Semiconducteur laser amplifier

Abstract: A semiconductor laser amplifier according to this invention has an optical waveguide layer (16) containing a p-type semiconductor layer (64) in an n-type semiconductor substrate (60, 70). On one end of the n-type semiconductor substrate (60, 70), for example, a reflective film (15) is formed as light-reflecting means. In this invention, two optical waveguide layers (16A, 16B) are arranged so as to form a V with these two layers (16A, 16B) meeting each other at one end, on which the reflective film (15) is formed, of the substrate (60, 70).

Description: The present invention relates to a semiconductor laser amplifier device as defined in the preamble portion of the attached claim 1. Such a semiconductor laser amplifier is known from GB 2 033 648 A. In this semiconductor laser amplifier device an input light is optically amplified, while being propagated in the active guide by one reflection or by repetitive total internal reflection or reflection on the end faces of the optical waveguides. The waveguides used for amplification of the input light are formed in a semiconductor substrate. EP 0 245 085 A1 describes an optical amplifier having one end surface through which it receives incoming light from an optical fiber attached thereto. The input light is amplified in the optical amplifier, reflected back to the input optical fiber via a reflection means attached at a second end surface of the optical amplifier and output through the same optical fiber. Fused with this optical fiber is a directional coupler which takes out the reflected light from the input optical fiber. JP 62170918 relates to a semiconductor laser module comprising a semiconductor laser, a rod lens and an optical fiber mounted on a holding means. The holding means is employed to achieve a coupling between one single optical fiber and the single semiconductor laser. Semiconductor laser amplifiers may be used in optical communications to amplify optical signals. Since an expensive optical repeater in optical communications may be replaced by only one semiconductor laser amplifier, semiconductor laser amplifiers are expected to significantly reduce the cost of building optical fiber relay networks in the future. Figure 1 shows a block diagram of an example of a typical semiconductor laser amplifier. As shown in Fig. 1, the light propagated along the optical fiber 10 is supplied via the image forming lens 12 to the optical waveguide layer 16 of the semiconductor laser amplifier 14. The optical waveguide layer 16 also serves as an optical active layer, in which light is amplified and leaves the amplifier 14. The amplified light from the amplifier 14 is supplied via the image forming lens 18 to the optical fiber 20, returning to the optical fiber relay network. To achieve a sufficient gain at the amplifier 14, it is necessary to make the length of the optical waveguide layer 16 or a cavity length L sufficiently long. For this reason, semiconductor laser amplifiers must have a laser chip length of approximately 400 to 1000 µm, more than twice an ordinary laser chip length of 200 to 300 µm. This leads to a poorer productivity. Further, in the optical system, it is necessary to connect lenses or fibers to both ends of a chip of the order of 400 to 1000 µm in length, which makes it difficult not only to design and fabricate amplifiers but also to perform important work, such as hermetic sealing, in terms of reliability. A semiconductor laser amplifier proposed especially to overcome a poor productivity is shown in Fig. 2. As shown in Fig. 2, the light propagated along the optical fiber 10 is supplied via the beam splitter 30 to the round-tip optical fiber 32. The light leaving the round-tip optical fiber 32 is supplied to the optical wave guide layer 16 of the semiconductor laser amplifier 14. The light travels along the optical waveguide layer 16 increasing its gain until it reaches the end of the resonator. Formed on the end is a high reflection coating film (HR film) 34, which reflects the light. The reflected light then travels backward along the optical waveguide layer 16 further increasing its gain. The light with the increased gain is supplied again to the round-tip optical fiber 32, then split at the beam splitter 30 to go to the optical fiber 20, and returns to the optical fiber relay network. By propagating light forward and then backward along the optical waveguide layer 16 of the semiconductor laser amplifier 14, it is possible to achieve nearly twice the length of the optical waveguide layer 16, that is, approximately 2L with respect to the cavity length of L, which provides a small chip with a large gain. However, because the incoming light and outgoing light are propagated along the same optical waveguide layer, the beam splitter 30 to sort them must be added in the optical fiber. Presently, it is extremely difficult to completely separate the incoming light from the outgoing light using the beam splitter 30, which creates problems. For example, leakage of optical components is liable to make signal noises. Some of the light reflected at the beam splitter 30 can return to the optical waveguide layer 16, creating a signal noise. There is also a reliability problem: it has not been verified yet that the beam splitter 30 ensures the sufficiently stable properties against changes in ambient temperatures and aging. To increase the coupling efficiency of the round-tip fiber 32, it is necessary to adjust the position with a high accuracy on the submicron. order, which makes it difficult to fabricate the optical system. Particularly, in hermetically sealing the amplifier 14 in a package to fabricate a module, the round-tip fiber is soldered or bonded with an adhesive, which often causes misalignment during work, resulting in a poor fabrication yield. As noted above, in conventional semiconductor laser amplifiers, the length of elements (cavity length) is large, leading to a poor productivity. Some semiconductor laser amplifiers are available which have an improved productivity, but the incoming light and outgoing light are still propagated along the same optical fiber, which involves many factors creating signal noises. Use of insufficiently stable parts in terms of a change in ambient temperature and aging impairs the reliability. In addition, use of a round-tip fiber necessitates submicron adjustment in fabricating the module, making the work difficult. Therefore, the object of the invention is the provision of a highly reliable semiconductor laser amplifier device with a high productivity, enabling high accuracy positioning and providing a highly mechanically stable optical system. This object is solved by a semiconductor laser amplifier device as defined in the attached claim 1. Further advantageous embodiments of the invention are defined in the attached dependent claims 2 to 7. In accordance with the invention, the semiconductor laser amplifier employs an optical waveguide layer, which is formed in a semiconductor substrate of a first conductivity type and contains a semiconductor layer of a second conductivity type, is arranged, so as to form a V in a plane, which virtually makes the length of the optical waveguide layer twice the cavity length and differs the light incoming path from the light outgoing path. With this semiconductor laser amplifier, since the length of the optical waveguide layer is virtually twice the cavity length, it is possible to shorten the cavity length without reducing the gain. Consequently, the number of laser amplifiers per wafer increases, improving the productivity of laser amplifiers. Difference of the light incoming path from the light outgoing path decreases factors of creating signal noises such as light reflection, which improves the performance of the laser amplifier. Further, constructing the laser amplifier only with parts whose stability has been fully verified improves the reliability. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: Fig. 1 is a schematic diagram of an example of a laser amplifier system; Fig. 2 is a schematic diagram of another example of a laser amplifier system; Fig. 3 is a schematic diagram for a further semiconductor laser amplifier system comprising a semiconductor laser amplifier used in the invention; Fig. 4 is a perspective view, partially in cross-section, of a semiconductor laser amplifier according to Fig. 3; Fig. 5 is a schematic diagram of a further semiconductor laser amplifier system comprising a semiconductor laser amplifier and a photodiode usable with the invention; Fig. 6 is a perspective view illustrating a semiconductor laser amplifier device according to a first embodiment of the invention; Fig. 7 is a sectional view taken along line 6-6; Fig. 8 is a sectional view illustrating a laser amplifier device according to a second embodiment of the invention; Fig. 9 is a perspective view enlarging the heat sink and its vicinity in Fig. 8; and Fig. 10 is a sectional view illustrating a semiconductor laser amplifier device of this invention incorporated in a another module. Referring to the accompanying drawings, embodiments of the present invention will be explained. Like parts are shown by corresponding reference characters throughout several views, and redundant explanations will be avoided. Figure 3 is a schematic diagram of a semiconductor laser amplifier system comprising a semiconductor laser amplifier used in the invention. As shown in Fig. 3, the light 11A propagated along an optical fiber 10 passes through a rod lens 40 and enters an optical waveguide layer 16A at its incident end 14A of a laser amplifier 14. On the incident end 14A, for example, an anti-reflective film (AR film) 13 is placed. The light 11A goes into the optical waveguide layer 16A via the anti-reflective film 13. The optical waveguide layer 16A also serves as an optical active layer, in which the incident light is amplified. A high reflection coating film (HR film) 15 is placed on the reflective end 14B of the laser amplifier 14. The light traveling along the optical waveguide layer 16A increasing its gain is reflected at the high reflection coating film 15 and advances toward the optical waveguide layer 16B. To reflect light, a cleavage surface may be used as the reflective end 14B instead of the high reflection film 15. The optical waveguide layer 16B also serves as an optical active layer that amplifies light as does the optical waveguide layer 16A. The light traveling along the optical waveguide layer 16B increasing its gain reaches the incident end 14A and leaves the laser amplifier 14 to the outside via the anti-reflective film 13. This outgoing light 11B enters the optical fiber 20 via the rod lens 40. Use of the rod lens 40 makes it possible to spatially differ the incoming light from the outgoing light, along the paths from the optical waveguide layers 16A and 16B spaced a distance d of the order of several tens of µm apart to the optical fibers 10 and 20 spaced a distance D of the order of several hundreds of µm to several mm apart. For this reason, unlike a conventional method in which fiber strands must be directly soldered or bonded to the base with an adhesive, fibers may be inserted into the ferrule and bonded there with an adhesive, and then the ferrule is secured to the base using laser welding. This method provides a highly mechanically stable optical system. Only one rod lens 40 is required. With a single rod lens, simple adjustment of the incident angle of light entering or leaving the fibers 10 and 20 makes it possible to adjust both the focal point of light advancing from the optical fiber 10 to the laser amplifier 14 and the focal point of light advancing from the amplifier 14 to the fiber 20. Figure 4 is a perspective view, partially in cross-section, of a semiconductor laser amplifier of Fig 3. The semiconductor laser amplifier is, for example, of the same type as that of the amplifier 14 in the system of Fig. 3. In this embodiment, an InGaAsP-based buried hetero semiconductor laser will be explained as an example. As shown in Fig. 4, on an n-type InP substrate 60, the optical waveguide layers 16A and 16B are formed which are composed of an active layer 62, a p-type InP cladding layer 64, and a p-type InGaAsP ohmic contact layer 66. The optical waveguide layers 16A and 16B are arranged so as to form a V when viewed from the top. On either side of the active layer 62, p-type InP cladding layer 64, and p-type InGaAsP ohmic contact layer 66, a p-type InP buried layer 68, and an n-type InP buried layer 70 are formed to block current and light. Electrodes 72 and 74 are formed on the top and bottom surfaces of the laser amplifier 14, respectively. With supply of current from these electrodes 72 and 74, the optical waveguide layers 16A and 16B provide an optical amplification gain. On the incident end 14A of the laser amplifier 14, an anti-reflective film 13 is formed, while on its reflective end, a high reflection coating film 15 is formed. The reflectivity of the anti-reflective film 13 is set to a value on the order of 10⁻³ or less at the end of the optical waveguide layers 16A and 16B, whereas the reflectivity of the high reflection coating film 15 is set to a value in the range of 0.3 to 1.0. Adjusting the product of these reflectivities to the order of 10⁻⁴ or less suppresses laser oscillation, which allows the laser amplifier 14 to function as the progressive-wave type. Figure 5 is a schematic diagram of the semiconductor laser amplifier system comprising a semiconductor laser amplifier and a photodiode usable with the invention. When the reflectivity of the high reflection coating film 15 is less than 1.0, self-adjustment of optical amplification is possible by as shown in Fig. 5, installing a light-receiving element for automatic gain adjustment, such as a photodiode 50, on the side of the reflective end 14B, and supplying the light-caused current at the photodiode 50 to an automatic power controller 52, which controls current supply to the laser amplifier 14. Semiconductor laser amplifiers of the above-mentioned structure are manufactured in almost the same way as the manufacturing method of ordinary buried hetero laser elements. For example, on the n-type InP substrate 60, the active layer 62, p-type InP cladding layer 64, and p-type InGaAsP ohmic contact layer 66 are formed sequentially. Then, these layers are selectively etched by, for example, photoetching so as to form the optical waveguide layers 16A and 16B that take the form of an inverse-mesa stripe extending as far as below the active layer 62, and when viewed from the top, shape like a V. After this, the p-type InP buried layer 68 and n-type InP buried layer 70 are grown in sequence along the sides of the mesa stripe to form the laser amplifier 14. Next, a metal coating to form electrodes 72 and 74 and others is evaporated over the top and bottom surfaces of the laser amplifier 14. After this, the wafer is cloven into individual laser amplifiers 14. After cleavage, on both ends 14A and 14B of a laser amplifier 14, the anti-reflective film 13 and high reflection coating film 15 and others are formed as required. Figure 6 is a perspective view illustrating a semiconductor laser amplifier device according to a first embodiment of the invention. Fig. 7 is a sectional view taken along line 6-6 of Fig. 6. As shown in Figs. 6 and 7, the laser amplifier 14 is secured onto a heat sink (bed) 60 with, for example, eutectic solder via a submount 59 such as diamond or silicon. The rod lens 40 is inserted in an opening 65 made in the cap-like lens holder 62 and then anchored in place with an adhesive member 64 such as solder or silver solder or glass sealer. This lens holder 62 is fastened to a stem 68 by, for example, welding 66, to hermetically seal the laser amplifier 14. As shown in Fig. 7, the heat sink 60 is connected to a low-potential power supply GND and the optical waveguide layers 16A and 16B of the chip 14 are connected to a high-potential power supply V cc , which provides an operating potential for the laser amplifier 14. With this package, optical coupling of the laser amplifier 14 and optical fibers 10 and 20 may be adjusted by fine adjustment of the positions of the optical fibers 10 and 20. That is, optical coupling adjustment of the optical fibers 10 and 20 and the laser amplifier 14 can be made independently of hermetic sealing of the laser amplifier 14, which increases the fabrication productivity of packages. Figure 8 is a sectional view illustrating a semiconductor laser amplifier device according to a second embodiment of the invention. Fig. 9 is a perspective view enlarging the heat sink 60 and its vicinity. As shown in Fig. 8, an optical fiber holder 80 is fixed onto the lens holder 62 by welding or with an adhesive member 82 such as solder. In the optical fiber holder 80, a portion facing the rod lens 40 has an opening 84 made in it. Inserted in the opening 84 is a ferrule 86, which has two openings 88A and 88B. The optical fibers 10 and 20 are inserted in the openings 88A and 88B, respectively. At the ends of the optical fibers 10 and 20 on the side of the lens 40, fiber strands 10A and 20A extend beyond covering materials 10B and 20B. The fiber strands 10A and 20A are fastened in the ferrules 86A and 86B with epoxy resin 90A and 90B. The stem 68 on which the heat sink 60 is installed is anchored to an additional stem 94 by welding or with an adhesive member 92 such as solder. Onto the stem 94, a cap 98 is secured by welding or with an adhesive member 96 such as solder. The cap 98 covers the lens holder 62 and optical fiber holder 80. In the cap 98, a portion facing the optical fiber holder 80 has two openings 99A and 99B made in it. The optical fibers 10 and 20 pass through the openings 99A and 99B, respectively, and appear outside the cap 98. In the module, as shown in Fig. 9, on the heat sink 60, another heat sink (bed) 100 is provided. The laser amplifier 14 is secured onto the heat sink 60 with, for example, eutectic solder 102 via the submount 59. On the additional heat sink 100, a P-I-N photodiode (light-receiving element) 50 is fixed with, for example, eutectic solder 104. This photodiode 50 has the same function as that of Fig. 5. The heat sinks 60 and 100 are connected to a low-potential power supply GND. The optical waveguide layers 16A and 16B of the chip 14 are connected to a high-potential power supply V cc1 , and the anode of the photodiode 50 (p-type semiconductor layer) is connected to a high-potential power supply V cc2 , which provides operating potentials for the laser amplifier 14 and photodiode 50. Further, as shown in Fig. 10, by building the module of Fig. 9 in a rectangular package such as a dual-in-line (DIL) package or a butterfly package, it is possible to facilitate circuit board mounting. As described so far, with the semiconductor laser amplifier 14, the optical waveguide layers 16A and 16B amplifying light have a structure in which light is reflected at one of the two ends of the resonator, thereby achieving a sufficient amplification gain with a short cavity length L. This makes the size of the laser amplifier 14 smaller, improving the productivity of laser amplifiers 14. Since both receiving and transmitting of light is done at the remaining end of the laser amplifier 14, there is no need to develop a special package at all, and packages similar to conventional ones for semiconductor lasers may be used. Further, optical coupling adjustment can be made at only one place, facilitating optical coupling adjustment compared with conventional equivalents as shown in Fig. 1 where lenses are placed on both sides of the resonator. The path along which light is applied to the laser amplifier 14 is different from the path along which light is emitted by the amplifier 14, which requires no beam splitter as shown in Fig. 2. This eliminates signal noise-causing factors. Furthermore, constructing the unit only with high-performance parts whose reliability has been fully verified provides a highly reliable semiconductor laser amplifier. This invention may be practiced or embodied in still other ways. For example, while in the embodiments, the semiconductor laser amplifier 14 is of the buried hetero type, it may be of the double-channel planar buried hetero type or the buried crescent type. In addition, the present invention may be applicable to the double hetero structure that has a transitional anti-melt-back layer between the active layer 17 and cladding layer 18, or to the distributed feedback laser that has a diffraction grating below the active layer 17.

Claims: A semiconductor laser amplifier device, comprising a semiconductor laser amplifier (14) including: a1) a semiconductor substrate (60, 70) of a first conductivity type (n) having a first end surface (14a) and a second end surface (14b); a2) a first optical waveguide layer (16A) containing a semiconductor layer (64) of a second conductivity type (p) and formed in said substrate (60, 70), so that one end of said first optical waveguide layer (16A) is in contact with said first end surface (14A) of said substrate (60, 70) and the other end of said first optical waveguide layer (16A) is in contact with said second end surface (14B) of said substrate (60, 70); a3) reflecting means (15) formed on said second end surface (14B) of said substrate (60, 70) for reflecting light propagated along said first optical waveguide layer (16A); and a4) a second optical waveguide layer (16B) containing a semiconductor layer (64) of said second conductivity type (p) and formed in said substrate (60, 70), so that one end of said second optical waveguide layer (16B) is in contact with said first end surface (14A) of said substrate (60, 70) and the other end of said second optical waveguide layer (16B) is in contact with said other end of said first optical waveguide layer (16A); characterized by a mounting means (59, 60, 62, 65) including: b1) a submount (59) and a heat sink (60) on which said semiconductor laser amplifier (14) is installed; b2) a stem (68) on which said heat sink (60) is installed; b3) a first holder (62) attached to said stem (68) and having a support (65) at a portion facing said first end surface (14A) of said semiconductor laser amplifier (14); b4) a single rod lens (40) held in place by said support (65) of said first holder (62) and having one end surface thereof directed towards said semiconductor laser amplifier (14); b5) a second holder (80) attached to said first holder (62) and having a support (84) at a portion facing a second end surface of said single rod lens (40); b6) a first and a second optical fiber (10; 20) held in place by said support (84) of said second holder (80); b7) said first optical waveguide layer (16A) receiving light from the outside of said substrate (60, 70) via said first optical fiber (10), through said single rod lens (40) and via said first end surface (14A) of said substrate (60, 70) and amplifying said light; and b8) said second optical waveguide layer (16B) reveiving light reflected by said reflecting means (15), amplifying said reflected light and emitting said amplified reflected light outward said substrate (60, 70) via said first end surface (14A) of said substrate (60,70), through said single rod lens (40) and via said second optical fiber (20). Semiconductor laser amplifier module according to claim 1, characterized by further comprising: an additional stem (94) on which said stem (68) is installed; a cap (98) that is installed on said additional stem (94) and that covers said first holder (62) and second holder (80); and a first and second opening (99A, 99B) made in said cap (98), in which said first and second optical fibers (10, 20) are inserted, respectively. Semiconductor laser amplifier module according to claim 1, characterized by further comprising: an additional heat sink (100) formed at a portion of said heat sink (60) facing said second end surface (14B) of said semiconductor laser amplifier (14); and a photodiode (50) installed on said additional heat sink (100). The semiconductor laser amplifier according to claim 1, characterized in that said reflecting means (15) is a reflective film (15) formed on said second end surface (14B). The semiconductor laser amplifier according to claim 1, characterized in that said reflecting means (15) is a cleavage surface serving as said second end surface (14B) formed by cleaving said substrate (60, 70). The semiconductor laser amplifier according to claim 1, characterized in that the reflectivity R1 of said first end surface (14A) is: R1 ≦ 10⁻³ the reflectivity R2 of said reflecting means (15) formed on said second end surface (14B) is: 0.3 ≦ R2 ≦ 1.0 and the product of said reflectivities R1 and R2 is: R1 x R2 ≦ 10⁻⁴. The semiconductor laser amplifier according to claim 1, characterized by further comprising an anti-reflective film (13) formed on said first end surface (14A).

Inventors: GEN-EI KOICHI C O INTELLECTUAL, GEN-EI, KOICHI, C/O INTELLECTUAL PROPERTY DIV.
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1991
Main classification: H01S3
IPC codes: H01S5, G02B6, G02F1