# Patent

## Title
Inorganic, dielectric, grid polarizer and non-zero order diffraction grating

## Abstract

An inorganic, dielectric grid polarizer includes an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer. The inorganic, dielectric grid polarizer includes a stack of film layers with an array of parallel ribs in accordance with PGP<λ/2 where PGP is the period of the ribs and λ is the wavelength of the light. The diffraction grating includes an array of elongated parallel dielectric ribs in accordance with PDG>λ/2 where PDG is the period of the ribs.

## Background
RELATED APPLICATIONS & PRIORITY CLAIM
This is a continuation-in-part of U.S. patent application Ser. No. 11/640,112 filed Dec. 15, 2006, which is a continuation-in-part of U.S. patent application Ser. No. 11/005,927 filed Dec. 6, 2004, U.S. Pat. No. 7,570,424, which is herein incorporated by reference.
This is a continuation-in-part of U.S. patent application Ser. Nos. 11/469,210; 11/469,226; 11/469,241 (abandon); 11/469,253 abandon and 11/469,266 (abandon), filed Aug. 31, 2006; which are herein incorporated by reference.
This is related to U.S. patent application Ser. Nos. 11/475,857 and 11/478,459, filed Jun. 26, 2006; which are herein incorporated by reference.


BACKGROUND
1. Field of the Invention
The present invention relates generally to a combined inorganic, dielectric grid polarizer and diffraction grating to polarize and further control light, such as by reducing zero order back reflection.
2. Related Art
Diffraction gratings are a periodic structure of dielectric material with a period (p) greater than half the wavelength (λ) of incident light, or p≧λ/2. The diffraction grating scatters the incident light at discrete angles or directions in accordance with mλ=p sin θ, where m is the order and θ is the angle with respect to normal from the diffraction grating. Thus, different wavelengths are reflected or scattered at different angles.
Wire grid polarizers are a periodic structure of conductive elements with a length greater than the wavelength and a period less than half the wavelength of the incident light, or p≧λ/2. Wire grid polarizers have been proven to be effective for visible light ( ̃300-700 nm, or  ̃0.3-0.7 microns or μm) and their use demonstrated as polarizers and beam splitters in optical imaging systems.
Various imaging systems, such as projection displays, using liquid crystal spatial light modulators, such as liquid crystal on silicon (LCOS), have been proposed that utilize polarizers, such as wire grid polarizers. For example, see U.S. Pat. Nos. 6,234,634 and 6,447,120. Such polarizers, however, can also back reflect a portion of the incident light resulting in a ghost image. One solution has been to tilt or angle the polarizer to direct the back reflection out of or away from the optical path. Tilting the polarizer, however, can take-up valuable space in a compact design, and can cause unwanted astigmatism. In addition, the conductive metal of the wires can absorb light.
Various types of polarizers or polarizing beam splitters (PBS) have been developed for polarizing light, or separating orthogonal polarization orientations of light. A MacNeille PBS is based upon achieving Brewster's angle behavior at the thin film interface along the diagonal of the high refractive index cube in which it is constructed. Such MacNeille PBSs generate no astigmatism, but have a narrow acceptance angle, and have significant cost and weight.
Another polarizing film includes hundreds of layers of polymer material stretched to make the films birefringent. Such stretched films have relatively high transmission contrast, but not reflection contrast. In addition, polymer materials are organic and not as capable of withstanding higher temperatures or higher energy flux. For example, see VikuitiTM polarizing films by 3M.
Composite wire-grid polarizers have been proposed in which the wires include alternating layers of dielectric and conductive layers. For example, see U.S. Pat. Nos. 6,532,111; 6,665,119 and 6,788,461. Such polarizers, however, still have conductive materials.
SUMMARY OF THE INVENTION
It has been recognized that it would be advantageous to develop a polarizer device capable of reducing back reflection, and thus capable of reducing ghost images when used in an imaging system or display system. In addition, it has been recognized that it would be advantageous to develop a polarizer device capable of polarizing and further controlling the light, such as the direction or modes of reflection. In addition, it has been recognized that it would be advantageous to develop a non-zero order type polarizer device capable of polarizing light while reflecting only light of non-zero order, and without reflecting light of the zero order. Furthermore, it has been recognized that it would be advantageous to develop an imaging system with such a wire grid polarizer or polarizer device capable of conserving space in the optical design, and capable reducing ghost images and unwanted astigmatism. It has been recognized that it would be advantageous to develop a polarizer or polarizing beam splitter that has high contrast in reflection and/or transmission, can withstand high temperatures and/or high energy flux, and that is simpler to manufacture. In addition, it has been recognized that it would be advantageous to develop a polarizer that is inorganic and dielectric.
The invention provides an inorganic, dielectric grid polarizer configured to polarize and further control light incident on the device and includes an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer, with one disposed over the other and configured to be disposed in the light. The inorganic, dielectric grid polarizer includes: a stack of film layers, each film layer being formed of a material that is both inorganic and dielectric; adjacent film layers having different refractive indices; at least one of the film layers being discontinuous to form a form birefringent layer with an array of parallel ribs in accordance with PGP<λ/2 where PGP is the period of the ribs and λ is the wavelength of the light, to polarize the light by substantially reflecting the light with s-polarization orientation and substantially transmitting the incident light with p-polarization orientation. The diffraction grating includes an array of elongated parallel dielectric ribs in accordance with PDG>λ/2 where PDG is the period of the ribs, to substantially diffract light with the s-polarization orientation of non-zero order at a non-orthogonal angle. The diffraction grating and the grid polarizer together pass light having p-polarization orientation while diffracting light having s-polarization orientation.



BRIEF DESCRIPTION OF THE DRAWINGS
Additional features and advantages of the invention will be apparent from the detailed description which follows, taken in conjunction with the accompanying drawings, which together illustrate, by way of example, features of the invention; and, wherein:
FIG. 1a is a cross-sectional side view of a polarizer device in accordance with an embodiment of the present invention;
FIG. 1b is a detailed cross-sectional side view of the polarizer device of FIG. 1a; 
FIG. 1c is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 2 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 3 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 4 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 5 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 6 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 7 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIG. 8 is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
FIGS. 9a and 9b are schematic views of image projection systems with a polarizer device in accordance with an embodiment of the present invention;
FIG. 10 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention;
FIG. 11 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention;
FIG. 12 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention;
FIG. 13 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention;
FIG. 14 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention; and
FIG. 15 is a schematic view of an image projection system with a polarizer device in accordance with an embodiment of the present invention;



Reference will now be made to the exemplary embodiments illustrated, and specific language will be used herein to describe the same. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended.
DETAILED DESCRIPTION OF EXAMPLE EMBODIMENT(S)
Definitions
The terms polarizer and polarizing beam splitter are used interchangeably herein. Both are referred to herein as polarizers or polarizer devices.
The term dielectric is used herein to mean non-metallic.
The term continuous is used here to denote continuous in at least two dimensions, such as continuous in a plane or continuous across a planar surface in both directions.
Description
As illustrated in FIGS. 1a-2, polarizer devices in exemplary implementations of the invention are shown which can be used to polarize and further control light, and which can be used with image or display systems. Such polarizer devices can polarize and further control light, such as by reducing zero order reflections, or back reflection. Such polarizer devices can be a combination of an inorganic, dielectric grid polarizer and a diffraction grating, configured to reduce zero order back reflections of s-polarized light. It will be appreciated that other configurations are possible depending on the intended application. As illustrated in FIGS. 9-15, image or display systems in exemplary implementations of the invention are shown using polarizer devices in accordance with FIGS. 1a-2. Such display systems can utilize such polarizer devices to reduce ghost images, conserve space in the optical design by being oriented orthogonal to the incident light, and thus reduce unwanted astigmatism. It will be appreciated that other applications are possible, including for example fiber optics.
Referring to FIGS. 1a and 1b, a polarizer device 10a is shown disposed in a beam of incident light or an incident light beam 12. Such an incident light beam 12 can be an unpolarized light beam, a polarized light beam, an light beam with image information encoded thereon, an image beam, a color beam, etc. The polarizer device 10a includes an optical stack 14 with a plurality of layers. In one aspect, the device 10a or optical stack 14 is oriented normal or orthogonal (θ= ̃0) to the incident light beam 12. The optical stack includes a diffraction grating 18 and an inorganic, dielectric grid polarizer 22 disposed one over the other. In one aspect, the diffraction grating 18 is stacked over the grid polarizer 22, with the visible light beam incident on the diffraction grating, or encountering the diffraction grating prior to encountering the grid polarizer. Thus, the incident light beam first encounters the diffraction grating, and subsequently encounters the grid polarizer. In addition, the diffraction grating 18 can “face” the incident light beam, or be oriented so that the incident light beam strikes the ribs of the diffraction grating. It is of course understood that the diffraction grating may be covered with further layers, or that the optical stack can include additional layers over the diffraction grating, such as anti-reflective coatings, etc. The diffraction grating 18 and grid polarizer 22 can be combined together, or affixed together, in a single unit or optical stack to conserve space in an optical design, and for ease of handling or installing. Alternatively, a device 10e can include the diffraction grating 18 and the grid polarizer 22 spaced-apart from one another to facilitate fabrication, as shown in FIG. 4.
The diffraction grating 18 can include an array of elongated parallel dielectric ribs 26 with a period in accordance with PDG>λ/2, where PDG is the period of the ribs (and λ is the wavelength of the visible light beam). In one aspect, the period PGD can be greater than 0.21 microns and less than 0.7 microns. (As described below, the period of the diffraction grating can be approximately five times greater than the period of the grid polarizer.) Thus, the diffraction grating diffracts reflected or transmitted light, and specifically substantially diffracts light with the s-polarization orientation of non-zero order at a non-orthogonal angle (θ≠0) or angle greater than zero (θ>0). Furthermore, each rib 26 of a diffraction grating 18b of a device 10b can be split into at least a pair of ribs 26a and 26b, as shown in FIG. 1c. It is believed that splitting the ribs 26 facilitates diffraction of non-zero order, as described below. Thus, the diffraction grating 18 includes a periodic array of rib pairs. The split can be longitudinal resulting in two relatively proximal or adjacent ribs.
The inorganic, dielectric grid polarizer 22 includes an array of elongated, parallel ribs 30 with a period in accordance with PGP<λ/2 where PGP is the period of the wires (and λ is the wavelength of the visible light beam). In one aspect, the period can be less than about 0.21 microns to polarize the incident light. The grid polarizer 22 substantially reflects the incident light with s-polarization orientation, and substantially transmits the incident light with p-polarization orientation.
The grid polarizer 22 can include a stack 34 of film layers 34a-34f disposed over a substrate 38. The substrate 38 can be formed of an inorganic and dielectric material, such as BK7 glass. In addition, the film layers 34a-34f, and thus the stack 34, can be formed of inorganic and dielectric materials. Thus, the entire polarizer can be inorganic and dielectric, or formed of only inorganic and dielectric materials.
In addition, the dielectric material can further be optically transmissive with respect to the incident light. Furthermore, the dielectric material can further have negligible absorption. Thus, the light incident on the grid polarizer is not absorbed, but reflected and transmitted.
The material of each film layer can have a refractive index n. Adjacent film layers have different refractive indices (n1≠n2). In one aspect, film layers alternate between higher and lower refractive indices (for example n1<n2>n3; n1>n2<n3; n1<n2<n3 or n1>n2>n3). In addition, the first film layer 34a can have a different refractive index n1 than the refractive index ns of the substrate 38 (n1≠ns). The stack of film layers can have a basic pattern of two or more layers with two or more reflective indices, two or more different thicknesses, and two or more different materials. This basic pattern can be repeated.
In addition, the thickness of each layer can be tailored to transmit substantially all light of p-polarization orientation, and to reflect substantially all light of s-polarization orientation. Therefore, while the thicknesses t1-6 shown in the figures are the same, it will be appreciated that they can be different.
While the stack 34 is shown with six film layers 34a-f, it will be appreciated that the number of film layers in the stack can vary. In one aspect, the stack can have between three and twenty layers. It is believed that less than twenty layers can achieve the desired polarization. In addition, while the film layers are shown as having the same thickness, it will be appreciated that the thicknesses of the film layers can very, or can be different. The thickness of all the film layers in the stack over the substrate can be less than 2 micrometers.
At least one of the film layers is discontinuous to form a form birefringent layer with an array of parallel ribs 30. The ribs have a pitch or period PGP less than the wavelength being treated, and in one aspect less than half the wavelength being treated. For visible light applications (λ≈400-700 nm), such as projection display systems, the ribs can have a pitch or period less than 0.35 microns or micrometers (0.35 μm or 350 nm) for visible red light (λ≈700 nm) in one aspect; or less than 0.20 microns or micrometers (0.20 μm or 200 nm) for all visible light in another aspect. For infrared applications (λ≈1300-1500 nm), such as telecommunication systems, the ribs can have a pitch or period less than 0.75 micron or micrometer (0.75 μm or 750 nm) in one aspect, or less than 0.4 microns or micrometers (0.40 μm or 400 nm) in another aspect. Thus, an incident light beam 12 incident on the polarizer 22 separates the light into two orthogonal polarization orientations, with light having s-polarization orientation (polarization orientation oriented parallel to the length of the ribs) being reflected, and light having p-polarization orientation (polarization orientation oriented perpendicular to the length of the ribs) being transmitted or passed. (It is of course understood that the separation, or reflection and transmission, may not be perfect and that there may be losses or amounts of undesired polarization orientation either reflected and/or transmitted.) In addition, it will be noted that the array or grid of ribs with a pitch less than about half the wavelength of light does not act like a diffraction grating (which has a pitch about half the wavelength of light). Thus, the grid polarizer avoids diffraction. Furthermore, it is believed that such periods also avoid resonant effects or anomalies.
As shown in FIG. 1b, all of the film layers are discontinuous and form the array of parallel ribs 30. The ribs 30 can be separated by intervening grooves 42 or troughs. In this case, the grooves 42 extend through all the film layers 34a-34f to the substrate 38. Thus, each rib 30 is formed of a plurality of layers. In addition, all the film layers are form birefringent. As discussed below, such a configuration can facilitate manufacture.
The grooves 42 can be unfilled, or filed with air (n=1). Alternatively, the grooves 42 can be filled with a material that is optically transmissive with respect to the incident light.
In one aspect, a thickness of all the film layers in the stack over the substrate is less than 2 microns. Thus, the grid polarizer 22 can be thin for compact applications, and can be thinner than many multi-layered stretched film polarizers that have hundreds of layers.
It is believed that the birefringent characteristic of the film layers, and the different refractive indices of adjacent film layers, causes the grid polarizer 22 to substantially separate polarization orientations of incident light, substantially reflecting light of s-polarization orientation, and substantially transmitting or passing light of p-polarization orientation. In addition, it is believed that the number of film layers, thickness of the film layers, and refractive indices of the film layers can be adjusted to vary the performance characteristics of the grid polarizer.
Referring to FIG. 2, another polarizer device, indicated generally at 10c, is shown in an exemplary implementation in accordance with the present invention. The above description is incorporated by reference. The polarizer 10c includes a stack 46 of both discontinuous layers 34a-34c and continuous layers 46a-46c. In one aspect, the discontinuous and continuous layers can alternate, as shown. Having one or more continuous layers can provide structural support to the grid, particularly if the ribs are tall. In another aspect, the ribs of one layer can be aligned with the ribs of another layer as shown. Alternatively, a polarizer device 10d can have the ribs of one layer be off-set with respect to the ribs of another layer, as shown in FIG. 3. It is believed that the ribs can be aligned or off-set in order to tune or configure the polarizer 10c or 10d for a particular angle of incidence. For example, aligned ribs may be better suited for normal incident light, while the off-set ribs may be better suited for angled incident light.
In one aspect, the continuous layers can be formed of a material that is naturally birefringent, as opposed to form birefringent. Thus, the entire stack of thin film layers can be birefringent, without having to form ribs in the layers of naturally birefringent material.
Referring to FIG. 4, the polarizer device 10e can include separate and spaced-apart grid polarizer 22 and diffraction grating 18. A support structure (not shown) can hold the grid polarizer and the diffraction grating together for ease of handling or assembly. The diffraction grating 18 may include another substrate to support the ribs.
Referring to FIGS. 6 and 7, other polarizer devices, indicated generally at 10g and 10h, are shown in exemplary implementations in accordance with the present invention. The above description is incorporated by reference. The grid polarizer 22g of the polarizer device 10g can have multiple discontinuous layers separate by one or more continuous layers. In addition, the grid polarizer 22g of the polarizer 10g can be similar to two polarizers described in FIG. 1 stacked one atop the other. The ribs can be aligned as in FIG. 6, or offset as in FIG. 7.
Referring to FIG. 8, another polarizer device, indicated generally at 10 i, is shown in an exemplary implementation in accordance with the present invention. The above description is incorporated by reference. The polarizer can include a plurality of ribs 30i formed in and extending from the substrate 38i itself. Thus, the ribs 30 formed in the film layers or the stack 14 of film layers can be disposed over or carried by the ribs 30i of the substrate. The ribs 30i of the substrate can define intervening grooves or troughs 34i that can be aligned with the grooves 34 of the film layers. With this configuration, a portion of the substrate 38i can form a form birefringent layer. The ribs 30i or grooves 34i can be formed by etching the substrate 38i, such as by over-etching the above layers.
Referring to FIG. 1, the operation of the device 10a (or those described above) or optical stack 14 is shown. Specifically, FIG. 1 shows the polarization and diffraction of s and p polarized light, including which orders are reduced or eliminated. Namely, the polarizer device 10a eliminates or reduces back reflection of both s-polarization orientation and p-polarization orientation (shown crossed out in dashed lines), and specifically eliminates or reduces back reflection of light having s-polarization orientation of zero order and diffracting light having s-polarization orientation of non-zero order. Thus, the rejected s-polarization orientation is not back reflected. FIG. 1 shows the resulting light beams and their polarization orientation (s or p). It can be seen that the diffraction grating 18 and the grid polarizer 22 together (or the device 10a or optical stack 14) pass light having p-polarization orientation while diffracting light having s-polarization orientation. More specifically, light with p-polarization orientation is substantially passed, light with s-polarization orientation is substantially reflected, but light with s-polarization orientation having a non-zero order is also diffracted, or reflected at a non-orthogonal or a non-zero angle (θ≠0) or an angle greater than zero (θ>0). Thus, the resulting light is substantially transmitted p-polarized light and diffracted s-polarized light so that s-polarized light is not back reflected.
The array of inorganic, dielectric ribs 30 of the grid polarizer 22 and the array of dielectric ribs 26 of the diffraction grating 18 can be substantially parallel with one another, as shown. In other words, the ribs 30 can be parallel with the ribs 26. As stated above, the period PGD of the diffraction grating 18 can be greater than the period PGP of the grid polarizer 22. It is believed that a diffraction grating period PGD approximately five times greater (PGD≈5 PGP) than the grid polarizer period PGP will provide adequate diffraction of the light with s-polarization orientation or adequate reduction of light with the s-polarization orientation of zero-order. The arrays of both the ribs can be aligned so that the period of one begins at the period of another, as shown. Alternatively, the arrays can be staggered so that the starting period of one does not correspond to the other.
Referring to FIG. 1b, the optical stack 14 can also include at least two continuous layers disposed between the wire grid polarizer and the diffraction grating. The layers can have different refractive indices. A lower layer 52 can be disposed over the grid polarizer 22, and an upper layer 56 can be disposed over the lower layer 52. The upper layer 56 can have a refractive index nupper greater than a refractive index nlower of the lower layer 52 (nupper>nlower).
The ribs 26 of the diffraction grating 18 and the ribs 30 of the grid polarizer 22 can form periodic structures or discontinuous layers with spaces between the ribs. The spaces between the ribs can contain a material different than the material of the ribs or wires. For example, the spaces between the ribs 30 can be filed with a dielectric material. As another example, a device 10f can have the lower layer 52f extend into the spaces between the ribs 30 of the grid polarizer 22, as shown in FIG. 5. Thus, in manufacture, the lower layer can be disposed directly over the grid polarizer. In addition, further layers may be disposed over the diffraction grating, including additional diffraction gratings. Furthermore, additional layers can be disposed between the diffraction grating and the grid polarizer, or between the substrate and the ribs.
The grid polarizer 22 can include, or the ribs 30 and optical stack 14 can be supported by, a substrate 38. The ribs 30 can be formed or deposited on the substrate, such as by using a lithography process. The other layers can be formed or deposited over the wires. Similarly, the ribs 26 can be formed using a lithography process.
As stated above, such a polarizer device (represented by 10a) described above can be utilized in an image or projection display system. Referring to FIG. 9a, an image projection system 80 is shown utilizing the polarizer devices described above (represented by 10a). The image projection system can be a single channel or color system, or can include multiple channels or colors, such as three (red, green and blue) as shown. The system can utilize spatial light modulators 84, such as liquid crystal devices (LCDs), to selectively manipulate light to encode image information thereon. Such LCDs can be reflective or transmissive, and such systems can be designed for transmissive LCDs, or for reflective LCDs, as shown. For example, the system can utilize one or more liquid crystal on silicon (LCOS) panels. An LCD or LCOS panel can be combined or paired with a wire grid polarizing beamsplitter WGP-PBS 88, as originally described in U.S. Pat. No. 6,234,634 (and sometimes referred to as an “image assimilator” 92), to produce an image bearing light beam. In such a pairing, the WGP-PBS acts as both a polarizer for incoming light and an analyzer for light modified by the LCOS panel, resulting in the image bearing light beam. A source light beam (such as a polarized or unpolarized, white or colored light beam) can pass through the WGP-PBS (polarizing or further polarizing the source light beam) and be reflected from the LCD or LCOS panel 84, which selectively rotates the polarization orientation to encode image information thereon. The light with the encoded image information again encounters the WGP-PBS 88 which separates the encoded image information by reflecting one polarization orientation and transmitting the other, resulting in an image beam. Three such LCOS/WGP-PBS pairs can be provided for each color, as shown. A recombination prism 96, recombination optics, x-cube, wire grid polarizers, or the like, can be utilized to combine the three colored light beams. The system can also include a light source 100, color splitting optics 104, beam shaping optics 108, and projection optics 120, as is known in the art.
A polarizer device (represented by 10a) can be utilized as an analyzer, post polarizer, or clean-up polarizer, and disposed between the recombination prism and the LCOS/WGP-PBS pair, or immediately subsequent to the WGP-PBS 88 or image assimilator 92 in the optical path. Thus, the polarizer device 10a can further analyze or clean-up the image beam reflected from the WGP-PBS to further improve contrast, particularly for certain wavelength, such as the blue color channel. In addition, as described above, the polarizer device 10a also substantially diffracts light of the s-polarization orientation, and substantially reduces back reflection of light of the s-polarization of the zero-order, and thus reduces ghost images in the system. In addition, the polarizer device 10a can be oriented orthogonal to the incident light to maintain a compact design. Therefore, the polarizer device 10a can be configured or oriented in a projection system to be orthogonal or normal to the optical path, both efficiently utilizing space and reducing unwanted astigmatism, and reducing back reflection and ghost images.
In addition, a polarizer device (represented by 10a) can be disposed in other locations where a polarizer can be used, such as in the light source, the beam shaping optics, after the beam shaping optics, and/or before the LCOS/WGP-PBS pair as a pre-polarizer. For example, the polarizer device 10a can be disposed prior to the WGP-PBS 88. Again, the polarizer device 10a can both polarize (or further polarize) the incident light and reduce back reflection in the optical path.
Referring to FIG. 9b, another projection display system 80b is shown utilizing the polarizer devices described above (represented by 10a). The system 80b is similar to the system 80 described above and shown in FIG. 9a. The system 80b includes a light source 100 to produce a light beam. The light beam can be any appropriate type, as known in the art, including an arc light, an LED array, etc. The beam can be treated by various optics, including beam shaping optics, recycling optics, polarizing optics, etc. (Various aspects of using a wire-grid polarizer in light recycling are shown in U.S. Pat. Nos. 6,108,131 and 6,208,463; which are herein incorporated by reference.) In addition, a light recycling system is described below. One or more color separator(s) 108, such as dichroic filters, can be disposable in the light beam to separate the light beam into color light beams, such as red, green and blue.
At least one beam splitter 88b can be disposable in one of the color light beams to transmit a polarized color light beam. The beam splitter 88b can be an inorganic, dielectric grid polarizer, as described in U.S. patent application Ser. No. 11/469,210, filed Aug. 31, 2006. Alternatively, the beam splitter can be a wire-grid polarizer. At least one reflective spatial light modulator 84, such as an LCOS panel, can be disposable in the polarized color light beam to encode image information thereon to produce an image bearing color light beam. The beam splitter 88b can be disposable in the image bearing color light beam to separate the image information and to reflect a polarized image bearing color light beam. As shown, three beam splitters 88b and three spatial light modulators 84 can be used, one for each color of light (blue, green, red). The polarized image bearing color light beams can be combined with an image combiner, such as an X-cube or recombination prism 96. Projection optics 120 can be disposable in the polarized image bearing color light beam to project the image on a screen 124.
A polarizer device (represented by 10a) can be utilized as an analyzer, post polarizer, or clean-up polarizer, as described above. The projection display system 80b can be a three-channel or three-color system which separates and treats three different color beams, such as red, green and blue, as described above. Thus, the system can use at least three polarizer devices 10a. The polarizer devices 10a can be the same and can be configured to operate across the visible spectrum. Alternatively, two or more of the polarizer devices 10a may be tuned to operate with a particular color or wavelength of light. For example, the display system 80b can have two or three different polarizer devices each configured or tuned to operate with one or two colors or wavelengths.
The polarizer devices 10a can face, or can have an image side that faces the incoming direction of the light or beam.
The polarizer device 10a of the present invention reduces heat transfer associated with conductive materials. Thus, it is believed that the polarizer device can be disposed adjacent to, or even abutting to, other components without transferring as much heat to those components. In addition, use of the polarizer device is believed to reduce thermal stress induced birefringence.
Referring to FIG. 10, it will be appreciated that the polarizer device 10a described above can be used in a subsystem of the projection display, such as a light engine or a modulation optical system 150, which includes the spatial light modulator 84 and beam splitter 88b. Such a modulation optical system may also include a light source, color separators, beam shaping optics, light recycler, pre-polarizers, post-polarizers, and/or an x-cube. One or more modulation optical systems can be combined with other optics and components in a projection system.
As described above, the reflective spatial light modulator 84 can be configured to selectively encode image information on a polarized incident light beam to encode image information on a reflected beam. The beam splitter 88b can be disposed adjacent the reflective spatial light modulator to provide the polarized incident light beam to the reflective spatial light modulator, and to separate the image information from the reflected beam.
Although a three-channel, or three-color, projection system has been described above, it will be appreciated that a display system 150, 150b, 160, 164 or 164b can have a single channel, as shown in FIGS. 10-13 and 15. Alternatively, the single channels shown in FIGS. 10-13 and 15 can be modulated so that multiple colors are combined in a single channel. In addition, although the grid polarizer has been described above as being used with a reflective spatial light modulator, such as an LCOS panel (in FIGS. 9a-11, 14 and 15), it will be appreciated that the grid polarizer can be used with a transmissive spatial light modulator 168, as shown in FIGS. 12 and 13. The transmissive spatial light modulator can be a high-temperature polysilicon (HTPS) panel.
Although a projection system and modulation optical system were shown in FIGS. 9a-12 with the beam splitter in reflection mode (or with the image reflecting from the beam splitter), it will be appreciated that a projection system 100b or modulation optical system 150b or 164b can be configured with the beam splitter in transmission mode (or with the image transmitting through the beam splitter), as shown in FIGS. 13, 14 and 15.
Referring to FIG. 13, a projection system 164b is shown with a transmissive spatial light modulator 168 and a beam splitter 88b used in transmission mode (or with the image transmitted through the beam splitter).
Various aspects of projection display systems with wire-grid polarizers or wire-grid polarizing beam splitters are shown in U.S. Pat. Nos. 6,234,634; 6,447,120; 6,666,556; 6,585,378; 6,909,473; 6,900,866; 6,982,733; 6,954,245; 6,897,926; 6,805,445; 6,769,779 and U.S. patent application Ser. Nos. 10/812,790; 11/048,675; 11/198,916; 10/902,319; which are herein incorporated by reference.
Although a rear projection system has been described herein it will be appreciated that a projection system can be of any type, including a front projection system.
The above descriptions of the grid polarizer and various applications have been directed to visible light ( ̃400 nm- ̃700 nm). It will be appreciated, however, that a grid polarizer can be configured for use in infrared light (> ̃700 nm) and ultra-violet light (< ̃400 nm) and related applications. Such a grid polarizer can have a larger period and thicker layers.
While the forgoing examples are illustrative of the principles of the present invention in one or more particular applications, it will be apparent to those of ordinary skill in the art that numerous modifications in form, usage and details of implementation can be made without the exercise of inventive faculty, and without departing from the principles and concepts of the invention. Accordingly, it is not intended that the invention be limited, except as by the claims set forth below.

## Claims

1. An inorganic, dielectric grid polarizer device configured to polarize and further control light incident on the device, comprising:
an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer with one disposed over the other;
the inorganic, dielectric grid polarizer including:
a stack of film layers,
each film layer being formed of a material that is both inorganic and dielectric;
adjacent film layers having different refractive indices;
at least one of the film layers being discontinuous to form a form birefringent layer with an array of parallel ribs in accordance with PGP<λ/2 where PGP is the period of the ribs of the grid polarizer and λ is the wavelength of the light, to polarize any light incident on the grid polarizer by substantially reflecting the light incident on the grid polarizer with s-polarization orientation and substantially transmitting the light incident on the grid polarizer with p-polarization orientation;

the diffraction grating including an array of elongated parallel dielectric ribs in accordance with PDG>λ/2 where PDG is the period of the ribs of the diffraction grating, to substantially diffract any light incident on the diffraction grating with the s-polarization orientation of non-zero order at a non-orthogonal angle, so that the diffraction grating and the grid polarizer together substantially pass the light incident on the device having the p-polarization orientation while substantially diffracting light incident on the device having the s-polarization orientation.

2. The device in accordance with claim 1, wherein the ribs of the grid polarizer have a period less than about 210 nm; and wherein the ribs of the diffraction grating have a period greater than 210 nm and less than 700 nm.

3. The device in accordance with claim 1, wherein the period of the diffraction grating is approximately five times greater than the period of the grid polarizer.

4. The device in accordance with claim 1, wherein the ribs of the grid polarizer have a period less than about 400 nm.

5. The device in accordance with claim 1, wherein the diffraction grating is stacked over the grid polarizer with the incident light incident on the diffraction grating; and
wherein the diffraction grating diffracts reflected light with the s-polarization orientation having non-zero order.

6. The device in accordance with claim 1, further comprising:
a continuous layer disposed between the grid polarizer and the diffraction grating, and having a refractive index less than a refractive index of a supporting substrate.

7. The device in accordance with claim 1, further comprising:
at least two continuous layers disposed between the grid polarizer and the diffraction grating, including an upper layer with a refractive index greater than a refractive index of a lower layer.

8. The device in accordance with claim 1, wherein the device substantially transmits light with p-polarization orientation and substantially diffracts light with the s-polarization orientation of non-zero order, without substantially back reflecting light with the s-polarization orientation of zero order.

9. The device in accordance with claim 1, wherein the ribs of the diffraction grating are split into rib pairs of two relatively adjacent ribs that maintain the period between the rib pairs.

10. The device in accordance with claim 1, wherein the film layers alternate between higher and lower refractive indices.

11. The device in accordance with claim 1, wherein the device consists of only inorganic and dielectric materials.

12. The device in accordance with claim 1, wherein the device is formed without any organic or electrically conductive material.

13. The device in accordance with claim 1, wherein all of the film layers are discontinuous and form the array of parallel ribs of the grid polarizer.

14. An inorganic, dielectric grid polarizer device configured to polarize and further control light incident on the device, comprising:
an optical stack with a diffraction grating and an inorganic, dielectric grid polarizer with one disposed over the other;
the inorganic, dielectric grid polarizer including:
a stack of film layers,
each film layer being formed of a material that is both inorganic and dielectric;
adjacent film layers having different refractive indices;
at least one of the film layers being discontinuous to form a form birefringent layer with an array of parallel ribs in accordance with PGP<λ/2 where PGP is the period of the ribs of the grid polarizer and λ is the wavelength of the light, to polarize any light incident on the grid polarizer by substantially reflecting the light incident on the grid polarizer with s-polarization orientation and substantially transmitting the light incident on the grid polarizer with p-polarization orientation;

the diffraction grating including an array of elongated parallel dielectric ribs in accordance with PDG>λ/2 where PDG is the period of the ribs of the diffraction grating, to substantially diffract any light incident on the diffraction grating with the s-polarization orientation of non-zero order at a non-orthogonal angle, so that the diffraction grating and the grid polarizer together substantially pass the light incident on the device having the p-polarization orientation while substantially diffracting the light incident on the device having s-polarization orientation; and
the ribs of the diffraction grating being split into rib pairs of two relatively adjacent ribs that maintain the period between the rib pairs.

15. The device in accordance with claim 14, wherein the ribs of the grid polarizer have a period less than about 210 nm; and wherein the ribs of the diffraction grating have a period greater than 210 nm and less than 700 nm.

16. The device in accordance with claim 14, wherein the period of the diffraction grating is approximately five times greater than the period of the grid polarizer.

17. The device in accordance with claim 14, wherein the ribs of the grid polarizer have a period less than about 400 nm.

18. The device in accordance with claim 14, wherein the diffraction grating is stacked over the grid polarizer with the incident light incident on the diffraction grating; and
wherein the diffraction grating diffracts reflected light with the s-polarization orientation having non-zero order.

19. The device in accordance with claim 14, further comprising:
a continuous layer disposed between the grid polarizer and the diffraction grating, and having a refractive index less than a refractive index of a supporting substrate.

20. The device in accordance with claim 14, further comprising:
at least two continuous layers disposed between the grid polarizer and the diffraction grating, including an upper layer with a refractive index greater than a refractive index of a lower layer.