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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-gnp-412s-post-cmp-wafer-cleaner

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TOOLS & INSTRUMENTS

# NanoFab Tool: GnP 412S, Post-CMP Wafer Cleaner

Photo of the Post-CMP Wafer Cleaner

Credit:

This tool removes the particulate residues resulting after wafer polishing using the CMP. These particles are typically a few tens of nanometers in size. The tool uses chemistries specific to the materials polished, which are delivered through double-sided PVA brushes wiping the wafer. The last DI water rinse is delivered with megasonic agitation that completely washes away all the particles. The wafer is finally spin-dried.

## Specifications/Capabilities

                    - Sample sizes: 100 mm, 150 mm and 200 mm in diameter wafers
                    - Manual loading only, one wafer at a time
                    - Megasonic agitation in the final rinse

## Usage Information

### Operating Instructions

## Typical Applications

                    - Post-CMP wafer cleaning
                    - General wafer cleaning

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

24/7 access

## Facility

## Tool Reservation Rules

                    - Minimum Reservation Time: 1 hour
                    - Maximum Reservation Time: 8 hours
                    - Adjacent Reservations Permitted: yes
                    - Restrictions:  users must discuss their applications with the tool owner every time they plan to use the tool
                    - Cancelation Policy: 24-hour notice required

## Contact

### Primary Engineer

                    -  Gerard Henein  gerard.henein@nist.gov      (301) 975-5645   

### Backup Engineer

                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   

### General Contact

                    -      NanoFab Postprocess    nanofab_postprocess@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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