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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-harrick-plasma-pdc-32-plasma-bonder

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TOOLS & INSTRUMENTS

# NanoFab Tool: Harrick Plasma PDC-32 Plasma Bonder

The Harrick Plasma PDC-32 plasma bonder is used to remove fine particles on user substrates prior to release agent treatment and to modify the surface bonds of a polydimethylsiloxane (PDMS) mold to promote permanent bonding of the mold to a substrate.The plasma bonder supports substrates ranging from 75 mm wafers down to small pieces.

## Specifications/Capabilities

                    - Maximum RFpower: 18 W.
                    - Adjustable RFpower: Three settings for low, medium, and high power.
                    - Metered gasflow.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 75 mm (3 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Pre-silanization clean.
                    - PDMS surface activation for bonding.
                    - Microfluidic device fabrication.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

24-hour access

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Matthew Robinson  matthew.robinson@nist.gov      (301) 975-2421   

### Backup Engineer

                    -  Joshua Schumacher  joshua.schumacher@nist.gov      (301) 975-8065   

### General Contact

                    -      NanoFab Litho    nanofab_litho@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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