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https://www.nist.gov/laboratories/tools-instruments/topic/249146

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Nanotechnology

## Nanofabrication / manufacturing

# Tools and Instruments

### NanoFab Tool:  Microprocess Technology Avenger Spray Solvent Lift-off Tool

### NanoFab Tool:  Nanonex NX-2000 Nanoimprint Lithography (NIL) System

### NanoFab Tool:  Nikon L200 Compound Optical Microscope

### NanoFab Tool: Oxford Plasmalab 100 Inductively Coupled Plasma (ICP) Silicon Etcher

### NanoFab Tool: Oxford Plasmalab 100 Inductively Coupled Plasma (ICP) Metal Etcher

### NanoFab Tool: Oxford PlasmaPro 100 Inductively Coupled Plasma (ICP) III-V Etcher

### NanoFab Tool: Oxford PlasmaPro 100 Inductively Coupled Plasma (ICP) Dielectric Etcher

### NanoFab Tool:  Plasma-Therm Versaline High Density Plasma Enhanced Chemical Vapor Deposition (HD-PECVD)

### NanoFab Tool: Reactive Ion Etcher Unaxis 790 Middle

### NanoFab Tool:  Reynolds Tech Silicon Nitride Etch Wet Bench

### NanoFab Tool: Sandvik LPCVD Amorphous and Polycrystalline Silicon

### NanoFab Tool:  Specialty Coating Systems PDS 2010 Parylene Deposition System

### NanoFab Tool:  SPTS microEtch Hydrofluoric Acid Vapor Etcher

### NanoFab Tool:  SPTS Omega c2L Rapier Deep Silicon Etcher

### NanoFab Tool:  Suss MicroTec ACS200 Automated Resist Coater

### NanoFab Tool:  Suss MicroTec Delta12AQ Automated Resist Developer

### NanoFab Tool: Suss MicroTec MA6/BA6 Contact Aligner

### NanoFab Tool: Ted Pella easiGlow Glow Discharge Cleaning System

### NanoFab Tool:  Toho Technology FLX-2320 Stress Measurement Tool

### NanoFab Tool:  Tousimis Automegasamdri-916B Series C

### NanoFab Tool:  Tresky T-3000-FC3-HF Flip Chip Bonder

### NanoFab Tool:  Unaxis Shuttleline Inductively Coupled Plasma (ICP) Etcher

### NanoFab Tool:  Unaxis Shuttleline DSEII Deep Silicon Etcher

### NanoFab Tool: Xactix Xetch Xenon Difluoride Silicon Etcher

### NanoFab Tool: Zeiss Gemini 500 Field Emission Scanning Electron Microscope

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