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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-xactix-xetch-xenon-difluoride-silicon-etcher

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TOOLS & INSTRUMENTS

# NanoFab Tool: Xactix Xetch Xenon Difluoride Silicon Etcher

The Xactix Xetch is a single wafer tool which isotropically etches silicon using vapor phase xenon difluoride. The xenon difluoride etch process provides high selectivity to silicon oxide, silicon nitride, and photoresist masks. The tool can accommodate substrates ranging from 150 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Etch selectivity:	                       - Silicon to silicon dioxide: = 100 to 1.
                      - Silicon to silicon nitride: = 100 to 1.
                      - Silicon to photoresist: = 60 to 1.
                    - Unique gases: xenon difluoride.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Microelectromechanical systems (MEMS).
                    - Nanoelectromechanical systems (NEMS).
                    - Accelerometers.
                    - Pressure sensors.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### Backup Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### General Contact

                    -      NanoFab Dryetch    nogtech@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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