Solar cell and production process therefor

Abstract: In order to provide a solar cell which is cheap and has a little-stress and high-quality polycrystalline semiconductor layer of large crystal sizes on a metal substrate as being a low-cost substrate and to provide a production process therefor, the solar cell has a metal layer, a metal oxide layer, and a polycrystalline semiconductor layer formed in this order on the substrate, and the production process therefor comprises a step of depositing the metal layer on the substrate, a step of depositing the metal oxide layer on the metal layer, a step of depositing the semiconductor layer on the metal oxide layer, a step of depositing a cap layer on the surface of the semiconductor layer and fusing and solidifying the semiconductor layer by lamp heating from above the cap layer to form the polycrystalline semiconductor layer, and a step of removing the cap layer.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a solar cell and a production process therefor, and more particularly to a solar cell with good energy conversion efficiency and a production process therefor. Related Background Art In these years solar cells are utilized as to be a drive energy source in various devices, which converts the solar radiation or illumination light into electric energy. Generally, the solar cells have a pn junction or pin junction in a functional part constructed of a semiconductor, and it is commonly known that silicon can be used as the semiconductor for forming the said pn junction (or pin junction). It is understood that use of single-crystal silicon is preferred from the aspect of efficiency for converting optical energy into electromotive force but amorphous silicon is advantageous from the aspects of area increase and cost reduction. In recent years, use of polycrystalline silicon is studied for the purpose of achieving the cost as low as amorphous silicon and the energy conversion efficiency as high as single-crystal silicon. It was, however, difficult for the conventionally suggested production processes to realize the thickness of polycrystalline silicon below 0.3 mm, because slices obtained by slicing bulk polycrystalline silicon were used. Thus, the thickness of a semiconductor region was more than necessary for sufficiently absorbing the light, so that they were not enough in respect of effective use of material. Further, there is a desire to decrease the thickness so as to enough to decrease the cost as well. Therefore, attempt has been made to form a thin film of polycrystalline silicon, using the thin-film forming technology such as the chemical vapor deposition process (CVD), but it is a present status that the crystal size is at most about some hundredths a micron and the energy conversion efficiency is lower than in the case of the bulk polycrystalline silicon slice method. Another attempt was made to increase the crystal size by irradiating a polycrystalline silicon thin film with laser light to effect fusion and recrystallization thereof, but the degree of cost reduction is not enough yet and stable fabrication is difficult. In addition, there is a proposal of a method for forming a crystal silicon film in a thickness necessary and sufficient to absorb the solar radiation, on a low-cost substrate by lamp heating (Morikawa, Matsuno, Itagaki, Sasaki, and Kumabe; Extended Abstracts for Academic Lecture 18a-SK-11, p.672 (The 53 Autumn Meeting, 1992); The Japan Society of Applied Physics). The above-described method, however, employed metallurgical-grade silicon as a substrate and the size of the substrate was as large as a silicon wafer, thus failing to continuously grow a large-area silicon layer thereon. It is also conceivable to use a metal such as SUS (stainless steel) as a low-cost substrate that can grow a large-area silicon layer thereon, which includes a problem of mixture of unnecessary impurity components and a problem that a polycrystalline silicon film cannot be formed directly on the substrate because of a difference of thermal expansion coefficient between them. SUMMARY OF THE INVENTION It is, therefore, an object of the present invention to provide a solar cell having polycrystalline silicon large in crystal size and excellent in characteristics and to provide a production process therefor, solving the above problems. In other words, the object of the present invention is to provide a cheap solar cell by growing a polycrystalline semiconductor layer in large crystal size on a metal substrate as a low-cost substrate. It is another object of the present invention to achieve a high-quality polycrystalline silicon layer with less stress and to provide a solar cell that can be produced in simple fabrication steps. It is a further object of the present invention to provide a thin polycrystalline solar cell excellent in characteristics and a production process therefor. It is another object of the present invention to provide a thin-film polycrystalline silicon solar cell in which a metal layer, a metal oxide layer, and a polycrystalline semiconductor layer are built in order on a substrate. These objects are achieved by the features of claim 1. It is a still further object of the present invention to provide a process for producing a thin-film polycrystalline silicon solar cell, as featured in claim 10. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1A to Fig. 1D are diagrammatic cross sections to illustrate a preferred example of major steps in the process for producing a thin-film polycrystalline silicon solar cell according to the present invention; Fig. 2A to Fig. 2E are diagrammatic cross sections to illustrate another preferred example of production steps of a solar cell according to the present invention; Fig. 3 is a diagrammatic structural view to illustrate a preferred example of a lamp irradiating apparatus; Fig. 4 is a graph to show a temperature sequence to illustrate a preferred example of heating; Fig. 5A to Fig. 5E are diagrammatic cross sections to illustrate another preferred example of production steps of a solar cell according to the present invention; and Fig. 6A to Fig. 6E are diagrammatic cross sections to illustrate another preferred example of production steps of a solar cell according to the present invention. DESCRIPTION OF THE PREFERRED SPECIFIC EXAMPLES The following describes experiments conducted on the way of achieving the present invention, whereby the constitution and operation of the present invention will be described. Major technical steps of the present invention include, as shown in Fig. 1A to Fig. 1D: (a) a second metal 106 and a metal oxide 102 are successively deposited on a substrate 101 of a first metal by a thin-film forming technique such as vacuum vapor deposition or sputtering (Fig. 1A); (b) thereafter, a silicon layer 103 is formed thereon by the CVD process or the like and a cap layer 104, for example of NSG (Non-doped Silicate Glass), is further deposited on the silicon layer 103 by the CVD process or the like (Fig. 1B); (c) subsequently, the silicon layer 103 is heated by lamp irradiation from above the cap layer 104 to effect fusion and recrystallization thereof so as to increase the crystal size (103') (Fig. 1C); (d) further, the cap layer 104 is removed and thereafter the thickness of the recrystallized silicon layer 103' is increased, for example, by a liquid phase growth method with necessity (105) (Fig. 1D). Specifically, the above step (a) may be arranged to use the metal layer of a ductile (or malleable) metal, for example copper (Cu), gold (Au), silver (Ag), or niobium (Nb), on the metal substrate, which can relieve strain due to a difference of thermal expansion coefficient between the metal substrate and the recrystallized silicon layer 103'. Further, using the electrically conductive metal oxide 102 such as ZnO, electric conduction can be established between the recrystallized silicon layer 103' and the ground metal substrate 101. In particular, ZnO can minimize the overall stress on the thin film, because a difference of thermal expansion coefficient from silicon is little. This arrangement can suppress film peeling and achieve good electric characteristics. Repetitively conducting a lot of experiments, the inventors have found out that a large-crystal-size polycrystalline silicon layer was able to be formed by laying the ductile metal such as copper and the metal oxide such as ZnO on the metal substrate such as SUS and lamp-heating the silicon layer deposited thereon to effect fusion and recrystallization thereof, thus achieving the present invention. The experiments conducted by the inventors are described in detail in the following. The experiments will be described in further detail with reference to the diagrammatic cross sections shown in Fig. 2A to Fig. 2E. (Experiment 1) Fusion and recrystallization of the silicon layer on the metal oxide As shown in Fig. 2A to Fig. 2E, a metal oxide layer 202 of ZnO was formed in a thickness of 2 µm on a surface of a metallurgical-grade silicon substrate 201 of 0.5 mm in thickness by the ordinary sputtering method (Fig. 2A). On the metal oxide layer 202 a silicon layer 203 was deposited in a thickness of 6 µm by an ordinary vacuum-vapor-deposition apparatus. It was confirmed by x-ray diffraction that the silicon layer 203 thus obtained was amorphous silicon. Over the silicon layer 203 above the metallurgical-grade silicon substrate 201, as obtained in the above step, an NSG film was deposited as a cap layer 204 in a thickness of 2 µm by an atmospheric pressure CVD apparatus (Fig. 2B). After that, the silicon layer 203 was irradiated with light from a halogen lamp from the side of the cap layer 204 to be fused and recrystallized (Fig. 2C). Fig. 3 is a schematic view of a lamp irradiating apparatus used in the irradiation and Fig. 4 shows a temperature sequence of the fusion and recrystallization. In Fig. 3, reference numeral 301 designates a substrate, 302 a silica chamber, 303 halogen lamps, 305 a reflector thereof, 304 a cooling water pipe, 306 a support table for substrate 301, and 309 a holding member for holding the cooling water pipe. As shown in Fig. 3, the chamber 302 is provided with an inlet port 307 for introducing a gas thereinto and an outlet port 308. The halogen lamps 303 are arranged as a heating means outside the chamber 302 in the upper part in the drawing, and the reflector 305 is arranged so that heat waves (light) from the halogen lamps 303 are effectively irradiated toward the substrate 301. On the opposite side of the reflector 305 to the halogen lamps 303, there is provided a cooling means having the cooling-water-pipe holding member 309 for holding the cooling water pipe 304 through which cooling water flows, thereby enabling cooling so as to avoid unnecessary heating of the reflector 305 etc. After completion of the light irradiation, the NSG film on the recrystallized silicon layer was removed with hydrofluoric acid and states of surface and cross section of the recrystallized silicon layer 203' were observed using an optical microscope and a scanning electron microscope. The observation confirmed that the relatively flat silicon layer was obtained and the film thickness was approximately equal to that before fused. Next, grain boundaries were made to be revealed by Secco's etching, which showed that the grain sizes of the recrystallized silicon layer were increased up to the maximum of the order of mm and that an etch pit density of the surface of the silicon layer was about 10 5 pits/cm 2 . Next, a silicon layer 205 was further formed by the epitaxial growth method on the recrystallized silicon layer 203' above the SUS substrate 201, as obtained in Experiment 1 (Fig. 2D). The silicon layer 205 can be grown using a slide type liquid-phase growth apparatus and using Sn and Si as a solvent and a solute, respectively. Here, the silicon layer 205 thus formed succeeds to crystallinity of the recrystallized silicon layer 203'. Subsequently, n + region 206 was formed by ion implantation of an atom belonging to the group V in the periodic table from the surface of the silicon layer 205, and transparent electrode 208 and collector electrode 207 were pattern-formed with necessity on the n + region 206, thereby forming a solar cell (Fig. 2E). Similarly as described above, another similar crystallized silicon layer was obtained when NiO was formed as the metal oxide layer 202 in a thickness of 2 µm on the surface of the metallurgical-grade silicon substrate 201 by the ordinary sputtering method, the silicon layer 203 was deposited in a thickness of 6 µm on the metal oxide layer by an-ordinary vacuum vapor deposition apparatus, and the silicon layer was fused. and recrystallized by lamp heating. (Experiment 2) Fusion and recrystallization of the silicon layer on the metal substrate/metal layer/metal oxide Fusion and recrystallization of a silicon layer above a SUS substrate was carried out in the same manner as in Experiment 1. Steps thereof are described using the diagrammatic cross sections shown in Fig. 5A to Fig. 5E. As shown in Fig. 5A to Fig. 5E, (a) Cu as a second metal layer 409 and ZnO as a metal oxide layer 402 were formed by the ordinary sputtering method each in a thickness of 2 µm on a surface of SUS substrate 401 of 0.8 mm in thickness (Fig. 5A) and (b) a silicon layer 403 was deposited in a thickness of 8 µm on the metal oxide layer 402 by the ordinary vacuum vapor deposition apparatus. It was confirmed by x-ray diffraction that the silicon layer 403 thus formed was amorphous silicon. Over the silicon layer 403 above the SUS substrate 401, an NSG film was deposited as a cap layer 404 in a thickness of 2 µm by the atmospheric pressure CVD apparatus (Fig. 5B). (c) Then light irradiation was conducted with a halogen lamp from the side of the cap layer 404 in accordance with the temperature sequence shown in Fig. 4 to fuse and recrystallize the silicon layer 403. After completion of the light irradiation, the NSG film on the recrystallized silicon layer 403' was removed with hydrofluoric acid and states of surface and cross section of the recrystallized silicon layer 403' were observed using the optical microscope and the scanning electron microscope. The observation showed that a relatively flat silicon layer was obtained and that the film thickness thereof was approximately equal to that before fused. The Secco's etching was performed to reveal grain boundaries, which showed that the grain sizes of the recrystallized silicon layer were increased up to the maximum of the order of mm and that an etch pit density of the surface of the silicon layer was about 10 5 pits/cm 2 . For comparison's sake, the same experiment was conducted for a case where deposition of the metal layer Cu was omitted in the above process. This comparative experiment confirmed that after fusion and recrystallization, bowing of substrate and a lot of slip lines in the silicon layer were observed and that the strain was relieved by interposition of the metal layer Cu. (Experiment 3) Formation of a thick silicon layer by the liquid phase growth method Next, as shown in Fig. 5D, a silicon layer 405 was formed using the liquid phase growth method on the recrystallized silicon layer 403' above the SUS substrate as obtained in Experiment 2. The formation of the silicon layer 405 was carried out using the ordinary slide type liquid phase growth apparatus and with Sn and Si as a solvent and a solute under such conditions that a growth start temperature was 950 °C, a supercooling degree was 3 °C, a temperature descent rate was 0.5 °C/min, and a growth time was 60 minutes. After completion of the growth, the surface was observed using the optical microscope and the scanning electron microscope in the same manner as in Experiment 1, which ensured that a relatively flat silicon layer was obtained and that the film thickness thereof was about 50 µm. The silicon layer had the crystal size equivalent to the size of the ground recrystallized silicon layer 403' and an etch pit density of the surface of the grown silicon layer 405 was about 5 × 10 4 pits/cm 2 . (Experiment 4) Production of solar cell An atom (for example, phosphorus) belonging to the group V in the periodic table was ion-implanted in the surface of the large-crystal size silicon crystal thin film above the SUS substrate as obtained in Experiment 3 and thereafter the resultant was annealed, thereby forming an n + layer on the surface side of the large-crystal size silicon crystal thin film. Subsequently, collector electrode 407 and transparent electrode 408 were formed by the vacuum vapor deposition method or the sputtering method, and patterning was carried out in desired patterns with necessity, thereby forming a solar cell in the structure shown in Fig. 5E. The collector electrode 407 may be made of any material with high electric conductivity, for example a metal, and can be preferably made of a material that can make ohmic contact with the large-crystal size silicon crystal thin film of polycrystalline silicon and/or the transparent electrode 408. Also, the collector electrode 407 may be constructed in single-layer structure or in multilayer structure of a combination of plural materials (for example, metals). Specific examples of the metal oxide used in the solar cell of the present invention are those with a-higher melting point than that of silicon and with electric conductivity, for example ZnO, NiO, V 2 O 3 , etc. Among them ZnO is preferred because it rarely causes stress because of a small difference of thermal expansion coefficient from silicon and because thermal effects on the ground can be relaxed thereby because of a low thermal conductivity. Although the thickness of the metal oxide layer depends upon the material of metal oxide, the conditions of fusion and recrystallization, etc., it is preferably set in the range of approximately 0.01 µm to 10 µm and more preferably in the range of 0.1 µm to 1 µm. It is preferred that the thickness of the metal oxide be so determined as to be relatively thick for a thick silicon layer formed thereon while relatively thin for a thin silicon layer thereon. Further, the silicon layer deposited on the metal oxide layer may be amorphous or crystalline, or a mixture of amorphous and crystalline silicon. The method for depositing the silicon layer may be any of the LPCVD method, the plasma CVD method, the vapor deposition method, the sputtering method, etc. The thickness of the silicon layer is preferably in the range of approximately 0.5 µm to 50 µm. The cap layer on the silicon layer used in the method of the present invention may be selected from NSG, PSG (Phosphorus Silicate Glass), BSG (Boron Silicate Glass), Si 3 N 4 , etc. and combinations thereof, which can be formed by the atmospheric pressure CVD apparatus or the LPCVD apparatus, etc. In particular, using PSG or BSG, a conductivity type can be determined by introducing an impurity into the silicon layer during fusion. Although depending upon the material and the combination, the thickness of the cap layer is preferably determined in the range of 1 to 5 µm. The layer of the second metal used in the solar cell of the present invention is Cu, Au, Ag, or Nb. Particularly, most preferred are Cu and Au with a relatively high melting point. There is no specific limitation on the layer thickness of the second metal layer, but a preferred range is between 0.01 µm and 10 µm and a desired range is between 0.1 µm and 10 µm. There is no specific limitation on the substrate of the first metal of the present invention, but use of SUS is preferred, taking account of price, strength, processability, durability, and corrosion resistance. Also, the crystal growth method used in the process for producing the thin-film polycrystalline silicon solar cell of the present invention may be any of the liquid phase growth method, the LPCVD method, the atmospheric pressure CVD method, the plasma CVD method, the photo assisted CVD method, the sputtering method, etc., but use of the liquid phase growth method is preferred from the aspects of growth rate and crystallinity. Although depending upon the type of solvent, the range of growth temperature in the liquid phase growth method is desired to be controlled between 850 °C and 1050 °C both inclusive when Sn is utilized. Also, the supercooling degree is preferably about some -°C, and the temperature descent rate is preferably controlled in the range of 0.1 to 5 °C/min. Further, a final film thickness of the recrystallized silicon layer or the polycrystalline silicon layer obtained by the crystal growth method is preferably between 10 µm and 200 µm from demands in respect of characteristics of solar cell, and more preferably, is desired to be between 20 µm and 200 µm. An impurity is introduced for the purpose of forming a semiconductor junction in the surface of the obtained polycrystalline silicon, and the method for introducing the impurity may be the ion implantation method or the thermal diffusion method. The impurity may be preferably selected from n-type impurities of P, As, Sb, etc. and p-type impurities of B, Al, Ga, etc. To form the semiconductor junction, a semiconductor layer of a different conductivity type from that of the polycrystalline silicon may be deposited on the surface of the polycrystalline silicon. Although depending upon an amount of the impurity introduced, junction depth or thickness of the semiconductor layer is preferably, in the range of 0.01 µm to 1 µm and more preferably, is desired to be between 0.02 µm to 0.5 µm. There is no specific limitation on the film thickness of the transparent conductive layer or the collector electrode so long as they can show necessary functions. Thus, they can be properly designed within the range where necessary power can be extracted. Preferred examples of the transparent conductive film are indium oxide, tin oxide, a mixture thereof (ITO), and a thin film of aluminum or gold. Here, the substrate having a conductive surface may be not only a metal substrate but also a composite substrate in which a conductive material such as a metal is provided on an insulating substrate. However, a metal substrate is preferred in view of handling property, strength, price, etc. Examples The present invention will be described in more detail with specific examples thereof, but it should be noted that the present invention is not intended to be limited to these examples at all. (Example 1) A large-crystal-grain-size polycrystalline silicon crystal solar cell was produced on a metal substrate in the same manner as in Experiment 1 to Experiment 4 as described above. On the surface of SUS substrate 0.8 mm thick Cu and ZnO were formed as the second metal layer and the metal oxide layer each in a thickness of 2 µm in the named order by the sputtering method, and then an n-type silicon layer was deposited thereon in a thickness of 20 µm by the vacuum vapor deposition apparatus. It was confirmed by x-ray diffraction that the silicon layer thus formed was amorphous silicon. Over the silicon layer thus formed above the SUS substrate, the NSG film was deposited as the cap layer in a thickness of 2 µm by the atmospheric pressure CVD apparatus, and thereafter the light irradiation was carried out from the cap layer side with a halogen lamp according to the temperature sequence shown in Fig. 4 to fuse and recrystallize the amorphous silicon layer. After completion of the light irradiation, the NSG film on the recrystallized silicon layer was removed with an aqueous hydrofluoric acid (HF) solution, then B was ion-implanted into the surface of the silicon crystal thin film under the conditions of 20 keV and 1 × 10 15 /cm 2 , and the resultant was annealed at 800 °C for 30 minutes to form a p + layer. Further, the collector electrodes (Ti/Pd/Ag (0.04 µm/0.02 µm/l µm)) and ITO transparent conductive film were formed on the p + layer by EB (Electron Beam) evaporation. For the thus produced solar cell having the large-crystal-grain-size Si crystal thin film/ZnO/Cu/SUS structure, the I-V characteristics were measured under the light irradiation of AM 1.5 (100 mW/cm 2 ), which showed an open-circuit voltage of 0.54 V, a short-circuit photocurrent of 26 mA/cm 2 , and a fill factor of 0.72 for cell area of 2 cm 2 , thus obtaining a conversion factor of 10.1 %. (Example 2) An n + p-type polycrystalline silicon crystal solar cell was produced in the same manner as in Example 1. The production process therefor is shown in Fig. 5A to Fig. 5E. On the surface of SUS substrate 401 of 0.8 mm in thickness Cu and ZnO were formed as the second metal layer 409 and the metal oxide layer 402 each in a thickness of 2 µm by the ordinary sputtering method, and then the silicon layer 403 was deposited thereon in a thickness of 10 µm by the ordinary LPCVD apparatus. It was confirmed by x-ray diffraction that the thus formed silicon layer was polycrystalline silicon with crystal sizes of about 8 nm. On the silicon layer thus formed above the SUS substrate, the BSG film was deposited as the cap layer 404 and also as one to determine the conductivity type of the silicon layer in a thickness of 2 µm by the atmospheric pressure CVD apparatus, and then the light irradiation was carried out with the halogen lamp in accordance with the temperature sequence shown in Fig. 4 to fuse and recrystallize the silicon layer. After removing the BSG layer with an aqueous HF solution, crystal growth was effected under the following conditions by the liquid phase growth apparatus, based on the ordinary slide type boat method and using a solvent of Sn, to obtain a large-crystal-size silicon crystal thin film 405. In detail, the growth was carried out in a hydrogen atmosphere, at a growth start temperature of 950 °C, at a supercooling degree of 3 °C, at a temperature descent rate of 0.5 °C/min, and for a growth time of 55 minutes. A final total thickness of the silicon crystal thin film and the recrystallized silicon layer thus formed was about 50 µm. Next, thermal diffusion of P was effected on the surface of the silicon crystal layer with a diffusion source of POCl 3 and at a temperature of 900 °C to form the n + layer 406, thereby obtaining the junction depth of about 0.5 µm. A dead layer in the surface of the n + layer thus formed was removed by etching to obtain a junction depth of about 0.2 µm with moderate surface concentration. Further, the collector electrode 407 and ITO transparent conductive film 408 were formed on the n + layer in the same manner as in Example 1. For the thus produced solar cell having the n + -Si/p-Si crystal thin film/ZnO/Cu/SUS structure, the I-V characteristics were measured under the light irradiation of AM 1.5 (100 mW/cm 2 ), which showed an open-circuit voltage of 0.55 V, a short-circuit photocurrent of 33 mA/cm 2 , and a fill factor of 0.72 for cell area of 2 cm 2 , thus obtaining a conversion factor of 13.1 %. (Example 3) A solar cell of a p + µc-Si/polycrystalline Si heterojunction type was produced in the same.manner as in Examples 1 and 2. Cu was deposited in a thickness of 3 µm on the SUS substrate by vapor deposition, then ZnO was deposited in a thickness of 2 µm on the Cu layer by sputtering, and a silicon layer was further deposited in a thickness of 12 µm on the ZnO layer by the LPCVD method. A PSG film was deposited as the cap layer and also as one to determine the conductivity type of the silicon layer in a thickness of 2 µm on the silicon layer by the atmospheric pressure CVD apparatus, and then the light irradiation was carried out with the halogen lamp in accordance with the temperature sequence shown in Fig. 4 to fuse and recrystallize the silicon layer. After removing the PSG layer with an aqueous HF solution, growth was effected by the liquid phase growth apparatus based on the ordinary slide type boat method with a solvent of Sn and a solute of Si in the hydrogen atmosphere, at a growth start temperature of 950 °C, at a supercooling degree of 3 °C, at a temperature descent rate of 0.5 °C/min, and for a growth time of 55 minutes. The final thickness of the thus obtained silicon crystal thin film was about 50 µm. Fig. 6A to Fig. 6E show the process for producing the heterojunction type solar cell. Here, members with same reference numerals as those in Figs. 5A to 5E represent the same members as those in Figs. 5A to 5E. The process of this example is similar to that in the case of Figs. 5A to 5E showing Example 2, but in the present example a p-type microcrystalline (crystal grain size: 30 Å to 500 Å) semiconductor layer (µc-Si) 506 is formed on the silicon crystal layer in Fig. 6E instead of producing the n + layer 406. The p-type µc-Si layer 506 was deposited in a thickness of 0.02 µm on the silicon crystal surface under the conditions as listed in Table 1 by an ordinary plasma CVD apparatus. A dark conductivity of the µc-Si film in this case was about 10 S/cm. Ratio of gas flow rates Temperature of Substrate Pressure Discharge power SiH 4 /H 2 = 1 cc/20 cc 250 °C 0.5 20 W B 2 H 6 /SiH 4 = 2 × 10 -3 Torr Further, ITO was formed as the transparent conductive film 408 in a thickness of about 0.1 µm by electron beam evaporation, and the collector electrode 407 (Cr (0.02 µm)/Ag (1 µm)/Cr (0.004 µm)) was formed thereon by vacuum vapor deposition. For the p + µc-Si/polycrystalline Si heterojunction type solar cell thus obtained, the I-V characteristics were measured under the light irradiation of AM 1.5, which showed an open-circuit voltage of 0.60 V, a short-circuit photocurrent of 34.8 mA/cm 2 , and a fill factor of 0.67 for cell area of 1.6 cm 2 , thus obtaining a high value of a conversion factor of 14.0 %. (Example 4) A large-crystal-grain-size silicon crystal solar cell was produced by the process as shown in Figs. 5A to 5E in the same manner as in Example 1. As described previously, Cu and ZnO were deposited each in a thickness of 3 µm on the SUS substrate 0.4 mm thick by sputtering, and an n-type silicon layer was then deposited in a thickness of 40 µm on the surface of the ZnO layer by the atmospheric pressure CVD apparatus. Next, the NSG film was deposited as the cap layer in a thickness of 2 µm by. the atmospheric pressure CVD apparatus and thereafter the light irradiation was carried out with the halogen lamp in accordance with the temperature sequence shown in Fig. 4 to fuse and recrystallize the silicon layer. After completion of the light irradiation, the NSG film on the recrystallized silicon layer was removed with an aqueous HF solution, and in order to form a p layer in the surface of the silicon crystal thin film, BSG was deposited by the ordinary pressure CVD apparatus and a RTA (Rapid Thermal Annealing) treatment was carried out. The thickness of the deposited BSG was about 0.6 µm and the RTA treatment was conducted under the conditions of 1050 °C and 60 seconds. The junction depth at this time was about 0.2 µm. After removing the BSG layer with an aqueous HF solution, the surface of the silicon crystal layer was further thinly oxidized by dry oxidation (about 0.01 µm), the oxide film was etched in a fine grid pattern using the photolithography process, and then the collector electrode (Ti/Pd/Ag (0.04 µm/0.02 µm/l µm))/transparent conductive film ITO (0.085 µm) were formed on the p + layer by EB evaporation using a metal mask. For the thus produced thin film crystal solar cell, the I-V characteristics were checked under the light irradiation of AM 1.5, which showed an open-circuit voltage of 0.56 V, a short-circuit photocurrent of 31 mA/cm 2 , and a fill factor of 0.71 for cell area of 2.5 cm 2 , thus obtaining a conversion factor of 12.3 %. (Example 5) A solar cell was produced in the structure shown in Fig. 5E using the SUS substrate obtained in Experiment 3. P (phosphorus) was ion-implanted under the conditions of 80 keV and 1 × 10 15 /cm 2 in the surface of the large-crystal-grain-size silicon crystal thin film above the SUS substrate obtained in Experiment 3, and the resultant was annealed at 800 °C for 30 minutes to form the n + layer 406. Subsequently, the collector electrode (multi-layer of Cr (0.02 µm)/Ag (1 µm)/Cr (0.04 µm) formed in order from the bottom) 407 and transparent electrode (ITO (0.085 µm)) 408 were formed thereon by vacuum vapor deposition. For the solar cell having the large-crystal-grain-size Si crystal thin film/ZnO/Cu/SUS structure thus produced, the I-V characteristics were measured under the light irradiation of AM 1.5 (100 mW/cm 2 ), which showed an open-circuit voltage of 0.53 V, a short-circuit photocurrent of 31 mA/cm 2 , and a fill factor of 0.73 for cell area of 2 cm 2 , thus obtaining a conversion factor of 12.0 %. As described, it was confirmed that the large-crystal-grain-size silicon thin film could be formed by building up the second metal layer, the metal oxide,. and the silicon layer on the first metal substrate and fusing and recrystallizing the silicon layer by lamp heating, whereby solar cells with excellent characteristics could be formed. As detailed above, according to the present invention, the thin-film crystal solar cells with excellent characteristics can be formed on the metal substrate in simple steps. This enables to provide cheap and good quality thin-film solar cells with mass producibility to the market. Also, the present invention can provide the solar cell having polycrystalline silicon large in crystal grain size and good in characteristics, and the production process therefor. Further, according to the present invention, the large-crystal-grain-size polycrystalline silicon semiconductor layer can be grown above the metal substrate which is a low-cost substrate, whereby cheaper solar cells can be produced by the simpler method. In addition, the present invention can provide the production process of solar cells, which can obtain the high-quality polycrystalline silicon layer with little stress.

Claims: A solar cell having a layer of a metal, a layer of a metal oxide, and a polycrystalline silicon semiconductor layer successively built on a substrate, wherein said layer of the metal comprises a metal selected from copper, gold, silver, and niobium and said layer of the metal oxide comprises an oxide selected from zinc oxide, nickel oxide, and vanadium oxide and said polycrystalline silicon semiconductor layer comprises a recrystallized silicon semiconductor having grain sizes up to the maximum of the order of mm. A solar cell according to Claim 1, which has a transparent electrode on said polycrystalline semiconductor layer. A solar cell according to Claim 1, which has a collector electrode on said polycrystalline semiconductor layer. A solar cell according to Claim 1, wherein said substrate has a conductive surface. A solar cell according to Claim 1, wherein said substrate is a metal. A solar cell according to Claim 1, wherein said layer of the metal has a thickness of 0.01 to 10 µm. A solar cell according to Claim 1, wherein said layer of the metal oxide has a thickness of 0.01 to 10 µm. A solar cell according to Claim 1, which has a microcrystalline silicon semiconductor layer on said polycrystalline semiconductor layer. A solar cell according to Claim 8, wherein said microcrystalline silicon semiconductor layer comprises microcrystalline silicon having crystal sizes of 3 nm to 50 nm. A process for producing a solar cell, comprising: (i) a step of depositing a layer of a metal on a substrate, wherein said layer of the metal comprises a metal selected from copper, gold, silver, and niobium; (ii) a step of depositing a layer of a metal oxide on said layer of the metal, wherein said layer of the metal oxide comprises an oxide selected from zinc oxide, nickel oxide, and vanadium oxide; (iii) a step of depositing a silicon semiconductor layer on said layer of the metal oxide; (iv) a step of depositing a cap layer on a surface of said semiconductor layer and fusing and solidifying said semiconductor layer by lamp heating from above said cap layer to form a polycrystalline semiconductor layer; and (v) a step of removing said cap layer. A process for producing a solar cell according to Claim 10, which has, after said step (v), a step of forming a semiconductor junction in a surface of said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 10, which has, after said step (v), a step of increasing a thickness of said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 12, wherein said step of increasing the thickness utilizes a crystal growth method. A process for producing a solar cell according to Claim 13, wherein said crystal growth method is liquid phase growth. A process for producing a solar cell according to Claim 14, wherein said liquid phase growth is performed using a solvent of Sn and a solute of Si. A process for producing a solar cell according to Claim 11, wherein said semiconductor junction is formed by ion implantation from the surface of the semiconductor layer. A process for producing a solar cell according to Claim 11, wherein said semiconductor junction is formed by deposition of a further semiconductor. A process for producing a solar cell according to Claim 17, wherein said further semiconductor comprises a microcrystalline semiconductor. A process for producing a solar cell according to Claim 12, which has a step of forming a semiconductor junction in a surface of said polycrystalline semiconductor. A process for producing a solar cell according to Claim 19, wherein said semiconductor junction is formed by ion implantation from the surface of the semiconductor layer. A process for producing a solar cell according to Claim 19, wherein said semiconductor junction is formed by deposition of a further semiconductor. A process for producing a solar cell according to Claim 21, wherein said further semiconductor comprises a microcrystalline semiconductor. A process for producing a solar cell according to Claim 10, which has, after said step (v), a step of forming a transparent electrode on said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 10, which has, after said step (v), a step of forming a collector electrode on said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 10, wherein said substrate has a conductive surface. A process for producing a solar cell according to Claim 10, wherein said substrate is a metal. A process for producing a solar cell according to Claim 10, wherein said layer of the metal has a thickness of 0.01 to 10 µm. A process for producing a solar cell according to Claim 10, wherein said layer of the metal oxide has a thickness of 0.01 to 10 µm. A process for producing â solar cell according to Claim 12, wherein a transparent electrode is provided on said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 12, wherein a collector electrode is provided on said polycrystalline semiconductor layer. A process for producing a solar cell according to Claim 10, wherein said semiconductor layer is an amorphous silicon semiconductor layer. A process for producing a solar cell according to Claim 10, wherein said cap layer comprises a material selected from the group consisting of NSG, PSG, BSG, and Si 3 N 4 . A process for producing a solar cell according to Claim 10, wherein said cap layer has a thickness of 1 to 5 µm.

Inventors: NISHIDA SHOJI, NISHIDA, SHOJI, NISHIDA, SHOJI, C/O CANON K.K.
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1995
Main classification: H01L31
IPC codes: H01L31