Semiconductor device with a contact metallization comprising aluminium and silicon and method of manufacturing this semiconductor device

Abstract: The invention relates to a semiconductor device with a monocrystalline silicon body (1) provided with a dielectric layer (2) with contact holes (3) through which the silicon body (1) is contacted with an aluminium metallization. To avoid undesirable separation of silicon, a discontinuous nucleus layer (5) of a metal nobler than silicon is formed on the silicon body (1) in the contact holes (3) preceding the provision of the metallization (4).

Description: The invention relates to a semiconductor device comprising a monocrystalline silicon body which is provided at one side with a dielectric layer in which contact holes are present through which the silicon body is contacted with a metallization comprising aluminium and silicon. A semiconductor device of the kind mentioned in the opening paragraph has long been known in semiconductor technology, but is not always free from problems. Thus, for example, the resistance between the metallization and the silicon body may be high, often too high, especially when the contact holes have small dimensions, for example 1 to 2 µm. Such a high resistance arises from the fact that, during the provision of the metallization comprising aluminium and silicon, silicon separates out the metallization at the surface of the silicon body in the contact holes. The metallization then eventually is in contact with a surface region of practically non-doped silicon, which obviously has a high contact resistance. It has been suggested to render a surface portion of the silicon region amorphous, for example in the Japanese Patent Application 63-29503, so that separation in the form of crystallization of the silicon present in the aluminium is limited. This measure, however, is not sufficient for counteracting the problem described, because amorphous silicon of the silicon body is easily dissolved in the aluminium during the provision of the metallization and is epitaxially deposited therefrom, so that the problem of the high contact resistance remains. EP-A-0 382 298 describes the formation of Pd nuclei on silicon contact areas using an aqueous solution containing HF. The Pd nuclei are used as catalysts for a subsequent electroless metallisation. The invention has for its object inter alia to counteract the said problem and is based on the insight that this is possible when separation effects at the interface of the metallization comprising aluminium and silicon and the monocrystalline silicon can be avoided, while a good contact between the said metallization and the said silicon is maintained. According to the invention, therefore, the semiconductor device mentioned in the opening paragraph is characterized in that a discontinuous nucleus layer of a metal nobler than silicon is present in the contact holes between the silicon body and the metallization comprising aluminium and silicon. The discontinuous layer renders it possible to maintain the contact between the metallization comprising aluminium and silicon and the silicon body, while undesirable separation effects do not occur. Preferably, the discontinuous nucleus layer consists of palladium or copper. It will become apparent below that palladium or copper layers can be formed in a simple and inexpensive manner without extra steps during manufacture. The invention, accordingly, also relates to a method of manufacturing a semiconductor device whereby on a monocrystalline silicon body a dielectric layer is formed which is provided with contact holes, and the silicon body is subjected to a treatment at the area of the contact holes to avoid preferential separation of silicon during the formation of a metallization comprising aluminium and silicon in the contact holes on the silicon body which follows the said treatment. It will be clear from the above that a treatment by which the silicon body is converted into amorphous silicon at its surface in the contact holes does not effectively counteract the separation problem. According to the invention, therefore, the above method is characterized in that during the said treatment a discontinuous nucleus layer is formed on the surface of the silicon body in the contact holes by local exchange of silicon against a metal nobler than silicon. In the method according to the invention, the discontinuous layer is formed on the silicon in the contact hole only. The treatment is particularly simple and inexpensive if it is carried out in an aqueous environment. An extra treatment step is not even necessary for the said treatment if the nobler metal is added to a usual etching bath containing hydrogen fluoride in which the silicon body is immersed preceding the formation of the metallization. Preferably, the nobler metal is added to the bath in the form of a palladium salt or a copper salt. The nuclei have a size of a few nm and the covering rate of the silicon surface by the nuclei is approximately 5 to 10 %. The invention will now be explained with reference to an embodiment and the accompanying drawing. The drawing diagrammatically and in cross-section shows a portion of a semiconductor device in a stage of manufacture by means of the method according to the invention. The Figure shows the monocrystalline silicon body 1, the dielectric layer 2, a contact hole 3, and the metallization 4 comprising aluminium and silicon and contacting the silicon body 1 of the semiconductor device. To prevent preferential separation of silicon on the silicon adjoining the metallization 4, there is according to the invention a discontinuous nucleus layer 5 of a metal nobler than silicon in the contact hole 9 between the silicon body 1 and the metallization 4 comprising aluminium. This metal may be, for example, palladium or copper. The nucleus layer 5 is obtained in a simple manner by a treatment of the surface 6 of the silicon body 1 in the contact hole 3, whereby silicon is locally exchanged against a metal nobler than silicon. Such an exchange takes place, for example, in an aqueous environment, for example by the addition of the nobler metal to a bath containing hydrogen fluoride in which the silicon body 1 is immersed preceding the formation of the metallization 4. The nobler metal is present in the bath in the form of, for example, a palladium salt or a copper salt. Example: The method starts, for example, with a p-type silicon body 1 on which a 0,6 µm thick silicon dioxide layer 2 is formed in usual manner, in which then a 1,4 µm wide contact hole 3 is provided. In usual manner, the silicon body is then cleaned in a dip etching bath containing 1 % hydrogen fluoride at room temperature for one minute. According to the invention, 5 mg palladium (II) chloride per litre is added to this bath, so that during the dip etching treatment the discontinuous nucleus layer 5 with nuclei having a size of 5-10 nm is formed over approximately 5 % of the silicon surface area. After this, a metallization 4 of aluminium with 1 % silicon may be provided in usual manner without undesirable separation taking place. A semiconductor device, as required, may be manufactured from the structure thus obtained, also in usual manner. Obviously, the invention is not limited to the example given. Instead of the palladium (II) chloride, for example, copper (II) chloride or copper (II) sulphate may be added to the hydrogen fluoride solution. It will be obvious from the above that both the semiconductor device and the method of manufacturing it may be varied in many ways within the scope of the invention.

Claims: A semiconductor device comprising a monocrystalline silicon body which is provided at one side with a dielectric layer in which contact holes are present through which the silicon body is contacted with a metallization comprising aluminium and silicon, characterized in that a discontinuous nucleus layer of a metal nobler than silicon is present in the contact holes between the silicon body and the metallization comprising aluminium and silicon. A semiconductor device as claimed in Claim 1, characterized in that the discontinuous nucleus layer consists of palladium or copper. A method of manufacturing a semiconductor device whereby on a monocrystalline silicon body a dielectric layer is formed which is provided with contact holes, and the silicon body is subjected to a treatment at the area of the contact holes to avoid preferential separation of silicon during the formation of a metallization comprising aluminium and silicon in the contact holes on the silicon body which follows the said treatment, characterized in that during the said treatment a discontinuous nucleus layer is formed on the surface of the silicon body in the contact holes by local exchange of silicon against a metal nobler than silicon. A method as claimed in Claim 3, characterized in that the exchange takes place in an aqueous environment. A method as claimed in Claim 4, characterized in that the nobler metal is added to a usual etching bath containing hydrogen fluoride in which the silicon body is immersed preceding the formation of the metallization. A method as claimed in Claim 5, characterized in that the nobler metal is added to the bath in the form of a palladium salt or a copper salt.

Inventors: SWART EDWIN TJIBBE, VAN DER PUTTEN ANDREAS MARTINU, WOLTERS ROBERTUS ADRIANUS MARI, SWART, EDWIN TJIBBE, VAN DER PUTTEN, ANDREAS MARTINUS THEODORUS PAULUS, WOLTERS, ROBERTUS ADRIANUS MARIA
Applicants: PHILIPS ELECTRONICS NV, PHILIPS ELECTRONICS N.V.
Application year: 1992
Main classification: H01L21
IPC codes: H01L21, H01L23