Method of manufacturing oxide superconductor

Abstract: A method of manufacturing an oxide superconductor by heating a raw material for an oxide superconductor composed of MBa₂Cu₃O 7-δ , where M represents at least a single element selected from a group of Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Lu, to a temperature higher than a peritectic reaction temperature for melting the same and thereafter reducing the temperature to the peritectic reaction temperature to crystallize the oxide superconductor by peritectic reaction. A method of forming a dispersion solution of powder of a raw material for an oxide superconductor and applying the same on a substrate to prepare a thick film.

Description: BACKGROUND OF THE INVENTION Field of the Invention The present invention relates to a method of manufacturing an oxide superconductor. Description of the Prior Art A superconductive material composed of YBa₂Cu₃O 7-δ , which shows superconductivity at a high temperature of about 90 K, is expected for various uses. For example, such a superconductive material can be applied to power transmission, in order to extremely reduce power loss of about 7 % caused by transmission. With respect to a use as an electromagnet, studied is application to nuclear fusion, SOR, an accelerator, a magnetic levitation train, NMR-CT, an electromagnetically driven ship or the like. In application to such usage, it is preferable to work the superconductive material having the aforementioned composition into the form of a bulk material, a wire rod, a tape or the like. In this case, a value generally obtained as critical current density Jc is about 10³ to 10⁴ A/cm² at the liquid nitrogen temperature of 77 K. However, it is said that critical current density Jc of at least 10⁶ A/cm² is required for practical use such as power transmission or application to an electromagnet. A bulk oxide superconductor has been mainly manufactured by a solid phase reaction method or a coprecipitation method. Powder of the aforementioned yttrium oxide superconductive material is generally synthesized by the solid phase reaction method. A YBa₂Cu₃O 7-δ material is prepared by the sintering method as follows: First, BaCO₃, Y₂O₃ and CuO are weighted as starting materials in the ratios Y:Ba:Cu = 1:2:3, and mixed in a mortar. Powder of such a mixture is heated/reacted within an alumina crucible in an oxygen flow or in the atmosphere at 930 to 950 o C for 8 to 12 hours. Then the powder is ground and pelletized, which is sintered in the air or in an oxygen flow of 900 to 950 o C for 12 to 24 hours, and then subjected to furnace cooling. In the coprecipitation method, reagents such as oxalate, carbonate and citrate are employed to synthesize YBa₂Cu₃O 7-δ through thermal decomposition of such reagents. Another oxide superconductor expressed as MBa₂Cu₃O 7-δ , where M represents at least a single element selected from a group of Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Lu, is also prepared by a substantially similar synthesizing method. A vapor phase growth method has been conventionally reported as a method of preparing a thin film of an oxide superconductor. For example, there are reports that an oxide thin film has been formed by molecular beam epitaxy (MBE) to obtain a thin film having b and c axes oriented in surfaces, that a thin film of 1 µm in thickness has been grown on an SrTiO₃ substrate by a three-gun vapor deposition method, and the like. In the conventional solid phase reaction method, powder materials are mixed with each other in a mortar. However, the degree of such mixing is to about the size of the starting particles at the most, and homogenous dispersion is limited. Further, since solid phase reaction progresses only in the vicinity of contact points between particles, such reaction must be repeated in order to obtain a YBa₂Cu₃O 7-δ phase. In addition, the obtained sample is porous and its density is merely about 70 to 80 % of a theoretical value. In a conventional method of manufacturing an oxide superconductor by the vapor phase growth method, on the other hand, manufacturing steps are complicated and the growth rate of a film is slow, leading to inferior productivity. In the conventional method, further, such a problem is particularly caused in density that a body obtained is considerably porous with density similar to that of a sintered material, and a critical current value is reduced as the result. The document Jap. J. of. Appl. Phys., Vol. 26, No. 10, October, 1987, pp. L1707-L1710, J. Tahada et al., discloses the forming of a Ba₂ Y Cu₃ Ox crystal by peritectic reaction. SUMMARY OF THE INVENTION An object of the present invention is to provide a method of manufacturing an oxide superconductor, which can manufacture a homogenously composed oxide superconductor being superior in density and crystallinity to the prior art through relatively simple steps. An oxide superconductor is crystallized through peritectic reaction by heating the material therefor to a temperature higher than a peritectic reaction temperature for melting the same and then cooling the melt to the peritectic reaction temperature, thereby to crystallize the oxide superconductor thus obtained through peritectic reaction. The material is temporarily heated to a temperature higher than the peritectic reaction temperature to be in a molten state, whereby rapid and homogenous reaction can be attained as compared with solid phase reaction which is caused only in grain boundaries. Described are a step of heating a raw material for an oxide superconductor crystallized by peritectic reaction to a temperature higher than a peritectic reaction temperature for melting the same, a step of cooling the melt to the peritectic reaction temperature and retaining the said temperature for a constant period to facilitate peritectic reaction thereby to crystallize an oxide superconductor thus obtained, and a step of gradually cooling the oxide superconductor to the room temperature. A typical oxide superconductor which is crystallized by peritectic reaction is composed of MBa₂Cu₃O 7-δ , where M represents at least a single element selected from a group of Y, Nd, Sm, Eu, Gd, DY, Ho, Er, Tm, Yb and Lu. The peritectic reaction temperature can be obtained by differential thermal analysis. For example, MBa₂Cu₃O 7-δ is decomposed by peritectic reaction into M₂BaCuO₅, CuO and BaCuO₂. The peritectic reaction temperature can be evaluated/decided by identifying a phase around a peak by differential thermal analysis. This peritectic reaction temperature is decided to be within a range of Tp ± 30°C, assuming that Tp represents the rise temperature of the differential thermal peak. The melt is retained at a constant temperature within a temperature region causing appearance of the peritectic reaction peak, i.e., a temperature region between leading and trailing edges of the peak. Fig. 1 illustrates a heating/cooling curve according to the first aspect of the present invention. As shown in Fig. 1, the material is temporarily heated to a temperature higher than a peritectic reaction temperature T₁ to be molten, and a melt thus obtained is cooled to the peritectic reaction temperature T₁ and retained at this temperature T₁ for a period t₁, to crystallize an oxide superconductor. Then the oxide superconductor is gradually cooled to the room temperature. The peritectic reaction temperature can be retained for 1 to 20 hours. The speed for cooling the oxide superconductor is preferably not more than 300°C/hr. The method according to the present invention comprises a step of dispersing powder of a raw material for an oxide superconductor composed of MBa₂Cu₃O 7-δ , where M represents at least a single element selected from a group of Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Lu, in a dispersion medium, a step of applying the dispersion solution on a substrate and heating the dispersion solution applied on the substrate to a temperature higher than a peritectic reaction temperature of the oxide superconductor and lower than the peritectic reaction temperature plus 100°C for partially melting the same in an oxygen atmosphere, a step of reducing the temperature of the melt including solid particles on the substrate to the peritectic reaction temperature and retaining the said temperature for a time period for crystallizing M Ba₂ Cu₃ O 7-δ , and a step of gradually cooling the M Ba₂ Cu₃ O 7-δ at a rate of not more than 300°C/hr to facilitate crystalline grain growth of the M Ba₂ Cu₃ O 7-δ thereby to form a thick film of the oxide superconductor on the substrate. According to the present invention, the peritectic reaction temperature is preferably within a range of a rise temperature Tp of a differential thermal peak of the raw material powder, measured through differential thermal analysis, ± 30 ° C. The raw material powder employed in accordance with the present invention may already have the composition of the oxide superconductor, or may be prepared from mixed powder of oxides of respective elements previous to composition. The method according to the present invention is now described in more concrete terms. First, a sintered material of MBa₂Cu₃O 7-δ , which causes peritectic reaction, is prepared as a starting material. This powder sample is subjected to differential thermal analysis, to measure a rise temperature Tp of a differential thermal peak. A peritectic reaction temperature is decided to be within a range of the temperature Tp ± 30°C. A temperature to be employed in a melting step is so set that the same exceeds the peritectic reaction temperature and the upper limit thereof is higher by 100°C than the temperature Tp. Then, the starting material powder is mixed with a dispersion medium to be dispersed, and the dispersion solution is applied on a single crystal substrate by screen printing. This substrate is introduced into a furnace to be heated to the aforementioned upper limit temperature under an oxygen atmosphere and retained for a constant period. Thus, rightward reaction in the following formula (I) is completed: 2MBa 2 ,Cu 3 ,O 7-δ (solid phase) = M 2 BaCuO 5 (solid phase) + 3BaCuO 2 (liquid phase) + 2CuO (liquid phase) Thereafter the temperature is reduced to the peritectic reaction temperature and retained for a constant period to facilitate peritectic reaction, which is leftward reaction in the above formula (I), thereby to generate a superconducting phase of prescribed thickness. Then, the superconducting phase is gradually cooled to the room temperature at a cooling rate of not more than 300°C/hr. Fig. 2 illustrates a heating/cooling curve according to the present invention. As shown in Fig. 2, raw material powder is first temporarily heated to a temperature higher than Tp + 30°C but lower than Tp + 100°C, to cause decomposition/melting reaction of the raw powder material, which is applied on a substrate, at a high temperature exceeding the peritectic reaction temperature. The material is thus passed through a liquid-phase state, then cooled to a temperature around Tp ± 30°C and retained at this temperature for a constant period, thereby to facilitate peritectic reaction. Also in accordance with the present invention, a thick film thus obtained has dense structure since the same is passed through the liquid-phase state, to be improved in superconductivity, particularly in current density. Further, the aforementioned decomposition/melting reaction is reversible to peritectic reaction, whereby the starting raw material and the film formed thereof are identical in composition to each other. Thus, the composition can be easily controlled. The superconductor thick film can be oriented by employing a single crystal such as MgO, SrTiO₃ or YSZ (yttrium stabilized zirconia) for the substrate, whereby critical current density is further improved. These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 illustrates a heating/cooling curve; Fig. 2 illustrates a heating/cooling curve according to the present invention; Fig. 3 illustrates the result of differential thermal analysis of a YBa₂CU₃O₇₋ sintered material; Fig. 4 illustrates a heating/cooling curve in Example 1 DESCRIPTION OF THE PREFERRED EMBODIMENTS Example 1 Description is now made on Example 1 which is for technical information only and not within the scope of the claims. An oxide superconductor was prepared from YBa₂Cu₃O 7- δ . Fig. 3 illustrates the result of differential thermal analysis of YBa₂Cu₃O 7- δ . The leading edge of a temperature-up endothermic peak is 1030 o C, and that of a temperature-down exothermic peak is also 1030 o C. Powder of YBa₂Cu₃O 7- δ prepared by a sintering method was introduced into a platinum crucible as a starting material, to be heated/molten in a furnace. Peritectic reaction was started at about 1030 o C in temperature-up operation. Upon completion of the peritectic reaction, the powder was heated to 1060 o C, and then cooled at a cooling rate of 5 o C/min. to the temperature for starting peritectic reaction. Thereafter the powder was retained at a constant temperature of 1010 o C in a temperature range with appearance of the exothermic peak in the differential thermal curve shown in Fig. 2 for two hours, and cooled at a rate of 5 o C/min. Fig. 4 shows a heating/cooling curve of this Example. A crystal obtained in the aforementioned manner was subjected to powder X-ray diffraction, to recognize that YBa₂Cu₃O 7-δ was obtained in a single phase. Further, its density reached 94 % of a theoretical value, to provide excellent crystallinity. Example 2 Description is now made on Example 2 which is in accordance with the present invention, employing YBa₂Cu₃O 7-δ as an oxide superconductor and SrTiO₃ as a single crystal substrate. First, a YBa₂Cu₃O 7-δ sintered powder was subjected to differential thermal analysis, to confirm that a differential thermal peak showing peritectic reaction was 1030 o C. Then, the aforementioned sintered powder was applied through use of propylene glycol, on the (100) surface of the aforementioned single crystal substrate of 10 x 10 mm in size, which in turn was introduced into a furnace to be heated to 1060 o C under an oxygen atmosphere. Such heating was retained for one hour and then the temperature was reduced to 1010 o C, at which the substrate was retained further for one hour to provide a superconducting thick film. Supply of oxygen during this operation was 6 ℓ /hr. Then the film was slowly cooled at a cooling rate of 300 o C/hr. The YBa₂Cu₃O 7-δ superconducting thick film was 15 to 20 µm in thickness, and oriented at the (001) direction. The structure of this film was observed to confirm that its crystallinity was improved as compared with that obtained through solid phase reaction with excellent density reaching 94 % of a theoretical value. Then, its superconductivity was examined to confirm that the film caused superconduction transition at a temperature exceeding the liquid nitrogen temperature, and its critical current density was 600 A/cm². Reference example was prepared by the conventional method employing no peritectic reaction, to confirm that its critical current density was about 100 A/cm².

Claims: A method of manufacturing an oxide superconductor comprising the steps of: dispersing powder of a raw material for an oxide superconductor composed of MBa₂CU₃O 7-δ , where M represents at least a single element selected from a group of Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm, Yb and Lu, in a dispersion medium; applying said dispersion solution on a substrate and heating said dispersion solution on said substrate to a temperature in the temperature range higher than a peritectic reaction temperature of said oxide superconductor and lower than the peritectic reaction temperature plus 100°C for partially melting the same in an oxygen atmosphere; reducing the temperature of said melt including solid particles on said substrate to said peritectic reaction temperature and retaining said temperature for a time period for crystallizing MBa₂Cu₃O 7-δ ; and gradually cooling the MBa₂CU₃O 7-δ at a rate of not more than 300°C/hr to facilitate crystalline grain growth of the MBa₂Cu₃O 7-δ thereby to form a thick film of said oxide superconductor on said substrate. A method of manufacturing an oxide superconductor in accordance with claim 1, wherein said peritectic reaction temperature is determined as a temperature in the range of 30°C above and below an exothermic reaction temperature measured by a differential thermal analysis method. A method of manufacturing an oxide superconductor in accordance with claim 1, wherein said substrate is prepared from a single crystal member of MgO, YSZ or TiSrO₃.

Inventors: NAMIKAWA YASUO, TATSUMI MASAMI, TORII YASUKO, NAMIKAWA, YASUO, TATSUMI, MASAMI, TORII, YASUKO, Namikawa, Yasuo, c/o Osaka Works Of Sumitomo, Tatsumi, Masami, c/o Osaka Works Of Sumitomo, Torii, Yasuko, c/o Osaka Works Of Sumitomo
Applicants: SUMITOMO ELECTRIC INDUSTRIES, SUMITOMO ELECTRIC INDUSTRIES LIMITED
Application year: 1988
Main classification: H01L39
IPC codes: C04B35, C04B41, H01L39