AMORPHOUS PHOTOVOLTAIC ELEMENTS

Abstract: Disclosed are pin or nip type amorphous photo­ voltaic elements having an i-typc layer comprised of an a-SiGe: H film, which are characterized in that an i-type amorphous silicon buffer layer (10) is disposed between the layers of p-type (4) and i-type (5) and thus, the mutual diffusion of impurities and/or elements added to the i-type and/or the p-type layers through the p/i boundary is effectively restricted due to the presence of the buffer layer, as a result the formation of defects at the p/i boundary and the deterioration of the p-type layer being effectively prevented, the properties important to these kinds of devices, such as Voc, Jsc, FF being substantially improved, thus making it possible to provide photovoltaic elements such as solar batteries having a practically acceptable long life span and a high reliability.

Description: The present invention relates to an amorphous photovoltaic element. More particularly, the present invention pertains to an amorphous photovoltaic element such as a solar battery including a pin type junction having excellent electric properties, a high photoelectric conversion efficiency and a high reliability. Such a solar battery is a typical example of an electronic device utilizing the photovoltaic effect. The solar battery permits the conversion of the solar energy, which has a quite wide spectral distribution spreading over the range of from 0.3 to 3 µm, or the light energy of other light sources into the electric energy and therefore, it has been interested in, as a clean, exhaustless, future energy source. In the solar battery, the conversion of the light energy to the electric energy is performed due to the photoelectric conversion effect which is the most essential property of different kind of junctions such as heterojunctions, pn or pin (or nip) junctions of a semiconductor or Schottky junctions. These junctions absorb incident light and form pairs of electrons at the boundary thereof and (positive) holes which can be picked out and used as an electric current, for example, in the case of the solar battery. Recently, amorphous semiconductor films such as an amorphous silicon (a-Si: H) film have been interested in as a material for preparing photovoltaic elements such as solar batteries, because of their interesting properties such that an amorphous layer having a low thickness and a relatively large area may be prepared, that layers having different compositions may easily be realized and that the electrical and optical properties of the layer may widely be changed or controlled. For instance, solar batteries obtained using amorphous semiconductor materials have an absorption coefficient with respect to the light of about 500nm, which is the peak value in the solar energy distribution, ten times larger than that of the crystalline silicon. These amorphous layers may be formed at a relatively low temperature condition and may directly be formed from starting materials by, for example, the glow discharge dissociation technique. Moreover, the junctions such as mentioned above can also be formed easily. In order to design, produce and practically use a photovoltaic element, in particular, a solar battery, it is quite important to enhance or improve the photoelectric conversion efficiency thereof. Under such circumstances, Y. Hamakawa et al. (Appl. Phys. Lett., 1979, 35 , 187) proposes a solar battery composed of a multi-layer structure such as the pin/pin/ ... /pin or nip/nip/ ... /nip-type structure in which an asymmetric electromotive force is generated due to the recombination taking place at the boundary between the n-type and p-type layers directly in contact with each other. In this kind of solar battery according to this article, a number of unit solar cells are electrically communicated in series and accordingly it is expected to supply a high electromotive force. In addition, it is desirable to strictly select a starting material for manufacturing solar batteries and a structure which makes it possible to impart a good absorption coefficient, with respect to the whole solar energy extending over a wide spectral range, to a solar battery in order to substantially improve the conversion efficiency thereof. For that purpose, it has been proposed that a certain element (a modifier) is added to an a-Si: H layer to change the width of the forbidden band thereof. As such modifier, there may generally be mentioned such as Group IV elements of the Periodic Table capable of forming 4-coordination bonds with silicon atoms. If carbon is, for instance, used as the modifier, the width of the forbidden band of the amorphous silicon layer becomes wider than those of the layer free of the modifier. Therefore, if the layer of the amorphous silicon containing carbon atoms as the modifier is used as the p-type layer situated at the side which is irradiated with the incident light, a solar battery which effectively converts the energy of the light having relatively short wavelength to the electric energy is provided, that is, the use of such modifier permits the improvement in the photoelectric conversion efficiency (see, for example, Y. Hamakawa et al., Appl. Phys. Lett., 1981, 39 , 237). While, if germanium, Ge (for example, amorphous silicon germanium=a-SiGe: H, see, G. Nakamura et al., J. Appl. Phys., 1981, 20 , Suppl. 20-2, 227), tin (Sn), lead (Pb) or the like is used as the modifier, the forbidden band of the amorphous silicon layer becomes thinner than that of the layer free of the modifier. Therefore, if such modified amorphous silicon layer is used to form an i-type layer, a solar battery including such i-type layer is improved in the sensitivity to the light of longer wavelength and thus effectively absorbs the light having a long wavelength. In general, it becomes possible to effectively utilize the solar energy spreading over a wide spectral range by arranging the layers constructing a solar battery so that the width of the forbidden band of the layers are gradually narrowed from the side irradiated with the incident light by the use of the p-type and i-type layers having properties improved by the addition of modifiers. An amorphous silicon solar battery comprising an i-type layer, as the carrier source, composed of an a-Si: H film which provides a high photoelectric conversion efficiency and which is a cheap and thin film forming material for this type of solar battery, is expected to have excellent and acceptable properties, because of its high sensitivity to the light of long wavelength. Thus, a solar battery comprised of a glass substrate/a transparent electrode/a pin junction/a metal electrode, in which the p-type and n-type layers are comprised of an a-Si: H film and the i-type layer is composed of an a-SiGe: H film may be manufactured. However, the pin type of solar battery having the construction mentioned above is inferior in its battery properties. Therefore, it is required to improve the properties thereof in order to put solar batteries having such structure into practical use. A device of the above structure having an i-type a-SiGe:H film with a bandgap which decreases gradually by as varying Ge content is known from Patent Abstracts of Japan, Vol. 5, No. 167 (E-79) [839], 24th October 1981. Referring to the conventional type of solar battery mentioned above in which a p-type layer of a-Si: H is disposed adjacent to the i-type layer of a-SiGe: H, impurities such as boron (B) are added to the p-type layer to assure the p-type nature thereof, since the a-Si: H layer has a weak n-type nature. However, the impurities tend to penetrate into the neighbouring i-type layer due to the diffusion or they contaminate the i-type layer during the deposition procedures (in the film forming chamber). Thus, the i-type layer is possibly converted to p-type one, which may cause the lowering of the strength of the internal field and the reduction in the output properties. Moreover, there is often observed the occurrence of the lattice mismatching at the boundary between the i-type layer to which germanium (Ge) is added and the p-type layer free of Ge (hereunder referred to as the p/i boundary). These defects result in the extreme reduction of the output current and the fill factor (FF) as well as other output properties of the solar battery. That is, the output current, the open circuit voltage (Voc) and the factor (FF) of the solar battery are all reduced. In general, the p-type layer serves to conduct the light as much as possible to the neighbouring i-type layer and also acts as an electrode of the battery. However, the added element (Ge) in the i-type layer penetrates into the p-type layer due to the diffusion during the formation of the former, in particular, around the p/i boundary, which leads to the reduction of the bandgap energy of the p-type layer. Thus, the film characteristics inherent to the p-type layer are remarkably impaired and the latter does not perform the role for guiding light to the neighbouring i-type layer. As a result, the amount of light which arrives at the i-type layer is largely reduced and in turn this results in the reduction in the output current of the solar battery. Moreover, the reduction in the bandgap energy causes the lowering of the built-in potential and accordingly the open circuit voltage having a close relationship with respect to the built-in potential is lowered. These phenomena i.e., the penetration of boron (B) included in the p-type layer into the i-type layer due to the diffusion, the electric junction loss due to the lattice mismatching at the p/i boundary and the diffusion of Ge atoms contained in the i-type layer into the p-type layer mentioned above possibly take place not only during the film formation procedures but during the use of the devices having the structure described above, such as solar batteries, and they cause the reduction in the output properties thereof. As seen from the above description, conventional amorphous multi-layer type devices such as solar batteries have a lot of disadvantages to be eliminated. Consequently, there has been a strong need for solar batteries which have no such disadvantage and, on the contrary, provide an extremely high reliability and a high photoelectric conversion efficiency. The improvement of such solar battery in the above mentioned points makes it possible to promote the practical use thereof. Thus, the principal object of this invention is to provide a new pin type amorphous photovoltaic element having a novel construction which permits the elimination of the disadvantages accompanied by the conventional devices such as solar batteries. Another object of the present invention is to provide a solar battery having a high photoelectric conversion efficiency and a high reliability such that the reduction in output properties is not caused even during the practical use thereof. A still further object of this invention is to provide a method for manufacturing the photovoltaic elements having excellent properties such as mentioned above. The inventors of this application have conducted studies on the conventional pin-type amorphous solar batteries in which the i-type layer is composed of an a-SiGe: H film, while the p-type layer is composed of an a-Si: H film including an impurity such as boron (B) and found that the disadvantages of the conventional solar battery explained above result from the fact that there is a transfer of the added elements such as B and Ge between the neighbouring layers, in particular, the i-type layer and the p-type layer and further found that these problems can effectively be solved by disposing or inserting a buffer layer between the p-type layer and the i-type layer. Thus, the above mentioned and other objects of this invention can be achieved by providing a pin-type photovoltaic element having a novel construction which is excellent in its output properties compared with the conventional one, the photovoltaic element according to the present invention comprising a pair of electrodes and an amorphous silicon body sandwiched between the pair of electrodes, the amorphous silicon body including a p-type amorphous silicon layer, an i-type amorphous silicon germanium layer, and a n-type amorphous silicon layer laminated in the named order, characterized in that an i-type amorphous silicon buffer layer having a thickness of 10 to 50 nm (100 to 500 Å) is disposed between the p-type layer and the i-type layer, and in that germanium is added to a portion of the buffer layer at the side adjacent to the i-type layer over a thickness of from 5 to 15 nm (50 to 150 Å), said portion having a germanium concentration gradient which gradually increases towards the i-type layer. The pin type amorphous photovoltaic element according to the present invention will now be described in more detail referring to the accompanying drawings; wherein Fig. 1 is an illustrative sectional view of a conventional photovoltaic element; Fig. 2 is an illustrative sectional view of a preferred embodiment of the solar battery according to the present invention; and For simplicity, the present invention will hereunder be explained with reference to the solar battery as a typical example of the photovoltaic element, however, it should be understood that the invention is not restricted thereto. A solar battery conventionally proposed has, for example, a structure as shown in the attached Fig. 1. From Fig. 1, the conventional solar battery, in general, comprises a glass substrate 1 and a transparent electrode 2, an amorphous layer 3 comprising a p-type layer 4, an i-type layer 5 and an n-type layer 6 and a metal electrode 7 successively formed on the substrate 1 in this order. The solar battery having the structure shown in Fig. 1 is greatly improved in the sensitivity to the light of long wavelength due to the fact that an a-SiGe: H film is used as the i-type layer, as explained before, however, it cannot practically be applicable because of its low output current, open circuit voltage and fill factor. The inventors found that the reduction in these factors is mainly caused due to, in particular, the penetration of impurities such as boron included in the p-type layer into the neighbouring i-type layer due to its diffusion taking place through the p/i boundary and such phenomenon leads to the reduction in the internal electric field and becomes a cause of the disadvantages mentioned above. The problems encountered in the conventional photovoltaic elements and in particular the solar battery will hereunder be explained more in detail. In order to put the solar battery into practical use, it is quite important to improve the properties, particularly, the photoelectric conversion efficiency (E ff ), the open circuit voltage (Voc), the short circuit current density (Jsc) and the fill factor (FF) of the solar battery. However, it is not impossible to obtain a pin (or nip) type or a multi-layer type amorphous solar battery having acceptable properties if one adopts the structure shown in the attached Fig. 1, since the materials for films used to form, for instance, the multi-layer type battery are insufficient in their physical and chemical properties. The reduction in the properties of the solar battery is mainly caused due to the following phenomena: (i) the mutual diffusion of the dopant or added element in the p-type layer and the i-type layer, which takes place between these layers through the p/i boundary; (ii) the contamination of each layer with such dopants or added elements during the film forming procedures; and (iii) the formation of junctions due to the presence of heterogeneous materials at the p/i boundary which leads to the occurrence of the electrical junction loss. These phenomena cause the reduction in the bandgap energy of the p-type layer and in turn the reduction of the built-in potential and the open circuit voltage closely related to the latter. Moreover, the amount of light arriving at the i-type layer is also lowered due to these phenomena and as a result the output power (or the conversion efficiency) of the solar battery is exceptionally reduced. The phenomena which cause the deterioration of the properties are often observed even during the use of the solar battery and consequently the life span thereof is remarkably shortened. However, the disadvantages accompanied by the conventional solar batteries mentioned above can surely be eliminated by adopting the structure in which a buffer layer, hereunder described more in detail, is incorporated. A preferred example of the amorphous photovoltaic element according to the present invention is illustrated in Fig. 2 and it comprises, for example, a transparent substrate 11, a transparent electrode 12, amorphous layers 13 and a metallic electrode 17 which are arranged in order from the side to which the incident light is irradiated, the amorphous layers 13 being further comprised of four layers i.e., a p-type layer 14 (a-Si: H), a buffer layer 10 (a-Si: H), an i-type layer 15 (a-SiGe: H) and an n-type layer 16 (a-Si: H). In this embodiment, the incident light is irradiated to the surface of the substrate 11 and therefore, the substrate 11 and the electrode 12 are made from transparent materials. Moreover, in this Fig. 2, the solar battery including only one pin junction is illustrated, however, the solar battery according to the present invention is not restricted to such embodiment and may include two or more of the pin junctions. In such case, it is also advantageous to insert a buffer layer between the neighbouring layers of p-type and i-type if the i-type layer is comprised of an a-SiGe: H film. In the amorphous photovoltaic elements such as solar batteries, each layer of p-type, i-type or n-type contains hydrogen and/or fluorine. These elements act as a terminator for dangling bonds existing in each amorphous layer. The thickness of the buffer layer, the use of which is the principal characteristic of the present invention, falls within the range of from 10 to 50nm (100 to 500Å). This is critical in the present invention and if the thickness thereof is less than 10nm (100Å), the buffering effect of the layer cannot be expected at all i.e., the diffusion of impurities possibly takes place through the p/i boundary, while if the thickness is higher than 50nm (500Å), the amount of light arriving at the lower layers situated beneath the p-type layer is extremely reduced, although the diffusion is effectively restricted in this case. Therefore, it is preferred to limit the thickness to the above range. Moreover, Ge is added to a part of the i-type buffer layer over the thickness of from 5 to 15nm (50 to 150Å) at the side thereof adjacent to the i-type layer so that the amount of added Ge is gradually increased towards the i-type layer. In general, the i-type layer comprised of a-Si: H is somewhat in the n-type state and therefore, a Group III element such as boron (B) is added thereto to convert the layer to the intrinsic one. The amount of such element added falls within the range of from 0.2 to 3ppm which is also a critical condition in the present invention. That is, if the amount thereof is less than 0.2ppm, the intrinsic layer cannot surely be obtained, while if it is added in an amount of more than 3ppm, the layer becomes a p-type one. As the substrate for the photovoltaic elements according to the present invention, there may be mentioned such as glass; ceramics such as Al₂O₃, ZrO₂, SiC, Si₃N₄, TiO₂ and AlN; plastics such as polyimides, polyethylene terephthalate, polyethylene, polystyrene, polypropylene and polyvinyl chloride; metals such as Al, Cu, Mo, mild steel; alloys such as stainless steel, Kovar (R), Invar (R), Super invar (R), Stainless invar (R) and Fe-Pb alloys. The thickness thereof is in general about 1mm, however, it may voluntarily be selected depending on the purpose, the size of the element or the like. In addition, the materials for the transparent electrode may be selected from the group consisting of conductive films such as films of ITO (Indium Tin Oxide) and SnO₂ and the material for the metallic electrode may be selected from the group consisting of Al, Au and Cu. The materials for the substrate and the electrode are selected depending on the type or kind of the photovoltaic element. For example, in the solar battery as shown in Fig. 2, these members should be composed of transparent materials since the incident light is introduced into the element through the substrate. Moreover, the photovoltaic element according to the present invention may be composed of a substrate of an opaque material and an electrode 17 of a transparent material such as ITO so that the incident light can be introduced into the element through the electrode 17. It is also possible to use the substrate made from a conductive material so that the substrate can also act as the electrode through which the output current or voltage can be picked up. The electrode layer, generally, has a thickness of 500nm (5,000Å) (in the case of the transparent electrode, it being in the order of 1 µm) and it can be deposited according to a conventional film forming technique such as the CVD method, the vacuum deposition method. In addition, a conventional technique such as the photolithography technique can be utilized when the patterning of the electrode is necessary. Each amorphous layer is composed of the materials already mentioned and can be deposited on the substrate or the electrode according to various kinds of CVD techniques such as the plasma CVD (the glow discharge method or the like), the photo CVD (the direct excitation photo CVD, the mercury sensitized photo CVD or the like), the sputter method. For instance, when the amorphous layers are formed according to the plasma CVD, the n-type layer is formed utilizing a principal ingredient such as SiH₄, Si₂H₆, SiF₄; a diluent thereof such as H₂ and a dopant gas such as PH₃, AsH₃, Sb(CH₃)₃, Bi(CH₃)₃. In order to form the i-type layer, an Si source such as SiH₄, Si₂H₆ or SiF₄ and a Ge source such as GeH₄, GeF₄ are used together with a diluent gas such as H₂ as in the case of the i-type layer. The buffer layer is produced from a principal ingredient such as SiH₄, Si₂H₆, SiF₄ in combination with a diluent (such as H₂). Ge is added to a part of the buffer layer (the graded layer) at the side adjacent to the i-type layer so that the Ge concentration is gradually increased towards the latter as mentioned above. The graded layer can be produced by adding a Ge source such as the materials listed above to the ingredient gas for the buffer layer and changing the amount thereof with time during the film forming step. The thickness of the part of the buffer layer, to whcih Ge is added, falls within the range of from 5 to 15nm (50 to 150Å), preferably 7 to 12nm (70 to 120Å). This is critical and if the thickness thereof is less than 5nm (50Å), the elimination of the Ge diffusion (i.e., buffering effect) is not assured, while if it is more than 15nm (150Å), the buffering effect is not expected. Therefore, the thickness is desirably restricted to the range described above. Finally, in order to form the p-type layer, an Si source such as SiH₄, Si₂H₆ or SiF₄ is used under the presence of a diluent H₂. The effective ingredient for the dopant for the p-type layer is B₂H₆. In Fig. 2, the amorphous layers deposited on the substrate are arranged in the order of p-b-i-n (b: the buffer layer), however, they can be deposited in the reverse order i.e., n-i-b-p from the side of the substrate. According to the present invention, an antireflection film 20 (in Fig.2, this is described by dotted line) may be formed on the transparent conductive film existing at the top to which the incident light is irradiated in order to improve the light absorptivity efficiency of the element. In this respect, the transparent conductive films such as ITO or SiO₂ films can act as the antireflection film and as the electrode simultaneously and therefore, it is possible to use a transparent conductive film such as ITO or SiO₂ as the transparent electrode placed at the light incidence side, in which the ITO or SiO₂ film can simultaneously perform two functions, on the one hand as the electrode and on the other hand as the antireflection film for incident light. As the materials for the antireflection film except for ITO, there may be mentioned such as SiO, SiO₂, ZrO₂, ZnS, Si₃N₄, Ta₂O₅, Al₂O₃, Sb₂O₃, TiO₂. Moreover, those having a multi-layer construction may also be applicable (for instance, Ta₂O₅/SiO₂). These antireflection films can be produced by any one of known film forming techniques such as the vacuum deposition method, the sputter method, the plasma CVD method, which can suitably be selected depending on the kind of the material to be deposited. According to the present invention, the various factors, which may possibly cause the deterioration of the properties of the photovoltaic elements such as solar batteries, can effectively be eliminated by disposing or inserting a buffer layer comprised of an i-type a-Si: H layer having a desired thickness and including a graded layer of a desired thickness at the side adjacent to the i-type layer, between the p-type and i-type layers. It has been known that the diffusion of added elements and/or doped elements takes place therebetween. In other words, the a-Si: H layer (the buffer layer) serves as a barrier or a buffer for substantially restricting the occurrence of the diffusion of a dopant (such as B in the p-type layer) and an added element (such as Ge in the i-type layer) for modifying the film property, which takes place between the neighbouring layers of p-type and i-type, and effectively prevents each film from the deterioration of its property. This makes it possible to maintain the inherent characteristics (the electric and/or chemical one) of each film. Therefore, in the photovoltaic element according to the present invention, the reduction in the bandgap energy of the p-type layer and that in the amount of light arriving at the i-type layer are not observed due to the elimination of the diffusion or penetration of the element Ge included in the i-type layer, even during the practical use thereof. Therefore, the inherent characteristics of the p-type layer can effectively be available, and as a result, the layer serves to conduct a large amount of light as much as possible to the i-type layer and also serves as the electrode. While, referring to the i-type layer, it is not converted to the p-type one, since the diffusion or penetration of boron (B) included in the neighbouring p-type layer into the i-type layer is effectively be prevented due to the presence of a buffer layer and thus, the i-type layer surely maintains the internal field of a sufficient strength. This allows us to obtain a photovoltaic elements having excellent output properties such as the output current, the open circuit voltage and the fill factor. With respect to the a-SiGe: H film, the amount of Ge to be added thereto may generally be adjusted to change the width of the forbidden band of the i-type layer and accordingly the amorphous silicon solar battery including the i-type layer comprised of such a-SiGe: H film has a high sensitivity to the light having a long wavelength and thus it is considered to be effective to put it into practical use. Therefore, if a buffer layer is incorporated in the solar battery having the construction mentioned above, according to the present invention, to assure the stability of the p-type and i-type layers, an excellent photovoltaic element, for instance, a solar battery can be provided, which has an extremely good sensitivity to the light of long wavelength and in turn provides a high photoelectric conversion efficiency. Moreover, the Ge element is added to the buffer layer so that the concentration thereof is gradually increased towards the neighbouring i-type layer over a thickness of from 5 to 15nm (50 to 150Å) according to the present invention. This treatment is quite effective to restrict the formation of junction, which causes the electrical junction loss, at the boundary between the i-type buffer layer (a-Si: H) and the i-type layer (a-SiGe: H) due to the presence of the buffer layer. Moreover, the inherent properties of the p-type and i-type layers can certainly be maintained due to the addition of Ge to the buffer layer. To that effect, it is important to add the element Ge to the part of the buffer layer in which a Ge concentration gradient is established so as to increase the Ge concentration towards the i-type layer. Furthermore, the structure of the photovoltaic element according to the present invention makes it possible to provide final articles having a remarkably long life span and a high reliability, due to the elimination of the diffusion of the added elements and/or impurities, which is encountered in the conventional devices, through the p/i boundary even during the practical use. In addition, in the photovoltaic elements according to the present invention, an antireflection film can be deposited on the top of the element, to which the incident light is irradiated, so as to improve the light absorption efficiency and the conversion efficiency of the elements. The antireflection film may be a single film effective to the light having a wavelength falling within a specific range or it may be a film of multi-layer structure obtained by laminating at least two films of materials having different refractive indices, which is effective to the light over a wide range of wavelengths. The buffer layer according to the present invention may be applicable to any kind of photovoltaic elements including an i-type layer composed of the a-SiGe: H film. Moreover, the photovoltaic element according to the present invention can be used as a component for a tandem-type photovoltaic element or a multi-color photovoltaic element, which comprises the photovoltaic element according to the present invention and other photovoltaic elements optically connected in series. The present invention has been described with respect to the solar battery given as the specific example of photovoltaic elements, however, the present invention also includes other photovoltaic elements such as the photo detector for the optical communications and photosensors, for instance, photodiodes, avalanche photodiodes. In any case, the technical idea of the invention should be considered to be applicable to devices comprising at least one pin or nip junction and including an i-type layer of a-SiGe: H film.

Claims: A photovoltaic element of pin type structure comprising a pair of electrodes and an amorphous silicon body sandwiched between the pair of electrodes, the amorphous silicon body including a p-type amorphous silicon layer, an i-type amorphous silicon germanium layer, and a n-type amorphous silicon layer laminated in the named order, characterized in that an i-type amorphous silicon buffer layer having a thickness of 10 to 50 nm (100 to 500 Å) is disposed between the p-type layer and the i-type layer, and in that germanium is added to a portion of the buffer layer at the side adjacent to the i-type layer over a thickness of from 5 to 15 nm (50 to 150 Å), said portion having a germanium concentration gradient which gradually increases towards the i-type layer. A photovoltaic element as in claim 1 wherein the thickness of said portion of the buffer layer to which germanium is added is within the range of from 7 to 12 nm (70 to 120 Å). A photovoltaic element as in claim 1 or 2 wherein the i-type layer contains a Group III element of the Periodic Table in an amount of from 0.2 to 3 ppm. A photovoltaic element as in any one of claims 1-3 wherein an antireflection film is disposed on the top of the element to which the incident light is irradiated. A photovoltaic element as in any one of claims 1-4 wherein each layer includes hydrogen and/or fluorine.

Inventors: FUJITA, NOBUHIKO, HITOTSUYANAGI, HAJIME, ISHII, MASAYUKI
Applicants: SUMITOMO ELECTRIC INDUSTRIES LIMITED
Application year: 1986
Main classification: H01L31
IPC codes: H01L31