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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-fei-titan-80-300-analytical-transmission-electron

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TOOLS & INSTRUMENTS

# NanoFab Tool:  FEI Titan 80-300 Analytical Transmission Electron Microscope

Photograph of the FEI Titan 80-300 analytical electron microscope.

Credit:

The FEI Titan 80-300 scanning transmission electron microscope (STEM) is an advanced analytical field emission scanning transmission electron microscope capable of atomic-level imaging and analysis on a wide range of materials and nanostructures. The Titan is equipped with an electron energy loss spectrometer and an x-ray energy dispersive spectrometer for elemental and chemical analysis of materials at high spatial resolution. The microscope system includes a scanning module and a high angle annular dark field detector for scanning transmission electron microscopy (STEM) and for chemical analysis of very small volumes.

## Specifications/Capabilities

                    - Acceleration voltage range: 80 kV to 300 kV with preset alignment for 80 kV, 200 kV, and 300 kV
                    - Scanning transmission electron microscopy mode
                    - Convergent beam and selected area electron diffraction modes
                    - Conventional TEM modes
                    - Point-to-point spatial resolution in TEM mode: 0.20 nm at 300 kV
                    - STEM resolution: 0.136 nm at 300 kV
                    - Super-twin objective lens pole piece
                    - Gatan Orius digital camera (2k x 2k)
                    - Gatan OneView IS CMOS camera (4k x 4k)
                    - Fischione high angle annular dark field STEM detector for Z-contrast imaging
                    - Gatan QuantumSE TM  energy filter for electron energy loss spectroscopy and energy-filtered TEM; filter energy spread: 0.8 eV
                    - EDAX Si(Li) x-ray energy-dispersive spectrometer; energy resolution: 0.136 eV
                    - Tomography acquisition, reconstruction, and analysis software
                    - Analytical, heating, cooling, and tomography specimen holders

## Usage Information

Sample Restrictions:
                    - Thickness in region of interest: 100 nm or less
                    - Maximum sample size: 3-mm diameter, 100 μm thick (including TEM specimen grid)
                    - Materials to be analyzed must be approved by the NanoFab staff.
                    - No magnetic materials.
                    - Biomaterials must be biosafety level 0 (BSL-0). Toxic or potentially infections biomaterials are not allowed.

## Typical Applications

                    - Atomic-level imaging and analysis of nanomaterials and nanoparticles
                    - Characterization of carbon nanotubes and graphene
                    - Characterization of semiconductor devices and interfaces
                    - Imaging and analysis of BSL-0 biomaterials
                    - Tomographic imaging

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

24/7 access

## Tool Reservation Rules

                    - Minimum Reservation Time: 1 hour.
                    - Maximum Reservation Time: 12 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Alline F. Myers  alline.myers@nist.gov      (301) 975-3775   

### Backup Engineer

                    -  Kerry Siebein  kerry.siebein@nist.gov      (301) 975-8458   

### General Contact

                    -      NanoFab Microscopy    nanofab_microscopy@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

## Hourly Rates

## Training Rates

### Titan TEM

## Training Time

### HEADQUARTERS

301-975-2000

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