Method and apparatus for determining refractive index distribution

Abstract: Determination of refractive index distribution is utilized, data of all the positions of diffraction images on a plane, from the incident ray dispersed by the cylindrical glass rod during the ray passing therethrough, are performed linear approximation thereof; and the angle of the outgoing ray is calculated using the intersection of the approximate lineation and a plane through which the incident ray passes. Many data can be employed to calculated the angle of the outgoing ray. This substantially improve accuracy of measurement of the angle of the outgoing ray and further this makes it possible to determine the angle even if no image of the outgoing ray is present on the plane through which the incident ray passes.

Description: The present invention relates to a method for determining refractive index distribution of, for instance, a cylindrical glass rod used as rod lenses or a preform for use in making optical fibers as well as an apparatus for determining such refractive index distribution. The refractive index of cylindrical glass rod used as preforms (base materials) for making optical fibers or rod lenses per se varies radially and distributed as a square distribution along their radial direction while it remains unchanged in the axial direction. Optical fibers can be obtained by drawing such a cylindrical glass rod. Therefore, it is quite important to correctly determine the refractive index distribution of the preform prior to drawing it into optical fibers, whereby products having high quality would be obtained. The principle of method for determining refractive index distribution of a cylindrical glass rod is explained below by using of FIG.3. In the FIG.3, the reference numeral 10 represents a cylindrical glass rod. The reference numeral 27 represents screen to which ray "b" of light incident upon the cylindrical glass rod 10 is perpendicular. X-coordinate and y-coordinate are defined as origin "c" which is a point projected onto screen 27 by rectilinearly propagating of the incident ray "b". When the cylindrical glass rod 10 places as traced with 2-point chain line, incident ray "b" enter into the center of the cylindrical glass rod 10 and then pass rectilinearly through out as outgoing ray "d₀", which projects at origin "c" on screen 27. Then if the cylindrical glass rod 10 is displaced in parallel from the place traced with the 2-point chain line to a place traced by continuous line, the incident ray "b" passes through the cylindrical glass rod 10 refracting under refractive index distribution thereof and outgoes from the cylindrical glass rod 10 as outgoing ray "d₁", which projects at point Xc of x-coordinate on screen 27. The point Xc is displacement coordinate by displacing distance "t" of the cylindrical glass rod 10, thus represented by a function of the "t" as the following formula: Xc = f(t) Outgoing angle Φ (t) has the following relation: Φ (t) = tan⁻¹(Xc/L) = tan⁻¹{f(t)/L} In this formula, "L" represents the length from the center of the cylindrical glass rod 10 to the screen 27. The outgoing Φ (t) thus can be determined from measuring results of the points Xc by the displacing distances "t" of the cylindrical glass rod 10. Then the refractive index distribution n(r) of the cylindrical glass rod is calculated from the following formula, using the angle Φ (t) of outgoing ray thus obtained: In this formula, "n₂" represents the refractive index of the surrounding area of the cylindrical glass rod 10 and "a" is the radius of the cylindrical glass rod 10. Japanese Patent Provisional Publication Nos. 63-95336 and 63-95337 disclose methods for determining refractive index distribution of a cylindrical glass rod by using the above explained principle. In case of a cylindrical glass rod is prepared by, for instance, growing glass along its axial direction according to the VAD (Vapor-phase Axial Deposition) technique, layer structure may be formed within the growing glass and the layer structure often make refractive index distribution of the resulting glass heterogeneous in the axial direction. Point "e(x,y)" in FIG.3 shows a projected point of outgoing ray "d e " on screen 27 from cylindrical glass rod 10 which having such as the layer structure is deposited at the place traced with continuous line. Incident ray "b" passes through the cylindrical glass rod 10 diffracting by the layer structure, the outgoing ray "d e " disperses to the direction of the y-axis, and then is projected at the point "e(x,y)" far from the x-axis on the screen 27. Conventionally, even if a cylindrical glass rod had layer structure and an outgoing ray was projected at a point "e" far from an x-axis, outgoing angle Φ was determined from only x-coordinate of the point "e". Thus, it is difficult to correctly determine the angle Φ of the outgoing ray of the cylindrical glass rod having great deal of layer structure, in the result, this causes determined values to be errors. If the refractive index distribution is calculated from such erroneous values of the angle Φ of the outgoing ray, the resulting refractive index distribution causes great variation at the portions of the cylindrical glass rod within which great deal of layer structure are present and thus a correct refractive index distribution cannot be obtained. The inventors of this invention have conducted various studies to achieve determining refractive index distribution of the cylindrical glass rod and found that the determining can effectively be improved by followings: All position data of the dispersed images of the outgoing ray obtained by making a ray of light incident upon a cylindrical glass rod from the direction perpendicular to the central axis of the glass are measured and calculated into approximate lineation, and then an angle Φ of the outgoing ray is determined by an intersection of the approximate lineation and a place through which the incident light passes. Thus, the present invention has been completed on the basis of this finding. An object of the present invention is to provide a method for determining refractive index distribution which makes it possible to determine a correct refractive index distribution of a cylindrical glass rod used as, for instance, a preform for making optical fibers in which a great deal of layer structure may be present. According to this object, one aspect of the present invention is providing a method for determining refractive index distribution which comprises the following steps (a) to (g): (a) making rays of light incident into the cylindrical glass rod from the direction perpendicular to the central axis of the cylindrical glass rod, (b) measuring in a plane the position coordinates of diffraction images of "0" degree to "n" degree which are formed by an outgoing ray transmitted through the cylindrical glass rod from said incident ray, (c) providing an approximate lineation from said position coordinates of the images, (d) calculating an intersection point of said approximate lineation and a plane which a perpendicular to the central axis of the cylindrical glass rod and through which the incident ray passes, (e) displacing the cylindrical glass rod in a radial direction thereof said direction being also perpendicular to the incident ray direction, (f) measuring the displacing distance of the cylindrical glass rod, repeating steps b) to f) until the light in a) is no longer incident on the cylindrical glass rod and (g) determining the refractive index distribution of the cylindrical glass rod from a function relating said intersection point in the step (d) to said displacing distance in the step (f). Another object of the present invention is to provide an apparatus for determining a correct refractive index distribution of a cylindrical glass rod even if the rod has a great deal of layer structure therein. According to this object, another aspect of the present invention is provided an apparatus for determining refractive index distribution which comprises the following means (a) to(d): (a) an optical system for minimizing spot areas of light rays from a light source at the center of the cylindrical glass rod and making the rays of light incident upon the cylindrical glass rod from the perpendicular direction to the central axis thereof, (b) means for displacing in parallel the cylindrical glass rod in a radial direction thereof said direction being also perpendicular to the incident ray direction, (c) means for a image pickup to observe images shaped by an outgoing ray from the cylindrical glass rod to transfer position coordinates and (d) means for calculating the refractive index distribution thereof from the displacing distances by said means for the displacing and said position coordinates, wherein said means for the image pickup is placed on a table which is movable parallel to the direction of an optical axis of the means for the image pickup and said means for calculating the refractive index distribution contains: an arithmetic circuit for calculating an approximate lineation from said position coordinates; an arithmetic circuit for calculating a coordinate of an intersection point from said approximate lineation and a plane which a perpendicular to the central axis of the cylindrical glass rod and through which the incident ray passes; an arithmetic circuit for calculating for an angle of the outgoing ray from said coordinate of the intersection point and, the distance between the cylindrical glass rod and the plane containing the position coordinates; determining the function relating said angle to said displacing distance, and an arithmetic circuit for calculating the refractive index distribution of the cylindrical glass rod from said function. According to the method of the present invention in which the apparatus of this invention is utilized, data of all the positions of the images, which is formed, on a plane, from the incident ray dispersed by the cylindrical glass rod during the ray passing therethrough, are operated to give binary values to thus perform linear approximation thereof; and the angle of the outgoing ray is calculated using the intersection of the approximate lineation and a plane through which the incident ray passes. Therefore, many data can be employed to calculate the angle of the outgoing ray. This substantially improve accuracy of measurement of the angle of the outgoing ray and further this makes it possible to determine the angle even if no image of the outgoing ray is present on the plane through which the incident ray passes. In the present invention, the cylindrical glass rod may be in the form of a coaxial cylindrical glass rod which can be used as a material for making optical fibers composed of a core portion and one or more clad portions. The method and apparatus according to the present invention will be more apparent from the following detailed description described below with reference to the attached drawings, wherein: FIG.1 is a perspective view of an embodiment of the apparatus according to the present invention; FIG.2 is a block diagram showing a control portion of the foregoing embodiment of the apparatus shown in FIG.1; FIG.3 is a diagram for explaining the principle for determining refractive index distribution; FIG.4 is a diagram for explaining the functions of the embodiment shown in the preceding figures; FIG.5 is a diagram showing the refractive index distribution of a preform; FIG.6 shows the behavior of the angle of the outgoing ray determined according to the apparatus shown in the preceding figures; FIG.7 shows the refractive index distribution calculated from the angle of the outgoing ray shown in FIG.6; FIG.8 is a diagram showing the characteristic properties of the angle of the outgoing ray obtained according to a reference example; FIG.9 is a diagram showing the refractive index distribution calculated from the angle of the outgoing ray shown in FIG.8; FIG.10 is a schematic plane view of an other embodiment of the apparatus according to the present invention; FIG.11 is a block diagram showing a control portion of the foregoing embodiment of the apparatus shown in FIG.10. The present invention will hereunder be explained in more detail with reference to non-limitative specific embodiments. FIG.1 shows a schematic construction of an embodiment of the apparatus according to the present invention and is partial cutaway view. This apparatus is constructed on chassis 1. In FIG.1, the reference numeral 10 represents cylindrical glass rod to determine refractive index distribution which use for a preform of optical fibers. The reference numeral 11 represents a cell which has transparent windows. The cylindrical glass rod 10 is fitted into cell 11 slidably through O-rings 15 and is supported on supporters 33 on a movable table 13. The cell 11 is filled with a matching oil 12 in order to prevent abrupt change in the refractive index at the boundary of the cylindrical glass rod 10 and the air possibly present in the cell 11. Screw driving system 16 is mounted to an under part of the movable table 13 and is connected to pulse motor 14 by gears 36 and 37. The reference 26 represent driving guide shafts. The pulse motor 14 rotating, the cylindrical glass rod thus moves to the radial direction thereof. The reference 17 represents a light source such as He-Ne laser oscillator which is supported supporter 25 on the chassis 1. The reference numeral 18 represents an optical system for making a ray of light incident upon the cylindrical glass rod 10. The optical system 18 has polarizing plate 19, λ/4-plate 20, lens 21, mirror 22 and lens 23. The incident optical system serves to converge the incident ray emitted from the light source 17 so that the spot area thereof becomes minimum at the center of cylindrical glass rod 10. Tubes and holders of the optical system 18 are not shown in figures, but each is supported on the chassis 1. The reference numeral 27 represents a screen for projecting images by outgoing rays which transmit through the cylindrical glass rod 10 from the incident optical system 18 and reflect on mirror 35. As explained in FIG.3, a y-axis is defined the direction of the central axis of the cylindrical glass rod 10. In order to harmonize, the y-axis takes axis of abscissa in the FIG.1. In case of the cylindrical glass rod 10 has layer structure, as shown in FIG.3, the "0" degree diffraction image is projected at an out point "e(x,y)" from the x-axis. "0" degree to "n" degree diffraction images is projected on the screen 27 by outgoing ray from the cylindrical glass rod 10. The most intensive image of the project images is the "0" degree diffraction image and "1" degree, "2" degree ... and "n" degree diffraction images become the decreasing intensity, respectively. In FIG.1, the reference numeral 29 represents is a video camera which observes projected images on the screen 27. The video camera 29 is placed on movable frame 30 which is driven by a screw driving system 24. The screw driving system 24 is connected to pulse motor 52 by bevel gears 34 and 28. The reference numeral 31 represent driving guide shafts. When the pulse motor 52 rotates, video camera 29 moves to the direction of the optical axis thereof. The video camera 29 connects to control portion 40 shown in FIG.2. In the control portion 40 of FIG.2, the reference numeral 41 represents a frame memory for storing data concerning to images on screen 27 which is observed by the video camera 29. The reference numeral 42 represents a linear arithmetic circuit for processing the stored data in the frame memory 41 to give binary values thereof and thus provide an approximate lineation by least square as the following formulae: coordinate (x i ,y i ), i=1 to m Thus, approximate lineation formula: y = a + bx can be obtained. Concerning to an example shown in FIG.4, approximate lineation 32 can be obtained from "0" degree diffraction image "e", "1" degree diffraction images "e₁" and "2" degree diffraction images "e₂". In FIG.2, the reference numeral 43 represents a position arithmetic circuit for determining an intersection of the approximate lineation obtained by the linear arithmetic circuit 42 and a plane which is perpendicular to the central axis of the cylindrical glass rod 10 and through which the incident ray passes. Concerning to the example shown in FIG.4, an intersection X of the approximate lineation 32 and the x-axis is calculated. In FIG.2, the reference numeral 44 represents a pulse counter which count pulses of a displacing distance of the cylindrical glass rod 10 to the direction of the x-axis by rotating of pulse motor 14. The reference numeral 45 represents an outgoing angle arithmetic circuit for calculating an outgoing angle Φ (t) from the intersection coordinate X and the displacing distance "t" by the following formula: Φ (t) = tan⁻¹(X/L) L is a distance from cylindrical glass rod 10 to screen 27 (See FIG.3). The reference numeral 46 represents a memory which respectively stores the outgoing angle Φ (t). The reference numeral 47 represents an index arithmetic circuit for calculating the refractive index distribution of the cylindrical glass rod 10 on the basis of the outgoing angle Φ (t) of the following relation: In this formula, "n₂" is a refractive index of matching oil 12 in cell 11; "r" is radial parameter from the center of the cylindrical glass rod 10, and "a" is the radius of the cylindrical glass rod 10. The reference numeral 48 represents an output means for the outgoing angle Φ (t) and/or the refractive index distribution n(r) of the cylindrical glass rod 10 comprising a display part and/or a recording part. The refractive index distribution of the cylindrical glass rod 10 can be determined as followings: The cylindrical glass rod 10 is set as shown in FIG.1 and then the pulse motor 14 starts of rotating to position the center of the cylindrical glass rod 10 to the optical axis of the optical system 18. In this positioning, an image projected on the screen 27 by a ray outgoing light transmitted through the cylindrical glass rod 10 is observed by the video camera 29 and then the signal of the image is transferred to the frame memory 41 to store therein. While displacing the cylindrical glass rod 10 to the x-axis (the radial direction thereof) by continuing to rotate the pulse motor 14, images of the outgoing ray on the screen 27 is observed by the video camera 29 and the image signal data are stored in the frame memory 41 in succession. If the cylindrical glass rod 10 has layer structure, projected image positions "e", "e₁" and "e₂" (See FIG. 4) of the outgoing ray far from the x-axis. Then the approximate lineation 32 is obtained by the linear arithmetic circuit 42 from image data in the frame memory 41. X-coordinate is calculated by the position arithmetic circuit 42 from the approximate lineation 32. The outgoing angleΦ (t) is calculated by the outgoing angle arithmetic circuit 45 from x-coordinate and distances "t" of displacing of the cylindrical glass rod 10 provided from the pulse counter 44 and then is stored in the memory 46. The outgoing angle Φ (t) is thus continuously stock into memory 46 while the distances "t" is changing by displacing of the cylindrical glass rod 10. The data of the outgoing Φ (t) is stored in memory 46 in succession. The stored data of the outgoing angle Φ (t) is displayed and/or printed out by the output means 48 while is inputted to the index arithmetic circuit 47. The refractive index distribution n(r) is calculated by the index arithmetic circuit 47 from the data of the outgoing angle Φ (t) and then is displayed and/or printed out by the output means 48. According to the foregoing procedures, there was determined the relation between the position at which a ray of light was made incident and the angle of the outgoing ray observed on a cylindrical glass rod 10 whose maximum refractive index of the core is "n₁" and the refractive index of the clad is "n₂" as shown in FIG.5. The results thus obtained are shown in FIG.6. There was not observed any marked variation in the angle Φ of the outgoing ray even if there were regions R₁ and R₂ of the cylindrical glass rod 10 in which a great deal of layer structure were present. The refractive index distribution n(r) was determined from these angles Φ of the outgoing ray and are found to be those shown in FIG.7. This measurement was repeated 30 times to calculate a specific refractive index difference defined by the following relation: Δ = (n₁ - n₂)× 100/n₁ The standard deviation σ of the specific refractive index difference Δ was calculated, and then was normalized with the specific refractive index difference Δ and thus the following relation was obtained: ( σ /Δ ) = 0.001 In order to compare with the above explained example, an outgoing angle Φ was provided from a position of an incident ray and x-coordinate obtained from only using of "0" degree diffraction image "e(x,y)". This comparative providing was performed by using the same cylindrical glass rod 10, used in the above explained example, having layer structure. It was difficult to correctly determine the angle Φ of the outgoing ray at regions R₁ and R₂ having great deal of layer structure as shown in FIG.8, in the result, this caused determined values errors. Calculated from such erroneous values of the outgoing angle Φ, the resulting refractive index distribution n(r) caused great variation at the portions of the cylindrical glass rod 10 within which great deal of layer structure were present as shown in FIG.9. Although the present invention has been described on the basis of the foregoing specific embodiments in which the projected images of the outgoing ray are observed by the screen 27 and the video camera 29, such observation can also be performed by using an image sensor and the same effect can be ensured. FIG.10 is a schematic plan view of an other embodiment than the above explained embodiment of the apparatus according to the present invention. In FIG.10, the reference numeral 50 represents an image pickup tube, the reference numeral 51 represents a movable table on which the image pickup tube 50 is placed. Since the movable table 51 is driven by a pulse motor 52 parallel to the direction of the optical axis of optical system 18, the image pickup tube 50 can be displaced to the same direction which means the direction of z-axis in FIG. 10. The reference numeral 53 represents a sensor for sensing the displacing distance of the image pickup tube 50 to the direction of z-axis. The reference numeral 54 represents a control circuit for controlling and calculating. FIG.10 shows only principal portions differing from shown in FIG.1, other details thus can see in FIG.1. FIG.11 shows a block diagram of control circuit 54 of the apparatus shown in FIG.10. In FIG.11, the reference numeral 56 represents a frame memory for storing the data from the image pickup tube 50. The reference numeral 57 represents a central processing unit for calculating outgoing angles Φ and refractive index distribution n(r) from the data in the frame memory 56 and then providing these data to output means 48. The central processing unit 57 also has a function for supplying driving signal to the pulse motor 52 from the data in the frame memory. The output means 48 is the same devices as shown in FIG.2. The apparatus for determining refractive index distribution shown in FIG.s 10 and 11 operates as followings: A ray of an incident light through incident optical system 18 from light source 17 impinges to the cylindrical glass rod 10 from the perpendicular direction to the central axis thereof and refracts in inner parts thereof to outgo therefrom. This outgoing ray shapes an image and the image can be observed by the image pickup tube 50. Image data observed by the image pickup tube 50 are stored in the frame memory 56. The image data are transferred to the central processing unit 57 from the frame memory 56. Outgoing angles Φ and refractive index distribution n (r) is calculated from the image data in the central processing unit 57 and transferred to the output means 48. While the outgoing angle Φ is calculated pulse motor 52 is driven by controlling of central processing unit 57 to displace the image pickup tube 50 on the movable table 51 so that the image pickup tube 50 can catch the images on the widest area thereof and does not cut off images on acceptable area thereof. Determination of refractive index distribution is utilized, data of all the positions of diffraction images on a plane, from the incident ray dispersed by the cylindrical glass rod during the ray passing therethrough, are performed linear approximation thereof; and the angle of the outgoing ray is calculated using the intersection of the approximate lineation and a plane through which the incident ray passes. Many data can be employed to calculated the angle of the outgoing ray. This substantially improve accuracy of measurement of the angle of the outgoing ray and further this makes it possible to determine the angle even if no image of the outgoing ray is present on the plane through which the incident ray passes.

Claims: A method for determining refractive index distribution of a cylindrical glass rod (10), whose refractive index (n) remains unchanged in its axial direction and varies along its radial direction, which comprises the following steps a) to g): a) making rays (b) of light incident into the cylindrical glass rod (10) from the direction perpendicular to the central axis of the cylindrical glass rod (10), b) measuring in a plane the position coordinates of diffraction images of "0" degree to "n" degree which are formed by an outgoing ray (d i ) transmitted through the cylindrical glass rod (10) from said incident ray (b), c) providing an approximate lineation from said position coordinates of the images, d) calculating an intersection point (Xc) of said approximate lineation and a plane which a perpendicular to the central axis of the cylindrical glass rod (10) and through which the incident ray (b) passes, e) displacing the cylindrical glass rod (10) in a radial direction thereof said direction being also perpendicular to the incident ray (b) direction, f) measuring the displacing distance (t) of the cylindrical glass rod (10), repeating steps b) to f) until the light in a) is no longer incident on the cylindrical glass rod (10) and g) determining the refractive index distribution (n(r)) of the cylindrical glass rod (10) from a function relating said intersection point (Xc) in the step d) to said displacing distance (t) in the step f). The method according to claim 1 comprising the following additional steps h) and i): h) calculating an angle (Φ) of the outgoing ray (d i ) from said intersection point (Xc) in the step d) and the distance between the cylindrical glas rod (10) and the plane containing the position coordinates; determining function relating said angle (Φ) to said displacing distance, i) determining the refractive index distribution (n(r)) of the cylindrical glass rod (10) from the function in step h). The method according to claim 1, wherein said intersection point (Xc) of the approximate lineation in step c) is provided by conversion of the position coordinates of the spots into binary values and least square of the binary values. An apparatus for determining refractive index distribution (n(r)) of a cylindrical glass rod (10), whose refractive index (n) remains unchanged in its axial direction and varies along its radial direction, which comprises the following means a) to d): a) an optical system (18) for minimizing spot areas of light rays from a light source (17) at the center of the cylindrical glass rod (10) and making the rays (b) of light incident upon the cylindrical glass rod (10) from the perpendicular direction to the central axis thereof, b) means (14) for displacing in parallel the cylindrical glass rod (10) in a radial direction thereof said direction being also perpendicular to the incident ray, c) means (29) for a image pickup to observe images formed by an outgoing ray (d i ) from the cylindrical glass rod (10) to transfer position coordinates and d) means (40) for calculating the refractive index distribution (n(r)) thereof from the displacing distances (t) by said means (14) for the displacing and said position coordinates, wherein said means (40) for calculating the refractive index distribution (n(r)) contains: an arithmetic circuit for calculating an approximate lineation from said position coordinates; an arithmetic circuit for calculating a coordinate of an intersection point (Xc) from said approximate lineation and a plane which a perpendicular to the central axis of the cylindrical glass rod (10) and through which the incident ray (b) passes; an arithmetic circuit for calculating an angle (Φ) of the outgoing ray (d i ) from said coordinate of the intersection point (Xc) and the distance between the cylindrical glass rod (10) and the plane containing the position coordinates; determining the function relating said angle (Φ) to said displacing distance (t), and an arithmetic circuit for calculating the refractive index distribution (n(r)) of the cylindrical glass rod (10) from said function. The apparatus according to claim 4, whrein said means (14) for displacing is a driving device having a pulse motor. The apparatus according to claim 4 further comprising a cell (11) filled with a liquid (12) having a refractive index the same approximate refractive index (n) of outer surface of the cylindrical glass rod (10) which is dipped in the cell (11). The apparatus according to claim 4, further comprising a screen (27) to project the shaped images, and wherein said means for the image pickup is a video camera (29). The apparatus according to claim 4, wherein said means (29) for the image pickup is placed on a table (30) which is movable parallel to the direction of an optical axis of the means (29) for the image pickup. The apparatus according to claim 4, wherein said means (29) for the image pickup is placed on a table (30) which is movable parallel to the direction of an optical axis of the means (29) for the image pickup and said means (40) for calculating the refractive index distribution (n(r)) containing: an arithmetic circuit for calculating an approximate lineation from said position coordinates; an arithmetic circuit for calculating a coordinate of an intersection point (Xc) from said approximate lineation and a plane which a perpendicular to the central axis of the cylindrical glass rod (10) and through which the incident ray (b) passes; an arithmetic circuit for calculating for an angle (Φ) of the outgoing ray (d i ) from said coordinate of the intersection point (Xc) and the distance between the cylindrical glass rod (10) and the plane containing the position coordinates; means for determining the function relating said angle (Φ) to said displacing distance (t), and an arithmetic circuit for calculating the refractive index distribution (n(r)) of the cylindrical glass rod (10) from said function.

Inventors: KOYA KAZUO FINE FUNCTIONAL MAT, SHIMADA TADAKATSU FINE FUNCTIO, SUZUKI TOSHIYUKI SHINETSU ENGI, YAMAGUCHI ICHIROU, KOYA, KAZUO, FINE FUNCTIONAL MATERIALS LAB., SHIMADA, TADAKATSU, FINE FUNCTIONAL MATERIALS LAB., SUZUKI, TOSHIYUKI, SHINETSU ENGINEERING CO., LTD., YAMAGUCHI, ICHIROU
Applicants: RIKAGAKU KENKYUSHO, SHINETSU CHEMICAL CO, SHIN-ETSU CHEMICAL CO., LTD.
Application year: 1990
Main classification: G01N21
IPC codes: G01N21