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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bruker-dimension-fastscan-atomic-force-microscope

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TOOLS & INSTRUMENTS

# NanoFab Tool:  Bruker Dimension FastScan Atomic Force Microscope

The Bruker Dimension FastScan atomic force microscope (AFM) combines a high-speed scanning AFM, programmable stage control, and a user friendly interface to provide rapid nanoscale imaging capabilities on substrates ranging from 200 mm diameter wafers down to small pieces. The system supports scan areas of up to 35 μm x 35 μm and can automatically collect data from multiple locations on a substrate.

## Specifications/Capabilities

                    - Phase imaging, contact mode, and tapping mode.
                    - Electrostatic force microscopy.
                    - Magnetic force microscopy.
                    - X-Y scan range: 35 μm x 35 μm.
                    - Z range: 3 μm.
                    - 125 Hz raster frequency in survey mode.
                    - 150 mm by 180 mm motorized stage positioning.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 200 mm (8 in).
                      - Small pieces supported: Yes.

## Typical Applications

                    - Imaging of nanoscale materials.
                    - Characterization of topographic materials.
                    - Non-destructive inspections of samples.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 30 minutes.
                    - Maximum Reservation Time: 2 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Richard Kasica  richard.kasica@nist.gov      (301) 975-2693   

### Backup Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### General Contact

                    -      NanoFab Metrology    nanofab_metrology@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

### HEADQUARTERS

301-975-2000

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