Antistatic film and method of manufacturing the same

Abstract: An antistatic film comprising a chemically adsorbed film of straight chain molecules each containing a conductive group and provided on a chargeable substrate via covalent bonds each containing a Si group, said chemically adsorbed film having a conductivity of 10⁻¹⁰ S/cm or above. With the antistatic chemically adsorbed film according to the invention, conductive functional groups are secured via chemically adsorbed molecules and by siloxane bonds to the surface of a substrate material such as ceramics, glass, synthetic resins or synthetic fibers, a film, a plate, an display screen surface, a light-emitting tube. Thus, the film provides an antistatic effect and does not separate. In addition, this chemically adsorbed film has a thickness at the nanometer level and is thus excellently transparent, as well as capable of preventing contamination of the substrate surface due to charging thereof. The film is also excellently durable. Further, when a chemically adsorbed polymer film is formed, a high molecular density, chemically adsorbed film can be obtained.

Description: The present invention relates to a laminate comprising a chargeable substrate and an antistatic film. Moreover, the present invention relates to a method of manufacturing such a laminate. Ceramics, glass, synthetic resins, synthetic fibers and the like can be electrostatically charged depending on their use. When they are charged, dust particles floating in the environment are electrostatically attracted to them and contaminate their surface. It is well known in the art that in order to prevent electrostatic charging, conductive resins are coated on, conductive films are applied to or conductive ceramics such as ITO (indium-tin oxide) are deposited on the surface of ceramics, glass, synthetic resins and the like. Further, it is desirable to change the substrate surface antistatic, such as the surface of films, typically overhead projector films, motion picture films, video films and recording films, displays, typically VTR displays comprising electron guns, electroluminescence displays, plasma displays and liquid crystal displays, screens used for motion picture displays, projection type television sets and overhead projectors, and textile products, typically clothing and curtains. It is usually undesirable that substrates are held in close contact with one another or contaminated by dust particles in air due to electrostatic charging. It is well known that in order to prevent this charging, a coating containing fine metal particles or carbon fibers dispersed in a resin or the like is coated on the substrate surface, or polyalkylene glycol or the like is sprayed thereon. The prior art CRT display is made of glass, and in use it is internally irradiated with electron beams. Therefore, the display surface may be charged, and due to this charging, dust particles floating in the environment are readily attracted. To prevent electrostatic charging, it has been in practice to coat the display screen glass surface with a conductive resin or to apply a conductive film to the surface or deposite ITO (indium-tin oxide) or like conductive ceramics on the surface. It is further well known to dispose a transparent board made from a plastic plate, which has a conductive layer of ITO or the like formed on its surface, in front of the display of a word processor or a personal computer. The prior art light-emitting tube is made of glass, and in the fluorescent tube or the like an electron beam is generated internally in use. Therefore, the surface of these tubes is very prone to electrostatic charging. With this charging, dust particles floating in the invironment are attracted to and contaminate the surface. To prevent this charging, conductive resins are coated on, conductive films are applied to or ITO (indium-tin oxide) or like conductive ceramics are deposited on the surface of the tubes. Further, it is well known to form a chemically adsorbed monomolecular film on the surface. For example, in a method proposed by Ogawa (in US-A-4,673,474 and others), a specific chemically adsorbed film is produced through chemical adsorption by preliminarily incorporating a functional group having a specific function in a surface active material. However, using the known method of coating conductive resins or applying conductive films to the surface, results in inferior transparency, and separation or scars and scratches can occur. Using the known method of depositing ITO is costly, although it is possible to obtain high reliability. Using the method of forming a chemically adsorbed monomolecular film, it is impossible to incorporate a weakly conductive group to prevent electrostatic charging of the surface active material. This imposes great restrictions on producing desirable antistatic chemically adsorbed films, and thus the method is poorly versatile. Further, conventional coating or spraying reduces transparency, and therefore it is difficult to use these means for transparent materials. Besides, with these means the obtainable durability is poor, and it is impossible to expect a lasting antistatic property. FR-A-2410029 discloses an antistatic composition containing an organosilane layer covered by a subsequent layer of polysiloxane. EP-A-0091741 discloses a conductive polysiloxane coating prepared from hydroxyorganosilane and sulfonic acid-substituted organo silane. An object of the present invention is to provide a laminate comprising a chargeable substrate and a transparent, highly durable and desirably conductive antistatic film which is suitable for solving the problems noted above in the prior art. Another object of the invention is to provide a method for manufacturing such a laminate. According to the present invention, the above first object is solved by providing a laminate comprising a chargeable substrate and an antistatic film formed from straight chain molecules, branched fluorocarbon or hydrocarbon groups or substituted fluorocarbon or hydrocarbon groups, said antistatic film having a conductivity of 10 -10 S/cm or above and being covalently bonded to the chargeable substrate via a Si group, said antistatic film comprising at least one conductive group selected from the group consisting of -COOH, =NH, -NO 2 , -SO 3 H and -N + R 3 X - (wherein X represents a halogen atom and R represents a lower alkyl group) on the surface thereof, said chargeable substrate being formed of a material selected from the group consisting of ceramics, glass, synthetic resins and synthetic fibers. Preferably, said chargeable substrate has a conductivity of less than 10 -10 S/cm. Preferably, the hydrogen atom in said -COOH or -SO 3 H group is substituted by an alkali, an alkali earth or an other metal. For example, an alkali metal selected from lithium, sodium, potassium, rudidium, cesium, francium, an alkali earth metal selected from beryllium, magnesium, calcium, strontium, barium, radium, and other metals selected from e.g. chromium, manganese, iron, cobalt, nickel, copper or zirconium can be used. Preferably, said antistatic film has a conductivity of 10 -5 S/cm or above. Preferably, said laminate contains at least a siloxane-based chemically adsorbed inner layer film provided between said substrate and said antistatic film. Preferably, said antistatic film is a monomolecular film. Preferabl,y said -Si- group is -SiO- or -SiN-. Preferably, said substrate is a display screen surface or a light-emitting tube. According to the present invention, the above second object is solved by providing a method of manufacturing a laminate as defined above, comprising: (A) preparing a chargeable substrate by providing the surface of the substrate with reactive groups containing active hydrogen, said substrate being formed of a material selected from the group consisting of ceramics, glass, synthetic resins and synthetic fibers; (B) subsequently contacting the substrate surface with a non-aqueous solution containing a surface active material containing (i) a chlorosilyl group at one end of the molecule to cause a reaction between the active hydrogen at said substrate surface and said -SiCl group, (ii) a straight carbon chain group, a siloxane chain group, branched fluorocarbon or hydrocarbon groups or substituted fluorocarbon or hydrocarbon groups, and (iii) at least one functional group at the other end of the molecule selected from the group consisting of a bromo, iodo, cyano, thiocyano, terminal vinyl and chlorosilyl group, and an ester bond, thereby forming a covalently bonded monomolecular film of the surface active material on the substrate surface and; (C) reacting said at least one functional group present in said covalently bonded monomolecular film to form at least one conductive group selected from the group consisting of -COOH, =NH, -NO 2 , -SO 3 H, and -N + R 3 X - (wherein X represents a halogen atom and R represents a lower alkyl group). Preferably, the hydrogen atom in said -COOH or -SO 3 H group is substituted by an alkali, an alkali earth or an other metal. Preferably, said chlorosilyl group is represented by a formula -SiCl n X 3-n , wherein n represents 1, 2 or 3, and X represents a hydrogen atom, alkyl or alkoxyl group. Preferably, the substrate surface is reacted with a surface active material containing a plurality of chlorosilyl groups to form a covalently bonded inner layer film, prior to forming the covalently bonded antistatic film containing conductive groups on said inner layer film. More preferably, said surface active material containing a plurality of chlorosilyl groups is selected from the group consisting of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 and Cl(SiCl 2 O) n SiCl 3 wherein n represents an integer. Preferably, said conductive group is provided by converting a terminal vinyl group into an imino group in a dry nitrogen atmosphere or in air by electron beam irradiation. With the antistatic chemically adsorbed film used according to the invention, conductive functional groups are secured via chemically adsorbed molecules and by siloxane bonds to the surface of a substrate selected from ceramics, glass, synthetic resins and synthetic fibers. Thus, the film provides a charge-proof effect and does not separate. In addition, this chemically adsorbed film has a thickness at the nanometer level and is thus excellently transparent, as well as capable of preventing contamination of the substrate surface due to charging thereof and also being excellently durable. Further, when a chemically adsorbed polymer film is formed, a highly dense chemically adsorbed film can be obtained. In a preferred embodiment of the invention, the hydrogen atom of the -COOH or -SO 3 H group is substituted by an alkali, an alkali earth or an other metal. For example, an alkali metal selected from lithium, sodium, potassium, rudidium, cesium, francium, an alkali earth metal selected from beryllium, magnesium, calcium, strontium, barium, radium, and other metals selected from chromium, manganese, iron, cobalt, nickel, copper or zirconium can be used. If the group is substituted by an alkali or alkali earth metal, a particularly excellent antistatic function can be obtained. Further, in the method of manufacturing an antistatic chemically adsorbed film, since weakly conductive functional groups are secured via chemically adsorbed molecules and by chemical bonds to the surface of a substrate, there is no need of preliminarily incorporating any specific functional group in the surface active material. Thus, a chemically adsorbed monomolecular film having a desirably weak conductivity can be produced comparatively freely for the purpose of preventing electrostatic charge. According to the invention, since a chemically adsorbed monomolecular film is formed on the substrate surface, excellent transparency can be obtained. In addition, since the chemically adsorbed monomolecular film is chemically bonded to the substrate surface, it is excellently durable. Further, since it has a conductivity of 10 -10 S/cm or above, it is possible to realize a high performance film having a high antistatic effect. Further, the antistatic light-emitting tube according to one embodiment of the laminate of the invention has its surface covered by a chemically adsorbed monomolecular film bonded by siloxane bonds to the substrate surface, the monomolecular film having the surface thereof containing hydrophilic groups. With the above structure, weakly conductive functional groups are secured via chemically adsorbed molecules and by siloxane bonds to the surface of the light-emitting tube. Thus, the monomolecular film provides an antistatic effect and does not separate. Besides, since the film has a thickness at the nanometer level, it will not reduce the light emission property. The film thus can prevent contamination of the fluorescent tube surface due to electrostatic charging thereof and also is excellently durable. Figures 1 (a)-(d) are schematic sectional views for explaining a process of manufacture as in reference examples 1, 9 and 11. Figures 2 (a)-(d) are schematic sectional views for explaining a process of manufacture as in examples 1, 7 and 11 of the invention. Figures 3 (a)-(c) are schematic sectional views for explaining a process of manufacture as in reference examples 2, 10 and 12. Figures 4 (a)-(d) are schematic sectional views for explaining a process of manufacture as in examples 2, 8 and 12 of the invention. Figures 5 (a)-(c) are schematic sectional views for explaining a process of manufacture as in examples 3, 9 and 13 of the invention. Figures 6 (a)-(e) are schematic sectional views for explaining a process of manufacture as in examples 4, 10 and 14 of the invention. Figure 7 is a schematic sectional view for explaining a process of manufacture as in reference example 3. Figure 8 is a schematic sectional view for explaining a process of manufacture as in reference example 3. Figure 9 is a schematic sectional view for explaining a process of manufacture as in reference example 3. Figure 10 is a schematic sectional view for explaining a process of manufacture as in reference example 4. Figure 11 is a schematic sectional view for explaining a process of manufacture as in reference example 4. Figure 12 is a schematic sectional view for explaining a process of manufacture as in reference example 4. Figure 13 is a schematic sectional view for explaining a process of manufacture as in reference example 4. Figures 14 (a)-(c) are schematic sectional views for explaining a process of manufacture as in reference example 5. Figure 15 is a schematic sectional view for explaining a process of manufacture as in reference example 5. Figures 16 (a)-(c) are schematic sectional views for explaining a process of manufacture as in reference example 6. Figure 17 is a schematic sectional view for explaining a process of manufacture as in reference example 6. Figures 18 (a)-(c) are schematic sectional views for explaining a process of manufacture as in example 5 of the invention. Figures 19 (a)-(c) are schematic sectional views for explaining a process of manufacture as in reference example 7. Figures 20 (a)-(c) are schematic sectional views for explaining a process of manufacture as in example 6 of the invention. Figure 21 is a schematic sectional view for explaining a process of manufacture as in example 6 of the invention. Figures 22 (a)-(c) are schematic sectional views for explaining a process of manufacture as in reference example 8. Figure 23 is a schematic sectional view for explaining a process of manufacture as in reference example 8. According to the invention, antistatic functional groups are secured by chemical bonds and via chemically adsorbed molecules to a substrate surface. Thus, there is no need of incorporating in advance a particular electro conductivity group in the surface active material, and it is possible to manufacture a chemically adsorbed monomolecular film which is antistatic to a comparatively freely controllable extent. To provide the antistatic property, a readily ionizable functional group is used as the charge-proof functional group. More specifically, according to the invention an antistatic film is provided which has a conductivity of 10 -10 S/cm or above which is chemically adsorbed on the substrate surface. According to the invention, the chlorosilane-based surface active material capable of use is not limited to those in the form of a straight chain. It is also possible to use a branched fluorocarbon or hydrocarbon group or those having a substituted fluorocarbon or hydrocarbon group with silicon at one end (i.e., those represented by the formula R 2 SiCl 2 , R 3 SiCl, R 11 R 12 SiCl 2 or R 11 R 12 R 13 SiCl where R, R 11 , R 12 and R 13 represents an fluorocarbon group or hydrocarbon group). To increase the adsorption density, however, the straight chain form is preferred. Further, by chemically adsorbing a material for forming an inner layer having a plurality of chlorosilyl groups, e.g., SiCl 4 , SiHCl 3 , SiH 2 Cl 2 , and Cl (SiCl 2 O) n Cl 3 (where n represents an integer in a range from 1 to 20), and then reacting it with water, surface chlorosilyl bonds are converted to hydrophilic silanol bonds, thus making the polymer composition hydrophilic. Among the materials containing a plurality of chlorosilyl groups, tetrachlorosilane (SiCl 4 ) is preferred in that it is highly reactive and low in molecular weight. It can, therefore, provide silanol bonds at a high density. In this way, it is possible to provide a highly hydrophilic composition compared to oxidation treatment of a polymer-containing substrate. According to the invention, the substrate to be used contains -OH, -COOH, -NH 2 , =NH or other hydrophilic groups at its surface. A substrate containing relatively few hydroxyl groups at the surface may be chemically pre-treated by means such as ozone oxidation, plasma treatment, corona treatment, or electron beam irradiation to obtain a substrate containing increased hydrophilic groups and which are suitable for the invention. Polyamide resins and polyurethane resins have surface imino groups (=NH) and therefore do not require any pre-treatment. Since the surface active material reacts with water, the non-aqueous organic solvent to be used according to the invention may have a water content as low as possible, does not attach to the substrate and sufficiently dissolves the surface active material. Examples are those solvents containing compounds having long chain alkyl groups, aromatic hydrocarbons, saturated ring compounds and halogen-containing hydrocarbons. The invention will be described in further detail in conjunction with examples. Reference examples 1 to 12 are not examples according to the present invention. The substrate used according to the invention is made of a material selected from ceramics, glass, synthetic resins and synthetic fibers. The surface of these substrates usually has a conductivity of 10 -15 to 10 -16 S/cm. If the substrate surface contains relatively few exposed hydroxyl groups, additional hydroxyl groups may be introduced into the surface through a plasma treatment or by forming a siloxane layer. REFERENCE EXAMPLE 1 (introduction of a hydroxyl (-OH) group) A glass plate substrate 11 (surface conductive value of about 10 -17 S/cm, Figure 1(a)) was prepared, washed with an organic solvent and then dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester (R-COOCH 2 -, R represents a functional group) bond and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of H 3 COOC(CH 2 ) 7 SiCl 3 . A dehydrochlorination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing the ester bond and chlorosilyl groups and the hydroxyl groups 12 contained numerously at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [1]. Drying temperature may be room temperature or above. A monomolecular film 13 containing ester bonds thus was formed. The film was chemically bonded (or covalently bonded) to the substrate surface. The formation of the chemically adsorbed monomolecular film was confirmed by FTIR spectroscopy and the thickness was about 2.0 nm (Figure 1(b)). The treated substrate was then reacted in an ether solution containing several per cent by weight of lithium aluminium hydride (LiAlH 4 ) at a temperature below room temperature for 20 minutes to introduce hydrophilic hydroxyl end groups so as to form a monomolecular film 14 (Figure 1(c)) represented by formula [2]. The monomolecular film 14 was very firmly chemically bonded (or covalently bonded) to the substrate and did not separate. The monomolecular film 14 was exposed to air containing water vaper (moisture), and the conductive value was about 10 -8 S/cm. The substrate was further dipped in a hexane solution containing an organic compound of an alkali metal, e.g., 5 % by weight of LiO(CH 2 ) 3 CH 3 (or NaOCH 3 ) to form a very lighly hydrophilic film 15 (Figure 1(d)) represented by formula [3]. The monomolecular film 15 was exposed to air containing water vaper (moisture), and the conductive value was about 10 -6 S/cm. EXAMPLE 1 (introduction of a carboxyl (-COOH) group) A polypropylene plate substrate 21 (surface conductive value of about 10 -16 S/cm) was prepared (Figure 2(a)), washed well and dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester bond and a chlorosilyl group in a freon 113 solution containing about 2 % by weight of H 3 COOC(CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material and the hydroxyl groups 22 numerously contained at the substrate surface. The substrate was then washed with freon 113 to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [4]. Drying temperature may be room temperature or above. A monomolecular film 23 containing ester bonds thus could be formed. The film was chemically (or covalently) bonded to the substrate surface, and its thickness was about 2.0 nm (Figure 2(b)). The treated substrate was then reacted in a solution containing 36 % by weight of hydrochloric acid (HCl) at 65 °C for 30 minutes, thus introducing hydrophilic carboxyl end groups as represented by formula [5]. A monomolecular film 24 (Figure 2(c)) was thus formed. The monomolecular film 24 was exposed to air containing water vaper (moisture), and the conductive value was about 10 -9 S/cm. This film was very firmly chemically (or covalently) bonded and did not separate. The substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., NaOH (or Ca(OH) 2 ), thus, bonds were formed as in formula [6]. A highly hydrophilic monomolecular film 25 (Figure 2(d)) thus could be formed on the substrate surface. The monomolecular film 24 was exposed to air containing water vaper (moisture), and the conductive value was about 10 -6 S/cm. This film did not separate by scratching. REFERENCE EXAMPLE 2 (introduction of an -NH 2 group) A poly(butylene terephthalate) panel plate substrate 31 (Figure 3(a)) was prepared. The substrate was dipped and held at 80 °C for about 30 minutes in a water solution containing a bichromic acid and washed with water. The substrate 31 was washed with an organic solvent, and then the substrate was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed having a cyano and a chlorosilyl group, e.g., a freon 113 solution, containing about 1 % by weight of NC (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the cyano and chlorosilyl groups and the hydroxyl groups 32 numerously contained at the substrate surfaces. The substrate was then washed with freon 113 to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [7]. Drying temperature may be room temperature or above. A monomolecular film 33 containing cyano groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface (Figure 3(b)). The treated substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction. Then, the substrate was removed from the solution and added to an ether solution containing 10 % by weight hydrochloric acid. Thereafter, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with freon 113. A highly hydrophilic monomolecular film 34 (Figure 3(c)) represented by formula [8] was formed. This film was firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 34 was exposed to air containing water vaper (moisture), and the conductive value was about 10 -9 S/cm. The formation of the chemically adsorbed monomolecular film was measured by FTIR spectrometry and the thickness was about 2.5 nm. As another example of -NH 2 group introduction, a poly(butylene terephthalate) substrate was prepared, washed with an organic solvent and dipped and held for about two hours in a non-aqueous solution containing a compound having a bromo (or iodo) and a chlorosilyl group, e.g., a freon 113 solution, containing about 1 % by weight of Br (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about betweeen -SiCl groups in the material containing a bromo (or iodo) and a chlorosilyl group and hydroxyl groups contained numerously at the substrate surfaces. The substrate was then washed with freon 113 to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [9]. Drying temperature may be room temperature or above. A monomolecular film containing bromo groups thus was formed over the entire substrate surface. The film was chemically (or covalently) bonded to the substrate surface. The treated substrate was then dipped and held in an N,N-dimethyl formamide solution containing dissolved sodium amide (8 mg/ml) for overnight reaction. A monomolecular film represented by formula [10] was obtained. The substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction, and then put into an empty container for addition thereto of an ether solution containing 10 % by weight hydrochloric acid. Subsequently, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with freon 113 and after drying a group as in the formula [11] was formed. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate by wiping. The monomolecular film 34 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. EXAMPLE 2 [introduction of a -N + R 3 X - group (wherein X represents a halogen atom and R represents a lower alkyl group)] An acryl resin plate substrate surface was oxygen plasma treated in a UV dry stripper ("UV-1" manufactured by Samco International Co.) at an oxygen flow rate of 1 liter/min. for 10 minutes to oxidize the surface. The substrate was dipped and held for five hours in a non-aqueous solution containing a material to be adsorbed having a chlorosilyl group at each end e.g., an "Aflood" solution (a fluorine-based solvent provided by Asahi Glass Co.), containing about 2 % by weight of ClSi (CH 3 ) 2 (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was brought about between chlorosilyl (-SiCl) groups in the material containing the chlorosilyl group at each end and the hydroxyl groups numerously contained at the substrate surface. The substrate was then washed with "Aflood" to remove unreacted material remaining on the surface. Thus, bonds represented by the formula [12] were produced over the entire substrate surface. A monomolecular film 43 containing chlorosilyl groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface (Figure 4(b)). The treated substrate was then dipped in an "Aflood" solution containing 10 % by weight of (CH 3 ) 2 N(CH 2 ) 2 OH causing a dehydrochlorination reaction. The substrate was then washed with "Aflood". Thus, a monomolecular film 44 represented by formula [13] was obtained (Figure 4(c)). The substrate was then further dipped in an "Aflood" solution containing CH 3 I for two hours. Thus, a very highly hydrophilic monomolecular film 45 was obtained (Figure 4(d)), which contained quarternary amino groups at the surface, as represented by formula [14]. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate by wiping. The monomolecular film 45 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. EXAMPLE 3 (introduction of an -NO 2 group) A polyester resin plate substrate 51 (Figure 5(a)) was prepared. The substrate surface was treated with oxygen plasma in a UV dry stripper ("UV-1" manufactured by Samco International Co.) at an oxygen flow rate of 1 liter/min. for 10 minutes to oxidize the surface. The substrate was dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having a bromo or iodo and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of the compound of formula [15]. A dehydrochloroination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing the bromo or iodo and chlorosilyl groups and the hydroxyl groups 52 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface. Thus, bonds represented by formula [16] were produced over the entire substrate surface. A monomolecular film 53 containing bromo groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface, and its thickness was about 2.5 nm (Figure 5(b)). The treated substrate was then reacted in an alkaline aqueous solution containing 5 % by weight of AgNO 3 at 80 °C for two hours. Thus, a hydrophilic monomolecular film 54 (Figure 5(c)) represented by formula [17] could be obtained. This momomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 54 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -10 S/cm. EXAMPLE 4 (introduction of a -SO 3 H group) An alumina-based ceramic containing silicon 61 (Figure 6(a)) was prepared at a substrate. The substrate 61 was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of choroform, containing about 2 % by weight of NCS (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing a thiocyano and a chlorosilyl group and hydroxyl groups 62 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [18]. Drying temperature may be room temperature or above. A monomolecular film 63 containing thiocyano groups thus was formed. The film was chemically (or covalently) bonded to the glass surface. Its thickness was about 2.5 nm (Figure 6(b)). The treated ceramic substrate was then dipped in ether containing lithium aluminum halide (10 mg/ml) for four hours. Thus, a hydrophilic monomolecular film 64 (Figure 6(c)) represented by formula [19] was obtained. The treated ceramic substrate thus obtained was further dipped in a mixed solution containing 10 % by weight of hydrogen peroxide and 10 % by weight of acetic acid in a volume ratio of 1 : 5 at a temperature of 40 to 50 °C for 30 minutes. Thus, a highly hydrophilic monmolecular film 65 (Figure 6(d)) as represented by formula [20] was obtained. This momomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. The ceramic substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., containing 2 % by weight of NaOH (or Ca(OH) 2 ) thus, bonds were formed as in formula [21]. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. As has been described, functional groups for the antistatic property are secured to the substrate surface via chemically adsorbed molecules and by chemical bonds. Thus, an antistatic chemically adsorbed monomolecular film having desirable conductivity can be formed compratively freely on the substrate surface. Since weakly conductive functional groups are secured to the substrate surface via chemically adsorbed molecules and by chemical bonds, it is possible to prevent electrostatic charging of the substrate surface. This monomolecular film is secured by chemical bonds and does not separate. In addition, since the film has a thickness at the nanometer level, it is highly transparent. It is thus possible to preclude contamination of the substrate due to charging thereof. REFERENCE EXAMPLE 3 An overhead projector polyester film 71 (surface conductive value was less than 10 -10 S/cm, Figure 7) was prepared. The substrate surface was oxygen plasma treated in a UV dry stripper ("UV-1" manufactured by Samco International Co.) at an oxygen flow rate of 1 liter/min. for 10 minutes to oxidize the surface. The substrate 71 was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed having an acetylenic (ethynyl) [CH≡C-] group and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane, 12 % by weight of carbon tetrachloride and 8 % by weight of choroform, containing about 2 % by weight of CH≡C (CH 2 ) 19 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the ethynyl and chlorosilyl groups and the hydroxyl groups numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [22]. Drying temperature may be room temperature or above. A monomolecular film 72 containing ethynyl groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface. Its thickness was about 2.5 nm (Figure 8). Thereafter, the chemically adsorbed monomolecular film 72 was irradiated with an electron beam of about 5 Mrads. Thus, a monomolecular film 73 was obtained, as shown in Figure 9, which contained polyacetylenic bonds produced with polymerization of adjacent ethynyl groups. The monomolecular film 72' had an electric conductivity of 10 -5 S/cm or above. The monomolecular film 72' was very firmly chemically bonded (or covalently bonded) to the substrate and did not separate. The monomolecular film containing ethynyl groups can be catalytically polymerized instead of being polymerized by electron beam irradiation. According to the catalytic polymerization process, catalysts such as tantalum chloride, molybdenum chloride can be used. The monomolecular film containing diacetylene groups can be polymerized by irradiation with an electron beam or ultraviolet rays, or by using a catalyst. The monomolecular film containing a heterocyclic group (e.g., pyrrolyl furanyl, thiophenyl groups) can be electrolytically polymerized. REFERENCE EXAMPLE 4 An overhead projector polypropylene film 81 (surface conductive value of less than 10 -10 S/cm, Figure 10) was prepared. Where a monomolecular film is to be formed at a high density compared to that of Reference Example 3, a film having been plasma treated is dipped and held for about 30 minutes in a freon 113 solution containing about 1 wt. % by weight of a material containing a plurality of chlorosilyl groups, e.g., SiCl 4 , SiHCl 3 , SiH 2 Cl 2 , and Cl (SiCl 2 O) n SiCl 3 (where n represents an integer in a range from 1 to 20), particularly SiCl 4 , which is relatively small and highly active with respect to hydroxyl groups, thus being greatly effective in making the substrate surface uniformly hydrophilic. As a result, a dehydrochlorination reaction is brought about on the surface of the film 81 due to hydrophilic -OH groups 82 provided at the surface by the plasma treatment (Figure 10). A chlorosilane monomolecular film of a material containing a plurality of chlorosilyl groups can then be formed. As an example, by using SiCl 4 as the material containing a plurality of chlorosilyl groups, a dehydrochlorination reaction was brought about on the surface of the film 81 due to a small amount of exposed hydrophilic -OH groups. Thus, molecules represented by the formulas [23] and/or [24]: were secured to the surface via -SiO- bonds. By subsequently washing the film with a non-aqueous solvent, e.g., freon-113, and then with water, SiCl 4 molecules unreacted with the substrate surface were removed, thus obtaining on the substrate surface a siloxane monomolecular film 13 as represented by formulas [25] and/or [26]: The monomolecular inner layer film 83 thus formed was perfectly bonded to the substrate surface via chemical bonds of -SiO- and did not separate (Figure 11). The above washing step with the freon 113 was omitted, and a siloxane-based polymer film was adsorbed to the substrate. The siloxane-based polymer film was in satisfactorily close contact with the substrate. The monomolecular film was completely bonded by chemical bonds of -SiO- to the substrate surface and did not separate. In addition, its surface contained numerous silanol (-SiOH) bonds corresponding to about three times the initial number of hydroxyl groups. Thereafter, the substrate was washed with an organic solvent, and was dipped and held for about one hour in a non-aqueous solution containing a material to be adsorbed having an ethynyl [CH≡C-] group and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of choroform, containing about 2 % by weight of CH≡C (CH 2 ) 19 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the ethynyl and chlorosilyl groups and the hydroxyl groups numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as above in formula [22]. Drying temperature may be room temperature or above. A monomolecular film 84 containing ethynyl groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface. Its thickness was about 2.5 nm (Figure 12). Subsequently, the chemically adsorbed monomolecular film 84 was irradiated with electron beam of about 10 Mrads in a helium atmosphere. Thus, a monomolecular film 84' was obtained, as shown in Figure 13, which contained polyacetylenic bonds 85 produced by polymerization of adjacent ethynyl groups. The monomolecular film 84' had an electric conductivity of 10 -5 S/cm or above. The monomolecular film 84' was very firmly chemically bonded (or covalently bonded) to the substrate and did not separate. The monomolecular film containing ethynyl groups can be catalytically polymerized instead of being polymerized by electron beam irradiation. According to the catalytic polymerization process, catalysts such as tantalum chloride and molybdenum chloride can be used. The monomolecular film containing diacetylene groups can be polymerized by irradiation with an electron beam or ultraviolet rays, or by using a catalyst. The monomolecular film containing a heterocyclic group (e.g., pyrrolyl, furanyl, thiophenyl groups) can be electrolytically polymerized. As in the above Reference Examples 3 and 4, a hydrocarbon chlorosilane-based surface active material with the molecules thereof containing π conjugated functional group such as acetylenic, diacetylenic, pyrrolyl, thiophenyl and furanyl groups is dissolved in a non-aqueous solvent, and the substrate surface containing hydrophilic active groups is contacted with the solution thus obtained, whereby the surface active material is chemically bonded to the substrate surface via silanol groups. By subsequently washing away excess surface active material, a conductive chemically adsorbed monomolecular film having a thickness at a nanometer level can be formed. Thus, a hydrocarbon-based monomolecular film having a thickness at the nanometer level is formed on the surface of a substrate, typically an overhead projector film without reducing the intrinsic transparency of the substrate. In addition, the film is excellently antistatic and permits a great reduction in maintenance. Further, since a chemically adsorbed monomolecular film is formed on the substrate surface, excellent transparency can be obtained. In addition, since the chemically adsorbed monomolecular film is chemically bonded to the substrate surface, it is excellently durable. Besides, since the chemically adsorbed monomolecular film has a conductivity of 10 -5 S/cm, it is possible to realize a highly antistatic high performance film. REFERENCE EXAMPLE 5 An overhead projector polyester film 81 (surface conductive value less than 10 -10 S/cm, Figure 14(a)) was prepared. Where a monomolecular film is to be formed at a high density compared to that of Reference Example 3, a film having been plasma treated is dipped and held for about 30 minutes in a freon 113 solution containing about 1 wt. % of a material containing a plurality of chlorosilyl groups, e.g., SiCl 4 , SiHCl 3 , SiH 2 Cl 2 , and Cl (SiCl 2 O) n SiCl 3 (where n represents an integer in a range from 1 to 20), particularly Cl (SiCl 2 O) n SiCl 3 , which is relatively small and highly active with respect to hydroxyl groups, thus being greatly effective in making the substrate surface uniformly hydrophilic. As a result, a dehydrochlorination reaction is brought about on the surface of the film 91 owing to hydrophilic -OH groups 92 provided at the surface by the plasma treatment. A chlorosilane monomolecular film of a material containing a plurality of chlorosilyl groups can then be formed. As an example, by using Cl (SiCl 2 O) n SiCl 3 (where n = 2) as the material containing a plurality of chlorosilyl groups, a dehydrochlorination reaction was brought about on the surface of the film 91 due to a small amount of exposed hydrophilic -OH groups. Thus, molecules represented by the formulas [27] and/or [28]: were secured to the surface via -SiO- bonds. By subsequently washing the film with a non-aqueous solvent, e.g., freon-113, and then with water, Cl (SiCl 2 O) 2 SiCl 3 molecules unreacted with the substrate surface were removed, thus obtaining on the substrate surface a siloxane monomolecular film 93 as represented by formulas [29] and/or [30]: The monomolecular inner layer film 93 thus formed was perfectly bonded to the substrate surface via chemical bonds of -SiO- and did not separate (Figure 14(b)). The monomolecular film was completely bonded by chemical bonds of -SiO- to the substrate surface and did not separate. In addition, its surface contained numerous silanol (-SiOH) bonds corresponding to about 6.5 times the initial number of hydroxyl groups. Thereafter, the substrate was washed with an organic solvent, and was dipped and held for about one hour in a non-aqueous solution containing a material to be adsorbed having a chlorosilyl group, a dimethylsilane group and a hydrocarbon chain, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of choroform, containing about 3 % by weight of HSi (CH 3 ) 2 (CH 2 ) 19 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the chlorosilyl groups and the hydroxyl groups numerously contained at the monomolecular inner layer film 93. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in formula [31]. Drying temperature may be room temperature or above. A monomolecular film 94 was formed. The film was chemically (or covalently) bonded to the substrate surface. Its thickness was about 2.5 nm (Figure 14(c)). Subsequently, the chemically adsorbed monomolecular film 94 was treated by oxidation with hydrogen peroxide. The oxidation solution was prepared by dissolving 250 mg of potassium hydrogencarbonate in tetrahydrofuran and adding 25 ml of hydrogen peroxide (30 wt.%). The substrate was dipped and held in the oxidation solution at room temperature for 10 hrs. Thus, a laminated monomolecular film (93' and 94') having a highly hydrophilic group 95 (Figure 15) as represented by formula [32] was obtained. This laminated monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The laminated monomolecular film (93' and 94') was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. REFERENCE EXAMPLE 6 An overhead projector polyester film 101 (surface conductive value less than 10 -10 S/cm, Figure 16(a)) was prepared. Where a monomolecular film is to be formed at a high density compared to that of Reference Example 3, a film having been plasma treated is dipped and held for about 30 minutes in freon 113 containing 1 % by weight of Cl(SiCl 2 O) 2 SiCl 3 as the material containing a plurality of chlorosilyl groups, a dehydrochlorination reaction was brought about on the surface of the film 102 due to a small amount of exposed hydrophilic -OH groups. Thus, molecules represented in formulas [27] and/or [28] were secured to the surface via -SiO- bonds. By subsequently washing the film with a non-aqueous solvent, e.g., freon-113, and then with water, Cl(SiCl 2 O) 2 SiCl 3 molecules unreacted with the substrate surface were removed, thus obtaining on the substrate surface a siloxane monomolecular film 103 as represented in formulas [29] and/or [30]. The monomolecular inner layer film 103 thus formed was perfectly bonded to the substrate surface via chemical bonds of -SiO- and did not separate (Figure 16(b)). The monomolecular film was completely bonded by chemical bonds of -SiO- to the substrate surface and did not separate. In addition, its surface contained numerous silanol (-SiOH) bonds corresponding to about 6.5 times the initial number of hydroxyl groups. Thereafter, the substrate was washed with an organic solvent, and was dipped and held for about one hour in a non-aqueous solution containing a material to be adsorbed having a chlorosilane group, a dimethylsilane group, and a hydrocarbon chain, e.g., a mixed solution containing 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride and 8 % by weight of choroform, containing about 3 % by weight of HSi (CH 3 ) 2 (CH 2 ) 19 SiCl 3 · A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the chlorosilyl groups and the hydroxyl groups numerously contained at the monomolecular inner layer film 103. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in formula [31]. Drying temperature may be room temperature or above. A monomolecular film 104 was formed. The film was chemically (or covalently) bonded to the substrate surface. Its thickness was about 2.5 nm (Figure 16(c)). Subsequently, the chemically adsorbed monomolecular film 104 was treated by an alkali treatment. The alkali treatment solution contained about 1 % by weight of tetramethylammonium hydroxide in an aqueous solution. The substrate was dipped and held in the alkali solution at room temperature for 10 minutes. Thus, a laminated monomolecular film (103' and 104') having a highly hydrophilic group 105 (Figure 17) was obtained. This laminated monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The laminated monomolecular film (103' and 104') was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. EXAMPLE 5 An overhead projector polyester film 111 (surface conductive value less than 10 -10 S/cm, Figure 18(a)) was prepared. The substrate thus obtained was oxygen plasma treated in a UV dry stripper ("UV-1" manufactured by Samco international Co.) at an oxygen flow rate of 1 liter/min. for 10 minutes to oxidize the surface. Thereafter, the substrate was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed having a chlorosilane group, a vinyl group (H 2 C=CH-), and a hydrocarbon chain, e.g., a mixed solution containing 80 % by weight of n-hexadecane, 12 % by weight of carbon tetrachloride and 8 % by weight of choroform, containing about 3 % by weight of H 2 C=CH- (CH 2 ) 19 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the vinyl and chlorosilyl groups and the hydroxyl groups numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as shown in formula [32]. Drying temperature may be room temperature or above. A monomolecular film 112 was formed. The film was chemically (or covalently) bonded to the substrate surface. Its thickness was about 2.5 nm (Figure 18(c)). The substrate was irradiated with an energy beam, i.e., an electron beam, in a reactive gas atmosphere (for example irradiation of about 5 Mrads. with an electron beam in a nitrogen atmosphere). As a result, a monomolecular layer having an imino group 114 was formed as shown in Figure 18(c). This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. REFERENCE EXAMPLE 7 The same experiment as in Example 5 was carried out except that an electron beam treatment was carried out in an oxygen atmosphere in lieu of a nitrogen atmosphere. As a result, a monomolecular layer 122 (Figure 19(b)) having a hydroxyl group 123 was formed as shown in Figure 19(c). This monomolecular film 122' was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. EXAMPLE 6 An overhead projector polyester film 131 (surface conductive value less than 10 -10 S/cm, Figure 20(a)) was prepared. Where a monomolecular film is to be formed at a high density compared to that of Reference Example 3, a film having been plasma treated is dipped and held for about 30 minutes in a freon 113 solution containing about 1 % by weight of Cl(SiCl 2 O) 2 SiCl 3 as the material containing a plurality of chlorosilyl groups. A dehydrochlorination reaction was brought about on the surface of the film 102 due to a small amount of exposed hydrophilic -OH groups. Thus, molecules represented by formulas [27] and/or [28] were secured to the surface via -SiO- bonds. By subsequently washing the film with a non-aqueous solvent, e.g., freon-113, and then with water, Cl (SiCl 2 O) 2 SiCl 3 molecules unreacted with the substrate surface were removed, thus obtaining on the substrate surface a siloxane monomolecular film 103 as represented by formulas [29] and/or [30]. The monomolecular inner layer film 133 thus formed was perfectly bonded to the substrate surface via chemical bonds of -SiO- and did not separate (Figure 20(b)). The monomolecular film was completely bonded by chemical bonds of -SiO- to the substrate surface and did not separate. In addition, its surface contained numerous silanol (-SiOH) bonds corresponding to about 6.5 times as large as the initial number of hydroxyl groups. Thereafter, the same experiment in Example 5 was carried out using an electron beam treatment in a nitrogen atmosphere. As a result, a monomolecular layer 134 (Figure 20(c)) having an amino group 135 and/or an imino group 136 was formed as shown in Figure 21. This laminated monomolecular film (133' and 134') was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. REFERENCE EXAMPLE 8 The same experiment as in Example 6 was carried out except that an electron beam treatment was carried out in an oxygen atmosphere in lieu of a nitrogen atmosphere. As a result, a monomolecular layer 144' (Figure 22(c)) having a hydroxyl group 145 was formed as shown in Figure 23. This laminated monomolecular film 143' and 144' was very firmly chemically (or covalently) bonded to the substrate and did not separate. The laminated monomolecular film was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. REFERENCE EXAMPLE 9 A CRT glass face plate substrate 11 (surface conductive value of about 10 -17 S/cm, Figure 1(a)) was prepared, washed with an organic solvent and then dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester (R-COOCH 2 -, R represents a functional group) bond and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of H 3 COOC(CH 2 ) 7 SiCl 3 . A dehydrochlorination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing an ester bond and a chlorosilyl group and hydroxyl groups 12 contained numerously at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [1]. Drying temperature may be room temperature or above. A monomolecular film 13 containing ester bonds thus was formed. The film was chemically bonded (or covalently bonded to the substrate surface. The formation of the chemically adsorbed monomolecular film was confirmed by FTIR spectroscopy and the thickness was about 2.0 nm (Figure 1(b)). The treated substrate was then reacted in an ether solution containing several per cent by weight of lithium aluminium hydride (LiAlH 4 ) at a temperature below room temperature for 20 minutes to introduce hydrophilic hydroxyl end groups so as to form a monomolecular film 14 (Figure 1(c)) represented by the formula [2]. The monomolecular film 14 was very firmly chemically bonded (or covalently bonded) to the substrate and did not separate. The monomolecular film 14 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. The substrate was further dipped in a hexane solution containing an organic compound of an alkali metal, e.g., 5 % by weight of LiO(CH 2 ) 3 CH 3 (or NaOCH 3 ) to form a very lighly hydrophilic film 15 (Figure 1(d)) represented above in the formula [3]. The monomolecular film 15 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -6 S/cm. The example formed the chemically adsorbed monomolecular film after assembly of the CRT face plate. The chemically adsorbed monomolecular film can also be formed before assembly of the CRT face plate. EXAMPLE 7 A liquid-crystal display glass flat plate 21 was prepared (Figure 2(a)), washed well and dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester bond and a chlorosilyl group e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of H 3 COOC (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between the chlorosilyl (-SiCl) groups in the material and the hydroxyl groups 22 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [4]. Drying temperature may be room temperature or above. A monomolecular film 23 containing ester bonds thus was formed. The film was chemically (or covalently) bonded to the substrate surface, and its thickness was about 3.0 nm (Figure 2(b)). The treated substrate was then reacted in a solution containing 36 % by weight of hydrochloric acid (HCl) at 65 °C for 30 minutes, thus introducing hydrophilic carboxyl end groups as represented by the formula [5]. A monomolecular film 24 (Figure 2(c)) was thus formed. The monomolecular film 24 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. This film was very firmly chemically (or covalently) bonded and did not separate. The substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., NaOH (or Ca(OH) 2 ), thus, bonds were formed as in the formula [6]. A highly hydrophilic monomolecular film 25 (Figure 2(d)) thus was formed on the substrate surface. The monomolecular film 24 was exposed to air containing water vapor (moisture) , and the conductive value was about 10 -6 S/cm. This film did not separate by washing. The example formed a chemically adsorbed monomolecular film after assembly of the liquid-crystal display face plate. The chemically adsorbed monomolecular film can also be formed before assembly of the liquid-crystal display face plate. REFERENCE EXAMPLE 10 A CRT glass face plate substrate 31 (Figure 3(a)) was prepared. The substrate was dipped and held at 80 °C for about 30 minutes in a water solution containing a bichromic acid and washed with water. The substrate 31 was washed with an organic solvent, and then the substrate was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed having a cyano and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of NC (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material having the cyano and chlorosilyl groups and the hydroxyl groups 32 numerously contained at the substrate surfaces. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [7]. Drying temperature may be room temperature or above. A monomolecular film 33 containing cyano groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface (Figure 3(b)). The treated substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction. Then, the substrate was taken out from the solution and added to an ether solution containing 10 % by weight hydrochloric acid. Thereafter, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with chloroform. A highly hydrophilic monomolecular film 34 (Figure 3(c)) represented by the formula [8] was formed. This film was firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 34 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. The formation of the chemically adsorbed monomolecular film was confirmed by FTIR spectroscopy and the thickness was about 2.5 nm. In another example of -NH 2 group introduction, a CRT glass face plate substrate was prepared, washed with an organic solvent and dipped and held for about two hours in a non-aqueous solution containing a compound having a bromo (or iodo) and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of Br (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about betweeen -SiCl groups in the material containing the bromo (or iodo) and chlorosilyl groups and the hydroxyl groups contained numerously at the substrate surface. The substrate was then washed with freon 113 to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [9]. Drying temperature may be room temperature or above. A monomolecular film containing bromo groups thus was formed over the entire substrate surface. The film was chemically (or covalently) bonded to the substrate surface. The treated substrate was then dipped in an N,N-dimethyl formamide solution containing dissolved sodium amide (8 mg/ml) for overnight reaction. A monomolecular film as represented by the formula [10] was obtained. The substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction, and then put into an empty container for addition thereto of an ether solution containing 10 % by weight hydrochloric acid. Subsequently, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with chloroform after drying and a group as in the formula [11] was formed. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate by wiping. The monomolecular film 34 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. EXAMPLE 8 A CRT glass face plate substrate 41 (Figure 4(a)) was prepared. The substrate was dipped and held for five hours in a non-aqueous solution containing a material to be adsorbed having a chlorosilyl group at each end e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of ClSi(CH 3 ) 2 (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was brought about between chlorosilyl (-SiCl) groups in the material containing the chlorosilyl groups at each end and the hydroxyl groups numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface. Thus, bonds as in the formula [12] were produced over the entire substrate surface. A monomolecular film 43 containing chlorosilyl groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface (Figure 4(b)). The treated substrate was then dipped in a chloroform solution containing 10 % by weight of (CH 3 ) 2 N(CH 2 ) 2 OH causing a dehydrochlorination reaction. The substrate was then washed with chloroform. Thus, a monomolecular film 44 represented by the formula [13] was obtained (Figure 4(c)). The substrate was then further dipped in a chloroform solution containing CH 3 I for two hours. Thus, a very highly hydrophilic monomolecular film 45 was obtained (Figure 4(d)), which contained quarternary amino groups at the surface, as represented by the formula [14]. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate by wiping. The monomolecular film 45 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. EXAMPLE 9 A CRT glass face plate substrate 51 (Figure 5(a)) was prepared. The substrate was dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having a bromo (or iodo) and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of the compound of formula [15]. A dehydrochloroination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing the bromo (or iodo) and chlorosilyl groups and the hydroxyl groups 52 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface. Thus, bonds as in the formula [16] were produced over the entire substrate surface. A monomolecular film 53 containing bromo groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface, and its thickness was about 2.5 nm (Figure 5(b)). The treated substrate was then reacted in an alkaline aqueous solution containing 5 % by weight of AgNO 3 at 80 °C for two hours. Thus, a hydrophilic monomolecular film 54 (Figure 5(c)) represented by the formula [17] was obtained. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 54 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -10 S/cm. EXAMPLE 10 A CRT glass face plate substrate 61 (Figure 6(a)) was prepared. The substrate 61 was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of NCS (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the thiocyano and chlorosilyl groups and the hydroxyl groups 62 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl group was changed to a -SiOH group. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [18]. Drying temperature may be room temperature or above. A monomolecular film 63 containing thiocyano groups thus was formed. The film was chemically (or covalently) bonded to the glass surface. Its thickness was about 2.5 nm (Figure 6(b)). The treated glass substrate was then dipped in ether containing lithium aluminum halide dissolved therein (10 mg/ml) for four hours. Thus, a hydrophilic monomolecular film 64 (Figure 6(c)) as represented by the formula [19] was obtained. The treated glass substrate thus obtained was further dipped in a mixed solution containing 10 % by weight of hydrogen peroxide and 10 % by weight of acetic acid in a volume ratio of 1 : 5 at a temperature of 40 to 50 °C for 30 minutes. Thus, a highly hydrophilic monmolecular film 65 (Figure 6(d)) as represented by the formula [20] was obtained. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. The glass substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., containing 2 % by weight of NaOH (or Ca(OH) 2 ). Thus, bonds as in the formula [21] were formed. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. As has been described, antistatic hydrophilic functional groups are secured to the CRT display screen surface via molecules chemically adsorbed to the surface by chemical bonds. It is thus possible to form comparatively freely a charge-proof chemically adsorbed monomolecular film having a desired conductivity on the display screen surface. That is, weakly conductive functional groups are secured via chemically adsorbed molecules and by chemical bonds to the CRT display screen surface. Thus, it is possible to prevent charging of the CRT display screen surface. In addition, since the monomolecular film is secured by chemical bonds, it does not separate. Further, since the film has a thickness at the nanometer level, it does not deteriorate the image on the display screen. It is thus possible to preclude contamination of the CRT display screen surface due to electrostatic charging thereof. REFERENCE EXAMPLE 11 A light-emitting tube, for example, a glass fluorescent lamp substrate 11 (surface conductive value was about 10 -17 S/cm, Figure 1(a)) was prepared, washed with an organic solvent and then dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester (R-COOCH 2 -, R represents a functional group) bond and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or dicyclohexane), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of H 3 COOC(CH 2 ) 7 SiCl 3 . A dehydrochlorination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing an ester bond and a chlorosilyl group and hydroxyl groups 12 contained numerously at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl groups were changed to -SiOH groups. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [1]. Drying temperature may be room temperature or above. A monomolecular film 13 containing ester bonds thus was formed. The film was chemically bonded (or covalently bonded) to the substrate surface. The formation of the chemically adsorbed monomolecular film was confirmed by FTIR spectroscopy and the thickness was about 2.0 nm (Figure 1(b)). The treated substrate was then reacted in an ether solution containing several per cent by weight of lithium aluminium hydride (LiAlH 4 ) at a temperature below room temperature for 20 minutes to introduce hydrophilic hydroxyl end groups so as to form a monomolecular film 14 (Figure 1(c)) represented by the formula [2]. The monomolecular film 14 was very firmly chemically bonded (or covalently bonded) to the substrate and did not separate. The monomolecular film 14 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. The substrate was further dipped in a hexane solution containing an organic compound of an alkali metal, e.g., 5 % by weight of LiO(CH 2 ) 3 CH 3 (or NaOCH 3 ) to form a very lighly hydrophilic film 15 (Figure 1(d)) represented by the formula [3]. The monomolecular film 15 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -6 S/cm. The example formed the chemically adsorbed monomolecular film after assembly of the fluorescent lamp. The chemically adsorbed monomolecular film can also be formed before assembly of the fluorescent lamp. EXAMPLE 11 A glass electric lamp 21 was prepared (Figure 2(a)), washed well and dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having an ester bond and a chlorosilyl group e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about % by weight of H 3 COOC(CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between the chlorosilyl (-SiCl) groups in the material and the hydroxyl groups 22 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl groups were changed to -SiOH groups. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [4]. Drying temperature may be room temperature or above. A monomolecular film 23 containing ester bonds thus was formed. The film was chemically (or covalently) bonded to the substrate surface, and its thickness was about 2.0 nm (Figure 2(b)). The treated substrate was then reacted in a solution containing 36 % by weight of hydrochloric acid (HCl) at 65 °C for 30 minutes, thus introducing hydrophilic carboxyl end groups as represented by the formula [5]. A monomolecular film 24 (Figure 2(c)) was thus formed. The monomolecular film 24 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. This film was very firmly chemically (or covalently) bonded and did not separate. The substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., NaOH (or Ca(OH) 2 ). Thus, bonds were formed as in the formula [6]. A highly hydrophilic monomolecular film 25 (Figure 2(d)) thus was formed on the substrate surface. The monomolecular film 24 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -6 S/cm. This film did not separate by washing. The example formed the chemically adsorbed monomolecular film after assembly of the electric lamp. The chemically adsorbed monomolecular film can be formed before assembly of the electric lamp. REFERENCE EXAMPLE 12 A glass fluorescent lamp 31 (Figure 3(a)) was prepared as a substrate. The substrate was dipped and held at 80 °C for about 30 minutes in a water solution containing bichromic acid and washed with water. The substrate 31 was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed having a cyano and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of NC (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about between -SiCl groups in the material containing the cyano and chlorosilyl groups and the hydroxyl groups 32 numerously contained at the substrate surfaces. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl groups were changed to -SiOH groups. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [7]. Drying temperature may be room temperature or above. A monomolecular film 33 containing cyano groups thus was formed. The film was chemically (or covalently) bonded to the substrate surface (Figure 3(b)). The treated substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction. Then, the substrate was taken out from the solution and added to an ether solution containing 10 % by weight hydrochloric acid. Thereafter, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with chloroform. A highly hydrophilic monomolecular film 34 (Figure 3(c)) represented by the formula [8] was formed. This film was firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 34 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. The formation of the chemically adsorbed monomolecular film was measured by FTIR spectrometry and the thickness was about 2.5 nm. As another example of -NH 2 group introduction, a CRT glass face plate substrate was prepared, washed with an organic solvent and dipped and held for about two hours in a non-aqueous solution containing a compound having a bromo (or iodo) and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of Br (CH 2 ) 17 SiCl 3 . A dehydrochlorination reaction was thus brought about betweeen -SiCl groups in the material containing the bromo (or iodo) and chlorosilyl groups and the hydroxyl groups contained numerously at the substrate surface. The substrate was then washed with freon 113 to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl groups were changed to -SiOH groups. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [9]. Drying temperature may be room temperature or above. A monomolecular film containing bromo groups thus was formed over the entire substrate surface. The film was chemically (or covalently) bonded to the substrate surface. The treated substrate was then dipped and held together with an N,N-dimethyl formamide solution containing dissolved sodium amide (8 mg/ml) for overnight reaction. A monomolecular film as represented by the formula [10] was obtained. The substrate was then dipped and held in ether containing dissolved lithium aluminium hydride (10 mg/ml) for overnight reaction, and then put into an empty container for addition thereto of an ether solution containing 10 % by weight hydrochloric acid. Subsequently, the substrate was dipped and held in a triethylamine solution for two hours. The substrate was then washed with chloroform after drying and a group as in the formula [11] was obtained. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate by wiping. The monomolecular film 34 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -9 S/cm. EXAMPLE 12 A glass fluorescent lamp 41 (Figure 4(a)) was prepared. The lamp was dipped and held for five hours in a non-aqueous solution containing a material to be adsorbed having a chlorosilyl group at each end e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of Cl Si(CH 3 ) 2 (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was brought about between chlorosilyl (-SiCl) groups in the material containing the chlorosilyl group at each end and the hydroxyl groups numerously contained at the lamp surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface. Thus, bonds as in the formula [12] were produced over the entire lamp surface. A monomolecular film 43 containing chlorosilyl groups thus was formed. The film was chemically (or covalently) bonded to the lamp surface (Figure 4(b)). The treated lamp was then dipped in a chloroform solution containing 10 % by weight of (CH 3 ) 2 N(CH 2 ) 2 OH causing a dehydrochlorination reaction. The lamp was then washed with chloroform. Thus, a monomolecular film 74 represented by the formula [13] was obtained (Figure 4(c)). The lamp was then further dipped in a chloroform solution containing CH 3 I for two hours. Thus, a very highly hydrophilic monomolecular film 45 was obtained (Figure 4(d)), which contained quarternary amino groups at the lamp surface, as represented by the formula [14]. This monomolecular film was very firmly chemically (or covalently) bonded to the lamp and did not separate by wiping. The monomolecular film 45 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. EXAMPLE 13 A glass fluorescent lamp 51 (Figure 5(a)) was prepared. The lamp was dipped and held for about five hours in a non-aqueous solution containing a material to be adsorbed having a bromo (or iodo) and a chlorosilyl group, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of a compound of formula [15]. A dehydrochloroination reaction was thus brought about between chlorosilyl (-SiCl) groups in the material containing the bromo (or iodo) and chlorosilyl groups and the hydroxyl groups 52 numerously contained at the lamp surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface. Thus, bonds as in the formula [16] were produced over the entire lamp surface. A monomolecular film 53 containing bromo groups thus was formed. The film was chemically (or covalently) bonded to the lamp surface, and its thickness was about 2.5 nm (Figure 5(b)). The treated lamp was then reacted in an alkaline aqueous solution containing 5 % by weight of AgNO 3 at 80 °C for two hours. Thus, a hydrophilic monomolecular film 54 (Figure 5(c)) as represented by the formula [17] was obtained. This monomolecular film was very firmly chemically (or covalently) bonded to the lamp and did not separate. The monomolecular film 54 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -10 S/cm. EXAMPLE 14 A extra high pressure mercury lamp substrate 61 (Figure 6(a)) was prepared. The substrate 61 was washed with an organic solvent, and was dipped and held for about two hours in a non-aqueous solution containing a material to be adsorbed, e.g., a mixed solution of 80 % by weight of n-hexadecane (or toluene, xylene or bicyclohexyl), 12 % by weight of carbon tetrachloride, and 8 % by weight of chloroform, containing about 2 % by weight of NCS (CH 2 ) 10 SiCl 3 . A dehydrochlorination reaction was thus brought about between the -SiCl groups in the material containing the thiocyano and chlorosilyl groups and the hydroxyl groups 62 numerously contained at the substrate surface. The substrate was then washed with chloroform to remove unreacted material remaining on the surface, followed by washing with water or exposing to air containing moisture. The residual -SiCl groups were changed to -SiOH groups. Each silanol group was then dehydrated and crosslinked to form a siloxane bond after drying as in the formula [18]. Drying temperature may be room temperature or above. A monomolecular film 63 containing thiocyano groups thus was formed. The film was chemically (or covalently) bonded to the glass surface. Its thickness was about 2.5 nm (Figure 6(b)). The treated glass substrate was then dipped in ether containing lithium aluminum halide dissolved therein (10 mg/ml) for four hours. Thus, a hydrophilic monomolecular film 64 (Figure 6(c)) represented by the formula [19] was obtained. The treated glass substrate thus obtained was further dipped in a mixed solution containing 10 % by weight of hydrogen peroxide and 10 % by weight of acetic acid in a volume ratio of 1 : 5 at a temperature of 40 to 50 °C for 30 minutes. Thus, a highly hydrophilic monomolecular film 65 (Figure 6(d)) as represented by the formula [20] was obtained. This monomolecular film was very firmly chemically (or covalently) bonded to the substrate and did not separate. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -8 S/cm. The glass substrate was then further dipped and held in an aqueous solution containing an alkali or an alkali earth or an other metal compound, e.g., containing 2 % by weight of NaOH (or Ca(OH) 2 ). Thus, bonds as in the formula [21] were formed. The monomolecular film 65 was exposed to air containing water vapor (moisture), and the conductive value was about 10 -7 S/cm. As has been shown, the invention is greatly beneficial to industry.

Claims: A laminate comprising a chargeable substrate and an antistatic film formed from straight chain molecules, branched fluorocarbon or hydrocarbon groups or substituted fluorocarbon or hydrocarbon groups, said antistatic film having a conductivity of 10 -10 S/cm or above and being covalently bonded to the chargeable substrate via a Si group, said antistatic film comprising at least one conductive group selected from the group consisting of -COOH, =NH, -NO 2 , -SO 3 H and -N + R 3 X - (wherein X represents a halogen atom and R represents a lower alkyl group) on the surface thereof, said chargeable substrate being formed of a material selected from the group consisting of ceramics, glass, synthetic resins and synthetic fibers. The laminate according to claim 1, wherein said chargeable substrate has a conductivity of less than 10 -10 S/cm. The laminate according to claim 1, wherein the hydrogen atom in said -COON or -SO 3 H group is substituted by an alkali, an alkali earth or an other metal. The laminate according to claim 1, wherein said antistatic film has a conductivity of 10 -5 S/cm or above. The laminate according to claim 1, further containing at least a siloxane-based chemically adsorbed inner layer film provided between said substrate and said antistatic film. The laminate according to claim 1, wherein said antistatic film is a monomolecular film. The laminate according to claim 1, wherein said -Si- group is -SiO- or -SiN-. The laminate according to claim 1, wherein said substrate is a display screen surface. The laminate according to claim 1, wherein said substrate is a light-emitting tube. A method of manufacturing a laminate according to claim 1, comprising: (A) preparing a chargeable substrate by providing the surface of the substrate with reactive groups containing active hydrogen, said substrate being formed of a material selected from the group consisting of ceramics, glass, synthetic resins and synthetic fibers; (B) subsequently contacting the substrate surface with a non-aqueous solution containing a surface active material containing (i) a chlorosilyl group at one end of the molecule to cause a reaction between the active hydrogen at said substrate surface and said -SiCl group, (ii) a straight carbon chain group, a siloxane chain group, branched fluorocarbon or hydrocarbon groups or substituted fluorocarbon or hydrocarbon groups, and (iii) at least one functional group at the other end of the molecule selected from the group consisting of a bromo, iodo, cyano, thiocyano, terminal vinyl and chlorosilyl group, and an ester bond, thereby forming a covalently bonded monomolecular film of the surface active material on the substrate surface and; (C) reacting said at least one functional group present in said covalently bonded monomolecular film to form at least one conductive group selected from the group consisting of -COOH, =NH, -NO 2 , -SO 3 H, and -N + R 3 X - (wherein X represents a halogen atom and R represents a lower alkyl group). The method according to claim 10, wherein the hydrogen atom in said -COOH or -SO 3 H group is substituted by an alkali, an alkali earth or an other metal. The method according to claim 10, wherein said chlorosilyl group is represented by a formula -SiCl n X 3-n , wherein n represents 1, 2 or 3, and X represents a hydrogen atom, alkyl or alkoxyl group. The method according to claim 10, wherein the substrate surface is reacted with a surface active material containing a plurality of chlorosilyl groups to form a covalently bonded inner layer film, prior to forming the covalently bonded antistatic film containing conductive groups on said inner layer film. The method according to claim 13, wherein said surface active material containing a plurality of chlorosilyl groups is selected from the group consisting of SiCl 4 , SiHCl 3 , SiH 2 Cl 2 and Cl(SiCl 2 O) n SiCl 3 wherein n represents an integer. The method according to claim 10, wherein said conductive group is provided by converting a terminal vinyl group into an imino group in a dry nitrogen atmosphere or in air by electron beam irradiation.

Inventors: MINO NORIHISA, OGAWA KAZUFUMI, SOGA MAMORU, MINO, NORIHISA, OGAWA, KAZUFUMI, SOGA, MAMORU
Applicants: MATSUSHITA ELECTRIC IND CO LTD, MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Application year: 1992
Main classification: C09K3
IPC codes: C03C17, C09D4, B05D1, C09K3, C09D5