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https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-allwin21-downstream-asher

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TOOLS & INSTRUMENTS

# NanoFab Tool: AllWin21 Downstream Asher

The AllWin21 Downstream plasma asher uses heat and exposure to downstream oxygen radicals to remove resist and other organic materials. The cassette load system is capable of handling 100 mm (4 in) diameter substrates.

## Specifications/Capabilities

                    - Fixed 1000 W 2.4 GHz Radio frequency (RF) power source.
                    - Unique process gases: O2 and CF4
                    - Downstream ashing of resist.

## Usage Information

### Supported Sample Sizes

                      - Maximum wafer diameter: 100 mm (4 in).
                      - Small pieces supported: yes 

## Typical Applications

                    - Isotropic descum or stripping of resists.

## Back to the NanoFab Equipment List

NanotechnologyNanofabrication / manufacturing

## Organizations

                          - NIST Headquarters
                            - Laboratory Programs
                              - Physical Measurement Laboratory
                                - Physical Measurement Laboratory Office
                                  - Center for Nanoscale Science and Technology

## Details

## Hours of Operation

Cleanroom hours

## Tool Reservation Rules

                    - Minimum Reservation Time: 15 minutes.
                    - Maximum Reservation Time: 4 hours.
                    - Adjacent Reservations Permitted: Yes.
                    - Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

## Contact

### Primary Engineer

                    -  Lei Chen  lei.chen@nist.gov      (301) 975-2908   

### Backup Engineer

                    -  Jessie Zhang  chen.zhang@nist.gov      (301) 975-4565   
                    -  Robert Ilic  robert.ilic@nist.gov      (301) 975-3712   

### General Contact

                    -      NanoFab Dryetch    nogtech@nist.gov      (301) 975-8672          100 Bureau Drive, Stop 6201   Gaithersburg,  MD 20899-6201   

## Hourly Rates

## Training Rates

### RIE Nitride Left

## Training Time

### HEADQUARTERS

301-975-2000

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