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https://www.nist.gov/laboratories/tools-instruments/topic/249126

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## Nanotechnology

# Tools and Instruments

### NanoFab Tool: ADT 7132 Dicing Saw

### NanoFab Tool: AllWin21 Downstream Asher

### NanoFab Tool:  ASML PAS5500/275D Stepper

### NanoFab Tool:  Atomic Layer Deposition

### NanoFab Tool:  Bruker Dektak XT Profilometer

### NanoFab Tool: Envirco Laminar Hood

### NanoFab Tool: Gemstar Atomic Layer Deposition

### NanoFab Tool: Harrick Plasma PDC-32 Plasma Bonder

### NanoFab Tool:  Lattice Gear LatticeAx Cleaving Tool

### NanoFab Tool: Microfluidic Test Station

### NanoFab Tool: Microwave Asher

### NanoFab Tool:  Nikon SMZ1500 Stereo Microscope

### NanoFab Tool:  Olympus SZH10 Stereo Microscope

### NanoFab Tool: PDMS Casting Station

### NanoFab Tool:  RCA Wet Bench B102

### NanoFab Tool: Reactive Ion Etcher 790 Nitride Left

### NanoFab Tool: Reactive Ion Etcher Unaxis 790 Right

### NanoFab Tool:  Reynolds RCA Wet Bench

### NanoFab Tool:  Reynolds Tech Silicon Etch Wet Bench

### NanoFab Tool:  Rigaku SmartLab X-Ray Diffraction

### NanoFab Tool:  Semitool PSC-101 Spin Rinse Dryer

### NanoFab Tool: Thermal Thin-Al Evaporator

### NanoFab Tool: Tousimis Autosamdri-815 Series B

### NanoFab Tool: Suss MicroTec SB6e Wafer Bonder

### Raman facility

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