Method for producing refractory metal gate electrode

Abstract: A method for producing a refractory metal gate electrode includes forming a patterning mask layer that is dissolved by a solution including hydrogen ion and having a predetermined aperture on a semiconductor substrate, forming a gate metal layer having an ionization inclination larger than hydrogen on the entire surface on the patterning mask layer, forming a low resistance metal layer of a predetermined configuration having an ionization inclination smaller than hydrogen on the gate metal layer, covering at least an upper surface of the low resistance metal layer by a film which occurs no reductive reaction with the solution including hydrogen ion before or after patterning the gate metal layer, and removing the patterning mask layer using a solution including the hydrogen ion after patterning the gate metal layer. Therefore, a battery reaction of a system comprising the gate metal layer, the low resistance metal layer, and the solution including hydrogen ion can be suppressed by a film covering at least an upper surface of the low resistance metal layer, and localized abnormal melting at the gate metal layer occurring when removing the patterning mask layer using the solution including the hydrogen ion, can be suppressed.

Description: The present invention relates to a method for producing a refractory metal gate electrode and, more particularly, to a method for producing a high reliability gate electrode of a high output FET employing compound semiconductor. Figure 7(a)-(b) show cross-sectional structures of a GaAs MESFET having a T-shaped refractory metal gate electrode of Au/TiN/WSi laminated layer structure produced by a conventional process flow. In the figure, reference numeral 1 designates a semi-insulating GaAs substrate on which an n type GaAs active layer 2 having a gate recess 5 of a predetermined depth is formed. In the gate recess 5 a Schottky junction type refractory metal gate 100 having a T-shaped cross section is disposed, and a source electrode 3 and a drain electrode 4 are disposed on the n type GaAs active layer 2 at the both sides of the gate recess 5. The refractory metal gate 100 is of a laminating layer structure comprising a WSi film 8 100 nm (1000 Å) thick as a lower layer including a stem part 8' of a T-shaped configuration, a TiN film 9 as a gilding feeding layer, and an Au gilding layer 11 400 nm (4000 Å) thick. The WSi film 8 and the Au gilding layer 11 respectively serve as a Schottky metal layer and a low resistance metal layer forming the Schottky junction type gate 100. The process flow for fabricating the refractory metal gate electrode 100 will be described with reference to figure 6. First of all, a gate recess 5 of a predetermined thickness is formed at a position between the source electrode 3 and the drain electrode 4 on the n type GaAs active layer 2 (figure 6(a)), and a spacer film comprising SiO 6 about 500 nm (5000 Å) thick is formed on the entire surface (figure 6(b)). A photoresist (not shown) having an opening of a width of about 0.4 µm corresponding to a gate length is formed on the SiO spacer film 6, and a gate contact hole 7 of a depth reaching the surface of the n type GaAs active layer 2 is formed at a predetermined position of the SiO spacer film 6 corresponding to the center of the gate recess 5 by RIE (Reactive Ion Etching) employing a gas including fluorine (figure 6(c)), and, a WSi film 8 and a TiN film 9 are successively grown on the entire surface of the SiO spacer film 6 having the gate contact hole 7 by sputtering (figure 6(d)). A resist pattern 10 having an opening 10a of a predetermined size is formed, and an Au gilding layer 11 is formed through the opening 10a by performing an Au electrolytic gilding employing the TiN film 9 as a gilding feeding layer (figure 6(e)). Subsequently, the resist pattern 10 is removed by organic solvent, and the TiN layer 9 and the WSi layer 8 are removed by patterning to remain in a gate finger configuration by performing a dry etching employing the Au gilding layer 11 as a mask (figure 6(f)). Finally, the SiO spacer film 6 is removed employing the HF series etching solution (figure 6(g)), thereby forming the Au/TiN/WSi gate electrode 100 of a T-shaped configuration. The step of removing the SiO spacer film 6 by HF solution is indispensable to reduce the gate parasitic capacitance occurring between the head portion of a T-shaped configuration and the surface of the n type GaAs active layer 2. The reduction in the gate parasitic capacitance is required for enhancing the high frequency characteristics. In the prior art production method of the refractory metal gate electrode described above, the T-shaped Au/TiN/WSi gate electrode 100 is quite thermally stable at the junction between the WSi film 8 and the n type GaAs active layer 2, and therefore it has a high reliability. In addition, the refractory metal gate electrode has a T-shaped configuration so as to have a short gate length of about 0.3 µm and has the Au gilding layer 11 at its upper part to have a greatly reduced gate resistance and, it can realize a superior high frequency characteristics even with a short gate length. In this prior art production method of a refractory metal gate electrode, however, when forming the WSi film 8 by sputtering, silicon is segregated at the side wall 7a of the gate contact hole 7 having a narrow concave part of a width of below 1 µm and a depth of above 0.1 µm, silicon composition ratio abnormally increases as compared with the flat part and, therefore when removing the SiO spacer film 6 employing HF series etching solution, the WSi film 8 formed at the side wall part 7a corresponding to the stem part 8' of the T-shaped gate electrode 100 is easily dissolved in the HF series etching solution. Furthermore, at the interface between the WSi film 8 and the HF series etching solution, the oxidation reaction represented by the following formula occurs. W + 3H 2 O → WO 3 + 6H + + 6e - Due to this oxidation reaction, electrons are released by tungsten and silicon is disolved into the HF series etching solution from the WSi film 8. Those electrons are supplied to the reduction reaction occurring at the interface between the Au gilding layer 11 and the HF series etching solution through the TiN film 9 and the Au gilding layer 11 from the WSi film 8, the reduction reaction being represented by the following formula occurs. H + + e - → 1 / 2 • H 2 Thereby, the WSi film 8 and the Au gilding layer 11 respectively serve as electrodes, and the above described system comprising HF solution|WSi|Au|HF solution serves as a battery. This battery reaction accelerates the dissolving of the WSi film 8 formed at the above-described side wall 7a into the HF series etching solution. When the WSi film 8 and the Au film 11 are separately formed on the insulating film, these are soaked in HF solution, and the electro-motive force arising between those is measured, an electro-motive force of about 0.33 V is generated, which is approximately equal to the reduction voltage difference of tungsten, presenting that a battery reaction is generated by the WSi Au system and the HF solution. The refractory metal gate electrode 100 which arises the above described battery reaction and segregation of silicon in its production process, unfavorably forms locally melted portions 12 and 13 at the stem part 8'. In observing the refractory metal gate electrode 100 in cross section by FIB (focused ion beam), it is found that a lacked portion 12a due to localized dissolution, or an abnormally etched portion 13a of the WSi film 8 are produced as shown in figure 7(b). Such abnormal disolution of WSi film 8 causes reattaching of the dissolved tungsten to the surface of the recess 5, and departing of the WSi film 8 of the remaining head portion of a T-shaped configuration to the surface of wafer, thereby arising various problems such as deterioration of the device operation characteristics or reduction in the reliability. Furthermore, the tungstic acid which is produced by tungsten being melted out into the HF series etching solution will cause, if it includes ammonium ion or alkaline metal ion in its solution, precipitation as tungstate such as (NH 4 ) 2WO 4 , or Na 2 WO 4 in the vicinity of the gate electrode 100 after water washing and drying, thereby resulting in characteristic deterioration and reduction in the reliability due to metal contaminations. It is an object of the present invention to provide a method for producing a refractory metal gate electrode that can suppress abnormal dissolution of the stem part of T-shaped WSi series refractory metal gate electrode due to HF series etching solution at the removal of the SiO spacer film in the production process of the gate electrode for forming the gate electrode into a T-shaped configuration employing a gate contact hole provided at the SiO spacer film. It is another object of the present invention to enhance the stabilization in configuration of the gate electrode, and further to enhance the device characteristics, the reliability, and the production yield. This object is solved by the subject matter of claim 1. Further advantageous modifications of the present inventions are subject matter of the dependent claims. According to the subject matter of claim 1 a battery reaction of a system comprising the gate metal layer, the low resistance metal layer, and the solution including hydrogen ion can be suppressed by a film covering at least an upper surface of the low resistance metal layer, and the localized abnormal melting at the gate metal layer occurring when removing the patterning mask layer using the solution including the hydrogen ion can be suppressed. The resistance to the HF series etching solution is improved by the WSiN film, and a battery reaction of a system comprising HF solution|WSiN|Au|HF solution can be suppressed by a film covering an exposed surface of the Au film, whereby the silicon oxide film is etched to be removed by the HF series etching solution. Further, localized abnormal melting at a stem part of a refractory metal gate electrode is suppressed, and stabilization of the electrode configuration and, improvements in device characteristics, in reliability, and in yield are realized. Moreover the resistance to the HF series etching solution is improved by the WSiN film, and a contact region of the Au film and the HF series etching solution on the cap layer formed on the Au film is reduced so that a battery reaction of a system comprising HF solution|WSiN|Au|HF solution is suppressed and the silicon oxide film is etched to be removed by the HF series etching solution. Thereby, a localized abnormal melting at a stem part of a refractory gate electrode is suppressed, and stabilization of the electrode configuration, and improvements in device characteristics, in reliability, and in yield can be realized. According to the subject matter of claim 13 it is easily possible to carry out water washing that is performed after the process of gate electrode formation because there occurs no metal contamination due to that reaction products of W being melted at the etching removal is deposited or precipitated in the vicinity of the refractory gate electrode. Thereby, a method for producing a refractory metal gate electrode that can prevent the deterioration in the device characteristics and enhance the reliability is obtained. Figures 1(a)-1(i) are diagrams illustrating process steps for fabricating a refractory metal gate electrode according to a first embodiment of the present invention. Figure 2 is a cross sectional view illustrating a structure of a GaAs MESFET provided with a refractory metal gate electrode fabricated by the process steps according to the first embodiment. Figures 3(a)-3(i) are diagrams illustrating process steps for fabricating a refractory metal gate electrode according to a second embodiment of the present invention. Figure 4 is a cross sectional view illustrating a structure of a GaAs MESFET provided with a refractory metal gate electrode fabricated by the process steps according to the second embodiment. Figures 5(a)-5(i) are diagrams illustrating process steps for fabricating a refractory metal gate electrode according to a third embodiment of the present invention. Figures 6(a)-6(g) are diagrams illustrating process steps for fabricating a refractory metal gate electrode according to the prior art. Figure 7(a) is a cross sectional view illustrating a structure of a GaAs MESFET provided with a refractory metal gate electrode fabricated according to the prior art process flow and, figure 7(b) is a diagram illustrating abnormal melting phenomenon of the stem part of the refractory metal gate electrode. Figures 1(a)-1(i) are diagrams illustrating process steps of a method for producing a refractory metal gate electrode according to a first embodiment of the present invention and, figure 2 illustrates a cross sectional structure of the GaAs MESFET having a T-shaped refractory metal gate electrode thus fabricated. In the figures, reference numeral 100a designates a T-shaped refractory metal gate electrode disposed in the gate recess 5, and this has an Au/TiN/WSiN laminating layer structure. In this GaAs MESFET, the lower layer Schottky metal including a stem part 8a' of a T-shaped configuration of the gate electrode 100a comprises WSiN film 8a about 100nm (1000 Å) thick, and the other construction is the same as that produced by the prior art method. A description is given of the process flow for fabricating the refractory metal gate electrode. First of all, a gate recess 5 of a predetermined depth is formed at a position between the source electrode 3 and the drain electrode 4 on the n type GaAs active layer 2 (figure 1(a)), and an SiO spacer film 6 about 500 nm (5000 Å) thick (a patterning mask for forming a T-shaped configuration) is formed on the entire surface (figure 1(b)). Subsequently, a photoresist having an opening of about 0.4 µm width corresponding to the gate length is coated over the SiO spacer film 6, and by performing an RIE using gas including a fluorine, a gate contact hole 7 reaching the surface of the n type GaAs active layer 2 is formed at a predetermined position of the SiO spacer film 6 (figure 1(c)). Then, on the entire surface on the SiO spacer film 6 having the gate contact hole 7, a WSiN film 8a is formed by reactive sputtering employing plasma including N 2 gas and WSi as target and, subsequently a TiN film 9 serving as a metal intermediate layer is sputtered (figure 1(d)). Although the segregation of silicon in the WSiN film 8a at the side wall 7a of the gate contact hole 7 is not suppressed, the inter-molecule bonding force is strengthened by Si-N, or W-N bonds. Therefore, although in the prior art shown in figure 6 the WSi film 8 from which silicon is segregated as a mono-layer film would be even dissolved into the HF series etching solution, the WSiN film 8a in this embodiment would not be dissolved into the HF series etching solution even at the side wall 7a of the fine concave pattern of such as the gate contact hole 7 from which silicon is segregated. Subsequently, a resist pattern 10 having an opening 10a of a predetermined size is formed, and an Au gilding layer 11 is formed by electrolytic gilding employing the TiN film 9 as a gilding feeding layer through the opening 10a (figure 1(e)). The resist pattern 10 is removed by organic solvent, and thereafter the TiN layer 9 and the WSiN film 8a are removed by patterning employing a dry etching method using the Au gilding layer 11 as a mask (figure 1(f)), and the exposed portion of the Au 11/TiN 9/WSiN 8a laminating layer film patterned into a gate finger configuration is coated with photoresist 20 (figure 1(g)), and a reduction reaction occurring at the interface between the Au gilding layer 11 and the HF series etching solution is prevented. Thereafter, the SiO spacer film 6 is etched and removed by using the HF series etching solution (figure 1(h)). Thereafter, the photoresist cover 20 is removed by organic solvent (figure 1 (i)), and the Au/TiN/WSiN gate electrode 100a of a T-shaped configuration is formed. In the production method of the refractory metal electrode according to this first embodiment, since the WSiN film 8a is adopted as material of the refractory metal gate, the etching resistance to the HF series etching solution can be enhanced. Furthermore, because before removing the SiO spacer film 6 for forming the refractory metal gate electrode 100a to form a T-shaped configuration by using HF series etching solution, the exposed surface of the Au gilding layer 11 is covered by such as photoresist 20 so as to make the Au gilding layer 11 not in direct contact with a HF series etching solution at the etching processing, a battery system is not formed, and the abnormal melting phenomenon at the stem part 8a' of a T-shaped refractory gate electrode 100a is prevented. While in the above described first embodiment a TiN film serving as a metal intermediate layer 9 is formed between the Au gilding layer 11 and the WSiN film 8a, this metal intermediate layer may be formed by, for example, an Au film or a Ti film as the most appropriate material film in view of the production condition. Further, although photoresist 20 is used to cover the exposed surface of the Au gilding layer 11, any material film that would be dissolved in organic solvent and would not arise a reduction reaction at the contact surface with HF series etching solution may be employed with the same effects as described above. A second embodiment of the present invention will be described with reference to the drawings. Figure 3 is a diagram illustrating a process flow for producing a refractory metal gate electrode according to a second embodiment of the present invention. Figure 4 is a cross sectional view illustrating a GaAs MESFET provided with a T-shaped refractory metal gate electrode produced by the process flow of this second embodiment. In figure 4, the same reference numerals as those in figure 2 are used to designate the same or corresponding portions. Reference numeral 21 designates a WSiN cap layer formed on an upper surface of the Au gilding layer 11. Reference numeral 100b designates a T-shaped refractory metal gate electrode having a laminating layer structure comprising a WSiN film 8a, a TiN film 9, an Au gilding layer 11. The process flow for forming the refractory metal gate electrode 100b according to this second embodiment is the same up to the step shown in figure 3(d) for forming by sputtering the WSiN film 8a and the TiN film 9 as the step shown in figure 1(d) in the first embodiment. So the process flow after the step shown in figure 3(e) will be described. First of all, in figure 3(e), a resist pattern 10 having an opening 10a of a predetermined size is formed, an Au plated layer 11 is formed by electrolytic plating employing the TiN film 9 as a feeding plated layer, and thereafter the WSiN cap layer 21 is formed by sputtering to a required thickness. Because the WSiN cap layer 21 is also etched in the subsequent step of figure 3(f), the thickness of the WSiN cap layer 21 when formed is required to be set so that a film thickness above 10 nm remains even after the dry etching. After removing-the plating resist pattern 10 by organic solvent, the TiN film 9 and the WSiN film 8a are removed by patterning by dry etching employing the WSiN cap layer 21 and the Au plated layer 11 as a mask (figure 3(f)). Thereafter, the SiO spacer film 6 is etched and removed by HF series etchant solution (figure 3(g)), thereby producing a WSiN/Au/TiN/WSiN gate electrode 100b of a T-shaped configuration. Conventionally, there is a MOS type FET having a gate comprising a refractory metal and refractory metal silicide layers sandwiching the refractory metal disposed at its upper surface and rear surface, as disclosed in Japanese Published Patent Application No. sho. 61-134072. The technique disclosed in this publication, however, aims obtaining a gate structure having a reduced gate resistance and superior in thermal resistance, chemical resistance, resistance to oxidation, and high frequency characteristics due to the gate covered by a refractory metal silicide layer. Therefore, this is different from the second embodiment employing the refractory metal gate electrode 100b in which in the production process of T-shaped WSi series refractory metal gate electrode having an Au plated layer 11 at its upper part and superior in the high frequency characteristics, reduction reaction at an interface between the Au plated layer 11 and the HF series etchant solution of a battery system comprising HF solution|WSiN|Au|HF solution and abnormal melting phenomenon of the stem part 8a' of the gate electrode due to this battery reaction are suppressed by the WSiN cap layer 21 formed on the upper surface of the Au plated layer 11. Japanese Published Patent Application No. Hei. 5-102524 discloses a semiconductor element in which an electrode provided on its semiconductor layer is covered by a material layer which is not eroded by an etching solution. However, the technique disclosed in this publication also aims at preventing the electrode from being eroded by the etching solution during performing such as wet etching for removing the distortion at the dicing plain after the dicing, and thus preventing the peeling off of the electrode, and this covers the electrode by material layer which would not be eroded by the etching solution. Therefore, this technique is different from the second embodiment employing the refractory metal gate electrode 100b in which reduction reaction at the interface between the Au plated layer 11 and the HF series etching solution and abnormal melting phenomenon of the stem part 8a' of the gate electrode due to battery reaction are suppressed by forming the WSiN cap layer 21 on the upper surface of the Au plated layer 11. In the formation of a refractory metal gate electrode 100b of this second embodiment, since WSiN is employed for the material for forming the refractory metal gate, the etching resistance against the HF series etching solution is improved, the WSiN cap layer 21 of a required film thickness is formed on the upper surface of the Au gilding layer 11, the WSiN cap layer 21 is remained to a predetermined thickness after the dry etching of the TiN film 9 and the WSiN film 8a, and the SiO spacer film 6 is removed by the HF series etching solution. Therefore, although the side wall part 11a of the Au gilding layer 11 is in contact with the HF series etching solution at the etching of the SiO spacer film 6 (figure 3(g)), the contact area is limited to a great extent by forming the WSiN cap film 21, and standing of a battery system comprising HF solution|WSiN|Au|HF solution is suppressed. Furthermore, abnormal melting of the WSiN film 8a of the stem part 8a' in a T-shaped configuration gate electrode 100b is reduced. In addition, since the cap layer 21 employing refractory metal WSiN is used in this second embodiment, the WSiN cap layer 21 can be used as a barrier layer in the later process, whereby the mixing of the Au plated layer 11 and the wiring metal laminated thereon is prevented. While in the above described second embodiment a cap layer 21 comprising WSiN is provided to reduce the contact area between the Au plated layer 11 and HF series etching solution, it is not limited to WSiN, but refractory metal such as WSi, W, and MO may be employed with the same effects. Furthermore, a conductive metal that does not thermally react with Au and does not produce a reductive electrode reaction at the contact surface with the HF series etching solution, may be employed to suppress the above described abnormally melting phenomenon. Figure 5 is a diagram illustrating a process flow for forming a refractory metal gate electrode according to a third embodiment of the present invention. In figure 5, the same reference numerals as those in figure 1 are used to designate the same or corresponding portions. Reference numeral 11' designates an Au layer directly formed on the WSiN film 8a. Although in the first embodiment a TiN film (metal intermediate layer) 9 is formed on the WSiN film 8a, an Au gilding plated layer 11 is formed by plating using the TiN film 9 as a feeding layer, in this third embodiment, after the WSiN film 8a is sputtered, the Au layer 11' is sputtered so as to have a predetermined configuration employing the mask 10' as shown in figure 5. In addition, the Au layer 11' may be formed by vacuum evaporation in place of the sputtering method. Then similarly as in the process flow of the second embodiment, an Au layer 11' by a sputtering or a vacuum evaporation may be formed in place of the Au plated layer 11. Even by the method for forming the refractory metal gate electrode as described above, the same effects as those by the first and the second embodiments are obtained. Embodiment 4. A fourth embodiment of the present invention employs a pure HF water solution including no ammonium ion or alkaline metal ion in place of the HF series etching solution at the etching removal of the SiO spacer film 6 performed in the step shown in figure 1(h) in the first embodiment or in the step shown in figure 3(g) in the second embodiment. In this method of forming a refractory metal gate electrode of this fourth embodiment, in addition to an effect of suppressing abnormal melting phenomenon, it is easily possible to carry out a work of water washing that is performed after the process of gate electrode formation because there occurs no metal contamination in the vicinity of the gate electrode due to that reaction products of W melted out from the WSiN film 8a at the etching removal are deposited or precipitated in the gate recess 5. Accordingly, an increase in the leakage component and reduction in the gate breakdown voltage due to the metal contamination are suppressed, and deterioration in the device characteristics is prevented and reliability of the device is enhanced.

Claims: Method for producing a Schottky junction type refractory metal gate electrode having a predetermined configuration, comprising the following steps: [a] forming a patterning mask layer (6) that is soluble in a HF-series etching solution and has an aperture (7) of a predetermined size, on a semiconductor substrate (1, 2); [b] forming a gate refractory metal layer (8a) on the entire surface of said patterning mask layer (6) and in said aperture (7),said gate retractory metal layer (8a) not contributing to a reduction reaction at a contact surface of said HF-series etching solution; [c] forming a low resistivity metal layer (11, 11') in a predetermined pattern on or over said gate metal layer (8a), a tendency of said low resistivity metal layer (11, 11') to be ionized being smaller than that of hydrogen; [d] before or after patterning said gate metal layer (8a) into the configuration of said predtermined pattern, covering at least the upper surface of said predetermined pattern of low resistivity metal layer (11, 11') by a film (20; 21) which does not contribute to a reduction reaction at a contact surface said HF-series etching solution; and [e] after patterning said gate metal layer (8a), removing said patterning mask layer (6) employing said HF-series etching solution, the low resistivity metal layer (11, 11') being protected from said HF-series etching solution by said film (20, 21). Method according to claim 1, characterized in that : step [a] is performed by coating a semiconductor surface with a silicon oxide film(6) and forming said aperture (7) having a predetermined size at a predetermined position; step [b] is performed by forming a refractory metal film (8a) comprising WSiN on said silicon oxide film (6) and said aperture (7); step [c] is performed by forming an Au film (11) in said predetermined pattern on a metal intermediate layer (9) disposed on said refractory metal film (8a) comprising WSiNand, thereafter, processing said metal intermediate layer (9) and said refractory metal film (8a) comprising WSiN in a configuration corresponding to said predetermined pattern of said Au film (11); step [d] is performed by covering at least the upper surface of said predetermined pattern of said Au film (11) by said film (20; 21) of a material which does not contribute to a reduction reaction at a contact surface of said HF series etching solution; and step [e] is performed by etching and removing said silicon oxide film (6) by said HF series etching solution and followed by removing said film (20; 21) of a material which does not contribute to a reduction reaction at a contact surface of said HF series etching solution, by dissolving it into an organic solvent. Method according to claim 1, characterized in that : step [a] is performed by coating a semiconductor surface with a silicon oxide film (6) and forming said aperture (7) having a predetermined size at a predetermined position; step [b] is performed by forming a refractory metal film (8a) comprising WSiN on said silicon oxide film (6) and said aperture (7); step [c] is performed by forming an Au film (11') into said predetermined pattern directly on said refractory metal film (8a) comprising WSiN by means of dissolving, by an organic solvent, an exposed surface of said Au film (11') which does not correspond to said predetermined pattern of said Au film (11') and, thereafter, processing said refractory metal film (8a) comprising WSiN into a configuration corresponding to said predetermined pattern of said Au film (11'); step [d] is performed by covering at least the upper surface of said predetermined pattern of said Au film (11') by said film (20; 21) of a material which does not contribute to a reduction reaction at a contact surface of said HF series etching solution; and step [e] is performed by etching and removing said silicon oxide film (6) by said HF series etching solution and followed by removing said film (20; 21) of a material which does not contribute to a reduction reaction at a contact surface of said HF series etching solution by dissolving it into an organic solvent. Method according to claim 2 or 3, characterized in that a photoresist is employed as said film (20) of a material which does not contribute to a reduction reaction at the contact surface of said HF series etching solution, and which is dissolved into said organic solvent. Method according to claim 2, characterized in that : after step [c] there is performed a step of covering the upper surface of said predetermined pattern of said Au film (11) with a cap layer (21) of a required thickness employing a conductive metal which does not thermally react with Au and which does not contribute to a reduction reaction at the contact surface of said HF series etching solution; and step [e] is performed after patterning said metal intermediate layer (9) and said refractory metal film (8a) comprising WSiN into said configuration of said predetermined pattern by employing said cap layer (21) and said predetermined pattern of said Au film (11) as a mask. Method according to claim 3, characterized in that : after step [c] there is performed the step of covering the upper surface of said predetermined pattern of said Au film (11') with a cap layer (21) of a required thickness employing a conductive metal which does not thermally react with Au and which does not contribute to a reduction reaction at the contact surface of said HF series etching solution; and step [e] is performed after patterning said refractory metal film (8a) comprising WSiN into said configuration of said predetermined pattern by employing said cap layer (21) and said predetermined pattern of said Au film (11) as a mask. Method according to claim 5 or 6, characterized in that said cap layer (21) is a refractory metal cap layer formed by employing a refractory metal of tungsten series or molybdenum series as a material. Method according to claim 7, characterized in that said cap layer (21) comprises one material selected among WSiN, WSi, W and Mo. Method according to claim 2 or 5, characterized in that : said refractory metal film (8a) comprising WSiN is formed by performing sputtering; said metal intermediate layer(9) is formed by performing sputtering employing TiN as a material successively after sputtering said refractory metal film (8a) comprising WSiN; and said Au film (11) is formed by plating employing said metal intermediate layer (9) of TiN as a feeding layer. Method according to claim 3 or 6, characterized in that : said refractory metal film (8a) comprising WSiN is formed by performing sputtering; and said Au film (11') is formed by performing sputtering successively after sputtering said refractory metal film (8a) comprising WSiN. Method according to claim 5 or 6, characterized in that said cap layer (21) is formed by vacuum evaporation or sputtering. Method according to claim 2 or 5, characterized in that said metal intermediate layer (9) on said refractory metal film (8a) comprising WSiN is formed by employing one selected among Au and Ti as a material. Method according to one of the claims 2, 3, 5 and 6, characterized in that the process of etching and removing said silicon oxide film (6) is performed by employing a pure HF water solution including neither ammonium ions nor alkaline metal ions.

Inventors: HATTORI RYO, KOHNO YASUTAKA, HATTORI, RYO, KOHNO, YASUTAKA, HATTORI, RYO, MITSUBISHI DENKI K.K., KOHNO, YASUTAKA, MITSUBISHI DENKI K.K.
Applicants: MITSUBISHI ELECTRIC CORP, MITSUBISHI DENKI KABUSHIKI KAISHA
Application year: 1994
Main classification: H01L21
IPC codes: H01L29, H01L21