Method and apparatus for ion beam formation in an ion implanter

Abstract: A low energy ion implanter (10) having an ion source (12) for emitting ions (14) and an implantation chamber (17) spaced from the ion source by an ion beam path through which ions move from the source to the implantation chamber. A mass analyzing magnet (22) positioned along the beam path between the source and the implantation chamber deflects ions through controlled arcuate paths to filter ions from the beam while allowing certain other ions to enter the ion implantation chamber. The magnet includes multiple magnet pole pieces (110, 112) constructed from a ferromagnetic material and having inwardly facing pole surfaces (114, 116) that bound at least a portion of an ion deflection region (120). One or more current carrying coils (122, 123) set up dipole magnetic fields (B0) in the deflection region near the pole pieces. Additional coils (130, 131, 132, 133, 134, 135, 136, 137) help set up a quadrapole field (Q1, Q2, Q3, Q4) in deflection region. A controller (100) electrically coupled to the one or more coils of said magnet controls current through the one or more current carrying coils to create the magnetic field in the deflection region near the pole pieces.

Description: Field of Invention The present invention concerns a method and apparatus for controlling ion beam generation in an ion beam implanter and, more particularly, to a method for using a magnetic field that adjusts the contents of the ion beam to remove unwanted ion species from the ion beam. Background of the Invention Ion beam implanters are used to treat silicon wafers with an ion beam. Such treatment can be used to produce n or p type extrinsic materials doping or can be used to form passivation layers during fabrication of an integrated circuit. When used for doping semiconductors, the ion beam implanter injects a selected ion species to produce the desired extrinsic material. Implanting ions generated from source materials such as antimony, arsenic or phosphorus results in 'n type' extrinsic material wafers. If 'p type' extrinsic material wafers are desired, ions generated with source materials such as boron, gallium or indium are implanted. The ion beam implanter includes an ion source for generating positively charged ions from ionizable source materials. The generated ions are formed into a beam and accelerated along a predetermined beam path to an implantation station. The ion beam implanter includes beam forming and shaping structure extending between an ion source and the implantation station. The beam forming and shaping structure maintains the ion beam and bounds an elongated interior cavity or region through which the beam passes en route to the implantation station. When operating the implanter, this interior region must be evacuated to reduce the probability of ions being deflected from the predetermined beam path as a result of collisions with air molecules. For high current ion implanters (approximately 5 milli-amperes beam current), the wafers at the implantation station are mounted on a surface of a rotating support. As the support rotates, the wafers pass through the ion beam. Ions traveling along the beam path collide with and are implanted in the rotating wafers. A robotic arm withdraws wafers to be treated from a wafer cassette and positions the wafers on the wafer support surface. After treatment, the robotic arm removes the wafers from the wafer support surface and redeposits the treated wafers in the wafer cassette. Eaton Corporation, assignee of the present invention, currently sells high current implanters under the product designations NV 10, NV-GSD/200, NV-GSD/160, and NV-GSD/80. Current versions of these model ion implanters include a sector magnet for the purpose of ion species selection. Different species ions are emitted from the ion source. These species have the same charge but have different masses. Current sector magnets produce a dipole magnetic field that disperses particles of different momentum-to-charge ratios to isolate the trajectories of the desired ion species. In addition to the dipole field, it is necessary to produce quadrapole fields within such magnets. These quadrapole fields confine the beam within a practical envelop, and focus the beam into a waist at a location along the beam line that includes a resolving aperture. Only ions having the correct mass remain within the beam downstream from the waist. A 'correct' quadrapole magnetic field strength depends in part, on the tendency of the beam to diverge under the effect of its own space charge density, which depends on parameters such as beam current, energy, mass, as well as beamline parameters such as residual gas composition and pressure. Existing high current implanters must operate with a wide range of parameters, ideally requiring different amounts of focussing for optimal transmission of the ion beam and optimal mass selectivity. Current sector magnets found in ion implanters are designed with fixed quadrapole focussing strength, selected for best operation with a nominal set of beam parameters. Outside these nominal conditions, particularly at very low energy (less than 10 kvolts) and high currents, the performance of these systems is significantly compromised. Nuclear Instruments and Methods in Physics Research, Vol. A258 (1987), pages 437-442; N.R.White et al.: "The Design of Magnets with Nondipole Field Components" relates to a magnetic analyzer having quadrupole and sectupole components in addition to a dipole field. US-A-5,350,926 relates to an ion beam implanter in which the sextupole, octupole and higher-order magnetic field components are varied to achieve uniformity of the ion beam. Disclosure of the Invention The present invention provides a method for filtering particles from an ion beam according to claim 1. The invention also provides an apparatus for filtering particles from an ion beam according to claim 13. The present invention produces primary focusing quadrapole fields that can be readily adjusted depending on other ion implanter parameters. An ion implanter constructed according to an embodiment of the invention includes an ion source for emitting ions and an implantation chamber spaced from the ion source by ion implanter structure that defines an ion beam path through which ions move from the source to the implantation chamber. The implanter includes a magnet positioned along the beam path between the source and the implantation chamber for deflecting ions through arcuate paths to filter unwanted particles from the ion beam. This magnet has first and second magnetic pole pieces constructed from a ferromagnetic material that have inwardly facing pole surfaces on opposite sides of a magnetic field region through which the ion beam moves. The magnet further includes one or more primary current carrying coils mounted in close proximity to the pole pieces. These primary coils create a primary dipole magnetic field in the magnetic field region between the inwardly facing pole surfaces of the first and second magnetic pole pieces that bends the charged particles along arcuate paths through the magnetic field region. Quadrapole field focusing is performed by one or more additional current carrying coils for providing electric currents that also bound the arcuate paths through which the ions bend. These quadrapole fields are superimposed on the dipole field in the region between the pole pieces. The strength of both the quadrapole and dipole fields are adjusted by a controller electrically coupled to the primary and additional current carrying coils of said magnet. A magnet constructed according to an embodiment of the invention adds flexibility to the implanter. This flexibility allows the implanter to be used with different species ions at low energy implant levels. These and other objects, advantages and features of the invention will be understood by reference to the detailed description of a preferred embodiment of the invention when described in conjunction with the accompanying drawings. Brief Description of the Drawings Figure 1 is a side elevation view, partly in section, showing an ion beam implanter including an ion source, beam forming and shaping structure and an implantation chamber; Figure 2 is a perspective view of a magnet used in controlling transmission of appropriate charge to mass ratio particles from the ion source to the implantation chamber; Figure 3 is a schematic depiction of the magnet depicted in Figure 2; Figure 4 is an exploded section view of the magnet depicted in Figure 2; Figure 5 is a side elevation view on an enlarged scale of the magnet depicted in Figure 2 as seen from a magnetic field region of the magnet where the field is controlled; Figure 6 is a top plan view of a dipole field generating coil that forms a part of the magnet depicted in Figure 2; Figure 7 is a side plan view of the dipole field generating coil as seen from the plane 7-7 of Figure 6; Figure 8 is plan view of the dipole field generating coil as seen from the view 8-8 of Figure 6; Figure 9 is a side plan view of a quadrapole field generating coil for use with the magnet shown in figure 2; Figure 10 is a plan view of the quadrapole field generating coil as seen from the view 10-10 in Figure 9; Figure 11 is a plan view of the quadrapole field generating coil as seen from the view 11-11 in Figure 9; Figure 12 is a plan view of one of a number of pole pieces used to construct the Figure 2 magnet; Figure 13 is a view of the pole piece as seen from the plane 13-13 in Figure 12; Figure 14 is a view of the pole piece as seen from the plane 14-14 in Figure 12; Figure 15 is a perspective view of a portion of the magnet showing a portion of the dipole coils positioned relative to the quadrapole coils and magnet pole piece; Figure 16 is a schematic depiction of pole pieces and field generating coils showing the fields between the pole pieces created by controlled energization of the coils; and Figure 17 is a schematic depiction of ion trajectories through the three segments of a segmented magnet constructed in accordance with the present invention. Detailed Description Turning now to the drawings, Fig. 1 depicts an ion beam implanter, shown generally at 10, which includes an ion source 12 for providing ions that form an ion beam 14 which traverses a beam path to an implantation station 16. Control electronics (not shown) are provided for monitoring and controlling the ion dosage received by the wafers (not shown) within an implantation chamber 17 at the implantation station 16. The ions in the ion beam follow a predetermined, desired beam path labeled "D" in Fig. 1. The beam path D has varying amounts of divergence as the beam traverses the distance between the ion source 12 and the implantation station 16. The "limits" of the predetermined beam path D caused by beam divergence have been labeled D' and D" respectively in Figure 1. The ion source 12 includes a plasma chamber 18 defining an interior region into which source materials are injected. The source materials may include an ionizable gas or vaporized source material. Source material in solid form is deposited into a vaporizer which is then injected into the plasma chamber 18. If an n type extrinsic wafer material is desired, boron, gallium or indium will be used. Gallium and indium are solid source materials, while boron is injected into the plasma chamber 18 as a gas, typically boron trifluoride or diborane, because boron's vapor pressure is too low to result in a usable pressure by simply heating it. If a p type extrinsic material is to be produced, antimony, arsenic or phosphorus will be chosen as the solid source material. Energy is applied to the source materials to generate positively charged ions in the plasma chamber 18. The positively charged ions exit the plasma chamber interior through an elliptical arc slit in a cover plate overlying an open side of the plasma chamber 18. An ion source utilizing microwave energy to ionize source materials is disclosed in U.S. Patent Application Serial No. 08/312,142, filed September 26, 1994, which is assigned to the assignee of the instant application. The ion beam 14 travels through an evacuated path from the ion source 12 to an implantation chamber 17, which is also evacuated. Evacuation of the beam path is provided by vacuum pumps 21. Ions in the plasma chamber 18 are extracted through the arc slit in the plasma chamber cover plate and accelerated toward a mass analyzing magnet 22 by a set of electrodes 24 adjacent the plasma chamber. The set of electrodes 24 extract the ions from the plasma chamber interior and accelerate the ions into a region bounded by the mass analyzing or resolving magnet 22. An ion beam path through the magnet is bounded by an aluminum beam guide 26. Ions that make up the ion beam 14 move from the ion source 12 into a magnetic field set up by the mass analyzing magnet 22. The strength and orientation of the magnetic field produced by the magnet 22 is controlled by the control electronics 100 by adjusting a current through the magnet's field windings. The mass analyzing magnet 22 causes only those ions having an appropriate mass to charge ratio to reach the ion implantation station 16. The ionization of source materials in the plasma chamber 18 generates a species of positively charged ions having a desired atomic mass. However, in addition to the desired species of ions, the ionization process will also generate a proportion of ions having other than the proper atomic mass. Ions having an atomic mass above or below the proper atomic mass are not suitable for implantation. The magnetic field generated by the mass analyzing magnet 22 causes the ions in the ion beam to move in a curved trajectory. The magnetic field is established by the control electronics 100 is such that only ions having an atomic mass equal to the atomic mass of the desired ion species traverse the beam path to the implantation station chamber 17. Located downstream from the magnet is a resolving plate 40. The resolving plate 40 is comprised of vitreous graphite and defines an elongated aperture through which the ions in the ion beam 14 pass. At the resolving plate 40 the ion beam dispersion, as defined by the width of the envelope D', D", is at a minimum value. The resolving plate 40 functions in conjunction with the mass analyzing magnet 22 to eliminate undesirable ion species from the ion beam 14 which have an atomic mass close to, but not identical, to the atomic mass of the desired species of ions. As explained above, the strength and orientation of the mass analyzing magnet's magnetic field is established by the control circuitry such that only ions having an atomic weight equal to the atomic weight of the desired species will traverse the predetermined, desired beam path D to the implantation station 16. Undesirable species of ions having an atomic mass much larger or much smaller than the desired ion atomic mass are sharply deflected and impact the beam guide 26 or the slit boundary defined by the resolving plate 40. As can be seen in Fig. 1, a Faraday flag 42 is located between the resolving aperture 40 and an ion beam neutralizer 44. The Faraday flag is pivotably coupled to a housing 50 so that it can be pivoted into position to intersect the ion beam 14 to measure beam characteristics and, when the measurements are satisfactory, swung out of the beam line so as to not interfere with wafer implantation at the implantation chamber 17. The beam forming structure 13 also includes the ion beam neutralization apparatus 44, commonly referred to as an electron shower. U.S. Patent No. 5,164,599 to Benveniste, issued November 17, 1992, discloses an electron shower apparatus in an ion beam implanter. The ions extracted from the plasma chamber 18 are positively charged. If the positive charge on the ions is not neutralized prior to implantation of the wafers, the doped wafers will exhibit a net positive charge. As described in the '599 patent, such a net positive charge on a wafer has undesirable characteristics. A downstream end of the neutralizer's extension tube 52 is adjacent the implantation chamber 17 where the wafers are implanted with ions. Rotatably supported within the implantation chamber is a disk shaped wafer support (not shown). Wafers to be treated are positioned near a peripheral edge of the wafer support and the support is rotated by a motor (not shown) at about 1200 RPM. The ion beam 14 impinges and treats the wafers as they rotate in a circular path. The implantation station 16 is pivotable with respect to the housing 50 and is connected to the housing 50 by a flexible bellows 60 (Figure 1). The ability to pivot the implantation station 16 permits adjustments to the angle of incidence of the ion beam 14 on the wafers. Sector Magnet 22 Referring to Figures 2-15, the magnet 22 deflects ions through arcuate paths to filter particles having an incorrect charge to mass ratio from the ion beam. The magnet includes first and second multi-segment magnetic pole pieces 110, 112 (Figs 2 and 3) constructed from a ferromagnetic material. The pole pieces have inwardly facing pole surfaces 114, 116 spaced apart by a four sided magnetic field region 120 (Figure 3) through which the ion beam 14 moves. The pole pieces are outside the beam guide 26 that defines the vacuum region through which the ions move on their way to the ion implantation chamber. Since the beam guide is constructed from a magnetically permeable material, i.e. aluminum the presence of the guide does not adversely affect the magnetic field in the region 120. The ions exiting the ion source 12 experience a strong electric field set up by the extraction electrodes 24 that accelerates ions into the magnet 22. The pole pieces are oriented with the inwardly facing pole surfaces 114, 116 in spaced apart vertical planes with respect to an ion implanter base. Two primary current carrying coils 122, 123 bound the arcuate ion beam path on opposite sides of a magnet centerplane 125 that bisects the magnetic field region 120. In this discussion, points on the y = 0 co-ordinate are located on this centerplane 125. The ferro-magnetic pole pieces 110, 112 and current through the coils 122, 123 set up a primary dipole magnetic field B0 in the magnetic field region 120 between the inwardly facing, vertically oriented pole surfaces 114, 116 of the first and second magnetic pole pieces. This field B0 bends the charged particles along arcuate paths through the magnetic field region 120 between the vertically oriented pole piece surfaces 114, 116. Six additional current carrying coils 130-135 (Figure 2) provide electric currents through a planar region that extends along one side of the arcuate path followed by the ion beam. Six additional coils are positioned on an opposite side of the beam centerplane 125 in planar symmetric positions and orientations to the six coils 130-135 shown in figure 2. Two of these additional six coils 136, 137 are shown in Figures 3 and 5. The currents in these coils establish a quadrapole field component in addition to the dipole field B0 in the region 120 between the pole pieces. The control electronics 100 is electrically coupled to the two primary 122, 123 and the twelve additional current carrying coils of the magnet 22. Appropriate energization of the coils creates a magnetic field having both dipole and quadrapole components in the magnetic field region 120 between the pole piece surfaces 114, 116. As seen in Figure 5, the magnet 22 extends along an arcuate sector of approximately 135 degrees from an entrance side 150 of the magnet to an exit side 152 of the magnet 22. The magnet 22 is described as being segmented since the pole pieces are made up of multiple parts or segments that are separated by current carrying coils spaced along the arcuate path of the beam. The pole piece 110 is made up of three intermediate magnet segments 110A, 110B, 110C, an entrance segment 110D and an exit segment 110E. The three magnetic pole pieces 110A, 110B, 110C are segmented into multiple pole piece segments that widen from a narrow portion on a radially inner portion of the magnet 22 to a relatively wider portion on a radially outer portion of the magnet. The five pole piece segments 110A-110E and the corresponding five segments of the pole piece 112 are supported by a two piece hub. The two hub pieces 154, 155 support a radially inner portion of the two magnet pole pieces and a two piece yoke containing two yoke pieces 156, 157 support radially outer portions of the magnet pole pieces. Both the hub and the yoke are electrically coupled to the grounded housing 32 that supports the magnet 22 and ion source. Since the magnet has pole pieces on opposite sides of the magnet centerplane, with the magnet vertically oriented, it is convenient to refer to magnet portions on the right and the left of the magnetic field region 120. For a magnet that is oriented horizontally it would be equally convenient to refer to top and bottom magnet portions. Figures 6-8 depict the coil 122 on the right side of the centerplane 125 as seen from the entrance 150 to the magnet 22. The coil 122 is generally saddleshaped and includes radially inner and outer segments 214, 216 that extend through the complete 135 degree arc of the sector magnet 22. At an entrance 150 to the magnet, the coil 122 has a end segment 218 that bends away from the magnetic field region 120 to define an entryway 212 through which ions enter the magnet field region 120. This coil segment 218 connects together the two radially extending inner and outer coil segments 214, 216 that generally bend along the same arc through which the ion beam bends due to the presence of the magnetic field in the region 120. A coil segment 220 at an exit end of the coil connects together the inner and outer coil segments 214, 216. The exit segment 220 supports two connectors 222, 224 that are electrically coupled to the electronic control 100 for controlling current flow. Between the connections the coil 122 is made up of multiple layers 230 (eight layers in a preferred embodiment of the invention) of copper tubing that is generally square in cross-section. Within a given layer multiple (preferably 14) side by side arcuate segments of different radius are arranged along the extent of the magnet. The copper tubing has a center passage through which a liquid coolant can be routed during operation of the ion implanter to remove heat from the coil 122. In a preferred embodiment of the invention the coolant is water and is routed into the coil through one of the two connectors 222, 224 and routed out through a second connector. The coil 122 is constructed from a single copper tube bent to form the plural layers and multiple arcuate segments of the coil. The copper tubing is constructed by an extrusion process to include a center passageway and is provided in elongated segments. An insulating tape is wrapped around the length of the tubing to insulate the tubing. The insulated tubing is then bent to form the multiple insulated windings of the coil 122. A direct current bias is applied to the electric connections 222, 224. Current flows down one of the arcuate segments 214, 216 crosses the beam centerline through the segment 218 and returns back to the exit end of the magnet through another of the segments 214, 216. Since the coil 122 is made up of one continuous copper tube, current flows in the same sense from one connector to the other. A second primary coil 123 is constructed similarly to the coil 122. Electrical connectors coupled to the coil 123 are connected to the control electronics 100 so that a controlled current can be routed through the coil 123. The position of the two coils 122, 123 with respect to the magnetic region 120 at a point along the arc of the magnet is depicted in Figure 16. One of the additional current carrying coils 133 is depicted in greater detail in Figures 9-11. This coil 133 bounds the magnet pole piece 110B. The coil 133 is also shaped in the form of a saddle. Two arcuately extending segments 250, 252 are attached by a suitable adhesive to an inwardly facing surface of the pole piece 110B. Semicircular segments 260, 262 connect the arcuately extending segments 250, 252. The method of construction for the coil 133 is similar to the construction technique for the primary coil 122. An elongated tube is wound or wrapped with an insulator along its length and then bent to form the coil 133. The coil depicted in Figures 9-11 has two layers with twelve arcuate sections that extend side by side along the surface of the pole piece 110B to bound the magnetic zone 120. Others of the secondary coils are constructed in a similar manner and are attached to inwardly facing surfaces of the pole pieces 110A, 110B, and 110C. The coil 133 has input connectors 264, 266 that are electrically energized by the control electronics 100 to control the current through the coil. Additionally, the use of tubing to construct the coils allows coolant to be pumped through the center of the tubing that makes up the coils to transmit heat generated by ions striking the coils away from the coils. Figure 16 depicts a view of the primary coils 122, 123 and the secondary coils 132, 133 in the region of the pole piece 110B. The direction of currents flowing through these coils (into and out of the plane of the section through the pole piece 110B) is depicted in this Figure. This current arrangement is controlled by the control electronics 100 which dictates the magnitude and the direction of the current. The disclosed current arrangement, achieved through controlled coil energization by the control circuit 100, provides a primary magnetic field B0 in the region 120. Four field lines Q1-Q4 representing the quadrapole field are also shown in Figure 16. Ions passing through the magnetic field region 120 experience a force. The magnitude of the force on the particle is directly proportional to the velocity and charge of the particle and is in a direction perpendicular to the magnetic field and velocity vectors. (qV X B) In the situation depicted in Figure 16 a positively charged particle moving into the plane depicted in the Figure will be deflected to the right by the dipole field B0 to follow the arc of the magnet. The magnetic field vector quantity that the moving charged particle experiences is a superposition of the dipole and the quadrapole fields. To determine the vector force on a moving particle in the field it is necessary to know both the charge and the velocity of the particle. It is not enough, for example, to know which side of the magnet centerplane 125 on which a particle is located to know the force it experiences. One must also know the direction in which the particle is moving. For the magnetic field configuration shown in Figure 16 the magnet focusses particles in one plane and defocusses particles in a perpendicular plane. Through used of a segmented magnet having multiple segments of individually controllable magnet coils, a zoom lens effect is possible. This produces a greater percentage of usable ions passing through the beam waist at the region of the aperture 40. Figure 17 illustrates the zoom lens aspect of the segmented magnet. Three magnet segments designated A, B, and C are labeled at the top of the Figure. These three segments correspond to the field set up in the region of the pole piece segments 110A, 110B, 110C shown in Figure 2. Figure 17 depicts two different controlled deflections for particles offset from the center of the source arc slit. In this representation the x plane corresponds to the plane of the magnet centerplane 125. The y "plane" is actually curved along the central ray trajectory that passes through the magnet. In the deflection path depicted at the top of Figure 17 shows two charged ions leaving the source displaced 25mm from the magnet center plane and having different velocity vectors. These velocity vectors cause the ions to enter the magnet moving in 'acceptable' trajectories T1, T2 that cause them to pass through the beam waist and strike a target in the implantation chamber. High energy prior art implanters, as noted above had fixed mechanical quadrapole focusing but could not adjust for lower energies, nor could they be readily tuned to enhance dose delivered by the source. In the Figure 17 depiction sections A, B, and C alternate in their focussing. A zoom lens effect is achieved by reversing the direction of coil currents in adjacent sections. As seen in Figure 16 the current for the coils 132, 133, 136, 137 is into the plane of the figure adjacent the magnetic field region 120. These coils help define the quadrapole magnetic field in the 'B' zone. In the 'A' zone the coils 130, 131 that bound the region 120 will have current reversed so that a depiction similar to the Figure 16 depiction for the 'A' zone would show current into the plane of the figure for the two coils 130, 131. Figure 17 shows a pair of trajectories originating from the source at x = 25mm, y = 0, and another pair originating at y = 25mm and x = 0. The "x" trajectories at the top of the Figure remain in the y = 0 plane and show the effects of defocusing, focusing, defocusing in zones A, B, and C respectively. The "y" trajectories at the bottom of Figure 17 remain in the x = 0 plane, and show the reverse effect of focusing, defocusing, and focusing in the zones A, B, and C respectively. The rays furthest from the axis are shown to be closely bounded by a dotted line 270 to indicate the bounds of the beam envelope. By selective control over both the magnitude and direction of current flow in the coils, it is possible to focus the beam leaving the source so that a maximum throughput of suitable ion species reaches the target. This will most typically be accomplished by empirical monitoring of the beam current and adjusting the coil currents to maximize that current. The Figure 17 depiction shows the ions traversing the two trajectores as being reflected at the x = 0 or centerplane co-ordinate at points P1, P2. Because of the symmetry about the 'x' and 'y' planes, it is customary to show the trajectories in one half plane but the ions actually cross the beam centerplane. For example, particles following the trajectory T2 cross the centerplane just after exiting the magnet at the point P1. Two other trajectories T3, T4 are depicted in Figure 17. These two trajectories correspond to ions displace from the 'y' center of the source by 25 mm moving with different velocities. While the present invention has been described with a degree of particularity, it is to be understood that those of ordinary skill in the art may make certain modifications to the presently described embodiment of the invention without departing from the spirit or scope of the invention, as set forth in the appended claims.

Claims: A method for filtering particles from an ion beam (14), the method comprising the steps of: a) moving the ion beam through a magnetic field region (120); b) energizing at least one dipole field generating coil (122, 123) to generate a dipole magnetic field (B0) in the magnetic field region; c) energizing at least one quadrupole field generating coil (130, 131, 132, 133, 134, 135, 136, 137) to generate a quadrupole magnetic field (Q1, Q2, Q3, Q4) superimposed on the dipole magnetic field in the magnetic field region; and d) controlling the energization of the at least one dipole field generating coil and the at least one quadrupole field generating coil to filter particles from the ion beam as the ion beam moves through the magnetic field region. The method of claim 1, wherein the moving step (a) comprises the step of moving the ion beam through a magnetically permeable beam guide (26) traversing the magnetic field region. The method of claim 1, wherein the energizing step (b) comprises the steps of: i) energizing a first dipole field generating coil (122) positioned on a first side of a plane (125) bisecting the magnetic field region, and ii) energizing a second dipole field generating coil (123) positioned on a second side of the bisecting plane opposite the first side. The method of claim 1, wherein the energizing step (c) comprises the steps of: i) energizing a first pair of quadrupole field generating coils (130, 131) positioned on a first side of a plane (125) bisecting the magnetic field region, and ii) energizing a second pair of quadrupole field generating coils (136, 137) positioned on a second side of the bisecting plane opposite the first side. The method of claim 1, comprising the step of routing coolant through the at least one dipole field generating coil and the at least one quadrupole field generating coil. The method of claim 1, comprising the steps of passing the filtered ion beam through an aperture of a resolving plate (40) and treating a target with the filtered ion beam. The method of claim 1, wherein the moving step (a) comprises the step of moving the ion beam through at least two sequential zones (A, B, C) of the magnetic field region; and wherein the energizing step (c) comprises the steps of: i) energizing a first set of at least one quadrupole field (130, 131, 136, 137) generating coil to generate a quadrupole magnetic field in one of the zones (A) of the magnetic field region, and ii) energizing a second set of at least one quadrupole field generating coil (132, 133) to generate a quadrupole magnetic field in another one of the zones (B) of the magnetic field region. The method of claim 7, wherein the controlling step (d) comprises the step of selectively controlling the energization of the first set of at least one quadrupole field generating coil and the energization of the second set of at least one quadrupole field generating coil. The method of claim 8, wherein the energizing step (c) comprises the step of energizing a third set of at least one quadrupole field generating coil (134, 135) to generate a quadrupole magnetic field in another one of the zones (C) of the magnetic field region; and wherein the controlling step (d) comprises the step of selectively controlling the energization of the third set of at least one quadrupole field generating coil. The method of claim 1, comprising the steps of: emitting ions from an ion source (12) and accelerating the ions away from the ion source to form the ion beam; placing first and second arcuately extending pole pieces (110, 112) on either side of an arcuate travel path of the ion beam so that inwardly facing pole surfaces (114, 116) are positioned on opposite sides of a magnetic field centerplane (125); positioning the at least one dipole field generating coil along the arcuately extending pole pieces for creating the dipole magnetic field that extends across the magnetic field region from one of said first and second arcuately extending pole pieces to another of said first and second arcuately extending pole pieces; and interposing a plurality of the at least one quadrupole field generating coil between inwardly facing surfaces of the first and second arcuate pole pieces and the magnetic field region; wherein the controlling step (d) comprises the step of selectively energizing the at least one dipole field generating coil and the quadrupole field generating coils to provide a controlled quadrupole magnetic field in the region between the pole pieces; and wherein the magnetic field in the magnetic field region intercepts the ions in the ion beam exiting the source to selectively filter ions having other than a specified mass to charge ratio from the ion beam. The method of claim 10, wherein each of the first and second pole pieces are arranged in multiple arcuate pole segments (110A, 110B, 110C); wherein each pole segment of a pole piece supports one of the at least one quadrupole field generating coil for setting up a current along a face of the pole segment; and wherein the energizing step (c) comprises the step of energizing the quadrupole field generating coils attached to opposite pole segments to cause a focusing or defocusing of ions moving through sequentially encountered magnetic field regions (A, B, C) between the first and second pole pieces. The method of claim 11, wherein the controlling step (d) comprises the step of controlling the energization of the quadrupole field generating coils attached to the first and second pairs of pole pieces to focus ions toward a particular plane within a first magnetic field region bounded by a first pair of magnetic pole piece segments and to defocus ions away from the particular plane within a second magnetic field region bounded by a second pair of magnetic pole pieces that the ions enter subsequent to the first magnetic field region. An apparatus for filtering particles from an ion beam (14), the apparatus comprising: a) structure (26, 110, 112) for defining a magnetic field region (120) through which the ion beam moves; characterised in that the apparatus further comprises: b) a plurality of conductive coils (122, 123, 130, 131, 132, 133, 134, 135, 136, 137) configured with the structure in relation to the magnetic field region for generating both a dipole magnetic field (B0) and a quadrupole magnetic field (Q1, Q2, Q3, Q4) in the magnetic field region to filter particles from the ion beam as the ion beam moves through the magnetic field region; and c) a controller (100) for energizing the plurality of conductive coils to generate the dipole magnetic field and the quadrupole magnetic field superimposed on the dipole magnetic field. The apparatus of claim 13, wherein the structure comprises at least two magnetic pole pieces (110, 112) configured in relation to one another to define the magnetic field region. The apparatus of claim 13, wherein the structure comprises a magnetically permeable beam guide (26) positioned to traverse the magnetic field region and wherein the ion beam moves through the beam guide. The apparatus of claim 15, wherein the beam guide bounds an enclosed volume for maintaining a low pressure region through which the ion beam moves. The apparatus of claim 13, wherein the plurality of conductive coils comprise a first dipole field generating coil (122) positioned on a first side of a plane (125) bisecting the magnetic field region and a second dipole field generating coil (123) positioned on a second side of the bisecting plane opposite the first side. The apparatus of claim 13, wherein the plurality of conductive coils comprise a first pair of quadrupole field generating coils (130, 131) positioned on a first side of a plane (125) bisecting the magnetic field region and a second pair of quadrupole field generating coils (136, 137) positioned on a second side of the bisecting plane opposite the first side. The apparatus of claim 13, wherein one of the plurality of conductive coils comprises a first radial segment (214, 252) and a second radial segment (216, 250) each extending along an arcuate travel path of the ion beam. The apparatus of claim 13, wherein one of the plurality of conductive coils comprises conductive tubing configured in a plurality of layers (230), each layer comprising a plurality of arcuate segments having different radii. The apparatus of claim 13, wherein each of the plurality of conductive coils comprises tubing having a passageway for routing coolant. The apparatus of claim 13, in combination with an ion source (12) for generating ions to create the ion beam, a resolving plate (40) having an aperture through which the filtered ion beam passes, and an ion implantation station (16) for treating a target with the filtered ion beam. The apparatus of claim 13, wherein the structure configured with the plurality of conductive coils defines at least two sequential zones (A, B, C) of the magnetic field region through which the ion beam moves, and wherein the plurality of conductive coils comprise a first set of at least one quadrupole field generating coil (130, 131, 136, 137) to generate a quadrupole magnetic field in a first one of the zones (A) of the magnetic field region and a second set of at least one quadrupole field generating coil (132, 133) to generate a quadrupole magnetic field in another one of the zones (B) of the magnetic field region. The apparatus of claim 23, wherein the structure comprises a pair of magnetic pole pieces (110, 112) configured in relation to one another with the first set of at least one quadrupole field generating coil to define the first zone of the magnetic field region. The apparatus of claim 23, wherein the controller selectively controls the energization of the first set of at least one quadrupole field generating coil and the energization of the second set of at least one quadrupole field generating coil. The apparatus of claim 25, wherein the plurality of conductive coils comprise a third set of at least one quadrupole field generating coil (134, 135) to generate a quadrupole magnetic field in another one of the zones (C) of the magnetic field region; and wherein the controller selectively controls the energization of the third set of at least one quadrupole field generating coil. The apparatus of claim 13, in combination with an ion source (12) for emitting ions to create the ion beam and an implantation chamber (17) mounted in spaced relation to the ion source such that the apparatus defines an ion beam path through which ions move from the ion source to the implantation chamber; wherein the structure and the plurality of conductive coils form a magnet (22) positioned along the ion beam path between the ion source and the implantation chamber for deflecting ions through arcuate paths to filter unwanted particles from the ion beam; the structure comprising first and second magnetic pole pieces (110, 112) constructed from a ferromagnetic material, said pole pieces having inwardly facing pole surfaces (114, 116) spaced apart by the magnetic field region through which the ion beam moves; and the plurality of conductive coils comprising: i) at least one dipole field generating coil (122, 123) positioned near the magnetic pole pieces for creating the dipole magnetic field in the magnetic field region between the inwardly facing pole surfaces of the first and second magnetic pole pieces to bend charged particles that make up the ion beam along arcuate paths through the magnetic field region, and ii) at least one quadrupole field generating coil (130, 131, 132, 133, 134, 135, 136, 137) for providing electric currents which extend along the arcuate path followed by the ion beam for superimposing the quadrupole magnetic field on the dipole magnetic field in the magnetic field region between the pole pieces. The apparatus of claim 27, wherein the at least one quadrupole field generating coil is attached to the pole pieces and is located between the inwardly facing pole surfaces of the magnetic pole pieces and the magnetic field region. The apparatus of claim 27, wherein the inwardly facing pole surfaces are generally planar and are spaced on opposite sides of a magnetic field centerplane (125) of the magnet; and wherein two of the at least one dipole field generating coil (122, 123) abut each other on opposite sides of the magnetic field centerplane to define a generally enclosed magnetic field region. The apparatus of claim 27, wherein the first and the second magnetic pole pieces are segmented into multiple pole piece segments (110A, 110B, 110C) and the at least one quadrupole field generating coil is attached to a particular magnetic pole piece segment that sets up the quadrupole magnetic field in a region bounded by the pole piece segment. The apparatus of claim 30, wherein two of the at least one dipole field generating coil form saddle shaped coils that extend along sides of the arcuate extent of the ion beam travel path through the magnet and bend away from the travel path to form an entrance and an exit opening (150, 152) through which ions enter the magnet. The apparatus of claim 27, wherein two of the at least one dipole field generating coil form arcuate shaped coil portions that extend along sides of the arcuate extent of the ion beam travel path through the magnet; and wherein arcuate portions (214, 216) of the two coils abut each other along a beam centerplane (125) that bisects the magnetic field region. The apparatus of claim 27, wherein the first and the second magnetic pole pieces are segmented into multiple pole piece segments (110A, 110B, 110C) that widen from a narrow portion on a radially inner portion of the magnet to a relatively wider portion on a radially outer portion of the magnet.

Inventors: BENVENISTE VICTOR MAURICE, BENVENISTE, VICTOR MAURICE
Applicants: AXCELIS TECH INC, AXCELIS TECHNOLOGIES, INC.
Application year: 1996
Main classification: H01J37
IPC codes: H01L21, H01J37, C23C14