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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-denton-vacuum-infinity-22-electron-beam-evaporator

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Denton Vacuum Infinity 22 Electron Beam Evaporator

The Denton Vacuum Infinity 22 electron beam evaporator vapor deposits thin films and is capable of loading up to six source materials for deposition. The evaporator is equipped with an ion gun using oxygen gas to densify dielectric films during deposition. A rotating planetary substrate holder ensures deposition uniformity on substrates ranging from 150 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Cryogenically pumped chamber has a base vacuum of 1.0 x 10 -5  Pa (8 x 10 -8  Torr).
                    - Rotating planetary substrate holder provides uniform film deposition.
                    - Rotating planetary substrate holder capacity: 4 whole wafers or piece carriers.
                    - Six source electron gun evaporation.
                    - Fully automatic or manual operation.
                    - Multilayer deposition.
                    - Ion assisted deposition of dielectrics with oxygen.
                    - List of available electron gun evaporation sources: Ag, Al, Al-1%Si, Al2O3, Au, AuPd (60/40), Co, CoFe, Cr, Cu, Fe, Ga2O3, Ge, Graphite, HfO2, MgF2, Mo, Ni, NiCr, Pd, Pt, Py, Si, SiO2, Ta, Ti, TiO2, V, W, Y, ZnO

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Wafer diameters: 50 mm (2 in), 75 mm (3 in), 100 mm (4 in), and 150 mm (6 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Metallization for electrical contacts.
                    - Dielectrics.
                    - Dry etch masks.
                    - Magnetic materials.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 1.5 hours.
                    - Maximum Reservation Time: 6 hours.
                    - Adjacent Reservations Permitted: No.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
                    - Restrictions: Some materials are prohibited; contact our engineers for more information.

## Contact

### Primary Engineer

                    -  Jessie Zhang  chen.zhang@nist.gov      (301) 975-4565   

### Backup Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### General Contact

                    -      NanoFab Deposition    nanofab_deposition@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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