Shuttle system for rapidly manipulating a workpiece into and out of an atmospherically controlled chamber

Abstract: An automated workpiece handling system rapidly moves a workpiece (127) into a controlled atmosphere chamber (11) such as a vacuum chamber, to a work station and withdraws the piece (127) after the work has been completed. While at the work station, the handling system manipulates the piece (127) linearly and in rotation, as desired, according to a set program. The workpiece (127) is loaded and unloaded at the same location outside the chamber (11), at atmosphere pressure. A split piston having a headstock (49) and tailstock (50) holds the workpiece (127). The piston seals the vacuum chamber (11) during loading and unloading, and during the work cycle. During transfer into the vacuum chamber (11), pressure around the workpiece is reduced. A pneumatic counterbalance system (111,143,141,109) reduces the loading on the piston drive system caused by the pressure differential between the vacuum chamber (11) and atmosphere.

Description: The present invention relates to an apparatus for transferring workpieces into a sealed chamber containing reduced pressure in which an operation is performed on such workpiece. Transport systems for inserting workpieces into a vacuum chamber insert the workpieces either singly or in batches through a door in the vacuum chamber. After the chamber is sealed, it must be evacuated to a vacuum. Then, the pressure must be increased again for removal of the finished workpieces and insertion of replacements. In order to avoid this cumbersome process, the inventor of the present invention devised a method of transporting a plurality of workpieces through a sealed chamber on a continuous basis in a plurality of individual workpiece compartments which move along an input passage, into the sealed chamber, and then out of the chamber along an output passage. Each individual compartment is sealed while in the input and output passage so that pressure in the individual compartments can be independently varied as necessary. The pressure in the individual compartments is reduced before it reaches the sealed chamber, thereby avoiding wide fluctuations of the reduced pressure in the sealed chamber. This method avoids the cumbersome process of raising and lowering the pressure in the vacuum chamber every time a workpiece is inserted and removed. This system, however, does not readily lend itself to an automated loading process for the vacuum chamber or manipulation of the workpiece while in the chamber as does the present invention. The system is disclosed in US-A-4266111. According to the present invention, there is provided a shuttle system for shuttling a workpiece into and out of a sealed chamber which can contain a controlled atmosphere, the system comprising: a passageway extending into the sealed chamber at one end and being open to the atmosphere at the other end, the passageway having a pumping port through which air can be drawn and past which the workpiece must pass in use to move into the sealed chamber; a split piston having a headstock and a tailstock with space therebetween for holding the workpiece, the piston being sized to fit and move within the passageway; first sealing means and second sealing means each located on the headstock of the piston for sealing the headstock against the interior of the passageway, the spacing between the first and second sealing means being greater than the extent of the pumping port in the direction of movement of the headstock; third sealing means located at the other end of the passageway for sealing the interior of the passageway to the piston at the third sealing means; and, means for moving the piston into and out of the chamber through the passageway. The present invention loads workpiece parts into a holder for transfer into a vacuum chamber without causing a pressure rise in the chamber during insertion or withdrawal of the workpiece. The objects and many of the attendant advantages of this invention will be readily appreciated as the same becomes better understood by reference to the following detailed description when considered in conjunction with the accompanying drawings, in which like reference numerals designate like parts throughout the figures thereof, and wherein: Figures 1A, 1B and 1C show a plan view partly in section of a preferred embodiment of the invention; Figure 2 is an end elevation partly in section of the apparatus of Figure 1; Figure 3 is a partial cross-section of the workpiece loading area of Figure 1; and, Figure 4 is a plan view partly in section of a portion of the apparatus shown in Figure 1 connected to additional apparatus not shown in Figure 1. Figures 1A, 1B and 1C in combination illustrate the complete assembly of the preferred embodiment of the present invention. Figure 1A shows a vacuum chamber 11 of well-known construction having walls capable of withstanding reduced pressures in the chamber so that a vacuum of at least 1,33·10⁻² to 1,33·10⁻³ Pa (10⁻⁴ to 10⁻⁵ Torr) could be produced in the chamber by suitable conventional pressure reducing means such as a diffusion pump (not illustrated). An electron gun (not shown) of suitable design is provided so that it can direct a beam 13 of electrons in a desired direction at a precise location within the sealed chamber 11. A two-part tube 15, 17 pierces the wall of the chamber 11 to provide a passage into the chamber. Part 15 of the tube is located primarily exteriorly to the chamber 11. Part 17 of the tube is located within the chamber. Part 15 is connected to the chamber wall by a flange 24. Part 17 of the tube is connected to the inside of the chamber wall by a flange 23 which overlays flange 24. A series of set screws 25 or the like engage both flanges 23, 24 and fasten them rigidly to the wall of chamber 11. The part 17 is machined as shown to allow the electron beam 13 access to the workpiece to be welded, and is held by rigid straps 21. Exterior to the vacuum chamber 11, a side plate 31 surrounds exterior tube portion 15, squeezing an O-ring 33 which is located in the exterior wall of chamber 11 around the access tube 15. Mounted to side plate 31 is an O-ring retainer plate 35 which is fastened to plate 31 by a threadable fastening means such as set screws, for example. The O-ring retainer plate seals around the periphery of exterior access tube 15 by an O-ring 37. Halfway between the two ends of the exterior access tube 15 are a plurality of exhaust holes 39. A casing 41 surrounds exhaust holes 39. The casing 41 is sealed to the exterior of access tube 15 by a pair of O-rings 43, 45 located in casing 41. Besides being rigidly mounted to the wall of vacuum chamber 11, exterior access tube 15 is supported by a tube support 47, which keeps exterior access tube 15 within its desired alignment. The open end of tube 15 has a headstock 49 of a split piston located therein. The split piston is comprised of a headstock 49 and a tailstock 50. The headstock and tailstock are physically connected together by means of rigid straps 133, 135. The headstock 49 contains a primary O-ring quad seal 55 therein which seals the headstock 49 against the interior of access tube 15. A secondary O-ring quad seal 53 is located downstream on headstock 49. Located within the walls of access tube 15 is another quad O-ring 51 which seals the interior of the access tube 15 against the headstock of the split piston or the tailstock 50, as the case may be. Contained within headstock 49 is a workpiece or locating gripping device 57 which is fixedly but rotatably mounted therein by means of bearings 58. The face of workpiece gripping means 57 is adapted to fit the curvature of the end of workpiece 127. Workpiece 127 is shown, for illustration purposes only, to comprise a three-piece bone-shaped linkage which needs to be circumscribe welded at locations 129 and 131. The other end of workpiece 127 is grasped by tailstock rod 52 which has an end formed to grasp the shape of that end of workpiece 127. Tailstock rod 52 fits within tailstock 50. Tailstock rod 52 is sealed by O-ring seals to tailstock 50. O-ring seal 63 seals end mounting plate 60 to tailstock tube 50. A quad ring seal 61 seals end mounting plate 60 to tailstock rod 52. Tailstock rod 52 is mounted for rotary and translational motion within tailstock tube 50. Bearing assembly 65 allows tailstock rod 52 to rotate and move linearly around its axis. The other end 58 of tailstock rod 52, opposite the workpiece contact end, is connected to a helicoil coupler 77 through a spline bushing-spacer mechanism 75, which is fixedly attached to the end of tailstock rod 52. A piston plunger 66 is mounted on the smaller diameter portion of tailstock rod 52 against the ridge 70. It is held against the ridge by a snap ring 68. Piston plunger 66 has a pair of O-rings located therein. A quad O-ring 69 seals the piston plunger 66 to the interior of tailstock 50. An O-ring 73 located downstream of the quad O-ring 69 seals the circumference of tailstock rod 52 to piston plunger 66. The piston plunger and O-rings create two separate pressure chambers within tailstock 50 of the piston. A pressure line 85 goes into one pressure chamber located on the front side of piston plunger 66. Another pressure line 87 goes into the other thus-created chamber on the back side of piston plunger 66. A motor 81, which could be a computer controlled stepper motor, is mounted to a motor flange 79. The shaft 84 of the motor passes through the flange and is sealed thereto by an O-ring 83. The motor shaft 84 is connected to the flexible coupler 77. This entire assembly seals the open end of tailstock tube 50. Motor 81 through flexible coupler 77 and the coupling mechanism 75 causes rotation of tailstock rod 52 within bearing 65 and piston plunger 66, thereby rotating workpiece 127. The other end of workpiece 127 follows this rotation because it is contacting rotatably mounted workpiece gripping device 57. Tailstock rod 52 is actuated for lateral movement either to engage or disengage workpiece 127 by pneumatic means (not shown) simply by applying pressure into line 87 (engage) or line 85 (disengage). Applying pressure to line 85 causes plunger 66 to move against snap ring 68. This movement of the tailstock rod 52 to the right is made possible by the sliding spline in the flexible coupler 77. Moving tailstock rod 52 to the right causes the space between the two gripping faces of headstock 57 and tailstock 52 to increase beyond the length of workpiece 127, allowing the workpiece to be removed or inserted. Assuming a workpiece is inserted, increased pressure into line 87 causes a pressure increase on the other side of piston plunger 66 to move it against ridge 70 of tailstock rod 52. This force moves the tailstock rod 52 to the left to engage workpiece 127 and forcibly hold it against headstock engaging face 57. Referring now to Figure 2, it can be seen that the piston comprised of the headstock 49 and tailstock 50 is held by a piston cradle 67 at the tail end of tailstock 50. Piston cradle 67 is mounted on a platform 85. Platform 85 has a pair of rail rider blocks 93, 95 mounted to the underside which, respectively, engage rails 97 and 99. The rail structure 97, 99 is mounted to a platform 101 that is attached to a wall or other vertical support structure 103 by a suitable bracing and fastening mechanism 105. Attached to platform 85 is a downwardly-extending plate 87, which has a U-shaped bracket 91 with arms 92 attached thereto. The rails 97, 99 and rail rider blocks 93, 95 provide for movement of the piston headstock 49 and tailstock 50 laterally along its axis. Referring now again to Figures 1A, 1B and 1C, such movement causes the headstock to move through the access tube 15, past exhaust holes 39, into vacuum chamber 11, and into the interior segment of the access tube 17. This lateral movement, as will be more fully described hereinafter, positions workpiece 127 precisely as required with respect to the electron beam 13 to effect the welds 129, 131 required on the workpiece. Referring both to Figure 2 and to Figures 1A, 1B and 1C, platform 85 has journalled therein a drivescrew 107. The opposite end of drive screw 107 is held in bearing 119 and fastened to a motor 121, which is preferably a brushless DC motor driven by a programmable servomechanism that is under computer control (not shown). Rotation of the drive screw 107 by motor 121 causes the platform 85, along with piston cradle 67 and the piston 49, 50, to move laterally along its axis to the left or to the right, depending upon the direction of rotation. The speed of lateral movement is controlled by the speed of rotation of the drive screw. Figures 1B and 1C show two extremes of travel for platform 85. At the right end, the platform 85 (in solid lines) is located so as to permit loading of workpiece 127 into the split piston 49, 50. At the left end the platform 85a (in dashed lines) is located where it would be when the workpiece 127 is inside the vacuum chamber 11, underneath electron beam 13. A pair of support brackets 115, 113 support a thin wall stainless steel tube 111. One end of tube 111 is sealed and has a pneumatic hose 117 connected thereto. The other end 123 of tube 111 is open to the atmosphere. Mounted to support arms 92 of the U-bracket 91 and surrounding a short section of tube 111 is a sleeve 109. Tubular sleeve 109 is pivotally mounted to arms 92 of the U-bracket at pivot points 94, 96 respectively. As platform 85 moves laterally along the axis of tailstock rod 52, sleeve 109 moves laterally along the axis of tube 111. Because of the pivot mounting no side loading occurs. Referring more specifically to Figure 4, it can be seen that a free-moving piston 141, preferably a strong rare earth magnet, is located inside the tube and sealed with O-rings 142, 144 at either end. The closed end of tube 111 is connected by pneumatic line 117 to a tank 143 having a much greater volume than tube 111, at least ten times as great. Tank 143 is effectively a constant source of pneumatic pressure 145 in a direction from left to right, as indicated. This constant pressure will cause magnet piston 141 to move to the right, causing sleeve 109 riding on the outside of tube 111 to follow. The nature of the materials used provides a strong magnetic coupling between the magnet piston and the follower sleeve 109. Because sleeve 109 is pivotally attached to U-bracket arms 92 of platform 85, a constant linear pressure along the axis of movement will be applied to platform 85, tending to move the platform to the right in counterbalance to and away from vacuum chamber 11. The function of the above-described transfer and manipulation mechanism will now be described. At the position shown in Figures 1A, 1B and 1C, the transfer system is at the load/unload position. A blast of pneumatic pressure into line 85 causes tailstock rod 52 to move to the right, releasing completed workpiece 127 and allowing insertion of a workpiece that needs to be welded at weld joint locations 129, 131. The workpiece to be welded is placed into position between support straps 135, 133 (Figure 3), which connect headstock 49 with tailstock 50. A blast of pneumatic pressure into line 87 moves tailstock rod 52 to the left, causing it to engage and grasp the new workpiece 127 between grasping face 57 of headstock 49 and grasping face 56 of tailstock rod 52. The workpiece 127 now being held firmly in place between headstock 49 and tailstock 50, motor 121 is actuated to turn drive screw 107, thereby rapidly pulling platform 85 towards it. As it does so, headstock 49 moves into external passage tube 15 towards vacuum chamber 11. The movement is constant and rapid. Headstock 49 travels past the exhaust holes 39 within casing 41, which is constantly being evacuated by a mechanical pump to a pressure of from 13,3 to 1,33 Pa (10⁻¹ to 10⁻² Torr). The spacing of seals 55 and 53 is greater than the diameter of the exhaust holes 39. When quad seal 55 is located on the vacuum chamber side of exhaust holes 39 of casing 41, quad seal 51 located in passage tube 15 is engaging tailstock 50, thereby creating a sealed chamber around workpiece 127. As quad seal 53 moves over holes 39, the atmospheric pressure around workpiece 127 is evacuated to approximately 1,33 Pa (10⁻² Torr) by the casing 41. Seal 55 continues to isolate the chamber 11 and prevents these sudden pressure changes from affecting the vacuum chamber pressure. As workpiece 127 continues down the passage tube 15 and into vacuum chamber 11, tailstock 50 now maintains the seal against atmospheric pressure by engagement with quad seal 51 and, of course, the various seals located in end plate 60. The vacuum chamber 11 is preferably maintained at 1,33·10⁻² to 1,33·10⁻³ Pa (10-4 to 10-5 Torr) by a diffusion pump. The differential of 13,3 Pa (10-1 Torr) between the pressure around the workpiece entering the chamber and the pressure of the chamber is insufficient to increase the pressure of vacuum chamber 11 above a workable level. This is due to the relatively large volume difference between the vacuum chamber and the workpiece area. As the workpiece enters the work station area underneath electron beam 13, headstock 49 moves into section 17 of the access pipe. This section of the pipe simply holds headstock 49 steady and protects the seals of headstock 49 from damage. While underneath electron beam 13, workpiece 127 is rotated to create a continuous circumferential weld at weld joint 129 by motor 81 rotating tailstock rod 52. After weld 129 is complete, motor 121 is activated to move the workpiece further into vacuum chamber 11 until weld location 131 is underneath electron beam 13. Again, motor 81 is engaged to rotate workpiece 127 until the weld is complete. At that point, servodriven motor 121 is engaged to rapidly turn drive screw 107 in the opposite direction to move platform 85 to the right, thereby pulling split piston 49, 50 out of the vacuum chamber 11 to the unload location. The workpiece moves past the casing 41 until it returns to atmosphere. Thereafter, the headstock and tailstock are located again at the unload/ load location shown in Figure 1, allowing unloading of a completed workpiece and loading of an incomplete workpiece. Because of the pressure differential between the interior of vacuum chamber 11 and atmosphere, there is a 1-bar pressure being exerted on headstock 49 and tailstock 50, attempting to force it into vacuum chamber 11. In order to provide precise lateral movement of the workpiece, the present invention contemplates counterbalancing of this force by the cylinder counterbalance assembly which consists of the tube 111, its magnetic floating piston 141, and the external floating sleeve 109. Due to the pressure reservoir 143 applying a constant pressure 145 in an amount equal to and a direction opposite to the force exerted by vacuum chamber 11, the force exerted by vacuum chamber 11 is neutralized. This allows the servodrive motor 119 to very accurately and precisely laterally place workpiece 127 underneath electron beam 13. As can be seen, the above invention provides for rapid insertion and extraction of a workpiece into a high vacuum chamber. Precise manipulation of the workpiece while in that chamber, both laterally and in rotation, effectuate a variety of welds on that workpiece. Because the workpiece is loaded and unloaded at the same location, the transport system easily accommodates robotic loading and unloading mechanisms.

Claims: A shuttle system for shuttling a workpiece (127) into and out of a sealed chamber (11) which can contain a controlled atmosphere, the system comprising: a passageway (15,17) extending into the sealed chamber (11) at one end and being open to the atmosphere at the other end, the passageway having a pumping port (39) through which air can be drawn and past which the workpiece must pass in use to move into the sealed chamber; a split piston having a headstock (49) and a tailstock (50) with space therebetween for holding the workpiece (127), the piston being sized to fit and move within the passageway (15,17); first sealing means (53) and second sealing means (55) each located on the headstock (49) of the piston for sealing the headstock (49) against the interior of the passageway (15), the spacing between the first and second sealing means being greater than the extent of the pumping port (39) in the direction of movement of the headstock; third sealing means (51) located at the other end of the passageway (15) for sealing the interior of the passageway (15) to the piston at the third sealing means; and, means (107,119,121) for moving the piston into and out of the chamber through the passageway (15,17). A system according to claim 1, wherein the tailstock (50) contains a rod (52) extending along its length, the rod (52) engaging one end of the workpiece (127). A system according to claim 2, wherein the rod (52) is mounted for rotation within the tailstock (50). A system according to claim 2 or claim 3, comprising sealing means (60,61,63) located at the leading end of the tailstock (50) for sealing the interior of the tailstock (50) to the rod (52) at the leading edge sealing means (60,61,63). A system according to any of claims 2 to 4, comprising sealing means (66,69,73) located at the trailing end of the tailstock (50) for sealing the interior of the tailstock (50) to the rod (52) at the trailing edge sealing means (66,69,73). A system according to any of claims 3 to 5, comprising coupling (75,77) connected to the trailing end of the rod (52) for imparting rotary motion to the rod (52). A system according to claim 6, further comprising a motor (81) mounted to the trailing end of the tailstock (50) and connected to the coupling means (75,77). A system according to claim 6 or claim 7, wherein the coupling means (75,77) permits translational motion along the axis of rotation of the rod (52). A system according to claim 8, further comprising pneumatic means for moving the rod (52) either back or forth along its axis of rotation, thereby causing the rod (52) to disengage or engage the workpiece (127). A system according to any of the preceding claims, wherein the split piston moving means (107,119,121) comprises a motor (121) and a drivescrew (107), mounted to the output shaft of the motor (121) and threadably attached to the tailstock (50) of the split piston. A system according to claim 10, further comprising a mounting platform (85) having a piston cradle (67) attached thereto, the tailstock (50) of the split piston being held fast by the piston cradle (67); and, a pair of rails (97,99) extending parallel to the central axis of the passageway (15,17), the mounting platform (85) riding on the rails (97,99), the drivescrew (107) threadably engaging the mounting platform (85). A system according to claim 10 or claim 11, wherein the motor (121) comprises a programmable motor (121). A system according to any of the preceding claims, comprising pneumatic means for balancing the forces being exerted on the split piston by the chamber (11) when the piston is moved into and out of the chamber (11) by the split piston moving means (107,119,121). A system according to claim 13, wherein the pneumatic balancing means comprises: a pressurised cylinder (111) having one end (123) open to the atmosphere and the other end connected to a constant source of pressure (143,145); a piston (141) located in the cylinder (111) mounted for movement therein from one end to the other and reacting to the force being applied by the pneumatic pressure (145) at the pressure end of the cylinder (111); and, a shoe (109) mounted for movement on the outside of the cylinder (111) and magnetically coupled to the piston (141) in the cylinder (111), whereby the shoe (109) and the piston (141) move together and forces applied to the cylinder (111) are transferred to the shoe (109).

Inventors: TRILLWOOD RICHARD E, TRILLWOOD, RICHARD E.
Applicants: CAMBRIDGE VACUUM ENG, CAMBRIDGE VACUUM ENGINEERING LTD.
Application year: 1990
Main classification: B23K15
IPC codes: H01L21, B23K15, H01J37