METHOD OF MEASURING FURNACE TEMPERATURE IN HOT ISOSTATIC PRESSING UNIT AND DEVICE FOR MEASURING SAME

Abstract: A method of measuring a furnace temperature in a hot isostatic pressing unit, comprising the steps of condensing a thermal radiation beam from an end portion of a closed-end tube in a high-pressure furnace of the hot isostatic pressing unit by means of an optical system, feeding the radiation beam from the optical system to a detector to measure the temperature in the furnace, wherein the optical system com­ prises a solid lens having an incoming surface formed by a spherical surface with center at a temperature measurement objective point and having an outgoing surface formed by a spherical surface with center at a ligth collecting point, so as to condense a radiant energy from the temperature measure­ ment objective point. In another aspect of the invention, the steps further comprising removing a wavelength of absorp­ tion by a low b.p. metal gas vaporized from a treatment mat­ erial in the furnace or a capsule glass.

Description: The invention relates to a method of measuring the furnace temperature in a hot isostatic pressing (HIP) unit and a device for measuring same, and more particularly to a method of measuring the furnace temperature in the HIP unit including an improved temperature measuring optical system for collecting thermal radiation from an end portion of a closed-end tube. Further, the invention relates to a method of measuring the furnace temperature in the HIP unit which is improved in a wavelength range to be used for sensing of the temperature. The HIP unit is used for carrying out pressure sintering of powder, removal of defects in a sintered product or a forged product, or diffused junction owing to a synergetic effect by high temperature and high pressure. In recent years, industrial utilization of the HIP unit has become noticeable, and application thereof has been recently expanded to a high temperature range of 1700 to 2100 o C for an engineering ceramics. In the HIP unit, temperature control of the furnace at high temperature under high pressure is greatly significant for treatment effect, and there have been proposed various temperature measuring means for detecting the furnace temperature. At present, radiation temperature measuring means utilizing a closed-end tube and an optical system has been adopted, for example (DE-A-3 447 724). In such measuring means, the place where the optical system is located is usually subjected to a temperature of 300 o C under a pressure of 200 atm, and the density of Ar or N₂ gas forming such an atmosphere is higher than that at ordinary temperature and ordinary pressure. Especially, as temperature of a part where a collimator is located in the unit is relatively low, the atmosphere around the part has an more increased density. As a result, the refractive index of the gas increases with an increase in the density, and becomes higher than the value at ordinary temperature and ordinary pressure. Accordingly, optical characteristics of the lens and the optical fiber, which are designed for use in the air under the conditions of ordinary temperature and ordinary pressure, e.g. the focal distance of the lens and the numerical aperture of the optical fiber are changed to cause an influence upon thermometer characteristics. Describing the above in detail, the focal distance of the lens is usually expressed in the following equation: Herein, r₁ and r₂ are radii of curvature of both surfaces of the lens; n = n L /n g , wherein n L is the absolute refractive index of the lens, and n g is the absolute refractive index of the medium around the lens. When the medium gas is in the condition of ordinary temperature and the ordinary temperature n g is substantially equal to 1, the lens is designed under such conditions. However, the absolute refractive index of the gas changes with pressure as shown in the following table, and therefore, the focal distance is changed according to the above-mentioned equation. (High-Pressure Testing Techniques and Their Applications, pp. 441) N₂ Ar Temp.: 25 o C Temp.: 25 o C Wavelength: 587,6 µm Wavelength: 587,6 µm Pressure (atm) Refractive Index Pressure (atm) Refractive Index 1 1.0002728 1 1.0002580 61.164 1.01665 21.4042 1.00576 162.332 1.04333 35.0086 1.00921 162.455 1.04332 50.6661 1.01365 304.27 1.07311 69.8965 1.01878 405.76 1.08911 100.809 1.02761 528.50 1.10429 201.127 1.05522 750.74 1.12432 381.490 1.09522 894.59 1.13414 690.792 1.13505 1138.12 1.14752 1040.37 1.16078 1646.63 1.16763 1539.35 1.18409 2053.07 1.17941 2369.75 1.20899 Although the density tends to decrease naturally because of high temperature as well as high pressure in the HIP unit, and the change rate of the refractive index is less than that shown in Table, the condition of the temperature measuring optical system is yet changed. In the circumstances, the conventional temperature measuring means does not satisfactorily follow the change in the refractive index of the medium gas due to operational conditions of the HIP unit, one cannot attain stable measurement of temperature. Furthermore, in the method where the radiation beam from the end portion of the closed-end tube is allowed to directly enter the optical fiber, thermal radiation from a side wall of the closed-end tube having a temperature distribution is also allowed to enter the optical fiber because of a wide angle of visible field of the optical fiber, and such thermal radiation is added to the thermal radiation from the end portion of the closed-end tube, thereby causing an error of temperature measurement at the end portion. To eliminate this error, there has been conducted a test to find that the temperature measurement error at temperatures near 2000 o C can be suppressed to 1% or less by setting a detection wavelength to 0.6 µm or less. However, in the case that the collimator is used to limit the field of observation at the end portion of the closed-end tube, the above-mentioned setting of the wavelength is required. Although the temperature measurement error is reduced by shortening the wavelength, a limited short wavelength is to be considered from limitation of optical materials, and it has been found that detection of the radiation beam is difficult by the wavelength of 0.2 µm or less and that the wavelength equal to or more than 0.3 µm is preferable. Additionally, provided that a photon counting method by means of a photomultiplier (PM) is employed, dependency of temperature resolution upon wavelength has been calculated for an object at 1000 o C with a time constant of one second. As the result of calculation, it has been clarified that the wavelength equal to or more than 0.3 µm is required for 1 K or more of temperature resolution. Accordingly, the temperature measurement by the radiation thermometer is actually conducted with the wavelength range of 0.3 to 0.6 µm, while it is conducted within the range of 0.3 µm or more in the case of limiting a field of observation at a measurement objective point by means of a collimator or the like. However, as to spectral characteristics of the radiation beam utilized for the temperature measurement, there is no mention except a black body and a gray body. An actual spectrum of the radiation beam from the HIP unit is shown in Fig. 8, wherein a clear absorption is observed. This absorption is caused by vaporization of a low b.p. metal from a treatment material in the furnace or a capsule glass in the HIP unit. That is, the low b.p. metal in the high-temperature closed vessel of the HIP unit is vaporized during an increase in temperature to generate a gas, which stays in the vessel without being discharged therefrom. As a result, there occurs absorption by the metal gas existing in a light path between the objective point and the collimator in conducting a radiation temperature measurement. However, the conventional temperature measuring method does not consider such absorption by the metal gas, and there is a possibility that the absorption by the metal gas is overlapped on the wavelength to be used for the temperature measurement to cause a large error. It is object of the present invention to provide a method of measuring the furnace temperature in a HIP unit and a device for measuring same which may conduct stable temperature measurement not influenced by a change in refraction index of a medium gas due to fluctuations in temperature and pressure of an atmosphere in the furnace. Furthermore, it is object of the present invention to provide a method of measuring the furnace temperature in a HIP unit and a device for measuring same which may conduct accurate temperature measurement removing absorption by a low b.p. metal gas vaporized in the furnace. According to the present invention, there is provided a method of measuring the furnace temperature in a hot isostatic pressing unit, including the steps of condensing a thermal radiation beam from an end portion of a closed-end tube in the high-pressure furnace of the hot isostatic pressing unit by means of an optical system and feeding the radiation beam from the optical system to a detector to measure the temperature in the furnace, wherein the optical system comprises a solid lens having an incoming surface formed by a spherical surface with center at a temperature measurement objective point and having an outgoing surface formed by a spherical surface with center at a light collecting point, so as to condense a radiant energy from the temperature measurement objective point. The optical system for temperature measurement usually corresponds to a collimator system. The temperature measurement objective point corresponds to the end portion of the closed-end tube, and the light collecting point corresponds to an aperture of a photo detecting member such as an optical fiber or a photodetector itself. As is well-known, the detector is constituted of a photoelectric converter, amplifier, radiation rate correction circuit and linearizer, etc., and it is designed to carry out indication of temperature. The solid lens of the optical system has concave incoming and outgoing surfaces. If the solid lends is formed of a uniform material, a light condensing function cannot be obtained. Therefore, a convex lens member having a high refractive index is incorporated in the solid lens to form the solid lens into a convex lens as a whole, thereby exhibiting the light condensing function. Concretely, the solid lens having the light condensing function may be easily obtained by combining plural lenses, e.g. three lenses having different refraction indexes, or by using a lens having a distribution of refractive index therein. According to the above-mentioned constitution, the radiation beam from the temperature measurement objective point enters the lens at right angles to the incoming surface, and leaves the lens at right angles to the outgoing surface. That is, no refraction occurs on the incoming surface and the outgoing surface of the lens. Therefore, even if the refractive index of the medium around the lens is changed with fluctuations of temperature and pressure, the radiation beam is not influenced by the change in the refractive index of the medium, thereby ensuring stable temperature measurement. Furthermore, there is provided to remove a wavelength of absorption by a low b.p. metal gas vaporized from a treatment material in the furnace or a capsule glass, and to feed the radiation beam from the optical system to a signal processing device to measure the temperature in the furnace. The wavelength of the radiation beam to be measured is in the range of 0.3 to 0.6 µm as mentioned above, while it is not less than 0.3 µm in the case that the collimator is used to limit a field of observation to the temperature measurement objective point. Removal of the wavelength of absorption by the low p.b. metal gas may be easily attained by using a filter permitting transmission of a wavelength range except the absortion wavelength of the low p.b. metal. According to the above-mentioned constitution, even when the low b.p. metal gas is present in the HIP unit, absorption of the radiation beam by the metal gas may be avoided to thereby ensure accurate temperature measurement. There will be now described some preferred embodiments of the present invention with reference to the accompanying drawings, wherein Figs. 1 to 5 are schematic illustrations of the preferred embodiments of the optical system emplyed in the present invention, Figs. 6 and 7 are schematic diagrams of two preferred embodiments of the present invention, and Fig. 8 is a graph showing a spectral distribution of the thermal radiation from the closed-end tube. Figs. 1 to 5 show some examples of the optical system forming the essential part of the present invention, wherein a body of the HIP unit is not illustrated, but the optical systems shown are adapted to the collimator system of a known HIP unit. Referring to Figs. 1 to 5, reference numerals 1, 2 and 3 designate a lens, a temperature measurement objective point, and a light collecting point, respectively. The incoming surface of the lens 1 is formed by a spherical surface having a radius r₁ with center at the temperature measurement objective point 2, while the outgoing surface is formed by a spherical surface having a radius r₂ with center at the light collecting point 3. In the embodiment shown in Fig. 1, the incoming surface and the outgoing surface are concave. If the lens 1 is formed of a uniform material, a light condensing function would not be obtained. Accordingly, a convex lens portion 4 having a high refractive index is provided in the lens 1 to form a convex lens as a whole, thus exhibiting the ligth condensing function. The lens 1 may be prepared by combining three lenses having different refractive indexes, for example. In this case, it is necessary to sufficiently contact each surface of the lenses to be combined to such an extent that a medium existing in a gap between the lenses influences ignorably upon refraction of the beam. The lenses to be combined may be formed by a plurality of lenses, provided that the incoming and outgoing surfaces of the lens 1 meet the afore-mentioned requirements to function as a convex lens as a whole. Fig. 2 shows an example, where the temperature measurement objective point 2 is positioned at infinity, and Fig. 3 shows an example, where the temperature measurement objective point 2 is positioned in contact with the incoming surface of the lens 1. In both examples, the incoming surface is a substantially flat plane. Fig. 4 shows an example, where the light collecting point 3 is positioned in contact with the outgoing surface of the lens 1, and the outgoing surface is a substantially flat plane. In the above-mentioned examples of Figs. 2, 3 and 4 no refraction occurs on the incoming surface and the outgoing surface like the example of Fig. 1, and the radiation beam is not influenced. In substitution for the above-mentioned combination lens, a refractive index distributed lens having a function of a convex lens may be used as shown in Fig. 5. The refractive index distributed lens is formed by a single lens having a refractive index distribution such that the refractive index is gradually decreased from an optical axial portion of the lens to a peripheral portion. In this embodiment, the incoming surface and the outgoing surface meet the afore-mentioned requirements like the embodiment of Fig. 1. In this manner, the optical system is formed by the lens system as mentioned above. Radiant energy collected by the optical system is transmitted through an optical fiber or the like to a detector, and is then applied to indication of temperature or heater control as required. Referring next to Fig. 6 which shows an optical system schematically according to the present invention, the optical system includes a condensing optical system 1' such as a collimator, a filter 2', a photo-detecting unit 3' and a signal processing unit 4'. A radiation beam from an end portion of a closed-end tube (not shown) is condensed by the optical system 1'. The filter 2' functions to remove an absoprtion wavelength of a low b.p. metal and selects a wavelength range other than the absoprtion wavelength. Then, the radiation beam having the wavelength range is transmitted through an optical fiber (not shown) to the signal processing unit 4'. The signal processing unit 4' functions to conduct photoelectric conversion to generate a temperature output for indication of temperature or heater control as required. During the course of the temperature measurement as mentioned above, it is significant that the wavelength range is selected by the filter 2'. The absorption wavelength of the low b.p. metal to be removed is determined as follows: (1) Metal vaporizable at a supposed temperature is selected. (2) A spectral wavelength where a metal atom in the ground state is excited is selected since a large number of atoms is in the ground state at temperatures (∼ 2500 K) in the HIP unit. The temperature measuring system is not particularly limited, but may include any means capable of removing the absorption wavelength of the low b.p. metal. Fig. 7 shows an alternate embodiment using a spectro thermometer. A table 6' stores data corresponding to an absoprtion wavelength of the low b.p. metal. The signal processing unit 4' receives a detection signal from a spectroscope 5', and removes the data corresponding to the absorption wavelength stored in the table 6' from the detection signal. In this case, wavelength scanning may be cancelled. Thus, even if low b.p. metal gas is contained in the HIP unit, temperature measurement may be conducted with no influence of the metal gas.

Claims: Method of measuring the temperature in a high-pressure furnace of a hot isostatic pressing unit, comprising the steps of condensing a thermal radiation beam from an end portion of a closed-end tube in the high-pressure furnace of said hot isostatic pressing unit by means of an optical system and feeding said radiation beam from said optical system to a detector to measure the temperature in said furnace, characterized in that said optical system comprises a solid lens (1) having an incoming surface formed by a spherical surface with center at a temperature measurement objective point (2) and having an outgoing surface formed by a spherical surface with center at a light collecting point (3), so as to condense a radiant energy from said temperature measurement objective point. Method as defined in claim 1, characterized in that said solid lens (1) includes a convex lens portion (4) having a high refractive index. Method as defined in claim 1 or 2, characterized in that said solid lens (1) comprises a combination of plural lenses having different refractive indexes. Method as defined in one of claims 1 to 3, characterized in that said temperature measurement objective point (2) is positioned at infinity. Method as defined in one of claims 1 to 3, characterized in that said temperature measurement objective point (2) is positiond in contact with said incoming surface of said solid lens (1). Method as defined in one of claims 1 to 3, characterized in that said light collecting point (2) is positioned in contact with said outgoing surface of said solid lens (1). Method as defined in claim 1, characterized in that said solid lens (1) comprises a single lens having a refractive index distribution such that the refractive index is gradually decreased from an optical axial portion of said lens to a peripheral portion thereof (Fig. 5). Method as defined in one of claims 1 to 7, characterized in that a wavelength of absorption is removed by a low b.p. metal gas vaporized from a treatment material in said furnace or a capsule glass, and that said radiation beam from said optical system (1') is fed to a signal processing device (4') to measure the temperature in said furnace. Method as defined in claim 8, characterized in that said wavelength of absorption by the low b.p. metal gas is removed by means of a filter (2'). Method as defined in claim 8, characterized in that said signal processing device (4') receives a detection signal from a spectroscope (5') and removes from said detection signal a data corresponding to said wavelength of absorption stored in a table (6'). Device for measuring the temperature in a high-pressure furnace of a hot isostatic pressing unit, comprising a closed-end tube provided in the high-pressure furnace of said unit, an optical system for condensing a thermal radiation beam from an end portion of said closed-end tube, and a signal processing device for detecting said radiation beam fed from said optical system and conducting photoelectric conversion, characterized in that said optical system comprises a solid lens (1) having an incoming surface formed by a spherical surface with center at a temperature measurement objective point (2) and having an outgoing surface formed by a spherical surface with center at a light collecting point (3). Device as defined in claim 11, characterized in that said solid lens (1) includes a convex lens poriton (4) having a high refractive index. Device as defined in claim 11 or 12, characterized in that said solid lens (1) comprises a combination of plural lenses having different refractive indexes. Device as defined in one of claims 11 to 13, characterized in that said temperature measurement objective point (2) is positioned at infinity. Device as defined in one of claims 11 to 13, characterized in that said temperature measurement objective point (2) is positioned in contact with said incoming surface of said solid lens (1). Device as defined in one of claims 11 to 13, characterized in that said light collecting point (2) is positioned in contact with said outgoing surface of said solid lens (1). Device as defined in claim 11, characterized in that said solid lens (1) comprises a single lens having a refractive index distribution such that the refractive index is gradually decreased from an optical axial portion of said lens to a peripheral portion thereof (Fig. 5). Device as defined in one of claims 11 to 17, characterized in that it comprises means (2'; 5') for removing an absorption wavelength of a low b.p. metal gas vaporized from a treatment material in said furnace or a capsule glass, and a signal processing device (4') for detecting said radiation beam fed from said optical system (1') and conducting photoelectric conversion. Device as defined in claim 18, characterized in that said means for removing the absorption wavelength comprises a filter (2') interposed between said optical system (1') and said signal processing device (4'). Device as defined in claim 18, characterized in that said means for removing the absorption wavelength comprises a spectroscope (5') for detecting said radiation beam from said optical system (1'), a memory (6') preliminarily storing a data corresponding to said absorption wavelength, and a processing unit (4') for removing said data from a detection signal fed from said spectroscope.

Inventors: MANABE, CHITAKA
Applicants: KABUSHIKI KAISHA KOBE SEIKO SHO
Application year: 1987
Main classification: G01J5
IPC codes: G01J5, F27D21