Catadioptric reduction projection optical system

Abstract: A catadioptric reduction projection optical system includes a first partial optical system including, in succession from the object side, a first lens group of positive refractive power and a first concave reflection mirror, and for forming a primary image of an object, and a second partial optical system including, in succession from the object side, a second concave reflection mirror and a third lens group of positive refractive power, and for re-imaging the primary image. A second lens group of positive or negative refractive power is arranged in the optical path between the first and second concave reflection mirrors.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a catadioptric optical system and, more particularly, to an imaging optical system for performing reduction projection. Related Background Art Various optical systems for projecting and exposing a mask pattern onto a photoresist on a wafer to manufacture an integrated circuit such as an LSI have been proposed. It is known that an aberration is well corrected at a relatively large aperture in a Dyson type catadioptric optical system. However, since the imaging magnification in the Dyson type catadioptric system is unity, there is a limit in the transfer of a fine pattern. As an optical system having a reduction factor suitable for the manufacture of a semiconductor device having a finer pattern, an optical system which is a modification of the Dyson type catadioptric optical system is disclosed in U.S. Patent 4,747,678 and U.S. Patent 4,953,960. Although the optical system disclosed in U.S. Patent 4,747,678 which permits reduction projection allows imaging in a reduction scale having a ring-shaped view field, it basically has three concave mirrors and a convex mirror, and must be combined with a number of lenses in the use of an exposure apparatus for microlithography, resulting in a very complicated optical construction. The reduction optical system disclosed in U.S. Patent 4,953,960 comprises a combination of a concave mirror and a lens system. Since this optical system attains reduction mainly using the concave mirror, the aberration is large, and a number of lenses must be combined to correct the aberrations. EP-A-527,043, which is prior art only by virtue of Article 54(3) EPC, describes a catadioptric reduction projection optical system comprising a first sub-system including, in succession from the object side, a first lens group of positive refractive power and a first concave reflection mirror for forming a primary image of an object, a second optical sub-system including, in succession from the object side, a second concave reflection mirror and a third lens group of positive refractive power for re-imaging the primary image, and a second lens group of positive refractive power arranged in an optical path between the first concave reflection mirror and the second concave reflection mirror. SUMMARY OF THE INVENTION It would be desirable to provide a catadioptric reduction projection optical system, which has an excellent imaging performance as an optical system used in the manufacture of a semiconductor device, and has a large numerical aperture. In accordance with the present invention there is provided a catadioptric reduction projection optical system comprising: a first sub-system for forming a primary image I 1 of an object and including, in succession from an object side, a first lens group G 1 of positive refractive power and a first concave reflection mirror M 1 , and a second sub-system for re-imaging the primary image and including, in succession from the object side, a second lens group G 2 of positive or negative refractive power, a second concave reflection mirror M 2 and a third lens group G 3 of positive refractive power, and wherein a magnification β G3 of said third lens group G 3 satisfies: 0.05 < β G3 < 0.6, and wherein a magnification β M1 of said first concave reflection mirror M 1 satisfies: β M1 < -0.7. In the catadioptric reduction projection optical system according to the present invention with the above construction, the first and second partial optical systems each have a concave reflection mirror having chief refractive power and a lens group (first or third lens group G 1 or G 3 ) of positive refractive power, and both make reduction imaging possible. Therefore, a predetermined reduction factor can be obtained as a whole system without forcing each partial optical system to bear a great burden in aberration correction. For this reason, it is possible to simplify the optical construction and yet maintain an excellent imaging performance. A catadioptric reduction projection optical system according to one embodiment of the present invention comprises: a first partial optical system including, in succession from the object side, a first lens group G 1 of positive refractive power and a first concave reflection mirror M 1 , and for forming a primary image of an object; and a second partial optical system including, in succession from the object side, a second concave reflection mirror M 2 and a third lens group G 3 of positive refractive power, and for re-imaging the primary image, wherein a second lens group G 2 of positive or negative refractive power is arranged in an optical path between the first and second concave reflection mirrors M 1 and M 2 , and at least one of the first to third lens groups G 1 to G 3 is constituted by at least two different glass materials. Thus, chromatic aberration is corrected satisfactorily, and the imaging performance can be further improved. The catadioptric reduction projection optical system according to the present invention satisfies: 0.05 < β G3 < 0.6 where β G3 is the magnification of the third lens group G 3 of positive refractive power. This condition defines a proper magnification of the third lens group G 3 , and allows to realize a catadioptric reduction projection optical system having an excellent optical performance, and to obtain a physically constructible catadioptric reduction projection optical system. The physically constructible optical system means an optical system in which optical members do not interfere with each other in an arrangement of optical members constituting the catadioptric reduction projection optical system. When β G3 exceeds the upper limit of the above-mentioned condition (1), a light beam propagating between the concave reflection mirrors M 1 and M 2 considerably overlaps a light beam propagating from the concave reflection mirror M 2 to the secondary image surface, and the arrangement of optical members constituting the catadioptric reduction projection optical system cannot be realized. When β G3 is set below the lower limit of the above-mentioned condition (1), the refractive power of the third lens group G 3 increases, and coma and chromatic aberration are generated considerably. The catadioptric reduction projection optical system according to the present invention satisfies: β M1 < -0.7 where β M1 is the magnification of the first concave reflection mirror M 1 . This condition defines a proper magnification of the first concave reflection mirror M 1 . When β M1 exceeds the upper limit of the condition (2), the refractive power of the first concave reflection mirror M 1 increases, and aberrations, especially, spherical aberration and coma, generated by the first concave reflection mirror M 1 increase. In order to cancel these aberrations, the negative refractive power of a refracting optical system must be strengthened, and it becomes difficult to satisfactorily correct these aberrations. Conversely, β M1 preferably satisfies the condition -2.0 < β M1 . When β M1 is set below -2.0, the refractive power of the refracting optical power must be strengthened to compensate for a decrease in refractive power of the concave reflection mirror M 1 . At this time, the merits of a reflecting optical system are lost, the construction of the refracting optical system is more complicated, and it also becomes difficult to attain aberration correction. The catadioptric reduction projection optical system according to the present invention preferably satisfies: -2.5 < β M2 < -0.7 where β M2 is the magnification of the second concave reflection mirror M 2 . This condition (3) defines a proper magnification of the second reflection mirror M 2 . When β M2 exceeds the upper limit of the condition (3), the refractive power of the concave reflection mirror M 2 increases, and aberrations, especially, spherical aberration and coma, generated by the this concave reflection mirror M 2 increase. As a result, it becomes difficult to satisfactorily correct the aberrations. Furthermore, a light beam propagating toward the concave reflection mirror M 2 considerably overlaps a light beam propagating from the concave reflection mirror M 2 toward the secondary image surface, and it becomes difficult to obtain a physically constructible optical system. When β M2 is set below the lower limit of the condition, the refractive power of the concave reflection mirror M 2 decreases, and the refracting optical system must compensate for the decrease in refractive power, thus losing merits of the reflecting optical system. At this time, the construction of the refracting optical system is more complicated, and it also becomes difficult to attain aberration correction. The balance of aberration of the lens groups in the catadioptric reduction projection optical system according to the present invention will now be discussed. The first lens group G 1 is arranged in the vicinity of the object surface, has a function of maintaining telecentric characteristics, and corrects distortion. The second and third lens groups G 2 and G 3 contribute to formation of the reduced image and to correction of the Petzval sum. In particular, the second lens group G 2 functions as a so-called field lens, and allows a light beam from a position near the optical axis of the first concave reflection mirror M 1 to pass therethrough. Thus, the light beam through second concave mirror M 2 at a position near the optical axis and generation of aberration in the second concave reflection mirror M 2 can be prevented. The negative distortion generated in the second and third lens groups G 2 and G 3 is corrected by the positive distortion of the first lens group G 1 . Lens groups (fourth and fifth lens groups G 4 and G 5 ) provisionally disposed in the vicinity of the concave reflection mirrors are effective to correct higher order spherical aberration generated by the concave reflection mirrors. When the concave reflection mirror is constituted to be a non-spherical mirror, since aberration generated by the concave reflection mirror is minimized, the fourth and fifth lens groups G 4 and G 5 may be omitted. Other objects, features, and effects of the present invention will become apparent from the following detailed description taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 shows an optical path of a first embodiment according to the present invention; Fig. 2 shows aberration of the first embodiment according to the present invention; Fig. 3 shows an optical path of a second embodiment according to the present invention; Fig. 4 shows aberration of the second embodiment according to the present invention; Fig. 5 shows an optical path of a third embodiment according to the present invention; Fig. 6 shows aberration of the third embodiment according to the present invention; Fig. 7 shows an optical path of a fourth embodiment according to the present invention; Fig. 8 shows aberration of the fourth embodiment according to the present invention; Fig. 9 shows an optical path of a fifth embodiment according to the present invention; Fig. 10 shows aberration of the fifth embodiment according to the present invention; Fig. 11 shows an optical path of a sixth embodiment according to the present invention; Fig. 12 shows aberration of the sixth embodiment according to the present invention; Fig. 13 shows an optical path of a seventh embodiment according to the present invention; Fig. 14 shows aberration of the seventh embodiment according to the present invention; Fig. 15 shows an optical path of an eighth embodiment according to the present invention; and Fig. 16 shows aberration of the eighth embodiment according to the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENTS The preferred embodiments of the present invention will be described in detail hereinafter with reference to the accompanying drawings. Fig. 1 is an optical path diagram showing a construction of the first embodiment according to the present invention. As shown in Fig. 1, a light beam from an object surface passes through a first lens group G 1 which comprises a biconvex positive lens L 11 , a positive meniscus lens L 12 having a convex surface facing the object side, and a negative meniscus lens L 13 having a convex surface facing the object side, and has positive refractive power as a whole, and is reflected by a first concave reflection mirror M 1 having a magnification slightly smaller than unity. Then, the optical path is bent by a planar reflection mirror M 3 . The first lens group G 1 mainly functions to correct distortion and to maintain telecentric characteristics. The first lens group G 1 and the first concave reflection mirror M 1 form a primary reduced image I 1 . A light beam from the primary image I 1 passes through a second lens group G 2 comprising a positive meniscus lens L 21 having a convex surface facing the primary image side, a negative meniscus lens L 22 having a concave surface facing the primary image side, and a biconvex positive lens L 23 , and reaches a second concave reflection mirror M 2 having an enlargement factor via a fourth lens group G 4 having negative refractive power. The second lens group G 2 mainly functions to correct distortion and curvature of field, and functions as a field lens. The fourth lens group G 4 comprises a negative meniscus lens having a convex surface facing the second concave reflection mirror M 2 side, and functions to correct aberrations caused by the first and second concave reflection mirrors M 1 and M 2 . The light beam reflected by the second concave reflection mirror M 2 passes through the fourth lens group G 4 again, and then becomes incident on a third lens group G 3 having positive refractive power. The third lens group G 3 comprises, in succession from the incident side of a light beam, a negative meniscus lens L 31 having a concave lens facing the incident side, a positive meniscus lens L 32 having a convex surface facing the incident side, a positive meniscus lens L 33 having a convex surface facing the incident side, a biconcave negative lens L 34 , a biconvex positive lens L 35 , a positive meniscus lens L 36 having a convex surface facing the incident side, and a positive meniscus lens L 37 having a convex surface facing the incident side. The third lens group G 3 has a positive Petzval sum to cancel the function of making the Petzval sum by the first and second concave reflection mirrors M 1 and M 2 negative. The third lens group G 3 forms a second image I 2 in a larger reduction scale than that of the primary image I 1 . In the above-mentioned construction, the first lens group G 1 and the first concave reflection mirror M 1 constitute a first partial optical system, and the second concave reflection mirror M 2 and the third lens group G 3 constitute a second partial optical system. The second lens group G 2 is disposed in the optical path between the first and second concave reflection mirrors M 1 and M 2 . The planar reflection mirror M 3 for bending the optical path is obliquely disposed near the first lens group G 1 at an angle of 45° with respect to an optical axis Ax 1 of the first partial optical system, so that an optical axis Ax 2 of the second partial optical system extends perpendicular to the optical axis Ax 1 of the first partial optical system. The second lens group G 2 is disposed only one side of the second partial optical system so as to focus light reflected by the first concave reflection mirror M 1 without shielding a light beam propagating toward the second concave reflection mirror M 2 . The first embodiment has a reduction factor of +0.20 or 1/5 as a whole, and achieves a numerical aperture of (N.A.) of 0.45 in a ring-shaped view field centered at an arc having a radius of 20 mm from the optical axis. Table 1 below shows data of the first embodiment. In Table 1, the signs of the refractive index and the plane-to-plane distance are reversed by reflection by the concave reflection mirror. The refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Note that the position of the planar reflection mirror M 3 for bending the optical path is omitted since it is not essential in the optical design. Data of First Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 256.414 1.0000 1 571.882 35.000 1.50890 (quartz) L 11 2 -1107.127 13.569 1.0000 3 286.383 38.000 1.50890 (quartz) L 12 4 2061.034 143.443 1.0000 5 323.826 20.000 1.50890 (quartz) L 13 6 134.427 535.000 1.0000 7 -816.864 -800.000 -1.0000 M 1 8 -435.732 -25.000 -1.50890 (quartz) L 21 9 -664.126 -96.462 -1.0000 10 231.231 -25.000 -1.50890 (quartz) L 22 11 750.143 -107.120 -1.0000 12 -622.742 -59.000 -1.50890 (quartz) L 23 13 723.951 -616.105 -1.0000 14 259.861 -25.000 -1.50890 (quartz) G 4 15 891.669 -28.536 -1.0000 16 537.817 28.536 1.0000 M 2 17 891.669 25.000 1.50890 (quartz) G 4 18 259.861 602.523 1.0000 19 -1642.894 12.745 1.50890 (quartz) L 31 20 -356.710 2.000 1.0000 21 166.981 32.465 1.50890 (quartz) L 32 22 -4368.603 0.201 1.0000 23 188.353 14.825 1.50890 (quartz) L 33 24 489.910 10.157 1.0000 25 -401.443 10.220 1.50890 (quartz) L 34 26 370.153 3.669 1.0000 27 1112.370 53.780 1.50890 (quartz) L 35 28 -387.055 0.100 1.0000 29 106.932 70.805 1.50890 (quartz) L 36 30 329.200 0.100 1.0000 31 153.221 12.340 1.50890 (quartz) L 37 32 983.363 10.000 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.0761 β M1 = -0.8606 β M2 = -1.225 Fig. 2 shows coma for explaining the imaging performance of the first embodiment. Fig. 2 shows coma in the meridional direction at the center of the ring-shaped view field. As can be seen from Fig. 2, this embodiment maintains an excellent imaging performance. As shown in Fig. 3, in a second embodiment according to the present invention, a light beam from the object surface passes through a first lens group G 1 which comprises a biconvex positive lens L 11 , a positive meniscus lens L 12 having a convex surface facing the incident side of the light beam, and a negative meniscus lens L 13 having a convex surface facing the incident side, and has positive refractive power as a whole, and is then reflected by a first concave reflection mirror M 1 having a magnification slightly smaller than unity. The reflected light beam is deflected by a planar reflection mirror M 3 which is obliquely disposed at 45° with respect to an optical axis Ax 1 of the first lens group G 1 , and then becomes incident on a second lens group G 2 of negative refractive power. The second lens group G 2 comprises, in succession from the incident side of a light beam, a negative lens L 21 having a substantially plano-concave shape, a negative meniscus lens L 22 having a concave surface facing the incident side, and a positive meniscus lens L 23 having a concave surface facing the incident side, and forms a primary image I 1 as a reduced image of an object in the negative lens L 21 . The light beam emerging from the second lens group G 2 is reflected by a second concave reflection mirror M 2 having a magnification larger than unity via a fourth lens group G 4 of negative refractive power. The fourth lens group G 4 comprises a negative meniscus lens having a convex surface facing the second concave reflection mirror M 2 . The light beam reflected by the second concave reflection mirror M 2 is deflected by a planar reflection mirror M 4 , which is obliquely arranged at 45° with respect to an optical axis Ax 2 of the second lens group G 2 , via the fourth lens group G 4 again, and becomes incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises, in succession from the incident side of a light beam, a biconvex positive lens L 31 , a negative meniscus lens L 32 having a concave surface facing the incident side, a biconvex positive lens L 33 , a negative meniscus lens L 34 having a concave surface facing the incident side, a positive meniscus lens L 35 having a concave surface facing the incident side, a negative meniscus lens L 36 having a concave surface facing the incident side, and a positive meniscus lens L 37 having a convex surface facing the incident side, and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 . The negative lens L 21 in the second lens group G 2 is arranged at only one side so as not to shield a light beam passing through the first lens group G 1 . The second embodiment, as well, has a reduction factor of +0.20 or 1/5 as a whole, and achieves a numerical aperture of (N.A.) of 0.45 in a ring-shaped view field centered at an arc having a radius of 20 mm from the optical axis. Table 2 below shows data of the second embodiment. In Table 2, the refractive index of each glass material corresponds to that at the wavelength (193 nm) of ArF. Data of Second Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 169.405 1.0000 1 901.701 30.575 1.560194 (quartz) L 11 2 -510.578 65.853 1.0000 3 220.954 60.000 1.560194 (quartz) L 12 4 318.898 110.000 1.0000 5 295.985 33.350 1.560194 (quartz) L 13 6 109.856 544.112 1.0000 7 -644.876 -578.247 -1.0000 M 1 8 125.313 -20.000 -1.560194 (quartz) L 21 9 -19308.942 -133.068 -1.0000 10 285.898 -40.367 -1.560194 (quartz) L 22 11 239.639 -32.560 -1.0000 12 838.750 -48.824 -1.560194 (quartz) L 23 13 270.000 -413.387 -1.0000 14 690.339 -20.000 -1.560194 (quartz) G 4 15 1371.252 -85.603 -1.0000 16 769.864 85.603 1.0000 M 2 17 1371.252 20.000 1.560194 (quartz) G 4 18 690.339 478.013 1.0000 19 193.080 19.107 1.501375 (fluorite) L 31 20 -330.493 3.128 1.0000 21 -237.620 4.8000 1.560194 (quartz) L 32 22 -404.696 0.100 1.0000 23 84.943 25.587 1.501375 (fluorite) L 33 24 -168.592 0.362 1.0000 25 -164.717 13.099 1.560194 (quartz) L 34 26 -296.532 2.263 1.0000 27 -201.221 24.203 1.501375 (fluorite) L 35 28 -184.897 0.552 1.0000 29 -353.513 16.515 1.560194 (quartz) L 36 30 -514.935 0.691 1.0000 31 170.098 29.846 1.560194 (quartz) L 37 32 642.145 6.065 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.2013 β M1 = -0.762 β M2 = -0.974 Fig. 4 shows coma for explaining the imaging performance of the second embodiment. Fig. 4 shows coma in the meridional direction at the center of the ring-shaped view field. Note that a broken curve in Fig. 4 represents coma at 193.3 nm, a broken curve longer the curve representing coma at 193.3 nm represents coma at 192.9 nm, and a dotted curve represents coma at 193.7 nm. As can be seen from Fig. 4, the second embodiment can achieve correction of chromatic aberration within a range of ±0.4 nm at the wavelength of ArF, and maintains an excellent imaging performance. A third embodiment of the present invention will be described below with reference to Fig. 5. Referring to Fig. 5, a light beam from the object surface passes through a first lens group G 1 which comprises a positive meniscus lens L 11 having a concave surface facing the incident side of a light beam, a biconvex positive lens L 12 , and a biconcave negative lens L 13 , and has positive refractive power as a whole, and becomes incident on a first concave reflection mirror M 1 , which has a magnification slightly smaller than unity, via a fifth lens group G 5 . The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror M 1 , and functions to correct aberration generated by the first concave reflection mirror M 1 and second concave reflection mirror M 2 . The light beam reflected by the first concave reflection mirror M 1 is deflected by a planar reflection mirror M 3 via the fifth lens group G 5 again, and becomes incident on a second lens group G 2 of positive refractive power. The planar reflection mirror M 3 is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 in the optical path between the fifth and first lens group G 5 and G 1 . The second lens group G 2 comprises a biconvex positive lens L 21 , a biconcave negative lens L 22 , and a positive meniscus lens L 23 having a concave surface facing the incident side of a light beam. The light beam incident on the second lens group G 2 forms a primary image I 1 as a reduced image of an object in the negative lens L 22 . The light beam emerging from the second lens group G 2 is deflected by a fourth planar reflection mirror M 4 which is obliquely arranged at 45° with respect to an optical axis Ax 2 of the second lens group G 2 , is reflected by the second concave reflection mirror M 2 having a magnification larger than unity, and then becomes incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises a biconvex positive lens L 31 , a negative meniscus lens L 32 having a convex surface facing the incident side, a positive meniscus lens L 33 having a convex surface facing the incident side, a biconcave negative lens L 34 , a biconvex positive lens L 35 , a positive meniscus lens L 36 having a convex surface facing the incident side, and a positive meniscus lens L 37 having a convex surface facing the incident side. The third lens group G 3 forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 at the exit side thereof. The third embodiment has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.45 in a ring-shaped view field centered at an arc having a radius of 20 mm from the optical axis. Table 3 below shows data of the third embodiment. In Table 3, the refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Data of Third Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 196.209 1.0000 1 -1726.924 54.622 1.508385 (quartz) L 11 2 260.643 0.100 1.0000 3 214.288 55.000 1.508385 (quartz) L 12 4 -3184.516 61.226 1.0000 5 -634.272 15.000 1.508385 (quartz) L 13 6 142.779 209.364 1.0000 7 -324.815 20.000 1.508385 (quartz) G 5 8 -1599.830 223.380 1.0000 9 -537.154 -223.380 -1.0000 M 1 10 -1599.830 -20.000 -1.508385 (quartz) G 5 11 -324.815 -355.860 -1.0000 12 -286.947 -55.000 -1.508385 (quartz) L 21 13 1629.963 -101.890 -1.0000 14 165.609 -15.000 -1.508385 (quartz) L 22 15 -750.059 -20.606 -1.0000 16 343.901 -39.768 -1.508385 (quartz) L 23 17 154.033 -630.899 -1.0000 18 962.895 630.899 1.0000 M 2 19 149.915 32.150 1.467877 (fluorite) L 31 20 -187.485 0.100 1.0000 21 -186.839 7.000 1.508385 (quartz) L 32 22 -727.375 0.100 1.0000 23 117.358 20.864 1.508385 (quartz) L 33 24 647.785 8.591 1.0000 25 -284.413 15.450 1.508385 (quartz) L 34 26 193.285 4.300 1.0000 27 388.801 36.187 1.467877 (fluorite) L 35 28 -216.450 0.100 1.0000 29 113.246 19.238 1.467877 (fluorite) L 36 30 459.066 0.100 1.0000 31 221.661 33.854 1.508385 (quartz) L 37 32 1502.269 15.400 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.1342 β M1 = -1.058 β M2 = -2.008 Fig. 6 shows coma for explaining the imaging performance of the third embodiment. Fig. 6 shows coma in the meridional direction at the center of the ring-shaped view field. Note that a solid curve in Fig. 6 represents coma at 248.4 nm, an alternate long and short dashed curve represents coma at 252.4 nm, and an alternate long and two short dashed curve represents coma at 244.4 nm. As can be seen from Fig. 6, the third embodiment can achieve correction of chromatic aberration within a range of ±4 nm at the wavelength of KrF, and maintains an excellent imaging performance. A fourth embodiment of the present invention will be described below with reference to Fig. 7. In the fourth embodiment, as shown in Fig. 7, a light beam from the object surface is incident on a first lens group G 1 of positive refractive power. In the first lens group G 1 , the light beam passes through a positive meniscus lens L 11 having a concave surface facing the incident side of a light beam, and is then deflected by a planar reflection mirror M 3 which is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 . The deflected light beam passes through a biconvex positive lens L 12 and a negative meniscus lens L 13 having a convex surface facing the incident side of a light beam, and then reaches a first concave reflection mirror M 1 having a magnification slightly smaller than unity via a fifth lens group G 5 of negative refractive power. The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror side. The light beam reflected by the first concave reflection mirror M 1 forms a primary image I 1 as a reduced image of an object via the fifth lens group G 5 again and a second lens group G 2 of positive refractive power. The second lens group G 2 comprises, in succession from the incident side of a light beam, a biconvex positive lens L 21 , a negative meniscus lens L 22 having a concave surface facing the incident side, and a positive meniscus lens L 23 having a concave surface facing the incident side. The light beam from the primary image I 1 is reflected by a second concave reflection mirror M 2 having a magnification larger than unity. The optical path of the reflected light beam is deflected by a planar reflection mirror M 4 , and the light beam then reaches a third lens group G 3 of positive refractive power. The planar reflection mirror M 4 is obliquely arranged at 45° with respect to an optical axis Ax 3 of the third lens group G 3 . The third lens group G 3 comprises, in succession from the incident side of a light beam, a biconvex positive lens L 31 , a negative meniscus lens L 32 having a concave surface facing the incident side, a positive meniscus lens L 33 having a convex lens facing the incident side, a biconcave negative lens L 34 , a positive meniscus lens L 35 having a convex surface facing the incident side, a positive meniscus lens L 36 having a convex surface facing the incident side, and a positive meniscus lens L 37 having a convex surface facing the incident side, and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 at its exit side. The positive lens L 12 and the negative lens L 13 of the first lens group G 1 are arranged at only one side so as to allow a light beam toward the first concave reflection mirror to pass therethrough without shielding a light beam in the second lens group G 2 . The second lens group G 2 is arranged at only one side so as to guide a light beam from the first concave reflection mirror M 1 without shielding a light beam in the first lens group G 1 . The fourth embodiment has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.30 in a ring-shaped view field centered at an arc having a radius of 20 mm from the optical axis. Table 4 below shows data of the fourth embodiment. In Table 4, the refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Data of Fourth Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 196.018 1.0000 1 -5157.341 35.000 1.508385 (quartz) L 11 2 -342.424 264.350 1.0000 3 418.888 35.000 1.508385 (quartz) L 12 4 -2971.961 0.100 1.0000 5 479.951 35.000 1.508385 (quartz) L 13 6 219.080 314.800 1.0000 7 -194.621 18.000 1.508385 (quartz) G 5 8 -370.491 159.400 1.0000 9 -586.251 -159.400 -1.0000 M 1 10 -370.491 -18.000 -1.508385 (quartz) G 5 11 -194.621 -187.600 -1.0000 12 -275.679 35.500 -1.508385 (quartz) L 21 13 507.601 -112.350 -1.0000 14 144.909 -6.500 -1.508385 (quartz) L 22 15 -700.764 -35.700 -1.0000 16 198.506 -35.000 -1.508385 (quartz) L 23 17 137.057 -793.600 -1.0000 18 934.699 697.100 1.0000 M 2 19 167.048 23.800 1.467877 (fluorite) L 31 20 -305.250 3.250 1.0000 21 -269.515 6.500 1.508385 (quartz) L 32 22 1602.279 0.100 1.0000 23 83.085 35.000 1.467877 (fluorite) L 33 24 534.963 8.000 1.0000 25 -2442.622 28.500 1.508385 (quartz) L 34 26 51.803 1.350 1.0000 27 52.498 23.600 1.467877 (fluorite) L 35 28 895.515 0.100 1.0000 29 159.859 23.400 1.467877 (fluorite) L 36 30 1657.174 0.100 1.0000 31 216.018 7.500 1.508385 (quartz) L 37 32 434.319 15.000 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.2035 β M1 = -0.8795 β M2 = -1.684 Fig. 8 shows coma for explaining the imaging performance of the fourth embodiment. Fig. 8 shows coma in the meridional direction at the center of the ring-shaped view field. Note that a solid curve in Fig. 8 represents coma at 248.4 nm, a broken curve represents coma at 238.4 nm, and a dotted curve represents coma at 258.4 nm. As can be seen from Fig. 8, the fourth embodiment can achieve correction of chromatic aberration within a range of ±10 nm at the wavelength of KrF, and maintains an excellent imaging performance. A fifth embodiment of the present invention will be described below with reference to Fig. 9. In the fifth embodiment shown in Fig. 9, a second concave reflection mirror M 2 comprises a reflection mirror having a non-spherical surface. Referring to Fig. 9, a light beam from the object surface reaches a first concave reflection mirror M 1 having a magnification slightly smaller than unity via a first lens group G 1 which comprises a positive meniscus lens L 11 having a concave surface facing the incident side of a light beam, a positive meniscus lens L 12 having a convex surface facing the incident side, a positive meniscus lens L 13 having a convex surface facing the incident side, and a positive meniscus lens L 14 having a convex surface facing the incident side, and has positive refractive power as a whole, and a fifth lens group G 5 of negative refractive power. The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror side. The light beam reflected by the first concave reflection mirror M 1 is deflected by a planar reflection mirror M 3 , which is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 , via the fifth lens group G 5 again, and then becomes incident on a second lens group G 2 of negative refractive power. The second lens group G 2 comprises a biconvex positive lens L 21 , a biconcave negative lens L 22 , and a positive meniscus lens L 23 having a convex surface facing the incident side of a light beam, and forms a primary reduced image I 1 at its exit side. The light beam from the primary image I 1 is deflected by a planar reflection mirror M 4 which is obliquely arranged at 45° with respect to an optical axis Ax 2 of the second lens group G 2 , and reaches a second concave reflection mirror M 2 having a magnification larger than unity and a non-spherical shape. The light beam reflected by the second concave reflection mirror M 2 becomes incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises a biconvex positive lens L 31 , a biconcave negative lens L 32 , a biconvex positive lens L 33 , a positive meniscus lens L 34 having a convex surface facing the incident side of a light beam, a positive meniscus lens L 35 having a convex surface facing the incident side, a negative meniscus lens L 36 having a convex surface facing the incident side, and a positive meniscus lens L 37 having a convex surface facing the incident side, and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 . The fifth embodiment has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.5 in a ring-shaped view field centered at an arc having a radius of 24.25 mm from the optical axis. Table 5 below shows data of the fifth embodiment. In Table 5, as for the non-spherical reflection surface, only the radius of paraxial curvature is presented, and when a tangential plane at the vertex of a non-spherical surface is considered, a position, where the optical axis passes, on the tangential plane is defined as an origin, and a displacement, in the optical axis direction, of the non-spherical surface at a position of a height y on the tangential plane is represented by x with reference to the vertex of the non-spherical surface while the propagating direction of light is assumed to be the positive direction, the non-spherical surface shape is given by the following equation: x = cy 2 /{1 + (1 - κc 2 y 2 ) 1/2 } + C 4 y 4 + C 6 y 6 + C 8 y 8 + C 10 y 10 where c is the curvature (the reciprocal number of the radius r of curvature) of the non-spherical surface at the vertex of the non-spherical surface, κ is a quadrics parameter, and C 4 , C 6 , C 8 , and C 10 are non-spherical surface coefficients. In Table 5, the refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Fifth Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 537.071 1.0000 1 -13337.695 38.029 1.508385 (quartz) L 11 2 -559.442 0.100 1.0000 3 329.313 71.406 1.508385 (quartz) L 12 4 4423.247 0.100 1.0000 5 208.809 57.000 1.508385 (quartz) L 13 6 247.488 54.831 1.0000 7 889.869 50.000 1.508385 (quartz) L 14 8 140.636 362.130 1.0000 9 -277.199 15.000 1.508385 (quartz) G 5 10 -485.421 540.415 1.0000 11 -1017.359 -540.415 -1.0000 M 1 12 -485.421 -15.000 -1.508385 (quartz) G 5 13 -277.199 -326.174 -1.0000 14 -494.427 -48.250 -1.508385 (quartz) L 21 15 491.077 -38.033 -1.0000 16 361.893 -10.000 -1.508385 (quartz) L 22 17 -260.009 -40.978 -1.0000 18 -279.421 -17.860 -1.508385 (quartz) L 23 19 -543.231 -934.426 -1.0000 20 1153.584 773.262 1.0000 (non-spherical) M 2 21 187.601 29.381 1.467877 (fluorite) L 31 22 -1450.353 6.033 1.0000 23 -391.392 9.000 1.508385 (quartz) L 32 24 179.475 3.183 1.0000 25 213.669 29.199 1.467877 (fluorite) L 33 26 -621.952 0.100 1.0000 27 137.369 29.803 1.508385 (quartz) L 34 28 458.595 0.100 1.0000 29 135.180 28.421 1.467877 (fluorite) L 35 30 268.007 0.100 1.0000 31 121.989 16.840 1.508385 (quartz) L 36 32 87.217 11.990 1.0000 33 111.525 42.765 1.467877 (fluorite) L 37 34 841.067 19.747 1.0000 35 (Image Surface) <Non-spherical Surface Coefficient> 21st surface (second concave reflection mirror M 2 ) κ 1.0 C 4 0.980896 × 10 -10 C 6 0.374676 × 10 -15 C 8 0.830862 × 10 -21 C 10 0.705084 × 10 -26 <Condition Corresponding Values> β G3 = 0.157 β M1 = -0.811 β M2 = -1.733 Fig. 10 shows coma of the fifth embodiment. Fig. 10 shows coma in the meridional direction at the center of the ring-shaped view field. As can be seen from Fig. 10, the fifth embodiment maintains an excellent imaging performance. A sixth embodiment of the present invention will be described below with reference to Fig. 11. In the sixth embodiment, each of first and second concave reflection mirrors M 1 and M 2 has a non-spherical reflection surface. Referring to Fig. 11, a light beam from the object surface passes through a first lens group G 1 which comprises a biconvex positive lens L 11 , a positive meniscus lens L 12 having a convex surface facing the incident side of a light beam, a negative meniscus lens L 13 having a convex surface facing the incident side, and a negative meniscus lens L 14 having a convex surface facing the incident side, and has positive refractive power as a whole, and then reaches a first concave reflection mirror M 1 having a magnification slightly smaller than unity via a fifth lens group G 5 of negative refractive power. The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror M 1 side. The light beam reflected by the first concave reflection mirror M 1 is deflected by a planar reflection mirror M 3 , which is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 , via the fifth lens group G 5 again, and becomes incident on a second lens group G 2 of negative refractive power. The second lens group G 2 comprises a negative meniscus lens L 21 having a convex surface facing the incident side of a light beam, a biconcave negative lens L 22 , and a biconvex positive lens L 23 , and forms a primary image I 1 as a reduced image of an object between the negative lens L 22 and the positive lens L 23 . The light beam emerging from the second lens group G 2 is deflected by a planar reflection mirror M 4 , which is obliquely arranged at 45° with respect to an optical axis Ax 2 of the second lens group G 2 , and reaches a second concave reflection mirror M 2 having a magnification larger than unity. The light beam reflected by the second concave reflection mirror M 2 is incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises, in succession from the incident side of a light beam, a negative meniscus lens L 31 having a convex surface facing the object side, a biconvex positive lens L 32 , a positive meniscus lens L 33 having a convex surface facing the incident side, a negative meniscus lens L 34 having a concave surface facing the incident side, and a biconvex positive lens L 35 , and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 at the exit side of the third lens group G 3 . The sixth embodiment, as well, has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.45 in a ring-shaped view field centered at an arc having a radius of 24.25 mm from the optical axis. Table 6 below shows data of the sixth embodiment. Note that the radius of curvature of each of the first and second concave reflection mirrors M 1 and M 2 shown in Table 6 is the radius of paraxial curvature, and the non-spherical surface coefficients of these first and second reflection mirrors M 1 and M 2 are separately listed. The refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Sixth Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 414.498 1.0000 1 8211.322 38.636 1.508385 (quartz) L 11 2 -439.506 0.100 1.0000 3 239.531 74.172 1.508385 (quartz) L 12 4 1059.356 0.100 1.0000 5 220.874 71.349 1.508385 (quartz) L 13 6 192.087 28.244 1.0000 7 9114.936 13.285 1.508385 (quartz) L 14 8 135.907 347.569 1.0000 9 -236.652 19.683 1.508385 (quartz) G 5 10 -287.731 551.277 1.0000 11 -1024.933 -551.277 -1.0000 (non-spherical) M 1 12 -287.731 -19.683 -1.508385 (quartz) G 5 13 -236.652 -314.837 -1.0000 14 -149.845 -31.308 -1.508385 (quartz) L 21 15 -137.269 -33.137 -1.0000 16 257.207 -10.000 -1.508385 (quartz) L 22 17 -315.674 -37.792 -1.0000 18 -459.634 -27.954 -1.508385 (quartz) L 23 19 431.125 -848.560 -1.0000 20 1044.120 752.496 1.0000 (non-spherical) M 2 21 106.792 12.000 1.508385 (quartz) L 31 22 105.550 24.044 1.0000 23 344.933 16.641 1.508385 (quartz) L 32 24 -1397.225 0.100 1.0000 25 105.435 30.284 1.508385 (quartz) L 33 26 890.603 8.066 1.0000 27 -297.345 32.551 1.508385 (quartz) L 34 28 -486.516 1.643 1.0000 29 154.666 44.945 1.508385 (quartz) L 35 30 -706.316 24.770 1.0000 31 (Image Surface) <Non-spherical Surface Coefficient> 11th surface (first concave reflection mirror M 1 ) κ 1.0 C 4 -0.395493 × 10 -12 C 6 -0.168923 × 10 -16 C 8 -0.338178 × 10 -22 C 10 -0.134005 × 10 -26 20th surface (second concave reflection mirror M 2 ) κ 1.0 C 4 0.340990 × 10 -10 C 6 0.116056 × 10 -15 C 8 0.245212 × 10 -21 C 10 0.260273 × 10 -26 <Condition Corresponding Values> β G3 = 0.238 β M1 = -0.800 β M2 = -1.357 Fig. 12 shows coma of the sixth embodiment. Fig. 12 shows coma in the meridional direction at the center of the ring-shaped view field. As can be seen from Fig. 12, the sixth embodiment maintains an excellent imaging performance. A seventh embodiment of the present invention will be described below with reference to Fig. 13. Referring to Fig. 13, a light beam from the object surface emerges from a first lens group G 1 which comprises a biconvex positive lens L 11 , a positive meniscus lens L 12 having a convex surface facing the incident side of a light beam, a positive meniscus lens L 13 having a convex surface facing the incident side of a light beam, and a negative meniscus lens L 14 having a convex surface facing the incident side, and has positive refractive power as a whole, and is deflected by a planar reflection mirror M 3 which is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 . The deflected light beam reaches a first concave reflection mirror M 1 having a magnification slightly smaller than unity via a fifth lens group G 5 of negative refractive power. The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror M 1 . The light beam reflected by the first concave reflection mirror M 1 is incident on a second lens group G 2 of negative refractive power via the second lens group G 5 again. The second lens group G 2 comprises a negative meniscus lens L 21 having a convex surface facing the incident side of a light beam, a biconcave negative lens L 22 , a positive meniscus lens L 23 having a concave surface facing the incident side, and a positive meniscus lens L 24 having a concave surface facing the incident side, and forms a primary image I 1 as a reduced image of an object in the optical path between the negative lenses L 21 and L 22 . Note that the negative lens L 21 in the second lens group is arranged at only one side of the optical axis Ax 2 so as not to shield the optical path extending from the first lens group G 1 toward the first concave reflection mirror M 1 . The light beam emerging from the second lens group G 2 is deflected by a planar reflection mirror M 4 which is obliquely arranged at 45° with respect to the optical axis Ax 2 of the second lens group G 2 , is reflected by a second concave reflection mirror M 2 having a magnification larger than unity, and then becomes incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises a negative meniscus lens L 31 having a convex surface facing the incident side of a light beam, a biconvex positive lens L 32 , a positive meniscus lens L 33 having a convex surface facing the incident side, a biconcave negative lens L 34 , and a biconvex positive lens L 35 , and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 . The seventh embodiment has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.4 in a ring-shaped view field centered at an arc having a radius of 25 mm from the optical axis. Table 7 below shows data of the seventh embodiment. In Table 7, the refractive index of each glass material corresponds to that at the wavelength (193 nm) of ArF. Seventh Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 298.019 1.0000 1 4860.661 33.000 1.501375 (fluorite) L 11 2 -410.727 0.100 1.0000 3 202.797 73.000 1.501375 (fluorite) L 12 4 221.645 12.851 1.0000 5 189.285 33.370 1.501375 (fluorite) L 13 6 308.080 19.873 1.0000 7 942.449 50.409 1.560194 (quartz) L 14 8 133.378 326.305 1.0000 9 -409.199 21.087 1.501375 (fluorite) G 5 10 -618.117 538.975 1.0000 11 -918.138 -538.975 -1.0000 M 1 12 -618.117 -21.087 -1.501375 (fluorite) G 5 13 -409.199 -230.534 -1.0000 14 -124.583 -16.666 -1.501375 (fluorite) L 21 15 -122.761 -99.533 -1.0000 16 139.122 -17.104 -1.501375 (fluorite) L 22 17 -708.717 -35.132 -1.0000 18 253.980 -28.131 -1.501375 (fluorite) L 23 19 225.928 -6.072 -1.0000 20 14003.190 -33.317 -1.560194 (quartz) L 24 21 290.144 -904.186 -1.0000 22 1085.235 804.185 1.0000 M 2 23 95.505 18.738 1.560194 (quartz) L 31 24 92.560 23.254 1.0000 25 1178.101 22.112 1.501375 (fluorite) L 32 26 -788.023 0.100 1.0000 27 86.141 27.769 1.501375 (fluorite) L 33 28 734.979 1.972 1.0000 29 -322.980 43.543 1.560194 (quartz) L 34 30 926.558 0.100 1.0000 31 125.704 23.783 1.501375 (fluorite) L 35 32 -725.241 15.000 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.373 β M1 = -0.814 β M2 = -0.993 Fig. 14 shows coma of the seventh embodiment. Fig. 14 shows coma in the meridional direction at the center of the ring-shaped view field. Note that a solid curve in Fig. 14 represents coma at 193.3 nm, a broken curve represents coma at 193.7 nm, and a dotted curve represents coma at 192.9 nm. As can be seen from Fig. 14, the seventh embodiment can achieve correction of chromatic aberration within a range of ±0.4 nm at the wavelength of ArF, and maintains an excellent imaging performance. An eighth embodiment of the present invention will be described below with reference to Fig. 15. Referring to Fig. 15, a light beam from the object surface passes through a first lens group G 1 which comprises a biconvex positive lens L 11 , a biconvex positive lens L 12 , a negative meniscus lens L 13 having a convex surface facing the incident side of a light beam, and a biconcave negative lens L 14 , and which has positive refractive power as a whole, and is then deflected by a planar reflection mirror M 3 which is obliquely arranged at 45° with respect to an optical axis Ax 1 of the first lens group G 1 . The deflected light beam reaches a first concave reflection mirror M 1 having a magnification slightly smaller than unity via a fifth lens group G 5 of negative refractive power. The fifth lens group G 5 comprises a negative meniscus lens having a convex surface facing the first concave reflection mirror M 1 side. The light beam reflected by the first concave reflection mirror M 1 is incident on a second lens group G 2 of negative refractive power via the fifth lens group G 5 again. The second lens group G 2 comprises a negative meniscus lens L 21 having a convex surface facing the incident side of a light beam, a negative meniscus lens L 22 having a concave surface facing the incident side, a negative meniscus lens L 23 having a concave surface facing the incident side, and a biconvex positive lens L 24 , and forms a primary reduced image I 1 between the negative lenses L 21 and L 22 . The light beam emerging from the second lens group G 2 is deflected by a planar reflection mirror M 4 which is obliquely arranged at 45° with respect to an optical axis Ax 2 of the second lens group G 2 , is reflected by a second concave reflection mirror M 2 having a magnification larger than unity, and then becomes incident on a third lens group G 3 of positive refractive power. The third lens group G 3 comprises a negative meniscus lens L 31 having a convex surface facing the incident side of a light beam, a biconvex positive lens L 32 , a biconvex positive lens L 33 , a negative meniscus lens L 34 having a concave surface facing the incident side, and a positive meniscus lens L 35 having a convex surface facing the incident side, and forms a secondary image I 2 in a larger reduction scale than that of the primary image I 1 at its exit side. The eighth embodiment has a reduction factor of +0.25 or 1/4 as a whole, and achieves a numerical aperture of (N.A.) of 0.4 in a ring-shaped view field centered at an arc having a radius of 24.25 mm from the optical axis. Table 8 below shows data of the eighth embodiment. In Table 8, the refractive index of each glass material corresponds to that at the wavelength (248 nm) of KrF. Eighth Embodiment No. Radius of Curvature Plane-to-Plane Distance Refractive Index (Object Surface) 400.975 1.0000 1 3191.354 33.000 1.508385 (quartz) L 11 2 -448.984 15.428 1.0000 3 223.181 64.645 1.508385 (quartz) L 12 4 -4151.509 12.219 1.0000 5 11253.765 49.299 1.508385 (quartz) L 13 6 461.799 16.133 1.0000 7 -1336.016 48.239 1.508385 (quartz) L 14 8 158.062 281.551 1.0000 9 -312.940 20.065 1.508385 (quartz) G 5 10 -441.735 538.318 1.0000 11 -919.752 -538.318 -1.0000 M 1 12 -441.735 -20.065 -1.508385 (quartz) G 5 13 -312.940 -247.755 -1.0000 14 -132.399 -22.942 -1.508385 (quartz) L 21 15 -127.754 -104.702 -1.0000 16 134.695 -14.420 -1.508385 (quartz) L 22 17 11180.397 -23.490 -1.0000 18 160.735 -29.211 -1.508385 (quartz) L 23 19 163.686 -0.100 -1.0000 20 1939.060 -37.447 -1.508385 (quartz) L 24 21 239.738 -905.619 -1.0000 22 1073.545 806.574 1.0000 M 2 23 89.424 16.314 1.508385 (quartz) L 31 24 82.394 13.739 1.0000 25 612.232 15.000 1.508385 (quartz) L 32 26 -1320.781 0.100 1.0000 27 86.666 25.509 1.508385 (quartz) L 33 28 -1224.142 4.770 1.0000 29 -224.139 36.310 1.508385 (quartz) L 34 30 -236.345 0.589 1.0000 31 165.225 24.171 1.508385 (quartz) L 35 32 43423.922 15.000 1.0000 33 (Image Surface) <Condition Corresponding Values> β G3 = 0.400 β M1 = -0.797 β M2 = -0.934 Fig. 16 shows coma of the eighth embodiment. Fig. 16 shows coma in the meridional direction at the center of the ring-shaped view field. As can be seen from Fig. 16, the eighth embodiment maintains an excellent imaging performance. In each of the above embodiments, the primary image formed by the first partial optical system (the first lens group G 1 and the first concave reflection mirror M 1 ) is a reduced image. However, the primary image formed by the first partial optical system is not limited to a reduced image. In each of the above embodiments, since the optical system is constituted to satisfy the above-mentioned conditions, the optical members constituting the catadioptric reduction projection optical system do not interfere with each other. Therefore, a physically constructible catadioptric reduction projection optical system can be obtained. In each of the second to eighth embodiments, the object surface is set to be parallel to the image surface using the two planar reflection mirrors. Thus, when the catadioptric reduction projection optical system of each of the second to eighth embodiments is adopted as an optical system of a scanning exposure apparatus, a convey mechanism for executing scanning exposure can be simplified. The above embodiments have been described only to clarify the technical contents of the present invention, and must not be construed to limit the scope of the present invention. Therefore, various changes and modifications may be made without departing from the scope of the invention.

Claims: A catadioptric reduction projection optical system comprising: a first sub-system for forming a primary image (I 1 ) of an object and including, in succession from an object side, a first lens group (G 1 ) of positive refractive power and a first concave reflection mirror (M 1 ); and a second sub-system for re-imaging the primary image and including, in succession from the object side, a second lens group (G 2 ) of positive or negative refractive power, a second concave reflection mirror (M 2 ) and a third lens group (G 3 ) of positive refractive power, wherein a magnification β G3 of said third lens group (G 3 ) satisfies: 0.05 < β G3 < 0.6, and wherein a magnification β M1 of said first concave reflection mirror (M 1 ) satisfies: β M1 < -0.7 A system according to claim 1, wherein the magnification β M1 of said first concave reflection mirror (M 1 ) satisfies: -2.0 < β M1 A system according to claim 1 or 2, wherein a magnification β M2 of said second concave reflection mirror (M 2 ) satisfies: -2.5 < β M2 < -0.7 A system according to claim 1, 2 or 3, wherein said first sub-system forms a reduced image (I 1 ) of the object. A system according to any of claims 1 to 4, wherein said second lens group (G 2 ) is constituted to direct a light from a position substantially on an optical axis of said first concave reflection mirror (M 1 ) to a position substantially on an optical axis of said second concave reflection mirror (M 2 ). A system according to any of claims 1 to 5, further comprising: a provisional lens group (G 4 , G 5 ) arranged in the vicinity of at least one of said first and second concave reflection mirrors (M 1 , M 2 ). A system according to claim 6, wherein said provisional lens group (G 4 , G 5 ) has a function of correcting an aberration generated by the concave reflection mirror (M 1 , M 2 ). A system according to claim 7, wherein said provisional lens group (G 4 , G 5 ) includes a meniscus lens component having a convex surface facing the concave reflection mirror (M 1 , M 2 ). A system according to any of claims 1 to 8, wherein a negative Petzval sum generated by said first and second concave reflection mirrors (M 1 , M 2 ) is corrected by a positive Petzval sum generated by said third lens group (G 3 ). A system according to any of claims 1 to 9, wherein at least one of said first and second concave reflection mirrors (M 1 , M 2 ) has a non-spherical reflection surface. A system according to any of claims 1 to 10, wherein at least one of said first to third lens groups (G 1 , G 2 , G 3 ) consists of at least two different glass materials thereby correcting chromatic aberration. A system according to claim 11, wherein the at least two different glass materials include quartz glass and fluorite. A system according to claim 12, wherein said first to third lens groups (G 1 , G 2 , G 3 ) consist of quartz glass and fluorite. A system according to any of claims 1 to 10, wherein said first to third lens groups (G 1 , G 2 , G 3 ) consist of at least one of quartz glass and fluorite. A system according to claim 14, wherein said first to third lens groups (G 1 , G 3 ) consist of quartz glass. A system according to any of claims 1 to 15, further comprising: at least two planar reflection mirrors (M 3 , M 4 ), which make an image surface (I 2 ) parallel to an object surface. A system according to claim 16, wherein one of said at least two planar mirrors (M 3 ) is arranged in an optical path between the object surface and the primary image (I 1 ), and the planar reflection mirror (M 4 ) different from said one planar reflection mirror (M 3 ) is arranged in an optical path between the primary image (I 1 ) and the image surface (I 2 ). A system according to any of claims 1 to 17, wherein said first lens group (G 1 ) includes, in succession from the object side, a lens component (L 11 , L 12 , L 13 ) of positive refractive power, and a lens component (L 13 , L 14 ) of negative refractive power. A system according to claim 18, wherein said lens component (L 11 ) of the positive refractive power, which component is arranged closest to the object side, is constituted so that a concave lens surface faces the object surface side. A system according to any of claims 1 to 19, wherein said second lens group (G 2 ) includes, in succession from a light incidence side, a lens component (L 21 , L 22 , L 23 ) of negative refractive power and a lens component (L 23 , L 24 ) of positive refractive power. A system according to any of claims 1 to 20, wherein said third lens group (G 3 ) includes, in succession from a light incidence side, a negative lens component (L 31 , L 32 ), a positive lens component (L 32 , L 33 , L 34 , L 35 ), a negative lens component (L 34 , L 36 ), and a positive lens component (L 35 , L 36 , L 37 ). A system according to claim 21, wherein said positive lens component (L 32 ) located closest to the object side in said third lens group (G 3 ) has a convex lens surface facing the light incidence side. A system according to claim 1, wherein at least one of said first and second lens groups (G 1 , G 2 ) is arranged on one side of an optical axis. A system according to claim 1 having a ring-shaped view field.

Inventors: HAYASHI KIYOSHI, ISHIYAMA TOSHIRO, SHIMIZU YOSHIYUKI MIURAKAIGANH, HAYASHI, KIYOSHI, ISHIYAMA, TOSHIRO, SHIMIZU, YOSHIYUKI, SHIMIZU, YOSHIYUKI, MIURAKAIGANHAITSU, 4-415
Applicants: NIPPON KOGAKU KK, NIKON CORPORATION
Application year: 1993
Main classification: G02B17
IPC codes: G02B17, G03F7