A METHOD OF FABRICATING SCREEN LENS ARRAY PLATES

Abstract: Method of fabricating aperture and lens array plates (100, 200) in silicon using photo or electron beam lithographic patterning followed by indiffusion of boron and anisotropic silicon etching and assembling to form screen lenses. In one embodiment, a screen lens is formed of one each aperture and lens plate (100, 200), mounted back-to-back. In another embodiment, a screen lens is formed of a single lens (or aperture) plate (400).

Description: A METHOD OF FABRICATING SCREEN LENS ARRAY PLATES BACKGROUND OF THE INVENTION This invention relates to the field of charged particle beam lithography systems, and more particularly to a method for fabricating a screen lens array for use with a multiple charged particle beam exposure system. As integrated circuits become more complex there is a general trend in the semiconductor industry toward increasing device packaging density. In this way the number of circuit elements per die can be increased, or the die size can be reduced. The present philosophy is to make chip or die sizes as small as possible, as this increases the device yield. However, it is obvious that chip size cannot be arbitrarily reduced because of the inherent resolution limits of presently used photolitho¬ graphic processes, In particular, the wavelength of light imposes a barrier to the reproduction of detail in the region of one μm (micrometer) . A number of solutions have been proposed to solve the resolution problem and there is considerable activity in this area presently underway in the semiconductor indus¬ try. These solutions are based on lithographic techniques that employ particles of shorter wavelengths than visible light to overcome the resolution limitation. Generally, two classes of short wavelength particles have been pro¬ posed as alternatives to light, i.e., high energy photons (x-rays) and electrons. An optimal lithographic system would have to possess certain attributes in order for it to be a serious con- tender for use in the production of integrated circuits. o:.-.?ι ° These attributes include resolution, coverage, litho¬ graphic speed, reregistration capability and stability. At present, minimum reproducible line widths on the order of 1 μ are in use, and future integrated circuit structures will probably push the desired system resolu¬ tion requirements to below 1/4 μm. The exposure system should be capable of covering the standard 75 mm and/or 100 mm wafers presently used in industry and be expand¬ able to cover the larger sized wafers (125-150mm) being contemplated. Clearly wafer exposure times measured in tens of minutes to hours are not acceptable in production -exposure systems. Acceptable throughput conditions demand full 75 mm and/or 100 mm wafer exposure times of at most a few minutes. A parallel charged particle beam system is described in a commonly assigned copending international patent application, Serial No. PCT/US81/00488, filed 10 April 1981, the disclosure of which is incorporated herein by reference, In this system, the throughput capability of conventional types of lithography systems is increased significantly by utilizing a multiple charged particle beam exposure system for directly writing an integrated circuit pattern simultaneously at a plurality of loca- tions on a target surface. In one embodiment of the disclosed system, an electron source produces an electron beam which is used to illuminate an object aperture. A screen lens consisting of a multiplicity of holes breaks up the flood electron beam emanating from the object aperture into a multiplicity of beams and focuses them in parallel on a resist-coated substrate. Each hole in the lens plate acts as a small aperture lens when a positive potential is applied to the wafer with respect to the screen lens. An optimal screen lens array fabrication method would have to be capable of producing coaxial beam limiting apertures and aperture lenses in arrays having certain performance requirements for it to be a serious contender for use in the production of screen lens arrays. In 5 particular, the resulting screen lens arrays should be comprised of two thin plates of conducting material with arrays of holes concentric to better than 25 μm in both planes, Each upper hole or "aperture" should have a diameter in the range of 0.25 to 1.0 mm, and each lower 10 hole or "lens" should have a diameter of 1.0 to 2.0 mm. The spacing between the two planes containing these holes should lie in the range 1.0 to 3.0 mm. The hole diameters given above should be accurate to + 25 μm (lens plate to lens plate) and to + 12 μm within a given plate. Also, 1-5 the deviation in the diameter of any hole due to ellip- t city must be less than 2 μm. Edge burrs should be avoided; but, when present, should not exceed 2 μm if burr projects towards the lens axis and 5 μm when pro ecting away from the lens axis. 20 In some applications, the lenses may be constructed from a solid piece of material to simulate the aperture and lens holes , -- • 5 For standard 100 mm wafers the lens plate should be 100 mm or larger in diameter and contain a minimum of 50 lenslets and a maximum of 1,000 lenslets arranged on a cartesian grid. The spacing between nearest neighbors should be accurate to + 25 μm. The aperture plate and 0 the lens plate should be coplanar to within + 12 μ . Fabrication methods for making screen lens arrays are known in the art, However, the known methods. suffer from one or more limitations or drawbacks which preclude their application for making screen lens arrays of the type ~ utilized in the aforementioned copending international patent application. For example, although the prior art discloses the utilization of boron indiffusion techniques, they do not provide satisfactory solutions to the problems which applicant's invention addresses. In particular, the known "spin coating" technique for application of the boron does not provide a satisfactory screen lens array having the aforementioned performance characteristics. Moreover, the disclosed boron penetration depths (on the order of 2 μm) do not provide sufficient mechanical strength. And finally, the teachings of the prior art are silent as to what constitutes a workable boron atom con¬ centration. It is accordingly a general object of the present invention to overcome the aforementioned limitations and drawbacks associated with known methods and to fulfill the needs mentioned by providing a method for fabricating screen lens arrays for use in a charged particle beam exposure system having all of the desirable attributes noted above. It is a particular object of the invention to provide fabrication methods for producing high resolution screen lens arrays. Other objects will be apparent in the following detailed description and the practice of the invention. BRIEF DESCRIPTION OF THE DRAWING Serving to illustrate the preferred embodiment of the invention is the FIGURE which depicts an individual screen lens array consisting of an aperture plate and a lens plate. Q..:?I SUMMARY OF THE INVENTION The foregoing and other objects and advantages which will be apparent in the following detailed description of the preferred embodiment, or in the practice of the inven- tion, are achieved by the invention disclosed herein, which generally may be characterized as a method of fabricating screen lens array plates from round, polished silicon wafers of about 0.5 mm thickness comprising the steps of: polishing both sides of a silicon wafer; oxidizing both sides of the silicon wafer to produce a high density, low porosity oxide coating having a thickness of about 2 μ ; exposing by photo or electron beam lithographic techniques a predetermined pattern on both sides of the silicon wafer; indi fusing a boron layer into both sides of the wafer to a depth of about 10 μm to a concentration greater than about 7 X 10 19 atoms/cm3; and anisotropically etching the silicon wafer until said predetermined pattern has been formed through the thickness of the wafer. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A procedure has been established for fabricating lens and aperture plates that can be assembled into a high performance array of electron lenses referred to as a "screen-lens ," The screen-lens forms an important part of a parallel writing electron beam exposure system such as that described in the aforementioned copending inter¬ national patent application. More specifically, it offers a significant reduction in the time required for pattern- ing electron sensitive resists at submicron resolutions. In accordance with the present invention, aperture and lens plates are fabricated in silicon using photo or electron beam lithographic patterning followed by indif- fusion of boron and anistropic silicon etching. Plates are used in pairs spaced apart and parallel from one another and with their hole arrays mutually aligned to within + 25 μm to make a full screen lens. As illustrated in more detail in the FIGURE one plate is designated the "aperture" plate 100 and the other the "lens" plate 200. The former consists of an array of holes (typically - 0.5 to 0,75 mm diameter) etched through a single crystal <100> silicon wafer that is 100 mm in diameter. The latter is a similar silicon wafer with larger ^ holes (typically 1,5 mm diameter). Theoretical studies indicate, and we have verified experimentally, that in order to provide very high resolu¬ tion lithography (<0,25 μm) feature size the plates 100, 200 must be very flat (deviation of less than 12 μm across the wafer) , the holes very round (less than 1 μm ellip- ticity) and the side walls very smooth (<0.25 μm) . Single crystal, 100 mm ' diameter silicon wafers with a <100> orientation- and having a thickness of about 0.5 mm are used as starting structures for the plates 100,200. One surface of each wafer (top) is polished with a flat¬ ness deviation of less than 12 μm and the other surface (bottom) is polished flat to better than 50 μm. Either p- or n-type wafers can be used, provided the resistivities are 0,1 ohm cm or greater. The wafers are cleaned using standard semiconductor cleaning techniques and then both sides are oxidized to produce a high density, low porosity oxide coating of 2.0 + 0.3 μm. Patterns are then exposed on both sides of the wafer with photolithography using negative resist and high quality chrome masks. The resist is a standard KTI resist with 70°C. , 1/2 hour prebake, and 150°C. 1/2 hour post bake. Since both sides of the wafer are to be exposed the masks for top and bottom are pre-aligned so that opposite holes are concentric to within + 25 μm. Larger deviations than this will produce noticeable astigmatism in the high resolution images. Higher resolution patterns can be produced using a negative electron-sensitive resist and exposing the resist with electrons through a master plate with holes at the correct spacings. After development and post bake the exposed oxide is etched to a hare silicon in a buffered oxide etch leaving circular islands as masks for the next major step of boron indiffusion. The resist is removed and boron glass is deposited for 3 hours at 1200°C. from a gaseous mix¬ ture (diborane and oxygen are typical component gases) . The deposited glass is removed in HF and the wafer re¬ heated in O2 for 1 hour at 1200°C. followed by a further boron drive-in in N2 for 4 more hours . At the end of this step the boron layer has been indiffused into both sides of the wafer to a depth of about 10 μm with a concentra- tion greater than 7 X 10 boron atoms/cm . The top side is protected with a mask such as "Krylon" plastic and the oxide removed from the bottom in buffered oxide etch. The plastic layer is then removed (toluene) cleaned in isopropyl alcohol and blown dry with The lens bottom hole structure can now be etched to completion in a mixture of pyrocatechol ethylene-diamine and water (1 g pyrocatechol to each 5.6 cc of ethylene- diamine and 2.2 cc of H 2 0) . Etching is carried out at 110°C. to completion (8-16 hours) in a condensing system under a nitrogen atmosphere. This anisotropic etch selectively removes silicon in orientations other than <111> direction and etching effectively stops when only c:.:?ι <111> planes remain. The completed silicon-etched wafers are removed, placed in 90°C. H^O to remove residues, flushed with isopropyl alcohol and dried in warm ^. Finally, the remaining oxide is removed in buffered oxide etch and the entire lens carefully cleaned in iso¬ propyl alcohol followed by a warm N^ drying. As indicated above, the preferred embodiment is to form the screen lens of one each aperture and lens plates 100,200, mounted back-to-back, i.e., with the larger openings together. This assembly can be done by adhering the faces of the two plates 100,200 directly together, maintaining the specified hole alignment and outer face planarity, or with a spacer plate 300 with oversized holes intermediate to the aperture and lens plates, to provide a desired aperture-to-lens spacing independent of the thickness of the lens and aperture plates. It is also possible to use a single lens (or aper- ture) plate 400 as a screen lens with lower electron optical resolution than the two plate configuration. The smaller holes 410 are used as apertures and the larger holes 420 as the lens elements. (In this case, the lens hole diameters would not be the approximately 1.5 mm. diameter, but more like 0.75 mm.) Accordingly, it is clear that the above description of the preferred embodiment in no way limits the scope of the present invention which is defined by the follow- ing claims.

Claims: WHAT IS CLAIMED IS: 1. A method of fabricating screen lens array plates from round, silicon wafers of about 0.5 mm thickness compris¬ ing the steps of: a) polishing both sides of a silicon wafer; b) oxidizing both sides of the silicon wafer to produce a high density, low porosity oxide coating having a thickness of about 2 μ ; c) exposing by photolithographic 'techniques a pre- determined pattern on both sides of the silicon wafer; d) indiffusing a boron layer into both sides of the wafer to a depth of about 10 μm to a concentration greater than about 7 X 10 19 atoms/cm3; and e) anisotropically etching the silicon wafer until said predetermined pattern' has been formed through the thickness of the wafer. 2. A method of fabricating screen lens array plates from round, silicon wafers of about 0.5 mm thickness co pris- ng the steps of: a) polishing both sides of a silicon wafer; b) oxidizing both sides of the silicon wafer to produce a high density, low porosity oxide coating having a thickness of about 2 μm; c) exposing by electron beam lithographic techniques a predetermined pattern on both sides of the silicon wafer; d) indiffusing a boron layer into both sides of the wafer to a depth of about 10 μm to a concentration greater than about 7 X 10 19 atoms/cm3; and e) anisotropically etching the silicon wafer until said predetermined pattern has been formed through the thickness of the wafer. 3. A method of fabricating screen lens array plates from round, silicon wafers of about 0.5 mm thickness compris¬ ing the steps of: a) polishing both sides of a silicon wafer; b) oxidizing both sides of the silicon wafer to produce a high density, low porosity oxide coating having a thickness of about 2 μm; c) applying a thin, uniform layer of negative resist to both sides of the silicon wafer; d) exposing by photolithographic ' techniques a pre- determined pattern on both sides of the silicon wafer; e) developing the resulting resist pattern; f) etching away the exposed oxide; g) removing the remaining photoresist; h) depositing boron for about 3 hours at about 1200°C. on each of the wafer/oxide surfaces; i) indiffusing the boron layer into both sides of the wafer to a depth of about 10 μm at a concentration greater than about 7 X 10 19 atoms/cm3 in the areas not protected by the remaining oxide; j) etching away the remaining oxide; and k) anistropically etching the silicon wafer until said predetermined pattern has been formed through the thickness of the wafer. 4. A method of fabricating screen lens array plates from round, silicon wafers of about 0.5 mm thickness compris¬ ing the steps of: a) polishing both sides of a silicon wafer; b) oxidizing both sides of the silicon wafer to produce a high density, low porosity oxide coating having a thickness of about 2 μm; c) applying a thin, uniform layer of negative resist to both sides of the silicon wafer; d) exposing by electron beam lithographic tech¬ niques a predetermined pattern on both sides of the sili¬ con wafer; e) developing the resulting resist pattern; f) etching away the exposed oxide; g) removing the remaining photoresist; h) depositing boron for about 3 hours at about 1200°C. on each of the wafer/oxide surfaces; i) indiffusing the boron layer into both sides of the wafer to a depth of about 10 μm at: a concentration greater than about 7 X 10 19 atoms/cm3 in the areas not protected by the remaining oxide; j) etching away the remaining oxid ; and k) anisotropically etching the silicon wafer until said predetermined pattern has been formed through the thickness of the wafer. 5. A screen lens array comprising two plates made in • accordance with the method of fabrication recited in Claim 1 wherein each of said plates has a predetermined hole array pattern formed therein, said screen lens array being assembled by juxtapositioning said plates such that their respective hole arrays are mutually aligned and their respective outer surfaces are substantially parallel. 6, A screen lens array comprising two plates made in accordance with the method of fabrication recited in Claim 2 wherein each of said plates has a predetermined hole array pattern formed therein, said screen lens array being assembled by juxtapositioning said plates such that their respective hole arrays are mutually aligned and their respective outer surfaces are substantially parallel. 7. A screen lens array comprising two plates made in accordance with the method of fabrication recited in Claim 3 wherein each of said plates has a predetermined hole array pattern formed therein, said screen lens array being assembled by juxtapositioning said plates such that their respective hole arrays are mutually aligned and their respective outer surfaces are substantially parallel. 8. A screen lens array comprising two plates made in accordance with the method of fabrication recited in Claim 4 wherein each of said plates has a predetermined hole array pattern formed therein, said screen lens array being assembled by juxtapositioning said plates such that their respective hole- arrays are mutually aligned and their respective outer surfaces are substantially parallel. 9. A screen lens array comprising a single plate made in accordance with the method of fabrication recited in Claim 1. 1Q, A screen lens array comprising a single plate made in accordance with the method of fabrication recited in Claim 2. 11. A screen lens .array comprising a single plate made in accordance with the method of fabrication recited in Claim 3. 12. A screen lens array comprising a single plate made in accordance with the method of fabrication recited in Claim 4. cι ?ι

Inventors: CONE DONALD R, WESTERBERG EUGENE R
Applicants: VEECO INSTR INC, VEECO INSTRUMENTS INC
Application year: 1981
Main classification: H01J29
IPC codes: H01J9, H01J37, H01L21