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TOOLS & INSTRUMENTS

# NanoFab Tool:  Filmetrics F40-UV Reflectometer

Filmetrics F40-UV Reflectometer

The Filmetrics F40-UV reflectometer provides users with rapid thin film thickness and optical constants measurements on most common device film stacks. The F40-UV combines a three objective microscope with an ultra-violet and visible light reflectance measurement system, allowing point specific film thickness and optical constants determination on substrates ranging from 200 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Film thicknesses from several micrometers down to 4 nm.
                    - Index of refraction and absorption determination (n and k).
                    - Standard films:	                       - Oxide on silicon.
                      - Nitride on silicon.
                      - Polysilicon on oxide on silicon.
                      - Photoresist on silicon.
                    - Integrated video camera allows observation of the sample position
                    - Three microscope objectives: 15× for UV illumination; 5× and 50× for visible illumination
                    - Measurement spot sizes: 10 μm, 33 μm, 100 μm.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 10 mm.

## Typical Applications

                    - Thickness verification of deposited or etched films.
                    - Optical constants determination of deposited films.
                    - Process characterization of patterned substrates.

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### Backup Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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