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TOOLS & INSTRUMENTS

# NanoFab Tool: Bruker Dektak 6M contact profilometer

Bruker Dektak 6M contact profilometer

The Bruker Dektak 6M contact profilometer measures the thickness of patterned thin films by sensing the deflections of a fine stylus riding over feature steps. It can detect depths ranging from 1 mm down to 5 nm and supports substrates ranging from 150 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Maximum step height: 1 mm.
                    - Vertical resolution: 0.1 nm.
                    - Scan length: 50 μm to 30 mm.
                    - Stylus force: 9.8 mN to 147 mN (1 mgf to 15 mgf).

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 31 mm.

## Typical Applications

                    - Measurement of etch rates, deposition rates, and film growth rates.
                    - Measurement of surface roughness.
                    - Thickness mapping.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
                    - Restrictions: No bulky samples which could hit and break the stylus. No liquids or soft samples.

## Contact

### Primary Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### Backup Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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