Method of inspecting a mass content of a target material using a multi-channel X-ray image sensor

Abstract: One dimensional X-ray image sensor (3) is comprised of a plurality of unit detecting devices (3u) aligned in a row and a filter (4) which covers a portion thereof and is made of a material having an X-ray absorption coefficient equal to or nearly equal to that of a target material (7,8) to be inspected. Also, an X-ray inspection apparatus including the one dimensional X-ray image sensor is disclosed. It includes further a data processor (28) for correcting measured values using data measured in regard to the filter.

Description: The invention relates to a method of inspecting a mass content of a target material contained in an object to be inspected, the target being made of a material having an X-ray absorption coefficient different from that of other parts of the object. An X-ray inspecting apparatus for measuring a content of a target material using X-ray utilizes the phenomenon that the X-ray absorption coefficient of a target material differs in response to the kind of the target material and the energy of X-ray upon irradiating two kinds of X-rays having different energies to an object. For instance, when high energy and low energy X-rays are irradiated to an object comprised of materials A and B, transmissive intensities I l1 and I h1 of the low energy and high energy X-rays are given as follows. I l1 = I l0 exp(-µ la ρ a T a -µ lb ρ b T b ) I h1 = I h0 exp(-µ ha ρ a T a -µ hb ρ b T b ) Wherein I l0 and I h0 are intensities of the low energy and high energy X-rays irradiated, µ la and µ ha are mass attenuation coefficients of the material A for the low energy and high energy X-rays, respectively, µ lb and µ hb are those of the material B, ρ a and ρ b are densities of the materials A and B, respectively, and T a and T b are thicknesses of the materials A and B, respectively. From these two equations (1) and (2), the following equation is derived. T b × ρ b = { I n(I l0 /I l1 )×µ ha - I n(I ho /I h1 ) ×µ la }/(µ ha µ lb -µ hb µ la ) From the equation, a product of the thickness T b and the density ρ b of the material B, i.e., a content of the material is obtained by measuring I l1 and I h1 . For instance, the materials A and B may be soft tissue and and bone tissue of the human body in bone salt (mineral) analysis, respectively. In this case, an amount of the bone tissue (T b × ρ b ) is obtained according to the equation (3) by measuring the transmissive intensities I l1 and I h1 of the low energy and high energy X-rays. However, the so called beam hardening phenomenon is inevitable in such an analysis using X-rays of different energies as mentioned above. This phenomenon is essentially based on an energy distribution of X-ray irradiated from an X-ray source. Absorption of an X-ray having an energy distribution increases as the energy thereof becomes low and the thickness of a target material increases and, accordingly, lower energy components thereof are attenuated much more than higher energy components thereof in transmission through the target material. Due to this, the effective energy of the X-ray after transmission shifts toward higher energy side as compared to that before transmission. This beam hardening phenomenon gives influences to the mass attenuation coefficients µ ha , µ hb , µ la and µ lb since they are dependent on energies of X-ray beams passing through. Thus, the content obtained using the equation (3) is not exact. From US-A-4,029,963 an X-ray spectral decomposition imaging system is known having an X-ray image sensor for receiving a polychromatic X-ray beam transmitted through an object. The sensor comprises a plurality of detecting devices aligned linearly, and each outputting an electrical signal proportional to the intensity of the beam received. A computer processes the information thus obtained in order to arrive at atomic number-dependent and density-dependent signals. From an article in "Physics in Medicine and Biology", 1985, Vol. 30, No. 11, pages 1251-1256, it is known to provide filter means for correcting the beam hardening effect. The filter means is made of aluminum having a stepped cross-section. Prior to measurement of a target material, the calibration coefficient must be measured by performing measurements of the filter under various conditions. From EP-A-168 090 a system for detecting X-ray energies is known in which a filter is mounted near a slit diaphragm in the path between an X-ray source and the detector tube. The filter blocks relatively low energy X-radiation. It is an object of the present invention to provide a method of inspecting a mass content of a target material contained in an object to be inspected, which corrects for the beam hardening phenomen. It shall be possible to measure the exact content of a target material irrespectively of the thickness of a target. According to the invention, there is provided a method of inspecting a mass content of a target material contained in an object to be inspected, the target being made of a material having an X-ray absorption coefficient different from that of an other part of the object, said method comprising generating, by means of an X-ray generator, at least two kinds of X-rays having different energies to each other and irradiating said X-rays generated to the object, receiving X-rays passed through the object by means of a multi-channel X-ray image sensor having a plurality of X-ray unit detecting devices aligned linearly, each of which outputting an electric signal proportional to an intensity of the X-rays received thereby, and a filter means being arranged between the object and said multi-channel X-ray image sensor to cover some of said plurality of X-ray unit detecting devices so that, during the measurement of said target material, X-rays transmitted through the part only are detected by X-ray unit detecting devices covered by said filter means, and X-rays transmitted through both the part and said target are detected by X-ray unit detecting devices not covered by said filter means, said filter means being comprised of a plate-like member having a predetermined thickness and made of a material having an X-ray absorption coefficient equal to or near to that of the target material to be inspected, calculating a correction coefficient by means of a data processing means, using the outputs from said X-ray unit detecting devices covered by said filter means, calculating a mass content of said target material by means of said data processing means, using the outputs from said X-ray unit detecting devices not covered by said filter means, and correcting, by means of said data processing means, the mass content calculated, using the correction coefficient to obtain a real mass content of said target material. Preferable embodiments are defined in the dependent claims. These and other objects and features of the present invention will become clear from the following description taken in conjunction with the preferred embodiments thereof with reference to the accompanying drawings throughout which like parts are designated by like reference numerals, and in which: Fig. 1 is a schematical view showing a composition of an X-ray inspection apparatus for carrying out the method of the present invention, Fig. 2 is a schematical perspective view of the X-ray inspection apparatus installed to a bed and Fig. 3 is a cross-sectional view of Fig. 2. Fig. 1 shows an X-ray inspection apparatus for analyzing the bone salt regarding a bone tissue 7 such as a backbone of a human body 8 comprised of the bone tissue 7 and a soft tissue 9. Under the human body 8, there is arranged an X-ray image sensor 3 being comprised of a linear array of a plurality of unit detecting devices 3u and a plate-like filter 4 arranged so as to cover a portion of the linear array. Above the human body 8, an X-ray generator 5 such as a cathode ray tube is arranged and irradiates X-ray beams generated, via a K-edge filter 24, to the human body 8. The K-edge filter 24 is made of, for instance, Nd and allows two kinds of X-ray beams splitted to have high and low effective energies to pass therethrough. For instance, when applied a tube voltage of 80kV to the X-ray generator 5, X-ray beams having effective energies of 70keV and 43keV, respectively, are irradiated to the human body 8 through the K-edge filter 24. Each unit detection device 3u is comprised of a CdTe radiation detector of pulse counting type having a predetermined small detection area. An output therefrom is amplified by a preamplifier 25, is discriminated into signals of high and low levels by a pulse amplitude discriminator 26 and respective numbers of pulses of high and low levels discriminated are counted by a counter circuit 27. Respective count numbers are outputted to a data processor 28 such as a microprocessor and the data processor 28 processes data inputted to obtain the bone salt as will be explained hereinbelow. Results obtained are displayed by a display 29. Intensities I h0 and I l0 of the high energy and low energy X-rays to be irradiated are measured beforehand by the image sensor 3 in absence of the human body. I. Calculation of correction coefficient for correcting influences due to the beam hardening effect Intensities I h1f and I l1f of the high energy and low energy X-rays having passed through the soft tissue 9 and the filter 4 are detected by the unit detection devices 3u covered by the filter 4. The filter 4 is an Al plate of a thickness of 1cm in the present embodiment. The mass attenuation coefficient of Al is 0.567cm²/g for 40keV X-ray and is 0.203cm²/g for 80keV X-ray. That of the bone is 0.512cm²/g for 40keV X-ray and is 0.209cm²/g for 80keV X-ray. An apparent mass content (T f ×ρ f ) of the filter 4 is obtained according to the following equation. T f × ρ f = { I n(I l0 /I l1f )×µ ha - I n(I h0 /I h1f ) ×µ la }/(µ ha µ lf -µ hf µ la ) wherein µ la and µ lf : mass attenuation coefficients of the soft tissue and the filter for the low energy X-ray, respectively, µ ha and µ hf : mass attenuation coefficients of the soft tissue and the filter for the high energy X-ray, respectively, ρ a and ρ f : densities of the soft tissue and the filter, respectively, T a and T f : thicknesses of the soft tissue and the filter, respectively, The mass content of the filter 4 obtained is shifted from the true value by the beam hardening effect, as stated above. Since the density and the thickness of the filter 4 is known beforehand, the true value of the mass content of the filter 4 is easily obtained from these. Accordingly, the correction coefficient K₁ for compensating the beam hardening effect is obtained as follows K₁ = T f × ρ f (true value)/T f × ρ f (measured value) II . Calculation of Bone salt. Intensities I h1b and I l1b of the high energy and the low energy X-rays having passed through the soft tissue 9 and the bone tissue 7 are also detected by the unit detecting devices 3u uncovered by the filter 4. An apparent mass content of the bone 7 i.e. bone salt is obtained according to the equation (3) by equating I l1 and I h1 to I lb and I h1b , respectively. Namely, T b × ρ b = { I n(I₁₀/I l1b )×µ ha - I n(I h0 /I h1b )×µ la }/(µ ha µ lb -µ hb µ la ) Since the mass content of the filter 4 is chosen so that it is nearly equal to that of the bone tissue 9, the most probable value of the bone salt is obtained by correcting the measured value with the correction coefficient K₁ calculated beforehand. Namely, it is obtained as follows. T b × ρ b (most probable) = K₁×T b ×ρ b (measured) III. Sensitivity correction for each unit detecting device. Prior to the measurement of the bone salt, the X-ray to be irradiated is detected by all the unit detecting devices of the X-ray image sensor without the human body and in a state that the filter is removed. The sensitivity of each unit detecting device 3u can be corrected from a shift amount of a measured count number thereof from a mean value obtained by averaging all measured count numbers. Respective correction coefficients thus obtained are inputted from a data entry section 30 such as a key board to the data processor 28 beforehand. Count numbers outputted from respective unit detecting devices are corrected using these correction coefficients, respectively, and thereby, the accuracy of measurement is highly improved. Though an Al plate is used for the filter 4 in the above embodiment, materials equivalent to the bone tissue such as calcium carbonate, kalium hydrogenphosphate, potassium iodide and the like are available therefor. Further, the unit detecting device is not limited to the CdTe radiation detector and semiconductor radiation detectors made of Si, Ge, GaAs and the like, scintillation detector, ion chamber detector and the like are available therefor. Also, various known ways to generate X-rays having different energies are available other than the K-edge filtering method. Fig. 2 shows an example of the bone salt analyzing system. A carrier box 31 is arranged under a bed 37, which is movable in a lengthwise direction 36 of the bed 37 and is driven by a driving means 35. Though a concrete composition of the driving means 35 is not shown in Fig. 2, a suitable known mechanism such as a linear motor can be employed to drive the carrier box 31. The carrier box 31 provides an X-ray image sensor 3 on the upper surface thereof which is arranged in a direction of the width of the bad and carries a driving means 33 for moving a filter 4 along the X-ray image sensor 3. Above the bed 37, an X-ray generator 5 is supported by an arm 32 fixed to the carrier box 31 so that the X-ray generator 5 is moved together with the X-ray image sensor 3. The X-ray generator 5 provides with a K-edge filter 24 for generating high and low energy X-rays. Prior to a measurement of the above salt, the filter 4 is moved to a position whereat all unit detecting devices are uncovered thereby to detect the sensitivity of each unit detecting device, By irradiating the high and low energy X-rays to the X-ray image sensor 3 in absence of a human body, each of outputs from the unit detecting devices is read out as a count number. Assuming that I li and I hi are count numbers of i-th unit detecting device for the low and high energy X-rays and I l ave and I h ave mean values averaged over all count numbers I li and I hi , respectively, respective correction factors K 2li and K 2hi of i-th unit detecting device for the low and high energy X-rays are given as follows. K 2li = I li /I l ave K 2hi = I hi /I h ave Sensitivities of respective unit detecting devices are corrected using correction factors obtained according to the equations (8) and (9), namely, an output of i-th unit detecting device is corrected using K 2li and K 2hi by the data processor 28. Calculation of the mean values and correction factors is done in the data processor 28 and data obtained by the calculation are stored therein to correct outputs from individual unit detecting devices upon measuring the bone salt. Upon starting the measurement, a human body is set on the bed 37 and the filter 4 is moved to cover some of the unit detecting devices lying under a part of the human body including only the soft tissue thereof. Thereafter, the X-ray generator 5 is energized to generate the high and low energy X-rays and the X-ray image sensor 3 receives X-rays passing through the human body 8. The most probable value of the bone salt is calculated by the data processor 28 according to the method as explained regarding Fig. 1. To measure the bone salt along a length of the bone, the X-ray image sensor 3 and the X-ray generator 5 is scanned in the lengthwise direction of the bed 37 by driving the carrier box 31 by the driving means 35 therefor. It is to be noted that a time-dependent fluctuation of the intensity of X-ray is also compensated by the present invention since the correction coefficient K₁ obtained using the filter 4 upon every measurement includes influences due to the time-dependent fluctuation. Thus, the bone salt obtained finally is free form the beam hardening effect, deviations of the sensitivity of each unit detecting device and the time-dependent fluctuation of the intensity of X-ray and, accordingly, represents the real value exactly. In the preferred embodiment, the present invention is applied to the bone salt analysis but is not limited to this and, for instance, is applicable for measuring a content of Cu contained in a plastic material. In this case, the material for the filter is Cu.

Claims: Method of inspecting a mass content of a target material (7) contained in an object (8) to be inspected, the target (7) being made of a material having an X-ray absorption coefficient different from that of an other part (9) of the object (8), said method comprising: generating, by means of an X-ray generator (5), at least two kinds of X-rays having different energies to each other and irradiating said X-rays generated to the object (8); receiving X-rays passed through the object (8) by means of a multichannel X-ray image sensor (3) having a plurality of X-ray unit detecting devices (3u) aligned linearly, each of which outputting an electric signal proportional to an intensity of the X-rays received thereby, and a filter means (4) being arranged between the object (8) and said multi-channel X-ray image sensor to cover some of said plurality of X-ray unit detecting devices (3u) so that, during the measurement of said target material (7), X-rays transmitted through the part (9) only are detected by X-ray unit detecting devices (3u) covered by said filter means (4), and X-rays transmitted through both the part (9) and said target (7) are detected by X-ray unit detecting devices (3u) not covered by said filter means (4), said filter means (4) being comprised of a plate-like member having a predetermined thickness and made of a material having an X-ray absorption coefficient equal to or near to that of the target material (7) to be inspected; calculating a correction coefficient (K₁) by means of a data processing means (28), using the outputs from said X-ray unit detecting devices (3u) covered by said filter means (4); calculating a mass content of said target material (7) by means of said data processing means (28), using the outputs from said X-ray unit detecting devices (3u) not covered by said filter means (4); and correcting, by means of said data processing means (28), the mass content calculated, using the correction coefficient (K₁) to obtain a real mass content of said target material (7). Method as claimed in claim 1 in which said filter means (4) is movable along the alignment of said unit detecting devices (4u). Method as claimed in claim 1 or 2 in which said filter means (4) is made of a material having an X-ray absorption coefficient equal to or near to that of a biological bone tissue (7). Method as claimed in claim 1, in which said filter means (4) is moved relatively to said multi-channel X-ray image sensor (3). Method as claimed in claim 4, in which said X-ray generator (5) and said X-ray image sensor (3) are supported by a carrier (arm 32) so as to oppose to each other, and said carrier (32) being movable at least in one direction. Method as claimed in claim 4, in which said filter means (4) is moved in such a manner so as not to cover any portion of said multichannel X-ray image sensor (3) prior to an inspection measurement of said target material (7), in order to obtain data regarding sensitivities of the individual unit detecting devices 3u of said multi-channel X-ray image sensor (3). Method as claimed in claim 1 in which said filter means (4) is made of a material having an X-ray absorption coefficient equal to or near to that of the human bone (7).

Inventors: BABA SUEKI, OHMORI KOUICHI, OHTSUCHI TETSURO, TSUTSUI HIROSHI, BABA, SUEKI, OHMORI, KOUICHI, OHTSUCHI, TETSURO, TSUTSUI, HIROSHI
Applicants: MATSUSHITA ELECTRIC IND CO LTD, MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
Application year: 1991
Main classification: H05G1
IPC codes: G01N23, H05G1