Chemical vapor deposition apparatus

Abstract: A chemical vapor deposition system for depositing a material selectively on a part of a substrate comprises a reaction chamber (36) for defining a space in which a chemical vapor deposition process is performed, a holder (34) provided within the reaction chamber for holding a substrate (33) on which a material layer is to be deposited, a heater fixture (35) for heating the holder to hold the substrate on the holder at a controlled temperature, a gas inlet fixture (1, 1a - 1c) provided on the reaction chamber for introducing one or more source gases into the reaction chamber, the source gases including reactant species which produce the material upon a chemical reaction taking place at a surface of the substrate, and a reactant distribution fixture (2, 2′) provided on the gas inlet fixture within the reaction chamber for controlling distribution of the reactant species in the reaction chamber, wherein the reactant distribution fixture defines a subspace (2a) surrounding the substrate within the space of the reaction chamber such that the subspace has a dimension (D), measured in a direction generally perpendicular to the surface of the substrate such that the dimension is at least less than one half of the mean free path of the reactant species realized inside the space of the reaction chamber during the chemical vapor deposition process and such that there is formed an opening (2c) for communicating the subspace inside the reaction distribution means with the rest of the space of the reaction chamber for freely passing product species formed as a result of the chemical reaction at the surface of the substrate.

Description: BACKGROUND OF THE INVENTION The present invention generally relates to chemical vapor deposition and more particularly to an apparatus for depositing tungsten selectively on a metal part or semiconductor part of a substrate while prohibiting growth of tungsten layer on an insulator part. Conventionally, chemical vapor deposition apparatus using a resistance heater as means for heating a substrate has been employed for depositing metals such as tungsten or semiconductors selectively on the substrate. In such a conventional apparatus, not only the substrate alone but other part of the system in a reaction chamber such as a holder of the substrate or the heater itself are heated relatively uniformly, and associated therewith, there arises a problem in that byproducts of CVD reaction tends to be formed extensively on these heated parts. These byproducts tend to react with the insulator part of the substrate to form the nuclei of tungsten growth, and thereby, the selective growth of desired material such as tungsten on the substrate is no longer obtained. In order to avoid this problem, localized heating of the substrate by infrared irradiation is commonly used. In the case of heating by the infrared irradiation, the substrate alone is heated and cooled rapidly and selectively while the holder or other parts in the reaction chamber of the CVD system are held relatively cool. However, the system using the resistance heater is supposed to be advantageous when the substrate is replaced one after another for mass production, because of the relatively stabilized temperature of the holder and the substrate. FIG.1 shows a conventional chemical vapor deposition apparatus schematically. Referring to FIG.1, a source gas introduced into a reaction chamber 36 via an inlet tube 1 is released into the chamber through a shower nozzle 31. In the chamber 36, a substrate 33 is held on a holder 34 of quartz and the like, and the substrate 33 is heated via the holder 34 by a resistance heater 35 provided underneath the holder 34 at the outside of the reaction chamber 36. Further, the reaction chamber 36 is evacuated via an exhaust port 32 by an evacuation pump not illustrated as well as via another exhaust port 37a by an evacuation pump 37. When an infrared lamp is used for heating the substrate 33, the lamp may be provided underneath the holder 34 so as to irradiate the substrate 33 through the holder or may be provided above the substrate 33. In the CVD apparatus of FIG.1, the shower nozzle 31 is separated from the wafer 33 by a distance of about 20 cm, and the source gas is introduced into the reaction chamber 36 after passing through a mesh structure in the shower nozzle 31 (not illustrated) such that the source gas uniformly covers the surface of the substrate 33. Document US-A-4,830,891 describes a deposition apparatus similiar to that shown in Fig. 1. The temperature of the substrate is controlled by heating the whole substrate by the thermal conductivity obtained from the heat of a heated substrate stage carried by an inert gas being introduced from a bomb and passed to a gap between the substrate stage surface and the rear side of the substrate. Furthermore, the chemical deposition system comprises a water-cooled conic gas flow controlling means such as a plate. Conventionally, the selective growth of tungsten by the CVD process has been generally undertaken at a relatively high total pressure such as 1,33 Pa (10⁻² Torr) or more. The evaluation of the property such as resistivity of the tungsten layer thus grown or corrosion taking place in the silicon substrate, is well documented. However, when a resistance heater is used for the heat source 35 in particular, there arises a problem in that byproduct molecules such as SiF x are formed extensively at the heated surface of the holder 34 and the like as a result of the reaction of source gases such as WF₆ and SiH₄ and these byproduct molecules cause an unwanted reaction with the substrate 33 known as encroachment when the source gas, particularly WF₆ is transported to the substrate 33. Thereby, the quality of the tungsten layer deposited on silicon is degraded. Further, the byproduct molecules react with the insulator part of the substrate and form the nuclei for growth of tungsten. Thereby, the selective growth itself is lost. Conventionally, it is known that such undesirable problems can be avoided when the total pressure in the reaction chamber is reduced below 0,133 Pa (10⁻³ Torr) during the CVD process. It is generally accepted that such a reduction of the total pressure results in an increase in the mean free path of the byproduct molecules which increase in the mean free path facilitates the scavenging of the reaction chamber. According to the experiments conducted by the applicants of the present invention, the selectivity of tungsten growth is certainly improved when conducted under the total pressure of about 0,133 Pa (10⁻³ Torr) or less as compared with the case where the growth is made under the total pressure of 1,33 Pa (10⁻² Torr) or more. However, such a growth of tungsten under the reduced total pressure has a problem in that the rate of growth is too slow because of the reduced supply of reactant species to the substrate. Further, the problem of encroachment of tungsten into silicon causing the degradation of the tungsten layer is not completely solved. SUMMARY OF THE INVENTION Accordingly, it is a general object of the present invention to provide a novel and useful chemical vapor deposition apparatus wherein the foregoing problems are eliminated. Another object of the present invention is to provide a chemical vapor deposition apparatus for selectively depositing a material layer on a part of a substrate, wherein a satisfactory growth rate can be achieved even when the deposition is undertaken at a reduced pressure, without degrading the selectivity. Another object of the present invention is to provide a chemical vapor deposition apparatus for selectively depositing a tungsten layer on a part of a silicon substrate exposed in an insulator layer provided thereon, wherein a satisfactory growth rate can be obtained even when the deposition is undertaken at a pressure of 0,133 Pa (10⁻³ Torr) or less, without degrading the selectivity. Another object of the present invention is to provide a chemical vapor deposition apparatus for depositing a material such as tungsten on a substrate under a reduced pressure, wherein the encroachment of tungsten into the substrate is effectively suppressed. Another object of the present invention is to provide a chemical vapor deposition apparatus for depositing a material selectively on a part of a substrate, comprising a reaction chamber for defining a space in which a chemical vapor deposition process is performed, the reaction chamber having an evacuating port adapted for connection to an evacuating unit for evacuating the reaction chamber therethrough, holding means provided within the reaction chamber for holding a substrate on which a material layer is to be deposited, heating means for heating the holding means to hold the substrate on the holding means at a controlled temperature, gas inlet means provided on the reaction chamber for introducing one or more source gases into the reaction chamber, and reactant distribution means provided on the gas inlet means within the reaction chamber for controlling distribution of the reactant species in the reaction chamber, the reactant distribution means defining a subspace surrounding the substrate within the space of the reaction chamber such that there is formed an opening for communicating the subspace inside the reaction distribution means with the rest of the space of the reaction chamber for freely passing by-product species formed as a result of the chemical reaction at the surface of the substrate, the gas inlet means comprising a tube extending into the reaction chamber and the reactant distribution means comprising a plate member provided on the tube as a collar member with the plate member having an inner surface facing the substrate and an outer surface opposing the inner surface, wherein the outer surface of the plate is provided with reflection means for reflecting infrared radiation back to the substrate. According to the present invention, the reactant species introduced into the reaction chamber are confined in the subspace defined by the reactant distribution means and an effective reaction, including an increased reaction rate, is achieved even when the total pressure in the reaction chamber is reduced. When the foregoing system is applied to the selective growth of tungsten on silicon, the problems such as non-selective growth of tungsten or degradation of quality of tungsten layer caused in association with the encroachment of tungsten are eliminated by reducing the total pressure to about 0,133 Pa (10⁻³ Torr) or less, while still maintaining a satisfactory growth rate in spite of the reduced pressure of deposition. BRIEF DESCRIPTION OF THE DRAWINGS FIG.1 is a schematic view showing the construction of a conventional CVD apparatus having a shower nozzle for introducing reactant species into the reaction chamber; FIG.2 is a schematic view showing the construction of a CVD apparatus according to a first embodiment of the present invention; FIG.3 is a diagram showing a second embodiment of the present invention; and FIG.4 is a diagram showing a third embodiment of the present invention. DETAILED DESCRIPTION Hereinafter, the present invention will be described with reference to the drawings. FIG.2 shows a first embodiment of the present invention. In the drawing, the parts corresponding to those already described with reference to FIG.1 are given identical reference numerals and the description thereof will be omitted. In the present embodiment, a reflection cover 2 is provided, somewhat like a collar, on the inlet tube 1 extending into the reaction chamber 36, and the reflector cover 2 defines a subspace 2a between the substrate 33 and the reflection cover 2. The reflection cover 2 has a concaved inner surface 2b surrounding the substrate 33 except for lateral ends 2c thereof, and confines the reactant species introduced into the chamber 36 via the inlet 1 within the subspace 2a. The reflection cover 2 is formed of a material such as silicon oxide which is relatively immune to the reaction with the source gases introduced into the reaction chamber 36. Further, there may be provided a metal layer 2d behind the reflection cover 2 so as to provide a mirror for reflecting the infrared radiation from the substrate 33 and the holder 34 back to the substrate 33 along the boundary between the reflection cover 2 and the matal layer 2d such that the mirror extends substantially parallel with the concaved inner surface 2b. Thereby, the temperature distribution of the substrate 33 is significantly improved. In order to enhance the effect of confinement, the separation or distance D between the reflection cover 2 and the substrate 33 is set to be less than one half of the mean free path of the reactant species, tungsten hexafluoride WF₆ in this case, under the normal condition of the CVD process. In the illustrated example, the distance D is set to be about 50 mm. By setting the distance D as described, the reactant species, introduced into the subspace 2a from the inlet 1 and reflected back at the surface of the substrate 33 without causing reaction, are reflected again by the reflection cover 2 toward the substrate 33, and the probability of reaction taking place at the surface of the substrate 33 is substantially increased. It should be noted that the species introduced into the subspace 2a from the tube 1 have a moving direction generally perpendicular to the major surface of the substrate 33 and reflected back substantially in a reversed direction to the cover 2 when the species has failed to cause reaction at the surface of the substrate 33. The species thus reached the cover 2 is of course reflected back to the substrate 33 again. It should be noted that the temperature of the reflection cover 2 is substantially lower than the temperature of the substrate 33 and thus, no substantial reaction occurs when the reactant species are reflected at the reflection cover 2. Further, as the opening 2a is formed at the lateral edge 2c of the reflection cover 2, any byproduct species formed at the surface of the substrate 33 escapes efficiently through the opening 2c without being scattered by collision with other species, as long as the deposition is made under the reduced pressure such as 0,133 Pa (10⁻³ Torr) or less. In the case of the byproduct species, there is no directivity in the direction of movement, in contrast to the reactant species introduced through the inlet 1, and thus, substantial proportion of the byproduct species are escaped through the opening 2c whenever they are formed, without experiencing scattering. The distance D between the reflection cover 2 and the substrate 33 is most preferably set to be equal to or less than one third of the mean free path of the reactant species in the reaction chamber 36. By setting the distance D as such, one can set the entire path length of the reactant species, introduced from the tube 1 and reaching the substrate after one reflection at the inner surface 2b of the reflection cover 2, to be equal to or smaller than the mean free path of the species. It should be noted that the reactant species travel the path of the length D three times in such a situation. Hereinafter, the result of experiments undertaken with the CVD apparatus of the present embodiment will be described. EXPERIMENT 1 Deposition of tungsten is made into a contact hole formed in a PSG layer and exposing a silicon substrate underneath by supplying a WF₆ source gas and a SiH₄ source gas respectively with a flow rate of 5 sccm and 3.75 sccm at a substrate temperature of 260°C. The deposition was made under a total pressure of 5.0 X 0,013 Pa (10⁻⁴ Torr) with a duration of 300 seconds. After deposition for 300 seconds, the contact hole, having a depth of 1 um, was completely filled by tungsten. With further continuation of the deposition, it was confirmed that no tungsten deposition is made on the PSG layer. Thus, an excellent selectivity of tungsten growth is maintained. In the present example, a deposition rate of about 2.10⁻⁷ m/min (2000 Å/min) was achieved which is a significant improvement over the conventional rate typically of 6.10⁻⁸ m/min (600 Å/min) which is obtained when the shower nozzle 31 shown in FIG.1 is used in place of the reflection cover 2 while holding the condition of deposition and configuration of the deposition system identical. EXAMPLE 2 In this example, tungsten was deposited on an exposed surface of silicon through a contact hole provided on a PSG layer under exactly the same condition as in the case of EXAMPLE 2, with the deposition rate set at 10⁻⁷ m/min (1000 Å/min). In this experiment, the distance D between the reflection cover 2 and the substrate 33 was set to be 15 mm. The following TABLE I shows the layer thickness of tungsten thus deposited and the resistivity thereof. layer thickness (Å) resistivity (µΩ.cm) 6165 22.6 6285 22.3 6065 21.1 6270 22.6 5970 22.6 6055 22.8 6410 22.9 6540 23.1 6225 22.9 From TABLE I, it can be seen that the scattering of the resistivity value is less than about ±4.5 %. This is a substantial improvement over prior art which gives the scattering of about ±8 - 9 %. Further, the deposition rate was about 10⁻⁷ m/min (1000 Å/min) which is substantially improved over the deposition rate of prior art which is about 6.10⁻⁸ m/min (600 Å/min) as already described. EXAMPLE 3 In this series of experiments, the deposition of tungsten is made, using the apparatus of FIG.2, with various temperatures for the initial silicon-induced reduction of WF₆. The silicon-induced reduction means the reaction 2WF₆(g) + 3Si(s) → 2W(s) + 3SiF₄. In each of the experiments for the silicon-induced reduction reaction, the flow rate of WF₆ was set to 5 sccm, the run duration 10 seconds, and the total pressure 3.0 X 0,013 Pa (10⁻⁴ Torr). After the silicon-induced reduction, the temperature was set at 250°C and the growth was continued, using the silane-induced reduction represented as 4WF₆(g) + 3SiH₄(g) → 4W(s) + 3SiF₄(g) + 12HF, until a layer of tungsten having a thickness of 3000 Å is obtained. At the same time, another silane-induced reduction reaction occurs such that WF₆(g) + 3SiH₄(g) → WSi₂ + SiF₄ + 2HF + 5H₂. During this process, it should be noted that the foregoing reduction of WF₆ by Si also takes place. Thus, there are actually three reduction reactions of WF₆ proceeding parallel with eath other. As a result, the tungsten layer formed by the silane-induced reduction of WF₆ is not a pure tungsten but contains small amount of silicon. According to the experiments, it was found that the tungsten layers, obtained by the silicon-induced reduction of WF₆ performed in the temperature range between 180°C - 300°C, showed a tendency that the encroachment is not significant, if not entirely eliminated. On the contrary, in the case of the samples wherein the silicon-induced reduction is achieved in the temperature above 300°C such as 310°C or 320°C, the degree of encroachment is unacceptably high. Further, it was found that the samples obtained by the silicon induced reduction performed at the temperature of 200°C or more showed an excellent contact between the substrate silicon and the tungsten layer deposit thereon, while in the case of the samples wherein the silicon-induced reduction was performed below 200°C, for example at 180°C or 190°C, showed a poor contact which is obviously undesirable for fabricating a semiconductor device. In summary, the foregoing observations showed that the encroachment of tungsten into silicon can be minimized by using the temperature range between 200°C - 300°C for the initial deposition of tungsten which is made by the silicon-induced reduction of the source gas containing tungsten. After a thin tungsten layer is formed, the deposition is continued using the silane-induced reduction. The present invention is by no means limited to the embodiment of FIG.2 employing the reflection cover 2 having the concaved inner surface 2b, but may be constructed according to a second embodiment shown in FIG.3, wherein a flat reflection cover 2' is used. In this embodiment, too, the distance D is set to be less than one half, preferably less than one third of the mean free path of the reactant species introduced into the subspace 2a. As will be easily understood, this construction is also effective for confining the reactant species in the subspace 2a by reflecting back and forth between the cover 2 and the substrate 33. FIG.4 shows another embodiment, wherein the source gas is introduced along a number of inlet tubes 1a - 1c. In this construction, too, the reflection cover 2' having the flat configuration is provided so as to define the subspace 2a between the cover 2' and the substrate 33 with the separation D set equal to or smaller than the mean fee path of the reactant species introduced into the subspace 2a. As the principle, operation and the effect of the present embodiment is obvious from the previous description, further description of this embodiment will be omitted. Using the CVD apparatus of the present invention, one can achieve a deposition of material, particularly of tungsten, with substantially improved deposition rate while without sacrificing the selective growth.

Claims: A chemical vapor deposition apparatus for depositing a material selectively on a part of a substrate, comprising a reaction chamber (36) for defining a space in which a chemical vapor deposition process is performed, said reaction chamber having an evacuating port (32, 37a) adapted for connection to an evacuating unit (37) for evacuating the reaction chamber therethrough; holding means (34) provided within the reaction chamber for holding a substrate (33) on which a material layer is to be deposited; heating means (35) for heating the holding means to hold the substrate on the holding means at a controlled temperature; gas inlet means (1, 1a-1c) provided on the reaction chamber for introducing one or more source gases into the reaction chamber; and reactant distribution means (2, 2') provided on the gas inlet means within the reaction chamber for controlling distribution of the reactant species in the reaction chamber, said reactant distribution means defining a subspace (2a) surrounding the substrate within the space of the reaction chamber such that there is formed an opening (2c) for communicating the subspace inside the reaction distribution means with the rest of the space of the reaction chamber for freely passing by-product species formed as a result of the chemical reaction at the surface of the substrate; said gas inlet means comprising a tube (1) extending into the reaction chamber (36); said reactant distribution means comprising a plate member (2, 2') provided on the tube as a collar member said plate member having an inner surface facing said substrate and an outer surface opposing said inner surface; characterized in that said outer surface of said plate (2, 2') is provided with reflection means (2d) for reflecting infrared radiation back to the substrate. A chemical vapor deposition apparatus as claimed in claim 1 wherein said plate (2) comprises a material which causes substantially no reaction with the reactant species introduced in the reaction chamber. A chemical vapor deposition apparatus as claimed in claim 1 or 2 wherein said plate (2) comprises silicon oxide. A chemical vapor deposition apparatus as claimed in anyone of claims 1 to 3 wherein said plate (2) has a concaved inner surface (2b) facing the substrate (33). A chemical vapor deposition apparatus as claimed in anyone of claims 1 to 3 wherein said plate (2') has a flat surface facing the substrate (33) A chemical vapor deposition apparatus as claimed in anyone of claims 1 to 5 wherein said reflection means comprises a metal layer (2d) provided on the plate (2) for providing a mirror surface extending parallel with an inner surface of the plate facing the substrate. A chemical vapor deposition apparatus as claimed in anyone of claims 1 to 6 wherein said reactant species distribution means (2, 2') is provided such that said dimension (D) of the subspace (2a) is about one-third of the mean free path of the reactant species in the subspace. A chemical vapor deposition apparatus as claimed in anyone of claims 1 to 7 wherein said gas inlet means comprises a plurality of tubes (1a-1c) on which the reactive species distribution means (2') is mounted.

Inventors: HARA TATSUSHI, MIENO FUMITAKE, MISAWA NOBUHIRO, OHBA TAKAYUKI, SUZUKI TOSHIYA, YAMAGUCHI AKIO, HARA, TATSUSHI, MIENO, FUMITAKE, MISAWA, NOBUHIRO, OHBA, TAKAYUKI, SUZUKI, TOSHIYA, YAMAGUCHI, AKIO
Applicants: FUJITSU LTD, FUJITSU LIMITED
Application year: 1990
Main classification: C23C16
IPC codes: H01L21, C23C16