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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-ssec-single-wafer-cleaning-system-3

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TOOLS & INSTRUMENTS

# NanoFab Tool: SSEC Single Wafer Cleaning System 3

The SSEC model 3300ML single wafer spray acid cleaning system supports RCA process in the NanoFab cleanroom. This system mixes, heats and delivers chemicals on demand and provides better wafer cleaning capability by eliminating cross contamination between wafers. In addition, the automated single wafer cleaning process prevent users from exposure to chemicals. This system can accommodate substrates ranging from 75 mm diameter to 200 mm diameter and irregular wafer pieces. 

## Specifications/Capabilities

                    - 1.5 MHz tri-megasonic scrubbing nozzle with high flow stream 
                    - Single wafer process to eliminate cross contamination
                    - Fresh chemicals mixed, heated and delivered on demand 

## Usage Information

### Supported Sample Sizes

                      - Wafer diameter supported: 75 mm (3 inch), 100 mm (4 inch), 150 mm (6 inch), 200 mm (8 inch)
                      - Small pieces supported: Yes (25 mm or larger)

### Recommended Substrates/Restricted Materials

                      - Bare Siliconwafers
                      - Bare Quartz wafers
                      - Bare Glass wafers
                      - Bare Sapphire wafers

## Typical Applications

                    - Pre-diffusion clean
                    - Pre-oxide growth clean
                    - Pre-nitride growth clean

## Back to the NanoFab Equipment List

Nanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 0.5 hours.
                    - Maximum Reservation Time: 2 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Matthew Robinson  matthew.robinson@nist.gov      (301) 975-2421   

### Backup Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### General Contact

                    -      NanoFab Wetchem    nanofab_wetchem@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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