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NanotechnologyNanofabrication / manufacturing

# Lithography

## News and Updates

### NIST’s NanoFab Reopens its Doors to Universities, Industry, and Research Institutions

April 3, 2023

### NIST Designs a Prototype Fuel Gauge for Orbit

November 12, 2020

### Blazing a Path for Buried Bits in Quantum Chips

April 10, 2018

View All News and Updates

## Projects and Programs

### Single Molecule Fluorescence Measurements of Nanoscale Proton Distributions in Photoresist

### Polymers for Next-Generation Lithography

### Nano-Structured Optics and Optical Surface Metrology

### Electron Microscopy of Carbon Nanotube Composites

View All Projects/Programs

## Publications

### Defining Chi for Block Copolymer Lithography

January 11, 2023

Daniel  Sunday

### Unmasking the Resolution–Throughput Tradespace of Focused-Ion-Beam Machining

August 21, 2022

Andrew  MadisonJohn S.  VillarrubiaKuo-Tang  LiaoCraig R.  CopelandJoshua  SchumacherKerry  SiebeinRobert  IlicJames Alexander  LiddleSamuel M.  Stavis

### PHIDL: Python-based layout and geometry creation for nanolithography

September 27, 2021

Adam  McCaughanAlexander N. TaitSonia  BuckleyJeff  ChilesJeff  ShainlineSae Woo  Nam

### Microfabricated fiducial markers for digital image correlation-based micromechanical testing of LIGA Ni alloys

May 7, 2021

Li-Anne  LiewDavid T. ReadMay  Martin

## Tools and Instruments

### NanoFab Tool: Suss MicroTec MA6/BA6 Contact Aligner

### NanoFab Tool: JEOL JBX 6300-FS Direct Write Electron Beam Lithography System

View All Tools & Instruments

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