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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-tousimis-automegasamdri-916b-series-c

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Tousimis Automegasamdri-916B Series C

The Tousimis Supercritical Automegasamdri-916B Series C critical point dryer uses liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Chamber illumination with viewing window to monitor processes.
                    - Automatic processing for repeatable results.
                    - High pressure LCO 2  used as drying fluid.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Microelectromechanical systems (MEMS).
                    - Drying suspended and floating structures.
                    - Nondestructive drying of membranes.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom Hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
                    - Restrictions: No acid in chamber.

## Contact

### Primary Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### Backup Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### General Contact

                    -      NanoFab Wetchem    nanofab_wetchem@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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