Integrated circuits containing microwave circuits

Abstract: An integrated circuit comprising: microwave integrated circuit means having first input/output pads for high frequency signals and second input/output pads for drive signals and power signals; drive circuit means having third input/output pads for said drive signals and said power signals and connected to said microwave integrated circuit through said second and third input/output pads so as to drive the microwave integrated circuit means; high frequency connector means connected to said microwave integrated circuit through said first input/output pads so as to transmit said high frequency signals; connecting means connected to said drive circuit means through said third input/output pads so as to apply said drive signals and said power signals to the drive circuit means; and casing means for keeping said microwave integrated circuit means, said drive circuit means, said high frequency connector means and said connecting means therein, and including: a metallic conductor; a first dielectric member having one side surface joined to said metallic conductor and the other side surface for signal transmission; a second dielectric member having one side surface joined to said other side surface for signal transmission and the other side surface for grounding; a third dielectric member having one side surface joined to said other side surface for grounding and the other side surface for signal transmission; a fourth dielectric member having one side surface joined to said other side surface for signal transmission and the other side surface for grounding; a fifth dielectric member having one side surface joined to said other side surface for grounding and the other side surface for signal transmission; through holes provided respectively through said second to fifth dielectric members for electrically conducting the side surfaces for signal transmission of said first to fifth dielectric members; sealing means joined to said other side surface for signal transmission of said fifth dielectric member; and seal cover means joined to said sealing means. The high frequency connector means, said microwave integrated circuits means, said drive circuit means and said connecting means are electrically connected through said through holes.

Description: The present invention relates to integrated circuit devices according to the pre-characterizing parts of claim 1 and claim 2, respectively. Fig. 1(a) is the front view illustrating an example of an integrated circuit incorporating a microwave circuit to be used for an antenna system, provided according to the mounting method of a prior art. Fig. 1(b) and Fig. 1(c) are respectively the side elevation of Fig. 1(a). It is to be understood that for convenience of illustration of the mounting condition the enclosure cover has been removed. In Fig. 1, numeral 41 designates a microwave integrated circuit, numeral 42 input/output pads for the high frequency signals provided on the microwave integrated circuit 41, numeral 43 input/output pads for drive signals provided on the microwave integrated circuit 41, numeral 44 a drive circuit adapted to drive the microwave integrated circuit 41, numeral 45 input/output pads for drive signals provided on the drive circuit 44, numeral 48 a high frequency connector for inputting high frequency signals from outside and outputting the same to outside, numeral 49 connector pins adapted to input the external control signals to the drive circuit 44, numeral 47 gold wires connecting the connector pins 49 and the input/output pads 45 for drive signals, the input/output pads 43 for drive signals and the input/output pads 43 for drive signals and the input/output pads 42 for high frequency signals and the high frequency connectors 48, and the numeral 40 designates an accommodation casing. For simplicity of description, components attached to the microwave integrated circuit 41 and the drive circuit 44 are omitted. Operation of the integrated circuit will next be explained. The high frequency signals input from the high frequency connector 48a are input to the microwave integrated circuit 41 via the metallic wire 47c and the input/output pad 42a for high frequency signals. On the other hand, the drive circuit 44 provides predetermined drive signals corresponding to the external control signals input from the connector pins 49, so that the high frequency signals being transmitted in the microwave integrated circuit 41 are set at a predetermined level and are output to the external device by way of the input/ output pad 42b for the high frequency signals, the gold wire 47f and the connector 48b for high frequency signals. Since the microwave integrated circuit 41 and the associated drive circuit 44 have been mounted on plane relative to each other like in the manner of the integrated circuit of a prior art as shown in Fig. 1, the longitudinal dimension of these circuits in the mounted condition had to be long, and since the components to be installed on the microwave integrated circuit 41 are those for high frequency signals, the height of those components had to be far lower than that of the components installed on the drive circuit 44, this caused loss in the mounting space, leaving the problems to be solved in view of a high density mounting. Fig. 2(a) is the front view of mounting illustrating the second example of the integrated circuit provided according to a prior art mounting method. Fig. 2(b) is the side elevation of Fig. 2(a). Fig. 3 is the sectional view taken along the line A - A in Fig. 2(a). It is to be understood that for clear illustration of the mounting condition, the seal cover is removed. In Fig. 2(a), numeral 51 designates a first microwave integrated circuit, numeral 52 input/output pads provided on the first microwave integrated circuit 51, numeral 53 a second microwave integrated circuit, numeral 54 input/output pads provided on the second microwave integrated circuit 53, numeral 55 a metallic conductor adapted to install the first microwave integrated circuit 51 and the second microwave integrated circuit 53, numeral 59 a metallic frame for sealing, numeral 70 a dielectric member, numeral 60 strip tracks formed on the dielectric member 70, numeral 71 a dielectric member for electrically insulating the metallic frame 59 for sealing and the strip tracks 60 and numeral 61 gold wires connecting the input/output pads 52 for the first microwave integrated circuit, the input/output pads 54 for the second microwave integrated circuit and the strip tracks 60. It is to be noted that for the sake of simplifying the explanation the components to be installed on the first microwave integrated circuit 51 and the second microwave integrated circuit 53 are omitted. Operation of the above-described circuit will next be explained. In Fig. 2(a), the high frequency signals input from the strip track 60a are input to the first microwave integrated circuit 51 by way of the gold wire 61a, the input/output pad 52a of the first microwave integrated circuit and are set at a predetermined level, and then are output to the input/output pad 52b of the first microwave integrated circuit. The signals are further input to the second microwave integrated circuit 53 by way of the gold wire 61b, the input/output pad 54a of the second microwave integrated circuit and are set at another predetermined level, and then are output the outside by way of the input/output pad 54b of the second microwave integrated circuit, the gold wire 61c and the strip track 60b. Since the first microwave integrated circuit 51 and the second microwave integrated circuit 53 which operate as described above, have been mounted on plane relative to each other according to the prior art mounting, as shown in Fig. 2(a), the longitudinal dimension of these circuits had to be long to expand the mounting area, resulting in difficulty in realizing many functions in a limited mounting area. Furthermore, as shown in Fig. 2 (b) and Fig. 3, since the dielectric member 70 and the dielectric member 71 are embedded in the metallic frame 59 for sealing to constitute the field through provided with a lightness and the external interface, severe machining precision as well as assembly accuracy are required to result in a high cost. EP-A-0 272 046 discloses a circuit arrangement for semiconductor device consisting of a plurality of ceramic layers which partly are provided with conductive patterns. The electrical connections of the conductive patterns is made via through holes. The ceramic layers are arranged in such a way that a recess is formed through some of the layers in which a semiconductor device is mounted. The recess is covered with a lid. US 4,620,264 shows a plurality of ceramic layers with conductive patterns which are interconnected via through holes. Semiconductor elements are mounted on the upper layer. No recesses and no cover are provided. Connecting pins are joined to the respective conductor layers. Considering the circuit arrangement disclosed in EP-A-0 272 046, it is an object of the present invention is to improve the mounting density of an integrated circuit including a microwave circuit. This object is solved by the features of claim 1 and those of claim 2. Specific embodiments of the integrated circuit device according to the invention of claim 2 are defined in claims 3 to 8. According to the present invention, since the microwave integrated circuit and the drive circuit for the microwave integrated circuit are accommodated in the accommodation casing having a layer structure made of a multilayer ceramic and the through holes in the multilayer ceramic are utilized for wiring, the number of the tracks provided on the same plane can be reduced and the mounting density can be enhanced. Further according to the present invention, the microwave integrated circuit and the drive circuit for the microwave integrated circuit are accommodated in the accommodation casing having a layer structure and they are disposed vertically, so that the longitudinal dimension of the integrated circuit can be reduced and the ineffective space over the microwave integrated circuit can be reduced and the mounting density can be enhanced. Also according to the present invention, the high frequency connectors adapted to feed the high frequency signals to the microwave integrated circuit and the connector pins adapted to supply the external control signals and the power signal to the drive circuit for the microwave integrated circuit are provided and connected on the underside surface of the accommodation casing so as to reduce the longitudinal dimension of the integrated circuit. According to the present invention package for a microwave integrated circuit is provided in which the microwave integrated circuit is mounted in a hierarchical manner so as to reduce the mounting area and the productivity is enhanced by dispensing with strict machining precision, etc., required for the field through portions. Further a plurality of microwave integrated circuits are mounted in an accommodation package in a hierarchical manner, the package having a layer structure provided by a multilayer dielectric member so as to contract the mounting area. The electrical connection of the microwave integrated circuit is attained having vertical mounting by forming micro strip tracks, triplate tracks and coaxial tracks on a multilayer dielectric member and constituting a means transforming high frequency transmission tracks in a horizontal-vertical-horizontal direction. In the microwave integrated circuit a through hole of a horse shoe type is formed through a dielectric member and metallic material is filled therein so as to provide an external conductor for the coaxial tracks, whereby coaxial tracks can be formed in the dielectric member. The machining accuracy and assembly accuracy can be improved by overlapping the feed through portions and the dielectric member. In the microwave integrated circuit according to the invention through holes are provided at the circumference cf the respective layers of a multilayer dielectric member and these through holes are connected to compose an electromagnetic shield. Fig. 1 illustrates the first example of the integrated circuit including a microwave circuit in accordance with the mounting method of a prior art. Fig. 1(a) is the front view of the integrated circuit and Fig. 1(b) and Fig. 1(c) are respectively the side elevations thereof; Fig. 2 illustrates the second example of the integrated circuit in accordance with the mounting method of a prior art. Fig. 2(a) is the front view of the integrated cicuit and Fig. 2(b) is the side elevation thereof; Fig. 3 is the sectional view taken along the line A - A in Fig. 2(a); Fig. 4 illustrates a first embodiment of the integrated circuit in accordance with the mounting method according to the present invention. Fig.4(a) is the front view of the integrated circuit and Fig. 4(b) and Fig. 4(c) are respectively the side elevations thereof; Fig. 5 is the sectional view taken along the line C - C in Fig. 4(a); Fig. 6 illustrates a second embodiment of the integrated circuit in accordance with the mounting method according to the present invention. Fig. 11(a) is the front view of the integrated circuit and Fig. 11(b) is the side elevation thereof; Fig. 7 is the sectional view taken along the line F - F in Fig. 6(a); Fig. 8 is the sectional view taken along the line G - G in Fig. 6(a); Fig. 9 is the sectional view taken along the line H - H in Fig. 6(a); Fig. 10 is the view seen from the arrow I in Fig. 7; Fig. 11 is the view seen from the arrow J in Fig. 8; Fig. 12 illustrates the electromagnetic shield in which side through holes are formed inside the integrated circuit; Fig. 13 illustrates the electromagnetic shield in which the side through holes are formed outside the integrated circuit; and Fig. 14 illustrates the concrete example of transforming from the micro strip track to the triplate track. Fig. 4(a) is the front view illustrating the second embodiment of the integrated circuit according to the present invention. Fig. 4(b) and Fig. 4(c) are the side elevations of Fig. 4(a). Fig. 5 is the sectional view taken along the line C - C in Fig. 4(a). In Fig. 5, numeral 140 designates a metallic conductor provided on the lower portion of the accommodation casing, numeral 141 a first dielectric member having one side surface joined to the metallic conductor 140 and the other side surface provided with the surface for signal transmission, numeral 142 a second dielectric member having one side surface joined to the signal transmission surface of the first dielectric member 141 and the other side surface provided with the surface for grounding, numeral 143 a third dielectric member having one side surface joined to the grounding surface of the second dielectric member 142 and the other side surface provided with the surface for signal transmission, numeral 144 a fourth dielectric member having one side surface joined to the signal transmission surface of the third dielectric member 143 and the other side surface provided with the surface for grounding, and numeral 145 a fifth dielectric member having one side surface joined to the grounding surface of the fourth dielectric member 144 and the other side surface with the signal transmission surface as well as the grounding surface. It is to be noted that the dielectric members 141, 142, 143, 144, and 145 are provided therein with through holes 147 for supplying signals and power. Numeral 146 designates a seal ring, numeral 148 a signal transmission track provided on the signal transmission surface of the third dielectric member 143, numeral 150 an input/output pad for supplying the drive signals and the power to the microwave integrated circuit 41 provided on the signal transmission surface of the third dielectric member 143, and numeral 130 input/output pads for the drive signals connecting the drive circuit 44 and the through holes 147. Operation of the integrated circuit shown in Figs. 4 and 5 will next be explained. In Fig. 4, the high frequency signals input from the high frequency connector 48a are applied to the microwave integrated circuit 41 by way of the gold wires 47 and the input/output pads 42 for the high frequency signals. The drive circuit 44 receives the external control signals input from the connector pins 49a, 49b through the gold wires 47 and the input/output pads 45 and outputs predetermined drive signals responsive to the control signals by way of the gold wires 47 and the input/output pads 130. The output signals are input from the input/output pad 130b for the drive signals to the microwave integrated circuit 41 by way of the through holes 147a - 147c, the signal transmission surface of the first dielectric member 141, the through holes 147d, 147e, as shown in Fig. 5, and the input/output pads 150, as shown in Fig. 4, so that the high frequency signals being transmitted in the microwave integrated circuit 41 are set at a predetermined value and the set signals are transmitted to the external device by way of the input/output pad 42 for the high frequency signals, the gold wires 47 and the connector 48b for the high frequency signals. In this way, the microwave integrated circuit and the drive circuit associated with the microwave integrated circuit are not disposed on a plane but accommodated in the accommodation casing of a multilayer construction, and the wiring is so connected vertically in the through holes in the multilayer ceramic member as the accomodation casing that the longitudinal dimension of the casing and the ineffective space over the microwave integrated circuit are reduced, so that the mounting density can be enhanced. Fig. 6(a) is the front view illustrating the second embodiment of the integrated circuit according to the present invention. Fig. 6(b) is the side elevation of Fig. 6(a). Fig. 7 is the sectional view taken along the line F - F in Fig. 6(a). Fig. 8 is the sectional view taken along the line G - G in Fig. 6(a), Fig. 9 is the sectional view taken along the line H - H in Fig. 6(a). Fig. 10 is the view as seen from the arrow I in Fig. 7. Fig. 11 is the view as seen from the arrow J in Fig. 8. Fig. 12 illustrates the electromagnetic shield embodied in such a way as to have side through holes inside thereof. Fig. 13 illustrates the electromagnetic shield embodied in such a way as to have side through holes outside thereof. Fig. 14 illustrates a concrete example of transition from the micro strip track using side through holes to the triplate track. In Fig. 6, numeral 200 designates a first dielectric member having one side surface joined to the metallic conductor 55 and the other side surface provided with the strip track 60, numeral 201 a second dielectric member having one side surface joined to the surface of the first dielectric member 200 forming the strip track and the other side surface provided with grounding patterns, numeral 202 a third dielectric member having one side surface joined to the grounding pattern surface of the second dielectric member 201 and the other side surface provided with the strip track 60, numeral 204 through holes for connecting the second dielectric member 201 and the strip track 60 provided in the third dielectric member 202, numeral 205 grounding patterns formed on the second dielectric member 201, numeral 206 through holes of a horse shoe configuration as an outer conductor which are adapted to form a coaxial track together with the through holes 204 provided in the first dielectric member 200 and the second dielectric member 201, numeral 207 through holes for the electromagnetic shield provided circumferentially in the first dielectric member 200, the second dielectric member 201 and the third dielectric member 202 and connected to the metallic conductor 55 and the metallic frame 203 for seal, numeral 208 through holes provided through the first dielectric member 200 and the second dielectric member 201, and connected to the metallic conductor 55 and the grounding pattern 205, thereby effecting transition between the micro strip track and the triplate track, numeral 209 inside through holes for the electromagnetic shield, which are provided in the first dielectric member 200, the second dielectric member 201 and the third dielectric member 202 and are connected to the metallic conductor 55 and the metallic frame 203 for seal, numeral 210 outside through holes for the electromagnetic shield, which are provided at the outside of the first dielectric member 200, the second dielectric member 201 and the third dielectric member 202 and are connected to the metallic conductor 55 and the metallic frame 203 for seal, and numeral 211 side through holes provided through the first dielectric member 200 and the second dielectric member 201 and connected to the metallic conductor 55 and the grounding pattern 205, thereby effecting transition between the micro strip track and the triplate track. Operation of the integrated circuit shown in Figs. 6, 7, 8, 9, and 10 will next be explained. The flow of the high frequency signals will first be explained by referring to Figs. 6(a), 7, and 8. The high frequency signals input from the strip track 60a are applied to the first microwave integrated circuit 51 through the gold wire 61a and the input/output pad 52a on the first microwave integrated circuit 51 and are set at a predetermined level. After the set signals are output to the input/output pad 52b on the first microwave integrated circuit, they are applied to the second microwave integrated circuit by way of the gold wire 61b, the strip track 60b, the through holes 204a, 204b, the strip track 60c, the gold wire 61c, and the input/output pad 54a on the second microwave integrated circuit and are set at another predetermined level. Then, the set signals are output to the external device by way of the input/output pad 54b on the second microwave integrated circuit, the gold wire 61d, the strip track 60d, the through holes 204c, 204d, and the strip track 60e. Next, the transition in the horizontal-vertical-horizontal direction of the high frequency transmission path from the first microwave integrated circuit 51 to the second microwave integrated circuit will be explained with reference to Figs. 7 and 10. In Fig. 7, the strip track 60b defines the micro strip track as the high frequency transmission track which is paired with the metallic conductor 55, and is used for connection to the input/output pad 52b on the first microwave integrated circuit. In order to transform the high frequency transmission track of the micro strip in a vertical direction, the metallic conductor 55 and the grounding pattern 205a are connected by the through holes 208a, 208b for transforming the micro strip track to the triplate track, as shown in Fig. 10, so that they are paired with the strip track 60b to form the triplate track.Also the grounding pattern 205a is paired with the strip track 60c to form the micro strip track for connection to the input/output pad 54a on the second microwave integrated circuit. Then, the strip tracks 60b and 60c are connected by using the through holes 204a, 204b. Furthermore, by means of the through holes 206a and 206b in the form of a horse shoe, the metallic conductor 55 and the grounding pattern 205a are connected to form the coaxial track, so that the propagation direction of the high frequency signals can be changed to the vertical direction. The transition in the horizontal-vertical-horizontal direction of the high frequency transmission track from the second microwave integrated circuit 53 to the strip track 60e for outputting externally will next be explained by referring to Figs. 8 and 11. In Fig. 8, the strip track 60d is paired with the grounding pattern 205c to form the micro strip track and is used for connection to the input/output pad 54b of the second microwave integrated circuit. Next, the strip tracks 60d and 60e are connected by using the through holes 204c, 204d and,further, the grounding pattern 205c and the metallic conductor 55 are connected by means of the through holes 206c, 206d in the form of a horse shoe to form the coaxial track for the external conductor of the vertical transition portion. Then, the strip track 60e is paired with the grounding pattern 205c and the metallic conductor 55 to form the triplate track so as to propagate the signals in the horizontal direction. Furthermore, by connecting the metallic conductor 55 and the grounding pattern 205c by means of the through holes 208c, 208d for transforming the micro strip track to the triplate track, the strip track 60e is paired with the metallic conductor 55 to form the micro strip track which is used as the interface for the external device. Although the through holes 208 have been used for transforming the micro strip track to the triplate track, the side through holes 211 may be provided at the end surface of the substrate as shown in Fig. 14, so that the metallic conductor 55 may be connected to the grounding pattern 205a. In case that the through holes cannot be filled with metallic materials having a low resistance, the through holes may be formed as side through holes which are then processed by plating or the like to improve the electrical characteristics. The electromagnetic shield will next be explained by referring to Fig. 9. As shown in Fig. 9, the through holes 207 for the electromagnetic shield are provided through the first dielectric member 200, the second dielectric member 201 and the third dielectric member 202 to connect the metallic conductor 55 and the metallic frame 203 for sealing. The electromagnetic shield may be attained by the distance between the through holes for the electromagnetic shield being sufficiently narrow and by sealing the metallic frame 203 by means of the metallic cover. It is also to be noted that as shown in Figs. 12 and 13, the outside or inside through holes 209, 210 may be provided on or in the integrated circuit to provide the electromagnetic shield, or if an electromagnetic shield having a fairly high frequency is required, the side through holes may be more effective because of its capability of providing an entire shield or nearly entire shield.

Claims: An encased integrated circuit device comprising: a) a casing formed by a metallic conductor plate (140), a first dielectric plate (141) having a first main surface joined to said metallic conductor plate and having a first signal transmission surface provided on a first other main surface opposite to said first main surface; a second dielectric plate (142) having a second main surface joined to said first dielectric plate at said first other main surface and having a first grounding surface provided on a second other main surface opposite to said second main surface; a third dielectric plate (143) having a third main surface joined to said second dielectric plate at said second other main surface and having a second signal transmission surface provided on a third other main surface opposite to said third main surface, which third dielectric plate is provided with a first opening extending from said third main surface to said third other main surface; a fourth dielectric plate (144) having a fourth main surface joined to said third dielectric plate at said third other main surface and having a second grounding surface provided on a fourth other main surface opposite to said fourth main surface, which fourth dielectric plate is provided with a second opening extending from said fourth main surface to said fourth other main surface and which second opening is larger than said first opening; a fifth dielectric plate (145) having a fifth main surface joined to said fourth dielectric plate at said fourth other main surface and having a third signal transmission surface provided on a fifth other main surface opposite to said fifth main surface, which fifth dielectric plate is provided with a third opening extending from said fifth main surface to said fifth other main surface and said third opening is larger than said second opening; a group of electrically conductive through holes (147a-147e) provided through said second to fifth dielectric plates, which group of electrically conductive through holes establish electrical connections between said first, second, and third signal transmission surfaces; a seal ring (146) joined to said fifth dielectric plate at said fifth other main surface; a seal cover joined to said seal ring, and said first to fifth dielectric plates, said seal ring and said seal cover define a sealed cavity in said casing; b) an integrated circuit having first input/output pads (42) and second input/output pads (43), said integrated circuit is provided on said second other main surface within said sealed cavity, said second input/output pads are electrically connected to said first signal transmission surface via input/output pads (150) provided on said third other main surface within said sealed cavity and first corresponding conductive through holes in said second and third dielectric plates (147e,147d) of said group of electrically conductive through holes, said first input/output pads are electrically connected to a first connector (48) extending from said sealed cavity to the exterior of said casing; and c) a circuit having third input/output pads (45a) and fourth input/output pads (45c), said circuit is provided on said fourth other main surface of said fourth dielectric plate exposed within said sealed cavity, said fourth input/output pads are electrically connected to said first transmission surface via input/output pads (130) provided on said fifth other main surface within said sealed cavity and second corresponding conductive through holes in said second, third, fourth and fifth dielectric plates (147a,147b,147c) of said group of electrically conductive through holes, and said third input/output pads are electrically connected to a second connector (49) extending from said sealed cavity to the exterior of said casing; characterised in that: said circuit is a drive circuit provided on said fourth other main surface within said sealed cavity, said third and fourth input/output pads are drive signal and power signal pads; and said integrated circuit is a microwave integrated circuit, said first input/output pads are high frequency signal input/output pads, said second input/output pads are drive and power signal pads. An encased integrated circuit device comprising: a) a casing formed by a metallic conductor plate (55); a first dielectric plate (200) having a first main surface joined to said metallic conductor plate (55) and having a first other main surface opposite to said first main surface provided with first, second and third conductive tracks (60a, 60b, 60e) which first dielectric plate (200) is provided with a first opening extending from said first main surface to said first other main surface; a second dielectric plate (201) having a second main surface joined to said first dielectric plate (200) at said first other main surface and having a second other main surface opposite to said second main surface provided with grounding patterns (205a, 205b), which second dielectric plate (201) is provided with a second opening extending from said second main surface to said second other main surface and which second opening is larger than said first opening; a third dielectric plate (202) having a third main surface joined to said second dielectric plate (201) at said second other main surface and having a third other main surface opposite to said third main surface provided with fourth and fifth conductive tracks (60c, 60d), which third dielectric plate (202) is provided with a third opening extending from said third main surface to said third other main surface and which third opening is larger than said second opening; first corresponding electrically conductive through holes (204a, 204b) provided through said second (201) and third (202) dielectric plates, which first corresponding electrically conductive through holes (204a, 204b) establish electrical connections between said second and fourth conductive tracks (60b, 60c); second corresponding electrically conductive through holes (204c, 204d) provided through said second (201) and third (202) dielectric plates, which second corresponding electrically conductive through holes (204c, 204d) establish electrical connections between said third (60e) and fifth (60d) conductive tracks; a seal ring (203) joined to said third dielectric plate, a seal cover joined to said seal ring, and said metallic conductor plate (55), said first to third dielectric plates (200, 201, 202), said seal ring (203) and said seal cover define a sealed cavity in said casing; b) a first integrated circuit (51) having first input/output pads (52a) and second input/output pads (52b), said first integrated circuit (51) is provided in said first opening on said metallic conductor plate (55) within said sealed cavity, said first input/output pads (52a) are electrically connected to said first conductive track (60a) and said second input/output pads (52b) are electrically connected to said second conductive track (60b); and c) a second integrated circuit (53) having third input/output pads (54a) and fourth input/output pads (54b), said second integrated circuit (53) is provided in said third opening on said second other main surface within said sealed cavity, said third input/output pads (54a) are electrically connected to said fourth conductive track (60c), and said fourth input/output pads (54b) are electrically connected to said fifth conductive track (60d), characterized in that said first and second integrated circuits are microwave integrated circuits (51, 53), said first to fourth input/output pads (52a, 52b, 54a, 54b) are high frequency input/output pads, and said first to fifth conductive tracks are micro strip tracks (60a - 60e). An integrated circuit device according to claim 2, further characterized in that corresponding electrically conductive through holes (208a, 208b) are provided in said first and second dielectric plates (201, 202) which corresponding through holes connect said grounding patterns (205a) of said second dielectric plate (201) and said metallic conductor plate (55) so that they are paired with the second micro strip track (60b) to form a triplate track. An integrated circuit device according to claim 3, further characterized in that said corresponding electrically conductive through holes (208a, 208b) which connect said grounding pattern (205a) of said second dielectric plate (201) and said metallic conductor plate (55) are formed as side through holes (211a-211d). An integrated circuit device according to claim 2, further characterized in that horse shoe shaped electrically conductive through holes (206a - 206d) are formed in said first and second dielectric plates (200, 201) which horse shoe shaped electrically conductive through holes connect said grounding patterns (205a, 205c) of said second dielectric plate (201) and said metallic conductor plate (55), and thereby form a coaxial track. An integrated circuit device according to claim 2, further characterized in that shield through holes (207a-207f) are formed in said first to third dielectric plates (200 - 202) which shielding through holes provide electromagnetic shielding and connect said metallic conductor plate (55) and said seal ring (203) which is metallic. An integrated circuit device according to claim 2, further characterized in that shielding through holes (209a-209f) are provided on the sidewalls of said first to third openings of said first to third dielectric plates (200 - 202) which shielding through holes connect said metallic conductor plate (55) and said seal ring (203) which is metallic, thereby forming an electromagnetic shield. An integrated circuit device according to claim 2, further characterized in that shielding through holes (210a-210f) are provided on the exterior side wall of said first to third dielectric plates (200 - 202) which shielding through holes connect said metallic conductor plate (55) and said seal ring (203) which is metallic, thereby forming an electromagnetic shield.

Inventors: INAMI KAZUYOSHI, KAWANO HAZIME, NISHIOKA YASUHIKO, INAMI, KAZUYOSHI, KAWANO, HAZIME, NISHIOKA, YASUHIKO, INAMI, KAZUYOSHI, C/O KAMKURASEISAKUSHO, KAWANO, HAZIME, C/O KAMKURASEISAKUSHO, NISHIOKA, YASUHIKO, C/O KAMKURASEISAKUSHO
Applicants: MITSUBISHI ELECTRIC CORP, MITSUBISHI DENKI KABUSHIKI KAISHA
Application year: 1990
Main classification: H01L21
IPC codes: H01L23