A vibriation wave driving apparatus and a vibration member

Abstract: A vibration wave driving apparatus relatively moves a contact member and a vibration member by a vibration generated in the vibration member. The vibration member has a plurality of projections for magnifying the vibration displacement. At least the projections are formed on the vibration member by a press work.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a vibrating vibration member and a vibration wave driving apparatus having the vibration member. Related Background Art Conventionally, as a vibration member used in an ultrasonic motor as a vibration wave driving apparatus, a circular- or track-shaped vibration member is known. Also, as is known in, e.g., U.S.P. No. 4,831,305, a plurality of projections are formed on such vibration member to magnify the vibration displacement. The plurality of projections are formed by a cutting or grinding work, that requires much time and cost. As a method of attaining a cost reduction of an ultrasonic motor, the present inventors proposed a method of manufacturing an elastic member, which constitutes the vibration member, by a press work. An elastic member of a conventional ultrasonic motor is manufactured by a cutting or forging work. However, since the elastic member is manufactured from a plate material in the press work, it is impossible to obtain a conventional shape. Fig. 11 is a perspective view showing a rotor and a vibration member of a circular-shaped ultrasonic motor manufactured by a known cutting or forging work. A vibration member 1' is constituted by adhering a piezoelectric ceramic 1a' to a metal elastic member 1b' and a bottom surface portion 1d'. A rotor 2' has a contact portion 2a'. As can be seen from Fig. 11, this shape is not suitable for a press work attained by bending a thin plate. Therefore, a cutting or forging work is required, resulting in high work cost. With the press work using a thin plate as an inexpensive work method, a portion with poor bending rigidity is formed since the member is manufactured from the thin plate, and may disturb a function of the vibration member of the ultrasonic motor. Furthermore, EP-A-0 537 446 describes a piezo-electric motor, the rotor of which is provided with a thin-plate member having tongues which extend towards a stator and resiliently contact the latter. The stator is provided with a piezo-electric vibration generation means to form a circular vibration member which generates a suitable vibration wave which rotates the rotor. The tongues are formed from partially cut-out portions of the thin-plate member which are bent away from the main plane of the rotor along a bending line which extends in the radial direction of the rotor. It is the object of the invention to provide a vibration member for a vibration wave driving apparatus, which is easy to manufacture and brings about an improved performance of the vibration wave driving apparatus. This object is solved with a vibration member having the features of claim 1. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is an exploded perspective view of an ultrasonic motor according to an unclaimed example; Fig. 2 is an enlarged perspective view of principal part of a vibration member shown in Fig. 1; Fig. 3 is an enlarged sectional view of a movable member shown in Fig. 1; Figs. 4A and 4B are explanatory views showing a friction member in the vibration member shown in Fig. 1 before and after a press work; Fig. 5 is a plan view of a friction member of a vibration member according to a second unclaimed example; Fig. 6 is an exploded perspective view of an ultrasonic motor according to a first embodiment of the present invention; Fig. 7 is an explanatory view showing a friction member of a vibration member shown in Fig. 6 before a press work; Fig. 8 is a sectional view showing principal part of Fig. 6; Figs. 9A to 9C are views showing an ultrasonic motor according to a second embodiment of the present invention; Fig. 10 is a view showing an elastic member before a press work; Fig. 11 is a perspective view showing a conventional ultrasonic motor; Fig. 12 is a plan view showing a vibration member according to a third embodiment of the present invention; Fig. 13 is a sectional view of an ultrasonic motor according to a modification of the third embodiment of the present invention; Fig. 14 is a sectional view of an ultrasonic motor according to a fourth embodiment of the present invention; Fig. 15 is a sectional view showing a vibration member according to a fifth embodiment of the present invention; and Fig. 16 is a sectional view showing an example in which a lens barrel is used as a vibration wave driven device. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Fig. 1 shows a circular-shaped ultrasonic motor as a vibration wave driving apparatus according to a first unclaimed example. The ultrasonic motor is roughly classified into a vibration member 1 and a movable member 5 as a contact member. The vibration member 1 has a ring-shaped metal member 2, and an electro-mechanical energy conversion element 3 and a friction member 4 having a plurality of projections, which are adhered to the member 2. The friction member 4 is manufactured by press-working an iron, iron alloy, or aluminum alloy thin plate so as to form a plurality of projections, as shown in Fig. 1. On the other hand, the movable member 5 is constituted by fixing a friction member 5a to a main body portion, as shown in Figs. 1 and 3. As shown in Fig. 2, a plurality of projections 4a and grooves 4b are formed by the press work on the friction member 4. The projections 4a are in direct frictional contact with the friction member 5a of the movable member, and the grooves 4b are located at substantially the central portions of the projections 4a. Therefore, the projections 4a can have an improved vibration displacement further magnifying effect due to the presence of the grooves 4b. In this example, the friction member 4 is welded or adhered to the ring-shaped metal member as a base. Alternatively, the metal member 2 may be omitted, and the conversion element 3 may be directly adhered to the friction member 4. It is preferable that a vibration acting on the friction member 5a be not easily transmitted to the movable member 5 itself. For this purpose, the movable member 5 preferably consists of a brass material with a relatively large specific gravity. Figs. 4A and 4B show a change in shape upon formation of the friction member 4 with the projections 4a of this embodiment by press-working a press blank member 4'. Fig. 5 shows a disk-shaped friction member 14 according to the second unclaimed example. In the press work, a plurality of projections 14a, screw holes 14b to be coupled to an external system of vibration, a hole 14c which receives a motor shaft or through which the motor shaft passes, and a bridge portion 14d which is soft in terms of rigidity to insulate vibration are simultaneously formed. Fig. 6 shows an ultrasonic motor according to the first embodiment of the present invention. A friction member 24 in a disk-shaped vibration member is formed with a plurality of projections 24a by bending a plate material in the radial direction using a press work. Note that a hole 24b for receiving a motor shaft is also formed by the press work. A movable member 25 has a friction member 25a fixed to its outer periphery and a hole 25b to be fitted on the motor shaft at its center. Note that Fig. 7 shows a blank plate member 24b before the press work, and the projections 24a are formed by bending portions indicated by dotted lines in Fig. 7 in the radial direction. Fig. 8 is a sectional view of the ultrasonic motor shown in Fig. 6. Although not shown in Fig. 6, an electro-mechanical energy conversion element 23 is directly adhered to the lower surface of the friction member 24 to form a vibration member 20. Since the projections 24a have low rigidity in the radial direction and high rigidity in the tangential direction, they are flexible in a direction required to serve as a contact spring, and also have a function of magnifying the displacement. Since the friction member 25a of the movable member 25 is flexible in the axial direction and has a function of a contact spring, the vibration displacement of the projections 24a can be efficiently transmitted, thus improving driving efficiency. In this embodiment, the outer diameter of the conversion element 23 is decreased. In the above-mentioned embodiment since a plurality of projections are formed on the vibration member by the press work, the manufacturing time and cost can be greatly reduced as compared to the conventional cutting or grinding work. Since the plurality of projections are formed by bending them in the radial direction, the vibration displacement can be further magnified. Figs. 9A to 9C show the second embodiment. In this embodiment, a vibration member 31 is constituted by an elastic member 31b manufactured by press-working a metal thin plate, and a piezoelectric ceramic 31a serving as an electro-mechanical energy conversion element. The elastic member 31b with the above structure is constituted as follows. The elastic member 31b has a bent portion 31b2, which is bent by the press work upright from a bottom surface portion 31d adhered to the piezoelectric ceramic 31a, thereby compensating for decreases in static rigidity and dynamic rigidity as demerits of a circular-shaped elastic member using a thin plate. The bent portion 31b2 is divided into a plurality of portions in the peripheral or circumferential direction to form a plurality of projections 31b1, thereby magnifying displacement components, in the peripheral direction, of a bending vibration. In this case, it is important to appropriately set the width, b and the height, h, of each projection 31b1 and the thickness, t, of the thin plate. Originally, each projection 31b1 must have sufficiently high dynamic rigidity, and must sufficiently follow the frequency of travelling waves generated in the vibration member. When the elastic member is manufactured by the press work, the finished shape has higher precision as the plate is thinner. However, the use of the thin plate leads to a decrease in dynamic rigidity, in the direction of thickness, of the projection 31b1, i.e., a decrease in natural frequency of the bending vibration mode. In view of this problem, in order to transmit a vibration to the contact member 32 using, as a driving force, a displacement, in the peripheral direction, at the distal ends of the projections 31b1 due to a bending vibration of the bottom surface portion 31d excited by expansion/contraction of the piezoelectric ceramic 31a generated upon application of an alternating voltage, the following conditions must be satisfied. The rigidity of each projection 31b1 includes a rigidity component, in the moving direction, i.e., the peripheral direction, of the contact member 32, and a rigidity component in a direction perpendicular thereto, i.e., in the radial direction. The former rigidity is required to frictionally transmit the displacement component, in the peripheral direction, of a surface mass point at the distal end of each projection upon travel of the travelling waves. However, the latter rigidity, i.e., the rigidity in the radial direction does not contribute to the motor driving force. Rather, the projections preferably flex to eliminate slide motion in the radial direction. Therefore, b > t preferably holds to set the rigidity in the peripheral direction to be higher than that in the radial direction, as shown in Figs. 9A to 9C. In the press work, the direction of thickness of this plate is set to agree with the radial direction of the elastic member. As for the height h of the projection, the lowest-order natural frequency of a bending vibration mode in the peripheral direction is set to be higher than the driving frequency of the piezoelectric ceramic 31a so as to assure sufficient bending rigidity in the peripheral direction. On the other hand, sufficient rigidity cannot be assured in the radial direction since the press plate has a small thickness. However, as described above, even when the natural frequency in this direction is lower than the driving frequency, it does not so deteriorate the motor performance. Vibration member support portions 31c are formed integrally with the elastic member by the press work. In this case, the bending rigidity in the axial direction is decreased by punching four portions in the peripheral direction so as to eliminate vibration disturbance to travelling waves due to constraint and fixing of the vibration member by screw holes 31e. Note that the contact member 32 has a contact portion 32a, which contacts the projections 31b1. Fig. 10 is an exploded view of the thin plate before it is bent by the press work. In the second embodiment shown in Figs. 9A to 10, when the vibration member 31 is fixed in position, the contact member 32 moves; when the contact member 32 is fixed in position, the vibration member 31 moves. Fig. 12 shows the third embodiment of the present invention. In this embodiment, only a support structure is different from the second embodiment. That is, the vibration member support portions 31c are joined to the bottom surface portion 31d at six positions. With this arrangement, the bending rigidity can be increased in the peripheral direction while maintaining low bending rigidity in the axial direction, that determines the above-mentioned vibration disturbance. The reason why the bending rigidity is increased in the peripheral direction is to eliminate changes in behavior of the vibration member upon application of a load torque to the contact member 32 as a movable member, and to improve the positioning precision of the contact member 32. Fig. 13 shows a combination of the elastic member shown in Figs. 9A to 9C and another contact member. The contact portion 32a serves as a spring, and is joined to the contact member 32. Note that the contact portion 32a is flexible in only the axial direction, but does not contribute to flexibility in the radial direction unlike in the conventional structure shown in Fig. 11. As described above, since the projections 31b1 of the elastic member have flexibility in the radial direction, the deformation of the projections can prevent an unnecessary slide motion in the radial direction, which does not contribute to motor driving. Fig. 14 shows the fourth embodiment of the present invention. The projections of the elastic member 31b of the vibration member 31 are arranged on the inner peripheral side as compared to the embodiment shown in Figs. 9A to 9C. This structure is convenient for rotation detection since a rotary member, i.e., the contact member 32 is exposed to the outer circumferential surface. Fig. 15 shows the fifth embodiment of the present invention. In addition to the projections 31b1 for magnifying the vibration displacement in the peripheral direction, small projections 31b3 for preventing slide motion are formed. Since the effect of the small projections 31b2 is described in detail in U.S. Appln. No. 167,144 and European publication No. 602,648, a detailed description thereof will be omitted. According to this embodiment, a vibration member with such shape can be manufactured with low cost. Fig. 16 is a sectional view of a lens barrel as an example of a system driven by the ultrasonic motor of this embodiment. A rubber member 33 is used for controlling the vibration of the contact member 32 and transmitting the driving force to a metal ring 34. The translational motion of the shaft of rollers 35 drives a helicoid cylinder. A vibration absorbing member 36 has a function of insulating the vibration generated in the vibration member 31 from a metal ring 37. A washer 38 is used for determining position. In the above embodiments, since the dynamic rigidity, in the relative moving direction, of the projections of the vibration member is set to be higher than that in a direction perpendicular thereto, the projections can follow the vibration generated in the vibration member, thus improving the motor performance (e.g., torque). Also, since the lowest-order natural frequency of a bending vibration mode, in the relative moving direction, of the projections is set to be higher than that in a direction perpendicular thereto, sufficient dynamic rigidity can be assured in the relative moving direction, thus improving performance (e.g., torque). Furthermore, since the lowest-order natural frequency of a bending vibration mode, in the relative moving direction, of the projections is set to be higher than the driving frequency of the electro-mechanical energy conversion element, and the lowest-order natural frequency of a bending vibration mode in a direction perpendicular thereto is set to be lower than the driving frequency of the conversion element, sufficient dynamic rigidity can be assured in the relative moving direction, thus improving the motor performance (e.g., torque). Moreover, since the spring rigidity, in a direction perpendicular to the relative moving direction, of the contact portion of the contact member is set to be higher than the bending rigidity, in the direction, of the projections, unnecessary slide motion in this direction can be eliminated, thus improving the motor performance (e.g., torque).

Claims: A vibration member for use in a vibration wave driving apparatus relatively moving a contact member (32) and said vibration member (31) by a vibration generated in said vibration member (31), characterized in that : said vibration member (31) has a bent portion (31b2) bent along a bending line extending in a peripheral direction of said vibration member (31) by a press work, wherein said bent portion (31b2) is divided into a plurality of portions in the peripheral direction to form a plurality of projections (31b1) magnifying the vibrational displacement, and wherein a bending rigidity in the peripheral direction is set to be higher than a bending rigidity in a radial direction of said vibration member (31). A vibration member according to claim 1, wherein a lowest-order natural frequency of a bending vibration mode, in a direction of said relative movement, of said plurality of projections (31b1) is set to be higher than a lowest-order natural frequency of a bending vibration mode in a direction perpendicular thereto, which direction lies in the plane of the relative movement. A vibration member according to claim 1, further comprising an electro-mechanical energy conversion element (31a) functionally connected to said vibration member (31) to vibrate said vibration member. A vibration member according to claim 3, wherein a lowest-order natural frequency of a bending vibration mode, in the direction of said relative movement, of said plurality of projections (31b1) is set to be higher than a driving frequency of said energy conversion element (31a). A vibration member according to claim 1, 2, 3 or 4, further comprising vibration member support portions (31c) formed integrally with said vibration member (31) by punching portions in the peripheral direction. A vibration wave driving apparatus comprising a vibration member according to any one of claims 1 to 5. A vibration driven system, comprising the vibration wave driven apparatus according to claim 6.

Inventors: FUJIMOTO KAZUKI, OKUMURA ICHIRO, TAMAI JUN, TSUKIMOTO TAKAYUKI, FUJIMOTO, KAZUKI, OKUMURA, ICHIRO, TAMAI, JUN, TSUKIMOTO, TAKAYUKI, FUJIMOTO, KAZUKI, C/O CANON K.K., OKUMURA, ICHIRO, C/O CANON K.K., TAMAI, JUN, C/O CANON K.K., Tsukimoto, Takayuki, c/o Canon K.K.
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1996
Main classification: H01L41
IPC codes: H02N2, H01L41