Ultrasonic grinder system for ceramic filter and trimming method therefor

Abstract: An ultrasonic grinder system for a ceramic filter (2) is disclosed. A metallic layer on the ceramic filter is trimmed by a cutting blade (20) which is vibrated at an ultrasonic frequency. Further, the vibration is fed back to a microcomputer (34) via a sensor (28) and the microcomputer controls movement of a XYZ stage (22) on which both of the cutting blade and ceramic filter are mounted. The CPU detects a standard level of the trimming procedure by the sensor and controls the XYZ stage to obtain a predetermined depth and area of the trimmed portion on the ceramic filter.

Description: This invention relates to a system for and a method of tuning a ceramic filter, which is suitable for automating the tuning step. In mobile communication technology, 800MHz band single body ceramic filters are commonly featured in small telephone products. For example, US Patents 4 431 977 and 4 742 562 disclose such ceramic filters made from a single ceramic block. The ceramic filters are tuned by trimming a predetermined portion of a metallic layer metallized on the ceramic block. In the tuning step, it has been required to remove the metallic layer in a predetermined manner accurately. An example of a trimming method is disclosed in our US Patent 4 855 693. The trimming can be carried out by several different types of apparatus which make use of different physical processes. For example, a laser trimming method uses a high-power laser beam to evaporate the metallic layer on the ceramic, whereas a sand blast method features a nozzle which blows grains of carbon silicide to cut the metallic layer. Another conventional trimming method makes use of micro rotary grinder, using a diamond point which directly cuts the metallic layer. However, these conventional trimming methods have respective disadvantages. For example, the laser trimming method needs a high electric power source to obtain a high power laser beam, and it is difficult to control consequential heating which may cause the ceramic to crack. As to the sand blast method, it is difficult to obtain an accurate depth and area of the removed portion because the grains of carbon silicate are too hard and also cut the nozzle itself, so that the nozzle needs to be changed frequently otherwise the diameter of the cut area becomes too large. Generally, according to the sand blast method, "try and check" (measuring filter characteristic during the trimming step) is necessary in order to obtain a fine tuned ceramic filter. As to the micro rotary grinder method, because the diamond point is easily clogged with the powder of ceramic which is cut with the removed metallic layer, it is necessary to dress the diamond point frequently. Also, sometimes, the diamond point itself becomes abraded and needs to be changed. Thus, these three prior trimming methods are rather unsuitable for automating the tuning step. One of the features of the present invention is to be able to find the surface of the ceramic filter to be trimmed automatically. After finding the surface as a standard level for the trimming procedure, trimming can then commence. To this end, the present invention is characterised by stage means including first and second relatively movable stage portions; motor means controlled by control signals for moving the stage portions relative to one another; means for mounting the ceramic filter on the first stage portion; vibrator means for vibrating at an ultrasonic frequency; a cutting blade coupled to the second stage portion and driven by said vibrator means for trimming the metallic layer on the ceramic filter; sensor means for detecting vibration of the first stage portion and generating a sensing signal in response thereto, and; controller means for producing the control signals for the motor means so as to produce a closing movement between the cutting blade and the metallic layer on the ceramic filter, said controller means causing said closing movement to cease in response to the sensing signal from said sensor means. The invention also includes a method of trimming a metallic layer on a ceramic filter in which the layer is abraded selectively characterised by the steps of bringing a cutting blade vibrating at an ultrasonic frequency into cutting contact with the metallic layer to be trimmed and such that the blade cuts into the ceramic filter by a predetermined depth, and producing a relative movement between the cutting blade and the ceramic filter so as to trim a selected area of the metallic layer whilst maintaining the blade at said predetermined depth, the cutting blade and the metallic layer subtending an angle of 50 to 70 degrees. The tilted and vibrated cutting blade produces efficient trimming and reduces burrs around the trimmed area. Features and advantages of the invention may be more fully understood from the following detailed description of embodiments thereof, and the accompanying drawings in which: Fig. 1 illustrates an example of a convention ceramic filter; Fig. 2 illustrates a general block diagram of an ultrasonic grinder system according to the present invention; Fig. 3 is an enlarged view of the cutting blade and the ceramic filter for explaining their operative relation; Fig. 4 is a detailed view of an XYZ stage of the ultrasonic grinder system; Fig. 5 is a partial, enlarged view of a Z stage of the XYZ stage for showing how a vibrator is mounted on the Z stage; Fig. 6 is a partial, enlarged view of the cutting blade; Figs. 7(a)-(c) illustrate trimming steps carried out in accordance with the present invention; Fig. 8(a) is a partial sectional view of the ceramic filter for explaining relation between forwarding speed of the cutting blade and cutting width; Fig. 8(b) is a graph showing the relation between forwarding speed of the cutting blade and cutting width; Fig. 9(a) is a plan view of the ceramic filter after the trimming according to the present invention; Fig. 9(b) is a partial sectional view of the ceramic filter after the trimming according to the present invention; and Fig. 10 is a graph showing relation between amplitude of the vibration and frequency of burr caused by the trimming. As shown in Fig. 1, the conventional ceramic filter 2 comprises a rectangular ceramic body 12, an outer metallic layer 4 which surrounds side and bottom surfaces of the ceramic body 12, input and output metallic layers 6a and 6b which are provided on the upper surface of the ceramic body 12 as metallic layers, and a plurality of resonators 8a, 8b, 8c, 8d, 8e, and 8f which are provided in respective holes going through the upper surface and the bottom surface. Each of the resonators has a respective metallic layer 10a, 10b, 10c, 10d, 10e, and 10f which is to be trimmed on the upper surface of the dielectric body 12 to tune the resonant frequency of the filter itself. Hereinafter the reference number 10 denotes a representative metallic layer among the metallic layers from 10a to 10f, to be trimmed. The present invention, of course, can be applied to any other types of ceramic filter which has at least one metallic layer to be trimmed. As shown in Fig. 2, an ultrasonic grinder system according to the present invention uses a vibrator 14 on which a cutting blade 20 is mounted via a body 14 and a horn 18. Both body 14 and horn 18 transfer ultrasonic vibration to the cutting blade 20. In this embodiment, we used a conventional vibrator model UV-30228-5B made by Ultrasonic Industry Co., LTD. in Japan. The vibrator 14 has an air inlet duct 26 for cooling air and a ventilation hole 24 for ventilating the warmed cooling air. The cutting blade 20 can be made of diamond, WC-Co alloy, or hardened Titanium which can cut not only the metallic layer 10 but the ceramic body 12. Further, the detailed figure of the cutting blade 20 is illustrated in Fig. 3. In this embodiment, the cutting blade 20 has rectangular shape, whose cutting edge is defined between blade surfaces disposed at approximately 90 degrees. The angle can be selected for durability of the blade. For example, the angle of the edge can be from 90 to 100 degrees. Further, the size of the cutting blade 20 also can be selected for the size of the metallic layer 10. In this embodiment, we used a conventional cutting blade model HTi03T (diameter = 3 mm) made by Mitsubishi Metal Co., LTD. in Japan. Generally, according to our experiments, a size of 0.3 to 1 mm thick and 2 mm wide was preferable for the current marketed ceramic filters. As shown in Fig.2 and Fig. 3, the cutting blade 20 and the upper surface of the ceramic filter 2 should be contacted at angle of 50 to 70 degrees. When the angle of the vibrator is set at the lower end of this range, such as 50 degrees, this produces a bigger cutting area and makes it rather difficult to conduct fine tuning. When the angle of the vibrator is set at the higher end of the range, such as 70 degrees, this makes it easier to conduct the fine tuning but also makes rather hard to dig into the ceramic body because of rectangular shape of cutting blade. We selected 65 degrees for the described embodiment. As shown in Fig. 2, the vibrator 14 is controlled by an oscillator 36 via a control line 40. The oscillator 36 generates an ultrasonic frequency signal, which in this embodiment is a 28 KHz frequency signal, and as a result the vibrator 14 vibrates at the frequency of 28 KHz. In this embodiment, we used a conventional oscillator model UE-200Z23S made by Ultrasonic Industry Co., LTD. in Japan. Further, the (voltage) amplitude of the frequency signal is also controlled by an amplitude controller 38. The amplitude of the vibration at the vobrator 14 is proportional to the amplitude of the signal on the control line 40. As a result, the depth of the trimmed area can be determined by the amplitude controller 38. In this embodiment, we used a conventional amplitude controller model UET-200 made by Ultrasonic Industry Co., LTD. in Japan. As shown in Fig. 4 and Fig. 5, the ceramic filter 2 is mounted on an X stage 45 in a stage 22 using a vice 23. The stage 22 mainly comprises a rectangular stone base 42, a beam 44, an X stage 45, Y stage 46, and a Z stage 50, which is known as "XYZ stage". The movement of three stages 45, 46, and 50 thereof are controllable by each of stepping motors 48, 52, and 54 via each of screws 56. Those stepping motors are also controlled by the control board 32 via motor control lines 33. In This embodiment, we used a conventional XY stage model XY-CC1020-801-001 made by NSK Inc. in Japan and added one controllable Z stage 50 and a stepping motor therefor with the beam 44. Further, we modified an attached control board model B-990-1-22 made by NSK Inc. for the control board 32 to control the movement of added Z stage 50. Further, as stated above, the vibrator 14 is mounted on the Z stage 50 by a flange mounter 51 at an angle of 50 to 70 degrees. As shown in Fig. 2, the control board 32 is also controlled by a micro computer 34 via an RS-232C interface 35. In this embodiment, we used a personnal computer if-800 model 50 made by OKI ELECTRIC INDUSTRY CO., LTD. in Japan. Further, the micro computer 34 has another interface port which is utilised to monitor vibration of the stage 22 using a vibration sensor 28 via sensing line 31 and an amplifier 30. In this embodiment, we used an acceleration sensor model 708 made by TEAC Inc. in Japan as the vibration sensor 28 and also used an amplifier model SA25 made by TEAC Inc. for the amplifier 30. The sensor 28 detects vibration to produce a voltage signal which represents the magnitude of the vibration. The amplifier 30 amplifies the voltage signal and the microcomputer 32 receives the amplified voltage signal and thereby detects the vibration. Further, the microcomputer 34 can switch the oscillator 36 on and off via a switching line 37. In a frequency tuning step, a metallic layer 10 is trimmed by the vibrating cutting blade 20. As shown in Fig. 6, the cutting blade 20 is vibrating in an axial direction which is illustrated as a bidirectional arrow A. In this embodiment, the vibration frequency is set at approximately 28KHz by means of the oscillator 36 and the amplitude of the vibraticn is defined by the amplitude controller 38 to be approximately 20 µm. Assume that the ceramic filter 2 has already been fixed just under the cutting blade 20 of the vibrator 14 to face the cutting blade 20 to the metallic layer 10 to be trimmed. At first, the microcomputer 34 controls the Z stage 50 to lower the vibrator 14 towards the ceramic filter 2 slowly. In this embodiment, each of the stepping motors 48, 52, and 54, can step forward or back 4 µm per pulse sent from the control board 32. According to our experiment, the cutting blade 20 is lowered at approximately 8 mm/s. The microcomputer 34 watches for the existence of vibration on the stage 22 is detected by the sensor 28, after sending each of the stepping pulses to the stepping motor 52. If the microcomputer 34 does not decect the vibration, then the microcomputer 34 sends a further single pulse to the stepping motor 52 via the control board 32. When the cutting blade 20 touches the upper surface of the ceramic filter 2, the vibration of the cutting blade 20 is immediately transferred to the XYZ stage 22 and the sensor 28 can detect the vibration. The microcomputer 34 then knows that the cutting blade 20 has touched the ceramic filter 2. At this point, the cutting blade 20 has dug into the ceramic body 12 by at most 4 µm. This is a standard level for the trimming. Under the control of its software, the microcomputer 34 then sends nine pulses to the stepping motor 52 to move the Z stage 50 to drive the cutting blade 20 into the ceramic body 12 to a depth of approximately 40 µm. As shown in Fig. 7, in step (a), the cutting blade 20 cuts into the ceramic body 12. The depth D in the Fig. 7 (a) is approximately 40 µm. According to the present invention, because the sensor 28 always detects surface of the ceramic filter 2, the depth of the trimming area can be determined independently of the height of the ceramic filter. In other words, the depth D is always approximately 40 µm from the top surface of the ceramic filter. This is a very important feature for automating the tuning steps. Next, in step (b), after digging the 40 µm depth, the microcomputer 34 stops the Z stage 50 and controls the X stage 45 or Y scage 46 to conduct the fine tuning. In this step, the cutting blade 20 is forwarded at the speed of approximately 1 mm/s in the X or Y direction. As shown in Fig. 8(a), because the cutting blade 20 vibrates 28000 times per second, the minimum cutting width is 1000 µm (1 mm) / 2800 = approximately, 0.036 µm. of course, as shown in Fig. 8(b), the cutting width W can be selected by selecting the forwarding speed of the cutting blade 20. Further, the cutting direction can be defined by the software in the microcomputer 34 according to necessity. Generally, a smaller cutting width results a more finely tuned ceramic filter. According to our experiment, the minimum tuned frequency is approximately 0.1 MHz. This figure means that our system according to the present invention can tune 1/8000 frequency of the usual 800 MHz band ceramic filters for Cellular Communication System. Further, according to the present invention, generation of unnecessary heat is rather low when compared with the above mentioned prior art rotary grinder method or the laser trimming method. According to our experiment, maximum temperature of the ceramic filter which was being trimmed was approximately 70°C degrees. Therefore, the system of the present invention does not need any cooling oil or cooling water. This is a very important feature for automating the trimming steps. Still further, in the described example of the present invention, it is not necessary to dress the cutting blade 20, because the cutting blade 20 is vibrating at ultrasonic frequency and cut particles are scattered automatically. This means that the cutting blade 20 has a self-cleaning characteristic. When trimming of the metallic layer 10 is finished, as shown in Fig. 7 (c), the microcomputer 34 controls the Z stage 50 to lift up the cutting blade 20 from the ceramic body 12. As shown in Fig. 9, according to the present invention, there can be obtained a constant depth and sharpened edge of the trimmed metallic layer 10. Further, according to our experiment, the frequency of burrs in the trimmed metallic layer 10 was minimised at 20 µm amplitude of vibration. Generally, such burrs cause flowing capacity or harmful dust if dropped, and it should be eliminated for fine tuning of the ceramic filters. As described above, our ultrasonic grinder system can use the surface of the ceramic filter as a reference level for the trimming and provide an accurate depth of the trimmed area from this reference level. Further, it is possible to define the shape of the perimeter of the trimmed area by suitable software control. Also, due to the improvements in respect of lower heat generation, and the self trimming depth control, our ultrasonic grinder system is suitable for automating tuning steps for ceramic filters.

Claims: A system for trimming a metallic layer (10) on a ceramic filter (2) to produce tuning thereof, comprising means (22,23) to receive the filter, and means (14,20) for selectively removing a portion of the metallic layer characterised by stage means including first and second relatively movable stage portions (45,50); motor means (48,52) controlled by control signals for moving the stage portions relative to one another; means (23) for mounting the ceramic filter on the first stage portion; vibrator means (14) for vibrating at an ultrasonic frequency; a cutting blade (20) coupled to the second stage portion and driven by said vibrator means for trimming the metallic layer on the ceramic filter; sensor means (28) for detecting vibration of the first stage portion and generating a sensing signal in response thereto, and; controller means (34) for producing the control signals for the motor means so as to produce a closing movement between the cutting blade and the metallic layer on the ceramic filter, said controller means causing said closing movement to cease in response to the sensing signal from said sensor means. A system according to claim 1 wherein the cutting blade has a rectangular shape and has a cutting edge defined between blade surfaces disposed at an angle of between 90 to 110 degrees. A system according to claim 1 or 2 wherein the vibrator means is operative to vibrate at a frequency of approximately 28KHz. A system according to any preceding claim, with the ceramic filter being mounted on the first stage portion, and the cutting blade (20) forming an angle of 50 to 70 degrees with the metallic layer on the filter. A system according to any preceding claim wherein the stage means includes three stage portions (45,46,50) movable in mutually perpendicular directions. A system according to any preceding claim including motor means (48,52,54)for driving the stages individually. A system according to any preceding claim wherein the controller means is operative to move the blade (20) to cut a pattern in the metallic layer after the cutting blade has contacted the layer. A method of trimming a metallic layer (10) on a ceramic filter (2) in which the layer is abraded selectively characterised by the steps of bringing a cutting blade (20) vibrating at an ultrasonic frequency into cutting contact with the metallic layer to be trimmed and such that the blade cuts into the ceramic filter by a predetermined depth, and producing a relative movement between the cutting blade and the ceramic filter so as to trim a selected area of the metallic layer whilst maintaining the blade at said predetermined depth, the cutting blade and the metallic layer subtending an angle of 50 to 70 degrees. A method according to claim 8 wherein the cutting blade (20) is vibrated at a frequency of approximately 28KHz. A method according to claim 8 or 9 wherein the cutting blade has a rectangular shape and has a cutting edge defined between blade surfaces disposed at an angle of between 90 to 110 degrees.

Inventors: BABA TAKAHISA, HORIGUCHI FUJIO, MIYAKI KIYOSHI, BABA, TAKAHISA,, HORIGUCHI, FUJIO,, MIYAKI, KIYOSHI,, Baba, Takahisa, c/o OKI ELECTRIC INDUSTRY CO. LTD., Horiguchi, Fujio, c/o OKI ELECTRIC INDUSTRY CO.LTD, Miyaki, Kiyoshi, c/o OKI ELECTRIC INDUSTRY CO.LTD
Applicants: OKI ELECTRIC IND CO LTD, OKI ELECTRIC INDUSTRY CO., LTD.
Application year: 1991
Main classification: H01P11
IPC codes: H01P11, H01P1