OPTICAL MEASURING APPARATUS AND METHOD

Abstract: A heterodyne interferometer to achieve simultaneous and independent measurements of amplitude and phase includes a beam splitting device (BS) which splits of the incident light beam into two parts with equal amplitudes and an angular deviation ( alpha ) imposes two unequal frequency shifts (f1) and (f2) on the two beams and amplitude modulates the two beams in phase quadrature at frequency (fs). The two beams emerging from the beam splitter (BS) are focused by a lens (L1) normally on to the surface of an object O. Upon reflection from the object surface, the two beams traverse through the lens and beam splitter a second time, where they are recombined. Both the frequencies and the amplitudes of the two beams will be shifted (or modulated) again after the second passage. The recombined beam is then diverted towards a photodetector (PD) via the beamsplitter.

Description: OPTICAL MEASURING APPARATUS AND METHOD This invention relates to optical measuring apparatus and methods and, 1n particular, to scanning optical profllometers for the simultaneous measurement of amplitude and phase variation during the measurement of a surface. A scanning optical pro ilometer has distinct advantages over contact methods such as the stylus probe which can be difficult to operate. In addition optical techniques allow the possibility for remote measurement and are consequently more flexible 1n their usage. Conventional optical profllometers, however, lack sensitivity: they rely on interfering two light beams which follow separate paths and thus are susceptible to mechanical vibrations. One method to overcome this problem 1s by operating an optical profilometer in the differential mode. Such systems respond to the variation instead of the absolute phase of the returning light beam. Differential optical profilo eters have been shown to have a phase sensitivity of 3xl0~ 3 mrad in a lKHz bandwidth (equivalent to 1.5xl0~ s A in the context of topography). We have devised a new technique which 1n addition to monitoring phase variation, allows the simultaneous measurement of the differential of the amplitude of the reflected light. This may be related to the reflectivity of an object. The sensitivity for this mode of operation 1s similar to existing systems, which is 3 in 10 5 a lKHz bandwidth. According to the present invention there 1s provided optical apparatus for measuring the topographical properties of a surface comprising means for splitting a beam of radiation into two component beams, means for focussing said two component beams on to a surface under test, means for recombining said two component beams after reflection from said surface to cause interference between said two component beams and means for measuring the differential of at least one parameter of the Interference products of said two component beams. The Invention will now be particularly described with reference to the accompanying drawings, in which:- Figure 1 is a schematic diagram illustrating the principle of the Invention Figure 2 1s a more detailed schematic diagram Illustrating a practical embodiment Figure 3 depicts differential optical phase and amplitude line traces across an etched silicon wafer, and Figure 4 depicts differential optical phase and amplitude line traces across a partly ion-implanted silicon wafer Referring now to the drawings, we use a heterodyne interferometer to achieve simultaneous and Independent measurements of amplitude and phase. The principle of the system is outlined in Figure 1. The main component is the beam splitting device, BS which has the following properties: 1) splitting of the Incident light beam Into two parts with equal amplitudes and an angular deviation, α; 1i) opposing two unequal frequency shifts f 1 and f 2 on the two beams; 111) amplitude modulation of the two beams in phase quadrature at frequency f s . The two beams emerging from the beam splitter BS are focused by a lens LI normally on to the surface of an object 0. The lens LI 1s positioned in the system so that the point of apparent splitting F is at the back, focal point of the lens LI and the object is at its front focal plane. The two beams will then focus normally on to the object with the distance between the two focal spots determined by the value and the focal length of the lens. Upon reflection from the object surface " , the two beams traverse through the lens and beam splitter a second time, where they are recombined. Both the frequencies and the amplitudes of the two beams will be shifted (or modulated) again after the second passage. The recombined beam is then diverted towards a photodetector PD via the beamsplitter. After the first passage through the beam splitter BS the states of the two beams can be written as B χ = A sin(ω s t ) exp{-jC ( ω 0 + ω χ )t +Φ χ ]} <D B 2 - A sin(ω s t) exp{-jC(ω 0 + ω 2 )t +φ 2 ]} ( 2 ) where A is the amplitudes of the beams, ω 0 is the optical frequency, ω x and ω 2 are the frequency shifts of the two beams, and φ x and φ 2 represent the average optical path lengths. After reflection from the object surface, both the amplitudes and the phases of the beams are modified by the object structure. The beams, 1n front of the photodetector, can then be written as B χ - Ar χ sin 2 (ω s t) exp{-j[(ω 0 + 2ω χ )t + φ χ + θ χ ]} (3) B 2 = Ar 2 COS 2 (ω s t) exp{-j[(ω 0 + 2ω 2 )t + φ 2 + θ 2 ]} (4) where r x and r 2 are the reflection coefficients of the object ( at the two foci) and Q χ and θ 2 are the phase changes Imposed on the light beams by the object. The output I 0 from the photodiode is proportional to the intensity of the detected beams. Therefore I 0 =- ξ(B χ + B 2 )(B χ + B 2 )* (5) where ξ 1s a proportionality constant and * denotes the complex conjugate of the field. By substituting (3) and (4) into (5), we obtain the output from the photodiode I 0 as I 0 = ( - 3 <r x 2 + r 2 2 ) + - ] (r x 2 + r 2 2 ) cos(2ω s t) 8 2 1 + - A 2 (r 2 + r 2 ) cos<4ω ς t) 8 1 + - A 2 r,r 2 cos ( 2ωkt + δφ + δθ ) 4 1 A 2 r χ r 2 C0S(4ω s t ) C0S(2ω b t + δφ + δθ) (6) where ω^ ω χ - ω 2 , δθ = θ x - θ 2 , δφ = φ x - φ 2 . The photodetector output therefore contains a number of frequency components. The two important ones are those at frequencies 2f s and 2f jj . The amplitude of the first one (second term in (6)) is proportional to r χ - r 2 which is the difference in reflectivities of the two neighbouring points on the object surface. The phase of the second one (fourth term in (6)) contains the phase Imposed on the light beams by the object. The differential phase/amplitude Information of the object can therefore be obtained by detecting these two signals. After reflection off the sample, now with modified amplitude and phase, they pass back through BS and the Interference between the two beams 1s detected by a photodiode. The output current is proportional to the intensity of the detected light and the resulting signal contains several frequency components of which two are of interest. The differential amplitude response is at frequency 2f s and takes the form, A(r ι 2 ~ r 2 2> cos ( 2ω s t ) ( 7 ) where A is a constant and r 1 ,r 2 are the reflectivities experienced by each beam on the sample surface. The differential phase result is at frequency 2(f χ -f 2 ) and is, Br 1 r 2 cos {2(ω χ - ω 2 )t + δθ + δφ} (8 ) where δθ is the phase difference between each returning beam due to the object, and B and δφ are constants. The differential amplitude (r^ -r 2 2 ) and differential phase (δθ) information may be related to the surface topography and reflectivity variation. In a specific embodiment (Figure 2), the beam splitter is replaced by a Bragg cell BC, which is set up so that the incoming laser light is split into the first and zeroth order. By applying a triangularly modulated drive signal, the Bragg cell amplitude modulates the two beams in phase quadrature. Two detectors D1,D2 are used for the amplitude and phase measurements Instead of the one PD shown 1n Figure 1. In the present system we use a He-Ne laser of wavelength 632.8nm, a beam separation on the sample surface of 0.4mm and a focused beam diameter of 40μm. The system was used to examine two samples, one with almost pure topography and the second with primarily reflectivity detail. Figure 3 shows differential phase and amplitude line traces across a silicon wafer the surface of which has been active-plasma-etched to produce a series of parallel tracks as shown in Figure 3(a). The nominal step heights are 180A, 300A, 400A, 550A, and 700A which were configured by using mechanical stylus to within +10%. The differential phase result (Figure 3(b)) shows not only peaks corresponding to the edges of the etched tracks, but also an overall phase change across the wafer which is due to warp of the wafer. This background phase variation has been subtracted to produce the trace 3(c). The heights of the peaks at the edges of each track are related to the track depths. Their measured values are shown in Table 1. The discrepancies between the values measured by using the stylus probe and the optical system can be due to the tilt of the sample relative to the incident light beams, the separation of the two beams and the rather large focal spot size. The width of each peak is 0.4mm., which is the separation of the two interrogating beams. It can be seen that within some etched areas there is more differential phase contrast and this 1s caused by the rough surface left by the etchant. Figure 3(d) shows the differential amplitude result. The differential amplitude contrast for this sample is caused by scattering of light from discontinuities on the sample surface. For this reason, there are differential amplitude responses in the etched regions (due to surface roughness) and at the edges of tracks. Some of the variation is attributable to scratches and dust on the sample surface. The response of a differential system to a point object (phase or amplitude) is a dipole with the pole separation corresponding to the distance between the two interrogating beams. The response to a step structure is the integral of the point response. This is a 'top hat' with its width corresponding to the separation of the two probing beams. Figure 4 shows the differential phase and amplitude line traces across a silicon wafer half of which is Implanted with As + at a doping level of 10 15 ions/cm 2 (Figure 4(a)). In Figure 4 ( b ) 1t can be seen that any differential phase contrast due to a modification of the refractive index in the implanted region is less than that caused by the roughness of the wafer surface. Again a wafer warp can be seen to exist. The Interface between the implanted and non-implanted sides is readily seen from the differential amplitude result 1n Figure 4(c). Also, the dc level of the differential amplitude 1s different on either side of the interface. This is not a real differential amplitude result and 1s caused by imperfect modulation by the Bragg cell. Referring to Figures 3 and 4, the differential amplitude results consistently show more contrast due to small features than on the phase results. This contrast is caused by scattering. The simultaneous acquisition of phase and amplitude information enables one to see features on samples which would otherwise show little contrast in an amplitude or phase only system. Another advantage of our system lies in the possibility of eliminating certain ambiguities that arise in metrology applications. A topographically smooth surface may give phase variations due to material differences. The availability of the modulus of the reflection coefficient, i.e. differential amplitude signal, distinguishes between the two cases where the phase response may be due to changes in material reflectivity or topography. In some extreme situations the phase of the complex reflection coefficient may change whilst the modulus remains constant. To eliminate this ambiguity, a different optical wavelength may be employed to further interrogate the sample. As can be seen from the line trace 4(c), there are disadvantages associated with this particular system implementation. The differential amplitude part of the system is not optimised. This is due to an unequal depth of modulation of the two beams emerging from the Bragg cell and results in a signal which has the form A(r χ 2 - r χ 2 ) + B(r χ 2 - r χ 2 ) where A and B are constants. Hence the line trace comprises true differential amplitude response superposition over an SOM response. The situation is worse if the amplitude result is taken from detector Dl (Figure 2). If the amplitudes of the two beams are equal, the value of B is zero. In an alternative embodiment, instead of using the zeroth and first order light beams, the Bragg cell is driven by two signals with frequencies close to the Bragg frequency and the sample is examined by the two first order beams. It 1s possible for these two beams to have equal amplitude. Furthermore, by changing the frequency difference of the two drive signals, the angular separation and hence lateral spacing of the two beams can be varied. Applications of this invention include measurements of film thickness, reflectivity variation and surface flatness of samples such as a semiconductor wafer. In some applications a beam separation on the object surface may be desirable. Another application of the invention is in accurate line width metrology. In addition this technique is Ideal for producing high contrast gauges of objects which possess small scale structural variation such as biological tissues. This will require the two focal spots to be close in order to improve lateral resolution, and can be easily achieved by the second implementation of this technique. Tabl e 1 . Step heights measured by using stylus probe and differential optical phase Step Step height by stylus 180 310 310 430 430 530 530 700 probe (A) Diff. phase 0.32 0.65 0.60 0.84 0.97 1.15 1.21 1.42 (radians) Corresp step height (A) 163 326 302 424 490 579 609 713

Claims: Claims 1. Optical apparatus for measuring the topographical properties of a surface comprising means for splitting a beam of radiation into two component beams, means for focussing said two component beams on to a surface under test, means for recomblning said two component beams after reflection from said surface to cause Interference between said two component beams and means for measuring the differential of at least one parameter of the Interference products of said two component beams. 2. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 1 characterised in that a beam splitting device, BS is adapted to split an incident light beam Into two component beams with equal amplitudes and an angular deviation α, to impose two unequal frequency shifts f χ and f 2 on the two component beams and amplitude modulate the two component beams In phase quadrature at frequency f s . 3. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 2 characterised 1n that the two component beams emerging from the beam splitter BS are focused by a lens LI normally on to the surface of an object 0. 4. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 3 characterised in that the lens LI is positioned 1n the system so that the point of apparent splitting F Is at the back focal point of the lens LI and the object is at its front focal plane to focus the two component beams normally on to an object so that upon reflection from the object surface, the two beams traverse through the lens and beam splitter a second time, where they are recombined. 5.- Optical apparatus for measuring the topographical properties of a surface as claimed in claim 4 characterised in that after reflection off the object and passage through the beam splitter BS, interference between the two component beams is detected by a photodiode. 6. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 1 characterised in that a Bragg cell BC, is set up so that an incoming beam of radiation is split Into two component beams which are modulated in phase quadrature, the subsequent amplitude and phase of which are monitored by a pair of detectors D1,D2. 7. Optical apparatus for measuring the topographical properties of a surface as claimed 1n claim 6 characterised In that the incoming beam of radiation is split into the first and zeroth order. 8.. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 1 characterised in that a helium-neon laser is used as radiation source. 9. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 1 characterised in that means are provided to further Interrogate the sample with radiation of a different wavelength. 10. Optical apparatus for measuring the topographical properties of a surface as claimed in claim 6 characterised in that the Bragg cell is driven by two signals with frequencies close to the Bragg frequency and the sample is examined by the two first order beams.

Inventors: SEE CHUNG WAH, VAEZ-IRAVANI MEDHI, SEE, CHUNG, WAH, VAEZ-IRAVANI, MEDHI
Applicants: NAT RES DEV, NATIONAL RESEARCH DEVELOPMENT CORPORATION
Application year: 1989
Main classification: G01B11
IPC codes: G01B9, G01B11, G01J9