METHODS OF MANUFACTURING METAL TITANATE FINE POWDERS

Abstract: A method of manufacturing metal titanate fine powder which is represented as MTiO₃ where M is Ba, Sr or Ca includes the steps of preparing a hydrolised product of a titanium compound and reacting the hydrolised product with a water soluble metal salt of Ba, Sr or Ca in an aqueous alkaline solution having a pH of not less than 13.

Description: METHODS OF MANL-FACTURING METAL TITANATE F1NE POWDERS This invention relates to methods of manufacturing metal titanate fine powders, and more particularly i8 directed to methods of manufacturing barium titanate, strontium titanate and calcium titanate fine powder by liquid-phase reaction. The invention also relates to metal titanate fine powders made by such methods. Recently, manufacture of metal titanate ultra-fine powder such as barium titanate BaTiO3, strontium titanate SrTiO3 and calcium titanate Cation ultra-fine powders has been required for several uses. One such requirement relates to a multilayer ceramic capacitor, which is required to be small and light, like other electronic parts, but of large capacitance. In a multilayer ceramic capacitor, barium titanate, strontium titanate or -calcium titanate are employed as a ferroelectric material. In order to make the thickness of the multilayer ceramic capacitor small and uniform, it is necessary to make the above material as ultra-fine powders. In addition, in such a multilayer ceramic capacitor, lead is mixed into the material because of its firing properties and temperature characteristics. However, if the firing temperature is high, the lead is partly evaporated, so that multilayer ceramic capacitors of uniform characteristics cannot be obtained. If an ultra-fine powder of a metal titanate such as barium titanate could be made finer, the firing temperature could be lower with improved results. Moreover, metal titanate ultra-fine powders such as Bated3, SrTiO3 and CaT iD3 ultra-fine powders are required for use as electrostrictive materials, piez-electric materials as transparent ceramics. Bats03, SrTiO3 and Cato3 have been manufactured by calcination. More particularly, barium carbonate BaCO3 powder and titanium oxide powder are mixed and calcined at 1000 to 12000C; or strontium carbonate SrCO3 powder and titanium oxide powder are mixed and calcined at 1000 to 0 1300 C; or calcium cabonate CaCO3 powder and titanium oxide powder are mixed and calcined at 1000 to 1200do. The calcined material thus made is mechanically ground to a fine powder, but the particle size is relatively large and not uniform, so to obtain fine and uniform particles, it is necessary to sieve the ground powder to eliminate large particles. Moreover, it is difficult to avoid the introduction of impurities during these processes. Recently it has also been proposed to synthesize metal titanate fine powders such as Bated3, SrTiO3 and CaTiO3 using a metal alkoxide. However, this involves high manufacturing cost and therefore has not been used in practice. The size of BaTiO3 particles obtained by this method is 500 angstroms. The crystal system of the BaTiO3 obtained with the above two methods is tetragonal (aO=3.994 angstroms and C0:4.038 angstroms). According to the present invention there is provided a method of manufacturing metal titanate fine powder which is represented as MTiO3 where M is Ba, Sr or Ca, comprising the steps of: preparing a hydrolysed product of a titanium compound; and reacting said hydrolysed product with a water soluble metal salt of Ba, Sr or Ca in an aqueous alkaline solution having a pH of not less than 13. According to the present invention there is also provided a method of manufacturing barium titanate fine powder comprising the steps of: preparing a hydrolysed product of a barium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. According to the present invention there is also provided a method of manufacturing strontium titanate fine powder comprising the steps of: preparing a hydrolysed product of a strontium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. According to the present invention there is also provided a method of manufacturing calcium titanate fine powder comprising the steps of: preparing a hydrolysed product of a calcium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. The invention will now be described by way of example with reference to the accompanying drawings, throughout which like parts are referred to by like references, and in which: Figure 1 is a graph showing an X-ray diffraction pattern of barium titanate fine powder made by a method according to the invention; Figure 2 is a dark image photograph by an electron microscope of barium titanate fine powder made by a method according to the invention; Figure 3 is a bright image photograph by an electron microscope of barium titanate fine powder made by a method according to the invention; Figure 4 is a graph showing results of differential thermal analysis of barium titanate fine powder made by a method according to the invention; ; Figure 5 is a graph showing results of thermbgravimetric analysis of barium titanate fine powder made by a method according to the invention; Figure 6 is a graph showing the pH dependency of the amount of barium titanate fine powder made by a method according to the invention; Figure 7 is a graph showing a relation between the amount of barium titanate fine powder made by a method of the invention and the molar ratio Bafti; Figure 8 is a graph showing a relation between the amount of barium titanate fine powder made by a method according to the invention and the reaction temperature; Figure 9 is a graph showing a relation between the amount of barium titanate fine powder made by a method according to the invention and the reaction time; ; Figure 10 is a graph indicating an X-ray diffraction pattern of strontium titanate fine powder made by a method according to the invention; Figure 11 is a dark image photograph by an electron microscope of strontium titanate fine powder made by a method according to the invention; Figure 12 is a bright image photograph by an electron microscope of strontium titanate fine powder made by a method according to the invention; Figure 13 is a graph indicating the pH dependency of the amount of strontium titanate fine powder made by a method according to the invention; Figure 14 is a graph indicating a relation between the amount of strontium titanate fine powder made by a method according to the invention and the molar ratio Srfti; ; Figure 15 is a graph indicating a relation between the amount of strontium titanate fine powder made by a method according to the invention and the reaction temperature; Figure 16 is a graph indicating a relation between the amount of strontium titanate fine powder made by a method according to the invention and the reaction time; Figure 17 is a graph indicating results of differential thermal analysis of strontium titanate fine powder made by a method according to the invention; Figure 18 is a graph indicating resits of thermogravimetric analysis of strontium titanate fine powder made by a method according to the invention; Figure 19 is a graph indicating an X-ray diffraction pattern of calcium titanate fine powder made by a method according to the invention; ; Figure 20 is a photograph by a scanning electromicroscope indicating calcium titanate fine powder made by a method according to the invention; Figure 21 is a graph indicating results of differential thermal analysis of calcium titanate fine powder made by a method according to the invention; Figure 22 is a graph indicating results of thermo-gravimetric analysis of calcium titanate fine powder made by a method according to the invention; Figure 23 is a graph indicating the pH dependency of the amount of calcium titanate fine powder made by a method according to the invention; Figure 24 is a graph indicating a relation between the amount of calcium titanate fine powder made by a method according to the invention and the molar ratio Ca/Ti; ; Figure 25 is a graph indicating a relation between the amount of calcium titanate fine powder made by a method according to the invention and the reaction temperature; and Figure 26 is a graph indicating a relation between the amount of calcium titanate fine powder made by a method according to the invention and the reaction time. In methods according to the invention of manufacturing metal titanate MTiO3 (where M is barium Ba, strontium Sr or calcium Ca) fine powder, a hydrolysation product of titanium Ti compound and a water soluble metal salt are reacted in a strong alkaline aqueous solution or suspension. The methods wil first be described in detail in connection with the manufacture of barium titan ate BaTiO3 fine powder. The Ti compound is prepared first. The titanium compound can, for example, be titanium tetrachloride TiC14, titanyl sulphate Ti(SO4)2 or titanoxy sulphate TIROS04. This Ti compound is hydrolysed. For example, with TiC14 and Ti(SD4)2 aqueous solutions thereof are made neutral thereby to obtain Ti02.xH O. When Ti(S04)2 is employed, in order to remove the sulphate group, rinsing by water is performed to filter TiO2.xH2O. Next, a water soluble barium salt is prepared and then reacted with the above hydrolysed product in suspension in the strong alkaline aqueous solution. When in the hydrolysation reaction, filtering to remove the sulphate group or the like is not required, the reaction in the suspension of strong alkaline aqueous solution can be carried out at the same time as the hydrolysation reaction. The water soluble Ba salt can be Ba(NO3)2, Ba(OH)2, BaC12 or Ba(CH3C00)2, while the alkali can be LiOH, KOH, NaOH or NH40H. The pH of the suspension of strong alkaline aqueous solution is selected to be higher than 13.0, more preferably 13.5 or above. The molar ratio between Ba and Ti, Ba/Ti, is selected to be more than 0.5, more preferably 0.7 to 5. The reaction temperature is selected to be higher than 15 C, possibly up to the boiling point of the aqueous solution, and preferably 0 higher than 40 C. The reaction time is selected to be sufficient to effect the reaction. After the reactions as described above, filtering, rinsing and drying treatments are carried out, if necessary. With this method of manufacture, Bated3 fine powder having a uniform particle size as small as 200 to 300 angstroms can be obtained. Since in the previously proposed synthesis based upon calcination, the BaTiO3 was mechanically ground to a fine powder, the above particle size of 200 to 300 angstroms could not be expected. When the BaTi03 fine powder made by a method according to the invention is used for forming a multilayer ceramic capacitor, the firing temperature can be lowered. Thus lead can be mixed uniformly into the BaTiQ3 fine powder, removing the scatter characteristics. Then, since the dielectric constant of the material can be increased at room temperature, it is possible to achieve a large capacitance for the capacitor. The Bats03 fine powder thus made is also very suitable as electrostrictive material, piezoelectric material and transparent ceramics. Moreover, since inorganic material is used as the raw material, the manufacturing cost can be lowered significantly. Also, the absence of the grinding process means that impurities are not mixed into the BaTiO3 fine powder. 3 Using methods according to the invention, cubic system Bats03 (at=4.033 angstroms) can be obtained. The manufacture of strontium titan ate SrTiO3 fine powder will now be described. In the same way as with barium titanate fine powder, a hydrolysed product of Ti compound is prepared. Then, a water soluble Sr salt is prepared and is reacted with the above hydrolysed product of the Ti compound in a strong alkaline aqueous solution. When in the hydrolysed reaction, filtering to remove the sulphate group or the like is not required, the reaction in the strong alkaline aqueous solution can be carried out at the same time as the hydrolysation reaction. The water soluble Sr salt can be Sr(NO3)2, Sr(OH)2, SrCl2, Sr(CH3COO)2 or SrO, while the alkali can be LiOH, KOH, NaOH or NH4 OH. The pH of the strong alkali aqueous solution is selected to be higher than 13.0. The molar ratio between Sr and Ti, Sr/Ti, is selected to be more than 0.3, more preferably 0.5 to 4 The reaction temperature is selected to 0 be higher than 20 C, possibly up to the boiling point of the aqueous solution, and preferably higher than 60 C. The reaction time is selected to be sufficient to effect the reaction. After the reactions as described above, filtering, rinsing and drying treatments are carried out, if necessary. With this method of manufacture, SrTiO3 fine powder having a uniform particle size as small as 100 to 200 angstroms can be obtained. Since in the previously proposed synthesis based on calcination, the SrTiO3 was mechanically ground to a fine powder, the above particle size of 100 to 200 angstroms could not be expected. When the SrTiO3 fine powder made by a method according to the invention is used for forming a multilayer ceramic capacitor, the firing temperature can be lowered. Thus, lead can be mixed uniformly into the SrTiO3 fine powder, removing the scatter characteristics. Then, since the dielectric constant of the material can be increased at room temperature, it is possible to achieve a large capacitance for the capacitor. The SrTiO3 fine powder thus made is also very suitable as electrostrictive material, piezoelectric material and transparent ceramics. Moreover, since inorganic material is used as the raw material, the manufacturing cost can be lowered significantly. Moreover, the absence of the grinding process means that impurities are not mixed into the SrTiO3 fine powder. Using methods according to the invention, cubic system SrTiO3 (at=3. 921 angstroms) can be obtained. Also, when Cats03 fine powder is to be manufactured, a hydrolysed product of titanium Ti compound is prepared similarly. Then, a water soluble Ca salt is prepared and reacted with the above hydrolysed product of Ti compound in the suspension of strong alkaline aqueous solution. When in the hydrolysed reaction, filtering to remove the sulphate group or the like is not necessary, the reaction in the strong alkaline aqueous solution can be carried out at the same time as the above hydrolysation reaction. The water soluble Ca salt can be Ca(NO)2, Ca(OH)2, Caul2, Ca(CH3COO)2 or CaO, while the alkali can be LION, KOH, NaOH or NH40H. The pH of the suspension of strong alkaline aqueous solution is selected to be higher than 13.0, more preferably higher than 13.2. The molar ratio between Ca and Ti, Ca,/Ti, is selected to be more than 0.3, more preferably 0.6 to 10. The reaction temperature is selected to be higher than 700C, possibly up to the boiling point of the aqueous solution, and preferably higher than 850C. The reaction time is selected to be sufficient to effect the reaction. After the reactions as described above, filtering, rinsing and drying treatments are carried out, if necessary. With this method of manufacture, CaT ID3 uniform fine powder having a particle size as small as 1 to 3 microns can be obtained. Since in the previously proposed synthesis based on calcination, the CaTID3 was mechanically ground to a fine powder, the above particle size of 1 to 3 microns could not be expected. When the Cato3 fine powder made by a method according to the invention is used for forming a multilayer ceramic capacitor, the firing temperature can be lowered. Thus, lead can be mixed uniformly into the Cato3 fine powder, removing the scatter characteristics. Then, since the dielectric constant of the material can be increased at room temperature, it is possible to achieve a large capacitance for the capacitor. The CaTiD3 fine powder thus made is also very suitable as electrostrictive material, piezoeletric material and transparent ceramics. Moreover, since inorganic material is used as the raw material, the manufacturing cost can be lowered significantly. Moreover, the absence of the grinding process means that impurities are not mixed into the Cato3 fine powder. Using methods according to the invention, rhombic system CaTiD3 fine powder can be obtained. The invention will now be described in more detail with reference to examples. Example 1 50 g of TiCl4 was added to and stirred into 50 ml of water to make an aqueous solution to which aqueous solution including Ba(ND3)2 of molar amount equivalent to the Ti was added. KOH was further added thereto to make the pH 13.5. Then, while stirring the aqueous solution, the aqueous solution was continuously reacted at the reaction temperature of 1000C for four hours. The product made by this reaction was filtered, and the product rinsed with water and dried at 700C for one day. As a result of X-ray analysis of the product thus made, the diffraction pattern as shown in Figure 1 was obtained. Comparing this diffraction pattern with an American Society of Testing Materials (ASTM) card, it was confirmed that the BaT iD3 thus made was of cubic system. In this case, the X-ray diffraction was performed by the powder method in which a copper target and nickel filter were used, and the time constant was selected to be I?111. Moreover, as will be clear from a dark image and a bright image obtained by an electron microscope and as shown in Figures 2 and 3, the particle size of the BaTiO3 fine powder in this example was in a range from 200 to 300 angstroms and uniform. Example 2 50 g of TiC14 was added to and stirred into 100 g of water to make an aqueous solution to which NH4OH was added and hydrolysed to form a substantially neutral aqueous solution. Thereafter, Ba(OH)2 in a molar amount of 0.95, approximately the same as the Ti, was added to the above neutral aqueous solution to which KOH was added to make the pH 14. The aqueous solution was then reacted at the reaction temperature of 900C for three hours, then filtered, and the product rinsed with water and dried at 1000C for one day. The product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to Figure 1. Also, the results with an electron microscope were the same as those of Figures 2 and 3. Furthermore, the BaT iD3 fine powder of this example was subjected to differential thermal analysis and thermogravimetric analysis. The results thereof are indicated in Figures 4 and 5, respectively. As will be understood from these results, the BaTiO3 fine powder contains no impurity. The dropped portion on the curve shown by a reference letter a in Figure 4 is believed to be caused by the dehydration of the absorption water. Example 3 50 g of TiC14 was added to and stirred into 200 g of water to make an aqueous solution to which NaOH was added to make the aqueous solution substantially neutral. Thereafter, BaO was added to the neutral aqueous solution to which NaOH was further added to make the pH 13.7. This aqueous solution was reacted at 95 0C for two hours, filtered, and the product rinsed with water and then dried at 1000C for one day. The product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to Figure 1. Also, the results with an electron microscope were the same as those of Figures 2 and 3. Example 4 50 g of TiC14 was added to and stirred into water to make an aqueous solution to which KOH was added to make the aqueous solution substantially neutral. Then, Ba in a molar amount twice that of the Ti was added to the above neutral aqueous solution to which KOH was further added to make the pH 13.3. In this state, this aqueous solution was reaction at 95 0C for two hours. Thereafter, a top clear part of the solution was removed by decanting and water was added thereto again. This treatment was repeated and the product was rinsed with water. The product thus made then had an aqueous solution of NH4Cl added, was filtered, rinsed with water and then 0 dried at 100 C for one day. This product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to Figure 1. Also, the results with an electron microscope were the same as those of Figures 2 and 3. Example 5 In this example, the pH dependency of the synthesised amount of BaT iD3 was examined. Ba solution (suspension solution) of a molar amount equivalent to the Ti was added to the hydrolysed product of TiC14 to which KOH was then added. Then, the amount of Bated3 synthesized when the solution thus made was reacted at 1000C for four hours was measured. The amount of BaTiO3 synthesized was measured each time the amount of KOH added was varied to change the pH. The measured results are shown in the graph of Figure 6, which shows that the pH should be selected to be higher than 13.0, preferably higher than 13.5. In this case, the amount of BaTiO3 produced was calculated from the area of the X-ray diffraction peak (110) of cubic-system perovskite. The X-ray analysis was carried out in substantially the same way as described above. That is, a copper target and a cobalt filter were employed, a voltage of 35 kV and a current of 25 mA were applied and the time constant was selected to be "1", Example 6 In this example, the relation between the synthesized amount of BaT iD3 and the molar ratio was studied. Ba(OH)2 of a predetermined amount was added to the hydrolysed product of TiC14 to which KOH was added to make the pH 14.0. The solution thus made was reacted at 1000C for four hours and thereafter, the amount of BaTiD3 synthesized was measured. While changing the amount of Ba(OH)2, dependency of the amount of Bats03 synthesized on the molar ratio Ba/Ti was studied. The results are shown in the graph of Figure 7, which shows that the molar ratio Ba/ti should be higher than 0.5, preferably in a range from 0.7 to 5. In this case, the amount of BaTiO3 synthesized was measured in the same way as in Example 5. Example 7 In this example, the temperature dependency of the amount of Bated3 synthesized was studied. Ba solution of the same molar amount as the Ti was added to the hydrolysed product of TiC14 to which KOH was then added to make the pH 13.9. The aqueous solution thus made was reacted for three hours. Then, the amount of BaT iD3 synthesized was measured for reaction temperatures over a range from 150C to the boiling point of the aqueous solution. The measured results are shown in the graph of Figure 8, which shows that the reaction temperature should be in a range from 150C to the boiling point, preferably higher than 400C. In this case, the amount of Bats03 synthesized was measured in the same way as in Example 5. Example 8 In this example, the time dependency of the amount of BaT iD3 synthesized was studied. Ba solution of the same molar amount as the Ti was added to the hydrolysed product of TiC14 to which KOH was then added to make the pH 13.9. The aqueous solution thus made was reacted at 500C, 700C and 900C, respectively. Then, the amount of BaT iD3 synthesized was measured for every reaction time. The results are shown in the graph of Figure 9. A sufficient time for enabling the reaction to be achieved can be measured from the graph of Figure 9. Also, in this example, the amount of 23aTiO3 synthesized was measured in the same way as in Example 5. Example 9 50 g of TiC14 was added to and stirred into 50 ml of iced water to make an aqueous solution to which a Sr(NO3)2 aqueous solution of molar amount equivalent to the Ti was added. KOH was further added to the solution to make the pH 13.7. Thereafter, the aqueous solution thus made 0 was continuously reacted at 100 C for four hours. The product of this reaction was filtered, rinsed with water and then dried at 700C for one day. This product was subjected to X-ray analysis, resulting in the diffraction pattern as shown in Figure 10. Comparing this diffraction pattern with an ASTM card, it was confirmed that the SrTiD3 obtained was a cubic-system SrTiD3 (ag = 3.921 angstroms) fine powder. X-ray analysis was carried out by the powder method in which a copper target and a nickel filter were used. As will be clear from a dark image and a bright image shown in Figures 11 and 12, and obtained with an electron microscope, the particle size of the SrTiO3 fine powder was in a range from 100 to 200 angstroms and uniform. Example 10 50 g of TiC14 was added to and stirred into 100 g of water to make an aqueous solution to which NH4OH was added to be hydrolised, and form a neutral aqueous solution of pH 7. Thereafter, Sr(OH)2 in a molar amount approximately the same as the Ti (Sr/Ti = 1.05) was added to the neutral aqueous solution to make the pH 14. The aqueous solution thus made was reacted at 950C for four hours. Then, the product was filtered, rinsed with water and then dried at 1000C for one day, This product was subjected to similar X-ray analysis, resulting in the same diffraction pattern as in Figure 10. Moreover, the results obtained with an electron microscope were the same as those in Figures 11 and 12. Example 11 50 g of TiC14 was added to and stirred into 200 g of water to make an aqueous solution of Ti to which NaOH was added to make a neutral solution of pH 7. SrCl2 of the same molar amount as the Ti was added to the solution to which NaOH was further added to make the pH 14 The resulting solution was reacted at 100 C for three hours. The product thus 0 made was filtered, rinsed with water and then dried at 100 C for one day. The product was subjected to the same X-ray analysis as mentioned above, resulting in a diffraction pattem the same as that shown in Figure 10. Moreover, results with sn electron microscope were similar to those shown in Figures 11 and 12. Example 12 NH4OH was added to 200 ml of a 30 weight X of Tri(504)2 aqueous solution to make a neutral aqueous solution of pH 7, which was then filtered and the product rinsed with water. Thereafter, the product had added 11 of water to which SrC12 in a molar amount equal to the Ti was added. KOH was also added thereto to make the pH 14, and the resulting solution was reacted at 100 C for four hours. The product thus made was filtered, rinsed with water and then dried. This product was subjected to the same X-ray analysis as mentioned above, resulting in a diffraction pattern the same as that shown in Figure 10. Moreover, the results with an electron microscope were similar to those shown in Figures 11 and 12. Example 13 In this example, the pH dependency of the amount of the SrTiO3 synthesized was measured. TiC14 was hydrolysed, and Sr salt in the same molar amount as the Ti and then KOH were added. Then, the amount of SrTiO3 synthesized when the aqueous solution thus made was reacted at 1000C for three hours was measured. In this case, the amount of KOH added was varied so as to change the pH of the above aqueous solution. The results thereof are shown in the graph of Figure 13, which shows that the PH should be selected to be higher than 13.09 In this case, the amount of SrTiO3 synthesized was measured from the area of the X-ray diffraction peak (110). Example 14 In this example, the dependency of the amount of the SrTiO3 synthesized upon the molar ratio was studied. In this example, the SrTiO3 was made in the same way as Example 13 where the pH was 14. Then, the molar ratio Sr/Ti was changed. The results thereof are shown in the graph of Figure 14, which shows that the molar ratio should be higher than 0.3, preferably in a range from 0.5 to 4. In this case, the amount of SrTiD3 synthesized was measured in the same way as in Example 13. Example 15 In this example, the temperature dependency of the amount of SrTiO3 synthesized was studied. In this example also, the SrTlD3 was made in the same way as in Example 13 where the molar ratio of Sr/Ti was 1.05 and the pH was 14. Then, the reaction temperature was changed. The results are shown in the graph of Figure 15, which shows that the reaction temperature is preferably selected in a range from 20 0C to the boiling point 0 of the aqueous solution, more preferably higher than 60 C. In this case, the amount of SrTiD3 synthesized was measured in the same way as in Example 13. Example 16 In this example, the dependency on time of the amount of SrTiO3 synthesized was studied. Also in this example, the SrTiO3 was made in the same way as in Example 13 where the pH was 14 and the molar ratio Sr/Ti was 1.05. Then, the reaction time was changed. The results are shown in the graph of Figure 16. From this graph, it is seen how the time affects the amount SrTiO3 synthesized, the amount being measured in the same way as in Example 13. Example 17 In this example, differential thermal analysis and thermogravimetric analysis were carried out. Also in this example, the SrTiO3 was made in the same way as in Example 13 with the pH 14. In the analysis, the temperature was raised at a rate of 200C/min. The results thereof are shown in the graphs of Figures 17 and 18, respectively. These graphs indicate that the SrTiO3 fine powder contains no impurity. In this case, the dropped portion indicated by a reference letter a in Figure 17 is believed to be caused by the dehydration of the adsorption water. Example 18 50 g of TiCl4 was added to and stirred into 50 ml of iced water to make an aqueous solution to which Ca(NO3)2 aqueous solution of the same molar amount as the Ti was added. KOH was then added, thereby making the pH of this aqueous solution 13.7. Thereafter, while being stirred, this aqueous solution was continuously reacted at 1000C for four hours. The product made by this reaction was filtered, rinsed with water and then dried at 700C for one day. This product was subjected to X-ray analysis, resulting in a diffraction pattern shown in Figure 19. The comparison of this diffraction pattern with the ASTM card confirmed the fact that the CaTiO3 thus made was a rhombic-system CaTiO3. The X-ray analysis was performed using the powder method with a copper target and a nickel filter. Moreover, as will be clear from a photograph obtained with a scanning electromicroscope and shown in Figure 20, the particle size of the Cato3 fine powder in this example was in a range from 1 to 3 microns and uniform. Example 19 50 g of TiC14 was added to and stirred into 100 g of water to make an aqueous solution to which NH40H was added so as to make the solution substantially neutral. Then, Ca(OH)2 in a molar amount substantially equal to the Ti was added to the above aqueous solution, to which KOH was further added to make the pH 1 14. This aqueous solution was reacted at 950C for four hours. Thereafter, the product thus made was filtered, rinsed 0 with water and then dried at 100 C for one day. The product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to that of Figure 19. Also, the result obtained with a scanning electromicroscope was the same as that shown in Figure 20. Example 20 50 g of TiC14 was added to and stirred into 200 g of water to make an aqueous solution to which NaOH was added to make the aqueous solution substantially neutral, that is, pH 7. Then, CaC12 in a molar amount equal to the Ti was added to the aqueous solution, to which NaOH was further added to make the pH 14. This aqueous solution was reacted at 1000C for three hours. Thereafter, the product thus made was filtered, rinsed with water and then dried at 1000C for one day. This product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to that of Figure 19. Also, the result obtained with a scanning electromicrosope was the same as that shown in Figure 20. Moreover, the CaTiD3 fine powder of this example was subjected to differential thermal analysis and thermogravimetric analysis in which the temperature was raised at a rate of 200C per minute. The results thereof are shown in the graphs of Figures 21 and 22, respectively, which show that the CaT iD3 fine powder contains no impurity. In this case, the dropped portion indicated.by a reference letter a in Figure 21 is believed to be caused by the dehydration of the adsorption water. Example 21 NH40H was added to 200 ml of 30 weight % Ti(SO4)2 aqueous solution to make a substantially neutral aqueous solution of pH 7, which was then filtered and the product rinsed with water. Thereafter, this product was added to 11 of water to which CaCl2 in a molar amount equal to the Ti was added. KOH was added thereto make the pH 14, and then the aqueous solution was continuously reacted at 1000C for four hours. Thereafter, the product thus made was filtered out, rinsed with water and then dried. This product was subjected to the same X-ray analysis as described above, resulting in a diffraction pattern similar to that of Figure 19. Also, the result obtained with a scanning electromicroscope was the same as that shown in Figure 20. Example 22 In this example, the pH dependency of the amount of CaTiD3 synthesized was studied. A Ca salt in a molar amount equal to the Ti was added to a hydrolyzed product of TiCl4 to which KOH was added thereafter. Then, the amount of CaTiD3 synthesized when this aqueous solution was reacted at 1000C for three hours was measured. Then, the amount of Cation synthesized was measured with the amount of KOH added varied to change the pH. The results are shown in the graph of Figure 23, which shows that the pH should be selected to be higher than 13.0, preferably higher than 13.2. In this case, the amount of CaT iD3 synthesized was measured from the areas of the X-ray diffraction peaks (200) and (002) of 121 the rhombic-system CaTiO3. The X-ray analysis was carried out in substantially the same way as described above, Example 23 In this example, the dependency of the amount of CaTiO3 synthesized on the molar ratio was measured. Ca(OH)2 of a predetermined amount was added to the hydrolysed product of TiC14 to which KOH was then added to make the pH 14.0. Then, this aqueous solution was reacted at 1000C for three hours. Thereafter, the amount of CaT iD3 synthesized was measured. And, while changing the amount of Ca(OH)2, thus changing the molar ratio Cr/Ti, the amount of CaTiO3 synthesized was measured. The results are shown in the graph of Figure 24 which shows that the molar ratio Ca/Ti should be selected to be higher than Q3, preferably in a range from Q6 to 10. In this case, the amount of CaTiO3 synthesized was measured in the same way as in Example 22. Example 24 In this example, the temperature dependency of the amount of CaTiO3 synthesized was studied. Ca solution in a molar amount of L05 approximately equal to the Ti was added to the hydrolysed product of TiC14, to which KOH was added then to make the pH 14, and the aqueous solution was then reacted for three hours. Then, the amount of Cato3 synthesized was measured at each reaction temperature. The results are shown in the graph of Figure 25, which shows that the reaction temperature should be selected in a range from 700C to the boiling point of the aqueous solution, 0 more preferably higher then 85 C. In this case, the amount of Cats3 synthesized was measured in the same way as in Example 22. Example 25 In this example, the time dependency of the amount of CaTiO3 synthesized was studied. Ca solution of a molar amount 1.05 approximately equal to the Ti was added to the hydrolysed product of Tics4, to which KOH was added to make the pH 14, and the resulting aqueous solution then was reacted at 1000 C. The amount of CaTiO3 synthesized was measured at each reaction time. The results are shown in the graph of Figure 26, from which the time dependency is seen. Also, in this example, the amount of CaTiO) synthesized was measured in the same way as in Example 22

Claims: CLAIMS 1. A method of manufacturing metal titan ate fine powder which is represented as MTiD3 where M is Ba, Sr or Ce, comprising the steps of: preparing a hydrolysed product of a titanium compound; and reacting said hydrolysed product with a water soluble metal salt of Ba, Sr or Ca in an aqueous alkaline solution having a pH of not less than 13. 2. A method of manufacturing barium titanate fine powder comprising the steps of: preparing a hydrolysed product of a barium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. 3. A method of manufacturing strontium titan ate fine powder comprising the steps oft preparing a hydrolysed product of a strontium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. A A method of manufacturing calcium titan ate fine powder comprising the steps of: preparing a hydrolysed product of a calcium compound; and reacting said hydrolysed product in an aqueous alkaline solution having a pH of not less than 13. 5. A method of manufacturing barium titan ate fine powder and according to claim 2 wherein said aqueous alkaline solution has a pH of not less than 13.5. 6. A method of manufacturing barium titan ate fine powder and according to claim 2 wherein the molar ratio Ba/Ti is not less than 0.5. 7. A method of manufacturing barium titanate fine powder and according to claim 2 wherein the molar ratio Ba/Ti is in a range from 0.7 to 5. 8. A method of manufacturing barium titanate fine powder and according to claim 2 wherein the reaction temperature is not less than 0 15 C. 9. A method of manufacturing barium titanate fine powder and according to claim 2 wherein a reaction temperature is in a range from 0 40 C to the boiling point of said aqueous solution. 10. A method of manufacturing strontium titanate fine powder and according to claim 3 wherein the molar ratio Sr/Ti is not less than 0.3. 11. A method of manufacturing strontium titan ate fine powder and according to claim 3 wherein the molar ratio Sr/Ti is in a range from 0.5 to 4. 12. A method of manufacturing strontium titanate fine powder and according to claim 3 wherein the reaction temperature is not less than 0 20 C. 13. A method of manufacturing strontium titanate fine powder and according to claim 3 wherein the reaction temperature is in a range from 0 60 C to the boiling point of said aqueous solution. 14. A method of manufacturing calcium titanate fine powder and according to claim 4 wherein said aqueous alkaline solution has a pH of not less than 13.2. 15. A method of manufacturing calcium titanate fine powder and according to claim 4 wherein the molar ratio Ca/Ti is not less than 0.3. 16. A method of manufacturing calcium titan ate fine powder and according to claim 4 wherein the molar ratio Ca/Ti is in a range from 0.6 to 10. 17. A method of manufacturing calcium titanate fine powder and according to claim 4 wherein the reaction temperature is not less than 70 C. 18. A method of manufacturing calcium titanate fine powder and according to claim 4, wherein the reaction temperature is in a range from 0 25 C to the boiling point of said aqueous solution. 19. A method of manufacturing metal titanate fine powder and according to any one of claims 1 to 4 wherein said titanium compound is Tic4, TiOSO4 or Ti(SO4)2. 20. A method of manufacturing barium titanate fine powder and according to claim 2 wherein said barium compound is Ba(NO3)2, Ba(DH)2, Back2 or Ba(CH3COO)2. 21. A method of manufacturing strontium titanate fine powder and according to claim 3 wherein said strontium compound is Sr(N03)2, Sr(OH)2, 5rCl2, Sr(CH3COO)2 or SrO. 22. A method of manufacturing calcium titanate fine powder and according to claim 4 wherein said calcium compound is Ca(NO3)2, Ca(OH)2, Cacti2, Ca(CH3COO)2 or CaO. 23. Barium titan ate fine powder, strontium titan ate fine powder or calcium titanate fine powder made by a method according to any one of the preceding claims.

Inventors: TAMURA, HIDEMASA, UEDAIRA, SATORU, YAMANOI, HIROSHI
Applicants: SONY CORPORATION
Application year: 1983
Main classification: C01G23
IPC codes: C01G23