A semiconductor device comprising a high voltage MOS transistor having shielded crossover path for a high voltage connection bus

Abstract: A semiconductor device with a MOS transistor particularly having a closed layout plan in which the drain region (20) is laterally surrounded by the source region (14) and the channel region (18) and having an extended charge carrier drift region (21) between the channel (18) and drain (20) regions, thereby achieving high reverse breakdown voltage. An oxide or other dielectric layer (22) is provided on the surface of the drift region (21), and on said layer (22) between the gate (24) and drain (28) electrodes a crossover path is formed by a succession of unconnected narrow conductive strips (34,35...) extending transversely to such path and having a dielectric coating thereon. A high voltage external connection bus (36) for the drain electrode (28) traverses such crossover path and extends through a gap formed by a disjuncture in the gate (24) and source (26) electrodes. Since the length of each of the conductive strips (34,35...) greatly exceeds the width of the connection bus (36), the coupling capacitance between each strip (34,35...) and said bus (36) is much less than the coupling capacitance between each strip (34,35...) and the underlying portion of the drift region (21). The drift region (21) can thereby be effectively shielded from the electric field of the connection bus (36) by including a sufficient number of conductive strips (34,35...) in the crossover path traversed by the connection bus (36).

Description: The invention relates to a semiconductor device comprising a high voltage MOS transistor having a source, a gate electrode and a drain, and a charge carrier drift zone at the surface of the transistor extending from the gate to the drain; the transistor having a closed layout plan such that the drain is laterally surrounded by the gate and source; and comprising respective electrodes for the source, and drain; a dielectric layer covering the drift zone and extending between the gate electrode and the drain electrode. The term "field effect transistor" as used herein refers particularly to a transistor having a source, a drain and a gate electrode, the gate electrode extending over a dielectric layer, for example silicon oxide or nitride, at the surface of the transistor; the gate electrode when energized causing either enhancement or depletion of charge carriers in an underlying surface channel of the transistor which constitutes the gate between the source and the drain. There is an increasing need for MOS integrated circuits which can sustain high reverse breakdown voltages. That is, wherein the drains of one of more MOS transistors therein may be subjected to voltages of the order of several hundred volts relative to the source. U.S. Patent No. 4,300,150, issued November 10, 1981, assigned to the present assignee, discloses a double-diffused MOS transistor (DMOS) wherein high reverse breakdown voltage is achieved by providing an extended charge carrier drift zone in an epitaxial layer between the gate and drain in order to provide a gradual distribution of the drain potential over the length of the drift zone. In order to minimize the area of such a transistor on an IC chip , it is advantageous to employ a closed layout plan wherein the source and gate are at the periphery and surround the drain as known e.g. from the article "Reduced electric field crowding at the fingertips of lateral DMOS transistors" by M. Amato, published in Extended Abstracts 87-1(1), page 161- 162. Consequently, in order for a high voltage external connection bus to reach the drain, it must extend over the drift zone between the gate and drain. The electric field produced by the bus will therefore influence the flow of charge carriers in the drift zone, and unless adequately shielded will degrade the operation of the transistor. The present invention aims to counteract the influence of the electric field produced by the connection bus on the charge carriers in the drift region lying underneath it. A semiconductor device in accordance with the invention is characterized in that: a plurality of unconnected electrically conductive strips are arranged in succession on said dielectric layer so as to form a crossover path between the gate electrode and the drain electrode, said strips extending substantially transversely to the direction of said crossover path, and having a further dielectric coating thereon; said gate and source electrodes have a disjunction therein forming a gap through which and elongated high voltage connection bus extends to the drain electrode; said connection bus traversing said crossover path formed by said conductive strips, supported on and in contact with said dielectric coating, each of said strips having a length substantially exceeding the width of said connection bus. In the device of the invention each strip of the crossover path forms a coupling capacitance C ci with said connection bus and further a coupling capacitance C di with said drift zone. The area of capacitance C di is several times large than that of capacitance C ci while the thickness of the first and second dielectric layer may be approximately equal. Hence the capacitance value of the capacitance C di will be several times larger than the capacitance value of the capacitance C ci . As a result the electric potential the electric potential between said connection bus and said drift zone is principally produced across said capacitance C ci rather than across said capacitance C di , so that said drift zone is effectively shielded from the electric field produced by said connection bus. A more complete description of preferred embodiments of the invention is given below with reference to the accompanying drawings, in which: Fig. 1 is a cross-section of the structure of a high voltage MOS transistor such as may be employed in a transistor in accordance with the invention; Fig. 2 is a diagram of a typical layout plan of the transistor in Fig. 1; Fig. 3 is a diagram of the electric field distribution in the drift zone of the transistor in Fig. 1; Fig. 4 is a projection view of the basic structure of a transistor in accordance with the invention, and Fig. 4a shows coupling capacitances involved in such structure; Fig. 5 is a projection view of the transistor in Fig. 4 as modified in accordance with the invention to provide for connection thereto of a high voltage external connection bus, and Fig. 5a shows the modified coupling capacitances of such modified structure; Figures 6a and 6b are diagrams of the coupling capacitances created by the conductive strips over the drift zones of the transistors in Figures 4 and 5, respectively; and Fig. 7 is a more detailed diagram of how the disjuncture may be created in the source and gate electrodes to form a gap for the high voltage connection bus as shown in Fig. 5. In Fig. 1 is shown a cross-section of the structure of a high voltage lateral double diffused N-channel enhancement mode MOS transistor (i.e., an LDMOS transistor), substantially as set forth in the above-referenced U.S. Patent No. 4,300,150, which is hereby incorporated by reference. The silicon substrate 10 is of lightly doped P-type conductivity, with an epitaxial N-type surface layer 12 therein. Diffused into a surface portion of such epitaxial layer and bounding it is a P-type zone 16 forming a P-N junction 17 therewith, and diffused into a surface portion of zone 16 is an N-type zone which constitutes the source 14. The portion of P-type zone 16 which extends beyond source 14 forms a channel at the surface which constitutes the gate 18. At a laterally distant portion of epitaxial layer 12 is a diffused N-type zone which constitutes the drain 20. A silicon oxide surface layer 22 is formed over epitaxial layer 12, extending over a portion of drain 20 and also, with reduced thickness, over gate 18 and a portion of source 14. A charge carrier drift zone 21 extends in a surface portion of epitaxial layer 12 between gate 18 and drain 20. A metallized source electrode 26 is formed over the surface portion of source 14 not covered by oxide layer 22, and also extends over the portion of P-type zone 16 which continues past source 14. Source electrode 26 is therefore in ohmic connection with the P-type substrate, so that the source and substrate will be at the same potential. This is typical of high voltage MOS transistors, the source and substrate both being grounded. A metallized drain electrode 28 is formed over drain 20. The electric field produced by the drain potential will therefore linearly decrease along the length of the drift zone from drain 20 to gate 18. As shown in Fig. 1 and described in U.S. Patent No. 4,300,150, an ion-implanted buried P+ region 30a has been provided at the junction between substrate 10 and epitaxial layer 12 in the vicinity of P-type region 16. This serves to reduce the field intensity at the junction of region 16 with epitaxial layer 12, thereby further enhancing the reverse breakdown voltage of the transistor. Fig. 2 shows the layout plan of the transistor shown in cross-section in Fig. 1. Such plan is substantially rectangular, but has a finger-like interleaved portion at the lower end thereof to achieve increased effective lengths of the source, gate and drain and, consequently, increased power and lower resistance ratings of the transistor. A cross-section taken at 1-1 in Fig. 2 will be as shown in Fig. 1, and the identifying numerals in Fig. 2 correspond to those in Fig. 1. The drain electrode 28 is surrounded by the gate and source electrodes 24 and 26, which are around the periphery of the layout plan, and has downwardly extending fingers which interleave with upwardly extending fingers of the source and gate electrodes at the bottom of the layout. The source and gate electrodes, and the underlying source zone 14 and gate zone 18 (not visible), are maintained at a constant spacing from drain electrode 28 and the underlying drain zone 20 (not visible) over the entire layout, such spacing being where the drift zone 21 (not visible) exists under the oxide layer 22. A metal contact pad 31 is in electrical contact with source electrode 26. Another metal contact pad 32 is in electrical contact with gate electrode 24, reaching it through a gap provided for that purpose in source electrode 26. A third contact pad 33, for connection to an external high voltage connection bus, is in electrical contact with drain electrode 28. It is clear from Fig. 2 that in order for an external high voltage connection bus in a parallel plane to reach drain contact pad 33, it must cross over the source and gate electrodes and extend over the drift zone. Referring to Fig. 3, there is shown the electric field distribution produced in drift zone 21 of the transistor in Fig. 1 when the drain is at a potential of 500V relative to the source. It is this field distribution that should be preserved despite the presence of the electrical field produced by a high voltage connection bus extending in a parallel plane over drift zone 21 and across gate and source electrodes 24 and 26. Fig. 4 is a projection view of the basic structure of the transistor in accordance with the invention, and elements therein the same as those in Fig. 1 have the same reference numerals. It is seen that on the oxide layer 22 over the drift zone, between gate electrode 24 and drain electrode 28, there is provided a succession of conductive strips 34, 35...n, forming a crossover path between the gate and drain electrodes, such strips extending in a direction transverse to such crossover path. They may be of doped polycrystalline silicon ("polysilicon"), and are floating in potential since they are electrically unconnected. As many such strips as possible should be included in order for each strip to intercept only a substantially constant incremental portion of the changing electric field distribution along the length of drift zone 21, as shown in Fig. 3. The distance between the gate and drain electrodes may typically be about 24 microns, and the minimum width of a polysilicon strip is about 2 microns. Since spacing is necessary between the strips, this leaves room for no more than 10 strips. The significance of such conductive strips can be understood with reference to Fig. 4a, showing the equivalent coupling capacitances which are formed by such strips and the electric field distribution in drift zone 21. Therein, v di is the potential of the drift zone at the ith strip and v pi is the potential of such strip. The capacitance C di between such strip and the underlying portion of the drift zone will therefore be C di = K ls.w s t ax where K is a constant given by the permittivity of the oxide layer 22 over drift zone 21 in Fig. 4, l s and w s are the length and width of the conductive strip, and t ox is the thickness of oxide layer 22. Of course, there will also be coupling capacitances between the successive strips, but these capacitances are relatively small and have little affect on the field distribution. Turning next to Fig. 5, the transistor therein is the same as in Fig. 4 but further includes an external high voltage connection bus 36 extending in a plane parallel to the surface of the transistor and connected to drain electrode 28. A dielectric coating, such as an oxide deposited from a low temperature plasma (LTO), is formed on the conductive strips. The elongated metallic connection bus 36 traverses the crossover path formed by such strips, in contact with the oxide layer thereon. The gate and source electrodes 24 and 26 have a disjuncture therein, as shown, forming a gap which bus 36 traverses. The equivalent coupled capacitance circuit resulting from this configuration is shown in Fig. 5a. Therein, V d is the potential of drain electrode 28 and so is also the potential of bus 36. There are now two coupling capacitances in series between bus 36 and drift zone 21 at each of the conductive strips. Namely, at the ith strip a coupling capacitance C ci between bus 36 and such strip, and a coupling capacitance C di between such strip and drift zone 21. If the potential of the ith strip is denoted v pi and the potential of the portion of drift zone 21 thereunder is denoted v di , the voltage v p between the strip and the drift zone will be v pi -v di and will exist across capacitance C di . If the voltage between bus 36 and the drift zone is denoted V o , it exists across capacitance C ci and C di in series. Consequently, v p = V o C ci C ci + C di = V o 1 1 + C di / C ci It follows that if C ci < < C di , v p will be approximately zero. The capacitance C ci is given by C ci = K W i . w s ti where w i is the width of high voltage bus 33 and t i is the thickness of the coating layer on the conductive strips. Since the bus width w i is much less than the strip length l s , and the thicknesses t ox and t i are approximately equal, comparison of equations (1) and (3) shows that C ci will be much smaller than C di and so from equation (2) v p will be approximately zero. This means that the conductive strips will be substantially at the same potential as the underlying portion of drift zone 21, so that drift zone 21 is effectively shielded from the electric field produced by the connection bus 36. Since the drain potential continuously decreases from V d at the drain electrode to zero at the source electrode, shielding of the drift zone from the high voltage bus will be increasingly effective with an increasing number of conductive strips between the electrodes, as previously noted above. In order to maximize that number the present invention can employ either of two alternative embodiments. The first is to extend the length of the transistor to provide more conductive strips along the path formed thereby between the drain and gate electrodes, and a layout plan in accordance with that embodiment is shown in Figure 6a. The second embodiment, as shown in Figure 6b, is to position the high voltage connection bus at a corner of a rectangular layout plan and to provide a curvilinear shoulder on the adjacent portion of the drain electrode, thereby providing an extended length of the drift zone at such corner without increasing the area of the transistor. Referring to the rectangular layout plan in Figure 6a, the high voltage bus 36 is connected to drain contact pad 33 and traverses a gap in the gate and source electrodes 24 and 26 at the top of the layout where a disjuncture has been provided therein as described above with reference to Figure 5. In addition, the upper portion of the layout has been extended to increase the length of the drift zone in that region, thereby enabling a larger number of conductive strips 40 to be included between gate electrode 24 and drain electrode 28 along the crossover path traversed by connection bus 36. For example, in Figure 6a the drift zone may be 45 microns except in the region at the top of the layout where it has been extended to 75 microns. With a strip width of 2 to 3 microns, this permits about 43 conductive strips in the crossover path followed by the connection bus over the drift zone. In the embodiment in Figure 6b, the high voltage connection bus extends to drain contact pad 33 through a gap at one corner of the gate and source electrodes 24 and 26. By providing a curved shoulder on the opposite portion of drain electrode 28, the length of the drift zone at such corner is considerably increased. Consequently, a lesser or possibly no extension of the layout may still provide enough space between the gate and source electrodes for a sufficient number of conductive strips to achieve adequate shielding of the drift zone from the electric field produced by the connection bus. Figure 7 shows how a disjuncture may be formed in the gate and source electrodes to provide a gap for traversal by the high voltage connection bus. The N-type source 14, which is partially overlapped (over the oxide layer thereon) by both gate electrode 24 and source electrode 26, is terminated slightly before termination of those electrodes, which are co-terminous. This leaves only the P-type channel of gate 18 and the P-type zone 16, of which gate 18 is a contiguous part as shown in Figure 1, to continue across the gap. The N-type drift zone is thereby effectively terminated by the diode junction which exists between it and the P-type zone 16. An oxide coating is deposited on the exposed surfaces of zones 16 and 18, and the sequence of conductive strips 40 is continued across such oxide layer. A high voltage transistor having a substantially rectangular layout plan which is extended as in Figure 6a was constructed with a crossover path of two alternating types of doped polysilicon strips. For the first type, C ci was ₁.55 x 10⁻¹⁵ F and C di was 1.2 x 10⁻¹⁴ F, and for the second type C ci was 1.3 x 10⁻¹⁵ F and C di was 7.6 x 10⁻¹⁴ F. The first series of strips were oxidized after deposition and patterning, enabling the second series to be placed close to or even overlapping the strips in the first series without danger of short-circuiting them. Such transistor also had the following further parameters: drift zone 21:45 microns, extended at the top to 120 microns; oxide layer 22: 0.85 microns thick over drift zone 21; polysilicon strips: 43 strips spaced at 0.25 microns and with an oxide layer thereon of 1 micron; the first type were each 100 microns long and 3 microns wide, and the second type were each 75 microns long and 2.5 microns wide; interconnect bus: a rectangular metal strip 15 microns wide and 1 micron thick. It will be apparent from the above description that the MOS transistor could conceivably have a circular layout plan, but a rectangular or substantially rectangular (such as elliptical) layout is preferable because it can be extended in only a single region. Extension of a circular layout would require an unnecessary increase in the total area of the transistor since an extended length of the drift zone is only necessary along the crossover path traversed by the connection bus. It will also be apparent that the conductive strips are only necessary along such crossover path, rather than over the entire layout plan as had been employed in the prior art publications noted above. While the invention has been described with reference to certain preferred embodiments thereof, it will be apparent to those skilled in the art that various modifications and adaptations may thereof be made without departing from the teachings and scope of the invention as set forth in the ensuing Claims. In particular, various other MOS transistor structures could be employed so long as they have a layout plan in which the drain is surrounded by the source and gate and a charge carrier drift zone exists between the drain and the gate.

Claims: A semiconductor device comprising a high voltage MOS transistor having a source (14), a gate electrode (24) and a drain (20), and a charge carrier drift zone (21) at the surface of the transistor extending from the gate to the drain; the transistor having a closed layout plan such that the drain is laterally surrounded by the gate and source; and comprising respective electrodes (26, 28) for the source, and drain; a dielectric layer (22) covering the drift zone and extending between the gate electrode and the drain electrode; said device being characterized in that: a plurality of unconnected electrically conductive strips (34, 35; 40) are arranged in succession on said dielectric layer (22) so as to form a crossover path between the gate electrode (24) and the drain electrode (28), said strips extending substantially transversely to the direction of said crossover path, and having a further dielectric coating thereon; said gate and source electrodes have a disjunction therein forming a gap through which an elongated high voltage connection bus (36) extends to the drain electrode; said connection bus traversing said crossover path formed by said conductive strips, supported on and in contact with said dielectric coating, each of said strips having a length substantially exceeding the width of said connection bus. A semiconductor device as claimed in Claim 1, wherein said closed layout plan is substantially rectangular, said source and gate being around the periphery thereof. A semiconductor device as claimed in Claim 2, wherein at one end of said layout plan said drain has finger-like extensions which are interleaved with finger-like extensions of said source and gate, thereby increasing the effective lengths of said source, gate and drain. A semiconductor device as claimed in Claim 3, wherein the distance between said drain electrode and said gate electrode is greater at a second end of said rectangular layout plan opposite said one end thereof, said crossover path and said gap in said source and gate electrodes are at said second end of said layout plan so as to provide an increased length of said crossover path, and said connection bus traverses said crossover path and extends through said gap to exit from said transistor at said transistor at said second end of said layout plan. A semiconductor device as claimed in Claim 3, wherein said drain electrode has a curvilinear shoulder adjacent a corner of said layout plan so as to provide at such corner an increased length of said drift zone and of said crossover path between said drain electrode and said gate and source electrodes, said disjunction in the gate and source electrodes is formed therein at said corner, and said connection bus extends over said crossover path and through the gap formed by said disjunction to exit from the MOS transistor at said corner. A semiconductor device as claimed in Claim 1, wherein at said disjunction in the gate and source electrodes a corresponding disjunction is also formed in said source, each end of said disjunction in said gate and source electrodes extends past the corresponding end of said disjunction in said source, and the crossover path formed by said succession of conductive strips continues across said disjunction in said source; said strips supporting said connection bus for traversal of the gap formed by said disjunction in the source and gate electrodes.

Inventors: MCARTHUR DOUGLAS, MULLEN ROBERT, MCARTHUR, DOUGLAS, MULLEN, ROBERT
Applicants: PHILIPS ELECTRONICS NV, PHILIPS ELECTRONICS N.V.
Application year: 1991
Main classification: H01L23
IPC codes: H01L21, H01L29, H01L23