Brush cleaning apparatus and cleaning system for disk-shaped objects using same

Abstract: A brush cleaning apparatus 10, 10B for cleaning disk-shaped objects W such as wafers, which make it possible to freely adjust a cleaning time and also possible to clean the outermost area of the disk-shaped objects W, which is difficult with traditional brush cleaning apparatuses and a cleaning system for disk-shaped objects W equipped as a part with at least one unit of said invented brush cleaning apparatus 10, 10B. Said brush cleaning apparatus 10, 10B according to the present invention comprises; at least one brush cleaning means 12A, 12B, 13A, 13B each composed of a pair of rotary brushes 12a, 12a', 13a, 13a' being arranged in parallel and spaced apart in one above the other, where disk-shaped objects W are each by each transported through the brushes 12a, 12a', 13a, 13a' and during the time also cleaned; and stopper means 22, 22a installed at a forward distance in the moving direction of the portions of the circumferences of the brushes 12a, 12a', 13a, 13a', where the brushes 12a, 12a', 13a, 13a' contact with the disk-shaped objects W to stop the disk-shaped objects W in place or move them out of the apparatus 10, 10B itself.

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a brush cleaning apparatus that efficiently cleans disk-shaped objects, for example, semiconductor wafers ( hereafter simply referred to as wafer ) and a cleaning system for the disk-shaped objects that uses the brush cleaning apparatus as a part thereof. 2. Description of the Prior Art In semiconductor device fabrication processes, impurities and foreign matters adhered on the surface of a wafer, on which, for example, chemical impurities or particles are usually attached just after the wafer has been finished with a polishing process, have an adverse influence on the performance of semiconductor devices therefrom. A cleaning operation is therefore indispensable in processes for producing wafers. And a variety of cleaning methods are available in the cleaning operation for a process for producing wafers, which are most broadly classified into the two groups of physical methods and chemical methods. In the physical methods, included are a method in which impurities stuck on the surface of a wafer are directly removed by the mechanical action of a cleaning brush, another method in which a pressurized liquid is shot in a stream onto part or all of the surface of a wafer from a jet nozzle and thereby the impurities are removed off, and still another method in which impurities stuck on the surface of a wafer are removed off by application of ultrasonic wave energy in a condition that the wafer to be cleaned is immersed in a liquid, where ultrasonic wave is produced with a piezoelectric transducer installed under water. In the chemical methods, impurities stuck on the surface of a wafer are chemically decomposed into constituents to be removed by the powers of chemicals or enzymes. In the meantime, both of the methods may be combined so as to improve the total cleaning capacity. Among the above mentioned cleaning methods, the brush used cleaning method or simply brush cleaning method is effective in removing impurities such as particles attached on the surface of a wafer and therefore the brush cleaning method is well used in cleaning processes for wafers. There is a type of traditional brush cleaning apparatuses, which is cleaning both the surfaces of a wafer at a time with a pair of brushes, as the wafer is being turned about its center. In this type of the brush cleaning apparatus, however, it takes a longer period of time for the whole surfaces of the wafer to be cleaned, since the peripheral area of either surface has a shorter period of time to contact with the brush than the central area and, what's worse, the very periphery and its neighbor are unfavorably restricted in cleaning action with necessity of mechanically supporting the wafer by the periphery in rotation thereof. SUMMARY OF THE INVENTION The present invention was made in view of the state of the prior art technology above-mentioned and has an object to provide a brush cleaning apparatus, which is capable of shortening the time of brush cleaning, making the mechanism of a related apparatus simpler and effectively cleaning the outermost periphery by eliminating supporting devices for supporting a disk-shaped object during brush cleaning, and a cleaning system for the disk-shaped objects using tne same as a part thereof. The brush cleaning apparatus according to the invention comprises: brush cleaning means comprising a pair of first and second rotary brushes each adapted for rotation about a respective axis, said first and second rotary brushes being arranged with their axes of rotation parallel to one another and spaced apart one above the other, such that rotation of said rotary brushes causes disk-shaped objects inserted between said first and second rotary brushes to be transported between the pairs of the brushes in a moving direction perpendicular to the axes of the rotary brushes, and at the same time cleaned with brush action; and stopper means located at a distance from the brush cleaning means in said moving direction and adapted to control movement of said disk-shaped objects in said moving direction; said stopper means comprising a pair of parallel stopper rods extending at right angles to the axes of the rotary brushes and to said moving direction; characterised in that: the apparatus includes a plurality of said brush cleaning means; said stopper means is adapted to controllably prevent or allow movement of said disk-shaped objects in said moving direction, said pair of parallel stopper rods having a controllably variable spacing therebetween; the arrangement being such that said stopper means prevents movement of said disk-shaped objects in said moving direction when said spacing is less than the diameter of the disk shaped objects and permits movement of said disk-shaped objects in said moving direction when said spacing is qreater than the diameter of the disk shaped objects, such that the speed of transport of said disk-shaped objects in said moving direction may be controlled by varying said spacing while the disk-shaped objects are being driven by rotation of said rotary brushes. The brush cleaning apparatus preferably further comprises at least one auxiliary brush cleaning means for cleaning a leading tip of a disk-shaped object, said at least one auxiliary brush cleaning means each including a pair of auxiliary rotary brushes being arranged with their axes of rotation in parallel and spaced apart one above the other, and located at a distance from said stopper means along said moving direction; whereby the leading tip of the disk-shaped object is cleaned with said auxiliary brush cleaning means by moving in said moving direction beyond said stopper means as the spacing between the stopper rods is increased. The brush cleaning apparatus preferably further comprises an auxiliary stopper means for preventing or allowing movement of the disk-shaped objects in the moving direction, said auxiliary stopper means being located at a distance from said at least one auxiliary brush cleaning means along said moving direction, said auxiliary stopper means comprising a pair of auxiliary stopper rods having an adjustable spacing therebetween, whereby a disk-shaped object is prevented from moving in the moving direction when said spacing is less than the diameter of the disk-shaped object, the disk-shaped object is permitted to move slowly forward in the moving direction as said spacing is slowly increased, and the disk-shaped object is permitted to exit the apparatus when said spacing is larger than the diameter of the disk-shaped object. The brush cleaning apparatus is particularly suited to cleaning semiconductor wafers, but may also be used for cleaning other disk-shaped objects. The brush cleaning apparatus may be employed in a cleaning system for disk-shaped objects comprising: a loader mechanism used for transporting disk-shaped objects accommodated in place in carriers; brush cleaning sections for cleaning the disk-shaped objects transported from the loader mechanism; rinse sections for rinsing the disk-shaped objects as cleaned in the brush cleaning sections; drying sections for drying the disk-shaped objects as rinsed; and an unloader mechanism for receiving the disk-shaped objects into carriers. US-A-5081733 discloses a wafer cleaning apparatus which includes a single pair of rotary brushes and stopper rods. In this case the stopper rods reciprocate to move the wafer backwards and forwards between the brushes, the wafer being driven in a forward direction by the rotation of the brushes, but cannot move apart to permit onward motion of the wafer beyond the stopper rods. EP-A-0526245 also discloses a brush cleaning apparatus as part of a wafer cleaning system. In this case, the wafer is introduced vertically between a pair of horizontally disposed rotary brushes. The rotation of the brushes does not serve any function in transporting the wafer through the apparatus. The brush cleaning apparatus according to the present invention may include one or more of the brush cleaning means arranqed in parallel with each other in view of the tact that the required cleaning time is made shorter if the contact area between the wafer and the brushes is made larger. Further, a stopper means comprising two stopper rods is located at a distance from the brush cleaning means in the moving direction of a portion of the circumferences of the roller brushes, where they contact the wafer in brush cleaning. In the brush cleaning apparatus, transportation of wafers gets easier with adoption of a construction of opening the stopper means and further no traditional wafer supporting mechanism is required, which makes it possible to simplify the construction of a brush cleaning apparatus. Still further, it is made possible with the brush cleaning apparatus according to the present invention that the outermost periphery of a wafer is effectively cleaned. BRIEF DESCRIPTION OF THE DRAWINGS Other features and objects of the present invention will become apparent from a study of the following description of both a brush cleaning apparatus, which is capable of shortening the time of brush cleaning, making the mechanism of the apparatus simpler and cleaning the outermost periphery by eliminating supporting devices for supporting a disk-shaped object during brush cleaning, and a cleaning system for the disk-shaped objects using said brush cleaning apparatus as a part thereof, together with the accompanying drawings, of which: Fig.1 includes schematic plan views, in which the action of a brush cleaning apparatus according to the present invention is represented as seen from above. Fig.2 includes schematic side views of the cleaning action of Fig.1 as seen from the side. Fig.3 is a schematic plan view showing a cleaning system for disk-shaped objects comprising two units of the brush cleaning apparatus according to the present invention. Fig.4 is a schematic side view of Fig.3. Fig.5 is a sectional view taken on line V-V of Fig.3. Fig.6 is a sectional view taken on line VI-VI of Fig.3. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Below described in reference to Figs.1 and 2 is an embodiment of the present invention. Wafers are taken as a form of the disk-shaped objects to be cleaned in the embodiment. Figs.1 (a) to (d) are schematic plan views as seen from above, showing the cleaning action of a brush cleaning apparatus (10) according to the present invention. Figs.2(a) to (d) are the corresponding schematic side views of the cleaning action of Figs.1(a) to (d). The brush cleaning apparatus (10) according to the present invention is equipped with brush cleaning means 12A and 12B and an auxiliary brush cleaning means 12C, which are respectively constructed of two pair of rotary brushes 12a, 12a',12b and 12b' and a pair of auxiliary brush 12c and 12c', the brushes of each pair, auxiliary or not, being all spaced apart, face to face and in one above the other. The brush cleaning means, two units marked with 12A and 12B represented in Figs.1 and 2, and the auxiliary brush cleaning means, one unit marked with 12C represented therein, are enough in numbers of units with equipment of at least one unit for each brush cleaning means. The marks 18 and 20 indicate wafer guides arranged at the side ends of the brush cleaning apparatus 10. The mark 22 is a stopper means to stop the forward movement of wafers W and disposed between the brush cleaning means 12B and the auxiliary brush cleaning means 12C. The stopper means 22 is composed of a pair of stopper rods 24, 24, which are so constructed as to be moved sideways by an opening and closing mechanism for the stopper rods, not shown. The stopper means 22 is thus controllably free to open or close. The stopper rods 24, 24 have a critical position of the pair, where the interval of the rods is usually set at about 0.95 times as large as the diameter of wafers to be cleaned. The stopper rods do not open beyond the critical position as long as a special instruction is not given. The stopper rod opening and closing mechanism, not shown, act to open the interval of the stopper rods beyond the critical position so that the wafer W is released from the stop position, according to an instruction from a stopper control means C, only when a sensor S installed in the next section recognizes there being no wafer therein. Thereby, destruction of wafers through inadvertent contacts with each other is effectively prevented. The marks 26, 28 indicate shower heads for cleaning liquid supply, installed respectively above and below both the brush cleaning means 12A, 12B and the auxiliary brush cleaning means 12C. According to the above mentioned construction, a wafer W is led by the wafer guides 18, 20, while it is driven to proceed by rotation of the brushes in the moving direction ( in the right direction as viewed in the example of the drawings ) of the peripheral portions of the rotary roller brushes 12a, 12a', 12b, 12b', where the brushes are to contact the wafer in operation. The transferring wafer W is stopped at the stopper rods 24, 24 in the closing state ( hereafter the moving direction of the peripheral portion particularly indicated above is simply referred to as simply rotational direction or rotational direction of the brushes). Next, the wafer W is slowly being moved in the rotational direction ( in the right direction as viewed in the example of the drawings ), as the stopper rods 24, 24 are slowly opening. When it is confirmed that the wafer is fully cleaned, for instance, after a proper time is passed and besides no wafer remains in the next section by means of a sensor S, an instruction is transmitted from the stopper control means C to actuate the stopper rod opening and closing mechanism and thereby open the stopper rods 24, 24 beyond the critical position, so that the wafer W is released from the stop state and further forwarded to the next section for another treatment. In the state where a wafer W is kept in stoppage or slowly being transported in the forward direction, the front and back surfaces of the wafer W are both being cleaned by means of the brush cleaning means 12A, 12B and the auxiliary brush cleaning means 12C in the presence of a cleaning liquid supplied from cleaning liquid supply nozzles 26, 28. When the leading tip of the wafer W protrudes beyond the imaginary line passing the forward side of the stopper rods 24, 24 in the process of slowly opening thereof, the auxiliary brush cleaning means 12C gives an additional cleaning action on the leading tip of the wafer W so as not to level down the brush cleaning effect thereon as compared with the other area on the wafer. The cleaning time of the wafer W is totally or in part by part free to be adjustable, by regulating the magnitude of opening of the stopper rods operated by the stopper rod opening and closing mechanism, not shown, with instructions from the stopper control means C. The stopper rods 24, 24 are moved back to the closing condition, after the wafer W is fully moved out to the next section, in which state they 24,24 are awaiting another wafer. In the above mentioned embodiment, the brush cleaning apparatus is composed of the brush cleaning means 12A, 12B and the auxiliary brush cleaning means 12C. However, there may be conceivable a brush cleaning 10, which is composed of the brush cleaning means 12A, 12B only, while an auxiliary brush cleaning means 12C may be installed at a different position from the above case in the same cleaning system for disk-shaped objects. The brush cleaning apparatus 10 is usually used as a part built in a cleaning system for disk-shaped objects such as wafers. The following description is to explain an example of a cleaning system for disk-shaped objects with the brush cleaning apparatus built therein in reference to Figs.3 to 6. Fig.3 is a schematic plan view showing a cleaning system for disk-shaped objects ( which are wafers in this case of the drawing ) comprising two units of the brush cleaning apparatus according to the present invention. Fig.4 is a schematic side view of Fig.3. Fig.5 is a sectional view taken on line V-V of Fig.3. Fig.6 is a sectional view taken on line VI-VI of Fig.3. The mark 32 in Figs.3 and 4 indicates a wafer loader mechanism, in which wafers W are taken out one by one from a supply carrier 34 containing the wafers W by way of a supply slit 35a of a partition 35 and supplied to a brush cleaning section 36. The brush cleaning section 36 has a plurality of the brush cleaning apparatuses 10 mentioned above. In the example of Figs.3 and 4, the brush cleaning section 36 is composed of: a first brush cleaning apparatus 10A having four brush cleaning means 11A, 11B, 11C, and 11D, which are further respectively composed of pairs of rotary brushes 11a, 11a'; 11b, 11b'; 11c, 11c' and 11d, 11d' ; a second brush cleaning apparatus 10B having four brush cleaning means 13A, 13B, 13C and 13D, which are further respectively composed of pairs of rotary brushes 13a, 13a'; 13b, 13b'; 13c, 13c' and 13d, 13d'; and an auxiliary brush cleaning means 15A having a pair of auxiliary rotary brushes 15a, 15a'. In the embodiment shown in Figs.3 and 4, three stopper means are installed, which are a first stopper means 22a disposed after a first brush cleaning apparatus 10A, a second stopper means 22b disposed after a second brush cleaning apparatus 10B and an auxiliary stopper means 22c after an auxiliary brush cleaning means 15A. The first, second and auxiliary stopper means 22a, 22b and 22c are respectively composed of pairs of the first stopper rods 24a, 24a', the second stopper rods 24b, 24b'and the auxiliary stopper rods 24c, 24c'. A stopper rod opening and closing mechanism T controls the respective movements and positions of the stopper rods 24a, 24a, 24b, 24b and 24c, 24c. In the mean time, the sensor S and stopper control means C shown in Figs.1 and 2 are omitted in the embodiment shown in Figs.3 and 4, but they are actually equipped to the embodiment. The stopper rod opening and closing mechanism T is electrically connected to the stopper control means C and is actuated to open or close the stopper rods by instructions transmitted from the stopper control means C as is explained in Figs.1 and 2. Sensors, not shown, are installed in the respective sections following the stopper means 22a, 22b and 22c to detect the existence of wafers within the respective sections. The sensors are electrically connected to the stopper control means C and give proper instructions to close fully or partly each pair of the stopper rods, where the respective pairs of the stopper rods 24a, 24a; 24b, 24b and 24c, 24c do not open fully or stay closed to confine wafers within the sections themselves, if wafers are confirmed to remain in the following sections. The mark 38 indicates a wafer transportation belt mechanism having wafer holding members 39 mounted thereon. The wafer transportation belt mechanism 38 transports the wafer W as cleaned from the brush cleaning section 36, to a rinse section 40 equipped with supply nozzles 47, 47 for rinse liquid and further to a drying section equipped with IR lamps 50. The dried wafers are taken in a receiving carrier 46 by means of a wafer unloader mechanism 44. In the mean time, M1 indicates a motor for driving the brush cleaning apparatuses 10A and 10B and M2 indicates another motor for driving the wafer transportation belt mechanism 38. The actions of each of the parts in the construction of the cleaning system for disk-shaped objects are described below: Firstly a plurality of wafers W are set within the supply carrier 34. The wafers are fed to the brush cleaning section 36 one by one from the carrier 34, when the wafers W are led to a proper position in the brush cleaning section 36 by the wafer guides 18, 20 with certainty. The wafer are each forwarded by the wafer loader mechanism 32 and the frictional force created by rotation of the pairs of rotary brushes 11a, 11a'; 11b, 11b'; 11c, 11c' and 11d, 11d' and stopped at a position after a small travel, where the wafer is physically stopped by the first stopper rods 24a, 24a in the close condition. Then, the first stopper rods 24a, 24a are slowly being opened by means of the action of the stopper rod opening and closing mechanism T, which is originally actuated by an instruction transmitted from the stopper control means, not shown. The leading tip of the wafer W is being protruded beyond the imaginary line passing the right sides of the stopper rods 24a, 24a according as the stopper rods are slowly opening. When the first stopper rods 24a, 24a are opened to a full extent, the wafer W is released from the ristriction of the stopping action to then proceed to the next section, where the speed of opening of the stopper rods 24a, 24a is adjusted so as for the wafer to be effectively cleaned across the whole surfaces thereof. The cleaning action is realized by the frictional force of the sponge portion of each of the brushes with the surfaces of a wafer W, being caused by the difference between the forwarding speed of the wafer W and the circumferential speed of the brushes. On the other hand, when the wafer stays in the stop state or in the slowly moving condition, it is cleaned across the both surfaces by brushing action of the brush cleaning means 11A ∼ 11D in the presence of a cleaning liquid supplied from the cleaning liquid supply nozzles 26 and 28. When the leading tip of the wafer W passes, if anything, beyond the extent of cleaning under command of the brush cleaning means 11D according as the first stopper rods 24a, 24a is opening slowly, the brush cleaning means 13A of the second brush cleaning apparatus 10B begins to clean the leading tip of the wafer W so as not to level down in cleaning effect on the particular area, where the forwarding speed of the wafer is adjusted to answer the particular cleaning purpose. The wafer W is moved out the first brush cleaning apparatus 10A and then is cleaned by the second brush cleaning apparatus 10B, when the stopper rods 24b, 24b stop in place to clean the wafer W by the brushes as done in the first brush cleaning apparatus 10A. When the second stopper rods 24b, 24b are slowly opening until the leading tip of the wafer W is protruded beyond the imaginary line passing the right sides thereof, so that it is moved out of the cleaning extent, if anything, under command of the brush cleaning means 13D, the auxiliary brush cleaning means 15A completes cleaning of the leading tip of the wafer W not to level down as compared with the other area. The role of the auxiliary brush cleaning means 15A is to clean especially the leading tip of a wafer W protruded beyond the cleaning extent under control of the brush cleaning apparatus 10B while adjusting the forwarding speed of the wafer W and the role of the auxiliary stopper rods 24c, 24c is to make the wafer stay in place during cleaning action on the leading tip so as not to move out to the next section, when the next section is occupied with another wafer W in another process. Consequently, if there is confirmed no wafer W in the next section, after the auxiliary cleaning is finished, the auxiliary stopper rods 24c, 24c are fully opened to move the wafer out to the next section for another process. Each of the stopper rods 24a, 24a; 24b, 24b and 24c, 24c are closed after confirmation of the wafer's discharge. The wafer finished with both cleaning processes by the brush cleaning apparatus 10B and the auxiliary brush cleaning apparatus 15A is being moved in the space of the rinse section 40 at a constant speed, as they are put between wafer holding members 39 for supporting, which are mounted to the wafer transportation belt mechanism 38. During this transportation, the wafer W is rinsed across both of the surfaces with the rinse liquid supplied from the rinse supply nozzles 47, 48. The wafer W as rinsed is further passed through the space of the drying section 42 equipped with IR lamps to dry them. The dried wafer W is received into the receiving carrier 46 by means of the wafer unloader mechanism 44 in the same way as the other wafers are received. As described before, in the brush cleaning apparatus 10, 10A according to the present invention, a brush cleaning time is shorten by installing in parallel more than one brush cleaning means 12A, 12B, 11A, 11B, the cleaning time of disk-shaped objects W or wafers is free to be adjustable by disposing stopper means 22, 22a in the rotation direction of the brushes 12a, 12a', 11a, 11a', the outermost area of the wafer W is fully cleaned as well by virtue of the stopper means 22, 22a and further the cleaning efficiency of a cleaning system for disk-shaped objects W may be increased by building the brush cleaning apparatus 10, 10A therein.

Claims: A brush cleaning apparatus (10, 10B) comprising: brush cleaning means (12, 13), comprising a pair of first and second rotary brushes (12a, 12a', 13a, 13a') each adapted for rotation about a respective axis, said first and second rotary brushes being arranged with their axes of rotation parallel to one another and spaced apart one above the other, such that rotation of said rotary brushes causes disk-shaped objects (W) inserted between said first and second rotary brushes to be transported between the pairs of the brushes (12, 13) in a moving direction perpendicular to the axes of the rotary brushes, and at the same time cleaned with brush action; and stopper means (22, 24) located at a distance from the brush cleaning means (12, 13) in said moving direction and adapted to control movement of said disk-shaped objects (W) in said moving direction; said stopper means (22, 24) comprising a pair of parallel stopper rods extending at right angles to the axes of the rotary brushes and to said moving direction; characterised in that: the apparatus includes a plurality of said brush cleaning means (12A, 12B, 13A, 13B); said stopper means is adapted to controllably prevent or allow movement of said disk-shaped objects (W) in said moving direction, said pair of parallel stopper rods (22, 24) having a controllably variable spacing therebetween; the arrangement being such that said stopper means (22, 24) prevents movement of said disk-shaped objects (W) in said moving direction when said spacing is less than the diameter of the disk shaped objects (W) and permits movement of said disk-shaped objects (W) in said moving direction when said spacing is greater than the diameter of the disk shaped objects (W), such that the speed of transport of said disk-shaped objects in said moving direction may be controlled by varying said spacing while the disk-shaped objects (W) are being driven by rotation of said rotary brushes. The brush cleaning apparatus (10, 10B) as defined in Claim 1, further comprising at least one auxiliary brush cleaning means (12C, 15A) for cleaning a leading tip of a disk-shaped object (W), said at least one auxiliary brush cleaning means (12C, 15A) each including a pair of auxiliary rotary brushes (12c, 12c', 15a, 15a') being arranged with their axes of rotation in parallel and spaced apart one above the other, and located at a distance from said stopper means (22, 22a) along said moving direction; whereby the leading tip of the disk-shaped object (W) is cleaned with said auxiliary brush cleaning means (12C, 15A) by moving in said moving direction beyond said stopper means (22, 22a) as the spacing between the stopper rods (24, 24a) is increased. The brush cleaning apparatus (10, 10B) as defined in Claim 2, further comprising an auxiliary stopper means (22c) for preventing or allowing movement of the disk-shaped objects (W) in the moving direction, said auxiliary stopper means (22c) being located at a distance from said at least one auxiliary brush cleaning means (12C, 15A) along said moving direction, said auxiliary stopper means (22c) comprising a pair of auxiliary stopper rods (24c) having an adjustable spacing therebetween, whereby a disk-shaped object (W) is prevented from moving in the moving direction when said spacing is less than the diameter of the disk-shaped object, the disk-shaped object (W) is permitted to move slowly forward in the moving direction as said spacing is slowly increased, and the disk-shaped object (W) is permitted to exit the apparatus when said spacing is larger than the diameter of the disk-shaped object (W) The brush cleaning apparatus (10, 10B) as defined in any one of Claims 1 to 3, wherein said disk-shaped objects (W) are semiconductor wafers. A cleaning system for disk-shaped objects (W) comprising: a loader mechanism (32) used for transporting disk-shaped objects (W) accommodated in place in carriers (34); brush cleaning sections (36) for cleaning the disk-shaped objects (W) transported from the loader mechanism (32); rinse sections (40) for rinsing the disk-shaped objects (W) as cleaned in the brush cleaning sections (36); drying sections (42) for drying the disk-shaped objects (W) as rinsed; an unloader mechanism (44) for receiving the disk-shaped objects (W) into carriers (46), characterised in that at least one brush cleaning apparatus (10, 10B) as defined in Claims 1 to 3 is part of said cleaning system.

Inventors: NAKANO MASAMI RYOKUHU-RYO, SUZUKI MORIE, TAKAMATU HIROYUKI, UCHIYAMA ISAO, NAKANO, MASAMI, SUZUKI, MORIE, TAKAMATU, HIROYUKI, UCHIYAMA, ISAO, NAKANO, MASAMI, RYOKUHU-RYO, 1505
Applicants: SHINETSU HANDOTAI KK, SHIN-ETSU HANDOTAI COMPANY LIMITED
Application year: 1995
Main classification: H01L21
IPC codes: B08B1, H01L21, B08B3