U.S. flag
        An official website of the United States government
          Here’s how you know
        Here’s how you know**Official websites use .gov**
              
              A **.gov** website belongs to an official government organization in the United States.
        **Secure .gov websites use HTTPS**
              
              A **lock** (  A locked padlock
) or **https://** means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites. https://www.nist.gov/laboratories/tools-instruments/nanofab-tool-bruker-dektak-xt-profilometer
  Search NIST
    Search
              Menu

      


Close
    Topics
        All Topics
                                                        Advanced communications
                                                        Artificial intelligence
                                                        Bioscience
                                                        Buildings and construction
                                                        Chemistry
                                                        Climate
                                                        Cybersecurity
                                                        Electronics
                                                        EnergyEnvironment
                                                        Fire
                                                        Forensic science
                                                        Health
                                                        Information technology
                                                        Infrastructure
                                                        Manufacturing
                                                        Materials
                                                        Mathematics and statisticsMetrology
                                                        Nanotechnology
                                                        Neutron research
                                                        Performance excellence
                                                        Physics
                                                        Public safety
                                                        Resilience
                                                        Standards
                                                        Transportation
            Publications
            Labs & Major Programs
        Laboratories
                                Communications Technology Laboratory
                                  Engineering Laboratory
                                  Information Technology Laboratory
                                  Material Measurement Laboratory
                                  Physical Measurement LaboratoryUser Facilities
                                NIST Center for Neutron Research
                                  CNST NanoFab
                                                        Research Test Beds
                                                        Research Projects
                                                        Tools & InstrumentsMajor Programs
                                Baldrige Performance Excellence Program
                                  CHIPS for America Initiative
                                  Manufacturing Extension Partnership (MEP)
                                  Office of Advanced Manufacturing
                                  Special Programs Office
                                  Technology Partnerships Office
            Services & Resources
        Standards and Measurements
                                Calibration Services
                                  Laboratory Accreditation (NVLAP)
                                  Quality System
                                  Standard Reference Materials (SRMs)
                                  Standards.gov
                                  Time Services
                                  Office of Weights and MeasuresSoftware
                                                        Data
                                Chemistry WebBook
                                  National Vulnerability Database
                                  Physical Reference Data
                                  Standard Reference Data (SRD)
                                                        Storefront
                                                        License & PatentsComputer Security Resource Center (CSRC)
                                                        NIST Research Library
            News & Events
        News
                                                        Events
                                                        Blogs
                                                        Feature Stories
                                                        AwardsVideo Gallery
                                                        Image Gallery
                                                        Media Contacts
            About NIST
        About Us
                                Leadership
                                  Organization Structure
                                  Budget & Planning
                                                        Contact Us
                                                        Visit
                                                        Careers
                                Student programsWork with NIST
                                                        History
                                NIST Digital Archives
                                  NIST Museum
                                  NIST and the Nobel
                                                        Educational Resources
 
 TOOLS & INSTRUMENTS

NanoFab Tool:  Bruker Dektak XT Profilometer
    
  Bruker Dektak XT ProfilometerBruker Dektak XT Profilometer
  
      The Bruker Dektak XT contact profilometer measures the thin film thickness of patterned features by sensing the deflection of a fine stylus that is raster scanning over features ranging in height from 1 mm down to 5 nm. It is capable of mapping step heights and displaying topological three dimensional images of substrates ranging from 200 mm diameter wafers down to small pieces.

Specifications/Capabilities
      
                          Maximum step height: 1 mm.
	Vertical resolution: 0.1 nm.
	Scan length: 50 um to 50 mm.
	120,000 data points per scan.
	Scans can be stitched end to end to span up to 150 mm.
	Stylus force: 0.098 mN to 147 mN (0.01 mgf to 15 mgf).
	Motorized X-Y-theta stage.
	Wafer mapping up to 150 mm.
	3-D topological imaging.
              Usage Information
        
Supported Sample Sizes
                                Maximum wafer diameter: 200 mm (8 in).
	Small pieces supported: Yes.
	Maximum thickness: 50 mm.
              Typical Applications
      
                          Measurement of etch rates, deposition rates, and film growth rates.
	Measurement of surface roughness.
	Thickness mapping.Back to the NanoFab Equipment List
  Nanotechnology and Nanofabrication / manufacturing
  
            Organizations
      
      NIST HeadquartersLaboratory ProgramsPhysical Measurement LaboratoryPhysical Measurement Laboratory OfficeCenter for Nanoscale Science and Technology
              Details
        
NEMO Name
                                Dektak XT 1, Dektak XT 2

Location
                                Building 215 Room B107 (Cleanroom)
  Campus
                    Gaithersburg
              Hours of Operation
      
                          Cleanroom hours

Tool Reservation Rules
      
                          Minimum Reservation Time: 30 minutes.
	Maximum Reservation Time: 4 hours.
	Adjacent Reservations Permitted: Yes.
	Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.
	Restrictions: No bulky samples which could hit and break the stylus. No liquids or soft samples.
Contact
      
        

Primary Engineer
        Gerard Henein
    
      
  gerard.henein@nist.gov
  (301) 975-5645

  

Backup Engineer
        Marc J. Cangemi
    
      
  marc.cangemi@nist.gov
  (301) 975-5993

  

General Contact
        NanoFab Metrology
  nanofab_metrology@nist.gov
  (301) 975-8672
  100 Bureau Drive, Stop 6201 
  Gaithersburg,
  MD 20899-6201

    
    Created May 21, 2014, Updated June 15, 2023
 HEADQUARTERS
            100 Bureau Drive
              Gaithersburg, MD 20899301-975-2000
            Webmaster | Contact Us | Our Other Offices
        Twitter
            
Facebook
            
LinkedIn
            
Instagram
            
YouTube
            
Giphy
            
RSS Feed
            
Mailing List
                              How are we doing? Feedback

  
  Site Privacy
                      Accessibility
                      Privacy Program
                      Copyrights
                      Vulnerability Disclosure
                      No Fear Act Policy
                      FOIA
                      Environmental Policy
                      Scientific Integrity
                      Information Quality Standards
                      Commerce.gov
                      Science.gov
                      USA.gov
                      Vote.gov