Method of manufacturing a superconducting ceramics elongated body

Abstract: A superconducting ceramics elongated body comprising a flexible ceramics elongated substrate and an oxide ceramics superconducting layer formed at least on a part of the surface of the ceramics elongated substrate to longitudinally extend along the ceramics elongated substrate. The superconducting ceramics elongated body further comprises a protective layer of ceramics containing a nitride, which is provided to at least cover the surface of the superconducting layer exposed on the ceramics elongated substrate. A method of manufacturing a superconducting ceramics elongated body by forming a longitudinally continuous superconducting layer on at least a part of the surface of a flexible ceramics elongated substrate. The superconducting layer is formed on the elongated substrate by a sol-gel method, a coating/sintering method, evaporation under oxygen ions, deposition from a fluoride solution or oxidation after application of corresponding fluorides.

Description: The present invention relates to a method of manufacturing a superconducting ceramics elongated body comprising a longitudinally extending oxide ceramics superconducting layer. This application is a divisional application of European Patent No. 0 304 061 directed to a suprconducting ceramics elongated body and a method for manufacturing same. Likwise superconducting ceramics elongated bodies and methods for manufacturing same are claimed in co-pending applications EP-0 661 763 and EP-A-0 725 448 which are further divisional applications of EP-B-0 304 061. In recent years, a superconducting material of oxide ceramics has been highlighted because of its high critical temperature. The range of practicable use of such a superconducting material is being widened with increase in critical temperature. For example, study has been made in order to apply the material to a power transmission medium etc. in the field of power transmission/distribution. See in this respect Applied Physics letters, volume 51, July - December 1987, pages 203 to 204, "High T c superconductors-composite wire fabrication" by S. Jin et. al. The first problem to be solved for applying an oxide ceramics superconducting material to a power transmission medium or the like is how to elongate such a superconducting material. Further, a satisfactorily elongated superconducting material must have appropriate flexibility since the same is wound on a reel or the like in practice. Thus, the second problem to be solved for applying the oxide ceramics superconducting material to a power transmission medium or the like is how to provide appropriate flexibility. From EP-A-0 303 412 forming prior art in accordance with Art. 54(3) EPC superconductor-coated carbon fiber composite is known comprising a carbon fiber base coated with a superconducting layer. US-A-4,014,706 discloses a composition of matter each consisting essentially of a solid solution of compounds and halide binder aid. EP-A-0 192 040 discloses a fluoride infiltrated carbide or nitride composite. US-A-4,419,125 discloses a method of preparing submicron-superconducting particles for use in forming a ductile wire therefrom. This known method utilizes preparing a mixture of solid metal halides containing essentially stoichiometric proportions of metallic components for the desired superconductin compound, co-reducing the mixture with an excess of liquid alkali metal, removing the alkali metal, and annealing the superconducting powder. An object of the present invention is to provide a further method of manufacturing a flexible superconducting ceramics elongated body as claimed in EP-B-0 341 061. According to the inventive manufacturing method as defined in claims 1, 4 and 5, respectively, a longitudinally continous layer is formed on at least part of the surface of a flexible elongated substrate to provide a superconducting elongated body. According to a first aspect the present invention as defined in claim 1, the manufacturing method comprises a step of dissolving oxides for composing superconducting ceramics in a melt of at least one fluoride having a melting point lower than those of the oxides, a step of reacting the oxides in the molten fluoride(s) to form a composite oxide composing the superconducting ceramics and a step of bringing the molten fluoride(s) into contact with the surface of a ceramics elongated substrate while reducing temperature distribution of the molten fluoride(s) toward the surface of the ceramics elongated substrate to deposit the composite oxide on the same, thereby to form a superconducting layer. In the first aspect of the present invention, the oxides for composing the superconducting ceramics are generally prepared by independent oxides of respective metal elements for forming the superconducting ceramics. However, oxides each containing two or more metal elements are also available. Further, it is also possible to employ a composite oxide containing all of the metal elements and being different from the superconducting ceramics only in composition ratio. If the oxide superconducting ceramics contains elements for forming anions other than oxygen, compounds containing the said elements may be employed as raw materials with other oxides. Such oxides serving as raw materials are dissolved in a melt of at least one fluoride having a melting point lower than those of the oxides. By such dissolution in the molten fluoride(s), the oxides are rendered reactive with each other, to be capable of forming a composite oxide composing superconducting ceramics. Thus, the composite oxide can be formed at a temperature lower than melting points of the oxides, by utilizing such molten fluoride(s). The fluoride can be arbitrarily selected so far as the same exerts no bad influence on superconductivity etc. of the formed superconducting ceramics. Such a fluoride can be selected from fluorides of metal elements for composing superconducting ceramics, for example. In order to reduce influence exerted on composition of the superconducting ceramics, the mixing rates of the fluorides of the respective metal elements are preferably equal to those of the respective metal elements contained in the superconducting ceramics. However, the fluoride can be prepared by an element other than those for composing the superconducting ceramics. For example, fluorides of lanthanoids are generally available in the case of the aforementioned Y-Ba-Cu oxides etc. The molten fluoride(s), in which the raw-material oxides are dissolved, is brought into contact with the surface of the ceramics elongated substrate, and set in temperature distribution reduced toward the surface of the ceramics elongated substrate. Due to such a temperature gradient of the molten fluoride(s), the composite oxide formed by reaction of the raw-material oxides enters a saturated state of dissolution on the surface of the ceramics elongated substrate to be deposited on the said surface, thereby to form a superconducting layer. The superconducting layer formed according to first aspect of the present invention does not necessarily cover the entire surface of the ceramics elongated substrate, but may only be longitudinally continuous. The composite oxide deposited as the superconducting layer is not necessarily identical in composition rate to the oxides dissolved in the molten fluoride(s). For example, when the aforementioned superconducting ceramics composed of YBa 2 Cu 3 O x is deposited, the ratio Y:Ba:Cu is equal to 1:2:3, while YBa 2 Cu 3 O x can be deposited on the ceramics elongated substrate as primary crystals even if the contents of YO 1.5 , Ba and CuO present in the molten fluoride(s) are 0.8 to 1.2 mols, 1.3 to 2.3 mols and 2.3 to 3.3 mols respectively. Oxides of raw materials corresponding to those forming the deposited composite oxide are continuously supplied into the molten fluoride(s) to be dissolved in the same, thereby to continuously form a superconducting layer of the composite oxide, which is in prescribed composition, on the ceramics elongated substrate. When the superconducting ceramics contains an oxide such as CuO, which is easily decomposed under a high temperature to lose oxygen, the superconducting layer is preferably heated under an oxygen atmosphere. The superconducting layer can be provided with a prescribed amount of oxygen by such heating under the oxygen atmosphere. Oxygen gas partial is preferably 27 to 133 kPa (200 to 1,000 mmHg), and more preferably, 101 kPa (760 mmHg). If the oxygen gas partial pressure is lower than 101 kPa (760 mmHg), nitrogen gas may be mixed to substantially equalize the pressure of the mixed gas to the atmospheric pressure. In the method according to the first aspect of the present invention, the raw-material oxides are molten under a low temperature through use of the molten fluoride(s), whereby superconducting ceramics of homogeneous composition can be obtained while causing no problem of volatilization of volatile elements. In a second aspect of the present invention as defined in claims 4 and 5, the manufacturing method comprises a step of mixing fluorides of cations for composing oxide superconducting ceramics so that the respective cations are equal in ratio to those contained in the superconducting ceramics, a step of longitudinally continuously applying the mixture to at least a part of the surface of a flexible ceramics elongated substrate to form a coating layer and a step of heating the coating layer under an oxygen gas atmosphere to replace fluorine contained in fluorides forming the coating layer by oxygen thereby to convert the composition of the coating layer into that of superconducting ceramics. In the second aspect of the present invention, the cations for composing the oxide superconducting ceramics are generally prepared from metal elements contained in the oxide superconducting ceramics. Such fluorides are employed as raw materials since fluorides can be generally molten under a relatively low temperature. Due to such melting under a low temperature, the cations can be homogeneously mixed while volatilization of volatile elements can be restricted to arbitrarily control the composition ratio. The fluorides of the said cations are so mixed that the rates of the respective cations are equal to those of cations contained in the superconducting ceramics. In case of the aforementioned superconducting ceramics composed of YBa 2 Cu 3 O x , for example, respective fluorides are so mixed that the mole ratio of YF 3 :BaF 2 :CuF 2 is equal to 1:2:3. The mixture may either be obtained by mixing fine particles of respective fluorides and thereafter heating and melting the same, or by simply mixing the fine particles. Thus, the mixture may be applied to the ceramics elongated substrate in a state of a molten liquid or fine particles. In the latter case, the fine particles are heated and molten on the surface of the ceramics elongated substrate after application. The mixture is not adapted to cover the entire surface of the elongated substrate, but may be applied to at least a part of its surface so that the coating layer is continuous in the longitudinal direction. In the method according to the second aspect of the present invention, heat treatment is performed under the oxygen gas atmosphere in order to replace fluorine contained in the fluorides forming the coating layer by oxygen. Oxygen gas partial pressure is preferably 27 to 133 kPa (200 to 1,000 mmHg), and more preferably 101 kPa, (760 mmHg). When the oxygen gas partial pressure is lower than 101 kPa (760 mmHg), nitrogen gas may be mixed to substantially equalize the pressure of the mixed gas to the atmospheric pressure. Among oxide superconducting ceramics materials, known is that containing fluorine. Therefore, fluorine contained in the fluorides may not be entirely replaced by oxygen, but may partially remain intact. Similarly, when the oxide superconducting ceramics contains anions other than oxygen and fluorine, compounds containing such anions may be mixed into the mixture of fluorides, to be left in the final superconducting ceramics forming the coating layer. In the method according to the second aspect of the present invention, the fluorides are employed as raw materials to be molten under a low temperature, whereby superconducting ceramics of homogeneous composition can be obtained. The oxide ceramics superconducting material for forming the oxide ceramics superconducting layer according to the invention has perovskite-type crystal structure, for example. In more concrete terms, examples of such an oxide ceramics superconducting material are Y-Ba-Cu oxides, Y-Sr-Cu oxides, La-Ba-Cu oxides, La-Sr-Cu oxides and the like. Elements forming these oxide ceramics materials may be partially replaced by other elements. Particularly well-known composition showing superconductivity under the temperature of liquid nitrogen is YBa 2 Cu 3 O x (x = 6.3 to 6.9). Examples of ceramics for forming a flexible ceramics elongated substrate are zirconia, alumina, magnesium oxide, strontium titanate and the like. Within these, known are those containing several percent of yttrium oxide for improving flexibility. The ceramics elongated substrate is not particularly restricted in configuration, but the same may be provided in the form of a tape or a round wire. In view of strength and flexibility required for the substrate to obtain the elongated body, the thickness of a tape-type substrate is preferably within a range of 30 to 500 µm while the diameter of a round-wire type substrate is also preferably within a range of 30 to 500 µm. A flexible ceramics elongated substrate in the form of a tape, for example, can be advantageously prepared by a zirconia tape having surface roughness Rmax of about 0.3 µm and rupture strength (at 25°C) of 11,000 kg/cm 2 or an alumina tape having surface roughness of about 0.3 µm and rupture strength of 3,300 kg/cm 2 , to be employed in the present invention. The superconducting ceramics elongated body manufactured according to the method of the present invention must be obtained in a flexible state. Therefore, in case of employing a tape-type ceramics elongated substrate, for example, the thickness of the obtained superconducting ceramics elongated body is preferably not more than 500 µm, and more preferably, not more than 55 µm as a whole. When, on the other hand, a round-wire type ceramics superconducting substrate is employed, for example, the entire diameter of the obtained superconducting ceramics elongated body is preferably selected to be not more than 500 µm, and more preferably, not more than 55 µm. The substrate, the superconducting layer and the protective layer forming the inventive superconducting ceramics elongated body, all of which are prepared from ceramics materials, are approximate in thermal expansion coefficient to each other, to be resistant against a thermal shock, for example. These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. Fig. 1 is a block diagram showing an apparatus for illustrating an embodiment of a fourth aspect of the manufacturing method according to the present invention; Fig. 2 is an enlarged sectional view showing a crucible of the apparatus shown in Fig. 1; Fig. 3 is a block diagram showing an apparatus for illustrating an embodiment of a fifth aspect of the manufacturing method according to the present invention. Description is now made on an embodiment of the first aspect of the manufacturing method according to the present invention. Fig. 1 is a block diagram showing an apparatus for illustrating an embodiment of the fourth aspect of the method according to the present invention. Fig. 2 is an enlarged sectional view of a crucible 55 shown in Fig. 1. A ceramics elongated substrate 51 supplied from a supply reel 52 passes through an oxygen atmosphere furnace 54, to be wound on a take-up reel 53. Within the oxygen atmosphere furnace 54, the crucible 55, containing a fluoride solution 56, is set on the ceramics elongated substrate 51. Raw-material oxides 57 are supplied on the fluoride solution 56. As shown in Fig. 2, an upper portion of the fluoride melt 56 is at a temperature T 1 while its lower portion, which is in contact with the surface of the ceramics elongated substrate 51, is at a temperature T 2 . Such a temperature gradient in the fluoride melt 56 is controlled by heaters 60 and 61, which are provided in upper and lower parts of the oxygen atmosphere furnace 54. Through use of such an apparatus, a superconducting layer 58 was formed on the ceramics elongated substrate 51 by a superconducting ceramics material composed of YBa 2 Cu 3 O x (x = 6.3 to 6.9). The raw-material oxides were prepared by mixed powder of oxides containing 1 mol of YO 1.5 , 2 mols of BaO and 3 mols of CuO, and the fluoride melt was prepared by a fluoride containing 1 mol of YF 3 , 2 mols of BaF 2 and 3 mols of CuF 2 . A fluoride mixed in such a ratio is generally molten in a temperature range of 1,300 to 1,150°C, while the fluoride was molten at 1,200°C in this Example. The mixed powder of the above oxides was supplied in the form of the raw-material oxides 57 on the fluoride melt 56. The temperature at the bottom portion of the crucible 55 was 1,100°C, and the heaters 60 and 61 were so controlled that the temperature T 1 at the upper portion of the crucible 55 was 1,200°C and the temperature T 2 at the lower portion, being in contact with the ceramics elongated substrate 51, was 1,150°C. It is to be noted that, when the temperature T 1 is changed within a range of 1,300 to 1,150°C, the temperature at the bottom portion of the crucible 55 is preferably changed in a range of 1,200 to 980°C responsively. The ceramics elongated substrate 51 was prepared by a zirconia tape of 3 mm in width and 50 µm in thickness. Although the crucible 55 was made of platinum in this Example, a gold one is also employable. Oxygen gas partial pressure in the oxygen atmosphere furnace 54 was controlled to be 101 kPa (760 mmHg). Referring to Fig. 2, the raw-material oxides 57 supplied on the fluoride melt 56 were dissolved in the fluoride melt 56. The process of such dissolution was not clear but it can be presumed that a composite oxide having a low melting point was formed by the raw-material oxides 57 and dissolved in the fluoride melt 56. The raw-material oxides 57 supplied to the fluoride melt 56 were rendered reactive between themselves, to produce a composite oxide composing a superconducting ceramics material. The fluoride melt 56 was set in the temperature gradient of T 1 to T 2 , so that the surface of the ceramics elongated substrate 51 was under the temperature T 2 . Therefore, the composite oxide forming the superconducting ceramics material was saturated in the vicinity of the ceramics elongated substrate 51 to be deposited on the same, thereby to form the superconducting layer 58. Such a superconducting layer 58 was formed on the ceramics elongated substrate 51, which was continuously moved in a direction A. Thus, the superconducting layer 58 was continuously formed on the ceramics elongated substrate 51 and delivered as a superconducting ceramics elongated body 59, to be wound on the take-up reel 53. When the superconducting layer 58 was thus deposited in the lower portion of the crucible 55, new raw-material oxides 57 were dissolved in the fluoride melt 56 by an amount corresponding to that of such deposition. Thus, the raw-material oxides 57 were newly dissolved in the fluoride melt 56 by the amount corresponding to the deposited superconducting layer 58, so that the oxides were regularly present in a constant amount in the fluoride melt 56. Such process was repeated to form the superconducting layer 58 on the ceramics elongated substrate 51. The temperature-resistance characteristic of the superconducting ceramics elongated body obtained in the above manner was measured to recognize that it superconducted at a temperature exceeding 77 K, the boiling point of liquid nitrogen. Further, no disconnection was caused even if the superconducting ceramics elongated body was bent in a radius of curvature of 30 cm while its superconductivity was not damaged. Thus, it has been confirmed that the superconducting ceramics elongated body was highly practicable. Although the superconducting layer was formed under the oxygen atmosphere in the above Example, the first aspect of the present invention is not restricted to formation of the superconducting layer under such an oxygen atmosphere. The fluoride melt 56 may be slightly adhered to the superconducting layer 58 deposited on the surface of the ceramics elongated substrate 51. However, such adhesion causes no problem so far as the solution is prepared by a fluoride which exerts no bad influence on the superconducting ceramics material, as in the Example. Further, the fluoride adhered to the superconducting layer can be converted into an oxide under an oxygen atmosphere, as in the Example. Description is now made on an embodiment of a second aspect of the manufacturing method according to the present invention. Fig. 3 is a block diagram showing an apparatus for illustrating the method according to the second aspect of the present invention. The apparatus shown in Fig. 3 is formed by a melting furnace 74 and an oxygen gas atmosphere furnace 84, and a gold crucible 73 is provided in the melting furnace 74. A fluoride melt 72 prepared by a mixture is contained in the gold crucible 73. A hole 73a is defined in a central portion of the gold crucible 73, so that a ceramics elongated substrate 71 passes through the hole 73a. A heater 75 for heating the fluoride melt 72 is provided around the melting furnace 74. The melting furnace 74 is provided with an inert gas supply port 76 and an inert gas exhaust port 77. Another heater 85 is provided around the oxygen gas atmosphere furnace 84 to control the temperature in the furnace. The oxygen gas atmosphere furnace 84 is provided with an oxygen gas supply port 86 and an oxygen gas exhaust port 87. A mixture of fluorides, containing 1 mol of YF 3 , 2 mols of BaF 2 and 3 mols of CuF 2 was introduced into the gold crucible 73 and heated by the heater 75 to be molten at a temperature of 950°C, thereby to provide the fluoride melt 72. Viscosity of the fluoride solution 72 was 10 to 100 cps. Inert gas was prepared by argon gas, which was supplied from the inert gas supply port 76 and exhausted from the inert gas exhaust port 77, to provide an argon gas atmosphere in the melting furnace 74. A zirconia tape of 50 µm in thickness was employed as the ceramics elongated substrate 71, which was introduced into the melting furnace 74 from above to pass through the fluoride melt 72, and extracted from a lower portion of the melting furnace 74 through the hole 73a of the gold crucible 73. Coating layers 78 of the fluoride melt 72 were provided on both surfaces of the ceramics elongated substrate 71 thus extracted from the hole 73a of the crucible 73. The thickness of each coating layer 78 was about 5 µm. The ceramics elongated substrate 71 thus provided with the coating layers 78 was then introduced into the oxygen gas atmosphere furnace 84. In the oxygen gas atmosphere furnace 84, oxygen gas was supplied from the oxygen gas supply port 86 and exhausted from the oxygen gas exhaust port 87, so that oxygen gas partial pressure was 101 kPa (760 mmHg). The oxygen gas atmosphere furnace 84 was heated and temperature-controlled by the heater 85. Fluorine contained in the fluorides forming the coating layers 78 was replaced by oxygen in the oxygen gas atmosphere furnace 84, whereby composition of the coating layers 78 was converted into that of superconducting ceramics. The ceramics elongated substrate 71, thus provided with the coating layers 78 composed of superconducting ceramics, was extracted from the oxygen gas atmosphere furnace 84 as a superconducting ceramics elongated body 90. The coating layers of the superconducting ceramics elongated body obtained in the aforementioned manner were analyzed by powder X-ray diffraction, to recognize that crystals forming the coating layers were in K 2 NiF 4 type perovskite structure, which is typical crystal structure of high-temperature superconducting ceramics. The superconducting ceramics elongated body superconducted at the temperature of liquid nitrogen. Even if the superconducting ceramics elongated body was bent in a radius of curvature of about 30 cm, no cracking was caused in the ceramics elongated substrate and the coating layers, while its superconductivity was not damaged. Although the coating layers were formed on both surfaces of the tape-type ceramics elongated substrate, such a coating layer may be formed only on one surface. Further, the tape-type ceramics elongated substrate may be replaced by that in the form of a round wire. A mixture of fluoride fine particles may be applied to a substrate to be heated/molten upon application, and then heated under an oxygen gas atmosphere to convert the composition of the coating layer into that of superconducting ceramics. As hereinabove described, the superconducting ceramics elongated body manufactured according to the present invention is flexible since the superconducting layer is formed on at least a part of the surface of the flexible ceramics elongated substrate. Thus the superconducting ceramics elongated body according to the present invention, which can be wound on a reel, for example, is highly practicable. The superconducting ceramics elongated body manufactured according to the present invention is not restricted to a power transmission medium in the field of energy, but is also applicable to a switching element, a storage device, a magnetic flux sensor, an amplifying element or the like, which is employed as a device in the field of electronics. Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the scope of the present invention being limited only by the terms of the appended claims.

Claims: A method of manufacturing a superconducting ceramics elongated body (59) by forming a longitudinally continuous superconducting layer (58) of oxide superconducting ceramics on at least a part of the surface of a flexible ceramics elongated substrate (51), said method comprising: a step of dissolving oxides (57) serving as raw materials for said superconducting ceramics in a melt (56) of at least one fluoride having a melting point lower than those of said oxides; a step of reacting said oxides (57) in said molten fluoride(s) (56) to produce a composite oxide forming said superconducting ceramics; and a step of bringing said molten fluoride(s) (56) containing said composite oxide into contact with the surface of said ceramics elongated substrate (51) while reducing the temperature of said molten fluoride(s) (56) toward the surface of said ceramics elongated substrate (51) to deposit said composite oxide on the surface of said ceramics elongated substrate (51), thereby to form said superconducting layer (58). A method for manufacturing a superconducting ceramics elongated (59) body in accordance with claim 1, wherein said dissolving step comprises a step of dissolving said oxides (57) in a melt (56) of a mixture of fluorides of metal elements for composing said superconducting ceramics (58). A method of manufacturing a superconducting ceramics elongated (59) body in accordance with claim 2, wherein the rates of respective metal elements contained in said mixture (56) of said fluorides are equal to those of respective metal elements contained in said superconducting ceramics (58). A method of manufacturing a superconducting ceramics elongated body (90) comprising: a step of mixing respective fluorides of cations for composing oxide superconducting ceramics (78) so that the rates of respective said cations are equal to those of cations contained in said superconducting ceramics (78) and heating and melting said mixture (72); a step of longitudinally continuously applying said mixture (72) to at least a part of the surfaces of a flexible ceramics elongated substrate (71) to form a coating layer (78); and a step of heating said coating layer (78) under an oxygen gas atmosphere to replace fluorine contained in fluorides forming said coating layer (78) by oxygen thereby to convert the composition of said coating layer (78) into that of said superconducting ceramics (78). A method of manufacturing a superconducting ceramics elongated body (90) comprising: a step of mixing respective fluorides of cations in the form of fine particles for composing oxide superconducting ceramics (78) so that the rates of respective said cations are equal to those of cations contained in said superconducting ceramics (78); a step of longitudinally continuously applying said mixture (72) in the form of fine particles to at least a part of the surface of a flexible ceramics elongated substrate (71) and heating and melting said mixture after applying the same in the form of fine particles to form a coating layer (78) ; and a step of heating said coating layer (78) under an oxygen gas atmosphere to replace fluorine contained in fluorides forming said coating layer (78) by oxygen thereby to convert the composition of said coating layer (78) into that of said superconducting ceramics (78).

Inventors: HAYASHI NORIKI, INAZAWA SHINJI, MIYAZAKI KENJI, TAKAHASHI KENICHI, TAKANO SATOSHI, YOSHIDA NORIYUKU, HAYASHI, NORIKI, INAZAWA, SHINJI, MIYAZAKI, KENJI, TAKAHASHI, KENICHI, TAKANO, SATOSHI, YOSHIDA, NORIYUKU, HAYASHI, NORIKI, C/O OSAKA WORKS OF SUMITOMO, INAZAWA, SHINJI, C/O OSAKA WORKS OF SUMITOMO, MIYAZAKI, KENJI, C/O OSAKA WORKS OF SUMITOMO, TAKAHASHI, KENICHI, C/O OSAKA WORKS OF SUMITOMO, TAKANO, SATOSHI, C/O OSAKA WORKS OF SUMITOMO, YOSHIDA, NORIYUKU, C/O OSAKA WORKS OF SUMITOMO
Applicants: SUMITOMO ELECTRIC INDUSTRIES, SUMITOMO ELECTRIC INDUSTRIES, LTD.
Application year: 1988
Main classification: H01L39
IPC codes: C04B41, H01L39, C04B35, B32B18, C01G3