Cleaning equipment

Abstract: In cleaning equipment 30 for cleaning articles to be cleaned 3 such as electric parts, electronic parts, machine parts, optical related parts, resin processed articles, printing screens or the like, cleaning using flammable solvent 11 is made possible, and it is possible to maintain concentration of the cleaning solvent and to prevent the cleaning solvent from being contaminated. Thus, the cleaning is conducted at a low operation cost. For this purpose, any one of steam, steam and nitrogen, and steam and carbon dioxide is supplied to an inlet pass-box and an outlet pass-box for the articles to be cleaned 3. A cleaning chamber 10 and a distillation column 16 are arranged within the cleaning equipment 30. A condenser of the distillation column 16 is connected to the cleaning chamber 10.

Description: The present invention relates to equipment for cleaning articles and their component parts, such as electric parts, electronic parts, machine parts, optical related parts, resin processed articles, and printing screens or the like, by the use of flammable solvent. Conventionally, the cleaning of such articles and parts has involved the use of halogenated organic compounds such as CFC (Chloro Fluoro Carbon), trichloroethane and the like, which are nonflammable. It has been found, however, that these nonflammable solvents are harmful to the global environment in the sense of depletion of the ozone layer or the like. The use of such chemicals as cleaning solvents is thus being discouraged. As alternative cleaning chemicals in place of these nonflammable solvents, there also exist flammable solvents, for example, alcohols such as methanol, ethanol, isopropyl alcohol and the like, ketones such as acetone, methyl ethyl ketone, methyl isobutyl ketone and the like, or petroleum fractions such as benzene, toluene, xylene, naphtha, kerosene or the like. Although these flammable solvents have a superior cleaning ability, they are generally volatile and are easily ignitable. Thus, there is a danger of fire, explosion and the like, if these flammable solvents are used in the cleaning equipment. For this reason, cleaning by the use of such flammable solvents requires preventive measures to stop the equipment from attaining a condition in which combustion of the solvents is possible, by cutting off gas-communication between the cleaning atmosphere within the cleaning equipment and the outside air, or by ensuring that, even if air leaks into the equipment, the air is selectively discharged to the outside of the system, or the like. However, there are no economical and reliable techniques to prevent the equipment from attaining the said condition. Thus, until now, it has not been practical to employ flammable solvents for cleaning. Further, in order to remove unnecessary solids which are deposited in the solvent as a result of the cleaning, it has been common to use a method in which the cleaning solvent recirculated by pump passes through a filter. However, the method is complicated mechanically, and it is difficult to remove contaminant components dissolved in the cleaning solvent. Furthermore, conventional cleaning equipment cannot discharge only contaminant components to the outside while keeping the cleaning solvent confined within the equipment, even if a distillation apparatus were provided in which the cleaning solvent contaminated in the course of cleaning could be regenerated by distillation. Accordingly, the equipment has to be stopped for replacing used solvent with new solvent. For the reasons discussed above, in the case of the conventional equipment, the expense of treating the used solvent and also of purchasing the new solvent increase the running cost, and also there is a possibility that treatment of the used solvent may cause an environmental problem. The invention aims to solve the above-discussed problems. It is an object of the invention to provide cleaning equipment for cleaning articles and their component parts, e.g. electric parts, electronic parts, machine parts, optical related parts, resin processed articles, printing screens or the like, in which the relative concentration of air in the cleaning atmosphere is reduced and the combustion of flammable solvent is effectively prevented, whereby the use of flammable solvents in place of nonflammable solvents such as CFC (Chloro Fluoro Carbon), trichloroethane or the like becomes practical, in which only contaminant components in the cleaning solvent together with condensed water flow out of the distillation column during the separation of cleaning solvent and water by distillation, and in which it is possible to maintain the concentration of the cleaning solvent and to prevent the cleaning solvent from being contaminated, so that the cleaning can be conducted at a low running cost. According to the invention, there is provided an apparatus for cleaning articles such as electric parts, machine parts, resin processed articles or printing screens, with a flammable solvent, said apparatus having at least one pass-box for entry and exit of articles to be cleaned, and a cleaning chamber for cleaning the articles, and being characterised by means for supplying any one of steam, steam and nitrogen, and steam and carbon dioxide to the at least one pass-box whereby the communication of gas between the cleaning atmosphere and the outside air is cut off by said any one of steam, steam and nitrogen, and steam and carbon dioxide, the cleaning chamber being adapted for cleaning the articles with a flammable solvent having a lower boiling point than water, and a distillation column for separating water and the flammable solvent from each other, said cleaning chamber and said distillation column being arranged to receive articles from said at least one pass-box for cleaning and subsequent discharge, said distillation column having a condenser connected to said cleaning chamber so that condensed liquid can be recirculated into said distillation column through said cleaning chamber, the condenser being arranged such that contaminant components removed from the articles to be cleaned are discharged, together with condensed water separated from the flammable solvent by said distillation column, to the outside. The present invention is described further by way of example with reference to the accompanying drawings, in which: Fig. 1 is a diagrammatic view of a first embodiment according to the invention; Fig. 2 is a fragmentary diagrammatic view showing a second embodiment according to the invention; Fig. 3 is a fragmentary diagrammatic view showing a third embodiment according to the invention; Fig. 4 is a diagrammatic view showing a fourth embodiment according to the invention; and Fig. 5 is a diagrammatic view showing a fifth embodiment according to the invention. A first embodiment according to the invention will be described below with reference to Fig. 1. An inlet pass-box 1 allows a plurality of articles 3 that are to be cleaned and that are contained in a basket to pass through a first one of a plurality of shutters 2. Injection nozzles 5 and 6 are arranged respectively at the inlet pass-box 1 and an outlet pass-box 4 through which the articles 3 are removed after completion of the cleaning. Any one of steam, steam and nitrogen, and steam and carbon dioxide can be supplied to, and injected through, each of the injection nozzles 5 and 6 whereby gas-communication between the cleaning atmosphere and the outside air can be cut off. A cleaning chamber 10, containing a flammable solvent of lower boiling point than water, is placed between the inlet pass-box 1 and the outlet pass-box 4. The cleaning chamber 10 may be formed simply by a liquid cleaning tank 12 containing aqueous flammable solvent 11 in which the articles 3 to be cleaned are soaked. Alternatively, the cleaning chamber 10 may be formed simply by a plurality of shower nozzles 13 which perform shower cleaning of the articles 3. As shown in Fig. 1, however, the cleaning chamber 10 is formed by both the liquid cleaning tank 12 to submerge and soak the articles 3 to be cleaned and the shower nozzles 13 for shower cleaning of the articles 3. Thus, effective liquid cleaning of the articles 3 is made possible. Moreover, an ultrasonic oscillator 14 is arranged within the liquid cleaning tank 12 so as to permit ultrasonic-cleaning of the articles 3. Further, a distillation column 16 is connected to the liquid cleaning tank 12 through a liquid line 15 for supplying aqueous flammable solvent 11 contaminated in the cleaning chamber 10 into the distillation column 16. Water is present in the aqueous flammable solvent 11 due to the condensation of the steam supplied from the outside. Moreover, the distillation column 16 is formed with a gas-liquid contact layer 17 for executing gas-liquid contact between the vapor consisting of water and the flammable solvent and the liquid having the same components; a heater section 18 is provided for heating the liquid accumulated at the bottom of the distillation column 16. Stripping steam 20 is introduced into the heating section 18 to evaporate a part of the liquid accumulated at the heating section 18. The vapor rising from the heating section 18 and the liquid flowing downward within the distillation column 16 are brought into gas-liquid contact with each other to enable separation of the condensed water and regeneration of concentrated solvent vapor 21 whose main component is flammable solvent. Furthermore, the distillation column 16 has a top which is connected to a vapor cleaning zone 22 formed in the cleaning chamber 10. In the vapor cleaning zone 22, the articles 3 first cleaned in the aforesaid shower cleaning can be vapor-cleaned by the concentrated solvent vapor 21. Moreover, the distillation column 16 has a condenser 23 which is connected to the vapor cleaning zone 22. The concentrated solvent vapor 21 containing a small amount of air, or steam, steam and nitrogen, or steam and carbon dioxide mixed at the vapor cleaning zone 22, can be introduced into the condenser 23. In order to condense the concentrated solvent vapor 21 from the vapor cleaning zone 22, the condenser 23 is provided with a cooling water inlet 24 and a cooling water outlet 25 for the recirculation of cooling water. Moreover, the condenser 23 is connected to the shower nozzles 13 in the cleaning chamber 10 to enable the aqueous flammable solvent 11 to be returned to the distillation column 16 through the cleaning chamber 10. A vent line 26, which extends to the outside, is connected to the condenser 23. Non-condensable gas accumulated in the condenser 23 is discharged outside through the vent line 26, whereby air that has entered into the equipment can always be discharged to the atmosphere. A dryer zone 27 for the articles 3 is installed between the vapor cleaning zone 22 and the outlet pass-box 4. In order to cut-off gas-communication with the outside air and for thermal drying, steam, steam and nitrogen, or steam and carbon dioxide is supplied to the outlet pass-box 4, by way of the dryer zone 27. Thus, the dryer zone 27 serves as a heat drying source for the articles 3. The steam, steam and nitrogen, steam and carbon dioxide used in the drying is introduced into the heating section 18 of the distillation column 16 and is used as a part of the stripping steam 20, so that energy saving to operate the distillation column 16 is made possible. Furthermore, a plurality of shutters 2, which remain closed except during passage of the articles 3, are arranged respectively at the inlet pass-box 1, the cleaning chamber 10, the dryer zone 27 and the outlet pass-box 4. When the shutters 2 are closed, the entry of the outside air and the escape of vapor within the cleaning atmosphere is prevented. Moreover, for passing the articles 3 from the inlet pass-box 1 to the outlet pass-box 4, it is possible to use a horizontal conveyor such as a belt conveyor, a chain conveyor, a roller conveyor or the like, and a vertical conveyor such as a vertical conveyor, a lifter or the like as desired. In order to clean the articles 3 such as electric parts, electronic parts, machine parts, optical related parts, resin processed articles, printing screens or the like, the articles 3 to be cleaned are first led into the cleaning chamber 10 through the inlet pass-box 1. In order to cut off the communication of gas between the outside and the cleaning atmosphere within the cleaning equipment 30, any one of steam, steam and nitrogen, and steam and carbon dioxide is supplied to the inlet pass-box 1 and to the outlet pass-box 4 during the passage of the articles through those pass-boxes. For this reason, even during entry and exit of the articles 3, it is possible to prevent the outside air from entering the cleaning equipment 30 and to prevent gas containing the flammable solvent from escaping to the outside. Thus, even if air leaks into the interior of the cleaning equipment 30, the partial pressure of such air is reduced. Further, by the discharge of air to the outside of the system by way of the condenser 23 of the distillation column 16, the possibility of combustion of the flammable solvent is prevented and dangers such as fire, an explosion and the like, can also be prevented at low cost. Cleaning of the articles 3 introduced into the cleaning chamber 10 is next performed. First, the articles 3 are submerged in the liquid cleaning tank 12 to be soaked and subjected to ultrasonic vibration by the ultrasonic oscillator 14. Then, the articles 3 are moved to a location under the shower nozzles 13 for shower cleaning with the aqueous flammable solvent 11 from the shower nozzles 13. The cleaning uses a flammable solvent. As the flammable solvent, alcohols such as methanol, ethanol, isopropyl alcohol and the like, ketones such as acetone, methyl ethyl ketone and the like, or petroleum fractions such as benzene, which have a lower boiling point than water, may be used independently. Alternatively, instead of using such flammable solvents independently, a plurality of such flammable solvents may be used. Further, the flammable solvent contains a small quantity of water as condensate from the steam. After the liquid cleaning has been conducted with the aqueous flammable solvent 11, the articles 3 are moved to the vapor cleaning zone 22. Furthermore, the aqueous flammable solvent 11, which has been used and contaminated during the liquid cleaning must be separated from the water in order to prevent the solvent concentration from being reduced by an increase of water due to the condensation of steam with time. For this reason, the aqueous flammable solvent 11 is introduced into the distillation column 16 through the liquid line 15 to remove the condensed water and concentrate the solvent by distillation. Within the distillation column 16, vapor rising from the heating section 18 and falling liquid are in gas-liquid contact with each other at the gas-liquid contact layer 17. As a result of the gas-liquid contact, mass transfer between vapor and liquid occurs due to the difference in the boiling points of the flammable solvent and water. The concentrated solvent vapor 21, which is concentrated by the mass transfer of the flammable solvent, exists at the top of the distillation column 16. The separated condensed water collects at the bottom of the distillation column 16. There is a possibility that a small quantity of flammable solvent is contained in the separated condensed water. However, it is possible to minimize the flammable solvent content in the separated water by appropriate design of the distillation column 16, selection of the operating conditions and the like to such an extent that any drawbacks to the economics and the environment are minimised. Solids and contaminant components are contained in the aqueous flammable solvent 11 used for cleaning. These solids and contaminant components generally have a higher boiling point than water, or are non-volatile and flow downward together with the liquid through the gas-liquid contact layer 17, and finally enter the condensed water at the heating section 18 which is arranged at the bottom of the distillation column 16. Furthermore, if the condensed water within the distillation column 16 is discharged to the outside through a drain pipe 31 which is connected to the heating section 18, it is possible at the same time to remove the solids, contaminant components and the like from the heating section 18 together with the drainage of the condensed water. Since these solids and contaminant components can easily be removed together with the condensed water while concentrating the aqueous flammable solvent 11 by distillation and while confining the flammable solvent within the cleaning equipment 30, complicated apparatus, troublesome or cumbersome operations and the like are not required for their removal. This removal is conducted by the distillation column 16. For this reason, it is possible easily to remove the contaminant components dissolved in the cleaning solvent, which has been difficult by conventional methods using a filter. The concentrated solvent vapor 21 leaving the top of the distillation column 16 is introduced into the vapor cleaning zone 22, and effects vapor cleaning of the articles 3 within the vapor cleaning zone 22. After the vapor cleaning, the articles 3 are moved to the dryer zone 27 for drying. Finally, the articles 3 are conveyed out of the cleaning equipment 30 through the outlet pass-box 4. Thus, a cleaning cycle of the article is completed. The concentrated solvent vapor 21 used in vapor cleaning is introduced into the condenser 23 of the distillation column 16 together with the steam, steam and nitrogen, or steam and carbon dioxide supplied to the inlet pass-box 1 and the outlet pass-box 4, and together with air from the outside that has entered during the conveyance of the articles 3. The concentrated solvent vapor 21, except for non-condensable gas, is cooled and condensed by cooling water in the condenser 23. The aqueous flammable solvent 11 is thus regenerated from the concentrated solvent vapor 21. The regenerated aqueous flammable solvent 11 flows through the shower nozzles 13 of the cleaning chamber 10 for shower cleaning of the articles 3. After the shower cleaning, the aqueous flammable solvent 11 is collected in the liquid cleaning tank 12 and is again recirculated into the distillation column 16. Part of the steam supplied to the inlet pass-box 1 and the outlet pass-box 4 does not enter the condenser 23, but is directly condensed within the cleaning chamber 10 and mixed with the aqueous flammable solvent 11. Accordingly, concentration of the flammable solvent in the liquid cleaning tank 12 is less than condensed liquid from the condenser 23. In this manner, the aqueous flammable solvent 11, which is used for cleaning, is introduced into the distillation column 16 or the condenser 23, so as to be regenerated into the flammable solvent which is clean and which is maintained at predetermined concentration. For this reason, it is unnecessary to wastefully discard much of the contaminated cleaning solvent for replacement with new solvent, in contrast to the conventional cleaning equipment. Thus, economic cleaning is made possible. Further, since the system is closed and the used flammable solvent is not discarded but is reused, it is possible to eliminate a cause of environmental disruption. Furthermore, even if air enters into the inside during the operation of the cleaning equipment 30, air introduced into the condenser 23 is not condensed together with the concentrated solvent steam 21. Accordingly, the air is dispelled through the vent line 26 of the condenser 23. Thus, it is possible to prevent the air from being accumulated or stored within the cleaning equipment 30. As described above, since the vapor and the liquid of the cleaning equipment 30 flow naturally within the equipment by evaporation due to the heating section 18 of the distillation column 16 and by condensation due to the condenser 23, power such as a pump or the like is not necessarily required. Thus, economical cleaning is made possible. In a case where the flammable solvent is not required to be maintained excessively clean, if the distillation column 16 is operated intermittently, excessive distillation due to heating is prevented and economical operation is made possible. The first embodiment is arranged such that the steam supplied to the inlet pass-box 4 is introduced into the dryer zone 27 for heat drying the articles 3. In a second embodiment, as shown in Fig. 2, a heater 32, which uses steam, hot water, heated oil, an electric heater or the like, is arranged at the dryer zone 27, and serves as a dryer heat source for the articles 3. With the arrangement, it is possible to ensure that the articles 3 are dried in a short time. In a third embodiment, as shown in Fig. 3, a blower 33 is connected to the dryer zone 27 so as not to communicate with the outside air. Gas recirculated through the dryer zone 27 by the blower 33 is heated by a heater 34 serving as an outside dryer heat source, and the forced recirculation of the dryer gas further promotes drying. Each of the aforementioned first, second and third embodiments is arranged such that the cleaning equipment 30 comprises both a horizontal conveying unit and a vertical conveying unit, to move the articles 3 in the horizontal direction and in the vertical direction. In a fourth embodiment, however, as shown in Fig. 4, the cleaning equipment 30 is provided only with a horizontal conveying unit except for movement to the liquid cleaning tank 12. With this arrangement, it is possible to stably move the articles 3, and to produce a system which is simple and low in cost. Furthermore, as illustrated in Fig. 4, the heating section 18 of the distillation column 16 is provided with a reboiler 35. With this arrangement, it is possible to reduce the quantity of condensed water accumulated at the heating section 18. Moreover, each of the aforesaid first through fourth embodiments is arranged such that, in the cleaning equipment 30, the inlet pass-box 1 for the articles 3 to be cleaned and the outlet pass-box 4 for the cleaned articles 3 are formed separately. In a fifth embodiment, however, the cleaning equipment 30 comprises a pass-box 36 through which the articles 3 are both carried in and taken out, as illustrated in Fig. 5. If the pass-box 36 is formed in this manner, the pass-box 36 may be simple in construction and can be manufactured at low cost as compared with the case where the inlet pass-box 1 and the outlet pass-box 4 are formed separately. Further, since the articles 3 are carried in and taken out only through the pass-box 36, an intensive monitoring of the equipment can be conducted during cleaning of the articles 3 with the flammable solvent. Thus, safety can be improved. Furthermore, the dryer zone 27 for the articles 3 is installed between the cleaning chamber 10 and the pass-box 36, as shown in Fig. 5. With such arrangement, it is possible to ensure that the articles 3 cleaned in the cleaning chamber 10 are dried quickly or speedily. For this reason, the possibility of taking the articles 3 out to the outside while the flammable solvent remains on the articles 3 can be eliminated. Thus, it is possible to eliminate leakage of the flammable vapor of the solvent to the outside. Preferred embodiments of the invention are described above. In the cleaning equipment for cleaning articles such as electric parts, electronic parts, machine parts, optical related parts, resin processed articles, printing screens or the like, steam, steam and nitrogen, or steam and carbon dioxide for cutting off the communication of gas between the cleaning atmosphere within the cleaning equipment and the outside is/are supplied to the inlet pass-box through which the articles pass on entry thereof and to the outlet pass-box through which the articles pass on exit thereof, or to the single pass-box through which the articles to be cleaned are carried in and out, and the distillation column is arranged thereat for separating the water and the flammable solvent from one another. Accordingly, it is possible to use a flammable solvent for cleaning the articles in place of nonflammable solvent such as CFC, trichloroethane or the like. Even at the entry and exit for the articles to be cleaned, the outside air is prevented from entering the cleaning equipment, and the solvent vapor is prevented from escaping to the outside. Even if the outside air enters the interior, the flammable solvent does not burn because the partial pressure of the air is reduced due to the presence of steam, steam and nitrogen, or steam and carbon dioxide, and the air is dispelled to the outside of the system by way of the condenser of the distillation column. Thus, it is possible to prevent the danger of a fire, an explosion and the like. Further, solid matter and contaminant components, which are removed by cleaning and flow downward in the distillation column, collect with the condensed water at the bottom of the distillation column, and can easily be discharged to the outside of the equipment when the condensed water is drained away. Since the solid matter and contaminant components can easily be drained away with the condensed water, while the flammable solvent is concentrated and confined within the cleaning equipment, complicated apparatus and a troublesome and cumbersome operation and the like are not required for their removal. Furthermore, since the removal is carried out by the distillation column, it is possible to remove the contaminant components dissolved in the cleaning solvent easily by comparison with the conventional method using the filter. Moreover, the flammable solvent used for cleaning is introduced into the distillation column so as to be regenerated and cleaned and maintained at the predetermined concentration. Accordingly, wastage of much of the cleaning solvent, which has been contaminated through use, and replacement with new solvent, is unnecessary by contrast with the conventional cleaning equipment. Thus, low cost cleaning is made possible. Further, since the flammable solvent is not discarded, but is reused, it is possible to eliminate a cause of environmental disruption. Furthermore, since the vapor and the liquid flow naturally within the equipment due to evaporation at the bottom of the distillation column and due to condensation by the condenser, power supplied by a pump or the like is not necessarily required. Thus, economical cleaning is made possible.

Claims: Apparatus for cleaning articles such as electric parts, machine parts, resin processed articles or printing screens, with a flammable solvent, said apparatus having at least one pass-box (1, 4, 36) for entry and exit of articles to be cleaned, and a cleaning chamber (10) for cleaning the articles, and being characterised by means (5, 6) for supplying any one of steam, steam and nitrogen, and steam and carbon dioxide to the at least one pass-box (1, 4, 36) whereby the communication of gas between the cleaning atmosphere and the outside air is cut off by said any one of steam, steam and nitrogen, and steam and carbon dioxide, the cleaning chamber (10) being adapted for cleaning the articles with a flammable solvent having a lower boiling point than water, and a distillation column (16) for separating water and the flammable solvent from each other, said cleaning chamber (10) and said distillation column (16) being arranged to receive articles from said at least one pass-box (1, 4, 36) for cleaning and subsequent discharge, said distillation column (16) having a condenser (23) connected to said cleaning chamber (10) so that condensed liquid can be recirculated into said distillation column (16) through said cleaning chamber (10), the condenser (23) being arranged such that contaminant components removed from the articles to be cleaned are discharged, together with condensed water separated from the flammable solvent by said distillation column, to the outside. Apparatus according to claim 1, characterized in that said at least one pass-box comprises a pass-box (36) for entry and exit of the articles, said cleaning chamber (10) and said distillation column (16) being arranged for receiving the articles from and returning the articles to said pass-box (36). Apparatus according to claim 1 or 2, characterized in that said means (5, 6) for supplying steam is arranged to supply superheated steam. Apparatus according to claim 1, 2 or 3, characterized in that said cleaning chamber (10) is provided with a liquid cleaning tank (12) containing the flammable solvent for soaking said articles. Apparatus according to claim 1, 2, 3 or 4, characterized in that said cleaning chamber (10) is provided with a plurality of shower nozzles (13) for shower cleaning said articles. Apparatus according to any preceding claim, characterized in that said cleaning chamber (10) is formed with a vapor cleaning zone (22), and that steam from said distillation column (16) is introduced into said condenser (23) through said vapor cleaning zone (22) for vapor cleaning of said articles. Apparatus according to any preceding claim, characterized in that a dryer zone (27) for said articles before exit is formed between said cleaning chamber (10) and said at least one pass-box (1, 4, 36). Apparatus according to claim 7 characterized in that said dryer zone (27) is capable of receiving superheated steam, to serve as a dryer heat source for drying the articles. Apparatus according to claim 7 or 8, characterized in that said dryer zone (27) is provided with a heater (32) employing steam, hot water, heated oil, or an electric heater, which serves as a dryer heat source for drying the articles. Apparatus according to claim 7 or 8, characterized in that a blower (33) is connected to said dryer zone so as not to communicate with the outside air, and is arranged such that gas recirculated through said dryer zone by said blower (33) is heated from the outside. Apparatus according to any preceding claim, characterized in that said distillation column (16) is arranged to receive stripping steam to concentrate the flammable solvent and to separate water. Apparatus according to any preceding claim, characterized in that a reboiler (35) is arranged in said distillation column (16) and serves as a heat source to concentrate the flammable solvent and to separate water. Apparatus according to claim 8, characterized in that said dryer zone (27) is arranged so that steam used in said dryer zone (27) can be reintroduced into said distillation column (16) to concentrate the flammable solvent and to separate water. Apparatus according to any preceding claim in operation characterized in that said flammable solvent employs alcohols such as methanol, ethanol, isopropyl alcohol, ketones such as acetone, methyl ethyl ketone, or petroleum fractions such as benzene, which are lower in boiling point than water, independently or in combination. Apparatus according to any preceding claim, characterized in that said distillation column (16) is arranged to be operated intermittently.

Inventors: IKAWA REIJI C O TOKYO SPEC WIR, IKAWA, REIJI C/O TOKYO SPEC. WIRE NETTING CO.LTD.
Applicants: TOKYO SPECIAL WIRE NETTING CO, TOKYO SPECIAL WIRE NETTING CO. LTD.
Application year: 1991
Main classification: C23G5
IPC codes: C23G5