METHOD OF FORMING A BRIDGE CONTACT

Abstract: A method of forming a bridge contact between silicon regions (24, 32) on a substrate (10) that are separated by a first insulating region (32A) having a first lateral length, without forming a bridge contact between silicon regions on the substrate that are separated by other insulating regions that have lateral lengths that are greater than that of said first insulating region (32A), comprising the steps of: forming a refractory metal layer (14) on the substrate (10) under conditions such that said refractory metal has a substantially columnar grain structure; sintering the substrate under conditions that limit lateral silicon diffusion, so that a silicide (14A) is formed over all of said silicon regions and said first insulation region (32A) without forming a silicide over said other insulating regions; and exposing the substrate to an etchant that preferen­ tially removes portions of said refractory metal that did not react to form said silicide (14A), without appreciably removing said silicide. The method in particular uses a self-aligned silicide reaction to form a bridging contact between portions of a semiconductor surface that are separated by a thin insulating layer.

Description: The present invention relates to a method of forming a bridge contact between silicon regions on a sub­ strate that are separated by an insulating region. Reference is made to European Patent Application 0 167 764, entitled "Dynamic RAM Cell with MOS Trench Capacitor in CMOS," and assigned to the assignee of the present invention. This patent application relates to a one-device trench memory cell in which the source electrode of the transfer gate transistor is coupled to a polysilicon-filled trench by a layer of doped polysi­ licon that is masked and etched using conventional techniques. The general trend in semiconductor technology toward increasing device integration has produced chips that have one million or more individual devices on them. With this increasing integration has come the challenge of interconnecting these devices so that they can form circuits that have acceptable signal propagation delays. As a greater number of devices are coupled to a given interconnection line, the cumulative resistive load that the line must drive produces corresponding increases in driving currents and signal propagation delays. In order to reduce these driving currents and delays, the industry has explored and implemented various means of decreasing the resistive load on these interconnecting lines. One very effective way of reducing the resistive load is to form a refractory metal silicide between the interconnecting line and the device or surface to be coupled thereto. A silicide is formed by the reaction of a refractory metal (e.g. tun sten, titanium molyb­ denum, tantalum, ect.) as well as nickel or colbat and silicon. The resulting refractory metal silicide produces a characteristic resistance that is much lower than that achieved using conventional metals or doped polysilicon. One particularly efficient use of refractory metal silicides is the so-called "silicide" process. In this process, the source, gate and drain electrodes of a field effect transistor are formed using conventional techniques. Then a blanket layer of refractory metal is applied, and the substrate is heated. During this heating (or "sintering") cycle, silicon will diffuse upward from areas in which the refractory metal con­ tacts either the monocrystalline silicon substrate (e.g., the diffused source/drain regions) or the exposed polycrystalline silicon regions (e.g., the upper surface of the gate electrode) to form a silicide above these areas. At the same time, although some silicon diffuses upward from those areas in which the refractory metal overlays silicon oxide (e.g., silicon oxide isolation structures, as well as silicon oxide "spacers" that are formed on the sidewalls of the gate electrode), the diffusion rate is slow enough so that typically no silicide is formed in these regions during the sintering cycle. After the sintering cycle is completed, the structure is exposed to an etchant (typically a wet etchant) that preferentially attacks the unreacted refractory metal without appreciably attacking the reacted silicide. The term "silicide" refers to the end product of this process: regions of silicide that are aligned to and in contact with the source/drain regions (to thus lower the contact re­ sistance) and the gate electrode (to thus lower the gate sheet resistance) of the FET, without the use of a separate mask-and-etch step to selectively provide silicide in these areas. In an article by Murarka et al, entitled "Refractory Silicides For Low Resistivity Gates and Interconnects," IEDM Technical Digest 1979 , Paper 20.1, pp. 454-457, the general methods of forming silicides (i.e., sputter­ ing or evaporating the silicide from a single source, sputtering or evaporating refractory metal and silicon from separate sources, and sputtering or evaporating the refractory metal on exposed silicon) are reviewed. The article includes a graph that shows the sheet resistance of titanium silicide formed by deposition and sintering of titanium on polysilicon as being approximately one ohm/square at sintering temperatures of 700°C to 1000°C. An article by Roberts, entitled "Salicide Process For Silicide Wiring By CVD," IBM Technical Disclosure Bulletin , Vol. 26, No. 8, January 1984, p. 4338, discloses a silicide process using a low-rate tungsten deposition, such that a low sintering temperature (650°C-700°C) may be used. This lower temperature prevents a phenomena referred to as "bridging" that will be discussed in more detail below. An article by Jones et al, entitled "Salicide With Buried Silicide Layer," IBM Technical Disclosure Bulletin , Vol. 27, No. 2, July 1984, pp. 1044-1045, discloses a silicide process in which a fresh layer of silicon is formed over the gate electrode prior to further processing. This permits a silicide process to be carried out on a silicide gate electrode by adding more silicon for reaction. An article by Ting, "Silicide For Contacts And Inter­ connects," IEDM Technical Digest 1984 , Paper 5.1, pp. 110-113, describes the use of silicides for diffused contacts, for gate electrodes, and for both (i.e., silicide processing). In silicide applications, Ting notes out that the sintering temperature for TiSi₂ should be kept at 600-700°C in order to prevent bridg­ ing. Moreover, the article points out that titanium silicide should be formed in a nitrogen atmosphere, in order to further prevent bridging. An article by Okabayashi et al, entitled "Low-Re­ sistance MOS Technology Using Self-Aligned Refractory Silicidation," IEEE Transactions On Electron Devices , Vol. ED31, No. 9, September 1984 pp. 1329-1334, de­ scribes a process of silicide formation in which an inert ion beam is used after molybdenum is applied to a silicon surface in order to promote intermixing at the metal-silicon interface. This intermixing will reduce the anneal time of the subsequent silicide reaction, to thus prevent an excessive amount of lateral silicon diffusion. An article by Haken, entitled "Application of the Self-Aligned Titanium Silicide Process to Very Large-­ Scale Integrated N-Metal-Oxide-Semiconductor and Complementary Metal-Oxide-Semiconductor Technologies," Journal of Vacuum Science and Technology , Vol. 3, No. 6, November/December 1985, pp. 1657-1663, discusses the attributes of titanium silicide in a silicide process. The paper recites the general silicide process disclosed in the Ting article, and discusses the importance of TiN in preventing silicon outdiffusion. U.S.P. 4,180,596 (issued 12/25/79 to Crowder et al and assigned to the assignee of the invention) discloses a process of forming a silicide wherein the silicon and the refractory metal are co-evaporated from separate sources. The refractory metals discussed are tungsten, molybdenum, tantalum and rhodium. U.S.P. 4,332,839 (issued 6/1/82 to Levinstein et al and assigned to AT&T) discloses a process of forming titanium silicide wherein the titanium is sintered in a H₂ atmosphere at 900°C. U.S.P. 4,337,476 (issued 6/29/82 to Fraser et al and assigned to AT&T) discloses a process for forming a silicon-rich titanium silicide (i.e., TiSi x , x>2) by varying the sputtering rates of the respective targets. U.S.P. 4,545,116 (issued 10/8/85 to Lau et al and assigned to Texas Instruments) discloses a process of forming a titanium silicide, wherein the titanium metal is sintered in a nitrogen atmosphere at a temperature of about 625°C so as to prevent the lateral diffusion of silicon during the titanium silicide forming pro­ cess. As is apparent from the above art, it is generally known that during sintering of the refractory metal and silicon, silicon will diffuse laterally to form a silicide "bridge" in regions other than where it is desired. As shown in Figure 1 (Prior Art), when a refractory metal 14 such as titanium is deposited on a substrate 10 having a silicon oxide layer 12 thereon, the objective is to form a titanium silicide layer 14A having a lateral length A (i.e., so that the TiSi₂ layer 14A is completely self-aligned with respect to the portion of substrate 10 that is exposed by silicon oxide layer 12). However, in titanium silicide reac­ tions, silicon is the active specie. The diffusion of silicon is not directionally limited. Thus, during sintering, silicon will diffuse laterally and react with a portion of the refractory metal 14 not imme­ diately above the exposed portion of the substrate 10. The net effect is to produce a silicide region having a lateral length of A + X. Ordinarily, this increase in lateral length is not a debilitating problem. However, in the silicide process wherein a refractory metal is coated over a gate electrode of an FET, this problem greatly increases in importance. As shown in Figure 2 (Prior Art), in addition to forming silicide regions 14A on either side of gate electrode 20A as well as on top of gate electrode 20, enough silicon may laterally diffuse so that silicide regions 14A′ are formed on top of the silicon oxide gate electrode sidewalls 20A. These undesired "bridging" silicide regions will effectively render the FET useless by shorting together the source, gate, and drain electrodes. As pointed out in the Ting and Haken papers and the Lau patent, this "bridging" phenomena can be avoided by the use of one or more techniques. One technique is to decrease the sintering temperature from 900°C to approximately 600-700°C (i.e., the minimum temperature at which the metal and the silicon will react to form a silicide). There will be less silicon diffusion at the lower temperature. Another technique is to carry out the sintering operation in a nitrogen (N₂) gas atmosphere ambient. As shown in Figure 3 (Prior Art), the nitrogen will react with the exposed surface of the titanium to form titanium nitride (TiN) 16. Since the nitrogen will diffuse more quickly into the titanium than will the silicon, the portions of the refractory metal that are susceptible to forming lateral silicide regions will be converted to TiN before the silicon can laterally diffuse to form a bridging region. Thus the silicide regions 14A will have less of a lateral portion extending above oxide layer 12. A subsequent wet etchant will remove the titanium nitride without appreciably attacking the titanium silicide. As dis­ cussed in the Ting article, the ideas of lower tempera­ tures and a nitrogen atmosphere may be used in tandem to further reduce the lateral diffusion of silicon during the formation of a silicide region. In dense one device trench memory cells such as that described in the above-mentioned European Patent Application 0 167 764, a transfer gate FET is used to access the trench storage capacitor. The doped poly­ silicon within the trench is separated by a layer of dielectric from the remainder of the substrate. The dielectric extends to the surface of the substrate, such that the upper surfaces of the source electrode of the FET and the poly-filled trench are separated by the dielectric. In order to couple the source electrode of the FET to the doped polysilicon within the trench, as described in the patent application a conductive material must be deposited and etched to form a contact above the source electrode and the poly-filled trench by bridging the dielectric therebetween. The above-described process of forming the bridge contact is inefficient, in that a separate layer must be masked and etched. This adds to process expense and reduces circuit density. Thus, it would be advantageous to provide some means of connecting the source electrode to the poly-filled trench without the use of a separate mask-and-etch step. It is thus the object of the present invention to form a contact between adjacent conductive regions on a substrate that are separated by an intervening non­ conductive structure, without the use of a separate mask-and-etch step. This object is achieved by the method as disclosed in claim 1. The inventive methods use a self-aligned silicide reaction to form a bridging contact between portions of a semiconductor surface that are separated by a thin insulating layer. The inventive methods allow for example to provide a bridge contact between the source electrode of a transfer gate FET and a polysilicon-filled storage trench, without the use of a separate mask-and-etch step. The bridge contact consists of a conductive silicide. The inventive methods utilize the lateral diffusion of silicon during formation of a silicide to provide a bridge contact between adjacent silicide-forming regions that are separated by a dielectric. In the grain structure formed by the inventive me­ thods each grain that spans the dielectric directly contacts a silicon source on either side of the dielectric, the formation of metal nitride will be reduced and the lateral diffusion of silicon will be enhanced to the point where a self-aligned silicide bridge contact will be formed above the dielectric without shorting for example the source-drain regions of a transfer gate FET to the gate electrode thereof. In the preferred forms of the inventive methods also the silicide process is optimized so that bridging only occurs in desired areas. Other advantageous embodiments of the inventive methods are disclosed in the subclaims. The forgoing and other structures and teachings of the present invention will become more apparent upon a description of the best mode for carrying out the invention. In the description to follow, reference will be made to the accompanying Drawing, in which: Figure 1 (Prior Art) is a cross-sectional view of a substrate undergoing a silicide reaction, showing the lateral diffusion of silicon; Figure 2 (Prior Art) is a cross-sectional view of a FET undergoing a silicide reaction, showing the undesired bridging that may occur; Figure 3 (Prior Art) is a cross-sectional view of a substrate undergoing a silicide reaction, showing the formation of titanium nitride in order to retard lateral silicon diffusion; and Figures 4-6 are cross-sectional views of a substrate processed in accordance with the teachings of the present invention. Description of the Best Mode For Carrying Out the Invention As shown in Figure 4, the process of the invention begins with depositing a refractory metal 14, such as titanium, on the surface of a processed semiconductor substrate 10. In accordance with the teachings of the above mentioned European Patent Application 0 167 764, an n-well 13 is formed in a p-type epitaxial silicon layer 12 that is applied to a p-type, <100> oriented silicon substrate 10. A field effect tran­ sistor, having a polysilicon gate electrode 20, an p-type drain diffusion region 22, and a p-type source diffusion region 24, is formed on substrate 10. The polysilicon gate electrode 20 overlies a silicon oxide gate dielectric 20B, and the sidewalls of the gate electrode are covered by silicon oxide sidewall spacers 20A. A trench 30 is formed within the surface of the substrate. The trench is filled with a layer of p-type polysilicon 32. The polysilicon 32 is separated form the substrate 10 by a dielectric layer 32A. Dielectric layer 32A can be made of a single layer of silicon oxide, or it can be composed of a plurality of silicon oxide and silicon nitride layers. In practice, a three-layered structure of silicon oxide, silicon nitride, and silicon oxide is used as the storage node dielectric 32A. Either way, the dielectric 32A should be approximately 10-20 nm thick. The cell is separated from adjacent cells by a semi-recessed oxidation structure 40. In order for the memory cell to operate by writing voltages into and reading voltages out of the storage capacitor formed by the substrate 10, dielectric 32A and polysilicon fill 32, voltages from the source diffusion region 24 must be coupled to the polysilicon storage node electrode 32. In considering the possibility of using the lateral silicon diffusion that occurs during the silicide process to form a conductive bridge between the source diffusion and the polysilicon trench fill, the inven­ tors found that the bridging phenomena could not be controlled by changing the sintering conditions (i.e., time, temperature, and ambient). In general, the inventors found that bridging was either totally eliminated (such that no conductive bridge formed over dielectric 32A) or was rampant across the entire wafer (such that bridging occurred over dielectric 32A, sidewall spacer 20A, isolation region 40, etc.) when the sintering conditions were varied. Therefore, it was apparent that a simple solution to the problem (e.g., changing the sintering time so that bridging occurs across dielectric 32A without occurring over sidewall spacer 20A) was not available. In exploring the nature of the deposited refractory metal, the inventors considered the grain structure of the film and the relation between grain structure, silicide formation, and the formation of titanium nitride during silicide formation. In general, the grain structure of vacuum deposited titanium is discussed in a paper by Movchan et al, entitled "Study of the Structure and Properties of Thick Vacuum Condensates of Nickel, Titanium, Tungsten, Aluminum Oxide and Zirconium Dioxide," Fiz. Metal Metalloued , 28, No. 4, pp. 653-660, 1969. Figure 5A shows a view of the refractory metal as deposited at room tempera­ ture. The inverted teardrop shape of the refractory metal grains 14X results from low temperature deposi­ tion. The areas between the grains 14X are filled with an amorphous matrix material 14Y (i.e., incompletely-­ formed grains). In general, when the refractory metal is sintered in a nitrogen atmosphere, the nitrogen penetrates along the grain boundaries to form titanium nitride. In those portions of the refractory metal that overlay silicon, silicon diffuses upward to react with the grains to form titanium silicide. In general, the formation of titanium nitride is favored over the formation of titanium silicide above the surface of dielectric 32A when the titanium has a grain structure as shown in Figure 5A. That is, since there is a large amount of matrix material available for reaction between the grains, and since nitrogen will diffuse along the grain boundaries and will quickly react with the matrix material to form titanium nitride between the grains, titanium nitride formation is enhanced. At the same time, note that the bottom portions of the grains (i.e. the portion of each grain in contact with the substrate surface) is quite narrow. Thus, there is a good possibility that none of the grains spanning the dielectric 32A will have a bottom portion that directly overlays a source of silicon (i.e., either diffused region 24 or polysilicon 32). As such, the only source of silicon available to the grains is that silicon which laterally diffuses through reaction with grains abutting the grains over the dielectric. Since the matrix material is converted to titanium nitride relatively quickly, the titanium grains will react with the nitride to form titanium nitride, effectively preventing silicon diffusion. Simply put, when formed at room temperature, the resulting titanium grain structure promotes titanium nitride formation while limiting silicide formation in the area of the refractory metal that overlays the thin dielectric. In practice, we have found that a small amount of hydrogen in the nitrogen ambient will improve reaction control. Figure 5B shows the structure of the titanium layer that results from deposition at an elevated tempera­ ture. The shape of the grains 14X is now columnar, as compared to the inverted teardrop grains as in Figure 5A. The bottom portions of the grains are much larger, such that there is a larger amount of the grain surface in contact with the substrate. As discussed in the Movchan paper and confirmed by our experiments, the columnar grain structure results when titanium is evaporated at a temperature above 370°C. Note that while in both Figure 5A and Figure 5B the grains have a width (or lateral length) of 20-30 nm, the grains of Figure 5B have this width (or lateral length) in their bottom portions contacting the substrate. Thus in Figure 5B either a single grain of titanium will span over the dielectric, or at most there will be a small amount of grain boundaries above the dielectric. In general, upon sintering in a nitrogen atmosphere, the formation of titanium silicide is now favored over the formation of titanium nitride above the surface of dielectric 32A when the titanium has a grain structure shown in Figure 5B. For the case shown in Figure 5B, a single grain spans the dielectric 32A to contact both diffusion region 24 and the polysilicon 32. Thus, during sintering silicon will laterally diffuse from either direction, and there is no grain boundary along which titanium nitride can penetrate to form titanium nitride. That is, while some titanium nitride will form, the lateral diffusion of silicon is greatly favored. Should more than one grain span the dielectric such that there are a small amount of grain boundaries along which nitrogen can penetrate, the relative lack of matrix material with which nitrogen can react will slow down the nitride reaction to the point where silicon has an opportunity to diffuse from either side of the dielectric to form titanium silicide. The larger titanium grain - silicon contact area means that the lateral diffusion of silicon from either side of dielectric 32A is enhanced, in that all of the grains overlaying the dielectric have a direct source of silicon (as compared to the case of the small grains shown in Figure 5B). Simply put, when formed at high temperature, the grain structure of the titanium will promote the formation of titanium silicide while limiting titanium nitride formation in the area of the refractory metal that overlays the thin dielectric. Therefore, when the refractory metal is formed under conditions that maximize grain contact area, a bridge contact can be formed over the dielectric 32A during a subsequent sintering cycle without shorting together the respective electrodes of the transfer gate FET. As shown in Figure 6, silicide regions 14A are formed over gate electrode 20, drain electrode 22, source electrode 24 and the polysilicon fill 32. At the same time, a bridge contact 140 is formed over the dielectric 32A, coupling source diffusion 24 to the polysilicon fill 32. Note that there is no bridge formation between the respective electrodes of the FET device. In constructing the conductive bridge as described above, there are several factors that must be consi­ dered in order to form a contact having an acceptable resistivity range. One factor is the poor step coverage of evaporated titanium metal. That is, if the upper surface of the polysilicon fill 32 extends above the surface of the substrate 10 by greater than 10 nm, there may be a discontinuity in the titanium as-de­ posited. This discontinuity will greatly increase the resistivity of the bridge contact 140. The possibility of creating this discontinuity can be diminished by incorporating several process options. One option is to etch the polysilicon within the trench so that it is relatively coplanar with the surface of the substrate. This has been achieved by polishing the excess poly­ silicon in the presence of a wet etchant. Other tech­ niques, such as blanket depositing a material having an etch rate in a dry etchant that is the same as the polysilicon, and etching back the composite until an etch-stop layer is exposed, could be used here. Another option is to deposit the refractory metal from two offset sources instead of one source. This increases the step coverage of the evaporated metal. A third option is to use chemical vapor deposition (CVD) or sputtering techniques to form the refractory metal. Another factor to be considered is the respective lateral length of the dielectric as compared to the gate electrode sidewall spacers. Although in the Figures the respective lengths of these structures do not appear to be very different, in practice the dielectric 32A is in the order of 10-20 nm in thickness (that is, its lateral length, or length in the hori­ zontal direction that must be covered by the refractory metal, is approximately 10-20 nm), while the gate electrode 20 is approximately 300 nm in thickness (such that the sidewall spacers 20A have a lateral length of approximately 300 nm). The invention would still be operable if the lateral length of the sidewall spacers 20A was less than 300 nm. Obviously, if the lateral lengths of the two regions were substantially similar, conductive bridges would form over both the dielectric 32A and the sidewall spacers 20A, shorting together the electrodes of the transfer gate FET. Example 1 After the structure as shown in Figure 4 is formed, several pre-metal deposition cleaning steps-are carried out. Specifically, the substrate is etched in a buffered hydrofluoric acid (BHF) for 40 seconds, and then is rinsed in deionized water. Then, 70 nm of titanium 14 was evaporated from dual e-beam sources, with the substrate being heated to approximately 370°C. After deposition, the substrate was annealed for 20 minutes in 95% nitrogen -5% hydrogen gas at 700°C. Finally, the titanium nitride and the unreacted titanium were removed by exposure to a 5: 1: 1 solution of deionized water, 58% NH₄OH, and 30% H₂O₂, resulting in the structure as shown in Figure 6. Subsequent electrical testing and SEM inspection confirmed that the bridge contact 140 was formed without any bridging of the transfer gate FET electrodes. There are several modifications that can be made to the above-described process. Although titanium is preferred for its low resistance characteristics, other refractory metals such as tungsten, molybdenum, tantalum, etc. as well as nickel and colbat could be used. Whatever refractory metal is used should have a substantially columnar grain, a minimum of matrix material, and a grain contact area commensurate to the width of the dielectric 32A. While evaporation techniques were used to deposit the tita­ nium on the wafer, it is to be understood that other techniques, such as low pressure chemical vapor deposition, plasma enhanced chemical vapor deposition, or sputtering could be used. In the Example the sub­ strate was heated to 370°C. In practice, so long as the resulting grain structure meets the above criteria, the temperature is variable within the limits of high density semiconductor fabrication (i.e., the tempera­ ture should not exceed approximately 1200°C). For titanium, if the deposition temperature exceeds 650°C a polyhedral grain structure may result. The sintering temperature and gas atmosphere is variable for different refractory metals. Finally, other wet etchants (e.g., 10: 1 H₂O₂: H₂SO₄) should provide sufficient selectivity to define the bridge contact. It is to be understood that the above and other modifications to the teachings of the present invention fall within the purview of the several Claims appended hereto.

Claims: 1. A method of forming a bridge contact between silicon regions (24, 32) on a substrate (10) that are separated by a first insulating region (32A) having a first lateral extension, without forming a bridge contact between silicon regions on the substrate that are separated by other insulating regions that have lateral extensions that are greater than that of said first insultating region (32A), comprising the steps of : forming a metal layer (14) consisting of refractory metal or colbat or nickel on the substrate (10) under conditions such that said metal has a substantially columnar grain structure, the grains (14X) thereby showing a width that commensurates with the lateral extension of said first insulating region (32A); sintering the substrate under conditions that limit lateral silicon diffusion, so that a silicide (14A) is formed over all of said silicon regions and said first insulation region by the reaction of the metal (14) with silicon regions (20, 22, 24, 32) without forming a silicide over said other insulating regions; and exposing the substrate to an etchant that preferentially removes portions of said metal (14) that did not react to form said silicide (14A), without appreciably removing said silicide. 2. A method according to claim 1, wherein said silicon regions (24, 32) on a substrate (10) that are separated by a first insulating region (32A) are relatively coplanar. 3. Method according to claim 1 or 2, wherein said refractory metal has a minimal amount of amorphous matrix material (14Y). 4. Method according to any one of claims 1 to 3, wherein said refractory metal is selected from the group consisting of titanium, tungsten, molybdenum, and tantalum. 5. Method according to any one of claims 1 to 4, wherein said substrate (10) is sintered in a nitrogen ambient, preferably at approximately 700°C in a 95% nitrogen - 5% hydrogen ambient. 6. A method according to claim 2 comprising the steps of: forming a layer of titanium ( 14) on the sub­ strate (10), the substrate being heated to a temperature at which the titanium has a sub­ stantially columnar grain structure with a minimal amount of amorphous matrix material (14Y), said grains (14X) having a lateral ex­ tension that approximates said lateral extension of said thin insulating region (32A); sintering the substrate (10) at approximately 700°C in a nitrogen atmosphere, said titanium reating with the substrate to form a silicide (14A) above said silicon regions and said thin insulating region (32A) without forming a silicide above said other insulating regions; and exposing the substrate (10) to an acid that preferentially removes remaining portions of said titanium without removing said silicide (14A). 7. Method according to any one of claims 1 to 6, wherein said refractory metal is formed on the substrate (10) by evaporation techniques, pre­ ferably from a plurality of offset evaporation sources. 8. Method according to any one of claims 1 to 7, wherein said refractory metal is titanium being formed on the substrate (10) at a temperature of approximately 370°C or higher. 9. Method according to any one of claims 1 to 8, wherein said etchant comprises a 10: 1 mixture of hydrogen peroxide and sulfuric acid, respectively, or a 5: 1: 1 mixture of deionized water, 58% concentrated NH₄OH, and 30% concentrated H₂O₂, respectively.

Inventors: LU, NICKY CHAU-CHUN, MACHESNEY, BRIAN JOHN, MILES, GLEN LESTER, MOHLER, RICK LAWRENCE, TING, CHUNG-YU, WARLEY, STEPHEN DAVID
Applicants: INTERNATIONAL BUSINESS MACHINES CORPORATION
Application year: 1987
Main classification: H01L21
IPC codes: H01L21, H01L23, H01L29