# Patent

## Title
Method and apparatus for removing material from microfeature workpieces

## Abstract

Methods and apparatus for removing materials from microfeature workpieces. One embodiment of a subpad in accordance with the invention comprises a matrix having a first surface configured to support a polishing medium and a second surface opposite the first surface. The subpad in this embodiment further includes a hydro-control agent in the matrix. The hydro-control agent has a hydrophobicity that inhibits liquid from absorbing into the subpad. The hydro-control agent, for example, can be coupling agents that are generally hydrophobic, surfactants that are hydrophobic, or other agents that are compatible with the matrix and at least generally hydrophobic.

## Background
CROSS-REFERENCE TO RELATED APPLICATION
This application is a divisional of U.S. patent application Ser. No. 11/218,239 filed Sep. 1, 2005, now U.S. Pat. No. 7,294,049 issued Nov. 13, 2007, which is incorporated herein by reference in its entirety.


TECHNICAL FIELD
The present invention is directed toward methods and apparatus for removing material from microfeature workpieces in the manufacturing of microelectronic devices, micromechanical devices, and/or microbiological devices. Several embodiments of methods and apparatus in accordance with the invention are directed toward subpads and pad assemblies for mechanically removing material from microfeature workpieces.
BACKGROUND
One class of processes for removing materials from microfeature workpieces uses abrasive particles to abrade the workpieces either with or without a liquid solution. For example, mechanical and chemical-mechanical processes (collectively “CMP”) remove material from microfeature workpieces in the production of microelectronic devices and other products. FIG. 1 schematically illustrates a rotary CMP machine 10 with a platen 20, a head 30, and a planarizing pad 40. The CMP machine 10 may also have a conventional subpad 25 between an upper surface 22 of the platen 20 and a lower surface of the planarizing pad 40. A drive assembly 26 rotates the platen 20 (indicated by arrow F) and/or reciprocates the platen 20 back and forth (indicated by arrow G). Since the planarizing pad 40 is attached to the subpad 25, the planarizing pad 40 moves with the platen 20 during planarization.
The head 30 has a lower surface 32 to which a microfeature workpiece 12 may be attached, or the workpiece 12 may be attached to a resilient pad 34 in the head 30. The head 30 may be a weighted, free-floating wafer carrier, or the head 30 may be attached to an actuator assembly 36 (shown schematically) to impart rotational motion to the workpiece 12 (indicated by arrow J) and/or reciprocate the workpiece 12 back and forth (indicated by arrow I).
The planarizing pad 40 and a planarizing solution 44 define a planarizing medium that mechanically and/or chemically-mechanically removes material from the surface of the workpiece 12. The planarizing solution 44 may be a conventional CMP slurry with abrasive particles and chemicals that etch and/or oxidize the surface of the microfeature workpiece 12, or the planarizing solution 44 may be a “clean” non-abrasive planarizing solution without abrasive particles. In most CMP applications, abrasive slurries with abrasive particles are used on non-abrasive polishing pads, and clean non-abrasive solutions without abrasive particles are used on fixed-abrasive polishing pads.
To planarize the microfeature workpiece 12 with the CMP machine 10, the head 30 presses the workpiece 12 face-down against the planarizing pad 40. More specifically, the head 30 generally presses the microfeature workpiece 12 against a planarizing surface 42 of the planarizing pad 40 in the presence of the planarizing solution 44, and the platen 20 and/or the head 30 moves to rub the workpiece 12 against the planarizing surface 42.
One challenge of CMP processing is to consistently produce uniformly planar surfaces on a large number of workpieces in a short period of time. Several variables influence the performance of CMP processes, and it is important to control the variables to uniformly remove material from microfeature workpieces. The mechanical and geometric properties of the subpad 25 and the planarizing pad 40 are variables that can affect the uniformity of the planarized surfaces and the polishing rate of the process. For example, grooves or other features on the planarizing pad 40 will affect the distribution of planarizing solution under the workpieces, and the hardness of the planarizing pad 40 will affect the polishing rate and the local conformity of the planarizing surface 42 to the contour of the workpiece 12. Similarly, the hardness and elasticity of the subpad 25 will affect the global compliance of the polishing pad 40 to the workpiece. As such, it is desirable to control the properties of the subpad 25 and the polishing pad 40.
One type of existing subpad, called a filled subpad, has a polymeric matrix and a filler material in the matrix. The filler material can be polymer spheres, or the filler material can be silica particles, alumina particles, other metal oxide particles, or other inorganic particles that fill spaces within the polymeric matrix. The filler materials are generally used to reduce the manufacturing cost. Conventional subpads often have a polymeric matrix without a filler material. Conventional subpads and existing subpads, however, may not perform well for sufficient periods of time.
One drawback of conventional unfilled subpads and existing filled subpads is that their mechanical properties may change over time and lead to a degradation of performance. For example, the polymeric matrix of most subpads will absorb water and other liquids used in the planarizing solutions. The mechanical properties of the subpads will accordingly change depending upon the extent of liquid absorption. This not only degrades the performance of the CMP process and leads to non-uniformities on the planarized surfaces, but it also shortens the pad life and increases the operating costs of CMP equipment.
Another drawback of subpads with filler materials is that the subpads may not have the optimal mechanical properties. More specifically, many desirable filler materials may not be suitably compatible with the polymeric matrix materials. The lack of compatibility between filler materials and polymeric materials can limit the mechanical properties of the subpads. As a result, subpads with filler materials may not perform at optimal levels. Therefore, it would be desirable to enhance the performance of subpads with filler materials.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic side elevation view of a CMP machine in accordance with the prior art.
FIG. 2 is a flow chart of a method for manufacturing a CMP subpad in accordance with an embodiment of the invention.
FIG. 3 is a schematic cross-sectional view of a pad assembly for use in a CMP process in accordance with an embodiment of the invention.
FIG. 4 is a schematic side elevation view of a portion of a CMP apparatus using a pad assembly in accordance with an embodiment of the invention.



DETAILED DESCRIPTION
A. Overview
The present invention is directed toward methods and apparatus for mechanically and/or chemically-mechanically removing material from microfeature workpieces. Several embodiments of the invention are directed toward subpads that inhibit or otherwise prevent absorption of liquid. Certain subpads in accordance with the invention are at least generally impermeable to the liquids used in the processing solutions. As a result, several embodiments of subpads in accordance with the invention are expected to provide consistent mechanical properties to uniformly planarize the surface of a workpiece and to increase the life of the pad assembly.
One aspect of the invention is directed toward subpads for use in removing material from a microfeature workpiece. An embodiment of such a subpad in accordance with the invention comprises a matrix having a first surface configured to support a polishing medium and a second surface opposite the first surface. The subpad in this embodiment further includes a hydro-control agent in the matrix. The hydro-control agent has a hydrophobicity that inhibits liquid from absorbing into the subpad. The hydro-control agent, for example, can be coupling agents that are generally hydrophobic, surfactants that are hydrophobic, or other agents that are compatible with the matrix and at least generally hydrophobic.
Another embodiment of a subpad in accordance with the invention comprises a polymeric medium having a first surface configured to support a polishing pad and a second surface opposite the first surface. The subpad can further include an inorganic filler material in the polymeric medium, and a hydro-agent attached to the inorganic filler material. The hydro-agent in this embodiment reduces the permeability of the polymeric medium to liquids.
Still another embodiment of a subpad in accordance with the invention comprises a polymeric material having a first surface configured to support a polishing pad and a second surface opposite the first surface. This subpad can further include an inorganic filler material in the polymeric material and a silane coupling agent attached to the inorganic filler material and/or the polymeric material.
Another aspect of the invention is directed toward pad assemblies for use in removing material from microfeature workpieces. An embodiment of one such pad assembly comprises a planarizing medium having a bearing surface configured to contact a workpiece and a backside. The pad assembly can further include a subpad in contact with the backside of the planarizing medium. The subpad comprises a matrix and a hydro-control agent in the matrix, and the hydro-control agent has a hydrophobicity that inhibits liquid from absorbing into the subpad.
Another embodiment of a pad assembly in accordance with the invention comprises a planarizing medium having a bearing surface configured to contact the workpiece and a backside. This pad assembly also includes a subpad in contact with the backside of the planarizing medium. The subpad comprises a polymeric medium, an inorganic filler material in the polymeric medium, and a hydro-agent attached to the inorganic filler material and/or the polymeric medium. The hydro-agent reduces the permeability of the polymeric medium to liquid.
Still another embodiment of a pad assembly in accordance with the invention comprises a planarizing medium having a bearing surface configured to contact the workpiece and a backside, and a subpad in contact with the backside of the planarizing medium. The subpad in this embodiment comprises a polymeric medium, an inorganic filler material in the polymeric medium, and a silane coupling agent attached to the inorganic filler material and/or the polymeric medium.
Another aspect of the invention is directed toward an apparatus for removing material from the microfeature workpiece. An embodiment of one such apparatus includes a support, a pad assembly on the support, and a workpiece holder configured to hold a workpiece relative to the pad assembly. The pad assembly includes a planarizing medium and a subpad having a matrix and a hydro-control agent in the matrix. The hydro-control agent, for example, has a hydrophobicity that inhibits liquid from absorbing into the subpad. In several embodiments, the workpiece holder and/or the support move to rub the workpiece against the bearing surface of the planarizing medium.
Another aspect of the invention is directed toward a method for removing material from a microfeature workpiece. One embodiment of such a method includes rubbing the workpiece against a pad assembly having a planarizing medium and a subpad under the planarizing medium. This method further includes repelling liquid from the subpad to inhibit liquid from absorbing into the subpad.
Another aspect of the invention is directed toward manufacturing subpads for use in removing material from a microfeature workpiece. One embodiment of such a method comprises attaching a hydro-control agent to an inorganic filler material to increase the hydrophobicity of the inorganic filler material. This method further includes mixing a matrix material with the inorganic filler material having the attached hydro-control agent to form a pad mixture, and forming the pad mixture into a subpad.
FIGS. 2-4 illustrate several methods and apparatus for mechanically and/or chemically-mechanically removing material from microfeature workpieces in accordance with embodiments of the invention. Several specific details of the invention are set forth in the following description and in FIGS. 2-4 to provide a thorough understanding of certain embodiments of the invention. One skilled in the art, however, will understand that the present invention may have additional embodiments, or that other embodiments of the invention may be practiced without several of the specific features explained in the following description. The term “microfeature workpiece” is used throughout to include substrates upon which and/or in which microelectronic devices, micromechanical devices, data storage elements, micro-optics, and other features are fabricated. For example, microfeature workpieces can be semiconductor wafers, glass substrates, dielectric substrates, or many other types of substrates. Microfeature workpieces generally have at least several features with critical dimensions less than or equal to 1 μm, and in many applications the critical dimensions of the smaller features on microfeature workpieces are less than 0.25 μm or even less than 0.1 μm. Furthermore, the terms “planarization” and “planarizing” mean forming a planar surface, forming a smooth surface (e.g., “polishing”), or otherwise removing materials from workpieces. Where the context permits, singular or plural terms may also include the plural or singular term, respectively. Moreover, unless the word “or” is expressly limited to mean only a single item exclusive from other items in reference to a list of at least two items, then the use of “or” in such a list is to be interpreted as including (a) any single item in the list, (b) all of the items in the list, or (c) any combination of the items in the list. Additionally, the term “comprising” is used throughout to mean including at least the recited feature(s) such that any greater number of the same features and/or types of other features and components are not precluded.
B. Embodiments of Methods for Manufacturing Subpads
FIG. 2 is a flow chart illustrating a method 100 for manufacturing a CMP subpad used to mechanically remove material from a microfeature workpiece in CMP processing. The method 100 includes a preparation stage 110, a mixing stage 120, and a forming stage 130. The preparation stage 110 includes attaching a hydro-control agent to a filler material and/or a matrix material. The hydro-control agent can be chemically grafted to or physically adsorbed with the filler material. In some embodiments, the hydro-control agent can be chemically anchored through graft polymerizations, such as free radicals. The mixing stage 120 includes mixing a matrix material, the filler material, and the hydro-control agent to form a pad mixture. The mixing stage 120 can be similar to mixing conventional filler materials with matrix materials known in the art of manufacturing CMP subpads. The forming stage 130 can include casting, molding, extrusion, photo-imaging, printing, sintering, coating, or other techniques. For example, the forming stage can include transferring the pad mixture to a mold and curing the pad mixture for a suitable period. The mixture is then cooled to form a molded article including the matrix material, the filler material, and the hydro-control agent. The molded article can then be “skived” into thin sheets to form a suitable subpad.
The preparation stage 110 can be performed using a number of different matrix materials, filler materials, and hydro-control agents. For example, the matrix materials can be polyurethane or other suitable polymeric materials. The filler material can include silica particles, alumina particles, other metal oxide particles, and other types of inorganic particles. In certain embodiments, the filler materials are not limited to including inorganic particles, but rather the filler material can be polymeric microballoons.
The hydro-control agents can include coupling agents and/or surfactants. For example, suitable coupling agents are silanes, such as fluoroalkyltrichlorosilane, or other compounds of silicon and hydrogen (SinH2n+2). The silane coupling agents can also be N-(2-amino-ethyl)-3-aminopropyl-trimethoxysilane (Z-2020), N-(2-(vinylbenzyl-amino)-ethyl)-3-amino-propyl-trimethoxysilane (Z-6032), or 3-glycidoxy-propyl-trimethoxysilane (Z-6040).
Silane coupling agents adhere to inorganic filler materials and the polymeric material because the Si(OR3) portion reacts with the inorganic materials and the organofunctional group reacts with the polymeric materials. The silane coupling agent may be applied to the inorganic filler materials as a pretreatment before being added to the matrix material, or the coupling agent may be applied directly to the matrix material. In one embodiment, the silane coupling agent is attached to the filler material by adsorbing the coupling agent to the surface of the inorganic particles of the filler material. This process, more specifically, can include adsorbing the silane coupling agent to the inorganic particles out of a solution containing the silane coupling agent.
In alternative embodiments, the hydro-control elements can potentially be surfactants that are typically physically adsorbed to the inorganic filler materials. Typical surfactants are water-soluble, surface-active agents that include a hydrophobic portion, such as a long alkyl chain. The surfactants can be adsorbed or otherwise attached to the filler material, or the surfactants can be mixed with the polymeric matrix material.
The hydro-control agent for use in the preparation stage 110 is typically selected to increase the hydrophobicity of the filler material. As a result, when the filler material, hydro-control agent, and matrix material are mixed in the mixing stage 120, the hydrophobic nature of the hydro-control agent is at least partially imparted to the pad mixture. The individual subpads formed from the pad mixture accordingly have a higher hydrophobicity compared to subpads formed of the same matrix material and filler material without the hydro-control agent.
The following examples provide specific embodiments of the method 100 for manufacturing CMP subpads. Several aspects of these specific examples, such as mixing methods and curing times/temperatures, are well known in the art and not included herein for purposes of brevity. As such, the following examples are not to be limiting or otherwise construed as the only embodiments of the invention.
EXAMPLE 1


    
    
        1) Adsorb or otherwise attach fluoroalkyltrichlorosilane molecules to silica particles.
        2) Mix the silica particles and the fluoroalkyltrichlorosilane molecules with a polymeric material to form a pad mixture.
        3) Optionally mold, cast or extrude the pad mixture of the polymeric material, silica particles, and fluoroalkyltrichlorosilane molecules.
        4) Cure the pad mixture.
        5) Optionally cut the cured pad mixture into subpads.
    
    


EXAMPLE 2


    
    
        1) Adsorb or otherwise attach fluoroalkyltrichlorosilane molecules to alumina particles.
        2) Mix the alumina particles and the fluoroalkyltrichlorosilane molecules with a polymeric material to form a pad mixture.
        3) Optionally mold, cast or extrude the pad mixture of the polymeric material, silica particles, and fluoroalkyltrichlorosilane molecules.
        4) Cure the pad mixture.
        5) Optionally cut the cured pad mixture into subpads.
    
    


EXAMPLE 3


    
    
        1) Mix fluoroalkyltrichlorosilane with a polymeric material.
        2) Add silica particles to the mixture of fluoroalkyltrichlorosilane and polymeric material to form a pad mixture.
        3) Optionally mold, cast or extrude the pad mixture.
        4) Cure the pad mixture.
        5) Optionally cut the pad mixture into subpads.
    
    


EXAMPLE 4


    
    
        1) Mix fluoroalkyltrichlorosilane with a polymeric material.
        2) Add alumina particles to the mixture of fluoroalkyltrichlorosilane and polymeric material to form a pad mixture.
        3) Optionally mold, cast or extrude the pad mixture.
        4) Cure the pad mixture.
        5) Optionally cut the pad mixture into subpads.
    
    


C. Embodiments of Apparatus and Methods for Removing Material
FIG. 3 is a schematic cross-sectional view of a subpad 200 in accordance with one embodiment of the invention. In this embodiment, the subpad 200 includes a planarizing medium 210 (e.g., a planarizing pad) having a bearing surface 212 and a backside 214. The bearing surface 212 is configured to contact the surface of a microfeature workpiece to mechanically and/or chemically-mechanically remove material from the workpiece. The planarizing medium 210 can have grooves, raised features (e.g., truncated cones or pyramids), or other structures that promote or otherwise control the distribution of planarizing solution. Additionally, the planarizing medium 210 can include abrasive particles fixed at the bearing surface 212, or in other embodiments the planarizing medium does not include fixed-abrasive particles.
The pad assembly 200 further includes a subpad 220 attached to the backside 214 of the planarizing medium 210. In the particular embodiment shown in FIG. 3, the subpad 220 includes a matrix 222 and an enhanced filler material 230. The matrix 222 can be a polymeric material, such as polyurethane or other suitable polymers. The enhanced filler material 230 can include a filler element 232 and a hydro-control agent 234 attached to the filler element 232. As set forth above, the filler element 232 can be an inorganic particle or another type of particle, and the hydro-control agent 234 can be a compound that increases the hydrophobicity of the matrix 222 and/or the filler element 232. The hydro-control agent can accordingly be any of the coupling agents and/or surfactants set forth above. The enhanced filler material 230 imparts a high hydrophobicity to the subpad 220 that inhibits or otherwise prevents liquids from absorbing into the matrix 222. In several embodiments, the subpad is expected to be at least substantially impermeable to liquids. As a result, the subpad 220 is expected to have consistent mechanical properties for a long period of time because the liquids in the planarizing solution are not likely to affect the size, compressability, and/or elasticity of the matrix material 222 as much as subpads without the hydro-control agent 234. The subpad 220, therefore, is expected to provide good uniformity and have a long operating life.
FIG. 4 is a schematic view of a machine 300 that uses an embodiment of the pad assembly 200 set forth above with respect to FIG. 3. The machine 300 includes a support 320, a workpiece holder or head 330, and the pad assembly 200. In the illustrated embodiment, the head 330 has a lower surface 332 in a retaining cavity and a resilient pad 334 in the retaining cavity. The microfeature workpiece 12 can be attached to the resilient pad 334 or directly to the lower surface 332 of the head 330.
The machine 300 further includes a controller 360 for operating the head 330 and/or the support 320 to rub the workpiece 12 against the bearing surface 212 of the planarizing medium 210. In operation, a planarizing solution 334 can be dispensed onto the bearing surface 212 to remove material from the workpiece 12. As explained above, the liquids from the planarizing solution 334 are inhibited from absorbing into the subpad 220 by the enhanced filler material 230.
From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the spirit and scope of the invention. Accordingly, the invention is not limited except as by the appended claims.

## Claims

1. A method for removing material from a microfeature workpiece, comprising:
rubbing the workpiece against a pad assembly having a planarizing medium and a subpad supporting the planarizing medium, the subpad including a matrix material, a filler material in the matrix material, and a hydrophobic hydro-control agent attached to the filler material within the matrix material; and
repelling liquid from the subpad with the hydro-control agent mixed into the subpad to inhibit liquid from absorbing into the subpad.

2. A method for removing material from a microfeature workpiece, comprising:
rubbing the workpiece against a pad assembly having a planarizing medium and a subpad supporting the planarizing medium; and
repelling liquid from the subpad with a hydro-control agent mixed into the subpad to inhibit liquid from absorbing into the subpad, wherein the hydro-control agent comprises a surfactant.

3. The method of claim 1 wherein the matrix material of the subpad comprises a polymeric matrix material, and wherein the filler material comprises an inorganic filler material in the polymeric matrix material.

4. The method of claim 3 wherein the hydro-control agent comprises a silane coupling agent attached to the inorganic filler material.

5. The method of claim 4 wherein the silane coupling agent comprises fluoroalkyltrichlorosilane.

6. The method of claim 3 wherein the hydro-control agent comprises a surfactant.

7. The method of claim 3 wherein the inorganic filler material comprises a metal oxide.

8. The method of claim 7 wherein the metal oxide is silica or alumina, and wherein the hydro-control agent comprises fluoroalkyltrichlorosilane.

9. A method for removing material from a microfeature workpiece, comprising:
contacting a surface of the workpiece with a pad assembly, the pad assembly having a polishing medium and a subpad configured to support the polishing medium, wherein the subpad includes a matrix material, a filler material in the matrix material, and a hydrophobic hydro-control agent attached to the filler material within the matrix material;
abrading the surface with the polishing medium; and
repelling liquid from the subpad to inhibit absorption of liquid into the subpad, wherein the hydrophobic hydro-control agent inhibits the liquid from being absorbed into the filler material.

10. The method of claim 9 wherein the hydro-control agent comprises a silane coupling agent.

11. The method of claim 9 wherein the hydro-control agent comprises a silane coupling agent, and wherein the filler material comprises a metal oxide and the silane coupling agent comprises fluoroalkyltrichlorosilane.

12. The method of claim 11 wherein the metal oxide is silica or alumina.

13. The method of claim 9 wherein the hydro-control agent comprises a surfactant.

14. A method for removing material from a microfeature workpiece, comprising:
attaching the workpiece to a head of a planarizing machine having a polishing pad, the polishing pad having a bearing surface and a backside facing opposite from the bearing surface;
supporting the polishing pad at the backside with a subpad, the subpad comprising a polymer matrix, a filler material in the polymer matrix, and a hydrophobic hydro-control agent mixed throughout the polymer matrix and attached to the filler material;
dispensing a planarizing solution onto the bearing surface;
contacting a workpiece surface to the bearing surface and abrading the workpiece surface with the planarizing solution; and
preventing liquids in the planarizing solution from absorbing into the subpad, wherein the preventing step is provided by the hydro-control agent.

15. The method of claim 14 wherein the hydro-control agent is bonded to the polymer matrix.

16. The method of claim 14 wherein the filler material of the subpad comprises an organic filler material in the polymer matrix, and wherein the hydro-control agent is attached to the organic filler material.

17. The method of claim 16 wherein the organic filler material comprises a metal oxide and the hydro-control agent comprises a silane coupling agent.

18. The method of claim 14 wherein the hydro-control comprises a surfactant.

19. A method for removing material from a microfeature workpiece, comprising:
supporting a polishing medium with a subpad, wherein the subpad includes a polymeric medium, an organic filler material mixed throughout the polymeric medium, and a hydro-control agent attached to the organic filler material, and wherein the hydro-control agent reduces the permeability of the polymeric medium to liquids;
dispensing a planarizing solution on the polishing medium;
moving the workpiece against the polishing medium to abrade the workpiece with the planarizing solution; and
repelling liquids in the planarizing solution from the subpad with the hydro-control agent.

20. The method of claim 19 wherein the hydro-control agent comprises a silane coupling agent.

21. The method of claim 20 wherein the inorganic filler material comprises a metal oxide.

22. The method of claim 21 wherein the metal oxide is silica or alumina, and wherein the silane coupling agent comprises fluoroalkyltrichlorosilane.

23. The method of claim 19 wherein the hydro-control agent comprises a surfactant.

24. A method for removing material from a microfeature workpiece, comprising:
providing a pad assembly having a planarizing medium and a subpad supporting the planarizing medium, wherein the subpad includes a polymer matrix, a filler material in the polymer matrix, and a hydro-control agent mixed throughout the polymer matrix and attached to the filler material;
rubbing the workpiece against the planarizing medium; and
repelling liquid from the subpad with the hydro-control agent mixed into the subpad to inhibit liquid from absorbing into the subpad.