National Institute of Standards and Technology | U.S. Department of Commerce 1

CHIPS for America

Overview of the Environmental Questionnaire

May 11, 2023
National Institute of Standards and Technology | U.S. Department of Commerce 2

Today’s CHIPS Program Office Speakers

Jessica Stoneman

Public Engagement

Morgan Dwyer, PhD

Chief Strategy Officer

Komie Jain, J.D.

Director, Environmental 

Division

Hoshing Chang, PhD

NEPA Coordinator

Jennifer Nist, J.D.

NEPA Senior Advisor
National Institute of Standards and Technology | U.S. Department of Commerce 3

TODAY’S AGENDA & OBJECTIVES

Agenda

 CHIPS for America Vision – 5 mins

 Application Process Review – 5 mins

 Deep Dive into Environmental 

Questionnaire – 45 mins

 Next Steps and Additional Resources – 5 

mins

Objectives

Understand:

 Purpose of the Environmental 

Questionnaire

 Environmental Questionnaire Requirements

 What CPO is looking for in the 

Environmental Questionnaire

 How to submit an Environmental 

Questionnaire

 How CPO processes the Environmental 

Questionnaire
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CHIPS for America Vision

Economic 

Security

Future 

Innovation

National 

Security

The CHIPS Act will 

strengthen supply chain 

security and increase 

economic resilience in critical 

sectors.

The CHIPS Act will spur 

innovation, increase 

competitiveness, and 

ensure long-term U.S. 

leadership in the sector

The CHIPS Act will ensure 

that the U.S. can 

manufacture advanced 

technologies, including 

secure chips for the U.S. 

military.
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Vision for Success

 The U.S. will have at least two new large-scale 

clusters of leading-edge logic fabs

 U.S.-based engineers will develop the process 

technologies underlying the next gen of logic 

chips

Leading-Edge Logic

 U.S.-based fabs will produce high-volume 

memory chips on economically competitive 

terms

 R&D for next-generation memory technologies 

critical to supercomputing and other advanced 

computing applications will be conducted in the 

U.S.

Memory

 The U.S. will be home to multiple high-volume 

advanced packaging facilities

 The U.S. will be a global leader in commercialscale advanced packaging technology

Advanced Packaging

 The U.S. will have strategically increased its 

production capacity for current-gen and mature 

chips

 Chipmakers will also be able to respond more 

nimbly to supply and demand shocks

Current-Generation and Mature

By the 

end of the 

decade... 
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Application Process

Statement of interest (open to all)

Pre-application (optional)

Full application

Due diligence

Award preparation

Feedback

Submissions accepted as of...

Leading-edge Current-gen, maturenode, and back-end

February 28, 2023 February 28, 2023

March 31, 2023 May 1, 2023

March 31, 2023 June 26, 2023
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Program Priorities

Economic 

and national 

security 

objectives

Commercial 

viability

Financial 

strength

Technical 

feasibility 

and 

readiness

Workforce 

development Broader

impacts
National Institute of Standards and Technology | U.S. Department of Commerce 8

National Institute of Standards and Technology | U.S. Department of Commerce 8

CHIPS Environmental Division

The Environmental Division is the team of CHIPS program 

practitioners who will:

• Ensure that the Department of Commerce satisfies applicable 

environmental laws and requirements in connection with activities that 

receive funding through the CHIPS Incentives Program

• Work with federal and state agencies, applicants and contractors in an 

iterative process to ensure efficient, effective, and predictable reviews 

that result in informed and environmentally responsible decisions

Note: The CHIPS Environmental Division sits within the CHIPS Program Office in the National Institute of Standards and Technology 

(NIST) at the Department of Commerce.
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National Institute of Standards and Technology | U.S. Department of Commerce 9

Environmental Risk is one 

of four elements of the 

Technical Feasibility and 

Readiness program priority

Timely satisfaction of environmental review and permitting requirements is critical to 

the success of the CHIPS program.

Role of Environmental Compliance
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ENVIRONMENTAL QUESTIONNAIRE PURPOSE

The EQ will help the Environmental Division:

 Assess the environmental risk and merits associated with each application, 

and support applicants in obtaining relevant permits and authorizations.

 Fulfill CPO's responsibilities under the:

• National Environmental Policy Act

• National Historic Preservation Act

• Endangered Species Act

• Executive Orders

 It may also supplement or provide additional context to the "Climate and 

Environmental Responsibility Plan" required under the NOFO.

Pre-Application – Financial Information: Sources and Uses of Funds

The Department intends to prioritize applications that demonstrate a clear path to 

meeting permitting requirements in a timely manner. 
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Completing the Environmental Questionnaire 

is the first step

Statement of interest (open to all)

Pre-application (optional)

Full application

Due diligence

Award preparation

Feedback

The Environmental 

Questionnaire is a required part 

of the application process:

• With pre-application if 

applicant chooses to submit 

the optional pre-application

• With full application
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ENVIRONMENTAL QUESTIONNAIRE REQUIREMENTS

• When submitting the EQ, applicants should ONLY provide as 

much detail and information as is currently available

• If certain questions are not applicable, please provide a brief supporting 

statement explaining why

• Applicants may use a single EQ for the entire application 

(for multiple projects) OR submit an EQ for each project –

whichever approach is easier 

• After reviewing the submitted EQ, the Environmental Division will 

work with applicants to determine what additional information is 

necessary and a schedule for submitting that information to CPO

Pre-Application – Financial Information: Sources and Uses of Funds
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Environmental Questionnaire 

Deep Dive
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QUESTION A. PROJECT DESCRIPTION

Project Description

Please provide a brief 

summary of the proposed 

project(s) and each of the 

activities included in the 

proposed project(s), 

including the project 

schedule and a summary 

of any manufacturing 

process that will take 

place at the facility 

associated with the 

project.

1. Describe the “project” including all of the applicant’s activities within a 

specific location (e.g., construction of new fab, modernization and 

expansion of existing fab, new equipment purchase).

2. Identify any eligible activities within the “project” that the applicant wants 

CPO to consider for funding. This could include one or more of the 

activities described within the applicant’s project.

3. Explain how each activity, identified in Step 2, is related to the applicant’s 

project, and to other activities within the project.

The applicant’s project description is critical to inform CPO’s 

NEPA process.

Pre-Application – Financial Information: Sources and Uses of Funds

A
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QUESTIONS B & C

Project Site/Affected 

Environment

Describe the location’s 

address or coordinates, 

and the names of facilities.

Resource Consumption 

Rates and Effluent 

Streams and Impacts

Describe all material 

inputs and outputs, 

including, for example, but 

not limited to, material 

resources, water 

consumption, electricity 

use.

• Project Site/Affected Environment

• Nature of the site and current conditions

• Ownership of site and surrounding lands

• Existing facilities or buildings, and whether they would be 

demolished, modified, or reused

• New facilities or buildings proposed for the site

• Whether work on the facility has already begun, or will begin 

before a funding decision is made

• Resource Consumption Rates and Effluent Emissions Streams and 

Impacts

Pre-Application – Financial Information: Sources and Uses of Funds

B What we're looking for
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QUESTION D. TRIBAL, HISTORIC, AND CULTURAL RESOURCES

Tribal, Historic, and Cultural Resources

Pre-Application – Financial Information: Sources and Uses of Funds

D

• Indicate whether the project site, or any adjoining lands, are owned by or held in trust for any federally 

recognized Indian Tribes, or are located within the exterior boundaries of a reservation. Describe any known 

resources of tribal interest, or any known concerns raised by any federally recognized Indian Tribes related to 

the project.

• Identify any known historic, archeological, or cultural resources within or adjacent to the project site, including 

historic properties that are listed on or eligible for listing on the National Register of Historic Places, or 

considered to be of local or state significance. Discuss the potential impacts of the project on any such 

resources within or adjacent to the project site, and any measures that have been identified that might mitigate 

these impacts.

This will help CPO fulfill our responsibility for:

• Government-to-government consultation with affected Tribes

• Compliance with the National Historic Preservation Act (NHPA)
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QUESTIONS E, F, G & H

• These questions will help us understand the surrounding 

environment and the resources that could be impacted

E. Project Setting

F. Vegetation and Wildlife Resources

G. Conservation Areas

H. Coastal Zones and Navigable Waters

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for
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QUESTION I. WETLANDS

Wetlands

Identify any wetlands 

within or adjacent to the 

proposed project location

• If the proposed project may impact wetlands, streams, or 

navigable waters, the applicant should consult with the Army 

Corps of Engineers to determine whether a section 404 Clean 

Water Act permit is needed. This does not need to be completed 

prior to submitting the EQ.

• When applying for a permit, an permittee must first show that 

steps have been taken to avoid impacts to wetlands, streams 

and other aquatic resources; that potential impacts have been 

minimized; and all remaining unavoidable impacts will be 

compensated or offset.

Pre-Application – Financial Information: Sources and Uses of Funds

I What we're looking for
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QUESTION J. FLOODPLAINS

Floodplains

State whether the 

proposed project is 

located within a mapped 

100- or 500-year 

floodplain, and provide a 

FEMA floodplain map.

Pre-Application – Financial Information: Sources and Uses of Funds

J What we're looking for

• Before funding a project, CPO must determine whether its action will 

result in impacts to floodplains.

• Applicants should identify whether the proposed project occurs in a 

floodplain and consider alternatives to activities within floodplains. The 

applicant should also identify measures to avoid, minimize, and mitigate 

the risk of flood loss. When proposing a project, applicants should also 

take into account changing flood hazards due to climate change and 

other processes (e.g., land use).

• See Executive Order 11988 Floodplain Management, as amended by 

Executive Order 13690 Establishing a Federal Flood Risk Management 

Standards and a Process For Further Soliciting and Considering 

Stakeholder Input.
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QUESTION K. ENDANGERED SPECIES

Endangered Species

Identify any threatened, 

endangered, and 

candidate species located 

in or near the proposed 

project location, and any 

potential or existing 

habitat, including critical 

habitat designations in the 

project area.

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• The Endangered Species Act (ESA) requires CPO to assess the impact 

of proposed actions on Federally listed threatened and endangered 

species and their critical habitat. CPO must consult with the U.S. Fish 

and Wildlife Service and/or the National Marine Fisheries Service if 

endangered species are affected by a project

• Applicants may also need to obtain an ESA Incidental Take Permit if the 

applicant's activities may result in "taking" of endangered or threatened 

animal species.

K
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QUESTION L. LAND USE AND ZONING

Land Use and Zoning

Describe the present 

formal zoning designation 

and current land use of 

the proposed project site 

and adjacent land parcels. 

Identify any agricultural 

land parcels designated 

as “prime/unique 

agriculture lands” by the 

U.S. Department of 

Agriculture (USDA),

Pre-Application – Financial Information: Sources and Uses of Funds

L What we're looking for

• The Farmland Protection Policy Act is intended to minimize the impact 

Federal programs (including financial assistance) have on the 

unnecessary and irreversible conversion of farmland to nonagricultural 

uses. 

• It assures that to the extent possible federal programs are administered 

to be compatible with state, local units of government, and private 

programs and policies to protect farmland.
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QUESTIONS M-Q

Solid Waste Management

Hazardous or Toxic 

Substances

Impacts to Water 

Quality/Water Resources

Water Supply and 

Distribution System

Wastewater Collection 

and Treatment Facilities

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• These questions will help CPO with our NEPA review, and will also help 

CPO work with the applicant to determine what other environmental 

permits may be necessary. For example, permits may be required 

under the:

• Resource Conservation and Recovery Act (RCRA)

• Clean Water Act (CWA)

M

N

Q
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QUESTION R. ENVIRONMENTAL JUSTICE

Environmental 

Justice & 

Socioeconomics

Identify whether the 

proposed project would 

be in or near 

disadvantaged 

communities that are 

overburdened or 

underserved.

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• Executive Order (E.O.) 12898, Federal Actions to Address 

Environmental Justice in Minority Populations and Low-Income 

Populations, directs each Federal agency to “make achieving 

environmental justice part of its mission."

• CPO will consider potential impacts to communities with environmental 

justice concerns.

• Applicants should consider whether proposed projects are located in or 

near disadvantaged communities, and may directly engage with 

potentially affected communities to develop measures to avoid, 

minimize and mitigate impacts. CPO may also engage with these 

communities.

R
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QUESTIONS S-W

Transportation (Streets, 

Traffic and Parking)

Air Quality

Greenhouse Gases and 

their Environmental 

Effects

Noise

Health and Safety

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• The responses to these questions will assist us with our NEPA review

• It will also help us to determine whether a Clean Air Act (CAA) permit or 

other permits, likely local, will be required and to assist applicants with 

the permitting process

• Finally, the section on GHGs will assist with review of the application 

and evaluation of the applicant's Climate and Environmental 

Responsibility Plan. Applicants are expected to design their projects to 

minimize the potential for adverse impacts on the environment and the 

local community, including communities with environmental justice 

concerns. 

S

T

W
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QUESTION X. PERMITTING

Permits and Other 

Government Agency 

Involvement

Is any Federal agency 

other than NIST involved 

in any aspect of this 

project? Identify any 

Federal, Tribal, State, or 

local environmental 

permits, plans or reviews 

needed for the project and 

the status of any such 

permits. Attach copies of 

any such permits or permit 

applications.

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• Helps us understand the current status of permits

• Helps us know what other federal & state agencies we need to 

coordinate with

• Helps us to understand the permitting timeline

Permit or 

other 

requirement

Agency Applicability Permit 

Status

X
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QUESTIONS Y & Z

Public Notification / Controversy

Provide evidence of the community’s awareness of 

the project, such as newspaper articles or public 

notification and/or public meetings, as applicable. 

Identify State, Tribal, or local government agencies 

that will have oversight or interest in the project.

Environmental Experience and Approach

Describe any experience in addressing and resolving 

environmental concerns during the performance of 

past projects of similar size and complexity including 

the obtaining of necessary permits.

Pre-Application – Financial Information: Sources and Uses of Funds

What we're looking for

• These final questions will help with both 

our NEPA review and with assisting 

applicants in conducting community 

outreach and involving the public in 

proposed projects.

• We will also get a better understanding of 

where applicants may need targeted 

support

Z
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HOW CPO PROCESSES THE ENVIRONMENTAL 

QUESTIONNAIRE

Pre-Application – Financial Information: Sources and Uses of Funds

• When first received, the EQ will be reviewed for completeness.

• We will work with the applicant to obtain any information that we believe is needed but not yet provided 

based on the proposed project.

• The EQ will be used by CPO to fully scope the environmental obligations of both CPO and the applicant.

• Ongoing engagement with the applicant and continued supplementation by the applicant will be the 

foundation and support for all permits and NEPA review.
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National Institute of Standards and Technology | U.S. Department of Commerce 28

Meeting with the CHIPS Environmental 

Division

• In most instances, applicants may request a meeting with the Environmental 

Division after they have submitted an Environmental Questionnaire and the 

Environmental Division has had an opportunity to review it.

• In limited instances, the Environmental Division will meet with applicants prior to 

submission of its Environmental Questionnaire, so long as applicants: 

 File a Statement of Interest

 Review open Notices of Funding Opportunity (NOFOs) and confirm that it is eligible to 

apply for CHIPS funding now; and 

 Require support with Clean Air Act (CAA) or Clean Water Act (CWA) permit 

applications OR have questions related to NEPA environmental review documents that 

it is drafting.
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Next Steps
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SUMMARY: ENVIRONMENTAL REVIEW FOR THE 

FIRST FUNDING OPPORTUNITY

The Department intends to prioritize applications that demonstrate a clear path to meeting 

permitting requirements in a timely manner. 

The CPO Environmental Questionnaire is mandatory for all applications

Applicants must submit EQ with pre-application (if filed) and application:

• Leading-edge applicants should submit EQ with their pre-application or full application

• Current generation and mature applicants are strongly encouraged to submit pre-applications, 

including an EQ

The Environmental Division will review the EQ, identify any gaps, and request information. 

• In parallel, if, through the EQ, applicants identify additional permitting needs or areas for further 

study, consider acting on those priority areas as soon as possible.

Submission of the EQ will initiate an iterative process, with meeting(s) between applicants and the 

Environmental Division as required.

1
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National Institute of Standards and Technology | U.S. Department of Commerce 31

HOW TO SUBMIT A PRE-APPLICATION

Pre-application is strongly 

recommended for currentgeneration, mature-node, or 

back-end production facilities

Leading edge applicants’ 

submission window opened 

March 31, 2023

Earliest pre-application 

submission for currentgeneration, mature-node or 

back-end production facilities

May 1, 2023

The pre-application may be submitted a 

minimum of 21 days following the 

submission of a Statement of Interest (SOI)

Submit the pre-application 

through

applications.chips.gov
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Additional Resources

• Visit CHIPS.gov for additional resources

• Join our mailing list

• Contact us

• askchips@chips.gov – general inquiries

• apply@chips.gov – application-related 

inquiries
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Question and Answers
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National Institute of Standards and Technology | U.S. Department of Commerce 34

How should applicants prepare for environmental review under 

National Environmental Policy Act (NEPA)?

Will the CHIPS Program Office support applicants in the 

environmental review process?

Frequently Asked Questions

The first step for potential applicants is to submit an environmental questionnaire as part 

of a pre- or full application. The environmental questionnaire will assist the CHIPS 

Program Office’s Environmental Division in assessing the likely level of NEPA review that 

will be required for the proposed project and allows the team to work with the applicant to 

ensure that all required environmental information is available as early as possible, which 

can help expedite the NEPA review process for potentially successful applications.

The CHIPS Program Office’s Environmental Division will work with applicants and their 

third-party contractors in an iterative process to help ensure smooth and expeditious 

completion of the NEPA review process.
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National Institute of Standards and Technology | U.S. Department of Commerce 35

What are the factors applicants should consider in choosing a 

contractor? 

Do all the questions in the EQ have to be answered before 

submission? 

Frequently Asked Questions

• The consultant’s track record of success in completing EAs and EISs for federal agencies.

• The consultant’s previous work on projects related to construction, expansion, and/or 

modification of large manufacturing facilities.

• The consultant’s work on projects related to operation of semiconductor manufacturing.

• The consultant’s technical and scientific experience with environmental issues.

No, applicants are asked to respond to each question according to the information that is 

available at the time the Environmental Questionnaire is being completed. The more 

comprehensive the answers, the less time is spent later; however, CPO does not ask 

you to delay responding to the EQ if information is not readily available.
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National Institute of Standards and Technology | U.S. Department of Commerce 36

What is the relationship of the Environmental Questionnaire (EQ) to 

NEPA review documents such as the Environmental Assessment 

(EA)?

The EQ has 26 questions related to 26 environmental 

categories. Does an EA or EIS address additional categories of 

information?

Frequently Asked Questions

The EQ is the tool the CHIPS Environmental Division will use to determine the 

appropriate level of environmental review under NEPA needed for the proposed 

project. In assessing the appropriate level of NEPA review, CPO will look to 40 CFR 

1501.3(a).

The 26 questions in the EQ are a roadmap for understanding typical areas of 

environmental impact associated with construction projects. An EA or EIS may include 

additional information, such as more detailed information about site-specific impacts, a 

description of the purpose and need for the proposed project, and a discussion of a 

reasonable range of alternatives that can accomplish the purpose and need of the 

proposed action.
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Thank you