Optical beam scanning system

Abstract: A first image-forming system includes first (26) and second (27) lens systems which are disposed in this order from a light source (1) to a deflector (3). The first lens system has a positive power along a second direction so as to converge a diverging light beam from the light source onto the deflector with respect to the second direction. With respect to a first direction being perpendicular to the second direction, the first lens system has no or a negative power while the second lens system has a positive power so that the focal point of the first image-forming system is located at the light source. Thus, a collimated light beam (L2) in the first direction from the first image-forming system is directed to the deflector.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to an optical beam scanning system in which a light beam from a light source is reshaped through a first image-forming system and is then reflected by a rotary polygon mirror, to thereby scan a surface-to-be-scanned through a second image-forming system. Description of the Prior Art One known optical scanner is described in DE-A- 32 38 665. Fig. 1 is a perspective view of a conventional optical beam scanning system. In the conventional optical beam scanning system, as shown in Fig. 1, a light beam L₁ from a light source 1 impinges, via a first image-forming system 2, on a rotary polygon mirror 3 which rotates about an axis of rotation 3b in a direction A as indicated by an arrow. The first image-forming system 2 includes a collimating lens 21 and a cylindrical lens 22. The collimating lens 21, as shown in Fig. 2A, is formed by a concave lens 21a and a convex lens 21b joined to each other. The cylindrical lens 22 has a refracting power only along a direction of the axis of rotation 3b, that is, a direction Y. Thus, the light beam L₁, in its diverging condition, from the light source 1 enters the collimating lens 21 where it is collimated to become a collimated beam L₂. The collimated beam L₂ enters the cylindrical lens 22 to become a converging beam L₃ which converges onto a mirror surface 3a of the rotary polygon mirror 3 only with respect to the direction Y (Fig. 2A). The light beam L₃ is deflected by the rotary polygon mirror 3 to become a deflected beam L₄. The deflected beam L₄ is focused on a surface-to-be-scanned 5 through a second image-forming system 4 which is comprised of a scanning lens 41 and a cylindrical lens 42, the cylindrical lens 42 having a refracting power only along the direction of the axis of rotation 3b (i.e., direction Y). For convenience of illustration, Figs. 2A and 2B illustrate the optical axis of the optical beam scanning system as usually extending along a direction Z even though in reality the optical axis changes its direction. In a thus structured optical system, the mirror surface 3a of the rotary polygon mirror 3 and the surface-to-be-scanned 5 are in conjugation with each other with respect to the direction Y as shown in Fig. 2A. As a result, facet errors related to the mirror surface 3a are corrected, which in turn would guarantee a high quality image recorded on the surface-to-be-scanned 5. By expanding a diameter  X of the light beam L₃ taken in the X direction, the light beam can be focused on the surface-to-be-scanned 5 at a high resolution with respect to the main scanning direction. In other words, such excellent focusing is obtainable if the collimated beam L₂ from the collimating lens 21 has a large beam diameter  (= X = Y ). As the beam diameter  of the light beam L₂ becomes larger, the first image-forming system 2 has a longer optical path length. This is because the numerical aperture NA p (i.e., an angle ϑ p ) at the rotary polygon mirror 3 side is preliminarily determined by the second image-forming system 4. The fact that the angle ϑ p is preliminarily determined natuarally implies that the cylindrical lens 22 must have a longer focal length f₂₂ along the direction Y to enlarge the beam diameter  of the light beam L₂. In addition, the numerical aperture NA₀ (i.e., an angle ϑ₀) at the light source 1 side is constant. This circumstance demands a collimating lens 21 with a long focal length f₂₁ if a larger diameter  of the light beam L₂ is desired. Assume that an optical beam scanning system satisfies the following design conditions: Beam Diameter  of Light Beam L₂ = 19 mm; Numerical Aperture NA₀ at Light Source Side = 0.1; and Numerical Aperture NA p at Rotary Polygon Mirror Side = 0.0035 In such an optical beam scanning system, the first image-forming system 2 may be designed so as to have lens data as given in Table 1, for example. For convenience of description, the disclosure uses the symbol "r X " to refer to a radius of curvature of the light beam taken along the X direction on the optical axis. Likewise, by the symbol "r Y " is denoted a radius of curvature of the light beam taken along the Y direction on the optical axis. In Table 1, the symbols r Xi and r Yi denote radii of curvature of the surfaces of the i-th lens (i = 1 to 5) from the light source 1. The symbol d i is a surface-to-surface distance, taken on the optical axis, between the i-th (i = 1 to 4) lens and an (i+1)-th lens from the light source 1. By "d₅" is denoted the distance between the cylindrical lens 22 and the mirror surface 3a. The symbols n₁, n₂ and n₃ are refractive indices of the concave lens 21a, the convex lens 21b and the cylindrical lens 22 at a wavelength of 780 nm, respectively. Like symbols will be be adhered to in the description hereinafter in explaining other embodiments, and, therefore, will not be explained again. In the first image-forming system 2 with such structure, the focal length f₂₁ of the collimating lens 21 and the focal length f₂₂ of the cylindrical lens 22 taken along the Y direction are: f₂₁ = 95 mm f₂₂ = 2714.284 mm The distance d₀ between the light source 1 and the object-side surface of the first lens from the light source 1 is: d₀ = 91.923 mm Therefore, the optical path length d of the first image-forming system 2 is as long as d ≒ 2852 mm. SUMMARY OF THE INVENTION The present invention is directed to an optical beam scanning system, comprising: a light source for emitting a diverging light beam; a deflector for deflecting the light beam in a first direction; a first image-forming system for converging the light beam from the light source onto the deflector with respect to a second direction, the second direction being perpendicular to the first direction, the first image-forming system including a first lens system disposed between the light source and the deflector, the first lens system having no or a negative power along the first direction and having a positive power along the second direction and a second lens system disposed between the first lens system and the deflector, the second lens system having a positive power only along the first direction; and a second image-forming system for focussing the light beam in the first and second directions on a surface to be scanned. According to the aspect of the present invention, the second lens system is spaced from the light source so that the a focal point of the first image-forming system with respect to the first direction is disposed at the light source. Accordingly, the object of the present invention is to obtain a small-size optical beam scanning system equipped with facet-error correction function. These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a view of a conventional optical beam scanning system; Figs. 2A and 2B are views of the optical system of the conventional optical beam scanning system taken in a Y-Z plane and an X-Z plane, respectively; Fig. 3 is a view of an optical beam scanning system according to a first embodiment of the present invention; Figs. 4A and 4B are views of an optical system of the optical beam scanning system taken in a Y-Z plane and an X-Z plane, respectively; Fig. 5 shows spherical aberration along a direction Y in a first image-forming system of the optical beam scanning system of Figs. 4A and 4B; Figs. 6A and 6B are views of a first image-forming system of an optical beam scanning system according to a second embodiment of the present invention; Fig. 7 shows spherical aberration along the direction Y in the first image-forming system of Figs. 6A and 6B; Figs. 8A and 8B are views of a first image-forming system of an optical beam scanning system according to a third embodiment of the present invention; Fig. 9 shows spherical aberration along the direction Y in the first image-forming system of Figs. 8A and 8B; and Fig. 10 shows spherical aberration along the direction Y in a first image-forming system of an optical beam scanning system according to other embodiment of the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENTS As the descriptions heretofore goes, in an optical beam scanning system, if a light beam is desired to be highly precisely focused on a surface-to-be-scanned with respect to the main scanning direction X, it is necessary to increase the beam diameter  X taken along the main scanning direction X of a light beam from a first image-forming system. Equally important is to correct polygon facet errors caused in relation to the rotary polygon mirror. The rotary polygon mirror may be arranged so that the mirror surfaces of the rotary polygon mirror is in conjugation with a surface-to-be-scanned 5 with respect to a direction Y which is perpendicular to the main scanning direction X (namely, the direction of the axis of rotation for the rotary polygon mirror). Considering the demands as above, the present invention enables the optical path length of the first image-forming system 2 to be shortened by reshaping the light beam L₁ so that only its beam diameter  X along the X direction is enlarged without increasing its diameter  Y along the Y direction (i.e., while having the diameter  Y stay small). A. First Embodiment Fig. 3 is a perspective view of an optical beam scanning system according to a first embodiment of the present invention. Figs. 4A and 4B are views showing an optical system of the optical beam scanning system, taken in a Y-Z plane and an X-Z plane, respectively. As shown in the figures, the optical beam scanning system has the same structure as that of the conventional optical beam scanning system of Figs. 1, 2A and 2B, except for the structure of a first image-forming system 2. Hence, the structure except that of the first image-forming system 2 will not be explained here, and only the structure of the first image-forming system 2 will be described in detail. Instead, the symbols and the reference numbers used in describing the conventional optical beam scanning system are allotted to the corresponding parts, by which the structure of the novel optical beam scanning system is regarded as explained except for that of the first image-forming system 2. The first image-forming system 2 includes a first lens system 26 and a second lens system 27, the first lens system 26 being formed by a cylindrical lens which has a positive power along the direction of an axis of rotation 3b (Y direction), the second lens system 27 being formed by a cylindrical lens which has a positive power along the main scanning direction X. The first and the second lens systems 26 and 27 are disposed in that order from a light source 1 side to a rotary polygon mirror 3 side. A diverging light beam L₁ from the light source 1 first enters the first lens system 26 where it is reshaped so as to converge onto a mirror surface 3a at a predetermined angle of ϑ p with respect to the Y direction. (The numerical aperture at the light source side is NA₀ (i.e., divergence angle being ϑ₀) though not shown in Figs. 4A and 4B). With respect to the X direction, on the other hand, the light beam thus passed through the first lens system 26 remains as diverging at an angle of ϑ₀ since the first lens system 26 has no power along the X direction. The light beam from the first lens system 26 next enters a second lens system 27. The light beam passed through the second lens system 27, generally referred to as L₃, becomes a converging light converging onto the mirror surface 3a of the rotary polygon mirror 3 at an angle of ϑ p since the second lens system 27 has no power along the Y direction. With respect to the X direction on the other hand, the light beam L₃ is reshaped by the second lens system 27 into a collimated light beam. Thus reshaped light beam L₃ is thereafter deflected by the rotary polygon mirror 3 to become a deflected light beam L₄ which would be focused on the surface-to-be-scanned 5 through a second image-forming system 4 which is formed by a scanning lens 41 and a cylindrical lens 42. As described in the above, in the first image-forming system 2 according to the first embodiment, the diverging beam L₁ is not reshaped into a collimated beam in which the relation  X = Y is satisfied but is reshaped by the first lens system 26 into a converging light beam converging onto the mirror surface 3a at a predetermined angle ϑ p only along the Y direction. Thus, with respect to the Y direction, the light beam L₃ can be focused on the mirror surface 3a, independently of how large the beam diameter  X of the light beam L₃ for the X direction is. For example, the first lens system 26 can be disposed in the vicinity of the light source 1 as shown in Fig. 4A. The nearer the first lens system 26 and the light source 1 becomes, the shorter the distance between the first lens system 26 and the rotary polygon mirror 3 becomes. On the other hand, since the light beam L₃ must have the beam diameter  X (which is taken along the X direction) of a predetermined size, the second lens system 27 must be spaced from the light source 1 correspondingly to the beam diameter  X . In more particular words, the second lens system 27 must be spaced from the light source 1 by a distance equivalent to its focal length. Hence, it is not possible that the first image-forming system 2 has an optical path length which is shorter than the focal length of the second lens system 27. However, this reversely implies that, according to the first embodiment, the optical path length of the first image-forming system 2 can be reduced to as short as the focal length of the second lens system 27. Now, it will be explained to what extent the optical path length of the first image-forming system 2 can be shortened. For this end, comparison will be made between the conventional optical beam scanning system (Table 1) and the optical beam scanning system of the first embodiment which satisfies exactly the same design conditions as those for the conventional optical beam scanning system. The optical beam scanning system according to the first embodiment includes a first lens system 26 formed by an aspherical cylindrical lens, which would reduce aberrations, especially spherical aberration. That is, in the first lens system 26, a surface S₂₆ facing toward a rotary polygon mirror 3 satisfies Eq. 1 below. z = c y · y² 1 + 1-(1+k)c y ² · y² Where the symbols x, y and z represent distances along directions X, Y and Z from an origin, the origin being an intersection at which the surface S₂₆ and the optical axis of the scannning system intersect, and c y inverse number of the radius of curvature r Y of the surface S₂₆ taken along the Y direction, k coefficient of the aspherical surface. Like the first lens system 26, the second lens system 27 has a surface S₂₇ facing toward the rotary polygon mirror 3 which satisfies: z = c x · x² 1 + 1-(1+k)c x ² · x² where the symbols x, y and z represent distances taken along directions X, Y and Z from an origin, the origin being an intersection at which the surface S₂₇ and the optical axis of the scanning system intersect, and c x inverse number of the radius of curvature r X of the surface S₂₇ taken along the X direction, k coefficient of the aspherical surface. Table 2 shows lens data of the first image-forming system 2 according to the first embodiment. Fig. 5 shows spherical aberration of the first image-forming system 2 having the lens data above, with respect to the direction Y. In such a first image-forming system 2, the focal length f 26Y of the first lens system (cylindrical lens) 26 taken along the direction Y and the focal length f 27X of the second lens system (cylindrical lens) 27 taken along the direction X are: f 26Y = 3.921 mm f 27X = 95 mm The distance d₀ between the light source 1 and the object-side surface of the first lens 26 is: d₀ = 3.013 mm Therefore, the optical path length d of the first image-forming system 2 is drastically reduced to: d₀ ≒ 122 mm and, is thus, much shorter than that of the conventional optical beam scanning system (d = 2852 mm). Although the optical beam scanning system according to the first embodiment requires the surface S₂₆ of the first lens system 26 to be aspherical, the surface S₂₆ may be simply cylindrical. However, considering correction of aberrations such as spherical aberration, the surface S₂₆ is preferably aspherical. Still another modification is possible wherein the both surfaces of the first lens system 26 are aspherical. The modifications as above are applicable not only to the first lens system 26 but also to the second lens system 27. B. Second Embodiment The first lens system 26 and/or the second lens system 27 may be formed by more than one lenses, not by only one lens as suggested in the foregoing wherein the first embodiment has been described. For instance, a first and a second lens system 26 and 27 shown in Figs. 6A and 6B are also possible. In Figs. 6A and 6B, two lenses 26a and 26b joined to each other form a cylindrical lens (first lens system) 26 which has a positive power along the direction Y (i.e., the direction of axis of rotation of the rotary polygon moirror). Likewise, two lenses 27a and 27b joined to each other form a cylindrical lens (second lens system) 27 which has a positive power only along the main scanning direction X. The same effect as recited in relation to the first embodiment is obtainable with the first and the second lens systems 26 and 27 as such according to the second embodiment. Now, explanation will be given of advantages of an optical beam scanning system according to a second embodiment which satisfies the same design conditions as those for the conventional optical beam scanning system, by showing comparison with the conventional optical beam scanning system (Table 1). Table 3 gives lens data of a first image-forming system 2 of the optical beam scanning system according to the second embodiment. Fig. 7 shows Y-direction spherical aberration of the first image-forming system 2 having the lens data as above. In such a first image-forming system 2, the focal length f 26Y of the cylindrical lens (first lens system) 26 taken along the direction Y and the focal length f 27X of the cylindrical lens (second lens system) 27 taken along the direction X are: f 26Y = 3.921 mm f 27X = 95 mm The distance d₀ between the light source 1 and the object-side surface of the first lens system 26 is: d₀ = 2.051 mm Therefore, the optical path length d of the first image-forming system 2 is reduced to: d₀ ≒ 122 mm and, is thus, quite shorter than that of the conventional optical beam scanning system (d = 2852 mm). C. Third Embodiment Figs. 8A and 8B show a first image-forming system 2 of an optical beam scanning system according to a third embodiment of the present invention. The first image-forming system 2 includes a first lens system 26 formed by a toroidal lens and a second lens system 27 formed by a cylindrical lens. The toroidal lens forming the first lens system 26 has a positive power along the Y direction (direction of the axis of rotation) and has a negative power along the main scanning direction X. The cylindrical lens forming the second lens system 27 has a positive power along the main scanning direction X. The first and the second lens systems 26 and 27 are disposed in that order from a light source 1 side to a rotary polygon mirror 3 side. In the first lens system (toroidal lens) 26, a surface S₂₆′ facing toward the light source 1 is toroidal, whereas a surface S₂₆ facing toward a mirror surface 3a of the rotary polygon mirror 3 is aspherical. In the second lens system (cylindrical lens) 27, a surface S₂₇ facing toward the mirror surface 3a is aspherical. The surfaces S₂₆ and S₂₇ need not always be aspherical, but may simply be cylindrical. However, the surfaces S₂₆ and S₂₇ are preferred to be aspherical in order to reduce aberrations such as spherical aberration. The third embodiment has a large difference from the first embodiment in that the first lens system 26 has a positive power along the direction Y (direction of the axis of rotation) as well as a negative power along the main scanning direction X. Hence, not only the effect obtainable according to the first embodiment can result, but also an advantage of a reduced distance between the light source 1 and the second lens system 27 can be attained. The reason why the latter is possible is because the first lens system has a negative power along the main scanning direction. The focal length of a composite lens system consisting of the first and the second lens system is equal to that of the first and the second embodiment. Thus, according to the third embodiment, the first image-forming system 2 has much reduced optical path length compared to the first and the second embodiment, without altering the numerical aperture from the light source, which eventually enables downsizing in the optical beam scanning system. Next, it is examined to what extent the optical path length can be shortened according to the third embodiment. For this purpose, the optical beam scanning system of the third embodiment which satisfies the demands above will be explained, followed by an explanation about what effects such optical beam scanning system would offer. In the optical beam scanning system according to the third embodiment, the first and the second lens systems 26 and 27 have surfaces S₂₆ and S₂₇, respectively, each being aspherical as in the first embodiment. Table 4 below gives lens data of a first image-forming system 2 according to the third embodiment. Fig. 9 shows spherical aberration of the first image-forming system 2 whose lens data is given in Table 4, with respect to the direction Y. In the first image-forming system 2 as above, the focal lengths f 26X and f 26Y of the first lens system (toroidal lens) 26 taken along the directions X and Y, respectively, and the focal length f 27X of the second lens system (cylindrical lens) 27 taken along the direction X are: f 26X = -2.185 mm f 26Y = 2.614 mm f 27X = 47.5 mm The distance d₀ between a light source 1 and the object-side surface of the first lens system is: d₀ = 2.187 mm Hence, the optical path length d of the first image-forming system 2 is largely reduced to: d ≒ 79 mm and, is thus, much shorter than that of the conventional optical beam scanning system (d = 2852 mm) and that of the optical beam scanning systems according to the first and the second embodiment (d = 122 mm). D. Other Embodiment The preceding descriptive portion is devoted to explanations on the first image-forming systems 2 of the optical beam scanning system which satisfies: Beam Diameter  of Light Beam L₂ = 19 mm; Numerical Aperture NA₀ at Light Source Side = 0.1; and Numerical Aperture NA p at Rotary Polygon Mirror Side = 0.0035 However, it will be appreciated that the present invention is not exclusively directed to the optical beam scanning system with such design. The present invention may be embodied as an optical beam scanning system of other design as given below, for instance. Beam Diameter  of Light Beam L₂ = 30 mm; Numerical Aperture NA₀ at Light Source Side = 0.4; and Numerical Aperture NA p at Rotary Polygon Mirror Side = 0.01 The present invention, when applied to an optical beam scanning system which satisfies these conditions, promises similar effects to those accomplished according to the first to the third embodiments. In such an optical beam scanning system, a first image-forming system 2 may be exactly the same in structure as the first image-forming system 2 of the first embodiment (Figs. 4A and 4B). However, the demand for reduction in spherical aberration requires that each surface of a first lens system 26 satisfies Eq. 3 below. z = c y · y² 1 + 1-(1+k)c y ² · y² + Ay⁴ + By⁶ Where the symbols x, y and z represent distances along directions X , Y and Z from an origin, the origin being an intersection at which each surface of the first lens system 26 and the optical axis of the scanning system intersect, and c y inverse number of the radius of curvature r Y of each surface taken along the Y direction, k, A, B coefficient of the aspherical surface. Likewise, each surface of a second lens system 27 must satisfies: z = c x · x² 1 + 1-(1+k)c x ² · x² + Ax⁴ where the symbols x, y and z represent distances taken along directions X, Y and Z from an origin, the origin being an intersection at which each surface the second lens 27 and the optical axis of the scanning system intersect, and c x inverse number of the radius of curvature r X of each surface taken along the X direction, k, A coefficient of the aspherical surface. Table 5 shows lens data of the first image-forming system 2 as above. Fig. 10 shows spherical aberration of the first image-forming system 2 having the lens data above, with respect to the direction Y. In the first image-forming system 2 as above, the focal length f 26Y of the first lens system (cylindrical lens) 26 taken along the direction Y, and the focal length f 27X of the second lens system (cylindrical lens) 27 taken along the direction X are: f 26Y = 4.045 mm f 27X = 37.5 mm The distance d₀ between a light source 1 and the object-side surface of the first lens system 26 is: d₀ = 3.022 mm Hence, the optical path length d of the first image-forming system 2 is reduced to: d = 172 mm Thus, a relatively short optical path length d is attained. While the invention has been described in detail in relation to only a few embodiments, the foregoing description is in all aspects illustrative and not restrictive. It is understood that numerous other modifications and variations can be devised without departing from the scope of the invention. The features disclosed in the foregoing description, in the claims and/or in the accompanying drawings may, both, separately and in any combination thereof, be material for realising the invention in diverse forms thereof.

Claims: An optical beam scanning system, comprising: a light source (1) for emitting a diverging light beam; a deflector (3) for deflecting said light beam in a first direction (X); a first image-forming system (2) for converging said light beam from said light source onto said deflector with respect to a second direction (Y), said second direction being perpendicular to said first direction; and a second image-forming system (4) for focusing said light beam in said first and second directions on a surface (5) to be scanned; characterised in that said first image-forming system includes: a first lens system (26) disposed between said light source and said deflector, said first lens system having no or a negative power along said first direction and having a positive power along said second direction; and a second lens system (27) disposed between said first lens system and said deflector, said second lens system having a positive power only along said first direction. The optical beam scanning system of claim 1, wherein said second lens system (27) is spaced from said light source (1) so that a focal point of said first image-forming system (2) with respect to said first direction (X) is disposed at said light source. The optical beam scanning system of claim 1 or 2, wherein said second lens system (27) is formed by an aspherical lens. The optical beam scanning system of claim 3, wherein said aspherical lens (27) has a surface (S₂₇) facing toward said deflector (3), said surface satisfying the following equation: z = c x . x² 1 + 1-(1+k)c x ² . x² + Ax⁴ where symbols x , y and z represent respective distances along said first and second directions (X and Y) and a third direction (Z) from an origin, the origin being an intersection at which said surface (S₂₇) and an optical axis of said first image-forming system (2) cross each other, said third direction being perpendicular to both said first and second directions, symbol c x represents an inverse number of the radius of curvature of said surface taken along said first direction and symbols k and A are coefficients of the aspherical surface. The optical beam scanning system of any one of claims 1 to 4, wherein said second lens system (27) is formed by a cylindrical lens. The optical beam scanning system of any one of claims 1 to 5, wherein said second lens system (27) is formed by a plurality of lenses (27a, 27b) which are joined to each other. The optical beam scanning system of any preceding claim wherein said first lens system (26) is formed by an aspherical lens. The optical beam scanning system of claim 7, wherein said aspherical lens (26) of the first lens system has a surface (S₂₆) facing toward said deflector, said surface satisfying the following equation: z = c y . y² 1 + 1-(1+k)c y ² . y² Ay⁴ + By⁶ where symbols x, y and z represent respective distances along said first and second directions (X and Y) and a third direction (Z) from an origin, the origin being an intersection at which said surface (S₂₆) and an optical axis of said first image-forming system (2) cross each other, said third direction being perpendicular to both said first and second directions, symbol c y represents an inverse number of the radius of curvature of said surface taken along said second direction and symbols k , A and B are coefficients of the aspherical surface. The optical beam scanning system of any preceding claim, wherein said first lens system (26) is formed by a plurality of lenses (26a, 26b) which are joined to each other. The optical beam scanning system of any preceding claim, wherein said first lens system (26) is formed by a toroidal lens. The optical beam scanning system of claim 10, wherein said first lens system (26) has a toroidal surface (S₂₆,) facing toward said light source (1) and an aspherical surface (S₂₆) facing toward said deflector (3).

Inventors: KAWABATA MOTONOBU DAINIPPON SC, KAWABATA, MOTONOBU, DAINIPPON SCREEN MFG.CO.,LTD.
Applicants: DAINIPPON SCREEN MFG, DAINIPPON SCREEN MFG. CO., LTD.
Application year: 1991
Main classification: G02B27
IPC codes: G02B27, G02B26