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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-silanization-oven

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TOOLS & INSTRUMENTS

# NanoFab Tool: Silanization Oven

Image of Silanization Oven

The Silanization Oven is available to users in the Soft Lithography Laboratory. This tool supports the mold adhesion and release processes using organosilanes. Two organosilanes offered in this tool are APTES and FOTS. The fully automated silanization coating system protects users from exposure to chemicals. It also allows for a wide variety of substrates, processing of wafers up to 200 mm in diameter, and improves the coating process. The system, which replaces the current desiccation process, allows for batch processing with repeatable results and chemical solutions are delivered on demand.

## Specifications/Capabilities

                    - Process temperature: 100°C
                    - Organosilane deposition: APTES, FOTS
                    - Single and Batch wafer capabilities

## Usage Information

### Supported Sample Sizes

                      - Wafer diameter supported: 75 mm (3 inch), 100 mm (4 inch), 150 mm (6 inch), 200 mm (8 inch)
                      - Small pieces supported: Yes 

## Recommended Substrates/Restricted Materials

                      - No additional chemistries to be used in the tool

## Typical Applications

                    - Release agent treatment
                    - Adhesion agent treatment
                    - O2 plasma cleaning

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom Hours

## Facility

## Tool Reservation Rules

                    - Minimum Reservation Time: 1.0 hours.
                    - Maximum Reservation Time: 6 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Matthew Robinson  matthew.robinson@nist.gov      (301) 975-2421   

### Backup Engineer

                    -  Joshua Schumacher  joshua.schumacher@nist.gov      (301) 975-8065   

### General Contact

                    -      NanoFab Litho    nanofab_litho@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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