SILICON-NITRIDE-SINTERED BODY

Abstract: A silicion-nitride-sintered mass whose base is prepared from Si₃N₄-rare earth oxide-Al₂-O₃-AIN and whose constituent phases are represented by α′-Si₃N₄ and β-Si₃N₄, wherein the ratio between both phases is set at 0.05-0.7: 0.95-0.3, or by α′-Si₃N₄ and β-Si₃N₄ and Si-rare earth element-Al-O-N, wherein the ratio of the α′-Si₃N₄ phase to the whole of all constituent phases is set at 0.01 to 0.7.

Description: Silicon-nitride-sintered body This invention relates to a silicon-nitridesintered body improved in mechanical strength. A silicon-nitride-sintered body (Si3N4) is excellent in heat resistance and is applied as the material for engine parts, for corrosion-resistant parts, and for parts resistant to abrasion and heat. A substance of Si3N4 alone presents difficulties in the sintering progress. Therefore, the Si3N4 substance is made into a dense sintered form by applying a sinterpromoting agent. This sinter-promoting agent includes oxides such as MgO and Y203 and mixtures of compounds such as MgO-Ag203 and Y203-At203. Hitherto, a Si3N4 sintered body possessing high density and excellent mechanical strength, toughness and thermal shock resistance has been developed by applying any of the above-mentioned siter-promoting agents. The known sintering method includes a hot press process, hot still-water press (HIP), sintering in compressed atmosphere and allpurpose normal-pressure sintering. However, the conventional processes presented difficulties in producing a compact mass of Si3N4 by normal-pressure sintering. Further, a Si3N4 sintered mass applicable as a mechanical component, for example, an engine part, must have superb reliability resulting from great mechanical strength at high temperatures, completely uniform quality and freedom from local weaknesses. However, Si3N4 sintered masses developed to date fails to satisfy the above-mentioned preporties. Therefore, a demand exists for the manufacturing of a Si3N4 sintered mass with great mechanical strength and high reliablity. This invention has been accomplished in view of the above-mentioned circumstances and is intended to provide a sintered mass of silicon nitride having great mechanical strength and high reliability. Another object of the invention is to provide a sintered mass of silicon nitride having great mechanical strength at high temperatures and superbly adapted for use as, for example, an engine part. To attain the above-mentioned object, this invention provides a sintered mass of silicon nitride whose base is formed of a mixture of Si3N4-rare earth oxide-AR203-ARN, which comprises phases of a'-Si3N4 and a-Si3N4; the ratio between both phases has a value of 0.05 to 0.7 : 0.95 to 0.3. A further object of the invention is to provide a sintered mass of silicon nitride whose base is prepared from a mixture of Si3N4-rare earth oxide-Av203-AQN, which comprises phases of '-Si3N4, 6-Si3Na and Si-rare earth element-AQ-O-N series; the phase of said '-Si3N4 bears a ratio of 0.01 to 0.7 to the whole of all the three phases. This invention can be more fully understood from the following detailed description when taken in conjunction with the accompanying drawings, in which: Fig. 1 illustrates the diameter of crystal particles constituting a sintered mass of Si3N4 embodying this invention; Fig. 2 is an X-ray diffraction chart of the subject Si3N4 sintered mass; and Fig. 3 is another X-ray diffraction chart of the subject Si3N4 sintered mass. The present inventors noticed that high mechanical strength of the Si3N4 sintered mass largely depends on the composition, and a Si3N4 sintered mass whose base is prepared from Si3N4-rare earth oxide (for example, Y2o3, La203)-AQ203-AQN is particularly excellent in mechanical strength, and further discovered that the mechanical property of the subject si3N4 sintered mass widely varies with the constituent phases. Generally, the crystal of Si3N4 includes two types of a and 6, and other types of a' and ' in which other atoms and ions are present in the form of a solid solution. -Namely, '-Si3N4 is a type consisting of -Si3N4 and a solid solution component of a rare earth element such as Y or La or an element of 0. ss'-Si3N4 is a type known as a sialon. Therefore, the mechanical property of the Si3N4 sintered mass widely varies depending on a combination of the above-mentioned four types which constitutes the crystal of Si3N4. The present inventors' studies have discovered that a sintered Si3N4 mass, whose crystal comprises a' and ss phases and wherein said a' phase bears the specified ratio of 0.05 to 0.7 to the total of both phases a' and ss, has extremely great mechanical strength as microscopically determined. It has further been found that a Si3N4 sintered mass whose crystal comprises the al-Si3N4 phase, S-Si3N4 phases and a phase of Si-rare earth element-AR-O-N, wherein said a'-Si3N4 phase is chosen to bear a ratio of 0.01 to 0.7 to the total of all phases, possesses extremely great mechanical strength as microscopically determined. The above-mentioned a'-Si3N4 phase comprises a-Si3N4 and a solid solution component (a rare earth element such as Y, La or Ce and an element of 0). The reason why the a'-Sj3N4 phase bears a ratio defined within the aforementioned range to the total of all the constituent phases, arises from the fact that if the quantity of said a'-Si3N4 phase falls below the lower limit or rises above the upper limit, a silicon-nitride-sintered body can not fully attain great mechanical strength. It is preferred that the crystals of the a'-Si3N4 phase and 6-Si3N4 phase be comprised of narrow columnar particles and the lengthwise diameter of the crystal particle be less than 40 microns or preferably less than 20 microns. In this case, the aspect ratio (a/b shown in Fig. 1) beers great importance, and it is preferred that said ratio be large than at least 2. When a sintered Si3N4 mass is produced by normal pressure sintering, it is desired that the rare earth oxide bear a defined ratio of 3 to 10 % by weight to the whole mass for the reason, that if the quantity of said rare earth oxide falls below 3 % by weight, the elongated form of the crystal particle tends to be rendered imperfect in crystallinc shape and decreases in density. Conversely if the quantity of said rare earth oxide rises above 10 % by weight, the original property of the sintered silicon nitride mass is obstructed. When, however, the Si3N4 mass is sintered by applying external pressure as in the case of the hot press or HIP process, the problem related to the density of the SiN4 mass can be avoided. Therefore, the lower limit of the quantity of the rare earth oxide may be set at 2 % by weight. The above-mentioned phase of Si-rare earth element-At-O-N (hereinafter referred to as X") includes the following: J (Y4Si207N2) H (YgSi6021N3) K (ySiO2N) As needs arise, it is possible to add less than 5 % by weight of at least one of the group consisting of TiO2, MgO and ZrO2 to the phase of Si3N4-rare earth oxide-AZ 2O3-AZN. Fig. 2 is an X-ray diffraction chart of a sintered mass of silicon nitride whose base is prepared from Si3N4-rare earth oxide-At203-AQN, which comprises an a'-si3N4 phase and ss-Si3N4 phase; the ratio between both phases is set at 0.13 : 0.87. Fig. 3 is an X-ray diffraction chart of a sintered mass of silicon nitride whose base is prepared from Si3N4-rare earth oxide-AQ203-AQN, which comprises an a '-Si3N4 phase and S-Si3N4 phase; in the '-Si3N4 phase bears a ratio of 0.06 to the whole of the constituent phases. Description may now be made of the method for manufacturing a sintered mass of Si3N4 embodying this invention. A mass consisting of si3N4-rare earth oxide-AQ203- AiN is first provided as a raw material. The Si3N4 powder component of said raw material contains more than 65 % of a-Si3N4 powder. The raw material is baked at a temperature of 1,700 to 1,8000C in an nonoxidizing atmosphere (for example, N2 atmosphere) to produce a sintered mass of Si3N4. When the content of the a-Si3N4 powder and the baking conditions are changed during the above-mentioned manufacturing step, it is possible to provide various Si3N4 sintered masses such as the following: a mass which substantially consists of an a'-Si3N4 phase and B-Si3N4 phase alone; and a mass which comprises not only the '-Si3N4 phase and $-Si3N4 phase, but also a prominently observable phase consisting of Si-rare earth element-AQ-O-N. This invention will be better understood with reference to the following examples and controls shown in Table 1 below. Examples 1 - 15 A raw material was produced by mixing Si3N4 powder having an average particle size of 1.2 micron and containing 92 % by weight of a-Si3N4, high purity Y203 powder having an average particle size of 0.7 micron, high purity At203 powder having an average particle size of 0.3 micron, and high purity AZN powder having an average particle size of 1.2 microns. For the manufacture of Si3N4 sintered masses comprising a '-Si3N4 and p-Si3N4 phases, mixtures comprising 1 ¯ 10 weight % of Y203, 0.1 ¯ 10 weight % of Al2O3, 0.3 ¯ 13 weight % of MN (ratio of AlN/Al2O3 : 3 or more) and ballance of the Si3N4 were employed. On the other hand, for the manufac-ture of Si3N4 sintered masses comprising '-Si3N4, 5-Si3N4 and (Si-rare earth element-Al-O-N) phases, fixtures comprising 0.1 ¯ 10 weight % of Y2O3, 0.1 ¯ 5 weight % of Al2O3, 0.1 ¯ 10 weight % of AlN (ratio of AlN/Al2O3 : 1 to 3.5 (preferably less than 3)) and ballance of the Si3N4 were employed. The mass was sintered at a temperature ranging from 1,600 to 1,8000C under the normal pressure by selecting various conditions, producing fifteen different Si3N4 sintered masses all having a composition of Si3N4-Y2O3-Al3O3-AlN and comprising the various phases listed in Table 1 below. Table 1 EMI7.1 Mechanical <SEP> strength <SEP> of <SEP> the <SEP> test <tb> Sintering <SEP> Constituent <SEP> phases <SEP> piece <SEP> bent <SEP> at <SEP> 3 <SEP> points <SEP> (kg/mmê) <tb> Tests <SEP> No. <SEP> density <tb> (%) <tb> Kind <SEP> &alpha;' <SEP> percentage <SEP> Normal <SEP> 1,000 C <SEP> 1,200 C <tb> temperature <tb> 1 <SEP> 98.1 <SEP> &alpha;',ss <SEP> 0.63 <SEP> 86 <SEP> 87 <SEP> 75 <tb> 2 <SEP> 98.3 <SEP> &alpha;',ss <SEP> 0.54 <SEP> 95 <SEP> 89 <SEP> 78 <tb> 3 <SEP> 98.4 <SEP> &alpha;',ss <SEP> 0.51 <SEP> 88 <SEP> 87 <SEP> 77 <tb> 4 <SEP> 97.8 <SEP> &alpha;',ss <SEP> 0.43 <SEP> 93 <SEP> 91 <SEP> 80 <tb> 5 <SEP> 98.6 <SEP> &alpha;',ss <SEP> 0.30 <SEP> 92 <SEP> 93 <SEP> 72 <tb> 6 <SEP> 99.1 <SEP> &alpha;',ss <SEP> 0.15 <SEP> 86 <SEP> 84 <SEP> 70 <tb> Exam- <SEP> 7 <SEP> 97.5 <SEP> &alpha; ;',ss <SEP> 0.12 <SEP> 84 <SEP> 86 <SEP> 81 <tb> ples <tb> 8 <SEP> 97.7 <SEP> &alpha;',ss,x <SEP> 0.65 <SEP> 84 <SEP> 82 <SEP> 76 <tb> 9 <SEP> 98.5 <SEP> &alpha;',ss,x <SEP> 0.58 <SEP> 85 <SEP> 80 <SEP> 73 <tb> 10 <SEP> 98.8 <SEP> &alpha;',ss,x <SEP> 0.55 <SEP> 87 <SEP> 75 <SEP> 71 <tb> 11 <SEP> 98.9 <SEP> &alpha;',ss,x <SEP> 0.54 <SEP> 86 <SEP> 83 <SEP> 75 <tb> 12 <SEP> 98.5 <SEP> &alpha;',ss,x <SEP> 0.33 <SEP> 92 <SEP> 85 <SEP> 74 <tb> 13 <SEP> 96.9 <SEP> &alpha;',ss,x <SEP> 0.46 <SEP> 91 <SEP> 86 <SEP> 73 <tb> 14 <SEP> 99.0 <SEP> &alpha;',ss,x <SEP> 0.21 <SEP> 89 <SEP> 82 <SEP> 76 <tb> 15 <SEP> 99.5 <SEP> &alpha;',ss,x <SEP> 0.15 <SEP> 87 <SEP> 83 <SEP> 71 <tb> 1 <SEP> 98.5 <SEP> &alpha;',ss <SEP> 0,81 <SEP> 72 <SEP> 70 <SEP> 67 <tb> 2 <SEP> 97.5 <SEP> &alpha; ;',ss <SEP> 0.02 <SEP> 92 <SEP> 75 <SEP> 42 <tb> Con- <SEP> 3 <SEP> 98.8 <SEP> ss,x <SEP> 0 <SEP> 87 <SEP> 63 <SEP> 56 <tb> trols <tb> 4 <SEP> 98.7 <SEP> ss <SEP> 0 <SEP> 85 <SEP> 65 <SEP> 45 <tb> 5 <SEP> 98.4 <SEP> &alpha;',ss,x <SEP> 0.78 <SEP> 66 <SEP> 63 <SEP> 68 <tb> The fifteen different Si3N4 sintered masses were cut into a test piece measuring 3 x 3 x 30 mm. Determination was made of the mechanical strength of each test piece by bending it at three points with the span of the adjacent bending points set at 20 mm. The results of the test are also indicated in Table 1 above. Determination was also made in the same manner as described above of the mechanical strength of Controls i, 2, 5 of Si3N4 masses, which had the same phases as the above-mentioned fifteen examples, but wherein the a '-5j3N4 phase indicated a different ratio to the (3-Si3N4 phase from that observed in the fifteen examples. The results of testing said controls are also set forth in Table 1. Table 1 shows that the Si3N4 sintered masses embodying this invention exhibited extremely great mechanical strength as tested at normal and elevated temperatures. In contrast, it was found that controls 1, 2, 5, which had the same phases as the Si3N4 sintered masses of this invention but the ratio between the a'-Si3N4 phase and B-Si3N4 phase fell outside of the range defined with respect to the constituent phases of the Si3N4 sintered mass embodying the invention, failed to attain a sufficient improvement in bending strength, particulary at elevated temperatures. Further, Controls 3, 4, which had different phases from the Si3N4 sintered masses of the invention, were not fully increased in bending strength. The foregoing description referred to the case where the Si3N4 sintered mass was produced by normal temperature sintering. However, it was confirmed that a Si3N4 mass sintered by the process of hot press or HIP showed greater density and bending strength than the examples of Table 1 above. As mentioned above, this invention can provide a highly reliable silicon nitride sintered mass which indicates great mechanical strength as microscopically determined, for instance, a bending strength of over 70 kg/mm2 (20 mm span strength test) as tested at 1,2000C. It was further discovered that when sintered under the same conditions as those in which the aforesaid fifteen examples were produced, a mass of Si3N4-rare earth oxide-AQ203-AQN mixed with less than 5 % by weight of TiO2, MgO or ZrO produced a silicon nitride sintered mass having substantially the same mechanical strength as the examples listed in Table 1 above.

Claims: Claims: 1. A silicon-nitride-sintered mass whose base is prepared from Si3N4-rare earth oxide-A±2O3-ALN and whose constituent phases are represented by a'-Si3N4 and ss-Si3N4, and wherein the ratio between both phases is set at 0.05-0.7 : 0.95-0.3. 2. The silicon-nitride-sintered mass according to claim 1, characterized in that the mass of Si3N4-rare earth oxide-At203-AtN contains less than 5 % by weight of at least one of the group consisting of TiO2, MgO and ZrO2. 3. The silicon-nitride-sintered mass according to claim 1, characterized in that the content of the rare earth oxide is set at 3 to 10 % by weight. 4. The silicon-nitride-sintered mass according to claim 1, characterized in that the rare earth oxide is formed of Y203. 5. The silicon-nitride-sintered mass according to claim 1, characterized in that a mass of Si-rare earth element-At-O-N is further included as a constituent phase. 6. The silicon-nitride-sintered mass according to claim 5, characterized in that the ratio of the at-Si3N4 phase to the whole of all constituent phases is set at 0.01 to 0.7.

Inventors: INOUE, HIROSHI, KOMATSU, MICHIYASU, KOMEYA, KATSUTOSHI, TSUGE, AKIHIKO
Applicants: KABUSHIKI KAISHA TOSHIBA
Application year: 1984
Main classification: C04B35
IPC codes: C04B35