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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-j-woollam-m-2000-di-spectroscopic-ellipsometer

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TOOLS & INSTRUMENTS

# NanoFab Tool:  J. A. Woollam M-2000 DI Spectroscopic Ellipsometer

J. A. Woollam M-2000 DI Spectroscopic Ellipsometer

The J. A. Woollam M-2000 DI spectroscopic ellipsometer provides fast and accurate thin film characterization over a wide spectroscopic range. The high speed CCD detector automatically collects data at hundreds of wavelengths ranging from infrared to deep ultraviolet at multiple angles. The user-friendly modeling software can analyze the collected data to characterize film thicknesses, indices of refraction, and extinction coefficients on single layer or multilayer film stacks.

## Specifications/Capabilities

                    - Automated X-Y sample translation.
                    - Automated tip and tilt alignment.
                    - Automated sample height alignment.
                    - Automated angle adjustment ranging from 45° to 90°.
                    - Wavelength range: 193 nm to 1690 nm.
                    - Minimum measurement beam diameter: 300 μm using focusing probes.
                    - High speed charge-coupled device (CCD) detector.
                    - Integrated camera for viewing the measurement light beam's location.
                    - User friendly software for data acquisition and data analysis.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 5 mm.

## Typical Applications

                    - Characterization of thin films.
                    - Measurement of thickness and optical constants on single or multilayer stack.
                    - Characterization of oxides, photoresists, nitrides, polymers, metals, and other thin films.
                    - Mapping of film uniformity.
                    - Determination of deposition rates, etch rates, and total film growth.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Marc J. Cangemi  marc.cangemi@nist.gov      (301) 975-5993   

### Backup Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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