Method of fabricating a layer on a substrate

Abstract: A method of fabricating a high-quality tunnel oxide layer includes a two-step oxidation process. The first oxidation step includes oxidizing a substrate in an atmosphere comprising oxygen and nitrogen at a temperature of approximately 950°C, and thus is an HCl-less oxidation. The second oxidation step is performed in an atmosphere comprising HCl and argon at a temperature of approximately 1050°C. The first oxidation step is performed at a temperature in the range of temperatures for the viscous flow of the oxide to prevent any physical defects from forming in the oxide layer. The second oxidation step is performed at a temperature sufficient to passivate any mobile ions in the oxide layer in at atmosphere comprising a gettering agent, for example, HCl. By this two-step oxidation process a tunnel oxide layer which is of high quality and is not damaged during subsequent processing steps performed at temperatures at 1100°C and above.

Description: The present invention relates to the fabrication of high-quality tunnel oxide layers, and more particularly, to the fabrication of tunnel capacitors. Conventional oxide layers, particularly tunnel oxides for tunnelling EEPROMS, have poor endurance after the oxide layers are heated to temperatures of 1100°C or more during fabrication steps following the formation of the oxide layer. In particular, in the fabrication of EEPROMS, a tunnel oxide is provided on a substrate and a polysilicon floating gate is deposited on the tunnel oxide and then doped and patterned. Then, an inter-gate oxide is thermally grown at the exposed surface of the control gate at a temperature of 1100°C or greater. A control gate is provided on the inter-gate oxide. Several problems may occur with the tunnel oxide in such an EEPROM. First, if the tunnel oxide is grown in a gaseous environment including HCl, the surface of the substrate is roughened due to etching by the HCl. The roughening of the surface of the substrate creates physical discontinuities which cause charge concentrations in the regions of the discontinuities. Charge concentrations if large enough can exceed the breakdown voltage of the tunnel oxide. Second, conventional tunnel oxides have physical defects, e.g., cracks, which allow the dopant ions in the control gate to migrate across the tunnel oxide to the substrate during the high temperature cycle utilized to grow the inter-gate oxide, thereby ruining the device. Conventional tunnel oxide layers suffer from a reduction in the breakdown field (breakdown voltage normalized for thickness), low fluence (capacitance normalized for the area of the capacitor), and the inability to be stressed to high breakdown fields without catastrophic failure. These problems also occur with gate oxide layers in EPROMS and other MOS devices. SUMMARY OF THE INVENTION We will describe a method of providing an improved oxide layer for semiconductor devices. We will describe a method of fabricating an oxide layer without roughening the surface of the substrate on which the oxide layer is formed. We will describe a method of providing a high-quality oxide layer having a minimum of physical defects. We will describe a method of fabricating an 80Å tunnel oxide layer having a breakdown field at 1µA of greater than 50 mV/cm with a positive bias on the gate and 15mV/cm with a negative bias on the gate, and a fluence of greater than 30 C/cm². We will describe a method of fabricating a tunnel oxide having high reliability after exposures to temperatures of 1100°C or greater. The fabrication of an oxide layer on a substrate in accordance with the present invention comprises the steps of (a) oxidizing the substrate in an atmosphere comprising oxygen and nitrogen and excluding HCl at a temperature less than or equal to 1000°C; and (b) oxidizing the substrate in an atmosphere comprising HCl and argon (Ar) at a temperature greater than 1000°C. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 illustrates an EEPROM having a tunnel oxide layer formed in accordance with the method of the present invention. DESCRIPTION OF THE PREFERRED EMBODIMENT A method of fabricating a high-quality oxide layer in accordance with the present invention will be described with reference to the EEPROM shown in Fig. 1. It is to be understood that all temperatures, times, and percentage gas compositions are approximate and are intended to be exemplary of temperatures, times, and percentage compositions which achieve the purposes of the steps of the present invention. Further, an improved oxide fabricated in accordance with the method of the present invention is useful as a gate oxide layer in MOS devices other than EEPROMS including but not limited to CMOS and EPROM devices, and semiconductor capacitors. The EEPROM shown in Fig. 1 is fabricated on a substrate 6 as follows. Field oxide regions 8 are grown on the substrate to define an active region where the EEPROM is to be provided. An N⁺ region 10 is implanted into the substrate. The source and drain 10, 11 are formed using a relatively deep implant performed at 160keV to provide a dopant concentration of 5 x 10¹⁴/cm². The surface of substrate 6 is then oxidized to form a tunnel oxide 14. A tunnel oxide layer 14 fabricated in accordance with the method of present invention may be, for example, an 80Å (80x10⁻¹⁰m) oxide layer having improved reliability, an increased breakdown field, and a higher fluence. The fabrication of tunnel oxide 14 in accordance with the present invention includes a two-step oxidation process. The substrate 6 is placed in a furnace which is evacuated, backfilled with nitrogen, and heated to a temperature in the range of 950°C to 1000°C. Oxygen (which is preferably dry oxygen) is then introduced into the chamber and a first oxidation step, oxidizing the surface of the substrate, is performed. During the first oxidation step the atmosphere in the chamber includes approximately 20% oxygen, but does not include HCl. The temperature is in the range of 950°C to 1000°C, the preferred temperature being approximately 950°C. The oxidation temperature of 950°C is chosen because it falls within the range of temperatures for which the oxide exhibits viscous flow, i.e., 950°C-975°C, and thus minimizes the defect density of the oxide layer. Oxides grown at temperatures below 950°C are subject to stress deformations and discontinuities. In the preferred embodiment of the present invention the first oxidation step is performed for a time of approximately ten (10) minutes to grow an oxide having a thickness of approximately 50Å (50x10⁻¹⁰m). The oxide grows at the nearly linear rate of approximately 5Å/min (5x10⁻¹⁰m/min). Accordingly the thickness of the oxide grown during the first oxidation step may be varied by selecting the appropriate oxidation time. Then, the furnace is evacuated, argon is then introduced into the furnace, the temperature in the furnace is raised to above 1000°C, and thereafter HCl ( with oxygen ) is added to perform a second oxidation step. The furnace atmosphere during the second oxidation step comprises approximately 3% HCl, and the preferred temperature is approximately 1050°C. This second oxidation step is performed to passivate (or getter) any mobile ions which exist in the oxide or at the oxide/silicon interface. The temperature of 1050°C is selected because it is the minimum temperature needed for passivation. Higher temperatures have been shown to yield minimal improvement. In the preferred embodiment of the present invention the second oxidation step is performed for approximately three (3) minutes to ensure that the etching of the oxide and the substrate by the HCl will be kept to a minimum and provides a tunnel oxide 14 having a thickness of approximately 80Å (80x10⁻¹⁰m). The oxide growth rate is increased during the second oxidation step due to the increased oxidation temperature. Then, the furnace is again evacuated and backfilled with argon and the substrate and tunnel oxide layer 14 is subjected to an anneal for approximately 15 minutes before the furnace temperature is ramped down. Following formation of the tunnel oxide 14, a floating gate 20 formed of, for example, doped polysilicon, is provided on the tunnel oxide 14. An inter-gate oxide layer 22 is provided on the surface of floating gate 20. If floating gate 20 is formed of doped polysilicon, inter-gate oxide layer 22 may be formed by oxidizing a portion of floating gate 20; it is this oxidation process, performed at temperatures of 1100°C and above, which causes diffusion of the dopant ions in floating gate 20 through conventional tunnel oxide layers. A control gate 24 is then provided on inter-gate oxide layer 22. The EEPROM device may be completed using conventional semiconductor device fabrication techniques to provide contact (not shown) for source 16 and drain 18, interconnects (not shown), and passivation layers (not shown). Tunnel oxide layers of 80Å (80x10⁻¹⁰m) formed in accordance with the present invention have been shown to have breakdown fields at 1µA of greater than 50 mV/cm with a positive bias on the gate, and a fluence of up to 40 C/cm². Further, these oxide layers have been shown to withstand stresses of up to 75 MV/cm over seven (7) repetitions without catastrophic failure. The many features and advantages of the method of fabricating a passivated tunnel oxide in accordance with the present invention will be apparent to those of ordinary skill in the art.

Claims: A method of fabricating an oxide layer on a substrate, comprising the steps of: (a) oxidizing the substrate in an atmosphere comprising oxygen and nitrogen and excluding HCl at a temperature less than or equal to 1000°C and greater than approximately 950°C; and (b) oxidizing the substrate in an atmosphere comprising HC1, argon (Ar) and oxygen at a temperature greater than 1000°C. A method according to claim 1, wherein said step (a) comprises oxidizing the substrate in an atmosphere comprising approximately 20% dry oxygen and nitrogen. A method according to claim 2, wherein said step (a) comprises oxidizing the substrate at approximately 950°C. A method according to claim 1, wherein said step (b) comprises oxidizing the substrate in an atmosphere comprising approximately 3% HCl and argon. A method according to claim 4, wherein said step (b) comprises oxidizing the substrate at approximately 1050°C. A method according to any of claims 1 to 5, wherein the step (b) passivates the mobile ions in the oxide layer formed in said step (a). A method of fabricating a high-quality tunnel oxide layer on a substrate, comprising the sequential steps of: (a) heating the substrate to approximately 950°C in an atmosphere comprising nitrogen (N₂) and excluding HCl; (b) oxidizing the substrate in an atmosphere comprising oxygen at approximately 950°C and excluding HCl. (c) heating the substrate to approximately 1050°C in an atmosphere comprising argon; and (d) oxidizing the substrate in an atmosphere comprising HCl and oxygen at approximately 1050°C. A method according to claim 7, wherein said step (b) comprises oxidizing the substrate in an atmosphere comprising approximately 20% oxygen. A method according to claim 7 or 8, wherein said step (d) comprises oxidizing the substrate in an atmosphere comprising approximately 3% HCl. A method according to claim 7, wherein said step (d) passivates the tunnel oxide. A method according to any of claims 7 to 10, further comprising the step (e) of annealing the substrate in argon. A method according to any of claims 7 to 10 further including the initial step of providing source and drain regions in the substrate, said source and drain regions being spaced apart to define a channel therebetween; and wherein the substrate is annealed in an atmosphere comprising argon for approximately 15 minutes after step (d). A method according to any of claims 7 to 10, wherein said step (c) passivates any mobile ions at the oxide/substrate interface. A method according to any of claims 7 to 13 wherein: said step (b) comprises oxidizing the substrate for approximately 10 minutes to grow a tunnel oxide layer having a thickness of approximately 50Å (50x10⁻¹⁰m); and said step (d) comprises oxidizing the substrate for approximately 3 minutes, thereby increasing the thickness of the tunnel oxide layer to approximately 80Å (80x10⁻¹⁰m).

Inventors: IBOK EFFIONG E, IBOK, EFFIONG E.
Applicants: ADVANCED MICRO DEVICES INC, ADVANCED MICRO DEVICES, INC.
Application year: 1989
Main classification: H01L21
IPC codes: H01L21, G11C16, H01L29, H01L27, G11C17