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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-sandvik-anneal-furnaces

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TOOLS & INSTRUMENTS

# NanoFab Tool: Sandvik Anneal Furnaces

Photo of the Sandvik anneal furnaces

Credit:

The two Sandvik anneal furnaces, equipped with silicon carbide tubes, support anneal processing in the NanoFab. The anneal furnaces allow nitrogen, argon and forming gas anneals on substrates ranging from small chips to wafer diameters up to 200 mm.

## Specifications/Capabilities

                    - Automatic recipe controller using Variable Parameter Table (VPT)
                    - Maximum Temperature: 1200 °C  
                    - Standard anneal processes gases:	                       - Nitrogen
                      - Argon
                      - 10% forming gas
                    - Wafer diameters: 75 mm (3 in), 100 mm (4 in), 150 mm (6 in), and 200 mm (8 in)
                    - Small pieces supported: Yes

## Typical Applications

                    - Dopant diffusion/activation
                    - Crystallization
                    - Densification of deposited films
                    - Sinter
                    - Anneal

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Facility

## Tool Reservation Rules

                    - Minimum Reservation Time: 4 hours 
                    - Maximum Reservation Time: 24 hours 
                    - Adjacent Reservations Permitted: Yes 
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### Backup Engineers

                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   

### General Contact

                    -      NanoFab Furnaces    nanofab_furnaces@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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