Organic functional thin film, fabrication and use thereof

Abstract: An organic functional thin film is comprised of a polymer of a molecule having two or more identical or different groups selected from the group consisting of a carbonyloxycarbonyl group, a carboxylic acid group, a carboxylic acid halide group, a carboxyl group, a -COCl group, an -NCO group, a -CHO group and an epoxy group and a molecule having two or more identical or different groups selected from the group consisting of an amino group, groups containing at least one amino proton, an alkylamino group, a silylated alkylamino group, a carboxylic acid group and a hydroxyl group, formed by vapor-phase deposition, the polymer-forming molecules having at least partially one or more donor and/or acceptor groups. Similar organic thin films are also disclosed. These organic thin films are useful for various electronic applications.

Description: The present invention relates to an organic polymer film and more particularly, to a process for the production thereof. Depending on its chemical structure, the polymer film may be suitable for use as a non-linear material or as an organic semiconductor material, in particular. As is widely known, non-linear optical materials are materials which demonstrate second- or third-order non-linear optical effects in the presence of an applied voltage or a strong electric field of laser light. In addition, in terms of phenomena, such materials demonstrate the functions of numerous devices such as optical frequency conversion, optical modulation, optical switching, optical memory and optical amplification. Such materials have this attracted considerable attention as fundamental materials in fields such as optical communications, optical interconnections and optical computers. Typical non-linear optical materials of the prior art are inorganic substances as such as crystals of KD 2 PO 4 (KDP), LiNbO 3 , KNbO 3 and LiTaO 3 . Development and research of organic non-linear optical materials began to be actively conducted starting around 1983. Representative examples of such optical non-linear optical materials include MNA, DAN, MNMA and NPP. More recently, organic non-linear optical materials have appeared that have attracted the attention of industry and which feature electro-optical effects 10-100 times greater than that of LiNbO 3 (usually referred to as LN) while also being capable of being easily produced in the form of a thin film. Polymers having attached pendant groups are one type of organic non-linear optical material that is expected to be actively used as a material for electro-optic devices. Such polymers are polymers in which non-linear optical molecules are introduced to the main chain of the polymer in the form of pendant groups (side chain groups). These are normally available for forming into a film by spin coating. In the prior art procedure of Figure 48 of the accompanying drawings pendant-attached addition polymers are made by forming film 7 of a polymer containing non-linear optical molecules (Figure 48(A)), and then applying a voltage between electrodes arranged above and below film 7, rotating those molecules and performing poling processing to orient the molecules in film 7 (Figure 48(B)). In Figure 48(B) a poling process can be performed by generating a charge on the film by corona discharge without forming the upper electrode. As is indicated in Fig. 48 (C), polymer film 7 exhibiting non-linear properties is obtained in this manner. However, with the film formation method of the prior art, the characteristics of the resulting film are low due to inability to attain a high level of orientation as a result of thermal disturbance. In addition, due to considerable relaxation degradation resulting from the initial stable molecular state being random, decreases in characteristics over time are remarkable. Moreover, since this film formation method achieves orientation starting from a random molecular state, when attempting to lengthen the size of the non-linear molecules and improve non-linear characteristics, the non-linear molecules are subject to greater resistance with respect to rotation by the surrounding polymer. Since the molecule does not rotate satisfactorily, the orientation factor becomes excessively low thus allowing only low characteristics to be obtained similar to the case described previously. Recently, a technique has been reported by the IBM Corporation in which an organic non-linear optical material is fabricated by mixing epoxy monomers and molecules containing amino groups followed by bonding and polymerization (R.J. Twieg et al., Preprints of CGOM (1989) V-05; D. Jungbauer el al., Appl. Phys. Lett. 56 , 2610 (1990)). In this method, relaxation degradation is suppressed by formation of a network structure. When employing this method, film formation is performed by a coating process such as spin coating, which gives rise to problems including control of film thickness and film uniformity. In addition, the method also has problems that must be solved including unavoidable mixing of residual solvent and impurity molecules, and inadequate molecular orientation due to having to perform poling processing following film formation. Moreover, organic polymer films, which include non-linear optical materials, are normally fabricated using methods such as spin coating or dip coating. However, these methods also give rise to problems that must be resolved including difficulty in fabricating multi-functional and highly functional films since the hyperfine structure within the organic film that is obtained cannot be controlled. Conjugate polymers are one type of material considered to be promising for use as organic polymer film-form materials such as non-linear optical materials and organic semiconductor materials. In order to improve the performance of such materials, it is necessary to develop long, conjugated n-electron systems having minimal disorder. In addition, it is also necessary to selectively add donor or acceptor groups to conjugate polymers, perform doping or control the length of the conjugate chain. Various types of polymers have been developed as conjugate polymers, examples of which include polydiacetylene and polyphenylene-vinylene. However, in the case of the former, the obtaining of a high-performance film with minimal light-scattering has been difficult, and film formation has been difficult using MLD (molecular layer deposition). With respect to the latter, in addition to film formation being difficult using MLD, there is difficulty in controlling conjugate chain length, and difficulty in controlling donor groups and acceptor groups. It is also known that double bonds (azomethine bonds) are formed by reaction of -CHO groups and -NH 2 groups as illustrated by the following reaction. Iijima et al. successfully formed a polymer thin film by means of deposition polymerization using the above-mentioned reaction (Nikkei New Materials, December 11, 1989, pp. 93-101). According to the present invention, there is provided a molecular layer deposition process for forming a thin film made up of reacted layers of organic monomer molecules which carry groups whereby interlayer reaction can be achieved, comprising projecting into a substrate under a vacuum, one at a time, in a specified well-ordered sequence or random sequence, a plurality of types of molecules each carrying two or more reactive groups, in which process the substrate temperature during the projection of the molecules theretoward is such that the molecular re-evaporation rate is higher than the molecular projection rate and a film is build up on the substrate as reaction bonds are formed between the different types of molecules. The inventive method is described hereinafter in connection with various embodiments thereof utilizing a variety of combinations of starting molecules. In this connection, reference is made to the accompanying drawings, wherein Fig. 1 is a cross-sectional view indicating the composition of a deposition system for use in carrying out the process of this invention. Fig. 2 is a cross-sectional view indicating the principle of MLD. Fig. 3 is a cross-sectional view indicating the principle of MLD. Fig. 4 is a cross-sectional view indicating the principle of MLD. Fig. 5 is a cross-sectional view indicating the principle of MLD. Fig. 6 is a cross-sectional view indicating the composition of a further deposition system. Fig. 7 is a schematic diagram indicating the frameworks of molecules. Figs. 8 (A) - (H) are schematic diagrams of molecule A. Figs. 9 (A) - (I) are schematic diagrams of molecule B. Figs. 10 (A) - (D) are schematic diagrams of molecule C. Figs. 11 (A) - (D) are schematic diagrams of molecule A. Figs. 12 (A) - (H) are schematic diagrams of molecule B. Fig. 13 (A) - (G) are shematic diagrams of molecule C. Fig. 14 is a cross-sectional view indicating deposition combining the use of a curing molecule. Figs. 15 (A) - (D) are cross-sectional views indicating the formation of an oriented film. Figs. 16 (A) - (C) are cross-sectional views indicating the formation of an oriented film. Figs. 17 (A) - (D) are cross-sectional views indicating the formation of an oriented film. Figs. 18 (A) - (C) are cross-sectional views indicating the formation of an oriented film. Figs. 19 (A) - (G) are schematic diagrams of molecule B. Figs. 20 (A) - (D) are schematic diagrams of molecule C. Fig. 21 is a schematic diagram of electric field assisted MLD. Fig. 22 is a schematic diagram of selective orientation MLD. Fig. 23 is a schematic diagram of selective orientation MLD. Fig. 24 is a schematic diagram indicating PMDA/DNB growth. Fig. 25 is a schematic diagram indicating PMDA/DNB growth. Fig. 26 is a schematic diagram indicating DNB/PMDA growth. Fig. 27 is a schematic diagram indicating DNB/PMDA growth. Fig. 28 is a schematic diagram indicating PMDA/DDE and DDE/PMDA growth. Figs. 29 (A) - (F) are schematic diagrams of a conceptual indication of molecules. Figs. 30 (A) - (E) are schematic diagrams of a molecular framework. Fig. 31 is a diagram of the absorption spectrum of one example of film produced according to the present invention. Figs. 32 (a) - (c) are diagrams of the absorption spectra of another example of a film produced by the power of the present invention. Figs. 33 (a) - (c) are diagrams of the absorption spectra of a further example of a film produced by the process of the present invention. Figs. 34 (a) and (b) are diagrams of the absorption spectra of yet another example of a film produced by the process of the present invention. Fig. 35 is a schematic diagram indicating an example of a polymer produced by the process of the present invention and in which potential wells (or quantum dots) are formed. Fig. 36 is a diagram indicating the relationship between length of the well portion and absorption peak in the polymer molecule of Figure 35. Fig. 37 is a diagram indicating absorption peaks resulting from differences in the bonding groups of the barrier portion in the polymer molecule of Figure 36. Fig. 38 is a schematic diagram of the structure of a cross-section of a film when the conjugate chain has been deliberately divided by single bonds. Fig. 39 is a diagram indicating the principle of MLD. Fig. 40 is a schematic diagram indicating a deposition system useful for performing MLD. Figs. 41 (a) and (b) are diagrams explaining one of the advantages of deposition by MLD. Fig. 42 is an explanatory diagram of the case a substrate is treated in advance with a silane-based surface active material having terminal amino protons. Fig. 43 is a diagram indicating the absorption curve measured for one example of a polymer produced by process of the present invention. Figs. 44 (A) - (C) are diagrams indicating the composition of the molecules with absorption spectra shown in Fig. 43. Fig. 45 is a schematic diagram indicating the structure of a cross-section of another example of a film when the conjugate chain is deliberately divided by single bonds. Fig. 46 is a schematic diagram of a polymer containing neutral molecular units having neither donor or acceptor characteristics. Figs. 47 (a) and (b) are diagrams indicating examples of n- and p-type semiconductor polymer films produced using the process of the present invention. Fig. 48 is a diagram indicating an example of a TFT using a conjugate polymer film produced by the process of the present invention. Fig. 49 is a diagram indicating an example of an optical waveguide using the conjugate polymer produced by the process of the present invention. Fig. 50 is a schematic diagram of another example of the polymer produced by MLD in the process of the present invention. Fig. 51 is a diagram indicating an absorption curve measured for another example of a polymer produced by the process of the present invention. Fig. 52 is a diagram explaining an example of MLD using TPA and PPDA. Figs. 53 (a) and (b) are schematic diagrams illustrating an embodiment of an EL element including a polymer produced by the process of the present invention. Figs. 54 (a) and (b) are schematic diagrams illustrating an operation of the EL element as shown in Figs. 53 (a) and (b). Fig. 55 is a schematic diagram illustrating an embodiment of an electrochromic element including a polymer produced by the process of the present invention. Fig. 56 is a schematic diagram illustrating operation of the electrochromic element as shown in Fig. 55. Figs. 57 (a) - (f) are schematic diagrams illustrating structures of the photo-refractive polymers produced by the process of the present invention. Figs. 58 (a) - (f) are schematic diagrams illustrating examples of combinations of elements usable for the formation of the structures as shown in Figs. 57 (a) - (f). The fabrication process for an organic film of the present invention enables there to be produced, firstly, an organic film wherein the type of molecule is controlled for each molecular layer and utilizes a reaction between a group such as a carbonyloxycarbonyl group, a carboxylic acid group, an carboxylic acid halide group, an -NCO group, a -CHO group and an epoxy group (these groups are to be referred to as group I), and a group such as an amino group, groups containing an amino proton, an alkylamino group, a silated alkylamino group, a carboxyl group and a hydroxyl group (these groups are to be referred to as group II). In other words, although the reaction bonding strength between members of group I or between members of group II is weak, the reaction bonding strength between a member of group I and a member of group II is strong. Utilizing this fact, by adding specific members of these groups to a molecule, specific molecules can be deposited for each molecular layer. The following table indicates examples of reaction groups belonging to group I and group II through their chemical formulae. In the molecules of an organic functional thin film produced by the process according to the present invention, some or all of the units of the above-mentioned molecules may have a donor group (electron donating group) and/or an acceptor group (electron accepting group). Examples of suitable electron donor groups D and acceptor groups A are indicated in Table 1B Thus, at least one of the groups added as a donor group D may be a group other than an amino group such as -N(CH 3 ) 2 , -OCH 3 or -OH provided that it is not participating in bonding to form the polymer molecule. In addition, at least one portion of the groups contained in a molecule may be separated from a conjugated n electron system which composes the framework of that molecule by two more single bonds such as - (CH 2 ) n -. However, both the presence of electron donor and acceptor groups on the one hand and separation of groups in a molecule from a conjugated n electron system are optional features in the practice of this invention. The organic polymer films producible by the process of the present invention can have various modes. Typical examples of those modes are indicated as follows: (1) An organic functional thin film formed by bonding an epoxy monomer having two or more epoxy rings with a non-linear optical molecule having two or more amino protons which may be provided by one or more amino groups. In this case, the organic non-linear optical molecule may also have acceptor Group A. (2) An organic functional thin film formed by bonding a dianhydride of a tetravalent carboxylic acid (having 6 or more carbon atoms) or a halide of a divalent carboxylic acid (having 4 or more carbon atoms), with a molecule having at least two amino groups and/or alkylamino groups (having 1 - 10 carbon atoms) and a donor and/or acceptor group. In this film, a molecule having three or more amino groups wherein two or more of those groups may be separated from a conjugated n electron system which forms the molecule framework by two or more single bonds may be used for the molecule having at least two amino groups and/or alkylamino groups and a donor and/or acceptor group. The process of this invention may be called a MLD (molecular layer deposition) process. In one particular embodiment of the present invention, there is provided a manufacturing process for an organic film wherein molecules are either introduced in a vacuum or evaporated in a vacuum followed by bonding and/or polymerization to form a thin film. The process of the present invention can be performed advantageously according to various techniques. Typical examples of those techniques are indicated as follows: (1) Performing film deposition by introducing molecules in a vacuum which are able to act as a wring agent. (2) Performing film deposition by alternately projecting different types of molecules onto a substrate in the case of using a plurality of types of molecules. (3) Setting the substrate temperature during film deposition to a temperature such that the re-evaporation rate is higher than the molecule projection rate in the case of performing deposition with each of the molecules individually. (4) Setting the substrate temperature during film deposition at or below room temperature. (5) Performing film deposition while irradiating with light. (6) Performing film deposition while irradiating with an electron beam. (7) Polymerizing the molecules by heating or irradiation with light following deposition. (8) Performing film deposition applying a voltage to pattern electrodes formed on a substrate. (9) Performing film deposition while applying a voltage between an electrode provided on or in the vicinity of a substrate, and an electrode provided in opposition to the substrate. (10) An electrode provided in opposition to a substrate has either a porous or mesh structure. (11) An electrode provided on or in the vicinity of a substrate and/or an electrode provided in opposition to the substrate are formed into patterns. (12) Performing film deposition in the presence of generated plasma, or in other words, while forming plasma. The fabrication process for an organic film of the present invention is performed using more than one type of molecule having two or more addition groups for achieving intermolecular reaction, the addition groups in any one molecule being identical or different and being first addition groups selected from carbonyloxycarbonyl, aldehyde, carboxylic, carboxylic acid halide -NCO and second addition groups selected from amino, alkylamino, silylated alkylamino, carboxyl and hydroxyl, or the first addition group being epoxy and the second addition group being a group containing at least two amino protons. In addition, the fabrication process for an organic film of the present invention can be performed preferably using a molecule having two or more halogen groups, and a molecule having two or more groups selected from among a hydrogen atom, an alkali metal and copper, wherein two or more types of said molecules are used. In the present invention, various types of functional molecules, including molecules which emit fluorescent light, molecules which demonstrate electroluminescence, and molecules which demonstrate electrochromic and photochromic effects, may be used as addition groups. The organic functional thin film of the present invention is based on starting from specific molecules followed by the performing of film deposition of those molecules by vapor-phase deposition such as chemical vapor deposition. Through the use of vacuum deposition, a non-linear optical material can be realized having a low level of relaxation degradation and superior environmental resistance. In addition, this also allows the various problems of the prior art to be solved. In order to understand the operation of the present invention, the deposition process of the present invention is schematically indicated in Fig. 1. For example, the system indicated in simplified form in Fig. 1 is a MBD (molecular beam deposition) system. This deposition system is equipped with three K cells 2 for molecule evaporation (equipped with shutters 4), and a light irradiation device 11 and so on. Substrate 10 held in position by substrate holder 8 can be heated and cooled, and a voltage can be applied between electrodes 16 and 17 formed on substrate 10 or between electrodes 16 and 17 formed on substrate 10 and opposing electrode (grid) 15. The film thickness of the organic film formed on substrate 10 can be monitored by monitor 40. Alternatively, the film thickness on the substrate can be measured directly using an optical film thickness monitor device utilizing optical interference. The organic film can be fabricated using the deposition system indicated in the diagram in the following manner: For example, a molecule having two carbonyloxycarbonyl groups belonging to group I (molecule A) and a molecule having two or more amino groups belonging to group II (molecule B) are evaporated from separate cells. By alternately opening and closing the shutters, molecules A and molecules B can be alternately supplied to the substrate as indicated below. (1) Molecule A is deposited onto the substrate as the base. (2) Molecule B is deposited on the substrate. Bonding occurs between molecule B and the base molecule A resulting in accumulation of molecule B on the substrate. (3) Molecule A is deposited. Bonding occurs between molecule A and base molecule B resulting in accumulation of molecule A on the substrate. (4) Molecule B is deposited. Bonding occurs between molecule B and base molecule A resulting in accumulation of molecule B on the substrate. Steps (3) and (4) are then repeated. If the substrate temperature is set such that a film will not form due to re-evaporation from the substrate in the case of only one type of molecule, but will form in the presence of two types of molecules, molecules A and molecules B are deposited onto the substrate one molecular layer one at a time for each step. Film growth beyond that point is stopped automatically. In other words, this allows the carrying out of MLD (Molecular Layer Deposition) which resembles ALE in compound semiconductors. Fig. 2 provides a schematic representation of the principle of MLD. In this example, two types of molecules can be alternately deposited on substrate 10 one molecular layer at a time using molecules A and molecule B. In addition, the number of types of molecules is not limited to only two types, but may be three types or more. Fig. 3 indicates an example of subsequentially depositing four types of molecules on substrate 10 one molecular layer at a time using molecules A, B, C and D. In addition, the supply of molecules may be in a well-ordered or random sequence. Fig. 4 is a schematic indication of an example of the former, while Fig. 5 is a schematic indication of an example of the latter, with six types of molecules being used in both examples. In the fabrication of an organic film according to the present invention, when adding a donor group and acceptor group to a molecule, a film in which the molecules are oriented in the as-deposited state can be obtained by formation of said film while applying a voltage between electrodes formed on a substrate. Similarly, a film in which molecules are oriented in the direction of film thickness in the as-deposited state can be obtained by forming said film while applying a voltage between an electrode formed on a substrate and an opposing electrode (grid). In this case, distance between the electrode and the opposing electrode is preferably 2 microns to 10 centimeters. When the distance between electrodes is particularly wide, it is desirable to efficiently apply voltage to the film by high frequency generation of plasma by introduction of a gas such as Ar, or by the generation of an electron beam. As was described previously, with respect to the electrode on the substrate, the substrate itself may be an electrode (such as a doped semiconductor substrate), or the electrode may be formed into the shape of a substrate. In addition, a UV cured resin or a buffer layer such as that of SiO 2 may be formed on the substrate. Moreover, curing may be performed, after the deposition of the film at a low temperature approximate at or below room temperature, by heating or irradiation with light. Since thermal disturbance during film formation can be suppressed in this case, orientation by an electric field becomes easier thus allowing the attaining of a high level of performance. In addition to the system schematically indicated in Fig. 1, other types of system may also be used for the deposition system. For example, the deposition device of Fig. 6 is a type of CVD (chemical vapor deposition) system having two or more monomer gas tanks (monomer gas feed cells) 29. By allowing the deposition system to have such a composition, the supply of molecules can be switched by opening and closing the valves of the gas inlets. In the practice of the present invention, various molecules which satisfy the above-mentioned prerequisites can be used for molecule A and molecule B. Fig. 8 conceptually indicates preferred examples of molecule A that can be used in the present invention. In addition, Fig. 9 conceptually indicates preferred examples of molecule B that can be used in the present invention (refer additionally to Fig. 7 which indicates the molecular framework of these molecules). Specific examples of molecule A include the hereinafter mentioned molecules A1, A2, A3, A4, A5 and A6. Molecule A may also be a dianhydride of a tetravalent carboxylic acid having six or more carbon atoms, an acid halide of a divalent carboxylic acid having four or more carbon atoms, a dianhydride of an acid, a molecule having two or more -NCO groups of a molecule having two or more -CHO groups. Specific examples of molecule B include the hereinafter mentioned molecules B1, B2, B3, B4, B5 and B6. As also mentioned hereinafter, molecule B may also be one of molecules B7 - B14 having a donor group and/or acceptor group, and at least two of the hydrogen atoms of the phenylene ring portion of said molecule may be substituted with an amino group and/or alkylamino group having 1 - 10 carbon atoms. If the addition groups for molecule A are selected from among the members of group I, it is not necessary for those groups to be the same group, and similarly, if the addition groups for molecule B are selected from among the members of group II, it is not necessary for those groups to be the same group. For example, when the desired material is a polyurea, said material can be manufactured from molecule A and molecule B shown in the following Table 2 according to the formation reaction formula also shown. This process is also depicted in Takahashi et al., IEE, J. Elect. Insul. Mater., EIM-85-49 (1985) and Iijima et al., Nikkei New Materials, December 11, 1989, p. 93. As can be understood from this table, a polymer film is formed in this case by bonding of an amino group of molecule B and with an -NCO group of molecule A. In addition, in the case the desired material is a polyamide, it is also known that said material can be manufactured from molecule A and molecule B shown in the following table according to the various formation reaction formulae also shown. In this case, a polymer film is formed by reaction of a -CClO group and an amino group, or a -CClO group and a silated amino group. Moreover, it is also known that a polyamideimide film and polyazomethin film can be manufactured in a similar manner. Those polymerization reactions are indicated in the following tables. Polyazomethin in particular is a characteristic polymer because two molecules are combined through a double bond. Fig. 8 provides a summary of preferable examples of molecule A that can be used in the present invention. In addition, Fig. 9 provides a summary of preferable examples of molecule B that can be used in the present invention. Molecule A is a molecule containing two or more groups selected from a carbonyloxycarbonyl group, an acid halide group of a carboxylic acid, an -NCO group and a -CHO group, while molecule B is a molecule containing two or more groups selected from an amino group, groups containing one or more amino protons, an alkylamino group having 1 - 10 carbon atoms and the silylated forms of those groups. A molecule A containing an epoxy group may be reacted with molecule B having an amino group. Furthermore, the molecular backbones, for example, indicated in Fig. 7 can be used for the backbones of molecule A and molecule B (the backbone of molecule C to be described to follow is also indicated in Fig. 7). In the present invention, the desired polymer film may be manufactured by polymerization after adding molecule C to molecules A and B, or the desired polymer film may be manufactured by polymerizing two identical or molecules of molecule C or copolymerizing two different molecules of molecule C. An example of the latter is indicated in the following table. Fig. 10 provides a summary of preferable examples of molecule C that can be used in the present invention. This molecule contains a group selected from among a carbonyloxycarbonyl group, an acid halide group of a carboxylic acid, an -NCO group and a -CHO group, and a group selected from among an amino group, groups containing one or more amino protons, an alkylamino group having 1 - 10 carbon atoms and the silylated forms of those groups. Thus, in the case of molecule C, in addition to it being possible to manufacture the desired polymer film by polymerizing with a plurality of types of molecules, such can also be manufactured by polymerization with only one type of molecule (see Table 6). The conceptual indications of molecules A, B and C are respectively indicated in Figs. 8, 9 and 10. Specific examples of such molecules are indicated as follows. Examples of Molecule A Furthermore, in these molecules as well as other molecules indicated to follow, k, l, m and n represent the numbers 0, 1, 2, 3 and so on, while Me represents a methyl group. In addition to the examples indicated above, molecule A also includes acid anhydrides, molecules having two or more -NCO groups, molecules having two or more -CHO groups and so on. Examples of Molecule B In addition to the examples indicated above, molecule B also includes the following type of molecule and so on. In molecules B7-B14 indicated above, the letters D and A in the formulae represent donor groups and acceptor groups, respectively, and include those groups previously listed in Table 1. In addition, molecule B may also be that in which at least two or the hydrogen atoms of the phenylene ring portion of these molecules are substituted by amino groups and/or alkylamino groups having 1 - 10 carbon atoms. Examples of Molecule C According to one embodiment of the present invention, by forming a film while performing, for example, the above-mentioned electric field assist during film formation using molecules like those mentioned above, a polymer film can be obtained wherein molecules are oriented directly. A highly oriented film can be obtained by performing film formation while reducing the substrate temperature to a temperature at or below room temperature. If film formation is performed by applying a voltage between pattern electrodes or between an electrode formed on the substrate and an electrode opposing said substrate, a polymer can be obtained whose molecules are partially oriented. Of course, it is possible to prepare third-order non-linear optical polymers without applying an electric field. It is also possible to prepare second-order non-linear optical polymers by forming a film without applying an electric field and then by subjecting the film to a poling process without applying an electric field. When employing an electric field assist like that mentioned above, normal polling processes can be performed after film formation, although not necessarily required. In this case, although a direct orientation film cannot be obtained after film formation, a film can be obtained which has superior uniformity and a low level of impurities. Moreover, molecular orientation can be improved by the addition of hydrophilic or hydrophobic groups and performing hydrophilic or hydrophobic treatment of the substrate. The following describes an example of an oriented film controlled during film formation. Example A: (1) Molecule A is deposited onto the substrate as the base layer. (2) Molecule B is then deposited on the substrate. A bonding reaction takes place between base molecule A and molecule B resulting in the accumulation of molecule B. (3) Molecule A is then deposited. A bonding reaction takes place between base molecule B and molecule A resulting in accumulation of molecule A. (4) Molecule B is then deposited. A bonding reaction takes place between base molecule A and molecule B resulting in accumulation of molecule B. Steps (3) and (4) are then repeated. With respect to the conditions indicated in Fig. 2, a single molecular layer at a time of molecule A and molecule B are respectively adsorbed for each step of the process. Film growth beyond that point is stopped automatically. In other words, Molecular Layer Deposition (MLD), which resembles Atomic Layer Epitaxy (ALE) in the case of compound semiconductors, can be applied. Although there is a possibility of obtaining an oriented film without applying an electric field in the case of methods in which the deposition sequence of molecules is controlled as in the above example, a more oriented film can be obtained through the use of an electric field assist. In addition, by adding hydrophilic or hydrophobic groups to the molecules used the orientation of the molecules will be given directivity thus resulting in improved orientation characteristics. Based on the present invention as described above, a non-linear optical material can be realized having a low level of relaxation degradation, ample environmental resistance, film thickness controllability and uniformity, minimum contamination by residual solvent and impurity molecules, and favorable orientation characteristics. As was mentioned previously, the present invention includes formation of an organic non-linear optical material by either bonding an epoxy monomer having two or more epoxy rings and a non-linear optical molecule having two or more amino protons, or mutually bonding a monomer having two or more epoxy rings, two or more amino protons which may be provided by one or more amino groups, and an acceptor group. The following provides an explanation of this material. In the case of this type of organic non-linear optical material, the deposition system of Figs. 1 and 6 can be used for the manufacturing an organic film. In other words, non-linear optical molecules having an epoxy monomer and amino protons are evaporated from separate cells. The two types of molecules that are supplied onto the substrate are combined and polymerized by heating of the substrate or irradiation with UV light. By forming a film while applying a voltage between electrodes formed on the substrate, a film is obtained in which the molecules are oriented in the as-deposited state. Similarly, by forming a film while applying a voltage between an electrode formed on the substrate and an opposing electrode (grid), a film is obtained in which the molecules are oriented in the direction of film thickness in the as-deposited state. In this case the distance between the electrode and opposing electrode is desirably from 2 microns to 10 centimeters. When the distance between electrodes is particularly wide, it is desirable to efficiently apply voltage to the film by high-frequency generation of plasma by introduction of a gas such as Ar. Similar effects can be anticipated by performing film formation while irradiating with an electron beam. Moreover, with respect to the electrode on the substrate, the substrate itself may be an electrode (such as a doped semiconductor substrate), or an electrode may be formed on the substrate. Although there are various other preferable modes, similar to the previously mentioned modes, these are the same as the modes of the invention previously described in reference to polymerization of a molecule having two -NCO groups (molecule A) and a molecule having two or more amino groups (molecule B) in the same manner as the above-mentioned modes. The following table indicates polymerization reaction between molecule B having an amino proton and molecule A having an epoxy ring. The above indicates one example of molecule A and molecule B. Other molecules can also be advantageously used in carrying out the present invention. Figs. 11 and 12 schematically indicate molecule A and molecule B, respectively, which can be advantageously used in the present invention. In addition, although an explanation of the molecular frameworks of these molecules will not be given in particular with reference to drawings, it can be considered to be the same as the molecular framework indicated in Fig. 7 mentioned previously. Furthermore, the form of the molecular framework of molecule A is different from that in Fig. 7 for the sake of explanation. In this case also, molecule C indicated in Fig. 13 can be used as in addition to the above-mentioned molecule A and molecule B. Molecule C has both amino protons and an epoxy ring as indicated. Moreover, the following lists some specific examples of molecule A, molecule B and molecule C. Examples of Molecule A R and R' each represents H, -OH, -NH 2 , -NHCOCH 3 , carboxyl or methoxy. R and R' are as defined in formula A9, and R 1 and R 2 each represents methyl. R, R', R" and R'" each represents a significance of R or R' in formula A9, and R 1 , R 2 , R 3 and R 4 each represents a significance of R 1 or R 2 in formula A11. In these examples of molecule A, donor groups and/or acceptor groups other than -NH 2 groups, such as NMe 2 groups or methoxy groups, may be contained in the molecules. Examples of Molecule B Examples of Molecule C Hydrophilic and/or hydrophobic groups may be added to the organic functional thin film of the present invention as was described previously. Examples of molecule A, molecule B and molecule C that can be advantageously used for preparation of said film are listed below. Examples of Molecule A Examples of Molecule B Examples of Molecule C In these molecules, substituent groups R a - R c as well as R 1 - R 3 can respectively be groups such as those indicated in the following table. Combination Substituent R a - R c Substituent R 1 R 3 I at least one hydrophilic group from H, -COOH, -OH, -NH 2 , -OCH 3 -NHCOCH 3 not critical II at least one hydrocarbyl hydrophobic group not critical III not critical at least one hydrophilic group from H, -COOH, -OH, -NH 2 , -OCH 3 , -NHCOCH 3 IV not critical at least one hydrocarbyl hydrophobic group V hydrogen hydrogen The combinations I - V may be concurrently present in a polymer molecule, and R a - R c and R 1 - R 3 may be a donor or acceptor group. Examples of Molecule B or Molecule C In these molecules, substituent groups R a - R d as well as R 1 - R 4 can respectively be groups such as those indicated in the following table. More than one of combinations I - IX may be present in the same polymer molecule, and R a - R d and R 1 - R 4 may be a donor or acceptor group. The molecular orientation within a film can be improved by performing hydrophilic or hydrophobic treatment of the substrate by introducing hydrophilic and/or hydrophobic groups into the molecule as described previously. Furthermore, it is only natural that in the molecules listed above, those molecules from which an epoxy ring is removed can become molecule B. As was also described previously, when producing an organic film by the process of the present invention, deposition can be performed by introducing a molecule which can function as a hardening agent in a vacuum. In other words, by alternately projecting a molecule that can function as a hardening agent (curing molecule) and a non-linear optical molecule having an epoxy ring (molecule C) as schematically indicated in Fig. 14, a polymer film is obtained. Examples of curing molecules are indicated below. (I) Amines Metaxylylenediamine Polyetherdiamine Polymethylenediamine Diethylenetriamine Triethylenetetramine Menthenediamine Metaphenylenediamine Diaminodiphenylmethane Diaminodiphenylsulfone (II) Acid Anhydride + Promoter Acid Anhydrides: Phthalic anhydride Trimellitic anhydride Maleic anhydride Succinic anhydride Polycarboxylic acid anhydride Hydrohalogenic acid anhydride Promoters: Lewis acids Organometallic compounds (III) Polyamide Resins (IV) Imidazoles According to the present invention, an oriented film can be formed while controlling the orientation state using molecules like those previously described. The following provides an explanation of this oriented film referring to Figs. 15 - 18. Fig. 15 is an example of deposition using molecule A and molecule B utilizing an electric field assist and the natural orientation characteristics of the molecules. Firstly, as is indicated in Fig. 15 (A), molecule A is deposited onto substrate 10 to serve as the base. Next, as is indicated in Fig. 15 (B), molecule B is projected and deposited onto substrate 10 followed by commencement of polymerization. Continuing, as is indicated in Fig. 15 (C), deposition of molecule A and deposition of molecule B as indicated in Fig. 15 (D) is repeated. As molecule A was deposited as the base during initial formation of the oriented film, orientation characteristics can be improved. Fig. 16 is an example of deposition using molecule A and molecule C. Firstly, as is indicated in Fig. 16 (A), molecule A is deposited onto substrate 10 to serve as the base (this may also be molecule C). Next, as is indicated in Fig. 16 (B), molecule C is projected and deposited onto substrate 10 followed by commencement of polymerization. Continuing, molecule C is deposited as indicated in Fig. 16 (C). Improvement of orientation characteristics can also be improved by performing deposition in this form. The examples of deposition of Fig. 17 and Fig. 18 correspond to the deposition examples of Fig. 15 and Fig. 16, respectively, differing by a change in the orientation of the molecules. The effects that are obtained are the same. In the above-mentioned examples, although an oriented film can be obtained even without applying an electric field, a film having a higher degree of orientation can be obtained by electric field assist. In addition, the addition of hydrophilic and hydrophobic groups to molecules A, B and C gives directivity to the orientation of the molecules thus improving orientation characteristics. According to the present invention as described above, an organic polymer film can be realized having a low level of relaxation degradation, ample film thickness controllability and uniformity, minimum contamination by residual solvent and impurity molecules, and favorable orientation characteristics. Moreover, as was also described previously, the process of the present invention also enables there to be produced an organic polymer film formed either by bonding a dianhydride of a tetravalent carboxylic acid (C = or more) or a halide of a divalent carboxylic acid (C = 4 or more), with a molecule having at least two amino groups and/or alkylamino groups and a donor and/or acceptor group, or by mutually bonding a molecule containing a dianhydride of a tetravalent carboxylic acid or a halide of a divalent carboxylic acid as its compositional unit, and also having at least two amino groups and/or alkylamino groups as well as a donor group and/or acceptor group. The following provides an explanation of this material. A deposition system like that previously indicated in Figs. 1 and 6 can be used in the case of this type of organic non-linear optical material as well. In other words, a dianhydride of a tetravalent carboxylic acid having six or more carbon atoms, or an acid halide of a carboxylic acid having four or more carbon atoms (molecule A), and a molecule having at least two groups selected from among an amino group and an alkylamino group having 1 - 10 carbon atoms, as well as a donor group and/or acceptor group (such as -NO 2 , -CN and -CF 3 ) (molecule B) are evaporated from separate cells. The two types of molecules that are projected onto the substrate are then bonded and polymerized by heating of the substrate and irradiation with UV light. A film in which the molecules are oriented in the as-deposited state is then obtained by forming a film while applying a voltage between, electrodes formed on the substrate. Similarly, by forming a film while applying a voltage between an electrode formed on the substrate and an opposing electrode (grid), a film is obtained in which the molecules are oriented in the direction of film thickness in the as-deposited state. In this case, a distance of the order of 2 microns to 10 centimeters is desirable for the distance between the electrode and the opposing electrode. When the distance between electrodes is particularly wide, it is desirable to efficiently apply voltage to the film by high-frequency generation of plasma by introduction of a gas such as Ar. Furthermore, as explanations have been given for other similar preferred modes previously herein, a like explanation for this mode will not be repeated here. The following table indicates the formation of a polyimide film by the polymerization reaction of 4,4'-diaminophenyl ether (molecule B) [DDE] and pyromellitic dianhydride (molecule A) [PMDA], the basis of which is known from the aforementioned publications by Takahashi et al. and Iijima et al. In addition, and also known from the same publications, a polyimide film can be formed using -C- in place of the bonding group of DDE (-O-) for molecule B (see following table). Molecule A used in the present invention includes various molecules including the above-mentioned pyromellitic dianhydride (PMDA) (a dianhydride of a carboxylic acid having six or more carbon atoms, or a halide of a carboxylic acid having four or more carbon atoms). H 2 N―R―NH 2 R represents or the like. Molecule B includes various molecules including 2,4-diaminonitrobenzene (DNB) previously indicated as molecule B4. In addition, indications of these molecules are shown schematically in Fig. 19 (the molecular backbone is the same as in Fig. 7). Much has already been said herein about molecule B and is not to be repeated here. The following lists some further specific examples of molecule B. Examples of Molecule B Other examples of molecule B include the above-mentioned molecules B1 - B7 as well as molecules B8 - B14. In these molecules, three amino groups are added to molecules B26 - B28, and a portion is used in a polymerization reaction. The other amino groups act as donor groups. In this example, NO 2 is used as an acceptor group. In the case of molecules B27 - B29 in particular, two of the -NH 2 groups are added through -(CH 2 ) m - single bonding, and are separated from a conjugated system. These -NH 2 groups project from the molecule. Since they also have considerable flexibility, they easily participate in the polymerization reaction. In contrast, the -NH 2 group directly linked to the conjugated system has difficulty participating in the polymerization reaction due to steric hindrance. As such, it frequently has the role of a donor. Molecules B30 and B31 are examples of the addition of a non-linear optical molecule to a molecule having two amino groups. In addition, it is possible to secure a donor that does not participate in a reaction by adding a donor group other than -NH 2 such as -N(CH 3 ) 2 in the manner of molecules B32 and B33. Molecule C can also be used here in addition to the above-mentioned molecule A and molecule B as is indicated in Fig. 20 (molecular framework the same as that in Fig. 7). As is indicated in this diagram, molecule C contains a dianhydride of a tetravalent carboxylic acid having 6 or more carbon atoms or an acid halide of a divalent carboxylic acid having 4 or more carbon atoms as its compositional unit, and also has at least two groups selected from among an amino group and an alkylamino group having 1 - 10 carbon atoms, as well as an acceptor group. Thus, in addition to a plurality of types of molecules being able to be polymerized, polymerization is also possible with only one type of molecule. The following lists some specific examples of molecule C. Examples of Molecule C According to the present invention, when a film is formed by, for example, setting the substrate temperature to 150°C - 250°C while performing the above-mentioned electric field assist using molecules such as those described above, a polymer film is obtained in which the molecules are oriented directly. If film formation is formed while further lowering the substrate temperature, a polymer film is obtained consisting of the precursor of a polyimide. A polyimide is then obtained by heating and curing. When film formation is performed by cooling the substrate temperature to a temperature at or below room temperature, a highly oriented polymer is obtained. If film formation is performed by applying a voltage between pattern electrodes or between an electrode formed on the substrate and an opposing electrode, a partially oriented polymer is obtained. In the process of this invention wherein the deposition sequence of the molecules is controlled, it is possible to obtain an oriented film even without applying an electric field. However, the use of electric field assist allows a film to be obtained having higher orientation characteristics. In addition, the addition of hydrophilic groups and hydrophobic groups to the molecules used gives directivity to the orientation of the molecules thereby improving orientation characteristics. Fig. 21 is a conceptual representation of an electric field assist MLD along with one example of molecules used. An electric field is applying during deposition of a single molecular layer to orient and deposit the molecules. The orientation of molecules can be controlled by synchronizing and changing the electric field for each molecular layer. Fig. 22 is an example of selection of member groups having different reactivity from the same group and addition of those groups. In this case, orientation and deposition can be performed without an electric field. In other words, those groups having a high degree of reactivity selectively come to the substrate side. Similarly, Fig. 23 is an example of how orientation and deposition are achieved by creating a difference in the degree of steric hindrance. Those groups having a lower degree of steric hindrance selectively come to the substrate side. Fig. 24 depicts data for single molecular layer growth when using the above-mentioned molecule A1 (PMDA: pyromellitic dianhydride) for molecule A and the above-mentioned molecule B4 (DNB: 2,4-diaminonitrobenzene) for molecule B. With this example, film growth was performed on the quartz crystal plate of a monitor head. Growth of the DNB molecular layer on the PMDA molecular layer was performed at a substrate temperature (T s ) of approximately 50°C. In this case, T s is expressed as the value on the surface of the substrate holder. Film thickness data were measured with a crystal oscillator film thickness monitor. Although the monitor head was fixed to the substrate holder with an aluminum band, it is considered to be lower than the indicated temperature. Furthermore, shutter A is the shutter of the K cell for PMDA, while shutter B is the shutter of the K cell for DNB (to be treated similarly below). Film thickness increases rapidly following switching of the shutters, and then later becomes saturated. The saturation value is approximately 0.5nm, which is near the size of the molecules. It can thus be seen that growth of a single molecular layer was realized. Moreover, the above-mentioned technique was repeated, increasing the substrate temperature (T s ) to approximately 65°C. The data indicated in Fig. 25 was obtained. It can be understood from the data of Fig. 25 that re-evaporation occurs when the supply of molecule B is stopped due to the high value of T s . Growth of a PMDA molecular layer onto a DNB molecular layer was next performed at a substrate temperature (T s ) of approximately 80°C. The data that was obtained is indicated in Fig. 26. In this case also, single molecular growth was observed. Moreover, the above-mentioned technique was repeated with lowering of the substrate temperature (T s ) to approximately 50°C. It can be understood from the data of Fig. 27 that molecule A continues to accumulate due to the low value of T s . In this case, growth cannot be stopped automatically following growth of a single molecular layer. What can be most likely understood from the data of Figs. 24 - 27 is that when the substrate temperature is changed corresponding to the type of molecule supplied, single molecular layer growth can be performed effectively. A film in which layers of single molecules are grown one layer at a time can be obtained by repeatedly switching the supply of molecules while correspondingly raising or lowering the substrate temperature. In addition, deposition at a constant substrate temperature is also possible by selecting suitable molecules, such as using molecules that, for example, have similar vapor pressures. As has been indicated above, optimization of substrate temperature is important for performing single molecular growth. In the case of using PMDA and DNB, MLD growth can be realized by raising or lowering T s in synchronization with the switching of molecules. In general, molecules having a high vapor pressure tend to have a lower optimum temperature in comparison with molecules having a low vapor pressure. After carrying out deposition in the manner described above using PMDA for molecule A and DNB for molecule B, DDE (4,4'-diaminodiphenyl ether) having the chemical formula indicated below was substituted for DNB, and growth of a PMDA molecular layer on a DDE molecular layer along with growth of a DDE molecular layer on a PMDA molecular layer were performed at a substrate temperature (T s ) of approximately 80°C. The data that was obtained is indicated in Fig. 28 for the first four layers. In this example, as a result of switching over the projection of molecules 15 times, a film having a thickness of approximately 10nm or less could be obtained. Reverting to Fig. 22 and the following figures, Fig. 22 shows schematically examples of molecules and the deposition states when using molecules A, wherein different groups were selected from group I and used as addition groups, and molecules B, wherein different groups were selected from group II and used as addition groups. Since there is a difference of the reactivities between the addition groups of each molecule, the adsorbed molecules have specific directivity. Utilizing this fact, a non-linear optical film can be fabricated without performing polling as a result of giving directivity to the dipole moment of the molecules. Fig. 23 shows schematically examples of molecules and deposition states when using molecules A, wherein the same groups are selected from group I and used as addition groups, and molecules B wherein the same groups are selected from group II and used as addition groups, but impart different steric hindrances to the same groups of each molecule. In this case also, since differences in reactivity occur between the addition groups of each molecule in the same manner as the above-mentioned deposition of Fig. 22, the adsorbed molecules have specific directivity. By forming a film while performing the above-mentioned electric field assist, a polymer film is obtained in which the molecules are oriented directly. In addition, the orientation of molecules can also be controlled by controlling the polarity of the voltage for each layer (Fig. 21). In addition, as is indicated in Fig. 29, MLD can also be performed in the present invention using molecules such as those containing groups such as a halogen group or hydrogen (an example of the molecular backbone is indicated in Fig. 30). When MLD is performed using such a molecule, a polymer can be fabricated in which a long conjugate chain is linked together as indicated in the following tables. As the locations of donor groups and acceptor groups in a polymer film obtained in this manner are precisely controlled, such a film demonstrates large non-linear optical effects. As was stated previously, polymers in which conjugate chains are linked together can also be fabricated by using a molecule having two or more -CHO groups and a molecule having two or more -NH 2 groups According to the present invention, an organic film can be obtained wherein the types of molecules are controlled for each molecular layer, thus being able to realize high-performance, multi-functional organic films including non-linear optical materials. Further, the present invention provides for the production of an organic film comprised of a polymer of a plurality of types of molecules linked together in the manner of bonding with double or triple bonds, and possessing a portion in which the conjugate length between consecutive n electrons is 1nm or more. This polymer is preferably a polymer consisting of alternate bonding of molecules having a plurality of -CHO groups and molecules having a plurality of -NH 2 groups, and sometimes may also be a microcrystalline substance. The present invention provides also for the production of an organic film comprised of a polymer, consisting of a plurality of types of molecules linked together in the manner of bonding with double or triple bonds, wherein a portion of the conjugated system between molecular units participating in bonding is divided by single bonds. The above-mentioned single bonds are preferably formed by bonding of groups contained in at least one portion of the above-mentioned plurality of types of unit molecules with other molecules, or introduced by copolymerization of molecules containing two or more consecutive single bonds. The present invention provides further for the production of an organic functional thin film comprised of a polymer, consisting of a plurality of types of molecules in which there is bonding with double or triple bonds, wherein at least one portion of the molecular units possesses donor and/or acceptor characteristics. These donor characteristics are provided by donor groups such as -NH 2 , -N(CH 3 ) 2 , -OCH 3 or -OH, and acceptor characteristics are provided by acceptor groups such as -NO 2 , -CN or -CF 3 . In addition, this polymer is a polymer formed by alternate bonding of molecules having a plurality of -CHO groups and molecules having a plurality of -NH 2 groups, and may sometimes be a microcrystalline substance. Alternatively, this polymer is preferably a polymer wherein a portion of the conjugated system between molecular units participating in bonding is joined by single bonds, and these single bonds are either formed by bonding of groups contained in at least one portion of the above-mentioned plurality of types of unit molecules with other molecules, or introduced by copolymerization of molecules containing two or more consecutive single bonds. The present invention provides further a process for fabrication of an organic film as mentioned above wherein molecules are either introduced in a vacuum or evaporated in a vacuum and bonded and/or polymerized on a substrate to form a thin film. The organic functional thin film produced by the process of the present invention can be suitable for use in one of a wide application range including non-linear optical materials, optical waveguides, p- or n-semiconductors, pn junctions, TFT, electronic devices and light emitting devices. The following provides a detailed description of further preferred embodiments of the present invention. Examples of molecules useful in the process of the present invention are indicated below. The following are examples of molecules having two or more -CHO groups having weak donor or acceptor characteristics or similar properties. The following are examples of molecules having two or more -NH 2 groups having weak donor or acceptor characteristics or similar properties. The following are examples of molecules having two or more -CHO groups and containing two or more consecutive single bonds. -O- may be replaced by -S-, -CH 2 -, etc. -O- may be replaced by -S-, -CH 2 -, etc. The following are examples of molecules having two or more -NH 2 groups and containing two or more consecutive single bonds. -O- may be replaced by -S-, -CH 2 -, etc. NH 2 ―(CH 2 ) n ―NH 2 -O- may be replaced by -S-, -CH 2 -, etc. The following are examples of molecules having two or more -CHO groups as well as acceptor characteristics. The following are examples of molecules having two or more NH 2 groups as well as acceptor characteristics. The following are examples of molecules having two or more -CHO groups as well as donor characteristics. The following are examples of molecules having two or more -NH 2 groups as well as donor characteristics. The following are examples of molecules having two or more -CHO groups as well as both acceptor and donor characteristics. The following are examples of molecules having two or more -NH 2 groups as well as both acceptor and donor characteristics. In addition, the following indicates examples of groups which form single bonds by reaction with another molecule in the manner mentioned above. - COCl - NCO - COOH ―NH 2 ―NHSI(CH 3 ) 3 ―OH The absorption spectra of films made from terephthal-aldehyde (TPA) and para-phenylenediamine (PPDA) by CVD (chemical vapor deposition) under various conditions using, for example, the deposition system shown in Fig. 40 are shown in Figs. 32 - 35. Fig. 32 is the absorption spectrum of a film made at a gas pressure of 2-10 x 10 -3 torr, a substrate temperature of 24°C and a rate of 10 - 30nm/min. The absorption spectra of methanolic solutions of PPDA and TPA are also shown. PPDA or TPA alone are transparent in the visible region. On the other hand, the film demonstrates strong absorption in the region of 500 - 350 nm. This indicates that long conjugate bonds of 1nm or more have been obtained. Moreover, excitons can be produced from the film of the present invention as can be confirmed by the sharp absorption peak in the vicinity of 480 nm. This finding also supports the formation of a long conjugate polymer. On the other hand, as is shown in Fig. 32, when the substrate is tilted towards the incident light during measurement of the absorption spectrum, absorption of excitons decreases as the incident angle Θ of the light changes from 0° to 45° and 60° in the case of a rapid deposition rate on the order of 6 - 10nm/min. This indicates that in the case of a rapid deposition rate, well-formed conjugate chains tend to grow in a direction parallel to the substrate. On the other hand, as is shown in Fig. 33, when deposition is performed at a rate of 2 - 6nm/min., exciton absorption conversely increases remarkably when the angle of inclination of the substrate is increased. Thus, this indicates a tendency in which well-formed conjugated systems grow in a direction perpendicular to the substrate. In this manner, the present invention allows orientation to be controlled according to the deposition conditions. Furthermore, in the case of film thickness being thin or the deposition rate being extremely slow on the order of 0.5nm/min. as in Fig. 34, there is virtually no production of excitons. In addition, when deposition is performed after cooling the substrate to a temperature of 0°C or less, a sharp exciton absorption peak is observed. These findings reveal that the use of optimal deposition conditions is indispensable to the fabrication of conjugate polymers. The following are examples of the polymer in the present invention wherein a portion of the conjugated system between molecular units is divided by single bonds. The polymer is obtained by bonding, for example, the following molecules in the proper order. The following is another example of said polymer. The polymer is obtained by bonding, for example, the following molecules in the proper order. In addition, a polymer can also be obtained, for example, forming a quantum dot as shown in Fig. 35 by bonding these molecules in the proper order. Not only does such a polymer demonstrate quantum effects, but is also effective in making conjugate length uniform. Fig. 43 is a diagram indicating an absorption curve measured for one example of a polymer having a quantum dot structure produceable by the method according to the present invention. In the diagram, (A) indicates the respective absorptions of the molecules composing the measured polymers, or more specifically, terephthalaldehyde (TPA), para-phenylenediamine (PPDA) and 4,4'-diaminodiphenyl ether (DDE). (B) and (C) indicate the absorptions of the respective polymers. Aquantum dot structure is not formed in the case of (C). In (B), a quantum dot having a length of roughly 2nm is formed containing three benzene rings with -O- bonds functioning as barriers. (C) contains a quantum dot having a short well length comprised of a single benzene ring. The absorption bands shift towards shorter wavelengths in the order of (C), (B) and (A). This is considered to be due to electron confinement by quantum dots. In addition, when absorption peaks resulting from differences in the bonding groups of the barrier portion of said polymer were measured, the results indicated in Fig. 37 were obtained. When molecules having -S- or -(CH 2 )- groups instead of -O- are used, -O- changes to -S- or -(CH 2 )- as indicated below. The locations of the absorption peaks (reflecting the energy gaps) shifted towards higher energy levels in the order of -S-, -O- and -(CH 2 )-. This indicates that barrier height increases and electron confinement effects become greater in this order. When the relationship between the length of the dot portion and absorption peak were measured for the polymer molecule of the present invention, shown in Fig. 35 and in greater detail in Fig. 44, results were obtained in which the peak demonstrated a blue shift accompanying shorter dot length as shown in Fig. 36 (indicated with circles). These results closely coincide with the calculated curve of the well potential model. The formation of such quantum dots is effective for realizing various functional devices including third-order non-linear optical materials. Fig. 38 is a schematic diagram of the structure of the cross-section of a film when the conjugate chain is deliberately divided by two or more single bonds. In this diagram, 1 indicates a conjugate portion (dot portion) and 2 indicates a non-conjugate portion (barrier portion). The orientation of the molecules is not limited to the vertical orientation indicated in the diagram, but may also be in a horizontal or diagonal orientation as well as a mixture of all three. CVD or MBD has been used in the past as a process for fabricating a film like that just described. More advanced processes for the same purpose include MLD which has been previously proposed. The principle of MLD is shown in Fig. 39. As shown in this diagram, a film can be formed by sequentially depositing, for example, molecular layer 4 having donor characteristics, molecular layer 5 having acceptor characteristics and molecular layer 6 functioning as a barrier, on substrate 3 one molecular layer at a time. Naturally, the types of molecules, deposition sequence and number of layers are not limited to those shown in the diagram, but can be changed arbitrarily. Said MLD can be performed using, for example, a deposition system like that indicated in Fig. 40. In addition, CVD and MBD can also be performed using a similar system. This system is equipped with two K cells 7 for molecule evaporation (equipped with shutters 8), and two monomer gas tanks or monomer gas supply cells 9 (equipped with valves 10). In this system, substrate 3 held in position by substrate holder 11 can be both heated and cooled, and a voltage can be applied between electrodes 12 and 13 formed on the substrate. However, electrode formation and application of an electric field are not necessarily required. In addition, the film thickness of the polymer film formed on substrate 3 can be monitored by film thickness monitor 14, and substrate temperature can be controlled by means of thermocouple 15. Naturally, the number of K cells for molecule evaporation along with the number of monomer gas tanks or monomer gas supply cells are not limited to those indicated in the diagram. In addition, it is desirable that various methods, such as that employing an optical monitor, be used in combination for monitoring of film thickness. Fig. 52 indicates an example of MLD using TPA and PPDA. The deposition process for each molecular layer deposited can be observed with the film thickness monitor by appropriate switching of gas molecule valves on and off. The speed at which deposition is performed can be changed by adjusting substrate temperature, gas pressure and so on. As MLD enables fabrication of films from single molecules as described above, not only is it extremely effective, but it also greatly contributes to improvement of film flatness as shown in Fig. 41. In other words, in the case of method (a) of the prior art, the surface is susceptible to roughing due to each molecular chain growing randomly at each location. In contrast, in the case of MLD (b), the surface tends to be smooth since each molecular chain grows simultaneously one molecule at a time. Said MLD allows the orientation of polymer molecules to be controlled by treatment of the substrate. For example, if substrate 3 is treated in advance with a silane-based surface active material having terminal amino protons as indicated in Fig. 42, it becomes easy for the film above it to grow vertically from the substrate. In addition, it is known that if a film of 1,10-diaminodecane is formed in advance, the film above that film is oriented vertically (A. Kubono, N. Okui, K. Tanaka, S. Umemoto and T. Sakai, Thin Solid Films, 199, 385 (1991)), and the use of this technique is also one method to control the orientation of polymer molecules. These orientation treatment processes can also be applied to CVD as well as MLD. Moreover, the following is an example of a polymer produceable by the process of the present invention having both donor groups and acceptor groups. This polymer is obtained by bonding, for example, it may contain the following molecules in the proper order. The following is another example of said polymer. This polymer is obtained by bonding, for example, the following molecules in the proper order. The following is anotherexample of said polymer. This polymer is obtained by bonding, for example, the following molecules in the proper order. Fig. 45 is a schematic diagram of the structure of a cross-section of a film when the conjugate chain is deliberately divided by single bonds. In this diagram, 16 indicates a conjugate portion (dot portion) and 17 indicates a non-conjugate portion (barrier portion). In this case, both donor groups (D) and acceptor groups (A) are present in the conjugate portion. This film shows a considerable Pockels effect. Furthermore, the orientation of the molecules is not limited to the vertical orientation indicated in the diagram, but may also be in a horizontal or diagonal orientation as well as a mixture of all three. Although the conjugated system in the polymer depicted in the schematic diagram of Fig. 46 is connected, it contains neutral molecular units which have neither donor or acceptor characteristics (H). Fig. 47 shows examples of n- and p-semiconductors made by adding D and A groups to the conjugate chain. Electrons mainly flow along the conjugate chain. In addition, the strength of n and p can be adjusted by the amount of D and A groups added. In this example, a pn junction was formed. Individual n- and p-semiconductors can also be made. These devices function as photodiodes and LED. Moreover, laser generation is also possible by introducing a resonator structure. Fig. 48 is an example of a TFT using a conjugate polymer produceable by the process of the present invention. A polymer having both D and A groups is used as the composite material of organic thin film layer 18. In this diagram, 19 represents a gate insulator. Fig. 50 is an example of an optical waveguide. This optical waveguide is made by having buffer layer 20, non-linear optical material layer 21 and buffer layer 20 apearing consecutively on the polymer chain. The buffer layer is mainly composed of single bonds and has a low refractive index. In this case, the buffer layer may be formed with a conjugate polymer. The difference between the refractive indices of the non-linear optical material layer and the buffer layer can be varied by adjusting the proportion of conjugate bonds and single bonds or by adjusting substitution groups. Moreover, another example of a polymer produceable by the process of the present invention is shown in the schematic diagram of Fig. 50. In this diagram, 3 indicates the substrate. In addition, Fig. 51 is a diagram indicating an absorption curve measured for another example of a polymer produceable by method of the present invention. In this diagram, TPA represents terephthalaldehyde, NPDA represents 2-nitro-1,4-phenylenediamine, and T s indicates substrate temperature. The absorption of NPDA alone due to polymerization has been omitted. In addition to introduction of donors and/or acceptors and formation of quantum wells, devices using these can be formed by MLD. Naturally, these can also be formed using CVD while controlling film thickness. As has been explained above, in addition to obtaining a conjugate polymer having a well-formed conjugate chain, the present invention allows the realization of a conjugate polymer wherein conjugate length is controlled and quantum wells are formed. In addition, the present invention also allows the realization of an organic functional thin film such as that of high-performance non-linear optical materials and organic semiconductor materials, as well as devices using those materials. The present invention further enables an organic functional thin film to be produced which is comprised of a polymer of two or more different molecules selected from molecules having two or more different groups, formed by vapor-phase deposition, the polymer containing Si and/or Ge in the molecular chain. The polymer may be formed by a reaction as represented by the following formula. Examples of the molecules usable for the formation of this polymer may include the following molecules. R A ―C≡C―R B In the above formulae, R A -R J represent groups participating in the formation of the polymer chain, and R 1 - R 8 represent groups corresponding to the pendant groups of the resulting polymer. Examples of groups R A - R J may include -H, -Br, -Cl, -F, -CHO, GI, and GII and examples of groups R 1 -R 8 may include -PH 2 , -BH 2 , -NH 2 , -CHO, GI, and GII in which GI may be, for example, selected from the following groups, -COCl -NCO -COOH and GII may be selected from the following groups, ―NH 2 ―NHSI(CH 3 ) 3 ―OH The formation of the polymer may be exemplified as follows. in which R 1 - R 8 are as defined above. Reactions (a) and (b) form one molecule chain bond. For example, for reaction (a), molecule A in which R 1 and R 2 are phenyl and molecule B in which R 3 and R 4 are phenyl are projected from a cell heated to a temperature of 80 to 300°C onto a substrate such as of silicon or quartz in a vacuum chamber. The vacuum chamber may be at a gas pressure of about 10 -5 - 10 -2 torr and the substrate may be heated to a temperature of about 80 to 150°C. On the substrate, Cl of molecule A is reacted with H of molecule B to leave HCl and form an Si-Si bond. The reaction may be continued to form a bond such as -Si-Si-Si-Si-. Where ultraviolet rays are irradiated, this reaction is accelerated. This reaction is also accelerated where Ar is introduced into a chamber to a pressure of about 10 -3 torr and an RF power of about 1 to 30 W is applied, for example. Reactions (b) and (c) may proceed at a slightly higher temperature. Reaction (c) forms a three molecule chain bond. In reaction (c), although the bonding of Cl and H may be caused at a point other than the point as indicated, the three molecule chain bond may occur at least partially. The reactions between the molecules may be performed by introducing the gas of the molecules into a vacuum chamber to form a polymer film. In reaction (a), (b) and (c), the polymer chain is formed through σ-bonds. In reaction (d), the molecules are bonded through n electrons since the reaction of -CHO and -NH 2 proceeds easily at room temperature. For example, molecule A in which R 1 - R 4 are phenyl and molecule B in which R 5 - R 8 are phenyl are projected from a cell heated to a temperature of 100 to 300°C onto a substrate in a vacuum chamber. The vacuum chamber may be at a gas pressure of about 10 -5 - 10 -2 torr and the substrate may be heated to a temperature of about 80°C. On the substrate, -CHO of molecule A is reacted with -NH 2 of molecule B to leave H 2 O and form a C = N bond. The reaction may be continued to form the conjugated polymer. As in reactions (a), (b) and (c), where ultraviolet rays are irradiated or a plasma is applied, this reaction is accelerated. In reaction (e), a multi-molecule chain bond is formed. Molecules A, B, C and D participate in connecting the chains with conjugated bonds. Molecules E and F have only one -NH 2 group, and therefore, participate in terminating the inter-chain connection. Thus, if molecules E and F are fed in a specific proportion, a desired width or length of the polymer chain can be attained. For example, if molecules A, B, C, D, E and F are reacted in a mole ratio of 3:3:3:3:1:1, a polymer having an average chain width corresponding to 5 molecules can be obtained. Further, as shown in reaction (f), if a similar procedure is carried out while employing together a molecule containing oxygen such as molecule G which corresponds to a molecule A to F in which Cl and H are replaced by ethoxy, a siloxane type rigid polymer can be obtained. The decomposition reaction of ethoxy to form the siloxane type bonds may occur at room temperature, but it is effective to heat the substrate to about 150°C or to apply a plasma. The following are examples of a polymer chain structure in which the order of the constituting molecules is controlled. ― A ― C ― B ― D ― E ― F ― In the above polymer (a), the Si, Ge and C atoms are arranged in a controlled order to break the reversed symmetry of the polymer molecule. In polymer (b), donor and acceptor groups are introduced into the pendant groups of the molecule to break the reversed symmetry. Therefore, the polymers exhibit second-order non-linear optical characteristics such as the Pockels effect and the like. The reversed symmetry may also be broken by selective doping by a dopant. Further, in polymer (b), the lengths of the quantum dots is controlled by introducing O atoms to form barriers. Of course, the above polymers (a) and (b) are examples of the polymer of the present invention, and thus, the arrangement of the donor and acceptor groups and the lengths of the quantum dots can be widely selected as desired. Further, the oxygen atoms for the formation of barriers can be introduced by employing a molecule such as molecule G having ethoxy groups as mentioned above for polymer (f). The cross-sectional structure of the polymer of the organic functional thin film according to this aspect of the invention having quantum dots provided may also be schematically shown by Fig. 45. The orientation of the polymer molecules may not only be vertical but also be horizontal or oblique, or may be in a combined state of such orientations. The polymer may have a structure as shown in Fig. 46. By using such polymer produced according to this aspect of the present invention, there may also be attained an n-and p-semiconductor as shown in Fig. 47, a TFT as shown in Fig. 48, and an optical waveguide as shown in Fig. 49. These devices may be attained by the doping of P, B or the like, instead of the introduction of the donor and acceptor groups. Such organic functional thin film may be prepared more particularly by the processes as described hereinbefore, especially by MLD as mentioned with reference to Figs. 1, 4 and 6. Another example of the film may be as shown in Fig. 50. Again, MLD allows the fabrication of films of the order of single molecules, it not only being extremely effective, but it also greatly contributing to improvement of film flatness as shown in Fig. 51. Likewise, as explained hereinbefore by referring to Fig. 42, where the substrate is treated in advance with a surface active molecule having halogen, H or OH or an LB film, it becomes easy for the film above it to glow vertically from the substrate. It may be effective to cover the substrate surface with a layer of Cl, H or OH. The OH layer may be formed by an oxygen plasma treatment, and the Cl layer may be formed by a light irradiation or plasma treatment under a chlorine atmosphere. Furthermore, the present invention enables an epoxy polymer film to be produced comprised of a polymer of a molecule having one or more aliphatic amino groups and a molecule having two or more epoxy groups, formed by vapor-phase deposition. Typical examples of thealiphatic amino group-containing molecule may include the following compounds, and typical examples of the epoxy group containing molecule may include the following compounds, For example, by using the above compounds (2) and (3), the following polymer can be formed. The polymer thin film may be formed by the hereinbefore-mentioned various methods including CVD, MBD and MLD. The polymer thin film may be used as material for various applications such as insulating film, protective film, cores and claddings of optical waveguides, molecule-orientating film, lubricating film, substrates for electronic circuits, negative and positive resists, reflection-preventing film, and non-linear optical materials. In another procedure embodying the present invention, an EL element is attained by arranging a luminescent molecule between an n-type polymer chain and a p-type polymer chain in n- and p-polymers as mentioned hereinbefore. Also, an electrochromic polymer may be obtained by alternately arranging electron-donating molecules and electron-accepting molecules one by one in a plurality of layers. Further, an electrochromic polymer may be obtained by arranging combinations of an electron-donating molecule and an electron-accepting molecule through an electron-blocking molecule in a plurality of layers. In such a polymer, a barrier molecule may be employed as the electron-blocking molecule. By adopting these polymers having a controlled molecular arrangement, there can be attained a high brightness and long life in EL elements as well as a high speed operation and long life in electrochromic and photochromic polymers. An EL element produceable by the process of the present invention is schematically shown in Fig. 53. The n-type and p-type chains are formed by adding donor and acceptor groups to the conjugate chain. The formation of the conjugate polymer and the monomers usable for the polymer formation may be as described hereinbefore in detail. Between the n-type chain and the p-type chain, a luminescent molecule represented by the following formula, in which (L) represents a skeleton structure of the luminescent molecule, is introduced. The skeleton structure of the luminescent molecule is introduced into the conjugate polymer through a conjugate bond formed by the reaction of the -CHO group with the -NH 2 group. Examples of the skeleton structure of the luminescent molecule may include those represented by the following formulae. As shown in Fig. 54, if a minus voltage is applied to the n-side, a forward current flows, an electron combines with a hole at the luminescent portion to cause luminescence. An electrochromic element is schematically shown in Fig. 55. As shown in Fig. 56, if a plus voltage is applied to the electron-accepting molecule side and a minus voltage is applied to the electro-donating molecule side, electrons appear on the electron-accepting molecule side and holes appear on the electro-donating molecule side. Thus, an oxidized state is caused on the electron accepting molecule side and a reduced state is caused on the electron-donating molecule side, so that the light absorption spectrum of the polymer is changed. Examples of the electron-accepting molecule, electron-donating molecule, electron-blocking molecule and electrochromic molecule may include those represented by the following formulae, OHC- (A) -CHO OHC- (D) -CHO OHC- (B) -CHO OHC- (EC) -CHO H 2 N- (A) -NH 2 H 2 N- (D) -NH 2 H 2 N- (B) -NH 2 H 2 N- (EC) -NH 2 in which (A), (B), (D) and (EC) respectively represent skeleton structures of the electron-accepting molecule, electron-donating molecule, electron-blocking molecule and electrochromic molecule. Examples of the skeleton structures of the electron-accepting molecule, electron-donating molecule, electron-blocking molecule and electro chromic molecule may include the following. Electron-accepting molecule (A): Tetracyanoquinodimethane Tetracyanoethylene Tetrafluorotetracyanoquinodimethane Electron-donating molecule (D): Tetrathiafulvalene Bis-(ethylenedithio)-tetrathiafulvalene Bis-(methylenedithio)-tetrathiafulvalene Tetrakis-(methylthio)-tetrathiafulvalene Tetrakis-(octadecylthio)-tetrathiafulvalene Bis-(propylenedithio)-tetrathiafulvalene Electron-blocking molecule (B): Diphenyl ether Diphenylmethane Electro-chromic substance (EC): Viologens Phthalocianine complexes Pyrazolines Where molecules having the following structures, in which (A) and (D) are as defined above, and GI may be selected from the following groups, -COCl -NCO -COOH and GII may be selected from the following groups, ―NH 2 ―NHSi(CH 3 ) 3 ―OH are employed, an electrochromic polymer can be obtained without employing an electron-blocking molecule since two successive single bonds separate an electron-accepting group from an electron-donating group. In the above-mentioned embodiments, the polymers are oriented vertically with respect to the substrates. As the material of the electrode for applying voltage, there may be used metals, transparent electrode materials such as ITO, conductive polymers and charge-transfer complexes, with organic conductive materials being particularly useful for preventing migration. These elements can of course be prepared by utilizing the CVD, MBD and MLD methods as mentioned hereinbefore. According to a further embodiment of the present invention, it is possible to produce a photo-refractive polymer comprising units of a molecule having second-order non-linear optical characteristics and of a hole and/or electron-carrying molecule added to a polymer chain. This invention enables, further, photo-refractive polymers to be produced comprising units of a molecule having second-order non-linear optical characteristics added to a polymer chain containing units of a hole and/or electron-carrying molecule, comprising units of a molecule having second-order non-linear optical characteristics added to a conjugate polymer chain, or comprising a conjugate polymer chain having second-order non-linear optical characteristics. These photo-refractive polymers have drastically improved photo-refractive characteristics. Structures of photo-refractive polymers produceable by the process of the invention are schematically shown in Fig. 57. In (a), hole and/or electron-carrying molecule units HE are added to a polymer chain PO containing non-linear optical molecule units NL, while carrier-trapping units CT being dispersed, to increase the density of the hole and/or electron-carrying molecule units and improve the sensitivity of the resulting polymer. In (b), carrier-trapping units are also introduced into the polymer chain to attain a stable trapping effect. In (c), hole and/or electron-carrying molecule units are introduced into the polymer chain containing non-linear optical molecule units to increase the carrying efficiency and improve the sensitivity of the resulting polymer. In (d) and (e), it is intended to further increase the carrying efficiency by introducing non-linear optical molecule units and carrier-trapping units to a conjugate polymer chain CP. In (f), non-linear optical characteristics and carrier-trapping characteristics are introduced into a conjugate polymer chain to improve the carrying efficiency. Examples of the combination of elements usable for the formation of the structures as shown in Fig. 57 may be indicated by Fig. 58. The skeleton structure of the electron-carrying molecule may be derived from the following compounds. Bis(1,8-naphthalenedicarboxylic)-3,3'-benzidineimidazole 1,8-Naphthalenedicarboxylic-9,10-phenanthreneimidazole BPLA Tris(8-hydroxyquinolinol)aluminum 3,4,9,10-Perylene tetracarboxylic bisbenzimidazole N,N-Diphenyl-3,4,9,10-perylenetetracarboxylicdiimide The skeleton structure of the hole-carrying molecule may be derived from the following compounds. N,N'-Diphenyl-N,N'-Bis(3-methylphenyl)-1,1'-biphenyl-4,4'-diamine p-Methyl-TPD (p-Methyl)-TPD N,N-Tetraphenyl-3,3'-dimethylbenzidine N,N-Tetraphenyl-3,3'-dinitrobenzidine (p-Nitro) 2 -TPD N,N,N',N'-Tetraphenyl-4,4'-diaminostilbene N-N-N'-N'-Tetratolyl-4,4'-diaminostilbene The structures (a)-(f) may preferably be prepared by the various methods of CVD, MBD, MLD and others as mentioned hereinbefore. In the embodiment shown in Fig. 58, (b), 1, the structure is formed by the reaction between a carbonyloxycarbonyl group, a carboxylic acid halide group, a -CHO group, an -NCO group or the like and an amino group, a group containing at least one amino proton, an alkylamino group, a silylated alkylamino group or the like. For example, the molecules having such groups as described hereinbefore as well as hole-carrying molecules derived from (p-methyl) 4 -TPD by replacing the two methyl groups thereof by amino groups are projected in vacuum, while applying a voltage, onto a substrate successively one by one to form a polymer. In the embodiment as shown in Fig. 58, (f), 1, the carrier-trapping units are formed by using a molecule obtained by adding a nitro group (acceptor A) to terephthalaldehyde, by adding a dimethylamino group (donor D) to paraphenylene diamine, or if desirable by adding two nitro groups (acceptor A) to terephthalaldehyde or by adding two dimethylamino groups (donor D) to paraphenylene diamine.

Claims: A molecular layer deposition process for forming a thin film made up of reacted layers of organic monomer molecules which carry groups whereby interlayer reaction can be achieved, comprising projecting into a substrate under a vacuum, one at a time, in a specified well-ordered sequence or random sequence, a plurality of types of molecules each carrying two or more reactive groups, in which process the substrate temperature during the projection of the molecules theretoward is such that the molecular re-evaporation rate is higher than the molecular projection rate and a film is build up on the substrate as reaction bonds are formed between the different types of molecules. A process according to claim 1, wherein there are used a first molecule type having two or more identical or different first condensation groups selected from carbonyloxycarbonyl, aldehyde, carboxylic, carboxylic acid halide and -NCO and a second molecule type having two or more identical or different condensation groups selected from amino, alkylamino, silylated alkylamino, carboxyl and hydroxyl, or the first condensation groups being epoxy and the second condensations groups being groups containing at least two amino protons. A process according to claim 1, wherein there are used a first molecule type having two or more halogen condensation groups and a second molecule type having two or more groups selected from hydrogen, alkali metals and copper. A process according to claim 1 or 2, wherein at least a proportion of the molecules of each said type has a donor group and/or acceptor group. A process according to claim 4, wherein at least one of the groups added as a donor group is a group other than an amino group. A process according to and preceding claim, wherein at least a proportion of said condensation groups contained in a molecule is separated from a conjugate n electron system that composes the backbone of the molecule by two or more single bonds. A process according to any preceding claim, wherein the deposition is performed while irradiating with light. A process according to any one of claims 1 to 6, wherein the deposition is performed while irradiating with an electron beam. A process according to any one of claims 1 to 6, wherein the molecules are polymerized by heating or irradiation with light following deposition. A process according to any one of claims 1 to 6, wherein the deposition is performed while applying a voltage to pattern electrodes formed on a substrate. A process according to any one of claims 1 to 6, wherein the deposition is performed while applying a voltage between an electrode provided on or in the vicinity of a substrate and an electrode provided in opposition to the substrate. A process according to claim 11, wherein the electrode provided in opposition to the substrate has a porous or mesh structure. A process according to claim 11, wherein the electrode provided on or in the vicinity of the substrate and/or the electrode provided in opposition to the substrate is formed into patterns. A process according to any one of claims 1 to 6, wherein the deposition is performed in the presence of generated plasma.

Inventors: SOTOYAMA WATARU, TATSUURA SATOSHI, YANO EI, YOSHIMURA TETSUZO, SOTOYAMA, WATARU, TATSUURA, SATOSHI, YANO, EI, YOSHIMURA, TETSUZO, Sotoyama, Wataru, c/o FUJITSU LTD., Tatsuura, Satoshi, c/o FUJITSU LTD., Yano, Ei, c/o FUJITSU LTD., Yoshimura, Tetsuzo, c/o FUJITSU LTD.
Applicants: FUJITSU LTD, FUJITSU LIMITED
Application year: 1992
Main classification: G02F1
IPC codes: C08G73, C08G77, H01L51, G02F1, C08G59, C08G69