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# RoRFS-figure3.png

## Appears In

                        - Research Updates – Gas Flow for Semiconductor Manufacturing

Figure 3. Physical model describing 2 stages of the gas temperature *T* in the collection tank during the calibration process. Stage 1 depicts the temperature during the filling process, and stage 2 depicts the temperature after the tank inlet valve closes and the filling process ends. Model corresponds to data for SF6 flow *Q̇* = 163.2 sccm in collection tank of two tubes in parallel (*D*i = 0.021 m, or 0.825 in, *L*tube = 1.8 m).

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