PIN PHOTOVOLTAIC CELL HAVING A HETERO JUNCTION OF AMORPHOUS SILICONCOMPOUND AND AMORPHOUS SILICON

Abstract: A p-i-n amorphous silicon photovoltaic cell of im­ proved conversion efficiency is obtained by incorporat­ ing, on at least either one of the p and n type sides of the cell, preferably on the side exposed to the incident light, an amorphous semiconductor which satisfies the requirement that the optical band gap, Eg.opt, be not less than about 1.85 eV, the electric conductivity be not less than about 10⁻⁸ Ωcm⁻¹ and the p-i-n junction dif­ fusion potential, Vd, be not less than about 1.1 volts and the requirement that the amorphous semiconductor be formed of a substrate represented by the general for­ mula, a - Si 1-x C x or a-Si 1-y N y .

Description: HIGH-VOLTAGE PHOTOVOLTAIC CELL HAVING A HETERO JUNCTION OF AMORPHOUS SEMICONDUCTOR AND AMORPHOUS SILICON BACKGROUND OF THE INVENTION 1. Field of the Invention: This invention relates to a photovoltaic cell having a hetero junction of an amorphous semiconductor and amorphous silicon. 2. Description of the Prior Art: amorphous silicon is obtained by the plasma decomposition of silane (SiH). W. E. Spear et al. discovered in 1976 that the conductivity of amorphous silicon could be notably altered by doping the substance with PH3 or B2H6. D. E. Carlson et al. trially manufactured a solar cell using amorphous silicon in 1976. These achievements have drawn attention to amorphous silicon and have given an impetus to researches devoted to improvement of the conversion efficiency of a thin-film solar cell using amorphous silicon. The researches have so far led to development of thin-film amorphous silicon photovoltaic cells of the Schottky barrier type, pin type, MIS type and hetero junction type. The first three of these types promise to provide highly efficient solar cells. The Schottky barrier type photovoltaic cell made by D. E. Carlson et al. in 1977 showed a conversion efficiency of 5.5%, the MIS type photovoltaic cell made by J. I. B. Wilson et al..in 1978 a. conversion efficiency of 4.8% and the pin type photovoltaic cell made by Y,oshihiro Hamakawa et.al in 1978 a conversion efficiency of 4.52 respectively' In the case of the pin junction type solar cell, the p or n type amorphous silicon gives a carrier a short life and, therefore, fails to provide an effective carrier and the p layer suffers from heavy absorption loss of light because it has a higher light absorption coefficient than the i layer. The inverted pin type photovoltaic cell has been proposed with a view to overcoming these drawbacks. This cell is constructed so that the light impinges on the n type amorphous.silicon side. Since this cell has a smaller-light absorption coefficient than the p type, it, is believed to be more advantageous, though slightly.. Nevertheless this n type amorphous silicon is no better than the p type in the sense that it similarly suffers from absorption loss of light. The inventors made a diligent study devoted to improvement of the efficiency of the pin type photovoltaic conversion. They consequently have found that the shortcircuit current and the open circuit voltage of the pin junction type photovoltaic cell are greatly improyed by using in at least either one of the p and n layers of the cell a doped thin film of a p or n type amorphous semiconductor haying an optical band gap of not less than'about 1.85 eV, an electric conductivity of not less than about 10 8(Q.cmrl at 200C and a diffusion potential, Vd, (exhibited in thtL pin junction) of not less than about 1.1 volts. The photovoltaic cell of this invention is -useful as a photo-electromotive cell in solar cells photoswitehes and the like. Now, the invention will be described in detail below. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1(a) and 1(b) are structural diagrams illustra- i; ting a photovoltaic cell of the type wherein the light impinges on the p and on the n layer side respectively. FIG. 2 is a diagram representing an energy band pro- file of the hetero p-i-n junction photovoltaic cell of this invention. FIG. 3 is a graph showing the relation between the diffusion potential, Vd, and the open circuit voltage as obtained with the p type amorphous semiconductor on the window side. DETAILED DESCRIPTION OF THE INVENTION The cell of Fig. 1 comprises a glass substrate 1, a transparent electrode 2, a p type amorphous semiconductor 3, a i type a-Si 4, ann type semiconductor 5 (such as of the n type a-Si) and an electrode 6. The cell of Fig. 1b comprises an electrode substrate 7, a p type a-Si 8, an i type a-Si 9, an n type amorphous semiconductor 10 and a transparent electrode 11. The amorphous silicon of this invention is obtained by subjecting a mixed gas consisting of silane (SiH4) or a derivative thereof, silane fluoride or a derivative thereof, or a mixture thereof and an-inert gas such as hydrogen, argon diluted with hydrogen or helium to radio-frequency glow discharge decomposition or DC glow discharge decomposition by the capacitive or inductive coupling method. The concentration of silane in the mixed gas generally is in the range of from 0.5 to 100%. The substrate is desired to have a working temperature in the range of from 200 to 3000C. It comprises a glass sheet having a transparent electrode (such as of ITO and SnO2) vacuum deposited thereon, a polymer film, a metal sheet-and all other component layers indispensable to the construction of a solar cell. Typical examples of the basic construction of a solar cell are shown in FIG. l(a), (b). Illustrated in (a) is the type wherein the light impinges on the p side. This type has a construction of Glass - transparent electrode - p - i - n Al, for example. Illustrated in (b) is the type wherein the light impinges on the n side. This type has a construction of stainless steel - p - i - n - transparent electrode. Optionally, other constructions may be formed by interposing a thin insulation layer or a thin metal layer between the p layer and the transparent electrode. Any construction suffices so far as the p-i-n junction is included as the basic component. The pin junction is constructed by forming an i layer of intrinsic amorphous silicon (hereinafter referred to as i type a-Si) obtained by the glow discharge decomposition of silane or a derivative thereof, silane fluoride or a derivative thereof or a mixture thereof and possessed of a carrier life of not less than about 10 7 second, a localized density of state of not more than about 1017 3eV 1 and a mobility of not less than 10 3cm2V;E and joining p and n type doped semiconductors to the i layer. The construction contemplated by this invention is characterized by using, in at least either one of the p and n layers, specifically in the layer on which the light impinges, a p or n type amorphous semiconductor. having an optical band gap of not less than about 1.85 eV, an electric conductivity of not less than about 10 (nCT1 1 at 200C and a diffusion potential, Vd, (exhibited in the pin junction)..of not less than about 1.1 volts. Optionally, the p or n type known amorphous semiconductors may be used one each in the p and n layers. The doped layer of a-Si which does not use the amorphous semiconductor of this invention may use an element of Group III of the Periodic Table of Elements for p type.or an. element of Group V of the same table for n type respectively in accordance with known techniques. The amorphous semiconductor of this invention comprises amorphous silicon carbide'or amorphous silicon nitride represented by the general formula, a-Sil xCx or a-Si1-yNy(x,y are each atomic fraction). These compounds are obtained by subjecting a hydrogen or fluorine compound of silicon and a hydrogen or fluorine compound of carbon or nitrogen to glow discharge decomposition. According to this invention, amorphous siliQRiX4 0 2 bide may be obtained by the plasma decomposition, or more preferably glow discharge decomposition, of a mixture of at least one gas selected from among silane, silicon fluoride and the derivatives thereof, and at least one gas selected from among hydrocarbons, alkylsilanes, the fluorides thereof and the derivatives thereof. For this purpose, it is possible to use a silicon compound with hydrogen and/or fluorine, including silane SiH4, silane derivatives represented by the formula SinH2n+2, derivatives of the formula SiFmH4 m (m= 1 to 4), and derivatives of the formula SiF H 2n+2-m. Examples of the applicable carbon compounds include tetra fluoro carbon CF4, fluorohydrocarbon derivatives of the formula CnFmH2n+2m, and the unsaturated derivatives thereof. Examples of the suitable hydrocarbons include saturated apliphatic hydrocarbons (CnH2n+2), and unsaturated aliphatic hydrocarbons (CnH2n), such as ethylene and propylone. In other words, any hydrogen and/or fluorine derivative of silicon haivng vapor pressure may be used as a source of silicon for producing amorphous silicon carbide, and any hydrogen and/or fluorine derivative of carbon having vapor pressure may be used as a source of carbon. Among them methane is recommended to be employed in most preference. As to the preparation of amorphous silicon nitride the same discussion can be made as above except that in the referred compounds carbon must be replaced by nitrogen and that the preferred source of nitrogen is ammonia. The composition of silicon carbide is represented by the formula a-Sil xCx showing the ratio in number of silicon and carbon atoms in the film formed by glow discharge decomposition. For example, the formula can be rewritten as a-Si0.5C0.5 if the numbers of carbon and silicon atoms in'the film have a ratio of 1 : 1. The ratio of carbon and silicon atoms other methods of electron spectroscopy. It should be noted that any amorphous semiconductor may be used on condition that it be possessed of an optical band gap cf not less than about 1.85 eV, an electric conductivity of not less than about 10 8(Q cm) -1 at 200C and a diffusion potential, Vd, (exhibited in the pin junction) of not less than about 1.1 volts. The amorphous semiconductor of the foregoing description , when used as the window material for the pin jnnction photovoltaic cell, has a large optical band gap and exhibits a very high open voltage, Voc, as well as the increase of the short-circuit current, Jsc. It has been found that in the photovoltaic cell of this invention, there exist the correlation between the diffusion potential, Vd and the open circuit voltage of the cell as depicted by the band profile of FIG. 2. Although the diffusion potential, Vd, in the case of this invention exceeds about 1.1 volts, the trend of the relation is nearly constant without reference to the kind of the amorphous semiconductor to be used on the side exposed to the incident light. This diffusion potential is the difference obtained by subtracting activation energy AEp, > En of the p, n doped layers from the optical band gap, Eg.opt, of the amorphous semiconductor on the side exposed to the oight. Let Ecn stand for the 2 energy level of the conduction zone on the n side and Evp for the energy level of the valence-electron zone on the p side, and the activating energies oEp and xEn which are shown in Fig. 2 can be determined based on the dependency of electric conductivity on temperature. Since zEp = Ef - Evp holds for the p type and sEn = Ech - Ef for the n type, there ensues eVd = Eg.opt ( Ep + wEn). In the case of the incidence of light which occurs on the n side, the diffusion potential is similarly obtained by subtracting the activation energy of the p, n layers from the optical band gap, Eg.opt, of the n type amorphous semiconductor. This invention requires the optical band gap, Eg.opt, to be at least about 1.85 eV and the diffusion potention, Vd, to be at least about 1.1 volts. By incorporating an amorphous semiconductor which satisfies this requirement, the herero junction photovoltaic cell is allowed to enjoy a great improvement in short-circuit current, Jsc, and open cirecuit voltage,Voc. This invention further requires the electric conductivity to be at least 10-8 (#.cm)-1 at room temperature. The reason for this lower limit is that below this limit, the fill factor, FF, becomes too small for-the conversion efficiency to be practical. Now, the hetero junction photovoltaic cell provided by this invention will be described specifically below. In one typical construction, this cell is composed of transparent electrode - p type amorphous semiconductor - i type a-Si - n type a-Si - electrode, with the transparent electrode side to be exposed to the incident light. The transparent electrode ls desired to be formed of ITO or SnO2, preferably the latter. It may be formed by having this substance vacuum deposited on a-glass^substrate or-by having the substance directly vacuum deposited on the p type amorphous semiconductor. Amorphous silicon semiconductor to be employed for the present invention is doped for use in forming a p or n type semiconductor. The doping density may be controlled so as to provide an electric conductivity of at least on the order of 10 8( cm) 1, -7 -l preferably on the order of 10 ( cm) 1 at room temperature. - The doped semiconductor may usually contain about 0.001 to 10 atom % , and 0.005 to 2.0 atom %, of the Group III or the Group IV element. The doping method per se can be followed after a convenient glow discharge decomposition of the gas mixture comprising the Group III compounds such as diborane (B2H6) or the Group V compounds such as phosphine mixed with w other source materials. The p type amorphous semiconductor on the side of the - cell exposed to the incident light is desired to have a thick ness in the range of from about 30 i to 300 2, preferably from 50 R to 200 R. Although the thickness of the i type a-Si layer is not specifically limited in the cell of this inven tion, it is generally selected within the range of from about 2500 i to 10000 R. The n type a-Si layer whose primary function is .to establish atomic contact has no particular thickness limitation. Generally, the thickness of'this layer is selected in the range of from about 150 2 to 600 R. Optionally, this n type a-Si layer may be substituted by an n type amorphous semiconductor of this invention. In another typical construction, the cell is composed of transparent electrode - n type amorphous semiconductor i type a-Si - p type a-Sfl - electrode, with the transparent electrode side to be exposed to the incident light. The n type amorphous semiconductor on the side of the cell exposed to the incident light is desired to have a thickness in the range of from about 30 i to 300 i, preferably from 50 # A-to 200 i. Although the thickness of the i type a-Si is not specifically limited, it is generally selected in the range of from about 2500 A to 10000 i. The thickness of the p type a-Si layer, which is not particularly limited either3 is generally selected in the range of from about 150 i to 600 i. Optionally, this p type a-Si layer may be substituted by a p type amorphous semiconductor of the present invention. The material for the transparent electrode and the method for the vacuum deposition thereof are the same as described above. Now the effect of this invention will be described below with reference to working examples. Glow discharge decomposition was performed at a high frequency of 14.56 MHz in a quartz test tube having an inside diameter of 11 cm. An i type a-Si was obtained by subjecting silane diluted with hydrogen to the glow discharge decomposition at 2 to 10-Torrs. An n type a-Si was obtained similarly by subjecting silane diluted with hydrogen and phosphine (PH3) (PH3/SiH4 =, 0.5 mol%) to the glow discharge decomposition. A p type a-Si yNy was obtained similarly by subjecting silane, ammonia (NH3) and diborane (B2H6) EB/(Si t N) = 0.50 atom %]tothe glow dis charge decomposition. In this case, the gas composition involved in the glow discharge decomposition was adjusted so that the atomic fraction y in the formula, a-Si 1-yNy, would fall in the range of from 0.75 to-0.05. A solar cell was constructed by successively depositing the p type a-Si-l-y yNy, the i type a-Si and the n type a-Si in the order mentioned on the SnO2 surface of a glass substrate coated with an SnO2 film of 25 Q/ and finally vacuum depo siting aluminum of 3.3 mm2. This solar cell was tested for cell properties by use of a solar simulator of AM-1 (100 mWjcm2). During the glow discharge, the temperature of the substrate was kept at 250 C. The thickness of the i layer was 5000 R, that of the n layer 500 A and that of the p type a-Sil yNy layer 135 i. The solar cell properties va. varying compositions of the p type a-Sil-yNy film are shown in Table 1. It is seen from this table that the conversion efficiency (hereinafter represented by "q") which is 4.6% for:the layer formed solely of silane (SilNo) is increased to 5.45%, 6.5% and 6.75 respectively when the value of "y" in the formula, a-Sil yNy, of.. this invention is 0.95, 0.20 and 0.40,, indicating that the n type amorphous semiconductor of this invention permits a conspicuous improvement in the value of n. It:should be noted here that while the increase in the short-circuit current, Jsc, is naturally expected from the fact that the optical inhibition zone width of the a-Sil yNy is greater than that of the a-Si, the increase in the open circuit voltage, Voc, is quite beyond expectation. The conspicuous improvement in the con version efficiency attained by this invention is due solely to the simultaneous improvement in these two factors. The conversion efficiency begins to show a sign of decline as the value of flyfl exceeds 0.5, because the increase in the resistance offered by the p type a-Si yNy Ny reaches a point where the fill factor (hereinafter referred to as FF) falls. In the meantime the short-circuit current (herein after referred to as Jsc) and the open circuit voltage (hereinafter referred to as Voc) remain substantially unaffected. The fulfilment of the requirement, a-Sil yN , is believed to lower the absorption loss of light in the p layer and enhance Jsc and Voc to an extent enough to permit the conspicuous improvement in the conversion efficiency. Entirely the same results were obtained when SiF4 and NH3 were used instead. Now, the p type a-Sil- C will be described. The p type amorphous semiconductor a-Sil xCx in a'varying compo=: sition was.obtained by subjecting silane diluted with hydrogen, methane (CH4) and diborane EB/CSi + C) -= 0.1 atom%] to the aforementies vs. varying compositions of the p type a-Si aforementioned glow discharge decomposition. Usually x of a-Si1xCx is 0.95 to 0.05 and in preference 0.55 to 0.05. Here one should pay attention to the electric conductivity of the product so that it may be not less than the order of cm)-1. Takc an instance, silicon carbide having 2,2 eV of Eg. opt and 3V10 9(o cm) -1 of electric conductivity shows only 2.9% of . Thus, in usual cases, one of the measures for attaining the present electric conductivity is to make the Eg.opt less than 2.20 eV, more preferably less than 2.15 eV. The solar cell properties vs. varying compositions of the p type a-Si-xCx are shown in Table 2. The results reveal the conspicuous improvement brought about in Jsc and Voc. The value of "x" or y in the general formula a-Si C or a-Si N was obtained by the means of Auger electron l-y y spectroscopy. The value was calculated by EMI13.1 where Ic, In and Isi are the Auger peak hights of carbon, nitrogen and silicon respectively, c,n and &alpha;si the relateve Auger yields of carbon, nitrogen and silicon. Here gc=15, 15 and &alpha;si=65 wee adopted accroding to the data of "Auger electron spectroscopy reference manual" (edited by G.E.Mcguire, Plenum publishing Co., USA (1979). The values of the optical band gap, Eg.opt, of the a-Sil xCx and the a-Sil¯yNy are greater than the value of a-Si as shown in Tables 1, 2. Use of these amorphous semiconductors as window materials, therefore, is naturally expected to bring about an improvement in Jsc. Moreover, it brings about an unexpected cqnspicuous improvement in Voc, which leads to a great enhancement of the conversion efficiency. The reason therefor evidently exists in the relation between the diffusion potential, Vd, and Voc, which plots in one straight line without reference to the type of the amorphous semiconductor to be used, as shown in FIG. 3. This means that the value of Voc linearly increases in proportion to the increase of Vd. This fact indicates that the diffusion potential is enhanced and Voc is proportionately improved by using an amorphous semiconductor of a large optical band gap as the material for the window of the pin junction photovoltaic cell. As described above, this invention has issued from the discovery that the hetero junction photovoltaic cell which uses as the window material the amorphous semiconductor having an Eg.opt of at least- about 1.85 eV and a pin junction diffusion potential, Vd, of at least 1.1 volts enjoys a conspicupus improvement in not only Jsc but also Voc. Surprisingly, this effect of the invention does not depend on the type of the amorphous semiconductor. The effect described above is entirely the same when the n type amorphous semiconductor of the cell is exposed to the incident light. Table 1 p type a-Si(l-y)N(y) # i-n a-Si:H EMI15.1 Atomic <SEP> Fraction <SEP> (y) <SEP> 0 <SEP> 0.05 <SEP> 0.10 <SEP> 0.20 <SEP> 0.30 <SEP> 0.40 <SEP> 0.50 <SEP> 0.70 <tb> Eg. <SEP> opt <SEP> (eV) <SEP> 1.76 <SEP> 1.81 <SEP> 1.85 <SEP> 1.92 <SEP> 2.01 <SEP> 2.11 <SEP> 2.20 <SEP> 2.27 <tb> Elsctric <SEP> Conductivity <SEP> (#.cm)-1 <SEP> 5x10-7 <SEP> 4x10-7 <SEP> 5x10-7 <SEP> 5x10-7 <SEP> 3x10-7 <SEP> 2x10-7 <SEP> 1x10-7 <SEP> 8x10-8 <tb> Ef <SEP> - <SEP> Ev <SEP> (eV) <SEP> 0.6 <SEP> 0.55 <SEP> 0.56 <SEP> 0.50 <SEP> 0.51 <SEP> 0.56 <SEP> 0.67 <SEP> 0.75 <tb> Vd <SEP> (volts) <SEP> 0.96 <SEP> 1.06 <SEP> 1.09 <SEP> 1.22 <SEP> 1.30 <SEP> 1.35 <SEP> 1.33 <SEP> 1.32 <tb> <SEP> Jsc <SEP> (mA/cmê) <SEP> 10.3 <SEP> 10.8 <SEP> 11.2 <SEP> 11.6 <SEP> 11.9 <SEP> 12.15 <SEP> 12.1 <SEP> 12.2 <tb> Sollar <SEP> Cell <SEP> Voc <SEP> (volts) <SEP> 0.75 <SEP> 0.82 <SEP> 0.85 <SEP> 0.89 <SEP> 0.90 <SEP> 0.91 <SEP> 0.91 <SEP> 0.91 <tb> Properties <SEP> FF <SEP> 0.60 <SEP> 0.615 <SEP> 0.62 <SEP> 0.63 <SEP> 0.62 <SEP> 0.61 <SEP> 0.59 <SEP> 0.57 <tb> <SEP> # <SEP> (%) <SEP> 4.6 <SEP> 5.45 <SEP> 5.9 <SEP> 6.5 <SEP> 6.6 <SEP> 6.75 <SEP> 6.50 <SEP> 6.30 <tb> Table 2 p tpe a-Si(l-x)Cx / i-n a-Si:H EMI16.1 Atomic <SEP> Fraction <SEP> (x) <SEP> 0 <SEP> 0.05 <SEP> 0.1 <SEP> 0.2 <SEP> 0.3 <SEP> 0.4 <SEP> 0.5 <SEP> 0.7 <SEP> 0.85 <tb> Eg. <SEP> opt <SEP> (eV) <SEP> 1.76 <SEP> 1.80 <SEP> 1.85 <SEP> 1.95 <SEP> 2.06 <SEP> 2.10 <SEP> 2.11 <SEP> 2.10 <SEP> 2.09 <tb> Electric <SEP> Conductivity <SEP> (#.cm)-1 <SEP> 5x10-7 <SEP> 7x10-7 <SEP> 7x10-7 <SEP> 1x10-6 <SEP> 8x10-7 <SEP> 6x10-7 <SEP> 3x10-7 <SEP> 2x10-7 <SEP> 9x10-8 <tb> Ef <SEP> - <SEP> Ev <SEP> (eV) <SEP> 0.6 <SEP> 0.58 <SEP> 0.55 <SEP> 0.54 <SEP> 0.57 <SEP> 0.57 <SEP> 0.65 <SEP> 0.65 <SEP> 0.70 <tb> Vd <SEP> (volts) <SEP> 0.96 <SEP> 1.02 <SEP> 1.10 <SEP> 1.21 <SEP> 1.29 <SEP> 1.33 <SEP> 1.26 <SEP> 1.25 <SEP> 1.19 <tb> <SEP> Jsc <SEP> (mA/cmê) <SEP> 10.0 <SEP> 10.3 <SEP> 10.8 <SEP> 11.5 <SEP> 11.9 <SEP> 12.0 <SEP> 12.1 <SEP> 12.0 <SEP> 11.9 <tb> Sollar <SEP> Cell <SEP> Voc <SEP> (volts) <SEP> 0.75 <SEP> 0.82 <SEP> 0.86 <SEP> 0.88 <SEP> 0.90 <SEP> 0.91 <SEP> 0.89 <SEP> 0.885 <SEP> 0.85 <tb> Properties <SEP> FF <SEP> 0.61 <SEP> 0.64 <SEP> 0.68 <SEP> 0.70 <SEP> 0.67 <SEP> 0.66 <SEP> 0.66 <SEP> 0.62 <SEP> 0.58 <tb> <SEP> # <SEP> (%) <SEP> 4.6 <SEP> 5.4 <SEP> 6.3 <SEP> 7.1 <SEP> 7.10 <SEP> 7.2 <SEP> 7.1 <SEP> 6.6 <SEP> 5.9 <tb> i a-Si:H Eg.opt = 1.8eV n type a-Si:H Eg.opt = 1,8eV Ec - Ef = 0.85eV Ec - Ef = 0.2eV

Claims: CLAIMS: 1. A p-i-n amorphous silicon type photovoltaic cell, characterized by incorporating on at least either one of the p and n type sides thereof exposed to the incident light an amorphous semiconductor having an optical band gap, Eg.opt, of not less than about 1.85 eV, an electric conductivity of not less than about 10-8 (#cm)-1 at 20 C and a p-i-n junction diffusion potential, Vd, of not less than about 1.1 volts. 2. The p-i-n amorphous silicon type photovoltaic cell according to Claim 1, wherein the p or n type amorphous semiconductor is made of a substance represented by the general formula'aSi1xCx or a-Sil yNy respectively. 3. The p-i-n amorphous silicon type photovoltaic cell according to Claim ,2, wherein the amorphous semiconductor satisfies 0.05 < x < 0.8 or 0.05 < y < 0.8 with respect to the::general formula involved.

Inventors: HAMAKAWA, YOSHIHIRO, TAWADA, YOSHIHISA
Applicants: KANEGAFUCHI KAGAKU KOGYO KABUSHIKI KAISHA
Application year: 1981
Main classification: H01L31
IPC codes: H01L31