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 TOOLS & INSTRUMENTS

NanoFab Tool: Sensofar Optical Profilometer
    
  Sensofar optical profilometerPhoto of the Sensofar optical profilometer
                    Credit:
          
  NIST
  
      The Sensofar optical profilometer is used to measure height variations including step heights and roughness across a surface using light.  It uses a nondestructive and non-contact surface metrology technique which can measure relatively large areas in a short amount of time.

Specifications/Capabilities
      
                          Vertical measurement resolutions down to 1 nm
	Lateral resolution down to 50 nm
	Microscope vertical axis travel of 40 mm
	1360 x 1024 pixel measurement array
	200 mm x 200 mm stage travel
	Ability to stitch scans across large areas
	Simple, easy to use joystick operation
                  Typical Applications
      
                          Profiling semiconductor device structures
	Measuring large area arrays
	Imaging MEMs structures
	General topographic materials imagingBack to the NanoFab Equipment List
  Nanofabrication / manufacturing
  
            Organizations
      
      NIST HeadquartersLaboratory ProgramsPhysical Measurement LaboratoryPhysical Measurement Laboratory OfficeCenter for Nanoscale Science and Technology
              Details
        
NEMO Name
                                Sensofar Optical Profilometer

Location
                                Building 215 Rm. B103 (Cleanroom)
  Campus
                    Gaithersburg
              Hours of Operation
      
                          Cleanroom hours

Facility
      
                          CNST NanoFab

Tool Reservation Rules
      
                          Minimum Reservation Time: 30 minutes.
	Maximum Reservation Time: 4 hours.
	Adjacent Reservations Permitted: No.
	Cancelation Policy: Reservations must be canceled at least 30 minutes before the scheduled start time.
Contact
      
        

Primary Engineer
        Richard Kasica
    
      
  richard.kasica@nist.gov
  (301) 975-2693

  

Backup Engineer
        Liya Yu
    
      
  liya.yu@nist.gov
  (301) 975-4590

  

Backup Engineer
        Kerry Siebein
    
      
  kerry.siebein@nist.gov
  (301) 975-8458

  

General Contact
        NanoFab Metrology
  nanofab_metrology@nist.gov
  (301) 975-8672
  100 Bureau Drive, Stop 6201 
  Gaithersburg,
  MD 20899-6201

    
    Created April 10, 2019, Updated February 24, 2023
 HEADQUARTERS
            100 Bureau Drive
              Gaithersburg, MD 20899301-975-2000
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