# Patent

## Title
Semiconductor devices, multi-die packages, and methods of manufacture thereof

## Abstract

Semiconductor device, multi-die packages, and methods of manufacture thereof are described. In an embodiment, a semiconductor device may include: first conductive pillars and second conductive pillars respectively aligned to a first row of first pins and a second row of second pins of a first die, the first pins and the second pins differing in function; a first insulating layer covering surfaces of the first conductive pillars and the second conductive pillars facing away from the first die; first pads disposed on a surface of the first insulating layer facing away from the first die, the first pads substantially aligned to the first conductive pillars; and first traces coupled to the first pads, the first traces extending over a portion of the first insulating layer covering the second conductive pillars.

## Background
PRIORITY CLAIM AND CROSS-REFERENCE
This application claims the benefit of U.S. Provisional Application No. 62/086,071, filed on Dec. 1, 2014, entitled “Memory Die-to-Die Routing in Fan-Out Package,” which application is hereby incorporated herein by reference.


BACKGROUND
In a multi-die package, redistribution layers (RDLs) may be used to electrically connect various dies to each other. Input/output (I/O) connectors such as I/O pins of the various dies may be connected to each other through the RDLs. An advantageous feature of this packaging technology is the possibility of forming fan-out packages. Thus, the I/O pads on the die can be redistributed to cover a greater area than the die, and hence the number of I/O pads packed on the surfaces of the packaged dies can be increased.
Given the small pitch of input/output (I/O) pins on die, it is difficult to find available surface area for routing signal lines such as inter-die signal lines. Such concerns are particularly difficult to overcome with, e.g., wide input/output (WIO) memory devices, such are commonly employed today.



BRIEF DESCRIPTION OF THE DRAWINGS
Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is noted that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
FIGS. 1A to 1C show various views of a semiconductor device comprising a polymer layer, in accordance with some embodiments.
FIGS. 2A to 2D show various views of a semiconductor device comprising signal traces, a ground bridging line, and a power bridging line formed in different levels of the semiconductor device, in accordance with some embodiments.
FIGS. 3A to 3C and FIGS. 4A to 4C show various views of a semiconductor device comprising redistribution of a ground bridging line and a power bridging line, in accordance with some embodiments.
FIGS. 5A to 5F show a process flow illustrating various intermediary steps of manufacturing a semiconductor device, in accordance with some embodiments.



DETAILED DESCRIPTION
The following disclosure provides many different embodiments, or examples, for implementing different features of the provided subject matter. Specific examples of components and stacks are described below to simplify the present disclosure. These are, of course, merely examples and are not intended to be limiting. For example, the formation of a first feature over or on a second feature in the description that follows may include embodiments in which the first and second features are formed in direct contact, and may also include embodiments in which additional features may be formed between the first and second features, such that the first and second features may not be in direct contact. In addition, the present disclosure may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.
Further, spatially relative terms, such as “beneath,” “below,” “lower,” “above,” “upper” and the like, may be used herein for ease of description to describe one element or feature's relationship to another element(s) or feature(s) as illustrated in the figures. The spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The apparatus may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein may likewise be interpreted accordingly.
FIG. 1A shows a cross-sectional view of a semiconductor device 100, in accordance with one or more embodiments. The semiconductor device 100 may include a first die 102, which may be a memory device, e.g. a dynamic random access memory (DRAM) device. In some embodiments, the first die 102 may be a wide input-output (I/O) memory device, commonly known as a WIO memory device. In other embodiments, the first die 102 may be a WIO2 memory device, which is a strong candidate for mobile DRAMs achieving high bandwidth (e.g. in a range from about 50 GB/s to about 70 GB/s). The first die 102 may include a substrate, one or more circuit components, and an interconnect structure. The substrate, the one or more active devices, and the interconnect structure of the first die 102 are not shown in FIG. 1A and are collectively labeled as the first die 102 for the sake of simplicity.
The substrate of the first die 102 may be a semiconductor wafer and may comprise silicon (Si); germanium (Ge); a compound semiconductor including silicon carbide, gallium arsenic, gallium phosphide, indium phosphide, indium arsenide, and/or indium antimonide; an alloy semiconductor including SiGe, GaAsP, AlInAs, AlGaAs, GaInAs, GaInP, and/or GaInAsP; or combinations thereof. The substrate of the first die 102 may be a bulk semiconductor substrate, a semiconductor-on-insulator (SOI) substrate, a multi-layered or gradient semiconductor substrate, or the like.
The one or more circuit components of the first die 102 may be formed within and/or atop the substrate of the first die 102 using suitable semiconductor manufacturing processes. The one or more circuit components may include at least one active device (e.g. a transistor) and/or at least one passive device (e.g. resistor, capacitor, inductor, or the like), although other circuit components may be possible as well.
The interconnect structure of the first die 102 may be formed over the substrate and the one or more circuit components of the first die 102. The interconnect structure may electrically connect the one or more circuit components of the first die 102 to form functional circuits. The interconnect structure may include one or more inter-layer dielectric (ILD) layers and/or one or more inter-metal dielectric (IMD) layers containing conductive features therein. The one or more ILD and/or IMD layers may be formed over the substrate and the one or more circuit components of the first die 102 by a suitable process (e.g. by a spin coating process or a deposition process). The one or more ILD and/or IMD layers may comprise at least one low-k dielectric material, which may have a k value, for example, less than or equal to about 4.0 (e.g. less than or equal to about 3.8). As an example, in some embodiments, the one or more ILD and/or IMD layers of the interconnect structure may be comprise an oxide (e.g. silicon oxide), a nitride (e.g. silicon nitride), an oxynitride, undoped silica glass (USG), combinations thereof, or the like. The one or more ILD and/or IMD layers may be patterned (e.g. using a combination of photolithography and etching processes) to form vias and/or trenches therein. The conductive features of the interconnect structure may subsequently be formed in the vias and/or trenches, e.g. by depositing a seed layer in the vias and/or trenches and subsequently filling the vias and/or trenches with a conductive material using, for example, a plating and/or deposition process. The conductive material may overfill the vias and/or trenches. In such an example, a planarizing process (e.g. a chemical mechanical polishing (CMP) process) may be performed on the conductive material. The conductive features may comprise copper, aluminum, tungsten, combinations thereof, or the like.
The first die 102 may have a first side 102a, which may be a surface of the ILD and/or IMD layers of the interconnect structure of the first die 102 that is farthest from the substrate of the first die 102. As an example, in the orientation shown in FIG. 1A, the first side 102a may be the top-most surface of the ILD and/or IMD layers of the interconnect structure of the first die 102. The semiconductor device 100 may include input/output (I/O) features that may be disposed at or over the first die 102. For example, pins 104 may be formed at the first side 102a of the first die 102. Only four pins 104 are shown in the example of FIG. 1A, however, in another example, more than four (e.g. five, six, seven, eight, or more) pins 104 may be formed at the first side 102a of the first die 102. The pins 104 may comprise a conductive material such as copper, aluminum, tungsten, combinations thereof, or the like. The pins 104 may comprise at least one ground pin 104g, at least one power pin 104p, at least one first signal pin 104s1, and at least one second signal pin 104s2. The ground pin 104g and the power pin 104p may be directed respectively to the ground and power functions of the first die 102, while the first signal pin 104s1 and the second signal pin 104s2 may be directed to the signal functions of the first die 102. In other words, the ground pin 104g and the first signal pin 104s1 may differ in function. Similarly, the power pin 104p and the first signal pin 104s1 may differ in function. In like manner, the second signal pin 104s2 may have a function different from the ground pin 104g and the power pin 104p. 
The semiconductor device 100 may also include a passivation layer 106 formed on or over the first side 102a of the first die 102 and over peripheral portions of each of the pins 104. For example, the passivation layer 106 may comprise openings that are aligned to central portions the pins 104, while peripheral portions of the pins 104 are substantially covered by the passivation layer 106. The passivation layer 106 may protect the first die 102 from various environmental contaminants. The passivation layer 106 may comprise a dielectric material, examples of which include a polyimide, a polymer, an oxide (e.g. a silicon containing oxide, e.g. SiO), a nitride (e.g. a silicon containing nitride, e.g. SiN), an oxynitride (e.g. a silicon containing oxynitride), undoped silicate glass (USG), combinations thereof, or the like.
FIG. 1B shows a plan view illustrating a layout of the pins 104, in accordance with one or more embodiments. The layout shown in FIG. 1B may, for example, be a view of the semiconductor device 100 taken along the line A-A′ shown in FIG. 1A, while the cross-sectional view of the first die 102, the pins 104, and the passivation layer 106 shown in FIG. 1A may, for example, be a view of the semiconductor device 100 shown in FIG. 1B taken along the line B-B′. As illustrated in FIG. 1B, the pins 104 may be arranged as a matrix, e.g. in a top-down view. Such an arrangement may be present in an embodiment where the first die 102 is a WIO2 memory device. In the example of FIG. 1B, the matrix comprises four rows R1, R2, R3, R4, with each row comprising six pins. However, the number of rows in the matrix and the number of pins per row may be different in other embodiments.
As illustrated in FIG. 1B, the ground pins 104g, power pins 104p, first signal pins 104s1, and second signal pins 104s2 may be arranged on respective rows of the matrix. In the example of FIG. 1B, the ground pins 104g may be arranged along a first row R1 of the matrix, while the power pins 104p may be arranged along a second row R2 of the matrix different from the first row R1. Furthermore, as illustrated in FIG. 1B, the first row R1 comprising the ground pins 104g is separated from the second row R2 comprising the power pins 104p by a third row R3 of the matrix comprising the first signal pins 104s1. Furthermore, in the example of FIG. 1B, the third row R3 comprising first signal pins 104s1 is separated from a fourth row R4 of the matrix comprising the second signal pins 104s2 by the second row R2 comprising the power pins 104p. In other words, pins arranged along a respective row of the matrix have identical functions, while different pins arranged along immediately adjacent rows of the matrix differ in function.
As shown in FIG. 1B, the pins 104 in immediately adjacent rows (e.g. first row R1 and third row R3) may be separated by a first distance D1, which may be in a range from about 10 micrometers to about 60 micrometers (e.g. about 40 micrometers). As another example, pins 104 in a given row (e.g. first row R1) that are immediately adjacent to each other may be separated by a second distance D2, which may also be in the range from about 10 micrometers to about 60 micrometers (e.g. about 40 micrometers). In other words, the pins 104 of a given row of the matrix and the pins 104 in a given column of the matrix may have a pitch in the range from about 10 micrometers to about 60 micrometers (e.g. about 40 micrometers).
Referring back to FIG. 1A, the semiconductor device 100 may also include conductive pillars 108 aligned to and electrically connected to the pins 104. In some embodiments, a first portion (e.g. a lower portion) of a respective conductive pillar 108 may be disposed in the opening in the passivation layer 106, while a second portion (e.g. an upper portion) of the respective conductive pillar 108 may extend over a surface of the passivation layer 106 facing away from the first die 102, as shown in FIG. 1A. In the embodiment of FIG. 1A, the conductive pillars 108 may have sidewalls that are substantially perpendicular to a surface of the pins 104 and/or a surface of the passivation layer 106 facing away from the first die 102. However, in other embodiments, the conductive pillars 108 may have tapered sidewalls. In yet another embodiment, the conductive pillars 108 may be shaped as bumps.
A respective conductive pillar 108 may be aligned and electrically connected to a respective pin 104. For instance, in the example shown in FIG. 1A, the conductive pillars 108 may include a ground conductive pillar 108g, a first signal conductive pillar 108s1, a power conductive pillar 108p, and a second signal conductive pillar 108s2 respectively aligned and electrically connected to the ground pin 104g, the first signal pin 104s1, the power pin 104p, and the second signal pin 104s2. The conductive pillars 108 may comprise copper, aluminum, tungsten, combinations thereof, or the like, although other suitable materials (e.g. other metals and/or metal alloys) may also be used for the conductive pillars 108. The conductive pillars 108 may extend from the pins 104 by a third distance D3, which may be in a range from about 5 micrometers to about 30 micrometers, for example.
Also shown in FIG. 1A is a polymer layer 110 disposed over the passivation layer 106 and around the conductive pillars 108. A surface of the polymer layer 110 facing away from the first die 102 may be substantially coplanar with a surface of the conductive pillars 108 facing away from the first die 102. The polymer layer 110 may comprise an insulating material, such as polyimide (PI), polybenzoxazole (PBO), benzocyclobuten (BCB), epoxy, silicone, acrylates, nano-filled pheno resin, siloxane, a fluorinated polymer, polynorbornene, or the like. In an embodiment, the material of the polymer layer 110 may be different from the material of the passivation layer 106.
As described above in relation to FIG. 1B, the pins 104 may be arranged as a matrix, e.g. in a top-down view. Similarly, since the conductive pillars 108 are aligned to the pins 104, the conductive pillars 108 may also be arranged as a matrix, e.g. in a top-down view. This is illustrated in FIG. 1C, which shows a layout of the conductive pillars 108, in accordance with one or more embodiments. The layout shown in FIG. 1C may, for example, be a view of the semiconductor device 100 shown in FIG. 1A taken along the line C-C′, while the cross-sectional view shown in FIG. 1A may, for example, be a view of the semiconductor device 100 shown in FIG. 1C taken along the line D-D′.
In the layout shown in FIG. 1C, the ground conductive pillars 108g may be arranged along the first row R1 of the matrix (e.g. over the ground pins 104g), while the power conductive pillars 108p may be arranged along the second row R2 of the matrix (e.g. over the power pins 104p). Furthermore, as illustrated in FIG. 1C, the first row R1 comprising the ground conductive pillars 108g is separated from the second row R2 comprising the power conductive pillars 108p by the third row R3 comprising the first signal conductive pillars 108s1 (e.g. disposed over the first signal pins 104s1). Furthermore, in the example of FIG. 1C, the second row R2 comprising the power conductive pillars 108p separates the third row R3 comprising the first signal conductive pillars 108s1 and the fourth row R4 comprising the second signal conductive pillars 108s2 (e.g. disposed over the second signal pins 104s2).
Since the conductive pillars 108 are aligned to the pins 104, the conductive pillars 108 may have a pitch similar to the pitch of the pins 104. For example, as shown in FIG. 1C, conductive pillars 108 in immediately adjacent rows (e.g. first row R1 and third row R3) may be separated by the first distance D1, while conductive pillars 108 in a given row (e.g. first row R1) that are immediately adjacent to each other may be separated by the second distance D2.
The semiconductor device 100 may, as an example, be a part of a multi-die package comprising a plurality of dies. For example, the semiconductor device 100 may be included in a fan-out multi-die package, and at least one second die may be placed adjacent to (e.g. laterally adjacent to) the semiconductor device 100. The semiconductor device 100 and the adjacent second die may be encapsulated in a molding compound to form the fan-out multi-die package (e.g. see description below in respect of FIGS. 5C and 5D). There may be a need to route signal traces (e.g. inter-die signal traces) between the semiconductor device 100 and the at least one second die, e.g. to enable the exchange of signals between the various dies of the fan-out multi-die package. The signal traces may also be referred to as signal lines or inter-die signal lines. At least a portion of these signal traces may be formed in a first redistribution layer (RDL) formed over the conductive pillars 108 and the polymer layer 110.
FIG. 2A shows a first RDL 202 disposed over the conductive pillars 108 and the polymer layer 110. The first RDL 202 may include a first insulating layer 204, at least one first signal pad 206s1, at least one second signal pad 206s2, and signal traces 208 disposed over the first insulating layer 204 (e.g. over a surface of the first insulating layer 204 facing away from the first die 102). The first signal pad 206s1, second signal pad 206s2, and signal traces 208 may function to electrically connect the first die 102 to another die that may be placed adjacent to the semiconductor device 100.
As shown in FIG. 2A, the first signal pad 206s1 may be electrically connected to the first signal conductive pillar 108s1 by a first via 210, while the second signal pad 206s2 may be electrically connected to the second signal conductive pillar 108s2 by a second via 212. The first via 210 and the second via 212 may extend through the first insulating layer 204 and may be respectively aligned to the first signal conductive pillar 108s1 and the second signal conductive pillar 108s2. In addition, the first signal pad 206s1 and the second signal pad 206s2 may also be respectively aligned to the first signal conductive pillar 108s1 and the second signal conductive pillar 108s2. For example, the first via 210 and the first signal pad 206s1 may be substantially aligned to a central region of the first signal conductive pillar 108s1. Similarly, the second via 212 and the second signal pad 206s2 may be substantially aligned to a central region of the second signal conductive pillar 108s2. The first via 210 and the second via 212 may have a width (e.g. a diameter) in a range from about 3 micrometers to about 12 micrometers (e.g. about 5 micrometers), which is less than the widths (e.g. diameters) of the first signal conductive pillar 108s1 and the second signal conductive pillar 108s2, which may be in a range from about 10 micrometers to about 30 micrometers (e.g. about 25 micrometers).
In an embodiment, the first insulating layer 204 may comprise low-k dielectric materials and may be similar in composition to the ILD and/or IMD layers of the first die 102 or the passivation layer 106. In some embodiments, the first insulating layer 204 and the polymer 110 may have substantially similar compositions. The first via 210 and the second via 212 may be filled with conductive material comprising copper, aluminum, tungsten, combinations thereof, or the like. The first signal pad 206s1, the second signal pad 206s2, and the signal traces 208 may comprise similar conductive materials.
As described above in relation to FIG. 1C, the conductive pillars 108 may be arranged as a matrix, e.g. in a top-down view. Each of the first signal conductive pillars 108s1 may have a respective first via 210 and a respective first signal pad 206s1 electrically connected and aligned to it. Similarly, each of the second signal conductive pillars 108s2 may have a respective second via 212 and a respective second signal pad 206s2 electrically connected and aligned to it. Consequently, the first signal pads 206s1 and the second signal pads 206s2 may also be arranged as a matrix, e.g. in a top-down view. FIG. 2B shows a plan view illustrating a layout of the first signal pads 206s1 and the second signal pads 206s2, in accordance with one or more embodiments. The layout shown in FIG. 2B may, for example, be a view of the semiconductor device 100 shown in FIG. 2A taken along the line E-E′, while the cross-sectional view shown in FIG. 2A may, for example, be a view of the semiconductor device 100 shown in FIG. 2B taken along the line F-F′.
In the layout shown in FIG. 2B, the first signal pads 206s1 may be arranged along the third row R3 of the matrix (e.g. over the first signal conductive pillars 108s1) while the second signal pads 206s2 may be arranged along the fourth row R4 of the matrix (e.g. over the second signal conductive pillars 108s2). Also shown in FIG. 2B are the first vias 210 (shown as dashed lines) that are disposed below the first signal pads 206s1, but over the first signal conductive pillars 108s1 (also shown as dashed lines). FIG. 2B also shows the second vias 212 (shown as dashed lines) that are disposed below the second signal pads 206s2, but over the second signal conductive pillars 108s2 (also shown as dashed lines).
A respective signal trace 208 may be coupled to a respective first signal pad 206s1 or a respective second signal pad 206s2, as shown in FIG. 2B. Furthermore, since the first insulating layer 204 covers the second row R2 comprising the power conductive pillars 108p, the space S between the third row R3 comprising the first signal pads 206s1 and the fourth row R4 comprising the second signal pads 206s2 may be used for the routing of the signal traces 208 (e.g. the signal traces 208 coupled to the second signal pads 206s2). It is noted that the space S corresponds to the surface of the portion of the first insulating layer 204 covering the power conductive pillars 108p. As a further example, since the first insulating layer 204 covers the first row R1 comprising the ground conductive pillars 108g, the surface of the portion of the first insulating layer 204 covering the ground conductive pillars 108g may also be used for the routing of the signal traces 208 (e.g. the signal traces 208 coupled to the first signal pads 206s1).
The third row R3 comprising the first signal pads 206s1 and the fourth row R4 comprising the second signal pads 206s2 may be separated by twice the first distance D1 (indicated in FIG. 2B as “2×D1”). In other words, the third row R3 comprising the first signal pads 206s1 and the fourth row R4 comprising the second signal pads 206s2 may be separated by a distance in a range from about 40 micrometers to about 120 micrometers (e.g. about 80 micrometers). However, it is noted that for a given row (e.g. the third row R3 or the fourth row R4), the pitch of the signal pads 206s1 or 206s2 may be substantially equal to the second distance D2.
In an embodiment, the first signal pads 206s1 and/or the second signal pads 206s2 may have a width (e.g. a diameter) in a range from about 10 micrometers to about 30 micrometers (e.g. about 20 micrometers). Consequently, the space S available for the routing of the signal traces 208 may be in a range from about 35 micrometers to about 85 micrometers. In an example where a width of each of the signal traces 208 is in a range from about 1 micrometers to about 10 micrometers (e.g. about 5 micrometers) and immediately adjacent signal traces 208 are spaced apart by about 1 ̃10 micrometers, then the number of signal traces 208 that can be routed in the space S may be about 3 signal traces to about 8 signal traces.
In addition to routing the signal traces 208 from the first die 102 to at least one second die of a multi-die package, a ground bridging line 214 may be used to bridge the ground conductive pillars 108g of the semiconductor device 100 to each other. FIG. 2C illustrates the ground bridging line 214 in greater detail and may, as an example, be obtained by taking a cross-section along the first row R1 shown in FIG. 2B comprising the ground conductive pillars 108g. The ground bridging line 214 may comprise similar materials as the ground conductive pillars 108g. As shown in FIGS. 2B and 2C, the ground bridging line 214 may comprise sections disposed between the ground conductive pillars 108g of the first row R1 and may serve to electrically connect the ground conductive pillars 108g to one another. The ground bridging line 214 may be disposed on the surface of the passivation layer 106 facing away from the first die 102 and may be covered by the polymer layer 110. Consequently, the ground bridging line 214 and the signal traces 208 are disposed on different levels (e.g. different interconnect levels) of the semiconductor device 100. In this way, signal traces 208 can be routed—using the first RDL 202—in the space that would have otherwise been occupied by ground routing (e.g. the ground bridging line 214) if the ground bridging line 214 was formed on the same interconnect level as the signal traces 208. This allows for a greater number of signal traces 208 in the first RDL 202 and/or wider signal traces 208 and/or a larger spacing between immediately adjacent signal traces 208 in the first RDL 202, without having to decrease the width of the first signal pad 206s1 and/or the width of the second signal pad 206s2. For example, the signal traces 208 may be routed such that each signal trace 208 has a width of about 5 micrometers and is separated from an immediately adjacent signal trace 108 by about 5 micrometers. Having wider signal traces 208 and/or a larger spacing between immediately adjacent signal traces 208 may, in turn, improve performance of the semiconductor device 100 and the fan-out multi-die package including the semiconductor device by lowering resistance and/or line capacitance. FIG. 2B shows five or six signal traces 208 being routed in the space that would have otherwise been occupied by the ground bridging line 214 if the ground bridging line 214 was formed on the same interconnect level as the signal traces 208.
In like manner, a power bridging line 216 may be used to bridge the power conductive pillars 108p to each other. FIG. 2D illustrates the power bridging line 216 in greater detail and may, as an example, be obtained by taking a cross-section along the third row R3 comprising the power conductive pillars 108p. The power bridging line 216 may comprise similar materials as the power conductive pillars 108g. As shown in FIGS. 2B and 2D, the power bridging line 216 may comprise sections disposed between the power conductive pillars 108p of the third row R3 and may serve to electrically connect the power conductive pillars 108p to one another. The power bridging line 216 may be disposed on the surface of the passivation layer 106 facing away from the first die 102 and may be covered by the polymer layer 110. Consequently, the power bridging line 216 and the signal traces 208 are also disposed on different levels (e.g. different interconnect levels) of the semiconductor device 100. In this way, signal traces 208 can be routed—using the first RDL 202—in the space that would have otherwise been occupied by power routing (e.g. the power bridging line 216) if the power bridging line 216 was formed on the same interconnect level as the signal traces 208. The advantages that follow from this are similar to the advantages described above in respect of having the ground bridging line 214 and the signal traces 208 on different interconnect levels of the semiconductor device 100.
In some embodiments, the ground bridging line 214 may need to be redistributed out (e.g. to a ground connection that is external to the semiconductor device 100). FIGS. 3A and 3B show a ground connector 308g disposed adjacent to (e.g. laterally adjacent to) the first row R1 comprising ground conductive pillars 108g that allows for this. As shown in FIGS. 3A and 3B, the ground bridging line 214 may be extended to couple with the ground connector 308g that is disposed adjacent to an outermost ground conductive pillar 108g of the first row R1 of ground conductive pillars 108g. As illustrated in FIG. 3A, in contrast to the ground conductive pillars 108g that extend at least partially through the passivation layer 106, the ground connector 308g is formed on the surface of the passivation layer 106 facing away from the first die 102, and no portion of the ground connector 308g extends through the passivation layer 106. The ground connector 308g may comprise similar materials as the ground conductive pillars 108g. A second RDL 302 may be formed over the first RDL 202. The second RDL 302 may include a second insulating layer 304 (e.g. comprising similar materials as the first insulating layer 204) that may be formed over the first insulating layer 204 and the signal traces 208. Consequently, the signal traces 208 are covered by the second insulating layer 304, and a surface of the second insulating layer 304 facing away from the first die 102 (e.g. a top surface of the second insulating layer 304 for the orientation shown in FIG. 3A) may be used to route and/or redistribute the ground bridging line 214. For example, a third via 306 may extend through the first insulating layer 204 and the second insulating layer 304 and may couple to a ground pad 310 that may be disposed on the surface of the second insulating layer 304 facing away from the first die 102 (e.g. the top surface of the second insulating layer 304). The ground pad 310 may be coupled to a ground trace (not shown) that extends on the surface of the second insulating layer 304, e.g. towards the ground connection that is external to the semiconductor device 100.
Similarly, in some embodiments, the power bridging line 216 may need to be redistributed out (e.g. to a power source that is external to the semiconductor device 100). FIGS. 3B and 3C show a power connector 308p disposed adjacent to (e.g. laterally adjacent to) the second row R2 comprising power conductive pillars 108p that allows for this. As shown in FIGS. 3B and 3C, the power bridging line 216 may be extended to couple with the power connector 308p that is disposed adjacent to an outermost power conductive pillar 108p of the second row R2 of power conductive pillars 108p. In contrast to the power conductive pillars 108p that extend at least partially through the passivation layer 106, the power connector 308p is formed on the surface of the passivation layer 106 facing away from the first die 102, and no portion of the power connector 308p extends through the passivation layer 106. The power connector 308p may comprise similar materials as the power conductive pillars 108p. The signal traces 208 are covered by the second insulating layer 304, and the surface of the second insulating layer 304 facing away from the first die 102 (e.g. the top surface of the second insulating layer 304) may be used to route and/or redistribute the power bridging line 216. For example, a fourth via 312 may extend through the first insulating layer 204 and the second insulating layer 304 and may couple to a power pad 314 that may be disposed on the surface of the second insulating layer 304 facing away from the first die 102 (e.g. the top surface of the second insulating layer 304). The power pad 314 may be coupled to a power trace (not shown) that extends on the surface of the second insulating layer 304, e.g. towards the power source that is external to the semiconductor device 100.
As a result, the redistribution of the ground bridging line 214 and/or the power bridging line 216 is on a different level (e.g. interconnect level) of the semiconductor device 100 than the signal traces 208. In this way, signal traces 208 can be routed—using the first RDL 202—in the space that would have otherwise been occupied by redistribution of the ground bridging line 214 and the power bridging line 216. The advantages that follow from this are similar to the advantages described above in respect of having the ground bridging line 214 and the signal traces 208 on different interconnect levels of the semiconductor device 100.
In some embodiments, the redistribution of the ground bridging line 214 may be accomplished by using the outermost ground conductive pillar 108g of the first row R1 of ground conductive pillars 108g instead of the ground connector 308g. This embodiment is illustrated in FIGS. 4A and 4B. In like matter, in some embodiments, the redistribution of the power bridging line 216 may be accomplished by using the outermost power conductive pillar 108p of the second row R2 of power conductive pillars 108p instead of the power connector 308p. This embodiment is illustrated in FIGS. 4A and 4C.
In yet another embodiment, the redistribution of the ground bridging line 214 may be accomplished by using the outermost ground conductive pillar 108g of the first row R1 of ground conductive pillars 108g as well as the ground connector 308g. Similarly, the redistribution of the power bridging line 216 may be accomplished by using the outermost power conductive pillar 108p of the second row R2 of power conductive pillars 108p as well as the power connector 308p. These embodiments are, in essence, a combination of the embodiments shown in FIGS. 4A to 4C and the embodiments shown in FIGS. 3A to 3C, and are not illustrated for the sake of brevity.
FIGS. 5A to 5F show a process flow illustrating various intermediary steps of manufacturing the semiconductor device 100, in accordance with one or more embodiments. As shown in FIG. 5A, the passivation layer 106 may be formed over the pins 104 using any suitable process, such as, chemical vapor deposition (CVD), physical vapor deposition (PVD), atomic layer deposition (ALD), combinations thereof, or the like. Subsequently, openings 502 that are substantially aligned to central portions of the pins 104 may be formed in the passivation layer 106, e.g. to expose at least the central portions of the pins 104, while peripheral portions of the pins 104 remain substantially covered by the passivation layer 106. The openings 502 may be formed using a masking and etching process (e.g. a lithographic masking followed by a dry or wet etch process), although other suitable processes may be possible as well. Subsequently, the first die 102 may be subjected to testing, e.g., through contact probing of the pins 104 through the openings 502.
Referring to FIG. 5B, the conductive pillars 108 may be formed over the pins 104. The conductive pillars 108 may be formed by any suitable process, such as a deposition and etching, damascene or dual damascene, or the like with one or more of the above-mentioned conductive materials comprised in the conductive pillars 108. Although not illustrated in FIG. 5B, the ground bridging line 214 and the power bridging line 216 may also be formed at this step, e.g. on the surface of the passivation layer 106 facing away from the first die. The processes used for forming the ground bridging line 214 and the power bridging line 216 may be similar to the processes used for forming the conductive pillars 108. Furthermore, in an embodiment where the semiconductor device 100 includes the ground connector 308g and/or the power connector 308p, these features may also be formed at the step shown in FIG. 5B, e.g. on the surface of the passivation layer 106 facing away from the first die. The processes used for forming the ground connector 308g and/or the power connector 308p may be similar to the processes used for forming the conductive pillars 108.
Referring to FIG. 5C, the polymer layer 110 may be formed over the conductive pillars 108, the passivation layer 106, the ground bridging line 214, and the power bridging line 216. Also, the polymer layer 110 covers the ground connector 308g and the power connector 308p, if these features are present. The process used for forming the polymer layer 110 may include CVD, PVD, ALD, combinations thereof, or the like. In the example of FIG. 5C, the polymer layer 110 surrounds the conductive pillars 108 on all surfaces of the conductive pillars 108.
The above-mentioned steps may also be performed on a second die 504 (e.g. shown in FIG. 5D). The second die 504 may be a logic device, e.g. an APU, CPU, SOC, or the like, and may be included in a fan-out multi-die package together with the semiconductor device 100. Consequently, the second die 504 may be electrically connected to the first die 102 by the above-described signal traces 208.
Referring to FIG. 5D, the second die 504 may have a contact pad 506 and a bump 508 formed on or over the contact pad 506. The contact pad 506 and the bump 508 may be used for signal functions of the second die 504. In other words, the contact pad 506 may be a signal contact pad of the second die 504, while the bump 508 may be a signal conductive pillar of the second die 504. The peripheral portions of the contact pad 506 may be covered by the passivation layer 106. The polymer layer 110 may be disposed over the passivation layer 106 and may surround the bump 508 on all surfaces of the bump 508. The first die 102 and its overlying features as well as the second die 504 and its overlying features may be mounted on a carrier substrate 510, e.g. for subsequent processing. The carrier substrate 510 may be a glass carrier, a ceramic carrier, or the like. The first die 102 and the second die 504 may be attached to the carrier substrate 510 by an adhesive layer 512, which may comprise a dry attach film (DAF), a light-to-heat-conversion (LTHC) coating, combinations thereof, or the like.
Referring to FIG. 5E, the first die 102 and the second die 504 are encapsulated in a molding compound 514 and a planarizing process (e.g. a grinding back process and/or a CMP process) may be performed so that the surfaces of the molding compound 514, the polymer layers 110, the bump 508, and the conductive pillars 108 are substantially co-planar.
Referring to FIG. 5F, the first RDL 202 and the second RDL 302 comprising the signal traces 208, the ground traces, and the power traces may be formed over the molding compound 514 and the polymer layers 110 to allow for inter-die connections between the first die 102 and the second die 504. For example, the first insulating layer 204 of the first RDL 202 may be formed over the first side 102a of the first die 102 (e.g. memory device) and over a first side 504a of the second die 504 (e.g. logic device). The first insulating layer 204 may be formed by a chemical vapor deposition, a physical vapor deposition, an atomic layer deposition, or combinations thereof. In an embodiment where the first insulating layer 204 is substantially similar in composition to the polymer layer 110, the method for forming the polymer layer 110 may also be used to form the first insulating layer 204. Thereafter, openings may be formed in the first insulating layer 204 to expose the bump 508, the first signal conductive pillar 104s1, and the second signal conductive pillar 104s2. The openings may be formed by an etching process, a drilling process (e.g. laser drilling process), or combinations thereof. Following this, conductive material may be deposited or plated over a surface of the first insulating layer 104 facing away from the first die 102 and the second die 504. The conductive material (e.g. copper, tungsten, or the like) may also fill the openings formed in the first insulating layer 204. This may be followed by a patterning process (e.g. a masking and etching process) that is performed on the conductive material disposed over the surface of the first insulating layer 204 facing away from the first die 102 and the second die 504. This patterning process may yield the signal traces 208 shown in FIG. 5F as well as the first signal pads 206s1 and the second signal pads 206s2.
During the patterning of the conductive material, a logic signal pad 516s may also be formed on the first insulating layer 204 in addition to the signal traces 208, the first signal pads 206s1, and the second signal pads 206s2 (e.g. at the same interconnect level as the signal traces 208). The logic signal pad 516s may be coupled to the bump 508 by a fifth via 517 extending through the first insulating layer 204. As shown in FIG. 5F, the signal trace 208 may be coupled to the first signal pad 206s1 and the logic signal pad 516s, thereby electrically connecting the first die 102 and the second die 506 of the multi-die package to each other. External connectors 518 (e.g. solder balls, solder bumps, copper pillars, and the like) are also formed atop the first RDL 202 and the second RDL 302. As one skilled in the art will recognize, economies of scale can be obtained by forming multiple packaged devices on a single carrier wafer at a time. In such an embodiment, the processing step illustrated in FIG. 5F can be followed by the step of sawing or otherwise singulating the individual packages, proceeded by or followed by removal from the carrier substrate 510. This step is not show for the sake of brevity.
As discussed above, signal traces 208 can be routed—using the first RDL 202—in the space that would have otherwise been occupied by ground routing and/or power routing if the ground routing and/or power routing were formed on the same interconnect level as the signal traces 208. This allows for a greater number of signal traces 208 in the first RDL 202 and/or wider signal traces 208 and/or a larger spacing between immediately adjacent signal traces 208 in the first RDL 202, without having to decrease the width of the first signal pad 206s1 and/or the width of the second signal pad 206s2. For example, the signal traces 208 may be routed such that each signal trace 208 has a width of about 5 micrometers and is separated from an immediately adjacent signal trace 108 by about 5 micrometers. Having wider signal traces 208 and/or a larger spacing between immediately adjacent signal traces 208 may, in turn, improve performance of the multi-die package by lowering resistance and/or line capacitance.
According to various embodiments presented herein, a semiconductor device is provided. The semiconductor device may include: first conductive pillars and second conductive pillars respectively aligned to a first row of first pins and a second row of second pins of a first die, the first pins and the second pins differing in function; a first insulating layer covering surfaces of the first conductive pillars and the second conductive pillars facing away from the first die; first pads disposed on a surface of the first insulating layer facing away from the first die, the first pads substantially aligned to the first conductive pillars; and first traces coupled to the first pads, the first traces extending over one or more of the second conductive pillars.
According to various embodiments presented herein, a multi-die package is provided. The multi-die package may include: a memory device and a logic device encapsulated in a molding compound; and a first redistribution layer electrically coupling the memory device and the logic device to each other. The first redistribution layer may include: a first insulating layer formed over a first side of the memory device and a first side of the logic device; a memory signal pad and a logic signal pad on the first insulating layer, the memory signal pad and the logic signal pad respectively coupled to a signal pin of the memory device and a signal pin of the logic device; and a signal trace extending from the memory signal pad to the logic signal pad, the signal trace overlapping a power pin or a ground pin of the memory device.
According to various embodiments presented herein, a method of manufacturing a multi-die package is provided. The method may include: encapsulating a memory die and a logic die in a molding compound, the memory die being adjacent to the logic die; depositing a first insulating layer over the memory die, the logic die, and the molding compound; forming a first opening and a second opening in the first insulating layer, the first opening exposing a signal conductive pillar of the memory die, the second opening exposing a signal conductive pillar of the logic die; and electrically coupling the signal conductive pillars of the memory die and the logic die by a signal trace disposed on the first insulating layer and overlapping a ground conductive pillar or a power conductive pillar of the memory die.
The foregoing outlines features of several embodiments so that those skilled in the art may better understand the aspects of the present disclosure. Those skilled in the art should appreciate that they may readily use the present disclosure as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. Those skilled in the art should also realize that such equivalent constructions do not depart from the spirit and scope of the present disclosure, and that they may make various changes, substitutions, and alterations herein without departing from the spirit and scope of the present disclosure.

## Claims

1. A semiconductor device, comprising:
first conductive pillars and second conductive pillars respectively aligned to a first row of first pins and a second row of second pins of a first die, the first pins and the second pins differing in function;
a first insulating layer in contact with surfaces of the first conductive pillars and the second conductive pillars facing away from the first die;
first pads disposed on a surface of the first insulating layer in a first interconnect level, the surface facing away from the first die, the first pads substantially aligned to the first conductive pillars; and
first traces disposed on the surface of the first insulating layer coupled to the first pads, the first traces extending directly over one or more of the second conductive pillars and routed in the first interconnect level.

2. The semiconductor device of claim 1, wherein the first pins comprise signal pins of the first die, and the second pins comprise power pins or ground pins of the first die, and wherein the first traces comprise signal traces.

3. The semiconductor device of claim 1, wherein the first die comprises a wide input-output (I/O) memory device.

4. The semiconductor device of claim 1, further comprising a bridging line disposed between and electrically connecting the second conductive pillars together, wherein the first insulating layer covers the bridging line, and wherein the first traces further extend over a portion of the first insulating layer covering the bridging line.

5. The semiconductor device of claim 1, wherein the first die comprises a matrix of pins, and wherein the first row of first pins and the second row of second pins are immediately adjacent rows of the matrix of pins.

6. The semiconductor device of claim 1, wherein the first conductive pillars and the second conductive pillars are separated by a distance in a range from about 10 micrometers to about 60 micrometers.

7. The semiconductor device of claim 1, further comprising:
third conductive pillars respectively aligned to a third row of third pins of the first die, the first pins and the third pins having similar functions, the first insulating layer covering surfaces of the third conductive pillars facing away from the first die; and
third pads disposed on the surface of the first insulating layer facing away from the first die, the third pads substantially aligned to the third conductive pillars, wherein the first traces are disposed between the first pads and the third pads.

8. The semiconductor device of claim 7, wherein the first die comprises a matrix of pins, and wherein the second row of second pins is an immediately adjacent row of the first row of first pins and the third row of third pins.

9. The semiconductor device of claim 7, wherein the first pads and the third pads are separated by a distance in a range from about 20 micrometers to about 85 micrometers.

10. The semiconductor device of claim 1, further comprising:
a second insulating layer covering the first insulating layer, the first pads, and the first traces;
a second pad disposed on a surface of the second insulating layer facing away from the first die, the second pad electrically coupled to the second conductive pillars; and
a second trace coupled to the second pad, the second trace extending over a portion of the second insulating layer covering the first traces.

11. A multi-die package, comprising:
a memory device and a logic device encapsulated in a molding compound; and
a first redistribution layer electrically coupling the memory device and the logic device to each other, the first redistribution layer comprising:
a first insulating layer formed over a first side of the memory device and a first side of the logic device;
a memory signal pad and a logic signal pad on the first insulating layer in a first interconnect level, the memory signal pad and the logic signal pad respectively coupled to a signal pin of the memory device and a signal pin of the logic device; and
a signal trace coupled to the memory signal pad and the logic signal pad, the signal trace routed in the first interconnect level and overlapping a power pin or a ground pin of the memory device.

12. The multi-die package of claim 11, wherein the signal trace has a width in a range from about 3 micrometers to about 6 micrometers and is spaced apart from an immediately adjacent signal trace by about 1 micrometers to about 10 micrometers.

13. The multi-die package of claim 11, wherein the memory signal pad is coupled to the signal pin of the memory device by a via extending through the first insulating layer and a conductive pillar disposed between the via and the signal pin of the memory device.

14. The multi-die package of claim 11, wherein the first redistribution layer further comprises a second memory signal pad on the first insulating layer, the second memory signal pad coupled to a second signal pin of the memory device.

15. The multi-die package of claim 14, wherein the memory device comprises a matrix of pins, and wherein the signal pin and the second signal pin of the memory device are arranged along different rows of the matrix of pins.

16. The multi-die package of claim 14, wherein the memory device comprises a matrix of pins, and wherein the signal pin and the second signal pin of the memory device are arranged along a same row of the matrix of pins.

17. A semiconductor device, comprising:
first conductive pillars and second conductive pillars respectively aligned to a first row of first pins and a second row of second pins of a first die, the first pins comprising individual signal pins and the second pins comprising either power pins or ground pins of the first die, each of the second pins having a common voltage;
a first insulating layer disposed in contact with sides of the first conductive pillars and second conductive pillars, the first insulating layer having a top surface substantially uniform with a top surface of the first conductive pillars and a top surface of the second conductive pillars;
a second insulating layer disposed on the top surface of the first conductive pillars, the top surface of the second conductive pillars, and the top surface of the first insulating layer;
a first set of first vias through the second insulating layer, each of the first vias aligned to a respective one of the first conductive pillars, and having a conductor disposed therein coupled to the respective one of the first conductive pillars;
first pads disposed on a surface of the second insulating layer, the surface facing away from the first die, the first pads substantially aligned to and coupled to the first vias; and
first signal traces disposed on the surface of the second insulating layer coupled to the first pads, the first signal traces extending directly over one or more of the second conductive pillars,
wherein the first pads are in a first interconnect level and the first signal traces are routed in the first interconnect level.

18. The semiconductor device of claim 17, further comprising a bridge line disposed between and coupling the second conductive pillars together, wherein the second insulating layer covers the bridging line, and wherein the first signal traces further extend over a portion of the second insulating layer covering the bridging line.

19. The semiconductor device of claim 18, further comprising:
a second via through the second insulating layer apart from the first vias, the second via aligned to one of the second conductive pillars, and having a conductor disposed therein coupled to the second conductive pillar, wherein the one of the second conductive pillars is located at a periphery of the first die; and
a second pad disposed on and coupled to the second via.

20. The semiconductor device of claim 19, wherein the first signal traces extend from the first pads away from the second via.