# Patent

## Title
E-beam inspection apparatus and method of using the same on various integrated circuit chips

## Abstract

The present invention discloses an e-beam inspection tool, and an apparatus for detecting defects. In one aspect is described an apparatus for detecting defects that includes a dual-deflection system that moves the e-beam over the integrated circuit to each of the plurality of predetermined locations, the dual deflection system including a magnetic deflection component that provides by magnetic deflection for movement of the e-beam through a plurality of areas on the integrated circuit and an electrostatic deflection component that provides by electrostatic deflection for movement of the e-beam within each of the plurality of areas.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
This application claims priority to U.S. Provisional Patent Application Ser. No. 62/222,650 filed Sep. 23, 2015, and is a continuation-in-part of U.S. patent application Ser. No. 14/612,841 filed Feb. 3, 2015, which claims priority to Provisional U.S. Patent Applications: Ser. No. 61/942,163 filed Feb. 20, 2014; Ser. No. 61/971,306 filed Mar. 27, 2014; Ser. No. 61/972,787 filed Mar. 31, 2014; Ser. No. 61/982,652 filed Apr. 22, 2014; Ser. No. 62/011,161 filed Jun. 12, 2014; and which '841 application is a continuation of U.S. patent application Ser. No. 14/303,578 filed Jun. 12, 2014, which is a continuation-in-part of U.S. patent application Ser. No. 14/190,040, filed Feb. 25, 2014, which is a continuation-in-part of U.S. patent application Ser. No. 14/038,799, filed Sep. 27, 2013. All applications are incorporated by reference herein.


FIELD OF THE INVENTION
This invention relates to the field of semiconductor integrated circuits and to methods for manufacturing and testing such circuits.
BACKGROUND OF THE INVENTION
A “charged particle column” is used to direct a beam of finely focused charged particles on any sample surface. Such columns are used in tools to irradiate various types of specimen for the purposes of a variety of applications. The following examples relate to columns built for “electrons” but similarly apply to other “columns” that are used to irradiate charged atoms also knows as “ions”.
Scanning electron microscopes (“SEM”) are used gather images of specimens at high magnifications. The beam rasters across a certain area and captures an image. A specific type of SEM, known as a high resolution scanning electron microscopes gather images at very high resolution and low beam current and used to measure dimensions of features on the image, whereas a review scanning electron microscope is used to obtain images at specific locations on the surface of semiconductor wafer used for fabricating integrated circuits already identified by another tool as defects/local abnormalities for the purposes of taking high-resolution images of the defects.
Another type of charged particle tool, known as an e-beam defect inspection tool, is used for localizing “defects” i.e. local abnormalities on the surface of semiconductor wafer used for fabricating integrated circuits.
Another type of charged particle tool, known as an e-beam writer, makes specific patterns on a photoresist layer that has been coated on a semiconductor wafer or a photolithography mask for the purpose patterning these shapes onto an underlying later. A mask writer operates by illuminating a 1st (square) shaping aperture and forming a 1st shape, then deflecting the 1st shape across a 2nd (square) shaping aperture to form a variable rectangular shape.
Still another type of charged particle tool, known as an e-beam spectroscopy tool, uses a focused electrical beam to study local properties on sample surface by exciting the sample surface and generating secondary particles whose characteristics are measured in some way e.g. electrons in Auger spectroscopy or Xrays-photons in Energy Dispersive Spectroscopy, etc.
Since the embodiments described herein are for a defect inspection tool, a further background of conventional defect inspection tools is provided. E-beam defect inspection tools are used in two modes. In a first mode, physical defect inspection, the electron beam gathers images of large enough areas to be able to capture a physical defect or abnormality of interest i.e. the defect physically appears in the area being imaged and is visible in the image created in the detector. Note that the defect need not be “clearly” visible for the inspection tool to operate. It must only generate a signal strong enough to suggest that a defect exists. Once the inspector has localized the defect it is typically used to gather higher resolution images in a Review SEM, as mentioned above. In a second mode, voltage contrast inspection, changes in potential at the wafer surface are detected. The change in wafer potential may happen as a result of a “physical defect” such as a particle or a purely electrical defect such as a dislocation in a crystal causing higher electrical leakage. In either case the e-beam defect inspection tool is sensing the voltage change at specific location on the semiconductor wafer as the proxy for the defect itself. The voltage change resulting from the defect typically requires some type of a excitation of the circuit underneath. This can happen as a result of the e-beam that is being used to sense the voltage contrast itself (also known as passive voltage contrast) or application of a separate electrical bias on the semiconductor wafer (also known as active voltage contrast).
One example of a conventional active voltage contrast e-beam inspection tool is provided by U.S. Pat. No. 7,679,083 B2 (“Semiconductor integrated test structures for electron beam inspection of semiconductor wafers”) to S. Jansen, et al. The '083 patent describes conventional electron beam inspection, using an electron beam that irradiates the target region, thus causing the emission of secondary electrons and a secondary electron detector measures the intensity of the secondary electron emission along the scan path of the electron beam. As a region is scanned, electrons from the electron beam induce surface voltages that vary over the scanned region due to differential charge accumulation of the irradiated features. Voltage contrast inspection operates on the principle that differences in the induced surface voltages over a scanned region will cause differences in secondary electron emission intensities.
As taught, in general, for a given feature, the intensity of secondary electron emission will vary depending on, e.g., the landing energy of the beam electrons (primary electrons) and material composition of the feature. For a given material, a secondary electron yield is a measure of a ratio of secondary electron emission to impinging primary electrons as a function of landing energy (eV). Different materials irradiated by an electron beams tuned to a specific landing energy will emit different intensities of secondary electrons. The different features within the scanned target region will be displayed in an SEM image with different grayscale shades depending on the intensity of secondary electron emission. The irradiated features having a higher intensity of secondary electron emission may be displayed brighter in an SEM image than those irradiated features having a lower intensity of secondary electron emission.
E-beam inspection tools operate by taking “images” of the semiconductor wafer at high enough resolution. The images are 20 gathered in the areas where the defect must be localized (also known as a “care area”) one of two ways. This is also illustrated in FIG. 1. Each point of the 20 image is referred to as a pixel.
1. “Step and scan”: The wafer is held stationary to capture an image of the wafer at one location. The process is repeated until the whole care area is covered.
2. “Swathing”. The wafer is moving when the image is being captured so that a whole strip of 2-D image is created also known as a swath. The process is repeated with multiple swaths until the whole care area has been covered
One common theme in both the above methods is that the care areas are sampled as full 20 images. The dwell time at each pixel is held constant at each pixel when gathering the image. Once an e-beam inspection tool has gathered an image of the care areas, it must find the defect. This is conventionally done is one of the following ways:
Array mode detection: Here the image is gathered in an area which has a repeating pattern such as a SRAM memory block. With the image, images of the neighboring memory blocks are compared and differences are flagged as a defect.
Random mode detection: Here images that have been gathered from identical dies of the wafer are compared to each other and differences are flagged as a defect. Note that the dies do need a repeating pattern inside as is required for array more inspection.
Die-to data base inspection: Here the images gathered are compared to a preexisting image saved on the computer and differences are flagged as a defect. The preexisting image may be created artificially from simulation of the inspected areas or from an image of a “golden die” that has been measured prior.
While a conventional e-beam inspection tool produces useful results, they are still less than ideal.
SUMMARY OF THE INVENTION
The present invention discloses several techniques for improving e-beam inspection and improving a scanning electron microscope.
An aspect of this invention relates to the use of a tool using a charged particle column (electrons or ions), whose primary function is to find defects on the surface of semiconductor wafers (i.e., function as an inspector). (While the present description uses the term “e-beam,” or “beam” or “beam of electrons” it is understood that it applies to all charged beams, both electrons or ions, with electron being used herein to refer to both.) In one aspect, there is disclosed an apparatus for detecting defects in an integrated circuit, wherein the integrated circuit includes a plurality of predetermined locations and the apparatus comprising:
a target holder for holding said integrated circuit; an e-beam source that directs an e-beam toward each of the plurality of predetermined locations on the integrated circuit;
a focusing column that accelerates the e-beam of electrons and separately, for each of the plurality of predetermined locations, focuses the e-beam to the plurality of predetermined locations, the focusing column including a condensor lens, an objective lens and a Wehnelt;
a dual-deflection system that moves the e-beam over the integrated circuit to each of the plurality of predetermined locations, the dual deflection system including:

    
    
        a magnetic deflection component that provides by magnetic deflection for movement of the e-beam through a plurality of areas on the integrated circuit and placement of the e-beam at each of the plurality of areas, wherein each of the plurality of areas corresponds to a coarse field of view associated with the magnetic deflection component in a stationery state; and
        an electrostatic deflection component that provides by electrostatic deflection for movement of the e-beam within each of the plurality of areas and placement of the e-beam at each of particular ones of the plurality of predetermined locations located within a current one of the plurality of areas,
    
    


a negative bias circuit that provides a negative bias between the objective lens and the target holder, the negative bias serving to (1) decelerate the e-beam so that the e-beam strikes the integrated circuit with a landing energy having a predetermined range, and (2) accelerate secondary electrons emitted from the integrated circuit; and
a detector that detects a voltage contrast image of the secondary electrons emitted from the integrated circuit after the e-beam strikes each of the plurality of predetermined locations of the integrated circuit.
In accordance with one aspect of the invention, a computer receives each of the voltage contrast images and determines whether defects exist within the integrated circuit based upon the voltage contrast images.
In a preferred embodiment, the detector is disposed within the focusing column, and containing an opening through which the e-beam from the electron source passes therethrough, wherein a signal to noise ratio of the voltage contrast image is increased due in part to the detector being disposed within the focusing column; and the opening is a hole of about 0.5 mm diameter or less in one particular aspect.
In one embodiment,



BRIEF DESCRIPTION OF THE DRAWINGS
These, as well as other, aspects, features and advantages of the present invention are exemplified in the following set of drawings, in which:
FIG. 1 conceptually depicts an illustrative section of a standard cell layout that includes logic cells (L), filler cells (F), and tap cells (T) arranged in rows, with routing areas between the rows, and nearby decap cells (dC);
FIG. 2 depicts the same layout as FIG. 1, but with dummy fill areas indicated in a first layer;
FIG. 3 depicts the same layout as FIGS. 1-2, but with dummy fill area(s) indicated in a second layer;
FIG. 4 depicts an exemplary layout in accordance with the invention, in which the filler cells, tap cells, decap cells, and dummy fill regions of the FIG. 3 layout are replaced by self-contained test structures;
FIG. 5 conceptually depicts a preferred form of standard cell layout (for use in accordance with the invention);
FIG. 6 depicts an exemplary layout in accordance with the invention, in which the filler cells, decap cells, tap cells, and dummy fill regions of the FIG. 5 layout are replaced by self-contained test structures;
FIG. 7 depicts an exemplary process flow for opportunistic test structure insertion in accordance with certain embodiments of the invention;
FIG. 8 depicts an exemplary process flow for utilizing the opportunistically inserted test structures (as per FIG. 7 or 10) to generate useful results;
FIG. 9 conceptually depicts a portion of an exemplary wafer or die, showing the opportunistically inserted test pads and/or structures arranged to produce empty track(s) and/or skip zone(s) that enable faster e-beam scanning;
FIG. 10 depicts an alternative exemplary process flow for opportunistic test structure insertion in accordance with certain embodiments of the invention;
FIG. 11 depicts the prior-art “step and scan” and “swathing” techniques;
FIG. 12 depicts a beam scanning/shaping apparatus according to various embodiments of the invention;
FIG. 13 shows examples of the beam shapes that can be realized using the column of FIG. 12;
FIG. 14 depicts an exemplary semiconductor wafer that is typically circular and broken up into identical dies, and further depicts an example case where all of the test structures are located in the scribe areas of the die;
FIG. 15 illustrates a series of test structures laid out with their pads in a column, where a spot of the electron beam scans over the pads by the relative motion of the wafer to the spot;
FIG. 16 shows an illustration of an electron spot shaped in a non-circular manner to match the size and shape of the pad, so as to maximize the electron current that is delivered to the pad;
FIG. 17 shows an illustration of pad shapes being sized according to the amount of charge that needs to be delivered to the test structures, wherein test structures needing more charge have longer pads along the scanning direction of the beam to increase the beam dwell time on the pad;
FIG. 18 depicts a scenario in which the beam moves fast if there is a long stretch with no pads to charge, but with constant velocity and slower in populated regions to allow more charging of the pads of the test structures;
FIG. 19 shows test structures laid out on either sides of the pads, which allows a larger number of test structures to be scanned with a single pass of the beam on the wafer;
FIG. 20 shows how solid pads may be split into finer lines or alternate shapes so that their layout will be compatible with the design rules of the semiconductor process;
FIG. 21 depicts “net grey” pads for use with certain embodiments of the invention;
FIG. 22 conceptually illustrates one embodiment of a VC DUT in accordance with certain aspects/embodiments of the invention;
FIG. 23 conceptually illustrates another embodiment of a VC DUT in accordance with certain aspects/embodiments of the invention; and,
FIG. 24 conceptually illustrates another embodiment of a VC DUT in accordance with certain aspects/embodiments of the invention.



DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS
FIG. 1 conceptually depicts an illustrative section of a prior-art standard cell layout that includes logic cells (L), tap cells (T) and filler cells (F) arranged in rows, with routing channels between the rows, and nearby decap cells (dC). As depicted, the overall distribution of decap, tap and filler cells within this illustrative section is irregular and does not follow any obvious pattern or symmetry. (Persons skilled in the art will immediately recognize that the depictions herein are conceptual, and only intended to illustrate the principles of the invention, rather than represent actual layout realities. Indeed, such skilled artisans will appreciate that tap cells typically come in only one size and appear at regular or nearly regular intervals. Similarly, such skilled artisans will also recognize that decap cells can, and frequently are, sized to fit within and placed within the standard cell rows.)
FIG. 2 conceptually depicts the same prior-art layout as FIG. 1, but with dummy fill areas indicated in a first layer. These dummy fill areas are shown as diagonally hashed areas, and, as depicted, may be regularly (e.g., rectangular) or irregularly shaped. Dummy fill areas most useful in accordance with the invention typically appear on the third and above metal layers (e.g., M3, M4, M5, M6), but may also appear on lower metal and/or previous layers such as active, poly layer(s), or local interconnect. (As persons skilled in the art will appreciate, the depiction of dummy fill in FIG. 2 is conceptual, since dummy fill areas would typically be much larger in area than one or a few standard cells.)
FIG. 3 conceptually depicts the same layout as FIGS. 1-2, but with dummy fill area(s) indicated in a second layer. This second-layer dummy fill area is shown in the scale pattern hashing.
FIG. 4 conceptually depicts an exemplary layout, based on that of FIG. 3, that illustrates certain aspects of the present invention. As exemplified in FIG. 4, filler cells (F) and tap cells (T) have been replaced by test structures (TS4, TS5, TS6, TS7, TS8, TS9, TS10), decap cells (dC) have been replaced by test-enabled decap cells (dC-T), and dummy fill regions have been replaced by test structures (TS1, TS2, TS3).
FIG. 5 conceptually depicts a preferred form of standard cell layout, suitable for use in accordance with the invention. This figure depicts the more modern style, in which cell rows are abutting and routing areas are over-the-cells. Though not depicted, it should be understood that routing areas need not be regularly shaped, nor need they be oriented in a direction parallel to the rows.
FIG. 6 depicts an exemplary layout in accordance with the invention, in which the filler cells (F), tap cells (T), decap cells (dC), and dummy fill (diagonally hashed) regions of the FIG. 5 layout are replaced by self-contained test structures (TS, dC-T, and dotted region, respectively).
As persons skilled in the art will recognize, numerous options exist for the selection of particular test structures to be opportunistically instantiated in accordance with the present invention.
Product ICs in accordance with the invention may include test structures adapted for in-line systematic defect inspection, by bright field and/or e-beam (or other charging), of product layout patterns most susceptible to systematic defects, including multi-patterning structures. Such test structures preferably include canary structures (i.e., sub-design rule structures used to explore process-layout marginalities).
Product ICs in accordance with the invention may also include test structures adapted for in-line random defect inspection, by bright field and e-beam tools, of product-like patterns for the most likely defects, such as single line opens and most likely via open locations (including canary structures).
Product ICs in accordance with the invention may also include test structures adapted for in-line metrology, such as structures to extract overlay/misalignment, product-specific patterns for poly CD, MOL CD, via bottom CD, metal CD and height, dielectric heights, etc., and may be testable electrically and/or by Scanning Electron Microscope (e.g., for overlay, line CD and profile).
Product ICs in accordance with the invention may also include Physical Failure Analysis (PFA) structures for likely systematic defects, where such PFAs may include product specific layout patterns (including canary structures) and pads for probing.
And product ICs in accordance with the invention may also include any combination of the above-noted, or other, usable test structures.
For test-enabled decap cells, the preferred test structures are M1 structures for Single Line Open inspection.
Important goals for the design of test structures in accordance with certain embodiments of the invention are that: (1) test structures should not affect printability of the active geometry (i.e., standard cells or interconnect), and/or (2) test structures should be representative of the active cell properties (printability and electrical characteristics).
FIG. 11 depicts the prior-art “step and scan” and “swathing” techniques.
FIG. 12 depicts a beam scanning/shaping apparatus according to the invention. With respect to this inspection column of the inspection system, the following aspects are noted, with specific reference to a mask writer, described in the background, which is used for reference purposes only.
The electron source is represented in FIG. 12 as electron emitter. The electron source is preferably held at a high and negative potential referred to as the Beam bias, such as, for example −2 Kev to −100 KeV.
The Substrate is where the final accelerated electrons strike. In FIG. 12, it is marked as a Wafer.
The focusing column is the part of the column that accelerates the electrons from the Electron Source and, along with the deflection components described hereinafter, focuses the beam of electrons to a narrow spot on the Substrate. It starts with the Condensor Lens, passes through an objective lens, and ends with a Wehnelt, with the deflection components therebetween as well.
With respect to this focusing, it is noted that the deflection components provide for dual-deflection, which includes in a preferred embodiment a magnetic deflection component, as well as an electrostatic deflection component. The magnetic deflection is done for placement of the e-beam within a plurality of different areas of the integrated circuit, such that when the e-beam is stationery and not being further deflected by the magnetic deflection component, the field of the view of the e-beam is relatively coarse—on the order of 1800 microns. The electrostatic deflection then allows for further quick movement of the beam of electrons within each of the different areas while the magnetic deflection component is stationery and not deflecting the e-beam. This allows for the further deflection of the beam of electrons to different ones of the predetermined test pad locations where the beam of electrons then performs a defect test. The electrostatic deflection thus allows for movement of the beam of electrons to various predetermined test pad locations within a particular area of the integrated circuit very quickly. This can occur since the magnetic beam (B) shaping is made so that the beam of electrons has a very large FOV (on the order of 1800 micron), and the electrostatic beam (E) shaping is made so that the e-beam of electrons has a smaller FOV (being on the order of 50 microns). It is noted that while these particular fields of view are discussed above for one particularized embodiment, that the magnetic deflection component has a field of view of between 1,500-2,500 microns and the electrostatic deflection component has a field of view of between 50 and 500 microns. In another embodiment, two different electrostatic deflection components can be included, rather than magnetic deflection component and electrostatic deflection component as described in the preferred embodiment above and which is is advantageous.
Using the dual deflection system, as described, and with the stage stationery, allows scanning of sparse and not continuous test pad locations on an integrated circuit—essentially allowing the beam of electrons to jump to each predetermined test pad location in a known sequence, and for the period of time that the e-beam is then in a resting position on a particular test pad, as described herein, measurements are obtained from the detector, which measurements are then processed in substantially real-time by firmware—typically in the form on an FPGA—that is part of the hardware of the overall system. Accordingly, on the order of 200,000 DUTS/sq-mm can be scanned relatively quickly—on the order of 30 minutes to 2 hours depending on the type of DUTS embedded in the wafer.
This deflection of the beam of electrons in this manner, in addition to the shaping of the beam of electrons to match the top surface area of the test-pad, allows the collection of more electrons (for better signal to noise ratio) as well as fast movement from location to location.
The section of the focusing column from the Condensor lens to the Objective lens is grounded in either case. Since the electrons are being accelerated from a negatively biased Electron Source they have high Kinetic energy in this section of the column.
In this described inspection column, the substrate is not grounded but instead biased negatively as to control the landing energy of the electrons. The landing energy of the electrons in this inspection column is much less (typically 300 eV to 1200 eV). The landing energy small is made small since a higher landing energy will significantly reduce the emission of secondary electrons from the substrate where secondary electrons are the prime mode of imaging in these columns and imaging is the key task of this inspection column. As an example, if the landing energy is to be 1000V in a column where the beam bias is −6 KeV, the substrate would be biased at −5 KeV.
The Wehnelt in the Inspection column is biased at some potential with respect to the substrate. Typical values are −3000V to +3000V. It is present to act on the secondary electrons emanating from the substrate. If it biased negatively with respect to the substrate, it will repel the secondary electrons generated from the substrate and if it is biased positive with respect to the substrate it will attract the secondary electrons generated from the substrate.
Note that in the Inspection column, biasing the substrate negatively decelerates the electrons after it comes out of the objective lens but before hitting the substrate. Also, the potential biasings of Wehnelt and the substrate together constitute an integrated electrostatic lens sometimes referred to as an Immersion Lens.
While the negative biasing Substrate in the inspection column with respect to the objective lens acts to decelerate the incoming electrons (travelling top to bottom in these figures), the negative biasing also acts to attract and accelerate the secondary electrons (which are travelling bottom to top in these figures) that make it past the Wehnelt.
For imaging with the incoming secondary electrons in any column a detector is used to convert this secondary electrons into a current signal. The Inspection column figure shows two different ways of doing this. The electrons can be deflected on to the side using additional E and B fields that accelerate it to the side of the column onto a detector. Alternatively, if the electrostatic biasing is in the column is proper and the secondary electrons experience a strong upward acceleration, the electrons can be made to strike a detector that is axial in the column without any additional fields being necessary. This detector has a tiny aperture (preferably less than 0.5 mm) in it to allow the incoming electrons to pass through. Due to the necessity of being a compact detector placed in a column this is typically a solid state detector. Hence, depending on the potential biases an inspection type column can use both an axial or off-axis detector. However, an on-axis detector can allow the column to be made more compact which is beneficial to getting a small spot size on the substrate.
Another advantage to using the dual-deflection e-beam described is that at the initial placement of the beam of electrons on the wafer, a very small FOV high resolution spot size can be used to obtain a very precise image of a particular location on the integrated circuit can be obtained—normally using primarily the electrostatic deflection, after initial placement of the integrated circuit using the stage. This allows for a precise initial location of the beam of electrons relative to the wafer, thereby allowing correct placement of the e-beam of electroncs over the various pads that are part of the DUTs in predetermined locations on the chip as discussed above. Once the location is determined, then the e-beam can be quickly changed to the high magnetic deflection field of view mode, as described above, to place the beam of electrons in a particular area.
That the spot size of the beam of electrons can be changed so quickly in these different modes based upon the different deflection mechanisms allows one to go back and forth very quickly between modes of operation—obtaining initial locations, placement at different areas, and then traversing predetermined DUT locations within a particular area, allows for advantageous operation.
Another aspect is that the detected signal is not an image during normal operation (other than location determination as described in the above paragraph), as is conventional, but is a transient signal corresponding to a test pad location associated with a DUT, which can be collected, over time. Thus, rather than a conventional inspection tool that obtains an image, the system will collect a time-varying signal, based upon the beam being located over a particular test pad of a particular DUT. Then, defects can be determined, in firmware, such as in the FPGA mentioned above, based upon comparison of different varying signals in time, or as compared to other signals of other similar locations over the same period of time. A further variant of this approach is using different beam strengths over that same particular test pad of the particular DUT.
FIG. 13 shows examples of the beam shapes that can be realized using the column of FIG. 12.
FIG. 14 depicts an exemplary semiconductor wafer that is typically circular and broken up into identical dies, and further depicts an example case where all of the test structures are located in the scribe areas of the die.
FIG. 15 illustrates a series of test structures laid out with their pads in a column, where a spot of the electron beam scans over the pads by the relative motion of the wafer to the spot.
FIG. 16 shows an illustration of an electron spot shaped in a non-circular manner to match the size and shape of the pad, so as to maximize the electron current that is delivered to the pad.
FIG. 17 shows another illustration of pad shapes being sized according to the amount of charge that needs to be delivered to the test structures, wherein test structures needing more charge have longer pads along the scanning direction of the beam to increase the beam dwell time on the pad.
FIG. 18 depicts a scenario in which the beam moves fast if there is a long stretch with no pads to charge, but with constant velocity and slower in populated regions to allow more charging of the pads of the test structures.
FIG. 19 shows test structures laid out on either sides of the pads, which allows a larger number of test structures to be scanned with a single pass of the beam on the wafer.
FIG. 20 shows how solid pads may be split into finer lines or alternate shapes so that their layout will be compatible with the design rules of the semiconductor process. Reference is now made to FIG. 21, which depicts a VC DUT with size and shape to accommodate non-circular incident e-beams for readout in a single spot measurement, with a pad group designed with only alternating lines connected the DUT, and the remaining lines of pad connected to floating or ground such that their polarity is opposite to that of the functioning DUT.
For a functioning DUT, the pad lines will appear as alternating bright/dark, whereas for a non-functioning DUT (i.e. one that has failed), pads are all bright or all dark. The advantage here is that the “net” gray level for all non-defective DUTs is effectively always the same, and the image computer can use the same thresholds for the detection of all defective DUTs. This simplifies the software algorithm and the hardware of the image computer.
Reference is now made to FIG. 22, which conceptually illustrates one embodiment of a VC DUT in accordance with certain aspects of the invention. Pads are read off by using a large spot size e-beam tool, either by a single pixel measurement (i.e., single analog readout) or N analog values at same location (i.e., N-sample digital-averaging could be used to improve SNR).
The beam and pad are designed to have more or less the same footprint. In this case, the X/Y aspect ratio  ̃1. Beam is square shaped to match the pad, but could also be circular with similar size. Pictograph shows four pads, but the invention applies to one or multiple pads equivalently.
Reference is now made to FIG. 23, which conceptually illustrates another embodiment of a VC DUT in accordance with certain aspects of the invention. Pads are read off by using a large spot size e-beam tool, either by a single pixel measurement (i.e., single analog readout) or N analog values at same location (i.e., N-sample digital-averaging could be used to improve SNR). Overall, pad and beam have similar footprint on wafer. However, to accommodate a non-symmetric beam (X/Y aspect ratio >3) while meeting semiconductor layout design rules, the pad is split into array of narrow horizontal lines. Pictograph shows one pad, but the invention applies to one or multiple pads equivalently.
Reference is now made to FIG. 24, which conceptually illustrates another embodiment of a VC DUT in accordance with certain aspects of the invention. Pads are optimized for line-shaped beam. X/Y Aspect ratio of pads and beam is greater than 3. Pads are read off like a bar-code scanner, with the polarity of each pad being read off in fewer than 10 pixels. Pictograph shows four pads, but the invention applies to one or multiple pads equivalently.
Although the present invention has been particularly described with reference to embodiments thereof, it should be readily apparent to those of ordinary skill in the art that various changes, modifications and substitutes are intended within the form and details thereof, without departing from the spirit and scope of the invention. Accordingly, it will be appreciated that in numerous instances some features of the invention will be employed without a corresponding use of other features. Further, those skilled in the art will understand that variations can be made in the number and arrangement of components illustrated in the above figures.

## Claims

1. An apparatus for detecting defects in an integrated circuit, wherein the integrated circuit includes a plurality of predetermined locations and the apparatus comprising:
a target holder for holding said integrated circuit; an e-beam source that directs an e-beam toward each of the plurality of predetermined locations on the integrated circuit;
a focusing column that accelerates the e-beam of electrons and separately, for each of the plurality of predetermined locations, focuses the e-beam to the plurality of predetermined locations, the focusing column including a condensor lens, an objective lens and a Wehnelt;
a dual-deflection system that moves the e-beam over the integrated circuit to each of the plurality of predetermined locations, the dual deflection system including:
a magnetic deflection component that provides by magnetic deflection for movement of the e-beam through a plurality of areas on the integrated circuit and placement of the e-beam at each of the plurality of areas, wherein each of the plurality of areas corresponds to a coarse field of view associated with the magnetic deflection component in a stationery state; and
an electrostatic deflection component that provides by electrostatic deflection for movement of the e-beam within each of the plurality of areas and placement of the e-beam at each of particular ones of the plurality of predetermined locations located within a current one of the plurality of areas,

a negative bias circuit that provides a negative bias between the objective lens and the target holder, the negative bias serving to (1) decelerate the e-beam so that the e-beam strikes the integrated circuit with a landing energy having a predetermined range, and (2) accelerate secondary electrons emitted from the integrated circuit; and
a detector that detects a voltage contrast image of the secondary electrons emitted from the integrated circuit after the e-beam strikes each of the plurality of predetermined locations of the integrated circuit.

2. The apparatus according to claim 1 wherein the dual deflection system further functions to obtain an initial location of the integrated circuit, based upon a small spot size e-beam, relative to the spot-size obtained by the magnetic deflection component.

3. The apparatus according to claim 1 wherein the dual deflection system switches between moving the e-beam using the magnetic deflection component and the electrostatic deflection component.

4. The apparatus according to claim 3 wherein the magnetic deflection component has a field of view of between 1,500-2,500 microns and the electrostatic deflection component has a field of view of between 50 and 500 microns.

5. The apparatus according to claim 4, wherein the e-beam electron source is held at a high and negative potential in the range of −2 KeV to −100 KeV.

6. The apparatus according to claim 4 wherein the landing energy is between 500-3000V.

7. The apparatus according to claim 3 wherein the detector is disposed within the focusing column and includes an opening that allows the e-beam to pass therethrough.

8. The apparatus according to claim 3 wherein the magnetic deflection component and the electrostatic deflection component are not used at the same time.

9. The apparatus as defined in claim 1, further including:
a computer into which is input the voltage contrast image and which determines whether a defect exists within the integrated circuit based upon the voltage contrast image, thereby forming an inspection tool.

10. The apparatus according to claim 9 wherein the dual deflection system switches between moving the e-beam using the magnetic deflection component and the electrostatic deflection component.

11. The apparatus according to claim 10 wherein the magnetic deflection component has a larger field of view than that of the electrostatic deflection component.

12. The apparatus according to claim 11 wherein the magnetic deflection component and the electrostatic deflection component are not used at the same time.

13. The apparatus according to claim 12 wherein the detector is disposed within the focusing column and includes an opening that allows the e-beam to pass therethrough.

14. The apparatus as defined in claim 1 wherein the detector is disposed within the focusing column, and containing an opening through which the e-beam from the electron source passes therethrough, wherein a signal to noise ratio of the voltage contrast image is increased due in part to the detector being disposed within the focusing column.

15. The apparatus according to claim 14 wherein the opening is a hole of about 0.5 mm diameter or less.

16. The apparatus as defined in claim 1, wherein the focusing column selectively focuses the e-beam to each predetermined location of the e-beam target pads, at least certain ones of said e-beam target pads having an asymmetric aspect ratio.

17. The apparatus as defined in claim 16, wherein only a single pixel measurement is obtained as each voltage contrast image from each e-beam target pad.

18. The apparatus as defined in claim 16, wherein the focusing column selectively focuses the e-beam using an e-beam spot with an elongated major axis.

19. An apparatus, as defined in claim 18, wherein the elongated major axis of the e-beam spot is matched in dimension to that of the targeted e-beam pads, so as to maximize scanning efficiency.

20. An apparatus, as defined in claim 18, wherein the elongated major axis of the e-beam spot is matched in a first dimension to that of the targeted e-beam pads, and wherein an elongated minor axis of the e-beam spot perpendicular to the elongated major axis is matched in a second dimension to that of the targeted e-beam pads.

21. An apparatus, as defined in claim 20, wherein each of the targeted e-beam pads is positioned along a linear scan line, and wherein the elongated major axis of the e-beam spot is oriented perpendicular to the scan line.