Bonding pad used in semiconductor device

Abstract: A polysilicon film (103) is formed on an Si substrate (101) through an insulating oxide film (102), and a composite film (104) constituted by oxide and nitride films is formed on the polysilicon film (103). A polycide layer (105) is formed on the composite film (104), and a metal electrode layer (110) serving as a bonding pad (108) is formed on the polycide layer (105) through a barrier metal layer (109).

Description: The present invention relates to a semiconductor device and, more particularly, to a structure of a bonding pad for connecting of elements formed on a semiconductor substrate. A portion, which bonds a metal wire to an electrode wiring layer which connects elements formed on a semiconductor substrate to each other in order to extract the electrical characteristics of these elements, has been conventionally called a bonding pad. Fig. 1 shows an example of a structure of a conventional bonding pad. As shown in Fig. 1, an insulating oxide film (field oxide film) 12 is formed on an Si substrate 11, and, e.g., a polysilicon layer 13 is formed on the insulating oxide film 12. Thereafter, a bonding pad 14 is formed on the polysilicon layer 13. The bonding pad 14 has the same structure as that of a normal wiring layer, and is constituted by a barrier metal layer 15 and a metal electrode 16. A passivation film 17 is formed around the layers 15 and 16. A wire 19 is bonded to the metal electrode 16 which constitutes the bonding pad 14 through an opening 18 formed in the passivation film 17. For example, a Ti layer is used as the barrier metal layer 15, and, e.g., an Aℓ or an Aℓ-Si-Cu layer as an Aℓ alloy is used as the metal electrode 16. The reason why the bonding pad 14 is formed on the polysilicon layer 13 is as follows. Since the barrier metal layer 15 such as Ti is hard to be bonded to the BPSG or PSG layer 17, if the barrier metal layer 15 and metal electrode 16 are directly formed on a commonly-used BPSG or PSG layer, they may come off. With the above structure, however, the mechanical strength of the films between the bonding pad 14 and the Si substrate 11 is insufficient. When the wire 19 is bonded to the metal electrode 16, therefore, a crack 21 may occur in the insulating oxide film 12. For this reason, when a voltage is externally applied to the bonding pad 14 through the wire 19 in order to operate the semiconductor device, a leakage current may flow between the bonding pad 14 and the Si substrate 11. In addition, the above-described conventional semiconductor device often has a structure wherein a BPSG (boron phosphosilicate glass) film is formed on the insulating oxide film 12. In this structure, if each of the films is thinned as the device is miniaturized, a problem similar to the above problem may occur when a wire is bonded to a bonding pad. GB-A-2 206 234 discloses a semiconductor device comprising a semiconductor substrate, a first insulating layer on the semiconductor substrate, an upper insulating layer having a contact hole, a bonding pad inside the contact hole, the bonding pad including a metal electrode layer to which a wire is to bonded, and a barrier metal layer underneath the metal electrode layer. The bonding pad is arranged on top of a glass layer serving as an interlevel insulator and provided on a field oxide layer. Patent Abstracts Of Japan, Vol. 5, No. 181 (E-83)[853], 20th November 1981 & JP-A-56 108 246 teach to absorb and disperse shocks which occur during bonding, by two polysilicon layers, each covered by a thin silicon oxide film. The silicon oxide layers are placed between bonding pad and substrate in order to decrease parasitic capacitances. Such shock absorption is based on a cushion effect provided exclusively by polysilicon, i.e. a soft material. US-A-4 613 956 discloses a method for fabricating a floating gate memory, wherein the key process involves forming precision, high-value polysilicon to polysilicon capacitors at the same time as low-resistance polysilicon gates and interconnects. Such device is completed by processing with contact etching and metallization steps, to interconnect the devices thus formed to form a functional complete integrated circuit chip, these steps being entirely conventional and well-known to those skilled in the art. According to US-A4 613 956, an oxide-nitride composite layer is used between two polysilicon gates because of its dielectric integrity and strength. US-A-4 426 764 discloses a semiconductor memory device with peripheral circuits, wherein the semiconductor memory device includes a first floating gate, a second floating gate, and a field insulator, and wherein the floating gate and the control gate do not substantially overlap the source and drain regions and the floating gate does not overlap the field insulator formed in the field region. This document suggests to the skilled person to provide between two polysilicon gates an oxide-nitride composite, in particular an ONO structure, that is a silicon nitride layer covered on both surfaces by silicon oxide films, in order to minimize strain caused by different coefficients of thermal expansion. US-A-4 613 956 and US-A-4 426 764 are silent about the mechanical resistance against pressure of the system of polysilicon - oxide/nitride composite - polysilicon layers forming the control and floating gates of an EPROM. It is an object of the present invention to provide a semiconductor device which can prevent a crack in an insulating oxide film when a wire is bonded to a bonding pad. In order to achieve the above object, according to the present invention, there is provided a semiconductor device as recited in independent claims 1 and 4. Preferred embodiments of the invention are recited in the dependent claims. According to the present invention, a hard film with a high withstand voltage which consists of oxide and nitride films is formed between the insulating film on the semiconductor substrate and the metal electrode layer which constitutes the bonding pad. Therefore, the mechanical strength of the films between the insulating film and the metal electrode layer can be increased, and hence a crack in the insulating film can be prevented upon bonding of the wire to the bonding pad, thus improving the withstand voltage of a bonding pad portion. Furthermore, since the insulating film has a multiple structure and the composite film constituted by the oxide and nitride films has a high withstand voltage, the withstand voltage can be maintained even when a crack occurs in a portion of the insulating film. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: Fig. 1 is a sectional view showing a structure of a conventional bonding pad; Fig. 2 is a sectional view showing the first embodiment of the present invention; Fig. 3 is a sectional view showing the second embodiment of the present invention; Fig. 4 is a graph showing frequencies of a crack and a leak upon ultrasonic bonding in the first and second embodiments of the present invention, and in the prior art; and Fig. 5 is a sectional view showing an EPROM to which the present invention is applied. Embodiments of the present invention will be described hereinafter with reference to the accompanying drawings. Fig. 2 shows the first embodiment of the present invention. In Fig. 2, the present invention is applied to a device having a two-layered gate structure such as an EPROM (electrically programmable read only memory). A first insulating layer (insulating oxide film) 102 serving as a field oxide film is formed on an Si substrate 101 to have a thickness of, e.g., about 500 nm (5,000 Å). A first polysilicon layer (film) 103 serving as a floating gate (gate material for the first layer) which constitutes the EPROM is formed on the insulating oxide film 102 to have a thickness of, e.g., about 200 nm (2,000 Å). A three-layered insulating film, i.e. a second insulating layer of, e.g, Oxide-Nitride-Oxide (to be referred to as an ONO insulating film hereinafter) 104 is formed as an interlevel film on the polysilicon film 103. A polycide layer (film) 105 serving as a control gate (gate material for the second layer) which constitutes the EPROM is formed on the ONO insulating film 104 to have a thickness of, e.g., about 500 nm (5,000 Å). The polycide film 105 consists of a polysilicon film 105A and an MoSi film 105B. An upper insulating layer (interlevel insulator) 106 is formed on the resultant structure, and a contact hole 107 is formed in the interlevel insulator 106. A bonding pad 108 having a two-layered structure is formed in the contact hole 107. The bonding pad 108 consists of a barrier metal layer 109 of, e.g., Ti and a metal electrode layer 110 of Aℓ. The barrier metal layer 109 is formed on the MoSi film 105B to have a thickness of about 50 nm (500 Å), and the metal electrode layer 110 is formed on the barrier metal layer 109 to have a thickness of, e.g., about 800 nm (8,000 Å). A passivation film 111 is formed on the resultant structure, and a wire 113 is bonded to the metal electrode layer 110 by ultrasonic waves through an opening 112 formed in the passivation film 111. For example, a PSG or BPSG (borophosphosilicate glass) film is used as the interlevel insulator 106, and, e.g., a PSG or SiN film is used as the passivation film 111. In the bonding pad with the above structure, the hard ONO insulating film 104 is formed between the soft polysilicon layers 103 and 105A, and the resultant structure is formed between the bonding pad 108 and the insulating oxide film 102. Therefore, the mechanical strength between the bonding pad 108 and the insulating oxide film 102 can be improved, and hence an impact which occurs upon bonding of the wire 113 to the bonding pad 108 can be reduced by the polysilicon layers 103 and 105A, and the ONO insulating film 104. Therefore, a crack in the insulating oxide film 102 can be prevented, and a leakage current can also be prevented. In addition, the ONO insulating film 104 has an extremely high insulating withstand voltage. Even if a crack occurs in the insulating oxide film 102, therefore, a leak from the bonding pad 108 into the Si substrate 101 can be prevented if a crack does not occur in the ONO insulating film 104. Therefore, a highly reliable semiconductor device can be provided. Furthermore, since the two polysilicon layers 103 and 105A are formed below the bonding pad 108, the thickness of the layer under the bonding pad 108 is increased. Therefore, the mechanical strength can be improved, and hence a crack which occurs upon bonding can be prevented, and ingress of water or impurities such as mobile ions into the crack can be prevented. The second embodiment of the present invention will be described hereinafter with reference to Fig. 3. The same reference numerals in Fig. 3 denote the same parts as in Fig. 2. In the second embodiment, the mechanical strength of the bonding pad portion is larger than that in the first embodiment. An insulating oxide film 102, a polysilicon film 103, an ONO insulating film 104, and an MoSi polycide film 105 which are sequentially formed on an Si substrate 101 are the same as those in the first embodiment. In the second embodiment, an interlevel insulator 106 consisting of, e.g., a PSG or BPSG film is formed on the resultant structure, and a third polysilicon layer 120 having a thickness of about 100 nm (1,000 Å) is formed on the interlevel insulator 106 as a material for the third layer. A barrier metal layer 109 of Ti is formed on the polysilicon layer 120, and a metal electrode layer 110 of Aℓ is formed on the barrier metal layer 109. A passivation film 111 is formed on the resultant structure, and a wire 113 is bonded to the metal electrode 110 by ultrasonic waves through an opening 112 formed in the passivation film 111. According to the second embodiment, the hard ONO insulating film 104 is formed between the soft polysilicon layers 103 and 105A in the same manner as in the first embodiment. In addition, the interlevel insulator 106 and the polysilicon layer 120 are formed above the resultant structure. Therefore, the film thickness is larger than that of the first embodiment, and hence the mechanical strength can be further improved. When a wire is bonded to a bonding pad 108, a crack can be prevented. Therefore, a leak from the bonding pad 108 into the Si substrate 101 can be prevented with higher reliability. In addition, since the ONO insulating film 104 having an extremely high insulating withstand voltage is used, a leak can be reliably prevented, thus providing a highly reliable semiconductor device. Fig. 4 shows a frequency of a crack in a film which is present between the bonding pad and the semiconductor substrate upon ultrasonic bonding, and a frequency of a leak which occurs between the bonding pad and the semiconductor substrate when a voltage is applied to the bonding pad, in the first and second embodiments of the present invention, and in the prior art. In Fig. 4, the ordinate axis represents frequencies of a crack and leak, and these frequencies in the prior art are defined as "1". In the first embodiment, the frequency of a crack is about "0.5", and is decreased to be half that in the prior art. The frequency of a leak is "0". In the second embodiment, the frequencies of a crack and leak are "0". As described above, according to the present invention, the withstand voltage of the bonding pad portion is higher than that in the prior art. In particular, in the structure of the bonding pad portion in the second embodiment, when the interlevel insulator 106 and the polysilicon layer 120 are formed, the film thickness is increased as compared with that in the first embodiment, and the withstand voltage can be further increased, thus obtaining a highly reliable semiconductor device. Fig. 5 shows an EPROM to which a bonding pad according to the present invention is applied. The same reference numerals in Fig. 5 denote the same parts as in the first and second embodiments. Thus, e.g., the polysilicon films 103 and 105A, and the ONO insulating film 104 can be formed at the same time that the EPROM is manufactured, so that the manufacturing steps of the EPROM need not be changed. Therefore, the semiconductor device of the present invention is extremely advantageous in the manufacture. Note that although an EPROM is exemplified and described in the above embodiments, the present invention is not limited thereto, and can be applied to a semiconductor device having a multilayer gate structure. Moreover, although the ONO insulating film is used as the insulating film between the gates of two layers in the above embodiments, the insulating film is not limited to this, and, e.g., an NO film or an ONON film can be used. Although Ti is used as the barrier metal layer, the other materials or a combination of Ti and the other material, such as W and TiN/Ti, can be used. Note that the present invention is not limited to the above embodiments, and various changes and modifications may be made without departing from the scope of the invention as defined by the appended claims. Reference signs in the claims are intended for better understanding and shall not limit the scope.

Claims: A semiconductor device comprising: (a) a semiconductor substrate (101); (b) a first insulating layer (102) on said semiconductor substrate (101); (c) an upper insulating layer (106) having a contact hole (107); (d) a bonding pad (108) inside said contact hole (107); (e.1) said bonding pad (108) including a metal electrode layer (110) to which a wire (118) is to be bonded (e.2) and a barrier metal layer (109) underneath said metal electrode layer (110); characterized in that (f) said barrier metal layer (109) is arranged on a polycide layer (105); (g.1) said polycide layer (105) is arranged on a second insulating layer (104), (g.2) said second insulating layer (104) is a composite film constituted by oxide and nitride films; (h) said second insulating layer (104) is arranged on a first polysilicon layer (103); and (i) said first polysilicon layer (103) is arranged on said first insulating layer (102). A semiconductor device according to claim 1, characterized in that said polycide layer (105) comprises an upper MoSi layer (105B) and a lower second polysilicon layer (105A). A semiconductor device according to claim 2, characterized in that said lower second polysilicon layer (105A) is soft, said second insulating layer (104) is hard, and said first polysilicon layer (103) is soft. A semiconductor device comprising (a) a semiconductor substrate (101); (b) a first insulating layer (102) on said semiconductor substrate (101); (c) an upper passivation layer (111) having a contact hole; (d) a bonding pad (108) inside said contact hole; (e.1) said bonding pad (108) including a metal electrode layer (110) to which a wire (113) is to be bonded (e.2) and a barrier metal layer (109) underneath said metal electrode layer (110); characterized in that (f) said barrier metal layer (109) is arranged on a third polysilicon layer (120); (g) said third polysilicon layer (120) is arranged on an interlevel insulator layer (106); (h) said interlevel insulator layer (106) is arranged on a polycide layer (105); (i.1) said polycide layer (105) comprises an upper metal silicide layer (105B) (i.2) and a lower second polysilicon layer (105A); (j.i) said lower second polysilicon layer (105A) is arranged on a second insulating layer (104), (j.2) said second insulating layer (104) is a composite layer constituted by silicon oxide and silicon nitride films; (k) said second insulating layer (104) is arranged on a first polysilicon layer (103); and (l) said first polysilicon layer (103) is arranged on said first insulating layer (102). A semiconductor device according to claim 4, characterized in that said upper metal silicide layer (105B) is a molybdenum silicide layer. A semiconductor device according to claim 4, characterized in that said lower second polysilicon layer (105A) is soft, said second insulating layer (104) is hard, and said first polysilicon layer (103) is soft.

Inventors: MORI SEIICHI, MORI, SEIICHI, MORI, SEIICHI, C/O INTELLECTUAL PROPERTY DIV.
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1990
Main classification: H01L23
IPC codes: H01L23, H01L21