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# RoRFS-figure2.png

## Appears In

                        - Research Updates – Gas Flow for Semiconductor Manufacturing

Figure 2. Plot of density of SF6 versus time for a nominal flow *Q̇* = 163.2 sccm in scaled tank with 2 tubes in parallel (*D*i = 0.021 m, or 0.825 in, *L*tube = 1.8 m):  0 ≤ *t* < 100 s is filling process, t > 100s shows pressure trace after the filling stopped.

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