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TOOLS & INSTRUMENTS

# Local Electrode Atom Probe Tomography (LEAP)

                    - Field evaporates (with a voltage and laser pulse) a sharp tip-shaped specimen. Collects the ionization products in a position-sensitive, time-of-flight mass spectrometer 
                    - Can determine the atomic species with sensitivity approaching parts-per-million and atomic positions from within the original analysis volume with sub-nm accuracy
                    - Manufacturer/Model: Cameca LEAP 4000x Si

**Research Highlights:**
                    - Identification of inter-lathe material in laser welds
Credit:

                    - Composition of InGaN/GaN nanostruct ures
Credit:

## Customers/Contributors/Collaborators

University of Michigan (Ann Arbor), Colorado School of Mines, University of New Mexico, Lawrence Berkeley National Laboratory, NIST: Quantum Processing Group (687.07), Quantitative Nanostructure Characterization Group (686.09), Nanoscale Reliability Group (647.05)

Amount of substanceNanomaterialsNanometrologyNanophysics

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Applied Physics Division 
                                  - Quantitative Nanostructure Characterization Group

## Details

## Contact

### Tool Operation Team Members

                    -  Norman A. Sanford  norman.sanford@nist.gov      (303) 497-5239   
                    -  Ann Chiaramonti Debay  chiaramonti@nist.gov      (303) 497-5701   

## Related Tools & Instruments

Dual Beam Focused Ion Beam / Scanning Electron Microscope (FIB/SEM)

## Related Projects

Extreme Atom Probe Tomography

## Related Publications

Laser-assisted atom probe tomography of c-plane and m-plane InGaN test structures

Learning Atom Probe Tomography time-of-flight peaks for mass-to-charge ratio spectrometry

Comparative Apex Electrostatics of Atom Probe Tomography Specimens

Laser-assisted atom probe tomography of Ti/TiN films deposited on Si

Chemical Segregation and Microstructural Evolution of Fiber Laser-Welded Low Carbon Sheet Steel

Laser-assisted atom probe tomography of MBE grown GaN nanowire heterostructures

Atom probe tomography evaporation behavior of C-axis GaN nanowires: Crystallographic, stoichiometric, and detection efficiency aspects

### HEADQUARTERS

301-975-2000

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