# Patent

## Title
Frequency shift keying demodulation circuit using logic circuitry

## Abstract

This application is a divisional of U.S. Pat. application Ser. No. 08/472,081, filed 7 Jun. 1995, pending which is a continuation-in-part of U.S. Pat. application Ser. No. 07/969,605, filed 30 Oct. 1992, and now abandoned.

## Background
This invention generally relates to reducing extrinsic base-collector capacitance in collector-up bipolar transistors.

The following coassigned patent applications are hereby incorporated herein by reference:

Without limiting the scope of the invention, its background is described in connection with the manufacturing of bipolar transistors, as an example.

Heretofore, in this field, in bipolar mesa transistors, the base layer extends outside the area of the active device region to enable contacting of the base. This area is called the extrinsic base region, outside the active device region. For collector-up transistors, that portion of the emitter-base junction in the extrinsic base area reduces the current gain, since minority carriers injected into the base in this area do not contribute to the collector current. Unless the emitter-base junction in the extrinsic base area is rendered inactive, the current gain may be unacceptably low.

Also, the extrinsic base region adds to the junction capacitance between the base layer and the layer beneath the base (the emitter, in collector-up devices). Since junction capacitance limits the high-frequency performance of bipolar transistors, great effort has been spent on reducing the junction capacitance.

It is herein recognized that a need exists for a method to manufacture a bipolar transistor which reduces the junction capacitance between the base layer and the layer beneath the base. The present invention is directed towards meeting that need.

Generally, and in one form of the invention, during device fabrication, the emitter layer (beneath the base) is etched laterally; a selective etch is used so that the base layer itself is not significantly affected. This removes the emitter-base junction in the extrinsic base region (e.g. under the base contacts) Current gain and emitter-base junction capacitance are significantly improved.

The selective etching can be accomplished in at least two ways: by including an epitaxial layer in the emitter which can be selectively removed during fabrication; or by using a doping-selective etch which, for npn transistors, removes only n-type material but not p-type material (or vice versa for pnp transistors).

Previous partial solutions include ion implantation and ion bombardment of the extrinsic base region.

In the ion implantation approach, which is applicable for heterojunction bipolar transistors, acceptor ions (for npn devices, or donor ions for pnp) are implanted in the extrinsic base region and then annealed to move the p-n junction into the wide bandgap material. The junction therefore becomes a wide-bandgap homojunction. Since the turn-on voltage is higher, the current density is much lower in the extrinsic base region than in the active device region.

In the ion bombardment approach, the emitter in the extrinsic base region is rendered very resistive by implant damage, reducing the current density in this region.

Both of the existing solutions rely on ion implantation through the base layer; the invention relies instead on lateral etching to undercut the emitter in the extrinsic base region. Because of ion implantation, the existing solutions, even after annealing, have residual damage in the base layer, which increases the resistance of the base and degrades the current gain. The invention does not require ion implantation and does not suffer from the associated problems.

Also the existing solutions do not significantly reduce the junction capacitance. In fact, the ion implantation approach actually increases the undesirable capacitance between the base and emitter. The invention, however, can substantially reduce the emitter-base junction capacitance.

This invention would be of great use in, although not limited to, microwave amplification or oscillator applications requiring heterojunction bipolar transistors (HBT) devices to operate above 20 GHz, since conventional HBTs are usually sufficient at lower frequencies.

This is a method of fabricating a bipolar transistor on a wafer. The method can comprise: forming a doped emitter contact layer on a substrate; forming a doped emitter layer on top of the emitter contact layer, the emitter layer doped same conductivity type as the emitter contact layer; forming a doped base epilayer on top of the emitter layer, the base epilayer doped conductivity type opposite of the emitter layer; forming a doped collector epilayer, the collector epilayer doped conductivity type opposite of the base layer to form the bipolar transistor; forming an collector contact on top of the collector layer; forming a base contact on top of the base layer; forming a emitter contact on top of the emitter contact layer; and selective etching the emitter layer to produce an undercut beneath the base layer.

Preferably, the emitter layer is composed of or contains an AlGaAs layer and the emitter contact layer is composed of GaAs and the AlGaAs emitter layer is selectively etched to produce the undercut region beneath the base layer.

The drawings are schematic and the vertical has been exaggerated for clarity.

FIGS. 1-10 are cross sectional elevation views of the first preferred embodiment and the steps of the preferred embodiment fabrication method.

FIGS. 11-22 are cross sectional elevation views of the second preferred embodiment and the steps of the second preferred embodiment fabrication method.

The first preferred embodiment method for fabricating bipolar transistors includes the following steps as illustrated in cross sectional elevation views in FIGS. 1-10.

In FIG. 1, a substrate material 30 is composed of a semiconductor material, such as GaAs. Emitter contact layer 31 of n-type GaAs is deposited onto substrate 30 with doping 3.times.10.sup.18 cm.sup.-3 and thickness of 500 nm. Emitter epilayer 32 of n-type AlGaAs is deposited at a thickness of 50 nm and doping of 2.times.10.sup.17 cm.sup.-3. A base epilayer 34 of GaAs is deposited on to the emitter 32 at a thickness of 50 nm and doped with C at a concentration of 5.times.10.sup.19 cm.sup.-3. A collector layer 36 is grown consisting of 500 nm doped n-type at 3.times.10.sup.16 cm.sup.-3 followed by 100 nm doped n-type at 5.times.10.sup.18 cm.sup.-3. The collector layer 36 is composed of GaAs and/or AlGaAs.

In FIG. 2, photoresist 39 is applied and patterned by lithography. Then, 50 nm thick AuGe emitter ohmic contact metal, followed by 14 nm Ni and 200 nm Au layers are evaporated onto the collector 36. The excess metal 29 on top of the photoresist 39 is then lifted off by dissolving the photoresist in acetone. The contacts are then alloyed by heating to 430 degrees Celsius for 1 minute.

In FIG. 3, the collector layer 36 is etched using the collector contact 38 as a mask.

In FIG. 4, the base contacts 40 are evaporated onto the base layer 34 using a lift-off process. The base contact 40 metal consists of 50 nm Ti, 25 nm Pt, and 200 nm Au.

In FIG. 5, a layer of photoresist 43 is deposited and patterned over the collector and portions of the base contacts.

FIG. 6, both the base layer 34 and the emitter layer 32 are etched using the base contact 40 and photoresist 43 as a mask.

In FIG. 7, a layer of silicon nitride 42 is deposited over the base contact 40, the collector 36 and the collector contact 38 to protect the optional AlGaAs in the collector.

In FIG. 8, a timed selective etch is used to etch the AlGaAs of the emitter layer 32 and produce an undercut 45 beneath the base layer 34.

In FIG. 9, the layer of silicon nitride is removed.

In FIG. 10, using a lift-off process, the emitter contact metal 44 is evaporated, consisting of 50 nm AuGe, 14 nm Ni, and 200 nm Au. Ohmic contacts are alloyed at 430 degrees C for 1 minute.

The second preferred embodiment method for fabricating high power heterojunction bipolar transistors (HBTs) includes the following steps as illustrated in cross sectional elevation views in FIGS. 11-22. In the second preferred embodiment, ion implantation is used to convert the lower portion of the collector in the extrinsic base region to the doping type of the base to reduce the extrinsic base resistance. The base-emitter capacitance is not affected by this implant, because the implanted material is separated from the emitter by the air gap produced by the undercut etch.

The fabrication of the second preferred embodiment is similar to that of the first embodiment, except that the etch to the base is replaced by an etch which stops short of the base, leaving a portion of the collector on the surface of the extrinsic base regions. This portion is converted to the same type as the base by diffusion or ion implantation. The emitter metal or photoresist may be used to protect the active device region under the emitter contact during the diffusion or implantation.

In FIG. 11, a substrate material 30 is composed of a semiconductor material, such as GaAs. Emitter contact layer 31 of n-type GaAs is deposited onto substrate 30 with doping 3.times.10.sup.18 cm.sup.-3 and thickness of 500 nm. Emitter epilayer 32 of n-type AlGaAs is deposited at a thickness of 50 nm and doping of 2.times.10.sup.17 cm.sup.-3. A epilayer 34 of GaAs is deposited on to the emitter 32 at a thickness of 50 nm and doped with C at a concentration of 5.times.10.sup.19 cm.sup.-1 A collector layer 36 is grown consisting of 500 nm doped n-type at 3.times.10.sup.16 cm.sup.-3. Followed by 100 nm doped n-type at 5.times.10.sup.18 cm.sup.-3. The collector layer 36 is composed of GaAs and/or AlGaAs.

In FIG. 12, photoresist 39 is applied and patterned by lithography. Then, 50 nm thick AuGe emitter ohmic contact metal, followed by 14 nm Ni and 200 nm Au layers are evaporated onto the collector 36. The excess metal 29 on top of the photoresist 39 is then lifted off by dissolving the photoresist in acetone. The contacts are then alloyed by heating to 430 degrees Celsius for 1 minute.

In FIG. 13, the collector layer 36 is partially etched using the collector contact 38 as a mask.

In FIG. 14, 40 nm of silicon nitride 41 is deposited on top of the partially etched collector layer 36. The structure is then ion implanted (for example, Be at 60 kev to a dose of 1.times.10.sup.14 cm .sup.-2) to convert the remaining portion of the collector layer 36 immediately above the base layer in the extrinsic base region. The collector contact or photoresist may act as a mask. The structure is then annealed at 800 C. for 30 seconds to activate the implant.

In FIG. 15, the silicon nitride is then removed to leave a ion-implanted portion 47 of the collector layer 36.

In FIG. 16, the base contacts 40 are evaporated onto the ion-implanted layer 47 using a lift-off process. The base contact metal consists of 10 nm Au, 150 nm AuZn, and 100 nm Au.

In FIG. 17, a layer of photoresist 43 is deposited and patterned over the collector and portions of the base contacts.

In FIG. 18, the doped portions of the collector layer 36, the base layer 34, and the emitter layer 32 are etched using the base contact 40 and photoresist 43 as a mask.

In FIG. 19, a layer of silicon nitride 42 is deposited over the base contact 40, the collector 36 and the collector contact 38 to protect the optional AlGaAs in the collector.

In FIG. 20, a timed selective etch is used to etch the emitter layer 32 and produce an undercut 45 beneath the base layer 34. The selective etch may be either dopant selective or material selective.

In FIG. 21, the layer of silicon nitride is removed.

In FIG. 22, using a lift-off process, the emitter contact metal 44 is evaporated, consisting of 50 nm AuGe, 14 nm Ni, and 200 nm Au. Ohmic contacts are then alloyed at 430 degrees C. for 1 minute.

Although GaAs/AlGaAs or GaAs/GaInP combinations are preferred for the bipolar transistor, because those materials are especially applicable to high frequency transistors, silicon may also be used with a dopant selective etch to create the undercut region beneath the base.

A few preferred embodiments have been described in detail hereinabove. It is to be understood that the scope of the invention also comprehends embodiments different from those described, yet within the scope of the claims. Various modifications and combinations of the illustrative embodiments, as well as other embodiments of the invention, will be apparent to persons skilled in the art upon reference to the description. It is therefore intended that the appended claims encompass any such modifications or embodiments.

## Claims

1. A bipolar transistor device comprising: layer of AlGaAs with portions of GaAs, said emitter layer having same conductivity type as said emitter contact layer; epilayer doped opposite conductivity type of said emitter layer; collector epilayer doped same conductivity type as said emitter layer to provide said bipolar device; only in regions of AlGaAs.

2. The device of claim 1, wherein portions of said collector layer directly above said base layer have same conductivity type as said base layer, and said base contact lies on such portions of said collector layer.

3. The device of claim 1, wherein said emitter contact is composed of AuGe, Ni and Au.

4. The device of claim 1, wherein said base contact layer is composed of Au, and AuZn.

5. The device of claim 1, wherein said collector contact layer is composed of AuGe, Ni and Au.