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https://www.nist.gov/laboratories/tools-instruments/topic/249146

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Nanotechnology

## Nanofabrication / manufacturing

# Tools and Instruments

### Aberration-Corrected Transmission Electron Microscope (TEM)

### NanoFab Tool: 4Wave IBD/BTD Cluster Sputter Deposition System

### NanoFab Tool:  Allied High Tech Dual Prep PH-3 Grinding and Polishing System

### NanoFab Tool:  Asylum Cypher High Resolution Atomic Force Microscope

### NanoFab Tool:  Bachur & Associates LS-200FSX Photoresist Stabilization System

### NanoFab Tool: Bruker Dektak 6M contact profilometer

### NanoFab Tool:  Bruker Dimension FastScan Atomic Force Microscope

### NanoFab Tool: Denton Vacuum Discovery 550 Sputtering System B104 Right

### NanoFab Tool: Denton Vacuum Discovery 550 Sputtering System B104 Left

### NanoFab Tool: Denton Vacuum Infinity 22 Electron Beam and Thermal Evaporator

### NanoFab Tool:  Denton Vacuum Infinity 22 Electron Beam Evaporator

### NanoFab Tool: Ecopia Hall Effect Measurement System

### NanoFab Tool:  FEI Helios NanoLab 660 Dual Beam Scanning Electron Microscope (SEM) and Focused Ion Beam (FIB) 2

### NanoFab Tool:  FEI Titan 80-300 Analytical Transmission Electron Microscope

### NanoFab Tool: Filmetrics F50 UV Mapping Reflectometer

### NanoFab Tool:  First Ten Angstroms FTA125 Contact Angle Goniometer

### NanoFab Tool:  Fischione Model 1040 NanoMill Ion Mill

### NanoFab Tool: Four Dimensions 280DI Sheet Resistance Mapping System

### NanoFab Tool:  Heidelberg Instruments DWL 2000 Laser Pattern Generator

### NanoFab Tool: IPEC 472, Chemical Mechanical Polisher (CMP)

### NanoFab Tool:  J. A. Woollam M-2000 DI Spectroscopic Ellipsometer

### NanoFab Tool: Jeio Tech OF-12G Forced Convection Oven

### NanoFab Tool:  JEOL JBX 6300-FS Direct Write Electron Beam Lithography System (Cleanroom)

### NanoFab Tool:  Keithley 4200 SCS Parametric Test Station

### NanoFab Tool:  Kulicke and Soffa Model 4526 Wedge Wire Bonder

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