Ferroelectric liquid crystal device and process for production thereof

Abstract: A ferroelectric liquid crystal device of a cell structure having a suppressed increase of cell thickness along a cell side is constituted by disposing a ferroelectric liquid crystal between a pair of substrates each being provided with an electrode for driving a liquid crystal and disposed opposite to each other. Each of the substrates further has on the electrode at least one layer of an alignment control film subjected to an uniaxial aligning treatment. For suppressing a liquid crystal movement, said alignment film is formed on an uneven surface having a surface unevenness providing a difference in height of at most 50 nm (500 Å) and an average pitch of unevenness of at most 100 nm (1000 Å).

Description: FIELD OF THE INVENTION AND RELATED ART The present invention relates to a ferroelectric liquid crystal device and a process for production thereof, more particularly to a ferroelectric liquid crystal device having a cell structure with improved driving characteristics and a process for production thereof. A display device of the type which controls transmission of light in combination with a polarizing device by utilizing the refractive index anisotropy of ferroelectric liquid crystal molecules has been proposed by Clark and Lagerwall (U.S. Patent No. 4,367,924, etc.). The ferroelectric liquid crystal has generally chiral smectic C phase (SmC*) of H phase (SmH*) of a non-helical structure and, under this state, shows a property of taking either one of a first optically stable state and a second optically stable state responding to an electrical field applied thereto and maintaining such a state in the absence of an electrical field, namely bistability, and also has a rapid response to the change in electrical field. Thus, it is expected to be utilized in a high speed and memory type display device and particularly to provide a large-area, high-resolution display. For an optical modulating device by use of a liquid crystal having such bistability to exhibit desirable driving characteristics, it is required that the liquid crystal disposed between a pair of substrates should be in such a molecular alignment state that conversion between the above two stable states may occur effectively irrespective of the application of an electrical field. Further, in a liquid crystal device utilizing birefringence of a liquid crystal, the transmittance under right angle cross nicols is given by the following equation: I/I 0 = sin 2 4 sin 2 (Δnd/λ)π, wherein I 0 : incident light intensity, I: transmitted light intensity, : tilt angle, Δn: refractive index anisotropy, d: thickness of the liquid crystal layer, λ: wavelength of the incident light. The tilt angle  in the above-mentioned non-helical structure is recognized as a half of an angle between the average molecular axis directions of liquid crystal molecules in a twisted alignment in a first orientation state and a second orientation state. According to the above equation, it is shown that a tilt angle  of 22.5 degrees provides a maximum transmittance and the tilt angle in a non-helical structure for realizing bistability should desirably be as close as possible to 22.5 degrees. A method for aligning a ferroelectric liquid crystal should desirably be such that molecular layers each composed of a plurality of molecules of a smectic liquid crystal are aligned uniaxially along their normals, and it is desirable to accomplish such an alignment state by a rubbing treatment which requires only a simple production step. As an alignment method for a ferroelectric liquid crystal, particularly a chiral smectic liquid crystal in a non-helical structure, one disclosed in U.S. Patent No. 4,561,726 has been known for example. However, there has been found a problem that, when such a ferroelectric liquid crystal device of a cell structure is continually driven for a long time, the thickness along a cell side is gradually increased to show a pale yellow tint. If such yellowing occurs on one side of a display cell, the display image quality is impaired. The occurrence of the yellowing is not limited to on a monochromatic image display but also causes a deviation in color balance on a color display, thus hindering a high-quality image display. Incidentally, such a display device is provided with an electrode matrix comprising scanning electrodes and data electrodes for multiplexing drive of a chiral smectic liquid crystal including sequential application of a scanning signal to the scanning electrodes and application of data signals to the data electrodes in synchronism with the scanning signal. Further, according to our experiments, it has been found that a tile angle  (an angle shown in Figure 6 as described below) in a ferroelectric liquid crystal with a non-helical structure obtained by alignment with an alignment control film of the prior art has become smaller as compared with a tilt angle H ○ (the angle H ○ is a half of the apex angle of the cone shown in Figure 5 as described below) in the ferroelectric liquid crystal having a helical structure. Particularly, the tilt angle  in a ferroelectric liquid crystal with a non-helical structure obtained by alignment with alignment control films of the prior art was found to be generally on the order of 3 - 8 degrees, and the transmittance at that time was at most about 3 to 5 %. Thus, according to Clark and Lagerwall, the tilt angle in a ferroelectric liquid crystal with a non-helical structure realizing bistability should have the same angle as the tilt angle in the ferroelectric liquid crystal having a helical structure, but in fact the tilt angle  in a non-helical structure is smaller than the tilt angle H ○ in a helical structure. More specifically, it has been found that the tilt angle  in a non-helical structure becomes smaller than the tilt angle H ○ because of a twist alignment of liquid crystal molecules in the non-helical structure. Thus, in a ferroelectric liquid crystal having a non-helical structure, liquid crystal molecules are aligned with a twist from a molecular axis adjacent to an upper substrate to a molecular axis adjacent to a lower substrate continuously at a certain twist angle. This leads to a phenomenon that the tilt angle  in the non-helical structure is smaller than the tilt angle H ○ in the helical structure. Incidentally, there has been also proposed a ferroelectric liquid crystal device wherein an AC electric field is applied to change an alignment state (Japanese Laid-Open Patent Application (JP-A) 62-161123). By the application, the tilt angle  in the non-helical structure can be increased, and the alignment of C-directors between the substrates can be changed from a twist alignment to a parallel alignment (uniform alignment) having almost identical C-directors. As a result, the transmittance in the dark state under cross nicols can be lowered to provide a higher contrast. To improve the uniformity of orientation, the durability of the liquid crystal element and the contrast between a dark state and a bright state, JP-890168958 and US-5076671 disclose a specific relation between the film thickness of an orientation control film and the average surface roughness of an underlying layer. In US-5076671, a liquid crystal device is described, wherein the average surface roughness of the base layer is from 0 to 100 Å. SUMMARY OF THE INVENTION An object of the present invention is to minimize the increase in cell thickness within a liquid crystal cell using a ferroelectric liquid crystal. An object of the present invention is to prevent or delay the occurrence of the yellowing by rubbing an insulating layer surface. A further object of the present invention is to suppress the liquid crystal movement in a ferroelectric liquid crystal device, thus preventing the yellowing due to a cell thickness increase or the occurrence of a void. Another object of the present invention is to provide a ferroelectric liquid crystal device wherein the movement of liquid crystal molecules during a long term drive of the device to provide an improved reliability of display characteristics, such as high contrast and freeness from persistence or after-image. A further object of the invention is to provide a ferroelectric liquid crystal device wherein the local change in cell thickness during drive is prevented. A further object of the invention is to provide a ferroelectric liquid crystal device with a large tilt angle  in a non-helical structure of a chiral smectic liquid crystal, which can realize a display showing a high contrast image free from persistence. A further object of the invention is to provide a ferroelectric liquid crystal device with an improved device structure by which a latitude of material selection is increased to allow a simple production process at low temperatures which is good at productivity and has a broader latitude of selection of other materials for, e.g., color filter. According to the present invention, there is provided a ferroelectric liquid crystal device, comprising: a cell including a pair of substrates (1011a, 1011b) each having thereon a transparent electrode (1012a, 1012b) for driving a liquid crystal (1015) and disposed opposite to each other, each of the substrates (1011a, 1011b) further having on the transparent electrode (1012a, 1012b) an alignment control film (1014a, 1014b) subjected to a uniaxial aligning treatment, and a ferroelectric liquid crystal (1015) sandwiched between the pair of oppositely disposed substrates (1011a, 1011b), wherein said alignment film has a thickness d of at most 10 nm (100 Å) and is formed on an uneven surface having a surface unevenness providing an average pitch of unevenness of at most 100 nm (1000 Å), wherein said surface unevenness provides in addition an average difference in height of 10 to 50 nm (100 to 500 Å). These and other objects, features and advantages of the present invention will become more apparent upon a consideration of the following description of the preferred embodiments of the present invention taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Figures 1A and 1B are explanatory views for illustrating a cell thickness increase along a cell side in relation with liquid crystal movement directions. Figure 2 is an explanatory view for illustrating an alignment state occurring in a chiral smectic liquid crystal used in the invention. Figures 3A and 3B are explanatory views for illustrating changes in director orientation according to various positions between substrates in C1 alignment and C2 alignment, respectively. Figure 4 is a front view of a conventional liquid crystal display apparatus when it is driven for a long time for displaying a fixed pattern. Figure 5 is a perspective view showing schematically an alignment of a chiral smectic liquid crystal having a helical structure. Figure 6 is a perspective view showing schematically an alignment state of a chiral smectic liquid crystal having a non-helical structure. Figures 7, 9, 11, 13, 15 and 16 are schematic sectional views of reference examples of a liquid crystal device (cell). Figure 8 is a schematic illustration of a dimple used in a reference example. Figures 10A - 10E are schematic sectional views for illustrating an insulating layer forming process according to a reference example. Figures 12A and 12B are schematic illustrations of a dimple formed. Figure 14 is a schematic plan view of a ferroelectric liquid crystal device according to another reference example. Figures 17 and 18 are microscopic pictures showing alignment states obtained by using substrates formed according to a Comparative Example and Example 1, respectively. Figure 19 is a schematic sectional view showing an alignment state of a chiral smectic liquid crystal aligned according to the present invention. Figure 20 is an illustration of C-director alignments in a uniform alignment state. Figure 21 is an illustration of C-director alignments in a splay alignment state. Figures 22A and 22B are plan views illustrating tilt angles  in a uniform alignment state and a splay alignment state, respectively. Figure 23 is a sectional view showing a charge distribution, a direction of a spontaneous polarization P S and a direction of a reverse electric field Vrev. Figure 24 is a schematic plan view illustrating changes in tilt angle  during and after application of an electric field. Figures 25 and 26 are graphs showing optical response characteristics according to a conventional device and the present invention, respectively. Figures 27A - 27C are transmission characteristic views for illustrating switching memory characteristics according to Examples 1 and 2 and a Comparative Example. DESCRIPTION OF THE PREFERRED EMBODIMENTS We have analyzed the yellowing caused by the increase in cell thickness at the cell side. According to our study, the increase in cell thickness at the cell side is recognized to be caused by a pressure increase which in turn is caused by movement of liquid crystal molecules in a particular direction due to driving. Presumably, such a force causing the liquid crystal molecule movement may be attributable to an electrodynamic effect caused by perturbation of liquid crystal molecule dipole moments in an AC-like electric field caused by continuation of drive pulses. Further, according to our experiments, the directions 22a and 22b of the liquid crystal movement are determined in relation with the rubbing direction 20 and the average liquid crystal molecular axis position 21a or 21b as shown in Figure 1A. As the moving direction of liquid crystal molecules is related with the rubbing direction, the above-mentioned phenomenon is assumed to depend on the pre-tilt state at the substrate surfaces. Referring to Figures 1A and 1B, reference numeral 21a (or 21b in a reverse orientation state) denotes an average molecular axis (director) orientation. When the liquid crystal molecules (described herein as having a negative spontaneous polarization) are oriented to provide the average molecular axis 21a and are supplied with a certain strength of AC electric field not causing a switching to the orientation state 21b, the liquid crystal molecules are liable to move in the direction of an arrow 22a in the case where the substrates are provided with rubbing axes extending in parallel and in the same direction 20. This liquid crystal movement phenomenon depends on an alignment state in the cell. More specifically, this phenomenon hardly occurs in C2 alignment but is remarkably observed in C1 alignment and uniform alignment described hereinafter. The two alignment states C1 and C2 may be explained by a difference in chevron structure of smectic layers as shown in Figure 2. Referring to Figure 2, reference numeral 31 denotes a smectic layer showing ferroelectricity, 32 denotes a C1 alignment region, and 33 denotes a C2 alignment region. A smectic liquid crystal generally has a layer structure and causes a shrinkage of layer pitch when it is transformed from SmA (smectic A) phase into SmC (smectic C) phase or SmC* (chiral smectic C) phase, to result in a structure accompanied with a bending of layers between the upper and lower substrates 14a and 14b (chevron structure) as shown in Figure 2. The bending of the layers 31 can be caused in two ways corresponding to the C1 and C2 alignment as shown. As is well known, liquid crystal molecules at the substrate surfaces are aligned to form a certain angle α (pre-tilt) as a result of rubbing in a direction A in such a manner that their heads (leading ends) in the rubbing direction are up (or away) from the substrate surfaces 11a and 11b. Because of the pre-tilt, the C1 and C2 alignment states are not equivalent to each other with respect to their elastic energy, and a transition between these states can be caused at a certain temperature or when supplied with a mechanical stress. When the layer structure shown in Figure 2 is viewed in plan as shown in the upper part of Figure 2, a boundary 34 of transition from C1 alignment (32) to C2 alignment (33) in the rubbing direction A looks like a zigzag lightning and is called a lightning defect, and a boundary 35 of transition from C2 alignment (33) to C1 alignment (32) forms a broad and moderate curve and is called a hairpin defect. When FLC is disposed between a pair of substrates 14a and 14b and placed in an alignment state satisfying a relationship of H ○ < α + δ ...(1), wherein α denotes a pretilt angle of the FLC, H ○ denotes a tilt angle (a half of cone angle), and δ denotes an angle of inclination of SmC* layer, there are four states each having a chevron structure in the C1 alignment state. These four C1 alignment states are different from the known C1 alignment state. Further, two among the four C1 alignment states form bistable states (uniform alignment). Herein, two states among the four C1 states giving an apparent tilt angle  a therebetween in the absence of an electric field satisfying a relationship of H ○ >  a > H ○ /2 ...(2) are inclusively referred to as a uniform state. In the uniform state, the directors are believed to be not twisted between the substrates in view of optical properties thereof. Figure 3A is a schematic view illustrating director positions between the substrates in the respective states in C1 alignment. More specifically, at 51 - 54 are respectively shown changes in director positions between the substrates in the form of projections of directors onto cone bottoms as viewed from each bottom. At 51 and 52 is shown a splay state, and at 53 and 54 is shown a director arrangement which is believed to represent a uniform alignment state. As is understood from Figure 3A, at 53 and 54 representing a uniform state, the molecule position (director) is different from that in the splay state either at the upper substrate or lower substrate. Figure 3B shows two states in C2 alignment between which no switching is observed at the boundaries but an internal switching is observed. The uniform state in C1 alignment provides a larger tilt angle  a and thus a higher brightness and a higher contrast than the conventionally used bistable state in C2 alignment. However, in a ferroelectric liquid crystal having a uniform alignment state based on the condition of H ○ > a > H ○ /2, the above-mentioned problem of the yellowing due to the liquid crystal movement is liable to occur. In an actual liquid crystal cell, the liquid crystal movement occurs as shown in Figure 1A. For example, when the liquid crystal molecules in the entire cell are placed in a state providing an average molecular axis direction 21a, the liquid crystal molecules in the cell are liable to move under AC application in the direction of the arrow 22, i.e., from the right to the left in the figure. As a result, the cell thickness in a region 23 is increased gradually to show a yellowish tint. If the liquid crystal molecules are placed in a state providing an average molecular axis 21b, the liquid crystal movement under AC application is caused in the reverse direction 22b. In either case, the liquid crystal movement is caused in a direction perpendicular to the rubbing direction, i.e., in the direction of extension of smectic layers. According to another experiment of ours, when a ferroelectric liquid crystal cell 60 including a ferroelectric liquid crystal of a non-helical structure in a high pretilt alignment state in a cell region defined by a sealant 69 is driven by a driver including a scanning electrode driver circuit 62 and a data electrode driver circuit 64 to continuously write in a white (61) or black (63) fixed pattern as shown in Figure 4, liquid crystal molecules are caused to move in different directions B and C in parallel with the extension direction of chiral smectic C layers and perpendicular to the rubbing direction A corresponding to the molecular positions for displaying a white display state (region 61) and a black display state (region 63), respectively. As a result, at the destination sides of the liquid crystal molecular movement, the liquid crystal layer is caused to have an increased thickness while enlarging the cell gap to form portions 65 colored in pale yellow (yellowing). On the opposite sides of the liquid crystal molecular movement, voids 67 lacking liquid crystal molecules are formed. These phenomena are caused most noticeably in the neighborhood of the seal 69 and propagated toward the inside of the cell. As described above, we have found that the liquid crystal movement in one direction is caused in a long term of drive to cause a slight change in cell thickness, thus resulting in yellowing or color deviation adversely affecting the display characteristics. More specifically, in the destination side in the liquid crystal movement direction, the cell thickness is liable to be increased to result in a yellowish tint. On the opposite side, a state with a less amount of liquid crystal results to cause a disorder in alignment. Accordingly, a liquid crystal device causing these phenomena as a result of long term drive shows a uniformity in display performance which is much worse than the initial state, thus being accompanied with a problem in reliability. The above-mentioned change in cell thickness cause further difficulties including changes in drive voltage threshold characteristics and adverse effects to durability of the liquid crystal device in a long term of continuous drive. As a result of further study, we have found that the liquid crystal movement in a planar direction is effectively suppressed by providing a fine surface unevenness pattern to an alignment control layer formed on an electrode plate, so that the above-mentioned problem of cell thickness increase on a cell side can be solved. Further, we have also found that a specific unevenness pattern (or dimples) provided to the alignment control layer surface can result in a homogeneous alignment with a remarkably suppressed liquid crystal movement. In other words, we have found that the liquid crystal behavior strongly depends on the physical states of the substrate boundary, i.e., the surfaces of alignment control films, and the liquid crystal movement is remarkably suppressed by an appropriate size of unevenness provided to the alignment control film surfaces. As stated above, in order for an optical modulation device utilizing bistability to exhibit desirable driving characteristics, it is important that the liquid crystal disposed between a pair of substrates should be in such an alignment state that conversion between two stable states may occur effectively irrespective of the application of an electric field, i.e., in a good uniaxial alignment state. Further, in order to realize a switching device having a high luminance and a high speed, it is necessary to use a ferroelectric liquid crystal having a large spontaneous polarization. However, in case where a thick alignment film and/or a high-impedance insulating film is used, a large spontaneous polarization can cause a reverse electric field, which can remarkably impair switching characteristic and even cause a failure in operation as a display device in some cases. This should require a caution. Our experiments have also revealed that too large a decrease in alignment control film thickness so as to reduce the influence of the reverse electric field can impair the homogeneity of ferroelectric liquid crystal alignment, thus causing a failure in function as a display device in some cases. The above described objects of the present invention is accomplished by forming an unevenness at the surface of an insulating layer or electrodes constituting a layer beneath an alignment film, optionally also at the surface of an alignment film. More specifically, in the present invention, a prescribed unevenness is formed at the surface of an insulating layer or electrodes, optionally also at the surface of an alignment film to prevent or decrease the liquid crystal movement, thereby preventing or decreasing the occurrence of the yellowing or occurrence of voids in a cell due to the cell thickness change to provide a ferroelectric liquid crystal device showing a high contrast and little change in display characteristic with time. Further, in the present invention, the unevenness in the insulating layer, electrodes or optionally alignment film may be produced in a process which is simple and also good at reproducibility. In the present invention, unevenness may be formed by baking a precursor layer of an alignment film after lapse of a prescribed time after forming the precursor layer, by incorporating fine particles in a layer forming an alignment film or by removing the fine particles by rubbing to form a surface unevenness in the alignment film. Alternatively, unevenness may be formed by incorporating fine particles in a layer forming an insulating film and then forming an alignment film on the insulating film or by further rubbing the alignment film to remove the fine particles from the insulating layer to form an unevenness at the surface of the insulating film or alignment film. It is also possible to form unevenness by first forming an alignment film and then blasting the alignment film surface with fine particles or mechanically stamping the alignment film to form a surface unevenness. These are preferred embodiments and may be appropriately combined as desired. The unevenness thus formed can vary to some extent depending on factors, such as liquid crystal material used, alignment film material, thicknesses of alignment film and insulating layer, cell gap and conditions for driving the liquid crystal device, but may preferably be as follows. The unevenness formed in the insulating layer or electrodes may preferably have a width of 0.1 - 20 µm, a difference in height (as formed between an adjacent pair of convexity and concavity) of 100 - 500 Å. In case where the unevenness is composed of individual convexities or/and concavities, the unevenness is formed at a pitch of at most 1000 Å, preferably 100 - 1000 Å, and the convexities or concavities may preferably be formed at a density of at least 2500/mm 2 . If the average difference in height formed in the insulating layer or electrodes exceeds 500 Å, the liquid crystal alignment is liable to be disordered because of too large an unevenness while it can depend on the thickness of the alignment film formed thereon. On the other hand, if the average difference in height is below 100 Å, the effect thereof can be insufficient by forming an alignment film thereon in some cases. If the unevenness pitch is below 100 Å, the effect can be insufficient in some cases. If the pitch exceeds 1000 Å, the unevenness distribution is sparse, and the effect thereof can be insufficient in some cases. In the case where fine particles are incorporated in the insulating layer, the fine particles may preferably have an average particle size (diameter) D satisfying D < 50 di, more preferably D < 2di, further preferably D > di, wherein di denotes the thickness of the insulating layer, which may be a desired thickness but may preferably be about 30 Å - 1 µm, more preferably 40 - 2000 Å. The degree of unevenness formed in the isulating layer is closely related with the unevenness of the alignment film formed thereon and is therefore an important factor, but the unevenness formed at the surface of the alignment film directly ffect the performance and is therefore more mportant. The unevenness formed at the surface of the alignment film may preferably have a difference in height of at most 500 Å, more preferably 20 - 500 Å, urther preferably 20 - 300 Å, and may preferably be formed at a pitch of at most 1000 Å, more preferably 100 - 1000 Å, and a density of 10000/mm 2 , more preferably 10 4 - 2x10 7 /mm 2 . The unevenness may have an arbitrary shape but may preferably comprises concavities in the form of dimples or convexities in the form of dots, semispheres or domes because these shapes can be easily formed by using fine particles. Similarly, circular concavities or convexities are also preferred. The thickness of the alignment film may be set to show an appropriate degree of function of preventing or suppressing the liquid crystal movement while showing a sufficient alignment effect and is at most 100 Å. The dimples or concavities formed may have a depth Dd satisfying da < Dd < 100da with respect to the thickness da of the alignment film. The present invention is most effective when applied to a liquid crystal device using a ferroelectric liquid crystal, particularly a ferroelectric liquid crystal showing a larger pretilt angle, more specifically of at least 5 degrees, more preferably at least 10 degrees, further preferably at least 15 degrees. The operation of a ferroelectric liquid crystal is explained with reference to schematic perspective views of liquid crystal cells as shown in Figures 5 and 6. Figure 5 is a schematic illustration of a ferroelectric liquid crystal cell (device) for explaining operation thereof. Reference numerals 521a and 521b denote substrates (glass plates) on which a transparent electrode of, e.g., In 2 O 3 , SnO 2 , ITO (indium-tin-oxide), etc., is disposed, respectively. A liquid crystal of an SmC*-phase (chiral smectic C phase) or SmH*-phase (chiral smectic H phase) in which liquid crystal molecular layers 522 are aligned perpendicular to surfaces of the glass plates is hermetically disposed therebetween. Full lines 523 show liquid crystal molecules. Each liquid crystal molecule 523 has a dipole moment (P ┴ ) 524 in a direction perpendicular to the axis thereof. The liquid crystal molecules 523 continuously form a helical structure in the direction of extension of the substrates. When a voltage higher than a certain threshold level is applied between electrodes formed on the substrates 521a and 521b, a helical structure of the liquid crystal molecule 523 is unwound or released to change the alignment direction of respective liquid crystal molecules 523 so that the dipole moment (P ┴ ) 524 are all directed in the direction of the electric field. The liquid crystal molecules 523 have an elongated shape and show refractive anisotropy between the long axis and the short axis thereof. Accordingly, it is easily understood that when, for instance, polarizers arranged in a cross nicol relationship, i.e., with their polarizing directions crossing each other, are disposed on the upper and the lower surfaces of the glass plates, the liquid crystal cell thus arranged 'functions as a liquid crystal optical modulation device of which optical characteristics vary depending upon the polarity of an applied voltage. Further, when the liquid crystal cell is made sufficiently thin (e.g., 0.1 - 3 microns), the helical structure of the liquid crystal molecules is unwound to provide a non-helical structure even in the absence of an electric field, whereby the dipole moment assumes either of the two states, i.e., Pa in an upper direction 534a or Pb in a lower direction 534b as shown in Figure 6, thus providing a bistable condition. When an electric field Ea or Eb higher than a certain threshold level and different from each other in polarity as shown in Figure 6 is applied to a cell having the above-mentioned characteristics, the dipole moment is directed either in the upper direction 534a or in the lower direction 534b depending on the vector of the electric field Ea or Eb. In correspondence with this, the liquid crystal molecules are oriented in either of a first stable state 533a and a second stable state 533b. A first advantage attained by using such a ferroelectric liquid crystal cell is that the response speed is quite fast, and a second advantage is that the orientation of the liquid crystal shows bistability. The second advantage will be further explained, e.g., with reference to Figure 6. When the electric field Ea is applied to the liquid crystal molecules, they are oriented in the first stable state 533a. This state is stably retained even if the electric field is removed. On the other hand, when the electric field Eb of which direction is opposite to that of the electric field Ea is applied thereto, the liquid crystal molecules are oriented to the second stable state 533b, whereby the directions of molecules are changed. This state is similarly stably retained even if the electric field is removed. Further, as long as the magnitude of the electric field Ea or Eb being applied is not above a certain threshold value, the liquid crystal molecules are placed in the respective orientation states. Hereinbelow, some embodiments of the ferroelectric liquid crystal device according to the present invention will be described. Figure 11 is a schematic sectional view of a reference example of the ferroelectric liquid crystal device (cell). Referring to Figure 11, the liquid crystal cell includes a pair of an upper substrate 1211a and a lower substrate 1211b disposed in parallel with each other and provided with, e.g., about 400 to 3000 Å-thick transparent electrodes 1212a and 1212b, respectively. On the transparent electrodes 1212a and 1212b are respectively formed, e.g., 100 - 3000 Å-thick insulating films 1213a and 1213b and alignment control layers (films) 1214a and 1214b. Herein, each combination of the members 1211a - 1214a and the members 1211b - 1214b may be referred to as an electrode plate, including the case where some members other than the electrodes are omitted. Between an upper electrode plate 1210a including the upper substrate 1211a and a lower electrode plate 1210b including the lower substrate 1211b, there is disposed a ferroelectric smectic liquid crystal 1215 preferably in a non-helical structure providing at least two stable states. The insulating films 1212a and 1212b may comprise an inorganic oxide film formed by wet application and baking or may comprise a sputtered film. Each insulating film can have a laminated structure including two or more layers. The alignment control layers 1214a and 1214b may have a thickness in the above-described range but may preferably have a thickness of 5 - 10 nm (50 - 100 Å). The alignment control layers may comprise generally a polymer but may suitably comprise a film providing a high pretilt angle, e.g., a film of a fluorine-containing polyimide. At least one, preferably both, of the alignment control layers 1214 and 1214b are provided with a surface unevenness including concavities (or convexities) having a diameter of 0.1 - 10 µm, preferably 0.3 - 4 µm and a difference in height of 2 - 30 nm, preferably 5 - 15 nm at a density of at least 10 4 /mm 2 , preferably 2x10 7 /mm 2 . If the diameter is below 0.1 µm, the desired effect of suppressing the liquid crystal 5 movement can be insufficient and, if the diameter exceeds 10 µm, it is liable to cause alignment defects. The shape of the unevenness (dots or dimples) may preferably be substantially circular as described above but can also have an oval or irregular shape. In case of a shape other than a circle, the above-mentioned diameter of 0.1 - 10 µm may be determined based on the shorter diameter. If the difference in height of the unevenness pattern is below 20 Å, the desired effect of suppressing the liquid crystal movement can be insufficient and, in excess of 300 Å, alignment defects can be caused thereby. The unevenness dots or dimples may preferably be present at a density of 10 4 /mm 2 , more preferably 1x10 5 - 2x10 7 /mm 2 , so as to obtain a desired effect of suppressing the liquid crystal movement. The shape thereof can also be a complex one, such that individual dots or dimples include finer dots or dimples therein. In case where the unevenness dots or dimples are present at a high density and continuously at a glance, the above-mentioned diameter and difference in height may be satisfied by individual concavities (dimples) or convexities (dots). When the unevenness pattern is formed also in the alignment control layer, this may be carried out in various manners, e.g., by the following methods 1) - 4). 1) A solution for preventing an alignment control layer including a mixture solvent comprising a primary solvent and a subsidiary solvent having a higher boiling point than the primary solvent is applied on an electrode plate and baked to form an alignment control layer having an unevenness pattern. In this instance, the primary solvent may be a good solvent showing a good solvency to the alignment control layer-forming resin (or its precursor) and having a boiling point in the range of preferably 140 - 210 °C, and may comprise at least one species selected from, e.g., N-methylpyrrolidone, n-butyl cellosolve, dimethylacetamide, dimethylformamide, and dimethylsulfoxide. On the other hand, the subsidiary solvent may preferably be a solvent having a boiling point which is higher by 20 - 40 °C than that of the primary solvent and lower by 20 - 40 °C than the baking temperature for forming the alignment control layer (e.g., 200 - 270 °C) and showing a good solvency to the alignment control layer-forming resin and a good miscibility with the primary solvent. The subsidiary solvent may preferably comprise at least one species selected from, e.g., n-butyl carbitol, n-propyl carbitol, and cresol. The subsidiary solvent may preferably be used in an amount constituting 10 - 70 wt. %, particularly 20 - 60 wt. %, of the total solvent. The alignment control layer-forming resin (or its precursor) may preferably be dissolved at a relatively low concentration, e.g., 1 - 10 wt. %, particularly 2 - 6 wt. %, so as to provide a uniformly thin film. The thus-formed alignment control layer-forming resin solution, after being applied onto an electrode plate, is aged at a temperature around room temperature (e.g., 20 - 30 °C) for at least 30 min., preferably at least 60 min., and then baked at, e.g., 200 - 270 °C to form an alignment control layer. During the baking or temperature increase for the baking, the desired unevenness pattern is formed principally due to volatilization of the subsidiary solvent. Alternatively, an unevenness pattern may be formed at the surface of the insulating film by applying an insulating film-forming resin solution containing at least two solvents having different boiling points, preferably including a primary solvent and a poor solvent having a higher boiling point than the primary solvent. Specific examples of the primary solvent may include: toluene; polyhydric alcohols or their derivatives, such as diethyl cellosolve, methyl cellosolve, diacetone alcohol, methoxymethoxyethanol, butyl cellosolve, diethyl carbitol, dibutyl cellosolve, methyl carbitol, ethyl carbitol, dibutyl carbitol, butyl carbitol, n-butyl acetate, and ethoxypropanol. Examples of the poor solvent may include n-methylpyrrolidone and γ-butyrolacetone. 2) An alignment control layer is once formed and then provided with a surface unevenness pattern by blasting with fine particles. The fine particles used therefor may preferably comprise fine uniform particles of ice prepared, e.g., by spraying pure water through a spray nozzle into fine particles and then quenching the particles with liquid nitrogen. Other examples of the fine particles may include fine particles with a uniform diameter of inorganic oxides, such as silica, alumina, cerite and zirconia. The fine particles may preferably have an average diameter in the range of 5 - 50 µm. 3) An alignment control layer is once formed and then provided with a surface unevenness pattern by stamping for transfer of a surface unevenness pattern of the stamper. In this instance, the difference in height of the unevenness pattern may be arbitrarily set by changing the stamping pressure. The unevenness may be obtained in various patterns by changing the surface unevenness pattern of the stamper. 4) An alignment control layer-forming solution containing fine particles having a diameter which is identical to or smaller than the gap formed between a pair of electrode plates is applied onto an electrode plate and then heated to form a layer, from which the fine particles are removed to provide a surface unevenness pattern during the course of forming the alignment control layer. As described above, the fine particles may preferably have a particles size which is identical to or smaller than the gap to be formed between the pair of electrode plates. The lower limit of the particle size may preferably be at least 15 times the thickness of the alignment control layer for easiness of removal thereof. The fine particles may preferably have a heat resistance of at least 200 °C, particularly at least 300 °C, so as to be durable in the baking for the formation of the alignment control layer. The removal of the fine particles may be performed during rubbing as a uniaxial aligning treatment after the formation of the alignment control layer by baking. The removal of the fine particles may also be performed by ultrasonic washing of the electrode plate within a liquid comprising at least one of organic solvent and water. The ultrasonic washing of the electrode plate can also be performed as a post-treatment after the uniaxial aligning treatment. In the above methods 1) - 3), it is generally preferred to effect the uniaxial aligning treatment after the provision of the unevenness pattern. In the methods 2) and 3), however, the unevenness pattern can also be provided after the uniaxial aligning treatment. In the present invention, the ferroelectric liquid crystal may be used in a chiral smectic phase, more specifically in chiral smectic C phase (SmC*), H phase (SmH*), I phase (SmI*), K phase (SmK*), G phase (SmG*) or F phase (SmF*). Details of ferroelectric liquid crystals are described, e.g., in Journal De Physique Letters 36 (L-69), 1975, "Ferroelectric Liquid Crystals"; Applied Physics Letters 36 (11), 1980, "Submicro Second Bistable Electrooptic Switching in Liquid Crystals"; Solid State Physics (Kotai Butsuri), 16 (141), 1981, "Liquid Crystal"; U.S. Patents Nos. 4,561,726, 4,589,996, 4,592,858, 4,596,676, 4,613,209, 4,614,609, and 4,62,165. Ferroelectric liquid crystals disclosed in these references may be used in the present invention. A particularly preferred class of ferroelectric liquid crystal may include those showing cholesteric phase on a higher temperature side, which may for example include a pyrimidine-based mixture liquid crystal showing the following phase transition series. The ferroelectric liquid crystal device shown in Figure 11 may be obtained by dispersing spacer beads 1216 of, e.g., silica or alumina on the alignment control layer of either one of the pair of electrode plates 1210a and 1210b, then combining the electrode plates so that the uniaxial alignment directions A provided to the alignment control layers 1214a and 1214b are substantially parallel and in the same direction as shown (or substantially parallel and in the opposite direction), and bonding the electrode plates with an optional particulate adhesive used in combination with the spacer beads 1216 and with an epoxy adhesive for sealing the periphery to form a blank cell having an injection port. Then, the cell is filled with a liquid crystal 1215 as described above heated to a temperature preferably giving cholesteric phase or a higher temperature phase and, after sealing the injection port, is cooled to a temperature giving the chiral smectic phase. Then, the cell is sandwiched between a pair of polarizers 1217a and 1217b disposed in a positional relationship of cross nicols. Hereinbelow, a liquid crystal device using an insulating film containing fine particles is described. Figure 16 is a schematic sectional view of such a device. Referring to Figure 16, the device includes substrates (glass plates) 2211a and 2211b coated with transparent electrodes 2212a and 2212b, respectively, of, e.g., In 2 O 3 or ITO (indium tin oxide) and then with 50 to 2000 Å-thick insulating films 2213a and 2213b (of, e.g., Ti - Si) and with 50 to 1000 Å-thick alignment films 2214a and 2214b, respectively. In this device, the insulating layers 2213a and 2213b contain fine particles of, e.g., silica and alumina. The alignment films 2214a and 2214b have been rubbed in directions A which are parallel and in the same direction. Between the substrates 2211a and 2211b is disposed a ferroelectric chiral smectic liquid crystal 2215. The spacing between the substrates 2211a and 2211b is set to a small value (e.g., 0.1 - 3 µm) sufficient to suppress the formation of a helical structure of the chiral smectic liquid crystal so that the chiral smectic liquid crystal 2215 is placed in a bistable alignment state. The sufficiently small spacing for the liquid crystal 2215 is held by spacer beads 2216 (of e.g., silica or alumina) disposed between the alignment films 2214a and 2214b. The entire cell is sandwiched between polarizers 2217a and 2217b. The alignment films used in the present invention are not specifically limited but may preferably comprise a polyimide or polyamide, e.g., as represented by the following formula (1) and (2): wherein A denotes a tetravalent organic residue group, and R 1 and R 2 denote an alkyl or fluoroalkyl group each having 1 - 10 carbon atoms with the proviso that R 1 and R 2 may be the same or different. wherein B denotes a divalent organic residue group, and R 3 and R 4 denote an alkyl or fluoroalkyl group each having 1 - 10 carbon atoms with the proviso that R 3 and R 4 may be the same or different. In order to form the insulating film, a solution at a concentration of 0.01 - 40 wt. % is formed by using a solvent, such as hexylene glycol, n-butyl cellosolve and iso-propyl alcohol, and applied onto a substrate by a method, such as spinner coating, spray coating or roller coating. In this instance, fine particles are dispersed in the solution by ball milling or ultrasonic dispersion in advance. The coating on the substrate may be pre-baked for evaporation of the solvent at 60 - 150 °C for about 10 min., irradiated with ultraviolet rays and then baked for about 1 hour to 250 - 350 °C. The insulating layer may have a thickness on the order of 30 Å - 1 µm, preferably 50 - 2000 Å. The thus formed insulating film is provided with a minute unevenness, which may function like columns formed by oblique evaporation to align liquid crystal molecules along inclined sides thereof. This may be the reason why a high contrast alignment is obtained thereby. In order to form the alignment film, a solution at a concentration of 0.01 - 40 wt. % is formed by using a solvent, such as dimethylformamide, dimethylacetamide, dimethyl sulfoxide, and N-methyl-2-pyrrolidone, and applied onto a substrate by a method, such as spinner coating, spray coating or roller coating, followed by heating at 100 - 300 °C, preferably 150 - 250 °C, to form an alignment film. The alignment film is then subjected to rubbing with, e.g., cloth. Figure 19 is a schematic sectional view showing an alignment state of liquid crystal molecules attained by using a polyamide complex alignment film in the liquid crystal device according to the present invention, and Figure 20 is a view showing alignment of corresponding C-directors. Reference numerals 2551a and 2551b in Figure 20 denote upper and lower substrates, respectively. Numeral 2550 denotes a molecular layer composed of liquid crystal molecules 2552, and liquid crystal molecules 2552 are aligned so as to change their positions along the bottom face 2554 (circular) of a cone 2553. Figure 20 more specifically shows a change in C-directors. Referring to Figure 20, at U 1 are shown C-directors 2581 (each being a projection of a molecular long axis onto an imaginary plane perpendicular to the normal to a molecular layer 2550) in one stable orientation state, and at U 2 are shown C-directors 2581 in the other stable orientation state. On the other hand, an alignment state attained by a conventional rubbing-treated polyimide film may be represented by a C-director diagram of Figure 21, which shows an alignment state wherein molecular axes are twisted in a large degree from the upper substrate 2551a to the lower substrate 2551b to provide a smaller tilt angle . Figure 22A is a schematic plan view illustrating a tilt angle  in an alignment state where C-directors 2581 assume a state shown in Figure 20 (referred to as "uniform alignment state"), and Figure 22B is a schematic plan view illustrating a 5 tilt angle  in an alignment state where C-directors 2581 assume a state shown in Figure 21 (referred to as "splay alignment state"). In these figures, reference numeral 2560 denotes a rubbing axis provided to the above-mentioned fluorine-containing polyimide film, numeral 2561a denotes an average molecular axis in the orientation state U 1 , numeral 2561b denotes an average molecular axis in the orientation state U 2 , numeral 2562a denotes an average molecular axis in the orientation state S 1 , and numeral 2562b denotes an average molecular axis in the orientation state S 2 . The average molecular axes 2561a and 2561b can be switched to each other by applying voltages of mutually opposite polarities. Similar switching is caused between the average molecular axes 2562a and 2562b. Next, the effectiveness of the uniform alignment state with respect to a delay in optical response (after-image) due to a reverse electric field Vrev is explained. If the capacitance of an insulating layer constituting a liquid crystal cell is denoted by Ci, the capacitance of a liquid crystal layer is denoted by C LC and the spontaneous polarization of the liquid crystal is denoted by P S , Vrev causing after-image is expressed by the following equation. Vrev = 2P S /(Ci+C LC ) Figure 23 is a schematic sectional view illustrating changes in charge distribution direction of P S and direction of the reverse electric field in a liquid crystal cell. At Figure 23(a), there is shown a distribution of ⊕ and ⊖ charges in a memory state before application of a pulse electric field, where the spontaneous polarization is directed from ⊕ charges to ⊖ charges. At Figure 23(b) is shown a state immediately after removal of a pulse electric field, when the direction of the spontaneous polarization P S is opposite to that shown at Figure 23(a) (thus, the liquid crystal molecules are inverted from one stable orientation state to the other orientation state) but the distribution of the ⊕ and ⊖ charges is similar to that shown at Figure 23(a), so that a reverse electric field Vrev is generated as indicated by an arrow shown at Figure 23(b). The reverse electric field Vrev disappears in a short time to provide a distribution of ⊕ and ⊖ charges as shown at Figure 23(c). Figure 24 is a plan view showing a change in optical response in a splay alignment state given by a conventional polyimide alignment film in terms of a change in tilt angle . Referring to Figure 24, at the time of application of a pulse electric field, the orientation of liquid crystal molecules is changed from an average molecular axis S(A) in a splay alignment state to be overshot to an average molecular axis U 2 in a uniform alignment state close to that providing a maximum tilt angle H ○ along a path denoted by an arrow X 1 , and immediately after the removal of the pulse electric field, the orientation is changed along a path denoted by an arrow X 2 to an average molecular axis S(B) in a splay alignment state providing a decreased tilt angle  due to the action of the reverse electric field Vrev shown at Figure 23(b). Then, as the reverse electric field Vrev attenuates as shown at Figure 23(c), the orientation is changed along a path denoted by an arrow X 3 to an average molecular axis S(C) in a splay alignment state providing a stable orientation state having a somewhat increased tilt angle . The resultant optical response in this case is shown in Figure 25. In the alignment state given by using the polyimide film obtained by using a naphthalenetetracarboxylic acid of the present invention, the average molecular axes S(A), S(B) and S(C) in the splay alignment state shown in Figure 24 are not caused but it is possible to form an alignment state with an average molecular axis giving a tilt angle  which is close to a maximum tilt angle H ○. An optical response at this time according to the present invention is shown in Figure 26. Figure 26 shows that a delay in optical response causing after-image is obviated and a high contrast in memory states is caused. The above-mentioned object of the present invention is better accomplished if the alignment film provided with a surface unevenness is further caused to have a controlled carbon atom content. Such a device can be described also based on Figure 11. Thus, referring to Figure 11, the device includes substrates (glass plates) 1211a and 1211b coated with transparent electrodes 1212a and 1212b, respectively, of, e.g., In 2 O 3 or ITO (indium tin oxide) and then with 50 to 2000 Å-thick insulating films 1213a and 1213b (of, e.g., SiO 2 , TiO 2 or Ta 2 O 5 ) and with 50 to 1000 Å-thick alignment films 1214a and 1214b, respectively of a polyimide as described above. The alignment films 1214a and 1214b have been rubbed in directions A which are parallel and in the same direction. Between the substrates 1211a and 1211b is disposed a ferroelectric chiral smectic liquid crystal 1215. The spacing between the substrates 1211a and 1211b is set to a small value (e.g., 0.1 - 3 µm) sufficient to suppress the formation of a helical structure of the chiral smectic liquid crystal so that the chiral smectic liquid crystal 1215 is placed in a bistable alignment state. The sufficiently small spacing for the liquid crystal 1215 is held by spacer beads 1216 (of e.g., silica or alumina) disposed between the alignment films 1214a and 1214b. The entire cell is sandwiched between polarizers 1217a and 1217b. The polyimide alignment films 1214a and 1214b are provided with surface minute unevenness or projections and may preferably have a carbon atom ratio which exceeds a theoretical value derived from its chemical structure (i.e., a ratio of number of carbon atoms to a number of atoms of another species, such as O (oxygen) in the recurring unit). We have discovered that an improved effect of suppressing the liquid crystal movement is accomplished thereby. This may be attributable to an enhanced effect of suppressing liquid crystal molecular movement due to an appropriate degree of interaction with liquid crystal molecules by a carbon-rich surface in addition to the physical suppressing effect attained by the surface unevenness. The above polyimide alignment film may be formed by (1) a method of using a coating liquid comprising two or more solvents having different boiling points and solvencies, (2) a method of applying a coating liquid containing fine particles dispersed therein, followed by drying, or (3) a method of chemical or physically etching a flat coating film formed by an ordinary method. The method (1) is preferred because of its simplicity. The polyimide alignment film may preferably have a surface unevenness or projections having a size of about 500 - 10000 Å and a difference in height of about 10 - 500 Å, and also a carbon atom ratio at the surface which is larger by about 0.5 (in terms of the number of increased carbon atom per recurring unit) than that derived from its chemical structure. Herein, such an increase in carbon content may be attributable to fixation of carbon atoms from a carbon-containing solvent during the baking for formation of the alignment film. The above polyimide alignment film may be formed on a substrate by dissolving a polyamic acid as a polyimide precursor in a solvent system appropriate for controlling the surface state at a concentration of 0.01 - 40 wt. %, applying the solution by spinner coating, spray coating or roller coating and heating the coating at a temperature of 100 - 350 °C, preferably 20 - 300 °C, to cause dehydro-cyclization to form a polyimide film, which is then rubbed with, e.g., cloth. It is possible to omit the insulating film 1213a and/or 1213b, or to form the polyimide alignment film on such an insulating film 1213a and 1213b. The polyimide alignment film according to the present invention described above effectively suppresses the liquid crystal molecular movement during a long-term drive of a device due to both a physical surface shape effect and a chemical interaction with the liquid crystal molecules, thus providing an improved reliability of uniform display characteristic. The carbon atom concentration of the alignment film referred to herein are based on the measurement of an angle change by XPS (X-ray photoelectron spectroscopy). The alignment film in the present invention is not restricted to a specific structure if the above condition is satisfied but may include polyimides prepared in the following manner as preferred examples. Examples of the tetracarboxylic acid component constituting the polyimide may include: pyromellitic dianhydride, biphenyltetracarboxylic dianhydride, naphthalenetetracarboxylic dianhydride, and cyclobutanetetracarboxylic dianhydride. Examples of the diamine component may include bis[4-(aminophenoxy)phenyl] compounds represented by the following formula (I): wherein R 1 and R 2 denote fluoroalkyl chain groups represented by CF 3 (CF 2 ) m (CH 2 ) L -, (L ≧ 0, m ≧ 0) with the proviso that R 1 and R 2 may be the same or different. The liquid crystal material used in the present invention may preferably be one showing a phase transition from isotropic phase through cholesteric phase and smectic A phase into chiral smectic C phase in the course of temperature decrease. Particularly, a chiral smectic liquid crystal showing a helical pitch of 0.8 micron or longer in cholesteric phase (measured at a mid temperature in the cholesteric range). Preferred examples of such a liquid crystal material may include liquid crystal materials (1) - (5) below comprising the following liquid crystals "LC-1", "80B" and "80SI*" in the indicated proportions by weight. applying a mixture solution of an organic titanium compound and an organic silicon compound by printing and baking the resultant film at 300 °C for 1 hour. On the insulating films 717a and 717b are further disposed, e.g., 150 to 4000 Å-thick alignment control films 713a and 713b, respectively. In a specific example, an alignment film-forming solution was prepared by dissolving a polyimide precursor ("LQ1802" (trade name) mfd. by Hitachi Kasei K.K.) in a mixture solvent of n-butyl carbitol and NMP (N-methylpyrrolidone) at a concentration of 3.8 wt. %. The solution contained 34 wt. % of the n-butyl carbitol. The solution was applied by printing onto the above insulating films 717a and 717b, left standing for 30 min. in an environment of 22 °C and 48 %RH and baked at 270 °C for 1 hour to form 200 Å-thick alignment control films 713a and 713b, which were then respectively rubbed in one direction. Then, on one of the substrates, silica beads 714 with an average diameter of 1.5 µm were dispersed, and the other substrate was applied so that the rubbing directions provided to the pair of substrates were parallel and the same, thereby to form a cell, which was then filled with a ferroelectric liquid crystal to form a liquid crystal device. The device was then subjected to continual application of pulses to evaluate a cell thickness change before and after the pulse Liquid crystal material (1) (LC-1) 90 /(80B) 10 (2) (LC-1) 80 /(80B) 20 (3) (LC-1) 70 (80B) 30 (4) (LC-1) 60 /(80B) 40 (5) (80SI*) 100 Hereinbelow, the present invention will be described with respect to some specific examples. Reference Example 1 (not example of the invention) Figure 7 is a schematic sectional view of a reference example of a liquid crystal cell. Referring to Figure 7, the liquid crystal cell includes a pair of an upper substrate 711a and a lower substrate 711b disposed in parallel with each other and provided with, e.g., about 400 to 2000 Å-thick transparent electrodes 712a and 712b. Between the upper substrate 711a and the lower substrate 711b is disposed a ferroelectric liquid crystal 716, preferably a ferroelectric smectic liquid crystal disposed in a non-helical structure providing at least two stable states. On the transparent electrodes 712a and 712b, e.g., 100 to 2000 Å-thick insulating films 717a and 717b, respectively, are disposed. In a specific example, the insulating films 717a and 717b were respectively formed in a thickness of 1000 Å by application. The ferroelectric liquid crystal used in the test in this example (and also in other examples unless noted specifically) was a pyrimidine-based mixture liquid crystal showing the following phase transition series. tilt angle H ○ = 14 degrees layer inclination angle δ = 11 degrees apparent tilt angle  a = 11 degrees. The alignment control film formed in the cell provided a pretilt angle α of 17 degrees. Thus, the cell formed in this example satisfied the relationships (1) and (2), and the above-mentioned C1 uniform alignment was developed stably. Then, the entire cell was brought to an orientation state providing the average molecular axis direction 21 in Figure 1A and then subjected to application for 7 hours of rectangular wave signals having a pulse width (Δt) of 25 µsec, a voltage amplitude Vpp of 40 volts and a duty ratio of 1/2. Thereafter, the cell thickness in the region 23 in Figure 1B was measured and found to show only an increase of about 10 % with respect to the initial value. For comparison, a control device was prepared in the same manner as the above Reference Example 1 except that the alignment film-forming solution was left standing for only 20 min. after the printing and subjected to measurement of a cell thickness in the region 23 in Figure 1B was measured. The increase was about 30 % with respect to the initial value. Separately, the surface of the alignment film formed in the above Reference Example was observed through a microscope, whereby dimples like one denoted by numeral 718 in Figure 8 were observed in a diameter of 0.3 - 0.4 µm and at a density of about 0.5/µm 2 . In contrast thereto, in the alignment film formed in the comparative Example, dimples of a similar shape were observed but they had a diameter of 0.1 - 0.2 µm and were present at a density of about 0.4/µm 2 . In the above Reference Example 1, it is accordingly understood that the dimples 718 were caused to have an increased diameter by 30 min. of standing, thereby reducing the liquid crystal movement and suppressing the cell thickness change. In this example, no direct surface treatment is involved in formation of the unevenness in the alignment film, it is accordingly possible to retain a stable alignment. Reference Example 2 Figure 9 is a schematic sectional view of a reference example of a liquid crystal cell. Referring to Figure 9, the liquid crystal cell includes a pair of an upper substrate 1011a and a lower substrate 1011b disposed in parallel with each other and provided with, e.g., about 400 to 3000 Å-thick transparent electrodes 1012a and 1012b. Between the upper substrate 1011a and the lower substrate 1011b is disposed a ferroelectric liquid crystal 1015, preferably a ferroelectric smectic liquid crystal disposed in a non-helical structure providing at least two stable states. On the transparent electrodes 1012a and 1012b, e.g., 100 to 3000 Å-thick insulating films 1013a and 1013b, respectively, are disposed. On the insulating films 1013a and 1013b are further disposed alignment control films 1014a and 1014b, respectively. The alignment control films may generally comprise a polymer but may preferably be one providing a high pretilt angle, e.g., one comprising a fluorine-containing polyimide. In this specific example, the liquid crystal cell was prepared by forming transparent ITO electrodes 1012a and 1012b on glass substrates 1011a and 1011b and further thereon insulating films at wet application-baking type, which were formed by disposing 2000 Å-dia. silica beads (available from Ube Nitto Kasei K.K.) in a mixture solution of an organic titanium compound and an organic silicon compound to form a coating liquid and applying the coating liquid onto the transparent electrodes by Angstromer in a thickness of 1000 Å, followed by baking at 300 °C. Incidentally, it is also possible to dispose a tantalum oxide by sputtering below the above Insulating film to provide a two-layer structure. Thereon, a 1 %-NMP solution of a polyimide precursor ("LQ-1802", mfd. by Hitachi Kasei K.K.) was applied by a spinner and baked at 270 °C for 1 hour, followed by rubbing. Two substrates treated in this way were applied to each other with a 1.5 µm gap held therebetween so that their rubbing directions were parallel and in the same direction, to form a cell. The cell was then filled with the same pyrimidine-based liquid crystal as used in the Reference Example 1 to obtain C1 alignment as described above. Then, the entire cell was brought to an orientation state providing the average molecular axis direction 21 in Figure 1A and then subjected to application for 7 hours of rectangular wave signals having a pulse width (Δt) of 25 µsec, a voltage amplitude Vpp of 40 volts and a duty ratio of 1/2. Thereafter, the cell thickness in the region 23 in Figure 1B was measured and found to show only an increase of about 10 % with respect to the initial value. Comparative Example For comparison with Reference Example 2, a liquid crystal cell was prepared in the same manner except that no fine particles were mixed in preparation of the insulating films, and subjected to the same evaluation, whereby the cell thickness increase in the region 23 of Figure 1B was about 30 % with respect to the initial thickness. Reference Example 3 A liquid crystal cell was prepared in a process as illustrated in Figure 10A through Figure 10E. As shown in Figure 10A, ITO transparent electrodes 1101 were formed on a substrate 1114 and then coated with a 600 Å-thick first insulating film 1102 of tantalum oxide (TaO x ) (Figure 10B). Then, true spherical beads 1103 of SiO 2 were dispersed on the first insulating film 1102 at a density of 2x10 6 /mm 2 (Figure 10C). Then, a 600 Å-thick second insulating film 1104 of tantalum oxide (TaO x ) was formed thereon by vapor deposition (sputtering) (Figure 10D). Then, the substrate was subjected to ultrasonic washing to completely remove the beads 1103, thus leaving dimples 1105 having a diameter of 2 - 3 µm and a depth of 600 Å (Figure 10E). Thereafter, an alignment film was formed thereon and subjected to rubbing. Two substrates 1114 treated in the above-described manner were used to assemble a cell, which was then filled with a ferroelectric liquid crystal to provide a homogenous uniform alignment. Then, the liquid crystal cell was driven for 500 hours by applying a drive voltage Vop of 20 volts as a durability test. As a result, no yellowing due to liquid crystal movement was observed even after 500 hours. Reference Example 4 Figure 13 is a schematic sectional view of another reference example of a liquid crystal cell. Referring to Figure 13, the liquid crystal cell includes a pair of an upper substrate 1711a and a lower substrate 1711b disposed in parallel with each other and provided with, e.g., about 400 to 2000 Å-thick transparent electrodes 1712a and 1712b. Between the upper substrate 1711a and the lower substrate 1711b is disposed a ferroelectric liquid crystal 1717, preferably a ferroelectric smectic liquid crystal disposed in a non-helical structure providing at least two stable states. On the transparent electrodes 1712a and 1712b, e.g., 100 to 2000 Å-thick insulating films 1718a and 1718b, respectively, are disposed. The insulating films 1718a and 1718b may preferably be formed by an insulating material of wet application-baking type. More specifically, it is possible to use a mixture solution of an organic titanium compound and an organic silicon compound. The mixture solution may be applied by printing as by Angstromer, etc., dried at about 150 °C and baked at 300 °C to form an insulating film. The insulating films 1718a and 1718b are provided with almost or rather shallow (semi-) cylindrical dimples or concavities 1701, of which the front view is schematically shown in Figure 12A, and Figure 12B is a corresponding sectional view taken along the line A-A in Figure 12A. The dimples 1701 may be provided after drying and before baking of the insulating films 1718a and 1718b, e.g., by stamping. The dimples 1701 may have a diameter of, e.g., 0.1 - 1.0 µm and may be formed at a density of 0.1 - 10/µm 2 . The depth D of the dimples may preferably be set within a range of da < D < 100da with respect to the thickness da of alignment control films 1713a and 1713b formed on the insulating films, more specifically, e.g., within the range of 1 nm - 50 nm. The dimples 1701 may have another shape of concavity or convexity other than a hollow-semicylinder as far as they can provide a similar size or degree of unevenness. In order to enhance the insulating between the pair of substrates, it is possible to insert an additional inorganic oxide insulating film layer of, e.g., 200 - 3000 Å in thickness, e.g., by sputtering, between the insulating film 1718 (and/or 1718b) and the transparent electrode 1712a (and/or 1712b). After the baking of the insulating films 1718a and 1718b, the alignment control films 1713a and 1713b may be formed thereon, e.g., as a film of an organic polymer, such as a polyimide. The alignment control films 1713a and 1713b may be rubbed in directions which are almost parallel and in the same direction. The spacing between the substrates may be held by, e.g., silica beads 1714 having an average particle size of about 1.5 µm (0.1 - 3.5 µm, in general) and a particulate adhesive 1715. The periphery of the cell is sealed by a sealant 1716. In a specific reference example, a liquid crystal cell was prepared in the above-described manner. Then, the entire cell was brought to an orientation state providing the average molecular axis direction 21 in Figure 1A and then subjected to application for 7 hours of rectangular wave signals having a pulse width (Δt) of 25 µsec, a voltage amplitude Vpp of 40 volts and a duty ratio of 1/2. Thereafter, the cell thickness (gap) in the region 23 in Figure 1B was measured and found to show only an increase of about 10 % with respect to the initial value. For comparison, a control device was prepared in the same manner as the above Reference Example 4 except that the dimples 1701 were not formed in the insulating film 1718a or 1718b, and subjected to measurement of a cell thickness in the region 23 in Figure 1B. The increase was about 30 % with respect to the initial value. Reference Example 5 Figure 14 is a front view of another reference example of a liquid crystal device (cell) and Figure 15 is a corresponding sectional view. Referring to Figures 14 and 15, the liquid crystal device has a cell structure including a pair of 1.1 mm-thick glass substrates 2011a and 2011b disposed opposite to each other and with a spacing therebetween of 0.1 - 3 µm held by spacer beads 2016 of silica, alumina, etc., and also a sealing adhesive 2017 bonding the substrates to each other. On the substrate 2011 are disposed a plurality of stripe transparent electrodes 2012a (e.g., used as a group of electrodes for applying a scanning signal among the matrix electrodes). On the substrate 2011b are disposed a plurality of stripe transparent electrodes (e.g., used as a group of electrodes for applying data signals among the matrix electrodes) so as to intersect the transparent electrodes 2012a. The transparent electrodes 2012a and 2012b disposed on the substrates 2011a and 2011b, respectively, are further coated with short circuit-preventing insulating films 2013a and 2013b, respectively, and then with alignment control films 2014a and 2014b. Between the substrates 2011a and 2011b is disposed a ferroelectric smectic liquid crystal 2015. The transparent electrodes 2012a and 2012b may comprise, e.g., In 2 O 3 or ITO and have a thickness on the order of 1500 Å. The short circuit-preventing insulating films 2013a and 2013b may have a thickness in the range of 200 - 3000 Å and may be formed as a film of an inorganic insulating substance, such as SiO 2 , TiO 2 or Ta 2 O 5 , e.g., by sputtering. Alternatively, the insulating films 2013a and 2013b may be formed as an inorganic insulating film by applying a solution of an organic metal compound containing at least one of metals, such as Si, Ti, Ta, Zr and Al, followed by baking. The inorganic insulating films for the insulating films 2013a and 2013b, after the formation, are rubbed in one direction to provide the insulating films with a surface unevenness. This is a principal characteristic of this embodiment. The rubbing materials may comprise glass wool, steel wool or a rubbing cloth comprising a pile yarn of nylon, acetate or polyester. Among these, hard rubbing materials, such as glass wool or steel wool may be preferred in order to provide a sufficient effect. The alignment control films 2014a and 2014b have a thickness of 50 - 1000 Å and may comprise a film of an organic insulating substance, such as polyvinyl alcohol, polyimide, polyamideimide, polyesterimide, polyparaxylylene, polyester, polycarbonate, polyvinyl acetal, polyvinyl chloride, polyamide, polystyrene, cellulose resin, melamine resin, urea resin or acrylic resin. The alignment control films 2014a and 2014b may be formed by rubbing the surface of a film of such an organic insulating substance in one direction to be provided with a uniaxial alignment axis in substantially the same direction as the rubbing direction. In a specific example, several pair of 1.1 mm-thick glass substrates were respectively provided with ITO stripe electrodes and covered with a 1000 Å-thick insulating film of SiO for preventing short circuit between the substrates by sputtering. Then, the respective pairs of insulating films were rubbed by a hard material of glass wool or steel wool, or a soft material of a rubbing cloth comprising pile yarn of nylon, acetate or polyester, or none (as control). The respective pairs of insulating films were then coated with a polyimide-forming solution ("LQ 1802", mfd. by Hitachi Kasei K.K.) by a spinner, followed by heating, to form polyimide alignment films having a thickness of at most 200 Å. Then, each pair of substrates were subjected to rubbing onto the polyimide films with a nylon rubbing cloth. Then, silica beads with an average diameter of about 1.5 µm were disposed on one substrate, an epoxy resin adhesive was applied onto the other substrate by screen printing, and the pair of substrates were applied to each other so that their electrodes crossed each other to form a cell (panel), which was then filled with the pyrimidine-based ferroelectric liquid crystal used in Reference Example 1 through an injection port and gradually cooled to a chiral smectic phase temperature to align the ferroelectric liquid crystal. In this way, several liquid crystal cells were prepared. For each cell, the entire cell was brought to one optically stable orientation state and then subjected to application for about 16 hours of rectangular pulses having a pulse width of 25 µsec, a voltage amplitude of 40 volts and a duty ratio of 1/2. Then, the local cell thickness was measured along the cell sides. The maximum cell thickness increases for the respective cells (Reference Examples and comparative Example) are listed in the following Table 2. From the above results, it is understood that the liquid crystal movement was suppressed by rubbing the insulating films, and a deeper thickness given by a harder rubbing material showed a larger effect of suppressing the liquid crystal movement. Example 1 A glass substrate was provided with 1500 Å-thick ITO transparent electrodes which showed an uneven surface providing an average difference in height of 150 Å and an average pitch of unevenness of 200 Å as a result of STM observation. The glass substrate was then coated with a 0.4 wt. % organic alignment control film forming solution obtained by diluting an aligning agent ("Semicofine Lp 64", mfd. by Toray K.K.) with a solvent mixture of N-methylpyrrolidone/n-butyl cellosolve (= 2/1) by spin coating at 2700 rpm for 20 sec., to form an alignment film having a thickness of 30 Å (as measured by "Elipso meter"). The alignment film was rubbed with a nylon cloth under the conditions of a pressing margin of 0.4 mm, a rotation speed of 1000 rpm and a substrate moving speed of 12 mm/sec to provide a uniaxial alignment axis. Two substrates thus treated were then applied to each other with 1.5 µm dia. spacer beads dispersed therebetween, to form a blank cell. The blank cell was filled under vacuum with FLC1 having the following properties heated into liquid by capillary action, to form a liquid crystal cell. Properties of FLC1 (at 25 °C). H ○ = 27 degrees, Ps = 90 nC/cm 2 , Phase transition series (°C) The liquid crystal cell was then gradually cooled from 80 °C to 25 °C under application of rectangular wave voltages of ±10 volts and 10 Hz, whereby a homogenous finger alignment was developed, showing an apparent tilt angle of 25.5 degrees. Then, bipolar pulse voltages of ±10 volts and ΔT = 40 µsec were applied to the cell in this state, whereby a good switching and memory characteristic was obtained as shown in Figure 27 in terms of transmittance characteristic. The homogeneous alignment state obtained in the above liquid crystal cell is shown in Figure 18 (a polarizing microscopic photograph) in comparison with Figure 17 showing a disordered alignment obtain in a liquid crystal cell prepared by using 200 Å-thick ITO electrodes with a smaller degree of unevenness as will be described hereinafter. Example 2 Into a 1.5 wt. % solution of acetyl-acetonatorin (II) in butanol, silica beads with an average diameter of 500 A were dispersed at rate of 0.1 wt. % and subjected to ultrasonic dispersion. The resultant dispersion was applied onto a glass substrate provided with 700 Å-ITO electrodes by spin coating at 3000 rpm for 30 sec., followed by baking at 30 °C for 1 hour to form a 300 Å-thick tin oxide film. The film showed a surface unevenness providing an average difference in height of 200 Å and an average unevenness pitch of 1000 Å. For reference, an aluminum was deposited to form an electrode of 1 cm 2 in vacuum on the above tin oxide film (but separately formed) to measure the resistance by an impedance analyzer ("4192A LF", available from Yokogawa Hewllet-Packard K.K.), whereby a value of 8 ohm. was obtained at 20 kHz. Then, the tin oxide film was coated with a 1.0 wt. % organic alignment control film forming solution obtained by diluting an aligning agent ("Semicofine Lp 64", mfd. by Toray K.K.) with a solvent mixture of N-methylpyrrolidone/n-butyl cellosolve (= 2/1) by spin coating at 2700 rpm for 20 sec., to form an alignment film having a thickness of 90 Å. The alignment film was rubbed with a nylon cloth under the conditions of a pressing margin of 0.4 mm, a rotation speed of 1000 rpm and a substrate moving speed of 12 mm/sec to provide a uniaxial alignment axis. Two substrates thus treated were then applied to each other with 1.5 µm dia. spacer beads dispersed therebetween, to form a blank cell. The blank cell was filled with the same FLC1 as used in Example 1 and cooled under AC application in the same manner as in Example 1, whereby a homogenous finger alignment was developed. Then, bipolar pulse voltages of ±10 volts and ΔT = 40 µsec were applied to the cell in this state, whereby a good switching and memory characteristic was obtained as shown in Figure 27B in terms of transmittance characteristic. Example 3 A glass substrate provided with 1500 Å-thick ITO transparent electrodes identical to the one used in Example 1 was coated with a 0.4 wt. % organic alignment control film forming solution obtained by diluting an aligning agent ("Sunever SE100", mfd. by Nissan Kagaku K.K.) with a solvent mixture of N-methylpyrrolidone/n-butyl cellosolve (= 1/1) by spin coating at 2700 rpm for 20 sec., to form an alignment film having a thickness of 30 Å. The alignment film was rubbed with a nylon cloth under the conditions of a pressing margin of 0.4 mm, a rotation speed of 1000 rpm and a substrate moving speed of 12 mm/sec to provide a uniaxial alignment axis. Two substrates thus treated were then applied to each other with 1.5 µm dia. spacer beads dispersed therebetween, to form a blank cell. The blank cell was filled under vacuum with FLC2 having the following properties heated into liquid by capillary action, to form a liquid crystal cell. Properties of FLC2 (at 25 °C). H ○ = 23 degrees, Ps = 28 nC/cm 2 , Phase transition series (°C) The liquid crystal cell was then gradually cooled from the liquid phase to Sc* phase (25 °C) under application of rectangular wave voltages of ±25 volts and 10 Hz, whereby a homogenous fringe alignment was developed. The cell thus obtained also showed a good switching memory characteristic. Comparative Example (i) A liquid crystal cell was prepared in the same manner as in Example 1 except that a 150 Å-thick alignment film was formed by applying the alignment film-forming solution but having a concentration of 1.0 wt. by spin coating at 2000 rpm for 20 sec. The liquid crystal cell provided a homogeneous fringe alignment but showed a poor switching memory characteristic as shown in Figure 27C, thus failing to show 100 % switching-memory characteristic. Comparative Example (ii) A liquid crystal cell was prepared in the same manner except that glass substrates provided with 200 Å-thick ITO electrodes. The liquid crystal cell showed a generally fringe alignment but the inclination thereof varied place to place, thus showing a disorder in axial alignment characteristic (Figure 17). In this state, good switching-memory characteristic could not be obtained. As described above, through improvement in physical and chemical surface states of the alignment films, the liquid crystal device according to the present invention can provide a display characteristic with good contrast and suppress the phenomenon of liquid crystal molecular movement occurring in a long term drive, thus being able to retain good and uniform display characteristics for a long term. Further, by using an alignment control layer having specific sizes of concavities (dimples) or convexities (dots) at a specific density, it is possible to provide a ferroelectric liquid crystal device which can effectively suppress liquid crystal molecular movement liable to cause a thickness change along a cell side during long term drive of a ferroelectric liquid crystal and thus show stable driving characteristics. Further, according to the present invention, it is possible to suppress liquid crystal molecular movement during drive by forming an unevenness at the surface of the insulating film, thus remarkably decreasing color change due to an increase in cell thickness along a cell side and retaining a stable alignment state within a long term drive. Moreover, according to the present invention, it is possible to reduce the liquid crystal movement within a cell and improve the display quality by incorporating fine particles within or at the surface of the insulating film. Further, according to the present invention, prescribed dimples or spherical fine particles are disposed at the surface of an insulating film, whereby the liquid crystal movement was reduced and the cell thickness increase at a cell side is reduced to prevent yellowing, while retaining a good alignment characteristic. Further, in the present invention, an unevenness is provided at the surface of an insulating film disposed below the alignment control film, so that the liquid crystal movement can be suppressed while retaining a good alignment characteristic without a substantial adverse effect to the alignment of the liquid crystal. Further, in the present invention, inorganic fine particles may be dispersed on a first insulating layer and then a second insulating layer may be formed by vacuum deposition, so that a shadowing effect of the inorganic fine particles can be effectively utilized for dimple formation. Thus, it is possible to optimize the effect of suppressing the yellowing and occurrence of void due to reduction in liquid crystal movement. Further, according to the present invention, the liquid crystal movement is suppressed and the cell thickness fluctuation is less liable, so that yellowing along a cell side can be prevented and a high-quality image display apparatus or recording apparatus can be provided. Further, according to the present invention, it is possible to realize a stable C1 uniform alignment, thus being able to realize an image display which shows a higher luminance and a higher contrast than those obtained by utilizing bistable states in a conventional C2 alignment. Further, according to the present invention, it is possible to adopt a sequence of applying an alignment film-forming solution containing fine particles having a size equal or smaller than the cell gap onto a substrate already provided with electrodes, heating the applied solution to form an alignment film and removing the particles to form an unevenness at the surface of the alignment film effective for reducing the liquid crystal movement. As a result, such an unevenness can be stably and reliably formed by controlling the size and amount of the fine particles to be incorporated. Accordingly, the liquid crystal movement can be reliably controlled. Further, according to the present invention, it is possible to provide a ferroelectric liquid crystal device showing a homogeneously alignment and a good switching and memory characteristic by forming an alignment film in a thickness of at most a prescribed value on an uneven surface having an optimized unevenness. Further, according to the present invention, the latitude of selection of alignment film material is enlarged, so that a material, such as polyamide, not requiring a higher temperature treatment can also be used and the productivity can be improved. Further, the resultant liquid crystal device provides a high quality display as represented by a high contrast between bright and dark states, particularly a very high contrast during a multiplexing drive, and freeness from ugly after-image or persistence. Incidentally, the particles to be mixed within an alignment film-forming solution or incorporated within or disposed at the surface of an insulating film need not be silica beads but can comprise particles of any materials which are resistant to the baking temperature, e.g., 300 °C. Further, the various embodiments of the present invention set forth above can be provided or combined with each other.

Claims: A ferroelectric liquid crystal device comprising: a cell including a pair of substrates (1011a, 1011b) each having thereon a transparent electrode (1012a, 1012b) for driving a liquid crystal (1015) and disposed opposite to each other, each of the substrates (1011a, 1011b) further having on the transparent electrode (1012a, 1012b) an alignment control film (1014a, 1014b) subjected to a uniaxial aligning treatment, and a ferroelectric liquid crystal (1015) sandwiched between the pair of oppositely disposed substrates (1011a, 1011b), wherein said alignment film has a thickness d of at most 10 nm (100 Å) and is formed on an uneven surface having a surface unevenness providing an average pitch of unevenness of at most 100 nm (1000 Å), characterized in that said surface unevenness provides in addition an average difference in height of 10 to 50 nm (100 to 500 Å). A device according to claim 1, wherein said uneven surface is provided by the transparent electrode and the difference in height is provided by controlling the thickness of the transparent electrode. A device according to claim 1, wherein said uneven surface is provided by a low-resistivity short circuit-preventing layer. A device according to claim 1, wherein said low-resistivity short circuit-preventing layer is provided with the surface unevenness by fine particles. A device according to any of the preceding claims, wherein said ferroelectric liquid crystal is placed in an alignment state showing an increased apparent tilt angle Θa formed by application of an AC electric field. A device according to any of the preceding claims, wherein said surface unevenness provides an average pitch of unevenness of 10 to 100 nm (100 to 1000 Å). A device according to any of the preceding claims, wherein an unevenness is introduced at the surface of said alignment control film. A device according to any of the preceding claims, wherein said ferroelectric liquid crystal is in an alignment state satisfying H < α + δ, wherein α denotes a pretilt angle, H denotes a tilt angle and δ denotes an inclination angle of chiral smectic C phase. A device according to any of the preceding claims, wherein said ferroelectric liquid crystal is in an alignment state providing at least two stable states of optical axes which form an angle 2Θa therebetween satisfying H > Θa > H/2, wherein H denotes a tilt angle of the ferroelectric liquid crystal. A device according to any of the preceding claims, wherein said alignment film comprises a polyimide represented by the following formula (1): wherein A denotes a tetravalent organic residue group, and R 1 and R 2 denote an alkyl or fluoroalkyl group each having 1 to 10 carbon atoms with the proviso that R 1 and R 2 may be the same or different. A device according to any of the preceding claims, wherein said alignment film comprises a polyamide represented by the following formula (2): wherein B denotes a divalent organic residue group, and R 3 and R 4 denote an alkyl or fluoroalkyl group each having 1 to 20 carbon atoms with the proviso that R 3 and R 4 may be the same or different.

Inventors: ASAOKA MASANOBU, HANYU YUKIO, HOTTA YOSHIO, KODERA YASUTO, KOJIMA MAKOTO, MIHARA TADASHI, NAKAMURA KATSUTOSHI, ONUMA KENJI, TAKAO HIDEAKI, TANIGUCHI OSAMU, WADA TAKATSUGU, ASAOKA, MASANOBU, HANYU, YUKIO, HOTTA, YOSHIO, KODERA, YASUTO, KOJIMA, MAKOTO, MIHARA, TADASHI, NAKAMURA, KATSUTOSHI, ONUMA, KENJI, TAKAO, HIDEAKI, TANIGUCHI, OSAMU, WADA, TAKATSUGU, Asaoka, Masanobu, c/o Canon K.K., HANYU, YUKIO, C/O CANON K.K., Hotta, Yoshio, c/o Canon K.K., Kodera, Yasuto, c/o Canon K.K., KOJIMA, MAKOTO, C/O CANON K.K., MIHARA, TADASHI, C/O CANON K.K., NAKAMURA, KATSUTOSHI, C/O CANON K.K., Onuma, Kenji, c/o Canon K.K., Takao, Hideaki, c/o Canon K.K., Taniguchi, Osamu, c/o Canon K.K., Wada, Takatsugu, c/o Canon K.K.
Applicants: CANON KK, CANON KABUSHIKI KAISHA
Application year: 1992
Main classification: G02F1
IPC codes: G02F1