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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-microprocess-technology-avenger-spray-solvent-lift-tool

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Microprocess Technology Avenger Spray Solvent Lift-off Tool

The Microprocess Technology Avenger spray solvent lift-off tool uses a heated spray solvent to remove residual material and photoresist after deposition of a sacrificial layer. The tool provides "dry in, dry out" processes under recipe control to maximize lift-off efficiency while minimizing user exposure to chemicals.

## Specifications/Capabilities

                    - Dry wafer in, dry wafer out process.
                    - Automatic recipe control.
                    - Quick change rotor system allows users to change wafer size.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Wafer diameters: 75 mm (3 in), 100 mm (4 in), and 150 mm (6 in).
                      - Small pieces supported: only 25 mm squares.

## Typical Applications

                    - Metal lift-off.
                    - Resist strip.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### Backup Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### General Contact

                    -      NanoFab Wetchem    nanofab_wetchem@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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