Capacitance-type displacement measuring device

Abstract: A rotary encoder 10 is composed of a halfway cylindrical stator 11 and a cylindrical rotor 12. The rotor 12 is disposed coaxial with the stator 11 with a predetermined gap. Plural transmitting electrodes 13 with spiral patterns and receiving electrode 14 with a rectangular pattern are formed on the inner surface of the stator 12. The transmitting electrodes 13 and receiving electrode 14 are formed of a FPC substrate 17 with lead lines 15, 16. On the outer surface of the rotor 12, coupling electrode 18 are formed with a spiral pattern so as to be capacitively coupled to the transmitting electrodes 13 and receiving electrode 14.

Description: The present invention relates to a capacitance-type displacement measuring device used for a small measuring device such as an electric micrometer, hole test, dial gauge, angle-measuring equipment and the like. Numerous capacitance-type measuring device for making linear or angular measurements have been developed wherein two scales, on which are respectively arranged, capacitively coupled electrodes, are displaced relative to each other, and the relative positions of the two scales are determined by sensing capacitance change between the electrodes. The precision of these capacitance-type measuring sensors is determined by the divisional number of the electrodes on the scales. Therefore, for obtaining a high resolution, it is necessary to fine at least one of transmitting electrodes and receiving electrodes. Fig.20 shows a scheme of a prior capacitance-type displacement measuring device. The device comprises a first and second scales displaced to relatively movable. On the first scale, a plurality of first transmitting electrodes 1 are arranged with a constant space, and receiving electrode 4 is disposed along the longitudinal direction of the scale. In this case, each unit of the first transmitting electrodes 1 consists of 8 electrodes. 8-phases sine wave signals, which are pulsed based on the clock pulse from an oscillator 5, and whose phases are mutually shifted by 45°, are generated from a pulse modulating circuit 6 to be supplied to the first transmitting electrodes 1. Therefore, the width of each unit of the transmitting electrodes 1 is equal to a transmitting wavelength pitch Wt1. As disposed on the second scale are arranged second receiving electrodes 2 with a pitch Pr2 equal to the transmitting wavelength pitch Wt1, which are capacitively coupled to 4 transmitting electrodes 1 on the first scale . Also disposed on the second scale are second transmitting electrodes 3 which are electrically connected with the second receiving electrodes 2 and capacitively coupled to the first receiving electrode 4 on the first scale. The first receiving electrode 4 is connected to a measuring circuit 7. In the device as described above, when the first and second scales are relatively moved, phase of received signal vary based on the capacitive coupling between the first transmitting electrodes 1 and the second receiving electrodes 2. It is able to measure displacement by sensing the phase variation of the received signal. In this case, since the device has 8 transmitting electrodes, and these electrodes are driven by multi-phase signals, as phase shifted with respect to each other by 45°, it is able to determine a measurement position within a precision of Pr2/8. If the first and second scales in the above-described capacitance-type measuring device are formed of coaxial cylindrical members, it is able to obtain a small cylindrical displacement sensor. Fig.21 A and Fig.21B show an example of expanded electrode patterns of outer cylindrical member (i.e., stator) and inner cylindrical member (i.e., rotor) in such a cylindrical displacement sensor. As shown in these figures, two units A, B of first transmitting electrodes 1, each of the units having 8 electrodes, and s first receiving electrode 4 are formed on the inner surface of the stator. Two units of second receiving electrodes 2 opposed to first transmitting electrodes 1 and second transmitting electrodes 3 opposed to the first receiving electrode 4 are formed on the outer surface of the rotor. For manufacturing such a cylindrical displacement sensor, it is necessary to form electrode patterns on a cylindrical surface. Several methods for forming such electrode patterns, especially electrode patterns on the stator, for example, have been provided as follows: (1) electrode patterns are formed on a flexible print circuit (FPC) substrate, then the FPC is affixed to the inner surface of a cylindrical member (refer to USP 5,239,307); (2) electrode patterns are formed on the surface of a cylindrical member by laser beam machining (refer to German Patent No. 3,426,750). Further, for making a highly precise measurement, it is necessary to dispose the stator and the rotor with a high concentricity. However, it is difficult to obtain a high concentricity in a small cylindrical sensor. For realizing highly precise measurement in spite of that the concentricity is bad, it is necessary to arrange at least two units of electrodes, as shown in Fig.30A and 30B. When two units of electrodes are arranged in angular direction, the influence of misalignment between the stator and the rotor can be cancelled by averaging the two outputs of the electrode units. EP-A-0246592 discloses an analogue direct current system having two sets of interleaved transmission electrodes on a stator which are capacitively coupled to a third receiving electrode. The helical arrangement of electrodes upon a rotor is discussed in FR-A-1226147. However, several problems are remained in such a cylindrical displacement sensor in the conventional arts. First, it is difficult to form electrode patterns on a cylindrical member by use the above-mentioned methods. Especially, smaller the cylindrical member is, more difficult the process for forming the precise patterns becomes. Second, it is difficult to connect the electrode patterns on the inner surface of the cylindrical member to an external measuring circuit, and to assemble a stator and a rotor. If it is necessary to form 2 units of electrodes for solving the problem of concentricity, the wirings between the sensor and the external measuring circuit become more complicated, and operation process becomes more complicated too. Since there are problems to be solved as above described, the cylindrical displacement sensor is not yet practically used. An object of the present invention is to provide a capacitance-type measuring device which can be readily wired and constructed, and whose electrode patterns can be easily formed. Another object of the present invention is to provide a capacitance-type measuring device which is not necessary for highly concentricity, thereby electrode patterns can be simplified. The present invention is a capacitance-type measuring device comprising: a first inner element having an outer cylindrical surface; a second outer element arranged coaxially with the first element having an inner incomplete cylindrical surface opposing the outer cylindrical surface of the first element, the elements being arranged such that the cylindrical surfaces are movable with respect to one another, whilst maintaining a predetermined gap between them; and capacitive coupling means for producing a displacement signal corresponding to a relative position between the first and second elements, wherein the capacitive coupling means comprises: a) an array of transmitting electrodes disposed on the cylindrical surface of either the first or second elements, means for generating alternating signals having different phases from each other, means for respectively supplying to each transmitting electrode an alternating signal with a different phase; b) a receiving electrode for outputting the displacement signal, the receiving electrode being disposed on the same cylindrical surface as the array of transmitting electrodes and isolated from it; and c) a coupling electrode which is disposed on the cylindrical surface of the other element to be capacitively coupled to the array of transmitting electrodes and to the receiving electrode. Preferred embodiments are subject of the dependent claims. The device comprises the inner element having the cylindrical outer surface and the outer element having the incomplete cylindrical inner surface half surrounding the inner element. Since the outer element is, for example, an incomplete cylinder whose side portion is open, it is easy to form electrode patterns in the inner surface, to lead out the wire, and to construct the elements. For example, If the electrode patterns and the lead wire thereof are formed on an FPC substrate, and then affixed to the inner surface of the outer element, the process for forming the electrode patterns including the lead wire becomes to be easy. In the present invention by use of combination of a complete cylinder and an incomplete cylinder, and by arranging the transmitting electrodes and the coupling electrodes with spiral patterns, it is able to obtain a displacement sensor for measuring angular displacement. In the displacement sensor, even if the axes are misaligned between the rotor and the stator, the gap between the transmitting electrodes and the coupling electrodes opposed each other is averaged in angular direction to be approximately constant. Therefore, even if the concentricity is not high, it is able to obtain a high measurement precise. Further, if, on each of the stator and rotor, two sets of electrode patterns having a reverse patterns each other are arranged, the influence of misalignment in axial direction between the stator and the rotor can be canceled, and it is able to measure angular displacement with high precise. In the accompanying drawings: Fig.1A and Fig.1B show a plan view and a sectional view of the main portion of an electric micrometer including a rotary encoder according to an embodiment of the present invention. Fig. 2A to Fig.2D show schematic examples of the rotary encoder. Fig.3 shows a construction of a signal processing circuit for the rotary encoder. Fig.4A to Fig.4C show rotary encoders according to another embodiments. Fig.5A and Fig.5B show electrode patterns of a rotary encoder according to another embodiment. Fig.6A and Fig.6B show electrode patterns of a rotary encoder according to another embodiment. Fig.7 shows an example of a signal processing circuit of the rotary encoder. Fig.8 shows signal waveforms of the signal processing circuit in Fig.7. Fig. 9A and Fig.9B show electrode patterns of a rotary encoders according to another embodiment. Fig. 10A and Fig.10B show electrode patterns of a rotary encoder according to another embodiment. Fig. 11 shows an example of a signal processing circuit of the rotary encoder in Fig. 10. Fig. 12A and Fig.12B show electrode patterns of a rotary encoder according to another embodiment. Fig. 13 shows a small measuring device including a rotary encoder according to an embodiment. Fig. 14 shows a rotary encoder according to another embodiment. Fig. 15 shows a rotary encoder. according to another embodiment. Fig. 16A to Fig.16C show a linear encoder according to another embodiment. Fig.17A and Fig.17B show electrode patterns of a linear encoder according to another embodiment. Fig.18A and Fig.18B show a method for forming electrode patterns on the outer surface of the cylinder. Fig.19 shows a method for forming electrode patterns on the inner surface of the cylinder. Fig.20 shows a principle for constructing a conventional encoder. Fig.21A and Fig.21B show a construction of a conventional cylindrical encoder. In the bellow-described rotary encoders according to the embodiments, cylindrical inner members serve as rotors, and incomplete cylindrical outer members surrounding the inner members serve as stators. Electrode patterns are formed on the outer surfaces of the rotors and the inner surfaces of the stators. However, corresponding to applications, it is able to exchange the function of the inner and outer members such that the inner members serve as stators, and the outer members serve as rotors. In every modes, it is preferable that transmitting and receiving electrodes, which are connected to driving and measuring circuits, are formed on the stators. Fig. 1A shows an electric micrometer according to a first embodiment of the present invention. In the micrometer, a spindle 101 is held in a case 103, and is able to slide by a knob 102. In the case 103, a rotary encoder 10 is installed for measuring the displacement of the spindle 101, and the measured value is displayed on a display 104. Several switches 105 are mounted near to the display 104. Fig.1B is an expanded section about a region 106 in Fig.1A for showing the installed state of the rotary encoder 10. The rotary encoder 10 comprises a rotor 12 mounted on the spindle 101 and a stator 11 installed on the inner surface of the case 103 so as to oppose the outer surface of the rotor 12. The rotor 12 consists of a cylindrical axle coaxial with the spindle 101, and the stator 11 consists of a halfway cylindrical collar which has an incomplete inner surface opposed to the outer surface of the rotor 12 with a predetermined gap. A screw 108 attached on the end portion of the rotor 12 is trapped in a longitudinal groove 107 formed on the outer surface of the rotor 12 so as to be movable along the groove 107. The rotor 12 is forced to the inner surface of the case 103 by a spring 109 to be prevented from displacement in axial direction against to the case 103. When the spindle 101 rotates and linearly displace in axial direction, the rotor 12 rotates together with the spindle 101, but does not displace in axial direction. Therefore, the rotor 12 is movable in only angular direction against to the stator 11 in accordance with the rotating and linear displacement of the spindle 101, thereby the rotated displacement can be measured. Fig.2A and Fig.2B show the installed state and the side view of the rotary encoder 10, respectively. Fig.2C and Fig.2D show the inner surface of the stator 11 and the outer surface of the rotor 12, which are rolled out, respectively. The rotor 12 is arranged to be coaxial with the stator 11 with a predetermined gap of 0.1 to 0.2 mm so as to be relatively movable. As shown in Fig.2C, as disposed on the inner surface of the stator 11, are an array of transmitting electrodes 13 and a receiving electrode 14, which are insulated from each other. The array of transmitting electrodes 13 is arranged with rectangular patterns longitudinal in axial direction at a predetermined pitch in angular direction. The array of transmitting electrodes 13, in this embodiment, is composed of 1 unit of N electrodes (N is an integer of 2 or more). N alternating signals which are phase shifted by 360°/N each other are supplied in numerical sequence to the N transmitting electrodes 13. In this embodiment, N=8. The receiving electrode 14 is disposed near to the transmitting electrode array 13 in axial direction on the inner surface of the stator 11 with a rectangular pattern longitudinal in angular direction. The transmitting electrode array 13 and the receiving electrode 14 are actually formed together with lead lines 15, 16 on an FPC substrate 17, as shown by a dotted line, and the FPC substrate 17 are affixed to the inner surface of the stator 11. The lead wires 15 and 16 are drawn out from each edge of the stator 11 and connected to external driving/measuring circuit. On the outer surface of the rotor 12, as shown in Fig.2D, two coupling electrodes 18 and two ground electrodes 19 are disposed. The coupling electrodes 18 are formed with rectangular patterns whose length in axial direction of the patterns covers the transmitting electrode array 13 and the receiving electrode 14, and whose width in angular direction covers four transmitting electrodes 13. The coupling electrodes 18 serve to receive the transmitted signal from the transmitting electrode array 13 with capacitive coupling, and serve to transmit the received signal to the receiving electrode 14 with capacitive coupling. These electrodes 18 and 19 are actually formed on an FPC substrate, and affixed to the outer surface of the rotor 12. The grounded electrodes 19 can be omitted. The arrangement of electrodes in the rotary encoder according to the embodiment is equivalent to that of the conventional encoder shown in Figs.31A, 31B. Therefore, the half-cycle πr (where r is radius of the outer surface of the rotor 12) is equal to the transmitting wavelength pitch Wt1 and the receiving electrode pitch Pr2 shown in Figs. 31A, 31B. As a result, according to this embodiment, it is able to measure the angular displacement with a high precise of πr/8 or more. Fig.3 shows a brief construction of the driving/measuring circuit of the rotary encoder 10. This circuit includes an oscillator 21 which generates a clock signal, and a pulse modulator 22 which output eight phases alternating signals synchronized with the clock signal and phase-shifted with 45° each other to the transmitting electrode array 13. The output of the receiving electrode 14, which changes corresponding to the relative rotation between the rotor 12 and the stator 11, is given to an integrator 23, then the output of the integrator 23 is given to a phase comparator 24. The comparator 24 compares the phase difference between the input signal and a reference signal, and detects a relative displacement between the rotor 12 and the stator 11 corresponding to an amount of the phase-shift. The output signal of the comparator 24 is input to a counter 25. The counter 25 counts the clock signals from the oscillator 21 in accordance to the detected signal of the comparator 24, and the amount of the relative displacement between the rotor 12 and the stator 11 are displayed on the display 26 with numerical values. According to the embodiment, because of that the stator 11 is composed of a halfway cylindrical member, it is easy to form the electrode patterns and the lead wires on the inner surface of the stator 11 by use of a FPC substrate. Even if the FPC substrate is not used, the electrode patterns can be easily formed on the inner surface of the stator by use of, for example, laser beam machining technology. Alternatively, because the stator 11 has an opening longitudinal in axial direction, a laser beam can be easily irradiated to the inner surface of the stator 11 through the opening. It is also easy to connect lead wires to the electrode patterns on the inner surface of the stator 11 by soldering, thermocompression bonding, and the like. Figs.4A and 4B, each corresponding to Figs. 2C and 2D, respectively, show the rolled out electrode patterns according to another example of the rotary encoder 10. As shown in Fig.4A, the transmitting electrode array 13 on the inner surface of the stator 11 are composed of N electrodes disposed in parallel each other with spiral patterns (where N=8 in this embodiment). The receiving electrode 14 is disposed near to the transmitting electrode array 13 in axial direction with a rectangular pattern longitudinal in angular direction. The coupling electrodes 18 on the outer surface of the rotor 12, as shown in Fig.4B, have receiving portions 18a opposed to transmitting electrode array 13 and a transmitting portion 18b opposed to the receiving electrode 14. The receiving portions 18a are formed of spiral patterns with the same lead angle as the transmitting electrode array 13, and the transmitting portion 18b is formed of a rectangular pattern similar to the receiving electrode 14, and connected to the receiving portions 18a. In Fig.4B, the overlapping state between the transmitting electrode array 13, the receiving electrode 14 and the coupling electrodes 18 is shown by dotted lines. The coupling electrodes 18 are disposed at the same pitch Pr as the transmitting wavelength Wt1 with widths covering four transmitting electrodes 13. In the rotary encoder of Fig.2, the phase change in one revolution of the rotor 12 is 360°x 2=720°. In contrast, in the rotary encoder in Fig. 4, the phase change in one revolution of the rotor 12 is 360°. In this embodiment, the electrode patterns and the lead wires can be formed of an FPC substrate as same as the above-described embodiment. In this case, as shown in Fig.4C, the FPC substrate 17 on which the lead linen 15, 16 are formed are dragged not from the edges, but through the side opening of the stator 11. According to the embodiment, even if the concentricity between the stator 11 and the rotor 12 is not sufficient, the installing precision does not give a large influence for measuring precision. Because, as a result of using the spiral electrode patterns, the intensity of the output signal is equalized in angular direction. Further, since the lead lines 15, 16 are drawn out in perpendicular to the axis of the encoder, the interference between the coupling electrodes 18 on the rotor 12 and the lead lines 15, 16 is decreased. Fig.5A and Fig.5B show electrode patterns according to another embodiment, corresponding to Fig.4A and Fig.4B, respectively. In this embodiment, the receiving electrode 14 on the stator 11 is disposed near to the transmitting electrode array 13 in angular direction, and has a rectangular pattern longitudinal in axial direction. The coupling electrode 18 on the outer surface of the rotor 12 is formed of only a spiral pattern capacitively coupled to both the transmitting electrode array 13 and the receiving electrode 14, with the same lead angle as the transmitting electrode array 13. Alternatively, the receiving portion of the coupling electrode 18, which is capacitively coupled to the transmitting electrode array 13, can not be distinguished from the transmitting portion of the coupling electrode 18, which is capacitively coupled to the receiving electrode 14, and these portions are formed of a continuous spiral pattern. According to the embodiment, the variation of the gaps between each of the transmitting electrodes 13 and the coupling electrode 18, and the variation of the gaps between the coupling electrode 18 and the receiving electrode 14 are equalized to be decreased. Figs.6A and 6B show expanded electrode patterns according to another embodiment, corresponding to Figs.4A and 4B, respectively. In this embodiment, the coupling electrode 18 is divided into a plurality of electrodes uniformly spaced with a pitch obtained by dividing the transmitting wavelength Wt1 by an integer n (-2 or more). In details, the coupling electrode 18 in the above-described embodiments is divided into 5 electrodes, then these electrodes are disposed at a pitch of 2πr/10 with spiral patterns. Although eight transmitting electrodes array 13 have the same patterns as that in Fig.4A, the phases of alternating signals are different from that in Fig.4A. Alternatively, eight phases alternating signals whose phases are sequentially shifted of 135° are supplied to the transmitting electrodes 13, as shown in Fig. 6A. According to this embodiment, when the rotor 12 rotates 1/10 revolution (i.e., 36°), the phase change of the output signal is just 360°. In other words, when the rotor 12 rotates one revolution, the output signal changes for 10 periods. The principle of the measuring method and the detailed measuring circuit in the above-mentioned embodiment has been described in details in USP4,878,013 specification. Fig.7 shows the measuring circuit, and Fig,8 shows the signal waveforms and the relations between the signals as the horizontal axis serves as time. In Fig.7, a block 100 is a rotary encoder. A plurality of alternating signals which have different phase from each other are supplied to the transmitting electrodes. An oscillator 400, which generates an alternating signal having a frequency selected in 100 to 200kHz, is used as a signal generating source. An output f0 from the oscillator 400 is divided by a frequency divider 600, thereafter transformed into eight alternating signals, whose phases are shifted with 135° each at a phase transformer 340. Then the alternating signals are modulated by the output f0 at a modulator 620 to be eight signals 200-1, 200-2, --, 200-8 which are supplied to the transmitting electrodes. The rotary encoder 100 is driven by the output signals 202 from the modulator 620, and outputs a displacement signal from the receiving electrode. The displacement signal is amplified by a differential amplifier 640 to be output as a signal 204. The envelope of the output signal 204 is, as shown in Fig.8, a sine waveform. The output signal 204 is then demodulated in a demodulator 660 which is synchronized by the output f0 of the oscillator 400. Comparing the phase of the demodulated signal 206 and the reference signal 300 generated when the rotor is at a reference point, phase difference ø is obtained. The phase difference ø is determined by the relative position between the rotor and the stator. The demodulated signal 206 including harmonic components is passed through a filter 680 to be less distorted signal 208. The signal 208 is input to a zero-cross circuit 700 to be detected a zero-cross position of the waveform. In this circuit, a counter 720 is used as a digital calculating means for obtaining the above-mentioned phase difference ø. The reset/start signals for the counter 720 is synchronized with the trigger signal of the demodulator 660 and a control unit 800. The zero-cross point signal of the reference signal is used as start trigger of the counter 720. The.counting timing is controlled by the output f0 of the oscillator 400. The counting operation is stopped by the output of the zero-cross circuit 700. Alternatively, the zero-cross circuit 700 generates a stop signal at the position corresponding to the phase difference ø, as shown in Fig.8. A count value 210 in the counter 720 shows an amount of the phase sift of the reference signal 300 by the rotary encoder 100. The count value 210 corresponding to the phase difference is processed in an arithmetic circuit 740 to be converted into a position signal. The converted position signal is supplied to a display 780 through a driver 760. The display 780 displays a measured value in a digital manner. Figs.9A and 9B show electrode patterns in a rotary encoder according to another embodiment which has A, B sets of electrode patterns shown in Figs.4A and 4B in axial direction. The receiving electrode 14 on the inner surface of the stator 11 is commonly used for A and B sets. The transmitting electrode array 13 in A and B sets have reverse spiral patterns each other. Each corresponding transmitting electrodes 13 in A and B sets is commonly driven by the same phase signal. Corresponding to the electrode pattern in the stator 11, A and B sets of coupling electrodes 18 are disposed on the outer surface of the rotor 12 in axial direction with reverse spiral patterns each other. According to the embodiment, the phases of A and B portions change in the same direction in accordance with rotating of the rotor 12. In contrast, the phases of A and B portions change in reverse directions each other in accordance with linear moving of the rotor 12 in axial direction. Therefore, unnecessary phase shifts in A and B sets can be automatically canceled on the output signal. As a result, influence of variation in axial direction can be reduced. In the embodiment of Figs. 9A, 9B, the smaller the difference between the signal intensities in A and B portions is, the larger the effect of canceling influence of variation in axial direction is. Fig.10A and Fig.10B show electrode patterns according to another embodiment, each corresponding to Fig. 9A and Fig.9B. In this embodiment, different to Figs. 9A, 9B, the coupling electrodes 18 are separated from each other between A and B portions, as shown in Fig.10B, by a separation area C. In accordance with the separation of the coupling electrodes 18, the receiving electrodes 14 in A, B portions on the stator 11 are separated from each other. The output of the receiving electrodes 14 in A, B portions are individually drawn to be processed. The measuring circuit used for the embodiment in Figs. 10A, 10B is shown in Fig.11. Different from Fig.3, two outputs from A, B portions of the rotary encoder 10 are integrated by two integrators 23a, 23b, respectively. Two outputs from the integrators 23a, 23b are processed in two phase comparators 24a, 24b, respectively. The counter 25 count clocks from the oscillator 21 in accordance with the detected signals of the phase comparators 24a, 24b to output position data. In the counter 25, the outputs A0, B0, each derived from A, B portions, are equalized to output the resultant signal according to the following formula: (A0+B0)/2. According to this embodiment, influence of variation in axial direction can be more effectively reduced. Figs.12A and 12B show electrode patterns according to another embodiment which was developed based on the construction in Figs.6A and 6B. As shown in Figs.12A and 12B, A and B sets of electrode patterns are arranged on the stator 11 and the rotor 12, respectively. The layout of the transmitting electrodes 13 and the receiving electrode 14 on the stator 11 is similar to that of Fig.5A. In this embodiment, the receiving electrodes 14 in A, B sets are commonly connected to an external measuring circuit as similar to the embodiment of Figs.9A and 9B. Fig.13 shows a construction of a small measuring apparatus in which the above-described embodiments is applied. The stator 11 and the circuit module 32 are formed of an injection molded plastics product in one body. Therefore, the stator 11 is not an individual halfway cylindrical member, but has a halfway cylindrical inner surface which is opposed to the rotor 12. On the module 32, an LSI 33, an LCD 34, switches 35, 36 and other necessary parts are mounted. The stator 11 has electrode patterns and lead lines formed on the inner surface as similar to the above-described embodiments, and.the lead lines are connected to the LSI 33. The electrode patterns can be formed by affixing a FPC substrate, or by machining a metal film directly deposited on the inner surface of the plastic product. The rotor 12 is mounted on a spindle of a to-be-measured machine ( not shown) by use of a position-aligning bush 31, then the module 32 is jointed to the bush 31. Finally, a cover 37 and a battery 38 are attached. As described above, the small displacement measuring device can be easily installed on the to-be-measured machine. In the present invention, it is not necessary that the incomplete cylindrical member is a just half cylindrical member. For example, as shown in Fig.14, an incomplete cylindrical stator 11 smaller than just half of a complete cylindrical member can be used. As shown in Fig.15, an incomplete stator 11 larger than just half of a complete cylindrical member can be also used. In the device of Fig.15, the cylindrical rotor 12 can not be inserted in the stator 11 through the side opening, but can be inserted in the stator 11 through the edge opening. In this case, comparing to a case that complete cylindrical member is used, it is more easy to form the electrode patterns and to draw out the lead lines. Figs.16A to 16c show another embodiment applied to a linear encoder. Fig.16A is a plan view of the linear encoder 50. The linear encoder 50 has a halfway cylindrical scale 51 and a cylindrical scale 52 as similar to the above-described rotary encoder. Figs.16B and 16C are electrode patterns on the scale 52 and the scale 51 rolled out, respectively. The scale 52 is longer than the scale 51. The scale 52 is prevented from relative moving in angular direction to the scale 51, and movable only in axial direction, as shown by an arrow. As formed on the inner surface of the halfway cylindrical scale 51, as shown in Fig.16C, are eight transmitting electrodes 13 and receiving electrode 14. The transmitting electrodes 13 have spiral patterns. Although only one unit of transmitting electrodes 13 corresponding to a transmitting wavelength pitch Wt1 is shown in Fig.16C, plural units of the transmitting electrodes can be arranged. The receiving electrode 14 is formed near to the transmitting electrodes 13 with a rectangular pattern longitudinal in axial direction. On the outer surface of the scale 52, as shown in Fig.16B, a plurality of receiving portions 18a of the coupling electrode 18 are formed with spiral patterns having the same lead angle as the transmitting electrodes 13 at pitch Pr2 (= Wt1) in axial direction. Each receiving portion 18a is capacitively coupled to four transmitting electrodes 13. The transmitting portion 18b of the coupling electrode 18 which is capacitively coupled to the receiving electrode 14 is formed with an elongated pattern in axial direction. The coupling electrode 18 can be formed of a continuing spiral pattern surrounding the scale 52. The linear encoder has a different construction from the conventional encoder, but the principle of the construction is the same as that of Fig. 20. Therefore, it is able to measure the linear displacement of the scale 52 relatively moving to the scale 51 in axial direction. Figs.17A and 17B show another embodiment which have two sets of electrode patterns shown in Figs.16B and 16C in angular direction. According to this embodiment, influence of axial misalignment between the scales 51 and 52 can be reduced. In the above-described embodiments, electrode patterns on the inner and outer surfaces of the halfway cylindrical members are formed of FPC substrates. In the case, optional insulator or metal material is used for the halfway cylindrical member. Figs.18A and 18B show another method for forming spiral electrode patterns on a outer surface of a cylindrical member 80. As shown in the expanded section in Fig.18B, the cylindrical member 80 is formed of an injection molded plastic body 81, on whose outer surface a conductive film 82, for example, Au,Ni and the like, is plated. The conductive film 82 is, for example, of 10µm thick. The machining apparatus has, as shown in Fig.18A, a nut member 85, a feed screw 83 which is able to be fed at a predetermined pitch, and a cutter 84. The cylindrical member 80 is firm mounted on a end portion of the feed screw 83, then the cutter 84 is applied to the outer surface of the cylindrical member 80. Then the cylindrical member 80 is fed with the feed screw 83. Thus, a spiral groove 86, for example, of 0.3µm depth, is formed on the outer surface of the cylindrical member 80. As a result, a spiral electrode pattern of the conductive film 82 are formed on the outer surface. By use of the above method, the spiral electrode patterns on the rotors, as shown in Fig.5B, Fig.6B and the like, can be easily formed. Two sets of the spiral electrode patterns as shown in Fig.9B or Fig.12B can be formed by controlling rotating direction during machining. Even if the electrodes having other patterns in addition to the spiral patterns, for example, as shown in Fig.4B, can be also formed by combination of rotation control and feed control. Fig.19 shows a method for forming spiral electrode patterns in an inner surface of a cylindrical member 90. The cylindrical member 90 is formed of an injection molded plastic body 91 on whose inner surface a conductive film 92 is plated. A cutting tool 93 having eight cutters 94 on the edge is prepared. Then the cylindrical member 90 is fed by the same method as shown in Fig.18A such as the cutting tool 93 is injected into the cylindrical member 90. Thus the conductive film 92 is cut by eight cutters 94 to be formed as spiral patterns. By this method, the spiral transmitting electrodes shown for example in Fig 4A, can be formed. In the above embodiments, the inner axles are cylindrical members each having a cylindrical cavity. However, other cylindrical members which have no cavity can be used as an inner axle. As the outer collar members, not only rolled thin plates, but also other various materials including cylindrical and rectangular blocks in which cylindrical cavities are formed can be used. Alternatively, as the outer collar members, optional materials having incomplete cylindrical inner surfaces being able to be opposed to the inner member can be used.

Claims: A capacitance-type measuring device (10) comprising: a first inner element (12) having an outer cylindrical surface; a second outer element (11) arranged coaxially with the first element having an inner incomplete cylindrical surface opposing the outer cylindrical surface of the first element, the elements being arranged such that the cylindrical surfaces are movable with respect to one another, whilst maintaining a predetermined gap between them; and capacitive coupling means for producing a displacement signal corresponding to a relative position between the first and second elements, wherein the capacitive coupling means comprises: a) an array of transmitting electrodes (13) disposed on the cylindrical surface of either the first or second elements, means for generating alternating signals having different phases from each other, means for respectively supplying to each transmitting electrode an alternating signal with a different phase; b) a receiving electrode (14) for outputting the displacement signal, the receiving electrode being disposed on the same cylindrical surface as the array of transmitting electrodes and isolated from it; and c) a coupling electrode (18) which is disposed on the cylindrical surface of the other element to be capacitively coupled to the array of transmitting electrodes (13) and to the receiving electrode (14). The capacitance-type measuring device according to claim 1, wherein the array of transmitting electrodes and the receiving electrode are disposed on the inner cylindrical surface of the second element and the coupling electrode is disposed on the outer cylindrical surface of the first element. The capacitance-type measuring device according to claim 2, wherein, the first element is held to be relatively movable against the second element in only angular direction, the array of transmitting electrodes is composed of a plurality of electrodes arranged on the cylindrical surface of the second element with a predetermined pitch in angular direction, each of which is a rectangular pattern longitudinal in axial direction, the receiving electrode is disposed near to the array of transmitting electrodes in axial direction on the cylindrical surface of the second element with a rectangular pattern longitudinal in angular direction, and the coupling electrode is disposed on the cylindrical surface of the first element with a rectangular pattern, a length in axial direction of the rectangular pattern covering the array of transmitting electrodes and the receiving electrode, and a width in angular direction of the rectangular pattern covering plural electrodes in the array of transmitting electrodes. The capacitance-type measuring device according to claim 2, wherein the array of transmitting electrodes and the coupling electrode are disposed on their respective cylindrical surfaces in spiral patterns having the same lead angle. The capacitance-type coupling device according to claim 4, wherein the coupling electrode is composed of a receiving portion disposed on the cylindrical surface of the first element with a spiral pattern with the same lead angle as the array of transmitting electrodes to be capacitively coupled to the array of transmitting electrodes, and a transmitting portion disposed on cylindrical surface of the first element to be capacitively coupled to the receiving electrode and electrically connected to the receiving portion. The capacitance-type displacement measuring device according to claim 2, wherein the array of transmitting electrodes is composed of a plurality of electrodes disposed in parallel with each other on the cylindrical surface of the second element with spiral patterns, the receiving electrode is disposed near to the array of transmitting electrodes in angular direction on the cylindrical surface of the second element with a rectangular pattern longitudinal in axial direction. The capacitance-type measuring device according to claim 4, further comprising another array of transmitting electrodes disposed near to the array of transmitting electrodes in axial direction on the cylindrical surface of the second element, two sets of the array of transmitting electrodes having reverse spiral patterns with respect to each other, and another coupling electrode disposed near to the coupling electrode in axial direction on the cylindrical surface of the first element, two sets of the coupling electrodes having reverse spiral patterns with respect to each other and being opposed to the two sets of the array of transmitting electrodes respectively. The capacitance-type measuring device according to claim 2, wherein the array of transmitting electrodes consists of N electrodes arranged around the cylindrical surface of the second element, where N is an integer greater than 2, N different alternating signals being applied to each of N electrodes, the N different alternating signals having phase shifted with respect to each other by 360/N degrees. The capacitance-type measuring device according to claim 4, wherein phase shifted alternating signals are applied to the electrodes of the transmitting electrode array, the alternating signals being phase shifted by 360/N degrees with respect to one another and wherein a phase shift of 360 degrees is applied across N electrodes representing a transmitting wavelength pitch, and wherein the coupling electrode is divided into a plurality of electrodes uniformly spaced with a pitch obtained by dividing the transmitting wavelength pitch by an integer greater than 2. The capacitance-type measuring device according to any of the preceding claims, further comprising monitoring means to monitor the movement of one element with respect to the other by comparing the phase difference between the displacement signal and a reference signal. The capacitance-type measuring device according to any of the preceding claims, wherein the inner incomplete cylindrical surface of the second element is a semicylindrical surface.

Inventors: SASAKI KOUJI, SASAKI, KOUJI, Sasaki, Kouji, c/o Mitutoyo Corporation
Applicants: MITUTOYO CORP, MITUTOYO CORPORATION
Application year: 1995
Main classification: G01B7
IPC codes: G01D5, G01B3