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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-zeiss-gemini-500-field-emission-scanning-electron

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TOOLS & INSTRUMENTS

# NanoFab Tool: Zeiss Gemini 500 Field Emission Scanning Electron Microscope

The Zeiss Gemini 500 Field Emission Scanning Electron Microscope (FE-SEM) is a high resolution FE-SEM which provides nanoscale imaging from 100 mm diameter wafers down to small pieces. It has superb resolution and image quality at high and low accelerating voltages. The Gemini 500 has a high efficiency Inlens secondary detector for high contrast, ultra-high resolution surface imaging and Everhart Thornley secondary electron detector for more 3 dimensional topographic imaging. It also has an Inlens energy selective back scatter (EsB) detector for backscatter electron imaging at low voltages.

## Specifications/Capabilities

                    - Digital system with full function computer control.
                    - Resolution: 0.5 nm at 15 kV; 0.9 nm at 1 kV, 1.0 nm at 500 V.
                    - Accelerating Voltage: 0.02 – 30.0 kV
                    - Magnification: 50 times to 2,000,000 times.
                    - High efficiency Inlens secondary detector for ultra-high resolution surface information.
                    - Inlens energy selective backscattered (EsB) electron detector for material compositional contrast imaging at low voltages.
                    - Motorized stage with travel in 6 axes.
                    - Integrated 100 mm airlock.
                    - Small pieces supported: Yes.

## Typical Applications

                    - Inspection and measurement of nanometer scale structures.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: No.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Kerry Siebein  kerry.siebein@nist.gov      (301) 975-8458   

### Backup Engineer

                    -  Joshua Schumacher  joshua.schumacher@nist.gov      (301) 975-8065   
                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   
                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### General Contact

                    -      NanoFab Microscopy    nanofab_microscopy@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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