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EXHIBIT 10.30
 Agreement And Plan Of Merger
  Advanced Technology Materials, Inc.,
 ATMI Acquisition Corp.,
 LevTech, Inc.
  Certain Stockholders  of  LevTech, Inc.




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TABLE OF CONTENTS
 PageARTICLE 1 MERGER
    
    
    21.1
    
    The Merger
    
    
    21.2
    
    Closing
    
    
    21.3
    
    Effective Time
    
    
    21.4
    
    Effects of the Merger
    
    
    21.5
    
    Certificate of Incorporation
    
    
    21.6
    
    Bylaws
    
    
    21.7
    
    Officers and Directors
    
    
    31.8
    
    Effect on Capital Stock
    
    
    31.9
    
    Company Stock Options and Company Warrants
    
    
    41.10
    
    Certain Adjustments
    
    
    51.11
    
    Escrow Agreement
    
    
    51.12
    
    Paying Agent
    
    
    61.13
    
    Payment Procedures
    
    
    61.14
    
    Undistributed Merger Consideration
    
    
    71.15
    
    No Liability
    
    
    71.16
    
    Investment of Merger Consideration
    
    
    71.17
    
    Lost Certificates
    
    
    71.18
    
    Withholding Rights
    
    
    71.19
    
    Further Assurances
    
    
    81.20
    
    Stock Transfer Books
    
    
    81.21
    
    Appraisal Shares
    
    
    8ARTICLE 2 REPRESENTATIONS AND WARRANTIES OF THE COMPANY
    
    
    92.1
    
    Organization, Good Standing and Qualification of the Company
    
    
    92.2
    
    Power and Authority
    
    
    92.3
    
    Binding Effect
    
    
    102.4
    
    No Violation; Consents
    
    
    102.5
    
    Capitalization
    
    
    102.6
    
    No Subsidiaries; Directors and Officers; Books and Records
    
    
    112.7
    
    Financial Statements
    
    
    122.8
    
    Liabilities; Guaranties
    
    
    122.9
    
    Personal Property and Assets
    
    
    132.10
    
    Real Property
    
    
    132.11
    
    Intellectual Property
    
    
    142.12
    
    No Material Adverse Change
    
    
    152.13
    
    Litigation
    
    
    162.14
    
    Tax Matters
    
    
    162.15
    
    Environmental
    
    
    182.16
    
    Brokers Fees
    
    
    192.17
    
    Benefit Plans
    
    
    192.18
    
    Employees
    
    
    202.19
    
    Compliance With Laws and Orders
    
    
    20
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Page2.20
    
    Contracts
    
    
    212.21
    
    Licenses
    
    
    232.22
    
    Insurance
    
    
    232.23
    
    Affiliate Transactions
    
    
    242.24
    
    Solvency
    
    
    242.25
    
    Closing Indebtedness/Liabilities
    
    
    24ARTICLE 3 REPRESENTATIONS AND WARRANTIES OF ATMI AND ATMI SUB
    
    
    243.1
    
    Organization
    
    
    243.2
    
    Corporate Power
    
    
    253.3
    
    Authority
    
    
    253.4
    
    No Violation
    
    
    253.5
    
    Litigation
    
    
    253.6
    
    Available Funds
    
    
    263.7
    
    Operation of ATMI Sub
    
    
    26ARTICLE 4 INDEMNIFICATION
    
    
    264.1
    
    Survival of Representations and Warranties
    
    
    264.2
    
    Indemnification Obligations
    
    
    264.3
    
    Exclusive Remedy
    
    
    28ARTICLE 5 MISCELLANEOUS PROVISIONS
    
    
    295.1
    
    Entire Agreement
    
    
    295.2
    
    Governing Law
    
    
    295.3
    
    Schedules
    
    
    295.4
    
    Waiver and Amendment
    
    
    295.5
    
    Assignment
    
    
    305.6
    
    Successors and Assigns
    
    
    305.7
    
    No Third Party Beneficiaries
    
    
    305.8
    
    Personal Liability
    
    
    305.9
    
    Notices
    
    
    305.10
    
    Severability
    
    
    315.11
    
    Counterparts
    
    
    325.12
    
    No Presumption
    
    
    325.13
    
    Facsimile Signatures
    
    
    325.14
    
    Fees and Expenses
    
    
    32ARTICLE 6 DEFINITIONS
    
    
    336.1
    
    Definitions
    
    
    336.2
    
    Interpretation
    
    
    38
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EXHIBITS
 Exhibit A
    
    Form of Amended and Restated Certificate of Incorporation of the
Surviving CorporationExhibit B
    
    Form of Escrow Agreement to be executed and delivered by ATMI,
the Company and the Stockholder Representative
 i




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AGREEMENT AND PLAN OF MERGER
 Agreement ATMI Sub ATMI Company Designated
Stockholder Designated Stockholders Party Parties
 RECITALS
 DGCL Merger
  Company Stock Company Stockholders
   1




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AGREEMENT
 ARTICLE 1
MERGER
 The Merger
 DGCL Surviving Corporation
 Closing
 Closing
 Effective Time
 Certificate of Merger Effective Time
 Effects of the Merger
  Certificate of Incorporation
 Exhibit A
 Bylaws
  2




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Officers and Directors
  Effect on Capital Stock
  Section 1.8(b) Section 1.21 Common Stock Merger
Consideration Section 1.11
  Section
1 21 Series A Merger Consideration Section 1.11
  3




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Company Stock Options and Company Warrants
  Company Warrants Warrant Payment Section 1.11
 Company Stock Options Option Payment Section 1.11
   4




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Section
1.9 Section 1.9
 Certain Adjustments
  Escrow Agreement
 Sections 1.9(a) and
1.9(b) Warrant and Option Payments Escrow Amount Exhibit B Escrow Agreement Escrow Fund Section 1.8 Section 1.9 Escrow Period Article 10
 5




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Paying Agent
 Paying Agent Section 1.8(a) Section 1.8(c) Article
1 Aggregate Payable Merger
Consideration
 Payment Procedures
 Section 1.8(a) Section 1.8(c) Certificates
 6




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Undistributed Merger Consideration
 Section 1.12 Article 1 Section 1.8(a) Section 1.8(c) Article 1 Section 1.12
 No Liability
  Investment of Merger Consideration
 Section 1.12 provided Section
1.8(a) Section 1.8(c) Article 1
 Lost Certificates
  Withholding Rights
  7




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Further Assurances
  Stock Transfer Books
 Article 1
 Appraisal Shares
 Appraisal Shares Section 1.8(a) Section 1.8(c)
 8




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Article 1 Section 1.12 Article 1
 ARTICLE 2
REPRESENTATIONS AND WARRANTIES OF THE COMPANY
 Company Schedules
 Organization, Good Standing and Qualification of the Company
  Power and Authority
 Related Agreements
 9




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Binding Effect
  No Violation; Consents
   Schedule 2.4(b)
 Governmental or Regulatory
Authority
 Schedule 2.4(d) Required
Consents
 Capitalization
  10




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Schedule 2.5(a)
 Schedule 2.5(b)
 Schedule 2.5(c)
 Schedule 2.5(d)
 No Subsidiaries; Directors and Officers; Books and Records
  Schedule 2.6(b)
  11




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Financial Statements
 Schedule 2.7(a) Audited
Financial Statements Interim
Financial Statements Financial Statements
 Section 2.7(a)
 Liabilities; Guaranties
 Schedule 2.8
 12




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Personal Property and Assets
 Permitted Liens
 Real Property
 Schedule
2.10(a) Leased Real Property Easements
 Property
Leases
 Schedule 2.10(c)
 13




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Schedule 2.10(c)
 Intellectual Property
 Schedule 2.11(a) Schedule 2.11(a) Company
Intellectual Property
 Schedule 2.11(a)
  Schedule 2.11(d)
  Schedule 2.11(f)
 14




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Schedule 2.11(j)
 Schedule 2.11(k)
 Schedule 2.11(l)
 Schedule 2.11(m)
  No Material Adverse Change
 Schedule 2.12
  15




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Litigation
 Schedule 2.13 Schedule 2.13
 Tax Matters
 Schedule 2.14(a)
 16




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Section 2.14(a) Schedule
2.14(b)
      17




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Environmental
   Environmental
Authorizations
   18




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Brokers Fees
 Schedule 2.16
 Benefit Plans
 ERISA Schedule 2.17(a) Company Plans Schedule 2.17(a)
 19




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Schedule 2.17(c) Article 6
 Employees
 Schedule 2.18
 Compliance With Laws and Orders
  20




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Contracts
 Schedule 2.20(a) Schedule 2.20(a) Contracts
       21




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22




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Schedule 2.20(a)
 Licenses
 Schedule 2.21
 Licenses
    Insurance
 Schedule 2.22 Company Insurance Policies Schedule 2.22
 23




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Affiliate Transactions
 Schedule 2.23
 Solvency
  Closing Indebtedness/Liabilities
 Schedule 2.25
 ARTICLE 3
REPRESENTATIONS AND WARRANTIES OF ATMI AND ATMI SUB
  Organization
  24




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Corporate Power
  Authority
  No Violation
  Litigation
  25




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Available Funds
 Article 1
 Operation of ATMI Sub
  ARTICLE 4
INDEMNIFICATION
 Survival of Representations and Warranties
 provided however Sections 2.3, 2.4 and 2.5 Specified
Representations
 Indemnification Obligations
 Indemnification by Company Stockholders and Holders of Company Warrants and
Company Stock Options Company Indemnitors ATMI Indemnified Parties Article 2
 26




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Indemnification by the Surviving Corporation Company
Indemnified Parties Article 3
 Limitations on Liability
 Section 4.2(a) Section 2.25 Article 4
 Section 4.2(b) Section 1.18
 Claims for Indemnity
 Defense of Third Party Claims
 27




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Exclusive Remedy
 Article 4
 28




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ARTICLE 5
MISCELLANEOUS PROVISIONS
 Entire Agreement
  Governing Law
 Section 5.9
 Schedules
  Waiver and Amendment
  29




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Assignment
  Successors and Assigns
  No Third Party Beneficiaries
  Personal Liability
  Notices
   
 with a copy to:
 
 30




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with a copy to:
 
  
 with a copy to:
 
 Section
5.9
 Severability
  31




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Counterparts
  No Presumption
  Facsimile Signatures
  Fees and Expenses
  32




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ARTICLE 6
DEFINITIONS
 Definitions
  Agreement
 Affiliate
 Aggregate Merger Consideration
 Aggregate Payable Merger Consideration Section 1.12
 Appraisal Shares Section 1.21
 ATMI
 ATMI Indemnified Parties Section 4.2(a)
 ATMI Sub
 Audited Financial Statements Section 2.7(a)
 Certificates Section 1.13
 Closing Section 1.2
 Code Section 1.18
 Common Stock Merger Consideration Section
1.8(a)
 Company
 Company Common Stock
 Company Indemnified Parties Section 4.2(b)
 33




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Company Indemnitors Section 4.2(a)
 Company Insurance Policies Section 2.22
 Company Intellectual Property Section 2.11
 Company Plans Section 2.17(a)
 Company Schedules Section 2
 Company Series A Preferred Stock
 Company Stock Paragraph C
 Company Stock Options Section 1.9(b)
 Company Stock Plan
 Company Stockholders Paragraph C
 Company Warrants Section 1.9(a)
 Contracts Section 2.20(a)
 Damages
 Designated Stockholders
 DGCL Paragraph A
 Easement Section 2.10(a)
 Effective Time Section 1.3
 Employee
 Encumbrance
 34




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Environmental Authorizations Section
2.15(a)(ii)
 Environmental Claims
 Environmental Law
 ERISA Section 2.17(a)
 Escrow Agreement Section 1.11
 Escrow Amount Section 1.11
 Escrow Fund Section 1.11
 Escrow Period Section 1.11
 Financial Statements Section 2.7(a)
 GAAP
 Governmental Authority
 Governmental or Regulatory Authority Section
2.4(c)
 Hazardous Materials
 Indemnified Party
 Indemnifying Party Article 4
 35




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Intellectual Property
 Interim Financial Statements Section 2.7(a)
 Knowledge
 Laws
 Leased Real Property Section 2.10(a)
 Liability
 Licenses Section 2.21(a)
 Lien
 Material Adverse Effect
 36




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Merger Paragraph A
 Organizational Documents
 Ordinary Course
 Party Parties
 Paying Agent Section 1.12
 Permitted Encumbrances
 Permitted Liens Section 2.9
 Person
 Property Leases Section 2.10(b)
 Related Agreements Section 2.2
 Required Consents Section 2.4(d)
 Series A Merger Consideration Section 1.8(c)
 Specified Representations Section 4.1
 Surviving Corporation Section 1.1
 37




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Tax(es)
 Tax Return
 Taxing Authority
 Trade Secret
 Warrant and Option Payments
 Interpretation
      38




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[Remainder of Document Left Intentionally Blank]
 39




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ATMI ACQUISITION CORP.
    
    
    
    ADVANCED TECHNOLOGY MATERIALS, INC.By:
    
    
    
    
    
    By:Name:


    
    
    
    
    Name:Title:
    
    
    
    
    
    Title:LEVTECH, INC.By:Name:Title:
 Signature Page to Agreement and Plan of Merger




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DESIGNATED STOCKHOLDERSAlexandre TerentievJeffrey L. CraigPhilip M. Mantey Signature
Page to Agreement and Plan of Merger Cont.