Multistep planarized chemical vapor deposition process

Abstract: An improved planarization process is disclosed which comprises depositing over a patterned integrated circuit structure (2) on a semiconductor wafer (10) a conformal insulation layer (20) by ECR plasma deposition of an insulation materia. The ECR plasma deposition is carried out until the trenches or low regions between adjacent raised portions of the structure are completely filled with insulation material. A planarization layer (30) of a low melting glass material, such as a boron oxide glass, is then formed over the integrated circuit structure (2) to a depth or thickness sufficient to cover the highest portions of the ECR plasma deposited insulation layer (20). This planarization layer (30) is then anisotropically etched back sufficiently to provide a planarized surface on the ECR plasma deposited insulation layer. A further layer (40) of insulation material may then be conventionally CVD deposited over the planarized ECR plasma deposited insulation layer (30) which acts to encapsulate any remaining portions of the planarizing layer (30).

Description: Background of the Invention 1. Field of the Invention This invention relates to a planarization process for integrated circuit structures. More particularly, this invention relates to a planarization process which utilizes an initial ECR plasma deposition to achieve a high density vertical deposition of a conformal insulation layer with a high aspect ratio; a low melting inorganic planarization material to planarize the ECR plasma deposited layer; and an optional CVD layer applied over the planarized ECR plasma layer. 2. Description of the Related Art In the formation of integrated circuit structures, patterning of layers to permit formation, on a substrate, of active devices such as transistors, passive devices such as resistors, and metal lines to interconnect devices, can result in the formation of uneven surfaces. Conventionally, a layer of insulating material such as silicon oxide is applied over such uneven surfaces, to permit the formation of further patterned layers thereover. However, the silicon oxide tends to conform to the underlying topography resulting in the creation of a nonplanar or stepped surface. It is very difficult to pattern further layers over such an uneven surface using standard lithography techniques. It has, therefore, become the customary practice to apply planarizing layers of either photoresist or organic-based glass materials, such as "SOG" (Spin On Glass) which will etch at about the same rate as the underlying silicon oxide insulating layer. The structure is then anisotropically etched to remove the planarizing layer, as well as raised portions of the underlying silicon oxide layer. However, both photoresist and SOG have what is called a loading effect. This means that the etch rate of these materials depends upon how much of the insulating layer, e.g., the silicon oxide layer, is exposed. Thus, achieving an equal etch rate of both insulating material (silicon oxide) and the sacrificial or planarizing material is very difficult and the etch rate is, therefore, dependent upon the geometry of the structure. Furthermore, when the spaces between raised portions are less than about 1.5 microns, the spinning process of applying either of these two planarizing materials is not effective. The above described planarizing materials also have limited step coverage and are limited with respect to the total amount of thickness of these materials which can be deposited. Furthermore, since these planarizing materials are dispersed in organic binders and solvents, prior to application of such planarizing materials, the integrated circuit structure must be removed from a vacuum chamber in which the insulating layer such as silicon oxide is deposited, e.g., by CVD methods, in order to coat the structure with the planarizing layer. After such coating, the solvent in the planarizing coating must be allowed to evaporate and the planarizing coating must then be baked to remove further solvents and to harden the coating prior to the etching step, which is conventionally a dry etching process which is also usually carried out in a vacuum chamber. These problems were addressed in parent U.S. Patent Application, Marks et al Serial No. 269,508, filed November 10, 1988, entitled METHOD FOR PLANARIZING AN INTEGRATED CIRCUIT STRUCTURE USING LOW MELTING INORGANIC MATERIAL, cross-reference to which is hereby made. In that application, there is described and claimed a method for planarizing such structures using a planarizing layer of a low melting inorganic glass which is depositd over a conformal insulating layer such as a silicon oxide layer. However, the initial conformal insulating layer, e.g. a layer of silicon oxide, which is conventionally applied over the underlying metal lines or other patterned layers using CVD deposition techniques, does not always adequately fill in those regions between closely spaced apart metal lines or other raised parts of the underlying integrated circuit structure. This can result in the formation of voids in those portions of the silicon oxide layer deposited between such closely spaced apart raised parts of the integrated circuit structure. A form of deposition known as electron cyclotron resonance (ECR) plasma deposition, is desribed in Matsuo et al US-A-4,401,054; Matsuo et al US-A-4,492,620; and Ghanbari US-A-4,778,561 (cross reference to which three patents is hereby made); as well as in an article by Machida et al, entitled "Si0₂ Planarization Technology With Biasing and Electron Cyclotron Resonance Plasma Deposition for Submicron Interconnections", published in J. Vac. Sci. Technology B, Vol. 4, No. 4, Jul/Aug 1986, at pp. 818-821. The ECR plasma deposition process described in these publications provides deposition of material via a plasma, wherein a plasma formation chamber is surrounded by one or more magnetic coils to generate a magnetic field which produces an electron cyclotron resonance in the plasma formation chamber with the axis of the magnetic field extending toward a deposition chamber in a divergent manner. The resulting deposition, for example, of Si0₂ from oxygen and silane gases, is a more dense conformal insulating layer with a high aspect ratio to provide better filling of the regions between closely spaced apart lines, thus eliminating or at least mitigating the problem of void formation in the insulation material deposited in such areas. However, while such an ECR plasma deposited conformal insulating layer does solve the void formation problem discussed above, the ECR plasma process is considerably slower than a conventional CVD deposit. Furthermore, the planarization problems associated with silicon oxide layers, as discussed in the aforementioned Marks et al parent patent application, also apply to the formation of a silicon oxide layer using ECR plasma deposition techniques as well. Summary of the Invention Therefore, it is the object of the present invention to provide a planarization process and apparatus, wherein the problem of void formation could be eliminated while expediting the planarization process; also there should be no need for removing the integrated circuit structure from the vacuum apparatus used to deposit one or more of the planarization layers. Basically, this invention provides a process for planarizing an integrated circuit structure, comprising an initial ECR plasma deposition of a conformal insulation layer followed by application thereto of a low melting inorganic planarizing material. According to the present invention, there is provided a process for planarization of an integrated circuit structure in a vacuum apparatus, said structure having portions on the surface thereof higher than adjacent portions of the surface which comprises: (a) depositing a conformal insulation layer over said substrate using an ECR plasma deposition; (b) depositing a low melting inorganic planarization layer over said conformal insulation layer at a deposition temperature sufficiently high enough to permit said low melting inorganic planarization layer to flow as it is deposited; and (c) etching said planarization layer and said underlying insulation layer where necessary, the etch rates of said planarization layer and said insulation layer being substantially equal when both said planarisation layer and said insulation layer require etching, thereby planarizing said integrated circuit structure. Further features and advantages of this invention will become apparent from the appended claims and will become apparent from the following description and accompanying drawings. Brief Description of the Drawings Figure 1 is a flow sheet illustrating the process of the invention. Figure 2 is a fragmentary vertical cross sectional view of an integrated circuit structure having patterned layers thereon and a conformal insulating layer formed thereover by ECR plasma deposition. Figure 3 is a fragmentary vertical cross-sectional view of the integrated circuit structure of Figure 2 showing a planarizing layer of a low melting glass material deposited over the conformal insulating layer. Figure 4 is a fragmentary vertical cross-sectional view of the integrated circuit structure of Figure 3 after planarization of the structure. Figure 5 is a fragmentary vertical cross-sectional view of the integrated circuit structure of Figure 4 with a further layer of insulation material CVD deposited over the planarized structure. Figure 6 is a schematic view of apparatus which may be used in carrying out the process of the invention. Detailed Description of the Invention In accordance with the invention, an improved planarization process is provided wherein over a patterned integrated circuit structure of a semiconductor wafer is first formed a conformal insulation layer deposited by ECR plasma deposition of an insulation material. The ECR plasma deposition is carried out until the trenches or low regions between adjacent high regions are completely filled with insulation material. A planarization layer of a low melting glass material, such as a boron oxide glass, is then formed over the integrated circuit structure to a depth or thickness sufficient to cover the highest portions of the ECR plasma deposited insulation layer. This planarization layer is then anisotropically dry etched back to remove some or all the planarization material, resulting in a planarized surface on the ECR plasma deposited insulation layer. An optional further layer of insulation material may then be conventionally CVD deposited over the planarized ECR plasma deposited insulation layer. The process may be used for front end application such as dielectric planarization, for filling trenches or slots, or for top side planarization as well as the illustrated intermetal planarization. For example, when using the process in a front end application, a phosphorus silicate glass (PSG) may be used as the insulating material to the planarized. The process may also be used to planarize an integrated circuit structure prior to a blanket deposit of another metal layer such as tungsten. By use of the term "raised portions" is meant portions of an integrated circuit structure raised with respect to the height of the surface therebetween and thus may include not only structures raised with respect to the entire surface but also the raised sidewalls, for example, of a trench or slot with respect to the bottom of the trench. Turning now to Figure 2, an integrated circuit structure is generally shown at 2 comprising a semiconductor wafer or substrate 10, such as, for example, a silicon substrate, having raised portions 14 thereon which may comprise, for example, metal lines or other conductive or insulating materials. A conformal insulation layer 20, which may, for example, comprise a silicon oxide, a silicon oxynitride, or a silicon nitride layer, or a silicate such as phosphorus silicate when the underlying integrated circuit structure comprises silicon, is shown formed over substrate 10 and raised portions 14 thereon. Insulation layer 20 may comprise either a doped or undoped material. Other insulation materials may, of course, be used as well and may even be preferred over those just named when the underlying structure comprises some other material than silicon, e.g., germanium, gallium arsenide, etc. In accordance with the invention, conformal insulation layer 20 is deposited thereon using a ECR plasma deposition apparatus such as disclosed in the aforementioned Matsuo et al U.S. -A- 4,401,054; Matsuo et al U.S. -A- 4,492,620; and Ghanbari U.S. -A- 4,778,561. As seen in Figure 2, the ECR plasma deposition is carried out until the height of the insulation material in the low regions 16 between the raised portions 14 is slighter higher than the height of raised portions 14, as shown at 24. The ECR plasma deposition may be used, for example, to form a silicon oxide layer thereon, using the apparatus shown in the aforementioned Matsuo et al and Ghanbari patents. As described in these patents, and in the Machida et al article, an rf bias may be optionally applied to substrate 10 to facilitate the ECR plasma deposition. To carry out the ECR plasma deposition step of the invention, for example, to form a SiO₂ insulation layer, oxygen should be fed into the plasma formation chamber at a rate of from about 15 standard cubic centimeters per minute (sccm) to about 300 sccm and silane into the deposition chamber, at a rate of from about 15 sccm to about 300 sccm while maintaining the temperature in the deposition chamber at from about 25°C to about 400°C and a pressure ranging from about 0.067 x 10⁻³ mbar, to about 26.6 x 10⁻³ mbar (0.05 to about 20 millitorr). The magnetic flux density of the magnet used to provide the electron cyclotron resonance in the plasma formation chamber should range from about 500 to about 2500 gauss while the microwave frequency used to form the plasma should range from about 1 to about 4 G Hz . A plasma power level of from about 100 to about 1500 watts should be used. For example, when the magnetic flux density is 875 gauss, the microwave frequency should be 2.45 GHz. The ECR plasma deposition parameters are preferably adjusted to provide an aspect ratio (depth to width) of at least 1 and preferably as high as 3. After depositing the ECR plasma insulating layer to the desired depth of thickness, the low melting glass planarizing layer may be deposited over the conformal insulation layer. This second deposition may be carried out in the same vacuum chamber or, preferably, the integrated circuit structure, e.g., silicon wafer 10, may be transferred to a second vacuum chamber, preferably without exposing the structure to the ambient atmosphere, using a second deposition chamber in the same vacuum apparatus as will be explained below. In accordance with the invention, a planarizing layer 30 of a low melting inorganic material, such as a low melting glass, is then applied over insulating layer 20, and then the coated structure is subjected to a planarizing etch step to remove some or all of planarizing layer 30 as well as the higher regions 26 of underlying insulating layer 20. Low melting inorganic planarizing material 30 may comprise any inorganic material which: a) may be deposited on the surface of insulating layer 20 without the use of a solvent; b) which does not need to be subsequently cured or baked to harden the deposited material sufficiently to permit etching thereof; and c) is capable of being anisotropically etched, preferably anisotropically dry etched, at approximately the same rate as the underlying insulation layer. In a preferred embodiment, low melting inorganic planarizing material 30 comprises a material which may be deposited over insulating layer 20 using any conventional chemical vapor deposition apparatus. By "low melting" is meant a material which has a melting point of about 575°C or lower, and which will flow at about 500°C or lower, i.e., from about 100 to about 500°C. In a preferred embodiment where the process will be used over low melting materials already present in the integrated circuit structure such as aluminum, e.g., over aluminum lines or in topside applications, the melting point should not exceed about 480°C with a flow of 390°C or lower. The use of a material which will flow at about 390°C or lower will result in the flowing of the material over the underlying surface without risk of any harm to the underlying integrated circuit structure. By way of example, the low melting inorganic planarizing material comprises a low melting glass. Examples of such low melting glasses include B₂O₃, B₂S₆, B₂O₃/SiO₂ mixtures, As₂O₃, As₂S₃, P₂O₅, or any combinations of the above. By using a low melting planarizing material such as a low melting glass, planarizing material 30 may be deposited using, for example, the same CVD methods and apparatus used to deposit the insulating material 20 such as silicon oxide. Thus, a deposition of a low melting glass such as, for example, B₂O₃ at from about 390°C to about 480°C, at which temperature the planarizing material will flow over the stepped surface of insulating layer 20 on integrated circuit structure 10, will result in the generally planar surface 32 on layer 30 as shown in Figure 3. A lower deposition temperature may, of course, be used if the material is subsequently heated sufficiently to cause the planarizing material to flow over the surface. However, usually such an additional heating step will be avoided if possible. A lower deposition temperature may also be used provided that the low melting planarizing material has a flow point temperature at least as low as the deposition temperature so that the planarization material will flow as it is deposited. It should be noted that both depositions may be carried out in the same deposition chamber or in separate chambers within the same apparatus which may be interconnected in a manner which permits transfer of the integrated circuit structure from one chamber to another without exposure to the atmosphere and particularly to moisture and other contaminants in the atmosphere as will be described. The use of the same deposition chamber or at least the same general vacuum apparatus for deposition of both layers 20 and 30, together with the selection of a low melting inorganic material as the planarizing material which does not use solvents which must be removed, and which does not require further baking or curing prior to etching, permits the preferential carrying out of the two deposition steps sequentially in the same apparatus without intermediate removal of the integrated circuit structure from the vacuum apparatus. This not only reduces the total number of process steps, compared to the prior art planarizing processes, but additionally protects the integrated circuit structure from the risk of possible contamination which may occur whenever the semiconductor wafer containing the integrated circuit structure is removed from the vacuum apparatus and exposed to the atmosphere. The low melting inorganic planarizing material is deposited onto the surface of insulating layer 20 within a temperature range of from about 100°C to about 700°C, preferably about 300°C to about 500°C, and under a pressure of from about 13.3 x 10⁻³ mbar (10 millitorr) to about atmospheric pressure, preferably from about 2.66 mbar to 39.9 mbar (2 to 30 torr), to a thickness of from about 200 Angstroms, at its thinnest point, up to about 2 microns in its thickest regions, i.e., overlying the low areas of the insulation layer beneath it. In a typical plasma CVD deposition of B₂O₃, the deposition temperature ranges from about 390°C to about 440°C at a pressure of about 11.97 mbar to 13.3 mbar (9-10 torr) with an rf plasma power of about 400-500 watts. After deposition of the low melting inorganic planarizing material, the coated structure is then anisotropically dry etched until the high areas 26 of insulating layer 20 have been removed as well as at least a portion of planarizing layer 30, as shown at the top surface indicated by solid line 28 of Figure 4. This leaves a planarized portion 20′ of insulating layer 20 slightly higher than the height of the lowest portions 24 of layer 20 with segments 32 of planarizing layer 30 optionally left over the low points 24 of layer 20. It should be noted, in this regard, that while surface line 28 is shown as substantially flat, the planarized surface may still have somewhat raised portions adjacent the underlying raised parts of the integrated circuit structure, e.g., above patterned portions 14. However the 45° or higher slopes of the steps of the unplanarized insulation layer will be reduced down to about 10 to 15° or even lower after the planarization process of this invention. It should also be noted that the final slope is controllable by varying the fil thickness and/or deposition temperature used to deposit the planarizing material. Raising the deposition temperature reduces the slope because the planarizing material will flow better. Increasing the thickness of the planarizing material will also cause the film to flow more evenly across the underlying integrated circuit structure. The etch step may comprise any etch system capable of etching both the planarizing layer 30 and underlying insulating layer 20 at approximately the same rate. The etchant may comprise any dry etch such as a conventional anisotropic dry etch. Preferably the dry etch will comprise a plasma etch using CHF₃ of CF₄ or argon. Examples of other dry etching systems useful in the practice of the invention include a sputter etching system or an RIE system. In a particularly preferred embodiment of the invention, the integrated circuit structure, after having both the insulation layer and the planarizing layer deposited in the same vacuum apparatus, may be etched in the same chamber or in another zone or chamber in the same apparatus while still maintaining the integrated circuit structure under vacuum. Thus, as shown in the flow chart of Figure 1, the integrated circuit structure may be coated with both insulation layer 20 and planarizing layer 30 in a deposition zone, which may comprise the same or different deposition chambers in a common deposition apparatus, and then the coated structure may be either anisotropically dry etched in the same chamber or moved to or through an interlock or intermediate chamber from which the coated structure may be moved to an etching zone without removing the coated structure from the vacuum apparatus. Referring now to Figure 5, the planarized integrated circuit structure may now be optionally subjected to a conventional CVD deposition in the same chamber, or in another chamber in the same vacuum apparatus, to form a further layer 40 of an insulation material thereon such as any of the previously mentioned insulation materials used to form conformal insulation layer 20. While layer 40 could also be formed using an ECR plasma deposition, as used in forming layer 20, it is preferable that a conventional CVD deposition be used at this point since a conventional CVD deposition will deposit material at a faster rate than a ECR plasma deposition and the high aspect ratio and dense deposition characteristic of the ECR plasma deposition is not needed at this step of the process since void formation is not a major problem after satisfactory planarization is completed. As discussed earlier with regard to the previous deposition and etching steps, this CVD deposition is also advantageously carried out in the same deposition chamber, or at least in the same vacuum apparatus, to avoid exposure to the atmosphere and particularly to moisture and other contaminants in the atmosphere. It should also be noted that while this formation of insulation layer 40 over the planarized structure is referred to an an optional step, if during the planarization step all of planarization layer 30 is not removed, leaving portions 32 in the low spots in the integrated circuit structure, as shown in Figure 4, the use of a subsequent insulation layer 40 is then necessary to encapsulate any remaining portions of planarizing layer 30 due to the hygroscopic nature of the low melting glasses which may be used to form planarizing layer 30. Referring now to Figure 6, a vacuum apparatus useful in the practice of the invention is generally depicted at 100 comprising a number of deposition and etching chambers 102-108, at least one of which is capable of ECR plasma deposition. Details of construction of such an ECR chamber are described in Matsuo et al U.S. -A- 4,401,054; Matsuo et al U.S. -A- 4,492,620; and Ghanbari U.S. -A-4,778,561; as well as in an article by Machida et al, entitled "SiO₂ Planarization Technology With Biasing and Electron Cyclotron Resonance Plasma Deposition for Submicron Interconnections", published in J. Vac. Sci. Technology B, vol. 4, No. 4, Jul/Aug 1986, at pp 818-821; cross-reference to which four references is hereby made. Each of the chambers 102-108 in vacuum apparatus 100 may also be used to carry out chemical vapor depositions (CVD), plasma etching, and other deposition and etching processes on a wafer or substrate 10 normally carried out under vacuum. Chambers 102-108 are each connected, via interlocks or slit valves 110, to a central chamber 116. Central chamber 116 contains a robot mechanism 120, comprising a wafer transfer blade 122 which is mounted for reversible linear movement indicated by the arrow at 124 and rotational movement as indicated at arrow 126. Specifically a four-bar link mechanism 130 imparts linear movement while rotational movement is provided by rotatable platform 134 on which is mounted four bar link mechanism 130 and wafer support blade 122. A vertically indexable internal wafer support elevator 150 is used to store wafers within the vacuum apparatus for transfer to the various processing chambers 102-108 without breaking vacuum in the system. Another slit valve or interlock opening 110 is provided adjacent the elevator 150 for external loading of the wafers into vacuum apparatus 100 from external storage means 160. Further details of the construction of such chambers, interlocks, the robotic mechanisms may be found in Toshima U.S. Patent 4,785,962, assigned to the assignee of this invention and cross-reference to which is hereby made. Thus, wafer or substrate 10 may be processed by ECR deposition, CVD deposition, and anisotropic dry etching without leaving the vacuum apparatus for purpose both of preventing contamination as well as enhancing process efficiency. The invention, therefore, provides an improved planarization process wherein a first conformal insulation layer is deposited over a patterned substrate using an ECR plasma deposition process resulting in the formation of a dense coating with a high aspect ratio of deposition resulting in complete filling of low regions on the substrate betwen adjacent raised portions without the formation of voids in the deposited insulation layer. The application of a low melting glass planarization layer over the conformal insulation layer, which then may be dry etched, permits planarization of the structure without the need for removal of the semiconductor wafer from a vacuum apparatus. A further layer of insulation may then be optionally applied over the planarized structure using conventional CVD deposition to provide a faster deposition rate for such a subsequent insulation layer.

Claims: A process for planarization of an integrated circuit structure (2) in a vacuum apparatus, said structure (2) having portions (14) on the surface thereof higher than adjacent portions (16) of the surface which comprises: (a) depositing a conformal insulation layer (20) over said substrate using an ECR plasma deposition; (b) depositing a low melting inorganic planarization layer (30) over said conformal insulation layer (20) at a deposition temperature sufficiently high enough to permit said low melting inorganic planarization layer to flow as it is deposited; and (c) etching said planarization layer (30) and said underlying insulation layer where necessary, the etch rates of said planarization layer and said insulation layer being substantially equal when both said planarisation layer and said insulation layer require etching, thereby planarizing said integrated circuit structure. The process of Claim 1, characterised in that the melting point of the planarization layer (30) is no more than 575°C. The process of Claim 1 or Claim 2, which comprises the further step of depositing by CVD deposition, a further insulation layer (40) over said structure after said planarization step. The process of any of Claims 1 to 3, characterised in that said step of ECR plazma depositing said insulating layer (20) comprises depositing a layer of insulation material selected from the class consisting of silicon oxide, silicon oxynitride, silicon nitride, and phosphorus silicate over said integrated circuit structure. The process of any of Claims 1 to 4, characterised in that said ECR plasma deposition is carried out while maintaining a magnetic flux density of from about 500 to about 2500 gauss, a microwave freqency to form the plasma ranging from about 1 to about 4 GHz, and a plasma power level of from about 100 to about 1500 watts. The process of any preceding claim, characterised in that said ECR plasma deposition is carried out while maintaining the temperature of said deposition at from about 25°C to about 400°C, preferably about 300°C to about 500°C, and a pressure ranging from about 0.067 x 10⁻³ mbar to about 26.6 x 10⁻³ mbar (0.05 to about 20 millitorr). The process of any preceding claim, characterised in that said step of depositing said inorganic planarizing layer (30) further comprises depositing an inorganic planarizing layer (30) capable of being etched at about the same rate as said insulating layer and having a flow temperature of not geater than 500°C. The process of any preceding claim, characterised in that said step of depositing said low melting inorganic planarizing layer (30) further comprises depositing an inorganic planarizing layer (30) consisting essentially of one or more low melting glasses selected from the class consisting of B₂O₃, B₂S₆, B₂O₃/SiO₂ mixtures, As₂O₃, As₂S₃, P₂O₅ and combinations thereof, preferably B₂O₃. The process of any preceding claim, characterised in that said step of etching said planarization layer (30) to planarize said integrated circuit structure further comprises anisotropically dry etching said structure without removing said structure from said vacuum apparatus. The process of any preceding claim, characterised in that the portions (14) on the surface of the substrate (2) are metal lines.

Inventors: MAYDAN DAN, WANG DAVID NIN-KOU, MAYDAN, DAN, WANG, DAVID NIN-KOU
Applicants: APPLIED MATERIALS INC, APPLIED MATERIALS INC.
Application year: 1989
Main classification: H01L21
IPC codes: C23C16, H01L21