EPROM and Flash-EEPROM non-volatile memory and method of manufacturing the same

Abstract: A nonvolatile memory (40) having a cell (31) comprising an N⁺ type source region (24) and drain region (12) embedded in a P⁻ type substrate (4) and surrounded by respective P-pockets (26, 16). The drain and source P-pockets (16, 26) are formed in two different high-angle boron implantation steps designed to optimize implantation energy and dosage for ensuring scalability of the cell and avoiding impairment of the snap-back voltage. The resulting cell (31) also presents a higher breakdown voltage as compared with known cells.

Description: The present invention relates to an EPROM and flash-EEPROM nonvolatile memory fabrication process, and relative nonvolatile memory. As is known, each cell of an EPROM and flash-EEPROM nonvolatile memory presents a parasitic bipolar transistor, the emitter and collector regions of which are formed by the source and drain regions of the cell, and the base region of which is formed by the substrate (body) of the cell. When programming the cell, electrons and holes are formed at the drain-substrate junction, which holes travel through the substrate to produce a current (base current of the parasitic transistor) and directly bias the source-substrate junction. If the current is high enough, the potential barrier at the source-substrate junction is reduced to such an extent that the current through the source-substrate junction increases uncontrollably, resulting in rapid degradation of the gate or tunnel oxide of the cell. For each fabrication process, a drain current to drain voltage curve can be drawn wherein degradation of the cell occurs over and above a predetermined ("snap-back") voltage, which therefore represents the maximum drain voltage that can be applied to the cell. Without special processing, the built-in space charge (i.e. in the absence of biasing, with all the cell electrodes grounded) is particularly widespread and greatly reduces snap-back voltage (and hence the maximum voltage that can be applied to the cell). To overcome this problem when fabricating nonvolatile memory cells of the type in question, boron is currently implanted over the entire surface of the cell (EPM implantation) prior to forming the floating gate and control gate regions, so as to increase the relative snap-back voltage. One suggestion made for scaling flash-EEPROM cells is to use a cell with a drain region (N + type) surrounded by a high-concentration (≈10 18 at/cm 2 ) P-pocket permitting a high degree of programming of cell. In this connection, see, for example, the article by Kuniyoshi Yoshikawa, Eiji Sagakami, Seiichi Mori, Norihisa Arai, Kazuhito Narita, Yoshiko Yamaguchi, Yoichi Ohshima and Kiyomi Naruke, "A 3.3 Operation Nonvolatile Memory Cell Technology", 1992 Symposium on VLSI Technology Digest of Technical Papers, IEEE. According to the above proposal, the P-pocket or ring is formed by means of a special high-angle boron implantation step wherein the silicon wafer is tilted with respect to the implantation device. More specifically, the proposed fabrication process does away with preliminary (EPM) boron implantation, and comprises the following steps: after forming the stacked cell gates, the surface is masked to cover the regions in which the source regions are to be formed (drain implantation mask); an N type doping agent such as arsenic is implanted to form the drain region; and, using the same mask, boron is high-angle implanted to form the P-pocket about the drain region. By virtue of the implantation angle and energy level, the P-pocket surrounds the drain region at the bottom and laterally towards the channel (thus extending beneath the stacked gates). At this point, the drain implantation mask is removed; a source implantation mask is formed to cover the drain regions and expose the substrate regions in which the source regions are to be formed; and source implantation is effected, normally by successively implanting arsenic and phosphorus. In the above process, the fact that no boron is implanted at the source junction results, for a given heat treatment and given doses of phosphorus and arsenic, in a considerable increase in the breakdown voltage of the source junction, thus enabling a reduction in N ion implantation, which, with only a small reduction in the theoretically obtainable breakdown voltage, provides for reducing lateral diffusion of the N doping ions. Moreover, the type of implantation employed provides for eliminating the follow-up heat treatment currently required for driving-in the doping agents. The combined reduction in ion implantation and heat treatment also results in a reduction in overlap between the drain region and gate regions, thus enabling scale reduction of the cell. As stated, however, the absence of boron close to the source junction seriously impairs the snap-back voltage, so that the proposed solution of high-angle implanting a P-pocket at the drain junction greatly reduces the operating range of the cell and, as such, is of only very limited application. A process for manufacturing a MOSFET device having a P-pocket surrounding the source region but no pocket surrounding the drain region is described in "A New Asymmetrical Halo Source GOLD Drain (HS-GOLD) Deep sub-Half-Micrometer n-MOSFET Design for reliability and Performance" IEEE Transactions on Electron Devices vol. 38 No 8, August 1991, pages 1757-1764. In particular, this article, acknowledging as known a solution including two equal pockets surrounding the drain and source regions, in order to obtain the desired punch-through resistance while avoiding reduction in the breakdown voltage and reliability, suggests forming only a pocket around the drain region. EP-A-0 446 893 teaches a method of manufacturing nonvolatile memory cells having symmetrical structure, with equal pockets around the source and the drain regions. It is an object of the present invention to provide a process for fabricating nonvolatile memory cells, designed to reduce the snap-back phenomenon while at the same time maintaining the scaling benefits typically associated with the high-angle P-pocket implantation technique. According to the present invention, there is provided a process for fabricating EPROM and flash-EEPROM nonvolatile memories, as claimed in Claim 1. According to the present invention, there is also provided an EPROM and flash-EEPROM nonvolatile memory array, as claimed in Claim 11. In practice, according to the present invention, the source region is also provided with a P-pocket surrounding the N + diffusion and formed in a high-angle implantation step other than that for forming the drain P-pocket. As such, the energy level and dose with which the two pockets are implanted may be optimized for ensuring scalability of the cells and avoiding impairment of the snap-back voltage, while at the same time permitting a certain increase in breakdown voltage as compared with present cells. A preferred, non-limiting embodiment of the present invention will be described by way of example with reference to the accompanying drawings, in which: Figures 1 to 5 show various steps in the process according to the present invention; Figure 6 shows a cross section of a memory cell obtainable using the Figure 1 process. The fabrication process according to the present invention comprises the same initial steps (up to and including fabrication of the floating and control gates) as in traditional processes, with the exception of the EPM implantation step which is eliminated as in the proposed high-angle P-pocket implantation process. The process therefore commences as of an intermediate structure 1 comprising, for each cell, a tunnel oxide layer 2 covering surface 3 of a P - type substrate 4; a polysilicon floating gate region 5; a dielectric layer (interpoly) 6; and a polysilicon control gate region 7 aligned with floating gate region 5. Intermediate structure 1 is then masked with a resist (drain) mask 10 covering tunnel oxide layer 2 at the substrate portions in which the source regions are to be formed, as shown in Figure 1; and arsenic ions are implanted as shown schematically by arrows 11 in Figure 1 to form an N + type drain region 12. At this point, using the same drain mask 10, boron ions are high-angle implanted in known manner, as shown by arrows 15 in Figure 2, by tilting the wafer 30° to 60°, preferably 45°, in relation to the implantation device, and implantation is repeated, rotating the wafer each time by 90° about its axis of symmetry (twist rotation) in known manner to take into account the various positions of the chips implementing the memories of each wafer. Implantation is optimized to ensure the formation of a pocket 16 (Figure 2) of the required thickness about the N + region, and is preferably performed with a total dose (comprising all four implantations at different twist angles) of 1x10 13 to 1x10 14 at/cm 2 and an energy level of 30 to 100 KeV. Drain mask 10 is then removed; a source mask 20 is deposited to cover drain regions 12 and any other regions not being implanted, and to expose the substrate regions in which the source regions are to be formed; arsenic is implanted as shown by arrows 21 in Figure 3 to form an N + layer 22; and, using the same source mask 20, phosphorus is implanted in known manner as shown by arrows 23 in Figure 4 to form N + type source region 24 deeper than drain region 12. Without removing source mask 20, boron ions are then high-energy implanted, as shown by arrows 25 in Figure 5, using the high-angle technique as for drain pocket 16, but a different dose and energy level, which are optimized to withdraw the boron peak from the source junction to prevent overreducing its breakdown voltage, and to form a P-pocket 26 about source region 24. More specifically, in this case, implantation is performed with a lower dose but a higher energy level as compared with that of drain P-pocket 16. As for drain P-pocket 16, source P-pocket 26 is also high-angle implanted at an angle of 30° to 60°, preferably 45°, and implantation is performed four times at different twist angles. Preferably, source P-pocket 26 is implanted with a total dose (comprising all four implantations at different twist angles) of 5x10 11 to 5x10 12 at/cm 2 and an energy level of 80 to 130 KeV. This is then followed by removal of mask 20, with no heat treatment at this step, and by the usual steps for forming or completing any other devices in the same chip; forming an oxide layer covering and surrounding the gate regions (layer 30 in Figure 6); forming a passivation layer; opening the contacts; forming the metal connecting lines; and forming a protective resin layer. The end structure of cell 31 forming part of memory 40 is shown in Figure 6 wherein, for simplicity, the passivation and protective layers are omitted, and the contours of the various layers are shown more realistically as compared with Figures 1 to 5. By virtue of the different implantation doses of pockets 16 and 26, the boron concentration of pocket 16 is greater than that of pocket 26. Forming a P-pocket 26 about source region 24, by means of a special high-angle implantation step to optimize the energy level and dose, provides for greatly increasing snap-back voltage as compared with proposed devices featuring a drain P-pocket and formed using the high-angle implantation technique. Though the increase in snap-back voltage is achieved at the expense of a reduction in the breakdown voltage of the source junction, the process parameters may be so optimized that breakdown voltage is reduced by less than the increase achieved by eliminating EPM implantation over the entire surface of the cell. In particular, for cells which are erased by applying a high positive voltage to the source region and grounding the control gate region, breakdown voltage can be maintained higher than the erase voltage between the source and substrate, while at the same time fully exploiting the scaling and high-speed programming benefits typically associated with drain P-pocket structures. Moreover, the process described involves no additional masking steps as compared with the proposed drain P-pocket cell fabrication process, by virtue of the additional step for high-angle implanting the source P-pocket being performed using the source implantation mask. Clearly, changes may be made to the process and memory cell as described and illustrated herein without, however, departing from the scope of the present invention. In particular, the implantation parameters may differ from those described, bearing in mind that, in general, the dose and energy level of the source P-pocket are respectively lower and higher than those of the drain P-pocket; the sequence in which the source and drain regions are implanted may vary, and be inverted as compared with that described (formation of the source region and pocket prior to forming the drain region and pocket); changes may be made to the phosphorus, arsenic and boron implantation sequence, or to the doping ions for forming the source and drain regions; and, finally, the same solution may also be applied to memories of an opposite conductivity type.

Claims: A process for fabricating EPROM and flash-EEPROM nonvolatile memories (40) comprising a memory cell (31) having drain and source regions (12, 24) of a first conductivity type and embedded in a substrate (4) of a second opposite conductivity type forming a channel region separating said drain and source regions; the process comprising the step of high-angle implanting a first doping agent of said second opposite conductivity type using first implantation parameters, to form a drain pocket (16) of said second opposite conductivity type surrounding the drain region (12) towards the channel region; characterized in that it comprises the step of high-angle implanting a second doping agent of said second opposite conductivity type using second implantation parameters differing from said first implantation parameters, to form a source pocket (26) of said second opposite conductivity type surrounding said source region (24), said source pocket (26) forming snap-back reducing means. A process as claimed in Claim 1, characterized in that it comprises the steps of masking said substrate (4) by forming a drain mask (10) presenting a drain opening at a first portion of said substrate; implanting a third doping agent of said first conductivity type through said drain opening to form said drain region (12); high-angle implanting said drain pocket (16) through said drain opening; and removing said drain mask. A process as claimed in Claim 2, characterized in that it comprises the steps of masking said substrate (4) by forming a source mask (20) presenting a source opening at a second portion of said substrate; implanting a fourth doping agent of said first conductivity type through said source opening to form said source region (24); high-angle implanting said source pocket (26) through said source opening; and removing said source mask. A process as claimed in claim 3, characterized in that said first conductivity type is an N type, and said second opposite conductivity type is a P-type. A process as claimed in claim 4, characterized in that said first and second doping agents comprise boron; said third doping agent comprises arsenic; and said fourth doping agent comprises arsenic and phosphorus. A process as claimed in one of the foregoing Claims from 1 to 5, characterized in that said process parameters comprise implantation dose and implantation energy. A process as claimed in Claim 6, characterized in that the implantation dose in said step for high-angle implanting a first doping agent is greater than the implantation dose in said step for high-angle implanting a second doping agent; and the implantation energy in said step for high-angle implanting a first doping agent is lower than the implantation energy in said step for high-angle implanting a second doping agent. A process as claimed in Claim 7, characterized in that the total implantation dose in said step for high-angle implanting a first doping agent ranges between 1x10 13 and 1x10 14 at/cm 2 ; and the total implantation dose in said step for high-angle implanting a second doping agent ranges between 5x10 11 and 5x10 12 at/cm 2 . A process as claimed in Claim 7 or 8, characterized in that the implantation energy in said step for high-angle implanting a first doping agent ranges between 30 and 100 KeV; and the implantation energy in said step for high-angle implanting a second doping agent ranges between 80 and 130 KeV. A process as claimed in one of the foregoing Claims, characterized in that said steps for high-angle implanting a first and second doping agent are performed at an angle ranging between 30° and 60°. An EPROM and flash-EEPROM nonvolatile memory (40) comprising a memory cell (31) having drain and source regions (12, 24) of a first conductivity type and embedded in a substrate (4) having a second opposite conductivity type and a first doping agent concentration level, said substrate forming a channel region separating said drain and source regions; and a drain pocket (16) surrounding said drain region (12) towards said channel region and having said second opposite conductivity type and a second doping agent concentration level; characterized in that it comprises a source pocket (26) surrounding said source region (24) and having said second opposite conductivity type and a third doping agent concentration level differing from said first and second levels; said source pocket forming snap-back reducing means. A memory as claimed in Claim 11, characterized in that said first conductivity type is an N type, and said second opposite conductivity type is a P type. A memory as claimed in Claim 12, characterized in that said doping agents of said drain -and source pockets (16, 26) comprise boron; said doping agent of said drain region (12) comprises arsenic; and said doping agent of said source region (24) comprises arsenic and phosphorus. A memory as claimed in any one of the foregoing Claims from 11 to 13, characterized in that said third concentration level is higher than said first concentration level; and said second concentration level is higher than said third concentration level. A memory as claimed in Claim 14, wherein said substrate presents a surface (3) over which stacked gate regions (5, 7) extend; characterized in that said source region (24) is farer from said surface (3) than said drain region (12); and said source pocket (26) extends a greater distance from said surface than said drain pocket (16).

Inventors: FRATIN LORENZO, RAVAZZI LEONARDO, RIVA CARLO, FRATIN, LORENZO, RAVAZZI, LEONARDO, RIVA, CARLO
Applicants: ST MICROELECTRONICS SRL, STMICROELECTRONICS S.R.L.
Application year: 1994
Main classification: H01L21
IPC codes: H01L29, H01L27, H01L21