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RoRFS-figure5.png
    
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      Research Updates – Gas Flow for Semiconductor Manufacturing
      
            Figure 5. Plots show model (──) and measured (**○**) pressure spikes in the collection volume immediately after closing the tank inlet valve and flow is stopped. Results are given for two different size collection volumes both having the same nominal length but with inside diameters *D*i = 0.010 m, or 0.3925 in and *D*i = 0.021 m, or 0.825 in and for two different gases N2 and SF6. The flow given above the graphs is the total flow divided by a factor of 2 because the tubes were in parallel.

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