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https://www.nist.gov/laboratories/tools-instruments/topic/249261

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Physics

## Electron physics

# Tools and Instruments

### Beamline 10: Quantitative Hyperspectral Infrared Microscopy

### Beamline 1: Degradation of EUV filters and mirrors

### Beamline 5: New electron beam imaging system

### Beamline 7:  EUV reflectometry

### Beamline 8: Surface chemistry & durability of EUV optics

### Precision Imaging Facility

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