A FILM AND A PROCESS FOR ITS PRODUCTION

Abstract: A laminated film and a process for its production with high polymers whose film inherently cannot be readily obtained by LB process comprises modifying the high polymers, and if re­ quired, further by cyclizing the product partially or wholly. The produced thin films have extremely excellent heat resistance, good chemical resistance and mechanical characteristics and its thickness is so small that it is generally hardly attainable, that is, less than 10,000 Å, or if desired, super-thin films of 10 to 1000 Å can be obtained.

Description: This invention relates to a film of a high polymer and a process for its production, and more particularly to a process for forming a film of a modified high polymer by Langmuir-Blodgett process. Already in 1930's it was found out by Langmuir and Blodgett that fatty acids having about 16 to 22 carbon atoms form a monomolecular film on the surface of water and such a film can be built up on a substrate, but it is only within recent years that its technical application began to be investigated. The outline of the investigation hitherto made has been reviewed in "Kotai Butsuri" (Physics of Solids) 17 (12) 45 (1982), Thin Solid Film 68 No. 1 (1980), ibid, 99 No. 1, 2, 3 (1983), Isoluble monolayers at liquid-gas interface (G. L. Gains, Interscience Publishers, New York, 1966), etc., but the conventional Langmuir-Blodgett films (hereinafter referred to as "LB film") of straight chain saturated carboxylic acids are defective in the points of heat resistance and mechanical strength, and so there is a problem that they can find no practical application as they are. In order to improve these defects investigations were made on polymerized films of unsaturated fatty acids such as ω-tricosenic acid, ω-heptadecenic acid, or α-octadecylacrylic acid; unsaturated esters of fatty acids such as vinyl stearate, octadecyl acrylate; and besides these, diacetylene derivatives, etc., but they can be said to be neither sufficiently heat-resistant nor electrically excellent. EP-A-0 003 071 (IBM) describes a method for forming a layer of polymer which comprises forming monomolecular films with a salt of unsaturated aliphatic acids containing fluorine atom through LB-method, and polymerizing thereof. As for polymers, it is known that some of the high polymers having hydrophilic groups such as polyacids, polyalcohols, ethyl acrylate, polypeptides, etc. possess a film-forming property, but any sort of modified high polymer suitable for LB materials has not as yet been investigated, and there is no excellent material for the LB film worthy of the name. In "Thin Solid Films", 134 (1985), 49-55, and J. Phys. D. Appl. Phys., 15 (1982), 55-58, LB-films from copolymers of n-Octadecyl vinyl ether/maleic anhydride and Octadecen-1/maleic anhydride, respectively, which correspond to polyacids are described. On the other hand, as a heat-resistant film there may be mentioned polyimide, but the thickness of the film of this material obtained according to spin coating process is not less than 100 nm (1000Å), usually not less than 1 mm (micron), so that it is very difficult to produce a heat-resistant thin film of a thickness not more than 100 nm (1000Å) and free from pin holes. The object of this invention is to make feasible the film formation by Langmuir-Blodgett technique, by modifying the high polymers which are inherently difficult to be formed into film according to the Langmuir-Blodgett technique, and to provide high polymer films which have a thickness hitherto never obtained easily by the conventional process along with improved heat resistance, chemical resistance, and mechanical characteristics such as adhesive strength. According to the present invention, there is to provide a process for forming a laminated built-up film by Langmuir-Blodgett technique with a high polymer which contains linear repeating units composed of a first organic group R₁ and a second organic group R₂, each being at least divalent having at least two carbon atoms, and both being connected with each other by divalent bonding group, and at least one of the hydrocarbon-containing groups R₃ and R₄ of 10 to 30 carbon atoms, which may have substituent groups, bonded to the repeating units by covalent bond. Figure 1 indicates the infrared absorption spectrum of the high polymer obtained in Example 1, and Figure 2 indicates the resalt of the thermogravimetric analysis. Figure 3 indicates the weight changes (TGA) and the heat changes (DTA) when the temperature was elevated from room temperature to 400°C, after holding this temperature for one hour, lowered to room temperature, and then elevated to 1000°C. Figure 4 indicates the relation between the surface pressure and the area per repeating unit when the precursor obtained in Example 1 was spread on the surface of water in accordance with Example 2. Figure 5 indicates the result of the FT-IR of the product obtained by building up the above on a plate of CaF₂ by Langmuir-Blodgett technique. Figure 6 indicates the surface pressure vs. area curve of the precursor obtained in Example 3. Figure 7 is the infrared spectrum of the high polymer obtained in Example 5, and Figure 8 is the result of the thermogravimetric analysis. Figure 9 indicates the relation between the surface pressure and the area per repeating unit of the high polymer obtained in Example 5. In this invention high polymers are modified so that they can be formed into film by Langmuir-Blodgett technique by introducing substituent groups for imparting hydrophobic property to the repeating units of said high polymers, and the thus modified high polymers are used for the film formation by the Langmuir-Blodgett technique. The material of the LB film used in this invention is a high polymer which contains linear repeating units comprised of a first organic group R₁ and a second organic group R₂, each being at least divalent having at least two carbon atoms, and both being connected with each other by divalent bonding group, and at least one of the hydrocarbon-containing groups R₃ and R₄ of 10 to 30 carbon atoms, which may have substituent groups, bonded to the repeating units by covalent bond. To explain in more detail, the high polymers of this invention are composed of ( A - R₁ - AB - R₂ - B ) (1) ( A - R₁ - BA - R₂ - B ) (2) ( B - R₁ - BA - R₂ - A ) (3) as the linear repeating units forming the basic skeleton. Herein R₁ and R₂ are at least divalent groups having at least two carbon atoms, preferably 5 to 20 carbon atoms. It may be an aromatic group; an alicyclic group; an aliphatic group; a group wherein an aromatic group and an aliphatic group are combined; a group wherein each of the above-mentioned groups is substituted by a monovalent group having 1 to 30 carbon atoms selected from the group consisting of an aliphatic group, an alicyclic group, an aromatic group, and a group in which an aliphatic group is combined with an alicyclic group or an aromatic group; or a group wherein each of the preceding groups is substituted by a monovalent group such as a halogen atom, nitro group, amino group, cyano group, methoxyl group or acetoxyl group, or by a group in which the above monovalent group bonds to -O-, -COO-, -NHCO-, -CO-, -S-, -CSS-, -NHCS-, -CS-. Groups characterized by a benzenoid unsaturation having at least 6 carbon atoms are preferred as R₁ and R₂ in points of heat resistance, chemical resistance and mechanical properties. AB and BA in formulae (1) to (3) represent a divalent bonding group formed by the reaction of an acidic group A and a basic group B containing a hetero-atom such as 0, N, s, P, B. More particularly, they are the groups formed by the reaction of an acidic group such as -COOR (R is an alkyl group or a hydrogen atom; the same shall apply hereinafter), -COX (X is Cl or Br; the same shall apply hereinafter), -NCO, -NCS, -CN, -CONHR. and a basic group such as -NHR'', -OR'', -SR'', -X, and The high polymers of this invention are those which were modified so that they may be formed into films by Langmuir-Blodgett technique by introducing into the repeating units as the basic skeleton shown by (1) to (3), at least one of the hydrocarbon-containing groups R₃ and R₄ of 10 to 30 carbon atoms, preferably 16 to 22, which may have substituent groups, bonded to said repeating units. The hydrocarbon-containing groups R₃ and R₄ that are contained may be two or more, respectively. The above described modification may be carried out in the following three ways: (I) R₃ (R₄) is substituted for the atom contained in AB or BA group in the linear repeating units of formulae (1) to (3). (II) R₃ (R₄) is substituted directly in R₁, R₂. (III) R₃ (R₄) is substituted through the substituent of R₁, R₂ that is other than the group used in forming the linear repeating units of R₁, R₂. Needless to say, (I), (II), and (III) may be used in combination, and R₃, R₄ may be the same or different. To illustrate (I), (II), and (III) in more detail, (I) is, as shown by the above table, an embodiment wherein R₃ (R₄) is substituted for the hydrogen atom on the nitrogen atom of AB or BA. (II) is an embodiment wherein R₃ (R₄) is substituted directly in R₁, R₂. Some of the examples are shown below. (III) is an embodiment which contains many possibilities as shown below in more detail. In the embodiment (III) at least one of R₁ and R₂ is at least trivalent, and R₃ (R₄) is substituted through the substituent which is other than the group used in forming the repeating units containing R₁, R₂. Of course, though not limited to these, the following illustrate the cases where the valence of R₁ is the same as or larger than that of R₂ with the valence being taken to be up to 6. Herein there are also listed up the examples in which R₁, R₂ are higher than quintavalent, but R₁, R₂ are preferably up to tetravalent as follows. R₁ = 3, R₂ = 2 valent R₁ = 4, R₂ = 2 R₁ = 3, R₂ = 3 R₁ = 4, R₂ = 3 R₁ = 4, R₂ = 4. The possible examples are listed in the following. In formulae (4) to (75) there are residues A/B which are not used in forming the linear repeating units, but (III) is the embodiment in which R₃ (R₄) is substituted through these substituent groups. For instance, if such a group is A in (4) to (75), -COOR₃ (R₄), -CONHR₃ (R₄), -NHCOOR₃ (R₄), -NHCSOR₃ (R₄), -SO₂NHR₃ (R₄), and if B, -NHR₃ (R₄), -OR₃ (R₄), -SR₃ (R₄) can be substituted. R₁, R₂ are an organic group which is at least divalent having at least two carbon atoms, but they preferably contain a benzenoid unsaturation having at least 6 carbon atoms. The term "benzenoid unsaturation" as used in this invention is used for the structure of carbocyclic compounds in contrast to the quinoid structure, and means a structure which is the same as the carbon ring contained in the ordinary aromatic compounds. To explain R₁, R₂ in more detail, the preferable examples will be given below. Of the foregoing more preferable examples for R₁ and R₂ are: R₃, R₄ are the hydrocarbon-containing groups of 10 to 30, preferably 16 to 22 carbon atoms, and the preferable example is a monovalent group selected from aliphatic groups, aliphatic groups bonded with alicyclic groups, aliphatic groups bonded with aromatic groups, or a group as listed below: (CH₃) (CH₂)n-1 , CH₂ = CH (CH₂)n-2 , Herein ℓ + m = n - 5, n = 10-30, or preferably 16-22, and more preferred examples are aliphatic straight chain hydrocarbon groups. As substituent groups there may be mentioned halogen atoms, nitro groups, amino groups, cyano groups, methoxy groups or acetoxy groups, but these are not indispensable, although fluorine atoms are sometimes used to improve the hydrophobic properties. That is to say, the length of the alkyl chain can be shortened by introduction of fluorine. For instance, in C₈F₁₇(CH₂) k -, K = 2 will suffice, and film formation may be rendered possible with 10 carbon atom. The actual examples of the high polymers which can be used in the process for forming a film of this invention will become clear by substituting in formulae (1) to (75) the actual examples of R₁, R₂, R₃, R₄, A, B, AB, and BA and the actual examples of the embodiments of substituting R₃, R₄. Although no copolymer is contained in formulae (1) to (75), needless to say, the copolymers that can be known by analogy from them are also within the scope of this invention. The mixture of the high polymers in this invention are also within the scope of this invention. Further, though not indispensable, the high polymers of this invention may be those which have been substituted by a group containing a hydrocarbon of 1 to 9 carbon atoms according to the embodiments (I), (II), or (III). The molecular weight of the high polymers of this invention is not particularly limited and even when the molecular weight is low, film formation is possible by the process of this invention, but the heat resistance, mechanical strength and chemical resistance of the film obtained are not good. On the other hand, when the molecular weight is too large, the viscosity also becomes too high for the film formation to be feasible. Accordingly, the number average molecular weight should preferably be on the order of 2,000 to 300,000. The practical examples of the high polymers of this invention which can be derived from formulae (1) to (75) are as follows. In the above formulae "→" indicates isomerization. For instance, the case of formula (78) may be explained as follows. This invention involves both cases where each of (78-1) and (78-2) exists singly and where (78-1) and (78-2) co-exist. The other examples may be found in books such as "Heat Resistance of High Polymer" (published by Baifukan, March 5, 1970) and "Thermal Decomposition and Heat Resistance of High Polymer" (published by Baifukan, March 15, 1974) edited by Hirotaro Kambe. Now with reference to the case where R₃ = R₄ = CH₃(CH₂)₁₇- in formula (80) the process for preparation of these modified high polymers will be explained below. The compound which is obtained by the alcoholysis of pyromellitic acid dianhydride is acylated with thionyl chloride at a temperature of not lower than -10°C, a temperature up to near the boiling point of the acid halide being preferable about 0°-40°C in an organic polar solvent under a substantially anhydrous condition, followed by reacting the resulting product with diaminodiphenyl ether at a temperature of not lower than -10°C, preferably -10°C to +20°C, more preferably from 0° to +10°C. However, in the latter stage of the reaction, the use of reaction temperature over 20°C is favorable to complete the reaction. The acylation and the amidation are usually carried out at a temperature between about 0°C to -10°C, but as the substituent groups such as long chain alkyl groups have the tendency of freeze solidifying in this invention, they should preferably be carried out at a temperature of not lower than -10°C. In the above case, of course, either raw materials having different substituent groups may also be mixed to give copolymers, or tetracarboxylic acid dianhydride or diamine having no substituent group or having substituent groups not more than 10 carbon atoms may be mixed in an amount of about 0 to 30%. The amphiphilic polyimide precursor thus prepared may be used as the material of the LB film after having been separated and purified, or may be made directly into a spreading solution of the LB film by adding chloroform, benzene thereto after the preparation. Next, explanation will be given to the LB film used in this invention. The process for forming LB film comprises spreading a film-forming material on the surface of water, compressing the material thus spreaded on the surface of water at a constant surface pressure to form a mono-molecular film, and then transferring the film formed onto a substrate by repeatedly passing the substrate through the film. Besides the above described process (the vertical dipping method) there may be mentioned horizontal dipping method, revolving cylindrical method ("Shin Jikken Kagaku Koza" " vol. 18 , "Interface and Colloid", 498 -508). Thus, any of the processes usually carried out can be used optionally. The Langmuir-Blodgett technique is an excellent method, for forming oriented thin films of not less than 100 nm (1000 Å), or of several tens nm (hundreds Å) or several nm (tens Å) in thickness with an accuracy of some nm (tens Å), and thus, the thin films on the substrate of this invention may also have the same characteristics. However, even the films having a thickness of µm (10,000 Å) or more can also be obtained by the technique. In general, as the solvent is selected from benzene, chloroform that are insoluble in water and vaporise in the gaseous phase, but in the case of the high polymers of this invention, it is desirable that in order to enhance the solubility an organic polar solvent is used in combination. The preferable organic polar solvent is N,N-dimethylformamide, N,N-dimethylacetamide, N,N-diethylformamide, N,N-diethylacetamide, N,N-dimethylmethoxyacetamide, dimethyl sulfoxide, N-methyl-2-pyrrolidone, pyridine, dimethylsulfone, hexamethylphosphoramide,tetramethylenesulfone, dimethyltetramethylenesulfone. When benzene, chloroform, are used in combination with the organic polar solvent, it is considered that during the spreading benzene, chloroform vaporise into the gaseous phase, while the organic polar solvent is dissolved in a large amount of water. The substrate used in this invention is limited depending on to what the thin film of this invention is applicable, but otherwise there is no particular limitation, so that as the substrate use can be made of not only the general inorganic substrates such as glass, alumina, quartz, but also metals, plastics, semi-conductors of Groups IV, III-V, II-VI, such as Si, GaAs, ZnS; ferroelectric substances such as PbTiO₃, BaTiO₃, LiNbO₃, LiTaO₃. Also, use can of course be made of those which were subjected to surface treatment as usually carried out in practice. This invention is characterized in that high polymers having a good heat resistance can be formed into thin films on a substrate by Langmuir-Blodgett technique, and moreover, in some cases thin films having a still further improved heat resistance can be formed on a substrate by causing ring closure to take place partially or wholly in the thin films. Among the examples of (76) to (95), (78) to (90) are the cases where the ring closure takes place partially or wholly to form a five- or six-membered ring containing hetero atoms, with the structure after the complete ring closure being shown below. There is no particular limitation to the process for ring closure, but, for instance, in the case of the imidation of the isomeric compound of the formula (80), by heating to 200 to 400°C, the following reaction takes place and the ring closure is accomplished. High polymer of formula (80) In the above case, the group which was introduced for the purpose of increasing the hydrophobicity is eliminated as an alcohol, but as the eliminated alcohol can be removed at a temperatures of 200 to 400°C, if required, under a gas flow or a vacuum, highly heat-resistant polyimide thin films can be obtained. Now, reference will be made to the uses of these thin films. The thin films of this invention can be used not only in the field of electronics, but also in extensive fields such as energy conversion, material separation by making use of the characteristic feature such that they are extremely thin films excellent in heat resistance, chemical resistance, and mechanical strength. In the field of electronics, wherein conductivity, photo-conductivity, optical characteristics, insulating ability, thermal characteristics, or chemical reactivity are most important, they can be used as optical recording film, resist film, insulating film, thin film for capacitor, liquid crystal orientation film, polarizing film, sensor film, and above all, as insulating film, they can be used as insulating layer in the electrical and electronic elements having the structure of MIS, MIM in which various kinds of semiconductors or metals have been combined therewith as insulating layer of IC or LSI, and also, can be made into field-effect transistor, photoelectric device, light emitting device, light receiving device, light detecting device, thermionic transistor. In particular, the thin films of this invention are effective in MIS, MIM devices utilizing tunnel effect, and also, can be used as insulating film of JJ (Josephson Junction). With reference to some examples the process for preparation of the high polymers of this invention and the process for forming films will be explained below. EXAMPLE 1 2.18 g (0.01 mole) of pyrromellitic acid dianhydride and 5.40 g (0.02 mole) of stearyl alcohol were reacted at about 100°C for 3 hours in a flask while passing dry nitrogen therethrough. The reaction product obtained was dissolved in 40 cc of hexamethylphosphoramide and cooled to 0 to 5°C. Then 2.38 g of thionylchloride was dropwise added thereto at about 5°C, and after the dropping about 5°C was maintained for one hour and the reaction was completed. Thereafter 2 g (0.01 mole) of diaminodiphenyl ether dissolved in 50 cc of dimethylacetamide was dropwise added at 0 to 5°C, and after the dropping the reaction was continued for about one hour, and then the reaction mixture was poured into 600 cm³ of distilled water to precipitate the reaction product, which was filtered and dried at 40°C to give about 9 g of pale yellow powder. IR spectrum analysis, thermogravimetric analysis (TGA-DTA), and measurement of molecular weight by GPC were carried out with the following results. IR Spectrum Analysis The IR chart taken by KBr disc process is as shown in Figure 1, in which the characteristic absorptions of ester, amide I, II, III, alkyl chain, and ether are seen. Thermal Analysis (TGA-DTA) The result of the measurement using an apparatus of RTG-DTA (H) type analyser manufactured by Rigaku Denki with full scale 10 mg for TGA and 100 µV for DTA by elevating the temperature at a rate of 10°C/min to 1000°C, in a nitrogen flow (30 mℓ/min) is as shown in Figure 2. In the TGA there are inflection points at 192, 271, 318, 396, and 592°C, and in the DTA there is a characteristic peak near 657°C. On the other hand Figure 3 shows the result when the temperature was raised to 400°C at a rate of 10°C/min. and after having been held at 400°C for one hour, returned to room temperature, and then raised to 1000°C at a rate of 10°C/min. By holding the temperature at 400°C for one hour the weight attained almost a constant weight indicating the termination of the polyimidation reaction. Even when this product was cooled to room temperature and again heated there was no change in the weight until exceeding 450°C, and it was clearly shown that the thermal decomposition begins at 584°C which is just the same as the thermal decomposition temperature of polyimide film. Thus, it was found that by the termination of the polyimidation reaction there is obtained a product whose heat resistance is comparable to that of polyimide film. Measurement of Molecular Weight by GPC The number average molecular weight which was computed by comparing the result of GPC measured in N,N-dimethylacetamide solvent with the standard sample of polystyrene was about 50,000. EXAMPLE 2 25 ml of developing solution for LB film was prepared by dissolving 55.1 mg of the product in Example 1 in a mixed liquid of distilled chloroform/dimethylacetamide = 8/2 (volume ratio). On the surface of bi-distilled water at 20°C the relation between the surface pressure and the area per repeating unit was measured, and there was obtained the result as shown in Figure 4. The surface presure rises rapidly from about 0.75 nm²/unit (75 Å²/unit) and a good condensed film was formed. The limiting area was 0.6 nm²/unit (60 Å²/unit) and the collapse pressure was also found to be 55 dyne/cm which is an extremely high value as high polymer film. Further, even when the film was held on the surface of water maintaining the surface pressure at 250µN/cm (25 dyne/cm) no decrease in the area was recognized over two hours, indicating the stability of the film. Next, maintaining the surface pressure of the film on the surface of water at 250µN/cm (25 dyne/cm), built-up films of 61 and 60 layers, respectively, were deposited on a glass substrate and a CaF₂ plate at a dipping speed of 10 mm/min by LB technique. From the film obtained on the CaF₂ plate there was obtained FT-IR spectrum as shown in Figure 5, which was found to coincide with IR of the compound obtained in Example 1. It was also confirmed that the built-up film was a Y type film according to the area-time curve. Further, in the X-ray diffraction of the built-up film, one peak was observed at 2ϑ=4.65° despite that no Cd⁺⁺ ion was included in water used in this example. Also, the built-up film obtained was about 180 nm (1800Å) in thickness, and found to have a good insulation characteristic from the measurement of the capacitance. Further, it was also confirmed from the peaks at 1790 and 1710 cm⁻¹ by FT-IR analysis that by heating the built-up film at 400°C for one hour there is formed α,β-unsaturated five-membered ring imide. On the other hand, it has been confirmed from the IR spectrum that when the product in Example 1 is heated at 400°C for one hour imidation reaction takes place resulting in a decrease of 58 wt% in the weight, which is in precisely conformity with the calculated value, 58.7%, when it is assumed that stearyl alcohol is eliminated by the imidation. EXAMPLE 3 A polyimide precursor was synthesized in the same manner as Example 1 except that n-decyl alcohol (n-C₁₀H₂₁OH) was used in place of stearyl alcohol. The polyimide precursor showed the same characteristics as those of the polyimide in Example 1 by IR spectrum analysis, thermal analysis, and measurement of molecular weight by GPC, but the result of the measurement of the surface pressure vs. area curve is as shown in Figure 6, in which there is found only the liquid expansion phase, but not the condensation phase. This clearly indicates that the alkyl group having 10 carbon atoms is too short in the chain length to obtain a stable monomolecular layer. For instance, the film maintained at 200µN/cm (20 dyne/cm) in surface pressure on the water surface was unstable, thus the precursor obtained in this Example did not give a good built-up film. EXAMPLE 4 Polyimide precursors were prepared in the same manner as in Example 1 except that lauryl alcohol (C₁₂), myristyl alcohol (C₁₄) or cetyl alcohol (C₁₆) was used instead of stearyl alcohol. The obtained precursor by using the C₁₂ or C₁₄ alcohol showed behaviors intermediate between those for C₁₀ and C₁₈, and formed a sufficiently stable monolayer and could form a built-up film. The precursor obtained by using the C₁₆ alcohol formed a very stable monolayer on the water surface and could form a good built-up film. Also, it was confirmed that the precursors obtained in these Examples were converted into polyimides by heat treatment. EXAMPLE 5 Using trimellitic acid anhydride (0.01 mole) and stearyl alcohol (0.01 mole) in the same manner as in Example 1, monostearyl trimellitic acid ester was synthesized, and after acylating with thionyl chloride, diaminodiphenyl ether (0.01 mole) was reacted to give 2.12 g of white powder. Figures 7 and 8 are the results of IR spectrum analysis and thermogravimetric analysis (TGA-DTA) of the product. The IR spectrum analysis indicated the characteristic absorption the same in Example 1. Also, by the thermal analysis there are seen distinguished inflection points at 207° and 262°C in TGA, and it was confirmed by the IR spectrum that after the inflection point at 262°C, the imidation is complete and polyamideimide is formed. EXAMPLE 6 In the same manner as in Example 2, the relation between the surface pressure and the area per repeating unit was measured, with the result being shown in Figure 9. The collapse pressure was as high as 450µN/cm (45 dyne/cm), and a good condensed film could be formed. The limiting area was 0.6nm²/unit (60 Å²/unit). Further it was also confirmed that by maintaining the surface pressure at 250µN/cm (25 dyne/cm) the film of Y type can be built up on a glass substrate at a dipping speed of 10 mm/min. by LB technique. According to the present invention, there is to make feasible the film formation by Langmuir-Blodgett technique, by modifying the high polymers which are inherently difficult to be formed into film according to the LB technique, and to provide high polymer films which have a thickness hitherto never obtained easily such as in 1 µm (10,000Å), if required 1-100 nm (10-1000Å), by partially or completely cyclizing the component thereof, and which exhibit improved heat resistance, chemical resistance and mechanical characteristics.

Claims: A laminated film produced on a substrate by the Langmuir-Blodgett process with a polymer which contains linear repeating units of a formula selected from the group consisting of formula(1), formula(2) and formula(3): [ A - R₁ - AB - R₂ - B ] (1) [ A - R₁ - BA - R₂ - B ] (2) [ B- R₁ - BA - R₂ - A ] (3) wherein each of R₁ and R₂ are at least divalent groups having at least 2 carbon atoms. A is an acidic group having a hetero atom. B is a basic group have a hetero atom, and each AB and BA is a divalent group formed by reacting said group A with said group B; each linear repeating unit having at least one group selected from hydrocarbon-containing groups R₃ and R₄ and bonded to the linear repeating units by covalent bonding, wherein each R₃ and R₄ is independently a hydrocarbon-containing group of 1ϑ to 3ϑ carbon atoms which may contain substituent groups, with the proviso that when any one of the groups selected from R₃ and R₄ has 1ϑ carbon atoms, then said group selected from R₃ and R₄ and having 1ϑ carbon atoms must contain fluorine as said substituent groups. The laminated film according to Claim 1, wherein one or both of the groups R 1 and R 2 are benzenoid groups having at least six carbon atoms. The laminated film according to Claim 1, wherein said hydrocarbon-containing groups R₃ and R₄ are aliphatic groups, aliphatic groups bonded to alicyclic groups, or aliphatic groups bonded to aromatic groups, which groups may contain substituents. The laminated film according to Claim 3, wherein the substituents are halogen atoms, nitro groups, amino groups, methoxy groups, cyano groups or acetoxy groups. The laminated film according to Claim 1, wherein said polymer contains both the hydrocarbon-containing groups R₃ and R₄ bonded to the same repeating units. The laminated film according to Claim 1, wherein the number of carbon atoms of said hydrocarbon-containing groups R₃ and R₄ is 16 to 22, respectively. The laminated film according to Claim 1, wherein said repeating units have the structure of a precursor capable of forming five- or six-membered rings containing hetero atoms. A process for forming a laminated film by the Langmuir-Blodgett process which comprises spreading a solution of a polymer on the surface of water and compressing the material thus spreaded on the surface of water at a constant surface pressure and transferring the formed monomolecular layer onto a substrate wherein said polymer contains linear repeating units of a formula selected from the group consisting of formula(1). formula(2) and formula(3): [ A - R₁ - AB - R₂ - B ] (1) [ A - R₁ - BA - R₂ - B ] (2) [ B - R₁ - BA - R₂ - A ] (3) wherein each of R₁ and R₂ are at least divalent groups having at least 2 carbon atoms, A is an acidic group having a hetero atom. B is a basic group having a hetero atom and each AB and BA is a divalent group formed by reacting said group A with said group B ; each linear repeating unit having at least one group selected from hydrocarbon-containing groups R₃ and R₄ and bonded to the linear repeating units by covalent bonding, wherein each R₃ and R₄ is independently a hydrocarbon-containing group of 1ϑ to 3ϑ carbon atoms which may contain substituent groups, with the proviso that when any one of the groups selected from R₃ and R₄ has 1ϑ carbon atoms. then said group selected from R₃ and R₄ and having 1ϑ carbon atoms must contain fluorine as said substituent groups. A laminated film produced on a substrate by heating a film as defined in Claim 7 for forming five- or six-membered rings containing hetero atoms. A process for forming the film according to Claim 9 which comprises heating the film as defined in Claim 7 for forming five- or six-membered rings containing hetero atoms.

Inventors: UEKITA, MASAKAZU
Applicants: KANEGAFUCHI KAGAKU KOGYO KABUSHIKI KAISHA
Application year: 1986
Main classification: C08J5
IPC codes: C08J5, B05D1, B29C41, H01L51, H01L21