# Patent

## Title
Energy beam position verification

## Abstract

A method for verifying a position of an energy beam spot, said method comprising the steps of: providing a calibrated energy beam having a first focus in a at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said first focus, providing said calibrated energy beam having a second focus in said at least two positions at a work table, detecting said at least two positions of said energy beam spot on said work table created with said energy beam having said second focus, comparing said at least two positions created with said first and second focus, wherein said position of the energy beam is verified if said positions created with said first focus are deviating less than a predetermined distance from said positions created with said second focus.

## Background
CROSS-REFERENCE TO RELATED APPLICATIONS
This application is a continuation of U.S. Nonprovisional patent application Ser. No. 14/750,713, filed Jun. 25, 2015, which application claims priority to and the benefit of U.S. Provisional Patent Application Ser. No. 62/039,626, filed Aug. 20, 2014; U.S. Provisional Patent Application Ser. No. 62/093,882, filed Dec. 18, 2014; and U.S. Provisional Patent Application Ser. No. 62/097,328, filed Dec. 29, 2014; the contents of all of which as are hereby incorporated by reference in their entirety.


BACKGROUND
Related Field
Various embodiments of the present invention relate to a method and associated systems for position verification of an energy beam. Consolidated position, size and deflection speed verification methods and systems are also provided.
Description of Related Art
Freeform fabrication or additive manufacturing is a method for forming three-dimensional articles through successive fusion of chosen parts of powder layers applied to a worktable. A method and apparatus according to this technique is disclosed in US 2009/0152771.
Such an apparatus may comprise a work table on which the three-dimensional article is to be formed, a powder dispenser, arranged to lay down a thin layer of powder on the work table for the formation of a powder bed, an energy beam source for delivering an energy beam spot to the powder whereby fusion of the powder takes place, elements for control of the energy beam spot over the powder bed for the formation of a cross section of the three-dimensional article through fusion of parts of the powder bed, and a controlling computer, in which information is stored concerning consecutive cross sections of the three-dimensional article. A three-dimensional article is formed through consecutive fusions of consecutively formed cross sections of powder layers, successively laid down by the powder dispenser.
In order to melt the powder material at specific locations there is a need to inter alia verify the position of the energy beam spot. One needs to know that the desired position of the energy beam correspond to the actual position of the energy beam. There is a need in the art for a simple and efficient method for verifying the position of an energy beam.
Still further, in order to melt the powder material at specific locations there is a need to inter alia verify the size of the beam spot. One needs to know that different power levels of the energy beam at different areas of the powder bed correspond to the desired beam spot sizes. There is a need in the art for a simple and efficient method for verifying the beam spot size of an energy beam such as a laser beam or an electron beam. Yet still further, in order to melt the powder material at specific locations, there is a need to inter alia verify the deflection speed of the energy beam spot. One needs to know that different deflection speeds at different areas of the powder bed correspond to the desired deflection speeds. There is a need in the art for a simple and efficient method for verifying the deflection speed of an energy beam such as a laser beam or an electron beam.
BRIEF SUMMARY
Having this background, an object of the invention is to provide methods and associated systems for verifying a position of an energy beam, which is less complex than prior art methods. The above-mentioned object is achieved by the features according to the claims contained herein.
In a first aspect of the invention it is provided a method for verifying a position of an energy beam spot, the method comprising the steps of: providing an energy beam having a first focus in at least two positions on a work table, detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the first focus, providing the energy beam having a second focus in the at least two positions on a work table, detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the second focus, comparing the at least two positions created with the first and second focuses, wherein the position of the energy beam is verified if the at least two positions created with the first focus are deviating less than a predetermined distance from the at least two positions created with the second focus.
An exemplary and non-limiting advantage of this method is that the lateral position of the work table is not required to be known for verifying the deflection speed of the energy beam. Another exemplary and non-limiting advantage is that the angle of the work table is not required to be known for verifying the deflection speed of the energy beam. Still another exemplary and non-limiting advantage of the present invention is that it provides for a simple method for verifying a position stability of an energy beam.
In another example embodiment the at least two positions are arranged in a regularly 2-dimensional pattern. An exemplary and non-limiting advantage of this embodiment is that any type of pattern may be used for verifying the position. The only requirement is that the same pattern is used for the different focuses.
In another example embodiment the at least two positions are provided at identical positions as in a calibration process. An exemplary and non-limiting advantage of this embodiment is that any errors that may be caused by using different patterns in the calibration process and the verification process may be eliminated.
In still another example embodiment of the present invention the energy beam spot is a laser beam spot or an electron beam spot. An exemplary and non-limiting advantage of this example embodiment is that it is applies equally to a laser based system as to an electron beam based system.
In still another example embodiment of the present invention the positions may be detected by an IR-camera, a CCD-camera, a digital camera, a CMOS camera or a NIR-camera. An exemplary and non-limiting advantage of this example embodiment is that almost all types of cameras may be used for detecting the position of the energy beam on the work table.
In still another example embodiment the predetermined distance is less than 100 μm. An exemplary and non-limiting advantage of this embodiment is that relatively small deviations, in the order of the beam spot size, may relatively easily be detected depending on the resolution of the camera used.
In still another example embodiment the method further comprising a step of sending out a warning signal if any one of the at least two positions provided with the first focus is deviating more than the predetermined distance from the at least two positions provided with the second focus. An exemplary and non-limiting advantage of this embodiment is that deviating positions indicating a non-calibrated deflection speed maybe sent out as a warning signal/message to a user of the energy beam deflection equipment. A large enough deviation in position may also switch off the beam deflection equipment.
In still another example embodiment of the present invention the work table is provided with a reference pattern. An exemplary and non-limiting advantage of this embodiment is that the relative position of the energy beam may be determined.
In still another example embodiment the at least two positions are provided on the work table having a temperature above 500° C. An exemplary and non-limiting advantage of this embodiment is that it work equally well on cold surface as well as hot surfaces. This is also true of the calibration was made on a cold surface and the verification is made on a hot surface, i.e., the calibration may be performed at room temperature and the verification process may be performed at a temperature above 500° C. without achieving erroneous verification results.
In another aspect of the present invention it is provided a use of a verifying method according to any one of the disclosed embodiment in an additive manufacturing apparatus in which the energy beam spot is used for fusing powder material layerwise for forming three-dimensional articles. An exemplary and non-limiting advantage of this embodiment is that the accuracy of build 3-dimensional parts may further be improved.
In still another aspect of the present invention it is provided a method for forming a three-dimensional article through successively depositing individual layers of powder material that are fused together with at least one energy beam so as to form the article, the method comprising the steps of: generating a model of the three dimensional article, applying a first powder layer on a work table, directing the energy beam from at least one energy beam source over the work table, causing the first powder layer to fuse in selected locations according to the model to form a first cross section of said three dimensional article, the method further comprising a verification method for verifying a position of the energy beam used for fusing the powder material, the verification method comprising the steps of: providing the energy beam having a first focus in at least two positions on the work table, detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the first focus, providing the energy beam having a second focus in the at least two positions on the work table, detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the second focus, comparing the at least two positions created with the first and second focuses, wherein the position of the energy beam is verified if the at least two positions created with the first focus are deviating less than a predetermined distance from the at least two positions created with the second focus.
In an example embodiment of the method for forming the three-dimensional article, the verification of the energy beam position may be performed before each layer of the three-dimensional article is fused. Alternatively the verification step is performed every 5th layer, 10th, 25th layer or before starting to build a new three-dimensional article.
In still another aspect of the present invention it is provided a non-transitory computer program product comprising at least one non-transitory computer-readable storage medium having computer-readable program code portions embodied therein. The computer-readable program code portions comprise: at least one executable portion configured for: providing the energy beam having a first focus in at least two positions on the work table, detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the first focus, providing the energy beam having a second focus in the at least two positions on the work table, and detecting the at least two positions of the energy beam spot on the work table created with the energy beam having the second focus, and at least one executable portion configured for comparing the at least two positions created with the first and second focuses, wherein the position of the energy beam is verified if the at least two positions created with the first focus are deviating less than a predetermined distance from the at least two positions created with the second focus.
In still another aspect of the present invention the non-transitory computer program product may be further configured for verifying at least one of a deflection speed or a beam spot size with respect to the energy beam. In certain embodiments for verifying a deflection speed, the computer program product may further comprise: an executable portion configured for generating a predetermined pattern on a work table with the energy beam spot while deflecting the energy beam spot with a first deflection speed; an executable portion configured for detecting first positions of the energy beam spot on the work table created with the first deflection speed; an executable portion configured for generating the predetermined pattern on a work table with the energy beam spot while deflecting the energy beam spot with a second deflection speed; an executable portion configured for detecting second positions of the energy beam spot on the work table created with the second deflection speed; and an executable portion configured for comparing the first and second positions, wherein the deflection speed is verified if each one of the first positions are deviating less than a predetermined distance from corresponding ones of the second positions.
In certain embodiments for verifying a beam spot size, the computer program computer program product further comprises: an executable portion configured for generating a first energy beam spot from a first energy beam source having a predetermined size and power at a first position on a work piece, an executable portion configured for varying at least one of a focus lens setting or an astigmatism lens setting for the first energy beam spot until max intensity for the first beam spot is detected, an executable portion configured for comparing at least one setting of the focus lens and/or astigmatism lens for the detected maximum intensity of the first energy beam spot with corresponding stored settings of the focus lens and/or astigmatism lens for the first energy beam spot with the predetermined size and power, an executable portion configured for repeating the generating, varying, and comparing steps for different predetermined beam powers, and an executable portion configured for repeating the generating, varying, comparing, and the repetition thereof steps for different positions on the work piece, wherein the first energy beam spot size is verified if each detected settings of the focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of the focus lens and/or astigmatism lens.
In still another aspect of the present invention an apparatus for verifying a position of an energy beam spot is provided. The apparatus comprises: at least one energy beam source configured to generate at least one energy beam; and a control unit. The control unit is configured to: provide the at least one energy beam having a first focus in at least two positions on a work table, detect the at least two positions of the energy beam spot on the work table created with the at least one energy beam having the first focus, provide the at least one energy beam having a second focus in the at least two positions on a work table, detect the at least two positions of the energy beam spot on the work table created with the at least one energy beam having the second focus, and compare the at least two positions created with the first and second focuses, wherein the position of the energy beam is verified if the at least two positions created with the first focus are deviating less than a predetermined distance from the at least two positions created with the second focus.
In certain embodiments, the apparatus is further configured for verifying at least one of a deflection speed or a beam spot size with respect to the energy beam. Where verifying a deflection speed, the control unit is further configured to: generate a predetermined pattern on a work table with the energy beam spot while deflecting the energy beam spot with a first deflection speed; detect first deflection positions of the energy beam spot on the work table created with the first deflection speed; generate the predetermined pattern on a work table with the energy beam spot while deflecting the energy beam spot with a second deflection speed; detect second deflection positions of the energy beam spot on the work table created with the second deflection speed; and compare the first and second deflection positions, wherein the deflection speed is verified if each one of the first deflection positions are deviating less than a predetermined distance from corresponding ones of the second deflection positions.
Where verifying the beam spot size, the control unit is further configured to: vary at least one of a focus lens setting or an astigmatism lens setting for the first energy beam spot until max intensity for the first beam spot is detected, compare at least one setting of the focus lens and/or astigmatism lens for the detected maximum intensity of the first energy beam spot with corresponding stored settings of the focus lens and/or astigmatism lens for the first energy beam spot with the predetermined size and power, repeat the generating, varying, and comparing steps for one or more beam powers other than the predetermined beam power, and repeat the generating, varying, comparing, and the above repeating steps for one or more positions on the work piece other than the first position, wherein the first energy beam spot size is verified if each detected settings of the focus lens and/or astigmatism lens are deviating less than a predetermined value from corresponding stored settings of the focus lens and/or astigmatism lens.



BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS
Having thus described the invention in general terms, reference will now be made to the accompanying drawings, which are not necessarily drawn to scale, and wherein:
FIG. 1 depicts a schematic side view of an electron beam and its position variations when the electron beam focus is varied;
FIG. 2 depicts a schematic perspective view of an example embodiment of a setup for verifying a position of an energy beam;
FIG. 3 depicts a schematic side view of an apparatus in which the inventive verifying method may be implemented;
FIG. 4 depicts a schematic flow chart of the method according to an embodiment of the present invention;
FIG. 5 depicts a deflection correction vs. focus;
FIG. 6 depicts astigmatism correction vs. focus;
FIG. 7 depicts two energy beam pattern from two different focus on top of each other;
FIG. 8 is a block diagram of an exemplary system 1020 according to various embodiments;
FIG. 9A is a schematic block diagram of a server 1200 according to various embodiments; and
FIG. 9B is a schematic block diagram of an exemplary mobile device 1300 according to various embodiments.



DETAILED DESCRIPTION OF VARIOUS EMBODIMENTS
Various embodiments of the present invention will now be described more fully hereinafter with reference to the accompanying drawings, in which some, but not all embodiments of the invention are shown. Indeed, embodiments of the invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will satisfy applicable legal requirements. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly known and understood by one of ordinary skill in the art to which the invention relates. The term “or” is used herein in both the alternative and conjunctive sense, unless otherwise indicated. Like numbers refer to like elements throughout.
Still further, to facilitate the understanding of this invention, a number of terms are defined below. Terms defined herein have meanings as commonly understood by a person of ordinary skill in the areas relevant to the present invention. Terms such as “a”, “an” and “the” are not intended to refer to only a singular entity, but include the general class of which a specific example may be used for illustration. The terminology herein is used to describe specific embodiments of the invention, but their usage does not delimit the invention, except as outlined in the claims.
The term “three-dimensional structures” and the like as used herein refer generally to intended or actually fabricated three-dimensional configurations (e.g., of structural material or materials) that are intended to be used for a particular purpose. Such structures, etc. may, for example, be designed with the aid of a three-dimensional CAD system.
The term “electron beam” as used herein in various embodiments refers to any charged particle beam. The sources of charged particle beam can include an electron gun, a linear accelerator and so on.
FIG. 3 depicts an example embodiment of a freeform fabrication or additive manufacturing apparatus 300 in which the inventive verification method may be implemented. The apparatus 300 in at least this embodiment comprises an electron gun 302; a camera 304; two powder hoppers 306, 307; a start plate 316; a build tank 312; a powder distributor 310; a build platform 314; and a vacuum chamber 320.
The vacuum chamber 320 is capable of maintaining a vacuum environment by means of or via a vacuum system, which system may comprise a turbomolecular pump, a scroll pump, an ion pump and one or more valves which are well known to a skilled person in the art and therefore need no further explanation in this context. The vacuum system may be controlled by a control unit 350.
The electron gun 302 is generating an electron beam which may be used for melting or fusing together powder material 318 provided on the start plate 316. The electron gun 302 may be provided in the vacuum chamber 320. The control unit 350 may be used for controlling and managing the electron beam emitted from the electron beam gun 302. At least one focusing coil (not shown), at least one deflection coil (not shown) and an electron beam power supply (not shown) may be electrically connected to the control unit 350. In an example embodiment of the invention the electron gun generates a focusable electron beam with an accelerating voltage of about 60 kV and with a beam power in the range of 0-10 kW. The pressure in the vacuum chamber may be in the range of 1×10−3-1×10−6 mBar when building the three-dimensional article by fusing the powder layer by layer with the energy beam.
Instead of melting the powder material with an electron beam a laser beam may be used. The vacuum chamber may be optional when using a laser beam source instead of the electron beam source.
The powder hoppers 306, 307 comprise the powder material to be provided on the start plate 316 in the build tank 312. The powder material may for instance be pure metals or metal alloys such as titanium, titanium alloys, aluminum, aluminum alloys, stainless steel, Co—Cr—W alloy, etc.
The powder distributor 310 is arranged to lay down a thin layer of the powder material on the start plate 316. During a work cycle the build platform 314 will be lowered successively in relation to the ray gun after each added layer of powder material. In order to make this movement possible, the build platform 314 is in one embodiment of the invention arranged movably in vertical direction, i.e., in the direction indicated by arrow P. This means that the build platform 314 starts in an initial position, in which a first powder material layer of necessary thickness has been laid down on the start plate 316. A first layer of powder material may be thicker than the other applied layers. The reason for starting with a first layer which is thicker than the other layers is that one does not want a melt-through of the first layer onto the start plate. The build platform is thereafter lowered in connection with laying down a new powder material layer for the formation of a new cross section of a three-dimensional article. Means for lowering the build platform 314 may for instance be through a servo engine equipped with a gear, adjusting screws etc.
A model of the three dimensional article may be generated via a CAD (Computer Aided Design) tool.
After a first layer is finished, i.e., the fusion of powder material for making a first layer of the three-dimensional article, a second powder layer is provided on the work table 316. The second powder layer is distributed according to the same manner as the previous layer. However, there might be alternative methods in the same additive manufacturing machine for distributing powder onto the work table. For instance, a first layer may be provided by means of or via a first powder distributor, a second layer may be provided by another powder distributor. The design of the powder distributor is automatically changed according to instructions from the control unit. A powder distributor in the form of a single rake system, i.e., where one rake is catching powder fallen down from both a left powder hopper 306 and a right powder hopper 307, the rake as such can change design.
After having distributed the second powder layer on the work table 316, the energy beam is directed over the work table causing the second powder layer to fuse in selected locations to form a second cross section of the three-dimensional article. Fused portions in the second layer may be bonded to fused portions of the first layer. The fused portions in the first and second layer may be melted together by melting not only the powder in the uppermost layer but also remelting at least a fraction of a thickness of a layer directly below the uppermost layer.
FIG. 2 depicts a schematic perspective view an example embodiment of a setup 200 for verifying a position of an energy beam. The setup 200 comprises an electron beam source 210, a camera 230, a control unit 240 and a work table 250.
The electron beam source is used for generating an electron beam 260 which may be deflected on the work table 250 by means of or via at least one deflection coil 130, see FIG. 1. By changing a steering current to the at least one deflection coil 130 the electron beam 260, 140 may be moved at any desired position within a predetermined maximum area.
An example embodiment of verifying the position of an energy beam may in a first step 410 start with providing an energy beam having a first focus in at least two different positions 270 on the work table 250. The at least two positions may be arranged one-dimensionally or two-dimensionally. The verification process may work with a perfectly flat work table 250 as well as with a work table 250 not being perfectly flat, i.e., the position of the work table as well as the angle of the work table may not be known prior to the verification process. The exact position and angle of the work table is not a prerequisite for this verification process.
In an example embodiment the energy beam 260 may be calibrated prior to the first step, i.e., this method may be a verification of a previous calibration.
In another example embodiment, the energy beam may not be calibrated prior to the verification method. The verification process may be used in a feed-back loop to at least one deflection control unit 350 for adjusting/correcting the position of the energy beam in case of any misalignment.
The calibration procedure of the energy beam could be performed as follows.
Step A: For a specific beam power and for a specific x and y point in the work table the spot size is minimized by changing the current in focus 120 and astigmatic 115 coils. This could be done with for instance a camera and/or some other beam profiling equipment. The values of the astigmatism settings and focus settings are stored in the control unit 140, 240.
Step B: For the same position and for the same beam power, change focus to a predetermined value. Then the astigmatic coil 115 signals are optimized such that the beam spot size will be circular and at the same time the deflection coil 130 signals are optimized to put the center of the beam spot in the same x and y point. The values of the astigmatism settings and focus settings are stored.
Step C: Change focus to a new value and repeat step B.
Step D: Repeat step A-C for different positions.
Step E: Repeat step A-D for different beam powers.
When doing the calibration, the beam profiling equipment should be aligned properly, such as a Camera, X-ray or Faraday cups or a Mixture of these means. The calibration procedure may be rather complicated and time-consuming.
In an additive manufacturing system using an electron beam gun there may be at least four signals to calibrate for each beam focus value: Astigmatic coil X, Astigmatic coil Y, Deflection coil X, Deflection coil Y.
Here the origin represents the coil signals for the minimum spot size (step 1 above) and the values on the y axis are the obtained optimized values when changing focus (step 2 above).
If the gun is perfectly linear and there are no external fields present both astigmatism and deflection compensation will be zero in the center of the gun (r=0, aligned with the optical axis). As the radii (distance to the optical axis) increases, the astigmatic values will increase although they will be constant in a specific point even if the focus changes, see FIG. 6. The deflection coils signals obtained in a specific point when increasing focus will increase linear with the focus values (F=v×B), see FIG. 5. However if there are effects such as bad alignment and/or external fields present all the curves may have different levels and/or different shapes. Thus, it may be important to calibrate the system over the entire work area.
In the daily use of an additive manufacturing system it may not be possible to perform a complete calibration. Instead there is a need for a robust and simple verification procedure.
In a second step 420 the at least two positions 270 of the energy beam spot created with the energy beam 260 having the first focus is detecting on the work table 250. The detection may be performed by a camera 230, 304.
An image may be taken by the camera 230, 304 provided inside or outside the vacuum chamber 320. The camera 230, 304 may be any type of camera for example an IR-camera (Infrared-camera), NIR-camera (Near Infrared-camera), a VISNIR-camera (Visual Near Infrared-camera), a CCD camera (Charged Coupled Device-camera), a CMOS-camera (Complementary Metal Oxide Semiconductor-camera), a digital camera.
The pattern may be engraved in the work table, i.e., the surface of the work table is melted. Alternatively the energy beam may only reflect the energy beam in the pattern, i.e., the surface of the work table is not melted. The image of the full pattern may be compiled from a number of different images taken at different times during the production of the pattern.
In a third step 430 the energy beam having a second focus is provided in the at least two positions on a work table. The second focus may be any be chosen arbitrarily as long as it is different to the first focus.
In a forth step 440 the at least two positions of the energy beam spot created with the energy beam having the second focus, is detected on the work table. It may be detected using the same equipment as used for detecting the position of the at least two positons with the first focus. The second focus may be negative or positive.
In a fifth step 450 the at least two positions created with the first and second focus are compared, wherein the position of the energy beam is verified if the at least two positions created with the first focus are deviating less than a predetermined distance from the at least two positions created with the second focus.
FIG. 7 depicts an example embodiment of a pattern 710 with a verified position. A regular equidistance dot pattern 710 is first provided on a work table 700 with a first focus. The first focus is symbolized in FIG. 7 with circles. The same regular equidistance dot pattern is then provided on the work table with a second focus. The second focus is symbolized in FIG. 7 with crosses.
In FIG. 7 the pattern for the two different focuses are superimposed on each other without any lateral offset of the two patterns. In FIG. 7 the position can be the to be verified since corresponding positions with the first and second focuses are not deviating more than a predetermined distance, here the predetermined distance is zero.
A predetermined allowable distance (offset) may in a first example embodiment be less than 100 μm. In an additive manufacturing process the offset may be accepted to be larger or smaller than the 100 μm depending on the type of product to be manufactured. Parts with high tolerance requirements may need an offset in the range of 50 μm in order to be accepted and parts with low tolerance requirements may accept an offset larger than 200 μm.
A translation direction of the first position in relation to the second position may give information on how to adjust the deflection deviation with the deflection coil(s). The translation direction may vary in two dimensions, i.e., translated in both X and Y direction. The idea is to provide the same pattern with different focuses. A deviation between a position produced with a first focus compared with a second focus may give information to the operator that the position calibration is incorrect. The verification of the position may be used as a control/quality feature in an additive manufacturing apparatus. If the position is determined to be out of specification a warning signal may be sent to the operator of the machine. In an alternative embodiment when the position is determined to be out of specification the additive manufacturing machine may be switched off or put in an idle state.
The work table may be provided with a reference pattern. This reference pattern may be used for calibrating the relative position but also for detecting other deviations in the energy beam train.
FIG. 1 depicts a schematic side view of an electron beam 140 and its position variations when the electron beam focus is varied. An electron beam is emanating from a filament 110. A deflection coil 130 is capable of deflecting the electron beam 140 at any desired position within a given maximum area on a work table 150. A focus coil 120 is capable of focusing an electron beam 140 at the work table 150. An astigmatism coil 115 is capable of altering a shape of the beam spot. When a focus of an electron beam is changed, its position will change. In FIG. 1, three different beam focuses are illustrated. A first electron beam is in focus, i.e., with its focus on the work plate 150. A second one has a positive focus, i.e., its focus is above the work table 150. A third one has a negative focus, i.e., its focus is below the work table 150. A distance “a” denotes the lateral distance on the work table 150 between the in focus beam and the negative focus beam. A distance “b” denotes the lateral distance on the work table 150 between the in focus beam and the positive focus beam.
Deflection coil(s), astigmatism coil(s), focus coils(s) and beam current may be controlled by controlled unit 140.
The deflection speed of the electron beam may be altered by changing the magnetic field of the deflection coil, i.e., by ramping the electrical current in the deflection coil at different speeds, where a higher ramping speed will result in a larger deflection speed than a lower ramping speed.
In another aspect of the invention it is provided a program element configured and arranged when executed on a computer to implement a method as described herein. The program element may be installed in a computer readable storage medium. The computer readable storage medium may be any one of the control units 140, 240, and/or 350, as described elsewhere herein. The computer readable storage medium and the program element, which may comprise computer-readable program code portions embodied therein, may further be contained within a non-transitory computer program product. Further details regarding these features and configurations are provided, in turn, below.
As mentioned, various embodiments of the present invention may be implemented in various ways, including as non-transitory computer program products. A computer program product may include a non-transitory computer-readable storage medium storing applications, programs, program modules, scripts, source code, program code, object code, byte code, compiled code, interpreted code, machine code, executable instructions, and/or the like (also referred to herein as executable instructions, instructions for execution, program code, and/or similar terms used herein interchangeably). Such non-transitory computer-readable storage media include all computer-readable media (including volatile and non-volatile media).
In one embodiment, a non-volatile computer-readable storage medium may include a floppy disk, flexible disk, hard disk, solid-state storage (SSS) (e.g., a solid state drive (SSD), solid state card (SSC), solid state module (SSM)), enterprise flash drive, magnetic tape, or any other non-transitory magnetic medium, and/or the like. A non-volatile computer-readable storage medium may also include a punch card, paper tape, optical mark sheet (or any other physical medium with patterns of holes or other optically recognizable indicia), compact disc read only memory (CD-ROM), compact disc compact disc-rewritable (CD-RW), digital versatile disc (DVD), Blu-ray disc (BD), any other non-transitory optical medium, and/or the like. Such a non-volatile computer-readable storage medium may also include read-only memory (ROM), programmable read-only memory (PROM), erasable programmable read-only memory (EPROM), electrically erasable programmable read-only memory (EEPROM), flash memory (e.g., Serial, NAND, NOR, and/or the like), multimedia memory cards (MMC), secure digital (SD) memory cards, SmartMedia cards, CompactFlash (CF) cards, Memory Sticks, and/or the like. Further, a non-volatile computer-readable storage medium may also include conductive-bridging random access memory (CBRAM), phase-change random access memory (PRAM), ferroelectric random-access memory (FeRAM), non-volatile random-access memory (NVRAM), magnetoresistive random-access memory (MRAM), resistive random-access memory (RRAM), Silicon-Oxide-Nitride-Oxide-Silicon memory (SONOS), floating junction gate random access memory (FJG RAM), Millipede memory, racetrack memory, and/or the like.
In one embodiment, a volatile computer-readable storage medium may include random access memory (RAM), dynamic random access memory (DRAM), static random access memory (SRAM), fast page mode dynamic random access memory (FPM DRAM), extended data-out dynamic random access memory (EDO DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), double data rate type two synchronous dynamic random access memory (DDR2 SDRAM), double data rate type three synchronous dynamic random access memory (DDR3 SDRAM), Rambus dynamic random access memory (RDRAM), Twin Transistor RAM (TTRAIVI), Thyristor RAM (T-RAM), Zero-capacitor (Z-RAM), Rambus in-line memory module (RIMM), dual in-line memory module (DIMM), single in-line memory module (SIMM), video random access memory VRAM, cache memory (including various levels), flash memory, register memory, and/or the like. It will be appreciated that where embodiments are described to use a computer-readable storage medium, other types of computer-readable storage media may be substituted for or used in addition to the computer-readable storage media described above.
As should be appreciated, various embodiments of the present invention may also be implemented as methods, apparatus, systems, computing devices, computing entities, and/or the like, as have been described elsewhere herein. As such, embodiments of the present invention may take the form of an apparatus, system, computing device, computing entity, and/or the like executing instructions stored on a computer-readable storage medium to perform certain steps or operations. However, embodiments of the present invention may also take the form of an entirely hardware embodiment performing certain steps or operations.
Various embodiments are described below with reference to block diagrams and flowchart illustrations of apparatuses, methods, systems, and computer program products. It should be understood that each block of any of the block diagrams and flowchart illustrations, respectively, may be implemented in part by computer program instructions, e.g., as logical steps or operations executing on a processor in a computing system. These computer program instructions may be loaded onto a computer, such as a special purpose computer or other programmable data processing apparatus to produce a specifically-configured machine, such that the instructions which execute on the computer or other programmable data processing apparatus implement the functions specified in the flowchart block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including computer-readable instructions for implementing the functionality specified in the flowchart block or blocks. The computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer-implemented process such that the instructions that execute on the computer or other programmable apparatus provide operations for implementing the functions specified in the flowchart block or blocks.
Accordingly, blocks of the block diagrams and flowchart illustrations support various combinations for performing the specified functions, combinations of operations for performing the specified functions and program instructions for performing the specified functions. It should also be understood that each block of the block diagrams and flowchart illustrations, and combinations of blocks in the block diagrams and flowchart illustrations, could be implemented by special purpose hardware-based computer systems that perform the specified functions or operations, or combinations of special purpose hardware and computer instructions.
FIG. 8 is a block diagram of an exemplary system 1020 that can be used in conjunction with various embodiments of the present invention. In at least the illustrated embodiment, the system 1020 may include one or more central computing devices 1110, one or more distributed computing devices 1120, and one or more distributed handheld or mobile devices 1300, all configured in communication with a central server 1200 (or control unit) via one or more networks 1130. While FIG. 8 illustrates the various system entities as separate, standalone entities, the various embodiments are not limited to this particular architecture.
According to various embodiments of the present invention, the one or more networks 1130 may be capable of supporting communication in accordance with any one or more of a number of second-generation (2G), 2.5G, third-generation (3G), and/or fourth-generation (4G) mobile communication protocols, or the like. More particularly, the one or more networks 1130 may be capable of supporting communication in accordance with 2G wireless communication protocols IS-136 (TDMA), GSM, and IS-95 (CDMA). Also, for example, the one or more networks 1130 may be capable of supporting communication in accordance with 2.5G wireless communication protocols GPRS, Enhanced Data GSM Environment (EDGE), or the like. In addition, for example, the one or more networks 1130 may be capable of supporting communication in accordance with 3G wireless communication protocols such as Universal Mobile Telephone System (UMTS) network employing Wideband Code Division Multiple Access (WCDMA) radio access technology. Some narrow-band AMPS (NAMPS), as well as TACS, network(s) may also benefit from embodiments of the present invention, as should dual or higher mode mobile stations (e.g., digital/analog or TDMA/CDMA/analog phones). As yet another example, each of the components of the system 1020 may be configured to communicate with one another in accordance with techniques such as, for example, radio frequency (RF), BluetoothTM, infrared (IrDA), or any of a number of different wired or wireless networking techniques, including a wired or wireless Personal Area Network (“PAN”), Local Area Network (“LAN”), Metropolitan Area Network (“MAN”), Wide Area Network (“WAN”), or the like.
Although the device(s) 1110-1300 are illustrated in FIG. 8 as communicating with one another over the same network 1130, these devices may likewise communicate over multiple, separate networks.
According to one embodiment, in addition to receiving data from the server 1200, the distributed devices 1110, 1120, and/or 1300 may be further configured to collect and transmit data on their own. In various embodiments, the devices 1110, 1120, and/or 1300 may be capable of receiving data via one or more input units or devices, such as a keypad, touchpad, barcode scanner, radio frequency identification (RFID) reader, interface card (e.g., modem, etc.) or receiver. The devices 1110, 1120, and/or 1300 may further be capable of storing data to one or more volatile or non-volatile memory modules, and outputting the data via one or more output units or devices, for example, by displaying data to the user operating the device, or by transmitting data, for example over the one or more networks 1130.
In various embodiments, the server 1200 includes various systems for performing one or more functions in accordance with various embodiments of the present invention, including those more particularly shown and described herein. It should be understood, however, that the server 1200 might include a variety of alternative devices for performing one or more like functions, without departing from the spirit and scope of the present invention. For example, at least a portion of the server 1200, in certain embodiments, may be located on the distributed device(s) 1110, 1120, and/or the handheld or mobile device(s) 1300, as may be desirable for particular applications. As will be described in further detail below, in at least one embodiment, the handheld or mobile device(s) 1300 may contain one or more mobile applications 1330 which may be configured so as to provide a user interface for communication with the server 1200, all as will be likewise described in further detail below.
FIG. 9A is a schematic diagram of the server 1200 according to various embodiments. The server 1200 includes a processor 1230 that communicates with other elements within the server via a system interface or bus 1235. Also included in the server 1200 is a display/input device 1250 for receiving and displaying data. This display/input device 1250 may be, for example, a keyboard or pointing device that is used in combination with a monitor. The server 1200 further includes memory 1220, which typically includes both read only memory (ROM) 1226 and random access memory (RAM) 1222. The server's ROM 1226 is used to store a basic input/output system 1224 (BIOS), containing the basic routines that help to transfer information between elements within the server 1200. Various ROM and RAM configurations have been previously described herein.
In addition, the server 1200 includes at least one storage device or program storage 210, such as a hard disk drive, a floppy disk drive, a CD Rom drive, or optical disk drive, for storing information on various computer-readable media, such as a hard disk, a removable magnetic disk, or a CD-ROM disk. As will be appreciated by one of ordinary skill in the art, each of these storage devices 1210 are connected to the system bus 1235 by an appropriate interface. The storage devices 1210 and their associated computer-readable media provide nonvolatile storage for a personal computer. As will be appreciated by one of ordinary skill in the art, the computer-readable media described above could be replaced by any other type of computer-readable media known in the art. Such media include, for example, magnetic cassettes, flash memory cards, digital video disks, and Bernoulli cartridges.
Although not shown, according to an embodiment, the storage device 1210 and/or memory of the server 1200 may further provide the functions of a data storage device, which may store historical and/or current delivery data and delivery conditions that may be accessed by the server 1200. In this regard, the storage device 1210 may comprise one or more databases. The term “database” refers to a structured collection of records or data that is stored in a computer system, such as via a relational database, hierarchical database, or network database and as such, should not be construed in a limiting fashion.
A number of program modules (e.g., exemplary modules 1400-1700) comprising, for example, one or more computer-readable program code portions executable by the processor 1230, may be stored by the various storage devices 1210 and within RAM 1222. Such program modules may also include an operating system 1280. In these and other embodiments, the various modules 1400, 1500, 1600, 1700 control certain aspects of the operation of the server 1200 with the assistance of the processor 1230 and operating system 1280. In still other embodiments, it should be understood that one or more additional and/or alternative modules may also be provided, without departing from the scope and nature of the present invention.
In various embodiments, the program modules 1400, 1500, 1600, 1700 are executed by the server 1200 and are configured to generate one or more graphical user interfaces, reports, instructions, and/or notifications/alerts, all accessible and/or transmittable to various users of the system 1020. In certain embodiments, the user interfaces, reports, instructions, and/or notifications/alerts may be accessible via one or more networks 1130, which may include the Internet or other feasible communications network, as previously discussed.
In various embodiments, it should also be understood that one or more of the modules 1400, 1500, 1600, 1700 may be alternatively and/or additionally (e.g., in duplicate) stored locally on one or more of the devices 1110, 1120, and/or 1300 and may be executed by one or more processors of the same. According to various embodiments, the modules 1400, 1500, 1600, 1700 may send data to, receive data from, and utilize data contained in one or more databases, which may be comprised of one or more separate, linked and/or networked databases.
Also located within the server 1200 is a network interface 1260 for interfacing and communicating with other elements of the one or more networks 1130. It will be appreciated by one of ordinary skill in the art that one or more of the server 1200 components may be located geographically remotely from other server components. Furthermore, one or more of the server 1200 components may be combined, and/or additional components performing functions described herein may also be included in the server.
While the foregoing describes a single processor 1230, as one of ordinary skill in the art will recognize, the server 1200 may comprise multiple processors operating in conjunction with one another to perform the functionality described herein. In addition to the memory 1220, the processor 1230 can also be connected to at least one interface or other means for displaying, transmitting and/or receiving data, content or the like. In this regard, the interface(s) can include at least one communication interface or other means for transmitting and/or receiving data, content or the like, as well as at least one user interface that can include a display and/or a user input interface, as will be described in further detail below. The user input interface, in turn, can comprise any of a number of devices allowing the entity to receive data from a user, such as a keypad, a touch display, a joystick or other input device.
Still further, while reference is made to the “server” 1200, as one of ordinary skill in the art will recognize, embodiments of the present invention are not limited to traditionally defined server architectures. Still further, the system of embodiments of the present invention is not limited to a single server, or similar network entity or mainframe computer system. Other similar architectures including one or more network entities operating in conjunction with one another to provide the functionality described herein may likewise be used without departing from the spirit and scope of embodiments of the present invention. For example, a mesh network of two or more personal computers (PCs), similar electronic devices, or handheld portable devices, collaborating with one another to provide the functionality described herein in association with the server 1200 may likewise be used without departing from the spirit and scope of embodiments of the present invention.
According to various embodiments, many individual steps of a process may or may not be carried out utilizing the computer systems and/or servers described herein, and the degree of computer implementation may vary, as may be desirable and/or beneficial for one or more particular applications.
FIG. 9B provides an illustrative schematic representative of a mobile device 1300 that can be used in conjunction with various embodiments of the present invention. Mobile devices 1300 can be operated by various parties. As shown in FIG. 9B, a mobile device 1300 may include an antenna 1312, a transmitter 1304 (e.g., radio), a receiver 1306 (e.g., radio), and a processing element 1308 that provides signals to and receives signals from the transmitter 1304 and receiver 1306, respectively.
The signals provided to and received from the transmitter 1304 and the receiver 1306, respectively, may include signaling data in accordance with an air interface standard of applicable wireless systems to communicate with various entities, such as the server 1200, the distributed devices 1110, 1120, and/or the like. In this regard, the mobile device 1300 may be capable of operating with one or more air interface standards, communication protocols, modulation types, and access types. More particularly, the mobile device 1300 may operate in accordance with any of a number of wireless communication standards and protocols. In a particular embodiment, the mobile device 1300 may operate in accordance with multiple wireless communication standards and protocols, such as GPRS, UMTS, CDMA2000, 1×RTT, WCDMA, TD-SCDMA, LTE, E-UTRAN, EVDO, HSPA, HSDPA, Wi-Fi, WiMAX, UWB, IR protocols, Bluetooth protocols, USB protocols, and/or any other wireless protocol.
Via these communication standards and protocols, the mobile device 1300 may according to various embodiments communicate with various other entities using concepts such as Unstructured Supplementary Service data (USSD), Short Message Service (SMS), Multimedia Messaging Service (MMS), Dual-Tone Multi-Frequency Signaling (DTMF), and/or Subscriber Identity Module Dialer (SIM dialer). The mobile device 1300 can also download changes, add-ons, and updates, for instance, to its firmware, software (e.g., including executable instructions, applications, program modules), and operating system.
According to one embodiment, the mobile device 1300 may include a location determining device and/or functionality. For example, the mobile device 1300 may include a GPS module adapted to acquire, for example, latitude, longitude, altitude, geocode, course, and/or speed data. In one embodiment, the GPS module acquires data, sometimes known as ephemeris data, by identifying the number of satellites in view and the relative positions of those satellites.
The mobile device 1300 may also comprise a user interface (that can include a display 1316 coupled to a processing element 1308) and/or a user input interface (coupled to a processing element 308). The user input interface can comprise any of a number of devices allowing the mobile device 1300 to receive data, such as a keypad 1318 (hard or soft), a touch display, voice or motion interfaces, or other input device. In embodiments including a keypad 1318, the keypad can include (or cause display of) the conventional numeric (0-9) and related keys (#, *), and other keys used for operating the mobile device 1300 and may include a full set of alphabetic keys or set of keys that may be activated to provide a full set of alphanumeric keys. In addition to providing input, the user input interface can be used, for example, to activate or deactivate certain functions, such as screen savers and/or sleep modes.
The mobile device 1300 can also include volatile storage or memory 1322 and/or non-volatile storage or memory 1324, which can be embedded and/or may be removable. For example, the non-volatile memory may be ROM, PROM, EPROM, EEPROM, flash memory, MMCs, SD memory cards, Memory Sticks, CBRAM, PRAM, FeRAM, RRAM, SONOS, racetrack memory, and/or the like. The volatile memory may be RAM, DRAM, SRAM, FPM DRAM, EDO DRAM, SDRAM, DDR SDRAM, DDR2 SDRAM, DDR3 SDRAM, RDRAM, RIMM, DIMM, SIMM, VRAM, cache memory, register memory, and/or the like. The volatile and non-volatile storage or memory can store databases, database instances, database mapping systems, data, applications, programs, program modules, scripts, source code, object code, byte code, compiled code, interpreted code, machine code, executable instructions, and/or the like to implement the functions of the mobile device 1300.
The mobile device 1300 may also include one or more of a camera 1326 and a mobile application 1330. The camera 1326 may be configured according to various embodiments as an additional and/or alternative data collection feature, whereby one or more items may be read, stored, and/or transmitted by the mobile device 1300 via the camera. The mobile application 1330 may further provide a feature via which various tasks may be performed with the mobile device 1300. Various configurations may be provided, as may be desirable for one or more users of the mobile device 1300 and the system 1020 as a whole.
The invention is not limited to the above-described embodiments and many modifications are possible within the scope of the following claims. Such modifications may, for example, involve using a different source of energy beam than the exemplified electron beam such as a laser beam. Other materials than metallic powder may be used, such as the non-limiting examples of: electrically conductive polymers and powder of electrically conductive ceramics. Images taken from more than 2 layers may also be possible, i.e., in an alternative embodiment of the present invention for detecting a defect at least one image from at least three, four or more layers are used. A defect may be detected if the defect position in the three, four or more layers are at least partly overlapping each other. The thinner the powder layer the more powder layers may be used in order to detect a factual defect.
Indeed, a person of ordinary skill in the art would be able to use the information contained in the preceding text to modify various embodiments of the invention in ways that are not literally described, but are nevertheless encompassed by the attached claims, for they accomplish substantially the same functions to reach substantially the same results. Therefore, it is to be understood that the invention is not limited to the specific embodiments disclosed and that modifications and other embodiments are intended to be included within the scope of the appended claims. Although specific terms are employed herein, they are used in a generic and descriptive sense only and not for purposes of limitation.

## Claims

1. A computer-implemented method for verifying a position of an energy beam spot, said method comprising the steps of:
providing, via at least one control unit containing a processor, an energy beam spot having a first focus directed toward at least two locations on a work table,
detecting at least two positions of said energy beam spot on said work table created with said energy beam having said first focus,
providing, via said at least one control unit, said energy beam spot having a second focus directed toward said at least two locations on said work table,
detecting at least two corresponding positions of said energy beam spot on said work table created with said energy beam having said second focus, and
comparing, via said at least one control unit, said at least two positions created with said first focus and said at least two corresponding positions created with said second focus, and verifying said position of the energy beam spot by verifying that said at least two positions created with said first focus deviate less than a predetermined distance from said corresponding at least two positions created with said second focus,
wherein said positions are detected by at least one of an IR-camera, a CCD-camera, a digital camera, a CMOS camera or a NIR-camera.

2. The computer-implemented method according to claim 1, wherein said at least two positions created with said first focus are a regularly 2-dimensional pattern.

3. The computer implemented method according to claim 1, wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at identical positions as in a calibration process.

4. The computer-implemented method according to claim 1, wherein said at least two positions created with said first focus and said at least two corresponding positions created with said second focus are provided at different positions as in a calibration process.

5. The computer-implemented method according to claim 1, wherein said energy beam spot is an electron beam spot.

6. The computer-implemented method according to claim 1, wherein said work table is provided with a reference pattern.

7. The computer-implemented method according to claim 1, wherein said at least two locations are provided on said work table having a surface temperature above 500° C.

8. The computer-implemented method according to claim 1, wherein said predetermined distance is less than 20 μm.

9. The computer-implemented method according to claim 1, further comprising a step of sending a warning signal when any one of said at least two positions provided with said first focus deviate more than said predetermined distance from said at least two corresponding positions provided with said second focus.

10. The computer-implemented method according to claim 1, wherein said energy beam spot with said first focus and said energy beam spot with said second focus are provided on the same work table.

11. The computer-implemented method according to claim 1, wherein a deviation between the at least two positions created with said first focus and the at least two corresponding positions created with said second focus is compensated for by altering a setting of a deflection coil.

12. The computer-implemented method according to claim 1, wherein:
the method further comprises the step of receiving and storing, within one or more memory storage areas, a model of at least one three-dimensional article; and
at least one of the varying, comparing, or repeating steps is performed via execution of one or more computer processors.

13. The computer-implemented method according to claim 1, wherein:
the method is further configured for verifying a deflection speed of the energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
generating a predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a first deflection speed;
detecting first positions of said energy beam spot on said work table created with said first deflection speed;
generating said predetermined pattern on the work table with said energy beam spot while deflecting said energy beam spot with a second deflection speed;
detecting second positions of said energy beam spot on said work table created with said second deflection speed; and
comparing said first and second positions, verifying that each one of said first positions deviate less than a predetermined distance from corresponding ones of said second positions.

14. The computer-implemented method according to claim 13, wherein:
the method is further configured for verifying a size of the at least one energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot,
(d) repeating steps a-c for different predetermined beam powers, and
(e) repeating steps a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the detected maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.

15. The computer-implemented method according to claim 1, wherein:
the method is further configured for verifying a size of the at least one energy beam spot; and
the method further comprises the steps of, via said at least one control unit:
(a) generating a first energy beam spot from a first energy beam source, the first energy beam spot having a predetermined size and power at a first position on a work piece,
(b) varying at least one of a focus lens setting or an astigmatism lens setting for said first energy beam spot until a maximum intensity of the first energy beam spot is detected,
(c) comparing at least one setting of said focus lens and/or astigmatism lens associated with said detected maximum intensity of the first energy beam spot with corresponding stored settings of said focus lens and/or astigmatism lens associated with said predetermined size and power of the first energy beam spot,
(d) repeating step a-c for different predetermined beam powers, and
(e) repeating step a-d for different positions on said work piece, and verifying said first energy beam spot size by verifying that each of said focus lens and/or astigmatism lens settings associated with the maximum intensity deviate less than a predetermined value from corresponding stored settings of said focus lens and/or astigmatism lens.