Lateral conductivity modulated MOSFET

Abstract: A lateral conductivity modulated MOSFET comprises a semiconductor wafer (1, 2), a first-conductivity type base layer (7a, 7b) selectively formed in a surface region of the semiconductor wafer, a second-conductivity type source layer (9) selectively formed in a surface region of the first-conductivity type base layer, a second-conductivity type base layer (3, 4) selectively formed in the semiconductor wafer, a first-conductivity type drain layer (8) formed in a surface region of the second-conductivity type base layer, a gate insulation film (5) formed on that surface portion of the first-­ conductivity type base layer which is sandwiched between the source layer and the second-conductivity type base layer, a gate electrode (6) formed on the gate insula­ tion film, a source electrode (10) in contact with both the source layer and the first-conductivity type base layer, and a drain electrode (11) in contact with the drain layer. A second-conductivity type cathode layer (13, 14) is formed in a surface region of the semicon­ ductor wafer in such a manner that it is located adja­ cent to the second-conductivity type base layer. A cathode electrode (15) is in contact with the cathode layer and is kept at the same potential level as that of the drain electrode.

Description: The present invention relates to a lateral conductivity modulated MOSFET wherein a drain, a source, and a gate are formed on one surface of a semiconductor wafer. A lateral conductivity modulated MOSFET which utilizes conductivity modulation caused by electrons and holes accumulated in a drift layer is disclosed in M. Darwish et al. "Lateral Resurfed COMFET." Electronics Letters . 7th June 1984, Vol. 20 No. 12, pp. 519-520. In this type of lateral conductivity modulated MOSFET, carriers accumulated in an n-type base layer must be swiftly eliminated, so as to increase the switching speed at the time of turn-off operation. If the electrons do not swiftly move from the n-type base layer to the drain layer, a pnp transistor constituted by a p-type drain layer, an n-type base layer and p-type base layer operates. As a result, a large amount of tail current flows through the conductivity modulated MOSFET, thus lengthening the turn-off interval. One of the methods of achieving a speedy turn-off operation is to shorten the life of the carriers in the n-type base layer. Although this method improves the turn-off characteristic, it undesirably raises the ON-state voltage of the element. In the case where a conductivity modulated MOSFET is employed in an inverter circuit of a motor driving circuit, a diode is connected to the MOSFET in the backward direction and in parallel thereto, as is shown in Fig. 1. The reason for connecting the diode in this fashion is to regenerate the energy stored in the inductance component of the motor. However, such connection of the diode results in an increase in the size of the device and an increase in the manufacturing cost of the device. To solve these problems, an anode-short structure is proposed. This structure is disclosed in, e.g., M.R. Simpson et al. "Analysis of the Lateral Insulated Gate Transistor". IEDM 85 . pp 740-743. Anode-shorted MOSFETs are also known from GB-A-2 197 987 or IEEE Electron Device Letters, Vol. 9, No. 9, September 1988, pp. 450-452. If the anode-short structure is employed, carriers accumulated in the n-type base layer are efficiently expelled through the anode-short portion during turn-off operation, so that a high-speed switching operation can be obtained. Moreover, a device employing the anode-short structure naturally incorporates a circuit equivalent to the diode shown in Fig. 1. Therefore, it is not necessary to externally connect a diode to the conductivity modulated MOSFET. However, if the anode-short structure is employed, holes cannot be efficiently injected from the p-type drain layer into the n-type base layer. Since, therefore, the advantageous effects of conductivity modulation cannot be sufficiently obtained, the ON-state voltage of the MOSFET is undesirably raised. For satisfactory conductivity modulation, the lateral resistance of the n-type base layer located below the drain layer should be increased. To be more specific, the following measures should be taken: (1) To widen the p⁺-type drain layer extending to the anode-short portion; (2) To reduce the impurity concentration in the n-type base layer; and (3) to thin the n-type base layer located below the p⁺-type drain layer. However, if measure (1) is taken, the element area of the conductivity modulated MOSFET will be increased. Likewise, if measure (2) or (3) is taken, the breakdown voltage of the conductivity modulated MOSFET will be lowered. As may be understood from the above, if a conventional conductivity modulated MOSFET employs an anode-short structure, the switching characteristic at the time of turn-off operation can be improved, but the ON-state voltage is inevitably raised. In order to employ the anode-short structure without raising the ON-state voltage, either an increase in the element area or a decrease in the breakdown voltage of the device is inevitable. EP-A-0 228 107 describes a lateral conductivity modulated MOSFET in which a surface-adjoining region surrounding an anode and a surface-adjoining drain region have the same conductivity type and are formed in an epitaxial surface layer, also of the same conductivity type. The first object of the present invention is to provide a lateral conductivity modulated MOSFET which is free of the problems arising from the incorporation of an anode-short structure. The second object of the present invention is to provide a lateral conductivity modulated MOSFET which has a low ON-state voltage and exhibits a high-speed turn-off characteristic. To attain these objects, the present invention provides a lateral conductivity modulated MOSFET wherein a first conductivity type drain layer is formed in a second conductivity type base layer, and second-conductivity type cathode layer is formed adjacent to the second-conductivity type base layer. The cathode layer is isolated from the second-conductivity type base layer by a pn junction, and is in contact with a cathode electrode whose potential is the same as that of a drain electrode. The present invention also provides a particular embodiment of the lateral conductivity modulated MOSFET wherein a second gate electrode is formed, with a gate insulation film interposed, on that surface portion of the second-conductivity type base layer which is sandwiched between the drain layer and the wafer region. The present invention now provides a lateral conductivity modulated MOSFET as set out in claim 1. Particular embodiments of the invention are disclosed in the dependent claims. In the MOSFET of the present invention, a substantial anode-short structure is not formed until a large amount of current flows through the MOSFET. Let it be assumed that the first and second-conductivity types are p-type and n-type respectively, and that the n-type cathode layer is located adjacent to the n-type base layer. When, in this case, the element is turned on, the electrons injected from the n-type source layer into the n-type base layer are absorbed in the p-type drain layer as long as the electrons are not injected in large quantities. At this time, holes are injected from the drain layer into the n-type base layer, so that conductivity modulation occurs. When the current increases and the electrons are injected in large quantities, the holes injected from the p-type drain layer to the n-type base layer are crowded out of the n-type base layer and are stored in the wafer. When a great deal of holes are stored in the wafer, electrons are injected from the n-type base layer into the wafer. At the time of turn-off operation, these electrons are easily expelled from the wafer into the cathode layer, which is at the same potential level as that of the drain layer. In the MOSFET of the invention, therefore, a substantial anode-short structure is formed when a large amount of electrons are injected. In addition, the ON-state voltage is low, and the turn-off characteristic is satisfactory. In connection with the MOSFET of the invention, it should be noted that the n-type base layer and the n-type cathode layer are isolated from each other by a pn junction. Therefore, unlike the case of a conventional conductivity modulated MOSFET incorporating an anode-short structure, the size of the element need not be increased, and the breakdown voltage does not lower. Moreover, a pn junction diode is equivalently formed between the n-type cathode layer and the p-type base layer in such a manner that it is connected to the conductivity modulated MOSFET in the backward direction and in parallel thereto. Therefore, the conductivity modulated MOSFET of the present invention has a reverse conduction function as well. In a particular embodiment of the MOSFET of the invention, a channel is formed in the surface region of the second base layer by applying a bias to the second gate electrode at the time of turn-on operation. As a result of the formation of the channel, a sufficient amount of carriers can be injected from the drain layer to the wafer region. In spite of the anode-short structure, therefore, the carrier injection efficiency does not lower at the time of turn-on operation, and thus the ON-state voltage is not raised. Therefore, the particular embodiment of the MOSFET of the present invention achieves both a low ON-state voltage and a satisfactory turn-off characteristic. Other objects and advantages will be apparent from the following description taken in conjunction with the accompanying drawings in which: Fig. 1 is an equivalent circuit diagram regarding a diode which is connected to a conventional conductivity modulated MOSFET in the backward direction and in parallel thereto; Fig. 2 is a sectional view of a lateral conductivity modulated MOSFET according to the first embodiment of the present invention; Fig. 3 is a sectional view of a lateral conductivity modulated MOSFET according to the second embodiment of the present invention; Fig. 4 is a sectional view of a lateral conductivity modulated MOSFET according to the third embodiment of the present invention; Fig. 5 is a sectional view of a lateral conductivity modulated MOSFET according to the fourth embodiment of the present invention; Fig. 6 is a plan view of a lateral conductivity modulated MOSFET according to the fifth embodiment of the present invention; Fig. 7 is a sectional view taken along line VIII-VIII in Fig. 6; Fig. 8 is a plan view of a lateral conductivity modulated MOSFET according to the sixth embodiment of the present invention; Fig. 9 is a plan view of a lateral conductivity modulated MOSFET according to the seventh embodiment of the present invention; Fig. 10 is a sectional view taken along line XI-XI in Fig. 9; Fig. 11 is a plan view of a lateral conductivity modulated MOSFET according to the eighth embodiment of the present invention; Fig. 12 is a plan view of a lateral conductivity modulated MOSFET according to the ninth embodiment of the present invention; Fig. 13 is a sectional view of one possible modification of the first to ninth embodiments of the present invention; Fig. 14 is a sectional view of a lateral conductivity modulated MOSFET according to the tenth embodiment of the present invention; Fig. 15 is a sectional view of a lateral conductivity modulated MOSFET; and Fig. 16 is a sectional view of a lateral conductivity modulated MOSFET according to the eleventh embodiment of the present invention. A conductivity modulated MOSFET according to the first embodiment of the present invention may now be described, with reference to Fig. 2. First of all, a wafer made up of silicon substrate 1 and p⁻-type layer 2 epitaxially grown on silicon substrate 1 is prepared. Silicon substrate 1 may be a p⁺-type, an n⁺-type, or an n⁻-type. P-type base layer 7 is selectively formed in a surface region of p⁻-type layer 2. N⁺-type source layer 9 is selectively formed in a surface region of p-type base layer 7. N⁻-type high-resistance base layer 4 (i.e., a drift layer) and n-type low-resistance base layer 3 (i.e., a buffer layer) are formed in a surface region of p⁻-type layer 2 such that they are located adjacent to p-type base layer 7. N⁻-type drift layer 4 is connected to both p-type base layer 7 and n-type buffer layer 3. P⁺-type drain layer 8 is formed in a surface region of n-type buffer layer 3. That portion of p-type base layer 7 which is sandwiched between n⁺-type source layer 9 and n⁻-type drift layer 4 functions as a channel region. On this channel region, gate insulation film 5 is formed, and gate electrode 6 is formed on gate insulation film 5. Source electrode 10 is in contact with both source layer 9 and base layer 7. Drain electrode 11 is in contact with p⁺-type drain layer 8. N-type cathode layer 13 is selectively formed in a surface region of p⁻-type layer 2. N-type cathode layer 13 and p-type base layer 7 are formed in such a manner as to sandwich n-type buffer layer 3, but n-type cathode layer 13 is isolated from n-type buffer layer 3 by p⁻-type layer 2. N⁺-type layer 14 is formed in a surface region of n-type cathode layer 13, and cathode electrode 15 is in ohmic contact with n⁺-type layer 14. Cathode electrode 15 and drain electrode 11 are connected to each other, so that they are at the same potential level. The fundamental operation of the above conductivity modulated MOSFET will be described. To turn on the conductivity modulated MOSFET, a bias which is positive with reference to the potential of source electrode 10 is applied to gate electrode 6. As a result of the application of this bias, the channel region in the surface region of p-type base layer 7 is inverted in polarity, whereby electrons are injected from source layer 9 into n⁻-type drift layer 4. When this electron current is injected via n-type buffer layer 3 into p-type drain layer 8, the pn junction formed by n-type buffer layer 3 and p-type drain layer 8 is biased in the forward direction. Therefore, holes are injected from p-type drain layer 8 into n⁻-type drift layer 4 through n-type buffer layer 3. As a result of this hole injection, conductivity modulation occurs in n⁻-type drift layer 4. Since the conductivity modulation substantially reduces the resistance of n⁻-type drift layer 4, a low ON-state voltage is obtained. When a large amount of current flows through the MOSFET, the holes injected from p-type drain layer 8 are crowded out of both n-type buffer layer 3 and n⁻-type drift layer 4, and are therefore stored in p⁻-type layer 2. Since, therefore, the electrons in n-type buffer layer 3 are also injected into p⁻-type layer 2, conductivity modulation occurs in p⁻-type layer 2 as well. When gate electrode 6 is applied with a bias which is negative or zero with reference to the potential of source electrode 10, the channel inversion layer located below gate electrode 6 is lost. Therefore, the electron injection from source layer 9 is stopped. As a result, the conductivity modulated MOSFET is turned off. In the element of the first embodiment, n-type cathode layer 13 is located in the surface region of p⁻-type layer 2, the electrons accumulated in p⁻-type layer 2 are swiftly expelled from the MOSFET through n-type cathode layer 13 during turn-off operation. In other words, the element of the first embodiment operates as if it had an anode-short structure, and thus the switching speed at the turn-off operation is high. When the element of the first embodiment is turned on, it operates in a similar way to that of a conventional element. Since the element of the first embodiment does not incur an increase in the element area or a decrease in the break-down voltage, which problems have hi.therto arisen by the provision of an anode-short structure, it is possible to obtain a low ON-state voltage. When the element of the present invention is turned off, n-type cathode layer 13 functions as a substantial anode-short structure. Therefore, a high-speed turn-off characteristic is obtained. In the first embodiment, the diode constituted by p-type base layer 7, p⁻-type layer 2, and n-type cathode layer 13 is connected to the conductivity modulated MOSFET in the backward direction and in parailel thereto. Therefore, the MOSFET, achieves a reverse conduction function, with no need to employ an external-connected diode. Other embodiments of the invention may now be described. In the descriptions below, the portions corresponding to those of the first embodiment will be referred to by use of the same reference numerals, and a detailed explanation of them will be omitted. First, the second embodiment of the present invention will be described, with reference to Fig. 3. In the second embodiment, insulation film 16 is formed between an edge of p⁺-type layer 8 and an edge of n⁺-type layer 14 in such a manner that n-type buffer layer 3, p⁻-type layer 2 and n-type cathode layer 13 are covered with insulation film 16. Conductor 100, serving as both drain electrode 11 and cathode electrode 15, is formed on insulation film 16. Fig. 4 shows the third embodiment of the present invention. In this embodiment, n⁻-type drift layer 4 is not in contact with p-type base layer 7; it is located slightly isolated from p-type base layer 7. Figure 5 shows the fourth embodiment of the present invention. This embodiment employs a wafer which is divided into two parts by a dielectric material. The part illustrated as being above oxide film 18 in Fig. 6 constitutes a first silicon substrate, while the part illustrated as being below oxide film 18 constitutes a second silicon substrate 21. The surfaces of the first and second silicon substrates are specularly polished. Oxide film 18, serving as an insulation film, is interposed between the specularly-polished surfaces of the first and second silicon substrates. With oxide film 18 interposed, the first and second silicon substrates are formed to be integral with each other by use of the direct bonding technique. The first silicon substrate has a groove used for forming an element separation region. Oxide film 19 is formed on the inner wall of the groove, and the polycrystalline silicon film 20 is formed in the groove in such a manner as to fill the groove. This type of wafer, which has two parts isolated by a dielectric, may be also formed by burying single-crystal silicon into a polycrystalline silicon substrate. With respect to the embodiments mentioned below, both the layout and sectional structure of the conductivity modulated MOSFETs of the present invention are illustrated in the accompanying drawings. Figs. 6 and 7 show the fifth embodiment of the present invention. The conductivity modulated MOSFET of the fifth embodiment is obtained by modifying the second embodiment for practical use. In the fifth embodiment, gate electrode 6 is formed in the form of an elongated ring. On the inner side of gate electrode 6, p-type drain layer 8 is formed in the form of an elongated ring. On the outer side of gate electrode 6, n-type source layer 9 is formed in the form of an elongated ring. N-type cathode layer 13 is formed like an island and is surrounded by drain layer 8. It should be noted that the element shown in Figs. 6 and 7 is one of the unit elements arranged in a stripe pattern. In other words, a plurality of unit elements, each having the structure shown in Figs. 6 and 7, are arranged in a conductivity modulated MOSFET actually used. Fig. 8 shows the sixth embodiment of the present invention. This embodiment is obtained by modifying the fifth embodiment shown in Figs. 6 and 7, and employs a plurality of cathode layers 13a, 13b ... located in the region surrounded by drain layer 8. Figs. 9 and 10 show the seventh embodiment of the present invention. In this embodiment, the relationship between the drain and source is just the opposite to that of the fifth embodiment shown in Figs. 6 and 7. Specifically, n-type source layer 9 and n-type cathode layer 13 are located inside and outside of p-type drain layer 8 formed in the form of an elongated ring, respectively. Fig. 11 shows the eighth embodiment of the present invention. It is obtained by modifying the seventh embodiment shown in Figs. 9 and 10. In the eighth embodiment, a unit element made up of source layer 9, drain layer 8 and gate layer 6 and formed like an elongated ring is located in the center of the wafer. N-type cathode layer 13 is formed only in the straight portions located outside of the unit element. Fig. 12 shows the ninth embodiment of the present invention. It is obtained by further modifying the eighth embodiment shown in Fig. 11, and employs a plurality of cathode layers 13a, 13b, 13c and 13d arranged around the unit element. The advantages of the fifth to ninth embodiments (Figs. 6 to 12) are similar to those of the first to fourth embodiments mentioned above. The foregoing embodiments can be modified in various manners. Fig. 13 shows one example of such modifications. As is shown in Fig. 13, an element of the present invention may be formed in region A of a wafer, with a conventional element formed in region B of the wafer. In addition, the semiconductor wafer need not be limited to an epitaxially-grown wafer; it may be either an FZ wafer or a CZ wafer. Further, the respective layers may have opposite conductivity types to those mentioned above. Fig. 14 shows the tenth embodiment of the present invention. This embodiment is similar to the first embodiment shown in Fig. 2, expect that first gate electrode 6 and second gate electrode 23 are formed. First gate electrode 6 is formed on the surface of p-type base layer 7, with gate insulation film 5 interposed. Second gate electrode 23 is formed on the wafer surface portion located between drain layer 8 and cathode layer 14, with gate insulation film 22 interposed. The specific pattern of this structure can be designed such that it becomes similar to the pattern shown in Fig. 6 or 8. The tenth embodiment may be modified by covering the surface of second gate electrode 23 with an insulation film and by mounting integrally-formed drain and cathode electrodes 11 and 15 over the insulation film formed on second gate electrode 23. The fundamental operation of the conductivity modulated MOSFET of the tenth embodiment is similar to that of the first embodiment shown in Fig. 2. To turn on the conductivity modulated MOSFET of the tenth embodiment, second gate electrode 23 is applied with a voltage which is negative with reference to the voltage applied to the drain electrode. As a result of the application of this voltage, that surface region of n-type buffer layer 3 which is located below second gate electrode 23 is inverted in polarity, thus forming a channel. As a result, holes are injected from drain layer 8 directly to p--type layer 2. Since, therefore, the conductivity modulation effect is improved, it is possible to further lower the ON-state voltage. To turn off the MOSFET, second gate electrode 23 is applied with a positive or zero voltage. Fig. 15 shows a conductivity modulated MOSFET which differs fundamentally from those of the foregoing embodiments, in that it employs an anode-short structure provided for drain layer 8. More specifically, part of drain electrode 11 is formed as short-circuit portion 24 in contact with n-type buffer layer 3. The MOSFET employs no cathode layer, and second gate electrode 23 is formed on that surface portion of n-type buffer layer 3 which is sandwiched between drain layer 8 and p--type layer 2, with gate insulation film 22 interposed. A double-gate conductivity modulated MOSFET is known from Extended Abstracts of the 20th International Conference on Solid State Devices and Materials, Tokyo, 1988, pp. 33-36. To turn on the conductivity modulated MOSFET, a negative bias is applied to second gate electrode 23, as in the tenth embodiment shown in Fig. 14. As a result of the application of this bias, holes are injected from drain layer 8 into p--type layer 2, through the channel region formed in that surface region of n-type buffer layer 3 which is located below second gate electrode 23. Therefore, the conductivity modulation effect is remarkable. The reverse conduction function of the device is achieved by the pn junction diode constituted by n-type buffer layer 3, n⁻-type drift layer 4 and p-type base layer 7. In the conductivity modulated MOSFET shown in Fig. 15, the problem entailed by the use of an anode-short structure (i.e., a decrease in the rate of the hole injection from a drain layer) is solved in a different fashion from that of the first embodiment. Fig. 16 shows the eleventh embodiment of the present invention. This embodiment is a combination of the MOSFETs which are shown in Figs. 14 and 15, respectively. The advantages of the eleventh embodiment are similar to those of the foregoing embodiments, though explanation of the operation of the eleventh embodiment is omitted.

Claims: A lateral conductivity modulated MOSFET, comprising: a semiconductor wafer having a major surface, comprising a semiconductor layer (2) of a first conductivity type; a first-conductivity type base layer (7a, 7b) disposed in a first surface region of said semiconductor layer (2); a second-conductivity type source layer (9) disposed in a surface region of said first-conductivity type base layer (7a, 7b); a second-conductivity type base layer (3, 4) disposed in a second surface region of said semiconductor layer (2); a first-conductivity type drain layer (8) disposed in a surface region of said second-conductivity type base layer (3, 4); a gate insulation film (5) disposed on that surface portion of the semiconductor wafer which is located between said source layer (9) and said second-conductivity type base layer (3, 4); a gate electrode (6) disposed on said gate insulation film (5); a source electrode (10) in contact with both said source layer (9) and said first-conductivity type base layer (7a, 7b); a drain electrode (11) in contact with said drain layer (8); a second-conductivity type layer (13, 14) disposed in a third surface region of said semiconductor layer (2), whereby a pn junction diode is formed between the first-conductivity base layer (7a, 7b) and said second-conductivity type layer (13,14), said second-conductivity type layer (13,14) being located adjacent to said second-conductivity type base layer (3,4) and separated from said second-conductivity type base layer (3,4) by a portion of said semiconductor layer (2), whereby said second-conductivity type layer (13, 14) is isolated from said second-conductivity base layer (3, 4); and a further electrode (15) in contact with said second-conductivity type layer (13, 14), said further electrode (15) being in electrical contact with said drain electrode (11), whereby said further electrode (15) can be kept in use at the same potential level as that of said drain electrode (11). A lateral conductivity modulated MOSFET according to claim 1, characterised by: another gate insulation film (22) disposed on that surface portion of the second-conductivity type base layer (3, 4) which is located between said drain layer (8) and said portion of said semiconductor layer (2) separating said second-conductivity type layer (13,14) from said second-conductivity base layer (3, 4); and another gate electrode (23) disposed on said another gate insulation film (22). A lateral conductivity modulated MOSFET according to claim 1, characterised in that said drain electrode (11) is in contact with both said drain layer (8) and said second-conductivity type base layer (3, 4). A lateral conductivity modulated MOSFET according to claim 1, characterised in that an insulation film (16) extends between the surface of said drain layer (8) and the surface of said second-conducitvity type layer (13,14), said drain electrode (11) and said further electrode (15) being integral with each other and disposed on said insulation film (16). A lateral conductivity modulated MOSFET according to any of claims 1-3, characterised in that said semiconductor wafer comprises a semiconductor substrate (21), said semiconductor layer (2) being formed above said semiconductor substrate (21) and isolated by a dielectric layer (18, 19) from said semiconductor substrate (21). A lateral conductivity modulated MOSFET according to any of claims 1-3, characterised in that said gate electrode (6) is disposed above said major surface of said semiconductor wafer and is in the form of a first ring as seen from above said major surface, said source layer is located at an outer periphery of a projection of the first ring onto said semiconductor wafer, said drain layer (8) is in the form of a second ring and is located inside of said projection of the first ring, and said second-conductivity type layer (13, 14) is located inside of said drain layer (8). A lateral conductivity modulated MOSFET according to any of claims 1-3, characterised in that said gate electrode (6) is disposed above said major surface of said semiconductor wafer and is in the form of a first ring as seen from above said major surface, said source layer (8) is located at an inner periphery of a projection of the first ring onto said semiconductor wafer, said drain layer (8) is located outside of said projection of the first ring, and said second-conductivity type layer (13,14) is located outside of said drain layer (8). A lateral conductivity modulated MOSFET according to claim 2, or claim 7 when dependent on claims 2 or 3, characterised in that an insulation film is disposed on the surface of said another gate electrode (23), said drain electrode (11) and said further electrode (15) being integral with each other and disposed on said insulation film.

Inventors: NAKAGAWA AKIO, WATANABE KIMINORI, YAMAGUCHI YOSHIHIRO, NAKAGAWA, AKIO, WATANABE, KIMINORI, YAMAGUCHI, YOSHIHIRO, NAKAGAWA, AKIO C/O INTELLECTUAL PROP. DIV., WATANABE, KIMINORI C/O INTELLECTUAL PROP. DIV., YAMAGUCHI, YOSHIHIRO C/O INTELLECTUAL PROP. DIV.
Applicants: TOSHIBA KK, KABUSHIKI KAISHA TOSHIBA
Application year: 1989
Main classification: H01L29
IPC codes: H01L29