# Patent

## Title
Microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods

## Abstract

Microfeature workpieces having conductive vias formed by chemically reactive processes, and associated systems and methods are disclosed. A method in accordance with one embodiment includes disposing a conductive lining on walls of a via in a microfeature workpiece, so that a space is located between opposing portions of the lining facing toward each other from opposing portions of the wall. The method can further include chemically reacting the lining with a reactive material to form a chemical compound from a constituent of the reactive material and a constituent of the lining. The method can still further include at least partially filling the space with the compound. In particular embodiments, the conductive lining includes copper, the reactive material includes sulfur hexafluoride, and the chemical compound that at least partially fills the space in the via includes copper sulfide.

## Background
TECHNICAL FIELD
The present disclosure is directed generally toward microfeature workpieces having conductive interconnect structures formed by chemically reactive processes, and associated systems and methods, including microfeature workpieces having conductive interconnect vias at least partially filled with copper sulfide.
BACKGROUND
Microelectronic imagers are used in digital cameras, wireless devices with picture capabilities, and many other applications. Many cell phones and Personal Digital Assistants (PDAs), for example, incorporate microelectronic imagers for capturing and sending pictures. The growth rate of microelectronic imagers has been steadily increasing as they become smaller and produce better images with higher pixel counts.
Microelectronic imagers include image sensors that use Charged Coupled Device (CCD) systems, Complementary Metal-Oxide Semiconductor (CMOS) systems, or other solid-state systems. CCD image sensors have been widely used in digital cameras and other applications. CMOS image sensors are also quickly becoming very popular because they are expected to have low production costs, high yields, and small sizes. CMOS image sensors can provide these advantages because they are manufactured using technology and equipment developed for fabricating semiconductor devices. CMOS image sensors, as well as CCD image sensors, are accordingly “packaged” to protect their delicate components and to provide external electrical contacts.
Many imaging devices include semiconductor dies having image sensors located on a front surface of the die to receive incoming radiation. The dies also include bond pads for electrically coupling the sensors to other circuit elements. In order to prevent the bond pads from interfering with the operation of the sensors, or limiting the size and/or location of the sensors, the bond pads can be positioned on the opposite side of the die from the sensors (e.g., on the back surface of the die). Through-wafer interconnects (TWIs) are used to conduct electrical signals from the sensors and associated internal circuitry, through the die to the bond pads at the back surface. The TWIs are typically formed by making a blind via in the die, filling the via with solder, and then grinding the back surface of the die to expose the blind end of the via, which is used to form the bond pad. A solder ball can then be attached to the bond pad and can be reflowed to couple the die to external devices.
One potential drawback associated with the foregoing approach is that, when the solder ball is later reflowed to electrically attach the die to external devices, the solder within the via may also tend to melt or at least soften. During the ensuing attach process, the solder within the via can be pulled at least partially out of the via, or can otherwise undergo deformations and/or movement that can adversely affect the electrical continuity of the TWI. In some instances, the electrical continuity of the TWI may be disrupted, causing the electrical connection between the image sensor and the external devices to fail.
Another potential drawback associated with the foregoing approach is that the number of steps required to produce the TWI increases the cost of making the associated die. For example, the use of solder in the blind via requires forming a vent hole to allow gases within the via to escape as the solder enters. Even so, the solder may include voids, which can disrupt electrical continuity and in subsequent processes, expand and create electrical shorts. Still further, the processes required to dispose the solder in the via are typically high-temperature processes, which can use up a significant portion of the thermal budget of the die. Accordingly, there is a need for an improved process for forming microfeature workpiece electrical connections, including connections between dies and external devices.



BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1A is a partially schematic illustration of a representative microfeature workpiece carrying microfeature dies configured in accordance with embodiments of the invention.
FIG. 1B is a schematic illustration of a microfeature die singulated from the workpiece shown in FIG. 1A.
FIG. 1C is a schematic illustration of a system which can include one or more microfeature dies in accordance with embodiments of the invention.
FIG. 1D is a partially schematic, cross-sectional illustration of a portion of the workpiece prior to formation of a conductive structure in accordance with an embodiment of the invention.
FIG. 1E is an enlarged view of a portion of the workpiece shown in FIG. 1A.
FIGS. 2A-2K illustrate a process for introducing conductive material in a via by using a chemical reaction in accordance with an embodiment of the invention.
FIG. 3 is an illustration of a substrate having features in accordance with another embodiment of the invention.



DETAILED DESCRIPTION
The following disclosure describes several embodiments of microfeature workpieces having conductive vias formed by chemically reactive processes, and associated systems and methods. Specific details of several embodiments of the invention are described below with reference to CMOS image sensors to provide a thorough understanding of these embodiments, but other embodiments can use CCD image sensors or other types of solid-state imaging devices. In still further embodiments, aspects of the invention can be practiced in connection with devices that do not include image sensors. Such devices include SRAM, DRAM, Flash, and other devices. In particular embodiments, the devices can be stacked on each other, and the vias can provide electrical communication among the stacked devices.
As used herein, the terms “microfeature workpiece” and “workpiece” refer to substrates on and/in which microfeature electronic devices (including, but not limited to, image sensors) are integrally formed. A microfeature workpiece can include a wafer, and/or individual dies or combinations of dies that make up the wafer. Typical microfeature electronic devices of the workpiece include microfeature electronic circuits or components, thin-film recording heads, data storage elements, microfluidic devices and other products. Micromachines and micromechanical devices are included within this definition because they are manufactured using much of the same technology that is used in the fabrication of integrated circuits. The substrates can be semi-conductive pieces (e.g., doped silicon wafers or gallium arsenide wafers), non-conductive pieces (e.g., various ceramic substrates), or conductive pieces. In some cases, the workpieces are generally round, and in other cases the workpieces can have other shapes, including rectilinear shapes. Several embodiments of systems and methods for forming conductive structures in connection with microfeature workpiece fabrication are described below. A person skilled in the relevant art will understand, however, that the invention has additional embodiments, and that the invention may be practiced without several of the details of the embodiments described below with reference to FIGS. 1A-3.
FIG. 1A is a microfeature workpiece 100 in the form of a wafer 170 that includes multiple microfeature dies 120. At least some of the processes described below may be conducted on the microfeature workpiece 100 at the wafer level, and other processes may be conducted on the individual microfeature dies 120 of the microfeature workpiece 100 after the dies 120 have been singulated from the larger wafer 170. Accordingly, unless otherwise noted, structures and methods described below in the context of a “microfeature workpiece” can apply to the wafer 170 and/or the dies 120 that are formed from the wafer 170.
FIG. 1B is a schematic illustration of an individual die 120 after it has been singulated from the wafer 170 shown in FIG. 1A. The die 120 can include operable microelectronic structure, optionally encased within a protective encapsulant. Pins, bond pads, solder balls, and/other conductive structures provide electrical communication between structures within the die 120 and structures/devices located external to the die.
Individual dies may be incorporated into any of a myriad of larger and/or more complex systems 180, a representative one of which is shown schematically in FIG. 1C. The system 180 can include a processor 181, a memory 182, input/output devices 183, and/or other subsystems or components 184. Microfeature workpieces (e.g., in the form of microfeature dies and/or combinations of microfeature dies) may be included in any of the components shown in FIG. 1C. The resulting system 180 can perform any of a wide variety of computing, processing, storage, sensor and/or other functions. Accordingly, representative systems 180 include, without limitation, computers and/or other data processors, for example, desktop computers, laptop computers, Internet appliances, hand-held devices (e.g., palm-top computers, wearable computers, cellular or mobile phones, multi-processor systems, processor-based or programmable consumer electronics, network computers, mini computers). Other representative systems 180 include cameras, light sensors, servers and associated server subsystems, display devices, and/or memory devices. Components of the system 180 may be housed in a single unit or distributed over multiple, interconnected units, e.g., through a communications network. Components can accordingly include local and/or remote memory storage devices, and any of a wide variety of computer-readable media, including magnetic or optically readable or removable computer disks.
FIG. 1D is a side cross-sectional view of a portion of an imager workpiece 100 prior to the formation of conductive interconnect structures in accordance with an embodiment of the invention. The workpiece 100 can include a substrate 101 with a plurality of dies 120 (e.g., imaging dies) formed in and/or on the substrate 101. The substrate 101 has a first side or surface 102 and a second side or surface 103. The substrate 101 can be a semiconductor wafer, with the dies 120 arranged in a die pattern on the wafer. Individual dies 120 can include integrated circuitry 121, a plurality of terminals or bond sites 122 (e.g., bond pads) electrically coupled to the integrated circuitry 121 with couplers 126, and an image sensor 112. The image sensors 112 can be CMOS image sensors or CCD image sensors for capturing pictures or other images in the visible spectrum. In other embodiments, the image sensors 112 can detect radiation in other spectrums (e.g., IR or UV ranges). The bond sites 122 shown in FIG. 1D are external features at the first side 102 of the substrate 101. In other embodiments, however, the bond sites 122 can be internal features that are embedded at an intermediate depth within the substrate 101. First and second dielectric layers 104 and 105 can be located at the first side 102 to protect the underlying substrate 101.
FIG. 1E is a side cross-sectional view of an area 1E shown in FIG. 1D. This portion of the workpiece 100 is representative of devices that include, but are not limited to, imager devices. Accordingly, the following discussion is also not limited to imager devices. The second dielectric layer 105 has been patterned and etched to expose the bond site 122. A mask 106 is applied over the second dielectric layer 105 and patterned, as shown in FIG. 1E. The mask 106 can be a layer of resist that is patterned according to the arrangement of bond sites 122 on the substrate 101. Accordingly, the mask 106 can have an opening over each bond site 122.
Referring next to FIG. 2A, a via 130 has been formed in the workpiece 100 so as to extend into the substrate 101 through the bond site 122 and the first surface 102. The via 130 can be formed using any of a variety of techniques, including etching or laser drilling. The via 130 can be a blind via, as shown in FIG. 2A, e.g., a via that does not extend entirely through the workpiece 100 and/or the substrate 101. In other embodiments, the via 130 can extend entirely through the workpiece 100 and/or the substrate 101, as indicated in dashed lines in FIG. 2A. Further details of representative methods for forming the via 130 are disclosed in pending U.S. patent application Ser. No. 11/169,546, filed Jun. 28, 2005 and incorporated herein by reference. A third dielectric layer 132 is deposited onto the workpiece 100 to line the sidewalls 131 of the via 130 within the substrate 101. The third dielectric layer 132 electrically insulates components in the substrate 101 from an interconnect structure that is subsequently formed in the via 130.
Referring to FIG. 2B, a suitable etching process (e.g., a spacer etch) is used to remove portions of the third dielectric layer 132 that extend over the bond site 122. Accordingly, at least part of the bond site 122 can be exposed for electrical coupling to conductive structures in the via 130, as is described in greater detail below.
As shown in FIG. 2C, a conductive barrier layer 133 is then deposited onto the workpiece 100 over the third dielectric layer 132 so as to be in electrical contact with the bond site 122. The barrier layer 133 generally covers the second dielectric layer 105 and the bond site 122 in addition to the third dielectric layer 132. In one embodiment, for example, the barrier layer 133 is a layer of tantalum that is deposited onto the workpiece 100 using a physical vapor deposition (PVD) process. The thickness of the barrier layer 133 is about 150 Angstroms. In other embodiments, the barrier layer 133 may be deposited onto the workpiece 100 using other vapor deposition processes, such as chemical vapor deposition (CVD), and/or may have a different thickness. The composition of the barrier layer 133 is not limited to tantalum, but rather may be composed of tungsten or other suitable materials.
Referring next to FIG. 2D, a seed layer 134 is deposited onto the barrier layer 133. The seed layer 134 can be deposited using vapor deposition techniques, such as PVD, CVD, atomic layer deposition, and/or plating. The seed layer 134 can be composed of copper or other suitable materials. The thickness of the seed layer 134 may be about 2000 Angstroms, but can be more or less depending upon the depth and aspect ratio of the via 130. In several embodiments, the seed layer 134 may not uniformly cover the barrier layer 133, such that the seed layer 134 has voids 135 within the via 130. This can cause non-uniform electroplating in the via 130 and across the workpiece 100. When the seed layer 134 is deficient, it may be enhanced using a process that fills voids or noncontinuous regions of the seed layer 134 to form a more uniform seed layer. Referring to FIG. 2E, for example, voids 135 and/or noncontinuous regions of the seed layer 134 have been filled with additional material 136, such as copper or another suitable material. One suitable seed layer enhancement process is described in U.S. Pat. No. 6,197,181, which is incorporated by reference.
Referring next to FIG. 2F, a resist layer 107 is deposited onto the seed layer 134 and is patterned to have an opening 108 over the bond site 122 and the via 130. A first conductive lining or layer 137 is then deposited onto the exposed portions of the seed layer 134 in the via 130. The first conductive layer 137 can include copper that is deposited onto the seed layer 134 in an electroless plating operation, or an electroplating operation, or by another suitable method. In the illustrated embodiment, the thickness of the first conductive layer 137 is about 1 micron. In other embodiments, the first conductive layer 137 may include other suitable materials and/or have a different thickness. A second conductive layer 147 can then be deposited on the first conductive layer 137. The second conductive layer 147 can include nickel or another diffusion barrier that prevents or restricts migration of the material (e.g., copper) in the first conductive layer 137.
A third conductive layer 148 can then be disposed on the second conductive layer 147. The third conductive layer 148 can also include copper. The combined thicknesses of the conductive layers is such that a space is located between opposing portions of the last-formed layer that face each other across the via 130.
In particular embodiments, the third conductive layer 148 is deliberately configured so as to withstand a loss of material during the formation of a conductive chemical compound in the via 130. Accordingly, the thickness of the third conductive layer 148 can be selected based on how much material from the third conductive layer 148 is expected to be used up in the formation of the compound. The second conductive layer 147 can act as a barrier to limit the loss of material to material from the third conductive layer 148, and prevent a loss of material from the first conductive layer 137. Alternatively, the second conductive layer 147 and the third conductive layer 148 can be eliminated, and the first conductive layer 137 alone can be made thick enough to withstand the loss of material during the reaction process. Further details of an arrangement in which both the second and third layers 147, 148 are present are described below with reference to FIGS. 2H and 3. However, it will be understood that aspects of the invention may also be practiced with just the first conductive layer 137, provided it is thick enough. Further details of several embodiments for disposing the conductive layers in the via 130 are disclosed in pending U.S. patent application Ser. No. 11/169,838, filed Jun. 28, 2005 and incorporated herein by reference.
In many existing processes, the open space in the via 130 is filled with solder (e.g., a mixture of tin, silver and/or other constituents), while the solder is in a liquid state. Accordingly, a vent hole is formed between the bottom of the via 130 and the second side 103 of the workpiece 101 to allow gases within the via 130 to escape as the solder enters. In certain embodiments of the present invention, this step can be eliminated. Instead, as shown schematically in FIG. 2G, the workpiece 100 can be placed in a reaction chamber 150 (e.g., a plasma chamber) and exposed to a reactive material 151 (e.g., a plasma). The reactive material 151 chemically reacts with one or more of the conductive layers in the via 130 to form a new chemical compound that fills or at least partially fills the via 130. A reaction mask 109 can be positioned over the conductive material at the bond site 122 (external to the via 130) to protect this portion of the conductive material from exposure to the reactive material 151. Accordingly, the reaction mask 109 can have openings that are about the same size as the openings in the mask 106 (FIG. 1B) used to form the vias 130.
In a particular embodiment, the reactive material 151 includes sulfur hexafluoride (SF6), which chemically reacts with copper in the third conductive layer 148 or, if the second and third conductive layers 147, 148 are not included, then in copper present in the first conductive layer 137. The reaction between the sulfur hexafluoride and the copper in the via 130 forms enough copper sulfide (CuxSy) to fill the open cross-sectional space of the via 130 over at least a portion of its length (and, in many embodiments, over the entire length of the space). The copper sulfide can include CuS, Cu2S, Cu9S5, and/or other chemical combinations of copper and sulfur atoms. The copper sulfide in the via 130 may have a gradient of copper atoms, typically with more copper atoms toward the third conductive layer 148. For example, Cu2S may be present adjacent to the third conductive layer 148, and CuS may be present toward the center of the via 130.
Controlling the amount of copper in the newly formed chemical compound can in turn control the stability of the compound. For example, the compound can have a chemical formula of CuxS, with x greater than or equal to one, and less than or equal to two. Higher values of x within this range are expected to produce more stable compounds. In at least some cases, the compound can be annealed for additional stability.
In association with introducing the reactive material 151, the workpiece 100 can be exposed to a suitable reducing agent to remove copper oxides from the third conductive layer 148. For example, the workpiece 100 can be exposed to a hydrogen-nitrogen plasma in a chemical etch process, or an argon plasma in a mechanical etch process. Removing the oxide exposes the more reactive copper below, and results in better physical and electrical contact between the pre-existing copper and the newly formed copper sulfide. The oxide can be removed before or simultaneously with exposing the workpiece 100 to the reactive material 151.
Copper sulfide is a moderate conductor, and is generally less conductive than pure copper. Accordingly, if the dies formed from the workpiece 101 require a higher conductivity in the via 130 than is provided by copper sulfide, the process is performed so as to leave at least some copper in the via 130. For example, if the third conductive layer 148 is not entirely consumed in the reaction with the sulfur hexafluoride, some copper will remain in the third conductive layer 148. If the entire third conductive layer 148 is consumed in the chemical reaction, then the second conductive layer 147 can act as a stop layer and can accordingly preserve the copper in the first conductive layer 137 to provide a relatively high conductivity link in the via 130. In still another embodiment, in which the second and third conductive layers 147, 148 are not present, the amount of copper present in the first conductive layer 137 can exceed the amount copper consumed in the reaction that forms the copper sulfide so as to provide the relatively high conductivity link. On the other hand, if the copper sulfide alone provides sufficient conductivity in the via 130 for the intended purposes of the resulting die, the entire amount of copper present at the walls 131 of the via 130 can be used up in the chemical reaction with the sulfur hexafluoride.
FIG. 2H illustrates a volume of a conductive compound 140 (e.g., the copper sulfide or another fill material) formed in the via 130 using the foregoing chemical process. Accordingly, the conductive compound 140 can include at least one constituent from the plasma 151 (FIG. 2G), and at least one constituent from the side walls 131 of the via 130. The conductive compound 140, together with any other electrically conductive materials in the via 130, can form an interconnect structure 160. The interconnect structure 160 has a first end 142 proximate to the bond site 122, and a second end 143 toward the bottom of the via 130. In an embodiment illustrated in FIG. 2H, the conductive compound 140 fills or at least approximately fills the remaining volume in the via 130. In other embodiments, the conductive compound 140 can be used to fill only a portion of the via 130.
After the conductive compound 140 is formed in the via 130, the workpiece 100 can be further processed prior to coupling it to other components. For example, referring to FIG. 21, the reaction mask 109 (FIG. 2H) and the resist layer 107 (FIG. 2H) are removed (e.g., by a stripping process), as are the portions of the seed layer 134 and the barrier layer 133 that extend beyond the bond site 122 (e.g., using a wet chemistry etch and a dry plasma etch, respectively). A CMP process can be used to flatten the surface (as will be described below with reference to FIG. 2K), or the remaining conductive structures can form a stud, as shown in FIG. 2I.
As is also shown in FIG. 2I, material from the second side 103 of the workpiece 100 can be removed in a backgrinding process to expose the conductive material at the second end 143 of the interconnect structure 160. A passivation layer 111 can be added to the second side 103 of the workpiece 100, and a bond pad 110 can be formed at the second end 143 of the interconnect structure 160 to facilitate bonding the workpiece 100 to other devices and/or structures. In a particular aspect of this embodiment, material can be removed from the second side 103 until the first conductive layer 137 is exposed. In other embodiments, additional material can be removed to expose the second conductive layer 147, the third conductive layer 148, or the conductive compound 140.
FIG. 2J illustrates the workpiece 100 after the reaction mask 109 (FIG. 2I) has been removed. At this point, conductive couplers 129 (e.g., solder balls or stud bumps) can be attached to the workpiece 100 at the bond pad 110 and at the first end 142 of the interconnect structure 160. Whether conductive couplers 129 are attached to the first end 142, the second end 143, or both ends of the interconnect structure 160 can depend on factors that include the characteristics of the workpiece 100 and/or the uses to which the workpiece 100 will be put. For example, if the workpiece 100 includes an imager die, it typically will include conductive couplers 129 at the second end 143 but not the first end 142. If the workpiece 100 includes a DRAM die, it may include conductive couplers 129 at both the first and second ends 142, 143 if it is to be placed in the middle of a stack of such dies, or at only one end if it is to be placed at the top or bottom of such a stack. In another arrangement, shown in FIG. 2K, the first end 142 of the interconnect structure 160 can be further processed to expose the bond site 122 at the first end 142. Accordingly, suitable etching, CMP, and/or other processes can be used to remove the materials (including a portion of the conductive compound 140) overlying the bond site 122. Conductive couplers 126 (shown as solder balls in FIG. 2K) are then attached to the workpiece 100 at the bond site 122 and the bond pad 110 to electrically connect the workpiece 100 to other workpieces (e.g., in a stacked arrangement), and/or to other components, for example, printed circuit boards, interposer boards, and/or any of a myriad of other suitable structures or devices.
Embodiments of the process described above with reference to FIGS. 1A-2K include disposing a conductive lining on the walls of a via 130 in a microfeature workpiece 100, with opposing portions of the lining facing toward each other from opposing portions of the wall and bordering a space within the via. The method can further include chemically reacting the lining with a reactive material to form a chemical compound from a constituent of the reactive material and a constituent of the lining. The method can still further include at least partially filling the space with the chemical compound. In a particular embodiment, the chemical reaction is between copper and sulfur hexafluoride and forms copper sulfide, though it can be between (or among) other constituents in other embodiments. The chemical reaction is expected to proceed quickly, which can reduce the amount of time required to form the conductive interconnect structure 160 in the workpiece 100. In particular, the reaction is expected to proceed more quickly than the process of disposing a solder material in the via 130, or plating material into the via 130. The resulting microfeature workpiece can include a microfeature substrate having a via with opposing via wall portions, and a first conductive material disposed in a layer adjacent to the opposing wall portions. The workpiece can further include a second conductive material disposed adjacent to the first conductive material, with the second conductive material entirely filling a cross-sectional dimension of the via between opposing portions of the layer over at least part of a length of the via. The second conductive material can include a chemical compound that in turn includes a constituent of the layer. For example, the first conductive material can include copper, and the second conductive material can include copper sulfide. In further particular aspects, neither of the conductive materials includes tin or lead or solder.
In particular embodiments, the via can be made to extend through less than an entire thickness of the workpiece (e.g., forming a blind via), and reacting the lining can include reacting the lining without first opening a vent hole at a blind end of the via opening. As discussed above, the vent hole is typically provided in the via to allow gases to escape from the via as liquid solder is disposed in the via. Because certain embodiments described above include a chemical reaction process rather than flowing liquid solder into the via, the need for a vent hole is eliminated. This not only eliminates the amount of time required to form the vent hole, but also eliminates the potential for damage to, and/or contamination of, the workpiece 101 which may result from forming the vent hole.
In at least some of the embodiments described above, the conductive compound 140 is expected to be free or essentially free of voids. It is expected that the conductive compound 140 can form a more continuous electrical path in the interconnect structure 160. The absence of voids can also reduce or eliminate the presence of gas molecules in the interconnect structure 160, which might otherwise expand and potentially damage the interconnect structure 160 when the workpiece 100 undergoes subsequent processes at elevated temperatures.
The formation of the chemical compound in the via can be performed at relatively low temperatures. For example, the workpiece 100 can be exposed to a sulfur hexafluoride plasma at a temperature of about 60° C. This temperature may be varied and controlled to achieve a target reaction rate. This is unlike the process of filling the via 130 with solder, which requires an elevated temperature and which can accordingly use up a portion of the limited thermal budget associated with the workpiece 100. As a result, workpieces 100 that include interconnect structures formed in the manners described above are expected to be more robust because the workpieces 100 may be exposed to fewer high temperature processes. Furthermore, solder typically requires flux to remove surface oxides and provide for a good electrical and physical connection between the solder and the adjacent conductive structure. Embodiments of the chemical reactions described above do not require flux, and oxide removal can instead be performed by exposing the workpiece to a suitable plasma, prior to introducing the reactive material. This process is expected to be faster and/or more efficient than using a flux.
Still further, the conductive compound 140 can have a melting point higher than that of solder. For example, CU2S has a reported melting point of 1100° C. and CuS has a reported decomposition temperature of about 220° C. Cu2S is expected to have a decomposition temperature in the range of 327° C. to 527° C. when on platinum, and a decomposition temperature of about 677° C. when on ruthenium. Accordingly, when the temperature of the workpiece 100 is elevated during subsequent process step (e.g., reflow steps), the conductive compound 140 within the via 130 will not tend to reflow, melt, or otherwise change phase. As a result, the interconnect structure 160 is expected to be more physically and electrically robust than are many existing interconnect structures.
FIG. 3 illustrates a workpiece 300 having certain structures that differ from the workpiece 100 described above with reference to FIGS. 1A-2K. For example, the workpiece 300 can include an interconnect structure 360 having a different lateral extent than that of the interconnect structure 160 described above. In a particular arrangement, the conductive material extending laterally away from the via 130 (e.g., in the conductive layers 137, 147, 148) is not protected by a mask during the chemical reaction process. Instead, a reaction mask 309 having larger openings than those of the reaction mask 109 (FIG. 2G) is positioned over the workpiece 100. Accordingly, the conductive compound 140 formed in the chemical reaction also extends laterally away from the via 130. A solder ball or other conductive coupler can be attached directly to the laterally-extending conductive compound 140, for example, if the conductivity of the conductive compound 140 is high enough. If it is not, the conductive compound 140 and other materials overlying the bond site 122 can be removed to expose the (generally more conductive) bond site 122. Though not shown in FIG. 3, the reaction mask 309, and the resist layer 107 will be removed, as will those portions of the seed layer 134 and the barrier layer 133 that extend beyond the bond site 122, as was discussed above with reference to FIG. 1I. As is also shown in FIG. 3, more of the second surface 103 of the workpiece 300 can be removed via a backgrinding process or other process than in the arrangement shown in FIG. 2K, to expose the conductive compound 140 within the via 130. An appropriate bond pad 310 can be formed at the exposed second end 143 of the interconnect structure 360 to prevent oxidation or another undesirable chemical reaction at the exposed second end 143 of the conductive compound 140. The processing environment during the backgrinding process can be controlled by the introduction of a suitable gas to prevent such reactions. In other embodiments, the backgrinding process can stop at other locations within the via (e.g., at the barrier layer 133).
Particular embodiments of the foregoing processes were described in the context of a reaction between copper and sulfur hexafluoride to form a copper sulfide. In other embodiments, the process can include other “sulfiding” reactions. For example, other metals (Ni, Sn, Co, Zn or Fe) can be reacted with an SF6 plasma to form corresponding sulfides (NiS, SnS2, CoS, ZnS, or FeS/FeS2, respectively). In further embodiments, other non-sulfiding reactions can be used to form other suitable compounds. Suitable compounds include borides, phosphides, and silicides. For example, metals such as Ni or Fe can be exposed to a BF3 or B2H6 plasma to form Ni2B/Ni3B or FeB, respectively. In still further embodiments, metals can be exposed to a PF5 or PH3 plasma to form FeP/Fe2P/Fe3P, Ni2P, Co2P or Zn3P2. A SiH4 plasma can be used to form Ni2 Si/NiSi2, Cu5Si or CoSi2. In still further embodiments, the processes can include other reactions between conductive elements or compounds, and suitable reactive plasmas or other chemistries.
From the foregoing, it will be appreciated that specific embodiments of the invention have been described herein for purposes of illustration, but that various modifications may be made without deviating from the invention. For example, structures and/or processes described in the context of particular embodiments may be combined or eliminated in other embodiments. In particular, other embodiments can include other conductive compounds and/or conductive compounds formed from other constituents than those specifically described above. The connections between the interconnect structure and other devices (e.g., bond pads, conductive couplers and/or external devices) can have arrangements different than those described above. Accordingly, the invention is not limited except as by the appended claims.

## Claims

1. A method for forming a conductive interconnect structure in a microfeature workpiece, comprising:
forming a via in a microfeature workpiece;
disposing a copper lining on walls of the via, the copper lining bordering a space located between portions of the copper lining on opposing portions of the wall, the space having a cross-sectional dimension and a length generally transverse to the cross-sectional dimension;
reacting the copper lining with a sulfur-containing reactive material to form copper sulfide; and
filling the cross-sectional dimension of the space with the copper sulfide over generally the entire length of the space in the via to form the conductive interconnect structure.

2. The method of claim 1, further comprising controlling an amount of copper in the copper lining to achieve a desired conductivity in the via filed with the formed copper sulfide.

3. The method of claim 1, wherein reacting the copper lining includes exposing the copper lining to sulfur hexafluoride.

4. The method of claim 3 wherein filling the cross-sectional dimension of the space includes reacting the sulfur hexafluoride with the copper lining.

5. The method of claim 3 wherein reacting the copper lining includes reacting the sulfur hexafluoride with the copper lining, and consuming less than all the copper in the copper lining.

6. The method of claim 3 wherein reacting the copper lining includes reacting the sulfur hexafluoride with the copper lining, and consuming all the copper in the copper lining.

7. The method of claim 1 wherein forming the via includes forming a blind via that extends through less than the entire thickness of the microfeature workpiece, and wherein filling the cross-sectional dimension of the space includes at least partially filling the space without first opening a vent hole at a blind end of the via.

8. The method of claim 1 wherein filling the cross-sectional dimension of the space includes at least partially filling the space without a flux being present in the space.

9. The method of claim 1 wherein the microfeature workpiece has a first surface and a second surface facing opposite from the first surface, and wherein the via is formed in the first surface, further wherein the method further comprises removing material from the second surface to expose the copper sulfide in the opening.

10. The method of claim 9, further comprising forming a conductive bond pad at the second surface, the conductive bond pad being in electrical communication with the copper sulfide.

11. The method of claim 1, farther comprising exposing the copper lining to a sulfur hexafluoride plasma.

12. The method of claim 11, further comprising using a reducing plasma to remove copper oxides from the copper lining.

13. The method of claim 12, further comprising removing the copper oxides before exposing the copper lining to sulfur hexafluoride.

14. The method of claim 12, further comprising removing the copper oxides while exposing the copper lining to sulfur hexafluoride.

15. The method of claim 1 wherein the microfeature workpiece includes a conductive bond pad adjacent to the via, and wherein the method further comprises protecting the conductive bond pad while at least partially filling the space with copper sulfide.

16. The method of claim 1 wherein the microfeature workpiece includes a conductive bond pad adjacent to the via, and wherein the method further comprises exposing a portion of the copper lining overlying the conductive bond pad while exposing the copper lining within the via to a sulfur-containing compound.

17. A method for forming a conductive interconnect structure in a microfeature workpiece, comprising:
disposing a conductive lining on walls of a via in a microfeature workpiece, the conductive lining bordering a space located between portions of the lining facing toward each other from opposing portions of the wall, wherein the conductive lining contains a conductive material;
chemically reacting the lining with a reactive material to form a chemical compound from a constituent of the reactive material and the conductive material of the lining;
substantially filling the space with the chemical compound to form the conductive interconnect structure; and
controlling an amount of the conductive material in the conductive lining to achieve a desired conductivity in the formed conductive interconnect structure.

18. The method of claim 17 wherein chemically reacting includes chemically reacting at a temperature of about 60° C. or below.

19. The method of claim 17, further comprising forming the via in the microfeature workpiece, the via extending entirely through the microfeature workpiece.

20. The method of claim 17, further comprising forming the via in the microfeature workpiece, the via extending through less than the entire thickness of the microfeature workpiece, and wherein reacting the lining includes reacting the lining without first opening a vent hole at a blind end of the via.

21. The method of claim 17 wherein chemically reacting the lining includes chemically reacting the lining with a chemical that includes sulfur.

22. The method of claim 17 wherein chemically reacting the lining with a reactive material includes reacting the lining with a plasma.

23. The method of claim 17 wherein chemically reacting the lining includes chemically reacting the lining with a chemical that includes fluorine.

24. The method of claim 17 wherein chemically reacting the lining includes chemically reacting the lining with a chemical that includes at least one of boron, phosphorus, silicon and hydrogen.

25. The method of claim 17 wherein chemically reacting the lining includes chemically reacting a lining that includes at least one of copper, nickel, tin, cobalt, zinc and iron.

26. The method of claim 17 wherein chemically reacting the lining with a reactive material includes reacting copper with the reactive material.

27. The method of claim 17 wherein chemically reacting the lining with a reactive material includes reacting copper with a sulfur hexafluoride plasma.

28. The method of claim 17 wherein the lining includes a first conductive layer containing the conductive material, a second conductive layer adjacent to the first conductive layer, and a third conductive layer that also contains the conductive material, and wherein the method further comprises consuming all the conductive material in the third layer to form the compound, and halting a reaction between the reactive material and the lining by exposing the second layer.

29. A method for forming a conductive interconnect structure in a microfeature workpiece, comprising:
disposing a conductive lining on walls of a via in a microfeature workpiece, the conductive lining bordering a space located between portions of the lining facing toward each other from opposing portions of the wall, wherein the conductive lining contains copper;
reacting a plasma with the lining to form a copper compound from a constituent of the plasma and the copper of the conductive lining;
substantially filling the space with the copper compound to form the conductive interconnect structure; and
controlling an amount of the copper in the conductive lining to achieve a desired conductivity in the formed conductive interconnect structure.

30. The method of claim 29 wherein reacting a plasma includes reacting a sulfur hexafluoride plasma.

31. The method of claim 29 wherein reacting a plasma includes reacting a plasma with a copper lining.

32. The method of claim 29 wherein reacting a plasma includes reacting a sulfur hexafluoride plasma with a copper lining.

33. The method of claim 29 wherein disposing a conductive lining includes disposing a conductive lining in a blind via that extends through less than the entire thickness of the microfeature workpiece, and wherein reacting the plasma with the lining includes reacting the plasma without first opening a vent hole at a blind end of the via.

34. The method of claim 29 wherein at least partially filling the space includes at least partially filling the space without a flux being present in the opening.

35. A method for forming a conductive interconnect structure in a semiconductor substrate, comprising:
disposing a layer of a conductive material in a via of the microfeature workpiece, the via extending into the microfeature workpiece for a length;
chemically reacting at least a portion of the conductive material in the layer with a reactive material to form a chemical compound;
filling the via with the chemical compound for generally the entire length of the via to form the conductive interconnect structure; and
selecting an amount of the conductive material in the layer to achieve a desired conductivity in the conductive interconnect structure.

36. The method for claim 35 wherein:
disposing a layer of a conductive material includes disposing a layer of copper in the via of the microfeature workpiece;
chemically reacting at least a portion of the conductive material includes chemically reacting at least a portion of the copper in the layer with a reactive material containing sulfur hexafluoride to form a chemical compound that includes at least one of copper sulfide, dicopper sulfide, and enneacopper pentasulfide; and
selecting an amount of the conductive material includes
selecting the amount of the copper such that a portion of the copper remains after chemically reacting with the reactive material; and
providing the desired conductivity in the conductive interconnect structure with the remaining copper and the chemical compound in the via.

37. The method for claim 35 wherein:
disposing a layer of a conductive material includes disposing a layer of copper in the via of the microfeature workpiece;
chemically reacting at least a portion of the conductive material includes chemically reacting at least a portion of the copper in the layer with a reactive material containing sulfur hexafluoride to form a chemical compound that includes at least one of copper sulfide, dicopper sulfide, and enneacopper pentasulfide; and
selecting an amount of the conductive material includes
selecting the amount of the copper in the layer such that the copper is completely consumed after chemically reacting with the reactive material; and
providing the desired conductivity in the conductive interconnect structure with only the chemical compound in the via.

38. The method for claim 35 wherein selecting an amount of the conductive material includes selecting the amount of the conductive material such that a portion of the conductive material remains after chemically reacting with the reactive material, the remaining conductive material and the chemical compound in the via providing the desired conductivity in the conductive interconnect structure.

39. The method for claim 35 wherein selecting an amount of the conductive material includes selecting the amount of the conductive material such that the conductive material is generally completely consumed after chemically reacting with the reactive material, the chemical compound in the via alone providing the desired conductivity in the conductive interconnect structure.

40. The method for claim 35 wherein:
disposing a layer of a conductive material includes disposing a first layer of the conductive material approximate to a second layer of the conductive material in the via of the microfeature workpiece;
selecting an amount of the conductive material includes
selecting the amount of the conductive material in the first layer such that the conductive material is completely consumed after chemically reacting with the reactive material; and
providing the desired conductivity in the conductive interconnect structure with the second layer of the conductive material and the chemical compound in the via.

41. The method for claim 35 wherein: disposing a layer of a conductive material includes disposing a first layer of the conductive material approximate to a second layer of the conductive material in the via of the microfeature workpiece;
selecting an amount of the conductive material includes
selecting the amount of the conductive material in the first layer such that a portion of the conductive material in the first layer remains after chemically reacting with the reactive material; and
providing the desired conductivity in the conductive interconnect structure with the conductive material in the second layer, the remaining conductive material in the first layer, and the chemical compound in the via.