METHOD OF FORMING TITANIUM NITRIDE COATING AND PAN MADE BY THIS METHOD

Abstract: A method of forming titanium nitride coating by ion plating which has an excellent decorative effect and a method of forming titanium nitride coating by which the color tone stability can be maintained even under high-temperature conditions. The method includes: (1) one which comprises forming titanium nitride coating on the surface of a base material by physical or chemical vapor deposition; (2) one which comprises forming titanium nitride coating on the surface of a base material and heating the coated base material in an atmosphere comprising a mixture of oxygen with nitrogen to form transparent and stable titanium oxide coating on the surface of the nitride coating to thereby effect color tone stabilization; and (3) one which comprises forming titanium nitride coating on the surface of a base material and heating the coated base material in a nitrogen atmosphere to diffuse nitrogen into the titanium nitride coating to thereby effect color tone stabilization. A cooking pan is produced by forming titanium nitride coating on the surface of a base material of a pan by any of the aforementioned methods.

Description: The present invention relates to a method for forming a titanium nitride (TiN) film over the surface of a substrate (see document US-A-4 226 082, column 16, lines 47 to 51) and to a cooking vessel with a TiN coating manufactured using the formation method thereof. Traditionally, a cooking pan such as a frying pan or a shallow pot (hereinafter referred to as the "pan") is made simply by forming a piece of metallic material, such as steel, and coating the inner surface of the pan with a fluororesin such as Teflon. Pans coated with fluororesin have been extensively used as frying pans and the like because of their prevention of charred food during cooking and their resistance to rust. However, pans coated with fluororesin are not attractive because fluororesins are colorless, and they do not have sufficient durability because fluororesins are soft. Such fluororesin properties cause the coated layers to deteriorate or peel off after repeated use and result in reduced effectiveness in the prevention of burnt food. The present invention is designed in consideration of the reasons above, and an object of the present invention is to provide a method of forming a TiN film and the pan obtained by such a method. In a first mode of the TiN film formation method, TiN film is formed over the surface of the substrate by using a physical vapor deposition method, whereby it is possible to form, on the surface of the substrate, a TiN film with a beautiful golden color, a high hardness value, and chemical stability. A pan, which is manufactured by forming TiN film over the surface of the substrate of the pan in accordance with the above method and obtained in such a manner, provides the following effects: (1) The cosmetic properties of the pan are improved because the TiN film has a beautiful golden color. (2) The surface of the pan's resistance to wear and tear is improved because of the high hardness of TiN. (3) Food cooked in the pan will not burn or stick to the surface of the pan because TiN is chemically stable and will not react to the burned food. In a second mode of the TiN film formation method, the TiN film is first formed on the surface of the substrate, the substrate is heated in an oxygen and nitrogen atmosphere, thereby coating the surface of the TiN film with a very thin layer of titanium oxide (TiO₂) several hundred Angstroms thick. With this method, the thin TiO₂ layer over the TiN film surface is transparent and will not change the color of the golden TiN film. In addition, since the thin TiO₂ film restricts the penetration of external oxygen to areas within the film, it is possible to obtain a TiN film with a stable color which will not change even if subjected to high temperatures. By forming the TiN film over the pan's surface in accordance with the above method, it becomes possible to maintain the beautiful golden color of the TiN film on the surface of the pan's substrate, as well as to achieve those effects that can be obtained by the aforementioned method. In a third mode of the TiN film formation method, the TiN film is first formed over the surface of the substrate and the substrate is heated in a nitrogen atmosphere to diffuse the nitrogen into the TiN film, thereby fixing the residual titanium (Ti) as TiN. By this method, it is possible to obtain a TiN film with a color which is stable even if subjected to high temperatures. Furthermore, a TiN film is formed on the surface of a pan by the methods mentioned above, which restrict changes in color, and such a pan is thus provided. FIG. 1 is an embodiment of the present design showing a perspective diagram of a frying pan. FIG. 2 is cross-sectional view of the main part of the frying pan shown in FIG. 1. FIG. 3 is a conceptual diagram showing an ion plating apparatus. FIG. 4 through FIG. 7 are diagrams to illustrate examples of the experiments related to the present design. FIG. 8 is a conceptual diagram showing an example of an apparatus which implements a TiN film formation method. FIG. 9 is a conceptual diagram showing the ion plating apparatus used by the apparatus shown in FIG. 8. FIG. 10 is a conceptual diagram that shows an example of a heat treatment apparatus used in the apparatus shown in FIG. 8. FIG. 11 is a conceptual diagram that shows another example of the heat treatment apparatus used in the apparatus shown in FIG. 8. FIG. 12 is a diagram that shows the result of an X-ray diffraction. First method FIG. 3 shows an example of an ion plating apparatus used in the manufacture of a frying pan (1) according to a first method. The inside of this ion plating apparatus (5) is maintained at a vacuum of about 10⁻⁵ to 10⁻⁷ Torr by a vacuum pump (6). Several hundred volts are applied to the body (2) of the frying pan arranged inside of the ion plating apparatus (5). Titanium (7) (a coating material) is placed on the side opposite to the body (2) of this frying pan. In the vicinity of this titanium (7) is an ion electrode (8) which uses Ar gas for Argon cleaning the surface before the film formation of the frying pan body (2), and adds nitrogen to the atmosphere for heating and evaporation during film formation followed further by ionisation. In order to form a TiN layer (4) on the frying pan body (2) by means of the ion plating apparatus (5), the inner surface (the surface to be coated) of the frying pan body (2) is first ground to a mirror finish and has removed from it any unevenness such as cutting marks from the lathe or oil sumps. Debris or oil is removed from the pan by means of the washing and degreasing of the ground surface. Once the frying pan body (2) has completed such pretreatment, it is placed inside the ion plating apparatus (5). Then, the titanium (7) is subjected to ion bombardment in an Ar atmosphere and heated by an electron beam issued from the ion electrode (8). The titanium (7) is evaporated, and the evaporated particles are ionized. The ionised particles have high kinetic energy and collide strongly with and attach to the frying pan body (2), so that a Ti layer (3) is formed over the surface of the frying pan body (2). When the thickness of the Ti layer (3) is several hundred angstroms, the voltage applied to the frying pan body (2) is lowered, and nitrogen is introduced into the ion plating apparatus (5) through a nitrogen supply passage (9) in order to maintain the pressure inside the apparatus (5) at about 10⁻⁵ Torr. The aforementioned ionized titanium particles and the nitrogen are caused to react by the above operation so as to attach TiN to the Ti layer (3) on the surface of the frying pan body (2), and a uniform TiN layer (4) 2 to 3 micron thick is formed thereon. A frying pan (1) is thus manufactured by the above operation. FIG. 1 shows the frying pan manufactured by such a method, wherein the numeral 1 denotes the frying pan. This frying pan is, as shown in FIG. 2, composed by providing a 2 to 3 micron thick TiN layer (4) on the inside of the frying pan body (2), which is made from a metallic material such as steel by means of a Ti layer (3) several hundred angstroms thick. The above Ti layer (3) is formed directly over the surface of the frying pan body (2) and is very firmly attached thereto. The TiN layer (4) is firmly formed in close contact with the Ti layer (3), so that the TiN layer (4) is securely joined to the frying pan body (2). The frying pan (1) manufactured by this method is provided on the surface of the body (2) thereof, with the TiN layer (4) producing a beautiful golden color, thereby improving the cosmetic properties of the pan, and conferring a feeling of high quality thereto. Further, because the TiN layer has high hardness (about Hv2000 in Vickers' hardness), it is possible to improve the durability of the pan's surface. Moreover, because the TiN layer (4) is chemically stable, it does not react to burnt food and is excellent in its resistance to adhesion of burnt food, and thus the frying pan will almost never allow burnt food to stick thereto during cooking. Furthermore, even if burnt food does stick to the frying pan, it can be easily removed therefrom. In the method stated above, the frying pan is given as an example, but a relatively shallow pan can be produced instead of a frying pan. In the method stated above, the TiN layer is formed only on the inside surface of the frying pan body, but the TiN layer can also be formed over the entire surface, including the handle, or only a part of the inside surface. [Experiment 1] The apparatus shown in FIG. 3 was used to form at 2 to 3 micron TiN layer over the surface of a steel frying pan by means of an approximately 200 Å Ti layer, and a frying pan having the same composition as the one shown in FIG. 1 (hereinafter referred to as the TiN-coated frying pan) was thus manufactured. Three types of frying pans, a TiN coated frying pan, a traditional steel frying pan (uncoated) and a Teflon coated frying pan, were used to conduct the following experiments. Fish (sole) of almost the same size were prepared, and each sole was placed on the center of the cooking plane of each frying pan (previously unused). The three frying pans each placed with a sole thereon were heated simultaneously with strong flames of the same intensity for about five minutes. The soles were removed, and the weight of the burnt sole remaining on the cooking plane of the frying pan was measured. Then, three other frying pans identical to those above were used for repeated heating and cooking (100 times), and the weight of the burnt sole remaining on the cooking plane of the frying pan was measured again. The results of this experiment are shown in FIG. 4 and FIG. 5. The burning levels shown in these diagrams are expressed as an absolute value of the weight of the burned portion of the fish, where the amount of burned fish cooked on an uncoated frying pan is taken to be 100. As shown in FIG. 4 and FIG. 5, when a traditional steel frying pan (uncoated one) was used, the burn was considerable after both the first and the 100th cooking. When a Teflon-coated frying pan was used, little burn was observed after the first cooking (a burning degree is 3.). However, after the 100th cooking, the burning degree was as large as 40, which indicates a deterioration of the teflon's ability to prevent burning after the repeated use of the frying pan. When a TiN-coated frying pan was used, little burn was observed (the burning degree is 3) after the first cooking, as in the case of the Teflon-coated frying pan. After the 100th cooking, the burning degree was 20, which is about half that of the Teflon-coated frying pan. It was thus confirmed that after repeated cooking the TiN-coated frying pan is effective in preventing food from burning. [Experiment 2] In the second experiment, kiao-tz (dumplings stuffed with minced pork) were used, as they are one of the most easily burned of foods. Fifty dumplings of almost the same size were prepared for one frying pan; three types of unused frying pans similar to those used in the first experiment were prepared; and the fifty dumplings were placed on their cooking planes. The three types of frying pans with the dumplings were placed on household gas burners and were heated simultaneously for about five minutes with a strong flame of the same intensity. Afterwards, the number of burned dumplings was counted. Then, each of the three types of frying pans repeated the above operations 100 times, and the number of burned dumplings was counted again. The results of this experiment are shown in FIG. 6 and FIG. 7. As is apparent from these diagrams, when a traditional, uncoated steel frying pan was used, the number of burned dumplings was notable both after the first cooking and after the 100th cooking. When a Teflon-coated frying pan was used, no dumpling was burned after the first cooking. However, after the 100th cooking, six dumplings were found burned, indicating the deterioration of the Teflon's ability to prevent burning after repeated cooking. When a TiN-coated frying pan was used, there were no dumplings burned after the first cooking. There were also no burned dumplings found after the 100th cooking, thus confirming that the TiN-coated frying pan has an excellent ability to prevent burns after repeated cooking. [Experiment 3] Three types of frying pans, which are the same as those used in the first and second experiments, were used in the third experiment. The cooking plane of each frying pan was scrubbed with wire brushes for five minutes with the same degree of force. As a result of the scrubbing, countless scratches were marked over the cooking plane of the uncoated steel frying pan. Countless white scratches also appeared on the cooking plane of the Teflon-coated frying pan, and part of the Teflon coating peeled off. On the other hand, the TiN-coated frying pan had no scratches and maintained a lustrous shine. Second method FIG. 8 is a diagram to explain a second method, in which the numeral 11 denotes a substrate of the frying pan, 12 a frying pan formed with TiN film thereon, 13 a frying pan processed for color stabilization, 14 a grinding and washing apparatus, 15 an ion plating apparatus, and 16 denotes a heat treatment apparatus which accomplishes the color tone stabilization process. In order to form a TiN film over the surface of the substrate (11) of the frying pan using this apparatus, the surface of the frying pan substrate (11) is first ground and cleaned by the grinding and washing apparatus (14). The frying pan substrate (11) is composed of a metallic material such as steel. Because the frying pan substrate (11) may be uneven or have dust, oils, or fats attached to the surface where the film is to be formed (which could cause reduced adhesion of the TiN film to the substrate during the formation process thereof), the surface is ground, degreased and washed clean with demineralized water, acid, alkali and the like within the grinding and washing apparatus (14). The TiN film is formed on the surface of the frying pan substrate (11), which has been pretreated in such a manner, by the ion plating apparatus (15). The ion plating apparatus (15) comprising the body (15A) of the apparatus as shown in FIG. 9, a crucible (18) in which the film-formation material titanium (17) is to be placed, a power source for a substrate of an integrated circuit (19), a gas (Ar, N₂) supply regulator (20), an ionization electrode (21), an electron beam apparatus (22), a vacuum apparatus (23), a heater (24), and a gas (Ar, N₂) supply opening (25). Several hundred volts are applied to the frying pan substrate (11), which is arranged on the side opposite to the crucible (18) containing the titanium (17), by the printed circuit substrate power source (19). The interior of the body of the ion plating apparatus (15A) is maintained at a vacuum of about 10⁻⁵ to 10⁻⁷ Torr by the vacuum apparatus (23). Under such conditions, Ar gas is injected into the apparatus by the gas supply regulator (20) to accomplish ion bombardment in the Ar atmosphere over the surface of the frying pan substrate (11). Then, the titanium (17) placed in the crucible (18) is heated and evaporated by the electron beam apparatus (22) to produce Ti particles. The Ti particles are ionized by the ionization electrode (21) to cause the ionised Ti particle to collide with the surface of the frying pan substrate (11), thereby forming the Ti film. When the thickness of the Ti film has grown to several hundred angstroms, the applied voltage of the frying pan substrate (11) is lowered, and N₂ is introduced from the gas supply opening (25) into the body of the ion plating apparatus (15A). The internal pressure of the ion plating apparatus (15) is then adjusted to about 10⁻⁵ Torr by the gas (Ar, N₂) supply regulator (20). In such a manner, the ionised Ti particles above and the N₂ that was also ionised are caused to react by the ionization electrode (21) and form a 2 to 3 micron TiN film over the Ti film formed on the surface of the frying pan substrate (11), thereby manufacturing a frying pan (12). The frying pan (12) is then placed in the heat treatment apparatus (16). As shown in FIG. 10, the heat treatment apparatus (16) comprising the body (16A) of the heat treatment apparatus, a nitrogen (N₂) cylinder (26), an oxygen (O₂) cylinder (27), a purifier (28, 29), a heater (30), a shelf (31), and a pump (32). A TiN-formed frying pan (12) is placed on the shelf (31) in the heat treatment apparatus body (16A) and heated. While heating, N₂ and O₂ are supplied from the N₂ cylinder (26) and the O₂ cylinder into the heat treatment apparatus body (16A) through the purifier (28, 29), so that the inside of the heat treatment apparatus body (16A) is maintained at an atmosphere of O₂:N₂ = 1:20 to 1:5. Under the above conditions, the heater (30) is used to heat the TiN-formed frying pan (12) to 350 to 500°C to form a uniform TiO₂ film of about several hundred angstroms over the TiN film surface, thereby obtaining a frying pan (13) with a TiN film of stabilized color tone. Here, the temperature conditions (350 to 500°C) used for the above operation are set to a level which is close to the upper limit where the frying pan is used at high temperatures, and yet the golden color of TiN is not lost. In the formation method of the TiN film, the color tone of the heat-treated TiN film can be changed to various tones by changing the composition ratio of Ti:N while forming TiN film by the ion plating method. For example, if the condition of the ion plating apparatus used in this experiment is set to about Ti/N = 2.0, the color tone will be light gold during the TiN film formation and turn to a gold color after the heat treatment. If the condition of the ion plating is set to about Ti/N =1.0, the color tone will be gold during the TiN film formation and turn to a deep gold after the heat treatment. It is therefore possible to obtain a frying pan with a stabilized color tone. In a method as described above, a frying pan (13) can be obtained in which the surface of the frying pan substrate (11) is provided with a TiN film having excellent color tone stability during high temperature cooking. According to this method of forming TiN film, it is possible to stabilize the TiN film color tone while heating by forming a very thin TiO₂ film over the TiN surface, which is produced by heating Ti in the TiN film in a mixed atmosphere of oxygen and nitrogen. In addition, by properly adjusting the Ti/N ratio, which is among the conditions used for film formation with the ion plating apparatus, it becomes possible to form a TiN film of various color tones. The frying pan obtained by the aforementioned method will have an improved appearance and will acquire a feeling of high quality because the TiN film is a beautiful gold color. Because the TiN film has a stable color tone, it will not change color when heated during cooking, and its beautiful gold color can be maintained over a long period of time. Third method Now, a third TiN film formation method will be described. In this third method, an apparatus similar to that used in the above methods is used and a frying pan (12) is obtained by forming a TiN film over the surface of the frying pan substrate (11) through operations similar to the ones above. The frying pan (12) obtained in such manner is placed in a heat treatment apparatus (33) shown in FIG. 11. The heat treatment apparatus (33) comprising the body (33A) of the heat treatment apparatus, a nitrogen (N₂) cylinder (34), a purifier (35), a heater (36), a shelf (37), and a pump (38). The frying pan (12) is placed on the shelf (37), and N₂ is supplied from the N₂ cylinder (34) into the heat treatment apparatus body (33A) through the purifier (35). The inside of the heat treatment body (33A) is maintained in an N₂ atmosphere (760 to 765 Torr). In such a manner, the frying pan (12) is heated to 350 to 600°C by the heater (36) under the above conditions so as to diffuse the nitrogen into the TiN film, and the Ti remaining in the TiN during film formation becomes TiN. Most of the Ti remaining in the TiN film that can react to N₂ at the temperature conditions above will be turned into TiN, and a change in color tone of the TiN film will not occur because there is no longer any Ti in the TiN film that can be oxidized by the air, even if the TiN film is heated later at a temperature lower than the above (350 to 600°C). In the manner stated above, it is thus possible to obtain a frying pan with stabilized color tone by coating the surface of the frying pan substrate body (11) with a TiN film with excellent color tone stability at high temperatures. With this method of TiN film formation, it is possible to heat the residual Ti in the TiN film in an individual nitrogen atmosphere to obtain TiN, thereby stabilizing the color tone of the TiN film. In addition, because most of the residual Ti in the TiN film is turned into TiN due to color tone stabilization treatment, It is possible to obtain a TiN film with excellent color tone, closer in color to pure gold than TiN film before color tone stabilization treatment. In each of the above experiments, the TiN film is formed using the ion plating method, but other film forming methods such as the sputtering, metalization or the chemical vapor deposition method may be used to form the TiN film. In each of the above experiments, the method is applied when manufacturing frying pans, but this method can also be applied to various cooking utensils for heating other than frying pans such as a pan with a relatively shallow bottom or a spatula. [Experiment 4] The apparatus shown in FIG. 8 through FIG. 11 was used to manufacture a frying pan which has a color tone stabilized TiN film on its surface. The frying pan substrate body (11) was placed in the grinding and washing apparatus (14), the surface thereof is ground, washed first with water then with demineralized water, acid, base, again with water and finally with alcohol. Afterwards, this substrate (11) was then placed in the ion plating apparatus body (15A). The inside of the ion plating apparatus body (15A) was maintained in a vacuum, about 10⁻⁵ to 10⁻⁷ Torr in the vacuum apparatus (23), and several hundred volts were applied to the installed frying pan substrate (11). Then, the argon gas was injected into the apparatus which bombarded the frying pan substrate (11) with ions in an argon gas atmosphere, and a 200 Å thick layer of Ti was formed over the surface of the frying pan substrate (11). Next, the applied voltage of the frying pan substrate (11) was lowered, N₂ was injected into the ion plating apparatus body (15A) by the gas supply regulator (20), the internal pressure of the ion plating apparatus body (15A) is maintained at about 10⁻⁵ Torr, and a 2 to 3 micron TiN layer was formed. The frying pan (12) obtained by the aforementioned method was placed on the shelf inside the heat treatment apparatus body (16A), N₂ and O₂ were supplied into the heat treatment apparatus body (16A) from the N₂ cylinder (26) and the O₂ cylinder (27), respectively, through the purifier (28, 29). The inside of the heat treatment apparatus body (16A) was maintained at an atmosphere of O₂:N₂ = 1:20 to 1:5 in the above manner, and the frying pan was heated to 350°C by the heater under such conditions. As a result, a frying pan (called embodiment A) with a TiN-film surface and a gold color tone was obtained. Similarly, the frying pan (12) was placed on the shelf (37) in the heat treatment apparatus (33), N₂ was supplied from the nitrogen cylinder (34) into the heat treatment apparatus body (33A) through the N₂ purifier (35). The inside of the heat treatment apparatus body (33A) was maintained in an N₂ atmosphere (760 to 765 Torr) in the manner stated above, and the frying pan was heated to 350°C by the heater (36) under such conditions. As a result, a frying pan (called embodiment D) formed with a TiN-film surface and a pure gold color tone was obtained. With respect to the frying pans of embodiment A and embodiment D obtained through the above operations, tests were conducted on the change in the TiN-film color tone as a result of heating, resistance to burning, and resistance to wear. To test discoloration due to heating, the frying pan of embodiment A and a frying pan (called the compared sample) coated with TiN that was not provided with color tone stabilization treatment were heated to 300°C. As a result of heating, no discoloration was observed in the frying pan of embodiment A, but the frying pan of the compared sample changed color to yellow with a tinge of black. X-ray diffraction tests were carried out on each of the heated frying pans. The results of the X-ray diffraction tests are shown in FIG. 12. The symbol "A" shown in FIG. 12 denotes a frying pan of embodiment A provided with the TiN coating and heated to 300°C, the symbol "B" denotes a frying pan of the compared sample uncoated and heated to 300°C, and the symbol "C" denotes a frying pan of the compared sample provided with the TiN coating. A 300°C heating test was also conducted on the frying pan of embodiment D, but no discoloration was observed. With respect to the burning of food, the frying pans of embodiment A and embodiment D were used for long-term tests in which fish and rice cakes were baked, but both frying pans burned no food at all. With respect to wear resistance, a wire brush was used to scrub forcibly the surfaces of the frying pans of embodiment A and embodiment D, but both frying pans showed no damage to their film surfaces and no peeled film. It was therefore confirmed that these frying pans have excellent wear resistance. As described above, the method of forming the TiN film and the pan according to the present invention has the following effects: The TiN film formation method according to Claim 1 is a method for forming TiN film over the surface of the substrate by a physical metalization method or a chemical metalization method. The pans obtained by such methods have a TiN film with an attractive gold color formed on their surfaces, so that the cosmetic properties of the pan are improved and a look of high quality is conferred to the pan. In addition, because the TiN film has high hardness, it is possible to improve the resistance to wear of the surface of the pan. Further, because the TiN film is chemically stable and free from reactions to burning food and has excellent resistance to burning, the pan will not cause food to burn while cooking, and even if burning should occur, it can be removed easily. With the TiN film formation method according to Claim 1, it is possible to obtain a TiN film with a stable color tone by heating the Ti remaining in the TiN film in a mixed atmosphere of oxygen and nitrogen to produce a transparent and stable TiO₂ film. The pans obtained by such a method have a TiN-film surface with an attractive gold color tone, thereby improving the cosmetic appeal thereof and producing a look of high quality. Because this pan has a transparent and stable TiO₂ film over the TiN film produced on the substrate surface, the beautiful gold color tone of the pan can be maintained over a long time, and the gloss of the pan will not change during heating. It is possible to obtain a TiN film with a stable color tone by heating the Ti remaining in the TiN film in an individual nitrogen atmosphere to produce TiN. The pan resulting from this method has a TiN film with a beautiful gold color tone on its surface. As a result, it is possible to improve its decorative properties and to provide a high quality impression. Because most of the Ti remaining in the TiN film formed on the substrate surface becomes TiN, the beautiful gold color tone of the pan can be maintained over a long time, and the gloss of the pan will not change during heating.

Claims: A method for forming a titanium nitride film, wherein the method is characterized in that a titanium nitride film is formed on the surface of an object by means of physical vapor deposition or chemical vapor deposition, and then the object having the titanium nitride film is heat-treated in an atmosphere consisting of oxygen and nitrogen wherein the ratio of O₂:N₂ is in a range between 1:20 and 1:5, thereby effecting a color-tone stabilizing treatment by forming a transparent and stable titanium oxide film over the surface of the titanium nitride film. A method for forming a titanium nitride film in accordance with claim 1, wherein a titanium film is formed on the surface of an object by means of physical vapor deposition or chemical vapor deposition, before the formation of said titanium nitride film. A method for forming a titanium nitride film in accordance with claim 2, wherein said formation of said titanium film is continued until the thickness of said titanium film reaches several hundred angstroms, and thereafter, said formation of said titanium nitride film is continued until the thickness of said titanium nitride film reaches 2 to 3 µm. A method for forming a titanium nitride film in accordance with claim 3, wherein when said thickness of said titanium film reaches several hundred angstroms, a voltage applied to said object is lowered, and then nitrogen gas is supplied for said formation of said titanium nitride film. A method for forming a titanium nitride film in accordance with claim 2, wherein said formation of said titanium film is continued until the thickness of said titanium film reaches 200 angstroms, and thereafter, said formation of said titanium nitride film is continued until the thickness of said titanium nitride film reaches 2 to 3 µm. A method for forming a titanium nitride film in accordance with claim 5, wherein when said thickness of said titanium film reaches 200 angstroms, a voltage applied to said object is lowered, and then nitrogen gas is supplied for said formation of said titanium nitride film. A method for forming a titanium nitride film in accordance with one of claims 1-6, wherein the temperature of said atmosphere of said heat-treatment ranges between 350°C and 500°C. A vessel having a titanium nitride film formed on the surface thereof which is manufactured according to a method as claimed in one of claims 1-7.

Inventors: KANNO HIROSHI, NAGAOKA HITOSHI, KANNO, HIROSHI,, NAGAOKA, HITOSHI,, KANNO, HIROSHI, KAIHATSU CENTER, NAGAOKA, HITOSHI, NIIGATA ENGINEERING CO., LTD.
Applicants: NIIGATA ENGINEERING CO LTD, NIIGATA ENGINEERING CO., LTD.
Application year: 1990
Main classification: A47J36
IPC codes: C23C16, A47J36, C23C14