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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-nikon-l200-compound-optical-microscope

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Nikon L200 Compound Optical Microscope

The Nikon L200 is a compound optical microscope that supports both reflected light and transmitted light modes for inspecting substrates and samples. The microscope provides a wide range of imaging and inspection techniques utilizing brightfield, darkfield, and Nomarski differential interference contrast (DIC) methods at magnifications ranging from 100 times to 1000 times. An integrated five megapixel camera can capture high magnification, high resolution digital images of substrates ranging from 150 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Reflected and transmitted light mode.
                    - Brightfield and darkfield mode.
                    - Nomarski DIC in brightfield mode only.
                    - Magnification range: 100 times to 1000 times.
                    - An integrated five megapixel camera for capturing images.
                    - Nikon NIS Elements software for image processing.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 10 mm.

## Typical Applications

                    - General structure and device inspection.
                    - Transmitted light photomask inspection.
                    - Microscopic image capture.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### Backup Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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