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TOOLS & INSTRUMENTS

# NanoFab Tool:  Nikon SMZ1500 Stereo Microscope

Nikon SMZ1500 Stereo Microscope

The Nikon SMZ1500 is a long working distance stereo microscope that supports both reflected light and transmitted light modes for inspecting substrates and samples. The microscope provides continuous zoom magnifications ranging from 5 times to 480 times. An integrated five megapixel camera can capture high magnification, high resolution digital images of substrates ranging from 150 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Magnification range: 5 times to 480 times.
                    - Large working distance: > 50 mm.
                    - An integrated five megapixel camera for capturing images.
                    - Nikon NIS Elements software for image processing.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 10 mm.

## Typical Applications

                    - General structure and device inspection.
                    - Microscopic image capture.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### Backup Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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