Chemical-vapor-deposition apparatus and method for reducing particulate contamination in a chemical-vapor-deposition process

Abstract: In an epitaxial reactor system using a vacuum pump, which is connected to the reaction chamber (7) by an exhaust line (25), particulate contaminants normally deposit in the exhaust line (25) near its juncture with the reaction chamber (7). When the vacuum pump is isolated from the reaction chamber (7) during a back-filling operation, these contaminants can be entrained in the currents of gas normally produced in the back-filling operation. A removable baffle (33) having the shape of a truncated cone is placed in the exhaust line (25) at its juncture with the reaction chamber (7) to prevent these particles from re-entering the reaction chamber (7).

Description: The present invention relates generally to the field of semiconductor wafer fabrication equipment useful in the manufacture of semiconductor devices, more particularly to chemical vapor deposition (CVD) apparatus useful for depositing a variety of different types of layers from a source gas onto a substrate. Apparatus of the above type is used in the fabrication of semiconductor devices on 100 millimeter or larger wafers of silicon. Epitaxial layers are formed on the surfaces of the wafers by heating them to temperatures in the region of 800 to 1200 degrees Celsius in a bell jar containing a gaseous atmosphere consisting of a hydrogen carrier gas mixed with one or more reactive gases such as a silicon source gas and a dopant source gas. During the various processing steps which are used to produce layers of different types on the surfaces of the wafers, great care must be taken to avoid the deposition of particulate contaminants on the surfaces of the wafers. The demand for ever larger scale of circuit integration and the consequent need for greater chip density have made the elimination of particulate contaminants an increasingly difficult problem. As the size of the circuit features has become smaller, the minimum size of particulate contaminants which can degrade circuit performance has also become smaller. This is true because particles as small as 1/10 the size of the circuit features can seriously degrade the electrical properties of the circuit. One source of such contaminants is the exhaust line used to conduct gases from the interior of the bell jar when they are no longer needed. Such an exhaust line may terminate in a sump at atmospheric pressure or may connect the processing system to a source of high vacuum such as a vacuum pump. During normal processing this line is open to the vacuum pump, such that there is a steady flow of gases, including entrained particulate contaminants, in a direction away from the reaction chamber. However, when a processing step has been completed, a valve in the exhaust line is closed while the reaction chamber is back-filled with a new processing atmosphere through an inlet line. During this back-filling operation, strong currents of moving gases in the reaction chamber can sweep up and entrain particulate contaminants from the region of the exhaust line near its junction with the reaction chamber. The presence of contaminant particles in the short section of exhaust line between the valve and the reaction chamber is difficult to avoid, since some particulate matter is inevitably present in the effluent from the reaction chamber. However, the particle performance of the system could be improved if such particulate contaminants could be prevented, or at least inhibited, from returning to the reaction chamber during the back-filling operation. An object of the present invention is to provide an epitaxial reactor system having improved particle performance compared to the prior art, the system resulting particularly in a reduction of particulate contamination. This object is solved by the apparatus of independent claim 1 and the method of independent claim 12. Further advantageous features and details of the invention are evident from the dependent claims, the description and the drawings. The claims are intended to be understood as a first non-limiting approach of defining the invention in general terms. An aspect of the present invention is to provide, in such a system having a reaction chamber with an exhaust line connected to either an exhaust sump or a vacuum pump, that particulate matter in the exhaust line is inhibited from re-entering the reaction chamber. A further aspect of the present invention is to provide in such a system a baffle located at the junction of the exhaust line and the reaction chamber to prevent particulate matter in the exhaust line from re-entering the reaction chamber. A further aspect of the present invention is to provide a baffle according to the immediately preceding object in a form which can be readily removed from the exhaust line when desired. A further aspect of of the present invention is to provide such a baffle in a form which causes the minimum practical flow restriction to gases traveling along the exhaust line from the reaction chamber to the vacuum pump. To the above ends, a baffle for inhibiting the return of particulate matter from the exhaust line into the reaction chamber of a epitaxial reactor system extends transversely across the mouth of the exhaust line and has a central aperture of a smaller cross-sectional area than the exhaust line. The baffle has a concave surface facing the reaction chamber, and a convex surface facing the interior of the exhaust line. During normal operation of the epitaxial reactor system, the vacuum system is in operation to remove normal waste byproducts and particulate contaminants from the system. In this mode of operation, the central aperture in the baffle is sufficiently large in cross section to cause only a minimal flow restriction. At the completion of a processing step, when the vacuum pump is isolated from the reaction chamber by the closure of a valve in the exhaust line, the reaction chamber is back-filled with a new processing atmosphere via an inlet line. The strong convection currents of gas in the reaction chamber are prevented from generating eddy currents in the portion of the exhaust line near its junction with the wall of the reaction chamber by the presence of the baffle. The above and other features, objects and advantages of the present invention together with the best mode known to the inventor thereof for carrying out his invention will become more apparent from reading the following description of the invention while studying the associated drawing, the various figures of which represent: Fig. 1 is a cross-sectional view, in somewhat schematic form, of a CVD epitaxial reactor system incorporating the present invention; Fig. 2 is a detailed sectional view of the portion of Fig. 1 within the line 2-2 in Fig. 1. Fig. 1 illustrates a chemical-vapor-deposition system 1 in a form such as might be used for producing epitaxial layers on silicon wafers during the fabrication of semiconductor devices. System 1 is shown in a schematic and generalized manner to permit explanation of the context within which the present invention operates. A plurality of substrates 3, which might be 150 millimeter silicon wafers, for example, are supported on a graphite susceptor 5 for processing in a gaseous environment confined within a quartz bell jar 7. Banks of radiant heaters 9 surround the bell jar for heating the susceptor and substrates to processing temperatures in the region of 800-1200 degrees Celsius. Cooling water from an external source (not shown) flows into system 1 via a coolant inlet line 11 and returns from the system via a coolant outlet line 13. Within system 1, the cooling water extracts heat from the banks of radiant heaters 9 and from an air-to-water heat exchanger 15. Heat exchanger 15 is part of a recirculating air cooling system which includes a blower 17 to drive a steady stream of cool air from exchanger 15 into a reactor enclosure 19, from which the heated air returns to heat exchanger 15. Within enclosure 19, a stream of cooling air envelops and flows downwardly over the surface of bell jar 7 to maintain its temperature low enough to prevent unwanted reactions between the inner surface of bell jar 7 and the reactive gaseous atmosphere within. Typically, the processing of silicon-wafer substrates proceeds through a series of steps involving exposure to different gaseous atmospheres within bell jar 7. During these steps various waste products, including particulate contaminants, are continuously removed from the interior of bell jar 7 by a vacuum system which includes a vacuum pump 21 coupled to a valve 23 which is in turn coupled to bell jar 7 by an exhaust line 25. Filling of bell jar 7 at the start of each processing cycle takes place through an intake line 26, from which the gaseous atmosphere flows downwardly as indicated by arrow 29. During this backfilling operation, valve 23 is closed, such that the section of exhaust line 25 between valve 23 and bell jar 7 is isolated from vacuum pump 21. As suggested by arrow 31, the backfilling gaseous atmosphere sweeps over the hemispherical bottom surface of bell jar 7, deviating slightly into the mouth of exhaust line 25 near its junction with jar 7. Although the exact pattern of gas flow in this region is unknown, it is believed that eddy currents, as suggested by arrow 32, are probably induced in the portion of exhaust line 25 near the bottom of jar 7. These eddy currents are believed responsible for dislodging particulate matter which was deposited on the inside wall of exhaust line 25 during the preceding processing steps. Once dislodged, such particulate matter can be entrained in the flow of gas across the mouth of exhaust line 25. Whatever the actual flow pattern, it is known that the back-filling operation results in the reversion of considerable particulate matter from the walls of exhaust line 25 into the interior of bell jar 7. Once in bell jar 7, this particulate contamination is free to deposit on the wafers 3. Turning now to Fig. 2, the region of Fig. 1 near the junction of exhaust line 25 and bell jar 7 is shown in enlarged section. In particular, and in accordance with the present invention, a particle restrictor 27 has been illustrated positioned within and extending across the mouth of exhaust line 25. Particle restrictor 27 includes a flanged sleeve 29 which is dimensioned to easily slip into the mouth of exhaust line 25 at its junction with bell jar 7. A curved handle 34, which may be of round cross section and approximately 1/8 inch (1 inch = 2.54 cm) in diameter, permits easy insertion and removal of restrictor 27. A baffle 33 is joined around its upper rim to sleeve 29 and extends generally downwardly therefrom to terminate in a reduced-diameter aperture 35. Baffle 33 has been illustrated in its preferred shape, which is that of a truncated conical section. However, baffle 33 might alternatively have any other shape which is concave as viewed from the side facing into bell jar 7. For example, baffle 33 might be a hemisphere or other portion of a sphere, or might have some other aspherical concave shape. However, a truncated conical shape is relatively easy to fabricate and has been found to provide a considerable reduction in the reversion of particulate contamination from exhaust line 25. Preferably, the cone angle is in the range of from 50 to 60°. The exact nature of the gaseous flow which results in this reduction in particulate contamination has not been fully analyzed. However, it is believed that two mechanisms may be involved: (1) a decoupling of the gas within exhaust line 25 from the pattern of swirling gases which occurs in bell jar 7 during back-filling, reducing the generation of eddy currents in exhaust line 25; and (2) a tendency to trap a large percentage of any mobile particles in exhaust line 25, especially in the region between the lower surface of baffle 33 and the adjacent portions of sleeve 29. The second of these two mechanisms suggests that the convex shape of baffle 33 as viewed from the side facing into exhaust line 25 also contributes to the performance in reducing particle contamination. Such a convex shape produces, between baffle 33 and the adjacent inner surface of sleeve 29, an annular region having a progressively converging shape which is well suited to trapping a majority of particles moving in a direction toward bell jar 7. Particle restrictor 27 may be fabricated entirely of quartz, for example, such that its coefficient of thermal expansion matches that of bell jar 7 and exhaust line 25. Preferably, the ratio of the outer diameter of sleeve 29 and of the diameter of aperture 35 is in the order of 4: 1.5. Typical dimensions are: outer diameter of sleeve 29 = 4.0 inches; diameter of aperture 35 = 1.5 inches (1 inch = 2.54 cm). Although the invention has been described as being part of a chemical-vapor-deposition system 1 which is to be used primarily for epitaxial deposition on silicon wafers and which relies on a vacuum pump to exhaust spent processing atmospheres from the reaction chamber, the invention can easily be incorporated in any other type of CVD system, including those which exhaust into a sump at atmospheric pressure.

Claims: A chemical-vapor-deposition (CVD) apparatus comprising a reaction chamber (7) for confining a reactive gaseous atmosphere in contact with a substrate (3), the reaction chamber (7) having a gas outlet for exhausting a gaseous atmosphere from said reaction chamber (7) when desired, and having a gas inlet for connection to a source of a desired reactive gaseous atmosphere for filling said chamber; said gas outlet comprising particle restrictor means (27) for restricting reverse flow of particulate contaminants from an outlet conduit (25) communicating with the gas outlet into said reaction chamber (7) wherein said particle restrictor means (27) comprises a baffle (33) extending across the gas outlet and defining an aperture (35) therethrough and wherein said baffle (33) is concave on the face thereof facing said reaction chamber (7) and/or is convex on the face thereof facing into said outlet conduit (25). The apparatus of claim 1 wherein said outlet conduit (25) is joined to a wall portion of said reaction chamber (7) in gas flow communication with the interior of said reaction chamber at a point of junction between said wall portion and said outlet conduit; and the restrictor means (27) being located at said junction. The apparatus of claim 1 and 2 wherein said baffle (33) is positioned at the junction of the gas outlet conduit (25) and the wall portion of said reaction chamber (7), said baffle (33) extends transversely across said outlet conduit (25) thereat, said outlet conduit (25) having a first cross-sectional area and, said aperture (35) of said baffle having a second cross-sectional area less than said first cross-sectional area of said outlet conduit (25). The apparatus of claims 1 to 3 wherein said concave and/or said convex face of said baffle (33) is conical in shape. The apparatus of one of claims 1 to 4 wherein said baffle (33) comprises a truncated cone having its axis generally parallel to the axis of said outlet conduit (25). The apparatus of claim 5 wherein said baffle (33) comprises a thin-walled cone truncated by a pair of imaginary spaced-apart parallel planes, each said imaginary plane being disposed generally normal to the axis of said cone to form said aperture (35) of said second cross-sectional area at the intersection of one of said planes and said cone, and to form at the intersection of the other of said planes and said cone an open end of a larger cross-sectional area than said aperture. The apparatus of one of claims 1 to 6 wherein said baffle (33) and/or said chamber (7) are formed of quartz. The apparatus of one of claims 1 to 7 further including a flanged mounting sleeve (29) having a portion thereof dimensioned to be received within and supported in close fitting relationship within said outlet conduit (25), and wherein said baffle (33) is joined to, and extends across the interior of, said mounting sleeve (29), whereby said sleeve (29) and baffle (33) are conveniently insertable within and removable from said outlet conduit (25). The apparatus of claim 8 further includes a handle (34) joined to the end of said mounting sleeve (29), facing into said reaction chamber when said sleeve is received within said outlet conduit, whereby said sleeve (29) and baffle (33) can be gripped by said handle (34) and withdrawn from said outlet conduit (25) when desired. The apparatus of one of claims 8 or 9, wherein the ratio of the outer diameter of said mounting sleeve (29) and of the diameter of said aperture (35) is 4 : 1.5. The apparatus of one of claims 1 to 10, wherein the baffle in conical shape has a cone angle in the range of from 50 to 60°. A method of reducing particulate contamination in a chemical-vapor-deposition process, comprising the steps of: providing a reaction chamber for containing a substrate upon which chemical vapor deposition is to be carried out; providing a gas inlet for connection to a source of a desired reactive gaseous atmosphere for filling said chamber; providing a gas outlet conduit for exhausting a gaseous atmosphere from said reaction chamber when desired, said outlet conduit being joined to a wall portion of said reaction chamber in gas flow communication with the interior of said reaction chamber at a point of junction between said wall portion and said outlet conduit; and providing a particle restrictor means located at said junction for restricting reverse flow of particulate contaminants from said outlet conduit into said reaction chamber, wherein said particle restrictor means comprises a baffle extending across the gas outlet and defining an aperture therethrough, and wherein said baffle is concave on the face thereof facing said reaction chamber and/or is convex on the face thereof facing into said outlet conduit.

Inventors: RINNOVATORE JAMES V, RINNOVATORE, JAMES V.
Applicants: APPLIED MATERIALS INC, APPLIED MATERIALS, INC.
Application year: 1991
Main classification: C30B25
IPC codes: C30B25, C23C16, H01L21