MEMBER FOR SEMICONDUCTOR APPARATUS

Abstract: A member for a semiconductor apparatus for carrying or holding a semiconductor device (4), obtained by joining an aluminum nitride substrate (1) and a radiating substrate (6), comprises an insulating member (1) formed by an aluminum nitride sintered body to be provided thereon with the semiconductor device (4) and a radiating member (6) to be joined to the insulating member. A metal material for forming the radiating member has thermal conductivity of at least 120 W/mK and a thermal expansion coefficient within a range of 4 to 6.0 x 10⁻⁶/K⁻¹. Preferably the material forming the radiating member is prepared by a tungsten alloy containing copper by not more than 5 percent by weight.

Description: The present invention relates to a member for a semiconductor apparatus, and more particularly, it relates to a member for a semiconductor apparatus such as a circuit substrate, which must be of high thermal conductivity to be mounted with a semiconductor device of high calorific power such as a high power transistor or a laser diode. A member for a semiconductor apparatus to be mounted with a semiconductor device is generally formed by an insulating member and a radiating member joined to the insulating member. For example, such a member for a semiconductor apparatus is formed by an insulating substrate to be provided thereon with a semiconductor device and, a radiating substrate joined to the back surface of the insulating substrate by soldering through silver solder or the like. In this case, generally required for the insulating substrate are high electric insulability for insulation from the semiconductor device, high mechanical strength and high thermal conductivity for dissipating heat generated from the semiconductor device. The radiating substrate must have high thermal conductivity similarly to the insulating substrate, while its thermal expansion coefficient must be approximate to those of materials forming a semiconductor substrate, the insulating substrate and the like. In general, alumina (Al₂O₃) is selected as a material satisfying the aforementioned properties for forming the insulating substrate employed in such a member for a semiconductor apparatus. However, although alumina is excellent in electric insulability and mechanical strength, its heat dissipation property is inferior due to small thermal conductivity of 17 Wm⁻¹K⁻¹. Thus, it is improper to carry a field-effect transistor (FET) of high calorific power, for example, on an alumina substrate. In order to carry a semiconductor device of high calorific power, another type of insulating substrate is prepared by beryllia (BeO) having high thermal conductivity of 260 Wm⁻¹K⁻¹, whereas beryllia is toxic and hence it is troublesome to take safety measures in employment of such an insulating substrate. The radiating substrate is generally prepared by a material satisfying the aforementioned properties, which material is selected from metal materials such as various types of copper alloys, copper-tungsten alloys and copper-molybdenum alloys. For example, Japanese Patent Laying-Open Gazette No. 21032/1984 (JP-A-60165 800) discloses a substrate of high thermal conductivity for carrying a semiconductor device, the material of which is prepared by mixing 2 to 30 percent by weight of copper into tungsten or molybdenum. This substrate is employed as a radiating substrate which is suitably joined to an alumina substrate having inferior heat dissipation property, and difference in thermal expansion coefficient between the same and alumina is relatively small. Thus, this prior art example is insufficient in heat dissipation property, which is required entirely over a substrate for carrying a semiconductor device. In recent years, nontoxic aluminum nitride (AlN) has generated great interest as a material for such an insulating substrate for carrying a semiconductor device of high calorific power because of its high thermal conductivity of about 200 Wm⁻¹K⁻¹, which value is substantially equal to that of beryllia, as well as its electric insulability and mechanical strength which are equivalent to those of alumina. However, (as is known from non-published experimental studies,) when an aluminum nitride substrate provided with a metallized layer is soldered by a soldering metal such as gold solder or silver solder, for example, to a generally employed radiating substrate of a copper-tungsten alloy or copper-molybdenum alloy containing 10 to 25 percent by weight of copper, the aluminum nitride substrate may be cracked or the radiating substrate of the copper-tungsten-alloy or the copper-molybdenumalloy may be warped. Such a phenomenon results from thermal stress caused by difference in thermal expansion coefficient between the copper-tungsten alloy or the copper-molybdenum alloy and aluminum nitride during a cooling step upon soldering, which is performed at a temperature of 500 to 950°C. This thermal stress may conceivably be left in the aluminum nitride substrate as tensile residual stress, to crack the aluminum nitride substrate and/or warp the radiating substrate of the copper-tungsten alloy or the copper-molybdenum alloy. When an aluminum nitride substrate is joined to a radiating substrate of a copper-tungsten alloy or a copper-molybdenum alloy by cold soldering or soldering, the aluminum nitride substrate or an interface-between the same and a metallized layer is cracked by a thermo cycle test (-55°C to +150°C, 1000 cycles) or a thermal shock test to cause a significant problem in practice, even if no warp nor crack is recognized upon joining. In a sample of an aluminum nitride substrate joined to a radiating substrate of a copper-tungsten alloy or a copper-molybdenm alloy by silver soldering, thermal fatigue or thermal stress was caused in a thermo cycle test or a thermal shock test due to difference in thermal expansion coefficient between the radiating substrate of the copper-tungsten alloy or the copper-molybdenum alloy and the aluminum nitride substrate, similarly to the above. Such a problem of thermal stress or thermal fatigue is aggravated with increase in junction area. Thermal expansion coefficients of the copper-tungsten alloy or the copper-molybdenum alloy having the aforementioned composition and aluminum nitride are 6.5 to 10 x 10⁻⁶/K and 4 to 5 x 10⁻⁶/K respectively, within a range of the room temperature to about 950°C. Further, these materials, having high Young's modulus of 27000 to 35000 Kg/mm² and 35000 to 37000 Kg/mm² respectively, are hardly plastically deformed. Thus, when the copper-tungsten alloy or the copper-molybdenum alloy of the aforementioned composition and aluminum nitride are joined with each other by soldering, large-thermal stress is conceivably caused in a cooling step. An object of the present invention is to provide a member for a semiconductor apparatus by employing an insulating member of aluminum nitride having excellent heat dissipation property to be mounted, with a semiconductor device of high calorific power, so that a radiating member mainly formed of a metal material having high heat radiation property can be joined to the insulating member with no crack nor warp. The inventors have made deep study to solve the aforementioned problem, to find a metal material having a thermal expansion coefficient substantially equal to that of aluminum nitride and high heat radiation property, which material is suitably applied to a radiating member to be joined to an insulating member of aluminum nitride for preventing cracking or warping caused by thermal stress in a cooling step upon soldering. A member for a semiconductor apparatus in accordance with the present invention, being adapted to carry or hold a semiconductor device, comprises the features as set out in claim 1. The thermal expansion coefficient of the metal material forming the radiating member joined to the insulating member is so selected to be within the above range that the same is substantially equal to that of aluminum nitride, whereby the radiating member is not deformed and no crack is caused in the insulating member of aluminum nitride in junction through soldering. In view of heat radiation property, thermal conductivity of aluminum nitride joined to the radiating member is within a range of 120 to 280 Wm⁻¹K⁻¹, and hence the entire member in accordance with the present invention can be retained in high heat radiation property. Preferably the metal material forming the radiating member includes tungsten. The thermal expansion coefficient of tungsten is 4.5 x 10⁻⁶/K, which value is substantially equal to that of aluminum nitride. Thus, even if an aluminum nitride substrate is joined to a tungsten metal plate by soldering at 800 to 950°C, the tungsten metal plate is not deformed and no crack is caused in the aluminum nitride substrate. The metal material forming the radiating member may include a tungsten alloy, which contains at least nickel, copper, iron or cobalt. The thermal expansion coefficient of such a tungsten alloy is increased as the content of the above metal component(s) is increased, to extremely differ from that of aluminum nitride. Thus, the content of each metal component is limited to be not more than 10 percent by weight so that the thermal expansion coefficient of the tungsten alloy is substantially equal to that of aluminum nitride. If the total content of one or more such metal components is less than 0.01 percent by weight, a problem is caused in machinability of a tungsten alloy plate. Further, consideration must be made on thermal conductivity, which is one of properties required for the radiating member mainly formed of the tungsten alloy. The content of each metal component is limited to be not more than 10 percent by weight, so that thermal conductivity of the tungsten alloy is at least 120 W/m·K. In view of thermal expansion coefficient, machinability and thermal conductivity, the content of each metal component is preferably within a range of 0.01 to 10 percent by weight. In particular, the most preferable tungsten alloy contains 1 to 7 percent by weight of nickel, 0.1 to 4 percent by weight of copper and 0.1 to 2 percent by weight of iron. It has been recognized that the thermal expansion coefficient is extremely increased in a tungsten alloy obtained by adding at least 10 percent by weight of copper to tungsten. The thermal expansion coefficient of a copper-tungsten alloy containing only copper is increased with increase in the content of copper, to extremely differ from that of aluminum nitride. In order to attain a thermal expansion coefficient substantially equal to that of aluminum nitride, it is optimum to employ a radiating member mainly formed of a copper-tungsten alloy containing 0.1 to 5 percent by weight of copper. If the copper content is not more than 0.1 percent by weight, cutting-work of a copper-tungsten alloy plate is difficult while thermal conductivity, which is an excellent property of the copper-tungsten alloy plate, is reduced. If the copper content exceeds 5 percent by weight, the thermal expansion coefficient of the copper-tungsten alloy exceeds that of aluminum nitride, as hereinabove described. The metal material forming the radiating member may include molybdenum. The thermal expansion coefficient of molybdenum is 5.5 x 10⁻⁶/K, which value is substantially equal to that of aluminum nitride. Thus, even if an aluminum nitride substrate is joined to a molybdenum metal plate by soldering at 800 to 950°C, the molybdenum metal plate is not deformed and no crack is caused in the aluminum nitride substrate. The insulating member of aluminum nitride is preferably employed as a substrate having a major surface to be provided thereon with a semiconductor device. Alternatively, the insulating member may be applied to a covering member provided above a semiconductor device to protect the same, which covering member forms a cap for airtightly sealing a semiconductor device provided on an insulating substrate, for example. When the insulating member is employed as a substrate for carrying a semiconductor device or a covering member for protecting a semiconductor device, the inventive member for a semiconductor apparatus is adapted to conduct heat generated from the semiconductor device to the insulating member and a radiating member, thereby to dissipate the same to the exterior. The insulating member of aluminum nitride preferably includes a sintered body. The insulating member of aluminum nitride is preferably provided on its junction surface with a metallized layer, which contains at least tungsten or molybdenum, at least one aluminum compound within aluminum nitride aluminum oxide and aluminum oxynitride, and calcium oxide or yttrium oxide, to attain preferable junction strength and thermal conductivity. The inventive member for a semiconductor apparatus further comprises a soldering member for joining the metallized layer to the radiating member, and a plating layer is provided in a junction surface of the metallized layer with a soldering member to uniformly perform stabilized soldering. Namely, wettability between the soldering member and the metallized layer can be improved by provision of the plating layer. Another plating layer provided in a junction surface of the radiating member with the soldering member functions similarly to the above. Such plating layers are preferably formed by nickel plating. Such nickel plating is preferably performed particularly when processing such as gold plating is performed in a later step, in order to improve adhesion and precipitation properties of gold plating for forming a uniform gold plating layer. According to the inventive member for a semiconductor apparatus, a metal material having prescribed thermal conductivity and thermal expansion coefficient is, employed as a main material for forming a radiating member, thereby to prevent cracking of the insulating member and warping of the radiating member upon joining of the insulating member of aluminum nitride and the radiating member. Thus, a reliable member for a semiconductor apparatus can be easily obtained to be applied to a substrate for carrying a semiconductor device, a covering member for sealing a semiconductor device or the like. These and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. Figs. 1A and 1B are process drawings schematically showing two exemplary methods of manufacturing a member for a semiconductor apparatus in accordance with the present invention; Figs. 2A, 2B and 2C are a plan view and sectional views showing an example of junction structure in a member for a semiconductor apparatus in accordance with the present invention, such as junction structure between a lead frame, an aluminum nitride substrate and a radiating substrate; Fig. 3 is a sectional view showing an embodiment of a member for a semiconductor apparatus in accordance with the present invention, which is applied to a heat sink member for a semiconductor device such as a light emitting diode (LED) or a laser diode (LD); Fig. 4 is a sectional view showing another embodiment of the inventive member for a semiconductor apparatus, which is applied to a part of a cap for airtightly sealing a semiconductor device to serve as a covering member; and Fig. 5 is a side elevational view showing a portion subjected to measurement of a warp caused in a radiating member joined to an aluminum nitride substrate. As hereinabove described, the present invention is adapted to improve the technique of forming a member for a semiconductor apparatus by employing an insulating member of aluminum nitride. Aluminum nitride employed in the form of a sintered body in the present invention is obtained by the following method, for example: The insulating member formed by an aluminum nitride sintered body employed in the present invention, preferably being mainly composed of aluminum nitride, contains 0.01 to 1.0 percent by weight of an element belonging to the group IIIa of the periodic table and 0.001 to 0.5 percent by weight of oxygen, and its thermal conductivity is at least 180 Wm⁻¹K⁻¹. First, at least one compound containing a rare earth element is mixed with powder of aluminum nitride so that its content is 0.01 to 1.0 percent by weight in rare earth element conversion A forming additive is prepared by paraphine, PVD or PEG. A substance, such as phenol resin, being decomposed to leave carbon, carbon powder, graphite powder or the like may be added to control residual carbon in the sintered body. The rare earth compound is prepared by stearic acid, palmitic acid, alkoxide nitrate, carbonate, hydroxide or the like. Preferably employed is a high molecule compound such as stearic acid. Such a compound is conceivably adapted to reduce the content of the rare earth element to enable good mixing with aluminum nitride powder. In particular, stearic acid is most preferable in view of mixability with aluminum nitride powder, the amount of residual carbon etc. in addition to its function as a forming additive. The aluminum nitride powder must be formed by fine uniform particles. Preferably its average particle size is not more than 1 µm, and the oxygen content is not more than 2.0 percent by weight. Such aluminum nitride, powder is obtained by a reduction nitriding method (method by reduction nitriding of aluminum oxide), since it is difficult to obtain the same by a direct nitriding method (method by nitriding of metal aluminum). In order to obtain the powder by the direct nitriding method, sufficient consideration must be made on reaction control, classification of the particle size and the like. Then the mixed powder is shaped into a prescribed configuration and sintered in a non-oxidizing atmosphere containing nitrogen. In order to attain high thermal conductivity, it is preferable to sinter the substance at a temperature of 1000 to 2100°C for at least five hours, so that its average particle size is at least 5µm. After such sintering, it is preferable to quickly carry out a cooling step. If the substance is slowly cooled, a sintering additive is precipitated and the sintered face is extremely deteriorated. Therefore, the sintered body is preferably cooled to a temperature of 1500°C at a rate of at least 200°C/h. The steps of forming metallized layer on the surface of a substrate formed by the aluminum nitride sintered body obtained in the aforementioned manner are performed as follows: First, a substrate of the aluminum nitride sintered body is prepared by the aforementioned method. A material for the metallized layer is prepared by kneading powder of a calcium compound, that of an aluminum compound and metal powder of tungsten or molybdenum with addition of an organic binder such as vehicle, to provide metal paste. The contents of the respective components may be within the ranges of 40 to 98 percent by weight of the metal powder, 1 to 25 percent by weight of the aluminum compound and 1 to 35 percent by weight of calcium oxide. In order to perform a later sintering step at a low temperature, copper or nickel may be added as a catalyst for reducing the sintering temperature The metal paste thus provided is applied to the surface of the substrate formed by the aluminum nitride sintered body. The substrate formed by the aluminum nitride sintered body is fired in an inert atmosphere of nitrogen or the like at a temperature of 1500 to 1800°C, to be provided with a metallized layer on its surface. A metallized layer prepared by metal powder of tungsten and containing 1 to 10 percent by weight of aluminum oxide, employed as the aluminum compound, and 1 to 20 percent by weight of calcium oxide, or that prepared by metal powder of molybdenum and containing 1 to 10 percent by weight of aluminum oxide, employed as the aluminum compound, and 1 to 35 percent by weight of calcium oxide is preferable in view of adhesion between the substrate formed by the aluminum nitride sintered body and the metallized layer and thermal conductivity. The steps of forming a metallized layer on the surface of a substrate formed by the aluminum nitride sintered body may be performed as follows, by sintering an aluminum nitride formed body coated with the metal paste at one time. First, a substrate of the aluminum nitride formed body is prepared by shaping the aforementioned mixed powder into a prescribed configuration such as a green sheet. A material for the metallized layer is prepared by kneading powder of tungsten and at least one additive selected from a group of aluminum oxide, aluminum nitride, calcium oxide, yttrium oxide and stearic acid yttrium and the like, to provide metal paste, similarly to the above. The metal paste thus provided is applied to the surface of the substrate formed by the aluminum nitride formed body, by printing or coating. The substrate formed by the aluminum nitride formed body is sintered with the metal paste similarly to the above conditions, to be provided with a metallized layer on the surface of a substrate formed by the aluminum nitride sintered body. Thus, the aluminum nitride sintered body with the metallized having high thermal conductivity can be obtained. Description is now made on a typical method of forming the member for a semiconductor apparatus. in accordance with the present invention. Figs. 1A and 1B are process drawings showing two methods of manufacturing the member for a semiconductor apparatus in accordance with the present invention. Referring to Fig. 1A, an aluminum nitride sintered substrate is first prepared. Then, the metal paste obtained through the aforementioned method is applied to the surface of the aluminum nitride sintered substrate Thereafter the metal paste thus applied is dried. Then the aluminum nitride sintered substrate is fired in an inert gas atmosphere which is heated to a prescribed temperature. The above steps may be performed as follows. Referring to Fig 1B, an aluminum nitride formed substrate is first prepared. Then, the metal paste obtained through the aforementioned method is applied to the surface of the aluminum nitride formed substrate Thereafter the metal paste thus applied is dried. Then the aluminum nitride formed substrate is sintered with the metal paste in an inert gas atmosphere which is heated to a prescribed temperature. Thus, an aluminum nitride sintered substrate with a metallized layer is formed. After a metallized layer is formed on the aluminum nitride sintered substrate, nickel plating is performed on the surface of the metallized layer. Heat treatment is performed at a temperature of about 800°C to sinter the nickel plating, thereby to improve strength and airtightness of the same. On the other hand, nickel plating is also performed on the surface of a heat sink member, serving as a radiating member, which is joined to the aluminum nitride sintered substrate, similarly to the above. Then soldering is performed on the nickel plating surface in order to join the aluminum nitride sintered substrate to the heat sink member. Further, gold plating is performed on such junction. Thus, the member for a semiconductor apparatus in accordance with the present invention can be manufactured. Description is now made on an embodiment of a member for a semiconductor apparatus in accordance with an aspect of the present invention, which is manufactured along the aforementioned steps, such as a member comprising an aluminum nitride substrate joined to a lead frame on its surface and to a heat sink member on its back surface, with reference to the drawings. Fig. 2A is a plan view showing an embodiment which is applied to a substrate for carrying a semiconductor device, Fig 2B is a sectional view of the substrate and Fig. 2C is a sectional view showing a junction between a heat sink member 6 and an aluminum nitride substrate 1 in detail. Referring to these figures the aluminum nitride substrate 1, implementing the inventive member for a semiconductor apparatus, is partially formed on its surface with a metallized layer 2 in accordance with the aforementioned steps, and a lead frame 3 is joined to the metallized layer 2 through soldering by a soldering metal or the like. Another metallized layer 2 is formed on a part of the back surface of the aluminum nitride substrate 1 in accordance with the aforementioned steps, while the heat sink member 6 is joined to the metallized layer 2 through soldering by a soldering metal or the like A semiconductor device 4 such as an FET of high calorific power is carried on a prescribed position of the aluminum nitride substrate 1, to be connected with the metallized layer 2 or the lead frame 3 by a bonding wire . As shown in Fig. 2C, a thin plating layer 8 is formed on the metallized layer 2 in the junction between the aluminum nitride substrate 1 and the heat sink member 6, while a plating layer 7 is formed at need on the surface of the heat sink member 6, in order to stabilize wettability of a soldering metal 9. Description is now made on another embodiment of a member for a semiconductor apparatus in accordance with another aspect of the present invention, which is applied to a radiating substrate for carrying a semiconductor device such as a diode having high calorific power, for example, with reference to Fig. 3. Referringto Fig. 3, an aluminum nitride substrate 1 is mounted on a heat sink member 6, serving as a radiating member mainly formed of the metal material in accordance with the present invention, through a metallized layer 2 similarly to the above, while a semiconductor device 4 such as a light emitting diode (LED) or a laser diode (LD) is joined on the aluminum nitride substrate 1. The semiconductor device 4 is joined on another metallized layer 2 which is formed on the surface of thealuminum nitride substrate 1. In this case, the aluminum nitride substrate 1 serves as a heat sink member. The aluminum nitride substrate 1 and the heat sink member 6 are joined with each other in a similar manner to the above description with reference to the junction structure between the aluminum nitride substrate provided with the lead frame and the heat sink member. Description is now made on the structure of a cap to which a member for a semiconductor apparatus in accordance with the present invention is applied, with reference to Fig. 4. A metallized layer 2 is provided on the surface of a peripheral edge portion of a covering member 11 formed by an aluminum sintered body. A frame member 13 formed by a layer of a metal such as an iron-nickel alloy is joined to the metallized layer 2 by a soldering metal or the like. The lower end of the frame member 13 is joined to a ceramic substrate 101 through another metallized layer 2. A semiconductor device 4 is carried on the ceramic substrate 101. A heat sink member 6 is mounted on the upper surface of the covering member 11, so that heat generated from the semiconductordevice 4 is dissipated by the heat sink member 6 through the covering member 11, to improve a cooling effect. The covering member 11 of the aluminum nitride sintered body and the heat sink member 6 are joined with each other in a similar manner to the above description with reference to the junction structure between the aluminum nitride, substrate provided with the lead frame and the heat sink member. The soldering metal employed for such junction is preferably prepared by silver solder, while another soldering material is also available so far as a thin metal coating layer having good wettability to the soldering material can be formed on the junction surface of the heat sink member 6 or the metallized layer 2 to strongly join the, covering member 11 and the heat sink member 6 with each other. The function of such a thin metal coating layer, such as a plating layer, is as hereinabove described with reference to the example of junction structure between the aluminum nitride substrate provided with the lead frame and the heat sink member. Description is now made on Examples 1 to 12, which were carried out by employing samples prepared by substrates of the aluminum nitride sintered body obtained by the aforementioned method. Example 1 Aluminum nitride sintered substrates of 1.3 mm in thickness were prepared by the aforementioned method, to be subjected to metallization. The metallization processing was performed by applying metal paste of prescribed composition to the surfaces of respective samples of the aluminum nitride sintered substrates, performing debindering and then firing the same in a nitrogen atmosphere at a temperature of 1600°C for 60 minutes. Thus, metallized layers were formed on prescribed portions of the aluminum nitride sintered substrates. The metal paste was prepared by adding calcium oxide powder and alumina powder to tungsten powder and kneading the same with an organic binder such as vehicle. The content of calcium oxide was 14 percent by weight and that of alumina was 4 percent by weight. The shapes of the employed aluminum nitride sintered substrates were 5 mm square, 20 mm square and 50 mm square respectively. Further, nickel plating layers of 2 µm in thickness were formed on the surfaces of the metallized layers. On the other hand, tungsten metal plates and copper-tungsten alloy plates of 1.5 mm in thickness were prepared as radiating members to be joined to the respective aluminum nitride sintered substrates. Nickel plating of 2 µm in thickness was performed on the surfaces of these metal plates, which were then soldered to the respective aluminum nitride sintered substrates by silver solder at a temperature of 830 to 950°C. Examination was made as to whether or not the aluminum nitride sintered substrates were cracked and whether or not the tungsten metal plates and the copper-tungsten alloy plates were warped in the respective samples thus obtained. As shown in Fig. 5, an aluminum nitride sintered substrate 1 and a heat sink member 6 of each sample were joined with each other, to evaluate the degree of warping as the amount a by a surface roughness tester (product of Tokyo Seimitsu: E-SP-S01A). Cracks caused in the respective aluminum nitride sintered substrates were observed by a scanning type electron microscope of 5000 magnifications or a steromicroscope of 40 magnifications. Table 1 shows the results. As to evaluation of warps, those of not more than 2 µm with respect to effective length of 1 mm were regarded as "no warp", while samples causing warps exceeding 2 µm with respect to effective length of 1 mm were regarded as "warped". "10Cu-W" and "20Cu-W" in Table 1 represent reference examples, which were prepared by copper-tungsten alloys containing 10 percent by weight and 20 percent by weight of copper respectively. The thermal expansion coefficient of the tungsten metal plates was 4.5 x 10⁻⁶/K and the thermal conductivity thereof was 168 W/mK. The thermal expansion coefficients of the copper-tungsten alloys 10Cu-W and 20Cu-W were 6.5 to 7.5 x 10⁻⁶/K and 8.5 to 9.5 x 10⁻⁶/K in the range of the room temperature to 950°C, respectively. The values of thermal conductivity of the copper-tungsten alloys 10Cu-W and 20Cu-W-were 210 W/mK and 246 W/mK respectively. According to Table 1, the reference examples prepared by joining the copper-tungsten alloy plates respectively containing 10 percent by weight and 20 percent by weight of copper to aluminum nitride sintered substrateswere warped and cracked. On the other hand, no crack nor warp was caused in the samples in accordance with the present invention, which were prepared by joining tungsten metal plates to the aluminum nitride sintered substrate. Sample Shape W 10Cu-W 20Cu-W □ 5 mm no warp (no crack) warped (no crack) warped (cracked) □ 20 mm do. warped (cracked) do. □ 50 mm do. do. do. Example 2 Gold plating of 3 µm in thickness was performed on the surfaces of samples prepared in similar shapes to Example 1. The metallization processing of samples was performed by applying tungsten paste of prescribed composition to the surfaces of respective samples of the aluminum formed substrates shaped in a configuration such as a green sheet by the aforementioned method with screen printing of prescribed patterns drying performing debindering and then sintering the same in a nitrogen atmosphere at a temperature of 1850°C for 5 hours. Thus, metallized layers were formed on prescribed portion of aluminum nitride sintered substrates. Before the above gold plating, nickel plating layers of 2µm in thickness were formed on the metallized layers, and sintered in a hydrogen atmosphere at a temperature of 750°C for 20 minutes. Then aluminum nitride sintered substrateswere soldered to tungsten metal plates or copper-tungsten alloy plates by gold solder at a temperature of 450 to 550°C. Examination was made as to cracks of the aluminum nitride sintered substrates and warps of the tungsten metal plates and the the copper-tungsten alloy plates similarly to Example 1. Table 2 shows the results. According to Table 2, no warp nor crack was caused in the samples obtained by joining the tungsten metal plates to the aluminum nitride sintered substrates in accordance with the present invention. Sample Shape W 10Cu-W 20Cu-W □ 5 mm no warp (no crack) warped (no crack) warped (no crack) □ 20 mm do. do. warped (cracked) □ 50 mm do. do. do. A thermo cycle test (-50°C to +150°C, 1000 cycles) was performed on the samples causing no warp nor crack in Examples 1 and 2, while no problem was recognized. Example 3 On samples subjected to gold plating similarly to Example 2, soldering was performed by lead-indium solder at a temperature of 250 to 300°C, and thereafter a thermo cycle test (-55°C to +150°C, 1000 cycles) was performed. Structures in the interiors of aluminum nitride sintered substrates and metallized layer interfaces were observed in the respective samples to evaluate the degrees of cracking and the states of warps in tungsten metal plates and copper-tungsten alloy plates. Table 3 shows the results. The methods of evaluating cracks and warps are as described with reference to Example 1. According to Table 3, no warp nor crack was recognized in the samples which were prepared by joining the tungsten metal plates to the aluminum nitride sintered substrates in accordance with the present invention. Sample Shape W 10Cu-W 20Cu-W □ 5 mm no warp (no crack) no warp (cracked) no warp (cracked) □ 20 mm do. do. do. □ 50 mm do. warped (cracked) warped (cracked) Example 4 Samples obtained by performing nickel plating of 2µm in thickness on aluminum nitride sintered substrates of 1.3 mm in thickness provided with metallized layers similarly to Example 1 were soldered to tungsten alloy plates of 1.5 mm in thickness having compositions as shown in Table 4, the surfaces of which were nickel-plated, by silver solder at a temperature of 830 to 950°C. Examination was performed on the respective samples thus obtained, as to cracks of the aluminum nitride sintered substrates and warps of the tungsten alloy plate. Table 4 shows the results. In the column of the tungsten alloy plates as shown in Table 4, for example, "5Ni-1Cu-W" represents a tungsten alloy containing 5 percent by weight of nickel and 1 percent by weight of copper. Such indication of tungsten alloy plates also applies to Tables 5 and 6 concerning Examples 5 and 6 as hereinafter described. Symbol * indicates reference examples. Table 4 also shows the values of thermal conductivity and thermal expansion coefficients of the tungsten alloy plates. According to Table 4, no warp nor crack was recognized in the samples which were obtained by joining the tungsten alloy plates to the aluminum nitride substrates in accordance with the present invention. Example 5 Gold plating was performed on the surfaces of samples similar to those employed in Example 4, and then aluminum nitride sintered substrates were soldered to various types of tungsten alloy plates by gold solder at a temperature of 450 to 550°C. Examination was made on the respective samples thus obtained, as to cracks of the aluminum nitride sintered substrates and warps of the tungsten alloy plates. Table 5 shows the results. According to Table 5, no warp nor crack was recognized in the samples obtained by joining the tungsten alloy plates to the aluminum nitride sintered substrates in accordance with the present invention. A thermo cycle test (-55°C to +150°C, 1000 cycles) was made on the samples causing no warp nor crack in Examples 4 and 5, while no problem was recognized. Example 6 In the samples whose surfaces were subjected to gold plating in Example 5, aluminum nitride sintered substrates were soldered with various types of tungsten alloy plates by lead-indium solder at a temperature of 250 to 300°C, to perform a thermo cycle test -55°C to +150°C, 1000 cycles). Structures in the interiors of the aluminum nitride sintered substrates and metallized layer interfaces were observed in the respective samples, to evaluate presence/absence of cracks in the aluminum nitride sintered substratesand the states of warps caused in the tungsten alloy plates. Table 6 shows the results. According to Table 6, no warp nor crack was recognized in the samples obtained by joining the tungsten alloy plates to the aluminum nitride sintered substrates in accordance with the present invention. Example 7 Samples obtained by performing nickel plating of 2 µm in thickness on aluminum nitride sintered substrates of 1.3 mm in thickness, which were formed with metallized layers similarly to Example 1, were soldered to copper-tungsten alloy plates of 1.5 mm in thickness, the surfaces of which were subjected to nickel plating of 2 µm in thickness, by silver solder at a temperature of 830 to 950°C. Examination was made on the respective samples thus obtained, as to cracks of the aluminum nitride sintered substrates and warps of the copper-tungsten alloy plates by the measuring methods as described with reference to Example 1. Table 7 shows the results. The types of the tungsten alloy plates and evaluation of warps are indicated in a similar manner to Table 1. "6Cu-W", "10Cu-W" and "20Cu-W" represent reference examples. According to Table 7, no warp nor crack was recognized in the samples obtained by joining the copper-tungsten alloy plates to the aluminum nitride sintered substrates in accordance with the present invention. Further, metallized layers of the aforementioned compositions were formed on prescribed surfaces of the samples of the aluminum nitride sintered substrates, and nickel plating layers of 2 to 3 µm in thickness and gold plating layers of 2 to 3 µm in thickness were sequentially formed on the same. Thereafter field-effect high-power transistors were soldered/carried on the surfaces of the plating layers by gold-silicon soldering materials. In each sample, change ΔV BE in forward effect voltage V BE across the emitter and the base of the transistor caused by power application was measured by ΔV BE method, to evaluate thermal resistance of the entire product integrally formed by the transistors, the aluminum nitride sintered substrates and the copper-tungsten alloy plate. The thermal resistance value thus measured in each sample was not more than about 1.9°C/W. Thus, it is understood that a substrate for carrying a semiconductor device is suitably prepared by an aluminum nitride substrate, with employment of a copper-tungsten alloy plate as a radiating substrate therefor, in view of thermal conductivity. Example 8 Gold plating of 3 µm in thickness was performed on the surfaces of respective samples similar to those of Example 7, and aluminum nitride sintered substrates and copper-tungsten alloy plates were joined with each other by gold solder at a temperature of 450 to 550°C. Examination was made on the respective samples thus obtained as to cracks of the aluminum nitride sintered substrates and warps of the copper-tungsten alloy plates. Table 8 shows the results. According to Table 8, no warp nor crack was recognized in the samples obtained by joining the copper-tungsten alloy plates to the aluminum nitride sintered substrates in accordance with the present invention. A thermo cycle test (-55°C to +150°C, 1000 cycles) was performed on the nondefective samples of Examples 7 and 8 causing no warp nor crack, while no problem was recognized. Example 9 Soldering was performed on respective samples subjected to gold plating similarly to Example 8 by lead-indium solder at a temperature of 250 to 300°C, to thereafter perform a thermo cycle test (-55°C to +150°C, 1000 cycles). Structures in the interiors of the aluminum nitride sintered substrates and metallized layer interfaces were examined in the respective samples thus obtained, to evaluate cracks of the aluminum sintered substrates and warps of the copper-tungsten alloy plates Table 9 shows the results. According to Table 9, no warp nor crack was recognized in the samples obtained by joining the copper-tungsten alloy plates to the aluminum nitride sintered substrates in accordance with the present invention. Example 10 Respective samples obtained by performing nickel plating of 2 µm in thickness on the surfaces of aluminum nitride sintered substrates of 1.3 mm in thickness formed with metallized layers similarly to Example 1 were joined to molybdenum metal plates or copper-tungsten alloy plates of 1.5 mm in thickness, being subjected to nickel plating of 2 µm in thickness, by silver soldering at a temperature of 830 to 950°C. Examination was made on the respective samples thus obtained, as to cracks of the aluminum nitride sintered substrates and warps of the molybdenum metal plates and the copper-tungsten alloy plates. Table 10 shows the results. Evaluation of warps and indication of the types of the copper-tungsten alloys are similar to those in Table 1. According to Table 10, no warp nor crack was recognized in the samples obtained by joining the molybdenum metal plates to the aluminum nitride sintered substrates in accordance with the present invention. Sample Shape Mo 10Cu-W 20Cu-W □ 5 mm no warp (no crack) warped (no crack) warped (cracked) □ 20 mm do. warped (cracked) do. □ 50 mm do. do. do. Example 11 Gold plating of 3 µm in thickness was performed on the surfaces of respective samples similar to those of Example 10, and thereafter aluminum nitride sintered substrates were joined to molybdenum metal plates or copper-tungsten alloy plates by gold soldering at a temperature of 450 to 550°C. Examination was made on the respective samples thus obtained as to cracks of the aluminum nitride sintered substrates and warps of the molybdenum metal plates and the copper-tungsten alloy plates. Table 11 shows the results. According to Table 11, no warp nor crack was recognized in the samples obtained by joining the molybdenum metal plates to the aluminum nitride sintered substrates in accordance with the present invention. A thermo cycle test (-55°C to +150°C, 1000 cycles) was performed on nondefective samples causing no warp nor crack in Examples 10 and 11, while no problem was recognized. Sample Shape Mo 10Cu-W 20Cu-W □ 5 mm no warp (no crack) warped (no crack) warped (no crack) □ 20 mm do. do. warped (cracked) □ 50 mm do. do. do. Example 12 Soldering was performed on respective samples subjected to gold plating similarly to Example 11 by lead-indium solder at a temperature of 250 to 300°C, to thereafter perform a thermo cycle test (-55°C to +150°C, 1000 cycles) Structures in the interiors of the aluminum nitride sintered substrates and metallized layer interfaces were examined in the respective samples thus obtained, to evaluate cracks of the aluminum nitride sintered substratesand the states of warps of molybdenum metal platesand copper tungsten alloy plates. Table 12 shows the results. According to Table 12, no warp nor crack was recognized in the samples obtained by joining the molybdenum metal plates to aluminum nitride sintered substrates in accordance with the present invention. Sample Shape Mo 10Cu-W 20Cu-W □ 5 mm no warp (no crack) no warp (cracked) no warp (cracked) □ 20 mm do. do. do. □ 50 mm do. warped (cracked) warped (cracked) Although the present invention has been described and illustrated in detail, it is clearly understood that the same is by way of illustration and example only and is not to be taken by way of limitation, the spirit and scope of the present invention being limited only by the terms of the appended claims.

Claims: A member for a semiconductor apparatus for carrying or holding a semiconductor device, said member comprising: an insulating member (1) formed by an aluminum nitride sintered body having a major surface to face said semiconductor element; and a heat radiating member (6), being joined to said insulating member (1), mainly being formed of a metal material selected from a group of tungsten molybdenum and tungsten alloy containing not more than 10 percent by weight of at least one metal selected from a group of nickel, copper, iron an cobalt having thermal conductivity of at least 120 W/mK and a thermal expansion coefficient within a range of 4 to 6.0 x 10⁻⁶/K. A member for a semiconductor apparatus in accordance with claim 1, wherein said metal material includes a tungsten alloy containing not more than 5 percent by weight of copper. A member for a semiconductor apparatus in accordance with claim 1, wherein said insulating member includes a substrate having a major surface to be provided thereon with said semiconductor element. A member for a semiconductor apparatus in accordance with claim 1, wherein said insulating member includes a covering member provided above said semiconductor element to protect the same. A member for a semiconductor apparatus in accordance with claim 1, wherein said insulating member includes a sintered body. A member for a semiconductor apparatus in accordance with claim 1, further comprising a metallized layer formed in a junction surface between said insulating member and said heat radiating member. A member for a semiconductor apparatus in accordance with claim 6, wherein said metallized layer contains at least one metal within tungsten and molybdenum, at least one aluminum compound selected from a group of aluminum nitride, aluminum oxide and aluminum oxynitride, and calcium oxide. A member for a semiconductor apparatus in accordance with claim 6, further comprising a soldering member for joining said metallized layer to said heat radiating member. A member for a semiconductor apparatus in accordance with claim 6, further comprising a plating layer formed in a junction surface between said metallized layer and said soldering member. A member for a semiconductor apparatus in accordance with claim 9, further comprising a plating layer formed in a junction surface between said heat radiating member and said soldering member.

Inventors: MIYAKE, MASAYA ITAMI WORKS OF SUMITOMO ELECTRIC, SAKANOUE,HITOYUKI,ITAMI WORKS OF SUMITOMO ELECTRIC, SASAME, AKIRA ITAMI WORKS OF SUMITOMO ELECTRIC, YAMAKAWA, AKIRA ITAMI WORKS OF SUMITOMO ELECTRIC
Applicants: SUMITOMO ELECTRIC INDUSTRIES, LTD.
Application year: 1988
Main classification: H01L23
IPC codes: H01L23