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 TOOLS & INSTRUMENTS

NanoFab Tool:  Reynolds Tech Silicon Nitride Etch Wet Bench
    
  Photograph of the Reynolds Tech silicon nitride etch wet bench.
  
      The Reynolds Tech silicon nitride etch wet bench uses dilute phosphoric acid to preferentially etch silicon nitride on silicon. The process is used to define silicon nitride islands that mask the oxidation of the silicon during high temperature furnace processing. The bench can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

Specifications/Capabilities
      
                          Two 90 % phosphoric acid dip tanks with lids.
	Dump rinse with a lid.
              Usage Information
        
Supported Sample Sizes
                                Maximum wafer diameter: 200 mm (8 in).
	Small pieces supported: Yes.
              Typical Applications
      
                          Furnace oxidation masking.
	Complementary metal–oxide–semiconductor (CMOS) local oxidation of silicon (LOCOS) processes.Back to the NanoFab Equipment List
  Nanotechnology and Nanofabrication / manufacturing
  
            Organizations
      
      NIST HeadquartersLaboratory ProgramsPhysical Measurement LaboratoryPhysical Measurement Laboratory OfficeCenter for Nanoscale Science and Technology
              Details
        
NEMO Name
                                Phos Etch

Location
                                Building 215 Rm. B101 (Cleanroom)
  Campus
                    Gaithersburg
              Hours of Operation
      
                          Cleanroom Hours

Tool Reservation Rules
      
                          Minimum Reservation Time: 30 minutes.
	Maximum Reservation Time: 4 hours.
	Adjacent Reservations Permitted: Yes.
	Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
Contact
      
        

Primary Engineer
        Liya Yu
    
      
  liya.yu@nist.gov
  (301) 975-4590

  

Backup Engineer
        Marc J. Cangemi
    
      
  marc.cangemi@nist.gov
  (301) 975-5993

  

General Contact
        NanoFab Wetchem
  nanofab_wetchem@nist.gov
  (301) 975-8672
  100 Bureau Drive, Stop 6201 
  Gaithersburg,
  MD 20899-6201

    
    Created June 19, 2014, Updated February 24, 2023
 HEADQUARTERS
            100 Bureau Drive
              Gaithersburg, MD 20899301-975-2000
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