# Patent

## Title
Structure and method of fabricating FINFET with buried channel

## Abstract

A method of manufacturing a fin structure comprises forming a first structure of a first material type on a wafer and forming a buried channel of a second material adjacent sidewalls of the first structure. The second material type is different than the first material type. The structure includes a first structure and a buried channel.

## Background
FIELD OF THE INVENTION
The invention relates generally to a semiconductor structure and method of manufacturing and more particularly to a pFinFET with a buried channel and a method of manufacturing.
BACKGROUND OF THE INVENTION
Fin field-effect transistors (FinFETs) are MOSFET double-gate transistors built on an SOI/bulk semiconductor substrate. In implementation, the gate is wrapped around the channel of the FET, forming a double gate structure. The FinFET device has significantly better control of short channel effect and higher or equivalent current density than conventional CMOS technologies, and may be used in almost all types of integrated circuit designs (i.e., microprocessors, memory, etc.).
In particular, the use of the double gate suppresses Short Channel Effects (SCE), provides for lower leakage, provides for more ideal switching behavior, and then reduce power consumption. In addition, the use of the double gate increases gate area, which allows the FinFET to have better current control, without increasing the gate length of the device. As such, the FinFET is able to have the current control of a larger transistor without requiring the device space of the larger transistor.
In fabrication processes, high quality relaxed SiGe layers on Si has resulted in the demonstration of FETs with enhanced carrier channels. Also, using Ge in the channel can enhance hole channel mobility. Although the physics of carrier scattering are not known inside short-channel FETs, it is known that the enhanced mobility translates into increased device performance, even at very short gate lengths.
To increase mobility, a buried channel can be used for single gate MOSFET. The buried channel can keep carrier away from scattering of gate dielectric interface and then enhance carrier mobility or MOSFET performance. However, MOSFET with a buried channel has worse SCE than conventional MOSFET due to the losing some control of the gate to channel electric potential. It is prefer to use double gate structure for buried channel MOSFET in order to obtain high performance as well as good SCE since double gate MOSFET gives good SCE.
SUMMARY OF THE INVENTION
In a first aspect of the invention, a method of manufacturing a fin structure comprises forming a first structure of a first material type on a wafer and forming a buried channel of a second material type adjacent sidewalls of the first structure. The second material type is different than the first material type.
In another aspect of the invention, the method of forming a structure includes forming a first structure on a wafer comprised of a first material type and forming a second structure of a second material type adjacent at least one sidewall of the first structure. The method further includes forming a layer over one of the first structure and the second structure to form a front gate and a back gate.
In yet another aspect of the invention, a fin structure comprises a first vertical structure of a first material type on a wafer and a buried channel of a second material type, adjacent sidewalls of the first structure. The second material type is different than the first material type.



BRIEF DESCRIPTION OF THE DRAWINGS
FIGS. 1-8 show an embodiment of process steps for forming a structure in accordance with the invention;
FIG. 9 shows a cross sectional view of a gate using the processes in accordance with the invention;
FIG. 10 shows the process of separating the front and back gates in accordance with the invention;
FIG. 11 shows a final structure in accordance with the invention;
FIG. 12 shows an alternative embodiment in accordance with the invention; and
FIGS. 13 and 14 show another embodiment of process steps for forming a structure in accordance with the invention.



DESCRIPTION OF THE EMBODIMENTS OF THE INVENTION
The invention relates to a semiconductor structure and method of manufacturing and more particularly to a FinFet device with a buried channel and a method of manufacturing. In one embodiment, the structure of the invention improves the mobility and hence significantly enhances operating frequency and performance of pMOSFETs. Additionally, by using the fabrication methods and hence achieving the final structure of the invention, it is also possible to more accurately gate control to the channel, as well as increase carrier mobility by keeping the carrier from a rough gate dielectric interface and control velocity overshoot close to the source. In one implementation, the thickness of a buried SiGe layer, in the channel, can be controlled through the fabrication process of the invention in order to achieve the beneficial affects of the invention.
Referring to FIG. 1, a starting structure is shown, which includes a Si fin 12 formed on a BOX 10 (buried oxide). A nitride hardmask 14 is formed over the Si fin 12. The Si fin 12 and nitride hardmask 14 are formed in conventional processes. For example, a Si layer may be bonded to the BOX and nitride film, may be deposited on the Si, respectively, The nitride film may then be patterned, and etched using RIE (reactive ion etch) processes to form the nitride hardmask 14. The Si layer may also be etched using conventional RIE processes, stopping on the BOX 10.
FIG. 2 shows an angle implantation process. In this process, germanium (Ge) is implanted on one side of the structure formed in FIG. 1. In one embodiment, the angle implantation process may be performed on both sides of the structure, as discussed in more detail below. The implantation process is performed on an angle, in the range of approximately 45 degrees; however, other angle implantation processes are also contemplated by the invention. In one embodiment, the implantation energy is about 10 KeV to 30 KeV. The dose of this implantation process may range from about 5e14 to 3e15/cm3. The use of Ge is preferred, in one embodiment, in that subsequent etching steps are selective to the Ge.
FIG. 3 represents an anneal step to remove the Ge implantation damage caused by the implantation process of FIG. 2. In FIG. 3, the annealing process may take place in the range of approximately 800° C. to 1100° C.; although other anneal temperatures are also contemplated by the invention.
In FIG. 4, the Ge doped Si fin 12 may be etched by an etching process selective to the Si. For example, etching may include CF4/CH2F2 or CF4/O2. It is also contemplated that Ge doped part of the Si fin 12 may be etched using a RIE process or other dry etching, selective to Si. The Ge doped Si fin 12 may be etched in the range of approximately 100 Å to 200 Å, depending on the depth of Ge implantation.
In FIG. 5, an epitaxial SiGe film 16 is deposited or grown on the Si fin 12. In one embodiment, the SiGe film 16 is selective to only Si, such that the SIGe is only deposited or grown on the Si fin 12. It should be understood that the SiGe film 16 has a different matrix than that of the Si fin 12. In one embodiment, the SiGe film 16 may range in thickness from about 20 Å to 50 Å. The SiGe film 16 may be formed using any conventional processes such as, for example, CVD. The SiGe will form the buried channel and, in embodiments, is designed to enhance channel mobility in the channel of the FinFET.
In FIG. 6, since the SiGe on the sidewall of the Si fin 12 is not shadowed by nitride hardmaks, the SiGe film 16 on that sidewall can be selectively etched using an anisotropic etching process. This etching process leaves behind the SiGe film 16 in the channel of the FinFET.
FIG. 7 shows the formation of an epitaxial Si layer 18 formed on the SiGe layer 16. The Si layer 18 has a thickness in the range of, for example, 2 nm to 5 nm. In this structure, the SiGe film 16 is now sandwiched between the Si fin 12 and the Si film 18 to form the basis of a bandgap structure.
FIG. 8 shows a gate oxidation process. In particular, a gate oxide film 20 is deposited on the sides of the structure of FIG. 7 using conventional processes. In one implementation, a high-k dielectric may be used as a gate dielectric, such as HfO2, ZrO2, Al2O3, TiO2, La2O3, SrTiO3, LaAlO3, and mixtures thereof. After this step, conventional FinFET processes may be used to build the FinFET. For example, a poly Si layer may be deposited and etched to form the gate, with an angle implantation process performed to form the extension and halo regions. Thereafter, spacer formation with SD implantation and annealing processes, as one example, may be provided to form the structure.
FIG. 9 represents a cross section of the gate, after the processes of FIG. 8. In FIG. 9, one side of the gate oxide forms the front gate 22, preferably the side with the buried SiGe layer 18. The other side of the gate oxide forms the back gate 24. A doped poly Si gate is provided over the structure.
FIG. 10 shows the process of separating the front gate 22 and back gate 24 in accordance with the invention. In this process, an oxide 26 is deposited over the structure of FIG. 9. In FIG. 11, as a final structure, the oxide 26 is polished using, for example, chemical mechanical polishing (CMP) stopping at the top of the nitride hardmask 14 to separate the front gate 22 and the back gate 24.
As should be understood, the back gate 24 is used to adjust threshold voltage of the device and the front gate 22 is used to control the electrical current of the device. Also, by having the control to adjust the Ge implantation and SiGe epi process and hence the depth of subsequent selective etching process, it is also possible, using the processes of the invention, to control the thickness of the buried channel, e.g., SiGe buried layer. This provides flexibility in the fabrication process to have the location of the SiGe layer closer to the gate, itself, for gate control.
In an alternative process, referring to FIG. 12, the Ge implantation process may take place on both sides of the structure to build a symmetric FinFET. The implantation process is performed on an angle, in the range of approximately 45 degrees; however, other angle implantation processes are also contemplated by the invention. In one embodiment, the implantation energy is about 10 KeV to 30 KeV. The dose of this implantation process may range from about 1e15 to 3e15/cm3. The use of Ge is preferred, in one embodiment, in that subsequent etching steps are selective to the Ge for control.
In the embodiment of FIG. 12, an annealing step will be used to remove the Ge implantation damage caused by the implantation process on both sides of the structure. The Si fin 12 may then be etched, selective to the Ge, using wet or dry etching processes, on both sides to form a symmetrical structure. An epitaxial SiGe film 18 is deposited or grown on the Si fin 12, on both sides, in accordance with above criteria. An epitaxial Si layer 20 is then deposited, sandwiching the SiGe film 18. The epi Si layer 20 may be in the range of approximately 1-2 nm. A gate oxide film 20 is deposited on the sides of the structure using conventional processes. In one implementation, a high-k dielectric may be used as a gate dielectric, such as HfO2ZrO2, Al2O3, TiO2, La2O3, SrTiO3, LaAlO3and mixtures thereof. After this step, conventional FinFET processes may be used to build the FinFET. The front gate 22 and back gate 24 may then be separated in accordance with the invention, as discussed above.
FIGS. 13 and 14 show another embodiment of process steps for forming a structure in accordance with the invention. In the structure of this embodiment, a relaxed SiGe fin 26 is formed on the BOX 10. By way of one example, the relaxed SiGe layer and nitride film, respectively, may be deposited on the BOX 10. The nitride film may then be patterned, and etched using RIE processes to form the nitride hardmask 14. The SiGe layer may also be etched using conventional RIE processes, stopping on the BOX 10, to form the relaxed SiGe fin 26.
In FIG. 14, an epitaxial thin strained Si layer 28 may be grown on the relaxed SiGe fin. The epitaxial Si layer is selective to the SiGe film, and may be a thin layer of approximately 2 nm to 5 nm on the sidewalls of the relaxed SiGe fin 26. Subsequent to the growth of the thin Si layer 28, conventional process steps, as described above, can be used to form the FinFET, starting with, for example, the process steps of FIG. 8.
While the invention has been described with reference to exemplary embodiments, it is understood that the words, which have been used herein, are words of description and illustration, rather than words of limitation. Changes may be made, within the purview of the appended claims, without departing from the scope and spirit of the present invention in its aspects. Thus, although the invention has been described herein with reference to particular materials and embodiments, the invention is not intended to be limited to the particulars disclosed herein; rather, the invention extends to all functionally equivalent structures, methods and uses, such as are within the scope of the appended claims.

## Claims

1. A method of manufacturing a fin structure, comprising:
forming a first structure of a first material type on a wafer;
forming at least one undercut in at least one sidewall of the first structure; and
forming a buried channel of a second material type in the at least one undercut and adjacent the at least one sidewall of the first structure, the second material type being different than the first material type.

2. The method of claim 1, wherein the buried channel is controlled to a certain depth.

3. The method of claim 1, further comprising forming a layer of the first material type on sidewalls of the buried channel.

4. The method of claim 1, wherein the buried channel is formed by forming a different material type within the at least one undercut and adjacent to the at least one sidewall of the first structure and forming an epitaxial layer over the buried channel.

5. A method of manufacturing a fin structure, comprising forming a first structure of a first material type on a wafer and forming a buried channel of a second material type adjacent sidewalls of the first structure, the second material type being different than the first material type,
wherein the forming the first structure includes forming a fin of the first material type; and
wherein forming the buried channel includes:
implanting a first type atom into the sidewall of the fin;
selectively trimming the sidewall of the fin to form at least one undercut;
forming the buried channel within the at least one undercut by depositing or growing the second material type within the at least one undercut and forming an epitaxial layer over the second material type.

6. The method of claim 5, further comprising:
forming a gate oxide or high-k dielectric over the epitaxial layer to form a front gate and a back gate dielectrics;
depositing an oxide over the doped poly Si gate; and
etching the oxide to the doped poly Si gate.

7. The method of claim 5, wherein the first type atom is germanium (Ge) and the trimming step is etching Ge doped Si selective to Si.

8. The method of claim 5, wherein the second material type is an epitaxial SiGe film deposited or grown in a range from about 20 | to 50 Å.

9. The method of claim 5, wherein the implanting process is performed at an implantation energy of about 10 KeV to 30 KeV and a dose in a range from about 5e14 to 3e15/cm3.

10. The method of claim 5, further comprising annealing to remove implantation damage caused by the implanting, the annealing is performed in a range of approximately 800° C. to 1100° C.

11. The method of claim 5, wherein the trimming is a wet or dry etching process that etches Ge doped Si selective to pure Si.

12. The method of claim 5, further comprising:
forming the epitaxial layer over the sidewall;
forming a gate oxide or high-k dielectric over the epitaxial layer to form a front gate and a back gate;
forming a doped poly Si gate;
depositing an oxide over the doped poly Si gate; and
etching the oxide to the doped poly Si gate.

13. The method of claim 5, wherein:
the implanting and trimming is performed on both sides of the fin to form undercut sections on both sides of the fin;
the buried channel is provided by forming the different material type within the undercut sections adjacent to both sides of the fin and forming the epitaxial layer over the different material type within the undercut sections.

14. The method of claim 13, wherein the buried channel is comprised of SiGe.

15. A method of forming a structure, comprising:
forming a first structure on a wafer comprised of a first material type;
forming a second structure of a second material type adjacent at least one sidewall of the first structure;
forming a layer over one of the first structure and the second structure to form a front gate and a back gate;
implanting a first type dopant into the at least one sidewall of the first structure;
selectively trimming the at least one sidewall of the first to form at least one undercut; and
forming a buried channel within the at least one undercut by forming the second structure within the at least one undercut and forming the layer over the at least one sidewall and the buried channel.