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TOOLS & INSTRUMENTS

# Synchrotron Ultraviolet Radiation Facility SURF III

The Synchrotron Ultraviolet Radiation Facility SURF III is operated by the Ultraviolet Radiation Group as a stable light source for radiometry and research. SURF covers the wavelength range from the far infrared to the soft x-ray.
                    - Provides our National standards for UV and EUV radiometry	                       - Monitoring space weather and solar variability
                      - Advancing industrial uses –  e.g.  EUV microlithography, UV curing
                    - Provides continuum radiation from the soft x-ray to the infrared spectral regions, with ideal output for EUV studies related to solar physics and the development of EUV lithography
                    - Calculable irradiance traceable to the SI units to less than 1 % absolute uncertainty from 4 nm to 400 nm
                    - Beamlines equipped for detector, spectrometer, and lamp calibrations; reflectometry and transmission measurements; degradation and lifetime studies
                    - Carefully characterized and maintained source, operated in a clean hydrocarbon-free vacuum

## Specifications/Capabilities

What is Synchrotron Radiation?

SURF Accelerator Parameters

SURF Status

SURF Beam Image

Calculate SURF Output Spectrum

Calculate SURF Vertical Angular Spread

Optical / photometry / laser metrologyOptical physics and communicationsRadiationSpectroscopy

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Sensor Science Division
                                  - Optical Radiation Group

## Details

## Contact

### Staff

                    -  Charles S Tarrio  charles.tarrio@nist.gov      (301) 975-3737   
                    -  Edward Hagley  edward.hagley@nist.gov      (301) 975-6381   
                    -  Uwe Arp  uwe.arp@nist.gov      (301) 975-3233   
                    -  Robert F. Berg  robert.berg@nist.gov      (301) 975-2466   
                    -  Alex P. Farrell  alex.farrell@nist.gov      (301) 975-8372   
                    -  Robert E Vest  robert.vest@nist.gov      (301) 975-3992   
                    -  Chandra Shahi  chandra.shahi@nist.gov      (301) 975-4217   

## Related Tools & Instruments

Beamline 1: Degradation of EUV filters and mirrors

Beamline 2: Absolute Source-Based Radiometry

Beamline 3: Extended Range Monochromator for Ultraviolet and Extreme-Ultraviolet Optical Properties and Calibrations

Beamline 4: Ultraviolet Optical Properties and Calibrations

Beamline 5: New electron beam imaging system

Beamline 7:  EUV reflectometry

Beamline 8: Surface chemistry & durability of EUV optics

Beamline 10: Quantitative Hyperspectral Infrared Microscopy

## Related Projects

Extreme Ultraviolet Detector Calibration Service

Metrology for extreme ultraviolet lithography

Calibration of Space Weather Observational Instruments at NIST

SDO/EVE/ESP Calibration

## Related Publications

The Conversion of SURF II to SURF III

Synchrotron ultraviolet radiation facility SURF III

SURF III - An Improved Storage Ring for Radiometry

Spontaneous Coherent Microwave Emission and the Sawtooth Instability in a Compact Storage Ring

Studies of Intensity Noise at Synchrotron Ultraviolet Radiation Facility III

Compact X-ray and Extreme-Ultraviolet Light Sources

SURF III: A flexible Synchrotron Radiation Source for Radiometry and Research

Scientific Applications and Advantages of a Low Energy Synchrotron Radiation Source

Forty Years of Metrology with Synchrtron Radiation at SURF

Pioneering use of Synchrotron Radiation Research as a spectroscopic and metrological tool at NBS

### HEADQUARTERS

301-975-2000

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