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https://www.nist.gov/laboratories/tools-instruments/topic/249146

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Nanotechnology

## Nanofabrication / manufacturing

# Tools and Instruments

### NanoFab Tool:  Zeiss Ultra 60 Field Emission Scanning Electron Microscope

### NanoFab Tool:  4Wave IBE-20B Ion Milling System

### NanoFab Tool: ABM Mask Contact Aligner

### NanoFab Tool: ADT 7132 Dicing Saw

### NanoFab Tool: AllWin21 Downstream Asher

### NanoFab Tool: AnnealSys RTA

### NanoFab Tool:  ASML PAS5500/275D Stepper

### NanoFab Tool:  Atomic Layer Deposition

### NanoFab Tool:  Bruker Dektak XT Profilometer

### NanoFab Tool:  CEE Apogee Spinner

### NanoFab Tool: Envirco Laminar Hood

### NanoFab Tool:  Filmetrics F40-UV Reflectometer

### NanoFab Tool: Gemstar Atomic Layer Deposition

### NanoFab Tool: GnP 412S, Post-CMP Wafer Cleaner

### NanoFab Tool: Harrick Plasma PDC-32 Plasma Bonder

### NanoFab Tool:  Heidelberg MLA150 Maskless Aligner

### NanoFab Tool:  Lattice Gear LatticeAx Cleaving Tool

### NanoFab Tool:  Leica EM GP Automatic Plunge Freezer

### NanoFab Tool:  Mercury Probe

### NanoFab Tool: Microwave Asher

### NanoFab Tool:  Nikon SMZ1500 Stereo Microscope

### NanoFab Tool:  Olympus SZH10 Stereo Microscope

### NanoFab Tool: PDMS Casting Station

### NanoFab Tool:  RCA Wet Bench B102

### NanoFab Tool: Reactive Ion Etcher Unaxis 790 Right

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