Method of manufacturing non-volatile semiconductor memory device

Abstract: Arsenic ions are implanted into an element region of a silicon substrate (31) so as to form a first impurity region (35). Then, an insulating film (36) is formed on the silicon substrate in the element region, followed by forming a heat resistant film (41) on the entire surface of the silicon substrate. Further, a resist film (37) is formed on the silicon substrate, followed by patterning the resist film to form an opening on at least the first impurity region. After the patterning step, the heat resistant film positioned below the opening of the resist film is removed, followed by implanting phosphorus ions into the substrate using the patterned resist film as a mask so as to form a second impurity region (38). In the next step, the resist film is removed and, then, annealing is applied with the heat resistant film used as a mask. After the annealing step, the resist film is removed, and an annealing is performed with the heat resistant film used as a mask, followed by removing the insulating film using the heat resistant film as a mask. Finally, a tunnel oxide film (39) is formed on that portion of the silicon substrate, followed by forming an electrode (40) on the tunnel oxide film so as to manufacture a desired nonvolatile semiconductor memory device.

Description: The present invention relates to a FLOTOX type EEPROM, particularly, to an improvement in a method of manufacturing a thin oxide film, hereinafter referred to as "tunnel oxide film", through which flows a Fowler-Nordheim current in a programming stage of information. In accordance with a marked progress achieved in recent years in the miniaturization of the memory cell of FLOTOX type EEPROM, a tunnel region in which a tunnel oxide film is formed tends to be formed such that the edge portion of the tunnel region overlaps with the adjacent field oxide film, as shown in Fig. 1. Incidentally, Fig. 1 is a plan view showing a single memory cell comprising a tunnel region 11, a field oxide film 12, a floating gate 13, a source region 14 and a drain region 15. Figs. 2A to 2D are cross sectional views along the line A-A' shown in Fig. 1, showing a conventional method of forming a tunnel oxide film of a memory cell in the case where the tunnel region overlaps with the edge portion of the field oxide film as shown in Fig. 1. In the first step, a channel stop 22 is formed in a p-type silicon substrate 21 by selectively implanting, for example, boron ions, as shown in Fig. 2A. A field oxide film 23 serving to isolate element regions is formed on the channel stop 22. Then, impurity ions, e.g., As ions, are implanted into the silicon substrate 21 within a tunnel region so as to form an n-type impurity region 24 within the silicon substrate 21 in the tunnel region. After formation of the n-type impurity region 24, a relatively thick oxide film 25 having a thickness of about 40nm (400 Å) is formed over the entire element region, followed by coating the entire silicon substrate 21 with a resist film 26, as shown in Fig. 2B. In the next step, the resist film 26 is exposed to light and, then, patterned such that the resist film 26 is selectively removed from a tunnel region 27. It should be noted that the tunnel region 27 is positioned to overlap with the edge portion of the field oxide film 23. The particular construction is advantageous in terms of miniaturization of the element. Then, the oxide film 23 positioned in the tunnel region 27 is etched with NH 4 F using the resist film 26 as a mask, as shown in Fig. 2C. Further, the resist film 26 is removed, followed by forming a relatively thin tunnel oxide film 28 having a thickness of about 10nm (100 Å) by, for example, thermal oxidation in the tunnel region 27, as shown in Fig. 2D. Still further, a polysilicon film about 400nm (4000 Å) thick is formed on the tunnel oxide film 28, followed by patterning the polysilicon film so as to form a floating gate 29. In the conventional method described above, the tunnel region 27 is positioned to overlap with the field oxide film 23, giving rise to a difficulty. Specifically, in the step of etching the oxide film 25 in the tunnel region 27 in preparation for the formation of the tunnel oxide film 28, the edge portion of the field oxide film 23 is etched, too, leading to a recession in the edge of the field oxide film 23. It follows that the channel stop 22 is partially exposed to the substrate surface, as shown in Fig. 2C. This brings about a serious problem. Specifically, even if a high voltage is applied to the n-type impurity region 24 for withdrawing electrons from the floating gate 29 in the programming step of information, the holes formed by the band-to-band tunneling within the n-type impurity region 24 leak into the silicon substrate 21 through the channel stop 22. In other words, it is difficult to apply an electric field of high intensity to the tunnel oxide film 28, making it difficult to permit flow of Fowler-Nordheim current. An object of the present invention is to mitigate the above-noted difficulties inherent in the prior art. The present invention is also intended to improve the quality of the tunnel oxide film. According to the invention, there is provided a method of manufacturing a nonvolatile semiconductor memory device, comprising the steps of: forming and patterning a field oxide film on a semiconductor substrate of first conductivity type; implanting ions of a first impurity into an element region of the semiconductor substrate separating two channel stops underneath respective portions of the field oxide film so as to form a first impurity region of second conductivity type; forming a first insulating film on the entire element region formed in the semiconductor substrate; forming a masking material above the semiconductor substrate; patterning the masking material so as to form an opening in the masking material and so as to define a tunnel region such that the opening faces at least the first impurity region and edge portions of said channel stops; implanting ions of a second impurity into the semiconductor substrate using the patterned masking material as a mask so as to form a second impurity region of second conductivity type having an impurity concentration equal to or higher than that of the first impurity region and extending throughout at least said first impurity region and said adjacent edge portions of said channel stops; removing the first insulating film positioned below the opening of the masking material; removing the masking material; forming a further insulating film as a tunnelling film on the surface of that portion of the semiconductor substrate from which the first insulating film has been removed; and forming an electrode functioning as a floating gate on the first and further insulating films. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: Fig. 1 is a plan view showing a FLOTOX type EEPROM in which the tunnel region overlaps with the edge portion of the field oxide film; Figs. 2A to 2D are cross sectional views collectively showing the method of manufacturing a conventional nonvolatile semiconductor memory device; Figs. 3A to 3D are cross sectional views collectively showing a method of manufacturing a nonvolatile semiconductor memory device according to a first embodiment of the present invention; Fig. 4A is a graph showing the relationship between the gate current and the electric field intensity with respect to nonvolatile semiconductor memory devices manufactured by the method of the present invention and by the conventional method; Fig. 4B shows a circuit diagram employed for measuring the V-I characteristics; and Figs. 5A to 5D are cross sectional views collectively showing a method of manufacturing a nonvolatile semiconductor memory device according to a second embodiment of the present invention. Some embodiments of the present invention are shown in the accompanying drawings. Incidentally, common members or the like of the device shown in the drawings are denoted by the common reference numerals throughout the drawings. First of all, Figs. 3A to 3D collectively show a method of manufacturing a nonvolatile semiconductor memory device according to a first embodiment of the present invention. As shown in Fig. 3A, a field oxide film 32 and a channel stop 33 are formed on a p-type silicon substrate 31 by the conventional process. Also, an n-type impurity region 35 is formed in an element region including a tunnel region 34. Further, a relatively thick oxide film 36, i.e., about 40nm (400 Å) thick, is formed by thermal oxidation on the silicon substrate 31 in the element region. Then, a photoresist film 37 is formed by coating above the entire region of the silicon substrate 31, followed by exposing the resist film 37 to light and, then, patterning the resist film 37. As a result, an opening is formed in the resist film 37 in the region facing the tunnel region 34. In the next step, ions of an n-type impurity, e.g., phosphorus, are implanted into the silicon substrate 31 in the tunnel region 34 in a concentration equal to or higher than the impurity concentration of the impurity region 35 so as to form an n-type impurity region 38, as shown in Fig. 3B. It should be noted that damages are formed in the oxide film 36 in the step of implanting the phosphorus ions into the silicon substrate 31. After formation of the n-type impurity region 38, the oxide film 36 positioned in the tunnel region 34 is etched with NH 4 F using the resist film 37 as a mask, as shown in Fig. 3C. In this step, the edge portion of the field oxide film 32 is also etched, leading to recession of the field oxide film in the edge portion. It should be noted, however, that the presence of the impurity region 38 prevents the channel stop 33 from being exposed to the substrate surface. In the next step, the resist film 37 is removed, followed by forming a relatively thin tunnel oxide film 39, i.e., about 10nm (100 Å) thick, in the tunnel region 34, as shown in Fig. 3D. Then, a polysilicon film having a thickness of about 400nm (4000 Å) is formed on the entire surface of the silicon substrate 31 by means of, for example, CVD. Finally, a floating gate 40 is formed by patterning the polysilicon film so as to manufacture a desired nonvolatile semiconductor memory device. In the method described above, the oxide film 36 having damages formed therein is removed, and the tunnel oxide film 39 is newly formed. Naturally, the tunnel oxide film 39 exhibits stable characteristics. What should also be noted is that the impurity region 38 serves to prevent the channel stop 33 from being exposed to the substrate surface, as described previously. The particular construction permits producing a prominent effect, as shown in Fig. 4A. Specifically, Fig. 4A is a graph showing the V-I characteristics with respect to nonvolatile semiconductor memory devices manufactured by the method of the present invention and by the conventional method. The solid line shown in Fig. 4A denotes the characteristics of the device manufactured by the method of the present invention, with the broken line denoting the characteristics of the device manufactured by the conventional method. On the other hand, Fig. 4B shows a circuit diagram employed for measuring the V-I characteristics. As shown in the drawing, the floating gate 40 formed on the tunnel oxide film 39 having a thickness of 10nm (100 Å) is connected to the ground, and the voltage V applied to the impurity region 35 is used as a parameter. As apparent from Fig. 4A, the gate current I of the device manufactured by the method of the present invention is markedly larger than that of the device manufactured by the conventional method in the case where the same voltage is applied to the tunnel oxide film 39. This supports that the device manufactured by the method of the present invention permits sufficiently suppressing the leakage holes formed by the band-to-band tunneling. It follows that a large tunnel current can be obtained with a relatively low voltage in the present invention, making it possible to perform programming of information efficiently. Figs. 5A to 5D collectively show a method of manufacturing a nonvolatile semiconductor memory device according to a second embodiment of the present invention. In the first step, a field oxide film 32 and channel stop 33 are formed on a p-type silicon substrate 31 by the known process, as shown in Fig. 5A. Also, an n-type impurity region 35 is formed in an element region including a channel region 34. Then, a relatively thick oxide film 36 having a thickness of about 40nm (400 Å) is formed on the silicon substrate 31 in the element region by thermal oxidation. After formation of the oxide film 36, a heat resistant film 41, e.g., a silicon nitride film, having a thickness of about 8nm (80 Å) is formed above the entire surface of the silicon substrate 31 by chemical vapor deposition, followed by coating the heat resistant film 41 with a resist film 37. Further, the resist film 37 is exposed to light and, then, patterned so as to form an opening in the resist film 37 so as to expose the channel region 34 to the outside. In the next step, the heat resistant film 41 in the tunnel region 34 is etched with NH 4 F using the resist film 37 as a mask, as shown in Fig. 5B. Further, impurity ions, e.g., phosphorus ions, are implanted into the silicon substrate 31 in the tunnel region 34 using the resist film 37 as a mask, so as to form an n-type impurity region 38 within the silicon substrate 31 in the tunnel region 34. The impurity concentration implanted into the substrate should be equal to or higher than that of the impurity region 35. It should be noted that damages are formed in the oxide film 36 in the step of implanting the phosphorus ions into the substrate 31. Further, the resist film 37 is removed, followed by performing an annealing treatment under a nitrogen gas atmosphere at 950°C for about 30 minutes so as to make up for the damage done to the substrate 31 and the oxide film 35 by the phosphorus ion implantation, as shown in Fig. 5C. After the annealing treatment, the oxide film 36 within the tunnel region 34 is etched with NH 4 F using the heat resistant film 41 as a mask. In this etching step, the edge portion of the field oxide film 32 is also etched away. However, the presence of the impurity region 38 serves to present the channel stop 33 from being exposed to the substrate surface. In the next step, a relatively thin tunnel oxide film 39 having a thickness of about 10nm (100Å) is formed in the tunnel region 34, as shown in Fig. 5D. Then, a polysilicon film is formed in a thickness of about 400nm (4000 Å) above the entire region of the silicon substrate 31 by means of, for example, CVD method. Finally, the polysilicon film is patterned so as to form a floating gate 40. In the method described above, the heat resistant film 41 is formed on the oxide film 36. Also, an annealing treatment is applied after formation of the impurity region 38. As a result, it is possible to eliminate the damage done to the substrate 31 and the oxide film 35 by the phosphorus ion implantation. It should also be noted that the tunnel oxide film 39 is formed after the annealing step, with the result that the tunnel oxide film 39 is highly stable in its quality. It follows that the nonvolatile semiconductor memory device manufactured by the method according to the second embodiment of the present invention exhibits a reliability higher than that of the device manufactured by the method according to the first embodiment of the present invention. In each of the first and second embodiments described above, the tunnel region 34 is positioned to overlap with the edge portion of the field oxide film 32. However, it is possible for the tunnel region 34 to be positioned within the element region. In this case, it is possible to apply the technical idea of the present invention in view of the case where a deviation in the masking step causes the tunnel region 34 to be positioned to overlap with the edge portion of the field oxide film 32. If the technical idea of the present invention is applied to such a case, it is possible to obtain the effect similar to that obtained in each of the first and second embodiments described above. The above describes a method of manufacturing a nonvolatile semiconductor memory device in which the tunnel region is positioned to overlap with the edge portion of the field oxide film, and is intended to achieve the device construction which permits preventing the hole leakage in the programming stage of information so as to facilitate a high voltage application to the tunnel oxide film. Briefly summarised, in the method a silicon substrate is divided into an element region and a field region. Arsenic ions are implanted into the element region of the silicon substrate so as to form a first impurity region. Then, an insulating film is formed on the silicon substrate in the element region, followed by forming a heat resistant film on the entire surface of the silicon substrate. After formation of the heat resistant film, a resist film having an opening on at least the first impurity region is formed on the silicon substrate, followed by removing the heat resistant film positioned in the opening of the resist film. In the next step, phosphorus ions are implanted into the silicon substrate using the resist film as a mask so as to form a second impurity region. Further, the resist film is removed and, then, annealing is applied with the heat resistant film used as a mask. After the annealing step, the insulating film is removed with the heat resistant film used as a mask. Finally, a tunnel oxide film is formed on that portion of the silicon substrate from which the insulating film has been removed, followed by forming electrodes on the insulating film, the heat resistant film and the tunnel oxide film so as to manufacture a desired nonvolatile semiconductor memory device. Reference signs in the claims are intended for better understanding and shall not limit the scope.

Claims: A method of manufacturing a nonvolatile semiconductor memory device, comprising the steps of: forming and patterning a field oxide film (32) on a semiconductor substrate (31) of first conductivity type; implanting ions of a first impurity into an element region of the semiconductor substrate separating two channel stops (33) underneath respective portions of the field oxide film so as to form a first impurity region (35) of second conductivity type; forming a first insulating film (36) on the entire element region formed in the semiconductor substrate; forming a masking material (37) above the semiconductor substrate; patterning the masking material so as to form an opening (34) in the masking material and so as to define a tunnel region, such that the opening faces at least the first impurity region (35) and adjacent edge portions of said channel stops (33); implanting ions of a second impurity into the semiconductor substrate using the patterned masking material as a mask so as to form a second impurity region (38) of second conductivity type having an impurity concentration equal to or higher than that of the first impurity region and extending throughout at least said first impurity region (35) and said adjacent edge portions of said channel stops (33); removing the first insulating film (36) positioned below the opening of the masking material; removing the masking material; forming a further insulating film (39) as a tunnelling film on the surface of that portion of the semiconductor substrate from which the first insulating film has been removed; and forming an electrode (40) functioning as a floating gate on the first and further insulating films. A method of manufacturing a nonvolatile semiconductor memory device according to claim 1, wherein the masking material consists of a photoresist film. A method of manufacturing a nonvolatile semiconductor memory device according to claim 1, wherein said further insulating film consists of a tunnel oxide film. A method of manufacturing a nonvolatile semiconductor memory device according to claim 1, wherein the first impurity is arsenic and the second impurity is phosphorus. A method of manufacturing a nonvolatile semiconductor memory device according to any preceding claim, further comprising the steps of: forming a second insulating film (41) above the entire semiconductor substrate after forming the first insulating film; forming said masking material (37) on the second insulating film; removing the second insulating film (41) positioned below the opening of the masking material, using said masking material (37) as a mask; after removing the masking material, applying an annealing treatment using the second insulating film (41) as a mask; removing the first insulating film (36) using the second insulating film (41) as a mask; forming said further insulating film (39) on the surface of that portion of the semiconductor substrate from which the first insulating film (36) has been removed; and forming said electrode (40) on the second and further insulating films. A method of manufacturing a nonvolatile semiconductor memory device according to claim 5, wherein said second insulating film (41) is formed of silicon nitride.

Inventors: NARUKE KIYOMI, YAMADA SEIJI, NARUKE, KIYOMI, YAMADA, SEIJI, NARUKE, KIYOMI, C/O INTELLECT. PROP. DIVISION, YAMADA, SEIJI, C/O INTELLECT. PROP. DIVISION
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1991
Main classification: H01L21
IPC codes: H01L21, H01L29