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https://www.nist.gov/laboratories/tools-instruments/topic/249151

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NanotechnologyNanofabrication / manufacturing

## Lithography

# Tools and Instruments

### NanoFab Tool: JEOL JBX 6300-FS Direct Write Electron Beam Lithography System

### NanoFab Tool: Suss MicroTec MA6/BA6 Contact Aligner

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