APPARATUS AND METHOD FOR HIGH THROUGHPUT SPUTTERING

Abstract: An apparatus provides a single or multi-layer coating to the surface of a plurality of substrates. The apparatus includes a plurality of buffer and sputtering chambers (12, 18, 20, 22A-E, 24A-C, 26 and 28-30), and an input end and an output end. The substrates are transported through said chambers (12, 18, 20, 22A-E, 24A-C, 26 and 28-30) at varying rates of speed. The apparatus may further include means for transporting a plurality of substrates through sputtering chambers (20, 26, 28) at variable velocities; means for reducing the ambient pressure within the sputtering chambers (20, 26, 28) to a vacuum level to enable sputtering operation; means for heating the substrates to a temperature conducive to sputtering coatings thereon providing a substantially uniform temperature profile over the surface of the substrates; and control means for providing control signals to and for receiving feedback input from, said sputtering chambers (20, 26, 28), means for transporting, means for reducing, and means for heating, the control means being programmable for allowing control over the means for sputtering, transporting, reducing and heating.

Description: APPARATUS AND METHOD FOR HIGH THROUGHPUT SPUTTERING Inventors: Dennis R. Hollars Delbert F. Waltrip Robert B. Zubeck Josef Bonigut Robert M. Smith Gary L. Payne LIMITED COPYRIGHT WAIVER A portion of the disclosure of this patent document contains material to which the claim of copyright protection is made. The copyright owner has no objection to the facsimile reproduction by any person of the patent document or the patent disclosure, as it appears in the U.S. Patent and Trademark Office file or records, but reserves all other rights whatsoever. BACKGROUND OF THE INVENTION 1. Field of the Invention The invention relates to an apparatus and method for depositing multilayer thin films in a magnetron sputtering process. More particularly, the invention relates to an apparatus and method for depositing thin magnetic films for magnetic recording media in a high volume, electronically controlled, magnetron sputtering process, and to production of an improved magnetic recording disk product thereby. 2. Description of the Related Art Sputtering is a well-known technique for depositing uniform thin films on a particular substrate. Sputtering is performed in an evacuated chamber using an inert gas, typically argon, with one or more substrates remaining static during deposition, being rotated about the target (a "planetary" system) or being transported past the target (an "in-line" system). Fundamentally, the technique involves bombarding the surface of a target material to be deposited as the film with electrostatically accelerated argon ions. Generally, electric fields are used to accelerate ions in the plasma gas, causing them to impinge on the target surface. As a result of momentum transfer, atoms and electrons are dislodged from the target surface in an area known as the erosion region. Target atoms deposit on the substrate, forming a film. Typically, evacuation of the sputtering chamber is a two-stage process in order to avoid contaminant- circulating turbulence in the chamber. First, a throttled roughing stage slowly pumps down the chamber to a first pressure, such as about 50 microns. Then, high vacuum pumping occurs using turbo-, cryo- or diffusion pumps to evacuate the chamber to the highly evacuated base pressure (about 10 "7 Torr) necessary to perform sputtering. Sputtering gas is subsequently provided in the evacuated chamber, backfilling to a pressure of about 2-10 microns. The sputtering process is useful for depositing coatings from a plurality of target materials onto a variety of substrate materials, including glass, nickel- phosphorus plated aluminum disks, and ceramic materials. However, the relatively low sputtering rate achieved by the process solely relying on electrostatic forces (diode sputtering) may be impracticable for certain commercial applications where high volume processing is desired. Consequently, various magnet arrangements have been used to enhance the sputtering rate by trapping electrons close to the target surface, ionizing more argon, increasing the probability of impacting and dislodging target atoms and therefore the sputtering rate. In particular, an increased sputtering rate is achieved by manipulation of a magnetic field geometry in the region adjacent to the target surface. Sputter deposition performed in this manner is generally referred to as magnetron sputtering. The magnetic field geometry may be optimized by adjusting the polarity and position of individual magnets used to generate magnetic fields with the goal of using the magnetic field flux paths to enhance the sputtering rate. For example, U.S. Patent No. 4,166,018, issued August 28, 1989 to J. S. Chapin and assigned to Airco, Inc., describes a planar direct current (d.c.) magnetron sputtering apparatus which uses a magnet configuration to generate arcuate magnetic flux paths (or lines) that confine the electrons and ions in a plasma region immediately adjacent to the target erosion region. A variety of magnet arrangements are suitable for this purpose, as long as one or more closed loop paths of magnetic flux is parallel to the cathode surface, e.g., concentric ovals or circles. The role of the magnetic field is to trap moving electrons near the target. The field generates a force on the electrons, inducing the electrons to take a spiral path about the magnetic field lines. Such a spiral path is longer than a path along the field lines, thereby increasing the chance of the electron ionizing a plasma gas atom, typically argon. In addition, field lines also reduce electron repulsion away from a negatively biased target. As a result, a greater ion flux is created in the plasma region adjacent to the target with a correspondingly enhanced erosion of target atoms from an area which conforms to a shape approximating the inverse shape of the field lines. - A - Thus, if the field above the target is configured in arcuate lines, the erosion region adjacent to the field lines conforms to a shallow track, leaving much of the target unavailable for sputtering. Even lower target utilization is problematic for magnetic targets because magnetic field lines tend to be concentrated within, and just above, a magnetic target. With increasing erosion of the magnetic target during sputtering, the field strength above the erosion region increases as more field lines 'leak' out from the target, trapping more electrons and further intensifying the plasma close to the erosion region. Consequently, the erosion region is limited to a narrow valley. In addition to achieving high film deposition rates, sputtering offers the ability to tailor film properties to a considerable extent by making minor adjustments to process parameters. Of particular interest are processes yielding films with specific crystalline microstructures and magnetic properties. Consequently, much research has been conducted on the effects of sputtering pressures, deposition temperature and maintenance of the evacuated environment to avoid contamination or degradation of the substrate surface before film deposition. Alloys of cobalt, nickel and chromium deposited on a chromium underlayer (CoNiCr/Cr) are highly desirable as films for magnetic recording media such as disks utilized in Winchester-type hard disk drives. However, on disk substrates, in-line sputtering processes create magnetic anisotropies which are manifested as signal waveform modulations and anomalies in the deposited films. Anisotropy in the direction of disk travel through such in-line processes is understood to be caused by crystalline growth perpendicular to the direction of disk travel as a result of the deposition of the obliquely incident flux of target atoms as the disk enters and exits a sputtering chamber. Since magnetic film properties depend on crystalline microstructure, such anisotropy in the chromium underlayer can disrupt the subsequent deposition of the magnetic CoNiCr layer in the preferred orientation. The preferred crystalline orientation for the chromium underlayer is with the closely packed, bcc {110} plane parallel to the film surface. This orientation for the chromium nucleating layer forces the 'C axis of the hep structure of the magnetic cobalt-alloy layer, i.e., the easy axis of magnetization, to be aligned in the film plane. Similarly, the orientation of the magnetic field generated in the sputtering process may induce an additional anisotropy which causes similar signal waveform modulations. See, Uchinami, et al. , "Magnetic Anisotropies in Sputtered Thin Film Disks", IEEE Trans. Maσn.. Vol. MAG-23, No. 5, 3408-10, Sept. 1987, and Hill, et al., "Effects of Process Parameters on Low Frequency Modulation on Sputtered Disks for Longitudinal Recording", J. Vac Sci . Tech. , Vol. A4, No. 3, 547-9, May 1986 (describing magnetic anisotropy phenomena) . Several approaches have been taken to eliminate the aforementioned waveform modulation problems while enhancing magnetic properties in the coating, especially coercivity. For instance, U.S. Patent No. 4,816,127, issued March 28, 1989 to A. Eltoukhy and assigned to Xidex Corp., describes one means for shielding the substrate to intercept the obliquely incident target atoms. In addition, Teng, et al. , "Anisotropy-Induced Signal Waveform Modulation of DC Magnetron Sputtered Thin Films", IEEE Trans. Maσn.. Vol. MAG-22, 579-581, 1986, and Simpson, et al. , "Effect of Circumferential Texture on the Properties of Thin Film Rigid Recording Disks", IEEE Trans. Maσn.. Vol. MAG-23, No. 5, 3405-7, Sept. 1987, suggest texturizing the disk substrate surface prior to film deposition. In particular, the authors propose circumferential surface grooves to promote circumferentially oriented grain growth and thereby increase film coercivity. Other approaches to tailoring film properties have focused on manipulating the crystalline micrdstruσture by introducing other elements into the alloy composition. For example, Shiroishi, et al. , "Read and Write Characteristics of Co-Alloy/Cr Thin Films for Longitudinal Recording", IEEE Trans. Maσn.. Vol. MAG- 24, 2730-2, 1988, and U.S. Patent No. 4,652,499, issued March 24, 1987 to J. K. Howard and assigned to IBM, relate to the substitution of elements such as platinum (Pt), tantalum (Ta) , and zirconium (Zr) into cobalt- chromium (CoCr) films to produce higher coercivity and higher corrosion resistance in magnetic recording films. CoCr alloys with tantalum (CoCrTa) are particularly attractive films for magnetic recording media. For example, it is known in the prior art to produce CoCrTa films by planetary magnetron sputtering processes using individual cobalt, chromium and tantalum targets or using cobalt-chromium and tantalum targets. Fisher, et al., "Magnetic Properties and Longitudinal Recording Performance of Corrosion Resistant Alloy Films", IEEE Trans. Maσn.. Vol. MAG 22, no. 5, 352-4, Sept. 1986, describe a study of the magnetic and corrosion resistance properties of sputtered CoCr alloy films . Substitution of 2 atomic percent (at.%) Ta for Cr in a Co-16 at.% Cr alloy (i.e., creating a Co-14 at.% Cr-2 at.% Ta alloy) was found to improve coercivity without increasing the saturation magnetization. In particular, a coercivity of 1400 Oe was induced in a 400 A film. In addition, linear bit densities from 8386 flux reversals/cm to 1063 flux reversals/cm (21300 fci to 28100 fci) were achieved at -3 dB, with a signal-to-noise (SNR) ratio of 30 dB. Moreover, corrosion resistance of CoCr and CoCrTa films was improved relative to CoNi films. U.S. Patent No. 4,940,548, issued on August 21, 1990 to Furusawa, et al., and assigned to Hitachi, Ltd., discloses the use of Ta to increase the coercivity and corrosion resistance of CoCr (and CoNi) alloys. CoCr alloys with 10 at.% Ta (and chromium content between 5 and 25 at.%) were sputtered onto multiple layers of chromium to produce magnetic films with low modulation even without texturing the substrate surface and highly desirable crystalline microstructure and magnetic anisotropy. Development of a high throughput in-line system to produce sputtered CoCrTa films with enhanced magnetic and corrosion-resistance properties for the magnetic recording media industry has obvious economic advantages. Linear recording density of magnetic films on media used in Winchester-type hard disk drives is known to be enhanced by decreasing the flying height of the magnetic recording head above the recording medium. With reduced flying height, there is an increased need to protect the magnetic film layer from wear. Magnetic films are also susceptible to corrosion from vapors present even at trace concentrations within the magnetic recording system. A variety of films have been employed as protective overlayers for magnetic films, including rhodium, carbon and inorganic nonmetallic carbides, nitrides and oxides, like silica or alumina. However, problems such as poor adhesion to the magnetic layer and inadequate wear resistance have limited the applicability of these films. U.S. Patent No. 4,503,125 issued on March 3, 1985 to Nelson, et al. and assigned to Xebec, Inc. describes a protective carbon overcoating for magnetic films where adhesion is enhanced by chemically bonding a sputtered layer of titanium between the magnetic layer and the carbon overcoating. In the particular case of sputtered carbon, desirable film properties have been achieved by carefully controlling deposition parameters. For example, during the sputtering process, the amount of gas incorporated in the growing film depends on sputtering parameters like target composition, sputtering gas pressure and chamber geometry. U.S. Patent No. 4,839,244, issued on June 13, 1989 to Y. Tsukamoto and assigned to NEC Corp., describes a process for co-sputtering a protective graphite fluoride overlayer with an inorganic nonmetallic compound in a gaseous atmosphere which includes fluorine gas. U.S. Patent No. 4,891,114 issued on January 1, 1990 to Hitzfeld, et al. , and assigned to BASF Aktiengesellschaft of Germany, relates to a d. c. magnetron sputtering process for an amorphous carbon protective layer using a graphitic carbon target. As the wear-resistant layer for magnetic recording media, it is desirable that the carbon overlayer have a microcrystalline structure corresponding to high hardness. In other words, it is desirable during sputtering to minimize graphitization of carbon which softens amorphous carbon films. One means employed to moderate graphitization of sputtered carbon films is by incorporating hydrogen into the film. Such incorporation may be accomplished by sputtering in an argon atmosphere mixed with hydrogen or a hydrogen- containing gas, such as methane or other hydrocarbons. Magnetron sputtering processes have been developed which have been somewhat successful in achieving high throughput. For example, U.S. Patent Nos. 4,735,840 and 4,894,133 issued to Hedgcoth on April 5, 1988 and April 16, 1990, respectively, describe a high volume planar d. c. magnetron in-line sputtering apparatus which forms multilayer magnetic recording films on disks for use in Winchester-type hard disk technology. The apparatus includes several consecutive regions for sputtering individual layers within a single sputtering chamber through which preheated disk substrates mounted on a pallet or other vertical carrier proceed at velocities up to about 10 mm/sec (1.97 ft/min) , though averaging only about 3 mm/sec (0.6 ft/min). The first sputtering region deposits chromium (1,000 to 5,000 A) on a circumferentially textured disk substrate. The next region deposits a layer (200 to 1,500 A) of a magnetic alloy such as CoNi. Finally, a protective layer (200 to 800 A) of a wear- and corrosion-resistant material such as amorphous carbon is deposited. The apparatus is evacuated by mechanical and cryo pumps to a base pressure about 2 x 10 '7 Torr. Sputtering is performed at a relatively high argon pressure between 2 and 4 x 10 "2 Torr (20 to 40 microns) to eliminate anisotropy due to obliquely incident flux. In optimizing a sputtering process to achieve high throughput, consideration should be given to other time- influenced aspects of the process apart from the sputtering rate. For example, substrate heating is typically accomplished with heaters requiring an extended dwell time to warm substrates to a desired equilibrium temperature. In addition, substrate transport speeds through the sputtering apparatus have been limited with respect to mechanisms using traditional bottom drive, gear/belt-driven transport systems . Such bottom drive systems generally have intermeshing gears and may be practically incapable of proceeding faster than a particular rate due to rough section-to-section transitions which may dislodge substrates from the carrier and/or create particulate matter from gear wear which contaminates the disks prior to or during the sputtering process. Thus, overall process throughput would be further enhanced by the employment of heating and transport elements which require minimal time to perform these functions. Generally, prior art sputtering devices utilize relatively unsophisticated means for controlling the sputtering processes described therein. Such control systems may comprise standard optical or electrical metering monitored by a system operator, with direct electrical or electro-mechanical switching of components utilized in the system by the system operator. Such systems have been adequately successful for limited throughput of sputtered substrates. However, a more comprehensive system is required for higher throughput sputtering operations. Specifically, a control system is required which provides to the operator an extensive amount of information concerning the ongoing process through a relatively user-friendly environment. In addition, the control system must adequately automate functions both in series and in parallel where necessary to control every aspect of the sputtering system. Further, it is desirable to include within such a control system the capability to preset a whole series of operating parameters to facilitate rapid set-up of - li ¬ the system for processes employing myriad sputtering conditions . SUMMARY OF THE INVENTION Thus, an object of the present invention is to provide a high throughput sputtering process and apparatus . A further object of the present invention is to provide a control system for the apparatus and process which continuously monitors and facilitates alteration of film deposition process parameters. A further object of the present invention is to provide a high throughput sputtering apparatus with a centralized electronic control system. An additional object of this invention is to provide the above objects in a means by which sputtering is achieved in a highly efficient, contaminant-free environment. An additional object of this invention is to provide a highly versatile, contaminant-free means for transporting substrates through the apparatus and process. A further object of this invention is to transport substrates through the sputtering apparatus by means of an overhead, gearless transport mechanism. A further object of this invention is to provide a transport mechanism for carrying a plurality of substrates, each at a user-defined, variable speed. A further object of this invention is to maintain a contaminant-free environment within the sputtering apparatus by means of a high speed, high capacity vacuum pump system. A further object of this invention is to provide a magnetron design .allowing efficient erosion of target material during the sputtering process. A further object of this invention is to provide a high throughput sputtering apparatus which achieves and maintains a uniform substrate surface temperature profile before film deposition. A further object of this invention is to provide a highly isotropic film by minimizing deposition by target atoms impinging on the substrate surface at high angles of incidence. A further object of this invention is to provide high throughput sputtering apparatus which minimizes oxidation of the chromium underlayer before magnetic film deposition. An additional object of the present invention is to provide high quality thin magnetic films on magnetic recording media with superior magnetic recording properties. A further object of this invention is to provide high quality thin cobalt-chromium-tantalum (CoCrTa) films with superior magnetic recording properties. A further object of this invention is to provide high quality sputtered thin magnetic films circumferentially oriented along the easy magnetic axis. A further object of this invention is to provide high throughput sputtering apparatus for high quality thin carbon films with superior wear, hardness, corrosion and elastic properties. A further object of this invention is to provide a method for depositing wear-resistant carbon films comprising sputtering in the presence of a hydrogen- containing gas . A further object of this invention is to provide an improved method for sputtering carbon films using either an electrically biased or grounded pallet. These and other objects of the invention are accomplished in a high throughput sputtering apparatus and process capable of producing sputtered substrates at a rate of up to five times greater than the prior art. An apparatus in accordance with the present invention provides a single or multi-layer coating to the surface of a plurality of substrates. Said apparatus includes a plurality of buffer and sputtering chambers, and an input end and an output end, wherein said substrates are transported through said chambers of said apparatus at varying rates of speed such that the rate of speed of a pallet from said input end to said output end is a constant for each of said plurality of pallets . A high throughput sputtering apparatus having a plurality of integrally matched components in accordance with the present invention may comprise means for sputtering a multi-layer coating onto a plurality of substrates, said means for sputtering including a series of sputtering chambers each having relative isolation from adjacent chambers to reduce cross contamination between the coating components being sputtered onto substrates therein, said sputtering chambers being isolated from ambient atmospheric conditions; means for transporting said plurality of substrates through said means for sputtering at variable velocities; means for reducing the ambient pressure within said means for sputtering to a vacuum level within a pressure range sufficient to enable sputtering operation; means for heating said plurality of substrates to a temperature conducive to sputtering said multi-layer coatings thereon, said means for heating providing a substantially uniform temperature profile over the surface of said substrate; and control means, for providing control signals to and for receiving feedback input from, said means for sputtering, means for transporting, means for reducing and means for heating, said control means being programmable for allowing control over said means for sputtering, means for transporting, means for reducing and means for heating. A process in accordance the present invention includes: providing substrates to be sputtered; creating an environment about said substrates, said environment having a pressure within a pressure range which would enable sputtering operations; providing a gas into said environment in a plasma state and within said pressure range to carry out sputtering operations; transporting substrates at varying velocities through said environment a sequence of sputtering steps within said environment and along a return path external to said environment simultaneously introducing the substrates into said environment without substantially disrupting said pressure of said environment, providing rapid and uniform heating of said substrates to optimize film integrity during sputtering steps, and sputtering said substrates to provide successive layers of thin films on the substrates; and, removing the sputtered substrates without contaminating said environment. BRIEF DESCRIPTION OF THE DRAWINGS The invention will be better understood by reference to the figures of the drawings wherein like numbers denote like parts throughout and wherein: Figure 1 is a system plan view of the sputtering apparatus of the present invention. Figure 2 is a cross sectional view along line 2-2 of the sputtering apparatus of the present invention as shown in Figure 1. Figure 3 is a plan view of the sputtering apparatus of the present invention illustrating the physical relationship of the power supply and pumping subsystem components. Figure 4 is an overview block diagram of the sputtering process of the present invention. Figure 5 is a simplified perspective view of the means for texturing disk substrates used in the process of the present invention. Figure 6 is a cross sectional view along line 6 - 6 of the cam wheel utilized in the means for texturing shown in Figure 5. Figure 7 is a sectional magnified view of the texturing of a disk surface provided by the means for texturing disclosed in Figure 5. Figure 8 is a surface view of one embodiment of a pallet for carrying disks through the sputtering apparatus of the present invention. Figure 9 is a partial, enlarged view of the pallet of Figure 8. Figure 10 is a partial, enlarged view of one region for carrying a disk in the pallet of Figure 9. Figure 11 is a cross sectional view along 11 - 11 of the disk carrying region shown in Figure 10. Figure 12 is an overview diagram of the pumping system used with the apparatus of the present invention. Figure 13 is a side, partial cutaway view of a sputtering chamber utilized in the apparatus of the present invention. Figure 14 is an assembled cross sectional view of the substrate transport mechanism, sputtering shields, and pallet viewed along line 14 - 14 of Figure 13. Figure 15 is a cross sectional view of the main (or "dwell") heating lamp assembly and chamber. Figure 16 is a view of the main heating lamp assembly along line 16 -16 in Figure 15. Figure 17 is a view of the main heating lamp mounting tray and cooling lines along line 17 - 17 in Figure 15. Figure 18 is a cross sectional view of the secondary (or "passby") heating lamp and chamber assembly. Figure 19 is a view of the heating lamp assembly along line 19 - 19 in Figure 18. Figure 20 is a view of the secondary heating lamp, mounting tray and cooling lines along line 20 - 20 in Figure 18. Figure 21 is a perspective, partial view of a heat reflecting panel, pallet, and substrate transport system utilized in the apparatus present invention. Figure 22 is a perspective, exploded view of a portion of a pallet, substrate transport mechanism, sputtering shield, and cathode assembly utilized in the sputtering apparatus of the present invention. Figure 23 is a top view of the sputtering chamber shown in Figure 13. Figure 24 is a cross-sectional, side view along line 24 - 24 of Figure 23. Figure 25 is a partial perspective view of a first surface of the cathode portion of the magnetron of the present invention. Figure 26 is a perspective view of a second surface of the cathode of the magnetron of the present invention, including cooling line inputs and magnet channels of the cathode. Figure 27A is a cross-sectional, assembled view of a first embodiment of the magnet configuration in the cathode for a nonmagnetic target of the present invention along line 27 - 27 of Figure 25. Figure 27B is a cross-sectional, assembled views of a second embodiment of the magnet configuration in the cathode for magnetic target of the present invention along line 27 - 27 of Figure 25. Figure 28 is a cross sectional view of the multi-layer sputtered thin film created by the process of the present invention. Figure 29 is a block diagram of the electronic control system of the present invention. Figure 30 is a block flow chart of functional aspects of the software utilized in the process controller(s) of the present invention. Figure 31 is a flow chart of the automated cryogenic pump regeneration process of the present invention. Figures 32A through 32D comprise a single logical flow diagram outlining the software logic controlling the motor assemblies, load lock and exit lock pumping, and heater power during the automatic substrate run mode of the software utilized in the electronic control system of the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENT A. Introduction Described herein is an apparatus and method for applying multilayer thin films to a substrate. The apparatus of the present invention is capable of applying the multilayer coatings to any given substrate within a time frame of approximately five minutes. The apparatus and process may provide production throughputs on the order of at least five times greater than those of prior art multi-layer coating processes. Other advantages of the sputtering apparatus and method for high throughput sputtering include: flexibility with respect to the composition of the multilayer films applied and the types of substrates to which they are applied; easily interchanged coating components; a novel means for heating substrates; a novel sputtering magnetron design; a variable speed, overhead, noncontaminating substrate transportation system; and a comprehensive, centralized, programmable electronic means for controlling the apparatus and process. In addition, when the process and apparatus are used for providing magnetic coatings for substrates, such as disks, to be utilized in hard disk drives using Winchester-type technology, also disclosed herein are: a unique disk texturing method for improving the disk's magnetic recording properties, and a novel disk carrier (or pallet) design which contributes to uniform substrate heating characteristics in a large, single, high capacity pallet. The high throughput process and apparatus of the present invention accomplishes the objectives of the invention and provides the above advantages by providing a comprehensive in-line sputtering system utilizing matched component elements to process multiple large single sheet or pallet transported discrete substrates in a continuous, variable speed, sputtering process wherein each substrate has a start-to-finish process time which is relatively constant. Such an apparatus and method can process up to 3,000 95mm disk substrates, and 5,300 65mm disk substrates, per hour. In the disk drive industry where cost savings per disk on the order of a few cents are a distinct advantage, the system manufactures 95mm disk substrates at a cost of $8.00 per disk as opposed to $12.00 per disk for other sputtering apparatus. Crucial to this process and apparatus are matching and optimizing such elements as disk preparation, including texturing and cleaning, provision of a sputtering environment with a sputtering apparatus, through an optimal vacuum pump system, transporting disk substrates through the sputtering environment in a high volume, high speed, contaminant-free manner without disturbing the sputtering environment, heating the substrates within the environment to optimal thermal levels for sputtering, and sputtering the substrates through a series of substantially isolated, non- crosscontaminating sputtering steps. In general, application of multilayer films to a substrate involves two basic steps: preparation of the substrate and film deposition. Figure 4 represents a general overview of the process for applying thin films to a disk substrate according to the present invention. In particular, Figure 4 outlines the process steps for providing a single or multilayer film on a substrate, for example, a nickel-phosphorus plated aluminum disk for use in Winchester-type hard disk drives. It will be recognized by those skilled in the art that the steps outlined in Figure 4 may be modified, as required, depending on the particular type of substrate to be coated or thin film to be applied. Substrate preparation process 410 of Figure 4 includes: kitting process 412; disk texturing process 414, disk precleaning 416; water rinse 418; ultrasonic cleaning with caustic cleaner 420; a sponge scrubbing in water 422; an ultrasonic cleaning in hot deionized water 424; scrubbing and deionizing water spray rinse 426; overflow deionized water rinse 428; ultrasonic cleaning of the disks with warm FREON TES 430; a cool FREON TES rinse 432; and vapor displacement drying in warm FREON TES 434. Each of the aforementioned steps outlined in Figure 4 is discussed in further detail in Section C of the specification. Subsequent to the substrate preparation process 410, the clean, dry disk substrates may be provided to pallet loading process 450, wherein the disk substrates are provided to a substrate carrier which transports the disk substrates through coating process 460. In coating process 460, disk substrates are provided to a coating apparatus, such as sputtering apparatus 10 shown in Figures 1 and 2, for provision of single or multilayer film thereon. The steps involved in coating process 460, such as in, for example, sputtering apparatus 10 of the present invention, involve: a system evacuation process 472 wherein specific chambers of the sputtering system are evacuated to a pressure of approximately 10 "7 Torr and backfilled with a suitable sputtering gas, such as argon; a substrate heating process 476, wherein the substrates are raised to a temperature conducive to optimal film deposition; and a sputtering process 478 wherein the films are deposited on the substrates. Subsequently, the substrates are provided to an unload process 480. A process for transporting pallets 474 provides means for transporting the substrates through the above processes. Each of the aforementioned steps with respect to applying the multilayer films to the substrates is discussed below in detail in separate sections of this specification. B. Sputtering Apparatus Overview Sputtering apparatus 10, used to apply a single or multilayer film to one or more substrates, will be discussed generally with reference to Figures 1A, IB, 2A, 2B, and 3. Sputtering apparatus 10 provides a high throughput, in-line, magnetron sputtering process which allows reduced manufacturing costs per substrate by performing the coating sequence in a high volume manner. As will be discussed in detail below, single or multilayer film can be applied to a single side, or both sides, individually or simultaneously, of a single large sheet substrate, or to discrete substrates, such as disks mounted in a rack, pallet or other substrate carrier. Generally, substrates are provided through multiple sputtering chambers 20, 26, 28 in apparatus 10 at a rate of speed, such as 3-6 feet/minute, and through heater chambers 14,16 and buffer chambers 12, 18, 22A-E, 24A- 24C, 29 and 30, at a second rate of speed, such as 12 feet/minute. Through carefully matched elements, each of the substrates has a constant speed through apparatus 10. Sputtering apparatus 10 includes seventeen (17) chamber modules 12-30 generally comprised of two basic types. A first type is configured for use as lock modules (12, 30), deposition process modules (20, 26, 28) or dwell modules (14, 18, 22A-22D and 29). A second type of module is configured for use as high vacuum buffer modules (16, 24A-24C) to provide process separation between deposition modules as discussed below. Also shown in Figures 1 and 2 is substrate carrier return path 50 of the transport system of the present invention. Preferably, return path 50 is provided to allow an ample number of substrate carriers to return from exit lock 3Q for reuse in sputtering apparatus 10 in a continuous process, thereby reducing production delays and increasing overall process production speed. In addition, Figures 1 and 2 illustrate robotic pallet loading station 40 and robotic pallet unloading station 45, arranged along the transport system return path 50, for automatic loading and unloading, respectively, of the disk substrates into racks or pallets. As discussed in detail below, the substrate transport system utilizes a plurality of individual transport beam platforms, each including one or more optical or proximity position sensors, to move substrates through sputtering apparatus 10 and along return path 50, and to monitor the position of each substrate carrier within the transport system. Transfer speeds of the substrate carriers throughout the transport system may be adjustably varied from 0 to 24 ft/min. It should be noted that the upper limit of substrate carrier transport speed is constrained by the process limits of sputtering apparatus 10. Each individual drive stage (2200, discussed in Section F of this specification) is identical and thus has identical upper and lower speed limits. Twelve (12) pneumatically operated doors D1-D12 are placed between specific chamber modules 12-30 of sputtering apparatus 10. Doors D1-D12 are located as generally represented in Figure 12 and are positioned as follows: door Dl isolates chamber 12 from the ambient environment; door D2 isolates load lock chamber 12 from main ("dwell") heating chamber 14; door D3 isolates main heating chamber 14 from first buffer- passby heating chamber 16; door D4 isolates buffer chamber 16 from first dwell chamber 18; doors D5-D6 isolate second buffer chamber 24A from third dwell chamber 22B; doors D7-D8 isolate third buffer chamber 24B from fifth dwell chamber 22D; doors D9-D10 isolate fourth buffer chamber 24C from exit buffer 29; door Dll isolates exit buffer chamber 29 from exit lock chamber 30; and door D12 isolates exit lock chamber 30 from the ambient environment. With reference to Figures 1-3 and 12, the general arrangement of chamber modules 12-30 will be hereinafter discussed. Load lock chamber 12 is essentially an isolation chamber between the ambient environment and chambers 14-29 of sputtering apparatus 10. Load lock chamber 12 is repeatedly evacuated between a pressure of approximately 50 mTorr and vented to ambient atmospheric conditions. Generally, sputtering within apparatus 10 takes place in an evacuated environment and chambers 16- 29 are evacuated to the pressure of approximately 10 "7 Torr, before argon gas is allowed to flow into the chambers to achieve a suitable sputtering pressure. Load lock chamber 12 is constructed of one-inch thick type 304 stainless steel and has a width W 1 of approximately 39 inches, length L 1 of approximately 49 inches, and a depth D, of approximately 12 inches as measured at the exterior walls of the chamber. The use of electropolished stainless steel in load lock chamber 12 and all other chambers in apparatus 10 minimizes particulate generation from scratches and other surface imperfections. Chambers 14, 18, 20, 22A-22D, 24A-24C, 26 and 28-30 have roughly the same dimensions. The internal volume of load lock chamber 12 is reduced to approximately three cubic feet by the installation therein of volume-displacing solid aluminum blocks bolted to the chamber door and rear wall (not shown) to facilitate faster evacuation times. Pump-down of load lock chamber 12, and sputtering apparatus 10 in general, is discussed below in Section F of the specification. After door Dl is pneumatically operated to allow a single large substrate or pallet to enter load lock chamber 12 at the initiation of processing by sputtering apparatus 10, load lock chamber 12 will be evacuated to a pressure of 50 microns (50 mTorr) . Chambers 16-29 will have been evacuated to a base pressure of about 10 "7 Torr and then backfilled with argon to the sputtering pressure (approximately 9-12 mTorr) prior to the entrance of a substrate into load lock chamber 12. Chamber 14 will have been evacuated previously to a pressure of approximately 10 "5 - 10 "7 Torr. Load lock chamber 12 is thus mechanically evacuated and pressurized at a level intermediate to that of chambers 14-29, and external ambient pressures, to provide isolation for the downstream sputtering processes occurring in chambers 14-29. Dwell heating chamber 14 serves two functions: it acts as an entrance buffer between load lock chamber 12 and the internal sputtering environment in chambers 16- 29; and it serves as a heating chamber for increasing the substrate temperature to optimize film deposition. Chamber 14 includes eight banks of quartz lamp heating elements, four banks mounted to outer door 114 and four banks mounted opposite thereof on rear chamber wall 99. Door D2, separating load lock chamber 12 and dwell heating chamber 14, is a high vacuum slit valve. Details of the heating banks located in dwell heating chamber 14 are discussed in Section H of this specification. During processing of a substrate, dwell heating chamber 14 is pumped to a pressure of approximately 10 "5 - 10 "7 Torr before the substrate present in load lock chamber 12 is allowed to pass into dwell heating chamber 14. A pressure of 10 '5 - 10 "7 Torr helps eliminate the effects of outgassing from the substrate in dwell heating chamber 14. Subsequently argon backfilling is provided to raise the pressure to approximately 9- 12 mTorr, equalizing the environment in dwell heating chamber 14 with that in chambers 16-29. The substrate may thereafter remain in dwell heating chamber 14 for the duration of time necessary for the exposure of the substrate to the lamps to have its desired effect. First buffer-passby heating chamber 16 is a chamber module of the second type having a width W 2 of approximately 26 inches by a height H' of approximately 49 inches by a depth D' of approximately 12 inches. In general, buffer chambers 16 and 24A-C are positioned between dwell chambers 18A and 22A-D to separate the ongoing sputtering processes within apparatus 10, thereby reducing cross-contamination of coating components. First buffer-passby heating chamber 16 includes a heating assembly comprising ten banks of quartz lamp heating elements, five mounted to outer door 116 and five to the rear chamber 100 wall opposite thereof. Passby heating chamber 16 is designed to insure uniform substrate temperature prior to film deposition. The structure of the passby heating assembly is discussed in detail in Section H of this specification. Three coating modules -- chromium deposition chamber 20, magnetic deposition chamber 26, and carbon deposition chamber 28 -- having dimensions roughly equal to those of load lock chamber 12 and constructed of type 304 electropolished stainless steel, may be utilized to sputter single or multilayer films on a substrate passing through apparatus 10. Four pairs of d. c. magnetron sputtering cathodes are mounted, four magnetrons per door, on doors 120-1, 120-2, 126-1, 126- 2, 128-1, and 128-2 on both sides of each chamber 20, 26, and 28, respectively. Target materials are mounted to cathodes 2222-2225. Anodes 2338, gas manifolds 2323, and shielding 2230, 2236, 2238 and 2240 are also attached to outer doors 120-1, 120-2, 126-1, 126-2 and 128-1, 128-2. Mounting these components to the doors facilitates target changes and chamber maintenance. Further, conduits (not shown) for power, cooling, and process gases are provided in outer doors 120, 126, 128. Feedthrough conduits are also provided in doors 112, 114, 116, 118, 122A-122E, 124A-124C, 129, and 130 to allow for modification of the sputtering apparatus 10. Details of deposition chambers 20, 26 and 28 are provided in Section I of this specification. Dwell chambers 18 and 22A-22E are manufactured to have the same dimensions as load lock chamber 12 and provide separation between the buffer modules and the deposition chambers. Dwell modules 18 and 22A-22E allow for substrate transport system runout, if necessary, during multiple substrate processing in sputtering apparatus 10. If desired, additional heating assemblies may be provided in any or all of dwell modules 22A-22E. Exit buffer module 29 is essentially identical to dwell heating chamber 14, without the dwell heating assembly hardware. Exit buffer module 29 provides a buffer area to facilitate removal of pallets or substrates from sputtering apparatus 10 to exit lock chamber 30 and further isolates the sputtering process from the external environment. Exit lock chamber 30 is essentially identical to load lock chamber 12 and operates in reverse pumping order, allowing pallets or substrates to be transferred from the evacuated environment of sputtering apparatus 10, to the ambient external environment. Optimally, sputtering apparatus 10 can simultaneously process up to seven large single sheet substrates or pallets carrying smaller substrates, such as disks. When seven such substrates are simultaneously processed in sputtering apparatus 10, one such substrate is positioned in each of seven chambers, for example, as follows: load lock chamber 12; dwell heating chamber 14; chromium deposition chamber 20; magnetic deposition chamber 26; carbon deposition chamber 28; exit buffer chamber 29; and exit lock chamber 30. The sheer dimensions of sputtering apparatus 10 allow for a plurality of large single sheet substrates, and a plurality of high capacity discrete substrate carrying pallets, or both, to be simultaneously processed. The problems attending the development of such a large scale, high throughput sputtering apparatus, and the solutions adopted, are discussed herein. Chambers 12-30 are mounted on steel assembly rack 150. Rack 150 includes channels 55 which preferably are used to mount components used with sputtering apparatus 10, such as those used in the electronic control system. It will be understood by those skilled in the art that any suitable arrangement for mounting chambers 12-30 may be made within contemplation of the present invention. C. Substrate Preparation Various materials in the form of large single sheet or discrete substrates may be coated in sputtering apparatus 10. Suitable substrates include polished nickel-phosphorus plated aluminum disks, ceramic disks (available from Kyocera Industrial Ceramics Corporation, Los Angeles, California, or Corning Glass Corporation, Corning, New York), glass substrates (available from Pilkington Corporation Microelectronics, Ltd., Toledo, Ohio, Nederlandse Philips Bedrijven B.V., The Netherlands, or Glaverbel Corporation Data Storage Glass Products, Belgium), or carbon substrates or graphite substrates (Kao Corporation of Japan) . The process and apparatus disclosed herein is discussed with regard to preparation and sputtering of polished nickel-phosphorus plated aluminum substrates, such as disks suitable for use in Winchester-type hard disk drives. As will be understood by those skilled in the art, the system is readily adaptable for use with other types of single sheet or discrete substrates as discussed above. 1 • Kitting In general, polished nickel-phosphorus plated aluminum disks or similar substrates utilized in the manufacture of magnetic recording media for Winchester- type hard disk drives, such as those available from Mitsubishi Corporation or Seagate Corporation, are shipped to magnetic media manufacturers in standard ribbed or slotted shipping cassettes, 25 substrates per cassette. Transfer of the substrates from the shipping cassettes to process cassettes, used in processing the disks through texturing process 414 and up through pre- cleaning process 416, is known as kitting. Kitting must occur in a class 10,000 clean room environment and is generally performed manually. . Texturing It is well known in the art that circumferential texturing or abrading of a substrate surface can cause the hep "C" axis of a magnetic cobalt-alloy film to orient in a circumferential direction, and thereby supply a more intense and uniform read/back signal to a flying read/write head in a Winchester-type hard disk drive. Texturing the disk substrate also affects the glide properties of the read/write read. Obviously, the texture of the disk surface also provides a limit to the minimum flying height of the read/write head. Texturing of the substrate also prevents stiction which may result should the head land on a smooth, planar area of the disk, thereby resulting in a job-blocking effect, rendering it almost impossible to remove the stuck read/write head from the disk surface, and rendering a disk drive entirely inoperable. Texturing generally takes place in a class 1,000 clean room and, as previously discussed, any number of well-known methods may be used. In the preparation of substrates to be coated within sputtering apparatus 10, a plurality of texturing machines, such as Exclusive Design Company's EDC Model C texturing machine, (EDC, 914 South Clairmont, San Mateo, California 94402) are used. A novel modification to each EDC texturing machine provides a unique, diamond-shaped texturing effect. A portion of a disk surface having such texturing is illustrated in Figure 7. With reference to Figures 5 through 7, texturing process 414 will be hereinafter described in relation to the texturing of discrete disk substrates 510 suitable for use in sputtering apparatus 10. Figure 5 is a general disclosure of the texturing portion 500 of texturing machine M. Generally, texturing of disk substrate 510 is performed using two loops of fixed abrasive tape 515 which are stretched about rubber rollers 520-1, 520-2. Abrasive tape 515 for each roller 520 is provided by two reels, one supply reel and one take-up reel (not shown), in a single feed direction with a portion of abrasive tape 515 looped about rollers 520. Abrasive tape 515 makes only one transition from the supply reel to the take-up reel during a normal texturing cycle. Rollers 520-1 and 520-2 rotate about spindles 522-1 and 522-2, respectively, mounted to oscillation arm 525 of machine M. A second set of rubber rollers 530-1, 530-2, and associated supply and take-up reels, (not shown), allow for mounting a fine cloth tape 535 to remove excess particulate matter generated by abrasive tape 515 as disk 510 is texturized. Like abrasive tape 515, cloth tape 535 is used only once from supply reel to take-up reel. Cam assembly 550 causes arm 525, rollers 520-1, 520- 2, and abrasive tape 515 to oscillate in the direction of axis X. Cam assembly 550 includes cam wheel 600 fixed by two set screws (not shown) to spindle 560 which is rotated in a counterclockwise direction about axis Y 1 by machine M. Cam wheel 600 contacts first and second rollers 570, 575, rotatably mounted to support members 572, 574, respectively, to translate the motion defined by rotation of cam wheels 600 to oscillation arm 525. In operation, disk substrate 510 is mounted on spindle 540 of machine M and rotated in a clockwise direction about axis Y 2 passing through the center of spindle 540. To mount a disk substrate 510, machine M causes rollers 520 and 530 to linearly separate in opposing directions along paths parallel axes Y.,_ 2 allowing disk substrate 510 to be inserted and removed by an automatic loading apparatus (not shown) onto spindle 540. Disk substrate 510 is then rotated about axis Y 2 in a clockwise direction. Simultaneously thereto, abrasive tape 515 and cloth tape 535 are rotated about rollers 520-1, 520-2 and 530-1, 530-2, respectively, such that rollers 520-2 and roller 530-1 rotate in a clockwise direction, and rollers 520-1 and 530-2 rotate in a counterclockwise direction. Thus, opposing rollers 520-1, 520-2 and 530-1, 530-2 rotate in directions opposite to each other and in a direction opposing the direction of rotation of disk substrate 510, to provide optimal disk texturing and cleaning. As rollers 520 and 530 are rotated, machine M simultaneously rotates spindle 560, and hence cam wheel 600, causing rollers 520 to oscillate about axis X. As a result of the unique shape cam wheel 600, discussed with reference with Figures 6A-6B, a novel cross-hatched type texturing 700 results. With reference to Figure 7, texturing process 414, discussed above, generally forms diamond-shaped areas 750 defined by a plurality of crossing texture lines 740 provided to a depth of 60 βm . When lines 740 intersect, they define a plurality of angles θ in a range of approximately 6 to 10 degrees. It has been determined that an angle greater than 10 degrees, while providing generally excellent properties of low dynamic friction and low stiction, results in problems with the magnetic recording properties such as bit dropouts or shifts in areas adjacent to intersecting texturing lines. To compensate, a higher coercivity alloy is required on the substrate. These problems are within acceptable levels when angle θ is within a range of 4'-10'. An angle of 6 degrees or less improves the magnetic recording capability of the record media, but sacrifices in stiction and running friction properties of the disk are made for θ less than 6 degrees. Preferably, when rotation Y 1 of cam wheel 600 is approximately 6 Hertz, angles θ of approximately 6° will result. The structure of cam wheel 600 is detailed in Figure 6A and 6B. Figure 6A shows cross-section cam wheel 600 along line 6-6 in Figure 5. Cam wheel 600 has a shape wherein the radial distance R between axis Y., and outer edge 710 is at a minimum distance Rl at reference point .720, and at a maximum distance R2 at point 730, 180 * opposite point 720. Currently, two types of cams are used in the machine M for texturing disk substrates 510, depending on the size of disk substrate 510. In one embodiment, the distance R2 equals one inch and distance Rl = .760 inch. Figure 6B illustrates the distance of all points along outer edge 710 from axis Y t . As can be seen therein, radial distance R from outer diameter 710 to axis Yl is evenly sloped from the point 720 to point 730, of 180" opposite from point 720. Assuming a line from axis Y. to point 720 is used as a reference, the distance of all points along outer edge 710 from axis Y 1 in one embodiment is as follows: the distance Rl at point 720 = .756 inch, the distance at 60° and 300" angles from point 720 = .840 inch, the distance at 120' and 240" from point 720 = .920 inch, and the distance R2 at 180 * from point 720 (point 730) = 1.00 inches. In the above embodiment, cam wheel 600 may be manufactured by beginning with a completely circular cam wheel and removing outer edge 720 of cam wheel 600 in equal linear to rotational increments. For example, at point 730, no material is removed, moving 3 degrees to the left or right, the cutting device is adjusted to move in a distance toward axis Y 1 of approximately .004 inch, and is thereafter moved .004 inch closer to axis Y, for every 3° of rotational movement about axis Y 1 . In this manner, one embodiment of cam wheel 600 may be manufactured; those skilled in the art will recognize that various sizes and types of cam wheels may be manufactured in like manner for various sizes of disk substrates 510. 3. Disk Cleaning Following texturing, the disk surface is cleaned to facilitate uniform film deposition, for example, by performing the following steps, represented as stage 416 in Figure 4. During precleaning process 416, each disk surface is rubbed with a polyurethane soap pad. In an automated process, textured disk substrates are removed from process cassettes and placed in a precleaning machine such as the Model MDS1, commercially available from Speed Fam Corporation of Tempe, Arizona. In the Speed Fam machine described above, a plurality of disk substrates is arranged about a large pad assembly in a cylindrical tank, thereby allowing rapid disk cleaning (up to 350 95-mm disks per hour) by performing precleaning process 416 on a number of disk substrates simultaneousl . An additional preparation step involves taking disk substrates through a multi-staged cleaning process 435. This process is illustrated generally in Figure 4 as stages 418 through 434. Each stage, for example, may represent a separate tank process wherein all tanks are connected with a conveyor system. In addition, transfer between individual stages may be performed by robots. Specifically, disk substrates 510 are rinsed in water at stage 418, followed by several ultrasonic cleaning stages (420, 424 and 430) and sponge scrubbing stages (422 and 426). The multistage cleaning process 435 processing stages include water rinse 418; ultrasonic cleaning with caustic cleaner 420; a sponge scrubbing in water 422; an ultrasonic cleaning in hot deionized water 424; ultrafiltered deionized water spray rinse 426; overflow deionized water rinse 428; ultrasonic cleaning of disk substrates with warm FREON TES 430; a cool FREON TES rinse 432; and vapor displacement drying in warm FREON TES 434. Application of ultrasonic power is particularly useful in scouring the newly-applied fine cross- texturing grooves on the disk surface. Stages 420, 424 and 426 combine ultrasonic action in liquids with alkali and aqueous cleaning agents for thorough cleaning. Stage 430 combines ultrasonic action with a degreasing solvent like DuPont's FREON TES. Multistage cleaning process 435 is preferably performed by a Speed Fam Model MD08 cleaning machine. The Speed Fam model MD08 with certain modifications, is suitable for performing this final cleaning process, to maintain the high level of substrate cleanliness prior to film deposition. Specifically, modifications to the Speed Fam MD08 machine include passivated stainless steel tanks and recirculation lines, brush materials such as polyvinylalcohol, and a highly efficient tank filtration system. In addition, standard process cassette rollers are replaced with highly wear-resistant plastics like DuPont's DELRIN polymethylene oxide. The process regimen 410, as illustrated by Figure 4, was found to be capable of handling approximately 550-750 disks per hour, using two Speed Fam model MDS1 polishing machines and one Speed Fam model MD08 cleaning machine. Higher processing rates would result with additional process hardware, but may be limited because of the release of FREON TES, a chlorinated fluorocarbon, to the environment. D. Pallet Design A unique rack or "pallet" for carrying a number of discrete substrates such as disks utilized in Winchester-type hard disk technology will be discussed with reference to Figures 8-11. Generally, a plurality of magnetic disk sizes are manufactured for Winchester-type hard disk drives; two of the most common include 65 mm and 95 mm diameter disks. It will be understood that the general principles of pallet 800, described herein with reference to a pallet for carrying 95 mm disks, are applicable for pallets equally capable of handling disk substrates of other sizes. Pallet 800, shown in Figure 8, shows 56 substrate carrying regions 1000 for carrying 95 mm diameter disk substrates 510. A pallet designed to carry 65 mm diameter disk substrates has 99 substrate-carrying regions 1000. Pallet 800 may be manufactured from 6061- T6 aluminum, available from the Aluminum Corporation of America (Alcoa), Pittsburg, Pennsylvania or other suitable material. Pallet 800 has a height H'' of approximately 34.56 inches, a length L of approximately 31 inches, and a depth DD of approximately 0.25 inch. These dimensions reflect the maximum size pallets or single sheet substrates which may be utilized if sputtering apparatus 10 is made to have dimensions as discussed herein. In utilizing pallets having the above-mentioned dimensions, several problems arise. Achieving a uniform temperature profile across the surface of the pallet is difficult, especially where thermal expansion of the pallet material occurs at a different rate than that of disk substrates carried therein because of the pallet's greater thickness. Specifically, thermal expansion of the pallet material causes inherent warping of the pallet. Further, thermal expansion reduces the clearance within each substrate-carrying region 1000 around each disk substrate 510, constricting and warping disk substrates 510 undergoing their own thermal expansion, and ultimately precluding uniform film deposition. Addressing thermal expansion incompatibilities between the pallet and disk substrates is more than an issue of material selection. For a high throughput sputtering system, maximizing the substrate- carrying capacity of pallet 800 is equally desirable. To minimize warping while maximizing the substrate- carrying capacity of pallet 800, substrate-carrying regions 1000 are arranged in a staggered, hexagonal fashion, providing the densest arrangement of disk substrates 510 within the established dimensions of pallet 800. As such, substrate-carrying regions 1000 are arranged in rows 810-880, wherein each substrate- carrying region 1000 in a particular row (e.g., 810) is offset from another substrate-carrying region 1000 in an adjacent row (e.g., 820) by a distance equalling one- half of the total horizontal width of each substrate- carrying region 1000. In an effort to minimize thermal losses from disk substrates 510 to pallet 800, slots 890 and cavities 895 are provided. Cavities 895 in the lower portion of pallet 800 reduce the surface area of pallet 800 which is subject to thermal expansion, without reducing the substrate-carrying capacity of pallet 800 as the lower portion of pallet 800 does not carry disks beyond the extent of the sputtering flux. Notches 892 compensate for nonuniform thermal expansion across pallet 800 as a result of nonuniform heating across the pallet surface. Specifically, notches 892 allow relatively unrestricted expansion of the edges of pallet 800, thereby avoiding pallet warping. Reference notches 910 in pallet 800 are provided for use with robotic loading and unloading stations 40 and 45. Specific operation of these stations 40 and 45 is discussed in Section E of the specification. With reference to Figures 10 and 11, details of disk substrate-carrying regions 1000 are hereinafter discussed. Each substrate-carrying region 1000 has a roughly circular orifice with an outer circumferential edge 1010 defined by a beveled edge 1015. Beveled edge 1015 reduces any shielding effect pallet 800 may have on disk substrate 510 mounted in substrate-carrying region 1000 during sputtering. Notch mounting groove 1020 in the lower half of region 1000 allows disk substrate 510 to be seated therein. Lip 1030, at the upper portion of substrate-carrying region 1000, allows manual insertion of disk substrates 510 into substrate-carrying regions 1000. As shown in Figure 10, lip 1030 defines a semi¬ circular arc 1035 having a radial distance from axis F of 1.9 inches in the 95 mm embodiment of pallet 800, shown in Figures 8-11. Inner edge 1040 is defined by one end of beveled edge 1015 and has a radial distance from axis G of approximately 1.859 inches. Groove 1020 likewise has a semi-circular shape and is positioned a radial distance of 1.883 inches from axis G. Groove 1020 has a depth D' of approximately .012 inches. In practice, disk substrate 510 is seated in groove 1020 and is securely held in place therein. During processing, pallet 800 is relatively stable and disk substrate 510 is securely maintained in substrate- carrying region 1000. The radial distance between axis F and axis G is approximately 0.12 inch, and thus the radial distance between lip region arc 1035 and the base of groove 1020 is 3.903 inches, a distance which is greater than the diameter of a 95 mm disk (3.743 inches) . This excess space facilitates disk loading and allows for thermal expansion of disk substrate 510 relative to the pallet 800 during the heating process. It should be noted that pallet 800 may be passed through sputtering apparatus 10 many times before cleaning, especially of grooves 1020, is required to insure substrate-carrying security within substrate- carrying regions 1000. After approximately 100 production cycles, edge 1040 and groove 1020 must be cleaned due to buildup of deposited layers from constant sputtering in sputtering apparatus 10. E. Substrate Loading As discussed briefly with reference to Figure 1, disk substrates 510 may be provided in pallet 800 by means of an automatic loading process which preferably occurs at a point along transport system return path 50. Robotic loading station 40 is arranged to load disk substrates 510 into pallets 800 just prior to entrance of pallets 800 into load lock chamber 12. Robotic unloading station 45 is preferably positioned to remove disk substrates 510 from pallets 800 just after exit of pallets 800 from exit lock chamber 30. In the automatic loading/unloading process of the present invention, an automatic pallet loading station 40 and an unloading pallet station 45 built by Intelmatic Corporation of Fremont, California are utilized. Each station uses three Adept Model One robots, controlled by Adept Model CC Compact Controllers and an Elmo Controller operating under conventional control software, tailored for apparatus 10 by Intelmatic Corporation software for controlling the loading processing and sequencing pallet movement. Three robots 40-1, 40-2, 40-3 load pallets 800 in a top to bottom manner, with first robot 40-1 loading the top third of pallet 800, second robot 40-2 loading the middle third of pallet 800 and a third robot 40-3 loading the bottom third of pallet 800. Likewise, three robots 45-1, 45-2, 45-3 unload substrates from pallet 800 in a reverse order to that of robots 40-1, 40-2, 40- 3. Specifically, robot 45-1 unloads the bottom third of pallet 800, robot 45-2 then unloads the middle portion of pallet 800 and finally robot 45-3 unloads the top third of pallet 800. Loading and unloading of pallets 800 in this manner ensures that no particulate matter present on pallet 800 or disk substrates 510 falls from the upper portion of pallet 800 to deposit on disk substrates 510 loaded in lower portions of pallet 800 during the loading or unloading process. The Adept Model One robot and Intelmatic software utilize reference notches 910 in pallet 800 to locate the approximate center of each substrate-carrying region 1000. The Adept robots utilize a single finger-type loading mechanism which engages disk substrates 510 by protruding through the center of each disk substrate 510 and lifts and places disk substrates 510 into grooves 1020 within each substrate-carrying region 1000. Automatic robots 40-1, 40-2, 40-3 and robots 45-1, 45-2, 45-3 in conjunction with the Intelmatic system, have the capability of loading and unloading, respectively, up to 2,500 disk substrates per hour. Sputtering apparatus 10 has a capability of producing 3,000 95mm thin magnetic film coated disks per hour. Automatic loading and unloading stations 40, 45 thus represent constraints on production throughput for the present embodiment of the overall sputtering process discussed herein. As will be recognized by those skilled in the art, additional stations may be provided to increase production loading to match apparatus 10 throughput rates . Pallet 800 may also be manually loaded and unloaded. In manual loading, lip 1030 is used to align the surface of disk substrate 510 with the planar surface of pallet 800 to more accurately provide disk 510 substrate into groove 1020. F. Pumping System Sputtering apparatus 10 incorporates a highly efficient, high capacity vacuum pump system, represented schematically in Figure 12. Preparing sputtering apparatus 10 to carry out the sputtering operation described by the present invention requires that the vacuum pump system achieve two purposes. First, the vacuum pump system must furnish a highly evacuated environment for substantially unobstructed paths between the bombarding species and the target surface, and between dislodged target species and the substrates. Second, the vacuum pump system must minimize contaminant circulation inside sputtering apparatus 10 in order to maintain high film integrity. These goals are achieved simultaneously by virtue of the design of the pumping system of the present invention. The overall vacuum pump system comprises three mechanical or roughing pumps MP1-MP3, with blowers BL1- BL3 , and twelve (12) cryo pumps, C1-C12 including seven 8-inch diameter pumps (C3, C4, C6, C7, C9, CIO, and C12), four 10-inch diameter cryo pumps (C2, C5, C8, and Cll) for process isolation, and one 16-inch diameter cryo pump Cl. A cryo pump model such as is available from CTI Cryogenics, a division of Helix Corporation of Santa Clara, California, is suitable for use in the pumping system of the present inventions. Eight compressors CY1-CY8 provide helium gas to cryo pumps Cl- C12, with: CY1 supplying Cl; CY2 supplying C2; CY3 supplying C3; CY4 supplying C5; CY5 supplying C4, C6 and C7; CY6 supplying C8; CY7 supplying C9, CIO and C12; and CY8 supplying Cll. The overall vacuum system also features a network of valves. Five chamber vent valves CV1-CV5 vent the internal environment of sputtering apparatus 10 to atmosphere. Roughing valves RV1-RV5 isolate mechanical pumps MP1-MP3 and blowers BL1-BL3 from sputtering apparatus 10. Chamber vent valves CV1-CV5 and roughing valves RV1-RV5 allow the apparatus 10 to be divided into five sections allowing each individual section to be vented and pumped down as desired, to facilitate maintenance of sputtering apparatus 10. (See Section K, System Control Software. ) High vacuum valves HV1-HV12 isolate cryo pumps C1-C3 from apparatus 10 to allow controlled pump-down sputtering apparatus 10 from atmospheric pressure. Valves MP1IV-MP3IV isolate one or more of mechanical pumps MP1-MP3 from the pumping system conduits, allowing flexibility in the number of mechanical pumps operating at a given time. Cryo pump roughing valves CR1-CR12 control contamination out of cryo pumps C1-C12 during a cryopump regeneration. In operation, mechanical pumps MP1-MP3 and blowers BL1-BL3 perform a pump-down of sputtering apparatus 10 from atmospheric pressure to a level of about 50 mTorr. During the pump-down, high vacuum valves HV1 through HV12 are closed, roughing valves RV1 through RV5 and chamber isolation doors D2 through Dll are open and doors Dl and D12.are closed. Pumps MP1-MP3 and blowers BL1-BL3 evacuate sputtering apparatus 10 to a "crossover" point, which has been selected to be between about 50 microns to 150 microns (50 mTorr to 150 mTorr). When the internal pressure reaches the desired crossover point, the system operator, through the electronic control system, closes roughing valves RV1-RV5 and opens high vacuum valves HV1-HV12. Cryo pumps C1-C12, working in conjunction with compressors CY1-CY8, evacuate the system to about 10 '5 to 10 "8 Torr (0.01 microns to 1 x 10 "5 microns). Argon gas flow is thereafter provided through gas manifolds 2323 into chambers 14-29 to a sputtering pressure about 9-12 mTorr (9-12 microns). When a pallet 800 loaded with disk substrates 510 is ready to proceed into sputtering apparatus 10 through load lock chamber 12, chamber 12 is at atmospheric pressure, and chambers 14 through 29 are at about 10 mTorr (10 microns). Pallet 800 enters from a class 10,000 clean room environment where robotic loading station 40 is positioned. Because the clean room environment is more sterile than that of load lock chamber 12, nitrogen gas is provided through valve LLSWEEP and a vent valve (not shown) in load lock 30 is opened to create a positive outflow from the clean room into load lock chamber 12, prohibiting contaminants from entering the clean room's environment. Ceramic filters are also provided to trap particulate matter generated when nitrogen backfill is provided through LLSWEEP into load lock chamber 12. Sturdy filters, such as Membralox 0.01 micron sintered alumina filters, available from Aluminum Company of America (Alcoa) Separations Technology, Warrendale, Pennsylvania, resist flexing over many pumping cycles even at pressures higher than 2000 psi and thereby contribute to the maintenance of a contaminant-free environment within the sputtering apparatus . After pallet 800 enters load lock chamber 12 and door Dl closes, mechanical pump MP2 and blower BL3 evacuate the load lock chamber 12 down to about 100 mTorr (100 microns). When the crossover point is reached, D2 opens, allowing pallet 800 to proceed into dwell heating chamber 14 where pallet 800 and disk substrates 510 will be preheated in preparation for film deposition. During the heating cycle, some outgassing from pallet 800 and disk substrates 510 occurs, particularly if pallet 800 has been recycled, i.e., has passed through sputtering apparatus 10 at least once without undergoing scheduled cleaning. The carbon remaining on pallet 800 acts as a sponge for water which may be absorbed from the atmosphere when pallet 800 is at any point along return path 50 from a previous sputtering run. Water outgassed (known as 'drag in') in dwell heating chamber 14 is removed from the internal environment of sputtering apparatus 10 by 16-inch cryo pump Cl, evacuating dwell heating chamber 14 back down to about 10 "5 Torr (0.01 microns). At this time, a pressure differential on the order of 10 microns (10 mTorr) exists between dwell heating chamber 14 and passby heating chamber 16. Because such a pressure differential can destabilize downstream sputtering processes, argon is used to backfill dwell heating chamber 14 in order to equalize the pressures, as monitored by Pirani gauge PIR2. Once this pressure differential is equalized, door D3 opens, permitting pallet 800 and disk substrates 510 to proceed into dwell chamber 18. A pump, such as model PFC-1000 from Polycold Systems of San Rafael, California, connected into dwell chamber 18, removes any residual water outgassed from pallet 800 and disk substrates 510, following additional heating performed in passby heating chamber 16. Removal of this residual water is crucial to eliminate oxidation of the chromium target and underlayer in chromium sputtering chamber 20. Pallet 800 and disk substrates 510 continue through sputtering apparatus 10 and the sputtering operation proceeds as described in Section L. After the multilayer film is deposited, pallet 800 and disk substrates 510 approach exit lock chamber 30 from exit buffer chamber 29. A pressure differential exists between chambers 29 and 30, on the order of that described in connection with dwell heating chamber 14 and passby heating chamber 16. Argon is used to backfill exit buffer chamber 29 to equalize pressures across door Dll, as monitored by Pirani gauge PIR15. Once equalization is accomplished, door Dll opens, allowing pallet 800 with disk substrates 510 to proceed through exit lock chamber 30 and out of sputtering apparatus 10. Periodically, cryo pumps C1-C12 must be cleaned in order to regenerate the cryogenic capacity of the pumps. More specifically, such cleaning involves clearing the cryo pumps of gases frozen therein. For sputtering apparatus 10, cryo pump regeneration typically takes place during machine down-time scheduled for replacing targets in sputtering chambers 20, 26 and 28. The cryo pump regeneration process of the present invention is discussed more particularly in Section K of this specification. Generally, cryo pump regeneration is initiated by first closing off all of high vacuum pump valves HV1-HV12, opening roughing sieve valves SVIV1-SVI15 and turning on sieve heaters SVNTR1-SVNTR12, mechanical pumps MP1-MP3 and blowers BL1-BL3. Simultaneously, warm nitrogen (N 2 ) is fed from supply N 2 through valves NIF1-NIF12 via heaters NIH1-NIH12 to cryo pumps C1-C12. The nitrogen flow defrosts frozen gases in pumps C1-C12 when C1-C12 reach 290 * K, pump MP2 and blower BL2 discharge the contents to the atmosphere external to sputtering apparatus 10. Sieve traps SVIV1- SVIV12 and cryo roughing valves CR1-CR12 insure vapors from hydrocarbon pump oils used in the mechanical pumps do not backflow into and contaminate the internal sputtering environment during the regeneration process. By these means, disk substrates 510 already at various stages within the sputtering apparatus are protected from ambient contaminants accompanying subsequent pallets which enter the sputtering apparatus. G. Transport Mechanism With reference to Figures 1, 13, 14, and 24, a system for transporting substrates through sputtering apparatus 10 and along return path 50 utilized in the apparatus and process of the present invention, will be hereinafter described. The transport system of the present invention utilizes a plurality of individually powered transport platforms 2400. Each transport platform 2400 may be individually controlled with respect to motion and speed by controlling a motor assembly (not shown) associated with each platform. Hence, at any given time, only those motor assemblies associated with platforms which are transporting substrates along their lengths at any given time need be powered. Additionally, the transport speed of each individual platform 2400 is user- controlled, with transfer speeds generally selectable within a specific range, allowing substrate transport within sputtering apparatus 10 and return path 50 at varying rates. Each transport platform 2400 is provided with one or more proximity sensors (not shown) which output pallet position signals to the electronic control system of the present invention. This allows the electronic control system and the system operator to identify the location of each and every substrate in sputtering apparatus 10 and along return path 50 at any given time. Three such proximity sensors per transport platform 2400 are provided for each of the 19 platforms used in conjunction with sputtering apparatus 10: 17 platforms in chamber modules 12-30 and two additional platforms at entrance platform 210, at the entrance to load lock chamber 12, and exit platform 220, outside exit lock chamber 30. Twenty (20) transport platforms 2400 are provided along return path 50, each such platform stage along return path 50 having one proximity sensor per platform. With reference to Figures 13, 14, and 24, each transport platform 2400 includes a motor assembly (not shown) coupled to timing chain assembly 1405, including chains 1410 and 1412, and sprocket wheels 1414-1422, mounted on transport beam 1400. An identical timing chain assembly 1405 is located on the opposite side of each transport platform 2400 (as shown in Figure 14). Generally, sprocket wheels 1421 and 1422 have a single set of teeth and are mounted to beam 1400 to provide tension adjustment for timing chains 1410 and 1412, respectively. Wheel 1416 has a double set of teeth, one set engaging timing chain 1410 and one set engaging timing chain 1412. Timing chains 1410 and 1412 may be manufactured from polyurethane; however, in load lock chamber 12 and exit lock chamber 30, stainless steel timing chains are required due to reduce excessive particulate matter generated and circulated during repetitive pump-down and venting cycles when using polyurethane timing chains. Alternatively, stainless steel chains may be utilized throughout the system. Sprocket wheels 1414 and 1418 may have single or double sets of teeth, as needed. Wheels 1414, 1416 and 1418 are coupled to spindles 1430, passing through beam 1400, which are in turn coupled to rubber roller wheels 1435 in cavity 1440 of beam 1400. Sprocket wheel 1420- 1 is coupled to a spindle 1424 passing through beam 1400 into cavity 1440 to translate the motion of sprocket wheel 1420-1 to sprocket wheels 1420-2 located on the opposite side of transport platform 2400. Wheels 1420 generally have two sets of teeth, one set engaging timing chain 1412, the other set engaging a chain or gear assembly coupled to the motor assembly associated with the particular transport platform for powering timing chain assemblies 1405. Through bores 1425 are provided in beam 1400 adjacent to the upper portion of each transport beam 1400 to allow sprocket wheels 1420 to be positioned at any of three points along transport platform 2400 as the positioning of the motor assembly relative to transport platform 2400 requires. It should be noted that the distance between wheels 1414 and 1416, and the distance between wheels 1416 and 1418, is equal. Further, when assembled into a complete transport system encompassing, for example, both apparatus 10 and return path 50, the distance between respective end wheels 1414 and 1418 on adjacent platforms is equal to the distance from wheels 1414 and 1418 to wheels 1416. Thus, the inter-roller spacing of rubber wheels 1435 is equal through the entire transport system. Substrate carrier 1450 is receivable in interior cavity 1440 of transport beam 1400. Substrate carrier 1450 includes E-beam assembly 1452 and substrate mounting member 1454. E-beam assembly 1452 enters cavity 1440 seated atop rubber wheels 1435 and is transported along the path of each platform 2400 when the individual motor assembly for that platform drives gears 1420 into motion. Guide wheels 1445 are provided to ensure alignment of substrate carrier 1450, and especially E-beam assembly 1452, within cavity 1440. Each transport platform 2400 is mounted to a wall portion 1402 of sputtering apparatus 10 by a cross beam 1404 and hex nuts 1406. Dual insulating members 1460 isolate substrate carrier 1450, and individual transport platforms 2400, from thermal and electrical energy which is transferred to pallet 800 during transport through sputtering apparatus 10. Insulating members 1460 may be manufactured from an insulating material such as DuPont's DELRIN thermoplastic elastomer. Insulating members 1460 are preferably bolted to substrate mounting member 1454 and include a T-shaped mounting pin 1470 for securing pallet 800. Apertures 805 are provided on extensions 807 of pallet 800 to allow pins 1470 to pass therethrough and pallet 800 to be mounted on carrier 1450. Maintaining a contaminant-free environment within sputtering apparatus 10 is crucial to quality control in the provision of multi-layer coatings on substrates. Utilization of an overhead drive transport system in the system of the present invention allows a large variety of substrates to be coated within a single apparatus. However, such overhead systems suffer from excessive particulate generation which may fall from the transport system to contaminate disk substrates carried below. The transport system of the present invention is provided with unique shielding to prevent particulate contaminants generated by the overhead transport drive system from entering chamber modules 12-30 of sputtering apparatus 10. As shown specifically in Figure 14, contaminant shields 1480 are bolted on the lower portion of transport platform 2400 in the interior of chamber modules 12-30. Shields 1480 are shaped so as to bar particulate contaminants generated by each transport platform 2400 from the interior of chamber modules 12- 30. In addition, E-beam assembly 1452 is specifically designed such that ends 1482 of shields 1480 are interposed in grooves 1453 of E-beam assembly 1452, minimizing entry of particulate matter into the interior of chambers 12-30. The transport system described herein further minimizes particulate generation by eliminating metal- to-metal contact. This particular feature of the transport system provides excellent electrical isolation of the substrate, thus providing the added advantage of allowing the substrate to be biased during, for example, carbon sputtering in chamber 28, thereby improving the quality of the carbon coating deposited. Each individual transport platform 2400 can move substrate carrier 1450 at a velocity ranging up to 24 ft/min along the entire transport path. Optimally, transport speeds within chambers 12-30 of sputtering apparatus 10 are adjustable up to 24 ft/min. Adjustment of drive speeds and each transfer platform 2400 is controlled by the electronic control system as discussed in Section K of this specification. H. gμbstratβ Heating Sys em Uniform substrate temperature is crucial to producing a superior thin film by sputtering processes. Figures 15 through 21 illustrate a heating assembly configuration which accomplishes this goal in sputtering apparatus 10. Specifically, sputtering apparatus 10 includes a heating assembly whose elements are distributed between dwell heating chamber 14, passby heating chamber 16 and dwell chambers 18 and 22. As shown in Figures 15 through 17, dwell heating chamber 14 features eight horizontal banks 1510A, 1510B, 1510C, 1510D, 1620A, 1620B, 1620C, 1620D of tubular quartz radiant heating lamps 1514. Banks 1510A, 1510B, 1620A and 1620B are housed in one shallow gold-plated stainless steel tray 1512 and banks 1510C, 1510D, 1620C and 1620D are housed in a second shallow gold-plated stainless steel tray 1512. Each bank 1510A, 1510B, 1510C, 1510D includes eleven 1.5 kW lamps 1514 connected in parallel, vertically aligned and interdigitated to overlap lamp ends between the banks . Individual lamps are separated horizontally by a distance of 3 inches. Each bank 1620A, 1620B, 1620C and 1620D includes three 1.5 kW lamps 1514 connected in parallel, horizontally aligned and interdigitated to overlap lamp ends within each bank. Tubular quartz radiant heating lamps such as those commercially available from General Electric Corporation Lamp Division of Albany, New York are suitable for this purpose. Within each tray 1512, banks 1510A, 1510B, 1620A and 1620B, and banks 1510C, 1510D, 1620C and 1620D are arrayed vertically. Trays 1512 measure 37.5 in. long (1) by 2-5/8 in. deep (d) by 32-3/8 in. wide (w) , with one tray 1512 mounted on chamber door 114, and the other mounted on rear chamber wall 99. Each tray 1512 is protected from overheating by a circulating coolant fluid provided through cooling lines 1516. As shown in Figures 18 through 20, passby heating chamber 16 includes ten horizontal banks 1818A, 1818B, 1818C, 1818D, 1818E, 1818F, 1920A, 1920B, 1920C, and 1920D of tubular quartz radiant heating lamps 1514. Each bank 1818A, 1818B, 1818C, 1818D, 1818E, and 1818F features six 1.5 kW lamps 1514 of the same type and mounted in the same fashion as those in dwell heating chamber 14. Individual lamps 1514 are separated by a distance of 2 inches. Each bank 1920A and 1920B features a single horizontally aligned 1.5 kW lamp 1514. Banks 1818A, 1818B, 1818C, 1920A and 1920B, are arrayed vertically in gold-plated stainless steel tray 1812 and banks 1818D, 1818E, 1818F, 1920C and 1920D are arrayed vertically in a second gold-plated stainless steel tray 1812. With the exception of housing five horizontal banks each, instead of four, trays 1812 are identical in measurement and respective mounting to chamber door 116 and rear chamber wall 100 as trays 1512 in dwell heating chamber 14. Likewise, trays 1812 feature cooling lines 1716 to provide protection from overheating. The output from banks 1510A, 1510B, 1510C, 1510D, 1620A, 1620B, 1620C, 1620D, 1818A, 1818B, 1818C, 1818D, 1818E, 1818F, 1920A and 1920B, may be set and monitored for individual lamp operating voltages and currents via the electronic controlling system, described fully in Section K, to operate at desired power levels and for desired periods of time. In the present embodiment, heater banks 1510A-1510D, 1620A-1620B, 1818A-1818F, and 1920A-1920D are operated in sets, wherein each set comprises banks 1510A/1510B, 1510C/1510D, 1620A/1620C, and 1620B/1620D, operated in parallel. Alternatively, bank sets 1620A/1620C, 1620B/1620D, 1510A/1510C, and 1510B/1510D, may be operated in parallel. Similarly, opposing banks 1818A/1818D, 1818B/1818E, 1818C/1818F, and 1920A/1920D are adjustably controlled in parallel. Preferably, independent control of each bank 1510A- 1510D, 1620A-1620B, 1818A-1818F, and 1920A-1920B, may be provided by the electronic control system. Such control of banks 1510A, 1510B, 1510C, 1510D, 1620A, 1620B, 1620C, 1620D, 1818A, 1818B, 1818C, 1818D, 1818E, 1818F, 1920A, 1920B, 1920C, and 1920D facilitates adjustment of heating power to meet the preheating requirements of different substrate materials. As shown in Figure 21, dwell chambers 18 and 22A and 22B each have two gold-plated stainless steel reflecting panels 2120, one each on opposite chamber walls 118, 122A, and 122B and rear chamber walls 101, 102 and 104. Reflecting panels 2120 measure 34-3/8 in. in length by 28 in. in width by 0.09 in. thick. The heating assembly cooperates with the other elements of sputtering apparatus 10 to contribute to the overall high throughput and high quality sputtered films produced. Specifically, as pallet 800 proceeds through dwell heating chamber 14, banks 1510A, 1510B, 1510C, 1510D, 1620A, 1620B, 1620C and 1620D rapidly commence heating to warm both sides of disk substrates 510 before film deposition. If, for example, the desired substrate temperature is about 200 "C, the heating time in dwell heating chamber 14 is approximately 30 seconds. Heating lamp war up time is negligible since low power (about 143 W) is delivered continuously to the lamps to keep lamp filaments warm. In the geometrically uniform array of heating lamps created by banks 1510A, 1510B, 1510C and 1510D, more heat is radiated towards disk substrates 510 carried in the center of pallet 800 as compared to disk substrates 510 carried in rows 810, 820, 870 and 880. In combination with efficient heat reflection from gold- plated stainless steel trays 1512, there is a need to equalize across pallet 800 the amount of heat radiated to individual disk substrates 510. Banks 1620A and 1620B serve as 'trim heaters' to boost the amount of heat radiated to disk substrates 510 carried in rows 810, 820, 870 and 880 of pallet 800. Although such trim heaters are not required, through equalization of heat distribution across pallet 800, trim heaters 1620A and 1620B allow control of coercivity of the deposited film to within about 60 Oe. To further insure uniform substrate temperature prior to film deposition, a second heating cycle is performed in passby heating chamber 16. Pallet 800 enters passby heating chamber 16 through door D3. The electronic control system enables high power input to banks 1818, 1920, for example, through internal software timers or by reading the output of optical sensor SEN10 (shown generally in Figure 12) capable of detecting pallet motion through the sputtering apparatus 10. As pallet 800 begins to depart passby heating chamber 16, the electronic control system reduces the power of those lamps 1514 positioned at the leading edge of pallet 800 or turns off power to those lamps entirely in response to timing parameters incorporated in the electronic control system software, or sensor SEN13, in order to avoid relative overheating of the trailing edge of the pallet 800. Banks 1818A, 1818B, 1818C, 1818D, 1818E, 1818F, 1920A and 1920B are initiated and will deliver heat for a preset, empirically determined time as monitored by a software timer in the electronic control system. In addition, a software delay timer is triggered to control the opening of door D3, allowing pallet 800 to proceed into passby heating chamber 16. As a result, when pallet 800 triggers SEN13 in dwell chamber 18, after a certain period, lamps 1514 on the leading edge of pallet 800 are reduced in power or turned off entirely, depending on the transport speed through dwell chamber 18. In addition, a Mikron temperature sensor (not shown) may be positioned at the entrance of passby heating chamber 16, allowing the system operator through the electronic control system to adjust the power output of banks 1818A, 1818B, 1818C, 1818D, 1818E, 1818F, 1920A, 1920B, 1920C and 1920D to compensate for thermal variations between disk substrates 510 and across pallet 800. In this manner, a uniform temperature profile is established across the surface of pallet 800 and between individual disk substrates 510, thereby avoiding higher coercivities for those substrates positioned on the trailing edge of pallet 800. Radiative heat losses from pallets and substrates proceeding through sputtering apparatus 10 are minimized by virtue of gold-plated stainless steel reflective panels 2120. The cooperation of these elements in the heating assembly contributes to the high throughput of sputtering apparatus 10 by promoting rapid and uniform heating of substrates before film deposition. The heating assembly also efficiently maintains the desired substrate temperature by minimizing radiative heat losses as disk substrates 510 proceed through sputtering apparatus 10. Moreover, integration with the electronic control system introduces added flexibility with respect to selecting and adjusting dwell times and heating rates as required by different substrates and sputtered films. I . Sputtering Chambers in General As shown in Figures 1 and 2, the present invention includes three in-line sputtering chambers 20, 26, and 28 to deposit a multilayer film, including chromium, CoCrTa and carbon thin films, respectively. Those skilled in the art will recognize that the application of the following principles to design a sputtering apparatus with greater or fewer sputtering chambers or with the capability to deposit more or fewer films is within the contemplation of the present invention. Moreover, all of the sputtering chambers within a particular sputtering apparatus need not be devoted to sputtering films. Indeed, any given sputtering chamber may participate in the overall process solely to the extent of serving as a pressurized inert passageway for substrates . The following description relates to the internal configuration of each sputtering chamber, which is symmetrical about the line of pallet travel through the sputtering apparatus 10. Figures 13, 14 and 23 through 28 illustrate various aspects of the sputtering chambers and will be referred to as necessary. Referring to Figures 13, 14, 22 and 23, sputtering chamber 20 generally represents the internal configuration of sputtering chambers 20, 26 and 28. By way of explanation, only chromium sputtering chamber 20 will be hereafter described. Only one-half of the chamber is described with the understanding that the description applies to both halves. Four planar (rectangular) cathodes 2222, 2223, 2224 and 2225 are mounted through insulative layer 121 to door 120. Door 120 is rotatable about hinge 1326 to allow access to the interior of chromium sputtering chamber 20, for example, for maintenance purposes. Interlocked protective cover 2305 interrupts the power supply to chromium sputtering chamber 20 when door 120 is opened. Cathodes 2222-2225 may be composed of a material such as copper and measure about 36 inches in length by 5-1/2 inches in width by 1.125 inches thick. Cathodes 2222-2225 are provided with cooling lines 2552 to protect against overheating. Cooling lines 2552 supply a cooling fluid such as water along cooling conduits 2554 in cathode surface 2550. As illustrated in Figures 14, 22 and 23, targets 2226-2229 are mounted one per cathode 2222-2225, with the target being nearest the line of pallet travel through chromium sputtering chamber 20. Within any given sputtering chamber, the composition of all four targets depends upon the film to be deposited, but may be chromium, a magnetic alloy or carbon. Likewise, the thickness of the targets depends upon the type and the thickness of the film to be deposited. In the case of the chromium and magnetic sputtering chambers 20 and 26, the target-to-substrate distance 'a' is about 2- 3/4 inches and the target-to-substrate distance 'a' for carbon targets is 2-11/16 inches because the chromium and magnetic targets are thicker than the carbon target. Referring now to Figures 21 through 24, shields 2230, 2236, 2238 and 2240 are mounted one per cathode 2222-2225. Shields 2230, 2236, 2238 and 2240 may be composed of a material such as copper and are generally rectangular in shape with peripheral flanges 2232 and 2234. Shield extension 2231 extends from shield 2230 into the chamber interior. Shields 2230, 2236, 2238 and 2240 are cooled by cooling lines 2336. A combined anode and dark space shield 2338 is incorporated into each shield 2230, 2236, 2238 and 2240. The sputtering process occurs with the targets sputtering in a sideways fashion, depositing the desired film on each side of disk substrates 510 as pallet 800 proceeds through each sputtering chamber. As Figures 27A and 27B show, during sputtering, flux (represented by vectors A and B) leaves the target surface diffusely, depositing on the disk substrates and other surfaces within the sputtering chamber. As discussed previously, in-line sputtering of disk substrates can introduce undesirable magnetic anisotropies into the deposited film. Shields 2230, 2236, 2238 and 2240 intercept the obliquely incident flux (vector A) from targets 2226- 2229 such that only flux substantially normal to the surface of target 2228 (vector B) is deposited on disk substrates 510. Specifically, peripheral flanges 2232 and 2234, extending the length of each shield, project toward the line of pallet travel through any given sputtering chamber. Shield 2230 also features shield extension 2231 which similarly projects toward the line of pallet travel. Peripheral flanges 2232 and 2234 and shield extension 2231 block deposition from high- and low-angle flux (vector A) as disk substrates 510 enter and exit each sputtering chamber, while providing an unhindered path for normal flux (vector B) to the substrates . Figures 25 and 26 illustrate the configuration of cathode 2222 in more detail. Cooling lines 2552 discharge cooling fluid along surface 2550 in shallow channels 2554 and an O-ring (not shown) disposed in channel 2556 prevents coolant leakage outside of channels 2554. On the reverse side of cathode 2222, surface 2658 is adapted to receive screws in holes 2660 for mounting cathodes 2222-2225 onto chamber doors 120- 1 and 120-2. Surface 2658 is configured to support and receive a magnet and magnetic pole piece assembly to produce the desired magnetic field. The assembly is created in a network of channels in surface 2658 consisting of center channel 2662, intermediate circumferential channel 2664 and outer circumferential channel 2666. Channels 2664 and 2666 are configured as concentric closed loops or ovals surrounding center channel 2662. Typically, target utilization in sputtering operations are about 15-20% for nonmagnetic materials and about 30-35% for magnetic materials. Considering the high costs associated with the purchase and replacement of target materials, optimal target utilization is another prime concern in sputtering operations. Magnet and magnetic pole piece assemblies used in the present invention substantially improve target utilization, enhancing both production throughputs and cost-effectiveness. Figures 27A and 27B illustrate in greater detail the magnet and magnetic pole piece assemblies for nonmagnetic (e.g., chromium and carbon) and magnetic (e.g., CoCrTa) targets, respectively. Each magnet 2768 is 1-inch long by 5/16-inch wide by 3/16-inch thick and magnets 2769 are 1-inch-long by 5/16-inch wide by 3/8- inch thick, with north and south pole directions indicated by arrows pointing up and down, respectively. Ferritic magnets of neodymium, iron and boron (NeFeB or "Neo iron") are preferred in the present invention. Along with magnets 2768 and 2769, magnetic pole pieces 2770 and 2774 are arrayed in channels 2662, 2664 and 2666. Magnetic pole pieces 2770 may be adapted to receive screws therethrough for securing the magnet and pole piece assembly within the channels as necessary. A nonmagnetic material 2772, such as aluminum in block or continuous form, is positioned so as to fill the channels as necessary and preclude shunting of the magnetic flux between adjacent magnetic pole pieces 2770. Iron plate 2274 serves as a backing plate for the magnetic and pole piece assembly. For a nonmagnetic target layout, center channel 2662 of each cathode contains about 25 magnets 2769 separated by 1/4-inch spaces and 25-inch pole piece strips 2770 above and below magnets 2768. Intermediate circumferential channel 2662 contains about 35 magnets 2768 separated by 1-inch spaces, two 31-inch pole piece strips 2770, two 31-inch pole piece strips 2774 adjacent to aluminum filler 2772 with additional pole pieces 2770 for fitting the cropped corners of intermediate channel 2664. Outer circumferential 2666 contains about 33 magnets 2769 and two 33-inch pole piece strips 2770 with additional pole pieces 2770 for fitting the cropped corners of outer circumferential channel 2666. The overall effect of the magnet and the pole piece assembly for the nonmagnetic target shown in Figure 27A is to produce a magnetic field strength above the target surface of 400 Gauss at the center of the erosion region. For a magnetic target layout, center channel 2662 contains about 25 magnets 2769 with one overlying 25- inch pole piece 2770. Intermediate circumferential channel 2664 contains about 35 magnets 2768 overlaid with two 31-inch pole pieces 2770 and additional pole pieces 2770 for fitting the cropped corners of intermediate channel 2664. Aluminum filler material 2772, in block or continuous form, occupies remaining vacancies in intermediate channel 2664. The overall effect of the magnet and pole piece assembly for a magnetic target shown in Figure 27B is to produce a magnetic field strength of about 400 Gauss at the center of the erosion region. As noted above, the purpose of the magnetic field is to trap electrons and ionized species in the plasma and enhance the sputtering rate induced by the circulating plasma above the target surface. The magnetic field 2700 generated by the magnet and magnetic pole piece assemblies used in the present invention approximate an ideal magnetic field 2700 where the vertical components of the magnetic fields above the nonmagnetic (Figure 27A) and magnetic (Figure 27B) targets are reduced. As a result, greater target utilization is obtained since the magnetic fields and plasma are focused across a relatively greater portion of the target surface. Target utilization may be further improved by increasing the magnet loading density within the channel network. For example, by loading intermediate channel 2664 with 24 magnets 2768 separated by 1/2-inch spaces, nonmagnetic target utilization increases to between 50% and 65%. For magnetic targets, an increased utilization of between 35% to 50% may result. Figure 28 illustrates the film structure which may be produced by the present invention on nickel- phosphorus plated aluminum disk substrate 510. A 80θA to 200θA (lOOOA preferably) chromium underlayer 2800 is deposited first on disk substrate 510. A 50θA to 85θA CoCrTa magnetic layer 2802 may be deposited over the chromium underlayer. As a result of the circumferential texturing of the disk surface as discussed previously in Section C.2, the 'C' axis of the hep structure of the magnetic cobalt alloy is aligned in the film plane. Finally, a 35θA carbon overlayer 2804 may be deposited, incorporating some hydrogen, as discussed in Section J. J. Carbon Sputtering Sputtering chamber design in sputtering apparatus 10 for carbon films requires additional refinements to optimize wear and corrosion resistance properties. These refinements are discussed herein with reference to Figure 13, as necessary. Experiments have shown that the incorporation of hydrogen into sputtered carbon films improves wear- resistance properties. In sputtering apparatus 10, hydrogen incorporation is achieved by sputtering in an argon atmosphere containing up to about 15% of a hydrocarbon gas. In particular, carbon films sputtered in the presence of ethylene/argon or acetylene/argon showed a 300% improvement in wear resistance as compared to carbon films sputtered in pure argon atmospheres . Thus, as compared to chromium and magnetic sputtering chambers 20 and 26, carbon sputtering chamber 28 uses a gas line for argon/hydrocarbon gas mixture to supply hydrocarbon gas flow during sputtering. A second type of chamber refinement in the carbon sputtering chamber relates to the need for substrate bias. As noted above, during sputtering, primary or "fast" electrons dislodge from the target and join the plasma. These fast electrons are constrained to field lines in the plasma where they may ionize argon atoms or may be attracted to positively biased regions within the sputtering chamber. Deposition of dielectric target materials, such as carbon, on surfaces other than the substrate can reduce the electrical conductivity of those surfaces and inhibit the electron grounding thereon. As a result of the reduced electrical conductivity, fast electrons either scatter and ionize argon, or are therefor available to impinge on the substrate, whether positively biased or grounded. In the event of the latter, the substrate may be heated sufficiently by electron bombardment to cause graphitization of the growing carbon film. One means of avoiding graphitization resulting from electron bombardment of the substrate is to apply a negative bias to the substrate to repel any stray electrons. As shown in Figure 13, arcuate phosphorus- bronze fingers 1302 depending from insulating block 1304 and connected to an external voltage source (not shown) provide an electrical contact to pallet 800 by which a negative bias may be applied. More specifically, as pallet 800 proceeds through carbon sputtering chamber 28, phosphorus-bronze fingers 1302 brush against the bottom edge of pallet 800 and establish the desired negative bias. At least one phosphorus-bronze finger 1302 maintains contact with the moving pallet while pallet 800 is in carbon sputtering chamber 28. A third refinement relates to a reduction of pallet transport speed through carbon sputtering chamber 28. As a target surface is increasingly eroded during sputtering, the once-flat surface eventually develops a depression which mirrors the magnetic field lines. As a result, the magnetic field lines emerging from the target are no longer perpendicular to the electric field lines at the target surface. The significance of the growing erosion region is that during sputtering, target species continue to leave the erosion region in a path perpendicular to the surface, i.e., according to a cosine distribution, even where the eroded target surface is no longer uniformly flat. Therefore, an increasing portion of the flux leaving the target surface is intercepted by shields 2230 as otherwise obliquely incident flux. In other words, a correspondingly decreasing portion of the flux is deposited on disk substrates 510 (and pallet 800) as the desired normally incident flux, thereby decreasing the overall film deposition rate. In general, such a decrease in deposition rate may be compensated for directly by increasing the power supplied to the cathodes. For carbon targets, it has been discovered that this method of compensation is impracticable because increased power input to and resultant heat from the cathodes would induce undesirable graphitization. The carbon target is also altered by redeposition of carbon from the flux into the erosion region. Specifically, since carbon is a dielectric material, such redeposition reduces the electrical conductivity of the target, further decreasing the carbon sputtering rate and may cause arcing. For conductive target materials like metals, redeposition is not similarly problematic. Accumulations of the redeposited carbon, which appear as large blemishes or warts, may be removed by grinding the carbon surface. However, such a solution to the redeposited carbon problem is time- and labor- intensive, and consequently is not preferred because it detracts from the high throughput capability of the sputtering operation of the present invention. A much more manageable and attractive solution directly minimizes graphitization by holding deposition power to the cathodes constant and reducing the pallet transport speed from the typical rate of 3 feet/minute, via the electronic control system to, for instance, about 2.8 ft/min, to compensate for the lower deposition rate. K. Electronic Control System The electronic control system for sputtering apparatus 10 and the process of the present invention provides one or more system operators with the means to comprehensively and efficiently control production throughput, applied sputtering power, and other sputtering apparatus parameters. The electronic control system is preferably programmable to allow a plurality of different operating parameter settings to be stored for each of the adjustably controlled elements of the sputtering process. Thus, the electronic control system generally performs two major functions: (1) monitoring sputtering apparatus 10 by reading data input from every aspect of sputtering apparatus 10, and providing status data to the system operator(s); and (2) controlling the sputtering process by providing user-controlled and automatically generated control signals to the functional elements of sputtering apparatus 10. The electronic control system of the present invention will be described with regard to Figs. 12, 29 and 30. Figure 12 is a diagram of the vacuum and chamber pumping system of the present invention, including general representations of the location of the various signals and components controlled, or read by, the digital input/output of programmable logic controller 2902. Figures 32A-B represent a logical flow diagram of the programmable logic software controlling the motor assemblies powering transport platform arranged in chambers 12-30 in apparatus 10 of the present invention. Referring to Figure 29, the major functional elements of the control system of the present invention are shown. Since both digital and analog input/output must be provided for in one embodiment, two main process controllers are used: a programmable process logic controller 2902, preferably an Allen Bradley PLC-5 programmable process logic controller, and an IBM- compatible, Intel-type 80386 or 80486 microprocessor based, computer 2901. It should be understood by those skilled in the art after review of the specification that the particular choice of process controllers is not crucial to the invention, as long as the process controller(s) can sufficiently handle input/output (I/O) in both analog and digital form to meet the comprehensive requirements of the control system described herein. The Allen Bradley PLC-5 is manufactured by Allen Bradley Company, Milwaukee, Wisconsin, and includes at least one PLC-5 processor module and a number of input/output modules attached thereto. The input/output modules provide an expandable number of inputs and outputs to handle any number of digital I/O signals. Programmable logic controller 2902 monitors digital input and provides digital output to those elements of the sputtering apparatus which require two-state control signals. These elements are described in detail below. Allen Bradley PLC-5 uses logic control software configured as "ladder" logic table diagram, a copy of which is included in Section M, to control input and output. In general, this software allows programming of the sensory input and output in a Boolean-type fashion along a series of horizontal timing "rungs". The entire "ladder" is scanned, top to bottom, every .030-.040 second, and each addressed element of I/O is examined by the processor. Each rung is programmed with both internal and external I/O, and generates an output command -- either internal or external -- if each element in the horizontal rung is "true". In this manner, it will be recognized that horizontally linked elements are ANDed together, while vertically linked elements are ORed. Each rung may be cross-referenced and nested to other individual rungs to achieve the desired logical output. The output of each rung may comprise an "enable," "latch" or "unlatch" signal, depending on the nature of the timing utilized in the particular program. Computer 2901 primarily controls analog input/output to the various elements of sputtering apparatus 10 via a SIXNET network interface 2903, such as that manufactured by Digitronix SIXNET, Inc., Clifton Park, New York, although some digital input/output functions are handled by the computer 2901. The SIXNET network interface 2403 is coupled to computer 2902 via 307,200 baud SIXNET Model 60-232/N-DL network modem (not shown) coupled to a RS-232 serial port on, for example, a peripheral extension card provided in an expansion slot of computer 2901. Such an extension card may comprise, for example, an IBM Real Time Interface Co-Processor (ARTIC) card manufactured by International Business Machines, Boca Raton, Florida. In order to handle a sufficient quantity of digital and analog I/O, the network interface 2903 comprising a SIXNET I/O network may include eight SIXNET 60 I/O MUX- FEB multiplex stations, each of which may include two RS-232 serial ports or alternative expansion capability, and sixteen dedicated I/O terminals. The multiplex stations are interlinked by the 307K baud SIXNET network interface. Data I/O of each such station may be configured as the constraints of the physical facility and sputtering apparatus 10 require to couple the necessary I/O signals to the network interface 2903. Network interface 2903 may include SIXNET 60-A/D 16-32 analog-to-digital converters, 6-D/A 12B-8 digital-to- analog converters, and 6-1032 FET digital/analog input/output modules to handle additional digital and analog I/O as required. Programmable logic controller 2902 and computer 2901 may communicate via a data highway 2911, utilizing an RS-232 serial bus coupled between one RS-232 serial port of the ARTIC peripheral card (discussed above) located in computer 2901, and an Allen Bradley 1171-KF2-B communications interface 2911. Interface 2911 is coupled to programmable logic controller 2902 via serial data highway 2912. Computer 2901 utilizes a user interface and system control software to monitor, control, generate alarms and store data for apparatus 10. One such software suitable for this purpose is "The Fix", produced by Intellution Corporation, Norwood, Massachusetts. The software allows development of a graphic interface environment for data input/output by creating signal control databases linking the particular interface environment to specific control signals output from, and data sensing signals input to, computer 2901. Thus, input data is transmitted via network interface 2903 from the various components of apparatus 10 to computer 2901 to be provided as direct readout to the user I/O environment created using the interface and control software to provide easily readable data to the system operator and/or to create output flags to programmable logic controller 2902. A limited number of output signals are provided by The Fix software to programmable logic controller 2902. These signals comprise combinational results of specific input signals and act as triggers for programmable logic controller 2902. This specific programming code utilized in "The Fix" software to generate these signals is included as Section N. As with the particular process controllers utilized in the present invention, it will be noted by those skilled in the art that the particular software utilized in the process controllers to provide data input/output is not crucial to the substance of the invention; any suitable process control software may be utilized within the scope of the invention to generate any number of suitable user interfaces. A second, IBM compatible computer 2907 is coupled to programmable logic controller 2902. Computer 2907 may be utilized as a separate programming computer allowing on-line monitoring, debugging, and programming of the ladder logic software in programmable logic controller 2902 utilizing a debugging software, such as that manufactured by ICOM Incorporated, Milwaukee, Wisconsin. User interfaces are provided for both programmable logic controller 2902 and computer 2901. User interface 2905 coupled to programmable logic controller 2902 may comprise a NEMATRON touch screen, manufactured by NEMATRON, Inc., Ann Arbor, Michigan, which allows data input/output through a series of custom designed, touch sensing, display screens. When utilizing the NEMATRON touch-screen with the Allen Bradley PLC-5, a BASIC module 2906 is provided in the Allen Bradley and coupled to the NEMATRON. The BASIC module is utilized for selecting the display screens on the NEMATRON and for linking particular screen input/output to the data input/output of the Allen-Bradley PLC-5. Computer 2901 is coupled to user interface 2904, which preferably comprises a standard high resolution graphics display monitor and keyboard. An EGA or VGA type high-resolution graphics display, such as the NEC Multisync II, manufactured by NEC Information Systems, Inc., Boxborough, Massachusetts is suitable for use as user interface 2904. Again, it should be understood that any conventional input/output interface may be utilized with the process controllers of the electronic control system while remaining within the scope of the invention. The electronic control system of the present invention governs three major functions: movement of the substrate through apparatus 10; sputtering process control within apparatus 10; and status indication for apparatus 10. Referring to Figure 29, movement of the pallet 800 and disk substrate 510 through the process is governed by the electronic control system through motor control system 2910, position sensing system 2915, and door control system 2920. Process control and status indication are governed by mechanical pump control system 2925, pump valve and vent control system 2930, cryogenic pump and compressor control system 2935, vacuum valve control system 2940, gas flow control system 2945, gas pressure control system 2950, heater control system 2955, substrate temperature sensing system 2960 sputtering power supply control system 2965, coolant control system 2970, gauge control system 2975 and residual gas analyzers 2980. With reference to Figure 29, the elements of the electronic control system, and their relationship to programmable logic controller 2902, computer 2901, and network interface 2903 are hereinafter described. It should be understood by those skilled in the art that the elements defined in Figure 29 are arranged in the manner shown for explanation purposes only; various modifications of the system are contemplated as being within the scope of the invention. 1 • Motor Control System 2910 Movement of the substrate through in-line sputtering apparatus 10 is controlled by the substrate transport system, discussed with the reference to Figs. 8-11. As noted therein, each separate transport platform 2400 has a variable speed motor assembly associated therewith and coupled thereto controlling the velocity of the substrate movement at that specific platform in the transport system loop. With respect to apparatus 10, nineteen (19) individual transport platforms are provided to carry the substrate through the seventeen (17) chambers of sputtering apparatus 10, and load and unload ramps, 210, 212, respectively. Nineteen motors M3-M21 are controlled by three BAM-8 Berkeley Axis Machine (BAM) multi-access servo controllers (not shown) . Each BAM-8 can simultaneously control up to eight axis of high performance servo motors, and provide multiple, preset, user-defined motor speeds for each axis, allowing digital input signals to activate preprogrammed control sequences for each axis controlled by each particular BAM-8. Each BAM-8 provides eight separate variable voltage output signals, one per axis, to the motor assemblies to control motor speed and, consequently, the velocity of the target substrate at each particular platform in the transport system. Each BAM-8 is preferably coupled by one RS-232 port from one of the eight SIXNET multiplex stations to each BAM-8. Two sets of nineteen digital outputs from programmable logic controller 2902 provide motor velocity control signals M3F-M21F, M3S-M21S to the BAM- 8 motor controllers. The two-bit control signal provided by signals M3F-M21F, M3S-M21S allows two individual forward speed settings, start/stop, and, forward/reverse direction to be controlled by programmable logic controller 2902. Nineteen additional digital outputs from programmable logic controller 2902 provide motor interrupt signals M3I-M21I to the BAM motor controllers. Thirty-eight (38) analog output signals DMOTLOl- DMOTL021, DMOTHI1-DMOTHI21 are provided for selection of individual motor speed set points of motors M3-M21. The high and low speed setpoints defined by DMOTL01- DM0TL021, DMOTHI1-DMOTHI21 define the motor speeds controlled by signals M3F-M21F, M3S-M21S from programmable logic controller 2902; once set, the BAM- 8 automatically controls each motor to meet the desired setpoint state. Optimal motor setpoints are listed in Table 1 : TABLE 1 Setpoints (ft. /minute) Fast SlQW 12.0 7 5 12.0 7 5 12.0 6, 0 6.0 6, 0 6. 6, 0 6. 6, 0 12.0 6. 0 12.0 6. 0 12.0 6. 2. 12.0 6. 2 6.0 6. 2 6.0 6. 0 6.0 2. 7 6.0 2. 7 12.0 2. 7 12.0 6. 0 12.0 6. 0 12.0 6. 0 12.0 6. 0 Hence, motor control system 2910 provides multiple velocity movement of a substrate through the sputtering apparatus which is useful for controlling a plurality of substrates moving through the sputtering system simultaneously. 2. Substrate Position Detection System 2915 Substrate position detection system 2915 represents the capability of electronic control system to detect and monitor movement of all substrates entering, exiting, or passing through apparatus 10. Fifty-seven pallet position sensors SEN1-SEN57 may be provided in chamber modules 12-30, and entrance and exit platforms 210, 220 to inform programmable logic controller 2902, (and the system operator) of the exact position of each substrate in apparatus 10. Generally, three sensors per pallet platform are provided. Preferably, optical position sensors are utilized in chambers 14 and 16 due to their ability to withstand the high temperatures present in those chambers. It should be recognized that it is preferable to provide three sensors per platform for greater accuracy in determining substrate position; in the present embodiment, to improve durability, only two position sensors are utilized in chambers 14 and 16 to reduce sensor failure rates. Each sensor SEN1 - SEN57 provides a digital output signal to programmable logic controller 2902 indicating the presence or absence of a substrate at the sensor's position. Such a comprehensive position detection system provides fault detection in the event a substrate becomes jammed at any point in the sputtering process, permitting the user to compensate for such problems and forestall problems on subsequent substrates in apparatus 10. Twenty-one additional pallet position sensors (not shown) are provided on the twenty transport platforms utilized in return path 50 (two on the last platform before load station 40). Each such sensor output signal may be provided to programmable logic controller 2902, as shown in Figure 12; alternatively, return path sensor signals may be provided to a separate programmable logic controller. 3. Door Control System 2920 Twelve chamber isolation doors D1-D12 are provided to separate certain individual ones of compartment chamber modules 12-30. Each door D1-D12 is operated by a pair of pneumatic cylinders (not shown) , each cylinder having a pair of solenoid triggers responsive to DROP and DRCL signals to each cylinder in a direction to open or close the door, respectively. Movement of each of doors D1-D12 is governed and detected by door control system 2920. Twenty-four (24) dedicated digital outputs from programmable . logic controller 2902 provide pulsed control signals to door open solenoids DROP1-DROP12, and door close solenoids DRCL1-DRCL12. Additionally, door position sensors are provided to detect each door's opened or closed state for the control system software. Door open sensors DROP1S- DROP12S and door closed sensors DRCL1S-DRCL12S provide direct digital output signals to twenty-four (24) digital inputs of programmable logic controller 2902. A high pressure air supply (not shown) is used in the sputtering apparatus to provide the requisite air pressure for the pneumatic valves, including door cylinders, high vacuum valves, and other such system components. Primary air sensor APS detects the existence of the high pressure air supply and the absence of a ABS detection signal input to one input of programmable logic controller 2902 initiates a system shutdown override. In addition, eight pressure switches PS1-PS8 are provided to check for the existence of discrete pressure states at various points in the pumping system and apparatus 10. Switches PS1-PS8 redundantly check for a lack of evacuation pressure in pumping conduits in apparatus 10 in the position as shown. Eight digital output signals indicating the detection, or lack thereof, each discrete pressure state are input to programmable logic controller 2902. 4. Mechanical Pump Control System 2925 Three mechanical roughing pumps MP1-MP3 and blowers BL1-BL3 provide initial vacuum pumpdown of sputtering apparatus 10, and explosive pumpdown in load lock 12 and exit lock 30 in accordance with the description of the pumping system discussed in section F of this specification. Mechanical pumps MP1-MP3 provides high speed pumping up to approximately 20-50 mTorr, while blowers BL1-BL3 provide pumping down to about 1 mTorr before the cryo pumps engage. Mechanical pumps MP1-MP3 and blowers BL1-BL3 thus act in concert to provide rapid pumping of apparatus 10. On/off controls for mechanical pumps MP1, MP2, and MP3, and blowers BLl, BL2, and BL3, are provided by six digital output signals from programmable logic controller 2902. 5. Mechanical Pump Valve and Vent Control System 2930 Five roughing valves RV1-RV5 isolate mechanical roughing pumps MP1-MP3 and blowers BLl - BL3 from chambers 12-30 of sputtering apparatus 10. In addition, five chamber vent valves CV1-CV5 allow for venting chambers 12, 18, 22B, 22D, and 30 between the evacuated, sputtering atmosphere and the ambient environment outside apparatus 10. Mechanical pump valve and vent control 2930 controls roughing valves RV1-RV5, monitored by roughing valve sensors RVS1-RVS10, and chamber vent valves CV1-CV5, monitored by chamber vent sensors CVS3-8. In the absence of sensors associated with any valves, the on/off condition of any valve can be determined by referencing the software output commands (for example, for valves CVl and CV5). Thirteen outputs of programmable logic controller 2902 are provided to mechanical pump valve and vent control 2930. A first set of five outputs controls the open/close state of roughing valves RV1-RV5, a second set of five outputs controls the open/close state of chamber vent valves CV1-CV5, and a third set of three outputs controls the open/close state of pump vent valves PV1-PV3. In addition, twenty dedicated digital inputs of programmable logic controller 2902 are provided for signals received from roughing valve sensors RVS1-RVS10 and chamber vent valves sensors CVS3- CVS8. Roughing valve sensors RVS1-RVS10 and chamber vent valve sensors CVS3-CVS8 provide state signals to programmable logic controller 2902 to indicate the state of each respective valve CV2-CV4 monitored, thereby allowing the user and the system to more accurately monitor pumpdown and venting of the system. Additional chamber vent valve sensors may be provided on chamber vent valves CVl and CV5, however because of the high usage of these values, sensor failure occurs rapidly. Compressor and Cryogenic Pump Regeneration Control System 2935 The electronic control system includes a cryogenic pump regeneration and compressor control 2935 which controls the start/stop function of compressors CY1- CY12, nitrogen supply N2, and nitrogen heaters NIH1- NIH12. In addition, cryogenic pump and compressor control 2935 provides on/off control to sieve heaters SVHTR1-SVHTR12 and sieve valves SVIV1-SVIV12, used in flushing contaminants from cryogenic pumps C1-C12 during the cryogenic pump regeneration process discussed above. Nitrogen supply N2 and heaters NIH1 - NIH12 are also used to flush and clean cryogenic pumps C1-C12. As discussed above in section F of this specification, cryogenic pumps Cl - C12 are provided to create an evacuated environment in chambers 12-30 in accordance with the sputtering process of the present invention. Compressors CY1-CY8 (Figs. 3 and 12) provide helium gas to cryogenic pumps Cl - C12 to enable cryogenic pumps Cl - C12 to create the necessary vacuum in sputtering apparatus. Eight outputs of programmable logic controller 2902 control the start/stop state of compressors CY1-CY8. Eight nitrogen flow sensors NIFS1-NIFS8 detect and insure the presence of nitrogen to nitrogen flow heaters NIH1 - NIH12. Eight programmable logic controller 2902 digital inputs receive flow detection signals from sensors NIFS1-NIFS8. Twelve digital outputs of programmable logic controller 2902 control the start/stop functions for nitrogen heaters NIH1-NIH12. An additional twelve digital outputs of programmable logic controller 2902 provide open/close state control over nitrogen flow valves NIF1-NIF12. Also included in cryo regeneration and compressor control 2935 are sensors, not shown, coupled with cryo pumps Cl - C12 to monitor the temperature of cryo pumps Cl - C12 during the cryo regeneration process and during the sputtering process. Twelve analog network interface 2403 inputs receive the analog temperature signals TD1- TD12, over a range of 3'K - 350 * K. Cryo roughing valves CR1-CR12 are provided to control outgassing of cryogenic pumps C1-C12 through sieve heaters SVHTR1-SVHTR12. As noted above, cryo roughing valves CR1-CR12 function in concert with sieve heaters SVHTR1-SVHTR12 in removing contaminants from cryo pumps C1-C12 during the cryo regeneration process. The open/close states of cryo roughing valves CR1-CR12 are controlled by twelve digital outputs of programmable logic controller 2902. Control of sieve heaters SVHTR1-SVHTR12 and sieve valves SVIV1-SVIV12 is provided by 24 digital outputs of programmable logic controller 2902: twelve (12) digital outputs of programmable logic controller 2902 control the start/stop functions of sieve-heaters SVHTR1- SVHTR12; twelve outputs of programmable logic controller 2902 control sieve-isolation valves SVIV1-SVIV12. 7. Vacuum Valve Control 2940 Vacuum valve control 2940 provides on/off switching control for, and receives feedback from, high vacuum valves HV1-HV12 coupled between cryogenic pumps Cl - C12, and sputtering apparatus 10. Feedback for high vacuum valves HV1-HV12 is provided by 32 high vacuum sensors HV1S1, HV1S3, HV2S1, HV2S2, HV2S3, ... HV12S1, HV12S2, HV12S3. High vacuum valves HV2-HV11 are three state (OPEN, CLOSED, and THROTTLE) operation valves. The THROTTLE state is used during operation of the sputtering system to maintain the vacuum level sputtering apparatus, subsequent to initial pumpdown, as the needs of each particular chamber require. High vacuum valve HV1 operates as a two-state (open/closed) valve, and is utilized with baffle 1210. Twenty-four (24) digital outputs (HV1_1, HV1_2, HV2_1, HV2_2, ... , HV12_2) are dedicated by programmable logic controller 2902 to provide twelve, two-bit control signals for high vacuum valves HV1-HV12 and baffles 1210, 1214, to select one of the three states of valve operation discussed above for valves HV2-HV12, or two states for valve HV1, and enable/disable baffles 1210, 1214. Thirty-five (35) digital inputs of programmable logic controller 2902 monitor high vacuum sensors HV1S1 -HV12S3 for respective valves HV1-HV12. One sensor is provided for each operational state of each high vacuum value as applicable. 8. Gas Flow Control 2945 Gas flow control system 2945 controls the sputtering gas supply for apparatus 10. Flow control for the primary and secondary gasses, discussed above, may be accomplished through use of eight MKS Instruments, Inc., (Andover, Massachusetts) model 2259B mass flow meters and flow controllers, including MKS model 246 readout displays. Eight isolation valves GF1-GF8 are located between each 2259B mass flow meter and its associated model 246 display. Eight flow control valves FL01-FL08 control the flow rate of the primary and secondary gases . Eight digital outputs of programmable logic controller 2902 are dedicated to control the open/close state of isolation valves GF1-GF8. Computer 2901 receives eight analog input (0-5 volt) flow measurement signals (designated FL01-FL08 by "THE FIX") to monitor gas flow via the model 2259B mass flow meters. Flow setpoints of flow controller valves FL01-FL08 of the model 2259B mass flow meters are controlled by eight 0- 5 volt output signals FLOST1-FLOST8 through network interface 2903 under the control of computer 2901. . Gas Pressure Control System 2950 In conjunction with gas flow control system 2945, discussed above, gas pressure control system 2950 monitors and controls pressure in apparatus 10 through a series of four capacitance manometers CM1-CM4, each capacitance manometer CM1-CM4 being separated from apparatus 10 by an associated isolation valve CHV1- CHV4. Each capacitance manometer CM1-CM4 and isolation valve CHV1-CHV4 may comprise, for example, MKS model 390H and 270B capacitance manometers manufactured by MKS Instruments, Inc., supra. MKS model 390H and 270B capacitance manometers include outputs providing analog output signals to computer 2901 for monitoring the gas pressure measured thereby, and digital signal inputs to allow for variable control of the metering range of each capacitance manometer or CM1-CM4. Generally, capacitance manometers CM1-CM4 monitor pressure in apparatus 10 subsequent to evacuation of chambers 14- 29 by mechanical pumps MP1-MP3. Specifically, gas pressure monitoring during pump-down of apparatus 10 is provided by twenty pirani gauges PIR1 - PIR20; at crossover, the point at which evacuation by mechanical pumps MP1-MP3 blower BL1-BL3 ceases and pumping by cryogenic pumps C1-C12 begins, capacitance manometers CM1-CM4 are used. Four outputs of programmable logic controller 2902 are dedicated to control open/close states of isolation valves CMV1-CMV4. Four inputs of network interface 2903 receive analog pressure readouts (designated CM1-CM4 by "THE FIX") of capacitance manometers CM1-CM4. Eight discrete outputs of network interface 2903 are dedicated to provide 2-bit digital signals CMR1.1, CMR2.1, CMR1.2, CMR2.2, CMR1.3, CMR2.3, CMR1.4, CMR2.4 to control the pressure metering range of capacitance manometers CM1- CM4. 10. Heater Control System 2955 Substrate heating, including dwell heating in chamber 14 and passby heating in chamber 16, to maintain a uniform temperature gradient over the substrate surface is governed by heater control system 2955. Control of both the "dwell" and "passby" heater banks 1510A, 1510B, 1510C, 1510D, 1620A, 1620B, 1620C, 1620D, 1818A, 1818B, 1818C, 1920A, 1920B, 1920C, 1920D, discussed in Section H of this specification, may be provided by eight Emerson Spectrum III Heater Controllers, manufactured by Emerson Industrial Controls, Grand Island, New York. The Emerson Spectrum III controllers allow digital heater temperature setpoint control of the quartz lamp heating elements discussed in section H. Thus, heater setpoints once set will be maintained by each Spectrum III. In the present embodiment, heater control system 2955 thus utilizes: eight digital outputs of programmable logic controller 2902 providing on/off control signals RH1A-RH3C to the Emerson Spectrum III controllers; eight digital outputs of programmable logic controller 2902 controlling high/low output enable RH1A- RH3C for the Emerson Spectrum III controllers; eight inputs of programmable logic controller 2902 receiving heater fault signals H1A0FLT-H3C0FLT; eight analog outputs from network interface 2903 controlling the voltage setpoints of heater bank sets 1510A/1510B, 1510C/1510D, 1620A/1620B, 1620C/1620D, 1818A/1818D, 1818B/1818E, 1818C/1818F, 1920A/1920B, and 1920C/1920D, and eight analog inputs to network interface 2903 monitoring each heater bank set's current setpoint output HSP1-HSP8. A preferable embodiment of heater control system 2955 would provide individual control of each of heater banks 1510A-1510D, 1620A-1620B, 1818A-1818D, and 1920A- 1920D. Such an embodiment would include additional hardware lines to control each of the heater banks coupled to the electronic control system. In an embodiment using Emerson Spectrum 3 controllers, sixteen such controllers would be utilized and sixteen digital outputs of programmable logic controller 2902 would be needed to provide on/off control signals, sixteen digital outputs of programmable logic controller 2902 would be required to provide high/low output enable signals, sixteen additional outputs of programmable logic controller 2902 would be utilized for heater FALSE signals, sixteen analog outputs from network interface 2903 would be needed to control voltage setpoints of the heater banks, and eight analog input signals to network interface 2903 would be utilized to monitor each heater banks current setpoint output. 11• Substrate Temperature Sensorinσ System 2960 Six Mikron temperature sensors (not shown) may be provided at various locations throughout the sputtering apparatus in a movable configuration to measure the temperature gradient over the surface of the substrate as it proceeds through various sections of the sputtering apparatus. The Mikron sensors provide 0-5 volt analog output signals TEMP1-TEMP6 through network interface 2903 for output to user interface 2904, thereby allowing the system operator to monitor at every cycle and react each heater bank 1818A-1818C output to maintain a uniform temperature gradient across the surface of the substrate as it proceeds through the apparatus. In general, sensors may be provided in chamber 16 or 18. 12. Power Supply Control System 2965 Power supply control system 2965 controls twenty- four (24) designated forty-eight (48) actual, in master- slave configuration) , power supplies PS1A, PSIB, ... PS12A, PS12B which provide high power output to the sputtering magnetrons utilized in Chambers 20, 26 and 28 of sputtering apparatus 10. Power supplies PS1A-PS12B may be Model MDX-20X 20KW DC Plasma Power Supplies, Manufactured by Advanced Energy Industries Corporation, Fort Collins, Colorado, capable of providing constant current, power, or voltage, and remote control thereof. Control signals for power supply control 2965 are entirely controlled by computer 2901 through network interface 2903. One hundred sixty-eight inputs of network interface 2903 are utilized as follows: # of INPUTS Signal Designation Function 24 PSLS1A-PSLS12A read power supply PSLS1B-PSLS12B set point level 24 PSV01A-PSV012A read power PSV01B-PSV012B supply voltage output 24 PSC01A-12A read power PSC01B-12B supply current output 24 PS01A-12A read power PS01B-12B supply power output 24 PSTL1A-12A read sputtering PSTL1B-12B target life calculation in power supply 24 PSARC1A-12A read power PSARC1B-12B supply arc detect sense from power supply 24 PSSR1A-PSSR12A read power PSSR1B-PSSR12B supply set point signal reached One hundred six analog and digital outputs of network interface 2903 are provided to the power supplies as follows: ft of INPUTS Siσnal Designation Function 24 PSSP1A-12A (analog) power PSSP1B-12B supply level set signals 24 PSM1.1-1.12 (digital) mode PSM2.1-2.12 control signals (12 x 2) 24 PSON1A-12A (digital) PSON1B-12B on/off signals (12 x 2) PSIV1-3 (digital) indicating vacuum chamber interlocks intact PSIW1-3 (digital) indicating water interlocks intact PSIX1-3 (digital) indicating heater cover interlocks intact PSRES (digital) emergency stop restore The aforesaid input signals to network interface 2903, including level set point signals, voltage output signals, current output signals, power output signals, target life signals, arc out signals, and set point reached signals, yield precise data feedback for provision to both the user and the control system software to monitor power supply performance. Interlock control signals PSTV1-PSTV3, PSTW1-PSTW3, PSTX1-PSTX3 are coupled to sensors (not shown) on interlock protective covers 2305 of sputtering apparatus 10 to cut out power supply output if the signals are tripped by an open interlock protective cover 2305 thereby preventing operator injury. 13. Coolant Control 2970 Circulating coolant fluid, such as water, is provided to various components of the sputtering apparatus to maintain temperatures within acceptable operating levels during production thereby forestalling rapid depletion of these system components. Specifically, coolant is provided to heaters 1512, shields 2230, compressors CY1-CY8, and sputtering cathodes 2222. Coolant control system 2970 monitors the temperature level of the circulating coolant flow in the coolant system and controls the open/close states of coolant flow control valves . While the particular layout of the coolant flow system is not shown, it will be understood by those skilled in the art that any suitable number of coolant control schemes may be utilized within the scope of the present invention. The location of coolant flow sensors CHR1A/CHR1B - CHR4A/CHR4B; MAG5A/MAG5B - MAG8A/MAG8B; CAR9A/CAR9B - CAR12A/CAR12B, is shown in general form in Fig. 12. Coolant flow control 2970 includes 24 magnetron cathode coolant flow sensors CHR1A/CHR1B - CHR4A/CHR4B; MAG5A/MAG5B - MAG8A/MAG8B; CAR9A/CAR9B -CAR12A/CAR12B, six sputtering shield coolant flow sensors CHRS1-CHRS2; MAG1-MAG2, and CARS1-CARS2, and six heat shield coolant flow sensors HSFS1-HSFS6. Each of these sensors provides a digital output signal to one input of programmable logic controller 2902. Six water supply flow control valves CHSUV1-CHSUV2, MAGSUV5-MAGSUV6, and CARSUV9-CARSUV10, two supply valves per sputtering chamber, and six water return path valves CHRTV3 CHRTV4, MGRTV7-MGRTV8, CARTV11-CARTV12, two return path valves per sputtering chamber, are provided. Twelve outputs from programmable logic controller 2902 control the open/close states of the water supply valves and the water return path valves. In addition, two main coolant on valves HH201 and HH202 are controlled by programmable logic controller 2902. 14. Pirani and Ion Gauge Control 2975 Gauge control 2975 also monitors the outputs of each pirani gauges PIR1-PIR20 and ion gauges monitoring residual ion contaminants in sputtering apparatus. Vacuum pressure during the pumpdown process prior to crossover between mechanical pumps MP1-MP3, blowers BL1-BL3 and cryogenic pumps C1-C12, is monitored by twenty (20) pirani gauges PIR1 - PIR20 provided in the pumping conduits linking cryo pumps Cl - C12 with sieve valves SVIV1 - SVIV12, in chambers 12, 14, 20, 26, 28, 29 and 30 of sputtering apparatus 10, and in the conduit linking pump MP2 and blower BL2 with apparatus 10. Twelve pirani gauges PIR3-5, PIR7-9, PIR12-14 and PIR18- 20 monitor pressure during outgassing in the region between cryo pumps C1-C12 to cryogenic roughing valves CR1-CR12. Seven pirani gauges PIR1, PIR2, PIR6, PIR11, PIR16, PIR15, and PIR17 to pressure monitor of chambers 12, 14, 20, 26, 28, 29 and 30. Analog signals in the range of 0-10 volts are output from gauges PIR1-PIR20 to indicate the measured pressure reading of each gauge and are provided to the network interface 2903. Twenty digital signals (designated PIR1 - PIR20) provided to programmable logic controller 2902 inputs to indicate the crossover point set for switchover between mechanical pumps MP1-MP3, blowers BL1-BL3, and cryogenic pumps C1-C12. Four ion gauges IG1-IG4 (not shown) measure the level of background gas (i.e., water contamination) in chambers 14, 20, 26 and 28 of sputtering apparatus 10. Analog output signals ION1-ION4 are provided by gauge control 2975 network interface 2903 for output to user interface 2904 to provide the system operator with data for controlling the pump-down process. In the preferred embodiment of the present invention, the pirani gauges and ion gauges are coupled through INFICON gauge monitor subsystems, manufactured by Leybold-Heraeus, Hanau, Germany, which provide an independent power source and hardware for use with the pirani gas and ion gauges discussed above. 15. Residual Gas Analyzers 2980 Residual gas analyzers RGA1 - RGA4 are utilized with sputtering apparatus 10 to monitor system status. Isolation of the residual gas analyzers RGA1 - RGA4 is controlled by the electronic control system by means of four isolation valves RGAV1 - RGAV4. Four dedicated outputs of programmable logic controller 2902 are provided to residual gas analyzers RGA1-RGA4 to open and close analyzer isolation valves • RGAV1-RGAV4. Sensors RGAS1-RGAS4 are provided to four inputs programmable logic controller 2902 to provide a status indication of residual gas analyzer valves RGAV1-RGAV4 indicating valve's opened or closed state. System Control Software Figure 30 is an overview flow-chart diagram of the system control software of the present invention. It should be noted that the following description is intended to be a general discussion of the capabilities and functions of the system software. Specific software functions and capabilities will be understood by one skilled in the art after a review of the source code in Sections M and N. It should be further noted that the following discussion does not differentiate between those functions controlled by programmable logic controller 2902 and computer 2901. As will be recognized by those skilled in the art, any of the functions described with respect to Figures 30-32 may be performed by a single process controller or multiple process controllers. The preferred embodiment for performing each of the functions outlined in Figure 30 is shown in Figure 29 and detailed in the source code sections. As shown in Figure 30, the software architecture is designed to allow both manual and automatic control of select system functions. Certain processes are automated while others depend on comprehensive feedback provided to the user (system operator) allowing the system operator monitor and react to such feedback to make adjustments in particular operating parameters (such as heater power level, and sputtering power supply output levels, etc.) to obtain optimal sputtering characteristics . In the embodiment of the control software shown in Figure 30, the user or system operator manually controls: gas flow valves GF1-GF8, residual gas analyzer isolation valves (RGAV1-RGAV4) ; passby and dwell heater setpoints (HSP1-HSP8); power supply and motor speed setpoints (PSSP1A-PSSP12B, DM0TL01-DM0TL021, DMOTHI1-DMOTHI21) ; the amount of time spent by a substrate in dwell heater chamber 14 (HTR1TMR); the amount of time the passby heater is on while a pallet is passing therethrough (HTR20N_DLY) ; and an emergency stop and pause latch commands. In addition, other elements such as coolant control, venting control, heater control, power supply control and cryo-pump system evacuation are manually initiated. Specifically, coolant control functions 3070 initiate coolant flow to heater shields 2230 and cathodes 2222- 2225 in chambers 20, 26, and 28 upon manual power up of the system. Further, manual control is provided for some heater control functions 3075, such as selection of low and high heater setpoints. Manual control of the heater setpoints allows the user to monitor the output of the (Mikron) substrate temperature sensors and make adjustments to individual heater bank setpoints and/or substrate heating duration timers to achieve an optimal thermal effect on individual substrates moving through heater chambers 14 and 16. Additionally, manual control of some chamber vent functions 3015 allows for apparatus 10 to be vented in whole or in sections for machine maintenance. Feedback block 3012 provides the user with such data as: argon pressure readout, substrate temperature, power supply output setpoints, motor speed setpoints, an ion & pirani gauge readouts. Additional data, such as that described above with respect to Figure 29, is also provided to the system operator. Referring to Figure 30, apparatus 10 is generally maintained in a standby state 3028 at full vacuum, e.g., 1 x 10 "7 Torr. At system standby 3028, apparatus 10 has been pumped down to a high vacuum level by mechanical pumps MP1-MP3, blowers BL1-BL3 and cryopumps C1-C12. The system stand-by condition is usually maintained due to the time required to perform total system pumpdown. As noted briefly above, system maintenance 3082 may be performed when apparatus 10 is on a section by section basis while venting only those sections necessary for maintenance purposes. In such cases, apparatus 10 is divided into five sections. Generally these sections comprise: chambers 12-14; chambers 18- 24A; chambers 22B-24B; chambers 22D-24C; and chambers 29-30. Each of the five sections can be individually vented and pumped down under user control as required, depending on what access to apparatus 10 is required. In this regard, the chamber vent control functions 3015 allow the user to individually control of the opened or closed state of chamber vent valves CV1-CV5 depending on which section is to be vented. Automated section pump sequences 3010 are provided to control roughing down of each section 1-5 using pumps MP1-MP3 and blowers BL1- BL3 , and high vacuum valves sequence 3030 to control valves HV1-HV12 as required, to reduce individual sections to high vacuum. Section pump sequence 3010 also ensures that doors D1-D12 are in their required opened or closed states with respect to the pumping or venting of the particular stage as required: DOORS CLOSED STAGE PUMP VENT 1 Dl - D3 Dl - D4 2 D4 - D6 D3 - D5 3 D5 - D8 D6 - D7 4 D7 - D10 D8 - D9 5 D9 - D12 D10 - D12 In the instance where chambers 12-30 of apparatus 10 have been fully vented and are at ambient atmosphere, an automated pump down sequence is provided to reduce the pressure of chambers 12-30 to approximately 50 mTorr. The user initiates the pump down system enable sequence 3020 which provides a check and setup for the pump-down process. A pump down timer PDSTMR is initialized which allows the pump down enable process to run for a maximum of 60 seconds before issuing a fault. The enable process (PDSE) 3022 comprises: closing RV1-RV5; checking RVS1, RVS3, RVS5, RVS7, RVS9 to ensure valves RVl- RV5 are closed; enabling MP1-MP3; opening doors D2 - Dll (within a limit of 3 seconds before outputting a fault); closing doors Dl and D12; and enabling compressors CY1-CY8. A pirani gauge check 3024 is performed to ensure that PIR2, PIR6, PIR11, PIR16, and PIR15 are less than 125 mTorr (or equivalent preset level between 100-250 mTorr) before the system opens baffles 1210 and 1214. At this point, apparatus 10 has reached a roughed down state 3028 wherein each chamber 12-30 is at a pressure of approximately 50 mTorr, and blowers BL1-BL3 and mechanical pumps MP1-MP3 are disabled (3029) . To reduce the pressure in apparatus 10 to a level conducive to sputtering, high vacuum valves HV1-HV12 must be fully opened to allow cryogenic pumps C1-C12 to pump apparatus 10. This sequence 3030 is initiated by a manual user input 3030a assuming the system has reached the roughed, crossover point 3028. At stage 3030, pirani gauges PIR2, PIR6, PIR11, PIR16, and PIR15, corresponding to individual pump sections 1-5, are checked before opening each respective high vacuum valve sets HV1-HV2, HV3-HV5, HV6-HV8, HV9-HV11, and HV12, respectively associated therewith. Once high vacuum valves HV1-HV12 are opened, cryogenic pumps C1-C12 will evacuate the internal environment of chambers 12-30 to a pressure of approximately 1 x 10 "7 - 2 x 10 "7 Torr. When apparatus 10 has achieved a pumped down state 3032, the auto run preparation mode 3034 must be initiated by a manual user input 3032a. Auto run preparation sequence 3034 involves: providing argon backfilling by opening GF3, GF5, GF7, and GF8; checking for no doorfaults (DOORFAULT) ; check/enable mechanical pumps MP1 & MP3, and blowers BLl and BL3; check and set dwell and passby heaters to low power setpoints; check and/or set doors D1-D3, D10-D12 closed, and doors D4- D9 open; and throttle HV2-HV12. Once the system is prepared for auto run mode operation, a user input 3035 is required before the auto run mode 3050 is enabled. If the user input is made and the system is prepared, the auto mode is enabled. Auto mode functions 3050 include throttling high vacuum valves HV2-HV12 and enabling the transport stages of return conveyor path 50. In addition, auto mode 3050 includes the automatic run sequence 3200 controlling motor assemblies, door operation, load/exit lock pumping and venting, and high power supply/heat control described in Figure 32. Sputtering power supplies PS1A- PS12B will have been manually preset to low power. It is noteworthy that coolant control sensors CHR1A-CHR4B, MAG5A-MAG5B, and CAR9A-CAR12B must indicate the presence of circulating coolant in cathodes 2222-2225 before power supplies PS1A-PS12B will be enabled. Upon exiting auto mode 3050, apparatus 10 returns to a standby state wherein the dwell and passby heaters in chambers 14 and 16, respectively, are automatically switched off and auto run mode is disabled. The software also provides a number of fault flags to the user to allow the user to correct potential problems or to hold processing of other logic rungs until correction of the fault is completed. Such faults may include, for example, argon gas flow failure detection (NO ARGON); a failure in communications between computer 2901 and programmable logic controller 2903 (NO FIX COMM) ; motor assembly faults; internal system pressure failures (NO VACUUM); cryogenic pump failures (CRYO > 20 * K); load lock and exit lock venting problems (LLVENT > 60 s, EXLOCK VENT > 60s); open protective covers on sputtering chambers 20, 26, 28, (INTERLOCKS); mechanical pump and blower failures (MP FAIL); power supply arc (ARC DETECT); air supply failsafe (APS); heater alarm/fault; power supply setpoint alarms; door faults (DOORFAULT) ; valve faults; and coolant flow faults . An automated process 3100 for regenerating (cleaning and purging) cryo pumps C1-C12 is also provided in the software of the present invention. Cryogenic pump regeneration process 3100 will be discussed with respect to Figure 31. Figure 31 is a flowchart showing the cryogenic pump regeneration process for a single cryogenic pump, Cl. The regeneration processes for pumps C2-C12 are identical, using corresponding valves, gauges, and heaters, coupled to respective pumps C2-C12 as applicable, for each pump C2-C12 being regenerated. In general, the cryogenic pump regeneration comprises raising the temperature of the cryogenic pumps, supplying the pumps with warm nitrogen, and enabling mechanical pump MP2 and blower BL2 to flush the contaminant materials agitated by the nitrogen flow out of the cryo pumps. Cryogenic pump regeneration process 3100 is manually initiated by a user 3110. User initiation of the cryogenic pump regeneration process preferably enables simultaneous regeneration of all twelve cryogenic pumps 3115. The initial regeneration step 3120 entails closing HV1 and initiating a sieve trap timer with a total duration of .5400 seconds. The sieve timer initiates enables sieve heater SIVHTR1 for 3600 seconds (3121, 3122). Further, mechanical pump isolation valve MP2IV is checked and sieve valve SVIV1 is opened (3124) for a duration of 5400 seconds (3126); valve SVIV1 is closed at the expiration of 5400 seconds (3125). In addition, the purge sequence 3130 is initiated. Purge sequence 3130 opens nitrogen flow valve NIF1 and enables nitrogen heater NIH1. Sequence 3130 waits until the cryogenic pump has reached a temperature of 290 * K before initiating the purge timer with a duration of 7200 seconds. Purging of the cryogenic pump thereafter continues for 7200 seconds. When complete, NIF1 and NIH1 are closed and roughing sequence 3140 begins. The roughing sequence involved initially checking to ensure that line pressure (PIR10) is TRUE, BL2 is enabled and PIR3 outputs false (pressure less than 250 mTorr) . If these condition are met, cryo roughing valve CR1 and sieve valve SVIV1 are opened, and a roughing timer having a duration of 600 seconds is started. If roughing takes place for longer than 600 seconds a fault is generated. Otherwise, the system waits for PIR3 to output a TRUE condition before closing CR1. After CR1 is closed, a ROR timer waits for 30 seconds to ensure PIR3 remains TRUE. If at any time before the expiration of thirty seconds a PIR3 signal is received, the system counts one and returns to restart the roughing sequence. The system will perform ROR test 3150 generally for up to five cycles (and up to 20 cycles for pump Cl) before outputting a fault. If PIR3 remains TRUE and the ROR timer = 30 seconds, the process goes to cool down -- allowing 7200 seconds for the cryogenic pump to reach a temperature of < 20'K. If the cryogenic pump does not reach 20° K within 7200 seconds, a fault is generated. Figures 32A-32D are a logical diagram of one component of the electronic control system software showing input/output and process control of the auto run mode 3200 controlling substrate movement through apparatus 10. In the logical flow diagram of Figures 32A-32D, horizontal lines indicate software logic flow in relation to time, with time increasing in the direction of the arrows shown therein; vertical lines generally represent decision points. As shown in Figures 32A and 32D, the system control software of the present invention utilizes motor control 2910, position sensors 2915, door control 2920 and pump valve and vent system 2930, to control movement of a substrate through sputtering apparatus 10. The addresses used in Figures 32A-32D correspond to those discussed above with respect to the functional elements of the electronic control system. As shown in Figures 32A-32D, start point 3200 in entrance lock loop 3210 of the software represents a system status condition wherein sputtering apparatus 10 is prepared for a substrate to enter load lock 12. Start point 3200 may denote the first substrate entering apparatus 10, or may represent a point wherein a prior substrate cleared load lock 12 and passed into heater 14. At the start point 3200, roughing valves RV1-R5 are closed, doors D4-D9 are open, doors D1-D3, D10-D12 are closed, and chamber vent valves CV1-CV5 are closed. The software also checks for a TRUE output from PIR17, RV5, and DROP10S, indicating, respectively, chamber 30 at crossover pressure, the closed state of roughing valve RV5, and whether door D10 is open. When a substrate is moved into position at entrance platform 210, the system software is prepared to begin entrance sequence 3210. Position sensors SEN1-SEN3 must indicate a TRUE condition, signaling the presence of a pallet, in order for the software system to proceed. If entrance lock loop 3210 is in a state wherein a substrate has passed out of dwell heater chamber 14, point 3215 in the logic flow line, timer VDDR2CL, which runs for 2 seconds to verify that door D2 has closed, must have completed its sequence in order for processing of that substrate to proceed. Generally, when VDDR2CL is initiated, a substrate will be waiting at entrance platform 210. Thus, input conditions indicated at 3212 will be TRUE and timer VDDR2CL will control initiation of the software logic. After the target position is verified, door close sensor DRCL1S is checked to ensure door Dl is closed, and roughing valve sensor RVS2 is checked to ensure roughing valve RVl is closed. Additionally, pressure switch PS2 must read FALSE (PS2) , ■ sensor SE 1 is redundantly checked for a TRUE output, and position sensors SEN4-SEN6 must read FALSE to ensure the absence of a substrate in load lock 12. When all the above-mentioned conditions are met, signal OPCV1 is directed to open chamber vent valve CVl to vent load lock 12. In logical terms, the condition — DRCL1S AND RVS1 AND P ~ 5 AND ' SEH ~ AND EW5 AND SEN6 -- must be TRUE to open CVl, as indicated by the input description 3212. Signal OPCVl causes pressure switch PS2 to output a TRUE state, and pirani gauge PIR1 to output a FALSE state (e.g., pressure above crossover level). A timer CV1_DLY runs for 1 second before a signal is sent to close CV2. Timer PAL_GAT_TT is a 155 second duration timer provided to ensure a specified amount of time passes between the entrance of successive pallets into load lock 12. Timer PAL_GAT_TT is initialized when door Dl is closed, as signified by DROPl or DROPIS, such signals being generally output after door Dl is closed subsequent to entrance of a substrate into load lock 12, as shown by loop 3214. If PAL_GAT_TT is FALSE (PAL_GAT_TT e.g., timer complete), and PS2, SEN3 , and SEN5, are TRUE then signal DROPl is sent to open outer door Dl to receive a substrate into apparatus 10. Signal DROPl will cause door open sensor DROPIS to output TRUE, indicating door Dl is, in fact, open. Prior to activating motor assemblies M3 and M4, the logical condition -- (SEN3 or SEN4) AND ~ Ε AND DRCL2S -- must be TRUE. When this condition is met, motor assemblies M3 and M4 are activated to move the substrate at high motor setpoint speed from entrance platform 210 of the sputtering apparatus into load lock 12. Movement of the substrate will cause sensors SEN4 and SEN6 to output TRUE, and sensors SEN1 and SEN3 to output FALSE. When sensors SEN3 and SEN6 output FALSE and TRUE conditions, respectively, signaling the presence of the substrate in chamber 14, signal DRCL1 is provided to close outer door Dl. Signal DRCL1 causes DROP1S to output a FALSE condition indicating door Dl is closed, and enabling timer PAL_GTE_TT, as discussed above. Subsequently position sensor SEN6, and door close sensors DRCL1S and DRCL2S, when TRUE, enable timer SOFRUF for 1 second, thereby delaying opening of roughing valve RVl. When timer SOFRUF has completed, and the logical condition — DRCL1S, PIR1, ϋVT, BLl, AND MPIIVOP — is TRUE, signal OPRV1 is sent to open roughing valve RVl . High speed, explosive pumping occurs in load lock 12 until such time as the preset requisite chamber pressure is achieved, causing PIR1 to output TRUE. Opening RVl causes sensor RVS1 to output TRUE, enabling timer DROP2_DLY to run for two seconds to ensure pump MPl and blower BL2 have sufficient time to pump load lock 12 down. When timer DR0P2_DLY is done and PIR1 is TRUE, RVS1 outputs TRUE and PS2, FALSE. At the same time, signal 0PTDR2 is sent to open door D2 to allow the substrate to move between load lock 12 and heater chamber 14. Before motor assembly M4 will engage, sensor SEN6 must be TRUE, and SEN9 FALSE, to indicate the presence and absence of a target in load lock 12 and heater chamber 14, respectively. If all conditions are met, motor assembly M4 is activated at high speed setpoint; somewhat redundantly, the logical condition -- (SEN6 OR SEN7) AND SEN9 -- must be TRUE in order for motor assembly M5 to engage at high speed. A substrate is thereby transferred between load lock 12 and heater chamber 14. The engagement of motor assembly M4 and M5 will cause sensors SEN7-SEN9 to output TRUE, and sensor SEN6 to become FALSE. Simultaneously, if the logical condition -- (SEN4 OR SEN6) AND DR3CLS, SEN9, AND SEN7 — is TRUE, signal DRCL2 will be sent to close door D2. Signal DRCL will cause sensor DRCL2S to become TRUE, thereby initiating timer VDDR2CL as discussed above. At point 3215 in the logic diagram, the software and sputtering apparatus 10 are prepared to receive an additional substrate in load lock 12 while proceeding with the sputtering process on the substrate now present in heater chamber 14. Assuming position sensors SEN1 and SEN3 indicate the presence of a substrate, loop 3210 will return to start position 3200 and may continuously receive additional substrates while processing of other substrates continues at different points in apparatus 10 in accordance with the following discussion. At this point, it is notable that the aforesaid redundant signal and sensor readings take on additional significance when multiple targets will be moving through the system. These fail safe sensor readings are provided to ensure smooth operation of apparatus 10, and the absence of pallet collisions or errors within the apparatus . The substrate present in heater chamber 14 continues through apparatus 10 under the control of the system software as follows. Door close sensors DRCL2S and DRCL3S to ensure doors D2 and D3 are closed. Again, sensor SEN9 is checked to ensure the presence of a pallet in heater chamber 14. If all such conditions are true, HTR1TMR engages for 72 seconds; simultaneously, if no water faults are detected (HSFG1F) heaters 1510A- 1510D are driven to high power to act on the substrate present in chamber 14. Heating of the substrate in heater chamber 14 occurs for a specified duration as determined by HTR1TMR. Upon completion of 72 seconds, two heater timers are initiated: HTRDLYTMR and HTR20NDLY. If HTR1TMR is completed and no water faults are present (HSFGIF) , timer HTR20NDLY, having a duration of 26 seconds, is enabled to control initiation of passby heaters 1818A- 1818F and fault generation signal H2F upon its completion. Simultaneously HTRDLYTMR, having a duration of 25 seconds is enabled and measures out the substrate soak time in dwell heater chamber 14. Upon completion, timer HTRDLYTMR initiates the motor control and venting sequence 3220 which runs simultaneously with heater control timing sequence 3225, generally illustrated in Figure 32B. After 25 seconds, baffle 1210 is throttled by signal HV1_2 and timer DR3DT, having a duration of 5 seconds, is initiated. If DROP3S is TRUE and timer DR3DT is done, signal DROP3 is provided to open door D3 to allow the substrate to pass from heater chamber 14 into first buffer/passby heater chamber 16. As will be noted by following parallel processes 3220 and 3225, heater banks 1818A-1818E will have been initiated by HTR20NDLY prior to the substrate's entry into chamber 16 and are timed to remain on until a point at which the substrate is exiting chamber 16. DROP3 will cause door open sensor DROP3S to indicate door D3 is in an open state. When the logical condition — SEN9, SEN13, SEN15 AND DR0P4S -- is TRUE, motor assembly M5 is enabled at slow setpoint speed. When the logical condition -- DROP4S, SEN12 AND (SEN9 OR SEN10) -- is TRUE, motor assembly M6 is activated at slow setpoint speed to pass the substrate through from heater chamber 14 first to buffer passby heater chamber 16. As the substrate is passed through chambers 14 and 16, SEN10-SEN13 will output TRUE and SEN7, FALSE. Subsequently, if the condition — (SEN11 OR SEN12) AND DROP4S AND SEN15 -- is TRUE, motor assembly M6 is enabled, and if -- (SEN12 OR SEN13) AND DROP4S AND 3EΪTT5 is TRUE, motor assembly M7 is enabled at slow setpoint speed to pass the substrate from passby chamber 16 into dwell chamber 18. It will be noted that movement of the substrate into chamber 18 triggers SEN13, which in turn initiates timer HTR20FF. HTR20FF is set with a duration of 13 seconds, a period which, when used with the motor setpoint speeds set out above (Table 1), shuts off passby heaters 1818A-1818E before the substrate fully exits chamber 16. This is to avoid overheating the trailing edge of the substrate, as discussed above. It is further noted that heater fault timer H2F runs for duration of 70 seconds before outputting a fault, indicating that the heater banks have been on too long, possibly resulting in burnout of the heating elements. In like manner, movement of the substrate through sputtering apparatus 10 by motors M7-M19 continues as shown in Figs. 32C and 32D with associated inputs and outputs shown therein having like affect as the I/O discussed above. Each input condition shown must be met in order to activate subsequent motor assemblies along the substrate's path through sputtering apparatus 10. Likewise, each signal causes an output state change for each sensor or value indicated. In like manner, only those motor assemblies M6/M7, M7/M8, M8/M9, M9/M10, M10/M11, etc., necessary for particular platforms to transport the substrate present at that location are activated. Individual motor assembly speeds are set as discussed in Table 1 to vary the velocity of the substrate through particular chambers of sputtering apparatus 10 as the sputtering process requires. As noted with respect to Figures 32A-32D, and Table 1, motor assembly pairs operate at the same speed in order to assure smooth substrate transport. As shown in Figure 32D, an exit lock loop 3250, similar to entrance lock loop 3210 discussed above, allows sequential passing of substrates through exit lock chamber 30 to ensure the integrity of the evacuated environment in sputtering apparatus 10 is maintained. Beginning at point 3252, if — DRCL10S, CV5 ~ , SEN54, AND RVS9 -- are TRUE, (indicating door D10 is closed, chamber vent CV5 is closed, substrate at SEN54 , and roughing valve RV5 is open, respectively), signal DROP11 is sent to open door Dll, thereby causing sensor DROPlIS to output TRUE. If -- (SEN51 OR SEN52) AND SEΪ.54 -- then, motor assemblies Ml9 and M20 are enabled at high setpoint speeds, causing SEN52-SEN54 to be TRUE and SEN51 to be FALSE. Sensor SEN54 enables a signal to close RV5, thereby causing RVS9 to output TRUE, and also enables a signal to close door DR11, causing DRCL11S to output TRUE. A delay timer VDDR11CL delays CV5 ' s closing for 1 second to allow venting of exit lock 30. Once the above conditions are met, and sensor SEN54 is TRUE (pallet in exit lock 30) and DRCL12S is TRUE (door D12 closed), chamber vent CV5 is opened. Subsequently, if roughing valve RVS9 is shown as TRUE, sensor SEN57 indicates FALSE, door close sensor DRCL11S and sensor SEN54 indicate TRUE, and pressure switch PS6 indicates TRUE, exit lock 30 will be vented to atmosphere (opening CV5) and a signal DROP12 will be sent to open door 12, thereby resulting in door open sensor DROP12S outputting a TRUE condition. When pressure switch PS6 outputs a TRUE condition, timer CV5_DLY having a duration of 1 second, will be enabled. Timer CV5__DLY will, upon completion, output a signal to close chamber vent valve CV5. Once door D12 is open, if sensor SEN54 is TRUE, sensor SEN57 output FALSE, and door sensor DRCL11S outputs TRUE, motor assembly M20 will be enabled to proceed at its fast speed setpoint. Simultaneously, if sensor SEN54 or SEN55 output TRUE, and sensor SEN57 outputs FALSE, motor M21 will be enabled to proceed at its fast setpoint. The substrate present in exit lock 30 will thereafter proceed to exit platform 214. At point 3260 in the software logic flow, the software branches in two directions, enabling the substrate to proceed to robot unloading station 45, if the logical condition -- SEN56 OR SEN57 -- is TRUE thereby enabling motor assembly M21 to proceed at its fast setpoint, or looping to prepare to receive an additional substrate in exit lock 30. To prepare to receive an additional substrate, chamber vent CV5 must be closed. Subsequently, sensor SEN54 must output FALSE and door close sensor DRCLllS output TRUE in order for a signal to be sent to close door D12. If the logical condition -- MP3IV0P, CV , BL3, PIR17, SEN54, AND DRCLllS -- is TRUE, a signal will be sent to open roughing valve RV5 to pump down chamber 30 to prepare for receiving an additional pallet therein. Opening roughing valve RV5 will cause roughing valve sensor RVS10 to output TRUE, and pirani gauge PIR17 will output TRUE when chamber 30 is below crossover. Apparatus 10 is then in a state which exists at software logic point 3252 to prepare to receive an additional substrate in exit lock 30. As should be understood by those skilled in the art, the particular cross-over pumping levels described above with respect to the software of the present invention may be varied as desired to achieve the requisite atmospheric conditions in apparatus 10 for the particular sputtering application desired. In the preferred embodiment of the present invention, the pirani gauge pressure setpoints outputting digital signals to programmable logic controller 2902 are shown in Table 2 : Gauge PIR1 PIR2 PIR3 PIR4 PIR5 PIR6 PIR7 PIR8 PIR9 PIR10 PIR11 PIR12 PIR13 PIR14 PIR15 PIR16 PIR17 PIR18 PIR19 PIR20 It should be further understood by those skilled in the art that a multitude of control schemes and sensor I/O arrangements may be utilized within the scope of the present invention to provide an automated control sequence over a substrate or substrates moving through a sputtering apparatus in accordance with the present invention. The above-described automated run mode 3200 provides for a multitude of pallets, optimally seven pallets, moving through apparatus 10 as discussed in the present specification. It should be understood that all such modifications are contemplated as being within the scope of the invention described herein. L. Process In General Examples 1 and 2 illustrate process parameters for sputtering apparatus 10 to produce 950 Oe and 1200 Oe, respectively, hard drive disks. Example 1 As illustrated in Figure 2, once engaged by substrate carrier 1450, pallet 800 loaded with disk substrates 510 proceeds through door Dl into load lock chamber 12. After pallet 800 enters load lock chamber 12, door Dl closes. Load lock chamber 12 is pumped down to 50 microns (50 mTorr) in 20 seconds by mechanical roughing pump MPl. Door D2 opens, allowing pallet 800 to proceed at 6 ft/min into dwell heating chamber 14. Dwell heating chamber 14 has already been evacuated by cryo pump Cl to 10 "5 Torr (0.01 microns). As pallet 800 proceeds through the chamber, it triggers proximity position sensors which in turn initiate heaters. Heating lamp warmup time is negligible since, during sputtering operations, the lamp filaments are kept warm by a low power level. Pallet 800 and disk substrates 510 soak in dwell heating chamber 14 for 30 seconds with the temperature about 220'C. During this soak period, the heating power applied is 3.1 kW per bank. Argon enters through gas manifolds to backfill dwell heating chamber 14 and equalize the internal pressure before door D3 opens, allowing pallet 800 to proceed. This backfill also maintains pressure equilibrium throughout the apparatus, essential to stabilizing sputtering processes. Door D3 opens to passby heating chamber 16, triggering the initiation of passby heaters. Pallet 800 enters passby heating chamber 16 and after clearing sensor SEN10, triggers the closure of door D3. This chamber also has been evacuated by cryo pump C2 to about 10 "5 Torr (0.01 microns). Passby heating banks 1818A- 1818F operate using 7.6 kW per bank. Lamps 1514 on the leading edge of the pallet reduce power as pallet 800 exits into dwell chamber 18 at 6 ft/min. Pallet 800 proceeds through dwell chamber 18 which has already been evacuated by cryo pump C3 to 10 "5 Torr. The pallet proceeds at 6 ft/min past heat reflective panels 2120. Pallet 800 enters chromium sputtering chamber 20 maintained at 9-12 microns (9-12 mTorr) of argon pressure with argon flow at 300 standard cubic centimeters per minute (seem). Pallet 800 travels at 6 ft/min as it passes sputtering targets 2226-2229. The sputtering power is 7.5 kW per cathode, with a 1,000 A thick chromium film deposited. Transport speed through dwell chamber 22A, buffer chamber 24A and dwell chamber 22B is 12 ft/min through open doors D5 and D6. These three chambers are pumped by cryo pumps C4, C5, and C6. Pallet 800 enters magnetic sputtering chamber 26 maintained at 9-12 microns [9-12 mTorr) of argon by cryo pumps C6 and C7 with argon flow at approximately 400 seem. The transport speed through sputtering chamber 26 is 6 ft/min. The sputtering power is 7.5 kW per cathode, depositing a 800 A thick CoCrTa film. Transport speed through dwell chambers 22C and 22D and buffer chamber 24B is 6 ft/min. Dwell chambers 22C, 22D and buffer chamber 24B are pumped by cryo pumps C7, C8 and C9. Pallet 800 enters carbon sputtering chamber 28 maintained at 9-10 microns (9-12 mTorr) by cryo pumps C9 and CIO with argon and up to 15% hydrocarbon gas like ethylene or acetylene flowing at 100 seem. The transport speed is 2.8 ft/min as the pallet passes the sputtering targets in carbon sputtering chamber 28. Sputtering power is 7 kW per cathode with a film thickness of 350 A. Transport speed through dwell chamber 22E, buffer chamber 24C and exit buffer chamber 29 is 6 ft/min with doors D9 and D10 opening and closing sequentially to allow pallet 800 to proceed. Dwell chamber 22E is pumped by cryo pumps CIO and Cll, buffer chamber 24C and exit buffer chamber 29 are pumped by cryo pump C12. Argon is backfilled into exit buffer chamber 29 by cryo pump C12 to equalize the pressure differential existing with respect to exit lock chamber 30. Pallet 800 next proceeds through exit lock chamber 30 which is vented to the atmosphere by chamber vent valve CV5 in 10 seconds. Pallet 800 then proceeds to robotic unloading station 45. To produce a 1,200 Oe magnetic film, the soak time in dwell heating chamber 14 may be increased to about 50 seconds to allow the substrate temperature to increase to approximately 250"C and/or the pallet transport speed through chromium sputtering chamber 20 may be reduced in order to allow a thicker deposition of a chromium underlayer. Adjustment of soak time and/or substrate temperature parameters depends on the life cycle of the pallet -- a pallet which has proceeded through numerous sputtering runs will have a thicker film deposition which can absorb more water and consequently would have more water to outgas before film deposition. The many features and advantages of the apparatus and process of the present invention will be apparent to those skilled in the art from the description of the preferred embodiments and the drawings . Thus, a high throughput process and apparatus which accomplishes the objectives of the invention and provides the above advantages by providing a comprehensive in-line sputtering system utilizing matched component elements to process multiple large single sheet or pallet transported discrete substrates in a continuous, variable speed, sputtering process has been described. Such an apparatus and method can process up to 3,000 95mm disk substrates, and 5,300 65mm disk substrates, per hour. Such high volume production offers both high volume production and, consequently, cost savings per disk on the order of $4.00 per disk over prior art sputtering apparatus and processes. As noted throughout this specification, such an apparatus and process is achieved through a novel combination of process and structural elements involved in disk preparation, provision of a sputtering environment, transportation of substrates through the sputtering environment at rapid speeds and in a contaminant free manner, heating the substrates to optimal thermal levels for sputtering, and sputtering the substrates through a series of substantially isolated, non-crosscontaminating sputtering steps. SECTION M COPYRIGHT 1989, 1990, 1991 CONNER PERIPHERALS, INC. ■ Aλ O COPYRIGHT 1989, 1990, 19 Number of Program Files CONN" PERIPHER&LS, ,INC• Name File Sub-Program Description Size: Elems By 0 [SYSTEM DATA STORAGE HEADER] 32 MAIH_PRGRM 2 THE MAIN PROGRAM CRYO_REGEN 3 CRYO REGENERATION RUNGS RETRN_CNVR 4 THE RETURN CONVEYOR FAULTS 5 THE FAULT RUNGS TECH RUNGS 6 THE TECHNICIAN RUNGS J. * Λ COPYRIGHT 1989, 1990, 1991 CONNER PERIPHERALS, INC. Rung #000 I FIRST SCAN FIRST SCAN |AFTER POWER AFTER POWER I LOSS LOSS |1ST PASS PVR_ON_DLY I " s:1 ~ B3 -I (L) 15 444 B3/444 H h- File #2 MΛIK_P«GR». 155 H/ - File #2 KΛIH_PRGRM 115,117,118,119,120,121,122,123,124,125,126,127,128,129,130,131,132,133,134,135,136,137,13 -(L)- - File #2 MAIH_PRGRH 0 _(U)- - File #2 KAIH PRGRH 1 Rung #001 FIRST SCAN | POWER ON OELAY AFTER POWER j DEFEAT LOSS |P R_ON DLYJJ T PWR_ON_DLY I " β3 ~ S3 -(U)- | 268 B3/4U - -! (- • File #2 HAIH_PβGRM 155 H/h- File #2 KAIH_P«GRH 115,117,118,119,120,121,122, 123,124,125,126,127,128,129,130,131,132,133,134,135,136,137,13 - ' *..- • ile #2 KAIH_P*GRM 0 File #2 HAIK_PRGRM 1 Rung #002 BLOCK TRANSFER BLOCK TRANSFER WRITE READ BT_W ITE BT_READ 1.11:1 N10:0 1/| I/I 15 15 ra C3] N11:1/15 -\/\~ - File #2 MAIH_PRGRM 2,3 N7:21/3 - • File #2 KAIH_PRGRM - 532 N7:21/4 - - File #2 MA1H_PRGRM - 533 N7:21/5 - - File #2 NΛIH_PRGRH - 534 N7:21/6 - - File *2 MAIH_PRGRM - 535 N7:21/7 - - File #2 HAIK_PRGRM - 536 N7:21/8 - >- - File #2 KAIH fHSRH - 537 N7:21/9 - - File #2 MAIH_PRGRM - 538 N7:21/10 -< >- - File #2 MAIH_PRGRM 539 H7:21/11 -( )- - File #2 MAIH_PRGRM 540 N7:21/12 -( >- - File #2 MAIH_PRGRM 541 N7:21/13 -< >- - File #2 KA1H_PRGRM 542 N7:21/14 -( )- - File #2 MAIH_PRGRM 543 1(7:21/15 -< >- - File #2 MAIH PRGRH 544 Λλ L Rung #003 BLOCK TRANSFER BLOCK TRANSFER WRITE READ 8T_VRITE BT_REAO N11:1 N10:0 1 /| 1 /| 15 15 12] ~~ . ~ N10:0/15 - File *2 MAIH_PRGRH - 2 N7:03 - File #2 HAIH_PRGRM - 551 N7:0/4 - File #2 MAIH_PRGSM - 552 N7:0/5 - File #2 KAIH_PRGRH - 553 N7:0/6 - File #2 HAIH_PRGRM - 554 N7:0/7 - File #2 HAIH_PRGRM - 555 N7:0/8 - File « HΛIH_PRGRM - 556 N7:0/9 - File #2 HAIH_PRGRM - 557 N7:0/10 File #2 HAIH_PRGRH 558 N7:0/11 File #2 HAIH_PRGRM ■ 559 N7:0/12 File #2 MAIH_PRGRM 560 N7:0/13 File #2 MAIH_PRGRM 561 N7:0/14 File #2 MAIH_PRGRH 562 N7:0/15 File #2 MAIH_PRGRM 563 Rung OSCILLATOR OSCILLATOR TIMER 1 OSC OSC_TMR1 B3 i—TON 1 -|TIMER ON DELAY |-<EN 142 JTIMER: T4:184| C6] |BASE (SEC): 0.01H DK jPRESET: 50j |ACCUM: 0| T4:184.DN - ~ [— - File #2 HAIH_PRGRH Rung #005 OSCILLATOR OSCILLATOR TIMER 2 OSC OSC_TMR2 B3 i—TON -JTIMER ON DELAY |-< EN 142 |TIMER: T4:185| [6] IBASE (SEC): 0.01f-(° M > i RESET: 50j |ACCUM: 48l T4:185.DN - -\ I File #2 MAIH_PRGRM - 7 Rung #006 OSCILLATOR OSC_TMR1 OSC T4:184 B3 | 1 i CL) DN 142 [4] B3/142 - -j )- - File #2 MAIH_PRGRH - 5,624 Ml OSCILLATOR OSC B3 (U) 142 - 5,624 H/h - File #2 KAIH_PRGRM - 4 -CD- - File #2 KAIH_PRGRM - 6 -<L>- - File *2 KAIH_PRGRM - 10 -(U)- - File #2 KAIH PRGRK - 11 M-Λ Rung #012 MOTOR DRIVE PULSER TIMER B |H0PTA MOPTB T4:298 , — TON /h -|TIMER ON DELAY H E | DN JTIHER: T4:299| |I13] |BASE ( SEC): 0.01HO |PRESET: 5| |ACCU«: 6| T4:299.DN - -) (- - File #2 MAIH PRGRM - 13,14,184,189,194 Rung #013 I MOTOR DRIVE IMOTOR START PULSER IPULSE TIMER A jMOPTB MDPTA I T4:299 I — TON -(TIMER ON DELAY (-(E DN |TIHER: T4:298 Itia (BASE (SEC): 0.01 (-(D j PRESET: 5| j ACCUH: 31 I I I T4:298.DN - - l - File #2 MAIH PRGRM - 12 Rung #014 I MOTOR START MOTOR DRIV I PULSE PULSER I MOPTB MDP I T4:299 B3 ( ) DN 299 It12] 217,230,248,252,257,262,280,284,289,294,305,309,314,319,330,354 14 ENTER PRODUCTIO SYSTEM LLIH 0:007 ( ) I 11 00 02 15 | d55] j MOTOR 3 | SLOW |H3S 0:013 02 d87] Rung #016 SUSPEND SUSPEND OPERATION OPERATIO ENABLE LATCH SUSOPE SUSOPL N7:18 B3 (L) 101 D] ΛλS B3/101 - - l - - File #4 R£TRN_CNVR - ,60 -ex.- - File #2 KAIH_PRGRM - 16 -<U>- - File #2 KAIH PRGRM - 17 Rung #017 SUSPEND I PREPARE FOR OPERATION j AUTO RUN LATCH j >AUTO SUSOPL N7:37 B3 (U> 1 101 |d57] B3/101 1/|- - File #4 RETRN_CNVR - 59, 60 I I -(L>- - File #2 MAIH_PRGRM - 16 (COMPUTER j SIGNAL FOR j AUTO MODE |C0KPAUT0 j N7:16 1 1 I — 11 I OΛ Rung #018 IPALLET jDETECTED PALLET j IGHT SIDE UAITING Al jEXIT END HINT EXIT jSEMS7 PWAME I 1:054 0:057 — < ■ — ! 17 I* Rung #019 (REGENERATE HI VAC CLOSE (ALL CRYO'S STAGGER |TS20 HVCL_STAG j N7:16 B3 I 1 I (L) 12 280 I £33 83/280 H h- File #2 KAIH_PRGRM - 20 -<L>- - File #2 MAIH_PRGRM - 19 -(U)- - File #2 KAIH PRGRM - 21 Rung #020 IHIVAC CLOSE HIVAC STAGGER ISTAGGER TIMER |HVCL STAG HI_STAG I ~B i—TON 1 I 1 r— -(TIMER ON DELAY H EM 280 |TIMER: T4:197| M9] |BASE (SEC): 1.0(-(DH) I PRESET: 351 lACOJN: 01 T4:197.ACC - GEO - File #3 CRYO_REGEN - 34,38,42,46,52,53,57 T4:197.DN - -| \- - File #2 KAIH_PRGRM - 21 File #3 CRYO REGEN - 63 Λλ λ" Rung #023 PIR1NI STSTEM PUMPDOWN START GUΛGE NO NO CRYOS BEING VENT VENT AREA VENT AREA VENT AREA VENT AREA VENT AREA SYSTEM PUMPOOUN FAULT REGENERATED ENABLE 1 ENABLE 2 ENABLE 3 ENABLE 4 ENABLE 5 ENABLE ENABLE TSOO PGNF NO_CYRGN SYSVNTE VENT1E VENT2E VENT3E VENT4E VENT5E POSE N7: 15 83 B3 N7:37 N7:37 N7:37 N7:37 N7:37 N7:37 B3 1/|- 1/|— |/f— 1/ | — \— |/h- -I (L) 8 465 233 5 6 7 8 9 10 j 303 ai 15:205] [3:33] 1368] [405] [411 ] [418] [425] [430] I (MANUAL B3/303 - -j μ - File #2 KAIH_PRGRK - 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 46, 47, 48, 49, 68, jSYSTEM 73, 78, 104, 140, 183, 200, 216, 324, 326, 327, 353, 415 (PUMPDOWN -|. μ - File #2 KAIH_PRGRM - 369, 405, 411, 418, 425, 430 jENABLE -(U)- - File #2 MAIH_PRGRK - 22 (HSPE N7:36/8 - -{U>- - File #2 KAIH_P«GRM - 22 | N7:36 F:N7:21IX21 - BTW - File #2 MAIH PRGRM - 2 I L ) 8 Rung #024 LLOCK DWELL 2 DWELL 4 DWELL 5 EXLOCK CHAMBER CHAMBER CHAMBER CHAMBER CHAMBER PUMPOOUN ROUGH ROUGH ROUGH ROUGH ROUGH RV'S ALL SYSTEM VALVE VALVE RV2 VALVE VALVE VALVE CLOSED FO ENABLE CLOSED CLOSED CLOSEO CLOSED CLOSED CROSSOVER POSE RVS1 RVS3 RVS5 RVS7 RVS9 RVS_CLOSE B3 1:002 1:022 1:036 1:052 1:052 B3 I — I I— 1 - —I I i I 1 h- ( ) 303 15 15 15 14 16 176 [233 B3/17 - -( μ File #2 KAIH_ PRGRM 105,106,107,108,109 -( )- File #2 MAIH PRGRM 24 Rung #025 (PUMPDOWN PUMPDOWN jSYSTEM SYSTEM jENABLE TIMER jPOSE PDSTHR I S3 • i—TON -)TIMER ON DELAY μ<E 303 |TIMER: T4:190| |C23] jBASE (SEC): 1.0μ(D |PRESET: 600| JACCUH: oj I ι T4:190.DN - -| μ - File #2 MAIH_PRGRM - 609 -Λλ λλS A IP Rung #029 ENABLE PUMPDOWN CRYO SYSTEM COMPRESSOR ENABLE 4 POSE CY4 B3 0:030 T - 1 (L) I 05 IMANUAL jCONTROL ICRYO MANUAL CRYO ICOMPRESSOR COMPRESSOR 4 14 ENABLE RUN |M-CY4-1 MCYC4RUN N7:13 N7:34 <L) 8 8 [3] IMANUAL CRYO (COMPRESSOR 4 ISTOP jHCYC4STOP j N7:29 I (U) [3] ll All I -Λl5 Rung #033 ENABLE PUMPDOWN CRYO SYSTEM COMPRESSOR ENABLE 8 POSE CY8 B3 0:060 (L) 303 05 [23] MANUAL 0:060/05 - -\ μ File #2 MAIH_PRGRM - 449 CONTROL File #3 CRYO_REGEN - 260 CRYO MANUAL CRYO File #6 TECH_RUNGS - 19 COMPRESSOR COMPRESSOR 8 _(U)- - File #3 CRYO_REGEN - 87 8 ENABLE RUN COOL DOWN N7:34/12 - -(U)- - File #3 CRYO_REGEN - 87 M-CY8-1 MCYC8RUN 8 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRK - 2 N7:13 N7:34 CDS N7:29/12 - -(L)- - File #3 CRYO_REGEN - 87 1 ! (L) 63 F:N7:21IX21 - BTU - File #2 KAIH PRGRM - 2 12 12 1 h- [3] 658 0:209] IMANUAL CRYO (COMPRESSOR 8 JSTOP COMPRESSOR |MCYC8STOP 8 REGEN - I N7:29 PUMP AREA ERATION 1 (U) 4 ENABLE PROGRAM 12 PUMP4E CYRGN8 N7:38 B3 1 I l/l o 328 [447] [3:63] MANUAL CONTROL CRYO COMPRESSOR 8 ENABLE M-CY8-1 1.7:13 l_ 12 r_; i6 N7:37 5 D683 CHROME CHAMBER =<250 MICRONS PIR6 1 :024 ~ ι\- 07 b U Rung #037 MANUAL CONTROL OPEN RGA RGA VALVE ISOLATION 4 CLOSE VALVE 4 M-RGAV4-0 RGAV4 N7:9 0:060 (U) 13 β] I 0:060/13 - -| μ - File #6 TECH RUNGS - 7 I -i - ~ File #2 MAIH_PRGRM - 374 |MANUAL RGA N7:28/8 - -(D- - File #2 MAIH_PRGRM - 374 | ALVE 4 SYSTEM _F:N7:21IX21 - BTU - File #2 KAIH_PRGRM - 2 |OPEN VENT N7:30/4 - -(U)- - File #2 MAIH_PRGRM - 374 |HRGAV40P ENABLE F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 | N7:28 SYSVNTE I (U) N7:37 ! 8 068] IMANUAL RGA | ALVE 4 CLOSE IMRGAV4CL N7:30 VENT AREA (L) 4 ENABLE 4 VENT4E N7:37 9 [425] CARBON CHAMBER =<250 MICRONS PIR16 1 :054 /_- 07 Mo ■ Λ Λ BASE : Rung #040 MANUAL CONTROL OPEN GAS FLOW GAS FLOW VALVE 3 ISOLATION CLOSE VALVE 3 M-GF3-0 GF3 N7:9 0:030 (U)— 07 β ] 0:030/07 - -I μ - File #2 MAIH_PRGRM - 156 -(D- - File #2 MAIH_PRGRM - 381 | MANUAL GAS N7:31/1 - -<L>- - File #2 HAIH_PRGRM - 381 I FLOW I V 3 _F:N7:21IX21 - BTU - File #2 MAIH_PRGRM - 2 | OPEN AUTO OFF N7:30/9 - -(U)- - File #2 MAIH PRGRM - 381 |MGF IV30P PULSE F:N7:211X21 - BTU - File #2 MAIH PRGRM - 2 | N7:31 AUOFPULSE T4:283 j [155] j MANUAL GAS | FLOW I V 3 | CLOSE I MGFIV3CL ; N7:_3 9 m λl Rung #041 MANUAL CONTROL GAS FLOW VALVE 4 CLOSE H-GH4-0 N7:9 10 I Bi 0:030/10 - -<l>- - File #2 KAIH_PRGRH - 382 N7:31/2 - -tX.- - File #2 KAIH_PRGRM - 382 _F:N7:21IX21 - BTU - File #2 KAIH_PRGRH - 2 N7:30/10 - -(U)- File #2 KAIH_PRGRK - 382 |AUT0 OFF F:H7:21IX21 - BTU File #2 MAIH PRGRM - 2 IPULSE IAUOFPULSE I T4:283 H TT [155] 33 BASE : Rung #042 MANUAL CONTROL GAS FLOW GAS FLOU VALVE 5 ISOLATION CLOSE VALVE 5 H-GF5-0 GF5 N7:9 0:044 T 1 I — (U) 11 07 β] 0:044/07 - -| μ - File #2 MAIH_PRGRM - 156 -<L>- - File #2 MAIH_PRGRM - 383 | MANUAL GAS H7:31/3 - -<L>- - File #2 MAIH_PRGRM - 383 | LOU I V 5 _F:N7:21IX21 - BTU - File #2 KAIH_PRGRM - 2 | OPEN AUTO OFF N7:30/11 - -(U)- - File #2 KAIH_PRGRM - 383 |MGFIV50P PULSE F:N7:2UX21 - BTU - File #2 MAIH PRGRM - 2 N7:31 AUOFPULSE — (U) T4:283 3 l_ TT [155] I MANUAL GAS j FLOU I V 5 j CLOSE IKGFIV5CL N7:30 • U) 11 Λ3H- Λ1S 36 BASE : Rung #045 MANUAL CONTROL GAS FLOU GAS FLOU VALVE 8 ISOLATION CLOSE VALVE 8 M-GF8-0 GF8 N7:9 0:060 (U> 14 I ιo 0:060/10 - -(L>- - File #2 HAIH_PRGRM - 386 N7:31/6 - -(D- - File #2 MAIH_PRGRM - 386 IMANUAL GAS _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 |FLOU I V 8 N7:30/14 - -(U)- - File #2 KAIH_PRGRM - 386 |OPEN F:N7:2UX21 - BTU - File #2 MAIH PRGRM - 2 |HGFIV80P | N7:31 I (U) I 6 [1553 IMANUAL GAS •FLOU I V 8 ICLOSE JHGFIVSCL i N7:30 ! (L) 14 b File #5 FAULTS - 49 File #6 TECH_RUNGS - 2 -( )- - File #2 MA1H_PRGRM - 46 N7:32/11 - -(L)- - File #2 MAIH_PRGRM - 46 -W>- ~ File #2 MAIH_PRGRM - 4U _F:N7:21IX21 - BTU - File #2 MAIH_PRGRM 1.7:31/15 - -(L)- - File #2 NAIH_PRGRM - 414 -(U)- - File #2 KAIH~PRGRH - 46 F:N7:21IX21 - BTW - File #2 KAIH PRGRM • 2 ll i O 0:031/03 - - μ - File #2 MAIH_PRGRM - 47 File #5 FAULTS - 51 ile #6 TECH_RUNGS - 2 -( File #2 MAIH_PRGRM - 47 N7:32/12 - -(L) File #2 KAIH_PRGRM - 47 -(U) File #2 MAIH_PRGRM - 420 _F:N7:21IX21 - BTU - File #2 KAIH_PRGRH - 2 N7:32/0 - -(D- - File #2 KAIH_PRGRH - 420 -(U)- - File #2 KAIH PRGRM - 47 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 Λ3S ile #5 FAULTS - 53 ile #6 TECH_RUNGS - 3 -( r- ile #2 HAIH_PRGRM -_ 48 N7:32/13 - -<L>- ile #2 MAIH_PRGRM - 48 -(U)- ile #2 MAIH_PRGRM - 422 _F:N7:21IX21 - BTU - File #2 MAIH_PRGRM - 2 N7:32/1 - -(L)- - File #2 KAIH_PRGRM - 422 -(U)- - File #2 MAIH_PRGRM - 48 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 Λ ( *v Rung #049 PUMPOOUN DOCK OPEN SYSTEM DOOR 8 SOLENOID ENABLE OPEN 8 ENABLE PDSE DR0P8S DROP8 B3 1:042 0:045 — I/H I 303 03 I 03 [23] I |MANUAL |CONTROL DOOR OPEN MANUAL |OPEN DOOR SOLENOIO DOOR 8 ISYSTEM | β 8 ENABLE OPEN IVENT |M-DR P8 DROP8 H0R8OP jENABLE I N7:11 0:045 N7:32 |SYSVNTE — (L>— I N7:37 14 03 14 β] [49] 5 [368] |MANUAL |DOOR 8 |CLOSE MAGNETIC CARSON |HDR8CL CHAMBER CHAMBER | N7:32 PREPARE FOR =<250 =<250 •—(U>— AUTO RUN MICRONS MICRONS 2 >AUTO PIR11 PIR16 N7-.37 1:040 1:054 I/H I 07 07 I [157] I MAGNETIC CARBON i ICHAMBER CHAMBER |MANUAL =<250 =<250 ICONTROL MICRONS MICRONS IOPEN DOOR 1 IPIR11 PIR16 |8 1:040 1:054 |M-DROP8 I N7:11 07 07 ι_ 14 [3] 045/03 - - μ - File *2 MAIH_PRGRM - 49 File #5 FAULTS - 55 File #6 TECH_RUNGS - 3 -( )- - File #2 MAIH_PRGRM - 49 N7:32/14 - -CD- - File #2 MAIH_PRGRM - 49 -<U>- - File #2 KAIH_PRGRM - 427 _F:H7:21IX21 - BTU - File #2 KAIH PRGRM - 2 N7:32/2 - -(D- - File m KAIH_PRGRM - 427 -(U)- - File #2 HAIH_PRGRM - 49 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 J ls 2 VAL Rung #052 DWELL 3 CHAMBER PRESSUR AT CHAMBER VENT 3 ATMOSPHERE CLOSE DELAY PS4 CV3_0LY 1:022 I TON -|TIMER ON DELAY μ(E 04 (TIMER: T4:319| IBASE (SEC): 1.0μ(D T4:319.DN - -I μ - File #2 KAIH_PRGRM - 53 [PRESET: 2| lACCUM: 0| UL, Jiim Rung #054 I DWELL 5 j CHAMBER I PRESSUR AT CHAMBER VENT 4 jATMOSPHERE CLOSE DELAY |PS5 CV4_DLY I 1:036 r— O 1 —|TIMER ON DELAY μ<E 04 (TIMER: T4:320| |BASE (SEC): l.oμcD T4:320.DN 1 μ - File #2 MAIH_PRGRM - 55 IPRESET: 2| ACCUH: 0| Ji-o - - H/f- File #5 FAULTS - 165 Rung #058 OPEN CARBON DUELL 5 MECHANICAL OPEN ROUGHING CHAMBER CHAMBER PUMP 2 DUELL VALVES =<250 BLOUER 2 VENT VALVE ISOLATION ROUGH 1->5 MICRONS ENABLED CLOSED VALVE OPEN VALVE 0P_RV1->5 PIR16 BL2 CVS7 MP2IV0P RV4 ~ B3 1:054 0:027 1:036 1:025 0:0 |/H | 309 07 01 11 13 1 i £104] [74] 1 OPEN ROUGH IPUMP AREA VALVE 2, 3, OR 14 ENABLE 4 DELAY |PUMP4E P2-4RVTMR j N7:38 T4:3 I 1 I — DN [447] [445] MANUAL ROUGH PUMP VALVE 4 OPEN HRPV40P N7:2S | [506] 0:060/11 H File #5 FAULTS - 171 File #6 TECH_RUNGS - 0 H/r- File #5 FAULTS - 173 -( )- File #2 MAIH PRGRM - 58 Rung #059 IMECHANICAL OPEN j PUMP 1 PUMP 1 I ENABLED VENT VAL |MP1 PV1 | 0:007 0:007 | 1 | ( ) | 00 02 I [68] 0:007/02 1 μ File #6 TECH_RUNGS - 1 H/ File #2 MAIH_PRGRM - 68 -( )- File #2 KAIH PRGRM - 59 Rung #060 |MECHANICAL OPEN (PUMP 2 PUMP 2 |ENABLED VENT VAL -( >- - File #2 MAIH PRGRM - 60 Rung #061 IMECHANICAL OPEN |PUMP 3 PUMP 3 IENABLED VENT VAL |MP3 PV3 I 0:057 0:057 1 ( ) 00 02 [78] 1 0:057/02 - -\ μ - File #6 TECH_RUNGS 1 -|/μ - File #2 KAIH_PRGRM 78 -( )- - File #2 KAIH_PRGRH 61 Rung #062 |DOOR 1 DOOR 1 DOOR 12 DOOR 12 DOOR 1S1 |CLOSED OPEN CLOSED OPEN CLOSED JORCLIS DROP1S DRCL12S 0ROP12S DRH12CL j 1:006 1:006 1:056 1:056 B3 H H — l/h ( ) I 00 01 06 07 304 B /304 - -j μ File #2 KAIH_PRGRM - 63 -{ )- File #2 MAIH PRGRM - 62 Rung #063 RGA 2 RGA 2 RGA 3 RGA 3 RGA 4 RGA 4 ALL RGA ISOLATION ISOLATION ISOLATION ISOLATION ISOLATION ISOLATION ISOLATIO I GA VALVE RGA VALVE VALVE VALVE VALVE VALVE VALVE VALVE VALVES | SENSOR CLOSED SENSOR OPEN CLOSED OPEN CLOSED OPEN CLOSED OPEN CLOSED |RGAS1_ RGAS2_ RGAS3 RGAS4 RGAS5 RG S6 RGAS7 RGAS8 RGACL I 1:005 1:005 1:025 1:025 1:041 !:041 1:055 1:055 B3 "I 1/| 1 I— — i/μ- /I ' t— — i/μ- ( ) 16 17 16 17 16 17 16 17 305 B3/305 -; h - • File #2 MAIH_PRGRM - 68,391 -( )- - • File #2 KAIH PRGRM - 63 Rung #064 |00OR 3 DOOR 3 DOOR 4 DOOR 4 DOOR 5 DOOR 5 DOOR 6 DOOR 6 DOORS 2-> 1CLOSED OPEN CLOSED OPEN CLOSED OPEN CLOSED OPEN OPEN |DRCL3S DROP3S DRCL4S DROP4S DRCL5S DR0P5S DRCL6S DROP6S DR2->60P I 1:006 1:006 1:006 1:006 1:026 1:026 1:026 1:026 B3 B3/308 - - μ - File #2 KAIH_PRGRM - -e. .- - File #2 MAIH PRGRM - 67 Rung #068 ALL RGA pUKPOom. ISOLATION VENT ROUGH OPEN MECHANICAL SYSTEM DOOR 1&12 VALVES DOORS 2->6 DOORS 7->11 VALVES VALVES PUMP 1 PUMP 1 ENABLE CLOSED CLOSED OPEN OPEN CLOSED CLOSED VENT VALVE ENABLED POSE DR1&12CL RGACL DR2->60P DR7->110P WCL RVCL PV1 MP1 B3 B3 B3 83 B3 B3 B3 0:007 0:007 . 1 r 1 I — 1 /| (L) 303 304 305 306 307 308 310 02 00 [23] [62] [63] [64] [65] [67] [66] [59] MANUAL CONTROL MP1 DELAY PUMP 1 MECH.PUMP 1 TIMER STAGE 1 ON 3 SECONDS P1ST1 M-MP1-1 HP1THR B3 N7: 1 I —TON ~l 1/| -(TIMER ON DELAY μ<EN>- 422 9 JTIMER: T4:163| [436] [3] |BASE (SEC): 1.0μ(DN) |PRESET: 3| ACCUM: Dl PREPARE FOR AUTO RUN MANUAL >AUT0 CONTROL HECHANICAL N7:37 MECH.PUMP PUMP 1 MANUAL HECH. ON ENABLED PUMP 1 ON M-MP1-1 MP1 MMP10N [157] N7:l 0:007 N7:22 L. ( L ) 00 9 [3] [68] PUMP-VENT CYCLE LOAD LOCK (MANUAL HECH PD-VNT-LL IPUMP 1 OFF N7:24 |MMP10FF N7:24 14 (U) [676] 7 PUMPDOWN LOADLOCK POLL N7:24 h 15 [684] MANUAL CONTROL KECH.PUHP 1 ON K-MP1-1 N7:1 β] :007/00 - -| μ File #2 MAIH_PRGRM - 59,69,158 File #5 FAULTS - 182 File #6 TECH_RUNGS - 0 -(L)- File #2 KAIH PRGRM - 68 JSA -(U>- - File #2 NAlH_PRGRh 89 T4:163.DN - -| \- - File #2 MAIH_PRGRK ■ 69,73,78 N7:22/9 - -e.L.- - File #2 MAIH_PRGRM - 68 -(U)- - File #2 MAIH_PRGRM - 89 _F:N7:21IX21 - BTU - File #2 MAIH_PRGRK - 2 N7:24/7 - -(L>- - File #2 MAIH_PRG«M - 89 -(U)- - File #2 MAIH_PRGRM - 68 T4:5.TT 1 μ - File #2 MAIH_PRGRM - 72 A i MECH. ~Λ t| 0:027/00 - -| - File #2 HAIH_PRGRN 60,74 File *5 FAULTS - 184 File #6 TECH_RUNGS - 0,15 -eι.- - File #2 MAIH~PRGRK - 73 _ U>- - File #2 MAIH_PRGRM - 96 T4:165.DN H h - File #2 KAIH_PRGRM - 74,78 N7:22/10 -(D- - File #2 MA!H_PRGRK - 73 -<U)- - File #2 MAIH_PRGRK - 96 _F:N7:21 IX21 - BTU - File #2 KAIH_PRGRK - 2 N7:24/8 (D- - File #2 KAIH_PRGRK - 96 -(U)- - File #2 MAIH_PRGRM - 73 _F:N7:21IX21 - BTU - File #2 KAIH_PRGRM - 2 Rung #074 KECHANICAL BLOUER 2 PUMP 2 BLOUER 2 BLOWER 2 DELAY ENABLED DISABLE ENABLED MP2TMR MP2 BL2D BL2 T4: 165 0:027 B3 0:027 1 i 1 / ( -, — α>— | DN 00 123 I oι { [73] [73] [93] I |MANUAL 0:027/01 - -1 μ - File #2 MAIH_PRGRM - 56, 57, 58, 74 75, 78, |CONTROL |MANUAL 445 {BLOWER 2 BLOUER 2 MANUAL BLOUER |CONTROL File #3 CRYO_REGEN - 10, 11, 15, 16 117, 118, {ON ENABLED 2 ON {BLOWER 2 119, 120, 121, 122, 123, 124, 125, 126, 127, JM-BL2-1 BL2 MBL20N |ON 128, 129, 130, 131, 132, 133, 134, 135, 136, | N7:1 0:027 N7:22 |M-BL2-1 137, 138, 139, 140, 141, 164, 165, 166, 167, h -, (L) I N7:1 168, 169, 170, 171, 172, 173, 174, 175, 177, 13 01 13 179, 181, 183, 185, 187 β] [74] 13 File #5 FAULTS - 184 β] File #6 TECH_RUNGS - 0, 15 — / - - File #2 MAIH_PRGRH - 94, 96 | MANUAL BLOUER -(U)- - File #2 MAIH_PRGRM - 93 |2 OFF N7:22/13 - -(U)- - File #2 MAIH_PRGRM - 93 |HBL20FF _F:N7:21IS21 - BTU - File #2 MAIH_PRGRH - 2 N7:24 N7:24/11 - -(D- - File #2 MAIH_PRGRM - 93 (U) F:N7:21tX21 - BTU - File #2 MAIH PRGRM - 2 11 Rung #075 I HP2 ISOL (BLOUER 2 VALVE (ENABLED OPEN DELAY (SL2 HP2I OPDY [ 0:027 r—TON , HTIHER ON DELAY μ(E 01 |TIHER: T4:96) [74] |BASE (SEC): 1.0μ<D IPRESET: 10j ACCUH: 0( T4:96.TT - -! I File #2 MAIH PRGRM - 76 Rung #076 BLOWER 2 DELAY TO START MP2IV MP2IVOPDY BL2DLY T4:96 , — TOF HTIHER OFF DELAY h(E TT {TIMER: T4:10| [751 | BASE (SEC) : l .θ μ(D I PRESET: 481 ACCUH: 48 LSS -(L>- - File #2 KAIH_PRGRM - 77 -(U)- - File #2 KAIH_PRGRK - 91 A G MECH. File #6 TECH_RUNGS - 0 -(D- - File *2 MAIH_PRGRM - 78 -(U)- - File #2 MAIH >RGRM - 103 T4:167.DN - -| μ File #2 MAIH_PRGRM - 79 N7:22/11 - -<L)- - File #2 KAIH PRGRM - 78 •Aft -en.- - File #2 HAIH_PRGRH 103 _F:N7:21IX21 - BTU - File #2 KAIH_PRGRH - 2 N7:2«/9 - -(L>- - File 02 MAIH_PRGRM - 103 -(U>- - File #2 MAIH_PRGRK - 78 F:N7:21IX21 - BTU - File #2 KAIH_PRGRK - 2 Rung #079 MECHANICAL BLOUER 3 PUKP 3 BLOUER 3 BLOWER 3 ENABLE DELAY ENABLED DISABLE ENABLED BL30Y MP3 BL3D BL3 T4:167 0:057 B3 0:057 1 I — 1 H 1/| (L) DN 00 124 01 | [78] [78] [100] MANUAL 0:057/01 -) μ - File #2 MAIH_PRGRM - 79 80, 158, 340, 456 CONTROL |MANUAL File #5 FAULTS - 186 BLOWER 3 BLOWER 3 MANUAL BLOUER jCONTROL File #6 TECH_RUNGS - 0 ON ENABLED 3 ON jBLOUER 3 -|/μ - File #2 KAIH_PRGRM - 101, 103 M-BL3- 1 BL3 MB30N |ON -(U>- - File #2 MAIH PRGRM - 100 N7: 1 0:057 N7:22 |K-BL3- 1 N7:22/14 - -(U)- - File #2 MAIH PRGRM 100 U) I N7: 1 _F:N7:21lX2'ι BTU - File #2 MAIH PRGRM - 2 14 01 14 N7:24/12 - - (D- File #2 MAIH PRGRM - 100 β] [79] 14 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 [3] MANUAL BLOUER 3 OFF MBL30FF N7:24 (U) 12 Rung 080 HP3 ISOL. BLOUER 3 VALVE ENABLED OPEN DELAY BL3 MP3IVOPOY 0:057 , TON HTIMER ON DELAY μ(EN 01 {TIMER: T4:97{ [79] |BASE (SEC): 1.0μ<0H jPRESET: 101 lACCUM: 10 T4:97.TT - -j μ - File #2 MAIH_PRGRM - 81 Rung #081 BLOUER 3 DELAY TO START HP3I MP3IVOPDY BL30LY T4:97 ι—TOF 1 I— -|TIMER OFF DELAY (—(EN TT |TIMER: T4:164{ [80] JBASE (SEC): 1.0μ<DN IPRESET: 5| {ACCUH: 5I T4:164.TT - -\ μ - File #2 HAIH_PRGRH - 82 Att Rung #082 MECHANICAL PU 3 ISOLATION VALVE |BI_S0LY MP3IV I T4:164 0:060 H I (L) I TT 03 I [81] 0:060/03 - -| μ File #2 HAIH_PRGRM 97 -(D- File #2 MAIH_PRGRM 82 -<U)- File #2 MAIH PRGRM 93 Rung #083 |MANUAL {CONTROL MECHANICAL PUMP BLOUER 1 (BLOWER 1 1 ISOLATION MANUAL O {OFF VALVE PULSE 1M-BL1-0 MP1IV BL1MANOF | N7:3 0:010 B3 (L) I 1 0 03 317 | [3] [841 B3 317 - -|/ μ - File 42 MAIH_PRGRH 89 -(D- - File #2 MAIH_PRGRH 83 -(U)~ - File #2 MAIH PRGRM 88 5 Rung #084 LLOCK MANUAL CHAMBER CONTROL ROUGH MECHANICAL PUMP BLOUER 1 VALVE 1 ISOLATION OFF CLOSED VALVE M-8L1-0 RVS1 MP1IV * N7:3 1:002 0:010 (U) 10 15 03 β] 0:010/03 - -; r File #2 MAIH_PRGRM - 83 -α>- File #2 MAIH PRGRM - 77 AUTO OFF PULSE AUOFPULSE T4:283 TT [155] PUMP1EDPLSE T4:284 1 I TT [437] PDSOPLSE T4:285 TT [22] SYSTEM VENT ENABLE PULSE SYSVNTPLSE [686] [155] Rung #085 MECH. PUMP 1 I SOL. VALVE UNLATCH BL1 CLOSE SENSOR PULSE MP1IVCL UNL_SL1_PL 1:005 -(TIKR ON DELAY μ(EN 14 JTIHER: T4:289{ JBASc (SEC): 1.0μ<DN T4:289.TT - -) μ - File #2 MAIH_PRGRM - 86 I PRESET: 10 | |ACαX: C| >>>>>> >>>>>>>>>>>> AU Rung #089 BLOUER 1 MECHANICAL MANUAL OFF BLOUER 1 PUMP 1 PULSE ENABLED ENABLEO BL10FFPLSE BL1MANOFF BL1 MP1 T4:292 B3 0:007 0:007 1 I 1/1 (/( —(U) I T 317 01 00 I [87] [88] [863 {MANUAL 0:007/00 1 μ - File #2 KAIH PRGRM - 59, 68, 69, 158 I CONTROL File #5 FAULTS - 182 |MANUAL HECH. {MECHANICAL File #6 TECHJNJNGS - 0 JPUMP 1 ON {PUMP 1 -(D- - File #2 KAIH_PRGRM - 68 {MMPION {OFF N7:22/9 - -<L>- - File #2 MAIH_PRGRM - 68 H7:22 {M-MPI-O _F:N7:21IX21 - BTU - File #2 KAIH_PRGRM - 2 (U) j N7:3 N7:24/7 - -(U>- - File #2 MAIH_PRGRM - 68 9 I 1 1 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 [3] IMANUAL MECH IPUMP 1 OFF JKMPIOFF N7:24 (L) 7 Rung = 090 MANUAL CONTROL MECHANICAL PUMP BLOUER 2 BLOWER 2 2 ISOLATION MANUAL O OFF VALVE PULSE M-8L2-0 MP2I 5L2MANOF N7:3 C:030 63 r (L) 11 C3 318 β] [91] B3318 - -1/μ - File #2 MAIH_PRGRM - 96 -CD- - File #2 KAIH_PRGRM - 90 -(U)- - File #2 MAIH PRGRM - 95 ■ λ (*b β] Rung #092 MECHANICAL PUMP 2 ISOLATION VALVE CLOSE UNLATCH BL2 SENSOR PULSE MP2IVCL UNL_BL2_PL 1:025 ,—TON ^TIMER ON DELAY μ(EN 14 {TIMER: T4:290| |BASE (SEC): l.oμcDN T4:290.TT - -| μ - File #2 MAIH_PRGRM - 93 |PRESET: 10| ACCUH: 10 Rung #093 BLOUER 2 ENABLEC UNL_BL2_PL BL2 T4:290 0:027 [92] 0:027/01 - - μ - File #2 MAIH_PRGRM - 56 57, 58, 74, 75, 78, 445 File #3 CRTO_REGEN - 10 11, 15, 16, 117, 11! , 119, 120, 121, 122, 123, 124, 125, 126, 127, 128, 129 130, 131, 132, 133, 134, 135, .36, 137, 138, 139, 140, 141, 164, 165, 166 167, 168, 169, 170, 171, 17-2, 173, 17- 175, 177, 179, 181, 183, 185, 187 File #5 FAULTS - 184 File #6 TECH_RUNGS - 0, 15 -|/μ - File #2 KAIH_PRGRM - 94, 96 -CL)- - File #2 MAIH_PRGRM - 74 B3/123 - -|/| File #2 MAIH_PRGRM - 74 ¥7:24/11 - -CU)- - File #2 KAIH_PRGRM - 74 _F:N7:211X21 - BTU - File #2 KAIH_PRGRM - 2 I N7:22/13 - -CD- - File #2 MAIH_PRGRM - 74 , F:N7:211X21 - BTU - File #2 MAIH PRGRM - 2 I 11 j ANUAL BLOWER )2 ON |MBL20N | N7:22 1 (U) 13 Rung #094 I BLOUER 2 IBLOUER 2 OFF-AUTO jENABLED PULSE JBL2 BL20FFPLSE { 0:027 1 —TON I 1 /| -(TIMER ON DELAY 01 JTIMER: T4:293J I [93] {BASE (SEC): 1.0 {PRESET: 5| {ACCUM: 5j T4:293.DN j μ File #2 MAIH_PRGRH - 95 T4:293.TT - - - File #2 MAIH PRGRM - 96 Rung #095 BLOUER MANUAL PULSE |BL20FFPLSE BL2MAN T4:293 B Λ V CU) 31 ( [943 B3/318 Rung MECHANICAL PUMP 2 ENABLED BL20F HP2 T4 0:027 - (U) I TT 318 01 00 | [94] [95] [93] {MANUAL 0:027/00 - H1 μ h - File #2 MAIH_PRGRM 60, 73, 74 ICONTROL File #5 FAULTS - 184 IMANUAL HECH {MECHANICAL File #6 TECH_RUNGS - 0, 15 JPUMP 2 ON JPUMP 2 -(D- File #2 MAIH_PRGRM - 73 (MMP20N {OFF N7:22/10 - - -<<LL>>-- - File #2 MAIH_PRGRM - 73 N7:22 JM-MP2-0 _F:N7:211521 - BTU - File #2 HAIH_PRGRM - 2 CU) I N7:3 1*7:24/8 - -CU)- - File #2 MAIH_PRGRM - 73 10 Λ r F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 8 β] IMANUAL MECH |PUMP 2 OFF |MP20FF N7:24 CL) Rung # 097 |MANUAL |CONTROL MECHANICAL PUMP BLOUER |BLOUER 3 3 ISOLATION MANUAL |OFF VALVE PULSE |M-BL3-0 MP3IV BL3MANO M ζ Rung #100 BLOUER 3 ENABLED UNL_BL3_PL BL3 T4:291 0:057 (U) TT 01 [99] 0:057/01 H r- File #2 MAIH_PRGRM - 79, 80, 158, 340, 456 File #5 FAULTS - 186 |BLOUER 3 File #6 TECH_RUNGS ii {DISABLE -\/ - - File #2 MAIH_PRGRM 101, 103 |BL30 -<L>- - File #2 MAIH_PRGRM 79 B3 B3/124 - - / - - File «2 MAIH_PRGRM - 79 -( ) N7:22/14 - -(L)- - File *2 MAIH_PRGRH - 79 124 _F:N7:21IX21 - BTU - File #2 MAIH_PRGRM - 2 N7:24/12 - -(U)- - File #2 MAIH_PRGRM - 79 F:N7:21IX21 - BTU - File #2 KAIH PRGRM - 2 |MANUAL BLOUER {3 ON IMB30N N7:22 (U) 14 IMANUAL BLOUER (3 OFF IHBL30FF N7:24 CL ) 12 Rung # 101 I BLOUER 3 I BLOUER 3 OFF-AUTO {ENABLED PULSE JBL3 BL30FFPLSE { 0:057 I — 1/| - TIMER ON DELAY μ(EN I 01 |TIMER: T4:294{ I [100] {BASE (SEC): I.OμCDH {PRESET: 51 ACCUM: O! T4:294.DN - -| - File #2 HAIH_PRGRM - 102 T4:294.TT - -> \- - File #2 MAIH_PRGRM - 103 Rung #102 BLOUER 3 MANUAL OFF PULSE |BL30FFPLSE BL3MANOFF { T4:294 B3 I 1 I (U) 1 DN 319 I[101] B3/319 - -|/μ - File #2 HAIH_PRGRH 103 -<-.- - File #2 MAIH_PRGRM 97 -(U)- - File #2 MAIH PRGRM 102 M A PUHP AREA VALVE RV2 =<250 AREA 2 2 ENABLE CLOSED MICRONS AT STAND PUMP2E RVS3 PIR6 2STANDBY N7:37 1:022 1:024 B3 CL) 14 15 07 292 [438] B3/292 - -j μ F i le #2 MAI H_PRGRM 117, 119, 120, 121 , 122 , 123, 124 -aι.- Fi le #2 MAIH PRGRM 111 RV'S ALL CLOSED FOR CROSSOVER RVS_CLOSED B3 1 I — 176 [24] AUTO OFF PULSE AUOFPULSE T4:283 TT [155] έ9 Rung #107 DUELL 4 CHAMBER MAGNETIC ROUGH CHAMBER VALVE =<250 AREA 3 CLOSED MICRONS AT STANDB RVS5 PIR11 3STAN0BY N7:37 1:036 1:040 B3 (L) 15 15 07 293 [442] 83/293 H h File #2 MAIH_PRGRM - 125, 126, 127, 128, 129, 130 -(U)- File #2 MAIH PRGRM - 112 RV'S ALL CLOSED FOR CROSSOVER RVS_CLOSED B3 176 [24] AUTO OFF PULSE AUOFPULSE T4:283 TT [155] Rung S 108 DUELL 5 CHAMBER CARBON ROUGH CHAMBER PUMP AREA VALVE =<250 AREA 4 4 ENABLE CLOSED MICRONS AT STANDB PUMP4E RVS7 PIR16 4STANDBY N7:38 1:052 1:054 B3 CL) 14 07 294 [447] B3/294 - -| μ - File #2 MAIH_PRGRM - 131, 132, 133, 134, 135, 136 -(U)- - File #2 MAIH PRGRM - 113 RV'S ALL CLOSED FOR CROSSOVER RVS_CLOSED ~ B3 176 [24] AUTO OFF PULSE AUOFPULSE T4 :283 TT [155] Λλ Rung #109 EXLOCK CHAMBER EXIT BUFFER ROUGH CHAMBER PUMP AREA VALVE =<250 AREA 5 5 ENABLE CLOSED MICRONS AT STAND PUHP5E RVS9 PIR15 5STAN0BY N7:38 1 :052 1 :040 B3 (L) 16 13 295 [451] B3/295 - -j μ - Fi le *2 MAI H_PRGRM 137, 138 -(U)- - Fi le «2 MAIH_PRGRM 114 RV'S ALL CLOSED FOR CROSSOVER RVS_CLOSED B3 176 [24] AUTO OFF PULSE AUOFPULSE T4 :283 1 TT [155] PUMPOOUN EXIT LOCK PUMP DOUN 5STANDBY EXIT LOCK ENABLE OS PDEX POEX5SE N7:27 B3 i |/μ_ [ONS] — 10 248 [698] A Y S" ) 1 ΛλV [3:46] TV3 ■ K\ λ Rung #114 SYSTEM VENT AREA 5 ENABLE AT STANDBY SYSVNTE 5STANDBY N7:37 B3 — ■ I (U) 5 295 [368] I B3/295 - -| μ File #2 MAIH_PRGRM - 137, 138 I -CD- File #2 MAIH PRGRM - 109 VENT AREA 5 ENABLE VENT5E N7:37 10 [430] PREPARE FOR AUTO RUN >AUT0 N7:37 1 [157] reset RESET N7: 17 H I 15 [3] COMPRESSOR 7 REGEN¬ ERATION PROGRAM CYRGN7 B3 1 1 I — 327 [3:57] λ COMPRESSOR 1 REGEN¬ ERATION PROGRAM CYRGN1 B3 > - <<«<<< ««« 0:011/11 - -1 μ Fi le #5 FAULTS - 69 Fi le #6 TECH_RUNGS - 6 H/ Fi le #5 FAULTS - 117 -( )- Fi le #2 MAIH PRGRM - 115 Rung #116 DOOR 3 HEATER 1 CLOSED HIVAC BAFFLE DRCL3S HV1_2 1 :006 0:011 (U) I 04 12 I 0:011/12 - -I μ - File #2 MA1H_PRGRM - 379 I AUTO -|/| File *2 MAIH_PRGRM - 38 JMOOE -CL)- - File #2 MAIH PRGRM - 215 {ENABLE I AUTO j N7:37 / 11 [155] COMPRESSOR CRYO GATE SYSTEM 2 REGEN¬ FIRST SCAN SOLENOID VENT AREA VENT ERATION AFTER POWER HEATER 2 2 ENABLE ENABLE PROGRAM LOSS CHAMBER -| μ File #5 FAULTS - 71 File #6 TECH_RUNGS - 6 H/h File #5 FAULTS - 94,119 -( )- File #2 MAIH PRGRM - 117 -Alo [461] :011/14 - -I μ - File #5 FAULTS - 71,94 File #6 TECH_RUNGS - 6 -|/μ - File #5 FAULTS - 119 -C )- - File #2 HAIH PRGRM - 118 CRYO GA SOLENOI DUELL 1 CHAMBER HV3_1 0:01 ( ) 15 :011/15 - _! ,_ - File #5 FAULTS - 73 File #6 TECH_RUNGS - 6 - lμ - File #5 FAULTS - 96,121 -C )- - File #2 MAIH PRGRM - 119 [3] PREPARE FOR AUTO RUN >AUTO N7:37 -i r- 1 [157] AUTO MODE ENABLE AUTO N7:37 r- 11 [155] DUELL 1 CRYO 3 CHAMBER MANUAL CRYO TEMPERATUR PRESSUR AT GATE 3 OPEN =>290K ATMOSPHERE ~ λ [465] CRYO GATE SOLENOID DUELL 1 CHAMBER HV3_2 0:011 C ) 16 1 I — 516 05 [467] CRYO GATE A%5 SOLENOID 1 DUELL 2 CHAMBER HV4_1 0:031 ( ) 11 H μ File #5 FAULTS - 75 File #6 TECH_RUNGS - 6 H/h File #5 FAULTS - 98,123 -C )- File #2 MAIH_PRGRM - 121 λ%<o <««« «««< [471] CRYO GATE SOLENOID HEATER Z CHAMBER HV5_1 0:031 < )— 13 0:031/13 - -| μ File #5 FAULTS - 77 File #6 TECH_RUNGS - 6 H/r- File #5 FAULTS - 100,125 -( >- File #2 MAIH PRGRM - 123 % N7:26 [473] CRYO GATE SOLENOID 2 HEATER 2 CHAMBER HV5_2 0:031 < ) 14 o:03i/κ - H μ File m ~~ FAULTS - 77,100 File #6 TECH_RUNGS - 6 H/ h File #5 FAULTS - 125 -< )- File #2 MAIH PRGRM - 124 Rung # 125 CRYO GATE SOLENOID DUELL 3 CHAMBER HV6_1 0:031 ( >— 15 0:031/15 - —' j File #5 FAULTS Λ9θ File #6 TECHJJUNG' 6 H/h File #5 FAULTS - .--,127 -< >- File #2 MAIH PRGRM - 125 Rung #126 DUELL 4 MAGNETIC CHAMBER COMPRESSOR OPEN CRYO 6 CHAMBER ROUGH SYSTEM 5 REGEN¬ FIRST SCAN AREA 3 CRYO ROUGH TEMPERATUR "250 VALVE VENT AREA VENT ERATION AFTER POUER AT STANDBY VALVE 6 =<20K MICRONS CLOSED 3 ENABLE ENABLE PROGRAM LOSS 3STANDBY CR6 CY6TMP20 PIR11 RVS5 VENT3E SYSVNTE CYRGN5 PURJ_N_DLY B3 0:027 B3 1:040 1:036 H7:37 N7:37 B3 " B3 j/| l/h- | ,μ_ -! l/l 293 13 506 07 15 8 5 i 325 444 [112] [3:168] [418] [368] | [3:46] [1] ( COMPRESSOR {5 REGEN¬ PUMP 3 ERATION COOL DOUN STAGE 1 { PROGRAM 5 P3ST1 JCYRGN5 CD5 83 I « B3 I- I 1 | 426 325 655 [444] [3:46] [3:206] MANUAL CRYO GATE 6 OPEN MCG60P N7:25 10 [475] MANUAL CRYO GATE 6 THROTTLE HCG6TL N7:26 r [477] PREPARE FOR AUTO RUN >AUTO N7:37 1 I [157] AUTO MOOE ENABLE AUTO N7:37 •— I h- 11 [155] DUELL 3 CRYO 6 CHAMBER MANUAL CRYO TEMPERATUR PRESSUR AT GATE 6 OPEN =»290K ATMOSPHERE MCG60P CY6TMP290 PS4 N7:25 B3 1 :022 -r -1 i- 1 I 10 518 04 I [475] I I MANUAL CRYO ( IGATE 6 ITHROTTLE |MCG6TL j N7:26 I 1 |_ 5 [477] CRYO GATE SOLENOID 2 DUELL 3 CHAMBER HV6_2 0:031 ( ) 16 0:031/16 - -A μ File #5 FAULTS - 79,102 File #6 TECH_RUNGS - 6 H/h File #5 FAULTS - 127 -( )- File #2 MAIH PRGRM 126 Rung #127 DUELL 4 MAGNETIC CHAMBER COMPRESSOR IMANUAL CRYO IGATE 7 OPEN |MCG70P I N7-.25 11 [479] DUELL 3 CRYO 7 CHAMBER MANUAL CRYO TEMPERATUR PRESSUR AT GATE 7 OPEN =>290K ATMOSPHERE MCG70P CY7TMP290 PS4 N7:25 83 1:022 l_ 1 I 1 I— 519 04 [479; CRYO GATE SOLENOID ' DUELL 4 CHAMBER HV7 0:045 ( ) — Λ l 0:045/11 - H h " File * 5 FAULTS - 81 File #6 TECH RUNGS - I 1 519 I [479] I MANUAL CRYO IGATE 7 {THROTTLE JMCGΠL I N7:26 [481] CRYO GATE SOLENOID 2 DUELL 4 CHAMBER HV7_2 0:045 ( ) 12 0:045/12 - -| h " F >' e *5 FAULTS - 81,104 CRYO GATE SOLENOID 1 BUFFER 3 CHAMBER ^£>ii HV8_1 0: 045 ) 13 04 [485] CRYO GATE SOLENOID 2 BUFFER 3 CHAMBER HV8_2 0:045 ( ) 14 0:045/14 . _) !_ - File #5 FAULTS - 83,106 File #6 TECH_RUNGS - -/ File #5 FAULTS - 131 -c .- File #2 MAIH PRGRM - 130 Runσ #131 DUELL 5 CARBON CHAMBER COMPRESSOR {7 REGEN¬ |PUMP 4 ERATION COOL DOUN ISTAGE 1 I PROGRAM 7 JP4ST1 I CTSGN7 CD7 I S3 I I B3 83 -1 ( 428 327 657 { [449] D:57] [3:208; I HANUAL CRYO [487] DUELL 5 CRYO 9 CHAMBER MANUAL CRYO TEMPERATUR PRESSUR AT GATE 9 OPEN =>290IC ATMOSPHERE MCG90P CY9TMP290 PS5 N7:25 B3 1:036 1_ 1 ' — 13 521 04 [487] CRYO GATE Λ96 SOLENOID OUELL 5 CHAMBER HV9_1 0:045 ( )— 15 -\ (- - File #5 FAULTS - 85 File #6 TECH_RUNGS - 7 -)/h " FHe #5 FAULTS - 108,133 -< )- - File #2 HAIH_PRGRH - 131 ■ A21 N7:26 [489] CRYO GATE SOLENOID DUELL 5 CHAMBER HV9_2 0:045 ( ) 16 :061/11 - -| |- - File #5 FAULTS - 87,110 Λ 93 MCG10OP N7:25 r 14 [491] MANUAL CRYO GATE 10 THROTTLE MCG10TL N7:26 1 I — 9 [493] PREPARE FOR AUTO RUN >AUTO N7:37 1 [157] AUTO MODE ENABLE AUTO N7:37 11 [155] DUELL 5 CYRO 10 CHAMBER MANUAL CRYO TEMPERATUR PRESSUR AT GATE 10 OPEN =>290K ATMOSPHERE MCG100P CY10TMP290 PS5 N7:25 B3 1:036 -I L- 1 I — I 14 522 04 I [491] | MANUAL CRYO loo I GATE 10 j THROTTLE { N7:26 [493] CRYO GATE SOLENOID 2 DUELL 6 CHAMBER HV10_2 0:061 ( > 12 0:061/12 - H h " File #5 FAULTS - 87 File #6 TECH RUNGS - CRYO GATE SOLENOID BUFFER - CHAMBER HV11 0:061 ( >— loλ 13 0:061/13 - H h Fi le #5 FAULTS - 89 Fi le #6 TECH_RUNGS - 7 H/h - Fi le #5 FAULTS - 112, 137 -< )- - Fi le #2 MAIH PRGRM - 135 Rung # 136 DUELL 5 CARBON CHAMBER COMPRESSOR OPEN CRYO 11 CHAMBER ROUGH SYSTEM 8 REGEN¬ FIRST SCAN AREA 4 CRYO ROUGH TEMPERATUR =<250 VALVE VENT AREA VENT ERATION AFTER POUER AT STANDBY VALVE 11 =<20K MICRONS CLOSED 4 ENABLE ENABLE PROGRAM LOSS 4STANDBY CR11 CY11TMP20 PIR16 RVS VENT4E SYSVNTE CYRGN8 PUR_ON_DLY B3 0:057 B3 1:054 1 :052 N7:37 N7:37 83 B3 l/l -i l/h- |/h- -1 l/l 1/| — 294 12 511 07 14 9 5 I 328 444 [113] 0:174] [425] 068] I [3:63] [1] {COMPRESSOR 18 REGEN¬ PUMP 4 ERATION COOL DOUN STAGE 1 I PROGRAM 8 P4ST1 { cYRGN8 CD8 B3 I B3 B3 1 1 I — _l 428 328 658 [449] [3 :63] [3 :209] MANUAL CRYO GATE 11 OPEN MCG110P N7:25 15 [495] MANUAL CRYO GATE 11 THROTTLE MCG11TL N7:26 10 [497] PREPARE FOR AUTO RUN >AUT0 N7:37 1 I — 1 [157] AUTO MODE ENABLE AUTO N7:37 11 [155] DUELL 5 CRYO 11 CHAMBER HANUAL CRYO TEHPERATUR PRESSUR AT GATE 11 OPEN =>290K ATMOSPHERE HCG110P CY11THP290 PS5 N7:25 B3 1 :036 So2 SOLENOID BUFFER 4 CHAMBER HV11_2 0:061 ( ) 14 0:061/14 - -| (- - File #5 FAULTS - 89,112 File #6 TECH_RUNGS - -\/\- - File #5 FAULTS - 137 -< >- - File #2 MAIH PRGRM - 136 Rung #137 [499] CRYO GATE FIRST SCAN SOLENOID AFTER POWER EXBUFFER LOSS CHAMBER c -| h " File * 5 FAULTS - 91 File #6 TECH_RUNGS - 7 -|/h - F'le #5 FAULTS - 114,139 -< )- - File #2 MAIH PRGRM - 137 ϋo N7:26 -H h- [501] CRYO GATE FIRST SCAN SOLENOID 2 AFTER POWER EXBUFFER LOSS CHAMBER PVR_ON_DLY HV122 83 0:061 1/| — ( ) 444 16 [1] 0:061/16 - -I | File #5 FAULTS - 91,114 File #6 TECH_RUNGS - 7 H/h " File *5 FAULTS - 139 -< )- - File #2 HAIH_PRGRM - 138 Rung #139 EXITLOCK KIVAC BAFFLE ENABLE NV12_3 0:061 (U) 17 - F i l« #2 MAI H_PRGRM - 324 • F i le #2 KAIH PRGRM - 139 HEATER 1 CHROME MAGNETIC CARBON EXIT BUFFER I PUMPOOUN CHAMBER CHAMBER CHAMBER CHAM8ER CHAMBER SYSTEM I. {SYSTEM = <250 =<250 =<250 =<250 =<250 PUMPED {ENABLE MICRONS MI CRONS MICRONS MICRONS MICRONS DOWN | PDSE PI R2 PI R6 PIR11 PIR16 PIR15 SYS_P0 I B3 1 : 004 1 :024 1:040 1:054 1:040 B3 ( )- I 303 10 07 07 07 13 389 { [23] B3/389 - -\ h File #2 MAIH_PRGRM - 22 -< )- File #2 MAIH PRGRM - 140 Rung # 141 HEATER HEATER SHIELD SHIELD H20 FLOU SUITCH FLOU 1 SENSOR SWITCH 1 TIMER HSFS1 HSFS1TMR Rung #142 HEATER SHIELD H20 HEATER SHIELD FLOU FLOU SWITCH SWITCH 2 2 SENSOR HSFS2 HSFS2THS 1:006 I —TOF HTIMER OFF DELAY h< 11 |TIHER: T4:192J |BASE (SEC): 1.0|-< T4:192.DN - -\ h " File #2 HAIH_PRGRM - 147 |PRESET: 20j H/h " Fi le #2 MAIH_PRGRH - 149 IACCUH: 0| Rung #143 HEATER SHIELD H20 HEATER SHIELD FLOU FLOW SWITCH SWITCH 3 3 TIMER HSFS3 HSFS3TMR 1:006 .—TOF HTIMER OFF DELAY h < 12 {TIMER: T4:193| {BASE <SEC): 1.0|-< T4:193.DN - -\ \- - File #2 MA!H_PRGRM - 148 IPRESET: 201 H/h ' File #2 HAIH_PRGRM - 150 ACCUM: 0 Rung #144 HEATER SHIELD H20 HEATER SHIELD FLOU FLOU SWITCH SWITCH 4 4 TIMER HSFS4 HSFS4THR 1:006 —TOF -jTIMER OFF DELAY 13 {TIMER: T4:194 {BASE <SEC): I.OhC T4:194.DN - -\ (- - File #2 HAIH_PRGRH - 148 IPRESET: 20[ H h - File #2 MAIH_PRGRM - 150 IACCUH: 0| Rung #145 HEATER SHIELD H20 HEATER SHIELD FLOU FLOU SWITCH SWITCH 5 5 TIMER HSFS5 HSFS5TMS 1:023 1 —TOF -'TIMER OFF CELAY h ( 16 (TIMER: 14:195 I |BASE CSEC): 1.0he {PRESET: 20 |ACCUM: 20 & Rung # 146 I HEATER j SHIELD H20 HEATER SHIELD {FLOW FLOW SWITCH I SWITCH 6 6 TIMER HSFS6TMR { 1 :023 i — TOF "I ^IHER OFF DELAY h<E» 17 JTIHER: T4: 196J |BASE (SEC) : 1 .0|-<DN | PRESET : 20 j |ACCUH: 2θ j Rung # 147 HEATER 1 i CHAMBER SUBSTRATE I RUN HEATER HEATER =<250 HEATER WATER HEATER WATER HEATER 1A I GROUP 1 ALARM MICRONS VALVE 1 VALVE 2 ON | TS26 HSFS1TMR HSFS2THR HTALM PIR2 HH201 HH202 RH1A I N7:17 T4:191 T4:192 B3 1:004 0:010 0:010 0:046 1 I 1 h -J -H/h 1 I 1 I -, (L) 2 DN DN 530 10 16 17 I 10 [3] [141] [142] [737] [736] I 0:046/10 - H h " File #2 MAIH_PRGRH 153 ISUBSTRATE I -<U)- - File *2 HAIH_PRGRH 149 IHEATER 1B 0:046/11 - -' File #2 MAIH_PRGRM 153 |ON -(U)- - File #2 MAIH_PRGRM 149 IRH1B 0:046/15 -<U)- - File #2 MAIH_PRGRM 149 0:046 0:046/16 -<U)- - File #2 MAIH_PRGRM 149 ' (L) N7:38/2 - -<U>- - File #2 HAIH PRGRM - 149 I 11 _F:N7:21I5__1 - BTW - File #2 MAIH_PRGRH - 2 N7:38/5 - -CD- - File *2 MAIH_FRGRM - 149 i ] F:N7:21IX21 - BTU - File #2 MA!H PRGRM - 2 ISUBSTRATE |HEATER 3A |ON |RH3A j 0:046 I <L> I 15 |SU8STRATE jHEATER 3B (L) 16 |MANUAL |RUN HEATER |GROUP 1 |MRHG1 I N7:38 ! (L) I 2 IMANUAL ISTOP HEATER (GROUP 1 (MSHG1 1 N7:38 1 (U) 5 ^0% Rung #148 CHROME CHAMBER SUBSTRATE RUN HEATER HEATER =<2S0 DOOR 4 HEATER UATER HEATER UATER HEATER 2A GROUP 2 ALARM MICRONS OPEN VALVE 1 VALVE 2 ON TS27 HSFS3THR HSFS4TMR HTALN PIR6 DROP4S HH201 HH202 RH2A N7:17 T4:193 T4:194 B3 1:024 1:006 0:010 0:010 0:046 I/1 1 I (L) DN DN 530 I 07 07 16 17 I 12 [3] [143] [144] I [737] [736] IHEATER 1 {CHAMBER 0:046/12 - -\ \- File #2 HAIH_PRGRM 153 |=<250 DOOR 3 -<U)- File #2 MAIH_PRGRM 150 (MICRONS OPEN 0:046/13 - -\ h File #2 HAIH_PRGRM 153 {PIR2 DR0P3S -(U)- File #2 MAIH_P«GRM 150 1:004 1:006 0:046/14 - H h File #2 KΛIH_PRGRM 153 -<u>- File #2 MAIH_PRGRM 150 10 05 0:046/17 - -<U)- File #2 HAIH_PRGRH 150 N7:38/3 - _(U)- - File #2 HAIH PRGRH - 150 F:N7:21IX21 - BTW - File #2 MAIH PRGRM - 2 N7:3β/6 - -<L)- ■ - File #2 HA1H_PRGRM - 150 F:N7:21IX21 - BTW - File #2 HAIH PRGRM - 2 1A &I© -EN ALL SUBSTRATE SUBSTRATE SUBSTRATE HEATER 23 HEATES 2C HEATERS ON ON SET LO. RH2B RH2C ASHSL 0:044 0:W6 83 C > 13 39S [150] [is:: B3/398 - H h - File #2 MAIH_PRGRM - 158 -C )- - File #2 MAIH PRGRM - 153 Rung #154 I DOORS 1,2,3,9. |D00R 1 DOOR 2 DOOR 3 DOOR 9 DOOR 11 OOOR 12 DOOR 4 DOOR 5 DOOR 6 DOOR 7 DOOR 8 DOOR 10 11,12 CLOSED: |CLOSED CLOSED CLOSED OPEN CLOSED CLOSED OPEN OPEN OPEN OPEN OPE* CLOSED 4,5,6,7,8 OPEN {ORCLIS DRCL2S DRCL3S DR0P9S 0RCL11S DRCL12S DR0P4S DR0P5S 0R0P6S DR0P7S DR0P8S DRCL10S DRS_OK 1 1:006 1:006 1:006 1:056 1:056 1:056 1:006 1:026 1:026 1:042 !:_-_ 1:056 B3 hH H h H H V — I H ( ) I 00 02 04 01 04 06 07 01 03 01 C3 02 396 B3 396 - H μ - File #2 HAIH_PRGRH - 158 -C )- - File #2 MAI H_ PRGRM - 154 t 630, 631, 633 File #5 FAULTS - 0, 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14 H/h File #2 MΛIH_PRGRM - 84, 98, 104, 116, 187, 200, 212, 327, 369, 405, 411, 418, 425, 43C, 674, 676, 684, 688, 690, 698 -CD- - File #2 MA!H_PRGRM - 158 _F :N7:21 IX21 - BTW - File #2 MAIH_PRGRM - 2 T4:283.DN - -\ j- - File #2 MA1H_PRGRM - 711 T4:283.TT • -) !- • File #2 MAIH PRGRM " 38, 39, 40, 41 , 42, 44, 45, 84, 98, 105, 106, 107, 108, 109, 149, 150, 223, 237, 240, 243, 269, 272, 275 Rung # 156 lOPEN GAS I GAS FLOU GAS FLOW GAS FLOW VALV { ISOLATION ISOLATION ISOLATION 3,5, AUTO MODE ENABLE AUTO H7:37 —CD— 11 |AUTO ON |PULSE jAUTOPULSE lr—TON UTIMER ON DELAY REN)-J |TIMER: T4:282{ Z \L\ Rung # 160 1 UTO { MODE RETURN CONVEYOR { ENABLE OFF DELAY I AUTO RC_0FF I N7:37 , — TOF r- i h -I TIMER OFF DELAY REN I i i ( TIMER : 74 :332 | I [158] I BASE CSEC) : 1.0 DN T4 :332.DN - H / h " F ' le *2 HAIH_PRGRM - 161 I PRESET : 1 BOO I CCUH: 01 I MANUAL CONTROL I RETURN CONVEYOR I TNCNVYR I 1 :055 I 03 Rung #161 RETURN CONVEYOR ON |RC_OFF JTNCVYR I T4-332 0:060 H/h- cu> DN 0" : [160] 0:060/01 - -<D- - File *2 HAIH_PRGRM - 159 -CU)- - File #2 HAIH PRGRM - 161 Rung # 162 ' AUTO MODE PREPARE FOR ; DISABLE AUTO RUN , TS10 >AUT0 N7:16 N7:37 <U> IBJ N7:37/1 - - File #2 HAIH_PRGRH ■ 17, 22 , 46, i 7, 48, -5 68, 78, 110, 111, 112, 113, 114. 118, 120, 122, 124, 126. 128, 130, 132, 134 136, 138, 158, 183, 202, 229, 325 I I 335, 337, 353, 368. 381 , 383 , 385 , 386, 4i; 415, 417, 424, 429, 433, 437, 441 I I AUTO 446, 450, 454, 458. 460, 462, 464 , 466, 468 470, 472, 474, 476, 478, 480, 482 MODE 484, 486, 488, 490, 492, 494, 496, 498, SOC. 502, 508, 509, 510, 511, 512, 55 * . ENABLE 552, 553, 554, 555, 556, 557, 558. 559, 56C, 561, 562, 563, 564, 565, 566, 567 AUTO 568, 569, 589, 590, 591 , 592, 553. 594, 595, 596, 597, 598, 599, 600, 601, _G2 N7:37 603, 604, 605, 606, 607, 625 File #3 CRYO_REGEN • 25 , 238, 235, 240, 242, 243, 244 -CD- File #2 MAIH PRGRM ■ 157 i [158] F:N7:2HX21 - BTW - Fi le #2 MAI H PRGRM Rung # 163 I PALLET I AUTO DETECTED SOFT |HODE DOOR 1 DOOR 2 RIGHT SIDE ROUGHING { ENABLE CLOSED CLOSED LOADLOCK TIHE= I AUTO DRCL1S DRCL2S SEN6 SOFRL' : j N7:37 1 :006 1:006 1:003 TO— HI I 1 H - . TIMER ON DELAY —CEN} I ii oo 05 ITIMER: T4-.98I I[158] |BASE CSEC): 1.0 DN] IPRESET: . lACCUM: : T4:98.DN - -J — - File #2 MAIH_PRGRM - 167 T4:98.TT - — — - File #2 HAIH PRGRM - 16- ung . HECH PUMP SOFT ROUG VALVE SOFRUF SOFRUFVLV T«:98 0:030 H \— C > TT 00 [163] Rung #165 LOADLOC AUTO , AUTOPULSE LL_AUT0 U:282 ~ B3 (L) TT 287 [158] B3/287 - H I Fi le #2 HAIH_PRGRH - 167, 183 -<U>- - Fi le #2 MAIH PRGRM - 166 COMPUTER AUTO SIGNAL FOR HOOE AUTO MODE ENABLE OK AUTO COMPAUTO N7:37 N7:16 H 1 I — 11 11 1158] [3] Rung #166 VENT LOADLOCK LOAD LOCK AUTO VNT .L LL_AUT0 N7:24 83 -r (U) 13 287 C674] B3/287 - H h " Fi le #2 HAIH_PRGRM - 167, 183 -<L>- - Fi le #2 MAIH PRGRH - 165 PUMP-VENT CYCLE LOAD LOCK PD-VNT-LL N7:24 14 [676] AUTO MODE DISABLE TS10 N7:16 l_ [3] HECHANICAL OPEN PUMP 1 LOAD 0:010/11 - H h " File #2 NΛIH_PRGRH - 168 File #5 FAULTS - 159 File #6 TECH_RUNGS - 0 H h " F e #5 FAULTS - 161 -( )- - File #2 MAIH_PRGRM - 167 Rung #168 OPEN AUTO LOAD LOCK MODE ROUGH LOAD LOCK ENABLE VALVE ROUGH TIMER AUTO RV1 LLRUFFTMR N7:37 0:010 i TON H r- -jTIMER ON DELAY h<EN 11 11 {TIMER: T4:113| [158] [167] jβASE (SEC): 1.0h(DN j RESET: 60| | ACCUH: OJ T4:113.DN - -\ \- File #2 MAIH PRGRM - 169 Rung #169 LOAD LOCK ROUGHING >60 SECONDS LLRUFFTMR LLRUF>60 T4:113 B3 (L) DN 816 [168] B3/816 - H h - File #2 MAIH_PRGRM 626 -CD- - File #2 MAIH_PRGRM 169 -CU)- - File #2 HAIH PRGRH 170 Rung #170 I LOAD LOCK IPAUSE ROUGHING {DISABLE >60 SECONDS |TS12 LLRUF>60 I N7:16 B3 (U) 816 | [3] B3/816 - H " File #2 MAIH_PRGRH - 626 -(D- - File #2 MAIH_PRGRM - 169 -(U)- - File #2 MAIH PRGRH - 170 E D ! 1:006 00 Rung #172 I VENT DELAY |DOOR 2 ON DOOR 2 I CLOSED CLOSE. IDRCL2S VDDR2CL ' 1:006 I—TON , -JT1MER ON DELAY — <E 'TIMER: T4:201' IBASE (SEC): * .0i— (O T4:201.Dh - — — - le #2 HAIH PRGRM - 173 IPRESET: 2! I ACCUM: Ci Rung #173 LLOCK LLOCK LLOCK PALLET PALLET PALLET PALLET CHAMBER CHAMB AUTO CHAMBER DETECTED DETECTED DETECTED DETECTED ROUGH ROUGH NODE PRESSUR AT LEFT SIDE LEFT SIDE CENTER RIGHT SIDE VALVE DOOR 1 DOOR 3 VALVE ENABLE ATMOSPHERE ENTRANCE LOADLOCK LOADLOCK LOADLOCK CLOSED CLOSED DELAY TIMER CLOSED CLOSE AUTO PS2 SEN1 SEN4 SEN5 SEN6 RVS1 DRCL1S VDDR2CL DRCL3S RVS1 N7:37 1:002 1:003 1:003 1:003 1:003 1:002 1:006 T4:201 1 :006 1:0 H h l/l— l/h- —I/H- l/l— T T ^ —I 11 04 00 03 04 05 15 00 DN 04 1 [158] [172] HEATER 2 CHAMBER HEATER 1 GATE VALVE CHAMBER CLOSE READY TO GATE VALVE HV2S1 VENT CLOSE 1:004 RTVCVDT HV1S1 T4:0 1 :002 00 . HANUAL DN 06 CONTROL [392] CHAMBER VENT 1 OPEN H-CV1-1 N7:6 10 SECOND 1 — I/H TIMER DONE 11 V1DYTHR [3] T4:1 DN [171] MANUAL CONTROL CHAMBER VENT 1 OPEN M-CV1-1 N7:6 11 [3] LLOCK CHAMBER VENT DOOR 1 DOOR 2 PRESSUR AT LOAD LOCK CLOSED CLOSED ATMOSPHERE VNTJ.L DRCL1S DRCL2S PS2 N7:24 1:006 1:006 1:002 —I I 1 I l/l— 13 00 02 04 [674] VENT LLOCK LOADLOCK CHAMBER CLEAN PRESSUR AT CYCLE ATMOSPHERE VNT-LL-CC PS2 B3 1:002 l_ 1/1 145 04 [680] OPEN LOAD LOCK π > 0:007/16 - H h File #2 MAIH_PRGRH 174 File #6 TECH_RUNGS 0 File #2 HAIH_PRGRH 67,167.181.181.368,436,675,681 -<L>- File #2 MAIH_PRGRM 173 -CU)- - File #2 MAIH PRGRM - 176 Z- Rung #180 I AUTO IHOO€ DOOR 1 PALLET GATE j ENABLE OPEN TIMER j AUTO DR0P1S PAL_GTE I N7:37 1:006 I — TON -(TIMER ON OELAT : n I 01 ITIHER: T4:77| I [1581 JBASE CSEC): l.oμ T4:77.TT ./(- - Fil * * HAIH_P«GRH 181 [PRESET: 115. i ACCUH: 45I | OPEN DOOR |1 | DROP 1 ! 0:011 ' ■ •/ 1 01 C181] Rung .181 PALLET PALLET OPEN LLOCK AUTO DETECTED DETECTED LOAD LOCK PAUSE CHAMBER MODE RIGHT SIDE CENTER CHAMBER LATCH PRESSUR AT DOOR 1 OPEN DOOR ENABLE ENTRANCE LOADLOCK VENT VALVE ENABLE ATMOSPHERE OPEN 1 AUTO PAL_GTE SEN3 SEN5 CVl PLE PS2 DROPl S 0ROP1 N7:37 T4:77 !:003 1:003 0:007 .7:3? 1:002 1:006 0:011 ./I— , / / C ) I n 02 0- 01 11158) I [180] [*.77] -Ϊ-2S1 , I | IMANUAL ! i i ICONTROL IOPEN DOOR MANUAL DOOR '. OPEN iM-OROP-1 MDR10P 1.7:11 N7:32 |PAL_GTE (L) ! T4:77 [3] I I TT [1801 I I (MANUAL DOOR '1 CLOSE I I i OPEN :MDR1CL I I j PUMP- VENT LOAD LOCK N7:3 * . ' ! j CYCLE LOAD THREE CYCLES CHAHBER cu)— I I LOCK COMPLETE VENT VALVE . ; IPO-VNT-LL L-CCC CVl , ; I -7:24 C5:9 0:007 ! I i 1 1 ; 1/. I I w ON 16 ! I [6761 [682] [177] I j HANUAL I I CONTROL j |OPEN DOOR I |1 I |M-DROP-l I I N7:11 i C3] :011/01 File #5 FAULTS - 41 File #6 TECH_RUNGS - 2 File *2 HAIH PRGRM - 180 -C )- - File #2 MAIH_P«GRH 181 N7:32/7 - -CD- - File #2 MAIH_F*RGRM - 181 -CU)- - File «2 MAIH_PβGW. - 183 _F-.N7:21l_21 - BTU - File 92 MAIH_PRGRH - 2 -7:31/11 - - -.- - File #2 MAIH M-GRN - 183 -CU)- - File fZ MAIH_PRGRM - 181 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 Rung #182 PALLET PALLET PALLET DETECTED DETECTED DETECTED CENTER RIGHT SIDE LEFT SIDE PALLET A ENTRANCE ENTRANCE LOADLOCK DOOR 1 SEN2 SEN3 SEN4 FLT_DR1 1:003 1:003 1:003 33 1 '— -I ( ) ! °1 02 03 198 iPALLET B3/198 • -/h File #2 HAIH PRGRM - 1S3 |DETECTED |CENTER jLOADLOCK ISENS 1:003 04 198 [3] [182] MANUAL DOOR 1 OPEN ICR 10P H7:32 CU) 0:011/00 - — )- - File #5 FAULTS - File #6 TECHJHMGS - 2 -C )- - File #2 HAIH_PRG» • 183 N7:32/7 - -CD- - File «Z HAIH PRGRH - 181 -CU)- - File #2 MA1H_PRGRM - 183 F:N7:21IX21 - BTU File «2 MAlH_PtGSH - 2 N7:31/11 - -CL)- - File #2 NAIH_P«G*W - 183 -CU>- - File #2 HAIH_PRGRH - 181 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 Rung #184 | MOTOR 3 MOTOR START MOTOR 3 FAST PULSE PULSE INTERRUPT I H3FP MDPTB M3I T4:203 T4:299 0:012 T i- ( ) DN 02 [185] [12] MOTOR 3 FAST STOP PULSE H3FSP T4:223 TT [186] MOTOR 3 SLOW PULSE M3SP T4:243 [187] MOTOR 3 SLOW STOP PULSE M3SSP T4:263 . TT [188] 01 [513] i IPALLET IDETECTED |RIGHT SIDE IENTRANCE |SEN3 I I:003 l/l 02 0:012/12 - -: • __ . File #5 FAULTS - C File #2 HAIH_PRGRM • 186 File #2 HAIH_PRGRM - 125 T4:203.TT - - - - File #2 HAIH PRGRM - 18- Rung #186 1 HOTO. 3 IMOTOR 3 f*_ T STOF [FAST P-.'LSΞ |H3F K3FS= I 0:012 I 1,; -TIMER ON DELAY — I 12 '.TIMER: 14:223. I [185] 'BASE CSEC): O.OH-C 'PRESET: 1001 ACCUM: "021 T4:223.TT - -j File #2 HAIH PRGRM 184 ■ PAUSE PALLET IN ENTRANCE MOTOR 3 HOTOR 3 SLOU M3PLL M3S B3 0:013 l/l C >— 01 473 02 '(513. [158] I [628] IPALLET IDETECTED 0:013/02 - - -- - Filt *2 HAIH_PRGRM - '5, 18' IRIGHT SIDE —/f- - File *2 KAIH_PRGRH - 188 ιMOTOR 3 IENTRANCE I T4:243.TT - — — - Fiie #2 HAIH_PRGRM - 184 SLOU PULSE |SEN3 IM3SP I 1:003 02 PALLET PALLET I AUTO DETECTED DETECTED | NODE LEFT SIDE RIGHT SIDE | ENABLE ENTRANCE ENTRANCE | AUTO CEN1 SEN3 ! N7;37 1:003 1:003 : [i5e: PALLET IAUTO 3ETECTEC |MOOE MOTOR 3 81GHT SIDE IENABLE SLOU ENTRANCE IAUTO H3S SEN3 I N7:37 0:013 1:003 ' . i 02 G2 I [158. [187] PALLET DETECTED AUTO | HOTOR 3 LEFT SIDE MODE | REVERSE ENTRANCE ENABLE IM3R SEN1 AUTO I E3 1:003 .7:37 / i 3 [57C: rise: Rung = iss MOTOR 2 I MOTOR 2 SLOU STOP I SLOW PULSE IM3S M3SSP 0:013 — TON -JTIMER ON DELAY — (E ITIHER: T4:263l , [187] IBASE CSEC]: 0.01 l-CD IPRESET: 1001 I ACCUH: 102: T4:263. — - Fi le #2 MAIH PRGRK Rung s l90 PALLET PALLET PAUSE DETECTED DETECTED PALLET IN DOOR 1 DOOR 2 RIGHT SIDE RIGHT SIDE LLOCK MOTOR 4 MOTOR 4 OPEN CLOSED LOADLOCK ENTRANCE MOTOR 4 REVERSE FAST DROP1S DRCL2S SEH6 SEN3 M4PLL MAf 1 :006 1 :006 1 :003 1:003 B3 S3 0:012 l/l * t- 1/' — 1 / ' — C )— 01 02 05 02 401 104 13 [6281 1571] EN) i I DN) PALLET DETECTED RIGHT SI HEATER 1 SEN9 1:003 / , 05 03 IHANUAL MOTOR DOOR 2 i I 4 °" OPEN I |MH40N DROP2S I N7: :223 1:006 i I 03 £514) I IPALLET IDETECTED |RIGHT SIDE jLOADLOCK |SEN6 I 1:003 1 i/l ' ■ 05 0:012/13 - - L- - File #5 FAULTS - 1 File «2 HAIH_PRGRM - 191 -( )- - File #2 HA1H_PRGRM - 190 74:204.T- ■ File #2 HAIH PRGRM - 1S9 Rung ; 191 I MOTOR 4 IMOTOR 4 FAST STOP IFAST PULSE IH4F M4FSP I 0:012 I —TON -(TIMER ON DELAY t-CE I 'l3 |TIK£R: I4:224 | I 1190] IBASE CSEC) : 0.01 (-(O |PRESET: 1001 i ACCUH: C l T4 :224.TT - — '— - F i le #2 HAIH PRGRM 189 ^3 Rung #192 PAUSE PALLET IN HANUAL MOTOR DOOR 2 LLOCK HOTOR 4 4 ON OPEN MOTOR 4 SLOU DROP2S M4*>LL M4S N7:23 !:0O6 B3 0:013 / , C ) — 03 03 [514] I [6281 IPALLET I IDETECTED I 0:013/03 - — IV- - 'ile #2 HAIH_PRGRH - 193 |RIGHT SIDE 1 T4:24-.TT • — '*- ■ "lie #2 HAIH PRGRM - 189 I MOTOR 4 I OADLOCK JSLOU PULSE ISEN6 j HASP i 1:003 l l— TON ' i/l — H TIMER ON DELAT '— CE 05 JTIHER: T4:2 | |BASE CSEC): 0.01HO IPRESET: 1001 lACCUH: 0| MOTOR 4 DOOR " REVERSE OPEN H4R DROP1S B3 1:006 104 01 C571] IPALLET I0ETECTED 'LEFT SIDE ILOADLOCK >SEN4 1:003 / :3 Rung #193 HOTOR 4 |Mθτoe -. SLOW STOP I SLOU PULSE |M4S M4SSP ' 0:013 TON —'TIHER Oh DELAT >-( 03 ITIHER: T4:264| C192] 'BASE (SEC): 0.01H • PRESET: 100I ACCUM: '.02! T4:264.TT - - — - "ue #2 MAIH PRGRM - 189 b\ I HOTOR 5 I FAST STOP j PULSE |M5FSP I T4:225 ! ττ I [196] | MOTOR 5 | SLOU PULSE |H5SP I T4:245 (1981 V L Rung #195 15 16 | MANUAL MOTOR DOOR 3 DOOR 4 | 5 ON OPEN OPEN | MM 50- 0ROP3S 0R0P4S I 117:23 1 :006 1:006 -i i- 05 j 07 [515] i PALLET I DETECTED I RIGHT SIDE I HEATER 2 | SEN12 | 1 :003 1 l/l — I 13 PALLET DETECTED RIGHT SIDE HEATER 1 SEN9 1:003 l/l 10 :012/14 - -A j- - File *5 FAULTS - 2 -j/l- - File « HAIH_PRGRH - 196 -C )- - File #2 HAIH PRGRH - 195 U l> — - File tZ HAIH PRGRi 194 MOTOR 5 FAST STOP PULSE M5FSP —TON ■TIMER ON DELAY EN> iTIMER: T4:225l [1951 IBASE CSEC): 0.01 DN) PRESET: 1001 ACCUH: C T4:22S.TT • — — - File #2 HAIH PRGRH 194 Rung ;197 PALLET PALLET PALLET PAUSE AUTO DETECTED DETECTED DETECTED PALLET IN ; MODE DOOR 3 DOOR 4 RIGHT SIDE LEFT SIOE RIGHT SIDE HEATER 1 MOTOR 5 ENABLE OPEN OPEN HEATER 1 D*- * ELL 1 DUELL 1 MOTOR 5 SLOU AUTO DROP3S 0ROP4S SEN9 SEN13 SEN15 M5PH1 MSS N7:37 1:006 1:006 1:003 1:003 1:003 B3 0:013 J -I l/l— l/l — 1/|— ( ) i I *ι 05 C7 10 14 16 I 402 I 04 [158] I [628] I IPALLLET PALLET IDETECTED DETECTED SLOU PULSE I HANUAL MOTOR DOOR 3 0006 m ICENTER RIGHT SIDE 15 ON OPEN OPEN lOUELL I DUELL 1 IMM50. DR0P3S DR0P4S |SEN14 SEN15 -TIMER ON DELAY -(EN)— >.7:23 1:006 ::006 1:003 1:003 TIMER: T4:245, ι/l EASE (SEC): 0.01 DN) 16 PRESET. 100' I [515: ACCUM: 31 IPALLET IDETECTED IRIGHT SIDE {HEATER 2 |SEN12 1:003 /I 13 IPALLE * 'DETECTED RIGHT SIDE HEATER * 'SEN5 ::003 IMOTOR 5 DOOR 2 IREVERS: OPEN IM5R DROP2S E3 1:006 1C= C3 [572: 'PALLE * IDETECTED LEFT SIDE IHEATER " ISEN7 1:0C3 / ; 06 0:013/04 - -|/f- - File «2 HAIH_PRG«H - 198 -( )- - File #2 HAIH_PRGRH - 197 T4:245.TT - -j J— - File «2 HAIH PRGRM - 194 Rung #198 I IHOTOR 5 ISLOU IH5S i 0:013 04 I [197] File #2 MAIH PRGRM 194 15 11 [1581 T.:169.DN - — - 'ile #2 MAIH PRGRM 104,200 Z. <o 1:004 1:004 -./_- - ι\— 07 10 0:011/03 - - - - F le #2 HAIH_PRGRM - F le #5 FAULTS - 43 F le #6 TECH_RUNGS - -( )- - F le #2 MΛIH_PRGRM - 20C -7:32/8 - -CD- - File #2 HAIH_PRGRM - 200 -CU)- - File #2 HAIH_PRGRH - 202 _F:N7:211X21 - BTU - File #2 MAIH_PRGRH •(7:31/12 - -(D- - File #2 HAIH_PRGRH - 202 -CU)- - File #2 HAIH_PRGRM - 200 F:N7:21IX21 - BTU - File #2 HAIH_PRGRM Rung #201 IPALLET PALLET PALLET IDETECTED DETECTED DETECTED 'CENTER RIGHT SIDE LEFT SIDE PALLET iLOADLOCK LOADLOCK HEATER 1 DOOR 2 ISENS SEN6 SEN7 BLT_DR2 I 1:003 1:003 I -.003 S3 ( ) 04 05 06 Ϊ3/200 . — / *- . File #2 MAIH_PRGRM - 2:2 -{ )- - File #2 MAIH PRGRM - 201 Rung 5202 PALLET PALLET PALLET PALLET PALLET AUTO DETECTED DETECTED OETECTED DETECTED DETECTED DOOR CLOSE MODE RIGHT SIOE DOOR 3 LEFT SIDE RIGHT SIDE LEFT SIDE RIGHT SIDE DOOR 2 SOLENOID ENABLE HEATER 1 CLOSED LOADLOCK LOADLOCK HEATER 1 HEATER 1 CLOSED 2 ENABLE AUTO SEN9 DRCL3S SEN4 SEM6 SEN7 SEN9 0RCL2S DRCL2 N7:37 1:003 1:006 1:003 1:003 1:003 1:003 1 :006 0:011 -I — l/l— 10 04 03 05 06 10 02 02 I C158. I I j ALLET PALLET IPALLET PALLET IDETECTED DETECTED IDETECTED DETECTED IHANUAL ILEFT SIDE RIGHT SIDE ILEFT SIDE RIGHT SIDE IDOOR 2 ILOADLOCK LOADLOCK IHEATER 1 HEATER 1 |OPEN IPREPARE FOR |SEN4 SEN6 |SEN7 SEN. |HDR20P IAUTO RUN j 1:003 1:003 | 1:003 1 :003 I N7:32 l>AUT0 1 >' ~ 1/| — 1 —'/I — 1 / ' ■ (U)— I N7:37 03 05 06 10 8 | [1621 I MANUAL |D0OR 2 I CLOSE IM0R2CL I N7:3 - ' VENT I LOAD LOCK l VNT_L- *7: 2» I (674; I LJMPOO-K j LOADLOCK I CLEAN I CYCLE I PO-LL-CC ' B3 [678] MANUAL CONTROL CLOSE DOOR 2 I M-DRCL2 .7:1: ; [3: 0:011/02 - - — -( >- 202 N7:32/8 - -CD- - 200 -CU)- - 202 _F:N7:211X2 * - BT - 2 N7:31/12 - -CD- - 202 - U>- - 200 F:N7:21IX2* BTU - File #2 MAIH PRGRM - 2 1?Λ Rung #203 I DOOR OPEN I SOLENOID |3 ENABLE TEST COUNTER |DROP3 TST_CNTR : 0:011 ,—CTU ' 1 | -ICOUNT UP -. 05 ICOUNTER: C5:0' I [216] |PRESET: :~c IACCUH: 98- C5:0 - CTU - F i le #2 HAIH_PRGRH - 203 RES - f i le #2 HAIH_PRGRH - 212 Rung #204 I PALLET iAUTO DETECTED IMODE RIGHT SIDE SENSOR 9 jENABLE HEATER 1 LATCH IAUTO SEN9 SEN9_LTC | N7:37 1:003 E3 (D ! ii 10 -. ' I [1581 B3/329 - ' - - ile #2 HAIH_PRGRM - 206 -Cm )- - File #2 HAIH_PRGRM • 204 -(_)- - 'lie »2 HAIH PRGRM ■ " ___ Rung 5205 PALLET PALLET IAUTO DETECTED DETECTED IMODE RIGHT SIDE LEFT SIDE SE S β 9 IENABLE HEATER 2 DUELL 1 jAUTO SEN12 SEN13 SE _«_LTC i N7:37 1:003 1:003 :τ -I I- CJ>- I 11 13 14 329 I [158] B3/329 — — - File #2 HAIH_PRGRM - 206 -CD- - File *2 MAIH_PRGRM - 204 -CU)- - File #2 HAIH PRGRM - 205 Rung #206 IAUTO jMODE SENSOR 9 CHART RECORDE: IENABLE LATCH COUNTER 1 IAUTO ScN«._LTC i ! CHRTCNTR1 I N7:3? 33 CTU —COUNT UF 329 [COUNTER: __:. I [158] [205] IPRESET: :— O lACCUH: = C5:29 CTU File *2 MAIH_PRGRM - 206 RES File *2 MAIH PRGRM - 212 C5:29.ACC - NEQ File #2 HAIH_PRGRH - 21C Rung #207 j PALLET PALLET J UTO DETECTED DETECTED IHOOE CENTER RIGHT SIDE SENSOR -2 IENABLE CARBON CARBON L AT:.- IAUTO SEN41 SEN42 Sct.42_LTC I N7:37 1:053 1:053 53 -I CL) 1". 01 02 ! [158] > B3/330 - — j- File *2 HAIH_PtG8M .09 -CD- - File #2 NAIN_PRG». 207 - U>- - File #2 HAIH~P«GRH 208 Rung #208 PALLET PALLET IAUTO DETECTED DETECTED I MODE CENTER RIGHT SIDE .ENABLE DUELL 6 DUELL 6 'AUTO SEN44 SEN45 N7:37 1:053 1:053 11 04 05 33: [158] 33/330 -! h - File #2 HAIH_PRGRH 209 -CD- - File #2 HAIH_PRGRH 207 -U)- - File #2 HAIH PRGRH 208 Rung S209 IAUTO I MODE SENSOR 42 CHART RECORDER I ENABLE LATCH COUNTER I I AUTO SEN42 .TCH CHRTCNTR2 N7:37 B3 —CTU -. r- —COUNT '.IP —(CU) 330 'COUNTER: C5:30l [158] [208] PRESE-: 0—(ON) ΛCCUN: C5:30 - CTU - File *2 MAIH_PRGRM - 209 !ES - File *2 MAIH_PRGRM - 212 C5:30._CC - NEQ - File «2 MAIH_PRGRM - 21C Rune =210 CHART RECORD: 1 OK ICHRTChTRl CHRTRC01 I —NEC 0:044 HNOT EOUAL CAoB) C ) IISOURCΞ A: C5:29.ACCI 00 ! ! 981 I ISOURCE B: C5:30.ACC| 961 'CHART R 'C5:29.*CC - [212] 2 0*. 'C5:30.ACC - [209] ICHRTRC02 0:0-. Rune ill -EATER! * IME? •<TR1TMR TON— -TIMER ON DELAT — (EK 02 04 10 ITIMER: T4>:7 ' . [158] IBASE CSEC): I.Or-(DS IPRESET: 60. 'ACCUH: c 1 T4:74.C* - — — - File #2 MAIH_PRGRM 214,226 T4:7»." - - — - File #2 MAIH PRGRM 213 Rung #212 IAUTO IMODE jENABLE jAUTO I N7:37 /l I 11 I [1581 I C5-.0 - CTU - File *2 HAIH_PβGRH - 203 I C5:29 - CTU - File #2 HAIH_P*G*H - 206 I CHART RECORDER j CS:29.ACC - NEO - File «Z HΛIH_PtGSH - 210 [COUNTER 1 j C5:30 - CTU - File « HAIH_PRG*H - 209 :CHRTCNTR1 | -5:30. ACC - NEO - File #2 HAIH PRGRM - 210 C5:29 (RES] ICHART RECORDER ICOUNTER 2 ICHRTCNTR2 C5:30 [RES] Rung .213 HEATER SHIELD H2C FLOU SUBSTRATE IHEATER 1 GROUP 1 HEATER ' TIMER FAULT SET HIGH HTR1TMR HSFG1F HH1A <\ Rung 5214 I PALLET I AUTO DETECTED HEATER |MODE HEATER 1 RIGHT SIDE DELAY COMPLETE DWELL 1 TIMER |AUTO HTR1TMR SEN15 HTRDLTTMR I N7:37 T4:74 1:003 —TON l/j -JTIMER ON DELAT t-(E 16 |TIMER: T4:75l 1 [158] [211] IBASE (SEC): 1.0 D IPRESET: 25 | ,ACCUM: ;; T4:75.DN — '— - File #2 MAIH_PRGRM - 215 Rung ■ 215 HEATER 1 HIVAC SAFFLE HV1_2 T4:75 0:011 (L) ON 12 I [214] 0:011/12 - — — File #2 HAIH_PRGRM - 379 - / !_ File #2 MAIH_PRGRM - 38 DOOR 3 File #2 MAIH_PRGRM - 116 DELAT TIMER Tt:»C.DN - — — ' • le #2 MAIH PRGRK - 2 6 DR30T —TON -TIMES ON DELAT —(EN) 'TIMER: T4:40 I [625] IBASE (SEC): * .-0i—<C_> IPRESET: 5' IACCUM: 0' IPALLLET PALLET IDETECTED DETECTED ICENTER RIGHT SIDE IDWELL 1 DWELL * |SEN14 SEN15 I 1:003 1:003 15 File #6 TECH_RUNGS - 2 -( )- • File #2 MAIH_PRGRH - 216 N7:32/9 - -<D- File #2 MAIH_PRGRH - 216 -CU)- File #2 MAIH PRGRH - 229 h _F:N7:21l * C1 - BTW - File *~Z MAIH_P β t. - 2 N7:31/13 - -(L>- - File «2 HAIH -RGRM - 229 -<U>- - File #2 HAIH_PRGRM - 216 F:N7:21tX21 - BTW - File #2 MAIH PRGRH - 2 Rung #217 I HOTOR 6 HOTOR DRIVE HOTOR 6 I FAST PULSE PULSER INTERRUPT M6FP W>P Hόl T4:206 B3 0:012 -I < > 299 05 [218] [14] HOTOR 6 FAST STOP PULSE C220] MOTOR 6 SLOW STOP PULSE M6SSP T4:266 TT [221] ε^ 1:003 1:003 • /' 16 |PALLET IDETECTED |CENTER |BUFFER 1 |SEN11 I I:003 12 DOOR 4 OPEN DR0P4S 1:006 [516] 0: 012/15 - - - -; )- T4 :206.TT - - '— ^ ^ Rung ?222 i PALLET I AUTO DETECTED HEATER 2 j MODE LEFT SIDE DELAY OFF | ENABLE DWELL 1 TIMER |AUTO SEN13 HTR2_0FF I N7:37 1:003 I —TON -ITIMER ON DELAY - I 11 ! 14 ITIHER: T4:76| It15βl i |BASE (SEC): 1.0(- IPALLLET 14:76. DN - -J (- - File #2 HAIH_PRGRM - 223 IPRESET: 131 IDETECTED lACCUH: 13| I CENTER I DUELL 1 |SEN14 I 1:003 I 15 I PALLET IDETECTED |RIGHT SIDE I DUELL 1 |SEN15 j 1:003 16 Rung £22: HEATER LATCH HTR2_0FF HTR2LT T4:76 B3 (U) I ON 320 I 12223 B3/320 - - — - File #2 MAIH_PRGRM - 225, 227 -(.)- ~ File #2 MAIH PRGRM - 224 I |HSFFTMR I 1 T4.-93 I ON I [5:199] j AUTO OFF i PULSE j AUOFPULSE I T4:283 i I I I Rung #229 PALLET PALLET AUTO DETECTED DETECTED MODE RIGHT SIOE LEFT SIDE DOOR 3 CLOSE ENABLE HEATER 1 HEATER 2 CLOSES DOOR 3 AUTO SEN9 SEN10 DRCL3S DRCL3 N7:37 1:003 1:003 1:006 0:011 l/l l/h- — \l\— < )— I ' ■ 10 11 04 04 I I (158) 0:011/04 - — - - File . FAULTS - 21 File #6 TECH_RUNGS - 2 ( MANUAL PALLET PALLET 1 N7:32/V - -<L>- File #2 HAIH_PRG«H - 216 IDOOR 3 DETECTED DETECTED _F:N7:2HX21 - BTU - File #2 HAIH_PRG«H - 2 'OPEN | VENT AREA LEFT SIDE RIGHT SIDE I N7:31/13 - -iυy- - File #2 MAIH_PRGRM - 216 IMDR30P | 2 ENABLE HEATER 1 HEATER 1 I F:N7:211J__1 - BTU - file #2 MAIH PRGRM - 2 < N7:32 I VENT2E SEN7 SEN9 — cu>— I »7:37 1:003 1:003 9 T- -I h 1 I 06 10 I Ml] I MANUAL PALLET PALLET <DOOR 3 DETECTEO DETECTED 'CLOSE I ILEFT SIDE RIGHT SIDE 'MDR3CL IHEATER 1 HEATER 1 N7:3 I RUMP AREA ISEN7 SEN9 — -X) — 2 ENABLE 1:003 1:003 I PUMP 2E /|— i/| *7:37 06 ιo 14 ι [438] PREPARE FOR IAUTO RUN |>AUTO i I 117:37 I ' H r- I I ι [162] i IMANUAL ICONTRO. i ICLOSE DOOR PALLET AT I3 DOOR 3 M-DRCLI PLT_DR3 h7 • : S3 /—— 2fc6 [228] V>\ Rung #231 PALLET .nUET PAUSE AUTO DETECTED DETECTED PALLET IN MODE DOOR 4 RIGHT SIDE RIGHT SIDE DUELL 1 HOTOR 7 MOTOR 7 ENABLE OPEN HEATER 2 DUELL 1 HOTOR 7 REVERSE FAST AUTO 0ROP4S SEN12 SEN15 H7P01 H7R H7F N7-.37 1:006 1:003 1:003 B3 B3 0:012 TH -- —1 >- l/l l/μ- l/h- < )— 11 07 I 13 16 403 107 I 16 I1S81 I I [628] [574] I |PALLET IDETECTED jLEFT SIOE IPALLLET PALLET |DUELL 1 IDETECTED DETECTED |SEN13 |CENTER RIGHT SIDE I 1:003 |DUELL 1 DUELL 1 I-EN14 SEN15 14 1:003 1:003 _/_— 1,1 15 16 PALLET PALLET PALLET PALLET PAUSE DETECTED DETECTED DETECTED DETECTED PALLET IN RIGHT SIDE RIGHT SIDE LEFT SIDE RIGHT SIDE DUELL 1 DUELL 1 CHROME DUELL 2 DUELL 2 MOTOR 7 SEN15 SEN18 SEN19 SEN21 M7PD1 1:003 1:023 1:023 1:023 B3 I PALLE DETEC LEFT CHROME SEN16 1:023 00 MANUAL MOTOR 7 ON MH70N N7:23 5 [517] 0:012/16 - — — ■ File t~ ~ FAULTS - 3 -j/l- - File #2 MA!H_PRGRM - 232 -( )- • File *2 HAIH_PRGRH - 231 T4:207.TT - -j - File #2 MAIH PRGRM - 230 Rung £232 I MOTOR 7 IMOTOR 7 FAST STOP IFAST PULSE |M7F M7FSP ] 0:012 ι — TON . I TIMER ON DELAY I — CE 16 JTIMER: T4:227; I [231] IBASE (SEC): 0.01 HO j PRESET: 1001 ACCUH: 0' I T4:227.T1 - — - - File #2 MAIH PRGRM - 23C z$z JTIHER ON DELAY |~( 06 |TIMER: T4:267| I [2333 |BASE (SEC): 0.01 (—( j PRESET: 100 | |ACCUM: 0| I ■ T4:267.TT - - - File *2 MAIH PRGRM - 23C zs^ Z A Rung #238 TURN OH CHRO PALLET PALLET HI POWER TO I AUTO DETECTED DETECTS SECT 3 t 4 j MODE HOTOR 7 MOTOR 8 RIGHT SIDE LEFT SIDE TUCK DELAY SLOU FAST DWELL 1 CHROHE CHROHE UATER OK LATCH I AUTO M7S H8F SEH15 SEN16 CHR-OK HIPRCHR-3.4- j N7:37 0:013 0:012 1:003 1:023 B3 S3 I i i (L> I 1 06 17 16 00 277 263 1 11581 [2331 [249] (725) B3/263 H h - F i le #2 HAIH_PRGRH - 239 -u>- - F i le #2 HAIH_PRGRH - 238 _<U)- - Fi le #2 HAI H PRGRH - 240 Rung #239 ITURN ON CHROHE READY TO TURN IHI POWER TO HI POWER TO JSECT 3 & 4 CHROHE SECT 3 |TIHER DELAY I 4 WHEN PALLET jLATCH 3 LEFT SIOE CHR |HIPRCHR-3,4-LAT HIPRCHR-3.4-0LY I B3 ι—TON ! ' I ^TIMER ON DEUY j- 263 |TIHER: T4:300| | [238] |BASE (SEC): 0.01 [—( |PRESET: 30O| lACCUM: 0) T4:300.Di. - -| |- - File #2 HAIH_PRGRM - 240,241 Rung =240 ι TURN ON CHROM j READY TO TURN HI POWER TO j HI POWER TO SECT 3 & 4 CHROME SECT 3 TIMER DELAY £ 4 LATCH HIPRCHE-3.4-DLY HIPRCHR-3,4- -L T4 :300 B3 1 i , (U)- DN 263 [239] B3/263 ! - File #2 MAIH_PRGRM - 239 -U>- - File #2 HAIH PRGRM - 23£ CHROME UATER OK CHR-OK S3 1/) 277 [725] AUTO OF PULSE AUOFPULSE T4:283 TT [155] Rung #241 IREADY TO TURN HI POUER TO jHI POWER TO CHROME SECT jCHROME SECT 3 3 ft 4 LATCHED |HIPRCHR-3,*.-DLY HIPRCHR3.4-L T«:300 83 (L) DM 266 1 12391 B3 266 - - - Fi le #2 MAIH_PRGRM - 242 -<L)- - f i le #2 MAIH_PRGRH 241 7Sb Rung #244 IPALLET PALLET JOETECTED DETECTED j EFT SIDE RIGHT SIDE jHEATER 2 HEATER 2 CHROHE TI |SEN10 SEH12 CHR_THR I 1:003 1:003 ~T4 :71 1 I [RES] I 11 13 T4:71 - RTO - File #2 MAIH_PRGRM 246 RES - File #2 HAIH_PRGRH 244 Rung #245 IPALLET PALLLET PALLET IDETECTED DETECTED DETECTED |LEFT SIDE CENTER RIGHT SIDE |DWELL 1 DWELL 1 DWELL 1 CHROHE COUN |SEN13 SEN14 SEN15 CHR_CNT I 1:003 1:003 1:003 63 I 1 h- -. r- (L> | 14 15 16 90 B3/90 - -j (- - File #2 HAIH_PRGRM 246 -ex.- - File #2 HAIH_PRGRM 245 -(U)- - File « HAIH_PRGRH 2i7 Rung #246 |CHROHE COUNTER CHROME TIMER |CHR_CNT CHR MR i " B3 RTG HRETENTIVE TIMER ON|-( I 90 |TIMER: T4:71| I [2451 |BASE (SEC): 1.0j-( |PRESET: 1000) ACCUM: 2| T4:71 - RTO - File #2 MAIH_PRGRM - 2-ε RES - File #2 HAIH_PRGRM - 2,4 Rung #247 IPALLET PALLET PALLET IDETECTED DETECTED DETECTED |LEFT SIDE CENTER RIGHT SIDE IDWELL 2 DWELL 2 DWELL 2 CHROHE COUNT |SEN19 SEN20 SEN21 CHR_CHT I 1:023 1:023 1:023 S3 I I (U) ; 03 04 05 90 B3/90 - -i I File #2 HAIH_PRGRM - 246 -(D- - File #2 HAIH_PRGRM - 245 -(U>- - File #2 MAIH PRGRM - £47 Rung #248 MOTOR 8 MOTOR DRIVE MOTOR 8 SLOU PULSE PULSER INTERRU M8FP MDP M8I T4-.208 B3 0:01 ( > TT 299 07 [249] [14] MOTOR 8 FAST STOP PULSE M8FSP T4:228 TT [250] MOTOR 8 SLOU STOP PULSE M8SSP T4:268 l_ TT [2513 2- % C2 MANUAL MOTOR S ON MM80N N7:2_ 6 [518] MOTOR 8 REVERSE M8R B3 | 108 ! [575] 0:012/17 - File #2 HΛ!H_PRGRM - 238 File #5 FAULTS - 4 -V I- File #2 HAIH_PRGRH - 250 -e )- File #2 HAIH_PRGRM - 249 0:013/07 -:/h File #2 HAIH_PRGRH - 251 -e )- File #2 HAIH_PRGRM - 249 T4 :208.TT - -I - File #2 HAIH PRGRM - 248 Rung #250 I HOTOR 8 IHOTOR S FAST STOP IFAST PULSE |H8F M8FSP I 0:012 I—TON 1 I 1 / , -|TIMER ON DELAY h(EN I 17 |TIMER: T4:228l I (249: |BASE (SEC): 0.01 (—(OH jPRESET: 100| lACCUM: 0( T4:228.TT - -| \- ■ Hie 02 HAIH PRC 248 Rung #251 HOTOR 8 HOTOR 8 SLOU STOP SLOU PULSE HβS H8SSP 0:013 r— TON , /I —(TIMER ON DELAT (-<£ 07 |TIHER: T4:268| 1249] |BASE (SEC): 0.01|-(D j PRESET: 00 j ACCUH: 0| T4:268.TT - -I * File * 2 **■* PRGRM * 248 Rung #252 MOTOR 9 HOTOR DRIVE HOTOR 9 FAST PULSE PULSER INTERRUP H9FP HDP H9I T4:209 B3 0:032 ( ) TT 299 00 C253] I [14] MOTOR 9 I FAST STOP I PULSE M9FSP T4:229 h TT • [254] MOTOR 9 ] SLOW PULSE I M9SP T4:249 TT [255] MOTOR 9 SLOU STOP PULSE M9SSP T4:269 [256: 0:032/10 - -( |- - File #5 FAULTS - . —j/l- - File #2 HAIH_PRGRM • 254 -( )- - File #2 HA1H_PRGRH - 253 T4:209.TT ' i- - File #2 MAIH_PRGR« 252 Rung #254 HOTOϊ . MOTOR 9 FAST STOP FAST PULSE M9F H9FS= 0:032 1 — O I/H- -| TIME? ON DELAT 10 ITIMES: T4:229 I [253] |BASE (SEC): 0.01 H D j PRESET: 100 lACO : 102 T4.-229.TT File #2 MAIH PRGRK - 252 Rung #255 PALLET PALLET PAUSE AUTO DETECTED OETECTED PALLET IN HOOE RIGHT SIDE RIGHT SIDE DUELL 2 MOTOR 9 ENABLE CHROME DUELL 2 MOTOR 9 SLOU AUTO SEN18 SCN21 H9P02 H9S N7:37 1:023 1 :023 B3 0:033 T l/l l/h- ( )— 11 02 05 404 00 C158) [628] |PALLET (DETECTED 0:033/00 - H h " F'lβ #2 HAIH_PRGRM - 249 | EFT SIDE H/h - file *2 HA1H_PRGRM - 256 MOTOR 9 |DWELL 2 T4:249.TT - _| H - File #2 HAIH_PRGRM - 252 SLOU PULSE |SEN19 M9SP | 1:023 I TON 1 1 h- M.TIHER ON DEUT HEN)- 1 03 |TIHER: T4:249| |BASE (SEC): 0.01H 0 ") jPRESET: 100| ACCUH: 0| HANUAL HOTOR DOOR 5 DOOR 6 9 ON OPEN OPEN HH90N 0ROP5S 0ROP6S N7:23 1:026 1:026 1 I 7 I oι 03 [519] I |PALLET IDETECTED |RIGHT SIDE |HEATER 3 jSEN24 | 1:023 1 l/l — 10 MOTOR 9 REVERSE H9R B3 109 [576] Rung #256 MOTOR 9 MOTOR 9 SLOU STOP SLOU PULSE H9S M9SSP 0:033 , — TON 1 7| TIMER ON DELAT h< EN > oo | T IHER: T4:269 | [255] | BASE (SEC) : 0.01 \--iW | PRESET : 100 j lACCUH: 100 | T4:269.TT 1 | Fi le #2 HΛIH_PRGRH 252 z File #5 FAULTS - 6 File #2 HAIH_PRGRM - 259 File #2 HAIH_PRGRM - 25S - File #2 HAIH PRGRM - 257 MOTOR 10 FAST STOP PULSE M10FSP , TON -4TIMER ON DELAT r -(E - |TIMER: T4:230| I (258] |BASE (SEC): 0.01 HD*' IPRESET: 100! |ACQJM: 102' T4-.230.TT - — μ - File #2 MAIH PRGRM - 257 File #5 FAULTS - 6 H/h- File #2 MAIH_PΪGRM - 264 -( )- - File #2 MAIH_PRGRM - 263 T4:211.TT - ~\ \- File #2 MAIH PRGRM - 262 Rung #264 MOTOR 11 IHOTOR 11 FAST STOP IFAST PULSE |M11F M11FSP I 0:032 I—TON I l/h HTIMER ON DELAY H E ")- ! 12 ITIMER: T4:231 I ([263] |BASE (SEC): 0.01 H H ) jPRESET: 100 |ACCUH: 100 T4:231.TT - —\ - - File #2 MAIH_PRGRH 262 £?r Rung #265 PALLET PALLET PALLET PALLET PAUSE AUTO DETECTED OETECTED DETECTED DETECTED PALLET IN HOOE RIGHT SIDE RIGHT SIDE LEFT SIDE RIGHT SIDE DUELL 3 MOTOR 11 ENABLE DUELL 3 MAGNETIC DUELL 4 DUELL 4 MOTOR 11 SLOU AUTO SEN27 SEN30 SEN31 SEN33 H11P03 M11S N7:37 1:023 1:037 1:037 1:037 B3 0:033 —I h- l/l — l/h— 1/| l/h- ( ) 11 13 02 03 05 405 02 [158] [628] |PALLET IDETECTED |LEFT SIDE IMOTOR 11 (MAGNETIC 'SLOU PULSE (SEN28 |H11SP j 1:037 . i TON 1 1 h- MTIMER ON DELAY \-im- 00 |T1MER: T4:251| |BASE (SEC): 0.01 (-(ON) |PRESET: 100j |ACCUM: 0| HANUAL HOTOR 11 ON HH110N N7:23 RGRK - 270,281 File #2 HAIH_PRGRM - 266 -( r- File *2 HAIH_PRGRH - 265 T4:251.TT - -' - - File #2 HAIH PRGRM 262 Rung # 266 MOTOR 11 |MOTOR 11 SLOW STOP |SLOU PULSE |M11S M11SSP j 0:033 .—TON I—l/h- -| TIHER ON DELAT H E N > I 02 ( TIMER : T4 :271 | | [265] [ BASE (SEC) : 0.01 |-< DK ) | PRESET : IOC ( |ACCUM : 1001 I T4:271.TT - - - F i le #2 HAI H PRGRM 262 Rung #267 i τ PCT/US92/00722 MAGNETIC 1 PALLET PALLET HI POUER J AUTO DETECTED DETECTED SECTIONS jnOOE MOTOR 11 RIGHT SIOE LEFT SIDE 1 AND 2 (ENABLE FAST DWELL 3 MAGNETIC HAG WATER OK LATCHED JAUTO H11F SEH27 SEN28 HAG X HIPRHAG1.2-LA I H7:37 0:032 1 :023 1:037 B3 B3 I 1 h l/f— (L) j 11 12 13 00 278 270 j t158] [263] [7263 85/270 - H h - File #2 HAIH_PRGRH - 268 File #2 KAIH_PRGRH - 267 -<U)- - File #2 MAIH PRGRH - 269 Rung #268 J MAGNETIC JHI POUER MAGNETIC j SECTIONS HI POWER |1 AND 2 SUPPLY 1 j LATCHED HAG WATER OK OUTPUT |HIPRHAG1,2-IAT HAG_OK HAGPS1 I 83 E3 0:033 j 1 | -, ( ) i 270 278 I • < • | 12671 _726_ |HAGNETIC 1 JHI POWER 0:033/14 - -| h - Fi le *6 TECH_RUNGS - 6 |SUPPLY 2 B3/833 - -| - - ?\ \.< «2 HAIH PRGRH - 620, 622 (OUTPUT I I- |HAGPS2 j 0:033 | ( ) I 15 JKIGH POUER [HAG 1 & 2 [TO THE FIX JHIHAG1,2 I B 3 I ( , 833 2G (1551 Rung #270 TURN ON MAG PALLET PALLET HI POUER TO AUTO DETECTED DETECTED SECT 3 AND 4 HOOE RIGHT SIDE LEFT SIDE MOTOR 11 MO OR 12 TIMER DELAT Z^ ° RES - Fi le #2 KAIH PRGRM - Rung #277 I PALLET PALLET PALLET j DETECTED DETECTED OETECTED [LEFT SIDE CENTER RIGHT SIDE HAGNETI [DUELL 3 DUELL 3 DUELL 3 TRANSIT [sEN2S SEN26 SEN27 HAG_TRA I 1:023 1:023 1:023 B3 (L) I 11 12 13 91 B3/91 - H \- - Fi le #2 HAIH_PRGRH - 275 -(D- - Fi le #2 HAIH_PRGRH - 277 -<U)- - Fi le #2 HAIH PRGRM - 27 Rung #278 | AGNETIC ITRANSIT HAGNETIC TIHER [MAG TRAN HAG_THR I _ B3 , — RTO 1 | 1 i HRETEHTIVE TIHER ON|-( E I 'I |TIMER: T4:72[ I T277 |BASE (SEC): 1.01—CD [PRESET: 1000| lACCUM: 79 T4:72 - RTO - File #2 MAIH_PRGRM 278 RES - File #2 HAIH PRGRM 276 Rung #279 I PALLET PALLET PALLET [DETECTED DETECTED DETECTED |LEFT SIDE HIDDLE RIGHT SIDE MAGNETI [DUELL 4 DUELL 4 DUELL 4 TRANSIT |SEN31 SEN32 SEN33 MAG_TRA I 1:037 1:037 1:037 63 (U) 03 04 05 91 83/91 - H h _ FU e *2 HAIH_PRGRH - 27ϊ -(L>- - Fi le #2 HAIH_PRGRH - 277 -(U)- - Fi le #2 HAIH PRGRH - 279 Rung #280 HOTOR 12 HOTOR DRIVE MOTOR 12 SLOU PULSE PULSER INTERRUP H12SP MOP M121 T4:212 B3 0:032 H h ( ) 299 [281] I [14] MOTOR 12 FAST STOP PULSE H12FSP T4:232 [282] HOTOR 12 SLOU STOP PULSE M12SSP T4:272 _ h TT 12833 Rung #281 PALLET PALLET AUTO DETECTED DETECTED HOOE RIGHT SIDE HOTOR 11 RIGHT SIDE MOTOR 12 MOTOR 12 ENABLE DWELL 3 SLOU DUELL 4 REVERSE FAST AUTO SEN27 M11S SEN33 M12R M12F N7:37 1 :023 0:033 1:037 B3 0:032 -r . — I h- 1/| — 1/| ( )— 11 13 05 112 13 [158] I [2651 I [579] PALLET DETECTED LEFT SIDE HAGNETIC SEN28 IHOTOR 13 IMOTOR 12 1:037 |SLOU |SLOW |H13S IM12S 00 0:033 i 0:033 I—( >— PALLET 04 1 03 DETECTED [287] RIGHT SIDE MAGNETIC SEN30 'MOTOR 12 1:037 ISLOW PULSE 1M12SP 02 —TON -TIMER OH DELAY |-(EN)- |TIHER: T4:212| |BASE (SEC) ; 0.011—(DH) I MANUAL HOTOR IPRESET: 100j | 12 ON IACCUH: 01 |MM120N i N7:23 r H 1 1522] |MOTOR 12 | REVERSE |H12R I B3 112 [579] 0:032/13 - -; ' r - File #2 MAIH_PRGRM - 270 File #5 FAULTS - 7 H/h • File #2 HAIH_PRGRM - 2S2 -( )- • File #2 HAIH_PRGRM - 281 0:033/03 - -\/ \- - File #2 HAIH_PRGRH - 283 File #2 HAIH_PRGRM - 281 T4:212.TT - H |- - File #2 HAIH PRGRM - 280 Rung #282 MOTOR 12 HOTOR 12 FAST STOP FAST PULSE M12F M12FSP IHOTOR 13 j SLOU PULSE |M13SP I T4:253 I TT | [287] IHOTOR 13 JSLOU STOP IPULSE |M13SSP I T4:273 I 1 I [288] τ MANUAL MOTOR DOOR 7 DOOR 8 13 ON OPEN OPEN MHIΪOli DROP7S DROP8S N7:23 1:042 1:042 I 01 03 [523] I IPALLET IDETECTED |RIGHT SIDE jBUFFER 3 |SEN36 I 1:037 I 1,| 1 10 0:032/14 • J L . ■ File #5 FAULTS - 8 H/h ■• File #2 MAIH_PRGRM - 286 ■ File 1-2 HA1H_PRGRM - 285 REVERSE M13R B3 113 [580] Rung #288 HOTOR 13 MOTOR 13 SLOU STOP SLOU PULSE M13S H13SSP ;/|_ -|TIMER ON OELAY <E 04 |TIHER: T4:273| [287] |BASE (SEC): 0.01 (— D |PRESET: 100| lACCUM: 102 T4:273.TT - -| j- - File #2 KAIH_PRGRM 284 r Z 3 2^ λ Rung #297 PALLET PALLET PAUSE AUTO DETECTED DETECTED PALLET IN HOOE RIGHT SIDE RIGHT SIDE DUELL 5 MOTOR 15 ENABLE DUELL 5 CARBON HOTOR 15 SLOU AUTO SEN39 SEK42 M15PD5 M15S N7:37 1:037 1 :053 B3 0:033 -ι l/l — l/h- 1 >- 11 13 I 02 407 06 [158] I [628] | PALLET IPALLET PALLET IDETECTED jDETECTED DETECTED | LEFT SIDE ILEFT SIDE RIGHT SIDE HOTOR 15 | CARBON jDUELL 6 CARBON SLOU PULSE | SEN40 ISEN43 SEN42 H15SP | 1 :053 I 1:053 1:053 l TON l_ L| TIHER ON DELAY hf^ -1 00 03 02 | TIMER : T4:255 | I BASE (SEC) : 0.01 f-(DN) J PRESET: 100 | J ACOJH: 100 | MANUAL MOTOR 15 ON HH150N N7:23 13 [525] MOTOR 15 DOOR 7 DOOR 8 REVERSE OPEN OPEN M15R DROP7S DROP8S B3 1 :042 1:042 -i—i t- —. h" 115 I oι 03 [582] I |PALLET IDETECTED |LEFT SIDE |DUELL 5 |SEN37 I 1:037 1 l/h- 11 0:033/06 - H _ File #2 HA1H_PRGRM - 299,300,306 H/h " File #2 HA1H_PRGRH - 298 -( )- - File #2 HAIH_PRGRM - 297 T4:255.TT - -I - ■ File #2 HAIH PRGRM - 294 Rung #298 I HOTOR 15 |MOTOR 15 SLOU STOP jSLOU PULSE |H15S M15SSP I 0:033 , TON _/i -|TIHER ON DELAY H EN I 06 |TIMER: T4:275| | (297] |BASE (SEC): 0.01 |-( 0N > |PRESET: 100| ACCUM: 0 T4:275.TT - -\ File #2 MAIH PRGRM 294 &-. z < & I 06 10 T4:73 - RTO - File #2 HAIH_PRGRH 303 RES - File #2 HAIH_PRGRH 301 Rung #302 |PALLET PALLET PALLET jDETECTED DETECTED DETECTED |LEFT SIDE CENTER RIGHT SIDE JOUELL 5 DUELL 5 DUELL 5 CARBON TRANSIT |SEN37 SEN38 SEN39 CAR_TRAN j 1:037 1:037 1:037 B3 I 1 I (L) I 11 12 13 92 B3/92 - H h " File #2 HAIH_PRGRM - 303 -(..)- - File #2 HAIH_PRGRH - 302 _(U>- - File #2 MAIH PRGRM - 304 Rung # 303 | CARBON TRANSIT CARBON TIHER | CAR_TRAN CAR_THR I B3 I—R O 1 HRETENTIVE TIHER ONh(EN 92 |TIHER: T4:73| | [302] |BASE (SEC): 1.0|-(DN I |PRESET: 1000j I ACCUM: 6 I T4:73 - RTO File #2 MAIH_PRGRM 303 RES File #2 MAIH_PRGRM 301 Rung #304 IPALLET PALLET PALLET jDETECTED DETECTED DETECTED |LEFT SIDE CENTER RIGHT SIDE jDUELL 6 DUELL 6 DUELL 6 CARBON TRANSIT |SEN43 SEN44 SEN45 CAR_TRAH I 1:053 1:053 1:053 83 I 1 I 1 I 1 I (U) I 03 04 05 92 83/92 - H h " File #2 HAIH_PRGRM 303 -(D- - File #2 HAIH_PRGRH 302 -(U)- - File #2 HAIH_PRGRM 304 Rung #305 MOTOR DRIVE MOTOR 16 PULSER INTERRUPT H16SP HDP M16I T4:216 B3 0:032 ( ) I TT 299 07 | [306] [14] | M16FSP T4 :236 I TT | [307] |H16SSP | T4:276 h"- J TT [308] Z% T4:236.TT - —\ \- - File #2 HAIH_PRGR, 305 Rung #308 HOTOR 16 HOTOR 16 SLOU STOP SLOU PULSE H16S H16SSP 0:033 I TON /I -| TIMER ON DELAY H EN 07 |TIMER: T4:276| [306] jβASE (SEC): 0.01 (DN) j RESET: 100| JACCUH: 0| T4:276.TT 1 I File #2 HAIH_PRGRM - 305 Rung #309 MOTOR DRIVE MOTOR 17 PULSER INTERRUPT H17FP HDP M17I T4:217 B3 0:062 ( ) TT 299 00 [310] [14] H17FSP T4:237 TT C311] H17SP T4:257 _— ! I — I TT (312] M17SSP T4:277 TT (313) VZ Z^ [586] I |PALLET IDETECTED [LEFT SIDE jEXBUFFER |SEN49 | 1:053 1 — \ι — 11 Rung #323 HOTOR 19 MOTOR 19 SLOU STOP SLOU PULSE H19S M19SSP 0:063 ,—TON I — i/l -|TIMER ON DELAY h< EN 02 |TIHER: T4:279| [322] |BASE (SEC): 0.01 (DN ) JPRESET: 100 lACCUH: 101 T4:279.TT - -\ μ - File #2 MAIH_PRGRM - 319 z^s ^s Rung #314 HOTOR DRIVE HOTOR 18 PULSER INTERRUPT H18FP HDP H18I T4:218 B3 0:062 T TT 299 01 [315] [14] H18FSP T4:238 TT [316] H18SP T4 :258 H I — I TT [317] H18SSP T4:278 TT [318] ZS> |—(DN) PULSE H18FSP i—TON -| TIHER ON DEUY H EK |TIHER: T4:238| I [315] |BASE (SEC): 0.0 h(0N) IPRESET: 100 j |ACCUH: 1021 T4:238.TT 1 h " F » ' le #2 HAIH_PRGRH - 314 ZS i Rung #317 MANUAL HOTOR DOOR 9 DOOR 10 MOTOR 18 18 ON OPEN OPEN SLOU __<180N DR0P9S DROPlOS H18S N7:24 1:056 1:056 0:063 I 01 03 01 1528] I I PALLET 0:063/01 |/μ - File tZ HAIH_PRGRH - 318 j DETECTED T4:258.TT - -| - File #2 HAIH_PRGRH - 314 | RIGHT SIDE HOTOR 18 | BUFFER 4 SLOU PULSE | SEN4fi M18SP | 1 :053 ι—TON 1 1/| — HTIMER ON DELAY μ(EN)- 1 | 10 |TIMER: T4:258| | |BASE (SEC): 0.0iμ<DN) j jPRESET: 100| | IACCUM: 0 | HOTOR 18 REVERSE I H18R B3 118 [585] Rung #318 MOTOR 18 I HOTOR 18 SLOU STOP I SLOU PULSE M18S M18SSP 0:063 i—ON 1 : I — 1/| -'TIMER ON OELAY h(EN)-| 01 |TIHER: T4:278| \ [317] |BASE (SEC): 0.01μ<DN) | jPRESET: 100| j |ACCUH: 101j j i 1 i T4:278.TT - —\ μ - Fi le #2 MA1H_PRGRM - 314 Rung #319 MOTOR DRIVE MOTOR 19 I PULSER INTERRUPT j H19FP HDP M19I | T4:219 B3 0:062 | T— i I — i 1 I ( ) , TT 299 02 : [320] [14] M19FSP T4:239 H I — I TT D21] M19SP T4:259 TT D22] M19SSP T4:279 I — ' TT [323] Z3 CJ_ -( )- - File #2 HAIH_PRGRH - 320 T4:219.TT - -\ μ - File #2 HAIH_PRGRM - 319 Z33. Z - Z3.T " Z.36 File #6 TECH_RUNGS - 3 -( )- - File #2 MAIH_PRGRH - 326 H7:33/0 - -CD- - File #2 HAIH_PRGRH - 326 -ill.- - File #2 HAIH PRGRH - 335 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 N7:32/4 - -<L_- File #2 HAIH_PRGRH - 335 -<U)- File #2 HAIH PRGRM - 326 z > - zs> 733 3oo 2- MOTOR 20 MOTOR 20 SLOU STOP SLOW PULSE M20S H20SSP 0:063 i — TON — 1/| — -\ TIMER ON DELAY μ(EN 03 |TIMER: T4:280| [333] |BASE (SEC): O.OiμiDN IPRESET: 1001 |ACCUM: 101| T4-.280.TT - H μ - File #2 MAIH_PRGRH - 330 3ol 3o3 Rung #336 PALLET PALLET PALLET IN DETECTED DETECTED CENTER RIGHT SIDE LEFT SIDE PALLET AT EXBUFFER EXBUFFER EXIT LOCK DOOR 11 SEN50 SEN51 SEN52 PLT_D 11 1:053 1:053 1:053 B3 ( ) 1 12 13 14 300 |PALLET B3/300 - H/h * File #2 HAIH_PRGRH - 337 IDETECTED jCENTER |EXIT LOCI. |SEN53 I 1:053 l_ 15 DL^ Rung #337 PALLET PALLET PALLET PALLET PALLET AUTO DETECTED DETECTED DETECTED DETECTED DETECTED HOOE RIGHT SIDE LEFT SIDE RIGHT SIDE LEFT SIOE RIGHT SIDE DOOR 11 CLOSE ENABLE EXLOCK EXBUFFER EXBUFFER EXIT LOCK EXLOCK CLOSED DOOR 11 AUTO SEN54 SEN49 SEN51 SEH52 SEN54 DRCLllS DRCL11 N7:37 1:053 I:053 I:053 1:053 1:053 1:056 0:061 1 I |/h- ( )— 11 16 I 11 13 14 16 04 04 [158] |PALLET PALLET IPALLET PALLET |HANUAL IDETECTED DETECTED jDETECTED DETECTED jCONTROL HANUAL jLEFT SIDE RIGHT SIDE |LEFT SIDE RIGHT SIDE |CLOSE DOOR PALLET AT DOOR 11 |EXBUFFER EXBUFFER IEXIT LOCK EXLOCK |11 DOOR 11 OPEN PREPARE FOR |SEN49 SEN51 |SEN52 SEN54 |M-DRCL11 PLT_0 11 MDR110P AUTO RUN | 1:053 1:053 j 1:053 1:053 | N7:11 B3 N7:33 >AUTO i 1,| 1,| I 1, | 1 / | ' 1 I l/h- U)— N7:37 11 13 14 16 5 300 1 (3] [336] [162] |HANUAL |D0OR 11 |CLOSE |HDR11CL | N7:32 VENT I CD— EXIT LOCK 5 VNTEX N7:27 [688] PUMPDOWN EXIT LOCK CLEAN CYCLE PO-EX-CC B3 I 1 i 497 [692] MANUAL CONTROL CLOSE DOOR PALLET AT 11 DOOR 11 H-DRCL11 PLT_DR11 N7:11 B3 1 I — l/h- 5 300 [3] [336] 0:061/04 - H \- - f i le ifS FAULTS - 37 Fi le #6 TECH_RUNGS - 3 -C )- - Fi le #2 HAIH_PRGRM - 337 _F :N7:211S21 - BTU - Fi le #2 HAIH_PRGRH - 2 F :N7:21 l 21 - BTU - Fi le #2 HAIH PRGRM - 2 Rung #338 EXIT LOCK AUTO AUTOPULSE EXLK_AUTO .4:282 B3 (D TT 345 [1581 83/345 - H μ File #2 MAIH PRGRM - 340, 353 -(U)- File #2 MAIH PRGRM - 339 COMPUTER AUTO SIGNAL FOR MODE AUTO HOOE ENABLE OK AUTO COHPAUTO N7:37 N7:16 M h 11 [158] [3] Rung #339 VENT-PUMP CYCLE EXIT EXIT LOCK LOCK AUTO VNT-PO-EX EXLK_AUTCι N7:27 B3 3o£ Rung #340 OPEN KECnnNICAL OPEN ROUGHING EXLOCK PUHP 3 EXLOC VALVES CHAHSER OOOR 12 ISOLATION ROUGH 1->5 VENT VALVE CLOSED VALVE OPEN VALVE 0P_RV1->5 CVS 0RCL12S HP3IVOP RVS S3 0:057 1 :056 1:055 0:06 l/l — — I _- ( ) 309 10 01 16 06 14 12 [104] [100] (3461 PALLET DETECTED EXIT LOCK DOOR 11 DOOR 12 RIGHT SIDE AUTO CLOSED CLOSED EXLOCK EXLK_AUTO DRCL11S DRCL12S SEN54 83 1 :056 1:056 1:053 1 r- 1/| — 345 04 06 16 [339] PUMPDOWN EXIT LOCK CLEAN CYCLE PO-EX-CC E3 497 [692] PUMP DOUN EXIT LOCK PDEX H7: 27 10 [698] EXI T SUFFER CHAMBER =<250 MICRONS PIR15 1 :040 -f (507) :060/12 H μ - File #2 MA1H_PRGSM - 341 File #5 FAULTS - 175 File #6 TECH_RUNGS - 0 H/μ - File #5 FAULTS - 177 -< )- - File #2 HAIH PRGRM - 340 3c r 3o^ Rung #347 I OPEN IAUTO EXLOCK IHOOE CHAfβER PAUSE EXIT LOCK IENABLE VENT VALVE DISABLE VENT TIHER jAUTO CV5 TS12 EXVNTTIHER N7:37 0:057 N7:16 , TON H h |/r- -| TIHER ON DELAY H E 11 16 4 |TIHER: T4:99| I [158] [346] D] |BASE (SEC): 1.0μ(D JPRESET: 100| ACCUH: 0 14:99. DN - - (- - File #2 HAIH PRGRH 345 Rung #348 EXIT LOCK VENT>30 SECS lEXVNTTIHER EXLKVNT>30SEC T4:99 B3 CD |DR0P12S EXSUEEP | 1:056 0:061 I ( ) 07 10 3 Rung #351 EXLOCK PALLET PALLET CHAMBER EXLOCK AUTO DETECTED DETECTED ROUGH PAUSE CHAHBER DOOR OPEN HOOE DOOR 11 RIGHT SIDE RIGHT SIDE VALVE LATCH DOOR 12 PRESSUR AT SOLENOID ENABLE CLOSED EXLOCK EXIT END CLOSED ENABLE OPEN ATHOSPHERE 12 ENABLE AUTO DRCL11S SEN54 SEN57 RVS9 PLE DROP12S PS6 DROP12 N7:37 1 :056 1:053 1:054 1 :052 N7:37 1 :056 1:052 0:061 1 I — 1/| — 1 h- — |/ h- — |/h- ( ) 11 04 16 17 16 3 07 04 07 [158] [6251 MANUAL CONTROL HANUAL OPEN DOOR DOOR 12 12 OPEH VENT 5 M-DROP12 MDR120P STAGE 1 N7: 12 N7:33 V5ST1 l_ -i (L)— B3 I 2 I — I h- [3] I 420 I [432] IMANUAL |DOOR 12 ICLOSE EXLOCK |HDR12CL VENT-PUHP CHAMBER I N7:32 CYCLE EXIT THREE CYCLES PRESSUR AT : (U)— LOCK COMPLETE ATMOSPHERE 6 VNT-PO-EX EX-CCC PS6 ] N7:27 C5 : 11 1 :052 I 1 | 9 04 [690] [696] MANUAL CONTROL OPEN DOOR 12 M-DROP12 N7: 12 [3] 0:061/07 - H μ - File #5 FAULTS - 63 -( )- - File #2 HAIH_PRGRM - 351 V7:33/2 - -(D- - File #2 HAIH_PRGRM - 351 -CU)- - File #2 HAIH PRGRH - 353 _F:N7:211S21 - BTU - File #2 MAIH_PRGRM - 2 K7:32/6 - -CD- - File #2 HAIH_PRGRM - 353 -CU)- - File #2 HAIH_PRGRM 351 F:N7:21IX21 - BTU - File #2 MAIH PRGRH Rung #352 PALLET PALLET PALLET DETECTED DETECTED DETECTED CENTER RIGHT SIDE LEFT SIDE PALLET AT EXIT LOCK EXLOCK EXIT END DOOR 12 SEN53 SEN54 SEN55 PLT_DR12 1:053 1:053 1:053 B3 1 h 1 r— ( ) I 15 16 17 314 |PALLET B3/314 - H/h File #2 MAIH PRGRM - 353 IDETECTED jCENTER |EXIT END |SEN56 | 1:054 16 SOLENOID12 ENABLE DRCL12 0:061 c ) I 06 | MANUAL j CONTROL MANUAL | CLOSE DOOR PALLET AT DOOR 12 | 12 DOOR 12 OPEN | H-DRCL12 PLT_DR12 MDR120P I N7: 11 B3 N7:33 L. l/h- CU)— 314 2 .3] [3521 |MANUAL |DOOR 12 CLOSE 3J3 |HDR12CL I I N7:32 I 6 0:061/06 - H h * f ' le «5 FAULTS - 39 File #6 TECK_RUNGS - 3 -( )- - File #2 MAIH_PRGRH - 353 N7:33/2 - -CD- - File #2 HAIH_PRGRM - 351 -CU>- - File #2 HAIH_PRGRH - 353 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRM - 2 N7:32/6 - -CD- - File #2 HAIH_PRGRH - 353 -CU)- - File #2 HAIH_PRGRH - 351 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 Rung #354 HOTOR DRIVE MOTOR 21 PULSER INTERRUPT H21FP HOP H21 I T4:221 B3 0:062 —I I — ι 1 I ( ) I TT 299 04 | [355] [14] |M21FSP I T4:241 I T | [356] | M21SP | T4:261 I— I h- I TT | [357] | M21SSP j T4:281 • H I — ' TT [358] ^ 0:062/14 . _J μ . File #5 FAULTS - 14 H/h - File #2 HAIH_PRGRM - 356 -( )- - File #2 HAIH_PRGRM - 355 T4:221.TT - -\ \- ■ File #2 MAIH PRGRH - 354 Rung #356 I MOTOR 21 I MOTOR 21 FAST STOP FAST PULSE M21 F M21FSP 0:062 ,—TON | 1 / | HTIHER OH DELAY h< EN 14 |TIHER: T4:241| [355] |BASE (SEC): 0.01 H DN > jPRESET: 100| ACCUH: 102| T4:241.TT - -\ μ - File #2 HAIH_PRGRH - 354 HOTOR 21 E ) DN) 3λG Rung #359 THE PALLET COUNTER PALLET (PALLET IN OETECTED PALLET ICENTER RIGHT SIDE COUNTER (EXBUFFER EXBUFFER LATCH (SEN50 SEN51 PALCNT I 1:053 1:053 83 1/| — CD— I 12 13 100 B3/100 - H File #2 HAIN_PRGRH - 361,363,364 -(D- File #2 HAIH_PRGRM - 359 -(U)- File #2 HAIH PRGRM - 360 Rung #360 THE PALLET COUNTER |PALLET (DETECTED PALLET (RIGHT SIDE COUNTER (EXBUFFER LATCH (SEN51 PALCNT i 1:053 B3 I 1 I (U)— I 13 100 B3/100 - -j μ - File #2 HAIH_PRGRH 361,363,364 -(D- - File #2 HAIH_PRGRM 359 -CU)- - File #2 HAIH PRGRM 360 Rung #361 IPALLET jCOUNTER PALLET jLATCH COUNTER iPALCNT PCOUNT I 83 I—CTU— 1 HCOUNT UP μ(cu) | 100 |COUNTER: C5:16| I [360] JPRESET: 10000μ(DN) I |ACCUM: 90| I I I C5:16 - CTU - File #2 MAIH_PRGRM 361 RES - File #2 MA1H_PRGRM 362 Rung #362 I INCREMENTAL |PALLET COUNTER PALLET |RESET COUNTER |1NC_CNT-RST COUNT I ~ B3 C5:16 [RES] | 526 C5:16 - CTU - File #2 MAIH_PRGRM - 361 RES - File #2 HAIH_PRGRM - 362 Rung #363 IPALLET NON-RESETABLE ICOUNTER PALLET COUNTER jLATCH A jPALCNT NRSTCNTR_A I B3 I—CTU I HCOUNT UP μ(CU)- I 100 ICOUHTER: C5:17| 1(360] |PRESET: lOOOt- DO jACCUH: 889j C5:17 CTU - File #2 HAIH_PRGRH - 363 RES - File #2 MAIH PRGRH - 365 C5:17 - CTU - File (.2 HAIH_PRGRM - 363 RES - File #2 HAIH_PRGRM - 365 C5:17.DH - H h * 'l #2 HAIH_PRGRH - 364 Rung #366 EXLOCK CHAHBER PRESSUR AT CHAHBER VENT 5 ATHOSPHERE CLOSE DELAY PS6 CV5_DLY 1:052 i — TON -(TIHER ON DELAY μ(EN) 04 jTIHER: T4:329| |BASE (SEC): I.OμCDN) T4 :329.DN 1 μ - F i le #2 HAI H_PRGRM - 367 IPRESET: 1| |ACCUM: 0J I | λ 3A3 VENT ENABLE 1 ENABLE 2 ENABLE 3 ENABLE 4 ENABLE 5 ENABLE ENABLE ENABLE TS13 POSE PUMP1E PUHP2E PUHP3E PUHP4E PUHP5E AUTO SYSVNTE N7:16 B3 N7:37 N7:37 N7:37 N7:38 N7:38 N7:37 N7:37 M h- l/h- l/h- |/h- l/h- |/h- — i/h- — | /h- (D— 5 303 13 14 15 o0 ι1 11 5 D) [231 [4341 [438] [442] [4471 [451] [158] N7:37/5 - H h " File t MAIH_PRGRH - 34,35,36,37,43,46,47,48,49,110,111,112,113,114,200,216,324,326,327,370,391 H/h- File #2 HAIH_PRGRM - 23,115,117,118,119,120,121,122,123,124,125,126,127,128,129,130,131,132,133,134,135,136,137 138,375,376,377,378,434,438,442,447,451 -(D- - File #2 MAIH_PRGRH - 369 -CU)- - File *2 MA1H_PRGRM - 368 F:N7:21IX21 - BTU File #2 HAIH PRGRH - 2 3^o > Rung #373 MANUAL HAGNETIC CONTROL CHAMBER OPEN RGA RGA VALVE =<250 ISOLATION 3 OPEN HICRONS VALVE 3 M-RGAV3-1 PIR11 RGA 3 N7:7 1:040 0:044 T (D 7 07 13 (31 0:044/13 - -\ (- - File #6 TECH_RUNGS - 7 ( MANUAL RGA -(U>- - File #2 HAIH_PRGRH - 36 I VALVE 3 N7:28/7 - -(U)- - File #2 HAIH_PRGRH - 36 | OPEN _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 |MRGAV30P N7:30/3 (D- - File #2 HAIH_PRGRH - 36 N7:28 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 (D 7 MANUAL RGA VALVE 3 CLOSE MRGAV3CL N7:30 (U) 3 Rung #374 MANUAL EXIT BUFFER CONTROL CHAMBER OPEN RGA RGA VALVE =<250 ISOLATION 4 OPEN HICRONS VALVE 4 M-RGAV4-1 PIR15 RGAV4 N7:7 1:040 0:060 CL) 13 13 C3] 0:060/13 - H h * f i l # TECHJiUNGS - 7 | MANUAL RGA -(U)- - File #2 HAIH_PRGRM - 37 | ALVE 4 N7:28/8 - -(U)- - File #2 HAIH_PRGRM - 37 | OPEN _F:N7:21IX21 - BTU - File #2 MA1H_PRGRM - 2 ( MRGAV40P N7:30/4 - -CD- - File #2 HAIH_PRGRH - 37 | N7:28 F:N7:21IX21 - BTU - File #2 MAIH PRGRH - 2 | CL) I 8 | ANUAL RGA I VALVE 4 CLOSE | MRGAV4CL ! N7:30 ' U) 1 Rung #375 OPEN HEATER 1 CAPACITANC CHAMBER SYSTEM MANOMETER =<250 VENT AREA VENT I SOLATION MICRONS 1 ENABLE ENABLE VALVE 1 PIR2 VENT1E SYSVNTE CHV1 1:004 N7:37 N7:37 0:010 I — I h- l/h- |/h- C ) 10 6 5 06 [405] [369] O:010/06 H h * 'l #ά TECH_RUNGS - 7 H/h " file #2 MΛIH_PRGRM - 389,409 -( )- - File #2 MAIH PRGRM - 375 12 Rung #380 OPEN MANUAL CONTROL GAS FLOU GAS FLOU VALVE ISOLATION 2 OPEN VALVE 2 G-GF2-1 GF2 N7:10 0:010 (D 10 [3] I 0:010/10 - -(U)- - File #2 HAIH_PRGRM - 39 (MANUAL GAS N7:31/0 - -(U)- - File #2 HAIH_PRGRH - 39 |FLOU I V 2 _F:N7:21l%21 - BTW - File #2 HAIH_PRGRH - 2 |OPEN N7.-30/8 - -(D- - File #2 HAIH_PRGRM - 39 |HGFIV20P F:N7:21l_-_1 - BTU - File #2 MAIH PRGRH - 2 j N7:31 | (D I o |MANUAL GAS jFLOU I V 2 |CLOSE |HGFIV2CL | N7:30 1 (U) 8 MANUAL 32 BASE : Rung #385 MANUAL CONTROL GAS FLOU GAS FLOU VALVE 7 ISOLATION OPEN VALVE 7 H-GF7-1 GF7 N7:10 0:060 (D 07 β] 0:060/07 - H I File *2 HAIH_PRGRM - 156 -(U)- - File #2 HAIH_PRGRM - 44 HANUAL GAS N7:31/5 - -<U)- - File #2 HAIH_PRGRH - 44 _F:N7:21IX21 - BTU - File #2 HA!H_PRGRH - 2 PREPARE FOR GAS FLOU 7 N7:30/13 - -<l>- - File #2 MAIH_PRGRM - 44 AUTO RUN LATCH ONS F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 >AUT0 GF70NS K7:37 B3 l_ [ONS] 180 [162] 13 3zr& Rung #387 OPEN OPEN CRYO ROUGH CRYO ROUGH 1->6 VALVE 5 VALVE 6 CLOSED CR5 CR6 CR1 ->6_CL 0:027 0:027 B3~ 1/| l/l ( ) 12 13 381 β: 166] [3: 168] DUELL 6 CHAHBER GATE VALVE BASE Rung ALL CAP. ALL RGA MANOMETER CRYO CRYO ISYSTEH ROUGH ISOLATION ISOLATION VALVES VALVES ALL HI AC jVENT VALVES VALVES VALVES 1->6 7->12 GATES READY TO IENABLE CLOSED CLOSED CLOSED CLOSED CLOSED CLOSED VENT jSYSVNTE RVCL RGACL CHIV_CL CR1->6_CL CR7->12_CL HVGC RTOVENT I N7:37 B3 B3 B3 B3 B3 B3 B3 I — i i — i h- 1 h- ( ) | 5 310 305 380 381 382 150 379 | [369] [66] [63] [389] [387] [388] [390] 83/379 - H h " Fi le #2 MAIH_PRGRH - 392 -( )- - Fi le #2 HAIH PRGRH - 391 -( )- - Fi le #2 HAIH ~PRGRM - 391 Rung #392 I READY TO VENT | READY TO CHAHBER VENT |VENT DELAY TIMER JRTOVENT RTVCVDT | 83 I — TON | 1 i -\ TIHER ON DEUY h EN H I 379 JTIHER: T4:0| I [391] |BASE (SEC) : 1.0(-CDN) I PRESET: 5 | j ACCUH: 0| T4:0.DN - H r- - Fi le #2 MAIH_PRGRH - 173,346,394,401,403 Rung #393 |VENT 2 VENT 2 STAGE1 jSTAGE 1 DELAY TIMER |V2ST1 V2DYTMR I 83 i—TON I I h ■ (TIMER ON DELAY |-( EM H | 414 JTIHER: T4:19| I [416] |BASE (SEC): 1.0|-(DN) IPRESET: 5| IACCUM: 0 T4:19.DN - H h * F i le 2 HAIH_PRGRH 394 33Λ BASE Rung #394 DUELL 1 DUELL 2 HEATER 3 CHAMBER CHAHBER CHAMBER READY TO GATE VALVE GATE VALVE GATE VALVE VENT CLOSED CLOSED CLOSED POLYCOLD COOL VENT 2 REQUEST RTVCVDT HV3S1 HV4S1 HV5S1 PC_COOL VNT2_R Q ST T4:0 1 :004 1 :022 1 :024 0:074 B3 — — l/l < ) 03 06 00 11 164 [400] 1 h 12 I oo [3] I |DOOR 4 |CLOSED |DRCL4S | 1:006 h- 06 63/164 - -| | F Ue #2 HAI H_PRGRM - 395,396 -( )- - F Ue #2 HAIH PRGRM 394 BASE : Rung #395 I POLYCOLD POLYCOL jVENT 2 REQUEST SETPOINT HIGH DEFROST |VNT2_RQST PCSPH PCOEF j B3 1:002 0:074 I 1 I 1, | (D I 164 01 12 | [394] 0:074/12 - H h " F i le #2 HAIH_PRGRH - 399 H/h - FUe #2 HAIH_PRGRH - 400 -(D- - FUe #2 HAIH_PRGRH - 395 -(U)- - Fi le #2 HA1H_PRGRH - 398 COMPARE : Rung #394 DWELL 1 DUELL 2 HEATER 3 CHAHBER CHAHBER CHAHBER READY TO GATE VALVE GATE VALVE GATE VALVE POLYCOL VEHT CLOSED CLOSED CLOSED DEFROST RTVCVDT HV3S1 HV4S1 HV5S1 PCOEF T4:0 1:004 1:022 1:024 0:074 T- . 1 h- 1 I — (D DN 03 00 00 12 β92] 0:074/12 H h * ile *2 HAIH_PRGRH 399 H/h " fUe #2 HAIH_PRGRH 400 -CD- - File #2 MAIH_PRGRH 395 -(U)- - File #2 MAIH PRGRM 398 CHAMBER VENT ENABLE DELAY V2DYTMR T4:19 DN [393] HANUAL CONTROL HEATER 2 CHAHBER CHAMBER VENT 2 GATE VALVE OPEN CLOSE M-CV2-1 HV2S1 N7:6 1:004 12 | 00 I |DOOR 4 |CLOSED |DRCL4S ( 1:006 06 BASE : Rung #396 POLYCOLD VENT DELAY VENT 2 REQUEST SETPOINT HIGH TIHER VNT2_R0ST PCSPH VNTDLYTHR B3 1:002 I H TIMER ON DELAY (-(EN 164 01 TIMER: T4:80| [394] BASE (SEC): 1.0(-(DN PRESET: 5| ACCUM: oj I T4:80.DH - ~\ \- File #2 MA1H_PRGRH - 397 COMPARE : Rung #395 POLYCOLD VENT DELAY DEFROST TIHER PCOEF VNTDLYTHR 0:074 , TON -|TIHER ON DELAY h< EN 12 |TIMER: T4:80| [395] |BASE (SEC): 1.0(-(DN) JPRESET: 180j jACCUM: oj T4:80 - TON - File #2 MA1H_PRGRM - 396 T4:80.DH j |- - File #2 MAIH_PRGRM - 397 33^ -(U>- - File #2 HAIH PRGRH Rung #397 POLYCOLD JSETPOINT HIGH DEFROST JPCSPH PCOEF j 1:002 0:074 I 1 i I oι 12 0:074/12 - -\ \- - File #2 HAIH_PRGRM 395,398 H/h- File #2 MAIH_PRGRH 399 -(D- - File #2 MAIH_PRGRM 394 -(U)- - File #2 HAIH_PRGRH 397 Rung #398 IPOLYCOLD WATER POLYCOLD POLYCOLD |0H DEFROST COMPRESSOR ON |PC_H20 PCOEF PCCOHP I ~ 1:066 0:074 0:074 ~r ( ) 10 I 12 10 | β97] | POLYCOLD COOL | PC_COOL 0:074 11 [399] POLYCOLD COOL PC_COOL 0:074 0 I 00 0:074/11 - H h * f ile #2 MAIH_PRGRM - 398 -( )- - File «2 MAIH PRGRM - 399 Rung #400 VEHT 3 VENT 3 STAGE1 STAGE 1 DELAY TIMER V3ST1 V30YTHR B3 I—TON π I—I h -|TIHER ON DELAY M EN M 416 ITIMER: T4:20| [423] |BASE (SEC): 1.0(-(DN) jPRESET: 5| jACCUH: 0| I I T4:20.0H j (- - F i le #2 HΛIH_PRGRH - 401 Rung #401 DUELL 3 DUELL 4 BUFFER 3 CHAHBER CHAHBER CHAHBER OPEN READY TO GATE VALVE GATE VALVE GATE VALVE DUELL 3 VENT CLOSED CLOSED CLOSED VENT VALVE RTVCVDT HV6S1 HV7S1 HV8S1 CV3 T4:0 1:024 1:036 1:040 0:027 — 1 1 I — 1 I (D 03 06 00 16 0:027/16 - -\ \- - File #5 FAULTS - 148 File #6 TECH_RUNGS - 0 -|/| File #2 HAIH_PRGRM - 368 File #5 FAULTS - 150 -W - - File #2 MAIH PRGRH - 53 13 [ 00 β] I |D0OR 6 |CLOSED JDRCL6S j 1:026 ■ —I h- 02 Rung #402 VENT 4 STAGE1 VENT 4 VENT 4 DELAY STAGE 1 TIHER V4ST1 V4CV4DYTMR B3 I TON I — I h- -(TIHER ON DELAY H EN H 418 |TIHER: T4:29| [428] |BASE (SEC): 1.0(-(DN) IPRESET: δj jACCUH: 0| T4:29.DN - -\ f- - Fi le #2 MAI H_PRGRM 403 33C Rung #403 DUELL 5 DWELL 6 BUFFER 4 CHAMBER CHAHBER CHAMBER OPEN EADY τo GATE VALVE GATE VALVE GATE VALVE DUELL 5 VENT CLOSED CLOSED CLOSED VENT VALVE RTVCVDT HV9S1 HV10S1 HV11S1 CV4 T4:0 1 :040 1 :052 1 :054 0:043 (L) DN 03 06 00 16 β92] 0:043/16 - -\ \- File #5 FAULTS - 152 FUe #6 TECH_RUNGS - 0 H/h File #2 HAIH_PRGRH - 368 CHAHBER VENT File #5 FAULTS - 154 ENABLE TIME (U>- - File #2 HAIH PRGRM - 55 DELAY V4CV4DYTMR T4:29 DN [402] HANUAL CONTROL BUFFER 3 CHAHBER CHAHBER VENT 4 GATE VALVE OPEN CLOSED M-CV4-1 HV8S1 N7:6 1:040 14 00 β] |DOOR 8 I CLOSED |DRCL8S 1 :042 02 Rung #404 LLOCK DUELL 1 DUELL 3 DWELL 5 EXLOCK ALL CHAHBER CHAMBER CHAHBER CHAHBER CHAMBER CHAMBERS PRESSUR AT PRESSUR AT PRESSUR AT PRESSUR AT PRESSUR AT AT ATHOSPHERE ATHOSPHERE ATHOSPHERE ATHOSPHERE ATMOSPHERE ATHOSPHERE PS2 PS3 PS4 PS5 PS6 CHSATHOS 1:002 1:002 1:022 1:036 1 :052 B3 ( ) 04 05 04 04 04 383 B3/3S3 - H h " file * HAIH_PRGRM - 368 N7:37/13 - -\ \- - File #2 HAIH_PβGRH 26,27,105,167,183,200.216,408,435,436,455 H/h ' f'l «2 HAIH_PRG8H - 369,405 -(LJ- - File #2 HAIH~PRGRH - 434 -<U)- - File #2 HAIH_PRGRH - 437 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 Rung #435 PUMP AREA VENT AREA PUMP SECTION 1 1 ENABLE ACTIVE TIHER PUHP1E VNTACT PHP 1 THR N7:37 B3 l TON H TIMER OH DELAY (-( E * 13 343 ITIMER: T4:256| [434] j β ASE (SEC): LOHW |PRESET: 600 j |ACOJH: oj T4:256.DN - -\ \- - File #2 HAIH_PRGRM 609 Rung #436 LLOCK ENABLE ENABLE OPEN CHAHBER CRYO CRYO LOAD LOCX ROUGH PUHP AREA COMPRESSOR COMPRESSOR CHAMBER DOOR 1 DOOR 3 DOOR 4 VALVE PUMP 1 1 ENABLE 1 ' VENT VALVE CLOSED OPEN CLOSED CLOSED STAGE 1 PUHP1E CY1 CY2 CV1 DRCL1S DROP3S DRCL4S RVS1 P1ST1 N7:37 0:010 0:010 0:007 1:006 1:006 1:006 1:002 S3 — I I 1 I 1 I 1/| 1 I — ( )— 13 04 05 16 00 05 15 422 [437] [26] [27] [177] B3/422 - H h * 'le * HAIH_PRGRM - 68,115,117,118,437 -( )- - FUe #2 MAIH PRGRM - 436 3 33 File #6 TECH_RUNGS - - >- File #2 HAIH_PRGRH - 408 N7:32/10 - -(D- File #2 MA1H_PRGRH - 415 - U)- FUe #2 HAIH PRGRH - 408 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 N7:31/14 - -<D- - File #2 HAIH_PRGRH - 408 -(U>- - File #2 HAIH PRGRM - 415 _F:N7:21IX21 - BTU - File #2 HAIH P GRM - 2 Rung #409 LLOCK OPEN CHAMBER HEATER 1 HEATER 2 CAPACITANC ROUGH CHAHBER CHAHBER MANOMETER IVENT AREA DOOR 4 DOOR 2 DOOR 3 VALVE GATE VALVE GATE VALVE ISOLATION VENT 1 jl ENABLE CLOSED OPEN OPEN CLOSED CLOSE CLOSE VALVE 1 STAGE 1 JVENTIE DRCL4S DROP2S DROP3S RVS1 HV1S1 HV2S1 CMV1 V1ST1 I N7:37 1 :006 1 :006 1:006 1:002 1:002 1:004 0:010 B3 I 1 h- -H h- 1 I — 1 I — l/l— ( )— I 6 06 03 05 15 06 oo 06 412 I [410] [375] B3/412 H (- - File #2 HAIH_PRGRH 171 ,410 -( )- - File #2 HAIH_PRGRM 409 Rung #410 LLOCK CHAMBER VENT 1 PRESSUR AT VENT AREA STAGE 1 ATMOSPHERE 1 ENABLE V1ST1 PS2 VENT1E B3 1 :002 1.7:37 _ — I ' 1 I 1 (U) 412 04 6 [409] N7:37/6 - -\ h * F,' le #2 HAIH_PRGRH - 34, 110, 200, 216, 406, 408, 409, 684 H/h * f'l *2 MAIH_PRGRM - 23, 115, 117, 118, 375, 434 -(L>- - File #2 HAIH_PRGRM - 405 F:N7:211S21 - BTU - File #2 MAIH PRGRM - 2 ABORT SYSTEM VENT BORT_SYS_VNT N7:17 10 [3] PREPARE FOR AUTO RUN >AUT0 H7:37 l_ 1 [162] Rung #411 PUMPOOUN AUTO AREA 2 SYSTEH PUHP AREA HOOE VENT AREA VENT ENABLE 2 ENABLE ENABLE 2 ENABLE TS15 POSE PUHP2E AUTO VENT2E N7:16 B3 N7:37 N7:37 N7:37 M h- |/h- l/h- — | /h- •[AFΠ- (D 7 303 14 11 7 β] [23] [438] [158] N7:37/7 - -\ \- - File #2 HAIH PRGRH 35,111,229,412,414,415,416 H/h " File #2 HAIH_PRGRH - 23,117,118,119,120,121,122,123,124,376,438 -(D- File #2 HAIH_PRGRH 411 -(U)- File #2 HAIH PRGRM 417 3^0 F:H7:21 IX21 - BTU - F i le #2 MAI H_PRGR . Rung #412 VENT AREA VENT SECTION 2 2 ENABLE TIMER VEHT2E VHT2THR N7:37 , TON HTIHER ON DEUY h EM JTIHER: T4:199| [411] | BASE (SEC) : 1.0h(DN) j PRESET: 300 j j ACCUH: 0 | T4:199.DN - -\ \- Fi le #2 HAIH PRGRH 608 Rung #413 PALLET PALLET PALLET DETECTED DETECTED CENTER RIGHT SIDE LEFT SIDE PALLET AT BUFFER 2 HEATER 3 DUELL 3 DOOR 5 AND SEN23 SEN24 SEN2S PLT_DR5,6 1:023 1:023 1:023 B3 ( ) I 07 10 11 249 IPALLET B3/249 - H/h " fi #2 HAIH PRGRH - 414, 420 (DETECTED jCENTER (DUELL 3 ISEN26 j 1:023 12 Rung #414 PALLET PALLET PALLET PALLET DETECTED DETECTED DETECTED DETECTED DOOR CLOSE VENT AREA LEFT SIDE RIGHT SIDE LEFT SIDE RIGHT SIDE DOOR 5 SOLENOID 2 ENABLE HEATER 3 HEATER 3 DUELL 3 DUELL 3 CLOSED 5 ENABLE VENT2E SEN22 SEN24 SEN25 SEN27 DRCL5S DRCL5 N7:37 1:023 1:023 1:023 1:023 1:026 0:031 1/|_ 1/| — -i 1 h- —,/h- ( ) 06 10 I ii 13 00 00 I [4113 I IPALLET PALLET IHANUAL IDETECTED DETECTEO jCONTROL MANUAL [LEFT SIDE RIGHT SIDE jCLOSE DOOR PUHP AREA DOOR 5 IDUELL 3 DUELL 3 IS 5 ENABLE OPEN \ PU P AREA |SEN25 SEH27 |H-DRCL5 PUMP5E MDR50P j2 ENABLE I 1:023 1:023 | N7.-10 N7:3S N7:32 |PUHP2E 1 l/h- 1/| — 1,|_ T— CU)— j N7:37 11 13 15 1 I 1 1 1 h- β] [451] I 14 I [438] (HANUAL JOCOR 5 | CLOSE HANUAL JKDR5CL CONTROL | N7:31 CLOSE DOOR PALLET AT — (D- 5 DOOR 5 AND 15 H-DRCL5 PLT_DR5,6 H7:10 B3 1 I 1/|_ 15 249 β] [413] M 0:031/00 - H h " File #5 FAULTS - 2- File #6 TECH_RUNGS - 2 -i .- - FUe #2 HAIH_PRGRH - 414 N7:32/11 - -<L)- - File #2 HAIHJ>R<3W - 46 -(U)- - File #2 HAIH_PRGRH - 414 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH N7:31/15 - -<L>- - File #2 HAIH_PRGRH - 414 -(U)- - File #2 MAIH_PRGRH - 46 31.2- File #6 TECH_RUNGS 2 -i )- File #2 MAIH_PRGRM - 415 N7:32/10 - -(D- - FUe #2 HAIH_PRGRM - 415 -(U)- - File #2 MAIH_PRGRM - 408 _F:N7:21IX21 - BTU - Fi le #2 HATH_PRGRH - 2 N7:31/14 - -(D- - Fi le #2 MAIH_PRGRH - 408 N7:16 B3 N7:37 N7-.37 N7:37 h- — l/h- l/h- — _/h- [AFΠ- (L) 8 303 15 11 8 β] [23] [442] [158] N7:37/8 - -| f- - Fi le #2 HAIK_PRGRH 36,43,112,419,420,422,423 H/h _ f ' le * 2 HAIH_PRGRH 23,125,126,127, 128,129,130,377,442 -(D- - Fi le #2 HAIH_PRGRH 418 -ill-)- - Fi le #2 HAIH PRGRH 424 1,3 _F:N7:21 IX21 - BTU - Fi le #2 MΛIH_P*& Rung #419 VENT AREA VENT SECTION 3 3 ENABLE TIMER VENT3E VNT3THR N7:37 I —TON π ^IME ON DELAY h< EN |TIHER: T4:24 2 j [418] i_ASE (SEC): 1.0(-<DN) |PRESET: 300( IACCUH: 01 T4:242.DN - -\ \- - FUe #2 HAIH PRGRH - 608 Rung #420 PALLET PALLET PALLET PALLET DETECTED DETECTED DETECTED DETECTED DOOR CLOSE VENT AREA LEFT SIDE RIGHT SIOE LEFT SIDE RIGHT SIDE DOOR 6 SOLENOID 3 ENABLE HEATER 3 HEATER 3 DUELL 3 DUELL 3 CLOSED 6 ENABLE VENT3E SEN22 SEN24 SEN25 SEN27 DRCL6S DRCL6 N7:37 1:023 1:023 1 :023 1:023 1:026 0:031 -H h- l/h- l/l — -i l/h- 1/| — —_/_— _ ( ) 06 10 I 13 02 | I 02 [418] I I | PALLET PALLET |MANUAL (DETECTED DETECTED jCONTROL MANUAL | LEFT SIDE RIGHT SIDE | CLOSE DOOR PALLET AT DOOR 6 JDUELL 3 DUELL 3 j 6 DOOR 5 AND OPEN I PUMP AREA J SEN25 SEN27 J M-DRCL6 PLT_DR5 ,6 MDR60P |3 ENABLE | 1 : 023 1 023 j N7. 1 1 B3 N7:32 | PUMP3E 1 1 h- I I , I | , |_ -I—(U)— N7:37 11 13 0 249 I 12 [3] [413] I 15 I [442] IMANUAL IDOOR 6 ICLOSE HANUAL |MDR6CL CONTROL I N7.32 CLOSE DOOR PALLET AT —(D- 6 DOOR 5 AND 6 0 M-DRCL6 PLT_DR5,6 N7.11 S3 I a. [413] 0:031 /02 - - F i le #5 FAULTS - 27 i le #6 TECH_RUNGS - 2 -( )- - F i le #2 MAIH_PRGRM - 420 H7:32/12 - -(D- - FUe #2 HAIH_PRGRM - 47 -(U>- - Fi le #2 HAIH_PRGRM - 420 _F:N7:21 IX21 - BTU - F i le #2 HAIH_PRGRH - 2 N7:32/0 - -<D- - Fi le #2 MΛIH_PRGRH - 420 -(U)- - FUe #2 HAIH PRGRM - 47 F:N7:21IX21 - BTU - File #2 HAIH PRGRM - 2 _F:H7:21IS21 - BTU File #2 HAIH_PRGRH - 2 N7:32/1 - -(D - File #2 HAIH_PRGRH - 422 -(U) - File #2 HAIH PRGRH - 4S F:N7:21I321 - BTU - File #2 HAIH PRGRH - 2 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 3 G N7:32/14 - -(D- - FUe #2 HAIH_PRGRH - 49 -(U)- - File #2 HAIH_PRGRH - 427 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 N7:32/2 - -(D- - File *2 MAIH_PRGRH - 427 -(U)- - File #2 HAIH_PRGRH - 49 F:N7:2UX21 - BTU - File #2 HAIH PRGRH - 2 310 Rung #437 HEATER 1 HEATER 2 CHAMBER CHAMBER PUMP 1 GATE VALVE GATE VALVE PUHP AREA STAGE 1 OPEN OPEN 1 ENABLE P1ST1 HV1S3 HV2S3 PUHP1E B3 1:002 1:004 N7:37 - T (U) 422 10 02 I 13 I C436] N7:37/13 - -\ \- - Fi le #2 HAIH_PRGRH - 26, 27, 105, 167, 183, 200, 216, 408, 435, 436, 455 |PUMP1E H/h - FUe #2 HAIH_PSGRH - 369, 405 JDISABLE -(D- - Fi le #2 HAIH_PRGRH - 434 j ULSE _F:N7:2UX21 - BTU - Fi le #2 HAIH_PRGRM - 2 JPUHPIEDPLSE | BORT PUMPOOUN T4:284.TT - -\ \- ■ FUe #2 MAIH PfiGRM - 84 lr—TON |BT_P0 LjTIHER ON DELAY [—CEH>— ! N7: 17 JTIHER: T4:284J |BASE (SEC): 1.0|-(DN) jPRESET: δj | β] |ACCUH: 0| I I (PIRANI | GUAGE 1 FAULT [162] Rung #438 HEATER 2 DUELL 1 DUELL 2 HEATER 3 CHAHBER CHAMBER CHAHBER CHAHBER PIRANI SYSTEH PUMP AREA GATE VALVE GATE VALVE GATE VALVE GATE VALVE GUAGE 2 VENT VENT AREA PUMP AREA 2 CLOSE CLOSED CLOSED CLOSED NO FAULT ENABLE 2 ENABLE 2 ENABLE TS22 HV2S1 HV3S1 HV4S1 HV5S1 PGNF2 SYSVNTE VENT2E PUMP2E H7:16 1:004 1:004 1:022 1:024 1:004 N7:37 N7:37 H7:37 β] [369] [417] N7:37/14 H h- File #2 MAIH_PRGRH 27,28, 29,30, 56, 73, 106, 229, 14, 415 , 39, 40, 445 H/h- File #2 MAIH_PRGRM 369,41 1 File #2 MAIH_PRGRM 438 -CU)- - File #2 HAIH_PRGRH 441 _F:N7:21IJ21 - BTU - File #2 HAIH_PRGRM - Rung #439 IPUMP AREA PUMP SECTION 2 j2 ENABLE TIMER |PUHP2E PMP2THR N7:37 ,—TON -|TIHER ON DELAY hEN) 14 JTIHER: T4:262| [438] |8ASE (SEC): 1.0f-(DN) |PRESET: 600j ACCUM: 0| T4:262.DN - - h File #2 MAIH PRGR,. 609 Rung #440 DUELL 2 I ENABLE ENABLE ENABLE ENABLE DUELL 1 CHAMBER I CRYO CRYO CRYO CRYO CHAMBER ROUGH |PUHP AREA COMPRESSOR COMPRESSOR COMPRESSOR COMPRESSOR VENT VALVE DOOR 3 DOOR 5 DOOR 4 VALVE RV2 PUMP2 j2 ENABLE 2 3 4 5 CLOSED CLOSED CLOSED OPEN CLOSED STAGE 1 |PUHP2E CY2 CY3 CY4 CY5 CVS3 DRCL3S DRCL5S DROP4S RVS3 P2ST1 I N7:37 0:010 0:030 0:030 0:044 1:002 1:006 1:026 1:006 1:022 B3 1 I 1 I —I I 1 h- ( ) I ι* 05 04 05 04 13 04 00 07 15 424 I [441] [27] [28] [291 βO] B3/424 - H h" File #2 MAIH_PRGRH - 117,118, 119, 120,121, 122, 123, 124,441 -( )- - File #2 HAIH PRGRH - 440 Rung #4 41 HEATER 2 DUELL 1 DUELL 2 HEATER 3 CHAMBER CHAHBER CHAMBER CHAHBER PUMP2 GATE VALVE GATE VALVE GATE VALVE GATE VALVE PUHP AREA STAGE 1 OPEN OPEN OPEN OPEN 2 ENABLE P2ST1 HV2S3 HV3S3 HV4S3 HV5S3 PUHP2E S3 1:004 1:004 1:022 1:024 H7:37 -| (U) 424 02 05 10 02 I 14 I [440] I |PUHP 2 JEND ULSE |P2ENDPULSΣ I ABORT PUHPOOUN j , — TON |BT_PD H TIHER ON DELAY h EN)- H7:17 |TIHER: T4:125 i 1 I |BASE (SEC): 1.0 how j PRESET: 5 I £3] lACQH: 0 I |P1RANI |GUAGE 2 |NO FAULT |PGNF2 1:004 I — l/l 15 |PREPARE FOR J UTO RUN |>AUTO H7:37 1 I 1 [1621 N7:37/14 ■ H H * File #2 HAIH_PRGRH 27, 28, 29, 30, 56,73, 106, 229, 414, 415, 439, UO, 445 H / h- File #2 HAIH_PRGRM 369,411 -(D- - F le #2 HAIH_PRGRM 438 _{U)- - File #2 HAIH PRGRM 441 F:N7:21IX21 - BTU - FUe #2 MAIH_PRGRM - 2 T4:125.TT - -| (- - File #2 MAIH_PRGRM 91 36λ -(D- - FUe *~Z HAIH_PRGRH - -<U)- - File #2 HAIH_PRGRH - _F:N7:2113__1 - BTU - File #2 MAIH PRGRM Rung #443 PUMP AREA PUHP SECTION 3 3 ENABLE TIHER PUHP3E PHP3TMR N7:37 l TOM ■ ITIMER ON DELAT |-( εM 15 JTIHER: T4:288| [442] |BASE (SEC): 1.0(-(0N) | PRESET: 600 | ACCUM: 0 T4:288.DN 1 |- File #2 HAIH PRGRM 609 Rung #444 DUELL 4 ENABLE ENABLE DUELL 4 CHAHBER CRYO CRYO CHAHBER ROUGH PUHP AREA COHPRESSOR COMPRESSOR VENT VALVE DOOR 6 DOOR 7 VALVE PUHP 3 3 ENABLE 5 6 CLOSED CLOSED CLOSED CLOSED STAGE 1 PUHP3E CY5 CY6 CVS5 DRCL6S DRCL7S RVS5 P3ST1 N7:37 0:044 0:044 1:022 1:026 1:042 1:036 B3 1 I — — I h- ( )— 15 04 05 11 02 00 15 426 [442] βO] β1] B3/426 - H h " File #2 MAIH PRGRM 125,126,127,128,129,130,446 -( )- - FUe #2 HAIH PRGRH - 444 35Z. -(D- - File #2 MAIH_PRGRH - U7 -(U)- - File #2 HAIH_PRGRM - 450 _F:N7:21 IX21 - BTU FUe «2 HAIH PRGRH - 2 Rung #448 PUMP AREA PUHP SECTION 4 ENABLE TIHER PUHP4E PHP4THR N7:38 i — TON HTIMER ON DELAY f-< EN JTIMER: T4:295| [447] JBASE (SEC) : 1.0)— COH1 j PRESET: 600 j j ACCUM: 0 | T4:295.DN - -\ (- - Fi le #2 HAIH_PRGRM - 609 Rung #449 [450] [32] B3/428 - H h - -( )- File #2 MAIH PRGRM uv 35<+ Rung #450 DUELL 5 DUELL 6 BUFFER 4 CHAMBER CHAMBER CHAMBER PUHP 4 GATE VALVE GATE VALVE GATE VALVE PUMP AREA STAGE 1 OPEN OPEN OPEN 4 ENABLE P4ST1 HV9S3 HV10S3 HV11S3 PIHP4E B3 1:040 1:052 1 :054 N7:38 T 1 I (U) - 428 05 10 02 I o I [449] N7:38/0 - H (- - FUe #2 HAIH_PRGRH - 32, 33, 58, 73, 108, 4277 445, 448, 449 H/|- - Fi le #2 HAIH_PRGRH - 369, 425 |PUMP 4 -<L>- - Fi le #2 MAIH_PRGRM - 447 jEND PULSE _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 |P4EHDPULSE | ABORT PUMPOOUN T4:127.TT - H h _ fi l * 2 MAIH_PRGRH - 91 I,—TON- l _T_PD L(TIHER ON DEUY H 6 "'- 1 N7:17 JTIHER: T4:127| |BASE (SEC): 1.0|— <DH) | PRESET: 5 J | β] ACCUH: 0 I |PIRINI jGUAGE 4 JNO FAULT JPGNF4 1:024 _/i 15 I PREPARE FOR JAUTO RUN |>AUT0 N7:37 _I 1 [162] Rung #451 EXITLOCK CHAHBER SYSTEH PUHP AREA GATE VALVE VENT VENT AREA PUMP AREA 5 CLOSED ENABLE 5 ENABLE 5 ENABLE TS2S HV12S1 SYSVNTE VENT5E PUHP5E N7:17 1:054 N7:37 N7:37 N7:38 1 J 1/(- 1/(— (D 1 03 55 10 1 β] [369] [433] N7:38/1 - -\ \- Fi le #2 HAIH_PRGRM - 32,78, 109,327,335,340,353,452,453,456 H/h FUe #2 MAIH_PRGRH - 369,414,430 -(D- F i le #2 HAIH_PRGRH - 451 -(U)- Fi le 1.2 HAIH_PRGRM - 454 _F:N7:211Ϊ21 - BTU Fi le #2 HAIH PRGRM - 2 Rung #452 |PUHP AREA PUMP SECTION 5 j5 ENABLE TIHER |PUHP5E PHP5TRM | N7:38 r—ON , | 1 | HTIMER ON DEUY h< E " 1 |TIHER: T4:296| I [451] JBASE (SEC) : 1.0(-(DH j PRESET: 600 | |ACCUH: oj T4:4.DN • H h FUe #2 MAIH PRGRM 340 Rung #457 MANUAL CONTROL CRYO GATE MANUAL CRYO 1 OPEN GATE 1 OPEN H-HV1-1 HCG10P N7:4 N7:25 m (L) I 5 β) N7:25/5 - H | File #2 HAIH_PRGRH - 115 -(U>- - File #2 HAIH_PRGRH - 458 I MANUAL CRYO _F:N7:21I321 - BTU - File #2 HAIH_PRGRH - 2 JGATE 1 CLOSE N7:26/12 - -<D- - File #2 HAIH_PRGRH - 458 |MCG1CL F:N7:21IX21 - BTU - File #2 HAIH PRGRM - 2 j N7:26 1 (U) 12 Rung #458 MANUAL CONTROL CRYO GATE MANUAL CRYO 1 CLOSE GATE 1 OPEN H-HV1-0 MCG10P N7:5 N7:25 1 I (U) 12 5 [3] H7:25/5 - -\ | Fi le #2 HAIH_PRGRM - 115 -(D- - FUe #2 HAIH_PRGRM - 457 _F:N7:21 IX21 - BTU - Fi le #2 HAIH_PRGRH - 2 MANUAL CRYO N7:26/12 - -(U)- - Fi le #2 MAIH_PRGRM - 457 GATE 1 CLOSE PREPARE FOR F:N7:21IX21 - BTU - Fi le #2 HAIH PRGRM - 2 HCG1CL AUTO RUN N7:26 >AUT0 (D N7:37 12 h 1 [162] COHPRESSOR 1 REGEN¬ ERATION PROGRAM CYRGN1 S3 321 [3:0] Rung #459 HANUAL CONTROL CRYO GATE HANUAL CRYO 2 OPEN GATE 2 OPEN H-HV2-1 HCG20P N7:4 N7:25 -I (L) 6 I 6 β] I N7:25/6 - H | File «2 HA1H_PRGRH - 117, 118, 462 I -(U)- - File #2 HAIH_PRGRM - 460 I MANUAL CRYO _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 JGATE 2 CLOSE H7:26/13 - -(D- - File #2 HAIH_PRGRH - 460 JHCG2CL F:N7:21IX21 - BTU - FUe #2 HAIH PRGRH - 2 j N7:26 I [U) 13 Rung #460 MANUAL CONTROL CRYO GATE MANUAL CRYO 2 CLOSE GATE 2 OPEN M-HV2-0 MCG20P N7:5 h7:25 T (U) 13 I 6 β] I M7:25/6 - -| |- - File « MAIH_PRGRH - 117, 118, 462 -<D- - File .2 MAIH_PRGRM - 459 MANUAL _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 IMANUAL CRYO CONTROL H7:26/13 - -(U)- - File #2 MAIH_PRGRM - 459 JGATE 2 CLOSE CRYO GATE F:N7:21IX21 - BTU - FUe #2 MAIH PRGRM - 2 JMCG2CL 2 THROTTLE j N7:26 M-HV2-2 ' (D N7:5 13 1 I — 1 β] PREPARE FOR AUTO RUN >AUT0 k7:37 r 1 [162] COMPRESSOR 2 REGEN¬ ERATION PROGRAM CYRGN2 B3 1 1 I — 322 β:34] 3£ Rung #461 IHANUAL jCONTROL jCRYO GATE HANUAL CRYO 12 THROTTLE GATE 2 THROTTLE |H-HV2-2 HCG2TL I N7:5 N7:26 (D I ι 1 I t3] N7:26/1 • -\ \- - File #2 MAIH_PRGRH - 118,118 -(D- - File #2 HA1H_PRGRM - 461 -(U)- - File #2 MAIH_PRGRH - 462 F:N7:21IX21 - BTU - File *2 MAIH_PRGRH - 2 Rung #462 MANUAL CONTROL CRYO GATE HANUAL CRYO 2 CLOSE GATE 2 THROTTLE M-HV2-0 HCG2TL N7:5 N7:26 (U) 13 1 β] N7:26/1 - -j |_ - File #2 HAIH_PRGRH - 118 -(L>- - File #2 HAIH_PRGRM - 461 F:N7:2UX21 - BTU - File #2 MAIH PRGRM - 2 MANUAL CRYO GATE 2 OPEN HCG20P N7:25 [460] PREPARE FOR AUTO RUN >AUTO N7:37 1 [162] COHPRESSOR 2 REGEN¬ ERATION PROGRAM CYRGN2 B3 322 [3:34] 36Λ Rung #467 MANUAL CONTROL CRYO GATE MANUAL CRYO 4 OPEN GATE 4 OPEN H-HV4-1 HCG40P N7:4 N7:2S H (D 8 β] N7:2S/8 - -\ \- - File #2 MAIH_PRGRH - 121, 122, 470 -(U)- - File #2 HAIH_PRGRH - 468 |MANUAL CRYO _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 |GATE 4 CLOSE N7:26/1S - -(D- - File #2 MAIH_PRGRM - 468 JMCG4CL F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 N7:26 (U) 15 Rung #468 HANUAL CONTROL CRYO GATE MANUAL CRYO 4 CLOSE GATE 4 OPEN H-HV4-0 MCG40P N7:5 N7:25 1 I cu) 15 β] N7:25/8 - -A, (- - File #2 HAIH_PRGRM - 121, 122, 470 -(D- - File #2 HAIH_PRGRM - 467 MANUAL _F:N7:21IX21 - BTU - FUe #2 HAIH_PRGRM - 2 HANUAL CRYO CONTROL N7:26/15 - -CU)- - File #2 MA1H_PRGRH - 467 GATE 4 CLOSE CRYO GATE F:N7:21IX21 - BTU - FUe 1.2 MAIH PRGRM - 2 HCG4CL 4 THROTTLE N7:26 H-HV4-2 CD N7:5 15 β] PREPARE FOR AUTO RUN >AUTO N7:37 1 [162] COHPRESSOR 5 REGEN¬ ERATION PROGRAM CYRGN5 B3 325 [3:46] 3^2- Rung #469 IMANUAL jCONTROL MANUAL CRY jCRYO GATE GATE 4 J THROTTLE THROTTLE |M-HV4-2 HCG4TL I N7:5 N7:26 (L) 3 I C3I N7:26/3 - -\ \- FUe #2 HAIH_PRGRH - 122,122 -(D- File #2 HAIH_PRGRH - 469 -(U)- File #2 HAIH_PRGRM - 470 3 Rung #473 IMANUAL jCONTROL MANUAL CRYO jCRYO GATE GATE 5 |5 THROTTLE THROTTLE |M-HV5-2 HCG5TL I N7:5 H7:26 CD 4 |β ] N7:26/4 1 | File #2 HAIH_PRGRM - 124,124 -(L>~ - File #2 MAIH_PRGRM - 473 -(U)- - File #2 HAIH_PRGRM - 474 3QC -CD- - File #2 HAIH_PRGRM - 477 - Rung #479 MANUAL CONTROL CRYO GATE MANUAL CRYO 7 OPEN GATE 7 OPEN H-HV7-1 MCG70P N7:4 N7:25 (D 11 11 β] N7:25/11 - H h * F'le *2 MAIH_PRGRM - 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N7:27 M-HV7-2 ' CD N7:5 2 β] PREPARE FOR AUTO RUN >AUT0 N7:37 3 Rung #485 IHANUAL jCONTROL MANUAL CR jCRYO GATE GATE 8 jβ THROTTLE THROTTLE |H-HV8-2 HCG8TL j N7:5 N7:26 I 1 i (L) 7 |£3_ N7:26/7 ■ -j (- - File #2 HAIH_PRGRH - 130,130 -CD- - File #2 HAIH_PRGRH - 485 -(U)- - File #2 HAIH_PRGRH - 486 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 Rung #486 HANUAL CONTROL HANUAL CR CRYO GATE GATE 8 8 CLOSE THROTTLE H-HV8-0 HCG8TL N7:6 N7:26 H h (U) 3 7 a. N7:26/7 1 [ Fi le #2 HAIH_PRGRM - 130 -1 .- - Fi le #2 HAIH_PRGRH - 485 F:N7:21 IX21 - BTU - Fi le #2 HAIH PRGRM - 2 MANUAL CRYO GATE 8 OPEN HCG80P H7:25 12 [484] PREPARE FOR AUTO RUN >AUT0 N7:37 1 [162] COHPRESSOR 6 REGEN¬ ERATION PROGRAM CYRGN6 B3 326 [3:52] 3*3 Rung #584 MOTOR 17 REVERSE MOTOR 17 ENABLE REVERSE H17RE H17R N7:20 B3 h- _ I 1 (L) o I 117 β) I IHANUAL B3/117 - H h " Fi le #2 HAIH_PRGRH - 312 JHOTOR 17 H/|- - File #2 HAIH_PRGRH - 310 |REVERSE -(U)- - Fi le #2 HAIH_PRGRH - 603 jENABLE N7:41/0 - -W)- - FUe #2 HAIH_PRGRH - 603 |HH17RE _F:N7:21 IX21 - BTU - FUe #2 MAIH_PRGRH - 2 | N7:41 117:35/13 - -(D- - Fi le #2 HAIH_PRGRM - 603 HD F:N7:21l%21 - BTU - File #2 MAIH PRGRM - 2 I o I HANUAL I HOTOR 17 j REVERSE | DISABLE |MM17RD I N7:35 I (U) 13 Rung #585 I MOTOR 18 j REVERSE HOTOR 18 ( ENABLE REVERSE |M18RE H18R I N7:20 B3 (D 1 118 | β] |MANUAL B3/118 - H j File #2 MAIH_PRGRH - 317 jHOTOR 18 H/h " File #2 HA1H_PRGRH - 315 |REVERSE -(U)- - File #2 HAIH_PRGRH - 604 jENABLE N7:41/1 - -(U)- - File #2 HAIH_PRGRH - 604 |HM18KE _F:H7:21I521 - BTU - File #2 HAIH_PRGRM - 2 j N7:41 N7:35/14 - -CD- - File #2 MAIHJ>RGRM - 604 | (D F:N7:21l%21 - BTU - File #2 HAIH PRGRM - 2 I 1 IHANUAL jHOTOR 18 jREVERSE JDISABLE |HH18RD I N7:35 I (U) 14 ?PrG Rung #588 MOTOR 21 REVERSE MOTOR 21 ENABLE REVERSE M21RE M21R N7:20 83 (L) 121 β] HANUAL B3/121 - H h * fil *2 MAIH_PRGRM - 357 HOTOR 21 H/h * File #2 MAIH_PRGRM - 355 REVERSE -(U)- - File #2 MAIH_PRGRM - 607 ENABLE N7:41/4 - -ill)- - File #2 HA1H_PRGRH - 607 HH21_RE _F:N7:2UX21 - BTU - File #2 MAIH_PRGRM - 2 N7:41 N7:36/1 - -{L>- - File #2 MAIH_PRGRH - 607 (D F:N7:21IX21 - BTU - File #2 MAIH PRGRH - 2 4 MANUAL MOTOR 21 REVERSE 01SABLE HM21RD N7:36 (U) 1 Rung #589 HOTOR 3 REVERSE HOTOR 3 DISABLE REVERSE H3RD H3R N7:13 B3 CU) 15 | 103 β) I B3/103 - H h * Fi le #2 MAIH_PRGRM - 187 MANUAL H/h - Fi le #2 HAIH_PRGRM - 185 HOTOR 3 -<L>- - Fi le #2 HAIH_PRGRM - 570 REVERSE N7:40/2 - -(D- - FUe *2 MAIH PRGRM - 570 ENABLE PREPARE FOR _F:N7:21 IX21 - BTU - Fi le #2 HAIH_PRGRH - 2 MH3RE AUTO RUN N7:34/15 - -(U)- - Fi le #2 HAIH_PRGRM - 570 N7:40 >AUTO F:N7:21IX21 - BTU - FUe #2 HAIH PRGRM - 2 (U> H7:37 2 1 HANUAL [162] HOTOR 3 REVERSE DISABLE MM3RD N7:34 (L) 15 Rung #592 MOTOR 6 REVERSE HOTOR 6 DISABLE REVERSE M6RD H6R N7:1 B3 TΓ 1 (U)— 106 β] 83/106 j h - File #2 HAIH_PRGRH - 220 HANUAL H/h " File #2 HAIH_PRGRH - 218 HOTOR 6 -(D- - File β HAIH_PRGRM - 573 REVERSE N7:40/5 - -il - - File #2 MAIH_PRGRM - 573 ENABLE PREPARE FOR _F:N7:21IX21 - BTU - File #2 HAIH_PRGRM - 2 HM6RE ALΓΓO RUN N7:35/2 - -<U)- - File #2 HAIH_PRGRH - 573 N7:40 >AUT0 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 (U)— N7:37 5 1 HANUAL [162] HOTOR 6 REVERSE DISABLE HH6RD N7:35 (D— 2 Rung #593 MOTOR 7 REVERSE MOTOR 7 DISABLE REVERSE M7RD M7R N7: 14 B3 1 (U)— I 107 I B1 I B3/107 - _) (- - FUe #2 HAIH_PRGRH - 233 IHANUAL H/h - File #2 HAIH_PRGRM - 231 |HOTOR 7 -(D- - FUe #2 HΛIH_PRGRM - 574 jREVERSE N7:40/6 - -(D- ■ File #2 HAIH PRGRM - 574 jENABLE |PREPARE FOR _F:N7:21IX21 - BTU - File #2 HAIH_PRGRM - 2 JMM7RE | UTO RUN N7:35/3 - -(U)- - FUe #2 HAIH_PRGRM - 574 j N7:40 |>AUT0 F:N7:2UX21 - BTU - File #2 MAIH PRGRH - 2 ! (U)- H7:37 I 6 IHANUAL (1621 IHOTOR 7 IREVERSE jDISABLE |HM7RD I N7-.35 1 CD— 3 -r REVERSE MOTOR 9 DISABLE REVERSE M9RD M9R N7: 14 B3 η (U)— 5 I 109 [3] I B3/109 1 (- - File #2 MAIH_PRGRM - 2S5 IMANUAL H/h - F le #2 MAIH_PRGRH - 253 jMOTOR 9 -(D- - File «2 HAIH_PRGRM - 576 |REVERSE N7:40/8 - -(L)- - File #2 MAIH_PRGRM - 576 jENABLE PREPARE FOR _F:N7:21IX21 - BTU - File #2 MAIH_PRGRM - 2 |MM9RE AUTO RUN N7:35/5 - -(U)- - File #2 MAIH_PRGRM - 576 j N7:40 >AUTO F:N7:21I5_21 - BTU - File #2 MAIH PRGRM - 2 | (U) N7:37 I 8 t_ 1 IMANUAL [162] |MOTOR 9 | EVERSE 5 3So Rung #598 > MOTOR 12 REVERSE MOTOR 12 DISABLE REVERSE M12RD M12R N7:14 B3 T <U> 8 112 13] B3/112 - -| h - File #2 MAIH_PRGRH - 281 HANUAL -|/h " F'le #2 MAIH_PRGRM - 281 MOTOR 12 -<L)- - File #2 MAIH_PRGRM - 579 REVERSE N7:40/11 - -<L)- - File #2 HΛΪH_PRGRH - 579 ENABLE PREPARE FOR _F:N7:21IX21 - BTW - File #2 MAIH_PRGRM - 2 MM12RE AUTO RUN N7:35/8 - -<U>- - File #2 MAIH_PRGRH - 579 N7:40 >AUTO F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 | <U) N7:37 11 l_ MANUAL 1162] MOTOR 12 REVERSE DISABLE HH12RD N7:35 (L) 8 Pung #599 iOTOR 13 REVERSE MOTOR 13 DISABLE REVERSE M13RD M13R N7:14 B3 (U)— 113 im B3/113 - -| h - F 'l e 2 HAIH_PRGRM - 287 HANUAL —/\- • File #2 MAIH_PRGRM - 285 HOTOR 13 -<L>- - File #2 MAIH_PRGRM - 580 REVERSE N7:40/12 - -(L)- - File #2 MAIH_PRGRM - 580 ENABLE |PREPARE FOR _F:N7:21IX21 - BTW - File #2 MAIH_PRGRM - 2 MM13RE IAUTO RUN N7:35/9 - -(U)- - File #2 MAIH_PRGRH - 580 N7:40 |>AUT0 F:N7:21IX21 - BTW - File #2 MAIH PRGRM - 2 | (U) j N7:37 12 MANUAL [162] MOTOR 13 REVERSE 01SABLE MM13RD N7:35 (L) 9 2>%l REVERSE HOTOR 15 DISABLE REVERSE H15RD M15R N7: 14 B3 (U> 11 115 β] B3/115 - -| h Fi le #2 HAIH_PRGRM - 297 HANUAL H/h Fi le #2 MAIH_PRGRM - 295 HOTOR 15 -α>- Fi le #2 HAIH_PRGRH - 582 REVERSE N7:40/14 - -(D- -- Fi le #2 HAIH_PRGRM - 582 ENABLE PREPARE FOR _F:N7:2UX21 - BTU Fi le #2 KAIH PRGRM - 2 HH15RE AUTO RUN N7:35/11 - -(U>- - Fi le #2 HAIH_PRGRM - 582 N7:40 >AUTO F:N7:2UX21 - BTU - FUe #Z KAIH PRGRM - 2 |—(U)— N7:37 14 1 HANUAL [1623 HOTOR 15 REVERSE DISABLE HH15R0 N7:35 (D 11 3« Rung #602 MOTOR 16 REVERSE MOTOR 16 DISABLE REVERSE M16RD M16R N7:14 S3 T -, (U) 12 | 116 I co i B3/116 - H h * Fi le #2 MAIH_PRGRH - 306 | MANUAL H / h " Fi le #2 MAIH_PRGRH - 306 16 -(D- - FUe #2 MAIH_PRGRM - 583 j EVERSE N7:40/15 - -(D- - Fi le #2 MAIH_PRGRH - 583 j ENABLE PREPARE FOR _F:N7:21 IX21 - BTU - FUe #2 HΛIH_PRGRH - 2 JHM16RE AUTO RUN N7:35/12 - -(U)- - Fi le #2 HAIH_PRGRH - 583 j N7:40 >AUTO F:N7:21 IX21 - BTU - FUe #2 MAIH PRGRH - 2 →il>— N7:37 I 5 l_ I IHANUAL 1162] jHOTOR 16 j EVERSE |DISABLE |MM16RO j N7:35 12 Rung #603 HOTOR 17 REVERSE MOTOR 17 DISABLE REVERSE H17RD M17R N7:14 B3 __| | (U) 13 117 \ a. I B3/117 - H h " F ,' le #Z MAIH_PRGRM - 312 IHANUAL H/h ■ FUe #2 HAIH_PRGRM - 310 JHOTOR 17 -(D- - Fi le #2 HAIH_PRGRH - 584 jREVERSE N7.-41/0 - -(D- - FUe #2 MAIH_PRGRH - 584 jENABLE | PREPARE FOR _F:N7:21 I521 - BTU - FUe #2 MAIH_PRGRM - 2 JHH17RE j AUTO RUN N7:35/13 - -(U)- - Fi le #2 MAIH_PRGRM • 584 | N7:41 |>AUTO F:N7:21 IJ21 - BTU - Fi le #2 HAIH PRGRM - 2 | (U) j N7:37 I ° 1 1 I — I 1 |HANUAL 1162] JHOTOR 17 jREVERSE JOISABLE |HM17RD j N7:35 1 (D 13 s^ Rung #604 MOTOR 18 REVERSE HOTOR 18 DISABLE REVERSE M18R0 H18R N7: 14 83 -H I T CU) 14 I 118 I ra I 83/118 - H (- - FUe #2 MAIH_PRGRH - 317 (MANUAL H/| FUe #2 HAIH_PRGRM - 315 |HOTOβ 18 -(D- - Fi le #2 MAIH_PRGRH - 585 jREVERSE N7:41/1 - -(D- - FUe *2 HAIH_PRGRH - 585 jENABLE (PREPARE FOR _F:N7:21 IX21 - BTU - Fi le #2 HAIH_PRGRH - 2 JKH18RE j AUTO RUN N7:35/14 - -(U)- - Fi le #2 HAIH_PRGRH - 585 j N7:41 |>AUT0 F:N7:21 IX21 - BTU - Fi le #2 MAIH PRGRH - 2 | CU) | N7:37 I 1 I 1 IMANUAL [162] JMOTOR 18 jREVERSE JDISABLE |MH188D j H7:35 1 (I) 14 ung #605 MOTOR 19 REVERSE HOTOR 19 DISABLE REVERSE M19RD M19R N7:14 S3 H h - 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- \- - File #2 HAIH PRGRM - 615 Rung #615 PRESSURE FAILURE |PRESS_FAIL_TMR PRESS_FAIL I T4:331 B3 I 1 i (D I DN 388 j [614] 83/388 - H h " File #2 MAIH_PRGRM - 627 -CD- ■ File #2 MAIH_PRGRH - 615 _(U)- ■ File #2 HAIH PRGRH - 617 Rung #616 I AUTO ODE ARGON FLOU NO_ARGON I ENABLE FAILURE LATCH j AUTO N0_ΛRG0N_FLOU HO_ARGONLTCH j N7:37 B3 B3 I J |_ (L) I 11 528 387 I C158] B3/387 ■ H h " FUe #2 HAIH_PRGRH - 627 -(D- - File #2 MAIH_PRGRH - 616 -(U>- - File #2 HAIH PRGRH - 617 % 3So 33 Rung #620 CHROME HIGH POUER POUER SUPPLY POUER SUPPLY CHROME 1 t Z SETPOINT ALARM SETPOINT ALARM TO THE FIX 1 DELAY HIPRCH1.2 CHRSPAL1 PSSPALHDLY B3 B3 ι — TON T -| TIMER ON DELAY h<EN>H 831 531 | TIHER: T4:333 J [236] j BASE (SEC) : 1.0 (-<DN) T4:333.DN - -\ (- - F Ue #2 MAI H_PRGRM - 621 j PRESET: 10 j ACCUH: 0 HAGNETIC HIGH POUER POUER SUPPLY HAG 1 & 2 SETPOINT ALARH TO THE FIX 1 HIMAG1.2 MAGSPAL1 B3 B3 833 S32 [268] CARBON HIGH POUER POUER SUPPLY CARBON 1 & SETPOINT ALARH TO THE FIX 1 HIPRCAR1 ,2 CARSPAL1 B3 B3 835 533 C299] HIGH POUER CHROHE PS CHROHE 3 & SETPOINT ALARM TO THE FIX 2 HIPRCHR3.4 CHRSPAL2 B3 B3 1 | 832 537 C242] HIGH POUER HAG PS MAG 3 & 4 SETPOINT ALARM TO THE FIX 2 HIPRMAG3,4 HAGSPAL2 B3 83 834 538 £274] HIGH POUER CARBON PS CARBON 3 4 4 SETPOINT ALARM TO THE FIX 2 IPRCAR3,4 CARSPAL2 I 83 B3 836 539 O00] Rung #621 POUER SUPPLY SETPOINT ALARH PSSPALHDLY PSSPALARM T4:333 S3 (L) ON 147 [620] 332. 333 Rung #623 C1RERUF CS:1 DN 819 β:19] B3/819 - -| h ■ F i le #2 MAIH_PRGRH - 624 C2RERUF C5:2 I— I r— I DN β:196] C2RERUF C5:2 DN D-.196] C3RERUF C5:3 DN B:197] C4RERUF C5:4 H hH DN B:198] C5RERUF C5 :5 —I hH DN β:199J C6R3RUF CS.6 DN β:200] C7RERUF C5:7 DN £3:201] C8RERUF C5:8 DN 3:202] LIGHT TE 033 ) 16 3 >c B3 — I 220 j £5:203] ( EMERGENCY jSTOP |E_STOP I ~ 1:005 I 5 lAUXILLIARY jPAUSE UTCH |SIGNALS jAUXPL I B3 | 199 I £626] JALKILLIARY j PAUSE 2 UTCH |AUX2PL I B3 l_ 390 [627] JΆ Rung #626 NO ARGON AUXILLIARY SIGNAL TO PAUSE UTCH THE FIX SIGNALS NO÷ARGON AUXPL B3 B3 ( > 809 199 [617] B3/199 - H h " Fi le #2 HAIH_PRGRH - 625 FIX_A-B COMMUNICATIONS LOST I NO_FX_A-B_COMH B3 -EAFI] 810 £617] HOTOR FAULT TIHER DONE HOTOR_FLT 83 811 [5: 15] CHAHBER NOT AT MCUUH N0_VACUUH B3 812 [633] CRYO TEHP ABOVE 20K CRYO_>20K B3 813 [630] LOAD LOCK VENT >30 SECS LLVNT>30SECS B3 814 £176] EXIT LOCK VENT>30 SECS EXLKVNT>30SECS B3 815 £349] LOAD LOCK ROUGHING >60 SECONDS LLRUF>60 B3 816 1170] EXIT LOCK 32r?> [5:188] 3s Rung #627 ARC DETECT AUXILLIARY UTCH PAUSE 2 UTCH ARC_DET AUX2PL 83 B3 T ( ) 272 390 [619] B3/390 1 h * F i le #2 MAIH_PRGRM - 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PRGRM 625 -u>- File tZ MAIH. PRGRH 621 STOP MOTOR 6 B3/474 - H/h FUe #2 MAIH. PRGRH 218 PAUSE UTCH -<L>- File #2 MAIH. PRGRH 638 M6PL B3/475 - H/h File #2 MAIH. PRGRH 258 B3 -(D- File #2 HAIH. PRGRH 641 CU) B3/476 - H/h File #2 MAIH. PRGRH 290 474 -U)- File #2 MAIH. PRGRM 644 B3/477 - H/h FUe #2 MAIH. PRGRH 315 -<L>- File «2 MAIH PRGRH 647 STOP MOTOR 10 PAUSE UTCH M10PL 63 (U) 475 477 512 l_° ( . 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S12 | N7:16 C3] LLOCK VENT CHAMBER LOADLOCK PRESSUR AT THREE CYCLES CLEAN ATMOSPHERE COMPLETE CYCLE PS2 LL-CCC VNT-LL-CC 1:002 C5:9 83 l/l — 1/| CL) 14 07 04 DN 145 I £677] £682] B3/14S - H h " File #2 MAIH_PRGRM - 173 H h - File #2 MAIH_PRGRM - 678,682 -CL)- - FUe #2 KAIH_PRGRM - 680 -(U>- - File tZ MAIH PRGRM - 681 Rung #681 OPEN LLOCK VENT PUMP-VENT LOAD LOCK CHAHBER LOADLOCK CYCLE LOAD CHAMBER PRESSUR AT CLEAN LOCK VENT VALVE ATHOSPHERE CYCLE PO-VNT-LL CV1 PS2 VNT-LL-CC N7:24 0:007 1:002 B3 l/l — (U) I I* 16 04 145 | £677] £177] B3/145 - H h " File #2 HAIH_PRGRH 173 H/h - File t HAIH_PRGRH 678, 682 -<D- - File #2 HAIH PRGRM 680 | PAUSE {DISABLE |TS12 I N7: 16 LLOCK CHAHBER LOAD LOCK PRESSUR AT CLEAN CYCLE ATMOSPHERE COUNTER PS2 LL-CCC 1:002 I — CTU H COUNT UP h(CU) 14 145 04 |COUNTER: C5:9| £677] £681] |PRESET: 4|-(0N) |ACCUM: 0| I CS:9 - CTU - File #2 MAIH_PRGRM - 682 RES - File #2 MAIH_PRGRM - 683 9.DN - H h * File #2 MAIH_PRGRH - 181 H/h " File HZ MAIH_PRGRH - 678,680 - -CL>- - File ta HAIH_PRGRH - 684 -ill)- - File *2 HAIH_PRGRM - 687 _F-.N7:2U3C21 - BTU - File ttZ HAIH PRGRH - 2 Rung #685 | PUMPOOUN ROUGH VALVE 1 j LOADLOCK OPEN DEUY (POLL RV10P_DLY N7:24 i — TON HTIHER ON DEUY |-( E, 15 |TIHER: T4:189| .084] JBASE (SEC): 1.0|-(M) (PRESET: 5| j ACCUH: OJ T4:189.DN - - μ - File #2 MAIH_PRGRH - 167 μ^> Rung #491 HANUAL CONTROL CRYO GATE HANUAL CRYO 10 OPEN GATE 10 OPEN M-HV10-1 HCG100P N7:4 N7:25 (L) 14 14 £3] N7:2S/14 1 h " Fi le #2 HAIH_PRG«H - 133, 134, 494 -<U)- - F i le #2 MAIH_PRGRH - 492 |MANUAL CRYO _F:N7:2UX21 - 8TU - Fi le #2 - 2 JGATE 10 CLOSE N7:27/5 - -(D- - Fi le #2 MAIH_PRGRM - 492 |HCG10CL F:N7:21 l%21 - BTU - Fi le #2 MAIH PRGRH - 2 j H7:27 I (U) 5 Rung #492 MANUAL CONTROL CRYO GATE HANUAL CRYO 10 CLOSE GATE 10 OPEN H-HV10-0 HCG10OP N7:6 H7:25 T (U) 14 £3] N7:25/14 - _| μ - Fi le ta HAIH_PRGRM - 133, 134 , 494 -(D- - Fi le #2 HAIH_PRGRM - 491 |MANUAL _F:N7:21 I3_21 - BTU - Fi le #2 MA1H_PRGRM - 2 HANUAL CRYO jCONTROL N7:27/5 - -(U)- - Fi le « HA1H_PRGRH - 491 GATE 10 CLOSE jCRYO GATE F:N7:21 I5__1 - BTU - Fi le #2 MAIH PRGRH - 2 HCG10CL jlOTHROTTLE N7:27 |H-HV10-2 (D N7:5 5 | £3] j PREPARE FOR j AUTO RUN (>AUT0 N7:37 I 1 | £162] j COHPRESSOR j 7 REGEN- JERATION j PROGRAM CYRGN7 I B3 327 £3:57] m$ -CD- - File #2 MAIH_PRGRH - 493 -<U.- - File ta MAIH_PRGRH - 494 _F:N7:21I5__1 - BTU - File #2 MAIH_PRGRM - 2 Rung #494 HANUAL CONTROL MANUAL CRYO CRYO GATE GATE 10 10 CLOSE THROTTLE H-HV10-0 MCG10TL N7:6 N7:26 (U) 9 [3] N7:26/9 - -\ | Fi le #2 HAIH_PRGRM - 134 -CD- - F i le #2 MA1H_PRGRM - 493 F:N7:21 1X21 - BTU - F i le #2 MAIH PRGRM - 2 ANUAL CRYO GATE 10 OPEN MCG10OP N7:25 14 [492] PREPARE FOR AUTO RUN >AUTO N7:37 1 [162] COHPRESSOR 7 REGEN¬ ERATION PROGRAM CYRGN7 83 327 [3:57] L j So Rung #495 HANUAL CONTROL CRYO GATE MANUAL CRYO 11 OPEN GATE 11 OPEN H-HV11-1 HCG110P N7:4 N7:25 CL) 15 15 £3] N7:25/15 - -| h FUe #2 HAIH_PRGRH - 135, 136, 498 -(U)- - File t HAIH_PRGRH - 496 |HANUAL CRYO _F:N7:21l * *21 - BTU - File #2 - 2 |GATE 11 CLOSE N7:27/6 - -CD- - File #2 MAIH_PRGRH - 496 |HCG11CL F:N7:21IX21 - BTU - File #2 KAIH PRGRH - 2 j N7:27 1 (U) 6 Rung #496 HANUAL CONTROL CRYO GATE HAHUAL CRYO 11 CLOSE GATE 11 OPEN M-HV11-0 MCG110P N7:6 N7:25 — I I CU) 6 15 [3] N7:25/15 1 - File #2 MAIH_PRGRH - 135, 136, 498 -CD- - File #2 HA1H_PRGRH - 495 MANUAL _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 | HANUAL CRYO CONTROL N7:27/6 - -CU>- - File #2 MAIH_PRGRM - 495 | GATE 11 CLOSE CRYO GATE F:N7:21IJ21 - BTU - File #2 HAIH PRGRM - 2 IMCG11CL 11THR0TTLE N7:27 M-HV11-2 (D N7:5 6 10 [3] PREPARE FOR AUTO RUN >AUT0 N7:37 1 [162] COMPRESSOR 8 REGEN¬ ERATION PROGRAM CYRGN8 B3 328 £3:63] • ZΛ Rung #497 IHANUAL jCONTROL HANUAL CRYO jCRYO GATE GATE 11 |11THR0TTLE THROTTLE |H-HV11-2 HCG11TL I N7:5 N7:26 I 1 (D 10 10 I ∞ N7:26/10 - -\ h File ta HAIH_PRGRM - 136, 136 -(D- File ta MAIH_PRGRH - 497 -(U)- File #2 HAIH_PRGRH - 498 _F:N7:21I5__1 - BTU - File #2 MAIH_PRGRM Rung #498 HANUAL CONTROL HANUAL CRYO CRYO GATE GATE 11 11 CLOSE THROTTLE M-HV11-0 HCG11TL N7:6 N7:26 T (U) 10 C3] N7:26/10 - - - i le #2 MAIH_PRGRM 136 -(D- FUe #2 MAIH PRGRM 497 F:N7:21 IX21 - BTU - FUe #2 HAIH PRGRM - 2 HANUAL CRYO GATE 11 OPEN HCG110P N7:25 15 £496] PREPARE FOR AUTO RUN >AUTO N7:37 1 £162] COMPRESSOR 8 REGEN¬ ERATION PROGRAM CYRGN8 B3 328 £3:63] i^Zl Rung #499 MANUAL CONTROL CRYO GATE HANUAL CRYO 12 OPEN GATE 12 OPEN H-HV12-1 HCG120P N7:5 N7:26 (D 0 £3] N7:26/0 - - ~ - Fi le #2 MAIH_PRGRM - 137, 138, 502 - U)- - Fi le #2 MAIH_PRGRH - 500 | HANUAL CRYO _F:N7:21 U21 - BTU - Fi le #2 MAIH_PRGRM - 2 |GATE 12 CLOSE N7:27/7 - -(D- - Fi le #2 HAIH_PRGRM - 500 |HCG12CL F:N7:21 t521 - BTU - FUe #2 MAIH PRGRM - 2 N7:27 U) 7 Rung #500 HANUAL CONTROL CRYO GATE HANUAL CRYO 12 CLOSE GATE 12 OPEN H-HV12-0 MCG120P N7:6 N7:26 (U) 0 I £3] N7:26/0 - -\ μ - File #2 MAIH_PRGRM - 137, 138, 502 -CD- - File #2 HAIH_PRGRH - 499 |MANUAL _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 MANUAL CRYO jCONTROL N7:27/7 - -CU}- - File #2 MAIH_PRGRH - 499 GATE 12 CLOSE jCRYO GATE F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 HCG12CL |12THROTTLE H7:27 |H-HV12-2 (D N7:5 7 I 11 113] IPREPARE FOR jAUTO RUN (>AUT0 N7:37 I 1 | [162] |COHPRESSOR |7 REGEN- JERATION jPROGRAM :YRGN7 l 83 327 £3:57] l ) Rung #501 I MANUAL j CONTROL HANUAL CRYO j CRYO GATE GATE 12 J 12THROTTLE THROTTLE |M-HV12-2 HCG12TL I N7:5 N7:26 I 1 11 I [3] N7:26/11 - H h * Fi le #2 HAIH_PRGRK - 138, 138 -(D- - F i le ta MAIH_PRGRK - 501 -(U)- - FUe #2 HAIH_PRGRM - 502 _F:N7:21 IX21 - BTU - F i le #2 HAI H_PRGRH Rung #502 MANUAL CONTROL HANUAL CRYO CRYO GATE GATE 12 12 CLOSE THROTTLE M-HV12-0 HCG12TL N7:6 N7:26 (U) 11 £3] N7:26/11 - -| μ - File #2 HAIH_PRGRM - 138 -<D- - FUe #2 MAIH_PRGRM - 501 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 MANUAL CRYO GATE 12 OPEN MCG120P N7:26 [500] PREPARE FOR AUTO RUN >AUTO N7:37 1 I 1 [162] COHPRESSOR 7 REGEN¬ ERATION PROGRAM CYRGN7 83 l_ 327 [3:57] Rung #503 MANUAL CONTROL MANUAL ROUGH ROUGH PUMP PUMP VALVE VALVE 1 OPEN 1 OPEN H-RV1-1 MRPV10P N7:7 N7-.28 (D 0 Q] N7.-28/0 - H h * File #2 MAIH_PRGRH - 167 1MANUAL ROUGH -(U)- - File ttZ MAIH_PRGRH - 508 JPUMP VALVE _F:N7:2U521 - BTU - File #2 HAIH_PRGRH - 2 |1 CLOSE N7:33/3 - -<L)- - File #2 MAIH_PRGRH - 508 JMRPVICL F:N7:21I5__1 - BTU - File #2 MAIH PRGRH - 2 j N7:33 I CU) 3 Rung #504 HANUAL CONTROL HANUAL ROUGH ROUGH PUHP PUHP VALVE VALVE 2 OPEN 2 OPEN H-RV2-1 HRPV20P N7:7 N7:28 1 (D 1 I 1 [3] N7:28/1 - -j μ - F Ue #2 HAI H_PRGRM - 56 HANUAL ROUGH -(U)- - F i le #2 KAI H_PRGRH - 509 PUHP VALVE C :N7:21 IX21 - BTU - F i le #2 MAIH_PRGRM - 2 2 CLOSE _<7:33/4 - -(D- - Fi le #2 HAI H_PRGRM - 509 HRPV2CL F:N7:211X21 - BTU - Fi le #2 MAIH PRGRM - 2 N7:33 (U) 4 Rung #505 MANUAL CONTROL MANUAL ROUGH ROUGH PUHP PUHP VALVE VALVE 3 OPEN 3 OPEN H-RV3-1 MRPV30P N7:7 N7:28 (D 2 2 [3] N7:28/2 - -] μ - File #2 HAIH_PRGRH - 57 |MANUAL ROUGH -(U)- - File #2 HAIH_PRGRH - 510 JPUMP VALVE _F:N7:21l%21 - BTU - File #2 MAIH_PRGRH - 2 13 CLOSE N7:33/5 - ~(D- - File #2 HAIH_PRGRM - 510 |MRPV3CL F:N7:21I321 - BTW - File #2 HAIH PRGRM - 2 | N7:33 I (U) 5 Rung #506 NUAL CONTROL HANUAL ROUGH ...JUGH PUHP PUMP VALVE VALVE 4 OPEN 4 OPEN H-RV4-1 HRPV40P N7:7 N7:28 -, CL) I £3] I N7:28/3 - H μ - File #2 MAIH_PRGRH - 58 IHANUAL ROUGH -(U)- - File #Z HAIH_PRGRM - 511 |PUHP VALVE _F:N7:21IX21 - BTU - File #2 HAIH_PRGRM - 2 |4 CLOSE N7:33/6 - -CD- - File #2 MAIH_PRGRH - 511 |HRPV4CL F:N7:211 * 421 - BTU - File #2 MAIH PRGRM - 2 I N7:33 I (U) I A I .-RV4-0 MRPV40P N7.-12 N7:28 (U) 3 £3] N7:28/3 1 μ - File #2 HAIH_PRGRM - 58 -CD- - File #2 MAIH_PRGRH - 506 I HANUAL ROUGH _F:N7:21IX21 - BTU - File #2 HAIH_PRGRM - 2 JPUMP VALVE N7:33/6 - -(U)- - File #2 MA1H_PRGRM - 506 j CLOSE PREPARE FOR F:N7:21I521 - BTU - File #2 MAIH PRGRH - 2 |HRPV4CL AUTO RUN j N7:33 >AUTO ' CL) N7:37 6 1 £162] k& Rung #512 MANUAL CONTROL ROUGH PUMP MANUAL ROUGH 5 VALVE PUMP VALVE CLOSE 5 OPEN H-RV5-0 MRVP50P N7:12 N7:28 (U) I £3] N7:28/4 1 μ - FUe #2 MAI H_PRGRM - 340 -<L) Fi le #2 HAI H PRGRH - 507 |MANUAL ROUGH _F:N7:21IX21 - BTU - File #2 HAIH_PRG*H - 2 jPUMP VALVE N7:33/7 - -tut- - File #2 KAIH_PRGRK - 507 j5 CLOSE PREPARE FOR F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 |HRPVSCL AUTO RUN j N7:33 >AUTO ' CL) • N7:37 7 l_ 1 £162] Rung #513 MANUAL CONTROL HOTOR 3 HANUAL HOTOR ON 3 ON '-HC0N3 HH30N 111 MAIH_PRGRM - 195,197 MAIH_PRGRM - 534 MAIH_PRGRM - 515 MAIH_PRGRH - 553 βZ KAIH PfiGRM - 2 MANUAL HOT 6 ON HH60N H7:23 CD 4 MAI H_PRGRK - 218,220 MAI H_PRGRH - 535 MAI H_PRGRH - 516 MAIH_PRGRH - 554 #2 KAIH PRGRK - 2 MANUAL MOTO 7 ON ►W70N H7:23 (D 5 I £3] N7:23/5 1 μ - FUe #2 HAIH_PRGRM - 231 ,233 - / File #2 KAIH_PRGRH - 536 -CD- - File #2 MA1H_PRGRH - 517 518 556 MANUAL MOTOR 9 ON HH90N N7:23 (D 7 | £3) N7:23/7 - H h " Fi le #2 HAIH_PRGRM - 253.255 H/ h " Fi le ta HAI H_PRGRH - 538 kis -CD- - FUe «Z MAIH_PRGRM - 519 -<U)- - Fi le #2 MAIH_PRGRM - 557 F:N7:21 IX21 - BTU - FUe #2 MAIH PRGRM - 2 Rung #520 |MANUAL jCONTROL JMOTOR 10 HANUAL HOTOR |0N 10 ON |M-HCON10 MM10ON | N7:2 N7:23 CL) I 8 8 | £3] N7:23/8 - -\ (- - Fi le ta MAIH_PRGRH - 258,260 H/h - Fi le #2 HΛIH_PRGRN - 539 -CD- - Fi le ta HAIH_PRGRH - 520 -CU)- - Fi le ta MAIH_PRGRH - 558 F:N7:21IX21 - BTU - Fi le #2 MAIH PfiGRM - 2 Rung #521 IHANUAL jCONTROL JMOTOR n MANUAL MOTOR |ON 11 ON |H-MC0N11 MM110N j N7:2 N7:23 I — I I (D I 9 9 • i- :23/9 H h " F le #2 HA1H_PRGRM - 263,265 H/h - F le #2 KA1H_PRGRM - 540 -α>- - F le #2 MAIH_PRGRH - 521 -(U)- - F le MAIH_PRGRM - 559 _F:N7:21 tX21 - BTU File #2 MAIH PRGRM - 2 Rung #522 I MANUAL j CONTROL JMOTOR 12 MANUAL HOTOR |0N 12 ON |H-MCON12 HH120N | N7:2 N7:23 hH I (D I 10 10 | £3] N7:23/10 H h- FUe #2 HAIH_PRGRH - 281 H/h- Fi le ttZ HAIH_PRGRH - 541 -(D- - Fi le ttZ HAIH_PRGRH - 522 -<U)- - Fi le #2 MAIH_PRGRH - 560 F:N7:21IX21 - BTU - Fi le ta MAIH PRGRH - 2 Rung #523 \NUAL , -OHTR0L JMOTOR 13 HANUAL MOTOR |ON 13 ON |H-MCON13 MH130N | N7:2 N7:23 (L) 11 o _F:N7:21IX21 - BTU File ta MAIH PRGRH Rung #524 IHANUAL jCONTROL JMOTOR 14 MANUAL MOTOR |0N 14 ON (M-MC0N14 KH140N N7:2 N7:23 (D I 12 12 I £ . N7:23/12 - - \- - File #2 HAIH_PRGRH - 290,292 H/h- File #2 HAIH_PRGRH - 543 -(D- - FUe ta MAIH_PRGRH - 524 -(U>- - File ta MAIH_PRGRH - 562 _F:N7:21IX21 - BTU - File ta HAIH PRGRH - 2 Rung #525 |MANUAL jCONTROL jHOTOR 15 |ON (H-HCON15 j N7:2 I— I I I 13 13 I [3] N7:23/13 - _| μ - FUe #2 HAIH_PRGRM - 295,297 H/h- File #Z MAIH_PRGRM - 544 -CD- - File #2 HAIH_PRGRM - 525 _(U)- - File #2 MAIH_PRGRM - 563 F:N7:21l * *__1 - BTU - File tl2 MAIH PRGRM - 2 Rung #526 (MANUAL jCONTROL |HOTOR 16 HANUAL HOTOR (ON . 16 ON (H-HC0N16 HH160N j N7:2 N7:23 h- 1 I (D I 1« 14 113] N7:23/14 - — j μ - File #2 MAIH_PRGRM - 306 H/h- File ttZ MAIH_PRGRH - S45 -CD- - File #2 MAIH_PRGRM - 526 -(U)- - File #2 MAIH_PRGRH - 564 _F:N7:21IX21 - BTU - File ttZ HAIH PRGRM - 2 Rung #527 | MANUAL j CONTROL -ITOR 17 HANUAL HOTOR Rung #528 IHANUAL jCONTROL JMOTOR ιa MANUAL MOTOR |0N 18 ON |H-HC0N18 MH180N j N7:3 N7:24 I—I I (L) I o 0 £3] MAIH_PRGRM - 315,317 HAIH_PRGRH - 547 MAIH_PRGRH - 528 MAIH_PRGRH - 566 #2 MAIH PRGRH - 2 MANUAL MOTOR 19 ON MM190N N7:24 CL) 1 HAIH_PRGRM - 320,322 HAIH_PRGRK - 548 MAIH_PRGRM - 529 MAIH_PRGRM - 567 HOTOR 24 HOTOR MM210N N7:24 (D I 3 3 | £3] N7:24/3 - H h * File #2 MAIH_PRGRM - 355,357 -CD- - File #2 HAIH_PRGRH - 531 -(U)- - FUe #2 MAIH_PRGRM - 569 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 .1 •'_- L 3Z. Rung #532 (MANUAL HOTOR HANUAL MOT |3 OH 3 OFF fMβOH KM30FF I N7:23 N7:21 I 1 / | C ) I 1 3 | £S13] N7:21 - BTU - Fi le #2 MAIH_PRGRH - 2 F:N7:ZUX21 - BTU - FUe #2 HAIH_PRGRH Rung #533 IMANUAL HOTOR MANUAL HOT |4 ON 4 OFF |MM40N HM40FF j N7:23 N7:21 | |,| ( ) I 2 4 j £514] N7:21 - BTU - Fi le #2 MAIH_PRGRM - 2 _F:N7:21 U21 - BTU - Fi le #2 MAIH_PRGRK Rung #534 jHANUAL MOTOR HANUAL HOTO |5 ON 5 OFF |MM50N HM50FF j N7:23 N7:21 | 1/| ( ) I 3 5 • 515] :21 - BTU - File #2 MAIH_PRGRH - 2 N7:21 - BTU - FUe #2 HAIH_PRGRM - 2 _F:N7:21I521 - BTU - File #2 HAIH PRGRH - Rung #536 | MANUAL MOTOR HANUAL HOTO |7 ON 7 OFF (MH70N HM70FF j N7:23 N7:21 I 1/| { ) I 5 7 I £517] N7:21 - BTU - Fi le #2 HAIH_PRGRH - 2 " :N7:21 I5__1 - BTU - Fi le #2 HAI H PRGRH - ng #537 I HANUAL MOTOR MANUAL MOTO |8 ON 8 OFF |HH80N MH80FF I «7:23 N7:21 | 1,| ( ) I 6 8 | £518] N7:21 - BTU - Fi le #2 HAI H_PRGRH - 2 F:N7:21 I521 - BTU - Fi le la MAIH PRGRH - Rung #538 (MANUAL MOTOR HANUAL HOTO |9 ON 9 OFF |MN90N MM90FF j N7:23 N7:21 I 1/| ( ) I 7 9 I £519] N7:21 - BTU - Fi le #2 MAIH_PRGRM - 2 N7:21 - BTU - File #2 HAIH_PRGRH - 2 F:N7:21IX21 - BTU - FUe #2 HAIH PRGRH - t F:N7:21 IX21 - BTU Fi le ta MAIH PRGRM - 2 Rung #551 MANUAL CONTROL MOTOR 3 MAHUAL HOTO OFF 3 ON H-HC0F3 MH30N N7:0 N7:23 T (U) 1 £3] N7:23/1 - H μ - File #2 HAIH_PRGRH - 185, 187 H/μ - File #2 HAIH_PRGRH - 532 -<D- - File #2 HAIH_PRGRH - 513 F:N7:21IX21 - BTU - File #2 KAIH PRGRK - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1 [162] Rung #552 HANUAL CONTROL HOTOR 4 HANUAL MOTO OFF 4 ON H-KC0F4 HM40N [162] •A3C Rung #553 CONTROL MOTOR 5 MANUAL HOTO OFF 5 ON M-MC0F5 MMSON N7:0 N7:23 (U) 3 £3] N7:23/3 - -j μ - File #2 MAIH_PRGRM - 195, 197 -|/h " File ta MAIH_PRGRH - 534 -CD- - File SZ HAIH_PRGRH - 515 F:N7:21IX21 - BTU - File #2 MAIH PRGRK - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1 £162] Rung #554 HANUAL CONTROL HOTOR 6 HANUAL HOTOR OFF 6 ON H-MC0F6 HH60N £162] Rung #555 MANUAL CONTROL HOTOR 7 MANUAL MOTOR OFF 7 OH H-HCOF7 HH70N N7:0 N7-.23 CU) 5 I £3] N7:23/5 - ~\ μ - Fi le #2 HAI H_PRGRM - 231 , 233 H / μ - Fi le HAI H_PRGRH - 536 -CD- - Fi le *2 HAIH_PRGRH - 517 F:N7:2HS21 - BTU - Fi le #2 HAI H PRGRH - 2 PREPARE FOR AUTO RUN >AUT0 N7:37 £162] L< Rung #556 MANUAL CONTROL MOTOR 8 HANUAL HOTOR OFF 8 ON M-MC0F8 MM80N N7:0 N7:23 *r (U) 8 6 Q] N7:23/6 - -| h - ile #2 MAIH_PRGRK - 249 H/h " File #2 MAIH_PRGRK - 537 -<L>- - File MAIH_PRGRM - 518 F:N7:21lJt21 - BTU - FUe #2 MAIH PRGRH - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1 £162] Rung #557 HANUAL CONTROL HOTOR 9 HANUAL HOTOR OFF 9 ON H-HCOF9 HH90N N7:0 N7:23 U) 7 IB ] N7:23/7 - -\ \- - File #2 MAIH_PRGRH - 253, 255 H/h ' File #2 MAIH_PRGRM - 538 -CD- - File #2 HAIH_PRGRM - 519 F:N7:21I521 - BTU - File #2 MAIH PRGRH - 2 IPREPARE FOR jAUTO RUN |>AUTO N7:37 1 £162] Rung #558 HANUAL CONTROL HOTOR 10 MANUAL MOTOR OFF 10 ON M-HCOF10 MM10ON N7:0 N7:23 (U) 10 £3] N7:23/8 1 μ - File ta MAIH_PRGRM - 258, 260 H/μ - File #2 HAIH_PRGRM - 539 -CD- - File ta HAIH_PRGRM - 520 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1 £162] \A!% Rung #559 MANUAL CONTROL HOTOR 11 HANUAL HO OFF 11 ON H-HCOF11 HM110N N7:0 N7:23 —| I (U) 11 9 I£3] N7:23/9 - - (- - File #2 MAIH_PRGRM - 263, 265 H/h * FUe #2 HAIH_PRGRH - 540 -<L)- - File #2 KA!H_PRGRH - 521 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 IPREPARE FOR jAUTO RUN |>AUTO N7:37 1 I 1 £162] Rung #560 HANUAL CONTROL HOTOR 12 HANUAL MOT OFF 12 ON H-HC0F12 KH120N N7:0 N7:23 (U) 12 10 I £3] M7:23/10 - -| μ - File #2 MAIH_PRGRH - 281 -)/μ ' File #2 MAIH_PRGRM - 541 -CD- - File #2 MA1H_PRGRH - 522 F:N7:21I3S1 - BTU - File #2 MAIH PRGRM - 2 | PREPARE FOR j AUTO RUN |>AUT0 I N7:37 1 £162] Rung #561 MANUAL CONTROL HOTOR 13 HANUAL MOT OFF 13 ON K-HCOF13 HM130N N7:0 N7:23 (U) 13 11 £3] N7:23/11 - - " μ - File #2 MAIH_PRGRM - 2S5, 287 H/h" File ta MAIH_PRGRH - 542 -CD- - File *2 MAIH_PRGRH - 523 F:N7:21l%21 - BTU - File MAIH PRGRH - 2 PREPARE FOR AUTO RUN >AUT0 N7:37 1 [162] 1,33 Rung #562 MANUAL CONTROL MOTOR 14 HANUAL HOTO OFF 14 ON M-HC0F14 HM140N N7:0 N7:23 . h (U) 14 12 1(3] N7:23/12 - -\ \- - File #2 MAIH_PRGRH - 290, 292 H/h " File #2 HAIH_PRGRH - 543 -CD- - File ta HAIH_PRGRH - 524 F:N7:21IX21 - BTU - FUe #2 HAIH PRGRK - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1 I 1 £162] Rung #563 MANUAL CONTROL MOTOR 15 HANUAL HOTO OFF 15 ON M-MCOF15 MM150N [162] Rung =564 MANUAL CONTROL MOTOR 16 MANUAL MOTO OFF 16 ON H-MC0F16 MM160N N7: 1 N7:23 (U) 14 [3] N7:23/14 1 μ - Fi le #2 MAIH_PRGRH - 306 H / μ " F i le ta HAIH_PRGRH - 545 -CD- - F i le t MAIH_PRGRH - 526 F : N7:2HX21 - BTU - F Ue #2 KAIH PRGRH - 2 PREPARE FOR AUTO RUN >AUTO N7:37 1_ 1 [162] 1,1,0 Rung #565 MANUAL CONTROL MOTOR 17 MANUAL MOT OFF 17 OH H-HCOF17 HN170N N7:1 N7:23 (U) 1 15 £3] N7:23/15 - -\ - - Fi le #2 HAIH_PRGRM - 310, 312 H / h " Fi le ta HAIH_PRGRH - 546 -CD- - Fi le #2 HAIH_PRGRK - 527 I F :N7:21 l)_21 - BTU - F Ue #2 MAI H PRGRH - 2 I PREPARE FOR | AUTO RUN |>AUT0 | N7:37 1 C162] Rung #566 MANUAL CONTROL MOTOR 18 MANUAL MOTO OFF 18 ON H-HC0F18 MM180N N7: 1 N7:24 (U) 0 I £ 3 N7:24/0 - —\ h " File #2 HAIH_PRGRH - 315, 317 H/h. " File #2 MAIH_PRGRH - 547 -CD- - File ta HAIH_PRGRH - 528 F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 | PREPARE FOR JAUTO RUN |>AUT0 | N7:37 1 [162] Rung #567 HANUAL CONTROL MOTOR 19 MANUAL HOTO OFF 19 ON K-HCOF19 MM190N N7:1 N7-.24 (U) 1 [3J N7:24/1 - -| μ - File #2 HAIH_PRGRH - 320, 322 H/μ " File ifZ HAIH_PRGRH - 548 -(D- - File *2 HAIH_PRGRH - 529 F:N7:21l ** -21 - BTU - FUe #2 MAIH PRGRM - 2 PREPARE FOR AUTO RUN >AUT0 N7:37 £162] ι, Rung #568 HANUAL CONTROL MOTOR 20 HANUAL HOTO OFF 20 ON H-HCOF20 HM20ON N7:1 N7:24 ι r CU) 4 2 I £3] N7:24/2 • -\ \- • File #2 MAIH_PRGRM - 331, 333 H/h " File «2 MAIH_PRGRH - 549, 550 -CD- - File ttZ HAIH_PRGRK - 530 F:N7:21IX21 - BTU - File f.2 HAIH PRGRH - 2 (PREPARE FOR j AUTO RUN |>AUTO I N7:37 1 £162] Rung #569 MANUAL CONTROL HOTOR 21 HANUAL HOTOR OFF 21 ON H-HCOF21 HM210N N7:1 N7:24 (U) 3 I £3] N7:24/3 - - μ - File #2 MA1H_PRGRM - 355, 357 -CD- - File #2 MAIH_PRGRH - 531 F:N7:21I5__1 - BTU - FUe #2 MAIH PRGRH - 2 IPREPARE FOR j UTO RUN |>AUTO N7:37 [162] L-L-Z- ABLE REVERSE Rung #572 MOTOR 5 REVERSE MOTOR 5 ENABLE REVERSE HSRE HSR N7:19 B3 CD— 105 £3] |HANUAL B3/105 - H h " File #2 HAIH_PRGRH - 197 jHOTOR 5 H/h " File #2 HAIH_PRGRH - 195 |REVERSE -CU)- - File #2 KAIH_PRGRH - 591 |ENABLE N7:40/4 - -(U)- - File #2 MAIH_PRGRM - 591 |HH5RE _F:N7:21l)__1 - BTU - File #2 MAIH_PRGRM - 2 | N7:40 N7:35/1 CD- - File #2 HAIH_PRGRH - 591 I— ( D F:N7:21IX21 - BTU - FUe #2 HAIH PRGRH - 2 I (MANUAL |HOTOR 5 |REVERSE jDISABLE JHHSRO j N7:35 I (U)— 1 Rung #573 MOTOR 6 • ΈVERSE MOTOR 6 -NABLE REVERSE M6RE M6R N7:19 B3 CD— 106 £3] MANUAL B3/106 - H h " File #2 HAIH_PRGRH - 220 MOTOR 6 H/h * File #2 HAIH_PRGRH - 218 REVERSE -ti))- - File IfZ MAIH_PRGRH - 592 ENABLE N7:40/5 - -lli - - File #2 HAIH_PRGRH - 592 MH6RE _F:N7:21IX21 - BTU - FUe #2 HAIH_PRGRH - 2 N7:40 N7:35/2 - -CD- - File #2 HAIH_PRGRH - 592 I— ( ) F:N7-.21IX21 - BTU - File #2 MAIH PRGRH - 2 5 MANUAL HOTOR 6 REVERSE DISABLE MM6RO N7:35 <U>— 2 1,1,1, ΞVERSE MOTOR 8 ENABLE REVERSE H8RE M8R N7:19 B3 CD— 108 £3] HANUAL B3/108 - H μ - File #2 HAIH_PRGRH - 249 MOTOR 8 H/μ - File #2 HAIH_PRGRH - 249 REVERSE -(U)- - File t HAIH_PRGRH - 594 ENABLE N7:40/7 - - »)- - File #2 HAIH_PRGRH - 594 MM8RE _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 N7:40 N7:35/4 - -CD- - File #2 MAIH_PRGRH - 594 CD— F:N7:21I521 - BTU - File #2 MAIH PRGRH - 2 7 MANUAL MOTOR 8 REVERSE DISABLE HH8R0 H7:35 1 CU)— 4 ~. . Rung #576 MOTOR 9 REVERSE MOTOR 9 ENABLE REVERSE M9RE M9R N7:19 B3 C 8 109 £3] MANUAL B3/109 - H h " File #2 MAIH_PRGRH - 255 HOTOR 9 H/h " File KΛIH_PRGRM - 253 REVERSE -(U>- - File #2 MAIH_PRGRM - 595 ENABLE N7:40/8 - -(U>- - File #2 HAIH_PRGRH - 595 HH9RE _F:N7:21IX21 - BTU - File #2 MΛIH_PRGRH - 2 N7:40 N7:35/5 - -<D- - File #2 MAIH_PRGRM - 595 I—<ι> F:N7:21IX21 - BTU - File #2 MAIH PRGRH - 2 8 HANUAL HOTOR 9 REVERSE DISABLE HH9RD N7:35 U) 5 Rung # 577 MOTOR 10 • ΈVERSE MOTOR 10 .NABLE REVERSE M10RE M10R N7: 19 B3 | 1 | CD 9 | 110 £3] I IHANUAL B3/110 - H h * Fi le #2 HAIH_PRGRH - 260 (HOTOR 10 H / h " F Ue #2 HAIH_PRGRH - 258 jREVERSE -(U)- - F i le #2 MAIH_PRGRH - 596 IENABLE N7:40/9 - -<U)- - Fi le #2 MAIH_PRGRH - 596 |HH10RE _F:N7:21 1X21 - BTU - Fi le #2 HAIH_PRGRH - 2 j N7:40 N7:35/6 - -CD- - Fi le #2 MAI H_PRGRH - 596 H L > F:N7:21 IX21 - BTU - F i le #2 KAI H PRGRH - 2 I ' |MANUAL JMOTOR 10 jREVERSE JOISABLE JMHIORD I N7:35 1 CL) 6 !_ _£ Rung #578 MOTOR 11 REVERSE HOTOR 11 ENABLE REVERSE M11RE H11R N7:19 B3 10 111 £3] IMANUAL B3/111 - H h " File tZ MAIH_PRGRM - 265 JMOTOR 11 H/h " File ta MAIH_PRGRH - 263 | EVERSE -til)- - File ta MAIH_PRGRH - 597 jENABLE N7:40/10 - -CU)- - File #2 MAIH_PRGRH - 597 |MH11RE _F:H7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 j N7:40 N7:35/7 - -CD- - File #2 MAIH_PRGRM - 597 I C F:N7:21IX21 - BTU - File #2 MAIH PRGRH - 2 I « |HANUAL JMOTOR 11 jREVERSE jDISABLE |HM11RD I N7:35 I (U) 7 Rung #579 HOTOR 12 "•A VE SE MOTOR 12 .ABLE REVERSE H12RE M12R N7: 1 B3 (D 11 112 £3] MANUAL B3/112 - H μ - File #2 HAIH_PRGRM - 281 HOTOR 12 H/μ - File ta HAIH_PRGRH - 281 REVERSE -(U)- - File HAIH_PRGRH - 598 ENABLE N7:40/11 - -(U)- - File #2 HAIH_PRGRM - 598 HH12RE _F:N7:21l * 421 - BTU - File #2 HAIH_PRGRH - 2 N7:40 N7:35/8 - -(D- - File #2 HAIH_PRGRH - 598 (D F:N7:21l * -21 - BTU - File #2 MAIH PRGRM - 2 11 HANUAL HOTOR 12 REVERSE DISABLE HH12RD N7:35 (U) 8 Rung #580 MOTOR 13 REVERSE MOTOR 13 ENABLE REVERSE M13RE M13R N7:19 B3 - 1 (D 12 I "3 £3] I IMANUAL B3/113 - H h " File #2 MAIH_PRGRM - 287 JMOTOR 13 H/h " File ta MAIH_PRGRM - 285 IREVERSE -<U)- - File ta MAIH_PRGRH - 599 |ENABLE N7:40/12 - -(U>- - File #2 MAIH_PRGRM - 599 |HH13RE _F:N7:21IX21 - BTU - File #2 MATH_PRGRM - 2 | N7:40 N7:35/9 - -<D- - File #2 MAIH_PRGRH - 599 |—(D F:N7:21l * C1 - BTU - File #2 HAIH PRGRH - 2 I 12 (MANUAL |M0T0R 13 jREVERSE |DISABLE |KH13RD | N7:35 9 Rung #581 HOTOR 14 "EVERSE MOTOR 14 (ABLE REvεRsε MURE M14R N7: 19 B3 I — I I - I CD 13 j 114 [3] I |MANUAL 63/114 - H μ - File #2 HAIH_PRGRH - 292 JMOTOR H H/μ - File #2 MAIH_PRGRH - 290 jREVERSE -(U)- - File ta MΛIH_PRGRM - 600 IENABLE N7:40/13 - -(U)- - File #2 HA1H_PRGRM - 600 JHHURE _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 j N7:40 N7-.35/10 - -CD- - File #2 HAIH_PRGRM - 600 I (L) F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 I 13 |MANUAL JMOTOR H |REVERSε joiSABLε |MM14R0 j N7:35 1 (U) 10 Rung #692 I EXLOCK I ENT-PUMP CHAMBER PUMPOOUN JCYCLE EXIT OOOfi 12 DOOR 11 THREE CYαES PRESSUR AT VENT EXIT LOCK jLOCK CLOSED CLOSED COMPLETE ATMOSPHERE EXIT LOCK CLEAN CYC |VNT-PD-EX 0RCL12S DRCL11S EX-CCC PS6 VNT-EX PO-EX-CC | N7:27 1:056 1:056 C5:11 1 :052 B3 B3 1/( 1/|— CD 06 04 DN 04 " 498 497 I £691] £696] £694] B3/497 H h * Fi le «Z HAIH_PRGRM - 337.340,367 -CD- ■ Fi le #2 MAIH_PRGRM - 692 -tuy- ■ FUe ta HAIH PRGRM - 693 Rung #693 EXITLOCK VENT-PUMP CHAMBER PUMPOOUN CYCLE EXIT <250 EXIT LOCK LOCK MICRONS CLEAH CYCL VNT-PO-EX PIR17 PO-EX-CC N7:27 1:054 B3 -I U) I 9 10 497 I£691] I 83/497 H h - File #2 HAIH_PRGRH - 337, 340, 367 I -CD- - FUe #2 HAIH PRGRH - 692 IPAUSE [DISABLE (TS12 j N7:16 £3] Rung #694 EXITLOCK EXLOCK VENT-PUHP CHAHBER CHAHBER CYCLE EXIT ■ -250 PRESSUR AT THREE CYCLES VENT LOCK HICRONS ATHOSPHERE COMPLETE EXIT LOC VNT-PO-EX PIR17 PS6 EX-CCC VNT-EX N7:27 1 :054 1:052 C5:11 B3 1/| l/l (L) 10 04 DN 498 £691] £696] B3/498 - H h " File #2 HAIH_PRGRH - 346,367 H/h - File ttZ HAIH_PRGRH - 692,696 -(D- - File #2 HAIH_PRGRH - 694 -(U)- - File #2 HAIH PRGRH - 695 Rung #689 EXLOCK OPEN CHAMBER EXLOCK VENT PRESSUR AT CHAMBER VENT EXIT LOCK ATMOSPHERE VENT VALVE EXIT LOC VNTEX PS6 CV5 VNTEX N7:27 1:052 0:057 N7:27 1/| (U) 04 16 8 £689] [367] N7:27/8 - H μ - Fi le #2 MAIH_PRGRH - 337, 339, 346, 689- H/ | Fi le ttZ MAIH_PRGRH - 690, 698 -CD- - Fi le ttZ HAIH_PRGRH - 688 PUMP DOUN F:N7:21 IX21 - BTU - FUe #2 HAIH PRGRH - 2 EXIT LOCK PUSH BUTTON PDEXPB N7:6 10 £3] PAUSE DISABLE TS12 N7.-16 εXLOCK CHAHBER VENT-PUMP PRESSUR AT CYCLE EXIT ATHOSPHERE LOCK PS6 VNT-PO-EX 1:052 N7:27 CD 04 9 ,339,351,691,692,693,694,695,696 / - File «2 KAIH_PRGRH - 688,697,698 -CD- - File #2 HAIH_PRGRH - 690 -tuy- - File ttZ MAIH_PRGRM - 691 F:N7:211X21 - BTU - File #2 KAIH_PRGRM - 2 Rung #691 VENT-PUHP VENT-PUMP CYCLE EXIT DOOR 12 CYCLE EXIT LOCK OPEN LOCK VNT-PO-EX DROP12S VNT-PO-EX N7:27 1:056 N7:27 — I h- CU) 07 9 £691] N7:27/9 - -\ \- - F Ue ta MAIH_PRGRM - 78, 339, 351 , 691 , 692, 693, 694, 695 , 696 H / h * F Ue ttZ HAIH_PRGRH - 688, 697, 698 -CD- - Fi le #2 KAIH_PRGRH - 690 F:N7:21 IS21 - BTU - Fi le #2 HAIH PRGRH - 2 PAUSE DISABLE TS12 N7:16 £3] I j So ) EX PIR17 PFEXEND N7:27 1:054 i — TON -(TIMER OH DELAY h(E« 10 10 |TIMER: T4:222( £698] |BASE (SEC): 1.0|-(0N) T4:222.DN - H h- File ttZ M IH_PRGRM - 700 |PRESET: 5J | PIRINI T4:222.TT - H h - FUe #2 MAIH PRGRM - 98 |ACCUM: oj j GUAGE 8 (NO FAULT |PGNF8 I 1:054 _/_— 15 Rung #700 PUHP DOW. EXIT LOCK PFEXEND POEX T4:222 N7:27 <U> ( DN 10 £699] N7:27/10 - H h " File #2 HAIH_PRGRH - 78, 340, 699 H/h " File ta HAIH_PRGRM - 109, 688, 690 -CD- - FUe ta HAIH_PRGRM - 698 F:N7:21l%21 - BTU - File #2 HAIH PRGRH - 2 PAUSE DISABLE TS12 N7:16 £3] -CD- - File ta HAIH_PRGRH - 688 -(U)- - File #2 HAIH_PRGRM - 689 F:N7:21I5_21 - BTU - File #2 HAIH PRGRH - 2 l 3 4- Rung #704 IMANUAL jCONTROL MANUAL jCHAMBER CHAMBER JVEHT VALVE VENT 4 |4 αosε CLOSE |H-CV4-0 MCVHT4CL j N7:4 N7:25 I 1 l 1 (L) I 3 I 3 I £3] I |HANUAL I N7:25/3 - -(U)- - File #2 HA1H_PRGSM - 709 jCHAMBER j _F:N7:21 IX21 - BTU - Fi le #2 HAIH_PRGRH - 2 jVENT 4 j N7:27/14 - -CL)- - Fi le #2 MΛIH_PRGRM - 709 |OPEN F:N7:21 l 21 - BTU - Fi le #2 MAIH PRGRH - 2 |HCVNT40P j N7:27 14 Rung #705 (HANUAL jCONTROL HANUAL (CHAHBER CHAHBER |VENT VALVE VENT 5 j5 CLOSE CLOSE jκ-CVS-0 HCVNT5CL I N7:4 N7:25 _| | CL) I 4 j£3] I |HANUAL | N7:25/4 - -<U)- - Fi le #2 HA1H_PRGR_. - 710 |CHAMBER j _F:N7:21 IX21 - BTU - Fi le #2 MA1H_PRGRM - 2 IVENT 5 j N7:27/15 - -CD- - Fi le #2 HΛIH_PRGRH - 710 jOPEN F:N7:21 IS21 - BTU - Fi le #2 MAIH PRGRH - 2 JHCVNTSOP j N7:27 I (U) 15 Rung #706 IMANUAL jCONTROL HANUAL jCHAMBER CHAHBER |VENT 1 VENT 1 jopεπ OPEN |H-CV1-1 HCVNT10P I N7:6 N7:27 (L) 11 11 I £3] I |HANUAL I N7:27/11 - -(U)- - Fi le #2 HAIH_PRGRM - 701 |CHAHBER j _F:N7:21 l%21 - BTU - Fi le #2 MΛIH_PRGRM - 2 jVENT 1 j N7:25/0 - -CD- - Fi le #2 MAIH_PRGRM - 701 |CLOSE F:N7:21I521 - BTU - Fi le #2 MAIH PRGRM - 2 JHCVNTICL j N7:25 1 (U) 0 -<D- File #2 HAIH_PRGRH - 711 -{U>- Fi le ta MAIH PRGRM - 713 ≤-Y 83/285 - H μ " File #2 MAIH_PRGRH - 717 -C )- - File #2 MAIH PRGRM - 716 b£% [5:202] Rung #719 UATER FLOU OP8N UATER SUITCH TIHER VALVε FOR TES UFS_THR UFS_THR OPJ/LV i — Gεo- I—LEQ- -| 83 GRTR THAN OR EQUAL (A>=B) hi LESS THAN OR EQUAL (A<=8)|- ( ) SOURCE A: T4:330.ACC| I SOURCE A: T4:330| 342 °l 512| SOURCE B: 11| SOURCE B: 19| 111 191 _l L. T4:330.ACC - [712] T4:330 [712] B3/342 - H h ' File *2 HAIH_PRGRH - 721 -( >- - File *2 HAIH_PRGRH - 719 Rung #720 CLOSE UATER VALVE FOR TES |UFS_TMR UFS_TMR CL_VLV j I — GEQ- 83 GRTR THAN OR EQUAL (A>=B)μ|LESS THAN OR EQUAL (A<=B)(~ C ) XIRCE A: T4:330.ACC| SOURCE A: T4:330.ACC 341 0| 0 SOURCE B: 1| I SOURCE B: 9 II 9 J l_ |T4:330.ACC - [712] T4-.330.ACC - [712] B3/341 - H h " File #2 HAIH_PRGRH 721 -( )- - File #2 HAIH PRGRH 720 Rung #721 UATER VALVE RESET UATER EMERGENCY OFF CLOSE UATER VALVE RESET PUSHBUTTON MAIN UATER ON VALVE FOR TEST UATER VALV RSTH20PB H20EOFPB HAIN_H20 CL_VLV H20_VLV 1:024 1:024 1:002 B3 B3 l/l C ) I 16 17 07 341 146 I [720] | UATER VALVES | H20_VLV I 83 | 146 I £721] JOPEN UATER j VALVE FOR TEST | OP VLV I ~ 83 342 [719] B3/146 - H μ - Fi le ta HAIH_PRGRH - 721 ,723,728,731 ,734,737 -( )- - Fi le #2 HAIH PRGRH - 721 Rung #722 CHROHE UATE ON R_0F_DLY CHR_0N T4:322 B3 -H/l — (U) DN 273 I [728] 83/273 H h - Fi le #2 MAIH_PRGRH 724 -CD- - FUe #2 HAIH_PRGRH 723 -(U)- - Fi le #2 HAIH PRGRH 722 Rung #723 CHROME UATER UATER VALVES MAIN UATER ON ON H20_VLV MAIN_H20 CHR_ON B3 " l :002 B3 (D 146 07 273 [721] B3/273 - H μ - Fi le #2 HAIH_PRGRH - 724 -CU)- - Fi le ta HAIH_PRGRH - 722 B3/274 - H μ - FUe #2 HAIH_PRGRH - 730 | HAG UATER ON -(U)- - Fi le ta MAIH_PRGRH - 729 JMAG_ON B3/275 - H μ - Fi le #2 MAIH_PRGRH - 733 B3 -(U)- - Fi le ta MAIH_PRGRH - 732 CL) 33/276 - H μ " Fi le #2 MAIH_PRGRH - 736 274 -(U)- - File #2 HAIH PRGRH - 735 |CARBON UATER ON |CAR_0N B3 CL) 275 |HEATER UATER ON jHTR_ON 83 CL) 276 Rung #724 CHROME UATER ON CHR ON CHR_OF_DLY B3 T4:322 273 DN 16 £723] £728] 0:030/16 - H μ - File #2 MAIH_PRGRH - 725 0:030/17 - H μ " File «2 MAIH_PRGRH - 725 | CHROME RETURN j VALVE 4 |CHRTV4 j 0:030 I ( ) 17 RETURN CHROHE RETURN 3 VALVE 4 CHROME UATER O CHRTV4 CHR-OK :030 0:030 B3 H I 1 h ( ) 16 17 277 [724] 235,236,238,242 237,240,243 ■ 725 HAG RETURN VALVE 8 MAG UATER OK MGRTV8 KAG_OK 0:044 B3 I 1 ( ) I 14 15 16 - 17 278 j £731] [731] £730] [730] B3/278 - H h " File #2 HA1H_PRGRM - 267,268,270,274 H/h Fi le ta MA1H_PRGRH - 269,272,275 -( )- Fi le #2 MAIH PRGRH - 726 Rung #727 ICARBON SUPPLY CARBON SUPPLY CARBON RETURN CARBON RETURN (VALVE 9 VALVE 10 VALVE 11 VALVE 12 CARBON UATER OK |CASUV9 CASUV10 CARTV11 CARTV12 CAR_0K 0:060 0:060 0:060 0:060 B3 1 I ( > | 14 15 16 17 279 j £734] [734] [733] £733] B3/279 - H h * F i le #2 HAIH_PRGRH - 299,300 -( >- - File ta HAIH PRGRH - 727 MAGNETIC UATER MAG RETURN MAG UATER ON OFF OEUY VALVE 7 HAG_ON HAG_OF_DLY MGRTV7 83 ~ T4:324 0:044 C ) 274 ON 16 £729] £731] 0:044/16 - -\ \- - Fi le IfZ MAIH_PRGRM - 726 0:044/17 - —\ \- - Fi le ttZ HAIH PRGRH - 726 HAG RεTURN VALVE 8 HGRTV8 0:044 ( ) 17 .RBON UATER ON VALVE 11 (CAR ON CAR_OF_DLY CARTV11 | " 83 T4:326 0:060 | 1 | C ) 275 DN 16 £732] £734] 0:060/16 - H μ - File #2 HΛ!H_PRGRM 727 0:060/17 - -j ( Fi le #2 MAIH_PRGRH 727 |CARBON RETURN jVALVE 12 |CARTV12 j 0:060 I ( ) 17 Rung #734 CARBON CHAMBER «<2S0 MICRONS UATER VALVES PIR16 H20_VLV CAR_ON_DLY 1:054 B3 T4:325 07 146 DN £721] C734] I 0:060/14 - H h " ile ta MAIH_PRGRH - 727 I IRESET UATER 0:060/15 - H h " File #2 KAIH_PRGRM - 727 ICARBON SUPPLY jVALVE RESET T4.325.DN ■ -| h " File HAIH_PRGRK - 734 |VALVE 10 |RSTH20Pβ T4:326.DN ■ H h " File ta MAIH_PRGRK - 733 |CASUV10 I 1:024 H/h " File ta MAIH_PRGRH - 732 j 0:060 ' ( ) 16 15 CARBON UATER ON DEUY CAR_ON_0LY , — TON HTIMER ON OELAY h< EN >- TIHER : T4:325 | BASE CSEC) : 1 .0|-CDN) PRESET: 10 j ACCUH: 10j CARBON UATER OFF DELAY CAR_0F_DLY ,—TOF HTIHER OFF DELAY μCEN)- |TIHER: T4:326| |BASE (SEC): I.OμCDN) IPRESET: 2| IACCUM: 0| Rung #735 HEATER UATER HTR_OF_DLY HTR_ON T4:328 B3 1/| — CU) 276 HEATER UAT VALVE 2 HH202 0:010 -I h C ) | 276 ON 17 j [73S] [737] 0:010/17 - H h " Fi le #2 MAIH_PRGRM - 147, 148 H / h - Fi le ta MΛIH_PRGRH - 149, 150 -t )- - Fi le ta MAIH PRGRM - 736 LAGI i±-Gs Rung #741 Rung #742 -C B3 1:002 321 06 CO] T4.61.TT - H h * File #3 CRYO ΪEGEN - 5, 6, 7 T4:341.ACC - LEQ - File #3 CRYO_REGEH - 3 T4:341.TT - -\ μ - File #3 CRYO_REGEN - 2, 263 H/μ - File #3 CRYO_REGEH - 264 SIEVE TRAP 1 TIHER S_TRAP_1 I—T0l •-(TIHER ON DEUY |—CEH> JTIHER: T4:341| j β ASE (SEC): 1.0(- O 1 " jPRESET: 5400| ACCUH: 0 B3 T4:61 B3 i — I I CD I 321 TT 631 | £0] £1] B3/631 - -| h " File #3 CRYO_REGEN - 7,9,11 File #6 TECH_RUNGS - 15 -CD- - File #3 CRYO_REGEN - 5 -CU)- - File #3 CRYO REGEN - 12 +G 361 - -| μ - FUe #3 CRYO_REGEN - 12,15,16,17,18,19,20 File #6 TECH_RUNGS - 17 -CD- - File tfl CRYO_REGEN - 11 -CU)- - File #3 CRYO R8G8N - 21 LPro Rung #012 ROUGHING AND ROR 1 PURGE RWOR1 P1 B3 83 -r CU 641 63 I £11] B3/631 - H | File #3 CRYO_REGEH - 7, 9, 11 File #6 TECH_RUNGS - 15 (COMPRESSOR -<D- - File #3 CRYO REGEN - 5 |1 REGEN- JERATION (PROGRAM JCYRGNI I 8 I 1/| 321 £0] Rung 013 MANUAL CONTROL CRYO ROUGH MANUAL CRYO VALVE 1 ROUGH 1 OPEN OPEN - -CR1 -1 NCR10P N7: 12 N7:33 1 (D I 9 £2:3] I N7:33/9 - H h ' Fi le #3 CRYO_REGEH - 15 IHANUAL CRYO -(U)- - Fi le #3 CRYO_REGEN - 14 jROUGH 1 _F:N7:21 IX21 - BTU - Fi le #2 MAIH_PRGRH - ICLOSE N7:28/9 - -CD- - FUe #3 CRYO_REGEN - 14 |HCR1CL F:N7:21«21 - BTU - Fi le #2 MAIH PRGRH - j N7:28 I <u) 9 Rung #014 HANUAL CONTROL CLOSE CRYO HANUAL CRYO ROUGH ROUGH 1 VALVE 1 OPEN H-CR1-0 HCR10P N7:7 N7:33 (U) I 9 I£2:3] I N7:33/9 - -| h " File #3 CRYO_REGEN - 15 -CD- - FUe tO CRYO_REGEN - 13 I MANUAL CRYO COMPRESSOR _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - j ROUGH 1 1 REGEN¬ CRYO 1 N7:28/9 - -(U)- - File #3 CRYO_REGEN - 13 j CLOSE ERATION TEMPERATUR F:N7:21l%21 - BTU - File #2 MAIH PRGRM - (HCR1CL PROGRAM =<20K j N7:28 CYRGN1 CY1ΪMP20 ■ CD S3 83 9 1 / | 321 501 £25] 20] kung #016 CRYO 1 CRYO 1 |ROUGHING THERMCOUPL BLOUER 2 ROR LATCH COHPRESSOR 1 jAND ROR 1 50 MICRON ENABLED ONE SHOT ROR LATCH JR&ROR1 PIR3 BL2 C1RORLOS CY1RORL I B 1 :004 0:027 B3 B3 EONS] — (D I 641 11 01 551 601 | E11] £2:74] B3/601 - H h - File #3 CRYO_REGEN 18 File #6 TECH_RUNGS 17 H/h- File t CRYO_REGEN 15 -CD- - File CRYO_REGEN 16 -<U)- - File #3 CRYO REGEN 17 Rung #017 ROR UAIT CRYO 1 ROUGHING 60 SEC COMPRESSOR 1 ANO ROR 1 DONE ROR LATCH R&R0R1 C1RORTHR CY1RORL B3 T4:31 83 r —I h- (U> | 641 DN 601 j [21] [18] B3/601 - -| h " File ta CRYO_REGEN 18 FUe #6 TECH_RUNGS 17 (COMPRESSOR H/h - File #3 CRYO_REGEN 15 | 1 REGEN - -(D- - File #3 CRYO REGEN 16 JERATION jPROGRAM |CYRGN1 I 83 1 1/| — 321 £25] 4-τZ Rung #018 ROR UAIT ROUGHING COMPRESSOR 1 COMPRESSOR 1 AND ROR 1 ROR UTCH 60 SEC RU0R1 CY1R0RL C1RORTHR ' 83 B3 ,—TOM -|TIHER ON DEUY μ( 641 601 (TIMER: T4:31| £21] £17] (BASE (SEC): 1.0(-( jPRESET: 30j lACCUH: 0 T4:31.DN 1 (- - File #3 CRYO_REGEN - 17,20 T4:31.TT ( μ - File #6 TECH_RUNGS - 18 Rung #019 REROUGH CRYO 1 COUNTER ROUGHING THERMCOUPL COMPRESSOR AND ROR 1 50 HICRON 1 RAR0R1 PIR3 C1RERUF B3 1 :004 I—CTU 1/| HCOUNT UP hc 641 11 ICOUNTER. • C5:1| £21] jPRESET: 20μ( ACCUH: 01 I 1 - CTU - FUe #3 CRYO_REGEN - 19 R8S - F Ue t CRYO_REGEN - 23 CS:1.DN - H μ - Fi le #2 HAIH_PRGRH - 623 Rung #020 ROR UAIT | CRYO 1 CRYO 1 CRYO 1 |ROUGHING THERHCOUPL 60 SEC TEHPERATUR COOL DOW |AND ROR 1 50 HICRON DONE =<20K 1 |R*R0R1 PIR3 C1RORTHR CY1THP20 CD1 B3 1:004 T4:31 B3 B3 l/l (L) I 641 501 651 I £21] 83/651 - 26,115 15,21,22,25 19 20 24 ROUGHING ANO ROR 1 R&R0R1 B3 CU) 321 651 641 I£25] £22] £20] B3/641 - H μ - Fi le #3 CRYO_REGEN - 12, 15, 16, 17, 18, 19, 20 F i le #6 TECH_RUNGS - 17 (COMPRESSOR -CD- - FUe #3 CRYO REGEN - 11 |1 REGEN- IERATION jPROGRAM |CYRGN1 I B3 1 l/l — 321 £25] Rung #022 CRYO 1 REGEN COOL DOUN TEHPERATUR TIHE TO 1 =<20K 20K 1 C01 CY1THP20 P0H1 ,£25] C5:1 - CTU - File #3 CRYO_REGEN - 19 RES - File « CRYO_REGEN - 23 C5:1.DN - H μ - File #2 MAIH_PRGRM - 623 ^.ung #024 |COMPRESSOR (1 REGEN- jERATION COOL OOUH jPROGRAM 1 JCYRGNI CO! I 83 B3 (U) I 321 651 j£25] 83/651 - H μ File ta MAIH_PRGRM 26,115 File #3 CRYO_REGEN 15,21,22,25 File #6 TECH_RUNGS 19 -CD- File #3 CRYO REGEN 20 I ABORT CRYO ABORT CRYO (REGENERATION REGEN ENABLE | BT_CS. ABORTCRGH N7: 17 B3 H r- (D 297 | £2:3] B3/297 - H h File ttZ MAIH PRGRM - 21 l&G File #3 CRY0_REGEN - 27 -CD- • File #3 CRYO_REGEN - 26 _<U)- • File #3 CRYO REGEN - 28 Rung #027 ABORT CRYO ABORT CRYO REGEN ENABLE REGEN TIMER A80RTCRGN ABORTCRYO 83 ,—TON HTIHER ON OEUY ( 297 (TIMER: T4:297| £26] |BASE (SEC): O JPRESET: 10| JACCUM: OJ I I T4:297.DN 1 h " F i le * CRYO_REGEN - 28 T4:297.TT - - \~ - Fi le #2 MAIH_PRGRH - 91 Fi le #3 CRYOJ.EGEN - 25,238,239,240,241 ,242,243,244 H/h " Fi le *3 CRYOJ-EGEN - 0,34,38,42,46,52,53,57,63 Rung #028 ABORT CR REGEN EN ABORTCRYO ABORTCRGN T4:297 B3 (U) DN 297 £27] -/297 - H μ FUe #2 MAIH_PRGRM - 21 File #3 CRYO_REGEN - 27 -CD File ta CRYO_REGEN - 26 -CU) File ta CRYO REGEN - 28 Rung #029 |COMPRESSOR HEATER 1 |1 REGEN- CHAMBER CRYO REGEN jERATION GATE VALVE COMPRESSOR 1 |PROGRAM CLOSE HV1 FAULT JCYRGHI HV1S1 CR1FLT I B3 1 :002 ,—TON l/l HTIHER ON DELAY μ 321 06 |TIMER: T4:11| I £25] |BASE (SEC): 1.0μ |PRESET: 30| lACCUH: 0| T4:11.DN - H μ - File #3 CRYO_REGEN 30 w Lj^ . &A IAFTER CRYO jREGEN jCOMPRESSOR |7 2 HOUR |P0M7 I T4:47 I DN I£222] j UMPOOUN jAFTER CRYO jREGEN jCOMPRESSOR |8 2 HOUR |PDM8 I T4:48 l_ DN £223] Rung #033 COMPRESSOR COHPRESSOR COMPRESSOR COMPRESSOR COHPRESSOR COMPRESSOR COHPRESSOR COMPRESSOR 1 REGEN- 2 REGEN¬ 3 REGEN¬ 4 REGEN¬ 5 REGEN¬ 6 REGEN¬ 7 REG8N- 8 REGEN¬ ERATION ERATION ERATION ERATION ERATION ERATION εRATION ERATION NO CRYOS BεiNG PROGRAM PROGRAM PROGRAM PROGRAM PROGRAM PROGRAM PROGRAM PROGRAM REGENERATED CYRGN1 CYRGN2 CYRGN3 CYRGN4 CYRGN5 CYRGN6 CYRGN7 CYRGN8 NO_CYRGH B3 B3 83 B3 B3 B3 B3 83 B3 H/h | /h l/l — 1/| — l/l — l/l — l/l— 1/| — ( ) 321 322 323 324 325 326 327 328 233 £25] £34] £38] £42] £46] [52] [57] 163] B3/233 H I FUe #2 HAIH_PRGRH - 23,91 H/h - Fi le #2 HA!H_PRGRH - 91 Fi le tβ CRYO_REGEN - 31 ,32 -( )- - Fi le #3 CRYO REGEN - 33 Rung # 034 COMPRESSOR 2 REGEN¬ REGENERATE ABORT CRYO ERATION CRYO 2 TIHER PROGRAM TS02 ABORTCRYO CYRGN2 N7:15 T4:297 B3 T 1/| CL) 10 TT 322 I £2:3] £27] IHANUAL B3/322 - H \- ■ f i le ta KAIH_PRGRM 110, 117, 118, 460, 462 (COMPRESSOR 2 FUe #3 CRYO_REGEN 35, 37, 67, 74, 210, 245, 252, (REGENERATION 259 jENABLE Fi le #6 TECH_RUNGS JHC2RE H/ h " F ' e *2 HAIH_PRGRM I N7:36 | HI_STAG Fi le #3 CRYO_REGEN 143, 176, 210, 224, I (L) l l →EQ 231 10 L GRTR THAN OR EQUAL <A>=B)|—' -CU)- - Fi le #3 CRYO_REGEN - 238 ISOURCE A: T4:197.ACC| H7:36/10 - -CU)- - Fi le #3 CRYO_REGEN - 238 I °l F:N7:21 IX21 - BTU - Fi le #2 MAIH PRGRM - 2 (SOURCE B: 5| S| J T4: 197.ACC - £2:20] l PUMP 2 siεvε TRAP YRGN2 S_TRAP_2 SVIV2 SVHTR2 S3 r- Eo — 0:010 0:010 ■ |LESS THAN OR EQUAL CA<=B) μ ( ) 322 j SOURCE A: T4:342.ACC| 01 14 £34] 0| £36] SOURCE B: 3600 j 36001 J T4:342.ACC - £35] I+ , Rung #043 COMPRESSOR HEATER 3 4 REGEN¬ CHAMBER ERATION GATE VALVE REGEN COHP. 4 PROGRAM CLOSED PULSE TIMER CYRGN4 HV5S1 CR4PT B3 1:024 I —TON 4 IMER ON DEUY μ(EN) 324 00 j TIHER: T4:64| £42] |BASE (SEC): LOf-COM) j PRESET: i j T4-.64.TT - H μ - File #3 CRYO_REGEN - 76, 83, 90 ACCUH: 0 T4:344.ACC - LEQ - Fi le #3 CRYO_REGEN - 45 T4:344.TT - -\ μ - File #3 CRYO_REGEN - 44, 263 H/μ - Fi le #3 CRYO_REGEN - 264 SIEVE TRAP 4 TIMER S_TRΛP_4 I—TON- HTIHER ON DEUY μ(EN) JTIHER: T4:344| jβASε (S8C): 1.0μ(0N) 'PRESET: 5400j lACCUM: 0 Rung #044 MECHANICAL PUMP 2 SIEVE TRAP ISOUTION ISOLATION VALV VALVE OPEN 5 S_TRAP_4 HP2IVOP SVIV5 ~T4:344 1 :025 0:031 ( ) TT 13 OS I £43] I 0:031/05 H μ - FUe ta CRYO_REGEN - 45 (OPEN j CRYO ROUGH | VALVE 5 |CR5 j 0:027 I 1 I 12 £166] Rung #045 COMPRESSOR 4 REGEN¬ SIEVE TRAP ERATION I SOUTION VALVE SIEVE TRA °ROGRAH 5 HEATER 5 . ι 6 ι+ . .. GEN- CHAHBER CHAHBER CHAHBER ERATIOM GATE VALVE GATE VALVE GATE VALVE REGEN COHP. PROGRAM CLOSED CLOSED CLOSED PULSE TIHER CYRGN5 HV4S1 HV6S1 HV7S1 CR5PT B3 1:022 1:024 1:036 I —TON \TIMER ON DELAY (-< EH >- 325 06 03 06 jTIHER: T4:6SJ £46] JBASE (SEC): l.oμCDO IPRESET: 65j T4:65.TT - H h " FUe #3 CRYO_REGEN - 77, 84, 91, 92, 93 lACOJM: 0 T4:345.ACC - LEQ - File #3 CRYO_REGEN - 51 T4:345.TT - - μ - File #3 CRYθ " _REGEN - 48, 49, 50, 263 H/| File #3 CRYO_REGEN - 264 SIEVE TRAP 5 TIHER S_TRAP_5 ,—TON HTIMER OH DEUY μCEH)-J jTIHER: T4:345| |BASE (SEC): I.OμcON) |PRESET: 5400j ACCUH: 0 Rung #048 HECHANICAL PUMP 2 SIEVE TRAP ISOUTION ISOUTION VAL VALVE OPEN 4 S_TRAP_5 MP2IVOP SVIV4 ~T4:345 I:02S 0:031 ( ) TT 13 04 I £47] 0:031/04 - .-] h " Fi 'e #3 CRYO_REGEN - 51 (OPEN I CRYO ROUGH j VALVE 4 |CR4 j 0:027 I 1 I £167] Rung #049 HECHANICAL PUHP 2 SIEVE TRAP ISOUTION ISOLATION VALV VALVE OPEN 6 £168] Rung =050 HECHANICAL PUHP 2 SIEVE TRAP ISOUTION I SOLATION VALV VALVE OPEN 7 S_TRAP_5 MP2IVOP SVIV7 ~T4:3 5 1:025 0:031 ( ) I TT 13 07 I £47] I 0:031/07 - H h ' F' le β CRYO_REGEN - 51 I OPEN j CRYO ROUGH j VALVE 7 |CR7 I 0:043 11 £169] i REGEN- CHAHBER ERATION GATE VALVE REGEN COMP. 6 PROGRAM CLOSED PULSE TIMER CYRGN6 HV8S1 CR6PT B3 1 :040 ,—TON (TIHER ON DELAY μ(EK 326 00 |TIMER: T4:6όj £53] |BASE (SEC): 1.0(-(DN j RESET: 1| T4:66.TT - -\ \- - File #3 CRYO_REGEN - 78, 85 94 ACCUH: 0 T4:346.ACC - LEQ - File #3 CRYO_REG8H - 56 T4:346.TT - ~\ - File #3 CRYO_REGEN - 55, 263 H/μ - File #3 CRYO_R8GEN - 264 SIEVE TRAP 6 TIHER S_TRAP_6 i—TON HTIHER ON DELAY μ(EN |TIMER: T4:346| JBASE (SEC): 1.oμ(DH (PRESET: 5400j lACCUH: 0| [&λ Rung #055 MECHANICAL PUHP 2 SIEVE TRAP ISOUTION ISOUTION VALVE VALVE OPEN 8 S_TRΛP_6 MP2IVOP SVIV8 _ T4:346 1:025 0:031 ( ) I TT 13 10 j £54] I 0:031/10 - H μ - File #3 CRYO_REGEN - 56 IOPEN jCRYO ROUGH jVALVE 8 |CR8 j 0:043 I 1 I _ι 12 £170] Rung #056 COMPRESSOR 6 REGEN¬ SIEVE TRAP ERATION ISOLATION VALVE siεvε TRAP PROGRAM 8 HεATER 8 CYRGN6 S_TRAP_6 SVIV8 SVHTR8 83 - EQ 0:031 0:031 HLESS THAN OR EQUAL (A<=8)| ( (- ( ) 326 JSOURCE A: T4:346.ACC| 10 17 [53] I 0| £55] jSOURCE B: 3600j 3600 T4:346.ACC £54] Rung #057 COMPRESSOR 7 REGEN¬ REGENERATE ABORT CRYO ERATION CRYO 7 TIMER PROGRAM TS07 ABORTCRYO CYRGN7 N7: 15 T4:297 B3 H H 1/| — (D 15 TT 327 £2:3] C27] I | HANUAL B3/327 - H μ - Fi le #2 MAIH_PRGRM - 113, 114, 131 , 132, 133, 134, 137, (COMPRESSOR 7 138, 483, 490, 492, 494, 500, 502 (REGENERATION File #3 CRYO_REGEN - 58, 62, 72, 79 215, 250, 257, | ENABLE 259 |HC7RE Fi le #6 T8CH_RUNGS 14 j N7:36 HI_STAG H/ μ - FUe #2 MAIH_PRGRM 32, 131 , 132, 133, 134, 137, 138 I (L) I — GEQ Fi le *3 CRYO_REG8N 33, 124, 125, 126, 140, 157, 159, 15 LjGRTR THAN OR E Q UAL (A>=B) h J 163, 186, 215, 229 236 SOURCE A: T4:197.ACCJ -CU)- - FUe #3 CRYO_REGEN - 243 °l N7:36/15 - -CU)- - FUe C CRYO_RεGEN - 243 301 F:N7:21U21 - BTU - Fi le #2 HAI H PRGRH 30| T4:197.ACC - £2:20] \&L Rung #058 COMPRESSOR DUELL 5 DWELL 6 EXITLOCK REGEN COUP. PULSE TIHER CR7PT I—TON- -T-JTIHεR ON DELAY h< 327 03 06 03 |TIHER: T4:67| £57] (BASE CSEC): l.oμc (PRESET: 1| T4:67.TT - - (- - F ' le *3 CRYO_REGEN - 79, 86, 95, 96, 97 jACCUM: oj T4:347.ACC - LEO - Fi le #3 CRYO_REGEN - 62 T4:347.TT - - h *" ' « CRYO_REGEN - 59, 60, 61 , 263 H / h " F ' le #3 CRYO_REGEN - 264 SIEVE TRAP 7 TIHER S_TRAP_7 Γ^TON 1 1 LJTIHER ON DELAY (-(E JTIHER: T4:347| |BASE CSEC): I.OμcO |PRESET: 5400j ACCUH: 0 Rung #059 MECHANICAL PUMP 2 SIEVE TRAP ISOLATION ISOLATION VA VALVE OPEN 9 S_TRAP_7 MP2IVOP SVIV9 ~T4:347 1:025 0:045 < ) I TT 13 04 j£58] I 0:045/04 - —\ - - File #3 CRYO_REGEN - 62 (OPEN jCRYO ROUGH jVALVE 9 |CR9 j 0:043 I 1 I 13 £171] Rung #060 MECHANICAL PUHP 2 SIEVE TRAP ISOUTION ISOLATION VA VALVE OPEN 10 S_TRAP_7 HP2IVOP SVIV10 ~T4:347 1:025 0:045 C ) I T 13 05 I£58) I 0:045/05 - -A. h " F ' " le *3 CRYO_REGEN - 62 (OPEN jCRYO ROUGH jVALVE 10 |CR10 0:057 11 £1723 * i+5 Rung #070 COMPRESSOR 5 REGEN¬ SCREEN ERATION REGENERATI PROGRAM CRYO 5 CYRGN5 SCRRGN5 B3 B3 325 805 £46] Rung #071 COMPRESSOR 6 REGEN¬ SCREEH ERATION REGENERATIO PROGRAM CRYO 6 CYRGH6 SCRRGN6 B3 83 C > 326 806 (S3] Rung #072 COMPRESSOR 7 REGEN¬ SCREEN ERATION RεGεNERATIO PROGRAM CRYO 7 CYRGN7 SCRRGN7 B3 B3 ( ) 327 807 £57] Rung #073 COMPRESSOR 8 REGEN¬ SCREEN ERATION REGεNERATIO PROGRAM CRYO 8 CYRGN8 SCRRGN8 B3 B3 ( ) 328 808 £63] Rung #074 COMPRESSOR 2 REGEN¬ ERATION CRYO REGEN PROGRAM 2 PULSE PURGE CYRGH2 CR2PT P2 B3 T4:62 B3 (D I 322 TT 632 . £34] £35] B3/632 - H h " File « CRYO_REGEN - 88,110, 128 FUe #6 TECH_RUNGS - 15 -CD- - Fi le #3 CRYO_REGEN - 74 -CU_- - Fi le t CRYO REGEN - 135 - 5 P5 B3 CD— I 325 TT 635 | £46] £477]] 83/635 - H μ - File #3 CRYO_REGEN 91,92,93,113,131 File #6 TECH_RUNGS 15 -(L)- ■ File #3 CRYO_REGEN 77 -(U)- • File #3 CRYO REGEN 138 Rung #078 | COMPRESSOR j REGEN - JERATION CRYO REGE] jPROGRAM 6 PULSE PURGE 6 |CYRGN6 CR6PT P6 I B3 T4:66 S3 CD— , 326 TT 636 I [53] £54] B3/636 - H μ - File #3 CRYO_REGEN - 94,114,132 File #6 T8CH_RUNGS - 15 -CD- - File #3 CRYO_REGEN - 78 -CU)- - File ta CRYO REGEN - 139 PUR P7 ( PURG P8 B C | 328 TT 6 I £63] £64] B3/638 - H h " File #3 CRYO_REGEN 98,116,134 File #6 TECH_RUNGS 15 -CD- - File #3 CRYO_REGEN 80 Rung #082 ENABLE CRYO CRYO REGEN COMPRESSOR 3 PULSE 3 CR3PT CY3 T4:63 0:030 T . h 1 (U) TT 04 £39] 0:030/04 1 μ - File #2 HAIH_PRGRH - 440 File #3 CRY0_REGEN - 260 IHANUAL CRYO File #6 TECH_RUNGS - 19 (COMPRESSOR 3 -(D- - File #2 HAIH_PRGRK - 28 IRUN N7:34/7 - -<D- - File #2 KAIH_PRGRH - 28 |HCYC3RUN HAIN UATER ON _F:N7:2U * *21 - BTU - File #2 MAIH_PRGRM - 2 N7:34 HAIN_H20 N7:29/7 - -(U)- - File #2 MAIH_PRGRH - 28 (U) 1 :002 F:N7:21IX21 - BTU - File #2 KAIH PRGRN - 2 7 l/l — 07 HANUAL IMANUAL CRYO CONTROL jCOMPRESSOR 3 STOP CRYO JSTOP COMPRESSOR JMCYC3ST0P 3 N7:29 H-CY3-0 CL) N7:8 7 £2:3] Rung #083 ENABLE CRYO CRYO REGEN COHPRESSOR 4 PULSE 4 CR4PT CY4 T4:64 0:030 i CU) TT 05 | £43] 0:030/05 1 I File 1.2 HAIH_PRGRH - 440 ile #3 CRYO_REGEN - 260 HANUAL CRYO File #6 TECH_RUNGS - 19 COMPRESSOR 4 -CD- - File #2 HAIH_PRGRH - 29 RUN N7:34/8 - -CD- - File #2 HAIH_PRGRH - 29 HCYC4RUN |MAIN UATER ON _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 N7:34 |MAIN_H20 N7:29/8 - -(U)- - File ttZ HAIH_PRGRH - 29 (U) | 1:002 F:N7:21IX21 - BTU - File #2 MAIH PRGRM - 2 8 I 1, | I 07 (MANUAL HANUAL CRYO jCONTROL COHPRESSOR 4 JSTOP CRYO STOP (COMPRESSOR HCYC4STOP l« N7:29 (I.-CY4-0 CD j N7:8 8 1 i I 8 £2:3] 5 ~ oo ibZ. -CL>- -CU)- Rung #090 CRYO REGEN I PURGE 4 4 PULSE |P4 CR4PT I 83 T4:64 H H I 634 TT 07 I £76] £43] 0:027/07 - H h -CD- -CU)- Rung #091 I I CRYO REGEN OPEN PUR I PURGE 5 5 PULSE VALVE 4 IPS CR5PT NIF4 I 83 T4:65 0:027 CL) 1 635 TT 11 06 I £77] £47] £167] 0:027/06 - -| μ - Fi le *3 CRYO_REGEH 101 Fi le #6 TECH RUNGS 16 -tiy- File #3 CRYO_REGEN 91 -CU)- File t CRYO REGEN 120 Rung #092 OPEN CRYO REGEN CRYO ROUGH OPEN PUR PURGE 5 PULSE VALVE 6 VALVE 6 P5 CR5PT CR6 NIF6 B3 T4-.65 0:027 0:027 l/l CD I 635 TT 13 10 j £77] £47] £168] 0:027/10 - H μ File ta CRYO REGEN 103 File #6 TECH_RUNGS 16 -CD- - File #3 CRY0_RE(_EN 92 0:043/07 H h- File #3 CRY0_REG8N 106 File #6 TECH_RUNGS 16 -CD- FUe ta CRYO_REGEN 94 -CU>- FUe « CRYO REGEN 123 Rung #095 OPEN CRYO REGEN CRYO ROUGH |PURGE 7 7 PULSE VALVE 9 |P7 CR7PT CR9 I B3 T4:67 0:043 l/l I 637 TT |£79] £58] 0:043/10 -H h- -CD- -CU)- Rung #096 OPEN CRYO REGEN CRYO ROUGH OPEN PURGE | PURGE 7 7 PULSE VALVE 10 VALVE 10 |P7 CR7PT CR10 NIF10 I 83 T4:67 0:057 0:057 l/l CD 637 TT 11 06 | £79] £58] £172] 0:057/06 - H | File «3 CRYO_REGEN - 107 FUe #6 TECH_RUNGS - 16 -CD- - 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H h " FUe «6 TECH RUNGS - 15 Rung #112 ENABLE CRYO 5 PURGE PURGE TIKE PURGE TEHPERATUR TIMER MONITOR PURGE 4 HEATER S «>290tC DEFEAT COMPRESSOR 4 P4 NIH5 CY5TMP290 PG_OEFEAT PGC4 83 0:027 B3 " 83 I—TON I 1 h- 1 I -ITIMER ON DELAY h 634 04 517 288 j TIHER: T4:24J £137] £102] jβASE (SEC): I.OμC |PRESET: 7200 | lACOJH: 0 T4:24.ACC - GEO - File _3 CRYO_REGEN - 254 T4:24.DN - H h " File #3 CRYO_REGEN 119,130,262 T4:24.TT 1 μ - File #6 TECH_RUNGS 15 Rung #113 ENABLE CRYO 4 CRYO 6 CRYO 7 PURGE PURGε TIME PURGE TEHPERATUR TEHPERATUR TEHPERATUR TIHER MONITOR PURGE 5 HEATER 4 =>290K =>290K =>290K DEFEAT COMPRESSOR 5 PS NIH4 CY4TMP290 CY6TMP290 CY7TKP290 PG_DEFEΛT PGC5 B3 0:027 S3 B3 83 B3 r— TON 1 -(TIMER ON DELAY h' 635 03 516 518 519 288 |TIMER: T4:25J £138] £101] JBASε (SEC): 1.0μ( T4:2S.ACC - GEQ - FUe #3 CRYO_REGEN • 255 (PRESET: 7200 j T4:25.DN 1 | File #3 CRYO_REGEN - 120, 121, 122, 131, 262 ACCUM: 0 T4:2S.TT - H μ - FUe #6 TECH_RUNGS - 15 ENABLE PURGE HEATER 6 NIH6 0:027 05 £103] ENABLE PURGE HEATER 7 NIH7 0:043 03 [104] Rung #114 ENABLE CRYO 8 PURGE PURGE TIME PURGE TEHPERATUR TIMER MONITOR PURGE 6 HEATER 8 =>290K DEFEAT COMPRESSOR 6 IP6 NIH8 CY8TMP290 PG_0EFEAT PGCό B3 0:043 83 83 , TON I — I h 1 h- -(TIMER ON DELAY μ( 636 04 520 288 |TIMER: T4:26| £139] £106] |8ASE (SEC): 1.0μ( jPRESET: 7200| |ACCUM: oj I I T4:26.ACC - GEQ - File #3 CRYO_REGEN - 256 T4:26.DN - -\ \- - file ta CRYO_REGEN - 123,132,262 T4:26.TT - -\ h * File #6 TECH_RUNGS - 15 Rung #115 ENABLE CRYO 9 CYRO 10 CRYO 12 PURGE PURGE TIKE PURGE TEMPERATUR TEMPERATUR TEMPERATUR TIHER MONITOR PURGE 7 HEATER 9 "290K «>290K *»290K DEFEAT COMPRESSOR 7 P7 NIH9 CY9TMP290 CY10THP290 CY12TMP290 PG_DEFEAT PGC7 83 0:043 B3 B3 83 83 l—TO , H h HTIM8R ON DELAY (-< 637 05 521 522 524 288 (TIMER: T4:27| £140] £105] IBASE (SEC): 1.0(-( T4:27.ACC GEQ Fi le ta CRYO_REGEN • 257 |PRESET: 7200j T4:27.DN ■ H h - File #3 CRYO_REGEN - 124, 125 , 126, 133, 262 |ACCUH: 0| T4:27.TT - H h - File #6 TECH RUNGS - 15 ENABLE PURGE HEATER 10 NIH10 0:057 03 £107] ENABLE PURGE HEATER 12 NIH12 0:057 H h 05 £108] Rung #116 ENABLE CRYO 11 PURGE PURGE TIKE PURGE TEHPERATUR TIMER HONITOK PURGE 8 HEATER 11 =>290K DEFEAT COHPRESSOR 8 P8 NIH11 CY11THP290 PG_DE EAT PGC8 B3 0:057 B3 ~ B3 I—TON , H TIHER ON DELAY h< ε 638 04 523 288 (TIMER: T4:28| £141] £109] |BASE (SEC) : 1.0(-(D j RESET: 7200 j lACCUH: o j I I T4:28.ACC - GEQ - Fi le #3 CRYO_REGEN - 258 T4:28.DN - -\ - Fi le #3 CRYO_REGEN - 127, 134,262 T4:28.TT - — μ - Fi le #6 TECH_RUNGS - 15 5o3 CY3THP290 PGC3 BL2 H1F3 B3 T4:23 0:027 0:007 (U> 515 DN 01 10 £111] (2:74] 0:007/10 - — μ - File « CRYO_REGEN - 100 File «. TECH_RUNGS - 16 I COHPRESSOR -CD- - File *3 CRYO REG8N - 89 j 3 REGEN¬ ERATION I PROGRAM |CYRGN3 I 83 I 1/| 323 (38] SΆ O =>290K DONE ENABLED VALVE 4 CY4TKP290 PGC5 BL2 NIF4 B3 T4:25 0:027 0:027 (U) 516 DN 01 06 [113] [2:74] 0:027/06 - -\ (- * File #3 CRYO_REGEH - 101 File #6 TECH_RUNGS - 16 (COMPRESSOR -CD- - File #3 CRYO_REGEN - 91 (5 REGEN- JERATIOM j PROGRAM | CYRGN5 I 83 H/h 325 C46] λλ Rung #121 PURGE TIKE MONITOR CRYO 6 CRYO S TEMPERATUR 120 MIN BLOUER 2 OPEN PURG W290K DONE ENABLED VALVE 6 CY6THP290 PGC5 BL2 NIF6 83 T4:25 0:027 0:027 i 1 I — 1 I CU) 518 ON 01 10 [113] £2:74] 0:027/10 - H μ - Fi le #3 CRYO_REGEN - 103 FUe #6 TECH_RUNGS - 16 (COMPRESSOR -CD- - F i le #3 CRY0_REGEN - 92 |5 REGEN- JERATIOM (PROGRAM |CYRGN5 I <*3 I 1/| 325 £46] Rung . 122 PURGE TIKE MONITOR CRYO 7 CRYO 5 TEHPERATUR 120 MIN BLOUER 2 OPEN PURG >290l. DONE ENABLED VALVE 7 CY7THP290 PGC5 BL2 NIF7 83 T4:25 0:027 0:043 CU) 519 DN 01 06 [113] [2:74] 0:043/06 - H μ - F i le #3 CRYO_REGEN - 104 I Fi le #6 TECH_RUNGS - 16 (COMPRESSOR -CD- - Fi le #3 CRYO REGEN - 93 | 5 REGEN¬ ERATION j PROGRAM |CYRGN5 I B3 I (/( 325 [46] ζΛZ Rung #123 PURGE TIME MONITOR CRYO 8 CRYO 6 TEMPERATUR 120 MIN BLOUER 2 • "> * _90K DONE ENABLED CY8THP290 PGC6 BL2 B3 T4:26 0:027 520 DN 01 07 £114] £2:74] 0:043/07 - - μ - Fi le #3 CRYO_REGEN - 106 Fi le #6 TECH_RUNGS - 16 (COMPRESSOR -CD- - Fi le *3 CRYO_REGEN - 94 j REGEN - j ERATION (PROGRAM JCYRGN6 | 83 I 1/| 326 £53] Rung #124 PURGE TIME MONITOR CRYO 9 CRYO 7 TEHPERATUR 120 HIN BLOUER 2 OPEN PU >290K DONE ENABLED VALVE 9 CY9TMP290 PGC7 BL2 NIF9 B3 T4:27 0:027 0:04 U) 521 ON 01 10 [115] £2:74] . 0:043/10 - H μ - Fi le #3 CRYO_REG£N - 105 FUe #6 TECH_RUNGS - 16 (COMPRESSOR -(D- - Fi le Z CRYO REGEN - 95 |7 REGEN- |ERATION jPROGRAM |CYRGN7 I B3 / ( 327 £57] I B3 ' l/l 327 [57] Sλ -t Rung #127 PURGE TIKE MONITOR CRYO 11 CRYO 8 TEMPERATUR 120 MIN BLOUER 2 OPEN PUR -- 290K DONE ENABLED VALVE 11 CY11TKP290 PGC8 BL2 HIF11 B3 T4:28 0:027 0:057 (U) 523 DN 01 07 [116] [2:74] 0:057/07 - -| - - File *3 CRYO_REGEN - 109 File #6 TECH_RUNGS - 16 (COMPRESSOR -CD- - File ta CRYO REGEN - 98 j8 REGEN- |ERATION jPROGRAM JCYRGNS | B3 ' l/l — 328 163] Rung #128 PURGE TIKE MONITOR CRYO 2 CRYO 2 120 MIN. TEMPERATUR BLOUER 2 ROUGHING GE 2 DONE =>290K ENABLED AND ROR P2 PGC2 CY2TMP290 BL2 R&ROR2 B3 T4:22 B3 0:027 B3 (D 632 ON 514 01 642 £135] [110] .[2:74] 83/642 - H h - Fi le ta CRYO_REGEH - 135. 164, 175,176,189,196,203 Fi le #6 TECH_RUNGS - 17 -tiy- File #3 CRYO_REGEN - 128 -CU>- Fi le t CRYO REGEN - 210 Rung #129 PURGE TIME MONITOR CRYO 3 120 MIN. ROUGHING PURGE DONE AND ROR P3 PGC3 R&R0R3 B3 T4:23 B3 CL) 633 DN 515 01 643 [136] [111] £2:74] β 3/643 - H h * File #3 CRYO_REGEN - 136,165 , 177,178, 190, 197,204 Fi le #6 TECH_RUNGS - 17 -CD- - Fi le #3 CRYO_REGEN - 129 -CU)- - File ta CRYO REGEN - 211 Rung #130 PURGE TIHE MONITOR CRYO 4 CRYO 5 120 KIN TEHPERATUR BLOWER 2 ROUGHING PURGE 4 DONE =>290K ENABLED ANO ROR P4 PGC4 CY5THP290 BL2 R&ROR4 B3 T4:24 B3 0:027 B3 CL) 634 DN 517 01 644 £137] £112] £2:74) -(L)- File #3 CRYO_REGEN - 132 -(U)- File « CRYO REGEN - 214 Rung #133 PURGE TIME MONITOR CRYO 7 CRYO 9 CYRO 10 CRYO 12 120 MIN TEHPERATUR TEHPERATUR TEHP8RATUR BLOUER 2 ROUGHIN PURGE 7 DONE =>20K =>290K =>290K ENABLED AND ROR P7 PGC7 CY9TMP290 CY10THP290 CY12THP290 BL2 R&ROR7 B3 T4:27 83 83 B3 0:027 B3 1 I — (L) 637 DN 521 522 524 01 647 £140] [115] [2:74] B3/647 - H h- *le #3 CRY0_REGEN 140,171,172,173,185,186,194,201,208 File #6 TECH_RUNGS 17 -(D- - File #3 CRYO_REGEN 133 -CU)- - File #3 CRYO REGEN 215 ung #134 File 1*6 TECH RUNGS - 17 -CD- - File #3 CRYO_REGEN - 134 -CU)- - File #3 CRYO REGEN - 216 Rung #135 CRYO 2 ( ROUGHING BLOUER 2 TEMPERATUR AND ROR 2 ENABLED *=>290*: PUR RMOR2 BL2 CY2TMP290 P2 83 0:027 B3 642 01 514 I £128] £2:74] B3/632 - H μ - Fi le #3 CRYO_REGEN - 88, 110, 128 Fi le #6 TECH_RUNGS - 15 | COHPRESSOR -CD- - Fi le ta CRYO REGEN - 74 | 2 REGEN¬ ERATION | PROGRAM |CYRGN2 | B3 I 1, | 322 (34] Rung #136 CRYO 3 ROUGHING BLOUER 2 TEMPERATUR AND ROR 3 ENABLED =>290K PUR R&ROR3 BL2 CY3TMP290 P3 B3 0:027 B3 i 1 r C ( 643 01 515 I£129] £2:74] B3/633 - H μ Fi le a CRYO_REGEH - 89, 111 , 129 Fi le #6 T8CH_RUHGS - 15 {COMPRESSOR -(L>- Fi le ta CRYO RεGEN - 75 |3 REGEN- jERATION jPROGRAM |CYRGN3 I 83 i ./j 323 £38] Rung #137 CRYO 5 ROUGHING BLOUER 2 TEMPERATUR 5 113, 131 6 ≤Ά -; (D 10 I 10 £2:3] I N7:33/10 - -\ μ - File « CRYO_REGEN - 164 |HANUAL CRYO -(U)- - File #3 CRYO_REGEN - 143 (ROUGH 2 _F:N7:21I3__1 - BTU - FUe #2 HAIH_PRGRH - 2 jCLOSE N7:28/10 - -(D- - File « CRYO_REGEN - 143 JHCR2CL F:N7:2U3__1 - BTU - File #2 HAIH PRGRM - 2 | N7:28 I (U) 10 Rung #143 MANUAL CONTROL CLOSE CRYO HANUAL CRYO ROUGH ROUGH 2 VALVE 2 OPEN H-CR2-0 HCR20P N7:7 N7:33 (U) 10 |HANUAL CRYO jROUGH 2 |CLOSE |HCR2CL | N7:28 I (L) 10 52. o Rung #147 MANUAL CONTROL CLOSE CRYO MANUAL CR ROUGH ROUGH 4 VALVE 4 OPEN H-CR4-0 HCR40P N7:7 H7:33 -i — I I — CU) I 12 12 I£2:3] N7:33/12 - -\ \- - File CRYO_REGEN - 167 -tiy- - Fi le #3 CRYO_REGEN - 146 |HANUAL CR (COMPRESSOR _F:N7:21 IX21 - BTU - File #2 MAIH_PRGRM - 2 |ROUGH 4 j5 REGEN- CRYO 4 N7:28/12 - -<U)- - Fi le ta CRYO REGEN - 146 |CLOSE |ERATIOH TEMPERATUR F:K7:21 IX21 - BTU - Fi le #2 MAIH PRGRM - 2 |HCR4CL j ROGRAM =<20K j N7:28 |CYRGN5 CY4THP20 1 (D | B3 83 12 1 l/l — 325 504 £241] Rung #148 MANUAL CONTROL MANUAL CRY CRYO ROUGH ROUGH 5 TPEN OPEN zλ Rung #150 CONTROL CRYO ROUGH MANUAL CRYO VALVE 6 ROUGH 6 OPEN OPEN H-CR6-1 HCR60P N7:12 N7:33 CL) 14 14 £2:3] N7:33/14 - - \- Fi le #3 CRYO_REGEN - 168 |HANUAL CRYO -t-iy- F i le #3 CRYO REGEN - 151 jROUGH 6 F:N7:21 IΪ21 - BTU - Fi le #2 HAIH PRGRH - 2 |CLOSE N7:28/14 - -<L)- - Fi le « CRYO_REGEN - 151 |MCR6CL F:N7:21I5__1 - BTU • Fi le ttZ MAIN PRGRH - 2 | N7:28 1 (U) 14 Rung # 151 MANUAL CONTROL CLOSE CRYO MANUAL CRYO ROUGH ROUGH 6 VALVE 6 OPEN H-CR6-0 MCR60P N7:7 N7:33 U) 14 14 | £2:3] I N7:33/14 1 μ - File #3 CRYO_REGEN - 168 I -CD- - File #3 CRYO_REGEN - 150 IMANUAL CRYO | COHPRESSOR _F:N.7.21tX21 • BTU - File #2 KAIH_PRGRK - 2 | OUGH 6 j 5 REGEN - CRYO 6 N7:28/14 - -CU)- - File #3 CRYO_REGEN - 150 |CLOSE JERATIOH TEMPERATUR F:N7:21IX21 - BTU - File #2 KAIH PRGRH - 2 |MCR6CL j PROGRAM =<20K j N7:28 JCYRGNS CY6THP20 I α) I 83 B3 14 i l/l 325 506 £241] Rung # 152 HANUAL CONTROL CRYO ROUGH HANUAL CRYO VALVE 7 ROUGH 7 OPEN OPEN H-CR7-1 HCR70P N7:12 N7:33 (D 15 15 £2:3] N7:33/15 - -\ μ - Fi le #3 CRYO_REGEN - 169 IHANUAL CRYO -(U)- - Fi le ta CRYO_REGEN - 153 IROUGH 7 _F:N7:21IS21 - BTU - Fi le #2 HAIH_PRGRH - 2 jCLOSE N7:28/15 CD- - Fi le #3 CRYO_REGEN - 153 |MCR7CL F:N7:21 I521 - BTU - Fi le #2 PRGRM - 2 I N7:28 1 (U) 15 S z_ Rung #159 I MANUAL j CONTROL j CLOSE CRYO MANUAL CRY j ROUGH ROUGH 10 j VALVE 10 OPEN j M-CR10-O MCR100P I N7:8 N7:34 U) 2 j £2:3] N7:34/2 - H μ - Fi le #3 CRYO_REGEN - 172 -(D- - F i le #3 CRYO_REGEN - 158 (COMPRESSOR _F:H7:21 U21 - BTU - Fi le #2 HAIH_PRGRH - 2 j 7 REGEN- CRYO 10 N7:29/2 - -(U)- - Fi le #3 CRTO_REGEN - 158 j ERATION TEHPERATUR F:N7:21IX21 - BTU - File #2 HAIH PRGRH - 2 j PROGRAM = 20K H7:29 (CYRGN7 CY10THP2O 1 —(L)— I 83 B3 2 I l/ l I 327 510 | 1243] Rung #160 IMANUAL jCONTROL HANUAL CRY JCRYO 11 ROUGH 11 IOPEN OPEN CR11-1 HCR110P | N7:13 N7:34 (D I 3 | £2:3] | N7:34/3 - H μ - File #3 CRYO_REGEN - 174 j -(U)- - File #3 CRYO_REGEN - 161 j _F:N7:21IX21 - BTU - File #2 MAIH_PRGRH - 2 | N7:29/3 - -(D- - File #3 CRYO_REGEN - 161 F:N7:21tX21 - BTU - File #2 HAIH PRGRH - 2 N7:29 -— tuy— 3 Rung #161 I MANUAL CONTROL CLOSE CRYO HANUAL CRYO ROUGH ROUGH 11 VALVE 11 OPEN M-CR11-0 MCR110P N7:8 N7:34 _ I CU) I I 3 3 £2:3] I I N7:34/3 - -\ \- - File #3 CRYO_REGEH - 174 -iiy- - File #3 CRYO_REGEN - 160 (COMPRESSOR _F:N7:21t321 - 8TU - File #2 MAIH_PRGRM - 2 j8 REGEN- CRYO 11 N7:29/3 - -(U)- - File « CRYO_REGEN - 160 JERATION TEMPERATUR F:N7:21IX21 - BTU - File « HAIH PRGRM - 2 | ROGRAM = 20K N7:29 (CYRGN8 CY11TMP20 <—(D- I B3 B3 3 ' 1/| 328 511 £244] Rung #162 MANUAL CONTROL CRYO ROUGH HANUAL CRYO VALVE 12 ROUGH 12 OPEN OPEN M-CR12-1 HCR120P N7:13 N7:34 CD 4 £2:3] N7:34/4 - H h * File * CRYO_REGEN - 173 -<U)- - File #3 CRYO_REGEN - 163 _F:N7:21IX21 - BTU - File #2 HAIH_PRGRH - 2 N7:29/4 - -CD- - File #3 CRYO_REGEN - 163 F:N7:21IX21 - BTU - File #2 MAIH PRGRH - 2 N7:29 I CU)—■ 4 Rung #163 HANUAL CONTROL CLOSE CRYO HANUAL CRYO ROUGH ROUGH 12 VALVE 12 OPEN H-RV12-0 HCR120P SZ€ - 513 S3 3A -(U)- File #3 CRYO REGEN 176 Rung #176 ROR UAIT COHPRESSOR ROUGHING 2 60 SEC COMPRESSOR ANO ROR 2 DONE ROR LATCH R&ROR2 C2RORTHR CY2RORL B3 T4:32 B3 (U) 642 DN 602 | (210) (1893 B3/602 ( - - File β CRYO_REGEN - 189 File #6 TECH_RUNGS - 17 |COHPRESSOR H/h " File #3 CRYO_REGEN - 164 |2 REGEN- -<L)- - File « CRYO_REGEN - 175 jERATION jPROGRAM |CYRGN2 I B3 1 l/l 322 [238] Rung #180 ROR WAIT COMPRESSOR ROUGHING 4 60 SEC COMPRESSOR ANO ROR 4 DONE ROR UTCH RIROR4 C4R0RTMR CY4RORL B3 T4:34 B3 * ι 1 I 1 I (U) ( 644 DN 604 | (212] (191] B3/604 - H h " f i le ** CRYO_REGEN - 191 Fi le #6 TECH_RUNGS - 17 (COMPRESSOR H/ h - Fi le #3 CRYO_REGEN - 166 | REGEN- -{L>- - FUe #3 CRYO REGEN - 179 |ERATION JPROGRAH |CYRGN4 I B3 ./. 324 (240] Rung #181 CRYO 4 CRYO 6 CRYO 7 CRYO 5 ROUGHING THERMCOUPL THERMCOUPL THERMCOUPL BLOUER 2 ROR UTCH COHPRESSOR ANO ROR 5 50 HICRON 50 MICRON 50 MICRON ENABLED ONE SHOT ROR UTCH RSR0R5 PIR7 PIR9 PIR12 BL2 C5RORLOS CY5RORL B3 1:024 1 :024 1 :040 0:027 S3 B3 -H 1 1 I — [ONS] — (L) S3ζ T4:35.0N H h File #3 CRYO_REGEN - 182,199,206 T4:35.TT H h FUe #6 TECH RUNGS - 18 Rung #193 3-τ- I ROR UAIT IROUGHING COMPRESSOR COHPRESSOR jANO ROR 6 ROR UTCH 6 60 SEC (RU0R6 CY6RORL C6R0RTMR j B3 B3 i— ON : I 1 I 1 h- HTIHER ON OEUY |-< EN 646 606 |TIHER: T4:36| I [214] [184] |BASE (SEC): 1.0|-(ON IPRESET: 30j jACCUH: 0| T4-.36.DN - H h " Fi le #3 CRYO_REGEN - 184,200,207 T4-.36.TT - H h " Fi le #6 TECH RUNGS - 18 Rung #194 ROR UAIT COMPRESSOR 7 60 SEC C7RORTMR I —TON -(TIHER ON DELAY (-(EN JTIHER: T4:37| jBASE (SEC): 1.0(-(ON jPRESET: 30| JACCUH: 0| • " • 37.DN - H h - File ta CRYO_REGEN 186,201,208 J7.TT - H h " File #6 TECH RUNGS 18 Rung #195 ROR UAI T ROUGHING COMPRESSOR 8 COHPRESSOR AND ROR 8 ROR UTCH 8 60 SEC RSROR8 CY8RORL C8R0RTHR S3 B3 ι — TON I J TIHER ON DEUY (-< EN 648 608 | TIHER: T4:38| [216] [188] JBASE <SEC): 1.0(-(DN | PRESET: 30 j lACCUM: 0 | I T4:38.DN - -\ (- ' Fi le ta CRYO_REGEN 188,202,209 T4:38.TT - -\ (- - F i le ttό TECH RUNGS 18 Rung #196 I ROR UAIT REROUGH j COHPRESSOR CRYO 2 COUNTER (ROUGHING 2 60 SEC THERHCOUPL COHPRESSOR IAND ROR 2 DONE 50 MICRON 2 |R4R0R2 C2R0RTHR PIR4 C2RERUF B3 T4:32 1 :004 I CTU 1 -H 1 1 h- l/l HCOUNT UP 'cu | 642 DN 12 ICOUNTER: C5:2| | [2101 [189] IPRESET: IOh(DN IACCUH: 01 1 C5:2 - CTU - Fi le « CRYO_REGEN - 196 RES - FUe #3 CRYO_REGEN - 224 C5:2.DN - H (- " f ' le *2 MAIH_PRGRH - 623,623 -f3& C5:3 - CTU - Fi le #3 CRY0_REGEN - 197 RES - FUe #3 CRY0_REGEN - 225 C5.3.DN - H j Fi le #2 MAIH_PRGRH - 623 Rung # 198 REROUGH COUNTER COMPRESSOR 4 C4RERUF I — CTU HCOUNT UP h(c jCOUNTER: C5:4| |pRεsετ: 10(-(D |ACCUH: ol I .4 - CTU - Fi le #3 CRYO_RεGεN - 198 RES - Fi le #3 CRYO_RεGEN - 226 C5-.4.DN - H I FUe #2 HAI H_PRGRM - 623 Rung #199 ROR UAIT REROUGH COUNTER COHPRESSOR 5 C5RERUF ( c (D 10 533 REROUGH COUNTER COMPRESSOR 6 C6R3RUF ,—CTU HCOUNT UP (-C-v jCOUNTER: C5:6| JPRBSET: 10|-<DN jACCUM: 01 I C5:6 - CTU - Fi le #3 CRYO_REGEN - 200 RES - Fi le ta CRYO_REGEN - 228 C5:6.0N - H h " ' e « MAIH_PRGRM - 623 Rung #201 ROR UAIT REROUGH COMPRESSOR CRYO 9 COUNTER ROUGHING 7 60 SEC THERMCOUPL COMPRESSOR ANO ROR 7 DONE 50 HICRON 7 R&ROR7 C7RORTHR PIR14 C7RERUF B3 T4:37 1:040 I—CTU 1/| — -(COUNT UP (-'.cu 647 DN 12 |COUNTεR: C5:7| [215] [194] IPRESET: 10h 0N C5:7 - RES - File « CRY0_REGEN - 229 |ACOJM: 0| ICRYO 10 C5:7.0N - H h ' f'le *2 HAIH_PRGRM - 623 I |THERHCOUPL |50 HICRON |PIR18 I 1:054 I l/l — I 11- |CRYO 12 |THERHCOUPL j50 HICRON |PIR20 | 1:054 1 l/l — 13 Rung #202 ROR UAIT REROUGH COHPRESSOR CRYO 11 COUNTER ROUGHING 8 60 SEC THERHCOUPL COHPRESSOR AND ROR 8 DONE 50 HICRON 8 R&ROR8 C8R0RTMR PIR19 C8RERUF B3 T4:38 1:054 I—CTU |/i HCOUNT UP hcou 648 DN 12 |COUNTεR: CS:8| -16] (195] IPRESET: 10h ON |ACCUM: 0 | CS:8 - CTU - File #3 CRYO_REGEN - 202 Rεs - File ta CRYO_REGEN - 230 C5:8.DN - -\ \- - File #2 MAIH_PRGRH - 623 m l+ O CRYO 2 TEMPERATUR COOL D =<"_0K 2 CY2THP20 CD2 B3 B3 1/| — C I 642 12 ON 502 65 ( [210] [189] B3/6S2 H h Fi le ι*2 MAIH_PRGRM 27, 117, 118 Fi le #3 CRYO_REGEN 164,210,217,238 Fi le #6 TECH_RUNGS 19 -a>- - Fi le ta CRYO_REGEN 203 _<U)- - Fi le #3 CRYO REGEN 231 Rung #204 ROR UAIT I CRYO 3 COMPRESSOR CRYO 3 IROUGHING THERHCOUPL 3 60 SEC TEMPERATUR COOL DO IAMD ROR 3 50 HICRON DONE =<20K 3 |R£ROR3 PIRS C3R0RTHR CY3TMP20 CD3 j B3 1:004 T4:33 B3 B3 1 1 I 1 1 — l/l (L) ( 643 13 DN 503 653 I [211] [190] B3/653 - H h File #2 HAIH_PRGRM 28,119,120 File #3 CRYO_REGEH 165,211,218,239 File #6 TECH_RUNGS 19 -(D- ■ File ta CRY0_REG£N 204 -tuy- ■ File #3 CRYO RεGEN 232 Rung #205 ROR UAIT CRYO 5 COMPRESSOR. CRYO 5 ROUGHING THERMCOUPL 4 60 SEC TEHPERATUR COOL DO AND ROR 4 50 MICRON DONE =<20K 4 RSROR4 PI 8 C4R0RTHR CY5THP20 C04 B3 1:024 T4:34 B3 B3 1/| (L) 644 11 DN 505 654 [212] [191] B3/654 - H h " ' le #2 HAIH_PRGRM - 29,123,124 FUe #3 CRYO~REGEH - 166,212,219,240 File #6 TECH_RUNGS - 19 -<L>- - File ta CRYO_REGEN - 205 -<U)- - File #3 CRYO REGEN - 233 COOL DOUN 6 CD6 B3 (L) 656 CRYO 11 TEMPεRATUR COOL D =<20K 8 CY11THP20 CD8 B3 B3 l/l (L 511 65 33,135,136 174,216,223,244 19 209 237 Rung #210 COMPRESSOR 2 REGεN- ERATION COOL DOUN ROUGHI PROGRAM 2 ANO RO CYRGN2 POH2 C02 RSROR2 B3 T4:42 B3 B3 (U | 322 TT 652 64 | [238] [217] [203] B3/642 - H h Fi le « CRYO_REGEN - 135, 164, 175, 176, 189, 196, 203 Fi le #6 TECH_RUNGS - 17 | COHPRESSOR -(D- Fi le ta CRYO REGEN - 128 12 REGEN - ( ERATION | PROGRAM |CYRGN2 I B3 I 1/| 322 [238] -β Rung #211 COMPRESSOR 3 REGEN¬ ERATION COOL DOUN ROUGHIN PROGRAM 3 AND ROR CYRGN3 PDM3 CD3 R&R0R3 B3 T4:43 B3 83 H h (U) I 323 TT 653 643 I[239] [218] [204] B3/643 - H h 190, 197, 204 ICOMPRESSOR -t.y- j REGEN- IERATION IPROGRAM |CYRGN3 I B3 1 l/l 323 [239] Rung #212 COMPRESSOR 4 REGEN¬ ERATION COOL DOUN ROUGHIN PROGRAM 4 AND ROR CYRGN4 POM4 C04 R&ROR4 B3 T4:44 B3 B3 1 _ (U) | 324 TT 654 644 [240] (219) (205) B3/644 - H h " File #3 CRYO_REGEN - 137, 166, 179, 180, 191 , 198, 205 File #6 TECH_RUNGS - 17 |COMPRESSOR -(D- - File #3 CRYO REGεN - 130 |4 REGEN- |ERATION j ROGRAM |CYRGN4 I B3 1 l/l — 324 [240] Rung #213 COMPRESSOR 5 REGEN¬ ERATION COOL DOUN ROUGHIN PROGRAM 5 AND ROR CYRGN5 P0M5 CD5 R&ROR5 S3 T4:45 B3 B3 ) 5 Rung #214 COMPRESSOR 6 REGEN¬ ERATION COOL DOWN ROUGHIN PROGRAM 6 AND ROR CYRGN6 P0M6 CD6 RMOR6 B3 T4-.46 B3 B3 (U) I 326 TT 656 646 | (242] [221] [207] B3/646 - H h " Ue « CRYO_REGEN - 139, 170, 183, 184, 193, 200, 207 FUe #6 TECH_RUNGS - 17 (COMPRESSOR -(L>- - Fi le t CRYO REGEH - 132 j6 REGEN- |ERATION (PROGRAM |CYRGN6 I B3 1 l/l 326 (242] Rung #215 COHPRESSOR 7 REGEN- ERATION COOL DOUN ROUGHING PROGRAH 7 AND ROR CYRGN7 P0H7 CD7 R&ROR7 B3 T4:47 B3 B3 H h (U) I 327 TT 657 647 | (243] [222] [208] B3/647 - H h - File ta CRYO_REGEH - 140, 171, 172, 173, 185, 186, 194, 201 , 208 File #6 TECH_RUNGS - 17 (COMPRESSOR -(D- - File #3 CRYO REGEN - 133 | REGEN - | ERATION j PROGRAH |CYRGN7 I B3 I 1,1 327 [243] Rung #216 COMPRESSOR 8 REGEN¬ ERATION COOL DOUN ROUGHING PROGRAM 8 AND ROR CYRGN8 P0H8 C08 R&ROR8 B3 T4:48 B3 B3 (U) 328 TT 658 648 [244] [2231 [209] B3/648 - H h ' f ' l #3 CRYO_REGEN - 141, 174, 187, 188, 195, 202, 209 File #6 TECH_RUNGS - 17 COHPRESSOR -(L>- - File #3 CRYO REGEN - 134 8 REGEN¬ ERATION PROGRAH CYRGN8 B3 1/| 328 [244] Rung #217 I CRYO 2 REGEN I COOL DOUN TEMPERATUR TIME TO |2 = 20K 20K 2 |CD2 CY2TMP20 POH2 I B3 B3 ι—TON— I 1 I l/l — HτιπεR ON oει_AY (-( E I 652 502 |TIHER: T4:42| I [203] |BASE (SEC): 1.0|—(D JPRESET: 7200j ACCUM: 0 _l T4:42.DN - - - Fi le #3 CRYO_REGEN - 32,252 T4:42.TT - - h Fi le #3 CRYO REGEN - 210 Rung #218 CRYO 3 REGEM COOL DOUN TEMPERATUR TIME TO 3 =<20K 20K 3 CD3 CY3TMP20 PDH3 B3 B3 i—TON— H/h JTIHER ON DELAY h< E, 653 503 |TIHER: T4:43| -204] |BASE (SEC): 1.0|-(D |PRESET: 7200j |ACCUH: 0| i 1 -' :43.DN " H h " FUe ta CRYO_REGEN - 32,253 :43.TT - H h " FUe #3 CRYO REGεN - 211 Rung #219 CRYO 5 REGEK COOL DOWN TEMPERATUR TlHε TO 4 =<20K 20K 4 CD4 CY5TMP20 PDH4 B3 B3 I —TON— -(TIHεR ON DELAY h (EN 654 505 |TIHER: T4:44| [205] jβAsε (sεo: I .O(-(DN I PRESET: 7200 j | ACCUH: 0 | T4:44.DN - —\ \- File #3 CRYO_REGEN 32,254 T4:44.TT - -\ (- File #3 CRYO REGEN 212 Rung #220 CRYO 4 REGEN COX DOUN TEMPERATUR TIME TO 5 « 20I 20K 5 CDS CY4TMP20 POMS B3 B3 i — TON-r i 1/| JTIHER OM OELAY (-< 655 504 ITIMER: T4:45| [206] |BASE (SEC): 1.0|— < T4:45.DN - - - File #3 CRYO_REGEN - 32, 255 jpRESET: 7200 j I CRYO 6 T4:45.TT - - (- File #3 CRYO REGEN - 213 lACCUM: 0| I TEMPERATUR I I |=<20K (CY6TMP20 I B3 I 1/| I 506 j CRYO 7 j TEMPERATUR |=<20IC |CY7THP20 I B3 i i i 507 Rung #221 CRYO 8 REGEN XL DOUN TEMPERATUR TIME TO =<20K 20K 6 CD6 CY8THP20 P0H6 B3 B3 , — TON— l/l — ■ ITIMER ON DELAY h E 656 508 |TIMER: T4:46| [207] j BASE (SEC): 1.0 (-(D |PRESET: 72001 | ACCUH: oi T4:46.0N - -| |- " F ' e #3 CRYO_REGEN - 32,256 T4:46.TT - - \- - File #3 CRYO_REGEN - 214 Rung #222 CRYO 9 REGEN COOL DOUN TEHPERATUR TIME TO 7 =<20K 20K 7 C07 CY9THP20 P0H7 B3 (E 65 [208] (D 512 Rung #223 CRYO 11 REGEN |CCOL DOUN TEMPERATUR TIME TO |8 «20K 20K 8 |C08 CY11TMP20 P0M8 I 83 B3 (—TON 1 l/l HTIMER ON DELAY H EM I 658 511 JTIHER: T4:48| I [209] jβASε (SεC): 1.0|-<0N) j RESET: 7200j ACCUH: 0 T4:48.DN - H h " ' e « CRYO_REGEN - 32,258 T4:48.TT - H h " f'le « CRYO_REGεN - 216 % SSo BASE : Rung #227 REROUGH COUNTER COMPRESSO 5 C5RERUF C5:5 [RES] C5:5 - CTU - Fi le #3 CRYO_REGEN - 199 C5:5.DN - - (- - F Ue #2 MAIH_PRGRM - 624 BASE : Rung #228 COHPRESSOR CRYO 6 REROUGH 6 REGEN¬ COUNTER COUNTER ERATION RESET COMPRESSOR PROGRAM ONE SHOT 6 CYRGN6 C6CR0S C6R3RUF B3 B3 C5:6 /(- [ONS] — [RES] I 326 566 I(242) C5:6 - CTU - F i le #3 CRYO_REGEN - 200 C5:6.DN - H h " f ' le #2 HAI H_PRGRH - 624 IPAUSE {DISABLE |TS12 N7:16 4 [2:3] 2 CD2 B3 (U) 652 ≤≤ r Rung #236 (COMPRESSOR j7 REGEN- IERATION COOL DOUN jPROGRAM 7 |CYRGN7 CD7 I B3 B3 H/r- (U) I 327 657 I (243] B3/657 - H h " File #2 HAIH_PRGRH 32,131,132,133,134,137,138 File #3 CRYO_REGEN 171,172,173,215,222,243 File #6 TECH_RUNGS 19 - L)- - File #3 CRYO_REGEN 208 -tuy- - File #3 CRYO_REGEN 236 Rung #237 (COMPRESSOR |8 REGEN- j ERATION COOL DOUN I PROGRAM 8 JCYRGNS C08 I B3 B3 H/_ (U) | 328 658 | (244] B3/658 - H |- FUe #2 HAIH_PRGRH 33,135,136 File #3 CRYO_REGEN 174,216,223,244 File #6 TECH_RUNGS 19 (D- - File #3 CRYO_REGEN 209 (U>- - File #3 CRYO_REGEN 237 SSG -τ Rung #239 COMPRESSOR CRYO 3 3 REGEN¬ COOL DOUN TEMPERATUR ERATION 3 «<20K PROGRAM CD3 CY3TMP20 CYRGN3 S3 B3 B3 CU) 653 503 323 (232] B3/323 - H h Fi le HZ MAIH_P«GRH 111 , 119, 120, 464, 466 IHANUAL Fi le #3 CRYO_R£GEN 39, 41 , 68, 75, 211 , 246, 253, jCOHPRESSOR 3 259 IREGENERATION File #6 TECH_RUNGS - 14 {ENABLE ABORT CRYO REGENERATE H/h - File HZ MAIH_P«GRM - 28, 119, 120 {HC3RE TIMER CRYO 3 File #3 CRYO_REGEN - 33, 118, 136, 145, 178, 211, 225, I N7:36 ABORTCRYO TS03 232 I <U) T4:297 N7:15 -<L)- Fi le #3 CRYO REGEN - 38 11 N7:36/11 - -(L.- - Fi le #3 CRY0_R£GEN - 38 TT 1 11 F:N7:2UX21 - BTW - F i le #2 HAI H PRGRH - 2 (27] | [2:3] j EGENERATE | ALL CRYO'S | TS20 N7:16 12 [2:3] PIRANI GUAGE 2 NO FAULT PGNF2 1 :004 —H/l 15 CRYO RE¬ GENERATION FAULT COHPRESSOR 3 CRFLT3 B3 333 [253] PREPARE FOR AUTO RUN >AUTO N7:37 1 [2:157] 3 ζG ≤CA Sez. 52 . 1.0|- , REGEN- CHAMBER CRYO REGEN COHPRESSOR 6 HV8 FAULT CR8FLT I —TON HTIHER ON DELAY h ( TIMER: T4U6J JBASE (SEC) : 1.0h |PRESET: 3θ{ ACCUM: 0| T4-.16.DN - H h " File « CRYO_REGEN - 256 Rung #250 COMPRESSOR DUELL 5 7 REGEN¬ CHAMBER CRYO REGEN ERATION GATE VALVE COMPRESSOR PROGRAH CLOSED 7 HV91012 FAULT CYRGN7 HV9S1 CR91012FLT B3 1 :040 I— TON , -i l/l — H TIHER ON DEUY H E 327 I 03 |TIHER: T4: 17| [243] I {BASE (SEC) : 1.0(-<D IOWELL 6 T4U7.DN 1 | Fi le #3 CRYO_REGεN - 257 j PRESET: 30 { {CHAMBER ACCUM: Ol IGATE VALVE ICLOSED JHVIOSI { 1:052 I l/l— I 06 IEXITLOCK {CHAMBER {GATE VALVE ICLOSED I I :054 ' 1/| — 03 Rung #251 WRESSOR BUFFER 4 GG ≤^ Rung #255 I PUMPOOUN CRYO RE¬ (COMPRESSOR AFTER CRYO GENERATION |5 REGEN- REGEN FAULT lERATIOM COMPRESSOR COHPRESSOR |PROGRAH 5 2 HOUR 5 {cYRGN5 POMS CRFLT5 B3 T4:45 B3 ( ) 325 335 |C241] I [220] B3/335 - H h File #3 CRYO_REGEN - 241 File #6 TECH RUNGS - 16 IHIVAC 4,6,7 j10 SEC {TIMER (COMPLETE |CR467FLT I T4:15 | DN { [248] j PURGE TIME | MONITOR j CRYO 5 SUITCH j 5 SEC TEST 5 {PGCS NIFS5 \ m- GEQ- 1:036 14 S -o Rung #256 PUMPOOUN CRYO RE (COMPRESSOR AFTER CRYO GENERATI j REGEN- REGEN FAULT j ERATION COMPRESSOR COHPRES {PROGRAM 6 2 HOUR 6 {cTRGN6 P0M6 CRFLT6 B3 T4:46 B3 3 I (242] £^Z- Rung #258 PUMPOOUN CRYO R COMPRESSOR AFTER CRYO GENERA 8 REGEN¬ REGEN FAULT ERATION COMPRESSOR COMPRE PROGRAM 8 2 HOUR 8 CYRGH8 POM8 CRFLT8 B3 T4:48 S ( 328 DN 33 [244] [223] 83/338 - H h File O CRYO_REGEN - 244 File #6 TECH_RUNGS - 16 HIVAC 11 10 SEC TIMER COMPLETE CR11FLT T4:18 DN [251] PURGE TIME MONITOR N2 FLOU CRYO 8 SUITCH 5 SEC TEST 8 PGC8 NIFS8 ,—GEQ , I;052 |-(GRTR THAN OR EQUAL (A>=B)| 1/| ( SOURCE A: T4:28.ACC| 13 0| SOURCE B: - \ 5| T4:28.ACC [116] PIRINI GUAGE 8 NO FAULT PGNF8 1:054 15 Rung #259 COMPRESSOR 1 REGEN¬ REGEN¬ ERATION ERATION PROGRAM 'OR' CYRGN1 RGN_OR B3 B3 — t > 321 316 C2S] B3/316 - H h - File 13 CRYO_REGEN - 260 COMPRESSOR 2 REGEN¬ ERATION PROGRAH CYRGN2 B3 322 (2381 COMPRESSOR 3 REGEN¬ ERATION PROGRAH CYRGN3 B3 323 [239] COMPRESSOR 4 REGEN¬ ERATION PROGRAH CYRGN4 83 324 [240] COMPRESSOR 5 REGEN¬ ERATION PROGRAH CYRGN5 B3 325 [241] COHPRESSOR 6 REGEN- IATION rftOGRAM CYRGN6 B3 326 (242] COMPRESSOR 7 REGEN¬ ERATION PROGRAH CYRGN7 B3 T4:170.TT • -| (- ■ File #2 HAIH_PRGRH - 91 Rung #262 PURGE TIME MONITOR CRYO 1 60 NIN DONE PURGE COMPLETE PGC1 PRGOONE T4:21 i— T0N 1 -r HTIMER ON DEUY (-< EN DN JTIHER: T4:130| t] JBASE (SEC): 1.0|—<0M) T4:130.TT - H h " File HZ MAIH_PRGRM - 73 |PRESET: 10j PURGE TIME jACCUM: OJ MONITOR CRYO 2 120 MIN. DONE PGC2 T4:22 DN [110] PURGE TIME MONITOR CRYO 3 120 MIN. DONE * -GC3 T4:23 ON [111] PURGE TIHE MONITOR CRYO 4 120 MIN DONE PGC4 T4:24 DN [112] PURGE TIHE MONITOR CRYO 5 120 HIN DONE PGC5 T4:25 —I I ON [113] PURGE TIHE MONITOR CRYO 6 120 HIN DONE PGC6 T4:26 DN [114] PURGE TIME S°r6 (MONITOR j CRYO 7 (120 MIN JOONE (PGC7 I T4:27 | DN | (1151 {PURGE TIME {MONITOR {CRYO 8 { l20 HIN | DONE |PGC8 T4:28 DN [116] Rung #263 SIEVE TRA MECH PUMP ENABLE S_TRAP_1 SVMPEN T4:341 B3 ( ) TT 125 [1] B3/125 - H I Fi le #2 HAI H_PRGRH - 73 S_TRAP_2 T4:342 TT [35] S_TRAP_3 T4:343 TT [39] S_TRAP_4 T4:344 I — I h- TT [43] S_TRAP_5 T4 :345 TT [47] S_TRAP_6 ~T4:346 TT [54] S_TRAP_7 T4:347 TT [58] S_TRAP_8 T4:348 TT [64] Rung #264 SIEVε TRA HECH PUMP DISABLE ««««««« • f∞β *__ — (E % 83/701 - H h " File #4 RETRN_CNVR - 4 H/h - File #4 RETRN_CNVR - 0 -<L>- - File #4 RETRN_CNVR - 3 -<U)- - File #4 RETRN CNVR - 5 Rung #004 RETURN CONVEYOR RETURN CONVEYOR GATE GATE TIHER RC_GATE RC_GATE_THRA B3 , — TON H h H TIHER ON DELAY H 701 JTIHER: T4:35θ{ [3] JBASE (SEC): 1 .0(-( J PRESET: 25 { ACCUH: 0 T4-.350.DN - H h File #4 RETRN CNVR Rung #005 RETURN CONVEY GATE RC_GATE_THRA RC_GATE T4:350 B3 (U) DN 701 [4] B3/701 H | F i le #4 RETRN_CNVR - 4 H/ | Fi le #4 RεTRN_CNVR - 0 -<D- - FUe #4 RεTRN_CHVR - 3 -(U)- - FUe #4 RETRN CNVR - 5 Rung #006 AUTO RETURN RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEYO CONVEYOR SENSOR 1 SENSOR 2 HOTOR 2 AUTO_RC RCS1 RCS2 RCH2 _ B3 1 :065 1 :065 0:073 l/l (L) 700 01 02 01 0:073/01 - H h - Fi le #4 RETRN_CNVR - 7 -(U)- - Fi le #4 RETRN CNVR - 8 I RETURN CONVEYOR RETURN CONVEYOR { SENSOR 2 SENSOR 3 RCS3 { 1 :065 1 :065 I 1 I (/ ] 02 03 Rung #007 RETURN CONVEYOR RETURN CONVEYOR HOTOR 2 HOTOR 2 T IHER RCH2 RCM2_THR 0:073 TON H h HTIHER ON DELAY |-(E 01 (TIMER: T4:352J [6] {BASE (SEC): 1_0|—O |PRESET: 25| j CCUH: oj T4:352.DN - -\ (- - F i le #4 R£TRH_CNVR - 8 ^Z- Rung #014 RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEYOR SENSOR 4 MOTOR 4 SS MOTOR 4 RCS4 RCM4SS RCM4 1 :065 B3 0:073 I I I [ONS] CU) 04 354 03 0:073/03 ( |- " Fi le #4 R£TR__CNVR - 13 -U)- - FUe #4 RETRN CNVR - 12 IRETURN CONVEYOR {SENSOR 5 {RCSS I 1:065 05 RETURN CONVEYOR RETURN CONVEYOR SENSOR 4 SENSOR 5 RCS4 RCSS 1:065 1:065 ι_ 04 05 RCH4_TMR T4:354 J ON [13] t > -*ng #015 0 RETURN RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEYOR CONVEYOR SENSOR 4 SENSOR 5 HOTOR 5 AUTO C RCS4 RCS5 RCM5 B3 1:065 1:065 0:073 1 I 1 1 I : 1/| (L) 700 04 05 04 0:073/04 - - μ - Fi le #4 RETRN_CNVR - 16 -(U)- - Fi le tti. RεTRN CNVR - 17 IRETURN CONVEYOR RETURN CONVEYOR {SENSOR 5 SENSOR 6 {RCSS RCSά { 1:065 1:065 1 1 I 1/| 05 06 Rung #016 RETURN CONVEYOR RETURN CONVεYOR MOTOR 5 HOTOR 5 TIHER RCM5 RCH5_THR 0:073 l TON HTIHER ON DELAY h< EM > 04 JTIHER: T4:355| "5] JBASE (SEC): 1.0(-(DN) |PRESET: 25{ lACCUH: 0| T4:355.DN - -\ \- - Fi le #4 RεTRN_CNVR 17 HOTOR 6 RCMό 0:073 (L) 700 05 06 05 0:073/05 - -\ (- " Fi le #4 RETRNJΛVR - 19 -<U)- - Fi le #4 RETRN CXVR - 20 RETURN CONVEYOR RETURN CONVEYOR SENSOR 6 SENSOR 7 RCS6 RCS7 1 :065 1 :065 _/h 06 07 Rung #019 RETURN CONVEYOR RETURN CONVEYOR MOTOR 6 MOTOR 6 T IHER RCH6 RCH6_THR 0:073 r— TO 1 HTIHER ON DELAY H EK 05 JTIHER: T4:356J 8] JBASE (SEC): 1.0(-(t> N > ( PRESET: 25 j ACCUM: 0 T4:356.DN - -j h " Fi le #4 RETRN_CNVR - 20 Sϊe Rung #026 S RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEYOR SENSOR 8 HOTOR 8 SS MOTOR 8 RCS8 RCMSSS RCM8 1:065 83 0:073 I I I 1 h (ONS] (U) 10 358 07 0:073/07 - -\ (- Fi le #4 RETRN_CNVR - 25 -(L>- FUe #4 RETRN CNVR - 24 |RETURN CONVEYOR {SENSOR 9 {RCS9 1 :065 11 RETURN CONVEYOR RETURN CONVEYOR SENSOR 8 SENSOR 9 RCS8 RCS9 1 :065 1 :065 1 I 1 I — 10 11 RCH8_TMR T4:358 DN (25] ng #027 -TO RETURN RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEYOR CONVEYOR SENSOR 8 SENSOR 9 MOTOR 9 AUTO_RC RCS8 RCS9 RCM9 B3 1:065 1:065 0:073 (L) 700 10 11 10 0:073/10 - H - File #4 RETRN_CNVR - 28 -(U>- - File #4 RETRN CNVR - 29 |RETURN CONVEYOR RETURN CONVEYOR {SENSOR 9 SENSOR 10 {RCS9 RCS10 | 1:065 1:065 I 1 I 1,| 11 12 Rung #028 RETURN CONVEYOR RETURN CONVEYOR HOTOR 9 MOTOR 9 T IMER RCH9 RCH9_TMR 0:073 I— TON 1 H I- HTIHER ON DEUY μ<EN 10 J TIHER: T4:359J J BASE (SEC) : 1 .0 (- 0N IPRESET: 25 j I CCUH: 01 1_ J T4:359.DN - -\ μ - F i le #4 RETRN_CNVR - 29 SϊZ ^ ~JT0 RεTURN RεTURN CONVEYOR RETURN CONVEYOR CONVEYOR SENSOR 10 SENSOR 11 AUT0_RC RCS10 RCS11 ~B3 1 :065 1 :065 h l/h 700 12 13 12 0:073/12 1 μ - Fi le #4 RETRN_CNVR - 34 -(U>- - Fi le #4 RETRN_CNVR - 35 RETURN CONVEYOR RETURN CONVEYOR SENSOR 11 SENSOR 12 RCS11 RCS12 1 :065 1 :065 13 14 Rung #034 RETURN CONVEYOR RETURN CONVEYOR MOTOR 11 HOTOR 11 TIHER RCH11 RCH11_THR RCH11_THR 0:073 T4:361 I —TON -|TIHER ON DELAY (E 12 DN |TIHER: T4:36l{ 1Z~ [34] |BASE (SEC): 1.0μ(D jpRESεT: 25| |ACCUM: ij T4:361.DN - -\ μ - Fi le #4 RETRN_CNVR - 35 H/| Fi le #4 RETRN_CNVR - 34 ≤2 Rung #035 RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEY SENSOR 11 MOTOR 11 SS MOTOR 11 RCS11 RCM11SS RCM11 1:065 B3 0:073 n 1 I [ONS] CU) I « 361 12 I 0:073/12 - -\ - - File #4 RETRN_CNVR - 34 I -<L)- - File tH. RETRN CNVR - 33 IRETURN CONVEYOR jSENSOR 12 {RCS12 { 1:065 I 1 I 14 RETURN CONVEYOR RETURN CONVEYOR SENSOR 11 SENSOR 12 RCS11 RCS12 1:065 1:065 13 14 RCM11_TMR .4:361 RETURN CONVEYO HOTOR 12 RCH12 0:073 (L) 700 13 14 13 0:073/13 - -\ μ - Fi le it* RETRN_CNVR - 37 -(UK - Fi le *4 RETRN CNVR - 38 RETURN CONVEYOR RETURN CONVEYOR SENSOR 12 SENSOR 13 RCS12 RCS13 1 :065 1 :065 14 15 RETURN CONVEYOR HOTOR 12 TIHER RCH12_THR i — TON HTIHER ON DELAY μ(E 13 DN {TIMER: T4:362J 36] [37] I BASE (SEC): 1.0 (-(O {PRESET: 251 lACCUH: 0| T4:362.DN - -\ μ - Fi le #4 RETRN_CNVR - 38 H μ - Fi le #4 RETRN_CNVR - 37 S2fr Rung #041 RETURN CONVEYOR RETURN CONVEYOR RETURN CONVE SENSOR 13 MOTOR 13 SS HOTOR 13 RCS13 RCM13SS RCM13 1:065 S3 0:073 [ONS] U) 15 363 14 0:073/14 - -\ - - Fi le #4 RETRN_CNVR - 40 -<D- - Fi le #4 RETRN CNVR - 39 | RETURN CONVEYOR 15 16 RCH13_THR T4:363 AUTO RETURN RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEY CONVEYOR SENSOR 15 SENSOR 16 HOTOR 16 AUTO_RC RCS15 RCS16 RCH16 B3 1:065 1:066 0:073 T ___] i . 1 | (L) 700 17 00 17 0:073/17 H μ - Fi le #4 RETRN_CNVR - 49 -CU)- - Fi le #4 RETRN CNVR - 50 RETURN CONVEYOR RETURN CONVEYOR SENSOR 16 SENSOR 17 RCS16 RCS17 1 :066 1:066 l/h 00 01 Rung #049 RETURN CONVEYOR RETURN CONVEYOR HOTOR 16 HOTOR 16 TIHER RCM16 RCH16_TMR 0:073 ,—TON HTIHER ON DELAY E I 17 |TIHER: T4:366| 8] |8ASE (SEC): I.OH 0 {PRESET: 251 ACCUM: 0 T4:366.DN - -\ - - File #4 RETRN_CNVR 50 S3≤ (ACCUM: 0| T4-.367.0N 1 μ - File #4 RETRN_CNVR 53 5 6 Rung #053 RETURN CONVEYOR RETURN CONVEYOR RETURN CONVE SENSOR 17 HOTOR 17 SS MOTOR 17 RCS17 RCM17SS RCM17 1:066 B3 0:074 r-r-i 1 I (ONS] 1— r CU) 01 367 00 0:074/00 - H μ - File #4 RETRN_CNVR - 52 -tiy- - File « RETRN CNVR - 51 | RETURN CONVEYOR {SENSOR 18 {RCS18 | 1 :066 I 1 I 02 RETURN CONVEYOR RETURN CONVEYOR SENSOR 17 SENSOR 18 RCS17 RCS18 1 :066 1 :066 01 02 RCH17_THR T4:367 DN [52] " • <ng #054 .TO RETURN RETURN CONVEYOR RETURN CONVEYOR RETURN CONVEY CONVεYOR sεNSOR 17 SENSOR 18 HOTOR 18 AUT0_RC RCS17 RCS18 RCH18 B3 1:066 1:066 0:074 ! I , 1 I l/l (L) 700 01 02 01 0:074/01 - H h " File #4 RETRN_CNVR - 55 -(U>- - File #4 RETRN CNVR - 56 IRETURN CONVEYOR RETURN CONVEYOR |SENSOR 18 SENSOR 19 |RCS18 RCS19 I 1:066 1:066 02 03 Rung #055 RETURN CONVEYOR RETURN CONVEYOR HOTOR 18 HOTOR 18 TIHER RCH18 RCH18_THR 0:074 r— 1 HTIHER ON DELAY h E 01 |TIHER: T4:36δj * 54] {BASE (SEC): 1.0h(D |PRESET: 25| lACCUH: 0 T4:368.DN - ~ \- - F Ue #4 RETRN_CNVR 56 53 D Rung #059 RETURN CONVEYOR RETURN CONVEYOR RETURN CON SENSOR 19 MOTOR SS MOTOR 19 RCS19 RCM19SS RCH19 1:066 B3 0:07 T— r [0NS1 CU) I 03 369 02 0:074/02 - H h - File #4 RETRN_CNVR - 58 -(D- - File #4 RETRN CNVR - 57 (RETURN CONVEYOR {SENSOR 20 | RCS20 ( 1 :066 04 SUSPEND RETURN CONVEYOR RETURN CONVEYOR OPERATION SENSOR 19 SENSOR 20 UTCH RCS19 RCS20 SUSOPL 1 :066 1 :066 B3 H |/h- 03 04 101 :16] RCH19_THR T4:369 DN > > Rung #062 RETURN CONVE MOTOR 20 RCM20 0:074 CU) 03 Rung #063 IAUTO RETURN RETURN CONVEYOR RETURN CONVEYOR {CONVEYOR SENSOR 20 INOEXER READY JAUTO_RC RCS20 IDX_RDY I " B3 1:066 1 :066 I 700 04 05 372 83/372 - H h " File #4 RETRN_CNVR 65 H/h - File #4 RETRN_CNVR 64 -tl)- - File #4 RETRN_CNVR 63 -<U)- - File #4 RETRN CNVR 66 Rung #064 RETURN CONVEYOR RETURN CONVEY INDEXER MOTOR i oεxεR HOTOR ATCH START :IHL RCIMS B3 0:076 1/| ( ) 372 00 [63] Rung #065 RETURN CONVEYOR RETURN CONVEYOR INDEXER MOTOR INDEXER MOTOR UTCH TIMER RCIHL RCIH_THR B3 i—TON -(TIHER ON DELAY μ( 372 |TIHER: T4:340| (661 {BASE (SEC): 1.0μ( |PRESET: 15| ACCUH: 01 T4:340.DN - -] h - File #4 RETRN_CNVR - 66 Rung #066 RETURN CONVEY INDEXER HOTOR LATCH COPYRIGHT 1989 , 1990 , 1991 CONNER PERIPHERALS , INC . Rung #000 I AUTO HOTOR 3 jHOOE HOTOR 3 PAUSE FAULT {ENABLE FAST DISABLE TIMER {λUTO M3F TS12 K3FLT { N7:37 0:012 N7:16 I—TON— M I 1 I l/h- ■ (TIMER ON DEUY H | 11 12 4 jTIMER: T4:303J j [2:158] [2:185] (2:3) |BASE (SEC): 1.0(-< I JPRESET: 10θj ACCUM: 0| Fi le #5 FAULTS - 15 HOTOR 4 PAUSE FAULT DISABLE TIHER TS12 H4FLT N7:16 I —TON- I/H HTIHER ON DELAY h I 11 13 4 |TIMER: T4:304{ | [2:158] [2:190] [2:3] {BASE (SEC): 1.0h( |PRESET: 100| |ACCUM: 0 T4:304.DN - -\ - - File #5 FAULTS - 15 ^ ng #002 JTO HOTOR 5 Rung #004 Got I AUTO JMOOE MOTOR 8 PAUSE HOTOR 8 JEHABLE FAST DISABLE FAULT TIHER JAUTO M8F TS12 M8FLT { N7:37 0:012 N7:16 I— TON , μ_ | | 1 | 1 /| _ HTIHER ON OEUY \-t | 11 17 4 JTIHER: T4:335J { (2:158] [2:249] [2:3] JBASE (SEC): l.oμcD j PRESET: 200 { ACCUM: 41 T4:335.DN - — \- Fi le #5 FAULTS 15 Rung # 005 | AUTO JMOOE MOTOR 9 PAUSE FAST DISABLE JAUTO H9F TS12 { N7:37 0:032 N7:16 M | 1 μ_ l/h- HTIHER ON OELAY μ(E | 11 10 4 |T!HER: T4:307| { [2:158] [2:253] [2:3] |BASE (SEC): 1.0μ(D {PRESET: 15θ{ ACCUH: 0 T4:307.DN - - \- - File #5 FAULTS 15 P-ng #006 o MOTOR 10 OR 11 | MODE HOTOR 10 PAUSE FAULT | ENABLE FAST DISABLE TIMER | AUTO H10F TS12 H10.11FLT { N7:37 0:032 N7:16 ι — TON h- h |/h- H TIHER ON OELAY H I ii 11 4 |TIMER: T4:308J | [2:158] | [2:258] | [2:3] JBASE (SEC) : 1.0μ(D I I j PRESET: 200 { { ACCUH: θ{ |HOTOR 11 JFAST {HIIF 0:032 I 12 | [2:263] T .308.DN - H h " Fi le #5 FAULTS 15 Rung # 007 | UTO '-ODE MOTOR 12 PAUSE .ABLE FAST DISABLE | UTO M12F TS12 { N7:37 0:032 N7:16 M | 1 μ_ |/r- HTIHER ON DEUY |-( E I 1 13 4 {TIMER: T4:336J | E: 158] [2:281] [2:3] |BASE (SEC) : 1 .0 μ(D (PRESET: 200 { I ACCUH: T4:336.DN - H μ - Fi le #5 FAULTS 15 PALLET JAUTO DETεCTED |HOOE MOTOR 17 PAUSE RIGHT SIDE |ENABLE FAST DISABLE BUFFER 4 JAUTO N17F TS12 SEN48 j N7:37 0:062 N7:16 1:053 H I 1 I l/l l/l -|TIHER ON DELAY μ( I 11 10 4 10 JTIHER: T4:311| { (2: 1581 [2:310] [2:3] |BASE (SEC): 1.0μ( |PRESET: 130{ I |ACCUH: 0( T4:311.DN - -\ \- - File #5 FAULTS - 15 o Rung #015 M3FLT T4:303 ON 811 [0] B3/811 - H μ - FUe HZ MAIH_PRGRH - 626 -CU)- - Fi le *5 FAULTS - 16 H4FLT T4:304 H h- DN [1] H5FLT T4:305 DN [2] H6.7FLT T4:306 ON [3] H8FLT •T4:335 ■— I i — DN [4] H9FLT T4:307 H I DN [5] H10.11 FLT T4:308 DN [6] H12FLT T4:336 H I DN [7] M13FLT T4:309 H I DN [8] H14.15FLT T4:310 DN [9] H16FLT T4:337 H h- DN [101 €oG -CU)- - Fi le #5 FAULTS - 16 Rung #017 I DOOR CLOSE DOOR 1 {SOLENOID CLOSE j l ENABLE TIMER |DRCL1 D1CLTMR { 0:011 ,—TON— | 1 | HTiπεR OH OEUY (-^ | 00 JTIHER: T4:8lj I [2:183] JBASE (SEC): 1.0[—D j RESET: 4J ACCUH: 0 T4:81.DN 1 μ Fi le #5 FAULTS 18 Rung #018 I FAULT ' -TECT OOOR 1 JR 1 DOOR 1 CLOSED I CLOSED CLOSED FAULT JOICLTHR DRCL1S D1CLFL { T4:81 1 :006 B3 -A'r- ( > | DN 00 201 | [17] B3/201 - H/μ - File #5 FAULTS - 65 -( )- - File #5 FAULTS - 20 gol Rung #021 I DOOR 3 I αosε CLOSE {DOOR 3 TIHER {DRC_3 03CLTMR { 0:011 1 —TON— H I -|TIHER ON DEUY h< E | 04 JTIHER: T4:83J [2:229] (BASE CSEC): 1.0μ<D IPRESET: 4J |ACCUM: θ{ I I T4:83.DN - -\ h File #5 FAULTS 22 Rung #022 I FAULT {DETECT DOOR 3 {DOOR 3 DOOR 3 CLOSED {CLOSED CLOSED FAULT jθ3CLTHR DRCL3S 03CLFL I T4:83 1 :006 B3 — 1/f- ( I DN 04 203 i [21] B3/203 - H/h - File #5 FAULTS - 65 -( )- - File #5 FAULTS - 22 Rung #023 I "'"OR CLOSE DOOR 4 ΞNOID CLOSE { ENABLE TIMER |DRCL4 D4CLTHR j 0:011 i—TON— I 1 I — ^TIMER ON DELAY μ(ε I 06 |T1MER: T4:84{ | [2:408] jβASE CSEC): 1-θμ D IPRESET: 4J ACCUH: 0 T4:84.DN - H μ File #5 FAULTS - 24 Rung #024 IFAULT jDETECT DOOR 4 {DOOR 4 DOOR 4 CLOSED {CLOSED CLOSED FAULT JD4CLTHR DRCL4S D4CLFL j T4:84 1:006 B3 hH h- —l/h- ' ) DN 06 204 I [23] -'-'.204 - H/h " File #5 FAULTS - 65 -( )- - File #5 FAULTS - 24 Rung #025 IDOOR CLosε DOOR 5 {SOLENOID CLOSE 15 ENABLE TIHER {θRCL5 D5CLTHR { 0:031 ,—TON- I 1 i -|TIHεR ON DELAY μ(E I 00 |TIHεR: T4:85J I(2:414) jβASε (SEC): 1.0μ(D {pRESεT: 4J lACCUH: 0| £θ JLT |DETECT DOOR 6 {DOOR 6 DOOR 6 CLOSED |CLOSεD CLOSED FAULT {θ6CLTHR DRCL6S D6CLFLT I T4:86 1:026 B3 —1/1- ( ) DN 02 206 I [27] B3/206 - H/h " File #5 FAULTS - 65 -( )- - File #5 FAULTS - 28 Rung #029 DOOR 7 CLOSE J7 ENABLE TIHER JDRCL7 07CLTHR j 0:045 I j 1 H TIHER ON DEUY h CEM ( 00 (TIMER: T4:87{ I [2:422] I BASE (SEC) : 1.0|-CDH {PRESET: 41 JACCL-.: 0| I I Fi le #5 FAULTS - 30 DOOR 7 CLOSED FAULT D7CLFLT B3 ( ) 207 B3/207 - H/h " Fi le #5 FAULTS - 65 oD Fi le #5 FAULTS - 30 Rung #031 DOOR αosε DOOR 8 SOLENOID CLOSE 8 ENABLE TIMER 0RCL8 D8CLTMR 0:045 I —TON— HTIMER ON DELAY μ( 02 JTIHER: T4:8βj [2:427] {BASE (SEC): 1.0μ< {PRESET: 41 | CCUM: oj I 1 T4:88.DN - —\ h " F i le #5 FAULTS - 32 Rung #032 FAULT DETECT DOOR DOOR 8 DOOR 8 CLOSE CLOSED CLOSED FAULT D8CLTHR DRCL8S 08CLF T4:88 1 :042 B3 — 1/1- —( DN 02 20 [31] B3/208 - H/μ - Fi le #5 FAULTS - 65 -( )- - FUe #5 FAULTS - 32 '- • -ng #033 ύSE I DOOR 9 DOOR 9 j SOLENOID CLOSE { ENABLE TIMER |DRCL9 D9CLTMR I 0:061 ,—TON 1 HTIHER ON OELAY μ( | 00 JTIHER: T4:89J I [2:329] |BASE CSEC): 1.0μ( |PRESET: 4J {ACCUH: oj I I I T4:89.DN - -| μ File #5 FAULTS 34 Rung #034 IFAULT jDETECT DOOR {DOOR 9 DOOR 9 CLOSE |CLOSED CLOSED FAULT JD9CLTHR DRCL9S D9CLF | T4:89 1 :056 B3 — I/l¬ ( DN oo 20 . -33] B3/209 - H/ μ File #5 FAULTS - 65 -( )- File #5 FAULTS - 34 Rung #035 I ICLOSE DOOR j10 ENABLE |0RCL10 0:061 I 02 |[2:335] »»»»»»»»» ζ/o 91.DN - H h " File #5 FAULTS - 38 Rung #038 IFAULT {DETECT DOOR 11 JOOOR 11 DOOR 11 CLOSED {CLOSED CLOSED FAULT |D11CLTHR DRCL11S D11CLFL ( T4:91 1:056 B3 1/( ( ) DN 04 211 I an 83/211 - H/h - File #5 FAULTS - 65 -( )- - File #5 FAULTS - 38 Rung #039 IDOOR CLOSE DOOR 12 JS0LEN0ID12 CLOSE {ENABLE TIHER {DRCL12 D12CLTHR I 0:061 r—TON ■JTIHER ON DEUY (-. E > I 06 JTIMER: T4:92J 1 [2:353] |BASE (SEC): 1.0(-(DN {PRESET: 41 (ACCUM: OJ l_ J T4:92.DN - - \- Fi le ttS FAULTS 40 Rung #040 IFAULT DOOR 12 (DETECT DOOR 12 CLOSED {DOOR 12 CLOSED FAULT JD12CLTHR DRCL12S D12CLFLT T4:92 1:056 S3 —|/h- DN 06 212 | -39] €λm. £ 3> »»»»»»»»» I09.DN 1 | FUe #5 FAULTS - 58 Rung #058 | FAULT j DETECT DOOR 9 {DOOR 9 DOOR 9 OPEN {OPEN OPEN FAULT J090PTHR DR0P9S D90PFLT j T4:109 1:056 83 I 1 i 1 /| —c > I DN 01 229 1 157] B3/229 - H/h File #5 FAULTS - 66 -t y- File #5 FAULTS - 58 Rung #059 I DOOR OPEN DOOR 10 {SOLENOID OPEN j10 ENABLE TIHER JOROPIO D100PTMR 0:061 I—TON 1 HTIHER OH DELAY Μ(EN) I 03 ITIMER: T4:11θj ' * ?:326] |BASE (SEC): 1.0μ(DN) {PRESET: 1 I JACCUH: oj I I T4:110.DN 1 μ - Fi le #5 FAULTS - 60 Rung #060 ( FAULT {DETECT DOOR 10 {OOOR 10 DOOR 10 OPEN {OPEN OPEN FAULT JD100PTHR DROP10S D100PFLT T4:110 1:056 B3 H/h ( ) DN 03 230 | C59] €A£ 83/214 - / " Fi le #5 FAULTS - 67 -( >- - File #5 FAULTS - 66 DOOR FA DRFLT 83 (L) 213 215 I [65] 83/215 - H h " Fi le #2 MAIH_PRGRH - 625 H/h " Fi le #2 MAIH_PRGRM - 158 -(U)- - FUe #5 FAULTS - 68 DOOR FAU DRFLT B3 CU) 4 215 [2:3] B3/215 - H h " File #2 MAIH_PRGRH - 625 H h " File #2 MAIH_PRGRH - 158 -(D- - File « FAULTS - 67 -(U)- - File #5 FAULTS - 68 Rung #069 ICRYO GATE CRYO VALVE IHEATER 1 1 OPEN {CHAMBER TIMER 'tVl CV10PTHR 0:011 ,—ON 1 HTIHER ON DEUY H I 11 |TIMER: T4:49J |(2:115] {BASE (SEC) : 1 .0h( {PRESET: 7J {ACCUM: 7J T4:49.DN - H h - F ' e *5 FAULTS - 70 Rung #070 ζλ- T f CRYO VA 1 OPEN FAULT CV10PFL B3 ( ) 251 CRYO VALVE 2 OPEN TIMER CV20PTHR i—TON HTIHER ON DELAY h I 3 14 { TIHER: T4:5θj I(2:117] (2:118] I BASE (SEC): 1-θμC | PRESET: 5J ACCUM: 0 #5 FAULTS - 72 1/| ( ) I ON 02 255 { [77] B3/2S5 - H/h " File #5 FAULTS 93 -t )- - File #5 FAULTS 78 £λ°> -( )- File #5 FAULTS - 80 Rung #081 • Y0 GATE CRYO GATE CRYO VALVE 7 OPEN TIMER CV70PTMR ι—TON HTIHER ON DELAY H E |TIHER: T4:5s{ {BASE (SEC): 1.0μ<D {pRESεT: 5J ACCUH: 0 J #5 FAULTS - 82 CRYO VALV 7 OPEN FAULT CV70PFLT B3 ( ) I DN 10 257 [81] 83/257 - H/| File #5 FAULTS - 93 -e. y- - File #5 FAULTS - 82 ZΌ CRYO VALVE 8 OPEN TIMER CV80PTMR I—TON JTIHER ON DEUY {TIMER: T4:5όj JBASE (SEC): 1.0 jpRESET: δj I ACCUM: 0 T4:56.DN - -\ (- " File #5 FAULTS - 84 Rung #084 IFAULT BUFFER 3 IDETECT CHAMBER CRYO VA ICRYO VALVE GATE VALVE 8 OPEN J8 OPEN OPEN FAULT JCVSOPTHR HV8S3 CV80PFL { T4:56 1:040 B3 l/l — C ) DN 02 258 | [83] B3/258 - H/h " File #5 FAULTS 93 -i >- - File #5 FAULTS 84 CRYO VALVE 9 OPEN TIHER CV90PTMR I —TON I HτικεR ON DEUY μ |TIHER: T4:57J JBASE (SEC): 1.0μ {PRESET: S{ I CCUH: OJ T4:57.DN - -\ (- - File *5 FAULTS 86 Run #086 CRYO VA 9 OPEN FAULT CV90PFL B3 ( ) 259 -( )- File #5 FAULTS 86 GZΛ Rung #087 CRYO GATE CRYO GATE CRYO VALVE 10 OPEN TIMER CV100PTRM I—TON 1 -|TIMER ON DEUY (-( |TIHER: T4:5β{ JBASE (SEC): l.oμ IPRESET: s{ ACCUM: 0 T4:58.DN - -\ (- File #5 FAULTS - 88 Rung #088 FAULT DUELL 6 DETEC CHAMBER CRYO VAL CRYO VALVE GATE VALVE 10 OPEN 10 OPEN OPEN FAULT CV100PTRM HV10S3 CV100PFL T4:58 1:052 B3 l/l ( ) DN 10 260 (871 B3/260 - H/h - File « FAULTS - 93 -( )- - File #5 FAULTS - 88 Rung #089 YO GATE CRYO GATE £ B3/312 - / " File #5 FAULTS - 142 -t y- - Fi le #5 FAULTS - 95 Rung #096 |CRYO GATE CRYO GATE |SOLENOID 1 SOLENOID CRYO VALVE jDUELL 1 DUELL 1 3 THROTTLE {CHAMBER CHAMBER TIHER JHV3J HV3_2 CV3THTHR { 0:011 0:011 , — TON I — 1/_ -|TIMER ON DEUY μ(E I 15 16 {TIMER: T4:115J | [2:119] [2:1201 |BASE (SEC): l.θμ(D |PRESET: s{ |ACCUH: 5J T4:115.DN - -\ μ - Fi le #5 FAULTS - 97 *>ung #097 ULT DUELL 1 IDETECT CHAMBER CRYO VALV {CRYO VALVE GATE VALVE 3 THROTTL {3 THROTTLE THROTTLED FAULT JCV3THTHR HV3S2 CV3THFLT T4:115 1:004 B3 l/l — ( ) DN 04 235 | (96) B3/235 - H/μ - FUe #5 FAULTS - 116 -( )- - Fi le #5 FAULTS - 97 Rung #098 ICRYO GATE CRYO GATE ISOLENOID SOLENOID CRYO VALVE jϋWELL 2 DUELL 2 4 THROTTLE ICHAMBER CHAMBER TIHER {HV4_1 HV4_2 CV4THTMR { 0:031 0:031 ,—TON I 1/ HTIHER ON oεLAY μ(ε I 11 12 |TIMER: T4:116| I[2:121] [2:122] |BAsε (sεo-. l.oμcD {pRεSET: SJ (ACCUH: 5 T4:116.DN - -\ \- Fi le #5 FAULTS - 99 Rung #099 | FAULT DWELL 2 {DETECT CHAHBER CRYO VAL JCRYO VALVE GATE VALVE 4 THROTTL J4 THROTTLE THROTTLED FAULT JCV4THTHR HV4S2 CV4THFLT { T4:116 1:022 B3 1/| ( ) 07 236 [98] CRYO VALVE 5 THROTTLE TIHER CV5THTHR ,—TON HTIHER ON DEUY μ JTIHεR: T ϊ117| {BASE (SEC): 1.0μ j RESET: 5| |ACCUH: 5J I I T4: 117.DH - H μ - Fi le #5 FAULTS - 101 Rung #101 | FAULT HEATER 3 j DETECT CHAMBER CRYO VA {CRYO VALVE GATE VALVE 5 THROT J5 THROTTLE THROTTLED FAULT |CV5THTHR HV5S2 CVSTHFLT I T4:117 1:024 B3 l/l ( ) I DN 01 237 { [100] B3/237 - H/ μ - FUe #5 FAULTS - 116 -e. )- - Fi le #5 FAULTS - 101 αng #102 ICRYO GATE CRYO GATE ISOLENOID 1 SOLENOID CRYO VALVE |DWELL 3 DUELL 3 6 THROTTLE {CHAMBER CHAHBER TIHER |HV6_1 HV6_2 CV6THTMR { 0:031 0:031 ι TON I l/l — -(TIHER ON DELAY μ( I 15 16 JTIHER: T4:118{ | [2:125] [2: 126] |BAsε (sεo : ι .oμ( JPRES8T: 5 | ACCUH: 5 T4: 118.DN - -\ \- File #5 FAULTS - 103 Rung #103 ' CRYO VAL 6 THROTT FAULT CV6THFLT B3 G iT Rung #104 ICRYO GATE CRYO GATE ISOLENOID 1 SOLENOID CRYO VALVE {DUELL 4 DUELL 4 7 THROTTLE {CHAMBER CHAMBER TIHER {HV7_1 HV7_2 CV7THTHR { 0:045 0:045 i—TON I — l/l — HTIHER OH D (- I 11 12 {TIMER: T4:119J j [2: 127] (2:1281 {BASE (SEC): 1.0(-C jPRESET: 5| jACCUH: 5| i 1 T4:119.DN - -\ - Fi le #5 FAULTS 105 Rung #105 |FAULT DUELL 4 jDETECT CHAMBER CXTO VAL {CRYO VALVE GATE VALVE 7 THROTT |7 THROTTLE THROTTLED FAULT JCV7THTHR HV7S2 CV7THFLT | T4:119 1:036 83 I 1 h- 1/| — ( ) I DN 07 239 I (104) B3/239 - H/h File #5 FAULTS - 116 -t y- FUe #5 FAULTS - 105 "ung #106 IY0 GATE CRYO GATε ISOLENOID SOLENOID 2 CRYO VALVE {BUFFER 3 BUFFER 3 8 THROTTLE {CHAMBER CHAMBER TIHER |HV8_1 HV8_2 CV8THTHR { 0:045 0:045 i—TON I l/h * H TIHER ON DEUT μc I 13 14 | TIt.ER: TA U20 j (2:1293 [2:1303 JBASE CSEC) : 1 .OH jpRESεT : 5 | | ACCUM: 5 | I I T4: 120.DN - -\ \- - File #5 FAULTS - 107 Rung # 107 |FAULT BUFFER 3 {DETECT CHAHBER CRTO VAL {CRYO VALVE GATE VALVE E HROTT jβ THROTTLE THROTTLED FAULT |CV8THTHR HV8S2 CV8THFLT T4:120 1:040 S3 l/l — ( ) DN 01 240 1063 B3/240 - H/h " File #5 FAULTS - 116 -( )- - File «5 FAULTS - 107 GZ Q Gz Rung #112 ICRYO GATE CRYO GATE |SOLENOID SOLENOID 2 CRYO VALVE jBUFFER 4 BUFFER 4 11THROTTLE {CHAMBER CHAMBER TIMER JHV11J HV11_2 CV11THTHR { 0:061 0:061 ι—TON I |/h- HTIHER ON DEUY (-< I 1 14 |TIMER: T4:123j I (2:135] [2 136] |BASE (SEC): 1.0[- jpRESεT: 5{ IACCUM: m \ T4:123.DN - —\ - - Fi le #5 FAULTS 113 Rung # 113 | FAULT BUFFER 4 j DETECT CHAMBER CRYO VAL | CRYO VALVE GATE VALVE 11THROTT J HTHROTTLE THROTTLED FAULT {cVIITHTHR HV11S2 CV11THFL I T4:123 1:054 83 1/| ( ) DN 01 243 I [112] 83/243 H/ h " Fi le #5 FAULTS - 116 -( )- - Fi le #5 FAULTS - 113 S3/244 - H/μ - File #5 FAULTS 116 -( )- - File #5 FAULTS 115 Gz% B3/311 - H/h " File #5 FAULTS 142 -( )- - File #5 FAULTS 116 Rung #117 I CRYO GATE CYRO VALVE {HEATER 1 1 CLOSE I CHAMBER TIHER {HVI CV1CLTHR | 0:011 I — TON 1 | 1/| HTIMER ON DEUY H I 11 |TIHER: T4:13lj I [2:1153 JBASE (SEC): 1.0μ< IPRESET: 7| |ACCUM: 0| T4:131.DN - -\ μ - FUe #5 FAULTS - 118 Rung #118 IFAULT HEATER 1 {DETECT CHAMBER CRYO VAL JCRYO VALVE GATE VALVE 1 CLOSE ,1 CLOSE CLOSE FAULT 1CLTHR HV1S1 CV1CLFLT -t y- - Fi le #5 FAULTS - 120 Rung #121 Z2> I CRYO GATE CRYO GATE ISOLENOID 1 SOLENOID 2 CRYO VALVE jDUELL 1 DUELL 1 3 CLOSE jCHAHBER CHAMBER TIHER |HV3_1 HV3_2 CV3CLTHR j 0:011 0:011 i — TON I l/l— 1/| — -|TIHER ON D8UY (-E I is 16 {TIMER: T4:133J 1(2:119] [2:120] { β ASε (SEC): 1.0(-(D jPRESET: sj IACCUM: oj T4:133.DN - -\ \- - File #5 FAULTS - 122 Rung #122 I FAULT DUELL 1 {DETECT CHAMBER CRYO VALV JCRYO VALVE GATE VALVE 3 CLOSED J3 CLOSε CLOSED FAULT JCVSCLTHR HV3S1 CV3CLFLT T4:133 1:004 B3 1/|— ( ) DN 03 153 | [121] B3/153 H/h FUe #5 FAULTS - 141 -( )- F i le #5 FAULTS - 122 ung #123 (Y0 GATE CRYO GATE ( SOLENOID 1 SOLENOID CRYO VALVE JOUELL 2 DUELL 2 4 CLOSE j HAHBER CHAHBER TIHER j HV4_1 HV4_2 0V4CLFLT { 0:031 0:031 I —TON I l/l — l/h* -|TIMER ON DELAY h< E I 11 12 {TIMER: T4:134{ 1(2:121] [2:122] {BASE (SEC): 1.0μ(D |PRεsετ: sj JACCUH: oj l_ I T4:134.DN - -\ - FUe #5 FAULTS - 124 Rung #124 IFAULT DUELL 2 joετεcτ CHAHBER CRYO VALV JCRYO VALVε GATE VALVE 4 CLOSE { CLOSE CLOSED FAULT JDV4CLFLT HV4S1 CV4CLFLT I T4:134 1:022 B3 l/l — ( ) DN 06 154 .123] B3/154 - H/h " Ue #5 FAULTS - 141 -( )- - File #5 FAULTS - 124 Q3 -( )- File #5 FAULTS 126 Rung #127 ' YO GATE CRYO GATE 3A -( )- File #5 FAULTS - 130 H E ..135] B3/160 - H/μ - File #5 FAULTS - 141 -( )- - File #5 FAULTS - 136 -( )- File #5 FAULTS 138 ' •• • ig #139 .39] B3/162 - H/h " File #5 FAULTS - 141 -( >- - FUe #5 FAULTS - 140 C3H, FAULT FAULT FAULT CV11CLFLT CV12CLFLT CVCLFLT [1383 [140] 83/313 - H/h " File #5 FAULTS 142 -( )- - File #5 FAULTS 141 Rung #142 I CRYO VALVE CRYO VALVE {THROTTLE CRYO VALVE CLOSE HIVAC VALVE jFAULT OPEN FAULT FAULT FAULT ICVTHFLT CVOPFLT CVCLFLT HVFLT { B3 B3 B3 B3 I l/l 1/| — 1/| (L) I 311 312 313 245 j (1163 [93] [141] B3/245 - H h - File #2 HAIH_PRGRH - 625 -t.y~ File « FAULTS - 142 -tuy- File #5 FAULTS - 143 Rung #143 IPAUSE HIVAC VALVE {DISABLE FAULT JTS12 HVFLT j N7:16 S3 ' H I (U) 4 245 j (2:33 B3/245 - H " File #2 HAIH_PRGRH - 625 -(L>- - File #5 FAULTS - 142 -(U)- - File #5 FAULTS - 143 VENT VALVE 2 OPEH FAULT CHV20PF B3 ( ) 165 63& H h- 1/1 < ) I DN 12 169 {[152] B3/169 - H/h - File #5 FAULTS - 156 -t )- - File #5 FAULTS - 153 Rung #154 I αosε (OPEN CHAMBER JDWELL 5 VENT VALVE VALVE 4 TIMER JCV4 CLCHV4T { 0:043 I—TOM I 1/| -|TIMER ON DEUY (-(EN I 16 {TIMER: T4:15θ{ | (2:4033 {BASE (SEC): 1.0(-(DN {PRESET: 5J |ACCUM: s{ T4:150.DN - - - File #5 FAULTS 155 Rung # 155 I FAULT j DETECT DUELL 5 CHAMBER j CHAMBER CHAMBER VENT VALVE {VENT VALVE VENT VALVE 4 CLOSE {4 CLOSE CLOSED FAULT JCLCHV4T CVS7 CHV4CLF I T4:150 1:036 B3 h 1/| ( ) I DN 170 { (1543 B3/170 - H/ μ - File #5 FAULTS 156 -t y- - File #5 FAULTS 155 Jig # 156 ICHAMBER CHAHBER CHAHBER CHAMBER CHAHBER CHAHBER JVENT VALVE VENT VALVE VENT VALVE vεNT VALVE VENT VALVE VENT VALVE CHAMBER {Z OPEN 2 CLOSE 3 OPεN 3 CLOSE 4 OPEN 4 CLOSE VENT VALVE jFAULT FAULT FAULT FAULT FAULT FAULT NO FAULT JCHVZOPF CHV2CLF CHV30PF ■ CHV3CLF CHV40PF CHV4CLF CHVNF I B3 B3 B3 ' B3 B3 B3 B3 1 l/l— 1/| l/l l/l l/l — l/l — ( ) | 165 166 167 168 169 170 173 { [145] [147] (K93 [1513 [153] (1553 B3/173 - H/μ - File #5 FAULTS 157 -t )- File #5 FAULTS 156 Rung #157 ICHAMBER CHAHBER JVENT VALVE VENT VALVE INO FAULT FAULT {CHVNF CHVF I B3 B3 /h (L) I 173 174 | [1563 "3/174 - H μ - Fi le #2 MAIH_PRGRH - 625 -U)- - Fi le #5 FAULTS - 157 - >- Fi le #5 FAULTS - 157 β3>% T4:154 1:002 B3 —|/h- —( ) | DN 15 127 {[161] B3/127 - H/μ - File #5 FAULTS 179 -t y- - File #5 FAULTS 162 Rung #163 OPEN OWELL 2 ROUGH VALVE RV2 0:030 I — I I H TIMER ON DEUY H E 11 {TIMER: T4:1S5J (2:563 JBASE (SEC): 1.0(-(D jpRESET: δj j ACCUH: 0| I I T4:155.DN - -\ \- File #5 FAULTS - 164 Rung #164 FAULT DUELL 2 IDETECT CHAMBER ROUGH VENT ROUGH VALVE 2 VALVE ROUGH VALVE IOPEN OPEN OPEN FAULT OPRV2T RVS4 RV20PF T4:15S 1:022 B3 l/h- ( ) DN 16 128 (1633 B3/128 - H/μ • File #5 FAULTS 179 -( )- File #5 FAULTS 164 ng #165 IOPEN CLOSE jDWELL 2 ROUGH VENT {ROUGH VALVE 2 IVALVE TIMER { 2 CLRV2T I 0:030 , TON HTIHER ON DEUY h E I ii {τiHER: T4:156J I (2:563 CSEC): 1.0(-<D jpRESεT: 5J { ACCUM: SJ T4-.156.DN - H μ File #5 FAULTS - 166 166 ROUGH VALVE CLOSE FAULT RV2CLF B3 Rung #171 I OPEN {DWELL 6 {ROUGH {VALVE {RV4 0:060 ■ (TIMER ON D8UY K E I 11 JTIMER: T4:159{ I [2:583 jβASE (SEC): l.oμ<D j PRESET: sj (ACCUH: 0| I T4U59.DN - H μ - File #5 FAULTS - 172 Rung #172 I DUELL 5 j FAULT CHAMBER ROUGH j ROUGH VENT VALVE ROUGH VALVε {VALVE 4 OPEN OPEN FAULT {θPRV4T RVS8 RV40PF I T4:159 1:052 B3 < > ( DN 15 132 {(1713 B3/132 - H/h File #5 FAULTS - 179 -( )- File #5 FAULTS - 172 ung #173 lOPEN CLOsε DWELL 6 ROUGH VENT ROUGH VALVE 4 VALVE TIMER RV4 CLRV4T 0:060 ι—TON hH/h -I TIHER ON Dε Y μ(ε 11 |TIHER: T4:16θj [2:583 jβASE (sεo: ι.oμ<θ jPRESET: δj IACCUH: 51 T4U60.DN - H μ " File #5 FAULTS 1 4 Rung #174 FAULT DWELL 5 DETεCT CHAMBER ROUGH VENT ROUGH VALVE 4 VALVE CLOSE CLOSED CLRV4T RVS7 T4:160 1:052 |/h- DN 14 133 [1731 83/133 H/h " ile #5 FAULTS - 179 -< )- - File #5 FAULTS - 174 H I 1/| C ) , DN 16 135 { 11773 B3/135 - H/h - Fi le #5 FAULTS - 179 12 128 129 1 132 133 134 - | [160] [162] [164] [166] (1683 [1703 [1723 [1743 (176) ROUGH VALVE 5 CLOSE FAULT RV5CLF 83 l/l — 135 384 [1783 B3384 H/h - File #5 FAULTS - 180 -( )- - File « FAULTS - 179 Rung #180 I ROUGH VENT ROUGH VE {VALVE VALVε FAULT FAULT {RWNF RWF I 63 B3 I — l/h (L) 384 386 j -179] B3/386 - H h " File #2 HAIH_PRGRH - 625 -ID- - File #5 FAULTS - 180 -(U)- - File #5 FAULTS - 181 Rung #181 ROUGH VEN i f Aus VALVE SABLE FAULT -tuy- - File #5 FAULTS - 181 Rung #182 I MECHANICAL ROUGHING ROUGHING {PUMP 1 BLOUER 1 SECTION 1 SECTION 1 {ENABLED ENABLED PRESSURE TIHεR BL1 PS1 RS1T 0:007 0:007 I :002 ι — TON HTIMER ON OELAY h< E 00 01 03 | TIMER: T4:7{ I (2:683 [2:693 { BASE (SEC) : LOμCD j PRESET : 60 j lACCUH: 0 | T4:7.DN - H μ File #5 FAULTS - 183 mg #183 IFAULT {DETECT ROUGHING {ROUGHING SECTION {SECTION 1 FAULT JRSIT RS1F T4:7 B3 ( DN 438 |(1823 B3/438 - H μ File #5 FAULTS - 188 -( )- File #5 FAULTS - 183 SεCTlON 3 LURE L File #5 FAULTS - 189 Rung HEATER SHIELD H20 FLOW GROUP 1 FAULT HSFG1F E3 ( ) 216 83/216 A h File #5 FAULTS - 199 H/h File HZ HAIH PRGRM - 213 SUITCH 5 FAULT HSFS5 HSFG3F 1:023 B3 . l/l -(AFU- ( ) 16 218 IHEATεR B3/218 - H h - Ue #5 FAULTS - 199 jsHiεLD H20 JFLOU jSUITCH 6 |HSFS6 1 :023 1 1/| 17 GSo , Rung #199 HEATER SHIELD H20 FLOU HEATER SHIELD GROUP 1 PAUSE FLOU FAULT FAULT DISABLE TIMER HSFG1F TS12 HSFFTMR B3 N7:16 ι—TON 1 —1/(- JTIHER ON DEUY |- | 216 4 |TIHER: T4:93{ { [1901 [2:33 jβASE (SεC): 1.0μ I IPRESET: 20| I HEATεR ACCUM: 0| ISHIELD H20 {FLOU {GROUP 2 IFAULT {HSFG2F I B3 I 217 | [1913 {HEATER {SHIELD H20 {FLOU {GROUP 3 {FAULT 'HSFG3F | 83 l 1 I 218 (192) T4-.93.DN - H h File #2 HAIH_PRCRH - 223 File #5 FAULTS ' - 200 -tD- - File #5 FAULTS - 200 -tuy- - File #5 FAULTS - 201 Rung #201 I HEATεR •AUSE SHIELD IDISABLE FLOU FA |TS12 HSFF { N7: 16 S3 hH I CU) I *• 219 | [2:3] B3/219 - H h " File #2 HAIH_PRGRH - 625 -<L>- - File #5 FAULTS - 200 -tuy- - File #5 FAULTS - 201 Rung #202 CATHOOE H20 FLOU SUITCH CATHOOE FLOU GROUP 1 PAUSE FAULT TIHER FAULT DISABLE CFFTHR CUFSG1F TS12 , — TON B3 N7:16 1 | / | — H TIHER ON DEUY h< EM j TIMER: T4:94 | 136 4 { BASE (SEC) : LOhe [193] [2:33 { PRESET: 20 j ACCUH: 0 CATHODE H20 FLOU SUITCH GROUP 2 FAULT CUFSG2F B3 I— I h- 137 [194] ICATHOOE H20 FLOU SUITCH GROUP 3 FAULT UFSG3F _3 138 [1953 ICATHOOE H20 FLOU SUITCH GROUP 4 FAULT CUFSG4F S3 139 (1963 CATHOOE H20 FLOU SUITCH GROUP 5 FAULT CUFSG5F B3 140 [1973 CATHOOE H20 FLOU SUITCH GROUP 6 FAULT CUFSG6F B3 141 [1983 -(U)- - File #5 FAULTS - 204 -(U)- - File #5 FAULTS - 204 Rung #205 NI PIRANI PIRINI PIRINI PIRINI PIRINI PIRINI PIRINI PIRINI | GUAGE 1 GUAGE 2 GUAGε 3 GUAGε 4 GUAGε 5 GUAGE 6 GUAGE 7 GUAGE 8 GUAGE NO FAULT NO FAULT NO FAULT NO FAULT NO FAULT NO FAULT NO FAULT NO FAULT FAULT |PGNF1 PGNF2 PGNF3 PGNF4 PGNF5 PGNF6 PGNF7 PGNF8 PGNF I 1 :004 1:004 1:024 1:024 1:040 1:040 1:054 1:054 B3 ( ) I ' *• 15 14 15 14 15 14 15 465 B3/465 H μ - File #2 MAIH_PRGRH - 23 H/h - File #2 HA1H_PRGRH - 22,624 -t y- - F ile #5 FAULTS - 205 Rung #206 | CHAHBER CHAMBER CHAHBER CHAHBER CHAMBER CHAHBER ALL CHAHBER {COVER 5 COVER 6 COVER 9 COVER 10 COVER 11 COVER 12 COVERS CLOSED (CCS CC6 CC9 CC10 CC11 CC12 ACCC 1 :025 1 :025 1:041 1:041 1:055 1:055 B3 ( ) | 00 01 00 01 00 01 315 B3/315 - H/h - File #5 FAULTS - 207 -t y- - File #5 FAULTS - 206 Rung #207 I CHAHBER I ALL CHAMBER COVERS ΕRS CLOSεD CLOSED -tD- - FUe #5 FAULTS - 207 -tuy- - Fi le #5 FAULTS - 208 GSB -(U)- - FUe #S FAULTS - 208 Rung #209 RETURN TO MAIN FROH_CRYO_RGN I — RET H RETURN () Rung #210 -CENDl COPYRIGHT 1989 , 1990 , 1991 CONNER PERIPHERALS , INC . Run #000 0,1 DUELL 3 DUELL 5 CHAMBER CHAMBER OPEN OPEM OPEN PRESSUR AT PRESSUR AT PUMP 1 PUMP 2 PUMP 3 ATMOSPHεRE ATHOSPHERE VENT VALVE VENT VALVE VENT VALVE PS4 PS5 PV1 PV2 PV3 1:022 1:036 0:007 0:027 0:057 B3 _ h -< 9 DOOR OPEN SOLENOID 6 ENABLE DUMHY DROP6 TEMP5 0:031 B3 — ( t 03 5 CLOSE I DOOR CLOSE DOOR OPEN DOOR CLOSE DOOR OPEN DOOR 9 DOOR OPEN DOOR OPEN DOOR OPEN DOOR CLOSE {SOLENOID SOLENOID SOLENOID SOLENOID SOLENOID SOLENOID CLOSε DOOR SOLENOID CLOSE SOLεNOID SOLEN01D12 {7 ENABLE 7 ENABLE 8 ENABLE 8 ENABLE ENABLE 9 ENABLE 10 ENABLE 10 ENABLE DOOR 11 11 ENABLE ENABLE DUHHY JDRCL7 DROP7 DRCL8 0ROP8 DRCL9 DR0P9 DRCL10 DROP10 DRCL11 DROP11 DRCL12 TεHP6 0:045 0:045 0:045 0:045 0:061 0:061 0:061 0:061 0:061 0:061 0:061 B3 — < ) I 00 01 02 03 00 01 02 03 04 05 06 6 I [2:4221 (2:483 [2:427] (2:493 (2:3293 [2:325] (2:3351 [2:326] [2:337] [2:327] (2:3533 £5% 8 DOOR 9 DOOR 10 DOOR 11 DOOR 12 GATE CRYO GATE CRYO GATE CRYO G 2 SOLENOID SOLENOID 2 SOLENOID 1 SOLENO 2 DUELL 3 DUELL CHAHBER CHAMBER CHAMBE OPEN OPEN OPEN OPEN I CR CRYO GATE CAPACITANC CAPACITANC CAPACITANC CAPACITANC {sO SOLENOID 2 OPEN RGA OPEN RGA OPEN RGA OPEN RGA MANOMETER MANOMETER HANCMJ-TER MANOMETER { DU εXBUFFER ISOLATION ISOLATION ISOUTION ISOUTION ISOUTION ISOLATION ISOLATION ISOLATION I CH CHAMBER VALVE 1 VALVE 2 VALVε 3 VALVE 4 VALVE 1 VALVE 2 VALVE 3 VALVE 4 {HV HV12_2 RGAV1 RGAV2 RGAV3 RGAV4 CHV1 CHV2 CMV3 CHV4 I θ7θ61 0:010 0:030 0:044 0:060 0:010 0:030 0:044 0:060 I 1 1- 1 13 06 06 06 06 | [2 [2:374] [2:3753 (2:3763 [2:377] [2:378] B3/7 - -( )- 00 01 02 03 04 05 06 07 10 11 12 GGo PRESSURE -TC10 TEMP TC10 TEMP B3 B 1 I ( TT 00 01 250 1 [3:1163 [2:73] [2:74] [2:671] B3/15 - -( )- - Fi le #6 TECH_RUNGS 14,17 Rung #016 IOPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE OPEN PURGE VALVE 3 VALVE 4 VALVE 5 VALVE 6 VALVE 7 VALVE 8 VALVE 9 VALVE 10 NI F3 NIF4 NIF5 NIF6 NIF7 NIF8 NIF9 NIF10 0:007 0:027 0:027 0:027 0:043 0:043 0:043 0:057 MECHANICAL PUMP 2 COMPRESSOR 4 COHPRBSSOR COHPRESSOR 6 COHPRESSOR 7 COMPRESSOR 8 TC=<50 ROR UTCH ROR LATCH ROR UTCH ROR UTCH ROR LATCH MICRONS TEMP CY4R0RL CY5R0RL CY6R0RL CY7RORL CY8RORL PIR10 TEMP 83 B3 83 B3 B3 1:024 B -t 604 605 606 607 608 13 1 (3: 179) [3:181] D:183] [3:1853 (3:1873 B3/15 - -{ )- - Fi le #6 TECH RUNGS 14, 15 G Rung #018 = 20K =<20K επp 63 SECTI ON N COPYRIGHT 1989, 1990, 1991 CONNER PERIPHERALS, INC. < -C - CO CQ CQ CD (& 03 < < < < - _ _ _ < < l- - < < - n < 0 '- N I_I O f- N *- fM - «- (M ^ -_ ^ __ >θ -. CO CO O. «— *- «- o »- -- «- __ __ __ a. __ __ __ __ a __ -_ __ o_ __ __ t_. __ -_ c_. -_ __ a. c_- .__. ro. r*. CO &• -- *— »— .r— O O Q __ o α α o α. ct. α. α. __ _L. α. __ α. α_. -_ Q. __ __ __ α. (_. . -L. α. __ . α. 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The process of the present invention provides an improved method of providing multilayer coatings to a variety of substrate types at a much greater rate than prior art methods . Also described herein are a novel means for heating substrates to be coated, a novel sputtering magnetron design, a novel, variable speed, overhead, non- contaminating substrate transportation system and a comprehensive, centralized, programmable electronic means for controlling the apparatus and process are provided. Still further, when the process and apparatus are used for providing magnetic coatings for substrates, such as disks, to be utilized in hard disk drives using Winchester-type technology, a unique disk texturing method for improving the disk's magnetic recording properties, and a novel disk carrier (or pallet) design which contributes to uniform substrate heating characteristics in a large, single, high capacity pallet, are also provided herein. Numerous variations are possible as will be apparent to those skilled in the art; such variations are intended to be within the scope of the invention as defined by this specification and the following claims are intended to cover all the modifications and equivalents falling within the scope of the invention.

Claims: &% CLAIMS What is claimed is: 1. A high throughput sputtering apparatus for providing a single or multi-layer coating to the surface of a plurality of substrates, said apparatus including a plurality of buffer and sputtering chambers, and an input end and an output end, wherein said substrates are transported through said chambers of said apparatus at varying rates of speed such that the rate of speed of a pallet from said input end to said output end is a constant for each of said plurality of pallets. 2. A high throughput sputtering apparatus having a plurality of integrally matched components, said components comprising: means for sputtering a multi-layer coating onto a plurality of substrates, said means for sputtering including a series of sputtering chambers each having relative isolation from adjacent chambers to reduce cross contamination between the coating components being sputtered onto substrates therein, said sputtering chambers being isolated from ambient atmospheric conditions; means for transporting said plurality of substrates through said means for sputtering at variable velocities; means for reducing the ambient pressure within said means for sputtering to a vacuum level within a pressure range sufficient to enable sputtering operation; means for heating said plurality of substrates to a temperature conducive to sputtering said multi-layer coatings thereon, said means for heating providing a t substantially uniform temperature profile over the surface of said substrate; and control means for providing control signals to, and for receiving feedback input from, said means for sputtering, means for transporting, means for reducing and means for heating, said control means being programmable for allowing control over said means for sputtering, means for transporting, means for reducing and means for heating. 3. A high throughput sputtering apparatus, comprising: control means for providing control signals and for monitoring a plurality of sensory input signals; means for transporting a plurality of substrates through a sequential series of concurrent sputtering steps at selected variable velocities responsive to said control signals, said means including a first set of means for providing said sensory input signals to said control means; means for reducing the ambient pressure within the apparatus to a common reduced pressure level within a pressure range to enable sputtering operation responsive to said control means, said means for reducing including a second set of means for providing said sensory input signals to said control means; means for heating said plurality of substrates to an ambient temperature, said temperature having a substantially uniform profile over the surface of said substrate, said means for heating including a third set of means for providing said sensory input signals to said control means; and means for sputtering a multi-layer coating onto said substrate responsive to said control means, said means for sputtering including a third set of means for providing said sensory input signals to said control means. 4. A high throughput direct current magnetron sputtering process for producing multilayer thin films, comprising the steps of: providing substrates to be sputtered; creating an environment about said substrates, said environment having a pressure within a pressure range which would enable sputtering operations; providing a gas into said environment in a plasma state and within said pressure range to carry out sputtering operations; transporting substrates at varying velocities through said environment a sequence of sputtering steps within said environment and along a return path external to said environment, and simultaneously introducing the substrates into said environment without substantially disrupting said pressure of said environment, providing rapid and uniform heating of said substrates to optimize film integrity during sputtering steps, and sputtering said substrates to provide successive layers of thin films on the substrates; and removing the sputtered substrates without contaminating said environment. .?> 5. A high throughput direct current sputtering process for producing multilayer thin films on magnetic recording media, comprising the steps of: providing substrates; physically abrading the substrates to achieve a uniform texture of intersecting circumferential lines across the substrate surface; cleaning said substrates; providing a sputtering environment about said substrates, said environment having a pressure within a pressure range to enable sputtering operations; loading the substrates into a high capacity carrier of sufficient dimensions to accommodate substrate and carrier thermal expansion and enhance thermal uniformity between individual substrates; introducing the substrates into said environment without disrupting said environment; transporting the substrates at varying velocities through said environment a return path external to said environment while protecting substrates from contamination; providing a gas in a plasma state into said environment at a pressure sufficient to carry out sputtering operations; providing rapid and uniform heating of the substrates to optimize film integrity during subsequent sputtering steps; sputtering to provide successive layers of thin films on said substrates; and removing the coated substrates without disrupting sputtering operations.

Inventors: BONIGUT JOSEF, HOLLARS DENNIS R, PAYNE GARY L, SMITH ROBERT M, WALTRIP DELBERT F, ZUBECK ROBERT B, BONIGUT, JOSEF, HOLLARS, DENNIS, R., PAYNE, GARY, L., SMITH, ROBERT, M., WALTRIP, DELBERT, F., ZUBECK, ROBERT, B.
Applicants: CONNER PERIPHERALS INC, CONNER PERIPHERALS, INC.
Application year: 1992
Main classification: C23C14
IPC codes: C23C14, G05B19, G11B5, H01L21