Method of manufacturing a chemically adsorbed film

Abstract: Disclosed is a method of manufacturing a chemically adsorbed film, which can efficiently provide a water and oil repelling and anti-contaminating ultra thin film with uniform thickness by spraying a solution comprising a chemical adsorbent on a substrate surface having active hydrogen groups in a dry atmosphere. A chemically adsorbed film can be formed by spraying a chlorosilane-based surface active agent on a substrate surface having active hydrogen groups such as hydroxyl, imino groups or the like. After forming a siloxane-based monomolecular layer or polysiloxane layer beforehand by spraying a chlorosilane compound or a solution comprising a chlorosilane compound on a substrate surface, a chemically adsorbed monomolecular or polymer layer can be formed by spraying a solution comprising a chlorosilane-based surface active agent. Based on the above-noted method, the film can be formed in a short time without being inhibited by the shapes and sizes of substrates.

Description: The invention relates to a method of manufacturing a chemically adsorbed film on a substrate surface. More particularly, the invention relates to a method of manufacturing a chemically adsorbed film comprising the formation of a chemically adsorbed monomolecular or polymer layer by a coating method or the cumulation of a chemically adsorbed monomolecular or polymer layer via a siloxane-based chemically adsorbed layer. It has been generally well known that a monomolecular layer can be formed by a liquid phase adsorption method. In this method, a substrate is dipped and held in a nonaqueous organic solvent containing a chemical adsorbent, and kept for a fixed number of hours for the reaction (EP-A-0476543). In this method, a chemically adsorbed monomolecular layer is formed by a dehydrochlorination reaction between the hydroxyl groups on the substrate surface and the chlorosilyl groups of a chlorosilane-based adsorbent (surface active agent). A dipping method has been employed for the above-noted conventional chemical adsorption method, and there has been a problem that a large amount of the adsorbent and a big tank are required for a large substrate. FR-A-2063190 discloses a process for coating a substrate surface with a polymer coating film, said film being partially or fully fluorinated and having a siloxane structure. The polymer coating film may be provided on the substrate by an in-situ polymerization using the corresponding monomers, e.g., molecules having a fluorocarbon chain and containing a chlorosilyl group. The polymer or the corresponding monomers may be applied by spray coating. EP-A-0482613 discloses a method for producing a fluorocarbon-based polymer coating film comprising a siloxane-based film formed as an inner layer and a fluorocarbon-based polymer film formed as an outer layer on a substrate surface. The object of the invention is to provide a method of manufacturing a chemically adsorbed film, efficiently forming a film in a short time with only a small amount of adsorbent without being inhibited by the size of the substrate. In order to accomplish the above object, the method of manufacturing a chemically adsorbed film of the invention comprises the following procedures: spray-coating a solution containing a chlorosilane-based or thiol-based chemical adsorbent on a substrate surface comprising active hydrogen groups in a dry atmosphere having a relative humidity of less than 35%, wherein the chemical adsorbent comprises chlorosilyl or thiol groups at one end of molecules and at least one group selected from the group consisting of a straight hydrocarbon, fluorocarbon and siloxane chain; and generating a condensation reaction between said active hydrogen groups on said substrate surface and said chlorosilyl or thiol groups of said chemicai adsorbent and forming a chemically adsorbed film on said substrate surface via covalent bonds. It is preferable in this invention that the following procedures are included after the condensation reaction: washing away the solution containing unreacted chlorosilane-based adsorbent left on the substrate surface with a nonaqueous organic solvent; reacting the chlorosilyl groups left on the substrate surface with water; drying the substrate surface, thereby forming a chemically adsorbed monomolecular layer on the surface via covalent bonds. It is also preferable in the invention that the following procedures are included after the condensation reaction: vaporizing the solution on the substrate surface; reacting the substrate surface with water; drying the substrate surface, thus forming a chemically adsorbed polymer layer on the surface via covalent bonds. It is preferable in the invention that a chemically adsorbed film is formed in the following procedures: contacting a substrate surface having active hydrogen groups with a chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecule in a dry atmosphere having a relative humidity of less than 35%, generating a condensation reaction between the active hydrogens on the substrate surface and the chlorosilyl groups of the chemical adsorbent and forming an inorganic siloxane-based chemically adsorbed inner layer; spraying a solution containing a chlorosilane-based chemical adsorbent having a chlorosilyl group at least one end of the molecule and at least one group selected from the group consisting of a straight hydrocarbon, fluorocarbon and siloxane chain on the inorganic siloxane-based chemically adsorbed inner layer, thus forming a chemically adsorbed film on the inner layer via siloxane bonds. It is also preferable in the invention that the spray-coating technique of a chlorosilane-based chemical adsorbent is applied for the chemical adsorption reaction. It is preferable in the invention that the following procedures are included after the condensation reaction between the active hydrogen groups on a substrate surface and the chlorosilyl groups of the chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecule; removing the solution containing unreacted chlorosilane-based adsorbent with a nonaqueous organic solvent; reacting the chlorosilyl groups left on the substrate surface with water; drying the substrate surface, thereby forming a chemically adsorbed monomolecular inner layer on the surface. It is also preferable in the invention that a chemically adsorbed polymer inner layer is formed by vaporizing the solvent, contacting a substrate surface with water and drying the surface after the condensation reaction between the active hydrogen groups on the surface and the chlorosilyl groups of the chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecule. It is preferable in the invention that at least one part of the hydrocarbon chain of the chlorosilane-based chemical adsorbent is substituted with a -CF 2 - group. It is preferable in the invention that CF 3 (CF 2 ) n (R) m SiX p Cl 3-p (wherein n represents 0 or an integer, R represents an alkylene, vinylene, ethynylene, arylene group or a divalent group comprising a silicon or oxygen atom, m represents 0 or 1, X represents H, an alkyl, alkoxy group or a substituent comprising a fluoroalkyl or fluoroalkoxy group, and p represents 0, 1 or 2) is used as the chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecule. It is also perferable in the invention that the chlorosilane-based chemical adsorbent used for forming an inner layer is comprised of at least one compound selected from the group consisting of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 and Cl(SiCl 2 O) n SiCl 3 (n as an integer). It is preferable in the invention that the substrate is a material chosen from the group consisting of metals, ceramics, glass, plastic, polymers, paper, fiber and leather. It is preferable in the invention that active hydrogens are introduced to a substrate surface by treatment in a plasma or corona atmosphere comprising oxygen. It is preferable in the invention that a chemical adsorption reaction is directed in an atmosphere with 30% or less relative humidity. It is preferable in the invention that the boiling point of the solvent containing the chlorosilane-based chemical adsorbent is 100-300°C in forming a monomolecular layer. It is also preferable in the invention that the boiling point of the solution containing the chlorosilane-based adsorbent is between room temperature and 100°C to form a chemically adsorbed polymer layer. It is preferable in the invention that the solution used for the chemical adsorption is sprayed on the surface at the µm level. Based on the above-noted composition, a chemically adsorbed film can be formed on a substrate surface by spraying a solution containing a chlorosilane-based chemical adsorbent. As a result, one method of the invention does not require many hours and a tank for the adsorption reaction; thus, a chemically adsorbed film can be formed quickly, and the size of a substrate is not limited to form a chemically adsorbed film on the substrate. In a method of the invention, a chemically adsorbed film can be formed efficiently on a substrate surface as follows: spraying a chlorosilane-based adsorbent or a solution containing a chlorosilane-based adsorbent on a substrate surface, thus forming a siloxane-based inner layer; spraying a chlorosilane-based chemical adsorbent or a solution containing the adsorbent on the substrate surface, thus forming a chemicaily adsorbed film with neither a tank nor many hours, without being inhibited by the size of the substrate. A siloxane-based thin inner layer is either a monomolecular or polymer layer in the invention; however, the monomolecular layer, obtaining transparency, is preferable since it can be formed uniformly and easily on a substrate surface. In one method of the invention, it is preferable that an adsorbent comprising fluorine rather than a hydrocarbon-based adsorbent is used for obtaining superior water and oil repelling and anti-contaminating properties. In the case of using a chemical adsorbent comprising a straight siloxane chain, a water repelling property is improved. In the above-noted method of the invention, the adherence of a built-up film to a substrate surface is significantly improved since a siloxane-based thin inner layer is covalently bonded to both the substrate surface and the chemically adsorbed outer layer formed on the inner layer. In the above-noted method of the invention, the substrate is not limited to the material chosen from the group consisting of metals, ceramics, glass, plastic, polymers, fiber, paper and leather. It is preferable in the invention that a hydrocarbon-based chemical adsorbent in which at least one part of a hydrocarbon chain is substituted with a -CF 2 - group is used as the chlorosilane-based adsorbent since the chemical adsorbent can improve water repelling and anti-contaminating properties significantly. It is preferable in the invention that CF 3 (CF 2 ) n (R) m SiX p Cl 3-p (wherein n represents 0 or an integer, R represents an alkylene, vinylene, ethynylene group or a divalent group comprising a silicon or oxygen atom, m represents 0 or 1, X represents an alkyl, alkoxy group or a substituent comprising a fluoroalkyl or fluoroalkoxy group, p represents 0, 1 or 2) is used as the chlorosilane-based adsorbent. In case of using a plastic as a substrate, it is preferable that the surface of the plastic is made hydrophilic by treatment in a plasma or corona atmosphere comprising oxygen, thus the chemically adsorption of siloxane-based molecules occurs with high density. In the above-noted composition, the chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecules is comprised of at least one material chosen from the group consisting of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 or Cl(SiCl 2 O) n SiCl 3 (wherein n is an integer), thus a siloxane-based monomolecular layer can be formed efficiently. It is preferable in the invention that the boiling point of the solvent containing the chemical adsorbent is 100-300°C, thus forming a chemically adsorbed monomolecular layer efficiently. It is also preferable in the invention that the boiling point of the solution containing the chlorosilane-based adsorbent is below 100°C, thus forming a chemically adsorbed polymer layer efficiently. The following examples are the films which can be formed by the method of the invention: (1) a chemically adsorbed monomolecular layer; (2) a chemically adsorbed polymer layer; (3) a chemically adsorbed monomolecular layer formed on a siloxane-based monomolecular inner layer; (4) a chemically adsorbed monomolecular layer formed on a polysiloxane-based inner layer; (5) a chemically adsorbed polymer layer formed on a siloxane-based monomolecular inner layer; and (6) a chemically adsorbed polymer layer formed on a polysiloxane-based monomolecular inner layer. The method of the invention is not limited by the shape and size of a substrate, and can form a chemically adsorbed film efficiently. A chemically adsorbed film formed by the method of the invention is ultra thin with uniform thickness, pin hole free, durable and heat resistant since the film is chemically bonded to a substrate surface. The method of the invention also does not require a tank for an adsorption reaction procedure, and is not inhibited by the shape and size of a substrate because the chemically adsorbed film is formed by the spray-coating technique. Moreover, in forming a chemically adsorbed film on an inner layer, a tank is not required for a chemical adsorption reaction in the invention and the method of the invention is not limited by the shape and size of a substrate. Since a chemically adsorbed outer layer is chemically bonded to an inner layer which is also chemically bonded to a substrate surface, a built-up film as a whole is ultra thin with uniform thickness, pin hole free, heat resistant and durable. After forming a polysiloxane-based inner layer comprising numerous -SiOH bonds on a substrate surface, a monomolecular or polymer layer is built up by applying a silane-based adsorbent having chlorosilane groups, thereby generating a dehydrochlorination reaction between -OH groups on the polysiloxane-based inner layer and the chlorosilyl groups of the silane-based adsorbent. The outer layer is chemically bonded to the substrate via -SiO bonds; therefore, the film shows excellent adherence. As explained above, the method of the invention of forming a chemically adsorbed film on a substrate surface by the spraying of an adsorbent in a dry atmosphere is not limited by the shape or type of substrate, which may include e.g. plastic, ceramics or glass. Since a chemically adsorbed film is connected to a substrate surface via a siloxane-based inner layer, the chemically adsorbed film can be formed efficiently and adherently even to a substrate - having a few active hydrogens such as e.g. hydroxyl, amino or imino groups - including e.g. metals, plastic, ceramics or glass. By using a compound having fluorocarbon and chlorosilyl groups as an adsorbent, a water and oil repellent, anti-contaminating and highly durable fluorocarbon-based film can be chemically bonded to a metallic substrate such as e.g. Al, Cu or stainless steel. The film is also highly dense, pin hole free, and ultra thin with uniform thickness. The method of manufacturing a chemically adsorbed film of the invention, therefore, can be applied to e.g. electronics, particularly electric goods such as hot plates and rice steamers, and also to automobiles, industrial equipments, mirrors or lenses for glasses which require a heat, weather and abrasion resisting properties. Figure 1 is a sectional view of a substrate surface of an example used in the invention, enlarged to a molecular level. Figure 2 is a sectional view of a substrate surface formed with a chlorosilane-based monomolecular layer of the example produced according to the invention, enlarged to a molecular level. Figure 3 is a sectional view of a substrate surface formed with a siloxane-based monomolecular inner layer having numerous silanol groups of the example produced according to the invention, enlarged to a molecular level. Figure 4 is a sectional view of a substrate surface formed with a polysiloxane inner layer having numerous silanol groups of the example produced according to the invention, enlarged to a molecular level. Figure 5 is a sectional view of a fluorine-based chemically adsorbed monomolecular layer formed on a siloxane-based monomolecular inner layer of the example produced according to the invention, enlarged to a molecular level. Figure 6 is a sectional view of a fluorine-based polymer layer formed on a siloxane-based monomolecular inner layer of the example produced according to the invention, enlarged to a molecular level. Figure 7 is a sectional view of a fluorine-based chemically adsorbed polymer layer formed on a polysiloxane inner layer of the example produced according to the invention, enlarged to a molecular level. Figure 8 is a sectional view of a substrate surface, enlarged to a molecular level, showing another example used according to the invention. Figure 9 is a sectional view of a substrate surface formed with a chlorosilane-based monomolecular layer of the example produced according to the invention before reacting the surface with water, enlarged to a molecular level. Figure 10 is a sectional view of a substrate surface formed with a siloxane-based monomolecular inner layer of the example produced according to the invention, enlarged to a molecular level. Figure 11 is a sectional view of a fluorocarbon-based monomolecular outer layer formed on a siloxane-based monomolecular layer of the example produced according to the invention, enlarged to a molecular level. Figure 12 is a sectional and schematic view of a spray gun used in Example 19 of the invention. Figure 13 is a sectional view of a chemically adsorbed monomolecular layer formed in Example 19 of the invention by using a chlorosilane compound having a CF 3 group at one end of the molecule, enlarged to a molecular level. Figure 14 is a sectional view of a chemically adsorbed monomolecular layer formed in Example 19 of the invention by using a thiol compound, enlarged to a molecular level. As the examples of a substrate used for the invention, substrates having hydrophilic surfaces - metals such as e.g. Al, Cu or stainless steel, glass, ceramics, paper, fiber, leather or other hydrophilic substrates - are included. In the case that a material, such as plastic, does not have a hydroxyl group on its surface, the hydroxyl groups can be introduced to the surface by a corona treatment of 100W for 20 minutes in a plasma atmosphere, containing oxygen, thus the surface becomes hydrophilic. However, in case of polyamide or polyurethane resin, which have imino groups (>NH) on their surfaces, such treatment is not necessary; a dehydrochlorination reaction is promoted between the hydrogens of the imino groups (>NH) of the substrate and the chlorosilyl groups (-SiCl) of a chemical adsorbent, thereby forming a siloxane bond (-SiO-). As a chlorosilane-based adsorbent comprising numerous chlorosilyl groups in the molecule used for forming an inner layer having numerous chlorosilyl groups, e.g. SiCl 4 , SiHCl 3 , SiH 2 Cl 2 or Cl(SiCl 2 O) n SiCl 3 (n as an integer) are useful. It is particularly preferable that SiCl 4 , which has small molecules and is highly reactive to hydroxyl groups, is used to make a substrate surface uniformly hydrophilic. The gas containing no water such as dry air below 35% relative humidity or nitrogen gas is used as a dry atmosphere having a relative humidity of less than 35%. The concentration of the chlorosilane-based adsorbent having chlorosilyl groups should be 0.01-100% by weight (most preferably 0.1-50% by weight). A polysiloxane film can be formed as follows: spraying the chlorosilane-based adsorbent having chlorosilyl groups on a substrate surface in dry atmosphere as specified above; leaving the substrate for about 30 minutes, thereby generating a dehydrochlorination reaction and fixing the material to the substrate surface because of numerous hydrophilic OH groups on the substrate surface; washing the substrate with a nonaqueous solvent; reacting the substrate with water, thus removing the excessive material and forming a siloxane-based monomolecular layer (inner layer); vaporizing the solvent containing the adsorbent. It is easier to vaporize the solvent with a low boiling point; however, in considering the handling of the material, the material with a boiling point at 100°C or higher is preferable. In forming an outer layer, a hydrocarbon-based adsorbent comprising chlorosilyl groups or a fluorocarbon-based adsorbent can be used for reaction with the hydroxyl groups (-OH) numerously contained on the surface of inner layer. In the case that a substrate surface is highly hydrophilic, it is not necessary to form an inner layer on the substrate surface. Thus, an outer layer can be deposited on the substrate surface directly. A solution comprising a compound having chlorosilyl groups - e.g., a hydrocarbon-based adsorbent, a fluorocarbon-based adsorbent or the adsorbent having straight siloxane chain - is applied to deposit an outer layer on the inner layer. (The concentration of the compound in the solution varies depending on the kinds of the solvent and the adsorbent used for the solvent; however, it is preferably 0.1-10% by weight.) A dehydrochlorination reaction is generated at the substrate surface containing numerous hydrophilic OH groups, after coating the substrate with the solution and leaving it for about 30 minutes. The hydrocarbon-based adsorbent or the fluorocarbon-based adsorbent is then fixed to the surface. A monomolecular layer (outer layer) is formed by washing the substrate thoroughly with nonaqueous solvent to remove excessive adsorbent and reacting the substrate with water. It is desirable that the boiling point of the solution is significantly high for extending the time for vaporization and adsorption reaction. In considering the handling of the solution, the boiling point is preferably 100-300°C. A polymer film of the hydrocarbon-based or fluorocarbon-based adsorbent can be formed by vaporizing the applied solution. (The procedure of washing the substrate with nonaqueous solvent after the adsorption of the hydrocarbon-based or fluorocarbon-based adsorbent is skipped.) The polymer layer is also formed by a dehydrochlorination reaction. The vaporization of the solution containing the adsorbent comprising chlorosilyl groups can be done fast if the boiling point of the solution is low. However, in considering the handling of the solution, the boiling point is preferably between room temperature and 100°C. As an adsorbent forming an outer layer, a compound comprising fluorocarbon and chlorosilane groups can be included. Especially the following compound is preferable to provide an excellent water and oil repelling, anti-contaminating and lubricating properties to the layer: CF 3 (CF 2 ) n (R) m SiX p Cl 3-p , wherein n represents 0 or an integer, preferably an integer from 1 to 22; R represents an alkylene, phenylene, ethynylene group or a divalent group comprising a silicon or oxygen atom; m represents 0 or 1; X represents H, an alkyl, alkoxy group or a substituent comprising a fluoroalkyl or fluoroalkoxy group; p represents 0, 1 or 2. The following hydrocarbon-based or siloxane-based chemical adsorbents can be used for forming an outer layer: CH 3 (CH 2 ) r SiX p Cl 3-p ; CH 3 (CH 2 ) s O(CH 2 ) t SiX p Cl 3-p ; CH 3 (CH 2 ) u Si(CH 3 ) 2 (CH 2 ) v SiX p Cl 3-p ; CF 3 COO(CH 2 ) w SiX p Cl 3-p ; CH 3 {Si(CH 3 ) 2 O} r SiX p Cl 3-p ; Cl{Si(CH 3 ) 2 O} r SiX p Cl 3-p (preferably r is 1 to 25, s is 0 to 12, t is 1 to 20, u is 0 to 12, v is 1 to 20 and w is 1 to 25.) In addition, the following shows the specific examples of the adsorbents: CH 3 CH 2 O(CH 2 ) 15 SiCl 3 ; CH 3 (CH 2 ) 2 Si(CH 3 ) 2 (CH 2 ) 15 SiCl 3 ; CH 3 (CH 2 ) 6 Si(CH 3 ) 2 (CH 2 ) 9 SiCl 3 ; CH 3 COO(CH 2 ) 15 SiCl 3 ; CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 ; CF 3 (CF 2 ) 5 (CH 2 ) 2 SiCl 3 ; CF 3 (CF 2 ) 7 C 6 H 4 SiCl 3 ; CH 3 {Si(CH 3 ) 2 O} 3 SiCl 3 ; Cl{Si(CH 3 ) 2 O} 3 Si(CH 3 ) 2 Cl. In the case that a substrate is metallic, an alkylthiol including e.g. CH 3 (CH 2 ) n SH, F(CF 2 ) n (CH 2 ) m SH or CF 3 (CF 2 ) m (CH 2 ) n SH (wherein m, n = an integer from 1 to 18) can be used as an adsorbent. The micro liquid drops of nonaqueous solution comprising a chlorosilane compound (or thiol compound) can be provided by a spray gun. In case of using a chlorosilane-based surface active agent, a nonaqueous organic solvent with no active hydrogen can be used as the solvent for the invention. Such solvent includes the following: hexadecane; isooctane; toluene; xylene; cyclohexane; tetralin; petroleum ether; chloroform; carbon tetrachloride; perfluorocarbon; perfluoroalkyl tertiary amine; perfluoroalkyl cyclic ether. In case of using an alkylthiol, in addition to nonaqueous solvents, an alcohol-based solvent such as ethanol can be used. It is also necessary to choose an adsorbent which does not melt a substrate. It is required to oxidize the surface of a substrate with no active hydrogen (e.g., hydroxyl, amino or carboxyl groups) such as fiber and polymers, thus providing active groups on the substrate surface before the adsorption reaction. An oxygen plasma treatment, a UV/ozone treatment, a corona treatment, a method of dipping and holding in a mixed solution of concentrated sulphuric acid and potassium dichromate (chromic acid mixture treatment) are included as possible methods of oxidizing a substrate surface. To form a highly dense chemically adsorbed film of a thiol compound on the surface of a metal, it is preferable that an oxide on the surface is removed by an electrolysis or acid-alkali solution treatment. This invention can be applicable for various uses and materials as described in the following: (a)examples of substrates - metal, ceramics, plastic, wood, stone (the invention being applicable even when the substrate surface being coated with e.g. paint in advance); (b)examples of cutlery - kitchen and other knives, scissors, engraver, razor blade, hair clippers, saw, plane, chisel, gimlet, badkin, cutting tools, drill tip, blender blade, juicer blade, flour mill blade, lawn mower blade, punch, straw cutter, stapler, blade for can opener or surgical knife; (c)examples of needles - acupuncture needle, sewing needle, sewing-machine needle, long thick needle for making tatami, syringe needle, surgical needle or safety pin; (d)examples of products in the pottery industry - products made of pottery, glass, ceramics or enameled products, including hygienic potteries (such as a chamber pot, wash-bowl, bathtub,), tableware (such as a rice bowl, plate, bowl, teacup, glass, bottle, coffee-pot, pots and pans, earthenware mortar, cup,), flower vases (such as a flower bowl, flowerpot, small flower vase,), water tanks (such as a breeding cistern, aquarium water tank,), chemistry apparatus (such as a beaker, reacter vessel, test tube, flask, culture dish, condenser, stirring rod, stirrer, mortar, vat, syringe), roof tile, tile, enameled tableware, enameled wash bowl, and enameled pots and pans; (e)examples of mirrors - hand mirror, full-length mirror, bathroom mirror, washroom mirror, mirrors for automobile (back and side mirrors), half mirror, mirror for show window or mirrors for department store; (f)examples of molding parts - die for press molding, die for cast molding, die for injection molding, die for transfer molding, die for vacuum molding, die for blow forming, die for extrusion molding, die for inflation molding, die for fiber spinning, calender processing roll; (g)examples of ornaments - watch, jewelry, pearl, sapphire, ruby, emerald, garnet, cat's-eye, diamond, topaz, bloodstoner, aquamarine, turquoise, agate, marble, amethyst, cameo, opal, crystal, glass, ring, bracelet, brooch, tiepin, earrings, necklace or glasses frames (of e.g. platinum, gold, silver, aluminum, titanium, tin, compound metals of these elements, or stainless steel); (h)examples of molds for food - cake mold, cookie mold, bread mold, chocolate mold, jelly mold, ice cream mold, oven plate or ice tray; (i)examples of cookware - pots and pans, iron pot, kettle, pot, frying pan, hot plate, net for grilling food, tool for draining off oil or plate for making takoyaki; (j)examples of paper - photogravure paper, water and oil repellent paper, paper for posters or high-quality paper for pamphlets; (k)examples of resin - polyolefin (such as polypropylene, polyethylene,), polyvinylchloride, polyvinylidenechloride, polyamide, polyimide, polyamideimide, polyester, aromatic polyester, polystyrene, polysulfone, polyethersulfone, polyphenylenesulfinde, phenolic resin, furan resin, urea resin, epoxide, polyurethane, silicon resin, ABS resin, methacrylic resin, ethylacrylate resin, ester resin, polyacetal or polyphenyleneoxide; (l)examples of household electric goods - television, radio, tape recorder, audio goods, CD player, refrigerator, freezer, air conditioner, juicer, blender, blade of an electric fan, lighting equipment, dial plate or hair drier for perm; (m)examples of sporting goods - skis, fishing rod, pole for pole vault, boat, sailboat, jet skis, surfboard, golf ball, bowling ball, fishing line, fishing net or fishing float; (n)examples of vehicle parts; (1)ABS resin - lamp cover, instrument panel, trimming parts, and protector for a motorcycle, (2)cellulose plastic - markings for automobile, and steering wheel, (3)FRP (Fiber Reinforced Plastics) - bumper, and engine cover, (4)phenolic resin - brake, (5)polyacetal - wiper, wiper gear, gas valve, carburetor parts, (6)polyamide - radiator fan, (7)polyarylate (polycondensation polymerization by bisphenol A and pseudo phthalic acid) - direction indicator lamp (or lens), cowl board lens, relay case, (8)polybutylene terephthalate - rear end, front fender, (9)poly amino-bismaleimide - engine parts, gear box, wheel, suspension drive system, (10)methacrylate resin - lamp cover lens, meter panel and cover, and center mark, (11)polypropylene - bumper, (12)polyphenylene oxide - radiator grill, wheel cap, (13)polyurethane - bumper, fender, instrument panel, and fan, (14)unsaturated polyester resin - body, gas tank, heater housing, meter panel, (o)examples of stationary goods - fountain pen, ballpoint pen, mechanical pencil, pencil case, binder, desk, chair, book shelf, rack, telephone base, ruler or draftsman's outfit; (p)examples of building materials - roof materials (such as ceramic tile, slate, tin such as used in galvanized iron plate,), outer wall materials (such as wood including processed wood, mortar, concrete, ceramic sizing, metallic sizing, brick, building stone, plastic material, metallic material including aluminum,) or interior materials (such as wood including processes wood, metallic material including aluminum, plastic material, paper, fiber,); (q)examples of stone materials - granite or marble, used for e.g. building, building material, works of art, ornament, bath, gravestone, monument, gatepost, stone wall, sidewalk, paving stone, (r)examples of musical instruments and audio apparatus percussion insturments, string instruments, keyboard instruments, woodwind instruments or brass instruments, more specifically, drum, cymbals, violin, cello, guitar, koto, piano, flute, clarinet, shakuhachi, horn, and microphone, speaker or earphone; (s)others - e.g. high voltage insulator with good water, oil and contamination-repelling properties, including thermos bottles, vacuum apparatus, insulator for transmitting electricity or spark plugs. The method of manufacturing a chemically adsorbed film of the invention will now be explained specifically in the following examples 1-12. Example 1 An aluminum substrate 1 was used in this example (Figure 1). Since a few hydrophilic -OH groups are exposed on the surface of aluminum substrate 1, SiCl 4 (tetrachlorosilane) comprising numerous chlorosilyl groups in the molecule was used as an adsorbent for forming an inner layer. A solution was prepared by dissolving 5% by weight of tetrachlorosilane, 85% by weight of hexadecane, and 10% by weight of chloroform. (Instead of hexadecane, any nonorganic solvent with a boiling point of 100°C or above, such as e.g. xylene or tetralin can be applicable.) After spraying the solution on the surface of aluminum substrate 1 in a dry nitrogen atmosphere, the substrate was left for about 30 minutes. As a result, a dehydrochlorination reaction was generated at the substrate surface as shown in Figure 2, and the molecules were bonded to the surface via -SiO- bonds as in the following Formula 1 and/or Formula 2. Hexadecane with its boiling point at 287°C was hardly vaporized in the above-noted procedures. The unreacted SiCl 4 molecules were removed by washing aluminum substrate 1 with a nonaqueous solvent like chloroform and then with water. As shown in the following formulas, a siloxane monomolecular layer 4 comprising numerous silanol groups was formed on the substrate surface after the reaction between the adsorbed solution and water (Figure 3). Siloxane monomolecular layer 4 or a polysiloxane inner layer bonded to aluminum substrate 1 via -SiO- could not be peeled off. Siloxane monomolecular layer 4 or the polysiloxane inner layer formed by the reaction comprised numerous SiOH bonds on the surface, and the number of hydroxyl groups was increased to about three times the original number of the groups on substrate 1. Moreover, a polysiloxane layer 4' comprising numerous silanol groups was formed after spraying the solvent comprising tetrachlorosilane, in this example cyclohexane (bp. 80°C), and naturally vaporizing the solvent (Figure 4). (In the above-noted procedure, the step of washing the substrate with a nonaqueous solvent after spraying the solvent was skipped.) Besides cyclohexane, any nonaqueous solvent with a boiling point around 100°C or below capable of dissolving tetrachlorosilane including e.g. n-hexane, such as "Florinate" (Trade Name: manufactured by 3M), can be used as the solvent in this example. An outer layer, furthermore, was formed in a dry nitrogen atmosphere as follows: spraying a solution mixed of 5% by weight of a chemical adsorbent comprising fluorocarbon and chlorosilane groups, CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 in this example, 85% by weight of hexadecane and 10% by weight of chloroform on aluminum substrate 1 in a dry nitrogen atmosphere; letting the substrate sit for about 30 minutes; washing the substrate with a nonaqueous solvent, thus removing the unreacted CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 molecules; exposing the substrate to air; reacting the adsorbed chemical adsorbent with water in air, thereby forming the bonds as in the following formula 5 on the siloxane monomolecular layer (Figure 5). A monomolecular layer 5 formed on the siloxane monomolecular layer 4 is shown in Figure 5. As seen from Figure 5, the monomolecular layer 5 comprising fluorine was formed on the siloxane monomolecular layer 4 (inner layer) by chemical bonding (covalent bonding). As a solvent comprising CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 , cyclohexane (bp. 80°C) was used. (Any nonaqueous solvent with a boiling point at 100°C or below capable of dissolving tetrachlorosilane such as n-hexane, "Florinate" (Trade Name, 3M), can be used.) By naturally vaporizing the solvent, a fluorocarbon-based polymer layer 5' was formed either on siloxane monomolecular layer 4 (Figure 6) or polysiloxane layer 4' (Figure 7). (The procedure of washing the substrate with a nonaqueous solvent after spraying the solvent was skipped.) The monomolecular or polymer outer layer was not peeled off by a cross-cut adhesion test. Although CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 was used as a fluorocarbon-based adsorbent for forming an outer layer in the example, the firmness of the monomolecular layer can be further improved by adding vinyl or ethynyl groups into an alkyl chain and crosslinking the film with an electron beam irradiation of about 5 Mrads. Furthermore, this invention is not limited to a fluorine-based adsorbent, and an ultra thin hydrocarbon-based film with mechanical strength can be also appiicable. In case of using a glass with its surface containing numerous OH groups as a substrate, a fluorocarbon-based monomolecular or fluorocarbon-based polymer layer can be directly formed on the substrate surface while skipping the procedure of forming a siloxane monomolecular or polysiloxane layer. Example 2 As shown in Figure 8, a back mirror 11 made of an acrylic acid resin as a transparent element was used. Since the surface of the acrylic acid resin is water repellent, it was made hydrophilic by treatment of 100W in a plasma atmosphere comprising oxygen for 20 minutes. The hydrophilic surface contained a few hydroxyl groups 12 (Figure 8); therefore, octachlorosiloxane (Formula 6) comprising chlorosilyl groups was used as an adsorbent for forming an inner layer. A chlorosilane monomolecular layer 13 shown in Figure 9 was formed in the following procedures: preparing a solution by dissolving 10% by weight of the adsorbent (Formula 6) in a nonaqueous solvent, xylene; spraying the solution on the surface of back mirror 11 in a dry air (below 35% relative humidity); letting the substrate sit for about 20 minutes, generating a dehydrochlorination reaction because of hydrophilic OH groups 12 on the surface; washing away the solution left on the substrate surface with Freon 113. Even though a few hydrophilic OH groups were contained on the surface of back mirror 11, a dehydrochlorination reaction was generated, and as in the following formula 7 and/or formula 8, the chlorosilane-based molecules were fixed to the substrate surface via -SiO- bonds (Figure 9). A siloxane monomolecular layer 14 as shown in the following formulas 9 and/or 10 was formed on the surface of back mirror 11 after washing the mirror with Freon and then water (Figure 10). By skipping the procedure of washing the substrate with the Freon solvent and vaporizing the xylene completely, a polysiloxane layer was also formed. Siloxane monomolecular layer 14 or the polysiloxane layer covalently bonded to the surface of back mirror via -SiO- was not peeled off. Siloxane monomolecular layer 14, in addition, had numerous -SiOH bonds on the surface. The number of hydroxyl groups was about seven times more than the number of groups contained on the substrate surface before the reaction. A chemically adsorbed monomolecular outer layer was formed on siloxane monomolecular layer 14 as follows: spraying a xylene solution, dissolved about 2% by weight of CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 , on the surface of back mirror 11 formed with siloxane monomolecular layer 14 or the polysiloxane layer in a dry air (below 35% relative humidity); letting the substrate sit for about 10 minutes, thus forming the bonds as in Formula 5 on the surface of siloxane monomolecular layer 14 or the polysiloxane layer and chemically bonding a chemically adsorbed monomolecular layer 15 comprising fluorine with about 1.5nm uniform thickness on the substrate (Figure 11). A fluorocarbon-based polymer layer was also formed by skipping the procedure of washing the substrate with nonaqueous solvent and leaving the substrate for about one hour to vaporize xylene. Chemically adsorbed monomolecular layer 15 or the polymer layer were not peeled off by a peel test. In testing the back mirror used in the invention, only a water drop about 2mm in diameter adhered because of the water repelling effect of fluorine contained in the chemically adsorbed film on the surface of the mirror. Moreover, in assuming contact of hair to the mirror, a hair tonic was adhered for an experiment. The tonic, however, was repelled, and the mirror was not clouded due to the oil repelling effect of fluorine contained in the film formed on the surface of the mirror. Example 3 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with a polycarbonate resin and that the heptadecafluorodecyl trichlorosilane was replaced with tridecafluorooctyl trichlorosilane (CF 3 (CF 2 ) 5 (CH 2 ) 2 SiCl 3 ). Example 4 An experiment similar to Example 1 was conducted in this example, except that the acrylic acid resin was replaced with a polypropylene resin and that the heptadecafluorooctyl trichlorosilane was replaced with perfluorodecyl trichlorosilane. Example 5 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with an ABS resin. Example 6 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with an epoxy resin. Example 7 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with a polyurethane resin. Example 8 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with a butadiene-styrene rubber resin. Example 9 An experiment similar to Example 2 was conducted in this example, except that the acrylic acid resin was replaced with a butyl rubber resin. Example 10 An experiment similar to Example 2 was conducted in this example, expect that the acrylic acid resin was replaced with a nitrile rubber resin. Example 11 An experiment similar to Example 2 was conducted in this example, except that the heptadecafluorodecyl trichlorosilane was replaced with 18-nonadecenyl trichlorosilane and that the substrate was irradiated with an electron beam of 0.02 Mrad/s and 300keV in a nitrogen atmosphere for one minute after the formation of the chemically adsorbed monomolecular film. Example 12 An experiment similar to Example 2 was conducted in this example, except that the octachlorosiloxane was replaced with tetrachlorosilane. Reference 1 After coating a methanol solution dissolving 2% by weight of a silane coupling agent (heptadecafluorodecyl trimethoxysilane) on the surface of polycarbonate resin, the substrate was dried at the temperature of 120°C for one hour. Reference 2 A chemically adsorbed monomolecular film of heptadecafluorodecyl trichlorosilane was formed by skipping the oxidation treatment of the acrylic acid resin mirror of Example 2. Reference 3 The suspension of polytetrafluoro ethylene was sprayed on the surface of acrylic acid resin mirror of Example 2, and the substrate was dried at the temperature 60°C for one hour. The contact angles of pure water and oil (salad oil produced by Nisshin Co.. Inc.) on the substrates of Examples 1-12 and References 1-3 were measured. The measurements of the contact angles were directed right after the formation of a chemically adsorbed film or a coating film and after rubbing the substrates with a cloth wet with water a total of 10,000 times. The results are shown in Table 1. Contact Angle of Water(°) Contact Angle of Oil(°) Initial Number After Rubbing Test Initial Number After Rubbing Test Example 1 120 118 97 94 Example 2 115 114 92 90 Example 3 112 111 93 92 Example 4 113 111 94 91 Example 5 110 110 94 94 Example 6 111 113 94 92 Example 7 112 108 93 89 Example 8 111 111 93 91 Example 9 112 112 95 90 Example 10 111 109 90 90 Example 11 108 107 92 85 Example 12 105 101 88 83 Reference 1 96 45 65 11 Reference 2 48 48 12 12 Reference 3 110 55 90 18 As clearly seen from Table 1, even after the rubbing tests, the substrates treated according to the invention kept their water and oil repelling and hydrophilic properties. In Reference 1, however, the water and oil repelling properties were reduced significantly. In case of skipping the oxidation treatment as in Reference 2, a chemically adsorbed hard film comprising siloxane bonds might not be formed. The substrates formed with a chemically adsorbed monomolecular layer comprising fluoroalkyl groups had an excellent anti-contaminating property. After the rubbing test, the substrate of Example 1 was dipped and held in a salad oil, and the oil was easily wiped off with tissue paper. However, in case of the substrate in Reference 1, the surface was still contaminated with the oil after being wiped with tissue paper several times. This invention can be applicable as an optical material. The light transmittance of the polycarbonate resin of Example 3 was 92%, which was unchanged from the transmittance before the formation of the chemically adsorbed monomolecular layer. The transmittance of the sample in Reference 3 coated with polytetrafluoroethylene was reduced to below 50%, and the transparency of the film was significantly lost. Example 14 A cyclohexane-based adsorbent comprising numerous chlorosilyl groups such as e.g. SiCl 4 , SiHCl 3 , SiH 2 Cl 2 or Cl(SiCl 2 O) n SiCl 3 (n as an integer) (preferably SiCl 4 with small molecules, highly reactive to hydroxyl groups and capable of making the surface of substrate uniformly hydrophilic) was sprayed on iron scissors, which are hydrophilic but contain few hydroxyl groups. (The material of the scissors can be stainless steel.) The scissors were left for about 30 minutes, and then taken into the air. As a result, a dehydrochlorination reaction was generated because of the hydrophilic OH groups on the surface, and a polysiloxane-based layer comprising silanol bonds was formed after the reaction between the moisture in the air and the substrate. The polysiloxane-based layer was chemically bonded to the scissors via -SiO- bonds, and the layer could be peeled off only by a decomposition reaction. The number of hydroxyl groups on the surface of the polysiloxane layer was increased by about 10 times compared with the number contained before the reaction. A chemically adsorbed built-up film was formed in the following procedures: preparing a chemical adsorption solution containing a nonaqeous solvent and an adsorbent comprising fluorocarbon and chlorosilyl groups - e.g., a mixed solution of 80% by weight of hexadecane, 12% by weight of carbon tetrachloride and 8% by weight of chloroform, containing about 10% by weight of CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 . spraying the solution on the scissors; letting the scissors sit for about one hour; washing the unreacted material on the scissors with a nonaqueous solution such as chloroform; reacting the substrate with water or alternatively with the moisture in the air, thus generating the bonds of CF 3 (CF 2 ) 7 (CH 2 ) 2 Si(O-) 3 on the surface of the polysiloxane layer formed on the surface of the scissors and forming a chemically adsorbed monomolecular layer comprising fluorine over the entire surface of the scissors with the thickness of about 2.0nm. The built-up film was not peeled off by a peel test. Example 15 An aluminum kettle, which is hydrophilic but contains few hydroxyl groups, was used as a substrate. The solution was prepared by dissolving 1% by weight of SiCl 4 comprising numerous chlorosilyl groups in a nonaqueous xylene solvent. The solution was sprayed on the surface of the kettle, and the substrate was left for about 20minutes. Because there are few hydrophilic OH groups on the surface of the aluminum kettle, a dehydrochlorination reaction was generated at the surface. In addition, like Si(Cl) 3 O- or -OSi(Cl) 2 O-, molecules were fixed to the surface via -SiO- bonds. The aluminum kettle was then washed with a nonaqueous solvent such as chloroform, and then with water, thus removing SiCl 4 molecules unreacted with the kettle. Then, a siloxane monomolecular film such as e.g. Si(OH) 3 O- or -OSi(OH) 2 O- was formed on the surface of the aluminum kettle. The monomolecular layer was chemically bonded to the surface of the kettle via -SiO-, and was not peeled off. The number of the hydroxyl groups on the monomolecular layer, comprising numerous SiOH bonds, was increased by around three times more than the number contained before the reaction. A chemical adsorption solution containing a nonaqueous solvent and an adsorbent comprising fluorocarbon and chlorosilane groups - e.g., a chloroform solution dissolving about 1% by weight of CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 - was prepared. The solution was sprayed on the aluminum kettle, and the kettle was left for about an hour at room temperature. The kettle was then reacted with water, or alternatively with the moisture in the air. As a result, the bonds of CF 3 (CF 2 ) 7 (CH 2 ) 2 Si(O-) 3 were created, and a fluorocarbon-based polymer layer comprising fluorine chemically bonded to the siloxane monomolecular layer was formed with the thickness of around 2.0nm over the entire surface of the aluminum kettle. The polymer layer was not peeled off by a peel test. Example 16 A solution obtained by dissolving 15% by weight of SiCl 4 comprising numerous chlorosilyl groups in a chloroform solvent was sprayed on an iron hot plate which is hydrophilic but contains few hydroxyl groups. The plate was then left for about 30 minutes, and the chloroform was vaporized. Since there were few hydrophilic OH groups on the surface of the iron hot plate, a dehydrochlorination reaction was created, thus forming -SiO- groups. After washing the plate with water, a polysiloxane film was formed on the plate by the reaction of the unreacted -SiCl and SiCl 4 molecules. The polysiloxane layer was chemically bonded to the surface of the hot plate via -SiO- bonds, and was not peeled off. On the surface of the polysiloxane layer, numerous SiOH bonds were contained. Furthermore, a nonaqueous solution mixed with the adsorbent comprising fluorocarbon and chlorosilane groups, e.g., Florinate FX3252 (manufactured by 3M) dissolving 5% by weight of CF 3 (CF 2 ) 7 (CH 2 ) 2 SiCl 3 , was sprayed on the surface of the polysiloxane layer comprising numerous SiOH bonds. After leaving the substrate for about one hour, it was reacted with water or the moisture in the air, thus forming the bonds of CF 3 (CF 2 ) 7 (CH 2 ) 2 Si(O-) 3 on the surface. And a fluorocarbon-based polymer layer was chemically bonded to the polysiloxane layer formed on the surface of the hot plate with the thickness of around 20-30nm. The polymer layer was not peeled off by a peel test. Example 17 A fluorocarbon-based monomolecular layer with the thickness of about 1.5nm was formed on a hydrophilic porcelain teacup in the following procedures: preparing a chemical adsorption solution containing a nonaqueous solvent and an adsorbent comprising fluorocarbon chains and chlorosilane groups, e.g., a tetralin solution dissolving 5% by weight of CF 3 (CF 2 ) 5 (CH 2 ) 2 SiCl 3 ; spraying the prepared solution on the hydrophilic porcelain teacup by a spray gun; letting the teacup sit for about one hour; washing away the unreacted adsorbent with a nonaqueous solution such as e.g. chloroform; reacting the teacup with water or alternatively with moisture in the air, thereby generating the bonds of CF 3 (CF 2 ) 5 (CH 2 ) 2 Si(O-) 3 and forming the monomolecular layer on the entire surface of the teacup. The monomolecular layer was excellently transparent, and was not peeled off by a peel test. Example 18 A fluorocarbon-based polymer layer with the thickness of about 10nm was directly formed on the entire surface of a hydrophilic porcelain plate as follows: preparing a chemical adsorption solution containing a nonaqueous solvent and an adsorbent comprising fluorocarbon chains and chlorosilane groups, e.g., a chloroform solution dissolving about 5% by weight of CF 3 (CF 2 ) 5 (CH 2 ) 2 SiCl 3 ; spraying the prepared solution on the porcelain plate; leaving the plate for about one hour and vaporizing the chloroform solution on the plate; reacting the plate with water or alternatively with the moisture in the air, thus creating the bond of CF 3 (CF 2 ) 5 (CH 2 ) 2 Si(O-) 3 and forming the polymer layer on the entire surface of the porcelain plate. The polymer layer was trasparent, and was not peeled off by a peel test. According to the above-noted examples, a fluorocarbon-based monomolecular and polymer layer, which are thin, adherent and pin-hole free, can improve the quality of substrates in need of e.g. anti-heat, weather and friction properties, e.g. electric goods such as hot plates and rice steamers, automobiles, industrial equipment, mirrors, lenses for glasses, interior goods or apparel. In addition, in Examples 1-18, a chemically adsorbed monomolecular or polymer layer can be efficiently manufactured. Example 19 A cyclohexane solution dissolving 1% by volume of heptadecafluorodecyl trichlorosilane was sprayed on the surface of a glass plate (soda glass: 1m x 2m x 0.5cm) in a nitrogen atmosphere, and the plate was left for one hour. The plate was then washed with methanol. As in Figure 12, a chemically adsorbed film was formed on a substrate 21 by spraying micro liquid drops 24 of a nonaqueous solution 23 comprising a chlorosilane adsorbent with a spray gun 22. Figure 13 is a schematic view, enlarged to a molecular level, showing the formation of a chemically adsorbed film 33 on a substrate 31 via siloxane bonds 32. Instead of chlorosilane, thiol was used in case of Figure 14, and a chemically adsorbed film 43 was formed on a substrate 41 via -S- bonds 42. Example 20 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with an aluminum plate. Example 21 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with a copper plate, and that the cyclohexane solution with 1% by volume of heptadecafluorodecyl trichlorosilane was replaced with an ethanol solution dissolving 1% by volume of heptadecafluorodecyl thiol. Example 22 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with an alumite plate. Example 23 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with a ceramic coffee plate. Example 24 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with a nylon fabric. Example 25 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with a polypropylene injection molding plate containing a silica filler. Example 26 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with a plate made of Japanese cypress. Example 27 An experiment similar to Example 19 was conducted in this example, except that the glass plate was replaced with an ordinary paper. Reference 4 The glass plate of Example 19 with reduced size (5cm x 5cm x 0.5cm) was dipped and held in a cyclohexane solution dissolving 1% by volume of heptadecafluorodecyl trichlorosilane in a nitrogen atmosphere for eighteen hours. The plate was washed with cyclohexane, and then with pure water. Reference 5 After dipping and holding a copper plate (5cm x 5cm x 0.5cm) of Example 22 in an ethanol solution dissolving 1% by volume of heptadecafluorodecyl thiol for eighteen hours, the plate was washed with ethanol. The size of the substrates in Examples 19-27 was 5cm X 5cm. The contact angles of water on the substrates in the examples and references were measured by an automatic contact angle gauge (manufactured by Kyowa Kaimen Kagaku: Form CA-Z). And the results are shown in Table 2. Substrate Contact Angle of Water (°) Example 19 Glass Plate 117 Example 20 Aluminum Plate 119 Example 21 Copper Plate 125 Example 22 Alumite Plate 121 Example 23 Ceramics 118 Example 24 Nylon Fabric 151 Example 25 Polypropylene Plate 115 Example 26 Plate of Japanese Cypress 120 Example 27 Ordinary Paper 148 Reference 4 Glass Plate 117 Reference 5 Copper Plate 125 As clearly seen from Table 2, the contact angles of the examples were the same as the angles of the references, whereby a chemically adsorbed film was formed by the method of dipping and holding the substrates.

Claims: A method of manufacturing a chemically adsorbed film, comprising the steps of: spray-coating a solution containing a chlorosilane-based or thiol-based chemical adsorbent on a substrate surface comprising active hydrogen groups in a dry atmosphere having a relative humidity of less than 35%, wherein the chemical adsorbent comprises chlorosilyl or thiol groups at one end of molecules and at least one group selected from the group consisting of a straight hydrocarbon, fluorocarbon and siloxane chain; and generating a condensation reaction between said active hydrogen groups on said substrate surface and said chlorosilyl or thiol groups of said chemical adsorbent and forming a chemically adsorbed film on said substrate surface via covalent bonds. The method of manufacturing a chemically adsorbed film according to claim 1, wherein the formation of a chemically adsorbed monomolecular layer further comprises the steps of: washing away said solution comprising unreacted chlorosilane-based adsorbent left on said substrate surface with a nonaqueous organic solvent after said condensation reaction; reacting said chlorosilyl groups left on said substrate surface with water; drying said substrate surface, thus forming said chemically adsorbed monomolecular layer on said substrate surface via covalent bonds. The method of manufacturing a chemically adsorbed film according to claim 1, wherein the formation of a chemically adsorbed polymer layer comprises the steps of: vaporizing said solution after said condensation reaction; reacting said substrate surface with water; drying said substrate surface, thus forming said chemically adsorbed polymer layer on said substrate surface via covalent bonds. The method of manufacturing a chemically adsorbed film according to claim 1, wherein the formation of a chemically adsorbed film on the surface of an inorganic siloxane-based chemically adsorbed inner layer comprises the steps of: contacting a substrate surface comprising active hydrogen groups with a chlorosilane-based chemical adsorbent comprising numerous chlorosilyl groups in the molecule in a dry atmosphere having a relative humidity of less than 35%; generating a condensation reaction between said active hydrogens on said substrate surface and said chlorosilyl groups of said chemical adsorbent and forming an inorganic siloxane-based chemically adsorbed inner layer; and finally forming a chemically adsorbed film on the surface of said inorganic siloxane-based chemically adsorbed inner layer via covalent bonds. The method of manufacturing a chemically adsorbed film according to claim 4, wherein a chlorosilane-based chemical adsorbent is applied on the surface of said inner layer by a spray gun. The method of manufacturing a chemically adsorbed film according to claim 4, wherein the formation of a chemically adsorbed monomolecular inner layer further comprises the steps of: washing said solution comprising unreacted chlorosilane-based adsorbent comprising numerous chlorosilyl groups in the molecules left on said substrate surface with a nonaqueous organic solvent after said condensation reaction; reacting said chlorosilyl groups remaining on said substrate surface with water; drying said substrate surface, thus forming said chemically adsorbed monomolecular inner layer. The method of manufacturing a chemically adsorbed film according to claim 4, wherein the formation of a chemically adsorbed polymer inner layer comprises the steps of: vaporizing said solution on said substrate surface after said condensation reaction between said active hydrogen groups on said surface and said chlorosilyl groups of said chemical adsorbent; reacting said substrate surface with water; drying said substrate surface. The method of manufacturing a chemically adsorbed film according to claim 1, 2, 3, 4, 5, 6 or 7, wherein at least one part of the hydrocarbon chain of said chlorosilane-based chemical adsorbent is substituted with a -CF 2 - group. The method of manufacturing a chemically adsorbed film according to claim 1, 2, 3, 4, 5, 6 or 7, wherein CF 3 (CF 2 ) n (R) m SiX p Cl 3-p (wherein n represents 0 or an integer; R represents an alkylene, vinylene, ethynylene, arylene group or a divalent group comprising a silicon or oxygen atom; m represents 0 or 1; X represents H, an alkyl, alkoxy group or a substituent comprising a fluoroalkyl or fluoroalkoxy group; p represents 0, 1 or 2) is used as said chlorosilane-based chemical adsorbent. The method of manufacturing a chemically adsorbed film according to claim 4, 5, 6 or 7, wherein said chlorosilane-based adsorbent comprising numerous chlorosilyl groups in the molecule used for forming said inner layer comprises at least one compound selected from the group consisting of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 and Cl(SiCl 2 O) n SiCl 3 (n represents an integer). The method of manufacturing a chemically adsorbed film according to claim 1, 2, 3, 4, 6 or 7, wherein a substrate is selected from the group consisting of metals, ceramics, glass, plastic, polymers, paper, fiber and leather. The method of manufacturing a chemically adsorbed film according to claim 11, wherein active hydrogens are added to said substrate beforehand by treatment in a plasma or corona atmosphere comprising oxygen. The method of manufacturing a chemically adsorbed film according to claim 1, 2, 3, 4, 5, 6 or 7, wherein chemical adsorption reaction treatments are directed in an atmosphere with relative humidity of 30% or less. The method of manufacturing a chemically adsorbed film according to claim 2 or 6, wherein the boiling point of said solution comprising said chlorosilane-based adsorbent is 100°C or above. The method of manufacturing a chemically adsorbed film according to claim 3 or 7, wherein the boiling point of said solution comprising said chlorosilane-based adsorbent is between room temperature and 100°C. The method of manufacturing a chemically adsorbed film according to claim 1 or 5, wherein said solution is sprayed by a spray gun.

Inventors: IKUTA SHIGEO, OGAWA KAZUFUMI, OZAKI SHINZI, SOGA MAMORU, IKUTA, SHIGEO, OGAWA, KAZUFUMI, OZAKI, SHINZI, SOGA, MAMORU
Applicants: MATSUSHITA ELECTRIC IND CO LTD, MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Application year: 1993
Main classification: C09D183
IPC codes: B05D1, C09D4