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 TOOLS & INSTRUMENTS

NanoFab Tool:  CEE Apogee Spinner
    
  NanoFab Tool:  CEE Apogee Spinner
  
      The CEE Apogee is a resist spinner system. The tool is used to uniformly apply photoresist on substrates ranging from 200 mm diameter wafers down to small pieces. All critical spin parameters are automatically controlled by user programmable recipes.

Specifications/Capabilities
      
                          Manual coating of resist
	Maximum speed: 6000 RPM
	Unlimited number of user-defined recipe program steps
	Spin speed acceleration: 0 to 23,000 rpm/s
	Substrate size: piece to 200 mm
                  Typical Applications
      
                          Photoresist coating
	Other material spin coated filmsBack to the NanoFab Equipment List
  Nanofabrication / manufacturing
  
            Organizations
      
      NIST HeadquartersLaboratory ProgramsPhysical Measurement LaboratoryPhysical Measurement Laboratory OfficeCenter for Nanoscale Science and Technology
              Details
        
NEMO Name
                                Spinner 2

Location
                                Building 215 Room A103
  Campus
                    Gaithersburg
              Hours of Operation
      
                          Cleanroom Hours

Facility
      
                          CNST NanoFab

Tool Reservation Rules
      
                          Minimum Reservation Time: 30 minutes.
	Maximum Reservation Time: 4 hours.
	Adjacent Reservations Permitted: No.
	Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
Contact
      
        

Primary Engineer
        Marc J. Cangemi
    
      
  marc.cangemi@nist.gov
  (301) 975-5993

  

Backup Engineer
        Liya Yu
    
      
  liya.yu@nist.gov
  (301) 975-4590

  

First Backup Engineer
        Richard Kasica
    
      
  richard.kasica@nist.gov
  (301) 975-2693

  

Second Backup Engineer
        Robert Ilic
    
      
  robert.ilic@nist.gov
  (301) 975-3712

  

General Contact
        NanoFab Litho
  nanofab_litho@nist.gov
  (301) 975-8672
  100 Bureau Drive, Stop 6201 
  Gaithersburg,
  MD 20899-6201

    
    Created February 27, 2018, Updated February 24, 2023
 HEADQUARTERS
            100 Bureau Drive
              Gaithersburg, MD 20899301-975-2000
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