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  Appears In
      
      Microcalorimeter Spectrometers for X-ray and Gamma-ray Spectroscopy
      
            Top: A side view of TOMCAT, showing the horizontal electron column (SEM) and the NIST TES detector, integrated into an UHV chamber containing the sample and target.  The system currently utilizes a 1,000 pixel TES microcalorimeter detector package, and will be upgraded to a 3,000 pixel array in 2023. Bottom Left: A single slice from a tomographic reconstruction of an integrated circuit (IC) sample measured in TOMCAT. This slice represents one layer of metal wiring in the IC. Bottom Right: The design file IC wiring for the layer shown on the left, representing the ground truth for the reconstruction. The minimum feature size in the IC is 160 nm. A comparison between the lower left and lower right images indicates that TOMCAT can resolve all features present in nanoscale IC samples.

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