SEMICONDUCTOR DEVICES PROVIDED WITH HEAT-DISSIPATING MEANS

Abstract: A semiconductor device includes a radiator (33) fixed on a package (20), said package including a projection (30) formed on its surface, and said radiator (33) comprising a recess (31) for receiving said projection. The projection is fixed within the recess by resin. Such a fixing system can improve bonding of the radiator, to the package, and thermal efficiency.

Description: SEMICONDUCTOR DEVICES PROVIDED WITH HEAT-DISSIPATING MEANS. The present invention relates to semiconductor devices provided with heat-dissipating means. In a semiconductor package, especially a semiconductor package comprising a semiconductor element to be used for a bipolar logic or an emitter-coupled logic, a large scale integrated circuit performing a high-speed operation, or a power supply element, the power consumption may be large, and satisfactory attainment of a predetermined function cannot be expected unless generated heat is promptly radiated. Therefore, a heat-dissipation body such as a fin radiator may be attached to a semiconductor package in which a large quantity of heat is generated. The fin radiator comprises a support member supporting a plurality of fin plates. In such a semiconductor device, a flat surface of the radiator, which surface abuts on a flat face of a top surface of the packaee, is bonded to the flat face with an adhesive. With this method of attaching the radiator to the package, since the flat surface of the radiator and the flat face of the top surface of the package are bonded together with an adhesive, the strength of the resultant bonding may not be sufficient, and the radiator may become separated from the package when the temperature is elevated or vibrations occur. Furthermore, deviation of the position of the radiator may occur at the bonding step so that the radiator is not secured at the preselected desired position, with the result that it may be difficult to obtain a desired heat-radiating effect. It is desirable to provide a form of attachment of a radiator to a semiconductor device which can serve to reduce the above-mentioned defects of the previouslyproposed techniques. It is further desirable to provide such a form of attachment of a radiator to a semiconductor device, wherein the length of the contact portion between the radiator and the package is narrowed and the contact area is increased, whereby a high heat-radiating effect can be attained. An embodiment of the presert invention can be constructed so as to provide a semiconductor device having a radiator fixed on a package, in which: said package comprises a projection formed on its surface; said radiator comprises a concave portion for receiving said projection; and said projection is fixed within said concave portion via a resin. Reference will now be made, by way of example, to the accompanying diagrammatic drawings, in which: Each of Figs. 1 to 4 is a axial sectional view illustrating a semiconductor device embodying the present invention; Figure 5 shows a axial sectional view of a semiconductor device embodying the present invention in which a radiator attachment structure is illustrated to an enlarged scale; Figure 6 is an exploded perspective view illustrating parts of a device embodying the present invention; Figure 7 shows an axial view of the parts shown in Fig. 6 when assembled; and Figures 8 to 10 show axial sectional views of other semiconductor devices embodying the present invention. Figure 1 shows a first embodiment of the present invention. In Fig. 1, reference numeral 20 represents a member from which heat is radiated, for example, a semiconductor package, which comprises a plate 21 consisting of a metal such as molybdenum, an annular ceramic material 22 such as alumina bonded to the metal plate 21 with a high-melting-point solder such as an AgCu alloy, a cap 23 bonded to the ceramic material 22 with a low-melting-point solder such as an AuSn or PbSn alloy to define a sealed interior 24, and a semiconductor element 25 attached to the interior 24. Reference numerals 26 and 27 represent inner lead lines and reference numerals 28 and 29 represent outer lead lines. Reference numeral 30 represents a projection formed on a bonding face of the package 20, for example, the external face of the metal plate 21, by soldering or the like. This projection is, for example, a rod-like member such as a stud. The projection is made of metal such as molybdenum or copper, or ceramic such as alumina. This structure will now be described in more detail. Reference numeral 33 represents a fin radiator comprising a supporting portion32 having a concavity or recess for receiving the stud (projection)30. A plurality of fin plates 34 are mounted on the supporting portipn 32 of the radiator 33. A heat-conductive binder 35, for example an epoxy resin, comprising a silicon dioxide (SiO2) powder, an alumina (Al 203) powder, or a boron nitride (BN) powder is filled into the space between the package 20, including the stud 30, and the radiator 33, whereby a strong bond is created between the package 20 and the radiator 33. Figure 2 illustrates a second embodiment of the present invention. This embodiment is different from the embodiment shown in Fig. 1 in that the package 20 is constructed so that a sealed space is formed between the ceramic material 22 and the cap 23, the semiconductor element 25 is contained in the sealed space to form a package free of a metal plate, and the stud 30 is formed on the ceramic material 22. Other structural members in the embodiment shown in Fig. 2 are the same as those of the embodiment shown in Fig. 1 and thus are represented by the same reference numerals as those used in Fig. 1. Therefore, an explanation of these members is omitted. Furthermore, since the effect attained in this embodiment is equivalent to that attained in the embodiment of Fig. 1, an explanation of the effect is omitted. The embodiment shown in Fig. 3 is different from the embodiment shown in Fig. 2 only in that two studs 30 are formed. Since the other structural members are the same as those in the embodiment shown in Fig. 2, they are represented by the same reference numerals as in Fig. 2 and therefore an explanation of these members is omitted. The effect attained in this embodiment is not particularly different from the effect attained in the embodiment shown in Fig. 2 except that the effect is enhanced with an increase of the number of studs. The embodiment shown in Fig. 4 is different from the embodiment shown in Fig. 3 only in that the position of the semiconductor element 25 is changed. The other structural members in this embodiment are the same as those in Fig. 3 and thus are represented by the same reference numerals as in Fig. 3. Therefore, an explanation of these structural members is omitted. Furthermore, the effect attained in this embodiment is substantially the same as the effect attained in the embodiment shown in Fig. 3. In the foregoing embodiments, in the case where the stud 30 is formed on the ceramic material 22, a metal layer (not shown) is formed on the ceramic material 22 by printing and the stud 30 is soldered onto this metal layer. Figure 5 is a sectional view of a semiconductor device in which a portion of the stud 30 of the radiator attachment structure is shown to a magnified scale. In the semiconductor device shown in Fig. 5, heat generated from the semiconductor element 25 is transferred to the radiator 33 through a metal block 41, the metal plate 21, and the stud 30 and is radiated into the air through the fin plates 34. In this semiconductor device, the stud 30 is bonded to the metal plate 21 by soldering. When a fillet 40 of the solder is large, it sometimes happens that the radiator 33 is attached to the stud 30 in the state where the lower end portion of the radiator 33 is kept in contact with this fillet 40. Since the stud 30 is bonded and secured to the radiator 33 through a resin adhesive layer 35, the radiator 33 should be electrically insulated. However, if the lower end portion of the radiator 33 is brought into contact with the fillet 40 of the solder and the radiator 33 is rendered electrically conductive, the semiconductor element 25 is electrically communicated with the radiator 33 through the metal block 41 and the metal plate 21. Therefore, if a probe is mistakenly brought into contact with the radiator 33 at the time of testing the characteristics of the semiconductor element 25, an abnormal electric current is caused to flow in the semiconductor element 25, and a problem, such as breakage of the semiconductor element, may arise. In order to increase the heat-radiating efficiency, it is necessary that the radiator 33 be brought as close to the metal plate 21 as possible. Accordingly, it is very desirable that the radiator 33 be arranged so that it sufficiently extends toward the base of the stud 30 without coming into contact with the fillet 40. Furthermore, it is desirable that there be no deviation of the characteristics among batches of the seniconductor device, and it is preferred that a high heat-radiating effect be stably attained. The outer diameter of the stud 30 is about 3 mm, the inner diameter of the concavity or recess 31 is about 3.2 mm, and the clearance between the stud 30 and the xsa11 of the recess 31 is as small as about 100 P m. In order to bring the radiator fin 33 sufficiently close to the metal plate 21 with a small clearance equally interposed throughout batches of the semiconductor device, it is desirable that the shape of the fillet 40 be uniform. A means by which the shape of the fillet 40 is predetermined and the radiator 33 is brought sufficiently close to the package 20 will now be described. In Fig. 6, a groove 42 is formed on the periphery of the stud 30 in the vicinity of the lower end thereof, and an annular groove 44 having a diameter larger than the diameter of the stud is formed at the surface of the metal plate 21 around the region to which the stud is to be bonded. Grooves 42 and 44 may have a V-shaped or U-shaped section. A hard solder, such as a silver solder, is used as a solder 43. The so-grooved stud 30 and the metal plate 21 are inserted into a heating furnace with the solder 43 being interposed therebetween and are heated and bonded together as shown in Fig. 7. At this bonding step, the fused solder is allowed to rise on the stud 30 because of the sticking force thereof and the melt flows so that it expands on the surface of the metal plate 21. However, this flow is stopped by the grooves 42 and 44 formed on the stud 30 and the metal plate 21, respectively. Therefore, the size of the fillet 40 of the solder formed between the stud 30 and the metal plate 21 is limited so that the fillet 40 has a certain shape. Accordingly, if the grooves 42 and 44 are formed at appropriate positions, it is possible to prevent the radiator fin 33 from coming into contact with the fillet 40. Other embodiments of the present invention are illus trated in Figs. 8 through 10. In the foregoing embodiments, the stud 30 is attached to the package 20 through a metal plate 21. If the stud attachment portion on the package 20 is metailized and the stud 20 is attached to the metallized portion as shown in Fig. 8, by forming a groove on the top face of the package 20 the flow of the solder can be controlled at the bonding step and a certain predetermined shape can be given to the fillet 40. Accordingly, in this embodiment, the radiator 33 can be brought close to the package 20, as indicated by the arrow in the drawings, without coming into contact with the fillet 40. The boundary of the stud-receiving recess 31 of the radiator 33 may be tapered or rounded near the mouth of that recess in the vicinity of the grooves 42 and 44 for limiting the shape of the fillet, as shown in Figs. 9 and 10. This can enable the radiator 33 to be brought even closer to the package 20, so that the thermal contact between the radiator 33 and the package 20 can substantially be increased and the heat-radiating efficiency can further be enhanced. As will readily be understood from the foregoing description, in each of the illustrated radiator attachment structures, a recess for receiving the stud soldered to the semiconductor package is formed in the radiator, and the stud is inserted into this recess and the radiator is bonded to the package through a heat-conductive adhesive. The radiator is thus tightly bonded to the package housing, and deviation of the position or separation of the radiator is thereby resisted when vibrations or shocks occur. Moreover, the efficiency of the assembling operation can be enhanced. If the stud is formed of a material having a high heat ocnductivity, such as molydenum (Mo), the area of contact between the radiator and the package (including the stud) is substantially increased and the heat-radiating efficiency is improved. Moreover, by forming grooves on the stud and the package, for imparting a certain predetermined shape to the solder, it can be ensured that the radiator can be brought sufficiently close to the package, since the fillet will then not inhibit such a close arrangement and cause a- corresponding reduction of the heat-radiating efficiency. A clearance can be provided between the outer surface of the stud and the boundary surfaces defining the recess in the radiator, and an adhesive can be filled into this clearance to bond the stud to the radiator. This can be advantageous over a press-bonding technique, in which a clearance is not formed. For example, the ceramic material is less likely to be broken at the bonding step because press-bonding is not effected, and the assembling operation is thus facilitated. Furthermore, self-aligning action of the adhesive can facilitate centering of the stud in the recess.

Claims: CLAIMS 1. A semiconductor device (20) having a heatdissipation body (33) fixed adjacent to an external surface portion of the housing of the device, characterised in that the housing is provided with a projection (30) projecting from the said external surface portion, and the said heat-dissipation body (33) is formed with a recess (31) in which the said projection is accommodated. 2. A device as claimed in claim 1, wherein the heat-dissipation body is adhesively bonded to the said housing by means of a resin. 3. A device as claimed in claim 1 or 2, wherein the projection (30) is a rod-like member. 4. A device as claimed in claim 1, 2 or 3, wherein said heat-dissipation body comprises a support portion (32) bearing a plurality of fins (34). 5. A device as claimed in any preceding claim, wherein the said recess has a mouth which is wider than an interior region of the recess. 6. A device as claimed in claim 5, wherein the said recess has an outer portion which tapers from the mouth towards the said interior region. 7. A device as claimed in any one of claims 1 to 4, wherein the said recess is bounded at its mouth by a rounded edge of the heat-dissipation body so that the mouth is wider than an interior region of the recess. 8. A device as claimed in any preceding claim, wherein the projection is bonded to the said external surface portion by soldering the projection having been formed with a groove, for limiting a fillet of the solder, extending around an end portion of the projection that is adjacent to the said housing. 9. A device as claimed in claim 8, wherein the said external surface portion is formed with a groove surrounding the said projection for limiting the fillet of solder. 10. A device as claimed in any preceding claim wherein a clearance exists around the said projection within the said recess, which clearance is filled with resin.

Inventors: AOKI, HIDEJI, MURATAKE, KIYOSHI, SUGIMOTO, MASAHIRO, WAKABAYASHI, TETSUSHI
Applicants: FUJITSU LIMITED
Application year: 1982
Main classification: H01L23
IPC codes: H01L23