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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-semitool-psc-101-spin-rinse-dryer

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Semitool PSC-101 Spin Rinse Dryer

The Semitool PSC-101 spin rinse dryer uses deionized water to rinse and heated nitrogen to dry whole wafer substrates automatically after wet chemical processes. There are two double stack dryers and one single stack dryer in the cleanroom. The systems use a programmable recipe to automatically process wafers.

## Specifications/Capabilities

                    - A resistivity probe is available to monitor the chemical concentration in the bath (called "rinse to resistivity") in order to ensure the complete removal of chemicals.
                    - Nitrogen heater for spot-free drying.
                    - Programmable recipes include rinse, quality rinse, purge, and two dry cycles.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Wafer diameters: 75 mm (3 in), 100 mm (4 in), 150 mm (6 in), and 200 mm (8 in).
                      - Mask sizes: 125 mm (5 in), and 150 mm (6 in).
                      - Small pieces supported: No.

## Typical Applications

                    - Wafer and mask rinsing and drying.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### Backup Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### General Contact

                    -      NanoFab Wetchem    nanofab_wetchem@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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