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TOOLS & INSTRUMENTS

# Focused beam spectroscopic ellipsometer

The Sensor Science Division has a focused beam spectroscopic Mueller matrix ellipsometer.  Its capabilities include
                    - Wavelengths from 245 nm to 1000 nm
                    - Spot size approximately 25 μm x 60 μm
                    - Fixed incident angle of approximately 65°
                    - Sample sizes up to 300 mm diameter, with scanning capability within a central 150 mm x 150 mm square
                    - Measures 11 elements of the Mueller matrix
                    - Full 360° rotation of the sample

This instrument is complemented with software for fitting data to thin film optical properties and thicknesses, as well as structure parameters describing one-dimensionally and two-dimensionally periodic gratings.

This facility is a part of the Sensor Science Division'sOptical Properties of Materials focus program.

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Sensor Science Division
                                  - Surface and Interface Metrology Group

## Details

## Contact

                    -  Thomas A. Germer  thomas.germer@nist.gov      (301) 975-2876   

## Related Projects

Optical grating scatterometry

### HEADQUARTERS

301-975-2000

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