# Patent

## Title
Electromechanical memory cell with torsional movement

## Abstract

A memory cell uses a pair of cantilevers to store a bit of information. Changing the relative position of the cantilevers determines whether they are electrically conducting or not. The on and off state of this mechanical latch is switched by using, for example, electrostatic, electromagnetic or thermal forces applied sequentially on the two cantilevers to change their relative position. The amount of power required to change the state of the cell is reduced by supporting at least one of the cantilevers with at least one lateral projection that is placed in torsion during cantilever displacement. After a bit of data is written, the cantilevers are locked by mechanical forces inherent in the cantilevers and will not change state unless a sequential electrical writing signal is applied. The sequential nature of the required writing signal makes inadvertent, radiation or noise related data corruption unlikely.

## Background
BACKGROUND
Aspects of the present disclosure in embodiments thereof are related to a non-volatile electronic memory. The memory finds particular application where low power consumption, and/or low writing voltage requirements are advantageous. Additionally, embodiments find application where increased radiation immunity is desired.
Memory devices play an important role in modern microelectronic systems. For example, memory devices store instruction sets, programs, and/or data for computer processors. Electronic systems use memory devices for example, when performing calculations, signal processing, or data analysis. There are many different memory architectures used for storing information. For example, some moving surface memories store data in the form of magnetic dipoles. Magnetic tapes and discs are examples of these kinds of memory devices. Compact disks store information by varying optical characteristics of points on the surface of the disk. Semiconductor memories typically hold information in the form of charges or electrical potentials in transistor circuits. Transistor based memory devices are inexpensive, relatively small and are compatible with an on-chip addressing circuitry. Therefore, semiconductor memories made of transistors have become the most popular devices for data storage in systems that require a high read/write speed and a compact device size. Nowadays, semiconductor memories find broad applications in areas, which range from computer systems to telecommunications, commercial and military avionics systems, consumer electronics, and advanced weapon systems. In these applications, it is expected that the memories can be accessed at a high speed, exhibit low power consumption, and can be operated at a low driving voltage. Furthermore, these memories must be immune to environmental disturbances, for example, radiation, and mechanical shock. While semiconductor memories have achieved many of these goals, their performance is not ideal in some respects. For example, the energy efficiency of some read/write memories is relatively poor, and most transistor memories are sensitive to radiation.
Semiconductor memories are characterized as read-only memory (ROM) and random access memory (RAM). ROM is programmed once, for example, when a machine is being manufactured at a factory or when the ROM itself is being manufactured. From that point onward, data can only be read out of a ROM device. In RAM, data is both written to and read from the device as the requirements of an application dictate. RAM can be either static mode (SRAM) or dynamic mode (DRAM) devices. In SRAM, information is stored, for example by setting up the logic state of a bi-stable flip-flop. In DRAM, data is stored through the charging of a capacitor. Typically, the information stored in these RAMs is lost if the supply power is turned off. Therefore, these memories devices are called volatile memories. There are memory devices that retain information even after power is removed from them. These devices are known as nonvolatile memories. Nonvolatile memories store information either in a transistor matrix that is connected according to a prescribed mapping relation or in floating gates of MOS transistors. In the latter case, the information stored in a memory cell can be changed by applying an ultraviolet light or an electrical signal to remove charge from or add charge to the floating gate. The floating gate MOS memories in which the contents of the cells can be altered through the use of an electrical signal are called flash memories.
Flash memories are capable of retaining information with the supply power off. Therefore, flash memory is widely applied in applications that require low power consumption. Digital cameras, wireless communication apparatuses, computers, as well as many portable electronic systems all use flash memories as their major data storage apparatus. While flash memories have many advantages as nonvolatile memories, their energy efficiency is relatively poor during the programming process. Flash memories write data by injecting charges into floating gates, which are surrounded by dielectric layers used to keep the charges from leaking away. While these dielectric layers are effective in blocking charges from escaping, they also form a high barrier that shields charges from being injected into the floating gate during a data writing process. In the writing/erasing process of flash memories, charges have to penetrate through the dielectrics either by hot carrier injection or by a quantum mechanical conduction process called Fowler-Nordheim tunneling. These injection/tunneling processes generally require a high electric field to help carriers overcome the potential barrier of the shielding dielectrics. The dielectrics are insulators. Therefore, the efficiency of these injection/tunneling processes is poor. For example, in the currently available flash memory technology, the thickness of the dielectrics is in the order of tens of an angstrom. The percentage of charges that can penetrate through these thick dielectrics, to reach the floating gate, is generally lower than 1%. The low efficiency, and the requirement of a high supply voltage, limits the usefulness of flash memories, especially in applications that require a low supply voltage and low power consumption.
In addition to energy efficiency, one of the major drawbacks of semiconductor memories is that they are sensitive to radiation. Traditional semiconductor memories store information in the form of charges or electrical potentials in transistors. These charges and electrical potentials are very sensitive to radiation. In order to prevent the contents of semiconductor memories from being damaged by radiation, special protection layers, or device structures need to be applied. However, these approaches typically require more complicated fabrication processes or packaging, which introduce a higher cost. The development of a simple, radiation-hard memory is therefore important for many applications. For example aircraft, spacecraft, medical equipment and equipment that, as a side effect of operation, generates radiation all require or can benefit from the use of radiation-hard memory devices.
U.S. Pat. No. 6,473,361 to Chen et al., entitled ELECTROMECHANICAL MEMORY CELL, which issued Oct. 29, 2002, the disclosure of which is totally incorporated herein by reference, describes a low power memory cell that uses a pair of cantilevers to store a bit of information. However, there has been a desire for a memory cell with improved energy efficiency and/or reduced voltage requirements.
BRIEF DESCRIPTION
A memory cell operative to store data can include a first cantilever including a conductive portion, a second cantilever having and insulated portion and a conductive portion, the second cantilever positioned, at least in part, in overlapping relation to the first cantilever. Either or both of the first and second cantilevers can include at least one lateral support projection extending from a respective at least one side thereof. When an actuating force is applied which ever of the cantilevers that includes the at least one lateral support projection the respective at least one lateral support projection is placed in torsion or is twisted.
For instance, a memory cell can include a substrate. A first cantilever can have a supported portion and a free end. The supported portion can be supported by at least one lateral support projection projecting along a lateral support projection axis thereof. The at least one laterally projecting support projection can have a fixed end that is fixed in position relative to the substrate. The first cantilever can have a first natural position. A second cantilever may also have a supported portion and a free end, the supported portion being supported by at least one lateral support projection projecting along a support projection axis of the second cantilever, the at least one laterally projecting support projection having a fixed end that is fixed in position relative to the substrate. The second cantilever can have a second natural position, a portion of the second cantilever being in overlapping relation with the first cantilever when the first cantilever is in the first natural position and the second cantilever is in the second natural position.
The memory cell can also include an actuating system for sequentially applying torque to and releasing the first and second cantilevers, wherein the torque is sequentially applied about the support projection axes of the first and second cantilevers, whereby the cantilevers are placed in one of two steady state orientations.
A memory device can include a plurality of memory cells, each memory cell comprising a first cantilever, a second cantilever and a cantilever actuator wherein at least one of the first and second cantilever is supported by at least one laterally projecting support projection thereof and a control circuit operative to drive the cantilever actuators to sequentially displace and release the first and second cantilevers so as to place the first and second cantilevers in one of a first overlapping relation and a second overlapping relation.
The memory device may include or be associated with a cell reading circuit that is operative to measure the resistance from one cantilever to the other and report the results of the measurement as one of two binary states.
A method for writing data to a memory cell can include displacing a second cantilever out of a displacement path of a first cantilever, displacing the first cantilever out of a returning path of the second cantilever, releasing the second cantilever, allowing the second cantilever to follow the returning path of the second cantilever, and releasing the first cantilever, allowing the first cantilever to follow a return path of the first cantilever, whereby the first cantilever becomes a lower cantilever and the second cantilever becomes an upper cantilever. Displacing at least one of the first and second cantilevers can include applying a torque to at least one of the first and second cantilevers, the torque being applied about a support projection axis thereof, wherein the applied torque places the at least one lateral projection in torsion, thereby causing the at least one lateral projection to twist.
An electronic device can include at least one memory device that includes a plurality of memory cells, each memory cell comprising a first cantilever, a second cantilever, and a cantilever actuator, wherein at least one of the first and second cantilevers is supported by at least one laterally projecting support projection thereof. Additionally, an electronic device can include a computational hardware operative to, at least one of, read data from and write data to, the at least one memory device and an output device operative to present a work product of the computational hardware. For example, the electronic device can be a print engine, such as, for example, an ink jet, or a xerographic print engine. The electronic device can be any other type of device as well. For example, the electronic device may be a device that is designed or built for operation in an environment having ionizing radiation and/or temperature variations. For example, the electronic device may be included in a spacecraft, probe, or satellite.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1-FIG. 5 are cross sectional views of a first microelectromechanical memory cell showing various stages of a data writing process.
FIG. 6 is a schematic diagram illustrating a charge recycling aspect of memory cells such as the first microelectromechanical memory cell.
FIG. 7-FIG. 11 are cross sectional views of a second microelectromechanical memory cell showing various stages of a data writing process.
FIG. 12 is a flow chart summarizing a process of writing data to a memory cell such as the first and second microelectromechanical memory cells.
FIG. 13 is a block diagram of a memory device comprising a plurality of memory cells such as the first and second microelectromechanical memory cells.
FIG. 14a-FIG. 14j are cross sectional views of various stages in a process for manufacturing the first microelectromechanical memory cell.
FIG. 15a-FIG. 15j are cross sectional views of various stages in a process for manufacturing the first microelectromechanical memory cell; and
FIG. 16 is a block diagram of an electronic device comprised of at least one memory device of FIG. 13.
FIG. 17 is an illustration of a cantilever having reward projecting supports.
FIG. 18 is an illustration cantilever having laterally projecting supports.



DETAILED DESCRIPTION
A nonvolatile memory device that overcomes the high supply voltage, writing efficiency, and radiation susceptibility limitations of flash memory is implemented using Micro-electromechanical Systems (MEMS) technology. MEMS technology is used to create a pair of cantilevers that are used as a memory cell. The memory cell is simple to both use and manufacture. For example, the memory cell can be implemented using a MEMS technology that allows for CMOS addressing circuitry to be integrated on the same chip. Therefore, the whole memory system can be fabricated at a low cost. The latch can be switched between on and off states using for example, electrostatic or magnetic forces or thermal movement. Data stored in the memory is read out as, for example, a capacitance or a resistance measurement.
For example, the memory cell comprises a pair of polysilicon cantilevers. The on and off state of this mechanical latch is switched by using electrostatic forces applied sequentially on the two cantilevers. The relative position of the cantilever pair creates either a low resistance path or a high resistance path. Encoded in the resistance level is a bit of information, representing either a “1” or a “0” state. Alternatively, a capacitance of the cantilever pair is affected by the relative positions of the cantilevers and data is read as either a relatively high or low capacitance. After a bit of data is written, the latch is locked by a mechanical force and will not change its state unless another electrical writing signal is applied.
For example, referring to FIG. 1, a MEMS memory cell 102 includes a support substrate 104, a substrate insulation layer 106, a first gate or electrode 108, a second gate or electrode 110, a first cantilever 114 and a second cantilever 118. For example, the substrate 104 is made of silicon. The substrate-insulating layer 106 is made of silicon nitride. The first 108 and second 110 gates are made of highly doped polysilicon and are connected (not shown) to control circuits (see FIG. 13). The first gate 108 is a component of a first electrostatic actuator that is operative to cause the first cantilever to flex, move or be displaced away from both a natural position of the first cantilever 114, and an overlapping relationship the first cantilever has with the second cantilever 118. Similarly, the second gate 110 is a component of a second electrostatic actuator that is operative to cause the second cantilever to flex, move or be displaced away from a natural position of the second cantilever 118 and the overlapping relationship. The first and second electrostatic actuators comprise a means for sequentially flexing and releasing the first and second cantilevers whereby the cantilevers are placed in one of two steady state positions. The first 114 and second 118 cantilevers and associated control circuits are also components of the electrostatic actuators. The control circuits comprise switching circuits operative to selectively connect the cantilevers and gates to predetermined voltage sources and reference points. The design and operation of the control circuits will be obvious to those of ordinary skill in the art upon reading and understanding the following description.
The first 114 and second 118 cantilevers include fixed ends that are anchored at respective positions relative to the substrate. The first 114 and second 118 cantilevers are made of highly doped polysilicon. Therefore, the first 108 and second 110 gates, and the first 114 and second 118 cantilevers are all made of conductive material. The first cantilever includes 114 a free end having a first tip 120. A first or upper surface of the first tip 120 is coated with a metal layer 122. A remaining first or upper surface portion of the first cantilever 114 is covered with a first insulating dielectric layer 124. For-example, the first insulating dielectric is an artifact of a manufacturing process. The second cantilever 118 includes a free end having a second tip 126. A first or upper surface of the second cantilever 118, including a first or upper surface of the second tip 126, is coated with a second insulating dielectric layer 128. The dielectric layer 128 serves to insulate the second cantilever 118 from the first cantilever 114 when the second tip 126 is under the first tip 120.
In a first steady state 130, illustrated in FIG. 1, the first cantilever 114 overlaps the second cantilever 118. In the first steady state, the first 114 and second 118 cantilevers are in a first natural state. In the first natural state, the cantilevers assume a first overlapping relation wherein the first tip 120 is above the second tip 126. For example, the tips 120, 126 of the cantilevers overlap each other by a length that is based on the minimum feature size of a fabrication technology used to manufacture the memory cell 102. Data is encoded and stored in the manner in which the cantilevers 114, 118 overlap. Since, as shown, the first cantilever 114 is above the second cantilever 118, the two cantilevers 114, 118 are separated by the second insulating dielectric layer 128 of the second cantilever 118. Therefore, the cantilevers 114, 118 are electrically insulated from each other. This condition represents a first binary state and is designated, for example, as “0.”
An illustrative data writing process is depicted in FIG. 2 through FIG. 5. The illustrative writing process changes the state of the memory cell 110 from representing the first binary state “0” to representing a second binary state designated, forexample, as “1”. For example, first 210 the cantilevers 114, 118 are grounded through control circuits (See FIG. 12) and a voltage is applied on the second gate 110. Therefore, a charge related to the applied voltage is placed on the second gate 110. The charge generates an electrostatic attractive force between the second cantilever 118 and the gate. The second cantilever is deflected or moved toward the second gate 110 by the electrostatic force. Alternatively, the second cantilever includes a magnetic material, for example, nickel and an electromagnetic coil is used to move or displace the second cantilever. In another embodiment, one side of the second cantilever is heated, and the second cantilever moves or is displaced due to differential expansion.
Referring to FIG. 3, at a second data stage 310, with the voltage applied on second gate 110 maintained, a second voltage is applied to the first gate 108. A charge related to the second voltage develops on the first gate 108. The charge on the first gate 108 generates attractive electrostatic forces relative to the first cantilever 114. Therefore, the first cantilever is moved or displaced toward the first gate 108. Alternatively, the first cantilever includes a magnetic material, such as, for example, nickel, and an electromagnetic coil is used to move, be displaced or flex the first cantilever. In another alternate embodiment, one side of the second cantilever is heated and the first cantilever moves or is displaced due to differential expansion.
Referring to FIG. 4, at a third data writing stage 410, with the voltage applied on first gate 108 maintained, the voltage applied to the second gate 110 is returned to a neutral or ground state. The charge related to the first voltage is removed from the second gate 110 and the attractive force between the second gate 110 and the second cantilever 118 is dissipated. Therefore, mechanical restorative forces inherent in the second cantilever 118, return the second cantilever 118 to the natural position of the second cantilever.
Similarly, referring to FIG. 5, at a fourth data writing stage 510, the second voltage applied to the first gate 108 is returned to a neutral or ground state. The charge related to the second voltage is removed from the first gate 108 and the attractive force between the first gate 108 and the first cantilever 114 is dissipated. Restorative forces inherent in the first cantilever 114 return the first cantilever 114 toward the first cantilever's original natural position. However, due to the overlapping nature of the first 114 and second cantilevers 118, the first cantilever 114 is prevented from returning all the way back to the first cantilever's original position. Instead, the first tip 120 of the first cantilever 114 is caught underneath the second tip 126 of the second cantilever 118. This orientation is a second overlapping relationship of the first and second cantilevers 114, 118. In this position, the metal layer 122 of the first tip is in contact with a second or underside 520 of the second tip 126. The underside 520 of the second tip 126 is un-insulated. Therefore, the first cantilever 114 and the second cantilever 118 are electrically connected creating a low resistance path between the first cantilever and the second cantilever. This second steady state condition represents the second binary state and is designated, for example, as “1”.
A writing operation operative to change a memory device 102 from the second or “1” steady state to the first or “0” steady state simply performs the above described actions in a reverse order. Once the cantilevers 114, 118 are in one of the steady states, the position of the cantilevers 114, 118 is locked. Spring tension, and like mechanical restraining forces, inherent in the structure of the cantilevers 114, 118, tend to maintain the position of the cantilevers 114, 118 and therefore tend to preserve the data represented by the position or orientation of the cantilevers 114, 118. Additionally, the series of movements 210, 310, 410 510, that must occur in order to change the state of the memory cell, serves to maintain the memory cell 102 in the state that it is in. For example, the relative position of the cantilevers 114, 118 will not change unless an appropriate series of electrical writing signals are applied to the cantilevers 114, 118 and gates 108, 110. As this is a sequential process, any mechanical vibration or shock may move both cantilevers 114, 118 at the same time, but is not likely to change their 114, 118 relative position or the state of the cell 102. Furthermore, while radiation may discharge the memory cell capacitors of a flash memory, radiation cannot effect the mechanical position of the cantilevers.
Variations on the described writing process are contemplated. For example, stages 410 and 510 may be combined. Instead of being released after the second cantilever reaches the natural position of the second cantilever, the first cantilever may be released soon after the second cantilever is released.
This MEMS memory cell 102 can be implemented using a three-polysilicon-layer surface micromachining technology.
Referring to FIG. 17, simulations show that with a 3 microns×10 microns cell size, a 2 microns cantilever-to-electrode separation, and cantilevers supported by respective rearward projecting supports 1714, 1718 having respective fixed ends 1722, 1726 spaced from respective main bodies 1730 of the cantilevers in directions parallel to longitudinal axes 1734 thereof, the driving voltage required to write data into the cell about 5.6 volts. In such embodiments, the support projections 1714 1718 are bent, as indicated by arrows 1738, by an actuating force, such as an electrostatic, electromagnetic or thermal force 1742, during the data writing process (e.g., FIGS. 2-4). For example, top portions of the supports 1714, 1718 are placed in tension and bottom portions are placed in compression.
Referring to FIG. 18, further simulations indicate that in a similarly dimensioned cell, with cantilevers supported instead by respective lateral support projections 1814, 1818 extending from opposite sides 1822, 1826 of respective main bodies 1830 along lateral support axes 1832 thereof, and having respective fixed ends 1834, 1838 laterally spaced from the respective main bodies 1830, the driving voltage required to write data into the cell can be reduced to about 3.3 volts. In such embodiments, the lateral support projections are twisted or placed in torsion, as indicated by arrows 1842, by the actuating force (e.g.,1846), during the data writing process (e.g., FIGS. 2-4). In other words the actuating force (e.g., 1846) applies a torque about the lateral support axes 1832. The reduction in required voltage (from about 5.6 to about 3.3), and associated reductions in required power, are associated with a reduction in force required to achieve a given cantilever movement, deflection or displacement when placing support projections in torsion as compared to support projection bending.
Reductions in the size of the lateral support projections 1818, 1814 may also be associated with further reductions in voltage/power requirements.
As indicated above, the writing process of these memory cells includes charging and discharging actions of a pair of movable micro capacitors (comprised of, for example, gate and cantilever pairs or a single gate and a pair of cantilevers). Referring to FIG. 6, in a discharging process, the charge released by a first capacitor C1 can be used for charging a second capacitor C2. For example, the second capacitor C2 includes a cantilever and gate of a second cell. Therefore, charge used in the writing process can be recycled. The efficiency of the recycling process is defined as the ratio of recycled charge delivered from a first cell, for example C1, to the total amount of charge delivered to a second cell, for example C2. The efficiency depends, at least in part, on the value of interconnect resistance between cells. With currently available VLSI technology, which uses either aluminum or copper for device interconnection, the recycling efficiency of a memory device comprised of memory cells such the memory cell of FIG. 1, can approach 50%. This efficiency is much higher than the charge recycling efficiency of flash memories. In currently available flash memories charge recycling efficiency is typically lower than 0.1%.
Furthermore, according to simulations the power required for writing a bit of data into the memory cell 102 of FIG. 1, constructed with lateral projecting supports, as described with reference to FIG. 18, is at least 14 times less than that required by traditional nonvolatile semiconductor memories, such as, for example, flash memories. The writing process of the MEMS memory cell 102, is an efficient charging process, involving the charging of a micro capacitor through a low resistance metal interconnect. The writing process of currently available flash technology memory, is a less efficient process requiring charge to pass through a thick, highly resistive, dielectric layer. This process involves quantum efficiency for charge delivery of less than 0.1%.
Referring to FIG. 7 a second MEMS memory cell 702 includes a V-shaped groove 704 etched into a substrate 706. As will be understood from the following description, the V-shaped groove provides for a cell geometry that allows a reduced writing voltage to actuate the required cantilever movements. The second MEMS memory cell 702 further includes an insulating dielectric layer 708, a single gate 710 or electrode, a first cantilever 714, and a second cantilever 718. The first 714 and second 718 cantilevers include fixed ends that are anchored at respective positions relative to the substrate. The first cantilever 714 has a free end including a first tip 720. The first tip includes an upper surface that is covered with a metal layer 722. The metal layer 722 is, for example, an alloy of chromium and gold. The second cantilever has a free end including a second tip 726. The second tip 726 includes an upper surface. The upper surface of the second tip 726 is covered with a tip insulating dielectric layer 728. The gate 710 and cantilevers 714, 718 are conductive. For example, the gate 710 and cantilevers 714, 718 are made of doped polysilicon. The gate 710 is positioned under both cantilevers and follows the contour of the V-shaped groove 704. As will be seen, the gate 710 is operative as an electrostatic reference, toward which attractive electrostatic forces act when at least one of the first cantilever and the second cantilever is electrically charged in relation to the gate. The cantilevers 714, 718 are suspended above the groove and are also generally shaped to follow the contour of the groove. Each cantilever 714, 718 includes a groove following portion that is substantially parallel to one leg of the V-shaped groove. The groove following portion of the first cantilever includes an angle or bend 729. The bend 729 gives the first tip 720 an “L” shape and places a lower or “horizontal” leg of the “L” of the first tip 720, parallel to the second tip 726.
The substrate 710 is, for example, silicon. The use of silicon as a substrate limits the choice of groove angles. However, the crystalline structure of silicon allows for a groove angle of 70.6 degrees. This groove angle allows, for example, for a 19.4 degree difference between the direction of tip movement and the orientation of the tip overlap area. During a writing operation, the 19.4 degree difference allows the lower of the two cantilevers to move out of the way of the upper cantilever with only a small angular movement. This means that the cantilevers 714, 718 can be much closer to the substrate 706 and gate 710 than is the case in the first MEMS memory cell 102. Therefore, the groove 704 and the 19.4 degree difference allows for a cell geometry that provides a substantial reduction in writing voltage. Furthermore, the 19.4 degree difference allows for an increase in tip 722, 726 overlap tolerance. For example, with this geometry, the gap between the cantilevers 714, 718 and the gate is reduced to about 1.0 um and the overlap between the tips can be as large as 0.9 um. These dimensions assume an approximate groove depth of 2 um. A 2 um groove depth is achievable within the current resolution limitations of photolithography on non-planar surfaces.
In a first steady state 730, illustrated in FIG. 7, the first cantilever 714 is above the second cantilever 718. As mentioned above, in this geometry, the tips can overlap by as much as 0.9 um. Data is encoded and stored in the manner in which the cantilevers 114, 118 overlap. Since the first cantilever 714 is above the second cantilever 718, the two cantilevers are separated by the second insulating dielectric layer 728 and are electrically insulated. This condition represents a first binary state and is designated, for example, as “0.”
A process for writing data to the second MEMS memory cell 702 is very similar to the process for writing to the first memory cell 102. However, since the second memory cell 702 has only one large gate or plate 710 the gate is grounded and actuating voltages (or charges) are applied to the cantilevers 714, 718. Additionally, as stated earlier, geometry differences between the first 102 cell and the second 702 cell allow lower voltages to actuate the cantilevers 714, 718 of the second cell 702. Either or both of the cantilevers 714, 718 can be constructed as described with reference to FIG. 18. While, single gate implementations have been illustrated with reference to the V-shaped groove embodiment of FIG. 7, single gate implementations of other embodiments are also possible. For example, the two gates (e.g., 108, 110) of FIG. 1 can be replaced with a single gate. Furthermore, other cell geometries are also contemplated.
A second illustrative data writing process are depicted in FIG. 8 through FIG. 11. At a first data writing stage 810 the gate 710 is grounded through a control circuit (see FIG. 12) and a voltage is applied to the second cantilever 718. A charge related to the voltage is placed on the second cantilever 718. The charge generates an electrostatic attractive force between the second cantilever 718 and the gate 710. Therefore, the second cantilever is moved or displaced toward the gate 710.
Referring to FIG. 9, at a second data writing stage 910, with the voltage applied on second cantilever 718 maintained, a similar second voltage is applied to the first cantilever 714. A charge related to the second voltage develops on the first cantilever 714. The charge on the first cantilever 714 generates attractive electrostatic forces relative to the gate 710. Therefore, with the second cantilever 718 out of the way, the first cantilever is moved or displaced toward the gate 710.
Referring to FIG. 10, at a third data writing stage 1010, with the second voltage applied on first cantilever 714 maintained, the first voltage applied to the second cantilever 718 is returned to a neutral or ground state. Therefore, the charge related to the first voltage is removed from the second cantilever 718 and the attractive force between the second cantilever 718 and the second gate 710 dissipates. Therefore, mechanical restorative forces inherent in the second cantilever 718, return the second cantilever 718 to the second cantilever's original position.
Similarly, referring to FIG. 11, at a fourth data writing stage 1110, the second voltage applied to the first cantilever 714 is returned to a neutral or ground state. The charge related to the second voltage is removed from the first cantilever 714 and the attractive force between the first cantilever 714 and the gate 710 dissipates. Restorative forces inherent in the first cantilever 714, return the first cantilever 714 toward the first cantilever's original position. However, due to the overlapping nature of the first 714 and second cantilevers 118, and the angle or bend 729, the “L” shaped first tip 722 of the first cantilever 714 catches the underside of the second cantilever 718 an the first cantilever 714 is prevented from returning to the first cantilever's original position. Instead, the first tip 720 of the first cantilever 714 is caught underneath the second tip 726 of the second cantilever 718. In this position, the metal layer 722 of the first tip is in contact with a second or underside 1120 of the second tip 726. The underside of the second tip 726 is uninsulated. Therefore, the first cantilever 714 and the second cantilever 718 are electrically connected. This second steady state condition represents the second binary state and is designated, for example, as “1”.
Referring to FIG. 12, in summary, a method 1202 for writing data to a MEMS memory cell, the memory cell comprising a first cantilever and a second cantilever, in an overlapping relationship with the first cantilever, and wherein the first cantilever starts out as an upper cantilever and the second cantilever starts out as a lower cantilever, begins with a second cantilever movement or displacement 1210. During the second cantilever movement or displacement 1210 the second cantilever is displaced or moved out of a movement or displacement path of the first cantilever. Next, during a first cantilever movement or displacement 1220, the first cantilever is displaced or moved out of a returning path of the second cantilever.
In order to reduce power requirements, at least one of the first and second cantilevers is supported by at least one lateral support projection (e.g., 1814 and 1818). Therefore, at least one of the second cantilever movement or displacement 1210 and the first cantilever movement or displacement 1220 includes applying a torque to, or placing at least one lateral support projection of at least one of the first and second cantilevers in torsion.
Subsequently, in a second cantilever releasing stage 1230, the second cantilever is released, allowing the second cantilever to follow the returning path of the second cantilever toward an original position of the second cantilever. Finally, at a first cantilever-releasing stage 1240 the first cantilever is released, allowing the first cantilever to follow a return path of the first cantilever. At the end of this sequence and the overlapping relationship of the first and second cantilevers, the first cantilever becomes a lower cantilever and the second cantilever becomes an upper cantilever.
Referring to FIG. 13, MEMS memory cells can be included in a memory device 1310. For instance, the memory device includes a plurality of MEMS memory cells 1320, such as, for example, the first 102 or second 702 memory cells described above, wherein at least one of the two cantilevers is supported by at least one lateral support projection. Additionally, the memory device includes control circuitry 1330 for sequentially applying voltages to gates and/or cantilevers for writing data to the cells. The control circuits comprise switching circuits that will be obvious to those of ordinary skill in the art. Optionally, the control circuitry includes charge recycling circuitry operative to store and re-use actuation charges. Additionally the memory devices include data reading circuitry 1340. For example, data reading circuitry 1340 measures the resistance between a first and a second cantilever. Resistance readings above a threshold value are reported as a first state. For example, if the resistance between cantilevers of a cell is above the threshold, the cell is reported to be in a “0” state. Furthermore, if the resistance between cantilevers of a cell is below the threshold, the cell is reported to be in a “1” state. Alternatively, the data reading circuit measures another property of the cantilever pair. For example, a first to second cantilever capacitance is measured and compared to a threshold to determine a cantilever or cell state.
Preferably, the first 102 and second 702 MEMS memory cells are manufactured by processes that are compatible with the manufacture of control and data reading circuits. For example, the first and second memory cells may be manufactured by standard CMOS processes.
FIG. 14a-FIG. 14j outline a method for making the first memory cell 102. For example, the memory cell is part of a memory device 1310. Referring for FIG. 14a, the process starts with the selection of a substrate 1410. For example, the substrate 1410 is silicon. The doping of the silicon is not critical. Therefore the doping can be selected based on the needs of other components on the memory device 1310. Referring to FIG. 14b, an insulating dielectric 1414 is applied to the substrate 1410. For example, the dielectric 1414 is silicon nitride. Referring to FIG. 14c, a layer of highly doped polysilicon is deposited over the dielectric layer 1414. In a patterning process, the polysilicon is masked and etched to create first 1418 and second 1422 gates or electrodes. For example, photolithography and dry etching are used to create the gates 1418, 1422. Referring to FIG. 14d, a first layer of sacrificial oxide 1426 is deposited over the area of the cell. The thickness of the first layer of sacrificial oxide 1426 is related to a desired height of first 1430 and second 1434 cantilevers (see FIG. 14f). Referring to FIG. 14e, in a patterning stage, anchoring holes 1438 are etched in the sacrificial oxide 1426. Referring to FIG. 14f, a second layer of highly doped polysilicon is deposited over the area of the cell. The polysilicon at least partially fills the anchoring holes 1438 and adheres to the silicon nitride layer 1414 at the bottom of the anchoring holes 1438. Furthermore, the second polysilicon layer is deposited on the sacrificial oxide 1426. In a patterning stage the second polysilicon layer is masked and etched to create the first 1430 and second 1434 cantilevers. The polysilicon deposited in the anchoring holes 1438 forms supports and anchors 1444 for the cantilevers 1430, 1434. Referring to FIG. 14g, a dielectric layer is deposited over the area of the cell. For example, the dielectric is silicon nitride. Patterning leaves a first layer of dielectric 1448 over most of an upper surface of the first cantilever 1430 and a second layer of dielectric 1452 over an upper surface of the second cantilever 1434. During patterning, a tip 1456 portion of the first cantilever 1430 is etched to re-expose the polysilicon of the tip 1456. Referring to FIG. 14h, a second sacrificial oxide layer 1460 is deposited over the area of the cell. A patterning stage creates a via 1464 over the exposed polysilicon of the tip 1456 of the first cantilever 1430. Referring to FIG. 14i, a third polysilicon layer is deposited over the area of the cell. The polysilicon fills the via 1464 and covers the surface of the second sacrificial oxide layer 1460. A thin metal layer is deposited and patterned to act as a mask. Metal 1468 is left covering polysilicon immediately above the via 1464 and a small portion 1472 of polysilicon adjacent the via 1464 and overlapping a portion of the second cantilever 1434. Exposed polysilicon is etched away leaving a metalized, offset tip 1476 on the first cantilever 1430. Finally, referring to FIG. 14j, wet etching is used to etch away the sacrificial oxide layers, leaving a memory cell 1480, such as, the first MEMS memory cell 102.
FIG. 15a-FIG. 15i outline a method for making the second memory cell 702. For example, the memory cell is part of a memory device 1310. Referring to FIG. 15a, again the process starts with the selection of a substrate 1510. Referring for FIG. 15b, an oxide layer 1514 is deposited on the substrate 1510 as a masking layer, and a V-shaped grove 1518 is etched into the substrate 1510. The substrate 1510 is, for example, a silicon substrate. Referring to FIG. 15c, the oxide is removed and a dielectric layer 1522 is deposited over the area of the cell. For example, the dielectric layer 1522 is silicon nitride. The dielectric layer 1522 isolates components of the memory cell from the substrate 1510. Referring to FIG. 15d, a first layer of polysilicon is deposited over the area of the cell. Then the polysilicon is patterned. The patterned polysilicon forms a large gate 1526 that fills the groove and extends beyond the edges of the groove toward points 1530 where cantilever anchors will be formed. Referring to FIG. 15e, a first sacrificial oxide layer 1534 is deposited over the area of the cell, and then patterned. The patterning provides a first anchor hole 1538 in the oxide 1534. Optionally, the patterning provides that the oxide layer over a first leg 1542 of the V-shaped groove 1518 is thinner than the oxide layer over a second leg 1546 of the V-shaped groove 1518. Alternatively, the thickness variation is provided later, by a second sacrificial oxide layer. Referring to FIG. 15f, a second polysilicon layer is deposited over the area of the cell, filling the first anchoring hole 1538, and covering the first sacrificial oxide layer 1534. The polysilicon is masked and etched. After etching the polysilicon forms a first cantilever 1554, anchored in the first anchor hole 1538, and extending into the V-groove 1518 substantially parallel to the first leg 1542 of the V-groove 1518. Referring to FIG. 15g, a thin layer of dielectric 1558, such as, for example, silicon nitride, is deposited over an upper surface of the first cantilever 1554. Referring to FIG. 15h, a second layer of sacrificial oxide 1562 is deposited and patterned to cover the first cantilever. Optionally (and not shown), the second sacrificial oxide layer 1562 thickens a portion 1566 of the first oxide layer that will support the second cantilever. For example, the second sacrificial oxide layer can coat and thereby add thickness to the first oxide layer over the second leg 1546 of the V-shaped groove 1518. Additionally, the first oxide layer is etched to create a second anchor hole 1572. Referring to FIG. 15i, a third polysilicon layer is deposited and etched to create the second cantilever 1574. The second cantilever 1574 is anchored in the second anchor hole 1572 and extends into the V-shaped groove 1518 substantially parallel to the second leg 1546 of the V-shaped groove 1518. A second tip 1576 of the second cantilever is formed at an angle to a portion of the second cantilever 1574 from which it extends. The angle causes the second tip to be substantially parallel to a first tip of the first cantilever 1580. Referring to FIG. 15j, wet etching is used to remove the sacrificial oxide layers, leaving a memory cell 1584 such as the first MEMS memory cell 702.
An electronic device 1610 includes at least one memory devices 1614 such as the memory device 1310 that comprises a plurality of MEMS memory cells (e.g., 102, 702) wherein the MEMS memory cells each include first and second cantilevers and at least one of the first and second cantilevers is supported by at least one laterally projecting support projection (e.g, 1814 and/or 1818) thereof. For example, the electronic device 1610 further includes computational hardware 1620, such as for example, a microprocessor, computer processor, digital signal processor, or micro-controller. The electronic device 1610 is, for example, a digital phone, laptop computer, document processor, radio, aircraft, spacecraft, probe or satellite. The device may further include input 1626 and/or output 1632 components. For example, a phone includes a speaker, a microphone, and a keyboard. A laptop computer includes a keyboard and a display screen. In a document processor input devices 1626 include scanners, keyboards, and computer network adapters. The output devices of a document processor include a user display, such as, a CRT or liquid crystal display, computer network adapters and one or more print engines. For example, a print engine can be a xerographic printer or an ink jet printer. A radio includes a user display, a keyboard, and at least one speaker. A spacecraft includes many sensors, keyboards, displays screens, and status indicators. Satellites and probes include sensors or transponders, and at least one radio transmitter. All of these devices may take advantage of the low power and low voltage requirements of the MEMS memory cells 102, 702 included in the memory devices 1614. For example, the aircraft, spacecraft, and satellite take particular advantage of the low power requirement, and resistance to vibration and radiation of the MEMS memory cells 102, 702. The other devices take advantage of the low cost, low power requirement and low voltage requirement of the MEMS memory cells 102, 702.
A memory cell has been described with reference to particular embodiments. Modifications and alterations will occur to others upon reading and understanding this specification. For example, other cantilever geometries can be used. Where the cantilevers are shown one hundred and eighty degrees apart, other orientation angles can be used. For example, the cantilever tips may cross at forty-five or ninety degrees. Where a V-shaped groove is shown, grooves of other shapes can be substituted. For example, a rectangular trench is contemplated. Where electrostatic actuation is detailed, other kinds of actuators can be substituted. For example, electromagnetic and thermal actuator can be used. It is intended that all such modifications and alterations are included insofar as they come within the scope of the appended claims or equivalents thereof.
It will be appreciated that various of the above-disclosed and other features and functions, or alternatives thereof, may be desirably combined into many other different systems or applications. Also that various presently unforeseen or unanticipated alternatives, modifications, variations or improvements therein may be subsequently made by those skilled in the art which are also intended to be encompassed by the following claims.

## Claims

1. A memory cell operative to store data, the memory cell comprising:
a first cantilever including a conductive portion; and
a second cantilever having and insulated portion and a conductive portion, the second cantilever positioned, at least in part, in overlapping relation to the first cantilever,
wherein at least one of the first and second cantilevers includes at least one lateral support projection extending from a respective at least one side thereof, whereby when an actuating force is applied to at least one of the first and second cantilevers the respective at least one lateral support projection is placed in torsion.

2. The memory cell of claim 1 further comprising an actuator operative to selectively cause the first cantilever to move away from the overlapping relationship by applying the actuating force to the first cantilever.

3. The memory cell of claim 2 wherein the actuator is an electrostatic actuator.

4. The memory cell of claim 1 further comprising an actuator operative to selectively cause the second cantilever to move away from the overlapping relationship by applying the actuating force to the second cantilever.

5. The memory cell of claim 4 wherein the actuator is an electrostatic actuator.

6. The memory cell of claim 1 further comprising:
a gate operative as an electrostatic reference, toward which attractive electrostatic forces act, when at least one of the first cantilever and the second cantilever is electrically charged in relation to the gate.

7. The memory cell of claim 1 further comprising:
a first gate operative to cause the first cantilever to move away from the first natural position when the first gate is charged in reference to the first cantilever; and
a second gate operative to cause the second cantilever to move away from the second natural position when the second gate is charged in reference to the first cantilever.

8. A memory cell operative to store data, the memory cell comprising:
a substrate;
a first cantilever having a supported portion and a free end, the supported portion being supported by at least one lateral support projection projecting along a lateral support projection axis of the first cantilever, the at least one laterally projecting support projection having a fixed end that is fixed in position relative to the substrate, the first cantilever having a first natural position;
a second cantilever having a supported portion and a free end, the supported portion being supported by at least one lateral support projection projecting along a support projection axis of the second cantilever, the at least one laterally projecting support projection having a fixed end that is fixed in position relative to the substrate, the second cantilever having a second natural position, a portion of the second cantilever being in overlapping relation with the first cantilever when the first cantilever is in the first natural position and the second cantilever is in the second natural position; and
an actuating system for sequentially applying torque to and releasing the first and second cantilevers, wherein the torque is sequentially applied about the support projection axes of the first and second cantilevers, whereby the cantilevers are placed in one of two steady state orientations.

9. The memory cell of claim 8 wherein the substrate includes a V-shaped groove and wherein:
the first cantilever includes a first groove following portion that is substantially parallel to a first leg of the V-shaped groove; and
the second cantilever includes a second groove following portion that is substantially parallel to a second leg of the V-shaped groove.

10. The memory cell of claim 8 wherein the actuating system comprises:
a gate operative as an electrostatic reference, toward which attractive electrostatic forces act, when at least one of the first cantilever and the second cantilever is electrically charged in relation to the gate.

11. The memory cell of claim 8 wherein the actuating system comprises:
a first gate operative to cause the first cantilever to move away from the first natural position when the first gate is charged in reference to the first cantilever; and
a second gate operative to cause the second cantilever to move away from the second natural position when the second gate is charged in reference to the first cantilever.