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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-reynolds-tech-silicon-etch-wet-bench

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Reynolds Tech Silicon Etch Wet Bench

The Reynolds Tech silicon etch wet bench uses dilute potassium hydroxide (KOH) to preferentially etch silicon along the material's crystal planes. The process is used to form windows in silicon for fabricating membranes and to shape silicon parts for microelectromechanical systems. The bench can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - 45 % KOH dip tank with a lid.
                    - Heated DI water dip tank with a lid.
                    - HCl dip tank with a lid.
                    - Dump rinse with a lid.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Nitride membrane formation.
                    - Microelectromechanical systems.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom Hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### Backup Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### General Contact

                    -      NanoFab Wetchem    nanofab_wetchem@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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