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EUV fig 1.png
    
  Appears In
      
      Dynamic EUV Imaging and Spectroscopy for Microelectronics
      
            (left) View of the ultra-fast coherent EUV system at NIST Boulder. (right) Example of the HHG spectrum after being scattered from a thin film sample.  The harmonics are spatially dispersed onto a x-ray camera via a diffraction grating.

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