SEMICONDUCTOR LASER DEVICE AND METHOD OF MANUFACTURING SAME

Abstract: The invention relates to a semiconductor laser device having a coating (31) on surfaces (22) of a semiconductor body intended for emanation of a laser beam. For protection of these surfaces against attack during operation of the laser this coating comprises a layer of a compound having at least one alkyl group.

Description: The invention relates to a semiconductor laser device having a coating on surfaces of a semiconductor body intended for emanation of a laser beam and to a method of manufacturing such a semiconductor laser device. A semiconductor laser device of the kind mentioned in the opening paragraph is known, for example, from J.Appl. Phys. 50 (5), 3122-3132 (May 1979). In this publication, an aluminium oxide layer is used as coating. The function of the aluminium oxide layer is inter alia to provide for protection at the area of the emanation of the laser beam against attack of the emanation surfaces under the influence of water vapour present. US-PS 4,317,086 discloses a semiconductor laser device in which the light emitting surface is provided with a dielectric structure consisting of three layers, to provide a high level of refractivity, so that more of the optical radiation is reflected back into the optical radiation cavity. The primary function of the outer layer is to protect the centre layer from water vapour and oxidation. The outer layer can be made of aluminium oxide or of the organic material perylene. Presumably, however, water vapour is not the only cause of problems at the emanation surface and oil present during the different operations may also play a part with an aluminium oxide layer as coating, for example, due to the fact that the oil at the surface of the aluminium oxide layer is decomposed and scatters the emanating laser beam. The present invention has inter alia for its object to avoid the problems described at least to a considerable extent. The invention is based inter alia on the recognition of the fact that with another type of protection, problems at the emanation surfaces can be avoided over a wide range of impurities. According to the invention, the semiconductor laser device menioned in the opening paragraph is therefore characterized in that the coating comprises an alkyl compound obtained by reaction of hydroxyl groups present at the surfaces with a compound chosen from the group comprising a) silanes which are substituted with a least one alkyl group which may be substituted with at least one fluorine atom and b) alkyl carboxilic acids having at least seven carbon atoms. Such coatings provide for a very satisfactory protection of the emanation surface against contamination by water and oil. In a preferred embodiment of the semiconductor laser device according to the invention the surfaces are successively provided with a layer of transparent dielectric material having a refractive index of 1,3 to 2,5 and the alkyl compound coating. The said dielectric materials provide the desired optical properties for the emanation surface. Preferably, the transparent dielectric material is aluminium oxide or silicon nitride. Preferably, the silane is 1-(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-dimethylchlorosilane or 1-(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-triethoxy silane and the alkylcarboxylic acid is stearic acid. The invention relates to a method of manufacturing a semiconductor laser device having a coating on surfaces of a semiconductor body intended for emanation of a laser beam. According to the invention the surfaces are cleaned and then provided with a coating comprising an alkyl compound obtained by reaction of hydroxyl groups present at the surfaces with a compound chosen from the group comprising a) silanes which are substituted with at least one alkyl group which may be substituted with at least one fluorine atom and b) alkyl carboxilic acids having at least seven carbon atoms. Very favourable results are then obtained if the cleaning treatment used is a treatment with ozone under irradiation with ultraviolet radiation. A very favourable step of applying the compound consists in that the cleaned surface is wetted with a solution of the compound, for example the carboxylic acid. If the vapour tension of the compound is sufficiently high, for example of the silane, the alkyl compound can be formed when the semiconductor body is situated in the vapour of the silane or of a solution of the silane boiling under reflux. In the drawing: Fig. 1 shows diagrammatically and in elevation a part of the present semiconductor laser device, Fig. 2 is a sectional view taken on the line II-II in Fig. 1 of a semiconductor laser device according to the prior art, Fig. 3 is a sectional view taken on the line II-II in Fig. 1 of a first embodiment of the semiconductor laser device according to the invention, and Fig. 4 is a sectional view taken on the line II-II in Fig. 1 of a second embodiment of the semiconductor laser device according to the invention. The present semiconductor laser device (cf. Figures 1 and 2) has a coating 21 on surfaces 22 of a semiconductor body 1 intended for emanation of a laser beam. The semiconductor body 1 is soldered on a copper body 2 serving for the dissipation of heat developed during operation of the semiconductor laser device. Reference numeral 3 denotes a second connection of the semiconductor laser device. In order to avoid problems with usual coating 21, for example of aluminium oxide, due to the presence of, for example, oil, which is decomposed on the surface of he coating and causes the laser beam to change its shape and direction, according to the invention the coating 31 comprises (cf. Figures 3 and 4) an alkyl compound obtained by reaction of hydroxyl groups present at the surfaces 22 with a compound chosen from the group comprising a) silanes which are substituted with at least one alkyl group which may be substituted with at least one fluorine atom and b) alkyl carboxilic acids having at least seven carbon atoms. In order to obtain very favourable optical properties the surfaces are successively provided with a layer of transparent dielectric material having a refractive index of 1,3 to 2,5 and the coating 31 comprising the alkyl compound. As transparent dielectric material use is preferably made of aluminium oxide or silicon nitride. The semiconductor laser device according to the invention comprises in a usual manner, for example, an n -type substrate 23 of GaAs, an n -type layer 24 of Ga 0.5 Al 0.5 As, an active layer 25 of Ga 0.85 Al 0.15 As, a p -type layer 26 of Ga 0.5 Al 0.5 As, a p -type layer 27 of GaAs and metal contact layers 28 and 29. The dielectric layer 42 of aluminium oxide or silicon nitride, which is preferably present, may also be provided in a usual manner. For forming the coating 31, a wide choice of compounds is possible. Preferably, substituted silanes, such as 1-(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-dimethyl chlorosilane or 1-(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-triethoxy silane, are used. Alkyl carboxylic acids, such as stearic acid, may also be used very satisfactorily as compound. Before the coating is provided, a cleaning treatment is carried out, preferably a cleaning treatment in ozone. In this treatment, for example an ozone reactor is used of UVP Ltd. (Science Park, Milton Road, Cambridge, England). In such a treatment, silicon nitride surfaces are also activated for the subsequent conversion. The coating may be applied by immersing the semiconductor body in a solution of a alkyl carboxilic acid in toluene or by subjecting this body to a vapour of a silane. Preferably, the compound is applied by arranging the semiconductor body in vapour of a solution of, for example, 2% of the silane in toluene, this solution being boiled under reflux. It has been found that the thickness of, for example, the layer of silane on the semiconductor body (and the aluminium oxide or silicon nitride layer, respectively) is extremely small: about 1 molecule of silane per nm² is present on the surfaces. The coating 31 can be formed after the semiconductor body has been provided in a usual manner with a contact 3. As transparent dielectric material, use may also be made, for example, of silicon oxide or hafnium oxide. As substrate 23 use may also be made of InP, while as active layer 25 use may also be made of InGaAsP or InGaAs. Alkyl silanes other than the aforementioned perfluorinated alkyl silanes may also be used.

Claims: Semiconductor laser device having a coating (31) on surfaces (22) of a semiconductor body (1) intended for emanation of a laser beam, characterized in that the coating (31) comprises an alkyl compound obtained by reaction of hydroxyl groups present at the surfaces (22) with a compound chosen from the group comprising a) silanes which are substituted with at least one alkyl group which may be substituted with at least one fluorine atom and b) alkyl carboxilic acids having at least seven carbon atoms. Semiconductor laser device as claimed in Claim 1, characterized in that the surfaces (22) are successively provided with a layer of transparent dielectric material (42) having a refractive index of 1,3 to 2,5 and the coating (31) comprising the alkyl compound. Semiconductor laser device as claimed in Claim 2, characterized in that the transparent dielectric material (42) is aluminium oxide. Semiconductor laser device as claimed in Claim 2, characterized in that the transparent dielectric material (42) is silicon nitride. Semiconductor laser device as claimed in any one of Claims 1 to 4, characterized in that the silane is 1(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-dimethyl chlorosilane or 1(heptadecafluoro-1,1,2,2-tetrahydrodecyl)-triethoxysilane. Semiconductor laser device as claimed in any one of Claims 1 to 4, characterized in that the alkyl carboxilic acid is stearic acid. Method of manufacturing a semiconductor laser device having a coating (31) on surfaces (22) of a semiconductor body (1) intended for emanation of a laser beam, characterized in that the surfaces (22) are cleaned and then provided with a coating (31) comprising an alkyl compound obtained by reaction of hydroxyl groups present at the surfaces (22) with a compound chosen from the group comprising a) silanes which are substituted with at least one alkyl group which may be substituted with at least one fluorine atom and b) alkyl carboxilic acids having at least seven carbon atoms. Method as claimed in Claim 7, characterized in that the surfaces (22) are cleaned by a treatment with ozone under irradiation with ultraviolet radiation.

Inventors: PONJEE, JOHANNES JACOBUS, TIJBURG, RUDOLF PAULUS
Applicants: N.V. PHILIPS' GLOEILAMPENFABRIEKEN
Application year: 1988
Main classification: H01S3
IPC codes: H01S5, H01L33, H01L21