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                                                                    EXHIBIT 10.2


                                       OEM
                            GLOBAL PURCHASE AGREEMENT
                             Agreement Number: 20016


This Global Purchase Agreement ("GPA" or "Agreement") is entered into by
ADVANCED ENERGY INDUSTRIES, INC. (referred to as "Supplier", "you" or "your")
and LAM RESEARCH CORPORATION and any of its wholly-owned subsidiaries (referred
to as "Lam") as of the following date: October 12, 1999 ("Effective Date"). Each
of the words "parties", "us", "we" or "our" collectively refers to both Supplier
and Lam.

1.   RECITALS:

     1.1. Purpose: This GPA documents our agreement for our customer-supplier
          relationship. It includes standard terms for Lam's purchase of goods
          and services. Although these purchase terms will cover most
          situations, attachments to this GPA may be included to address
          specific circumstances.

     1.2. Prior Review: Prior to signing this GPA, Lam requests that you review
          it with your point of contact at Lam, and Lam assumes that you have
          reviewed it and that you understand it thoroughly so that your and our
          performance requirements will be met.

In consideration of the mutual obligations and benefits set forth in this GPA,
the parties agree as follows:

2.   GENERAL MATTERS:

     2.1. Scope: This GPA applies to any purchase of your Products or Services
          by Lam ("Order") during the term of this GPA, whether or not this GPA
          is referenced in the documentation of such Order. For Orders issued
          but not fulfilled prior to expiration of this GPA, the terms of this
          GPA shall continue to apply.

     2.2. Term: The term of this GPA is three (3) years from the Effective Date.
          This agreement may be extended for additional one (1) year terms at
          the GPA's anniversary, if both parties agree in writing within 60 days
          of the termination date.

     2.3. Definitions: Words in this GPA, which are defined either when they
          first appear or in the "Definitions" section at the end of this GPA,
          shall be interpreted throughout the GPA consistent with those
          definitions.

3.   YOUR OBLIGATIONS AND RIGHTS:

     3.1. Product and Process Quality: Lam has chosen to do business with you
          based upon your reputation, quality of Products, ability to perform or
          other business reasons which support Lam's expectation of your
          reliability in Product and process quality. As part of your continuing
          commitment to quality, you agree to the performance requirements
          described in this GPA.

     3.2. Specifications and Quality Protocols: Lam shall provide you with
          technical specifications and/or drawings for each Product
          ("Specifications"), as well as quality control criteria pertaining to
          your Products and processes ("Quality Requirements"). You must comply
          with the Specifications and Quality Requirements at all times. If
          mutually agreed, you may be required to verify compliance through
          testing, inspection and/or issuance of a certificate of compliance.


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     3.3. Technical Support Documents: Supplier shall furnish one complete set
          of the required documents listed in Schedule 1 of this Agreement
          applicable to your products sold to Lam. These documents shall be
          provided at no cost to Lam. Delivery of these documents is a critical
          performance objective.  Reference Section 25.16.

     3.4. Critical Components: You agree to abide by for all Critical Components
          listed in the "Critical Components List" of Attachment E. If no
          Critical Components are listed, then Attachment E does not apply to
          you.

     3.5. Continued Service and Parts Supply: Subject to your rights to
          discontinue availability of Products under the "Cancellation" section
          of this GPA (see paragraph 21.1), you grant Lam the option to continue
          to purchase service and support, and replacement parts from you in
          support of Products for a period of seven (7) years after Lam's last
          purchase of such Product.

     3.6. Production Lines; Change Control Requirements: Lam reserves the right
          periodically to review and inspect your facilities, manufacturing
          processes, materials and subcontractors; and you shall give Lam 90
          days prior written notice of any reasonably significant changes made
          or anticipated in such items. If you fail to obtain Lam's prior
          approval for significant changes and continue to ship Product or
          perform Services, Lam may, at its option and in addition to all other
          remedies do one of the following: 1) return such Product or suspend
          such Services without further liability to Lam; 2) accept such Product
          or Services but with a deduction in the price Lam must pay you, if
          any, as mutually agreed; or 3) inspect and approve such changes with
          appropriate notice, or 4) terminate this Agreement.

     3.7. Engineering Change Notification (ECN): Supplier must provide prompt
          notice to Lam of Significant Changes to processes and/or design of
          Product. This notification shall be sent either by Supplier's e-mail,
          service bulletin, facsimile, or mail. The ECN will provide complete
          written details along with drawings so that Lam will have complete
          understanding of proposed change(s). Upon receipt of the proposed ECN,
          Lam will have ten (10) working days to review and respond either
          approving or disapproving the proposed change(s). If no response is
          received within ten (10) working days, Supplier will notify Lam of the
          consequences and Supplier's planned actions. Supplier agrees not to
          ship to Lam any proposed changes without obtaining Lam's written
          approval in advance. Supplier understands and agrees that an oral
          change authorization from any Lam employee is not sufficient and Lam
          has no liability for changed Product, absent Lam's written approval
          for the changes. If you fail to obtain Lam's prior approval for
          Significant Changes and continue to ship Product or perform Services,
          Lam may, at its option and in addition to all other remedies do one of
          the following: 1) return such Product or suspend such Services without
          further liability to Lam; 2) accept such Product or Services but with
          a deduction in the price Lam must pay you, if any, as mutually
          agreed;or 3) inspect and approve such changes with appropriate notice,
          or 4) terminate this Agreement.

     3.8. Provision of Services: You agree to provide those Services set forth
          in the Order and in the Description of Services and/or Support
          attached as Attachment A (and Attachment B if applicable), which is
          incorporated here by reference. Your Services shall be performed by
          qualified, certified and adequately supervised personnel. As mutually
          agreed, you may be required to verify compliance of the Services
          through testing, inspection and/or issuance of a certificate of
          compliance. If no Services are set forth in Attachment A and B, then
          Attachment A and/or B do not apply to you.


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4.   DELIVERY:

     4.1. Force Majeure: Neither party shall be liable for any costs, losses,
          damages, claims or liabilities ("Damages") due to non-performance
          caused by events totally beyond its control ("Force Majeure");
          provided that the non-performing party provides prompt written notice
          to the other party of anticipated or existing Force Majeure events and
          uses all reasonable diligence to perform during and after the Force
          Majeure event.

     4.2. Delivery: Delivery of Products shall be (i) on the delivery date
          specified in the Order, (ii) FOB your dock, (iii) in accordance with
          Lam's packaging specifications, and (iv) via carrier specified in the
          Order (or, if no carrier is specified, then a common carrier from
          Lam's Authorized Traffic Guide). You shall notify Lam immediately of
          any anticipated late deliveries or facility shutdowns. If necessary to
          ensure timely delivery, you shall deliver via expedited transit at
          your cost, except that Lam will pay such cost if necessitated solely
          by either Lam's delay or Lam's request.

     4.3. Accompanying Materials: One complete set of documentation and/or
          operating and maintenance manuals for each Product supplied to Lam
          will be furnished at no cost to Lam. Supplier will not be required to
          ship a manual with each unit delivered to Lam. Supplier shall provide
          updated documents when made available by the Supplier at no cost to
          Lam.

     4.4. Non-conforming Deliveries: Any Products not in conformance with the
          Order on the date of delivery may be rejected and returned at your
          expense. Any Services not in conformance with the Order or Attachment
          A or Attachment B on the date of performance may be rejected and
          suspended. Lam shall notify you of the grounds for rejection. Lam may
          (i) permit you to cure the non-conformance, (ii) cancel such
          non-conforming Products or Services without cost or liability to Lam,
          (iii) or accept them with a reasonable reduction in the purchase price
          owed by Lam, as mutually agreed.

5.   DELIVERY AND QUALITY GOALS:

     5.1. Delivery and Quality Goals: Complying with scheduled delivery dates,
          Specifications and Quality Requirements is a critical performance
          objective. All Products shipped by you must meet Lam's goals for
          consistency in Specifications, Quality Requirements and scheduled
          delivery dates ("Goals"). Lam may review and adjust these Goals
          periodically based upon Lam's business needs.Reference Section 25.16.

6.   QUALITY; ACCEPTANCE; RELIABILITY:

     6.1. Criteria: All Products supplied shall comply with Product
          Specifications and Quality Requirements. Supplier shall demonstrate
          such compliance and Lam's personnel may witness any related test.
          Supplier shall make available appropriate technical support. Lam shall
          have the right to make any inspection or appropriately test that Lam
          shall deem advisable before and after shipment of Product to insure
          that the Product meets mutually agreed upon specifications. Payment of
          Supplier's invoices shall not constitute acceptance, approval or
          certification by Lam, and shall not relieve Supplier of any warranty
          or other obligation set forth herein or under the Law.

     6.2. Non-conforming Product: With respect to any new Product delivery which
          Lam determines is non-conforming to mutually agreed specifications,
          Lam may, at its option: (i) within 30 days of receipt of non-consigned
          Product or within 30 days of removal of Product from the consignment
          inventory, reject and return the Product, provided that Lam shows
          future usage, to Supplier (in which case Supplier shall bear the risk
          of loss or damage during transit from Lam's manufacturing facility to
          Supplier's local service facility). After 30 days only options (ii)
          and (iii) will apply; (ii) make the Product available for correction
          at Lam's facility.


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          Supplier shall promptly correct any defect at its expense, either by
          repairing or replacing any defective part(s) or by replacing the
          Product within ten (10) working days after your receipt of the
          rejected Products; or (iii) accept or keep the Product with a
          deduction in the price of the Product, as reasonably determined by the
          parties. Any Products or portions thereof replaced by you shall become
          your property. Lam agrees to pay Supplier for all charges associated
          with the return and testing of Products which pass all Supplier's
          tests without any corrective action and are determined to meet the
          mutually agreed specifications (at time of original shipment). See
          Attachment D for schedule of agreed upon charges.

     6.3. Reliability: Product reliability in the field will also meet all
          reliability portions of Product Specifications. In addition, certain
          specifications may require that Lam and/or its customer will have
          access to spares locally. All reliability performance specifications
          (e.g. uptime or availability, MTBFp, MTBAp) will be defined and
          mutually agreed upon by the parties; a resulting Reliability
          Performance Specifications will be mutually signed and attached hereto
          as Schedule 2 of the GPA. In those specific cases where Products are
          shown to provide less than the agreed reliability performance
          specifications over a period of time, Lam and Supplier will work
          together to define mutually acceptable corrective actions to remedy
          the situation.

     6.4. Reliability Road Map: If a product listed in Schedule 2 of this
          Agreement does not meet the required reliability specification,
          Supplier shall provide to Lam Commodity Manager a road map identifying
          steps Supplier will take, including milestones, to ensure that the
          product meets the required reliability specification.

7.   INSPECTION AND TESTING:

     7.1. Procedures: Supplier shall maintain calibrated, capable inspection and
          test equipment, and associated inspection procedures. Supplier must
          not proceed with production until all appropriate means for inspecting
          and testing per mutually agreed upon Specifications and Quality
          Requirements are met. Lam may reject any material produced without
          proper verification of compliance to mutually agreed upon
          Specifications and Quality Requirements.

     7.2. Inspection Records: Supplier shall, on request by Supplier Quality
          Engineering, provide evidence showing that Supplier's inspection and
          testing methods are consistent with Lam's quality guidelines on
          correlation between Lam and Supplier inspection and test results.

8.   ACCEPTANCE SAMPLING AND SCREENING:


     8.1. Change in Quality Requirements: Lam reserves the right to alter its
          quality requirements for acceptance and to change accordingly the
          acceptable quality levels. In conjunction with this, Lam agrees to
          provide Supplier with written advance notification of changes to the
          stated requirements.

9.   SOURCE INSPECTION:

     9.1. Source Inspection Requirements: Supplier must support Lam Source
          Inspection as designated by Lam, and per the "Lam Source Inspection
          Procedure for Suppliers". Supplier must provide ample space, access to
          inspection equipment, and availability of inspection personnel as
          needed for Lam Source Inspection. The Lam Inspector will not proceed
          with inspection unless Supplier has demonstrated that all requirements
          have been met.


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     9.2. Certificate of Conformance: You will provide a Certificate Of
          Conformance (COC) with each Product, including repaired Products,
          certifying that the original or repaired Product meets or exceeds the
          mutually agreed upon Specification and Quality Requirements.

10.  FAILURE REPORTING:

     10.1. Failure Reporting: Whenever requested by Lam, and with respect to
          specific identified failed Products, you will provide to Lam's
          Commodity Management a worldwide Failure Analysis identifying the
          following:

          10.1.1.   Percentage of No-Trouble-Found ("NTF") of the failed Product
                    over the past six months

          10.1.2.   Total number of assemblies of the failed Product repaired in
                    the past six months

          10.1.3.   Component or assemblies you replaced in the failed Product
                    that fixed the cause of the failure

          10.1.4.   Pareto of defective components used to repair the failed
                    Product over the past six months

          10.1.5.   Engineering changes that have been released that would have
                    affected the failure

          10.1.6.   Revision level of the Product assembly when received by
                    Supplier

          10.1.7.   Latest revision level of the repairs to the failed Product

          10.1.8.   Date received by the Supplier

          10.1.9.   Date original Product was shipped to Lam

     10.2. Root Cause/Failure Analysis Report: You will provide upon request a
          Root Cause Analysis report on failed Product. The Root Cause Analysis
          report will be sent to Lam's Commodity Manager containing the
          following information:

          10.2.1.   Testing before any repair activity and document failure
                    symptoms

          10.2.2.   Percentage of No-Trouble-Found (NTF) of the failed Product
                    over the past six months

          10.2.3.   Total number of assemblies of the failed Product repaired in
                    the past six months

          10.2.4.   Component or assemblies replaced that fixed the problem

          10.2.5.   Pareto of defective components used to repair the failed
                    Product over the past six months

          10.2.6.   A detailed analysis of the cause of the failure to the
                    component level including photographs

          10.2.7.   Engineering changes that have been released that would
                    affect this failure

          10.2.8.   Revision level of the assembly when received by Supplier

          10.2.9.   Latest revision level of the repairs to the failed Product

          10.2.10.  Date received by the Supplier

     10.3. Corrective Action Report: Supplier shall provide upon specific
          request a Corrective Action Report detailing the required steps to
          prevent future recurrence of the same failure. This request must be
          received prior to receipt of the defective unit from Lam. This report
          is due within ten working days after issuance of the final Root
          Cause/Failure Analysis report. Lam reserves the right to approve the
          permanent corrective action steps prior to implementation.

     10.4. Delivery of Reports: Supplier shall provide upon specific request a
          preliminary Root Cause/Failure Analysis within fifteen days after Lam
          has returned the defective product to Supplier. A detailed Root Cause/
          Failure Analysis will be available within 30 days after the defective
          product is received by Supplier. Supplier shall also provide a Failure
          Report on a monthly basis.Reference Section 25.16.


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11.  PACKAGING AND LABELING:

     11.1. Clean Room Requirements: Clean room parts will be cleaned and
          packaged to Lam's clean room specifications. For clean room guidelines
          refer to Lam Product Protection Procedure (Part Number:
          505-100342-001). This section does not apply to Advanced Energy.

     11.2. Packaging and Crating Guidelines: Both new Product and Repaired
          product will be shipped (one per) in Lam approved packaging
          appropriate for shipping anywhere in the world by surface or air
          without damage to the part. The packaging material will contain no
          foam "peanuts" or chips. For crating guidelines, see Lam's Crating
          Instructions (Part Number: 505-100294-001). For repaired product
          packaging guidelines, see Lam's Packaging Instructions (Part Number:
          603-090436-001). Lam reserves the right to review the packaging method
          used by Supplier to ship the Product. Supplier's packaging and
          shipping practices shall be designed to protect the product against
          damage, adjustment, change in calibration, etc., and impairment of the
          Product's functional integrity as originally shipped to Customer.

     11.3. Bar Code Requirement: Supplier shall be required to affix to one end
          of the approved packing a Bar Code label with readable/legible
          markings for all shipments. This process shall be implemented by
          3/01/00.

     11.4. ESD Requirement: Lam and Supplier shall be required to utilize
          processes, procedures and packaging that protects the Product against
          Electrostatic Discharge (ESD) damage.


12.  WARRANTY:

     12.1. Form, Fit and Function Warranty: You warrant that all of your
          Products conform to proper form, fit and initial function reasonably
          intended as of both the date of the Order and date of shipment.

     12.2. Material, Workmanship and Specifications Warranty: You warrant that
          all of your Products are free from defects in workmanship and material
          and conform to mutually agreed upon Specifications and Quality
          Requirements for a period of twenty four (24) months from the date of
          shipment to Lam. This warranty shall be effective on shipments after
          11/01/99.

     12.3. Service Warranty: Unless otherwise agreed in writing by both of us,
          you warrant that any Services performed by you shall be free from all
          defects in workmanship for a period of ninety (90) days from the date
          you completed such Services.

     12.4. Software Warranty: Software is warranted as being free from defects
          in design, workmanship and material for a period of ninety (90) days
          from the date of delivery.

     12.5. Breach of Warranty: In addition to your obligations described in
          paragraph 6.2, following the date the defective Product has been made
          available to you, you shall, at your expense, (1) submit a detailed,
          written corrective action plan (if applicable and mutually agreed upon
          by both parties) to Lam within thirty (30) days, and (2) use your best
          efforts immediately to correct the defect and complete delivery of the
          repaired Product and/or corrected Service. If you cannot correct the
          defect, then you shall, at your option, either (a) replace the
          defective Product or (b) refund Lam the price of the defective Product
          or Service. For new units which are deemed "defective" at Lam's
          manufacturing facility, you shall bear the risk of loss or damage
          during transit to Supplier's local service facility. This warranty
          covers materials,


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           parts, labor, travel, and all other related costs needed to inspect,
           replace or correct design, material and/or workmanship defects. In
           these cases, you agree during the warranty period that you will not
           charge Lam any fees or expenses whatsoever you incur in connection
           with your warranty obligations. You shall own any defective Products
           once replaced under this warranty provision. Lam's rights under this
           Warranty are in addition to any other rights or remedies to which Lam
           may be entitled under this Agreement or applicable law.

     12.6. Limitations on Your Warranty Obligations: These warranties will not
           apply if: (a) the Product was not properly installed or operated by
           Lam or its Customer under reasonable manufacturer-recommended
           conditions, (b) Lam fails to notify you in writing of the defect in
           question during the warranty period, (c) Lam fails to make the item
           available for correction within a reasonable time, (d) we reasonably
           agree after examination of the Product that such claimed defect or
           nonconformity does not exist, (e) the Product was manufactured or
           modified to Lam's detailed design and such design is the contributory
           cause of the defect, or (f) the Product is utilized for an
           application for which it is not suited or intended by the
           manufacturer. In these cases only, Lam agrees to reimburse you your
           reasonable fees and expenses incurred in connection with your
           demonstration to Lam that the Product complies with the Specification
           and Quality Requirements. Further, any software you supply to Lam is
           not warranted as free from errors or "bugs," and your sole obligation
           shall be to use reasonable efforts to supply Lam with a corrected
           version promptly after Lam notifies you of the defect. The original
           warranty period shall not be extended by your acts in compliance with
           this section. The foregoing warranties are exclusive of all other
           warranties, whether written, oral, expressed or implied, including
           any warranty of merchantability or fitness for a particular purpose.

13.  SUPPLIER EFFICIENCY:

     13.1. Supplier Efficiency: In exchange for Lam's commitment to purchase
           Products, you will use your best efforts to reduce lead times,
           manufacturing cycle times and costs of Products during our
           relationship. We anticipate that this can be accomplished by
           implementing better business practices, improved processes, value
           engineering or by other methods.

     13.2. Lead Time Reductions: With respect to new product Our goal is that no
           more than four weeks will elapse between Lam's placement of an Order
           and your delivery of the Product, unless there is an Excused Event or
           Lam's Order specifies a longer delivery schedule. Our lead-time goal
           for repaired Product is separately described in Attachment A. In the
           event any new Product lead time exceeds four weeks, then you agree to
           submit a detailed written plan in ten working days, to reduce such
           lead times to four weeks within a six month period. You agree to use
           your best efforts to meet such lead time reduction goals. Lam agrees
           to provide Supplier with a detailed forecast for Products released
           for Lam production. Supplier will have the right to request "Excused
           Event" if there are extensive short term changes in the forecast or
           actual consumption versus forecast.

     13.3. Cost Reductions:

           13.3.1. Reduced Aggregate Cost for All Products: Our goal is to
                   achieve a seven percent annual reduction in the aggregate
                   purchase price of all Products purchased by Lam. Upon
                   request, you shall submit a detailed written plan to meet
                   this goal through design changes, Product introduction or
                   improved efficiencies and you agree to use your best efforts
                   to meet such cost reduction goals.

          13.3.2.  Volume Discount: High volume purchasing by Lam shall be
                   rewarded annually on a calendar year basis. If at anytime the
                   monetary value of Lam's total purchases of all products
                   within a calendar year exceeds the Total Dollar Volume
                   Thresholds listed in


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                   the table attached in Attachment C, then Lam shall be
                   entitled to the corresponding Volume Discount on the amount
                   by which the Threshold was exceeded during that calendar
                   year. The discount shall be credited to Lam after all
                   invoices for product delivered to and fully accepted by Lam
                   have been paid for that calendar year. Volume discounts
                   earned by Lam for purchases during a given year shall be
                   reset to zero at the end of that year, and shall not carry
                   over to affect pricing in the subsequent year. If Attachment
                   C does not have specified volume discounts listed, then this
                   paragraph does not apply to you.

14.  INTELLECTUAL PROPERTY:

     14.1. Intellectual Property: You agree to indemnify, hold harmless and
           defend (with counsel reasonably approved by Lam), Lam and its
           affiliates, shareholders, directors, officers, employees and agents
           from and against any claims, fees, costs, awards, judgments,
           liabilities and or damages (including without limitation court costs
           and reasonable fees of attorneys and other professionals) ("Damages")
           arising out of a claim as to a Product asserted within ten (10) years
           from the date of its sale under this Agreement that the Product (as a
           stand alone unit) infringes, directly or contributorily, any patent,
           copyright, maskwork right, trade secret or similar right of any third
           party. You also agree to provide Lam prompt and reasonable written
           notice of bona fide claims made with respect to your Products.
           Notwithstanding these obligations, you may at your expense and at
           your option: (i) procure for Lam and/or its customers the ownership,
           use or distribution rights granted with respect to the Products; (ii)
           modify the infringing item to remove the infringement, without
           impairing compliance with the Quality Requirements and
           Specifications; or (iii) replace the infringing item with a
           non-infringing item, without impairing compliance with the Quality
           Requirements and Specifications; however, if you have used reasonable
           efforts and cannot accomplish options (i), (ii) or (iii), then you
           shall refund to Lam the amount paid for the infringing Products, less
           reasonable depreciation. Lam agrees to use reasonable efforts to
           facilitate the exercising of options (i), (ii) or (iii). This
           indemnification clause does not apply when the Products are
           manufactured or modified to Lam's design, quality requirements and/or
           specifications, and such design, quality requirements and/or
           specifications results in the Damages.

15.  LAM SUPPLY PROGRAMS:

     15.1. Lam Supply Programs: The manner in which you supply Products to Lam
           may vary depending on the type of Lam Supply Program your Products
           are assigned to by Lam. The Lam Supply Programs include: purchases
           through issuance of direct purchase orders; the Automatic Part Pull
           System ("APPS"); the Ship To Point of Use Program ("STP"); Freestock,
           the Consignment Inventory Agreement (CIA); or other program which, as
           a result of future experience, Lam decides to implement. During the
           course of our relationship, Lam may decide to assign or re-assign
           your Products to one of these Lam Supply Programs. Prior to
           assignment to one of these programs, your Lam contact will discuss
           the program with you. Each of these Lam Supply Programs has different
           requirements for the performance of our respective obligations. Your
           responsibility is to discuss and understand why and how any Lam
           Supply Program is applicable to you. Your agreement to support and
           comply with the specific requirements of any applicable Lam Supply
           Program to which your Product is assigned must be provided in writing
           prior to your inclusion in the program or shall be deemed given the
           first time you ship Product after inclusion in the program.

16.  CUSTOMS & INSURANCE DOCUMENTATION:

     16.1. Customs & Insurance Documentation: Upon request, you shall provide
           (a) a completed manufacturer's affidavit and/or other documentation
           as may be required by US Customs or


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           other governmental authorities with respect to your Products, and (b)
           proof, in form and substance reasonably requested by Lam, of any
           insurance policies that we might mutually agree you must carry.

17.  SECURITY AND SAFETY MATTERS:

     17.1. Security and Safety Matters: Each party may enter the premises of the
           other party during normal business hours with respect to the
           performance of this Order, subject to facility security regulations
           and US Government clearance requirements, if applicable. Each party
           may, in its sole discretion, remove from its premises any employee,
           contractor or agent of the other not in compliance with such
           regulations. You shall not introduce any substance which is regulated
           by any governmental authority as being a threat to health, safety or
           the environment onto Lam's premises without prior written approval,
           and then only in compliance with law. You shall immediately notify
           Lam if the Products or Services violate any law or have a defect
           threatening health, safety or the environment. Replacements,
           modifications, associated service calls or other acts or items
           required to remedy such defect or violation shall be provided
           promptly and at no cost to Lam or its Customers.

18.  LAM TOOLS:

     18.1. Lam Tools: Any equipment, materials or other items provided or paid
           for by Lam as part of either parties' performance under this GPA (i)
           shall remain the property of Lam, (ii) shall be used by you only in
           performance of Lam's Orders, and (iii) shall be returned to Lam upon
           request.

19.  LAM'S OBLIGATIONS AND RIGHTS:

     19.1. Orders; Electronic Transmission of Documents: Lam will issue you an
           Order to purchase Products. The Order is subject to your acceptance.
           Your acceptance of the Order will be evidenced by the earlier of
           either your return of a signed Order acknowledgment or your delivery
           of any Products and/or Services pursuant to the Order. Orders and
           other related documents may be issued by Lam in document or
           electronic form, including via electronic data interchange ("EDI"),
           provided that we have established an EDI program between us.

     19.2. Forecasts Generally: Lam will give you forecasts (for Products
           released for Lam production) of estimated quantities of Products it
           may purchase ("Forecast"). The Forecasts are for information purposes
           only, and are simply Lam's estimate at that time of its anticipated
           needs. However, Forecasts may change and may differ significantly
           from Lam's actual Orders. Forecasts are neither commitments to
           purchase nor authorizations by Lam to deliver Product.

     19.3. Payment: Payment shall be made in U.S. dollars (unless otherwise
           agreed) with the following terms: net thirty (30) days after receipt
           of your invoice. At Lam's discretion, any payment you are owed may be
           set off by amounts you otherwise owe to Lam. Any tax, duty, or other
           charge imposed by any taxing authority, shall, upon demand by you, be
           paid by Lam, except where Lam timely provides you with an applicable
           tax exemption certificate.

     19.4. Pricing: Unless otherwise agreed between us, Lam will pay you for
           Product at prices determined according to the terms as stated in
           paragraph 19.3.

     19.5. Agreed Prices: Subject to any volume discounts, the agreed purchase
           price for Products shall be as set forth in the most recent Order,
           unless set forth in the "Price List" attached as Attachment D. Such
           price may be periodically revised by our mutual written agreement.
           Any prices set forth in such price list shall supersede prices in
           Orders. Prices for ordered Products or Services shall not exceed the
           lowest prices offered to your other customers for like Products or
           Services under like terms and circumstances.


                                                                               9
<PAGE>   10


     19.6. Changes in Requirements: Lam may at any time require changes to an
           Order, any Specifications, shipment or packing methods, time or place
           of delivery, and the like ("Change"). A Change is only effective upon
           issuance of a Change Order. If any Change causes a variation in your
           costs or the time required for performing under an Order, a mutually
           agreeable, equitable adjustment will be made in the Order price,
           delivery dates or both, based upon your written, itemized request for
           an adjustment substantiated by evidence reasonably satisfactory to
           Lam; provided that no adjustment will be made unless an actual Change
           Order has been issued.

     19.7. Audit: At reasonable times and upon reasonable prior notice, Lam may,
           with Supplier approval, examine your operations and processes which
           pertain to the ordered Products or Services to verify conformance
           with this GPA.

     19.8. Inventions: Any new ideas, creations, works or inventions
           ("Inventions") created by you as part of the specific course and
           scope of engineering design efforts under this agreement (and
           separately paid for apart from product sales) shall be jointly owned
           by the parties. In such matters, each party shall cooperate
           reasonably with the other to pursue any patent, copyright or
           trademark which either party deems appropriate to pursue. Each party
           shall separately own any Invention to the extent arising from its own
           efforts outside of this agreement, except that Lam shall have an
           irrevocable, permanent, fully paid up, royalty free and
           non-transferable license to use, make and have made any of Supplier's
           Inventions to the extent based on, derivative of, or arising from
           Lam's separately created designs; provided that Lam agrees not to
           make or have made any products from such Inventions unless Supplier
           ceases to be a commercially reasonable source of supply for such
           products. In this regard, and without limitation, if Supplier does
           not offer Lam the same price (or lower) that Supplier offers to other
           customers on such products containing the Inventions, Supplier will
           not be deemed a "commercially reasonable source of supply" to Lam.

20.  BOTH OF OUR OBLIGATIONS:

     20.1. Advertising: Neither party shall, without the prior written consent
           of the other, (i) use any identifying names, logos or other
           commercial or product designations of the other party, (ii) make
           reference to the other party in any advertising or other promotion,
           or (iii) disclose the existence of this transaction.

     20.2. Assignment; Subcontracting Approvals: Neither your nor our rights or
           obligations may be assigned to any other person or entity in whole or
           in part, unless the party proposing such assignment has obtained the
           other's prior written consent.

21.  CANCELLATION

     21.1  Cancellation by Supplier: Supplier and Lam agree to work
           cooperatively towards Product consolidation and elimination of slow
           moving Products. Supplier may discontinue availability of slow moving
           Products at any time by giving Lam prior written notice
           ("Discontinuation Notice") offering Lam the opportunity to place a
           "last buy" purchase order. Upon request from Lam, Supplier will
           provide Lam


                                                                              10
<PAGE>   11


           up to six (6) months from date of Discontinuation Notice for
           placement of "last buy" purchase order with deliveries not to exceed
           nine (9) months from date of Discontinuation Notice. Upon request,
           Lam agrees to provide Supplier with a forecast for Products which
           Supplier deems to be slow moving. Supplier agrees to provide Lam with
           the same time period when a Discontinuation Notice is issued by the
           Supplier when the business relationship is truncated by the Supplier.
           Supplier also agrees to continue to provide products that meets the
           mutually agreed upon specification and quality requirements and
           agrees to deliver product per the mutually agreed upon schedule.
           21.1.

     21.2. Cancellation for Default: Either of us may cancel this GPA or any
           Order, in whole or in part, immediately without any cost or liability
           if the other party has (1) failed to perform fully any obligation of
           this GPA and (2) has not cured such failure within thirty (30) days,
           or within a reasonable period if the failure is not curable in thirty
           (30) days, from the date of written notice of the failure to perform.
           If you repeatedly fail to meet scheduled delivery dates,
           Specifications or Quality Requirements, then Lam may, but is not
           obligated to, cancel any Order without cost or liability, and
           exclusive of any other remedy Lam may have under the GPA or
           applicable law.

     21.3. Lam's Commitment for Cancellations for Convenience: Lam may at any
           time cancel for convenience any Order, in whole or in part, upon
           prior written notice or facsimile ("Cancel Notice"). If Lam's Cancel
           Notice is issued three (3) months or more prior to the scheduled
           delivery date, then Lam shall have no liability whatsoever for such
           canceled Products and/or Services. If Lam issues a Cancel Notice less
           than three (3) months in advance of a scheduled delivery date or
           makes a Change, either of which renders your Product inventory or any
           Service performed obsolete, then, with respect to such obsoleted
           inventory or Service, the parties shall negotiate in good faith to
           determine the amount to be paid by Lam. If the parties fail to agree,
           Lam commits to pay your claims for the following enumerated items as
           your sole and exclusive remedy for such cancellation or Change, up to
           a maximum amount not to exceed in any case the total purchase price
           for all Products and/or Services canceled or Changed:

           21.3.1. Completed Products or Services: (i) the purchase price for
                   any such Products or Services Lam has not yet paid for,
                   which are completed in accordance with an Order prior to the
                   date of Lam's Cancel Notice or Change ("Notice Date"), to the
                   extent such Products comply with the applicable Quality
                   Requirements and Specifications in effect prior to the Notice
                   Date, and to the extent such Services comply with the Order
                   or Attachment A (as applicable); provided, however, that Lam
                   will not pay for any Products or Services completed after the
                   Notice Date.

           21.3.2. Product WIP and Raw Materials: and, with respect to Products
                   only, (ii) the actual costs incurred by you prior to the
                   Notice Date for Raw Materials and WIP which are allocable to
                   the canceled or changed portion of the Order, less any
                   salvage value. However, in all cases your recovery will be
                   limited as follows: (a) you will only be reimbursed for Raw
                   Materials and WIP which are not cancelable, salable, or
                   otherwise usable by you; (b) the reasonable manufacturing
                   cycle time period for the Products in question will be the
                   maximum period for which you may claim WIP costs prior to the
                   Notice Date; and (c) the reasonable lead time necessary to
                   order Raw Materials for the Products in question will be the
                   maximum period for which you may claim Raw Materials' costs
                   prior to the Cancel Date. "WIP" means all labor performed and
                   material that has been transformed, altered or processed by
                   you, your contractors, agents or consultants pursuant and
                   directly allocable to the Order. "Raw Materials" mean
                   materials, excluding WIP, that have been purchased or
                   committed to by you in good faith for the Order.


                                                                              11
<PAGE>   12


22.  Your Obligations Upon Notice of Cancellation or Specification Change:
     Immediately following your receipt of a Cancellation Notice or notice of a
     Change (as defined previously), you must (i) stop all work, (ii) incur no
     further costs, and (iii) protect all property in which Lam has or may
     acquire an interest or for which you feel Lam is obligated to pay. You are
     also required to use reasonable efforts to minimize any Damages to you
     which could result from the cancellation or Change. Lam's liability under
     this GPA will be decreased to the extent you fail to take such actions. In
     the event of cancellation or Change, Lam may require you promptly to
     transfer and assign title and immediately deliver to Lam any completed
     Products, WIP, Raw Materials, Lam Tools, Intellectual Property,
     confidential information and other items that you have produced or acquired
     for the performance of the canceled or Changed portions of the Order. All
     claims by you for any cancellation or Change must be substantiated with
     evidence in form and substance reasonably satisfactory to Lam.

     22.1. In no event will Lam be liable to you any consequential, special,
           indirect or punitive damages of any kind.

23.  CONFIDENTIAL INFORMATION:

     23.1. Confidential Information: In the course of performing our obligations
           under this GPA, we may obtain or be provided with each other's
           confidential information. We will in all cases attempt to enter into
           specific non-disclosure agreements to protect each other's
           confidential information from unauthorized disclosure and use.
           However, in the absence of such non-disclosure agreements, you agree,
           for five years from the date you receive Lam's confidential
           information, neither to use the confidential information in any
           manner which would result in a disclosure to third parties (except as
           necessary to perform your obligations under this GPA), nor disclose
           it to any third party (except to your employees with a need to know
           and who previously sign an agreement protecting Lam's rights). You
           also agree to limit your use of such information as needed to carry
           out your obligations under this Agreement. You shall prevent
           unauthorized disclosure by using the same degree of care you use to
           prevent disclosure of your own confidential information, but not less
           than a reasonable degree of care. Lam confidential information shall
           be immediately returned upon request. Either party providing the
           other with confidential information shall clearly mark it as such or,
           in the event of oral or intangible information, may identify it in
           writing as confidential within a reasonable time. In the event either
           party inadvertently discloses any item of confidential information
           not so marked or identified, the other party's sole recourse shall be
           to prevent any further disclosure of such information.

24.  INDEMNITY:

     24.1. Indemnity: Subject to other provisions herein, each party agrees to
           defend, indemnify and hold the other party harmless from and against
           all Damages (including without limitation court costs and reasonable
           fees of attorneys and other professionals) arising out of the
           indemnifying party's acts or omissions or breach of any term in this
           GPA.

25.  MISCELLANEOUS:

     25.1. Relationship of the Parties: You are an independent contractor under
           this GPA. This GPA is not to be construed as creating an employment,
           agency, partnership, joint venture or any other relationship or form
           of legal association between us.

     25.2. Insolvency: In the event that a party: (i) becomes insolvent or
           unable to pay its debts or perform its obligations as they mature;
           (ii) becomes the subject of any voluntary or involuntary proceeding
           in liquidation, dissolution, receivership, attachment, composition or
           general assignment for the benefit of creditors; or (iii) pursues any
           other remedies under any other law relating to relief for debtors,
           then such party will provide prompt notice to the other and
           reasonable assurances therefore, as may be requested from the other
           party from time to


                                                                              12
<PAGE>   13


           time, that it can and will perform its obligations under an Order or
           this GPA. If such notices or assurances are not received in a timely
           manner or are not reasonably satisfactory to the party receiving the
           assurances, then such party may terminate any Order or this GPA in
           whole or in part without any cost or liability.

     25.3. Entire Agreement: This GPA, together with all attachments,
           constitutes our entire understanding and agreement with respect to
           the subject matter of this GPA, and supersedes all prior and
           contemporaneous understandings, representations and agreements,
           whether written or oral, with respect to such subject matter. Any
           other terms or conditions, including those in either party's purchase
           orders, invoices, confirming documents and the like, are deemed
           deleted unless attached hereto or separately agreed to in writing to
           be a part of this Agreement. This GPA may only be modified by our
           written agreement.

     25.4. Notices: All notices must be in writing and are deemed effective on
           the earlier of: the date of personal delivery, the receipt of
           confirmed telex or fax; or, if given by mail, three business days
           after the date deposited in the United States mails, postage prepaid,
           registered or certified, with return receipt requested. Notices will
           be addressed to Lam and Supplier at their respective addresses
           appearing in the signature block of this GPA, but each party may
           change its address by prior written notice.

     25.5. Governing Law: This GPA will be governed and construed in all
           respects by the laws of the State of California without regard to
           conflict of laws considerations. Unless otherwise agreed,
           implementation and jurisdiction of any litigation or other dispute
           resolution modality will be in Santa Clara County, California.

     25.6. Disputes: If either one of us is aware of a dispute, controversy or
           claim arising out of this GPA or the Products or Services provided
           ("Dispute"), then that party will immediately give written notice to
           the other. We will first try to resolve the Dispute through good
           faith negotiation and by whatever escalation policies are agreed
           between us. However, if we cannot resolve the Dispute by negotiation,
           then, within 90 days after written request from either of us to the
           other ("Arbitration Notice"), the Dispute shall be submitted to
           binding arbitration administered in accordance with the American
           Arbitration Association's Commercial Arbitration Rules and
           Supplementary Procedures for Large Complex Disputes ("Rules").
           Arbitration proceedings shall be conducted in English by a single
           arbitrator selected by the parties, who must have at least ten (10)
           years' of dispute resolution experience in related industry matters,
           or be either a retired judge or a practicing lawyer. Each party may
           conduct such discovery as it deems necessary; however the arbitrator
           may limit the conduct of such discovery as appropriate. The
           arbitrator may only provide remedies available under California law,
           and in no event in excess of those permitted under this GPA. The
           arbitrator may not fashion any provisional or other equitable relief.
           The award shall be final and binding on the parties, and each party
           waives, to the fullest extent permitted by law, any appeal right it
           may have in any jurisdiction. The existence, proceedings, discovery
           and results of the arbitration may not be disclosed, without prior
           written consent of both parties. Filing a judicial action for
           recording a notice of pending action, order of attachment,
           receivership, injunction or other provisional remedies shall not
           waive or diminish these arbitration rights.

     25.7. Attorneys Fees: In any judicial or arbitration proceeding arising out
           of this GPA, or the Products or Services provided, the prevailing
           party is entitled to recover all reasonable costs incurred pertaining
           to such proceeding, including without limitation reasonable costs and
           fees of attorneys or other professionals ("Expenses"), except that
           (i) if the prevailing party has at any time refused a settlement
           offer pertaining to such dispute which is equal to or greater than
           the prevailing party's actual recovery as determined in such judicial
           or arbitration proceeding, then no such Expenses will be awarded, and
           (ii) if the prevailing party has at any time refused a settlement
           offer pertaining to such dispute which is less than the prevailing
           party's actual


                                                                              13
<PAGE>   14


            recovery as determined in such judicial or arbitration proceeding,
            then any such Expenses associated with recovering the difference
            between the refused settlement offer and the actual recovery must
            bear a reasonable relation to such difference.

     25.8.  Order of Precedence: The following list of documents is the order of
            precedence which will govern any situation where there is a conflict
            of terms and conditions among these documents or obligations of the
            parties: (i) any supplemental terms or instructions on the face of
            Lam's Orders accepted by you will govern first and foremost; then
            (ii) the terms of this GPA (including any modifications or addenda)
            then (iii) the Specifications; and then (iv) the Quality
            Requirements.

     25.9.  Severability: To the extent any part of this GPA is determined to be
            unenforceable, the remaining provisions will remain in effect and be
            interpreted and enforced to effectuate the intent of the parties.

     25.10. Counterparts; Successors: This GPA may be signed in counterparts.
            This GPA binds and inures to the benefit of the parties' respective
            successors or permitted assignees.

     25.11. Survival: The following sections of this GPA (as denoted by the
            following list of corresponding captions) and related subsections,
            if any, shall survive expiration or early termination of this GPA:
            Warranty; Intellectual Property; Customs; Advertising; Cancellation;
            Compliance with Laws; Confidential Information; Indemnity; Security
            Procedures; Attorneys Fees; Disputes; Entire Agreement; Force
            Majeure; Governing Law; Notices; Order of Precedence; Severability;
            Successors; Survival; Waiver; and Definitions.

     25.12. Waiver: Failure by a party to take affirmative action with respect
            to any breach of these terms by the other party shall not be
            construed as a waiver of that breach or of future breaches.

     25.13. Addenda: Proposed addendum(a) or modification(s) shall be mutually
            agreed upon in writing by local management and forwarded to the Lam
            Commodity Manager (CM), who shall review the addendum or
            modification for consistency with this Agreement. Upon acceptance by
            both Lam and Supplier, the proposed addendum(a) or modification(s)
            shall be incorporated into this Agreement. If the proposed
            addendum(a) or modification(s) is rejected by either party, the CM
            shall return it to the originator and identify the reason for
            rejection.

     25.14. Limitation of Liability: In no event will either party be liable to
            the other party for any consequential, special, indirect or punitive
            damages.

     25.15. Miscellaneous: Neither the section headings nor the recitals are
            intended to be terms of this GPA or used to interpret the terms of
            this GPA, or any attachment hereto.

     25.16. Corrective Action : If Lam is dissatisfied with performance for
            (3.3) Technical Support Documents; or (5.1) Delivery and Quality
            Goals; or (6.4) Reliability Road Map; or (10.4) Delivery of Report;
            then Supplier will put in place a mutually agreed upon corrective
            action plan that will address the issue.

26.  DEFINITIONS: As used in this GPA, the following capitalized terms have the
     following meanings:

     26.1.  "Excused Event" means a breach of your obligations under this GPA
            which is either waived


                                                                              14
<PAGE>   15

            in writing by Lam, caused by a force majeure event, caused by a Lam
            change order, or otherwise caused solely by Lam.

     26.2.  "Order" shall mean any purchase order, change order or other
            document requesting Supplier to provide Products or Services. The
            terms and conditions of this Agreement are hereby incorporated by
            reference into any such Order.

     26.3.  "Product" means all Products and other items ordered by Lam from
            you, including, without limitation, assemblies, parts, spare parts,
            software, hardware and upgrades.

     26.4.  "Service" means work to be performed by Supplier pursuant to an
            Order or this GPA, including, without limitation, installation,
            qualification, maintenance, warranty repair, service call,
            upgrades/modification, refurbishment, retrofits, spares and service
            contract work.

     26.5.  "Refurbishment" shall mean replacement of non-defective components
            in the repair process that have: 1) known reliability problems; 2)
            wear due to usage that will likely cause the FRU to fail within one
            year after installation; 3) high failure rates based upon the FRU
            component failure data; or are a part of preventative maintenance.

     26.6.  "Upgrade" shall mean a component or part that can be added to the
            FRU to enhance its performance to the current revision level.

     26.7.  "Retrofit" shall mean to replace a Product's components or parts to
            insure that the Product meets the applicable Specification and
            Quality Requirements.

     26.8.  "PM" shall mean Preventative Maintenance.

     26.9.  "FRU" shall mean "Field Replaceable Unit", which is the assembly or
            part used to repair products in the field.

     26.10. "NTF" shall mean No Trouble Found.

     26.11. "Significant Change" shall mean any change that affects Fit, Form
            or Function.

ATTACHMENTS:

     Documents, attachments, schedules, exhibits which are attached and
     incorporated by reference into this Agreement are referenced below:

     Yes      General Agreement
     Yes      Attachment A - Global In-Country Repair/Exchange Support Agreement
     No       Attachment B - Global On-site/Repair Support Agreement
     Yes      Attachment C - Volume Discounts
     Yes      Attachment D - Price List
     No       Attachment E - Critical Components
     Yes      Attachment F - Consigned Inventory Agreement (CIA)
     No       Attachment G - Software Agreement
     No       Other _____________________________________________________


                                                                              15
<PAGE>   16


The parties have caused this GPA to be executed by their duly authorized
representatives.

<TABLE>
<CAPTION>
<S>                                           <C>
ADVANCED ENERGY INDUSTRIES, INC.              LAM RESEARCH CORPORATION

Principal Place of Business:                  Principal Place of Business:
1625 Sharp Point Drive                        Cushing Parkway
Fort Collins, Colorado 80525, USA             Fremont, California 94538, USA

/s/ Allen G. Vallei                           /s/ Manuel C. Carreira, Jr.
----------------------                        ---------------------------
Signature                                     Signature

Allen G. Vallei                               Manuel C. Carreira, Jr.
Printed Name                                  Printed Name

Western Region Manager                        Sr. Commodity Mgr.
Title                                         Title

10/12/99                                      10/12/99
Dated                                         Dated
</TABLE>


                                                                              16
<PAGE>   17
1 OF 2

                                SCHEDULE 1 TO OEM
                           GLOBAL PURCHASING AGREEMENT
                   Technical Support Requirement Specification

Purpose: To define Lam`s Technical Support requirements to Suppliers for
documentation and support materials on equipment sold to Lam Research Corp.

Documentation Requirements: All documents/procedures must be printed on regular
paper (clean room paper available at extra cost) and available in PDF electronic
format.

Categories: The types of documentation required to support Lam's Technical
Support Group is as follows:

     I.   Support Documentation

     II.  Documentation Distribution List

     III. Training

I.   SUPPORT DOCUMENTATION

                                  DELIVERABLES

     -    Theory of operations showing design criteria, functionality of the
          component/system and performance specifications

o    Safety - Provide necessary information to conform to CE-Mark/S2
     requirements, including but not limited to:

     -    Safety Features/Precautions

     -    EMO description with block diagram and interface and interconnect
          schematic

     -    Hardware and software Interlocks

     -    Lockout/tag-out of hazardous voltages

     -    Labeling of hazards and cautions

o        Configuration/Operation Instructions for proper operation:

     -    Pre-run Checklist

     -    Specification defining all software I/O points including default
          values for each configuration type.

o    Indicators:

     -    Category/definitions

     -    Causes for each indicator

     -    Recovery steps for each indicator

o    Installation/Startup Procedures:

     -    A comprehensive Installation/Startup manual must depict how to
          Prepare, Install and Startup the component/system

o    Schematics:

     -    All non-proprietary schematics are available in hard copy only but are
          not included in the manual (available upon request)

     -    Schematics must be available for but not limited to: cables, PC boards
          and interconnect drawings

o    Maintenance Procedures:

     -    Procedures necessary for preparation of the system

o    Troubleshooting Guide:

     -    A comprehensive Troubleshooting Guide must be provided in the form of
          a decision tree or table


                                                                              17
<PAGE>   18


                      II. DOCUMENTATION DISTRIBUTION LIST

                                  DELIVERABLES

o    Documentation Distribution:

     -    Lam Commodity Management (or designee) must receive copies of all
          proposed ECN's


                          III. TRAINING DOCUMENTATION

                                  DELIVERABLES

o    Training classes must be made available prior to first Product shipment.
     Additional training classes can be provided at an additional cost. Lam may
     have the authority to video tape any training course provided by Supplier.
     Training classes must include the following:

     -    Maintenance Procedures

     -    Calibration Procedures

     -    FRU Replacement Procedures

     -    Serviceability Procedures




                                                                              18