A semiconductor memory device with an internal voltage generating circuit

Abstract: A semiconductor memory device (600) receives an external control signal (K) repeatedly generated independently of an access to the memory device. The memory device includes an internal voltage generator (800; 900; 891;898) for generating a desired internal voltage in response to the control signal. The internal voltage generator includes a charge pump circuit (811; 830; 831; 920) responsive to the control signal. The internal voltage may provide a negative voltage such as a substrate bias voltage, or may be a positive voltage boosted over an operating power supply voltage and used as a boosted word line drive signal. This scheme eliminates an oscillator for generating a repeated clock signal to the charge pump circuit, leading to reduced current consumption and reduced chip area for the semiconductor memory device.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to circuitry for generating an internal voltage for use in a semiconductor memory device, and more specifically to circuitry for generating an internal voltage for use in a semiconductor memory device including a dynamic random access memory (DRAM) having a large storage capacity serving as a main memory and a static random access memory (SRAM) having small storage capacity serving as a cache memory integrated on the same semiconductor chip. Description of the Background Art Fig. 1 schematically shows a whole structure of a semiconductor memory device comprising a substrate bias voltage generating circuit. The semiconductor memory device 950 shown in Fig. 1 comprises a memory array 951 including a plurality of memory cells, sense amplifiers and the like, and a peripheral circuitry 952 for controlling access to memory array 951. Peripheral circuitry 952 includes an address buffer, an address decoder, a control signal generating circuit for generating an internal clock signal for determining various operation timings, and so on. Semiconductor memory device 950 further comprises a substrate bias generating circuit 953 for applying a prescribed bias potential Vbb to a semiconductor chip substrate on which the semiconductor memory device 950 is formed. When the semiconductor substrate on which the semiconductor memory device is to be formed is formed of a P type semiconductor, the substrate bias voltage Vbb from substrate bias generating circuit 950 biases the semiconductor substrate to a prescribed negative potential. The substrate potential is made stable by substrate bias voltage, so as to stabilize threshold voltages of MOS transistors (insulated gate field effect transistors), to prevent capacitance coupling of signal lines and substrate, and to reduce junction capacitance of the MOS transistors. An on-chip substrate bias generating circuit generally has such a structure as shown in Fig. 2. The substrate bias generating circuit 953 shown in Fig. 2 includes an oscillating circuit 955 for generating clock signals at a prescribed period, and a charge pump circuit 956 generating substrate voltage Vbb by a, charge·pump operation in response to the clock signals from the oscillating circuit 955. Oscillating circuit 955 is formed by a ring oscillator, including an odd number of stages of cascade connected inverter circuits. Consequently, the area occupied by oscillating circuit 955 is increased, which prevents reduction in area of occupation of the substrate bias generating circuit. Especially in a semiconductor memory device containing a cache having a DRAM and a SRAM integrated on the same substrate, the area of occupation by the internal circuit should be reduced as much as possible. It is difficult to provide a CDRAM occupying small area. Since oscillator circuit 955 oscillates constantly, current is consumed by the oscillating operation, and therefore current consumption of the semiconductor memory device can not be reduced. Boosting voltage in boosted word line scheme is another one of such internal voltages. A memory cell of a DRAM generally has such a structure as shown in Fig. 3. Referring to Fig. 3, a DRAM cell includes a memory cell capacitor Cm for storing information in the form of charges, and a memory cell transistor Tm responsive to a signal potential on a word line DWL for connecting memory cell capacitor Cm to a bit line DBLa. One electrode (cell plate) of capacitor Cm is connected to a prescribed potential Vsg. Transistor Tm is formed of a MOS transistor. Generally, an MOS transistor can transmit only a voltage applied to the gate minus the threshold voltage Vth thereof. For example, when the word line DWL is at 5V when it is selected and the threshold voltage of the transistor Tm is 1V, the maximum voltage stored in capacitor Cm is 4V. In order to prevent reduction of the stored voltage in capacitor Cm due to the threshold voltage of the transistor Tm, a boosted word line scheme for boosting voltage of the word line DWL to be higher than the supply voltage is generally used. The boosted word line scheme is generally used for surely storing sufficient signal charges in the capacitor Cm when operational supply voltage of DRAM becomes as low as 3.3V, for example, other than 5V power supply voltage scheme. Fig. 4 shows an example of a circuit structure for boosting the word line. Referring to Fig. 4, a circuit generating a word line driving signal x includes a boosting circuit 961 for generating a prescribed boosting voltage which is higher than the supply voltage, and a row decoder 962 for decoding an internal address ADD, selecting a corresponding word line, and for transmitting a boosting signal from boosting circuit 961 as a word line driving signal x to the selected word line. A boosting signal from booster circuit 961 is generally boosted at a restore (rewriting) of a memory cell, not initially at the driving of the word line. Fig. 5 shows an example of a specific structure of the boosting circuit shown in Fig. 4. The structure of the word line boosting circuit shown in Fig. 5 is disclosed in, for example, Japanese Patent Laying-Open No. 62-212997. Referring to Fig. 5, boosting circuit 961 includes three stages of cascade connected inverters VN4, VN5 and VN6 receiving an internal control signal rasA, providing a prescribed delay and generating a control signal dr1, and three stages of cascade connected inverters VN1, VN2 and VN3 for providing a delay to the control signal rasA, inverting the same and for generating an internal control signal dr2. The delay time provided by the inverters VN1 to VN3 is longer than that of the inverters VN4 to VN6. The boosting circuit 961 further includes a boost capacitance Cp1 for generating a boosted voltage, and transistors TQ5 to TQ11 responsive to the control signal dr2 and to a precharge signal PC for applying a boosting designating signal to boost capacitance Cp1. Transistors TQ5 and TQ6 receive the control signal dr2 at their gates. Transistor TQ5 is turned on when the control signal DR2 is at "L" and transmits the operational supply voltage Vcc. Transistor TQ6 receives a constant voltage at its gate from transistors TQ7 and TQ8 and it is kept constantly on, and it limits level of the voltage transmitted from transistor TQ5 and transmits the same to an input side electrode of the capacitance Cp1. Transistor TQ9 holds the input side electrode of the capacitance Cp1 at the ground potential until the control signal dr2 is applied. Transistors TQ10 and TQ11 are turned on in response to the precharge signal PC, and surely hold the output node (drain electrode) of the transistor TQ5 and the input side electrode of capacitance Cp1 at the ground potential. Transistor TQ7 and TQ8 are diode connected and connected in reverse parallel to each other. Transistor TQ7 clamps gate voltage of transistor TQ6 at VC-Vth. Transistor TQ8 clamps gate voltage of transistor TQ6 at VC+Vth. The reference character Vth represents threshold voltage of transistors TQ7 and TQ8. A constant voltage VC is generated by diode connected transistors TQ15 to TQ18 provided in series between supply voltage Vcc and the ground potential. Since conductance of transistor TQ15 is sufficiently smaller than that of the transistors TQ16 to TQ18, the constant voltage VC is provided as VC=3Vth. The boosting circuit 961 further includes a transistor TQ1 for precharging an electrode of the output side of boost capacitance Cp1 at a prescribed potential, and transistors TQ2 to TQ4 responsive to control signal dr1 for generating word line driving signal x. Transistor TQ1 is turned on in response to a precharge signal PC and precharges the output side electrode of capacitance Cp1 at the supply potential Vcc. Transistor TQ2 transmits output side voltage of boost capacitance Cp1 and generates boosted word line driving signal x when control signal dr1 is set to the on state because its source is connected to the substrate. Transistor TQ3 is turned on in response to "H" of control signal dr1 and makes the word line driving signal x fall to "L" through the normally on transistor TQ4. Supply voltage Vcc is applied to the gate of transistor TQ4 to prevent application of boosted voltage to the drain of transistor TQ3. The operation will be described in the following with reference to Fig. 6, which is a diagram of waveforms. If the DRAM is in the non-selected state, the precharge signal PC is at "H" and the internal control signal rasA is at "L". The control signal rasA is a control signal of a positive logic generated internally in response to an external row address strobe signal/RAS. In the precharge state, transistors TQ1, TQ9 and TQ10 are on, and the output side electrode of the boost capacitance Cp1 is precharged to Vcc-Vth. The input side electrode of boost capacitance Cp1 is discharged to the ground potential. The word line driving signal x is discharged to "L" by transistors TQ4 and TQ3. When the signal/RAS falls to "L" and the DRAM is set to a selected state, precharge signal PC attains to "L", and control signal rasA rises to "H". First, transistor TQ1 is turned off, and the output side electrode of boost capacitance Cp1 is set to a floating state at a potential of Vcc-Vth. Transistors TQ10 and TQ11 are turned off. In response to the rise of the control signal rasA to "H", the control signal dr1 falls to "L". Consequently, transistor TQ2 is turned on and transistor TQ3 is turned off. Since transistor TQ2 is turned on, word line driving signal x rises to a high level (Vcc-Vth) in accordance with the precharge voltage (Vcc-Vth) of boost capacitance Cp1. The word line driving signal x is transmitted to the word line selected through the row decoder, and thereafter sensing operation and so on are carried out. Thereafter, when control signal dr2 falls to "L", transistor TQ9 is turned off, transistor TQ5 is turned on, and voltage Vcc is transmitted to one electrode of the transistor TQ6. Gate voltage of transistor TQ6 rises from supply voltage Vcc from transistor TQ5 (self bootstrap operation), but is clamped by transistor TQ8 at a voltage VC+Vth. The voltage VC is lower than supply voltage Vcc. Accordingly, voltage transmitted to the input side electrode of boost capacitance Cp1 is the constant voltage VC. By the voltage VC applied to the boost capacitance Cp1, the voltage at the output side electrode thereof attains to the precharge voltage Vcc-Vth+VC. The boosted voltage of boost capacitance Cp1 is transmitted as the word line driving signal x through transistor TQ2. Since the substrate and the source of transistor TQ2 are connected, the boosted level of boosted word line driving signal x becomes Vcc-Vth+3·Vth, that is, Vcc+2·Vth, when the voltage VC is 3·Vth. As described above, by boosting the word line driving signal x to be higher than the level of the supply voltage Vcc, sufficient charges are stored in the memory cell capacitor without signal loss, and during reading of data, charges stored in the capacitor Cm can be transmitted at high speed to the bit line DBLa. However, if such a boosting circuit for generating a word line boosting signal is provided, chip area of the semiconductor memory device can not be reduced, since such a circuit includes a number of transistor elements, a complicated circuit structure, and the boosting circuit having small area of occupation can not be formed. In this boosting circuit, in order to hold the boosted level of the boosted word line driving signal, an oscillating signal is applied to an input side electrode of another boosted capacitance, and charges supplied from an output side electrode of this boost capacitance are supplied to an output terminal of transistor TQ2 through a diode connected transistor. By the charges supplied from this separate boost capacitance, lowering of the boosted level due to leak current of the word line driving signal x can be prevented. However, since an oscillating signal is used in this case, an oscillating circuit for supplying the oscillating signal is further provided. As in the above described substrate bias generating circuit, the power consumption is increased, and the area of occupation of the boosting circuit is increased. Therefore, the semiconductor memory device having higher degree of integration can not be provided. The present invention aims to provide a semiconductor memory device having an improved internal voltage generating circuit. The present invention is applicable to provide a semiconductor memory device containing a cache having high degree of integration and low power consumption. The present invention is further applicable to provide a clock synchronized type semiconductor memory device having an internal voltage generating circuit of low current consumption with small area of occupation. EP 0030244 discloses a MOS device with a substrate-bias generating circuit in which an external clock signal is applied during the standby period of the device to an on-chip clock generator which generates an internal clock signal for changing the substrate bias voltage. "Digital Control of Substrate Voltage" in IBM Technical Disclosure Bulletin, vol. 28, no. 9, Feb 1986, pages 3961-3962 discloses a chip in which an external system clock frequency is compared with the oscillation frequency of an on-chip ring oscillator. The ring oscillator represents a circuit forming an internal critical path and its oscillation frequency is related to the performance of the chip. The substrate bias voltage generator is controlled based on the result of the comparison to increase or decrease its output. SUMMARY OF THE INVENTION According to a first aspect of the invention, there is provided a semiconductor memory device comprising memory storage means; control means for receiving external signals including an external clock signal and external control signals; and voltage generating means for generating an internal voltage for use in said semiconductor memory device in response to said external clock signal; characterised in that said control signals define access and standby states of the memory storage means; and said voltage generating means is responsive to receipt of the external clock signal irrespective of whether the device is in the access state or the standby state to generate, without use of an on-chip oscillator, said internal voltage for said device from said external clock signal. According to a further aspect of the invention, there is provided a method of operating a semiconductor memory device comprising the steps: applying external signals including an external clock signal and external control signals to the semiconductor memory device; and generating an internal voltage for use in said semiconductor memory device in response to said external clock signal; characterised in that said control signals define access and standby states of the memory storage means of the device; said external clock signal is applied irrespective of whether the device is in the access or standby state, and in that said generating step generates, without use of an on-chip oscillator, said internal voltage from said external clock signal. An embodiment of the present invention provides a semiconductor memory device having an internal voltage generating circuit capable of generating desired internal voltage with small area of occupation. An embodiment of the present invention provides a semiconductor device capable of generating desired internal voltage with low current consumption. An embodiment of the present invention provides a semiconductor memory device containing a cache having high degree of integration and low power consumption. An embodiment of the present invention provides a clock synchronized type semiconductor memory device having an internal voltage generating circuit of low current consumption with small area of occupation. The semiconductor memory device in accordance with an embodiment of the present invention includes an internal voltage generating circuit for generating a desired internal voltage in response to an externally applied control signal. The external control signal is repeatedly generated no matter whether the semiconductor memory device is accessed or not. By using external control signals repeatedly applied, an oscillating circuit or the like become unnecessary, and therefore an internal voltage generating circuit which has simple circuit structure and small area of occupation can be provided. In addition, since an oscillating circuit for generating oscillating signals becomes unnecessary, current consumption is reduced. The foregoing and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 schematically shows a whole structure of conventional semiconductor memory device having an on chip substrate bias generating circuit. Fig. 2 shows specific structure of the substrate bias generating circuit shown in Fig. 1. Fig. 3 shows a structure of a general DRAM memory cell. Fig. 4 shows a conventional circuit structure for generating a boosted word line driving signal. Fig. 5 shows an example of a specific structure of a conventional boosted word line driving signal generating circuit. Fig. 6 is a diagram of signal waveforms showing the operation of the circuit shown in Fig. 5. Fig. 7 is a block diagram showing functionally an overall structure of a semiconductor memory device according to an embodiment of the present invention. Fig. 8 is a block diagram showing relation of input and output signals of an internal voltage generating circuit in accordance with one embodiment of the present invention. Fig. 9 is a block diagram showing an example of a specific structure of an internal voltage generating circuit shown in Fig. 8. Fig. 10 shows one example of a specific structure of a buffer circuit shown in Fig. 9. Fig. 11 shows one example of a specific structure of a charge pump circuit shown in Fig. 9. Fig. 12 shows another structure of a charge pump circuit. Fig. 13 shows another structure of an internal voltage generating circuit shown in Fig. 8. Fig. 14 shows an example of a specific structure of a dividing circuit shown in Fig. 13. Fig. 15 is a block diagram showing another relation between input and output signals of the internal voltage generating circuit. Fig. 16 shows one example of a specific structure of the internal voltage generating circuit shown in Fig. 15. Fig. 17 shows one example of a specific structure of a switch circuit shown in Fig. 16. Fig. 18 shows another structure of the internal voltage generating circuit shown in Fig. 15. Fig. 19 shows an internal voltage which is higher than the supply voltage, and a structure for generating an internal signal unitizing the internal voltage. Fig. 20 shows one example of a specific structure of the charge pump circuit used in the internal voltage generating circuit shown in Fig. 19. Fig. 21 shows an example of a specific structure of the switch circuit shown in Fig. 19. Fig. 22 shows another structure of a semiconductor memory device including the internal voltage generating circuit of an embodiment. Fig. 23 shows a further structure of a semiconductor memory device having the internal voltage generating circuit in accordance with an embodiment. DESCRIPTION OF THE PREFERRED EMBODIMENTS [Array Structure] Fig. 7 schematically illustrates an overall structure of a semiconductor memory device according to an embodiment of the present invention. The semiconductor memory device shown in Fig. 7 comprises an SRAM as a fast access memory and a DRAM as a large storage capacity memory integrated on a common single semiconductor chip to provide a cache containing semiconductor memory device (CDRAM). Referring to Fig. 7, a CDRAM includes a DRAM 100 and a SRAM 200. DRAM 100 comprises a 4M bit DRAM array 101; a DRAM row decoder block 102 for decoding an applied internal row address for the DRAM and for selecting 4 rows from DRAM array 101; a DRAM column decoder block 103 for decoding applied internal column address for DRAM and for selecting one column from each of the selected 4 rows in a normal operation mode (array access; an access to DRAM); and a block 104 including DRAM sense amplifiers DSA for detecting and amplifying data of the memory cells connected to the selected rows, and selecting gates SG responsive to a column selecting signal from block 103 for selecting 16 bits of DRAM array 101 in a data transfer mode and for selecting 4 bits of memory cells in an array access mode. SRAM 200 comprises an SRAM array 201 having the capacity of 16K bits; a SRAM row decoder block 202 for decoding an internal row address for the SRAM and for selecting 4 rows from SRAM array 201; and a column decoder/sense amplifier block 203 including SRAM column decoders and SRAM sense amplifiers for decoding the internal column address for the SRAM, selecting 1 bit from each of the selected 4 rows and connect the same to an internal data bus 251, and for detecting and amplifying information of the selected SRAM cells in data reading. A bi-directional transfer gate circuit 210 is provided between DRAM 100 and SRAM 200. Referring to Fig. 7, the gate circuit 210 may be connected to an output (input) of the column decoder/sense amplifier block 203. However, in Fig. 7, data input/output to and from DRAM 100 are carried out through the common data bus 251 and bidirectional transfer gate circuit 210 (this structure will be discussed later) in the array access mode, and therefore the common data bus 251 is shown as coupled to bi-directional transfer gate circuit 210. The CDRAM further comprises a control clock buffer 250 receiving externally applied control signals or an output enable signal G#, a write enable signal W#, a chip select signal E#, a cache hit signal CH#, a cache inhibit signal CI#, a refresh signal REF# and a command register CR# to generate internal control signals G, W, E, CH, CI, REF and CR; an address buffer 252 for generating internal address int-Aa for the DRAM and an internal address int-Ac for the SRAM; and a clock buffer 254 for buffering an externally applied clock signal K. Control clock buffer 250 takes in an applied control signal and generates an internal control signal in response to a rise of an internal clock from clock buffer 254. An output from clock buffer 254 is also applied to address buffer 252. Address buffer 252 takes in an externally applied addresses Aa and Ac which are applied when the internal chip select signal E is active at a rising edge of the clock K from the clock buffer 254 and generates internal addresses int-Aa and int-Ac. The CDRAM of Fig. 7 further comprises a counter circuit 256 which is activated in response to internal refresh designating signal REF for generating a refresh address of the DRAM array; and an address multiplex circuit 258 for applying either a refresh address from counter circuit 256 or an internal row address from address buffer 252 to DRAM row decoder block 102 in response to the internal refresh designating signal REF. The CDRAM further comprises a DRAM array driving circuit 260 responsive to the internal control signals E, CH, CI, W and REF for generating various control signals for driving DRAM 100; a transfer gate controlling circuit 262 responsive to the internal control signals E, CH and CI for generating signals for controlling transfer operation of bi-directional transfer gate circuit 210; and a SRAM array driving circuit 264 responsive to internal chip select signal E for generating various control signals for driving SRAM 200. When the refresh designating signal is generated, DRAM array driving circuit drives or activates only circuitry related to row selection in DRAM array. Transfer gate controlling circuit 262 may be so structured to disable the bi-directional transfer circuit 210 to isolate the SRAM array 201 and DRAM array 101 from each other upon generation of the refresh designating signal REF. The CDRAM in accordance with the present invention further comprises a command register 270 which is activated in response to an internal control signal CR for generating a command CM for designating operation mode of the CDRAM in response to external write enable signal W# and to command addresses Ar (Ar0 and Ar1); a data. input/output control circuit 272 for controlling data input/output in accordance with the internal control signals G, E, CH, CI and W and to the special mode command CM; an input/output circuit 274 including an input/output buffer and an output register for inputting/outputting data between common data bus 251 and an outside of the device. An output register is provided in the input/output circuit 274 for realizing a latched output mode and a register output mode, which are the special modes of the CDRAM. Data input/output control circuit 272 sets input/output timing of data in accordance with the mode designated by the special mode command CM as well as the manner of input/output of data. In Fig. 7, configuration of data input/output pins in masked write mode is shown as an example. As described above, the CDRAM in accordance with an embodiment of the present invention shown in Fig. 7 operates in synchronization with an externally applied clock signal K. The clock signal K is a signal generated repeatedly in a prescribed period, such as a system clock. The clock signal is constantly generated no matter whether the CDRAM is accessed or not. The embodiment has a simple circuit structure in which an oscillating circuit such as a ring oscillator is made unnecessary, by utilizing the clock signal K, and it provides an internal voltage generating circuit of low current consumption having small area of occupation. Fig. 8 is a block diagram showing the internal voltage generating circuit. The internal voltage generating circuit 800 shown in Fig. 8 corresponds to the internal voltage generating circuit 800 shown in Fig. 7. Internal clock signal K from clock buffer 254 (see Fig. 7) is applied to internal voltage generating circuit 800. However, external clock signal may be directly received through an external pin terminal without using clock buffer 254 (see Fig. 7). Internal voltage generating circuit 800 generates a desired internal voltage VIN in response to the clock signal K. Fig. 9 is a block diagram showing an example of a specific structure of internal voltage generating circuit shown in Fig. 8. Referring to Fig. 9, internal voltage generating circuit 800 includes a buffer circuit 810 for buffering the clock signal K, and a charge pump circuit 811 for generating internal voltage VIN by a charge pump operation in response to the clock signal buffered in the buffer circuit 810. Buffer circuit 810 is necessary when internal voltage generating circuit 800 directly receives the external clock signal K. Therefore, when clock buffer 254 is provided as shown in Fig. 7, buffer circuit 810 is not necessary. Although buffer circuit 810 and charge pump circuit 811 are provided separately in the structure of Fig. 9, a buffer circuit and a charge pump circuit may be regarded as one charge pump circuit. Fig. 10 shows an example of a specific structure of buffer circuit 810 shown in Fig. 9. Referring to Fig. 10, buffer circuit 810 includes an even number of serially (cascade) connected inverter circuits I1 to I2n. Since clock signal K is applied constantly, the number of inverter circuits included in buffer circuit 810 may be odd-number. More specifically, charge pump circuit 811 supplies and removes positive charges in response to the rise and fall of the clock signal K. Therefore, when the clock signal K is repeatedly and constantly applied, even if the clock signal K is inverted and applied, the resulting operation is the same. Therefore, the buffer circuit 810 may have a function of inverting and outputting the applied signal. Fig. 11 shows an example of a specific structure of charge pump circuit 811. Referring to Fig. 11, charge pump circuit 811 includes a capacitance CP10 receiving a buffered clock signal K', an n channel MOS transistor TQ50 diode connected between a node 812a and the ground potential, and a transistor TQ51 diode connected between nodes 812a and 812b. Transistor TQ50 has its gate and one conduction terminal connected to node 812a. Transistor TQ51 has its gate and one conduction terminal connected to node 812b. An internal voltage VIN such as a substrate bias potential Vbb is generated from node 812b. The operation of charge pump circuit 811 will be briefly described. It is assumed that transistors TQ50 and TQ51 have the threshold value of Vth, and "H" level of the clock signal K' is the supply voltage Vcc. When clock signal K' rises to "H", positive charges are supplied to node 812a by charge pump operation of capacitance CP10, and potential of node 812a rises. When the potential of node 812a rises, transistor TQ50 is turned on, and potential of node 812a is clamped at the threshold voltage Vth of transistor TQ50. At this time, transistor TQ51 is off. When clock signal K' falls to "L", charges (positive charges) are removed from node 812a by charge pump operation of capacitance CP10, and potential of node 812a falls. As the potential of node 812a lowers, transistor TQ50 is turned off. When potential difference between the node 812b and node 812a becomes Vth or higher, transistor TQ51 is turned on and removes positive charges from node 812b. This operation is repeated every time clock signal K' is applied, and finally, potential at node 812b is stabilized at about -Vcc+2·Vth. By the charge pump circuit 811 shown in Fig. 11, a constant negative voltage is generated as an internal voltage. By applying the internal voltage VIN applied through this node 812b to the semiconductor substrate (or to a well region), the semiconductor substrate is biased to a prescribed negative potential. Thus a substrate bias generating circuit which does not need an oscillating circuit can be realized. Since an oscillating circuit is not used, current consumed by the oscillating circuit can be saved, and area of occupation for the oscillating circuit can also be saved. Therefore, substrate bias generating circuit of low power consumption having small area of occupation can be provided. The negative potential applied from charge pump circuit may be applied not as the substrate bias potential but it may be applied to a circuit portion operating at a negative potential. Fig. 12 shows another structure of a charge pump circuit 811. Charge pump circuit 811 shown in Fig. 12 includes diode connected p channel MOS transistors TQ52 and TQ53. Operations and functions of transistors TQ52 and TQ53 are the same as those of transistors TQ50 and TQ51 shown in Fig. 11. Therefore, description thereof is not repeated. Fig. 13 shows another example of an internal voltage generating circuit. Internal voltage generating circuit 800 shown in Fig. 13 includes a dividing circuit 820 which frequency-divides an internal or external clock signal K by a prescribed ratio of division, and a charge pump circuit 811 responsive to a signal from the dividing circuit 820 for carrying out charge pump operation to generate an internal voltage VIN. Capability of supplying negative charges (or removal of positive charges) of the charge pump circuit is determined by capacitance value of the capacitors included therein and on frequency of applied clock signal. If the clock signal K has high frequency, charge pump circuit has higher capability of supplying negative charges, so that a predetermined bias voltage is faster provided stably at the level at which negative charge injection by the charge pump circuit 811 and positive charge injection due to memory operation are balanced with each other. If capability of supplying negative charges of charge pump circuit 811 is too high, the substrate bias voltage, for example, may be made too low when a memory operation is not performed, and therefore a circuit for controlling level of the internal voltage VIN or a circuit for clamping the internal voltage VIN at a prescribed potential becomes necessary. In such case, extra power is consumed, and extra circuits are required. Therefore, by the dividing circuit 820, frequency of the clock K is reduced to a desired frequency and then it is applied to the charge pump circuit 811. The division ratio of the dividing circuit 820 is determined dependent on the driving capability required for the internal voltage generating circuit, that is, the application of the internal voltage VIN. Fig. 14 shows an example of a specific structure of the dividing circuit 820 shown in Fig. 13. Referring to Fig. 14, dividing circuit 820 includes m cascade connected 1 bit binary counters 821a to 821n. A 1 bit binary counter 821 (each of the counters 821a to 821n) returns to the initial state at every twice application of a signal. Therefore, one binary counter 821 reduces the period of an applied signal to 1/2. When m binary counters are connected in series, mth power of the division ratio (1/2) is provided. Therefore, by changing the number of 1 bit binary counters 821, a dividing circuit 821 providing a desired division ratio can be implemented. The dividing circuit 820 may have one 1 bit binary counter 821. Instead of a 1 bit binary counter, other circuit structure may be employed for the dividing circuit 820. Any structure dividing an applied signal may be used. Dependent on use, a structure for multiplexing the frequency of clock signal K to apply the same to the charge pump circuit 811 may be used. Fig. 15 shows another structure of internal voltage generating circuit. Internal voltage generating circuit 800 shown in Fig. 15 generates an internal voltage VIN in response to a clock signal K and to a chip select signal E. When chip select signal E is inactive, the semiconductor memory device is at a standby state (non-selected state). By switching the capability of supplying negative or positive charges of the internal voltage generating circuit 800 dependent on the selected/non selected state of the semiconductor memory device, power consumption is reduced. Fig. 16 is a block diagram showing an example of a specific structure of internal voltage generating circuit 800 shown in Fig. 15. Referring to Fig. 16, internal voltage generating circuit 800 includes a first charge pump circuit 830 and a second charge pump circuit 831 having different capabilities. The capabilities of the charge pump circuits 830 and 831 are adjusted by changing capacitance values of the capacitance of the charge pump. Internal voltage generating circuit 800 of Fig. 16 further includes a switch circuit 835 responsive to clock signal K and chip enable signal E for driving either charge pump circuit 830 or charge pump circuit 831. Switch circuit 835 selectively transmits clock signal K to charge pump circuit 830 or 831 in response to active/inactive state of chip select signal E. Switch circuit 835 may have a structure which transmits clock signal K to one of charge pump circuits 830 and 831 when chip select signal E is active and transmits the clock signal to the other one of charge pump circuits when chip select signal E is inactive for selectively driving the charge pump circuit 830 or 831. Switch circuit 835 may have a structure which transmits clock signal K to both of charge pump circuits 830 and 831 when chip select signal E is active, and transmits clock signal K to one of the charge pump circuits when chip select signal E is inactive. Switch circuit 835 controls operation of charge pump circuits 830 and 831 in response to chip select signal E. Other signal may be used as selection control signal applied to switch circuit 835. A structure in which at least a chip select signal for designating selected state/non-selected state of chip or semiconductor memory device is used as one control signal for designating selection control may be used. Clock signal K and chip select signal E may be externally applied or they may be generated after buffering in the device. Fig. 17 shows one example of a specific structure of switch circuit 835 shown in Fig. 16. Switch circuit 835 shown in Fig. 17 selectively drives charge pump circuit 830 and 831. Referring to Fig. 17, switch circuit 835 includes an AND circuit AND 1 receiving clock signal K and chip select signal E, an inverter circuit INVT receiving chip select signal E, and an AND circuit AND 2 receiving clock signal K and an output from inverter circuit INVT. In the structure of the switch circuit shown in Fig. 17, when chip select signal E is inactive and the semiconductor memory device is at the non-selected state, chip select signal E is at "H", AND circuit AND1 is enabled, and AND circuit AND2 is disabled. Therefore, clock signal K is applied to a charge pump circuit (for example, 830) having smaller capacity of driving through AND circuit AND 1. Consequently, driving capability of internal voltage generating circuit 800 is made small when the chip is at non-selected state. When chip select signal E is at active state, that is, "L" and the semiconductor memory device is selected, AND circuit AND2 is enabled and AND circuit AND1 is disabled. At this state, clock signal K is transmitted to a charge pump circuit (for example, 831) having larger driving capability through AND circuit AND2. Therefore, by using switch circuit 835 shown in Fig. 17, charge pump circuits 830 and 831 can be selectively operated dependent on selected/non-selected state of the semiconductor memory device, preventing unnecessary power consumption. Fig. 18 shows a further example of internal voltage generating circuit shown in Fig. 15. Referring to Fig. 18, internal voltage generating circuit 800 includes one charge pump circuit 811, dividing circuits 850 and 851 having different division ratio, and switch circuit 835 responsive to a chip select signal E for selectively transmitting clock signal K to the dividing circuits 850 and 851. Current supplying capability of charge pump circuit is changed dependent on the frequency of an oscillating signal applied thereto. Therefore, by changing the frequency of an oscillating signal for the charge pump operation dependent on the selected/non-selected state of the semiconductor memory device, driving capability of the internal voltage generating circuit 800 can be adjusted. The structure shown in Fig. 14 may be used as the dividing circuit 850 and 851, and oscillating frequency thereof can be adjusted by changing the number of 1 bit binary counters. Switch circuit 835 selectively transmits clock signal K to dividing circuit 850 or 851 in response to a chip select signal E. A structure shown in Fig. 17 may be used for switch circuit 835. In the structure shown in Fig. 18 also, the driving capability of internal voltage generating circuit 800 can be adjusted dependent on selected/non selected state of the semiconductor memory device, and the current consumption can be reduced. In the structure of internal voltage generating circuit shown in Fig. 15, driving capability of internal voltage generating circuit is adjusted by chip select signal E. However, the semiconductor memory device includes a DRAM, and internal circuits are operating at a time of refresh. Therefore, in order to bias the substrate potential to a prescribed potential during refreshing, a structure may be used in which a refresh designating signal REF is applied as a conditional signal to switch circuit 835. In such a case, if refreshing operation is designated when chip select signal E is at "H" and refresh designating signal REF is at "L", an NANDed signal of the refresh designating signal REF and the chip select signal E may be applied to AND circuits AND1 and AND2 shown in Fig. 17 instead of chip select signal E. In the charge pump circuit structure shown in Figs. 11 and 12, a negative internal voltage VIN is generated. However, in a semiconductor memory device, an internal voltage higher than the supply voltage, such as a boosted word line driving signal for DRAM may be necessary. A structure for generating a boosting signal which is higher than the supply voltage will be described. Fig. 19 shows a structure of a boosting signal generating system employing an internal voltage generating circuit in accordance with another embodiment of the present invention. Referring to Fig. 19, an internal voltage generating circuit 900 generates an internal voltage VIN' which is boosted to be higher than operational supply voltage Vcc in response to a clock signal K. Switch circuit 910 generates a boosted signal A in response to an internal control signal Z, "H" level of which is the operational supply voltage Vcc level. When the internal control signal A is the boosted word line driving signal to be transferred to a selected DRAM word line, the signal A is applied to a node at which the substrate and the source of the transistor TQ2 are connected, in the structure shown in Fig. 5. At this time, internal control signal Z whose level is the operational supply voltage Vcc applied to switch circuit 910 corresponds to internal control signal dr2 shown in Fig. 5. The internal control signal A is not limited to the word line driving signal, and it may be any control signal when boosted level is necessary. Fig. 20 shows a specific structure of a charge pump circuit shown in internal voltage generating circuit 900 shown in Fig. 9. A charge pump circuit 920 for generating a boosted internal voltage VIN', which is higher than the supply voltage includes a capacitance CP30 receiving a clock signal K', an n channel MOS transistor TQ61 diode connected between nodes 921a and 921b, and an n channel MOS transistor TQ60 diode connected between node 921a and supply potential Vcc. Transistor TQ60 has its gate and one conduction terminal connected to the supply potential Vcc. Transistor TQ61 has its gate and one conduction terminal connected to node 921a. Boosted internal voltage VIN' is generated from node 921b. The operation will be described. Capacitance CP30 carries out charge pump operation for the node 921a in response to clock signal K'. When clock signal K' rises to "H", positive charges are supplied to node 921a and potential of node 921a rises. At this time, transistor TQ60 is turned off, transistor TQ61 is turned on and positive charges are supplied to node 921b. When clock signal K' falls to "L", positive charges in node 921a are removed, and potential of node 921a lowers. At this time, transistor TQ61 is turned off, transistor TQ60 is turned on, and potential at node 921a is clamped at Vcc-Vth. This operation is repeated every time clock signal K' is applied, positive charges are supplied to node 921b, internal voltage VIN' rises, and finally potential at node 921b reaches the boosted level of Vcc+2·Vth. Fig. 21 shows one example of a specific structure of switch circuit 910 shown in Fig. 19. Referring to Fig. 21, switch circuit 910 includes complementarily connected p channel MOS transistor TQ9O and n channel MOS transistor TQ91. Boosted internal voltage VIN' is applied to the substrate of transistor TQ90. Consequently, transistor TQ90 surely transmits the boosted internal voltage VIN without causing signal loss or punch through. Internal control signal Z is applied to gates of transistors TQ90 and TQ91. When a circuit shown in Figs. 20 and 21 is used as a boosted word line driving signal generating circuit, the device structure becomes more simple as compared with the structure of Fig. 5, and a boosting circuit having smaller area of occupation can be provided. When internal signal A is used as word line driving signal, boosting may be done not only at restoring but boosted voltage may be maintained continuously during the period in which the word line is active. In the switch circuit shown in Fig. 21, transistor TQ90 is turned on and transistor TQ91 is turned off when internal control signal Z attains to "L", and a boosted internal signal A is output. When internal control signal Z attains to "H", transistor TQ90 is turned off, transistor TQ91 is turned on, and internal signal A is discharged to "L". In the structure shown in Fig. 21, a transistor TQ4 may be interposed between the transistor TQ91 and an output node of internal signal A in order to prevent the drain/source potential of the transistor TQ91 from becoming high voltage. In the structure of switch circuit 910 shown in Fig. 21, it is necessary to maintain boosted level of the internal signal A in a prescribed period only. Therefore, when it is inactive, it must be set to "L". For this purpose, transistor TQ91 is necessary. However, when this transistor TQ91 is removed, and the structure is adapted to receive internal control signal Z only at the gate of transistor TQ90, internal signal A which is always at the boosted level is generated. The resulting circuit may be used as a level retaining circuit for continuously holding the boosted level. More specifically, when there is a leak in the internal signal A and the voltage level thereof may lower, leaked charges can be sufficiently made up for by the charges supplied from the charge pump circuit in the internal voltage generating circuit, and therefore, a level holding circuit capable of stably holding the boosted level of the signal A can be provided. When it is used as such a level holding circuit, a stable boosted level can be maintained with the leak compensated for by the charges supplied from the charge pump circuit 920, even when internal signal A is used as the word line driving signal. Although a CDRAM has been described as an example of the semiconductor memory device to which the above described internal voltage generating circuit is applied, the semiconductor device is not limited thereto. For example, when a semiconductor memory device 890 includes a DRAM or SRAM memory circuit 892 and the memory circuit 892 operates in synchronization with external clock signal CLK as shown in Fig. 22, an internal voltage generating circuit 890 generating a desired internal voltage in response to the external clock signal CLK may be provided. Any memory circuit may be used provided that data input/output is carried out in synchronization with external clock signal CLK. The clock signal may not necessarily be clock signals applied at constant prescribed period, such as a system clock. For example, in the above described CDRAM, when the DRAM is being accessed, it is impossible to access to the SRAM to read data therefrom. In that case, frequency of the clock signal K may be lowered to reduce power consumption. In the standby state or during refreshing of the DRAM, period of the clock signal K may be made longer, provided that SRAM is not accessed during refreshing. By changing the period of the external clock signal K dependent on the state of operation of the CDRAM, current consumption can be reduced. Therefore, the externally applied clock signal K does not need to have constant period. More specifically, any control signal which is applied repeatedly no matter whether the semiconductor memory device is accessed or not may be used as the clock signal to which the internal voltage generating circuit responds. Another example of a semiconductor memory device having such a control signal includes a dual port RAM which is generally used in the field of image processing. Fig. 23 schematically shows a structure in which the internal voltage generating circuit in accordance with an embodiment is applied to a VRAM (dual port RAM). The dual port RAM includes a RAM port 896 capable of inputting/outputting data WIO at random sequence, and an SAM port capable of inputting/outputting data SIO sequentially. The RAM port 896 is generally formed by a DRAM having large storage capacity. One row of data of RAM port 896 can be transferred to a serial access memory of SAM port 89, and input/output of data SIO is successively carried out between the serial access memory and an outside of the device. Timings of input/output of data to and from SAM port, and speed of input/output of data are determined by an externally applied clock signal SC. The clock signal SC is utilized only in the SAM port, and not used in the RAM port 896. If the internal voltage generating circuit 898 responsive to the external clock signal SC for generating a desired internal voltage is provided in the dual port RAM 895, an internal voltage generating circuit 898 of low current consumption having small area of occupation can be provided, as in the above described embodiments, so that a dual port RAM having higher degree of integration can be provided. As described above, according to an embodiment, a desired internal voltage is generated in response to a control signal which is applied externally and repeatedly. Therefore, a semiconductor memory device having an internal voltage generating circuit of simple structure, low current consumption and having smaller area of occupation can be provided. Consequently, a semiconductor memory device of low current consumption having high degree of integration can be realized. Although embodiments have been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the scope of the present invention being limited only by the terms of the appended claims.

Claims: A semiconductor memory device comprising: memory storage means (100; 101; 200; 201; SMA; MM); control means (250, 254) for receiving external signals (K; E# etc.) including an external clock signal (K) and external control signals (E#); and voltage generating means (800; 900) for generating an internal voltage for use in said semiconductor memory device in response to said external clock signal; characterised in that said control signals define access and standby states of the memory storage means; and said voltage generating means is responsive to receipt of the external clock signal irrespective of whether the device is in the access state or the standby state to generate, without use of an on-chip oscillator, said internal voltage for said device from said external clock signal. A device according to claim 1, wherein said voltage generating means comprises frequency divider means (820; 850; 851) for setting the rate at which said internal voltage is generated by frequency dividing said external clock signal. A device according to claim 2, wherein said frequency divider means (820; 850; 851) comprises a plurality of binary counters (821) connected in cascade relationship. A device according to claim 2 or claim 3, wherein said frequency divider means (820; 850; 851) comprises (i) first divider means (850) for frequency dividing said external clock signal at a first division ratio, and (ii) second divider means (851) for frequency dividing said external clock signal at a second division ratio; wherein one of said control signals comprises an enable signal (E) by which memory functions of said memory storage means (1; 2; 100; 101; 200; 201; SMA; MM) are enabled; and wherein said voltage generating means comprises switching means (835) for selectively routing said external clock signal through either one of said first (850) or second (851) divider means in response to said enable signal (E). A device according to claim 1, wherein said voltage generating means comprises buffer means (254; 250; 810) for buffering the received external clock signal. A device according to claim 5, wherein said buffer means (810) comprises a plurality of serially connected inverter circuits (I1; I2n). A device according to claim 5 or claim 6, wherein said voltage generating means (830; 831) comprises (i) first voltage generating means (830) for generating a first internal voltage, and (ii) second voltage generating means (831) for generating a second internal voltage, different from said first internal voltage; wherein one of said control signals comprises an enable signal (E) by which memory functions of said memory storage means (1; 2; 100; 101; 200; 201; SMA; MM) are enabled, and wherein said voltage generating means comprises switching means (835) for selectively routing said external clock signal to either one of said first (830) or second (831) voltage generating means in response to said enable signal (E). A device according to any preceding claim, wherein said voltage generating means (811; 900; 920; 891; 898) comprises: capacitor means (CP10; CP30) for transferring the frequency divided external clock signal to a node (812a; 921a) through a capacitive coupling; and an insulated gate type field effect transistor (TQ50; TQ51; TQ52; TQ53; TQ60; TQ61) connected in diode fashion and responsive to a potential at said node (812a; 921a). A device according to any preceding claim, wherein said memory storage means (1; 2; 100; 101; 200; 201; SMA; MM) comprises: a first memory array (1; 100; 101; MM) comprising a plurality of dynamic type memory cells (DMC); a second memory array (2; 200; 201; SMA) comprising a plurality of static type memory cells (SMC); and transfer means (3; 210; BTG) for transferring data between said first memory array (1; 100; 101; MM) and said second memory array (2; 200; 201; SMA). A device according to any preceding claim wherein said internal voltage is a boosted voltage signal higher than an operating power supply voltage of said semiconductor memory device. A device according to claim 10, wherein said boosted voltage signal is transferred as an internal signal within said semiconductor memory device in response to a transfer control signal. A device according to claim 11, wherein said memory storage means (1; 2; 100; 101; 200; 201; SMA; MM) comprises rows and columns of memory cells, and said boosted voltage signal is transferred onto a selected word line connecting a row of memory cells in response to said transfer control signal. A device according to any of claims 1 to 12, wherein said internal voltage is a negative voltage lower than a ground potential. A device according to claim 13, wherein said internal voltage is applied to a substrate region of at least the memory storage means. A method of operating a semiconductor memory device comprising the steps: applying external signals (K; E# etc) including an external clock signal (K) and external control signals (E#) to the semiconductor memory device; and generating an internal voltage for use in said semiconductor memory device in response to said external clock signal; characterised in that: said control signals define access and standby states of the memory storage means of the device; said external clock signal is applied irrespective of whether the device is in the access or standby state; and said generating step generates, without use of an on-chip oscillator, said internal voltage from said external clock signal. A method according to claim 15, wherein the rate at which said internal voltage is generated is determined by frequency dividing the external clock signal. A method according to claim 15, wherein the step of generating said internal voltage includes a step of buffering the external clock signal to set the rate at which said internal voltage is generated.

Inventors: DOSAKA KATSUMI, HAYANO KOUJI, IWAMOTO HISASHI, KONISHI YASUHIRO, KUMANOYA MASAKI, YAMAZAKI AKIRA, DOSAKA, KATSUMI, HAYANO, KOUJI, IWAMOTO, HISASHI, KONISHI, YASUHIRO, KUMANOYA, MASAKI, YAMAZAKI, AKIRA, Dosaka, Katsumi, c/o Mitsubishi Denki, Hayano, Kouji, c/o Mitsubishi Denki, Iwamoto, Hisashi, c/o Mitsubishi Denki, Konishi, Yasuhiro, c/o Mitsubishi Denki, Kumanoya, Masaki, c/o Mitsubishi Denki, Yamazaki, Akira, c/o Mitsubishi Denki
Applicants: MITSUBISHI ELECTRIC CORP, MITSUBISHI DENKI KABUSHIKI KAISHA
Application year: 1991
Main classification: G11C5
IPC codes: G11C11, G11C5, H01L27, G11C8, G06F12