Optical modulator

Abstract: In an optical modulator provided with a laser light source emitting a laser light, that is to be modulated by an optical modulator, the laser light source is made a wavelength variable laser that emits a laser light the wavelength of which is variable, and there are provided modulation signal means for applying a modulation signal to the optical modulator, signal producing means for producing and outputting a signal in response to the change of the voltage of the modulation signal, driving current generating means for generating a driving current to be applied to the laser light source. By the output signal of the signal producing means, a wavelength chirping reverse to the wavelength chirping occurring in the optical modulator is given to the laser light that is emitted from the laser light source caused by that the driving current for the laser light source varies in response to the change in the modulation signal, whereby the wavelength chirping occurring in the optical modulator is canceled, and the wavelength chirping of the modulation signal light that is emitted from the optical modulator is reduced.

Description: The present invention relates to an optical modulator according to the preamble of claim 1 provided with a laser light source and, more particularly, to an optical modulator that performs a high speed long distance transmission. Figure 21 is a diagram showing a construction of a prior art optical modulator provided with a distributed feedback laser (hereinafter referred to as DFB laser) having a light absorbing layer of multi-quantum well structure. A modulator of that type is e.g. disclosed in JP-A-03 057 286. In the figure, reference numeral 1 designates a DFB laser having a resonator length of 300 ∼ 600 µm, a width of 300 µm, and a thickness of 100 µm. Reference numeral 2 designates an optical modulator provided with the DFB laser 1, having a length of 100 ∼ 300 µm, a width of 300 pm, and a thickness of 100 µm. In the DFB laser 1, a positive side electrode 3 is provided as an electrode of the laser diode 1. An electrode 4 is provided as a common grounding electrode for the DFB laser 1 and the optical modulator 2. An active layer 6 is provided as active layer of the DFB laser 1. In the optical modulator 2, a light absorbing layer 7 comprises a multi-quantum well structure including twelve quantum well layers 4 ∼ 5 nm thick, putting between barrier layers 8 ∼ 10 nm thick, and its total thickness is 140 nm. An optical modulator negative side electrode 8 is an electrode for inputting a modulation signal to the optical modulator 2. A signal voltage source 9 supplies a modulation signal to the optical modulator negative side electrode 8. Reference numeral 10 designates a modulated signal light that is obtained by modulating the output light from the DFB laser 1 by the modulation signal that is output from the signal voltage source 9. Figures 22(a) to 22(d) are diagrams for explaining the operation of the optical modulator 2, where figure 22(a) shows the change in the modulation signal voltage which is applied to the optical modulator 2. Figure 22(b) shows the change in the modulated signal light output, occurring when the modulation signal is applied, and figure 22(c) shows the change in the refractive index of the light absorbing layer 7 of the optical modulator 2, also occurring then. Figure 22(d) shows the wavelength chirping (frequency variation) occurring in the optical modulator 2. A description is given of the operation of the optical modulator. First of all, when a D.C. current is flown in the DFB laser 1 as a light source from the LD positive side electrode 3 to the common grounding electrode 4, a continuous wave (CW) laser light is generated in the active layer 6 and the CW laser light transmits in the active layer 6 toward the optical modulator 2. Then, the CW laser light advancing toward the light absorbing layer 7 of the optical modulator 2 is incident to the optical modulator 2. The light absorbing layer 7 is of a multi-quantum well structure, and when no voltage is applied between the common grounding electrode 4 and the optical modulator negative side electrode 8 of the optical modulator 2, the light absorbing layer 7 makes the CW laser light incident to the light absorbing layer 7 transmit therethrough, while when a voltage is applied between the common grounding electrode 4 and the optical modulator negative side electrode 8, the light absorbing layer 7 absorbs the CW laser light only during when a voltage bias is applied, due to the quantum confining Stark effect. In other words, when a voltage of modulation signal in a waveform as shown in figure 22(a) is applied to the optical modulator negative side electrode 8, during a period when the modulation signal voltage is at a negative level, the light absorbing layer 7 absorbs the CW laser light, whereby no laser light appears at the output side thereof, and the modulated signal light output is turned off. On the other hand, during when the modulation signal voltage is at 0 voltage level, the CW laser light transmits the light absorption layer 7, whereby the modulated signal light output becomes on. Then, the waveform of the modulated signal light 10 becomes a waveform as shown in figure 22(b) in accordance with the variation in the modulation signal voltage. In the prior art optical modulator constituted as described above, the quantum confining Stark effect of the multi-quantum well structure light absorbing layer in an absorbing type optical modulator is of a nature that the absorbing quantity generally increases when an electric field is applied. As the light absorbing quantity increases, the refractive index in the light absorbing layer increases as shown in figure 22(c) due to the relation of Kramers-Kroning, and the refractive index again decreases when no electric field is applied. With the refractive index varies, i.e., with the quantity of transmission/absorption varies, the optical length varies and the wavelength of the modulated signal light, that is output from the optical modulator output facet varies, thereby resulting chirping as shown in figure 22(d). The quantity Δλ of this wavelength chirping is about several Å for the wavelength of 1.55 ∼ 1.56 µm, the modulator of which wavelength is generally used because it produces the least transmission loss. When this wavelength chirping is large, the optical signal is subjected to distortion through the optical fiber transmission, thereby resulting in difficulty in performing a high speed long distance transmission. According to the preamble of claim 1, the present invention starts out from a prior art optical modulator as it is known from Electronic letters, vol.28, no.10, May 1992, pages 954-955. This known modulator comprises a wavelength variable laser unit ("DFB laser") for emitting a laser light the wavelength of which is variable; there are further provided an optical modulator unit ("external modulator") for modulating the laser light emitted by the laser unit, a modulation signal means ("data generator") for applying a modulation signal to the optical modulator unit, a signal generating means for generating and outputting a signal in response to a change in the voltage of said modulation signal, a driving means (not shown, but delivering the signal "bias") for generating a driving current to be applied to the laser unit, and a synthesizing means (node between "bias" and "filter") for synthesizing the output signal of the signal generating means and the driving current and for applying the resulting synthesized output signal to the laser unit. The signal generating means of this known modulator is provided in order to apply a prechirp to the laser unit so as to avoid or compensate any undesired chirping in the modulated output signal. It is therefore the object of the present invention to improve an optical modulator according to the preamble of claim 1 in such a way that the generation of unnecessary prechirping can be avoided. This object, according to the present invention, is solved by the advantageous measures indicated in the characterizing part of claim 1. Various embodiments of the invention are defined in the dependent claims. According to a first aspect of the present invention, an optical modulator includes an optical modulator itself for modulating a laser light, a wavelength variable laser for emitting a laser light, that is to be modulated and the wavelength of which is variable, means for applying a modulation signal to the optical modulator, means for producing and outputting a signal in response to the change in the voltage of a modulation signal, means for generating a driving current to be applied to the wavelength variable laser as a laser light source, and means for synthesizing the output signal of the signal producing means and the driving current, and applying the synthesized output to the laser light source. According to a second aspect of the present invention, the optical modulator of the above-described first aspect is a semiconductor optical modulator integrated with the wavelength variable laser, disposing a common grounding electrode on its rear surface. Two or more electrodes are disposed on the upper surface of the wavelength variable laser in the resonator length direction. A high reflectivity film is disposed on the rear end facet of the wavelength variable laser and a low reflectivity film is disposed on the output facet of the optical modulator. According to a third aspect of the present invention, in the optical modulator of the above-described second aspect, the two or more electrodes disposed on the wavelength variable laser are a laser diode front side electrode at the front side of the upper surface of the wavelength variable laser and a laser diode rear side electrode at the rear side of the upper surface of the wavelength variable laser. The modulation means serves to apply a modulation voltage signal between the optical modulator electrode on the upper surface of the optical modulator and the common grounding electrode. The signal producing means, including a differentiating circuit, differentiates the modulation signal applied to the optical modulator to produce and output a differentiated waveform current. The driving current generating means includes a front side electrode D.C. current source and a rear side electrode D.C. current source respectively outputting prescribed D.C. currents. The signal synthesizing means serves to synthesize the differentiated waveform current that has passed through a D.C. blocking condenser and the driving current that has passed through an A.C. blocking coil. According to a fourth aspect of the present invention, in the optical modulator of the above-described second aspect, the two or more electrodes disposed on the wavelength variable laser includes a laser diode front side electrode at the front side of the upper surface of the wavelength variable laser and an LD rear side electrode at the rear side of the upper surface of the wavelength variable laser. The modulating means serves to apply a modulation voltage signal between the optical modulator electrode on the upper surface of the optical modulator and the common grounding electrode. The signal producing means includes a bridge circuit including a transmission line producing no delay, a delay line involving a required delay quantity, and an inverter, and it serves to add a signal, that is obtained by the modulation signal applied to the optical modulator being delayed, and a modulation signal including no delay in reverse phases to each other, thereby producing and outputting a pulse signal having a pulse width corresponding to the delay time difference. The driving current generating means includes a front side electrode D.C. current source and a rear side electrode D.C. current source respectively outputting prescribed D.C. currents, and the signal synthesizing means serves to synthesize the pulse signal, that has passed through a D.C. blocking condenser, and the driving current, that has passed through an A.C. blocking coil. According to a fifth aspect of the present invention, in the optical modulator of the above-described third aspect, the front side electrode D.C. current source is connected to the laser diode front side electrode, to the laser diode rear side electrode, the differentiating circuit is connected via the D.C. blocking condenser as well as the rear side electrode D.C. current source is connected via the A.C. blocking coil, and to the laser diode rear side electrode, a current that is obtained by the differentiated waveform current being added to a D.C. current from the rear side electrode D.C. current source, is applied. According to a sixth aspect of the present invention, in the optical modulator of the above-described third aspect, the signal producing means includes an inverter at the output end of the differentiating circuit and serves to output a differentiated waveform current, that is obtained by inverting the phase of the differentiated waveform current, to the laser diode front side electrode, the inverter is connected via the D.C. blocking condenser as well as the front side D.C. current source is connected via the A.C. blocking coil, to the laser diode rear side electrode the rear side electrode D.C. current source is connected, and to the laser diode front side electrode a current that is obtained by adding the phase-inverted differentiated waveform to a D.C. current from the front side electrode D.C. current source, is applied. According to a seventh aspect of the present invention, in the optical modulator of the above-described third aspect, the signal producing means includes an inverter connected to the output end of the differentiating circuit, and it outputs a differentiated waveform current which is an output of the differentiating circuit and an inverted differentiated waveform current that is obtained by inverting the phase of the differentiated waveform current, to the laser diode front side electrode the inverter is connected via a D.C. blocking condenser and the front side electrode D.C. current source is connected via an A.C. blocking coil, to the laser diode rear side electrode the differentiating circuit is connected via another D.C. blocking condenser and the rear side electrode D.C. current source is connected via another A.C. blocking coil, and to the laser diode front side electrode a current that is obtained by adding the phase-inverted differentiated waveform current to a D.C. current from the front side electrode D.C. current source is applied, and to the laser diode rear side electrode a current that is obtained by adding the differentiated waveform current to a D.C. current from the rear side electrode D.C. current source, is applied. According to an eighth aspect of the present invention, in the optical modulator of the above-described third aspect, the modulating means includes an inverter for inverting the phase of the modulation signal, to the laser diode front side electrode the differentiating circuit is connected via the D.C. blocking condenser and the front side electrode D.C. current source is connected via the A.C. blocking coil, to the laser diode rear side electrode the rear side electrode D.C. current source is connected, and to the optical modulator electrode the phase inverted modulation signal is applied, and to the laser diode front side electrode a current that is obtained by adding the differentiated waveform current to a D.C. current from the front side electrode D.C. current source, is applied. According to a ninth aspect of the present invention, in the optical modulator of the above-described fourth aspect, the bridge circuit includes a first bridge circuit that is obtained by connecting the delay line and the inverter in series to each other and connecting the transmission line in parallel with this serial connection, to the laser diode front side electrode the front side electrode D.C. current source is connected, to the laser diode rear side electrode the first bridge circuit is connected via the D.C. blocking condenser and the rear side electrode D.C. current source is connected via the A.C. blocking coil, and to the laser diode rear side electrode a signal that is obtained by adding a pulse signal that is output from the first bridge circuit to a D.C. current from the rear side electrode D.C. current source, is applied. According to a tenth aspect of the present invention, in the optical modulator of the above-described fourth aspect, the bridge circuit includes a second bridge circuit that is obtained by connecting the inverter and the transmission line in series to each other, and connecting the delay line in parallel with this serial connection, to the laser diode front side electrode the second bridge circuit is connected via the D.C. blocking condenser and the front side electrode D.C. current source is connected via the A.C. blocking coil, to the laser diode rear side electrode the rear side electrode D.C. current source is connected, and to the laser diode front side electrode a signal that is obtained by adding a pulse signal that is output from the second bridge circuit to a D.C. current from the front side electrode D.C. current source, is applied. According to an eleventh aspect of the present invention, in the optical modulator of the above-described fourth aspect, the bridge circuit includes a first bridge circuit producing and outputting a first pulse signal, which circuit is obtained by connecting a delay line and an inverter in serial to each other and connecting a transmission line in parallel with this serial connection, and a second bridge circuit producing and outputting a second pulse signal, which circuit is obtained by connecting an inverter and a transmission line in serial to each other and connecting a delay line in parallel with the serial connection, to the laser diode front side electrode the second bridge circuit is connected via a D.C. current blocking condenser and the front side electrode D.C. current source is connected via an A.C. blocking coil, to the laser diode rear side electrode the first bridge circuit is connected via another D.C. blocking condenser and the rear side electrode D.C. current source is connected via another A.C. blocking coil, and to the laser diode front side electrode a current that is obtained by adding the second pulse signal to a D.C. current from the front side electrode D.C. current source, is applied, and to the laser diode rear side electrode a current that is obtained by adding the first pulse signal to a D.C. current from the rear side electrode D.C. current source, is applied. According to a twelfth aspect of the present invention, the optical modulator of any of the above-described third to eleventh aspects, the modulation means is provided with a delay line having a required delay quantity, to the optical modulator electrode the delay line is connected, and to the optical modulator electrode a modulation signal that is delayed by the delay line, is applied. In the present invention, in an optical modulator provided with a laser light source emitting a laser light to be modulated by an optical modulator, the laser light source is made a wavelength variable laser that emits a laser light the wavelength of which is variable, and there are provided modulation means for applying a modulation signal to the optical modulator, signal producing means for producing and outputting a signal in response to the change in the modulation signal voltage, driving current generating means for generating a driving current to be applied to the laser light source, and signal synthesizing means for synthesizing the output signal of the signal producing means and the driving current and applying the synthesized output to the laser light source. Therefore, the driving current of the laser light source is varied in response to the change in the modulation signal by the output signal of the signal producing means, and a wavelength chirping reverse to the wavelength chirping occurring in the optical modulator is given to the laser light that is emitted from the laser light source. Thereby, the wavelength chirping occurring in the optical modulator is canceled, and the wavelength chirping of the modulated signal light that is emitted from the optical modulator is reduced. BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a diagram illustrating a structure of an optical modulator according to a first embodiment of the present invention. Figures 2(a) ∼ 2(d) are diagrams for explaining the operation of the optical modulator according to the first embodiment of the present invention. Figure 3 is a diagram illustrating a structure of an optical modulator according to a second embodiment of the present invention. Figures 4(a) ∼ 4(d) are diagrams for explaining the operation of the optical modulator according to the second embodiment of the present invention. Figure 5 is a diagram illustrating a structure of an optical modulator according to a third embodiment of the present invention. Figures 6(a) ∼ 6(e) are diagrams for explaining the operation of the optical modulator according to the third embodiment of the present invention. Figure 7 is a diagram illustrating a structure of an optical modulator according to a fourth embodiment of the present invention. Figures 8(a) ∼ 8(d) are diagrams for explaining the operation of the optical modulator according to the fourth embodiment of the present invention. Figure 9 is a diagram illustrating a structure of an optical modulator according to a fifth embodiment of the present invention. Figures 10(a) ∼ 10(c) are diagrams for explaining the operation of a first bridge circuit of the optical modulator according to the fifth embodiment of the present invention. Figures 11(a) ∼ 11(d) are diagrams for explaining the operation of the optical modulator according to the fifth embodiment of the present invention. Figure 12 is a diagram illustrating a structure of an optical modulator according to a sixth embodiment of the present invention. Figures 13(a) ∼ 13(d) are diagrams for explaining the operation of the optical modulator according to the sixth embodiment of the present invention. Figure 14 is a diagram illustrating a structure of an optical modulator according to a seventh embodiment of the present invention. Figures 15(a) ∼ 15(e) are diagrams for explaining the operation of the optical modulator according to the seventh embodiment of the present invention. Figure 16 is a diagram illustrating a structure of an optical modulator according to an eighth embodiment of the present invention. Figure 17 is a diagram illustrating a structure of an optical modulator according to a ninth embodiment of the present invention. Figure 18 is a diagram illustrating a structure of an optical modulator according to a tenth embodiment of the present invention. Figure 19 is a diagram illustrating a structure of an optical modulator according to an eleventh embodiment of the present invention. Figure 20 is a diagram illustrating a structure of an optical modulator according to a twelfth embodiment of the present invention. Figure 21 is a diagram illustrating a structure of an optical modulator with a DFB laser according to the prior art. Figures 22(a) ∼ 22(d) are diagrams for explaining the operation of the optical modulator with a DFB laser according to the prior art. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT Embodiment 1 . Figure 1 is a diagram illustrating an optical modulator according to a first embodiment of the present invention. In the figure, reference numeral 11 designates a wavelength variable laser of a DFB structure having a resonator length of 300 ∼ 600 µm, a width of 300 µm, and a thickness of 100 µm. Reference numeral 2 designates an optical modulator provided with the wavelength variable laser 11, having a length of 100 ∼ 300 µm, a width of 300 µm, and a thickness of 100 µm. A common grounding electrode 4 is provided common to the wavelength variable LD 11 and the optical modulator 2. The wavelength variable laser 11 includes an active layer 6. An LD front side electrode 3a and an LD rear side electrode 3b are disposed on the surface of the LD at a front position and at a rear position, respectively. A front side electrode D.C. power supply 5a is provided between the ground and the front side electrode 3a. A rear side electrode D.C. power supply 5b is provided between the ground and the rear side electrode 3b via a coil 12b for blocking alternate current (hereinafter also referred as A.C.). A signal voltage source 9 is provided as a source for supplying a modulation signal. A differentiating circuit 13 is provided for differentiating the modulation signal supplied from the signal voltage source 9. A condenser 14b for blocking direct current (D.C.) is connected to the output of the differentiating circuit 13. A high reflectivity film 15 having a reflectivity of 60 ∼ 100 % is provided at the rear facet of the wavelength variable laser diode 11. In the optical modulator 2, a light absorbing layer 7 is of a multi-quantum well structure laminating twelve quantum well layers of 4 ∼ 5 nm thickness putting between barrier layers of 8 ∼ 10 nm thickness, and having a total thickness of 140 nm. A low reflectivity film 16 having reflectivity below 3% is formed at the front side output facet of the optical modulator 2. An optical modulator negative side electrode 8 is disposed at the surface of the optical modulator 2, and the signal voltage source 9 is for supplying a modulation signal to the optical modulator negative side electrode 8 and the differentiating circuit 13. Reference numeral 10 designates a modulated signal light that is obtained by modulating the light emitted from the wavelength variable laser 11 by the modulation signal voltage output from the signal voltage source 9. Figures 2(a) ∼ 2(d) are diagrams for explaining the operation of the optical modulator according to the first embodiment of the present invention, where figure 2(a) shows a change in the modulation signal voltage applied to the optical modulator 2, and figure 2(b) shows a change in the differentiated waveform current which is differentiated by the differentiating circuit 13. Figure 2(c) shows wavelength chirping occurring in the wavelength variable laser 11 when the differentiated current waveform is flown to the LD rear side electrode 3b, and figure 2(d) shows wavelength chirping included in the output of the optical modulator 2. A description is given of the operation. First of all, the wavelength variable laser 11 as a light source is a plural electrode laser of a DFB structure, and a D.C. current is flown from the LD front side electrode 3a to the common grounding electrode 4 by means of the D.C. current source 5a. In addition, a D.C. current is flown from the LD rear side electrode 3b to the common grounding electrode 4 via the A.C. blocking coil 12b by means of the D.C. current source 5b, and additionally a differentiated waveform current as shown in figure 2(b) that is obtained by differentiating the modulation signal, is flown from the signal voltage source 9 through the differentiating circuit 13 and the D.C. blocking condenser 14b, and a laser light occurs in the active layer 6 caused by these currents. More particularly, when supposed that the center wavelength of the laser light is 1.55 ∼ 1.56 µm, if the area of the LD front side electrode 3a and the area of the LD rear side electrode 3b are equal to each other, the current value of the D.C. current source 5a is several mA, and the current value of the D.C. current source 5b is 30 mA. Now suppose that "rear electrode current / front electrode current" = γ. In the optical modulator provided with this variable wavelength laser 11, a high reflectivity film 15 is coated on the facet at the side of the LD rear side electrode 3b of the wavelength variable laser 11 and a low reflectivity film 16 is coated on the output facet of the optical modulator 2. Therefore, the wavelength variable laser 11 has a nature of occurring hole burning that is stronger at the side of the high reflectivity film 15 than at the side of the low reflectivity film 16 during its oscillation, and as the injection current ratio γ decreases, that is, the rear side electrode current decreases, hole burning eminently occurs because carriers injected to the side of the high reflectivity film 15 decrease, whereby the wavelength of the laser light generated in the active layer 6 is shortened, while as the injection current ratio γ increases, that is, the rear side electrode current increases, occurrence of the hole burning is suppressed because carriers injected to the side of the high reflectivity film 15 increase, whereby the wavelength of the laser light generated in the active layer 6 is lengthened. In this way, the center wavelength of the laser light emitted from the wavelength variable laser 11 is varied. In addition, a differentiated current waveform that is obtained by differentiating the modulation signal shown in figure 2(b) is applied to the LD rear side electrode 3b in addition to the D.C. current from the D.C. current source 5b as described above, and because at the falling down of the waveform of the modulation signal voltage shown in figure 2(a), the differentiated waveform current cancels the D.C. current from the D.C. current source 5b, the injection current ratio γ decreases during when the differentiated waveform is output, while because the differentiated waveform current is added to the D.C. current from the D.C. current source 5b at the rising up of the waveform of the modulation signal voltage, the injection current ratio γ increases during when the differentiated waveform is output. Therefore, the wavelength of the laser light emitted from the wavelength variable laser 11 varies dependent on the differentiated current waveform, thereby arising a wavelength chirping as shown in figure 2(c). The laser light including the above-described wavelength chirping is incident to the light absorbing layer 7 of the optical modulator 2 and is modulated by a signal voltage applied thereto. Then, it is subjected to the original wavelength chirping accompanying the quantum confining Stark effect of the optical modulator 2 as shown in figure 22(d), and this wavelength chirping and the wavelength chirping (shown in figure 2(c)) that is obtained by applying the differentiated modulation signal to the LD rear side electrode 3b cancel with each other, whereby the wavelength chirping of the modulated signal light 10 that is emitted from the output facet of the optical modulator 2 is eminently reduced as shown in figure 2(d). Japanese Published Patent Application No. 3-295289 discloses an integrated semiconductor device and a driving method therefore in which two electrodes are formed in an integrated semiconductor device having a high reflectivity facet and a low reflectivity facet, a D.C. current and a modulation current are applied to the electrode at the side of the high reflectivity facet, and a D.C. current is applied to the electrode at the low reflectivity facet. However, this publication intends to adjust the current value that flows to the electrode at the side of the high reflectivity facet, thereby suppressing the spatial hole burning and making the distribution of carrier density uniform. Further, this publication intends to apply a modulation current to the electrode at the side of the high reflectivity facet, thereby realizing an FM response characteristics of red shift (frequency shifted to the longer wavelength side), and obtaining a high FM modulation efficiency due to the dividing the integrated semiconductor device into two. Therefore, this has no relation to the optical modulator of the first embodiment of the present invention in which a differentiated current waveform produced by differentiating the modulation signal to be applied to the optical modulator 2, is flown to the LD rear side electrode 3b of the wavelength variable laser 11 which is provided with the optical modulator 2, in addition to a driving current for the wavelength variable laser 11, whereby wavelength chirping in a reverse direction to that occurring in the optical modulator 2 that has previously occurred in the laser light emitted from the wavelength variable laser 11, thereby canceling the wavelength chirping occurring in the optical modulator 2. Japanese Patent Published Application 4-198913 discloses an electric field absorbing type semiconductor optical modulator which has a light absorbing layer having an equivalent thickness that becomes gradually thinner toward output side from input side, or a diffraction grating having a constant width and a constant period of convex, and a depth of convex that becomes gradually shallower output side from input side, or a diffraction grating having a constant width and a constant depth of convex, and a period of convex that becomes gradually shorter toward output side from input side, thereby preventing variation in refractive index or variation in absorption coefficient of an optical modulator. In this publication, it is intended to solve a problem that because the intensity of light that is absorbed in the vicinity of input side is extraordinarily larger than that in the vicinity of output side, a large amount of heat arises at the input side, thereby inviting variations in the refractive index and in the absorption coefficient of the optical modulator in a process of the light being absorbed accompanying the travel of the light along the light absorbing layer from the input side to the output side. It is also intended to lower the light absorption rate in the light absorbing layer at input side where the absolute value of transmitting light is large, and to raise the light absorption rate in the light absorbing layer at output side where the absolute value of transmitting light is small, thereby making the modulation effect uniform over the entirety of the light absorbing layer. In the electric field absorbing type semiconductor optical modulator of this publication, however, when absorption/transmission of light is performed in this optical modulator, there would arise a variation in the refractive index according to the relation of Kramers-Kroning and there would arise wavelength chirping when the refractive index thus varies. Therefore, the optical modulator of this first embodiment of the present invention can also be applied to this electric field absorbing type optical modulator, thereby resulting in reduction in the wavelength chirping in this optical modulator. As described above, in the optical modulator of this first embodiment, a D.C. current from the front side surface electrode D.C. current source 5a is flown to the LD front side electrode 3a in the wavelength variable laser 11 provided in the optical modulator 2, and a current that is obtained by adding a differentiated waveform current that is obtained by differentiating the modulation signal that is generated from the modulation signal voltage source 9 to a D.C. current from the rear surface electrode D.C. current source 5b, is flown to the LD rear side electrode 3b, so as to drive the wavelength variable laser 11. Thereby, wavelength chirping is previously given to the laser light that is generated in the active layer 6 of the wavelength variable laser 11, and it cancels the wavelength chirping occurring in the optical modulator 2, whereby the wavelength chirping of the modulated signal light 10 that is emitted from the output facet of the optical modulator 2, is reduced. While in this first embodiment the wavelength variable laser 11 is made a semiconductor laser of DFB structure, any semiconductor laser that oscillates at a single mode, for example, a DBR (distributed Bragg reflector) laser can be employed with the same effects as described above. Embodiment 2 . A second embodiment of the present invention will be described. Figure 3 shows a construction of an optical modulator according to a second embodiment of the present invention. In the figure, the same reference numerals as those in figure 1 are used to designate the same or corresponding elements. Reference numeral 12a designates a coil for blocking alternate current (AC), reference numeral 14a designates a condenser for blocking direct current (DC), and reference numeral 17a designates an inverter connected to the output terminal of the differentiating circuit 13. Figures 4(a) ∼ 4(d) are diagrams for explaining the operation of the optical modulator according to the second embodiment, and the operation will be described hereinafter. In this second embodiment, an inverter 17a is connected to the output of the differentiating circuit 13, and thereby the phase of the differentiated waveform current as an output signal of the differentiating circuit 13 shown in figure 2(b) of the above-described first embodiment is inverted by the inverter 17a. Further, a differentiated waveform current in an opposite phase to the above-described differentiated waveform current shown in figure 4(b) is output from the inverter 17a, and the differentiated waveform current inverted in its phase, that is output from the inverter 17a is added to the direct current that is output from the front side electrode D.C. current source 5a, and the sum signal is applied to the LD front side electrode 3a of the wavelength variable laser 11. Then, in this wavelength variable laser 11 the injection ratio γ varies as described in the above-described first embodiment, whereby wavelength chirping as shown in figure 4(c) occurs. Also in this second embodiment, the wavelength chirping occurring in the optical modulator 2 can be canceled similarly as in the first embodiment shown in figure 4(d), whereby the modulated signal light 10 having reduced the wavelength chirping, is emitted from the output facet of the optical modulator 2. Embodiment 3 . A third embodiment of the present invention will be described. Figure 5 is a diagram showing a construction of an optical modulator according to a third embodiment of the present invention. In the figure, the same reference numerals used in figures 1 and 3 are used to designate the same or corresponding elements. Figures 6(a) ∼ 6(e) are diagrams for explaining the operation of the optical modulator according to the third embodiment of the present invention. The optical modulator of the first embodiment only applies a differentiated waveform current to the LD rear side electrode 3b of the wavelength variable laser 11 and the optical modulator of the second embodiment only applies the differentiated waveform current inverted in its phase to the LD front side electrode 3a of the wavelength variable laser 11. On the contrary, in this third embodiment the output of the differentiating circuit 13 is divided into two, and one of them is connected to the condenser 14b similarly as in the first embodiment, and the other of them is connected to the inverter 17a similarly as in the second embodiment, whereby the differentiated waveform current shown in figure 6(b) is applied to the LD rear side electrode 3b as well as the differentiated waveform current inverted in its phase shown in figure 6(e), is applied to the LD front side electrode 3a. In the optical modulator of this third embodiment having the above-described construction, the total sum of the driving current of the wavelength variable laser 11 is made constant, and the laser light that is output from the wavelength variable laser 11 is stabled, whereby the wavelength chirping is largely reduced. Embodiment 4 . A fourth embodiment of the present invention will be described in the following. Figure 7 is a diagram showing a construction of an optical modulator according to a fourth embodiment of the present invention. In the figure, the same reference numerals used in figure 3 are used to designate the same or corresponding elements. Reference numeral 17c designates an inverter connected to the optical modulator negative side electrode 8, and this functions to invert the phase of the modulation signal. A description is given of the operation of the optical modulator of this fourth embodiment with reference to figures 8(a) ∼ 8(d). In the above-described second embodiment the inverter 17a is connected to the output of the differentiating circuit 13 and the phase inverted differentiated waveform current is applied to the LD front side electrode 3a. In this fourth embodiment the differentiated waveform current that is output from the differentiating circuit 13 is added in its positive phase via the condenser 14a to the D.C. current that is output from the front side electrode D.C. current source 5a, while the phase of the modulation signal applied to the optical modulator 2 shown in figure 8(a) is inverted by the inverter 17c to produce a signal of waveform as shown in figure 8(b), whereby the optical modulator 2 is operated by this phase inverted modulation signal and the emitted laser light of the wavelength variable laser 11 is modulated. Also in this fourth embodiment, the wavelength chirping (shown in figure 8(c)) occurs in the wavelength variable laser 11, and the wavelength chirping occurring in the optical modulator 2 is canceled by this wavelength chirping, whereby the wavelength chirping of the modulated signal light 10 emitted from the optical modulator 2 is largely reduced. Embodiment 5 . A fifth embodiment of the present invention will be described in the following. Figure 9 is a diagram showing a construction of an optical modulator according to this fifth embodiment. In figure 9, the same reference numerals as those in figure 1 are used to designate the same or corresponding elements. Reference numeral 51 designates a first bridge circuit that produces a pulse signal from the modulation signal, and this first bridge circuit 51 is connected between the connection node of the optical modulator negative side electrode 8 and the signal voltage source 9, and the condenser 14b. The first bridge circuit 51 is constituted by an inverter 17b, a delay line 18b having a required delay quantity, and a transmission line 19b that produces no delay. Figures 10(a) ∼ 10(c) are diagrams for explaining the operation of the first bridge circuit 51, and figures 11(a) ∼ 11(d) are diagrams for explaining the operation of the optical modulator according to this fifth embodiment. In the first embodiment, a differentiated waveform current is produced by differentiating a modulation signal by the differentiating circuit 13, and the differentiated waveform current is added to a direct current that is output from the rear side electrode D.C. current source 5b, to be applied to the LD rear side electrode 3b. In this fifth embodiment, the first bridge circuit 51 is employed in place of the differentiating circuit 13, the pulse signal output from the first bridge circuit 51 is added to a D.C. current that is output from the rear side electrode D.C. current source 5b, to be applied to the LD rear side electrode 3b. As shown in figure 9, the first bridge circuit 51 comprises a serial connection of the delay line 18b and the inverter 17b, and a transmission line 19b producing no delay, that is connected in parallel with the serial connection, and the input of the first bridge circuit 51 is connected to the optical modulator negative side electrode 8 and the signal voltage source 9, and the output of the first bridge circuit 51 is connected to the D.C current blocking condenser 14b. A description is given of the operation of the optical modulator according to the fifth embodiment. First of all, the modulation signal output from the signal voltage source 9 is sent to the optical modulator negative side electrode 8, and sent to the first bridge circuit 51. Then, the modulation signal that is input to the first bridge circuit 51 is sent out to the transmission line 19b and the delay line 18b, and the modulation signal sent out to the transmission line 19b is output from the transmission line 19b as a positive phase signal as shown in figure 10(a), and the modulation signal sent out to the delay line 18b is delayed by Δt by the delay line 18b as shown in figure 10(b), and is made a reverse phase signal by the inverter 17b. Furthermore, the positive phase signal and the reverse phase signal are added to with each other at the output end of the first bridge circuit 51, and a pulse signal shown in figure 10(c) and in figure 11(b) is output from the output end. Next, the above pulse signal is added passing through the condenser 14b to the D.C. current that is output from the rear side electrode D.C. current source 5b, and is applied to the LD rear side electrode 3b. The operation of the wavelength variable laser 11 to which a driving current that is obtained by a pulse signal being added to the D.C. current, is the same as the operation described in the first embodiment. In this fifth embodiment, the driving current of the wavelength variable laser 11 is changed by the pulse signal (shown in figure 11(b)), and wavelength chirping (shown in figure 11(c)) that is reverse to the wavelength chirping that occurs in the optical modulator 2 occurs in the output laser light from the wavelength variable laser 11, whereby the wavelength chirping that occurs in the optical modulator 2 can be canceled, and a modulated signal light 10 including reduced wavelength chirping is emitted from the output facet of the optical modulator 2. Embodiment 6 . A description is given of a sixth embodiment of the present invention as in the following. Figure 12 is a diagram showing a construction of an optical modulator according to a sixth embodiment of the present invention. In figure 12, the same reference numerals used in figure 3 are used to designate the same or corresponding elements. Reference numeral 52 designates a second bridge circuit that produces a pulse signal from the modulated signal. That second bridge circuit 52 is connected between the connection node of the optical modulator negative side electrode 8 and the signal voltage source 9, and the condenser 14a. This second bridge circuit 52 is constituted by the inverter 17a, the delay line 18a having a required delay quantity, and a transmission line 19a producing no delay. Figures 13(a) ∼ 13(d) are diagrams for explaining the operation of the optical modulator according to this sixth embodiment. In the above-described second embodiment, a differentiated waveform current is produced by differentiating the modulation signal by the differentiating circuit 13, the differentiated waveform current is phase-inverted by the inverter 17a, and the phase-inverted differentiated waveform current is added to the D.C. current that is output from the front side electrode D.C. current source 5a, to be applied to the LD front side electrode 3a. In this sixth embodiment, a second bridge circuit 52 that outputs a pulse signal that is in a reverse phase to a pulse signal that is output from the first bridge circuit 51 is employed, and a pulse signal that is output from the second bridge circuit 52 is added to the D.C. current that is output from the front side electrode D.C. current source 5a, to be applied to the LD front side electrode 3a. That is, as shown in figure 12, the second bridge circuit 52 comprises a serial connection of the inverter 17a and the transmission line 19a producing no delay, and a delay line 18a that is connected in parallel with the serial connection. The input of this second bridge circuit 52 is connected to the connection node of the optical modulator negative side electrode 8 and the signal voltage source 9, and the output of the second bridge circuit 52 is connected to the D.C. current blocking condenser 14a. The output signal of the second bridge circuit 52 becomes a pulse signal of a reverse phase to the pulse signal shown in figure 11(b) in the fifth embodiment, as shown in figure 13(b). Then, similarly as the differentiated waveform current which is reverse in its phase as in the second embodiment, the reverse phase pulse signal and the D.C. current from the front side electrode D.C. current source 5a are applied to the LD front side electrode 3a, whereby the wavelength chirping shown in figure 13(c) occurs in the wavelength variable laser 11. Also in this sixth embodiment, a pulse signal that is output from the second bridge circuit 52 is added to the driving current for the wavelength variable laser 11, and a wavelength chirping occurs in the laser light that is output from the wavelength variable laser 11, whereby the wavelength chirping occurring in the optical modulator 2 is canceled, and the wavelength chirping of the modulation signal light 10 that is emitted from the optical modulator 2 is reduced. Embodiment 7 . An optical modulator according to a seventh embodiment of the present invention is provided with both of the first bridge circuit 51 of the fifth embodiment and the second bridge circuit 52 of the sixth embodiment, as shown in figure 14. This optical modulator performs an operation similar to that of the third embodiment by employing the first pulse signal (a) that is output from the first bridge circuit 51, and the second pulse signal (b) that is output from the second bridge circuit 52. Also in this seventh embodiment, similarly as the optical modulator according to the third embodiment, the total sum of the driving current of the wavelength variable laser 11 is constant, and the laser light that is output from the wavelength variable laser 11 is stabled, thereby reducing the wavelength chirping. Embodiments 8 ∼ 11 . An eighth embodiment of the present invention will be described in the following. Figure 16 is a diagram showing a construction of an optical modulator according to an eighth embodiment of the present invention. In figure 16, the same reference numerals used in figure 1 in the first embodiment are used to designate the same or corresponding elements. Reference numeral 18c designates a delay line producing a required delay quantity. The optical modulator according to this eighth embodiment is constituted by providing a delay line 18c between the connection node of the signal voltage source 9 and the optical modulator negative side electrode 8, in the optical modulator according to the first embodiment. While in the above first embodiment it is constructed such that a modulation signal is converted to a differentiated waveform current and the driving current of the wavelength variable laser 11 is changed by this differentiated waveform current, because a differentiating circuit 13 or the like is provided in this path, the timing of the change of the driving current of the wavelength variable laser 11 is delayed with relative to the timing of the change of absorption/transmission of the optical modulator 2, that occur by the modulation signal which is sent to the optical modulator 2, thereby reducing the canceling effect of the wavelength chirping. The optical modulator of this eighth embodiment is intended to compensate the above-described delay by means of the delay line 18c. In the above-described eighth embodiment, the wavelength chirping occurring in the wavelength variable laser 11 and the wavelength chirping occurring in the optical modulator 2 can be canceled synchronized with each other, and the wavelength chirping of the modulated signal light 10 that is emitted from the output facet of the optical modulator 2 can be effectively reduced. The ninth embodiment shown in figure 17 is constituted by the optical modulator of the second embodiment provided with the delay line 18c, the tenth embodiment shown in figure 18 is constituted by the optical modulator of the fourth embodiment provided with the delay line 18c, and the eleventh embodiment shown in figure 19 is constituted by the optical modulator of the third embodiment provided with the delay line 18c. In any optical modulator, the wavelength chirping that occurs in the variable wavelength laser 11 and the wavelength chirping occurring in the optical modulator 2 are canceled with occurring synchronized with each other, whereby the wavelength chirping of the optical signal light 10 that is emitted from the output facet of the optical modulator 2 can be effectively reduced. Embodiment 12 . While the above-described eighth to eleventh embodiments are constituted to compensate the delay time due to the differentiating circuit 13 that is provided in the optical modulator, the optical modulator according to the fifth embodiment may be provided with the delay line 18c as shown in figure 20. Also in this twelfth embodiment, the wavelength chirping that occurs in the wavelength variable laser 11 and the wavelength chirping occurring in the optical modulator 2 can be canceled with occurring synchronized with each other, whereby the modulation signal light 10 that is emitted from the output facet of the optical modulator 2 can be effectively reduced. Heretofore, by any combination of the above-described first to twelfth embodiments, it is, of course, possible to reduce the wavelength chirping. As is evident from the foregoing description, according to the present invention, in an optical modulator provided with a laser light source emitting a laser light to be modulated by an optical modulator, the laser light source is made a wavelength variable laser that emits a laser light which wavelength is variable, and there are provided modulation signal means for applying a modulation signal to the optical modulator, signal producing means for producing and outputting a signal in response to the change in the voltage of the modulation signal, driving current generating means for generating a driving current to be applied to the laser light source, and signal synthesizing means for synthesizing the output signal of the signal producing means and the driving current, and applying the synthesized output to the laser light source. Therefore, wavelength chirping reverse to the wavelength chirping occurring in the optical modulator occurs in the wavelength variable laser and in the laser light, that is emitted from the laser light source by the output signal of the signal producing means due to that the driving current of the laser light source varies in response to the change in the modulation signal. Thereby, the wavelength chirping arising in the optical modulator is canceled, the wavelength chirping of the modulation signal light that is emitted from the optical modulator is reduced, and a high speed long distance transmission is obtained.

Claims: Optical modulator, comprising: [a] a wavelength variable laser part (11) for emitting a laser light the wavelength of which is variable; [b] an optical modulator part (2) for modulating the laser light emitted by said laser part (11); [c] a modulation signal means (9) for applying a modulation signal to said optical modulator part (2) and to [d] a signal generating means (13; 51; 52), said signal generating means generating and outputting a signal in response to a change in the voltage of said modulation signal; [e] a driving means (5a, 5b) for generating a D.C. driving current to be applied to said laser part (11); and [f] a synthesizing means (14a; 14b) for synthesizing the output signal of said signal generating means (13;51;52) and said D.C. driving current and for applying the resulting synthesized output signal to said laser part (11); characterized in that [d1] said signal generating means (13;51;52) includes a differentiating circuit (13) which is differentiating said modulation signal inputted to said signal generating means in order to produce and output to said laser part (11) a differentiated current waveform thereby producing a wavelength chirping which compensates the wavelength chirping imposed to the laser light by the modulator part (2). Optical modulator according to the preamble of claim 1, characterized in that [d1] said signal generating means (51, 52) includes a bridge circuit including a transmission line (19a, 19b) producing no delay, a delay line (18a, 18b) having a required delay quantity, and an inverter (17b), serving to add a signal that is obtained by delaying said modulation signal applied to said optical modulator part (2) and a modulation signal including no delay, in reverse phase to each other, thereby producing and outputting a pulse signal having the width of the delay time difference. Optical modulator according to claim 1 or 2, characterized in that said optical modulator part (2) is a semiconductor optical modulator part integrated with said laser part (11), said integrated structure comprising: a common grounding electrode (4) at its rear surface at least two electrodes (3a,3b) which are disposed on the upper surface of said laser part (11) in the resonator length direction, a modulator electrode (8) disposed on the upper surface of said optical modulator part (2), a high reflectivity film (15) which is coated over the rear end facet of said laser part (11), and a low reflectivity film (10) which is coated over the output facet of said optical modulator part (2). Optical modulator according to claim 3, characterized in that said at least two electrodes (3a, 3b) are a laser diode front side electrode (3a) and a laser diode rear side electrode (3b) said front side electrode (3a) being disposed between said modulator electrode (8) and said rear side electrode (3b); said modulation signal means (9) is applying a modulation signal between said modulator electrode (8) and said common grounding electrode (4); said driving means (5a, 5b) includes a front side electrode D.C. current source (5a) and a rear side electrode D.C. current source (5b) respectively outputting prescribed D.C. currents; and said synthesizing means (14a; 14b) serves to synthesize the differentiated current waveform that has passed through a D.C. blocking condenser (14b) and the driving current that has passed through an A.C. blocking coil (12b). Optical modulator according to claim 1 and 4, characterized in that said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a); said differentiating circuit (13) is connected to said laser diode rear side electrode (3b) via said D.C. blocking condenser (14b); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b) via said A.C. blocking coil (12b); and a current that is obtained by adding said differentiated waveform current to a D.C. current from said rear side electrode D.C. current source (5b) is applied to said laser diode rear side electrode (3b). Optical modulator according to claim 1 and 4, characterized in that said signal generating means includes an inverter (17a) at the output end of said differentiating circuit (13) which outputs a differentiated current waveform that is obtained by inverting the phase of said differentiated current waveform. Optical modulator according to claim 6, characterized in that said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a) via said A.C. blocking coil (12a); said inverter (17a) is connected to said laser diode front side electrode (3a) via said D.C. blocking condenser (14a); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b); and a current that is obtained by adding said phase-inverted differentiated current waveform to a D.C. current from said front side electrode D.C. current source (5a) is applied to said laser diode front side electrode (3a). Optical modulator according to claim 6, characterized in that said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a) via said A.C. blocking coil (12a); said inverter (17a) is connected to said laser diode front side electrode (3a) via said D.C. blocking condenser (14a); said differentiating circuit (13) is connected to said laser diode rear side electrode (3b) via another D.C. blocking condenser (14b); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b) via another A.C. blocking coil (12b); a current that is obtained by adding said phase-inverted differentiated waveform current to a D.C. current from said front side electrode D.C. current source (5a) is applied to said laser diode front side electrode (3a); and a current that is obtained by adding said differentiated current waveform to a D.C. current from said rear side electrode D.C. current source (5b) is applied to said laser diode rear side electrode (3b). Optical modulator according to claim 1 and 4, characterized in that said modulation signal means (9) includes an inverter (17c) for inverting the phase of said modulation signal; said differentiating circuit (13) is connected to said laser diode front side electrode (13a) via said D.C. blocking condenser (14a); said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (13a) via said A.C. blocking coil (12a); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b); and said phase inverted modulation signal is applied to said modulator electrode (8); and a current that is obtained by adding said phase differentiated current waveform to a D.C. current from said front side electrode D.C. current source (5a) is applied to said laser diode front side electrode (3a). Optical modulator according to claim 2 and 4, characterized in that said bridge circuit (51, 52) comprises a first bridge circuit (51) that is obtained by connecting said delay line (18b) and said inverter (17b) in series to each other and connecting said transmission line (19b) in parallel with this serial connection; said front said electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a); said first bridge circuit (51) is connected to said laser diode rear side electrode (3b) via said D.C. blocking condenser (14b); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b) via said A.C. blocking coil (12b); and a signal that is obtained by adding a pulse signal that is output from said first bridge circuit (51) to a D.C. current from said rear side electrode D.C. current source (5b) is applied to said laser diode rear side electrode (3b). Optical modulator according to claim 2 and 4, characterized in that said bridge circuit (51, 52) comprises a second bridge circuit (52) that is obtained by connecting said inverter (17a) and said transmission line (19a) in series to each other, and connecting said delay line (18a) in parallel with this serial connection; said second bridge circuit (52) is connected to said laser diode front side electrode (3a) via said D.C. blocking condenser (14a); said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a) via said A.C. blocking coil (12a); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b); and a signal that is obtained by adding a pulse signal that is output from said second bridge circuit (52) to a D.C. current from said front side electrode D.C. current source (5a) is applied to said laser diode front side electrode (3a). Optical modulator according to claim 2 and 4, characterized in that said bridge circuit (51,52) comprises: a first bridge circuit (51) producing and outputting a first pulse signal, which circuit (51) is obtained by connecting a delay line (18b) and an inverter (17b) in series to each other and by connecting a transmission line (19b) in parallel with this serial connection; and a second bridge circuit (52) producing and outputting a second pulse signal, which circuit (52) is obtained by connecting an inverter (17a) and a transmission line (19a) in series to each other and by connecting a delay line (18a) in parallel with said serial connection; said second bridge circuit (52) is connected to said laser diode front side electrode (3a) via a D.C. current blocking condenser (14a); said front side electrode D.C. current source (5a) is connected to said laser diode front side electrode (3a) via an A.C. blocking coil (12a); said first bridge circuit (51) is connected to said laser diode rear side electrode (3b) via another D.C. blocking condenser (14b); said rear side electrode D.C. current source (5b) is connected to said laser diode rear side electrode (3b) via another A.C. blocking coil (12b); a current that is obtained by adding said second pulse signal to a D.C. current from said front side electrode D.C. current source (5a) is applied to said laser diode front side electrode (3a); and a current that is obtained by adding said first pulse signal to a D.C. current from said rear side electrode D.C. current source (5b) is applied to said laser diode rear side electrode (3b). Optical modulator according to one of claims 3 through 12, characterized in that said modulation signal means (9) is provided with a delay line (18c) having a required delay quantity and being connected to said modulator electrode (8) so that said modulation signal is delayed by said delay line (18c).

Inventors: AOYAGI TOSHITAKA, ISSHIKI KUNIHIKO, MIYAZAKI YASUNORI, WATANABE HITOSHI, AOYAGI, TOSHITAKA, ISSHIKI, KUNIHIKO, MIYAZAKI, YASUNORI, WATANABE, HITOSHI, AOYAGI, TOSHITAKA, C/O MITSUBISHI DENKI K.K., ISSHIKI, KUNIHIKO, C/O MITSUBISHI DENKI K.K., MIYAZAKI, YASUNORI, MITSUBISHI DENKI K.K., WATANABE, HITOSHI, C/O MITSUBISHI DENKI K.K.
Applicants: MITSUBISHI ELECTRIC CORP, MITSUBISHI DENKI KABUSHIKI KAISHA
Application year: 1994
Main classification: H01S3
IPC codes: H04B10, H01S5