GLASS PASSIVATION SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

Abstract: A semiconductor device having a glass passivation region (122) at a PN junction region in the semi-conductor substrate (124). A layer (136) for relaxing stress in the glass passivation region is formed on the surface of glass material in the glass passivation region. The stress relaxing layer is formed in such a way that it is tightly contacted with a stabilizing protection film (130) formed on the surface of semi-conductor substrate.

Description: Glass passivation semiconductor device and method of manufacturing the same The present invention relates to a high voltage withstanding glass passivation semiconductor device and a method of manufacturing the same. There are conventionally well known high voltage withstanding semiconductor devices of beveled structure and of guard ring structure. However, the semiconductor device of beveled structure is poor in damp-proofness because the film for protecting its junction surface is made of organic material such as silicone. In addition, it is liable to cause leakage current according to the high temperature bias test. It is therefore lack of reliability. On the other hand, the semiconductor device of guard ring structure is liable to deteriorate its characteristic because SiO2 film which is used as the protection film for stabilizing the surface of semiconductor elements is so thin as to cause electric field to have its effect even outside SiO2 film. A high voltage withstanding semiconductor device which uses glass material as the passivation film so as to eliminate above-mentioned drawbacks (hereinafter referred to as "glass passivation semiconductor device") has been put to practical use these days. An example of this device is disclosed in the Japanese Patent Publication (Kokoku) No. 42668/78. This glass passivation semiconductor device is usually manufactured by 1) chemically mesa-etching the junction formed in a semiconductor substrate or cutting the junction in parallel crosses by a diamond blade to form a recess, 2) filling glass material in the etched region or recess according to electrophoresis method, for example, and 3) sintering glass material filled. The glass passivation semiconductor device thus manufactured has higher reliability than conventional high voltage withstanding semiconductor devices as already mentioned above. In the case of this glass passivation semiconductor device, however, internal stress is generated in the semiconductor substrate causing the semiconductor substrate to be bent in concave because coefficient of thermal expansion of glass material filled in the recess or etched region is different from that of semiconductor substrate. The semiconductor substrate or wafer therefore breaks and cracks are caused in glass material in the subsequent photoetching process. In addition, glass or pellet cracks are easily caused even in the semiconductor device or pellet having no glass crack in the assembly after the dicing or scabing process. The semiconductor device having glass or pellet cracks is poor in dielectric strength. The yield of glass passivation semiconductor devices conventionally manufactured is low accordingly. The object of the present invention is to provide a glass passivation semiconductor device capable of preventing cracks from being caused in the glass passivation layer. This object of the present invention can be achieved by forming on the surface of glass material filled in the glass passivation region a layer for relaxing the stress in the glass passivation region, This stress relaxation layer is formed covering a surface stabilizing and protecting film formed on the surface of semiconductor substrate. The glass passivation semiconductor device thus manufactured causes almost no glass crack to thereby enhance the yield thereof. The glass passivation semiconductor device is therefore suitable for mass production. Other objects and advantages of the present invention will become apparent from the following detailed description when taken in conjunction with the accompanying drawings, in which: Fig. 1 is a sectional view showing the conventional glass passivation semiconductor device; Fig. 2 is a view showing the distribution of pellet cracking load W1 in the conventional glass passivation semiconductor device; Fig. 3 is a view showing the distribution of pellet cracking load W1 in a high voltage withstanding semiconductor device of beveled structure; Fig. 4 is a view showing the distribution of pellet cracking load W1 in the conventional glass passivation semiconductor device in which glass cracks are caused; ; Fig. 5 is a view showing the distribution of pellet cracking load W1 in the conventional glass passivation semiconductor device in which no glass cracks are caused; Fig. 6 is a sectional view showing the other conventional glass passivation semiconductor device; Fig. 7 is a graph showing the relation between the swell (d) of passivation glass and glass cracking load W2 in the conventional glass passivation semiconductor device; Fig. 8 is a sectional view showing a glass passivation semiconductor device according to the present invention; Fig. 9 is a graph showing the relation between the swell (d) of passivation glass and glass cracking load W2 in the glass passivation semiconductor device of the present invention; and Fig. 10 is a view showing the distribution of pellet cracking load W1 in the glass passivation semiconductor device of the present invention. There will be now described how glass or pellet cracks are caused in the conventional glass passivation semiconductor device before an embodiment of the present invention is described in detail. Fig. 1 shows a high voltage withstanding diode device 20 having glass passivation regions 22 and the diode device 20 will be hereinafter referred to as "a diode pellet". This diode pellet 20 comprises an N+ layer 24, an N layer 26 formed on the N+ layer 24, a P-type region 28 formed on the N layer 26, glass passivation regions 22 formed in recesses each having a depth which reaches the N+ layer 24, a protection film 30 made of SiO2 and formed on the P-type region 28 to stabilize the surface of semiconductor, an electrode 32 connected to the P-type region 28 and an electrode 34 connected to the N+ layer 24. Recesses are formed by the chemical etching process or a diamond blade. Glass passivation regions 22 are formed by filling glass material in recesses according to the electrophoresis method, for example, and sintering the field glass material at the temperature of about 7000C. The bending test was carried out using a plurality of diode pellets thus formed. Namely, leakage current in each of diode pellets was measured applying reverse bias to the PN junction of each of diode pellets and adding load to each of diode pellets. Load which eauses short-circuited current or leakage current to flow was regarded as pellet cracking load Wl, the short-circuited current being a current caused when the pellet itself cracks and the leakage current being larger current than initial leakage current generated when glass cracks are caused. Fig. 2 shows the result thus obtained. Fig. 3 also shows the result obtained by same measurements using pellets of beveled structure. As apparent from the comparison of Figs. 2 and 3, pellet cracking load Wl in the glass passivation semiconductor device is lower than that in the semiconductor device of beveled structure and dispersed in a wider range. Fig. 4 shows the result of bending test carried out using diode pellets in which glass cracks are already caused before the bending test, and Fig. 5 also shows the result of bending test carried out using diode pellets in which no glass crack is caused before the bending test. It was found from these results that diode pellets in which pellet cracking load W1 is low had glass cracks caused before the bending test. The reason why pellet cracking load W1 was dispersed in Fig. 5 will be now described. In order to examine whether the dispersion of pellet cracking load W1 is caused by the strength of glass itself or other matters, diode pellets were made using glass material of various glass strengths. The bending test was carried out using these diode pellets. Some little difference was found in the occurrence of glass cracks, but no large difference was found in pellet cracking load WI after glass cracks were caused. It was guessed from this result that pellet cracks were generated by some other cause, namely, the shape of pellet. As the result of bending test of pellets having various passivation glass swells from the surface of semiconductor substrate, it was recognized that the dispersion of pellet cracking load Wl depended upon the uneven shape of passivation glass. The following test was conducted to examine the relation between the uneven shape of passivation glass and the glass strength thereof. Diode pellets were made by variously changing voltage applied and the time period during which voltage was applied in the electrophoresis process to change the amount of glass filled and the swell (d) of passivation glass projected from the surface of semiconductor substrate. The bending test was then carried out adding load to these diode pellets. Fig. 7 is a graph showing the relation between the swell (d) of passivation glass and load W2 by which cracks are caused in passivation glass and which will be hereinafter referred to as "glass cracking load. The swell (d) is + (plus) when the surface of glass material is higher than the surface of semiconductor substrate and - (minus) when the former is lower than the latter. As apparent from Fig. 7, the strength of passivation glass is the largest when the surface of passivation glass is substantially same in level as the surface of semiconductor substrate. The dispersion range (about 60 kg) of glass cracking load W2 in Fig. 7 is subs can tially equal to that (about 60 kg) of pellet cracking load WI in Fig. 5. Further, pellet cracking load W1 becomes large as glass cracking load W2 becomes large. Because the pellet cracking load W1 is nearly equal to the sum of the glass cracking load W2 and a load for cracking the pellet in which the glass crack is caused, It was recognized according to another test that no crack was caused in passivation glass during the manufacturing processes when glass cracking load W2 was larger than 80 kg. Pellet cracking load W1 of diode pellets having glass cracking load W2 larger than 80 kg was in the range of 150 - 190 kg in the bending test. When glass cracking load W2 was set larger th#an 8Q kg like this, it could be recognized that the dispersion range of pellet cracking load W1 become small and that pellet cracking load WI become large. As apparent from Fig. 7, it is needed that the swell (d) of passivation glass is in the range of about +7 pm for the purpose of making glass cracking load W2 larger than 80 kg. The distribution range of glass swell (d) formed by the glass filling and sintering process is usually +5 - 6 pm under same manufacturing condition but practically becomes larger since the center in the distribution range of glass swell (d) is shifted. It is therefore extremely difficult to keep the swell (d) of passivation glass in the range of t7 um, thus reducing the yield of diode pellets. It is needed, according to the conducted tests, that the strength of passivation glass is increased so as to enhance the strength of glass passivation semiconductor device. The strength of passivation glass depends upon the swell (d) of passivation glass. This means that internal stress present in passivation glass changes corresponding to the change of swell (d). This was the reason why the inventor of the present invention formed a stress relaxing layer on passivation glass to relax internal stress in passivation glass and to prevent cracks from being caused in passivation glass. It is needed that this layer functioning as a stress relaxing layer has an elastic modulus larger than that of passivation glass and can tightly contact relative to both passivation glass and protection film for stabilizing the surface of semiconductor substrate. From this viewpoint, silicon oxide (six2), boronsilicate glass (BSG) and phospho-silicate glass (pug) were vapor-deposited respectively at low temperature on SiO2 protection film and passivation glass according to CVD method. Phospho-silicate glass showed a remarkable stress relaxing effect. It was also found that the stress relaxing effect became higher as phosphosilicate glass had higher phosphorus concentration and that phospho-silicate glass was needed to have a layer thickness larger than 1 vm. It is needed that phosphosilicate glass tightly contacts with SiO2 protection film at the end portion thereof. An example of glass passivation semiconductor device according to the present invention will be now described referring to Fig. 8. Fig. 8 is a sectional view showing a diode pellet 120. An N layer 126 is formed on an N+-type semiconductor substrate 124. A P-type region 128 is formed thermally diffusing P-type impurity in the N layer 126. A surface stabilizing protection film 130 consisting of SiO2, for example, is then formed on the P-type region 128. Recesses each passing through the protection film 130, P-type region 128 and N layer 126 and reaching the N+-type semiconductor substrate 124 are formed by chemical etching or diamond blade. Passivation glass material is filled in recesses according to electrophoresis method. Glass material filled is sintered at temperature of 6000C - 7000C to form glass passivation regions 122. Phospho-silicate glass is deposited on glass passivation regions 122 according to CVD method to form a stress relaxing layer 136. It is necessary that this chemical vapor deposition is carried out in an atmosphere lower than the sintering temperature of passivation glass, because passivation glass is so softened as to flow out of recesses or to have chemical change in an atmosphere higher than about 7000cm The stress relaxing layer 136 must have a thickness at least larger than 1 um. When the thickness of layer 136 is smaller than 1 um, the stress relaying effect of passivation glass is negligible. In addition, it is preferable that the stress relaxing layer 136 is tightly contacted with SiO2 protection film 130 with a width r at least larger than 30 pm so as to enhance the contact strength between the stress relaxing layer 136 and SiO2 protection film 130. SiO2 film 130 is then selectively etched to form an opening in which an electrode 132 connected to P-type region 128 is formed-. Another electrode 134 is also formed on the back face of N+-type semiconductor substrate 124. The stress relaxing layer 136 thus formed at a relatively low temperature is porous and it is guessed that the stress relaxing layer 136 is effective because it is porous. The effect of glass passivation semiconductor device according to the present invention will be now described. Passivation glass regions 122 each having a swell (d) different from those of other passivation glass regions are formed and the stress relaxing layer 136 is formed on passivation glass regions to have a thickness (d) of 1 vm and a width (r) of 30 pm. The bending test was carried out using diode pellets thus formed. Fig. 9 shows the relation between the swell (d) at the passivation glass 522 and glass cracking load W2. According to the result shown in Fig. 9, the swell (d) of passivation glass may be made -10 um - +15 um in order to manufacture a diode pellet whose glass cracking load W2 is larger than 80 kg. As long as the swell (d) is in this range, the glass passivation semiconductor device can be manufactured according to the conventional glass filling technique. Fig. 10 shows the distribution of pellet cracking load W1 in the case of diode pellets formed according to the present invention. As apparent from Fig. 10, pellet cracking load is in the range of 160 - 195 kg. Diode pellets formed according to the present invention have a higher pellet strength as compared with that of conventional ones, and the dispersion of strength is small in diode pellets of the present invention. The ratio of occurrence of pellet or glass crack in pellet manufacturing and assembling processes was reduced to lower than 1 - 2%. The conventional ratio thereof was in the range of 50 - 60%. The embodiment as described above is similar to the conventional mesa-type semiconductor device in which recesses to fill passivation glass therein are deepened. However, the present invention is not limited to the embodiment but applicable to the planer-type glass passivation semiconductor device, whose recesses are shallow, so as to achieve same effect. Therefore, the present invention is suitable for all of glass passivation semiconductor devices. As described above, the present invention enables pellet strength to be made higher as compared with that of conventional glass passivation semiconductor devices and pellet strength obtained by the present invention becomes substantially equal to that of a high voltage withstanding semiconductor device of beveled structure in which no glass material is employed. Therefore, the. present invention can prevent the yield from being reduced due to the occurrence of glass crack and prOvide a glass passivation semiconductor device suitable for mass production.

Claims: Claims: 1. A glass passivation semiconductor device comprising a PN junction region formed by first and second semiconductor regions (126, 128), glass passivation region (122) formed in said PN junction region, and a surface stabilizing protection film (130) for covering at least one of said first and second semiconductor regions, characterized in that a stress relaxing layer (136) is formed on said glass passivation region (122) and tightly contacted with said protection film so as to relax stress in said glass passivation region. 2. A glass passivation semiconductor device according to claim 1, characterized in that said stress relaxing layer consists of phospho-silicate glass. 3. A glass passivation semiconductor device according to claim 1 or 2, characterized in that said stress relaxing layer has a thickness larger than 1 ijm and a width (r) larger than 30 pm when measured from the outer circumference of said glass passivation region, 4. A method of manufacturing a glass passivation semiconductor device comprising the steps of forming a PN junction region in such a way that a first semiconductor region of first conductivity type is contacted with a second semiconductor region of second conductivity type, forming a surface stabilizing protection film which covers at least one of said first and second semiconductor regions, forming recess which passes through said PN junction region, and filling and sintering glass material in said recess to form glass passivation region, characterized in that a stress relaxing layer (136) is formed on said glass passivation region in such a way that said stress relaxing film is tightly contacted with said protection film. 5. A method of manufacturing a glass passivation semiconductor device according to claim 4, characterized in that said stress relaxing layer is chemically vapor-deposited in an atmosphere lower than 7000C.

Inventors: HIDESHIMA, MAKOTO, MIYAGAWA, MASAFUMI, SHIMBO, MASARU, TANI, KEIZO
Applicants: KABUSHIKI KAISHA TOSHIBA
Application year: 1981
Main classification: H01L21
IPC codes: H01L29, H01L21, H01L23