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Electronics; Semiconductors; Nanoscale Line Roughness
    
  A colorized scanning electron microscope image shows the "waviness" or roughness of edges on reference lines made of silicon that are about 100 nanometers wide.
*MEL, lithography, semiconductor, line widths, roughness,

Download full image

June 20, 2005

Reference Number
                                05MEL009

Credit
                                Credit: B. Bunday, SEMATECH/K. Talbott, NIST

Image Type
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