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https://www.nist.gov/image/experimental-setup-create-3d-x-ray-image-integrated-circuit

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# experimental setup to create a 3D X-ray image of an integrated circuit

## Appears In

                        - NIST Scientists Develop Novel CT Scan Device for Integrated Circuits

Simplified view of the experimental setup (not to scale) to create a 3D X-ray image of an integrated circuit. An electron beam is directed onto a thin metal plate (target) attached to an integrated chip. When the beam slams into the target, the electrons deaccelerate, producing X rays that are modified as they pass through the integrated chip. The X rays are then collected by a detector.

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