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# Nanotechnology;Nanomanufacturing;Optical Nano Vision;Checkerboard Scattering Pattern

Resembling a 3-D checkerboard, this mirage-like pattern was formed by light waves after bouncing off a specimen with a peak-and-valley arrangement of etched lines. Such complicated wave patterns, the result of light scattering and interference effects, may be used to discern the dimensions of nanoscale features. 

*MEL, optical microscopy, optical scattering, light waves, wave interference, nano metrology, linewidths, semiconductors

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February 14, 2005

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