Method of manufacturing semiconductor device

Abstract: According to a method of manufacturing a high-frequency bipolar transistor, a p-type base region (2) is formed on an n-type silicon substrate (1). A first oxide film (3) and a nitride film (4) are formed on the base region (2). A base contact hole is formed by etching, and a first polysilicon film (6) containing a p-type impurity and serving as a base electrode (6) is formed thereon. A second oxide film (7) having a thickness larger than that of the first oxide film (3) is formed by thermal oxidation around the base contact hole to surround the first polysilicon film (6). A portion of the nitride film (4) which is not covered with said second oxide film (7) and a portion of the first oxide film (3) therebelow are removed by etching to form an emitter contact hole. A second polysilicon film including an n-type impurity and serving as an emitter electrode (10) is formed in the emitter contact hole. The n-type impurity in the second polysilicon film (10) is diffused in the substrate by annealing to form an n-type emitter region (11). In the completed bipolar transistor, the base electrode (6) and the emitter electrode (10) are insulated from each other by the second oxide film (7).

Description: The present invention relates to a method of manufacturing a discrete bipolar transistor. Such a bipolar transistor may be employed as a high-frequency bipolar transistor required for a high speed operation. In order to obtain good high-frequency characteristics in a high-frequency bipolar transistor required for a high-speed operation, an emitter having a long periphery is advantageous. In addition, a low base resistance and a small collector-base capacitance are preferred. Such high-frequency bipolar transistors are particularly formed by arranging several spaced apart base-, emitter- and collector regions in a substrate. The combination of these discrete regions forms the high-frequency bipolar transistor. Unlike the present invention, relating to a method of manufacturing a discrete bipolar transistor, US-4 640 721 describes the formation of a single bipolar transistor with graft base regions formed in a P-type layer in a semiconductor substrate covered by a first oxide film and a nitride film. A first polysilicon film is deposited into openings formed in said first oxide film and said nitride film to serve as a base electrode. After oxidation of the first polycrystalline silicon film a second oxide film is produced on the base electrode. Thereafter a second polycrystalline film is deposited on the second oxide film to serve as an emitter electrode. An emitter region is formed by thermal diffusion. To connect the emitter- and base regions to the outside an emitter lead-out and an emitter lead-out are formed. In particular, the emitter lead-out is formed at an end portion of the finger-type bipolar transistor. Since only a single-type bipolar transistor having one single emitter lead-out and one single base lead-out is intended here, the base area most responsible for the collector-base capacitance can be decreased, since there is no limitation in space as regards the lead-out wiring layers. By contrast, in a high-frequency discrete bipolar transistor the collector-base capacitance cannot easily be decreased due to the necessity of several emitter- and base- lead- out electrodes, as will further be explained in the following with reference to Figs. 1A to 1C. US-A-4 566 176 describes such a high-frequency discrete bipolar transistor with very fine emitter-base geometry. The disclosed method comprises the steps of forming a base region, forming an insulating layer on the base region and implanting emitter zones and base contact zones and openings in the insulating layer. Only emitter openings are first formed, then the emitter zones are implanted and a masking layer is provided on the insulating layer and in the emitter openings, such that the base contact openings can be etched through apertures in the masking layer. The base contact zones are then implanted into the base contact openings. Emitter- and base- lead outs are connected to the individual emitter- and base regions such that they are arranged in the same plane. A further decreasing of a pitch of an emitter stripe is not possible or contemplated here. On pages 190 and 191 and pages 78 and 79 of "VLSI Electronics Microstructure Science", volume 8, Plasma Processing for VLSI by Norman G. Einspruch and Dale M. Brown, Academic Press, Inc., 1984, well known semiconductor processing techniques, i.e. reactive ion etching and low-pressure chemical vapour deposition are described for the formation of layer structures onto a substrate. The attached Figs. 1A to 1C are typical sectional views sequentially showing conventional steps in manufacturing a high-frequency discrete bipolar transistor. An n-type epitaxial layer 31 is formed on a silicon semiconductor substrate, elements of which are isolated, and a p-type base region 32 and a p⁺-type graft base region 33 implanted with a high-concentration p-type impurity and connected to the p-type base region 32 later are selectively formed in the epitaxial layer 31. The result in structure is thermally oxidized to form a silicon oxide film 34 and then a silicon nitride film 35 is formed thereon (Fig. 1A). In order to form an emitter region, the silicon nitride film 35 and the silicon thermal oxide film 34 on an area between the graft base regions 33 are partly removed by a photolithographic technique to form emitter contact holes 36. A polysilicon layer containing an n-type impurity is deposited on the entire surface of the resultant structure, and the resultant structure is patterned to form emitter electrodes 37. Thereafter, the n-type impurity contained in the polysilicon layer serving as the emitter electrode 37 is thermally diffused in the base region 32 by annealing to form an n-type emitter region 38 (Fig. 1B). The silicon nitride film 35 and the silicon thermal oxide film 34 on the graft base region 33 are partly removed by a photolithographic technique to form base contact holes 39. Thereafter, an emitter electrode aluminum wiring layer 40 and a base electrode aluminum wiring layer 41 are patterned (Fig. 1C). Fig. 2 is a plan view showing a pattern of the arrangement in Fig. 1C. The pattern is formed to have conditions for obtaining the above good high-frequency characteristics. That is, each of the emitter contact holes 36 is divided into a plurality of stripes so that an emitter has a long periphery. Therefore, base contact holes 39 are formed to put the corresponding emitter contact hole 36, therebelow so as to decrease a base resistance. In order to decrease the collector-base capacitance, a base area must be decreased. As shown in Fig. 2, the emitter stripe has a width a and a pitch b which are set to be as small as possible. However, as the pitch b of the emitter stripe is decreased, an interval between the emitter electrode aluminum wiring layer 40 and the base electrode aluminum wiring layer 41 is decreased. A margin for mask alignment using photolithographic etching is extremely decreased, and the emitter electrode and the base electrode are easily short-circuited. Thus, in accordance with the limitation due to a photolithographic technique, it is difficult that the pitch of the emitter stripe is decreased to a minimum line width or less because defect occurs in the transistor. Therefore, it is the object of the present invention to provide a method of manufacturing a discrete bipolar transistor having a decreased pitch of an emitter stripe, having a low base resistance and a small collector- base capacitance suitable for highly reliable high-frequency operation. This object is solved by a method of manufacturing a discrete bipolar transistor comprising the steps a) to i) of the attached claim 1. In the present invention, it was realized that the decrease of the emitter stripe pitch can be achieved by forming first and second base electrodes, such that the base electrodes can be extracted in a different direction than the extraction direction of the emitter electrode. Therefore, the interval between the emitter stripes can be decreased to reduce the base resistance and a collector-base capacitance. In addition, a width of an emitter contact can be decreased and this contributes to the reduction in base resistance. Therefore, a disadvantageous short circuiting of the electrodes can also be avoided. Further advantageous embodiments of the invention can be taken from the dependent claims. According to one aspect of the present invention, there is provided a method of manufacturing of a semiconductor device, comprising the steps of; forming a first oxide film on a semiconductor substrate by thermal oxidation; forming a nitride film on the first oxide film, removing each portion of the first oxide film and the nitride film by etching to expose a first portion selected from the substrate; forming a first polysilicon film of a first conductivity type on the first exposed portion of the substrate; forming a second oxide film thicker than the first oxide film on a portion selected from the nitride film and on the first polysilicon film to surround the first polysilicon film; removing a portion of the nitride film which is not covered with the second oxide film and a portion of the first oxide film therebelow by etching to expose a second portion of the substrate; and forming a second polysilicon film of a second conductivity type on the second exposed portion of the substrate. According to a preferable aspect, the method of manufacturing a semiconductor device includes the step of forming a region of a first conductivity type on the semiconductor substrate prior to the step of forming the first oxide film, and the first oxide film is formed on the region. According to the method of the present invention, when the method is applied to a bipolar transistor, the first oxide film and the nitride film are formed on the region of the first conductivity type prospectively serving as a base region. Each part of these films is etched to form a base contact hole, and the first polysilicon film including an impurity of the first conductivity type and prospectively serving as the base region is formed in the base contact hole. A second oxide film is formed on the first polysilicon film by thermal oxidation to have a thickness larger than that of the first oxide film and to expose a part of the surface of the nitride film between base electrodes. At the same time, a high-concentration impurity of a first conductivity type is implanted in the base region to form a graft base region. Thereafter, the exposed nitride film and the first oxide film are etched to form an emitter contact hole. A second polysilicon film including an impurity of the second conductivity type and prospectively serving as an emitter electrode is deposited on the resultant structure and patterned. That is, the second oxide film formed on the base electrode becomes a mask for forming the emitter contact hole, and an emitter electrode is self-aligned. The second oxide film contributes to prevent a short circuit between the emitter electrode and the base electrode. In addition, since the emitter electrode and the base electrode are respectively extracted from different directions, each interval between electrodes can be decreased. According to the method of the present invention, since the emitter electrode is insulated from the base electrode by an oxide film, even when each interval between emitter stripes is decreased, the emitter electrode and the base electrode are not short-circuited. Therefore, the interval between the emitter stripes can be decreased to reduce a base resistance and a collector base capacitance. In addition, a width of an emitter contact can be decreased, and this contributes to reduction in base resistance. As a result, there is provided a method of manufacturing a semiconductor device for obtaining a highly reliable high-frequency bipolar transistor operated at a high speed. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: Figs. 1A to 1C are sectional views sequentially showing a conventional method of manufacturing a conventional high-frequency bipolar transistor; Fig. 2 is a plan view showing a pattern of an structure of the conventional high-frequency bipolar transistor in Fig. 1C; Figs. 3A to 3F are sectional views sequentially showing a method of manufacturing a discrete bipolar transistor according to the first embodiment of the present invention; and Fig. 4 is a plan view showing a structure of the conventional high-frequency bipolar transistor in Fig. 3F. Referring to Figs. 3A to 3F, according to a manufacturing method of this embodiment, an epitaxial layer 1 doped with an n-type impurity is formed on a silicon semiconductor substrate, elements of which are isolated. A p-type impurity such as boron is ion-implanted in the epitaxial layer 1 to form a p-type base region 2. Thereafter, the resultant structure is thermally oxidized to form a silicon thermal oxide film 3 having a thickness of about 0.1 µm (1,000 Å), and a silicon nitride film 4 having a thickness of about 0.1 µm (1,000 Å) is formed on the silicon thermal oxide film 3 by a low-pressure CVD method or the like (Fig. 3A). Parts of the silicon nitride film 4 and the silicon thermal oxide film 3 are sequentially removed using a photolithographic technique by an RIE (reactive ion etching) method to form a base contact hole 5 having a width of about 0.7 µm. Subsequently, a polysilicon layer containing a p-type impurity is deposited on the entire surface of the resultant structure and patterned to form a base electrode 6 (Fig. 3B). The resultant structure is entirely thermally oxidized, and a thermal oxide film 7 having a thickness of, e.g., 3,000 Å larger than that of the thermal oxide film 3 is formed on a p-type polysilicon film including a p-type impurity and serving as the base electrode 6. The thermal oxide film 7 is formed to expose a part of the surface of the silicon nitride film 4 between each base electrode 6. At the same time, the impurity contained in the base region 2 is thermally diffused in the epitaxial layer to increase the thickness of the base region 2. In addition, the p-type impurity contained in the base electrode 6 is diffused in the base region 2 to form a p⁺-type graft base region 8 obtained by doping a p-type impurity at a high concentration (Fig. 3C). The exposed silicon nitride film 4 and the thermal oxide film 3 therebelow are removed by etching to expose the substrate. In this case, the etching is performed at an etching rate for etching only the silicon nitride film 4 at first, and then the thermal oxide film 3 is etched. At this time, since the thermal oxide film 7 on the base electrode 6 has a thickness sufficiently larger than that of the thermal oxide film 3, it remains. Therefore, an emitter contact hole 9 is formed using the thermal oxide film 7 as a mask (Fig. 3D). A polysilicon film including an n-type impurity is deposited entirely on the resultant structure, and it is patterned by a photolithographic technique to form an emitter electrode 10. Thereafter, the n-type impurity in the polysilicon of the emitter electrode 10 is thermally diffused in the p-type base region 2 by annealing to form an n-type emitter region 11 (Fig. 3E). An emitter electrode aluminum wiring layer 12 and a base electrode aluminum wiring layer 13 (shown in Fig. 4 described later) are formed by patterning (Fig. 3F). In Fig. 3F, as a discrete type bipolar transistor, an n⁺-type substrate 15 and a collector electrode illustrated by two-dot chain line. Fig. 4 is a plan view showing a pattern of the arrangement in Fig. 3F. The base electrode 6 covered with the thermal oxide film 7 shown in Fig. 1 is extracted by the aluminum wiring layer 13 from a direction which is different from the extracting direction of the emitter electrode 10, i.e., a direction parallel to the substrate. Since a conventional emitter contact hole is formed by a photolithographic technique, the maximum width of the emitter contact hole is 0.7 µm. When the emitter and base electrodes are extracted in the same direction, these electrodes may be short-circuited. Therefore, the interval between these electrodes cannot be further decreased. On the contrary, according to the method of this embodiment, the thermal oxide film 7 serves as a mask for forming an emitter contact hole, and an emitter electrode is self-aligned. A short circuit between the emitter and base electrodes is prevented by the thermal oxide film 7. In addition, since the emitter and base electrodes are not extracted from the same direction, even when a photolithographic technique using a conventional mask alignment margin is used, each interval between electrodes can be largely decreased. For example, assuming that the margin for mask alignment is set to be 0.5 µm and the width of minimum dimensions used in a photolithographic technique is set to be 0.7 µm, the width a of the base contact hole 5 is 0.7 µm and the width b of the base electrode polysilicon film 6 is 1.7 µm. After the resultant structure is thermally oxidized to form the thermal oxide film 7 having a width c of 0.3 µm (3,000 Å), when the emitter contact hole 9 is formed to have a width d of 0.5 µm, the pitch e of the emitter stripe can be decreased to 2.8 µm. Note that, according to this embodiment, the polysilicon film serving as the emitter electrode contains an impurity in advance, but an impurity may be implanted in a polysilicon film in which an impurity is not implanted. In addition, although the base region 2 is formed prior to formation of a base contact hole, the base region 2 may be formed by implanting impurity ions through an emitter contact hole after the emitter contact hole is formed.

Claims: A method of manufacturing a discrete bipolar transistor, comprising the following steps: a) forming a first oxide film (3) on a semiconductor substrate by thermal oxidation; b) forming a nitride film (4) on said first oxide film (3); c) removing first parts of said nitride film (4) and said first oxide film (3) by etching to expose a plurality of first portions (5) of said semiconductor substrate so as to form base contact holes (5) having a given pitch; d) forming a first polysilicon film (6) including an impurity of a first conductivity type (P) on said nitride film (4) and in said base contact holes (5) and patterning said first polysilicon film (6) to form base electrodes (6) in said base contact holes (5); e) thermally oxidizing said base electrodes to form a second oxide film (7) having a thickness larger than that of said first oxide film (3) on said base electrodes (6), said thermal oxidation leaving second parts of said nitride film between said base electrodes exposed; f) removing said second parts of said nitride film (4) and parts of said first oxide film (3) therebelow by etching to expose a plurality of second portions of said semiconductor substrate so as to form emitter contact holes (9) having said given pitch; g) forming a second polysilicon film (10) including an impurity of a second conductivity type (N) on said second oxide film (7) and in said emitter contact holes (9) and patterning said second polysilicon film (10) to form emitter electrodes (10) in said emitter contact holes (9); h) diffusing said impurity of said second conductivity type (N) contained in said emitter electrodes (10) by annealing to form emitter regions (11) of said second conductivity type (N); i) forming a base electrode wiring layer (13) and an emitter electrode wiring layer (12) above said base and emitter contact holes, respectively, said base electrode wiring layer and said emitter electrode wiring layer being interdigitated. A method according to claim 1, characterized in that said method includes the steps of forming an epitaxial layer (1) of said second conductivity type (N) on said semiconductor substrate and forming a base region (2) of said first conductivity type (P) in said layer (1), said first oxide film (3) being formed on said base region (2). A method according to claim 1, characterized in that said steps of etching are performed by reactive ion etching. A method according to claim 1, characterized in that said step of forming said nitride film (4) is performed by low-pressure chemical vapour deposition. A method according to claim 1, characterized in that said semiconductor substrate is a silicon substrate and said oxide film and said nitride film are respectively a silicon oxide film (3) and a silicon nitride film (4). A method according to claim 1, characterized in that aluminium is used for forming said wiring layers (12,13). A method according to claim 2, characterized in that said thermal oxidation step e) causes a thermal diffusion of said impurity contained in said base region (2) into said layer (1) to increase the thickness of said base region (2). A method according to claim 7, characterized in that said thermal oxidation step e) further causes a thermal diffusion of said impurity contained in said base electrodes (6) into said base region (2) to form high impurity concentration graft base regions (8) therein. A method according to claim 1, characterized in that an impurity of P-type is used for said first conductivity type and an impurity of N-type is used for said second conductivity type.

Inventors: YAMADA YOSHIKI C O INTELLECTUA, YAMAKI BUNSHIRO C O INTELLECTU, YAMADA, YOSHIKI, C/O INTELLECTUAL PROPERTY DIV., YAMAKI, BUNSHIRO, C/O INTELLECTUAL PROPERTY DIV.
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1990
Main classification: H01L21
IPC codes: H01L23, H01L29, H01L21