GAS ANALYZER FOR THE SIMULTANEOUS MEASUREMENT OF A PLURALITY OF INGREDIENTS

Abstract: The multi-ingredients gas analyzer in provided with sample gas flow-dividing means (X) in a sample gas-introducing passage (3) for dividing a flow of the sample gas at an appointed ratio. The sample gas flow-dividing means fur­ ther comprises a plurality of gas concentration detectors (D I , D II , ...) connected therewith in parallel. Sample gas-­ diluting means (Y I , Y II , ...) are provided between the sample gas flow-dividing means and said gas concentration detectors for diluting the sample gas at adjustable ratios.

Description: The present invention relates to a gas analyzer for the simultaneous measurement of a plurality of components or in particular at least two kinds of ingredients of gas con­ tained in a sample gas. Gas extraction type metal analyzers for measuring the quan­ tity of various kinds of impurities contained in a metallic sample and the like are known as gas analyzers for the si­ multaneous measurement of a plurality of ingredients, i.e. at least two kinds of ingredient gas components. This gas extraction type metal analyzer, as shown in Fig. 6, comprises a gas extraction portion OA and a gas analyzer portion OB connected to said gas extraction por­ tion OA for simultaneously measuring many ingredients (i.e. at least two ingredients). The gas extraction por­ tion OA comprises a heating furnace Ol (for example a graphite crucible) for extracting various kinds of gas ingredients (CO gas, N₂ gas, H₂ gas and the like) corres­ ponding to various kinds of impurities (oxygen, nitrogen, hydrogen and the like) contained in a metallic sample by heating it to melt in the presence of a carrier gas (an inert gas such as He) fed through a carrier gas-introduc­ ing passage OO and an electro-magnetic purge value O2. The gas analyzer portion OB for the simultaneous measurement of various ingredients (i.e. for example two ingredients) comprises a pressure regulator O4, a flow control needle valve O5, a first gas concentration detector OD I for measuring the concentration of CO gas (in general, a non-­ dispersion type infrared detector is used), an oxidizer O6 for oxidizing CO gas and H₂ gas contained in the sample gas, which passed through said first gas concentration de­ tector OD I , to turn to CO₂ gas and H₂O gas, respectively, a CO₂ remover O7 for removing CO₂ gas by the chemical reaction between it and a CO₂ removing agent, a H₂O remo­ ver O8 for removing H₂O gas by a H₂O adsorbent, a second gas concentration detector OD II for measuring the concen­ tration of N₂ gas (in general, a heat conductivity type detector is used) and an exhaust passage O9 connected with a sample gas-introducing passage O3, which is connected with said electro-magnetic purge valve O2 of said gas extraction portion OA, in series in an order as itemized. However, conventional gas analyzer for the simultaneous measurement of many ingredients comprising a gas analyzer portion OB for at least two ingredients used in the above described gas extraction type metal analyzer has various kinds of disadvantages. With the conventional gas analyzer of this type, since the measurable upper limit is at most several thousands ppm, very small quantities of various kinds of impurities con­ tained in a metallic sample can be suitably measured. Also, even in the case where a comparatively large amount of various kinds of substances are contained in the sample, if those substances do not show a great difference in quan­ tity, the conventional gas analyzer can be practically used without any problem by suitably diluting the sample gas extracted from the sample. However, recently the requirement is increasing of simul­ taneously analyzing may ingredients (principal ingre­ dients and impurities) contained in ceramics and the like such as Si₃N₄ comprising a large amount to an extent of several tens % of nitrogen (principal ingredients) and a remarkably samll amount to an extent of serveral % of oxy­ gen (impurities) and Fe₂O₃ comprising a large amount to an extent of several tens % of oxygen (principal ingredients) and remarkably small amount of nitrogen (impurities). Analyzers meeting such a requirement have not been availab­ le so far. In such a case, if high-concentration gas ingredients corresponding to the principal ingredients of a sample are to be measured, it is necessary to either use a very small amount (for examp­ le 1 to 2 mg) of the sample or to remarkably dilute the sample gas extracted from a suitable amount of the sample. This, however, results in the problem that errors are relatively increasing in the measurement of the weight of the sample, and an influence caused by the segregation within the sample is inevitable, so that the synthetic analytical accuracy is lowered. Further, since the concentration of the ingredient gas corresponding to the impurities is too low, the measurement accuracy of the impurities is un­ reliable. Besides, with the conventional gas analyzer having the first gas concentration detector OD I and the second gas concentration detector OD II arranged in series, fundament­ ally speaking, errors of measurement due to an increase of sensitivity resulting from a back pressure are liable to appear in the upstream positioned first gas concentra­ tion detector OD I . Another problem has occured in particu­ lar (as shown in said Fig. 6) in the case where a heat conductivity type detector showing no selectivity for the gas is used as the second gas concentration detector OD II . In this case, it is necessary to provide the oxidizer O6, the CO₂ remover O7, the H₂O remover O8 and the like bet­ ween the second gas concentration detector OD II and the first gas concentration detector OD I , so that an influence of the back pressure upon the first gas concentration de­ tector OD I is gradually increasing with the result of clogging of the CO₂ remover O7, whereby errors of measure­ ment due to an increase of sensitivity in the first gas concentration detector OD I are gradually increasing. Taking the above described actual state into consideration, it is an object of the present invention to provide a gas analyzer for simultaneous highly accurate measurement of a plurality of ingredients contained in a sample gas mixedly comprising at least a high-concentration ingredient gas and a low-concentration ingredient gas in for example the analysis of ceramics and not only the simultaneous analy­ sis of impurities in the sample but also the simultaneous analysis of principal ingredients and impurities. In order to achieve the above described object, a gas ana­ lyzer for simultaneously measuring many ingredients accord­ ing to the present invention comprises a plurality of gas concentration detectors D I , D II , etc. connected with a sample gas-introducing passage 3, as shown in Fig. 1 which is a schematic drawing reflecting the basic teaching of the present invention and showing a gas analyzer for at least two ingredient gases contained in a sample gas fed through the sample gas-introducing passage 3 for simul­ taneously measurement, said plurality of gas concentration detectors D I , D II being arranged in parallel to said sample gas-introducing passage 3, said sample gas-introducing passage 3 being provided with sample gas flow-dividing means X which can divide said sample gas at an appointed ratio to feed said gas concentration detectors D I , D II with the divided flows of said sample gas, and sample gas-­ diluting means Y I , Y II for further diluting the sample gas divided by said sample gas-dividing means X being provided between said sample gas-dividing means X and said gas con­ centration detectors D I , D II , respectively. In addition, in Fig. 1, reference numeral 6 designates an oxidizer, 7 designates a CO₂ gas remover, and 8 refers to a H₂O remo­ ver. Within a gas analyzer of the present invention for simul­ taneously measuring many ingredients, a sample gas flow is divided at a predetermined ratio, the divided flow of the sample gas are further diluted, and then a plurality of gas concentration detectors arranged in parallel to a sample gas-introducing passage are supplied with the di­ vided flows of the sample gas, so that each of the sample gas flows supplied to the gas concentration detectors corresponding to respective ingredient gases can be dilu­ ted to a concentration suitable for the measurement there­ of by suitably setting the flow-dividing ratio at the sample gas-dividing means and each dilution ratio by each sample gas-diluting means even in the case, where a sample gas mixedly comprising a high-concentration ingredient gas and a low-concentration ingredient gas, such as for the analysis of ceramics. Accordingly, both the high-concen­ tration principal ingredient gas and the low-concentration impurity gas can be simultaneously measured with very high accuracy. In addition, it is unnecessary to extremely re­ duce the quantity of the sample, so taht the sampling method can be simplified. Besides, the synthetic analytical accuracy can be remarkably improved due to the achieved improvement of the sampling accuracy and the reduction of an influence by segregation within the sample. Also in the case, where all ingredient gases have a low concentra­ tion, such as for the analysis of impurities in metals or in the case where all ingredient gases have a high concen­ tration, each of the sample gas flows supplied to the gas concentration detectors corresponding to ingredient gases can be diluted to a concentration suitable for the measure­ ment thereof by suitably setting the flow-dividing ratio at the sample gas-dividing means and each diluting ratio by each sampling gas-diluting means similarly to the above described, so that a highly accurate simultaneous analysis is possible. Furthermore, since a plurality of gas concen­ tration detectors are arranged in parallel to the sample gas-introducing passage, other gas concentration detectors are not arranged at the downstream side of each gas con­ centration detector. Also in the case where a heat conduc­ tivity type detector and the like having no selectivity to a gas is used as one of a plurality of gas concentration de­ tectors and it is necessary to provide an oxidizer, a CO₂ remover, a H₂O remover or the like, it is sufficient to provide them only up­ stream of the heat conductivity type gas concentration detector, so that errors of measurement due to an influence by the back pressure incidental to the vonventional gas concentration detector does not occur in any one of the gas concentration detectors, whereby achiev­ ing a remarkable improvement of the synthetic analytical accuracy. After all, with a gas analyzer according to the present invention, for simultaneous measurement of a plu­ rality of ingredients, a remarkably superior effect can be exhibited in that many ingredient gases contained in a wide range of sample gas having various kinds of ingredient gas concentration distributions can be simultaneously measured always with high accuracy. With a multi-components gas analyzer of the above outlined construction, the further advantage is achieved that the individual detectors are not at all influenced by the existence of the other gas concentration detectors. Further details of the invention and advantageous features thereof will be described in the following with reference to the accompanying drawings. Fig. 1 (already explained) is a schematic drawing of the basic concept of the present invention, showing the fundamental construction of a gas analyzer for si­ multaneously measuring a plurality of ingredients; Figs. 2 to 5 show various kinds of preferred embodiments of the present invention, in which Fig. 2 is a general view; Fig. 3(A), (B), (C), (D) are diagrams showing the state of the principal members for explaining various kinds of applications of the invention, respectively; Fig. 4 is a general view showing another preferred embodiment of the present invention; and Fig. 5 is a construction diagram showing another preferred embodiment of principal members of a gas analyzer according to the invention; Fig. 6 is a general rough construction diagram showing a gas extraction type metal analyzer of conventional construction in which a gas analyzer for simulta­ neously measuring two ingredients is used. The preferred embodiments of the present invention will be below described with reference to the drawings (Figs. 2 to 5). Fig. 2 is a general rough view showing a gas extraction type sample analyzer in which a gas analyzer for simul­ taneously measuring a plurality of ingredients accord­ ing to the present invention is used. This gas extraction type sample analyzer comprises, as shown in Fig. 2, a gas extraction portion A and a gas-ana­ lyzing portion B connected with said gas extraction por­ tion A for simultaneously measuring two ingredients. Said gas extraction portion A comprises a heating furnace 1 (for example a graphite crucible) for extracting various kinds of ingredient gases (CO gas, N₂ gas, H₂ gas and the like) corresponding to various kinds of ingredients (in this embodiment oxygen, nitrogen, hydrogen and the like) by heating it in the presence of a carrier gas (an inert gas such as He gas) supplied via a carrier gas-introducing passage O to the melt in the furnace 1 and an electro­ magnetic purge valve 2. Said gas-analyzing portion B comprises a CO concentration measuring system I and a N₂ concentration measuring system II connected in parallel to a sample gas-introducing passa­ ge 3 connected with said electro-magnetic purga valve 2 of said gas extraction portion A. Said CO concentration measuring system I comprises a first sample gas passage 3 I branched from said sample gas-intro­ ducing passage 3, a first carrier gas passage O I branched from said carrier gas-introducing passage O, a first pressure-regulating governer 10 I arranged between said first branched sample gas passage 3 I and said first carrier gas passage O I , a first flow-dividing ratio/diluting ratio-­ setting device 11 I connecting said first branched sample gas passage 3 I and said first carrier gas passage O I , a first pressure regulator 4 I , a first flow rate-adjusting needle valve 5 I , a first gas concentration detector D I comprising a non-dispersion type infrared detector for use in measuring of the concentration of CO gas provided via a first exit passage 12 I from said first flow-dividing ratio/­ diluting ratio-setting device 11 I and a first exhaust passage 9 I . In addition, said N₂ measuring system II comprises a se­ cond sample gas passage 3 II branched from said sample gas-­ introducing passage 3, a second carrier gas passage O II branched from said carrier gas-introducing passage O, a se­ cond pressure-regulating governor 10 II arranged between said second sample gas passage 3 II and said second carrier gas passage O II , a second flow-dividing ratio/diluting ra­ tio-setting devide 11 II connecting said second branched sample gas passage 3 II and said second carrier gas passage O II , a second pressure regulator 4 II , a second flow rate-­ adjusting needle valve 5 II , an oxidizer 6 for oxidizing CO gas and H₂ gas contained in the sample gas, which pass­ ed through said first gas concentration detector D I , to be converted to CO₂ gas and H₂O gas, a CO₂ remover 7 for removing the resulting CO₂ gas by the chemical reaction between it and a CO₂ removing agent, a H₂O remover 8 for removing the resulting H₂O gas by a H₂O adsorbent, a se­ cond gas concentration detector D II comprising a heat con­ ductivity type detector for use in measuring of the con­ centration of N₂ gas provided via a second exit passage 12 II from said second flow-dividing ratio/diluting ratio-­ setting device 11 II and a second exhaust passage 9 II . In addition, a portion encircled by a dotted line in Fig. 2, mainly comprising said first flow-dividing ratio/dilut­ ing ratio-setting devide 11 I and said second flow-dividing ratio/diluting ratio-setting device 11 II shows a sample gas flow-dividing/diluting means Z which can be used both as a sample gas flow-dividing means X and a sample gas-di­ luting means Y I , Y II described in Fig. 1 which is a schema­ tic diagram of the basic concept of the present invention. Said sample gas flow-dividing/diluting means Z is adapted to divide a flow of the sample gas supplied through said sample gas-introducing passage 3 at an appointed ratio di­ lute the divided sample gas, and supply the first gas con­ centration detector D I and the second gas concentration detector D II arranged in parallel to said sample gas-in­ troducing passage 3 with the divided and diluted sample gas. In other words, said sample gas-diluting means Y I , Y II comprises the flow-dividing ratio/diluting ratio-sett­ ing means 11 I , 11 II , respectively, so as to be used in the cooperation also as said sample gas flow-dividing means X. That is to say, each of said flow-dividing ratio/diluting ratio-setting means 11 I , 11 II comprises an inlet side space a provided by said branched sample gas passage 3 I (3 II ) connected therewith at one end side thereof and said carrier gas passage O I (O II ) connected therewith at the other end side thereof, an outlet side space b from which said exit passage 12 I (12 II ) extends, a plurality (5 pieces in this embodiment) of flow rate elements (for example capillaries) communicating with said inlet side space a with said outlet side space b designated by c ----, and a valve body d dividing said inlet side space a into a space of the side at which said branched sample gas passage 3 I (3 II ) is connected and a space connected with said carrier gas passage O I (O II ). Said plurality of flow rate elements (capillaries) c---- used in this embodiment all have the same flow rate characteristics. In addition, the carrier gas (He gas) introduced through said carrier gas passage O I (O II ) is used as a diluting gas in said flow-dividing ratio/diluting ratio-setting device 11 I (11 II ). Said valve body d of said inlet side space a is adapted to be posi­ tioned at optional positions marked in the drawing with , , , , , , respectively. In other words, with each of said flow-dividing ratio/diluting ratio-sett­ ing devices 11 I (11 II ) it is optionally possible to adjust the flow-dividing ratio of the sample gas for each of said measuring systems I, II (said detectors D I , D II ) as well as the diluting ratio of the divided sample gas by setting optionally the position of said valve body d. Besides, when the flow-dividing ratio is set to be large in each of said flow-dividing ratio/diluting ratio-setting devices 11 I (11 II ), the diluting ratio is automatically set to be small (accordingly, the total dilution extent is small) while when the flow-dividing ratio is set to be small, the diluting ratio is automatically set to be large (according­ ly, the total dilution extent is large). For example, under the condition as shown in Fig. 2, since the valve body d of the first flow-dividing ratio/diluting ratio-setting device 11 I is positioned at the position , the sample gas of a quantity corresponding to three pieces of flow rate elements c - - - and the carrier gas of a quantity corres­ ponding to two pieces of flow rate elements c --- are in­ troduced into the outlet side space b of the first flow-­ dividing ratio/diluting ratio-setting device 11 I while, since the valve body d of the second flow-dividing ratio/­ diluting ratiosetting device 11 II is positioned at the position , the sample gas of a quantity corresponding to two pieces of flow rate elements and the carrier gas of a quantity corresponding to three pieces of flow rate ele­ ments c - - - are introduced into the outlet side space b of the second flow-dividing ratio/diluting ratio-setting device 11 II . Accordingly, the sample gas introduced through said sample gas-introducing passage 3 is transferred to the flow-dividing ratio/diluting ratio-setting devices 11 I , 11 II at a flow-dividing ratio of 3 : 2, and the sample gas transferred to the first flow-dividing ratio/diluting ra­ tio-setting device 11 I is diluted at a diluting ratio of 3/5 to be introduced into the measuring system I while the sample gas transferred to the second flow-dividing ratio/diluting ratio-setting device 11 II is diluted at a diluting ratio of 2/5 to be introduced into the measuring system II. With a gas extraction type sample analyzer constructed in the above described manner, the following wide range of a sample gas can be tested with various kinds of measure­ ments. For example, in the case, where a sample, such as an oxide e.g. Fe₂O₃, comprising a large quantity of oxygen (princi­ pal ingredients) and a remarkably small quantity of nitro­ gen (impurities) is analyzed, the valve body d of the first flow-dividing ratio/diluting ratio-setting device 11 I is set to a certain position, for example the position , and the valve body d of the second flow-dividing ratio/dilut­ ing ratio-setting device 11 II is set to another position, for example the position , as shown in Fig. 3(A), where­ by the sample gas introduced through the sample gas-intro­ ducing passage 3 is transferred to the first flow-dividing ratio/diluting ratio-setting device 11 I and the second flow-dividing ratio/diluting ratio-setting device 11 II at a flow-dividing ratio of 1 : 4, and the sample gas trans­ ferred to the first flow-dividing ratio/diluting ratio-­ setting device 11 I is diluted at a small diluting ratio of 1/5, while the sample gas transferred to the second flow-dividing ratio/diluting ratio-setting device 11 II is diluted at a large diluting ratio of 4/5, whereby the sample gas diluted at a remarkably large diluting extent is introduced into the CO concentration-measuring system I corresponding to a large quantity of oxygen, which is a principal ingredient, while the sample gas diluted at a rather small diluting extent is introduced into the N₂ concentration-measuring system II corresponding to a small quantity of nitrogen (impurities). Also, in the case, where a sample, such as a silicide, e.g. Si₃N₄, comprising a large quantity of nitrogen (prin­ cipal ingredient) and a very small quantity of oxygen (im­ purities) is analyzed, the valve body d of the first flow-­ dividing ratio/diluting ratio-setting device 11 I is posi­ tioned for example at the position , and the valve body d of the second flow-dividing ratio/diluting ratio-setting device 11 II is set to be positioned for example at the po­ sition , as shown in Fig. 3(B), whereby the sample gas introduced through the sample gas-introducing passage 3 is transferred to the flow-dividing ratio/diluting ratio-sett­ ing devices 11 I , 11 II at a flow-dividing ratio of 4 : 1 and the sample gas transferred to the first flow-dividing ratio/diluting ratio-setting device 11 I is diluted at a large diluting ratio of 4/5, while the sample gas trans­ ferred to the second flow-dividing ratio/diluting ratio-­ setting device 11 II is diluted at a small diluting ratio of 1/5, whereby the sample gas diluted at a rather small diluting extent is introduced into the CO concentration-­ measuring system I corresponding to very small quantities of oxygen which are impurities, while the sample gas dilut­ ed at a remarkably large diluting extent is introduced in­ to the N₂ concentration-measuring system II corresponding to a large quantity of nitrogen which is a principal in­ gredient in this case. Furthermore, in the case, where a sample, such as metals, comprising a remarkably small but almost equal quantity of impurities such as oxygen and nitrogen, is analyzed, both the valve body d of the first flow-dividing ratio/­ diluting ratio-setting device 11 I and that the second flow-dividing ratio/diluting ratio-setting device 11 II are set to be positioned for example at the position , as shown in Fig. 3(C), whereby the sample gas introduced through the sample gas-introducing passage 3 is transferr­ ed to the flow-dividing ratio/diluting ratio-setting de­ vices 11 I , 11 II at a flow-dividing ratio of 1 : 1, and both the sample gas transferred to the first flow-dividing ratio/diluting ratio-setting device 11 I and the sample gas transferred to the second flow-dividing ratio/diluting ra­ tio-setting device 11 II are diluted at diluting ratio of 0/5, that is to say the sample gas flow is divided but not diluted. In addition, according to the sample gas to be measured, the valve body d of the first flow-dividing ratio/diluting ratio-setting device 11 I and the valve body d of the se­ cond flow-dividing ratio/diluting ratio-setting device 11 II can optionally be positioned at any suitable posi­ tion, as shown in for example Fig. 3(D) such that many ingredients contained in a wide range of samples having various ingredient gas concentration distributions can be simultaneously measured with high accuracy by means of a single apparatus. Fig. 4 shows another preferred embodiment in which the sample gas-introducing passage 3 is provided with a pre­ vious concentration detector 13 for previously detecting rough concentrations of ingredients contained in a sample gas introduced therein, and the valve body d, d of the flow-dividing ratio/diluting ratio-setting device 11 I , 11 II is provided with an actuating mechanism e, e, re­ sprectively, whereby the valve body d, d is automatically set to be positioned at the suitable position by means of a controller C on the basis of a rough concentration ratio of ingredient gases detected by said previous concentra­ tion detector 13. Other members are similar to those in the above described embodiment. Fig. 5 shows another preferred embodiment of the flow-di­ viding ratio/diluting ratio-setting device 11 I (11 II ) com­ prising a plurality (five in this embodiment) of electro­ magnetic three-way valves v₁, v₂ - - - into which the branched passages from the branched sample gas passage 3 I (3 II ) and the branched passages from the carrier gas pass­ age 0 I (o II ) are opening, and flow rate elements (for ex­ ample capillaries) c, - - - connected with said electro­ magnetic three-way valves v₁, v₂ - - -. As can be recogniz­ ed by the expert, the flow-dividing ratio/diluting ratio-­ setting devices 11 I , 11 II of such a construction provide for the same advantageous results as that of the flow-di­ viding ratio/diluting ratio-setting devices 11 I , 11 II of the above described embodiments. Although a gas analyzer capable of simultaneously measur­ ing two ingredients was described by embodiments, it is within the scope of the present invention to also provide a gas analyzer for simultaneous measurement of many ingre­ dients, i. e. for example more than three ingredients, as indicated in Fig. 1 which is a general sketch of the con­ cept of the present invention. In addition, although a sample gas flow-dividing/diluting means Z, in which a sample gas flow-dividing means X and sample gas-diluting means Y I , Y II are collected, has been described with the above, the expert may readily realize that the sample gas flow-dividing means X and the sample gas-diluting means Y I , Y II may be constructed as indepen­ dent units.

Claims: 1. A gas analyzer for the simultaneous measurement of a plurality of ingredients, in which a plurality of gas concentration detectors (DI, DII) are connected with a sample gas-introducing passage (3) so that at least two ingredient gases contained in a sample gas introduced through said sample gas-introducing passage (3) can be si­ multaneously measured, characterized in that - said plurality of gas concentration detectors (DI, DII) are arranged in parallel to said sample gas-introducing passage (3), - sample gas flow-dividing means (X) for dividing said sample gas at an appointed flow-dividing ratio are pro­ vided in said sample gas-introducing passage supplying said gas concentration detectors (DI, DII) with divided sample gas flows, and in that - sample gas-diluting means (YI, YII) are provided between said sample gas flow-dividing means and said gas concen­ tration detectors (DI, DII) for further diluting the divided sample gas flows divided by said sample gas flow-­ dividing means (X). 2. The gas analyzer as set forth in Claim 1, in which said sample gas flow-dividing means (X) is adjustable to an optional flow-dividing ratio. 3. The gas analyzer as set forth in Claim 1, in which the diluting ratio can be optionally set in said sample gas-diluting means (YI, YII). 4. The gas analyzer as set forth in Claim 3, in which said sample gas-diluting means (YI, YII, ...) are con­ structed as a flow-dividing ratio/diluting ratio-setting device (11I, 11II, ...) forming a functional cooperation unit with said sample gas flow-dividing means (X). 5. The gas analyzer as set forth in Claim 4, compris­ ing means (13, C) for automatically controlling of the flow-dividing ratio/diluting ratio-setting devices (11I, 11II, ...) so as to reduce the diluting ratio with an in­ crease of the flow-dividing ratio and automatically increase the diluting ratio with a reduction of the flow-dividing ratio. 6. The gas analyzer as set forth in Claim 5, wherein said flow-dividing ratio/diluting ratio-setting devices control means comprises an ingredients previous rough con­ centration detector (13) and a controller (C) receiving its setting values from said rough concentration detector (13) and supplying adjusting values to electromagnetic valve means (d, d) provided in said flow-dividing ratio/­ diluting ratio-setting devices (11I, 11II, ...).

Inventors: HIRANO, AKIHIRO, TANIMOTO, MASAHIRO, TSUJI, KATSUYA, YAMADA, TAKESHI
Applicants: HORIBA, LTD.
Application year: 1986
Main classification: G01N33
IPC codes: G01N33, G01N1, G05D11