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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-keithley-4200-scs-parametric-test-station

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Keithley 4200 SCS Parametric Test Station

The Keithley 4200 SCS parametric test system provides in-line electrical characterization capabilities, including the ability to measure capacitance at multiple frequencies. The tool supports resistance measurements and transistor threshold measurements by supplying and measuring both DC and ultra-fast pulsed currents and voltages. A dark box enables light sensitive measurements. The enclosed chuck can accommodate substrates ranging from 150 mm diameter wafers down to small pieces and can controllably heat samples up to 300 °C.

## Specifications/Capabilities

                    - Measure capacitance at multiple frequencies.
                    - Source and measure both DC and ultra-fast pulsed currents and voltages.
                    - Dark box for light sensitive measurements.
                    - Heated chuck allows measurements up to 300 °C.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 150 mm (6 in).
                      - Small pieces supported: Yes.
                      - Maximum thickness: 5 mm.

## Typical Applications

                    - Mobile ion concentration measurement.
                    - Pulsed current-voltage (IV) sweep.
                    - Pattern short and open testing.
                    - Semiconductor device threshold measurement.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### Backup Engineer

                    -  Matthew Robinson  matthew.robinson@nist.gov      (301) 975-2421   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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