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# Tantala-nanofabrication-platform.png

## Appears In

                        - Precision metrology with integrated photonics

**Tantala nanofabrication platform.**a) We fabricate waveguides of, for example, tantalum pentoxide (Ta2O5, tantala) on an oxidized silicon substrate. We deposit a cladding of fused silica above and around the waveguide structures. b) We create microresonators, waveguides wrapped into a circle, for numerous applications, including frequency-comb generation, laser generation and stabilization, and refractive index sensing. c and d) Many microresonators can fit on a single chip, and many chips can be fabricated on a single wafer, enabling mass production.

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