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https://www.nist.gov/laboratories/tools-instruments/beamline-4-ultraviolet-optical-properties-and-calibrations

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TOOLS & INSTRUMENTS

# Beamline 4: Ultraviolet Optical Properties and Calibrations

Beamline 4 is a general purpose radiometric beamline consists of a 2 m monochromator to disperse radiation from SURF III. An Absolute Cryogenic Radiometer (ACR) at the end of the beamline accurately determines the radiant flux of the dispersed beam which, in turn, is used to calibrate the response of photodetectors. We have achieved an uncertainty of less than 1% (k=2) from 135 nm to 325 nm in measuring the spectral response of a typical silicon detector. In addition to detector power response calibration, the flexible design of the beamline enables a wide range of measurements such as reflectivity, internal quantum efficient, irradiance responsivity and radiation degradation of photodetectors as well as reflectivity and transmission of optical materials. Such works allow us to understand and model the behavior of various solid-state photodetectors and resulted in great impact on accurate UV detection for industries such as UV curing and semiconductor photolithography.

The CaF2 window between the monochromator and the end station has been replaced by a MgF2 window, which extends the usable wavelength range down to about 115 nm.

## Specifications/Capabilities

                    - Normal incidence wavelength range 115 nm to 320 nm 
                    - Absolute cryogenic radiometer (ACR) based radiometric beamline
                    - UV detector calibrations
                    - Detector radiation damage studies
                    - Optical properties of UV materials
                    - Combined relative uncertainty < 0.5 %

Optical / photometry / laser metrologyPhysicsOptical physics and communicationsSpectroscopy

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Sensor Science Division
                                  - Optical Radiation Group

## Details

## Contact

                    -  Uwe Arp  uwe.arp@nist.gov      (301) 975-3233   
                    -  Robert E Vest  robert.vest@nist.gov      (301) 975-3992   

## Related Tools & Instruments

Beamline 3: Extended Range Monochromator for Ultraviolet and Extreme-Ultraviolet Optical Properties and Calibrations

Ultraviolet Scale Realization Facility UV SRF

Synchrotron Ultraviolet Radiation Facility SURF III

Spectral comparator facilities

## Related Projects

Bilateral Comparison of Spectral Responsivity in the Vacuum-Ultraviolet

Extreme Ultraviolet Detector Calibration Service

## Related Publications

Bilateral NIST-PTB Comparison of Spectral Responsivity in the VUV

Ultraviolet Radiometry With Synchrotron Radiation and Cryogenic Radiometer

New Ultraviolet Radiometry Beamline at the Synchrotron Ultraviolet Radiation Facility at NIST

Ultraviolet degradation study of photomultiplier tubes at SURF III

Damage to Solid-State Photodiodes by Vacuum Ultraviolet Radiation

The New UV Radiometry Facility at SURF

The New Ultraviolet Spectral Responsivity Scale Based on Cryogenic Radiometry at Synchrotron Ultraviolet Radiation Facility III

Characterization of UV-Induced Radiation Damage in Si-based Photodiodes

### HEADQUARTERS

301-975-2000

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