High-frequency circuit element

Abstract: In a small transmission line type high-frequency circuit element that has small loss due to conductor resistance and has a high Q value, an error in the dimension of a pattern, etc. can be corrected to adjust element characteristics . An elliptical shape resonator (12) that is formed of an electric conductor is formed on a substrate (11a), while a pair of input-output terminals (13) are formed on a substrate (11b). Substrate (11a) on which resonator (12) is formed and substrate (11b) on which input-output terminal (13) is formed are located parallel to each other, with a surface on which resonator (12) is formed and a surface on which input-output terminal (13) is formed being opposed. Substrates (11a) and (11b) that are located parallel to each other are relatively moved by a mechanical mechanism that uses a screw and moves slightly. Also, substrate (11a) is rotated by the mechanical mechanism that uses a screw and moves slightly around the center axis of resonator (12) as a rotation axis (18).

Description: The present invention relates to a high-frequency circuit element that comprises a resonator, such as a filter or a channel combiner, used for a high-frequency signal processor in communication systems, etc. A high-frequency circuit element that comprises a resonator, such as a filter or a channel combiner, is an essential component in high-frequency communication systems. A filter that has a narrow band is required in mobile communication systems, etc. for the effective use of a frequency band. Also, a filter that has a narrow band, low loss, and small size and can withstand large power is highly desired in base stations in mobile communication and communication satellites. The main examples of high-frequency circuit elements such as resonator filters presently used are those using a dielectric resonator, those using a transmission line structure, and those using a surface acoustic wave element. Among them, those using a transmission line structure are small and can be applied to frequencies as high as microwaves or milliwaves. Furthermore, they have a two-dimensional structure formed on a substrate and can be easily combined with other circuits or elements, and therefore they are widely used. Conventionally, a half-wavelength resonator with a transmission line is most widely used as this type of resonator. Also, by coupling a plurality of these half-wavelength resonators, a high-frequency circuit element such as a filter is formed. (Laid-open Japanese Patent Application No. (Tokkai hei) 5-267908) However, in a resonator that has a transmission line structure, such as a half-wavelength resonator, high-frequency current is concentrated in a part in a conductor. Therefore, loss due to conductor resistance is relatively large, resulting in degradation in Q value in the resonator, and also an increase in loss when a filter is formed. Also, when using a half-wavelength resonator that has a commonly used microstrip line structure, the effect of loss due to radiation from a circuit to space is a problem. These effects are more significant in a smaller structure or at high operating frequencies. A dielectric resonator is used as a resonator that has relatively small loss and is excellent in withstanding high power. However, the dielectric resonator has a solid structure and large size, which are problems in implementing a smaller high-frequency circuit element. Also, by using a superconductor that has a direct current resistance of zero as a conductor of a high-frequency circuit element using a transmission line structure, lower loss and an improvement in high frequency characteristics in a high-frequency circuit can be achieved. An extremely low temperature environment of about 10 kelvins was required for a conventional metal type superconductor. However, the discovery of a high-temperature oxide superconductor has made it possible to utilize the superconducting phenomena at relatively high temperatures (about 77 kelvins). Therefore, an element that has a transmission line structure and uses the high-temperature superconducting materials has been examined. However, in the above elements that have conventional structures, superconductivity is lost due to excessive concentration of current, and therefore it is difficult to use a signal having large power. Thus, the inventors, etc. have implemented a small transmission line type high-frequency circuit element that has small loss due to conductor resistance and a high Q value, by using a resonator that is formed of a conductor formed on a substrate and has two dipole modes orthogonally polarizing without degeneration as resonant modes. Here, "two dipole modes orthogonally polarizing without degeneration" will be explained. In a common disk type resonator, a resonant mode in which positive and negative charges are distributed separately in the periphery of the disk is called a "dipole mode" and therefore is similarly called herein. When considering a two-dimensional shape, any dipole mode is resolved into two independent dipole modes in which the directions of current flow are orthogonal. If the shape of a resonator is a complete circle, the resonance frequencies of two dipole modes orthogonally polarizing are the same. In this case, the energy of two dipole modes is the same, and the energy is degenerated. Generally, in the case of a resonator having any shape, the resonance frequencies of these independent modes are different, and therefore the energy is not degenerated. For example, when considering a resonator having an elliptical shape, two independent dipole modes orthogonally polarizing are respectively in the directions of the long axis and short axis of the ellipse, and the resonance frequencies of both modes are respectively determined by the lengths of the long axis and short axis of the ellipse. The "two dipole modes orthogonally polarizing without degeneration" refers to these resonant modes in a resonator having an elliptical shape, for example. When using a resonator that has thus two dipole modes orthogonally polarizing without degeneration as resonant modes, by separately using both modes, one resonator can be operated as two resonators that have different resonance frequencies. Therefore, the area of a resonator circuit can be effectively used, that is, a smaller resonator can be implemented. Also, when using this resonator, the resonance frequencies of two dipole modes are different, and therefore the coupling between both modes rarely occurs, rarely resulting in unstable resonance operation and degradation in Q value. In addition, this resonator has such a high Q value that the loss due to conductor resistance is small. Generally, a resonator that has a transmission line structure and uses a thin film electrode pattern, regardless of whether a superconductor is used or not, has a two-dimensional structure formed on a substrate. Therefore, variations in element characteristics (for example, a difference in center frequency) due to an error in the dimension of a pattern etc. in patterning a transmission line structure occurs. Also, in the case of a resonator that has a transmission line structure and uses a superconductor, there is a problem that element characteristics are changed due to temperature change and input power, which is specific to superconductors, in addition to the problem of variations in element characteristics due to an error in the dimension of a pattern, etc. Therefore, the ability to adjust variations in element characteristics due to an error in the dimension of a pattern, etc. as well as a change in element characteristics due to temperature change and input power is required. Laid-open Japanese Patent Application No. (Tokkai hei) 5-199024 discloses a mechanism that adjusts element characteristics. This adjusting mechanism disclosed in this official gazette comprises a structure in which a conductor piece, a dielectric piece, or a magnetic piece is located so that it can enter into the electromagnetic field generated by a high frequency flowing through a resonator circuit in a high-frequency circuit element comprising a superconducting resonator and a superconducting grounding electrode. According to this mechanism, by locating the conductor piece, the dielectric pice, or the magnetic piece close to or away from the superconducting resonator, a resonance frequency which is one of element characteristics can be easily adjusted. However, in the high-frequency circuit element disclosed in the above Laid-open Japanese Patent Application No. (Tokkai hei) 5-199024, the shape of the superconducting resonator is a complete circle, and the resonance frequencies of two dipole modes orthogonally polarizing are the same. Therefore, both modes can not be utilized separately, and a smaller superconducting resonator and a smaller high-frequency circuit element can not be implemented. The preferred embodiment aims to provide a small transmission line type high-frequency circuit element that has small loss due to conductor resistance and has a high Q value, wherein an error in the dimension of a pattern, etc. can be corrected to adjust element characteristics. According to the present invention there is provided a high-frequency circuit element as claimed in claim 1. A resonator is preferably formed on a surface of the dielectric. The electric conductor preferably has a smooth outline. The electric conductor preferably has an elliptical shape. The structure of the entire element preferably has a structure selected from a microstrip line structure, a triplate line structure, and a coplaner wave guide structure. According to the preferable example that the electric conductor has a smooth outline, high-frequency current is excessively concentrated in a part, and a signal wave is not radiated to space. Therefore, a decrease in Q value due to an increase in radiation loss is prevented, and as a result, high Q (unloaded Q) is obtained. Also, since high-frequency current is distributed in two dimensions, maximum current density at which resonance operation is performed by a high-frequency signal having the same power can be lowered. Therefore, when a high-frequency signal having large power is processed, negative effects due to the excessive concentration of high-frequency current, such as degradation of a conductor material due to exothermic reaction, etc., can be prevented, and as a result, a high-frequency signal having larger power can be processed. According to the preferable example that the electric conductor has an elliptical shape, a resonator that has two dipole modes orthogonally polarizing without degeneration as resonant modes can be easily implemented. According to the preferable example that the structure of the entire element has a structure selected from a microstrip line structure, a triplate line structure, and a coplaner-wave guide structure, the following advantages are obtained. The microstrip line structure is simple in structure and has good coherency with other circuits. The triplate line structure has extremely small radiation loss, and therefore a high-frequency circuit element that has small loss can be obtained. In the coplanar wave guide structure, the entire structure including a grounded plane can be manufactured on one surface of a substrate, and therefore manufacturing processes can be simplified, and the structure is especially effective when using a high-temperature superconducting thin film which is difficult to form on both surfaces of a substrate as a conductor material. When the dielectric or the magnetic body is located near the resonator, the electromagnetic field distribution around the resonator changes. Therefore, by changing the relative positions of the dielectric or the magnetic body and the substrate, frequency characteristics such as a center frequency in operation as the resonator can be adjusted. As a result, variations in element characteristics due to an error in the dimension of a pattern, etc. in patterning a transmission line structure can be adjusted after manufacturing the high-frequency circuit element to implement a high-frequency circuit element that has high performance. According to the preferable example that a resonator is formed on a surface of the dielectric, each resonator is electrically coupled to the input-output terminal, and therefore the high-frequency circuit element can be operated as a notch filter or a band pass filter. Embodiments of the present invention will now be described, by way of example only, and with reference to the accompanying drawings in which: Fig. 1 is a cross-sectional view showing an embodiment of a high-frequency circuit element; and Fig. 2 is a cross-sectional view showing another embodiment of a high-frequency circuit element. Fig. 1 is a cross-sectional view showing an embodiment of a high-frequency circuit element. As shown in Fig. 1, a resonator 12 having an elliptical shape which is formed of a superconductor is formed on and at the center of a substrate 11 which is formed of monocrystal of a dielectric, etc. Also, a pair of input-output terminals 13 are formed on substrate 11 sandwiching resonator 12, and one end of input-output terminal 13 is coupled to the outer peripheral part of resonator 12 by capacitance. Also, a dielectric 22 is located near substrate 11 and at a position opposed to resonator 12. Dielectric 22 may have any shape and is independently held so that it can be relatively displaced with respect to resonator 12. The displacement of dielectric 22 is achieved by a mechanical mechanism that uses a screw and moves slightly. A grounded plane 14 is formed on the entire back surface of substrate 11, and a high-frequency circuit element that has a microstrip line structure as a whole is implemented. Here, grounded plane 14 has a two-layer structure of a superconductor layer 14a and an Au layer 14b. When dielectric 22 is located near resonator 12 as mentioned above, the electromagnetic field distribution around resonator 12 changes. Therefore, by changing the relative positions of dielectric 22 and substrate 11, frequency characteristics such as a center frequency in operation as the resonator can be adjusted. In other words, by suitably adjusting the relative positions of resonator 12 and dielectric 22 by this mechanism that moves slightly, a high-frequency circuit element that has high performance can be obtained. While dielectric 22 is located at a position opposed to resonator 12 in this example, the structure need not be limited to this structure. By locating a magnetic body or a conductor instead of dielectric 22 and changing its relative position, frequency characteristics such as a center frequency in operation as the resonator can be adjusted. Also, when a resonator is formed on a surface of dielectric 22 opposed to resonator 12, each resonator is electrically coupled to input-output terminal 13, and a notch filter or a band pass filter can be formed. Also, in this case, the characteristics of each filter can be adjusted by displacing the relative positions of resonator 12 and dielectric 22,. While the coupling of one end of input-output terminal and the outer peripheral part of resonator 12 is capacitance coupling in this example, a structure need not be limited to this structure. The coupling may be inductance coupling. Fig. 2. shows another structure of a high-frequency circuit element. A resonator 12 is an ellipse type conductor plate. The diameter of resonator 12 is about 7 mm, and the ellipticity and the gap of input-output coupling are set so that the band width is about 2 %. The manufacturing method of the high-frequency circuit element is as follows. First, a high-temperature oxide superconducting thin film that has a thickness of 1µm was formed on both surfaces of substrate 11 which is formed of monocrystal of lanthanum alumina (LaAlO 3 ). This high-temperature oxide superconductor is one that is commonly called a Hg type oxide superconductor, and primarily, a HgBa 2 CuO x (1201 phases) thin film was used. This thin film showed superconducting transition at 90 kelvins or higher. Then, an Au thin film that has a thickness of 1µm was deposited on the back surface of substrate 11 by a vacuum evaporation method to form a grounded plane 14 which is formed of a high-temperature oxide superconducting thin film and an Au thin film. Then, by photolithography and argon ion beam etching methods, resonator 12 which is formed of a high-temperature oxide superconducting thin film and a pair of input-output terminals 13 were patterned on a surface, opposite to the surface on which grounded plane 14 is formed, of substrate 11. Thereby, a high-frequency circuit element that has a microstrip line structure as a whole was implemented. Then, substrate 11 was located in a copper package 21 whose surfaces are plated with Au, and a disk-like dielectric made of polytetrafluoroethylene 22 was located at a position opposed to resonator 12. Package 21 and grounded plane 14 are adhered by a conducting paste 26 (an Ag paste was used in this example), so that thermal conductivity and an electric ground are ensured. Temperature monitoring was performed by contacting an AuFechromel thermocouple with package 21, and determining thermoelectromotive force. Then, the temperature was adjusted by cooling the entire package 21 by a small refrigerating machine that can electrically control output, and feedbacking a control signal corresponding to the thermoelectromotive force with respect to the refrigerating machine. A mechanism that moves slightly 27 is provided for package 21. By adjusting this mechanism that moves slightly 27, the gap between dielectric 22 and resonator 12 can be changed a little to adjust the characteristics of resonator 12. While the dielectric made of polytetrafluoroethylene is used as dielectric 22 in this example, a structure need not be limited to this. Other dielectric materials may be used. As mentioned above, according to the high-frequency circuit element according to the preferred embodiment, in a small transmission line type high-frequency circuit element that has a high Q value, an error in the dimension of a pattern, etc. can be corrected to adjust element characteristics, and a fluctuation in element characteristics due to temperature change and input power can be reduced or element characteristics can be adjusted when a superconductor is used as a resonator. Therefore, this high-frequency circuit element can be used for a base station in mobile communication or a communication satellite which requires a filter that can withstand large power.

Claims: A high-frequency circuit element comprising a resonator (12) that is formed of an electric conductor formed on a substrate (11) and has two dipole modes orthogonally polarizing without degeneration as resonant modes, and an input-output terminal (13) that is coupled on the outer periphery of said resonator (12), wherein a dielectric (22) or a magnetic body is located in a position opposed to said resonator (12), further comprising a mechanism that changes the relative positions of the resonator (12) and either the dielectric (22) or the magnetic body. The high-frequency circuit element according to claim 1, wherein a resonator is formed on a surface of the dielectric (22). The high-frequency circuit element according to claim 1 or 2, wherein the electric conductor has a smooth outline. The high-frequency circuit element according to any preceding claim, wherein the electric conductor has an elliptical shape. The high-frequency circuit element according to any preceding claim, wherein the structure of the entire element has a structure selected from a microstrip line structure, a triplate line structure, and a coplanar wave guide structure.

Inventors: ENOKIHARA AKIRA, HIGASHINO HIDETAKA, MIZUNO KOICHI, SETSUNE KENTARO, ENOKIHARA, AKIRA, HIGASHINO, HIDETAKA, MIZUNO, KOICHI, SETSUNE, KENTARO
Applicants: MATSUSHITA ELECTRIC IND CO LTD, MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Application year: 1995
Main classification: H01P7
IPC codes: H01P7, H01P1