# Patent

## Title
Manufacturing methods of micro electromechanical switch

## Abstract

A method of fabricating a micro electromechanical switch on a substrate comprising piezoelectric layers, metal electrodes alternated with the layers and contact pads. Cross voltages are applied to the electrodes, in order to obtain an S-shaped deformation of the switch and allow contact between the contact pads. Additionally, a further electrode can be provided on a substrate where the switch is fabricated, to allow an additional electrostatic effect during movement of the piezoelectric layers to obtain contact between the contact pads. The overall dimensions of the switch are very small and the required actuation voltage is very low, when compared to existing switches.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
This patent application is a divisional application of Ser. No. 10/421,327, now U.S. Pat. No. 7,098,577 B2 filed on Apr. 22, 2003, which application claims the benefit of U.S. Provisional Application Ser. No. 60/420,175, filed on Oct. 21, 2002. The present document is also related to the divisional application filed on even date herewith, U.S. application Ser. No. 11/045,637 and the copending and commonly assigned patent application documents entitled “Variable Capacitance Membrane Actuator for Wide Band Tuning Microstrip Resonators and Filters,” U.S. Pat. No. 7,085,121 filed on Apr. 22, 2003, and “Piezoelectric Actuator for Tunable Electronic Components,” U.S. application Ser. No. 10/421,303 filed on Apr. 22, 2003. The contents of these related applications are hereby incorporated by reference herein.


FIELD OF THE INVENTION
The present invention relates to micro-electromechanical systems (MEMS) and, in particular, to a micromachined piezoelectric switch for tunable electronic components which can achieve substantial deflections, while keeping the overall switch dimensions small.
BACKGROUND OF THE INVENTION
MEMS switches have a wide variety of uses. They can, for example, conduct RF current in applications involving the use of antenna phase shifters, in the tuning of reconfigurable antenna elements and in the fabrication of tunable filters.
MEMS switches provide several advantages over conventional switches which use transistors. These advantages include lower insertion loss, improved electrical isolation over a broad frequency range, and lower power consumption. Also, as this type of switch is fabricated using existing integrated circuit (IC) processing technologies, production costs are relatively low. Thus, MEMS switches manufactured using micromachining techniques have advantages over conventional transistor-based switches because the MEMS switches function like macroscopic mechanical switches, but without the associated bulk and relatively high cost.
The energy that must be moved through the switch control in order to activate the MEMS switch, and thus the energy dissipated by the MEMS switch, is a function of the actuation voltage. Therefore, in order to minimize the energy dissipated by the MEMS switch, it is desirable to minimize the actuation voltage of the switch.
Current MEMS switches operate through adoption of electrostatic techniques. In order to have low actuation voltages (about 50 V), existing electrostatic actuation switches need to have relatively large (about 300 to 500 microns) lateral dimensions. This results in an increased response time. A substantial reduction in the size of these switches is not possible as that significantly increases the actuation voltages. Therefore, electrostatic actuation MEMS switches cannot be further miniaturized as required for further applications. The large dimensions also reduce the restoring force for switch release, thus contributing to a ‘stiction’ problem that essentially renders the switch useless. In particular, the contacting pads tend to adhere to each other after a prolonged use.
Piezoelectric structures can be used to realize tunable capacitors, as disclosed in “Micromachined RF Mems tunable capacitors using piezoelectric actuators”, Jae Y. Park, Young J. Yee, Hyo J. Nam, and Jong U. Bu, IEEE 2001.
In view of the foregoing, there is a need for a micro-electromechanical switch having a low actuation voltage and a fast response time.
SUMMARY OF THE INVENTION
The present invention provides a novel layered (unimorph, bimorph or multimorph) piezoelectric switch that requires a very low actuation voltage (about 10 V), while keeping the overall lateral dimensions small (about 60 μm).
This is made possible by applying opposing (or crossed) actuation voltages across the length of the switch, causing a ‘S’ shaped switch deformation. The switch has a fast response time (about 2 microseconds) and avoids the problems associated with conventional electrostatic switches.
Additionally, this is made possible by a piezoelectric-electrostatic switch that uses a novel approach of combining the piezoelectric and electrostatic effects without using any extra electrodes on the active layer, allowing voltages significantly lower as compared to electrostatic switches of similar dimensions.
According to a first aspect of the present invention, a piezoelectric actuator is provided, comprising: an upper piezoelectric layer; a lower piezoelectric layer; a first electrode placed under the lower piezoelectric layer; a second electrode and a third electrode placed between the upper layer and the lower layer; and a fourth electrode placed above the upper piezoelectric layer.
According to a second aspect of the present invention, a deformable micro electromechanical structure is provided, comprising: a piezoelectric layer having a first side and a second side; a first electrode connected with the first side of the piezoelectric layer; a second electrode connected with the second side of the piezoelectric layer and with a first voltage having a first polarity; and a third electrode connected with the second side of the piezoelectric layer and with a second voltage having a second polarity opposite the first polarity, whereby said structure undergoes a substantially S-shaped deformation upon application of said voltage.
According to a third aspect of the present invention, a method of fabricating a micro electromechanical switch on a substrate is provided, the method comprising the steps of: providing a substrate; depositing a first metal layer on the substrate; depositing a sacrificial layer on the substrate and on the first metal layer; depositing a second metal layer on the sacrificial layer; depositing a support layer on the sacrificial layer and the second metal layer; depositing a third metal layer on the support layer; depositing a first piezoelectric layer on the third metal layer; depositing a fourth metal layer on the first piezoelectric layer; patterning the fourth metal layer to form two separate metal layers on the first piezoelectric layer; and removing the sacrificial layer.
According to a fourth aspect of the present invention, a method of fabricating a micro electromechanical switch on a substrate is provided, comprising the steps of: providing a substrate; depositing a first metal layer on the substrate; depositing a sacrificial layer on the substrate and on the first metal layer; depositing a support layer on the sacrificial layer; depositing a second metal layer on the support layer and patterning the second metal layer to form a first contact pad; depositing a separation layer on the support layer and the first contact pad; depositing a third metal layer on the separation layer; depositing a first piezoelectric layer on the third metal layer; depositing a fourth metal layer on the first piezoelectric layer; and removing the sacrificial layer.
According to a fifth aspect of the present invention, a micro electromechanical switch formed on a substrate is provided, comprising: an upper piezoelectric layer; a lower piezoelectric layer; a first electrode placed under the lower piezoelectric layer; a second electrode placed between the upper piezoelectric layer and the lower piezoelectric layer; and a third electrode placed on the upper piezoelectric layer.
According to a sixth aspect of the present invention, a micro electromechanical switch is provided, formed on a substrate and operating under a combined piezoelectric and electrostatic effect, the switch comprising: a first piezoelectric layer; a second piezoelectric layer; a first electrode placed under the second piezoelectric layer; a second electrode placed between the first piezoelectric layer and the second piezoelectric layer; a third electrode placed on the first piezoelectric layer; and a fourth electrode placed on the substrate.
According to a seventh aspect, a method of fabricating a micro electromechanical switch on a substrate is provided, comprising the steps of: providing a substrate; depositing a first metal layer on the substrate; patterning the first metal layer to form two separate metal layers on the substrate; depositing a sacrificial layer on the substrate and on the two separate metal layers; depositing a second metal layer on the sacrificial layer; depositing a support layer on the second metal layer and the sacrificial layer; depositing a third metal layer on the support layer; depositing a first piezoelectric layer on the third metal layer; depositing a fourth metal layer on the first piezoelectric layer; and removing the sacrificial layer.
According to an eighth aspect, a method of fabricating a micro electromechanical switch on a substrate is provided, comprising the steps of: providing a substrate; depositing a first metal layer on the substrate; patterning the first metal layer to form two separate metal layers on the substrate; depositing a sacrificial layer on the substrate and on the two separate metal layers; depositing a support layer on the sacrificial layer; depositing a second metal layer on the support layer and patterning the second metal layer to form a first contact pad; depositing a separation layer on the support layer and the first contact pad; depositing a third metal layer on the separation layer; depositing a first piezoelectric layer on the third metal layer; depositing a fourth metal layer on the first piezoelectric layer; and removing the sacrificial layer.
According to a ninth aspect, a micro electromechanical switch is provided, formed on a substrate and operating under a combined piezoelectric and electrostatic effect, the switch comprising: a first piezoelectric layer; a second piezoelectric layer; a first electrode placed under the second piezoelectric layer; a second electrode and a third electrode placed between the first piezoelectric layer and the second piezoelectric layer; a fourth electrode placed on the first piezoelectric layer; and a fifth electrode placed on the substrate.
Compared to existing switch designs, the invention possesses substantially reduced lateral dimensions, while further lowering actuation voltages to about 10 V. This small size enables the invention to achieve much faster (about 1 microsecond) response times. In addition, a large restoring force can be generated to release the switch, thereby alleviating the severe problem of stiction associated with most switch designs.



BRIEF DESCRIPTION OF THE DRAWINGS
The features and advantages of the present invention will become better understood with regard to the following description, appended claims, and accompanying drawings where:
FIGS. 1A-1C show schematic views of a two-layered piezoelectric actuator with parallel polarization directions, to be used in accordance with the present invention;
FIGS. 2A-2C show views of a MEMS switch according to a first embodiment of the present invention, wherein FIG. 2A shows the switch in an open position and FIG. 2C shows the switch in a closed position;
FIGS. 3A-3B show views of a MEMS switch according to a second embodiment of the present invention, wherein FIG. 3A shows the switch in an open position and FIG. 3B shows the switch in a closed position;
FIGS. 4A-4F and 5A-5E show process steps in fabricating the switch of FIGS. 2A-2C;
FIGS. 6A-6F show an alternate embodiment of the fabricating steps shown in FIGS. 4C-4F, respectively;
FIGS. 7A-7B show views of a MEMS switch according to a third embodiment of the present invention, wherein FIG. 7A shows the switch in an open position and FIG. 7B shows the switch in a closed position;
FIGS. 8A-8C show views of a MEMS switch according to a fourth embodiment of the present invention, wherein FIG. 8A shows the switch in an open position and FIG. 8C shows the switch in a closed position;
FIGS. 9A-9F and 10A-10E show process steps in fabricating the switch of FIGS. 8A-8C;
FIGS. 11A-11F show an alternate embodiment of the fabricating steps shown in FIGS. 9C-9F, respectively; and
FIGS. 12A-12B show views of a MEMS switch according to a fifth embodiment of the present invention, wherein FIG. 12A shows the switch in an open position and FIG. 12B shows the switch in a closed position.



DETAILED DESCRIPTION OF THE INVENTION
FIGS. 1A to 1C show schematic views of a two-layered piezoelectric actuator with parallel polarization directions to be used in accordance with the present invention. The polarization directions are shown by the small arrows depicted within each layer. The actuator shown in FIGS. 1A-1C comprises an upper layer 1 and a lower layer 2. The layers 1, 2 are made, for example, of lead zirconate titanate (PZT) or lead lanthanum zirconate titanate (PLZT).
Electrodes 3, 4, and 5, shown in FIGS. 1A-1C, are alternated with layers 1 and 2. Layers 1 and 2 deflect on applying voltages between the electrodes 3, 4 and 5. On choosing the proper polarities for the voltage, a tensile force T1 or thrusting force T2 can be generated in the plane of the layers 1, 2. The forces T1, T2 will create a deflection in the middle section of the layers 1, 2. For a given piezoelectric material such as PZT or PLZT, the amount of deflection and force depends on the dimension of the layers, which can be adjusted to meet the requirements of the particular application. When no voltage is applied, the actuator does not cause the piezoelectric layer to be deflected, as shown in FIG. 1A. When voltage having a first polarity is applied, for example a positive polarity, the actuator causes the piezoelectric layer to be deflected in a first direction, for example upwards, as shown in FIG. 1B. When voltage having a second polarity, opposite to the first polarity (i.e. having a sign which is different from the sign of the first polarity), is applied, for example a negative polarity, the actuator causes the piezoelectric layer to be deflected in a second direction, for example downwards, as shown in FIG. 1C.
FIGS. 2A-2C show a switch according to a first embodiment of the present invention. The switch, generally designated 100, is fabricated on a substrate 117 using generally known microfabrication techniques, such as masking, etching, deposition, and lift-off. In a preferred embodiment, the switch 100 is directly formed on the substrate 117. Alternatively, the switch 100 may be discreetly formed and then bonded to the substrate 117.
The switch 100 comprises an upper piezoelectric layer 110, a lower piezoelectric layer 111, a first electrode 112 placed under the lower layer 111, a second electrode 113 placed between the upper layer 110 and the lower layer 111, a third electrode 114 placed between the upper layer 110 and the lower layer 111, a fourth electrode 115 placed above the upper layer 110, and a Si3N4 layer 116 placed under the electrode 112. In the preferred embodiment, shown in the figure, the electrode 112 extends along the whole length of the piezoelectric layer 111, in order to avoid contact between the piezoelectric layer 111 and the Si3N4 layer 116, which contact is sometimes undesired. A spacer 118 acting as a cantilever anchor separates the switch 100 from the substrate 117. Additionally, a first contact pad 119 is provided under the Si3N4 layer 116, and a second contact pad 120 is provided above the substrate 117. The first contact pad 119 operates as an electrical contact of the switch 100. FIG. 2A shows the switch in an ‘OFF’ position (contact pads 119, 120 separated). The contact pad 119, typically comprising a metal that does not oxidize easily, such as gold, platinum, titanium-platinum or titanium-gold, is positioned so as to face the second contact pad 120 on the substrate 117. Also the contact pad 120 typically comprises a metal that does not oxidize easily, such as gold, or platinum.
The switch 100 has a bilaminar cantilever (or bimorph) structure, that is, the structure comprises two active layers, layer 110 and layer 111. Due to the structure of the switch and to the mechanical properties of the piezoelectric material used for layers 110 and 111, the bimorph structure is piezoelectrically actuatable and has the advantage of exhibiting a very high ratio of displacement to actuation voltage. As a consequence, a relatively large displacement (approximately 1-2 microns) can be produced in the bimorph cantilever in response to a relatively low switching voltage (approximately 10 V).
The thickness of the layers 110, 120 and electrodes 112, 113, 114 and 115 and the height of the cantilever anchor 118 can be tightly controlled using known fabrication methods. The distance between the contact pads 119, 120 is, for example, about 1 micron. The length of the piezoelectric layers is, for example, about 70 microns. The piezoelectric layers 110, 111 are made, for example, of a PZT layer or a PLZT layer.
FIG. 2B shows in greater detail the preferred shape of the second electrode 113 and third electrode 114 placed above the lower layer 111 and comprising respective contacts 113′ and 114′ to a voltage source, not shown in the Figure. For example, the second electrode 113 can be connected to a negative voltage (e.g. −10 V) and the third electrode 114 can be connected to a positive voltage (e.g. +10 V).
The operation of the first embodiment will now be discussed with reference to FIG. 2C. In operation, the switch 100 is normally in an open, or “OFF,” position as shown in FIG. 2A. The switch 100 is actuated to the closed, or “ON,” position by application of a voltage between the four electrodes 112, 113, 114, and 115. More precisely, a positive voltage +V is applied to the third electrode 114, a negative voltage −V is applied to the second electrode 113, and the first electrode 112 and fourth electrode 115 are kept at ground voltage. When the voltage is applied, the left portion of the bimorph structure of FIG. 2C deflects as shown in FIG. 1C, and the right portion of the bimorph structure of FIG. 2C deflects as shown in FIG. 1B.
As a consequence, an ‘S’ shaped deformation or deflection is obtained, as shown in FIG. 2C. The ‘S’ shaped deformation is obtained by virtue of the ‘crossed’ actuation voltages applied to the second and third electrodes 113, 114, where the second electrode 113 is provided with a voltage having a first polarity (for example a negative voltage −V) and the third electrode 114 is provided with a voltage having a second polarity different from the first polarity (for example a positive voltage +V). By means of the deflection, the metal pad 119 is moved downwards and is brought into contact with the pad 120, thus actuating the switch to the “ON” position.
Also structures having a single piezoelectric or active layer are possible. An example of such structures is shown in FIGS. 3A and 3B. FIGS. 3A and 3B are similar to FIGS. 2A and 2C, respectively, the main difference being that the top piezoelectric layer 110 and the fourth electrode 115 are not provided. Also in this additional embodiment, an ‘S’ shaped deformation is obtained, due to the presence of the electrodes 213, 214 an to the opposite voltages −V, +V, shown in FIG. 3B, applied thereto.
One possible method of fabricating the switch 100 will now be described in FIGS. 4A-4F and FIGS. 5A-5E. The switch 100 may be manufactured using generally known microfabrication techniques, such as masking, etching, deposition and lift-off. The switch 100 may be fabricated using, for example, a foundry-based polysilicon surface-micromachining process, or a metal/insulator surface-micromachining process. The substrate 117 for one preferred embodiment may be a GaAs wafer, although other materials such as GaN, InP, ceramics, quartz or silicon may be used. Note that the switch 100 may be fabricated by processes other than that depicted in FIGS. 4 and 5. Further, while FIGS. 4 and 5 depict multiple separate fabrication steps, alternative fabrication processes may allow several separate steps to be combined into fewer steps. Finally, alternative fabrication processes may use a different sequence of steps.
FIG. 4A shows a first step of the process, where the substrate 117 is provided and a first metal layer is deposited on the substrate 117. The first metal layer is patterned to form the bottom contact pad 120 using, for example, electron beam evaporation and liftoff. The metal layer is, for example, a 0.2 μm thick Ti/Pt layer.
FIG. 4B shows a second step of the process, where a sacrificial layer 130 is deposited on the substrate 117 and on the metal layer forming the contact pad 120. A sacrificial layer is a layer which is first deposited in a step of a process and then removed in a further step of the process. The thickness of the layer 130 determines the air gap (i.e. the distance between the contact pads 119 and 120) for the switch. The sacrificial layer 130 is, for example, a 1 μm thick layer made of silicon dioxide (SiO2) which may be deposited using PECVD (Plasma Enhanced Chemical Vapor Deposition).
FIG. 4C shows a third step of the process, where a second metal layer forming the top contact pad 119 of the switch 100 is deposited on the sacrificial layer 130. The second metal layer is patterned to form the top contact pad 119 using, for example, electron beam evaporation and liftoff. The second metal layer is, for example, a 0.2 μm thick Ti/Pt layer.
FIG. 4D shows a fourth step of the process, where the sacrificial layer 130 is etched (for example dry or wet etching) after deposition and patterning of a photoresist layer, not shown in the figure. The etching step creates a hole 150 in the structure.
FIG. 4E shows a fifth step of the process, where a layer 131 is deposited above the sacrificial layer 130, the top contact pad 119 and the hole 150. The layer 131 is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD. The layer 131 will be patterned to form the layer 116 shown in FIG. 2A. The use of the layer 131 is preferred, because it provides support and mechanical strength to the final released structure. The thickness of the layer 131 may be adjusted to compensate for any stress related bending.
The layer 131 can be patterned at the present stage or later, depending on the etch method used for the piezoelectric layer 111 in FIG. 5A below. Should the piezoelectric layer 111 of FIG. 5A be etched through a dry etch process, the layer 131 can be patterned at the present stage. Should the piezoelectric layer 111 of FIG. 5A be etched through a wet etch process, the layer 131 is preferably patterned at a later stage, because it serves to protect the underlying sacrificial layer 130 from the etching chemicals, some of which may attack the sacrificial layer 130.
FIG. 4F shows a sixth step of the process, where a third metal layer, forming the first electrode 112, is deposited above the layer 131. The layer forming the first electrode 112 is, for example, a 0.2 μm thick Ti/Pt layer deposited using liftoff technique.
FIG. 5A shows a seventh step of the process, where a first piezoelectric layer, forming the lower piezoelectric layer 111, is deposited. The layer 111 is, for example, a 0.5 μm thick PZT or PLZT layer deposited using, for example, sol-gel deposition technique. Such technique is known to the person skilled in the art and will not be described in detail. The process of depositing the layer 111 preferably involves an annealing step at about 500-700° C. The layer 111 can be patterned using a variety of dry or wet etch techniques.
FIG. 5B shows an eighth step of the process, where a fourth metal layer is deposited above the layer 111 and patterned to form the second electrode 113 and the fourth electrode 114. The electrodes 113 and 114 are formed, for example, by a 0.2 μm thick Ti/Pt layer deposited using electron beam evaporation and liftoff.
FIG. 5C shows a ninth step of the process, where a second piezoelectric layer forming the upper piezoelectric layer 110 is deposited. The layer 110 is, for example, a 0.5 μm thick PZT or PLZT layer deposited using, for example, a sol-gel deposition technique.
FIG. 5D shows a tenth step of the process, where a fifth metal layer forming the fourth electrode 115 is deposited above the upper piezoelectric layer 110. The fifth metal layer is, for example, a 0.2 μm thick Ti/Pt layer deposited using electron beam evaporation and liftoff.
FIG. 5E shows an eleventh step of the process, where the sacrificial layer 130 is removed by using chemical release methods known in the art, for example by means of hydrofluoric acid (HF).
With reference to the single-layered structure shown in FIGS. 3A and 3B, such structure can be obtained through the steps shown in FIGS. 4A-4F combined with the steps shown in FIGS. 5A, 5B and 5E.
It will also be appreciated that the spacer 118 shown in FIGS. 2A and 2C is formed, in the preferred embodiment, by the left portion of the layers 111 and 131.
FIGS. 6A-6F show an alternative embodiment of the steps shown in FIGS. 4C-4F, respectively.
FIG. 6A shows an alternate third step of the process, where the sacrificial layer 130 is etched (for example dry or wet etching) after deposition and patterning of a photoresist layer, not shown in the figure. The etching step creates the hole 150 in the structure.
FIG. 6B shows an alternate fourth step of the process, following the alternate third step of FIG. 6A, where a layer 331 is deposited above the sacrificial layer 130. The layer 331 is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD. The layer 331 is patterned to form portions 331a and 331b. The region between portions 331a and 331b is indicated 160.
FIG. 6C shows an alternate fifth step of the process, following the alternate fourth step of FIG. 6B, where the region 160 is dry or wet etched to form a trench 170 having a preferred depth of about 0.25 μm to about 0.5 μm.
FIG. 6D shows an alternate sixth step of the process, following the alternate fifth step of FIG. 6C, where a metal layer forming a top contact pad 319 is deposited and patterned on the sacrificial layer 130, in and above the trench 170.
FIG. 6E shows an alternate seventh step of the process, following the alternate sixth step of FIG. 6D, where a non-metal separation layer 331c is deposited above the layers 331a, 331b and the top contact pad 319. The layer 331c is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD.
FIG. 6F shows an alternate eight step of the process, following the alternate seventh step of FIG. 6E, where a metal layer 112 is deposited above the layer 331c. 
The alternate embodiment shown in FIGS. 6A-6F ensures that the top contact pad 319 is held more securely between the Si3N4 and PZT layers and that a better contact with the bottom pad 120 is obtained.
FIGS. 7A-7B show a switch according to a third embodiment of the present invention, where only three electrodes are used, and cross voltages are applied to the upper and lower electrodes.
FIG. 7A shows a switch 300 comprising an upper piezoelectric layer 310, a lower piezoelectric layer 311, a first or lower electrode 312 placed under the lower layer 311, a second or middle electrode 313 placed between the upper layer 310 and the lower layer 311, and a third or upper electrode 315 placed above the upper layer 310. A Si3N4 layer 316 is connected to the electrode 312 and placed under the electrode 312. The switch 300 is placed above a substrate 317 and spaced from the substrate 317 by means of a spacer 318. Additionally, a first contact pad 319 is provided under the second electrode 312 and a second contact pad 320 is provided above the substrate 317.
Also in the third embodiment, an ‘S’ shaped deformation or deflection is obtained upon application of a voltage, as shown in FIG. 7B. The ‘S’ shaped deformation is obtained by virtue of the ‘crossed’ actuation voltages applied to the lower and upper electrodes 312, 315, where the lower electrode 312 is provided with a voltage having a first polarity (for example a negative voltage −V) and the upper electrode 315 is provided with a voltage having a second polarity different from the first polarity (for example a positive voltage +V). By means of the deflection, the metal pad 319 is moved downwards and is brought into contact with the pad 320, thus actuating the switch to the “ON” position.
As already pointed out above, the third embodiment allows only three electrodes to be used instead of four. However, higher voltages than those employed in the first two embodiments are required.
FIGS. 8A-8C show a switch according to a fourth embodiment of the present invention, where switching occurs according to a combination between electrostatic effect and piezoelectric effect. In particular, combination of the electrostatic effect with the embodiment of FIGS. 7A and 7B is shown.
FIG. 8A shows a switch 400 comprising an upper piezoelectric layer 410, a lower piezoelectric layer 411, a first or lower electrode 412 placed under the lower layer 411, a second or middle electrode 413 placed between the upper layer 410 and the lower layer 411, and a third or upper electrode 415 placed above the upper layer 410. A Si3N4 layer 416 is connected to the electrode 412 and placed under the electrode 412. The switch 400 is placed above a substrate 417 and spaced from the substrate 417 by means of a spacer 418. Additionally, a first contact pad 419 is provided under the second electrode 412 and a second contact pad 420 is provided above the substrate 417. The distance between contact pads 419 and 420 is preferably 1 μm.
In this fourth embodiment, an additional electrode 421 is provided on the substrate 417. The presence of the additional electrode 421 allows the piezoelectric effect of the switch to be combined with an electrostatic effect. The combination of the two effects has the advantage of significantly lowering the actuation voltages as compared to conventional electrostatic switches of similar dimensions.
FIG. 8B shows a schematic top section of the structure of FIG. 8A, taken along line 1-1 of FIG. 8A. FIG. 8B shows the support wall 418, the top electrode 415, and the top pad 419. Also shown in FIG. 8B is an exemplary form of a contact 450 between the electrode 415 and a voltage source (not shown). As shown in FIG. 8B, the electrode 415 is preferably T-shaped. In this way, a larger area of the electrode 415 is obtained, with corresponding increase of the electrostatic actuation effect.
Dimension ‘a’ of FIG. 8B is preferably 30 μm long. Dimensions ‘b’ and ‘d’ are preferably 10 μm long. Dimension ‘c’ is preferably 35 μm long. Dimension ‘e’ is preferably 5 μm long. Dimension f is preferably 10 μm long.
Also in the fourth embodiment, an ‘S’ shaped deformation or deflection is obtained upon application of a voltage, as shown in FIG. 8C. The ‘S’ shaped deformation is obtained by virtue of the ‘crossed’ actuation voltages applied to the lower and upper electrodes 412, 415, where the lower electrode 412 is provided with a voltage having a first polarity (for example a negative voltage −V) and the upper electrode 415 is provided with a voltage having a second polarity different from the first polarity (for example a positive voltage +V). By means of the deflection, the metal pad 419 is moved downwards and is brought into contact with the pad 420, thus actuating the switch to the “ON” position.
When applying opposite voltages to the lower and upper electrodes, a large initial deflection is obtained due to the piezoelectric effect. This places the electrodes for electrostatic actuation much closer together, and a relatively small increase in the actuation voltage causes the switch to close. In particular, the piezoelectric component of the attractive force is usually linear with the dimension of the gap, while the electrostatic component of the attractive force is very small when the gap is large and very high when the gap is small.
The actuation voltage of a switch having a combined piezoelectric-electrostatic effect of FIG. 8C is in the range of 30-40 V. In the absence of the piezoelectric effect, i.e. for a purely electrostatic switch of similar dimensions, an actuation voltage of about 80 V would be needed. Hence, the embodiment shown in FIGS. 8A-8C achieves a significant lowering of the actuation voltage when compared with prior art electrostatic switches. The response time is about 4 μs.
FIG. 9A-9F and 10A-10E show one possible method of fabricating the switch 400 described in FIGS. 8A-8C. The switch 400 may be manufactured using generally known microfabrication techniques, such as masking, etching, deposition and lift-off. The switch 400 may be fabricated using, for example, a foundry-based polysilicon surface-micromachining process, or a metal/insulator surface-micromachining process. The substrate 417 for one preferred embodiment may be a GaAs wafer, although other materials such as Si, GaN, InP, ceramics, or quartz may be used. Note that the switch 400 may be fabricated by processes other than that depicted in FIGS. 9 and 10. Further, while FIGS. 9 and 10 depict multiple separate fabrication steps, alternative fabrication processes may allow several separate steps to be combined into fewer steps. Finally, alternative fabrication processes may use a different sequence of steps.
FIG. 9A shows a first step of the process, where a substrate 417 is provided and a first metal layer is deposited on the substrate 417. The metal layer is patterned to form the bottom contact pad 420 and the bottom electrode 421 using, for example, electron beam evaporation or liftoff. The metal layer is, for example, a 0.2 μm thick Ti/Pt layer.
FIG. 9B shows a second step of the process, where a sacrificial layer 430 is deposited on the substrate 417 and on the bottom contact pad 420 and bottom electrode 421. The thickness of the layer 430 determines the air gap for the switch. The layer 430 is, for example, a 1 μm thick layer made of SiO2, which is deposited using PECVD.
FIG. 9C shows a third step of the process, where a second metal layer is deposited and patterned to form the top contact pad 419.
FIG. 9D shows a fourth step of the process, where the layer 430 is etched (for example dry or wet etching) after deposition and patterning of a photoresist layer, not shown in the figure. The etching step creates a hole 450 in the structure.
FIG. 9E shows a fifth step of the process, where a layer 431 is deposited. The layer 431 is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD. The layer 431 forms the layer 416 shown in FIGS. 8A and 8C. The presence of a layer 431 is preferred, because it provides mechanical strength to the final released structure. Additionally, the layer 431 prevents a short-circuit between the electrodes 412 and 421 when the switch is closed. The thickness of the layer 431 may be adjusted to compensate for any stress related bending.
Similarly to what explained with reference to FIG. 4E, the layer 431 can be patterned at the present stage or later, depending on the etch method used for the piezoelectric layer 411 in FIG. 10A below. Should the piezoelectric layer 411 of FIG. 10A be etched through a dry etch process, the layer 431 can be patterned at the present stage. Should the piezoelectric layer 411 of FIG. 10A be etched through a wet etch process, the layer 431 is preferably patterned at a later stage, because it serves to protect the underlying layer 430 from the etching chemicals, some of which may attack the layer 430.
FIG. 9F shows a sixth step of the process, where a second metal layer, forming the first electrode 412, is deposited above the layer 431. The second metal layer is, for example, a 0.1 μm thick Ti/Pt layer deposited using liftoff technique.
FIG. 10A shows a seventh step of the process, where a first piezoelectric layer forming the lower piezoelectric layer 411 is deposited. The layer 411 is, for example, a 0.5 μm thick PZT or PLZT layer deposited using a sol-gel deposition technique. The process of depositing the layer 411 involves an annealing step at about 500-700° C. The layer 411 can be patterned using a variety of dry or wet etch techniques.
FIG. 10B shows an eighth step of the process, where a third metal layer, forming the second electrode 413, is deposited above the layer 411. The electrode 413 is formed, for example, by a 0.1 μm thick Ti/Pt layer deposited using liftoff technique.
FIG. 10C shows a ninth step of the process, where a second piezoelectric layer forming the upper piezoelectric layer 410 is deposited. The layer 410 is, for example, a 0.5 μm thick PZT or PLZT layer deposited using, for example, a sol-gel deposition technique.
FIG. 10D shows a tenth step of the process, where a fourth layer, forming the third electrode 415 is deposited above the layer 410. The deposited layer is, for example, a 0.1 μm thick Ti/Pt layer deposited using liftoff technique.
FIG. 10E shows an eleventh step of the process, where the sacrificial layer 430 is removed, for example by means of hydrofluoric acid (HF).
From the process steps shown in FIGS. 9 and 10 it is also clear that a structure like the one depicted in FIGS. 7A and 7B can be obtained, the only difference being the absence of the metal element 421 in the deposition step of FIG. 9B.
It will also be appreciated that the spacer 418 shown in FIGS. 8A-8C is formed, in the preferred embodiment, by the left portion of the layers 411 and 431.
Additionally, similarly to what shown in FIGS. 6A-6D, FIGS. 11A-11D show an alternative embodiment of the steps shown in FIGS. 9C-9F, respectively.
FIG. 11A shows an alternate third step of the process of FIGS. 9 and 10, where the sacrificial layer 430 is etched (for example dry or wet etching) after deposition and patterning of a photoresist layer, not shown in the figure. The etching step creates the hole 450 in the structure.
FIG. 11B shows an alternate fourth step of the process, following the alternate third step of FIG. 11A, where a layer 531 is deposited above the sacrificial layer 430. The layer 531 is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD. The layer 531 is patterned to form portions 531a and 531b. The region between portions 531a and 531b is indicated 460.
FIG. 11C shows an alternate fifth step of the process, following the alternate fourth step of FIG. 11B, where the region 460 is dry or wet etched to form a trench 470 having a preferred depth of about 0.25 μm to about 0.5 μm.
FIG. 11D shows an alternate sixth step of the process, following the alternate fifth step of FIG. 11C, where a metal layer forming a top contact pad 519 is deposited and patterned on the sacrificial layer 430, in and above the trench 470.
FIG. 11E shows an alternate seventh step of the process, following the alternate sixth step of FIG. 11D, where a non-metal separation layer 531c is deposited above the layers 531a, 531b and the top contact pad 519. The layer 531c is, for example, a 0.1 to 0.5 μm thick layer made of Si3N4, which is deposited using PECVD.
FIG. 11F shows an alternate eighth step of the process, following the alternate seventh step of FIG. 11E, where a metal layer 412 is deposited above the layer 531c. 
The alternate embodiment shown in FIGS. 11A-11F ensures that the top contact pad 519 is held more securely between the Si3N4 and PZT layers and that a better contact with the bottom pad 420 is obtained.
A third embodiment of the present invention is also possible, where the electrostatic effect is combined with the ‘S’ shaped deflection of the embodiment of FIGS. 2A-2C. This embodiment is shown in FIGS. 12A and 12B, where similar elements to the previous embodiments have been indicated by similar numbers.
Although the present invention has been described with respect to specific embodiments thereof, various changes and modifications can be carried out by those skilled in the art without departing from the scope of the invention. It is intended, therefore, that the present invention encompass changes and modifications falling within the scope of the appended claims.

## Claims

1. A method of fabricating a micro electromechanical switch on a substrate comprising:
providing a substrate;
depositing a first metal layer on the substrate;
depositing a sacrificial layer on the substrate and on the first metal layer;
depositing a second metal layer on the sacrificial layer;
depositing a support layer on the sacrificial layer and the second metal layer;
depositing a third metal layer on the support layer;
depositing a first piezoelectric layer on the third metal layer;
depositing a fourth metal layer on the first piezoelectric layer;
patterning the fourth metal layer to form two separate metal layers on the first piezoelectric layer; and
removing the sacrificial layer.

2. The method of claim 1, further comprising:
depositing a second piezoelectric layer on the fourth metal layer; and
depositing a fifth metal layer above the second piezoelectric layer.

3. The method of claim 1, further comprising etching the sacrificial layer, creating a hole in the sacrificial layer.

4. The method of claim 1, wherein the support layer is a Si3N4 layer.

5. The method of claim 1, wherein depositing a first metal layer comprises patterning the first metal layer to form a first contact pad of the switch and depositing a second metal layer comprises patterning the second metal layer to form a second contact pad of the switch, whereby a gap between the first contact pad and the second contact pad is formed upon removal of the sacrificial layer.

6. A method of fabricating a micro electromechanical switch on a substrate, comprising:
providing a substrate;
depositing a first metal layer on the substrate;
depositing a sacrificial layer on the substrate and on the first metal layer;
depositing a support layer on the sacrificial layer;
depositing a second metal layer on the support layer and patterning the second metal layer to form a first contact pad;
depositing a separation layer on the support layer and the first contact pad;
depositing a third metal layer on the separation layer;
depositing a first piezoelectric layer on the third metal layer;
depositing a fourth metal layer on the first piezoelectric layer; and
removing the sacrificial layer.

7. The method of claim 6, further comprising patterning the fourth metal layer to form two separate metal layers above the first piezoelectric layer.

8. The method of claim 6, wherein the support layer and the separation layer are made of Si3N4.

9. The method of claim 6, further comprising patterning the support layer to form a first support layer portion and a second support layer portion, the first contact pad being formed between the first support layer portion and the second support layer portion.

10. The method of claim 9, wherein, after forming the first contact pad and before removing the sacrificial layer, the first contact pad is partially recessed in the sacrificial layer.

11. The method of claim 6, further comprising:
depositing a second piezoelectric layer above the fourth metal layer; and
depositing a fifth metal layer above the second piezoelectric layer.

12. The method of claim 6, wherein depositing a first metal layer comprises patterning the first metal layer to form a second contact pad, wherein a gap between the first contact pad and the second contact pad is formed upon removal of the sacrificial layer.

13. A method of fabricating a micro electromechanical switch on a substrate comprising:
providing a substrate;
depositing a first metal layer on the substrate;
patterning the first metal layer to form two separate metal layers on the substrate;
depositing a sacrificial layer on the substrate and on the two separate metal layers;
depositing a second metal layer on the sacrificial layer;
depositing a support layer on the second metal layer and the sacrificial layer;
depositing a third metal layer on the support layer;
depositing a first piezoelectric layer on the third metal layer;
depositing a fourth metal layer on the first piezoelectric layer; and
removing the sacrificial layer.

14. The method of claim 13, further comprising patterning the sacrificial layer to form a hole therein.

15. The method of claim 13, further comprising:
patterning the fourth metal layer to form two separate metal layers.

16. The method of claim 13, further comprising:
depositing a second piezoelectric layer on the fourth metal layer; and
depositing a fifth metal layer above the second piezoelectric layer.

17. A method of fabricating a micro electromechanical switch on a substrate, comprising:
providing a substrate;
depositing a first metal layer on the substrate;
patterning the first metal layer to form two separate metal layers on the substrate;
depositing a sacrificial layer on the substrate and on the two separate metal layers;
depositing a support layer on the sacrificial layer;
depositing a second metal layer on the support layer and patterning the second metal layer to form a first contact pad;
depositing a separation layer on the support layer and the first contact pad;
depositing a third metal layer on the separation layer;
depositing a first piezoelectric layer on the third metal layer;
depositing a fourth metal layer on the first piezoelectric layer; and removing the sacrificial layer.

18. The method of claim 17, further comprising:
patterning the fourth metal layer to form two separate metal layers.

19. The method of claim 17, wherein the support layer and the separation layer are made of Si3N4.

20. The method of claim 17, further comprising:
depositing a second piezoelectric layer on the fourth metal layer; and
depositing a fifth metal layer on the second piezoelectric layer.

21. The method of claim 17, further comprising patterning the support layer to form a first support layer portion and a second support layer portion, the first contact pad being formed between the first support layer portion and the second support layer portion.

22. The method of claim 21, wherein, after forming the first contact pad and before removing the sacrificial layer, the first contact pad is partially recessed in the sacrificial layer.

23. The method of claim 17, wherein depositing a first metal layer comprises patterning the first metal layer to form a second contact pad, wherein a gap between the first contact pad and the second contact pad is formed upon removal of the sacrificial layer.