INVERTER

Abstract: An inverter which performs switching operation that corresponds to a single frequency in response to drive signals (VGS1 to VGS4). An inductance element (L) is connected between output terminals so that it may provide parallel resonance with the total equivalent capacitance, which is the sum of the equivalent capacitance of the inverter (Q1 to Q4) viewed from the terminals and the equivalent capacitance of a load (LO). This makes it possible to decrease charge-discharge losses of capacitances (Coss1 to Coss4) in the source and drain.

Description: INVERTER DEVICE Technical Field The present invention relates to an inverter device, and more particularly, to an inverter device which includes a MOS (metal-oxide-semiconductor) transistor, more generally, a MIS (metal-insulator-semiconductor) transistor, connected in series between a d.c. power input and a load and in which the MOS transistor is driven by a drive signal having a single frequency by which d.c. power is converted into a.c. power. The device according to the invention can be used, e.g., for a high-frequency power supply of an RF (radio frequency) pumping CO₂ (carbonic acid gas) laser device or a high-frequency induction heating power supply. Background Art It is generally known that, in inverter devices of the above-mentioned type, an equivalent output capacitance C OSS exists between the drain and the source of the MOS transistor. This output capacitance is a parasitic capacitance produced when the transistor is manufactured, and is the main cause of a power drop occurring during a high-frequency operation. Namely, an electric current which charges and discharges the output capacitance flows at each switching of the MOS transistor and is consumed by the on-state resistance of the transistor, whereby the loss increases in proportion to the frequency. Furthermore, a maximum electric power that can be input to the invertor is restricted by the peak value of a voltage applied to the source and drain of the transistor during operation. That is, the input power is limited to less than the maximum rated voltage of the transistor. EP-A-0285674 discloses an invertor employing MIS transistors. JP-A-52116831 discloses a transistor invertor with variable operation frequency. The present invention has been created in view of the above problem that a sufficient output power cannot be obtained during high-frequency operation since the allowable input power and the output efficiency of the device are low, and an object of the invention is to provide a high-power inverter device having an improved input power and efficiency but still satisfactorily practical. According to the present invention, there is provided an inverter device including: input terminals for d.c. voltage input; output terminals connected to a load; an inductance element connected in series between at least one of the input terminals and a d.c. input power supply; and at least one transistor connected in series between the input terminal and the output terminals and carrying out a switching action in response to a drive signal having a single frequency; characterised by: the at least one transistor being of the MIS type; a capacitor connected in parallel with the output terminals; and, an inductance element connected in parallel with the output terminals and capable of a parallel resonance with a total equivalent capacitance which is the sum of an equivalent electrostatic capacitance of the inverter device, as observed from the output terminals toward an input side, an equivalent electrostatic capacitance of the load, and the capacitance of the capacitor. According to the present invention, there is also provided a inverter device including: input terminals for d.c. voltage input; output terminals connected to a load; an inductance element connected in series between at least one of the input terminals and a d.c. input power supply; and at least one transistor connected in series between the input terminal and the output terminals and carrying out a switching action in response to a drive signal having a single frequency; characterised by: the at least one transistor being of the MIS type a capacitance element connected in parallel with the MIS transistor between the source and drain thereof, and wherein the inductance element is capable of a parallel resonance with an equivalent output capacitance between the output terminals including the capacitance of the capacitance element. Namely, a resonant circuit having a relatively large constant which allows the influence of various stray impedances to be neglected is provided in the device, to thereby control the output voltage waveform and provide the following effects. First, the source-drain voltage when the transistor is switched is minimized (≒ 0), to thereby reduce the charge/discharge loss due to the capacitance C OSS between the source and the drain and thus improve the efficiency. Second, the output voltage waveform is reduced until it has a small peak value relative to the mean value of the source-drain voltage, i.e., a small crest factor, whereby the means input voltage value (≒ input d.c voltage) is increased to thus permit an increase of the input electric power. FIG. 1 is a circuit diagram showing a first embodiment of the present invention; FIG. 2 is a circuit diagram showing a second embodiment of the present invention; FIG. 3 is an equivalent circuit diagram of an inverter device in which impedances within the circuit are concentrate at a load end; FIG. 4 is a chart showing a voltage and current across the load; FIG. 5 is a chart showing changes of an output voltage waveform with respect to L, C, and R; and FIG. 6 is a chart showing the relationship between k and a loss rate. Embodiments of the present invention will be described with reference to the drawings. First, the theory of the present invention will be described for a better understanding thereof. To control the output voltage waveform as desired, an inverter must be driven by a constant current, and therefore, an inductance (RFC) is inserted between at least one of the input terminals of the inverter and a d.c. power supply. In this case, the output voltage waveform is determined by the input current waveform (a rectangular wave produced by the switching of d.c. current by the inverter), a load, and the impedances in the circuit. Figure 3 shows an equivalent circuit of an inverter device, the circuit impedance of which (including C OSS ) is concentrated at a load end. In the figure, RFC denotes a choke coil, and Q1 to Q4 denote switching elements for which, in practice, transistors are used. As indicated by L, R, and C, impedances in the inverter circuit are equivalently concentrated at a load end; C includes the source-drain capacitance C OSS ; I denotes an input current; and v(t) denotes a voltage at the output terminal. Figure 4 shows the voltage across the load and the waveform of the current flowing to the entire load. The voltage v(t) across the load is also applied across the MOS transistors which are in an off state, and accordingly, the waveform of the source-drain voltage of the MOS transistors is approximately identical to that of the output voltage. According to studies by the inventors, the output voltage waveform can be approximately expressed by the following formulae: ζ = (1/2R)· L/C ω n = 1/ LC where I: input d.c. current value 1 = ζ² = K² When ζ < 1, v₀(t) = (ILω n /K)e(-ζω n t)·sinKω n t when ζ = 1, v₀(t) = ILω n ²e(-ω n t) and when ζ > 1, v₀(t) = (ILω n /K)e(-ζω n t)·sinh(Kω n t) where t is in the range of 0 ≦ t ≦ (1/2f) provided t = 0 at the rise time of the rectangular current wave, and thus there is a repetition of a general impulse response waveform of a secondary factor. As is clear from the above formulae (1), (2) and (3), by suitably selecting the values of L, C and R, it is possible to change the output voltage waveform to a great extent. The voltage value after a half-period from the inversion of the current waveform due to the switching of the transistors can be expressed as V₀(τ), by using the aforesaid v₀(t), where τ = 1/2f. In this case, the energy accumulated in the C OSS of the transistors which are in an off state is ΔE = (N/2)C OSS v²(τ) which is consumed in the transistors when they are next turned on. At this time, a current flows to the transistors, which have been made on to charge the C OSS thereof to an equal voltage level, and thus a loss occurs. This energy is similarly given by ΔE = (N/2)C OSS v²(τ) Accordingly, the overall loss of the circuit at each switching is E = 2 × (ΔE + ΔE) = 2NC OSS v²(τ) Since the loss occurs twice in each period, then the total loss Pℓ is Pℓ = 4NfC OSS v²(τ) where N is the number of MOS transistors connected in parallel. As is clear from this formula, by reducing the source-drain voltage v(τ) when switching the transistors to 0, Pℓ can be made zero. From the formula (1) this condition is given by ζ < 1 and 1 - ζ² ω n t = π ∴ τ = 1/2f then 1 - ζ² fn = f Figure 5 shows changes of the output voltage waveform with respect to L, C and R, wherein the above conditions are fulfilled. The input power is equal for each waveform, and thus the smaller the value ζ, the smaller the peak voltage value of the waveform, and accordingly, the input electric power can be increased. The limit is ζ = 0 where the waveform is a sine wave. This means R = ∞, and electric power cannot be supplied to the load. Therefore, in practice, ζ is set to a relatively small value. According to experiments, when ζ = 0.3, the waveform can be regarded almost as a sine wave, and a large increase in the input electric power ensured. As seen from the above, the optimum values for L, C, and R can be obtained from ζ ≦ 0.3 and 1 - ζ² fn = f Unrealistically the condition is expressed using the equality sign, and thus an allowable range must be provided. Generally, to ensure the efficiency of the inverter, about 80% is permissible. In this case, a permissible range for the difference of the switching timing, i.e., the difference between the intrinsic frequency 1 - ζ² fn of the waveform and the switching frequency f , is obtained. The output power P O obtainable at load R is expressed as follows, using the formula (1), P O = (1/τ)∫(1/R)v²(t)dt (0 ≦ t ≦ ζ) From the formula (7), the value of the loss is at a maximum when a total C is given by C OSS , then where 2NC OSS = C, Pℓ = 2fCv²(τ) and if the loss rate ξ is defined as a reciprocal of the efficiency, ξ = (Pℓ/P O ) then ξ is a function of only ζ and k = 1 - ζ² fn/f Figure 6 shows the relationship between k and the loss rate. Since k is an index of the above-mentioned frequency difference, k and the loss rate ξ are plotted along the axes of abscissa and ordinate, respectively. Under the condition ζ = 0.3, 0.75 ≦ k ≦ 1.25 ξ ≦ 0.2 Therefore, under the conditions ζ ≦ 0.3 0.75f ≦ 1 - ζ² fn ≦ 1.25f ζ = (1/2R)( L/C ) fn = 1/2π LC a practical maximum output can be obtained. Figure 1 shows a first embodiment of the present invention. In the figure, a d.c. power supply Es is applied to the input terminals. RFC denotes a choke coil, and Q1, Q2, Q3 and Q4 denote N-channel MOS transistors, to thereby constitute an inverter circuit. Gate signals V GS1 , V GS2 , V GS3 and V GS4 are respectively applied to the gates of the transistors. Note, V GS1 and V GS4 are the same signal and V GS2 and V GS3 are the same signal. When the transistors Q1 and Q4 are simultaneously turned on a forward current flows through a load LO, and when the transistors Q2 and Q3 are turned on, a reverse current flows through the load LO. The frequency of the current flowing through the load LO is determined by the frequencies of the gate signals V GS1 , etc. CO SS1 , C OSS2 , C OSS3 , and C OSS4 represent the drain-source output capacitances of the transistors Q1, Q2, Q3, and Q4, respectively, and L represents the inductance selected to be in a parallel resonance with the impedance, as observed from the inverter side of the load LO, to fulfil the aforesaid formulae (15). LO denotes the load, which may be a laser tube of a high-frequency pumping CO₂ laser, a high frequency heat furnace, or the like. The net resistance value of the load is R. When the formulae (15) are not fulfilled, a capacitor C′ is connected in parallel with the inductance L, to thereby fulfil the formulae (15). Figure 2 shows a second embodiment similar to the first embodiment, but in this embodiment, capacitors C1 to C4 are connected between the source and drain of the respective transistors Q1 to Q4. Namely, since the influence of the stray impedance in the inverter circuit is large, a resonance is obtained between both ends of each transistor; if not, the waveforms at both ends of the transistors will not be improved. Instead of adding the capacitors C1, etc. to the respective transistors, the number of parallel connections of the transistors may be changed to adjust the impedance so as to fulfil the resonance condition. As described above, according to the present invention, the parallel resonance condition of a current inverter is adjusted to optimize the output voltage waveform, permit an increase in the input electric power, and minimize the loss, whereby the output power of the inverter is remarkably increased.

Claims: An inverter device including: input terminals for d.c. voltage input; output terminals connected to a load (L₀); an inductance element (RFC) connected in series between at least one of the input terminals and a d.c. input power supply; and at least one transistor (Q1,Q2,Q3,Q4) connected in series between the input terminal and the output terminals and carrying out a switching action in response to a drive signal having a single frequency; characterised by: the at least one transistor (Q1,Q2,Q3,Q4) being of the MIS type; a capacitor (C′) connected in parallel with the output terminals; and, an inductance element (L) connected in parallel with the output terminals and capable of a parallel resonance with a total equivalent capacitance which is the sum of an equivalent electrostatic capacitance of the inverter device, as observed from the output terminals toward an input side, an equivalent electrostatic capacitance of the load, and the capacitance of the capacitor (C′). A inverter device including: input terminals for d.c. voltage input; output terminals connected to a load (L₀); an inductance element (RFC) connected in series between at least one of the input terminals and a d.c. input power supply; and at least one transistor (Q1,Q2,Q3,Q4) connected in series between the input terminal and the output terminals and carrying out a switching action in response to a drive signal having a single frequency; characterised by: the at least one transistor (Q1,Q2,Q3,Q4) being of the MIS type a capacitance element (C1,C2,C3,C4) connected in parallel with the MIS transistor (Q1,Q2,Q3,Q4) between the source and drain thereof, and wherein the inductance element is capable of a parallel resonance with an equivalent output capacitance between the output terminals including the capacitance of the capacitance element. The inverter device according to claim 1 or claim 2, wherein the following relationships: ζ = (1/2R) L/C′ fn = 1/(2π LC′ ) ζ ≦ 0.3 0.75f ≦ 1-ζ² fn ≦ 1.25f stand, where R is the net parallel resistance value between the output terminals including the load, C′ is the capacitance, L is the inductance, and fn is the operating frequency. The invertor device according to claim 1, wherein the MIS transistor includes a plurality of parallel connected MIS transistors functioning as one switching element, and the relationship of N = C′/2C OSS stands, where N is the number of parallel connections of the transistors, C OSS is the source-drain capacitance of the transistor, and C′ is the capacitance.

Inventors: EGAWA AKIRA FANUC MANSION HARI, EGAWA, AKIRA FANUC MANSION HARIMOMI 3-303
Applicants: FANUC LTD, FANUC LTD.
Application year: 1989
Main classification: H02M7
IPC codes: H02M7