fluids (G 1 , G 2 . ) into the principal control line (L), with a processing device (C) being attached to the principal control line (L), and at least one branch valve assembly (V) in one or more of said branch control lines (L 1 , L 2 ...)for switching the fluids (G 1 , G 2 ...) supplied to the processing device (C), wherein one or more of the branch valve assemblies (V) comprises a valve assembly in accordance with the present invention. In this fluid control system, when the electromagnetic valve is opened by an electric signal energizing the electromagnetic valve, it supplies a working fluid into the fluid pressure actuator of the fluid drive valve along a shortest possible route through the inlet, electromagnetic-valve chamber, and output of the electromagnetic-valve body, thereby actuating the fluid pressure actuator. As a result (in the case of a normally closed fluid drive valve), the fluid drive valve is opened and the fluid is supplied into the processing device. In the case of a normally open type fluid drive valve, the fluid drive valve is thereby closed so that supply of fluid into the processing device is stopped. In this fluid control system, plural valves of this structure (the structure of an electromagnetic valve directly coupled with a fluid drive valve) are incorporated into the branch control lines, or into a branch control line and the principal control line, for feeding plural types of fluids into the processing device. As a result, each fluid drive valve can be operated (opened and closed) promptly and accurately, and the feeding of fluids into the processing device can be accurately controlled. Hence, the quality of semiconductors produced therewith is improved, and troubles due to reverse flow or reverse diffusion of fluids are eliminated. BRIEF DESCRIPTION OF THE DRAWING The invention is described and explained in more detail below using the embodiments shown in the drawings. The described and drawn features, in other embodiments of the invention, can be used individually or in preferred combinations. The foregoing and other objects, features and advantages of the invention will be apparent from the following more particular description of a preferred embodiment of the invention, as illustrated in the accompanying drawings in which reference characters refer to the same parts throughout the different views. The drawings are not necessarily to scale, emphasis instead being placed upon illustrating principles of the invention in a clear manner. Fig. 1 is a schematic block diagram showing an example of a fluid control system for semiconductor manufacturing apparatus in one embodiment of this invention; Fig. 2 is an enlarged vertical cross-sectional view of a first-embodiment switching valve assembly used in the fluid control system of Fig. 1; Fig. 3 is a segmented, enlarged, vertical cross-sectional view of a second-embodiment switching valve assembly used in the fluid control system of Fig. 1; and, Fig. 4 is a schematic block diagram showing an example of a conventional, prior-art, fluid control system. DESCRIPTION OF THE PREFERRED EMBODIMENT Referring now to the drawings, an embodiment of the invention is described in detail below. Fig. 1 is a schematic block diagram of a fluid control system for semiconductor manufacturing apparatus according to an embodiment of the invention, with this fluid control system being composed of a principal control line L and plural branch control lines L 1 , L 2 , L 3 , L 4 , L 5 for feeding plural types of fluid G 1 , G 2 , G 3 , G 4 , G 5 into a processing device C, i.e. into a process chamber for processing wafers; there being plural valve assemblies V incorporated in the branch control lines L 1 , L 2 , L 3 , L 4 , L 5 for switching the fluids G 1 , G 2 , G 3 , G 4 , G 5 being supplied into the processing chamber C. In Fig. 1, while L is a principal control line, and L 1 to L 5 are branch control lines, L 6 is a vacuum exhaust line connected to the process chamber C (i.e. the processing device), P 1 is a vacuum pump of high vacuum type (for example, a turbo molecular pump) disposed at a chamber C end of the vacuum exhaust line L 6 , P' 1 is a vacuum pump of low vacuum type (for example, a rotary pump or dry pump) disposed on the vacuum exhaust line L 6 at an atmospheric end remote from the chamber C, L 7 is a vent line connected to the fluid principal control line L, P 2 is a vacuum pump (rotary pump) connected to the vent line L 7 , and V 1 to V 3 are valves for opening and closing. Liquid (liquefied gas) or gas (vaporized gas) may be used as the fluids G 1 , G 2 ,... in Fig. 1. The valve assemblies V are each composed of a fluid drive valve V' having a fluid pressure actuator 1, and an electromagnetic valve V" integrally attached to the fluid drive valve V' for feeding working fluid A into the liquid pressure actuator 1. Oil pressure, water pressure, gas pressure (of nitrogen gas or the like), air pressure, or the like, can be employed in the liquid pressure actuator. More specifically, the fluid drive valve V' comprises a body 2 (Fig. 2) having a valve seat 2d provided in the bottom of a valve chamber 2c of concave form communicating with an inflow passage 2a and an outflow passage 2b, a bellows flange 3 disposed at an upper portion of the valve chamber 2c, a tubular bonnet 4 disposed on the upper surface of the bellows flange 3, a bonnet nut 5 screwed on the body 2 for tightening and fixing the bellows flange 3 and bonnet 4 to a side of the body 2, a stepped stem 6 movably inserted and supported in the bellows flange 3 and bonnet 4 with a lower end thereof being positioned in the valve chamber 2c), a disk 7 fixed to the lower end of the stem 6 for contacting and moving away from the valve seat 2d, metal bellows 8 having opposite ends hermetically affixed to the bellows flange 3 and the lower end of the stem 6 by welding, a valve closing spring 10 interposed between the bonnet 4 and a spring retainer 9 engaged with the stem 6 (for thrusting the stem 6 downward so that the disk 7 contacts the valve seat 2d), and the fluid pressure actuator 1 having a cylinder/piston structure at the bonnet 4 for driving the stem 6 upwardly with the working fluid A; the fluid drive valve V' being a normally closed valve. The fluid pressure actuator 1 comprises a cylinder 11 forming a cylinder chamber, a piston 12 disposed slidably in the cylinder 11, and a piston cap 13 attached to the piston 12. The fluid pressure actuator 1 is designed to drive the stem 6 upwardly with working fluid A. Oil, water, nitrogen gas, air, or the like may be used as the working fluid A, but air is used as the working fluid A in this embodiment. Providing a more detailed description, the cylinder 11 is hermetically fixed to an upper part of the bonnet 4 by means of a stop ring 14, a washer 15, and an O-ring 16, and is composed of an actuator body 11' having a nearly tubular form with its bottom end surrounding an upper end of the stem 6 projecting from the body 2, and a cap 11" screwed on the actuator body 11' for capping its opening. The cylinder chamber is formed inside the cylinder 11. A first feed port 11a is formed at an outer circumferential end portion of the cap 11", which opens at a side and at an upper end of the cylinder 11. A second feed port 11b is formed in the middle of the cap 11", for communicating with the cylinder chamber. The piston 12 is attached to the upper end of the stem 6 by an E-ring 17 and a collar 18, and the piston 12 is designed to slide in a vertical direction in the cylinder chamber on an O-ring 19 fitted on the outer circumference at this piston 12. The piston 12 has a communicating hole 12a for bringing into communication upper and lower parts of the cylinder chamber, which is, thusly, split in the vertical direction. The piston cap 13 has a nearly inverted T form in its sectional shape, and it is fixed to an upper surface of the piston 12 by a screw 20, and its upper end is sealingly (hermetically) inserted into the second feed port 11b of the cap 11" to be slidable therein. A penetration hole 13a is formed in a central part of the piston cap 13 for communicating between the second feed port 11b of the cap 11" and the communicating hole 12a of the piston 12. Thus, for the fluid drive valve V', when working fluid is supplied into the lower part of the cylinder chamber through the second feed port 11b, the penetration hole 13a and the communicating hole 12a, the piston 12 goes up, and the stem 6 also rises, overcoming an elastic force of the valve closing spring 10, thereby separating the disk 7 from the valve seat 2d and communicating the inflow passage 2a with the outflow passage 2b (valve open state). When the supply of the working fluid A is stopped and the cylinder chamber is exhausted, an elastic force of the valve closing spring 10 forces the piston 12 and the stem 6 to move downwardly, thereby forcing the disk 7 to contact the valve seat 2d, closing communication between the inflow passage 2a and the outflow passage 2b. On the other hand, the electromagnetic valve V" is attached to an upper surface of the cap 11" of the fluid pressure actuator 1, and comprises a body 21 having an inlet 21a communicating and with the first feed port 11a, an outlet 21b communicating with the second feed port lib, a valve chamber 21c communicating with the inlet 21a and outlet 21b, a valve seat 21d formed in the valve chamber 21c, a coil case 22 provided at the upper surface of the body 21, a lid body 23 for covering the valve chamber 21c, a tubular plunger 24 elevatably (slidably) supported on the lid body 23 with its lower end being inserted in the valve chamber 21c, a first disk 25 at the lower end of the plunger 24 for contacting and separating from the valve seat 21d, a core 26 disposed above the plunger 24 and forming an exhaust hole 26a, an excitation coil 27 provided around the core 26, a lead wire 28 connected to the excitation coil 27, and a spring 29 for thrusting the plunger 24 downwardly so that the first disk 25 is on the valve seat 21d. This electromagnetic valve V" is normally closed. In Fig. 2, a second disk 30 is disposed in the plunger 24, for opening and closing the exhaust port 26a, 31 being a spring for thrusting the second disk 30, 32 being an O-ring, and 33 being a blind plug. In the electromagnetic valve V", when the excitation coil 27 is excited by turning on an electric current, the plunger 24 is pulled up toward the core 26, overcoming an elastic force of the spring 29, and the first disk 25 is separated from the valve seat 21d. As a result, the working fluid A, supplied from the first feed port 11a into the inlet 21a is supplied into the second feed port 11b through the valve chamber 21c and the outlet 21b, thereby actuating the fluid pressure actuator 1 of the fluid drive valve V'. When excitation of the excitation coil 27 is cut off, the plunger 24 falls, due to the elastic force of the spring 29, and the first disk 25 comes to rest on the valve seat 21d. As a result, the electromagnetic valve V" is closed, and supply of the working fluid A into the fluid pressure actuator 1 is stopped. Thus constituted, the valves assemblies V are incorporated into branch control lines L 1 to L 5 to control communication therethrough to the process chamber C. That is, the inflow passage 2a and outflow passage 2b of the fluid drive valve V' are connected to the branch control lines L 1 to L 5 for controlling communication therethrough to the process chamber C, and the first feed port 11a of the fluid pressure actuator 1 is connected to a fluid supply source (not shown) through a tube (not shown). A compressor, a pressurized air storage tank, a nitrogen gas cylinder, a hydraulic pump, and other sources may be used as the fluid supply source. A valve assembly V may also be incorporated into the principal control line L. When mixing plural types of fluids and feeding a mixture thereby produced into the process chamber C with this fluid control system, provided with these plural valve assemblies V, the electromagnetic valves V" of the plural valve assemblies V are opened by electronic control signals. That is, when the excitation coil 27 of each electromagnetic valve V" is excited, its plunger 24 is pulled upwardly toward its core 26, overcoming the elastic force of its spring 29, and its first disk 25 is separated from its valve seat 21d. As a result, the working fluid A supplied from the fluid supply source into the first feed port 11a through the tube is supplied into the second feed port 11b of the fluid pressure actuator 1, from the inlet 21a of the electromagnetic valve V" through valve chamber 21c and outlet 21b and flows from the second feed port 11b through the penetration hole 13a and communicating hole 12a, and is supplied into the lower part of the cylinder chamber. When the working fluid is supplied into the lower part of the cylinder chamber, the piston 12 ascends, and, accordingly, the stem 6 rises, overcoming the elastic force of the valve closing spring 10, and the disk 7 is separated from the valve seat 2d. Thusly, a plurality of fluid drive valves V' can be opened, and several types of fluids can be supplied into the process chamber C in a mixed state. In the fluid control system of the invention, each of the valve assemblies V comprises the fluid drive valve V' having the fluid pressure actuator 1, and the electromagnetic valve V" for feeding fluid into the fluid pressure actuator 1. Since the electromagnetic valve V" is directly coupled (by a unitary housing with substantially no hoses) to the fluid drive valve V', the working fluid A is immediately supplied into the fluid drive valve V' when the electromagnetic valve V" is opened, and hence the fluid drive valve V' is operated (opened and closed). That is, the valve assembly V is operated (opened or closed) promptly. Since each valve assembly V is structured such that the electromagnetic valve V" is directly coupled (by a unitary or block housing) with the fluid drive valve V', the lengths of working fluid A feed routes to all the valve assemblies V is the same, and there are no differences between the valves assemblies in regard to action response times. As a result, when mixing several types of fluids for use, the multiple valve assemblies V can be opened promptly and accurately, mixing ratios of fluids can be immediately stabilized, and there is no waste of fluids. Still further, since each valve assembly V has an electromagnetic valve V", it does not run short of working fluid A and a pressure drop does not occur. Differences in action time due to pressure drops of the working fluid A can also be prevented. In this way, the plural valve assemblies V of this fluid control system can be operated promptly and accurately, and supply of fluids into the processing device C can be controlled accurately. In this embodiment, a bellows valve is used as the fluid drive valve V', to which the electromagnetic valve V" is directly coupled; but in another embodiment, a metal diaphragm valve of direct touch type, as shown in Fig. 3, may be used as the fluid drive valve V', to which the electromagnetic valve V" of Fig. 2 may also be coupled directly. Looking at Fig. 3, 7a is a diaphragm made of thin metal plate (stainless steel plate, etc.), 7b is packing, and 6a is a diaphragm holder fixed at a lower end of the stem 6. By pushing the diaphragm 7a to the valve seat 2d by means of the diaphragm holder 6a, a fluid passage is closed. When the stem 6 is pulled upwardly, the diaphragm 7a, which has been pushed downwardly is pushed upwardly by elastic force, and the fluid passage is opened. In the foregoing embodiment, the valve assembly V is constituted such that the electromagnetic valve V" is directly coupled with the fluid drive valve V' in a single structure, but in another embodiment, the valve assembly V may also have plural electromagnetic valves V" directly coupled to a block valve assembly having plural fluid pressure actuators 1. In the foregoing embodiment, an actuator of cylinder/piston structure is used as the fluid pressure actuator 1 of the fluid drive valve V', but in other embodiments, actuators of diaphragm structure or bellows structure may be used as the fluid pressure actuator 1. In the foregoing embodiment, the fluid drive valve V' is of a normally closed type, but in other embodiments, it may be a normally open type. In that case, too, the valve assembly V would be operated promptly and accurately in the same manner as in the above described embodiments. According to this invention, a fluid control system employs a plurality of valve assemblies, each having a structure for directly coupling an electromagnetic valve with a fluid driven valve, in branch control lines and, via a principal control line, for feeding several types of fluids into a processing device. Thus, operation (opening and closing) of each valve assembly can be controlled promptly and accurately. As a result, fluid supply into the processing device can be controlled accurately so that the quality of products processed is improved and troubles due to reverse flow, or reverse diffusion of fluids, are eliminated. While the invention has been particularly shown and described with reference to a preferred embodiment, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the scope of the invention as defined in the appended claims.

Claims: A valve assembly V comprising a fluid drive valve V' which comprises a first body (2) having an inflow passage (2a), an outflow passage (2b), a first valve chamber (2c) and a first valve seat (2d); a stem (6) movably supported by the first body (2), a disk (7) engaged with the stem (6) and adapted to be moved towards or away from the first valve seat (2d) by corresponding motion of the stem (6) towards or away from said first valve chamber (2c) for respectively closing and opening said fluid drive valve, and a valve closing spring (10) adapted to bias the stem towards said first valve chamber (2c) so that the fluid drive valve is normally closed; a fluid pressure actuator (1) adjacent said body (2) and adapted to cause sliding movement of said stem (6); said fluid pressure actuator comprising a cylinder (11) defining a chamber therein, which cylinder (11) comprises a first feed port (11a) and a second feed port (11b), a piston (12) slidably disposed in said cylinder chamber, which piston (12) is fixed to said stem (6) such that sliding movement of said piston (12) causes corresponding sliding movement of said stem (6) towards or away from said first valve chamber (2c) for closing or opening said fluid drive valve; and a piston cap (13) fixed to said piston (12), and an electromagnetic valve V" integrally attached to said fluid pressure actuator (1) for selectively applying fluid pressure to said fluid pressure actuator, said electromagnetic valve comprising a second body (21) having an inlet (21a), an outlet (21b), a second valve chamber (21c) and a second valve seat (21d); a plunger (24) slidably disposed in said second body (21), a disk (25) attached to the plunger (24), such that sliding movement of the plunger (24) causes said disk (25) to move towards or away from the second valve seat (21d) for respectively closing or opening said electromagnetic valve, a spring (29) adapted to bias said plunger (24) in a valve closing direction in which said disk (25) contacts said second valve seat (21d) such that the valve is closed, a magnetic core (26) and an excitation coil (27) surrounding said core (26), which coil (27) can be energised to cause the plunger to move in a valve opening direction such that the disk (25) is separated from said second valve seat (21d) such that the electromagnetic valve is opened, said inlet (21a) being adapted to allow the inlet of a working fluid, and said outlet (21b) being arranged to communicate with said second feed port (11b) for allowing the outlet of said working fluid into said second feed port (11b) when said electromagnetic valve is open; characterised in that said piston (12) has a communicating hole (12a) that extends therethrough and opens into said cylinder chamber on a side towards the fluid drive valve V', and said piston cap (13) has a penetration hole (13a) for communicating between said second feed port (11b) and said communicating hole (12a); the arrangement being such that working fluid supplied from said outlet (21b) into the second feed port (11b) will flow through said penetration hole (13a) and said communicating hole (12a) into said cylinder chamber, thereby causing said piston (12) to slide within said chamber (11) away from said fluid drive valve V', such that said stem (6) is caused to slide away from said first valve chamber (2c) for opening said fluid drive valve V' A valve assembly as claimed in claim 1, characterised in that said fluid drive valve V' is a bellows valve, comprising a bellows flange (3) disposed adjacent to said valve chamber (2c) and bellows (8) having opposite ends hermetically affixed to said bellows flange (3) and said stem (6). said stem (6) being movably inserted and supported in said bellows flange (3) A valve assembly as claimed in claim 1, wherein said disk (7) engages a metal diaphragm (7a) that can be brought into contact with and moved away from the first valve seat (2d) by motion of the stem (6) A valve assembly as claimed in any preceding claim, wherein said first feed port (11a) extends between one longitudinal end face of the cylinder (11) and a side of the cylinder, and said second feed port (11b) opens into one end face of the cylinder (11) A valve assembly as claimed in any preceding claim, wherein said piston cap (13) is slidably inserted in said second feed port (11b) such that the penetration hole (13a) formed in the piston cap opens into said second feed port (11b). A valve assembly as claimed in any preceding claim, wherein said core (26) comprises an exhaust hole (26a) for venting fluid from said electromagnetic valve V", and said plunger (24) comprises a second disk (30) for sealing said exhaust hole (26a) when said electromagnetic valve is open A valve assembly as claimed in any preceding claim, wherein said cylinder (II) is hermetically sealed to said fluid drive valve V', by means of an O-ring (16) surrounding said stem (6) A valve assembly as claimed in any preceding claim, wherein said piston cap (13) is hermetically sealed to the cylinder (11) within said second feed port (11b). A valve assembly as claimed in any preceding claim, wherein said piston (12) is adapted to slide within said cylinder chamber on an O-ring (19) fitted on the outer circumference of said piston (12). A valve assembly as claimed in any preceding claim, wherein said piston cap (13) has an inverted T-shape in cross-section, and said penetration hole (13a) is formed centrally within said piston cap (13). A fluid control system comprising a principal control line (L) and plural branch control lines (L 1 , L 2 ..) for feeding plural types of fluids (G 1 , G 2 ...) into the principal control line (L), with a processing device (C) being attached to the principal control line (L), and at least one branch valve assembly (V) in one or more of said branch control lines (L 1 , L 2 ...) for switching the fluids (G 1 , G 2 ...) supplied to the processing device (C), wherein one or more of the branch valve assemblies (V) comprises: a valve assembly as claimed in any of claims 1-10.

Inventors: IKEDA NOBUKAZU, MOROKOSHI HIROSHI, OHMI TADAHIRO, YAMAJI MICHIO, IKEDA, NOBUKAZU, MOROKOSHI, HIROSHI, OHMI, TADAHIRO, YAMAJI, MICHIO
Applicants: FUJIKIN KK, OHMI TADAHIRO, FUJIKIN INCORPORATED, OHMI, TADAHIRO
Application year: 1996
Main classification: F16K31
IPC codes: C30B31, F16K31, C30B25, B01J4