# Patent

## Title
Method of fabricating an acoustic resonator comprising a filled recessed region

## Abstract

A method for fabricating an acoustic resonator comprises providing a substrate; fabricating a first electrode adjacent the substrate; fabricating a piezoelectric layer adjacent the first electrode; depositing electrode material to form a second electrode up to a first thickness adjacent the piezoelectric layer; depositing a first photo mask over the second electrode; depositing additional electrode material to form the second electrode up to a second thickness; removing the photo mask thereby forming a recessed region in the second electrode; and filling the recessed region with a fill material.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
The present application is a division of U.S. patent Ser. No. 11/100,311, now U.S. Pat. No. 7,369,013, entitled “ACOUSTIC RESONATOR PERFORMANCE ENHANCEMENT USING RECESSED REGION” filed on Apr. 6, 2005 and claims benefit of priority under 35 U.S.C. §121 therefrom. The entire disclosure of the parent application is specifically incorporated herein by reference.


BACKGROUND
The need to reduce the cost and size of electronic equipment has created a need for smaller single filtering elements. Thin-Film Bulk Acoustic Resonators (FBARs) and Stacked Thin-Film Bulk Wave Acoustic Resonators (SBARs) represent one class of filter elements with potential for meeting these needs. These filters can collectively be referred to as FBARs. An FBAR is an acoustic resonator that uses bulk longitudinal acoustic waves in thin-film piezoelectric (PZ) material. Typically, an FBAR includes a layer of PZ material sandwiched between two metal electrodes. The combination PZ material and electrodes are suspended in air by supporting the combination around its perimeter or are placed over an acoustic mirror.
When an electrical field is created between the two electrodes, the PZ material converts some of the electrical energy into mechanical energy in the form of acoustic waves. The acoustic waves propagate generally in the same direction as the electric field and reflect off the electrode-air or electrode-acoustic mirror interface at some frequency, including at a resonance frequency. At the resonance frequency, the device can be used as an electronic resonator. Multiple EBARs can be combined such that each is an element in RF filters.
Ideally, the resonant energy in the filter elements is entirely “trapped” in the resonator. In practice, however, dispersive modes exist. These modes can result in a decreased quality factor (Q) for the filter.
For these and other reasons, a need exists for the present invention.
SUMMARY
One aspect of the present invention provides an acoustic resonator that includes a substrate, a first electrode, a layer of piezoelectric material, a second electrode, and a fill region. The first electrode is adjacent the substrate, and the first electrode has an outer perimeter. The piezoelectric layer is adjacent the first electrode. The second electrode is adjacent the piezoelectric layer and the second electrode has an outer perimeter. The fill region is in one of the first and second electrodes.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 illustrates a top plan view of an FBAR.
FIG. 2 illustrates a cross-sectional view of an FBAR.
FIG. 3 illustrates a cross-sectional view of an FBAR according to one embodiment of the present invention.
FIG. 4 illustrates a top plan view of one embodiment of the FBAR illustrated in FIG. 3.
FIG. 5 illustrates a top plan view of an alternative embodiment of the FBAR illustrated in FIG. 3.
FIG. 6 illustrates Q circles for two exemplary FBARs plotted on a Smith chart.
FIG. 7 illustrates a cross-sectional view of an FBAR according to one embodiment of the present invention.
FIG. 8 illustrates a cross-sectional view of an FBAR according to another embodiment of the present invention.
FIG. 9 illustrates a cross-sectional view of an FBAR according to another embodiment of the present invention.
FIGS. 10A-10F are cross-sectional views illustrating various stages of fabrication of an FBAR according to another embodiment of the present invention.



DETAILED DESCRIPTION
In the following Detailed Description, reference is made to the accompanying drawings, which form a part hereof, and in which is shown by way of illustration specific embodiments in which the invention may be practiced. In this regard, directional terminology, such as “top,” “bottom,” “front,” “back,” “leading,” “trailing,” etc., is used with reference to the orientation of the Figure(s) being described. Because components of embodiments of the present invention can be positioned in a number of different orientations, the directional terminology is used for purposes of illustration and is in no way limiting. It is to be understood that other embodiments may be utilized and structural or logical changes may be made without departing from the scope of the present invention. The following detailed description, therefore, is not to be taken in a limiting sense, and the scope of the present invention is defined by the appended claims.
FIGS. 1 and 2 illustrate top and cross-sectional views, respectively, of FBAR 10. FBAR 10 includes substrate 12, depression 14, first electrode 16, piezoelectric (PZ) layer 18, and second electrode 20. In FIG. 1, PZ layer 18 and depression 14 are hidden from view. Second electrode 20 has a perimeter that is illustrated in FIG. 1 as pentagon-shaped, having edges 20a, 20b, 20c, 20d and 20e. Two edges, 20b and 20e, are illustrated in the cross-sectional view of FIG. 2. Typically, contacts (not illustrated) are coupled to first electrode 16 and to second electrode 20 and a passivation layer (not illustrated) may cover top electrode 20. The contacts facilitate connecting the first and second electrodes 16 and 20 to a source of voltage.
First electrode 16, PZ layer 18, and second electrode 20 collectively form an FBAR membrane. The FBAR membrane is adjacent substrate 12 and suspended over depression 14 to provide an electrode-air interface. In one embodiment, depression 14 is created by etching away a portion of substrate 12. Depression 14 is deep enough so that sufficient electrode-air interface is created under the FBAR membrane.
In an alternative embodiment, the FBAR membrane may be placed adjacent an acoustic mirror (not illustrated in FIGS. 1 and 2) formed within substrate 12. In this way, an electrode-acoustic mirror interface is formed. The resonator thus formed is a Solid Mounted Resonator (SMR).
In one embodiment, substrate 12 is made of silicon (Si) and PZ layer 18 is made from aluminum nitride (AlN). Alternatively, other piezoelectric materials may be used for PZ layer 18. In one embodiment, first and second electrode 16 and 20 may be made of molybdenum (Mo). Alternatively, other materials may be used for the electrodes. In one embodiment, the contacts may be made of gold (Au). Alternatively, other materials may be used for the contacts.
FBAR 10 illustrated in FIGS. 1 and 2 is configured to use longitudinal or shear acoustic waves propagating in PZ layer 18. When an electric field is created between first and second electrodes 16 and 20 via an impressed voltage, the piezoelectric material of PZ layer 18 converts some of the electrical energy into mechanical energy in the form of acoustic waves. So configured, FBAR 10 exhibits dispersive modes resulting in a quality factor (Q) loss for FBAR 10.
FIG. 3 illustrates a cross-sectional view of FBAR 40 in accordance with one embodiment of the present invention. FBAR 40 includes substrate 42, depression 44, first electrode 46, piezoelectric (PZ) layer 48, second electrode 50 and filled region 60. Typically, contacts (not illustrated in FIG. 3) are coupled to first and second electrodes 46 and electrode 50, and a passivation layer covers the second electrode (also not illustrated in FIG. 3). The contacts facilitate connecting first and second electrodes 46 and 50 to a voltage source. First electrode 46, PZ layer 48, and second electrode 50 collectively form an FBAR membrane, which may be placed over a depression 44 or over an acoustic mirror as discussed above. The FBAR membrane is illustrated adjacent substrate 42 and suspended over depression 44 to provide an electrode-air interface. As with previous embodiments, an electrode-acoustic mirror interface is also obtainable using an SMR design in accordance with the present invention.
Second electrode 50 and the other layers of the FBAR membrane have a perimeter that can be of various configurations. For example, the perimeters of each can be pentagon-shaped, similar to FBAR 10 above. They could also be any of various polygonal shapes, circular, or various irregular shapes. The cross-sectional view illustrated in FIG. 3 illustrates two locations along the perimeter of second electrode 50, edges 50b and 50e. In one embodiment, an edge of PZ layer 48 is generally aligned with edge 50b of second electrode 50 in the vertical direction in FBAR 40 as illustrated in FIG. 3.
In FBAR 40 illustrated in FIG. 3, a filled region 60 has been added into second electrode 50 adjacent the edge 50b and near edge 50e of second electrode 50. In one embodiment, fill region 60 is located just outside the perimeter of depression 44. In this way, when the perimeter or outside diameter of depression 44 is extended in the vertical direction (as oriented in the illustration of FIG. 3), fill region 60 is just “outside” the perimeter of depression 44.
In other embodiments, fill region 60 overlaps the perimeter of depression 44 such that part of fill region 60 is “inside” and part is “outside” the perimeter of depression 44. In still other embodiments, fill region 60 lies entirely “inside” the perimeter of depression 44.
Fill region 60 improves the performance of FBAR 40, resulting in improved insertion loss and improved resonator quality factor Q of FBAR 40. The overall quality factor Q of FBAR 40 depends proportionally on a parameter of resistance called Rp. In FBAR 40, the Rp may be improved by fill region 60.
An electric field is created between first and second electrodes 46 and 50 via an impressed voltage. The piezoelectric material of PZ layer 48 converts some of the electrical energy into mechanical energy in the form of acoustic waves. Some of the acoustic waves in FBAR 40 are longitudinal acoustic waves of any mode type, while others are transverse acoustic waves of the compression, shear, or drum mode type. FBAR 40 is designed to use longitudinal acoustic waves propagating in the thickness extensional direction in the PZ layer 48 as the desired resonator mode. However, FBAR 40, which provides fill region 60, reduces or suppresses energy loss, thereby improving the Q of the filter. In one embodiment, fill region 60 helps trap energy from lateral modes in FBAR 40.
In one embodiment, fill region 60 is filled with a material that is different than that used for second electrode 50. In that case, the material in fill region 60 will have different dispersion characteristics than will the remaining material of second electrode 50, which in one case is Mo. Adding this material with differing dispersion characteristics can improve insertion loss and improve the resonator quality factor Q of FBAR 40. In one embodiment, the material in fill region 60 increases the FBAR membrane's stiffness at its edge. In one case, the material in fill region 60 is such that it increases the acoustic impedance of the fill region 60 relative to that at the center of the FBAR membrane. Such material may be denser than the electrode material. For example, the material in fill region 60 can be W, while second electrode 50 is made of Mo. In other embodiments first and second electrodes 46 and 50 may be metal such as Pt, W, Cu, Al, Au, or Ag. In alternative embodiments, material in fill region 60 could also be made of materials such as polyimide, BCB, SiO2, Si3N4, or other dielectrics, AlN, ZnO, LiNbO3, PZT, LiTaO3, Al2O3, or other piezoelectric materials, Pt, W, Cu, Al, Au, Ag, or other metals or alloys of metals.
In one embodiment, fill region 60 has a depth in second electrode 50 that is on the order of hundreds to thousands of angstroms, and a width on the order of fractions of a micron to microns or even larger, up to that portion of the width of second electrode 50 that extends beyond or outside the perimeter of depression 44. In one embodiment, second electrode 50 is selectively etched to form a recessed feature that is then filled in with material to form fill region 60. In one embodiment, second electrode 50 is constructed using a lift-off technique to form a recessed feature that is filled in with material to form fill region 60.
FIGS. 4 and 5 illustrate plan views of FBAR 40 of FIG. 3 in accordance with alternative embodiments of the present invention. As illustrated in FIGS. 4 and 5, FBAR 40 includes substrate 42, first electrode 46, and second electrode 50. In FIGS. 4 and 5, piezoelectric (PZ) layer 48 and depression 44 are hidden from view. Typically, contacts (not illustrated in the Figures) are coupled to first and second electrodes 46 and 50, and a passivation layer (also not illustrated in the Figures) covers second electrode 50.
In FIGS. 4 and 5, fill region 60 is illustrated extending adjacent the perimeter of second electrode 50. In the Figures, the perimeter of second electrode 50 is generally pentagon-shaped having five relatively straight edges (50a, 50b, 50c, 50d, and 50e), but may also be essentially any polygonal shape, circular in shape, or have any other smooth or irregular shape.
In FIG. 5, fill region 60 is illustrated extending adjacent the perimeter of second electrode 50 along all of the five edges of the pentagon-shaped electrode, that is, adjacent edges 50a, 50b, 50c, 50d, and 50e. FIG. 4 illustrates an alternative embodiment of FBAR 40 where fill region 60 extends adjacent the perimeter of second electrode 50 along four of the five edges of the pentagon-shaped electrode, that is, adjacent edges 50b, 50c, 50d, and 50e. In one embodiment, a contact is attached to the fifth edge 50a of second electrode 50, so fill region 60 does not extend along that edge in that embodiment.
As one skilled in the art will understand, any number of alternative fill regions 60 may be provided adjacent the edges of second electrode 50 consistent with the present invention. Fill region 60 may be continuously extending along some or all of the edges of second electrode 50 as illustrated, fill regions 60 may have smaller segments that are not continuous along the edge, and other shapes and configurations of fill regions 60 can be used, especially where second electrode 50 is a shape other than a pentagon.
FIG. 6 illustrates Q circles for two exemplary FBARs plotted on a Smith chart, and illustrates improvement in Rp and therefore Q in one of the FBARs. As is known in the art, a Smith Chart is a polar plot of a complex impedance (used in FIG. 6 to illustrate measures of s11 and s22 scattering parameters). These s11 and s22 scattering parameters represent a ratio of complex amplitudes of backward and forward waves. The Smith Chart aids in translating the reflection coefficients into impedance and it maps part of the impedance placed into a unit circle. The improved performance of FBAR 40 is demonstrated by the Q circles illustrated in FIG. 6. FIG. 6 illustrates the S-parameter measurements of an exemplary filled device, such as FBAR 40 with fill region 60. As illustrated, the filled device of FBAR 40 with fill region 60 (solid line labeled S11) has a much improved Rp versus that of a control device, such as that illustrated in FIG. 2 (dashed line labeled S22) in the upper half of the chart.
Generally, the horizontal axis passing through the unit circle represents real impedance, the area above the axis represents inductive reactance and the area below represents capacitive reactance. The left-hand portion of the chart at zero reactance represents series resonance frequency (fs) and occurs where the Q circle crosses the real axes on the left side of the Smith Chart. The left-hand portion of the chart also demonstrates the parameter of resistance Rs. The right-hand portion of the chart at zero reactance represents parallel resonant frequency (fp) and occurs where the Q circle crosses the real axes on the right side of the Smith Chart. The right-hand portion of the chart also demonstrates the parameter of resistance Rp. The closer that a plot of FBAR filter characteristics on a Smith Chart is to the perimeter of the Smith Chart, the higher the Q will be for that FBAR. Also, the more smooth that the curve is, the lower the noise is in the FBAR.
In FIG. 6, the performance of FBAR 40 as a filter is illustrated by the solid line Q circle s I and the performance of a prior art FBAR without a filled region in the electrode is illustrated by the dashed line Q circle s22. As evident, FBAR 40 improves the quality of the filter near the frequency fp. FBAR 40, illustrated by Q circle s11, more closely approximates a unit circle in the upper half of the unit circle and is representative of a less lossy device in that area, which improves the performance of FBAR 40 when used in a filter.
FIG. 6 also illustrates that FBAR 40 used as a filter actually enhances spurious modes below the series resonant frequency fs, as indicated in the lower-left side or “southwest” quadrant of the unit circle. When FBAR 40 is used in applications where the increase in noise in this frequency regime does not impair the device performance, the improvements illustrated in the other areas of the unit circle can be exploited. For example, in some embodiments FBAR 40 is used as a resonator in a filter application that employs a half-ladder topology. The performance of the filter benefits from the improved Rp, and any noise introduced by the increased spurious modes lies outside the filter passband.
FIG. 7 illustrates a cross-sectional view of FBAR 40 in accordance with an alternative embodiment of the present invention. FBAR 40 is essentially the same as that illustrated in FIG. 3, and includes substrate 42, depression 44, first electrode 46, piezoelectric (PZ) layer 48, second electrode 50 and fill region 60. Two edges, 50b and 50e, of the perimeter of second electrode 50 are also illustrated. In addition, however, FBAR 40 illustrated in FIG. 7, has fill region 60 formed in a surface of second electrode 50 that is opposite the surface in which fill region 60 was formed in FIG. 3. As FBAR 40 is depicted in FIG. 3, fill region 60 is on the “top” surface of second electrode 50, whereas as FBAR 40 is depicted in FIG. 7, fill region 60 is on the “bottom” surface of second electrode 50. In one embodiment, fill region 60 depicted in FIG. 7 is also outside the edge of the perimeter of depression 44. In alternative embodiments fill region 60 overlaps the perimeter of depression 44, and in other embodiments, fill region 60 lies entirely inside the perimeter of depression 44.
In one embodiment, the performance of FBAR 40 as illustrated in FIG. 7 is essentially the same as that described above for FBAR 40 as depicted in FIG. 3. Fill region 60 on the “bottom” surface of second electrode 50 can be achieved in a variety of ways known by those skilled in the art. For example, the structure illustrated in FIG. 7 could be constructed by using a lift-off process (i.e., mask, material deposition, and lift-off) after piezoelectric deposition, followed by deposition of the top electrode material.
FIGS. 8 and 9 illustrate cross-sectional views of FBAR 70 in accordance with alternative embodiments of the present invention. FBAR 70 includes substrate 72, depression 74, first electrode 76, piezoelectric (PZ) layer 78, second electrode 80, and fill material 90. Typically, contacts (not illustrated in the Figures) are coupled to first and second electrodes 76 and 80. Also, an optional passivation layer (not illustrated in the Figures) may be used to cover second electrode 80. The contacts facilitate connecting first and second electrodes 76 and 80 to a voltage source. First electrode 76, PZ layer 78, and second electrode 80 collectively form an FBAR membrane, which may be placed over a depression 74 or over an acoustic mirror as discussed above. The FBAR membrane is illustrated adjacent substrate 72 and suspended over depression 74 to provide an electrode-air interface. As with previous embodiments, an electrode-acoustic mirror interface is also obtainable using an SMR design in accordance with the present invention.
FBAR 70 is similar to FBAR 30 illustrated in FIG. 3; however, FBAR 70 has fill region 90 inserted in first electrode 76, rather than in the second electrode as above. Fill region 90 inserted in first electrode 76 also improves the performance of FBAR 70, resulting in improved insertion loss and improved resonator quality factor Q of FBAR 70. In FIG. 8, fill region 90 is illustrated adjacent the “top surface” of first electrode 76 and in FIG. 9, fill region 90 is illustrated adjacent the “bottom surface” of first electrode 76. In each case, fill region 90 is illustrated just outside the perimeter of depression 74. In this way, when the perimeter or outside diameter of depression 44 is extended in the vertical direction (as oriented in the illustration of FIGS. 8 and 9), fill region 90 is just “outside” the perimeter of depression 74. In alternative embodiments, fill region 90 overlaps the perimeter of depression 74, and in other embodiments, fill region 90 lies entirely inside the perimeter of depression 74. Like fill region 60 described previously with respect to FBAR 40, fill region 90 improves the performance of FBAR 70, resulting in improved noise reduction and improved resonator quality factor Q of FBAR 70.
As with embodiments above, fill region 90 is filled with a material that is different than that used for second electrode 80. In that case, the material in fill region 90 will have different dispersion characteristics than will the remaining material of second electrode 80, which in one case is Mo. Adding this material with differing dispersion characteristics can improve insertion loss and improve the resonator quality factor Q of FBAR 70. In one embodiment, the material in fill region 90 increases the FBAR membrane's stiffness at its edge. In one case, the material in fill region 90 is such that it increases the acoustic impedance of the fill region 90 relative to that at the center of the FBAR membrane. Such material may be denser than the electrode material. For example, the material in fill region 90 can be W, while second electrode 80 is made of Mo. In other embodiments first and second electrodes 76 and 80 may be metal such as Pt, W, Cu, Al, Au, or Ag. In alternative embodiments, material in fill region 90 could also be made of materials such as polyimide, BCB, SiO2, Si3N4, or other dielectrics, AlN, ZnO, LiNbO3, PZT, LiTaO3, Al2O3, or other piezoelectric materials, Pt, W, Cu, Al, Au, Ag, or other metals or alloys of metals.
FBARs 40 and 70 may be fabricated in a variety of ways consistent with the present invention. In one embodiment, for example, a recessed region is created in the top electrode by first depositing electrode metal to a thickness slightly less than the desired thickness. Then a photo mask is used to pattern the center region of the resonator. The remaining thickness of electrode metal is then deposited, and a lift-off process is used to remove the resist remaining in the recessed area. An additional photo mask is then used to pattern the fill region. Fill material is deposited in the fill region, and the mask and fill material outside the fill region are removed in a lift-off process. In another embodiment, the recessed region may be produced by first depositing electrode metal to the desired thickness, patterning the electrode with a photo mask, and etching the recessed region. In another embodiment, the fill material may be produced by first depositing fill material, patterning the fill region with a photo mask, and etching away the fill material outside the fill region.
FIGS. 10A-10F are cross-sectional views illustrating various intermediate stages of fabrication of FBAR 100 according to one embodiment of the present invention. FBAR 100 is similar to those illustrated in FIGS. 3-9, and includes substrate 102, depression 104, first electrode 106, piezoelectric (PZ) layer 108, and second electrode 110, which collectively form an FBAR membrane. FIG. 10A illustrates FBAR 100 prior to formation of a fill region 120 (illustrated in FIG. 10F and analogous to above-described fill regions 60 and 90).
FIG. 10B illustrates FBAR 100 with a photo mask 109 deposited over the FBAR membrane. Photo mask 109 is used to pattern a recessed region using a lift-off process. FIG. 10C illustrates FBAR 100 of FIG. 10B after additional electrode material metal 110 is deposited, but before the lift-off process. FIG. 10D illustrates FBAR 100 after the lift-off process. The lift off process removes photo mask 109 and all metal 10 that is on photo mask 109. In this way, the lift-off process defines a recessed region 111.
Next, FIG. 10E illustrates FBAR 100 with a photo mask 113 deposited over the FBAR membrane to pattern the fill. FIG. 10F illustrates FBAR 100 of FIG. 10E after fill material 120 deposition, but before the lift-off process. After the lift off process, FBAR 40 of FIG. 3 illustrates the resulting structure. In some embodiments, the FBAR may additionally utilize at least one passivation layer.
A filled recessed region on the bottom electrode may be constructed similarly. Furthermore, the top of the fill region does not necessarily need to align with the surface of the electrode, whether the fill region resides in the top electrode or bottom electrode. The recess in the FBAR can be generated by a lift-off process, but can also be made with an etch step. The fill material may be patterned in the recessed region by first masking with a photo mask, depositing metallization, and then using a lift-off to leave fill material in the recessed region. Fill material can also be added by first using a metal deposition, followed by a photo mask and an etch.
Although specific embodiments have been illustrated and described herein, it will be appreciated by those of ordinary skill in the art that a variety of alternate and/or equivalent implementations may be substituted for the specific embodiments shown and described without departing from the scope of the present invention. This application is intended to cover any adaptations or variations of the specific embodiments discussed herein. Therefore, it is intended that this invention be limited only by the claims and the equivalents thereof.

## Claims

1. A method for fabricating an acoustic resonator comprising:
providing a substrate;
fabricating a first electrode adjacent the substrate;
fabricating a piezoelectric layer adjacent the first electrode;
depositing electrode material to form a second electrode up to a first thickness adjacent the piezoelectric layer;
depositing a first photo mask over the second electrode;
depositing additional electrode material over at least a portion of the first photo mask to form the second electrode up to a second thickness;
removing the photo mask thereby forming a recessed region in the second electrode; and
filling the recessed region with a fill material.

2. The method of claim 1, further including depositing a second photo mask over the second electrode before filling the recessed region.

3. The method of claim 1 further including forming a depression in the substrate.

4. The method of claim 1 further including filling the recessed region with a different material than the electrode material.

5. The method of claim 1, wherein filling the recessed region includes filling with a material selected from the group consisting of:
dielectrics, metals, metal alloys, piezoelectrics, Mo, Pt, Al, Cu, W, Au, Ag, polyimide, BCB, SiO2, Si3N4, AN, ZnO, LiNbO3, PZT, LiTaO3, and Al2O3.