Skip to main content    

An official website of the United States government

Here’s how you know

**Official websites use .gov**              A **.gov** website belongs to an official government organization in the United States.            

**Secure .gov websites use HTTPS**              A **lock** (  LockA locked padlock) or **https://** means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.            

https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-gemstar-atomic-layer-deposition

            -  Topics  -  All Topics 
-  Advanced communications 
-  Artificial intelligence 
-  Bioscience 
-  Buildings and construction 
-  Chemistry 
-  Climate 
-  Cybersecurity 
-  Electronics 
-  Energy 
-  Environment 
-  Fire 
-  Forensic science 
-  Health 
-  Information technology 
-  Infrastructure 
-  Manufacturing 
-  Materials 
-  Mathematics and statistics 
-  Metrology 
-  Nanotechnology 
-  Neutron research 
-  Performance excellence 
-  Physics 
-  Public safety 
-  Resilience 
-  Standards 
-  Transportation 
 
            -  Publications 
            -  Labs & Major Programs  -  Laboratories    -  Communications Technology Laboratory 
  -  Engineering Laboratory 
  -  Information Technology Laboratory 
  -  Material Measurement Laboratory 
  -  Physical Measurement Laboratory 
-  User Facilities    -  NIST Center for Neutron Research 
  -  CNST NanoFab 
-  Research Test Beds 
-  Research Projects 
-  Tools & Instruments 
-  Major Programs    -  Baldrige Performance Excellence Program 
  -  CHIPS for America Initiative 
  -  Manufacturing Extension Partnership (MEP) 
  -  Office of Advanced Manufacturing 
  -  Special Programs Office 
  -  Technology Partnerships Office 
 
            -  Services & Resources  -  Standards and Measurements    -  Calibration Services 
  -  Laboratory Accreditation (NVLAP) 
  -  Quality System 
  -  Standard Reference Materials (SRMs) 
  -  Standards.gov 
  -  Time Services 
  -  Office of Weights and Measures 
-  Software 
-  Data    -  Chemistry WebBook 
  -  National Vulnerability Database 
  -  Physical Reference Data 
  -  Standard Reference Data (SRD) 
-  Storefront 
-  License & Patents 
-  Computer Security Resource Center (CSRC) 
-  NIST Research Library 
 
            -  News & Events  -  News 
-  Events 
-  Blogs 
-  Feature Stories 
-  Awards 
-  Video Gallery 
-  Image Gallery 
-  Media Contacts 
 
            -  About NIST  -  About Us    -  Leadership 
  -  Organization Structure 
  -  Budget & Planning 
-  Contact Us 
-  Visit 
-  Careers    -  Student programs 
-  Work with NIST 
-  History    -  NIST Digital Archives 
  -  NIST Museum 
  -  NIST and the Nobel 
-  Educational Resources 
 

TOOLS & INSTRUMENTS

# NanoFab Tool: Gemstar Atomic Layer Deposition

Photograph of the Arradiance Gemstar atomic layer deposition system.

Credit:

The Arradiance Gemstar atomic layer deposition (ALD) system supports thermal ALD coating processes with precise ultrathin and pinhole free films in a compact benchtop platform. The system deposits films with thicknesses ranging from one atomic layer to several nanometers on a variety of substrate materials and can accommodate substrates ranging from small pieces to 200 mm diameter wafers. Standard processes include Titanium Oxide and Hafnium Oxide.

## Specifications/Capabilities

                    - Precisely controlled ultrathin and pinhole free film coating.
                    - Film thicknesses ranging from one atomic layer to tens of nanometers.
                    - Maximum temperature: 200 °C.
                    - Standard deposition processes:	                       - Titanium Oxide.
                      - Hafnium Oxide.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm.
                      - Small pieces supported: Yes.

## Typical Applications

                    - Nanolaminates coatings.
                    - Nanostructure conformal coatings.
                    - High-aspect ratio feature coatings.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

Minimum Reservation Time: 1 hour.Maximum Reservation Time: 24 hours.Adjacent Reservations Permitted: Yes.Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.Restrictions: No photoresist or plastic substrates.

## Contact

### Primary Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### Backup Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   
                    -  Jessie Zhang  chen.zhang@nist.gov      (301) 975-4565   
                    -      NanoFab Deposition    nanofab_deposition@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### General Information

                    -      NanoFab Deposition    nanofab_deposition@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

## Hourly Rates

## Training Rates

## Training Time

### HEADQUARTERS

301-975-2000

Webmaster | Contact Us | Our Other Offices

TwitterFacebookLinkedInInstagramYouTubeGiphyRSS FeedMailing List

Feedback

                      -  Site Privacy 
                      -  Accessibility 
                      -  Privacy Program 
                      -  Copyrights 
                      -  Vulnerability Disclosure 
                      -  No Fear Act Policy 
                      -  FOIA 
                      -  Environmental Policy 
                      -  Scientific Integrity 
                      -  Information Quality Standards 
                      -  Commerce.gov 
                      -  Science.gov 
                      -  USA.gov 
                      -  Vote.gov