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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-jeio-tech-12g-forced-convection-oven

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TOOLS & INSTRUMENTS

# NanoFab Tool: Jeio Tech OF-12G Forced Convection Oven

The Jeio Tech OF-12G forced convection oven is used in the soft lithography processing to perform a dehydration bake prior to silanization and cure samples coated with elastomeric polymers. It has two internal shelves to accommodate multiple samples for curing substrates ranging from 200 mm wafers down to small pieces.

## Specifications/Capabilities

                    - Type: Forced convection oven.
                    - Min temperature: 30 °C.
                    - Max temperature: 250 °C.
                    - Volume: 102 L.
                    - Temperature fluctuation at 100 °C: ±0.6 °C.
                    - Temperature variation at 100 °C: ±1.3 °C.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Dehydration.
                    - Polymer curing.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

24-hour access

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Matthew Robinson  matthew.robinson@nist.gov      (301) 975-2421   

### Backup Engineer

                    -  Joshua Schumacher  joshua.schumacher@nist.gov      (301) 975-8065   

### General Contact

                    -      NanoFab Litho    nanofab_litho@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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