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 TOOLS & INSTRUMENTS

NanoFab Tool: Bruker Dektak 6M contact profilometer
    
  Bruker Dektak 6M contact profilometerBruker Dektak 6M contact profilometer
  
      The Bruker Dektak 6M contact profilometer measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps. It can detect depths ranging from 1 mm down to 5 nm and supports substrates ranging from 150 mm diameter wafers down to small pieces.

Specifications/Capabilities
      
                          Maximum step height: 1 mm.
	Vertical resolution: 0.1 nm.
	Scan length: 50 μm to 30 mm.
	Stylus force: 9.8 mN to 147 mN (1 mgf to 15 mgf).
              Usage Information
        
Supported Sample Sizes
                                Maximum wafer diameter: 150 mm (6 in).
	Small pieces supported: Yes.
	Maximum thickness: 31 mm.
              Typical Applications
      
                          Measurement of etch rates, deposition rates, and film growth rates.
	Measurement of surface roughness.
	Thickness mapping.Back to the NanoFab Equipment List
  Nanotechnology and Nanofabrication / manufacturing
  
            Organizations
      
      NIST HeadquartersLaboratory ProgramsPhysical Measurement LaboratoryPhysical Measurement Laboratory OfficeCenter for Nanoscale Science and Technology
              Details
        
NEMO Name
                                Profilometer 1

Location
                                Building 215 Rm. C02-2 (Post-process lab, basement)
  Campus
                    Gaithersburg
              Hours of Operation
      
                          Cleanroom hours

Tool Reservation Rules
      
                          Minimum Reservation Time: 30 minutes.
	Maximum Reservation Time: 4 hours.
	Adjacent Reservations Permitted: Yes.
	Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
	Restrictions: No bulky samples which could hit and break the stylus. No liquids or soft samples.
Contact
      
        

Primary Engineer
        Gerard Henein
    
      
  gerard.henein@nist.gov
  (301) 975-5645

  

Backup Engineer
        Liya Yu
    
      
  liya.yu@nist.gov
  (301) 975-4590

  

General Contact
        NanoFab Metrology
  nanofab_metrology@nist.gov
  (301) 975-8672
  100 Bureau Drive, Stop 6201 
  Gaithersburg,
  MD 20899-6201

    
    Created May 21, 2014, Updated June 15, 2023
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              Gaithersburg, MD 20899301-975-2000
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