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TOOLS & INSTRUMENTS

# NanoFab Tool: ADT 7132 Dicing Saw

ADT 7132 Dicing Saw

The ADT 7132 dicing saw is used to cut multi-device substrates into individual chips. The system can accommodate substrates up to 4 mm thick and supports sizes ranging from small pieces to 300 mm diameter wafers.

## Specifications/Capabilities

                    - Automatic mode for full wafer dicing.
                    - Measurement resolution: 0.1 μm.
                    - Positioning accuracy: 0.5 μm.
                    - Typical blade thickness (width of cut): 35 μm (45 μm) to 200 μm (240 μm)

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 300 mm (12 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 4 mm.

## Typical Applications

                    - Device separation after wafer processing.
                    - Dicing of silicon, glass, Pyrex, quartz, sapphire, lithium niobate and silicon carbide.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

24/7 access

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### Backup Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   
                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   

### General Contact

                    -      NanoFab Postprocess    nanofab_postprocess@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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