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# benchtop-prototype-semiconductor-gas-flow-standard1.png

## Appears In

                        - Reliable Flow for Chip Makers

The FMG’s benchtop prototype semiconductor gas flow standard. Gas enters from the right and has  two stages of pressure regulation before entering a mass flow controller (MFC), the meter under test, and then a back pressure regulator that holds the downstream pressure at the meter under test constant. A valve isolates the collection tanks, which are a pair of finned tubes with 0.025m outside diameter.

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