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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ecopia-hall-effect-measurement-system

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TOOLS & INSTRUMENTS

# NanoFab Tool: Ecopia Hall Effect Measurement System

Image of Ecopia HMS-5500 Hall Effect measurement system

The HMS-5500 Hall Effect measurement system is used to measure electrical resistivity, carrier density, and mobility of semiconducting materials.  The system is easy to load and is fully automated.

## Specifications/Capabilities

                    - Resistivity measurements: 10 -4  to 10 7  Ohms-cm
                    - Mobility measurements: 1 ~ 10 7  cm 2 /Volt-sec
                    - Concentration: 10 7  ~ 10 21  cm -3 
                    - 0.55T nominal magnetic flux density

## Usage Information

### Supported Sample Sizes

                      - 5 x 5 mm up to 15 x 15 mm

### Recommended Substrates/Restricted Materials

                      - Semiconducting/None  

## Typical Applications

                    - Measure carrier concentration
                    - Measure mobilities and resistivity

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom Hours

## Facility

## Tool Reservation Rules

                    - Minimum Reservation Time: 0.2 hours.
                    - Maximum Reservation Time: 2 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### Backup Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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