Method and construction of electrical connection to oxide superconductor

Abstract: An electric connection between an electric conductor and an oxide superconductor is effected without the intermediary of a thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere. This electric connection is formed by removing the thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere, and by electrically connecting the electric conductor and an exposed surface of the oxide superconductor.

Description: Background of the Invention Field of the invention The present invention relates to a method and a construction of electric connection to an oxide superconductor, and more specifically to an electric connection to an oxide superconductor which can be effectively implemented in a superconductor device using an oxide superconductor thin film. Description of related art Superconductor devices using an oxide superconductor thin film have been expected to be an oxide superconductor product which will be reduced in practice at the earliest times. In general, most of this type superconductor devices use the oxide superconductor in the form of a thin film. In this case, an oxide superconductor portion of the superconductor device has to be connected to an internal or external normal conductor. However, a connection technique for this purpose has not yet been established. Some of researchers have tried to squeeze a drop of indium (In) to a surface of the oxide superconductor so as to bring the drop of indium into electric contact to the oxide superconductor, and then, to connect a leading wire through the drop of indium to the oxide superconductor. When the oxide superconductor thin film is in exposure to the atmosphere, a surface of the superconductor thin film will be deteriorated due to moisture contained in the atmosphere and other factors. More specifically, if the oxide superconductor is left in the atmosphere, a very thin insulating layer will be formed on a surface of the oxide superconductor in contact to the atmosphere. Therefore, if a connection wire is led directly from the surface of the oxide superconductor, an ohmic contact having a sufficient low resistance cannot be obtained due to a contact resistance through the very thin insulating layer on the oxide superconductor. As a result, a characteristics of the superconductor device cannot be fully utilized. Applied Physics Letters, Vol.54, N° 25 (1989) pp. 2605-2607 discloses an electric connection between an electric conductor wire and an oxide superconductor which is formed in situ during the sintering or melt processing of the oxide superconductor, thus eliminating the need of separate steps of contact preparation. IEEE Transactions on Magnetics, vol.25, N° 2 (1989) pp. 2049-2052 teaches removing a non-superconducting surface layer of several nanometers to obtain low contact resistivity. IEEE Transactions on Components, Hybrids and Manufacturing Technology, vol.12 N° 1 (1989) pp. 21-31 suggests several approaches to prevent the formation of a surface non-superconducting layer : the in situ approach, a high-temperature anneal of the contact, and sputter etching of the surface layer. Summary of the Invention Accordingly, it is an object of the present invention to provide an electric connection to an oxide superconductor which has overcome the above mentioned defect of the conventional one and which has a sufficiently low contact resistance. The above and other objects of the present invention are achieved in accordance with the present invention by a superconducting circuit comprising an oxide superconductor layer formed on an underlying support, wherein an electric conductor wire is connected to said oxide superconductor layer, a contact hole being perforated only through said oxide superconductor layer and said electric conductor wire being connected to said oxide superconductor layer at a portion of said oxide superconductor layer exposed on an inner sidewall surface of said contact hole. According to another aspect of the present invention, there is provided a method for electrically connecting an electric conductor wire connected to an oxide superconductor layer, wherein the electric connection between said electric conductor wire and said oxide superconductor layer is formed after removing a thin insulating layer that is formed by leaving said oxide superconductor in the atmosphere, and wherein said oxide superconductor layer is an oxide superconductor thin film which is formed on an insulator and which has a c-axis perpendicular to a plane of said oxide superconductor thin film, and wherein a contact hole is perforated through said oxide superconductor thin film, and said oxide superconductor thin film and said electric conductor wire are connected to each other at an inner side surface of said contact hole. In a preferred embodiment, in order to form the electric connection between the electric conductor and the oxide superconductor without the intermediary of the thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere, a contact hole is perforated in the oxide superconductor, and the electric conductor is electrically connected to the oxide superconductor in the contact hole. This contact hole preferably has a diameter in the range of 10µm to 3mm. If the diameter of the contact hole is smaller that 10µm, a satisfactory connection cannot be established, and if the diameter of the contact hole is larger than 3mm, the connection portion becomes too large and therefore is not practical. In addition, an inner face of the contact hole is preferably coated with an conductive metal, and the electric conductor is also preferably connected to the conductive metal coating with a conductive paste. In general cases, a surface of an oxide superconductor thin film used in a superconductor device is in exposure to the atmosphere, and therefore, as mentioned hereinbefore, is deteriorated due to moisture contained in the atmosphere and others. However, the inside of the oxide superconductor thin film is maintained in a good condition. Therefore, a good ohmic contact can be obtained by perforating a contact hole in the oxide superconductor thin film and connecting the electric conductor to a portion of the oxide superconductor exposed at an inner surface of the contact hole. The oxide superconductor has anisotropy in coherence length which is indicative of superconductivity, and the coherence length in a c-axis direction is about one-tenth of that in an a-axis or b-axis direction. Namely, the oxide superconductor is weak in superconductivity in the c-axis direction. Therefore, the oxide superconductor thin film having the c-axis perpendicular to a substrate or a plane of the thin film is difficult to form a good electric contact at or along the surface of the thin film. However, if a hole is formed in the oxide superconductor thin film having the c-axis perpendicular to the substrate and an electric contact is formed at a side or section of the oxide superconductor thin film, namely in a direction perpendicular to the c-axis direction, an electrically good ohmic contact can be established due to a so-called proximity effect resulting from a strong superconductivity in the a-axis or b-axis direction. The contact hole is preferably formed by a mechanical machining, but can be formed in a chemical or physical process by using a photolithography. In the present invention, it is significant that an electric connection between an electric conductor and an oxide superconductor is effected without the intermediary of a thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere. Therefore, a formation of the contact hole is not indispensable, but rather, merely one non-limitative example which makes it possible to form the electric connection between the electric conductor and the oxide superconductor without the intermediary of a thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere. In place of forming the contact hole, it is possible to form a groove on the superconductor, or etch an edge of the superconductor so as to form connection on a clean surface having no thin insulating layer that is formed by leaving the oxide superconductor in the atmosphere. In the method in accordance with the present invention, if the contact hole is formed, it is preferred to coat an inner surface of the contact hole with a conductive metal. This conductive metal coating is not necessarily indispensable, but is very effective in obtaining a good connection characteristics. The conductive metal coating can be deposited by well-known coating processes such as vacuum evaporation or sputtering. The conductive metal coating can be formed of a material having less reactivity to the oxide superconductor and having a high electric conductivity, for example, Ag, Au, In, Zn, Cu, Ni, Pt, Ti, Pb, and Pd. The conductive paste used for fixing the electric conductor to the conductive metal coating may be a paste of Ag, In, Cu, Au, Pt, Al, and Pb or can be formed of a single metal selected from a group consisting of the above listed metals. If the single metal is used, a relative soft metal such as Ag, In and Pb is preferred. For example, if the conductive paste consisting of In is used, a baking is performed for one hour at 300°C. If the conductive paste consisting of Ag is used, a baking is performed for one hour at 500°C. The use of the conductive paste is not indispensable, and can be replaced by a ultrasonic bonding which connnects or bonds the electric conductor directly to the conductive metal coating. The above and other objects, features and advantages of the present invention will be apparent from the following description of preferred embodiments of the invention with reference to the accompanying drawings. Brief Description of the Drawings Figure 1 is a diagrammatic sectional view illustrating a structure of electric connection to an oxide superconductor in accordance with the present invention; and Figures 2A and 2B illustrate a method of measuring a contact resistance in the structure of electric connection to the oxide superconductor. Description of the Preferred embodiments Referring to Figure 1, there is diagrammatically illustrated a structure of electric connection to an oxide superconductor in accordance with the present invention. In the shown structure of electric connection, a contact hole 3 is perforated in an oxide superconductor thin film 2 formed on a substrate 1, and a conductive lead wire 5 is connected to the oxide superconductor thin film 2 in the contact hole 3. More specifically, in order to reduce a contact resistance, an inenr surface of the contact hole 3 is covered with a coating 6 formed of a metal having a high electric conductivity, and the lead wire 5 is fixed within the contact hole 3 by a conductive paste 4. In examples explained hereinafter, a contact resistance in the structure of electric connection to the oxide superconductor was measured by using a so-called "three-terminal method" and a so-called "four-terminal method" in combination. First, as illustrated in Figure 2A, conventional electric connections C₁ and C₂ and an electric connection C₃ in accordance with the present invention are formed on the superconductor thin film 2. An electric current I is flowed between the connections C₁ and C₃ and is measured by an ammeter 7. On the other hand, a voltmeter 8 is connected between the connections C₂ and C₃ so that an electric voltage V between the connections C₂ and C₃ is measured by the voltmeter 8. Here, it is assumed that contact resistances at the connections C₁, C₂ and C₃ are r₁, r₂ and r₃, respectively, and an equivalent resistance in a portion of the superconductor thin film 2 between the connections C₂ and C₃ is R. It is also assumed than an internal impedance of the voltmeter 8 is infinite. Under the above mentioned arrangement, the voltmeter 8 measures a voltage drop V occurring when the current I flows in series through the equivalent resistance R of the superconductor thin film 2 and the contact resistance r₃. Therefore, r 3 = (V/I) - R Furthermore, a conventional electric connection C₄ is formed on the superconductor thin film 2. An electric current Ia is flowed between the connections C₁ and C₄ and is measured by the ammeter 7. On the other hand, an electric voltage Va between the connections C₂ and C₃ is measured by the voltmeter 8. Here, it is assumed that a contact resistance at the connection C₄ is r₄. In this case, the voltmeter 8 measures a voltage drop Va occurring when the current Ia flows in series through only the equivalent resistance R of the superconductor thin film 2. Therefore, Va = Ia · R Accordingly, the following equation can be derived from the above equations (1) and (2). r 3 = (V/I) - (Va/Ia) Thus, the contact resistance r₃ in the structure of electric connection C₃ to the oxide superconductor in accordance with the present invention can be measured by a sequential measurement of the "three-terminal method" and the "four-terminal method", without being influenced by values of r₁, r₂ and r₄, and R. Example 1 A thin film of Y₁Ba₂Cu₃O x (6<x≤7) was formed on a monocrystalline substrate of MgO (100) by sputtering, and was patterned to form a superconductor circuit having a width of 100µm and a length of 10mm. Thereafter, a connection structure as shown in Figure 1 was formed by using an Au wire, and thereafter, a contact resistance was measured. The contact hole 3 of 50µm in diameter was mechanically perforated by pushing a sharp tip end of a diamond pen to the oxide superconductor thin film. Thereafter, Au was deposited by a vacuum evaporation so that the coating layer 6 of 3000Å is formed. The condition of the vacuum evaporation is as follows: Heating of the substrate No heating Degree of vacuum 1.3 to 4 × 10⁻⁴ Pa (1 to 3 × 10⁻⁶ torr) Deposition rate 5 to 10 Å/second Thereafter, a paste of In was physically squeezed to the contact hole 3 and an Au wire of 50µm in diameter was connected thereto. As a comparative example, a similar Au wire is connected to a superconductor circuit which was formed similarly to the above mentioned superconductor circuit, and a contact resistance was measured. The result is shown in the following Table 1. Comparative Invention Contact resistance (Ω cm²) 7 × 10⁻⁹ 4 × 10⁻¹⁰ (The contact resistance was measured at 77.3 K) It would be seen that the electric connection in accordance with the present invention improves the contact resistance more than one figure, in comparison with the conventional one. Example 2 A thin film of Y₁Ba₂Cu₃O x (6<x≤7) was formed on a monocrystalline substrate of MgO (100) by sputtering, and was patterned to form a superconductor circuit having a width of 100µm and a length of 10mm. Thereafter, a connection structure as shown in Figure 1 was formed by using an Au wire, and thereafter, a contact resistance was measured. The contact hole 3 of 50µm in diameter was perforated by forming a necessary pattern on the oxide superconductor thin film circuit by photolithography, and then, by etching by use of a Kaufman type ion gun. Thereafter, Au was deposited by a vacuum evaporation under the same condition as in the Example 1 so that the coating layer 6 of 3000Å is formed. Thereafter, an Au wire of 50µm in diameter was connected in the same manner as in the Example 1. As a comparative example, a similar Au wire is connected to a superconductor circuit which was formed similarly to the above mentioned superconductor circuit, and a contact resistance was measured. The result is shown in the following Table 2. Comparative Invention Contact resistance (Ω cm²) 5 × 10⁻⁹ 6 × 10⁻¹⁰ (The contact resistance was measured at 77.3 K) It would be seen that the above example in accordance with the present invention improves the contact resistance about one figure, in comparison with the conventional one. Example 3 A thin film of Bi₂Sr₂Ca₂Cu₃O y (7≤y≤10) was formed on a monocrystalline substrate of MgO (100) by sputtering, and was patterned to form a superconductor circuit having a width of 100µm and a length of 10mm. Thereafter, a connection structure as shown in Figure 1 was formed by using an Au wire, and thereafter, a contact resistance was measured. Similarly to the Example 2, the contact hole 3 of 50µm in diameter -was perforated by forming a necessary pattern on the oxide superconductor thin film circuit by photolithography, and then, by etching by use of a Kaufman type ion gun. Thereafter, Au was deposited by a vacuum evaporation under the same condition as in the Example 1 so that the coating layer 6 of 3000Å is formed. Thereafter, an Au wire of 50µm in diameter was connected in the same manner as in the Example 1. In addition, as a comparative example, a similar Au wire is connected to a superconductor circuit which was formed similarly to the above mentioned superconductor circuit, and a contact resistance was measured. The result is shown in the following Table 3. Comparative Invention Contact resistance (Ω cm²) 6 × 10⁻⁹ 5 × 10⁻¹⁰ (The contact resistance was measured at 77.3 K) It would be seen that similarly to the Example 1, the above example in accordance with the present invention improves the contact resistance more than one figure, in comparison with the conventional one. Example 4 A thin film of Tl₂Ba₂Ca₂Cu₃O z (7≤z≤10) was formed on a monocrystalline substrate of MgO (100) by sputtering, and was patterned to form a superconductor circuit having a width of 100µm and a length of 10mm. Thereafter, a connection structure as shown in Figure 1 was formed by using an Au wire, and thereafter, a contact resistance was measured. Similarly to the Example 2, the contact hole 3 of 50µm in diameter was perforated by forming a necessary pattern on the oxide superconductor thin film circuit by photolithography, and then, etching by use of a Kaufman type ion gun. Thereafter, Au was deposited by a vacuum evaporation under the same condition as in the Example 1 so that the coating layer 6 of 3000Å is formed. Thereafter, an Au wire of 50µm in diameter was connected in the same manner as in the Example 1. In addition, as a comparative example, a similar Au wire is connected to a superconductor circuit which was formed similarly to the above mentioned superconductor circuit, and a contact resistance was measured. The result is shown in the following Table 4. Comparative Invention Contact resistance (Ω cm²) 8 × 10⁻⁹ 7 × 10⁻¹⁰ (The contact resistance was measured at 77.3 K) It would be seen that similarly to the Example 1, the above example in accordance with the present invention improves the contact resistance more than one figure, in comparison with the conventional one. As seen from the above explanation, the contact resistance to the oxide superconductor is greatly decreased in the electric connection in accordance with the present invention between the electric conductor and the oxide superconductor. Therefore, a heating loss in the connection portion is minimized, and also, a reliability of the connection portion is increased. The invention has thus been shown and described with reference to the specific embodiments. However, it should be noted that the present invention is in no way limited to the details of the illustrated structures but changes and modifications may be made within the scope of the appended claims.

Claims: A superconducting circuit comprising an oxide superconductor layer (2) formed on an underlying support (1), wherein an electric conductor wire (5) is connected to said oxide superconductor layer (2), a contact hole (3) being perforated only through said oxide superconductor layer (2) and said electric conductor wire (5) being connected to said oxide superconductor layer (2) at a portion of said oxide superconductor layer exposed on an inner sidewall surface of said contact hole (3). A superconducting circuit claimed in Claim 1, wherein said inner sidewall surface of said contact hole (3) is coated with a conductive metal, and said electric conductor is connected to said conductive metal coating (6). A superconducting circuit claimed in Claim 2, wherein said conductive metal coating is formed of one material selected from a group consisting of Ag, Au, In, Zn, Cu, Ni, Pt, Ti, Pb and Pd. A superconducting circuit claimed in Claim 2, wherein said electrical conductor wire (5) is formed of Au. A superconducting circuit claimed in Claim 2, wherein said electric conductor wire (5) is connected to said conductive metal coating (6) through a conductive paste (4). A superconducting circuit claimed in Claim 5, wherein said conductive paste (4) is formed of one material selected from a group consisting of Ag, In, Cu, Au, Pt, Al and Pb. A superconducting circuit claimed in Claim 1, wherein said oxide superconductor layer (2) is an oxide superconductor thin film which is formed on an insulator (1) and which has its c-axis perpendicular to the surface of said oxide superconductor thin film (2), said oxide superconductor thin film having a contact hole (3) perforated therethrough, and said oxide superconductor thin film (2) and said electric conductor wire (5) being connected to each other at an inner sidewall surface of said contact hole (3). A superconducting circuit claimed in Claim 1, wherein said oxide superconductor layer (2) is an oxide superconductor thin film formed of Y₁Ba₂Cu₃Ox (6<x≤7), Bi₂Sr₂Ca₂Cu₃Oy (7≤y≤10) or T1₂Ba₂Ca₂Cu₃Oz (7≤z≤10), said oxide superconductor thin film (2) having a contact hole (3) perforated therethrough, and said oxide superconductor thin film (2) and said electric conductor wire (5) being connected to each other at an inner sidewall surface of said contact hole (3). A superconducting circuit claimed in Claim 8, wherein said inner surface of said contact hole (3) is coated with a conductive metal, and said electric conductor wire (5) is connected to said conductive metal coating (6). A method for electrically connecting an electric conductor wire (5) to an oxide superconductor layer (2), wherein the electric connection between said electric conductor wire (5) and said oxide superconductor layer (2) is formed after removing a thin insulating layer that is formed by leaving said oxide superconductor in the atmosphere, and wherein said oxide superconductor layer (2) is an oxide superconductor thin film which is formed on an insulator and which has its c-axis perpendicular to the surface of said oxide superconductor thin film, and wherein a contact hole (3) is perforated through said oxide superconductor thin film (2), and said oxide superconductor thin film and said electric conductor wire (5) are connected to each other at an inner sidewall surface of said contact hole (3). An electrically connecting method claimed in Claim 10, wherein a contact hole (3) is perforated in said oxide superconductor layer (2), and a portion of said oxide superconductor exposed at an inner surface of said contact hole (3) is electrically connected to said electric conductor wire (5). An electrically connecting method claimed in Claim 11, wherein said inner surface of said contact hole (3) is coated with a conductive metal, and said electric conductor wire (5) is connected to said conductive metal coating (6). An electrically connecting method claimed in Claim 12, wherein said electric conductor wire (5) is connected directly to said conductive metal coating (6) by a ultrasonic bonding. An electrically connecting method claimed in Claim 12, wherein said conductive metal coating (6) is formed of one material selected from a group consisting of Ag, Au, In, Zn, Cu, Ni, Pt, Ti, Pb and Pd. An electrically connecting method claimed in Claim 12, wherein said electric conductor wire (5) is formed of Au. An electrically connecting method claimed in Claim 12, wherein said electric conductor wire (5) is connected to said conductive metal coating (6) through a conductive paste (4). An electrically connecting method claimed in Claim 16, wherein said conductive paste (4) is formed of one material selected from a group consisting of Ag, In, Cu, Au, Pt, Al and Pb. An electrically connecting method claimed in Claim 10, wherein said oxide superconductor layer (2) is an oxide superconductor thin film formed of Y₁Ba₂Cu₃Ox (6<x≤7), Bi₂Sr₂Ca₂Cu₃O y (7≤y≤10) or Tl₂Ba₂Ca₂Cu₃Oz (7≤z≤10), and wherein a contact hole (3) is perforated through said oxide superconductor thin film, and said oxide superconductor thin film (2) and said electric conductor wire (5) are connected to each other at an inner sidewall surface of said contact hole (3). An electrically connecting method claimed in Claim 18, wherein said inner surface of said contact hole (3) is coated with a conductive metal, and said electric conductor wire (5) is connected to said conductive metal coating (6).

Inventors: ITOZAKI HIDEO, NAKANISHI HIDENORI, TANAKA SABURO, ITOZAKI, HIDEO, NAKANISHI, HIDENORI, TANAKA, SABURO
Applicants: SUMITOMO ELECTRIC INDUSTRIES, SUMITOMO ELECTRIC INDUSTRIES, LTD.
Application year: 1990
Main classification: H01L39
IPC codes: H01L39