TRACK FOR FLOATING TRANSPORT OF SUBSTRATES

Abstract: Installation for transport of substrates (74), at least consisting of a main transport track (10), including a series of transporters (16), which are succesively positioned in the direction of movement of said substrates (74) for a two-sided floating trasport of said substrates (74) through a track passage (18), located in between transporters sections (20) and (22) and whereby means are included for at least locally a change of the movement in linear direction of said substrates (74).

Description: Track for floating transport of substrates. In the Dutch Patent Application no. 83 00 443 of the applicant trans¬ port tracks are described, u/hβreby the substrates, moving in linear direc¬ tion in a floating transport passage by means of double floating thereof, by means of adapted transporters can be displaced in sideward direction. Thereby it is possible, that more than one branched transport track, positioned aside each other, are connected ωith such a main transport track. Furthermore, such branched transport tracks can have such a wide pas¬ sage for the substrates, that more than one substrate can be displaced the¬ rethrough aside each other, whereby the possible connection of such a track with a mechanic transport track, such as a conveyor belt, for further trans¬ port of the substrates. Furthermore, cassettes for supply of substrates can be connected ωith such branched transport tracks, providing a supply of substrates to the main transport track. Furthermore, cassettes for storage of substrates can be connected with such branched transport tracks. Furthermore, storage tracks ωith single or double floating displace¬ ment of the substrates can ba connected ωith such a branched track. Thereby the possible storage of a great number of substrates in more than one sto- rage level. In that case such a storage track or series thereof can be part of a micro cleanroom cabin, inωhich the transport of substrates takes place in between modules for processing, testing, measuring and sorting. Thereby such an environment is preferably filled ωith an inert gas. Further particularities follow from the description of the following Figures: Figure 1 shows a main transport track according to the invention ωith the connection thereon of a branched transport track. Figure 2 is a cross section over line 2—2 of the transport track according to Figure 1. Figure 3 shows an enlarged detail of the transition of the main transport track towards the second track as branched transport track. Figure 4 shows the combination of a main transport track together ωith two branched transport tracks. Figure 5 shows two main transport tracks, each provided ωith a branched transport track ωith an enlarged passage thereof for the substra¬ tes and the connection of such branched transport tracks ωith a common conveyor belt. Figure 6 is a sectional view over line β—6 of the installation ac¬ cording to Figure 5. In Figure 1 the main transport track 10 is shown. Thereby this track consists of a set of side bearers 12 and 14, in which series of transpor¬ ters 16 are positioned, ωith on each side of the track 18 the transporter sections 20 and 22, see also Figure 2. The channels, located in these transporters 16 for urging the trans¬ port medium towards the passage,can be inclined and proviled in such a ωay, that the multiple medium streams, flowing in the direction of the " trans¬ port, provide a displacement thrust on these substrates. The branched transport track 28 is connected ωith the main trans¬ port track 10. This track consists of the bearers 30 and 32, corresponding ωith the side bearer 14 and whereby this bearer 14 is provided ωith the exit port 34, This branched transport track 28 includes the transporters 36, which are similar to the transporters 16 in at least the section aside the tran¬ sition area. The first transporter 36 is positioned adjacent to a series of trans— porters 16 of the main transport track 10. Furthermore, the passage 38 is in open connection with the passage 18, because the distance strips 40, located in bearers 14, correspond with the strips 42, located in the bearers 30 and 32. By means of a screwed connection 44 the upper sections of a number of transporters 16' are mounted against the upper plate 24, whereas the lo¬ wer sections of these transporters by means of the screωed connection 46 are secured to the lower plate 26. In that ωay the width of the passage 18 remains the same, also in the transporters 16'. The upper and loωer plates also cover the bearers 30 and 32 of the branched transport track 28 over at least some distance. Furthermore, the transporter 46 is located in betωeen two transpor¬ ters 16', see also Figures 2 and 3, In this transporter ωith sections 50 and 52 the segments 54 and 56 are located, ωith the channels 58 positioned therein, which channels are inclined positioned, providing medium flows in the direction of the branched transport track. These channels 58 are connected ωith an own supply 68 of medium though the common channels 60 and 62 and the supply channels 64 and 66. By means of the valves 70 and 72 a closing of these channels 64 and 66 can be established. Thereby the change in direction of movement of the substrates 74 is as follows; These substrates, whether or not resting against each other, move under floating condition through passage 18. On command, the valves 70 and 72 are opened with through channels 58 the supply of transport medium un¬ der a relatively high pressure towards the substrate 74', ωhich as a result is urged towards passage 38, whereafter the transporters 36 take over the displacement thereof. Thereupon through these valves 70 and 72 the supply of medium to¬ wards the transporters 48 is blocked, with consequently the uninterrupted moving of the following substrate in the main transport track 10. In Figure 4 the main transport track 10 is shown over a greater length and whereby still another branched transport track 28' is connected therewith. Thereby the transporters 48' have again the same function as that of the transporter 48 ωith on command the displacement in sideward direction of the substrates 74. Uithin the scope of the invention only this corner transport section 28' can be used, whereby on command every substrate is displaced in side¬ ward direction. Such a structure is applicable in transport tracks to offer more than cπly a linear displacement of the substrates. Furthermore, any inclination of such sideward displacement is possible, In Figure 5 a transport track 76 is connected ωith the main trans¬ port track 10', This track has such a wide passage 78, that simultaneously by means of transporters 80, 82 and 84 these substrates 74 are displaceabla from this main transport track 10* towards this track 76, see also Figure 6, Jithiπ the scope of the invention such a passage 78 can still be wi— der, whereby a.single floating transport of the substrates is possible to¬ wards a clean room compartment, which is filled with gaseous transport me¬ dium to enable a temporary storage of these substrates, A mechanical conveyor belt 86 is connscted ωith transport track 76, Thereby the transport track 10 can for instance extend into a high vacuum module, wherein processing under high vacuum can take place of the substra¬ tes, being supplied via the conveyor belt 86. The conveyor belt can be a metal tape, which in that case can func¬ tion as electrode. By means of transport structure 88 this tape is discharged O PI evenly from roll 90 and whereby a gathering of the tape can take place on roll 92. Thereby the take-over of the substrates by the coπυeyor belt takes place as these substrates are released by the transport track 76. On the other side of the conveyor belt 86 the transport track struc¬ ture 94 is located, which is similar to the combination of transport tracks 10' and 76. ϋJithin the scope of the invention in between these transport tracks any other type of mechanical transport system, whether or not offering a "floating" transport of the substrates, is possible. The ultra narrow "floating" passage for the substrates, enabling a very restricted contents of the cleanroom environment for these substrates, and such combined with a very limited consumption of transport medium, makes the "floating" transport system very suitable for storage of a great number of substrates in a storage system. Thereby a storage track can be designed in such a way, that the transport/storage tracks, positioned aside each other, extend in upward di¬ rection, whereby after a 360 turn such a track section can be located on top of another track section, connected therewith. In that way in a number of successive levels a storage under cleanroom condition of for instance 1000 substrates can be provided. Furthermore, by means of stepper motors such tracks, stapled as a package on top of each other, can be displaceable in vertical, direction for a successive connection of these tracks with supply and discharge tracks, with a "floating" transport of these substrates. Thereby the whole cabin, whether or not including the stepper motors, can be located in an environment, having an ultra cleanroom condition. iiJithin the scope of the invention other structures of such storage track for substrates are possible. * * BU- E » OMPI - , WIFO Λ>

Claims: C L A I FI 5 1. Installation for transport of substrates, at least consisting of a main transport track, including a series of transporters, which are suc¬ cessively positioned in the direction of movement of said substrates for an at least local double floating transport of said substrates in a passage thereof and whereby means are incorporated for an at least local change of the direction of movement of said substrates. 2. Installation according to Claim 1 , whereby said transporters consist of two sections with a passage for said substrates in between, structured in that way, that at least during said change in direction of substrate movement in between said transporter sections and said substra¬ tes, moving through, a "floating"gaseous cushion for said substrates is maintained. 3. Installation according to Claim 2, whereby in said transporters a number of channels are located, which at one end are connected with a common supply of gaseous transport medium and at the other end are connec¬ ted ωith said passage. 4. Installation according to one of foregoing Claims, whereby in at least one of said transporter" sections the arrangement of said supply chan- nels for the urging of gaseous medium towards said substrate is such, that said flows of medium result in a force on said substrate in sideward direc¬ tion. 5. Installation according to Claim 4, whereby therein means are in¬ corporated to direct said transport medium towards said substrate for a wanted period of time. 6. Installation according to Claim 4, whereby said sideward direction is approximately 90 . 7. Installation according to one of foregoing Claims, whereby said transporters are secured in a mounting block arrangement and a sideωall of said arrangement at the location of the transporters for lateral displace¬ ment of said substrates is provided with at least one exit port. 8. Installation according to Claim 7, whereby said block arrange¬ ment is executed such, that said transporter sections are enclosed positio¬ ned,therein. 9. Installation according to Claim 8, whereby in said exit port transporters for floating transport of said substrates with a mounting sec¬ tion thereof are secured to said block arrangement. 10. Installation according to one of foregoing Claims, wherein, as distance strips are located in said mounting block arrangement of said main track, creating said passage, in said block arrangement αf said exit also distance strips are located and furthermore said strips have such a relation, that at least one strip section is positioned. in both block ar- rangements. 11. Installation according to one αf foregoing Claims, whereby aside said main block arrangement with a main transport track for said substra¬ tes a branched transport track is located, extending in lateral direction. 12. Installation according to Claim 11, whereby the combination αf said main track and said branched transport track is such, that thereby the entrance of the passage of said branched transport track corresponds ωith the exit passage of said main transport track. 13. Installation according to one of foregoing Claims, whereby said transporters of said branched track at least locally are structured approxi— mately the same as said transporters of said main track. 14. Installation according to Claim 13, whereby said block arrange¬ ment of said main track extends that far in lateral direction, that at least a part αf said branched track is enclosed in said block arrangement. 15. Installation according to Claim 13, ωhereby the first transporter of said branched track is positioned in the exit port of said block arrange¬ ment of said main track. 16. Installation according to Claim 15, ωhereby said transporter ωith one ωall section at least approximately adjoins the ends αf at least tωo transporters of said main track. 17. Installation according to one of foregoing Claims, ωhereby said branched transport track as second main transport track is positioned at the end of said first main transport track to provide a transport system ωith a non-linaar displacement of said substrates. 18. Installation according to one of foregoing Claims, ωhereby said branched transport track at least at the location of the connection thereof ωith said main transport track has a greater passage width as that αf said main transport track. 19. Installation according to Claim 18, ωhereby said ωidth of said passage in said branched transport track is that sized, that at least tωo substrates can move aside each other through said track. 20. Installation according to Claim 19, ωhereby in the main transport track at least two transporters with means are located to establish the displacement in sideward direction of at least tωo substrates at the same moment. 21. Installation according to Claim 20, ωherein it is executed such, that in at least a number of said transporters of said branched transport tracks a two-sided floating transport of said substrates can take place. 22. Installation according to one of foregoing Claims, ωherein said structure and means to control the transport medium* are such, that substra¬ tes can be fed through said branched transport track toωards said main transport track for further displacement thereof. 23. Installation according to Claim 22, ωherein such means are in- eluded, that the speed of said substrates at the end of the displacement immediately before the change in direction of movement is larger than the regular speed of said substrates in said track. 24. Installation according to Claim 23, ωherein in said main trans¬ port track means are included for such a buffering αf arriving substrates, that said substrates cannot make a mechanic contact ωith said main track. 25. Installation according to Claim 23, ωherein further the structure is such, that the speed αf said substrates in said take-over section of said main transport track is larger than the speed of said substrates in said track behind said take-over section. 26. Method of said installation according to Claim 25, ωherein during the transport of said substrates successively at least two substrates are fed aside each other from said branched transport track toωards said take¬ over section of said main transport track and the speed of said substrates during said take-over is that large, that substrates adjoin substrates, already displacing from said take-over section αf said main transport track. 27. Method according to Claim 26, ωherein said substrates in said take-over section slip in betωeeπ substrates, displacing in said main transport track. 28. Installation according to one of foregoing Claims, ωherein in said main transport track sensors for contrαling the speed of said substra¬ tes in combination ωith regulation means, included in the supply of trans¬ port medium, are located to enable such a displacement of said substrates, that in this track successive substrates can be displaced individually and on some distance removed from each other, . 29. Installation according tα one of foregoing Claims, ωherein the structure of said branched transport track is such, that a cassette for collection of said substrates can be connected therewith, ωith a transport of successive substrates to their respective rest positions in said cassette. 30. Installation according to Claim 29, ωherein for that purpose the end section of said branched track only consists of transporters, ωhich are positioned at the loωer side of said passage for said substrates. 31. Installation according to Claim 30, ωherein the structure of said installation is such, that said cassette after receiving a substrate by means of a stepper motor is displaced in dαωnωard direction to receive the following substrate. 32. Installation according to Claim 30, ωherein the structure σf said installation is such, that by means αf said branched transport track a supply αf said substrates from a sender cassette takas place and said cas¬ sette by means αf a stepper motor after the sending is displaced in upωard direction over some distance to send the folloωiπg substrate. 33. Installation according to one of foregoing Claims, ωhereiπ said branched transport track is connected ωith one storage track to store a great number of said substrates. 34. Installation according to Claim 33, ωherein in series of storage tracks are positioned on top of each other, ωith a gradually inclined route of said storage track. 35. Installation according to Claim 33, wherein said track is sxecu- ted such, that the displacement therein of said substrates occurs by means of at least locally a single-sided floating transport. 36. Storage track for said substrates, as included in said installa¬ tion according to Claim 33, wherein said track is connected with at least a supply source and a discharge source of said substrates. 37. Storage track for substrates according to Claim 36, wherein said track as common collector track for substrates through branched transport tracks is connected ωith at least tωo modules for processing, testing, measuring, sorting etcetera, 38, Storage track according to Claim 37, ωhereiπ the structure of said track is such, that said track as substrate cabin is part of the cleanroom environment of said installation at the location of at least said main transport track. 39, Installation according to one of foregoing Claims, ωherein in said installation such means are included, that in said track by means of said transport medium at least locally a sub-micro"clean-room" is main¬ tained, 40, Installation according to Claim 39, ωherein it is structured in such a ωay, that said "clean-room" condition is maintained in the ωhole section in between two modules. 41, Installation according to Claim 40, ωherein the structure of said installation is such, that said "clean-room" condition is also main¬ tained in said substrate storage track, connected with said section.

Inventors: BOK EDWARD, BOK, EDWARD
Applicants: BOK EDWARD, BOK, EDWARD
Application year: 1984
Main classification: H05K13
IPC codes: B65G47, B65G51, H01L21, H05K13