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TOOLS & INSTRUMENTS

# NanoFab Tool: Thermal Thin-Al Evaporator

Credit:

The Denton “Bench Top Turbo” thermal evaporator is a single source evaporator equipped with substrate rotation, a thickness monitor, and automatic deposition mode of operation. The compact thermal evaporator system is used to coat electron-beam resists with thin conductive, charge dissipation, Aluminum layer to support a variety of projects ranging from disparate fields of engineering, physical and life sciences. Using custom CNST designed holders, the table top thermal evaporator system is capable of accommodating substrate sizes from small pieces up to semi-spec, 100 mm diameter silicon substrates.

## Specifications/Capabilities

                    - Thin (< 20 nm), thermal evaporation of Al on substrates ranging from small pieces up to semi spec 100 mm diameter silicon substrates.
                    - Turbo pumped chamber has a base vacuum of 2.6 x 10 -5  Pa (2 x 10 -7  Torr).
                    - Rotating substrate holder provides uniform film deposition.
                    - One thermal evaporation source.
                    - Fully automatic operation.

## Typical Applications

                    - Charge dissipation layer for electron beam lithography.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes
                    - Maximum Reservation Time: 1 hours
                    - Adjacent Reservations Permitted: yes
                    - Cancellation Policy: 24-hour notice required

## Contact

### Primary Engineer

                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   

### Backup Engineer

                    -  Liya Yu  liya.yu@nist.gov      (301) 975-4590   

### Backup Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### General Contact

                    -      NanoFab Furnaces    nanofab_furnaces@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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