Exposure apparatus including two illuminating systems and exposure process using the same

Abstract: Disclosed are an exposure apparatus and process, having a holding unit for holding first and second objects such as a mask and a substrate, a first illumination system for illuminating the first object with an exposure light, a projection optical system for forming an image of a portion such as a pattern portion of the first object illuminated with the exposure light onto the second object and a second illumination system for illuminating a portion such as peripheral portion of the second object hels by the holding unit outside of a portion of the second object illuminated with the exposure light from the first illumination system. The exposure apparatus or process may further include a moving unit or step for moving the first and second objects as a unit relative to the projection optical system and a control unit or step for causing the moving unit to move the first and second objects as a unit relative to the projection optical system while causing the first illumination system and the second illumination system to illuminate the first object and the second object, respectively, so that the image of the pattern on the first object is tranferred onto the second object through the projection optical system.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to an exposure apparatus or aligner and an exposure process, and in particular, to those in which an image of a pattern formed on an original body or a mask is exposure-transferred onto an exposure body or a substrate by scan-exposing the mask and the substrate through a mirror projection optical system while moving the mask and the substrate as a unit relative to the mirror projection optical system. Further in particular, the present invention also relates to an exposure apparatus and an exposure process for producing a liquid crystal display panel, especially, a large-sized liquid crystal display panel. Related Background Art A full wafer or one-shot exposure apparatus in which an image of a pattern formed on a mask is exposure-transferred onto a substrate by scan-exposing the mask and the substrate through a mirror projection optical system while moving the mask and the substrate as a unit relative to the mirror projection optical system has been used as an exposure apparatus to be used for producing a liquid crystal display panel, in particular, a liquid crystal display panel of a size of about 254 mm (10 inches) which is expected to be widely utilized for small scale or personal computers. This is because such a type of exposure apparatus has a good resolution and a high productivity. In this exposure apparatus, there is provided a well-known projection system containing three mirrors which have surfaces ground to a very high precision, and the mask and the substrate are scan-exposed as a unit relative to the projection system so that an entire image of the pattern on the mask is transferred onto the substrate using a good image area of an arcuate slit shape obtained by the projection system. In this apparatus, the size of an exposure area in a scanning direction (Y direction) is determined by a distance by which the mask and the substrate are scanned relative to the projection system, while that in a direction (X direction) orthogonal to the scanning direction is determined by a width in the X direction of the arcuate slit imaged by the mirror projection system. On the other hand, the crystal liquid display panel has been produced as follows: The pattern on the mask is transferred onto a photoresist on the substrate, and processes similar to those for producing semiconductor devices such as IC's and LSI's are performed. The substrate is used as a pixel driving circuit for controlling the drive of liquid crystal. In the exposure apparatus for producing liquid crystal display panels, a necessary exposure area for producing the liquid crystal display panel will theoretically suffice if this exposure area has a size that covers a pixel pattern portion of the display panel and an electrode pattern portion provided on its periphery. In a large-sized substrate, however, a substrate having a size larger than an exposure area needed to expose a portion which will become a liquid crystal display panel is generally needed since a resist coating uniformity at the substrate periphery is low. At present, following is about to become a standard. That is, two liquid crystal display panels having a size of about 254 mm (10 inches) are taken from a large substrate of 320 mm x 400 mm. However, the following disadvantages have been arisen when only the liquid crystal panel portion is exposed using such a large substrate. Normally, when a substrate is exposed for producing a liquid crystal display panel, a positive resist is used. Therefore, resist layers are layered on a periphery of the substrate each time one process or layer is performed unless a light beam is applied to the periphery. When the substrate is supplied from and to a transport cassette in the exposure apparatus, the layered layers are brought into engagement with a slot portion of the cassette to be peeled off. Thus, the peeled resist becomes dust. Further, the resist also becomes dust when the substrate is scribed. If a pattern transfer is performd with the dust on the substrate surface (the side on which photoresist is coated), the yield of the liquid crystal panel extremely decreases. In order to solve this problem, a light beam has only to be applied also to the photoresist on the periphery of the liquid crystal display panel on the substrate so as not to cause the resist layer to be layered thereon. Conventionally, the fabrication of liquid crystal display panels has been conducted in the following manner. While only a liquid crystal display panel portion requiring a considerable resolution is exposed using the above-discussed mirror projection type exposure apparatus or a well-known lens projection type exposure apparatus, its periphery is exposed using a proximity exposure apparatus which does not have a resolution needed to expose the liquid crystal display panel but is capable of exposing a large image field en bloc. In the case where the periphery is exposed by another exposure apparatus, however, two exposure processes have to be conducted by two kinds of exposure apparatuses, respectively, when one-process (layer) patterning is to be performed on a substrate. As a result, the productivity is greatly lowered. On the other hand, when considering that the exposure of the periphery is also conducted by the exposure apparatus that exposes the liquid crystal panel portion, such exposure is possible by extending a scanning distance with respect to a londitudinal or Y direction in the mirror projection exposure apparatus. With respect to a lateral or X direction, such exposure becomes possible by expanding the width of an arcuate slit determined by the mirror projection optical system. The extension of the scanning distance by which mask and substrate are moved as a unit can readily be achieved only by extending a scanning guide for guiding the movement of mask and substrate. The expansion of the width of the arcuate slit in the lateral direction, however, is quite difficult if not impossible. Following are reasons therefor. 1. The width of the arcuate slit needs to has a length that is capable of effectively exposing a liquid crystal display panel having a desired size. For example, the width should be set to about 280 mm in the exposure apparatus for producing a panel having a size of 254 mm (10 inches). When the width of the arcuate slit is extended to 320 mm which is a lateral length of the substrate, the area of the slit is enlarged and hence an illumination light or exposure light for transferring the pattern will be diffused on the substrate. As a result, the illuminance on the substrate is reduced, and an exposure time during which the liquid crystal display panel portion is exposed is prolonged, leading to a low productivity. 2. When the width of the slit is expanded, the mirror projection optical system is enlarged in size and hence its working becomes difficult. Further, the size of the exposure apparatus is made large, and a wide foot space therefor is needed. A large exposure apparatus is undesirable because the exposure apparatus for producing the liquid crystal display panel is usually installed in a clean room similar to that for producing semiconductor devices. US-A-4769680 describes a step-and-repeat apparatus using two reticles and two optical systems. US-A-4822975 describes a method and apparatus for scanning exposure using a pulse laser beam. A pattern of a first member is projected onto a second member using the pulse laser beams. During the pattern projection, the first and second members are moved relative to one another and the irradiation or pulse, emission and the movement of the first and second members are coordinated with one another to enable a uniform exposure. In one aspect, the present invention provides an exposure apparatus for transferring a pattern on a first object onto a second object and exposing said second object with said pattern, the apparatus comprising first illumination means for illuminating the first object to expose the second object, the first illumination means being arranged to provide a first exposure light for projecting a part of the pattern of the first object onto the second object and moving means for moving the first and second objects relative to the first illumination means to scan the first and second objects with the first exposure light and thereby transfer the pattern of the first object to the second object; characterised in that a second illumination means is provided for illuminating a peripheral part of the second object with a second exposure light and the moving means is arranged to move the first and second objects relative to both the first and second illumination means to cause the second exposure light to scan the second object to expose a peripheral region of the second object adjacent the region to which the pattern is to be transferred by the scanning with the first exposure light. In another aspect, the present invention provides a method of transferring a pattern on a first object onto a second object, comprising with illuminating the first object first illumination means to provide a first exposure light for projecting a part of the pattern of the first object onto the second object to expose the second object, and moving the first and second objects relative to the first illumination means to scan the first and second objects with the first exposure light and thereby transfer the pattern of the first object to the second object; characterised by illuminating a peripheral part of the second object with a second exposure light provided by a second illumination means and moving the first and second objects relative to both the first and second illumination means to cause the second exposure light to scan the second object to expose a peripheral region of the second object adjacent the region to which the pattern is to be transferred by the scanning with the first exposure light. Embodiments of the present invention will now be described, by way of example, with reference to the accompanying drawings, in which: Fig. 1 is a view showing the structure of a first embodiment of an exposure apparatus according to the present invention. Fig. 2 is an illustration showing an exposure state of a substrate in the first embodiment. Fig. 3 is a partial view of a second embodiment of an exposure apparatus according to the present invention. Fig. 1 shows an overall structure of a first embodiment of a mirror projection exposure apparatus to which the present invention is applied. The exposure apparatus is directed to produce a liquid crystal display panel. A substrate for use as the liquid crystal display panel is processed each time a photoresist of each process or layer is exposed. similar to a fabrication process of a semiconductor device, so that a circuit including pixel electrodes for driving the liquid crystal is formed on its surface. The exposure apparatus of this embodiment is used for exposure-transferring a pattern for forming the circuit on the substrate in that process. In Fig. 1, reference numeral designates an illumination system for generating, is an illumination light or exposure light, a light beam having a wavelength to which the photoresist coated on the surface of a substrate 6 is sensitive. The exposure light 19 from the illumination system 1 is utilized for exposure-transferring a circuit forming pattern formed on a mask 5 onto a liquid crystal display panel portion 6a (see Fig. 2) on the substrate 6. The exposure light 19 from the illumination system 1 illuminates the mask 5 and the substrate 6 in an arcuate slit shape (see Fig. 2). In Fig. 1, reference numeral 2 designates an ultra-high pressure mercury lamp, and reference numeral 3 designates a shutter for controlling the illumination of the exposure light 19 from the illumination system 1 onto the mask 5. The shutter 3 is automatically opened and closed in accordance with an operation instruction from a control circuit (not shown), and transmission and interception of the exposure light 19 is controlled. The ultra-high pressure mercury lamp 2 and the shutter 3 are contained in the illumination system 1. Further, in Fig. 1, reference numeral 4 designates a mirror projection optical system including a convex mirror, a concave mirror and a trapezoid mirror, reference numeral 7 designates a carriage for supporting mask 5 and substrate 6 as a unit, Reference numerals 8 and 8' designate air bearing guides for movably supporting the carriage 7 in the Y direction or scanning direction and reference numeral 9 designates a linear motor for moving the carriage 7 in the Y direction relative to the projection system 4. The mirror projection optical system 4 makes an image of a portion of the mask 5 illuminated in an arcuate slit with the exposure light 19 from the illumination system 1, on the substrate 6. The mask 5 and the substrate 6 are respectively supported by the carriage 7 substantially parallel to an XY plane, and are located at opposite sides of the projection system 4 with respect to the Z direction. The mask 5 is positioned on an object plane of the projection system 4, while the substrate 6 is positioned on an image plane of the projection system 4. The air bearing guides 8 and 8' have guide rails extending in the Y direction and sliders to which pads are fixed for spouting static pressure air toward the guide rails, respectively. Those guide rails are fixed to an upper surface of a base 10, and the sliders are settled on a bottom surface of the carriage 7. The air bearing guide 8 is a type in which displacements of the carriage 7 in X and Z directions are constrained. The air bearing guide 8' is used solely for supporting the carriage 7 on the base 10 with respect to a vertical direction or Z direction. Therefore, when the carriage 7 is moved by the linear motor 9 in the Y direction while illuminating the mask 5 with the exposure light 19 from the illumination system 1 and an entire image of the pattern formed on the mask 5 is expose-transferred onto the photoresist on the substrate 6 through the projection system 4. The position of the carriage 7 relative to the base 10 is restricted by the guide rail of the air bearing guide 8. The linear motor 9 may be either of a moving coil type and a moving magnet type. The linear motor 9 is settled between the air bearing guides 8 and 8' with respect to the X direction. Its movable portion is fixed to the bottom surface of the carriage 7, while its stationary portion is fixed to the upper surface of the base 10. In Fig. 1, reference numerals 11 and 11' designate vibration-free pedestals for supporting the base 10 relative to a floor. Further, in Fig. 1, reference numeral 12 designates another illumination system for generating, as an illumination light, a light beam having a wavelength to which the photoresist coated on the surface of the substrate 6 is sensitive, similar to the illumination system 1. Illumination light beams 18 and 18' from the illumination system 12 are used for exposing peripheral portions 6b and 6b' outside of the liquid crystal display panel portion 6a on the substrate 6, as shown in Fig. 2. The peripheral portions 6b and 6b' are positioned at the opposite sides of the liquid crystal display panel portion 6a on the substrate 6 with respect to the X direction, and at the same time respectively have band shapes extending from one end of the substrate 6 to the other end thereof with respect to the Y direction (scanning direction). An ultra-high pressure mercury lamp 13 is disposed in the illumination system 12. In the illumination system 12 of Fig. 1, reference numerals 14 and 14' designate lenses for respectively condensing the light beams generated by the ultra-high mercury lamp 13 into different positions, and reference numerals 15 and 15' designate shutters for respectively controlling transmission and interception of light beams condensed by the lenses 14 and 14' toward ND filters 20 and 20'. The shutters 15 and 15' are automatically opened and closed in response to an operation instruction from the control circuit (not shown) mentioned above. Further, the shutters 15 and 15' respectively have different drivers therefor so that their opening and closing are controlled independently from each other. The ND filters 20 and 20' respectively comprise a plurality of portions having different densities or a portion whose density varies continuously in order to desirably adjust the amounts or intensities of lights transmitted therethorugh. Positions of the filters 20 and 20' are adjusted by respective drivers (not shown) for the light beams transmitted through the shutters 15 and 15' so that the amounts of the transmitted light beams therethrough can be adjusted. In Fig. 1, reference numerals 16 and 16' designate transmission optical systems for transmitting the light beams passed through the ND filters 20 and 20' to the illumination systems 17 and 17' , respectively, and the optical systems 16 and 16' are respectively made of a fiber or a light pipe. The illumination systems 17 and 17' are interposed between the projection system 4 and the substrate 6 with respect to the Z direction, while they are respectively disposed at opposite sides of the slit-shaped exposure light 19 from the projection system 4 with respect to the X direction. The illumination systems 17 and 17' respectively have condensor lenses 25 and 25' for condensing the light beams from the transmission optical systems 16 and 16' as illuminating light beams 18 and 18' for the substrate peripheries and mirrors 26 and 26' for directing the illuminating light beams 18 and 18' toward the peripheral portions 6b and 6b' of the substrate 6. The illuminating light beams 18 and 18' from the illumination optical systems 17 and 17' are irradiated in a light spot shape on the peripheral portions 6b and 6b', and are applied onto both sides of the exposure light 19 of an arcuate slit shape imaged by the projection system 4 while being a little shifted from the exposure light 19, as shown in Fig. 2. Positions and inclinations of the condensor lenses 25 and 25' or the mirrors 26 and 26' in the illumination optical systems 17 and 17' are adjusted so that the light spots of the illuminating light beams 18 and 18' are irradiated onto the peripheral portions 6b and 6b' of the substrate 6 that are not exposed by the exposure light 19. The illuminance of the illuminating light beams 18 and 18' on the substrate 6 is adjusted using the ND filters 20 and 20' of the illumination system 12 so that this illuminance has a sufficient magnitude to which the photoresist coated on the substrate 6 is sensitive. When the image of the pattern on the mask 5 is expose-transferred onto the substrate 6 through the projection system 4, the shutters 15 and 15' of the illumination system 12 are opened substantially at the same time with the opening of the shutter 3 in the illumination system 1. This operation is performed by the control circuit (not shown) mentioned above. The explanation of a construction of this control circuit is omitted here because this is apparent for its simple function. Thus, the illuminating light beams 18 and 18' from the illumination optical systems 17 and 17' are irradiated onto the peripheral portions 6b and 6b' while the exposure light 19 transmitted through the mirror projection optical system 4 is applied onto the display panel portion 6a of the substrate 6. Therefore, the peripheral portions 6b and 6b' are also exposed as well as the display panel portion 6a when the carriage 7 is moved by the linear motor 9 in the Y direction (scanning direction). If the peripheral portions 6b and 6b' should not be exposed at the same time with the display panel portion 6a, the carriage 7 has only to be moved in the Y direction with the shutters 15 and 15' of the illumination system 12 closed. If only one of the peripheral portions 6b and 6b' should be exposed, only one of the shutters 15 and 15' corresponding to the peripheral portion to be exposed is opened substantially in synchronization with the opening of the shutter 3 and the carriage 7 is then moved in the Y direction. In the first embodiment, the mercury lamp 13 of the second illumination system 12 for exposing the peripheral portions 6b and 6b' is provided separately from the mercury lamp 2 of the first illumination system 1 for exposing the display panel portion 6a. It is, however, possible to obtain the illumination light for exposing the peripheral portions 6b and 6b' as well as the exposure light for exposing the display panel portion 6a from the mercury lamp 2 for the exposure light 19 without using the mercury lamp 13. In this case, lenses 14 and 14' , shutters 15 and 15' and ND filters 20 and 20' are disposed for the ultra-high pressure mercury lamp 2, as shown in Fig. 3. For the rest, the illumination light beams are guided to the illumination systems 17 and 17' through the transmission optical systems 16 and 16' , similar to the first embodiment. As explained in the foregoing, according to the present invention, it is possible to expose both of two portions of the second object, for example, pattern portion and peripheral portion of the substrate, without lowering the productivity. Further, the size of the exposure apparatus itself would not be made large. Therefore, when the present invention is applied to an exposure apparatus for producing liquid crystal display panels, the manufacturing cost of the liquid crystal display panel can greatly be reduced. While the present invention has been described with respect to what is presently considered to be the preferred embodiments, it is understood that the invention is not limited to the disclosed embodiments.

Claims: An exposure apparatus for transferring a pattern on a first object (5) onto a second object (6) and exposing said second object with said pattern, the apparatus comprising first illumination means (1,2,3) for illuminating the first object (5) to expose the second object (6), the first illumination means (1,2,3) being arranged to provide a first exposure light (19) for projecting a part of the pattern of the first object (5) onto the second object (6), and moving means (7, 8, 8', 9) for moving the first and second objects (5, 6) relative to the first illumination means to scan the first and second objects with the first exposure light and thereby transfer the pattern of the first object to the second object; characterised in that a second illumination means (12-17, 12'-17') is provided for illuminating a peripheral part (6b, 6b') of the second object (6) with a second exposure light (18, 18') and the moving means (7, 8, 8', 9) is arranged to move the first and second objects relative to both the first and second illumination means to cause the second exposure light to scan the second object to expose a peripheral region (6b, 6b') of the second object (6) adjacent the region (6a) to which the pattern is to be transferred by the scanning with the first exposure light (19). An exposure apparatus according to claim 1, wherein the first illumination means (1,2,3) is arranged to provide a slit shape exposure light for (19) illuminating the first object (5). An exposure apparatus according to claim 1 or 2, wherein the first illumination means (1,2,3) comprises a projection optical system (4) for imaging a part of the pattern of the first object (5) on the second object (6). An exposure apparatus according to claim 3, wherein the projection optical system (4) comprises a mirror projection optical system. An exposure apparatus according to claim 3 or 4, wherein the second illumination means (12-17, 12'-17') is arranged to illuminate the second object (6) from between the projection optical system (4) and the second object (6). An exposure apparatus according to claim 3, 4 or 5, wherein the second illumination means (12-17, 12'-17') is arranged to illuminate portions (6b, 6b') of the second object (6) at each of two opposed sides of the portion (6a) of the second object (6) which is to be illuminated with the first exposure light (19) from the first illumination means (1,2,3) with respective light spots (18, 18') without transmission of the light spots through the projection optical system (4). An exposure apparatus according to any one of claims 3 to 5, further comprising control means for causing the moving means (7, 8, 8', 9) to move the first and second objects (5, 6) together as a unit relative to the first illumination means (1,2,3) while causing the first illumination means (1,2,3) and the second illumination means (12-17, 12'-17') to illuminate the first object (5) and the second object (6), respectively, so that the image of the pattern on the first object (5) is transferred onto the second object (6) through the projection optical system (4). An exposure apparatus according to claim 7, wherein the first and second illumination means comprise shutters (3,15 and 15'), respectively, and the control means is operable to control the shutters of said first and second illumination means in synchronism with one another. An exposure apparatus according to claim 7, wherein the second illumination means (12-17, 12'-17') is arranged to illuminate portions (6b, 6b') of the second object (6) at each of the two opposed sides of the portion (6a) of the second object (6) to be illuminated with the exposure light (19) from the first illumination means (1,2,3) with respective light spots, and the second illumination means comprises shutters (15 and 15') corresponding to the respective light spots, the control means being operable to control the shutters (15 and 15') of the second illumination means independently of one another. An exposure apparatus according to any one of the preceding claims, wherein the second illumination means comprises optical fiber means (16,16'). An exposure apparatus according to any one of claims 1 to 10, wherein the second illumination means comprises light pipe means (16,16'). An exposure apparatus according to any one of the preceding claims, wherein the second illumination means comprises changing means (20,20') for changing the intensity of illumination of the portion (6b, 6b') of the second object (6) outside of the portion (6a) of the second object (6) to be illuminated with the exposure light from the first illuminating means (1,2,3). An exposure apparatus according to claim 13, wherein the changing means comprises a neutral density (ND) filter (20,20'). An exposure apparatus according to any one of the preceding claims, wherein the first illumination means (1,2,3) comprises a first light source (2) and the second illumination means (12-17, 12'-17') comprises a second light source (13). An exposure apparatus according to any one of claims 1 to 14, wherein the first illumination means (1,2,3) comprises a light source (2) common to the second illumination means. An apparatus according to any one of the preceding claims, wherein the first and second exposure lights are suitable for exposing said second object (6) covered with positive resist. A method of transferring a pattern on a first object (5) onto a second object (6), comprising illuminating the first object (5) with first illumination means (1,2,3) to provide a first exposure light (19) for projecting a part of the pattern of the first object (5) onto the second object (6) to expose the second object, and moving the first and second objects (5, 6) relative to the first illumination means to scan the first and second objects with the first exposure light and thereby transfer the pattern of the first object to the second object; characterised by illuminating a peripheral part of the second object (6) with a second exposure light (18) provided by a second illumination means (12-17, 12'-17') and moving the first and second objects relative to both the first and second illumination means to cause the second exposure light to scan the second object to expose a peripheral region (6b, 6b') of the second object (6) adjacent the region (6a) to which the pattern is to be transferred by the scanning with the first exposure light (19). A method according to claim 18, which comprises providing the first exposure light as a slit shape light beam (19). A method according to claim 18 or 19, which comprises directing the first exposure light (19) to the first object (5) through a projection optical system (4) while directing the second exposure light (18) to the second object (6) without transmission through the projection optical system (4). A method according to claim 18, 19 or 20, which comprises illuminating each of two opposed sides (6b, 6b') of the portion (6a) of the second object (6) illuminated with the first exposure light (19) with the second exposure light. A method of manufacturing a liquid crystal display panel which comprises transferring an image of a pattern formed on a first object in the form of a mask onto a second object in the form of a substrate using a method in accordance with any one of claims 17 to 20 to expose the substrate and fabricating a liquid crystal display panel using the exposed substrate.

Inventors: ISOHATA JUNJI, ISOHATA, JUNJI, Isohata, Junji, c/o Canon Kabushiki Kaisha
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1992
Main classification: G03B27
IPC codes: H01L21, G03F7, G02F1