AN ASSESSMENT OF THE 

NATIONAL INSTITUTE OF STANDARDS 

AND TECHNOLOGY 

CENTER FOR NANOSCALE SCIENCE AND 

TECHNOLOGY 

FISCAL YEAR 2011 

Panel on Nanoscale Science and Technology 

Laboratory Assessments Board 

Division on Engineering and Physical Sciences 

THE NATIONAL ACADEMIES PRESS 

Washington, D.C. 

www.nap.edu
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This study was supported by Contract No. SB134106Z0011, TO #10, between the National 

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provided support for the project. 

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www.national-academies.org 
iv 

PANEL ON NANOSCALE SCIENCE AND TECHNOLOGY 

JULIA M. PHILLIPS, Sandia National Laboratories, Co-Chair

HAROLD G. CRAIGHEAD, Cornell University, Co-Chair 

ILESANMI ADESIDA, University of Illinois, Urbana-Champaign 

STEPHEN Y. CHOU, Princeton University 

ROBERT E. FONTANA, JR., International Business Machines Corporation 

DANIEL J.C. HERR, Semiconductor Research Corporation 

KANTI JAIN, University of Illinois, Urbana-Champaign 

MAX G. LAGALLY, University of Wisconsin-Madison 

AMANDA PETFORD-LONG, Argonne National Laboratory 

HENRY I. SMITH, Massachusetts Institute of Technology 

JOHN T. YATES, JR., University of Virginia 

Staff 

JAMES P. McGEE, Director 

CY BUTNER, Senior Program Officer 

LIZA HAMILTON, Administrative Coordinator 

EVA LABRE, Program Associate 
v 

Acknowledgment of Reviewers 

This report has been reviewed in draft form by individuals chosen for their diverse 

perspectives and technical expertise, in accordance with procedures approved by the National 

Research Council’s Report Review Committee. The purpose of this independent review is to 

provide candid and critical comments that will assist the institution in making its published 

report as sound as possible and to ensure that the report meets institutional standards for 

objectivity, evidence, and responsiveness to the study charge. The review comments and draft 

manuscript remain confidential to protect the integrity of the deliberative process. We wish to 

thank the following individuals for their review of this report: 

Milton Levenson, Bechtel International (retired), 

E. Ward Plummer, Louisiana State University, 

Mark A. Ratner, Northwestern University, and 

Donald M. Tennant, Cornell University. 

Although the reviewers listed above have provided many constructive comments and 

suggestions, they were not asked to endorse the conclusions or recommendations, nor did they 

see the final draft of the report before its release. The review of this report was overseen by 

Alton D. Slay, Warrenton, Virginia. Appointed by the National Research Council, he was 

responsible for making certain that an independent examination of this report was carried out in 

accordance with institutional procedures and that all review comments were carefully 

considered. Responsibility for the final content of this report rests entirely with the authoring 

panel and the institution. 

vii 

Contents 

SUMMARY 1 

1 THE CHARGE TO THE PANEL AND THE ASSESSMENT PROCESS 5 

2 OVERALL ASSESSMENT 7 

 Achievement of Objectives and Fulfillment of Mission, 8 

 Technical Merit of the Center’s Programs, 8 

 Alignment Between Research and Development and the Center’s Services, 10 

3 THE RESEARCH PROGRAM 11 

Electron Physics Group, 11 

Nanofabrication Research Group, 13 

Energy Research Group, 15 

4 THE NANOFAB PROGRAM 18 

 Scope and Mission, 18 

 Staffing, 18 

 Quality of Research and Facilities, 19 

 Alignment with Mission, 19 

 Future Plans, 19 

 Evaluative Comments and Suggestions, 20 

5 OVERALL CONCLUSIONS 22 

1 

Summary 

The mission of the Center for Nanoscale Science and Technology (CNST) in the National 

Institute of Standards and Technology (NIST) is “to operate a national, shared resource for 

nanoscale fabrication and measurement and develop innovative nanoscale measurement and 

fabrication capabilities to support researchers from industry, academia, NIST, and other 

government agencies in advancing nanoscale technology from discovery to production.”1

 The 

CNST has two components with complementary purposes―the research program, composed of 

three groups (Electron Physics, Nanofabrication Research, and Energy Research), and the 

NanoFab facility. Individuals from beyond NIST and elsewhere at NIST can interact with the 

CNST through collaborations with the scientific research staff in the research program and 

through use of the NanoFab to fabricate structures or devices. 

As requested by the Director of NIST, the Panel on Nanoscale Science and Technology, a 

panel of experts appointed by the National Research Council (NRC), performed an assessment 

that employed the following criteria: (1) the degree to which Laboratory programs in 

measurement science, standards, and services achieve their stated objectives and fulfill the 

mission of the CNST; (2) the technical merits and scientific caliber of the current laboratory 

programs relative to comparable programs worldwide; and (3) the alignment between laboratory 

research and development (R&D) efforts and those services and other mission-critical 

deliverables for which that laboratory is responsible. 

The CNST has matured significantly over the past 2 years since the previous NRC 

review,2

 having achieved nearly steady state in terms of staffing and projects. The center’s 

research program consists of leading-edge nanoscale research directed toward exploring 

phenomena that may provide the basis for future nanoscale measurement and characterization 

techniques. This component of the CNST is staffed by scientific research staff with strong 

records of individual research accomplishment. There is an increasingly impressive record of 

publication by scientists at the CNST.3

 This output is supported by a significant cadre of 

postdoctoral appointees and support staff. The CNST should consider enhancing the 

professional development of postdoctoral staff by offering opportunities (possibly through 

partner institutions such as universities) for staff to learn skills needed for non-academic 

careers—for example, in entrepreneurship. 

The NanoFab component of the CNST is a national shared-use facility that aspires to 

provide a state-of-the-art suite of nanoscale measurement and fabrication capabilities. Largely a 

clean-room facility, the NanoFab is attracting users from all sectors of the economy―industry, 

academia, and government―through its impressive capital-equipment capabilities; it appears to 

be operating at near capacity. The NanoFab is providing outstanding service with unparalleled 

capabilities to a broad range of users. 

The CNST is a world leader in some of its areas of emphasis. There are many unique 

capabilities throughout the center, and CNST staff have extensive collaborations with scientists, 

 1

 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010, 

NIST SP 1121, March 2011, p. 4. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed June 29, 

2011. 2

 National Research Council, An Assessment of the National Institute of Standards and Technology Center 

for Nanoscale Science and Technology: Fiscal Year 2009. Washington, D.C.: The National Academies Press, 2009. 3

 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010, 

NIST SP 1121, March 2011, pp. 78-81. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed June 

29, 2011. 
2 

engineers, and companies from the United States and around the world. The staffing is largely 

complete, although many laboratories, especially in the newer groups such as the Energy 

Research Group, are still under development. These newer efforts appear to have assembled 

highly talented teams that have the potential to develop a high-quality effort. These areas are 

likely to continue to grow and develop over the next few years. 

The CNST supports researchers from industry, academia, NIST, and other government 

agencies. The number of users as reported to the panel is impressively high, and the increasing 

use by industry users appears consistent with the NIST/CNST mission. Even greater use should 

be possible with enhanced communication about the CNST capabilities relative to those 

available elsewhere. 

The staff, the projects, and the facilities of many of the programs presented for review by 

the CNST are outstanding and in several instances unique. All of the work reviewed by the 

panel is scientifically very good. Much of it is original, innovative, scientifically outstanding, 

and among the best of its kind. Almost all of the projects are clearly focused on the stated 

mission of NIST as they seek to develop understanding that will lead to standards and precision 

measurement at the nanoscale. A fair amount of the research is directed toward developing 

unique instrumentation. 

The substantial budget of the CNST and the self-sufficient “block funding” nature of its 

allocation without the concomitant expectation of supporting user-defined research in the 

scientific portion of the CNST organization are increasingly unusual in the U.S. scientific 

community. This approach enables the CNST staff to concentrate on their scientific endeavors in 

a way that is all too rare. Staff are able to spend a significant number of years working on 

extremely high risk, high payoff instrument development, which may lead to demonstration and 

exploitation of unique capabilities. There are very few, if any, other institutions in the United 

States where such endeavors are possible, making this capability at the CNST all the more 

valuable. In such an environment, it is manifest that the leadership of the organization has a 

particularly significant responsibility to evaluate projects rigorously and to curtail long-standing 

projects that are not paying off. 

With the addition of important theoretical and chemical expertise, the balance of CNST 

staffing has improved significantly since the panel’s last review in 2009. The theorist in each 

research group has tended to become “glue” uniting the various efforts within the group. 

The reviewed work of the Electron Physics Group, conducted with the use of state-of-theart equipment, is at the level of the best in the field. The group’s laboratory facilities are state of 

the art and in many cases unique. 

The Nanofabrication Research Group is a highly competent assemblage of scientists that 

has taken on the additional mission of advancing the state of the art in nanomanufacturing, an 

area of growing importance. The laboratory facilities available to the group could well be the 

best in the world. The research programs in this group are of high quality and are aligned with 

the group’s mission. Some of the laboratories in this group are still under development. 

The Energy Research Group is now fully staffed, with a good combination of junior and 

more senior staff, although many of the laboratories are still under development. The work of 

this group is the most technologically (rather than scientifically) focused effort of the research 

groups. The laboratories and equipment that are in place are state of the art in all respects. It is 

still too early to judge in detail the quality and mission alignment of the Energy Research 

Group’s research programs. 

The NanoFab facility has progressed significantly and is reaching capacity. The 

equipment and capabilities are probably as modern and complete as those of any similar facility 

in the United States. 
3 

It is important to recognize the tension inherent in supporting both high-quality science 

and measurement activities and user facilities. For the scientific groups there are scientific 

collaborations and interactions with industry and others; they are full scientific collaborations, 

not a matter of CNST scientists supporting a user-defined body of work. For the NanoFab, the 

focus is on user support; the users may be from the scientific part of the CNST, from elsewhere 

at NIST, or from outside NIST. This tension adds richness to the CNST environment, but it 

needs to be monitored and balanced continually. The balance seems appropriate currently, and 

the diversity of effort is well aligned with the CNST vision and is key to the center’s ability to 

meet its mission, both now and in the future. 

There are a number of good examples of close interactions and collaborations between 

the CNST research groups and industry. In some cases, the instrumentation or understanding 

provided through the interaction helped a company develop or improve a product. In other 

cases, CNST staff led the development of instrumentation (through a Cooperative Research and 

Development Agreement, or CRADA) that significantly enhanced equipment sold by a 

company. 

The NanoFab facility and its highly skilled staff represent a major advance in the research 

capabilities of the CNST. A dynamic group of researchers including students, postdoctoral 

researchers, and NIST staff are engaged in research utilizing this modern capability. 

RECOMMENDATIONS 

The CNST should: 

 Further diversify the user base for the NanoFab. The capabilities are so outstanding 

that they would be in greater demand if more potential users knew about them. 

 Given NIST’s mission to increase U.S. competitiveness, continue to increase the 

CNST focus on industry as its key customer. Specific focus should be on the 

industrial segment that requires state-of-the-art nanofabrication capability and access 

to outstanding scientific staff. 

 Actively manage the balance between high-quality science and service. The first can 

lead to the second, but only if time is allowed for the sufficient maturation of the 

research. The current balance is appropriate but needs to be monitored very closely if 

it is to be preserved. 

 Continue the effort to mature the focus and stature of the newer research groups, 

especially the Energy Research Group. This effort would include more strategic 

planning and the identification of research issues of central importance to the energy 

landscape in the United States. 

 Consider enhancing the professional development of postdoctoral staff by offering 

opportunities (possibly through partner institutions such as universities) for staff to 

learn skills needed for non-academic careers—for example, in entrepreneurship. 

For the next review the CNST should: 

 Discuss the strategic plan of the CNST and how it flows down to each group. 

—Explain how the plan is used to determine research directions, resource allocation, 

staff selections, and balance between research and user support. 

—Describe how projects are proposed, vetted and/or selected, evaluated, and retired. 
4 

 Discuss the intellectual property strategy of the CNST and how it aligns with CNST 

priorities. 

 In the metrics, differentiate between users and collaborators. 

 Describe the interactions with industry in more detail. 

—What are the priorities for industry interactions? 

—How are these interactions cultivated? 

—What are the criteria for accepting industry projects? 

 Provide a description of the method of counting users, a complete list of projects with 

associated users, and a breakdown of industry versus non-NIST (non-industry) versus 

NIST process hours. 

 Hone presentation skills. 

—Talks should adhere to the allotted time and allow adequate time for discussion. 

—Both talks and posters should provide context for the work, including a 

demonstration of knowledge of relevant work by others around the world and the 

connection of the work to the NIST and CNST mission. 

—Although many posters in the present review were very good, some of them would 

have benefited from being less cluttered. Posters should be uncluttered and clear, 

so as to be understandable to broad audiences. 
5 

1 

The Charge to the Panel and the Assessment Process 

 At the request of the National Institute of Standards and Technology (NIST), the National 

Research Council (NRC) has, since 1959, annually assembled panels of experts from academia, 

industry, medicine, and other scientific and engineering environments to assess the quality and 

effectiveness of the NIST measurements and standards laboratories, of which there are now six,4

as well as the alignment of the laboratories’ activities with their missions. NIST requested that 

three of its laboratories be assessed in 2011: the Center for Nanoscale Science and Technology 

(CNST), the NIST Center for Neutron Research, and the Information Technology Laboratory. 

Each of these was assessed by a separate panel of experts; the findings of the respective panels 

are summarized in separate reports. This report summarizes the findings of the Panel on 

Nanoscale Science and Technology. 

 For the fiscal year (FY) 2011 assessment, NIST requested that the panel focus on the 

following criteria as part of its assessment: 

1. Assess the degree to which laboratory programs in measurement science, standards, 

and services achieve their stated objectives and fulfill the mission of the operating 

unit (laboratory); 

2. Assess the technical merits and scientific caliber of the current laboratory programs 

relative to comparable programs worldwide; and 

3. Assess the alignment between laboratory research and development (R&D) efforts 

and those services and other mission-critical deliverables for which the laboratory is 

responsible. 

The context of this technical assessment is the mission of NIST, which is to promote U.S. 

innovation and industrial competitiveness by advancing measurement science, standards, and 

technology in ways that enhance economic security and improve the quality of life. The NIST 

laboratories conduct research to anticipate future metrology and standards needs, to enable new 

scientific and technological advances, and to improve and refine existing measurement methods 

and services. 

 In order to accomplish the assessment, the NRC assembled a panel of 11 volunteers 

whose expertise matches that of the work performed by the CNST staff.5 The panel members 

visited the CNST facility at Gaithersburg, Maryland, for 2.5 days (March 7-9, 2011), during 

which time they attended presentations, tours, and interactive sessions with CNST staff; they 

also conducted interactive sessions with CNST managers. The panel met in closed sessions to 

deliberate on its findings and to define the contents of this assessment report. 

 The approach of the panel to the assessment relied on the experience, technical 

knowledge, and expertise of its members, whose backgrounds were carefully matched to the 

technical areas of CNST activities. The panel reviewed selected examples of the technological 

 4

 The six NIST laboratories are the Material Measurement Laboratory, the Physical Measurement 

Laboratory, the Engineering Laboratory, the Information Technology Laboratory, the Center for Nanoscale Science 

and Technology, and the NIST Center for Neutron Research. 5

 See http://www.nist.gov/cnst/ for more information on CNST programs. Accessed April 7, 2011. 
6 

research covered by the CNST; because of time constraints, it was not possible to review the 

CNST programs and projects exhaustively. The examples reviewed by the panel were selected 

by the CNST in consultation with the panel chair and NRC staff. The panel’s goal was to 

identify and report salient examples of accomplishments and opportunities for further 

improvement with respect to the following: the degree to which the CNST programs achieve 

their stated objectives and fulfill the CNST mission, the technical merit and scientific caliber of 

the CNST work, and the alignment between CNST R&D efforts and CNST services and other 

mission-critical deliverables. These examples are intended collectively to portray an overall 

impression of the laboratory, while preserving useful suggestions specific to projects and 

programs that the panel examined. The panel applied a largely qualitative rather than a 

quantitative approach to the assessment, although it is possible that future assessments will be 

informed by further consideration of various analytical methods that can be applied. 

 For its assessment, the panel relied primarily on presentations made by NIST and CNST 

managers and staff and by other researchers associated with NIST projects and programs, and on 

informational notes prepared by NIST and CNST staff for use by the panel. Posters by various 

researchers involved with CNST activities were also presented to the panel during its visit to the 

CNST. This report does not contain extensive citations of technical articles and reports. Other 

documents and resources used by the panel are cited in the report, as appropriate. 

The comments in this report are not intended to address each program within the CNST 

exhaustively. Instead, this report identifies key issues. Given the necessarily non-exhaustive 

nature of the review process, the omission of any particular CNST program or project should not 

be interpreted as a negative reflection on the omitted program or project. 

The preceding Summary highlights issues that apply broadly to several or all of the 

groups or to the center as a whole and presents the panel’s key recommendations for the CNST. 

Chapter 2 presents a more detailed overall assessment of the center against the three criteria 

established by the NIST Director. Chapters 3 and 4 present observations and suggestions specific 

to the groups in the CNST research program and to the NanoFab program, respectively. Chapter 

5 presents the panel’s overall conclusions. 
7 

2 

Overall Assessment 

The Center for Nanoscale Science and Technology in the National Institute of Standards 

and Technology was founded on May 1, 2007. The CNST mission is “to operate a national, 

shared resource for nanoscale fabrication and measurement and develop innovative nanoscale 

measurement and fabrication capabilities to support researchers from industry, academia, NIST, 

and other government agencies in advancing nanoscale technology from discovery to 

production.”6 The CNST has two components with complementary purposes―the research 

program and the NanoFab facility. The research program is organized in three groups―Electron 

Physics, Nanofabrication Research, and Energy Research; the NanoFab Operations Group is 

responsible for the operation of the NanoFab. Individuals from beyond NIST and elsewhere at 

NIST can interact with the CNST through collaborations with the scientific research staff in the 

research program and through use of the NanoFab to fabricate structures or devices. 

The center has matured significantly in the 2 years since the previous review,7

 having 

achieved nearly steady state in terms of staffing and projects. The research program consists of 

leading-edge nanoscale research directed toward exploring phenomena that may provide the 

basis for future nanoscale measurement and characterization techniques. This component of the 

CNST is staffed by scientific research staff with strong records of individual research 

accomplishment. There is an increasingly impressive record of publication by scientists at the 

CNST.8

 This output is supported by a significant cadre of postdoctoral appointees and support 

staff. The CNST should consider enhancing the professional development of postdoctoral staff 

by offering opportunities (possibly through partner institutions such as universities) for staff to 

learn skills needed for non-academic careers—for example, in entrepreneurship. 

The NanoFab component of the CNST is a national shared-use facility that aspires to 

provide a state-of-the-art suite of nanoscale measurement and fabrication capabilities. It is 

largely a clean-room facility and is staffed accordingly. The NanoFab is attracting users from all 

sectors of the economy―industry, academia, and government―through its impressive capitalequipment capabilities; it appears to be operating at near capacity. 

As described to the panel, the CNST, with an FY 2010 budget of $23 million, is currently 

staffed by 97 full-time-equivalent (FTE) employees, including 60 technical staff. There are 

currently 19 staff members with the title of “project leader,” 9 of whom are new to the CNST 

since the previous review. Each project leader is allocated 2 postdoctoral researchers and onesixth each of an electrical engineer, a mechanical designer/instrument specialist, a computer 

specialist, and an administrative assistant. There are 11 administrative support positions, 8 

technical support positions, and 12 NanoFab staff positions. 

 6

 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010, 

NIST SP 1121, March 2011, p. 4. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed June 29, 

2011. 7

 National Research Council, An Assessment of the National Institute of Standards and Technology Center 

for Nanoscale Science and Technology: Fiscal Year 2009. Washington, D.C.: The National Academies Press, 2009. 8

 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010,

NIST SP 1121, March 2011, pp. 78-81. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed 

June 29, 2011. 
8 

ACHIEVEMENT OF OBJECTIVES AND FULFILLMENT OF MISSION 

The vision of the CNST is “to be recognized for providing ready access to unexcelled 

nanoscale measurement and fabrication facilities and as a world leader in each of our 

measurement science research areas.”9

 The CNST has, overall, made dramatic strides toward 

achieving this vision since the previous review, as exemplified by specific details provided in 

Chapters 3 and 4. 

The NanoFab has progressed impressively and is providing outstanding service with 

unparalleled capabilities to a broad range of users. Anecdotal inputs from users indicate that 

users are highly satisfied with their experience. 

The CNST is a world leader in some of its areas of emphasis, as discussed in the more 

detailed reviews of the four groups in Chapters 3 and 4. The focus areas that are well 

established, especially those whose genesis predates the formation of the CNST, are among the 

best in the world. There are many unique capabilities throughout the CNST, and CNST staff 

have extensive collaborations with scientists, engineers, and companies from the United States 

and around the world. Although the center’s staffing is largely complete, many laboratories, 

especially in the newer groups such as the Energy Research Group, are still under development. 

These newer efforts appear to have assembled highly talented teams that have the potential to 

develop a high-quality effort. These areas are likely to continue to grow and develop over the 

next few years. 

The CNST supports researchers from industry, academia, NIST, and other government 

agencies. As reported to the panel, the number of users is impressively high. Although the 

center’s method of counting users is different from that used by other laboratories, the approach 

seems to take into consideration measurement against outcomes that are important to the key 

stakeholders (for example, NIST leadership and the Department of Commerce). There has been 

growth in the user base in all sectors since the previous review; industrial users accounted for the 

largest percentage growth, consistent with the NIST/CNST mission. Given NIST’s mission to 

increase U.S. competitiveness, the CNST should continue to increase its focus on industry as its 

key customer. Specific focus should be on the industrial segment that requires state-of-the-art 

nanofabrication capability and access to outstanding scientific staff. The users represent a broad 

geographic distribution. Even greater demand from across the country should be possible with 

enhanced communication about the CNST capabilities relative to those available elsewhere. 

TECHNICAL MERIT OF THE CENTER’S PROGRAMS 

For many of the programs presented by the CNST to the panel for review, the staff, the 

projects, and the facilities are outstanding and in several instances unique. The various parts of 

the CNST are not uniformly mature, although the gap between mature programs and the newer 

ones has closed significantly since the previous review. 

All of the work reviewed by the panel is scientifically very good. Much of it is original, 

innovative, scientifically outstanding, and among the best of its kind. The breadth of scientific 

knowledge and the overall level of enthusiasm of the staff throughout the CNST are impressive. 

Almost all of the projects are clearly focused on the stated mission of NIST as they seek to 

develop understanding that will lead to standards and precision measurement at the nanoscale. A 

fair amount of the research is directed toward developing unique instrumentation. 

 9

 Robert J. Celotta, CNST, “Overview of the Center for Nanoscale Science and Technology,” presentation 

to the panel, Gaithersburg, Maryland, March 7, 2011. 
9 

The substantial budget of the CNST and the “block funding” nature of its allocation are 

increasingly unusual in the U.S. scientific community. This approach enables the CNST staff to 

concentrate on their scientific endeavors in a way that is all too rare. Staff are able to spend a 

significant number of years working on extremely high risk, high payoff instrument 

development, which may ultimately lead to the demonstration and exploitation of unique 

capabilities. There are very few, if any, other institutions in the United States where such 

endeavors are possible, making this capability at the CNST all the more valuable. The staff 

expressed recognition of its enviable position and great appreciation of the NIST and CNST 

leadership for their roles in making this funding model possible. In such an environment, it is 

manifest that the leadership of the organization has particularly significant responsibility to 

evaluate projects rigorously and to curtail long-standing projects that are not paying off. 

With the addition of important theoretical and chemical expertise, the balance of CNST 

staffing has improved significantly since the previous review. Since that review, the theorist in 

each research group has tended to become “glue” uniting the various efforts within the group, 

and each group has made significant progress: 

 The technical merit of the reviewed work of the Electron Physics Group relative to 

the state of the art is at the level of the best in the field. The group’s laboratory 

facilities are state of the art and in many cases unique. The outstanding 

accomplishments of the group and the external recognition of group members 

indicate the achievement of the group’s stated objectives and impact.10

 The Nanofabrication Research Group is a highly competent assemblage of scientists 

that has taken on the additional mission of advancing the state of the art in 

nanomanufacturing, an area of growing importance. The laboratory facilities 

available to the group could well be the best in the world. The group’s research 

programs are of high quality and are aligned with its mission. Some of the 

laboratories in this group are still under development. 

 The Energy Research Group is now fully staffed, with a good combination of junior 

and more senior staff, although many of the laboratories are still under development. 

The work of this group is the most technologically (rather than scientifically) focused 

of the research groups. The addition of a theorist provides needed intellectual 

coherence within the group. The laboratories and equipment that are in place are 

state of the art in all respects. It is still too early to judge in detail the quality and 

mission alignment of the research programs. 

 The NanoFab facility has progressed significantly and is reaching capacity. The 

equipment and capabilities are probably as modern and complete as those in any 

similar facility in the United States. The facility is well managed and has 

dramatically increased its capabilities and support of users since the previous review. 

The productivity of staff while affiliated with the CNST has grown nicely since the 

previous review. The number of publications with CNST affiliation was 24 for FY 2008, rising 

to 33 for FY 2009, 41 in FY 2010, and 19 as of March FY 2011. An additional 18 publications 

 10 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010, 

NIST SP 1121, March 2011, pp. 76-77. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed 

June 29, 2011. 
10 

are currently in press, with 26 more submitted for publication. CNST staff and leadership have 

also garnered an impressive array of external professional awards since the previous review.11

ALIGNMENT BETWEEN RESEARCH AND DEVELOPMENT 

AND THE CENTER’S SERVICES 

The work carried out at the CNST covers a wide range, varying from nanofabrication and 

other services, through relatively near term collaborations with industry, to extremely 

fundamental science that may lead to future measurement capabilities. It is important to 

recognize the tension inherent in supporting both high-quality science and measurement 

capabilities and user facilities. This tension adds richness to the CNST environment, but it needs 

to be monitored and balanced continually. The diversity of effort is well aligned with the CNST 

vision and is key to the center’s ability to meet its mission, both now and in the future. 

A number of good examples of close interactions and collaborations between industry 

and the research groups were discussed during the review. In some cases, the instrumentation or 

understanding provided through the interaction helped a company develop or improve a product. 

In other cases, CNST staff led the development of instrumentation (in a Cooperative Research 

and Development Agreement, or CRADA) that significantly enhanced equipment sold by a 

company. These interactions appear to be rather common throughout the CNST, but a 

quantification of the number and scale of such collaborations was not provided to the panel. 

The NanoFab facility and its highly skilled staff can be credited with a major advance in 

the research capabilities of the CNST. A dynamic group of researchers including students, 

postdoctoral researchers, and NIST staff are engaged in research utilizing this modern capability. 

A very high percentage of presentations (both oral and poster) during the review indicated that 

the research described in the presentations depended in some way on the NanoFab. 

 11 National Institute of Standards and Technology, Center for Nanoscale Science and Technology 2010, 

NIST SP 1121, March 2011, pp. 76-77. See http://www.nist.gov/cnst/upload/cnst_2010_report.pdf. Accessed 

June 29, 2011. 
11 

3 

The Research Program 

The Center for Nanoscale Science and Technology continues to address the challenge of 

actively managing the balance between high-quality science and service. The first can lead to 

the second, but only if time is allowed for the sufficient maturation of the research. The current 

balance is appropriate but needs to be monitored very closely if it is to be preserved. 

ELECTRON PHYSICS GROUP

Scope and Mission 

The Electron Physics Group (EPG) conducts a wide range of cross-disciplinary research 

that focuses on developing innovative measurement capabilities for nanotechnology, with an 

emphasis on applications for future electronics. The EPG is the most established group within 

the CNST, having been a part of NIST since 1954. A number of the project leaders are among 

the founding members of the center. EPG research encompasses scanning-probe microscopy; 

nanomagnetic imaging and dynamics; theory, modeling, and simulation; and laser manipulation 

of atoms. The research conducted by the group is uniformly of a very high standard, and the 

capabilities in terms of the measurement tools and methods that the EPG is developing are 

impressive. 

Staffing 

The EPG consists of 20 scientific staff (5 project leaders, 11 postdoctoral researchers, and 

4 visitors) in addition to 7 support staff (2 in electronics, 2 in instrumentation, and 3 in 

information technology). Although the support staff are attached to the EPG, they provide 

support for all of the CNST research groups. The EPG is well established, with senior staff 

having been in place for some time. The integration of postdoctoral researchers into projects is 

smooth, and there appears to be collaboration and communication across research areas and 

across groups. The input of the support staff is very important to these efforts, given the fact that 

much of the equipment is home-built. Staffing is adequate and is uniform across areas. 

Quality of Research and Facilities 

The scanning-probe microscopy is extremely strong and clearly a world-leading area. The 

instrumentation is unique in its capability, with the newest instrument combining a scanning 

tunneling microscope (STM) with high-energy resolution, cryogenic temperatures (10 mK), and 

high magnetic fields (15 T), and a range of ultrahigh vacuum (UHV) sample-preparation 

chambers. The quality of the research and the degree of collaboration with both internal and 

external researchers are excellent. The work on graphene addresses scientific issues that 

probably could not be addressed anywhere else. The emphasis on understanding changes to 

graphene that occur on its incorporation into device structures is critical. The EPG is very widely 

recognized and is a highlight of the CNST. The extension of scanning-probe microscope (SPM) 
12 

spin-electronics measurements to topological insulators promises to be very fruitful as well. The 

integration of experiments with theory is also noteworthy. 

Three project leaders perform research that addresses nanomagnetism, including the 

following areas: (1) imaging using scanning electron microscopy with polarization analysis 

(SEMPA), (2) techniques to measure and quantify spin-wave modes, (3) the development of 

novel electron beams that carry orbital angular momentum (OAM), (4) the development of 

magnetic resonance force microscopy (MRFM), and (5) theory and modeling. The EPG has a 

strong presence within the nanomagnetics community, and its research, both experimental and 

theoretical, is highly regarded. The project leaders are continuing to develop new measurement 

tools that enhance their existing capabilities—for example, extension of SEMPA to analyze 

ultrathin magnetic multilayers by means of profiling using very-low-energy ion beams. The 

initiation of a program on transmission electron microscopy (TEM) beams with OAM opens up 

possible new applications and is to be encouraged. 

The experimental effort in the area of laser manipulation of atoms is superb. It is leading 

to an entirely new method of producing focused-ion beams through laser trapping of metallic 

atoms using a magneto-optical trap ion source (MOTIS). This method may enable focused-ionbeam (FIB) systems with a broader range of choices of source ion than is available in 

commercial systems. The ability to choose the source ion enables the optimization of the ion for 

the appropriate application: for example, for imaging, etching, pattern definition, beam 

chemistry, or materials analysis. The MOTIS also improves the energy resolution of the FIB 

instrument. The EPG interacts with industrial partners such as the FEI Company, a leading 

manufacturer of commercial FIB systems, through CRADAs and has patented aspects of the 

method.

Alignment with Mission 

Research and development work in the EPG ranges from very fundamental work to 

applications with foreseeable technological or commercial applications. The EPG is involved in 

a wide range of interactions with collaborators from industry, academia, and national 

laboratories. Most of its collaborators are U.S.-based, although it is engaged in some 

international academic collaborations. NIST is a contributing member of the Nanoelectronics 

Research Initiative (NRI) funded by the Semiconductor Research Corporation (SRC). This 

involvement has led to 12 academic collaborations. Collaborators are helping the EPG to develop 

new measurement tools and also are acting as “users” of existing tools. The group’s industrial 

collaborators are somewhat fewer, although a strong interaction exists between the ion-beam 

development project and FEI Company. The new technique developed for measuring spin 

polarization by means of analysis of Doppler-shifted spin waves involves collaboration with 

Hitachi Global Storage Technology. Project leaders in the nanomagnetics area commented to the 

panel that collaborations with the magnetic-storage industry are becoming harder to set up. The 

difficulty is in part a result of the decline of that industry in general. The theory and modeling 

part of the program has strong interactions with academic collaborators and with other members 

of the EPG. These interactions are very appropriate and critical to the success of the EPG. In 

summary, all efforts of the EPG seem highly aligned with the overall mission of NIST in terms 

of measurement and the development of new methods.
13 

Future Plans 

The EPG has historically done very well in progressing from one exciting project to 

another. Well-positioned near-term ideas are apparent in a number of areas. Given the overall 

service mission of the CNST and the expectation of a continually changing base of collaborators, 

it may be difficult to develop plans beyond the short term. It will be helpful nevertheless for the 

research staff to have a plan and to update it continually in order to prioritize the wide range of 

high-impact activities and collaborations with which the group is becoming involved. 

Evaluative Comments and Suggestions 

Overall, the EPG is carrying out research that is cutting edge and of extremely high 

quality. The project leaders and postdoctoral researchers display a high degree of enthusiasm and 

commitment to their research, and there is clearly a positive work ethic. The presentations of the 

group were generally well organized and clear, and the posters were well presented by 

enthusiastic and knowledgeable postdoctoral researchers. Extensive written materials were 

provided to the panel. As noted above, the research being carried out in the group ranges from 

very fundamental to more applied, which is appropriate. A case in point is the research on 

focused ion beams, initially a basic research program that has now evolved into a CRADA and 

may result in a commercial product and a start-up company. 

The CNST takes seriously its role in preparing postdoctoral associates for their next 

position, and in general it does this very well. There may, however, be an opportunity for some 

enhancements that would enable postdoctoral associates to acquire skills that would be needed 

for non-academic careers. For example, training in entrepreneurship would be invaluable for 

postdoctoral associates contemplating starting a company or joining a start-up. If it is not 

possible to provide such training in-house, it may be possible to partner with neighboring 

institutions or to provide release time and resources. It is, of course, imperative to continue to 

make sure that postdoctoral associates, especially those who are more involved in service work 

than in research, have the opportunity to attend meetings and produce publications. 

The leader of the EPG identified the emerging requirement that measurements address 

novel electronics beyond complementary metal oxide semiconductor (CMOS) electronics, and 

provided a detailed list of potential devices for both memory and logic applications. The group 

should consider addressing the measurement needs of a wider range of these systems beyond 

magnetic materials and graphene. For example, technologies based on resistance change (both 

phase-change materials and resistive-switching oxide materials) have been identified as likely 

candidates for future applications, but they are attended by fundamental issues that would benefit 

from exploration by the techniques available in the EPG. 

NANOFABRICATION RESEARCH GROUP 

Scope and Mission 

The Nanofabrication Research Group (NRG) was formed in 2007. Its mission is to 

advance the state of the art in nanofabrication and nanomanufacturing. The research programs 

within the group cover a broad range, with a healthy mix of theory, modeling, and experiment. 

Several research projects that definitely do advance the state of the art of nanofabrication are 

outside the group—for example, the work on electron beams with angular momentum and that 

on focused-ion-beam extraction from optical traps, which are within the Electron Physics Group. 
14 

This statement is not intended as a criticism but rather as an observation that technology 

advancements can come from many quarters, and this should be encouraged. Nanomanufacturing, an area of growing importance, has been added to the mission of the 

Nanofabrication Research Group since the previous review. 

Staffing 

The Nanofabrication Research Group has added new staff members since the previous 

review. It appears now to be appropriately staffed at the level of 8 project leaders, 14 

postdoctoral associates, and 4 visiting fellows. The competence of the researchers was evident 

from their presentations and from their discussions with panel members during the laboratory 

visits. 

Quality of Research and Facilities 

The research programs within the Nanofabrication Research Group are of high quality. 

Group competencies include the following: nanofabrication, nanoscale stochastics, singleparticle tracking, nanophotonics, nanoplasmonics, nanomechanics, nanotribology, in situ 

transmission electron microscopy, and nanosystems control. The laboratory facilities available to 

the group are among the best in the world. It is gratifying to see that such superb facilities are so 

widely available for service, collaboration, and the dissemination of information. 

Alignment with Mission

The alignment of the research programs of the NRG with its mission of advancing the 

state of the art in nanofabrication is not uniformly obvious, although alignment with the overall 

mission of NIST is, in general, good. The research on nano-optics is focused on sensing and 

measurement. Although this effort is fully compatible with the NIST mission of measurement, it 

is only indirectly related to advancing the state of the art of nanofabrication. The research on 

nanomechanics covers both sensing and tribology. The former is fully compatible with the NIST 

mission of measurement; the latter is more basic in nature but with the potential to impact 

nanometrology significantly well into the future. The research on automated dual-beam 

nanomanufacturing addresses a serious problem with FIB systems and is definitely in line with 

the group’s stated mission of advancing nanofabrication. While awaiting the arrival of a new 

TEM, research on environmental transmission electron microscopy (ETEM) is employing 

instruments at the NanoFab, the NIST Materials Measurement Laboratory, and extramural 

organizations. Questions were raised about the validity of measurements made in an ETEM, as 

electron beams are well known to produce damage and could interfere with the phenomena being 

observed. That said, ETEM provides a unique means of monitoring events such as catalysis in 

real time, and the issue of intrinsic disturbance will be sorted out with further research. The in 

situ Raman thermometry extends Raman analysis into the ultraviolet (UV) to evaluate more 

materials and observe subtle phonon effects. 

The work on nanomanufacturing is welcome and is fully compatible with NIST’s mission 

of aiding U.S. industry. Much of the work in this area, especially the work on deconvolving 

substrate-particle interactions and on the high-throughput near-field scanning optical microscope 

(NSOM), is directly related to advancing the state of the art in nanomanufacturing. The 

convergence of these nondestructive methods shows promise for enabling a more fundamental 

understanding and control of buried nanoscopic structures, which is required for many 
15 

nanomanufacturing processes. Focus on this issue will ensure that U.S. industry has ample 

opportunity to exploit innovations in nanoscale science and engineering. The plots of resolution 

versus throughput and complexity versus cost/area identify key problems. It would be beneficial 

if these plots could be further enhanced, clarified, and promulgated. The new emphasis on 

nanomanufacturing in the NRG is well integrated with initiatives at other agencies, including the 

National Science Foundation. 

Future Plans 

The NRG did not discuss future plans. The energy and youth of the staff and the intrinsic 

quality of the research, however, predict future success. Overall, the research, collaboration, and 

service of the Nanofabrication Research Group are exemplary. Now that the group is at full 

staffing, the connection with and synergistic emphasis on nanofabrication technology are likely 

to evolve significantly during the next review cycle. 

Evaluative Comments and Suggestions 

Research in the Nanofabrication Research Group is of high quality and well coupled to 

the NIST and CNST missions. The project leaders, postdoctoral researchers, and visitors are 

competent and enthusiastic. The presentations of the group were well organized and clear, but 

the posters were not. Some of the poster presentations were difficult to understand and lacked 

context or clarity of purpose or method. In the future, the review should have well-prepared 

posters or should eliminate them altogether. 

Given the critical importance of nanofabrication technology, a greater emphasis on 

research directed toward improving the efficacy and flexibility of nanofabrication methods is 

encouraged. This will require going beyond commercially available techniques, including those 

developed for the semiconductor industry. 

The Nanofabrication Research Group has hosted a number of workshops, which should 

be continued as a means of getting the NIST message out to the academic and industrial 

communities. 

ENERGY RESEARCH GROUP 

Scope and Mission 

The scope and mission of the Energy Research Group (ERG) are characterized as 

“developing measurement and fabrication methods relating nano-/atomic scale 

morphology and structure to functional properties in energy-related materials and devices.”12

Staffing 

The ERG is staffed appropriately with senior, junior, postdoctoral, and technical staff. 

There are currently 6 project leaders and 7 postdoctoral researchers. The hiring of a theorist with 

broad capabilities follows the recommendation made by the NRC review panel 2 years ago. The 

theorist’s work provides a needed intellectual coherence within the group. The prospects for 

 12 Nikolai Zhitenev, CNST/ERG, “The Energy Research Group,” presentation to the panel, Gaithersburg, 

Maryland, March 7, 2011. 
16 

achievements resulting from the hiring of a physical electrochemist (consistent with another 

recommendation of the previous panel) with interests and a research style that fit well into the 

physics-oriented effort in the group are promising. The addition of a senior staff member to work 

on thermoelectric materials is a bold move designed to couple to industrial interests in this area. 

The group has also added a very strong senior researcher in nanotechnology and applications in 

energy. At this point, the Energy Research Group is relatively new, still growing, and coalescing 

as a unit. 

Quality of Research and Facilities 

The scope of ERG research is meant for the development of new measurements relating 

nano- and atomic-scale morphology and structure to functional properties addressing three areas: 

energy generation, energy conversion and storage, and energy efficiency. Five project areas are 

active: photovoltaics (PV), solar thermal energy, solar fuels, thermoelectrics, and batteries. 

 The three core areas of measurement expertise are the following: (1) the theory and 

modeling of nanomaterials for renewable energy (calculations of electric, thermal, and ionic 

transport for materials and nanostructures used in energy-relevant applications, such as 

photovoltaics and thermoelectrics); (2) vibrational spectroscopy and microscopy (development 

and application of new spectroscopic methods, including infrared imaging with nanoscale spatial 

resolution, for characterizing nanomaterials with infrared and Raman spectroscopy); and (3) 

nanomaterials for solar fuels and artificial photosynthesis (methods to correlate structure and 

performance of nanocatalysts for solar fuels, and biotemplated approaches to artificial 

photosynthesis and nanofabrication). 

Examples of current research topics include the following: developing an understanding 

of structure/function correlations of photoanodes for water splitting, the in situ characterization 

of lithium-ion batteries, electrochemical measurements using surface plasmons, the fabrication 

and characterization of field emission sources based on arrays of 1D structures for x-ray sources, 

photothermal infrared absorption spectroscopy of condensed materials using atomic force 

microscope (AFM) detection, the development and characterization of nanostructured 

thermoelectronic materials, and nanoscale studies of charge transport in organic photovoltaic 

devices. 

The connection of this work to fundamental problems in physics, chemistry, and 

materials science is less clear than the connection to technological issues. For example, the 

selection of field emission arrays for investigation hardly addresses fundamental issues or 

recognizes the basic contributions to this field made at NIST in previous decades by the Electron 

Physics Group. The study of charge transport at nanoscale in organic photoelectric devices 

hardly recognizes the fundamentals of charge transport along molecules as currently achieved 

theoretically in fields such as molecular electronics and protein conduction. 

 Despite being a relatively new group, the ERG has established projects to address a 

number of issues in the energy area. The quality of the research varies widely throughout the 

group. It was not clear to the panel whether many of the selected areas of energy-related research 

address the most critical problems of measurement in energy science. Certainly the investigation 

of field emission arrays, for example, cannot be connected to a major need in the energy field. 

The group should seriously consider the most important opportunities on the energy landscape in 

problem selection. 

The new laboratories, many of which are still under development, and new equipment are 

first rate in all respects. Most of the new equipment is commercial or modified-commercial. As 

the group continues to mature, it should aspire to the design and fabrication of some 
17 

noncommercial equipment to address the frontier of nanoscale measurements connected to 

energy. 

Alignment with Mission 

The alignment of the Energy Research Group’s research program with the stated scope 

and mission of the ERG is appropriate. 

Future Plans 

The Energy Research Group has some good ideas and views with respect to its future 

research. However, long-range strategic planning for the group was not apparent and needs to be 

discussed more explicitly during the next review. 

Evaluative Comments and Suggestions 

The ERG is still very young. It is too early to judge the quality of the staff with accuracy, 

and it is even somewhat difficult to gauge the alignment of the work with the mission of the 

group and the mission of the CNST, as many laboratories are still under development. Over the 

next 2 years, the group needs to establish greater coherence, accompanied by the development of 

a stronger connection between nanoscale measurements and important problems in energy.

The Energy Research Group is still in the process of growth and stabilization. Following 

are suggestions for the ERG as it moves forward: 

 Over the next 2 years, it should establish greater coherence, accompanied by the 

development of a stronger connection between nanoscale measurements and 

important problems in energy. 

 Although the new laboratories are outstanding, most of the equipment is commercial 

or modified-commercial. As the group continues to mature, it should aspire to the 

design and fabrication of some noncommercial equipment to address the frontier of 

nanoscale measurements connected to energy. 

 Long-range strategic planning for the group was not apparent and needs to be 

discussed more explicitly during the next review. 

The CNST should continue the effort to mature the focus and stature of the newer 

research groups, especially the Energy Research Group. This effort would include more 

strategic planning and the identification of research issues of central importance to the energy 

landscape in the United States. 
18 

4 

The NanoFab Program 

SCOPE AND MISSION 

The functional statement of the NanoFab was described to the panel as being threefold: 

1. Provide access to state-of-the-art, commercial nanoscale measurement and fabrication 

tools and methods, along with associated technical expertise, in a shared-access, 

shared-cost environment, to industry, academia, NIST, and other government 

agencies; 

2. Enable the processing and characterization of a wide range of nanoscale materials, 

structures, and devices critical to the nation’s measurement and technology needs; 

and 

3. Foster internal collaborations in nanotechnology across NIST’s laboratories and 

foster external collaborations with NIST’s partners through its shared environment.13

This NanoFab mission statement is consistent with the CNST mission statement goals of 

operating a national, shared-use facility for nanoscale fabrication and for developing innovative 

nanoscale fabrication capabilities supporting researchers from industry, academia, NIST, and 

other government agencies. Based on the reported increases in both research participation and 

hours of clean-room usage, it appears that the processing activities in the NanoFab have 

increased twofold over the previous 2 years, with participation from both internal NIST users 

and external industry users. However, because no breakdown of the industry versus NIST 

process hours was detailed, the panel was not able to evaluate the degree of industry impact in 

the NanoFab shared-use facility. 

STAFFING 

The facility’s processing activities are supported by a NanoFab manager and 12 

experienced staff members, an increase of 2 staff members over 2009 levels. Process staffing 

consists of 6 process engineers, 3 microscopists, and 3 equipment engineers. There are 3 staff 

members with PhD degrees and 4 staff members with MS degrees. In addition, 3 administration 

personnel support NanoFab user interactions and usage coordination. The large number of staff 

and high level of staff education enhance the productivity of the NanoFab and distinguish it from 

comparable nanofabrication facilities in universities with less-experienced and fewer staff 

members. 

The NanoFab staffing model for meeting the process needs for its fabrication projects 

takes two forms: (1) hands-on processing by the users with initial process training by the staff, or 

(2) processing by the staff only. In both cases, the NanoFab staff provides consultation services 

to define both process development requirements and a process integration flow for the process 

project. 

 13 Vincent Luciani, CNST NanoFab, “The NanoFab,” presentation to the panel, Gaithersburg, Maryland, 

March 7, 2011. 
19 

Because staff members maintain tools and provide process oversight, laboratory process 

capability will become limited by the number of staff in the NanoFab. Six major new tools are 

coming online in 2011: a chemical mechanical polishing tool (CMP), an ion mill, an aligner 

from ASML (a provider of lithography systems for the semiconductor industry), two FIB 

systems, and a TEM. The project count has increased 40 percent per year for the past 2 years. 

The present staffing level will likely be required to increase to sustain future additional tooling or 

future increases in laboratory processing initiatives. 

QUALITY OF RESEARCH AND FACILITIES 

The NanoFab clean-room facility has an impressive array of the most modern 

commercially available tools for micro- and nanofabrication. The physical facility is excellent, 

with a clean room and other laboratory space configured for easy access to a wide suite of 

modern fabrication tools. The equipment capabilities are as modern and complete as in any 

similar facility in the United States with which the panel is familiar. 

Over the past 2 years, several new pieces of equipment have been brought online and 

added to the laboratory capabilities. It appears that most of the tools are characterized and 

available for general use, with the exception of one of the electron-beam systems. Focused-ionbeam and electron-beam lithography represent the core nanoscale fabrication tools, with sets of 

deposition, etching, and metrology tools for use in a modest level of process integration for 

research-scale devices. Although photolithography capability above 1 micrometer is available 

with several contact printing systems, a needed capability for higher-resolution photolithography 

is planned with the upcoming acquisition of an i-line stepper. Projects seem primarily to be 

directed toward a range of inorganic materials, including various semiconductors, metals, 

graphene, and a limited number of organic materials. 

The nanofabrication laboratory facilitates a wide range of projects for NIST researchers 

and, to a lesser extent, activity for academic institutions and industry. Neither a complete 

summary of projects and users nor a list of projects with users was provided for evaluation by the 

panel. The quality of the research examples that were presented as being facilitated by the 

laboratory ranged from highly innovative work to somewhat limited use of less sophisticated 

processes such as thin-film deposition. Limitations in activity and research facilitated by this 

laboratory are not due to equipment limitations, but rather to staff availability and the need to 

prioritize the projects to be supported. 

ALIGNMENT WITH MISSION 

As noted, the process activities of the NanoFab program are aligned with the mission of 

the CNST and NIST. The NanoFab staff is well managed, operates a nanofabrication user 

facility, and supports the research mission of serving NIST, academia, and industry in 

measurement activities. The reported increase in both the number of users and of processing 

hours over the past 2 years in the NanoFab clean room further serves to verify the alignment of 

the NanoFab with both its mission and the CNST mission. 

FUTURE PLANS 

The NanoFab does not appear to have independent research programs, in contrast to the 

three other research groups comprising the CNST. Rather, the NanoFab staff’s understanding of 

its role, and consequently the NanoFab mode of operation, has been to maintain the 
20 

nanofabrication clean-room laboratory as a user and/or service facility. This effort involves 

maintaining the facility in excellent working condition, ensuring the operation of complex 

processing equipment, establishing and maintaining process-control metrics for critical process 

tools, and developing processing integration methods to assist internal (NIST) and external users 

of the facility. It is apparent that the NanoFab staff has worked efficiently over the past 2 years 

with postdoctoral research scientists from NIST and research engineers from industry in 

satisfying the facility’s processing mission as documented by CNST internal reports and CNST 

external publications. 

Future planning goals for the NanoFab program include the installation of three new tools 

critical for lithography, patterning, and planarization improvements in the clean room during 

2011; new tooling justifications in the area of liftoff processing for 2012; improvement in tool 

uptime, especially for the Vistec e-beam writer; and continued outreach activities to attract more 

industry users. Future planning discussed during the review did not address staffing needs, 

which may ultimately limit productivity and new user participation in the NanoFab clean room. 

Future planning also does not appear to include process-development strategies that would be 

necessary for the NanoFab staff to stay at the forefront of nanofabrication technologies. 

EVALUATIVE COMMENTS AND SUGGESTIONS 

The nanofabrication laboratory and its highly skilled staff are responsible for a major 

advance in the research capabilities of the CNST. A dynamic group of researchers including 

students, postdoctoral researchers, and NIST researchers are engaged in research utilizing this 

modern capability. The nanofabrication laboratory and its staff clearly address the core mission 

of operating a shared-use facility, although the facility’s national reach could be broader than it is 

currently. The NanoFab staff and clean room appear to support, first, NIST researchers; 

secondly, local academic institutions; and thirdly, industrial users. Although it is not an issue at 

present, as the laboratory matures and becomes fully functional it will become increasingly 

important to develop methods for prioritizing access to critical staff time and to the most heavily 

used capabilities. 

The following are suggestions for the NanoFab program: 

 In the next review the NanoFab staff should provide to the panel more detailed data 

on the NanoFab projects and the key enabling processing features for these projects in 

order to enable a more complete evaluation of the NanoFab. Relatively few data 

were presented for the current review, and it was difficult for the panel to gain a full 

understanding of the breadth, the impact, and the overall quality of the work 

supported by the nanofabrication laboratory. For example, it was stated in 

presentations that capabilities were available to commercial entities, with no 

connection to NIST/CNST required, but few examples of such interactions were 

provided. 

 In the next review the NanoFab staff should present to the panel a plan for evaluating 

the evolving fabrication needs of the growing nanoscience and nanoengineering 

community, particularly those of the commercial sector. The current approach seems 

to be to emulate the existing capabilities of the National Nanotechnology 

Infrastructure Network and to try to obtain the latest commercially available models 

of the same tools. There is the opportunity, not yet fully realized, to use the 

knowledge, technical capabilities, and resources of NIST to develop entirely new 

nationally available fabrication capabilities. It would be valuable for the CNST to 
21 

develop a strategic plan for this facility to address the nanofabrication-related 

metrology needs and fabrication capabilities of greatest impact on nanomanufacturing 

in key areas of national economic importance. The CNST should also consider 

expanding the NanoFab mission to include process-specific developments in 

nanofabrication and to encourage NanoFab staff members to publish papers related to 

processing topics. 

 The CNST should further diversify the user base for the NanoFab. The capabilities 

are so outstanding that they would be in greater demand if more potential users knew 

about them. 

 Intellectual property (IP) protection of CNST developments was not emphasized in 

the CNST technical presentations overall. The CNST should pursue IP protection 

where appropriate. Specifically, some processing accomplishments in the NanoFab 

facility are of sufficient merit to warrant IP discussions—for example, (1) deep 

reactive-ion etch wall process control and (2) uniformity of reactive-ion etch 

processing with differential pattern loading on a wafer. 
22 

5 

Overall Conclusions 

The Center for Nanoscale Science and Technology continues to make significant 

progress toward meeting its stated objectives of (1) safely and reliably operating a national, 

shared-use facility for nanoscale fabrication and measurement; (2) developing innovative 

nanoscale measurement and fabrication capabilities; (3) supporting researchers from industry, 

academia, NIST, and other government agencies in nanoscale technology from discovery to 

production; (4) disseminating new nanoscale measurement methods by incorporating them into 

facility operations, collaborating and partnering with others, and providing international 

leadership in nanotechnology; and (5) serving as a hub linking the international nanotechnology 

community to the comprehensive measurement expertise within the NIST laboratories and 

centers. 

There has been significant maturation and development of the CNST since the previous 

review in 2009. The capabilities that were judged to be mature in 2009 continue to be 

outstanding, especially in terms of the quality and productivity of the staff, the uniqueness of the 

capabilities, and the alignment with the CNST and NIST mission. Capabilities that were judged 

to be significantly less mature in 2009 have made significant progress. All of the CNST 

facilities are among the best in the world, and in many cases they are unique. Staff are of high 

quality, and their productivity within the CNST is growing impressively. The center is now 

more or less fully staffed. The NanoFab facility is now an impressive and smoothly running 

facility that is attracting a wide range of users. Given its state-of-the-art capabilities, it has the 

potential to draw an even larger user base from across the country. The Nanofabrication 

Research Group has made significant strides, with research of uniformly high quality. 

Alignment of the group’s research with its mission continues to evolve. The Energy Research 

Group is the least mature of the units within the CNST. The group is now staffed with highquality personnel, although many of the laboratories are still under development. It is expected 

that this group will continue to coalesce as a unit and increase its focus on the most important 

problems within its mission space in the coming review period. 

The CNST will further maximize its impact on U.S. and global nanoscience and 

nanotechnology by (1) further diversifying the user base for the NanoFab; (2) continuing to 

increase the CNST focus on industry as its key customer; (3) continuing to manage actively the 

balance between high-quality science and measurement; (4) continuing to mature the focus and 

stature of the newer research groups, especially the Energy Research Group; (5) considering the 

further enhancement of the already-strong professional development of postdoctoral staff by 

offering opportunities (possibly through partner institutions such as universities) for the staff to 

learn skills needed for non-academic careers—for example, in entrepreneurship. 

The Center for Nanoscale Science and Technology is maturing impressively as a state-ofthe-art nanoscience and nanotechnology center of excellence aligned with the overall mission of 

NIST. The program is already impressive in its national and international reach. Given the 

quality of the facilities and staff in addition to the youth of the organization, the impact of the 

CNST is expected to continue to grow.