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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-specialty-coating-systems-pds-2010-parylene-deposition

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Specialty Coating Systems PDS 2010 Parylene Deposition System

The Specialty Coating Systems PDS 2010 parylene deposition system provides users with reliable and repeatable conformal parylene coatings ranging from 75 micrometers down to a few nanometers thick. The system can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

## Specifications/Capabilities

                    - Precursors supported:	                       - Parylene N.
                      - Parylene C.
                    - Thickness range: 75 μm to 10 nm.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 1 mm.

## Typical Applications

                    - Electronic and automotive applications.
                    - Biocompatible coatings for medical applications.
                    - Moisture and chemical barriers.
                    - Thin film dielectrics.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 2 hours.
                    - Maximum Reservation Time: 24 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
                    - Restrictions: Substrates must be vacuum compatible.

## Contact

### Primary Engineer

                    -  Jessie Zhang  chen.zhang@nist.gov      (301) 975-4565   

### Backup Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### General Contact

                    -      NanoFab Deposition    nanofab_deposition@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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