Thin-film soi mosfet and method of manufacturing thereof

Abstract: An MOS field effect transistor comprises a channel region (6) of a first conductivity type formed in a semiconductor layer (3) on an insulator substrate (2), a source region (8) and a drain region (9) of a second conductivity type formed in contact with one and the other sides of the channel region (6) in the semiconductor layer (3), respectively, a body region (7) formed in contact with at least a part of the channel region (6) and a part of a periphery of the source region (8) in the semiconductor layer (3) and having a higher impurity concentration than that of the channel region (6), a gate electric thin film (4) and a gate electrode (5) formed on the channel region (6), and a conductor (14a) connected in common to the source region (8) and the body region (7).

Description: The present invention relates generally to MOS (Metal-Oxide-Semiconductor) field effect transistors (referred to as "SOI-MOSFET" hereinafter) formed in semiconductor layers on insulator substrates, and more particularly, to SOI-MOSFET transistors having body regions for improving withstand voltage between source and drain, and for preventing a kink effect on a curve representing a relation between a drain voltage and a drain current. It also relates to manufacturing methods therefor. Fig. 16 is a plan view of a conventional SOI-MOSFET, and Figs. 17 and 18 are sectional views taken along a line I-I and a line J-J in Fig. 16, respectively. Referring to these drawings, an insulator layer 2 formed on a silicon substrate 1 and a silicon film is formed on the insulator layer 2. A channel region 6 having a low-concentration of p type impurity is formed in the silicon layer 3 surrounded by an isolation oxide film 10, and a source region 8 and a drain region 9 having a high-concentration of n type is formed in contact with one and the other sides of the channel region 6, respectively. In addition, in the silicon layer 3, a body region 27 having a high-concentration of p type impurity is formed in contact with one end of the elongate channel region 6 provided between the source region 8 and the drain region 9. A gate dielectric thin film 4 is formed on the channel region 6 and a gate electrode 5 is formed on the dielectric thin film 4. The silicon layer 3 and the gate electrode 5 are covered with an interlayer insulating film 11. Contact holes 13a, 13b, 13c and 13d are made in the interlayer insulating film 11, and conductors 15a, 15b, 15c and 15d are connected through the contact holes to the source region 8, the gate electrode 5, the drain region 9 and the body region 27, respectively . In the SOI-MOSFET structured as the foregoing, when a positive voltage is applied to the gate electrode 5, n type carriers (electrons) are induced in an upper partial layer of the p type channel region 6, thereby inverting the upper partial layer to the same n conductivity type as those of the source region 8 and the drain region 9, allowing a current to flow between the source region 8 and the drain region 9. In addition, since a concentration of the n type carriers induced in the upper partial layer is changed depending on a gate voltage, a current amount flowing through the channel region 6 can be controlled by the gate voltage. This is a principle of an operation of the MOSFET. When a voltage applied between the source region 8 and the drain region 9 is high, the carriers are accelerated to a high speed in the channel region 6. The carriers accelerated in the channel region 6 generate pairs of electron and hole near the drain region 9 due to impact ionization. Although the generated electrons flow into the n⁺ type drain region 9, the holes flow into the body region 27 having a higher concentration of p type impurity than that of the channel region 6 to be drawn out through the conductor 15d. More specifically, the body region 27 serves to remove the excessive holes generated by impact ionization from the channel region 6. In case no body region 27 is provided, when the silicon layer 3 is thick (for example about 500nm (5000Å)), there occurs unfavourable kink effect on a curve showing a relation between a drain voltage and a drain current. The kink effect is described in "IEEE Electron Device Letter, Vol. 9, No. 2, pp. 97-99, 1988. On the other hand, a thin film SOI-MOSFET having a silicon layer 3 so thin (for example, a thickness of 50-15-nm (500-1500Å)) that the whole channel region 6 becomes a depletion layer by an application of the gate voltage has excellent characteristics as compared with an SOI-MOSFET having a thick silicon layer 3. For example, in the thin film SOI-MOSFET, undesirable short channel effect is reduced and a leak current between source and drain is reduced. However, in case no body region 27 is provided in the thin film SOI-MOSFET, the holes generated by impact ionization are stored in the channel layer 6 which is completely depleted and has a high potential, so that the potential is further increased. Accordingly, an electrical barrier between the source region 8 and the channel region 6 is lowered, inducing a sudden injection of the electrons from the source region 8 into the channel region 6. As a result, the channel current is rapidly increased. More specifically, in general the thin film SOI-MOSFET generally has a considerably low withstand voltage between source and drain as compared with a general SOI-MOSFET. In case the body region 27 is provided in the thin film SOI-MOSFET, since the excessive holes stored in the channel region 6 can be removed, the withstand voltage between source and drain can be remarkably improved. In the conventional SOI-MOSFET shown in Fig. 16, however, the body region 27 occupies a considerable amount of a planar area of the silicon layer 3. More specifically, a conventional body region 27 makes it difficult to improve integration of an SOI-MOSFET circuit. Fig. 19. and Fig. 22 are plan views for explaining a method of manufacturing the SOI-MOSFET of Fig. 16. Figs. 20 and 21 are sectional views taken along a line K-K and a line L-L in Fig. 19, respectively. Figs. 23 and 24 are sectional views taken along a line M-M and a line N-N in Fig. 22, respectively. First, referring to Fig. 19 to Fig. 21, an insulator layer 2 is formed on a silicon substrate 1 and a silicon layer 3 having a low-concentration of p type impurity is formed on the insulator layer 2. The silicon layer 3 in which an SOI-MOSFET is to be formed is isolated as an island through formation of an isolation oxide film 10. Thereafter, a dielectric thin film and a conductor layer are deposited on the silicon layer 3, whereby gate dielectric thin film 4 and a gate electrode 5 are formed by etching using a photoresist pattern 20 as a mask. Furthermore, an area of the semiconductor layer 3 in which a body region 27 is to be formed is masked by a resist layer 29. By selectively implanting ions 30 of arsenic or phosphorus to a higher concentration (for example, 10¹⁸-10²⁰ atoms/cm³), using the resist layers 20 and 29 as masks, n⁺ type source region 8 and drain region 9 are formed. Now referring to Fig. 22 to Fig. 24, after the removal of the resist layers 20 and 29, the semiconductor layer 3 is covered with a resist layer 31, leaving only the area which will be the body region 27. By selectively implanting boron ions 32 to a higher concentration (for example, 10¹⁸-10²⁰ atoms/cm³), using the resist layer 31 as a mask, a p⁺ type body region 27 is formed. Thereafter the resist layer 31 is removed and the semiconductor layer 3 is covered with an interlayer insulating film 11. Contact holes 13a, 13b, 13c and 13d are made in the interlayer insulating film 11. By connecting through the contact holes conductors 15a, 15b, 15c and 15d to the source region 8, the gate electrode 5, the drain region 9 and the body region 27, respectively the conventional SOI-MOSFET shown in Fig. 16 to Fig. 18 is completed. As described in the foregoing, manufacturing a conventional SOI-MOSFET includes a several steps necessary only for forming the body region 27. More specifically, a conventional body region 27 makes a method of manufacturing SOI-MOSFET complicated. Brief mention is made that United States Patent No. 4,054,895 describes a silicon on sapphire mesa field effect transistor in which instabilities in the leakage current and threshold voltage are obviated by introducing dopant along the edge of the mesa, the doped edge region extending partially along sides of the channel region and extending fully across the side surfaces and end of the source region exposed at the edge of the mesa structure. Similarly prevention of these same parasitic effects has been considered in Japanese Published Patent Application No. 58-98969 and Patent Abstracts of Japan Vol 7, No. 200 (E-196) page 86. This is effected by providing a layer of metal silicide in a lower partial layer of both the source and the channel regions of a silicon on sapphire field effect transistor. There is also to be mentioned with reference to Article 54(3) EPC European Patent Application EP-A1-0304811 filed 19 August 1988 designating interalia the United Kingdom, France and Germany. This European patent application was published 1 March 1989 intermediate the dates of filing in Japan and in Europe. There is therein described p channel and n channel complementary SOI-MOSFET transistors in each of which there is provided ajoining one end of the source region a high doped end region of opposite conductivity type and a common contact to both source and end regions. A lower partial layer region of the transistor is subdivided into regions of mutually opposite conductivity type, that which is of the same type as the channel region being of higher conductivity than the channel region and extending beneath the channel region, source region and end region from an interface lying beneath the drain region of the transistor. In accordance with a first aspect of this invention there is provided an MOS field effect transistor comprising an insulator substrate; a semiconductor layer formed on said insulator substrate; a channel region of a first conductivity type formed in said semiconductor layer; a source region of a second conductivity type formed in said semiconductor layer being in contact with one end of said channel region; a drain region of the second conductivity type formed in said semiconductor layer being in contact with the other end of said channel region; a body region of the first conductivity type having a higher impurity concentration than that of said channel region and being formed in contact with at least a part of said channel region and at least a part of a periphery of said source region in said semiconductor layer; a gate dielectric thin film formed on said channel region; a gate electrode formed on said dielectric thin film; a first conductor connected in common to said source region and said body region; a second conductor connected to said gate electrode; and a third conductor connected to said drain region; which MOS field effect transistor is characterised in that: said body region surrounds said channel region, said source region and said drain region. In the transistor just defined the body region is distributed around the entire periphery of the transistor. An effective body area is produced without substantial increase in the dimensions of the planar area occupied by the transistor. The field effect transistor therefore is compatible with the requirements for high integration density. In accordance with a further aspect of the invention there is provided a method of manufacturing an MOS field effect transistor comprising the steps of: forming a semiconductor layer of a first conductivity type on an insulator substrate; masking a transistor region of said semiconductor layer with a mask; implanting ions of an impurity of the first conductivity type to produce a body region surrounding the periphery of said transistor region; forming a gate insulating film and a gate electrode after removal of said masking; forming a source region and a drain region by implanting ions of an impurity of a second conductivity type; covering said semiconductor layer and said gate electrode with an insulating film; forming a contact hole in said insulating film to expose both a part of said source region and a part of said body region; and forming a conductor in contact with said part of said source region and with said part of said body region. From the foregoing method it will be observed that the method of manufacturing the field effect transistor can be conducted requiring only a small number of simple steps and complexity is avoided. So that this invention might be better understood preferred embodiments thereof will now be described and reference will be made to the following drawings in which: Fig. 1 is a plan view showing an SOI-MOSFET according to one embodiment of the present invention; Fig. 2, Fig. 3 and Fig. 4 are sectional views taken along lines A-A, B-B and C-C in Fig. 1, respectively; Fig. 5A to Fig. 5F are sectional views for explaining a method of manufacturing such a SOI-MOSFET as shown in Fig. 1; Fig. 6A to Fig. 6C are sectional views for explaining modifications of the manufacturing method shown in Fig. 5A to Fig. 5F; Fig. 7 is a sectional view showing an SOI-MOSFET according to another embodiment of the present invention. Fig. 8A to Fig. 8D are sectional views for explaining a method of manufacturing such an SOI-MOSFET as shown in Fig. 7; Fig. 9 is a plan view showing an SOI-MOSFET according to a further embodiment of the present invention. Fig. 10 is a sectional view taken along a line G-G in Fig. 9; Fig. 11A and Fig. 11B are sectional views for explaining a method of manufacturing such an SOI-MOSFET as shown in Fig. 10; Fig. 12A and Fig. 12B are sectional views for explaining modifications of a method of manufacturing such a SOI-MOSFET as shown in Fig. 10; Fig. 13A to Fig. 13D are the sectional views for explaining a structure and a manufacturing method of another SOI-MOSFET of the present invention; Fig. 16 is a plan view showing a conventional SOI-MOSFET; Fig. 17 and Fig. 18 are sectional views taken along a line I-I and a line J-J in Fig. 16, respectively; Fig. 19 and Fig. 22 are plan views for explaining a method of manufacturing the conventional SOI-MOSFET shown in Fig. 16; Fig. 20 and Fig. 21 are sectional views taken along lines K-K and L-L in Fig. 19, respectively; and Fig. 23 and Fig. 24 are sectional views taken along lines M-M and N-N in Fig. 22, respectively. Fig. 1 is a plan view showing an SOI-MOSFET according to one embodiment of the present invention, Fig. 2, Fig. 3 and Fig. 4 are sectional views taken along lines A-A, B-B and C-C in Fig. 1, respectively. Referring to these figures, an insulator layer 2 is formed on a silicon substrate 1. A silicon film 3 is formed on the insulator layer 2. A channel region 6 comprising a low-concentration (for example, 10¹⁶-10¹⁷ atoms/cm³) of p type impurity (for example boron) is formed in the silicon layer 3 surrounded by an isolation oxide film 10, and a source region 8 and a drain region 9 comprising a high-concentration (for example, 10¹⁹-10²¹ atoms/cm³) of n type impurity (for example, arsenic, phosphorus or antimony) are formed in contact with one and the other sides of the channel region 6, respectively. An elongate body region 7 comprising a high-concentration (for example, 10¹⁷-10¹⁹ atoms/cm³) of p type impurity is formed in an inner periphery of the silicon layer 3 so as to surround the source region 8, the channel region 6 and the drain region 9. A thin gate dielectric film 4 is formed on the channel region 6 and a gate electrode 5 is formed on the dielectric thin film 4. The silicon layer 3 and the gate electrode 5 are covered with an interlayer insulating film 11. Contact holes 12a, 12b and 12c are made in the interlayer insulating film 11. A conductor 14a is connected in common to the source region 8 and the body region 7 through the contact hole 12a. Conductors 14b and 14c are connected to the gate electrode 5 and the drain region 9 through the contact holes 12b and 12c, respectively. Accordingly, in the SOI-MOSFET of Fig. 1, even if excessive holes are generated in the channel region 6 by impact ionization, the excessive holes can be absorbed in the body region 7 having a high-concentration of p type impurity, so that the absorbed excessive holes can be removed through the conductor 12a. In addition, in the SOI-MOSFET of Fig. 1, since the elongate body region 7 is provided surrounding the source region 8, the channel region 6 and the drain region 9, there is no need to provide an additional area only for the body region 27 in the conventional SOI-MOSFET shown in Fig. 15. Furthermore, the connecting conductor 14a to the source region 8 also serves as a connecting conductor to the body region 7 through the contact hole 12a. Accordingly, the SOI-MOSFET in Fig. 1 allows improvement of integration of a circuit. Fig. 5A to Fig. 5F are sectional views for explaining a method of manufacturing such an SOI-MOSFET as shown in Fig. 1. Referring to Fig. 5A, an insulator layer 2 is formed on a silicon substrate 1 and a silicon film 3 having a low-concentration of p type impurity is formed on the insulator layer 2. A silicon nitride film 16 is deposited on the silicon layer 3, and a resist pattern 17 is formed on the nitride film 16 by photolithography. Referring to Fig. 5B, the nitride film 16 is etched using the resist pattern 17 as a mask. Thereafter, ions of p type impurity are implanted in the silicon layer 3 using the resist layer 17 and the nitride film 16 as masks, thereby forming a body region 7 of a high-impurity concentration. Referring to Fig. 5C, the resist layer 17 is removed. Then, by selectively thermally oxidizing the silicon layer 3 using the silicon nitride film 16 as a mask, an isolation oxide film 10 is formed. At this time, an end portion of the isolation oxide film 10 becomes like a bird's beak. In addition, during the heat treatment, the p type impurity in the body region 7 diffuses in the silicon layer surrounded by the isolation oxide film 10, whereby an elongate body region 7 is disposed along an inner periphery of the isolation oxide film 10. Referring to Fig. 5D, after the removal of the silicon nitride film 16, a gate dielectric thin film 4 and a gate electrode 5 thereon are formed by patterning using a resist layer 20. Then, by selectively implanting n type impurity ions 19 to a higher concentration, using the resist layer 20 and the isolation oxide film 10 as masks, a source region 8 and a drain region 9 are simultaneously formed. At this time, the elongate body region 7 is left under the bird's beak at the end portions of the isolation oxide film 10. Referring to Fig. 5E, after the removal of the resist layer 20, the silicon layer 3 and the gate electrode 5 are covered with an interlayer insulating film 11. Contact holes 12a, 12c and the like are formed in the interlayer insulating film 11 in which conductors 14a and 14c are formed. Fig. 5F is a sectional view taken along a line D-D in Fig. 5E. As can be seen from the drawing, the contact hole 12a is formed so as to remove the bird's beak of the isolation oxide film 10, and the conductor 14a is connected not only to the source region 8 but also to the body region 7. Fig. 6A to 6C are sectional views showing a partly modified example of the manufacturing method shown in Fig. 5A to Fig. 5F. Referring to Fig. 6A, a part of the step shown in Fig. 5D is changed. More specifically, in Fig. 6A, a second resist pattern 21 is additionally formed so as to cover the body region extending a little further than a tip of the bird's beak of the isolation oxide film by thermal diffusion. Then, by selectively implanting the n type impurity ions 19 to a higher concentration using the first and the second resist patterns 20 and 21 as masks, the source region 8 and the drain region 9 are formed. According to the step of Fig. 6A, a width of the body region 7 can be left greater than that left by the step of Fig. 5D. Referring to Fig. 6B, thereafter an interlayer insulating film 11, conductors 14a and 14c and the like are formed, accomplishing an SOI-MOSFET. Fig. 6C is a sectional view taken along a line E-E in Fig. 6B. As is clear from the drawing, since the body region 7 extends further than the tip of the bird's beak of the isolation oxide film, the contact hole 12a need not remove the bird's beak. Fig. 7 is a sectional view showing an SOI-MOSFET according to embodiment of the present invention. Although the SOI-MOSFET of Fig. 7 is similar to that of Fig. 2, no isolation oxide film 10 is provided. More specifically, the silicon layer 3 itself is patterned as an island, and the interlayer insulating film 11 also serves as an isolation oxide film. Fig. 8A to Fig. 8D are sectional views for explaining a method of manufacturing such an SOI-MOSFET as shown in Fig. 7. Referring to Fig. 8A, what is formed on the silicon layer 3 is a patterned silicon oxide film 22. By implanting ions of the p type impurity to a higher concentration, using the resist layer (not shown) used for patterning the oxide film 22 itself as a mask, the body region 7 is formed. Then, after the removal of the resist layer, the body region 7 is extended under a peripheral portion of the oxide film 22 by thermal diffusion process in inert gas. Referring to Fig. 8B, the silicon layer 3 is etched into an island, using the silicon oxide film 22 as a mask. Thereafter, through a step similar to that shown in Fig. 6A, an SOI-MOSFET of Fig. 8C is accomplished. Fig. 8D is a sectional view taken along a line F-F in Fig. 8C. Also in this case, the conductor 14a is connected to the source region 8 and the body region 7 in common through the contact hole 12a formed in the interlayer insulating film 11. Fig. 9 is a plan view showing an SOI-MOSFET according to a further embodiment of the present invention, and Fig. 10 is a sectional view taken along a line G-G in Fig. 9. Although the SOI-MOSFET shown in Fig. 9 and Fig. 10 is similar to that shown in Fig. 1 and Fig. 2, a second body region 7a connected to the first body region 7 is additionally provided in the SOI-MOSFET shown in Figs. 9 and 10. The second body region 7a is formed adjacent and along a boundary of the source region 8 and in a lower partial layer of the channel region 6. Then, opposite ends of the second body region 7a in a longitudinal direction are united with the first body region 7. The second body region 7a can rapidly absorb and send the excessive holes generated in the channel layer 6 by impact ionization to the first body region. More specifically, in the SOI-MOSFET shown in Figs. 9 and 10, the excessive holes in the channel layer 6 can be more rapidly removed. The second body region 7a is provided only near a source interface because of the following reasons. That is, if the p⁺ type second body region is formed also adjacent to a boundary of the n⁺ type drain region 9, a junction withstand voltage of the drain region is decreased, followed by an decrease of a withstand voltage between source and drain. In addition, if the second body region is formed in a whole area of the lower partial layer of the channel region 6, the whole channel region can not be depleted by a gate voltage, so that characteristics of a transistor cannot be improved. Figs. 11A and 11B are sectional views for explaining a method of manufacturing such an SOI-MOSFET as shown in Fig. 10. Referring to Fig. 11A, the silicon nitride film 16 is removed after the steps shown in Fig. 5A to Fig. 5C. Then, in the semiconductor layer 3, an area which will be the drain region and a part of an area which will be the channel region are covered with a resist pattern 24a. Ions of p type impurity 25 are implanted to a higher concentration (for example, 10¹⁷-10¹⁹ atoms/cm³) in an lower partial layer portion 7a of the semiconductor layer 3, using the resist pattern 24a as a mask. Referring to Fig. 11B, ions of n type impurity 19 are implanted in the semiconductor layer 3, using the resist layers 20 and 21 as masks as in Fig. 6A, so that the source region 8 and the drain region 9 are formed. Then, after the removal of the resist layers 20 and 21, an interlayer insulating film 11 and conductors 12a and 12c and the like are formed, thereby accomplishing the SOI-MOSFET of Fig. 10. Fig. 12A and 12B are sectional views for explaining a modified example of a method of manufacturing such an SOI-MOSFET as shown in Fig. 10. Referring to Fig. 12A, after the step of Fig. 5D, the source region 9 is covered with a resist pattern 24b. Then, boron ions 25a are implanted in the lower partial layer of the source region 8 using the resist pattern 24b as a mask. As shown in Fig. 12B, since the boron has a very large diffusion coefficient in the silicon as compared with an n type impurity, a second body region 7a extending from the lower partial layer of the source region 8 into the channel region 6 can be formed by heat treatment. Thereafter, an interlayer insulating film 11 and conductors 12a and 12c and the like are formed, thereby accomplishing such a SOI-MOSFET as shown in Fig. 10. Fig. 13A to Fig. 13D are sectional views for explaining a structure and a manufacturing method of another SOI-MOSFET comprising a second body region. Referring to Fig. 13A, after the step of Fig. 5C, a gate dielectric thin film 4 and a gate electrode 5 are formed and an area which will be a drain region in the silicon layer 3 is covered with a resist pattern 24c. Ions of boron 25a are implanted in a lower partial layer 7a of an area which will be a source region in the silicon layer 3, using the resist pattern 24c as a mask. Referring to Fig. 13B, after the removal of the resist pattern 24c, by covering the first body region 7 with a resist pattern 21a and implanting ions of phosphorus 19a, an additional source region 8a and an additional drain region 9a of a low impurity concentration (for example, 10¹⁷-10¹⁸ atoms/cm³) are formed. Referring to Fig. 13C, a oxide film (not shown) is deposited so as to cover the silicon layer 3 and the gate electrode by CVD method after the removal of the resist pattern 21a. An insulator wall 50 is left on side walls of the gate electrode 5 by reactive ion etching of the deposited oxide film. Referring to Fig. 13D, the first region 7 is again covered with a resist pattern 21b. A source region 8 and a drain region 9 are formed by implanting arsenic ions 19b using the resist pattern 21b, the insulating wall 50 and the gate electrode 5 as masks. SOI-MOSFET thus formed comprises not only the second body region 7a but also an additional LDD (lightly doped drain) 9a. The LDD 9a attenuates an electric field near the drain, thereby contributing to reduction of the impact ionisation itself which generates excessive holes in the channel region 6. In the above described various embodiments, although description was given to the n channel type SOI-MOSFET, it will be apparent to those skilled in the art that the present invention can be applied to a p channel type SOI-MOSFET. In addition, it will be apparent that the silicon layer 3 may be other semiconductor layers. In addition, in the above described embodiments, although the ions are implanted using a resist pattern, and/or in a self-alignment manner, FIB (focused ion beam) method may be employed when a higher precision of ion implantation is desired. Furthermore, if an impurity concentration of the body region is not sufficient to form an ohmic contact with a metal conductor, the impurity concentration can be easily increased only in the region where the contact is formed, by the practitioners skilled in the art. Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitations, the scope of the present invention being limited only by the terms of the appended claims.

Claims: An MOS field effect transistor comprising: an insular substrate (2); a semiconductor layer (3) formed on said insulator substrate (2); a channel region (6) of a first conductivity type formed in said semiconductor layer (3); a source region (8) of a second conductivity type formed in said semiconductor layer (3) being in contact with one end of said channel region (6); a drain region (9) of the second conductivity type formed in said semiconductor layer (3) being in contact with the other end of said channel region (6); a body region (7) of the first conductivity type having a higher impurity concentration than that of said channel region (6) and being formed in contact with at least a part of said channel region (6) and at least a part of a periphery of said source region (8) in said semiconductor layer (3); a gate dielectric thin film (4) formed on said channel region (6); a gate electrode (5) formed on said dielectric thin film (4); a first conductor (14a) connected in common to said source region (8) and said body region (7); a second conductor (14b) connected to said gate electrode (5); and a third conductor (14c) connected to said drain region (9); which MOS field effect transistor is characterised in that: said body region (7) surrounds said channel region (6), said source region (8) and said drain region (9). A transistor according to claim 1, wherein an extended portion (7a) of said body region is provided which extends along a boundary between said channel region (6) and said source region (8) in a lower partial layer of said channel region (6). A transistor according to either one of the preceding claims wherein at least said drain region (9) has a lighter doped portion (9a), which portion (9a) is in contact with said other end of said channel region (6). A method of manufacturing an MOS field effect transistor comprising the steps of: (a) forming a semiconductor layer (3) of a first conductivity type on an insulator substrate (2); (b) masking a transistor region of said semiconductor layer (3) with a mask (16); (c) implanting ions of an impurity (18) of the first conductivity type to produce a body region (7) surrounding the periphery of said transistor region; (d) forming a gate insulating film (4) and a gate electrode (5) after removal of said masking (16); (e) forming a source region (8) and a drain region (9) by implanting ions of an impurity (19) of a second conductivity type; (f) covering said semiconductor layer (3) and said gate electrode (5) with an insulating film (11); (g) forming a contact hole (12a) in said insulating film (11) to expose both a part of said source region (8) and a part of said body region (7); and (h) forming a conductor (14a) in contact with said part of said source region (8) and with said part of said body region (7). A method as claimed in claim 4 wherein said semiconductor layer (3) is of silicon. A method as claimed in either of claims 4 or 6 wherein following step (c) and preceding step (d) the following steps are performed: (i) heating said semiconductor layer (3) in an inert atmosphere to diffuse said impurity (18) inwards into said transistor region, so that said body region (7) extends under a peripheral portion of said mask (16); and (j) etching that region of said semiconductor layer (3) exposed at the periphery of the mask to form an island. A method as claimed in claim 5 wherein following step (c) and preceding step (d) the following step is performed: (k) heating said semiconductor layer (3) in an oxidizing atmosphere to diffuse said impurity (18) inwards into said transistor region, so that said body region (7) extends under a peripheral portion of said mask (16), and to form a film (10) of field oxide insulation surrounding said body region (7). A method as claimed in claim 7 wherein following step (k) and after removal of said mask (16) preceding step (d) the following steps are performed: (l) forming a second mask (24a) to cover a first region of said transistor region which in step (e) is to be formed as said drain region (9) and part of a channel region (6), which part is adjacent to said drain region (9); and (m) implanting ions of an impurity of said first conductivity type in a lower partial layer (7a) of a remaining second region of said transistor region which in step (e) is to be formed as said source region (8) and part of said channel region (6), which part is adjacent to said source region (8). A method as claimed in claim 7 wherein said semiconductor layer is p-type and between steps (e) and (f) the following steps are performed: (n) implanting ions of a p-type impurity in a lower partial layer of said source region (8); and (o) diffusing said p-type impurity into a part of a channel region (6) which is adjacent to said source region (8), by heating in an inert atmosphere. A method as claimed in claim 7 wherein between steps (d) and (e) the following steps are performed: (p) implanting ions of an impurity (25a) of a second conductivity type in a lower partial layer (7a) of a region (8) of said transistor region which in step (e) is to be formed as said source region (8); (q) forming a source layer (8a) and a drain layer (9a) of low impurity concentration by implanting ions of an impurity (19a) of the second conductivity type into an upper portion layer of said semiconductor layer (3); and (r) forming a sidewall spacer (50) each side of side gate electrode (5). A method as claimed in any one of claims 7 to 10 wherein: said body region (7) is masked during implantation of impurity of the second conductivity type in step (e) or in steps (e) and (p).

Inventors: NISHIMURA TADASHI C O MITSUBIS, YAMAGUCHI YASUO C O MITSUBISHI, NISHIMURA, TADASHI C/O MITSUBISHI DENKI K.K., YAMAGUCHI, YASUO C/O MITSUBISHI DENKI K.K.
Applicants: MITSUBISHI ELECTRIC CORP, MITSUBISHI DENKI KABUSHIKI KAISHA
Application year: 1989
Main classification: H01L29
IPC codes: H01L29, H01L21