Photometric flow apparatus for small sample volumes

Abstract: A photometric apparatus (100) for small sample volumes comprises a cell body (102), a light input means (104) arranged adjacent to a first surface of the cell body (102), a light source (105) emitting light of predetermined wavelength or wavelength range through the light input means (104), a light output means (106) arranged adjacent to a second surface of the cell body (102) opposite to the first surface, a light detector (107) arranged adjacent to the light out put means (104), and a flow channel (108) formed in the cell body (102), wherein surfaces of the walls of the channel (108) have a roughness smaller than the predetermined wavelength.

Description: Field of the Invention The present invention relates to spectroscopy, and more particularly to spectroscopy of small samples in solution. Background of the Invention In sample analysis instrumentation, and especially in separation systems such as liquid chromatography and capillary electrophoresis systems, smaller dimensions will generally result in improved performance characteristics and at the same time result in reduced analysis costs. These techniques are preferably performed using capillaries having small inside diameters ranging from 5 to 100 micrometers for handling the extremely small volumes of flowing liquid samples. As an example, the micro-column liquid chromatography ( µ LC) has been described wherein columns having diameters of 100-200 µ m are employed as compared to columns having diameters of around 4.6 mm. Another approach has been the use of the capillary electrophoresis which is a separation technique carried out in capillaries having a diameter of 5-100 µ m. The capillary electrophoresis has been demonstrated to be useful as a method for the separation of small solutes. See for example Journal of Chromatography, vol. 218, p. 209, 1981; and Analytical Chemistry, vol. 53, p. 1298, 1981. However, there remain several major problems inherent to those technologies. For instance, there exist substantial detection limitations in conventional capillary electrophoresis technology. For example in the case of the capillary electrophoresis, optical detection is generally performed on-column by a single-pass detection technique wherein electromagnetic energy is passed through the sample, the light beam travelling normal to the capillary axis and crossing the capillary only once. Accordingly, in conventional capillary electrophoresis systems, the detection path length is inherently limited by the diameter of the capillary. According to Beer's law, the absorbance is related to the pathlength by the following equation: A = e*b*C where: A = the absorbance e = the molar absorptivity, (l/m*cm) b = pathlength (cm) C = concentration (m/l) From the above equation it will be readily understood that the absorbance (A) of a sample in a 25 µm capillary would be 400 times lower when compared to the absorbance in a conventional cell having a pathlength of 1 cm typically used in UV/Vis spectroscopy. Standard detection cells that are used in conventional liquid chromatography instruments have the disadvantage that their cell volume is in the order of three orders of magnitude too large to handle the small nano-liter (nl) sample volumes of the above mentioned capillary separation techniques. Scaling down the conventional shape of these cells to match the nl volumes is problematic both from the manufacturing point of view and from the photometric aspect. For example, to get a cell volume of approximately 10 nl with a pathlength of 1mm, the circular inner diameter of such a cell has to be smaller than 120 µ m. With standard UV and UV/Vis detection approaches using conventional lamps such as deuterium lamps or Xenon flashlamps, it is difficult to pass enough light through such a narrow channel. The loss in light throughput counteracts any gain in optical pathlength, and a sensitivity enhancement over on column detection is no longer possible. Furthermore, with the state of the art machining tools like drilling, milling or ultrasonic machining it is very difficult to scale down the size of these detection cells to meet these requirements to have cell volumes in the preferred range of 3 - 15 nl. Thus, most of the presently available instruments use the above mentioned on column detection approach. In light of this significant detection limitation, there have been a number of attempts employed in the prior art to extend detection pathlengths, and hence the sensitivity of the analysis in capillary electrophoresis systems. US-A-5,061,361 describes an approach entailing micro-manipulation of the capillary flow cell to form a bubble at the point of detection. US-A-5,141,548 describes the use of a Z-shaped configuration in the capillary, with detection performed across the extended portion of the Z. Yet another approach has sought to increase the detection pathlength by detecting along the major axis of the capillary (axial-beam detection). See Xi et al., Analytical Chemistry, vol. 62, p. 1580, 1990. US-A-5,273,633 describes a further approach to increased detection pathlengths in the field of capillary electrophoresis where a reflecting surface exterior of the capillary is provided, the system further including an incident window and an exit window downstream of the incident window. Light entering the incident window passes through a section of the capillary by multiple internal reflections before passing through the exit window where it is detected, the multiple internal reflections yielding an effective increase in pathlength. These approaches cannot avoid that parts of the light do not propagate through the center of the capillary but at least partly through the transparent capillary wall, not having contact with the sample. This decreases the linearity of the detector and reduces the effective path length, which determines the sensitivity of the detector. The European patent application EP-A-523 680 describes a photometric apparatus, where a flow cell is coated with a fluoropolymer to guide the light axially along a liquid filled tube or capillary. In order to get total internal reflection of the light at the cell wall, the fluoropolymer has to have a refractive index lower the refractive index of the liquid in the tube. Although these polymers are available, they are very expensive and the stability of the coating when exposed to solvents and acids is limiting its usability. While each of the aforementioned approaches has addressed the issue of extending the pathlength, each approach is limited in that it entails engineering the capillary after-the-fact or otherwise use difficult technical approaches. On column detection approaches often use setups similar to those shown in Fig. 8 and Fig 9. As shown in Fig. 8 and Fig. 9 in a small area near the outlet a capillary is illuminated with light from a UV/vis light source and a slit of width o is placed behind the capillary to block stray light through the capillary wall. The light transmitted through the slit is detected. Using the Lambert-Beer law, the detector signal for an ideal cell is determined by: A(λ) = ∈(λ) · C · D = log I 0 (λ) I(λ) where: A(λ) = absorbance in absorbance units (AU) as a function of the wavelength, ∈(λ) = extinction of molar absorption coefficient as a function of the wavelength, C = molar solute concentration, D = pathlength, I 0 = incident photon flux, I = transmitted photon flux. If straylight through the column wall can reach the detector, the above equation has to be rewritten: A = log I 0 +I S I+I S where: I S = straylight through the capillary wall. In Fig. 10 a typical detector response is shown. The lower limit of detection is determined by the baseline noise of the detector and its sensitivity which can be described by the slope dA/dc of the detector response. The upper limit of detection is determined by the non-linearity of the detector response at higher concentration levels. Unwanted straylight causes a deviation from the theoretical linear slope according to the Lambert-Beer law. The steepness of the slope when compared to typical HPLC detection cells (HPLC = High Pressure Liquid Chromatography) is dependent on the effective pathlength (related to the inside diameter of the capillary) and the straylight through the capillary wall. As a result, there is a linear range in which the detector can be operated to get reliable results. Fig. 11 shows a cross section of a prior art flow cell used in liquid chromatography. The cell assembly 1100 is positioned between a radiation source 1102 and a photodetector device 1104. A lens 1106 is arranged between the radiation light source 1102 and the cell assembly 1100 for focusing the radiation emitted from the radiation source 1102. A cell body 1108 has a machined conduit 1110 therein for holding a liquid sample. Windows or lenses 1112 and 1114 are sealed to the cell body 1108 by gaskets 1116. Screws 1118 and 1120 press the windows 1112, 1114 against the cell body 1108. An inlet tube 1122 and an outlet tube 1124 are connected by threaded fittings 1126 to an inlet port 1128 and an outlet port 1130, respectively, to supply the sample to and from the cell 1100. The tubes 1122, 1124 normally made of stainless steel are connected by threaded fittings 1126 to the cell body 1108. Typically, these cells 1100 have cell volumes 1110 in the range of 3 to 15 µ l. The cell 1100 has an inner diameter of 0.5 to 1.5 mm and a length of 3 to 10mm. The inner diameter of the cell 1100 is such that ligth rays are prevented from striking the cell wall what will otherwise lead to unpredictable disturbances of the measured photometric signal. Apertures, conical cell shapes and/or lenses are also used to avoid this problem. Most commenly, deuterium lamps are used as radiation source 1102 for UV/Vis absorbance measurements. In capillary electrophoresis and µ-liquid chromatography, the sample volumes are about three orders of magnitude smaller than described above. Accordingly, a flow cell has to be much smaller. The light throughput through such a small cell will be dramatically reduced if no additional changes are made. Reduced light throughput will result in increased photometric noise, and the desired gain in sensitivity is not achievable. From US-A-4,575,424 a flow cell for a microscale chromatograph is known. This flow cell comprises a metal light-path insert. The light-path insert consist of a top portion and a bottom portion each of which comprises a groove through which light can pass. The grooves are first milled into the top portion and the bottom portion, respectively, then the grooves are plated with metal, and thereafter the metal coating is burnished. Summary of the Invention It is a primary object of this invention to provide a photometric flow cell used for liquid phase detection techniques with small sample volumes, the flow cell having an increased sensitivity and linearity in detection. This object is solved by a photometric flow cell according to claim 1, additional features thereto being defined in the dependent claims. The present invention provides a photometric apparatus for small sample volumes comprising a cell body; a light input means arranged adjacent to a first surface of the cell body; a light source emitting light of predetermined wavelength or wavelength range through the light input means; a light output means arranged adjacent to a second surface of the cell body opposite to the first surface; a light detector arranged adjacent to the light output means; and a flow channel formed in the cell body; wherein surfaces of the walls of the channel have a roughness smaller than the predetermined wavelength or any wavelength of the wavelength range, respectively, and wherein the walls of the channels are formed by at least three individual flow channel forming parts, those surfaces of said flow channel forming parts, which face the interior of the channel, consisting of flat portions, and with said surface having been polished, before assembly of the cell body, to said roughness smaller than the predetermined wavelength or any wavelength of the wavelength range, respectively. The cell body can be made of non-transparent material, so that light from the light source passes through the channel, but not through the cell wall. Maximum linearity is accomplished by avoiding straylight through the channel wall. The connected capillaries may have an expanded inner diameter at the outlet to reduce flow disturbances and to match the inner diameter of the capillary to the channel diameter. Dead volumes are avoided by butt coupling the capillary to the channel. This combination allows highly sensitive and linear detection of nl sample volumes while maintaining the efficiency of capillary separation techniques. Brief Description of the Drawings Fig. 1A is a cross-sectional view of a first embodiment of the present invention; Fig. 1B and 1C illustrate the manufacturing process for the cell body; Fig. 2A shows refraction and reflection of a light ray on a surface of a transparent body; Fig. 2B and 2C illustrate the difference between specular and diffuse reflection at the cell wall; Fig. 3 shows a graph illustrating reflectance versus incident angle at a surface of a transparent body; Fig. 4 is a cross-sectional view of a second embodiment of the present invention; Fig. 5 is a cross-sectional view of a third embodiment of the present invention; Fig. 6 shows an electropherogram illustrating the bandbroadening effect due to different diameters of the capillary and channel at the junction; Fig. 7 shows an electropherogram illustrating the gain in sensitivity achieved by the present invention. Fig. 8 and 9 show a slit and capillary arrangement used in an on column approach. Fig. 10 shows the principle detector response characteristic; Fig. 11 shows a prior art flow cell used in liquid chromatography; Detailed Description of the Preferred Embodiments Before the invention is described in detail, it is to be understood that this invention is not limited to the particular component parts of the devices described as such devices may vary. It is also to be understood that the terminology used herein is for purposes of describing particular embodiments only, and is not intended to be limiting. It is also to be understood that the same basic construction can not only be used for absorbance measurements, but also for fluorescence or Raman spectroscopy or colorimetry, with flowing or static samples. In this specification and in the claims which follow, reference will be made to a number of terms which shall be defined to have the following meanings: The term "liquid phase analysis" is used to refer to any analysis which is done on either small and/or macromolecular solutes in the liquid phase. The term "liquid phase analysis" as used herein includes chromatographic separations, electrophoretic separations, and electrochromatographic separations. The term "chromatographic process" generally comprise preferential separations of components, and include reverse-phase, hydrophobic interaction, ion exchange, molecular sieve chromatography and like methods. The term "electrophoretic separation" refers to the migration of particles or macromolecules having a net electric charge where said migration is influenced by an electric field. Therefore "electrophoretic separation" includes separations performed in columns packed with gels (such as poly-acrylamide, agarose and combinations thereof) as well as separations performed in solution. The term "electrochromatographic separation" refers to combinations of electrophoretic and chromatographic techniques. In the following a preferred embodiement of the present invention is described. A flow cell according to the preferred embodiment is used for analysing small sample volumes as small as 3-15 nl. This is accomplished by a design that allows a high light flux through the cell, and features that minimize flow disturbances to maintain high efficient separations. Fig. 1A shows a cross sectional view of a photometric flow apparatus 100 according to an embodiment of the present invention. The photometric flow cell 100 comprises a cell body 102 of a non-transparent material. A first transparent window 104 is arranged adjacent to a first surface of the cell body 102. A light source 105 and/or light guiding means (not shown) such as lenses or mirrors, are arranged adjacent to the first transparent window 104 for emitting light of a predetermined wavelength or wavelength range therethrough. A second transparent window 106 is arranged adjacent to a second surface of the cell body 102 opposite to the first surface. A photo detector means 107 is arranged adjacent to the second transparent window 106. The photodetector means 107 can include mirrors, gratings (not shown) and photo diode arrays. A flow channel 108 is formed inside the cell body 102. According to the embodiment shown in Fig. 1A the flow channel 108 comprises three portions 108a, 108b, 108c. The first portion 108a of the flow channel 108 is formed adjacent to the first transparent window 104 and extends substantially parallel to the first surface of the cell body 102. The second portion 108b of the flow channel 108 extends from the first surface to the second surface of the cell body 102. The third portion 108c of the flow channel 108 is formed adjacent to the second transparent window 106 and extends substantially parallel to the second surface of the cell body 102. As can be seen from Fig. 1A the first, second and third portion 108a-c of the flow channel 108 include junction portions 108d. These junction portions 108d connect the respective portions 108a, 108b and 108b, 108c of the flow channel 108 preferably under an angle of 45°. It is apparent that other angles than 45° are possible for connection of the flow channel portions. It is however possible to connect the respective junction portions 108d without any chamfer. The transparent windows 104, 106 can be made of fused silica and may be directly fused to the cell body 102. Holes 110 and 112 are provided in the cell 100 for accomodating the ends of an inlet capillary 114 and an outlet capillary 116. These holes 110 and 112 may be ultrasonically machined. In Fig. 1A, a feature concerning the capillary/flow channel coupling in the present invention is shown. Especially in capillary electrophoresis, it is important to minimize distortions of the electrical field at capillary/flow channel junction portions in order to maintain separation efficiency. As shown in Fig. 1A, the inlet capillary 114 having a smaller ID (ID = Inner Diameter) than the width of the channel 108 in the cell body 102 is coupled to the cell 100. The inlet capillary 114 has a wider ID at the capillary/flow channel junction to match the diameter to the channel width. There are different approaches possible to widen the ID of the capillary 114. In one embodiment, the volume within the capillary is pressurized and the capillary is rotated in a gas flame until the ID of the capillary is increased to the desired extension. This might take a few seconds. After that, the capillary is scored at the center of the cavity and an axial tension is applied. The capillary will break at the center of the cavity with a clear and rectangular edge. Thus a capillary/flow channel junction is provided having gradual curves and transitions to achieve smooth flow and avoid turbulences. The capillaries used for microcolumn separations such as capillary electrophoresis or µ -liquid chromatography have inner diameters typically ranging from 25 to 100 µ m. The cell shown in Fig. 1A is designed for very small sample volumes. In this embodiment the flow channel of the cell has a rectangular cross-section of less than 150x150 µ m and a channel length of less than 1,3mm, resulting in a cell volume of less than 10 nl. A detection pathlength of 1mm results in a sensitivity being up to 20 times higher when compared with on column detection approaches using 50 µ m-ID fused silica capillaries. In one preferred embodiment, the cell body 102 is made of a non-transparent material, such as black Suprasil (registered trademark) (black fused silica) available from Heraeus. As shown in Fig. 1B the cell body 102 comprises a first and a second portion 102a and 102b. A first and a second flow channel forming part 118a and 118b are arranged between the first portion 102a and the second portion 102b of the cell body 102 such that the flow channel 108 shown in Fig. 1A is formed. The cell body 102 is formed by directly fusing together the first portion 102a of the cell body 102, the first and second flow channel forming parts 118a, 118b, and the second portion 102b of the cell body. Such a process is known in the art and often used for cuvettes and the like. Fig. 1C is a cross sectional view of the cell body 102, showing the flow channel forming parts 118a and 118b and the resulting flow channel 108 in more detail. The provision of a cell body 102 being non-transparent has an significant advantage in that the occurence of straylight through the cell wall is prevented. As already outlined above, this straylight is a known inherent problem in prior art detectors using on column detection or cells with transparent walls. It reduces the linearity of detector and also reduces the effective pathlength and thus the sensitivity. In a non-transparent cell body the cell output defines a clear aperture which is advantageous if the cell is used for example in a diode array detector. Before the parts shown in Fig. 1B and 1C are fused together, the parts are machined and polished to get an even and flat surface. A surface roughness in the order of less than 0.5 µ m is to be achieved as this is a requirement for a successive fusing process. The provision of a superior surface quality is however also a requirement for another essential feature of the present invention. The superior surface quality causes light rays entering the cell and striking the cell wall to be reflected at the same angle as they are incident on this wall. This feature is described in more detail in Fig. 2A, 2B and 2C. As shown in figure 2A, a first part 200 of an incident light ray 202 on a transmitting medium 204, such as quartz, is refracted into the material 204, wherein a second part 206 of the incident light 202 is reflected. While the refraction angle  t is dependent from the refractive index n of both media, such as air and quartz, the reflection angle  r always equals the angle of incidence  i . The amount of light reflected depends from the incident angle  i . Fig. 2B and 2C show the difference between the diffuse and the specular reflection. As can be seen from Fig. 2B, the surface of a medium 208 has irregularities, wherein these irregularities are large when compared to the wavelength of the incident light 210. These irregularities lead to a diffuse reflection of the incident light 210. The medium 212 has a smooth surface having irregularities being small when compared to the wavelength of the reflected light. This is prerequisite for specular reflection of the incident light 214. Fig. 3 shows a graph of the reflectance versus incident angle, assuming water (n=1.33) as incident media and quartz (n=1.5) as material where the light is refracted into. The graph shows that at incident angles higher than 80 degrees, the amount of reflected light increases dramatically. The dependency of the reflectance from the incident angle can be expressed by the following equations: Rp(i) = ( tan(i - t(i)) ) 2 ( tan(i + t(i)) ) 2 Rr(i) = ( sin(i - t(i)) ) 2 ( sin(i + t(i)) ) 2 R(i) = Rp(i) + Rr(i) 2 The present invention makes use of this effect to achieve a high light throughput through the cell, and thus keeping the photometric noise low. The channel walls are kept even and polished to achieve specular reflection, thus guiding the light through the cell. For UV/Vis detection using conventional light sources, the illumination of small volumes requires fast optics. Since the channel dimensions are small and the channel is narrow, it is important to guide light that enters the cell towards the detector and not to loose it by diffuse reflection at the cell wall. According to a second embodiment shown in Fig. 4, the photometric flow cell 100 further comprises a first capillary support means 120 supporting the inlet capillary 114 and a second capillary support means 122 supporting the outlet capillary 116. The capillaries 114, 116 can be fixed to the cell using a glue 124, or a plastic fittings which are commonly employed to seal the capillary to the cell. It is apparent that other means for guiding and attaching the capillaries can be used. Fig. 5 shows a third embodiment of the present invention. The flow cell 500 shown in Fig. 5 corresponds partially to the first and second embodiment, so that the description of similar parts having the same reference signs as in the first and second embodiment is omitted. Contrary to the first and second embodiment the flow cell 500 show in Fig. 5 does not comprise a first and a second transparent window. The flow cell 500 comprises a first non-transparent portion 504 arranged adjacent to the first surface of the cell body 102 and a second non-transparent portion 506 arranged adjacent to the second surface of the cell body 102. According to the third embodiment the light is guided from a light source (not shown) to the cell body 102 by an optical input waveguide 510. Preferably the light guided to the flow cell 102 by the input waveguide 510 travelling through the channel 108 is collected by an optical output fibre 512 which guides the light to any kind of optical detector such as a photomultilier, a diode, a spectrometer, etc.. Preferably the non-transparent portions 504, 506 are formed by Black Suprasil (registered trademark). It is to be noted that the fibres 510, 512 are preferably in direct communication with the flow channel 108. The embodiment shown in Fig. 5 is advantageous in that it allows remote measurement and/or a thermal isolation of the liquid guiding means in a liquid phase analysis instrument. Fig. 6. shows an electropherogram where a capillary with (microcell #1) and one without (microcell #2) expanded ID at the capillary/flow channel junction was used. The electropherogram was recorded under the following conditions: Buffer Borate 20mM pH8 Sample p-hydroxyacetophenone (100µM in water) Cassette temperature 25°C Injection 10 4 N·sec/m 2 (100 mbarsec) Detection 325nm, 4nm BW, 0,2sec Rt. Voltage 25 kV Capillary length 56cm It can be clearly seen that the capillary having the straight end shows more peak tailing and thus lower efficiency. In Fig. 7 a graph is shown illustrating the gain in sensitivity readily achieved in an electrophoretic separation using a microcell according to the present invention. The electropherogram was recorded under the following conditions: Buffer Borate 20mM pH8 Sample p-hydroxyacetophenone (1µM in water) Cassette temperature 25°C Injection 2·10 4 N· sec/m 2 (200 mbarsec), postinj. 10 4 N· sec/m 2 (100 mbarsec) Detection 325nm, 4nm BW, 0,2sec Rt. Voltage 25 kV Capillary length 56cm The cell according to the present invention was compared to the most sensitive on column detection approach that is readily available for capillary electrophoresis, using a capillary with 75µm ID that is expanded three times at the point of detection. The present invention offers unprecedented sensitivity in detection for liquid phase analysis of microscopic samples. It has to be noted that the present invention is not limited to the transparent windows as described in the first and in the second embodiment or to the light input and light output waveguides. Other means for inputting the light into the flow cell and for outputting the light from the flow cell to a detector means can be used. Although the present invention has been described in detail with reference to a particular preferred embodiment, persons processing ordinary skill in the art to which this invention pretains will appreciate that various modifications and enhancements may be made without departing from the scope of the claims that follow.

Claims: Photometric apparatus for small sample volumes comprising: a cell body (102); a light input means (104; 510) arranged adjacent to a first surface of the cell body (102); a light source (105) emitting light of predetermined wavelength or wavelength range through the light input means (104; 510); a light output means (106; 512) arranged adjacent to a second surface of the cell body (102) opposite to the first surface; a light detector (107) arranged adjacent to the light output means (106; 512); and a flow channel (108) formed in the cell body (102); characterized in that surfaces of the walls of the channel (108) have a roughness smaller than the predetermined wavelength or any wavelength of the wavelength range, respectively, and the walls of the channel are formed by at least three individual flow channel forming parts (118a, 118b, 102a, 102b), wherein those surfaces of said flow channel forming parts, which face the interior of the channel, consist of flat portions, and wherein each of said flat surfaces has been polished before assembly of the cell body (102) to said roughness smaller than the predetermined wavelength, or any wavelength of the wavelength range, respectively. Apparatus according to claim 1, wherein the light input means comprises an optical input waveguide (510); and wherein the light output means comprises an optical output waveguide (512). Apparatus according to claim 1, wherein the light input means comprises a first transparent window (104); and wherein the light output means comprises a second transparent window (106). Apparatus according to any of claims 1 to 3, wherein the cell body (102) is formed by a non-transparent material. Apparatus according to claim 3 or claim 4 when dependent on claim 3, wherein the flow channel comprises: a first portion (108a) formed adjacent to the first transparent window (104) and extending substantially parallel to the first surface of the cell body (102); a second portion (108b) extending from the first surface to the second surface of the cell body (102); and a third portion (108c) formed adjacent to the second transparent window (106) and extending substantially parallel to the second surface of the cell body (102). Apparatus according to any of claims 1 to 5, comprising an inlet capillary (114) and an outlet capillary (116) being in fluid connection with the flow channel (108). Apparatus according to any of claims 1 to 6, wherein the inlet capillary (114) or the outlet capillary (116) has an expanded inner diameter at the capillary/flow channel junction. Apparatus according to claim 6 or 7, comprising capillary support means (120, 122) attached to the cell body (102) for supporting the inlet and the outlet capillary (114, 116). Apparatus according to claim 8, wherein the inlet capillary and the outlet capillary (114, 116) are secured to the capillary support means (120, 122) by glue (124) or plastic fittings. Apparatus according to any of claims 1 to 9, wherein the flow channel (108) has a rectangular cross-section of less than 150x150 (µm) 2 and a channel length of less than 1,5mm. Apparatus according to claim 10, wherein the flow channel (108) has a rectangular cross-section of less than 150x150 (µm) 2 , a channel length of less than 1,5mm and a total volume of less than 10nl. Apparatus according to any of the claims 3, or 4-11 when dependent on claim 3, wherein the transparent windows (104, 106) are made of fused silica.

Inventors: KALTENBACH PATRICK, KALTENBACH, PATRICK
Applicants: AGILENT TECHNOLOGIES DEUTSCHLA, AGILENT TECHNOLOGIES DEUTSCHLAND GMBH
Application year: 1995
Main classification: G01N30
IPC codes: G01N21, G01N27, G01N30