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# New NIST Reference Materials for MEMS devices

New NIST Reference Materials for MEMS devices are micromachined and further processed to contain miniature cantilevers, beams, stair-like step heights, microscale rulers and test structures for measuring surface-layer thickness. On the left is RM 8096, which was manufactured with an integrated circuit process; on the left is RM 8097, made with a MEMS process.

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April 30, 2013

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